2007A 1957BL01B1


㊀ὐ↥ᬺ೑↪⺖㗴ႎ๔ᦠX ✢ๆ෼ࠬࡍࠢ࠻࡞ࠍ↪޿ߚṁធࡈࡘ࡯ࡓਛ࠽ࡁ☸ሶߩ㊄ዻర⚛ߩ⚿ว⁁ᘒߩⷰኤThe X-ray Absorption Fine Structure Analysis of Nano-sized Metal Fume Particles
Trapped by Differential Mobility Analyzer᧻੗ᐽੱ 1㧘ဈ੗િశ 1㧘භㇱ᦮ਭ 2㧘ᅏ↰ᶈผ 2㧘⧔↰ን⟤㓶 3㧘㜞ጟ᣽ノ 1㧘ౝጊᎯ㓶 11੩ㇺᄢቇᎿቇ⎇ⓥ⑼㧘2㧔ᩣ㧕ፉᵤ⵾૞ᚲ㧘3 ഭ௛቟ోⴡ↢✚ว⎇ⓥᚲ

The metal fumes were trapped into the membrane filter by differential mobility analyzer (DMA).
The fumes size was 0.02-0.10 ȝm. The metal fumes were generated in chamber by welding a solidwire (YM45MT, Panasonic) for 30 seconds and sucked out at the rate of 700 L/minute for diluting.
We got the XAFS spectrum of Mn (K-edge, 6200-7080 eV) and Fe (K-edge, 7000-7600 eV) byusing a synchrotron radiation. These results suggest that fume nano-sized particles mainly included
Mn2O3 and Fe3O4.
⋡⊛ߣ᭎ⷐ ᧄ⎇ⓥߢߪ㧘࠽ࡁ☸ሶߩ⊒↢㊂߇⥄േゞᧄ⎇ⓥߢߪ㧘㧔ᩣ㧕ፉᵤ⵾૞ᚲ߇⵾૞ߒߚ

ࠃࠅ߽㗼⪺ߦᄙ޿ߣߩႎ๔߇޽ࠆ㧘ṁធࡈᓸ ಽ ဳ 㔚 ᳇ ⒖ േ ᐲ ᷹ ቯ ⵝ ⟎ 㧔 differentialࡘ࡯ࡓߦ⌕⋡ߒ㧘ߎࠇࠄߦ฽߹ࠇࠆ࠽ࡁ☸

mobility analyzer㧘DMA㧕ߩᕈ⢻⹜㛎ࠍ⋡⊛ሶ㧔20-100nm㧕ࠍࡈࠖ࡞࠲࡯ߦ᝝㓸ߒߚ‫ޕ‬ߣߒߚ‫ߪ⟎ⵝᧄޕ‬㧘⥄േゞឃࠟࠬਛߦ฽߹ߎࠇࠍ⿛ᩏဳ㔚ሶ㗼ᓸ㏜㧔TEM㧕ߩⷰኤߦࠇࠆ㧘ੱ㑆ߦᖡᓇ㗀ࠍ෸߷ߔߣߐࠇࠆࠃࠅ㧘☸ሶᓘࠍ⏕⹺ߒ㧘ߐࠄߦ XAFS ࠬࡍ100nm એਅߩ⿥ᓸ☸ሶߩ⸘᷹ࠍਥߥ⋡⊛ߣࠢ࠻࡞ࠍขᓧߔࠆߎߣߢ࠽ࡁ☸ሶਛߩ⚿วߒ㧘㐿⊒ߐࠇߡ߈ߚ‫ ޕ‬᰷☨ߢߪ㧘࠽ࡁ☸ሶ⁁ᘒࠍⷰኤߒߚ‫ޕ‬หᤨߦ㧘ࡠ࡯ࡊ࡟࠶ࠪࡖ߇ੱ૕ߦᖡᓇ㗀ࠍ෸߷ߔߣ⠨߃ࠄࠇ㧘2007࡯ࠗࡦࡄࠢ࠲࡯ઃࠕࡦ࠳࡯࠮ࡦࠨࡦࡊ࡜࡯㨪2010 ᐕ㗃ߦ㧘⥄േゞឃࠟࠬߦ฽߹ࠇࠆߢ߽☸ሶࠍ᝝㓸ߒ㧘ߎࠇߣ⚿ᨐࠍᲧセߒߚ‫ޕ‬

