MMC Activities..............1
TOPICS.......................5
Members’ Profiles .........6
Worldwide R&D ............7

MMC Activities

Overview of MMC's Activities in Fiscal 2003
I. Basic Objectives of Activities
The basic objectives of MMC activities are, firstly, toestablish basic micromachine technologies and increase
utilization of micromachines through research and investigationof micromachines (tiny machines, comprising functional
components measuring only a few millimeters or less, that arecapable of minutely detailed and complicated operations),
collection and provision of micromachine information, andexchange and cooperation with worldwide organizations; andsecondly, to contribute to the further development of Japan's
industrial economy and to international society.
MMC's basic objectives in FY 2003 are, as in the previous
fiscal year, to actively disseminate information on Japanese
micromachines; to engage in technical issues concerning thefusion of micro- and nanotechnologies; and to promote thefurther industrialization of micromachines through such eventsas MEMS.

II. Description of Primary Activities
1. Research and Investigation of Micromachines
Planned activities are aimed towards gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research on
new technological issues regarding the fusion of micro - andnanotechnologies, as well as making adjustments appropriate
for the multidirectional expansion of micromachine technology.

(1) Microanalysis/Production System Project(recommissioned NEDO project)This project involves the systematic collection of all pertinent
information regarding the hardware design, which are
indispensable for achieving high efficiency in a diversity ofanalytical and chemical processes, and which is achieved throughdesigning, manufacturing and evaluation processes of microchip
devices, into a database that will facilitate efficient use of thisinformation during the term of the project, store and maintainthe information after the project's conclusion, and ultimately bemade available to the general public. The data framework andaccumulated information in the test database created in 2002 will
be revised and the database upgraded; survey research will also
be conducted to gather further relevant data.

(2) Studies on the future prospects of micromachine technology
As we anticipate the industrialization of the micromachinetechnologies that have been developed thus far, from atechnological perspective we must also strive toward further
miniaturization in this new technological system of
micromachines. With regard to applications, MMC is pursuing
the possibilities for the fusion of micromachine technologies
with technologies in other fields, such as medical care andbiotechnology. Hence, studies on the future prospects ofInternet Home Page : http://www.mmc.or.jp/

micromachines are being implemented and approached fromvarious angles.

(3) Studies on R & D trends for micromachinetechnology in Japan and abroad
These studies aim to identify and analyze the latest trends
in the rapidly expanding field of micromachine technology, andmicromachine R&D in Japan and abroad; and to develop basic
technological data to aid in developing micromachinetechnologies.

(4) Studies on the micromachine market
Statistical data on micromachine-related markets that is
consistent over time is compiled using models for estimating
the micromachine market.

(5) Development of new functional materials for
MEMS(application submitted to the Japan
Machinery Federation)
In order to make MEMS more applicable in a wide range ofindustrial sectors, such as the telecommunications, bio andmedical fields, this research seeks to clarify the possibility of
manufacturing minute devices through the combination offunctional and heterogeneous materials comprisingpiezoelectric, magnetic, ceramic, organic, compound, nonsilicone chip, nano, and other materials.

(6) Joint survey research activities concerning
the industrialization of MEMS
Opportunities for the industrial application of MEMS havebeen opening up rapidly in recent years; in order to further
accelerate the industrialization of MEMS, this research willcomprehensively tackle such challenges as advancing foundry
services and coordinating MEMS devices and materials fields.
Joint research with businesses that provide foundry services
will also be conducted on specific issues such as process
standardization, creation of a materials database, andcoordination between foundries.

2. Collection and provision of micromachine
information
Information and documents on micromachine use inuniversities, industries, and public organizations in Japan andoverseas will be collected, combined with survey results andMCC-produced documents, and made freely available in the
MMC library.

(1) Maintaining and upgrading the MMC libraryTechnical documents and materials are collected and stored
in the MMC library and listed in a database together with otherrelevant information.

(2) Publication of a micromachine periodical"Micromachine Index," containing abstracts of technicaldocuments and information on materials, is issued on a regularbasis and supplied to supporting members and organizations
concerned with micromachines.

