Visionary Sensor
Technology
Vacuum Measurement

Experience andPassionINFICON provides you with precise pressure measurement instrumentation and quality fittings for any
vacuum system. Our ceramic capacitance diaphragm
gauges deliver higher accuracy, stability and longer
lifetime than conventional metal diaphragm products.
INFICON invented vacuum combination gauge sensors
and combine multiple technologies in a single unit toaccurately measure a wide range of pressures with
reduced complexity and cost.

1850/51

1890

1946

With over 150 years of vacuum experience, INFICON is
the worldwide leader in vacuum gauges. INFICON wasformed as an independent company with a new market
presence and has world-class manufacturing, sales
and service facilities worldwide. The service spectrum
includes development, production and sales of innovative products in the vacuum industry.

1967

1969

1976

1987

1993

1995

2000

INFICONLEYBOLDCOLOGNE

W.C.
HERAEUSHANAUGERÄTEBAU-ANSTALTBALZERSARTHURPFEIFFERWETZLAR2 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T

V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 3

INFICON at a Glance

MASS SPECTROMETRY

VACUUM GAUGESVACUUM GAUGE CONTROLLERS

Products and Applications

INFICON AG

Alte Landstrasse 69496 Balzers
Liechtenstein

Emergency Response

Scope of certification

According to appendix

na

g em

Cer t i f i ed M

aField of activity

ISO 9001:2015
ISO 14001:2015

Scope(s) 18

sqs.chent Syst e

Vacuum technology, analytics and surface engineerings

Quality Standards

Certificate
SQS herewith certifies that the company named below has a management system which meets therequirements of the standards specified below.

m

INFICON offers vacuum measurement, components,
gas analysis, measurement and advanced processcontrol through residual gas analyzers (mass spectrometers), helium leak detectors, multi-gas leak detectors, thin film deposition controllers and monitors,
RF sensors, sensor integration and analysis software.
INFICON refrigerant leak detectors are the recognizedmarket leaders in air conditioning / refrigeration andautomotive and manufacturing for assembly line quality
control. For field service, INFICON offers hand-held
refrigerant leak detectors, refrigerant charging scales,
refrigerant recovery systems and other service tools.
INFICON chemical identification systems are used byemergency response, military and security personnel
and environmental testing agencies worldwide.

byEnvironmental Health and Safety

OpticsMilitary

Normative basis

Quality Management System
Environmental Management System

rl

itze

Sw

Semiconductor

andValidity 23. 11. 2018 – 22. 11. 2021
Issue 23. 11. 2018Reg. no. H13036

X. Edelmann, President SQS

F. Müller, CEO SQSSwiss Association for Quality andManagement Systems SQS
Bernstrasse 103, 3052 Zollikofen, Switzerland

Swiss MadeFor INFICON, quality is not limited tothe products only. Our primary goal is
the fulfilment of customer needs andcustomer expectations as copy exactly and change control (CE / CC). Total
Quality
Management is an integral part of the thinking andperformance of every INFICON employee and our
suppliers. INFICON is ISO9001 and ISO14001 certified.
These certifications allow us to consistently manufacture high-quality products, while closely monitoring ourenvironmental impacts and the natural resources we
use in our processes. Our products are RoHS / WEEE
compliant!

Display

Alternative Energy and Petrochemical

Solar

Public Utilities

Semi and Vacuum Coating
General Vacuum

Security and Energy
Refrigeration, Air Conditioning and Automotive

CERTIFICATESQS and IQNet Partner hereby states that the organization

INFICON AG
Alte Landstrasse 69496 Balzers
Liechtenstein

has implemented and maintains aManagement System

Research and Development

Refrigeration

Vacuum Furnace, Metallurgy, Analytic

Air Conditioning

for the following scope(s):According to appendix SQS registration number H13036
which fulfills the requirements of the following standard(s):ISO 9001:2015 Quality Management System
ISO 14001:2015 Environmental Management System
Issued on: 2018-11-23
Expires on: 2021-11-22

Industrial vacuum

Automotive

PackagingService Tools

This attestation is directly linked to the IQNet Partner’s original certificate and shall not be used asa stand-alone document

