http://support.spring8.or.jp/Report_JSR/PDF_IAe_ALL/IAe_11A1718.pdf

2011A1718                            BL14B2

XAFS ࡟ࡼࡿ῝⣸እ⏝ప⃰ᗘ Gd ῧຍ AlN ⷧ⭷ࡢ Gd ࡢᒁᡤᵓ㐀࡟ཬࡰࡍࣂࢵࣇ࢓࣮ᒙᙧᡂ ᗘࡢᙳ㡪ࡢゎ᫂Clarification of Buffer Layer Formation Temperature Influence on Local
Structure of Gd in Low Concentration Gd Addition AlN Thin Films for
Deep Ultraviolet Light by XAFSᑠᯘ ᖿᘯ a, ▼ཎ Ⴙ⏕ b, Ἠ ᏹ࿴ b, すᮏ ဴᮁ a,⏣୰ ᐶஅ a, ႐ከ 㝯 c, ౗ᒣ ┿ஓ c, ᕷ஭ 㑥அ c
Mikihiro Kobayashia, Tsuguo Ishiharab, Hirokazu Izumib, Tetsuro Nishimotoa,Hiroyuki Tanakaa, Takashi Kitac, Shinya Kitayamac, Kuniyuki Ichiicaa㻔ᰴ㻕࣓ࣘࢵࢡࢫ, b රᗜ┴❧ᕤᴗᢏ⾡ࢭࣥࢱ࣮, c ⚄ᡞ኱ᏛYUMEX Inc., bHyogo Prefectural Institute of Technology, cKobe UniversityGd ῧຍ⃰ᗘࡀ 0.1mol%ࡢ AlN ⷧ⭷ヨᩱ࡟࠾࠸࡚ࠊࣂࢵࣇ࢓࣮ᒙࡢᙧᡂ ᗘࡀ Gd ࡢᒁᡤᵓ㐀࡟୚࠼ࡿᙳ㡪࡟ࡘ࠸࡚ㄪ࡭ࡿࡓࡵ࡟ XAFS ᐃࢆ⾜ࡗࡓࠋࡑࡢ⤖ᯝࠊࣂࢵࣇ࢓࣮ᒙࡢᙧᡂ ᗘࡀ㧗࠸᪉ࡀືᚄᵓ㐀㛵ᩘࡢ➨ 2 㓄఩ࡢࣆ࣮ࢡᙉᗘࡀῶᑡࡋ࡚࠸ࡓࠋ࣮࢝ࣈࣇ࢕ࢵࢸ࢕ࣥࢢࡢ⤖ᯝࡼࡾᡂ⭷ ᗘࡢ㧗࠸ヨᩱࡢ᪉ࡀ Debye-Waller ᅉᏊࡢ್ࡀ኱ࡁࡃ࡞ࡾ Gd ࡢ࿘ᅖࡢ㓄఩ᵓ㐀ࡀ஘ࢀ࡚࠸ࡿྍ⬟ᛶࡀ♧၀ࡉࢀࠊࡑࡢࡇ࡜࡟ࡼࡾ࢝ࢯ࣮ࢻ࣑ࣝࢿࢵࢭࣥࢫᙉᗘࡀῶᑡࡋࡓ࡜᥎ ࡋࡓࠋ࣮࣮࢟࣡ࢻ㸸 Gd ῧຍ AlNࠊ῝⣸እග※ࠊXAFS⫼ᬒ࡜◊✲┠ⓗ㸸ᡃࠎࡣỈ㖟ࣛࣥࣉࡢ௦᭰฼⏝ࢆ┠ⓗ࡟❅໬࢔࣑ࣝࢽ࣒࢘㻔AlN㻕ࢆẕయ࡜ࡋ࡚ᕼᅵ㢮ඖ⣲࢞ࢻࣜࢽ࣒࢘㻔Gd㻕ࢆῧຍࡋࠊGd ࡢ f-f 㟁Ꮚ㑄⛣ࢆ฼⏝ࡋࡓỈ㖟ࣇ࣮ࣜ῝⣸እග※⏝ Gd ῧຍ AlN ⷧ⭷ࡢ㛤Ⓨࢆ㐍ࡵ࡚࠸ࡿ[1][2]ࠋ࢝ࢯ࣮ࢻ࣑ࣝࢿࢵࢭࣥࢫ㻔CL㻕ᙉᗘࡀ㧗࠸ Gd ῧຍ AlN ⷧ⭷ࢆᚓࡿࡓࡵ࡟
