Communication Protocol

Profinet

for Capacitance Diaphragm Gauges

CDG045D
CDG100D

tirb62e1(2020-01)1

General Information

Caution
Data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and Profinet interface or the diagnostic port may resultin incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and Profinet interface, or the diagnostic
port.

Intended Use

This Communication Protocol contains instructions for operating Profinet interfaces(slaves) together with a master.
For safety information, specifications and operation instructions of thevacuum gauges refer to the appropriate documents:
CDG045D
CDG100D

Profinet –Interface→  [1]→  [2]This manual describes the functionality of a Profinet.
For operating the gauge via Profinet, prior installation of the device specific
GSDML file is required on the bus master side. This file can be downloaded fromour website (www.inficon.com: CDG045D, CDG100D).

Product Identification2

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space provided
below.

tirb62e1(2020-01)

CDGxxxD.cp

Validity

This document applies to products of the CDG045D and CDG100D series with
Profinet interface.
This manual is based on firmware version 1.0.0.0.
Part numbers of standard products are indicated below. OEM products have otherpart numbers and different parameter settings (e.g. factory setting of setpoint) as
defined in the corresponding ordering information.

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document correspond to CDG045D gauges with the DN 16 ISO-KF vacuum connection. They apply
to the other gauges by analogy.

Trademarks

Profinet®
Sky

Patents

EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085

tirb62e1(2020-01)

CDGxxxD.cp®

PROFIBUS Nutzerorganisation e.V. (PNO), Germany
INFICON GmbH

3

Contents
General Information
Intended Use
Profinet –Interface
Product Identification
Validity
Trademarks
Patents

2
2
2
2
3
3
3

1 Technical Data

5

2 Interface Connection

6

3 Operation
3.1 Introduction
3.2 Front View
3.3 Indicators and Switches
3.3.1 <NET> LED
3.3.2 <MOD> LED
3.3.3 <LA> LED (<IN> Port)
3.3.4 <LA> LED (<OUT> Port)

8
8
8
9
9
9
9
9

4 Object Structure
4.1 Object Dictionary structure
4.2 Input Area (0x6000…0x6FFF)
4.2.1 Input Capacitance Diaphragm
4.2.2 Configuration Capacitance Diaphragm
4.2.3 Information Common Capacitance Diaphragm
4.2.4 Information Capacitance Diaphragm
4.2.5 Command Zero Adjust
4.2.6 Input Common
4.2.7 Full Scale Adjust
4.2.8 Input Trip Point 1
4.2.9 Configuration Trip Point
4.2.10 Configuration Trip Point 1
4.2.11 Input Trip Point 2
4.2.12 Configuration Trip Point 2
4.2.13 Exceptions
4.2.14 Active Exception Status
4.2.15 Active Device Warning Details
4.2.16 Active Device Error Details
4.2.17 Active Global Device Warning Details
4.2.18 Active Global Device Error Details
4.2.19 Trip Point Output All
4.2.20 Configure Device
4.2.21 Information Device
4.2.22 Device Reset Command
4.2.23 Cyclic Data
A: Literature

10
10
11
11
11
12
12
12
13
13
13
14
14
15
15
16
16
16
17
17
17
18
18
18
19
19
20

For cross-references within this document, the symbol (→  XY) is used, for crossreferences to further documents, listed under literature, the symbol (→  [Z]).

4

tirb62e1(2020-01)

CDGxxxD.cp

1 Technical Data
For further technical data refer to the appropriate documents:
CDG045D
CDG100D

Profinet interface

Communication protocol
Data rate
Node address
Physical layer
Profinet connector
Cable
Cable length
Cyclic data
Acyclic data

tirb62e1(2020-01)

CDGxxxD.cp→  [1]→  [2]

protocol specialized for Profinet
100 Mbps
Explicit Device Identification
100BASE-Tx (IEEE 802.3)
2 × RJ45, 8-pin (socket)<IN>:
Profinet input<OUT>: Profinet output
shielded, special Ethernet Patch Cable(CAT5e quality or higher)≤100 m
IO-dataconfiguration, responses and information5

2 Interface Connection
Making a Profinet interface cable

For operating the temperature controlled CDGxxxD gauge via Profinet, twointerface cables conforming to the Profinet standard are required.
If no such cables are available, make two according to the following indications.