Registration Number: CH - H13036

Alex Stoichitoiu
President of IQNet

Felix Müller
CEO SQS

IQNet Partners*:
AENOR Spain AFNOR Certification France APCER Portugal CCC Cyprus CISQ Italy
CQC China CQM China CQS Czech Republic Cro Cert Croatia DQS Holding GmbH Germany FCAV Brazil
FONDONORMA Venezuela ICONTEC Colombia Inspecta Sertifiointi Oy Finland INTECO Costa Rica
IRAM Argentina JQA Japan KFQ Korea MIRTEC Greece MSZT Hungary Nemko AS Norway NSAI Ireland
NYCE-SIGE México PCBC Poland Quality Austria Austria RR Russia SII Israel SIQ Slovenia
SIRIM QAS International Malaysia SQS Switzerland SRAC Romania TEST St Petersburg Russia TSE Turkey YUQS Serbia
IQNet is represented in the USA by: AFNOR Certification, CISQ, DQS Holding GmbH and NSAI Inc.
* The list of IQNet partners is valid at the time of issue of this certificate. Updated information is available under www.iqnet-certification.com

FITTINGS AND FEEDTHROUGHS

4 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T

LEAK DETECTORS

THIN FILM CONTROLLERSV I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 5

Experts in Precise Vacuum Measurement
Capacitive Diaphragm Gauges (CDG) measure
vacuum pressures gas type independent with the
INFICON unique ceramic cell. CDGs offer the best
corrosion resistance with unmatched scale stability
over many years.
To cover the individual application needs, INFICON
CDGs range from the cost effective, small sized

Porter® via the temperature compensated SKY®
CDG025D, to the process gauges SKY®, Edge® andStripe®. For calibration purposes, the Cube® CDGSci
is the best choice.
INFICON CDGs are available with all common vacuum
flange connections used in the industry and can becustomized to others. A variety of different electricalinterface options, including the EtherCAT® fieldbus
interface make the integration easy.
INFICON also offers pressure switches for processcontrol and interlock functions. Nevertheless, INFICON
also supports innovation by developing customized
sensor solutions such as the Spot series and custom
engineered solutions.

Capacitance Diaphragm Gauges
Hot IonPorter® CDG020D
Temperature CompensatedCapacitance Diaphragm Gauge

Cold
CathodeHigh
VacuumUltra High
Vacuum
10-11

10-7

Capacitance
Diaphragm

PiraniMediumVacuum10-3

Low
Vacuum1

High
VacuumUltra High
Vacuum
1000

10-11

10-7

MediumVacuum10-3

Low
Vacuum1

1000

Temperature Controlled Compact
Capacitance Diaphragm Gauge

Accurate and gas type independent
Compact, smallest size in its classCompact, saves valuable tool spaceLong lifetime due to double sensor protection
Corrosion resistant pure ceramic sensor• Sterilization• Vacuum coating• Vacuum monitoring
10-11 mbar – 1000 mbar (ATM)SKY® CDG025D &CDG025D-X3

Edge® CDG025D2,
CDG045D2 & CDG100D2

10-11

10-11 mbar – 1000 mbar (ATM)High
VacuumUltra High
Vacuum10-7• Semiconductor and other harsh processes• 
Chemical and corrosive applications• 
Sterilization

MediumVacuum10-3

Low
Vacuum1

High
VacuumUltra High
Vacuum
1000

10-11

10-7

MediumVacuum10-3

Low
Vacuum1

1000

Stripe® CDG045Dhs &CDG100Dhs

Temperature CompensatedCapacitance Diaphragm Gauge

Temperature Controlled High Speed
Capacitance Diaphragm Gauge

Very accurate and gas type independent
Excellent long-term and temperature stability
Corrosion resistant pure ceramic sensor

Faster than 2 ms response time
Flexible integration with EtherCAT fieldbus
Corrosion resistant pure ceramic sensor• Semiconductor and other plasma processes• 
Industrial vacuum applications• 
Accurate pressure measurement• 
Atomic layer deposition• High speed process control• 
PVD, CVD, Etch

SKY ® CDG045D CDG200D

10-11 mbar – 1000 mbar (ATM)High
VacuumUltra High
Vacuum
10-11

10-11 mbar – 1000 mbar (ATM)10-7

MediumVacuum10-3

Low
Vacuum1

High
VacuumUltra High
Vacuum
1000

10-11

10-7

Temperature Controlled
Capacitance Diaphragm Gauge

6 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T

10-3

Cube® CDGSci

Low
Vacuum1

1000

Temperature Controlled Reference
Capacitance Diaphragm Gauge
True high precision vacuum measurement
Full stable output – Proven by PTB
Flexible communication – Various modern interfaces

