Product Lineup 2024

Leading Manufacturerof Clean Robot

Product Lineup

SCR3160CSN-300-CM

3-Axis Cylindrical Coordinate Type Single-Arm Clean Robot
Clean Robot SCR3000CSN Series
Featuring a step-out-less closed-loop control system, built-in batteryless absolute encoders
and stepping motors, this series ensures high convenience, safety and stability as well as
various ways of transferring. Suitable for various types of wafers up to 300 mm.

Characteristics◆ Step-out-less closed-loop control system under rapid load change or acceleration◆ Equipped with batteryless multi-rotation absolute sensors.
◆ Path planning handling suitable for parallel layout is optional.
◆ Payload capacity: 3 kg or less (calculated on the arm 3rd joint)◆ Compatible with the former SHR model and current SCR3000CS series,
this SCR3000CSN series ensures easier replacement.

Speciﬁcations
Carrying object● Usage environment and speciﬁcations● Option

Atmosphere*CE or KCs marking isavailable upon request.
● Transfer method

OptionWafers up to 300 mm
ArmRotation angle

Vertical stroke

Operating range*(3rd joint center)

340 mm340 degrees

300 mmSpeed (Avg)*

610 mm/sec

340 degree/sec

250 mm/sec

Speed (Max)*

1220 mm/sec

500 degree/sec

320 mm/sec

Resolution*

10.0 µm or less0.0015 degrees

2.00 µm

Handling level*536 mm (Base mounting level to the end-eﬀector level)

Repeatability

Within +/- 0.1 mm

Cleanliness

ISO Class 2 (when exhausted from the driving area)

Utility*

Power: 24 V DC +/- 10%, 10 A; Vacuum: -53 kPa or more

*Speciﬁcations of SCR3160CSN-300-CM with a JEL standard vacuum type end-eﬀector.
Provide positive pressure depending on the wafer holding method such as edge grip or Bernoulli.
● Robot s main body weight: Approximately 22 kg● Dimensions of C4000B controller: 297 (W) x 180 (D) x 120 (H), Weight: Approximately 5 kg
Note: A CE/KCs compliant controller has diﬀerent dimensions and weight.

SCR3000 series◆ A wide range of variations to meet system layouts

S C R 3 1 6 0 C S N - 3 0 0 - CM

Controller: C4000B● Control method: RS232C andparallel photo I/O

Arm lengthZ-axis stroke

1 0 0
1 3 0
2 0 0

2 0 0
4 0 0 *
5 0 0 *
6 0 0 *

*Optional variation● Check our website for our productdrawings and videos.

https://www.jel-robot.com

JEL
Teaching box: JCT3B

1

JEL Corporation

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STCR4160SN-300-CM
4-Axis Cylindrical Coordinate Type Twin-Arm Clean Robot
Clean Robot STCR4000SN Series
Featuring a step-out-less closed-loop control system, built-in batteryless absolute encoders
and stepping motors, this series ensures high convenience, safety and stability as well as
various ways of transferring. Suitable for various types of wafers up to 300 mm.
● Usage environment and speciﬁcations

Characteristics◆ Twin-arm reduces tact time to replace wafers.
◆ Step-out-less closed-loop control system under rapid load change or acceleration◆ Equipped with batteryless multi-rotation absolute sensors.
◆ Path planning handling suitable for parallel layout is optional.
◆ Payload capacity: 3 kg or less (calculated on the arm 3rd joint)◆ Compatible with the former STHR model and current STCR4000S series,
this STCR4000SN series ensures easier replacement.

Speciﬁcations
Carrying object● Option● Transfer method

OptionArm

Rotation angle

Vertical stroke

Operating range*(3rd joint center)

315 mm340 degrees

300 mmSpeed (Avg)*

570 mm/sec

220 degree/sec

200 mm/sec

Speed (Max)*1140 mm/sec

270 degree/sec

250 mm/sec

Resolution*

12.6 µm or less0.0045 degrees

6.25 µm

Handling level*620 mm (Base mounting level to the end-eﬀector level)

Repeatability

Within +/- 0.1 mm

Cleanliness

ISO Class 2 (when exhausted from the driving area)

Utility*

Power: 24 V DC +/- 10%, 10 A; Vacuum: -53 kPa or more

Atmosphere*CE or KCs marking isavailable upon request.

Wafers up to 300 mm*Speciﬁcations of STCR4160SN-300-CM with JEL standard vacuum type twin end-eﬀectors.
Provide positive pressure depending on the wafer holding method such as edge grip or Bernoulli.
● Robot s main body weight: Approximately 30 kg● Dimensions of C4000B controller: 297 (W) x 180 (D) x 120 (H), Weight: Approximately 5 kg
Note: A CE/KCs compliant controller has diﬀerent dimensions and weight.

STCR4000 series◆ A wide range of variations to meet system layouts

S T C R 4 1 6 0 S N - 3 0 0 - CM

Controller: C4000B● Control method: RS232C andparallel photo I/O

Arm lengthZ-axis stroke

1 0 0
1 3 0
2 0 0

2 0 0
4 0 0 *
5 0 0 *
6 0 0 *

*Optional variation● Check our website for our productdrawings and videos.

https://www.jel-robot.com

JEL

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Teaching box: JCT3B

Leading Manufacturer of Clean Robot2

SCR3160CS-300-PM

3-Axis Cylindrical Coordinate Type Single-Arm Clean Robot
Clean Robot SCR3000CS Series
Featuring an open-loop control system and stepping motors, this series ensures high safety
and stability. This JEL s long-term standard robot allows users to customize easily.
Suitable for various types of wafers up to 300 mm.

