HPFS® Fused Silica Standard Grade

Semiconductor
Optics

HPFS® Standard Grade, Corning code 7980, is a high purity synthetic amorphous silicon dioxide manufactured byflame hydrolysis. The noncrystalline, colorless, silica glass combines a very low thermal expansion coefficient withexcellent optical qualities and exceptional transmittance in the ultraviolet. It is available in a number of grades fordifferent applications.
In order to satisfy the challenging quality requirements of our customers in leading edge applications such as
microlithography, Corning is dedicated to continuous improvement. Our investments in research and development,
combined with Corning’s quality systems, support our technology leadership position and ensure that we meet ourcustomer’s requirements on time, every time.
Quality Grade Selection Chart — HPFS® Standard Grade

Corning defines and certifies the quality of HPFS® glass using two criteria: inclusions and homogeneity grade.
Homogeneity3,4 ppm

Inclusion ClassClass

Maximum2
Total Inclusion1
Cross Section [mm ] Size [mm]≤ 0.030.10≤ 0.100.28≤ 0.250.50≤ 0.500.76≤ 1.001.00≤ 2.001.27
2012345GradeAA≤ 0.5■

A
≤1B
≤ 1.5C≤2D≤3E≤4F≤5G5NS

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NOTES:
1. Defines the sum of the cross section in mm2 of inclusions per 100 cm3 of glass. Inclusions with a diameter ≤ 0.10 mm
are disregarded.
2. Refers to the diameter of the largest single inclusion.
3. Index homogeneity: the maximum index variation (relative), measured over the clear aperture of the blank.
4. Index homogeneity is certified using an interferometer at 632.8 nm. The numerical homogeneity is reported as the averagethrough the piece thickness. Blanks with a diameter up to 450 mm can be analyzed over the full aperture. Larger parts canbe analyzed using multiple overlapping apertures. The minimum thickness for index homogeneity verification is 20 mm.
For thinner parts, the parent piece is certified.
5. NS (not specified)Mechanical and Thermal Properties:

Unless otherwise stated, all values @ 25ºC
Elastic (Young’s) Modulus
Shear Modulus
Modulus of Rupture, abraded
Bulk Modulus
Poisson’s RatioDensity
Knoop Hardness (100 g load)

72.7 GPa
31.4 GPa52.4 MPa
35.4 GPa
0.16
2.201 g/cm3
522 kg/mm2

Softening Point
Annealing Point
Strain Point
Thermal Conductivity
Thermal Diffusivity
Average C.T.E.

1585 ºC (107.6 poises)1042 ºC (1013 poises)
893 ºC (1014.5 poises)
1.30 W/m K
0.0075 cm2/s
0.52 ppm/K
5 ºC-35 ºC
0.57 ppm/K
0 ºC-200 ºC
0.48 ppm/K–100 ºC-200 ºC

Chemical Durability and Impurities

Solution
5% HCL by weight
5% NaOH
0.02N NA2CO3
0.02N H2SO4
Deionized H2O10% HF by weight
10% NH4F*HF by weight@95 ºC@95 ºC@95 ºC@95 ºC@95 ºC@25 ºC@25 ºCTimeWeight Loss
[mg/cm2]

24 h6h6h
24 h
24 h
20 m
20 m

<0.0100.453
0.065<0.010
0.015
0.230
0.220

Impurities
OH content (by weight): 800-1000 ppm
Impurities other than OH: ≤ 1000 ppb

Internal Transmittance

HPFS® Standard Grade is certified to meet
T external ≥ 80%/cm@185nm (T internal ≥88%/cm@185nm), when measured througha polished, uncoated sample. A typicalinternal transmittance curve for HPFS®
Standard Grade fused silica is shown here.

100

Ti [%/cm]

80
60
40
2000500

1000

1500

2000

2500

wavelength [nm]

3000

3500

4000

Refractive Index and Dispersion

Data in 22ºC in 760mm Hg dry nitrogen gas
Wavelength[air]
λ [nm]

RefractiveIndex *2n

ThermalCoefficient
Δn/ΔT*3 (ppm/K)

1128.64
1064.00
1060.00
1013.98 nt
852.11 ns
706.52 nr
656.27 nC
643.85 nC´
632.80 nHe-Ne
589.29 nD
587.56 nd
546.07 ne
486.13 nF
479.99 nF´
435.83 ng
404.66 nh
365.01 ni
334.15312.57308.00248.30248.00214.44206.20194.17193.40193.00184.891.448870
1.449633
1.449681
1.450245
1.452469
1.455149
1.456370
1.456707
1.457021
1.458406
1.458467
1.460082
1.463132
1.463509
1.466701
1.469628
1.474555
1.479785
1.484514
1.485663
1.508433
1.508601
1.533789
1.542741
1.559012
1.560208
1.560841
1.575131

9.6
9.6
9.6
9.6
9.7
9.9
9.9
10.0
10.0
10.1
10.1
10.2
10.4
10.4
10.6
10.8
11.2
11.6
12.0
12.1
14.2
14.2
17.018.1
20.4
20.5
20.6
22.7

Polynomial Dispersion Equation Constants*1A0A1A2A3A4A5A6A72.104025406-1.456000330 x 10-4-9.049135390 x 10-3
8.801830992 x 10-3
8.435237228 x 10-5
1.681656789 x 10-6-1.675425449 x 10-88.326602461 x 10-10

Sellmeier Dispersion Equation Constants *2
B1B2
B3
C1C2
C3

0.68374049400
0.42032361300
0.58502748000
0.00460352869
0.01339688560
64.49327320000

Δn/ΔT Dispersion Equation Constants *3C0C1C2C3

9.390590
0.235290-1.318560 x 10-3
3.028870 x 10-4

Other Optical Properties

νdνenF-nCnF´ -nC´
Stress Coefficient
StriaeBirefringence

67.79
67.64
0.006763
0.00680235.0 nm/cm MPa
ISO 10110-4 Class
5/Thickness Direction≤ 1nm/cm,
lower specifications available*1 Polynomial Equation: n2 = A0 + A1 λ4 + A2 λ2 + A3 λ-2 + A4 λ-4 +A5 λ-6 + A6 λ -8 + A7 λ-10 with λ in µm*2 Sellmeier Equation: n2-1 = B1 λ2/(λ2-C1) + B2 λ2/(λ2-C2) + B3 λ2/(λ2-C3) with λ in µm*3 Δn/ΔT Equation (20–25ºC) = C0 + C1 λ-2 + C2 λ-4 + C3 λ-6 with λ in µm

We are here to help you specify the best product for your application. For further information,please contact:
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The information contained hereinis based upon data considered
to be accurate. However, nowarranty is expressed or implied
regarding the performance of thisproduct. The only applicablewarranties are those that are set
out in a contract or purchase.

© Corning Incorporated 2003
HPFS® is a registered trademarkof Corning Incorporated.
www.corning.com
September 30, 2003