Capacitance Diaphragm Gauge
CDG160D
CDG200D

Operating Manual
Incl. EU Declaration of Conformity
Further languages on our website:
CDG160D, CDG200D

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1

Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.

ValidityThis document applies to products of the CDG160D and
CDG200D series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parametersettings (e.g. factory setting of setpoint) as defined in thecorresponding ordering information.

2

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*) ETG.5003.2080 S (R) V1.0.0
tina53e1-g(2019-03)**) ETG.5003.2080 S (R) V1.3.0
3

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in thisdocument correspond to gauges with D-Sub 15-pin connector
and DN 16 ISO-KF vacuum connection. They apply to the othergauges by analogy.
We reserve the right to make technical changes without priornotice.

Intended Use
The temperature compensated Capacitance Diaphragm Gaugesof the CDG160D and CDG200D series are intended for absolutepressure measurement of gases in their respective pressure
ranges (→  2).
The gauges belong to the SKY® Smart Sensors family and canbe operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate controller.

Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection ismeasured capacitively and converted into an analog linear output signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating thesensor to a constant temperature of 160°C or 200 °C which results in a compensation of changes in the ambient conditions
and a reduced deposition of process products and by-products inprocess applications. An integrated baffle protects the sensor
against coating.

Trademarks
SKY®
VCR®

4

INFICON GmbH
Swagelok Marketing Co.

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Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085

Scope of Delivery
1× gauge CDGxxxD
1× insulation shell
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English

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5

Contents

6

Product Identification
Validity
Intended Use
Functional Principle
Trademarks
Patents
Scope of Delivery

2
2
4
4
4
5
5

1 Safety
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety Instructions
1.4 Liability and Warranty

8
8
8
9
9

2

10

Technical Data

3 Installation
3.1 Vacuum Connection
3.2 Power Connection
3.2.1 D-Sub, 9-pin Connector
3.2.2 D-Sub, 15-pin Connector

16
16
20
21
22

4 Operation
4.1 Status Indication
4.2 Zeroing the Gauge
4.2.1 <ZERO> Adjustment
4.3 Switching Functions
4.4 Activating the Factory Setting (Factory Reset)
4.5 Diagnostic Port (RS232C Interface)

23
23
24
25
29
32
33

5 Deinstallation
5.1 Power Connection
5.2 Vacuum connection

34
34
34

6

Maintenance, Repair

37

7

Returning the Product378Disposal

38

9

Accessories

39

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Further Information

40

ETL Certification

41

EU Declaration of Conformity

42

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under"Further Information", the symbol (→  [Z]).

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7

1

Safety1.1

Symbols Used
DANGER
Information on preventing any kind of physical injury.

WARNING
Information on preventing extensive equipment and environmental damage.

CautionInformation on correct handling or use. Disregard can lead tomalfunctions or minor equipment damage.

Notice1.2

Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-userof the product.

8

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1.3

General Safety Instructions• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider thesafety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.

1.4

Liability and Warranty
INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties• disregard the information in this document• use the product in a non-conforming manner• make any kind of interventions (modifications, alterations etc.)
on the product• use the product with accessories not listed in the productdocumentation.
The end-user assumes the responsibility in conjunction with theprocess media used.
Gauge failures due to contamination are not covered by thewarranty.

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9

2

Technical Data
For further technical data for gauges with DeviceNet,
Profibus or EtherCAT interface →  [6], [7], [8] and [9].
Measurement range
1)

Accuracy
Temperature effect on zeroTemperature effect on span
Resolution
Gas type dependence
Output signal analog(measurement signal)
Measurement range
Voltage range
Relationship voltage-pressure
Output impedance
Loaded impedance
Response time 2)
Identification
Resistance RIdent
Voltage
Remote Zero Adjust

External switching contact
Pulse
1)

2)

10

→ "Validity"
0.4% of reading
0.005% F.S./ °C
0.02% of reading / °C
0.003% F.S.
none

