April 30 (Tuesday)
17:00 - 19:00
May 1 (Wednesday)
8:30 - 9:00

REGISTRATION and reception in the Golden Tulip Hotel

REGISTRATION AT VENUE
Maastricht Conference and Exhibition Centre (MECC)(located next to Golden Tulip Hotel)

8:48 - 9:00
Opening Remarks:

OPENING
Prof. Albert van den Berg, University of Twente

9:00 - 12:30

Session 1:

9:00 - 9:12
9:12 - 9:24
9:24 - 9:36

USAUKTaiwan

9:36 - 9:48
9:48 -10:00

Switzerland
Singapore

10:00 -10:12

Nordic10:12 -10:24

Mediterranean

10:24 -10:36

Korea

10:36 –11:00

Country/Region Review (including government
policy, education and efforts of standardization
Dr. Michael Gaitan, NIST
Geoff Beardmore, Myriad-Technology, Cheltenham
MEMS in Taiwan: Year 2002 Status
Prof. Chih-Kung Lee, National Taiwan University,Taipei
Nico de Rooij, IMT, University of Neuchatel
MEMS in Singapore: Year 2001-2002 Status,
Siak Piang Lim, National University of Singapore
Sami Franssila, Helsinki University of Technology,
Finnland
Paolo Dario, MiTech Lab, Scuola SuperioreSant’Anna, Pisa, Italy“National Nanotechnology Programs in Korea”
Young-Ho Cho, KAIST, Taejon

Coffee11:00 -11:12

Japan

11:12 -11:24

Germany

11:24-11:36

France11:36 -11:48

China

11:48-12:00

Canada12:00 -12:12

Benelux

12:12 -12:24

Australia

12:30 -14:00

Lunch

Mr. Takayuki Hirano
Executive Director, Micromachine Center, TokyoJan Korvink, IMTEK, Albert-Ludwig University,
Freiburg (cancelled, speaker not present)
Emmanuel Bigler, Institut des Microtechniques deFranche-Comte, Besancon
MEMS development in China
Zhaoying Zhou, Tsinghua University, Beijing
Canadian Research, Technology, and ProductInterests in Micromachining: An Update,
Dan Gale, Canadian Microelectronics Corporation,
Queen’s University, Kingston
Albert van den Berg, MESA+, University of Twente,Enschede, The Netherlands
Ian Bates, RMIT University, Melbourne

Session 2:

14:00 - 15:30
20 min2min
20 min2min
20 min2min
20 min2min

Fundamental Science and Technology ofNanotechnology“The National R & D Strategy of Nanotechnology in Japan” by Prof.
Naomasa Nakajima, The University of the Air, Japan.
Discussion/Questions“Advanced Functional Materials Bridge the Nanotechnology-MST Divide”
by D.M.Allen, S.Dunn, P.Kirby and R.W.Whatmore, School of Industrial andManufacturing Science, Cranfield University, Bedford MK43 0AL, UK.
Discussion/Questions“From ULSI to Microsystems and Nanotechnology” by G. Borghs, IMEC,Leuven, Belgium
Discussion/Questions“An Overview of Canada's National Institute for Nanotechnology” by
Dr. T. Jackman
Discussion/Questions

15:30 – 16:00

Coffee16:00 - 17:06

Session 3:

Nanotechnology (continue)

20 min“Impact of nanotechnology on micromachines: a NTU Experience andPerspective” (Author: Prof. Shuo-Hung Chang, Dr. Ming Shyong Lin, Prof.
Chih-Kung Lee),
2min Discussion/Questions
20 min“Nanotechnology in Australia”, Dr Chaffey
2min Discussion/Questions
20 min“Analysis of European activities in the semiconductor and MEMS fields” by
JC Eloy, Yole Développement, France(“MINATEC, a major French initiative in research and technology transfer
for micro and nanotechnologies”, by C. Axelrad, CEA, France, presented in
Session 7)
2min Discussion/Questions
17:10 - 17:50

