Members' Profiles

Yamatake Corporation
1. Microfabrication technology activities
With our measurement and control technology
fostered over many years, Yamatake Corporation iscontributing to society in the fields of building
automation, advanced automation (manufacturingindustry automation), and the life automation thatsurrounds us (automation that supports ourenvironment and amenities). The company became
involved in microfabrication technology in the early
1980s. Measurement of temperatures, humidity,
pressure, and flow rates is extremely important toYamatake, and we have given it a high priority in
our research. Technologies that we developed forcommercial applications from among the research
themes at that time are currently the subject offurther research at the Microdevice Center withthe goal of expanding the application within ourbusiness. Leading edge technology domains thatcannot be managed by the Microdevice Center are
handled by the Research and Development
Division Microsystems Group.
2. Micronano technology activities(1) Nanocrystal silicon ultrasonic elements
ULSI technology using silicon substrates is crucial
to the development of today’s industry. At quantum
size, the silicon expresses new optical, electronic,
thermal, and chemical properties that do not appear
in larger sizes. Together with the Koshida Laboratoryof the Tokyo University of Agriculture andTechnology, Yamatake developed a nanocrystal
silicon ultrasonic element using these thermal
properties. This new ultrasound source achieves flat
frequency characteristics that are difficult to obtainwith existing technology, and we are pursuingdevelopment to apply this characteristic to new
ultrasonic speakers, high-precision range sensors,and compact actuators. Nanosilicon technology holds
wide potential, and we plan to deploy this basic
technology in many products.

Microsystems Group Leader, Research and Development Division

Shuichi Tanaka(2) Spherical SAW gas sensor
The spherical SAW gas sensor uses thephenomenon in which surface acoustic waves(SAW) go around a sphere a number of times(discovered in 1999 by Professor Yamanaka ofTohoku University). This is a sensor for measuringchanges in the concentration of gas on the surfaceof the sphere using the characteristic whereby acrystal sphere with as small as 1 mm diameter
exhibits longer propagation lengths (1 m or more).
This phenomenon is not seen in flat SAW devices.
Since it provides high sensitivity, the sensitive
membrane can be thinner allowing a high speed
response. The hydrogen sensor that we arecurrently developing has succeeded in detecting ina wide range from extremely low concentrations(10 ppm) to high concentrations (100%). We areaiming to create a product that will offer safety andpeace of mind in the coming hydrogen society. The
sensor can also be made to detect other gases bychanging the sensitive membrane.

Fig. 2 Spherical SAW gas sensor

Fig. 1 A nanocrystal silicon ultrasonic element

3. Future activities
Nanotechnology products are the focus ofattention as sensing materials. We plan to probe
deeper in this area. We expect to find businesspossibilities in the life automation field at the end ofour research. Although life automation has adifferent flavor from our existing business domain,
we aim to expand our business in the life automation
field, and make bold new advances in that area.
MICRONANO No. 56

MICRONANO is published quarterly by Micromachine Center (MMC) to promote the international exchange ofinformation related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
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Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : August 28, 2006

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