4. Standardization of micromachines
In newly established fields of systemized techniques, suchas micromachine technology, there is an urgent need forstandardization of terminology and measurement andevaluation methods. MMC will work towards the standardizationof terminology and measurement and evaluation methods,
taking international initiatives into perspective.

(3) Publication of a newsletter
Information concerning the research and governmental
trends related to micromachines is distributed monthly tosupporting members and other interested individual andorganizations.

(1) Standardization of fatigue testing methods
for micro-nano materials(application forsponsorship submitted to the Ministry of
Economy, Trade and Industry)(4) Database compilation and data management
system operations
We will upgrade data in the database and operate to makethe database accessible to supporting members.

MMC will undertake the development of conventional
1/1000 sized specimens for testing micro-nano materials, R&D
on the capabilities required of testing equipment, and theestablishment of stable testing conditions for compiling andanalyzing data, and standardization of these.

3. Exchange and cooperation with micromachine-related organizations worldwide
To promote affiliation, exchange and cooperation withrelated organizations in and outside Japan, MMC will involve
itself in such activities as participating in the micromachinesummits, holding international symposiums, inviting to Japanand sending overseas researchers and experts in the field, andbuilding foundry services.

(2) Standardization of tensile testing methods
for thin film materials
The results of MMC research conducted between Fiscal
1999 and Fiscal 2001 as part of the NEDO project"standardization of evaluation method of properties for
micromachine material" have been included in international
standardization proposals and will be implemented with thesupport and approval of the Japanese Standards Association.

(1) Participation in the 9 t h Micromachine
Summit
MMC will participate in the 9th Micromachine Summit in
Beijing, China, taking part in discussions of a wide range of
topics, including worldwide trends in micromachine technology
and its fields of application.

(3) Support for
terminology

standardization

of

IEC

The specifications proposal "Technical Terms in
Micromachine Technology" submitted to IEC/TC47/WG4 has
been approved at the NP (New Project) stage and is now at the
CD (Committee Draft) stage. This year MMC will continue its
support of work towards international standardization.

(2) Holding symposiums on micromachinetechnology (partially subsidized by activities
promoting the machine industry)
This year MMC will hold the 9 t h International
Micromachine/Nanotech Symposium (focusing on the fusion of
MEMS and nanotechnology) with the aim of establishing anddisseminating micromachine technologies. The Symposium will
include presentations from various countries describing their R& D achievements, as well as their applications of and polices
for promoting technology.

(4) Research and investigation of micromachine
standardization
The results of this study will be transmitted worldwide toencourage international standardization, while demonstrating
initiative in establishing international standards. This year, in
addition to presiding over the on-line International
Standardization Forum, MMC will continue its development ofstandardization policies regarding measurement and evaluation
based on its consideration of the selection and prioritization ofstandardization items.

(3) International Exchange and Dispatch of
Researchers
A group will be dispatched overseas to promote theexchange of information and opinions with micromachinerelated research institutes in universities and similar
institutions. This group will also participate in international
symposiums and academic meetings held overseas. MMC willfurther promote exchange by inviting experts in the field from
America and Europe and by sending our experts andresearchers overseas.

5. Dissemination of information and education
about micromachines
By issuing and distributing quarterly magazines and byholding exhibitions, we hope to disseminate information on
micromachines extensively in order to educate as many people
as possible.

(4) Building a foundry network system(1) The quarterly magazine "MICROMACHINE"
will be published periodically anddistributed to those in or connected with thefield. The quarterly magazine will also bemade available on the Internet through theCenter's home page.

Foundries are vital to the industrialization of
micromachines, particularly MEMS. In order to improve thesefacilities, we will undertake the establishment of a system toimprove services through a network comprising members of theFoundry Service Industry Committee, who represent businesses
either involved in or related to the provision of foundry
services.

(2) The 14th Micromachine Exhibition and otherevents will be held to present the latest
research achievements, as well as
instruments and equipment for aiding
research.

