Automation Platforms for
Laser Material Processing
PRECISION – THROUGHPUT – SYNCHRONIZED MOTION

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Advanced Automation Platforms
for Laser Material Processing

Cutting, marking, micromachining, drilling or metal deposition – lasers
are used in a wide variety of processes in many different industrial
sectors to optimize manufacturing processes and to ensure the highquality of workpieces. This for example, is how the electronics manufacturing, semiconductor industry, automotive industry, or medical
device technology benefits from the advanced capabilities of lasermaterial processing. Today the laser performance is normally not alimiting factor for the productivity.
Process, material, work cycle, ambient conditions, and criteria such as throughput,
precision, geometry tolerances, size of the machining surface, and contours, all makedifferent demands on the automation platforms. For example, as far as throughput andprecision is concerned, it is possible to meet the different requirements when systemcomponents such as the mechanics, laser control, and laser beam steering complement
each other and communicate via a high-performance standard industrial networks.
The technological diversity and the high vertical range of manufacturing enables PI toreact flexibly to the market development in laser technology and to offer automation
platforms for high-precision and high-throughput laser processing that address theneeds of OEMs, integrators and end users: From single and multi-axis systems without
beam deflection to highly customized solutions where the motion of galvanometerscanners and the positioning systems have to be synchronized and are able to run
simultaneously.
ACS Motion Control, as part of the PI Group, allows the supply of highly sophisticated automation and motion controllers with a wide range of drive options anddedicated modules for the control of laser applications. The controllers andcomponents are based on an industry standard EtherCAT® network.
ACS Motion Control and PI motion systems are matched to eachother to offer class leading platforms for the laser engineer.
A solution from PI does not just offer the machine builder
advanced positioning technology and high-performance
control solutions, but also faster startup and high flexibility
when implementing new requirements to laser processing systems.

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A U T O M AT I O N P L AT F O R M S F O R L A S E R P R O C E S S I N G

Industrial Laser Micromachining
Small Geometries – High Dynamic – Debris Protection

Machining workpieces for generating tiny geometries in the micron range demands automation platforms that provide a consistent,
accurate and dynamic processing in multiple dimensions. As the size and mass of the manufactured parts may be challenging andparticles may be formed during machining, the system components used need to be highly precise, stiff, robust and offer reliable
performance.

Key Features of the Stages■

Vertical Axis – Laser Positioning

Reference edge to support thealignment in the machine■

Connector for purge air
to create overpressure■

Side seal and hard cover to protect
against particles■

Robust industrial IP65 connectors
for flexible cable exit■

Easy access to the lubrication system■

Different encoder variants including
absolute-measuring sensors offering
nanometer resolution■

Different stage widths for different
loads and cantilever reduction■

Synchronous servo motor■

Heavy-duty recirculating ball bearings■

Holding brake■

Ability to run directly on 110/240
volts AC servo drives>> L-417, p. 6

Motion Control
XY Axis – Workpiece Positioning

The multi-axis system can be controlled
by an ACS motion control module for
optimum synchronization of the axes
and simultaneous control of the laser>> LCM, p. 19

Have a look at the systems in motion on the
PI YouTube channel www.youtube.com/user/phyinst

MOTION■

PIMag® linear motors■

Heavy-duty recirculating ball bearings■

XY configuration without adapter plate■

XY drag chain cable management>> V-417, p. 6
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POSITIONINGA U T O M AT I O N P L AT F O R M S F O R L A S E R P R O C E S S I N G

Laser CuttingHigh Precision – High Dynamic – Long Travel Ranges

Laser applications such as those for producing stencils or processing printed circuit boards and flat panels set high requirements
to automation platforms: The dimensions and mass of the workpieces, and the structural density are typically large in comparison.
To achieve micron precision and high throughput, the system has to offer long travel ranges with a high stiffness but light weightmotion platform. This allows the laser head or galvanometer scanner to be moved at high speed precisely over the part.

Vertical Axis – Laser Positioning

Key Features of the Gantry Design■

High mechanical stability■

Light weight motion platform/bridge axis■

Disturbance rejection■

Individual travel ranges in XY up to 2 m■

Risers/lifter to place the vertical axis atrequired processing height■

Motion profiles may be rasterbased or a complex contour

The gantry system can be controlled by an ACS
motion control module which:

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Provides multi-input multi-output optimization
for yaw and linear control (MIMO)■

Automatic cross-axis tuning for consistent
performance over all gantry areas■

Input shaping for vibration free motion andvastly improving move and settle times

PIMag® linear motors with pneumaticcounterbalance >> p. 13■

Optimized cable management and operation toplace vertical motion axes, autofocus sensors,and fiber routing system for the laser■

The integration of autofocus sensors allows
height tracking to maintain spot focus

XY Axis – Workpiece and Tool Positioning

Motion Control■■

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Base axis: dual PIMag® linear motors forhigh dynamics and high precision >> p. 13■