Characteristics◆ Base or ﬂange mounting type is selectable according to system layouts.
◆ Optimal end-eﬀector is selectable according to the carrying object and line layout.
◆ Payload capacity: 3 kg or less (calculated on the arm 3rd joint)◆ Compatible with the former SHR model and current SCR3000CSN series,
this SCR3000CS series ensures easier replacement.

Speciﬁcations
Carrying object● Option

Atmosphere*CE marking is available
upon request.
● Transfer method

Wafers up to 300 mm
ArmRotation angle

Vertical stroke

Operating range*(3rd joint center)

340 mm340 degrees

300 mmSpeed (Avg)*

610 mm/sec

340 degree/sec

250 mm/sec

Speed (Max)*

1220 mm/sec

500 degree/sec

320 mm/sec

Resolution*

12.6 µm or less0.0045 degrees

6.25 µm

Handling level*536 mm (Base mounting level to the end-eﬀector level)

Repeatability

Within +/- 0.1 mm

Cleanliness

ISO Class 2 (when exhausted from the driving area)

Utility*

Power: 24 V DC +/- 10%, 15 A; Vacuum: -53 kPa or more

● Usage environment and speciﬁcations*Speciﬁcations of SCR3160CS-300-PM with a JEL standard vacuum type end-eﬀector.
Provide positive pressure depending on the wafer holding method such as edge grip or Bernoulli.
● Robot s main body weight: Approximately 20 kg● Dimensions of C4000 controller: 300 (W) x 110 (D) x 120 (H), Weight: Approximately 2 kg
Note: A CE/KCs compliant controller has diﬀerent dimensions and weight.

SCR3000 series◆ A wide range of variations to meet system layouts

S C R 3 1 6 0 C S - 3 0 0 - PM

Controller: C4000● Control method: RS232C andparallel photo I/O

Arm lengthZ-axis stroke

1 0 0
1 3 0
2 0 0

2 0 0
4 0 0 *
5 0 0 *
6 0 0 *

*Optional variation● Check our website for our productdrawings and videos.

https://www.jel-robot.com

JEL
Teaching box: JCT13JEL Corporation

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STCR4160S-300-PM

4-Axis Cylindrical Coordinate Type Twin-Arm Clean Robot
Clean Robot STCR4000S series
Featuring an open-loop control system and stepping motors, this series ensures high safety
and stability. This JEL s long-term standard robot allows users to customize easily.
Suitable for various types of wafers up to 300 mm.
● Usage environment and speciﬁcations● Option● Transfer method◆ Twin-arm reduces tact time to replace wafers.
◆ Base or ﬂange mounting type is selectable according to system layouts.
◆ Optimal end-eﬀector is selectable according to the carrying object and line layout.
◆ Payload capacity: 3 kg or less (calculated on the arm 3rd joint)◆ Compatible with the former STHR model and current STCR4000SN series,
this STCR4000S series ensures easier replacement.

Speciﬁcations
Carrying object

Wafers up to 300 mm
ArmRotation angle

Vertical stroke

Operating range*(3rd joint center)

315 mm340 degrees

300 mmSpeed (Avg)*

570 mm/sec

220 degree/sec

200 mm/sec

Speed (Max)*1140 mm/sec

270 degree/sec

250 mm/sec

Resolution*

12.6 µm or less0.0045 degrees

6.25 µm

Handling level*620 mm (Base mounting level to the end-eﬀector level)

Repeatability

Within +/- 0.1 mm

Cleanliness

ISO Class 2 (when exhausted from the driving area)

Utility*

Power: 24 V DC +/- 10%, 16 A; Vacuum: -53 kPa or more

Atmosphere*CE marking is available
upon request.

Characteristics*Speciﬁcations of STCR4160S-300-PM with JEL standard vacuum type twin end-eﬀectors.
Provide positive pressure depending on the wafer holding method such as edge grip or Bernoulli.
● Robot s main body weight: Approximately 30 kg● Dimensions of C4000 controller: 300 (W) x 110 (D) x 120 (H), Weight: Approximately 2 kg
Note: A CE/KCs compliant controller has diﬀerent dimensions and weight.