Very accurate and gas type independentLong lifetime due to double sensor protection
Corrosion resistant pure ceramic sensor• Semiconductor and other harsh processes• 
Chemical and corrosive vacuum applications• 
Quality and reference pressure monitoring

MediumVacuum• Transfer standard• 
Main reference gauge• 
Research
10-11 mbar – 1000 mbar (ATM)

10-11 mbar – 1000 mbar (ATM)V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 7

Experts in Precise Vacuum Measurement

Application Specific CDG Solutions
Hot IonSpot® CDS500D
Temperature Compensated OEM
Capacitance Diaphragm Sensor

Cold
CathodeHigh
VacuumUltra High
Vacuum
10-11

10-7

Capacitance
Diaphragm

PiraniMediumVacuum
10-3

VGD500Low
Vacuum1

1000

Vacuum Gauge Display
Compact small size
Four digit display for easy read out

Excellent repeatability and long-term stability
Fast response time
Corrosion resistant pure ceramic sensor• For integration into vacuum instrumentation andsystems
10-11 mbar – 1000 mbar (ATM)

AllCeramic Option

VSA / VSD200
Absolute / Differential
Vacuum Switch

High
VacuumUltra High
Vacuum10-11

10-7

Corrosion resistant fully stainless steel sensor
High accuracy
Excellent long-term stability

MediumVacuum10-3

Low
Vacuum
1

The metal free process CDG
1000

Only ceramic surfaces (aluminum oxide) arewetted to process media. This option is available for all CDG products (SKY, Edge, Stripe)• Higher corrosion resistance• 
Lower metal contamination• 
Lower particle contamination• 
Longer lifetime, less maintenance• Atmospheric pressure detection• 
Pressure interlocks• 
Industrial vacuum applications
10-11 mbar – 1000 mbar (ATM)8 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T

V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 9

Experts in Wide Range Vacuum Measurement
INFICON wide range vacuum gauges offer superior accuracy and reliability in compact designs. Four physicalmeasurement technologies cover the whole range ofvacuum from ultra-high vacuum up to atmosphere.
The INFICON Pirani technology enables cost effective
measurement in the low vacuum range and up toatmospheric pressure. The INFICON miniature capacitance diaphragm technology enables precise andgas type independent measurement in the low vacuum
range, whereas the ultra and high vacuum ranges arecovered by the hot or cold ionization technologies.
Each measurement technology is available as a standalone sensor or combined with complementary measurement technologies to enable optimum price toperformance ratio over the complete vacuum range.

1010

PSG5xxCold
Cathode10

10MediumVacuum10-7

Low
Vacuum1-3

High
VacuumUltra High
Vacuum

1000
10-11

10-7

MediumVacuum10-3

PGE300Low
Vacuum1

1000

Pirani Gauge Enhanced
Gold plated tungsten filamentAll-in-one active gauge with integrated LED display
Factory pre-set possibility• Fore vacuum pressure measurement• 
General vacuum measurement and control from
low to high vacuum range

10 -11 mbar – 1000 mbar (ATM)PSG55xHigh
VacuumUltra High
Vacuum
10-11

10-11 mbar – 1000 mbar (ATM)10-7

MediumVacuum
10-3

PSG010 / PSG017 / PSG18

Low
Vacuum1

1000

Pirani Standard Gauge - Passive
Long-established and robust design
Bakeable up to 250 °C
High ionizing radiation resistantSingle sensor technology
Tungsten, nickel or fully ceramic coated sensor• 
Fore vacuum pressure measurement• Interlocks in vacuum systems• 
General vacuum measurement and control
from low to high vacuum• General vacuum measurement and control
for demanding and/or high temperature• Applications from low to high vacuum range
Particle accelerators and fusion machines• • Analytical and R&D applications

10 -11 mbar – 1000 mbar (ATM)PCG55xHigh
VacuumUltra High
Vacuum
10

-11

10

-7

Dual sensor technology
Tungsten, nickel or fully ceramic coated sensor
High accuracy and gas type independence
above 10mbar

MediumVacuum10-3

Low
Vacuum1

1000

PGE050
Pirani Gauge Enhanced – Passive
Convection enhanced principle
Gold plated tungsten filament
Ideal gauge sensor for upgrading your installed
convection and thermocouple gauges• 
Load lock control• Fore vacuum pressure measurement• Interlocks in vacuum systems
10-11 mbar – 1000 mbar (ATM)

1 0 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T

Pirani Gauge Enhanced
Gold plated tungsten filamentAll-in-one active gauge with analog ouput andintegrated RS485 and OLED display

