Communication Protocol

DeviceNet™
Interface for Bayard-Alpert Capacitance Diaphragm Gauge

BCG450-SD

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1

Intended Useof this Document

This Communication protocol contains instructions for operating the vacuum gauges BCG450-SD (featuring DeviceNet interfaces) as slaves together with a
DeviceNet master.

This manual describes the functionality of DeviceNet for programming
purposes. For more information refer to the "DeviceNet specifications" of
the Open DeviceNet Vendor Association (ODVA) (→[2]) and the corresponding european standard (→[3]).
For specifications and operation instructions of the vacuum gauges referto the appropriate documents:
BCG450-SD →DeviceNet Interface[1], [4], [5], [6]The following description of the DeviceNet Interface is compliant to the DeviceNet
specification of the Open DeviceNet Vendor Association.
This manual describes the functionality of a DeviceNet Group 2 Only Slave andsupports Explicit Messaging and the I/O Polling.
We reserve the right to make technical changes without prior notice.

Abbreviations

Trademarks

2

Abbr.

Meaning

NV

Nonvolatile; attribute value is maintained through power cycles

V

Volatile

INT

Integer value(Range –32767 … 32768)(Range 0 … 65635)

UINT

Unsigned integer value

USINT

Unsigned character value (Range 0 … 255)

FLOAT

Floating point value(Range according to IEEE 754)

XXh

Hexadecimal number(Radix = 16)

XXd

Decimal number(Radix = 10)

XXb

Binary number(Radix = 2)

DeviceNet™ Open DeviceNet Vendor Association Inc.

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Contents
Intended Use of this Document
DeviceNet Interface
Abbreviations
Trademarks

2
2
2
2

1 Start-Up of the Slave
1.1 Power Supply Requirements
1.2 Front View of the BCG450-SD
1.3 Connectors on the Device
1.4 Side View of the BCG450-SD
1.5 Indicators and Switches
1.5.1 Module Status LED
1.5.2 Network Status LED
1.5.3 Node Address Switch
1.5.4 Data Rate Switch
1.5.5 Setpoint

4
4
4
5
6
6
6
7
7
7
7

2 Object Structure
2.1 Connection Object
2.1.1 Vendor-Specific Object Extension on Instance 2 Poll Connection
2.2 Identity Object
2.2.1 Class Attributes
2.2.2 Instance Attributes
2.3 S-Device Supervisor Object
2.3.1 Class Attributes
2.3.2 Instance Attributes
2.3.2.1 Semantics
2.3.3 S-Device Supervisor Object States
2.3.4 S-Device Supervisor Common Services
2.3.5 S-Device Supervisor Object Specific Services
2.4 S-Analog Sensor Object
2.4.1 Class Attributes
2.4.2 Instance Attributes
2.4.2.1 Instance Attributes of Instance 1 / Pirani Instance2.4.2.2 Semantics of S-Analog Sensor Instance 1
2.4.2.3 Instance Attributes of Instance 2 / Hot Cathode Ion Gauge
2.4.2.4 Semantics of S-Analog Sensor Instance 2
2.4.2.5 Instance Attributes of Instance 3 / Capacitance Diaphragm Gauge
2.4.2.6 Semantics of S-Analog Sensor Instance 3
2.4.2.7 Object-Specific Services on Instance 3 /Capacitance Diaphragm Gauge
2.4.2.8 Instance Attributes of Instance 21 / Setpoint A(Instance 22 / Setpoint B)
2.4.3 Common Services
2.4.4 Object-Specific Services on Instance 2 / Hot Cathode Ion Gauge
2.4.4.1 SET DEGAS STATE
2.4.4.2 SET EMISSION STATE
2.4.4.3 Emission Control Mode
2.4.5 Behavior

8
8
8
9
9
9
9
9
10
11
15
15
16
16
16
17
17
18
20
21
23
24
25
26
29
29
29
29
30
30

3 I/O Assembly Object
3.1 I/O Assembly Instances
3.2 I/O Assembly Object Instance Data Attribute Format

31
31
32

Appendix
A: Range of Values
B: Specific Codes
C: Conversion of a Floating Number According to IEEE 754
D: Typical Start-Up Procedure
E: Literature

33
33
33
33
34
37

For cross-references within this document, the symbol (→  XY) is used, for crossreferences to further documents listed under literature, the symbol (→[Z]).

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1 Start-Up of the Slave
1.1 Power Supply
Requirements

The BCG450-SD has to be powered with two voltages:
1.)
2.)

24 Volt DC, 20 W at the 15 pole Sub-D connector for the gauge itself;
24 Volt DC nominal, <2 W range +11 … +25 V) at the DeviceNet micro styleconnector for the DeviceNet transceiver.

1.2 Front View of the
BCG450-SD

3

4

5

6
7

2
1

Position

4

Function1

Address Switch × 10, decimal

2

Address Switch × 1, decimal

3

DeviceNet connector

4

Data Rate Switch

5

Network Status LED

6

Module Status LED

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1.3 Connectors on the
DeviceThe BCG450-SD uses a "Sealed Micro-Style Connector" for the DeviceNet connection. The DeviceNet part of the gauge is powered via the DeviceNet connector.

Pin Assignment of the Sealed
Micro-Style Connector

4

3

5
1

Pin Assignment of the 15 pin
D-Sub connector
15

9

1)

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2

8

1

Pin

Function

1

Drain

2

V+ nominal +24 V (range +11 … +25 V)

3

V–

4

CAN_H

5

CAN_L

Pin

Function

1

Relay Setpoint A, n.o. contact 1)

2

Measuring signal output

3

Threshold Setpoint A, output

4

Relay Setpoint A, common contact 1)

5Supply sensor electronics common

6

Threshold Setpoint B output

7

Degas on, active high8

Supply sensor electronics +24 Volt

9

Relay Setpoint B, n.o. contact 1)

10Gauge identification

11

Relay Setpoint B, common contact 1)

12

Signal common GND

13

do not connect14

do not connect15

do not connect(0 … +10.13 V)(0 … +10 V)(0 … +10 V)

Type of setpoint function assigned to relays is programmable (→  26).

5

1.4 Side View of the
BCG450-SD

Position
8

Function
Potentiometer for Setpoint A threshold

9

Potentiometer for Setpoint B threshold

10

Special Calibration service / do not use

1.5 Indicators and Switches
1.5.1 Module Status LED

Device State

LED State

Power Offdark

Device Self-Test

flashing
green/red

Device Operational

green

Device is operating normally.

Unrecoverable Fault

red

Device has detected an unrecoverable fault

Recoverable Fault

6

Description
No power applied to device
Device is in self-test

flashing red Device has detected a recoverable fault,
e.g. missing DeviceNet power supply

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1.5.2 Network Status LED

The network status LED indicates the status of the DeviceNet communication link.
State
Not Powered/not online

Online, not connected

LED state To indicate
dark

flashing
green

Device is not online.
•

The device has not completed the
Duplicate MAC_ID test yet.

•

The device may not be powered,look at Module Status LED.

Device is online but has no connectionsin the established state.
•

The device has passed the
Dup_MAC_ID test, is online, but
has no established connections toother nodes.

•

The device is not allocated to amaster.

Link OK online, connectedgreen

The device is online and has connections in the established state.

Connection time out

flashingred

One or more I/O Connections are in thetimed out state.

Critical link failure

red

Failed communication device. The
device has detected an error that has
rendered it incapable of communicatingon the network (Duplicate MAC ID, or
Bus–off).

•

The device is allocated to a master.

1.5.3 Node Address Switch

During device initialization, the node address switches are read by the device firmware. If the switches specify a valid DeviceNet MAC ID, i.e. a value from 0 … 63,
this value is used as the device MAC ID. If the specified MAC ID differs from thevalue stored in the device’s non-volatile RAM (NVRAM), the new MAC ID will besaved in NVRAM. If the switches specify an invalid DeviceNet MAC ID, i.e. a value
greater than 63, the current value stored in the device’s NVRAM is used as thedevice MAC ID.

