Expectations for MemsONE
Yusuke Ichinose, Project Manager, New Energy and Industrial Technology Development Organization
MEMS (Micro Electro Mechanical Systems) isdefined as a technology for creating fine, movable threedimensional structures using semiconductor processing
and other technologies, or the components
manufactured in this way. In Japan they are calledmicromachines while in Europe they are known as MST(Micro System Technology), and broadly speaking, theterms have been used to mean nearly the same thing.
MEMS differ from LSI circuits in that a wide range ofinputs and outputs are possible, such as electricalsignals, energy, mechanical displacement, physicalquantities, optical signals, chemical quantities and so on.
If machinery or systems are compared to humans,circuits correspond to the brain, while MEMS
correspond to important parts such as the five senses
and muscles. Since a wide variety of inputs and outputs
are possible, MEMS can be applied in a range of fields
whether in telecoms, medicine and biotechnology,
automotive and so on, and since they use semiconductor
process technologies, it is possible to manufacture highvalue-added products that are small, high performance,and have superior energy saving characteristics.
The New Energy and Industrial Technology
Development Organization (hereafter, “NEDO”)
recognizes MEMS as an important field, and since
FY1991 NEDO has carried out the Micromachine Project
resulting in improvements in MEMS basic technology,and commercialization of some developments. However,since MEMS requires expensive and large scaleequipment, NEDO has overseen the MEMS Project for
the last 3 years since FY2003 in order to reduce risk
from the viewpoint of capital investment, and to provide
facilities and infrastructure. This project has carried out
foundry improvements and has led to the developmentof high-level, three-dimensional process technologies.
Consequent to these circumstances, the Project forDevelopment of a Design and Analysis Support Systemfor MEMS (hereafter, “Mems-ONE Project” has been
underway since FY2004 based on a 3-year plan. This
project is focusing on development of a design andanalysis support system for MEMS. One of the reasons
why MEMS has not met its latent potential is that only
limited numbers of researchers and engineers havebeen involved in the development of MEMS. By using
this system, researchers and engineers from many otherfields will more easily be able to participate in MEMS,
and it will be possible to reduce the cost and time
involved for MEMS development by using simulations.
One of the features of this system is a built-in
database of knowledge such as MEMS terminology,
explanations of representative processes and devices,and examples of analysis so that engineers who do nothave much experience of MEMS can use it. At the sametime, providing the system with a full materials
database improves the accuracy of analysis, making it aworthwhile system for engineers who are alreadycurrently involved in MEMS development too.
When NEDO established this project, we designed
the system so that it could be used both by beginners
and experienced engineers. However, since MEMS is atechnology in a growth field where the environment ischanging significantly, we carried out a survey
regarding activities to promote the Design and Analysis
Support System for MEMS and its repercussion effects.
This survey was conducted in parallel with the FY2004
project. When we surveyed the technology trends andthe needs of society, we found that nanoimprint
technology was considered a promising MEMS
manufacturing technology, although in its startup
phase it was still thought to be a future technology.
Therefore using the NEDO system, we obtained a new
budget and from FY2005 we started development of a
Nanoimprint Process and Analysis System.
Furthermore, from FY2006, we are starting the newHigh Integration Composite MEMS Fabrication
Technology Development Project based on a 3-year
plan. This project is scheduled to cover, (1)Development of MEMS/nano-function composite
technology, (2) Development of MEMS/semiconductor
integrated fabrication technology, and (3)MEMS/MEMS high integration composite technology.
In future MEMS support systems, analysis of MEMS
technology and semiconductor technology at the sametime will likely be required, therefore from FY2006, wehave been working on development of a circuit
integration MEMS simulator.
The Mems-ONE Project will finish this fiscal year.
However, the system developed as a result of theNEDO project will still be promoted after the end of
the project, and we anticipate that the software will beimproved and the database updated on a selfsustaining basis. As part of the High Integration
Composite MEMS Fabrication Technology
Development Project, NEDO will establish a databaseof high integration composite MEMS knowledge andwill provide support so that the results are provided tothe Mems-ONE Project. In addition, we are planning astandardization project to promote international
standardization of technology developed by the MemsONE Project, and we expect that by going throughthese stages, improvement of the software and updatesof the database will ultimately become self-sustaining,
the results will be disseminated continuously, and theMEMS industry will continue to grow.

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