MMC Activities..............1
Column.......................4
Overseas Trends............5
Member’s Profiles .........7
Worldwide R&D ............8

MMC Activities

Activities of the Micromachine Center in Fiscal 2003
I. Investigation and Research on Micromachines
Research activities were aimed at gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research on
new technological issues regarding the fusion of micro- andnanotechnologies, as well as making adjustments appropriate
for the multidirectional expansion of micromachine technology.

1. Microanalysis/production system project(recommissioned by New Energy and Industrial
Technology Development Organization [NEDO])
A mostly "Namazu" full-text search system was completed
in accordance with the specification, and data was input. Inaddition, investigations into technological trends inmicrochemical devices were conducted at "Transducers'03" inJune and "MEMS 2004" in January.

2. Studies on the future prospects of micromachine technology.
The long-term vision subcommittee (chairman: Prof. Isao
Shimoyama, Graduate School, the University of Tokyo) met
three times, and decided on the orientation of book content.

3. Studies on R & D trends for micromachinetechnology in Japan and abroad
Subcommittee of trends in R&D for micromachine technology
in Japan and abroad (chairman: Prof. Shuichi Shoji, Waseda
University)met three times, and conducted exploratory analysisof the latest situation regarding the rapid expansion, both
domestically and internationally, of micromachine technology andresearch trends; and of basic technological data that contributes
to the advancement of micromachine technology; and compiled
the results of investigations on technological trends into the 2003
report of investigation into trends by category.

4. Studies on the micromachine market
The 2002 investigation into the domestic market scale formicromachine technology put forward preparations for thecompilation of relevant statistical data, etc.

5. Development of new functional materials for
MEMS (commissioned by the Japan Machinery
Federation)
Recommendations were made for the promotion of thedevelopment of new functional materials for MEMS, and compiled
into a report. Recommendations included exchange between
researchers from different fields, a top-down and bottom-up fusionarea approach, and the necessity of meeting the needs of society.

6. Investigative research into the current stateof the MEMS related market and an analysis
of Japan's competitive power (commissionedby Japan Industrial Policy Research Institute)With a view to building up an economically consistent
database of micromachine-related market statistics, andInternet Home Page : http://www.mmc.or.jp/

investigating the current state of MEMS development andstrategy in the U.S., as well as making recommendations inorder to maintain and improve Japan's competitive power, aninvestigative research committee to study the current state of
the MEMS related market and to conduct an analysis of Japan'scompetitive power; a subcommittee to consider issues related
to the creation of a market-estimation system (chairman: Prof.
Isao Shimoyama, Graduate School, the University of Tokyo) met
and compiled a report of their findings of this fiscal year.

7. Joint survey research activities concerning
the industrialization of MEMS
Foundry manufacturer Olympus Corporation, Omron
Corporation, and Matsushita Electric Works, Ltd. took part in
the business activity promotion committee (chairman: RyoOhta, Olympus Corporation), which carried out joint survey
research into identifying issues that needed to be addressed inorder to facilitate the early industrialization of MEMS, together
with measures to achieve this goal. This fiscal year in Japan
public hearings were held in MEMS related universities andnational research institutions, MEMS foundries, MEMS users,and venture companies, and fact-finding was carried out in theU.S. and in Europe.

II. Collection and Provision of Micromachine Information
Information and documents on micromachines inuniversities, industries, and public organizations both in Japanand overseas have been collected and combined with survey
results compiled and documents produced by MMC, and madefreely available in the MMC library.

1. Maintenance and expansion of the MMC library
Information and documents such as periodicals and books on
micromachines in universities, industries, and public organizations
both in Japan and overseas have been collected and combinedwith survey results compiled and documents produced by MMC
and made available in the MMC library. (49 books collected in FY
2003, making a total of 1,037 books as of March 31.)

2. Publication of a micromachine periodical("Micromachine Index")
The above-mentioned collected documents were madefreely available in the MMC library for perusal by interested
parties. Moreover, a micromachine periodical entitled
Micromachine Index gathering together abstracts of important
documents was published and distributed to interested parties,
as well as being incorporated into the database. (FY 2003: Nos.
84-91 issued [8 volumes])

3. Publication of a newsletter
Information concerning research and governmental trends
related to micromachines was distributed monthly tosupporting members. This was posted on the Internet
homepage for the first time from January, resulting in a
substantially higher hit count.

technological development in Japan and overseas, and theformulation of recommendations and guiding principles,
appropriate areas for standardization, requisite conditions, andso forth. In addition, an investigative research committee wasformed, which carried out improvements and optimization ofstrain measurement methods and test specimen equipment
methods, for the standardization of fatigue testing.

4. Database construction and data management
system operations
Along with revisions of its Internet homepage, a new pagefor supporting members was opened, and the content of thedatabase was transferred.