Bridge axis optionally with air bearings for demandingstraightness and velocity requirements >> p. 9■

Absolute encoders provide the absolute position of
the moving system. Homing is not required during
power-on, which increases efficiency and safety during
operation. For example axes binding or collisions withparts can be eliminated

A U T O M AT I O N P L AT F O R M S F O R L A S E R P R O C E S S I N GExtra Large Field Marking
High Precision – High Throughput – Simultaneous 2D Processing

Processing high density structures over large areas such as hole drilling, or glass and foil marking requires automation solutions
which provide high precision and high velocities. A possibility to address the needs of industrial production is the coordination ofmulti-axis positioning systems with a high dynamic galvanometer scanner. Typically the stages move the workpiece to the centerof the field of view of the scan head and signal that the scanning process can be started. Once this operation is completed, theprocess is repeated until the total area is processed.
In order to process an area that exceeds the field view of the galvanometer scanner more efficiently, simultaneous control of the
XY stages and the galvanometer scanner is favorable. This XLSCAN solution allows continuous operation over large areas avoiding
idle time and eliminating stitching errors. The ability of extending the field of view by the travel ranges of the stages has the advantage that the field of view can be fixed and maintained in terms of accuracy, spot size and performance.

Key Features of the XLSCAN
Automation Solution■

Extra large field of view■

Increased throughput (up to 41 %)■Increased processing accuracy■

Elimination of the potential
discontinuities caused by tilingor stitching multiple fields ofview of the scan head■

Smooth processing
with high dynamics andno stage vibrations

Galvanometer Axis – Fast Laser Positioning■

Fast and precise scan system from
SCANLAB with two galvanometerscanners for beam control■

Increasing the field of view withunchanged resolution and spot size

Motion Control
Class leading digital scanner technology with
EtherCAT® based industrial networking

XY Axis – Workpiece Positioning

A patent pending coordination of SCANLAB's
scan head control with the linear stages
managed by an ACS motion control system

Have a look at the systems in motion on the
PI YouTube channel www.youtube.com/user/phyinst

MOTION■

PIMag® linear motors for high precisionand high velocity >> V-551, p. 7■

Linear guides with crossed roller bearings■

XY drag chain cable management■

Granite base for optimized system accuracy
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POSITIONINGPOSITIONING SYSTEMS FOR LASER PROCESSING

Precision Linear Stages
High Load – Long Travel Ranges – Cost Efficient

Applications: Cutting · Drilling · Welding
Positioning tasks: Single-axis, XY and Z configurations ·Highly repeatable accuracy · Consistent performance■

Width 116 mm, 166 mm■

Travel range to 610 mm, to 813 mm■

Synchronous servo motor■

Precision recirculating ball bearings,
load capacity to 400 N, to 450 N■

Side seal and air purge■

Optional holding brakeL-412 · L-417

Applications: Cutting · Drilling · Welding · Contouring tasks
Positioning tasks: Single-axis and XY configurations · High accuracy

V-412 · V-417■

Width 116 mm, 166 mm■

Travel ranges to 610 mm, to 810 mm■

High nominal force 33 N, 87 N■

PIMag® linear motor >> p. 13■

Precision recirculating ball bearings, load capacity to 400 N, to 450 N■

Side seal and air purge■

Drag chain cable management

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XY configurationof the V-417

POSITIONING SYSTEMS FOR LASER PROCESSING

High-Precision Linear Motor Stages
High Accuracy – High Dynamic – Flexible Configuration

Applications: Ultrafast micromachining and nanofabrication
Positioning tasks: Fast and precise scanning · Compact design■

PIMag® voice coil with direct positioning measuring■

Travel ranges 5 mm, 10 mm, 20 mm■

Max. velocity 250 mm/s■

Crossed roller bearings for the highest precision, anti-creep
V-522 · V-524 · V-528

Applications: Ultrafast micromachining and nanofabrication
Positioning tasks: Single axis, XY and Z configurations · Fast scanning with nanometer precision

V-508

■

PIMag® linear motor >> p. 13■

Travel ranges to 230 mm■

Absolute encoder with 1 nm resolution■

Highest precision with >> PIOne linear encoder■

High guiding accuracy■

Compact design with 160 mm width■

Crossed roller guide, anti-creep■

PIMag® linear motor >> p. 13■

Travel ranges 80, 170, and 250 mm■

Incremental or absolute linear encoder, various resolutions■

Compact cross section: 80 mm × 25 mm■

Crossed roller bearings for high load capacity, anti-creep

V-551

Technology: PIOne Linear Encoder
The high-resolution PIOne encoder was developed by PI and, with corresponding
processing of the measured values, allows a position resolution considerable lessthan one nanometer. The optical and noncontact PIOne encoders are based on aninterferometric measuring principle. Due to the short signal period and the highquality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne
encoders support direction sensing when evaluating a reference signal. A V-551.4D
with PIOne linear encoder performs a sequence of 0.5-nm steps.

