Equipment operation monitoring and data analysis
Tool Data eXplorer(TDX)
TDX is an equipment operation monitoring / data analysis tool for
production lines.

Application

・ Stable operation of manufacturing equipment
・ Failure prediction, production line quality assurance
・ Efficient equipment maintenance・ Cause analysis of equipment-related quality defects

Features・ Equipment CSV data reading
・ Extracting and overlaying high-resolution waveform data
・ Monitoring and notification, Numerical processing of wave data
・ Correlation analysis, multivariate monitoring・ Commercial database not used

Configuration• Wave Data Gateway (WDG): Reads device CSV data.
・ Wave Data Display (WDD): Refreshes the waveform data.
・TDX Analyzer： Analyzes waveforms and setup monitoring conditions
・TDX monitor: Executes a monitoring analysis model and notifies an abnormality.
・ Equipment data collection system: Out of our support range.

Data collection and monitoring&analysis
CSV data

Wave Data Gateway
Cutout dataCollectequipment data

Equipment
data

Wave Data Display
Display waveform

TDX Monitor
Executemonitoring
Notification

TDX Analyzer

Monitoring
results

SetupMonitoringconditions

Anomaly detection & failure prediction flow
CSV data reading, Monitor &analysis waveform cutting

Display time series waveform

Compare multiple
waveforms

CSV data

Histogram display

Waveformsuperposition

Extraction oftypical waveform
values (statistics)

3D waveform display

Guard band display
SPC display
Guard band monitoring
SPC monitoring

Waveform multivariate monitoring
Statistics multivariate monitoring

Waveform
Monitoring result

Statistics
Monitoring result

Correlation display
Principal component analysis

Correlation analysis
Variable selection

Multiple regression analysis,
PLS regression analysis

Basic functions of TDX
Function

Description

Waveformrefresh display

・Multiple waveforms are refreshed each time CSV data is read.
・Monitor the upper and lower limit values of the waveform.

Waveform cutand save

・Waveform extraction from CSV data. Specify multiple cutout conditions.
・Waveform interpolation, binary conversion, saving and automatic deletion.

Waveform
display・Waveform time series, overlay, parallel display, string specification narrowing.
・Waveform scaling, conversion, noise cut, 3D display, rise time synchronization.
・Machine difference display by overlapping different device and unit waveforms.
・ Automatic CSV output of waveform data.
・Text specified waveform narrowing display.

Waveformmonitoring

・ Wave guard band monitoring.
・Guard band automatic creation & monitoring.
・ Specify noise cut, bandwidth, offset, and error detection conditions.
・ Evaluation of guard band performance in the past section.

Trend display

・Extract arbitrary statistics (maximum, average, minimum, range, σ, integral etc.)from the waveform.
・ Statistic trend display, histogram display, machine difference display.
・Statistical data automatic CSV output.

SPC
monitoring・ Statistics SPC display, WECO and JIS SPC rule support, Cpk trend display.
・ SPC monitoring. Batch SPC setting for multiple statistics. Multiple SPC
monitoring rule settings.
・ Automatic SPC standard value creation & monitoring.
・Automatic standard value adjustment & standard value re-creation.

Multivariate
display・Correlation matrix display and correlation chart display. Multi-scatter plot /histogram display.
・Principal component analysis, multiple regression analysis, MTS (Mahalanobis
Taguchi) analysis, Hotelling T2 / Q statistics analysis, PLS regression analysis,K-nearest neighbor analysis.

Multivariatemonitoring・ Statistics MTS monitoring, Hotelling T2 / Q statistics monitoring, K-nearest
neighbor method monitoring.
・Waveform hoteling T2 / Q statistics monitoring, K neighborhood methodmonitoring.

Frequency
display・ Frequency filter, wavelet transform ・ 3D display. Short-time Fourier transform.
・ Wavelet 3D waveform guard band analysis.

Abnormality
・E-mail transmission, FTP transmission, file output.
notification
TDX operating environment
・ Windows 8 and 10 and compatible Windows Server and Tablet PC are not supported.
・ Server PC: Memory 16G or higher, Corei5, i7 equivalent or higher.
・ Storage is recommended for 3.5-inch SSD.
・ Client PC: Memory 4G or above, Corei5 equivalent
・ Display 1280x1024 or more・ Data amount used: 20 to 30 bytes per device data point

Dura Systems
Dura Systems CorporationCorporation

Business
Development and sales of equipment monitoring analysis software andsupport for construction of process monitoring system
Main products:
Business description:
Delivery record:

Sales agent ：・Tool Data eXplorer (TDX)
・Sales and introduction support of TDX
・ Semiconductor manufacturers, semiconductor equipment
manufacturers, wafer manufacturers, steel manufacturers, foodmanufacturers
Automobile and auto parts manufacturer, functional material
manufacturer, rubber product manufacturer
・ Hitachi High-Tech Solutions Corporation
・ Mitsubishi Electric System & Service Co., Ltd.
・ Mitsubishi Electric Control Software Corporation
・ Ryoden Corporation
・ Canaden Corporation

Company Profile
Company name:
Established:
Capital:CEO:
URL:

Dura Systems Corporation
September 18, 2003
20 million yen
Kensuke Uriga
www.dura.jp

AdressLocation:

TEL：

300-3255, Japan
2357-1 Tamtori, Tsukuba, Ibaraki
029-864-5006