ࡣࠊAlN ࣂࢵࣇ࢓࣮ᒙࡢᙧᡂࡀᚲせ࡛࠶ࡾࠊGd ῧຍ⃰ᗘࡔࡅ࡛࡞ࡃࠊࣂࢵࣇ࢓࣮ᒙࡢᙧᡂ ᗘ࡟ࡼࡗ࡚ࡶ CL ᙉᗘࡀ኱ࡁࡃ␗࡞ࡿࡇ࡜ࢆぢ࠸ࡔࡋ࡚࠸ࡿ[3][4]ࠋ๓ᅇࡢ㔜Ⅼ⏘ᴗ฼⏝ㄢ㢟 2010B1814
࡟࠾࠸࡚ࠊAlN ࣂࢵࣇ࢓࣮ᒙࡢᙧᡂ ᗘࡀࠊGd ࢧ࢖ࢺࡢ㓄఩ᑐ⛠ᛶ࡟ཬࡰࡍᙳ㡪࡟ࡘ࠸᳨࡚ウࢆ⾜ࡗࡓ[5]ࠋࡋ࠿ࡋ࡞ࡀࡽࠊGd ⃰ᗘ 0.1mol%ࡢప⃰ᗘヨᩱ࡛ࡣࠊ࢚ࢵࢪࢪࣕࣥࣉࡀᴟ➃࡟ᑠࡉࡃ㹩್ࡀ኱ࡁࡃ࡞ࡿ࡟ᚑ࠸ EXAFS ᣺ື࡜ ᐃࣀ࢖ࢬ࡜ࡢศ㞳ࡀᅔ㞴࡟࡞ࡾࠊ➨ 2 㓄఩࡟㛵ࡍࡿಙ㢗ᛶࡢ㧗࠸⤖ᯝࡀᚓࡽࢀ࡞࠿ࡗࡓࠋࡑࡇ࡛ᮏ◊✲࡛ࡣࠊ✚⟬ᅇᩘࢆቑࡸࡋ࡚ࠊ➨ 2 㓄఩࡟㛵ࡍࡿಙ㢗ᛶࡢ㧗࠸ࢹ࣮ࢱࢆᚓࡿࡇ࡜ࢆ┠ⓗ࡜ࡋࡓࠋࡲࡓࠊྠࡌᡂ⭷᮲௳࡛ࡶ CL ᙉᗘࡀ኱ࡁࡃ␗࡞ࡿ▼ⱥᇶᯈୖ࡜ࢧࣇ࢓࢖࢔ᇶᯈୖ࡬ࡢᡂ⭷ヨᩱ࡛ࡢ Gd ࡢᒁᡤᵓ㐀ࡢ㐪࠸࡟ࡘ࠸࡚ࡶ᳨ウࡋࡓࠋᐇ㦂᪉ἲ㸸ヨᩱࡣࠊ཯ᛂᛶ㧗࿘Ἴ࣐ࢢࢿࢺࣟࣥࢫࣃࢵࢱࣜࣥࢢἲ࡟ࡼࡾࠊ▼ⱥ࢞ࣛࢫᇶᯈ࠾ࡼࡧ c 㠃ࢧࣇ࢓࢖࢔ᇶᯈୖ࡟ AlN ࣂࢵࣇ࢓࣮ᒙࢆ 700 nm ᙧᡂࡋࡓᚋࠊAlN ࡟ Gd ࢆ 0.1㹼11mol%ῧຍࡋࡓⓎගᒙࢆ 700 nm ᡂ⭷ࡋࡓࠋࣂࢵࣇ࢓࣮ᒙ࠾ࡼࡧⓎගᒙࡣࠊ࠸ࡎࢀࡶ 200㹼500Υ࡛ᙧᡂࡋࡓࠋGd-L3 ྾཰➃ࡢࢫ࣌ࢡࢺࣝ ᐃࡣࠊBL14B2 ࡛⾜ࡗࡓࠋⓎගᒙࡢ Gd ῧຍ AlN ⷧ⭷ࡣࠊGd 㔞ࡀᑡ࡞࠸ࡓࡵࠊ
19 ⣲Ꮚ SSD ࢆ⏝࠸ࡓ⺯ග XAFS ἲ࡟ࡼࡾᐊ ࡛ ᐃࡋࡓࠋヨᩱ࠾ࡼࡧᇶᯈ࠿ࡽࡢᅇᢡ X ⥺ࡢᙳ㡪ࢆపῶࡉࡏࡿࡓࡵ࡟ヨᩱࢆᦂືࡉࡏࠊGd ῧຍ㔞ࡀẚ㍑ⓗከ࠸ 6 ࠾ࡼࡧ 11mol%ࡢヨᩱ࡛ࡣ X ⥺ධᑕゅࢆ 10°࡜ࡋ࡚ࠊGd ῧຍ㔞ࡀẚ㍑ⓗᑡ࡞࠸ 0.1㹼1.8mol%ࡢヨᩱ࡛ࡣ X ⥺ධᑕゅࢆ 4°࡜ࡋ࡚ᐃࡋࡓࠋ1 ᅇࡢ ᐃ࡟ࡣ⣙ 1 ᫬㛫ࢆせࡋࠊGd ῧຍ㔞ࡢᑡ࡞࠸ヨᩱ࡛ࡣࠊゎᯒࢆ⾜࠺ࡢ࡟༑ศ࡞ရ㉁ࡢࢹ࣮ࢱࢆᚓࡿࡓࡵ 2㹼5 ᅇࡢ✚⟬ࢆ⾜ࡗࡓࠋ