MOTION|POSITIONING

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POSITIONING SYSTEMS FOR LASER PROCESSING

High-Precision Ball Screw Linear Stages
High Travel Accuracy – Compact Design – Cost Efficient

Applications: General purpose · Processing of heavy loads
Positioning tasks: High precision at medium travel ranges and low speed · Z axis configurations■

Travel ranges 102, 204, and 306 mm (4”, 8”, 12”)■Max. velocity to 100 mm/s■

Encoder resolution 50 nm■

Load capacity to 100 kg■

Zero-play ball screw■

XY and XYZ configurations

M-511 · M-521 · M-531

Applications: General purpose · Processing of light substrates
Positioning tasks: High precision at medium travel ranges and low speed

L-509

■

Travel ranges to 155 mm (6”)■

Repeatability to 0.1 µm■

ActiveDrive DC, DC, BLDC, and DC gear motors■

Stepper motors■

Optional linear encoder for direct position measurement■

Direction-sensing reference point switch■

Travel ranges from 26 to 102 mm (1” to 4”)■

Repeatability to 0.1 µm■

Optional with Direct-Measuring Linear Encoder■

ActiveDrive DC, DC, BLDC, and DC gear motors■

Stepper motors■

Direction-sensing reference point switch

L-511

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POSITIONING SYSTEMS FOR LASER PROCESSING

Ultra-High Precision Linear Air Bearing Stages
High Guiding Accuracy – Exceptional Velocity Control – Long Travel Ranges

Applications: Scribing · Drilling · 24/7 operation
Positioning Tasks: Highest flatness, straightness, velocity and precision · Split bridge arrangements

A-110

■

Size of the motion platform 210 mm × 210 mm■

Travel ranges 50 mm to 750 mm■

Resolution to 1 nm■

Noncontact and friction-free motion■

Preloaded >> air bearings■

Cleanroom compatible■

Size of the motion platform 160 mm × 200 mm■

Travel ranges to 400 mm■

Load capacity to 100 N■

Noncontact and friction-free motion■

Magnetically preloaded >> air bearings■

Cleanroom compatible

A-123

Technology: PIglide Air Bearing
The PIglide air bearing technology allows friction-free positioning with exceptional on axis error motion accuracy of up to 5 µrad
over 100 mm. The technology provides high in position stability and constant velocity scanning. Air bearings have straightness andflatness characteristics that are superior to mechanical bearing solutions.

MOTION|POSITIONING

9POSITIONING SYSTEMS FOR LASER PROCESSING

High-Precision Compact Linear Stages
Very Compact Design – Cost Efficient – Flexible Configurations

Applications: Positioning of workpieces or optics
Positioning Tasks: High repeatable accuracy · Short travel ranges · Compact design■

Travel ranges 5 mm, 15 mm and 25 mm■

Min. incremental motion 50 nm■

Max. velocity 2 mm/s■

Closed-loop DC servo and stepper motor versions■

Noncontact limit and reference point switches■

Vacuum-compatible version down to 10-6 hPa

M-110 · M-111 · M-112■

Travel range 25 mm■

Integrated linear encoder option
for highest accuracy with 0.1 µm resolution■

Min. incremental motion 0.2 µm■

Max. velocity 20 mm/s■

Ball screw for high velocities and number of cycles

M-122

■

Travel ranges 13 or 26 mm■

Stepper motor or DC servo motor with and without gearhead■

Velocity to 15 mm/s■

Load capacity to 30 N■

Integrated reference point and limit switch

L-505

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POSITIONING SYSTEMS FOR LASER PROCESSING

Precision Z Stages
High Loads – High Stability – Highly Practical

Applications: Vertical part motion · Fine focus adjustments
Positioning Tasks: Unobstructed access to the table top from any direction■

Travel range 26 mm (1”)■

High-resolution encoder■

ActiveDrive DC, DC, BLDC, and stepper motors■

Zero-play ball screw■

MTBF 10000 h■

Self-locking to 10 kg

L-310

■

Travel range 13 mm (1/2")■

Unidirectional repeatability to 0.05 µm■

Load capacity to 20 kg■

Integrated optical limit switches■

Available with direct-measuring encoder■

Crossed roller guide, anti-creep

UPL-120

From Standard to Custom Products:
The dynamics and precision of voice coil or linear motor stages
may be required in vertical direction. For an improved position
stability and compensation of gravity PI offers various solutions
for a counter balance system which can be based on springs,
magnetic solutions and pneumatic cylinders. The picture
shows a modified V-528 standard product with PIMag® directdrive and gravity compensation for vertical applications. The
compensation is by a constant force spring and is adjusted
precisely to the customers payload.

