APCOT 2016
ORAL PROGRAM
Monday, 27 June 2016
9:15-10:00
Invited Plenary Talk 1
Yogesh Gianchandani, Michigan University, USA

Monday, 27 June 2016
10:00-10:45
Invited Plenary Talk 2
Kenzo Nonami, Chiba University, Japan

Monday, 27 June 2016
11:00 -12:15
Session 1a CMOS Integration and Packaging
Keynote Talk 1
Chinghan Huang
ASE, Taiwan
AUTOMATED RESONANCE MATCHING FOR CMOS MEMS RESONANT SENSORS
Yi-Kai Liao, Che-Hao Chiang, Michael Lu
National Tsing Hua University, Taiwan[1039]ELECTRICAL RELIABILITY OF SURFACE MICROMACHINED POLYSILICON RESONATORS IN HIGHSHOCK ENVIRONMENTS
Yingying Wang, Lei Wang, Jieying Tang, Jing SongSoutheast University, China[1024]
INFLUENCE OF SOLDER THICKNESS ON FRACTURE BEHAVIOR OF AL/NI REACTIVELY-BONDEDSOLDER JOINTS FOR RELIABILITY OF MEMS
Koichi Kuwahara, Shunsuke Kanetsuki, Shugo Miyake, Shozo Inoue, Takahiro Namazu
University of Hyogo, Japan, Kobelco Research Institute Inc., Japan, Kobe City College of Technology, Japan[1106]A LOW-NOISE LOW-POWER NEURAL RECORDING AMPLIFIER ON FLEXIBLE THIN FILM FOR
FULLY IMPLANTABLE NEURAL INTERFACE DEVICES
Prabhath J. Horagodage, Kenji Okabe, Hajime Fukumaru, Takeshi Kawano, Makoto Ishida, Ippei Akita
Toyohashi University of Technology, Japan[1204]

Monday, 27 June 2016
11:00 -12:15
Session 1b Movable Devices
AN OPTICAL SYSTEM FOR BI-DIRECTIONAL FREE SPACE OPTICAL COMMUNICATION WITHACQUISITION AND TRACKING CAPABILITIESSungho Jeon, Hiroshi Toshiyoshi
University of Tokyo, Japan[1091]DESIGN AND MODELLING OF A NOVEL MICRO-LENS PIEZOELECTRIC ACTUATOR FOR FAST AND
LARGE STROKE GENERATION
Truong Xuan Nguyen, Michael Aron, Kwok Chee Yee, Wang Peng
The University of New South Wales, Australia[1169]AN SOI THERMAL-PIEZORESISTIVE MEMS RESONATOR ARRAY WITH A FULLY DIFFERENTIAL
MODE OF OPERATION
Chia-Chun Chu, Cheng-Chi Chen Sheng-Shian Li
National Tsing Hua University[1303]
BIAS VOLTAGES DETERMINATION FOR INVESTIGATION OF THE INFLUENCE OF SHORT BEAMLENGTH VARIATION IN FISHBONE-SHAPED MEMS RESONATOR ON RESONANCE FREQUENCYRyo Takahashi, Hidetoshi Miyashita, Masahiro Kondo, Tomoaki Kageyama, Sang-Seok Lee
Tottori University, Japan[1133]DEVELOPMENT OF OHMIC CONTACT TYPE RF MEMS SWITCH AND INVESTIGATION OF DC BIASRESISTANCE INFLUENCE ON ITS RF CHARACTERISTICS
Tomoaki Kageyama, Maya Kato, Hidetoshi Miyashita, Sang-Seok Lee
Tottori University, Japan, Japan Aerospace Exploration Agency (JAXA), Japan[1129]DESIGN OF MICROWAVE POWER SENSOR WITH ENHANCED POWING HANDLING CAPACITYBASED ON MIM CAPACITOR
Zhenxiang YiSoutheast University, China[1008]

Monday, 27 June 2016
11:00 -12:15
Session 1c Microfluidics 1
Keynote Talk 2
Hongkai Wu
Hong Kong University of Science and Technology
OPTOFLUIDIC TUNABLE LENS USING LASER-INDUCED THERMAL GRADIENT
Qingming CHEN, Xuming Zhang
The Hong Kong Polytechnic University, Hong Kong[1083]INVESTIGATION OF INTEGRATED MICROFLUIDICS WITH METAMATERIALS WORKING IN THZREGION
Kailing Shih, Prakash Pitchappa, Manukumara Manjappa, Ranjan Singh, Chengkuo Lee
National University of Singapore, Singapore, Nanyang Technological University, Singapore[1030]A MICROFLUIDIC DEVICE FOR COLLECTION OF ULTRA-FINE DROPLETSPHASE MICROEXTRACTION
Zhenhan Li, Shanhong Xia, Jinfen Wang
Institute of Electronics, Chinese Academy of Sciences, China[1090]IN DISPERSIVE LIQUID

AN EXPLORATORY ATTEMPT FOR ELECTROWETTING ON THIN-FILM-TRANSISTOR ARRAY
Faruk Azam Shaik, Grant Alexander Cathcart, Satoshi Ihida, Jiro KAWADA, Yoshiho Ikeuchi, Agnes
Tixier-Mita, Hiroshi Toshiyoshi
RCAST, The University of Tokyo, Japan, IIS, The University of Tokyo, Japan[1112]

Monday, 27 June 2016
11:00 -12:15
Session 1d Optical Sensors
DEVELOPMENT OF AN OPTICAL QUANTITATIVE DETECTION SYSTEM FOR IN-VITRO TEST STRIPS
Chia-Hsien Yeh, Guan-Chen Lin, Pi-Lan Shen, I-Yu Huang, Yu-Cheng Lin
National Cheng Kung University, Taiwan, Firstep Bioresearch, Inc, Taiwan, National Sun Yat-sen University,
Taiwan, National Cheng Kung University, Taiwan[1017]A MICRO ABSORPTION SPECTROSCOPY SYSTEM USING OPTICAL FIBERS
Motohide Yoshimi, Shinya Kumagai, Yasutake Ohishi, Minoru Sasaki
Toyota Technological Institute, Japan[1029]WIDE DYNAMIC RANGE FILTER-FREE FLUORESCENCE DETECTION SENSOR WITH TRIPLE-WELL
STRUCTURE
Yu Moriwaki, Kiyotugu Tanaka, Kazuhiro Takahashi, Tatsuya Iwata, Ippei Akita, Fumihiro Dasai, Yasuyuki
Kimura, Makoto Ishida,Kazuaki Sawada
Toyohashi University of Technology, Japan[1084]
IN-SITU SYNTHESIS OF CDS NANOWIRE PHOTOSENSOR FOR CHEMILUMINESCENTIMMUNOASSAYS
Jae-Chul Pyun, Byoung-Gi An, Hong-Rae Kim, Young Wook Chang, Jae-Gwan Park
Yonsei Univ, Republic of Korea, Korea Institute of Science and Technology (KIST), Republic of Korea[1111]PERFORMANCE ANALYSIS OF FILTER-FREE FLUORESCENCE SENSOR USING FITC DYEYong Joon Choi, Kazuhiro Takahashi, Motoharu Matsuda, Takeshi Hizawa, Yu Moriwaki, Fumihiro Dasai,
Yasuyuki Kimura, Tatsuya Iwata,Makoto Ishida, Kazuaki Sawada
Toyohashi University of Technology, Japan[1175]

Monday, 27 June 2016
15:00-16:30
Session 2a Force Sensors
TEXTURE CHARACTERIZATION INCLUDING WARM/COOL SENSATION BY FORCE, LIGHT, AND
TEMPERATURE SENSITIVE MEMS SENSOR
Fumiya Sato, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa
Niigata University, Japan, Osaka University, Japan, Ritsumeikan University, Japan[1154]MEASUREMENT OF SURFACE TEXTURE ON CLOTH SAMPLES USING A HIGHLY SENSITIVETWO-AXIS TACTILE SENSOR
Kazuki Watatani, Ryogo Kozai, Kyohei Terao, Fusao Shimokawa, Hidekuni Takao
Kagawa University, Japan[1187]DEVELOPMENT OF 8x8 TACTILE SENSING ARRAYS FOR HUMAN-WALK-ASSISTING ROBOT
Cheng-Wen Ma, Fu-Wei Lee, Yu-Yang Chang, Yu-Hsuan Lin, Yao-Joe Yang
National Taiwan University, Taiwan[1203]
3D PRINTING OF FORCE SENSOR USING FUNCTIONALIZED NANOCOMPOSITE FILAMENTS
Kyuyoung Kim, Inkyu Park
KAIST, Republic of Korea[1173]FABRICATION OF FORCE SENSOR FOR STUDYING SEED GERMINATION OF PLANTS
Hirotaka Hida, Shinpei Fujimoto, Tetsuya Higashiyama, Michitaka Notaguchi, Isaku Kanno
Kobe University, Japan, Nagoya University, Japan[1191]A FLEXIBLE PIEZORESISTIVE PRESSURE SENSOR BASED ON CARBON NANOTUBE-COATEDPOROUS ELASTOMER AND DEVELOPMENT OF FLEXIBLE PIANO PAD
Seunghwan Kim, Tae-Ik Lee, Yongrok Jeong, Donguk Kwon, Min Seong Kim, Taek-Soo Kim, Inkyu Park
Korea Advanced Institute of Science and Technology(KAIST), Republic of Korea[1177]