Single sensor technology
Stainless steel measurement cellSpace saving rugged design
Corrosion resistant version

Pirani Capacitance Diaphragm Gauge

1000

Capacitance
Diaphragm

PiraniHigh
VacuumUltra High
Vacuum-11

Pirani Standard Gauge

PGE500Low
Vacuum1-3

10-11 mbar – 1000 mbar (ATM)Hot Ion• 
Fore vacuum pressure measurement• Interlocks in vacuum systems• 
General vacuum measurement and control
from low to high vacuum

MediumVacuum10-7• Fore vacuum pressure measurement• 
General vacuum measurement and control
from low to high vacuum range

Thermal Conductivity Gauges

Pirani Standard Gauge

High
VacuumUltra High
Vacuum-11• 
General vacuum measurement and control from
low to high vacuum range• Fore vacuum pressure management
V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 1 1

Experts in Wide Range Vacuum Measurement10

Hot Ion

BPG400 / BPG402 / BAG402
Bayard Alpert Gauge
Bayard Alpert and Pirani Gauge

Cold
CathodeHigh
VacuumUltra High
Vacuum10

10-11MediumVacuum10-7

BAG302

Low
Vacuum
1

-3

1000

• 
Semiconductor process and transfer chambers• 
Industrial coating• 
General vacuum measuurement andcontrol in low to ultra high vacuum range

1000

High
VacuumUltra High
Vacuum10-11

mbar – 1000 mbar (ATM)

10-11

10-11

High
VacuumUltra High
Vacuum10-7

MediumVacuum10-3

10-7

MediumVacuum10-3

Gemini MAG5xx / MPG5xx

Low
Vacuum1

1000

Cold Cathode Gauge
Cold Cathode and Pirani Gauge
Long lifetime in harsh environments
Excellent ignition properties
No stray magnetic fieldExchangeable ionization chambers

Low
Vacuum
1

Bayard-Alpert Hot Ion Gauge
Two standard long-life yttrium oxide coated iridium
filaments
Digital OLED display with keypad
Easy to exchange sensing element

10-11 mbar – 1000 mbar (ATM)HPG400High Pressure Ionization Pirani Gauge

MediumVacuum10-7

Low
Vacuum
1

-3

10

-11

Capacitance
Diaphragm

PiraniSingle sensor technology (BAG402)
Dual sensor technology (BPG400/BPG402)
Long lifetime
Automatic emission control• Semiconductor process and transfer chambers• 
Industrial coating• 
Measurement and control from atmosphereto ultra-high vacuum (BPG400 / BPG402)

High
VacuumUltra High
VacuumIonization Gauges (Hot and Cold)

1000

Dual sensor technology
Long lifetime
Automatic emission control

10-11 mbar – 1000 mbar (ATM)• Sputter applications• 
Semiconductor process and transfer chambers• 
Industrial coating• 
Analytical and R&D applications• 
General vacuum measurement• 
Base pressure monitoring and control,from atmosphere to ultra-high vacuum

MAG050 / MAG060 / MAG070
Cold Cathode Gauge – Passive
10-11 mbar – 1000 mbar (ATM)

TripleGauge ® BCG450
Bayard-Alpert Pirani Capacitance
Diaphragm Gauge

High
VacuumUltra High
Vacuum
10-11

10-7

Triple sensor technology
Gas type independence above 10mbar
Long lifetime• Semiconductor process and transfer chambers• 
Industrial coating• 
Measurement and control fromatmosphere to ultra high vacuumLong-established and robust inverted magnetron
design. Bakeable up to 250 °C and high ionizing
radiation resistant. Ceramic feedthrough, ignition
aided. Long distance operation
MediumVacuum10-3

Low
Vacuum1

1000• General vacuum measurement and control
for demanding and/or high temperature applications from medium down to ultra-highvacuum range• Particle accelerators• Analytical and R&D applications

MAG084
Cold Cathode Gauge – Passive
10-11 mbar – 1000 mbar (ATM)

Unique magnetic field resistant inverted magnetron
Innovative double ionization chamber, rare earthmagnets, optimised and closed magnetic circuit
Bakeable up to 230 °C and high ionizing radiation
resistant• Special Fusion and R&D applications
presenting strong external magnetic fields

1 2 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T

V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 1 3

Experts in Wide Range Vacuum Measurement
and Gas Analysis
IRG080

Ionization Gauges (Hot and Cold)