(5) Establishing a forum for the exchange of
micromachine technology
In order to accelerate the development of micromachinetechnology - a basic technology expected to have a diversity of
applications in various fields - MMC will promote thistechnology by establishing a forum for the exchange of
information, joint research, and other promotional activities.
This year, MMC will hold a meeting for the exchange of
biotechnology and other technologies outside but related to themicromachine field.

(3) We will serve as the Federation of
Micromachine Technology Secretariat towork with and strengthen micromachinerelated organizations.

22002 Micromachine Drawing Rally
The Micromachine Center (MMC)-sponsored Micromachine Drawing Contest for elementary and junior highschool students was held for the eighth and final time in 2001. For the 2002 competition, it was decided to hold asmaller-scale "drawing rally" instead of a full-scale contest. The 2002 Micromachine Drawing Rally attracted a total of
1,526 entries (714 entries in the elementary school category and 812 entries in the junior high school category)submitted by students from the following 7 elementary schools and 4 junior high schools. The kind cooperation ofteachers at these 11 schools is gratefully acknowledged.

Participating Schools
Elementary Schools:

Junior High Schools:

Iho-Minami Municipal Elementary School(Takasago, Hyogo Prefecture)
Takasago Municipal Elementary School(Takasago, Hyogo Prefecture)
Kijo Municipal Elementary School(Kariya, Aichi Prefecture)
Omiya-Minami Municipal Elementary School(Saitama, Saitama Prefecture)
Omaki Municipal Elementary School(Saitama, Saitama Prefecture)
Kasumigaseki-Minami Elementary School(Kawagoe, Saitama Prefecture)
Shimo-Inayoshi Municipal Elementary School(Chiyoda, Niihari-gun, Ibaraki Prefecture)

Shoyo Municipal Junior High School(Takasago, Hyogo Prefecture)
Kariya-Minami Municipal Junior High School(Kariya, Aichi Prefecture)
Fukagawa 8th Municipal Junior High School(Koto-ku, Tokyo)
Takayama Municipal Junior High School(Tsukuba, Ibaraki Prefecture)

The MMC Dissemination Committee (headed by Mr. Hitoshi Tateoka of Olympus Optical Co., Ltd.) selected 10
prizewinners each from the elementary and junior high school categories. The winning entries are shown on thefollowing pages. These drawings are to be used in future promotional activities to enhance diffusion and awareness of
micromachine technology. Each prizewinner in both the elementary and junior high school categories was presented
with a Certificate of Merit, and each of the participating elementary and junior high schools was presented with atestimonial and a School Cooperation Award.

2002 Micromachine Drawing Rally Prizewinners
Elementary School Category
Allergy Repulsion
MachineMicro - Message Glasses andTransmitter

Bacteria Removal Machine

Hover - board

Kazuhiro HAGIWARA

Shuto KATAGISHI

Tatsuya SAKAMOTO

Shimo-Inayoshi Municipal Elementary School(6th grade)

Omiya-Minami Municipal Elementary School(5th grade)

Shimo-Inayoshi Municipal Elementary School(6th grade)

Keishi YOKOYAMA
Kijo Municipal
Elementary School(6th grade)3Memory Pencil

Guide - Machine

Handy Animal Desk Set

Hiroaki KUDO

Shoko CHIZAWA

Shimo-Inayoshi Municipal Elementary School(6th grade)

Omaki Municipal Elementary School(6th grade)

Tomona KOMATSUZAKI

Water - Pipe Rescuer

Ryota NOZAWA

Shimo-Inayoshi Municipal Elementary School Omiya-Minami Municipal Elementary School(6th grade)(6th grade)

Kumokumo : Spider - Shaped
Lost Property Finder
Landmine Detecting Robot

Yuko YOSHIDA

Yuta SAKAKIBARA

Iho-Minami Municipal Elementary School(6th grade)

Kijo Municipal Elementary School(6th grade)

Junior High School Category
Rhinoceros Beetle / Stag Beetle
Buggies

The EMS Master Tank:
Paralysis? Piece of Cake!

