Vol. 48, No. 202
2009. 1

◆特集：マイクロ・ナノの計測技術◆

http://www.htsj.or.jp/heat-page.html
Ni

YSZ

Pore

Ni

YSZ

Pore

SEM-EDX↹௝ 䋨౒ᴉᴺ☸ሶ䈎䉌૞ᚑ䈘䉏䈢Άᢱᭂ䋩 SEM-EDX↹௝ 䋨ᷙวᴺ☸ሶ䈎䉌૞ᚑ䈘䉏䈢Άᢱᭂ䋩⏕₸⊛ౣ᭴▽
ਃᰴర᭴ㅧ䋨౒ᴉᴺ䋩⏕₸⊛ౣ᭴▽
ਃᰴర᭴ㅧ䋨ᷙวᴺ䋩࿕૕㉄ൻ‛ᒻΆᢱ㔚ᳰ㧔51(%㧕ߩΆᢱᭂᓸ⚦᭴ㅧ
Anode Microstructure of Solid Oxide Fuel Cell㣮࿦⋥Პ㧔᧲੩ᄢቇ㧕Naoki SHIKAZONO (The University of Tokyo)
shika@feslab.t.u-tokyo.ac.jp
࿕૕㉄ൻ‛ᒻΆᢱ㔚ᳰ㧔SOFC㧕ߩΆᢱᭂߪ㧘ࠗࠝࡦዉ㔚ᕈࠍ᦭ߔࠆ㔚⸃⾰㧔YSZ㧕ߣ㔚ሶዉ㔚ᕈࠍ᦭ߔ
ࠆ㊄ዻ㧔Ni㧕߇ᷙวߐࠇߚᄙሹ⾰૕ߢߔ㧚㔚⸃⾰/㊄ዻ/ⓨ㓗ߩਃ⋧߇੤ࠊࠅ㔚᳇ൻቇ෻ᔕ߇ᵴ⊒ߦⴕࠊࠇࠆਃ⋧⇇㕙ߩ㊂߿㧘ฦ⋧ߩㅪ⚿ᕈ㧔ዉ㔚ᕈ㧕ߦࠃߞߡߘߩᕈ⢻߇ᄢ߈ߊᓇ㗀ߐࠇ߹ߔ㧚߹ߚ㐳ᦼߩ㜞᷷ㆇォߢߪ㧘☸ሶߩ὾⚿߿૕Ⓧᄌൻߦࠃߞߡᕈ⢻߇ഠൻߔࠆߩߢ㧘ᕈ⢻ߣߣ߽ߦ⠴ਭᕈߩ㜞޿᭴ㅧߩឭ᩺߇ᦸ
߹ࠇߡ޿߹ߔ㧚ᧄ↹௝ߪΆᢱᭂߩ SEM-EDX ௝ߣ㧘ߘߩ 2 ᰴర↹௝ࠍ߽ߣߦ⏕₸⊛ߦౣ᭴▽ߒߚ 3 ᰴర᭴ㅧߢߔ㧚Ꮐ߇౒ᴉᴺߦࠃࠆේᢱ☳૕ࠍ↪޿ߡ૞ᚑߒߚΆᢱᭂ㧘ฝ߇ NiO ߣ YSZ ࠍᯏ᪾⊛ߦᷙวߒߚ☸ሶ߆ࠄ૞ᚑߐࠇߚΆᢱᭂߢߔ㧚ߎߩࠃ߁ߥ 3 ᰴరᓸ⚦᭴ㅧߢߩࠟࠬ㧘ࠗࠝࡦ㧘㔚ሶߩャㅍߣ㔚᳇ൻቇ෻ᔕߣ
ࠍㅪ┙ߔࠆߎߣߢ㧘㔚ᭂㆊ㔚࿶ࠍᢙ୯੍᷹ߔࠆߎߣ߇ߢ߈߹ߔ㧚ㆊ㔚࿶੍᷹ࠪࡒࡘ࡟࡯࡚ࠪࡦߦࠃߞߡ
SOFC 㔚ᭂ⸳⸘ߩ㜞ᐲൻ߇ታ⃻ߢ߈ࠆ߽ߩߣᦼᓙߐࠇ߹ߔ㧚ᧄ↹௝૞ᚑߦߪ㧘ర᧲੩ᄢቇᄢቇ㒮ቇ↢ߩጊญᖘ᳁㧘㋈ᳯ␽ౖ᳁㧘ဈᧄ㓶␭᳁㧘⃻᧲੩ᄢቇᄢቇ㒮ቇ↢ߩ㜞ᧁ♿๺᳁ߦදജ㗂߈߹ߒߚ㧚߹ߚ㧘࠮࡞⵾૞ߦߪ㧘AGC ࠮ࠗࡒࠤࡒࠞ࡞ᩣᑼળ␠㧘ᩣᑼળ␠ⅣႺ࠮࡜
ࡒ࠶ࠢࠬ࡝ࠨ࡯࠴ߦදജ㗂߈߹ߒߚ㧚⸥ߒߡ⻢ᗧࠍ⴫ߒ߹ߔ㧚વᾲ 2009 ᐕ 1 ᦬

J. HTSJ, Vol. 48, No. 202

Vol.48

2009

No.202Januaryવ  ᾲ⋡ ᰴ‫․ޛ‬㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ‫ޜ‬࠽ࡁࡔ࡯࠻࡞㧘࠽ࡁࠣ࡜ࡓ㧘࠽ࡁࡢ࠶࠻ߩᾲ⸘᷹
················································································ ਛ೎ᐭ ୃ㧔᣿ᴦᄢቇ㧕··············1
MEMS વᾲ㕙ࠍ↪޿ߚᴣ㛛ᯏ᭴ߩ⸃᣿
·····································································ਤਅ ቇ㧔↥ᬺᛛⴚ✚ว⎇ⓥᚲ㧕··············8
శ MEMS ࠍ↪޿ߚࡑࠗࠢࡠᾲ‛ᕈ࠮ࡦࠨ࡯
·······························································↰ญ⦟ᐢ㧘㐳ဈ㓶ᰴ㧔ᘮᙥ⟵Ⴖᄢቇ㧕············ 14࠽ࡁ᧚ᢱߩᾲ‛ᕈ⸘᷹························································㜞ᯅෘผ㧔਻Ꮊᄢቇ㧕㧘⮮੗਍ᄦ㧔↥✚⎇㧕············ 20‫࠻ࠢࠚࠫࡠࡊޛ‬㧽‫ޜ‬‫ࠬ࡟ࡊࡦࡐޟ‬᳓಄ࠪࠬ࠹ࡓߩ㐿⊒‫ޠ‬·····································································৻ᴺᏧ⨃ବ㧔ਃ⪉㔚ᯏᩣᑼળ␠㧕············ 26‫ޛ‬ળ⼏ႎ๔‫ޜ‬‫ ࡓ࠙ࠫࡐࡦࠪ࡮࡯ࠡ࡞ࡀࠛ࡮࠭࠶ࠠޟ‬2008‫ߩޠ‬ႎ๔························································· ਛㇱਥᢘ㧔ታⴕᆔຬળᆔຬ㐳㧘੩ㇺᄢቇ㧕············ 31‫ޛ‬Ꮞ㗡ࠣ࡜ࡆࠕ㧦heat-page‫ޜ‬࿕૕㉄ൻ‛ᒻΆᢱ㔚ᳰ㧔SOFC㧕ߩΆᢱᭂᓸ⚦᭴ㅧ··················································································· 㣮࿦⋥Პ㧔᧲੩ᄢቇ㧕······ ⴫⚕ⵣ‫ⴕޛ‬੐ࠞ࡟ࡦ࠳࡯‫ ······································································································ ޜ‬37‫߅ޛ‬⍮ࠄߖ‫ޜ‬ฬ★⊒ⴕߦઍࠊࠆᖱႎᬌ⚝ࠪࠬ࠹ࡓߩዉ౉ߦߟ޿ߡ㧔ળ๔㧕················································· 38╙ 46 ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓ⻠Ṷ⺰ᢥ൐㓸 ······································································ 40੐ോዪ߆ࠄߩㅪ⛊ ········································································································ 45✬㓸಴ㇱળࡁ࡯࠻ ····································································································· 50

Vol. 48㧘No. 202㧘January 2009
CONTENTS
㧨Special Issue㧪
Nano-meter, nano-gram, nano-watto in thermal measurement
Osamu NAKABEPPU (Meiji University) ·····················································································1
Boiling on MEMS heat transfer surfaces
Manabu TANGE (AIST) ··············································································································8Micro Thermophysical Properties Sensor using Optical MEMS
Yoshihiro TAGUCHI, Yuji NAGASAKA (Keio University) ························································14
Measuring Thermal Property of Nano Materials
Koji TAKAHASHI (Kyushu University), Motoo FUJII (AIST) ···················································20

㧨Project Q㧪
Development of a Pump-less Water Cooling System
Shigetoshi IPPOUSHI (Mitsubishi Electric co. Ltd.) ···································································26

㧨Report㧪
Report on ‘Kids Energy Symposium, 2008’
Kazuyoshi NAKABE (Chair of the Kids Energy Symp. Committee, Kyoto University) ···············31

㧨Opening-page Gravure: heat-page㧪
Anode Microstructure of Solid Oxide Fuel Cell
Naoki SHIKAZONO (The University of Tokyo) ······················································· Opening Page

㧨Calendar㧪 ·······················································································································································37
㧨Announcements㧪 ··········································································································································38

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ

࠽ࡁࡔ࡯࠻࡞㧘࠽ࡁࠣ࡜ࡓ㧘࠽ࡁࡢ࠶࠻ߩᾲ⸘᷹
Nano-meter, nano-gram, nano-watto in thermal measurementਛ೎ᐭ ୃ㧔᣿ᴦᄢቇ㧕
Osamu NAKABEPPU (Meiji University)e-mail: onakabep@isc.meiji.ac.jpߪߓ߼ߦ
ᧄⓂߢߪ㧘․㓸‫⸘ߩࡁ࠽࡮ࡠࠢࠗࡑޟ‬᷹ᛛⴚ‫ޠ‬ߦ㓙ߒ㧘⪺⠪߇ㅴ߼ߡ޿ࠆ࠽ࡁ࠹ࠢࡁࡠࠫ࡯ࠍ↪
޿ߚ᷷ᐲ࡮ᾲ㧘‛ᕈ⸘᷹ᛛⴚࠍ⚫੺ߔࠆ㧚࠲ࠗ࠻࡞ߪ㧘⿛ᩏဳᾲ㗼ᓸ㏜㐿⊒ߢ⋡ᜰߒߡ޿ࠆ࠽ࡁࡔ࡯࠻࡞ⓨ㑆ಽ⸃⢻ࠍᜬߟ᷷ᐲ࡮ᾲવዉ₸⸘᷹㧘࠴࠶ࡊࠞࡠ࡝ࡔ࠻࡝㧔࠽ࡁࠞࡠ࡝ࡔ࠻࡝㧕߇ኻ⽎ߣߔࠆ࠽ࡁࠣ࡜ࡓ⹜ᢱߩᾲಽᨆ㧘㜞ᗵᐲࠨ࡯ࡕࡄࠗ
࡞ࠍ↪޿ߚࡃࠗࠝࠞࡠ࡝ࡔ࠻࡝ߦ߅ߌࠆ↢૕⹜ᢱߩ࠽ࡁࡢ࠶࠻࡟ࡌ࡞ઍ⻢ᾲ⸘᷹ࠍᗧ࿑ߒߡ޿ࠆ㧚⚫੺ߔࠆ᷷ᐲ࡮ᾲ⸘᷹ᛛⴚߪ㧘ඨዉ૕ᓸ⚦ടᎿᛛⴚߢ૞ࠄࠇࠆ⭯⤑ᾲ㔚ኻ㧘⭯⤑᷹᷷ᛶ᛫૕㧘ࠞࡦ࠴࡟ࡃ࡯߿ࡔࡦࡉ࡟ࡦ᭴ㅧߦၮ޿ߡ޿ࠆ㧚޿ࠊࠁࠆࡑࠗࠢࡠࡑࠪࡦᛛⴚ߿ MEMS (Micro Electro
Mechanical Systems) ᛛⴚࠍㆡ↪ߒ㧘㜞ᕈ⢻ൻߒߚ࠮ࡦࠪࡦࠣᛛⴚߩน⢻ᕈࠍ⚫੺ߔࠆ㧚╩⠪ࠄߪ 1990 ᐕઍ߆ࠄ⿒ᄖ✢᷷ᐲ⸘᷹ߩ㒢⇇ࠍ⿥߃㧘࠽ࡁࠬࠤ࡯࡞ߩ᷷ᐲ⸘᷹߇น⢻ߥ⿛ᩏဳᾲ㗼ᓸ㏜ߩ㐿⊒⎇ⓥࠍⴕߞߡ޿ࠆ߇㧘ᓸ⚦ടᎿᛛⴚࠍዉ౉ߒߡ㧘ᓸዊߢ㜞ᗵᐲ㧘㜞㓸Ⓧൻ߇น⢻ߥࡊࡠ࡯ࡉ㐿⊒߇น⢻ߣߥࠅ㧘࠽ࡁࠬࠤ࡯࡞ߢᱜ⏕ߦ᷷ᐲ߿ᾲવዉ₸ࠍ⸘᷹ߔࠆᛛⴚ㐿⊒߇น⢻ߣߥߞߡ߈ߚ[1,2]㧚
⢻േ᷷ᐲ⸘᷹ᴺ
ࠞࡦ࠴࡟ࡃ࡯వ┵ㇱߦන⚐ߦ᷷ᐲ࠮ࡦࠨࠍ⸳⟎ߒߡ⹜ᢱߩ᷷ᐲࠍ⸘᷹ߔࠆฃേ⸘᷹ᴺߢߪ㧘⸘᷹ߐࠇࠆ᷷ᐲߪ㧘⹜ᢱ߆ࠄ࠽ࡁࠬࠤ࡯࡞ߩធ⸅ㇱࠍ੺ߒߡવࠊࠆᾲᵹ㊂ࠍ෻ᤋߒߚ߽ߩߣߥࠆ㧚ߎߩߚ߼㧘ធ⸅⁁ᘒ߿⹜ᢱߩᾲવዉ₸ߢ⸘᷹᷷ᐲߪᄢ
߈ߊᄌൻߒ㧘1 ࡒࠢࡠࡦ⒟ᐲߩᾲ㔚ኻធὐࠍవ┵ㇱߦᒻᚑߒߡ߽㧘ធ⸅ㇱࠃࠅ߽᦭ᗧߦૐ޿ഀวߩ
᷷ᐲߒ߆⸘᷹ߔࠆߎߣߪߢ߈ߥ޿㧚ฃേ᷷ᐲ⸘᷹ᴺߩᰳὐࠍ⵬߁ߚ߼㧘╩⠪ࠄߪ⢻േ᷷ᐲ⸘᷹ᴺࠍ㐿⊒ߒߚ㧚⢻േᴺߢߪ㧘ធ⸅ߒߚࡊࡠ࡯ࡉߦᵹࠇࠆᾲᵹࠍᬌ಴ߒ㧘ߎࠇߦᲧ଀ߒߚ
⊒ᾲࠍࡊࡠ࡯ࡉߦਈ߃㧘ࡊࡠ࡯ࡉ᷷ᐲࠍᏱߦធ⸅
ㇱ᷷ᐲߦ৻⥌ߐߖࠆᾲࡈࠖ࡯࠼ࡃ࠶ࠢ೙ᓮࠍⴕ޿㧘ࡊࡠ࡯ࡉ᷷ᐲࠍ⸘᷹ߔࠆ߽ߩߢ޽ࠆ㧚ࡊࡠ࡯ࡉߣ
⹜ᢱ߇หߓ᷷ᐲߦ޽ࠇ߫㧘ᾲᵹߪ࠯ࡠߣߥࠅ㧘᦭㒢ߥᾲᛶ᛫ߢਔ⠪߇ߟߥ߇ߞߡ޿ࠆ㒢ࠅ㧘ᱜߒ޿᷷ᐲ߇⸘᷹ߐࠇࠆߎߣߦߥࠆ㧚࠽ࡁⓨ㑆ಽ⸃⢻᷷ᐲ࡮ᾲ‛ᕈ⸘᷹
SThM
SThM 㧔 ⿛ ᩏ ဳ ᾲ 㗼 ᓸ ㏜ 㧘 Scanning Thermal
Microscope㧕ߪ㧘࿑ 1 ߩࠃ߁ߦ㧘AFM㧔ේሶ㑆ജ㗼ᓸ㏜, Atomic Force Microscope㧕ߩࠞࡦ࠴࡟ࡃ࡯㧔 ᜬߜ᪞㧕ࡊࡠ࡯ࡉߦ᷷ᐲ߿ᾲߩ⸘᷹ᯏ⢻ࠍઃടߒ㧘ߎߩࡊࡠ࡯ࡉߢ⹜ᢱ⴫㕙ࠍ⿛ᩏߒ㧘࠽ࡁࠬࠤ࡯࡞ߢߩᒻ⁁ߣ᷷ᐲ߿ᾲ‛ᕈ↹௝⸘᷹ࠍⴕ߁㗼
ᓸ㏜ߢ޽ࠆ㧚

(a)active thermometry.
Fig. 1

Fig. 2 SThM cantilever probes

Basic concept of SThM based on AFM

વᾲ 2009 ᐕ 1 ᦬(b) thermal conductivity meas.

-1-

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
ߥᚻᴺߦ⋡ಣࠍߟߌߡ޿ࠆ㧚 ⸘᷹ᴺߩᮨᑼ࿑ࠍ࿑ 4 ߦ␜ߔ߇㧘ߎߩᣇᴺߢߪ㧘᷷ᐲ Ts ߩ⹜ᢱߦ᷷ᐲ Tp ߩᥦ߼ߚࡊࡠ࡯ࡉࠍធ⸅
ߐߖ㧘ࡊࡠ࡯ࡉ߆ࠄ⹜ᢱ߳ᵹࠇࠆᾲᵹ Qps ࠍ⸘᷹ߔࠆ㧚ធ⸅ᾲࠦࡦ࠳ࠢ࠲ࡦࠬ Hc=Qps/(Tp-Ts)ߪ㧘ࡊ
ࡠ࡯ࡉߩ․ᕈ㧘⹜ᢱߩᾲવዉ₸ᖱႎߩ߶߆㧘ធ⸅᧦ઙࠍ฽߻ߚ߼㧘ቯᕈ⊛ߥᾲવዉᕈߣߥࠅ㧘ߎߎ߆ࠄ⹜ᢱߩዪᚲᾲવዉ₸ࠍ᳿ቯߔࠆߎߣߪ಴᧪ߥ
޿㧚ߘߎߢ㧘ធ⸅⇇㕙ߩ᷷ᐲ Tc ࠍ⸘᷹ߒ㧘ធ⸅ඨᓘ rc ߇․ቯߐࠇߚ⁁ᘒߢ⹜ᢱ஥ߩᾲᛶ᛫ Rs ߆ࠄធ⸅ㇱㄭறߩዪᚲᾲવዉ₸Os ࠍዉ಴ߔࠆ㧚ߎࠇࠍታⴕߔࠆߚ߼㧘⹜ᢱ⴫㕙ߦ㊄⭯⤑ࠍ⫳⌕ߒ㧘ࡊࡠ࡯ࡉ஥ߩ⇣⒳㊄ዻ⭯⤑ߣߢ᭴ᚑߔࠆធ⸅ဳߩᾲ㔚ኻߢធ⸅᷷ᐲࠍ⸘᷹ߔࠆߎߣߣߒߚ㧚ߚߛߒ㧘10nm⒟ᐲߩ㊄⭯⤑ߩෘߐߪធ⸅ᓘߣࠦࡦࡄ࡜ߥࠝ࡯࠳
࡯ߢ޽ࠅ㧘㊄⭯⤑ߩᾲᛶ᛫ߪήⷞߢ߈ߥ޿㧚ߘߎߢ㧘ඨή㒢⹜ᢱߦ㊄⭯⤑߇ࠦ࡯࠻ߐࠇߚ႐วߩᾲ
વዉ⸃ᨆ߆ࠄ㧘ㄭૃ⊛ߦ㧘ᰴᑼߢෳᾖ⹜ᢱ(s1)ߦ
ኻߒߡᧂ⍮⹜ᢱ(s2)ߩᾲવዉ₸߇ዉ಴ߐࠇࠆߎߣ
ࠍᓧߡ޿ࠆ[3]㧚

⢻േ᷷ᐲ⸘᷹ࠍታᣉߦߪ㧘ࠞࡦ࠴࡟ࡃ࡯਄ߦᾲ
ᵹ⸘᷹↪ߩࠨ࡯ࡕࡄࠗ࡞㧘᷷ᐲ⸘᷹↪ߩᾲ㔚ኻ㧘ࡊࡠ࡯ࡉടᾲ↪ߩࡅ࡯࠲ࠍ㓸Ⓧߔࠆᔅⷐ߇޽ࠅ㧘࿑ 2a ߦ␜ߔࠃ߁ߦ㧘ࡑࠗࠢࡠࡈࠔࡉ࡝ࠤ࡯࡚ࠪࡦ
ᛛⴚߢታ⃻ߐࠇߚ㧚߹ߚ㧘ࡊࡠ࡯ࡉ߇ធ⸅ㇱࠍ੺ߒߡ⹜ᢱߩ᷷ᐲᖱႎࠍᓧࠆߦߪ㧘๟࿐ߩⓨ᳇ߪ㇎㝷ߦߥࠆߚ߼㧘⸘᷹ߦߪ᭎ߨ 0.1Pa એਅߩ⌀ⓨⅣႺ߇ᔅⷐߢ޽ࠆ㧚࿑ 3 ߦߪ⢻േᴺߦࠃࠆ᷷ᐲ↹௝⸘᷹ߩ଀ࠍ␜ߔ㧚᏷ 5 ࡒࠢࡠࡦߩ㊄ዻࠬ࠻࡝࠶ࡊ߇ࠫࡘ࡯࡞⊒ᾲߒߡ޿ࠆ᭽ሶ߇ᒻ⁁ߣหᤨߦ⸘᷹ߐࠇߡ޿ࠆ㧚๟࿐ߪ㧘ᄢ᳇ࠍㅢߒߡߩ⹜ᢱ࡮ࡊࡠ࡯ࡉ㑆વᾲࠍήߊ
ߔߚ߼ 4 mPa ⒟ᐲߩ⌀ⓨⅣႺߣߒߡ޽ࠆ㧚⹜ᢱߩࡌ࡯᷷ࠬᐲߪ 29͠㧘⸘᷹ߐࠇߚ᷷ᐲߪ㧘㊄ዻࠬ࠻࡝࠶ࡊߩᛶ᛫ᄌൻ߆ࠄ᳞߼ߚ୯㧔46͠㧕ߣ⦟ߊ৻⥌ߒߡ޿ࠆ㧚
⢻േ᷷ᐲ⸘᷹ߢߪ㧘⹜ᢱߣࡊࡠ࡯ࡉߩធ⸅ࠬࠤ
࡯࡞ߪ⚂ 30nm ߣ⹏ଔߐࠇ㧘⌀ⓨⅣႺਛߢߩ᷷ᐲ⸘᷹ߩⓨ㑆ಽ⸃⢻߽ห⒟ᐲߣ್ᢿߢ߈ࠆ㧚߹ߚ㧘ࡊࡠ࡯ࡉߩᾲᔕ╵ᕈߪ 50Hz ⒟ᐲߢ޽ࠅ㧘ቯᏱ⊛ߥ᷷ᐲ႐⸘᷹ߦߪචಽߥㅦᐲࠍᜬߟ㧚ߐࠄߦ㧘᮸⢽߿ήᯏ‛߆ࠄ㊄ዻߩࠃ߁ߦᐢ޿ᾲવዉ₸ߩ᧚ᢱߦኻᔕߒ᷷ᐲ⸘᷹♖ᐲr1K ⒟ᐲߢታ᷷ᐲ߇⸘᷹
ߢ߈ࠆߚ߼㧘ᧄᚻᴺߪ࠽ࡁࠬࠤ࡯࡞ߩ᷷ᐲ⸘᷹ߦ
㕖Ᏹߦ᦭ലߥᚻᲑߢ޽ࠆ㧚

Fig. 3
strips.

Os 2
Os1

Rs1
exp ^2SO filmG film Rs1  Rs 2 ` ‫(ޓ‬1)
Rs 2

 ਄ᑼߪ㧘․ቯߩធ⸅ඨᓘ rc ߦߡ㧘ᾲવዉ₸Os1
ࠍᜬߟෳᾖ⹜ᢱߢߩ⸘᷹⚿ᨐߣᲧߴ㧘ᧂ⍮⹜ᢱߩᾲવዉ₸Os2 ࠍหߓធ⸅ඨᓘߢߩ⸘᷹⚿ᨐߣᲧセߒߡዉ಴ߔࠆ߽ߩߢ޽ࠆ㧚߹ߚ㧘⹜ᢱ஥ᾲᛶ᛫ Rs
ߩ⛘ኻ୯߇ᔅⷐߢ޽ࠅ㧘ߎࠇߪ㧘ᾲᵹߣ᷷ᐲ⸘᷹
ߦ㜞޿♖ᐲࠍⷐ᳞ߒߡ޿ࠆ㧚ട߃ߡ㧘⫳⌕ߐࠇߚ㊄⭯⤑ߩෘߐGfilm ߣᾲવዉ₸Ofilm ߩ࠺࡯࠲߇ᔅⷐ
ߢ޽ࠅ㧘✚ว⊛ߦ♖ᐲࠍ㜞߼ߡ޿ߊᔅⷐ߇޽ࠆ㧚

Topography and thermography of heated Crᾲવዉ₸⸘᷹ ‛ᕈ⸘᷹ߦ㑐ߒߡߪ㧘SThM ߢᱜ⏕ߥዪᚲᾲવ
ዉ₸ࠍ⸘᷹ߔࠆᣇᴺࠍ⎇ⓥߒߡ޿ࠆ㧚᷷ᐲߦ⢻േ
ᴺߣ޿߁⸃᳿╷߇޽ߞߚߩߦᲧߴ㧘ᾲવዉ₸ࠍᱜ⏕ߦ᷹ࠆߩߪ㔍ߒ޿૞ᬺߢ޽ࠆ㧚ᚒ‫ߪޘ‬㧘⹜ᢱߣࡊࡠ࡯ࡉߩធ⸅ㇱ᷷ᐲߣᾲࠦࡦ࠳ࠢ࠲ࡦࠬࠍᱜߒ
ߊ⸘᷹ߔࠆߎߣߢ⹜ᢱߩዪᚲᾲવዉ₸⸘᷹߇น⢻વᾲ 2009 ᐕ 1 ᦬

Fig. 4 Thermal conductivity measurement method-2-

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
ᛛⴚߩᔕ↪ߦࠃࠅ㧘ᾲಽᨆߩ਎⇇ࠍ᜛ᒛߐߖࠆ⎇ⓥࠍㅴ߼ߡ߈ߚ[5]㧚࿑ 6 ߦ㧘3 ⒳㘃ߩࠞࡦ࠴࡟ࡃ
࡯ဳࠞࡠ࡝ࡔ࡯࠲ࠍ␜ߔ㧚DTA ࠲ࠗࡊߪ㧘SiO2

 ߎࠇ߹ߢ࿑ 2b ߦ␜ߔᾲવዉ₸⸘᷹↪ࡊࡠ࡯ࡉࠍ㐿⊒ߒ㧘਄⸥ᚻᴺߩᬌ⸽ࠍㅴ߼ߡ޿ࠆ㧚ࡊࡠ࡯ࡉߦߪ㧘࿑ 2a ߩ᷷ᐲࡊࡠ࡯ࡉߦ޽ࠆᯏ⢻ߦട߃㧘వ┵ㇱߦធ⸅ᾲ㔚ኻ↪ߩ㔚ᭂࠍ⸳⟎ߒ㧘ࠨ࡯ࡕࡄࠗ࡞ߩ೨ᣇߦセᱜ↪ߩ⊕㊄ࡅ࡯࠲ࠍ⸳⟎ߒߡ޿ࠆ㧚ߎߩࡊࡠ࡯ࡉߢߪ㧘ࠨ࡯ࡕࡄࠗ࡞߿ᾲ㔚ኻߩセᱜ߇ࡊࡠ࡯ࡉౝߢߢ߈㧘వ┵ㇱߩ㊄ዻ⭯⤑ߪធ⸅ᾲ㔚ኻߣߒߡߩᯏ⢻ߦട߃㧘ធ⸅ᾲᛶ᛫ࠍૐᷫߔࠆ
૞↪߇޽ࠅ㧘⢻േ᷷ᐲ⸘᷹ࠍታᣉߒߚ႐วߩ♖ᐲะ਄߽ᦼᓙߐࠇࠆ߽ߩߣߥߞߡ޿ࠆ㧚ᱷᔨߥ߇ࠄ㧘⃻ᤨὐߢߪ㧘ᧄࡊࡠ࡯ࡉߢዪᚲᾲ
વዉ₸߇ᱜߒߊ⸘᷹ߐࠇࠆߎߣߪ߹ߛ⏕߆߼ࠄࠇߡ޿ߥ޿㧚㐳ߐ 260 ࡒࠢࡠࡦߩࡊࡠ࡯ࡉౝߦ㧘ߎߩࠃ߁ߦᄙᢙߩ࠺ࡃࠗࠬࠍ㓸Ⓧߒ㧘㜞ᗵᐲߦᱜ⏕ߥ⸘᷹ࠍߔࠆߎߣߢ㧘ࠨࡉࡒࠢࡠࡦⓨ㑆ಽ⸃⢻ߢߩዪᚲᾲવዉ₸⸘᷹߇ⴕ߃ࠆ߽ߩߣᦼᓙߒߡ޿ࠆ㧚࠽ࡁࠣ࡜ࡓ⹜ᢱߩᾲಽᨆ ᾲಽᨆ
ᾲಽᨆߣߪ㧘‛⾰ߩ᷷ᐲࠍ⺞▵ߐࠇߚࡊࡠࠣ࡜
ࡓߦᓥߞߡᄌൻߐߖߥ߇ࠄ㧘ߘߩ‛⾰ߩ޽ࠆ‛ℂ⊛ᕈ⾰ࠍ᷷ᐲ߹ߚߪᤨ㑆ߩ㑐ᢙߣߒߡ᷹ቯߔࠆ৻
ㅪߩᛛᴺߩ✚⒓ߢ޽ࠆ[4]㧚વᾲ߇ᾲャㅍࠍᛒ߁ߩ
ߦኻߒߡ㧘ᾲಽᨆߪᲧᾲߩ⸘᷹߆ࠄ‛⾰ߩ᜼േࠍ⺞ߴࠆᚻᴺߢ޽ࠆ㧚࿑ 5 ߦ␜ߔ DTA㧔Differential
Thermal Analysis, ␜Ꮕᾲಽᨆ㧕ߢߪ㧘ࡅ࡯࠻ࠪࡦ
ࠢ߆ࠄߩᾲવ㆐ߢ⹜ᢱ࠮࡞ߣෳᾖ࠮࡞ࠍቯㅦ᷷ᐲ
ᄌൻߐߖ㧘ਔ⠪ߩ᷷ᐲᏅ߆ࠄᲧᾲ߿⋧ォ⒖ᾲ╬ࠍ⺞ߴߡ޿ࠆ㧚ቯ㊂⊛ߦᾲ㊂ߩ಴౉ࠅࠍ⺞ߴࠆᎿᄦ߇ᣉߐࠇߚ DSC㧔Differential Scanning Calorimetry㧘␜Ꮕ⿛ᩏᾲ㊂⸘㧕߽ᐢߊ↪޿ࠄࠇߡ޿ࠆ㧚ࠞࡦ࠴࡟ࡃ࡯਄ߦవ┵ㄭߊ߆ࠄ᣹᷷↪ࡅ࡯࠲㧘ᾲ㔚ኻ㧘ᾲᵹ⸘᷹↪ࠨ࡯ࡕࡄࠗ࡞ࠍᜬߜ㧘㐳ߐ 230Pm㧘
ෘߐ⚂ 3Pm ߢ޽ࠆ㧚DTA ߢߪ㧘వ┵ㇱߦ⹜ᢱࠍタߖ㧘ࡅ࡯࠲ߩ⊒ᾲ㊂߇ᤨ㑆ߦᲧ଀ߒߡჇᷫߔࠆ
ࠃ߁ߦࡊࡠࠣ࡜ࡓߒ㧘ᾲ㔚ኻߢ᷷ᐲᄌൻࠍ⸘᷹ߔ
ࠆ㧚⹜ᢱ߇ߥ޿ⓨߩ⁁ᘒߢ࡝ࡈࠔ࡟ࡦࠬ࠺࡯࠲ࠍ
ขᓧߒ㧘⹜ᢱࠍタߖߡ߆ࠄหߓㅦᐲߢ᷷ᐲ⿛ᩏߒ㧘ࠨࡦࡊ࡞࠺࡯࠲ࠍขᓧߒ㧘PC ਄ߢਔ⠪ߩᏅࠍขࠅ㧘⹜ᢱߩ᜼േࠍ⺞ߴࠆ㧚
DSC ࠲ࠗࡊߪ㧘వ┵߆ࠄ᷷ᐲ⸘᷹↪ᾲ㔚ኻ㧘⵬ఘ↪ࡅ࡯࠲㧘ᾲᵹ⸘᷹↪ࠨ࡯ࡕࡄࠗ࡞㧘᷷ᐲ⿛ᩏ↪ࡅ࡯࠲ࠍ஻߃ߡ޿ࠆ㧚DSC ࡕ࡯࠼ߢߪ㧘ᩮరㄭߊߩࡅ࡯࠲ߢ᷷ᐲᄌൻࠍⴕ޿㧘⹜ᢱ߳ߩᾲߩ಴౉
ࠅࠍࠨ࡯ࡕࡄࠗ࡞ାภߢᬌ಴ߒ㧘ࡈࠖ࡯࠼ࡃ࠶ࠢ
࿁〝ࠍㅢߒߡవ┵ㇱߢ⵬ఘടᾲࠍⴕ߁㧚⚿ᨐߣߒߡ⋧ᄌൻߦࠃࠆẜᾲߩๆ⊒ᾲ߇޽ߞߡ߽㧘⹜ᢱ᷷ᐲߪ߶߷৻ቯߩㅦᐲߢ਄᣹࡮㒠ਅߒ㧘᷷ᐲߣ⵬ఘ
ടᾲ㊂ߩ㑐ଥ߇㧘‛⾰ߩๆ⊒ᾲ㧔Ყᾲ㧕ᖱႎߦߥࠆ㧚หߓᯏ⢻ࠍᜬߜ㧘᷷ᐲ⿛ᩏ↪ࡅ࡯࠲߹ߢߩ〒㔌ࠍ㐳ߊขߞߚ Long DSC ࠲ࠗࡊߪ㐳ߐ 460Pm㧘
⹜ᢱઃㄭߩ᷷ᐲಽᏓࠍဋ৻ൻߔࠆᡷ⦟ဳߢ޽ࠆ㧚(a) DTA type(b) DSC type (c) Long DSC typeFig. 6 Cantilever type nanocalorimeters.
Table 1

Specifications of the DTA cantilever.
W [msec]
Cp [PJ/K]

5.5

G [PW/K]

190

ST [PV/K]
SP=ST/G [V/W]

29
0.15

Noise in T.C. signal
Allowable temperature limit
Max. heating and cooling rate

Vnoise [PV]Tlimit [°C]
Imax [K/sec]

5>400
14,000Heat capacity resolution
Enthalpy resolution
Power resolution'Cmin [nJ/K]'Hmin [nJ]'Pmin [PW]

0.22
180
33

Thermal time constantFig. 5 DTA (Differential Thermal Analysis) ࠞࡦ࠴࡟ࡃ࡯ဳࠞࡠ࡝ࡔ࡯࠲
⪺⠪ࠄߪ೨ㅀߩ SThM ߩࡊࡠ࡯ࡉ⵾૞ࡁ࠙ࡂ࠙
߿ߘߩᕈ⢻߆ࠄ㧘ࠞࡦ࠴࡟ࡃ࡯⁁ߩᾲಽᨆ↪ࠞࡠ࡝ࡔ࡯࠲㧔ᾲ㊂⸘㧕ࠍ⵾૞ߒ㧘ᾲಽᨆ߳ߩ MEMSવᾲ 2009 ᐕ 1 ᦬-3-Heat capacity of cantilever
Thermal conductance toambient
Thermoelectric power
Sensitivity

1.0

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
ടᾲᤨߦߪਅะ߈ߩⲢ⸃ࡇ࡯ࠢ߇⃻ࠇࠆ߇㧘ࡇ࡯ࠢߪ⿛ᩏㅦᐲǾ>2000K/s ߢ᣿⏕ߦⷰኤߐࠇ㧘┙ߜ਄߇ࠅ᷷ᐲߪ౒ㅢߢ޽ࠆ㧚㜞ㅦߥ᷷ᐲ⿛ᩏߦࠃ
ࠅ㧘࠽ࡁࠣ࡜ࡓࠝ࡯࠳࡯ߩ⹜ᢱߩ⋧ォ⒖ᾲ߇᣿⏕ߦᬌ಴ߢ߈ࠆߎߣ߇␜ߐࠇߡ޿ࠆ㧚৻ᣇ㧘಄ළᤨߦߪ㧘2K ⒟ᐲߩㆊ಄ළࠍ␜ߒߚᓟߦಝ࿕ࡇ࡯ࠢ߇
⃻ࠇ㧘Ǿ=43K/s ߩૐㅦ⿛ᩏᤨߦ߽ⷰኤߐࠇࠆ㧚ㆊ಄ළ⸃㒰ߦߟߠߊಝ࿕߇᷷ᐲ⿛ᩏߣ⁛┙ߦㅴⴕߔࠆ㕖ᐔⴧ⁁ᘒߩ✭๺⃻⽎ߢ޽ࠅ㧘ૐㅦߢ߽ⷰኤߐ
ࠇࠆߣ⠨߃ࠄࠇࠆ㧚߹ߚ㧘Ǿ<2000K/s ߢߪ㧘ࡇ࡯ࠢ߇ฝ஥ߦ௑޿ߡ߅ࠅಝ࿕ẜᾲߩ᡼಴ㅦᐲ߇಄ළ
ㅦᐲࠍ⿥߃ߡ᷷ᐲ߇਄᣹ߒߡ޿ࠆߩߦኻߒ㧘Ǿ
>2000K/s ߢߪ㧘ẜᾲ᡼಴ㅦᐲࠃࠅ಄ළㅦᐲ߇ఝࠆ
ߎߣ߇ಽ߆ࠆ㧚ߎߩ଀ߩࠃ߁ߥ㜞ㅦ᷷ᐲ⿛ᩏߦࠃ
ࠅ⋧ᄌൻߩࠞࠗࡀ࠹ࠖࠢࠬߦ㑐ㅪߔࠆᖱႎ߇ᓧࠄ
ࠇࠆน⢻ᕈ߇␜ߐࠇߡ޿ࠆ㧚౒ᝄ⾰㊂⸘᷹ ᾲಽᨆߢߪ㧘Ყᾲᖱႎ߆ࠄ‛⾰ߩᝄࠆ⥰޿ࠍ⺞ߴࠆ߇㧘⹜ᢱߩ⾰㊂ࠍᱜߒߊᛠីߔࠆߎߣߪၮᧄ
⊛ߥⷐઙߢ޽ࠆ㧚ߒ߆ߒ㧘ࡑࠗࠢࡠࠣ࡜ࡓએਅߩ
⾰㊂ࠍ᷹ቯߔࠆߦߪ․೎ߥᄤ⒊߇ᔅⷐߢ޽ࠅ㧘ᚒ‫ࡁ࠽ߩޘ‬ᾲಽᨆߢߪ㧘㗼ᓸ㏜ⷰኤߦࠃࠆ⷗߆ߌ
ߩ⾰㊂ࠍ↪޿ߡ޿ߚ㧚⃻࿷㧘ࠞࡦ࠴࡟ࡃ࡯ߩജቇ
⊛ߥ౒ᝄࠍ೑↪ߒ࠽ࡁࠣ࡜ࡓ⹜ᢱߩ⾰㊂⸘᷹ߣᾲಽᨆࠍታᣉߔࠆ⎇ⓥࠍᆎ߼ߡ޿ࠆߩߢ㧘ߘߩౝኈ

DTA ဳࠞࡠ࡝ࡔ࡯࠲ࠍ↪޿ߚᾲಽᨆࠪࠬ࠹ࡓ
ߩၮᧄᕈ⢻ࠍ Table 1 ߦ␜ߔ㧚ࡊࡠ࡯ࡉߩᤨቯᢙ߿
ᾲࠦࡦ࠳ࠢ࠲ࡦࠬߪࡊࡠ࡯ࡉ߇ⓨߩ⁁ᘒߢߩࡅ࡯
࠲੤ᵹ⊒ᾲߦኻߔࠆ๟ᵄᢙᔕ╵෸߮᣹㒠᷷․ᕈ߆
ࠄ㧘㔚࿶ࡁࠗ࠭ߣ╬ଔߥ᷷ᐲ⸘᷹ಽ⸃⢻߆ࠄᾲኈ㊂ಽ⸃⢻'Cmin㧘ᾲ㊂ಽ⸃⢻'Hmin ࠍ㧘ᤨቯᢙߣ⠴ᾲ᷷ᐲ߆ࠄᦨᄢ᣹࡮㒠᷷ㅦᐲImax ࠍᓧߡ޿ࠆ㧚ᵈ⋡ߔߴ߈ߪ㧘ᓥ᧪ߩᾲಽᨆⵝ⟎ߦᲧߴ㧘ᔕ╵ㅦᐲ㧘ᾲ㊂ಽ⸃⢻߇ᩰᲑߦ㜞޿ߎߣߢ޽ࠆ㧚࠽ࡁࠣ࡜ࡓ⹜ᢱߩᾲಽᨆ
࿑ 6 ߦߪ DSC ဳࠞࡠ࡝ࡔ࡯࠲㧔࿑ 6b㧕ࠍ↪޿㧘
⷗߆ߌ⾰㊂ 20ng ߩࠗࡦࠫ࠙ࡓߩ DTA ࠍⴕߞߚ⚿ᨐߢ޽ࠆ㧚᷷ᐲ⿛ᩏㅦᐲǾࠍ 43K/㨟߆ࠄ 7700K/s߹ߢᄌ߃ߡ㧘ടᾲㆊ⒟ߣ಄ළㆊ⒟ߦಽߌߡ␜ߒߡ
޿ࠆ㧚❑ゲߩ DTA ାภߪ⷗߿ߔ޿ࠃ߁ߦࠝࡈ࠮࠶
࠻ߐࠇߡ޿ࠆ㧚ࠍᰴߦ⚫੺ߔࠆ㧚 ࿑ 8 ߪࠞࡦ࠴࡟ࡃ࡯ߩᝄേࠍ࡟࡯ࠩ࡯ᄌ૏⸘ߢ
ᬌ಴ߒ㧘ߘߩାภࠍჇ᏷ߒ㧘૏⋧ࠍ⺞ᢛߒߡࡇࠛ
࠱ᝄേሶࠍ૶ߞߡࠞࡦ࠴࡟ࡃ࡯ࠍടᝄߔࠆࠪࠬ࠹
ࡓߢ޽ࠆ㧚ࡑࠗࠢߦ౉ജߐࠇߚ㖸ჿ߇ࠬࡇ࡯ࠞ࡯
ࠍㅢࠅ㧘ౣ߮ࡑࠗࠢߦ౉ജߐࠇࡂ࠙࡝ࡦࠣ߇⿠ߎ
ࠆࠃ߁ߦ㧘ߎߩࠪࠬ࠹ࡓߢߪㆡಾߥ૏⋧⺞ᢛࠍⴕ߁ߎߣߢ㧘Ᏹߦ౒ᝄ⁁ᘒࠍ⛽ᜬߢ߈㧘౒ᝄ๟ᵄᢙ
ߪ FFT ߿ࠞ࠙ࡦ࠲࡯ߢ⸘᷹ߐࠇࠆ㧚 ࠞࡦ࠴࡟ࡃ࡯ࠍ᦭ല⾰㊂ M*㧘߫ߨቯᢙ k ߩ߫ߨߣߒ㧘ߘߩవ┵ߦ⾰㊂㨙ߩ⹜ᢱࠍタߖߚ႐ว㧘න⚐ߦߪ౒ᝄ๟ᵄᢙ f ߪᰴᑼߢਈ߃ࠄࠇࠆ㧚fFig. 7k
M * m(2)

Long DSC ࠲ࠗࡊߩࠞࡦ࠴࡟ࡃ࡯਄ߦ㧘100ng ࠝ࡯࠳࡯ߩᣢ⍮ኒᐲߩ⃿ᒻᓸ☸ሶࠍⶄᢙ୘タߖ㧘࿑ 9
ߦ␜ߔ⾰㊂㧘౒ᝄ๟ᵄᢙߩセᱜᦛ✢ࠍ૞ᚑߒߚ㧚ࠞࡦ࠴࡟ࡃ࡯ߩജቇ⊛․ᕈ߿ታ㓙ߩ⾰㊂ࠍ⏕ቯߢ

DTA of Indium of 20 ng with different scanrate.

