Members' Profiles

Mathematical Systems Inc.
Company Overview
Since its foundation more than twenty years ago,
Mathematical Systems Inc. (MSI) has consistently worked
to develop technological software, and in particular design
tools for semiconductor-related simulations, such as
development of a device/process simulator and a circuit
simulator and parameter optimization design andtolerance design using these simulators. We currently
have a strong interest in the potential of the MEMS field
and are working on developing new tools by making use ofand expanding on our knowledge and techniquesdeveloped through the years. To address circuit integrated
MEMS formed on the same substrate as an LSI, we are
currently nearing completion of a 3D process simulator forsimultaneously generating computer-aided MEMS designand LSI design and a circuit integrated MEMS simulator
capable of simultaneously performing structural analysis
and electronic circuit analysis. We also develop MEMSrelated tools on commission and offer consulting services.
With our own optimization software, data mining software,and statistical analysis tools, we offer a wide range ofsolutions to meet the customers’ needs.

Related ProductsParadiseWorld-2
ParadiseWorld-2 is an all-in-one simulator for
MEMS/LSI 3D processes (structures) with an optional
capacitance/resistance simulator. Through continuoussimulation, this software can produce smooth 2D and 3D
structures from masks (GDS-II) and process recipes withhigh accuracy and unprecedented speed.

Managing Director

Chieki Mizuta

Process for generating a mirror device

Circuit Integrated MEMS Simulator
This simulator simultaneously performs coherent
operations of MEMS mechanical elements and theoperations of the electronic circuits that drive or control
these elements. The user-friendly GUI makes evencomplex comb-drive actuators simple to produce (anachievement of the MemsONE project).

Creating a comb-drive actuator with the GUI (in reality,
this is analyzed together with an electronic drive circuit)

Other Products
A micro-mirror structure produced with ParadiseWorld-2

Inverse Problem Solving Tool for MEMS Processes
When a desired MEMS structure is inputted, this tool
will produce a process and mask of inverted orientation
for generating the structure (an achievement of theMemsONE project).

LiCRSIM: an ultrafast, large-scale linear simulator
Thyme: SPICE Netlist Reduction Tool
NUOPT: optimization software
Visual Mining Studio: data mining software
Text Mining Studio: text mining software
S-PLUS: statistical analysis software
To learn more, please refer to our Website at
http://www.msi.co.jp.

MICRONANO No. 59
MICRONANO is published quarterly by Micromachine Center (MMC) to promote the international exchange ofinformation related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
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Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : May 25, 2007

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