఩⎌⑧ㇿⲬ㓗໩∸࢙ࣝࢠࢹࣞࢼࢠࢪࡡࡒࡴࡡ㧏ㄇ㞹⋙㉰᰹Ꮔࣁࢴࣆ࢒ᒒࡡ๭⿿Creation of super-latttice buffer layer with high dielectrics constant forenvironmentally-friendly oxide electronics
௥⾪◂✪⩽᮶ாᕝᴏኬᏕ⥪ྙฦᯊᨥᥴࢬࣤࢰ࣭ຐᡥ  ᮄཾ㈴⣎&HQWHUIRU$GYDQFHG0DWHULDOV$QDO\VLV7RN\R,QVWLWXWHRI7HFKQRORJ\
5HVHDUFK$VVRFLDWH7DNDQRUL.LJXFKL⌟ᅹ㸡ᠻࠍࡡ⏍Ὡࡡ࠵ࡼࡹࡾฦ㔕࡞࢙ࣝࢠࢹࣞࢼࢠࢪ࠿୘ྊḖ࡛࡝ࡽ㸡ࢸࣁ࢕ࢪࡡࡈࡼ࡝ࡾᑚᆵ໩㸡㧏㞗✒໩㸡┤࢙ࢾ࣭ࣜ࢟໩࠿ᚪ㡪ࡡㄚ㢗࡛࡝ࡖ࡙࠷ࡾ㸣ࡆࡿࡼࡡこヴࡢ㸡௙᪁࡚⎌⑧ㇿⲬࡡ๎΅࡞ࡗ࡝࠿ࡾࡒࡴ㸡౼ฺࡈࡡྡྷ୕࣬⎌⑧ᨭၻ࡛ୌ▴஦㫵ࡡຝᯕࢅࡵࡒࡼࡌ㸣ࡐࡡࡒࡴ࡞㸡6L ࢸࣁ࢕ࢪ࡞⛸ࠍࡡ㓗໩∸ࢅ⼝ྙࡌࡾࡆ࡛࡞ࡻࡖ࡙㸡ᚉᮮࡡ 6L ࢸࣁ࢕ࢪ࡚ࡢ࡝ࡊ࠻࡝࠷㧏ᶭ⬗ᛮ࠿㐡ᠺࡈࡿࡗࡗ࠵ࡾ㸣6L ࢸࣁ࢕ࢪࡢ㸡㞹⏲ຝᯕࢹࣚࣤࢩࢪࢰ࣭ )(7 ࢅ࣭࣊ࢪ࡞ࡊ࡙࠽ࡽ㸡)(7 ࡞Ὦࡿࡾ㞹Ὦโᚒࡡࡒࡴࡡࢣ࣭ࢹ⤧⦍⭯㸤6L ✒ᒒ⏲㟻࠿᭩㔔こ㒂న࡚࠵ࡾ㸣ࢸࣁ࢕ࢪࡡᛮ⬗ࡢࡆࡡ⏲㟻ࡡ㞹ポ≁ᛮࡡ┘ర࡞࠾࠾ࡖ࡙࠷ࡾ㸣ᮇ◂✪ࡢ㸡=U2㸡7L2 ࢅⅴᏄ࡚ࣝ࣊ࣜ㉰᰹Ꮔ໩ࡊࡒ᩺ࡊ࠷ࢣ࣭ࢹ⤧⦍⭯ࡡ๭⿿ࢅ┘ᣞࡊ㸡ࢣ࣭ࢹ㒂࡫ࡡ㞹⏲༰ຊຝ⋙ࡡኬᖕ࡝ྡྷ୕࡞ࡻࡽ㸡┤࢙ࢾ࣭ࣜ࢟໩࣬⎌⑧ㇿⲬ๎΅ࡡࡒࡴࡡ఩㞹ᅸ㥉ິᆵ 6L ࢸࣁ࢕ࢪࡡᇱ♇࡛ࡊ࡙♣ఌ࡫ࡡ㈁⊡࠿᭿ᙽࡈࡿࡾ㸣It becomes important that the down sizing of electronics devices, which requires lower operating