Miniature multiple-axes adaptive optics unit
employing SIDMs and its application to an
efficient green laser module
Yukihiro OZEKI＊, Yoshiaki HATA＊, Kazuhiro SHIBATANI＊, Fumio NAGAI＊,Nobuyoshi MORI＊, Yukinobu NAKABAYASHI＊, Naoki MITSUGI＊, and Satoshi NAKANO＊
Vikram BHATIA＊＊, Steven J. GREGORSKI＊＊, Dragan PIKULA＊＊, Satish C. CHAPARALA＊＊,David A. S. LOEBER＊＊, Jacques GOLLIER＊＊, Joan D. GREGORSKI＊＊, and Martin HEMPSTEAD＊＊

Abstract
An adaptive optics (AO) with a miniature micro-actuator

１Introductionis developed, using the smooth impact drive mechanism

In the era of mobile & digital IT society, we are(SIDM), for the adjustable sub-micron alignment of the opti-

surrounded with high-tech gadgets in our daily life

cal systems in multiple-degrees of freedom (DOF). With its

and business such as CD/DVD players, camera cell-

unique characteristics of SIDM, the AO tunes in less thanphones and digital anti-hand shaking cameras. It is

one tenth of micron resolution, yet provides over a couple

interesting to note that actuators (mechanical devic-of hundred micron moving range and maintains the posi-es) are the key components in these devices. It willtion with little electrical power consumption. One of thebe no exception to the emerging laser-scan micro-

most important applications is found in coupling the light

projectors, where MEMS mirror will scan the laserfrom an IR-LD to SHG waveguide device in the synthetic la-beam to produce the images on the screen. We an-

ser configuration. The efficient compact green laser (<0.7ccticipate the actuator plays a key role even for the la-of volume) is demonstrated with the AO. The use of adaptive

ser light source. Laser light sources for such micro-optics helps to provide more than 100 times the tolerance inprojectors must be compact, efficient, andthe placement accuracy of components in the assembly.

demonstrate robust and stable performance over aThis lowers the cost of manufacturing and helps maintainwide temperature range and when subjected to typi-

the optimum coupling over operating temperature, life andcal mechanical shocks and vibrations.

external perturbations without the use of power-hungry

The basic functional elements and performance of
this architecture have been presented elsewhere １）.

thermo-electric cooler (TEC) device.

We present the architecture of multiple-axes actuators for adaptive optics and its applications to thegreen laser so that it satisfies all of these laser lightsource requirements with the use of it.
In this report, the adaptive optics utilizing SIDM
actuators as intra-module lens translation stages
demonstrate the base performance over the range of
operating conditions to which mobile devices aresubjected by consumers. SIDM is the piezo-electric
based ultrasonic linear actuator and is small enoughto assemble into compact multiple-axes unit ２）. The
adaptive optics unit, in addition to solving a demanding operational challenge, will also enable
cost-effective assembly suitable for a high-volume
consumer electronics application. According to an＊Konica Minolta Opto Inc., Hachioji, Tokyo 192-8505, Japan＊＊Corning Incorporated, Science and Technology, Corning,
NY 14831, USA82

independent market study, the embedded microprojector market such as cell-phones, game consoles

KONICA MINOLTA TECHNOLOGY REPORT VOL.6（2009）and portable DVDs, is projected to top 150 million
units by 2016

2

Table 1 Various actuators and their properties.

.

４）

SIDM and adaptive optics
Optical equipment typically requires a fine andaccurate components alignment. An effective solution to it is to use AO. This involves mounting thelenses on actuators such that they can be translated
in orthogonal directions and perpendicular or parallel to the light propagation direction. The AO devices
move the lenses to ensure that the laser beam is imaged onto the waveguide facet for the best coupling

VCM: Voice coil motor, SM: Step motor, MEMS: Micro-electronicmechanical systems. Ex: Excellent, G: Good, P: Poor

as shown in Fig. 1. The DOF is at least two and preferably three or more.
Among the various actuators available in the market, as listed in Table1, piezo-based SIDM is themost suited one for the applications. It addition toits small size, it has powerful thrust and mechanicalrigidity to support the optics

3SIDM structure and operation
The SIDM generic structure is shown in Fig. 2 (a). It

consists of a piezo element (PZT), base, driving rod,and a moving body which holds the rod with friction
force ２）. The lens is attached to the moving body. To
displace the moving body, PZT needs to expand andcontract asymmetrically like the saw-tooth waveformshown in the figure. This is achieved by applying a
rectangular waveform with a given voltage, frequen-

SHG waveguidecy and duty cycle to the PZT. On the gentle upward
slope of PZT, the rod carries the moving body withL2

it under friction (“stick” operation).

L1IR-LDYXFig.1 Schematic of the adaptive optics to couple LD to waveguide. L1lens moves in x-axis while L2 in y-axis to scan the focus point on
the waveguide input plane.

