Gemini™ MxG5xx 大气压至超高真空真空计

INFICON Gemini™ 倒置磁控管真空计是所有真空测量应用（专利申请中）的动力源泉。Gemini将两个传感器系统整合在一个小装置中，测量范围从大气压至 1x10 – 9 毫巴。获得专利的超低杂散磁场设计为全新的应用领域开启了大门。独特的可互换式双室传感器单元不用清洗并减少了维护，这使使Gemini成为同类产品中最坚稳和经济的真空计。
Gemini冷阴极和组合真空计配备了完全集成的数字电子设备，使系统集
成具有很强的灵活性。冷阴极和皮拉尼组合选项提供了跨越多个应用领域的无缝转换、可靠性、实用性和灵活性。

好处nLong lifetime in harsh environmentsn

在恶劣环境下，使用寿命长
n

低杂散磁场

n

零维护 - 可换插头n超紧凑尺寸n抗腐蚀馈入装置n

可选测量电流n

2 relay setpoints (MxG55x)n

EtherCAT and RS232/ RS485 digital interace

1Gemini™ MxG5xx 大气压至超高真空真空计订购信息2

Gemini™ MxG5xx 大气压至超高真空真空计

规格类型
测量系统

MAG5xx

MPG5xxCold cathode ionization
measurement system(according to the invertedmagnetron principle)

Pirani and cold cathodeionization measurement
system (according to theinverted magnetron principle)测量范围（空气、N2）

mbar

1×10⁻⁹ … 1000测量范围（空气、N2）

Torr(7.6×10⁻¹⁰ … 760)测量范围（空气、氮气）mbar

1×10⁻⁹ … 1×10⁻²测量范围（空气、氮气）Torr(7.6×10⁻¹⁰ … 7.6×10⁻³)

准确度 (N2)
1×10-8 … 1×10-2 毫巴% of reading30

1×10-2 … 100 毫巴% of reading-

100 … 1000 毫巴% of reading-

准确性 (N2)
1×10-8 … 1×10-2 毫巴% of reading-

1×10-2 … 100 毫巴% of reading

30

100 … 1000 毫巴% of reading50

可重复性 (N2)
1×10-8 … 1×10-2 毫巴% of reading

5-

1×10-8 … 100 毫巴% of reading-

5anyany

10 (limited to inert gases<55°C)

10 (limited to inert gases<55°C)

安装定位
容许压力

bar (absolute)容许温度运行（环境）°C+5 ... +55+5 ... +55

法兰烘烤 (1)°C<150<150储存

°C-40 ... +70-40 ... +70

灯丝温度

°C

-120

1×10-7 … 1×10-2 毫巴%<95 (non-condensing)<95 (non-condensing)

1×10-8 … 1×10-2 毫巴%<70 (non-condensing)<70 (non-condensing)

一年 30 天的相对湿度

供电电压在量规 (2)V (dc)

电源电压

3Gemini™ MxG5xx 大气压至超高真空真空计+14.5 ... +30

规格类型

MAG5xx在量规 (2)V (dc)

MPG5xx+14.5 ... +30

供电电压
波纹

V (p-p)<1电源电压波纹V (p-p)
<1

供电电压
功耗

W<2电源电压
功耗

W<2供电电压
待连接的保险丝

AT<1电源电压
待连接的保险丝

AT<1电压范围
模拟输出V

0 ... +10.5

0 ... +10.5

错误信号
输出阻抗

Ω

2x10错误信号
负载阻抗kΩ>10 (short circuit-proof)

量规标识kΩ

85

3MAx-00x-0x0NV-

3MBx-00x-0x0P

V+1.398 ... +8.598

3MAx-00x-0x0Q

V-

3MAx-xxx-xxxN

V+1.5 ... +8.5

3MBx-xxx-xxxP

V-

3MAx-xxx-xxxQ

V+0.667 ... +10测量范围状态（针 6）
仅皮拉尼模式V0 (low)

冷阴极点火V-组合皮拉尼/冷阴极模式 3)

V+15 ... +30 (high)4Gemini™ MxG5xx 大气压至超高真空真空计规格类型

MAG5xx

MPG5xx

工作电压kV

<3.3

工作电流高

µA<500电压比压力
3MAx-00x-0x0N

volts per decade-3MBx-00x-0x0P

volts per decade

0.6 (logarithmic)

3MAx-00x-0x0Q

volts per decade-3MAx-xxx-xxxN

volts per decade

1 (logarithmic)

3MBx-xxx-xxxP

volts per decade-3MAx-xxx-xxxQ

volts per decade1.33 (logaritmic)