1.5.4 Data Rate Switch

A single, rotary switch is provided for configuring the data rate of the device. The
switch has three valid positions for the DeviceNet data rates, 125, 250, and500 kBaud, where:
1
2
5

125 kBaud
250 kBaud
500 kBaudAll remaining switch positions specify software selection of the data rate.

1.5.5 Setpoint

The device has two setpoint relays 1) (Setpoint A and Setpoint B). The setpoints ofthese relays are adjustable only by two potentiometers (marked SETPOINT A andSETPOINT B).
The relay contacts are available at the 15-pin D-Sub connector.
1)

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Type of setpoint function assigned to relays is programmable (→  26).

7

2 Object Structure
2.1 Connection Object

Class Code 05h = 05d
The connection class allocates and manages the internal resources associatedwith both I/O and explicit messaging connections. The specific instance generated
by the connection class is referred to as a connection instance or a connection
object.
The following Instances of the connection object are supported:•

Instance 1: Explicit Messaging•

Instance 2: I/O-Polling

Please refer to the DeviceNet specification for further information.

2.1.1 Vendor-Specific Object
Extension on Instance 2
Poll Connection
Attribute Requirement in
ID
Implementation
100

Optional

For the selection of the active input assembly the following vendor specific attributecan be used.
Vendor specific extension:Access NV/ Name
Rule
V
Get/Set

NV Poll Produce
Assembly
Instance

DeviceNet
Data TypeUSINT

Description of Attribute

Semantics

Contains the Instance num- 1, 2, 4, 5, 8, 9, 10, 12, 13
ber of the assembly used bythis connection to send data

This vendor-specific attribute facilitates the configuration of the data assembly, sentby the BCG450-SD to the DeviceNet Master as Poll response. It offers the possibility to select a (predefined) data assembly via a configuration tool + EDS file(→[1]). Attribute 100 allows the user to configure the Poll I/O Data Assembly
via EDS even when the Poll Connection of the BCG450-SD is in the establishedstate. The Assembly Number is stored non volatile. Modifications of the Poll
Produce Assembly Instance will take effect only after a reset of the BCG450-SD.
Thus, definition of the BCG450-SD data assembly can be done in two ways:
1) Standard methode (without using attribute 100):
The DeviceNet Master configures the "Produced Connection Path" Attribute of
the Poll connection (Connection Instance 2) when establishing communication
to the BCG450-SD. This requires a master to support expanded explicit messaging capabilities.
2) Directly setting Attribute 100 e.g. by a configuration tool(e.g. RS Networks) + Device Reset.

8

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2.2 Identity Object

Class Code 01h = 01d

2.2.1 Class Attributes

This object provides identification of and general information about the device.

Attribute ID

Access Rule

Name

DeviceNet Description of Attribute
Data Type

Semantics of Values

1

Get

Revision

UINT

Revision of this object.
Note: All class definitions are
required to include this classattribute.

The current value assigned to this
attribute is one (01). If updates that
require an increase in this value are
made, then the value of this attributeincreases by one.

2

Get

Max InstanceUINT

Maximum instance number ofan object currently created inthis class level of the device.

The largest Instance number of acreated object at this class hierarchy
level.

2.2.2 Instance Attributes
Attribute ID

Access Rule

NV/ NameV

DeviceNet Data Type

Description of Attribute1

Get

NV Vendor ID

UINT 79 02

Manufacturer identification
Value: 633 (INFICON)

2Get

NV Device TypeUINT

1Ch = Vacuum pressure gauge

3Get

NV Product Code

UINT

13

4

Get

NV Revision

STRUCT

5

Get

NV Status

WORD

6

Get

NV Serial Number

UDINT

7

Get

NV Product Name

SHORT STRING

Services

2.3 S-Device Supervisor
ObjectBCG450-SD

Service CodeName

Description

5 (05h)Reset

0 = last installation,
1 = default installation

14 (0Eh)

Get_Attribute_Single

Class Code 30h = 48d2.3.1 Class Attributes
Attribute ID

AccessRule

Name

DeviceNet
Data Type

Description of Attribute

Semantics of Values

1

Get

Revision

UINT

Revision of this object

The current value assigned to this attribute is one (01). If updates that require
an increase in this value are made, thenthe value of this attribute increases by
one.

2

Get

Max
Instance

UINT

Maximum instance number of an The largest Instance number of a created object at this class hierarchy level.
object currently created in thisclass level of the device.

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2.3.2 Instance Attributes
Attribute ID

Access Rule

NV/ NameV

DeviceNet Data Type

Description of Attribute

3

Get

NV

DeviceType

SHORT STRINGASCII Text, "CG" combination gauge

4

Get

NV

SEMI Standard
Revision Level

SHORT STRING

Specifies the revision level of the SEMI
S/A network standard to which the device
complies (for example "E54-0997").

5

Get

NV

Manufacturer’s Name

SHORT STRING"INFICON"

6

Get

NV

Manufacturer’s Model
NumberSHORT STRING

for example: BCG450-SD

7

Get

NV

Software Revision
Level

SHORT STRINGASCII Text, for example "xxxyyy"
xxx version of the measuring print
yyy version of the DeviceNet print

8

Get

NV

Hardware Revision
Level

SHORT STRINGASCII text, for example "1.001"

9

Get

NV

Manufacturer’s Serial
NumberSHORT STRINGASCII text

10

Get

NV

Device Configuration

SHORT STRING

Depending on device configuration(→ Appendix B)

11

Get

V

Device Status

USINT→ "Semantics" section below.

12

Get

V

Exception Status

BYTE→ "Semantics" section below.

13

Get

V

Exception Detail
Alarm

STRUCT of:

A structure of three structures containing
a bit mapped representation of the alarmdetailCommonException Detail

STRUCT of:Size 2

USINT

Number of common detail bytes

Detail 0

ARRAY of:→ "Semantics" section below.

Detail 1

BYTE→ "Semantics" section below.

Device Exception
DetailSTRUCT of:Size 6USINT

Number of device detail bytes

Detail 0

ARRAY of:

S-Analog Sensor Instance 3(Capacitance Diaphragm Gauge)
Sensor alarm byte 0

Detail 1

BYTE

S-Analog Sensor Instance 3(Capacitance Diaphragm Gauge)
Sensor alarm byte 1

Detail 2

S-Analog Sensor Instance 1(Pirani) Sensor Alarm byte 0

Detail 3

S-Analog Sensor Instance 1(Pirani) Sensor alarm byte 1

Detail 4

S-Analog Sensor Instance 2(Hot cathode) Sensor Alarm byte 0

Detail 5

S-Analog Sensor Instance 2(Hot cathode) Sensor alarm byte 1

Manufacturer
Exception Detail

10

STRUCT of:Size 1

USINT

Number of Manufacturer detail bytes

Detail 0

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Attribute ID

Access Rule

14

Get

NV/ NameV

DeviceNet Data Type

Description of Attribute

V

Exception Detail
Warning

STRUCT of:

A structure of three structures containing
a bit mapped representation of thewarning detail

Common Exception
DetailSTRUCT of:Size 2

USINT

Number of Common Detail Bytes

Detail 0

ARRAY of:→ "Semantics" section below.

Detail 1

BYTE→ "Semantics" section below.

Device Exception
DetailSTRUCT of:Size 7

USINT

Number of Device Detail Bytes

Detail 0

ARRAY of:

S-Analog Sensor
Class Level Status Extension

Detail 1

ARRAY of:

S-Analog Sensor Instance 3(Capacitance Diaphragm Gauge)
Sensor Warning Byte 0

Detail 2

BYTE

S-Analog Sensor Instance 3(Capacitance Diaphragm Gauge)
Sensor Warning Byte 1

Detail 3

BYTE

S-Analog Sensor Instance 1 (Pirani)
Sensor Warning Byte 0

Detail 4

S-Analog Sensor Instance 1 (Pirani)
Sensor Warning Byte 1

Detail 5

S-Analog Sensor Instance 2(hot cathode) Sensor Warning Byte 0

Detail 6

S-Analog Sensor Instance 2(hot cathode) Sensor Warning Byte 1
STRUCT of:

Manufacturer
Exception DetailSize 1

USINT

Number of Manufacturer Detail Bytes

Detail 0

Byte

serial common warning

15

Set

NV

Alarm Enable

BOOL→ "Semantics" section below.