100nm એਅߩ࠽ࡁ☸ሶࠍⷙ೙ߔࠆേ߈߇޽ࠆ‫߇ࠈߎߣޕ‬㧘ߎߩ㗔ၞߩ☸ሶߩ᷹ቯᛛⴚ

ᣇ ᴺߪ㧘DMA ࠍ↪޿ࠆᣇᴺߒ߆ߥ޿ߣߐࠇߡ޿ᧄ⎇ⓥߢߪ㧘᷹ቯኻ⽎⹜ᢱߣߒߡ㧘1㧕࠺ࠆ‫⥄ޕ‬േゞឃࠟࠬਛߩ࠽ࡁ☸ሶ᷹ቯᴺߩ⋡ࠖ࡯࠯࡞ឃ಴࠽ࡁ☸ሶ㧔DEP㧕㧘2㧕ᄢ᳇ਛ⊛ߦߪ㧘⃻࿷ߩ DMA ࠍߘߩ߹߹↪޿ࠆߎ࠽ࡁ☸ሶ㧘3㧕㊄ዻࡈࡘ࡯ࡓࠍㆬቯߒߚ‫ޕ‬DEPߣߪߢ߈ߕ㧘⥄േゞߩടㅦ㧘ᷫㅦߥߤߩㆊߪ㧘⥄േゞ߆ࠄឃ಴ߐࠇࠆ☸ሶ⁁‛⾰ߩౝ㧘ᷰ⃻⽎ߦㅊ㓐ߢ߈ࠆ㧘ᔕ╵ㅦᐲߩㅦ޿ DMA

ਛᔃᓘ߇ 40nm ߣߥࠆࠃ߁ߥ࠽ࡁ☸ሶࠍ᝝ࠍ㐿⊒ߔࠆᔅⷐ߇޽ߞߚ‫ޕ‬㓸ߔࠆߚ߼ߦ㧘࠳ࠗ࡝ࡘ࡯࡚ࠪࡦ࠻ࡦࡀ࡞ࠍ੺ߒߚᓟߦ㧘᝝㓸ࠍߒߚ‫ޕ‬ᄢ᳇ਛ࠽ࡁ☸
ሶߪ㧘4 ᦬ 17 ᣣ߆ࠄ 6 ᦬ 11 ᣣߩ㑆ߦ᝝㓸ࠍⴕ޿㧘✚᝝㓸ᤨ㑆ߪ⚂ 200 ᤨ㑆ߣߒߚ‫ޕ‬㊄ዻࡈࡘ࡯ࡓߪ㧘ታ㓙ߦࡈࡘ࡯ࡓࠍ⊒↢ߐߖ㧘ߎࠇࠍᷡᵺⓨ᳇ߦߡᏗ㉼ߒߚ߽ߩࠍ᝝㓸ߒߚ‫ߪߦࠣࡦ࡝ࡊࡦࠨޕ‬㧘ߤߩ⹜ᢱ߽㧔ᩣ㧕ፉᵤ⵾૞ᚲ⵾ߩᓸಽဳ㔚᳇⒖േᐲ᷹ቯⵝ⟎㧔differential mobility analyzer, DMA㧕ࠍ↪޿ࠆߎߣߢ㧘100nm એਅߩ࠽ࡁ☸ሶࠍࡈࠖ࡞࠲࡯ߦ᝝㓸ߒߚ‫ޕ‬㊄ዻࡈࡘ࡯ࡓߪઁߦ߽㧘ࠕࡦ࠳࡯࠮ࡦࠨࡦࡊ࡜࡯ߦߡ㧘ฦ☸ᓘߩᶋㆆ☸ሶ⁁‛⾰ࠍ᝝㓸ߒߚ‫⹜ߩߤޕ‬ᢱ߽㧘฽᦭㊄ዻ㊂߇ᢙ ppt એ਄ߣߥࠆࠃ߁㧘࠺ࠩࠗࡦߒߚ‫⹜ߩࠄࠇߎޕ‬ᢱߦ⋥ធ᡼኿శࠍᾖ኿
ߒ㧘XAFS ࠬࡍࠢ࠻࡞ࠍᓧࠆߎߣߢ࠽ࡁ☸
ሶߩ⚿ว⁁ᘒࠍⷰኤߔࠆߎߣߣߒߚ‫ޕ‬ኻ⽎ߣߒߚ㊄ዻ⒳ߪ㧘ࡈࡘ࡯ࡓࡢࠗࡗ࡯ߩ⚵ᚑ߆ࠄ㧘Mn㧘Zn ߣߒߚ‫ޕ‬ᓧࠄࠇߚ XAFS ࠬࡍࠢ࠻࡞ߪ㧘REX2000㧔RIGAKU㧕ߦߡ⸃ᨆߒߚ‫ޕ‬ታ㛎⚿ᨐ⹜ᢱ 1㧕ߩ DEP㧘2㧕ߩᄢ᳇ਛ࠽ࡁ☸ሶߪỚᐲ߇ૐߊ㧘᣿⏕ߥࠬࡍࠢ࠻࡞ࠍᓧࠆߎߣ
߇ߢ߈ߥ߆ߞߚ‫ޕ‬3㧕ߩ㊄ዻࡈࡘ࡯ࡓߦ㑐ߒ

