‫ܭ‬ଌࣗಈ੍‫ֶޚ‬ձ౦๺ࢧ෦ ୈ 265 ճ‫ूڀݚ‬ձ (2011.6.28)
ࢿྉ൪߸ 265-17‫ݦ‬ඍ‫ڸ‬ԼϚΠΫϩϚχϐϡϨʔγϣϯͷͨΊͷ‫ٿ‬໘ؔઅ‫ߏػ‬ͷ։ൃ
Development of a spherical joint mechanism
for micromanipulation under a microscope˓༉઒ॣɼ෱ాᚸɼ‫ؠ‬୩༃˓ Shun Aburakawa, Makoto Fukuda, Yasushi Iwatani߂લେֶHirosaki UniversityΩʔϫʔυ : ϚΠΫϩϚχϐϡϨʔγϣϯ (micromanipulation)ɼ‫ٿ‬໘ؔઅ (spherical joint)ɼϫΠϠ‫ۦ‬ಈ‫( ߏػ‬wire-driven mechanism)ɼώεςϦγε (hysteresis)ɼϏδϣϯ (vision)࿈བྷઌ : ˟ 036-8561 ੨৿‫߂ݝ‬લࢢจ‫ژ‬ொ 3ɼ߂લେֶ େֶӃཧ޻ֶ‫ڀݚ‬Պ‫ؠ‬୩༃ɼTel.: (0172)39-3697ɼFax.: (0172)39-3697ɼE-mail: iwatani.at.cc.hirosaki-u.ac.jp1.

ΑΓճసಈ࡞Λ࣮‫͢ݱ‬Δɽຊ‫Ͱڀݚ‬͸ɼैདྷ‫ܕ‬͸͡Ίʹ‫ػ‬ց੡඼ͷখ‫ܕ‬ԽɾߴੑೳԽ͕ਐΉதͰɼඍখ෦඼ͷՃ޻ɾ૊ΈཱͯɾϋϯυϦϯάʹରͯ͠ɼߴਫ਼౓ͳҐஔܾΊ੍‫ٕޚ‬ज़͕ཁ‫͞ٻ‬Ε͍ͯΔɽҰྫͱͯ͠ɼޫ௨৴Λޮ཰Խ͢ΔͨΊͷ߹෼೾Ϟδϡʔϧ 1) ಺ͷޫϑΝΠόΞϨΠͱϚΠΫϩϨϯζΞϨΠͷΞηϯϒϧΛߟ͑Δɽෳ਺ͷԁपࢧ࣋‫ؔܕ‬અ‫ʹߏػ‬ରͯ͠ࡾ఺ࢧ࣋‫ٿܕ‬໘ճసؔઅ‫ߏػ‬Λ։ൃ͠ɼೋͭͷճస‫ʹߏػ‬ରͯ͠ɼճసಈ࡞ͷൺֱ‫ূݕ‬Λߦ͏ɽ

2.

ϚχϐϡϨʔλ‫ߏػ‬ͷޫϑΝΠόઌ୺෦Λ·ͱΊͨޫϑΝΠόΞϨຊ‫࡯ߟͰڀݚ‬ͷର৅ͱ͢ΔϚχϐϡϨʔλ‫ػ‬ߏ 2, 3) Λ Fig. 1 ʹࣔ͢ɽ͜ͷϚχϐϡϨʔλΠʹରͯ͠ɼूޫϨϯζ͕௚ઢঢ়ʹฒΜͩϚΠ͸ɼฒਐํ޲ 3 ࣠ʢX, Y , Z ࣠ʣͱճసํ޲ΫϩϨϯζΞϨΠΛਫ਼౓Α͘ҐஔܾΊ͢Δ͜ͱ

2 ࣠ʢα, β ࣠ʣͷಈ࡞͕Մೳͳ 5 ࣠ͷϚχϐϡʹΑΓ೾௕ͷҟͳΔϑΝΠόޫΛूޫ͢Δ͜ͱ͕ՄೳͱͳΔɽϨʔλͰ͋Δɽ·ͨɼΤϯυΤϑΣΫλͱͯ͠άϦοϓΛ༗͠ɼඍখ෦඼ͷ೺࣋ಈ࡞͕ՄೳͱචऀΒ͸ɼඍখ෦඼ͷϋϯυϦϯά‫͠ͱߏػ‬ͯɼ‫ݦ‬ඍ‫ڸ‬ԼͰಈ࡞͢Δ 5 ࣠ͷϚχϐϡϨʔλΛ։ൃ͖ͯͨ͠ 2, 3) ɽ5 ࣠ͷ͏ͪ 3 ࣠͸௚ಈؔઅʹΑΓಈ࡞͠ɼ3 ࣍‫͚͓ʹۭؒݩ‬ΔฒਐӡಈΛՄೳʹ͢Δɽ࢒Γͷ 2 ࣠͸ɼ‫ٿ‬໘ճసؔઅʹͳ͍ͬͯΔɽৄࡉ͸࣍ষͰड़΂Δ͕ɼճసಈ࡞͸ɼα ࣠ͱ β࣠ͷճసத৺͕ಉҰͰ͋Δ‫ٿ‬໘ؔઅ‫ʹߏػ‬Αͬͯୡ੒͞ΕΔɽ͜ͷ 2 ࣠͸ɼεςʔδ֎ʹઃஔ͞ΕͨεςοϐϯάϞʔλͱɼϫΠϠʹΑΔྗ