16

Set

NV

Warning Enable

BOOL→ "Semantics" section below.

2.3.2.1 Semantics
Device Status

This attribute represents the current state of the device. Its value changes as thestate of the device changes. The following values are defined:
Attribute Value

State

0

Undefined

1

Self Testing

2

Idle

3

Self-Test Exception

4

Executing

5

Abort

6

Critical Fault

In case of a Self-Test Exception restart the device with a reset out of the box(Identity Object Class 1, Instance 1, Service 5, Service target value: 1).

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Exception Status

Exception Status Bit Map

Exception Detail Alarm andException Detail Warning

A single byte attribute whose value indicates the status of the alarms and warnings
for the device. The device supports the Expanded Mode.
For the Expanded Mode, bit seven of Exception Status attribute is set to one;
exceptions are reported through the communication of this Exception Status attribute, formatted as specified in the table below. In addition, the Exception Detail
attributes are supported. The Exception Status bits are determined by a logical”OR” of the related Exception Detail bits, as indicated.
Bit

Function0

ALARM/device-common(The alarm or warning is not specific to the device type or device typemanufacturer.)

1

ALARM/device-specific2

ALARM/manufacturer-specific3reserved, set to 0

4

WARNING/device-common

5

WARNING/device-specific6

WARNING/manufacturer-specific71Expanded Method

The formats of these two attributes are identical. Therefore, they are described
together:
Attributes that relate the detailed status of the alarms or warnings associated withthe device. Each attribute is a structure containing three members; these threemembers, respectively relate the detailed status of exceptions that are common(i.e., not device-specific), device-specific but not manufacturer-specific, and manufacturer-specific. The common and device-specific detail are defined below. A
manufacturer-specific detail has a length of 1 byte. A SIZE value of one indicatesthat one byte detail is defined for the associated exception detail structure.
Each of the three structure members is defined as a structure containing an ordered list (i.e., array) of bytes of length SIZE, and an unsigned integer whose value
is SIZE. Each of the bytes in each array has a specific mapping. This mapping isformatted as 8 bits representing 8 independent conditions, whereas a value of 1
indicates that the condition is set (or present), and a value of 0 indicates that thecondition is cleared (or not present). Note that if a device does not support an
exception detail, the corresponding bit is never set. The bitmaps for alarms andwarnings in the corresponding attributes are structured in parallel so that a condition may have either alarm or warning set depending on severity. If a condition
inherently cannot be both alarm and warning, then the parallel bit position corresponding to the other state will remain "0".

Common Exception Detail

12This structure relates exception conditions (i.e. alarms or warnings) which arecommon to all devices within the Hierarchy of Semiconductor Equipment Devices.
The Detail element of the structure is an ordered list (i.e., array) of bytes of length[SIZE=2] which is the value of the structure element Size. For each byte in the
Detail field, all bits which are not identified are reserved for future standardization.
Two bytes Common Exception Detail are provided: Common Exception Detail [0]and Common Exception Detail [1]. The specific exception associated with each of
the bitmaps is given in the table below. The SIZE for this revision is two (2).

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Common Exception Detail
Attribute Values

Bit

Common Exception Detail [0]Common Exception Detail [1]

0

0

0

1

0

0

2

EPROM exception

0

3

EEPROM exception

power supply input voltage

4

RAM exception

05

reserved

0

6

0

0

7

0

0

Common Exception Detail
Format Summary
Data Component

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

Common Exception Detail
Size

0

0

0

0

0

0

1

0

Common Exception Detail 0

0

0

0

Data
MemoryNonvolatile
MemoryCodeMemory00Common Exception Detail 1

0

0

0

0

PS Input
Voltage000

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Device Exception DetailThis structure, similar in form to Common Exception Detail, relates exception conditions which are specific to individual devices on the network and are defined in
the following. The Detail element of the structure is an ordered list (i.e. array) ofbytes of length [SIZE = 4 for Alarms and SIZE = 6 for Warning] which is the valueof the structure element size.

Manufacturer Exception
DetailThis structure, similar in form to Common Exception Detail, relates exception conditions which are specific to the manufacturers of individual devices on the network.
There is one byte manufacturer exception details defined. The Detail element of thestructure is an ordered list (i.e. array) of bytes of length [SIZE = 1] which is thevalue of the structure element Size.

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13

Device Exception Detail
Alarms and Manufacturer
Exception Detail Alarms
FormatData Component

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

0

0

0

0

0

1

1

0

0

0

0

0

0

0

0

Diaphragm
Failure

0

0

0

0

0

0

Electronics
Failure0

Device Exception Detail
Alarm 0 Pirani

0

0

0

0

0

0

0

0

Device Exception Detail
Alarm 1 Pirani

0

0

0

0

0

0

Electronics
Failure0

Device Exception Detail
Alarm 2 Hot cathode

0

0

0

0

0

0

0

0

Device Exception Detail
Alarm 3 Hot cathode

0

0

0

0

0

0

Electronics
Failure0

Manufacturer Exception
Detail Alarm Size

0

0

0

0

0

0

0

1

Manufacturer Exception
Detail Alarm

0

0

0

0

0

0

0

serial comm.

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

0

0

0

0

0

1

1

1

0

0

0

0

0

Underrange
ExceededOverrange
Exceeded

Reading1)
Invalid

0

0

0

0

0

0

0

0

0

0

0

0

0

0

Electronics
Warning

0

0

0

0

0

0

0

0

0

0

0

0

0

0

0

Electronics
Warning

0

0

0

0

0

0

0

0

0

0

0

0

0

Pressure
too highfor degas

000Manufacturer Exception
Detail Warning Size

0

0

0

0

0

0

0

1

Manufacturer Exception
Detail Warning

0

0

0

0

0

0

0

serial comm.
Warning

Device Exception Detail
Alarm Size
Device Exception Detail
Alarm 0 Capacitance
Diaphragm Gauge
Device Exception Detail
Alarm 1 Capacitance
Diaphragm Gauge

Exception Detail Warning
Data Component
Device Exception Detail
Warning Size
Device Exception Detail 0
S-Analog Sensor Class
Level Status Extension
Device Exception Detail 1
Sensor Warning Byte 0
Capacitance Diaphragm
Gauge
Device Exception Detail 2
Sensor Warning Byte 1
Capacitance Diaphragm
Gauge
Device Exception Detail 3
Sensor Warning Byte 0
Pirani
Device Exception Detail 4
Sensor Warning Byte 1
Pirani
Device Exception Detail 5
Sensor Warning Byte 0
Hot cathodeDevice Exception Detail 6
Sensor Warning Byte 1
Hot cathode1)

14

Logical inversion of Reading Valid.
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Alarm Enable and Warning
Enable2.3.3 S-Device Supervisor
Object States

These Boolean attributes are used to enable (1) or disable (0) the S-Device Supervisor object’s process of setting Exception bits. When disabled, corresponding bits
are never set; and, if they were set, disabling clears them. Also, alarm and warningstates are not retained; when enabled, bits will be set only if the corresponding
condition is true.
The default state for these Enable attributes is enabled (1).

