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Download.1. Field of the Invention The present invention relates to a micro-optical device, a system and a method, for example, for a focusing apparatus which makes it possible to conduct focusing with a high accuracy in a laser scanning microscope and the like. 2. Description of the Related Art In recent years, there is a strong demand for improving the spatial and the temporal resolution of a laser scanningmicroscope. In particular, in the case of a laser scanning microscope, the variation in focus position due to an assembly error of optical components, the distortion error in the case of a digital camera and an image pickup device, and the like is one of the factors that hinder the improvement in spatial and temporal resolutions. Therefore, as the arrangement of the optical components, that is, a distance
between the objective lens and the sample, and a distance between the objective lens and an imaging lens changes, the dispersion and the temperature change of air and the dispersing effect of the optical components in the air are taken into consideration, and the focus position is optimized by driving a piezo actuator in combination with a closed loop control of a focus position. The variation in focus
position due to the assembly error of the optical components is a factor that influences an image produced by the objective lens. Therefore, a focus control is to minimize this influence. In a stage mechanism such as a three-axis stage and a linear stage which is generally used in the art, the assembly error of the optical components is considered to be directly proportional to the moving amount of astage and an actuator which are based on the assembly error of the optical components. An example of such a conventional focusing technique is disclosed in Japanese Patent Application Laid-Open No. 2006-63324. A micro objective lens and an XY stage are sandwiched by a base plate and an elastic support member which are fixed to each other. The reference point of a focus position control is on
the surface of the XY stage. A distance between the objective lens and a sample is given in the measurement of the positional displacement of the XY stage. A piezoelectric actuator is provided on the base plate on which the X-stage and the Y-stage are mounted. By driving the piezoelectric actuator, the XY stage is forced to follow a movement of the XY stage driven by a stage drive apparatus. Afocus control is conducted to minimize the positional displacement of the XY stage.Q: Как пол
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