MMC Activities..............1
Column.......................6
Overseas Trends............7
Worldwide R&D ............8

MMC Activities

Overview of MMC's Activities in Fiscal 2004
I. Basic Objectives of Activities
The basic objectives of MMC activities are, firstly, to establish basic
micromachine technologies and increase utilization of micromachines
through promoting research and investigation of micromachines(MEMS and other minute machines and systems), collection andprovision of micromachine information, and exchange and cooperation
with worldwide organizations; and secondly, to contribute to the further
development of Japan's industrial economy and to international society.
MMC's basic objectives in FY 2004 are, as in the previous fiscal
year, The Center's fundamental policies are to promote theindustrialization of micromachines/MEMS, and to strive for theestablishment of next generation basic micromachine and NEMS
technologies in accordance with trends in cutting-edge
technological fields such as biotechnology, nanotechnology, and IT.

II. Description of Primary Activities
1. Research and Investigation of Micromachines
Planned activities are aimed towards gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research on
new technological issues regarding the fusion of micro- andnanotechnologies, as well as making adjustments appropriate
for the multidirectional expansion of micromachine technology.
(1) Microanalysis/Production System Project(recommissioned NEDO project and contract agreement)This project involves creation of a database of productinformation useful in the research and development of microchip
devices and systems, and activities aiding the creation of thisdatabase, such as information gathering and data provision.
(2) Studies on the future prospects of micromachine/
MEMS technology
High expectations are held for micromachine/MEMS technology as avital technology that will support the future expansion of our economy
and society. For this reason, survey research will be conducted
regarding the future prospects of micromachine/MEMS technology.
(3) Studies on R & D trends for micromachine technology
in Japan and abroad
These studies aim to identify and analyze the latest trends inthe rapidly expanding field of micromachine technology, andmicromachine R&D in Japan and abroad; and to develop basic
technological data to aid in developing micromachine technologies.
(4) Studies on MEMS reliability assessment technology(application submitted to the Japan Machinery Federation
as a commissioned project)This research project involves the investigation andconsideration of current status, issues, and policies relevant to
the improvement of MEMS reliability.
(5) Studies on the potential of nano-on-micro technology(application submitted to the Japan Industrial Policy
Research Institute as a commissioned project)Internet Home Page : http://www.mmc.or.jp/

This survey research will look into technological issues
pertaining to the development of nano-on-micro devices andstudy the directions of this R&D. Furthermore, these research
results will be used in the formulation of a technology
development roadmap and policy recommendations.
(6) Studies on micro/nanosystem-related processing andassembly/measurement and assessment/handlingtechnology (Application submitted to The MechanicalSocial Systems Foundation as a commissioned project)This research will involve fact-finding missions both inJapan and overseas to examine such areas as processing, fusion,assembly, measurement, and assessment necessary for
integrated nano/micro device R&D.
(7) Joint survey research activities concerning theindustrialization of MEMS
Opportunities for the industrial application of MEMS havebeen opening up rapidly in recent years; in order to further
accelerate the industrialization of MEMS, this research willcomprehensively tackle such challenges as advancing foundry
services and coordinating MEMS devices and materials fields.
Joint research with businesses that provide foundry services
will also be conducted, as in the previous fiscal year, on specificissues such as overseas foundry fact-finding missions, process
standardization, creation of a materials database, andcoordination between foundries.

2. Collection and provision of micromachine
information
Information and documents on micromachine use inuniversities, industries, and public organizations in Japan andoverseas will be collected, combined with survey results and MCCproduced documents, and made freely available in the MMC
library. At the same time, information will be disseminated widely,both domestically and internationally, through the MCC website.
(1) Improved dissemination and exchange of
information through the MCC website
Utilizing the MCC website, efforts to exchange anddisseminate information will be made proactively. Website
content aimed at supporting members will be enhanced.
(2) Publication of a micromachine periodical"Micromachine Index," containing abstracts of technicaldocuments and information on materials, is issued on a regularbasis and supplied to supporting members and organizations
concerned with micromachines.
(3) Publication of a newsletter
Information concerning the research and governmental trends
related to micromachines is distributed monthly to supporting
members and other interested individual and organizations.
(4) Maintaining and upgrading the MMC libraryTechnical documents and materials are collected and stored
in the MMC library and listed in a database together with otherrelevant information.