વᾲ 2009 ᐕ 1 ᦬

1
2S

-4-

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ

Fig. 8㪈㪅㪇㪜㪂㪌

㪛㪼㫊㫀㪾㫅㪑㩷㪤㪔㪎㪏㪇㫅㪾㪃㩷㪽 㩷㪔㩷㪉㪅㪇㪇㪜㪌㩿㫄 㪂㪤 㪁㪀㪄㪇㪅㪋㪍㪊Resonance frequency , Hz߈ߥ޿ߚ߼㧘ࠞࡦ࠴࡟ࡃ࡯ߩ᦭ല⾰㊂ࠍ⸳⸘୯߆
ࠄ▚಴ߒߚࠤ࡯ࠬߣ⸘᷹࠺࡯࠲߇-0.5 ਸ਼ߦᓥ߁ࠃ
߁ߦ᦭ല⾰㊂ࠍ⵬ᱜߒߚࠤ࡯ࠬࠍ␜ߒߡ޿ࠆ㧚߹ߚ㧘ᝄേߩ FFT ାภ߆ࠄߪ㧘౒ᝄߩ㍈ߐ㧔'f/f㧕߇ 1/1000 ⒟ᐲߣ⷗Ⓧ߽ࠄࠇ㧘⾰㊂ߪࠞࡦ࠴࡟ࡃ࡯
᦭ല⾰㊂ߩ 1/1000 ࡟ࡌ࡞ߩಽ⸃⢻㧘හߜ࠽ࡁࠣ࡜
ࡓ࡟ࡌ࡞ߢ⸘᷹ߢ߈ࠆߎߣ߇ಽ߆ߞߚ㧚⃿ᒻᓸ☸ሶࠍขࠅ㒰߈㧘ᓸ㊂ߩࠗࡦࠫ࠙ࡓࠍห
ߓࠞࡦ࠴࡟ࡃ࡯ߦタߖ㧘౒ᝄ๟ᵄᢙࠍ᷹ቯߔࠆߣ
6.78kHz ߣߥࠅ㧘2 ࠤ࡯ࠬߩセᱜᦛ✢߆ࠄߪ 1.2 ~1.5Pg ߣ޿߁⾰㊂᷹ቯ⚿ᨐ߇ᓧࠄࠇߚ㧚ߐࠄߦߎߩࠗࡦࠫ࠙ࡓߦኻߒߡ DTA ࠍታᣉߒ㧘Ⲣ⸃࡮ಝ࿕
ᾲࠍ⸘᷹ߔࠆߣ㧘⾰㊂ߦ឵▚ߒߡߘࠇߙࠇ 0.7Pg㧘
1.0Pg ߣ޿߁⚿ᨐ߇ᓧࠄࠇߚ㧚ജቇ⊛ߥ౒ᝄߣ⋧ォ⒖ᾲ߆ࠄࠦࡦࠪࠬ࠹ࡦ࠻ߥ⚿ᨐ߇ᓧࠄࠇ㧘ࡑࠗࠢࡠ㨪࠽ࡁࠣ࡜ࡓ⹜ᢱߦኻߒߡ⾰㊂㧘ᾲಽᨆ߇ⴕ
߃ࠆߎߣ߇␜ߐࠇߚߎߣߦߥࠆ[6]㧚
 ࠽ࡁࠣ࡜ࡓߩ⾰㊂⸘᷹ߣᾲಽᨆ߇ߢ߈ࠆࠞࡦ࠴
࡟ࡃ࡯ဳࠞࡠ࡝ࡔ࡯࠲ߢߪ㧘᷷ᐲᄌൻߦ઻߁⹜ᢱ
⾰㊂ᄌൻࠍ᷹ቯߒ㧘‛⾰ߩ⣕㔌߿ಽ⸃ࠍ⺞ߴࠆ TG㧔ᾲ㊀㊂᷹ቯ㧘Thermogravimetry㧕ࠍ࠽ࡁൻߔࠆ
ߎߣ߽ߢ߈ࠆ㧚࿑ 10 ߪ㧘ើ⊒ᕈߩ޽ࠆࡔࡦ࠰࡯࡞
ࠍࠞࡦ࠴࡟ࡃ࡯ߦ⫳⌕ߒ㧘ߘߩᓟ᣹⪇ߒߡࠁߊ᭽
ሶࠍࡕ࠾࠲࡯ߒߚ߽ߩߢ޽ࠆ㧚ࡔࡦ࠰࡯࡞ࠍ౉ࠇ
ߚࠆߟ߷ࠍᥦ߼㧘ᄢ᳇ਛߢࠞࡦ࠴࡟ࡃ࡯ߦࡔࡦ࠰
࡯࡞⫳᳇ࠍᒰߡߡ⫳⌕ߔࠆߣ㧘⚂ 40ng ߩࡔࡦ࠰࡯
࡞߇ࡊࡠ࡯ࡉߦઃ⌕ߒ㧘⫳⌕ࠍ஗ᱛߔࠆߣ 90 ⑽⒟ᐲߢ⫳⌕ߒߚࡔࡦ࠰࡯࡞߇ᄢ᳇ਛ߳᣹⪇ߒߡ޿ߊ
ㆊ⒟߇ࠞࡦ࠴࡟ࡃ࡯ߩ౒ᝄ๟ᵄᢙߩᄌൻߣߒߡ᷹
ࠄࠇߡ޿ࠆ㧚౒ᝄ๟ᵄᢙߪ⸘᷹ᤨ㑆 3 ⑽ߢ⸘᷹ߐ
ࠇ㧘ߎߩ᧦ઙߢߪ FFT ߩࡇ࡯ࠢߩ㍈ߐ߆ࠄ㧘⾰㊂⸘᷹ߩಽ⸃⢻ߪ⚂ 1ng ߣ▚ቯߐࠇߡ޿ࠆ[7]㧚੹ᓟ㧘࠽ࡁࠣ࡜ࡓ⹜ᢱߦኻߔࠆ㜞ㅦߥ⋧ォ⒖᜼േߩ⎇ⓥ
߿ᓸ㊂ߥ⾰㊂ᄌൻߩ⸘᷹ߥߤ㧘ᧄᛛⴚߩᔕ↪ࠍㅴ߼ߡ޿ߎ߁ߣ⠨߃ߡ޿ࠆ㧚empty
one particle
two particles㪈㪅㪇㪜㪂㪋

㪈㪅㪇㪜㪂㪊
㪈㪅㪇㪜㪂㪉

Indium:f=6.78kHzm =1.2~1.5Pg㪈㪅㪇㪜㪂㪊

㪈㪅㪇㪜㪂㪋

Effective mass (m+M*) , ng

Fig. 9 Calibration curve of mass to resonancefrequency for a long DSC type nanocalorimeter. Massof tiny indium sample was measured to 1.2~1.5 Pg.

Fig. 10 Mass monitoring in deposition and sublimation process of l-Menthol under atmosphere withresonance of the long DSC type calorimeter .
࠽ࡁࡢ࠶࠻ࡃࠗࠝࠞࡠ࡝ࡔ࠻࡝ ࡃࠗࠝࠞࡠ࡝ࡔ࠻࡝
↢૕ߩᵴേߦ઻߁ᾲߩ಴౉ࠅ߿↢૕↱᧪‛⾰ߩᾲಽᨆࠍࡃࠗࠝࠞࡠ࡝ࡔ࠻࡝ߣ๭߱㧚ㆇേᤨߩ⊒ᾲ߿⊒᳨ࠍᕁ޿಴ߔߣಽ߆ࠆ߇㧘ᚑੱߪᏱᤨ⚂100W ߩ⊒ᾲ㧔ઍ⻢ᾲߩ᡼಴㧕ࠍⴕߞߡ߅ࠅ㧘ᵴേᐲߦᔕߓߡઍ⻢߇Ⴧᷫߔࠆ㧚ࡃࠗࠝࠞࡠ࡝ࡔ࠻
࡝ߦߪฎ޿ᱧผ߇޽ࠅ㧘↢૕ߩᵴᕈ߿⚦⢩ߩჇᱺ․ᕈ㧘⮎ല╬ࠍ⺞ߴࠆઍ⻢ᾲߩಽᨆ߇ⴕࠊࠇߡ߅
ࠅ㧘߹ߚ㧘ᬀ‛⒳ሶߩ⊒⧘ߦ઻߁⊒ᾲ߿᣸⯻߇ᄌᘒߔࠆߣ߈ߩ⊒ᾲߥߤ߇⺞ߴࠄࠇߡ޿ࠆ㧚↢૕⚦⢩ߦ㑐ߒߡߪ㧘଀߃߫ੱߩ⿒ⴊ⃿ߪᱜᏱ୘૕ߢ 15
r 5pW/Cell 㧘 ↲ ⁁ ⣼ ᯏ ⢻ ੣ ㅴ ୘ ૕ ߢ ߪ 131 r
4pW/Cell㧘਄⊹⢽⢌⚦⢩ߢ 10pW/Cell㧘⢗✢߇ࠎ

Auto resonance detection system of a
cantilever type calorimeter.

વᾲ 2009 ᐕ 1 ᦬㪤㫆㪻㫀㪽㫀㪼㪻㪑㩷㪤㪔㪏㪎㪇㫅㪾㪃㩷㪽 㩷㪔㩷㪉㪅㪌㪍㪜㪌㩿㫄 㪂 㪤 㪁㪀㪄㪇㪅㪌㪇㪇-5-

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
ߔࠆߚ߼㧘ࠞ࠶࠻ࠝࡈ๟ᵄᢙ 1Hz ߩࡠ࡯ࡄࠬࡈࠖ
࡞࠲ࠍ஻߃ߚࠥࠗࡦ 40dB ߩࠕࡦࡊࠍᕡ᷷ጀౝߦ
⸳⟎ߒ㧘㔚᳇♽ߩ᷷ᐲ࠼࡝ࡈ࠻ࠍૐᷫߔࠆᎿᄦࠍ
ขߞߡ޿ࠆ㧚⃻⁁ߢߪ㧘ᾲࡁࠗ࠭࡟ࡌ࡞ߪ 400nW⒟ᐲߢ޽ࠅ㧘ࡁࠗ࠭ૐᷫߩᎿᄦ߇ᦸ߹ࠇߡ޿ࠆ㧚㉂Უ⩶ߩჇᱺㆊ⒟
࿑ 12 ߪࡄࡦ㉂ᲣߩჇᱺㆊ⒟ࠍ⊒ᾲ㊂ߢ᝝ࠄ߃ߚ߽ߩߢ޽ࠆ㧚ዋᢙߩ㉂Უ⩶ࠍ฽ࠎߛ 3wt%ࠬࠢ
ࡠ࡯ࠬ᳓ṁᶧ㧔⍾♧᳓㧕0.1ml ߣ߆߮߿㉂Უ⩶↪
ߩၭ㙃ᶧ㧔M-Green Yeast and Mold Broth㧕0.05mlࠍ⹜ᢱ࠮࡞ߦ౉ࠇ㧘30͠ߢ㕒⟎ߒߚ႐วߩჇᱺࠨ
࡯ࡕࠣ࡜ࡓߢ޽ࠆ㧚ታ㛎㐿ᆎᓟ 1 ᤨ㑆⒟ᐲ߆ࠄኻᢙゲ਄ߢ⋥✢⊛ߦ⊒ᾲ㊂߇਄᣹ߒߡ޿ࠆࠤ࡯ࠬߣ
㐿ᆎᓟ⚂ 8 ᤨ㑆ᓟ߆ࠄჇᱺ߇⏕⹺ߐࠇࠆࠤ࡯ࠬࠍ
␜ߒߡ޿ࠆ㧚ਔࠤ࡯ࠬߣ߽㧘⊒ᾲ㊂ߩჇടഀว߇
ห⒟ᐲߢ޽ࠅ㧘1 ୘ߩ⩶߇ಽⵚߒߡ 2 ୘ߦߥࠆߩ
ߦ߆߆ࠆ਎ઍᤨ㑆ߪ⚂ 80 ಽߣ⷗Ⓧ߽ࠄࠇࠆ㧚ᅢㆡⅣႺߢߩ㉂Უ⩶ߩ਎ઍᤨ㑆ߪ৻⥸ߦ 80~120 ಽߣ⸒ࠊࠇߡ߅ࠅ㧘Ⴧᱺ߇⏕⹺ߐࠇߡ߆ࠄ 10 ᤨ㑆⒟ᐲߪ㗅⺞ߦ㉂Უ⩶߇ჇᱺߔࠆኻᢙჇᱺᦼߦ޽ࠆߎߣ
߇ಽ߆ࠆ㧚߹ߚ㧘⊒ᾲ㊂߇ࡇ࡯ࠢࠍㄫ߃ߚᓟߪ㧘ⅣႺᖡൻ߿ᩕ㙃ಽߩਇ⿷ߢᵴേ߇ૐਅߒߡ޿ߊᱫ
Ṍᦼߩㆊ⒟߇⷗ࠄࠇࠆ㧚ਔࠤ࡯ࠬߢߪ㧘ೋᦼߦ⹜ᢱ࠮࡞ౝߦ౉ࠇࠄࠇߚ
㉂Უ⩶ᢙߩ㆑޿߇┙ߜ਄ࠅᤨ㑆ߩᏅߦߟߥ߇ߞߡ
޿ࠆߣ⠨߃ࠄࠇࠆ㧚ኻᢙჇᱺ․ᕈ߇ታ㛎㐿ᆎᤨ߆ࠄᄌࠊߞߡ޿ߥ޿ߣ઒ቯߔࠆߣ㧘ᣧ޿┙ߜ਄ࠅࠍ␜ߒߚࠤ࡯ࠬߢߪ⚂ 10,000 ୘㧘ㆃ޿ࠤ࡯ࠬߢߪ
300 ୘⒟ᐲߩ㉂Უ⩶߇⹜ᢱ࠮࡞ౝߦ޽ߞߚߎߣߦ
ߥࠆ㧚߹ߚ㧘ᧄࡃࠗࠝࠞࡠ࡝ࡔ࡯࠲ߢߪ㧘ࡁࠗ࠭࡟ࡌ࡞߇ 400nW ⒟ᐲ޽ࠅ㧘㉂Უ⩶ߩ 10,000 ߆ࠄ
1,000,000 ୘࡟ࡌ࡞ߩઍ⻢ᾲࠍ⸘᷹ߒߡ޿ࠆߎߣ

⚦⢩ߪ 40~49pW/Cell㧘㉂Უ⩶ߪ 20r3pW/Cell㧘ᄢ⣺⩶ߪ 0.067r0.01pW/cell ߥߤ㧘ฦ⚦⢩ߩઍ⻢㊂߇⺞ߴࠄࠇߡ޿ࠆ[8]㧚߇ࠎ⚦⢩ߥߤ∛᳇ߩ⚦⢩ߪઍ⻢߇ㆊ೾ߦᄙߊ㧘ᱜᏱ⚦⢩ࠃࠅ߽㜞޿ᵴേᕈࠍ
␜ߔߎߣߪ⥝๧ᷓ޿㧚዁᧪㧘∛᳇ߩࡔࠞ࠾࠭ࡓߦ
ᾲߩⷰὐ߆ࠄ⽸₂߇ߢ߈ࠆߩߢߪߣᦼᓙߐࠇࠆ㧚⃻࿷㧘ࡃࠗࠝࠞࡠ࡝ࡔ࠻࡝ߢ೑↪ߐࠇߡ޿ࠆᾲ㊂⸘ߪ㧘ࡍ࡞࠴ࠚ⚛ሶࠍᾲᵹ࠮ࡦࠨߦ↪޿ߚ߽ߩߢ㧘
100nW ࡟ࡌ࡞ߩಽ⸃⢻ࠍᜬߜ㧘଀߃߫ 100 ୘࡟ࡌ࡞ߩࡅ࠻࠺ߩෆ߇৻ᢧߦෆഀࠍ↢ߓࠆ႐วߩ⊒ᾲࡇ࡯ࠢ߇ⷰኤߐࠇߡ޿ࠆ㧚[9]MEMS ࠨ࡯ࡕࡄࠗ࡞ࠍ↪޿ߚᾲ㊂⸘ᚒ‫ߪޘ‬㧘MEMS ᛛⴚߢ㜞ᗵᐲߥᾲ㊂࠮ࡦࠨࠍ૞
ࠇ߫㧘⚦⢩߿↢૕ߩઍ⻢ᾲࠍ㜞ᗵᐲ߆ߟ㜞ㅦߦࡕ࠾࠲ߒ㧘↢૕ᵴേࠍࠃࠅ⹦⚦ߦ⺞ߴࠆ㧘⮎ല߿ࠕ࡟࡞ࠡ࡯ߥߤࠍ↢૕ߩㅢᏱ↢๮ᵴേ⁁ᘒߢ⺞ߴࠄࠇࠆߣ㧘කቇ㧘⮎ቇ㧘↢‛ቇ߳ߩ⽸₂ࠍ⠨߃㧘⎇ⓥࠍㅴ߼ߡ޿ࠆ[10]㧚
࿑ 11 ߪ㧘ࠞࡃ࡯ࠟ࡜ࠬࠍၮ᧼ߣߒߡ࠾࠶ࠤ࡞㧘ࠢࡠࡓ⭯⤑ߢ૞ᚑߐࠇߚࠨ࡯ࡕࡄࠗ࡞࠮ࡦࠨߢ޽
ࠆ㧚ਛᄩㇱߦ᜛ᄢ౮⌀ࠍวᚑߒߡ޿ࠆ߇㧘Ꮐฝߦ
⸘ 350 ୘ߩᾲ㔚ኻࠍ⋥೉ߦᒻᚑߒ㧘ਛᄩㇱߦߪセᱜ↪ࡅ࡯࠲ࠍ㈩⟎ߒߡ޿ࠆ㧚ߎߩࠨ࡯ࡕࡄࠗ࡞ߪ
๟࿐ࠍࠕ࡞ࡒࡉࡠ࠶ࠢߩࡅ࡯࠻ࠪࡦࠢߦធ⌕ߒ㧘ਛᄩㇱߦ⹜ᢱࠍ⟎߈㧘⹜ᢱߩ⊒ᾲߦࠃࠆਛᄩㇱߣ๟ㄝㇱߣߩ௖߆ߥ᷷ᐲᏅࠍᬌ಴ߒߡᾲ㊂ࠍ⸘᷹ߔࠆ㧚ᗵᐲߪ㧘⚂ 2.2PV/PW ߣታ᷹ߐࠇߡ޿ࠆ㧚↢૕⹜ᢱߩᓸ㊂ߥ⊒ᾲࠍ⺞ߴࠆߦߪ㧘㜞ᗵᐲߥ࠮ࡦࠨߦട߃㧘ᄖ⇇ߩ᷷ᐲᄌേߩᓇ㗀ࠍචಽߦᛥ
߃ߚᾲ⊛ߦ቟㕒ߥ⁁ᘒ߇ᔅⷐߢ޽ࠆ㧚ᚒ‫ߪޘ‬㧘࠮ࡦࠨࠍ⸳⟎ߒߚࠕ࡞ࡒࡉࡠ࠶ࠢࠍ 3 ㊀ߩࠕ࡞ࡒࠤ
࡯ࠬߦᩰ⚊ߒ㧘ࡍ࡞࠴ࠚ⚛ሶߣ᷷ᐲ⺞ᢛེࠍ↪޿ߚᕡ᷷ᮏࠍ⵾૞ߒߡ㧘ᾲࡁࠗ࠭ߩᛥ೙ࠍ࿑ߞߡ޿
ࠆ㧚߹ߚ㧘࠽ࡁࡏ࡞࠻࡟ࡌ࡞ߩାภࠍ቟ቯߦ⸘᷹

Heat Generation

, PW

1000

Yeast Grow th w ith MEMS TP Sensor

㪰㪼㪸㫊㫋㩿㪉㪇㪇㪏㪇㪏㪈㪐㪀㪜㫏㫇㪅㩷㪘㫇㫇㫉㫆㫏㪅㩿㪇㪏㪈㪐㪀㪰㪼㪸㫊㫋㩿㪉㪇㪇㪏㪇㪏㪈㪏㪀㪜㫏㫇㪅㩷㪘㫇㫇㫉㫆㫏㪅㩿㪇㪏㪈㪏㪀

100

10
1

0.1

0.01
0

5

10

15

20

Time

Fig. 11 Thermopile sensor and measurement principle

વᾲ 2009 ᐕ 1 ᦬

, h

25

30

35

40

Fig. 12 Growth thermogram of Yeast.

-6-

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
ᨆ㧘↢૕⹜ᢱߩ࠽ࡁ㨪ࡑࠗࠢࡠࡢ࠶࠻ߩ⊒ᾲࠍࡕ࠾࠲ߔࠆᛛⴚࠍ⚫੺ߒߚ㧚MEMS ߿࠽ࡁ࠹ࠢࠍ૶
߁ߣ㧘ᓥ᧪ᛛⴚߩ೔㆐▸࿐ࠍᤃ‫߃⿥ߣޘ‬㧘ᣂߒ޿਎⇇߇⷗߃ߡߊࠆ㧚ᾲജቇ߇ᢎ߃ࠆㅢࠅ㧘޽ࠄࠁࠆᵴേߦߪᾲ߇⃻ࠇ㧘ߎࠇࠍ਄ᚻߦᝒ߃೑↪ߔࠆߎߣߢ㧘વᾲࠍኾ㐷ߣߔࠆᚒ‫ߪޘ‬᭽‫ߥޘ‬ಽ㊁߳⽸₂ߔࠆߎߣ߇น⢻ߢ޽ࠆߣᕁ߁㧚21 ਎♿ߦᚒ‫߇ޘ‬ᚻߦ౉ࠇߚ࠽ࡁ࠹ࠢࡁࡠࠫࠍߎࠇ߆ࠄ߽Ⓧᭂ⊛ߦ೑↪ߒߚ⎇ⓥࠍዷ㐿ߒߡ޿߈ߚ޿ߣ⠨߃ߡ޿ࠆ㧚⻢ ㄉᧄⓂߢ⚫੺ߒߚ⪺ᦠࠄߩ MEMS ࠺ࡃࠗࠬ㧘࠮ࡦࠨ࡯ߪ㧘᧲੩Ꮏᬺᄢቇࡔࠞࡁࡑࠗࠢࡠࡊࡠ࠮ࠬቶ
ߢ૞ᚑߒߚ߽ߩߢ޽ࠆ㧚ߎߎߦ⸥ߒ㑐ଥฦ૏ߦᗵ
⻢ߩᗧࠍ⴫ߔࠆ㧚ෳ⠨ᢥ₂
[1] ਛ೎ᐭୃ㧘ᾲ᷹ቯ㧘Vol.28㧘No.1 (2001) p.18-28[2] ㊀Ꮉ⑲ታࠄ㧘ታᚢ࠽ࡁ࠹ࠢࡁࡠࠫ࡯⿛ᩏࡊࡠ࡯ ࡉ 㗼 ᓸ ㏜ ߣ ዪ ᚲ ಽ శ 㧘 ⵷ ⪇ ᚱ 㧘 (2005),
pp.344-351[3] ਛ೎ᐭୃ㧘⏴↰⻞৻㧘SThM ߦࠃࠆዪᚲᾲવ
ዉ₸⸘᷹ߦ㑐ߔࠆ⎇ⓥ㧘ᣣᧄᯏ᪾ቇળ⺰ᢥ㓸㧔㧮✬㧕㧘72 Ꮞ 722 ภ㧘pp.2524-2531[4] ᣣᧄൻቇળ✬ ╙ 5ታ㛎ൻቇ⻠ᐳ㧢 ᷷ᐲ࡮ᾲ㧘࿶ജ㧘ਣༀ (2005) pp.41-88[5] ਛ೎ᐭୃ㧘⿥ᓸ㊂ᾲಽᨆ̌࠽ࡁࠞࡠ࡝ࡔ࠻࡝̍

ߦߥࠆ㧚⃻࿷㧘࠮ࡦࠨߩᏅേൻߦࠃࠅࡁࠗ࠭࡟ࡌ
࡞ࠍૐᷫߒ㧘ࠃࠅዋᢙߩ⚦⢩ߩઍ⻢᜼േࠍࡕ࠾࠲
ߔࠆߎߣࠍᬌ⸛ߒߡ޿ࠆ㧚࡜࠺ࠖ࠶ࠪࡘߩ⊒⧘ㆊ⒟
࿑ 13 ߪ࡜࠺ࠖ࠶ࠪࡘ㧔ੑචᣣᄢᩮ㧕ߩ⊒⧘ㆊ⒟ࠍ 6 ᣣ㑆ߦᷰࠅ⸘᷹ߒߚ⚿ᨐߢ޽ࠆ㧚ੇ῎㊀㊂
10mg ߩ⒳৻☸ࠍ 30mg ߩ᳓ߣ౒ߦ⹜ᢱ࠮࡞ߦኒኽ
ߒ㧘⚂ 20͠ߩ᧦ઙߢ⊒⧘ߐߖߚ㧚⸘᷹ࠍ⚳ੌߒߚᤨὐߢ⊒⧘ߒߚ⒳ߩ㊀ߐߪ 33mg ޽ࠅ㧘ᓟᣣ⸘᷹ߒߚੇ῎㊀㊂ߪ⚂ 11mg ߢ޽ߞߚ㧚ታ㛎㐿ᆎ⋥ᓟ
ߣ 4 ᣣ 20h ㄝࠅߩࡄ࡞ࠬߪࡁࠗ࠭ߢ޽ࠅ㧘3 ᣣ߆
ࠄ 4 ᣣߦ߆ߌߡ 12h 㗃ߦૐ޿ࡇ࡯ࠢߩ޽ࠆᄌേߪ
1 ᣣߩ᷷ᐲᄌൻࠍ෻ᤋߒߚ⊒⧘ߣߪ㑐ଥߥ޿ାภ
ߢ޽ࠆ㧚⊒⧘ߦ઻߁⊒ᾲ᜼േߦ㑐ߒߡߪਇീᒝߢ
޽ࠅ㧘චಽߥ⸃⺑ߪߢ߈ߥ޿߇㧘⚿ᨐ߆ࠄߪ㧘⸘᷹㐿ᆎ߆ࠄ⚂ 2 ᣣࠍ⚻ㆊߒߡ߆ࠄᓢ‫⊒ߦޘ‬ᾲ߇Ⴧ߃㧘4 ᣣ⋡ߦ⚂ 70PW ⒟ᐲߩࡇ࡯ࠢ⊒ᾲࠍ␜ߒ㧘⚂ 5 ᣣ㑆ߢ⋡┙ߞߚ⊒ᾲ⃻⽎߇⚳ᕷߒߡ޿ࠆ㧚┆ዮߥ࠮࡞ౝߢߪ㧘Ძᩮߩ↢߃ߚᩮ߇િ߮㧘ሶ⪲߇⒳ߩ߆ࠄࠍ⣕ߋߎߣ߇಴᧪ߥ޿⁁ᘒ㧔࿑ਛߩ౮⌀㧕ߢ⊒⧘߇⏕⹺ߐࠇߚ㧚ⶄᢙ࿁ߩታ㛎ߢߪ㧘ታ㛎㐿ᆎᓟߔߋߦ⊒ᾲ߇ᆎ߹ࠆ႐ว߿㧘ߎߩ⚿ᨐߩࠃ߁ߦᢙᣣࠍ⚻ߡ⊒⧘߇ᆎ߹ࠆ႐วߥߤ㧘⚻ㆊᤨ㑆ߦᄢ߈ߥᏅ߇⷗ࠄࠇߚ߇㧘ࡇ࡯ࠢ⊒ᾲ㊂ߪ㧘ห⒟ᐲ
ߩ㊀ߐߩ⒳ሶߢ㧘70~100PW ⒟ᐲߩ⊒ᾲ߇⏕⹺ߐࠇߡ޿ࠆ[11]㧚ࠁߞߊࠅߣߒߚᬀ‛ߩᵴേ߽㧘ᓸ㊂ߥᾲ㊂ߩᱜ⏕ߥ⸘᷹ߦࠃࠅ㧘ቯ㊂ൻߒߚⷰኤ߇
ߢ߈ࠆߎߣ߇ಽ߆ࠅ㧘ᾲߩಽ㊁߽ࡃࠗࠝࠕࡊ࡝ࠤ
࡯࡚ࠪࡦ߳ߩ⽸₂߇ᦼᓙߢ߈ࠆߣᗵߓߡ޿ࠆ㧚ߩ ᛛ ⴚ േ ะ 㧘 ᾲ ‛ ᕈ , Vol.20, No.3 (2006)
pp.138-144[6] Osamu NAKABEPPU, Nanocalorimetry withmicro-cantilever probe, IFHT2008㧘(2008), CD[7] ਛ೎ᐭୃ㧘MEMS ࠍ↪޿ߚᓸዊᾲಽᨆᛛⴚߩ
㐿⊒㧘 ᣣᧄᯏ᪾ቇળᐕᰴᄢળ⻠Ṷ⺰ᢥ㓸 Vol.8㧘
pp.79-80㧘(2008)㧘
[8] ᣣᧄൻቇળ✬ ╙ 5 ታ㛎ൻቇ⻠ᐳ㧢᷷ᐲ࡮ᾲ㧘࿶ജ㧘ਣༀ㧘p.322 (2005)[9] 㐳㊁౎ਭ㧘⊕੗ᶈሶ㧘ࡅ࠻࠺ᐜ↢ೋᦼ⊒↢ߩᾲ᷹ቯ㧘╙ 43 ࿁ᾲ᷹ቯ⸛⺰ળ⻠Ṷⷐᣦ㓸
(2007) pp.204-205[10] ਛ೎ᐭୃ㧘ဈነ⚐৻㧘MEMS ࠮ࡦࠨߦࠃࠆዋ
ᢙ⚦⢩ߩઍ⻢ᾲࡕ࠾࠲࡝ࡦࠣ㧘Thermal Science& Engineering, Vol.14, No.4, (2006) pp.115-120[11] ጊᧄ᣽ᒄ㧘ਛ೎ᐭୃ㧘MEMS ࠨ࡯ࡕࡄࠗ࡞࠮
ࡦࠨߦࠃࠆࡃࠗࠝࠞࡠ࡝ࡔ࠻࡝㧘╙ 44 ࿁ᾲ᷹ቯ⸛⺰ળ⻠Ṷⷐᣦ㓸㧘(2008) p.130

߅ࠊࠅߦ
ᧄⓂߢߪ㧘ඨዉ૕ᓸ⚦ടᎿᛛⴚߢ⵾૞ߐࠇߚࡑ
ࠗࠢࡠ࠮ࡦࠨࠍ೑↪ߒߚ࠽ࡁࡔ࡯࠻࡞ࠬࠤ࡯࡞᷷
ᐲ࡮ᾲવዉ₸⸘᷹㧘࠽ࡁࠣ࡜ࡓ⹜ᢱߩ⾰㊂࡮ᾲಽ

Fig. 13 Germination thermogram of Radish

વᾲ 2009 ᐕ 1 ᦬-7-

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚMEMS વᾲ㕙ࠍ↪޿ߚᴣ㛛ᯏ᭴ߩ⸃᣿
Boiling on MEMS heat transfer surfacesਤਅ ቇ㧔↥ᬺᛛⴚ✚ว⎇ⓥᚲ㧕Manabu TANGE (AIST)
e-mail: m.tange@aist.go.jpߪߓ߼ߦ
 MEMS ᛛⴚߩ⊒ዷߦࠃߞߡ㧘ᴣ㛛વᾲ㕙ߦᓸ⚦ߥ᭴ㅧ૕ࠍᒻᚑߒߚࠅ㧘ᓸ⚦ߥ࠮ࡦࠨࠍടᎿߒߚ
ࠅߔࠆߎߣ߇ߢ߈ࠆࠃ߁ߦߥߞߡ߈ߡ޿ࠆ㧚ߎࠇߦࠃࠅ㧘ᴣ㛛ᾲવ㆐ߩଦㅴࠍ⋡⊛ߣߒߚ⴫㕙ടᎿ[1]ߩⓥᭂᒻߣߒߡ㧘વᾲ㕙ߣߥࠆࠪ࡝ࠦࡦ࠙ࠚࡂ
⴫㕙ߦᄙᢙߩࠠࡖࡆ࠹ࠖ[2]߿ᓸ⚦ߥ⓭⿠[3]ࠍ㈩⟎ߒߡᾲવ㆐ࠍ⸘᷹ߔࠆ⎇ⓥ߇ߥߐࠇߡ޿ࠆ㧚৻ᣇ㧘MEMS ᛛⴚࠍ೑↪ߔࠆߎߣߢታ㓙ߩᴣ㛛વᾲ㕙ߢߪਇน⢻ߥᴣ㛛⃻⽎ࠍታ⃻ߒ㧘ᴣ㛛⃻⽎ߩၮ␆ㆊ⒟ߦㄼࠅ㧘ᾲવ㆐ᯏ᭴ࠍ⸃᣿ߒࠃ߁ߣߔࠆ⎇ⓥ߽޽ࠆ㧚ߡ߆ࠄߤࠇߊࠄ޿ߢᰴߩ᳇ᵃ߇⊒↢ߔࠆߩ߆㧘ߣ޿߁ߎߣߪࠠࡖࡆ࠹ࠖߩᕈ⾰㧔ᄢ߈ߐ㧘ᒻ⁁㧘Ứࠇᕈߥߤ㧕ߦᄢ߈ߊଐሽߔࠆ[4]㧚
 ㄭᐕ㧘ᴣ㛛⃻⽎ߩᢙ୯⸘▚߇ᢙᄙߊⴕࠊࠇߡ޿
ࠆ߇㧘⋧ᄌൻࠍ฽߻᳇ᶧ⇇㕙ߩขࠅᛒ޿ߪ㔍ߒߊ㧘ߘߩᄙߊߪන⚐ߥ᷷ᐲ႐ߦ߅ߌࠆන৻᳇ᵃߩᚑ㐳ߦ㑐ߔࠆ߽ߩߢ޽ࠆ[5]㧔଀ᄖߣߒߡ Dhir[6]ߪᦨㄭ㧘ታ㓙㕙ߦㄭ޿ⶄᢙ᳇ᵃᩭߩ⸘▚ࠍⴕߞߡ޿ࠆ㧕㧚޿ࠊ߫㧘ㅢᏱߩᴣ㛛વᾲ㕙ߢߪ㧘ᢙ୯⸘▚ߦ߅޿ߡߩೋᦼ᧦ઙ㧔᳇ᵃ⊒↢ᤨߩᵹࠇ႐㧘᷷ᐲ႐㧕ߣႺ⇇᧦ઙ㧔⴫㕙ᕈ⁁㧘⊒ᵃߩ࠲ࠗࡒࡦࠣ㧕߇ࠦࡦ࠻ࡠ࡯࡞ߢ߈ߡ޿ߥ޿ߎߣߦߥࠆ㧚 ᧄⓂߢߪ㧘MEMS ᛛⴚࠍ↪޿ߚੱᎿᴣ㛛વᾲ㕙ߦ߅ߌࠆන৻ᴣ㛛᳇ᵃߩ↢ᚑߦ⊛ࠍ⛉ࠅ㧘ᣢሽߩ⎇ⓥࠍ⚫੺ߒߚߩߜ㧘╩⠪ࠄ߇㐿⊒ߒߚ MEMSવᾲ㕙ߦߟ޿ߡ⸃⺑ߔࠆ㧚ᰴߦ㧘MEMS વᾲ㕙ࠍ↪޿ߚታ㛎⚿ᨐߩ৻ߟߣߒߡ㧘㜞ࠨࡉࠢ࡯࡞ᴣ㛛ߦ߅ߌࠆ᳇ᵃߩᄌᒻߦߟ޿ߡ㧘⎇ⓥ⢛᥊ߣߣ߽ߦ
ታ㛎⚿ᨐࠍ␜ߔ㧚ᦨᓟߦ MEMS વᾲ㕙ࠍ↪޿ߚᴣ㛛⎇ⓥߩ㝯ജߣ㧘੹ᓟߩ⺖㗴ߦߟ޿ߡㅀߴࠆ㧚

Flow withexternal means
Preceding bubbles
Adjacent bubbles

Cavities

/'/5 વᾲ㕙ࠍ↪޿ߚන৻ᴣ㛛᳇ᵃߩ↢ᚑ ઁߦᄖੂߩߥ޿⁁ᴫߢ৻ߟߩᴣ㛛᳇ᵃࠍߟߊࠆߚ߼ߦߪߤ߁ߔࠇ߫ࠃ޿ߛࠈ߁߆㧚ㆊ෰ߩ⎇ⓥߢߪ㧘ߎߩ໧㗴ߦኻߒᄢ߈ߊಽߌߡ 2 ߟߩࠕࡊࡠ࡯
࠴߇ߣࠄࠇߡ޿ࠆ㧦 1㧚ᐔṖߥવᾲ㕙ࠍ↪ᗧߒ㧘ੱᎿ⊛ߥࠠࡖࡆ࠹ࠖ
ࠍ৻ߟߛߌ⸳ߌࠆ㧦Shoji and Takagi[7]ߪ㧘ᐔṖߥ㌃⴫㕙ߦ⋥ᓘ 50 Pm ߆ࠄ 100 Pm ߩࠠࡖࡆ࠹ࠖࠍ
ടᎿߒ㧘ቅ┙ߒߚ⊒ᵃᩭࠍታ⃻ߒߡ޿ࠆ㧚 2㧚᳇ᵃ߇৻ߟᚑ㐳ߔࠆߛߌߩ⁜޿㗔ၞࠍዪᚲ⊛ߦടᾲߔࠆવᾲ㕙ࠍ૞ࠆ㧦Li and Peterson[8]ߪࡑࠗ
ࠢࡠࡅ࡯࠲ࠍ↪޿ߡᐔṖߥવᾲ㕙ߦන৻᳇ᵃࠍ૞ࠅ㧘޿ߟᩭ↢ᚑ߇ⴕࠊࠇࠆ߆ߣ޿߁㧘ᩭ↢ᚑℂ⺰ߩᬌ⸽ࠍⴕߞߡ޿ࠆ㧚ߎߩ⎇ⓥߪࠗࡦࠢࠫࠚ࠶࠻
ࡊ࡝ࡦ࠲ࠍ↥ᬺ⊛⢛᥊ߣߒߡ޿ࠆ㧚ࡑࠗࠢࡠࡅ࡯

Fig. 1: A conceptual sketch of an actual boiling heattransfer surface.
 ࿑ 1 ߦ␜ߔ᭎ᔨ࿑ߩࠃ߁ߦ㧘ᴣ㛛᳇ᵃߪ৻⥸ߦ㧘વᾲ㕙਄ߦᒻᚑߐࠇߚㆊᾲᶧጀߩਛ㧘વᾲ㕙ߦሽ࿷ߔࠆᓸ⚦ߥ்㧔ࠠࡖࡆ࠹ࠖ㧕ߦ࠻࡜࠶ࡊߐࠇߚ
⫳᳇႙ࠍᩭߣߒߡ⊒↢ߔࠆ㧚⃻ታߩᴣ㛛વᾲ㕙ߦߪᄙᢙߩࠠࡖࡆ࠹ࠖ߇ሽ࿷ߔࠆߣߣ߽ߦ㧘ቯᏱ⊛ߥടᾲ߇ⴕࠊࠇࠆߚ߼㧘⥋ࠆᚲ߆ࠄᴣ㛛᳇ᵃ߇⊒↢ߒߡ޿ࠆ㧚߹ߚ㧘ᒝ೙ᵹേᴣ㛛ߢߪ᳇ᵃߩᚑ㐳࡮㔌⣕ߦࠃࠆᵹࠇߦᒝ೙ኻᵹߩᵹࠇ߇ടࠊࠆ㧚ߟ߹ࠅ㧘޽ࠆ৻ߟߩᴣ㛛᳇ᵃߦᵈ⋡ߒߡ߽㧘ߘߩ᳇ᵃߪઁߩ᳇ᵃߦࠃߞߡੂߐࠇߚᵹࠇ႐㧘᷷ᐲ႐ߩਛ
ߢᚑ㐳ߒߡ޿ࠆߚ߼㧘ታ㛎᧦ઙࠍᱜ⏕ߦ⸳ቯߒߚ
ߎߣߦߪߥࠄߥ޿㧚߹ߚ㧘৻ߟ೨ߩ᳇ᵃ߇㔌⣕ߒવᾲ 2009 ᐕ 1 ᦬-8-

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
 ࿑ 2 ߦ MEMS વᾲ㕙ߩ᭎ⷐࠍ␜ߔ㧚MEMS વᾲ㕙ߪෘߐ 0.5 mm㧘20 mm ⷺߩࠪ࡝ࠦࡦ࠙ࠚࡂ
ߢ㧘㊄ዻ⭯⤑ߩࠬࡄ࠶࠲࡝ࡦࠣߣ࡝ࡈ࠻ࠝࡈࡊࡠ
࠮ࠬߢᓸ⚦ߥ࿁〝߇ታⵝߐࠇߡ߅ࠅ㧘3 ߟߩᯏ⢻ࠍᜬߟ㧦
 1㧚⭯⤑ࡅ࡯࠲㧔ⵣ㕙㧘࿑ 2 Ꮐਅ㧕 વᾲ㕙ߩⵣߦߪⰬⴕߔࠆ㌃⭯⤑ࡅ࡯࠲㧔8 mm
ⷺ㧕߇޽ࠅ㧘ㆊᷰ⊛ߥㅢ㔚ടᾲߦࠃߞߡવᾲ㕙਄ߦㆊᾲᶧጀࠍ૞ࠆߎߣ߇ߢ߈ࠆ㧚ࡅ࡯࠲ߩᄢ߈ߐ
ߪ᳇ᵃߩᄢ߈ߐߦᲧߴචಽᄢ߈ߊ㧘㕙ᣇะߦ৻᭽
ߥടᾲࠍⴕߞߡ޿ࠆߣߺߥߔߎߣ߇ߢ߈ࠆ㧚 2㧚⊒ᵃ࠻࡝ࠟ㧔߅߽ߡ㕙㧘࿑ 2 Ꮐ਄෸߮ฝਛߩ
㗼ᓸ㏜౮⌀㧕 વᾲ㕙ߩਛᔃߦߪะ߆޿ว߁ 2 ߟߩ Ni 㔚ᭂ߇޽ࠅవ┵ߛߌ߇᳓ਛߦ㔺಴ߒߡ޿ࠆ㧔ߘߩઁߩㇱಽߪ SiO2 ⤑ߢ᳓ߣ㔚᳇⊛ߦ⛘✼ߐࠇߡ޿ࠆ㧕㧚㔚ᭂߦ㔚ᵹࠍᵹߔߎߣߢ᳓ߩ㔚᳇ಽ⸃ࠍ⿠ߎߒ㧘ᓸ⚦ߥ᳓⚛᳇ᵃࠍ⊒↢ߐߖࠆ㧚ߎߩ᳓⚛᳇ᵃߩ᳇ᶧ⇇㕙ࠍᩭߣߒߡᴣ㛛᳇ᵃ߇↢ᚑߐࠇࠆ㧚⭯⤑ࡅ࡯࠲ߢ૞ߞߚㆊᾲᶧጀߩო㕙᷷ᐲߣߪ⁛┙ߦ⊒ᵃߩ࠲ࠗࡒࡦࠣࠍࠦࡦ࠻ࡠ࡯࡞ߢ߈ࠆߩ߇․ᓽߢ޽ࠆ㧚ߒ߆ߒ㧘ടᾲߒߔ߉ࠆߣ⊒ᵃ࠻࡝ࠟߥߒߦᩭ↢ᚑ߇⿠ߎࠅ㧘વᾲ㕙ో૕ߦᴣ㛛᳇ᵃ߇↢ᚑߐࠇࠆ㧚 3㧚ᓸ⚦ᾲ㔚ኻ㧔߅߽ߡ㕙㧘࿑ 2 Ꮐ਄෸߮ฝਅߩ
㗼ᓸ㏜౮⌀㧕 ⊒ᵃ࠻࡝ࠟ߆ࠄ 50 Pm 㑆㓒ߢ 7 ߟߩᾲ㔚ኻ߇ታⵝߐࠇߡ޿ࠆ㧚ߔߥࠊߜ㧘Ni ⭯⤑࿁〝ߣ Cr ⭯⤑࿁〝߇㊀ߥߞߚㇱಽ㧔10 Pm ྾ᣇ㧕߇ᾲ㔚ኻߣߒߡᯏ⢻ߒߡ޿ࠆ㧚 ߎߩવᾲ㕙ߪㅢᏱᴣ㛛᳇ᵃߩ⊒↢Ḯߣߥࠆࠠࡖ
ࡆ࠹ࠖࠍᜬߚߕ㧘છᗧߩ࠲ࠗࡒࡦࠣߢ↢ᚑߐࠇࠆ᳓⚛᳇ᵃ߆ࠄᴣ㛛᳇ᵃ߇ᚑ㐳ߔࠆ㧚ߟ߹ࠅ㧘᳇ᵃᩭߣᩭ↢ᚑߣ޿߁ⶄ㔀ߥ໧㗴ࠍㆱߌࠆߎߣߢ㧘৻ߟߩવᾲ㕙ߢ᭽‫ߥޘ‬ᕈ⾰ࠍᜬߟ᳇ᵃᩭࠍᮨᡆߔࠆ
ߎߣ߇ߢ߈ࠆ㧚࠲ࠍ↪޿ߚᴣ㛛㐿ᆎ᷷ᐲߣᩭ↢ᚑߩ⎇ⓥߣߒߡߪ㧘
Iida ࠄ[9]ߦࠃࠆ⊕㊄⭯⤑ࠍࡅ࡯࠲ߣߔࠆવᾲ㕙ߢߩᴣ㛛ታ㛎ߥߤࠍ᜼ߍࠆߎߣ߇ߢ߈ࠆ㧚 ߎࠇࠄߩታ㛎ߪቅ┙ߒߚ᳇ᵃᩭ߿න৻᳇ᵃߩ↢ᚑࠍታ⃻ߒߡ޿ࠆ߇㧘1 ߪੱᎿࠠࡖࡆ࠹ࠖ߆ࠄ⊒↢ߔࠆవⴕ᳇ᵃߩᓇ㗀߇ㆱߌࠄࠇߕ㧘2 ߪ⎇ⓥ߇ᩭ↢ᚑ⥄りࠍኻ⽎ߣߒߡ޿ࠆߚ߼㧘ᴣ㛛᳇ᵃߩ⊒↢ߪવᾲ㕙ᕈ⁁ߦଐሽߒ㧘೙ᓮߔࠆߎߣߪߢ߈ߡ޿ߥ޿㧚㧚ᩭ↢ᚑߩ೙ᓮ߇น⢻ߥ /'/5 વᾲ㕙
 Nakabeppu and Wakasugi[10]ߪන৻ᴣ㛛᳇ᵃߩ↢ᚑߦ߅޿ߡ㧘ᓟㅀߔࠆ⊒ᵃ࠻࡝ࠟߦࠃߞߡᩭ↢ᚑߩ೙ᓮࠍታ⃻ߒߚ㧚߹ߚ㧘᳇ᵃᩭߩ๟ࠅߦᓸ⚦ߥᾲ㔚ኻࠍടᎿߒ㧘ო㕙᷷ᐲߩ⸘᷹ࠍⴕߞߡ޿ࠆ㧚ᴣ㛛વᾲ㕙᷷ᐲಽᏓߩ⸘᷹ߦߪઁߦ߽㧘㔚᳇ᛶ᛫ߩ᷷ᐲଐሽᕈࠍ೑↪ߒߚ⎇ⓥ㧔ଐሽᕈߩ✢ᒻᕈ߇ࠃ޿ Pt ࠍ೑↪ߔࠆ߽ߩ[11]㧘ᛶ᛫ᄌൻߩᄢ߈޿ඨ
ዉ૕ࠍ૶߁߽ߩ[12]ߥߤ߇޽ࠆ㧕߿᡼኿᷷ᐲ⸘ࠍ
↪޿ߚ⎇ⓥ[13]㧘ᗵ᷷ᶧ᥏[14]ࠍ↪޿ߚ⎇ⓥߥߤࠍ
᜼ߍࠆߎߣ߇ߢ߈ࠆ㧚╩⠪ࠄߪ㧘Nakabeppu andWakasugi[10]ߩ MEMS વᾲ㕙ࠍᡷ⦟ߒ㧘ᣂߚߥ
MEMS વᾲ㕙ࠍ㐿⊒ߒߚ㧚એਅߢߪߘߩ᭎ⷐߣታ
㛎⚿ᨐߩ৻଀ߦߟ޿ߡㅀߴࠆ㧚⹦⚦ߦߟ޿ߡߪ㧘ᢥ₂[15]ࠍෳᾖߐࠇߚ޿㧚
3.1 MEMS વᾲ㕙

Fig. 2: MEMS heat transfer surface.

વᾲ 2009 ᐕ 1 ᦬

Fig. 3: Test section with MEMS heat transfer surface.