Dr. Tooth

Stuck - on - Safety Sticker

Takaaki MIYAMOTO

Akari ITO

Kaoru TANAKA

Shoyo Municipal Junior High School(1st grade)

Kariya-Minami Municipal Junior High School(3rd grade)

Kariya-Minami Municipal Junior High School(3rd grade)

Takanori SUZUKI
Kariya-Minami Municipal
Junior High School(3rd grade)

Eyesight Preservation Ring

Chika WATANABE

Audible Text Machine

Training Pace-Setter Earring-Phones Anesthesia + Micromachine

Takaya SAIKI

Kyoko YOKOYAMAKariya-Minami Municipal Junior High School Kariya-Minami Municipal Junior High School Kariya-Minami Municipal Junior High School(1st grade)(3rd grade)(2nd grade)

Automatic Braille Translator Earrings Footpath Safety Ring

Natsuko KAMIYA

Kanta KATO

Kariya-Minami Municipal Junior High School Kariya-Minami Municipal Junior High School(3rd grade)(2nd grade)4

Yui TAKAMATSU
Fukagawa 8th Municipal Junior High School(2nd grade)

TOPICS

MEMS 2003 Report
MEMS2003, The 16th Annual International IEEE
Micro Electro Mechanical Systems Conference, washeld from January 19 to 23, 2003, at the Kyoto
International Conference Hall, Japan.

concerning either materials or processing
technologies, but interest in bio- and micro fluidrelated topics combined was greatest overall. The
strong interest in these two fields is a growing trendthat has been commonly observed in micromachinerelated international conferences of late.

The 500 pre-publication papers submitted forpresentation at MEMS2003 exceeded last year's
record of 454, and of these, 22 were chosen for oral
and 151 for poster presentations, a selection rate of
approximately 35%. Since applications mushroomed in
1995, it has become increasingly difficult to have apaper accepted for presentation at a MEMS
conference. Although attendance at this year's
conference was 664, slightly less than the 700 who
attended MEMS2002 in Las Vegas, USA, last year, thefact that approximately half the participants were fromoverseas ensured that the conference was, as its namepromises, a truly international event.

Breakdowns of the papers submitted to andpresented at MEMS2003 according to topic and region,
as well as the results of the attendees' questionnaire,
are available on the Ritsumeikan University website(http://www.ritsumei.ac.jp/se/~tabata/mems2003/).
The MEMS2003 Proceedings (soft cover/ 711
pages/ 12,000 per copy (¥10,000 for IEEE members),
CD-R and shipping fee included) can be ordered fromthe following website: http://home.inter.net/mems2003/
The 17th Annual International IEEE Micro Electro
Mechanical Systems Conference, MEMS2004, is to beheld in Maastricht, The Netherlands, from January 25
to 29, 2004. Program details are available from thefollowing website: http://www.mems2004.org

MEMS began in 1987 as the Micro Robots andTeleoperators Workshop, and the present name wasadopted in 1999. Although the number of presentation
papers and conference participants has gradually
increased over the years, MEMS has consistently
maintained its original single session format for oralpresentations. The number of oral presentations at
MEMS2003 was reduced from the previous year's 41 to
22, partly in order to ensure a consistent selection
rate. Needless to say, this decision was neither an easy
for organizers to make, nor necessarily welcomed byparticipants. However, in the poster sessions, forwhich a much greater number of presentations were
accepted, the standard of research in a large
proportion of presentations was very high.
Furthermore, in Poster Preview sessions, a newfeature introduced experimentally at MEMS2003, held
prior to the poster sessions each day, the content ofpresentations was classified into relevant categories
and topics selected by commentators explained, andthis additional service was well-received among
participants.

Number of Accepted Paper

80

71

70
60
50

49
37

40
30

19

20
10
0

Japan

North America

EuropeAsia except
for Japan

A regionFig. 1 Regional Distribution of accepted Paper for
MEMS2003

100

Number of Accepted Paper

By region, the largest number of poster
presentations was made by American researchers (71presentations), followed by Japanese researchers (49presentations). Although the number of presentations
by European researchers was noticeably small (19presentations) this year, the number of presentations
by Korean and Taiwanese researchers again rose overthe previous year.