The AO should have a fine resolution as well as awide tuning range to ease the component placement(a) Basic construction and operation of a SIDM device. The slow expansion (1)and rapid contraction (2) provide the “stick” and “slip” functions, respectively.

accuracy requirements.
The SIDMs have sub-micron step size with sufficient motion range to cover the expected mechanical variations, and consume minimal power to operate. Additionally, the technology is field proven andhas found applications in various consumer electronics products. For instance, SIDMs auto-focus thelens in a cell phone embedded camera unit or dither
the image sensor in the digital reflex camera to compensate for the user’s hand shaking.

(b) H-bridge circuit to drive SIDM. The small duty rectangular voltage
across piezo translates to sawtooth vibration waveform for SIDM motion.
Fig.2 SIDM operational mechanism (a) and an external circuit to drive it (b).

KONICA MINOLTA TECHNOLOGY REPORT VOL.6（2009）83

On the rapid falling slope, the moving body can-a second harmonic generator (SHG) device, as illus-

not follow the rod and “slips” by inertia. The net

trated in Fig. 4. The IR laser is a distributed Bragg re-displacement of the moving body over one stick/slip

flector (DBR) ridge-waveguide laser containing threecycle is the minimum displacement for SIDM. Thissections: Gain, Phase (f ) and DBR ３）.

cycle is repeated till the desired amount of displacement is achieved. The direction of the movement isswitched by flipping the polarity of the applied
waveform to the device. A simple “H-bridge” circuit
like Fig. 2 (b) is used to drive the SIDM device. Fig. 3
shows two displacement cycles of a SIDM device asFig.4 Illustration of Corning’s green laser architecture. Lenses L1 and L2
are used for optical coupling of 1060 nm light to SHG.

it is driven in one direction for the full stroke of andThe gain section generates the IR power, and thethen switched in direction. The full range is about

DBR and phase sections provide general and fine IR350um. The motion is of a constant velocity, and thewavelength tuning, respectively. The SHG device,minimum displacement per pulse is 30 to 50nm,

which is a periodically poled lithium niobate (PPLN)

small enough for fine alignment. The large stroke ofwaveguide, converts the IR laser input into a 530-nm

the device provides sufficient range for device posi-green laser output through a non-linear frequency

tioning thus low cost assembly and margin for drift

doubling process. The IR wavelength needs to bein optical components over temperature and life. In

matched to the optimal SHG conversion wavelength

addition to the slip/slick motion, SIDMs can operate

for maximum conversion efficiency to green. The

in a dither mode where the moving body fluctuates

wavelength tuning provided by the DBR and phasearound its average position.

sections of the IR laser enables high quality images
to be created while the gain section is driven with avideo signal, and also ensures wavelength alignment
over a wide range of ambient temperatures.
A simple two lens (L1 and L2) optical system, withmagnification of -1, is used to couple the light fromthe IR pump LD into the SHG waveguide. The firstlens collimates the IR laser beam and the second
lens focuses it onto the input of the SHG waveguide.

Fig.3 P lot depicting 350μm travel of the SIDM moving body. The flat
portions at the end of travel correspond to the mechanical stops
on either end of the driving rod.

The PPLN waveguide is designed to mode match to
the IR laser beam and also to maximally confine theIR power to generate high intensity, thereby achiev-

This dither motion is used to determine the direc-

ing high IR-to-green conversion efficiency. There-tion of the SIDM movement toward coupling peak.

fore, the PPLN waveguide has cross-section of a few

The SIDM device is latching in behavior and hence

microns in the two transverse axes. Efficient cou-

does not require electrical power to hold position.

pling of the IR light into the PPLN waveguide re-This implies that only a small amount of electricalquires achieving and maintaining alignment in thepower is required when the position of either of thetwo transverse directions to sub-micron tolerances.

two lenses needs to be optimized.

The waveguide-to-waveguide coupling presents adual challenge for both precision assembly and ro-

4 Laser structure and adaptive optics designbust operation. For example, a 0.3 µ m shift in thePPLN waveguide in the vertical direction, which can

For the realization of micro-projector, the green

readily be created by thermal expansion of typicallaser is the key component, yet the semiconductormaterials, causes the green laser output power to re-green laser will not be ready for sometime and theduce by 10% from the value at peak coupling. Fig. 5

synthetic laser would fill the gap to construct effi-depicts the variation in green light as a function ofcient RGB laser sources.

temperature for a fixed optics package where theThe synthetic green laser architecture consists ofcoupling was optimized at 25 ℃ . The green powera 1060nm infra-red (IR) laser that acts as a pump todeclines significantly on either side of the optimiza-84

KONICA MINOLTA TECHNOLOGY REPORT VOL.6（2009）

tion point since the temperature-induced changes
result in the IR laser beam being imaged at a point
slightly offset from the center of the PPLN waveguide.

Fig.5 Change in green power over a 15 to 40 C temperature range for a
package with fixed optics. The device is driven in a constant current
mode.

Since the green power changes non-linearly withcoupled IR power, the variation in green power ismuch larger than the change in coupled IR power.
The green power changes by as much as 25% from25-40 ℃ .

Fig.6 Photo of SIDM adaptive optics unit (a) and Illustration of green
laser architecture with 2-dim. SIDM adaptive optics. Lenses L1 andL2 are used for optical coupling of 1060 nm light to SHG waveguide(b).