Power Applied, orReset Request from any state except CRITICAL FAULT, or
Perform Diagnostics Request from any state except CRITICAL FAULT or ABORT

Self-Test Failed
SELF-TESTING

Self-Test
PassedRecover Request or
Exception Condition
ClearedSELF-TESTEXCEPTION

Abort Request
Abort Request
IDLE

Recover Request

ABORT

Start
RequestStop
RequestCRITICAL FAULT
Abort Request
EXECUTING
Critical Fault
from any state

Abort - Used to transition the device application objects to the aborted state. This
service request may be (and generally will) originated internally, from application
objects.
Recover - Used to transition the device application objects, out of the abort state,
to the idle state. This service request may be originated internally, from application
objects.
Perform_Diagnostics - Used to instruct the DS object to perform a diagnostic test.

2.3.4 S-Device Supervisor
Common Services

Service
Code

Service Name

Description of Service

0Eh

Get_Attributes_Single

Returns the contents of the specified
attribute.

10h

Set_Attributes_Single

Modifies an attribute value.

05h

Reset

Resets the device to the Self-Testing state.

06h

Start

Starts the device execution.

07h

Stop

Moves the device to the Idle state.

The device transitions from the IDLE state to the EXECUTING state by a
START Request (Service Code 06h) or by the receipt of the first valid I/Odata.
You will not get any valid measurement values from the device until this service has been requested or the I/O-poll message has been received.

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15ServiceCode2.3.5 S-Device Supervisor
Object Specific Services

Explanation toService code 4Dh••

Service Name

Description of Service

4Bh

Abort

Moves the device to the Abort state

4Ch

RecoverMoves the device out of the Abort state

4Dh

Perform_Diagnostics

Causes the device to perform a set of
diagnostic routines

DS Object Service Parameter dictionary
Parameter

Form

Description

TestID

USINT

Type and possibly detail of diagnostic test to be
performed

TestID parameter
The following values are defined for the TestID parameter for the
Perform_Diagnostics Service Request:
Attribute Value
0

State
Standard

Type "Standard" is specified if there is only one type of diagnostic defined or if
there are more than one including a type standard.

2.4 S-Analog Sensor Object

Class Code 31h = 49d

2.4.1 Class Attributes
Attribute ID

AccessRule

Name

DeviceNet
Data Type

Description of Attribute

Semantics of Values

1

Get

Revision

UINT

Revision of this object Note: All class definitions are The current value
required to include this class attribute.
assigned to this attribute is one (01).

2

Get

Max
Instance

UINT

Maximum instance number of an object currently
created in this class level of the device.

The largest Instancenumber of a createdobject at this classhierarchy level.

32 1)

Get

Class
Level
StatusExtension

USINT

Indicates whether the complete gauge (including
instances Capacitance Diaphragm Gauge, Pirani
and Hot Ion) measures above or below its maximum or minimum measurement range.

Bit 0: Reading Invalid
Bit 1: Overrange
Exceeded
Bit 2: Underrange
Exceeded94

Get

ActiveValue

Specifiedby DataType

Is used by assemblies to produce this class-level
attribute, instead of the Value (Attribute ID 6) of the
S-Analog Sensor Instances.

95

Get

ActiveInstance
NumberUINT

Default = 1
Identifies the object instance that is providing theValue which is copied into the Active Value for all
input Assemblies and the Alarm/Warning Exception
Details for the S-Device Supervisor object.

96

Get

Number of
GaugesUSINT

Identifies the number of gauge instances present in
the device.

99

Get

Subclass

UINT

Identifies a subset of additional class attributes,
services and behaviors.

→ Behavior section.

1)

16

3
1

Instance Selector

This attribute is not part of the actual S-Analog Sensor Specification, bit is at
this time in preparation to be implemented as shown. Changes may be possible
until the new specificationis published.

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Active Value

Assemblies or connections may produce this class-level attribute, instead of theValue (Attribute ID 6) of the active S-Analog Sensor instance. The S-Analog Sensor class-level attribute Active Instance Number identifies the object instance that iscurrently active and providing the Value to the Active Value class-level attributewhich is, in turn, produced by the input assemblies that have Active Value as amember.

Active Instance Number

The device internally modifies this attribute, as required, to identify the S-Analog
Sensor object instance providing the Value member which is copied into the Active
Value for all Input Assemblies and the Alarm/Warning Exception Details for the
S-Device Supervisor object.
The Active Instance Number will be modified based upon the Active Value in orderthat the best gauge, corresponding to a given S-Analog Sensor instance, will be
active for the given measurement range.

Number of GaugesThis attribute is used to determine the size of all Input Assemblies within a node.

Class Level Status
Extension

Because the gauge has three different measurement principles (Pirani, capacitancediaphragm gauge, hot ionization gauge) this attribute is supported to give you theinformation whether the gauge is outside the specified measurement range.
Gauge exposed topressure range

Class Level Status Extension

5×10-10 … 1500 mbar

all bits set to "0">1500 mbar

bits "Reading Invalid" and "Overrange Exceeded" set<5×10-10 mbar

bits "Reading Invalid" and "Underrange Exceeded" set

The Class Level Status Extension attribute is mapped to the Device Exception
Detail Warning Byte 0 of the Device Supervisor Object.

2.4.2 Instance Attributes

Three S-Analog Sensor Instances (Instance 1, Instance 2, Instance 21 and Instance 22) are available. Instance 1 represents the physical sensor reading of theheat transfer vacuum gauge (pressure), Instance 2 represents the physical sensor
reading of the hot cathode ion gauge (pressure).
Instance 21 and Instance 22 represent the value of the Setpoint A and Setpoint B.

2.4.2.1 Instance Attributes ofInstance 1 /Pirani Instance

Following is the Instance 1 with the subclass extension of the heat transfer vacuum gauge (pirani gauge) part of the BCG450-SD. This instance is used to provide control and status information for the Pirani gauge part of the BCG450-SD.

Attribute
ID

Access Rule

NV/ NameV

DeviceNet DataType

Description of
Attribute3

Set /Cond.
→ below

NV Data TypeUSINT

Determines the→ "Semantics" section below.
Data Type of Value Int
C3h [default]
and all related
float
CAh
attributes as specified in this table.

4

Set→ below

NV Data UnitsUINT

Determines theUnits context ofValue and all related attributes.

Supported Values:
Counts1001h [default]
mbar
1308h
Torr
1301h
Pascal
1309h

5

Get

V

Reading Valid

BOOL

Indicates that the
Value attributecontains a valid
value.

0 = invalid
1 = valid(invalid: e.g., not warmed up
yet)

6

Get

V

Value

INT or specified
by Data Type

Analog input value

The corrected, converted, calibrated final value of the sensor.
→ "Semantics" section below.

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Semantics of Values

17

Attribute
ID

Access Rule

NV/ NameV

DeviceNet DataType

Description of
Attribute

7

Get

V

BYTE

Alarm and Warning Always zero, because Alarm
State of this object and Warning Trip Points are not
implemented
instance

10

Get

NV Full Scale

INT or specified
by Data TypeThe Value of Full
Scale for the sensor.

25

Set

NV Safe State

USINT

Specifies the be→ "Semantics" section below.
havior for the Value [default] = 0
for states otherthan Execute

26

Set

NV Safe ValueINT or specified
by Data TypeThe Value to be→ "Semantics" section below.
used for Safe State [default] = 0= Safe Value

32

Get

NV Overrange

INT or specified
by Data TypeSpecifies the highest valid Value

The value above which attribute
Reading Valid is set to invalid.
[default] = maximum allowablevalue for the Data Type

33

Get

NV Underrange

INT or specified
by Data TypeSpecifies thelowest valid Value

The value below which attribute
Reading Valid is set to invalid.
[default] = minimum allowablevalue for the Data Type

94

Get

V

Struct of Byte

Bit definitions of
Sensor Warnings

0 = [default]

Bit definitions of
Sensor Alarms

0 = [default]

95

Get

V

StatusSensor Warning
Sensor Alarm

96

Get

V

Status Extension

99

Get

NV Subclass

Struct of Byte

Semantics of Values

The value of attribute Valuecorresponding to the Full Scalecalibrated measurement of thesensor.
[default] = maximum allowablevalue for the Data Type→ "Semantics" section→ "Semantics" section

BYTE

Bit description:
Bit-mapped byte
providing additional 0 Reading Invalid
status bits
(Logical Inversion of
Reading Valid)
1 Overrange Exceeded
2 Underrange Exceeded

UINT

Defines a subset of 02 = Heat Transfer Vacuum
Gauge
additional attributes, services andbehaviors.