MOTION|POSITIONING

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POSITIONING SYSTEMS FOR LASER PROCESSING

High-Precision XY Linear Motor Stages
High Geometric Precision – High Velocity – High Stability

Applications: Cutting · Drilling · Contouring with highgeometric accuracy · Micromachining where maintaining focus is important
Positioning tasks: High precision contouring or raster scanning · Nanometer
resolution · Aperture versions for processing from top and bottom■

Travel range 205 mm × 205 mm (8”), 350 mm x 305 mm■

Unidirectional repeatability to 0.1 µm■

PIMag® linear motor >> p. 13■

Velocity to 200 mm/s■

Incremental linear encoder with 1 nm resolution■

Crossed roller guides, anti-creep
V-731 · V-741*

V-738*■

Travel range 102 mm × 102 mm (4”)■

Large aperture, 150 mm × 150 mm■

Unidirectional repeatability to 0.1 µm■

Velocity to 500 mm/s■

PIMag® linear motor >> p. 13■

Incremental linear encoder with 1 nm resolution* Also available with stepper motor or DC motor

From Standard to Custom Products:
All essential technologies required for the drive or
motor, the measuring system, the motion controller,
and the guiding system, are available in-house at PI. To
serve custom requirement, in-house development andthe production capabilities of PIMag® magnetic drive
technologies can be utilized.
Here is an example of a modified XY stage with PIMag®
linear motors. The customer required shorter processing
times, higher precision at high duty cycles, and improved accuracy while adding a higher mass workpiece. In
order to achieve these requirements, a new stage wasdeveloped based on the experience with PI standard
stages like the V-741. The new stage is designed withincreased power ironless linear motors to offer higher
accelerations and lower heating.

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The newly designed body of the stage is more rigid providing higher stiffness, improved straightness and flatness with the use of higher loads. In addition the use ofan absolute encoder enables the customer, to simplify
startup and improve throughput of the machine.

■

Travel range 305 mm x 305 mm (12“x12“)■Max. velocity 1000 mm/sec■

Load capacity up to 5 kg■

Absolute optical encoder■

Encoder with BiSS C communication■

ACS Motion Controller

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POSITIONING SYSTEMS FOR LASER PROCESSING

High-Precision XY Air Bearing Stages
High Precision Scanning – Ultimate Geometric Precision – High Accuracy

Applications: Laser micromachining and laser ablation where ultimate precision
with long term repeatable processing is required
Positioning Tasks: Exceptionel flatness for low deviation in spot size. Straightness
and orthogonality for correct feature shapes and two-dimensional placement■

Travel ranges to 200 mm × 200 mm■

Load capacity to 147 N■

Low profile■

Resolution to 1 nm■

Air Bearings >> p. 9■

Optional granite base plates■

Cleanroom compatible
A-311

Applications: Flat panel processing · Laser scribing · Wafer dicing · Thin film pattering
Positioning Tasks: Highest level of flatness, straightness and orthogonality

A-322

■

Travel ranges to 500 mm × 1000 mm■

Load capacity to 245 N■

Resolution to 1 nm■

Air Bearings >> p. 9■

Velocity up to 2 m/s■

Cleanroom compatible

Technology: PIMag® Linear Motors
Magnetic direct drives from PI provide a direct and stiff connection between the load tobe moved and the drive. The industry demand is particularly high when objects need to
be positioned with high dynamics and precision. In conjunction with the smooth-running
precision air bearings, these types of linear systems are particularly suitable for applications that require constant-velocity scanning. The drives operate without mechanical contact and therefore are very reliable. PIMag® linear motors are the result of in-house development. In this way, specific properties of the stages can be influenced directly.

MOTION|POSITIONING

0

10

20

30

40

50 mm

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POSITIONING SYSTEMS FOR LASER PROCESSING

Precision Rotation Stages
High Rotational Accuracy – Direct Position Measurement – Aperture■

Unlimited travel range■

Ultra-high resolution■

Maximum velocity 200°/s■

Optional angle measuring system for direct
position measurement■

ActiveDrive DC, DC, BLDC, and stepper motors■

Direction-sensing reference
point switch
L-611

Applications: Laser machining of curved surfaces, for example tubing
Positioning tasks: Low speed rotation · Direct measuring capability to increase table
top position accuracy · Aperture for component placement and beam delivery■

Unlimited travel range■

Repeatability to 0.5 µrad■

Load capacity to 50 kg■

Option: Direct position measurementwith angle measuring system

PRS-200

From Standard to Custom Products:

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PI’s proprietary technological know-how and vertically integrated production are the basis for the successful development of customized motion.
All technologies can be adapted specifically to an application. An example
of a customized solution is a direct drive rotation stage for part handlingwith an integrated collet. An other example could be the integration of a
tube holding assembly.