Ion Reference Gauge – Passive
Innovative concept of ionization vacuum gauge
Electrode system configuration according to ISO TS
6737
Unmatched accuracy down to 1%, predictable gas
sensitivity, true pressure measurement

BAG050 / BAG051 / BAG052 /BAG053• Demanding processes requiring highmeasurement accuracy• Advanced industrial applications pursuing nocalibration, calibration and metrology

Bayard-Alpert Hot Ion Gauges – Passive
Drop-in solution for most nude and glass tube hot
ion gauge heads
Can be degassed using electron bombardment or
resistive degas
Wide range of emission currents

BAG552• General vacuum measurement and control
from high to ultra-high vacuum range• 
Industrial and analytical applications

Hot Ion Single & Combi Vacuum Gauges
Combines the advantages of up to three different
technologies in a single compact economic package
Perfect longlasting fit from atmosphere to ultrahighvacuum

BAG055
Mini Bayard-Alpert Hot Ion Gauge – PassiveHigh
VacuumUltra High
Vacuum
10-11

10-7

MediumVacuum10-3

Low
Vacuum1• Single-, Dual, Triple Gauge Sensor• Various varieties to fit individual demands• Intelligent filament control on/ off for enhanced lifetime• Sliding emission mode

1000

Miniature and metal enclosed sensor
Drop-in replacement thanks to compact size
Electron bombardment degassing• 
General vacuum measurement and control in thehigh vacuum range• 
Industrial and analytical applications
10-11 mbar – 1000 mbar (ATM)

Optical Gas Analyzers
IE414 / IE514

Hot IonCold
CathodePiraniCapacitance
Diaphragm

High-end Hot Cathode Ion Gauge – Passive
Precise Bayard-Alpert (IE414) and extractor (IE514)
hot ion gauges
High accuracy due to individual calibration
Extreme high temperature bake-out up to 400 °C• General vacuum measurement and control
from medium down to ultra-high vacuum
range
• 
Scientific and R&D applications

1 4 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T

OPG550
Optical Plasma Gauge
The compact and intelligent solution
for vacuum monitoring• Fast chamber leak check• 
Industrial coating• Increase in productivity and yield• Smart algorithm for easy integration• Compact size

V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 1 5

Experts in Vacuum Control and Components
Gauge Controller

VGC501 / 502 / 503

VGC094

VGC083

IRC081

Active Gauge Controller for all Active Sensors including CDG

Passive Gauge Controller for PSG01x, MAG0x0 and MAG084

Passive Gauge Controller for BAG05x, MAG05x and PGE050

Passive Gauge Controller for IRG080

Flexible solution for vacuum pressure monitoring and controlling
Simple operation with three individual bright LED displays, parameter/sensor and general settings with softkeys
Three analog outputs, six setpoint relays
Remote digital RS232 / RS485 serial communication

Operating and display solution to the standardized Ion Reference
Gauge IRG080
User control on all IRG080 gauge parameters set, read-out andswitch on/off functionality remotely via USB
Includes the intuitive «IRC081 User Interface» software• 
General vacuum measurement and control from low to ultra-highvacuum range• Industrial and analytical applications• 
Advanced industrial applications, calibration and metrology labs

Automatic gauge identification
High signal resolution
Up to six free adjustable setpoints• 
Remote gauge control applications• 
Process pressure control• 
Production site and test lab monitoring

Modular all-in solution for vacuum process measurement, control
and data log
Compatible to the wide range of INFICON passive gauges
Plug-in boards for custom measurement and digital communicationinterface
Industrial communication standards (Profibus DP, Profinet) option• 
General vacuum measurement and control from low to 		ultra-high vacuum range• Particle accelerators and fusion machines• Analytical and R&D applications

PGD500

VGC031

IM540

Active Pirani Gauge Display for PSG, PCG, MPG

Passive Gauge Controller for PGE050

Passive Gauge Controller for IE414/514

Large display
Compact design for use on benchtop or rack mountLow cost of ownership pressure visualization device

Displays and controls wide measurement range			
Bright digital OLED display with keypad

Versatile ionization gauge controller Combines up to 4 different
principles of vacuum measurement Pirani and capacitive diaphragm(active), Bayard-Alpert and Extractor (passive) 			
Simple operation with menu guided OLED display			
Built-in RS232 communication interface, optional Profibus DP
commnication card• 
Filling stations in the automotive and RAC industry• 
Pressure control in light bulb production lines• 
General vacuum process and test lab monitoring