92

90
80
70
60
50
40
30

30

25

28

EuropeAsia except
for Japan

20
10
0

Japan

North America
A region

According to the results of a questionnaireanswered by conference attendees, participants
showed the greatest interest in presentations

Fig. 2 Regional Distribution of accepted Paper for
MEMS2002(For Reference)5

Members' Profiles

Fuji Research InstituteCorporation
1. The Challenge of Microfabrication Technology
While Europe and America are the leading nationsin the microfabrication industry, an effort to establish
this technology as a new pillar of industry in Taiwan,
Singapore, and other Asian countries has recently
gained momentum through the support from theirnational governments. There are also growing
expectations in Japan that its manufacturing industry
can be revitalized by microfabrication technologies,
such as accelerometers, pressure sensors, and inkjet
printer heads. Against this backdrop, Fuji-RIC has
proposed applying our simulators (see Table) to
provide various services such as data analysis,
consulting, and the development of simulation systems
for the microfabrication industry for which market
growth is considered promising.

Mitsuru Annen
President

the field of microfabrication by developing an
advanced simulation system through the use of ourcurrent achievements, including semiconductor
process analysis, electrostatic/magnetostatic field
analysis, optical, electronic and plasma analysis,
thermal fluid analysis, chemical reaction analysis, andstructural analysis. We would like to strive to take thelead among Japanese company in simulation systems
for microfabrication technology.

2. Future Challenges
In the future, Fuji-RIC would like to contribute to

Achievements in Development
Fuji-RIC Development Simulators

Description

FUJI-RIC / u -FLOW

The mesh generator can provide higher quality meshes which were difficult using
the structured grids of FUJI-RIC /  -FLOW.

FUJI-RIC /  -FLOW,EWS version

FUJI-RIC /  -FLOW is the CFD system for a wide range of flow models.

FUJI-RIC /  -FLOW,
PC-UNIX version

PC-UNIX version supports full-spec of EWS version on a Linux platform.

MISTRAL/MP (multiphase flow
simulation system)

MISTRAL/MP is the CFD code for multiphase flows(gas/liquid,liquid/liquid)
including evaporation/condensation model.

Microstructural stress andstructure analysis simulation
systemThis structural analysis simulator can evaluate the thermal stress natural period,
phase shifts, and time response of structures.

Microstructural fatigue andthermal stress analysis simulation
systemThis structural analysis simulator can evaluate changes in properties of materials,
stress singularities in interfaces of layer stractures, and fatigue characteristics.

6

Worldwide R&D

Seeking Revolutionary Biomaterials
Kazuhiko Ishihara, Professor
Madoka Takai, Lecturer
Department of Materials Engineering, School of Engineering, The University of Tokyo
7. Synthesis of polymers for stabilizing bioactive
molecules
8. Preparation of protein adsorption resistible
materials for use in microspaces to improvechip functions

There has been much anticipation for the development of a
new biotechnology that would enable us to recover ourhumanity and contribute to healthy enjoyable lives. In addition
to the great contribution from materials created through ourlatest technologies, the construction of a biointerface forinterfacing with organisms is an important subject. It is ourhope that Japan will pioneer future biotechnology in medical
devices, time reset medical treatment, order-made medical
treatment, brain function analysis, biochips, after genetic
information analysis.

Professor Kazuhiko Ishihara (an associate professor at thetime) established this laboratory in April 1998 with two
undergraduate students as part of the material engineeringdevelopments. As of April 2003, five years later, the staff at thelaboratory includes Professor Ishihara, lecturer Dr. Madoka
Takai, research associate Dr. Junji Watanabe, researcher Dr.
Kikuko Fukumoto, and Ms Kyoko Fukazawa as an assistantmember. In addition, the laboratory includes one project
researcher and 17 graduate students (9 in the doctoral courseand 8 in the master's course) and 4 senior undergraduate
students, making a total of 27 people in this large laboratory.