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POSITIONING SYSTEMS FOR LASER PROCESSING

Ultra-Precision Rotation Stages
Exceptional Velocity Control – High Placement Accuracy – Aperture

Applications: Laser processing of curved surfaces, for example tubing
Positioning Tasks: High accuracy of position even during multi-axis contouring · Low profile and weight
to reduce errors associated with working height · Elimination of cogging for smooth velocity control ·Direct-measurement at table top position · Aperture for component placement or beam delivery■

Unlimited travel range■

Velocity to 360 °/s■

Repeatability to 1.4 µrad■

Clear aperture with 20 mm diameter

UPR-100

UPR-120■

Unlimited travel range■

Velocity to 360 °/s■

Incremental angle measuring systemwith 0.017 µrad resolution■

Clear aperture with 35 mm diameter

Applications: Laser Processing of curved surfaces
Positioning Tasks: Zero wear to ensure highest continuous performance · Highest accuracy of positionand control of geometric errors such as flatness and eccentricity · High stiffness and load capacity · Low
asynchronous errors · Aperture for component placement or beam delivery■

200 mm or 300 mm motion platform diameter■

Low profile, 60 mm■

Eccentricity and flatness < 100 nm■

Option for self-locking at rest by magnetic preload■

Air Bearings >> p. 9
A-63x

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MOTION|POSITIONINGPOSITIONING SYSTEMS FOR LASER PROCESSING

Parallel Kinematic Hexapods
High Stiffness – Freely Definable Pivot Point – Compact Design

Welding and cutting of complex geometries such as seam welding of pacemakers requires high-precision multi-axis motion.
Parallel kinematic hexapods can be used for this task. They can also be combined with a rotation stage to achieve 360° rotationalmotion with unlimited travel range. If it is physically difficult to position the workpiece, it is also possible to move the laser sourcewith a hexapod and use the workpiece/tool reference system ability.

Motion Control■

Position input via Cartesian
coordinates■

Coordinate transformation
handled by the controller

Key Features of Hexapods■

Three linear axes, three rotational axes■

High stiffness■

Low moving mass, low inertia■■

Excellent dynamic behavior,
fast step-and-settle

Reference system (work, tool)
can be quickly and easily changed■

Support of motor brakes andabsolute-measuring sensors
with BiSS interface■

Easy integration in automation
processes via industrial
EtherCAT® interface■

Minimized axis crosstalk motion■

Excellent repeatability■

Small installation space■

Large central aperture■

No moving cables

Depending on the Design:

Have a look at the systems in motion on the
PI YouTube channel www.youtube.com/user/phyinst

Technology: Parallel Kinematic Hexapods

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In a parallel-kinematic hexapod all drives act on a single moving platform, which
results in a much more compact design than possible with stacked systems. Compared to a serial robot, hexapods show a much better ratio of payload to operating
weight. As only one platform is moved, the overall moved mass is lower resulting
in higher dynamics in all motion axes. Serial motion and positioning platforms
have their advantages in the high modularity which allows for individual designof each moving axes. Motion control, especially the homing procedure, is simpler
with no coordinate transformation required. On the other hand, the combined
positioning errors of stacked systems affect the attainable overall system accuracy.
Hexapods can have an improved path accuracy, higher repeatability and flatnessof travel.

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Submicron precision■

Dynamic to 30 Hz■

Load capacity to several tonnes

POSITIONING SYSTEMS FOR LASER PROCESSING

Tip/Tilt Platform and Objective ScannerHigh Dynamic – High Guiding Accuracy – Outstanding Lifetime

Applications: Laser scanning and beam steering with high duty cycles and high-frequency motion
Positioning Tasks: Wear-free and small footprint design · High stability and repeatability at
frequencies up to 2.5 kHz · Single mirror design for consistent multi-dimensional deflection■

Tip/tilt angle up to 5 mrad, optical deflection
angle up to 10 mrad (0.57°)■

Parallel-kinematic design for identically highperformance characteristics for both tip/tilt axes■

High resonant frequencies for dynamic motion
and fast step-and-settle■

Position sensors for high linearity■

For mirrors up to Ø 12.7 mm (0.5")■

Outstanding lifetime due to >> PICMA® piezo actuators

S-331

Applications: Two-photon polymerization
Positioning Tasks: Zero-play · High-precision flexure guide system resulting in superior step-andsettle and scanning operation · Fine positioning of objectives with sub-nm resolution

P-725

■

Travel ranges to 460 µm■

Significantly faster response andhigher lifetime than motorized drives■

Fine positioning of objectives with sub-nm resolution■

Direct metrology with capacitive sensors: Highest linearity■

Zero-play, high-precision flexure guide systemfor better focus stability■

Outstanding lifetime due to >> PICMA® piezo actuators

Technology: PICMA® Multilayer Piezo Actuators
PICMA® actuators take advantage of the indirect piezoelectric effect and achieve highforces with relatively low voltages. They only need a small amount of installation space.
At the same time, the PICMA® actuators are very dynamic and can reach a position withan unprecedented precision. Due to their ceramic insulation, PICMA® actuators exhibit
high reliability and climate resistance. PI also equips PICMA® actuators with individual
connections for customer applications.