Cable type

Ethernet Patch Cable Cable (CAT5e quality) with FCC68 connector.

Procedure Pin assignment:
FCC68, 8-pin,male, soldering side

8

1

Pin

SignalDescription

1
2
3
4
5
6
7
8

TD+
TDRD+
nu
nu
RDnu
nu

Transmission Data +Transmission Data Receive Data +not used
not used
Receive Data not used
not used

Pin assignment of the D-sub 15-pin sensor connector according to therespective operating manual (→  [1], [2]).

6tirb62e1(2020-01)

CDGxxxD.cp

 Plug the Profinet (and sensor) cables connector into the gauge: From theprevious device the cable connected to OUT port has to be connected to
the CDGxxxD <IN> port. And the cable from the CDGxxxD <OUT> port has
to be connected to the next device's <IN> port.

tirb62e1(2020-01)

CDGxxxD.cp

7

3 Operation
3.1 Introduction

Via the Profinet interface, the following and further data are exchanged in thestandardized Profinet protocol:•

Pressure reading•

Pressure unit (Torr, mbar, Pa)•

Zero adjustment•

Status and error messages•

Status of the switching functions•

Set Trip Point for switching functions

Caution
Data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and Profinet interface or the diagnostic port may resultin incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and Profinet interface or the diagnostic
port.

3.2 Front View8

tirb62e1(2020-01)

CDGxxxD.cp

3.3 Indicators and Switches
3.3.1 <NET> LED

Displays the network status.
Color

LED State
off

green

red

3.3.2 <MOD> LEDgreen

3.3.3 <LA> LED (<IN> Port)

1 flashConnection with IO Controller established
IO Controller in STOP state or IO data bad
IRT synchronization not finished

blinking

Used by engineering tools to identify the node on the
networkonConnection with IO Controller established
IO Controller in RUN stateon

Major internal error (the indication is combined with a red
module status LED)

1 flash

Station name not set

2 flashes

IP address not set

3 flashes

Expected Identification differs from read identification

LED StateIN

No power OR Module in SETUP or NW_INIT stateonModule has shifted from the NW_INIT state

1 flash

red

on

red/
green

alternating(red/green)Color

LED State
off

green

blinking
on

3.3.4 <LA> LED (<OUT> Port)LA
OUT

Diagnostic event(s) present

Device in state Exception
Major internal error (this indications combined with a red
network status LED)
Firmware update. Do NOT power off the module. Turning
the module off during this phase could cause permanent
damage.

Description
Port not connected or no power applied to device
Port connected and communication active
Port connected but no communication

Displays the output status.
Color

LED State

green

blinking

offon

CDGxxxD.cp

Description

off

Displays the input status.
LA(2020-01)

No power
No connection with IO Controller

Displays the module status.
Colortirb62e1

Description

Description
Port not connected or no power applied to device
Port connected and communication active
Port connected but no communication9

4

Object StructureThis chapter describes the acyclic parameters.

4.1 Object Dictionary
structure

The parameter for the objects are in groups. They can be accessed with the acyclic
read and write commands. To read this parameters the Slot has to be set to zeroand the Subslot to one. The Index can be found for each individual parameter
blow.
Slot = 0
Subslot = 1
Index = see individual Parameter
Explanations for the abbreviations in the columns of the tables are given below:

10

Abbr.

Description

Accessparameter read/write access•

RO: object can only be read by the SDO service•

RW: object can be both read and written by the SDO service

Index

Index for the parameter (Slot = 0, Subslot = 1)

NV

Nonvolatile; attribute value is maintained through power cycles

ObjectAbstract representation of a particular component within a device,
which consists of data, parameters, and methods.

