GPS Safety Summary Reference No.: JIPS_MSP_GS‐1104

SHOWA DENKO K.K.

GPS/JIPS Safety Summary
1. SUBSTANCE NAME
Hexafluoroethane (CAS No.: 76-16-4)
2. GENERAL STATEMENT
Under normal temperatures, hexafluoroethane is a stable, clear, odorless, non-flammable gasthat has been specified as a greenhouse gas. When handling the gas, it is necessary to
exercise caution in regard to oxygen deficiency and high-pressure gas.
Our high-quality hexafluoroethane is suitable for use in semiconductor manufacturing
processes, as a cleaning gas.
3. CHEMICAL IDENTITY
Item
Chemical or genericname
Product name
CAS No.
Other Nos.
Chemical formula
Structural formula
Sources/references

Description
HexafluoroethaneHigh Purity FC-11676-16-4
Japan: Chemical Substances Control Law (2)-88
EC No. EINECS No: 200-939-8
C2F6

Sections 3 and 16 of the SDS issued by SHOWA DENKO K.K.

4. USES AND APPLICATIONS
Main uses

Our hexafluoroethane is used for a cleaning gas as a high-quality
gas for producing semiconductors. Other applications ofhexafluoroethane include a refrigerant agent.

5. PHYSICAL/CHEMICAL PROPERTIESHexafluoroethane takes form of a clear gas under normal temperatures and pressures.
AppearanceGasColor
ColorlessOdor
Slight ethereal odor
Boiling point-78.15 ºC
Flammability ( gas)
Non-combustible
Auto-ignition
No reliable datatemperature
Vapor pressure
3.03MPa (19.7 ºC)

GPS Safety Summary Reference No.: JIPS_MSP_GS‐1104

Vapor density
Solubility in water
Sources/references

4.8Kg/m3(21.1 ºC)
insoluble
Section 9 of the SDS issued by SHOWA DENKO K.K.

6. HEALTH EFFECTS

Effect assessment
Acute toxicity (oral)
Acute toxicity (dermal)
Acute toxicity (Inhalation : gases)
Acute toxicity (Inhalation : vapors)
Acute toxicity (Inhalation : dusts and mists)
Skin corrosion/irritation
Serious eye damage/eye irritation
Respiratory sensitization
Germ cell mutagenicity
Carcinogenicity
Reproductive toxicity
Specific target organ toxicity (single exposure)Specific target organ toxicity (repeatedexposure)
Aspiration hazard
Sources/references

Results (GHS(Note 1) hazard classification)
Classification not possible (Note 2)Classification not possible
Classification not possible
Not applicable (Note 3)
Not applicable
Classification not possible
Classification not possible
Classification not possible
Classification not possible
Classification not possible
Classification not possible
Classification not possible
Classification not possible

Not applicable
Sections 2, 11 of the SDS issued by SHOWADENKO K. K.
(Note 1) GHS (Globally Harmonized System of Classification and Labeling of Chemicals): It
is a system for classifying chemicals according to type and hazard level, and for indicatinglabel information pursuant to the globally unified rules for offering Safety Data Sheets.
(Note 2) Classification not possible: when unable to classify due to a lack of sufficiently
reliable data for defining the classification.
(Note 3) Not applicable: when chemicals do not fall within the scope of classification because
the physical properties defined in the GHS do not apply.

7. ENVIRONMENTAL EFFECTS
Effect assessment

Results (GHS hazard classification)

Hazardous to the aquatic environment
Acute hazard
Long-term hazard
Hazardous to the ozone layer
Sources/references

Environmental
fate/dynamics
Mobility in soil
Persistence/degradabiClassification not possible
Classification not possible
Montreal Protocol on Substances that
Deplete the Ozone Layer (revised version):
not included in the list
Sections 2 of the SDS issued by SHOWADENKO K.K.

Results
No reliable data available.
No reliable data available.
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GPS Safety Summary Reference No.: JIPS_MSP_GS‐1104lity
Bioaccumulation
potentialConclusion about
PBT/vPvB

Other
Sources/references

No reliable data available.
The criteria for persistent bioaccumulative and toxic (PBT;remaining persistently in the environment and possessing highbioaccumulation potential and toxicity) and very persistent andvery bioaccumulative (vPvB; remaining very persistently in theenvironment and possessing very high bioaccumulation potential)
chemicals are believed to inapplicable.
Emissions of gas affecting global warming. Global warningpotential (GWP 100years): 9,200(Legal value)
Section 12 of the SDS issued by SHOWA DENKO K.K.

8. EXPOSURE

Occupational
exposuresConsumer
exposures
Environmental
exposures

Precautions

Exposure potentials through main uses
Since the company’s product is produced in a closed process, thepotential for occupational exposure is extremely limited. However,workers could inhale the substance, or their skin and eyes could come indirect contact with it when sampling, etc.
The substance is not used in any case by general consumers.
Since the substance is normally manufactured and used in a closed
process, its emission into the environment is extremely limited.
The substance exists in the form of gas under normal temperatures andpressures, and is believed to be dispersed in the air when discharged into
the environment. Further, the substance could be promptly decomposedin the air.
If there is the potential for exposure during use in other applications,please implement appropriate measures by referring to the risk
management recommendations.