MOTION|POSITIONING

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CONTROL SOLUTIONS FOR LASER PROCESSING

Industrial Motion Control
High Performance – EtherCAT® Communication – Highly Modular

Key Features of the Control Solutions■

Modular hardware design■

EtherCAT®-based communications■

Open architecture for third party EtherCAT® drivers■

Universal support of multiple motor and feedback types■

HMI for CNC user operations

The EtherCAT®-based ACS motion controllers, drive modules
and interfaces are ideally suited for multi-axis synchronizedmotion applications that need G code support with the capability to synchronized motion to laser control or ‘Position Event - Generator’ (PEG). The advanced technology andhighly modular system architecture of ACS ensures that themost demanding and complex applications are managed.

Modular Controller Architecture
ACS control distributed architecture is built of three tiers: The first tier is the host PC user interface which the motion systemcommunications with. The devices on the second tier are EtherCAT® Motion Controllers and EtherCAT® Masters, >> p. 20.
The motion controller is responsible for communication with the host software and also manages everything related to profile
generation, trajectory, macros, diagnostics, and so on.
The position commands are sent to the Universal Drive Modules on the third tier via an EtherCAT® real-time network. The
universal drive modules on the third tier include the digital servo processor (DSP). It performs the servo positioning of the axes.
The drive modules power and actuate the motors, handle the feedback devices, manage the I/Os, and analyze the sensor signals
for closed-loop positioning control. The Control Modules combine in one housing the motion controller, drives, and the power
supplies >> p. 20.

Customized Human Machine Interface (HMI):18

A dedicated software to create a custom specific HMI is available. Machinedevelopers, system integrators, and endusers can benefit because it results inhigher machine performance and reduced expenditure on development.

W W W. P I . W SCONTROL SOLUTIONS FOR LASER PROCESSINGACS Motion Control Systems
Motion Controller – Control Modules – Drives – Interfaces

Smarter Motion and Positioning■

Functional safety■

Auto Tuning■

Operation as EtherCAT® Master■

Operation as 2nd EtherCAT® Master Motion Controller to be
integrated in an existing PLC architecture■

Control algorithms, such as ServoBoost™ to optimize step-and-settle times■

Input shaping for vibration-free motion■

Extensive trigger functionality■

3 Degrees-of-freedom compensation of positioning errors■

Yaw compensation for gantry solutions■

Proprietary and patented features such as NanoPWM

Interface: Laser Control Module (LCM)
ACS controllers are capable to create pulses based on feedback positions. Position-Event-Generator (PEG) allows positional events
to be used to trigger an external device, for example a laser.
The EtherCAT® slave module LCM is specially developed for the laser industry. The LCM can control a laser source directly withsynchronization to multi dimensional path motion, resulting in highest quality laser micro machining and optimal throughput.
It is also able to interface with a wide range of laser systems designed for processing and machining applications such as DPSS,
CO2, Q-switched, excimer, fiber, picosecond, femtosecond, and more.

■

Digital pulse modulation for dynamic laser power control■

Pulse synchronization and laser gating (on/off) with motion path■

Flexible electrical interface: laser enable output, safety interlock input, fault input
for robust safety implementation, general purpose programmable I/O■

User defined operational (window) zones■

Laser delay compensation■

Ability to combine control modes (fixed frequency, fixed pulse width, fixed duty
cycle) to meet wide ranging application requirements■

Supports tickle mode■

Fixed and array based firing■

Supports absolute encoder positional information

As the module is connected to the EtherCAT® network it can be added when required for
an application rather than choosing drive modules that have interfaces for synchronizedfiring. Therefore the system architecture is simpler to design and maintain.

LCM

Find more ACS motion controller and drive solutions on the PI website www.pi.ws

MOTION|POSITIONING

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CONTROL SOLUTIONS FOR LASER PROCESSINGACS Motion Control Systems
Motion Controller – Control Modules – Drives – Interfaces

EtherCAT® Motion Controller

Control Module

SPiiPlusEC Powerful Motion
Controller and EtherCAT®
Network Manager
up to 64 axes and thousandsof I/O’s

SPiiPlusCMhp/ba 32-Axis
EtherCAT® Master Control
Module with 3 Built-in Drives
1 to 3 drives, 85 – 265 V-AC,
up to 15/30 A

SPiiPlusES High Performance Multi-Axis Controller
with Built-in EtherCAT®-toEtherCAT® Bridge
up to 64 axes and thousandsof I/O’s

Universal Drive Modules

NPApm Single/Dual Axis
NanoPWM Drive with ±10 V
Current Commutation
Commands
1,2 drives, 12 – 100 V, up to
13.3/40 A

UDMsd EtherCAT® Dual/
Quad Axis Drive Module
2, 4 drives, 12 – 48 V, up to
2.5/5 A

UDMpm EtherCAT®
Single/Dual Axis Drive
Module1, 2 drives, 85 – 265 V,
up to 7.5/15 A

UDMpa EtherCAT® Single/
Dual Axis Drive Module
1, 2 drives, up to 100 V,
13.3/40 A

Technology: NanoPWM™

20

Recent developments in PWM technology have produced NanoPWM™ amplifiers. These offer ‘linear’ amplifier performance but
without the limitations commonly associated with such amplification. The drawbacks of linear amplifiers are: heat generation,
physically larger units, robustness of the electrical device, cost and the ability to deliver high powers when compared to PWM units.
NanoPWM™ amplifiers like linear amplifiers have improved velocity and tracking control, an ability to optimize the use of highresolution feedback, and in-position stability is superior.