-9-

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․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
ߩሽ࿷ߪ㧘⊒ᵃ࠻࡝ࠟ߇⫳᳇ߦⷒࠊࠇ㔚ᭂ㑆ߩᛶ᛫୯߇Ⴧᄢߒ㧘㔚ᵹ୯߇ᷫዋߒߡ޿ࠆߎߣ߆ࠄ߽
ផኤߐࠇࠆ㧚 ᩭ↢ᚑℂ⺰[16]ߦᓥ޿㧘ߎߩᴣ㛛᳇ᵃ߇ࠪ࡝ࠦࡦ࠙ࠚࡂ਄ߩ౞╴ᒻࠠࡖࡆ࠹ࠖ߆ࠄ⊒ᵃߒߚߣߔࠆߣ㧘⊒ᵃᤨߩო㕙ㆊᾲᐲ 12 K㧘ߦኻᔕߔࠆࠠࡖ
ࡆ࠹ࠖߪ㧘ඨᓘ 2.7 Pm ߣߥࠆ㧚ห᭽ߦ⊒ᵃߩ࠲ࠗࡒࡦࠣ߿ㆊᾲᶧጀߩ૞ࠅᣇࠍᄌ߃ࠇ߫᭽‫ߥޘ‬᳇ᵃᩭࠍᮨᡆߔࠆߎߣ߇ߢ߈ࠆ㧚 MEMS વᾲ㕙ߪ㈩✢ᓟ㧘࿑ 3 ߦ␜ߔࠃ߁ߥ⠴ᾲ᮸⢽㧔PEEK㧕⵾ߩ࠹ࠬ࠻࠮࡚ࠢࠪࡦߦࡑ࠙ࡦ࠻ߐ
ࠇ㧘㔚᳇㈩✢ࠍⴕߞߚᓟ㧘᷷ᐲ৻ቯߩ㕒ᱛᵹ૕ਛߦᶐẃߐࠇࠆ㧚એਅߩታ㛎ߦ߅ߌࠆ♽ߩ࿶ജߪᄢ
᳇࿶㧘⹜㛎ᵹ૕ߪ⣕᳇ࠍⴕߞߚ⿥⚐᳓ߢ޽ࠆ㧚
3.2 ታ㛎⚿ᨐߩ৻଀㜞ࠨࡉࠢ࡯࡞ᴣ㛛ߦ߅ߌࠆන৻ᴣ㛛᳇ᵃߩᚑ㐳ߣ፣უ
4.1 ᳇ᵃᓸ⚦ൻᴣ㛛 ╩⠪ࠄߪ㧘㔚ሶ⚛ሶ಄ළߩ࠺ࡃࠗࠬ㐿⊒ࠍ⢛᥊ߣߒߡ㧘ᓸ⚦ᵹ〝ౝߢߩ㜞ࠨࡉࠢ࡯࡞ᐲ㜞ᾲᵹ᧤᧦ઙߦ߅ߌࠆᴣ㛛⃻⽎ࠍ⎇ⓥߒߡ޿ࠆ[17]㧚㜞ࠨࡉࠢ࡯࡞ᐲ㜞ᾲᵹ᧤᧦ઙߢߪ㧘᳇ᵃᓸ⚦ൻᴣ㛛㧔Microbubble Emission Boiling, MEB㧕ߣ๭߫ࠇࠆ
․⇣ߥᴣ㛛⃻⽎߇⿠ߎࠆߎߣ߇⍮ࠄࠇߡ޿ࠆ㧚ߎߩ⃻⽎ߪߘߩฬߩㅢࠅવᾲ㕙߆ࠄ㔕㔰ߩߏߣߊᓸ
⚦ߥ᳇ᵃ߇኿಴ߐࠇࠆߣ޿߁․ᓽࠍ߽ߟ㧚 Zvirin ࠄ[18]ߦࠃߞߡ㧘ᾲߒߚ㊄ዻ⃿ࠍࠨࡉࠢ࡯
࡞ᶧߦᴉ߼ߚ㓙ߦ㧘ㆫ⒖ᴣ㛛㗔ၞߦ߅޿ߡ⫳᳇⤑߆ࠄᓸ⚦᳇ᵃ߇኿಴ߐࠇࠆߎߣ߇⏕⹺ߐࠇߚ㧚
Inada ࠄ[19]ߪࡊ࡯࡞ᴣ㛛♽ߦ߅޿ߡ MEB ࠍ᷹ⷰߒ㧘ߘࠇ߇㧘ㅢᏱਇ቟ቯߥㆫ⒖ᴣ㛛㗔ၞߩવᾲ㕙᷷ᐲߣ㒢⇇ᾲᵹ᧤ࠍ⿥߃ࠆᾲᵹ᧤ߢ቟ቯߦሽ࿷ߔ

Fig. 4: Temperature signal of a single bubble
generation test; 'Tsub = 30 K.

Fig. 5: Bubble growth and temperature signal.
 න৻ᴣ㛛᳇ᵃ↢ᚑታ㛎ߦ߅ߌࠆ⚿ᨐߩౖဳ଀ࠍ
࿑ 4 ߦ␜ߔ㧚ᤨೞ t=0 ߢ⭯⤑ࡅ࡯࠲ߦࠃࠆടᾲ߇
ᆎ߹ࠆߣ㧘વᾲ㕙᷷ᐲ߇਄᣹ߒㆊᾲᶧጀ߇ᒻᚑߐ
ࠇߡ޿ࠆߎߣ߇ಽ߆ࠆ㧚ᰴߦ⸳ቯߒߚ࠲ࠗࡒࡦࠣ
ߢ⊒ᵃ࠻࡝ࠟߦ㔚ᵹࠍᵹߒ㧘᳓⚛᳇ᵃࠍ⊒↢ߐߖ㧘ߘࠇࠍᩭߣߒߡᴣ㛛᳇ᵃ߇ᚑ㐳ߔࠆ㧚ᴣ㛛᳇ᵃߩᚑ㐳ߦࠃߞߡવᾲ㕙߆ࠄᾲ߇ᅓࠊࠇ㧘વᾲ㕙᷷ᐲ߇ᕆ㒠ਅߒߡ޿ࠆߎߣ߇ಽ߆ࠆ㧚ᴣ㛛᳇ᵃߩ᜼േߪ㜞ㅦࠞࡔ࡜ߦࠃߞߡ᠟ᓇߐࠇ㧘↹௝⸃ᨆߦࠃߞ
ߡ᳇ᵃᓘߩᤨ㑆⊒ዷࠍ⸘▚ߔࠆߎߣ߇ߢ߈ࠆ㧚⊒ᵃ⋥ᓟߩ᷷ᐲࠪࠣ࠽࡞ߣᲧߴߚ߽ߩ߇࿑ 5 ߢ޽ࠆ㧚⊒ᵃ⋥ᓟ㧘᳇ᵃᓘߪᕆჇߒ᳇ᵃᐩㇱߩᶧ⤑߇⫳⊒ߔࠆߎߣߢવᾲ㕙᷷ᐲ߇ਅ߇ࠆ㧚ᰴߦ᷷ᐲ߇਄߇
ࠆ㧔࿑ 5 ߩ a-b㧕ߩߪੇ߈㕙߇ߢ߈㧘ዪᚲ⊛ߥᾲャㅍ߇ૐਅߒߚߚ߼ߢ޽ࠆߣ⠨߃ࠄࠇࠆ㧚ੇ߈㕙

વᾲ 2009 ᐕ 1 ᦬- 10 -

ࠆߎߣࠍ␜ߒߚ㧚Kumagai ࠄ[20]ߪ㧘ᵹേᴣ㛛♽ߦ߅޿ߡ㧘MEB ߩ⊒↢ᤨߦવᾲ㕙ઃㄭߢỗߒ޿࿶ജᄌേ߇޽ࠆߎߣߦᵈ⋡ߒ㧘᳇ᵃ᜼േߣߩ㑐ㅪࠍ
␜ߒߚ㧚Suzuki ࠄ[21]ߪ㧘ᵹേᴣ㛛♽ߦ߅ߌࠆᵹ
ㅦ߿ࠨࡉࠢ࡯࡞ᐲࠍࡄ࡜ࡔ࠲ߣߒߡ㧘MEB ߩ⊒↢᧦ઙࠍ⹦⚦ߦᜰቯߒߚ㧚ߎࠇࠄߩ⎇ⓥߩᄙߊߪᾲ
ኈ㊂ߩᄢ߈޿વᾲࡉࡠ࠶ࠢࠍવᾲ㕙ߣߒߡ޿ࠆ㧚વᾲ㕙ߩ᷷ᐲᄌേߪߘߩᾲኈ㊂ߦᄢ߈ߊଐሽߔࠆ
ߚ߼㧘ዊဳൻ߇ⷐ᳞ߐࠇࠆታ㓙ߩ಄ළ࠺ࡃࠗࠬ߳
ߩᔕ↪ࠍ⠨ᘦߔࠆߣ㧘ᾲኈ㊂ߩዊߐ޿♽ߢታ㛎ࠍⴕ޿㧘MEB ߇ታ⃻ߢ߈ࠆ߆ߤ߁߆⺞ߴࠆᔅⷐ߇޽
ࠆ㧚ታ㓙㧘ᾲኈ㊂ߩዊߐߥടᾲ㊄ዻ⚦✢ࠍવᾲ㕙ߣߔࠆታ㛎[22]ߢߪ㧘㜞ࠨࡉࠢ࡯࡞ᴣ㛛ߦ߅޿ߡᓸ⚦᳇ᵃߩ኿಴ߣ㒢⇇ᾲᵹ᧤ߩ਄᣹ߪ⏕⹺ߐࠇࠆ߽ߩߩ㧘ᾲኈ㊂ߩᄢ߈޿વᾲ㕙ߩࠃ߁ߥᩭᴣ㛛ߣ
MEB ߣߩ᣿⏕ߥႺ⋡߇⃻ࠇߥ޿㧚

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4.2 ᳇ᵃ᜼േߩᾲᵹ᧤࡮ടᾲᤨ㑆ଐሽᕈ

Fig. 6: Bubbling pattern map; 'Tsub = 50 K.
 3.1 ▵ߢ␜ߒߚ MEMS વᾲ㕙ࠍ↪޿㧘㜞ࠨࡉࠢ࡯࡞㜞ᾲᵹ᧤᧦ઙߦ߅ߌࠆන৻ᴣ㛛᳇ᵃߩᚑ㐳ߣᄌᒻ㧘෸߮ᓸ⚦᳇ᵃߩ኿಴ߦߟ޿ߡ㧘ߘߩ⊒↢᧦ઙࠍ᣿ࠄ߆ߦߔࠆߎߣࠍ⋡⊛ߣߒߡታ㛎ࠍⴕߞߚ㧚⊒ᵃ࠻࡝ࠟߢᴣ㛛᳇ᵃߩ⊒ᵃࠍࠦࡦ࠻ࡠ࡯࡞ߔࠆ
ᧄታ㛎ߢߪ㧘ㅢᏱߩવᾲ㕙ߢߪ೙ᓮߢ߈ߥ޿⊒ᵃ߹ߢߩടᾲᤨ㑆ࠍታ㛎ߩࡄ࡜ࡔ࠲ߣߔࠆߎߣ߇ߢ
߈ࠆ㧚࿑ 6 ߦߪ㧘❑ゲߦᾲᵹ᧤㧘ᮮゲߦ⊒ᵃ߹ߢߩടᾲᤨ㑆ࠍขࠅ㧘ࠨࡉࠢ࡯࡞ᐲ 50 K ߢߩ᳇ᵃ᜼േࠍએਅߩ 4 ߟߩࡄ࠲࡯ࡦߦಽߌ㧘⊒↢᧦ઙࠍࡑ࠶ࡊߦߒߡ޿ࠆ㧦 Oscillation㧦ᾲᵹ᧤߇ૐߊടᾲᤨ㑆߇⍴޿႐ว㧘ㆊᾲᶧጀߩᒻᚑߦวࠊߖ᳇ᵃ߇૕Ⓧᝄേߒߥ߇ࠄ
߽ᚑ㐳ߔࠆ㧚ߎࠇߪ Kuzma-Kichta ࠄ[23]߇ႎ๔ߒ
ߡ޿ࠆૐࠨࡉࠢ࡯࡞ᴣ㛛ߦ߅ߌࠆ᳇ᵃᝄേߣห᭽
ߩᯏ᭴ߦࠃࠆ߽ߩߣ⠨߃ࠄࠇࠆ 㧚 No Oscillation㧦ᾲᵹ᧤߇㜞ߊടᾲᤨ㑆߇⍴޿႐ว㧘વᾲ㕙᷷ᐲߩ㜞ߐ߆ࠄೋᦼᚑ㐳ㅦᐲߪᄢ߈ߊ
ߥࠆ߇㧘ㆊᾲᶧጀෘߐ߇⭯ߊ㧘ߔߋࠨࡉࠢ࡯࡞ᶧ
ߦ⸅ࠇࠆߎߣߢ᳇ᵃ߇ᶖṌߒߡߒ߹߁㧚 Single Bubble㧦ߐࠄߦടᾲᤨ㑆߇㐳ߊߥࠆߣㆊ
ᾲᶧጀ߇ෘߊ ߥࠆߚ߼ ᳇ᵃ߇ᄢ ߈ߊᚑ㐳 ߒ㧘
Oscillation ࡄ࠲࡯ࡦߩࠃ߁ߥ૕Ⓧᝄേߦട߃㧘᳇ᵃ߇஍ᐔߦߥߞߚࠅ❑㐳ߦߥߞߚࠅߣ޿߁ᒻ⁁ᝄേ߇⿠ߎࠆ㧚ᒻ⁁ᝄേߩ࿁ᢙߪ᧦ઙߦࠃࠆ߇㧘޽ࠆߣ߈❑㐳ߦߥߞߚ᳇ᵃߩవ┵߇ߜ߉ࠇ㧘৻ߟߩᓸ⚦ߥ᳇ᵃ߇኿಴ߐࠇࠆ㧚㧔࿑ 7 ߦߪࠨࡉࠢ࡯࡞
ᐲ 30 K ߢⷰኤߐࠇߚࡏ࠙࡝ࡦࠣߩࡇࡦߩࠃ߁ߥ
᳇ᵃߣߘߎ߆ࠄߩන৻ᓸ⚦᳇ᵃߩ኿಴ࠍ␜ߔ㧕㧚
 Fission㧦㜞ᾲᵹ᧤㧘㐳ടᾲᤨ㑆㧔ᾲᵹ᧤ 2 MW/m2એ਄㧘ㆊᾲᶧጀෘߐ 135 Pm એ਄㧕ߢߪ Single
Bubble ࡄ࠲࡯ࡦࠃࠅ߽ỗߒ޿ᄌᒻ߇⿠ߎࠆ㧚࿑ 8ߦ␜ߔࠃ߁ߦ㧘ᚑ㐳ᤨߪ⃿ᒻࠍ଻ߜᄢ߈ߊᚑ㐳ߔࠆ߇㧘෼❗ߩㆊ⒟ߢ᳇ᵃߩਛ⒟߇ߊ߮ࠇ㧘ᄢ߈ߥ⫳᳇႙ࠍࠨࡉࠢ࡯࡞ᶧਛ߳኿಴ߔࠆ㧚ߘࠇ߇ಝ❗
ߒⶄᢙߩᓸ⚦᳇ᵃߦಽⵚߔࠆ㧚࿑ 9 ߩࠃ߁ߦห᭽
ߩ⃻⽎ߪടᾲ⚦✢਄ߩ㜞ࠨࡉࠢ࡯࡞ᴣ㛛[24]ߢ߽
⏕⹺ߐࠇߡ߅ࠅ㧘ടᾲ⚦✢਄ߩᓸ⚦᳇ᵃ↢ᚑࡔࠞ࠾࠭ࡓߪ㧘ߎߩ Fission ࡄ࠲࡯ࡦߣห᭽ߩ߽ߩߢ޽
ࠆߣ⠨߃ࠄࠇࠆ㧚 વᾲࡉࡠ࠶ࠢ♽ߦ߅ߌࠆ MEB ߢߪว૕᳇ᵃ߆ࠄᓸ⚦᳇ᵃ߇኿಴ߐࠇߡ߅ࠅ㧘න৻᳇ᵃߩᧄታ㛎߆ࠄᄙߊߩߎߣࠍ⸒߁ߎߣߪߢ߈ߥ޿߇㧘ᓸ⚦᳇ᵃߩ኿಴ࡔࠞ࠾࠭ࡓߦ㑐ߒߡߪ㧘౒ㅢߔࠆㇱಽ߇޽ࠆ߽ߩߣ⠨߃ࠄࠇࠆ㧚

Fig. 7: Successive snapshots of single bubble pattern; q = 1.0 MW/m2, and 'Tsub = 30 K, tb = 75 ms.

Fig. 8: Successive snapshots of bubble fission on a MEMS heat transfer surface; t' denotes interval from thenucleation; q = MW/m2, 'Tsub = 50 K, tb = 47.2 ms.

વᾲ 2009 ᐕ 1 ᦬- 11 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ









Fig. 9: Successive snapshots of bubble fission on a heated wire at 50 Ps intervals; q = 2 MW/m2, and 'Tsub = 40 K.
㧚߅ࠊࠅߦ
 MEMS વᾲ㕙਄ߦ߅ߌࠆන৻ᴣ㛛᳇ᵃ↢ᚑߩ⎇ⓥࠍ⚫੺ߔࠆߣߣ߽ߦ㧘╩⠪ࠄ߇㐿⊒ߒߚ㧘⭯⤑ࡅ࡯࠲ߣ⊒ᵃ࠻࡝ࠟߦࠃߞߡㆊᷰടᾲߣ⊒ᵃ೙ᓮࠍน⢻ߣߔࠆ MEMS વᾲ㕙ߦߟ޿ߡㅀߴߚ㧚߹ߚ㧘᳇ᵃᓸ⚦ൻᴣ㛛ߦ㑐ㅪߒߡ㧘㜞ࠨࡉࠢ࡯࡞ᐲ
㜞ᾲᵹ᧤᧦ઙߦ߅ߌࠆ᳇ᵃߩᄌᒻߣᓸ⚦᳇ᵃߩ኿಴ߦߟ޿ߡߩታ㛎⚿ᨐࠍ␜ߒߚ㧚ᓸ⚦᳇ᵃߩ኿಴᧦ઙࠍᾲᵹ᧤ߣടᾲᤨ㑆ߣ޿߁ᭂ߼ߡၮ␆⊛ߥࡄ࡜ࡔ࠲ߢ␜ߔߎߣ߇ߢ߈ߚ㧚 ╩⠪ߦߣߞߡ MEMS વᾲ㕙ߩ㝯ജߣߪ㧘੹߹ߢ᷹ࠇߥ߆ߞߚ߽ߩ㧔ᓸ⚦ᾲ㔚ኻߦࠃࠆო㕙᷷ᐲಽᏓ㧕߇᷹ࠇࠆߣ޿߁ߎߣߛߌߢߥߊ㧘೙ᓮߢ߈ߥ
߆ߞߚ߽ߩ㧔ᩭ↢ᚑ㧘ᴣ㛛᳇ᵃߩ⊒ᵃ࠲ࠗࡒࡦࠣ㧕߇೙ᓮߢ߈ࠆߎߣߦ߽޽ࠆߣᗵߓߡ޿ࠆ㧚 ᧄⓂߪ‫ޟ‬MEMS વᾲ㕙ࠍ↪޿ߚᴣ㛛ᯏ᭴ߩ⸃᣿‫ߣޠ‬㗴ߒߡߪ޿ࠆ߽ߩߩ㧘⃻ᤨὐߢߪ MEMSવᾲ㕙ࠍ㐿⊒ߒ㧘ߘߩ᦭↪ᕈࠍ␜ߔߦ⇐߹ߞߡ޿ࡀ࡞ߦࠃࠆ㜞ᕈ⢻ᾲ੤឵࠺ࡃࠗࠬߩ㐿⊒‫߮ࠃ߅ޠ‬⑼ቇ⎇ⓥ⾌⵬ഥ㊄㧔․೎⎇ⓥຬᅑബ⾌㧘⺖㗴⇟ภ
11038㧕ߩഥᚑߩ߽ߣⴕࠊࠇߚ㧚⎇ⓥߦ޽ߚߞߡߪ㧘᧲੩ᄢቇ㜞ᧁ๟ಎᢎ᝼㧘᧲੩ᄢቇ┻᧛ᢥ↵ᢎ᝼㧔↥ᬺᛛⴚ✚ว⎇ⓥᚲ㧕㧘␹ᄹᎹᄢቇᐣมᱜᒄᢎ᝼ߩߏ
ഥജࠍᓧ㧘ߐ߹ߑ߹ߥ⼏⺰ࠍߐߖߡ޿ߚߛ޿ߚ㧚
MEMS વᾲ㕙ߩ૞ᚑߦ޽ߚߞߡߪ㧘᣿ᴦᄢቇߩਛ
೎ᐭୃᢎ᝼㧘᧲੩Ꮏᬺᄢቇߩ⧯᧖⑲᣿᳁㧘↥ᬺᛛⴚ✚ว⎇ⓥᚲߩ᧻ᧄჽᐔ᳁㧘࿾ᣇ⁛┙ⴕ᡽ᴺੱ᧲
੩ㇺ┙↥ᬺᛛⴚ⎇ⓥ࠮ࡦ࠲࡯ߩ⍹᧤⌀ౖ᳁㧘ടᴛࠛ࡝࠻᳁㧘ᬀ᧻ථᒾ᳁㧘ᬢᝄ᳁ߦߏදജ޿ߚߛ޿
ߚ㧚߹ߚ㧘㜞ㅦࠞࡔ࡜ߦࠃࠆ᠟ᓇߦ㑐ߒߡ㧘↥ᬺᛛⴚ✚ว⎇ⓥᚲߩቬ௝㋕㓶᳁ߦߏදജ޿ߚߛ޿ߚ㧚ߎߎߦ⸥ߒᗵ⻢ߩᗧࠍ⴫ߒ߹ߔ㧚ෳ⠨ᢥ₂[1] Webb, R. L., Principles of enhanced heat transfer,John Wiley & Sons, Inc., (1994).
[2] A. Koúar and Yoav Peles, Boiling heat transfer inrectangular microchannels with reentrant cavities,
Int. J. Heat Mass Transfer, 48, (2005), pp.
4867-4886.
[3] Honda, H., Takamatsu, H., and Wei, J.J.,
Enhanced boiling of FC-72 on silicon chips withmicro-pin-fins and submicron-scale roughness,
ASME Journal of Heat Transfer, 124, (2002), pp.
383–390.
[4] Han, C., and Gri th, P., “The mechanism of heattransfer in nucleate boiling — Part I”, Int. J. of
Heat Mass Transfer, 8, (1965), pp. 887–904.
[5] Son, G., Dhir, V. K., and Ramanujapu, N.,
Dynamics and heat transfer associated with asingle bubble during nucleate boiling on ahorizontal surface, ASME Journal of Heat
Transfer, 121, (1999), pp. 623-631.
[6] Dhir, V. K., Mechanistic prediction of nucleateࠆߩߢ㧘᳇ᵃᐩㇱߩᶧ⤑᭴ㅧߣᴣ㛛ᾲવ㆐ᯏ᭴ߩ
㑐ଥࠍ⸃ᨆߔࠆߎߣ߇੹ᓟߩ⺖㗴ߢ޽ࠆ㧚߹ߚ㧘MEMS વᾲ㕙ࠍ૶ߞߡℂᗐ⊛ߥታ㛎᧦ઙࠍ૞ࠅ
ၮ␆⊛ߥ⎇ⓥߦน⢻ᕈࠍਈ߃ࠆߎߣ߇ߢ߈ࠆ৻ᣇ
ߢ㧘ታ㓙㕙ߢ⿠ߎߞߡ޿ࠆߎߣߣߩࠡࡖ࠶ࡊߪᐢ
߇ߞߡߒ߹߁ߎߣߦ߽ᵈᗧߒߥߌࠇ߫ߥࠄߥ޿㧚ታ㓙ߩᔕ↪ߦኻߒ㧘ᓧࠄࠇߚ⚿ᨐ߆ࠄ૗߇޿߃ࠆ
߆㧘૗߇ߢ߈ࠆ߆ߣ޿߁ߎߣࠍᗧ⼂ߒߥߊߡߪߥ
ࠄߥ޿ߣ⠨߃ߡ޿ࠆ㧚଀߃߫㧘޽ࠆ಄ළ࠺ࡃࠗࠬ
ߦኻߒߡᦨㆡߩᕈ⾰ࠍᜬߟ᳇ᵃᩭࠍឭ᩺ߢ߈ߚߣ
ߒߡ㧘ߘࠇࠍߟߊࠇࠆߩߛࠈ߁߆㧫ߣ޿߁⇼໧ߦኻߒߡ㧘╵߃ࠍਈ߃ࠆߦߪᧂߛᄙߊߩ໧㗴߇ᱷߞߡ޿ࠆ㧚⻢ㄉ ᧄⓂߢ⚫੺ߒߚ⎇ⓥߪ㧘ᐔᚑ 16 ᐕᐲណᛯ㧔⽷㧕᧲㔚⸥ᔨ⑼ቇᛛⴚ⎇ⓥᚲ⎇ⓥഥᚑ‫ࡖ࠴ࡠࠢࠗࡑޟ‬વᾲ 2009 ᐕ 1 ᦬- 12 -J. HTSJ, Vol. 48, No. 202

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boiling heat transfer - achievable or hopeless task?,
ASME Journal of Heat Transfer, 128, (2006), pp.
1-12.
[7] Shoji, M. and Takagi, Y, “Bubbling features froma single artificial cavity”, Int. J. Heat Mass
Transfer, 44, (2001), pp. 2763–2776.
[8] Li, J., and Peterson, G. P., “Microscale
heterogeneous boiling on smooth surfaces — frombubble nucleation to bubble dynamics”, Int. J.
Heat Mass Transfer, 48, (2005), pp. 4316–4332.
[9] Iida, Y., Okuyama, K., and Sakurai, K., Boiling
nucleation on a very small film heater subjected to
extremely rapid heating, Int. J. Heat Mass
Transfer, 37, (1994), pp. 2771-2780.
[10] Nakabeppu, O., and Wakasugi, H., “Approach toheat transfer mechanism beneath single boilingbubble with MEMS sensor”, In Proc. of 13th
International Heat Transfer Conference, (2006),
BOI-43 (CD-ROM).
[11] Moghaddam, S., Kiger, K. T., Henriette, J. M.,
and Ohadi, M., “Fabrication and testing of a novel
microelectromechanical device for the study ofboiling bubble dynamics”, In Proc. of ASME
International Mechanical Engineering Congress,(2003), pp. 107–114.
[12] Cooper, M. G. and Lloyd, A. J. P. “Miniature thinfilm thermometers with rapid response”, J. of
Scientific Instruments, 42, (1965), pp. 791–793.
[13] Zhang, L., and Shoji, M., Nucleation site
interaction in pool boiling on the artificial surface,Int. J. of Heat Mass Transfer, 46, (2003), pp.
513-522.
[14] Kenning, D. B. R., and Yan, Y., “Pool boiling heattransfer on a thin plate: features revealed by liquid
crystal thermography”, Int. J. Heat Mass Transfer,
15, (1996), pp. 3117–3137.
[15] Tange, M., Takagi, S., Takemura, F., and Shoji,M., Bubble growth and fission on MEMS heattransfer surfaces under subcooled boilingconditions, Trans. of JSME B, (submitted).

વᾲ 2009 ᐕ 1 ᦬[16] Carey, V. P., Liquid-vapor phase-change
phenomena, Taylor & Francis, (1992).
[17] Tange, M., Yuasa, M., Takagi, S., and Shoji, M.,“Microbubble
Emission
BoilinginaMicrochannel and Minichannel”, Thermal Scienceand Engineering, 12-6, (2004), pp. 23–29.
[18] Zvirin, Y., Hewitt, G. F., and Kenning, D. B. R.,
Experimental study of drag and heat transfer
during boiling on free falling spheres, Heat andTechnology, 7-3-4, (1989), pp. 13-23.
[19] Inada, S., Miyasaka, Y., Sakumoto, S., andChandratilleke, G. R., “Liquid-solid contact statein subcooled pool transition boiling system”,
ASME Journal of Heat Transfer, 108, (1986), pp.
219–221.
[20] Kumagai, S., Uhara, T., Nakata, T., and Izumi, M.,
Liquid-solid contact in microbubble emission
boiling through void signals, Trans. of JSME B,
67, (2001), pp. 2304-2310.
[21] Suzuki K., Torikai, K., Satoh, H., Ishimaru, J.,
and Tanaka, Y., “Boiling heat transfer ofsubcooled water in a horizontal rectangularchannel (observation of MEB and MEB
generation)”, Trans. of JSME B, 65, (1999), pp.
3097–3104.
[22] Shoji, M. and Yoshihara, M., Observation of
microbubble emission boiling, J. visualizationsociety of Japan, 11, (1991), pp. 143-148.
[23] Kuzma-Kichta, Y., Ustinov, A. K., Ustinov, A. A.,
and Kholpanov, L., Investigation of interface
oscillations during boiling, In proc. of the thirdinternational conference on transport phenomena
in multiphase systems, (2002), pp. 45-52.
[24] Shoji, M., Tange, M., Watanabe, M., Kamoshida,J., Sasaki, K., “Subcooled pool boiling on aheated wire with microbubble emission”, In Proc.
of EECI International Conference on Boiling Heat
Transfer, (2006), paper no. 30 (CD-ROM).

- 13 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ

శ MEMS ࠍ↪޿ߚࡑࠗࠢࡠᾲ‛ᕈ࠮ࡦࠨ࡯
Micro Thermophysical Properties Sensor using Optical MEMS↰ญ ⦟ᐢ㧔ᘮᙥ⟵Ⴖᄢቇ㧕㧘㐳ဈ 㓶ᰴ㧔ᘮᙥ⟵Ⴖᄢቇ㧕
Yoshihiro TAGUCHI (Keio University), Yuji NAGASAKA (Keio University)e-mail: tag@sd.keio.ac.jpߪߓ߼ߦ
ᧄ⎇ⓥቶߢߪ㧘ߎࠇ߹ߢߦᤨⓨ㑆ಽ⸃⢻߇㕖Ᏹߦ㜞޿శቇ⊛᷷ᐲ࡮ᾲ‛ᕈ⸘᷹ᛛⴚࠍ㐿⊒ߒߡ߈ߚ㧚଀߃߫㧘㜞ᾲવዉᕈ⭯⤑ߩᾲ‛ᕈ⇣ᣇᕈࠍ㜞ㅦ߆ߟࡑࠗࠢࡠࡔ࡯࠻࡞ࠝ࡯࠳࡯ߩⓨ㑆ಽ⸃⢻ߢ⸘᷹น⢻ߥേ⊛ᩰሶടᾲᴺߦࠃࠅ㧘ࠣ࡜ࡈࠔࠗ࠻
ࠪ࡯࠻╬ߩ㕙ౝ߅ࠃ߮ෘߺᣇะߩ᷷ᐲવዉ₸⇣ᣇᕈࠍ᣿ࠄ߆ߦߒߡ߈ߚ[1]㧚߹ߚ৻ᣇߢ㧘ㄭធ႐Ⱟశࠍ↪޿ߚ࠽ࡁࠬࠤ࡯࡞᷷ᐲ࡮ᾲ‛ᕈ⸘᷹ᛛⴚߦ
ࠃࠅ㧘100 nm ߩⓨ㑆ಽ⸃⢻ߢዪᚲ⊛ߥ᷷ᐲᄌൻߩ
ᬌ⍮ߦᚑഞߒߡ޿ࠆ[2]㧚⃻࿷ߪ㧘㕖Ᏹߦ㜞޿ⓨ㑆ಽ⸃⢻ߢᐢ▸࿐ߩ‛ᕈᖱႎࠍ࠮ࡦࠪࡦࠣߔࠆ㧔ᔅⷐᛛⴚ㧦⿥ዊဳൻ㧘ࠕ࡟ࠗൻ߿㜞ㅦࠬࠠࡖ࠾ࡦࠣ㧕㧘޽ࠆ޿ߪ㕖Ᏹߦ㜞޿ᤨ㑆ಽ⸃⢻ߢ㐳ᤨ㑆ߦࠊߚߞߡࡕ࠾࠲࡝ࡦࠣߔࠆ㧔ᔅⷐᛛⴚ㧦ᄖㇱᡓੂᛥ೙ߦ
ࠃࠆ♽ߩ቟ቯൻ㧕ߎߣߢࡊࡠ࠳࡚ࠢࠪࡦࡊࡠ࠮ࠬ
ߩᦨㆡൻ߿ᣂߒ޿᧚ᢱഃᚑࠍᮡ᭙ߒ㧘ߎࠇ߹ߢߦ
㐿⊒ߒߡ߈ߚశቇ⊛᷷ᐲ࡮ᾲ‛ᕈ⸘᷹ᛛⴚߣశ

ಽ⸃ᐢၞᾲ‛ᕈ࠮ࡦࠪࡦࠣߩ᭎ᔨ࿑ࠍ␜ߒߚ㧕㧚శMEMS ᛛⴚߪ㧘࠺ࠖࠬࡊ࡟ࠗಽ㊁[3, 4]߿ᖱႎㅢା
ಽ㊁[5]ߢߩ㐿⊒߇⋡ⷡߒߊ㧘⃻࿷ߢߪౝⷞ㏜ߥߤ
߳ߩᔕ↪߇ࠃ߁߿ߊᆎ߹ߞߚ߫߆ࠅߢ޽ࠆ[6-8]㧚
଀߃߫ McCormick ࠄߪࡑࠗࠢࡠࡒ࡜࡯ࠍ៞タߒ
ߚౝⷞ㏜ࠍ㐿⊒ߒ㧘ჿᏪߩ 3 ᰴరᢿጀ௝ࠍ in vivoߢⷰኤߔࠆߎߣߦᚑഞߒߡ޿ࠆ[7]㧚৻ᣇߢ㧘Ra
ࠄߪ 2 ゲ౒ὶὐⰯశౝⷞ㏜ࠍ㐿⊒ߒ㧘㜞ⓨ㑆ಽ⸃⢻ߣᐢⷞ㊁ߦࠃࠆ㘩㆏≸ߩᣧᦼ⊒⷗ᛛⴚࠍ⏕┙ߒ
ߚ[8]㧚ߒ߆ߒߥ߇ࠄ㧘ߎࠇࠄశ MEMS ࠺ࡃࠗࠬߢߪ㧘ᓧࠄࠇࠆᖱႎߪଐὼߣߒߡ࠺ࠫ࠲࡞⊛㧔᦭ࠆ߆ή޿߆㧕ߥ߽ߩߢ޽ࠅ㧘‛ᕈ⸘᷹߇น⢻ߥశ
MEMS ࠺ࡃࠗࠬߪ⊝ήߢ޽ࠆ㧚ߎࠇߪ㧘⸘᷹ᛛⴚߩ⠨᩺߆ࠄశ࡮ᾲ࡮㔚᳇࡮ᯏ᪾࡮᧚ᢱ⸳⸘߹ߢࠍ
৻⽾ߒߡⴕࠊߥߌࠇ߫ߥࠄߕ㧘㕖Ᏹߦⶄ㔀ߢ޽ࠆߎߣߦ⿠࿃ߔࠆ㧚ⓨ㑆ಽ⸃⢻޽ࠆ޿ߪ᷹ቯኻ⽎ߣ޿߁ᗧ๧ߩ‫࠽ޟ‬ࡁ࡮ࡑࠗࠢࡠߩ⸘᷹ᛛⴚ‫ઁ⹹ᧄߪߡ޿ߟߦޠ‬Ⓜ߿
⪺⠪ࠄߩߎࠇ߹ߢߩ⺰ᢥ[2]ࠍෳ⠨ߦߒߡ޿ߚߛ
߈㧘ᧄⓂߢߪశ MEMS ᛛⴚߣశቇ⊛ᾲ‛ᕈ⸘᷹ᛛⴚࠍ㕟ᣂ⊛ߦⲢวߐߖߚࡑࠗࠢࡠࠨࠗ࠭ߩశቇ⊛ᾲ‛ᕈ࠮ࡦࠨ࡯ߦߟ޿ߡ⚫੺ߔࠆ㧚ᧄ࠮ࡦࠨ࡯ߦ
ࠃࠅ㧘㜞޿ⓨ㑆ಽ⸃⢻㧔ࡑࠗࠢࡠࡔ࡯࠻࡞ࠝ࡯࠳
࡯㧚⪺⠪ࠄ߇ઁࡊࡠࠫࠚࠢ࠻ߢ㐿⊒ߒߡ޿ࠆㄭធ
႐శቇᾲ㗼ᓸ㏜ߩࠃ߁ߥశߩ࿁᛬㒢⇇ࠍ⿥߃ࠆ⿥
⸃௝ߪᓧࠄࠇߥ޿߽ߩߩ㧕ߢᓸዋ㊂ࠨࡦࡊ࡞㧔㨪ࡑࠗࠢࡠ࡝࠶࠻࡞ࠝ࡯࠳࡯㧕ߩᾲ‛ᕈ୯ࠍ࡝ࠕ࡞
࠲ࠗࡓ㧔ᢙ⊖࠽ࡁ⑽㨪ࡑࠗࠢࡠ⑽ࠝ࡯࠳࡯㧕ߢ࠮ࡦࠪࡦࠣߔࠆߎߣ߇น⢻ߣߥࠅ㧘ᤨ‫ޘ‬ೞ‫ߣޘ‬ᄌൻߔࠆᾲ‛ᕈ୯ࠍࡕ࠾࠲࡝ࡦࠣߒߥ߇ࠄࡊࡠ࠮ࠬࠍ
ࠦࡦ࠻ࡠ࡯࡞ߔࠆ㧘ߔߥࠊߜᚒ‫߇ޘ‬ឭ᩺ߔࠆ‫ࠨޟ‬࡯ࡑ࡞ࠪࠬ࠹ࡓ࠺ࠩࠗࡦ‫߇ޠ‬ታ⃻ߔࠆ㧚ᰴ┨ߢߪᣂⷙߦ㐿⊒ߒߚ‫☼ࡠࠢࠗࡑޟ‬ᕈ࠮ࡦࠨ࡯㧦MOVS
㧔Micro Optical Viscosity Sensor㧕‫ࡠࠢࠗࡑޟߣޠ‬᜛ᢔ ࠮ ࡦ ࠨ ࡯ 㧦 MODS 㧔 Micro Optical Diffusion
Sensor㧕‫ࠆߔ⺑⸃ߡ޿ߟߦޠ‬㧚

MEMS㧔Microelectromechanical Systems㧕ᛛⴚࠍⲢวߐߖߚోߊᣂߒ޿࠮ࡦࠨ࡯ߩ㐿⊒ࠍⴕߞߡ޿ࠆ
㧔࿑ 1 ߦࡑࠗࠢࡠᾲ‛ᕈ࠮ࡦࠨ࡯ߦࠃࠆ⿥ᤨⓨ㑆࿑ 1 శቇ⊛ࡑࠗࠢࡠᾲ‛ᕈ࠮ࡦࠨ࡯ߦࠃࠆ⿥ᤨⓨ㑆ಽ⸃ᐢၞᾲ‛ᕈ࠮ࡦࠪࡦࠣ᭎ᔨ࿑

વᾲ 2009 ᐕ 1 ᦬- 14 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
ࡑࠗࠢࡠ☼ᕈ࠮ࡦࠨ࡯
ㄭᐕ㧘᦭ᯏ⭯⤑ߥߤߩᚑ⤑ੇ῎ㆊ⒟ߦ߅ߌࠆ☼ᕈ₸ߩᤨ♽೉ᄌൻ߿ࡓ࡜ࠍ࡝ࠕ࡞࠲ࠗࡓߦࡕ࠾࠲
࡝ࡦࠣߒࡊࡠ࠮ࠬࡈࠖ࡯࠼ࡃ࠶ࠢߦࠃࠆᣂߒ޿ᯏ
⢻ᕈ⤑ߩ㐿⊒߿⭯⤑ຠ⾰ߩะ਄߇ᦼᓙߐࠇߡ޿ࠆ
[9]㧚ࠗࡦࡊࡠ࠮ࠬߢߩ☼ᕈ₸࠮ࡦࠪࡦࠣߦ᳞߼ࠄ
ࠇࠆᕈ⢻ߣߒߡ㧘Ԙ㕖ធ⸅᷹ቯߢ޽ࠆߎߣԙᤨⓨ㑆ಽ⸃⢻߇㜞޿ߎߣ
Ԛ2 ᰴరಽᏓ⸘᷹㧔ࠕ࡟ࠗൻ㧕߇น⢻ߢ޽ࠆߎߣ
ԛᝄേ߿⫳⊒ߩᓇ㗀ࠍฃߌߦߊ޿ߎߣ
߇᜼ߍࠄࠇࠆ㧚⪺⠪ࠄߪߎࠇࠄߩⷐ᳞ࠍḩߚߔࡑࠗ ࠢ ࡠ ☼ ᕈ ࠮ ࡦ ࠨ ࡯ 㧔 Micro Optical Viscosity
Sensor: MOVS㧕ࠍ㐿⊒ߒߡ߈ߚ[10, 11]㧚
࿑ 2 ߦ MOVS ᄖⷰࠍ␜ߒߚ㧚MOVS ߪ㕖Ᏹߦዊߐߊ㧔12.6 mm6 mm0.8 mm㧕㧘ᓥ᧪ߩశቇ⊛☼ᕈ⸘᷹ᴺߣᲧセߒߡᬌ಴ㇱߩⷐ⚛ߩ৻ㄝߩᄢ߈
ߐ߇ 1/1000 એਅߢ޽ࠆ㧚᷹ቯේℂࠍ࿑ 3 ߦ␜ߒߚ㧚࿑ 4 ࡑࠗࠢࡠ☼ᕈ࠮ࡦࠨ࡯ߩ⿛ᩏဳ㔚ሶ㗼ᓸ㏜௝㧚⋥ᓘ߇⇣ߥࠆ 2 ⒳㘃ߩࡈࠔࠗࡃ࡯㧔PCF ߣ CLF㧕߇Ḵߦ߫ߨᯏ᭴ߦࠃߞߡ଻ᜬߐࠇߡ޿ࠆ㧚ࠕ࡜ࠗࡔࡦ࠻♖ᐲߪr0.5 Pm ⒟ᐲ㧚ᶧ૕⹜ᢱ⴫㕙ߪ㧘ࡈࠜ࠻࠾࠶ࠢࠢ࡝ࠬ࠲࡞ࡈࠔࠗ
ࡃ࡯㧔PCF㧕ౝࠍવㅍߐࠇߚࡄ࡞ࠬ࡟࡯ࠩ࡯ߩ 2శ᧤ᐓᷤߦࠃߞߡ⍍㑆⊛ߦടᾲߐࠇ㧘㕖Ᏹߦᓸ⚦㧔ᝄ᏷࠽ࡁࡔ࡯࠻࡞ࠝ࡯࠳࡯㧘ᵄ㐳ࡑࠗࠢࡠࡔ࡯
࠻࡞ࠝ࡯࠳࡯㧕ߥ⴫㕙ᵄ߇⺃⿠ߐࠇࠆ㧚ߎߩ⴫㕙ᵄߩᷫ⴮ᝄേ․ᕈࠍ⸃ᨆߔࠆߎߣߦࠃߞߡ㧘㕖ធ⸅ߢ⹜ᢱߩ☼ᕈ₸ߣ⴫㕙ᒛജࠍ᷹ቯߔࠆߎߣ߇ߢ
߈ࠆ㧚⴫㕙ᵄߩ᜼േࠍⷰኤߔࠆߚ߼ߦ㧘ࠦ࡝ࡔ࡯࠻࡟ࡦ࠭ࡈࠔࠗࡃ࡯㧔CLF㧕ߦࠃߞߡવㅍߐࠇߚ
ⷰኤశࠍ⴫㕙ᵄ਄ߦᾖ኿ߒ㧘৻ᰴ࿁᛬శࠍᬌ಴ߒ
ߡ޿ࠆ㧚ᧄ࠴࠶ࡊߢ⸘᷹ߔࠆ࡟࡯ࠩ࡯⺃⿠⴫㕙ᵄߩᷫ⴮ᤨቯᢙߪᢙ⊖࠽ࡁ⑽ࠝ࡯࠳࡯ߢ޽ࠅ㧘㕖Ᏹߦ㜞ㅦߥᷫ⴮᜼േࠍⷰኤߔࠆߎߣߢ㜞ㅦߥ☼ᕈ₸᷹ቯ߇น⢻ߢ޽ࠆ㧚ࠕ࡜ࠗࡔࡦ࠻♖ᐲ߇ 0.5 Pm ⒟ᐲߢ࠴࠶ࡊࡄ࠲࡯ࡦࠍ SOI㧔Silicon-on-Insulator㧕࠙ࠛࡂߦォ౮น⢻ߥࡈࠜ࠻࡝࠰ࠣ࡜ࡈࠖ࡯ᛛⴚߣ㧘㜞ࠕࠬࡍࠢ࠻Ყߢ Si ࠍᷓជࠅน⢻ߥ࠼࡜ࠗࠛ࠶
࠴ࡦࠣᛛⴚࠍ↪޿ߡ૞⵾ߒߚ MOVS ߩ⿛ᩏဳ㔚ሶ㗼ᓸ㏜௝ࠍ࿑ 4 ߦ␜ߒߚ㧚ടᾲ↪ߩ PCF ߣⷰኤ㧔౗೙ᓮ㧕↪ߩ CLF ߇⸳⸘ㅢࠅߦࡄ࠶ࠤ࡯ࠫࡦࠣ
ߐࠇߡ޿ࠆߎߣ߇ಽ߆ࠆ㧚ടᾲశߩᐓᷤ❋㑆㓒㧔2
ᧄߩ PCF ߩ੤Ꮕⷺᐲߦ⋧ᒰ㧕ࠍ 4 Pm ߢ⸳⸘ߒߚ
႐ว㧘૞⵾ߒߚ࠺ࡃࠗࠬߦ߅ߌࠆടᾲశߩᐓᷤ❋㑆㓒ߪ 3.96 Pm ߣ᷹ቯߐࠇ㧘㕖Ᏹߦࠕ࡜ࠗࡔࡦ࠻
♖ᐲ߇㜞޿ߎߣ߇ಽ߆ࠆ㧚 
࿑ 2 ࡑࠗࠢࡠ☼ᕈ࠮ࡦࠨ࡯ᄖⷰ

࿑ 3 ࡑࠗࠢࡠ☼ᕈ࠮ࡦࠨ࡯ේℂ࿑વᾲ 2009 ᐕ 1 ᦬- 15 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ

