MMC Activities..............1MemsONE Pj ................4Column.......................5
Overseas Trends............6
Member’s Profiles .........8

MMC Activities

The 11th International Micromachine / Nanotech Symposium
The Micromachine Center, in conjunction with METIand NEDO, will hold the 11 t h International
Micromachine/Nanotech Symposium on November 10(Thursday), 2005, in the Science Hall of the Science
Museum in Kitanomaru Park, Tokyo. Under the subtitle“Micromachine Technology: Driving the Creation andExpansion of New Industries,” the symposium willfeature 12 lectures presented by four invited speakers
from overseas and eight from within Japan, all leading
experts in the field, in three sessions: “Micromachine
Business Frontiers,” “Realizing the Potential of
Micromachine Applications,” and “At the Cutting Edgeof Micromachine Technology.” Furthermore, as part ofMicromachine Center preparations for theestablishment next April of a MEMS Association topromote industrial exchange and technologicaldevelopment, the symposium will also feature a special
session entitled, “Towards the Expansion of MEMS
Industries,” that will include a keynote address andpanel discussion comprising panelists representing
various industries.
The special session, “Towards the Expansion ofMEMS Industries,” will begin with a keynote address
presented by Professor Hiroyuki Fujita of the Universityof Tokyo entitled “Strategies for Expanding MEMS
Industries and Developing New Fields.” This will befollowed by a panel discussion comprising Professor
Fujita as coordinator and 6 panelists representing
various industries: Mr. Yoshinori Komiya, Director ofthe Industrial Machinery Division, Manufacturing
Industries Bureau, METI; Mr. Hiroya Taguchi, Presidentof the Japan Society of Mechanical Engineers and Chief
Executive Officer of the Life Science Group at HitachiLtd.; Mr. Tsuneyuki Miyake, Deputy Editor of Nikkei
Microdevices, Nikkei Business Publications Inc.; Prof.
Harri Kopola of VTT Electronics; Mr. Haruo Ogawa,Division Manager of the New Business Planning Division
at Olympus Co.; and Mr. Hitoshi Ogata, Sr. Executive
Office and Vice President of Corporate R&D at
Mitsubishi Electric Corp. This panel discussion is
expected to provide extremely useful ideas for theexpansion of MEMS industries.
Session 1, “Micromachine Business Frontiers,” willfeature three lectures presented by representatives ofleading manufacturers of products in whichmicromachine technology plays a significant role. Onelecture will recount the success story of Analog Devices,manufacturer of such cutting-edge products as ink-jet
printers with heads created using micromachinetechnology whose application is spreading to previously
unimagined fields; rapidly advancing mobile telephonesthat are expected to evolve even more remarkably
through the application of MEMS technology; andacceleration sensors necessary for vehicles (overseasspeaker). Symposium participants can look forward toInternet Home Page : http://www.mmc.or.jp/

lectures that paint a vivid picture of R&D at theforefront of the MEMS industry.
Session 2, “Realizing the Potential of Micromachine
Applications,” will present five lectures concerning
either research on the application of MEMS and/or
nanotechnology in fields such as medicine, energy, andspace, or highly integrated complex MEMS adaptable toa diverse range of applications. Of particular interest arelectures on the application of MEMS in space researchat NASA's Jet Propulsion Laboratory (overseasspeaker) and research at the VTT Technical ResearchCenter, which has produced many of Finland's technicalinnovations, most famously those of Nokia.
Micromachine technology is being heralded as a meansof answering society's needs and resolving socialproblems; R&D is being actively pursued in a diversityof fields, and high expectations are held for its future
development.
Session 3, “At the Cutting Edge of MicromachineTechnology,” will feature four lectures concerning
nanomaterials, ultraprecision micromachining, nanometrology, and thin-film material/nanomateriallimitations. Research on materials, processing,measurement, and reliability-related basic technologies
are essential to MEMS development; this session
provides a sampling of cutting-edge research being
steadily pursued at universities and researchinstitutions. It is anticipated that, through research suchas this, micromachine technology will achieve theevolution necessary for it to answer diversifying needs,leading to the further expansion of MEMS industries.
The 16th Micromachine Exhibition will also be held at
the Science Museum, over the three days from
September 9 (Wednesday) to 11 (Friday). The
numerous displays will include micromachine-related
works created by businesses, universities, andorganizations. In order to gain the best possible
understanding of micromachine technology, it isrecommended that symposium participants also takethis opportunity to see actual micromachines in action.
Symposium participants will therefore be allowed freeand unlimited entry to the micromachine exhibition onpresentation of their participation certificate.
Furthermore, the interim report for the MemsONE
Project will be presented on September 11, the final dayof the exhibition, at the Science Museum; symposium
and exhibition visitors are warmly invited to attend thismeeting also.
Participation in the symposium, exhibition, andreport presentation is sure to stir the imagination andsuggest ideas instrumental to future research andbusiness. We therefore look forward to welcoming alarge number of participants to each of these events.