Monday, 27 June 2016
15:00-16:30
Session 2b Material Characterization
LIFT-OFF PROCESS FOR FINE-PATTERNED PZT FILM USING METAL OXIDE AS A SACRIFICIALLAYER
Trong Tue Phan, Tatsuya Shimoda, Yuzuru Takamura
Japan Advanced Institute of Science and Technology, Japan, Japan Science and Technology, CREST,
Japan[1123]
CHARACTERIZATION OF CRUMPLED VERTICALLY ALIGNED GRAPHENE FORPERFORMANCE MICRO SUPERCAPACITOR
Hafzaliza Erny Zainal Abidin, Azrul Azlan Hamzah, Mohd Ambri Mohamed, Burhanuddin Yeop Majlis
Universiti Kebangsaan Malaysia, Malaysia[1119]HIGH

MECHANICAL PROPERTIES OF SILICON NANOWIRES FABRICATED BY USING FOCUSED ION
BEAM AND SACRIFICIAL OXIDATION TECHNIQUES
Ginnosuke Ina, Tatsuya Fujii, Takahiro Kozeki, Shozo Inoue, Takahiro Namazu
University of Hyogo, Japan[1131]
CHARACTERIZATION OF ELECTRODEPOSITED NANOCRYSTALLINE NICKEL WITH A LOW BORONCONTENT FOR MEMS APPLICATION
Hong Bum Gwon, Hye Rin Ahn, Kyung Tae Kim
Yonsei University, Republic of Korea[1070]
INFLUENCE OF FOCUSED ION BEAM IRRADIATION ON MECHANICAL RELIABILITY OF 3C-SIC FILM
Kosuke Tanaka, Dao V. Dzung, Shozo Inoue, Takahiro Namazu
University of Hyogo, Japan, Griffith University, Australia[1132]

Monday, 27 June 2016
15:00-16:30
Session 2c Microfluidics 2
Keynote Talk 3
Zhen Zhu
Southeast University, China
USING THE DROPLET-FUSION MICROFLUIDIC CHIP FOR PRODUCING ALGINATE MICROCAPSULE
WITH DIFFERENT BSA CONCENTRATIONS
Chia-Hsien Yeh, Shen-Yang Lin, I-Yu Huang, Yu-Cheng Lin
National Cheng Kung University, Taiwan, National Sun Yat-sen University, Taiwan[1018]

MICRO ELECTROSTATIC PRICIPITATION SAMPLER FOR PERSONAL BIOAEROSOL SAMPLING
Dong-Hyun Kang, Ji-Ye Um, Hong-Lae Kim, Sang-Myun Lee, Yong-Jun Kim
Yonsei University, Republic of Korea[1053]DEVELOPMENT OF A SMALL ELECTROCHEMICAL TITRATOR WITH PYRAMIDAL MICROFLUIDICNETWORK
Hiroki Kakimoto, Shunichi Higuchi, Yoshiki Takesako, Ryo Miyake, Yuji Murakami
Toyohashi University of Technology, Japan, The University of Tokyo, Japan[1058]COMPARISON OF BACTERIAL STRESS RESPONSES BETWEEN LEGIONELLA PNEUMOPHILA AND
LEGIONELLA DUMOFFII TRAPPED IN A MEMS MICROFLUIDIC CHIP
Yusuke Nishimura, Onishi Shuhei, Makoto Ishida, Kazuaki Sawada, Hiromu Ishii, Katsuyuki Machida,
Kazuya Masu, Changle Wang,Mitsumasa Saito, Shinichi Yoshida
Toyohashi University of Technology, Japan, Tokyo Institute of Technology, Japan, Kyusyu University, Japan[1155]

Monday, 27 June 2016
15:00-16:30
Session 2d Gas Sensors
FABRICATION OF A NOVEL FLEXIBLE ACETYLENE GAS SENSOR BASED ON AG-ZNO NANORODSON PI/PTFE SUBSTRATE
A. S. M. Iftekhar Uddin, Gwiy-Sang Chung
University of Ulsan, Republic of Korea[1006]MOS GAS SENSORS BASED ON MICRO/NANOSTRUCTURED ORDERED ARRAY
Guotao Duan, Zongke Xu, Xingsong Su, Weiping Cai
Hefei Institutes of Physical Science, Chinese Academy of Sciences, China[1027]TEMPERATURE AND CONCENTRATION DEPENDENT PROPERTIES OF A NON- DISPERSIVEINFRARED (NDIR) CARBON DIOXIDE GAS SENSOR
Maniruzzaman Nuran, SeungHwan Yi
Korea National University of Transportation, Republic of Korea[1054]
THERMAL STABILITY IMPROVEMENT OF PT ULTRATHIN-FILM HYDROGEN SENSOR USING TIN
Shota Inami, Ryo Furukawa, Kenji Sakai, Toshihiko Kiwa, Keiji Tsukada
Okayama University, Japan[1075]PROPOSAL OF STRESS-TOLERANT MICRO-HOTPLATES WITH SU-8 SUSPENSION FOR SMARTGAS SENSING SYSTEM
Tatsuya Iwata, Carine W. Soo Ping, Kyosuke Matsuda, Kazuhiro Takahashi, Makoto Ishida, Kazuaki Sawada
Toyohashi University of Techinology, Japan[1079]TANTALUM OXIDES FORMED ON SIC SUBSTRATE BY RAPID THERMAL OXIDATION FOR
HYDROGEN GAS SENSORSSEONGJEEN KIM, SANGCHEOL KIM
Kyungnam University, Republic of Korea, KERI, Republic of Korea[1146]

Monday, 27 June 2016
16:45-18:15
Session 3a 3D Microstructures
SIZE CONTROL AND COMPLEX COMPARTMENTALIZATION OF HYDROGEL MICROSPRINGS
Koki Yoshida, Hiroaki Onoe
Keio University, Japan[1028]DEVELOPMENT OF A MULTISCALE TWO-PHOTON MICROSTEREOLITHOGRAPHY SYSTEM USINGSPATIAL LIGHT MODULATORS
Yuka Matsumoto, Kosuke Yokoyama, Shoji Maruo
Yokohama National University, Japan[1195]MICROSTRUCTURES OF BIOCOMPATIBLE POLYMER FABRICATED BY NANO 3D LITHOGRAPHY
Wan Ping Yang, Che Wei Yeh, Tzu Han Chuang, Sam Ao Leong, Jane Wang, Chien Chun Fu
National Tsing Hua University, Taiwan[1158]
ONE-STEP PDMS MICROMOLDING PROCESS FOR TAPERED THREE-DIMENSIONAL STRUCTURES
Hiroaki Suzuki, Kenta Mitsuno, Katsuyuki Shiroguchi, Taiji Okano, Tetsuji Dohi, Tomoaki Tsuji
Chuo University, Japan, Riken Center for Integrative Medical Sciences, Japan[1188]
VAPOR-LIQUID-SOLIDGROWTHOF
SILICON-WIRES
ON(111)-TEXTUREDFILM/DIOXIDE/SILICON
Makoto Yamahira, Hideo Oi, Satoshi Yagi, Yasuyuki Uraoka, Makoto Ishida, Takeshi Kawano
Toyohashi University of Technology, Japan[1193]PLATINUM

