w w w . m k s i n s t . c o m

Pressure & Vacuum Measurement
Solutions

E27F
Heated (45°C) Absolute Baratron® capacitance
Manometer with Etch Sensor
The E27F is the recommended solution for use in etch processes. MKS has implemented
solutions within the manometer’s pressure sensing element to minimize the effects ofprocess byproducts and process gases. For processes that generate large quantities ofcondensable byproducts, MKS recommends the etch baffle that significantly reduces theability of byproducts to reach the sensor, minimizing process-induced zero drift. For very low
pressure processes where fluorine burn-in is the main issue, MKS recommends the fluorine
friendly etch baffle offering the ultimate in short- and long-term stability in fluorine chemistry.
The E27F is temperature-controlled to 45°C, accurate to 0.12% of Reading and includes
updated temperature control electronics to provide superior long-term stability andrepeatability. Optional heater and temperature status LED/switches indicate that the heater(which maintains the sensor temperature to 45°C) is in control. The E27F is available in
Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower processpressures.
Based on established Baratron capacitance manometer technology, the sensor’s wetted
surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainlesssteel package provides a cleanroom-compatible product. The product is interchangeablewith earlier 127, 627B, and E27B Baratron capacitance manometers and can be used with
MKS power supplies, display units and pressure controllers, or the user’s compatible power
supply/readout devices.

Features & Benefits
Accurate• Excellent long-term stability• Percent of Reading accuracy for more
precise output signal in lower pressure 		
ranges• Full Scale ranges as low as 20 mTorr(0.03 mbar) for precise measurement of 		low pressure processes• Measures total pressure directly,
independent of gas composition
Robust• All-Inconel corrosion-resistant wetted
surfaces• Patented fluorine friendly etch baffle
available upon request• Integrated sump (US patent #5,822,685)
provides particle protection• Faster warm-up time
• Visual and electrical status oftemperature and heater control circuit• High overpressure rating for improved
reliability
Compatible• Cleanroom-compatible stainless steel
package• Compatible with earlier Baratroncapacitance manometers, MKS power 		supply/readout modules, and pressure 		controllers

Specifications andOrdering Information
Full Scale Ranges
0.02, 0.05, 0.1, 0.25, 1, 2, 10, 20, and 100 Torr
Resolution
0.001% of Full Scale (0.002% of Full Scale for 0.02 and 0.05 Torr)		
Accuracy
0.12% of Reading 0.15% for 0.25, 0.1, and 0.05 Torr, 0.25% for 0.02 Torr					(including non-linearity, hysteresis, and non-repeatability)
Temperature CoefficientsZero
0.002% of Full Scale/°C for 1 - 100 Torr ranges; 0.005% of Full Scale/°C for 0.25 and 				0.1 Torr, 0.015% of Full Scale/°C for 0.05 Torr, 0.03% of Full Scale/°C for 0.02 Torr	Span
0.02% of Reading/°C
Ambient Operating Temperature
15°C to 40°C
Volume6.3 ccWarm-Up Time
2 hours for 1 Torr and higher, 4 hours for < 1 Torr				
Overpressure Limit
45 psia (310 kPa) or 120% Full Scale, whichever is greater
Materials Exposed to Gases	Inconel®
Input Power Required±15 VDC ±5% @ 0.25 Amps (max.)
Output SignalPressure: 0 to +10 VDC into >10K Ω load
Optional Features LED’s and Switches Temperature status: one semiconductor switch will turn “ON” and corresponding green LED
will be “ON” when the instrument is at temperature.
Heater status: second semiconductor switch will turn “OFF” when heater failure occurs and		corresponding bi-color LED will be blinking red, otherwise light will remain green.
Fittings
Standard: 1/2'' (12.7 mm) OD tube. Optional: 8 VCR® and 8 VCO® female, NW16 KF andNW25 KF, 1.33'' OD CF and 2.75'' OD CFCompliance	CE
Specifications for Semiconductor Switch
Current Charge Capacity
120mA max.
Switch on Resistance
20 Ω max. @ 120mA, 50°C
Open Circuit Voltage
28V max.

Dimensional Drawing —Note: Unless otherwise specified,dimensions are nominal values in inches(mm referenced).

E27F - 12/18© 2013-2018 MKS Instruments, Inc.
All rights reserved.

Ordering Code Example: E27F01TBC1B	
CodeConfiguration
E27F
E27F
E27F
Pressure Range Full Scale - Torr
0.02
U2T
U5T
0.05
.1T			
0.1
RET			
0.25
01T			
101T
02T			
211T			1021T			
2012T100FittingsA1/2'' (12.7 mm) OD tube
B
8 VCR femaleC
1.33'' OD CF	NW16 KF (range < 5000 Torr)
D			B
8 VCO femaleEL
2.75'' OD CF	NW25 KF (range < 5000 Torr)Q
Accuracy (see specifications for applicability)
0.12% of Reading	C
0.15% of ReadingD			C
0.25% of Reading
EOptions	Standard Configuration, vertical calibration
1			
Optional Temperature/Heater Status, vertical calibration
2	Standard Configuration, horizontal calibration
5			1		 (ranges < 1 Torr only)				
Optional Temperature/Heater Status, horizontal calibration 6		 (ranges < 1 Torr only)
Connector
15 pin Type “D” with Thread LockBB
15 pin Type “D” with Slide LockP

MKS Instruments, Inc.
Global Headquarters

MKS Instruments, Inc.		
Pressure & Vacuum Measurement Solutions

2 Tech Drive, Suite 201
Andover, MA 01810

Six Shattuck Road
Andover, MA 01810

Tel:  978.645.5500
Tel:  800.227.8766 (in U.S.A.)
Web: www.mksinst.com

Tel:  978.975.2350

Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local
government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark
and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. VCR® is a registered trademark of Swagelok®
Co., Solon OH. Inconel® is a registered trademark of Inco Alloys International, Inc., Huntington, WV.