STCR4000 series◆ A wide range of variations to meet system layouts

S T C R 4 1 6 0 S - 3 0 0 - PM

Controller: C4000● Control method: RS232C andparallel photo I/O

Arm lengthZ-axis stroke

1 0 0
1 3 0
2 0 0

2 0 0
4 0 0 *
5 0 0 *
6 0 0 *

*Optional variation● Check our website for our productdrawings and videos.

https://www.jel-robot.com

JEL
Teaching box: JCT1

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Leading Manufacturer of Clean Robot

4

GCR4210-300-PM

Characteristics

4-Axis Horizontal and Multi-Joint Type Single-Arm Clean Robot
Clean Robot GCR4000-PM Series
Featuring stepping motors with absolute encoders, this series ensures high safety and stability.
This JEL s long-term standard robot allows users to customize easily.
Suitable for various types of wafers up to 300 mm.
● Usage environment and speciﬁcations● Option

Atmosphere*CE marking is available
upon request.
● Transfer method◆ 2 FOUP access without a track◆ Base or ﬂange mounting type is selectable according to system layouts.
◆ Payload capacity: 3 kg or less (calculated on the arm 3rd joint)

Speciﬁcations
Carrying object

Wafers up to 300 mm
ArmRotation angle

Vertical stroke

Operating range*(3rd joint center)

400 mm335 degrees

300 mmSpeed (Avg)*

730 mm/sec

280 degree/sec

200 mm/sec

Speed (Max)*

1100 mm/sec

400 degree/sec

250 mm/sec

Resolution*

0.0055 degrees

0.0025 degrees

6.25 µm

Handling level*620 mm (Base mounting level to the end-eﬀector level)

Repeatability

Within +/- 0.1 mm

Cleanliness

ISO Class 2 (when exhausted from the driving area)

Utility*

Power: 24 V DC +/- 10%, 15 A; Vacuum: -53 kPa or more

*Speciﬁcations of GCR4210-300-PM with a JEL standard vacuum type end-eﬀector.
Provide positive pressure depending on the wafer holding method such as edge grip or Bernoulli.
● This series comes in two types of motors: stepping motors or AC servo motors.
● Robot s main body weight: Approximately 28 kg● Dimensions of C4451 controller: 300 (W) x 230 (D) x 142 (H), Weight: Approximately 2 kg
Note: A CE/KCs compliant controller has diﬀerent dimensions and weight.

GCR-PM series◆ A wide range of variations to meet system layouts

GC R 4 2 1 0 - 3 0 0 - PM
Z-axis stroke

Motorspeciﬁcations

4 0 0* AM
5 0 0* AM*Optional variation
Controller: C4451● Control method: RS232C andparallel photo I/O● Check our website for our productdrawings and videos.

https://www.jel-robot.com

Teaching box: JCT5B

5JEL CorporationJEL

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Many products other than those listed are available. Please contact our sales representatives for details.

GTCR5280-300-AM

5-Axis Horizontal and Multi-Joint Type Single-Arm Twin End-Eﬀector Clean Robot
Clean Robot GTCR5000 Series
Twin end-eﬀectors mounted on its single-arm, this series has the same function as a twin-arm robot.
AC servo motors capable of high-speed handling ensures high safety and stability.
Suitable for various types of wafers or substrates as well as wafers up to 300 mm.

Characteristics◆ Capable of transferring large diameter wafers and small FPD glass substrates.
◆ High-speed 3 FOUP access without a track for 300 mm wafers.
◆ AC servo motors with absolute encoders are installed in all axes.
◆ High-speed and high-accuracy wafer handling by optimizing pass control.
◆ Payload capacity: 4 kg or less (calculated on the arm 3rd joint)

Speciﬁcations
Carrying object● Usage environment and speciﬁcations● Option● Transfer method

Arm

Rotation angle

Vertical stroke

Operating range*(3rd joint center)

553 mm335 degrees

300 mmSpeed (Avg)*

833 mm/sec

250 degree/sec

300 mm/sec

Speed (Max)*

1400 mm/sec

350 degree/sec

450 mm/sec

Resolution*

0.0011 degrees

0.0013 degrees

1.96 µm

Handling level*698 mm (Base mounting level to the end-eﬀector level)

Repeatability

Within +/- 0.1 mm

Cleanliness

ISO Class 2 (when exhausted from the driving area)

Utility*

Power: Single phase 200 V AC +/- 10%, 20 A; Vacuum: -53 kPa or more

Atmosphere*CE marking is available
upon request.

Wafers up to 300 mm*Speciﬁcations of GTCR5280-300-AM with JEL standard vacuum type twin end-eﬀectors.
Provide positive pressure depending on the wafer or substrate holding method such as edge grip or Bernoulli.
● Robot s main body weight: Approximately 53 kg● Dimensions of C5000S controller: 370 (W) x 330 (D) x 270 (H), Weight: Approximately 15 kg
Note: A CE/KCs compliant controller has diﬀerent dimensions and weight.

GTCR series◆ A wide range of variations to meet system layouts

G T C R 5 2 8 0 - 3 0 0 - AM
Arm lengthZ-axis stroke

2 1 0Controller: C5000S● Control method: RS232C andparallel photo I/O*

3 2 0 *
4 2 0 *

*Optional variation● Check our website for our productdrawings and videos.

https://www.jel-robot.com

Teaching box: JCT5B

JEL

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Leading Manufacturer of Clean Robot

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SVCR3260-020-PM

3-Axis Cylindrical Coordinate Type Single-Arm Clean Robot
Vacuum Clean Robot SVCR3000 Series
Suitable for various types of wafers up to 300 mm in a vacuum environment.
Featuring an open-loop control system and stepping motors, this series ensures high safety
and stability. This JEL s long-term standard robot allows users to customize easily.
● Usage environment and speciﬁcations● Option

Vacuum

*CE or KCs marking isavailable upon request.
● Transfer method

Characteristics◆ Suitable for vacuum environment◆ Magnetic ﬂuid sealing is used in each arm joint.
◆ Vacuum sealing: Magnetic ﬂuid sealing and a bellows are used.
◆ Cleanliness: A mesh ﬁlter is installed for the internal exhaust of the arm.
◆ Payload capacity: 2 kg or less (calculated on the arm 3rd joint)◆ Compatible with the former SVHR model, this series ensures easier replacement.