0 … +10 V–5 … +10.24 V(limited to +10.24 V)
linear0 Ω (short-circuit proof)>10 kΩ
30 ms

13.2 kΩ referenced tosupply common≤5 V
digital input for zero adjustment with external switchingcontact (→  25)
30 V (dc) / <5 mA (dc)
>1 s … <5 s

Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.
Increase 10 … 90 % F.S.
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Switching functions
Setting range
Hysteresis
Relay contact
closedopen
Switching time
Status relay
Relay contact

closedopen

RS232C interface
Transmission rate
Data format

SP1, SP2
0 … 99% F.S. (0 … 9.9 V)
1% F.S.
30 V (dc) / ≤0.5 A (dc)floating (NO)p ≤ pSP (LED lit solid)p ≥ pSP (LED off)
≤50 ms30 V (dc) / ≤0.5 A (dc)connected to supply common (pin 5)
measurement mode
warningno supply voltage
warming up
error
9600 baud
binary8 data bits
one stop bit
no parity bit
no handshake→ "Power Connection"

For further information on the RS232C interface →  [5].
Diagnostic port

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Jack connector, 2.5 mm,
3-pin

11

Supply

DANGER
The gauge may only be connected to power supplies, instruments or control devices that conformto the requirements of a grounded protective extralow voltage (PELV) and limited power source(LPS), Class 2. The connection to the gauge has to3)
be fused .
Supply voltage
at the gauge

Class 2 / LPS+21 … +30 V (dc) or±15 V (±5%)≤1 VppRipplePower consumption
without fieldbus
while being heated≤18 W
CDG160D≤25 W
CDG200D
at operating
CDG160D≤12 W
CDG200D≤18 W
with fieldbus
while being heated
CDG160D≤19.5 W
CDG200D≤26.5 Wat operating
CDG160D≤13.5 W
CDG200D≤19.5 W
Fuse to be connected 3)
1.6 AT
The gauge is protected against reverse polarity of the supply
voltage and overload.

3)

12

INFICON controllers fulfill this requirement.
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Electrical connection
3Cx1-xxx-0xxx
3Cx1-xxx-2xxx
Sensor cable for3Cx1-xxx-0xxx
3Cx1-xxx-2xxx
Cable length
Supply voltage 24 V

9-pin D-Sub, male
15-pin D-Sub, male
9-pin plus shielding
15-pin plus shielding≤ 5 m (0.14 mm²/conductor)≤ 8 m (0.25 mm²/conductor)
Supply voltage 30 V
≤ 9 m (0.14 mm²/conductor)≤17 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required(Rcable ≤1.0 Ω).
Grounding concept→ "Power Connection"

Materials exposed to vacuum

ceramics (Al2O3 ≥99.5%),
stainless steel AISI 316L
≤4.2 cm3

Internal volume
Admissible pressure (absolute)
200 / 500 / 1000 / 1100 F.S.
1 / 2 / 5 / 10 / 20 / 50 / 100 F.S.
Bursting pressure (absolute)
Admissible temperatures
Storage
Operation
Bakeout
Relative humidity

Use
Degree of protection

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4 bar| 400 kPa
2.6 bar | 260 kPa
6 bar| 600 kPa

–40 °C … +65 °C+10 °C … +50 °C≤200 °C at the flange≤80% at temperatures≤+31 °C, decreasing to 50%
at +40°C
indoors only, altitude up to2000 m NN
IP 40

13

Dimensions [mm]Weight14

837 … 897 gtina53e1-g(2019-03)

Analog Measurement Signal vs. Pressure
Pressure p
1.1×F.S.
1.0×F.S.
0.9×F.S.
0.8×F.S.
0.7×F.S.
0.6×F.S.
0.5×F.S.
0.4×F.S.
0.3×F.S.
0.2×F.S.
0.1×F.S.
0.0×F.S.
0

1

2

3

4

5

6

7

8

9

10

Measuring signal Uout [V]p = (Uout / 10 V) × p (F.S.)
Conversion Torr ↔ Pascal

c

Torr

mbar 4)

Pa 4)

1.00

1013.25 / 760 =
1.3332…

101325 / 760 =
133.3224…

Example: Gauge with 10 Torr F.S.
Measurement signal Uout = 6 V
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr4)

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Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /1998(2019-03)15

3Installation
WARNING
Fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks andimpacts.