–1–Fig. 1 ɹ Manipulator with a spherical joint.
఻ୡ‫ʹߏػ‬ΑΓಈ࡞͢Δɽ

3.

‫ٿ‬໘ؔઅ‫ߏػ‬ԁपࢧ࣋‫ؔܕ‬અ‫ٿܕ࣋ࢧ఺ࡾͱߏػ‬໘ճసؔઅ‫ߏػ‬ͷೋͭͷճస‫ߏػ‬ʢFig. 2ʣʹରͯ͠ɼճసಈ࡞ͷൺֱ‫ূݕ‬Λߦ͏ɽԁपࢧ࣋‫ٿܕ‬໘ؔઅ͸ɼճసؔઅͰ͋Δճస

Fig. 2 ɹ Spherical joint mechanisms.

‫ٿ‬Λೋͭͷԁ౵ঢ়ͷࢧ࣋۩Ͱࢧ͑Δ‫ߏػ‬Λ༗͢Δɽ಺ଆͷ‫͑ࢧٿ‬෦඼ʹ͸࢛ͭͷࢳ௨͕݀͠ઃ

μm ʹରͯ͠ 1 μm ·Ͱͷ‫ࠩޡ‬Λ‫ڐ‬༰Ͱ͖Δ͚͜ΒΕ͍ͯΔɽ·ͨɼճస‫ٿ‬த৺ʹ͸ɼͶ݀͡ͱ͔Βɼtan−1 (1/240) Ͱ‫ٻ‬ΊΒΕΔɽ͕͋ΓɼதۭͶ͡Λઃஔ͢ΔɽதۭͶ͡ΛҰͭͷ୺఺ͱͯ͠ɼ֤ࢳ௨݀͠Λ௨ͯ͠ҰຊͷϫΠϠ͕εςοϐϯάϞʔλʹ઀ଓ͞Ε͍ͯΔɽ͜

4.

࣮‫ݧ‬ͷ‫ʹߏػ‬ΑΓɼϫΠϠΛ఻ୡ‫ͯ͠ͱߏػ‬ɼεςοɹޫϑΝΠόΞϨΠʹର͢ΔϚΠΫϩϨϯζ

ϐϯάϞʔλʹΑΓճసಈ࡞͕ୡ੒͞ΕΔɽΞϨΠͷҐஔܾΊ੍‫ޚ‬໰୊Λ૝ఆ͠ɼ2.5 ഒࢹ໺ࡾ఺ࢧ࣋‫ٿܕ‬໘ؔઅͰ͸ɼԁपࢧ࣋‫ٿܕ‬໘ؔͷ‫ݦ‬ඍ‫ڸ‬ԼͰ α ࣠ճసಈ࡞ͷ‫ݧ࣮ূݕ‬Λߦ͏ɽઅ‫ʹߏػ‬ճస‫ͱٿ‬ԁ౵ঢ়ࢧ࣋۩ͷؒʹࡾͭͷࢧ࣋‫ٿ‬Λ഑ஔ͠ɼճస‫ٿ‬Λࡾ఺ࢧ࣋ʹΑΓࢧ͑Δɽ