Speciﬁcations
Carrying object

Wafers up to 300 mm
ArmRotation angle

Vertical stroke

Operating range*(3rd joint center)

520 mm

330 degrees

20 mm

Speed (Avg)*

300 mm/sec

120 degree/sec

20 mm/sec

Speed (Max)*

550 mm/sec

170 degree/sec

30 mm/sec

Resolution*

82 µm or less0.009 degrees

1.25 µm

Handling level*

98 mm (Flange mounting level to the end-eﬀector level)

Repeatability

Within +/- 0.1 mm

Cleanliness

Magnetic ﬂuid sealing and a ﬁlter

Vacuum resistance

1.33 x 10 -6 Pa

Utility*

Power: 24 V DC +/- 10%, 8 A* Representative speciﬁcations of SVCR3260-020-PM (stepping motor type)● This series comes in two types of motors: stepping motors or AC servo motors.
● Robot s main body weight: Approximately 25 kg● Dimensions of C4000 controller: 300 (W) x 110 (D) x 120 (H), Weight: Approximately 2 kg
Note: A CE/KCs compliant controller has diﬀerent dimensions and weight.

SVCR3000 series◆ A wide range of variations to meetsystem layouts

S VC R 3 2 6 0 - 0 2 0 - PM
Controller: C4000● Control method: RS232C andparallel photo I/O

Arm lengthZ-axis stroke

Motorspeciﬁcations

1 6 0
1 9 0
3 3 0

0 4 0

AM

● Check our website for our productdrawings and videos.

https://www.jel-robot.com

Teaching box: JCT17JEL CorporationJEL

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STVCR4160S-050-PM
4-Axis Cylindrical Coordinate Type Twin-Arm Clean Robot
Vacuum Clean Robot STVCR4000S Series
Suitable for various types of wafers up to 300 mm in a vacuum environment.
Featuring an open-loop control system and stepping motors, this series ensures high safety
and stability. This JEL s long-term standard robot allows users to customize easily.
● Usage environment and speciﬁcations● Option● Transfer method◆ Suitable for vacuum environment◆ Twin-arm reduces tact time to replace wafers.
◆ Magnetic ﬂuid sealing is used in each arm joint.
◆ Vacuum sealing: Magnetic ﬂuid sealing and a bellows are used.
◆ Cleanliness: A mesh ﬁlter is installed for the internal exhaust of each arm.
◆ Payload capacity: 2 kg or less (calculated on the arm 3rd joint)◆ Compatible with the former STVHR model, this series ensures easier replacement.

Speciﬁcations
Carrying object

Wafers up to 300 mm
ArmRotation angle

Vertical stroke

Operating range*(3rd joint center)

310 mm

330 degrees

50 mm

Speed (Avg)*

300 mm/sec

110 degree/sec

30 mm/sec

Speed (Max)*

550 mm/sec

150 degree/sec

50 mm/sec

Resolution*

10.06 µm or less0.00225 degrees

0.625 µm

Handling level*

196 mm (Flange mounting level to the upper end-eﬀector level)

Repeatability

Within +/- 0.1 mm

Cleanliness

Magnetic ﬂuid sealing and ﬁlters

Vacuum resistance

1.33 x 10 -6 Pa

Utility*

Power: 24 V DC +/- 10%, 16 A

Vacuum

*CE or KCs marking isavailable upon request.

Characteristics* Representative speciﬁcations of STVCR4160S-050-PM (stepping motor type)● This series comes in two types of motors: stepping motors or AC servo motors with absolute encoders.
● Robot s main body weight: Approximately 80 kg● Dimensions of C4000 controller: 300 (W) x 110 (D) x 120 (H), Weight: Approximately 2 kg
Note: A CE/KCs compliant controller has diﬀerent dimensions and weight.

STVCR4000 series◆ A wide range of variations to meet system layouts

S T VC R 4 1 6 0 S - 0 5 0 - PM
Controller: C4000● Control method: RS232C andparallel photo I/O

Arm lengthMotorspeciﬁcations

1 9 0
2 6 0

AM

● Check our website for our productdrawings and videos.

https://www.jel-robot.com

Teaching box: JC4B

JEL

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Leading Manufacturer of Clean Robot

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GTVCR5330-060-AM
5-Axis Horizontal and Multi-Joint Type Single-Arm Twin End-Eﬀector Clean Robot
Vacuum Clean Robot GTVCR5000 Series
Capable of transferring to parallel stages in vacuum chambers.
Featuring AC servo motors that are capable of high-speed handling, this series ensures high safety and stability.
Suitable for various types of wafers or substrates as well as wafers up to 300 mm in a vacuum environment.
● Usage environment and speciﬁcations● Option