Radial Structure Function (arb.units)ᐇ㦂⤖ᯝ࠾ࡼࡧ⪃ᐹ㸸▼ⱥ࢞ࣛࢫᇶᯈୖ࡟ࣂࢵࣇ࢓࣮ᒙࢆ 200Υ࠾ࡼࡧ 500Υ࡛ᙧᡂࡋࡓᚋࠊGd ῧຍ㔞 0.1mol%ࡢⓎගᒙࢆ 200Υ࡛ᙧᡂࡋࡓヨᩱ࡟ࡘ࠸࡚ࠊ ᐃ࡟ࡼࡾᚓࡽࢀࡓ Gd-L3 ྾཰➃ࡢ EXAFS ᣺ືࢹ࣮ࢱࢆ
ᅗ 1 ࡟ࠊ2ύ-1<k<10.5ύ-1 ࡢ⠊ᅖ࡛ࣇ࣮࢚ࣜኚ᥮ࢆ⾜࠺ࡇ࡜࡟ࡼࡗ࡚ᚓࡓືᚄᵓ㐀㛵ᩘࢆᅗ 2 ࡟♧ࡍࠋGd ῧຍ㔞ࡀ 0.1mol%࡜ᕼⷧ࡞ሙྜ࡟࠾࠸࡚ࡶࠊࣂࢵࣇ࢓࣮ᒙࡢᙧᡂ ᗘࡀ 500Υ࡜㧗࠸ሙྜ
࡟ࡣࠊGd-L3 ྾཰➃ࡢືᚄᵓ㐀㛵ᩘ࡟࠾ࡅࡿ➨ 2 㓄఩࡟┦ᙜࡍࡿࣆ࣮ࢡᙉᗘࡀᙅࡃ࡞ࡗ࡚࠸ࡓࠋࡇ
ࢀ࡟ࡣ 2 ࡘࡢ⌮⏤ࡀ⪃࠼ࡽࢀࡿࠋ➨ 1 ࡟ࡣࠊࣂࢵࣇ࢓࣮ᒙࢆ 500Υ࡛ᙧᡂࡋࡓᚋࠊⓎගᒙࢆ 200Υ࡛ᡂ⭷ࡍࡿ㝿࡟ࠊAlN ࣂࢵࣇ࢓࣮ᒙ⾲㠃ࡀ㓟໬࡟ࡼࡾኚᙧࡋ࡚ࠊⓎගᒙ࡟ᙳ㡪ࢆཬࡰࡋ࡚࠸ࡿࡇ
࡜ࡀ⪃࠼ࡽࢀࡿࠋⷧ⭷୰ࡢ㓟⣲⃰ᗘࢆ஧ḟ࢖࢜ࣥ㉁㔞ศᯒἲ㻔SIMS㻕࡟ࡼࡾ ᐃࡋࡓ⤖ᯝࠊࣂࢵࣇ࢓࣮ᒙ࡜Ⓨගᒙ⏺㠃ࡢ㓟⣲࢖࢜ࣥ⃰ᗘࡣࠊ500Υ࡛ᙧᡂࡋࡓ᪉ࡀ 5×1020cm-3 ࡜ 200Υ࡛ᙧᡂࡋࡓሙ
ྜࡼࡾࡶ 1 ᱆㧗ࡃ࡞ࡗ࡚࠾ࡾࠊᙧᡂ ᗘࡀ 500Υ࡜㧗 ࡢ᪉ࡀ㓟⣲ࢆྲྀࡾ㎸ࡳ᫆࠸ࡇ࡜ࡀศ࠿ࡗ
࡚࠸ࡿࠋ➨ 2 ࡟ࡣࠊ500Υ࡛ᙧᡂࡋࡓ⤖ᬗᛶࡢⰋ࠸ࣂࢵࣇ࢓࣮ᒙࡣࠊࡑࡢୖ㒊࡟ᡂ⭷ࡉࢀࡿⓎගᒙ࡟ᑐࡋ࡚ࡶ⦆࿴ࡢᑠࡉ࡞ AlN ᱁Ꮚࢆᙧᡂࡍࡿࡼ࠺࡟ാࡁࠊ࢖༙࢜ࣥᚄࡢ኱ࡁ࡞ Gd ࡀ AlN ᱁Ꮚෆ࡟ศᩓࡍࡿࡇ࡜ࡀ࡛ࡁ࡞ࡃ࡞ࡗࡓࡶࡢ࡜⪃࠼ࡽࢀࡿࠋࡇࢀࡽࡢせᅉࡀ CL ᙉᗘࡢపୗ࡟ࡘ࡞ࡀࡗ
ࡓ࡜⪃࠼ࡽࢀࡿࠋ