voltage. This study aims thecreation of next-generation gate dielectrics with higher dielectric constant than existing one in order to satisfy the demand. Zirconia(ZrO2) is a promising material that has high dielectric constant (~25), wide energy band gap (~5.6eV), large band offset with Siconduction band (~1.4eV), thermal and chemical stability, and so on. Furthermore, our previous studies shows that zirconia has
excellent compatibility with Si wafer; 1. Zirconia can be easily epitaxially grown on Si(001) wafer through amorphous-like Si oxide
layer within 2nm. 2. Pure zirconia without any stabilizing dopant, which shows monoclinic phase in the thicker zirconia film, shows
tetragonal phase in the thickness less than 3nm. Thus, zirconia is suitable for the gate dielectrics. The oxide electronics devices such as
ferroelectric memory, however, will be operated at lower voltage if the gate dielectrics with higher dielectric constant above 25 isobtained. On the other hands, titania (TiO2), has higher dielectric constant as much as 80. The leakage current of titania, however, istoo high to be used as gate dielectrics because of little band offset with Si. Then, I have given grate attention to the combination ofzirconia and titania in a super-lattice structure. The point of the idea is to take advantage of the high dielectric constant of titania and thehigh electric insulation (low leakage current) of zirconia. This study will put the oxide electronics devices with lower operative voltage
