pressed only on the core portion of the triangular groove twice
using a piezo element. Hence, it is possible to accurately
reproduce a micro-shape, such as a groove, up to about a 30-nmwidth.
However, the problem is attempting to reproduce aworkpiece several millimeters square without bending theworkpiece. Wavefront aberrations are a problem in optics. For
example, a 20-nm flatness and parallelism is necessary in a 2mm square diffraction grating. In this case, it is not enoughsimply to create the micro-shape of the die, but also it isnecessary to analyze physical phenomena that occur during thereproduction and to control cooling and the distribution ofpressure and deformation to prevent residual stress.
In addition to assembly and reproduction, other general
methods of shape formation include removal, addition, anddeformation. I believe that methods of shape formation, such as"growth" known in reproductive medicine will emerge fromnanotechnology in the future. At that time, we will be able toproduce anything by preparing the proper DNA father andculture medium mother. Perhaps this is what has conventional
designers paralyzed with fear.

SEM image

AFM imageFig.5 Triangular grooves formed through polystyrene
injection molding

specific parts of the DNA, then a DNA strand is handled briefly
relying on the fluorescent light. This type of microassembly canbe achieved with the proper micro-tools.
Next, I will describe reproduction assembly. Fig. 4 shows an
L-letter patterned groove having a width of 20µm and a depth of
2µm that is reproduced by press-molding on glass. Aftermasking a carbide die with resist, the die is formed by blasting
and reproduced to the glass under a temperature of 530;. Fig.
5 shows triangular grooves formed at a pitch of 1µm by injection
molding on plastic. To obtain an accurate reproduction, weMMC Activities

The 7th International Micromachine Symposium
enterprises and organizations that had participated in the "MicromachineTechnology Project" (completed in March 2001) - part of the Industrial
Science and Technology Frontier Program by MITI- each presented theresults of their team's research results, as a summary of the project.
The scheduling and content of the presentations in thissymposium were regarded highly by participants, as showed by thecomments for the questionnaires submitted after the of the entire
program.
The schedule for the next symposium is shown below.

The 7th International Micromachine Symposium was held at theScience Museum in Kitanomaru Park, Tokyo, on October 31 andNovember 1, 2001.
On the first day, the symposium program began with an opening
address by Mr. Toshiro Shimoyama, Chairman of the Micromachine
Center, followed by guest speeches by Mr. Iwao Okamoto, DirectorGeneral of the Manufacturing Industries Bureau, METI, and Mr. Keiichi
Aoyagi, Executive Director of NEDO with words of expectation tomicromachine technology and encouragement for the efforts toconcerned persons.
The symposium was very successful, despite the participants fromoverseas were greatly reduced as a result of the September 11 terrorist
attacks in New York. The venue packed with participants to almost full
capacity on both days,total participants for the two-day program
numbered 380, including 267 registered participants, presenters, andmembers of the press.
On the first day, Prof. Fumio Kodama of The University of Tokyo
Research Center for Advanced Economic Engineering gave a special
lecture entitled "Micromachine and Business Model," exploring thetopic which is currently of greatest interest to those within theindustry.
Other program items on the first day included sessions entitled"The Path to Micromachine Industries in the 21st Century," "Overseas
Activities," "Innovative R&D," and "Micromachine in the Last Decadeand Future Outlook". A total of 16 invited lecturers, including 4 fromabroad, made presentations during these sessions.
The second day of the program began with a speech by Mr. Yukihiro
Hata, Director- General of the Industrial Technology Development
Department of NEDO. After this, researchers representing 23

The 8th International Micromachine Symposium
Period: November 14 (Thu), 2002
P l a c e : Science Hall, the Science Museum in
Kitanomaru Park, Tokyo

View of Symposium Hall4