Type

Data Type•

BOOL, BIT = 1 bit. Boolean (0 = false, 1 = true)•

USINT, BYTE = 8 bit. Unsigned Byte•

UINT = 16 bit. Unsigned integer value•

UDINT = 32 bit. Unsigned integer value•

ULINT = 64 bit. Unsigned integer value•

REAL = 32 bit. Floating point•

V_STRING = 8×n bit. Visible string (1 byte for character)•

BYTE_ARR(n) = Array of bytes with n bytes

tirb62e1(2020-01)

CDGxxxD.cp

4.2 Input Area
(0x6000…0x6FFF)
4.2.1 Input Capacitance
Diaphragm

Index

DataType

AccessName

0x0100

REAL

NV

RO

Sensor Value

0x0101

BOOL

RO

Reading Valid0x0102BOOL

RO

Overrange Exceeded

0x0103

BOOL

RO

Underrange Exceeded

Index 0x0100

The corrected, converted, calibrated final analog input value of the sensor.

Index 0x0101

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Index 0x0102

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Index 0x0103

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid

4.2.2 Configuration
Capacitance DiaphragmIndex 0x0110

0

No Underrange Exceeded1

Underrange Exceeded

Index

DataType

NV

AccessName

0x0110

REAL

x

RW

Offset Customer Specific0x0111

USINT

x

RW

Filter

0x0112

USINT

x

RW

Fieldbus Override

Customer-specified Offset which shall be added to the Value parameter of theAnalog Input Sensor instance.
The Offset Customer Specified parameter is a value added from a Zero Adjust
Service to the reported pressure value.
Value shall be calculated as:
Value
*)
**)
***)

Index 0x0111(2020-01)

CDGxxxD.cp= Reported pressure value + AZO

**)

+ OCS

***)

Value (Index 0x0100)
Accumulated Zero Offset (Index 0x0142)
Offset Customer Specified (Index 0x0110)

Filter0
1
2

tirb62e1*)

Dynamic (factory default)
Fast
Slow
11

Index 0x0112

Fieldbus Override
01

4.2.3 Information Common
Capacitance DiaphragmIndex 0x0142

4.2.4 Information Capacitance
Diaphragm

Index 0x0140

Setpoints are active if cyclic data communication isestablished
Setpoints are always active

Index

DataType

NV

AccessName

0x0142

REAL

x

RO

Accumulated Zero Offset

Accumulated Zero Offset: An amount added prior to Gain to derive Value. Result of
Zero Adjust Command (accumulated value).

Index

DataType

AccessName

0x0140

UINT

RO

Sensor Warning

0x0141

UINT

RO

Sensor Error

Sensor Warnings
Bit 0
Bit 1…8
Bit 9
Bit 10…15

Index 0x0141

Command Zero Adjust

Not at temperature
0Electronics Warning
0

Sensor Errors
Bit 0…8
Bit 9
Bit 10…15

4.2.5

NV

0
Electronics Failure
0

Execution of this command will start a Zero Adjust operation.
The zeroing function is locked in order for operating errors to beprevented, therefore see the operation instructions of the vacuum
gauges, refer to the appropriate documents (→  [1], [2]).

Index 0x0170

Index 0x0171

Index

DataType

0x01700x01710x0172

AccessName

BYTE_ARR(6)RW

Command

BYTE

RO

StatusBYTE_ARR(3)RO

Response

Command
Byte 0

0: Zero adjust with no offset

Byte 1

Index of the Sub Sensor Instance (always 1)

Byte 2…5

Offset value (Data format: REAL, always 0x00 0x00
0x00 0x00)

Status (supported values)
0
1
2
3
255

12

NV

Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply
available
Last command completed, errors present, reply available
Command is executing

tirb62e1(2020-01)