into practice. Therefore, it will contribute to reduce not only the downsizing of devices, but also the effects on the environment.

◂✪┘Ⓩ 㓗໩∸࢙ࣝࢠࢹࣞࢼࢠࢪ࡞࠽࠷࡙㸡ᙁㄇ㞹మ⷟⭯➴ࡡ㞹Ꮔ࣬කᏕࢬ࣐ࣚࢴࢠ⷟⭯࡛ࢨࣛࢤࣤᇱᯀ࡛ࡡ㛣ࡡ㸡㞹ポⓏ࣬⤎ᬏᏕⓏ࡝Ḗ㝏ࢅྊ⬗࡝㝀ࡽᢒโࡊ࡝࠿ࡼ୦⩽ࢅ᥃ྙࡌࡾࡒࡴ࡞ࣁࢴࣆ࢒ᒒ偆⥾⾢ᒒ假࡛࿣ࡣࡿࡾࢣ࣭ࢹ⤧⦍⭯࠿✒ᒒࡈࡿ࡙࠷ࡾ㸣6L  ᇱᯀ୕࡫ࡡ࢙ࣅࢰ࢞ࢨࣔࣜᠺ㛏㸡㧏࠷セㄇ㞹⋙偆௧ୖㄇ㞹⋙࡛⾪エ假㸡㧏࠷⤧⦍ᛮ㸡⷟⭯ᇱᯀ㛣ࡡඔ⣪ࡡ┞பᣉᩋࣇࣞࢴࢠ㸡⇍Ⓩ࣬໩
ᏕⓏᏭᏽᛮ࡝࡜ࡡびⅤ࠾ࡼ㸡⏞ㄫ⩽ࡢ࢙ࣅࢰ࢞ࢨ
ࣔࣜ =U2偆ࢩࣜࢤࢼ࢓假ࣁࢴࣆ࢒ᒒࡡ᭯ຝᛮࢅずฝࡊ࡙ࡀࡒ㸣ࡊ࠾ࡊ㸡㧏Ὼᠺ⭯㐛⛤࡞࠽ࡄࡾ 6Lᇱᯀ⾪㟻ࡡ㓗໩࡞ࡻࡖ࡙㸡QP ⛤ᗐࡡ 6L 㓗໩⭯ࡡ්ᠺ㛏࠿㑂ࡄࡼࡿ࡝࠷㸣ࡆࡿࡢ㸡=U2 ࡡࡵࡗ㧏ㄇ㞹⋙ ࠤ ࢅず࠾ࡄ୕ 6L 㓗໩⭯ ࠤ ࠿┞ウࡊ࡙ࡊࡱ࠷㸡=U2 ࡡ≁ᚡࢅ⏍࠾ࡎ࡝ࡂ࡝ࡖ࡙࠷ࡾ㸣ࡻࡖ࡙㸡=U2 ࡡㄇ㞹⋙ࢅరࡼ࠾ࡡ᪁Ἢ࡚ྡྷ୕ࡈࡎࡾࡆ࡛࡚㸡6L 㓗໩⭯࡞ࡻࡾず࠾ࡄࡡㄇ㞹⋙఩ୖࢅ⿭ർࡌࡾࡆ࡛࠿ᚪこ࡚࠵ࡾ㸣ࡆࡡၡ㢗ࡢ㸡ࡆࡿ࠾
ࡼࡡ 6L ࠵ࡼࡹࡾࢸࣁ࢕ࢪࡡ㧏㞗✒໩㸡┤࢙ࢾ࣭ࣜ࢟໩࡞࡛ࡖ࡙ゆỬ࠿᛬ຸ࡚࠵ࡾ㸣ࡐࡆ࡚㸡ᮇ◂✪࡚ࡢ࣭ࣛࢠ㞹Ὦ࠿㧏ࡂ༟≺࡚ࡢ౐⏕࡚ࡀ࡝࠷࠿㟸ᖏ࡞㧏࠷ㄇ㞹⋙ ࠤ ࢅᣚࡖ࡙࠷ࡾ 7L2偆ࢲࢰࢼ࢓假࡞╌┘ࡊ㸡㧏࠷ㄇ㞹⋙࡛භ࡞㧏࠷⤧⦍ᛮࢅᣚࡗ =U2 ࡛࢙ࣅࢰ࢞ࢨࣔࣜெᕝ㉰᰹Ꮔࢅᙟᠺࡌࡾ
ࡆ࡛࡞ࡻࡖ࡙㸡=U2 ༟ᒒ࡚ࡢ࡝ࡊ࠻࡝࠷㧏ㄇ㞹⋙ࢅⓆ⌟ࡈࡎ㸡࠾ࡗ =U2 ࡡ㧏࠷⤧⦍ᛮ࡞ࡻࡖ࡙ 7L2ࡡ఩࣭ࣛࢠ≁ᛮࢅ࢜ࣁ࣭ࡌࡾࡆ࡛࠿ྊ⬗࡛࡝ࡾ㸣ࡱࡒ㸡=U2 ࡛ 7L2 ࢅ༟࡞✒ᒒࡌࡾࡡ࡚ࡢ࡝ࡂ㸡༟న᰹Ꮔ࠵ࡾ࠷ࡢⅴᏄᒒ࡚ࣝ࣊ࣜ㉰᰹Ꮔ໩ࡌࡾࡆ