Vacuum*CE marking is available
upon request.
● Transfer method

Characteristics◆ Suitable for vacuum environment◆ Capable of transferring to parallel stages in vacuum chambers.
◆ Magnetic ﬂuid sealing is used in each arm joint.
◆ Vacuum sealing: Magnetic ﬂuid sealing and a bellows are used.
◆ Cleanliness: A mesh ﬁlter is installed for the internal exhaust of each arm.
◆ Payload capacity: 4 kg or less (calculated on the arm 3rd joint)

Speciﬁcations
Carrying object

Wafers up to 300 mm
ArmRotation angle

Vertical stroke

Operating range*(3rd joint center)

635 mm360 degrees

60 mm

Speed (Avg)*

640 mm/sec

160 degree/sec

60 mm/sec

Speed (Max)*

950 mm/sec

200 degree/sec

85 mm/sec

Resolution*

0.00081 degrees

0.00072 degrees

0.98 µm

Handling level*219 mm (Flange mounting level to the upper end-eﬀector level)

Repeatability

Within +/- 0.1 mm

Cleanliness

Magnetic ﬂuid sealing and a ﬁlter

Vacuum resistance

1.33 x 10 -6 Pa

Utility*

Power: Single phase 200 to 230 V AC +10% to -15%, 2 kVA, 50/60 Hz* Representative speciﬁcations of GTVCR5330-060-AM● Robot s main body weight: Approximately 75 kg● Dimensions of C5000S controller: 370 (W) x 330 (D) x 270 (H), Weight: Approximately 23 kg
Note: A CE/KCs compliant controller has diﬀerent dimensions and weight.

GTVCR5000 series◆ A wide range of variations to meetsystem layouts

G T C R 5 3 3 0 - 0 6 0 - AM
Arm length

Controller: C5000S● Control method: RS232C andparallel photo I/O

2 8 0● Check our website for our productdrawings and videos.

https://www.jel-robot.com

Teaching box: JCT5B

9JEL CorporationJEL

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SAL38C3HVCharacteristics

Aligner for Multiple Types of Wafers
A prealigner for aligning multiple types of wafers̶regardless of wafer materials such as mirror surface,transparent or translucent wafer; warped wafer; or non-standard notch or orientation ﬂat.
Just one aligner handles ever-diﬃcult positioning of wafers with irregular warpage or
diﬀerent light transmittance. (*1)
● Usage environment and speciﬁcations● Option

Speciﬁcations
Carrying object

2 inch to 150 mm (SAL3262HV)
100 to 200 mm (SAL3482HV)
200 to 300 mm (SAL38C3HV)

Positioning time

Centering: 3 sec (*1)

Positioning accuracy

Centering: Within +/- 0.1 mm (*1)
Orientation ﬂat/notch locating: Within +/- 0.1 degrees (*1)

Sensor method

LED lighting with wafer edge detection using an image sensor unit

Wafer size switching

Switching by command control or by communication

Cleanliness

ISO Class 2 (when exhausted from the driving area)

Utility

Power: 24 V DC +/- 10%, 3 A; Vacuum: -53 kPa or more

Atmosphere*CE or KCs marking isavailable upon request.

◆ Available for silicon wafers with BG tape as well as silicon, transparent,or translucent wafers.
◆ Available for non-SEMI standard notch or ﬂat.
◆ Z-axis capable of redo operations is optional.
◆ Full auto-adjustment software JEL ALIGN TOOL comes with the aligner.
◆ Motor drivers and a controller are built in the aligner.

● Aligner s main body weight: Approximately 10 kg(*1): The accuracies of wafer detection, positioning time or positioning may vary depending on the wafer.
An operation test using the target sample wafers is performed before delivery.

SAL3000HV series◆ A wide range of variations to meet your wafer size

S A L 3 8 C 3 H VZ *Wafer size

Z-axis

2 6
4 8*Optional variation● Check our website for our productdrawings and videos.

https://www.jel-robot.com

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Leading Manufacturer of Clean Robot

10

GCR4280-300-AM

Atmosphere

4-Axis Horizontal and Multi-Joint Type Single-Arm Clean Robot
Clean Robot GCR4280-AM Series
Characteristics◆ Arm length: 280 mm◆ 3 FOUP access for 300 mm wafers without a track◆ Vertical stroke: 300 mm, 420 mm◆ Payload capacity: 4 kg or less (calculated on the arm 3rd joint)◆ Base or ﬂange mounting type is selectable according to system layouts.
◆ AC servo motors with absolute encoders are installed in all axes.
◆ Wafer holding: end-eﬀector with vacuum suction, passive edge,
or edge grip

KHR3480-290-AM

Atmosphere

MCR3160C-300-AM

Atmosphere

Linear arm type clean robot (for 25 wafers batch transfer, 300 mm wafers) 3-Axis Cylindrical Coordinate Type Single-Arm Clean Robot
Capable of transferring 25 wafers at once.
The transfer time can be signiﬁcantly reduced by batch transfer.
Available for the layout with multiple cassettes by equipping a rotation axis.
Characteristics◆ RS232C are standard for control.
◆ End-eﬀector material: ceramic◆ Wafer holding: end-eﬀector with passive edge, edge alignment.
◆ AC servo motors with absolute encoders installed in all axes (Batteryless)

MTCR4160-300-AM

Atmosphere

4-Axis Cylindrical Coordinate Type Twin-Arm Clean Robot

11

Clean Robot MCR3000C Series
High-speed handling by AC servo motors for all axes.
Suitable for high throughput.