Monday, 27 June 2016
16:45-18:15
Session 3b Optical Devices
Keynote Talk 4
Chengkuo Lee
National University of Singapore
A VARIABLE-FOCUS CAMERA INTEGRATED WITH ALVAREZ LENS DRIVEN BY MEMS-THERMALACTUATOR
Wei Zhang, Yongchao Zou, Tong Lin, Fook Siong Chau, Guangya Zhou
National University of Singapore, Singapore[1108]FABRICATION OF MEMS DEFORMABLE MIRROR ACTUATED BY ELECTROSTATIC PISTON ARRAY
Akiko Uno, Vijay K. Singh, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
University of Kyoto, Japan[1113]
MID-INFRARED BANDWIDTH REDUCTION BASED ON WEAK COUPLING FANOLIKE RESONANCE
Aisheng Yu, Wei Li, Lianfeng Guo, Yuelin Wang, Tie Li
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China[1007]WIDELY TUNABLE PLASMONIC BANDPASS FILTER INTEGRATED WITH AL SUBWAVELENGTHGRATING AND COMB-DRIVE ACTUATORS
Hiroaki Honma, Kazuhiro Takahashi, Makoto Ishida, Kazuaki Sawada
Toyohashi University of Technology, Japan[1142]

Monday, 27 June 2016
16:45-18:15
Session 3c Cells
Keynote Talk 5
Shoji Takeuchi
The University of Tokyo, JapanFLEXIBLE GEOMETRIC DESIGN FOR OPENABLE BIOMIMETIC TUBE PROVIDING VARIABLE FLOW
CONDITIONS FOR CELL-BASED ASSAY
Satoshi Sugama, Koji Hattori, Satoshi Konishi
Ritsumeikan University, Japan[1022]AN ARRAY OF MICRO CHAMBERS TRAPPING A SINGLE CELL FOR ANALYSIS OF MOVING CELLS
Ryota Kanamaru, Tatsuyuki Takada, Satoshi Konishi
Ritsumeikan University Japan, Japan[1089]SEPARATION OF MAGNETIC PARTICLES USING AN ARRAY OF MAGNETS AS A MODEL OF
MALARIA-INFECTED BLOOD CELLS SEPARATION DEVICE
Surasak Kasetsirikul, Werayut Srituravanich, Prapruddee Piyaviriyakul, Alongkorn Pimpin
Chulalongkorn University, Thailand[1121]
DIELECTROPHORETIC ON-CHIP FOR SIMULTANEOUS DETECTION OF LIVE CELL RESPONSES TO
SMALL MOLECULE DRUGSIn Soo Park, Kwan Hwi Ko, Min Hyung Kim, Sang woo Lee
University of Yonsei, Republic of Korea[1164]

Monday, 27 June 2016
16:45-18:15
Session 3d Image Sensors
FLUORESCENCE-BASED IMPLANTABLE GLUCOSE SENSOR USING CMOS IMAGE SENSORTECHNOLOGY
Takashi Tokuda, Hiroaki Takehara, Toshihiko Noda, Kiyotaka Sasagawa, Teru Okitsu, Shoji Takeuchi, Jun
Ohta
Nara Institute of Science and Technology, Japan, The University of Tokyo, Japan[1020]
LIVE-IMAGING OF CELL GLYCOLYSIS USING PROTON IMAGE SENSOR
Toshishige Fujii, Akiteru Kono, Tomoko Horio, Takanori Tano, Kazuaki Sawada
RICOH COMPANY, LTD., Japan, Toyohashi University of Technology, Japan[1047]FEATURE EXTRACTION METHOD IN MULTIPLE-ORS-BASED ODOR BIOSENSING SYSTEM
Nitikarn Nimsuk, Totok Mujiono, Yuji Sukekawa, Takamichi Nakamoto, Hidefumi Mitsuno, Maneerat
Termtanasombat, Ryohei Kanzaki, Nobuo Misawa
Tokyo Institute of Technology, Japan, The University of Tokyo, Japan, Toyohashi University of Technology,
Japan[1062]INTRACELLULAR IMAGING OF MOLECULAR DYNAMICS IN
TIP-ENHANCED RAMAN SPECTROSCOPY
Takayuki Shibata, Goh Miyazaki, Terutake Hayashi, Moeto Nagai
Toyohashi University of Technology, Japan, Kyushu University, Japan[1118]LIVING

CELLS

BASED

ON

REALIZED PH IMAGING WITH 1.15 µM PITCH BY NEW STRUCTURE 2TR.TYPE SENSOR
Shin Watanabe, Kazuki Shimizu, Kenji Araki, Fumihiro Dasai, Makoto Ishida, Kazuaki Sawada
Toyohashi University of Technology, Japan[1159]DEVELOPMENT OF A BIO-IMAGE SENSOR FOR MULTIPLEX DETECTION BASED ON ENZYMEIMMOBILIZATION TECHNIQUE
You-Na Lee, Koichi Okumura, Tatsuya Iwata, Kazuhiro Takahashi, Toshiaki Hattori, Makoto Ishida, Kazuaki
SawadaToyohashi University of Technology, Japan, Electronics-Inspired Interdisciplinary Research Institute, Japan[1198]

Tuesday, 28 June 2016
9:00-9:45
Invited Plenary Talk 3
Christofer Hierold, ETH Zurich, Switzerland

Tuesday, 28 June 2016
9:45-10:30
Invited Plenary Talk 4
Tai Hyun Park, Seoul National University, Korea

Tuesday, 28 June 2016
10:45-11:45
Session 4a Liquid Phase Materials
Keynote Talk 6
Shinpei Ono
CRIEPI, JapanNOVEL APPROACH FOR OXIDATION-PROOF LIQUID METAL GALINSTAN USING THE PARYLENE
SEALED NEUTRAL SOLVENT PARAFFIN OIL
Ming-Yi Lin, Fu-Ming Hsu, Jhih-Jhe Wang, Weileun Fang
National Tsing Hua University of Hsinchu, Taiwan[1086]MICRO DIAPHRAGM VALVE DRIVEN BY A THERMALLY RESPONSIVE SOLUTION FOR COMPACT
PRESSURE CONTROL SYSTEM
Yuki Tsujimura, Satoshi Konishi
Ritsumeikan University, Japan[1096]

Tuesday, 28 June 2016
10:45-11:45
Session 4b EvaluationNONLINEAR DEFORMATION ANALYSIS FOR AWL-SHAPED SERPENTINE MICROSPRING
Hui-Min Chou, Meng-Ju Lin, Rongshun Chen
National Tsing Hua University, Taiwan, Feng Chia University, Taiwan[1040]PIEZORESISTIVE ROSETTE GAUGE TAKING INTO ACCOUNT OF SILICON CUBIC CRYSTALANISOTROPY
Taeko Ando, Toshiyuki Toriyama
Ritsumeikan University, Japan[1117]

IN-SITU TESTING OF YOUNG'S MODULUS AND RESIDUAL STRESS OF POLYSILICON THIN FILM
USING PULL-IN OF BUCKLED BEAMS
Yi-Fan Gu, Zai-Fa Zhou, Wei-Hua Li, Qing-An Huang
Southeast University, China[1176]STRESS CONTROL IN POROUS SILICON MEMS
Adrian Keating, Xiao Sun, Gia Parish
The University of Western Australia, Australia[1004]

Tuesday, 28 June 2016
10:45-12:00
Session 4c FET Sensors
DEVELOPMENT OF GLUTAMATE SENSOR FOR NEUROTRANSMITTER IMAGING
Shinya Mizutani, Yuki Okumura, Tomoko Horio, Tatsuya Iwata, Koichi Okumura, Kazuhiro Takahashi, Yuji
Murakami, Fumihiro Dasai,Makoto Ishida, Kazuaki Sawada
Toyohashi University of Technology, Japan[1011]FABRICATION OF PEPTIDE-MODIFIED SINGLE-WALLED CARBON NANOTUBE FIELD EFFECT
TRANSISTOR APPLYING FOR APTASENSOR
Tung T. Nguyen, Tue T. Phan, Lien T. N. Truong, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto,
Manish Biyani, Yuzuru Takamura
Japan Advanced Institute of Science and Technology, Japan, Hanoi University of Science and Technology,
Viet Nam, Tokushima University, Japan,Tokyo University of Agriculture and Technology, Japan, Osaka
University, Japan[1101]
NON-DESTRUCTIVE ANALYSIS OF CELL MEMBRANE INJURY USING PROTON-SENSITIVEFIELD-EFFECT TRANSISTOR
Yuki Imaizumi, Tatsuro Goda, Akira Matsumoto, Yuji Miyahara
Tokyo Medical and Dental University, Japan[1182]SENSITIVITY IMPROVING OF NANOBELT FET SENSOR AND ITS APPLICATION IN LIVERCANCER DETECTION
Yankuba B. Manga, Chi-Chang Wu
Taipei Medical University[1302]FABRICATION AND CHARACTERIZATION OF STRAIN-INDUCED ELECTRODES FOR BIO-MEDICALAPPLICATIONSAnindya Nag, Jürgen Kosel, Subhas Mukhopadhyay, Richard Haverkamp
Massey University, New Zealand, King Abdullah University of Science and Technology, Saudi Arabia[1014]