3.1

Vacuum Connection
DANGER
Overpressure in the vacuum system >1 bar
Injury caused by released parts and harm causedby escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which aresuited to overpressure.

DANGER
Overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage yourhealth.
Use O-rings provided with an outer centering ring.

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DANGER
Protective ground
Products that are not correctly connected to groundcan be extremely hazardous in the event of a fault.
Electrically connect the gauge to the groundedvacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent
damages.

CautionDirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

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17

Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep condensates and particles from getting into the measuring
chamber preferably choose a horizontal to upright position. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the buttons can be accessed with a pin (→  24).

 Remove the protective lid and connect the product to thevacuum system.

Seal with centering ring

Protective lid
Clamp

Keep the protective lid.

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 Mount the insulation shell.
Insulation shelltina53e1-g(2019-03)

19

3.2

Power Connection
Make sure the vacuum connection is properly made(→  16).

DANGER
The gauge may only be connected to power supplies, instruments or control devices that conformto the requirements of a grounded protective extralow voltage (PELV) and limited power source(LPS), Class 2. The connection to the gauge has tobe fused 5).

Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:• Use an overall metal braided shielded cable. The
connector must have a metal case.
• Connect the cable shield to ground at one side via theconnector case. Make sure the connector case has
direct contact to the cable's shield on its whole circumference. Do not connect the other side of theshield.
• Connect the supply common with protective grounddirectly at the power supply.
• Use differential measurement input (signal commonand supply common conducted separately).
• Potential difference between supply common andhousing ≤18 V (overvoltage protection).

5)

20

INFICON controllers fulfill this requirement.
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3.2.1

D-Sub, 9-pin Connector
If no sensor cable is available, make one according to thefollowing diagram (cable length and conductor cross-sections→  13).

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3.2.2

D-Sub, 15-pin Connector
If no sensor cable is available, make one according to thefollowing diagram (cable length and conductor cross-sections→  13).

22

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4

Operation
Put the gauge into operation. If you are using an INFICON controller (VGC032 or VGC40x series), define the measurement
range (→  [1], [2], [3]).
A warm-up time of at least 2 hours should be allowed; for precisepressure measurements a warm-up time of at least 4 hours is
required.
If the gauge is used for fast downstream pressure control we recommend setting its signal filter to "fast".
The filter can be set via the RS232C interface or the
diagnostic port (→  [5]).

4.1

Status Indication

DIAG
I/O

1
P2

ST

S

AT
US

SP

LED

LED status

Meaning<STATUS>no supply voltage
measurement mode

<SP1>

off
lit solid green
blinking green
short blinks
long blinks
lit solid red
lit green<SP2>

blinking green
off
lit solid green
blinking green
off

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SP ZERO(2019-03)

warning, over/underrange
warming up
errorp ≤ setpoint 1
waiting for setpoint 1 input
p > setpoint 1
p ≤ setpoint 2
waiting for setpoint 2 input
p > setpoint 2

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4.2

Zeroing the Gauge
The gauge is factory calibrated while "standing upright"(→ "Calibration Test Report").
We recommend performing a zero adjustment, when thegauge is operated for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical andhorizontal mounting orientation is:F.S.
∆U / 90°
1000 Torr/mbar
100 Torr/mbar
10 Torr/mbar
1 Torr/mbar≈2 mV≈10 mV≈50 mV≈300 mV

If the gauge is operated via a controller, the zero of thewhole measuring system has to be adjusted on thecontroller: first, adjust the zero of the gauge and then,the zero of the controller.