Under Control

Signal Intensity, mV

0.1

࿑ 5 ᶧ㕙́࠮ࡦࠨ࡯㑆〒㔌೙ᓮᯏ᭴Without control

Under control

200

10

150

100

15

5

0

10

20

30

0.02

0

1

2

3

Time, Ps
࿑ 7 ᶧ㕙́࠮ࡦࠨ࡯㑆〒㔌೙ᓮࠍ↪޿ߚ⴫㕙ᵄᝄേᷫ⴮᜼േߩⷰኤ㧚߿᦭ᯏṁᇦߩ⫳⊒ߦචಽㅊᓥߔࠆᕈ⢻ߢ޽ࠆ㧚࿑
6 ߦᶧ㕙́࠮ࡦࠨ࡯㑆〒㔌೙ᓮߩታ㛎⚿ᨐࠍ␜ߒߚ㧚⹜ᢱߪ⚐᳓ࠍ↪޿ߚ㧚⹜ᢱᶧ㕙ߦኻߒߡⷰኤ
శ߅ࠃ߮ᱜ෻኿శߩߥߔⷺᐲߪ 60qߢ޽ࠆ㧚ࡇࠛ࠱⚛ሶߦࠃࠆ೙ᓮࠍⴕࠊߥ޿႐ว㧘ᄖㇱᡓੂߦࠃࠅᱜ෻኿శߩ߫ࠄߟ߈߇㕖Ᏹߦᄢ߈޿ߎߣ߇ಽ߆
ࠆ㧚৻ᣇ㧘ᶧ㕙́࠮ࡦࠨ࡯㑆〒㔌೙ᓮࠍⴕ߁ߣ㧘㓸శߐࠇࠆᱜ෻኿శᒝᐲߩ߫ࠄߟ߈ߪ㘧べ⊛ߦૐᷫߒ㧘ὐ௝ಽᏓ㑐ᢙ㧔PSF㧕⸃ᨆߦࠃࠆశ㊂ߣᶧ㕙ᄌൻߩ㑐ଥࠍ⠨ᘦߔࠆߣ㧘r0.7 Pm એౝߦᶧ㕙́࠮ࡦࠨ࡯㑆〒㔌߇৻ቯߦߥߞߡ޿ࠆߎߣ߇ಽ߆
ߞߚ㧔⸃ᨆᚻᴺߦߟ޿ߡߪ⋭⇛㧕㧚೙ᓮਅߩࡇࠛ࠱
⚛ሶߩേ߈ߦᵈ⋡ߔࠆߣ㧘ᤨ㑆⚻ㆊߣߣ߽ߦฝਅ
߇ࠅߦߥߞߡ޿ࠆߎߣ߇ࠣ࡜ࡈ߆ࠄಽ߆ࠆ㧚ߎࠇߪ⹜ᢱߩ⫳⊒ߦࠃࠅᶧ㕙ૐਅߦ MOVS ߇ㅊᓥߒߡ޿ࠆߎߣࠍᗧ๧ߔࠆ㧚ឭ᩺ߒߚ MOVS ߩᅷᒰᕈࠍᬌ⸽ߔࠆߚ߼ߦ㧘ᦨ
ᄢ 7 Hz㧘ᝄ᏷ 13 Pm ߩᝄേࠍ⹜ᢱ㧔⚐᳓㧘ടᾲశߩๆ෼ࠍଦㅴߔࠆߚ߼ߦ㗻ᢱࠍ 0.01 wt%ᷝട㧕ߦടᝄߒߚ႐วߩ⴫㕙ᵄ᜼േࠍⷰኤߒߚ㧔࿑ 7㧕㧚2
ಽ㑆ߦࠊߚࠅ➅ࠅ㄰ߒ⸘᷹ࠍⴕ޿㧘256 ࿁ᵄᒻࠍᐔဋൻಣℂߒߚ႐ว㧘〒㔌೙ᓮࠍⴕ߁ߎߣߦࠃࠅ
S/N Ყ߇ 4 ୚⒟ᐲะ਄ߒߚ㧚ߎࠇߪ㧘ᶧ㕙́࠮ࡦࠨ࡯㑆〒㔌೙ᓮߦࠃࠅ⸘᷹ߩౣ⃻ᕈ߇ะ਄ߒߚߚ
߼ߢ޽ࠆ㧚એ਄ࠃࠅ MOVS ߇ࠗࡦࡊࡠ࠮ࠬ⸘᷹ߦ
ㆡ↪น⢻ߢ޽ࠆߎߣ߇⏕⹺ߐࠇߚ㧚

040Time , sec

࿑ 6 ೙ᓮᯏ᭴ࠍ↪޿ߚᶧ㕙ㅊᓥߩ᭽ሶ

⵾ㅧᎿ⒟ߩਛߢ☼ᕈ₸ࠍࡕ࠾࠲࡝ࡦࠣߔࠆߚ߼
ߦߪ㧘ᯏེ߆ࠄߩᝄേߥߤߩᄖㇱᡓੂ߿⹜ᢱߩ⫳⊒ߦࠃࠆᶧ㕙ૐਅߩᓇ㗀ࠍᛥ߃ࠆᔅⷐ߇޽ࠆ㧚․ߦ MOVS ߩὶὐᷓᐲߪ 10 Pm ⒟ᐲ㧔FWHM㧕ߢ޽ࠅ㧘శቇ⸘᷹ో⥸ߦ߽⸒߃ࠆߎߣߢߪ޽ࠆ߇ᶧ
㕙ᄌൻߩᓇ㗀ࠍฃߌ߿ߔ޿㧚ߘߎߢ㧘MOVS ߦ⹜ᢱᶧ㕙́࠮ࡦࠨ࡯㑆〒㔌ࠍ৻ቯߦ଻ߟᯏ᭴ࠍ㓸Ⓧ
ߒߚ㧚CLF1 ߦࠃߞߡᶧ㕙ߦᾖ኿ߐࠇߚⷰኤశߩ
ᱜ෻኿శߪ CLF3 ߦࠃߞߡ㓸శߐࠇࠆ㧚ᱜ෻኿శᒝᐲ߇Ᏹߦ৻ቯߦߥࠆࠃ߁ߦ࠮ࡦࠨ࡯ߦធ⛯ߒߚࡇࠛ࠱⚛ሶࠍ㚟േߔࠆߎߣߢ㧘ᶧ㕙́࠮ࡦࠨ࡯㑆〒㔌ࠍ৻ቯߦ଻ߞߡ޿ࠆ㧚೙ᓮᯏ᭴ࠍ࿑ 5 ߦ␜ߔ㧚
CLF3 ߢ㓸శߐࠇߚᱜ෻኿శߪࡈࠜ࠻࠺ࠖ࠹ࠢ࠲
࡯㧔PD㧘ࠞ࠶࠻ࠝࡈ๟ᵄᢙ 200 kHz㧕ߢᬌ⍮ߐࠇࠆ㧚
PID ೙ᓮེߪ࠮࠶࠻ࡐࠗࡦ࠻ߣߩ஍Ꮕ߆ࠄ PID೙ᓮ಴ജࠍࡇࠛ࠱⚛ሶߦශടߒ㧘MOVS ߩ૏⟎ࠍᄌൻߐߖࠆ㧚ࡇࠛ࠱⚛ሶߥࠄ߮ߦࡇࠛ࠱࠼࡜ࠗࡃ
࡯ߩ๟ᵄᢙᔕ╵ᕈߪ 500 Hz ⒟ᐲߢ޽ࠅ㧘ᄖㇱᡓੂ

વᾲ 2009 ᐕ 1 ᦬

Without Control

0.04

0

z displacement , μm

Reflected light intensity , mV

250

0

- 16 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
ࡑࠗࠢࡠ᜛ᢔ࠮ࡦࠨ࡯
PTAS㧔Total Analytical Systems㧕ߪࡑࠗࠢࡠࡒࠠ
ࠨ࡯㧘ࡑࠗࠢࡠ࡝ࠕࠢ࠲࡯ߥࠄ߮ߦࡑࠗࠢࡠ࠰࡯
࠲࡯ࠍࡢࡦ࠴࠶ࡊߦ㓸Ⓧߒߚൻቇวᚑ࠴࠶ࡊߣߒ
ߡࠦࡦࡆ࠽࠻࡝ࠕ࡞ࠤࡒࠬ࠻࡝࡯ߥߤߦᦼᓙࠍ㓸߼޿ߡ޿ࠆ㧚⪺⠪ࠄߪⰮ⊕⾰ߥߤߩಽሶ᭴ㅧᄌൻ
ߦ⿠࿃ߒߚ᜛ᢔଥᢙᄌൻࠍࡕ࠾࠲࡝ࡦࠣߔࠆߚ߼
ߩࠝࡦ࠴࠶ࡊ࠮ࡦࠨ࡯ߩ㐿⊒ࠍ⋡ᜰߒߡ޿ࠆ[12]㧚
ᧄ࠮ࡦࠨ࡯ࠍಽᨆⷐ⚛ߣߒߡPTAS ߦ㓸Ⓧߔࠆߎߣߢ㧘‫ޠ߽ߢࠇߛ࡮߽ߢߎߤ࡮߽ߢߟ޿ޟ‬㜞ᐲߥࠝࡦࠨࠗ࠻ක≮ࠍฃߌࠆߎߣ߇น⢻ߣߥࠅ㧘‫ޟ‬቟ᔃ࡮቟ో‫↢ߥޠ‬ᵴⅣႺߩታ⃻߳ߣ⽸₂ߔࠆ㧚⪺⠪ࠄ߇㐿⊒ߒߚࡑࠗࠢࡠ᜛ᢔ࠮ࡦࠨ࡯㧔Micro
Optical Diffusion Sensor: MODS㧕ߢߪ㧘ᩰሶ⁁ߩỚᐲಽᏓࠍᒻᚑߒ㧘ߘߩỚᐲ᜛ᢔߩᤨቯᢙࠍ⸘᷹ߔ
ࠆߎߣߢ⹜ᢱߩ⋧੕᜛ᢔଥᢙࠍ᷹ቯߔࠆ㧚ỚᐲಽᏓࠍᒻᚑߔࠆߚ߼ߦᚒ‫ߪޘ‬శ⺃㔚ᵒേࠍ↪޿ߚ㧔࿑ 8㧕㧚శዉ㔚⤑ߦ౉኿ߒߚബ⿠శߦࠃߞߡ㧘ᾖ኿ߐࠇߚ㗔ၞߩ㔚᳇ᛶ᛫₸߇ૐਅߔࠆ㧚࠴ࡖࡀ࡞ߩ⹜ᢱߪ ITO ㅘ᣿㔚ᭂߦࠃߞߡ᜽߹ࠇߡ޿ࠆ㧚శዉ㔚⤑ߣߒߡࠕࡕ࡞ࡈࠔࠬࠪ࡝ࠦࡦ㧔a-Si:H㧕ࠍ↪޿ߚ㧚࠴ࡖࡀ࡞ਅᣇ߆ࠄ࡟࡯ࠩ࡯ᐓᷤߦࠃߞߡ
శዉ㔚⤑ࠍബ⿠ߔࠆߣ࠴ࡖࡀ࡞ౝߦߪ⺃㔚ᵒേജ߇⺃⿠ߐࠇ㧘ᩰሶ⁁ߩỚᐲಽᏓ߇ᒻᚑߐࠇࠆ㧚ᩰሶ⁁ỚᐲಽᏓߦⷰኤశࠍ౉኿ߔࠆߣỚᐲಽᏓߦኻ
ᔕߒߚ 1 ᰴ࿁᛬శ߇ᓧࠄࠇࠆ㧚1 ᰴ࿁᛬శߩᷫ⴮
ᤨቯᢙ߆ࠄ᜛ᢔଥᢙࠍ᷹ቯߔࠆߎߣ߇ߢ߈ࠆ㧚࿑ 8 శ⺃㔚ᵒേේℂ࿑࿑ 10 ࡑࠗࠢࡠ᜛ᢔ࠮ࡦࠨ࡯

㑆ߦ੤ᵹ㔚࿶ࠍශടߔࠆߎߣߦࠃߞߡ㕖৻᭽ߥ㔚႐߇ᒻᚑߐࠇ㔚⇇ᒝᐲߦᴪߞߡ⺃㔚ᵒേജ߇ᒻᚑ
ߐࠇࠆ㧚࠴ࡖࡀ࡞ౝߩ☸ሶߪᵒേജࠍฃߌ㧘శࠍᾖ኿ߒߚ㗔ၞߦ㓸߹ࠅỚᐲಽᏓࠍᒻᚑߔࠆ㧚ᧄᣇ
ᴺࠍ↪޿ࠆߎߣߦࠃߞߡ⥄↱ߥỚᐲಽᏓࠍᒻᚑߔ
ࠆߎߣ߇น⢻ߢ޽ࠅ㧘⹜ᢱߩ᜛ᢔଥᢙߦᔕߓߚ᷹
ቯ᧦ઙ㧔ᐓᷤ❋㑆㓒㧕ࠍ⸳ቯߔࠆߎߣ߇ߢ߈ࠆ㧚ᐓᷤ❋㑆㓒ࠍ⁜ߊߔࠆߎߣߢ᜛ᢔߩᤨቯᢙ߇⍴ߊߥࠆߚ߼㧘⍴ᤨ㑆ߢߩ᷹ቯ߇ߢ߈ࠆߣ޿߁․ᓽࠍ
᦭ߒߡ޿ࠆ㧚
࿑ 9 ߦ MODS ߩ᷹ቯේℂࠍ␜ߒߚ㧚࠴ࡖࡀ࡞ౝ

࿑ 11 శ⺃㔚ᵒേ࠮࡞࿑ 9 ࡑࠗࠢࡠ᜛ᢔ࠮ࡦࠨ࡯᷹ቯේℂવᾲ 2009 ᐕ 1 ᦬- 17 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
MODS ߪ ITO 㔚ᭂߣశዉ㔚⤑ߦࠃߞߡ᭴ᚑߐࠇ
ࠆ࠴ࡖࡀ࡞㧔MODS ਄ㇱ᭴ㅧ㧕ߣ㧘࡟࡯ࠩ࡯ᐓᷤ
ࠍశዉ㔚⤑਄ߢᒻᚑߔࠆߚ߼ߩ MEMS ࡒ࡜࡯㧔MODS ਅㇱ᭴ㅧ㧕ߦࠃߞߡ᭴ᚑߐࠇࠆ㧔࿑ 10㧕㧚⪺⠪ࠄߪߎࠇ߹ߢߦ਄ㇱ᭴ㅧߩỚᐲಽᏓᒻᚑේℂ
ߩᅷᒰᕈߦߟ޿ߡᬌ⸛ࠍⴕߞߡ߈ߚ㧚࿑ 11 ߦ␜ߐࠇࠆశ⺃㔚ᵒേ࠮࡞㧔MODS ਄ㇱ᭴ㅧߦ⋧ᒰ㧕ࠍ૞⵾ߒ㧘߹ߕశዉ㔚₸ߩ᷹ቯࠍⴕߞߚ㧚శዉ㔚⤑
਄ߦ࿑ 12 ߩࠃ߁ߥ㊄ዻ㔚ᭂࠍࡈࠜ࠻࡝࠰ࠣ࡜ࡈ
ࠖ࡯ᛛⴚߦࠃߞߡ૞⵾ߒ㧘㔚ᭂ㑆ߦ࡟࡯ࠩ࡯ࠍᾖ
኿ߒߚ㧚ᾖ኿ߔࠆశᒝᐲ߇Ⴧടߔࠆߦᓥߞߡశዉ
㔚⤑ߩዉ㔚₸߇਄᣹ߒߡ޿ࠆߎߣ߇␜ߐࠇ㧔࿑
13㧕㧘శ⺃㔚ᵒേࠍ⺃⿠ߔࠆߚ߼ߦᔅⷐਇนᰳߥశ
ዉ㔚ലᨐࠍ⏕⹺ߔࠆߎߣ߇ߢ߈ߚ㧚ᰴߦశ⺃㔚ᵒേ࠮࡞ࠍ↪޿ߚ 1 Pm ᓘࡐ࡝ࠬ࠴࡟ࡦࡆ࡯࠭ߩ᝝
㓸ታ㛎ࠍⴕߞߚ㧚ߎߎߢߪ㧘ታ㛎ߩ◲නߩߚ߼ߦ
2 శ᧤࡟࡯ࠩ࡯ᐓᷤࠍⴕࠊߕ㧘శ⺃㔚ᵒേ࠮࡞ߦု⋥ߦ࡟࡯ࠩ࡯ࠍ౉኿ߒ㧘ࠪࠕ࡝ࡦࠣᐓᷤߦࠃࠆ
หᔃ౞⁁ߩᐓᷤ❋ߦࠃߞߡశዉ㔚⤑ࠍബ⿠ߒߚ
㧔࿑ 14㧕㧚ᾖ኿ߒߚ࡟࡯ࠩ࡯ߩࡆ࡯ࡓຠ⾰߇ᖡ޿ߚ߼ߦᱡࠎߛࠟ࠙ࠬಽᏓߦߥߞߡ޿ࠆ߇㧘ࠪࠕ࡝ࡦࠣᐓᷤߦࠃߞߡหᔃ౞⁁ߩᐓᷤ❋߇ᒻᚑߐࠇߡ
޿ࠆߎߣ߇ಽ߆ࠆ㧚ITO ㅘ᣿㔚ᭂߦ 10 Vp-p㧘50
kHz ߩ੤ᵹ㔚࿶ࠍශടߔࠆߣബ⿠శߩᐓᷤ❋ߦᴪߞߡࡐ࡝ࠬ࠴࡟ࡦࡆ࡯࠭߇᝝㓸ߐࠇߚ㧔࿑ 15㧕㧚ᧄ࠺ࡃࠗࠬࠍ↪޿ࠆߎߣߦࠃߞߡછᗧߩᒻ⁁ߩỚᐲಽᏓࠍ࠴ࡖࡀ࡞ౝߦᒻᚑߔࠆߎߣ߇ߢ߈ࠆߎߣ
߇⏕⹺ߐࠇߚ㧚

Conductivity, S/m

10

10

–3

10

–4

–4

–3

–2

–1

0

1

10 10 10 10 10 10 210
Light Intensity, W/cm

2

࿑ 13 శዉ㔚₸᷹ቯ⚿ᨐ࿑ 14 ബ⿠శߩࠪࠕ࡝ࡦࠣᐓᷤ

࿑ 15 శ⺃㔚ᵒേߦࠃࠆࡐ࡝ࠬ࠴࡟ࡦࡆ࡯࠭ߩ
᝝㓸㧚ബ⿠శᒝᐲಽᏓߦᴪߞߡ᝝㓸ߐࠇߡ޿ࠆ㧚࿑ 12 శዉ㔚₸᷹ቯ↪㔚ᭂ㧚᷹ቯኻ⽎ߩዉ㔚₸ߦᔕߓߡ㔚ᭂ㑆〒㔌ࠍᄌᦝน⢻㧚

વᾲ 2009 ᐕ 1 ᦬–2- 18 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
߹ߣ߼
శቇ⊛ᾲ‛ᕈ⸘᷹ᛛⴚߩᜬߟ․ᓽ㧔㕖ធ⸅㧘㜞ᤨⓨ㑆ಽ⸃⢻㧕ߣశ MEMS ᛛⴚߩᜬߟ․ᓽ㧔ࡑࠗࠢࡠൻ㧘ᄙᯏ⢻㜞㓸Ⓧൻ㧘ࠕ࡟ࠗൻ㧕ࠍⲢวߒߚ
ᣂߒ޿శቇ⊛ࡑࠗࠢࡠᾲ‛ᕈ࠮ࡦࠨ࡯ߦߟ޿ߡ⸃
⺑ߒߚ㧚ᝄേߥߤߩᄖㇱᡓੂ߿⹜ᢱߩ⫳⊒ߦࠃࠆ᷹ቯਇ⏕߆ߐࠍ㘧べ⊛ߦૐᷫน⢻ߥࡑࠗࠢࡠ☼ᕈ࠮ࡦࠨ࡯ߩ㐿⊒ߦᚑഞߒߚ㧚੹ᓟߪ㧘ࠗࡦࡊࡠ࠮
ࠬ⸘᷹ߩታ⃻ߦะߌߡᦝߥࠆౣ⃻ᕈߩะ਄ࠍ࿑ࠆ
੍ቯߢ޽ࠆ㧚߹ߚ㧘Ⱞ⊕⾰ߥߤߩ᜛ᢔଥᢙࠍࠝࡦ
࠴࠶ࡊߢ⸘᷹น⢻ߥࡑࠗࠢࡠ᜛ᢔ࠮ࡦࠨ࡯ߩේℂ
ߩᅷᒰᕈࠍᬌ⸽ߒߚ㧚੹ᓟߪ㧘ฦ᷹ቯࠦࡦࡐ࡯ࡀ
ࡦ࠻ࠍశ MEMS ᛛⴚߦࠃߞߡࡑࠗࠢࡠ࠴࠶ࡊߦ
㓸Ⓧൻߔࠆ੍ቯߢ޽ࠆ㧚ߎࠇࠄࡑࠗࠢࡠᾲ‛ᕈ࠮ࡦࠨ࡯ߪᎿᬺಽ㊁㧘ක≮ಽ㊁㧘᧚ᢱಽ㊁ߥߤ᭽‫ޘ‬
ߥಽ㊁ߦ߅ߌࠆࡑࠗࠢࡠࠪࠬ࠹ࡓ࠺ࠩࠗࡦߩታ⃻ࠍน⢻ߦߔࠆߣ⠨߃ࠆ㧚

[3] Solgaard, O., Sandejas, F.S.A. and Bloom, D.M.,
Deformable grating optical modulator, Opt. Lett.,
17 (1992) 688.
[4] Hornbeck, L.J., Current Status of the Digital
Micromirror Device (DMD) for Projection
Television Applications, Tech. Dig. Int. Electron
Devices Meet., (1993) 381.
[5] Bishop, D.J. et al, The Lucent LambdaRouter:
MEMS Technology of the Future Here Today,
IEEE Communications Magazine, 40 (2002) 75.
[6] Chong, C., Isamoto, K. and Toshiyoshi, H.,
Optically Modulated MEMS Scanning Endoscope,IEEE Photo. Tech. Lett., 18 (2006) 133.
[7] McCormick, D.T. et al, A Three Dimensional
Real-time MEMS based Optical Biopsy System
for In-vivo Clinical Imaging, Proc. 14th Int. Conf.
Solid-State Sensors, Actuators and Microsystems,
Lyon, (2007) 203.
[8] Ra, H., Piyawattanametha, W., Taguchi, Y., Lee,D.,
Mandella,
M.J.,
Solgaard,O.,
Two-dimensional MEMS scanner for dual-axes
confocal microscopy, J. Microelectromech. Syst.,
16 (2007) 969.
[9] Tjong, S.C., Structure, morphology, mechanicaland thermal characteristics of the in situ
composites based on liquid crystalline plymers
and thermoplastics, Mater. Sci. Eng. R Rep., 41(2003) 60.
[10] Taguchi, Y., Ebisui, A. and Nagasaka, Y.,
Miniaturized optical viscosity sensor based on alaser-induced capillary wave, J. Opt. A Pure Appl.

⻢ㄉᧄ⎇ⓥߩㆀⴕߦ޽ߚࠅ㧘ᧄႶୃ჻ 2 ᐕ↢ⱃሶ੗᣿ำ㧘㐳↸㓉੺ำ㧘ቇㇱ 4 ᐕ↢㒙ㇱᐢำ㧘ⁿ⼱ᕡ৻ำߦߪ࠺ࡃࠗࠬ૞⵾߅ࠃ߮ታ㛎ߦ߅޿ߡᄙᄢߥ
දജߣ₂り⊛ߥദജ߇޽ߞߚ㧚ࡑࠗࠢࡠᾲ‛ᕈ࠮ࡦࠨ࡯ߩ૞⵾ߦ޽ߚࠅ㧘ᢥㇱ⑼ቇ⋭‫ࡁࠢ࠹ࡁ࠽ޟ‬ࡠࠫ࡯࡮ࡀ࠶࠻ࡢ࡯ࠢ‫ߩ࠻ࠢࠚࠫࡠࡊޠ‬ᡰេࠍฃߌ㧘᧲੩ᄢቇ⿥ᓸ⚦࡝࠰ࠣ࡜ࡈࠖ࡯࡮࠽ࡁ⸘᷹᜚
ὐߥࠄ߮ߦ↥ᬺᛛⴚ✚ว⎇ⓥᚲ࠽ࡁࡊࡠ࠮ࠪࡦࠣ
ᣉ⸳ߦ߅޿ߡታᣉߐࠇߚ㧚ᧄ⎇ⓥߩ⚻⾌ߩ৻ㇱߪ㧘⑼ቇᛛⴚᝄ⥝ᯏ᭴࿾ၞࠗࡁࡌ࡯࡚ࠪࡦഃ಴✚วᡰេ੐ᬺ‫⊒࠭࡯ࠪޟ‬ជ⹜㛎‫߮ࠃ߅ޠ‬ᣣᧄቇⴚᝄ⥝ળ⑼ቇ⎇ⓥ⾌⵬ഥ㊄ၮ⋚⎇ⓥ㧔S㧕㧔No. 19106004㧕
ߦࠃࠆ߽ߩߢ޽ࠆ㧚ߎߎߦ⸥ߒ㧘⻢ᗧࠍ⴫ߔ㧚㩷ෳ⠨ᢥ₂
[1] Taguchi, Y. and Nagasaka, Y., Thermal Diffusivity
Measurement of High-Conductivity Materials by
Dynamic Grating Radiometry, Int. J. Thermophys.,Opt, 10 (2008) 044008.
[11] Nagamachi, R., Taguchi, Y. and Nagasaka, Y.,
Development of Miniaturized Optical Viscometerwith Focus Control System for in-situ
Measurement, Proc. 18th Europ. Conf.
Thermophys. Prop., Pau (2008).
[12] Ebisui, A., Taguchi, Y. and Nagasaka, Y.,
Feasibility Study of Micro Optical Diffusion
Sensorbasedon
Opto-dielectrophoretic
Manipulation, Proc. 18th Europ. Conf.
Thermophys. Prop., Pau (2008).

22 (2001) 289.
[2] Jigami, T., Kobayashi, M., Taguchi, Y. andNagasaka, Y., Development of nanoscaletemperature measurement technique usingnear-field fluorescence, Int. J. Thermophys., 28(2007) 968.

વᾲ 2009 ᐕ 1 ᦬- 19 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ

࠽ࡁ᧚ᢱߩᾲ‛ᕈ⸘᷹
Measuring Thermal Property of Nano Materials㜞ᯅ ෘผ㧔਻Ꮊᄢቇ㧕㧘⮮੗ ਍ᄦ㧔↥✚⎇㧕
Koji TAKAHASHI (Kyushu University), Motoo FUJII (AIST)
e-mail: takahashi@aero.kyushu-u.ac.jpߪߓ߼ߦ
࠽ࡁ᧚ᢱߣߪ㧘ઍ⴫ኸᴺ߇ 1 ࡒࠢࡠࡦࠍᄢ߈ߊ
ਅ࿁ࠆᓸ☸ሶ࡮⚦✢࡮⭯⤑ߥߤࠍᜰߔ߇㧘⁜⟵ߢߪ㧘ߘߩ࠽ࡁࠝ࡯࠳࡯ߩኸᴺࠁ߃ߦࡃ࡞ࠢ᧚ᢱߣ
ߪ⪺ߒߊ⇣ߥߞߚᕈ⾰ࠍ␜ߔ᧚ᢱߩߎߣߢ޽ࠆ㧚ߎߩᓟ⠪ߩᗧ๧ߢߪ㧘ࡃ࡞ࠢ᧚ᢱߢ޽ߞߡ߽࠽ࡁ
ࡋ࠹ࡠ⇇㕙ߦࠃߞߡ․⇣ߥᕈ⾰ࠍ␜ߔ߽ߩߪ࠽ࡁ
᧚ᢱߩ▸⇵ߦ౉ࠆ㧚޿ߕࠇߦߒߡ߽㧘࠽ࡁ࠹ࠢߩ
ਥᓎߪߎߩࠃ߁ߥ࠽ࡁ᧚ᢱߩ㐿⊒ߢ޽ࠆࠊߌߛ߇㧘ᣂⷙߦวᚑߐࠇߚฦ⒳࠽ࡁ᧚ᢱߩ‛ᕈࠍᛠីߔࠆ
ߎߣߪᰳ߆ߖߥ޿૞ᬺߢ޽ࠆ㧚ᧄⓂߢߪࡢࠗࡗ࡯
⁁ߩ࠽ࡁ᧚ᢱ㧝ᧄߦ㑐ߒߡᾲવዉ₸ࠍ♖ኒߦ⸘᷹ߔࠆᛛⴚߦߟ޿ߡᚒ‫⎇ߩޘ‬ⓥࠍਛᔃߦ⚫੺ߔࠆߎߣߣߔࠆ㧚߹ߕ㧘㔚᳇࡮⏛᳇࡮శ࡮ᾲ࡮ᯏ᪾ᒝᐲߣ޿ߞߚ
⒳‫‛ߩޘ‬ℂ⊛ᕈ⾰ߩਛߢ߽㧘ᾲߪ㔚᳇ߣᲧߴߡ⛘✼ᣇᴺ߇ਲߒߊ IC ߩࠃ߁ߥዊဳൻߩᚻᴺ߇ᚑᾫ
ߒߡ߽޿ߥ޿ߩߢ㧘ዊߐߥ⹜ᢱ㧘․ߦ࠽ࡁᓸ☸ሶ߿࠽ࡁࡢࠗࡗߩᾲ‛ᕈࠍ୘೎ߦ᷹ቯߔࠆታ㛎ߪ㕖Ᏹߦ㔍ߒ޿㧚࠽ࡁ᧚ᢱߩਛߢ߽⭯⤑ߦߟ޿ߡߪᚻ
૞ᬺߢ߽ࠕࡊࡠ࡯࠴น⢻ߥᐢߐ߇޽ࠆߎߣ߇ᄙ޿
ߩߢ㧘3ȁᴺ [1]߿ ࠨ࡯ࡕ࡝ࡈ࡟ࠢ࠲ࡦࠬᴺ[2]ߦ
ࠃߞߡቯ㊂⊛ߥ᷹ቯ߇৻⥸ൻߒߟߟ޽ࠆ㧚ߎࠇߪ㔚ሶ࠺ࡃࠗࠬߦ߅ߌࠆᾲ೙ᓮⷐ᳞߇⭯⤑ߩᾲ᷹ቯ⎇ⓥࠍᓟ᛼ߒߒߚ⚿ᨐߣ߽⸒߃ࠆ㧚ߚߛߒ㧘ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉࠍߪߓ߼ߣߒߚ࠽ࡁᓸ☸ሶ࡮࠽ࡁࡢࠗࡗ߽㧘⭯⤑ห᭽ߦ㔚ሶ࠺ࡃࠗࠬ߳ߩᔕ↪⎇ⓥ߇ㅴ߼ࠄࠇ㧘ࡈࠖ࡜࡯ߣߒߡⶄว᧚ᢱ߿಄ᇦߩ
વᾲᕈ⢻ࠍ㜞߼ࠆᓎഀ߽ᒝߊᦼᓙߐࠇᆎ߼ߡ޿ࠆ㧚ࠃߞߡ㧘ฦ⒳࠽ࡁ᧚ᢱߩᾲ‛ᕈࠍᛠីߔࠆߎߣߪ㧘ߎࠇࠄᔕ↪⵾ຠߩ㐿⊒ࠍᱜߒ޿ᣇะ߳ዉߊߚ߼ߦ
㊀ⷐߢ޽ࠆߒ㧘ᣂߒ޿ᾲ‛ᕈᎿቇߣ޿߁ᗧ๧ߢ⎇ⓥ⠪ࠍᒝߊ㝯ੌߔࠆ߽ߩߢ߽޽ࠆ㧚ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉ
࠽ࡁ࠹ࠢߩઍ⴫⊛ߥሽ࿷ߢ޽ࠆࠞ࡯ࡏࡦ࠽ࡁ࠴

વᾲ 2009 ᐕ 1 ᦬- 20 -

ࡘ࡯ࡉߦ㑐ߒߡ࠳ࠗࡗࡕࡦ࠼ࠍᄢ߈ߊ⿧߃ࠆᾲવ
ዉ₸ࠍᜬߟߣ޿߁੍᷹[3]߇␠ળߦዋߥ߆ࠄߧⴣ
᠄ࠍਈ߃ߚߩߪ⸥ᙘߦᣂߒ޿㧚ߘߩ⺰ᢥߪࠞࠗ࡜
࡞ᜰᢙ㧔10,10㧕ߩනጀ࠴ࡘ࡯ࡉߦኻߒߡಽሶേജ
ቇࠪࡒࡘ࡟࡯࡚ࠪࡦࠍⴕ޿㧘ቶ᷷ߢ 6600W/mK ߣ޿߁⚿ᨐࠍ␜ߒߡ޿ߚ߇㧘ߘߩᓟߩห⒳ߩ⸃ᨆߢ
ߪߘࠇࠃࠅ߽ૐ޿୯߇ᢙᄙߊႎ๔ߐࠇߡ޿ࠆ㧚⹦⚦ߦߟ޿ߡߪઁⓂ[4,5]ࠍෳᾖߒߡ޿ߚߛߊߣߒߡ㧘ታ㛎߇ࠪࡒࡘ࡟࡯࡚ࠪࡦߦᲧߴߡㆃࠇߚߩ߇ߎߩ
ᷙੂߩේ࿃ߩ৻ߟߢ޽ࠆߩߪ㑆㆑޿ߥ޿㧚ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉߩᾲવዉ₸ߦ㑐ߔࠆೋᦼߩታ㛎ߪࡑ࠶࠻⁁ߦᚑဳߒߚනጀ࠽ࡁ࠴ࡘ࡯ࡉࠍ
ቯᏱᲧセᴺߦࠃߞߡ⺞ߴߚ߽ߩ[6,7]ߢ޽ࠆ㧚ߚߛߒ㧘ߘߩ⇣ᣇᕈࠍ⠨ᘦߒߡಽᢔᶧߦᒝ⏛႐ࠍ߆ߌ
ߡ㈩ะᚑဳߐࠇߚ⹜ᢱߢ޽ߞߡ߽ቶ᷷ߩᾲવዉ₸ߪ 200W/mK ࠍዋߒ⿥߃ߚ⒟ᐲߢ޽ߞߚ㧚‛ᕈࠍᱜ⏕ߦ⺞ߴࠆߚ߼ߦߪ⹜ᢱߩ⚐ᐲࠍ㜞߼ࠆߣ޿߁
ߩ߇ᏱᅃᚻᲑߢ޽ࠅ㧘࠽ࡁ࠴ࡘ࡯ࡉߩะ߈ࠍឥ߃
ߡ⸘᷹ߔࠆߣ޿߁ᣇะᕈߪᱜߒ޿㧚ߒ߆ߒߥ߇ࠄ㧘㐳ߐ߇৻ᧄ৻ᧄ⇣ߥࠆߚ߼ߦߤ߁ߒߡ߽࠴ࡘ࡯ࡉ
-࠴ࡘ࡯ࡉ㑆ߩᒝ޿ᾲᛶ᛫߇৻ㇱ੺࿷ߔࠆߎߣߦ
ߥࠅ㧘ᐔဋ୯ߣߒߡૐ߼ߩᾲવዉ₸߇಴ࠆߎߣߪ
ㆱߌࠄࠇߥ޿㧚ߟ߹ࠅ㧘࠽ࡁ᧚ᢱߦ㑐ߒߡߪᣢሽ
ߩ⸘᷹ᴺߦว߁ࠃ߁ߦ⹜ᢱߩࡃ࡞ࠢൻࠍᎿᄦߔࠆ
ᚻᴺߦߪ㒢⇇߇޽ࠆߣ⚿⺰ߢ߈ࠆ㧚ߎࠇߣߪㅒߦ㧘⸘᷹ᴺߔߥࠊߜ࠮ࡦࠨ࡯ߩ߶߁
ࠍ࠽ࡁ᧚ᢱߦว߁ࠃ߁Ꮏᄦߒߡ㧘ࡃ࡞ࠢߢߥ޿㧝ᧄߩᾲવዉ₸ߦߟ޿ߡା㗬ᕈߩ㜞޿⸘᷹ࠍน⢻ߣߒߚߩ߇㧘㨁㧯ࡃ࡯ࠢ࡟࡯ߩ Majumdar ߩࠣ࡞࡯ࡊ[8]ߣᚒ‫ࠍޘ‬฽߻਻Ꮊᄢቇߩࠣ࡞࡯ࡊ[9]ߢ޽ࠆ㧚ਔ⠪ߪᓟㅀߔࠆࠃ߁ߦోߊ⇣ߥࠆᚻᴺࠍขߞߡ޿
ࠆ㧚ߥ߅㧘⹜ᢱ߳ߩ๟ᦼ⊛ㅢ㔚ടᾲࠍ೑↪ߒߚ 3
ȁᴺ[10]߽⹜ߺࠄࠇߡߪ޿ࠆ߇㧘ା㗬ᕈߦ㑐ߒߡ⼏⺰ߩ૛࿾߇޽ࠆ㧚⃻࿷߹ߢߦ㧘ࠞ࡯ࡏࡦ࠽ࡁ࠴
ࡘ࡯ࡉߦ㑐ߒߡߪቶ᷷ߢනጀߢߪ 3000W/mK ࠍ⿥߃ࠆᾲવዉ₸[11,12]߇㧘ᄙጀߢ߽⚦޿⹜ᢱߢ޽ࠇ

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
ߡ߽ห᭽ߢ㧘⹜ᢱߩㇱಽߦߟ޿ߡߪᷝሼ f ࠍઃߌࠆߎߣߣߒߡᾲવዉ₸ࠍOf ߣߔࠇ߫㧘'TL'TL
Hot Wire

Hot Wire
T0

T0

T0

T0
Tj

1

Of

d 2T f x f

2

dx f

2

(2)

0

SampleHeat Sink & Terminal

Heat Sink
T0

(a)
(b)
࿑ 1 ࡢࠗࡗ࡯⹜ᢱߩઃടߦࠃࠆᾲ✢ߩ᷷ᐲಽᏓߩ
ᄌൻߩࠃ߁ߔ

ߣ⴫ߐࠇࠆ㧚ߎࠇࠄߩᾲવዉᣇ⒟ᑼࠍࡅ࡯࠻ࠪ
ࡦࠢߩ᷷ᐲ T0㧘ࡎ࠶࠻ࡈࠖ࡞ࡓߣ࠽ࡁ᧚ᢱߩធὐ
ߩ᷷ᐲࠍ Tj ߣߒߡ⸃ߊߣ㧘2

T1 x1
߫ 2000W/mK એ਄ߩ୯߇⸘᷹ߐࠇߡ߅ࠅ㧘ᰳ㒱߇ߥߌࠇ߫࠳ࠗࡗࡕࡦ࠼ࠍ⿧߃ࠆᾲャㅍ⢻ജࠍ᦭ߒߡ޿ࠆߩߪ㑆㆑޿ߥ޿߽ߩߣᕁࠊࠇࠆ㧚d 2 T1 x1
dx1

2

 qv

0

'TL

1 l
>T x  T0 @dx
l ³0

(4)

ߢቯ⟵ߔࠆ૕Ⓧᐔဋ᷷ᐲᄌൻࠍ⸘▚ߔࠆߣ㧘
3

'T L

3

l1  l 2 q v T j  T0

12Ol
2

(5)

߇ᓧࠄࠇࠆ㧚ߎߩ૕Ⓧᐔဋ᷷ᐲᄌൻߣࡎ࠶࠻ࡈ
ࠖ࡞ࡓߩ㔚᳇ᛶ᛫୯ߩᄌൻߩ㑐ଥߪ, 'R ࠍᛶ᛫୯ᄌൻ㧘Eࠍᛶ᛫᷷ᐲଥᢙ㧘R0 ࠍၮḰ(0͠)ߢߩᛶ᛫
୯ߣߔࠇ߫㧘ǍTL=ǍR/(ER0) ߣߥࠆ㧚ᰴߦᾲߩᵹ
ࠇߦߟ޿ߡ⠨߃ࠆߣ㧘࠽ࡁ᧚ᢱࠍㅢㆊߔࠆᾲᵹ᧤
ࠍ qf㧘ࡎ࠶࠻ࡈࠖ࡞ࡓߩᢿ㕙Ⓧࠍ Ah㧘⹜ᢱߩᢿ㕙Ⓧࠍ Af ߣߔࠆߣ㧘ࡎ࠶࠻ࡈࠖ࡞ࡓߣ࠽ࡁ᧚ᢱߩធ
ὐߢߪ

q f Af

O

wT1
wT
Ah  O 2 Ah
wx1
wx2

(6)

ߣ޿߁㑐ଥ߇޽ࠆߩߢ㧘ᑼ(3)ߢ⴫ߐࠇࠆ᷷ᐲಽ
Ꮣ T1 ߅ࠃ᷷߮ᐲಽᏓ T2 ࠃࠅ࠽ࡁ᧚ᢱਛߩᾲᵹ᧤
ߪ

(1)

qf

ߥ߅㧘㔚ᵹ I㧘㔚࿶ V㧘ᾲ✢ߣߒߡࡎ࠶࠻ࡈࠖ࡞
ࡓࠍ↪޿ࠆߣߒߡ㧘ߘߩ㐳ߐࠍ l㧘᏷ࠍ w㧘ෘߐࠍd ߣߔࠆߣ㧘qv =IV/(lwd)ߣߥࠆ㧚2 ߩㇱಽߦߟ޿વᾲ 2009 ᐕ 1 ᦬

q v 2 q v l1  2O T j  T0x1 x1  T0 (3)2O
2 O l1ߣߥࠅ㧘ઁߩㇱಽߦߟ޿ߡ߽ห᭽ߦ᷷ᐲಽᏓ߇
ᓧࠄࠇࠆ㧚ߎߎߢߪ㧘ធ⸅ᾲᛶ᛫ߪήⷞߒߡ޿ࠆ㧚ߎࠇࠄߩᑼ߆ࠄࡎ࠶࠻ࡈࠖ࡞ࡓߦߟ޿ߡ㧘

6 ሼ৻૕ဳ࠽ࡁ࠮ࡦࠨ࡯ ᷹ቯේℂᧄ┨ߢߪ⪺⠪ࠄ߇㐿⊒ߒߚ࠽ࡁ᧚ᢱ↪ߩᾲવዉ₸⸘᷹ࠪࠬ࠹ࡓߩ⹦⚦ࠍ⺑᣿ߔࠆ㧚ߎࠇߪ⍴✢ട
ᾲᴺࠍᔕ↪ߒߡᭂ⚦ࠞ࡯ࡏࡦࡈࠔࠗࡃ࡯ߩᾲવዉ
₸ࠍ⸘᷹ߔࠆ⎇ⓥ[13]ߦ┵ࠍ⊒ߒߡ޿ࠆ㧚ේℂࠍ
࿑ 1 ߦ␜ߔ߇㧘ਔ┵߇ࡅ࡯࠻ࠪࡦࠢ౗࠲࡯ࡒ࠽࡞
ߣ⋥⚿ߒߚᾲ✢ߦ㔚᳇ࠍᵹߔߣࠫࡘ࡯࡞⊒ᾲߦࠃࠅ᷷ᐲಽᏓߪੑᰴᦛ✢ࠍ␜ߔ㧚ߎߩᾲ✢ߩਛᄩㇱߦࡅ࡯࠻ࠪࡦࠢߣ⚿߫ࠇߚ⹜ᢱࠍઃߌട߃ࠆߣߘ
ࠇ߇ᾲߩㅏߍ㆏ߣߥߞߡ㧘᷷ᐲಽᏓߪ࿑ 1(b)ਛߦ
␜ߐࠇߚࠃ߁ߥಳࠎߛᦛ✢ߦߥࠅ㧘᷷ᐲ਄᣹ߩᐔ
ဋ୯ǍTL ߇ᄌൻߔࠆ㧚ߘߩᄌൻߩᄢ߈ߐߪ⹜ᢱߩ
ᾲࠦࡦ࠳ࠢ࠲ࡦࠬߦଐሽߔࠆ㧚ࠃߞߡ᷷ᐲߦଐሽ
ߔࠆᾲ✢ߩ㔚᳇ᛶ᛫ߩᄌൻࠍ⸘᷹ߔࠆߎߣߢ⹜ᢱ
ߩᾲࠦࡦ࠳ࠢ࠲ࡦࠬ߇ᓧࠄࠇࠆߎߣߦߥࠆ㧚ౕ૕⊛ߥᾲવዉ₸ߩዉ಴ࠍએਅߦ␜ߔ㧚⹜ᢱߣߥࠆ࠽ࡁ᧚ᢱߣߩធὐߩᏀฝߢᾲ✢ࠍ 1㧘2 ߣ඙೎ߒ㧘ᷝሼࠍઃߌߡ⴫ߔߎߣߣߔࠆ㧚ᾲ✢ߩ 1 ߩㇱಽߩ৻ᰴరᾲવዉᣇ⒟ᑼߪ㧘ᾲ✢ߩᾲવዉ₸ࠍO㧘
න૏ᤨ㑆න૏૕Ⓧ޽ߚࠅߩ⊒ᾲ㊂ࠍ qv ߣߔࠆߣᰴ
ᑼߢ⴫ߐࠇࠆ㧚OOAh ª qv l T j  T0 l º«»
A f ¬ 2Ol1l 2 ¼

(7)ߣߥࠆ㧚৻ᣇ㧘࠽ࡁ᧚ᢱߩ᷷ᐲ൨㈩ࠍ⠨ᘦߔࠆߣ㧘ᾲᵹ᧤ߪ

- 21 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ

qf

Of

T j  T0(8)lfߣ߽⴫ߔߎߣ߇ߢ߈㧘ᑼ(7)㧘(8)ࠃࠅ࠽ࡁ᧚ᢱߩ
ᾲવዉ₸ߪ


Of

ª q v l T j  T0 l º»
OAh l f «¬ 2O
l1l2 ¼Af
T j  T0(9)ߣ⸘▚ߢ߈ࠆ㧚ᑼ(5)ࠍ↪޿ࠆߣ㧘Ofl f l 4 OAh  12l f l 2 O2 Ah 'TL / qv
12l1l 2 A f lO'TL / qv  l14l 2 A f  l1l24 A f(10)ߣ޿߁㑐ଥᑼ߇ᓧࠄࠇ㧘ታ㛎࠺࡯࠲ǍTL/qv ࠃࠅ࠽ࡁ᧚ᢱߩᾲવዉ₸߇᳞߼ࠄࠇࠆ㧚 ⵾૞ᣇᴺ
ᧄ࠮ࡦࠨ࡯ߩ⵾૞ᣇᴺࠍ࿑ 2 ߦ␜ߔ㧚߹ߕ㧘SiO2
ጀࠍ᦭ߔࠆ Si ၮ᧼਄ߦ㔚ሶ✢࡟ࠫࠬ࠻ࠍࠬࡇࡦ
ࠦ࡯࠹ࠖࡦࠣߒ㧘ᰴߦ㔚ሶ✢ឬ↹ⵝ⟎ࠍ↪޿ߡ࠮ࡦࠨ࡯ߩࡄ࠲࡯ࡦࠍၮ᧼਄ߦ⋥ធឬ↹ߒ⃻௝ߔࠆ㧚EB resist

Si(100)