Tuesday, 28 June 2016
10:45-11:30
Session 4d Acoutstic and Mechanical Sensors
APPLICATION OF HIGH RESONANCE FREQUENCY ACOUSTIC DEVICE IN PROTEIN DETECTIONS
Shuting Pan, Wenpeng Liu, Yanyan Wang, Xuexin Duan
Tianjin University, China[1085]IMPROVING INSERTION LOSS OF FLEXURAL PLATE-WAVE BASED CARCINOEMBRYONICANTIGEN BIOSENSOR USING FOCUS-TYPE INTER-DIGITAL TRANSDUCERS AND REFLECTIVEGRATING STRUCTURES
Je-Wei Lan, Wen-Hui Huang, Chia-Hsu Hsieh, I-Yu Huang, Yu-Cheng Lin
National Sun Yat-sen University, Taiwan, National Cheng Kung University, Taiwan[1102]DNAMECHANICAL
CHARACTERIZATIONINSIDEBIOLOGICALBUFFER
BY
THE
DOUBLE-ACTUATOR SILICON NANO TWEEZERS
Gregoire Perret, Mehmet Tarhan, Nicolas Lafitte, Laurent Jalabert, Momoko Kumemura, Thomas
Lacornerie, Eric Lartigau, Fabrizio Cleri,Hiroyuki Fujita, Dominique Collard
LIMMS/CNRS-IIS, UMI2820, Japan, Centre Oscar Lambret, University of Lille 2, France, IEMN, UMR8520,
CNRS, University of Lille 1, France,Institute of Industrial Science, The University of Tokyo, Japan[1178]

Tuesday, 28 June 2016
14:45-16:15
Session 5a Lithography and Etching
RELEASE AGENT FREE ULTRAVIOLET NANOIMPRINT LITHOGRAPHY BY CYCLIC OLEFINPOLYMER AND POLYDIMETHYLSILOXANE MADE MOLD
Yuki Hashimoto, Katsuo Mogi, Takatoki Yamamoto
Tokyo Institute of Technology, Japan[1021]FABRICATIONOFTOTALSOLUTION-PROCESSEDIRRADIATION-REDISSOLVING PATTERNING
Yuuki Yoshimoto, Jingwang Li, Tatsuya Shimoda
Japan Advanced Institute of Science and Technology, Japan[1174]

ALL-OXIDE

TFT

BY

UV

SUPPRESS THE GENERATION OF MICRO PYRAMID ON SI (100) SURFACEETCHED IN 1WT% KOH
SOLUTION USING AIR BUBBLING
Yuki Saito, Hiroshi Tanaka
National institute of technology, Tsuruoka college, Japan[1163]FABRICATION OF CONDUCTIVE DIAMOND MEMBRANE FOR FUNCTIONAL TEM GRIDS USINGTWO-STEP DRY ETCHING
Bingyang Xu, Hiroyuki Kuwae, Tomohiro Edura, Hidehito Adaniya, Masao Yamashita, Tsumoru Shintake,Shuichi Shoji, Jun Mizuno
Waseda University, Japan, SHUTECH Co., Ltd, Japan, Okinawa Institute of Science and Technology
Graduate University, Japan[1194]
THERMAL REACTIVE ION ETCHING OF TI, TA, MO AND NB WITH SF6 PLASMA
Gang Han, Yuki Murata, Yuto Minami, Masayuki Sohgawa, Takashi Abe
Niigata University, Japan[1044]SPUTTER-DEPOSITED TIO2 THIN FILMS WITH IMMOBILIZED LACTATE DEHYDROGENASE FORPOTENTIONETRIC LACTATE SENSING
Taizo Kobayashi, Satoshi Konishi
Ritsumeikan University, Japan[1026]

Tuesday, 28 June 2016
14:45-16:15
Session 5b Functional Materials
FLEXIBLE HEATING ELEMENT BASED ON GRAPHENE FOAM/POLY-DIMETHYLSILOXANECOMPOSITE
Kata Jaruwongrungsee, Thitima M. Daniels, Ditsayut Phokharatkul, Adisorn Tuantranont, Anurat Wisitsoraat
National Electronics and Computer Technology Center (NECTEC), Thailand[1033]
EDGE-CLAMPED GRAPHENE DIAPHRAGM WITH NANO CAVITYTECHNIQUE
Hayato Ishida, Kazuaki Sawada, Makoto Ishida, Kazuhiro Takahashi
Toyohashi University of Technology, Japan[1185]USING

DRY

TRANSFERSOLVOTHERMAL ASSISTED REDUCED GRAPHENE OXIDE MODIFIED BISMUTH ELECTRODE FOR
ELECTROCHEMICAL HEAVY METAL IONS SENSOR APPLICATIONS
Xing Xuan, MD. Faruk Hossain, Jae Y. Park
Kwangwoon University, Republic of Korea[1148]
FREESTANDING COMPRESSIVE STRESS SIO2 OPTICAL WINDOW
Nguyen Van Toan, Suguru Sangu, Takahito Ono
Tohoku University, Japan, Core Technology Research & Development Center Ricoh Institute of Future
Technology, Japan[1036]
SUPERHYDROPHOBIC, SELF-CLEANING AND ANTI-BACTERIAL MULTIFUNCTIONAL SURFACESMEDIATED BY BIOMIMETIC THREE-DIMENSION SHARK-SKIN STRUCTURESMin Sheng Suen, Rongshun Chen
National Tsing Hua University[1301]

Tuesday, 28 June 2016
14:45-16:15
Session 5c Thermal and Liquid Phase Sensors
MICRODEVICE FOR COULOMETRIC DETERMINATIONMETALLIZATION
Isa Anshori, Masatoshi Yokokawa, Hiroaki Suzuki
University of Tsukuba, Japan[1023]OFPROTEINS

COUPLEDWITH

MICRO SEPARATION COLUMNS WITH NOVEL ELECTROLESS PLATED GOLD HEATER FOR GASCHROMATOGRAPHY SYSTEM
Po-Shin Chen, Chun-Yen Kuo, Kuan-Ju Chiu, Yi-Hsuan Chen, Wei-I Chiu, Chia-Jung Lu, Wei-Cheng Tian
National Taiwan University, Taiwan[1073]MICRO THERMOCOUPLE CALORIMETRIC BIOSENSOR FOR MULTIFUNCTIONAL CATALYZEDREACTION
Zhuqing Wang, Mitsutera Kimura, Takahito Ono
Tohoku Gakuin University, Japan, Tohoku University, Japan[1122]LEAD DETECTION USING POLYMER-BASED ELECTROCHEMICAL SENSOR MODIFIED WITH
BISMUTH NANOPARTICLES
Nan Wang
Nanyang Technological University, Singapore[1151]

STUDY OF SWEETNESS SENSOR FOR HIGH-POTENCY SWEETENERS AND PREDICTION OF
BITTERNESS SUPPRESSION EFFECT OF HIGH-POTENCY SWEETENERS USING TASTE SENSOR
Hideya Onitake, Xiao Wu, Yusuke Tahara, Rui Yatabe, Kiyoshi Toko
Kyushu University, Japan[1181]DEVELOPMENT OF SALTINESS SENSOR THAT COMPRISES ION-SELECTIVE MEMBRANE AND
LIPID/POLYMER MEMBRANE
Yuki Muto, Yusuke Tahara, Rui Yatabe, Kiyoshi Toko, Hidekazu Ikezaki
Kyushu University, Japan, Intelligent Sensor Technology, Inc., Japan[1190]