k3Ȥ䠄k䠅(arb.units)Ḙ ᵐᵎᵎḥḘ ᵓᵎᵎḥ

0246ᵥᶂᵋᵟᶊ

5ᵥᶂชь᣽ẅᵎᵌᵏᶋᶍᶊή4ᵥᶂᵋᵬ

Ḙ ᵐᵎᵎḥ

3

Ḙ ᵓᵎᵎḥ

2
1
0
0

68
10k䠄䊅-1䠅 䚷䚷䚷䚷䚷䚷䚷䚷ἢἕἧỳὊ‫ޖ‬ỉ࢟঺ภࡇ

123

4

56
䚷䚷䚷䚷

R (䊅)

ᅗ1㸬Gd-L3྾཰➃ࡢEXAFS᣺ືࢹ࣮ࢱ
㻔ࣂࢵࣇ࢓࣮ᒙࡢᙧᡂ ᗘ:200Υཬࡧ500Υ㻕ᅗ2㸬Gd-L3྾཰➃ࡢືᚄᵓ㐀㛵ᩘ㻔ࣂࢵࣇ࢓࣮ᒙࡢᙧᡂ ᗘ:200Υཬࡧ500Υ㻕

࣮࢝ࣈࣇ࢕ࢵࢸ࢕ࣥࢢ࡟ࡼࡾᚓࡽࢀࡓࣃ࣓࣮ࣛࢱࢆ⾲ 1 ࡟♧ࡍࠋࣇ࢕ࢵࢸ࢕ࣥࢢࡣῧຍࡋࡓ Gdࡀ࢘ࣝࢶ㖔ᆺ AlN ࡢ Al ࡟⨨᥮ࡋࡓሙྜࢆ௬ᐃࡋ࡚ࠊ➨ 1 ㏆᥋ࢆ 4 㓄఩ࠊ➨ 2 ㏆᥋ࢆ 12 㓄఩࡟ᅛᐃࡋ࡚⾜ࡗࡓࠋゎᯒ⤖ᯝࡼࡾࠊ➨ 2 ㏆᥋ཎᏊࡢ Debye-Waller ᅉᏊࡢ್ࡣࠊᙧᡂ ᗘ 200Υࡢሙྜࡼࡾ 500Υࡢሙྜࡢ᪉ࡀ኱ࡁࡃ࡞ࡗ࡚࠸ࡓࠋືᚄᵓ㐀㛵ᩘ࡟࠾ࡅࡿ➨ 2 㓄఩ࡢࣆ࣮ࢡᙉᗘῶᑡࡣࠊ
Debye-Waller ᅉᏊࡢ್ࡀ኱ࡁࡃ࡞ࡾࠊGd ࡢ࿘ᅖࡢᒁᡤᵓ㐀ࡀ኱ࡁࡃ஘ࢀࡓ஦ࡀཎᅉ࡛࠶ࡿ࡜⪃࠼ࡽࢀࡿࠋ
⾲ 1㸬࣮࢝ࣈࣇ࢕ࢵࢸ࢕ࣥࢢ⤖ᯝᡂ⭷ ᗘ㻔Υ㻕㺨㺼㺍㺪㺅㺎ᒙ Ⓨගᒙ