SiO2(1)EB resist coating(2) Electrical beamlithographyߎߩ਄ߦ Ti ߅ࠃ߮ Pt ࠍ⫳⌕ߒ㧘࡝ࡈ࠻ࠝࡈᴺߦ
ࠃࠅ࠮ࡦࠨ࡯ߩࡄ࠲࡯ࡦࠍᒻᚑߔࠆ㧚ߎߎߢ Ti ߩ⤑ෘߪ 5nm ⒟ᐲߢ޽ࠅ Pt ߣ SiO2 ߣߩ㑆ߩធ⌕ജᒝൻߩߚ߼ߦ↪޿ߡ޿ࠆ㧚Pt ࡎ࠶࠻ࡈࠖ࡞ࡓߣߥ
ࠆㇱಽࠍၮ᧼߆ࠄᶋ߆ߔߚ߼ߦ㧘BHF ṁᶧࠍ↪޿
ߡ SiO2 ጀࠍ╬ᣇ⊛ߦࠛ࠶࠴ࡦࠣߔࠆ㧚ߥ߅㧘ߎߩ㓙 Ti ߪ㒰෰ߐࠇࠆ㧚ߐࠄߦ㧘Pt ࡎ࠶࠻ࡈࠖ࡞ࡓߣ
ၮ᧼ߣߩ㑆ߩ〒㔌ࠍჇߔߚ߼ߦ KOH ṁᶧ޽ࠆ޿ߪ CF4 ࡊ࡜࠭ࡑࠍ↪޿ߡ Si ၮ᧼ࠍᢙࡒࠢࡠࡦߩᷓ
ߐߛߌࠛ࠶࠴ࡦࠣߔࠆ㧚ߎߩᎿ⒟ߦࠃߞߡ㧘Ꮐฝߩ࠲࡯ࡒ࠽࡞ߩ㑆ߦ Pt ࡎ࠶࠻ࡈࠖ࡞ࡓ߇ ᨞ߐ
ࠇ㧘ፉ⁁ߩࡅ࡯࠻ࠪࡦࠢㇱಽߣᢙࡒࠢࡠࡦ㔌ࠇߡะ߆޿วߞߚᒻ⁁ߩ࠺ࡃࠗࠬ߇ቢᚑߔࠆ㧚ߥ߅㧘࿑␜ߪ⋭⇛ߒߡ޿ࠆ߇ Pt ⤑ߪᡆૃ⊛ߦ྾┵ሶᴺߣߥࠆࠃ߁ߦᒻ⁁ࠍਈ߃㧘࡝࡯࠼ㇱߩ㔚࿶⺋Ꮕߪචಽዊߐ޿ߎߣࠍ⏕⹺ߒߡ޿ࠆ㧚ߣߎࠈߢ㧘ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉ╬ߩ࠽ࡁ᧚ᢱ
ࠍ࿑ 1 ߩࠃ߁ߦ࠮ࡦࠨ࡯ߦ⸳⟎ߔࠆߩߪᾫ✵ࠍⷐߔࠆࡊࡠ࠮ࠬߢ޽ࠆ㧚ߎߩࡊࡠ࠮ࠬߪᢥ₂[14]ߩ
ᚻᴺߦḰߓߡታⴕߐࠇࠆ㧚ߟ߹ࠅ㧘޽ࠆၮ᧼ߩ┵ㇱߦ࠽ࡁ᧚ᢱࠍ⺃㔚ᵒേߦࠃߞߡᢛ೉ߐߖ㧘SEM
ౝߦ⸳⟎ߐࠇߚ࠽ࡁࡑ࠾ࡇࡘ࡟࡯࠲࡯ߢᜪ޿਄ߍ
ࠆ㧚ౕ૕⊛ߦߪ㧘ࡊࡠ࡯ࡉߦߪ㔚⇇⎇⏴ߒߚ W ࡢࠗࡗ࡯ࠍ↪޿㧘EBID㧔㔚ሶ✢⺃⿠ၸⓍ㧕ᴺߦࠃߞߡ⹜ᢱࠍࡊࡠ࡯ࡉߦធ⌕ߔࠆ㧚ࡊࡠ࡯ࡉߦⵝ⌕ߐࠇߚ⹜ᢱߪ㜞⸃௝ᐲ TEM ߢⷰኤߐࠇ㧘ߘߩᓟ
SEM ౝߩࡑ࠾ࡇࡘ࡟࡯࠲࡯ߦࠃߞߡ⸘᷹↪࠮ࡦࠨ࡯ߦⵝ⌕ߐࠇࠆ㧚ߎߩ EBID ߪ SEM ౝߦᱷሽߒ
ߚ᦭ᯏಽሶࠟࠬࠍ೨ゎ૕ߣߒߡ߅ࠅ㧘ߘࠇ߇ੑᰴ
㔚ሶߦࠃߞߡಽ⸃ߐࠇࠕࡕ࡞ࡈࠔࠬࠞ࡯ࡏࡦߣߥ
ߞߡၸⓍߔࠆߎߣࠍ೑↪ߒߡ޿ࠆ㧚ߎߩၸⓍ‛߇Pt/Ti(3) Physical deposition(4) Lift off

Suspended Pt hotfilm(5) SiO2 etching(6) Si etching࿑ 3 SiC ࠽ࡁࡢࠗࡗ߇⸳⟎ߐࠇߚT ሼ৻૕ဳ࠽ࡁ࠮ࡦࠨ࡯ߩ SEM ౮⌀࿑ 2 ࠽ࡁ࠮ࡦࠨ࡯ߩ⵾૞ࡊࡠ࠮ࠬ

વᾲ 2009 ᐕ 1 ᦬- 22 -J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
৻⒳ߩធ⌕೷ߣߒߡ௛ߊߎߣߢ࠽ࡁ᧚ᢱߩធว߇
ታ⃻ߐࠇߡ޿ࠆ㧚ߚߛߒ㧘W ࡊࡠ࡯ࡉ߳ߪ઒ᱛ߼
⊛ߦ㧘࠮ࡦࠨ࡯߳ߪචಽߥធวߣߥࠆࠃ߁㔚ሶ✢ࠍᾖ኿ߔࠆᔅⷐ߇޽ࠆ㧚࿑ 3 ߦߪធวᓟߩ᭽ሶࠍ
␜ߒߚ߇㧘චಽߥធวߣߪធ⸅ᛶ᛫߇࠽ࡁ᧚ᢱߩ
ᾲᛶ᛫ߦᲧߴߡήⷞߢ߈ࠆ⒟ᐲߣ޿߁ߎߣߦߥࠆ㧚ࠞ࡯ࡏࡦߩઍࠊࠅߦ FIB(෼᧤ࠗࠝࡦࡆ࡯ࡓ)ᴺߦࠃߞߡ W ߿ Pt ߥߤߩ㊄ዻࠍၸⓍߐߖࠆߣធ⸅ᛶ
᛫߇ૐᷫߐࠇࠆน⢻ᕈ߇㜞ߊߥࠆ߇㧘ߤࠎߥ႐ว
ߢ߽ᾲ⸘᷹ߣធว૞ᬺࠍ➅ࠅ㄰ߒⴕߞߡ⚻㛎ೣࠍᓧࠆߎߣ߇ᦸ߹ߒ޿㧚 ⸘᷹⚿ᨐߣ዁᧪ዷᦸ
⸘᷹ߪ 10-3Pa એ਄ߩ⌀ⓨᐲߩࠢ࡜ࠗࠝࠬ࠲࠶࠻
ౝߢⴕࠊࠇࠆ㧚࠽ࡁ᧚ᢱߩ⸳⟎ߩ೨ᓟߦߘࠇߙࠇ
Pt ⤑ߣ⹜ᢱߩᾲવዉ₸ࠍ⸘᷹ߔࠆ㧚଀ߣߒߡ㧘ᄙጀࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉߩᾲવዉ₸ߩ᷷ᐲଐሽᕈ
ߣ⋥ᓘଐሽᕈ߇࿑ 4 ߩࠃ߁ߦᓧࠄࠇߡ޿ࠆ[9]㧚࿑
4(a)ߢᾲવዉ₸ߪ᷷ᐲߦኻߒߡන⺞ߦჇടߒߡ߅
ࠅ࠙ࡓࠢ࡜࠶ࡊᢔੂߩലᨐ߇ 300K એਅߢߪ⃻ࠇߡ޿ߥ޿㧚࿑ 4(b)ߢ⋥ᓘ߇ᄢ߈޿߶ߤᾲવዉ₸߇ਅ߇ࠆߩߪ㧘ᄙጀ࠴ࡘ࡯ࡉߩጀ㑆ߪᒙ޿ࡈࠔࡦ࠺
࡞ࡢ࡯࡞ࠬജߒ߆௛޿ߡ޿ߥ޿ߚ߼㧘ᦨᄖጀએᄖ
ߩጀ߇߶ߣࠎߤવᾲߦነਈߒߡ޿ߥ޿߆ࠄߢ޽ࠆ㧚߹ߚ㧘⚿᥏ᕈߩ⦟޿ SiC ࠽ࡁࡢࠗࡗߩ⸘᷹[15]߽
ห᭽ߩᚻᴺߢⴕߞߡ߅ࠅ㧘ࡃ࡞ࠢߩ SiC ⚿᥏ߢߪ
50K ⒟ᐲߢ⷗ࠄࠇࠆᾲવዉ₸ߩࡇ࡯ࠢ߇࠽ࡁࡢࠗ
ࡗߢߪ 340K ⒟ᐲ߹ߢ㜞᷷஥ߦࠪࡈ࠻ߒߡ߅ࠅ㧘⴫㕙ᢔੂߩჇടߦࠃࠆࡈࠜࡁࡦߩᐔဋ⥄↱ⴕ⒟ߩ
ᷫዋ߇෻ᤋߐࠇߚ⚿ᨐߣߥߞߡ޿ࠆ㧚
ߎߩ⸘᷹ᴺߪᾲવዉ₸ߩߚ߼ߦ㐿⊒ߐࠇߚ߽ߩ
ߢ޽ࠆ߇㧘㔚᳇વዉ₸ߣ࠯࡯ࡌ࠶ࠢଥᢙࠍหᤨߦ
⸘᷹ߔࠆߚ߼ߩᡷㅧ߽ኈᤃߢ޽ࠆ㧚߹ߚ㧘⊕㊄⭯⤑ߩઍࠊࠅߦ࠙ࠜ࡯࡜ࠬ࠻ࡦࡢࠗࡗࠍ↪޿ࠆᣇᴺ[16]߽⚫੺ߐࠇߡ޿ࠆ㧚ߐࠄߦ㧘᧚ᢱߩᾲャㅍߩ⇣ᣇᕈࠍᬌ⍮ߔࠆߚ߼ߦ㧞୘ߩᾲ✢ࠍ↪޿ߚ࠮ࡦࠨ࡯߽㐿⊒ᷣߺߢ޽ࠆ㧚ߎߩ⸘᷹ᴺߩ․ᓽߢ߽޽
ࠆ᭴ㅧߩන⚐ߐߪᄢ߈ߥ೑ὐߢ޽ࠅ㧘଀߃߫ AFM
ߩ㊎ߩవ┵ߦ᭴▽ߔࠆߥߤ㧘ᄙߊߩᔕ↪࡮⊒ዷ߇ᦼᓙߐࠇࠆ㧚
7% ࡃ࡯ࠢ࡟࡯ߩ /'/5 ࠮ࡦࠨ࡯
࠽ࡁ᧚ᢱ 1 ᧄߩᾲવዉ₸⸘᷹ߦᦨ߽ᣧߊᚑഞߒ
ߚߩߪ Majumdar ߩࠣ࡞࡯ࡊߢ޽ࠆ㧚ߘߩ⢛᥊ߦ

વᾲ 2009 ᐕ 1 ᦬- 23 -(a) ᷷ᐲଐሽᕈ(b) ⋥ᓘଐሽᕈ
࿑ 4 ᄙጀࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉߩᾲવዉ₸㧘ߚߛߒ do ߪ࠴ࡘ࡯ࡉߩᄖᓘ㧘di ߪౝᓘߪ UC ࡃ࡯ࠢ࡟࡯ߩࡑࠗࠢࡠടᎿ࠮ࡦ࠲࡯ߩሽ࿷
ߣ⿛ᩏဳᾲ㗼ᓸ㏜ߩ⎇ⓥታ❣߇޽ߞߚ㧚ߟ߹ࠅ૗ࠍߤߎ߹ߢዊߐߊ૞ࠇࠆ߆ߣ޿߁ടᎿᛛⴚߣᓸዊ
ߥ࠮ࡦࠨ࡯ߢᾲࠍ᷹ࠆ⸘᷹ᛛⴚ߇Ⲣวߔࠆߎߣߢ
ߪߓ߼ߡߎߩࠃ߁ߥవዉ⊛⎇ⓥ㧘ߔߥࠊߜ㧘⋥ᓘ
100nm એਅߢ㐳ߐᢙࡒࠢࡠࡦߣ޿ߞߚ‫߽ߟߡߣޟ‬ߥߊ‫ޠ‬ዊߐ޿ኻ⽎‛ߩᾲ‛ᕈ߇⸘᷹น⢻ߣߥߞߚߣ޿߃ࠆ㧚ᓐࠄߩ MEMS ᛛⴚߦၮߠߊ⸘᷹ࠪࠬ࠹
ࡓ[8]ࠍએਅߦ᭎⺑ߒߡ߅ߊ㧚
MEMS ߢߪ‶†ጀ޽ࠆ޿ߪࡃ࡞ࠢࠛ࠶࠴ࡦࠣ
ߦࠃߞߡ⭯⤑ࠍၮ᧼߆ࠄᶋ޿ߚ⁁ᘒߦߔࠆߎߣ߇
㗫❥ߦⴕࠊࠇࠆ㧚ࠞࡦ࠴࡟ࡃ࡯߿࿶ജ࠮ࡦࠨ࡯ߩ
⤑߽ߎߩᣇᴺߢ૞ࠄࠇ㧘ߘߩ႐วߩ⭯⤑ߪᒝᐲߦఝࠇᱷ⇐ᔕജ߽ዊߐߊߢ߈ࠆ⛘✼૕ߣߒߡ⓸ൻࠪ࡝ࠦࡦ߇ࠃߊ↪޿ࠄࠇࠆ㧚Majumdar ࠄ߇㐿⊒ߒߚ࠮ࡦࠨ࡯߽ߎߩᣇᑼߢ޽ࠆ㧚ߔߥࠊߜ㧘ࠪ࡝ࠦࡦ࠙ࠛࡂ਄ߦၸⓍߐߖߚෘߐ 0.5Pm ߩ⓸ൻࠪ࡝ࠦࡦ

J. HTSJ, Vol. 48, No. 202

․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ
⸘᷹น⢻ߦߥࠆ㧚࿑ 5(b)ߦߪฦㇱߩ᷷ᐲߣᾲᛶ᛫
ߣᾲᵹ᧤ߩ᭽ሶࠍ␜ߒߡ޿ࠆ߇㧘SampleMembrane

Th

Ts

Q

Q

Beam

Gb
Q
Heat sink

T0
V

A

A

(a)
Th

Gs

Ts

Gb

T0

Q

(b)
࿑5

UC ࡃ࡯ࠢ࡟࡯ߩ MEMS ࠮ࡦࠨ࡯ߩේℂ⤑ࠍ㧘ߘߩ਄ߦ⊕㊄⭯⤑ߩᛶ᛫ㇱ߅ࠃ߮㈩✢ㇱࠍ᭴▽ߒߚᓟߢ㧘14Pm25Pm ⒟ᐲߩᣇᒻ⤑ 2 ୘ߣ
2Pm420Pm ߣ޿߁㐳޿᪞ᢙᧄએᄖߩㇱಽࠍࠛ࠶࠴ࡦࠣߔࠆ㧚ߎߩᱷߞߚ⓸ൻࠪ࡝ࠦࡦ⤑ࠍࡑࠬࠢߣߒߡࠪ࡝ࠦࡦၮ᧼ࠍ╬ᣇ⊛ߦࠛ࠶࠴ࡦࠣߔࠆ
ߎߣߢ㧘ࡅ࡯࠲࡯౗࠮ࡦࠨ࡯ߣߥࠆᣇᒻ⤑ 2 ୘߇ၮ᧼߆ࠄᶋ޿ߚ⁁ᘒߦߥࠆ㧚ᣇᒻ⤑ߪ࡝࡯࠼ࠍ౗
ߨࠆ਄⸥ߩ㐳޿᪞ᢙᧄߦࠃߞߡᡰ߃ࠄࠇߡ߅ࠅ㧘චಽߦᢿᾲߐࠇߚ⸘᷹ࠪࠬ࠹ࡓ߇Ḱ஻ቢੌߣߥࠆ㧚
⸘᷹ේℂࠍ࿑ 5 ߦ␜ߔ㧚᷹ቯኻ⽎ߩࠞ࡯ࡏࡦ࠽
ࡁ࠴ࡘ࡯ࡉ╬ߩ࠽ࡁ᧚ᢱߪ㧘ߎߩᣇᒻ⤑ 2 ୘ߩ㑆ߦ ᨞ߐࠇࠆ㧚ߤߜࠄ߆৻ᣇߩᣇᒻ⤑ౝߩ⊕㊄ᛶ᛫ߦㅢ㔚ടᾲߔࠆߎߣߢ⤑㑆ߦ᷷ᐲᏅࠍઃߌࠇ߫
ߎߩ⹜ᢱߩߺࠍㅢࠆᾲャㅍ߇⊒↢ߔࠆ㧚ߎߎߢ㧘ߎߩ࠮ࡦࠨ࡯ߩ㊀ⷐߥ᧦ઙߣߒߡᣇᒻ⤑ౝߩ᷷ᐲ߇৻ቯߢ޽ࠆߣ޿߁઒ቯ߇޽ࠆ㧚ߎࠇߪ᪞ߩᾲᛶ
᛫߇ᣇᒻ⤑ౝߩᛶ᛫ߦᲧߴߡߪࠆ߆ߦᄢ߈޿ߎߣ
߆ࠄታ⃻ߐࠇࠆ㧚ታ㓙ߦᢙ୯⸘▚ߒߡߺࠆߣ⏕߆ߦടᾲߒߡ޿ࠆ⤑ߢ 3 ࡄ࡯࠮ࡦ࠻⒟ᐲߩ᷷ᐲಽᏓ
ߒ߆↢ߓߥ޿㧚ടᾲߒߥ޿஥ߩ⤑ߢߪ߽߁ዋߒᄢ
߈ߥಽᏓ߇↢ߓࠆߥߤ㧘ߎࠇࠄߪ⸘᷹⺋Ꮕߦߥࠅ߁ࠆߩߢᵈᗧ߇ᔅⷐߢ޽ࠆ㧚ߎߩ⺋Ꮕߪήⷞߢ߈
ࠆߣߒߡ㧘⹜ᢱߩਔ┵ߩ᷷ᐲߪᏀฝߩᣇᒻ⤑ౝߦ⸳⟎ߐࠇߚ⊕㊄ߩᛶ᛫ㇱߩ᷷ᐲߣߒߡ࿑ߩࠃ߁ߦ

વᾲ 2009 ᐕ 1 ᦬

Gs Th  Ts

(11)ߣ޿߁㑐ଥ߇ᚑ┙ߔࠆߎߣ߆ࠄ㧘⹜ᢱߩᾲࠦࡦ
࠳ࠢ࠲ࡦࠬ Gs ߇ᓧࠄࠇࠆ㧚ߥ߅㧘ࠃࠅ⹦⚦ߦߪ᪞ౝߩ࡝࡯࠼ㇱಽߢߩ⊒ᾲ߽⠨ᘦߒߡ Gb ߪ᳿ቯߐࠇ㧘߹ߚ㧘⹜ᢱߩ㔚᳇વዉ₸߽หᤨߦ᷹ቯ಴᧪ࠆࠃ߁ߦ㈩✢߇ᣉߐࠇߡ޿ࠆ
[17]㧚ߎߩ⸘᷹ࠪࠬ࠹ࡓߦࠃߞߡ㧘ᦨㄭߢߪ㧘ᄢ߈ߊᦛߍߡ߽ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉߩᾲવዉ₸ߪ߶ߣࠎߤᄌൻߒߥ޿ߎߣ߇⏕⹺[18]ߐࠇߚࠅ㧘⓸ൻࡏࡠࡦ࠽ࡁ࠴ࡘ࡯ࡉߩ৻┵ߦઃട⊛⾰㊂ࠍၸⓍߐߖࠆߎߣߢᾲߩᢛᵹ૞↪ߩሽ࿷ࠍ⊒⷗[19]ߒߚ
ࠅ㧘ࠪ࡝ࠦࡦ࠽ࡁࡢࠗࡗߩ⴫㕙ࠍ⨹ߊߔࠆߎߣߢ
ࡈࠜࡁࡦߩᢔੂࠍჇᄢߐߖᾲ㔚ᄌ឵ߩᕈ⢻ࠍะ਄[20]ߐߖߚࠅߔࠆ⎇ⓥ߇ⴕࠊࠇߡ޿ࠆ㧚ߤߩ⎇ⓥ߽නߥࠆࠨࠗ࠭ലᨐߢߪߥ޿ᢾᣂߥ⚿ᨐࠍᓧߡ߅
ࠅ㧘࠽ࡁ᧚ᢱߩᾲ‛ᕈߩ⥝๧ᷓ޿ὐ߿ᔕ↪ᕈࠍታ㛎ߢ᣿ࠄ߆ߦߒߚࠗࡦࡄࠢ࠻ߪ㕖Ᏹߦᄢ߈޿㧚Gs

V

Gb Ts  T0

- 24 -

߹ߣ߼
࠽ࡁ᧚ᢱߩ୘೎ߩᾲ‛ᕈࠍᱜ⏕ߦ⸘᷹ߔࠆߚ߼
ߦߪ⹜ᢱߦวࠊߖߚ࠮ࡦࠨ࡯߇ᔅⷐߢ㧘ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉߥߤߩࡢࠗࡗ࡯⁁ߩ⹜ᢱ↪ߦ㐿⊒ߐࠇߚ⸘᷹ࠪࠬ࠹ࡓࠍ⚫੺ߒߚ㧚MEMS ߩ⓸ൻࠪ࡝ࠦࡦ⤑ࠍ↪޿ߚ UC ࡃ࡯ࠢ࡟࡯ߩᣇᑼߪ࠺ࡃࠗࠬ
ߩ⵾૞߇࿎㔍ߢ޽ࠆ߽ߩߩ⸘᷹ߪኈᤃߢ޽ࠆ㧚৻ᣇߢ㧘⪺⠪ࠄߩᣇᑼߪ࠮ࡦࠨ࡯ㇱߩᗵᐲ߇㜞޿ઍఘߣߒߡ㕒㔚᳇⠴ᕈ߇ഠࠆ㧚ߒ߆ߒ᭴ㅧ߇ࠪࡦࡊ
࡞ߢ޽ࠆߎߣ߆ࠄ⵾૞߇Ყセ⊛ኈᤃߢ⊒ዷ⊛ߥᔕ↪߽⷗ㄟ߹ࠇࠆ㧚⸘᷹ේℂߣߒߡߪ㧘೨⠪߇ᣇᒻ⤑ౝߩ᷷ᐲߩ৻᭽ᕈࠍㅊ᳞ߒߡ޿ࠆߩߦኻߒߡ㧘ᓟ⠪߇࠮ࡦࠨ࡯ߩ᷷ᐲߩಽᏓࠍ೑↪ߒߡ޿ࠆߣ޿
߁ኻᾖ⊛ߥࠕࡊࡠ࡯࠴ࠍขߞߡ޿ࠆὐߪ㕙⊕޿㧚ߎࠇࠄߪ౒ߦ⹜ᢱࠍㅢ㔚ടᾲߔࠆߎߣ߽ߥߊቯᏱ
ᴺߢᾲߩߺߩવዉࠍ⺞ߴࠄࠇࠆߎߣ߆ࠄା㗬ᕈ߇㜞޿ߣ޿߃ࠆ㧚੹ᓟߐࠄߦᵞ✵ߐߖߡ޿ߊߚ߼ߦ
ߪ㧘ធ⸅ᾲᛶ᛫ߩᓇ㗀ࠍឃ㒰ߔࠆታ㛎ᚻᴺߩ⏕┙߇ᦸ߹ࠇࠆ㧚଀߃߫㧘หߓ⹜ᢱࠍ૶ߞߡ㐳ߐࠍᄌ߃ߡࠦࡦ࠳ࠢ࠲ࡦࠬࠍ᷹ࠇࠇ߫ធ⸅ᛶ᛫߇หቯߢ
߈ࠆ㧚ߎߩࠃ߁ߥᛛⴚ㕙ߩะ਄ߣᐔⴕߒߡ㧘ࠃࠅᄙߊߩ⎇ⓥ⠪߇࠽ࡁ࠮ࡦࠨ࡯ࠍ᳇シߦ೑↪ߢ߈ࠆࠃ߁ߥ૕೙ߩ᭴▽߽㊀ⷐߢ޽ࠆ㧚

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․㓸㧦ࡑࠗࠢࡠ࡮࠽ࡁߩ⸘᷹ᛛⴚ

the Four-Point Three-Z Method, Nano Lett., 6-8(2006) 1589.
[11] Yu, C. et al., Thermal Conductance andThermopower of an Individual Single-Wall
Carbon Nanotube, Nano Lett., 5-9 (2005) 1842.
[12] Pop, E. et al., Thermal Conductance of an
Individual Single-Wall Carbon Nanotube above⻢ㄉT ሼ৻૕ဳ࠽ࡁ࠮ࡦࠨ࡯ߦ㑐ߔࠆ⎇ⓥߪ㧘ᒛ⥝వ↢㧔ᷡ⪇ᄢቇ㧕㧘↢↰┥਽᳁ 㧔਻Ꮊᄢቇ㧕㧘๋ㇹᶈ᮸వ↢㧔਻Ꮊᄢቇ㧕㧘ᷡ᳓ືᄦඳ჻㧔↥✚⎇㧕ࠍߪߓ߼ᄙߊߩᣇ‫ߩޘ‬ෳ↹ߣදജߢⴕࠊࠇߚ߽ߩߢ
޽ࠆ㧚߹ߚ㧘⑼ቇ⎇ⓥ⾌⵬ഥ㊄ߩេഥ߅ࠃ߮਻Ꮊ
ᄢቇࠦ࡜ࡏࠬ࠹࡯࡚ࠪࡦߩᯏེߦࠃߞߡᧄ⎇ⓥߩ৻ㇱߪታᣉߐࠇߚ㧚ߎߎߦ⸥ߒߡ⻢ᗧࠍ⴫ߔࠆ㧚㩷ෳ⠨ᢥ₂
[1] Cahill, D.G., Thermal Conductivity measurementfrom 30-750K: The 3w method, Rev. Sci. Inst.,

Room Temperature, Nano Lett., 6-1 (2006) 96.
[13] Zhang, X., et al., Measurements of thermal
conductivity and electrical conductivity of a single
carbon fiber, Int. J. Thermophysics, 21-4 (2000)
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[14] Nishijima, H. et al., Carbon nanotube tips forscanning probe microscopy: Preparation by acontrolled
processandobservationof

61-2 (1999) 802.
[2] Kading, O.W. et al, Thermal conduction inmetallized silicon-dioxide layers on silicon, Appl.
Phys. Lett., 65 (1994) 1629.
[3] Berber, S. et al., Unusually High Thermal
Conductivity of Carbon Nanotubes, Phys. Rev.

deoxyribonucleic acid, App. Phys. Lett., 74-26(1999) 4061.
[15] Takahashi, K., et al, Thermal conductivity of SiC
nanowire formed by combustion synthesis, High

Lett., 84-20 (2000) 4613.
[4] ਣጊ⨃ᄦ, නጀࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉߩᾲવዉ, ᾲ‛ᕈ, 19-3 (2005) 185㧚[5] Lukes, J.R. and Zhong, H., Thermal conductivityof individual single-wall carbon nanotubes,
ASME J. Heat Transfer, 129 (2007) 705.
[6] Hone, J. et al., Thermal conductivity ofsingle-walled carbon nanotubes, Phys. Rev. B, 59(1999) 2514.
[7] Hone, J. et al., Electrical and thermal transport
properties of magnetically aligned single wall
carbon nanotube films, App. Phys. Lett., 77-5
(2000) 666.
[8] Kim, P. et al., Thermal Transport Measurementsof Individual Multiwalled Nanotubes, Phys. Rev.
Lett., 87-21 (2001) 215502.
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Conductivity of a Single Carbon Nanotubes, Phys.

Temperatures-High Pressures, 37-2 (2008) 119.
[16] Dames, C., et al., A hot-wire probe for thermal
measurements of nanowires and nanotubes inside
a transmission electron microscope, Rev. Sci. Inst.,
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[17] Shi, L., et al., Measuring Thermal and
Thermoelectric Properties of One-Dimensional
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[18] Chang, C.W., et al., Nanotube Phonon WaveguidePhys. Rev. Lett., 99 (2007) 045901.
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Rev. Lett., 95 (2005) 065502.
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Conductivity of Individual Carbon Nanotubes byવᾲ 2009 ᐕ 1 ᦬- 25 -J. HTSJ, Vol. 48, No. 202

ࡊࡠࠫࠚࠢ࠻ Q‫ࠬ࡟ࡊࡦࡐޟ‬᳓಄ࠪࠬ࠹ࡓߩ㐿⊒‫ޠ‬Development of a Pump-less Water Cooling System

৻ᴺᏧ ⨃ବ㧔ਃ⪉㔚ᯏ㧔ᩣ㧕㧕
Shigetoshi IPPOUSHI (Mitsubishi Electric co. Ltd.)e-mail: Ipposhi.Shigetoshi@aj.MitsubishiElectric.co.jp㧝㧚ߪߓ߼ߦ
ㄭᐕ㧘㔚ሶᯏེߩᓸ⚦ൻ࡮㜞ᯏ⢻ൻ㧘㔚ജᯏེߩࠗࡦࡃ࡯࠲࡯ൻ࡮ዊဳൻߩᕆㅦߥㅴዷߦ઻ߞߡ㧘ᯏེౝㇱߩ⊒ᾲኒᐲ߇ᕆჇߒߡ߅ࠅ㧘಄ළ߇ᯏེߩ㒢⇇ᕈ⢻߿ኼ๮ࠍᏀฝߔࠆࠃ߁ߦߥߞߡ޿ࠆ㧚৻⥸ߦ㧘⊒ᾲ㊂߇Ⴧᄢߔࠆߦߒߚ߇ߞߡ㧘಄ළᒻᑼߪ⥄ὼⓨ಄߆ࠄᒝ೙ⓨ಄ᑼ߳㧘ߐࠄߦ಄ළ⢻ജߩ㜞޿᳓಄ᑼ߳ߣᄌࠊࠆ߇㧘᳓಄ᑼߦߪ಄ළᶧࠍᓴⅣߐߖࠆࡐࡦ
ࡊ߇ᔅⷐߢ㧘㊀㊂ߣᶖ⾌㔚ജ߇Ⴧᄢߔࠆߛߌߢߥߊ㧘ᶧṳࠇ߿ࡐࡦࡊ஗ᱛᤨߩା㗬ᕈࠍ⏕଻ߔࠆߚ߼ߦ
ⵝ⟎߇ᄢဳߦߥࠅ߇ߜߢࠦࠬ࠻߇㜞ߊ㧘ቯᦼ⊛ߥࡔࡦ࠹࠽ࡦ߽ࠬᔅⷐߣߥࠆ㧚ߘࠇࠁ߃㧘ା㗬ᕈ߇㊀ⷞߐࠇࠆㅢା࡮ᖱႎ⸳஻㧘ࠛࡀ࡞ࠡ࡯ଏ⛎⸳஻㧘㋕㆏࡮੤ㅢࠗࡦࡈ࡜ߥߤߩ㊀ⷐᣉ⸳㧔࡜ࠗࡈ࡜ࠗࡦ㧕߆ࠄߪ㧘ࡔࡦ࠹࠽ࡦࠬਇⷐߢା㗬ᕈߩ㜞޿ᄢኈ㊂࡮㜞ല₸಄ළࠪࠬ࠹ࡓ߇᳞߼ࠄࠇߡ޿ࠆ㧚㧞㧚᷷ᥦൻߩㅪ㎮ ৻ᣇ㧘࿾⃿ⷙᮨߢߩ᳇୥ᄌൻ߇⃻ታߦ↢ߓᆎ߼ߡ߅ࠅ㧘࿾⃿᷷ᥦൻኻ╷߇ᔅⷐߣߐࠇߡ޿ࠆ㧚ኻ╷ߩਥᵹߪ㧘⋭ࠛࡀᯏེߩ㐿⊒߅ࠃ߮࡝ࠨࠗࠢ࡞ߩଦㅴ
ߢ޽ࠆ߇㧘ᧄႎߢߪ᡼ᾲ૕♽ߩ᭴ㅧᄌ㕟ߦࠃࠆ᷷ᥦ
ൻኻ╷ߦߟ޿ߡᬌ⸛ߔࠆ㧚 ࿑ 1 ߦ㧘⃻⁁ߩ᡼ᾲ૕♽ߩ᭎⇛ࠍ␜ߔ㧚଀߃߫㧘‫ޟ‬IT ᣉ⸳‫ߦޠ‬㑐ߒߡߺࠆߣ㧘IT ᯏེߩ㜞ㅦൻ࡮ᄢኈ㊂ൻߦ઻޿ቶౝߢ⊒↢ߔࠆ⊒ᾲ㊂ߪᕆㅦߦჇᄢ
ߒߡ߅ࠅ㧘ᯏེߩା㗬ᕈ⏕଻ߩߚ߼ߦᯏེ಄ළ⢻ജ߇Ⴧᄢߒߡ޿ࠆ㧚ߎߩ಄ළ⢻ജߩჇᄢߪ㧘ࠛࡀ࡞ࠡ࡯૶↪㊂ߩჇട߅ࠃ߮ቶᄖ߳ߩឃᾲ㊂ߩჇᄢࠍዉߊ㧚 ߎࠇ߹ߢ㧘࿾⃿ߣ޿߁Ꮒᄢߥࡅ࡯࠻ࠪࡦࠢߪ‫ޟ‬ή㒢‫ߣࠆ޽ߢޠ‬㍲ⷡߐࠇߡ޿ߚ߇㧘ੱญኒ㓸߅ࠃ߮ᕆỗߥᯏེ⊒ᾲ㊂ߩჇᄢߦࠃࠅ㧘࿾⃿਄ߦὐ࿷ߔࠆࡅ
࡯࠻ࠬࡐ࠶࠻ࠍ⊒↢ߐߖ㧘߹ߚᐔဋ᳇᷷ߩ਄᣹ࠍᒁ
߈⿠ߎߒߡ޿ࠆ㧚ߘࠇࠁ߃㧘਄⸥ߒߚឃᾲ㊂ߩჇᄢߪᄖ᳇᷷ᐲߩ਄᣹ࠍ߽ߚࠄߒ㧘ߐࠄߦᄖ᳇᷷ᐲߣቶ

વᾲ 2009 ᐕ 1 ᦬ౝ᷷ᐲߩᏅߦᏀฝߐࠇࠆⓨ⺞ᯏེല₸ߩૐਅࠍᒁ
߈⿠ߎߒ㧘ᦝߥࠆ಄ළ⢻ജߩჇᄢࠍ↢ߓߐߖࠆ㧚 ߎࠇࠄߩߎߣߪ㧘ੱญኒ㓸࿾ߦ߅޿ߡ㗼⪺ߢ޽ࠅ㧘߹ߚ‫ޟ‬IT ᣉ⸳‫․ߦޠ‬ൻߒߚ߽ߩߢߪߥߊ㧘‫ޟ‬᳃↢‫ޠ‬㧘‫↥ޟ‬ᬺ‫ޠ‬㧘‫ޟ‬ㆇャ‫ੱߩߡోߤߥޠ‬㘃ᵴേߦଥࠊࠆឃ
ᾲ߇ᄖ᳇ࠍᇦ૕ߣߒߡ࡝ࡦࠢߒᆎ߼ߡ߅ࠅ㧔᷷ᥦൻߩㅪ㎮㧕㧘ࡅ࡯࠻ࠕࠗ࡜ࡦ࠼⃻⽎㧘࿾⃿᷷ᥦൻߥߤ
ᄢⷙᮨߥ᳇୥ᄌേࠍᒁ߈⿠ߎߒߡ޿ࠆ㧚 ੱ㘃ߩᵴേࠍᛥ೙ߔࠆߎߣߪ࿎㔍ߢ޽ࠅ㧘੹ᓟ߽ੱญߪჇടߒ⛯ߌ㧘߹ߚ਎⇇ߩ↢ᵴ᳓Ḱ߽ะ਄ߒ⛯ߌࠆߣ⠨߃ࠄࠇ㧘਄⸥᳇୥ᄌേߪടㅦߔࠆߣᕁࠊࠇ
ࠆ㧚ߘߎߢ㧘ߎߩ‫ޟ‬᷷ᥦൻߩᖡ޿ㅪ㎮‫ࠍޠ‬ᛥ೙ߔࠆᚻᲑߩ৻ߟߣߒߡ㧘᡼ᾲ૕♽ߩ᭴ㅧォ឵߇ᔅⷐߢ޽
ࠆߣ⠨߃ߡ޿ࠆ㧚ᓥ᧪ߩ᡼ᾲ૕♽ߪ㧘࿑ 2 ਄Ბߦ␜ߔࠃ߁ߦ㧘㔚ሶᯏེ߆ࠄቶౝ߳ࡈࠔࡦߦࠃࠆⓨ಄߹ߚߪࡐࡦࡊߦ
ࠃࠆ᳓಄ߦࠃࠅ᡼ᾲߐࠇ㧘ߐࠄߦቶౝࠍᔟㆡߥⅣႺ
ߦߔࠆߚ߼ߦⓨ⺞ᯏེߥߤߦࠃࠅቶᄖ߳᡼ᾲߔࠆ
૕♽߇ᄙ޿㧚ߎߩ႐ว㧘࿑␜ߔࠆㅢࠅ㧘㔚ሶᯏེߩ⊒ᾲ㊂ߦട߃ߡ㧘᡼ᾲᯏེߩᶖ⾌㔚ജಽߛߌᄙ޿ᾲ
㊂ࠍቶᄖ߳ឃ಴ߒߥߌࠇ߫ߥࠄߥ޿㧚ߎߩᓥ᧪ߩ᡼
ᾲ૕♽߆ࠄᦨ߽ࠪࡦࡊ࡞ߥ⋥ធ᡼ᾲ૕♽㧔࿑ 2 ਅᲑ㧕ߦ᭴ㅧォ឵ߔࠆߎߣ߇ߢ߈ࠇ߫㧘⚂ 40㧑ߩ⋭ࠛࡀ߅ࠃ߮ CO2 ឃ಴㊂ߩ೥ᷫ߇㆐ᚑน⢻ߣ⠨߃ࠄࠇࠆ㧚߹ߚ㧘࿾ၞో૕ߩឃᾲኒᐲૐᷫߦࠃࠅ㧘਄⸥ߒߚ‫ޟ‬᷷ᥦൻߩᖡ޿ㅪ㎮‫߇ޠ‬ᛥ೙ߐࠇ㧘ᦝߥࠆᡷༀ
ലᨐ߇ᦼᓙߢ߈ࠆ㧚 ߎࠇࠄߩߎߣߪ㧘⥋ᭂᒰߚࠅ೨ߩߎߣߢ޽ࠆ߇㧘⋥ធ᡼ᾲ૕♽ࠍታ⃻ߢ߈ࠆᄢኈ㊂/㐳ዤဳߩᾲ࠺ࡃ
ࠗࠬߪ⷗ᒰߚࠄߥ޿㧚㧟㧚ౖဳ⊛ߥࡅ࡯࠻ࡄࠗࡊ
ߎߩ⋥ធ᡼ᾲ૕♽ߦㆡߔࠆ᡼ᾲ࠺ࡃࠗࠬߣߒߡ㧘ࡅ࡯࠻ࡄࠗࡊ߇޽ࠆ㧚ౖဳ⊛ߥࡅ࡯࠻ࡄࠗࡊࠍ࿑ 2㧔a㧕ߦ␜ߔ㧚ኒ㐽ኈེߩਛߦㆡ㊂ߩ૞േᵹ૕ࠍኽᱛ
ߒߚ߽ߩߢ㧘ฃᾲㇱߦ⸳ߌࠄࠇߚ㔚ሶᯏེ߆ࠄߩ

- 26 -J. HTSJ, Vol. 48, No. 202

ࡊࡠࠫࠚࠢ࠻ Q

ᛥ೙䈏㔍䈚䈇

ੱ㘃ᵴേ䈱᜛ᄢ
✛࿾ᷫዋ㪚㪦㪉ឃ಴㊂Ⴧᄢ࿾⃿᷷ᥦൻൻ⍹Άᢱᶖ⾌Ⴧᄢ⇣ Ᏹ ᳇ ⽎↢ᵴⅣႺᖡൻ

䍩䍎䍢䍏䍐䍵䍻䍢䍼⃻⽎

⾗Ḯ䈱ᨗᷢ

ឃᾲ㊂Ⴧᄢ
ឃᾲേജჇᄢ
䋨ᶖ⾌㔚ജჇᄢ䋩ੱญჇട䊶ੱ㘃ᵴേ᜛ᄢⓨ⺞ᯏല₸ૐਅ᳃ ↢ⓨ⺞ᯏല₸ૐਅ๟࿐ⓨ᳇᷷ᐲ਄᣹㪠 㪫 ᣉ ⸳↥ ᬺⓨ⺞ᯏല₸ૐਅ

ឃᾲേജჇᄢ
䋨ᶖ⾌㔚ജჇᄢ䋩ឃᾲ㊂Ⴧᄢ㪚㪦㪉ឃ಴㊂Ⴧᄢ
ឃᾲ㊂Ⴧᄢ

⊒㔚㊂Ⴧᄢ

⊒㔚ᣉ⸳

ឃᾲേജჇᄢ䋨ᶖ⾌㔚ജჇᄢ䋩ⓨ⺞ᯏല₸ૐਅ

ឃᾲ㊂Ⴧᄢ䋨ᶖ⾌䉣䊈䊦䉩Ⴧᄢ䋩ㆇ ャ᡼ᾲ૕♽䈮ଥ䉒䉎䇸᷷᷷ᥦൻ䈱ㅪ㎮䇹ᛛⴚ㕟ᣂ䈮䉋䉍ᛥ೙䈏ኈᤃ࿑ 1 ᷷ᥦൻߩㅪ㎮ᓥ᧪᡼ᾲ᭴ㅧ
㔚ሶᯏེ

⊒ᾲḮ
100䋦

ቶౝⓨ㑆

䋫㪈㪇䋦㪬㪧

䊐䉜䊮䉇䊘䊮䊒േജ䋺㪈㪇䋦

ቶౝ
110䋦

ቶᄖⓨ㑆

䋫㪊㪇䋦㪬㪧

ቶᄖ
140䋦

䊍䊷䊃䊘䊮䊒േജ䋺㪊㪇䋦᭴ㅧォ឵ᔅⷐ
⋥ធ᡼ᾲ᭴ㅧ
㔚ሶᯏེ

⊒ᾲḮ
100䋦

ቶᄖⓨ㑆

ឃᾲ↪㚟േ㔚ജ䋺䋰䋦

ቶᄖ
100䋦

ឃᾲ㊂䈱ૐਅ 㹢 ᶖ⾌䉣䊈䊦䉩㪆䌃䌏䋲ឃ಴㊂䋴䋰䋦ᷫ࿑ 2 ᡼ᾲ᭴ㅧߩォ឵

વᾲ 2009 ᐕ 1 ᦬- 27 -J. HTSJ, Vol. 48, No. 202

ࡊࡠࠫࠚࠢ࠻ Q
















᳇ᶧᐓᷤ䈮䉋䉎ᵹേ㒖ኂ
᡼ᾲ

᡼ᾲ

᡼ᾲㇱ

⫳᳇ᵃ

᡼ᾲㇱ

಄ළ㘑
ᶧ૕

ฃᾲ

⫳᳇

ฃᾲ

⫳᳇ᵃ

ฃᾲㇱ

ฃᾲㇱ

ᶧ૕

㧔a㧕න▤ဳᾲࠨࠗࡈࠜࡦ          㧔b㧕࡞࡯ࡊဳᾲࠨࠗࡈࠜࡦ
࿑ 2 ౖဳ⊛ߥࡅ࡯࠻ࡄࠗࡊ
⊒ᾲߦࠃࠅ㧘ฃᾲㇱౝߩᶧ૕߇ᴣ㛛߹ߚߪ⫳⊒㧔ᶧ૕߇ẜᾲࠍๆ෼ߒߡ⫳᳇߳⋧ᄌൻߔࠆ㧕ߒ㧘ฃᾲㇱౝ⫳᳇࿶ജ߇਄᣹ߔࠆ㧚৻ᣇ㧘᡼ᾲㇱߪ㧘ㅢᏱᄖოߦࡈࠖࡦ߇⸳ߌࠄࠇㅢ㘑಄ළߐࠇߡ߅
ࠅ㧘᡼ᾲㇱౝߩ⫳᳇߇ಝ❗㧔⫳᳇߇଻᦭ߔࠆẜᾲࠍ᡼಴ߒߡᶧ૕߳⋧ᄌൻߔࠆ㧕ߒ㧘᡼ᾲㇱߩო߅ࠃ߮᡼ᾲࡈࠖࡦࠍ੺ߒߡㅢ㘑ߐࠇࠆⓨ᳇߳ឃᾲߔࠆ㧚ߘߩ㓙㧘᡼ᾲㇱౝ⫳᳇࿶ജ߇ૐਅߔࠆ㧚ߒߚ߇ߞߡ㧘᡼ᾲㇱౝࠃࠅฃᾲㇱౝߩ⫳᳇࿶ജ߇㜞ߊߥࠅ㧘ฃᾲㇱߢ⊒↢ߒߚ⫳᳇ߪ᡼ᾲㇱ߳⒖േߒ㧘ߘߩ⫳᳇ߩᵹࠇߦࠃࠅᾲ߇ャㅍߐࠇࠆ㧚ߐࠄߦ㧘᡼ᾲㇱౝߢಝ❗ߒߡ↢ᚑߐࠇߚᶧ૕ߪ㧘㊀ജ㧘Ძ⚦▤ജ߅ࠃ߮㆙ᔃജߥߤߩ⥄ὼߩജߦࠃࠅ᡼ᾲ
ㇱ߆ࠄฃᾲㇱ߳ㆶᵹߐࠇ㧘ߎࠇࠄ⫳᳇߅ࠃ߮ᶧ૕
ߩㅪ⛯⊛ߥᓴⅣ߅ࠃ߮⋧ᄌൻࠍ೑↪ߒߡ㧘ᄖㇱേജਇⷐߢ㜞ല₸ߥ᡼ᾲࠍታ⃻ߒߡ޿ࠆ㧚࿑ 2㧔a㧕ߪ㧘න▤ဳᾲࠨࠗࡈࠜࡦߣ޿߁ᦨ߽
ౖဳ⊛ߥࡅ࡯࠻ࡄࠗࡊߢ޽ࠆ߇㧘࿑ࠃࠅಽ߆ࠆࠃ
߁ߦ㧘ห৻ㅢ〝ౝߦ⫳᳇ߩᵹࠇߣᶧ૕ߩᵹࠇ߇ኻ
ะߒߡ⊒↢ߔࠆߚ߼㧘᳇ᶧ⇇㕙ߦᄢ߈ߥߖࠎߛࠎ
ജ߇⊒↢ߔࠆ㧚ߎߩߖࠎߛࠎജߪ㧘▤ᓘ߇ዊߐߊ㧘ᾲャㅍ㊂㧔⫳᳇߅ࠃ߮ᶧ૕⒖േ㊂㧕߇ᄢ߈ߊߥࠆ
߶ߤᄢ߈ߊߥࠅ㧘᡼ᾲㇱ߆ࠄฃᾲㇱ߳ߩᶧ૕ߩㆶ
ᵹࠍ㒖ኂߔࠆࠃ߁ߦߥࠆ㧚ߘࠇࠁ߃㧘ዊኈ㊂ߩ⊒ᾲᯏེߦኻߒߡㆡ↪ߐࠇߡ޿ࠆ㧚Ყセ⊛ᄢኈ㊂ߩ⊒ᾲᯏེߦኻߒߡߪ㧘࿑ 2㧔b㧕ߦ␜ߔ࡞࡯ࡊဳᾲࠨࠗࡈࠜࡦ߇૶↪ߐࠇࠆ㧚ᵹ〝