Tuesday, 28 June 2016
14:45-16:15
Session 5d Matrix Devices
CMOS ACTIVE PIXEL SENSOR WITH IN-PIXEL APERTURE FOR 3D IMAGING TECHNOLOGY
young-Soo Choi, Myunghan Bae, Sang-Hwan Kim, Seunghyuk Chang, JongHo Park, Sang-Jin Lee, Seong
Ho Kong, Jang-Kyoo Shin
Kyungpook National University, Republic of Korea, Center for Integrated Smart Sensors (CISS), Republic of
Korea[1183]A DESIGN OF CMOS-MEMS MULTISPECTRAL INFRARED EMITTER ARRAYS WITH METAMATERIAL
ABSORBERS
Zhengxi Cheng, Hiroshi Toshiyoshi
Research Center for Advanced Science and Technology, The University of Tokyo, Japan, Institute ofIndustrial Science, The University of Tokyo, Japan, Shanghai Institute of Technical Physics, Chinese
Academy of Sciences, China[1125]MEMS MICROCANTILEVER - A PERFECT COMPLEMENT TO TERAHERTZ METAMATERIAL
Prakash Pitchappa, Chong Pei Ho, Chengkuo Lee
National University of Singapore, Singapore[1139]PIN DISPLAY MECHANISM USING SMA WIRE
Daniel A Heideman, Tadao Matsunaga, Takumi Kobayashi, Yoichi Haga
University of California, San Diego, United States, Tohoku University, Japan[1205]DESIGN OF TRANSIMPEDANCE AMPLIFIER FOR SILICON WHISKER NEUROPROBE
Xian Long Angela Leong, Ippei Akita, Hiroki Makino, Hirohito Sawahata, Makoto Ishida, Takeshi Kawano
Toyohashi University of Technology, Japan, Electronics Inspired Interdisciplinary Research Institute (EIIRIS),
Japan[1167]
ON-CHIP ELECTROCHROMIC MICRO DISPLAY DEVICE USING PANI FOR DISPOSAL BIO-SENSOR
CHIP
Yanjun Zhu, Takashiro Tsukamoto, Shuji Tanaka
Tohoku University, Japan[1072]

Tuesday, 28 June 2016
17:00-18:30
Industry Session
Moderator
Hiroyuki Fujita
The University of Tokyo, Japan
Nobuaki Kawahara
DENSO Corporation, JapanNOVEL SINGLE CHIP PROCESS WITH EMBEDDED CAVITY TO ACHIEVE WIDE RANGE VACUUM
FOR SENSORS INTEGRATIONC.W Cheng, C.W Cheng, K.C Liang, C.H Chu, D. A Horsley, Weileun Fang
Taiwan Semiconductor Manufacturing Company (TSMC) Ltd., Taiwan, National Tsing Hua University,
Taiwan, University of California, United States[1145]A SOFT ELECTRET GEL FOR LOW FREQUENCY VIBRATIONAL ENERGY HARVESTERS
Hiroyuki Mitsuya, Shimpei Ono, Kazumoto Miwa, Chikako Sano, Manabu Ataka, Hiroshi Toshiyoshi, Hiroyuki
FujitaSaginomiya Seisakusho ,INC, Japan, Central Research Institute of Electric Power Industry, Japan, The
University of Tokyo, Japan[1179]OPTICAL MEMS MULTISENSOR FOR REMOTE SENSING IN HARSH ENVIRONMENTS
Maurizio Tormen, Branislav Timotijevic, Yves Pétremand, Markus Lüzelschwab, Dara Zaman Bayat
CSEM, Switzerland[1013]

Wednesday, 29 June 2016
9:00-11:00
Session 6a Power MEMS
ELECTROSTATIC ENEGY HARVESTER USING BIPOLAR CHARGED ELECTRET AND DOUBLEDENSITY COUNTER ELECTRODES
Naoki Miwatani, Keidai Minami, Takayuki Fujita, Kesuke Kanda, Kazusuke Maenaka
University of Hyogo, Japan[1081]VIBRATION ELECTRET ENERGY HARVESTER WITH TUNABLE ELECTRODE GAP
Qianyan Fu, Yuji Suzuki
The University of Tokyo, Japan[1100]EFFECT OF ASYMMETRIC STRUCTURES ON OUTPUT ENHANCEMENT IN ELECTROMAGNETIC
ENERGY HARVESTERS FABRICATED BY RIGID-FLEX PCB TECHNOLOGYYi Chiu, Hao-Chiao Hong, Wei-Hung Hsu
National Chiao Tung University, Taiwan, Industrial Technology Research Institute, Taiwan[1110]
PULL-IN PREVENTION METHOD USING NDFEB THIN-FILM MAGNET FOR ELECTROSTATICENERGY HARVESTER
Shinichi Yoshii, Kohei Yamaguchi, Takayuki Fujita, Kensuke Kanda, Kazusuke Maenaka
University of Hyogo, Japan[1138]

WAVE ROTOR TOPPING CYCLE FOR MEMS GAS TURBINE ENGINE
Shinya Kumagai, Ryoma Suzuki, Toshiyuki Toriyama
Ritsumeikan University, Japan[1061]STUDY ON AERODYNAMIC EXPERIMENT OF MICROSCALE SUPERSONIC WIND TUNNEL
Ryoto Yamamoto, Daiki Ueda, Toshiyuki Toriyama
Ritsumeikan University, Japan[1059]
ADAPTING OF SERIAL AND PARALLEL COMPLEX PLANAR STACK STRUCTURE TO MICROFLUIDICFUEL CELL
Ki-Won Oh, Cheolhee Lee, Do-gyun Jung, Hyeong-Min Cho, Yoomin Ahn
Hanyang University, Republic of Korea[1057]

Wednesday, 29 June 2016
9:00-11:00
Session 6b Cantilever Devices / Resonators
FABRICATION OF MICRO-CHANNEL AND NOZZLE IN NARROW-GAPPED AFM DUAL SI PROBE
Yoshitaka Miura, Jin-seo Hong, Kazuki Mishina, Takayuki Shibata, Takashi Mineta
Yamagata University, Japan, Toyohashi University of Technology, Japan[1196]A NI-B MEMS PROBE TIP FOR A FINE PITCH TEST WITH ADVANCED MECHANICAL PROPERTIES
Kyongtae Kim, Hye-Rin Ahn, Hong-Bum Gwon, Jae-Youn Do, Sung-ho Joo, Yong-Jun Kim
Yonsei University, Republic of Korea, Samsung Electronics, Republic of Korea[1066]FABRICATION AND CHARACTERIZATION OF GRAPHENE-CU COMPOSITE MICROSTRUCTURESSYNTHESIZED BY ELECTROPLATING
Zhonglie An, Jinhua Li, Takahito Ono
Tohoku University, Japan[1038]STRESS EVALUATION OF SOL-GEL DERIVED PZT FILMS CALCINED AT VARIOUS TEMPERATURESON MEMS DIAPHRAGMS AND WAFERS FOR HIGHLY SENSITIVE MICROSENSOR STRUCTURES
Kaoru Yamashita, Jo Shiomi, Taiki Nishiumi, Minoru Noda
Kyoto Institute of Technology, Japan[1130]MEMS MAGNETIC SENSOR WITH BRIDGE-TYPE RESONATOR AND MAGNETO-STRICTIVE THIN
FILM
Takashi Sasabuchi, Naoki Okada, Kunihiro Koike, Takashi Mineta
Yamagata University, Japan[1197]CAPACITIVE SILICON RESONATOR WITH THERMOELECTRICAL ACTUATORSVAN NHA NGUYEN, VAN TOAN NGUYEN, TAKAHITO ONO
Tohoku University, Japan[1042]MEMS ARCH RESONATOR FOR DYNAMIC MECHANICAL MEMORY USING ELECTROTHERMALFREQUENCY MODULATION
Md Abdullah Al Hafiz, Lakshmoji Kosuru, Hossein Fariborzi, Mohammad Ibrahim Younis
King Abdullah University of Science and Technology (KAUST), Saudi Arabia[1200]