2.4.2.2 Semantics of S-Analog
Sensor Instance 1

18

Data TypeAll Data Type attributes use the enumerated values integer or float(→ Appendix A).
The Data Type value will be set automatically based upon the first valid I/O connection established by the device.
If no established I/O connections exist, which include an attribute from this object,then the Data Type attribute is settable provided that the object is in the Idle State.
Note: Using data type integer in combination with a pressure unit (mbar, Torr or Pa)
will obviously not produce reasonable values below 1.

Data Unit

The Data Unit is only settable in the IDLE state.

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ValueAn S-Analog Sensor object instance derives a reading from a physical analog sensor. The reading is converted to the data type and units specified for the Value
attribute.
Using Counts and INT the following conversion has to be used:

Safe State

where:

kmbar
kTorr
kPa

[ log10 (pressure) + k ] × 2000
=
=
=

12.5
12.624903
10.5This attribute specifies what value will be held in Value for states other than Executing. The purpose of this mechanism is to allow other devices, who may be using
this Value to transition to (or remain in) a safe state in the event of this device
transitioning to a FAULT, IDLE, or ABORT state. The following values are defined:
Attribute Value

State

0

Zero

1

Full Scale

2

Hold Last Value

3

Use Safe ValueFor Safe State set to Use Safe Value, this attribute holds the value to which theValue attribute will be set for object instance states other than Executing.

Sensor Alarm

16 Bits are used as Sensor faults. Sensor Alarm Byte 1 is mapped to the Device
Exception Detail Alarm 3, Sensor Alarm Byte 0 is mapped to the Device Exception
Detail Alarm 2.

Sensor Alarm Byte 0
Sensor Alarm Byte 1

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

0

0

0

0

0

0

0

Sensor Warning

Data Component
Sensor Warning Byte 0
Sensor Warning Byte 1

Data Component
Sensor Alarm Byte 0

BCG450SDv1.cp

0

0

0

Bit 1

Bit 0

0

0

0

0

Electronics
Failure0

16 Bits are used as Sensor Warnings. Sensor Warning Byte 0 is mapped to theDevice Exception Detail Warning 3, Sensor Warning Byte 0 is mapped to theDevice Exception Detail Warning 4.
Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

0

0

0

0

0

0

0

Status Extension(2005-04)=

Safe Value

Data Component

tira40e1

Counts

0

0

0

Bit 1

Bit 0

0

0

0

0

Electronics
Warning0

8 Bits providing the current sensor alarm state of the instance
Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

0

0

0

0

0

Underrange
ExceededOverrange
Exceeded

Reading
Invalid192.4.2.3 Instance Attributes ofInstance 2 / Hot CathodeIon Gauge
Attribute
ID

Access
Rule

NV/
V

3

Set/Cond.
→ below

NV Data Type

4

NV Data Units ENGUNITS→"Semantics"

20

Name

Following is the Instance 2 with the subclass extension of the hot cathode ion
gauge part of the BCG450-SD. This instance is used to provide control and status
information for the hot cathode ion gauge part of the BCG450-SD.
DeviceNet
Data Type

Description of Attribute

Semantics of Values

USINT

Determines the Data Typeof Value and all related
attributes as specified inthis table.

→ "Semantics" section[default] = INTDetermines the Units con- → "Semantics" section
text of Value and all related [default] = Counts
attributes.

5

Get

V

Reading
Valid

BOOL

Indicates that the Value
attribute contains a valid
value.

0 = invalid
1 = valid(invalid: e.g., not warmed up yet)

6

Get

V

Value

INT or specified by Data
Type if supported

Analog input value

The corrected, converted, calibrated
final value of the sensor.
→ "Semantics" section

7

Get

V

StatusBYTE

Alarm and Warning Stateof this object instance→ "Semantics" section

10

Get

NV Full Scale

INT or specified by Data
Type if supported

The Value of Full Scale forthe sensor.

The value of attribute Value corresponding to the Full Scale calibrated
measurement of the sensor.
[default] = maximum allowable value
for the Data Type

25

Set

NV Safe State USINT

Specifies the behavior for
the Value for states otherthan Execute→ "Semantics" section[default] = 0

26

Set

NV SafeValue

INT or specified by Data
Type if supported

The Value to be used for
Safe State = Safe Value→ "Semantics" section[default] = 0

32

Get

NV Overrange INT or specified by Data
Type if supported

Specifies the highest valid
Value

The value above which attribute
Reading Valid is set to invalid.
[default] = maximum allowable value
for the Data Type

33

Get

NV Underrange

INT or specified by Data
Type if supported

Specifies the lowest valid
Value

The value below which attribute
Reading Valid is set to invalid.
[default] = minimum allowable value
for the Data Type

88

Get

V

Degas
StatusBOOL

Indicates current degas
state

0
1

91

Get

V

Emission
Current

REAL

Indicates setting level ofemission current in amps

0, 25 µA, 5 mA, 20 mA

93

Get

V

Emission
StatusBOOL

Indicates whether theemission is turned ON or
OFF

0
1

94

Get

V

SensorWarning

Structure of
Byte

default

0 → "Semantics"

95

Get

V

Sensor
Alarm

Structure of
Byte

default

0 → "Semantics"

OFF
ON

OFF
ON

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Attribute
ID

Access
Rule

NV/
V

Name

DeviceNet
Data Type

Description of Attribute

Semantics of Values

96

Get

V

StatusExtension

BYTE

Bit mapped byte providing
additional status bits

Bit description:
0 Reading Invalid(Logical Inversion of
Reading Valid)
1 Overrange Exceeded
2 Underrange Exceeded

99

Get

NV

Subclass

UINT

Identifies the subset of
additional attributes, services and behaviors for hot
cathode ion gauges

5

100

Get

NV

State
EmissionControl
Mode

USINT

Represents the state according the service Set
Control Mode

0 = Auto
1 = Manual

Hot Cathode Ion Gauge

2.4.2.4 Semantics of S-Analog
Sensor Instance 2
Data Type→ Instance 1

Value

An S-Analog Sensor object instance derives a reading from a physical analog sensor. The reading is converted to the data type and units specified for the Value
attribute.
Using Counts and INT the following conversion has to be used:
Counts=where:

kmbar
kTorr
kPa

[ log10 (pressure) + k ] × 2000
=
=
=

12.5
12.624903
10.5

Safe State→ Instance 1

Safe Value→ Instance 1

Sensor Alarm

16 Bits are used as sensor faults . Sensor Alarm Byte 0 is mapped to the Exception
Detail Alarm 4, Sensor Alarm Byte 1 ismapped to the Exception Detail Alarm 5.

Data Component

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

Sensor Alarm Byte 0

0

0

0

0

0

0

0

0

Sensor Alarm Byte 1

0

0

0

0

0

0

Electronics
Failure0

Sensor Warning

Data Component
Sensor Warning Byte 0
Sensor Warning Byte 1

16 Bits are used as sensor warnings. Sensor warning Byte 0 is mapped to the
Exception Detail Warning 5, Sensor warning Byte 0 is mapped to the Exception
Detail Warning 6.
Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

0

0

0

0

0

0

0

0

0

Pressure
too high for
degas

0

0

0

0

0

0

The bit "Pressure too high for degas" will be set if the pressure is above
7.2×10-6 mbar when a degas service is requested. The bit will be reset when thepressure is below 7.2×10-6 mbar.