࡛࡞ࡻࡖ࡙㸡偐ࡗࡡᮞᩩ┞பࡡḖⅤࢅ⿭࠷㸡ப࠷ࡡ㛏ᡜࢅᘤࡀฝࡌࡆ࡛㸡ࡈࡼ࡞㉰᰹Ꮔ໩࡞ࡻࡖ࡙
ิࡴ࡙Ⓠ⌟ࡌࡾのࡲ㉰᰹Ꮔຝᯕࡡ┞஋ຝᯕࢅࡠࡼࡖࡒࡵࡡ࡚࠵ࡾ㸣ᮇ◂✪ࡡᵕ࡞ࣁࢴࣆ࢒ᒒ㸡ࢣ࣭ࢹ⤧⦍⭯ࡡฦ㔕࡫ࡡ࢙ࣅࢰ࢞ࢨࣔࣜ㉰᰹Ꮔᵋ
㏸ࡡᚺ⏕㸡୩ࡦ࡞ =U2 ࡛ 7L2 ࡛ࡡ⤄ࡲྙࢂࡎࡢୠ
⏲Ⓩ࡞ず࡙ࡵ⾔ࢂࡿ࡙࠽ࡼࡍ㸡ᮇ◂✪࡞ࡢ≺๭Ⓩ࡝ᠺᯕ࠿᭿ᙽࡈࡿࡾ㸣 ࡐࡊ࡙㸡㧏ㄇ㞹⋙࢙ࣅࢰ࢞ࢨࣔࣜ㉰᰹Ꮔࣁࢴࣆ࢒ᒒࡡ๭⿿࡞ࡻࡖ࡙㸡6L ࢸࣁ࢕ࢪࡡ఩㞹ᅸ㥉ິ㸡㧏㞗✒໩࡞ࡻࡾ┤࢙ࢾ࣭ࣜ࢟㓗໩∸ࡡ๭⿿㸡ࡐࡊ࡙఩⎌⑧ㇿⲬ 6L ࢸࣁ࢕ࢪ๭⿿࡫ࡡ✲◒ཾࢅᢽࡂࡆ࡛ࢅ┘ᣞࡌ㸣◂✪⤊㐛偐㸣偏 ெᕝ㉰᰹Ꮔࡡྙᠺ ᮇ◂✪࡚ࡢ㸡偏㸣6L࢙ࢗࣀ࣭୕࡫ࡡ&H2<6=ெᕝ᰹Ꮔࡡష⿿㸡→ࡦ偐6L࢙ࢗࣀ࣭୕࡫ࡡ7L2&H2
<6=ெᕝ᰹Ꮔࡡష⿿㸡㸨㸣<6=6L→ࡦ&H26Lࣉࢷࣞ

⏲㟻ᵋ㏸โᚒ࡛6L㓗໩⭯ࡡᙫ㡢㸡㸩⏲㟻㞹ポ≁ᛮビ౮࡞㛭ࡊ࡙ㄢ࡬ࡒ㸣ิࡴ࡞&H2࡛<6=࠾ࡼ࡝ࡾ஦㔔ெᕝ㉰᰹Ꮔࡡష⿿ࢅ⾔ࡖࡒ㸣ᠺ⭯࡞ࡢ3/' 3XOVHG
/DVHU'HSRVLWLRQ Ἢࢅ౐⏕ࡊ㸡ᇱᯀῺᗐΥ㸡㓗⣪ฦᅸ[7RUUࡡ᮪௲ୖ࡚ୌᏽ᫤㛣ࡇ࡛࡞
&H2PRO<2Ꮽᏽ໩=U2 <6= ࢬ࣐ࣚࢴࢠࢪࢰ࣭ࢣ
ࢴࢹࢅஹப࡞วࡽ᭨࠻࡙྘QPࡡ&H2㸡<6=࠾ࡼ࡝ࡾ㸪࿔᭿ࡡ࢙ࣅࢰ࢞ࢨࣔࣜெᕝ㉰᰹Ꮔࡡᇼ✒ࢅ⾔ࡖࡒ㸣ᇱᯀࡢSᆵ  6L࢙ࢗࣀ࣭ࢅ౐⏕ࡊࡒ㸣ࡒࡓࡊ㸡+)ὑὯࡢ⾔ࡖ࡙࠷࡝࠷㸣ࡆࡿࡢ⏞ㄫ⩽ࡼ࠿ずฝࡊࡒࡆ࡛࡚࠵ࡾ࠿㸡⮤↓㓗໩⭯ࡡᏋᅹ࠿<6=⷟⭯ࡡ࢙ࣅࢰ࢞ࢨࣔࣜᠺ㛏ࢅಀ㐅ࡌࡾࡒࡴ࡚࠵ࡾ㸣ୌ᪁㸡