Wednesday, 29 June 2016
9:00-11:00
Session 6c Medical Devices
A 32-CHANNEL FOCUSED ULTRASOUND STIMULATOR USING PHASED ARRAY MEMS
TRANSDUCERS FOR ACCURATE TARGETING IN NEURO-MUSCULAR REHABILITATION SYSTEM
Sungjin Oh, Hyungmin Kim, Inchan Youn
Korea Institute of Science and Technology, Republic of Korea[1002]RESPIRATORY SENSOR MEASURING CAPACITANCE CONSTRUCTED ACROSS SKIN ALLOWING
EXERCISE
Momoko Karita, Makie Terazawa, Shinya Kumagai, Minoru Sasaki
Toyota Technological Institute, Japan[1103]IMPULSE-DRIVEN CAPSULE FOR MEDICAL TREATMENT
Takahiro Ito, Sunao Murakami, Teru Hayashi
Kyushu Institute of Technology, Japan, Ogasawara Precision Laboratory Ltd., Japan[1107]RESPONSE TIME SHORTENING IN THERMAL CATHETER FLOW SENSOR
Shun Watanabe, Yoshihiro Hasegawa, Miyoko Matsushima, Tsutomu Kawabe, Mitsuhiro Shikida
Hiroshima City University, Japan, Nagoya University, Japan[1114]INSERTION OF TIP-SEPARABLE MICRONEEDLE DEVICE FOR TRANS-DERMAL DRUG DELIVERYSYSTEMS
Yuki Nabekura, Kodai Imaeda, Yoshihiro Hasegawa, Mitsuhiro Shikida
Hiroshima City University, Japan, Nagoya University, Japan[1115]FABRICATION OF 3D-ELECTRODE AS INJECTOR OF REAGENT-LADEN BUBBLES
Takuya Kambayashi, Yoko Yamanishi
Shibaura Institute of Technology, Japan[1120]EMBEDDED SENSOR PACKAGING ON ENDOSCOPY HOOD FOR REAL TIME MONITORING DURING
NATURAL ORFICE TRANSLUMENAL ENDOSCOPIC SURGERY
Tomoaki Nakagawa, Yusaku Maeda, Kouhei Maeda, Kazuki Watatani, Hideki Kobara, Hirohito Mori,
Hidekuni Takao
Kagawa University, Japan, JST-CREST, Japan[1152]DIGITIZED MICROFLUIDIC FILLING FLOW GENERATION BY SOLENOID VALVE CONTROL
Junghyo Yoon, Eundoo Lee, Jaeho Kim, Sewoon Han, Seok Chung
Korea University, Republic of Korea, University of California, Berkeley, United States[1202]APCOT 2016
POSTERS
Posters denoted with M are to be presented on Monday
Posters denoted with T are to be presented on Tuesday

Theory, Design, Analysis, and Simulation
M.1

THE STUDY OF THE MICROLENS ARRAY USED FOR BEAM HOMOGENIZATION
Axiu Cao, Hui Pang, Jiazhou Wang, Man Zhang, Xin Liu, Lifang Shi, Qiling Deng
Institute of Optics and Electronics, Chinese Academy of Sciences, China[1051]T.2

DESIGN AND SIMULATION OF ELECTROSTATIC COMB-DRIVE MEMS RELAYS WITH TILTEDBEAMSYue Jin, Li-Feng Wang, Qing-an Huang
Southeast University, China[1063]M.3

A NOVEL STRUCTURE OF WAFER LEVEL PACKAGING WITH THROUGH SILICON VIA FOR
THERMAL WIND SENSOR
Shi-Xuan Gao, Qing-An Huang, Min Qin
Southeast University, China[1065]T.4

DESIGNOF
MICROHEATER
FOR
FAST
VOC
GAS
DESORPTION
IN
A
MICROPRECONCENTRATOR
Koji Oyama, Hisanori Sagasaki, Masashi Iwata, Tomoaki Kageyama, Hidetoshi Miyashita, Sang-Seok
Lee
Tottori University, Japan[1126]

M.5

IMPROVED LASER INTERFERENCE LITHOGRAPHY SYSTEM BY VIBRATION ANALYSIS
MODEL
Te-Hsun Lin, Yin-Kuang Yang, Chien-Chung Fu
National Tsing Hua University of Hsinchu, Taiwan[1149]T.6

YIELD ENHANCEMENT AND PERFORMANCECONSIDERING PROCESS VARIATIONS
Lili GaoSoutheast University, China[1199]PREDICTIONS

OF

MEMS

DEVICES

Material, Fabrication, and Packaging Technologies
M.7

THE FABRICATION TECHNIQUE OF STRUCTURE WITH 3D PROFILE BY ONE TIMEEXPOSURE
Lifang Shi, Axiu Cao, Jiazhou Wang, Qiling Deng, Hui Pang, Man Zhang, Xin Liu
Institute of Optics and Electronics, Chinese Academy of Science, China[1046]

T.8

THE DESIGN AND FABRICATION TECHNIQUE OF DIFFRACTIVE OPTICAL ELEMENTS
Qiling Deng, Lifang Shi, Hui Pang, Man Zhang, Axiu Cao, Jiazhou Wang, Xin Liu
Institute of Optics and Electronics, China[1048]

M.9

FABRICATION OF SEALED NANO-CHANNELS BASED ON SACRIFICIAL NANOTEMPLATESBY FOCUSED-ION-BEAM INDUCED CHEMICAL VAPOR DEPOSITION
Lin Jin, Ajuan Cui, Aizi Jin, Wuxia Li, Junjie Li, Changzhi Gu
Institute of Physics, Chinese Academy of Sciences, China, Collaborative Innovation Center of
Quantum Matter, China[1077]T.10

NITROGEN VACANCY CENTER EMBEDDED DIAMOND NANOSTRUTURES AND THE
TEMPERATURE DEPENDENT OPTICAL PROPERTIES
Qianqing Jiang, Wuxia Li, Aizi Jin, Junjie Li, Changzhi Gu
Institute of Physics, Chinese Academy of Sciences, China, Collaborative Innovation Center of
Quantum Matter, China[1078]

M.11

THE INFLUENCE OF PLASMA CONDITIONS ON SURFACE-ACTIVATION THAT AFFECT THE
BONDED AREA
Sethavut Duangchan, Ryouya Shirahama, Tomoki Murayama, Soushi Hamada, Akiyoshi Baba
Kyushu Institute of Technology, Japan[1105]T.12

A NEW PROCESSING TECHNIQUE FOR ULTRA-THIN WAFER
Yibo Zeng, Hang Guo
Xiamen Univsersity, China[1136]

M.13

BOTTOM-UP METHOD TO SYNTHESIZED CARBON DOTS / ZNO NANORODS AS PROMISINGOPTOELECTRONIC MATERIALS FOR HYBRID ULTRAVIOLET (UV) PHOTODETECTOR.
Kyung Jae Choi, Sang Won Lee, Jae Sung Lee, Sae Wan Kim, Sang Hyup Kim, Jun Woo Lee, Shin
Won Kang
Kyungpook National University, Republic of Korea[1144]

T.14

IMPLEMENTATION OF MICRO 3D GRAYSCALE FABRICATION TECHNIQUE FOR OPTOFLUIDIC
DEVICE APPLICATION
Intan S.L. Abdul Hamid, Asrulnizam Abd Manaf
Universiti Sains Malaysia, Malaysia, Universiti Tun Hussein Onn Malaysia, Malaysia[1157]M.15

ALL SOLUTION PROCESSIBLE NONVOLATILE MEMORY BY CDSE/ZNS QUANTUM DOT AND
PENTACENE INTERFACE
Sae-Wan Kim, Jin-Beom Kwon, In-Su Jung, Sang-Won Lee, Jae-Sung Lee, Hyun-Min Jeong,
Jun-Woo Lee, Shin-Won Kang
Kyungpook National University, College of IT Engineering, Republic of Korea[1160]

Physical Sensors and Microsystems
T.16

A TUNABLE MICRO BISTABLE MECHANISM
Han Du, Fook Siong Chau, Guangya Zhou
National University of Singapore, Singapore[1043]M.17

SIC DIAPHRAGMS FABRICATED BY AN ULTRASONIC VIBRATION MILL-GRINDING METHODFOR HIGH-TEMPERATURE FIBER-OPTIC PRESSURE SENSORS
Yonggang Jiang, Zhiwen Zhou, Jian Li, Rui Wang, Deyuan Zhang
Beihang University, China[1045]FABRICATION OF THREAD TYPE TEMPERATURE SENSOR FOR WEARABLE DEVICES
Jiwon Kye, Dong-Cheul Han, Han-Jae Shin, Wanghoon Lee
Gumi Electronics and Information Technology Research Institute, Republic of Korea, Andong National
University, Republic of Korea[1071]

T.18

M.19

A NOVEL MEMS INERTIAL SENSOR WITH OUT-OF-PLANE DIFFERENTIAL SENSINGSTRUCTURE BY MULTI-LAYER METAL TECHNOLOGY
Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Hiroshi Toshiyoshi, Kazuya Masu,
Katsuyuki Machida
Tokyo Institute of Technology, Japan, Japan Science and Technology Agency CREST, Japan, NTT
Advanced Technology Corporation, Japan, The University of Tokyo, Japan[1099]T.20