(1) Standardization of fatigue testing methods for micronano materials(application for sponsorship submitted
to the Ministry of Economy, Trade and Industry)
Continuing from last year, research on standard fatigue testing
methods that enable evaluation of the properties of various thinfilm materials measuring less than 10µm wide and 100µm long,with the aim of international standardization. Fatigue tests using
conventional 1/1000 sized specimens will be conducted in order toclarify the limits of application for fatigue testing methods that use
the current standard mm order specimens, and proposals forinternational standards will be considered.

3. Exchange and cooperation with micromachinerelated organizations worldwide
To promote affiliation, exchange and cooperation with relatedorganizations in and outside Japan, MMC will involve itself in suchactivities as participating in the micromachine summits, holding
international symposiums, inviting to Japan and sending overseas
researchers and experts in the field, and building foundry services.
(1) Participation in the 10th Micromachine Summit
MMC will participate in the 10th Micromachine Summit in
Grenoble, France, taking part in discussions of a wide range of
topics, including worldwide trends in micromachine technology
and its fields of application.

(2) Standardization of tensile testing methods for thinfilm materials
The results of MMC research conducted between Fiscal 1999 andFiscal 2001 as part of the NEDO project "standardization of evaluation
method of properties for micromachine material" have been included
in international standardization proposals submitted to IEC in Fiscal
2003, and are now at the CD(Committee Draft) stage. This year MMC
will continue its activities towards international standardization.

(2) Holding the 10 th International Micromachine/Nanotech
Symposium (partially subsidized by activities promoting
the machine industry)
This year MMC will hold the 10th International Micromachine/
Nanotech Symposium focusing on technological issues pertaining
to and the future prospects for the fusion of micromachine/MEMS
and nanotechnology.

(3) Standardization of micromachine terminology
The international specifications proposal "Technical Terms
in Micromachine Technology" submitted to IEC in fiscal 2002
has been approved at the NP (New Project) stage and is now at
the CDV (Committee Draft for Vote) stage. This year MMC willcontinue its activities towards international standardization.

(3) International Exchange and Dispatch of Researchers
A group will be dispatched overseas to promote theexchange of information and opinions with micromachine-related
research institutes in universities and similar institutions. This
group will also participate in international symposiums andacademic meetings held overseas. MMC will further promoteexchange by inviting experts in the field from America andEurope and by sending our experts and researchers overseas.

(4) Research and investigation of micromachine standardization
In addition to the above, the results of relevant survey
research will be transmitted worldwide to encourage international
standardization, while demonstrating initiative in establishinginternational standards. In response to demand, the on-line
International Standardization Forum will be held, and formulationof a roadmap for future international standardization will begin.

(4) Building a foundry network system
Foundries are vital to the industrialization of MEMS. In
order to improve these facilities, we will undertake theestablishment of a system to improve services through a
network comprising members of the Foundry Service Industry
Committee, who represent businesses either involved in or
related to the provision of foundry services.

5. Dissemination of information and education
about micromachines
By issuing and distributing quarterly magazines and by holding
exhibitions, we hope to disseminate information on micromachines
extensively in order to educate as many people as possible.

(5) Establishing a forum for the exchange of cuttingedge micro/nano technology
In order to accelerate the development of cutting-edge
micro/nano technology - a basic technology expected to have adiversity of applications in various fields - MMC will hold ameeting for the exchange of technologies as an excavating
opportunity of the exchange of information, and joint research
as in the previous fiscal year.

(1) The quarterly magazine "MICROMACHINE" will be publishedperiodically and distributed to those in or connected withthe field. The quarterly magazine will also be made available
on the Internet through the Center's home page.
(2) The 15th Micromachine Exhibition and other events will
be held to present the latest research achievements, aswell as the latest cutting-edge micromachine/MEMS
industry-related products and product materials.

4. Standardization of micromachines
In cutting-edge technological fields such as micromachine/
MEMS, standardization is being promoted as international
initiatives are being taken.

(3) We will serve as the Federation of MicromachineTechnology Secretariat to work with and strengthen
micromachine-related organizations.