7L2&H2<6=ெᕝ᰹Ꮔᵋ㏸࡞ࡗ࠷࡙ࡵ⇆ᵕ࡞྘ᒒ㸪࿔᭿ࡡ࢙ࣅࢰ࢞ࢨࣔࣜெᕝ᰹Ꮔᵋ㏸ࡡష⿿ࢅムࡲࡒ㸣ྙᠺࡊࡒெᕝ㉰᰹Ꮔࡢ㸡;⥲ᗀᇡ㏣᰹Ꮔ✭㛣࣏ࢴࣅࣤࢡἪ㸡㧏ฦゆ⬗㞹Ꮔ㢟᚜㙶 +57(0 Ἢ࡞ࡻࡽ࣏ࢠࣞࠤࢻࢿࢪࢢ࣭ࣜࡡᵋ㏸ビ౮ࢅ⾔࠷㸡ᐖ㔖㞹ᅸ &9 →ࡦ㞹Ὦᐠᗐ̾㞹ᅸ -9 ῼᏽ࡞ࡻࡽ⏲㟻㞹ポ≁ᛮࡡビ౮ࢅ⾔ࡖࡒ㸣偐㸣偐 ;5'Ἢ࡞ࡻࡾ࣏ࢠࣞᵋ㏸ビ౮ ᅒ偏࡞&H2<6=ெᕝ᰹Ꮔࡡ;⥲ᗀᇡ㏣᰹Ꮔ✭㛣࣏ࢴࣈࢅ♟ࡌ㸣E  F ࡢධమാ D ࡡ࠹ࡔ&H2<6=→ࡦࣅ࣭ࢠ㎾എࢅᣉኬࡊࡒ࣏ࢴࣈ࡚࠵ࡾ㸣 D
࠾ࡼ6L࢙ࢗࣀ࣭࡞ᑊࡊ࡙<6=&H2࠷ࡍࡿࡵᒒࡵ
㒼ྡྷࡡ࢙ࣅࢰ࢞ࢨࣔࣜᠺ㛏ࡊ࡙࠷ࡾࡆ࡛࠿ฦ࠾ࡾ㸣E F ࡻࡽのࡲ⭯ⅲ᪁ྡྷ㸡㟻හ᪁ྡྷ࠷ࡍࡿࡵࣁࣜࢠ
ࡡ&H2<6=ࡡࣅ࣭ࢠన⨠࠿ኬࡀࡂንనࡊ࡮࡯Ᏸධ
࡞㔔࡝ࡖ࡙偏ᮇࡡࣅ࣭ࢠ࡞ず࠻ࡾ㸣ࡌ࡝ࢂࡔ࢙ࣅ
ࢰ࢞ࢨࣔࣜᠺ㛏ࡊࡒ&H2㸡<6=྘ᒒ࠿┞பࡡ᰹Ꮔ࣐
ࢪ࣏ࢴࢲࢅ⥾࿰ࡌࡾࡆ࡛࡝ࡂ༟న᰹Ꮔ࠿ኬࡀࡂን໩ࡊ࡙୦ᒒ࠿ெᕝ㉰᰹Ꮔࢅᙟᠺࡊ࡙࠷ࡾࡆ࡛ࢅ
♟ြࡊ࡙࠷ࡾ㸣࡝࠽㸡ഷ࠾࡚ࡢ࠵ࡾ࠿㒼ྡྷࡡࣅ࣭ࢠࡵ⌟ࡿ࡙࠷ࡾ㸣 ୌ᪁㸡ᅒ偐 D ࠾ࡼ6L࢙ࢗࣀ࣭࡞ᑊࡊ࡙<6=&H2࠷ࡍࡿࡵᒒࡵ㒼ྡྷࡡ࢙ࣅࢰ࢞ࢨࣔࣜᠺ㛏ࡊ࡙࠷ࡾ࠿㸡7L2ࡡࣅ࣭ࢠࡢୌวびᐳࡈࡿ࡝࠾ࡖࡒ㸣ࡻࡖ࡙㸡7L2ᒒࡢ㟸ᬏ㈹࠵ࡾ࠷ࡢኣ⤎ᬏ࡚࠵ࡾ࡛᥆ᏽ
ࡈࡿࡾ㸣7L2&H2<6=ெᕝ᰹Ꮔࡢ㸡 E ⭯ⅲ᪁ྡྷ࡚ࡢ
&H2࡛<6=ࡡࣅ࣭ࢠ࠿ฦ㞫ࡊ࡙࠽ࡽ࡮࡯ࣁࣜࢠࡡࣅ

偐㸣㸨+57(0Ἢ࡞ࡻࡾࢻࢿᵋ㏸ビ౮ ᅒ㸨࡞&H2<6=ெᕝ᰹Ꮔࡡ᩷㟻7(0᰹Ꮔാࢅ♟ࡌ㸣⏲㟻࡞ኣᑛࡡࣚࣆࢾࢪࡢヾࡴࡼࡿࡾ࠿㸡&H2<6=ᒒ࠵ࡒࡽ⣑QPࡡெᕝ㉰᰹Ꮔ࠿ᙟᠺࡈࡿ࡙࠷ࡾ㸣&H2<6=⏲㟻࡞ࡢ᰹Ꮔ࣐ࢪ࣏ࢴࢲ࠾ࡼ஢᝷ࡈࡿࡾ
࣐ࢪ࣏ࢴࢲ㌷నᐠᗐ࡞セ࡬࡙㌷నࡡᩐࡢࡢࡾ࠾࡞ᑛ࡝ࡂ偆ᅒ୯▦༰假㸡᰹Ꮔ࣐ࢪ࣏ࢴࢲ࠿⥾࿰ࡈࡿࡍᅒ偏ࡡ⤎ᯕ࡛ࡵᩒྙࡌࡾ㸣ᅒ偏࣭ࢠన⨠࡞㎾࠷㸣ࡗࡱࡽ⭯ⅲ᪁ྡྷࡡのࡲࡢ࡮࡯⥾࿰ࡈࡿ࡙࠷ࡾࡆ࡛ࢅ♟ࡊ࡙࠷ࡾ㸣ୌ᪁㸡 F 㟻හ᪁ྡྷ࡞࠽࠷࡙ࡵᏰධ࡚ࡢ࡝࠷࠿ࣅ࣭ࢠ࠿㧏ぽഁ࡞ฦ㞫ࡊ࠾ࡄ࡙࠷ࡾ㸣ࡻࡖ࡙㸡㟻හ᪁ྡྷ࡞ࡢ᰹Ꮔ࣐ࢪ࣏ࢴ