工作电流低

µA

<100

重量
DN 25 ISO-KF

g<280

DN 40 ISO-KF

g

<320

DN 40 CF-F & CF-Rg

<570

错误信号
错误信号

V
09.5 ... +10.5

3MAx-xxx-xxxN

V<+0.53MA-xxx-xxxQ

V

<+0.3

3MBx-xxx-xxxP

V-

Output impedanceΩ
2 x 4.7 (short circuit-proof)

标准符合CE标准
EMC (EN 61000-6-2, EN61000-6-3), EN 61010-1 &RoHS
Load impedancekΩ>10 (short circuit-proof)

维护none阶跃响应时间p > 10-6 毫巴ms<100阶跃响应时间

5Gemini™ MxG5xx 大气压至超高真空真空计<100规格
类型MAG5xx

p = 10-8 毫巴sMPG5xx~1~1量规标识 (FCC connectorgauges)
3MAx-0xx-000NkΩ-

3MAx-0xx-000Q

kΩ

100

3MBx-0xx-000P

kΩ

-mA

100

High Voltage is ON

V (dc)+14.5 ... +30 (depending on
supply voltage)

High Voltage is OFF

V (dc)

0状态（针 6）
Current rating状态（针 6）

Status signal, digital output (Dsub connector)
Supply voltage

V (dc)<30High voltage ONV (dc)
0Status signal, digital output (Dsub connector)
Current ratingmA

100 (sink)Status signal, digital output (Dsub connector)
High voltage OFFopen电气连接
3Mxx-00x-000x

FCC68, 8-pin, female

3Mxx-00x-010x

D-sub, 9-pin, male

3Mxx-0xx-000x

FCC68, 8-pin, female

3Mxx-0xx-010x

D-sub, 9-pin, male

3Mxx-0xx-04xx

D-Sub HD, 15-pin, male (forRS232/485 version)

3Mxx-xxx-x2Gx

D-Sub HD, 15-pin, male (forEtherCAT Version)传感器电缆
3Mxx-00x-000x

6Gemini™ MxG5xx 大气压至超高真空真空计

8-pin, shielded规格类型MAG5xx

3Mxx-0xx-000x

8-pin, shielded

3Mxx-0xx-010x9-pin, shielded

MPG5xx3Mxx-0xx-04xx
15-pin, shielded (forRS232/485 version)
3Mxx-xxx-x2Gx15-pin, shielded (forEtherCAT version)

电缆长度50 米电缆

m< 50 (8x0.14 mm²)

75 米电缆

m< 75 (8x0.25 mm²)

100 米电缆

m< 100 (8x0.34 mm²)

300 米电缆

m< 300 (8x1.00 mm²)

FCC connector cablem<50 (0.14 mm²/ conductor)

High voltage (in the measuringchamber)
Ignition voltage

kV

<4.5

工作电压kV<3.3

High current

µA

<380

Low currentµA<130Current (in the measuringchamber)Setpoint relays (MxG55x)
Range (N2)mbar bar

5x10₋₅ ... 1500

Setpoint relays (MxG55x)
Relay contact

normally open (NO), potential
free

Setpoint relays (MxG55x)
Hysteresis% of threshold

10

Setpoint relays (MxG55x)
Contact rating of mechanicalrelays

V/A<30/ <1ms<30

Setpoint relays (MxG55x)
Switching time
曝露在真空的材料

7Gemini™ MxG5xx 大气压至超高真空真空计规格类型

MAG5xx

MPG5xx3Mx0-00x-0x0x

W, Ni alloy, AI₂O₃, glass,stainless steels

3Mx3-00x-0x0x

Ni alloy, AI₂O₃, stainlesssteels

3Mx0-xxx-xxxx

Ni alloy, Mo, AI₂O₃, glass,stainless steels

3Mx3-xxx-xxxx

Mo, AI₂O₃, stainless steels

3Mx0-11x-xxxx

Ni alloy, Mo, Al₂O₃, glass, Ti,
stainless steels

3Mx3-11x-xxxx

Mo, Al₂O₃, Ti, stainless steels

内部容量22.8

DN 25 ISO-KF

cm³~19.9

DN 40 ISO-KF

cm³~20.9

DN 40 CF-F

cm³~25.2

DN 40 CF-R

cm³~25.6

cm³

22.8

22.8

重量 (MxG50x)
DN 25 ISO-KF

g<280

DN 40 ISO-KF

g

<320

DN 40 CF-F & CF-R

g

<570

DN 25 ISO-KF

g<500DN 40 ISO-KFg<320

DN 40 CF-F & CF-Rg<780

Weight (MxG55x)

