Activities of the Micromachine Center

Research Studies and Standardization Activities
1. Survey of Industrial Trends

2. Survey of Technological Trends at Home orAbroad (Second Semester)

The Industrial Trends Study Committee is continuing its
study begun last fiscal year on the types of tools employing
MEMS technology (MEMS-Inside) and the uses for these tools(MEMS applications), as well as the state of affairs for MEMSrelated businesses. The Committee compiled this information
into its 2009 report on challenges and strategies for theexpansion of Japan’s MEMS industry.
MEMS has already been incorporated as a practicaltechnology in numerous products, including such recognizabledevices as airbag sensors for automobiles, print heads,
controllers for game consoles, and image stabilizers for digital
cameras, and many more applications are anticipated. Further,as illustrated in the following graph, the types of companies
making up the MEMS industry are expanding into diverse
sectors of business.
200

187

Note: the no. of companies is cumulative
180

fabrication

160
20

120

806320■ Precision instruments

equipment

Electrical devices
73954

131717 Mechanical devices

3402000

2001■ Nonferrous metals

17202002

2003

62004

■ Steel■ Ceramics

1219■ Electrical devices■ Mechanical devices

6444392884

1315172005

2006

2007

2006 (Istanbul, Turkey)
2007 (Kobe, Japan)
2008 (Tucson, Arizona (U.S.))2009 (Sorrento, Italy)
2010 (Hong Kong)

120■ Transportation

1260
40

17
1594

100

140

communications

140120■ Information/Presentation number

No. of companies

Precision instruments■ Other■ Miscellaneous

161
142

In the second half of the FY 2009 survey of technologicaltrends at home or abroad, the Committee conducted a survey ofMEMS 2010 (the 23rd IEEE International Conference on MicroElectro Mechanical Systems). The 23rd conference was held inHong Kong on January 24–28 2010.
MEMS 2010 drew 885 abstract submissions, which is thelargest number in the history of the conference. By region,
Asian had the most submissions with 425, accounting for 48%,
or approximately half, of the total. From the submittedabstracts, 298 papers were accepted for an acceptance rate of34%. By region, North America had 130 papers accepted for anacceptance rate of 46%, Asia had 113 accepted for a rate of27%, and Europe had 55 accepted for a rate of 31%.
Fig. 1 shows the numbers of presentations by country overthe past five years. Of particular note are the sharp rise in
America’s number of presentations and the steady increase inpresentations from Taiwan and China.

■ Petroleum/rubber■ Chemicals

Japan’s MEMS industry is configured of a group of dominantcompanies that follow a vertical integration model, as opposedto the horizontal division of labor employed in overseas groups,
such as STMicroelectronics and foundries for analog devices
and MEMS. Japan’s model is less efficient because its
technology, expertise, and facilities are scattered, and Japandoes not conduct sufficient activities aimed at market
penetration and growth for MEMS devices. Thus, in terms of
cost competitiveness, which will be an important factor in thefuture of industrial competitiveness, Japan’s model may beinferior to that used overseas.
To strengthen the MEMS industry in Japan, we must
effectively utilize our technology, expertise, and facilities
through collaboration between public institutions andbusinesses. It would also be ideal to have activities
choreographed by industry and public institutions to facilitate
Japan in changing its focus from technological and applied
development through standardization to market growth andmass production.

10080604020U.
J a S.
pTa a nGe iwarm nanKo yreNeath Chi
Sw erla naitz nder s
Be landlgiC um
Si anang daap
Sw oreeden
UKF
Ho ran
ng ce
Kon
Is gr
Ire aellandItAu aly
De stri
nm aarEg kyp
In t
dia0Fig. 1 Number of presentations by country over the past five years
Fig. 2 shows the numbers of presentations broken down byspecific technological field. As can be seen in the graph, thethree most popular fields were fabrication technologies (nonsilicon), fluidic, and mechanical sensors.
807060504030
20Features of Japan's MEMS industry Commonalities in successful cases

Challenges for the MEMS industry in Japan
Effectively utilize MEMS technology, facilities, and expertise scattered throughout Japan(horizontal collaboration)
Market penetration and growth for MEMS (change in focus)

OthersTechnologies outside
the above categories

Power-MEMS

OpticalRF-MEMES

Cells & Subcellularcomponents
Tissue/Organ & MedicalApplications

Fluidic

OthersBiomacromolecules

Cost competitiveness for individual devices

Radiation/Material
Substance Sensor

Japan's weakness

Mechanical Sensor

Japan's strengths
Develop devices incorporating thecustomer's wishes and develop a wide
range of applications

Material

0

System for market penetration andgrowth

Actuators

10

Develop highly discriminating MEMS
devices meeting the user's expectations

Design and Modeling

In addition to technological competitiveness,cost competitiveness will become
increasingly important

Large manufacturers of consumer
electronics drive MEMS development
through vertical integration
Japan lags behind in MEMS foundries
that support a horizontal division of labor

Packaging Technologies

Consumer electronics is an area offuture growth

Fabrication
Technologies(Silicon)
Fabrication
Technologies(non-Silicon)

MEMS market

1-1 1-2 1-3 1-4 1-5 1-6 1-7 2-1 2-2 2-3 2-4 2-5 2-6 2-7 2-8 2-9 2-10 3-1

Fig. 2 Numbers of presentations broken down by field2