Characteristics◆ Arm length: 160 mm, 200 mm, 280 mm◆ Vertical stroke: 300 mm, 400 mm, 420 mm, 500 mm◆ Payload capacity: 4 kg or less (calculated on the arm 3rd joint)◆ Base or ﬂange mounting type is selectable according to system layouts.
◆ AC servo motors with absolute encoders are installed in all axes.
◆ Wafer holding: end-eﬀector with vacuum suction, passive edge,
edge grip, or Bernoulli type

SVCR3330-060-AM

Vacuum

3-Axis Cylindrical Coordinate Type Single-Arm Clean Robot

Clean Robot MTCR4000 Series

Vacuum Clean Robot SVCR3000 Series

High-speed handling by AC servo motors for all axes.
Suitable for high throughput.

Designed for handing of heavy weight carrying objects
such as susceptors or trays in vacuum chambers.

Characteristics

Characteristics◆ Arm length: 160 mm, 200 mm, 280 mm◆ Vertical stroke: 300 mm, 400 mm, 420 mm, 500 mm◆ Payload capacity: 4 kg or less (calculated on the arm 3rd joint)◆ Twin-arm reduces tact time to replace wafers.
◆ Base or ﬂange mounting type is selectable according to system layouts.
◆ AC servo motors with absolute encoders are installed in all axes.
◆ Wafer holding: end-eﬀector with vacuum suction, passive edge, edge grip,
or Bernoulli type

◆ Arm length: 330 mm◆ Vertical stroke: 60 mm◆ Payload capacity: 10 kg or less (calculated on the arm 3rd joint)◆ Magnetic ﬂuid sealing is used in each arm joint.
◆ Vacuum sealing: Magnetic ﬂuid sealing and a bellows are used.
◆ Cleanliness: A mesh ﬁlter is installed for the internal exhaust of the arm◆ AC servo motors with absolute encoders are installed in all axes.
◆ Wafer holding: end-eﬀector with passive edge

JEL Corporation

Many products other than those listed are available. Please contact our sales representatives for details.

SWCR3160CS-300-PM

Waterproof

3-Axis Cylindrical Coordinate Type Single-Arm Clean Robot
Waterproof Clean Robot SWCR3000 Series

Edge grip with the ﬂip function for 300 mm wafers.
Designed for handling wafers in LSI production lines under acid conditions or
alkaline mist (IP64).

STWCR4160S-300-PM

Waterproof

4-Axis Cylindrical Coordinate Type Twin-Arm Clean Robot
Waterproof Clean Robot STWCR4000 Series

Edge grip with the ﬂip function for 300 mm wafers.
Designed for handling wafers in LSI production lines under acid conditions or
alkaline mist (IP64).

Characteristics

Characteristics◆ Arm length: 160 mm◆ Vertical stroke: 200 mm, 300 mm◆ Payload capacity: 3 kg or less (calculated on the arm 3rd joint)◆ Corrosion resistance teﬂon coatings protect the arm.
◆ V-type seals are used for waterprooﬁng of the arm joint.
◆ FKM seals are used for parts joint.
◆ A bellows is used for waterprooﬁng of the z-axis.
◆ 2-phase stepping motors are installed in all axes.
◆ Wafer holding: end-eﬀector with vacuum suction, passive edge, or edge grip

◆ Vertical stroke: 200 mm, 300 mm◆ Payload capacity: 3 kg or less (calculated on the arm 3rd joint)◆ Corrosion resistance teﬂon coatings protect the arm.
◆ V-type seals are used for waterprooﬁng of the arm joint.
◆ FKM seals are used for parts joint.
◆ A bellows is used for waterprooﬁng of the z-axis.
◆ Twin-arm reduces tact time to replace wafers.
◆ 2-phase stepping motors are installed in all axes.
◆ Wafer holding: end-eﬀector with vacuum suction, passive edge, or edge grip

SAL20C1

Atmosphere
大気

Edge Grip Type Aligner for 300 mm Wafers
Edge grip type prealigner minimizes
a wafer contact.
Characteristics

Transfer System

Atmosphere

Tabletop Loader System / Sorter System / Automatic Wafer Transfer System for Wafer Container
A variety of systems from a tabletop to a large box shape to meet your needs
Tabletop Loader System

Sorter System

SSY-10000(Tabletop loader systemfor 100 mm wafers)◆ High-speed and high-accuracy wafer centering and notch locatingby the edge grip function.
◆ Designed to reduce contamination of friction surface.
◆ Suitable for 150 mm, 200 mm or other sizes of wafers.

SORTER SYSTEM
150 mm◆ Motor drivers and a controller are built in the aligner.

SVAL3001

VacuumVacuum Aligner

Automatic Wafer Transfer System
for Wafer Container
SSY-10010(Automatic wafertransfer system
for wafer container)

Edge grip type prealigner for positioning siliconwafers or susceptors in a vacuum environment.
Characteristics◆ Payload capacity: 4 kg
◆ Stand-alone aligner using a vacuum resistance positioning sensor◆ Vacuum sealing: Magnetic ﬂuid sealing and a bellows are used.