Preliminary Announcement
The 10th International Micromachine /Nanotech Symposium
November 11, 2004
at Science Hall, Science Museum,Tokyo, JAPAN

Exhibition
MICROMACHINE 2004
November 10 - 12, 2004
at Science Museum, Tokyo, JAPAN2

The 9th International Micromachine / Nanotech Symposium

MEMS and Opportunities for University/Industry Technology Transfer
Nico. F. de Rooij, Professor, University of Neuchatel, Switzerland
The primarily role of the university is the education thatbringing up the students as scientists and researchers in future.
However the university has been implementing a collaboration basedon the contract with the company for their commercial products.
It is thought some type of contracts for the collaborationsuch as the company provides only fund to have developed acertain technology by the university or the researchers of acompany join to the collaboration at laboratory in theuniversity. In such cases, it is thought some difference in every
country regarding the ownership of patents and intellectual
properties of developed technology and commercialized
products based on the collaboration. However the fruits of thecollaboration have been realized as products in the market.
Today I will talk about MEMS and opportunities for technology
transfer from university to industry.

However the first results suggest that biological effects areindeed occurring in microgravity.
Since the flow sensor allowed measuring from micro to nanolittle, it was applied to microfluidic dispensing systems forpharmaceutical company. The system have advantages that areable to control the liquid quantity at the dispensing site, to readdirectly real time measurement of the aspirated or dispensed
volume and to indicate the status of diagnostic of the system
functionality (clogging etc). Nowadays a dispensing systemequipped with a nozzle arrays with sensor controlled liquidhandling, 5000nl to 25nl has been commercialized forpharmaceutical company.

Optical MEMS, Lab-on-Chip,
Tool for Nanoscience
In addition to above systems, Professor Nico. F. de Rooij
introduced us following MEMS products, as optical MEMS product: amplifiers, switches for optical communication, optical crossconnectors, variable optical attenuators, fourier transform
spectrometers, as lab-on-chip product : gas sensors, PH sensors,
glucose sensor and µTAS (Micro Total Analysis System) that
equipped small analyzing system and as nanotool : a cantileverwhich is required for study in the nanoscience and nanotechnology
and using for the probe of Scanning Tunneling Microscope (STM)
and Scanning Force Microscope (SFM). The cantilever is a probe of
new type that fabricated by MEMS technology.

Consumer products
Swiss is not thought without watch and is famous for thatindustry.
Recently the watch is incorporated a pressure sensor thatcan be measured the depth in the water and height on the land,
and a gyro that can be showed the direction of north on the earth
is also incorporated in a certain watch. In addition to thesesensors, mechanical gears that move the watch hands are now all
produced by MEMS technologies developed in later half of 1980s.
Nowadays these technologies are applying globally as if
shared ones.
By the way I would like to inform you that 30,000 people areworking in the watch industries in Swiss and the industry earns
2500 million U.S. Dollars annually.

Conclusion
I have been talked about MEMS technologies thattransferred to the companies and I would like to close thislecture after I introduce the name of the companies.
Swiss is a small country that has a population of only 7
million and not having big enterprises like Japan and U.S.A.
Now I would like to introduce the companies that transferred
MEMS technology from Neuchatel University.
Intersema is an existing company fabricating pressure
sensor, and MicroFlow Engineering is also an existing company
which is producing inhalers.
Regarding the recent start-up companies: Seyonic SA(founded in 1998) which is engineering and manufacturing
microfluidic systems for life science and space research, Sercalo
Microtechnology SA (1999) which is producing optical MEMS
switches and attenuators, and NanoWorld SA (2000) which isfabricating nonotools for scanning probe microscopy.

Microfluidic dispensing system
In the next speech, Professor Nico F. de Rooij introduced usa micro bioreactor that was developed for space application thatconsists of piezoelectric micro-pump, flow sensor, 3ml chamber,microfabricated PH sensor and electronics controller.
This miniature bioreactor has been developed for thecultivation of yeast cells aboard in a space laboratory (spacelab) and was used in three Space Shuttle missions.
The first experiment was conducted in "Spacelab 2nd
International Microgravity Laboratory on STS-65" in 1994,
secondly in "Spacelab in the Shuttle to Mir Mission SMM03" inMarch 1996, and the third mission in "Columbia STS-107" inFebruary 2003 that was totally lost due to the terrible accident.