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21

Status Extension
Data Component
Sensor Alarm Byte 022

8 Bits providing the current sensor alarm state of the instance
Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

0

0

0

0

0

Underrange
ExceededOverrange
Exceeded

Reading
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2.4.2.5 Instance Attributes ofInstance 3 / Capacitance
Diaphragm Gauge
Attribute
ID

Access
Rule

NV/
V

3

Set/Cond.
→ below

NV Data Type

4

NV Data Units ENGUNITS→"Semantics"

tira40e1

Name

Following is the Instance 3 with the subclass extension of the capacitancediaphragm gauge part of the BCG450-SD. This instance is used to provide control
and status information for the capacitance diaphragm gauge part of the
BCG450-SD.
DeviceNet
Data Type

Description of Attribute

Semantics of Values

USINT

Determines the Data Typeof Value and all related
attributes as specified inthis table.

→ "Semantics" section[default] = INTDetermines the Units con- → "Semantics" section
text of Value and all related [default] = Counts
attributes.

5

Get

V

Reading
Valid

BOOL

Indicates that the Value
attribute contains a valid
value.

0 = invalid
1 = valid(invalid: e.g., not warmed up yet)

6

Get

V

Value

INT or specified by Data
Type if supported

Analog input value

The corrected, converted, calibrated
final value of the sensor.
→ "Semantics" section

7

Get

V

StatusBYTE

Alarm and Warning Stateof this object instance→ "Semantics" section

10

Get

NV Full Scale

INT or specified by Data
Type if supported

The Value of Full Scale forthe sensor.

The value of attribute Value corresponding to the Full Scale calibrated
measurement of the sensor.
[default] = maximum allowable value
for the Data Type

25

Set

NV Safe State USINT

Specifies the behavior for
the Value for states otherthan Execute→ "Semantics" section[default] = 0

26

Set

NV SafeValue

INT or specified by Data
Type if supported

The Value to be used for
Safe State = Safe Value→ "Semantics" section[default] = 0

32

Get

NV Overrange INT or specified by Data
Type if supported

Specifies the highest valid
Value

The value above which attribute
Reading Valid is set to invalid.
[default] = maximum allowable value
for the Data Type

33

Get

NV Underrange

INT or specified by Data
Type if supported

Specifies the lowest valid
Value

The value below which attribute
Reading Valid is set to invalid.
[default] = minimum allowable value
for the Data Type

94

Get

V

SensorWarning

Structure of
Byte

default

0 → "Semantics"

95

Get

V

Sensor
Alarm

Structure of
Byte

default

0 → "Semantics"

96

Get

V

StatusExtension

BYTE

Bit mapped byte providing
additional status bits

Bit description:
0 Reading Invalid(Logical Inversion of
Reading Valid)
1 Overrange Exceeded
2 Underrange Exceeded

99

Get

NV

Subclass

UINT

Identifies the subset of
additional attributes, services and behaviors for hot
cathode ion gauges

5(2005-04)

BCG450SDv1.cp

Capacitance Diaphragm Gauge

232.4.2.6 Semantics of S-Analog
Sensor Instance 3
Data Type→ Instance 1

Value

An S-Analog Sensor object instance derives a reading from a physical analog sensor. The reading is converted to the data type and units specified for the Value
attribute.
Using Counts and INT the following conversion has to be used:
Counts=where:

kmbar
kTorr
kPa

[ log10 (pressure) + k ] × 2000
=
=
=

12.5
12.624903
10.5

Safe State→ Instance 1

Safe Value→ Instance 1

Sensor Alarm

16 Bits are used as sensor faults. Sensor Alarm Byte 0 is mapped to the Exception
Detail Alarm 0, Sensor Alarm Byte 1 is mapped to the Exception Detail Alarm 1.

Data Component

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

Sensor Alarm Byte 0

0

0

0

0

0

0

0

Diaphragm
FailureSensor Alarm Byte 1

0

0

0

0

0

0

Electronics
Failure0

16 Bits are used as sensor warnings. Sensor Warning Byte 0 is mapped to the
Exception Detail Warning 1, Sensor Warning Byte 1 is mapped to the Exception
Detail Warning 2.

Sensor Warning

Data Component
Sensor Warning Byte 0
Sensor Warning Byte 1

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

0

0

0

0

0

0

0

0

0

0

0

0

0

0

Electronics
Warning0

Status Extension
Data Component
Sensor Alarm Byte 024

8 Bits providing the current sensor alarm state of the instance
Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

0

0

0

0

0

Underrange
ExceededOverrange
Exceeded

Reading
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2.4.2.7 Object-Specific Services
on Instance 3 / Capacitance
Diaphragm Gauge
USER ATM Adjust

ServiceCode32hService Name

Description of Service

User Atmosphere
AdjustPerforms an Atmosphere Adjust Piezo to
Capacitance Diaphragm Gauge

User ATM Adjust Service Data Field Parameters:
Parameter

Datatype

User ATM Adjust

BOOL

0 = Unlock user ATM Adjust
1 = executes an User ATM Adjust and lock

There are no state transitions associated with the invocation of this service. It istherefore, incumbent upon the user to establish the device into the desired configuration prior to, and during the execution of this service. This will generally involve exposing the sensor to a known environment and treating the values read
during execution of the services accordingly.
A success service response indicates that the service was accepted and the application process started.
To perform the User Atmosphere Adjust Request proceed as follows:n Vent the gauge to atmosphereo Unlock the user ATM Adjust wit a target value of "0"
p Execute the User Atmosphere Adjust Service with a target value of "1".
The pressure value of the amtmosphere pressure sensor is then tracked to thevalue of the Capacitance Diaphragm Gauge.

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25

2.4.2.8 Instance Attributes ofInstance 21 / Setpoint A(Instance 22 / Setpoint B)
Attribute
ID

AccessRule

NV/V Name

DeviceNet
Data Type

Description of Attribute

3

Set / Conditional:→
Instance 1

NV

Data TypeUSINT

Determines the Data Type → "Semantics" section below.
of Value and all related
int
C3h [default]
attributes as specified in
float
CAh
this table.

4

Get

NV

Data UnitsUINT

Determines the Units
context of Value and all
related attributes.

Supported Values:
Counts 1001h [default]
mbar
1308h
Torr
1301h
Pascal 1309h

5

Get

V

Reading
Valid

BOOL

Indicates that the Value
attribute contains a valid
value.

0 = invalid
1 = valid

6

Get

V

Value

INT orspecified by
Data TypeThe value of the
Setpoint A (Setpoint B)
relay.

7

Get

V

StatusBYTE
USINT

Alarm and Warning Stateof this object instanceDefines whether the relay
is controlled by the according potentiometer or by
the atmosphere pressure
sensor combined with the
Capacitance Diaphragm
Gauge pressure value.
If the pressure value(active value) is within a"window" specified by this
attribute from theatmosphere pressure sensor value, the relay will be
activated. For further
details → below.

100

NV

Set

Setpoint
Function

101

NV

Set

Percentage USINTof
Atmosphere
1)

Semantics of Values→ "Semantics" section below.
Behavior as Trip Point LOW
0 = Setpoint (default)
1 = Atmosphere Control

0 … 140
Example:1
1%
50 50%
default value = 5%

The upper pressure limit of thegauge is 1500 mbar. At an
atmosphere pressure above
1000 mbar and a percentage
of atmosphere of 150% therelay will never be activated.
102

V

Get

Atmosphere USINT
reached1)

26

If the pressure of thegauge is within a percentage of the atmospherepressure this byte has thevalue 1. If the pressure is
below this window, thevalue is 0.

If the device is in Safe State the valueof this attribute is "0".

Atmospheric pressure threshold (→  28).

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Status

Setpoints

A bit mapped byte which indicates the Alarm and Warning Exception status of theobject instance. The following definition applies:
Bit

Definition

0

High Alarm Exception:

0 = cleared

1 = set1

Low Alarm Exception:

0 = cleared

1 = set2High Warning Exception: 0 = cleared

1 = set3

Low Warning Exception:

1 = set4

Reserved

5

Reserved

6

Reserved

7

Reserved

0 = cleared

If the pressure (attribute 6, instance 1 and 2) decreases below the Setpoint value(attribute 6, instance 21 and 22) an alarm or warning exception condition will be
generated. The hysteresis is set to 10%.
For example: A Set Point value of 100 will result in an exception condition being set
when the Value is below 100 and cleared when the Value increases above 110.

