Members' Profiles

Moritex Corporation
Moritex Corporation is developing projects indiverse fields, including fiber optic illumination,
imaging, optical communications, bioscience, and newmaterials, based on such technologies as fiber optics,
machine vision, automatic alignment of opticaldevices, bio-instrument automation, spheres, opticallenses, and software.
Moritex's involvement in the field of micromachines
began shortly after its foundation when it began
importing and selling microspheres manufactured byDuke Scientific Corporation. Ten years ago, Moritex
joined forces with the Research Development
Corporation of Japan (presently the Japan Science andTechnology Corporation) to develop laser tweezers
called a laser manipulator that uses optical radiationpressure. In 1998 Moritex participated in a photon
control project for studying the measurement andprocessing of submicroscopic matter using light andbegan conducting research on optical fiber probes forobserving near-field optics around objects in highresolution, on the nano-meter order.
In October 2000, we began forming alliances withdomestic and overseas manufacturers having theirown processing technologies through commissioned
production and sales of microstructure parts. Ourcompany focused on processing using X-ray deep
lithography as a departure from semiconductor
fabrication. This technology is called a LIGA process.
A feature of the LIGA process is its capability for
manufacturing three-dimensional parts with a highaspect ratio using X-rays. This technology is one of themost anticipated for future micromachining because of
its high precision processing capacity, including
minimum dimensions on the order of submicrons andmaximum dimensions of several ten micrometer orgreater. Many of the processes performed by X-ray
deep lithography are described below.

Yukoh Morito
President and CEO

molding processes and mass-produce (tens ofthousands per month) PMMA (resist material)
microparts at a low cost.
In addition to the LIGA process, Moritex sells
microparts produced by the TIEGA process. This is a
micromachining process that effectively uses radiation
etching of Teflon (PTFE), which has a particularlyhigh processing rate.
Moritex has already begun sales of LIGAmicrospectrometers in conjunction with Germany's
Microparts Co. The microspectrometers incorporate adiffraction grating produced through the LIGA
process. Developments in our business have been
focused on manufacturers of colorimeters, liquiddensitometers, thin film measuring instruments, andthe like. Currently we are engaged in research on
molding technologies for ultrafine nonreflective
constructions and glass chip microfabrication
technology, and are undertaking commissioned
production of micromachined components, including
optical switches and VOA (variable opticalattenuators), which are key devices for DWDM
networks. Future plans call for assembling production
equipment to develop our own products, including
optical elements, microprisms, and lens arrays.

1) Processing resist material by lithography using an
X-ray light source obtained by synchrotron
radiation (SR)2) Producing dies by electroforming (electroplating)3) Processing microparts formed of various materials
by precision molding (plastic molding)Self light-harvesting diffraction grating(d=0.2µm, g=2µm)

Synchrotron radiation is an electromagnetic wave
emitted when the paths of electrons accelerated near
the speed of light by a synchrotron accelerator bend.
The wavelength of synchrotron radiation spans fromvisible light to the X-ray region and is noted for a highbrightness and sharp directivity comparable to laserlight. Moritex uses small SR rings developed forindustrial use as short electron path rings in theproduction of microparts. Use of these small SR rings
allows us to eliminate the electroforming and precision

Incident light froman optical fiber
Outgoing light fromthe diffraction end

Array of diodes

Fig. 1 LIGA-microspectrometer7