ࢲ࡞ࡻࡾのࡲ࠿よ⏻ࡊ࡙࠷ࡾ㸣ࡆࡡのࡲ⥾࿰ࡢ7L2
ᒒ࠿࢙ࣅࢰ࢞ࢨࣔࣜᠺ㛏ࡊ࡙࠷࡝࠷ࡆ࡛࡞㉫ᅄࡌࡾ࡛⩻࠻ࡼࡿࡾ࠿㸡
ࡆࡡᵕ࡝7L2ᒒࢅ௒ࡊ࡙&H2<6=ᒒ࠿࢙ࣅࢰ࢞ࢨࣔࣜᠺ㛏ࢅ⤾ࡄࡾࡡࡢᴗࡴ࡙⮾࿝῕࠷㸣࡝࠽㸡ᅒ偐 E ࡡ&H2࡞㔔࡝ࡖ࡙࠷ࡾ㉝࠷㗞࠷偐ᮇࡡࣅ࣭ࢠࡢ6Lࡡ⚏โཬᑏ࡚࠵ࡾ㸣ᅒ㸨 ୌ᪁㸡ᅒ㸩࡞♟ࡊࡒ7L2&H2<6=ெᕝ᰹Ꮔࡡ᩷㟻7(0᰹Ꮔാ࠾ࡼ7L2&H2<6=ᒒ࠵ࡒࡽ⣑QPࡡெᕝ㉰᰹Ꮔ࠿ᙟᠺࡈࡿ࡙࠷ࡾ㸣࡝࠽㸡྘ᒒࡡ⤄ᠺࡢ7(0('6Ἢ࡞ࡻࡽ☔ヾࡊࡒ㸣ࣚࣆࢾࢪࡢᅒ㸨࡛ኬᅒ偐ᅒ㸩ࡀ࡝㐢࠷ࡢヾࡴࡼࡿ࡝࠷࠿㸡7L2ᒒࡢ㒼ྡྷ࠿ኬࡀࡂ஗ࡿ࡙࠽ࡽ࢙ࣅࢰ࢞ࢨࣔࣜᠺ㛏ࡎࡍኣ⤎ᬏ⷟⭯࡛࡝ࡖ࡙࠽ࡽ㸡;5'ࡡ⤎ᯕᅒ偐࡚7L2࠿びᐳࡈࡿ࡝࠾ࡖࡒࡆ࡛࡛➚ྙࡌࡾ㸣ࡆࡡࡒࡴ࡞㸡&H27L2<6=㛣࡚᰹Ꮔ࣐ࢪ࣏ࢴࢲ࠿⥾࿰ࡈࡿࡒࡵࡡ࡛⩻࠻ࡼࡿࡾ㸣㒼ྡྷࡡ஗ࡿࡒ7L2ᒒࡡ୕࡞<6=&H2ᒒ࠿්ࡦ࢙ࣅࢰ࢞ࢨࣔࣜᠺ㛏ࡊ࡙࠷ࡾⅤ࠿⮾࿝῕࠷࠿㸡<6=&H2ᒒභ࡞㒼ྡྷᛮࡢ఩ୖࡊ࣓ࢧ࢕ࢠᛮ࠿㧏ࡂ࡝ࡖ࡙࠷ࡾ㸣࡛࠷࠹ࢻ࣭ࣞࣁࣤࢺ࢟ࣔࢴࣈࡡᮞᩩ࠿Ꮛᅹࡊ࡙ࡵ㸡࣠࢕ࢺࣁࣤࢺ࢟ࣔࢴࣈࡡ<6=&H2ᒒ࡞ࡻࡖ࡙࣭ࣛࢠ㞹Ὦࢅࣇࣞࢴࢠ࡚ࡀࡒࡆ࡛ࢅ♟ࡊ࡙࠷ࡾ㸣偐㸣㸩 ⏲㟻㞹ポ≁ᛮᅒ㸪࡞ D &H2<6=㸡 E 7L2&H2<6=ࡡ&9≁ᛮࢅ♟ࡌ㸣<6=࡚ၡ㢗࡛࡝ࡾฦᴗᆵࣃࢪࢷࣛࢨࢪ࠿࡮࡛ࢆ
࡜࡝ࡂ㉰᰹Ꮔ໩㸡࠵ࡾ࠷ࡢ<6=ᒒࡡ㉰⷟⭯໩ࡡຝᯕ࡚࠵ࡾ࡛⩻࠻ࡼࡿࡾ㸣ୌ᪁㸡7L2&H2<6=࡚ࡢࣃࢪࢷࣛࢨࢪࡢ࡮࡛ࢆ࡜⌟ࡿ࡙࠷࡝࠷㸣ࡱࡒ㸡ࣆࣚࢴࢹࣁࣤࢺࢨࣆࢹࡢ&H2<6=࡚ࡢ࡮࡛ࢆ࡜࡚࠵ࡖࡒ࠿㸡