ᇶᯈ

200

200

▼ⱥ࢞ࣛࢫ

500

200

▼ⱥ࢞ࣛࢫ

⤖ྜ✀
Gd-N
Gd-Al
Gd-N
Gd-Al

㓄఩ᩘ
N㻔ಶ㻕
412412⤖ྜ㊥㞳R㻔ύ㻕
2.28
3.19
2.23
3.22

Debye-WallerᅉᏊ ǻı㸰㻔ύ㸰㻕
0.00990.01330.01240.0291▼ⱥ࢞ࣛࢫᇶᯈୖ࡟ࠊࣂࢵࣇ࢓࣮ᒙࢆ 200Υ࡛ᙧᡂࡋࡓᚋࠊGd ῧຍ㔞ࡀ 0.1㹼11mol㸣ࡢⓎගᒙࢆ 200Υ࡛ᙧᡂࡋࡓヨᩱ࡟ࡘ࠸࡚ࠊ ᐃ࡟ࡼࡾᚓࡽࢀࡓ Gd-L3 ྾཰➃ࡢ EXAFS ᣺ືࢹ࣮ࢱࢆᅗ 3
࡟ࠊ2ύ-1<k<10.5ύ-1 ࡢ⠊ᅖ࡛ࣇ࣮࢚ࣜኚ᥮ࢆ⾜࠺ࡇ࡜࡟ࡼࡗ࡚ᚓࡓືᚄᵓ㐀㛵ᩘࢆᅗ 4 ࡟♧ࡍࠋ
Gd ῧຍ㔞ࡀᑡ࡞ࡃ࡞ࡿ࡟ᚑࡗ࡚ࠊ➨ 1 ㏆᥋࡟┦ᙜࡍࡿ Gd-N ࡟ᇶ࡙ࡃࣆ࣮ࢡࡣࠊ࡯࡜ࢇ࡝ኚ໬ࡋ
࡞࠸ࡢ࡟ᑐࡋࠊ➨ 2 ㏆᥋࡟┦ᙜࡍࡿ Gd-Al ࡟ᇶ࡙ࡃࣆ࣮ࢡࡣࠊ༢ㄪ࡟ᙉᗘࡀቑຍࡋ࡚࠸ࡃഴྥࡀ
ぢࡽࢀࡓࠋGd ⃰ᗘ࡟ࡼࡿ Debye-Waller ᅉᏊࡢኚ໬ࢆᅗ 5 ࡟ࠊࡲࡓ⤖ྜ㊥㞳ࡢኚ໬ࢆᅗ 6 ࡟♧ࡍࠋ ᐃࢹ࣮ࢱࢆゎᯒࡋࡓ⤖ᯝࠊప⃰ᗘࡢヨᩱ࡯࡝➨ 2 ㏆᥋ࡢ Debye-Waller ᅉᏊࡢ್ࡀᑠࡉࡃ࡞ࡗ࡚࠸ࡓࠋࡇ
ࢀࡣ➨ 2 ㏆᥋࡟┦ᙜࡍࡿ Gd-Al ࡟࠾ࡅࡿ⤖ྜ㊥㞳ࡢࣂࣛࢶ࢟ࡀᑠࡉࡃ࡞ࡗࡓࡓࡵ࡜⪃࠼ࡽࢀࡿࠋ
Gd ῧຍ㔞ࡀ 11mol%࠿ࡽ 0.1mol%࡬ῶᑡࡍࡿ࡟ࡘࢀ࡚ Gd ࡀ⤖ᬗ୰࡛ᆒ୍࡟ศᩓࡋࠊGd ࿘㎶ࡢ⤖ྜ㊥㞳ࡢࣂࣛࢶ࢟ࡀῶᑡࡍࡿࡇ࡜࡛ Gd-Gd 㛫ࡢⓎග෌྾཰ຠᯝࡀᢚไࡉࢀࠊCL ᙉᗘࡀྥୖࡋࡓࡶࡢ࡜⪃࠼ࡽࢀࡿࠋ