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4.2.1<ZERO> Adjustment
The zero can be adjusted via• the <ZERO> button on the gauge,• the diagnostic port (→  [5]),• the digital input "Remote Zero": Apply the supply
voltage to pin 10 (15-pin) or to pin 7 (9-pin),
pulse →  10,• the RS232C interface (→  [5]),• an INFICON Vacuum Gauge Controller (VGC series).
While the gauge is being heated and/or under atmospheric pressure, the zeroing function is locked in orderfor operating errors to be prevented.

 Evacuate the gauge to a pressure according to the tablebelow:
F.S.
1100
1000
500
200
100
50
20
10
5
2
1
0.5
0.25
0.1

mbar
Torr
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar

Recommended final pressure forzero adjustment−<5×10-2 Torr
<2.5×10-2 Torr
<10-2 Torr
<5×10-3 Torr
<2.5×10-3 Torr
<10-3 Torr
<5×10-4 Torr
<2.5×10-4 Torr
<10-4 Torr
<5×10-5 Torr
<2.5×10-5 Torr
<10-5 Torr
<5×10-6 Torr

<6.65×100 Pa<6.65×100 Pa<3.33×100 Pa<1.33×10-0 Pa<6.65×10-1 Pa<3.33×10-1 Pa<1.33×10-1 Pa<6.65×10-2 Pa<3.33×10-2 Pa<1.33×10-2 Pa<6.65×10-3 Pa<3.33×10-3 Pa<1.33×10-3 Pa<6.65×10-4 Pa<6.65×10-2 mbar−
<3.33×10-2 mbar
<1.33×10-2 mbar
<6.55×10-3 mbar
<3.33×10-3 mbar
<1.33×10-3 mbar
<6.55×10-4 mbar
<3.33×10-4 mbar
<1.33×10-4 mbar
<6.65×10-5 mbar
<3.33×10-5 mbar
<1.33×10-5 mbar
<6.65×10-6 mbar

If the final pressure is too high for zero adjustment (>25%of the F.S.), the zero cannot be reached and the<STATUS> LED blinks green. If this is the case, activate
the factory setting and adjust the zero again (→  32).

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25

 Operate the gauge for at least 2 hours under constantambient conditions (until the signal is stable).

 Briefly press the <ZERO> button with a pin (max.
ø1.1 mm). The zero adjustment runs automatically. The<STATUS> LED blinks until the adjustment (duration ≤8 s)
is completed.

Press the button briefly
max. ø1.1 mm

After zero adjustment, the gauge automatically returns
to the measurement mode.
The <STATUS> LED blinks green if• the signal output is negative (< -20 mV) when the final pressure has been attained• the zero adjustment has failed.

4.2.2<ZERO> Adjustment with Ramp Function
The ramp function allows to adjust the zero at a known reference
pressure within the measurement range of the gauge.

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It also permits to adjust an offset of the characteristic curve inorder to• compensate for the offset of the measuring system or• obtain a slightly positive zero for a 0 … 10 V AD converter.
The offset should not exceed 2% of the F.S. (+200 mV). At ahigher positive offset, the upper limit of the measurement range
is exceeded.
Zero adjustment using the ramp function can be
performed via• the <ZERO> button on the gauge,• the diagnostic port (→  [5]),• the RS232C interface (→  [5]).
Recommended procedure for adjusting the offset of ameasuring system: → Notice  24.

 Operate the gauge for at least 2 hours under constantambient conditions (until the signal is stable).

 Push the <ZERO> button with a pin (max. ø1.1 mm) andkeep it depressed. The <STATUS> LED starts blinking.
After 5 s, the zero adjustment value, starting at the current
output value, keeps continually changing (ramp) until the
button is released or until the setting limit (max. 25% F.S.)
is reached. The corresponding output signal is delayed byabout 1 s.