વᾲ 2009 ᐕ 1 ᦬- 28 -

߇㧘ᶧ૕ኾ↪ㅢ〝ߣ⫳᳇߹ߚߪੑ⋧ᵹኾ↪ㅢ〝ߦಽ㔌ߐࠇߚ࡞࡯ࡊ⁁ߩ㈩▤߆ࠄߥࠆࡅ࡯࠻ࡄࠗ
ࡊߢ㧘਄⸥ߒߚ᳇ᶧ⇇㕙ߦ↢ߓࠆߖࠎߛࠎജ߇ήߊ㧘Ყセ⊛ᄢኈ㊂ߩᾲࠍャㅍߔࠆߎߣ߇ߢ߈ࠆ㧚㧠㧚ࡐࡦࡊ࡟ࠬ᳓಄ࠪࠬ࠹ࡓߩ᭎⇛਄⸥ߒߚᾲࠨࠗࡈࠜࡦߪ㧘㊀ജ೑↪ߩࡅ࡯࠻ࡄ
ࠗࡊߢ޽ࠆߎߣ߆ࠄ㧘ේℂ਄㧘ฃᾲㇱࠃࠅ਄ᣇߦ
᡼ᾲㇱࠍ⸳ߌߥߌࠇ߫േ૞ߔࠆߎߣ߇ߢ߈ߥ޿㧚৻ᣇ㧘ࠃࠅ৻⥸ߦࡅ࡯࠻ࡄࠗࡊߣ๭߫ࠇࠆᲫ⚦▤ജဳࡅ࡯࠻ࡄࠗࡊߪ㧘ኒ㐽ኈེౝ㕙ߦᲫ⚦▤ജࠍ⊒↢ߔࠆ࠙ࠖ࠶ࠢߣ๭߫ࠇࠆᄙሹ⾰‛⾰㧔Ḵ㧘㊄✂㧘❫⛽㧘὾⚿㊄ዻߥߤ㧕߇⸳ߌࠄࠇߡ߅ࠅ㧘㊀ജߦㅒࠄߞߡ᡼ᾲㇱߩᶧ૕ࠍฃᾲㇱߦㆶᵹߐߖ
ࠆߎߣ߇น⢻ߢ޽ࠆ߇㧘ታ↪਄㜞‫ޘ‬ᢙච cm ⒟ᐲ
ߢ޽ࠅ㧘৻⥸⊛ߦᄖㇱേജਇⷐߥ᡼ᾲ࠺ࡃࠗࠬߪ
᡼ᾲེ⸳⟎૏⟎߇೙㒢ߐࠇ㧘㜞ߐ߇ᄢ߈ߊߥߞߚ
ࠅ㧘ฃᾲㇱߣ᡼ᾲེߩ࡟ࠗࠕ࠙࠻߇೙㒢ࠍฃߌߚࠅߔࠆߣ޿߁໧㗴߇޽ࠆ㧚߹ߚ㧘Ყセ⊛ᄢኈ㊂ߩ⊒ᾲᯏེߦኻᔕน⢻ߥ࡞࡯ࡊဳࡅ࡯࠻ࡄࠗࡊߢ
߽㧘ᶧ૕ߣ⫳᳇ᵃ߇ᷙว⁁ᘒߢᵹࠇࠆߚ߼᡼ᾲེ
ౝߩᵹേᛶ᛫߇ᄢ߈ߊ㧘⚦▤ࠍᄙᢙ㈩⟎ߒߡⓨ಄ㇱ᡼ᾲ㕙ⓍࠍჇടߐߖࠆߥߤߩ᡼ᾲེߩ㜞ᕈ⢻ൻ࡮ࠦࡦࡄࠢ࠻ൻ߇㔍ߒ޿㧚ߘࠇࠁ߃㧘ᓥ᧪ߩࡅ࡯࠻ࡄࠗࡊߪㆡ↪▸࿐߇㒢ࠄࠇߡ߅ࠅ㧘਄⸥ߒߚࡈࠔࡦߦࠃࠆⓨ಄߿ࡐࡦࡊߦࠃࠆ᳓಄߇㔚ሶᯏེ಄ළߩਥᵹߣߥߞߡ޿ࠆ㧚

J. HTSJ, Vol. 48, No. 202

ࡊࡠࠫࠚࠢ࠻ Qߘߎߢ㧘ߎࠇࠄߩ⺖㗴ࠍ⸃᳿ߔࠆߚ߼ߦ਄ㇱ߆ࠄਅᣇ߳ᾲャㅍߔࠆ᡼ᾲ࠺ࡃࠗࠬ㧔࠻࠶ࡊࡅ࡯࠻
ࡕ࡯࠼ࡅ࡯࠻ࡄࠗࡊ㧕ߩ㐿⊒߇⹜ߺࠄࠇߡ޿ࠆ㧚ߘߩ৻଀ࠍએਅߦ೉᜼ߔࠆ㧚㧔a㧕 ⚦ኒ࠙ࠖ࠶ࠢࠍ⫳⊒ㇱߩߺߦ⸳ߌߚࠠ
ࡖࡇ࡜࡝࡯ࡐࡦࡊ࡞࡯ࡊࡅ࡯࠻ࡄࠗࡊ
[1]߹ߚߪ࡞࡯ࡊࡅ࡯࠻ࡄࠗࡊ[2]㧚
㧔b㧕 ㅒᡰᑯࠍᄙ↪ߒߚࠬࠗ࠶࠴ࡦࠣᑼࡅ࡯
࠻ࡄࠗࡊ[3]㧚
㧔c㧕 ᶧ૕᳹ߺ឴ߍ↪ࡅ࡯࠲ࠍขઃߌߚടᾲ
࡝ࡈ࠹ࠖࡦࠣᑼࡅ࡯࠻ࡄࠗࡊ[4]㧔d㧕 ඨㅘ⤑ࠍ૶↪ߒߡᶐㅘ࿶ജࠍ೑↪ߒߚᶐㅘᑼࡅ࡯࠻ࡄࠗࡊ[5-6]ߎࠇࠄߪ৻ㇱታ↪ൻ߇⹜ߺࠄࠇߡ޿ࠆ߇㧘േ૞/㐳ᦼା㗬ᕈ㧘㐳〒㔌ᾲャㅍ㧘ᄢኈ㊂࡮㜞ല₸ᾲャㅍ㧘ᄖㇱേജਇⷐ㧘೙ᓮਇⷐߥߤ㧘ᓥ᧪ࡅ࡯࠻ࡄ
ࠗࡊߩ೑ὐࠍ៊ߥࠊߕߦ⋡⊛ࠍ㆐ᚑߢ߈ࠆ߽ߩߪή޿㧚ߘߎߢ㧘ࡐࡦࡊ᳓಄ࠪࠬ࠹ࡓߣ࡞࡯ࡊဳࡅ࡯࠻
ࡄࠗࡊߩ೑ὐߩߺࠍⲢวߒ㧘಄ළേജਇⷐߢ਄ㇱ߆ࠄਅᣇ߳㐳〒㔌ᾲャㅍน⢻ߥ಄ළࠪࠬ࠹ࡓߣ
ߒߡࡐࡦࡊ࡟ࠬ᳓಄ࠪࠬ࠹ࡓߩ㐿⊒ࠍ⹜ߺߚ㧚
1 ┨ߢㅀߴߚࠃ߁ߦࡐࡦࡊ᳓಄ࠪࠬ࠹ࡓߪᄙ
ߊߩ໧㗴ࠍᛴ߃ߡ޿ࠆ߇㧘ᄢኈ㊂࡮㜞ല₸᡼ᾲ㧘ࡈ࡟ࠠࠪࡉ࡞ߥ࡟ࠗࠕ࠙࠻ߥߤᄙߊߩ೑ὐࠍ
᦭ߔࠆ㧚৻ᣇ㧘࡞࡯ࡊဳࡅ࡯࠻ࡄࠗࡊߪ㧘਄⸥ߒߚ࡟ࠗࠕ࠙࠻ߩ೙㒢߇޽ࠆ߽ߩߩ㧘᭴ㅧ߇ࠪࡦࡊ࡞ߢ㐳ኼ๮㧘㜞ା㗬ᕈ㧘ࡔࡦ࠹࠽ࡦࠬࡈ࡝
࡯㧘ᄖㇱേജਇⷐߥߤߩᄙߊߩ೑ὐࠍ᦭ߒߡ޿
ࠆ㧚ᧄ㐿⊒ߢߪ㧘࿑ 2㧔b㧕ߦ␜ߔ࡞࡯ࡊဳࡅ࡯
࠻ࡄࠗࡊౝߩ㜞᷷ᶧ૕ߩᓴⅣᵹߦ⌕⋡ߒ㧘ਅᣇ߳ャㅍߐࠇࠆ㜞᷷ᶧ૕߆ࠄ᡼ᾲߔࠆߎߣ߇ߢ
߈ࠇ߫࠻࠶ࡊࡅ࡯࠻ࡕ࡯࠼ࡅ࡯࠻ࡄࠗࡊࠍታ
⃻ߢ߈ࠆߣ⠨߃ߚ㧚߹ߚ㧘㜞᷷ᶧ૕ߩᓴⅣߪ᳇
ᶧߩኒᐲᏅߦ⿠࿃ߔࠆ߇㧘ߎߩᓴⅣࠍ቟ቯߐߖ

ࠆߚ߼ߦߪ⊒↢ߒߚ⫳᳇ࠍ቟ቯߒߡᶧൻߔࠆ
ߎߣ߇ᔅⷐߢ޽ࠅ㧔࡞࡯ࡊဳࡅ࡯࠻ࡄࠗࡊߩ᡼
ᾲེ㧕㧘ߘߎߢ࡞࡯ࡊဳࡅ࡯࠻ࡄࠗࡊㅜਛߩᵹ
〝ࠍᾲ⊛ߦធ⸅ߐߖᾲ੤឵ߐߖࠆߎߣߦࠃࠅ㧘㜞᷷ᶧ૕ߩ቟ቯߒߚᓴⅣࠍታ⃻ߢ߈ࠆߣ⠨߃
ߚ[7]㧚
ࡐࡦࡊ࡟ࠬ᳓಄ࠪࠬ࠹ࡓߩ᭎⇛ࠍ࿑ 3 ߦ␜ߔ㧚ߘߩേ૞ේℂߪ㧘㔚ሶᯏེߩേ૞ߦ઻߁㔚᳇⊛៊ᄬ߇ࠛࡀ࡞ࠡ࡯ᒻᘒࠍ឵߃ᾲߦߥࠅ㧘ߘߩᾲߪ⫳⊒ེౝㇱߩᶧ૕߳વࠊࠅ㧘ᶧ૕ࠍ᣹᷷ߐߖ
ࠆ㧚ᶧ૕᷷ᐲ߇છᗧߩ᷷ᐲߦ㆐ߔࠆߣ㧘⫳⊒ེౝߢᴣ㛛߇㐿ᆎߒ㧘ߘࠇߦࠃࠅ↢ߓߚ⫳᳇ᵃߩᶋജߦࠃࠅ㧘๟࿐ᶧ૕ࠍ઻޿ੑ⋧ᵹ૕ߣߒߡ਄
᣹ߒᆎ߼ࠆ㧚ᾲ੤឵ེౝㇱߢߪ㧘ᵹ౉ߔࠆੑ⋧ᵹ૕ߩ⫳᳇ࠍಝ❗ߒ㧘᡼ᾲེ߳㜞᷷ߩᶧ૕ߩߺ
ࠍㅍ಴ߒ㧘᡼ᾲེࠍㅢᵹߔࠆ㓙಄߿ߐࠇߚૐ᷷
ᶧ૕߇㧘ᾲ੤឵ེߢ⫳᳇ࠍಝ❗ߐߖߟߟ੍ᾲߐ
ࠇ㧘㜞᷷ߩᶧ૕ߣߒߡ⫳⊒ེߦᚯࠅ㧘⥄ὼߩജߩߺࠍ૶↪ߒߚㅪ⛯⊛ߥᶧ૕ᓴⅣࠍ⊒↢ߐߖ㧘಄ළߔࠆߎߣ߇ߢ߈ࠆ㧚ߥ߅㧘᡼ᾲེౝㇱߩᵹࠇ߇ᶧ૕න⋧ᵹߢ޽ࠆߚ߼ᵹേᛶ᛫߇ዊߐߊ㧘᡼ᾲེߩ㜞ᕈ⢻ൻ㨯ࠦࡦࡄࠢ࠻ൻ߇ኈᤃߢ޽ࠅ㧘᡼ᾲེࠍ⫳⊒ེߩ਄ᣇߦ⸳⟎ߒߥߌࠇ߫ߥࠄ
ߥ޿೙⚂߽ߥ޿㧚ߎߩࠃ߁ߦ㧘ࡐࡦࡊ࡟ࠬ಄ළࠪࠬ࠹ࡓߪ⫳᳇ᵃߩᶋജࠍ㚟േജߣߒߡ಄ළᶧࠍᓴⅣߐߖࠆߚ߼㧔᳇ᵃࡐࡦࡊലᨐ㧕㧘ࡐࡦࡊߩࠃ߁ߥᯏ᪾
⊛นേㇱ߇ߥߊ㧘ࡔࡦ࠹࠽ࡦࠬਇⷐߢା㗬ᕈߩ㜞޿಄ළࠪࠬ࠹ࡓࠍ᭴▽ߔࠆߎߣ߇ߢ߈ࠆ㧚 ᧄ᭴ᚑߦ㑐ߒߡߪ⹜૞ᯏߦࠃࠅ㧘⿠േ࡮േ૞቟ቯᕈߥߤฦ⒳ታ㓙ߦ⠨߃ࠄࠇࠆേ૞ࡕ࡯
࠼ߦ߅޿ߡ⹏ଔࠍታᣉߒ㧘ᱜᏱߥേ૞ࠍ⏕⹺
ߒߚ[8]㧚
ߎߩࠃ߁ߦ㧘േ૞㧛㐳ᦼ቟ቯᕈ㧘ࠦࠬ࠻㧘ኈ
Ⓧ㧘㊀㊂㧘ᾲャㅍ㊂㧘ᾲャㅍ〒㔌ߥߤታ↪ߦଏ ᾲ੤឵ེ
᡼ᾲ ེ


᡼ᾲ




಄ළ㘑
㔚ሶ
ᯏེ䋨⊒ᾲ ૕䋩࿑ 3 ࡐࡦࡊ࡟ࠬ᳓಄ࠪࠬ࠹ࡓߩ᭎⇛ᶧ૕

વᾲ 2009 ᐕ 1 ᦬- 29 -

⫳᳇ᵃ

ฃᾲ

⫳⊒ེ

J. HTSJ, Vol. 48, No. 202

ࡊࡠࠫࠚࠢ࠻ Qߔࠆ਎⇇ೋߩ⥄ὼߩജߩߺࠍ೑↪ߒߡ਄ㇱ߆ࠄਅᣇ߳㐳〒㔌ᾲャㅍߔࠆߎߣ߇ߢ߈ࠆ࠻࠶ࡊࡅ
࡯࠻ࡕ࡯࠼ࡅ࡯࠻ࡄࠗࡊࠍ㐿⊒ߔࠆߎߣ߇ߢ߈ߚ㧚㧡㧚ࡐࡦࡊ࡟ࠬ᳓಄ࠪࠬ࠹ࡓߩ․㐳ࡐࡦࡊ࡟ࠬ᳓಄ࠪࠬ࠹ࡓߪ㧘಄ළߦᔅⷐߥ㔚ജ߇ਇⷐߥ಄ළེߢ޽ࠅ㧘ߐࠄߦએਅߩ․㐳ࠍ᦭ߔࠆ㧚Ԙ ਎⇇ೋ㧘⥄ὼߩജߩߺࠍ೑↪ߒߡ਄ᣇ߆ࠄਅ
ᣇ߳㐳〒㔌ᾲャㅍߔࠆߎߣ߇ߢ߈ࠆታ↪࡟ࡌ࡞ߩ಄ළེߢ޽ࠆ㧚ԙ ࡐࡦࡊࠍേ߆ߔࡕ࡯࠲࡯㧘ࡕ࡯࠲࡯↪㔚Ḯ㧘㔚Ḯ/೙ᓮ↪ߩ㈩✢㧘ࡔࡦ࠹࠽ࡦࠬⓨ㑆߇ਇⷐߢ޽ࠆߚ߼㧘ዊဳ࡮シ㊂ߢ޽ࠅ㧘߹ߚන৻ㇱຠߣߒߡߩขᛒ޿߇น⢻ߢ߆ߟ⥄ᓞ⊛ߦേ૞/஗ᱛߔࠆ㧚Ԛ ᯏ᪾⊛ߥนേㇱ߇ߥ޿ߚ߼㧘ା㗬ᕈ߇㜞ߊ㧘㐳ኼ๮ߢቯᦼ⊛ࡔࡦ࠹࠽ࡦࠬ߇ਇⷐߢ޽ࠆ㧚ԛ ᡼ᾲེߩ૏⟎ࠍㆬ߫ߕ㧘⥄↱ߥ࡟ࠗࠕ࠙࠻߇
น⢻ߢ޽ࠆ㧚Ԝ ᶖ⠻ㇱຠ߇ή޿ߚ߼㧘⋭⾗Ḯൻߦೣߒ㧘ㅢᏱ⷗ᔓࠇ߇ߜߥᶖ⠻ຠߩ⵾ㅧ/ャㅍ/੤឵ߦ઻߁
ࠛࡀ࡞ࠡ࡯ߐ߃߽ਇⷐߥⅣႺߦೣߒߚ಄ළེߢ޽ࠆ㧚ԝ ⥄ὼ಄ᇦߣߒߡ᳓ࠍ૶↪ߒߡ߅ࠅ㧘߹ߚౝㇱ࿶ജࠍᷫ࿶ߔࠆߎߣߦࠃࠅ 100͠એਅ㧔ߚߣ
߃߫ 40͠㧕ߢ߽േ૞ߔࠆ㧚ߐࠄߦ㧘ਇಓᶧߩ૶↪ߦࠃࠅ㧘๟࿐᷷ᐲ߇᳓ߩಝ࿕ὐ㧔0͠㧕એਅߢߩ૶↪߽น⢻ߢ޽ࠆ㧚࡟ࠬ᳓಄ࠪࠬ࠹ࡓߩ㐿⊒ࠍⴕ޿㧘ᱜᏱߥേ૞ࠍ⏕⹺ߒߚ㧚੹ᓟ㧘⃻࿷㐿⊒ਛߩ㔚㋕↪㔚ജᄌ឵ེ߳ߩㆡ
↪ࠍ⹜ߺ㧘ߐࠄߦ㧘ࠨ࡯ࡃ࡯࡞࡯ࡓ㧘Ꮏ႐ߥߤᄢဳߩⓨ⺞⸳஻ࠍ઻߁ᔕ↪଀ߦኻߒߡㆡᔕࠍᬌ⸛ߒ㧘‫ޟ‬࿾⃿᷷ᥦൻኻ╷㧔⋭ࠛࡀ㧘CO2 ೥ᷫ㧘⋭⾗Ḯൻ㧕‫ޠ‬
ߦ⽸₂ߒߡ޿߈ߚ޿ߣ⠨߃ߡ޿ࠆ㧚㧢㧚߅ࠊࠅߦ ᧄႎߢߪ㧘಄ළᯏེߦኻߒߡᦸ߹ࠇࠆ㧘ࡔࡦ࠹࠽ࡦࠬਇⷐߢା㗬ᕈߩ㜞޿ᄢኈ㊂࡮㜞ല₸಄ළน⢻ߥᾲ࠺ࡃࠗࠬߣߒߡ㧘߹ߚ࿾⃿᷷ᥦൻኻ╷ߦ⽸₂ߔࠆ⋥ធ᡼ᾲ૕♽ߦㆡߔࠆࠠ࡯࠺ࡃࠗࠬߣߒߡ㧘ࡐࡦࡊ

વᾲ 2009 ᐕ 1 ᦬- 30 -

ෳ⠨ᢥ₂
[1] Stenger, F. J., “Experimental Feasibility Study ofWater-Filled Capillary-Pumped Heat-Transfer
Loops”, NASA TM X-1310, (1966), 1.
[2] Maidanik, Yu. F., Pastukhov, V. G., Fershtater, Yu.
G., Smirnov-Vasiliev, K. G., Chernishev, V. F. andDvirniy, V. V., “Development, Analytical andExperimental Investigation of Loop Heat Pipes”,
Proc. 7th Int. Heat Pipe Conf., 2 (1988), 539.
[3] Kawabata, K., Hashimoto, N. and Kamiya, Y.,“Anti-Gravity Heat Pipe”, Proc. 5th Int. Heat Pipe
Symp., Melbourne, (1997), 168[4] Chisholm, D., “The Anti-Gravity Thermosyphon”,
Proc. I. Chem. E. Symp, Glasgow, Ser. No. 38(1974), F3.
[5] Baer, S. C., “Heat Pipe Condensate Return”, U. S.
Patent No. 3561525, (1971).
[6] ৻ᴺᏧ⨃ବ࡮੗᧛⧷ᤘ, “ᶐㅘࡅ࡯࠻ࡄࠗࡊߩ
ᾲャㅍߦ㑐ߔࠆ⎇ⓥ㧔╙㧝ႎ, ೋᦼỚᐲߩᾲャㅍ㒢⇇ߦ෸߷ߔᓇ㗀㧕”, ᣣᧄᯏ᪾ቇળ⺰ᢥ㓸,64-617, B (1998), 254.
[7] ৻ᴺᏧ⨃ବ㧘”ࡐࡦࡊ࡟ࠬ᳓಄ࠪࠬ࠹ࡓߩ㐿⊒”,㈩▤ᛛⴚ, Vol.50, No.9(2008), P70.
[8] ጊፒዏᓼ࡮᧲⍫๺⟵࡮৻ᴺᏧ⨃ବ࡮⊕ᧁ⋥᮸࡮᳓ญ⧐᮸㧘”ࡐࡦࡊ࡟ࠬ᳓಄ਥᄌ឵ⵝ⟎”㧘╙45 ࿁㋕㆏ࠨࠗࡃࡀ࡮ࠪࡦࡐࠫ࠙ࡓ⺰ᢥ㓸 ⺰ᢥ⇟ภ 514(2008)㧚

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ળ⼏ႎ๔‫ࡓ࠙ࠫࡐࡦࠪ࡮࡯ࠡ࡞ࡀࠛ࡮࠭࠶ࠠޟ‬㧞㧜㧜㧤‫ߩޠ‬ႎ๔
Report on ‘Kids Energy Symposium, 2008’ਛㇱ ਥᢘ㧔ታⴕᆔຬળᆔຬ㐳㧘੩ㇺᄢቇ㧕
Kazuyoshi NAKABE(Chair of the Kids Energy Symp. Committee, Kyoto University)e-mail: nakabe@me.kyoto-u.ac.jpᒰᣣߩᮨ᭽
೨ᄛ᧪ߩ㔎ߦ᳇ࠍឪߺߥ߇ࠄㄫ߃ߚ‫࡮࠭࠶ࠠޟ‬ࠛࡀ࡞ࠡ࡯࡮ࠪࡦࡐࠫ࠙ࡓ 2008‫ޠ‬ᒰᣣߩ 9 ᦬ 13ᣣ㧔࿯㧕㧘ᤤ೨ߦⓨߪߔߞ߈ࠅߣ᥍ࠇ਄߇ࠅ㧘ᱜඦㆊ߉ߦߪ੐೨ෳട↳ߒㄟߺߩ⊝ߐࠎ߇ਃ‫ޘ‬੖‫ޘ‬㧘ฃߌઃߌ႐ᚲߩ੩ㇺᄢቇ✚วඳ‛㙚౉ญߦ㓸ߞߡ᧪ࠄࠇߚ㧚஺ࠍᜬߜวࠊߖߩᣇ߽߆ߥࠅ߅ࠄࠇ㧘ᄤ୥ߦଐࠄߕ߅⿧ߒਅߐߞߚߎߣߦᗵ⻢ߒߚ㧚ฃઃߢߪ⦡ಽߌߒߚฬᧅߣߣ߽ߦ࠹ࠠࠬ࠻㧔࿑ 1 ෳᾖ㧕㧘ࠕࡦࠤ࡯࠻↪⚕㧘㋦╩㧘Ꮣ⵾ߩⴼࠍᚻᷰߒߚ㧚଻⼔⠪ห઻ࠍᔅ㗇ߩ᧦ઙߣߒߚ੐೨↳ߒㄟߺߩ✚ᢙߪ 53 ⚵ 110 ੱ㧘1 ⚵ࠍ㒰ߊᰳᏨߩᣇ‫ߪࠄ߆ޘ‬ᕋ
ᚒ㧘ᴺ੐ߥߤࠍℂ↱ߦ੐೨ߩㅪ⛊߇޽ࠅ㧘49 ⚵ 100ੱߩෳടߣߥߞߚ㧚ߘߩౝ⸶ߪ 4 ᐕ↢߇ඨᢙㄭߊ
ࠍභ߼㧘↵ᅚᲧߪ߅ࠃߘ 7㧦3 ߢ޽ߞߚ㧚ߥ߅㧘ᒰᣣߩ㘧߮ㄟߺෳടߪ்ኂ଻㒾ߩᚻ⛯߈߿ෳട⠪᝿ីߩ౏ᐔᕈߦ㐓ߺ㧘ฃߌઃߌߥ߆ߞߚ㧚ࠠ࠶࠭࡮ࠛࡀ࡞ࠡ࡯࡮ࠪࡦࡐࠫ࠙ࡓߪߎࠇ߹ߢ
10 ᐕߦਗ਼ߞߡᢥㇱ⑼ቇ⋭߆ࠄ⑼ቇ⎇ⓥ⾌⵬ഥ㊄㧔⎇ⓥᚑᨐ౏㐿ଦㅴ⾌㧕‫⎇ޟ‬ⓥᚑᨐ౏㐿⊒⴫ B‫ߩޠ‬ᡰេࠍฃߌ㧘Ფᐕ 1 ࿁㧘ᧄቇળߩ޿ߕࠇ߆ߩᡰㇱߢ㐿௅ߐࠇ⛯ߌߡ޿ࠆ㧚੹ᐕᐲߪ㑐⷏ᡰㇱߩ੩ṑ࿾඙ࡔࡦࡃ࡯߇ታⴕᆔຬળߩਛᔃߣߥߞߡࠪࡦࡐ
ࠫ࠙ࡓࠍડ↹㧘࠹࡯ࡑࠍ‫ޟ‬りㄭߥࠛࡀ࡞ࠡ࡯ߦߟ
޿ߡ⠨߃ࠃ߁㧍‫ߦޠ‬ቯ߼㧘⴫ 1 ߦ␜ߔࡊࡠࠣ࡜ࡓ
ߦᴪߞߡታᣉߒߚ㧚ࠪࡦࡐࠫ࠙ࡓߩ೨ඨㇱߪ㧘౒௅޿ߚߛ޿ߚ੩ㇺᄢቇ✚วඳ‛㙚ߢߩ‫⥄ޟ‬ὼ‫ߩߣ߭ޟߣޠ‬⍮‫ߦޠ‬㑐ߔࠆ⷗ቇߢ޽ࠆ㧚ળ႐⒖േߣભᙑࠍ᜽ࠎߢߩᓟඨ
ㇱߪ㧘୫ࠅ਄ߍߚ੩ㇺᄢቇᎿቇㇱ‛ℂ♽ᩞ⥢ౝᢎቶߢߩ‫ޟߣޠ࡯ࠡ࡞ࡀࠛޟ‬ᾲ‫ߦޠ‬㑐ߔࠆ⹤㧘ታ㛎㧘ታṶ㧘ታ⠌ߢ޽ࠆ㧚ᧄᢥ⪺⠪ߩࠛࡀ࡞ࠡ࡯ᄌ឵ߦ
㑐ߔࠆో⥸⊛ߥ⹤ߩᓟ㧘’㊁ବ㇢ᢎ᝼ߩ౉㝬ߩታ㛎ߢߪᶧ૕⓸⚛ࠍ૶ߞߡ㧘ᾲ⒖േࠍ઻߁ᵹ૕ߩ‫ߜޟ‬ߝ߻‫ޠ‬㧘‫ޠ߻ࠄߊ߰ޟ‬㧘‫ޠ߻ߝߜ⿥ޟ‬㧘‫ޠ߻ࠄߊ߰⿥ޟ‬⃻⽎߇㘑⦁߿ⓨ߈➧ߩᄌᒻߣߥߞߡนⷞൻߐࠇ㧘વᾲ 2009 ᐕ 1 ᦬

࿑ 1 ࠹ࠠࠬ࠻ߩ⴫⚕㧚ఽ┬ߚߜߩᒝ޿㑐ᔃࠍ㓸߼ߚ㧚ታ㛎↪⹜ᢱߩ৻ㇱߪ૑෹シ㊄ዻᎿᬺᩣᑼળ␠ߦឭଏ޿ߚߛ޿ߚ㧚ታṶߢߪ㑐⷏㔚ജᩣᑼળ␠ߥࠄ߮ߦᄢ㒋ࠟࠬᩣᑼળ␠ߩᣇ‫߇ޘ‬㧘⋭ࠛࡀ࡞ࠡ࡯ኻ╷ߩ⺑᣿ߣߣ߽ߦᚻ࿁ߒ⊒㔚ᯏ߿࠰࡯࡜࡯ࡄࡀ࡞ߥߤࠍ૶ߞߡ㧘⊒㔚ߩේℂࠍఽ┬ߚߜߦ૕㛎ߐߖࠆ৻ᣇ㧘ᄤὼࠟࠬ⾗Ḯߩណជ߆ࠄャㅍ࡞࡯࠻㧘ㇺᏒࠟࠬߣߒߡߩ
ଏ⛎✂ߩ⺑᣿ߣߣ߽ߦᶧ૕⓸⚛ࠍ૶ߞߡ㧘ᭂૐ᷷ਅߢߩ‛⾰ߩᝄࠆ⥰޿ࠍ೨ㅀߩታ㛎ߣߪ೎ߩⷺᐲ
߆ࠄᾲߊ⚫੺޿ߚߛ޿ߚ㧚⾰໧ߦኻߒߡ߈ࠄ߈ࠄ
ノߊ⍓ߢⓍᭂ⊛ߦ᜼ᚻߒ㧘ㅴࠎߢታṶߦෳടߔࠆ
ఽ┬ߚߜߩᝄࠆ⥰޿ߦ૗߆ᣂ㞲ߥ߽ߩࠍᗵߓߚ㧚ታ⠌ߢߪ㦖⼱ᄢቇ㧘ṑ⾐⋵┙ᄢቇ㧘หᔒ␠ᄢቇ㧘
੩ㇺᄢቇߩవ↢ᣇߩ㧘⋙ⷞᓎࠍ౗ߨߡߩḄりߩᜰዉߩਅ㧘㌃ࡄࠗࡊ߿ࡃ࡞ࠨ᧚㧘Ꮏౕ㘃ߥߤࠍᚻᷰ

- 31 -J. HTSJ, Vol. 48, No. 202ળ⼏ႎ๔⴫ 1 ࡊࡠࠣ࡜ࡓߩ᭎ⷐ㧚ᤨ㑆Ꮺᰴ   ╙12:30~13:00 ੩ㇺᄢቇ✚วඳ‛㙚ߢߩฃߌઃߌ㧘⚵ಽߌ
13:00~13:05 ᆎ߼ߩ᜿ᜦ
ਛㇱਥᢘ㧔੩ㇺᄢቇ㧕㧘ᄢ㊁ᾖᢥ㧔੩ㇺᄢቇ㧕੹ᣣߩ੍ቯߩ⺑᣿ਛㇱਥᢘ㧔੩ㇺᄢቇ㧕
13:05~13:55 ੩ㇺᄢቇ✚วඳ‛㙚ߩ⷗ቇ
13:55~14:10 Ꮏቇㇱ‛ℂ♽ᩞ⥢߳ߩ⒖േ
14:10~14:20 ࠛࡀ࡞ࠡ࡯ߣߪ㧫ਛㇱਥᢘ㧔੩ㇺᄢቇ㧕
14:20~14:40 ᾲߦߟ޿ߡߩታ㛎࡮૕㛎
’㊁ବ㇢㧔੩ㇺᄢቇ㧕
14:40~14:45 ભᙑ㧘ฦᢎቶ߳ߩ⒖േ
14:45~16:55 ࠛࡀ࡞ࠡ࡯ߦߟ޿ߡߩታ㛎㧘ታṶ㧘ታ⠌ ජ↰ⴤ㧔หᔒ␠ᄢቇ㧕࡮‫ޟߣޠ࡯ࠡ࡞ࡀࠛޟ‬㔚᳇‫ޠ‬ਅ↰⑲ᐘ㧘ฎᎹ⺈㧔㑐⷏㔚ജࢃ㧕࡮ᄤὼࠟࠬߣ LNG ߩ಄ᾲࠛࡀ࡞ࠡ࡯ࠍ
ቇ߷߁㧍ਛ↰ᵗᄥ㇢㧘ችᧄ␞ሶ㧔ᄢ㒋ࠟࠬࢃ㧕࡮ࡐࡦࡐࡦ⦁ࠍ⥄૞ߒߡേ߆ߘ߁㧍Ⴎ⷗ᵗ৻㧔㦖⼱ᄢቇ㧕ධᎹਭੱ㧔ṑ⾐⋵┙ᄢቇ㧕
Ⓑጟᕶੑ㧔หᔒ␠ᄢቇ㧕㥲⮮రᶈ㧘Ꮟ๺਽㧘⧯ᨋ⧷ା           㧔੩ㇺᄢቇ㧕
16:55~17:15 ⚳ࠊࠅߩ᜿ᜦ ਛㇱਥᢘ㧔੩ㇺᄢቇ㧕ୃੌᑼߐࠇߚఽ┬৻ੱ߭ߣࠅ߇㧘ࡐࡦࡐࡦ⦁ࠍ৻߆ࠄ⥄૞ߒߚ㧚಴᧪਄߇ߞߚ⦁ࠍᢎቶߦ↪ᗧߒߚ 3 ߟߩ◲ᤃࡊ࡯࡞ߦᜬߜነࠆఽ┬ߚߜߩ㧘⦁ࠍㅴ᳓ߐߖ㧘ⱼῒߦὐἫ㧘⦁ߪേ߈⛯ߌࠆ߆ߤ߁߆㧘ߣ޿߁ࠊߊࠊߊᗵ㧘ߐࠄߦߪ଻⼔⠪ߩᣇ‫ߩࠄ߆ޘ‬ᾲ޿ⷞ✢ࠍ⡼ߦᗵߓߚ㧚ળ႐㑆ߩ⒖േ߅ࠃ߮ᢎቶ㑆ߩ⒖േߪ㓸࿅⊓ᩞߩⷐ㗔ߢ㧘ฃߌઃߌᤨߦ⿒࡮㤛࡮㕍㧘3 ߟߩ⦡ಽߌ
ߒߚ⚵Ფߦࠬࡓ࡯࠭ߦⴕ߁ߎߣ߇ߢ߈ߚ㧚ᦨᓟߦ㧘৻ၴߦળߒߡߩୃੌᑼࠍⴕ޿㧘ఽ┬৻ੱ߭ߣࠅߦ
ୃੌᦠߥࠄ߮ߦ߅࿯↥ߣߒߡߩ࡜ࠫࠝࡔ࡯࠲࡯
㧔߰ߊ኿⸘㧕ࠍ᝼ਈߒߚ㧚߹ߚ㧘ᧄࠪࡦࡐࠫ࠙ࡓ
ߦ㑐ߔࠆࠕࡦࠤ࡯࠻ߩ࿁෼߽ⴕߞߚ㧚ᐘ޿ߦ㧘੩ㇺᄢቇߢߩᰴ࿁㐿௅ᣣᤨߦߟ޿ߡߩ໧޿วࠊߖ߹
ߢ޽ࠅ㧘ఽ┬ߩߺߥࠄߕ଻⼔⠪ߩᣇ‫߽ࠄ߆ޘ‬ᄢᅢ⹏ࠍඳߒߟߟ㧘⚳ੌ੍ቯᤨೞࠍ⧯ᐓ⿥ㆊߒߚ߽ߩ

વᾲ 2009 ᐕ 1 ᦬- 32 -

ߩ㧘੐᡿╬߽ήߊ㧘்ኂ଻㒾ࠍ૶ࠊߕߒߡή੐㧘ᢔળߣߥߞߚ㧚ࠪࡦࡐࠫ࠙ࡓߩ᭽ሶߪᧄᢥᧃየߩ
࿑ 2㨪࿑ 10 ߩࠬ࠽࠶ࡊ౮⌀ߦ␜ߔߣ߅ࠅߢ޽ࠆ㧚Ḱ஻ߩ⁁ᴫᒰᣣߩ㈩Ꮣ⾗ᢱߣߒߡ㧘࠹ࠠࠬ࠻ࠍ૞ᚑߒ㧘ශ೚㧘⵾ᧄߒߚ㧚߹ߚ㧘ᧄࠪࡦࡐࠫ࠙ࡓߩትવ↪ߦ㧘
࠴࡜ࠪ 1,000 ㇱࠍශ೚ߒߚ㧚ᒰೋ㧘ߘߩ࠴࡜ࠪߩ
㈩Ꮣߪ੩ㇺᐭ߅ࠃ߮੩ㇺᏒߩᢎ⢒ᆔຬળߦኻߔࠆ
ⴕ੐᩺ౝߩᒝ޿ㅪ⛊✂ࠍᜬߟ✚วඳ‛㙚ߦછߖಾࠅ ߢ ޽ ߞ ߚ 㧚 ✚ ว ඳ ‛ 㙚 ߩ ࡎ ࡯ ࡓ ࡍ ࡯ ࠫ(http://www.museum.kyoto-u.ac.jp/indexj.html) ߦ ߽࠴࡜ࠪࠍឝタߒߡ޿ߚߛ޿ߚ㧚ߒ߆ߒ㧘ዊቇᩞ߇ᄐભߺߦ౉ࠆ೨㗃߹ߢߪ㧘⷗ㄟߺࠃࠅ߽ߪࠆ߆ߦ
ዋߥ޿ᔕ൐ᢙߢ޽ࠅ㧘೨ᐕᐲห᭽㧘ෳട⠪ࠍ൐ࠆߎߣߦ⧰ഭߔࠆ⎕⋡ߦ㒱ߞߚ㧚ߘߩߚ߼㧘࠴࡜ࠪ
1,000 ㇱࠍㅊടශ೚ߒߡ㧘࠴࡜ࠪߣࡐࠬ࠲࡯ࠍ៤߃
ߡ࿑ᦠ㙚㧘㕍ዋᐕ⑼ቇ࠮ࡦ࠲࡯㧘੩ㇺᄢቇ๟ㄝߩ
ዊቇᩞ㧘ቇౝߩ࡟ࠬ࠻࡜ࡦߦ಴ะ߈㧘༡ᬺᵴേࠍ
ⴕߞߚ㧚߹ߚ㧘੩ㇺᣂ⡞㧘࿾ၞߩࡔ࡞ࡑࠟ㧔੩ㇺ⍮⊛ࠢ࡜ࠬ࠲࡯KYO-NANO ળ߿㑐⷏ᢥൻቇⴚ
⎇ⓥㇺᏒផㅴᯏ᭴ߌ޿ߪࠎߥ╬㧕ߦ߽᩺ౝࠍឝタߔࠆߣߣ߽ߦ㧘ታⴕᆔຬߩవ↢ᣇߦ߽น⢻ߥ㒢ࠅትવࠍⴕߞߡ޿ߚߛ޿ߚ⚿ᨐ㧘⷗ㄟࠎߢ޿ߚ೨
ㅀߩෳടੱᢙߣߥߞߚ㧚ᧄࠪࡦࡐࠫ࠙ࡓߦ㑐ߔࠆᖱႎḮߪ㧘ᒰᣣߩఽ┬߳ߩࠕࡦࠤ࡯࠻ߦࠃࠆߣ㧘଻⼔⠪㧔59%㧕㧘ࠗࡦ࠲࡯ࡀ࠶࠻㧔13%㧕㧘వ↢㧔10%㧕
㧘ᣂ⡞㧔10%㧕㧘ࡐࠬ࠲࡯㧔6%㧕㧘෹ੱ㧔2%㧕ߢ޽ߞߚ㧚৻ᣇ㧘੐ᓟߦⴕߞߚ଻⼔⠪߳ߩࠕࡦࠤ࡯࠻ߦ
ࠃࠆߣ㧘ࠗࡦ࠲࡯ࡀ࠶࠻㧔43%㧕㧘ᣂ⡞㧔39%㧕㧘
ߘߩઁ㧔18%㧕ߢ޽ࠆߎߣ߇ಽ߆ߞߚ㧚ߎߩߎߣ߆ࠄࠗࡦ࠲࡯ࡀ࠶࠻㧘ᣂ⡞ߩትવ↪ࡔ࠺ࠖࠕߣߒ
ߡߩ㊀ⷐᕈ߇⹺⼂ߢ߈ࠆ㧚ᒰᣣߩᚲⷐᤨ㑆ߩ⷗Ⓧ߽ࠅߣߒߡ㧘ߣߊߦࡐࡦ
ࡐࡦ⦁ߦలߡࠆᤨ㑆ߦᵈ⋡ߒ㧘ታⴕᆔຬળࡔࡦࡃ
࡯ߢ੐೨ߦ㧘ታ㓙ߦ⦁ࠍ⥄૞ߒߡߺߚߣߎࠈ㧘᥉ㅢߦ߿ߞߡ޿ߡߪߣߡ߽⦁ࠍㅴ᳓ߐߖࠆߣߎࠈ߹
ߢㄡࠅ⌕ߌߥ޿ߎߣ߇್᣿ߒߚ㧚ߘߩߚ߼㧘ᜂᒰߩవ↢ᣇ߇♖ജ⊛ߦㅴ߼ᣇߩᄢ᏷ᄌᦝߣ๟೔ߥ੐
೨Ḱ஻ࠍߒߡਅߐߞߚ㧚
2 ▎ᚲߩળ႐߇߆ߥࠅ㔌ࠇߡ޿ࠆ਄㧘3 ▎ᚲߩᢎ
ቶࠍ⒖േߐߖࠆᔅⷐ߆ࠄ૞⵾ߒߚఽ┬⚵ಽߌ↪ߩ⦡ઃ߈ฬᧅ㧘ᒁ₸↪ߩ⦡ઃ߈ᣛ㧘ળ႐᩺ౝ↪ᜰ␜᧼ߪᒰᣣ㧘ᭂ߼ߡ᦭ലߦᯏ⢻ߒߚ㧚

J. HTSJ, Vol. 48, No. 202ળ⼏ႎ๔⴫ 2 ࠕࡦࠤ࡯࠻ߩ⾰໧ߣ࿁╵㧔ߘߩ 1㧕㧚
⇟ภ
1

2

3

4

⴫ 2 ࠕࡦࠤ࡯࠻ߩ⾰໧ߣ࿁╵㧔ߘߩ 2㧕㧚

⾰ ໧ ߩ ౝ ኈ૗ᐕ↢ߢߔ߆㧫ᕈ೎ߪ㧫޿ߕࠇ߆ߦ٤ශ
ࠍߟߌߡਅߐ޿㧚ዊቇ 4㧘5㧘6 ᐕ↢ ߹ߚߪ ߘࠇએᄖ㧔  㧕↵㧘 ᅚ
4 ᐕ↢(48%)㧛5 ᐕ↢(24%)㧛6 ᐕ↢(15%)㧛
ߘߩઁ(13%)   ↵ (72%)㧛ᅚ (28%)ߎߩࠠ࠶࠭࡮ࠛࡀ࡞ࠡ࡯࡮ࠪࡦࡐࠫ࠙ࡓ
2008 ࠍ૗ߢ⍮ࠅ߹ߒߚ߆㧫ว߁߽ߩߦ٤
ශࠍߟߌߡਅߐ޿㧚̒ ዊቇᩞߩవ↢߆ࠄ⡞޿ߚ㧚̒ ߅ῳߐࠎ߿߅Უߐࠎ߆ࠄ⡞޿ߚ㧚̒ ߅෹ߛߜߦ⺃ࠊࠇߚ㧚̒ ࿑ᦠ㙚╬ߩᣉ⸳ߢࡐࠬ࠲࡯߹ߚߪ࠴࡜ ࠪࠍ⷗ߚ㧚̒ ࠗࡦ࠲࡯ࡀ࠶࠻ߢ⷗ߚ㧚̒ ߘߩઁ㧔      㧕଻⼔⠪(59%)㧛ࠗࡦ࠲࡯ࡀ࠶࠻(13%)㧛వ↢(10%)㧛ᣂ⡞(10%)㧛ࡐࠬ࠲࡯(6%)㧛෹ੱ(2%)ౝኈߣߒߡ㧘߅߽ߒࠈ޿ߣᕁߞߚߩߪߤࠎ
ߥ߅⹤ߢߒߚ߆㧫߹ߚ㧘ߘࠇߪߥߗ㧫ᄤὼࠟࠬࠍ߭߿ߒ㧘߃߈૕ߦߒߡㆇ߱ߎߣ
߇߰ߒ߉ߢ߅߽ߒࠈ߆ߞߚ㧛ࠟࠬ㧚ታ㛎ߣวࠊߖߡ⺑᣿ߒߡߊࠇߚ߆ࠄ㧛ᄤὼࠟࠬߩ߅⹤㧚ᶧ૕ߜߞ⚛߇196 ᐲߢ಄ߚߊߡ᳇
ᜬߜ߇ࠃ߆ߞߚ߆ࠄ㧛ᶧ૕⓸⚛ߩታ㛎㧛ᄢ߈ߊߥߞߚࠅዊߐߊߥࠆ߆ࠄ㧛ࡏ࡯࡞߇ಓࠆߣߎࠈ㧛ࡏ࡯࡞߇ഀࠇߚ㧛ࠟࠬߩ߅⹤㧛ߜߝࠎߛࠅ߆ࠆߊߥߞߚࠅߔࠆ㧛㘑߇ዊߐߊߥࠆ⹤㧛ᾲߩታ㛎ߢ㘑⦁߇ዊߐߊߥߞߚߣߎࠈ㧚੍ᗐᄖߩ⚿ᨐߛߞߚ߆
ࠄ㧛㔚᳇ߩ⹤߇ዋߒ߅߽ߒࠈ߆ߞߚ㧛㔚᳇ߩታ㛎㧛㑐⷏㔚ജᚻ߹ࠊߒ⊒㔚߇㕙⊕߆ߞߚ㧛㔚ജળ␠ߐࠎߩᰳὐߣ೑ὐߣ޿
߁ߣߎࠈ㧛ࠦࠗ࡞ࠍ૶ߞߚ⊒㔚ߩߒ߆ߚ㧚ℂ↱ߪ⍮ࠄߥ޿ߎߣߛߞߚ߆ࠄ㧛ࡐࡦࡐࡦ⦁㧛Ꮏ૞߇ᅢ߈㧛᳓ࠍ಴ߔߣߎࠈ㧛ォୟߔࠆߣߎࠈ㧛ߔߴߡ㧛ඳ‛㙚ߩ⺑᣿㧛
LNG ߩߎߣ㧚ࠢࠗ࠭߇߅߽ߒࠈ߆ߞߚ㧛ⓨ᳇ߩ᷷߹ߞߚࠅ಄ߚߊߥߞߚࠅߔࠆߎߣ㧚ౝኈߣߒߡ㧘߻ߕ߆ߒ޿ߣᕁߞߚߩߪߤߩ
߅⹤ߢߒߚ߆㧫߹ߚ㧘ߘࠇߪߥߗ㧫ߣߊߦߥ߆ߞߚ㧛߶߷ోㇱ㧧ࠛࡀ࡞ࠡ࡯
ߪ㧘6 ߟߦಽ߆ࠇ߳ࠎߒࠎߢ߈ࠆߎߣ㧚߻ߕ ߆ ߒ ޿⸒ ߫ ߇ߢ ߡ߈ ߚ 㧛㔚 ᳇ ߪ↸ ਛߩ ߤߎߢ૶ࠊࠇߡ޿ࠆߩ߆ߔߋߦߪᕁ
޿ߟ߆ߥ߆ߞߚ㧛߸ࠎ߸ࠎ⦁ߩታ㛎ߢ㧘ߡࠎ߲ߊߥߤ 1mm ߩߊࠆ޿ߢߒߜ߾߁߆ࠄ
㧛ࠛࡀ࡞ࠡ࡯ߩ⹤㧚ᩭߩ⹤߇ߢߡ߈ߚ߆ࠄ

