Series 946Vacuum System ControllerThe Series 946 is a versatile half-rack vacuum gauge measurement and control system. TheSeries 946 provides power and simultaneous readout for up to six different vacuum gauges 		and/or mass flow controllers, with options for controlling pressure.
This highly flexible vacuum system controller supports a wide range of sensor technologies,including Baratron® capacitance manometers, cold cathode, hot cathode, standard Piraniand convection Pirani sensors for a measurement range from ultra-high vacuum to aboveatmospheric pressure. In addition, the Series 946 Controller will also monitor and control MKSmass flow controller Series G, I, or P and legacy mass flow controllers along with MKS pressurecontrol valves.
Internal communication between sensor cards, provides a combined output across as manyas three sensors for one continuous pressure reading. The internal control feature providesautomatic control of ion gauges, protecting them from accidental power on at high pressures.
The Series 946 also provides set point relays for external signals and control and may beconfigured to provide upstream or downstream system pressure control. Serial communicationsand individual analog outputs are also furnished as standard features.

Product Features• Simultaneous control and readout for up to six vacuumgauges and/or six mass flow controllers for ultimateversatility• Pressure readings from 10,000 Torr down to 10-11 Torr,eliminating the need for individual electronics for each sensor• Flow ratio control using multiple mass flow controllersKey Benefits• Intelligent communication between gauges enables areference sensor to span or zero another gauge allowing foraccurate and continuous measurement over wide pressureranges• Closed-loop pressure control optionfor use with MKS valves eliminatesthe need for separate pressure controlelectronics• RS232/485 computer control standardin all configurations for ease of systeminterfacing• Twelve set point relays are included inthe base unit for system control flexibilityThe Series 946 provides twelve user programmable set pointrelays with adjustable hysteresis, four assigned to each of thethree card slots. The analog outputs can be programmed aslinearly scaled, logarithmically scaled, or as set points, andcan be assigned to any of the six sensor channels.
With the installation of a valve drive card, fast and accurateclosed-loop digital PID pressure control is achieved withan MKS gas proportioning valve or exhaust throttle valve.
Additionally, upstream pressure control can be accomplishedwith a mass flow controller and an MFC card operating inratio mode.

Dimensional Drawing						Note: Unless otherwise specified, dimensions are nominal values in inches(mm referenced).

Commands are activated through the front panel or via anRS232/485 interface, and all entry parameters are stored innonvolatile memory in case of power loss.
The Series 946 has the versatility to be reconfigured as yourneeds change. With the reassignment of channels and theaddition of cards, the Series 946 affords the flexibility neededfor future upgrades.

Series 946 Back Panel													SpecificationsDisplay320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. 						Display indicators for unit of measure, calibration functions, user calibration, set points, 					PID control status and valve position.

Compatible Sensors/TransducersMKS Baratron Capacitance Manometers providing 0 to 10 VDC output*							MKS Differential Baratron Capacitance Manometer, 226A								MKS Convectron®/Convection Series 275/317										MKS Cold Cathode Ionization Sensors - Series 423, 431 and 422								MKS Hot Cathode Ionization Sensors (Nude and Mini-Ion gauge types)Compatible Mass Flow ControllersMKS Mass Flow Controller: G, I, P Series and legacy products**Compatible Pressure Control ValvesMKS 248A, 148J, 154A (Solenoid Control Valve), 153D and T3Bi (Exhaust Throttle Valves)Pressure Measurement Range10,000 Torr to 10-11 Torr (Dependent upon sensor type)Measurement Range1.0 x 10-11 to 10,000 Torr												1.0 x 10-11 to 2.7 x 10+4 mbar											1.0 x 10-9 to 2.7 x 10+6 Pascal											1.0 x 10-8 to 2.0 x 10+7 micronsPressure UnitsTorr, mbar, PascalFlow Unitssccm and slmOperating Temperature5° to 40° C (41° to 104°F)Storage Temperature10° to 55°C (50° to 131°F)Relative Humidity80% max for temperatures less than 31°C, decreasing linearly to 50% maximum at 40°CSize			½ rack, 2U High, 13" DeepPower Requirement and Consumption150 watts maximum 100 - 240 VAC 50/60 HzSet Point RelaysTwelve pressure dependent set points (4 per card slot); SPST relays,			contact rating 2 amps @ 30 VACOutputBuffered, log linear and linear output for each channel and log linear for combined channelsFront Panel ControlsPower on-off switch, setup and operational commands can be accessed via the keypadInsulation CoordinationOver voltage Category II, Pollution Degree 2DimensionsHalf 19" Rack, 2U, 3.47" x 9.47" x 13.00"Controller Weight8 lbs. (3.6 kg)Compliance

