Seiko InstrumentsInc.
1. The Challenge of Micromachine Technology
With the rapid advance of information technology,
the network society has been growing as never before
in history, and nanotechnology has attracted worldwide
attention. Seiko Instruments Inc.developed their original watch manufacturing plant and the company’s precision machining technology has served as the company’sbasic technological power. In other words, Seiko Instruments has had a close association with micromachinetechnology from the beginning. In the new century, weconsider micro nanotechnology to be one of our mostimportant technological assets, and will continue ourR&D efforts along with ISTF project.
2. Development of Micromachine Technology
Seiko Instruments Inc. is now doing its best to act
as the organizer of prototype system development andalso to promote its own machining technology based on
the utilization of probe microscopes as manager for thedevelopment of micro-factory technology under the ISTF
project “Micromachine Technology.”“Micro-factory” is a new production system with thecatch phrase “Small products by small machines.” Conventional production systems have been developed tosatisfy high-volume and high-speed production, with theresult that they have become larger in size. Micro-factory technology proposes to meet the social demand of
the next generation which advocates production systems
be changed to low-volume and wide-variety production.
At the same time, production systems should be in conformance with such environment-friendly requirements
as energy saving, space saving, and resource conservation. At present we are working on the second-phase
prototype system (see Fig. 1) which suggests to us thehigh feasibility of micro-factory systems in the near future.

Toshihiko Sakuhara
General Manager,Corporate R&D Department

We have directed our R&D efforts related to machining technology as a part of micro-factory technology toward developing new machining methods instead of
merely targeting downsizing conventional machining
methods. For example, micro electrolytic machining andmicro optical machining, making use of Scanning probe
microscope (SPM) technology are being developed. SPM
technology is focused on as providing the means to examine objects at the atomic or molecular levels and also
as a type of nanotechnology tool. We are conducting R&D
activities involving this SPM technology as micro-factory machining technology. Fig. 2 shows an example ofmicro electrolytic machining, which has sub-micron resolution performance and allows both electroplating andelectrolytic etching (attaching and detaching) in a 1-mm2area.
The other machining method, micro optical machining, uses near visual field light to prove its performance
beyond light diffraction limits. The micro piezoelectricmotor developed in the first phase of the project is under further study for expected commercialization.

Fig. 2 A gear manufactured by micro electrolytic machining technology (Diameter: 600µm)
3. Future Stances
While working for on ISTF project, we have established our micromachine technology as the fundamental technology. From now on we will continue our efforts
for commercialization of the developed devices, utilization of the technology in other applications, and application of the technology for the creation of new production systems.
Fig. 1 Second-phase micro-factory prototype system

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TERUMOCORPORATION
1. The Challenge of Micromachine Technology
Medical care in the future will have to meet suchpatients’ needs as alleviation of physical burdens, support of human dignity, and reduction of medical expenses. Medical issues will have to be solved with thehighest priority given to patients. In this sense, minimally invasive treatment methods are highly required.
Micromachine technology is indispensable for realizing
minimally invasive treatment methods. We have conducted our R & D activities based on our belief thatmicromachine technology will be the basic technology
for medical care in the 21 century.
2. Development of Micromachine Technology
TERMO has participated in the ISTF project “Micromachine Technology” and developed “Optically driven
free joint devices” and “Micro laser catheters,” along withwhich Terumo has advanced its own micro catheter technology and micro laser technology. A single micro laser
catheter, which is used in a narrow lumen such as abrain blood vessel or the like, can serve both diagnosis
and treatment purposes.
In the first phase of the project, we examined techniques for laying electric wires over the external surface of a catheter tube for the purpose of mounting multiple sensors while securing the lumen for inserting atreatment device inside. As a result, we have successfully mounted a thermistor or ultrasonic vibrator in theform of a chip on the outer surface of a catheter tip. We
also conducted a basic study for the utilization of a 2.8µm laser, which allows excellent absorption in humantissues so that safe treatment would be available in bloodvessels.
In the second phase of the project, we further developed the basic achievements attained in the first term.
We optimized the micro catheter by making it flexible
for higher operability. As for the micro laser, we implemented a micro laser head by integrating it onto theend tip of an optical fiber with the capacity of solid laser
vibration having a wavelength of 2.8-µm developed in
the first phase. Furthermore, we examined measuresagainst the heat generated on the laser head and reduced the diameter of the laser head so that it can beused in combination with the micro catheter.
As for the final structure of the optically driven free18

Akira Takahashi, Ph. D.
Senior Managing Director,
R&D Center

Photo 1 Prototype of optically driven free joint device

Photo 2 Prototype of micro laser catheter
joint device, we integrated a photoelectric converter and
SMA actuator into a single body.
3. Future Stances
In order to realize minimally invasive surgery treatment devices, micromachine technology plays an important role in downsizing those devices. We will do ourbest to realize such medical treatment through developing micromachine technology-based devices on thebasis of our achievements accomplished in the past.