4.1֤‫͢༻࢖Ͱߏػ‬Δճస‫ٿ࣋ࢧͱٿ‬͸ɼͦΕͧΕ௚‫ ܘ‬5 mmɼ0.5 mm ͷ SUS ‫ٿ‬Λ࢖༻͢Δɽճస‫ʹٿ‬͸ɼதۭͶ͡ͷ݀Λ௨Γ೺࣋ಈ࡞༻ͷάϦοϓ෦ʹಈྗΛ఻ୡ͢ΔͨΊͷϫΠϠ͕Ұ༷ͳಈ࡞Λߦ͑ΔΑ͏ʹςʔύ޸ઃ͚ΒΕ͍ͯΔͨΊɼಈ࡞Մೳൣғ͸ ±0.43 rad Ͱ͋Δɽຊ‫ݕͰ಺ڀݚ‬౼͢ΔޫϑΝΠόΞϨΠͱϚΠΫϩϨϯζΞϨΠͷΞηϯϒϧΛ੍‫ޚ‬໨తͱ͢Δͱ͖ɼα ࣠ͷճసಈ࡞ʹ 4.2 × 10−3 rad/pulseͷ෼ղೳ͕ཁ‫͞ٻ‬ΕΔɽ͜Ε͸ɼϚΠΫϩϨϯζΞϨΠ྆୺ͷϨϯζத৺࠲ඪ·Ͱͷ‫ ཭ڑ‬240ճస֯౓‫ܭ‬ଌ·ͣɼγϦίϯͷ൘ʹইΛ෇͚ɼϚχϐϡϨʔλͷάϦοϓ෦ʹऔΓ෇͚Δɽͭ͗ʹɼ‫࣮ূݕ‬‫ݧ‬Λߦ͏ճసಈ࡞ؒͰৗʹ‫؍‬ଌͰ͖Δೋͭͷಛ௃తͳՕॴΛࣄલʹςϯϓϨʔτʢࢀরը૾ʣͱͯ͠ઃఆ͢ΔɽҰఆͷύϧε͝ͱʹը૾Λऔಘ͠ɼύλʔϯϚονϯάΛߦ͏ʢFig. 3ʣɽύλʔϯϚονϯάʹΑΓɼ֤ύϧεೖྗʹର͢ΔςϯϓϨʔτͷը૾಺ͰͷϐΫηϧҐஔ࠲ඪ͕‫·ٻ‬ΔɽςϯϓϨʔτ 1 ͷ࠲ඪΛ (x1 , y1 )ɼςϯϓϨʔτ 2 ͷ࠲ඪΛ (x2 , y2 ) ͱ͢Δͱ͖ɼճ–2–㻙㻟ືసゅ㻌䃐㻌㼇㽢㻝㻜㻌㻌㻌㼞㼍㼐㼉

86420−2−4−6−100

050

100

䝰䞊䝍ᅇ㌿ᩘ㻌㼇㼜㼡㼘㼟㼑㼉㻔㼍㻕㻌෇࿘ᨭᣢᆺ⌫㠃㛵⠇ᶵᵓ

Fig. 3 ɹ Pattern matching.

α = tan−1y2 − y1x2 − x1(1)ͱ‫͖Ͱࢉܭ‬Δɽα ࣠ಈ࡞݁Ռ㻙㻟ືసゅ㻌䃐㻌㼇㽢㻝㻜㻌㻌㻌㼞㼍㼐㼉8స֯ α ͸4.2−50

6420−2−4−6ԁपࢧ࣋‫ͦߏػ࣋ࢧ఺ࡾͱߏػ‬ΕͧΕʹର͠࡞ͤͨ͞ͷͪɼෛํ޲ʹ 200 pulseɼͦͷ‫͞ޙ‬ΒΛɼ࠷খೋ৐ۙࣅʹΑΓώεςϦγεΛ࣋ͭઢ‫ͯ͠ͱ਺ؔܗ‬ϞσϧԽͨ͠΋ͷͰ͋Δɽ

050

100

Fig. 4 ɹ Rotational motion in α axis.

ʹਖ਼ํ޲ʹ 100 pulse ಈ࡞ͤͨ͞ɽ࣮‫ݧ‬͸֤ 3 ճ‫ۉ‬஋Ͱ͋ΔɽFig. 4 ͷ੺ઢ͸ɼͦΕͧΕͷಈ࡞

−50䝰䞊䝍ᅇ㌿ᩘ㻌㼇㼜㼡㼘㼟㼑㼉㻔䠾㻕㻌୕Ⅼᨭᣢᆺ⌫㠃㛵⠇ᶵᵓͯɼεςοϐϯάϞʔλΛਖ਼ํ޲ʹ 100 pulse ಈߦͬͨɽFig. 4 ͷ੨ઢ͸ɼ3 ճͷಈ࡞݁Ռͷฏ