The 11th International Micromachine / Nanotech Symposium- Micromachine Technology is Pulling the Creation and Development of New Industries -November 10, 2005, The Science Museum, Tokyo
Opening

Chairman: Keiichi Aoyagi (MMC)

9:15 --- 9:20

Opening Remarks

Tamotsu Nomakuchi (Micromachine Center)

9:20 --- 9:25

Guest Speech

Yoshinori Komiya (Industrial Machinery Division,
Manufacturing Industries Bureau, METI)

Special Session Towards Development of New MEMS Industries
9:25 --- 9:40

Strategies for Further Development of MEMS
Industries and Emerging Applications

9:40 --- 11:00

Panel Discussion
Towards Development of New MEMS Industries

Session 1

The Forefront of the Micromachine Business

11:00 --- 11:25

The Inkjet Printer and Its Industrial
Application

Mitsuro Atobe (Seiko Epson Corp.)

11:25 --- 11:50

Trends in Mobile Phones and RF-MEMS
Applications

Kunihiko Nakamura (Matsushita ElectricIndustrial Co., Ltd.)

11:50 --- 12:20

Acceleration Sensors

Bob Sulouff (Analog Devices Inc.)

12:20 --- 13:20

Hiroyuki Fujita (The University of Tokyo)
Coordinator: Hiroyuki Fujita (The University of Tokyo)
Panelist: Hitoshi Ogata (Mitsubishi Electric Corp.),
Haruo Ogawa (Olympus Corp.), Yoshinori Komiya (METI),
Hiroya Taguchi (The Japan Society of Mechanical Engineers),
Tsuneyuki Miyake (Nikkei Business Publications, Inc.),Harri Kopola (VTT Electronics)

Chairman: Isao Shimoyama (The University of Tokyo)

Lunch

Session 2

Micromachine Applications Expected to Flower

13:20 --- 13:45

Biomedical Application of BioMEMS
and Nanotechnology

Yoshinobu Baba (Nagoya University)

13:45 --- 14:15

Optical Applications - Potential andChallenge for MEMS -Harri Kopola (VTT Electronics)

14:15 --- 14:40

Development of Integrated Micro Reactors withReformers for Small Fuel CellsOsamu Nakamura (Casio Computer Co., Ltd.)

14:40 --- 15:10

MEMS and Nanotechnology
for Space Applications

Thomas George (ViaLogy Corporation)

15:10 --- 15:35

Fine MEMS

Isao Shimoyama (The University of Tokyo)

15:35 --- 15:50

Chairman: Kazuhiro Hane (Tohoku University)

BreakSession 3

The Leading Edge of Micromachine Technology

15:50 --- 16:15

MEMS-related Nanomaterials

Gen Hashiguchi (Kagawa University)

16:15 --- 16:40

Ultraprecision Micromachining and Its
Application

Yoshimi Takeuchi (Osaka University)

16:40 --- 17:05

Nanometrolog - Subnanometer-scale Dimensional
Measurement Using Atomic Force Microscopy -Satoshi Gonda (Advanced Semiconductor ResearchCenter, AIST)

17:05 --- 17:35

Understanding the Limitations ofStructural Films and Nanomaterials

Christopher Muhlstein (The Pennsylvania State University)

Closing Remarks

Keiichi Aoyagi (MMC)

Chairman: Ryutaro Maeda (AIST)

Closing
17:35 --- 17:40

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