W W W. P I . W SCONTROL SOLUTIONS FOR LASER PROCESSING

Integrated Motion Controller Solution■

1, 2, & 4 motion axes■

Fully integrated closed-loop servo control,
amplifier module, and power supplies■

For voice coil drives, DC motors andbrushless 3-phase motors■

Quiet PWM drives■

Encoder inputs support sine/cosine and absolute

The A-81x motion controller series offers a fully integrated electronics solution with controller, drives, and power supplies in
a compact 19-inch rack unit. The A-81x controllers are designed and optimized for PI stages that are equipped with direct drive
linear and rotation servo motors, and high-resolution encoders. The A-81x motion controller features the state of the art
ACS SPiiPlusEC motion controller and EtherCAT ® master, and includes ServoBoost™ for up to eight axes of motion.
ServoBoost™ provides better, more consistent servo performance that is insensitive to noise or changes in the system.

Online Product Finder

In addition to the brochure you can take advantage of the product finder on the PI website. It allows searching for a suitable automation
solution for laser material processing according to different criteria such as environment, feature size, duty cycle, geometric tolerances andcontour type.
Try out at www.pi-product-finder.com

MOTION|POSITIONING

21

CAPABILITIES OF THE PI GROUP

From 1-off to Series:
OEM Users Benefit From Maximum Flexibility

PI serves both the research and industrial markets. The complete control over the design and manufacturing process provides our customers with significant competitive advantages. Optimized processes
allow PI to deliver customized products in quantities up to several 100,000 units per year at low cost andright on time. The range of OEM products offered by the PI Group varies widely, ranging from “bare”
actuators and sensors to highly integrated parallel-kinematic positioning systems. Evaluation of preproduction run samples, test procedures, production processes and quality management are all includedin the development process.
Services■

Global account management: Close proximity to the customer thanks to international presence■

Risk assessment from design to delivery■

Depending on the task: From the drive to the turnkey system■

Copy exactly policy■

Preparation of internal and external certification■

Production of series of several 10,000 units in the shortest time■

Sustainable spare parts service■

Manufacturing and testing capacities from functional samples to mass production

Standardized performance control with full documentation of individual measurement charts

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CAPABILITIES OF THE PI GROUP

Global Service and After-Sales
Tailored Service Packages for High-End Positioning Systems

On-site training is key to optimize and maximize the potential of new PI systems

Start-Up, User Training and Life Long Support

Contracted Services

PI is dedicated to supporting its customers right from the initial consultation
through to when a customer has purchased a PI system. Beyond that, PI’s services
division is committed to ensuring that every aspect of owning a PI system iscatered for.

Customers subscribing to Contractual Support Services will receive commitment fromPI to achieving agreed Service Levels. These
include responding to the customer’s firstcontact and providing remote technicalsupport, through to response times for a PI
expert to be on site, either to repair or replacea defective unit.

Global Coverage
Supported by 4 Global Service Hubs in Asia, China, Europe and USA, with field
product specialists working from these hubs, PI is able to support all technologies and customer applications via this global services team.
PI’s Standard On-Site Services■

Set up and Commissioning – On-site support to un-box, set-up andcommission the PI system■

Training Program – User training on software and programming,
through to optimization of system performance■

Maintenance Systems Health Check – Preventative maintenance toprolong the life of the motion device■

Support – Ongoing remote and on-site support to maximize system
uptime and provide maintenance for the whole life of any system

Extended Warranty
Most customer applications require PI’s
systems to be operational beyond the standard warranty period. Extending the warranty for additional year(s), is simply extending
the customers peace of mind and PI’s commitment that the product will not fail due
to poor workmanship or faulty materials.
Should a customer’s system then fail due tothese conditions, PI will cover the costs torepair or replace it.

23

MOTION|POSITIONINGCAPABILITIES OF THE PI GROUP

Business Sectors
Industry and ResearchMechanicalEngineering

Image: ICT-IMM

Image: WITec GmbH

Vibrations of a piezo actuator reduce theprocessing times for high-precision microsized holes

Microscopy■

Processing, e.g. out-of-roundturning with piezo actuators■

Precise positioning, even of highloads in six degrees of freedom■

Setup of testing systems

Position Lens or Specimen
Optical methods have been relying on PI positioning systems for years, e.g. for aligning
optical systems or samples. Piezo actuators and motors are increasingly replacing
conventional drive systems because they are more compact, more precise and faster.
Other non-optical microscopic processes, such as SEM (scanning electron microscope)and AFM (atomic force microscope), use PI systems due to their high accuracy anddynamics.