CE* Limited to power requirements of ≤1 amp, cable connections and Full Scale ranges.							** Any MFC requiring ±15 VDC or +15 to +24 VDC, 0 - 5 VDC set point and standard 15 pin or 9 pin D-sub cable connection.Ordering InformationBaseControllerCountryCodeCard Slot"A"Card Slot"B"Card Slot"C"Comm/PressureControl SlotPart CodePart CodePart CodePart CodePart CodePart Code946USCC/CLCold CathodeCC/CLCold CathodeCC/CLCold CathodeNABlank

CTDual Convection Pirani/Standard Pirani

CTDual Convection Pirani/Standard Pirani

CTDual Convection Pirani/Standard Pirani

PCPressure Control

CMDual Baratron®/Piezo

CMDual Baratron®/Piezo

CMDual Baratron®/Piezo

HCHot Cathode LPN/Mini-Ion Gauge

HCHot Cathode LPN/Mini-Ion Gauge

HCHot Cathode LPN/Mini-Ion Gauge

FCDual Mass FlowController

FCDual Mass FlowController

FCDual Mass FlowControllerNABlankNABlankNABlankEUJPUKCA(Canada)Sample Part Number: 946-US-CMFCNA-PC946 with Dual Capacitance Manometer and Dual Mass Flow Controller gauge cards and Pressure Control card in the comm port.
Standard controller includes power cord for country selected and accessory connectors.
Plug-in Controller Modules and AccessoriesMKS Cold Cathode Cables100015267			 Plug-in Controller Board for Dual Capacitance Manometer/Piezo (CM)100015132			 Plug-in Controller Board for Dual Convection Pirani Sensor (CT)100018446			 Plug-in Controller Board for Cold Cathode Sensor (CC)100018448			 Plug-in Controller Board for Cold Cathode Sensor, TTL (CL)100015641			 Plug-in Controller Board for Hot Cathode (Nude/Mini-Ion Gauge) (HG)20000712			 Plug-in Controller Board for Dual Mass Flow Controllers (FC)100016609			 Plug-in Controller Board for Pressure Control (PC)RM-13			 946 Half-Rack Controller Installation Kit100007700			 Full Rack Mounting Kit (2 Controllers)100016217		 10 ft cable to connect 431 cold cathode100016218		 25 ft cable to connect 431 cold cathode100016295		 10 ft cable to connect 423 I-Mag cold cathode100016296		 25 ft cable to connect 423 I-Mag cold cathode317 Convection Pirani Cables103170006SH103170007SHMKS Hot Cathode Cables100010909		 10 ft cable to connect Nude Tube Hot Cathode Sensor100010910		 25 ft cable to connect Nude Tube Hot Cathode Sensor100011106		 10 ft cable to connect Mini-Ion Gauge Sensor100011107		 25 ft cable to connect Mini-Ion Gauge SensorMKS Mass Flow Controller Cables10 ft cable to connect 317/34525 ft cable to connect 317/345100016744		 10 ft cable to connect MKS MFC, with ±15V or +15-24V and 15 pin std D-sub100016745		 25 ft cable to connect MKS MFC, with ±15V or +15-24V and 15 pin std D-sub275 Convectron® CablesMKS Pressure Control Valve Cables100016980		 10 ft cable to connect 946 to 275 Convectron100016981		 25 ft cable to connect 946 to 275 Convectron100018192		 10 ft cable to connect 148/248/154 Pressure Control Valve100018191		 10 ft cable to connect 153 Throttle Valve				For T3Bi cabling, please contact MKS Applications Engineering.

MKS Baratron® Capacitance Manometer Cables100007555		 10 ft cable to connect 946 to 626 and 627 Baratrons with 15 pin connector100007556		 25 ft cable to connect 946 to 626 and 627 Baratrons with 15 pin connector100016951		 10 ft cable to connect 946 to 722 and 226A Baratrons with 9 pin connector100016952		 25 ft cable to connect 946 to 722 and 226A Baratrons with 9 pin connectorFor any additional cabling, please contact MKS Applications Engineering.

www.MKSINST.com+1-978-645-5500 I +1-800-227-8766946_01/20©2020 MKS Instruments, Inc.
Specifications are subject to change without notice.

MKS products provided subject to the US Export Regulations. Export, re-export, diversion or transfer contrary to US law (and local country law) is prohibited.
Some Baratron® capacitance manometer products may not be exported or re-exported to many countries without both US and local government export licensesunder ECCN 2B230.
mksinst™ is a trademark and Baratron® and Convectron® are registered trademarks of MKS Instruments, Inc., Andover, MA.