Session 4:Technology Transfer

18 min“MEMs Facility at the Canadian Light Source (CLS) Synchrotron”, byDr. David M. Klymyshyn, University of Saskatchewan and TRLabs
Canada2min Questions
18 min“MEMS in a Si IC Environment” by Raffaella Borzi
2min Questions

18:15

Departure to “Château Neercanne”

19:00

BanquetMay 2 (Thursday)
9:00 - 10:40

18 min
2 min
18min
2 min
18 min2 min
18 min2 min
18 min2 min

Session 5:“Industrial Strategy on Micromachine Development” by Mr. Toshiro
Shimoyama, Director, Supreme Advisor, OLYMPUS OPTICAL CO., LTD.
Questions“Micromachine Strategy in Automotive Industry” by Dr. Kunihiko Hara
Director of R & D, Board Members, DENSO CORPORATION.
Questions“Agro-alimentary applications of Microsystems in Spain”, Carles Cane,Centro Nacional Microelectronica (CNM)
Questions“Physical Characterization of foundry fabricated scratch drive
actuators” by Prof Deepak Uttamchandani, Microsystems Group,
Department of Electronic and Electrical Engineering, University ofStrathclyde, 204 George Street, Glasgow, Scotland, United Kingdom, G1
1XWQuestions“Research & development of Microactuators” by Prof. Beingchu Cai,
Shanghai Jiao Tang University, China
Questions

10:40 - 11:10

Coffee11:10 - 12:10

Session 618 min
18 min18 minStrategies, new applications and technical aspects ofmicromachines

Micromachine applications in Chemistry
and Biochemistry Lab-on-chip, Medical Devices andDiagnostics“Micro-Technologies and Health Care” by Claude Clément
2 min Questions“The Biochip and Microfluidic Applications and Market”, by JC Eloy,Yole Développement, France (cancelled, speaker not present)
2 min Questions“Micro Biomedical Diagnostic System for Endoscopic Microcapsule” by
Jong-Oh PARK, Intelligent Microsystem Center, Seoul, Korea
2 min Questions

12:10 – 14:00Lunch14:00 - 15:40
18 min18 min18 min18 min18 min“MEMSCAP : leader in MEMS-based innovative solutions”
by G. Menozzi, Memscap, France
2 min Questions“Applications of MEMS in Biotechnology, Automation, Semiconductor,Information Technology, and Communication - Taiwan Perspective” by
Prof. Fon-Shan Huang Yeh, National Tsing-Hua University, Hsinchu, Taiwan(presented by Prof. Chih-Kung Lee)
2 min Questions“MINATEC, a major French initiative in research and technology
transfer for micro and nanotechnologies”, by C. Axelrad, CEA, France.
(“Analysis of European activities in the semiconductor and MEMS
fields” by JC Eloy, Yole Développement, France, presented in session 2)
2 min Questions“MEMS Industrialization : Current Issues and Future Perspective” bySuk-Han LEE, Korea
2 min Questions“Effort for MEMS Industrialization in KOTEL, Inc”, by Prof. Wendong
Zhang, China
2 min Questions

15:40 – 16:20
18 min18 minSession 7 Industrial Infrastructure

Session 8:

Future Outlook

Microsystems and Micro@Nano-Technologies in Framework
Programme 6-IST: “Go small, think big” by D. Beernaert
2 min Questions“NEXUS & EURIMUS : their role in the future 6FWP-Part 1/Part 2”,
by G. Menozzi, Memscap
2 min Questions

16:20 -16:45

Overall Discussion
Chairman’s Summary and Closing of the Sessions

16:45

Departure to “Rederij Stiphout”

17:00 - 21:30

Dinner cruise on the River Maas

May 3 (Friday)

Technical Tour to IMEC/MESA+

9:30

Departure to Leuven (IMEC)/ Enschede (MESA+)

approx. 16:30

End of official Program