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Keep the button depressedmax. ø1.1 mm

 Push the <ZERO> button again:
Fine adjustment
within 0...3 s:

the zero adjustment value changes
by one unit (push <ZERO> button inintervals of 1 s)

Change of direction
within 3...5 s:

the zero adjustment changes its
direction (the blinking frequency of
the <STATUS> LED changes
briefly)

If the <ZERO> button is released for more than 5 s, thegauge returns to the measurement mode.
The <STATUS> LED blinks green if the signal output is negative(< -20 mV).

28

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4.3

Switching Functions
The two switching functions can be set to any pressure within
the measurement range of the gauge (→  15).
The current setpoint setting• can be read/written via the diagnostic port,• is output at the D-Sub connector instead of the measurement
signal (→  22) and can be measured with a voltmeter after
the <SP> button is pressed, or• can be read/written via the RS232C interface.
If the pressure is lower than the setpoint, the corresponding LED(<SP1> or <SP2>) is lid solid and the corresponding relay(→  22) is energized.
Measurement signal (pressure p)
nt v a l
reme
asu
e
M

Setpoint

ue

Hysteresis(1% F.S.)
Threshold valueOff

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On

OffTime t29

4.3.1

Adjusting the Setpoints
The setpoints can be adjusted via• the buttons on the gauge,• the diagnostic port (→  [5]),• the RS232C interface (→  [5]).

DANGER
Malfunction
If processes are controlled via the signal output,
keep in mind that by pushing the <SP> button themeasurement signal is suppressed and the corresponding threshold value is output instead. Thiscan cause malfunctions.
Push the <SP> button only if you are sure that no
malfunction will cause.

Adjusting Setpoint <1>

 Push the <SP> button with a pin (max. ø1.1 mm). The
gauge changes to the switching function mode and outputs
the current threshold value at the measurement value
output for about 10 s (LED <1> blinks).

30

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Press the button
max. ø1.1 mm

 For changing the threshold value, push the <ZERO> button
and keep it depressed. The threshold keeps changing fromthe current value (ramp) until the button is released or until
the limit of the setting range is reached.

Keep the button depressedmax. ø1.1 mm

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 Push the <ZERO> button again:
Fine adjustment
within 0...3 s:

the zero adjustment value changes
by one unit

Change of direction
within 3...5 s:

the zero adjustment changes its
direction (the blinking frequency of
the <STATUS> LED changes
briefly)

If the <ZERO> button is released for more than 5 s, thegauge returns the measurement mode.
The upper threshold is automatically set 1% F.S. above
the lower one (hysteresis).

Adjusting Setpoint <2>
Push the <SP> button twice (the LED <2> blinks). The adjustment procedure is the same as for setpoint <1>.

4.4

Activating the Factory Setting (Factory Reset)
All user defined parameters (e.g. zero, filter) are restored to theirdefault values.
Loading of the default parameters is irreversible.
Loading the default parameters:

 Put the gauge out of operation.
 Keep the <ZERO> button depressed for at least 5 s while
the gauge is being put into operation (Power ON).

32

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4.5

Diagnostic Port (RS232C Interface)
The diagnostic port <DIAG> permits to output the pressure
reading and all status information and to enter all settings at thesame time (→  [5]).
→ "Accessories"

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5

Deinstallation
Preconditions:• Vacuum system vented• Vacuum system cooled to <50 °C

5.1

Power Connection

 Put the gauge out of operation.
 Unfasten the lock screws and disconnect the sensor cable.
5.2

Vacuum connection
DANGER
Hot surface
Touching the hot surface (>50 °C) can causeburns.
Put the product out of operation and allow it to cool
down.

WARNING
Fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks andimpacts.

34

tina53e1-g(2019-03)

DANGERContaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent
damages.

CautionDirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

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35

 Remove the insulation shell.

 Remove the gauge from the vacuum system and install theprotective lid.