7L2&H2<6=࡚ࡢ9࡚࠵ࡾࡆ࡛࠾ࡼ㸡7L2ᒒ࡞㉫ᅄࡊࡒㇿࡡᅖᏽ㞹ⲬࡡᏋᅹࢅ♟ြࡊ࡙࠷ࡾ㸣6L2ᒒࡡᙫ㡢ࢅฦ㞫ࡊ࡙㸡⵫✒ഁࡡ㓗໩⭯ᐖ㔖࠾ࡼ୦㉰᰹Ꮔࡡセㄇ㞹⋙ࢅ゛⟤ࡌࡾ࡛&H2<6=࡚㸡7L2&H2<6=࡚ࡡㄇ㞹⋙࠿ᚋࡼࡿࡒ㸣ᡜ᭻ࡡㄇ㞹⋙ࡢᚋࡼࡿ࡝࠾ࡖࡒ࠿㸡<6=㸡&H2࡝࡜࡚ሒ࿈ࡈࡿ࡙࠷ࡾೋࡻࡽ㧏࠷ೋ࠿ᚋࡼࡿࡒ㸣ᮇᐁ㥺࡚ࡢ7L2ࡡᅂᢙᙁᗐ࠿ᴗࡴ࡙ᘽࡂ┞⇆ᏽ࠿࡚ࡀ࡝࠾ࡖࡒ࠿㸡ࣜࢲࣜ┞ࡻࡽࡵࡢࡾ࠾࡞ㄇ㞹⋙ࡡ఩࠷࢓ࢻࢰ࣭ࢭ┞࠿⏍ᠺࡊࡒྊ⬗ᛮ࠿⩻࠻ࡼࡿࡾ㸣ࡱࡒ㸡ࣜࢲࣜ┞ࡡሔྙ࡚ࡵ࢕࢛ࣤ⤎ᬏࡡㄇ㞹⋙ࡢ᰹Ꮔᣲິ࡞ࡻࡾ᰹Ꮔฦᴗࡡᐞ୙࠿ኬࡀ࠷ࡒࡴ㸡ࣜࢲࣜࡡ㧏ㄇ㞹⋙ࡡD㍀
ࢅ⭯ⅲ᪁ྡྷ࡞㒼ྡྷࡈࡎࡾᚪこ࠿࠵ࡾ㸣ᅒ㸫㸨◂✪ᠺᯕᮇ◂✪࡞ࡻࡽ㸡7L2&H2<6=ெᕝ㉰᰹Ꮔ࠿-FP࢛࣭ࢱ࣭ࡡ఩࣭ࣛࢠ㞹Ὦᐠᗐࢅ⥌ᣚࡊ࡝࠿ࡼ㸡⣑ࡡㄇ㞹⋙࠿ᚋࡼࡿࡒ㸣ࡱࡒ㸡7L2ᒒࡢ㒼ྡྷᛮࡡ఩࠷ኣ⤎ᬏᒒ࡚࠵ࡖࡒ࠿㸡ࡐࡡ୕࡞<6=&H2ᒒ࠿්ࡦ࢙ࣅࢰ࢞ࢨࣔࣜᠺ㛏ࡌࡾࡆ࡛ࢅずฝࡊࡒ㸣㸩௑ᚃࡡㄚ㢗࡛Ⓠᒈ ௑ᚃࡡ◂✪ㄚ㢗࡛ࡊ࡙ࡢ㸡7L2ᒒࡡ⤎ᬏ┞โᚒ㸡㒼ྡྷโᚒ㸡㉰᰹Ꮔࡡ⤎ᬏᛮྡྷ୕㸡⏲㟻ࣚࣆࢾࢪࡡ
ᢒโ࠿୘ྊḖ࡚࠵ࡾ㸣≁࡞7L2ᒒࡡ⤎ᬏ┞㸡㒼ྡྷᛮࡡโᚒ࠿᭞࡝ࡾ㧏ㄇ㞹⋙໩㸡ࡌ࡝ࢂࡔ఩㞹ᅸ㥉ິࡷ࣓ࣁ࢕ࣜ໩࡞୘ྊḖ࡚࠵ࡾ࡛ゕ࠻ࡾ㸣ࡐࡡࡒࡴ࡞ࡢ㸡ெᕝ㉰᰹Ꮔࡡ྘ᒒࡡⅲࡈࡡ᭩㐲໩㸡ᠺ⭯㏷ᗐ㸡㓗⣪ฦᅸ㸡ᇱᯀῺᗐ㸡6Lᇱᯀ⾪㟻ฌ⌦࡝࡜ࡡᠺ⭯ࣈࣞࢬࢪࡡ᭞࡝ࡾ᭩㐲໩࠿ᚪこ࡚࠵ࡾ㸣ㄇ㞹⋙࡞→࡯ࡌのࡲ㉰᰹Ꮔࡡຝᯕ࡞ࡗ࠷࡙ࡵ᭞࡝ࡾ᳠ゞ࠿ᚪこ࡚࠵ࡾ㸣㸪Ⓠ⾪ㄵᩝࣛࢪࢹᅒ㸪ᅒ㸫࡞ D &H2<6=㸡 E 7L2&H2<6=ࡡ-9≁ᛮࢅ♟ࡌ㸣୦⩽࡛ࡵࣆࣚࢴࢹࣁࣤࢺ㞹ᅸ࡞࠽࠷࡙㹭-FP࡛࠷࠹Ⰳ┖࡝࣭ࣛࢠ≁ᛮ࠿ᚋࡼࡿࡒ㸣7L2

&H2<6= ✒ᒒᵋ㏸ビ౮࡞ࡗ࠷࡙㸯ᮄཾ㈴⣎㸡⬝ㆺᑠᶖ㸡ラㆺᝫ᜜㸡⠓ᓧ࿰ኰ㸡㧏ฦゆ⬗ฦᯊ㞹Ꮔ㢟᚜㙶࡞ࡻࡾ &H2<6=6L ࣉࢷࣞ⏲㟻ᵋ㏸ࡡⅴᏄࢪࢢ࣭ࣜᵋ㏸ビ౮㸡ฦᯊ໩Ꮥ㸡  ༰ใ୯
7L2&H2<6= ெᕝ㉰᰹Ꮔࡡࢻࢿᵋ㏸ビ౮㸡⏲㟻㞹ポ≁ᛮ࡞ࡗ࠷࡙ࡢᢖ✇‵ങ୯࡚࠵ࡾ㸣