The setpoints can only be read by DeviceNet. It is not possible to set thevalues or to influence the state of the relays by DeviceNet. Even if the device is not allocated, the relay status is set corresponding to the voltage adjusted by the two setpoint potentiometers.
Only in case of a microcontroller RESET (for example reset on Identity Object), the relays will be reset too.
The setpoint is available in the actual pressure unit and data type. If the pressure
unit "Counts" is set, use the following formula for the conversion from Counts topressure:

pmbar

=

10Counts / 2000 - k

where:

kmbar
kTorr
kPa

=
=
=

12.5
12.624903
10.5

The relation between setpoint and voltage is:
pmbar

=

10(U - 7.75) / 0.75 + c

where:

cmbar
cTorr
cPa

=
=
=

0
-0.1252

The setpoints are only activated, if the pressure is below 100 mbar, therefore a
setpoint above 100 mbar can not be realised.

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27

Setpoint function"Atmosphere Control"

The setpoint function "Atmosphere Control" is used to decide whether the measured pressure is within a specified percentage of the atmospheric pressure(→ diagram below).
Attribute 101 "Percentage of Atmosphere" is used to define the percentage of atmospheric pressure. If the measured pressure is within this window, the corresponding relay will be activated (→[4]).
A fixed hysteresis of 2% of the atmospheric pressure threshold is programmed.
The following rule applies:

Atmospheric pressure threshold

Atmospheric pressure × N= —————————————
100

Where:
Atmospheric pressure threshold[mbar] :AtmosphericpressureN[mbar] :[%] :If the pressure inside the vacuum chamber rises
above this threshold, the relay "Atmosheric pressure reached" is energized.
Atmospheric pressure (100%, ambient) 1)"Percentage of Atmosphere"(1 … 140%, default value = 5%)(Example values in the diagram below are printed in italic)

Measuring signal(Pressure p)1500 mbar
980 mbar

833 mbar

Upper limit of measuring range of gauge
Atmospheric pressure (100%, ambient)1)e"Percentage of Atmosphere"
alu
dv
e
(85%)
r
su
(Atmospheric pressureeaMthreshold)816 mbar
Hysteresis(2% of atmosphericpressure threshold)

Relay status "Atmospheric pressure reached"1)

The (piezo) sensor measuring atmospheric pressure can becalibrated to the value of the Capacitance Diaphragm Gauge pressure(→  25).

28

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2.4.3 Common Services

The S-Analog Sensor Object provides the following Common Services:
Service Service Name
Code

Description of Service

0Eh

Get_Attribute_Single

Returns the contents of the specified attribute.

10h

Set_Attribute_Single

Modifies an attribute value.

2.4.4 Object-Specific Services
on Instance 2 / Hot
Cathode Ion Gauge
2.4.4.1 SET DEGAS STATE

ServiceCode61h

Set Degas State Request
Service Data Field
parameters

Service Name

Description of Service

Set Degas State Activates/deactivates degas mode according to
the parameter Degas State. Degas mode may
be terminated either automatically by device
timeout (3 min) or remotely by this service.

Parameter

Data Type

Degas
State

BOOL

Description

Semantics of Values
01

switches Degas OFF
switches Degas ON

The pressure has to be below 7.2×10-6 mbar before degas can be switched on.

2.4.4.2 SET EMISSION STATE

Set Emission State Request
Service Data Field
parameters

Service
Code

Service Name

Description of Service

62h

Set Emission
State

Turns the filament on and off according to theparameter Emission State

Parameter

Data Type

Description

Semantics of Values

Emission
State

BOOL

→ below

01emission OFF
emission ON

If the gauge is in the Emission User Mode "Manual", please note:tira40e1(2005-04)

BCG450SDv1.cp•

The service SET EMISSION STATE ⇒ ON may be executed only, if
the pressure is below 2.4×10-2 mbar. If the pressure is higher, an
Object State Conflict error message will be returned.

•

If the pressure rises above 3.2×10-2 mbar, the gauge will switch off
the emission automatically. The gauge will then show the Pirani
value.

•

If the gauge is measuring in the ion gauge measuring range and theservice Set Emission State ⇒ OFF ist executed, the emission will beswitched off and the minimum Pirani value 1×10-3 mbar will be displayed.

29

2.4.4.3 Emission Control ModeSet Emission Control Mode
Data Field

Emission User Modes

Service
Code

Service Name

Description of Service

32h

Set Emission
Control Mode•

Automatic
The Emission is switched on and off by the
Pirani automatically.

•

ManualThe emission has to be switched on and off
by the user

Parameter

Data Type

Description

Semantics of Values

Emission
User Mode
State

BOOL

→ below

0
1

Automatic Mode (default)
Manual Mode

Automatic:

The emission is automatically switched ON and OFF.
The user can switch the emission OFF by using the Set Emission
State service.
If the emission is switched off manually, the emission will be automatically switched on again, after the pressure rose above 3.2×10-2 mbar
and falls below 2.4×10-2 mbar again.

Manual:The emission has to be switched on and off by the user, using the Set
Emission State service. The Set Emission State service may be
executed only, if the pressure is below 2.4×10-2 mbar. If the pressure
is higher, an Object State Conflict error will be returned.

If the emission is switched on and the pressure rises above 3.2×10-2 mbar, thegauge will switch off the emission automatically.

2.4.5 Behavior
Data TypeThe following behavior with respect to Data Type applies:
The Data Type value will be set automatically based upon the first valid I/O connection established by the device.
If no established I/O connections exist, which include an attribute from this object,then the Data Type attribute is settable provided that the object is in the Idle State.
The following example demonstrates this behavior:
A device specifies an instance of the S-Analog Sensor object as well as two static
Assembly object instances, both with data attribute components mapped to thisobject instance. Assembly object instance ID 1 specifies INT data types and Assembly object instance ID 2 specifies REAL data types.
After the device is online, it is configured with an I/O connection to Assembly instance ID 2. When the connection transitions to the Established State, this object
instance attribute Data Type is automatically set with the value for REAL before
any data is communicated to, or from the object instance. Any subsequent attempt
to connect to Assembly instance ID 1 would then be rejected and result in an
INVALID ATTRIBUTE VALUE error with the additional error code indicating the IDof the offending attribute, which in this case would be the connection path.

30

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3 I/O Assembly Object
Class Code04h

A collection of assembly objects allows the sending of attributes from different
application objects in one message (i.e. Polling I/O).

3.1 I/O Assembly Instancestira40e1(2005-04)

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The following table identifies the I/O assembly instances supported by the gauge
device.
Number

Type

Name

1

Input

Pressure Value (Active Instance)

2

Input

Exception Status and INT Pressure Value(Active Instance)

4

Input

REAL Pressure Value (Active Instance)

5

Input

Exception Status and REAL Pressure Value(Active Instance)

8

Input

Exception Status

9

Input

Active Instance, Active Pressure Value

10

Input

Exception Status and Active Instance and INT Active
Pressure Value

12

Input

Active Instance
REAL Active Pressure Value

13

Input

Exception Status
Active Instance
REAL Active Pressure Value31

3.2 I/O Assembly Object
Instance Data Attribute
FormatIn order to maintain consistency, this device type will only allow connections toeither INT or REAL based Assembly instances (→ Data Type definition  18).
Once a valid connection is established, attempts to configure connections to adifferent type of Assembly instance will return an error.
The I/O Assembly DATA attribute has the format shown below:
Instance

Type

1

Input

0
1

INT Pressure Value (low byte)

2

Input

0

Exception Status; Class 48, Instance 1,
Attribute 12

1
2

INT Pressure Value (low byte)
Class 49, Active Value0

REAL Pressure Value (low byte)

