MMC Activities..............1Column.......................6
Overseas Trends............7Worldwide R&D ............8

MMC Activities

Overview of MMC's Activities in Fiscal 2004
I. Basic Objectives of Activities
The basic objectives of MMC activities are, firstly, to establish basic
micromachine technologies and increase utilization of micromachines
through promoting research and investigation of micromachines(MEMS and other minute machines and systems), collection andprovision of micromachine information, and exchange and cooperation
with worldwide organizations; and secondly, to contribute to the furtherdevelopment of Japan's industrial economy and to international society.
MMC's basic objectives in FY 2004 are, as in the previous fiscal
year, The Center's fundamental policies are to promote theindustrialization of micromachines/MEMS, and to strive for theestablishment of next generation basic micromachine and NEMS
technologies in accordance with trends in cutting-edge
technological fields such as biotechnology, nanotechnology, and IT.

II. Description of Primary Activities
1. Research and Investigation of Micromachines
Planned activities are aimed towards gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research on
new technological issues regarding the fusion of micro- andnanotechnologies, as well as making adjustments appropriate
for the multidirectional expansion of micromachine technology.
(1) Microanalysis/Production System Project(recommissioned NEDO project and contract agreement)This project involves creation of a database of productinformation useful in the research and development of microchip
devices and systems, and activities aiding the creation of thisdatabase, such as information gathering and data provision.
(2) Studies on the future prospects of micromachine/MEMS technology
High expectations are held for micromachine/MEMS technology as avital technology that will support the future expansion of our economy
and society. For this reason, survey research will be conducted
regarding the future prospects of micromachine/MEMS technology.
(3) Studies on R & D trends for micromachine technology
in Japan and abroad
These studies aim to identify and analyze the latest trends inthe rapidly expanding field of micromachine technology, andmicromachine R&D in Japan and abroad; and to develop basic
technological data to aid in developing micromachine technologies.
(4) Studies on MEMS reliability assessment technology(application submitted to the Japan Machinery Federation
as a commissioned project)This research project involves the investigation andconsideration of current status, issues, and policies relevant tothe improvement of MEMS reliability.
(5) Studies on the potential of nano-on-micro technology(application submitted to the Japan Industrial Policy
Research Institute as a commissioned project)Internet Home Page : http://www.mmc.or.jp/

This survey research will look into technological issues
pertaining to the development of nano-on-micro devices andstudy the directions of this R&D. Furthermore, these research
results will be used in the formulation of a technology
development roadmap and policy recommendations.
(6) Studies on micro/nanosystem-related processing andassembly/measurement and assessment/handlingtechnology (Application submitted to The MechanicalSocial Systems Foundation as a commissioned project)This research will involve fact-finding missions both inJapan and overseas to examine such areas as processing, fusion,assembly, measurement, and assessment necessary for
integrated nano/micro device R&D.
(7) Joint survey research activities concerning theindustrialization of MEMS
Opportunities for the industrial application of MEMS havebeen opening up rapidly in recent years; in order to further
accelerate the industrialization of MEMS, this research willcomprehensively tackle such challenges as advancing foundry
services and coordinating MEMS devices and materials fields.
Joint research with businesses that provide foundry services
will also be conducted, as in the previous fiscal year, on specificissues such as overseas foundry fact-finding missions, process
standardization, creation of a materials database, andcoordination between foundries.

2. Collection and provision of micromachine
information
Information and documents on micromachine use inuniversities, industries, and public organizations in Japan andoverseas will be collected, combined with survey results and MCCproduced documents, and made freely available in the MMClibrary. At the same time, information will be disseminated widely,both domestically and internationally, through the MCC website.
(1) Improved dissemination and exchange ofinformation through the MCC website
Utilizing the MCC website, efforts to exchange anddisseminate information will be made proactively. Website
content aimed at supporting members will be enhanced.
(2) Publication of a micromachine periodical"Micromachine Index," containing abstracts of technicaldocuments and information on materials, is issued on a regularbasis and supplied to supporting members and organizations
concerned with micromachines.
(3) Publication of a newsletter
Information concerning the research and governmental trends
related to micromachines is distributed monthly to supporting
members and other interested individual and organizations.
(4) Maintaining and upgrading the MMC libraryTechnical documents and materials are collected and stored
in the MMC library and listed in a database together with otherrelevant information.