3

The 9th International Micromachine / Nanotech Symposium

Turning MEMS ideas into MEMS products
Stephen D. Senturia, Professor Emeritus, Massachusetts Institute of Technology, U.S.A.
Today I would like to talk about MEMS, on how to think the MEMS.
In July 2003, I had a lecture on "Turning MEMS ideas into
MEMS products" at the conference of "Transducers 03'" which
held in Boston, U.S.A. and Professor Fujita, who is here today,
was participating in my lecture. After that I was asked byProfessor Fujita to have a lecture on the same theme in Tokyo.
This is why we are meet here today. And I feel happy to have alecture here for you. The contents have modified to make much
more interesting. The items in my talk are MEMS's viewpoint in
the future and review in the past and I would like to talk on"Turning MEMS ideas into MEMS products" in the last.

building objects from the bottom up, with molecular manipulation andself-assembly. Nanometer-sized objects are being built for research
uses. Such devices inherently must include quantum effects in theirdescription. Given this shift, the MEMS practitioner has a choice:either go into "nanotechnology" (and many are doing that), or get
into an area that does not depend on basic-research funding, namely,
products. The problem, of course, is that building products is difficult.

MEMS vs. MEMS-Enabled Products: An Example
It is useful to distinguish between two types of MEMS-based
product. In the first category, referred to as a "MEMS product",
the MEMS chip, with or without its primary package, is the
product. Electronics may be integrated into the chip, as in theMotorola pressure sensor and the Analog Devices accelerometer.
The second category, referred to as a "MEMS-enabled" productincludes not only the MEMS chip and its package but also
ancillary components, external electronics, possibly embedded
software or firmware, and an overall product package. Bothcategories of product require test, calibration, documentation,and some kind of quality-management system (ISO or
equivalent). The Polychromix Dynamic Channel Orchestrator
provides a good example of a MEMS-enabled product. The coretechnology is the polychromator, an electrically programmablediffraction grating with up to several thousand parallel mirror
elements suspended above a substrate, each one of which can be
actuated to change its height above the substrate. This creates
an aperiodic programmable diffraction engine capable of creating
synthetic spectra. While this technology was originally developed
for chemical sensing applications using optical spectroscopy, it is
now being applied to optical telecommunications by
Polychromix. The product operates over the telecommunications
C-band (wavelengths near 1.55 microns), controlling the power
in 100 channels spaced 50 GHz apart over a 40dB dynamic range
under program control.

Let's review the MEMS in the past
The conference of Transducers was initiated in 1981, thenthere was no name of the abbreviation "MEMS" and the field of
research and development initially called solid-state sensors andactuators, which over time, morphed into Micro Electro
Mechanical Systems MEMS or Microsystems. The state of the
MEMS field in the early 1980's, I can divide such three groups as
basic research, engineering science and product development.
There was much work in basic research on materials, sensing
methods, actuation methods and phenomena on a micron scale.
There was even more work on the engineering science of building
practical devices, with emphasis on materials and process
technology, integration methodologies, and system design. At
that time there were only a few microfabricated devices such aspressure sensor, gas sensor and ion sensor on the market.
However there were no journals devoted to MEMS, no regularconferences, and limited access to design and fabrication
infrastructure. The impact is sufficient that there are now
multiple journals devoted to MEMS and a variety of technicalmeetings. Individual disciplines that have a MEMS component are
now holding their own meetings, and it is now possible to go to ameeting involving MEMS or microsensors almost every week of
the year. There are newsletters and trade magazines devoted tothe microworld, and a growing infrastructure of fabrication
vendors and equipment suppliers. Whereas only a few of thesewere on the market in the early 1980's, sensors for acceleration,
flow, and angular rate as well as a variety of optical MEMS andmicrofluidic and bioMEMS devices are now commerciallyavailable. And there are products - many products.

Conclusion
I have explored some of the challenges facing real-world
MEMS products, with emphasis on the higher-value-added
MEMS-enabled products. Even with these many difficulties, there
is enormous vitality and creativity in the MEMS community, andwith appropriate attention to the many risks and challenges
ahead, it will be possible to build, and successfully sell, new
MEMS-based products to a welcoming world. As a conclusion,ideas for MEMS have been already fulfilled and the developmentof MEMS technology has been become ready in every relating
fields. Moreover infrastructures to fabricate commercial products
such as foundry services, and CAD tools have been completed.
What the next step for MEMS is only to make products.