4

Input

Byte Bit 0 … 7

1
2

Class 49, Active Instance Value

3
5

Input

0

Exception Status Class 48, Instance 1,
Attribute 12

1

REAL Pressure Value (low byte)

2

Class 49, Active Instance Value

3
4
8

Input

9

0

Exception Status ; Class 48, Instance 1,
Attribute 120

Active Instance1
2

INT Active Pressure Value

3
10

Input

0

Exception Status

1

Active Instance2
3

INT Active Pressure Value

4
12

Input

0

Active Instance

1
2

REAL Pressure Value

3
4
5
13

Input

0

Exception Status

1

Active Instance2
3

REAL Pressure Value

4
5
6

32

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Appendix
A:

Range of Values

B:

Specific Codes

C:

Conversion of a Floating
Number According toIEEE 754

Integer

int–32767 … 32768

Unsigned integer

uint

Float

float

0 … 65535
according IEEE 754

Manufacturer product code

13 = BCG450-SD

General
Number received

AA BB CC DDh

1. Reverse the sequence ofthe HEX words

2. Separate into bytes

Legend:XXh

Hexadecimal number(Radix = 16)

XXd

Decimal number (Radix = 10)

XXb

Binary number (Radix = 2)

DDh

CCh

BBh

AAh

SEEE EEEEb

EMMM MMMMb

MMMM MMMMb

MMMM MMMMb

Sign

3. Calculate(4-Byte, floating format)

8-Bit exponent

23-Bit mantissa

S

EEEE EEEEb

MMM MMMM MMMM MMMM MMMM MMMMbØØØ⎛ MMM MMMM MMMM MMMM MMMM MMMM ⎞
b⎟
23
⎜
⎟
2
⎝
⎠

1+ ⎜

⎛ NNNNNd ⎞⎟⎝ 8388608 d ⎠= 1+ ⎜

Ø
Sign =

Exponent =Mantissa =

S

XYZd

RSTUVd-1

Converted number

tira40e1(2005-04)

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Sign × 2(Exponent-127) × Mantissa

33

Example
Number received

00 00 CA 42h

1. Convert sequence of the
HEX words

2. Separate into bytes

42h

CAh

00h

00h

0100 0010b

1 1 0 0 1010b

0000 0000b

0000 0000b

Sign

3. Calculate(4-Byte, floating format)

8-Bit exponent

23-Bit mantissa

01000 0101b

100 1010 0000 0000 0000 0000b

Ø

Ø

Ø

-10

⎛ 100 1010 0000 0000 0000 0000 ⎞
b⎟
1+ ⎜⎜
⎟⎟
23
⎜
2
⎝
⎠
⎛ 4849664 d ⎞⎟⎝ 8388608 d ⎠= 1+ ⎜

ØØ

Sign =

Exponent =Mantissa =1133

1.578125

Converted number

D:

Typical Start-Up
Procedure

Allocation process

1 × 2(133-127) × 1.578125 = 101

The start up of a device is divided into the steps:•

Allocation process•

Setting of the EPR attribute•

Choice of the input and output assemblies

Send an allocation string as defined in the DeviceNet specification to the device
you want to allocate.
Set the bits in the allocation choice byte to 1 for these connections you want to use.

34

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Example of the principal
allocation process.

Master MAC ID....0
Allocation choice:
Explicit, Poll, bit strobe, COS
Slave address:2
Allocated instances may not be valid for the BCG450-SD⇒ Allocation String:
Slave’s explicit/unconnected response message:

416
413

00 4B 03 01 57 00
00 CB 00

Within the first allocation message the explicit connection has to beestablished.

The I/O connections bit strobe and COS/Cyclic are not supported by the
BCG450-SD. Appendix D describes only the general allocation procedure for all devices (group 2 slave only).

Setting of the EPR Attribute(expected packet rate)

After the allocation, the device activates an INACTIVITY WATCHDOG TIMER.
This timer has to be set for every single connection (connection object, attribute 9)
which is allocated in the allocation choice byte. This attribute defaults to 2500
(2500 ms) within explicit messaging connections, and to zero within an I/O connection. If the INACTIVITY WATCHDOG TIMER expires, the established connection will be released. With every message the device receives, this timer is reloaded with the value specified in the according connection object, therefore it normally doesn't expire. The value zero deactivates the INACTIVITY WATCHDOGTIMER.
In this step the INACTIVITY WATCHDOG TIMER has to be set. In testing mode
you could use the value 0 to deactivate the INACTIVITY WATCHDOG TIMER.
In the following you see the strings for setting the EPR attribute (addresses as
specified above):ID

Message Body414

00 10 05 01 09 00 00

set EPR of the explicit connection to zero414

00 10 05 02 09 00 00

set EPR of the poll connection to zero414

00 10 05 03 09 00 00

set EPR of the bit strobe connection to zero414

00 10 05 04 09 00 00

set EPR of the COS/Cyclic connection to zero

The responses of the slave are:

Choice of the input and output
assemblies

ID

Message Body

413

00 90 00 00

set EPR of the explicit connection to zeroYou can specify which of the several input/output assemblies predefined in a device should be used for every single connection.
Reading or setting of the input/output assemblies is possible only if thecorresponding connection (polling, change of state, bit strobe) has been allocated in the Allocation Message.

Reading the configured
assemblies

If you want to read the number of the chosen assembly, you must read the attributes 14 and 16 in the corresponding Instance of the Connection Object (Object
ID 5).
For reading this value, the connection has to be established. The EPR attributemay be set.
Instance 2: Polling
Instance 3: Bit Strobe
Instance 4: Change of State/Cyclic

tira40e1(2005-04)

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35

Setting of assemblies

If you want to set the number of the chosen assembly, you have to set the attributes 14 and 16 in the corresponding instance of the connection object.
To set this value, the connection has to be allocated, but the EPR attributehas not to be set to any value.

Examples•Read a configured assembly (addresses as specified above):
Get single request:
ID

Message Body

414

00 0E 05 02 0E

get produced connection path (Request
for input assembly by master).

Get single response:ID

Message Body

413

00 8E 20 04 24 05 30 03

response from slave

The addressing format of the attribute values differs from the normal mode. A
connection path attribute that specifies class 4, Instance 5, and attribute ID 3 isillustrated below:
Class #420

Instance #5

04

24

05

Attribute #3
30

03

The instance defines the assembly you want to use. This format has to be usedby the master in the request and is used by the slave in the response.
•

Set the input assembly 04 for a Poll Connection (addresses as specified
above):
Set single request:
ID

Message Body

414

80 00 10 05 02 10 20 04414

80 81 24 04 30 03

first fragment
second fragment

Because the message body is longer than 8 bytes, the fragmented protocol has
to be used.
Set single response:

36

ID

Message Body413

80 C0 00

response on first fragment

413

80 C1 00

response on second fragmenttira40e1(2005-04)

BCG450SDv1.cp

E:

tira40e1

Literature(2005-04)

BCG450SDv1.cp[1]

www.inficon.com
Product descriptions and downloads
INFICON AG, LI–9496 Balzers, Liechtenstein[2]

www.odva.org
Open DeviceNet Vendor Association, Inc.
DeviceNet™ Specifications[3]

European Standard for DeviceNet EN 50325[4]

www.inficon.com
Operating Instructions
BCG450, BCG450-SD, BCG450-SP
tina40d1 / tina40e1
INFICON AG, LI–9496 Balzers, Liechtenstein[5]

www.inficon.com
Instruction Sheet
BCG450, BCG450-SD, BCG450-SP
tima40d1 / tima40e1
INFICON AG, LI–9496 Balzers, Liechtenstein[6]

www.inficon.com
Instruction Sheet
BCG450-SD, BCG450-SP
tima41d1 / tima41e1
INFICON AG, LI–9496 Balzers, Liechtenstein37

Notes38

tira40e1(2005-04)

BCG450SDv1.cp

Notestira40e1(2005-04)

BCG450SDv1.cp

39

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
t i r a40e1

www.inficon.com