High Accuracy SystemsAA06A and AD06A Sensors670C Signal ConditionerThe MKS High Accuracy Baratron® Pressure Measurement Systems combine advanced capacitance diaphragmsensor technology and solid state electronics with the features demanded by today’s process and metrologyengineers to make precision pressure measurement easy – whether on the production line or in the researchor metrology laboratory. If your principal concern is accurate pressure measurement, or you need to measurepressure over a very wide range, the MKS High Accuracy Systems are ideal solutions. Long consideredstandards of pressure measurement in both industry and research, MKS high accuracy Baratron systems arecompletely modular with a full selection of pressure ranges, levels of accuracy, options, and accessories thatensure there’s a system exactly right for your application.

AA06A and AD06A Sensors			All MKS high-accuracy sensors are single-ended dual-electrode/AC bridge devices that are extremely stableand designed to minimize the effect of temperature changes. Full Scale ranges are available from 25,000 Torrdown to 0.1 Torr. Each range measures down to 1 part in 106 Full Scale with selected percent Reading accuracylimited by this resolution and with accuracies ranging from 0.25% to 0.05% of Reading. Models are available inabsolute and differential configurations. They are constructed of Inconel®
and stainless steel, allowing use with many wet, dirty, or corrosive gases.

Product Features• Excellent thermal stability due to extremely low temperature coefficients• Highest accuracy pressure measurement instruments available• Designed for use with 670C Signal Conditioner• Ideal for calibration Transfer Standards• Six decades of measurement often eliminates several transducers withlimited resolutionMKSC
LBARATRONDimensional DrawingNote: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).670 Signal DisplayThe 670C Display Unit has a front panel that allows for full control of all the instrument’s features. All functions can bemonitored and controlled via the RS-232 interface. Range switching may be done manually or automatically with the670C, selecting the lowest possible on-scale range. A key-lock switch on the front panel determines Local or Remotecontrol. The 670C may be used with any sensor Full Scale and will display pressure in any one of 12 engineering units.
Sensor response time may be set for 1, 40, or 400 msec, and a data averaging feature allows the user to averagesignals from 0.1 to 10 seconds, to optimize the pressure readings for transients or noisy pressures.

Product Features• Microprocessor-based electronics unit provides power, signalconditioning, and display for operating all High AccuracyBaratron pressure sensors• Analog and digital input/output signals facilitate interfacing tocomputers and process control systems• Two built-in alarm relays provide process pressure trip pointsAccessoriesRack MountsThe RM-6 Rack Mount Kit is used to adapt any half-rackinstrument (3 1/2” x 9 1/2”) to full-rack size (3 1/2” x 19”).

Isolation ValvesTo decrease the frequency of zeroadjustment, it is recommendedthat a simple manual or airactuated bellows-type isolationvalve, such as MKS Part No.
108818 (NC11 Cleaned), beinstalled between a low rangeabsolute sensor head and the processing system.

Bellows AdaptersFrequently it is desirable, becauseof mechanical configuration orsystem vibration, to attach theBaratron sensor to the processingsystem using flexible bellowscouplings. All flexible tubing is321 stainless steel, 1/4” diameter,and available in 6” and 12” active bellows lengths. The use offlexible bellows minimizes thermal expansion effects on sensorzero induced by hard plumbing to the system.

274B Three-channel Sensor MultiplexerThe 274B provides operationof one, two, or three highaccuracy sensors with a single670 Electronics Unit. The 274Bprovides heater power fortemperature-controlled sensors(AA06A, AD06A). All sensors arekept warmed up and ready for reading by the 670. The 670can sequentially read any one of the sensors, as selected by aswitch on the 670’s front panel, or by a remote ground closure.SpecificationsAA06A AbsolutePressureRanges(mmHgFull Scale)Resolution(of Full Scale)0.11 x 10-6110
10010001 x 105000100001500020000250001 x 10-6

-6Accuracy% of Reading(± temp.
coeff.)UseableMeasurementRange(Full Scale to)S: 0.12%Temp.
CoefficientsZero(Full Scale°C)Span(Reading°C)

2 x 10-530 ppm100 ppmO: 0.08%1 x 10-530 ppm100 ppmS: 0.12%2 x 10-515 ppm20 ppmO: 0.08%1 x 10-54 ppm20 ppmO: 0.05%1 x 104 ppm20 ppm15 ppm20 ppmS: 0.12%O: 0.08%2 x 10-51 x 10-54 ppm20 ppmS: 0.12%2 x 10-530 ppm100 ppmO: 0.08%1 x 10-530 ppm100 ppmS: 0.12%2 x 1015 ppm20 ppmO: 0.15%(1)-51 x 104 ppm20 ppmS: 0.25%1 x 10-54 ppm20 ppmO: 0.08%1 x 10-54 ppm20 ppmO: 0.05%1 x 10-54 ppm20 ppm-5Volume(cc)MaximumMaximumOverpressureLinePressure

Px

Pr2.5N/A40 psiaN/A2.5N/A45 psiaN/A14N/A125% F.S.

