September 25, 2023

Photo electron Soul, Only Supplier of “Semiconductor Photocathode Electron
Beam Technology”, Signs Capital and Business Partnership with USHIO
Nagoya, Japan: Photo electron Soul Inc. (Takayuki Suzuki CEO, hereafter “PeS”), astartup company launched by Nagoya University, announced today that it has raised
730 million yen from a group of general partners led by USHIO INC. (Koji Naito
President & CEO, hereafter “USHIO”) and concluded a sole-distributor agreement withUSHIO for the semiconductor photocathode e-beam generation systems incorporated
into e-beam semiconductor wafer pattern inspection tools.
PeS is the only company in the world that has successfully developed thesemiconductor photocathode e-beam system. PeS is currently dedicated to promoting
business for semiconductor inspection systems, with the mission to “Create the futureof the semiconductor industry with the semiconductor photocathode e-beam”.
Incorporation of the PeS e-beam system into semiconductor inspection tools allows 1)
enhancement of throughput by 10 times or more compared with existing e-beamsystems; 2) conducting non-contact testing of transistors by selective radiation of ane-beam; and 3) detection of particles hidden at the bottom of a deep hole with theaspect ratio of 30 or more by instant control of the beam dose.
Takayuki Suzuki, CEO of PeS, commented: “The latest technology we offer with our
semiconductor photocathode e-beam makes a great contribution to enhancing
productivity in the development and manufacturing of semiconductor devices. Our
business for semiconductor inspection systems has just entered the first sales phase,and we already have started technological collaborations with some device
manufacturers and inspection tool suppliers. I’m pleased to get funding from USHIO
as well as conclusion of a sole-distributor agreement with USHIO, because we canfully use USHIO’s global sales and service network of its light sources forsemiconductor inspection tools. USHIO plans to start its sales activities for oursemiconductor photocathode e-beam systems to both semiconductor inspection tool
suppliers and device manufacturers.”
For the details of the semiconductor photocathode e-beam technology and theproducts using this technology, please click the following links on the PeS website:PeS Technology: https://photoelectronsoul.com/en/technology/
PeS Products: https://photoelectronsoul.com/en/product/

About USHIO INC.
Established in 1964. The company manufactures and sells lamps, lasers, light emitting
diodes, and other light sources in the ultraviolet, visible, and infrared bands of thespectrum along with optical and imaging equipment incorporating these devices.
Numerous Ushio products in the Industrial Processes field, which encompasses themanufacturing of semiconductors, flat panel displays, electronic components andother products, and in the Visual Imaging field, characterized by digital projectors,
illumination, and other products, have large market shares. In recent years, Ushio’soperations have expanded to the Life Sciences field, most notably medical
applications and the environment. https://www.ushio.co.jp/en/

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About Photo electron Soul Inc.
Established in 2015. Photo electron Soul Inc. is a startup company launched byNagoya University, founded based on the technologies that have been cultivated andenhanced by Nagoya University for over 30 years. It is the only company in the worldthat supplies semiconductor photocathode e-beam systems for industrial
applications. With this semiconductor photocathode e-beam technology as its core,
the company aims at providing products and services created by combining multiple
different technology fields to lead innovations in a wide range of industries, including
electronic devices, manufacturing, and life science.
https://photoelectronsoul.com/en/.
Company Contact:
Shigeru Tsuchitani COO,
Photo electron Soul Inc.
E-mail: inquiry@photoelectronsoul.com

Corporate Communications Department
USHIO INC.
Tel: +81-3-6361-5592
E-mail: info@ushio.co.jp

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