SMEMS Forum
Host organization: MEMS Industry Forum / Micromachine Center(1) Purpose
The purpose of the MEMS Forum is to serve as a forum for the exchange of views and to provide information about the activities ofthe MEMS Industry Forum. The MEMS Forum will present the status of activities conducted by the MEMS Industry Forum and affiliatemembers (local clusters, public experimental laboratories and academia) and will endeavor to achieve a heightened common awarenessof issues relating to the expansion and development of MEMS industries, with the aim of building an industrial infrastructure for thedevelopment of MEMS manufacturing and the construction and development of a technical infrastructure for MEMS through cooperation
between industry and academia.
(2) Program

Micro/Nano 2007 MEMS Forum--- Toward the Development of MEMS Industries --Date & time: Wednesday, July 25, 2007 10:00 a.m. - 5:00 p.m.
(International standardization session: Friday, July 27, 2007 10:00 a.m. - noon)
Venue: Tokyo Big Sight (special venue set up within West No. 3 Hall)
Sponsor: Micromachine Center / MEMS Industry Forum
Admission fee: FreeOpening
10 : 00 --- 10 : 05

Greeting

Session 1

Strengthening the MEMS Industrial Base

10 : 05 --- 10 : 20

Overview of MEMS Industry Forum Activities

10 : 20 --- 10 : 50

The Opening of the MEMS Industry

Keiichi Aoyagi, Executive Director, Micromachine Center
MC: Shunichi Adegawa, Micromachine Center

Keiichi Aoyagi, Secretary-general, Secretariat,
MEMS Industry Forum

Tsuneyuki Miyake, Associate editor for Microdevices,
Nikkei Business Publications Inc.

10 : 50 --- 11 : 15Case Study: Training of Personnel to Promote
Applied MEMS in the MOT Project Research

Kiyoshi Itao, Director, The Advanced Institute of Wearable Environmental

11 : 15 --- 11 : 40

MEMS Personnel Training and Technologies
for Commercial Application of MEMS

Ryutaro Maeda, Senior Researcher, Advanced Manufacturing

11 : 40 --- 12 : 10Features of MemsONE(MEMS Design / Analysis Support System)
and Case Studies

12 : 10 --- 13 : 10

Information Network (Nonprofit Organization)
Tokyo University of Science / The University of Tokyo
Process Department, National Instituteof Advanced Industrial Science and Technology (AIST)

Hidetoshi Kotera, Professor, Engineering Research,
Kyoto University School of Graduate Studies

Lunch
Kazushi Tomii, Chair, Foundry Service Industry Committee, MEMS Industry Forum(Supervisor, EMIT Device Development Department, New Product Creation TechnologyDevelopment Division, Matsushita Electric Works Ltd.)13 : 10 --- 13 : 40

Overview of Activities
to Create a MEMS Foundry NetworkSession 2

Industry-Academic Cooperation

13 : 40 --- 13 : 45

On the Holding of an Industry-AcademicCooperation Session

Kazuo Sato, Professor, Nagoya University

13 : 45 --- 14 : 05

Use of MEMS and Biochips Produced
through Micro/Nano Stereolighography

Shoji Maruo, Associate Professor, Maruo Lab,Graduate School of Engineering, Yokohama National University

14 : 05 --- 14 : 25

Workshop on 3D Integration
Using Hetero Wafer Bonding

14 : 25 --- 14 : 45

Organizations for Interdisciplinary /New Domain Research Activities: Inaugurationof Dedicated Micro/Nano Engineering Conference

Session 3
14 : 45 --- 15 : 45

Organizer: Kazuo Sato, Professor, Nagoya University

Tadatomo Suga, EEE-CPMT Society, Japan Chapter(Professor, Engineering Research, The University of Tokyo)
Hidetoshi Kotera, Japan Society of Mechanical Engineers(Professor, Kyoto University)

Asia MEMS Forum

MC: Junji Adachi, Micromachine Center

Trends in MEMS Industry / Technology in Asia
(1) Zhao-Ying Zhou (Prof., Tsinghua Univ., China)(2) Shiban K. Koul (Prof., Indian Institute of Technology, India)(3) Young-Ho cho ( Prof., KAIST, Korea)(4) Representative of Singapore (TBO)(5) M. S. Lin (Senior Consultant, ITRI, Taiwan)
Mechanical Systems Technology Development Department,Session 4

Research Results

MC: Kazushi Asami, New Energy and Industrial Technology Development Organization (NEDO)

15 : 45 --- 16 : 00

MEMS Market Research Report(NEDO-commissioned survey project)

Shunichi Adegawa, General Manager, Industry Department,

16 : 00 --- 16 : 15

Report of Outcome Survey,
Micromachine Project(NEDO-commissioned survey project)

16 : 15 --- 16 : 35

BEANS
(Toward the Achievement of 3rd Generation MEMS)

Micromachine Center

Shinichi Tamura, Manager,Survey Research No. 2 Section, Research Department,
Japan Technical Information Services Corporation

Junji Adachi, General Manager, Research Department,
Micromachine Center

Closing
16 : 35 --- 16 : 40

Closing Address

Koichi Karaki, Vice-Chair, MEMS Industry Forum5