Radial Structure Function (arb.units)㻔▼ⱥ࢞ࣛࢫᇶᯈୖࡢヨᩱࡢゎᯒ⤖ᯝ㻕ᵥᶂชь᣽

k3Ȥ䠄k䠅(arb.units)ᵎᵌᵏᶋᶍᶊή

ᵎᵌᵖᶋᶍᶊήᵏᵌᵑᶋᶍᶊή

ẅᵔᶋᶍᶊήẅᵏᵏᶋᶍᶊή0246810k䠄䊅-1䠅ᵥᶂᵋᵟᶊ

5ᵥᶂชь᣽ᵥᶂᵋᵬ

4Ḙẅᵎᵌᵖᶋᶍᶊή

3Ḙẅᵏᵌᵑᶋᶍᶊή
ẅḘẅᵔᶋᶍᶊή

2Ḙẅᵏᵏᶋᶍᶊή

10012䚷䚷䚷䚷Ḙẅᵎᵌᵏᶋᶍᶊή12345R䠄䊅䠅6䚷䚷䚷䚷ᅗ 4㸬Gd-L3 ྾཰➃ࡢືᚄᵓ㐀㛵ᩘᅗ 3㸬EXAFS ᣺ືࢹ࣮ࢱ

2.26

2nd Nearest Neighbor (䖃)

2.24

0.02
1st Nearest Neighbor (䕦)0.01⤖ྜ㊥㞳䠄䊅䠅

Debye-Waller Factor 䚷ǻ䃢2䠄䊅2䠅

2.280.03

1st Nearest Neighbor

2.22024681012

3.24
3.22

0

3.20

24681012Gdῧຍ⃰ᗘ䠄mol 䠂䠅䚷䚷䚷䚷䚷䚷䚷

2nd Nearest Neighbor02468Gdῧຍ⃰ᗘ䠄mol 䠂䠅ᅗ 5㸬Gd ⃰ᗘ࡟ࡼࡿ Debye-Waller ᅉᏊࡢኚ໬1012䚷䚷䚷䚷䚷䚷䚷ᅗ 6㸬Gd ῧຍ⃰ᗘ࡟ࡼࡿ⤖ྜ㊥㞳ࡢኚ໬ᇶᯈࡢᙳ㡪ࢆㄪ࡭ࡿࡓࡵ࡟ࠊc 㠃ࢧࣇ࢓࢖࢔ᇶᯈୖ࡛ྠᵝ࡟స〇ࡋࡓ Gd ῧຍ AlN ⷧ⭷࡟ࡘ࠸࡚ࡶ ᐃࢆ⾜ࡗࡓࠋ ᐃ࡟ࡼࡾᚓࡽࢀࡓ Gd-L3 ྾཰➃ࡢ EXAFS ᣺ືࢹ࣮ࢱࢆᅗ 7 ࡟ࠊ2ύ-1<k<10.5