−100

࡞͕ɼβ ࣠ํ޲΁‫ׯ‬ব͍ͯ͠Δ͜ͱΛҙຯ͢Δɽ͜ͷ‫ݱ‬৅͕ൃੜ͢ΔͱɼαϒϐΫηϧΦʔμͰߦ͍ͬͯΔύλʔϯϚονϯάͷਫ਼౓͕Լ͕Γɼਖ਼͍͠ α ࣠ͷ֯౓৘ใ͕ಘΒΕͳ͍ɽύλʔϯԁपࢧ࣋‫ߏػ‬͸ɼࡾ఺ࢧ࣋‫ߏػ‬ΑΓ΋ 1 ύϧε͋ͨΓͷಈ࡞෯͕খ͍͞ɽ·ͨɼϞσϧͱ֤‫ܭ‬ଌ఺ͷ‫ࠩޡ‬Λൺֱ͢Δͱɼԁपࢧ࣋‫Ͱߏػ‬͸࠷େ 4.6 × 10−4 radɼඪ४ภࠩ 8.9 × 10−5 ɼࡾ఺ࢧ࣋‫Ͱߏػ‬͸࠷େ 6.4 × 10−4 radɼඪ४ภࠩ

1.1 × 10−4 Ͱ͋ͬͨɽϞσϧ͔Βͷ‫ࠩޡ‬ͷ‫఺؍‬Ϛονϯάͷਫ਼౓Λ্͛ΔͨΊʹ͸ɼճస࣠ͷ‫ׯ‬বΛආ͚ͳ͚Ε͹ͳΒͳ͍ɽࡾ఺ࢧ࣋‫Ͱߏػ‬͸ɼ͜ͷ‫ׯ‬ব͸‫ݟ‬ΒΕͳ͔ͬͨɽ

5.

͓ΘΓʹ

͔ΒΈΔͱɼ1 ύϧε͋ͨΓͷҠಈྔ͕૿Ճ͠ຊ‫ڀݚ‬͸ɼ‫ݦ‬ඍ‫ڸ‬ԼϚΠΫϩϚχϐϡϨʔγϣ

͍ͯΔͨΊɼࡾ఺ࢧ࣋‫ߏػ‬ͷํ͕Ϟσϧ͔ΒͷϯͷͨΊͷ‫ٿ‬໘ؔઅ‫ߏػ‬Λ։ൃ͠ɼͦͷճసಈ‫͕ࠩޡ‬େ͖͍ɽ͔͠͠ɼϚΠΫϩϨϯζΞϨΠ࡞Λ‫ͨ͠ূݕ‬ɽਫฏํ޲ͷճసಈ࡞ʹؔͯ͠͸ɼͷҐஔܾΊʹ͸ɼࡾ఺ࢧ࣋‫Ͱߏػ‬΋े෼ͳಈ࡞

2 ͭͷճస‫ͱߏػ‬΋े෼ͳਫ਼౓Ͱಈ࡞͠ɼϞσ෯Ͱ͋Δɽϧ͔Βͷ‫ࠩޡ‬΋ಉఔ౓Ͱ͋ͬͨɽ

Fig. 4 ͷάϥϑʹ͸ද‫͞ݱ‬Ε͍ͯͳ͍͕ɼԁҰํͰɼԁपࢧ࣋‫ͯؔ͠ʹߏػ‬͸ɼਨ௚ํ޲पࢧ࣋‫Ͱߏػ‬͸ɼয఺͕ͣΕɼը૾͕΅΍͚Δ࣠΁ͷ‫ׯ‬ব͕‫ݟ‬ΒΕͨɽͨͩ͠‫Ͱ఺࣌ݱ‬͸‫ׯ‬ব͜ͱ͕͋ͬͨɽ͜Ε͸͢ͳΘͪɼα ࣠ํ޲ͷಈ౓߹͍ͷৄࡉ͸ະ‫͋Ͱূݕ‬Γɼࠓ‫ޙ‬ͷ՝୊ͱ͠–3–͍ͨɽࢀߟจ‫ݙ‬1) S. Ohki, Y. Tachikawa, Y. Kawajiri, S. Mitsuhiro, and M. Fukuda: Pass Band Broadening in Molded-glass Echelon-grating-based
CWDM Filter Module, NTT Technical Review ,Vol. 3, pp. 50/54, 20052) ‫׉‬੢ɼ෱ాɼେ໦ ɿϫΠϠ‫ۦ‬ಈʹΑΔ‫ݦ‬ඍ‫ڸ‬ԼͰͷϚχϐϡϨʔγϣϯ‫ߏػ‬ɼਫ਼ີ޻ֶձळ‫ق‬େձֶज़ߨԋձߨԋ࿦จूɼpp.381-382ɼ20073) ‫׉‬੢ɼ෱ా ɿඍখޫֶ෦඼ΞηϯϒϧͷͨΊͷϫΠϠ‫ۦ‬ಈϚχϐϡϨʔλͷ੍‫ޚ‬ɼਫ਼ີ޻ֶձळ‫ق‬େձֶज़ߨԋձߨԋ࿦จूɼpp.471-472ɼ2009–4–