Fig.1

ߡߪ㧘DMA㧘ࠕࡦ࠳࡯࠮ࡦ᝝㓸ࠍⴕߞߚߔ

K-edge XAFS spectra of Fe standard
and fume measured by an BL01B1

ߴߡߩ⹜ᢱߦ߅޿ߡ㧘⦟ᅢߥࠬࡍࠢ࠻࡞ࠍ
ᓧࠆߎߣ߇ߢ߈ߚ‫ޕ‬DMA ߢ᝝㓸ߒߚ 100nmࡘ࡯ࡓ࠽ࡁ☸ሶߪ㧘Fe ߦ㑐ߒ㧘Fe2O3 ߣ Fe3O4

એਅߩ࠽ࡁ☸ሶ㧘ࠕࡦ࠳࡯࠮ࡦߢ᝝㓸ߒߚߢ᭴ᚑߐࠇߡ޿ࠆߎߣ߇⏕⹺ߢ߈ߚ‫ߦ․ޕ‬ࡃ࠶ࠢࠕ࠶ࡊࡈࠖ࡞࠲࡯㧔430nm એਅ㧕㧘ᮡ☸ሶᓘ߇ዊߐ޿߽ߩ߶ߤ㧘Fe2O3 ߇ᄙߊߥࠆ

Ḱ‛⾰ߩࠬࡍࠢ࠻࡞ࠍ⸥タߒߚ Fe ߩ⚿ᨐ௑ะ߽ⷰኤߢ߈ߚ‫ߪࠇߎޕ‬㧘☸ሶᓘ߇ዊߐ

ࠍ Fig.1 ߦ␜ߔ‫ߩ࡞࠻ࠢࡍࠬޕ‬ᵄᒻ߆ࠄ㧘޿߽ߩ߶ߤ㧘Fe ߩ㉄ൻ߇ㅴࠎߢ޿ࠆߎߣࠍ

DMA㧘ࠕࡦ࠳࡯࠮ࡦߢ᝝㓸ߒߚ㊄ዻࡈࡘ࡯␜ߒߡ޿ࠆ‫ޕ‬ᰴߦ㧘Mn ߩ⚿ᨐࠍ Fig.2 ߦ␜ࡓߢߪ㧘⚿ว⁁ᘒߦᄢ߈ߥᏅߪή޿ߎߣ߇ߔ‫ޕ‬Fig.1 ߣห᭽ߦ㧘਄߆ࠄ DMA㧘ࠕࡦ࠳⏕⹺ߢ߈ࠆ‫ߚ߹ޕ‬㧘ࠕࡦ࠳࡯࠮ࡦࠨࡦࡊ࡜