CDGxxxD.cp

Index 0x0172

4.2.6 Input Common

Index 0x0200

4.2.7

Full Scale Adjust

Index 0x0273

Index 0x0274

Response
Byte 0See Index 0x0171

Byte 1

UnusedByte 2

0: Zeroing successful
1: Zeroing failed; out-of-range
2: Zeroing failed; cumulative out-of-range
3: Zeroing failed: measurement invalid
254: No previous Zero Adjust command issued

Index

DataType

0x0200

REAL

Index 0x0800

Index

DataType(2020-01)

CDGxxxD.cp

RO

Sensor Value

AccessName

0x0273

V_STRING(6)RW

Command

0x0274

BYTE

RO

Status

0x0275

V_STRING(3)RO

Response

NV

Command
Byte 00: Full Scale Adjust

Byte 1

2: Index of the Sub Sensor Instance (always 2)

Byte 2…5

0: Full Scale value (Data format: REAL, always
0x00 0x00 0x00 0x00)

Status (supported values)
Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply
available
Last command completed, errors present, reply available
Command is executing

Response
Byte 0See Index 0x0274

Byte 1

0: Unused

Byte 20: Full Scale Adjust successful
1: Full Scale Adjust failed: out-of-range
254: No previous Full Scale Adjust command issued

Index

DataType

0x08000x0801

NV

Access

Name

BOOL

RO

Status High Trip

BOOL

RO

Status Low Trip

Status High Trip
01

tirb62e1

Name

Execution of this command will start a Full Scale Adjust operation.

3
255

4.2.8 Input Trip Point 1

Access

The corrected, converted, calibrated final analog input value of the sensor.

0
1
2

Index 0x0275

NVHigh Trip not assert
High Trip assert

13

Index 0x0801

Status Low Trip
01

4.2.9 Configuration Trip Point

Low Trip not assert
Low Trip assert

The High Trip Point is calculated by:*)High Trip Point = Value × Percentage*)

Value from Piezo Sensor (Index 0x0200)**)

Percentage High Trip Source (Index 0x0828)**)

In this case, the High Trip Point value is automatically updated by the device itself.
Any user-written value to the parameter High Trip will be refused.
Usage of High Trip Point is only recommended for measurement range
1000 Torr or 1100 mbar.
The Low Trip Point is a fixed value:
The value defined in Low Trip Point Limit is compared with the pressure valuereferenced by the Source Index parameter.
Measurement signal(Pressure p)

High Trip
Hysteresis

High Trip Point

Low Trip
Hysteresis

Low Trip PointTime tinactive

4.2.10 Configuration Trip
Point 114

activeinactive

activeinactive

Calculating the High Trip Point and Low Trip Point → chapter 4.2.9.
Index

DataType

NV

AccessName

0x0820

BOOL

x

RO

High Trip Enable

0x0821

BOOL

x

RO

Low Trip Enable

0x0826

REAL

x

RO

High Trip Point Limit

0x0828

REAL

x

RW

Percentage High Trip Source

0x0829

REAL

x

RW

Low Trip Point Limit

0x082C

REAL

x

RO

High Trip Hysteresis

0x082D

REAL

x

RW

Low Trip Hysteresis

tirb62e1(2020-01)

CDGxxxD.cp

Index 0x0820

High Trip Point01

Index 0x0821

Low Trip Point0
1

High Trip Point Limit: High limit to trigger trip point condition if pressure value of thedevice (Index 0x0100) is above this limit.

Index 0x0x0828

Percentage of High Trip Source: Percentage of Piezo Sensor Value (Index 0200) in[%].

Index 0x0829

Low Trip Point Limit: Low limit to trigger trip point condition if pressure value of thedevice is below this limit.

Index 0x082C

High Trip Hysteresis: Hysteresis value for High Trip Point.