This variation in green power can be addressed byusing a thermo-electric cooler (TEC) and stabilizing

Pins on the side of the ceramic base provide elec-

the temperature to a single point. However, a TEC istrical connections for operating the DBR laser anda power hungry device and is not a practical solu-

the SIDM devices. The optical components, includ-tion for use in mobile devices that have limited bat-ing the DBR laser, the adaptive optics and SHG, aretery power. AO is therefore applied to solve the is-assembled on a ceramic base that provides electricalsues.

interconnects. A metallic lid with an optical window
is used as a cover. The SHG front facet is wedged

5 2
 -dim axes AO by SIDM for green
laser module design and performanceand AR-coated to minimize back-reflection to theDBR laser. The SHG is hence mechanically angled toensure optimum coupling into the angled front facet.

A compact two-dimensional AO unit with two axes

A similar wedge at the output facet ensures that theof SIDMs is fabricated, with envelope volume ofgreen output is parallel to the optical axis of theabout 0.1 cc. Each SIDM is driven by 3V pulses

DBR laser.

through a pair of feeders. The structure is simple

The functionality of the adaptive optics to main-with a fewer parts for mass production and inexpen-

tain optical alignment is demonstrated in Fig. 7. The

sive pricing. Fig. 6 (a) shows the birds view of the AO,

SIDM are intentionally moved to produce a deliber-where the lower lens moves horizontally and the up-

ate misalignment of the two lenses to reduce green

per lens moves vertically.

power. Points 1, 2, 3 and 4 represent the misalign-

The green laser module is then implemented withment of the optics in four different directions combi-

a small form factor package design with the cavity

nation of x and y. After misalignment, a closed-loop

for the AO unit. The nominal envelope volume of thealgorithm is initiated to recover the optical align-device is 0.69 cc and the inside is shown in Fig. 6 .

ment. As can be seen, the maximum green power is5)

recovered in all four cases. The recovery time of less

KONICA MINOLTA TECHNOLOGY REPORT VOL.6（2009）85

than one second from off-alignment seen here is fastenough for occasional misalignment by external
shock or in the turn-on event.

Fig.8 Change in green power over a 10-60°C temperature range for a
G1000 package. An external photodiode is used to provide
feedback that drives the SIDM devices. The IR laser is driven in aconstant current mode.

6 Assembly tolerance and cost impact
The use of adaptive optics also helps to lower thecost of module assembly. Fig. 9 compares the placement accuracy requirement of the SHG device (inthe vertical direction) during the assembly process
for the fixed optics package, as well as for the adaptive optics package. As can be seen, the tolerance ofalignment increases from a few tenths of microns fora package with fixed optics package to a few tens ofmicrons for one with adaptive optics. For example,to achieve green power within 10% of the peak value
the SHG needs to be placed within 0.3 µ m of theoptimum value for fixed optics module while for anFig.7 D epiction of the ability of the adaptive optics to regain alignment
through the closed loop operation. The SIDM devices aredeliberately misaligned in four combinations and the closed loop is
subsequently turned on to recover green power (a), and a blow-upof the rising edge at point 3.

assembly with the adaptive optics this value is almost 90 µ m. This relaxation of alignment tolerance
lowers the complexity of the assembly equipment
and process, resulting in overall cost reduction necessary for high volume manufacturing for consumer

To test the effectiveness of the adaptive optics

electronics applications.

module we placed a device on an external TEC andcycled it over a 10 to 60 ℃ temperature range in theconstant gain current mode. Fig. 8 shows the change
in green power over temperature for this module.
Compared to the case where adaptive optics are
not utilized (Fig. 4), the change in power over the 25
to 40 ℃ temperature range is reduced from 25% toabout 4% . The change in green power is 16% overthe 10 to 60 ℃ temperature range.
The drop in power at higher temperatures can primarily be attributed to the temperature-induced reduction in IR output power of the DBR laser. Thechange in the axial separation between the DBR laser and SHG largely accounts for the power variation at lower temperatures.

86

Fig.9 Change in green power as a function of the SHG vertical position
from the optimum location for a module with fixed optics (dashedcurve - bottom axis) and adaptive optics (solid curve - top axis).

KONICA MINOLTA TECHNOLOGY REPORT VOL.6（2009）

7SummaryWe have shown that the use of 2-dimensional ac-tuator adaptive optics is effectively used in the green
laser module for the emerging micro-projector applications. The use of the waveguide in the SHG device
increases the IR to green light conversion efficiency
but introduces a challenge of maintaining sub-micron level alignment over temperature and lifetime.
In this paper we have shown that the use of SIDMbased adaptive optics ５） provides green power stability over temperature while also lowering the cost ofassembly. The SIDM device has a large travel rangeand can be used in conjunction with an externalclosed loop to provide a very fast response to thermal changes or mechanical shock. A miniature frequency-doubled green laser source (<0.7cc) using
the adaptive optics configuration was demonstrated
for potential applications to micro-projectors over an
extended temperature range.
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