Trends for the Future
Looking forward from today, several trends are clear. The first isthat both the emphasis and the funding for basic research are shifting
into "nanotechnology," whatever that means. To some, it means
simply making smaller versions of what is already familiar in the"micro" world. But to most, it is a completely different subject,

4

Olympus's MEMS Foundry Service
Ryo Ohta, MEMS Technology Division, Olympus Corporationcommercialization of our AFM cantilever made it
possible for us to develop a foundry for MEMS devices.
Through the micromachine project, we succeeded
in developing various sensors and a 3D packaging
technology integrating ICs with MEMS devices.
Participation in the micromachine project allowed us
to develop such advanced technologies as structureformation using polyimide and on-chip integration ofpiezoelectric materials, which have had a significant
effect on our MEMS development.
Subsequent MEMS activities included thedevelopment and commercialization of optical MEMS
used in optical instruments and research on Bio MEMS
for the human genome. Last year, Olympus was
accepted in the MEMS Project to develop a fabrication
technology for high-precision optical MEMS aimed at
the optical communications market. Accordingly, we
have been developing advanced fabrication
technologies and introducing state-of-the-art MEMS
fabrication facilities.

1. Outline of MEMS Activities at Olympus
Olympus Corporation is involved in the fields of
medicine, imaging, industry, and life sciences. Our
areas of business rely largely on basic optical andprecision technologies. Micro-electromechanicalsystems (MEMS) is a element technology that hasenabled us to further develop these basic technologies
in line with our goals. In April 2003, Olympus formed
the MEMS Technology Division in order to unify all
MEMS-related departments. Our division is committed
to developing the core competence of MEMS
technology, as well as new business enterprises. The
MEMS Foundry is directly linked to our efforts indeveloping the latter and is expected to yield many
developments.
2. History of Micromachine and MEMS Development
at Olympus
MEMS development at Olympus originated withresearch on semiconductor devices. Beginning around1980, we worked on developing general-purpose
semiconductor devices and imagers for use in theoffice. In the 1990s, our research and development of
MEMS was sparked through participation in the
micromachine project and development of probes for
an atomic force microscope called AFM cantilevers.
An AFM cantilever is a micro-device composed of Si
or Si nitride films formed in a semiconductor process.
The tip of the cantilever is formed of a probe having acurvature radius of 10 nm or less, the production ofwhich requires ultra low stress thin film technology.
This thin film technology differs from ordinary
fabrication technologies for IC devices. Successful

3. Features of Our MEMS Foundry Services
The Olympus foundry handles all phases ofdevelopment and production in accordance with thecustomer's needs, from consulting to device andprocess design and mass-production. We make themost of our accumulated MEMS-related technology
assets and advanced, flexible trial production line. Bymaking use of our accumulated knowledge forcustomer service, we will strive to achieve a highdegree of customer satisfaction.
Please contact us via e-mail at
MEMS_Lab@ot.olympus.co.jp.

AFM Cantilever
1991

Micromachine PJ

Interaction between customers and the MEMS Foundry

2000

Customers

Consultation
Request

4M CMD

Design, simulation

Bio MEMS

Proposal

Bi-CMOS
Began developing
semiconductor technology
1980
Optical MEMS

Analytical sample

Trial production(including process development)

SampleEvaluation, inspection

3D processing
sampleDevice sample

Mass-production
Shipping

Micro scanner
Micro factory5Column

Can MEMS become an Academic Discipline?
Osamu Tabata, Department of Mechanical Engineering,
Graduate School of Engineering, Kyoto University
One of the many questions that I have long been asking
myself is "Can MEMS become an academic discipline?" If it wereyou, how would you answer? Here I would like to present thebackground behind this question and my own tentative answer,
which has finally begun to take shape. I would appreciate any
comments you may have.