SORTER SYSTEM（4-port inline type）◆ Rotation to any angle by index function which matches a layout ofwafers in a tray

Leading Manufacturer of Clean Robot

12

● End-Eﬀector Lineup

Vacuum Suction Type End-Eﬀector

Bernoulli Hand

Used extensively for atmospheric robots, these vacuum suction type end-eﬀectors hold the backside of a wafer byvacuum suction (negative pressure).
Conductive teﬂon coating on the surface of the end-eﬀectors protect against damage from charging.

in semiconductor device production processes or in semiconductor wafer
manufacturing factories, this wafer handling device is used to manually
pick up/place thin wafers from/in wafer containers or cassettes.

I-shaped and Y-shaped vacuum suction type end-eﬀectors

A Bernoulli wand for 2 to 3 inch, 100 to 150 mm wafers

Bernoulli Hand, a light and compact wand, holds thin wafers using the Bernoulli principle.
Wafer breakage risk is minimized due to non-suction holding.
With the ﬂexible front edge, Bernoulli Hand picks up/places wafers from/in wafer containers
or wafer cassettes. Accessible to various special substrates as well as wafers.

Characteristics
SC-YW-200

SC-YW-227

3D-02229

3D-01661

3 inch, 100 to
200 mm

100 to 200 mm

100 to 200 mm

150 to 300 mm

300 mm

200 mm

240 mm

200 mm

227 mm

242 mm

242 mm

2 mm

2 mm

2 mm

2 mm

2 mm

3 mm

Model

SC-IW-200

Carrying object

Mainly silicon wafers

Size

3 inch, 100 to
200 mmTotal length
Thickness
Material

High purity alumina ceramic sintered bodySurface treatment

Conductive teﬂon coating

SC-IW-240

Wafer holding Vacuum suction◆ Wafers are lifted by the Cyclone
eﬀect.
◆ Wafer holding by a pad(Fluorine-contained rubber)◆ An operator can adjust Bernoulli
Hand in various angles witha ﬂexible tube.
Note: Please contact our sales
representatives for various
shapes and sizes of otherwafers or substrates.

Other end-eﬀectors for various shapes and sizes of wafers or substrates are also available.

Bernoulli End-Eﬀector

Edge Grip End-Eﬀector

Low cost end-eﬀectors for thin or warped wafers using the Bernoulli principle are suitable for any type of JEL atmospheric robots.
Design solution and evaluation using sample wafers based on the customer's request about the wafer size, warpage or thickness.

Centering of a wafer during operation is suitable for transferring to the drop-in type stage.
An air cylinder moves a guide of the edge grip end-eﬀector back and forth to hold a wafer.

Contact type and non-contact type Bernoulli end-eﬀectors

Non-contact typeContact type13

JEL Corporation

Material

Aluminum

Surfacetreatment

Black alumite

Waferholding
methodBy Bernoulli s principle using Cyclone pads
and guides (PEEK)

Utility

30 to 80 L/min(Varies depending on the wafer size and thickness.)

Material

Aluminum

Surfacetreatment

Black alumite

Waferholding
methodBy Bernoulli s principle using Cyclone pads
and friction rubber (H-NBR)

Utility

30 to 80 L/min(Varies depending on the wafer size and thickness.)(Various materials are available for the contact area.)(Various materials are available for the contact area.)

An end-eﬀector for handling the back side treated wafers,
which contacts the edges only.

Passive Edge Holding Type
End-Eﬀector

Suitable for handling warped wafers or thin wafers that cannot be heldproperly with a standard vacuum suction type end-eﬀector.

An end-eﬀector for handling wafers, which contacts the back side as well as the edges.
A tapered guide is used to hold a wafer by the weight of a wafer (passive grip).

Many products other than those listed are available. Please contact our sales representatives for details.

● How to Select JEL Robots
Payload Capacity and Maximum Operating Range

Product Series

Payloadcapacity(*1)

LTHR4400

Twin arm

Main use and transfer method

SCR3000CS

STCR4000S

For semiconductors (Cylindrical)

SCR3000CSN STCR4000SN For semiconductors (Cylindrical)

15 kg

LHR3400

Atmospheric MCR3000
robot
GCR4000

MTCR4000

For semiconductors (Cylindrical)

GTCR5000

For semiconductors(Horizontal and multi-joint)

LHR3000

LTHR4000For FPD glass substrates (Cylindrical)

STVCR4000

For semiconductors (Cylindrical)

LVHR3440
10 kg

Vacuum robot SVCR3000

SVCR3330

4 kg

GCR4210-AM

GCR4280-AM

MTCR4160

MTCR4200

MTCR4280

MCR3160

MCR3200

Waterproof robot SWCR3000CS STWCR4000S For semiconductors (Cylindrical)

Transfer Method

GCR4210-PM
3 kg

Single arm

STCR4100S

STVCR4190

STCR4200S

SCR3100CS

SVCR3190

SCR3200CS

Cylindricalcoordinate type
robot

Suitable for arc layout

Horizontal andmulti-joint type
robot

Suitable for parallel layout

Robot Training
JEL provides our customers
with robot trainings for safeand eﬀective operations.