防护等级IP 40

CE conformity
EMC

2014/30/EU, EN 61000-6-2,EN 61000-6-3, EN 61326-1

RoHS

2011/65/EU

SafetyEN 61010-1

RS232C / 485C (MxG50x)
Baud rates

kBaud

9.6/ 19.2/ 38.4/ 57.6

RS232C / 485C (MxG50x)
Address

8Gemini™ MxG5xx 大气压至超高真空真空计

2 switches (address 00 - 255)

IP 40

规格类型

MAG5xxDigital functions

Read pressure, select Units:Torr, mbar, Pa, micron,counts. Monitor gauge Status,
detailed Alarm and warning
Information, safe state allows
Definition of behaviour incase of error.

Connector for RS232 & RS485

D-Sub HD, 15-pin, male

EtherCAT® (MxG55x)
ProtocolEtherCAT?????

Communication standard
ETG.5003.1 S (R) V1.1.0 ⁴⁾
ETG.5003.2080 S (R) V1.3.0⁵⁾
Node address

Explicit Device Identification

Physical layer

100Base-Tx (IEEE 802.3)

Digital functions

Read pressure, select Units:Torr, mbar, Pa, micron,Counts. Monitor gauge
Status, detailed Alarm andwarning Information, safe
state allows Definition ofbehaviour in case of error.

EtherCAT connector

2 x RJ45, 8-pin (socket),Input & output

EtherCAT cableSpecial Ethernet Patch cableor crossover cable, shielded(CAT5e Quality or higher)

EtherCAT® (MxG55x)
Cable lenght

9m (ft.)Gemini™ MxG5xx 大气压至超高真空真空计<100 (330)

MPG5xx

1）没有电子元件。
2）电源单元的最小电压必须与传感器电缆的长度成比例地增加。
3）冷阴极点燃。

10Gemini™ MxG5xx 大气压至超高真空真空计备件MAG5xx

MPG5xxMAG500 spare sensor, 25KF, SS

351-500-

MAG500 spare sensor, 25KF, TI

351-502-

MAG500 spare sensor, 40CF-F, SS

351-524-

MAG500 spare sensor, 40CF-F, TI

351-526-

MAG500 spare sensor, 40CF-R, SS

351-536-

MAG500 spare sensor, 40CF-R, TI

351-538-

MAG500 spare sensor, 40KF, SS

351-512-MAG500 spare sensor, 40KF, TI

351-514-MAG504 Ersatzsensor, 25KF, TI

351-503-

MAG504 spare sensor, 25KF, SS

351-501-

MAG504 spare sensor, 40CF-F, SS

351-525-

MAG504 spare sensor, 40CF-F, TI

351-527-

MAG504 spare sensor, 40CF-R, SS

351-537-

MAG504 spare sensor, 40CF-R, TI

351-539-

MAG504 spare sensor, 40KF, SS351-513-

MAG504 spare sensor, 40KF, TI

351-515-

MPG500 spare sensor, 25KF, SS-351-506

MPG500 spare sensor, 25KF, TI-351-508

MPG500 spare sensor, 40CF-F, SS-351-530

MPG500 spare sensor, 40CF-F, TI-

351-532

MPG500 spare sensor, 40CF-R, SS-

351-542

MPG500 spare sensor, 40CF-R, TI-

351-544

MPG500 spare sensor, 40KF, SS-351-518

MPG500 spare sensor, 40KF, TI-351-520

MPG504 spare sensor, 25KF, SS-351-507

MPG504 spare sensor, 25KF, TI-351-509

MPG504 spare sensor, 40CF-F, SS-

351-531

MPG504 spare sensor, 40CF-F, TI-351-533

MPG504 spare sensor, 40CF-R, SS-

351-543

MPG504 spare sensor, 40CF-R, TI-351-545

MPG504 spare sensor, 40KF, SS-

351-519

MPG504 spare sensor, 40KF, TI-351-521

Spare ion chamber ss

351-555351-555

Spare ion chamber ti

351-556351-556

起辉器351-995

351-995

11Gemini™ MxG5xx 大气压至超高真空真空计附件
MAG5xx

MPG5xxBaffle for BPG400

353-512353-512

MxG50x 点火单元351-550

351-550

中心圈 with baffle DN 25 KF

211-113211-113细目过滤中心环组件DN 25 ISO-KF

211-098

211-098

尺寸

www.inficon.com

reachus@inficon.com

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09.08.2016=> Accuracy
MPG at 1x102 ...10mbar
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