term. I regard an "academic discipline" as a research field inwhich the essence of various phenomena and questions
pertaining to a particular field are probed and theories
explaining the structures and phenomena therein andtechniques for resolving these questions are systemized. There
are sure to be some fields in which this cannot be achieved bysimply adapting theories and techniques developed in otherdisciplines. Taking mechanical engineering as an example, it
used to be that the so-called "3 dynamics" -hydrodynamics,
thermodynamics, and material mechanics - were the basic"academic disciplines." These "academic disciplines" centeredon analysis, and it was the vital mission of those in academia
involved with mechanical engineering to perpetuate and deepen
these "academic disciplines." However, when MEMS came on
the scene in the late 1980s, it took the opposite approach tothat of conventional "academic disciplines." MEMS is asystemized body of knowledge incorporating a broad range ofscience and technology that supports modern civilized society.
In other words, it is an unprecedented, sophisticated system
built from a base comprising various conventional "academic
disciplines": at its core is not analysis, but synthesis(generation/combination). This complex system involving
synthesis in areas measuring several tens of millimeters or less,as a result of complex interactions between physicochemical
phenomena, is gradually showing the way to an amazing rangeof new possibilities.

Before getting into the main topic, I would like to explain
briefly about how I become involved with MEMS. I first became
interested in the field commonly known as MEMS in 1979 when
I was a 1st year Master's student. I was part of Prof. Naito's
research laboratory in the Instrumentation Engineering
Department of the Nagoya Institute of Technology, but I also
researched information processing of electrocardiogram under
Prof. Yamada of the Division of Circulation, Research Instituteof Environmental Medicine, Nagoya University (RIEM), withwhich our department conducted joint research. My days weretaken up with conducting animal tests jointly with medical
doctors; devising an machine language for programming thejust-released microprocessor, 8080, jointly with engineers
working for medical instrument manufacturers; and going backand forth to the computing center, my arms heavy with bundlesof punch cards. One day, when I was in the RIEM libraryreading the Journal of Bio Medical Engineering, my eyes werearrested by an article on silicon chip with multi hole active
electrodes that could be used to measure the action potential of
nerve fiber bundles.(1) This was my first encounter with silicon
microfabrication technology, and I was fascinated. This led to
my meeting with the late Dr. Igarashi, who was conducting
research on silicon piezo-resistive semiconductor pressure
sensors, and to my joining in 1981 Toyota Central R&D Labs.,
Inc., where I was involved in research on silicon micro-flow
sensors. At that time, the terms "Micro Electro Mechanical
Systems (MEMS)" and "micromachines" did not exist. K.
Petersen's historic review(2) was published the following year,
and I remember my excitement as I collected and read throughall the reference materials listed. After that, the micromachineboom began in earnest with the release of the microgear(3), andas many of you will know, the Micromachine Project was begun
in 1991 under the direction of the former Ministry ofInternational Trade and Industry (now the Ministry of
Economy, Trade and Industry). In 1996, I moved to
Ritsumeikan University and poured my energies into
establishing a MEMS research laboratory even as I pondered
how MEMS research could be integrated into academia. In
September 2003 I moved to Kyoto University, where I am incharge of micromachine engineering.

After much thought, I decided to clearly acknowledge thatsynthesis, which had not conventionally been regarded as an"academic discipline," was in fact an academic discipline. By
doing this, I am able to answer the question I posed initially,"Can MEMS become an academic discipline?" with a "Yes."
However, at the present time MEMS is still far from being an"academic discipline." The insight and efforts of many people isstill very much needed if MEMS is to not simply adopt theories
and techniques from other fields, but to systemize knowledge
and theories as to how best to create a system that mosteffectively synthesizes multidisciplinary phenomena in minuteareas. In MEMS, which has shifted focus from analysis tosynthesis, there are many opportunities for young researchers
who can perform synthesis without being influenced by theconventional "academic discipline" framework. One of mycolleagues, who specializes in heat transfer engineering, told methat when he recently reviewed the latest heat transfer
developments in the MEMS field, he had been impressed by theremarkable contributions of young researchers. At the first
faculty meeting I attended after arriving at Kyoto University, all
the newly appointed Professors and their areas of specialization
were introduced by the director of graduate school ofengieering. In the introduction I wrote for myself, I listed myareas of specialization as "cutting-edge processing," "nanosystem integration engineering," "micromachines/micro-electro
mechanical systems."