STVCR4160
2 kg

SVCR3160

SVCR3260[ Training place ]JEL Head oﬃce
JEL Tokyo branch● Overseas service base●

400 mm

600 mm

800 mm1000 mm1500 mm

Maximum operating distance (*2)●(*1) Payload capacity values are the values calculated on the arm 3rd joint, and not the weight of carrying objects.
(*2) Maximum operating distance values are reference values including the end-eﬀector and wrist-block.
Note: Many products other than those listed are available. For more details, visit our website: www.jel-robot.com

Leading Manufacturer of Clean Robot

14

Domestic service baseOverseas Agents & Service Bases
Ko r e a

Head Office

Ta i w a n

Be i j i n g

Tokyo Branch
JELK CO., LTD.

https://www.jelk.co.kr
75, Seokmun-gil, Seonggeo-eup,
Seobuk-gu, Cheonan-si,
Chungnam-do 31053, Korea
TEL: +82-41-583-6360
FAX: +82-41-583-6469
E-mail: master@jelk.co.kr

Challentech
International
Corporation

https://www.challentech.com.tw
No.21, Taihe Rd., Zhubei City,
Hsinchu County 30267, Taiwan (R.O.C.)
TEL: +886-3-5536525
FAX: +886-3-5531908
E-mail: ｌobo@challentech.com.tw

Overseas Agents
2-8-20, Kusado-cho, Fukuyama-city,
Hiroshima, 720-0831 JAPANTEL: +81-84-932-6500
E-mail: info@jel-robot.co.jp

Inatech & CORP Inc.

http://www.inatechncorp.com

JEL Kochi
Techno Park 4, Tosayamada-cho,Kami-city, Kochi,
782-0010 JAPANTEL： +81-84-952-5590

S hanghai

S hanghai

Location map

Domestic production base245-1 Saba-cho, Fukuyama-city,
Hiroshima, 720-0835 Japan

TEL： +86-10-5382-2087,+86-133-2115-2839
E-mail： xiaoshou06@reje.com.cn

Contact NAGASE's
office in China

TEL： +81-3-5825-9071
Location map E-mail：tokyjim@jel-robot.co.jp

Saba Factory

https://www.reje.com.cn
Building 3, No.10, Kechuang 10th Street,
BDA, Beijing 101111, China

Overseas Partners

K oreaKanda Bundo Building 2F, 4-18,
Kandasakuma-cho, Chiyoda-ku,
Tokyo, 101-0025 JAPANBeijing REJE
Automation Co., Ltd.

#C-812, 168, Gasan digital
1-ro, Geumcheon-gu,
Seoul 08507, Korea

TEL: +82-2-2026-0660
FAX: +82-2-2026-0661
E-mail: jel-robot@inacorp.co.kr

TEL： +81-887-53-1181
E-mail： kochi@jel-robot.co.jp

Shanghai REJE
Robotics Co., Ltd.

https://www.reje.com.cn

6F, CHAMTIME Tower C, No.3, Lane 2889
JinkeRoad, Pudong New District,
Shanghai 200120, P.R. China

TEL： +86-21-2050-1619, +86-178-1202-2295
E-mail： xiaoshou05@reje.com.cn

Tai w an

U .S .A (FL )Sintaike Semiconductor
Equipment (Shanghai)Co., Ltd.
http://www.sintaike.com

3-4F, Building 6, No. 123 Nanfang Town,
Lane 1165, Jindu Rd, Minhang Dist.,
Shanghai 201108, P. R. China
TEL : +86-21-52231829（Landline）+86-13564665802（Mobile）
E-mail： info@sintaike.com

Location map

Location map

Overseas sales base
Korea Branch

JEL (Shanghai) Robotics Co., Ltd.

Company proﬁle625 6F, CHAMTIME Tower C, No.3,
Lane 2889 Jinke Road, Pudong
New District, Shanghai P.R., China

F20Ho, 4F 401,402Ho, 526,
Maesonggosaek-ro, Gwonseon-gu,
Suwon-si, Gyeonggi-do 16634, Korea

TEL : +86-21-2050-1625 (Landline)+86-13021105268 (Mobile)
E-mail: shanghai@jel-robot.com

TEL : Korea) +82-10-6759-6360
Japan) +81-80-6340-9905（080-6340-9905）
E-mail: jkl@jel-robot.co.jp

Name: JEL Corporation
Capital : 74,570,000 (JPY)● Founded : 1993
● President : Nobuo Sakiya

Hine Automation, LLC

1F., No. 29, Jiazheng 9th St.,
Zhubei City, Hsinchu County 302053,
Taiwan (R.O.C.)

12495 34th St. North, Suite B
St. Petersburg, FL 33716, U.S.A.

https://www.jel-automation.com

TEL : +886-3-6583741
E-mail: alex.chen@jel-automation.com

Type of business : Manufacture and sales of electronic equipment
Major products : Wafer transfer robots and wafer handling systems for semiconductor equipment
FPD glass substrate transfer robots and FPD glass handling systems● Main banks: The Bank of MUFG Bank, Ltd.

●

●

●

●

■ Contact our sales representative for product request or questions.

https://www.jel-robot.com
jel

JEL Automation Co., Ltd.

Sear chhttps://hineautomation.com

TEL : +1-8137497519
E-mail: sales@hineautomation.com

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