Capacitance Diaphragm Gauge
CDG100D 4-20 mA Current Loop

Operating Manual

Incl. EU Declaration of Conformity

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Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.

ValidityThis document applies to products of the CDG100D 4-20 mA
Current Loop series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parametersettings (e.g. factory setting of setpoint) as defined in thecorresponding ordering information.

2

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The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in thisdocument correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to the gauges with other vacuum connections by analogy.
We reserve the right to make technical changes without priornotice.

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Intended Use
The temperature compensated Capacitance Diaphragm Gaugesof the CDG100D 4-20 Current Loop series are intended for
absolute pressure measurement of gases in their respective
pressure ranges (→  2).
The gauges belong to the SKY® Smart Sensors family and canbe operated in connection with an appropriate controller.

Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection ismeasured capacitively and converted into a DC current output
signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating thesensor to a constant temperature of 100 °C which results in acompensation of changes in the ambient conditions and a reduced deposition of process products and by-products in process applications.

Trademarks
SKY®
VCR®

INFICON Holding AG
Swagelok Marketing Co.

Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085

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Scope of Delivery
1× gauge CDG100D
1× insulation shell
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English

Contents
Product Identification
Validity
Intended Use
Functional Principle
Trademarks
Patents
Scope of Delivery

2
2
4
4
4
4
5

1 Safety
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety Instructions
1.4 Liability and Warranty

7
7
7
8
8

2

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Technical Data

9

3 Installation
3.1 Vacuum Connection
3.2 Power Connection

15
15
19

4 Operation
4.1 Status Indication
4.2 Zeroing the Gauge
4.2.1 <ZERO> Adjustment

21
21
22
22

(2020-11)

5

4.3
4.4
4.5

Switching Functions
Activating the Factory Setting (Factory Reset)
Diagnostic Port (RS232C Interface)

26
29
30

5 Deinstallation
5.1 Power Connection
5.2 Vacuum connection

31
31
31

6

Maintenance, Repair

34

7

Returning the Product348Disposal

35

9Accessories

36

ETL Certification

36

EU Declaration of Conformity

37

For cross-references within this document, the symbol (→  XY)
is used.

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1

Safety1.1

Symbols Used
DANGER
Information on preventing any kind of physical injury.

WARNING
Information on preventing extensive equipment and environmental damage.

CautionInformation on correct handling or use. Disregard can lead tomalfunctions or minor equipment damage.
Notice1.2

Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-userof the product.

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1.3

General Safety Instructions• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider thesafety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.

1.4

Liability and Warranty
INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties• disregard the information in this document• use the product in a non-conforming manner• make any kind of interventions (modifications, alterations etc.)
on the product• use the product with accessories not listed in the productdocumentation.
The end-user assumes the responsibility in conjunction with theprocess media used.
Gauge failures due to contamination are not covered by thewarranty.

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2

Technical Data
Measurement range
Accuracy 1)≤0.5 Torr/mbar F.S.
≥1 Torr/mbar F.S.
Temperature effect on zero
≤0.5 Torr/mbar F.S.
≥1 Torr/mbar F.S.
Temperature effect on span
Resolution
Gas type dependence
Output signal (measurement
signal)Signal range
Measurement range(zero … F.S.)
Error status
Relationship current-pressure
Loaded impedance RL
18.5 … 33.3 V (dc) 2)→ "Validity"
0.4% of reading
0.2% of reading
0.0050% F.S./ °C
0.0025% F.S./ °C
0.02% of reading / °C
0.003% F.S.
none
2-wire, current loop
3.8 … 20.4 mA
4.0 … 20.0 mA
22.8 mA
linear500 Ω16.2 … 31.0 V (dc) 2) 400 Ω
13.9 … 28.8 V (dc) 2) 300 Ω
11.7 … 26.5 V (dc) 2) 200 Ω
9.4 … 24.2 V (dc) 2) 100 Ω

Response time 3)≥0.25 Torr/mbar (F.S.)
0.05 / 0.1 Torr/mbar (F.S.)
1)

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100 ms
130 msNon-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.

2)Supply voltage current interface.

3)

Increase 10 … 90 % F.S.R.

(2020-11)9

Identification
Resistance RIdent
Voltage
Remote Zero Adjust
External switching contact
Pulse
Switching functions
Setting range
Hysteresis
Relay contact
closedopen
Switching time
Status relay
Relay contact
closedopen

Diagnostic port

10

13.2 kΩ referenced tosupply common≤5 V
digital input for zero adjustment with external switchingcontact (→  22)
30 V (dc) / <5 mA (dc)
>1 s … <5 s
SP1, SP2
0 … 99% F.S. (0 … 9.9 V)
1% F.S.
30 V (dc) / ≤0.5 A (dc)floating (NO)p ≤ pSP (LED lit solid)p ≥ pSP (LED off)
≤50 ms30 V (dc) / ≤0.5 A (dc)connected to supply common (pin 5)
measurement mode
warningno supply voltage
warming up
errorJack connector, 2.5 mm,
3-pin