SMOOTH SURFACED SHEAR STRESS SENSOR WITH HIGH TIME RESOLUTION
Chiaki Okihara, Yoshihiro Hasegawa, Mitsuhiro Shikida
Hiroshima City University, Japan[1116]M.21

STUDY OF DIFFERENT GEOMETRIC DUAL-COIL AFFECTING ELECTROMAGNETIC SENSINGPERFORMANCE
Siansyun Liao, Kenwei Tang, Hsiuwei Lin, Weichen Li, Chingfu Tsou
Feng Chia University, Taiwan[1143]T.22

STRUCTURAL INVESTIGATION OF PIEZOELECTRIC LAYER AND ELECTRODE LAYER FOR
CIRCULAR PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS
Daisuke Akai, Hongqu Yu, Takeo Kaotori, Makoto Ishida
Toyohashi University of Technology, Japan[1150]

M.23

REDUCTION OF KNEE POINT VARIATION IN LOGARITHMIC RESPONSE OF
LINEAR-LOGARITHMIC CMOS IMAGE SENSOR
Myunghan Bae, Byoung-Soo Choi, Sanggwon Lee, Sang-Hwan Kim, Sang-Ho Seo, Pyung Choi,
Jang-Kyoo Shin
Kyungpook National University, Republic of Korea[1162]T.24

BULK-MICROMACHINED SILICON STRAIN GAUGES FOR HYDROGEN PRESSURE SENSORS
Jinwoong Kim, Kibeom Kim, Jonghyun Kim, Namho Bae, Namki Min
Korea University, Republic of Korea, National Nanofab Center, Republic of Korea[1170]M.25

SILICON-GLASS WAFER BASED SILICON STRAIN GAUGES WITH HIGH WITHSTANDING
VOLTAGES
Kibeom Kim, Jinwoong Kim, Jonghyun Kim, Chanwon Park, Namho Bae, Namki Min
Korea University, Republic of Korea, Kangwon University, Republic of Korea, National Nanofab Ceter,
Republic of Korea[1180]

T.26

IMPLANTABLE WIRELESS PASSIVE INTRACRANIAL PRESSURE MONITORING SYSTEM
Xiuxu Wei, Junbo Wang, Deyong Chen, Jian Chen, Ming Zhao
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of
Sciences, China, First Affiliated Hospital of Chinese PLA General Hospital, China[1192]

Chemical Sensors and Microsystems
M.27

HIGHLY SENSITIVE ELECTROCHEMICAL DETERMINATION OF TRACE-LEVEL CADMIUMBASED ON GRAPHENE/L-CYSTEINE/AU, GLASS CARBON AND BORON-DOPED DIAMOND
ELECTRODE
Yu Song, Chao Bian, Jianhua Tong, Yang Li, Shanhong Xia
University of Chinese Academy of Sciences, China, Institute of Electronics, Chinese Academy of
Sciences, China[1015]

T.28

DEVELOPMENT OF A PULSE INPUT TYPE POTASSIUM SENSOR FOR MONITORING
NUTRIENT CONCENTRATION IN AGRICULTURE
Masato Futagawa, Takaya Ozawa, Harutoyo Hirano, Tiejun Zhao, Akimasa Nakano, Kazuaki Sawada
Shizuoka University, Japan, National Agriculture and Food Research Organization, Japan, Toyohashi
University of Technology, Japan[1034]

M.29

NANO GRAINED GRAPHENE CHEMICAL SENSOR FOR DETECTION OF NOX AT MILDTEMPERATURE
ChengChun Tang, HaiFang Yang, JunJie Li, ChangZhi Gu
Institution of Physics,Chinese Academy of Sciences, China[1050]T.30

GAS-SENSING STUDIES OF WO3 AND WS2 NANOTUBES PREPARED BY THERMALOXIDATION AND FLUIDIZED BED REACTION
Anurat Wisitsoraat, Ditsayuth Phokaratkul, Kata Jaruwongrungsee, Thitima M. Daniels, Adisorn
Tuantranont, Wojtek Wlodarski
National Electronics and Computer Technology Center, Thailand, RMIT University, Australia[1087]

M.31

3D GRAPHENE-PDMS-CNT BASED ELECTROCHEMICAL SENSORS FOR DETECTION OF
HEAVY METAL
Thitima M. Daniels
National Electronics and Computer Technology Center, Thailand[1093]

Bio/Biomedical Sensors and Microsystems
T.32

EFFECT OF BUFFERING ACTION ON THE OUTPUT RESPONSE OF ENZYMEFUNCTIONALIZED POTENTIOMETRIC SENSOR ARRAYS FOR ATP IMAGING
Hideo Doi, Tomoko Horio, Tatsuya Iwata, Koichi Okumura, Toshiaki Hattori, Kazuhiro Takahashi, Yuji
Murakami, Makoto Ishida,Kazuaki Sawada
Toyohashi University of technology, Japan[1010]M.33

DEVELOPMENT OF ANTIBODY-ADSORPTION BASED SANDWICH ASSAYS FOR DETECTING
TUBERCULOSIS SECRETORY ANTIGENS ONTO THE NANOMATERIALSEun Bee Kim, Seon-Ah Cheon, Jaebeom Lee, Hwa-Jung Kim, Tae Jung Park
Chung-Ang University, Republic of Korea, Busan National University, Republic of Korea, Chungnam
National University, Republic of Korea[1035]T.34

FLEXIBLE AND RESIZABLE CAPACITIVE PRESSURE SENSOR FOR BREATHING SIGNAL
MONITORING APPLICATIONS
Seong-Won Park, Partha Sarati Das, Hee-Uk Lee, Jae-Yeong Park
Kwangwoon University, Republic of Korea[1064]M.35

FABRICATION OF IR/IROX MICRO PH SENSOR FOR QUANTITATIVE DENTAL CARIESEVALUATION
Chindanai Ratanaporncharoen, Miyuki Tabata, Yuichi Kitasako, Masaomi Ikeda, Junji Tagami, TatsuroGoda, Akira Matsumoto, Yuji Miyahara
Tokyo Medical and Dental University, Japan[1076]

T.36

CHIP HOLDER FOR ON-CHIP ION SOURCE MASS SPECTROMETRY
Xi Luo, Trong Tue Phan, Kiyotaka Sugiyama, Yuzuru Takamura
Japan Advanced Institute of Science and Technology, Japan[1092]

M.37

SIDE-POLISHED FIBER SPR SENSOR FOR CONTINUOUS GLUCOSE MONITORING
Bingyu Lu, Yanwen Sun, Xiaochen Lai, Haixia Yu, Dachao Li
Tianjin University, China[1095]

T.38

THE EFFECT OF ELECTRICAL PROPERTY
ELECTROFORMATION OF GIANT VESICLES
Yuying Chiang, Chingfu Tsou
Feng Chia University, Taiwan[1147]OF

PHOSPHOLIPID

LAYER

ON

THE

M.39

L-ASCORBIC ACID SUPPRESSES β-LACTOGLOBULIN AMYLOID FIBRILLATION
Wonseok Lee, Hyungbeen Lee, Insu Kim, Sang Won Lee, Sang Woo Lee, Dae Sung Yoon
Yonsei University, Republic of Korea, Korea University, Republic of Korea[1165]

T.40

CHARACTERIZATIONOF
TRAPSTIFFNESSOF
MULTIPLE
PARTICLES
DIELECTROPHORETIC TWEEZERS
Seungyeop Choi, Myeonggu Son, Kwan Hwi Ko, Min Hyung Kim, In Soo Park, Sang Woo Lee
Yonsei University, Republic of Korea[1166]IN

M.41

MICROCHAMBER ARRAY FOR FREQUENCY-DEPENDENT SINGLE-CELL
MONITORING
YoonHee Chang, Jiyoon Bu, Young-Ho Cho
Korea Advanced Institute of Science and Technology (KAIST), Republic of Korea[1172]T.42

MICROFLUIDIC PLATFORMS FOR MACRO-SCALE TISSUE FORMATIONHyo Eun Jeong, Yuta Kubota, Yun Jung Heo, Seok Chung
Korea University, Republic of Korea, Tokyo University of Agriculture and Technology, Japan[1201]