To think, it's been 25 years since my introduction to MEMS
in 1979. During this time, I have been frequently asked, "What's
your background?" My reply is always, "I began in
instrumentation engineering, which is a jack-of-all-trades field
including electricity/electronics, machinery, physics, control,and mathematics, so it was excellent preparation for MEMS
research." Certainly, on the one hand, the field of MEMS
research has thus far more than satisfied my intellectualinterest and curiosity. However, on the other hand, I am always
asking myself, "What is my field of specialization?" and I foundthat there was a part of me that was not satisfied by the answer"MEMS." This was because I felt uncomfortable claiming as myspecialization a field that was not recognized as an academic
discipline.

References(1) Jun Yamaguchi. Trial Production of multi hole active
electrodes for Use with Nerve Fiber Bundles. 17 th ME
Society Meeting 1978; awarded the Science News Research
Advances Prize, April 28, 1979
(2) K. Petersen. 1982. Silicon as a Mechanical Material. Proc.
IEEE, Vol.70, No.5: 420-457.
(3) Fan L.S., Tai Y.C., Muller R.S. Pin joints, gears, springs,
cranks and other novel microstructures. Tech. Dig., 4th Int.
Conf. on Solid-state Actuators and Sensors: 849-852.

Here I will use my own definition of "academic discipline"
without delving into a deep discussion of how to define the6Overseas Trends

MEMS 2004
giving the examples of Si gears and position sensors, andarousing great interest in the potential to create new value
through the integration of conventional and MEMS
technology. In the invited lecture held on January 27, Prof.
Toko of Kyushu University spoke on the topic "Measurementof Taste and Smell using Biomimetic Sensors." The highexpectations held for future results of this research werereflected in the eager applause that this presentation
received.
Session 1, chaired by Prof. Tabata of Kyoto University,
focused on self-organization, which has recently been
attracting growing interest, and Session 2 focused on celland particle handling. Together these two sessions provided
a taste of the future directions of this research field. In
Session 4, "Bio Medical Devices," presentations such as"Parylene Flexible Neural Probe with Micro Fluidic Channel"
by the first speaker, Prof. Takeuchi of The University ofTokyo, provided a sense of overall future trends in the
MEMS field, with high expectations held for NEMS (NanoElectro Mechanical Systems) and broad expansion of MEMS
applications. Session 6, "Nano Electro Mechanical Systems,"
introduced the 3D nanofabrication technology using electron
beam lithography that has been developed by NTT Basic
Research Laboratories. The seconds-long around-the-world
demonstration performed using the world's smallest globe - a
60µm diameter globe created using the NTT technology met with enthusiasticapplause.
With respect to RF technology applications, oscillatorsand switches developed with MEMS have performed amply
at the R&D level, indicating that we are moving even further
towards full-fledged practical application.
This year's presentation themes cut a particularly goodbalance, highlighting both practical applications of MEMS
technology and possibilities for the future.

MEMS 2004 (IEEE The 17th International Conference on
Micro Electro Mechanical Systems) was held from January
25 (Sun.) to 29 (Thurs.), 2004, at the Maastricht Exhibition
and Convention Center (MECC) in Maastricht, The
Netherlands. The conference welcomed over 600
participants in total; furthermore, the number of preregistered participants (546) was a significant increase overlast year's pre-registered attendance of 513, continuing the
growth trend of recent years. Aided by the European venue,
the conference enjoyed a good balance of participation for
an international academic conference with 247 attendees
from Europe, 118 from North America, and 178 from the
Pacific Rim.
A total of 217 papers were presented (compared to 176
last year): 3 invited lectures (same as last year); 41 oralpresentations (22 last year); and 173 poster presentations(151 last year). Due to the increase in MEMS R&D, thenumber of papers submitted for this conference hasballooned year on year (629 submissions this year as
opposed to 500 last year: a 20% increase). Consequently,
with the single session format for oral presentations
employed again this year, presentations could not be
contained in morning sessions as it was last year, and so afull-day program was implemented. By nationality, the mostpresentations were made by North Americans (80), followed
by Japanese (48), Swiss (14), South Koreans (13), Germans,
and Taiwanese (11). The European venue played some rolein the high number of Swiss presentations. By field, a large
proportion of presentations focused on bio & chemical
microsystems; presentations on production, packaging, andmechanical-physical issues were also prominent.
In the first of the invited lectures, Prof. Nico de Rooij of
the University of Neuchatel, who has also addressed an
MMC-sponsored symposium, spoke on the topic "MEMS for
Watches," introducing the value MEMS can add to watches7Worldwide R&D