III. Exchange and Cooperation with Worldwide
Organizations Involved with Micromachines

2. Standardization of tensile testing methods forthin film materials

To promote affiliation, exchange and cooperation withrelated organizations in and outside Japan, MMC involved itself
in such activities as participating in the Micromachine Summit,
holding international symposiums, inviting to Japan and sending
overseas researchers and experts in the field.

Japanese standard proposals in respect of tensile testing forthin film materials and test specimens were collected together,and a NP (New Project) proposal was submitted to
IEC/TC47/WG4 based on the results.

1. Participation in the 9th Micromachine Summit

3. Support for standardization of IEC terminology

The 9th Micromachine Summit was to have been held forthree days from April 28-30, but was cancelled due to thespread of SARS to Beijing.

In respect of the terminology approved as CD (CommitteeDraft) proposals by IEC/TC47, the terminology subcommittee
met and carried out the task of adding terminology as well as
handling comments for the CDV (Committee Draft for Vote).

2. Held the 9th International Micromachine/Nanotech
Symposium

4. Investigation and research on micromachine
standardization

The 9th International Micromachine/Nanotech Symposium
was held on November 13 at the Science Museum inKitanomaru Park, Tokyo, with the aim of promoting
micromachine technology and educating a wider publicaudience. The event was well attended, with a total of 297
participants including speakers and media representatives.

The results of this research have been transmitted
worldwide, encouraging international standardization while
exercising initiative in establishing international standards. Thisfiscal year, the standardization committee met three times.
(chairman: Prof. Emeritus Hiroyoshi Sato, the University ofTokyo). Activities were consolidated in respect of"standardization regarding fatigue testing for micro-nanomaterials" scheduled for implementation for 3 years from 2003.
International standardization activities regarding IEC
terminology presented the CDV in March, 2004, andsubsequently supported this international proposal activity. Asfor the standardization of material properties, a test specimen
NP and a tensile testing method NP proposals were submitted
to IEC, and were recommended to the CD stage. In addition,activities for JIS were carried out.

3. International exchange and dispatch of researchers
For four days from June 9 to 12, 2003, Etsuro Shimizu,
manager of the Research Department attended"Transducers'04" held in Boston, U.S.A., where he carried out
an investigation into trends. For five days from July 7 to 11,2003, Takayuki Hirano, Executive Director, and Yoichi Toguchi,manager of the Research Department made official trips to
Switzerland, France, and the U.K. to carry out surveys into
research institutions, foundry companies, design houses, andmarketing companies in Europe. For 5 days from January 25 to29, 2004, Yoichi Toguchi, manager of the Research Department
attended "MEMS 2004" held in Maastricht, the Netherlands,
where he carried out an investigation into trends.

V. Dissemination and Education about Micromachines
By issuing and distributing quarterly magazines and byholding exhibitions, we intended to disseminate information on
micromachines extensively in order to educate as many people
as possible.

4. Constructing a foundry network system
In order to further the industrialization of micromachines,
particularly MEMS, MMC organized the foundry service industry
committee (chairman: Takashi Mihara, Senior Researcher,
Olympus Corporation) six times to organize businesses providing
foundry services, to set up a network system to improve services
and to consider ways such a system could be developed. As ameans of disseminating information, the MMC also upgraded its
own Internet homepage and held two MEMS lectures.

1. Publication of public relations quarterly
magazine "MICROMACHINE"
Vols. 43 to 46 were published in Japanese only. English
versions are available on the MMC website:
http://www.mmc.or.jp/

2. The 14th Micromachine Exhibition

5. Establishing a forum for the exchange of
micromachine technology

The 14th Micromachine Exhibition was held from November
12 to 14 at the Science Museium in Kitanomaru Park, Tokyo.
238 companies, organizations, etc. participated (the total
number of booths was 323), and the total number of visitors
was 8,793, making it the largest scale event to date.

A demand study in respect of the themes of forums forexchange was carried out, and a forum for the exchange of cuttingedge micro-nano technology was held for supporting members.

IV. Standardization of Micromachines
3. Administration of theMicromachine Technology

In micromachine technology and other newly establishedfields of systemized techniques as well, there is an urgent needfor the standardization of terminology, measurement, andevaluation methods. The MMC worked toward this, taking
international initiatives into perspective.

FederationofServed as secretariat for the Federation of MicromachineTechnology to link and strengthen micromachine-related organizations.

4. Workshop presenting the results of grantrecipient projects for the 9th MicromachineTechnology Research Grants (FY 2001)

1. Standardization of fatigue testing methods for
micro-nano materials (commissioned byMinistry of Economy, Trade and Industry)

A Workshop presenting the results of grant recipient
projects completed in March, 2003 was held on Friday,
September 12, 2003, with 6 themes from applicants in FY 2000
and 3 themes from applicants in FY 2001, a total of 9 themes
being presented.

In order to achieve this goal, a committee for the promotionof standardization was formed in 2003, which conducted acomprehensive investigation into investigation into trends in2