N/A3.52540 psid(2)150 psigOperatingTemperatureRange (°C)

Materials Exposedto GasesFittingsComplianceN/ASwagelok®
4 VCR®

CEInconel,StainlessSteel,Alumina,PalladiumGlassSwagelok4 VCRCE

Px

Pr15° - 40°Ctemperatureregulatedat 45°CInconel,StainlessSteel15° - 40°Ctemperatureregulatedat 45°CInconel,StainlessSteelAD06A Differential0.1110
10010001 x 10-61 x 10-6-53.5

2545 psid(2)150 psigS = Standard accuracy for particular range/calibration. O = Optional accuracy for particular range/calibration.
Notes:(1)0.15% of Reading and 0.25% of Reading accuracies on AD06A sensors are for bidirectional calibrations.
(2)For differential sensors: overpressure limits specified in above table are only for Px > Pr. For reverse overpressure (Pr > Px) on differential sensors, overpressure limit is 125% of Full Scale.

670C Signal DisplayCompatible Sensors & RangesDisplayResolution
		Engineering Units
		RangesResponse TimeData AveragingAnalog OutputsAnalogImpedanceConnectorsDigital OutputsRS-232 ConnectorProcess Trip Point Relays
		Operating Temperature RangePower Required		Size		AA06A and AD06A from 0.1 to 25,000 mmHg (Torr) Full Scale2-line LCD, readings updated twice/second3½, 4½, or 5½ digits, user-selectable								(Note: Useable system resolution depends upon sensor choice and application.)			Torr, mTorr, mmHg, mbar, Pa, kPa, inHg, inH20, cmH20, psi, % of Full Scale, ppm of Full Scale(All user-selectable)x1, x0.1, x0.01 of sensor Full Scale, manual or auto-ranging1, 40, or 400 msec, user-selectable0.1 to 10 sec, user-selectableComplianceCE0 to ±10 VDC on each range into >10K Ω load							<1 Ohm											I/O: 37-pin female Type “D”, Remote signal: 9-pin male Type “D”9-pin male Type “D”Two, 24 VAC/DC @ 1 Amp resistive (contact ratings)Two LEDs on front panel indicate status of each relay15° to 40° C90-132 or 180-264 VAC, 50-60 Hz, 75 VA (max.) 						IEC-AC power line connector88 mm H x 240 mm W x 234 mm D (3.5” H x 9.5” W x 9.25” D)Ordering InformationOrdering Code Example: AA06A11TRC/AD06A11TRCAA06A Absolute Pressure SensorAD06A Differential Pressure SensorCodeConfigurationAA06AAD06AAA06AAD06A

.1T
01T
11T
12T
13T
53T
14T
RBT
24TRCT11T

R

RPressure Range (mmHg)0.1 mmHg				1 mmHg					10 mmHg					100 mmHg					1000 mmHg					5000 mmHg (AA06A only)			10000 mmHg (AA06A only)			15000 mmHg (AA06A only)20000 mmHg (AA06A only)25000 mmHg (AA06A only)FittingsSwagelok 4 VCR femaleAccuracyUnidirectional Calibration±0.12% of Reading		±0.08% of Reading 		±0.05% of Reading (1-1000 mmHg ranges only)CB
ABidirectional Calibration±0.25% of Reading (1-1000 mmHg ranges AD06A only)±0.15% of Reading (1-1000 mmHg ranges AD06A only)E
DOrdering Code Example: 670CD21670C Electronics/Display Unit with RS232 interfaceOrdering Code Example: 274B274B Three-channel Sensor MultiplexerCCodeConfiguration670CD21670CD21CodeConfiguration274B274BCable Information670C or 274B Sensor to AA06A or AD06A Sensorsalso works for older 390, 398, 590, 690, and 698)RCB270S-2-10 (10ft shielded)RCB270S-2-20 (20ft shielded)For cables longer than 20ft, consult factory.

AA06A/AD06A_06/19©2019 MKS Instruments, Inc.

www.MKSINST.com+1-978-645-5500 I +1-800-227-8766Some Baratron® capacitance manometer products may not be exported to many end user countrieswithout both US and local government export licenses under ECCN 2B230. Specifications are subjectto change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKSInstruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok MarketingCo., Solon, OH. Inconel® is a registered trademark of Inco Alloys International, Inc., Huntington, WV.