Pressure Sensor
Rev.2

EK30

NEW

IO-Link compatible
Digital Differential Pressure Sensor•□30 mm compact / equipment built-in application•Supports ultra-fine differential pressure range 10 Pa to 20 kPa range andachieves high proof pressure of 50 kPa for all pressure ranges•Accuracy: ± 1.0 % F.S. (500 Pa or more), ± 1.5 % F.S. (200 Pa or less)

IO-Link with differential pressure measurement
expands possibilities of factory equipment!

EK30•Automated device management through mutual communication•Reduced time to restart - easy parameter setting
IODD file

System configuration example

Parameter
settings

Operation
diagnosis

IoT

Engineering tools

Measurement
dataContact
signalErrorsignalDeviceinformation

EK30
IO-Link master

Measurement

PLC

Management

Data utilization

Applications
Cylinder cabinets

Various semiconductor manufacturing equipment

EK30

Blower

EK30

ExhaustN2 gas supply

EK30
N2 gas, various process gases

Process chamberInternal pressure monitoring ofcylinder cabinets

N2 gas purge pressure
measurement

Process chamber

Exhaust condition
monitoring

Pressure range
Differential pressure range(digital output digits)

Max. allowablepressure

Accuracy

0 to 10 Pa (10.00)± 10 Pa (10.00)

0 to 25 Pa (25.00)± 25 Pa (25.00)

0 to 50 Pa (50.00)± 50 Pa (50.0)

0 to 100 Pa (100.0)± 100 Pa (100.0)

0 to 200 Pa (200.0)± 200 Pa (200.0)

0 to 500 Pa (500.0)± 500 Pa (500)

0 to 1 kPa (1.000)± 1 kPa (1.000)

0 to 2 kPa (2.000)± 2 kPa (2.000)± (1.0 % F.S.+1 digit)

0 to 5 kPa (5.000)± 5 kPa (5.00)

at 23 ºC ± 2 ºC

0 to 10 kPa (10.00)± 10 kPa (10.00)

0 to 20 kPa (20.00)-Temperaturecoefficient*1± (1.5 % F.S.+1 digit)
at 23 ºC ± 2 ºC

Analog output
accuracy

Square root operation
accuracy*2± 1.5 % F.S.
± 0.15 % F.S./ºC

at 23 ºC ± 2 ºC

± 0.5 % F.S.
(Applicable for digital
output value in the50 kPa

differential pressure
range of 5 to 100 % F.S.)*1 Both zero point and span *2 Not available for compound (±) range.

± 0.10 % F.S./ºC±1.0 % F.S.
at 23 ºC ± 2 ºC

IO-Link compatible Digital Differential Pressure Sensor
Manufacturing specifications
ItemsMediaGases (dry air and nitrogen gas )Specifications
No water or dusts should be containedIndication
LED for operation
Process connection

3 LEDs - OUT1: Red / IO-Link: Orange
M5 (female screw)

OUT2: RedPWR: Blue (NPN) / Green (PNP)

Material
Gas contact part
Case
Supply voltage

Silicon, glass, PBTPBT
24 V DC (10-35 V DC)
Current consumption: Approx. 40 mA (excluding output)
Use NEC (National Electrical Code) class 2 or LPS (Limited Power Source) for the power supply to be connectedto the EK30.

OutputCommunication output

IO-Link V1.1·COM2 (38.4 kbps)
Open collector
NPN (35 V DC, 180 mA or less), PNP (Supply voltage, 110 mA or less)
Response speed
50 ms or less
Operation mode
Hysteresis mode (Single, Two) Window comparator mode
Current output
4-20 mA DC (400 Ω or less)
Voltage output
1 to 5 V DC (10 kΩ or more)
Response speed
50 ms or lesse-CON (RITS connector 6-pin 1473562-6)
NPN, IO-Link: -10 to 60 °C, PNP: -10 to 55 °C (No condensation or freezing)
85 % RH or less (No condensation)-20 to 70 °C (No condensation or freezing)
IP40 (Indoor specification)
EMC Directive, RoHS Directive* Please use it to connect to the indoor power distribution network which is not affected by the lightning surge
voltage and power supply system switching transients.