IMPEDANCE

Medical Devices and Microsystems
M.43

DEVELOPMENT OF AN IMAGE SENSOR FOR ROOT CANAL
Masataka Fujimoto, Shinji Yoshii, Satoshi Ikezawa, Toshitsugu Ueda, Chiaki Kitamura
Kyushu Dental University, Japan, Waseda University, Japan[1037]T.44

FABRICATION OF LOW-TEMPERATURE SOLUTION-PROCESSED THIN-FILM LEADZIRCONIUM TITANATE ACTUATOR FOR HIGHLY INTEGRATED BIOCHIP
Reijiro Shimura, Phan Trong Tue, Yuuki Tagashira, Yoshiaki Ukita, Tatsuya Shimoda, Yuzuru
Takamura
Japan Advanced Institute of Science and Technology, Japan, University of Yamanashi, Japan,
JST-CREST, Japan[1088]M.45

HIGH-THROUGHPUT VIABLE CIRCULATING TUMOR CELL ISOLATION USING FABRICMEMBRANE FILTERS
Jiyoon Bu, Jeongsuk Kim, Young-Ho Cho
Korea Advanced Institute of Science and Technology (KAIST), Republic of Korea, Se Hong Trading,
Republic of Korea[1168]T.46

DEVELOPMENT OF ATTACHABLE POLYIMIDE THIN FILM WITH ELECTRICAL IMPEDANCESENSOR FOR TISSUE DISCRIMINATION
Jaeho Park, Inkyu Park
Korea Advanced Institute of Science and Technology (KAIST), Republic of Korea[1184]

Micro/Nano Fluidics
M.47

THERMAL PERFORMANCE ANALYSIS OF MICRO PILLARS AND CHANNELS UNDER BOILING
AND DRY-OUT PHENOMENA
Shao-Wen Chen, Min-Lun Chai, Feng-Jiun Kuo, Fang-Chin Liu, Wei-Keng Lin, Jong-Rong Wang,
Jin-Der Lee, Hao-Tzu Lin,Chunkuan ShihNational Tsing Hua University, Taiwan, Nuclear and New Energy Education and Research Foundation,
Taiwan, Institute of Nuclear Energy Research, Taiwan[1003]T.48

MICRO OPTICAL FLUIDIC CHIP FOR PLASMONIC PHOTOCATALYTIC OXIDIZATION OFAMMONIUM IONS IN WATER
Hung Ji Huang, Jr-Jung Yang, Chun-Ting Lin
Instrument Technology Research Center, National Applied Research Laboratories, Taiwan[1055]M.49

PERFORMANCE OF AIR-BREATHING DIRECT FORMIC ACID MICROFLUIDIC FUEL CELLS
Jin-Cherng Shyu, Po-Yan Wang
National Kaohsiung University of Applied Sciences, Taiwan[1056]T.50

A MICROFLUIDIC DEVICE USING NAFION MEMBRANE AS A DEHYDRATOR DEVICE FOR
DEHYDRATION OF SAMPLING GAS IN GAS CHROMATOGRAPHY
Kuan-Ju Chiu, Chun-Yen Kuo, Po-Shin Chen, Wei-Cheng Tian
National Taiwan University, Taiwan[1069]M.51

A SIX-WAY MICROVALVE FOR QUANTITATIVE SAMPLE INJECTION
Xiaocheng Liu, Xiaoping Li, Tong Chen, Honglong Chang
Northwestern Polytechnical University, China[1127]T.52

A SIMPLE FABRICATION METHOD OF HANDHELD LIQUID CHROMATOGRAPHY WITH
NANOCHANNEL
Hidetoshi Miyashita, Sang-Seok Lee
Tottori University, Japan[1128]M.53

INVESTIGATION ON THE PERFORMANCE OF DIRECT FORMATE MICROFLUIDIC FUEL CELLS
Jin-Cherng Shyu, Ke-Wei Cheng
National Kaohsiung University of Applied Sciences, Taiwan[1140]T.54

A NUMERICAL INVESTIGATION ON HEAT TRANSFER ENHANCEMENT EFFECT OF THE
FERROFLUID AS COOLING FLUID FOR A MICRO COOLING DEVICE
Jae-Hyeong Seo, Moo-Yeon Lee
NTF TECH company, Republic of Korea, Dong-A University, Republic of Korea[1171]RF MEMS/NEMS
M.55

A MEMS SWITCH WITH NOVEL STOPPER STRUCTURE AND IMPROVED FABRICATIONPROCESSES FOR POWER APPLICATIONS
Meng Zhang, Po-fat Chong, Ching-hsiang Cheng
The Hong Kong Polytechnic University, Hong Kong
[1067]

Optical MEMS and Nano-Photonics
T.56

ULTRASONIC-ASSISTED SYNTHESISNANOPLATES AND MICROFLOWERS
Anukron Phuruangrat
Prince of Songkla University, Thailand[1012]AND

PHOTOCATALYTIC

PROPERTIES

OF

ZNO

M.57

ACTIVE CONTROL OF NEAR-FIELD COUPLING IN MEMS METAMATERIAL
Prakash Pitchappa, Manukumara Manjappa, Chong Pei Ho, Karen Shih, Ranjan Singh, Chengkuo
Lee
National University of Singapore, Singapore, Nanyang Technological University, Singapore[1025]T.58

ULTRAFINE METAMATERIALS FOR TERAHERTZ SENSING
Xiaoxiang Xia, Zhe Liu, Shengyan Yang, Junjie Li, Changzhi Gu
Laboratory of Microfabrication, Institute of Physics, CAS, China[1052]M.59

MICRO LENSES FABRICATION BY MOLDING USING INDENTATION
Meng-Ju Lin, Chih-Chin Lo, Tzu Heng Lo, Yu-Ru Lai
Feng Chia university, Taiwan[1109]T.60

CANTILEVER AND INVERSE TAPERED BASED HIGHLY EFFICIENT AND MISALIGNMENTTOLERANT FIBER-TO-SILICON WIRE WAVEGUIDE COUPLER
Peng Wang, Aron Michael, Chee Yee Kwok
The University of New South Wales, Australia[1161]

Energy and Power MEMS
M.61

REDUCTION OF GRAPHENE OXIDE FILM USING THERMAL ANNEALING
SUPERCAPACITOR APPLICATIONSKa Hing Cheng, Meng-Jin Li, Ching-Hsiang Cheng, Andy Kuo-An Chao, Kwong Chun Lo
The Hong Kong Polytechnic University, Hong Kong, Austin, TX, United States[1060]FOR

T.62

A HYBRID NANOGENERATOR BASED ON TRIBOELECTRIC AND THERMOELECTRICMECHANISMS FOR SLIDING FRICTION ENERGY
Min-Ki Kim, Myoung-Soo Kim, Yong-Jun Kim
Yonsei Unversity, Republic of Korea[1068]

M.63

DESIGN AND FABRICATION OF A MICRO DIRECT FORMIC ACID FUEL CELL
Tingting Wang, Yibo Zeng, Hang Guo
Xiamen Univsersity, China[1137]T.64

SANDWICH-STRUCTURED DUAL-CHARGED MEMS ELECTRET POWER GENERATOR FOR
AMBIENT VIBRATIONAL ENERGY HARVESTING
Kai Tao, Jin Wu, Nan Wang, Lihua Tang, Sun Woh Lye, Jianmin Miao
Nanyang Technological University, Singapore[1156]M.65

A BIOCOMPATIBLE AND FLEXIBLE SILK FIBROIN TRIBOELECTRIC NANOGENERATOR FOR
SELF-POWERED IMPLANTABLE DEVICES
Taeheon Kim, Beelee Chua, James Jungho Pak
Korea University, Republic of Korea[1186]

Sensing Algorithms, Sensor Networks and Sensor Systems
T.66

AN LC-TYPE PASSIVE WIRELESS DOUBLE-PARAMETER MONITORING SYSTEM USING A
RELAY SWITCH
Lei Dong, Li F. Wang, Qing A. Huang
Southeast University, China[1016]

M.67

CONTINUOUS BLOOD PRESSURE MONITORING ALGORITHM USING PULSE TRANSIT TIME
AND MODIFIED KALMAN FILTER
Qiang Zhang, Xianxiang Chen, Zhen Fang, Shanhong Xia
Institute of Electronics, Chinese Academy of Sciences, China[1097]T.68

DETECTION OF A GAS SOURCE USING A FLYING ROBOT AND A GROUND ROBOT
Ryohei Sato, Haruka Matsukura, Ryuichi Takemura, Hiroshi Ishida
Tokyo University of Agriculture and Technology, Japan[1189]