Initiation of Fine MEMS project and Compiling of Knowledge Database
Basic knowledge and data relating to MEMS are containedin the knowledge database for the MEMS-ONE analysis anddesign support system completed in 2006. However, the Fine
MEMS Knowledge Database will be an additional collection ofknowledge relating to complex technologies to implement
nanofunctions, integrated construction with semiconductor
chips, methods to connect MEMS components in a highly
integrated manner, and other knowledge relating to highly
integrated and complex MEMS, and therefore it will havehigher requirements for quality and number of records stored.
The leader of the project, Professor Isao Shimoyama of Tokyo
University, was keenly aware of the importance of the project,and he spearheaded the effort to determine specific methods
to accomplish its objectives. Entries were collected fromcompanies involved in the project, and research anddevelopment activities for knowledge relating to this project
were consigned exclusively to five university research centersthat had a detailed knowledge of development issues relating
to the project. In addition, information regarding international
conferences, patents and so on was gathered by MMC
researchers in an effort to ensure that the content would be ascomplete as possible. As shown in Fig. 2, a web-based “MediaWiki” system was also introduced to enable collaboration andexchange of information among researchers participating in
the project in order to improve the quality even further.
The project is scheduled for completion at the end of2008. The achievements of the project will be publicizedthroughout Japan. (Fig. 2)

The Highly Integrated / Complex MEMS Manufacturing
Technology Development Project was initiated in 2006 as aproject commissioned and subsidized by the Ministry ofEconomy, Trade and Industry and the New Energy andIndustrial Technology Development Organization (NEDO).
The objective of this project was to use the technology for themanufacture of Micro Electro Mechanical Systems (MEMS) –key devices that will make a major contribution tominiaturization and performance enhancement of electronic
devices and components in diverse fields that include
information and communications, medical treatment,
biotechnology, automobile manufacture and so on – in orderto achieve breakthroughs in resolving development problems
such as those shown in Fig. 1 through complex technologies
to implement nanofunctions, integrated construction withsemiconductor chips, and methods to connect MEMS
components in a highly integrated manner, in order to achieve
further miniaturization, reduction of power requirements, andenhanced performance and reliability, as the next stage inMEMS development. This new stage has been nicknamed “fineMEMS.” (Fig. 1)
The Micromachine Center was commissioned to handle
one of the issues relating to development: the compiling of adatabase of fine MEMS knowledge. The Center gathered
information relating to manufacturing technologies that had
been fostered in the course of the project, with the aim ofmaking it available for widespread use by MEMS researchersand engineers in Japan to stimulate and achieve broad-based
expansion of MEMS manufacturing technology in Japan.
Integration of MEMS Nanofunctions
Nano-bio materials

MEMS Large-Scale Integration
Multilayer Integration of Different Materials “Build-Up” Multilayer Integration

Nanofunction devices

Bio MEMS
Bonding
Optical MEMS

Low-stress dicing

RF-MEMS
Nanomaterials
Contact withNano Material

Ceramic(interface function)

Compiling of Knowledge Database

Integrated Formation of MEMS Semiconductors
Process integration monolithic device

Accumulation / systematizationof knowledge data
Integration intoMemsONE

Horizontal wiringVertical wiring

General release

Creation of shared and collaborative environment

Fig.1 The Four Development Categories for Fine MEMS
Knowledge and information and new technical data from academic societies,
etc. will be gathered and systematized in order to compile a database fordevelopers of highly integrated and complex MEMS.

Overview of Research & Development(1) Collection and organization of knowledge data– Knowledge data obtained through research and development by each company involved in the project– Accumulation and systematic organization of major new technical information from academicorganizations, etc. at home and abroad

Fine MEMSknowledge database(2) Inclusion of knowledge data for all research topics
Topics that must be supplemented (for funded projects) are re-consigned to universities in order to obtainknowledge data

Research & development members(3) Creation of a sharing and collaboration environment

連携

A “Wiki” system is used to enter data into the database, creating a sharing and collaboration environment
for project researchers

MemsONE(4) Coordination with MEMS-ONE

Research &development members

Coordinated construction of a new classification system based on the MEMS-ONE classification system(5) General release
General release aimed at stimulating research and development relating to highly integrated and complex
MEMS in Japan(Project undertaken by: Micromachine Center)

Members are free to post / view by means of a web browser or the Wiki
Collaboration tools enable members to add articles freely

Fig.2 Compiling of Knowledge Database for Highly Integrated / Complex MEMS

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