Laboratory Profile: Development of a Photoinduced Molecule System
Seki Laboratory, Graduate School of Engineering, Nagoya University
Seki Laboratory was established in July 2002 by
Professor Takahiro Seki, formerly of the Chemical
Resources Laboratory at the Tokyo Institute ofTechnology. Assistant Professor Shusaku Nagano joined
our laboratory in November 2002. Our laboratory has
now been conducting research for a year after theenrollment of students in April 2003. Associate Professor
Yukikazu Takeoka joined us in April 2004, and we are now
pursuing our research interests with a total of 25
members: three supervisors, a secretary, a JSPS
Postdoctoral Fellow, five PhD students, ten masters
course students and five undergraduate students.
Our principal topic of research involves developing
assembly methods for new soft materials having
photoresponsive functions, such as organic polymer films,
liquid crystals, colloidal materials, and compounds thereof,and controlling dynamic functions of these materials.
Professor Seki has been particularly interested in
conducting research on monomolecular film withnanometer thickness in order to verify that the film
provides useful photoresponsive properties. Azobenzene
molecules reversibly change molecular shape and otherproperties in response to light. Professor Seki has
incorporated these molecules in high polymers toconstruct molecular systems in which photoresponsive
information at the molecular-level can be effectively
conveyed to and amplified at the material level. While
much research has been conducted on the manipulation ofelectrons, holes and optical information using light, ourresearch is distinguished by our efforts to realize dynamic
functions in molecules or the material itself that exhibit
photoinduced motion, such as expansion and contraction ,migration, or molecular alignment. We discovered aphotoresponsive monomolecular film that exhibits theworld's largest level of expansion and contraction, as wellas the most sensitive photoinduced mass transfer. In
addition, we succeeded in developing a new techniqueusing light to align polymer films and mesoporous
inorganic material. The diagram shows the concept of ourresearch. Our focus is not on the behavior of a single
molecule, but on the strong molecular cooperativity(interaction) exhibited when an aggregation of molecules
and high polymers behave as a group. The concept ofdriving molecular systems with light can easily be applied
to micromachine technology.
Assistant Professor Nagano has been studying a new
approach using the Langmuir-Blodgett (LB) method toform a nanofilm on the surface of water. He developed atechnique to create a monomolecular film on the water
surface with completely hydrophobic polymers byhybridizing polar liquid crystal molecules. Since LB thinfilms normally require a polar group in the polymer for
fabrication, usable materials are limited. With thetechnique developed by Nagano, however, LB thin films
can be fabricated from many hydrophobic (non-polar)
polymers. Accordingly, his technique has attracted a lotof attention as a potential new method for fabricating
nano-materials. Nagano has also focused on block
copolymers and using light to control their twodimensional nano-scale phase separation.
Associate Professor Takeoka, who transferred fromthe School of Engineering at Yokohama National
University in April, specialized in providing functions topolymer gels. He prepares a hydrogel material using
crystals composed of molecules having uniform particle
size as a genetic template. The hydrogel selectively
reflects incident rays to emit various colors based on its
periodic structure. The wavelength of reflected lightvaries because the hydrogel expands and shrinks inresponse to such stimuli as temperature, pH, light, andenzyme activity , causing changes to the periodic
structure distance. Accordingly, the hydrogel can be used
as a sensor for reflecting various responses to theenvironment. There is also much interest in employing
this gel for directly observing cooperative movement ofpolymer chains.
Our laboratory has been actively working with otherresearch groups in the field of soft materials, focusing on
liquid crystals, gels, and nanofilms. We are committed tocontinuing studies aimed at developing a system to drive
photoresponsive molecules that will be directly useful inpractical applications.

Seki Laboratory Website:
http://www.apchem.nagoyau.ac.jp/butsu3/sekilabo/index.html
MICROMACHINE No. 47
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
your comments about MICROMACHINE to the publisher :Keiichi Aoyagi, Executive Director, Micromachine Center (MMC)
MBR99 Bldg., 6F., 67 Kanda Sakumagashi, Chiyoda-ku, Tokyo 101-0026, Japan
Tel : +81-3-5835-1870, Fax : +81-3-5835-1873
Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : May 17, 2004

© All Copyrights Reserved by MMC