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2015 Download VMware vSphere Installer version 9.0.0.2 or later. 1. Field of the Invention The present invention relates to asemiconductor device and a method for manufacturing the semiconductor device. More particularly, the invention relates to asemiconductor device having a trench gate structure and a method for manufacturing the semiconductor device. 2. Descriptionof the Background Art In recent years, with progress in fine patterning techniques of semiconductor devices, a gate length hasbeen reduced, so that a conventional planar gate electrode is approaching its limit. Thus, in order to solve this problem, a gateelectrode having a three-dimensional structure has been developed. A trench gate structure is known as a gate electrode structure
having such a three-dimensional structure. The conventional trench gate structure is a thin film gate electrode structure formed
to fill a trench having a wall surface with a dielectric layer interposed therebetween, and is structurally different from a stacked
gate structure having an LDD (Lightly Doped Drain) structure having a drain region and a lightly doped drain region(hereinafter also referred to as

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