Activities of the MEMS Industry Forum
1. The 15th International Micromachine/Nanotech
Symposium – MEMS World

concept of centers for the integration of MEMS knowledge andexperience to serve as arenas for developing nanotechnology,
an introduction to the foundry network, MemsONE, andMEMSPedia designed to improve the infrastructure for MEMS
development, and a description of efforts to implement
micro/nano personnel training in order to promote expansion ofthe MEMS industry. In Session 3 subtitled “Anticipation toward
the formation of MEMS industries and R&D centers,” speakers
described the state of activities being conducted in the Tohoku,Kansai, and Kyushu regions for strengthening the foundation ofthe MEMS industry.
The fact that every seat in the Forum’s conference hall wasfilled indicates a strong interest in the MEMS industry.

The 15th International Micromachine/Nanotech Symposium
was held at MicroNano
2009 on July 29, 2009
(Wednesday) in a special
conference area preparedat the event as one of theconcurrent events withthe20 t hExhibition
Micromachine/MEMS.
This year’s Symposium was held on such topics as theconcentration of MEMS R&D centers and MEMS applications
and featured keynote speeches from LETI/MINATEC,
Fraunhofer ENAS, and the MEMS Industry Group on trends
toward concentrating MEMS R&D into major centers. The
lecturers in Session 1 introduced some of the latest trends in
MEMS applications, including sensor networks, optical MEMS,
and energy-related MEMS, while the lectures in Session 2
focused on fabrication processes as emerging technologies fromthe perspectives of wafer vendors, fabrication equipment(bonding equipment) vendors, and material vendors.
Unlike in previous years, there was no charge for attending
lectures, and the Symposium was held during the exhibition inthe exhibition hall, rather than at a separate location. TheSymposium filled all 230 seats in the conference area andstimulated a lively question and answer session. Looking toward
next year, we would like to clarify the positioning of thissymposium within the overall MicroNano 2010 event and thetarget audience (management or on-site technicians, forexample) and to prepare a program of even greater quality thatmeets the needs of this audience.

3. The 18th MEMS Advanced Technology ForumThe 18th MEMS Advanced Technology Forum was held onJune 24 (Wednesday) at the MMC Techno Salon, where the MIF
had the privilege of hearing lectures by Dr. Minoru Kurosawa,
associate professor at the Tokyo Institute of Technology in theInterdisciplinary Graduate School of Science and Engineering,and Dr. Tadatomo Suga, professor at the University of Tokyo in
the Graduate School of Engineering.
In his lecture entitled “Surface acoustic wave linearmotors,” Dr. Kurosawa talked about linear motors using SAW
elements, long-established MEMS devices, and introduced his
research spanning from ultrasonic motors to the present. Dr.
Kurosawa also discussed potential future development of highspeed, high-precision micro-linear motors.
In his presentation entitled “Low-temperature waferbonding,” Dr. Suga discussed potential applications for the lowtemperature bonding of wafers using plasma and ion irradiationfor 3D mounting and MEMS packages. He also describedvarious types of bonding and bonding techniques, particularly
chip bonding in ambient air and in a vacuum and bonding using
nano-adhesion layers, as well as the mechanisms of bonding.

2. The MEMS ForumThe MEMS Forum was heldon July 31 (Friday) in a special
conference area at the 20 t hExhibition Micromachine/MEMS
for the purpose of distributing
information on the activities ofthe MEMS Industry Forum(MIF), a special project committee of the Micromachine Center,and encouraging the exchange of ideas.
In Session 1 of this year’s Forum, which was held under theoverall theme “Toward development and expansion of theMEMS Industry: an update from the MEMS Industry Forum,”the MIF reported on technology trends in MEMS seen atinternational conferences, trends in the MEMS industry,including trends in MEMS applications and company’s breaking
into MEMS fields, and the MIF’s international standardization
activities in MEMS fields.
Session 2 had the sub-theme of “Enhancing theinfrastructure for MEMS R&D and production to prevail inglobal competition.” Presentations included the proposed

Dr. Kurosawa, TokyoInstitute of Technology

Dr. Suga, the Universityof Tokyo

The Advanced Technology Forum attracted 19 participants
composed of MIF members, personnel involved in the BEANS
Project, and general visitors. Following the lectures on thesecutting edge technologies and a round of lively Q&A, some ofthe participants adjourned to the Micromachine Center’s
conference room to further discuss these technologies andexchange opinions with Drs. Suga and Kurosawa, bringing themeeting to a harmonious close.

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