Index 0x082D

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Index 0x0900

Index

DataType

0x09000x0901

Index 0x0901

Index 0x0920

Name

BOOL

RO

Status High Trip

BOOL

RO

Status Low Trip

High Trip not assert
High Trip assert

Low Trip not assert
Low Trip assert

Calculating the High Trip Point and Low Trip Point → chapter 4.2.9.
Index

DataType

NV

AccessName

0x0920

BOOL

x

RO

High Trip Enable

0x0921

BOOL

x

RO

Low Trip Enable

0x0926

REAL

x

RO

High Trip Point Limit

0x0928

REAL

x

RW

Percentage High Trip Source

0x0929

REAL

x

RW

Low Trip Point Limit

0x092C

REAL

x

RW

High Trip Hysteresis

0x092D

REAL

x

RW

Low Trip Hysteresis

High Trip Point
01

CDGxxxD.cp

AccessStatus Low Trip
01

4.2.12 Configuration Trip
Point 2

NV

Status High Trip01(2020-01)

DisableEnableIndex 0x0826

4.2.11 Input Trip Point 2

tirb62e1

DisableEnableDisableEnable15

Index 0x0921

Low Trip Point0
1

DisableEnableIndex 0x0926

High Trip Point Limit: High limit to trigger trip point condition if pressure value of thedevice (Index 0x0100) is above this limit.

Index 0x928

Percentage of High Trip Source: Percentage of Piezo Sensor Value (Index 0200) in[%].

Index 0x929

Low Trip Point Limit: Low limit to trigger trip point condition if pressure value of thedevice is below this limit.

Index 0x092C

High Trip Hysteresis: Hysteresis value for High Trip Point.

Index 0x092D

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

4.2.13 Exceptions
4.2.14 Active Exception Status

Active Exception Status

4.2.15 Active Device Warning
Details

Index 0x0041

Index 0x0042

16

Index

DataType

0x040

USINT

NV

AccessName

RO

ActiveException Status

Active Exception Status
Bit 0

Device Warning

Bit 1

Manufacturer Warning

Bit 2

Device Error

Bit 3

Manufacturer Error

Bit 4…70

The "active device warning details" parameter describes the warning state of thecomplete device.
Index

DataType

AccessName

0x0041

UDINT

NV

RO

Active Device Warning
Details

0x0042

UDINT

RO

Active Manufacturer
Warning Details

Active Device Warning Details
Bit 0

Not at temperature

Bit 1

0

Bit 2

Electronics warning

Bit 3…31

0

Active Manufacturer Warning Details
Bit 0

0

Bit 1

Atmosphere Pressure out of Range

Bit 2…31

0

tirb62e1(2020-01)

CDGxxxD.cp

4.2.16 Active Device Error
Details

Index 0x0043

Index 0x0044

The "active device error details" parameter describes the error state of the complete device.
Index

DataType

AccessName

0x0043

UDINT

RO

Active Device Error Details

0x0044

UDINT

RO

Active Manufacturer Error
Details

Active Device Error Details
Bit 0…1

0

Bit 2

Electronics Error

Bit 3…31

0

Active Manufacturer Error Details
Bit 0…31

4.2.17 Active Global Device
Warning Details

Index 0x0045

4.2.18 Active Global Device
Error Details

Index 0x0047

Index 0x0048

tirb62e1(2020-01)

CDGxxxD.cp

0

The "active global device warning details" parameter describes the warning state of
the complete device.
Index

DataType

AccessName

0x0045UDINT

RO

Active Global Device
Warning Details

0x0046

UDINT

RO

Active Global Manufacturer Warning Details

NV

Active Global Device Warning Details
Bit 0…31

Index 0x0046

NV0

Active Global Manufacturer Warning Details (Index F386)
Bit 0Internal Communication Exception (between
ProfiNet-Controller and Device-Application)

Bit 1…20

Bit 3

EEProm CRC warning

Bit 4…31

0

The "active global device error details" parameter describes the error state of thecomplete device.
Index

DataType

0x00470x0048NV

Access

Name

UDINT

RO

Active Global Device Error
Details

UDINT

RO

Active Global
Manufacturer Error Details

Active Global Device Error Details
Bit 0…20

Bit 3

EEProm Exception

Bit 4…31

0

Active Global Manufacturer Error Details
Bit 0Internal Communication Exception (between ProfinetController and Device-Application)