વᾲ 2009 ᐕ 1 ᦬- 33 -⇟ภ5

6

⾰ ໧ ߩ ౝ ኈ㧛㔚᳇ࠍߟߊࠆߒߊߺ㧛㔚᳇㧛㔚᳇ߩ⊒㔚㧚޿ࠈ޿ࠈߣ⊒㔚ߩ઀ᣇ߇߅߷߃ ࠄ ࠇߥ޿㧛ࡐࡦࡐࡦ⦁ߢ޿ࠈ޿ࠈߥㇱຠࠍߊߺߚߡࠆߩ߇߻ߕ߆ߒ߆ߞߚ㧛ࡐࡦࡐࡦ⦁૞ࠅߪ߻ߕ߆ߒ޿ߣᕁߞߚ㧚߁߹ߊߟߊ
ࠇߥ߆ߞߚ㧛ඳ‛㙚㧚޿ࠈ޿ࠈⷡ߃ࠆߩ߇
߻ߕ߆ߒ߆ߞߚ㧚ౝኈߣߒߡ㧘ዊቇᩞߢ⠌ߞߚߎߣ߇಴ߡ߈
߹ߒߚ߆㧫ߘࠇߪߤࠎߥߎߣߢߔ߆㧫ߢߡ߈߹ߒߚ㧚ᄥ㓁㔚ᳰ߿㧘㔚᳇ࠍ⊒㔚ߔࠆ‛㧛߆ࠎ߈ࠂ߁ߩ੐㧚ੑߐࠎൻ὇⚛߇࿾⃿ࠍ߅߅ߞߡ᷷ߛࠎൻߒߚࠅ㧘ߐࠎᕈ㔎߇߰ߞߚࠅߔࠆ㧛‛ࠍ߭߿ߔߣዊߐߊߥࠆ
ߎߣ㧚ߡߟߩߚ߹߇ዊߐߊߥߞߡࠊߩਛࠍ
ߣ߅ࠆߎߣ㧛ⓨ᳇ߣ‛ࠍ಄ߔߣ૕Ⓧ߇ዊߐߊߥࠅ᷷߼ࠆߣᄢ߈ߊߥࠆߎߣ㧛಴ߡ߈ߚ㧚ߚ߹߇౞ߩਛࠍߣ߅ࠆ߆㧫ߩ⹤㧛಴ߡ߈ߚ㧚⊒㔚㧛ߗࠎ߱ߢߔ㧛಴ߡ߈ߚ㧛㋕ߪ᷷߼ࠆߣ㧘ߚ޿ߖ߈߇߰߃㧘಄ߔߣߜߝ
߻ߎߣ㧛ඳ‛㙚ߢ⷗ߚฎ߰ࠎ㧘ߪߦࠊ㧛ߣߊߦߥߒ㧛ߢߡ߈ߡ޿ߥ޿㧛޿޿߃㧛ߥ޿㧛ߥߒ㧛ߥ߆ߞߚ㧛಴ߡ߈߹ߖࠎߢߒ
ߚ㧛޽ࠅ߹ߖࠎߢߒߚ㧛಴ߡ߈ߚ㧚ᾲߪ㊄ዻ߇વࠊࠅ߿ߔ޿ߣ޿߁ߎߣ㧛߈ࠎߙߊߩ₹߇߭߿ߔߣߜߝ߻ߎߣ㧛޽ߟߊߥࠆ
ߣ߷߁ߜࠂ߁ߔࠆ㧛ߪ޿㧚ⓨ᳇߇߰ߊࠄ
߻࡮ߜߝ߻ߎߣ㧛᳇૕߇޽ߚߚ߼ࠄࠇࠆߣ
૕Ⓧ߇ᄢ߈ߊߥࠆߎߣ㧛ࠟࠬߦߟ޿ߡ㧛߃߈ߚ޿ߜߞߘ㧚ߜߞߘߪ㧙200͠ࠍߎ߃ࠆ㧚ߟ߼ߚ޿߃߈ߚ޿㧛ᄥ㓁㔚ᳰߩߎߣࠍ
⠌ߞߚ㧛߈ࠅࠍߟߊߞߚߎߣ㧛㔚᳇ߩ㘑ജߩߎߣ㧛᳓⫳᳇ߢ⦁߇േߊߎߣ㧛಴ߡ߈ߚ㧚⠨ฎዷ␜ߩ⺑᣿㧚ߜߞ⚛ߩ⹤㧚߶ ߆ ߦߤ ࠎߥ ߎߣ ߇⍮ ࠅ ߚ߆ ߞߚ ߢ ߔ߆㧫ࠛࡀ࡞ࠡ࡯߇ߤ߁વࠊࠆ߆㧛ᣂࠛࡀ࡞ࠡ
࡯ߦߟ޿ߡ㧛Ꮏ႐ߥߤߢ߿ߞߡ޿ࠆߎߣ
ߥߤ㧘ߺࠎߥ߇⍮ࠄߥ޿ࡅࡒ࠷ߥߤ߇⍮ࠅߚ޿㧍㧛߽ߞߣߢ߆޿ࡐࡦࡐࡦ⦁ࠍߟߊ
ࠅߚ߆ߞߚߥ࡯㧚ߥߗ㧘߃߈ߚ޿ߜߞߘߪ
಄ߚ޿߆㧛ᶧ૕ߜߞ⚛ߪߤ߁߿ߞߡ૞ࠆ
ߩ߆㧛߶߆ߩ⊒㔚ᣇᴺ㧛ࡐࡦࡐࡦ⦁ߩേ
ߊߒߊߺ㧛޽ࠅ߹ߖࠎ㧛ቝቮߦߟ޿ߡ㧛ࡐࡦࡐࡦ⦁ߩߑ޿ࠅࠂ߁߇߶ߒ޿㧛‛ߣ૕Ⓧߩ㊀ߐ㧘߃߈ߚ޿ߜߞߘࠃࠅߟ߼ߚ޿
߽ߩ㧛࠙࡜ࡦߪߤࠎߥ‛⾰߆㧫ߥߤ㧛ߖ޿ߢࠎ߈ߪߤߩࠃ߁ߦߢ߈ࠆ߆㧛޿ࠈࠎߥ߰ߒ߉ߥߎߣ߇⍮ࠅߚ߆ߞߚ㧛✽ᢥᤨઍߩߎߣࠍߊࠊߒߊߒࠅߚ߆ߞߚ

J. HTSJ, Vol. 48, No. 202ળ⼏ႎ๔⴫ 2 ࠕࡦࠤ࡯࠻ߩ⾰໧ߣ࿁╵㧔ߘߩ 3㧕㧚⇟ภ

⾰ ໧ ߩ ౝ ኈ㧛 ߜࠂ߁ߢࠎߤ߁ߢߤࠎߥߎߣ߇߅ߎࠆߩ߆
ߒࠅߚ޿㧛ൻ⍹㧛޽ࠅ߹ߖࠎ㧛․ߦήߒ㧛ಽࠅ߿ߔ߆ߞߚߩߢ․ߦ޽ࠅ߹ߖࠎ 㧛⍮ࠅߚ޿ߎߣߪ㧘ోㇱߒࠆߎߣ߇ߢ߈ߚߩߢ㧘޽ߣታ㛎ࠍ⷗ࠆߩߢߪߥߊ⥄ಽߢߒߡߺߚ޿㧛ⓨ᳇߇ߟ߼ߚߊߥࠆߣߥࠎߣ޿߁ߩ߆㧛 㔚᳇ߩ㘑ജߩߎߣ㧛ᄥ㓁శ⊒㔚ߩߒߊߺ㧛శࠛࡀ࡞ࠡ࡯㧘ജቇ⊛ࠛࡀ࡞ࠡ࡯ߦߟ޿ߡ 㧛߽߁ዋߒ㔍ߒ޿ౝኈߩߎߣ㧚7ߎߩࠃ߁ߥࠪࡦࡐࠫ࠙ࡓ߇㧘߹ߚ޽ࠇ߫㧘ෳടߒߚ޿ߢߔ߆㧫㧔ߪ޿㧛޿޿߃㧕ߪ޿(100%)㧛޿޿߃(0%)

੐ᓟߩᢛℂߣ෻⋭ὐࠪࡦࡐࠫ࠙ࡓ⚳ੌᤨߦ࿁෼ߒߚࠕࡦࠤ࡯࠻ߩ⾰໧ߣ࿁╵ߪ⴫ 2 ߦ␜ߔߣ߅ࠅߢ޽ࠆ㧚ߥ߅㧘⴫ਛߦߪఽ┬ߩᦠ޿ߚᢥࠍߘߩ߹߹タߖߡ޿ࠆߎߣࠍ
ߏੌᛚ㗿޿ߚ޿㧚ࡔࠗ࡞ᔕ൐ߩ଻⼔⠪ߩᣇ‫ߪߦޘ‬੐ᓟߦ㧘ᧄࠪࡦࡐࠫ࠙ࡓߦ㑐ߔࠆᖱႎḮߩ໧޿วࠊߖߣߣ߽ߦ㧘ᔊᙈߩߥ޿ᗧ⷗߿ᗵᗐࠍࡔࠗ࡞࿁╵㗿ߞߚ㧚ߘߩ࿁╵ߣߒߡ㧘ࠪࡦࡐࠫ࠙ࡓߢߩౕ૕⊛ߥౝኈ߇࠴
࡜ࠪߦ⸥タߐࠇߡ޿ߥ߆ߞߚߩߢᔕ൐ߩ㓙ߦߤ߁ߔࠆ߆ㅅߞߚ㧘⋭ࠛࡀ߿ࠛࠦߩᤨઍߦᎿౕ㘃ߩ⾉ߒ୫ࠅࠍߖߕߦఽ┬৻ੱ߭ߣࠅߦᣂຠࠍਈ߃ߚߩ
ߪ߽ߞߚ޿ߥ޿㧘߅࿯↥߹ߢߪ߽ࠄ޿ߔ߉ߢߪߥ
޿߆㧘ᢙࡩ᦬ߦ৻ᐲߋࠄ޿ߩ㗫ᐲߢߎߩࠃ߁ߥ௅
ߒ߇޽ߞߡ߶ߒ޿㧘ߥߤߣ޿ߞߚᗧ⷗߇ᦠ߆ࠇߡ
޽ࠅ㧘෻⋭ߔࠆὐ߽ᄙ߆ߞߚ㧚ਛߦߪ㧘ఽ┬ߩߚ߼ߩࠪࡦࡐࠫ࠙ࡓߢ޽ࠆߎߣࠍᔓࠇߡ଻⼔⠪ߩᣇߏ⥄り߇ෳടߔࠆ⻠⟵ߣൊ㆑޿ߐࠇߚߩ߆㧘⺑᣿ࠍ߽ߞߣ⹦ߒߊߒߡ߶ߒ޿㧘ߣ޿ߞߚᗧ⷗߽
޽ߞߚ㧚ߘߩ෻㕙㧘࿁╵ߩᄙߊߦߪ㧘੍ᗐએ਄ߦᭉߒߊ㧘⾆㊀ߥ⦟޿૕㛎߇ߢ߈ߚߣ޿ߞߚᗵ
⻢ߩ⸒⪲߇ᢙᄙߊᦠ߆ࠇߡ߅ࠅ㧘ታⴕᆔຬળߣ
ߒߡ቟႑ߒߚ㧚ߘߩઁߩ෻⋭ὐߣߒߡ㧘ᢥㇱ⑼ቇ⋭⎇ⓥᝄ⥝ዪߦኻߔࠆታ❣ႎ๔ߪ㧘ᧄቇળ߳ߩᐕᐲᧃႎ๔ߥߤ
ࠍ⚳߃ߡ߆ࠄᓟߢߥߊ㧘ᒰ⹥ߩࠪࡦࡐࠫ࠙ࡓታᣉ
ᣣ߆ࠄ 30 ᣣએౝߦߔߴ߈ߢ޽ࠆߎߣࠍ੐ᓟ߆ߥ
ࠅ⚻ߞߡ߆ࠄ᳇ઃ߆ߐࠇ㧘ᕆㆰኻಣߔࠆߎߣߣߥ
ߞߚ㧚߹ߚ㧘࠴࡜ࠪᜬෳߦࠃࠆትવᵴേߦ߅޿ߡ㧘ᢎ⢒ᆔຬળߩද⾥޽ࠆ޿ߪ౒௅ࠍᓧߡ߅ߊᣇ߇⦟

વᾲ 2009 ᐕ 1 ᦬߆ߞߚߩߢߪߥ޿߆ߣᕁࠊࠇࠆ႐ว߇޽ߞߚ㧚ߎߩࠪࡦࡐࠫ࠙ࡓߦෳടߒߡ޿ߚߛ޿ߚߎߣ߇㧘‫ޟ߿ޠ࡯ࠡ࡞ࡀࠛޟ‬ᾲ‫ߐࠈߒ߽߅ߩޠ‬㧘ਇᕁ⼏ߐ㧘⋭ࠛࡀ࡞ࠡ࡯࡮ᣂࠛࡀ࡞ࠡ࡯ᛛⴚ㧘ⅣႺ໧㗴ߦ⋥ធ⊛ߦ㑐ਈߔࠆേᯏઃߌߣߥߞߡ㧘ᰴ਎ઍߩੱ᧚
⢒ᚑߦ❬߇ࠇ߫㧘ታⴕᆔຬળߣߒߡߎߩ਄ߥ޿༑
߮ߢ޽ࠆ㧚⻠Ꮷߣߒߡ㧘੐೨ߩḰ஻߆ࠄᒰᣣߩᧄ⇟㧘ᓟ ઃߌ߹ߢᚻᑯᒰߢ߿ߞߡਅߐߞߚฦᄢቇ
ߩవ↢ᣇ㧘ડᬺߩᣇ‫ޘ‬㧘✚วඳ‛㙚ࠬ࠲࠶ࡈߩᣇ‫ޘ‬㧘ߐࠄߦߪ੩ㇺᄢቇࠕ࡞ࡃࠗ࠻ቇ↢ߐࠎߚߜߦߎߩ
႐ࠍ߅୫ࠅߒߡ㧘ᡷ߼ߡᔃࠃࠅ߅␞↳ߒ਄ߍ߹ߔ㧚੐ᓟߩ࠺࡯࠲ᢛℂߢߪ’㊁ᢎ᝼ቶߩട⮮ବᗆ⒁ᦠ
ߦ߽ᄢᄌ߅਎⹤ߦߥࠅ߹ߒߚ㧚߹ߚ㧘೨ᐕᐲታᣉ
ߩ᭽‫⾗ߥޘ‬ᢱߏឭଏ㧘ߏഥ⸒ࠍਅߐߞߚฬฎደᄢ
ቇߩጊਅඳผᢎ᝼㧘ਃ㊀ᄢቇߩᑝ↰⌀ผᢎ᝼ߦ߽
ᗵ⻢↳ߒ਄ߍ߹ߔ㧚࿑ 2 ✚วඳ‛㙚ߢߩ㓸วߩ᭽ሶ㧚࿑ 3 ⚵೎ߩળ႐⒖േߩ᭽ሶ㧔ߘߩ 1㧕㧚

- 34 -J. HTSJ, Vol. 48, No. 202

ળ⼏ႎ๔࿑ 9-1 ࡐࡦࡐࡦ⦁ߩ૞ࠅᣇࠍવ᝼㧘ߜࠂߞߣ㔍ߒ޿ߣߎࠈߪ⚛ᣧߊࠕࠪࠬ࠻㧚࿑ 4 ⚵೎ߩળ႐⒖േ ࿑ 5 นⷞൻታ㛎ࠍ㘩޿౉  ߩ᭽ሶ㧔ߘߩ 2㧕㧚 ࠆࠃ߁ߦ⷗ߟ߼ࠆఽ┬ࠄ㧚࿑ 6 ᓟඨㇱ㐿ᆎߩᢎቶߩ᭽ሶ㧚

࿑ 9-2 ࡐࡦࡐࡦ⦁㧘⊒ㅴ㧍㧔਄ߩ 2 ᨎ㧕㧚࿑7ఽ┬ࠄߣߣ߽ߦ⊒㔚ᠲ૞ਛߩ㑐⷏㔚ജࢃߩ
ᣇ‫ޘ‬㧚

࿑8

ࠦࠬ࠴ࡘ࡯ࡓߦりࠍ൮ࠎߢᾲṶਛߩᄢ㒋ࠟࠬࢃߩᣇ‫ޘ‬㧚

વᾲ 2009 ᐕ 1 ᦬

࿑ 10 ୃੌᑼߩ᭽ሶ㧚- 35 -J. HTSJ, Vol. 48, No. 202

ⴕ੐ࠞ࡟ࡦ࠳࡯

ᧄળਥ௅ⴕ੐
㐿௅ᣣ
2009 ᐕ6᦬
2 ᣣ(Ἣ)ޯ
4 ᣣ(ᧁ)

ⴕ੐ฬ

↳ㄟ✦ಾ

ේⓂ✦ಾ

໧วవ
Email: info@nhts2009.me.kyoto-u.ac.jp
http://nhts2009.me.kyoto-u.ac.jp/index.html╙ 46 ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓ
㧔㐿௅႐ᚲ㧦࿖┙੩ㇺ࿖㓙ળ㙚㧕

2009.1.26

2009.3.16

ⴕ੐ฬ

↳ㄟ✦ಾ

ේⓂ✦ಾ

⻠⠌ળ‫ޟ‬໡ຠൻ߇ᦼᓙߐࠇࠆࠬ࠲࡯࡝ࡦࠣࠛࡦࠫࡦ
ߩ㐿⊒േะ‫ޠ‬㧔㐿௅႐ᚲ㧦ᣧⒷ↰ᄢቇᄢਭ଻ࠠࡖࡦࡄࠬ㧕㩷

2009.1.13㩷

 㩷

ឝタภ

10 ᦬ภ
1 ᦬ภ

ᧄળ౒௅㧘ද⾥㧘ᓟេⴕ੐㐿௅ᣣ
2009 ᐕ
1 ᦬㩷

23(㊄)㩷

1᦬

29 ᣣ(ᧁ)30 ᣣ(㊄)15th Symposium on "Microjoining and AssemblyTechnology in Electronics"㧔㐿௅࿾㧦ᮮᵿᏒ㧕

2008.9.4

2008.10.20

3 ᦬㩷

4(᳓)㩷
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⥄േゞⓨ⺞ᛛⴚ✚ว࡟ࡆࡘ࡯2009 ࡯ߐࠄߥࠆᔟㆡ
ⅣႺࠍ߼ߑߔゞਔⓨ⺞ᛛⴚߣߘߩ዁᧪੍᷹࡯
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12(ᧁ)㩷

࡟ࠢ࠴ࡖ࡯ࠪ࡝࡯࠭‫ޟ‬㧯㨀ߦࠃࠆᷙ⋧ᵹߩ⸘᷹‫ޠ‬㧔㐿௅႐ᚲ㧦ᄢ㒋Ꮢ┙ᄢቇ᪢↰ࠨ࠹࡜ࠗ࠻㧕㩷

2009.2.28㩷

 㩷

5 ᦬㩷

12(Ἣ㧕㩷
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╙ 14 ࿁⸘▚Ꮏቇ⻠Ṷળ㧔㐿௅႐ᚲ㧦᧲੩ᄢቇ↢↥ᛛⴚ⎇ⓥᚲ㧕㩷

2009.1.30㩷

2009.4.3㩷

8 ᦬㩷

2(ᣣ㧕㩷
ޯ5(᳓)㩷

7th Annual International Energy Conversion Engineering
Conference (IECEC2009)㧔㐿௅࿾㧦Denver, CO, USA㧕㩷2008.12.7㩷

2009.5.19㩷

8 ᦬㩷

7(㊄)㩷
ޯ9(ᣣ)㩷

ᣣᧄᷙ⋧ᵹቇળᐕળ⻠Ṷળ 2009╙ 28 ࿁ᷙ⋧ᵹࠪࡦࡐࠫ࠙ࡓ
㧔㐿௅႐ᚲ㧦ᾢᧄᄢቇ㧕

2009.3.30㩷

2009.6.5㩷

9᦬
㩷
10 ᦬

27 ᣣ(ᣣ)㩷
ޯ
2 ᣣ(㊄)╙ 13 ࿁ේሶἹᾲᵹേ࿖㓙ળ⼏㧔NURETH13㧕㧔㐿௅࿾㧦㊄ᴛᏒ㧕2008.10.31㩷

2009.1.31

11 ᦬

16 ᣣ(᦬)ޯ
19 ᣣ(ᧁ)The 7th Pacific Symposium on Flow Visualization andImage Processing (PSFVIP-7)㧔㐿௅࿾㧦Kaohsiung, Taiwan, ROC㧕2008.10.31

2009.4.15

International Conference on Power Engineering-09,
Kobe (ICOPE-09)
㧔㐿௅࿾㧦␹ᚭᏒ㧕㩷

2008.12.31㩷

2009.3.31㩷

11 ᦬㩷

16(᦬)㩷
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20(㊄)㩷

વᾲ 2009 ᐕ 1 ᦬- 37 -໧วవ(␠)ᣣᧄᯏ᪾ቇળ㩷‫ޥ‬160-0016 ᣂኋ඙ାỚ↸ 35 ାỚ↸ᾃⅽ㙚 5 㓏      㩷
Web: http://www.jsme.or.jp/kousyu2.htm㩷(␠)ṁធቇળ Mate 2009 ੐ോዪ‫ޥ‬101-0025 ᧲੩ㇺජઍ↰඙␹↰૒ਭ㑆↸
1-11
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J. HTSJ, Vol. 48, No. 202߅⍮ࠄߖฬ★⊒ⴕߦઍࠊࠆᖱႎᬌ⚝ࠪࠬ࠹ࡓߩዉ౉ߦߟ޿ߡ
✚ോㇱળ㐳 ේ᧛ཅᒾ ᧄቇળߢߪ 3 ᐕ߅߈ߦฬ★ࠍ⊒ⴕߒߡ߈߹ߒߚ㧚2009 ᐕᐲߪฬ★⊒ⴕߩᐕߦᒰߚࠅ߹ߔ㧚೨࿁ߩฬ★ߪ㧘ߏᛚ⍮ߩߣ߅ࠅ㧘ᖱႎ㊂ߩዋߥ޿߽ߩߦߥߞߡ޿߹ߔ㧚ൕോవߩ㔚⹤㧘FAX㧘㔚ሶࡔ࡯࡞ߩ޿ߕࠇ߆߹ߢ⸥タߒߡ޿ߚߛ޿ߚળຬߪඨᢙߦ෸߫ߕ㧘ൕോవߩ૑ᚲߐ߃⸥タߒߡ޿ߚߛߌߥ߆ߞߚળຬ߇ 6 ഀㄭߊ߅ࠅ߹
ߒߚ㧚ฬ★ߣߒߡߩ૕ⵙࠍߥߐߥߊߥߞߡ߈ߡ޿߹ߔ㧚✚ോㇱળߢߪ㧘߽ߪ߿ฬ★⊒ⴕߪ㧘୘ੱᖱႎᵹ಴ߩ
ᑷኂߩᣇ߇ᄢ߈ߊ㧘⾌↪ኻലᨐߩⷰὐ߆ࠄ߽߿߼ࠆߴ߈ߢ޽ࠆߣ޿߁⚿⺰ߦ⥋ࠅ߹ߒߚ㧚ߒ߆ߒ㧘ቯ᱅ߦ⋡⊛ߣߒߡ᣿⸥ߐࠇߚળຬ⋧੕ߩ੤ᵹࠍ࿑ࠆ਄ߢ㧘ળຬฬ★ߦ⋧ᒰߔࠆળຬߩㅪ⛊వࠍ⺞ߴࠆᚻᲑߪ⛮⛯⊛ߦឭଏߔߴ߈ߢ޽ࠅ㧘ᓥ᧪ߩฬ★ߦട߃㧘ᣂߚߥᯏ⢻ࠍട߃ߚળຬᖱႎࠍᬌ⚝ߒߡឭଏߔࠆࠪࠬ࠹ࡓࠍ᭴▽ߒߡળຬߩ⊝᭽ᣇߦߏ೑↪޿ߚߛߊߎߣߦ޿ߚߒ߹ߒߚ㧚એਅߦ㧘ળຬᖱႎᬌ⚝ࠪࠬ࠹ࡓߩ᭎ⷐ㧘ߘߩᣣ⒟㧘
ᖱႎឭଏߩ߅㗿޿ߦߟ޿ߡㅀߴ߹ߔ㧚1.

ળຬᖱႎᬌ⚝ࠪࠬ࠹ࡓߩ᭎ⷐ ࠪࠬ࠹ࡓߩᯏ⢻ߣ೑↪ߩᵹࠇࠍ࿑㧝ߦ␜ߒ߹ߔ㧚․ᓽߪએਅߩߣ߅ࠅߢߔ㧚1㧚(1) ᳁ฬ߆ࠄߩᬌ⚝㧘(2) ᧦ઙߦࠃࠆᬌ⚝ߩᯏ⢻ࠍᜬߟ㧚
2㧚↹㕙ߢ⷗ࠆߎߣߩߢ߈ࠆᖱႎߪᦨዊ㒢㧔᳁ฬߣൕോవฬ⒓㧕ߣߒ㧘ㅪ⛊వ╬ߩᖱႎߪ㧘⊓㍳ߐࠇߚࡔ࡯࡞
ࠕ࠼࡟ࠬߦㅍࠆߎߣߢ㧘ᖱႎᵹㅢ߇ળຬౝߦ㐽ߓࠆࠃ߁ߦߒߡ޿ࠆ㧚
3㧚ᖱႎߦࠃࠆᬌ⚝ᯏ⢻ߢߪ㧘(a) ࿾ၞ㧘(b) ᄢቇ࡮ડᬺ╬ߩ೎㧘(c) ⊓㍳ߐࠇߚኾ㐷ಽ㊁㧘(d) વᾲࠪࡦࡐ╬ᧄળਥ௅⻠Ṷળߩ⺰ᢥ㧔㗴⋡ߩߺ㧚⺰ᢥߦ⸥タߐࠇߚࠠ࡯ࡢ࡯࠼ߪ㧘౉ജ૞ᬺ㊂߇ㆊᄢߣߥࠆߩߢ㧘ᒰ㕙ߪ೑↪ߢ߈ࠆࠃ߁ߦߪߒߥ޿㧚㧕࡮ቇળ⹹╬ߩ⸥੐࡮⺰ᢥ㧔ᒰ㕙ߪㆊ෰㧡ᐕಽ㧚㗅ᰴჇ߿ߒᦨ⚳⊛ߦ 10 ᐕಽߣߔࠆ㧚㧕㧘ߦࠃࠆᬌ⚝߇ߢ߈ࠆ㧚
2.

ળຬᖱႎᬌ⚝ࠪࠬ࠹ࡓឭଏ߹ߢߩᣣ⒟4 ᦬ޯ6 ᦬㧦 ᒰᬌ⚝ࠪࠬ࠹ࡓߢឭଏ޿ߚߛߊ㧘ൕോవㇱ⟑࡮૑ᚲ࡮㔚⹤⇟ภ࡮FAX ⇟ภ࡮㔚ሶࡔ࡯࡞ࠕ࠼࡟
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3.

ળຬᖱႎᬌ⚝ࠪࠬ࠹ࡓߦ㑐ߔࠆ߅㗿޿ ✚ോㇱળߢߪ㧘ᧄቇળߩࡊ࡜ࠗࡃࠪ࡯ࡐ࡝ࠪ࡯ߣฬ★⊒ⴕ╬ߩ㑐ㅪߦߟ޿ߡ㧘એਅߩࠃ߁ߦ⠨߃ߡ߅ࠅ߹
ߔ㧚ฬ★߿ߘࠇߦ㘃ߔࠆ୘ੱᖱႎࠍઁߩળຬߦឭଏߔࠆⴕὑߪ㧘ቯ᱅ߦ␜ߐࠇߚ⋡⊛ߦߪᴪߞߡߪ޿ࠆ߽ߩ
ߩ㧘ࡊ࡜ࠗࡃࠪ࡯ࡐ࡝ࠪ࡯ߩ╙ 1 㗄㧘୘ੱᖱႎߩ෼㓸ߦⷙቯߐࠇߚ㧘‫ࠍ⊛⋡ޟ‬᣿␜‫ޟߡߒޠ‬ឭଏ⠪ߩᗧᔒߦၮ
ߠߊ‫߁޿ߣޠ‬ේೣߦᾖࠄߒߡ㧘ᡷ߼ߡ਄⸥ߩ↪ㅜߢឭଏ޿ߚߛߊߎߣߣߒ߹ߔ㧚ߒߚ߇ߞߡ㧘౏㐿ߔࠆ㗄⋡ࠍ୘೎ߦ⏕⹺ࠍߣࠅߥ߇ࠄㅴ߼ߡ߹޿ࠅ߹ߔ㧚ߎߩ૞ᬺߪ㧘ᧄᐕ 4 ᦬߆ࠄ߅㗿޿ߔࠆ੍ቯߢ޿߹ߔ㧚ߎߩࠪࠬ࠹ࡓ߇᦭ലߦᯏ⢻ߒ߹ߔࠃ߁ߦ㧘ൕോవㇱ⟑࡮૑ᚲ࡮㔚⹤⇟ภ࡮FAX ⇟ภߦߟ޿ߡߪ㧘ᭂജߏឭଏ޿ߚߛ
߈߹ߔࠃ߁㧘ߏදജߩ⒟ࠃࠈߒߊ߅㗿޿޿ߚߒ߹ߔ㧚 ᬌ⚝ࠪࠬ࠹ࡓߩේ᩺ߪ਄⸥ߩߣ߅ࠅߢߔ߇㧘ታ㓙ߩ᭴▽૞ᬺ㧔ᄖᵈ㧕ߪ 6 ᦬߆ࠄ㐿ᆎ޿ߚߒ߹ߔ㧚ߏⷐᦸ߇޽ࠅ߹ߒߚࠄ㧘4 ᦬ᧃ߹ߢߦේ᧛㧔haramy01@kanagawa-u.ac.jp㧕߹ߢߏㅪ⛊޿ߚߛ߈ߚߊሽߓ߹ߔ㧚੍▚ߩ⸵ߔ㒢ࠅኻᔕ޿ߚߒ߹ߔ㧚વᾲ 2009 ᐕ 1 ᦬- 38 -J. HTSJ, Vol. 48, No. 202߅⍮ࠄߖ࿑ 1 ળຬᖱႎᬌ⚝ࠪࠬ࠹ࡓߩᵹࠇ

વᾲ 2009 ᐕ 1 ᦬- 39 -J. HTSJ, Vol. 48, No. 202

߅⍮ࠄߖ


╙ 46 ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓ⻠Ṷ⺰ᢥ൐㓸
╙ 46 ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓታⴕᆔຬળᆔ ຬ 㐳 ’㊁ବ㇢੐ോዪ㐳 ਛㇱਥᢘ㐿௅ᣣ㧦 ᐔᚑ 21 ᐕ 6 ᦬ 2 ᣣ㧔Ἣ㧕ޯ 6 ᦬ 4 ᣣ㧔ᧁ㧕ળ ႐㧦 ࿖┙੩ㇺ࿖㓙ળ㙚㧔http://www.icckyoto.or.jp/㧕ⴕ߈ᣇ JR ੩ㇺ㚞߆ࠄ࿾ਅ㋕ὖਣ㧔߆ࠄߔ߹㧕✢ߢ 20 ಽ㧘࿖㓙ળ㙚㚞ਅゞ㧘ᓤᱠ 5 ಽ㧚
http://www.icckyoto.or.jp/jp/access/access.html
ᚲ࿷࿾ ‫ޥ‬606-0001 ੩ㇺᏒᏀ੩඙ቲࡩᳰ㧔Phone: 075-705-1234 / Fax: 075-705-1100㧕⻠ Ṷ ↳ ㄟ ᦼ 㑆㧦 ᐔᚑ 21 ᐕ 1 ᦬ 7 ᣣ㧔᳓㧕 㨪⻠Ṷ⺰ᢥේⓂឭ಴ᦼ㑆㧦 ᐔᚑ 21 ᐕ 2 ᦬ 24 ᣣ㧔Ἣ㧕 㨪੐ ೨ ෳ ട ↳ ㄟ ᦼ 㑆㧦 ᐔᚑ 21 ᐕ 2 ᦬ 24 ᣣ㧔Ἣ㧕 㨪ࡎ࡯ࡓࡍ࡯ࠫ URL㧦1 ᦬ 19 ᣣ㧔᦬㧕
3 ᦬ 16 ᣣ㧔᦬㧕
4 ᦬ 13 ᣣ㧔᦬㧕

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ߪ㧘ήᢱߣߒ߹ߔ㧚‫ޣ‬ᙣⷫળ‫ޤ‬࡮ 㐿 ௅ ᣣ㧦 ᐔᚑ 21 ᐕ 6 ᦬ 3 ᣣ㧔᳓㧕

વᾲ 2009 ᐕ 1 ᦬- 40 -J. HTSJ, Vol. 48, No. 202߅⍮ࠄߖ࡮ ળ  ႐㧦 ࿖┙੩ㇺ࿖㓙ળ㙚㧔ኃળ႐‫ޠࠄߊߐޟ‬㧕࡮ ᙣⷫળ⾌㧦৻⥸㧔੐೨↳ㄟ㧦8,000 ౞㧘ᒰᣣ↳ㄟ㧦10,000 ౞㧚㈩஧⠪ήᢱ㧕ቇ↢㧔੐೨↳ㄟ㧦4,000 ౞㧘ᒰᣣ↳ㄟ㧦 5,000 ౞㧕‫ޣ‬੤ㅢߣኋᴱ‫ޤ‬࡮ ੤ㅢߣኋᴱߦߟ޿ߡߪ㧘ᧄࠪࡦࡐࠫ࠙ࡓߩࡎ࡯ࡓࡍ࡯ࠫࠍߏෳᾖਅߐ޿㧚࡮ ੩ㇺߪ਎⇇߆ࠄߩᣏⴕ⠪߇Ᏹᤨ㧘ᄙᢙ㧘⸰ࠇࠆ࿖㓙ᢥൻㇺᏒߢߔ㧚ߘߩߚ߼㧘ࡎ࠹࡞ߩ੍⚂ߪኈᤃߢߪ޽ࠅ߹ߖࠎ㧚߅ᣧ߼ߦᚻ㈩ߐࠇࠆߎߣࠍᒝߊ߅൘߼ߒ߹ߔ㧚ࠪࡦࡐࠫ࠙ࡓታⴕᆔຬળߢ߽ 250 ቶ⒟ᐲ
ߩㇱደࠍ⏕଻ߒߡ߅ࠅ߹ߔ㧚ᧄࠪࡦࡐࠫ࠙ࡓߩࡎ࡯ࡓࡍ࡯ࠫࠍ߅⸰ߨਅߐ޿㧚⻠Ṷ↳ㄟᣇᴺ࡮⻠Ṷ⺰ᢥ㓸࡮ၫ╩ⷐ✁‫⻠ޣ‬Ṷ↳ㄟᣇᴺ‫ޤ‬࡮ ේೣߣߒߡࡎ࡯ࡓࡍ࡯ࠫ߆ࠄߩ↳ㄟߦ㒢ࠅ߹ߔ㧚ࠪࡦࡐࠫ࠙ࡓߩࡎ࡯ࡓࡍ࡯ࠫ߆ࠄᔅⷐߥ࠺࡯࠲ࠍ౉
ജߒߡਅߐ޿㧚ࡎ࡯ࡓࡍ࡯ࠫ߆ࠄߩ↳ㄟ߇ߢ߈ߥ޿႐วߦߪ㧘ታⴕᆔຬળߦ߅໧޿วࠊߖਅߐ޿㧚࡮ ৻⥸࠮࠶࡚ࠪࡦ㧘ࠝ࡯ࠟ࠽ࠗ࠭࠼࠮࠶࡚ࠪࡦ㧘ఝ⑲ࡊ࡟࠯ࡦ࠹࡯࡚ࠪࡦ⾨࠮࠶࡚ࠪࡦߩ޿ߕࠇߢ⊒⴫ߔࠆ߆ࠍㆬᛯߒߡਅߐ޿㧚ఝ⑲ࡊ࡟࠯ࡦ࠹࡯࡚ࠪࡦ⾨࠮࠶࡚ࠪࡦߦ↳ㄟߩ႐วߦߪ㧘ᧄภឝタߩ߅⍮ࠄߖ‫ޟ‬ఝ⑲ࡊ࡟࠯ࡦ࠹࡯࡚ࠪࡦ⾨ߦߟ޿ߡ‫ߏࠍޠ‬ෳᾖਅߐ޿㧚࡮ ⻠Ṷ↳ㄟᤨߦ㧘⻠Ṷ⺰ᢥߩࠕࡉࠬ࠻࡜ࠢ࠻㧔ᣣᧄ⺆ߢ 200ޯ250 ሼ㧕ࠍ౉ജߒߡਅߐ޿㧚⻠Ṷ⺰ᢥ㓸ߩᛞ㍳ߣߒߡ⑼ቇᛛⴚᝄ⥝ᯏ᭴㧔JST㧕ߩ࠺࡯࠲ࡌ࡯ࠬߦ⊓㍳ߒ߹ߔ㧚࡮ ⻠Ṷ↳ㄟߪ㧘⻠Ṷ⠪ 1 ฬߦߟ߈ 1 㗴⋡ߦ㒢ࠅ߹ߔ㧚࡮ ⻠Ṷ↳ㄟߪ㧘J-STAGE ਄ߢฃߌઃߌ߹ߔ㧚࡮ ⻠Ṷߩណุ߅ࠃ߮࠮࠶࡚ࠪࡦ߳ߩᝄಽߌߦߟ޿ߡߪ㧘ታⴕᆔຬળߦߏ৻છਅߐ޿㧚‫⻠ޣ‬Ṷ⺰ᢥ㓸‫ޤ‬࡮ ⻠Ṷ⺰ᢥ㓸ߣߒߡ㧘ࠝࡈ࠮࠶࠻ශ೚ 㧔⊕㤥㧕ߣ㔚ሶ ࠍ૞⵾ߒ߹ߔ㧚⻠Ṷ⺰ᢥ㓸㧔㔚ሶ 㧕ߪࡎ࡯ࡓࡍ࡯ࠫߦ࡝ࡦࠢߒߡ޽ࠆ J-STAGE ߦ߅޿ߡ౏㐿ߒ߹ߔ㧚ળຬߦߪቇળ⹹ 2009 ᐕ 4 ᦬ภߦ߅޿ߡࡄࠬ
ࡢ࡯࠼ᖱႎࠍㅢ⍮ߒ㧘㔚ሶ ࠍ J-STAGE ਄ߢ㑛ⷩߢ߈ࠆࠃ߁ߦߔࠆ੍ቯߢߔ㧚ࡄࠬࡢ࡯࠼ߦࠃࠆ㑛ⷩߪ㧘ળຬ߇ᒰ⹥⻠Ṷ⺰ᢥࠍߩߜߦේ⪺⺰ᢥߣߒߡቇⴚ⺰ᢥ⹹╬ߦᛩⓂߔࠆߎߣࠍ⠨ᘦߒ㧘ᧄ⻠Ṷ⺰ᢥ㓸߇㒢ࠄࠇߚ▸࿐ߦ㈩Ꮣߐࠇߚߎߣࠍ᣿␜ߔࠆߚ߼ߩ߽ߩߢߔ㧚࡮ ⻠Ṷ⺰ᢥ㓸㧔㔚ሶ 㧕ߩ CD-ROM ߽૞⵾ߒ㧘ෳട⠪ߦ㈩Ꮣߒ߹ߔ㧚ਇෳടߩળຬߦ߽㧘Ꮧᦸ߇޽ࠇ߫㈩Ꮣߒ߹ߔߩߢ㧘㐿௅ᓟߦታⴕᆔຬળߦ߅↳ߒㄟߺਅߐ޿㧚࡮ ࠝࡈ࠮࠶࠻ශ೚ ߩ⻠Ṷ⺰ᢥߩ㐳ߐߪ㧘1 㗴⋡޽ߚࠅ A4 ࠨࠗ࠭ߢ 2 ࡍ࡯ࠫߣߒ߹ߔ㧚⻠Ṷ⺰ᢥߩ૞ᚑ᭽ᑼߪ㧘2 Ბ⚵ ஥ 26 ሼ60 ⴕߣߒ߹ߔ㧚࡮ 㔚ሶ ߦߪ㧘ࠝࡈ࠮࠶࠻ශ೚ ߣหߓ߽ߩ߆㧘߹ߚߪ 8 ࡍ࡯ࠫએౝߩࡈ࡞ࡍ࡯ࡄ࡯ࠍឝタߔࠆߎߣ߇
ߢ߈߹ߔ㧚᭽ᑼߪࠝࡈ࠮࠶࠻ශ೚ ߣหߓߢߔ߇㧘ࠞ࡜࡯ߩ૶↪߇น⢻ߢߔ㧚ࡈࠔࠗ࡞ኈ㊂ߪᦨᄢߢ 2 MB߹ߢߣߒ㧘ࠕ࠾ࡔ࡯࡚ࠪࡦߪ฽߹ߥ޿߽ߩߣߒ߹ߔ㧚࡮ ේⓂߪࠪࡦࡐࠫ࠙ࡓߩࡎ࡯ࡓࡍ࡯ࠫ߆ࠄឭ಴ߒߡਅߐ޿㧚⻠Ṷ⺰ᢥᛩⓂ J-STAGE ߦࠕࠢ࠮ࠬߒ㧘ᔅⷐ੐㗄ࠍ⸥౉ߒߚᓟߦ㧘ේⓂࠍࠕ࠶ࡊࡠ࡯࠼ߒߡਅߐ޿㧚࡮ 㔚ሶ ߦឝタߐࠇߚ⻠Ṷ⺰ᢥߪ㧘ᧄቇળߩ⺰ᢥ⹹“Thermal Science and Engineering㧔એਅ㧘TSE ߣ⇛ߔ㧕”ߦߘߩ߹߹ᛩⓂߔࠆߎߣ߇ߢ߈߹ߔ㧚ߚߛߒ㧘ឝタߩนุߪㅢᏱߩᩏ⺒ࡊࡠ࠮ࠬࠍ⚻ߡ᳿߹ࠅ߹ߔ㧚࡮ TSE ߳ߩᛩⓂࠍᏗᦸߔࠆ႐วߦߪ㧘ࡎ࡯ࡓࡍ࡯ࠫ߆ࠄේⓂࠍឭ಴ߔࠆ㓙ߦ㧘⺰ᢥᛩⓂ↹㕙ਛߩ࠴ࠚ࠶
ࠢࡏ࠶ࠢࠬࠍ ON ߦߒߡਅߐ޿㧚ߘߩ㓙㧘TSE ߩᛩⓂⷙ⒟ࠍߏ৻⺒㗿޿߹ߔ㧚ᩏ⺒ߪ㧘㔚ሶ ߦឝタߐ