(1) Standardization of fatigue testing methods for micronano materials(application for sponsorship submitted
to the Ministry of Economy, Trade and Industry)
Continuing from last year, research on standard fatigue testing
methods that enable evaluation of the properties of various thinfilm materials measuring less than 10µm wide and 100µm long,with the aim of international standardization. Fatigue tests using
conventional 1/1000 sized specimens will be conducted in order toclarify the limits of application for fatigue testing methods that use
the current standard mm order specimens, and proposals forinternational standards will be considered.

3. Exchange and cooperation with micromachinerelated organizations worldwide
To promote affiliation, exchange and cooperation with relatedorganizations in and outside Japan, MMC will involve itself in suchactivities as participating in the micromachine summits, holding
international symposiums, inviting to Japan and sending overseas
researchers and experts in the field, and building foundry services.
(1) Participation in the 10th Micromachine Summit
MMC will participate in the 10th Micromachine Summit in
Grenoble, France, taking part in discussions of a wide range oftopics, including worldwide trends in micromachine technology
and its fields of application.

(2) Standardization of tensile testing methods for thinfilm materials
The results of MMC research conducted between Fiscal 1999 andFiscal 2001 as part of the NEDO project "standardization of evaluation
method of properties for micromachine material" have been included
in international standardization proposals submitted to IEC in Fiscal
2003, and are now at the CD(Committee Draft) stage. This year MMC
will continue its activities towards international standardization.

(2) Holding the 10 th International Micromachine/Nanotech
Symposium (partially subsidized by activities promoting
the machine industry)
This year MMC will hold the 10th International Micromachine/
Nanotech Symposium focusing on technological issues pertaining
to and the future prospects for the fusion of micromachine/MEMSand nanotechnology.

(3) Standardization of micromachine terminology
The international specifications proposal "Technical Terms
in Micromachine Technology" submitted to IEC in fiscal 2002
has been approved at the NP (New Project) stage and is now at
the CDV (Committee Draft for Vote) stage. This year MMC willcontinue its activities towards international standardization.

(3) International Exchange and Dispatch of ResearchersA group will be dispatched overseas to promote theexchange of information and opinions with micromachine-related
research institutes in universities and similar institutions. This
group will also participate in international symposiums andacademic meetings held overseas. MMC will further promoteexchange by inviting experts in the field from America andEurope and by sending our experts and researchers overseas.

(4) Research and investigation of micromachine standardization
In addition to the above, the results of relevant survey
research will be transmitted worldwide to encourage international
standardization, while demonstrating initiative in establishinginternational standards. In response to demand, the on-line
International Standardization Forum will be held, and formulationof a roadmap for future international standardization will begin.

(4) Building a foundry network system
Foundries are vital to the industrialization of MEMS. In
order to improve these facilities, we will undertake theestablishment of a system to improve services through anetwork comprising members of the Foundry Service Industry
Committee, who represent businesses either involved in orrelated to the provision of foundry services.

5. Dissemination of information and education
about micromachines
By issuing and distributing quarterly magazines and by holding
exhibitions, we hope to disseminate information on micromachines
extensively in order to educate as many people as possible.

(5) Establishing a forum for the exchange of cuttingedge micro/nano technology
In order to accelerate the development of cutting-edge
micro/nano technology - a basic technology expected to have adiversity of applications in various fields - MMC will hold ameeting for the exchange of technologies as an excavating
opportunity of the exchange of information, and joint research
as in the previous fiscal year.

(1) The quarterly magazine "MICROMACHINE" will be publishedperiodically and distributed to those in or connected withthe field. The quarterly magazine will also be made available
on the Internet through the Center's home page.
(2) The 15th Micromachine Exhibition and other events will
be held to present the latest research achievements, aswell as the latest cutting-edge micromachine/MEMS
industry-related products and product materials.

4. Standardization of micromachines
In cutting-edge technological fields such as micromachine/
MEMS, standardization is being promoted as international
initiatives are being taken.

(3) We will serve as the Federation of MicromachineTechnology Secretariat to work with and strengthen
micromachine-related organizations.

Preliminary Announcement
The 10th International Micromachine /Nanotech Symposium
November 11, 2004
at Science Hall, Science Museum,Tokyo, JAPAN

Exhibition
MICROMACHINE 2004
November 10 - 12, 2004
at Science Museum, Tokyo, JAPAN2