9. RISK MANAGEMENT RECOMMENDATIONS

Occupationalexposures

Risk management recommendations
Technical measures
・Install a wash stand, eye washer and safety shower at places thatmanufacture, store or handle the product. Additionally, when handlingthe substance, implement the following technical measures.
Local exhaust and total ventilation
・Install local exhaust or total ventilation systems at places where theproduct is manufactured, stored or handled. Additionally, maintainappropriate air concentration levels.
Protective equipment
While working, wear appropriate protective eyewears, air-supplied
respirators, clothes and protective gloves made of materials
impermeable to hexafluoroethane.
Precautions
・Managers responsible for processes should educate workers on theselection of appropriate protective gear, their proper usage and how tomanage their working places.
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GPS Safety Summary Reference No.: JIPS_MSP_GS‐1104

Consumer
exposures

Normally, general consumers would not use the substance. However if it
is used, implement risk-management measures similar to thoseindicated in “Occupational Exposures” above.

Environmentalexposures

In order to prevent environmental exposures, implement preventive
measures against leakage into the atmosphere, for instance, treatmentof the used gases containing hexafluoroethane with an exhaust gas
treatment facility, and also pay attention to the daily management andhandling of the substance.

Specialinstructions(emergency
measures at timesof leakage, etc.)
Sources/references

In the event of leakage, make certain to wear protective gear and deal
with it appropriately. Abide by the relevant acts and regulations when
disposing the collected substance.
Sections 6, 7, 8, and 13 of the SDS issued by SHOWA DENKO K.K.

10. STATE AGENCY REVIEWHazard assessment
International ChemicalSafety Cards

Situations of review
No data

11. REGULATORY INFORMATION/ GHS CLASSIFICATION-LABELING INFORMATIONRegulatory information only in Japan
Applicable laws
Regulatory situations
Foreign Exchange and・Item (2), Appended Table 1-16 of Export Trade Control Order
Foreign Trade Act
Act on Port Regulations
Hazardous substances・Compressed gas , Article 21-2 of theAct, Article 12 of Enforcement Regulations
Civil Aeronautics Act
Pressurized gases, Appended Table 1 specifying thehazardous substances, Article 194 of the Enforcement
Regulations
High Pressure Gas Safety ・Compressed gas, Article 2-1 of the ActAct・Non-flammable gas, Article 2-4 of Regulations for Safety
Precautions for High-Pressure Gas
Ship Safety Act
Compressed gas, Appended Table 1 specifying the hazardoussubstances, Article 3 of Regulations for the Carriage andStorage of Dangerous Goods in Ship
Road Act・Restrictions on vehicle traffic, Article 19-13 of theEnforcement Ordinance, Appended Table 2 of Notification
No.12 of Japan Expressway Holding and Debt Repayment
AgencyAct on Promotion of Global Greenhouse Gases, paragraph 3-5, Article 2 of the Act, Article
Warming Countermeasures 2-2 of the Enforcement OrdinanceUN classification
Class 2.2
UN No.
UN2193

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GPS Safety Summary Reference No.: JIPS_MSP_GS‐1104

GHS classification, label information
Hazards
Physical chemical hazards
Gases under Pressure
GHS label elements
Pictogram or symbol

Signal word
Hazard statement

Classification results (hazard information)
High pressure liquefied gas

Warning
Contains gas under pressure; may explode if
heated.

12. CONTACT INFORMATION
Company name
Address
Department
Telephone, fax

SHOWA DENKO K.K.
Muza Kawasaki Central Tower 23rd floor, 1310 Omiya-cho,
Saiwai-ku, Kawasaki, Kanagawa, Japan
Fine Products Group, Electronic Chemicals Division+81-44-520-1362/+81-44-520-1366

13. DATE OF ISSUE AND REVISION, ADDITIONAL INFORMATION
Date of issue: December 17, 2013
Revisions:
Date of revision
Revisedsection

Revised item

VersionSpecial instructions: none

14. DISCLAIMER
This Safety Summary which is a translation of original Safety Summary prepared inJapanese, has been prepared as a part of the efforts by GPS/JIPS: Japan Initiative of ProductStewardship by the chemical industry. This Safety Summary is meant to provide an outline ofinformation related to the safe handling of the subject substance rather than provide expert
information regarding the risk assessment processes, the effect on human health or theenvironment, etc. Moreover it is not a replacement for the Safety Data Sheet (SDS), theChemical Safety Report (CSR), or other risk assessment documents. To the greatest extent
possible, the Safety Summary contains accurate statements based on laws, materials,
information and other data available at the time of issue. However, it does not cover all suchdata. Additionally, it does not intend to provide a guarantee in any way.

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