Biomaterial is indispensable for constructing a reliableinterface between living organisms and material. At the
Ishihara-Takai Laboratory, we have no doubt that "biomaterial
engineering is the field that will enable us to realize our
dreams." Under this philosophy, we are working toward thedevelopment of new biomaterials and advanced medical devices
for the 21 st century. To achieve this, we have studied thedesign, synthesis, and functional evaluation of novel polymer
materials dividing four research teams responsible forbiointerface, bioconjugate, biomatrix, and nanobioprocessing.
These teams are systematically conducting research in thefollowing eight fields.

All researchers at the laboratory vigorously conduct
research and development through repeated experiments anddiscussions on their specific research topics. The environment
at the laboratory is such that anyone can freely use instruments
for material preparation and processing, polymer synthesis andanalysis, and property evaluation. We are involved in muchcollaborative research with universities and companies
domestically and overseas, while supplying MPC polymers thatcan make biocompatible on the device surfaces. In particular
we have succeeded in the industrialization of MPC polymers
through close cooperation with businesses and havecommercialized skin care and eye care products through our
research. Recently we have developed a method of polymer
treatment that can reduce protein adsorption on the surfaces ofbiochips and capillaries by 98% and are providing informationon this method. This technology is also effective in

1. Synthesis of phospholipid (MPC) polymers
and their applications in biomaterials
2. Preparation of a supramolecular polymer
materials for cellular engineering
3. Preparation of polymer membranes for theefficient separation of biomolecules
4. Precision synthesis of polymeric biomaterials
5. Preparation of bioactuator materials
6. Study on bioinspired polymer gel fornanomachines

Regulation of biosubstancematerials interactions

Bioengineering devices
Bioactive effects

Biointerface

Sensors for biologicalactivityDNA,
substances in brain,
hormones

Interface design
and regulator

Bioconjugate

Biomatrix

Nanoparticles
Polymer aggregates
Water-soluble polymers

Bioadhesive materials
Biodegradable materials
Functional polymer alloy

High performance
artificial organs

Elastic materials
Membranes
FibersGels

Advanced drugdelivery system

Biopatterning
Biomolecule integration
Bionetwork formation
Nanomachining

Medical micromachines

Nanobioprocessing
Materials system fortissue engineering
Enhancing the quality of life and the joy of healthy life

7

Order-made medical treatment
Time reset medical treatment

Bioengineering
Production and diagnostic systems
using genetic manipulation
Medicine
Novel artificial organs A new bioseparation andPharmacology
analysis system
and medical devices
Drug delivery system
Regenerative medicine
Gene therapy(tissue engineering)
Energy Engineering
Bioenergy system
Improved efficiency by
preventing contaminationof organisms

Environment
Material system friendly to ecosystems
Reduction of environmental hormones;
biodegradable materials

Develop devices with biomaterials

Investigate the relationshipbetween biomaterials
and biomolecules

Assess the properties ofthe biomaterials

Design and preparation of biomaterials

micromachine development. Work at the laboratory is
performed in a cheerful and enjoyable environment under the
motto that research should always be conducted with viewpoint

towards to the world. (For more information on our research
activities, please see the Laboratory web site at
h t t p : / / b m w . m m . t . u - t o k y o . a c . j p / i s h i h a r a / ).

Preliminary Announcement
The 9th International Micromachine /Nanotech Symposium
November 13, 2003
at Science Hall, Science Museum,Tokyo, JAPAN
Exhibition

micromacmicr
micromach
omach
h ine
Exhibition

MICROMACHINE2003 MICROMACHINE 2003
2003

micromacmicr
micromachineomachinehine 2002003

2003 2003
mac
machine2003

November 12 - 14, 2003
at Science Museum, Tokyo, JAPANMICROMACHINE No. 43

MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
your comments about MICROMACHINE to the publisher :Takayuki Hirano, Executive Director, Micromachine Center (MMC)
MBR99 Bldg., 6F., 67 Kanda Sakumagashi, Chiyoda-ku, Tokyo 101-0026, Japan
Tel : +81-3-5835-1870, Fax : +81-3-5835-1873
Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : May 19, 2003

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