Overseas Trends

Survey of Trends in the Industrialization of MEMS in Europe
From November 21 to 25 a study tour of foundries,
research institutions, and companies which havesuccessfully set up MEMS businesses in Europe – aleading region in the promotion of MEMS industrialization– was conducted with the aim of contributing to thepromotion of MEMS industries and the development of afoundry service network in Japan.
The tour visited companies and research institutions;at each location, after explaining the situation regarding
the promotion of MEMS industrialization in Japan andreceiving explanations of the activities of the<Locations Visited>

company/institution, problems involved in promoting
MEMS industrialization and methods for their resolution
were discussed. Consequently, we were able to gather
practical, up-to-the-minute information from the frontline
in this field.
The following locations were chosen to ensure that thetour broadly covered the spectrum of MEMS
industrialization and include MEMS foundries, MEMS
device manufacturers, MEMS/nanotechnology research
institutions, and organizations supporting MEMS
industrialization.

VTT Technical Research Centre of Finland• Finland’s national research institution; conducts
contracted research• R&D of MEMS/nanoelectronics

MST factory Dortmund• Incubator for microsystem technology• Supports raising the success probability of setting up
MEMS businesses through reduction of costs andproduct development timeIVAM• Microtechnology association comprising 165 member
businesses and research organizations based mainly inEurope• Supports MEMS industrialization that builds bridges
between businesses and users

X-FAB Semiconductor Foundries• Representative United States/European semiconductor
company• Also promotes MEMS foundry activities

Robert Bosch, Automotive Electronics Division• Largest manufacturer of in-car MEMS sensors• MEMS process development

ST Microelectronics
Locations visited
The study tour enabled the exchange of opinion on thesituation in Europe regarding the promotion of MEMSrelated projects, trends in foundry activities and MEMS
device development, and industrialization support andprovided valuable information with regard to the future
course of this field. In particular, interest in Japan as a• Major semiconductor manufacturer; also manufactures
MEMS sensors for consumer appliancesmarket for consumer-use MEMS was high, withdiscussions at each location focusing on the possibility ofmarket participation and/or business collaboration.
In addition to interaction between businesses,interaction between Japan and Europe in the area ofindustrialization support is sure to flourish in the future.

MICROMACHINE No. 54
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
your comments about MICROMACHINE to the publisher :Keiichi Aoyagi, Executive Director, Micromachine Center (MMC)
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Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : February 14, 2006

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