࡯࠮ࡦߢ᝝㓸ߒߚ㊄ዻࡈࡘ࡯ࡓ㧘ᮡḰ‛⾰࡯ߢ᝝㓸ߒߚฦ☸ᐲߦ߅޿ߡ߽㧘ࠬࡍࠢ࠻ߩ㗅ߢ㧘ࠬࡍࠢ࠻࡞ࠍ⸥タߒߚ‫ࠄ߆ࠇߎޕ‬࡞ߩᵄᒻߦᏅߪή߆ߞߚ‫ࠍࠄࠇߎߦࠄߐޕ‬ಽ߆ࠆࠃ߁ߦ㧘ࠨࡦࡊ࡝ࡦࠣߒߚ⹜ᢱߪ㧘ᮡḰ‛⾰ߣᲧセߔࠆߣ㧘߶ߣࠎߤߩ㊄ዻࡈDMA㧘ࠕࡦ࠳࡯࠮ࡦ౒ߦᄢ߈ߥᏅߪή޿‫ޕ‬߹ߚ㧘ᮡḰ‛⾰ߣߩᲧセ߆ࠄ㧘ߎࠇࠄߩ⹜
ᢱߦߪ MnO㧘Mn2O3 ߇฽߹ࠇࠆߎߣ߇⏕⹺ߢ߈ߚ‫ޕ‬ᵄᒻ⸃ᨆ࠰ࡈ࠻ߦࠃࠆߣ㧘㊂⊛ߦߪ MnO ߇ඨಽએ਄ࠍ␜ߒߚ‫ޕ‬ߎࠇࠄߩ⹜ᢱࠍ㔚ሶ㗼ᓸ㏜㧔SEM㧕ߢⷰኤߒߚߣߎࠈ㧘ᢙ⃨⁁ߦ࠽ࡁ☸ሶ߇ㅪ⚿ߒߡ޿ࠆ௝߇ᓧࠄࠇ㧘Fe3O4 ߩ⏛ᕈ↱᧪ߢ޽ࠆߣផ᷹ߢ߈ߚ㧔Fig.3㧕‫ޕ‬⠨ ኤMn ߪ㧘MnO2 ߩᲥᕈ߇⍮ࠄࠇߡ߅ࠅ㧘╙ 2㘃․ቯൻቇ‛⾰ߦᜰቯߐࠇߡ޿ࠆ‫੹ޕ‬࿁ߩ᷹ቯߢ㧘㊄ዻࡈࡘ࡯ࡓਛߦߪ MnO2 ߪᓸ㊂ߦߒ߆฽߹ࠇߡ޿ߥ޿ߎߣ߇ಽ߆ߞߚ‫ޕ‬ഭ௛ၮḰᴺߦߪ㧘Mn ߩൻว‛ߦኻߔࠆ⹦⚦ߥ⸥タߪή޿‫᧦↢⊒ߩࡓ࡯ࡘࡈޕ‬ઙߦᔕߓߡ㧘
MnO2 ⊒↢㊂߇ᄌൻߔࠆน⢻ᕈߪ㜞ߊ㧘੹ᓟߎࠇࠄࠍ〯߹߃ߚ㧘Mn ߩൻว‛ߏߣߩⷙ೙߇ᔅⷐߢ޽ࠆߣ⠨߃ࠆ‫ޕ‬Fe ߦ㑐ߒߡߪ㧘⍾㋕߿ࡈࠚ࡜ࠗ࠻⏛⍹ߥߤߩਥᚑಽߢ޽ࠆ
Fig.2K-edge XAFS spectra of Mn standard andfume measured by an BL01B1 beamline.

Fe2O3 ߇ᄙߊ฽߹ࠇߚ‫ߪࠄࠇߎޕ‬㧘⥄ὼ⇇ߦᐢߊሽ࿷ߒߡ߅ࠅ㧘Fe ߘߩ߽ߩ߇↢૕ߦᓇ㗀߇޽ࠆߎߣߪ⠨߃ߦߊ޿‫ߒ߆ߒޕ‬㧘࠽ࡁ☸ሶߩ୘ᢙỚᐲߪ㜞ߊ㧘Ⴒ⢖ߥߤߩⵍኂ߇
⠨߃ࠄࠇࠆ‫ޕ‬DMA ߪ㧘100nm એਅߩ☸ሶࠍࡕ࠾࠲࡝ࡦࠣߒߥ߇ࠄ㧘᝝㓸ߢ߈ࠆ㐳ᚲ߇޽ࠆ‫ᧄޕ‬ታ㛎ߢߪ㧘ᯏེߩᕈ⢻⹜㛎߽ⴕ߁ߎߣ߇ߢ߈㧘ഭ௛⃻႐ߢߩ೑↪߽ᦼᓙߐࠇ
ࠆ‫ޕ‬
ࠠ࡯ࡢ࡯࠼
㊄ዻࡈࡘ࡯ࡓ㧘XAFS㧘DMAFig.3 TEM image of nano-sized metal
fume particles trapped by filter.

⺰ᢥ⊒⴫⁁ᴫ࡮․⸵⁁ᴫ
19th International Congress on X-Ray Optics
and Microanalysis (ICXOM 2007㧕
X-ray spectrometry ⹹ߦᛩⓂ੍ቯ