Basic
Research

Industrial Manufacturing and Quality Assurance,
Optical Metrology

Creativity for research and development
special designs for extreme ambient conditions such as UHV to 10–10 hPa, radiationor pronounced variations in temperatureup the cryogenic range.

Inspection systems in the semiconductor industry utilize the performance features of
PI systems, for example, for surface structures on semiconductors or flat-screen monitors with white light interferometry. PI piezo motor and actuator systems also help
in the precise adjustment of wafers, imaging optics and the masks in semiconductor
production.

Image: Surface

Image: Polytec GmbH

24

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CAPABILITIES OF THE PI GROUP

Photonics Packaging,
Silicon Photonics

Biotechnology/Life Sciences
Micro- and Nanopositioning Solutions

Configuring and Testing Microchips
Biotechnological applications using precise positioning system from PI are not
only limited to typical optical pro-cedures,such as focusing, or to moving and manipulation of samples in microscopy or ingenome sequencers. In nano-dosing andmicrofluidics, drive system from PI allow
the dosing of smallest volumes in procedures, such as PipeJet, or the design offinest structures by means of nanoimprint
or 3D lithography.
For manufacturing and testing components and systems, that are based on
silicon photonics, precise positioning is
crucial.
Image: B. Richter and M. Bastmeyer, Zoological
Institute, Karlsruhe Institute of Technology (KIT)

Automation:
Automotive Industry

Automation:
Electronics Production

From the supply market to precision manufacturing in automotive production, PI
offers suitable solutions such as six-axis hexapods. The integration of robotics into
the automation environment is done by PI via Fieldbus interfaces.

Tasks such as dosing of solder orsetting solder points require just as
much precision as a reliable positioning
technique for positioning printed circuitboards or aligning a focusing system forinspection. PI also offers suitable technology for feeding wires during bondingor ultrasonic welding: Piezoelectric components, voice-coil actuators or highprecision planar scanners.

The hexapod systems make it possible to reduce the installation area for the robotics considerably(Image: DYMACO GROUP)

Valve control for applying solder points
with piezoceramics

25

MOTION|POSITIONING

The PI Group Milestones
A Success Story

Well known for the high quality of its products, PI (Physik Instrumente) has been
one of the leading players in the global
market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM

products with piezo or motor drives formore than 40 years. In addition to four
locations in Germany, the PI Group isrepresented internationally by fifteen
sales and service subsidiaries. All of ourcustomers worldwide can rely on this.

Market introductionof PILine® ultrasonicpiezomotors

Foundation of PI Ceramicin Thuringia, Germany,
cornerstone for market
leadership in nanopositioning technology
Founding year
of PI

2001

1998

1994

1993

1992

Market introduction of capacitive
position sensors, implementationin piezo-based nanopositioning
systems

1991

1987

1970

Market introductionof six-axis parallelkinematic positioning
systems (Hexapods)

Market introductionof digital
control electronics
Newsubsidiaryin the USA

New
subsidiaryin Japan

New subsidiaries
in Great Britain
and France

26

W W W. P I . W S

Newsubsidiary
in Italy2015

Acquisitionof majority sharesin miCos GmbH,
Eschbach, Germany

2014Market introductionof the NEXLINE®
high-performancepiezo linear drives

2017

Market introductionof the magnetic
PIMag® direct drives

2016

Market introductionof the PICMA®
multilayer piezo
actuators

Introductionof air bearings

Acquisition ofmajority sharesin ACS Motion
Control

2002

2004

2007

2011

Acquisitionof Nelson
Air Corp., USA

Market introductionof Q-Motion®
and PiezoMikes

PIRest active
shim piezo
technology

Market introductionof NEXACT®
piezo linear drivesNew
subsidiaryin China

Engineered
motionplatforms

New subsidiaries
in Korea andSingapore

New subsidiaries
in Taiwan and theNetherlands

27

MOTION|POSITIONING|POSITIONING

Headquarters

Subsidiaries

GERMANY

USA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax+49 721 4846-1019
info@pi.ws
www.pi.ws

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax+49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax+49 36604 882-4109
info@piceramic.com
www.piceramic.com

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY

NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCESPAIN

PI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct and
up to date. Illustrations may differ from the original and are notbinding. PI reserves the right to supplement or change the information
provided without prior notice.

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TAIWAN

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KOREA
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www.pikorea.co.kr

W W W. P I . W S

BRO67E R1 Automation Platforms for Laser Material Processing 6/2018 0.1 Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2018

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