PPG550
Pirani Piezo Gauge
The new INFICON Pirani Piezo combination gauge(PPG550) is based on the most advanced MEMS
(Microelctromechanical Systems) sensor technology
available. The Pirani/ Piezo combination technology
miniaturized in the MEMS process enables theconstruction of a very small and space-saving sensor.
The Pirani, based on MEMS technology, is measuring
deeper and more accurately in the HV range than aclassic Pirani. Combined with a MEMS piezo sensor,
mounted in the same flange, the gauge becomes a realvacuum wide range gauge, extending the measuring
range far beyond the usual 1000 mbar.
In the range of 2 ... 1333 mbar the MEMS Piezo part ofthe sensor provides gas type independent pressure
measurement. PPG550 can be used to direct drop in
replace the so called MKS910 “DualTrans™
MicroPirani™ - Absolute Piezo Vacuum Pressure
Transducers” as well as MKS925 “Micro Pirani™
Vacuum Pressure Transducers”. PPG550 offes sameconnectors/ pin assignment, analog output andRS232/485 compatibility.
ADVANTAGES• Gas type independent above 2 mbar – allows safe venting with any gas mixture• High accuracy and reproducibility at atmosphere – reliable, fast atmospheric pressure detection• Versatile of mounting orientation – provides engineering freedom in tool design• Selectable analog output signal for easy system integration• Digital interfaces RS232/ RS485• Direct drop in replacement MKS910 “DualTrans™ MicroPirani™ & MKS925 “Micro Pirani™” (Trademarks ofMKS Instruments, Andover, MA)• Compliance & standards: CE, EN, UL, CSA, RoHSAPPLICATIONS• Use in Analytical equipment/ mass sepctrometers• Physical vapor deposition• Fore-line measurement• Gas-backfilling

1

PPG550PPG550
ORDERING INFORMATION

3 P PM – 0 0 1 – D D R 3Unitmbar
Torr
PaAnalog output
012023ZFlange
DN 16 ISO-KF
DN 16 ISO-KF, extended
DN 25 ISO-KF
4 VCR female
1/8" NPT

0.61 ... 10.2V (INFICON PxG55x, Leybold TTR 101N)
0.372 ... 5.570 V (GP / MKS 275)
1.0 ... 9 V (MKS 910 / 925 / 901P)
No analog output

Digital interface

126DF0RSNone 1)
RS232 2)
2)
RS485

Electrical connection
0DE

FCC, 8-pin (27 kOhm) 3)
D-sub, 9-pin 4)
5)
D-sub, 15-pin HD

Optional function
02DE1)
2)
3)
4)
5)
6)
7)
8)
9)

2No solid state relays 6)
2 solid state relays 7)
1 solid state relay 8)
3 solid state relays 9)

No RS interface on FCC 8-pin connector
Only for D-sub 9-pin or D-sub 15-pin HD connectors
FCC 8-pin with 0 or 2 solid state relays, no RS interface on FCC 8-pin connector, solid state relay on FCC connector
gauges have to be preset during production, they can't be set in the field due to missing RS interface
D-sub 9-pin with 0 or 1 solid state relay, customer choice of either RS232 or RS485 interface
D-sub15-pin HD with 0 or 3 solid state relays, customer choice of either RS232 or RS485 interface
All connectors are also available without solid state relays
2 solid state relays are only available on FCC 8-pin connector, solid state relays on FCC connector gauges have tobe preset during production, they can't be set in the field due to missing RS interface
1 solid state relay is only available on D-sub 9-pin connector, solid state relays can be set by customer via RSinterface
3 solid state relays are only available on D-sub 15-pin HD connector, solid state relays can be set by customer in thefield via the RS interface

PPG550PPG550
SPECIFICATIONSType

PPG550Measurement principle
2 ... 1333 mbar

MEMS Piezo resistive diaphragm

1.5 ... 2 mbar

Crossover range-6

MEMS Pirani thermal conductivity
1 × 10-6 ... 1333 mbar

1 × 10 mbar
Measurement range N2
Accuracy
1100 ... 1333 mbar

0.5% of reading

800 ... 1099 mbar

0.25 % of reading

100 ... 800 mbar

0.5 % of reading

2 ... 99.9 mbar

1% of reading-4

1 × 10 ... 1.99 mbar

5% of reading

1 × 10-5 ... 9.99 × 10-5 mbar
Hysteresis

25% of reading

10 ... 1333 mbar

0.1% of reading-3

1 × 10 ... 10 mbar
Response time (ISO 19685:2017)
Temperature
Compensation

1% of reading<20 ms+10 ... +50 °C

Measurement absolute accuracy
Solid state relay±1.5°C (0 ... +80 °C)

Set point range

5 × 10-6 ... 1333 mbar

Contact rating

50 V, 100 mA / mA (dc)

Contact on resistanceContact endurance
Analog output<35 ΩUnlimited (no mechanical wear)

3PPM-xxx-xxx00.61 ... 10.2 V

3PPM-xxx-xxx2

0.375 ... 5.570 V

3PPM-xxx-xxx3

1.0 ... 9 V

3PPM-xxx-xxxZ

1.0 ... 9 V

Error signal
Power supply

Check operating manual page 13

Supply voltage at gauge+12 ... +30 V (dc) ripple max. 1 VPower consumption
Internal fuse
Reverse polarity and overvoltage
protection

3PPG550≤350 mW
100 mA (thermal recoverable)yesPPG550
TypePPG550

Sensor cable connections
Electrical connection
3PPM-0xx-x0xx

FCC 68, 8-pin

3PPM-0xx-xDxxD-sub, 9-pin, male

3PPM-0xx-xExx
Sensor cable

D-sub HD, 15-pin, maleshielded, 0.14 mm2/conductor

Cable lengthAnalog≤100 m

RS232C operation≤15 m

RS485 operation
RS232C/RS485 interface≤1200 mData rate

9600 Baud (default)

Data format

binary8 data bits
one stop bit
no parity bit
no handshake
Further information on RS232/ RS485 interface
look operating manual page 15

Materials exposed to vacuum
Housing

SS 1.4307, AISI 304L, AI 6061

FlangeSS 1.4307, AISI 304L

Further parts
Pressure max
Admissible temperatures
StorageOperation
Bakeout
Relative humidity (IEC 68-2-38)(year's mean / during 60 days)
UseDegree of protection
Weight4

AISI 304L, Kovar, glass, silicon, nickel, AI, SiO2, Si3N4, gold, FPM,
low outgassing epoxy resin, solder, RO4305
10 bar (absolute)-40 ... +120 °C-20 ... +50 °C+120 °C (non operating)
98% non-condensing
indoors only
altitude up to 2000 m
IP 40

DN 16 ISO-KF~136g

DN 16 ISO-KF, long tube

~154g

DN 25 ISO-KF~155g

4 VCR female~158g

1/8" NPT~139g

PPG550PPG550
DIMENSIONS[mm]

DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 25 ISO-KF
4 VCR female
1/8" NPT

www.inficon.com

A[mm]

B
[mm]

12.0
29.0
12.0
37.7
37.0

40.0
56.4
40.0
61.7
65.0

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
The trademarks mentioned in this document are held by the companies that produce them.
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