ύ-1 ࡢ⠊ᅖ࡛ࣇ࣮࢚ࣜኚ᥮ࢆ⾜࠺ࡇ࡜࡟ࡼࡗ࡚ᚓࡓືᚄᵓ㐀㛵ᩘࢆᅗ 8 ࡟♧ࡍࠋࡑࡢ⤖ᯝࠊ▼ⱥ࢞ࣛࢫᇶᯈୖࡢሙྜ࡜ࡣ␗࡞ࡾࠊ➨ 1 ㏆᥋࠾ࡼࡧ➨ 2 ㏆᥋࡟┦ᙜࡍࡿࣆ࣮ࢡࡢᙉᗘࡣࠊ࠸ࡎࢀࡶ
Gd ῧຍ㔞ࡀᑡ࡞ࡃ࡞ࡿ࡯࡝ᙉࡃ࡞ࡿഴྥࡀぢࡽࢀࡓࠋࡲࡓࠊᅗ 4 ࡢྠࡌᙧᡂ ᗘ 200Υࡢ⤖ᯝ࡜ẚ㍑ࡍࡿ࡜ࠊࢧࣇ࢓࢖࢔ᇶᯈୖ࡟ᙧᡂࡋࡓప⃰ᗘ Gd ヨᩱࡢ᪉ࡀࠊ▼ⱥ࢞ࣛࢫᇶᯈୖ࡟ᙧᡂࡋࡓ
ヨᩱࡼࡾࡶࠊ➨ 1 ㏆᥋࡟┦ᙜࡍࡿࣆ࣮ࢡᙉᗘࡣᙉࡃࠊ➨ 2 ㏆᥋࡟┦ᙜࡍࡿࣆ࣮ࢡࡢᙉᗘࡣᙅ࠿ࡗ
ࡓࠋࡇࢀࡽࡢഴྥࡢ㐪࠸ࡣࠊX ⥺ᅇᢡࡢ⤖ᯝ࠿ࡽࠊ▼ⱥ࢞ࣛࢫᇶᯈୖ࡟ᙧᡂࡋࡓⷧ⭷ࡣ 00l ඃඛ㓄ྥ⭷࡛࠶ࡿࡢ࡟ᑐࡋ࡚ࠊࢧࣇ࢓࢖࢔ᇶᯈୖ࡟ᙧᡂࡋࡓⷧ⭷ࡣ࢚ࣆࢱ࢟ࢩࣕࣝ⭷࡛࠶ࡾࠊࡑࡢࡓ
ࡵࢧࣇ࢓࢖࢔ᇶᯈ࡟኱ࡁࡃ᮰⦡ࡉࢀࡓ⤖ᬗᵓ㐀ࢆ࡜ࡗ࡚࠸ࡿࡇ࡜ࡀせᅉ࡛࠶ࡿ࡜⪃࠼ࡽࢀࡿࠋ⤖ᬗࡢ㉁ࡢ㐪࠸࡟ࡼࡿ a ㍈᪉ྥࡢఙ⦰ࡀࠊᚤᑠ࡞ኚ໬ࡶ Gd ࡟኱ࡁ࡞ᙳ㡪ࢆ୚࠼࡚࠸ࡿ࡜⪃࠼࡚࠸ࡿࠋ
ࢧࣇ࢓࢖࢔ᇶᯈୖ࡟ᙧᡂࡋࡓⷧ⭷ࡣࠊCL ᙉᗘࡀ▼ⱥ࢞ࣛࢫᇶᯈ࡜ࡣ␗࡞ࡿഴྥࢆ♧ࡋ࡚࠾ࡾࠊヲ⣽ࡣ௒ᚋࡉࡽ࡟ㄪ࡭ࡿᚲせࡀ࠶ࡿࠋGd ⃰ᗘ࡟ࡼࡿ Debye-Waller ᅉᏊࡢኚ໬ࢆᅗ 9 ࡟ࠊࡲࡓ⤖ྜ㊥㞳ࡢኚ໬ࢆᅗ 10 ࡟♧ࡍࠋࢧࣇ࢓
࢖࢔ᇶᯈୖ࡛ࡶ▼ⱥ࢞ࣛࢫᇶᯈࡢሙྜ࡜ྠᵝ࡟➨ 1 ㏆᥋ࡢ Debye-Waller ᅉᏊ࡛ࡣ኱ࡁ࡞ኚ໬ࡀ࡞࠸ࡀࠊప⃰ᗘࡢヨᩱ࡯࡝ࠊ➨ 2 ㏆᥋ࡢ Debye-Waller ᅉᏊࡢ್ࡀᑠࡉࡃ࡞ࡗ࡚࠸ࡓࠋ⤖ྜ㊥㞳ࡣ➨1 ㏆᥋ࠊ➨ 2 ㏆᥋ඹ࡟ Gd ῧຍ⃰ᗘࡀୗࡀࡿ࡟ࡘࢀ࡚ᑠࡉࡃ࡞ࡿഴྥࡀ⌧ࢀࡓࠋ