Seal with centering ring

Clamp

36

Protective lid

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6

Maintenance, Repair
Under clean operating conditions, the product requires no maintenance.
Gauge failures due to contamination are not covered by
the warranty.
We recommend checking the zero at regular intervals(→  25).
INFICON assumes no liability and the warranty becomes nulland void if any repair work is carried out by the end-user or third
parties.

7

Returning the Product
WARNING
Forwarding contaminated productsContaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably befree of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
declaration of contamination *).
*)Form under www.inficon.com

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration ofcontamination are returned to the sender at his own expense.

tina53e1-g(2019-03)37

8Disposal
DANGER
Contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

WARNING
Substances detrimental to the environment
Products or parts thereof (mechanical and electriccomponents, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with therelevant local regulations.

Separating the components
After disassembling the product, separate its components according to the following criteria:• Contaminated components
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordancewith the relevant national regulations, separated according totheir materials, and disposed of.
• Other components
Such components must be separated according to their materials and recycled.

38

tina53e1-g(2019-03)

9

Accessories
Ordering number
Communication adapter (2 m)6)

tina53e1-g

6)303-333

The diagnostic software (Windows NT, XP) can be downloaded from our
website.
(2019-03)

39

Further Information
 [1]Operating Manual
Vacuum Gauge Controller VGC032
tinb02e1
INFICON AG, LI–9496 Balzers, Liechtenstein [2]Operating ManualSingle-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein [3]Operating ManualTwo- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein [4]Operating Manual
One-, Two- & Three-Channel Measurement and Control
Unit VGC501, VGC502, VGC503
tina96e1
INFICON AG, LI–9496 Balzers, Liechtenstein [5]Communication Protocol
RS232C Interface CDG160D, CDG200D
tira49e1
INFICON AG, LI–9496 Balzers, Liechtenstein [6]Communication Protocol
DeviceNet™ CDG160D, CDG200D
tira51e1
INFICON AG, LI–9496 Balzers, Liechtenstein [7]Communication Protocol
Profibus CDG160D, CDG200D
tira54e1
INFICON AG, LI–9496 Balzers, Liechtenstein [8]Communication Protocol
EtherCAT CDG160D, CDG200D(ETG.5003.2080 S (R) V1.0.0)

tira68e1
INFICON AG, LI–9496 Balzers, Liechtenstein40

tina53e1-g(2019-03)

 [9]

Communication Protocol
EtherCAT CDG160D, CDG200D(ETG.5003.2080 S (R) V1.3.0)

tirb45e1
INFICON AG, LI–9496 Balzers, Liechtenstein

ETL Certification
RECOGNIZEDCOMPONENTETL LISTED
The products CDG160D and CGD200D• conform to the UL Standard UL 61010-1• are certified to the CAN/CSA Standard
C22.2 No. 61010-1-12

3103457

tina53e1-g(2019-03)

41

EU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the Directive relating toelectromagnetic compatibility 2014/30/EU and the Directive on
the restriction of the use of certain hazardous substances inelectrical and electronic equipment 2011/65/EU.

Products

Capacitance Diaphragm Gauge
CDG160D, CDG200D
Standards
Harmonized and international/national standards and specifications:• EN 61000-6-2:2005 (EMC: generic immunity standard)•

EN 61000-6-3:2007 + A1:2011 (EMC: generic emission•

EN 61010-1:2010 (Safety requirements for electrical equipment for•

EN 61326:2013; Group 1, Class B (EMC requirements forstandard)
measurement, control and laboratory use)electrical equipment for measurement, control and laboratory use)

Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers

42

3 January 2017

3 January 2017

Dr. Bernhard Andreaus
Director Product Evolution

Alex Nef
Product Manager

tina53e1-g(2019-03)

Notestina53e1-g(2019-03)

43

Original: German tina53d1-g (2019-03)

t i na53e1- g

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com