Comparator output(2 outputs)
Analog output(Option)
Input/output connector
Operating temperature
Operating humidity
Storage temperature
Casing protection structure
CE marking

UL standard
Standard No.
File No.
Degree of contamination
Operating altitude
WeightUL61010-1
E475503
Standard IEC60664-1 Degree of contamination 2Altitude 2,000 m or lessApprox. 75 gDimensions

Unit: mm29□30

Input/output connector pin-out

11 :V+
2 :OUT2
3 :V4 :OUT1/IO-Link
5 :NC
6 :NC

WiringNo.

(9.8)

OUT2 PWR.

Process connection
for low pressure
M5 Depth 412345610

PRESSURE SENSOR
EK30-N01
S/N :21X00001R
RANGE :0〜50Pa
OUT1 :RD/IO-Link :OR
OUT2 :RD
PWR. :BL(NPN), GR(PNP)

23(8.8)

OUT1/IO-Link

When the connector
Back viewis attached
Input/output(1.9)
Process connection
connector
for high pressure
12M5 Depth 4

Mounting screw
2 x M3 Depth 4.5

20Power supply + (10-35 V DC)
OUT2Power supply OUT1/IO-Link
Not connected (Analog output: factory option)
Not connectedOption

Unit: mm•Attachment L type mounting clamp(46)
5.5(Hole)

22•M12 connector conversion cable (Male, PUR)

30
2014le)(Ho10

3.32×ø

.8

4φ1AMPx54321

1.617ø3.8)

17(39.5)(R)ole

4.55 (H•∅4 Barb 2 pcs. (EK30-N1□)
13ø4.

(48)

46.8
1500

Pin-out conforms tothe IO-Link standard.

Model number configuration

Please specify the model number and each specs. for ordering.

Model name

EK30

N

1IO-Link compatible Digital
Differential Pressure Sensor①②N

Nil 3 LEDs for operation③④

Model number⑤A⑥⑦

Selective spec.

①Indication②Process connection

M5 female screw (Standard)

1Barb for inner diameter ø4 tube (Set of 2)

1

Differential pressure

2

Square root operation function④Differential pressure
range⑤Accuracy

Please specify thedifferential pressure range
separately for ordering.

⑨⑩⑪⑫④⑤580 to 10 Pa④Differential pressure range

680 to 25 PaM

80 to 50 Pa

N

80 to 100 Pa

P

80 to 200 Pa

Q

70 to 500 Pa

R

70 to 1 kPa

S

70 to 2 PaT

70 to 5 kPaU

70 to 10 kPaV

70 to 20 kPa

88± 10 Pa

A

8± 25 PaB

8± 50 PaC

8± 100 Pa

D

8± 200 Pa

E

7± 500 Pa

F

7± 1 kPaG

7± 2 kPaH

7± 5 kPaJ

7± 10 kPa

⑥Power supply

1⑧Analog output⑤Accuracy± (1.0 % F.S.+1 digit)
at 23 ºC

± (1.5 % F.S.+1 digit)
at 23 ºC
EK30-□□2 is
not available.
± (1.0 % F.S.+1 digit)
at 23 ºCJNPN open collector (35 V DC, 180 mA max.)

KPNP open collector (Power supply voltage, 110 mA max.)

0Nil

14-20 mA DC

8

1 to 5 V DC

⑩Connector cable

Please do not use this product for measurement ofcorrosive gases and/or flammable gases and liquids.

⑮± (1.5 % F.S.+1 digit)
at 23 ºC

⑨Communication output[Caution of operation]⑭24 V DC (10-35 V DC)⑦Comparator output*1 Please contact us for communication output IO-Link V1.1 COM3.
*2 The M12 connector pin-out conforms to the IO-Link standard.
Please contact us for use with analog output.
• Specify by code "X" if there is no applicable specification.

⑬

Additional spec. (option)

0③Function⑧⑪Accessories⑮Document

A

IO-Link V1.1 COM2*10Nil

D

M12 connector conversion cable (1.5 m)*20

Nil

B

L type mounting clamp

0

Nil

1

Required(Please specify the desired documents
separately.)
Submission drawings, instruction manual,
inspection procedure,
test report (1 pc 1 copy),
inspection / traceability certificate,attended inspection

The contents of the catalog are subject to change without notice.

URL : https://www.naganokeiki.co.jp/
HEAD OFFICE & OVERSEAS SALES DEPT
1-30-4, HIGASHIMAGOME OHTA-KU, TOKYO, JAPAN.
PHONE : +81-3-3776-5328 FAX : +81-3-3776-5447
E-mail : overseas_sales_dept@naganokeiki.co.jp’22.9.B (SUN)