Radial Structure Function (arb.units)㻔ࢧࣇ࢓࢖࢔ᇶᯈୖࡢヨᩱࡢゎᯒ⤖ᯝ㻕ᵥᶂชь᣽

k3Ȥ䠄k䠅(arb.units)ᵎᵌᵖᶋᶍᶊήᵏᵌᵑᶋᶍᶊή
ᵏᵌᵖᶋᶍᶊή
ẅᵔᶋᶍᶊή

ẅᵏᵏᶋᶍᶊή

26810 䚷䚷䚷䚷
12k䠄䊅-1䠅
ᅗ 7㸬EXAFS ᣺ືࢹ࣮ࢱḘẅᵎᵌᵖᶋᶍᶊή

4Ḙẅᵏᵌᵑᶋᶍᶊή

3ḘẅᵏᵌᵖᶋᶍᶊήẅḘẅᵔᶋᶍᶊή

2ẅḘẅᵏᵏᶋᶍᶊή

10
1

2

3

4

56
䚷䚷䚷䚷

R (䊅)

ᅗ 8㸬Gd-L3 ྾཰➃ࡢືᚄᵓ㐀㛵ᩘ

0.03
2ndᵥᶂชь᣽ᵥᶂᵋᵟᶊ
ᵥᶂᵋᵬ

04

Nearest Neighbor (䖃)0.02
1st Nearest Neighbor (䕦)0.01⤖ྜ㊥㞳䠄䊅䠅

Debye-Waller Factor 䚷ǻ䃢2䠄䊅2䠅

05

2.28
2.26
2.24
2.22

1st Nearest Neighbor024681012

3.24
3.220

3.20246810Gdῧຍ⃰ᗘ䠄mol 䠂䠅12䚷䚷䚷䚷䚷䚷䚷

3.18

2nd Nearest Neighbor02468Gdῧຍ⃰ᗘ䠄mol 䠂䠅ᅗ 9㸬Gd ⃰ᗘ࡟ࡼࡿ Debye-Waller ᅉᏊࡢኚ໬

1012䚷䚷䚷䚷䚷䚷䚷ᅗ 10㸬Gd ῧຍ⃰ᗘ࡟ࡼࡿ⤖ྜ㊥㞳ࡢኚ໬ࡉࡽ࡟ࠊCL ᙉᗘࡀ୍␒ᙉ࠸▼ⱥ࢞ࣛࢫᇶᯈୖ࡟ᡂ⭷ࡋࡓ Gd ῧຍ㔞 0.1mol%ࡢヨᩱ࡛ࠊᇶᯈ
ᗘࡢᙳ㡪ࢆ᳨ウࡋࡓ࡜ࡇࢁࠊᇶᯈ ᗘࡀ 200Υ࠿ࡽ 500Υ࡬㧗ࡃ࡞ࡿ࡟ᚑ࠸ࠊ➨ 1 ㏆᥋࡟┦ᙜࡍࡿࣆ࣮ࢡ࡜➨ 2 ㏆᥋࡟┦ᙜࡍࡿࣆ࣮ࢡࡢᙉᗘࡀ࡜ࡶ࡟ᑠࡉࡃ࡞ࡿഴྥࡀほᐹࡉࢀࡓࠋX ⥺ᅇᢡ ᐃࡢ⤖ᯝ࠿ࡽࠊᇶᯈ ᗘࡀ㧗ࡃ࡞ࡿ࡟ᚑ࠸ AlN ࡢ⤖ᬗ᱁Ꮚࡀ c ㍈᪉ྥ࡟⦰ࡳࠊa ㍈᪉ྥ࡟ఙࡧ࡚࠸
ࡿࡇ࡜ࡀศ࠿ࡗ࡚࠾ࡾࠊࡇࡢࡇ࡜ࡀ Gd ࡢᒁᡤᵓ㐀࡟ࡶᙳ㡪ࢆཬࡰࡋ࡚࠾ࡾࠊࡑࡢࡓࡵࠊCL ᙉᗘࡶᇶᯈ ᗘࡀ㧗ࡃ࡞ࡿ࡟ᚑ࠸༢ㄪ࡟ῶᑡࡋ࡚࠸ࡿ࡜⪃࠼࡚࠸ࡿࠋ௒ᚋࡢㄢ㢟㸸▼ⱥ࢞ࣛࢫᇶᯈୖ࠾ࡼࡧ c 㠃ࢧࣇ࢓࢖࢔ᇶᯈୖ࡟ᙧᡂࡋࡓヨᩱ࡟㛵ࡋ࡚ࠊGd ῧຍ⃰ᗘࡢ㐪࠸࡟ࡼࡿᇶᯈ ᗘࡢᙳ㡪ࢆ᫂ࡽ࠿࡟ࡍࡿࡓࡵ࡟ࠊ⤖ᬗᵓ㐀࡞ࡽࡧ࡟ Gd ࡢᒁᡤᵓ㐀ࡢࡉࡽ࡞ࡿゎᯒࢆ㐍ࡵࠊCL ᙉᗘࡢ㛵ಀ࡟ࡘ࠸࡚ヲ⣽࡟᳨ウࡍࡿࠋཧ⪃ᩥ⊩㸸[1] T. Kita et al., Appl. Phys. Lett. 93, 21190, 㻔2008㻕.
[2] S. Kitayama et al., IOP Conf. Series: Materials Science and Engineering, 1, 012001, 㻔2009㻕.
[3] ౗ᒣ┿ஓ௚, 2010 ᖺ⛅Ꮨ➨ 71 ᅇᛂ⏝≀⌮Ꮫ㛵ಀ㐃ྜㅮ₇఍ ㅮ₇␒ྕ 16p-NB-1[4] ᑠᯘᖿᘯ௚, ᖹᡂ 22 ᖺᗘ SPring-8 㔜Ⅼ⏘ᴗ฼⏝ㄢ㢟ᡂᯝሗ࿌᭩ 2010A1711, 㻔2010㻕.
[5] ᑠᯘᖿᘯ௚, ᖹᡂ 22 ᖺᗘ SPring-8 㔜Ⅼ⏘ᴗ฼⏝ㄢ㢟ᡂᯝሗ࿌᭩ 2010B1814, 㻔2010㻕.