Bit 1…31

0
17

4.2.19 Trip Point Output All

Index 0x0006

Index

DataType

0x0006UDINT

NV

AccessName

RO

Trip Point Output All
Instance

Status of Trip Point instances.
Trip Point Output All Instance

4.2.20 Configure Device

Index 0x0021

Bit 0
Bit 1
Bit 2
Bit 3
Bit 4…31

Status High Trip (0x0800)
Status Low Trip (0x0801)
Status High Trip (0x0900)
Status Low Trip (0x0901)
0

Index

DataType

NV

AccessName

0x0021

UINT

x

RW

Data Units Enum

Data Unit for Input Sensor as Enum to have a list of possible values.
Data Units
0x01
0x04
0x05

4.2.21 Information Device

Index 0x0049

Pascal
mbar
Torr

Index

DataType

0x0049UDINT

0x004A

BYTE

0x004C

V_STRING

0x004D
0x007C

NV

AccessName

RO

Measurement Principle

RO

Number of Sensors

RO

SW Version VPG PCB

UINT

RO

Total time powered

UDINT

RO

Serial numberxMeasurement principle assigned to the object instance.
The most significant nibble of the parameter represents the sensor type of the first
sensor module; the second most significant nibble of the parameter represents thesensor type of the second sensor module, and so forth.
Measurement Principle
1
2
3
4
5

18

Capacitance Manometer
Piezo
Heat Transfer
Cold Cathode
Hot CathodeIndex 0x004A

Number of sensors for pressure measurement (always 2).

Index 0x004D

Time the device is powered on in hours.

tirb62e1(2020-01)

CDGxxxD.cp

4.2.22 Device Reset Command

Execution of this command causes the device to emulate a complete power cycle.
As consequence of an reset all following devices are disconnected fromthe network.
There are two versions of this command:Index 0x0082•

Standard reset (as described above)•

Factory reset (as described above, but additionally, all parameters are restored
to as-shipped defaults).

Index

DataType

AccessName

0x0082

BYTE_ARR(6)NV

RW

Command0x0083

BYTE

RO

Status

0x0084

BYTE_ARR(2)RO

Response

A device reset is initiated when the following byte sequence is sent.
Command
Byte 0
Byte 1
Byte 2Byte 3
Byte 4
Byte 5

Index 0x0083

Status (supported values)
0
1
2
3
255

Index 0x0084

0x74
0x65
0x73
0x65
0x72
0x00 = Standard reset, 0x66 = Factory Reset

Reserved
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 0See Index 0x0083

Byte 1

0: not used

4.2.23 Cyclic Data
Telegram 1

Telegram 2

Telegram 3

tirb62e1(2020-01)

CDGxxxD.cp

Data

DataType

Combination Gauge Active Value

REAL

Combination Gauge Active Sensor Number

UINT

Active Exception Status

USINT

Trip Point Output All Instance

UDINT

Data

DataType

Combination Gauge Active Value

REAL

Active Exception Status

USINT

Data

DataType

Combination Gauge Active Value

REAL

Active Exception Status

USINT

Trip Point Output All Instance

UDINT

19

Telegram 4

Telegram 5

A:

20

Literature

Data

DataType

Combination Gauge Active Value

REAL

Data

DataType

Active Exception Status

USINT

 [1]

www.inficon.com
Operating Manual
Sky CDG045D
tina51d1 (German)
tina51e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [2]www.inficon.com
Operating Manual
Sky CDG100D
tina52d1 (German)
tina52e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [3]www.profibus.com
Profibus user organization

 [4]IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications

 [5]

IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3 [6]SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATORNETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES [7]SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers

tirb62e1(2020-01)

CDGxxxD.cp

Notestirb62e1(2020-01)

CDGxxxD.cp

21Original: English

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com