વᾲ 2009 ᐕ 1 ᦬- 41 -J. HTSJ, Vol. 48, No. 202߅⍮ࠄߖࠇߚ⺰ᢥࠍ߽ߣߦ TSE ✬㓸ᆔຬળߦ߅޿ߡᜂᒰࠛ࠺ࠖ࠲࡯ࠍቯ߼㧘ㅢᏱߩᚻ⛯߈ߦᓥߞߡⴕ޿߹ߔ㧚ࠝࡈ࠮࠶࠻ශ೚ ߣหߓ 2 ࡍ࡯ࠫߢ߽ TSE ᛩⓂේⓂߣߒߡฃߌઃߌ߹ߔ߇㧘8 ࡍ࡯ࠫએౝߢࠃࠅ⹦⚦ߦၫ╩޿ߚߛߊ߶߁߇㧘ߘߩᓟߩᩏ⺒߇౞Ṗߦㅴߺ߹ߔ㧚ឝタนߦߥߞߚᓟߦߪ㧘TSE ߩ⺰ᢥᒻᑼߦᴪߞߚ
ේⓂࠍឭ಴ߒߡ޿ߚߛ߈߹ߔ㧚ߎߩ႐วߩ TSE ⺰ᢥߩฃℂᣣߪ㧘ࠪࡦࡐࠫ࠙ࡓታⴕᆔຬળߢߩේⓂฃઃ
ᣣߦߥࠅ߹ߔ㧚࡮ ⻠Ṷ⺰ᢥේⓂߪ㧘⻠Ṷ⺰ᢥࠍ㔚ሶൻߔࠆߚ߼ߦ㧘ේೣߣߒߡ PDF ࡈࠔࠗ࡞ߢឭ಴ߔࠆ߽ߩߣߒ߹ߔ㧚
PDF ࡈࠔࠗ࡞ߢឭ಴ߢ߈ߥ޿႐วߦߪ㧘ᄌ឵૞ᬺᢱ㧔1 ઙߦߟ߈ 3,000 ౞㧕ࠍ↳ߒฃߌߡ㧘ታⴕᆔຬળ
߇ PDF ൻࠍઍⴕߒ߹ߔ㧚࡮ ឭ಴✦ಾᦼᣣ߹ߢߦᧂឭ಴ߩ⻠Ṷ⺰ᢥߪ㧘⻠Ṷ⺰ᢥ㓸㧔ౠሶ૕࡮CD-ROM㧕߅ࠃ߮ J-STAGE ߦឝタߐࠇ߹ߖࠎ㧚J-STAGE ߩ✦ಾߪ෩ᩰߢߔߩߢ㧘චಽߦߏᵈᗧਅߐ޿㧚‫ޣ‬ၫ╩ⷐ✁‫ޤ‬٤ ⻠Ṷ⺰ᢥේⓂߩᦠ߈ᣇ࡮ ⻠Ṷ⺰ᢥߪએਅߦᓥߞߡ૞ᚑߒߡਅߐ޿㧚߹ߚ㧘ᦠᑼߩ⹦⚦ߥࠄ߮ߦ࠹ࡦࡊ࡟࡯࠻↪ߩ㔚ሶࡈࠔࠗ࡞
ߪ㧘ࠪࡦࡐࠫ࠙ࡓߩࡎ࡯ࡓࡍ࡯ࠫࠍߏෳᾖਅߐ޿㧚⴫㗴ㇱಽߩᦠᑼ㧦 ේⓂߪ㧘ਅߩ྾ⷺ࿐޿ㇱߦ␜ߔࠃ߁ߦ㧘๺ᢥ⴫㗴㧘๺ᢥ೽㗴㧘⧷ᢥ⴫㗴㧘⧷ᢥ೽㗴㧘๺ᢥ⪺⠪ฬ㧔ળຬ⾗ᩰ㧘⪺⠪ฬ㧘ᚲዻߩ⇛⸥㧕㧘⧷ᢥ⪺⠪ฬ㧘⧷ᢥᚲዻᯏ㑐࡮ᚲ࿷࿾㧘⧷ᢥࠕࡉࠬ࠻࡜ࠢ࠻㧘⧷ᢥࠠ࡯ࡢ࡯࠼
ߩ㗅ߦ㧘Ბ⚵ࠍߖߕ᏷ 150mm ߦ෼߹ࠆࠃ߁ߦ࡟ࠗࠕ࠙࠻ߒߡਅߐ޿㧚ㅪฬ⠪߇޽ࠆ႐วߦߪ㧘⻠Ṷ⠪ߩ೨ߦ㧖ශࠍߟߌ㧘⧷ᢥߩᚲዻᯏ㑐࡮ᚲ࿷࿾ߦߟ޿ߡ߽਄ઃ߈ᢙሼߢ඙೎ߒߡਅߐ޿㧚 ⺰ᢥ⴫㗴߅ࠃ߮⪺⠪ฬߪ㧘⻠Ṷ↳ㄟᤨߩ࠺࡯࠲ߣหߓ߽ߩࠍหߓ㗅ᐨߢᦠ޿ߡਅߐ޿㧚⻠Ṷ↳ㄟᤨߩ࠺࡯࠲ߣ⇣ߥࠆ႐วߦߪ㧘⋡ᰴ߿⚝ᒁߦ෻ᤋߐࠇߥ޿ߎߣ߇޽ࠅ߹ߔ㧚
150mm╙  ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓේⓂߩᦠ߈ᣇ㧔๺ᢥ⴫㗴㧦)QVJKERV㧕
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The case of MS-Word㧔⧷ᢥ೽㗴: Times New Roman 12pt㧕
㧔1 ⴕ޽ߌࠆ㧕વᱜ 㧖વᾲ ᄥ㇢㧔੩ℂᄢ㧕㧔ળຬ⾗ᩰ ⪺⠪ฬ㨇⻠Ṷ⠪ߦߪ㧖ශ㨉㧔ᚲዻ⇛⒓㧕㧦᣿ᦺ૕ 12pt㧕
㧔1 ⴕ޽ߌࠆ㧕
Taro DENNETSU (⧷ᢥ⪺⠪ฬ㧦Times New Roman 10pt)
Dept. of Mech. Eng., Kyoto Univ. of Science, Kyotanabe, Kyoto 610-0321
㧔1 ⴕ޽ߌࠆ㧕㧔ᢥ㗡ߦඨⷺࠬࡍ࡯ࠬ 5 ߟࠍᝌ౉ߔࠆ㧕English abstract .....㧔⧷ᢥࠕࡉࠬ࠻࡜ࠢ࠻㧦Times New Roman
10pt, 100 ⺆⒟ᐲ㧕
㧔1 ⴕ޽ߌࠆ㧕
Key Words : Heat Transfer㧔⧷ᢥࠠ࡯ࡢ࡯࠼㧦Times New Roman 9pt, 3㨪5 ୘⒟ᐲ㧕

㧔1 ⴕ޽ߌࠆ㧕⴫㗴ㇱಽߩᦠᑼ
ᧄᢥߩᦠᑼ㧦 ╙㧝ࡍ࡯ࠫߢ㧘ᧄᢥߪ 9 ࡐࠗࡦ࠻᣿ᦺ૕ߩ 2 Ბ⚵㧔 ஥ 1 ⴕ 26 ᢥሼ⒟ᐲ㧕ߢ૞ᚑߒߡਅߐ޿㧚╙ 2 ࡍ࡯ࠫએਅߢߪ㧘వ㗡߆ࠄ 2 Ბ⚵ߣߒ㧘 ஥ 60 ⴕࠍ⋡቟ߣߒߡ૞ᚑߒߡਅߐ޿㧚࿑⴫㧦 ࿑⴫ਛߩ⸥ภ߅ࠃ߮ࠠࡖࡊ࡚ࠪࡦߪ⧷⺆ߢᦠ޿ߡਅߐ޿㧚ߥ߅㧘㔚ሶ ේⓂߪࠞ࡜࡯⴫␜߇น⢻ߢߔ߇㧘ࠝࡈ࠮࠶࠻ශ೚ ේⓂߪ⊕㤥ߢශ೚ߐࠇ߹ߔ㧚ෳ⠨ᢥ₂㧦 ෳ⠨ᢥ₂ߪ㧘ᧄᢥਛߩᒁ↪▎ᚲߩฝ⢋ߦዊ᜝ᒐࠍߟߌߚ⇟ภ(1)ߢ⴫ߒ㧘ᧄᢥߩᧃየߦᰴߩࠃ߁ߦ߹ߣ߼

વᾲ 2009 ᐕ 1 ᦬

- 42 -J. HTSJ, Vol. 48, No. 202

߅⍮ࠄߖߡ೉⸥ߒߡਅߐ޿㧚㧔⇟ภ㧕⪺⠪ฬ, 㔀⹹⇛⒓, Ꮞ-ภ㧔⊒ⴕᐕ㧕, వ㗡ࡍ࡯ࠫ⇟ภ.
଀㧦㧔1㧕વᾲ࡮ઁ 2 ฬ, ᯏ⺰(B), 12-345(2006), 1234.
2&( ࡈࠔࠗ࡞߳ߩᄌ឵㧦 PDF ࡈࠔࠗ࡞૞ᚑߩߚ߼ߩࡈࠔࠗ࡞ᄌ឵ᤨߦߪ㧘‫ߩ࠻ࡦࠜࡈޟ‬ၒ߼ㄟߺࠍⴕ߁‫⸳߁ࠃޠ‬ቯߒߡਅߐ޿㧚ᄌ឵ᓟߩ PDF ේⓂߪ㧘ឭ಴㧔ࠕ࠶ࡊࡠ࡯࠼㧕೨ߦ㧘ᔅߕ㧘ශ೚ߒߚ߽ߩࠍ⏕⹺ߒߡਅߐ޿㧚‫⻠ޣ‬Ṷ⺰ᢥߩ౏㐿ᣣ‫ޤ‬࡮ ⻠Ṷ⺰ᢥߪ㧘ળຬࠍኻ⽎ߦ㧘ࠪࡦࡐࠫ࠙ࡓ㐿௅ᣣߩ 1 ㅳ㑆⒟೨߆ࠄ J-STAGE ਄ߢ౏㐿ߒ߹ߔ㧚࡮ ߒߚ߇ߞߡ㧘․⸵ߦ㑐ࠊࠆ౏⍮ᣣߪ㧘ࠪࡦࡐࠫ࠙ࡓ㐿௅ᣣࠃࠅ߽ᣧߊߥࠅ߹ߔߩߢߏᵈᗧਅߐ޿㧚‫ޣ‬ෳട⾌╬ߩᝄㄟߺᣇᴺ‫ޤ‬࡮ࠬ࠹࠶ࡊ 1㧦߹ߕࠪࡦࡐࠫ࠙ࡓߩࡎ࡯ࡓࡍ࡯ࠫ߆ࠄ㧘੐೨ෳട⊓㍳ࠍⴕߞߡਅߐ޿㧚᛬ࠅ㄰ߒ㧘੐೨ෳട⊓㍳ ID ⇟ภ㧔4 ᩴߩᢙ㧘଀㧦1234㧕ߣ㊄㗵߇⸥タߐࠇߚ㔚ሶࡔ࡯࡞ࠍ߅ㅍࠅߒ߹ߔ㧚࡮ࠬ࠹࠶ࡊ 2㧦ߟ߉ߦ㧘ਅ⸥ߩ㌁ⴕญᐳߦ㧘㔚ሶࡔ࡯࡞ߦᜰቯߩ㊄㗵ࠍᝄㄟࠎߢਅߐ޿㧚ߘߩ㓙㧘ᔅߕ㧘᳁ฬߩ೨ߦ੐೨ෳട⊓㍳ ID ⇟ภࠍઃߌߡਅߐ޿㧚ᝄㄟవ㧦 ߺߕ߶㌁ⴕ
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1112829ญᐳฬ╙ 46 ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓታⴕᆔຬળ
㧔ATM ᯏߦࠃߞߡߪㅜਛ߹ߢߒ߆⴫␜ߐࠇߥ޿߆߽⍮ࠇ߹ߖࠎ߇ᄢਂᄦߢߔ㧚㧕ATM ᯏߢߩᝄㄟੱߩᜰቯ଀㧦 ‫ޟ‬㧝㧞㧟㧠 ࠹̍ࡦࡀ࠷࠲ࡠ࠙‫ޠ‬ᵈᗧ 1㧦㌁ⴕᝄㄟߺࠍ߽ߞߡ‫ޟ‬੐೨⊓㍳ቢੌ‫ߔ߹ߒߣޠ‬㧚ࡎ࡯ࡓࡍ࡯ࠫ߆ࠄߩ⊓㍳ߛߌߢߪ‫ޟ‬ቢੌ‫ߪߢޠ‬޽ࠅ߹ߖࠎ㧚ᝄㄟߺ߇ 4 ᦬ 14 ᣣએ㒠ߦߥߞߚ႐วߪ㧘ᒰᣣ⊓㍳ᛒ޿ߣߒ㧘ࠪࡦࡐࠫ࠙ࡓฃઃߦߡᏅ㗵ࠍ߅ᛄ޿޿ߚߛ߈߹ߔ㧚ᵈᗧ 2㧦⚻ℂಣℂߩㇺว਄㧘ⶄᢙߩ⊓㍳⠪ߩಽࠍ߹ߣ߼ߡᝄㄟ߻ߎߣߪߏ㆙ᘦਅߐ޿㧚߅ᚻᢙߢߔ߇㧘ᔅ
ߕ 1 ઙߕߟ‫ޟ‬ID ⇟ภߣ᳁ฬ‫ࠍޠ‬ᜰቯߒߡ߅ᝄㄟߺਅߐ޿㧚ᵈᗧ 3㧦੹࿁ߩࠪࡦࡐࠫ࠙ࡓߢߪ㌁ⴕญᐳߩߺࠍ㐿⸳ߒߡ޿߹ߔߩߢ㧘ᓥ᧪㧘ቇળ⹹ߦ᜽ߺㄟࠎߢ޿ߚ‫ޟ‬ㇷଢᝄᦧ↪⚕‫ࠎߖ߹ࠅ޽ߪޠ‬㧚‫ߏޣ‬ᵈᗧ‫ޤ‬࡮ ⻠Ṷ↳ㄟߩขᶖ߅ࠃ߮⻠Ṷ⺰ᢥේⓂߩᏅᦧߪ㧘ࠪࡦࡐࠫ࠙ࡓߩḰ஻ߣㆇ༡ߦᡰ㓚ࠍ߈ߚߒ߹ߔߩߢߏ
㆙ᘦਅߐ޿㧚࡮ ⺰ᢥ㗴⋡ߣ⪺⠪ฬ߇㧘⻠Ṷ↳ㄟᤨߣ⻠Ṷ⺰ᢥේⓂឭ಴ᤨߢ⋧㆑ߒߥ޿ࠃ߁ߦߏᵈᗧਅߐ޿㧚࡮ ญ㗡⊒⴫↪ߣߒߡታⴕᆔຬળ߇Ḱ஻ߔࠆᯏེߪ㧘ේೣߣߒߡ㧘ᶧ᥏ࡊࡠࠫࠚࠢ࠲࡯ߩߺߣߒ߹ߔ㧚ࡄ࡯࠰࠽࡞ࠦࡦࡇࡘ࡯࠲࡯ߪฦ⥄ߏᜬෳਅߐ޿㧚࡮ ෳട⾌㧘ᙣⷫળ⾌╬ߪෳടขᶖߩ႐วߦ߽߅㄰ߒߒ߹ߖࠎ㧚࡮ ߘߩઁ㧘ߏਇ᣿ߥὐ߇޽ࠅ߹ߒߚࠄ㧘ታⴕᆔຬળߦ E-mail ߹ߚߪ Fax ߢ߅໧޿วࠊߖਅߐ޿㧚‫߅ޣ‬໧޿วࠊߖవ‫ޤ‬╙ 46 ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓታⴕᆔຬળ ੩ㇺᄢቇ ᄢቇ㒮Ꮏቇ⎇ⓥ⑼ ᯏ᪾ℂᎿቇኾ᡹ౝ
 E-mail: info@nhts2009.me.kyoto-u.ac.jp
 Fax: 075-753-5209

વᾲ 2009 ᐕ 1 ᦬- 43 -J. HTSJ, Vol. 48, No. 202߅⍮ࠄߖ

ఝ⑲ࡊ࡟࠯ࡦ࠹࡯࡚ࠪࡦ⾨㧔╙ 46 ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓ㧕ߦߟ޿ߡ
ᣣᧄવᾲቇળ ቇ↢ળᆔຬળᆔຬ㐳 ၳㇱ᣿ᒾ╙ 46 ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓߢߪ㧘ਅ⸥ߩⷐ㗔ߢ㧘ቇ↢࡮⧯ᚻ⎇ⓥ⠪ࠍኻ⽎ߦఝ⑲ࡊ࡟࠯ࡦ࠹࡯࡚ࠪࡦ
⾨࠮࠶࡚ࠪࡦࠍ⸳ߌ߹ߔ㧚ડᬺ࡮ᄢቇ࡮⎇ⓥᯏ㑐╬ߩᄙᢙߩ⊝᭽ߦߏෳട޿ߚߛ߈ߚߊ߅㗿޿޿ߚߒ߹ߔ㧚ᣣ⻠ᤨ㧦 ᐔᚑ 21 ᐕ 6 ᦬ 2 ᣣ㧔Ἣ㧕 ࠪࡦࡐࠫ࠙ࡓ╙ 1 ᣣᑼ㧦 ⊒⴫⠪ 1 ฬ޽ߚࠅ 3 ಽ⒟ᐲߩ࡚ࠪ࡯࠻ࡊ࡟࠯ࡦ࠹࡯࡚ࠪࡦ㧔SP㧕ߣ 80 ಽ⒟ᐲߩࡐࠬ࠲
࡯ࡊ࡟࠯ࡦ࠹࡯࡚ࠪࡦ㧔PP㧕ࠍⴕ߁ᒻᑼࠍߣࠆ੍ቯߢߔ㧚⊒⴫ᣇᴺߩ⹦⚦ߦߟ޿ߡߪ⃻࿷ᬌ⸛ਛߢߔ㧚᳿ቯߒᰴ╙㧘ࠪࡦࡐࠫ࠙ࡓߩࡎ࡯ࡓࡍ࡯ࠫߦឝタߒ߹ߔ㧚ኻ⽎㧦 ડᬺ࡮ᄢቇ࡮⎇ⓥᚲ╬ߩᛛⴚ⠪࡮⎇ⓥ⠪ߢ㧘ᐔᚑ 21 ᐕ 3 ᦬ 31 ᣣ⃻࿷ߢ 28 ᱦએਅߩ⠪㧘߹ߚߪ㧘⻠Ṷ↳ㄟᒰᣣߦቇ↢ߢ޽ࠆ⠪㧔ߚߛߒ㧘␠ળੱᄢቇ㒮↢ࠍ㒰ߊ㧕㧚ᔕ ൐ ⾗ ᩰ㧦 ⻠Ṷᤨ㧔㧩ክᩏᤨ㧕ߦ㧘ᣣᧄવᾲቇળߩળຬ㧔ᱜຬ࡮ቇ↢ຬ㧕㧘߹ߚߪ㧘౉ળ↳ㄟਛߢ޽ࠆߎߣ㧚ᔕ ൐ ઙ ᢙ㧦 ᜰዉᢎຬ߹ߚߪ⎇ⓥࠣ࡞࡯ࡊ㐳╬޽ߚࠅ㧘1 ฬ㧔1 ઙ㧕ߣߒ߹ߔ㧚̌ఝᔕ ൐ ᣇ ᴺ㧦 ╙ 46 ࿁ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓ⻠Ṷ↳ㄟᤨߦ㧘ᧄภឝタߩ‫⻠ޣ‬Ṷ↳ㄟᣇᴺ‫ߦޤ‬ᓥߞߡ㧘
⑲ࡊ࡟࠯ࡦ࠹࡯࡚ࠪࡦ⾨̍ߩ㗄⋡ࠍㆬᛯߒ㧘̌ᜰዉᢎຬ߹ߚߪ⎇ⓥࠣ࡞࡯ࡊ㐳╬ߩ᳁ฬ̍߅ࠃ߮̌⎇ⓥಽ㊁ߩಽ㘃⸥ภ̍ࠍ౉ജߒߡਅߐ޿㧚ߥ߅㧘⻠Ṷ⺰ᢥේⓂߩ᭽ᑼߦߟ޿ߡ
ߪ৻⥸࠮࠶࡚ࠪࡦߣห᭽ߩ߽ߩߣߒ߹ߔ㧚ክᩏ࡮ㆬ⠨ᣇᴺ㧦 ⶄᢙฬߩክᩏຬߦࠃࠆ⹏ଔߦၮߠ޿ߡㆬ⠨ߒ㧘᝼⾨⠪ࠍ᳿ቯߒ߹ߔ㧚⴫ᓆ㧦 ⴫ᓆߪࠪࡦࡐࠫ࠙ࡓ╙ 2 ᣣߩᣣᧄવᾲቇળ✚ળߢⴕ޿߹ߔ㧚㧨⹦⚦ߪ㧘ᣣᧄવᾲቇળ࡮ᣣᧄવᾲࠪࡦࡐࠫ࠙ࡓታⴕᆔຬળ࡮ቇ↢ળᆔຬળౝߢᬌ⸛ਛߢߔ㧪㧨ᦨᣂᖱႎߪࠪࡦࡐࠫ࠙ࡓߩࡎ࡯ࡓࡍ࡯ࠫߦ౏㐿ߒ߹ߔ㧪Ṷ ᒻવᾲ 2009 ᐕ 1 ᦬- 44 -J. HTSJ, Vol. 48, No. 202

੐ോዪ߆ࠄߩㅪ⛊✬㓸಴ㇱળ߆ࠄߩ߅⍮ࠄߖ㧙ฦ⒳ⴕ੐࡮ᐢ๔ߥߤߩឝタߦߟ޿ߡ㧙 ࠗࡦ࠲࡯ࡀ࠶࠻ߩ᥉෸ߦࠃࠅᖱႎ⊒ା࡮੤឵⢻ജߩᲧ㘃ߥ޿ㅴዷ߇߽ߚࠄߐࠇ߹ߒߚ㧚৻ᣇ㧘ࡂ࡯࠼ࠦࡇ࡯ߣߒߡߩቇળ⹹ߦߪ㧘ࠕ࡯ࠞࠗࡉ⊛ߥଔ୯ ߩ ޽ࠆౝኈࠍᚻߦߣߞߡᾫ⺒ߢ߈ࠆὐ߿㧘৻ㅪߩࡍ࡯ࠫࠍ⌑߼ߡో⽩߇ኈᤃߦℂ⸃ߢ߈ࠆὐߥߤ㧘޿ߊࠄ㔚ሶᇦ૕߇⊒㆐ߒߡ߽߆ߥࠊߥ޿㐳ᚲ߇޽ࠆߩ
ߢߪߥ޿߆ߣᕁ޿߹ߔ㧚ߚߛߒ㧘ቇળ⹹ߩශ೚࡮⊒ㅍߦߪᄙ㗵ߩ⚻⾌߽઻޿߹ߔߩߢ㧘ᒰㇱળߢߪߎߩ߶ߤ㧘ኒᐲߩࠃࠅ㜞޿⹹㕙㧘ߔߥࠊߜࡂ࡯࠼ࠦࡇ࡯ߣߒߡߗ߭ߣ߽ᱷߔߴ߈ౝኈࠍ෩ㆬߒ㧘ࠗࡦ࠲࡯ࡀ࠶࠻ (HP㧦ࡎ࡯ࡓࡍ࡯ࠫ㧘ML㧦ࡔ࡯࡝ࡦࠣ࡝ࠬ࠻) ߢᛒ߁ᖱႎߣߩ᫮ߺಽߌࠍߒߚ✬㓸ᣇ㊎ࠍᬌ⸛޿ߚߒ߹ߒߚ㧚 ߎߩ⚿ᨐ㧘ߎࠇ߹ߢળ๔ࡍ࡯ࠫߢขࠅᛒߞߡ߈ߚฦ⒳ⴕ੐࡮ᐢ๔ߥߤߩឝタߦߟ߈㧘એਅߩࠃ߁ߥ
ᣇ㊎ߢኻᔕߐߖߡ޿ߚߛ߈ߚߊ㧘ߏℂ⸃ߣߏදജࠍ߅㗿޿ߔࠆᰴ╙ߢߔ㧚
ኻ ⽎

ኻ ᔕ

ᧄળ (ᡰㇱ) ਥ௅ߦࠃࠆⴕ੐

ή᧦ઙߢ⹦⚦ࠍ㧘ળ⹹ߣHPߦឝタ㧘MLߢ߽㈩ା

㑐ଥቇળ߿ᧄ
ળળຬ߇㑐ଥ
ߔࠆ⚵❱ߦࠃ
ࠆ࿖ౝᄖߩળ
⼏࡮ࠪࡦࡐࠫ࠙
ࡓ࡮࠮ࡒ࠽࡯
ᄢቇ߿౏⊛⎇ⓥᯏ㑐ߩੱ੐౏൐ (વᾲߦ
㑐ଥߩ޽ࠆಽ
㊁ߦ㒢ࠆ)᧦ઙઃ߈ឝタ৻⥸ᐢ๔᳞ੱᐢ๔ળ⹹㧦1ઙᒰߚࠅ4ಽߩ1ࡍ࡯ࠫ⒟ᐲߢឝタ (ήᢱ)
HP㧦ⴕ੐ࠞ࡟ࡦ࠳࡯ߦឝタߒ࡝ࡦࠢᒻᚑ (ήᢱ)ળ⹹㧦ឝタߖߕ
HP㧦᧦ઙઃ߈ឝタ (ήᢱ)
ML㧦᧦ઙઃ߈㈩ା (ήᢱ)ળ⹹㧦᧦ઙઃ߈ឝタ (᦭ᢱ)
HP㧦᧦ઙઃ߈ឝタ (ࡃ࠽࡯ᐢ๔ߩߺ㧘᦭ᢱ)ౕ૕⊛ߥᚻ⛯߈(㔚ሶࡔ࡯࡞ߢߩㅪ⛊ࠍ೨ឭߣߒߡ޿߹ߔ㧚) ↳ㄟ⠪ߪ㧘✚ോㇱળ㐳࡮✬㓸಴ ㇱળ㐳࡮ᐢႎᆔຬળ
ᆔຬ㐳࡮✚ോᜂᒰ೽ળ㐳⵬૒⹏⼏ຬߦ⸥੐ࠍหᤨㅍାߒ
ߡߊߛߐ޿㧚 ↳ㄟ⠪ߪ㧘߹ߕౝኈࠍ⺑᣿ߔࠆ⾗ᢱࠍ✚ോㇱળ㐳ߦㅍାߒߡߊߛߐ޿㧚ክ⼏ߩ⚿ᨐ㧘ឝタนߣߥߞߚ႐วߦߪ
✚ോㇱળ㐳ࠃࠅ↳ㄟ⠪ߦߘߩᣦㅢ⍮ߒ߹ߔߩߢ㧘↳ㄟ⠪ߪ⸥੐ࠍ✬㓸಴ ㇱળ㐳㧔ળ⹹ᜂᒰ㧕ߣᐢႎᆔຬળᆔຬ
㐳㧔HP ᜂᒰ㧕ߦㅍାߒߡߊߛߐ޿㧚 ↳ㄟ⠪ߪ㧘౏൐ౝኈࠍ✚ോㇱળ㐳ߦㅍାߒߡߊߛߐ
޿㧚ክ⼏ߩ⚿ᨐ㧘ឝタนߣߥߞߚ႐วߦߪ✚ോㇱળ㐳ࠃࠅ↳ㄟ⠪ߦߘߩᣦㅢ⍮ߒ߹ߔߩߢ㧘↳ㄟ⠪ߪ⸥੐ࠍᐢႎ
ᆔຬળᆔຬ㐳㧔HPᜂᒰ㧕࡮✚ോᜂᒰ೽ળ㐳⵬૒⹏⼏ຬ㧔MLᜂᒰ㧕ߦㅍାߒߡߊߛߐ޿㧚 ↳ㄟ⠪ߪ㧘✬㓸಴ ㇱળ㐳㧔ળ⹹ᜂᒰ㧕߹ߚߪᐢႎᆔ
ຬળᆔຬ㐳㧔HPࡃ࠽࡯ᐢ๔ᜂᒰ㧕ߦᐢ๔ౝኈࠍㅍାߒ
ߡߊߛߐ޿㧚ឝタนߣߥߞߚ႐วߦߪ✬㓸಴ ㇱળ㐳߹ߚߪᐢႎᆔຬળᆔຬ㐳ࠃࠅ↳ㄟ⠪ߦߘߩᣦㅢ⍮ߒ߹ߔߩߢ㧘↳ㄟ⠪ߪේⓂࠍ✬㓸಴ ㇱળ㐳߹ߚߪᐢႎᆔຬળ
ᆔຬ㐳ߦㅍାߒߡߊߛߐ޿㧚ឝタᢱᡰᛄ޿ᚻ⛯߈ߦߟ޿ߡߪ੐ോዪ߆ࠄߏㅪ⛊޿ߚߒ߹ߔ㧚ࡃ࠽࡯ᐢ๔ߩขࠅᛒ
޿ߦߟ޿ߡߪ http://www.htsj.or.jp/banner.pdf ࠍߏෳᾖਅߐ޿㧚‫ޣ‬ㅪ⛊వ‫ޤ‬࡮✚ോㇱળ㐳㧦ේ᧛ ཅᒾ㧔␹ᄹᎹᄢቇ㧕㧦haramy01@kanagawa-u.ac.jp࡮✬㓸಴ ㇱળ㐳㧦ㄭਭᱞ⟤㧔ർᶏ㆏ᄢቇ㧕㧦takemi@eng.hokudai.ac.jp࡮ᐢႎᆔຬળᆔຬ㐳㧦૒⮮ᵗᐔ㧔ᘮᙥ⟵Ⴖᄢቇ㧕㧦yohei@sd.keio.ac.jp࡮✚ോᜂᒰ೽ળ㐳⵬૒⹏⼏ຬ㧦ዊᎹ㇌ᐽ㧔ᘮᙥ⟵Ⴖᄢቇ㧕㧦ogawa@mech.keio.ac.jp࡮੐ോዪ㧦ୖ᳓⵨ሶ㧦office@htsj.or.jp‫ޣ‬ᵈᗧ‫ޤ‬
࡮ේⓂߪWordࡈࠔࠗ࡞߹ߚߪtextࡈࠔࠗ࡞ߢ߅㗿޿ߒ߹ߔ㧚
࡮HPߪࡔࡦ࠹࠽ࡦࠬߩㇺว਄㧘ឝタߪ↳ㄟ᦬ߩ⠉᦬㧘߹ߚ೥㒰߽Ꮧᦸឝタᦼ㒢ߩ⠉᦬⒟ᐲߩᤨ㑆ㆃࠇ߇޽ࠆߎߣࠍߏੌᛚ㗿޿߹ߔ㧚࡮ ML ߢߪ㧘ේೣߣߒߡ࠹ࠠࠬ࠻ᢥߩㅍାߣߥࠅ߹ߔ㧚pdf ╬ߩᷝઃࡈࠔࠗ࡞ߢㅍାࠍᏗᦸߐࠇࠆ႐วߪߏ⋧⺣ߊߛߐ޿㧚
વᾲ 2009 ᐕ 1 ᦬- 45 -J. HTSJ, Vol. 48, No. 202

੐ോዪ߆ࠄߩㅪ⛊ ᦼᣂ౉ળຬ㧔㨪㧕ᱜ ฬ࡮ቇ↢ ฬ
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ᚲዻ⍫ፒㇱຠᩣᑼળ␠
੩ㇺᎿ⧓❫⛽ᄢቇ㔚᳇ㅢାᄢቇ

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ᚲዻ
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㧶㧲㧱ᛛ⎇ᩣᑼળ␠

વᾲ 2009 ᐕ 1 ᦬- 46 -J. HTSJ, Vol. 48, No. 202

熱流束センサーは、熱エネルギーの移動密度（W/cm2 ）に比例した直流電圧を出力します。弊社の製品は米国バージニア工科大学が開発した新しい技術をVatell社で商品化したもので、大変手軽に高速・高精度で熱流量の測定をすることができます。
特に応答速度の早いこと、センサーからの出力レベルが高いことが特徴で、熱流束
マイクロセンサー（ HFM）では、応答速度最高６マイクロ秒を達成しています。

熱流束マイクロセンサー
特 徴

使用例

● 最高速の応答（約 6μ秒）
● 850℃まで外部冷却不要● 低雑音 / 高感度● 熱流束と温度を測定● 伝導、対流、輻射に等感度● エンジン内壁の熱伝達状態観察● ロケットエンジンのトラバース実験●タービンブレード熱風洞試験● 自動車用エアーバッグ安全性試験●ジェットエンジンバックファイヤー試験

ガードン型円形フォイルセンサー
水冷却型

センサー本体の構造は、薄膜フォイル･ディスクの中心と周囲の温度差を測定する、差動型熱電対をとなっています。フォイル･ディスクはコンスタンタンで作られており、銅製の円柱形ヒートシンクに取り付けられています。水冷式
は取付け場所の自由度が高く長時間の測定が可能です。
使用例

熱伝導
冷却型

● 焼却炉・溶鉱炉の熱量測定● 火災実験の際の輻射熱ゲージ● バーナーなど熱源の校正用基準器● 着火性・燃焼性試験（ISO5657,5658,5660）● 米国連邦航空局のファイヤー･スモークテスト

シート状熱流束センサー
センサーは銅とニッケルのサーモパイルから構成されており、測定対象物に貼付けて使います。センサーは厚さが 0 . 2 mmと薄いので、柔 軟 性に富んでおり、直径1インチの円筒形に湾曲させる事が出来ますので、パイプなどに貼り付けてお使いになるには最適です。
使用例

熱流束センサー
校 正サ ービス● 電気・電子機器内の発熱・放熱状態測定● 熱交換器の効率測定● パイプの放熱状況測定

熱流束センサーの校正作業をお引き受けいたします。校正証明書は
米国基準局NISTにトレーサブルです。校正設備の物理的な制約で、お引き受けできない場合もあります。ご相談ください。

〒106-0031 東京都港区西麻布 3-24 -17 霞ビル 4F
TEL: 03-5785-2424 FAX: 03-5785-2323

URL

E-mailsenstech@td6.so-net.ne.jp䮍䭶䮕䭱䮜䭪䮀䬾䯸⁛⥄䬽㜞ᐲᛛⴚ䭡ᜬ䬳ᶏᄖ䮨䯃䭲䯃䬽ᾲᵹ⸘䯻ᾲᵹ᧤䮂䮺䭼䯃䭡䬣⚫੺䬦䬵䬓䭍䬨䫻䎃 CAPTEC ␠ 䯴䮜䮰䮺䮀䯵䎃
CAPTEC ␠䬾䯸⁛⥄䬽㜞ᐲᛛⴚ䬺䭗䭙䯸ૐᾲᛶ᛫䬶㜞ᗵᐲ䬹ᾲᵹ᧤䮂䮺䭼䯃䭡㐿⊒䯂⵾ㅧ⥌䬦䬵䬙䭙䭍䬨䫻ⅣႺ᷷ᐲ䬛ᄌൻ䬦䬵䭑ᗵᐲ䬾Ᏹ䬺৻ቯ䬶䯸ᾲᵹ᧤୯䬺Ყ଀䬦䬮㔚࿶䭡㜞♖ᐲ䬺಴ജ䬦䭍䬨䫻ユ኿䮂䮺䭼䯃䬾䯸ユ኿ᾲ䬽䭎䭡⸘᷹䬨䭚↹ᦼ⊛䬹䮂䮺䭼䯃䬶䬨䫻․ᵈᒻ⁁䭑ᛚ䬲䬵䬙䭙䭍䬨䫻䎃 ᾲᵹ᧤䮂䮺䭼䯃䎃 䎃
䭼䭫䮁䰆
ᾲᛶ᛫୯䰆
ᾲવዉ₸䰆
᷷ᐲ▸࿐䰆
ᔕ╵ㅦᐲ䰆
ᨵエᕈ䰆
䭱䮞䭾䮮䮺䰆․ᵈຠ䰆5䐙5䱊300䐙300 [mm] 䯴ෘ䭎䰆0.4 [mm]䯵
0.00015 [䛐/(W/m2)]
2.7 䰧W/mK䰩
䯹200䱊200 [䛐]⚂ 200 [ms]䮜䮳䭴䭾䮝䮲䯹⋥ᓘ 30 [mm] 䬺ᒭᦛ䮱䭿䮊䮐䯹ᐔ㕙↪
᷷ᐲ⸘᷹↪ T ဳᾲ㔚ኻౝ⬿ᦨ㜞᷷ᐲ 350 [䛐]䭍䬮䬾 380 [䛐]䯸㒐᳓ടᎿ䎃 ユ኿䮂䮺䭼䯃䎃 䎃
䭼䭫䮁䰆
ෘ䭎䰆
᷷ᐲ▸࿐䰆
ᔕ╵ㅦᐲ䰆
ᨵエᕈ䰆
䭱䮞䭾䮮䮺䰆․ᵈຠ䰆ᵄ㐳㗔ၞ䰆5䐙5䱊50䐙50 [mm]0.25 [mm]䯹200䱊250 [䛐]⚂ 50 [ms]⋥ᓘ 30 [mm] 䬺ᒭᦛ᷷ᐲ⸘᷹↪ T ဳᾲ㔚ኻౝ⬿ᦨ㜞᷷ᐲ 350 [䛐]䭍䬮䬾 380 [䛐]ᐢᏪၞ䯴นⷞ䯷⿒ᄖ䯵䯻ᮡḰ䯴⿒ᄖ䯵䬈䭩䮞䮱䭸䯃䭾䮮䮺䬉䧆વᾲ৻⥸䎃 䎃 䧆᷷ᾲⅣႺ䎃 䎃 䧆䭼䯃䮥䮲䮥䮔䭴䮺䎃 䎃 䧆㘩ຠ䯻⺞ℂ䯹὾ᚑ䭱䯃䮝䮺䎃 䎃 䧆䭺䮺䭶䮱䯃䮏䯂࿾ਛၒ⸳䧊ᒰ␠䬶䬾䫺CAPTEC ⵾ຠ䬺ᦨㆡ䬹䮎䯃䮆䮴䭳䯃䭑ขᛒ䬲䬵䬙䭙䭍䬨䫻䎃 䬙᳇シ䬺䬙໧䬓ว䭞䬪ਅ䬤䬓䫻᦭㒢ળ␠ 䮍䭶䮕䭱䮜䭪䮀䎃 䎃 䯴CAPTEC ␠ᣣᧄ✚ઍℂᐫ䯵䎃 䎃 䎃 䎃 䎃 䎃 䎃 䎃 䎃 䎃 URL: http://www.techno-office.com/
ᧄ␠䰆 䬊225-0011䎃 ␹ᄹᎹ⋵ᮮᵿᏒ㕍⪲඙䬑䬥䭎㊁ 3-20-8-B

TEL. 045 (901) 9861䎃 䎃 FAX. 045 (901) 9522

LaVision␠䊧䊷䉱䊷䉟䊜䊷䉳䊮䉫⵾ຠ䈱ᣣᧄ✚ઍℂᐫ䈮䈭䉍䉁䈚䈢
PIV䇮LIF䇮Raman䇮Rayleigh䇮LII䇮╬䈱ᛛⴚ䉕⚵䉂ว䉒䈞䈢ⶄว⸘᷹䉲䉴䊁䊛䉕᭴▽䈚䇮⒳䇱䈱䉝䊒䊥䉬䊷䉲䊢䊮䈪䈱䉸䊥䊠䊷䉲䊢䊮䉕ឭଏ䈚䉁䈜䇯

Laser Imaging Solution䉝䊒䊥䉬䊷䉲䊢䊮

Laser Imaging Techniques
Mie

LIF

PIV

Raman

Rayleigh

ᵹ䉏
ᵹ૕ജቇ

ᵹ䉏᭴ㅧ
䊌䉺䊈䊷䉲䊢䊮

ᵹ䉏䈱นⷞൻ
䊚䉨䉲䊮䉫

ᵹ䉏႐

⚵ᚑ
᷷ᐲ

᳇૕Ớᐲ
᳇૕᷷ᐲ

ྃ㔵

ᶧṢ
䊌䉺䊈䊷䉲䊢䊮

ᶧ૕䋨Άᢱ䋩⾰㊂
ᶧ૕䋯⫳᳇

ᵹ䉏႐

䊒䊧䊷䊅䊷ᶧṢ䉰䉟䉵⸘᷹

⾰㊂ᵹ᧤

Ά὾
䉣䊮䉳䊮

☸ሶ
ᶧṢ

䊤䉳䉦䊦䇮Άᢱ
ൻቇ䊒䊨䉶䉴

ᵹ䉏႐

䊒䊤䉵䊙

☸ሶ
↢ᚑ

⒳
෻ᔕ↹௝

ᵹ䉏႐

᧚ᢱ⹜㛎
⴫㕙ᄌᒻ
਄⸥ో䈩䈱
䉝䊒䊥䉬䊷䉲䊢䊮

LII

FlowMaster
FluidMaster
SprayMaster
SizingMaster

ᶧ૕䋯⫳᳇
᷷ᐲ
䉧䉴⚵ᚑ
᷷ᐲ

⸘᷹䉲䉴䊁䊛

᳇૕Ớᐲ
᳇૕᷷ᐲ

䈜䈜

FlameMaster
EngineMaster
PlasmaMaster㜞ᐲ↹௝⋧㑐

StrainMaster䋲ᰴర䋧䋳ᰴర䈱ᄌᒻ䇮ᱡ䉂႐䇮ᔕജ䋨⿥䋩㜞ㅦ䉟䊜䊷䉳䊮䉫High-Speed
Master Systemㆊᷰ⃻⽎䇮ᤨ㪄ⓨ㑆⋧㑐䈱ᤨ♽೉ㆊ⒟ᧄᐢ๔䈱⵾ຠ઀᭽䈲ᡷༀ䈱䈢䉄੍๔ή䈒ᄌᦝ䈜䉎႐ว䈏䈅䉍䉁䈜ᣣᧄ䉦䊉䊙䉾䉪䉴ᩣᑼળ␠ᵹ૕⸘᷹䊂䉞䊯䉞䉳䊢䊮䈍໧䈇ว䉒䈞䈲䇮䉦䉴䉺䊙䊷䉰䊷䊎䉴⓹ญ䈻
Email fluids@kanomax.co.jp
TEL. (03)6825-9090 FAX. (03)5371-7680
URL http://www.kanomax.co.jp/fgroup.html

✬㓸಴

ㇱળࡁ࡯࠻

Note from the Editorial Boardࠕࡔ࡝ࠞߩࠨࡉࡊ࡜ࠗࡓࡠ࡯ࡦ໧㗴ߦ┵ࠍ⊒ߒߚ਎⇇⊛⚻ᷣෂᯏ߇㧘ᢙࡩ᦬ߢ਎ߩਛߩ⁁ᴫࠍ৻ᄌߒ㧘੹ᓟߩవⴕ߈߇ਇㅘ᣿ߥᤨઍߣߥࠅ߹ߒߚ㧚ᦨ㜞⋉ࠍ਄ߍߡ޿ߚ࠻࡛࠲⥄േゞ߇㧘ඨᐕߢᄢ᏷ߥ⿒ሼ᳿▚⷗ㅢߒߣߥࠅ㧘ᣣᧄฦ࿾ߢᄙߊߩᵷ㆜ഭ௛⠪߇ᄬᬺߒᆎ߼ߡ߅ࠅ߹ߔ㧚߹ߚ㧘ᄢቇߦ߅޿ߡ߽ࠕࡔ࡝ࠞ⊛ߥᢎ⢒㨯⎇ⓥࠪࠬ࠹ࡓ߇ᄙᢙዉ౉ߐࠇ㧘ߘߩ৻ߟߩ⚿ᨐߣߒߡ⡯ߦߟߌߥ޿ඳ჻ቇ↢ࠍ㧘ᄢ㊂ߦ␠ળߦㅍ
ࠅ಴ߒߡߒ߹޿߹ߒߚ㧚ࠕࡔ࡝ࠞ⊛┹੎ේℂߦၮߠߊଔ୯ⷰ߇㧘ᔅߕߒ߽ା㗬ߦ⿷ࠆ߽ߩߢߪߥ޿ߎߣ߇
㔺๒ߒᆎ߼ߡ޿ࠆࠃ߁ߦᕁ޿߹ߔ㧚ߎࠇ߆ࠄߪᓥ᧪ߩ‛⾰஍㊀ဳ↥ᬺ᭴ㅧ߆ࠄ⣕ළߒ㧘⥄ὼߣ⺞๺ߒߚ↢↥࡮ᶖ⾌ᵴേߦࠃߞߡ⚻ᷣ߇ᚑ┙ߔࠆ␠ળߦߒߥߌࠇ߫㧘❥ᩕࠍᜬ⛯ߢ߈ߥ޿ࠃ߁ߦᕁ޿߹ߔ㧚ࠛࡀ࡞ࠡ࡯ߪ߹ߐߦߘߩਛᔃߢ޽ࠅ㧘ᣂߒ޿㓹↪ࠍ↢ߺ಴ߔ↥ᬺߩవዉಽ㊁ߦߥࠅᓧࠆߢߒࠂ߁㧚વᾲቇળຬߩ㗎ᒛࠅߤߎࠈߣᕁ޿߹ߔ㧚ߊߒߊ߽㧘੹ᄛ㧘ࠝࡃࡑᄢ⛔㗔ߩዞછṶ⺑߇੍ቯߐࠇߡ߅ࠅ߹ߔ㧚ᣂߒ޿ଔ୯ⷰ
ߦࠃࠆᤨઍ߇ᆎ߹ࠆߎߣࠍᦼᓙߒߡ߅ࠅ߹ߔ㧚ߐߡ㧘ᧄળ⹹ߪ੍▚ߩ⸵ߔ▸࿐ౝߢ㧘ࠞ࡜࡯ࡍ࡯ࠫࠍᄙߊขࠅ౉ࠇߡ߅ࠅ߹ߔ㧚ળຬߩ⊝᭽ߦ߅߆ࠇ߹
ߒߡߪ㧘⎇ⓥߩ㓐ᗐ߿⧰ഭ⹤㧘޽ࠆ޿ߪ⎇ⓥᚑᨐߩਥⷐㇱಽࠍ߹ߣ߼ߚ‛ߥߤ㧘⺰ᢥ㓸ߢߪᦠߌߥ޿ࠃ߁
ߥ⸥੐ࠍ‫․ޟ‬೎ነⓂ‫ߏߡߒߣޠ‬ၫ╩㗂߈㧘ߏ⥄りߩ⸥㍳ߣߒߡ߽ߏ೑↪㗂ߌࠇ߫⺈ߦᐘ޿ߢߔ㧚․ߦ㧘ቯᐕㅌ⡯೨ᓟߩળຬߦߪߎ߁ߒߚ⸥੐ࠍߏၫ╩㗂ߌࠇ߫㧘ળຬ߽ᄢ༑߮ߢߔ㧚ߏ⥄りߦࠃࠆᛩⓂߪ൩⺰㧘りㄭߦ⹥ᒰߔࠆᣇ߇߅ࠄࠇ߹ߒߚࠄ㧘ዊ⡯ተ㧘ߏㅪ⛊㗂ߌࠇ߫⺈ߦ޽ࠅ߇ߚߊᕁ޿߹ߔ㧚ળຬ㑆ߩ᳇シߥᗧ⷗੤឵ߩ႐ߣߒߡ㧘Heart Transfer ߣ޿ߞߚᰣ߽↪ᗧߒߡ߅ࠅ߹ߔߩߢ㧘߅᳇シߦ⒳‫ߏߩޘ‬ᗧ⷗߿⸥੐ᛩⓂ
ࠍ㗂ߌࠇ߫ᐘ޿ߢߔ㧚ߢߪ㧘੹ᓟߣ߽ࠃࠈߒߊ߅㗿޿޿ߚߒ߹ߔ㧚ㄭਭᱞ⟤㧔ർᶏ㆏ᄢቇ㧕
Takemi Chikahisa (Hokkaido University)e-mail: takemi@eng.hokudai.ac.jp೽ળ㐳 Ἇᧄ ᤘ㧔㊄ᴛᄢ㧕      ㇱળ㐳 ㄭਭᱞ⟤㧔ർᶏ㆏ᄢቇ㧕ᆔ ຬ㧔ℂ ੐㧕ᆢ㊁ୃᑝ㧔ାᎺᄢቇ㧕    ᯅᧄᓞ↵㧔ᐢፉᄢቇ㧕ජ↰ ⴤ㧔หᔒ␠ᄢ㧕⮮ጟᕺሶ㧔㧔ᩣ㧕㩖㨱㩧㩂㩆㨸㩏㩣㨯㩖㩣㨼㨹㩎㩨㧕㧔⹏⼏ຬ㧕ᄢ㤥ፏᒄ㧔ᣣ┙࿖㓙㔚᳇㧕   ⷺญൎᒾ㧔↥ᬺ✚ว⎇ⓥᚲ㧕㣮࿦⋥Პ㧔᧲੩ᄢቇ㧕     ਛ೎ᐭ ୃ㧔᣿ᴦᄢቇ㧕ศ↰◊ᱜ㧔ᄢ㒋ᐭ┙ᄢቇ㧕   㐳⼱Ꮉ㆐਽㧔ฬฎደᄢቇ㧕⧎᧛సᖗ㧔᧲Ꮏᄢ㧕      ৻ᴺᏧ⨃ବ㧔ਃ⪉㔚ᯏ㧕⑔⼱๺ਭ㧔␹ᚭ⵾㍑㧕
ਭⷺ༑ᓼ㧔ᄢ㒋ࠟࠬ㧕
TSE ࠴࡯ࡈࠛ࠺ࠖ࠲࡯  㐷಴᡽ೣ㧔૒⾐ᄢቇ㧕✬㓸ᐙ੐ ⍹↰⾫ᴦ㧔૒⾐ᄢቇ㧕✬㓸಴ ੐ോዪ㧦ർᶏ㆏ᄢቇᄢቇ㒮Ꮏቇ⎇ⓥ⑼ࠛࡀ࡞ࠡ࡯ⅣႺࠪࠬ࠹ࡓኾ᡹ ㄭਭᱞ⟤‫ޥ‬060-8628 ᧅᏻᏒർ඙ർ 13 ᧦⷏ 8 ৼ⋡ 
Tel: 011-706-6785 Fax: 011-706-7889㧘takemi@eng.hokudai.ac.jp

વᾲ 2009 ᐕ 1 ᦬

- 50 -J. HTSJ, Vol. 48, No. 202