1 6 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T

Four user selectable analog output signals, 2 setpoint relays• Cost-effective general vacuum measurement and control
from low to high vacuum range• Fore vacuum pressure measurement, filling stations in theautomotive and RAC industry• General vacuum measurement and control from low to ultra-high vacuum range• Analytical and R&D applications

V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 1 7

Experts in Vacuum Control, Components and
ALD-Coating
Components

ALD-Coating

Fittings

Heated Components

xPartsHigh- and Ultra-High Vacuum
Components, Feedthroughs and Viewports

Heated Exhaust Lines and Assemblies

ALD Coating Service

Fully vulcanized surface heater for low power consumption
Customized design with molded hard shell covers
Cool to the touch on the outside

Highly uniform, out of line of sight, thin film ALD coatings for complex 3D structures

High quality fittings according to international standards,
Stocked worldwide for immediate delivery
Wide variety of mechanical and electrical feedthroughs• All vacuum processes from low to ultra high vacuum• High current feedthrough applications• Visual inspection of vacuum systems through viewports

1 8 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T• Exhaust line applications• 
Condensation exposed vacuum processes• All vacuum systems• Longer lifetime - less corrosion with dense,
pin hole free layer• Higher process yield - less particles, metal-free surface• Faster pump down without out-baking

V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 1 9

Maximizing Productivity and Yield
Leak Detectors

Chemical identification and Monitoring Systems­

INFICON refrigerant, hydrogen and helium leak detectors are the worldwide leading brand for quality
control at refrigeration, air conditioner, food packaging,
appliance and automotive manufacturing facilities andtheir supply chains, as well as in the semiconductor/
coating markets. As product quality, safety and environmental concerns lead to more stringent leak testing
requirements, INFICON helps you respond by providing a complete line ­of highly sensitive leak detectors
in a variety of configurations for sub-assembly andmid-production quality testing, as well as final testing
to ensure system integrity. Field service professionals
in air conditioning/refrigeration and automotive rely on
the superior performance of our reliable, convenientand affordable service tools.

Gas chromatography / mass spectrometry (GC / MS)sets the benchmark for the most accurate identificationof organic chemicals of any analytical technique.
INFICON technology is being used throughout theworld for emergency response, chemical warfare agent
detection, early detection of chemical contamination inwater source and distribution systems, hazardous waste
site investigation and industrial hygiene. HAPSITE ER
Chemical Identification Systems give you immediate,
laboratory quality results in the field, and gives you theanswers you need to make better and faster decisions
about critical health and safety issues.

The INFICON toolbox of market-leading products forservice technicians includes innovative refrigerant leakdetectors, combustible gas leak detectors, ultrasonicleak detectors, refrigerant recovery systems, refrigerant charging scales and vacuum pressure gauges. With
INFICON service tools, you are assured of having theright tool to get the job done quickly and accurately,saving you time and money.

UL3000 Fab Helium Leak Detector

HAPSITE® ER Chemical Identification System

Sensistor Sentrac® Hydrogen Leak Detector

Gas Analysis Systems

Thin Film Controllers, Monitors, and Crystals

INFICON instruments are used in renewable energy
research and production, hydrocarbon processing,refining and chemical productions. From research anddevelopment to production, we are investing in gas
analysis technologies to help enable you to operate
more efficiently. INFICON offers compact, transportable, easy-to-use instruments, like our Micro GC Fusion
Gas Analyzer to make measurements in the lab, at thepilot plant or in the field close to the sample point. The
accurate analysis provides better understanding of
raw materials, process control of intermediates or thequality of final products.

Control your profit and maximize your competitiveedge with market-leading products for thin film deposition, proven expertise, and worldwide support fromthe technology leader in measurement and control.
INFICON controllers, monitors, quartz crystal sensors,and quartz crystals are designed and manufactured
to provide the best quality, accuracy, and the longest
crystal life in thickness monitoring and process control
for PVD applications.

IC6 Thin Film Deposition Controller

Micro GC Fusion® Gas Analyzer

Transpector ® MPH
2 0 | V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T

V I S I O N A R Y S E N S O R T E C H N O LO GY VAC U U M M E A S U R E M E N T | 2 1

Visionary Sensor
Technology

Excellent Customer Support is a Commitment
INFICON provides a global network of sales and service
centers. These centers are staffed with local service andapplication experts who can assist you in choosing the bestsolution for your individual product application and provide
fast support if service is needed.

Korea
INFICON Ltd.

Asia and Pacific

Americas

China

United States
INFICON Inc.
East Syracuse, NY
Phone : +1 315 434 1100
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