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Supply

DANGER
The gauge may only be connected to power supplies, instruments or control devices that conformto the requirements of a grounded protective extralow voltage and limited power source (LPS),Class 2. The connection to the gauge has to be
fused.
Supply voltage
at the gauge

Class 2 / LPS+14 … +30 V (dc) or±15 V (±5%)≤1 VppRipplePower consumption
while being heated≤15 W
at operating temperature≤10 W
Fuse to be connected
1.6 AT
The gauge is protected against reverse polarity of the supply
voltage and overload.
Electrical connection
Sensor cable CDG

15-pin D-sub, male
15-pin plus shielding

Cable length CDG
Supply voltage 15 V

≤ 8 m (0.14 mm²/conductor)≤15 m (0.25 mm²/conductor)
Supply voltage 24 V
≤43 m (0.14 mm²/conductor)≤75 m (0.25 mm²/conductor)
Supply voltage 30 V
≤88 m (0.14 mm²/conductor)≤135 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required(Rcable ≤1.0 Ω).
Cable length current interface<25 m
25 …50 m>50 … 300 m
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0.14 mm² / conductor
0.25 mm² / conductor
0.50 mm² / conductor
11

Grounding concept→ "Power Connection"

Materials exposed to vacuum

ceramics (Al2O3 ≥99.5%),
stainless steel AISI 316L
≤4.2 cm3

Internal volume
Admissible pressure (absolute)
200 / 500 / 1000 / 1100 F.S.
1 / 2 / 5 / 10 / 20 / 50 / 100 F.S.
0.1 / 0.25 / 0.5 F.S.
Bursting pressure (absolute)
Admissible temperatures
Storage
Operation
Bakeout
Relative humidity
Use
Degree of protection

12

4 bar
2.6 bar
1.3 bar
6 bar| 400 kPa
| 260 kPa
| 130 kPa
| 600 kPa

–40 °C … +65 °C+10 °C … +40 °C≤110 °C at the flange≤80% at temperatures≤+31 °C, decreasing to 50%
at +40 °C
indoors only, altitude up to2000 m
IP 40

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Dimensions [mm]Weighttinb58e1(2020-11)

837 … 897 g

13

Analog Measurement Signal vs. Pressurep = [(Iout – 4 mA) / 16 mA] × p (F.S.)
Conversion Torr ↔ Pascal

c

Torr

mbar 4)

Pa 4)

1.00

1013.25 / 760 =
1.3332…

101325 / 760 =
133.3224…

Example: Gauge with 10 Torr F.S.
Measurement signal Iout = 12 mA
p = [(12 mA – 4 mA) / 16 mA] × 10 Torr
= 0.5 × 10 Torr = 5 Torr4)

14

Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /1998
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3

Installation
WARNING
Fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks andimpacts.

3.1

Vacuum Connection
DANGER
Overpressure in the vacuum system >1 bar
Injury caused by released parts and harm causedby escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which aresuited to overpressure.

DANGER
Overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage yourhealth.
Use O-rings provided with an outer centering ring.

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DANGER
Protective ground
Products that are not correctly connected to groundcan be extremely hazardous in the event of a fault.
Electrically connect the gauge to the groundedvacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.

C a u tio n
Vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent
damages.

C a u tio n
Dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

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Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep condensates and particles from getting into the measuring
chamber preferably choose a horizontal to upright position. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the buttons can be accessed with a pin (→  22).

 Remove the protective lid and connect the product to thevacuum system.

Seal with centering ring

Protective lid
Clamp

Keep the protective lid.

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 Mount the insulation shell.
Insulation shell

18

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3.2

Power Connection
Make sure the vacuum connection is properly made(→  15).

DANGER
The gauge may only be connected to power supplies, instruments or control devices that conformto the requirements of a grounded protective extralow voltage and limited power source (LPS),Class 2. The connection to the gauge has to be
fused.
Ground loops, differences of potential, or EMC problems may
affect the measurement signal. For optimum signal quality,
please do observe the following notes:• Typically connect the cable shield to ground at one side via
the connector case. Make sure the connector case has directcontact to the cable's shield on its whole circumference. Do
not connect the other side of the shield.
• Connect the supply common with protective ground directly at
the power supply.
• Depending on the situation, following measures can cause
better signal quality:- connect the cable shield to ground on power supply side,or- connect the cable shield to ground on both sides.
• Potential difference between supply common and housing≤18 V (overvoltage protection).

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19

If no sensor cable is available, make one according to the following diagram (cable length and conductor cross-sections →  11).

Pin 1,4
Pin 2
Pin 3
Pin 5
Pin 6
Pin 7, 11
Pin 8, 9
Pin 10
Pin 12
Pin 15case
RL

20

Relay SP1, closing contact
Positive Exitation
StatusSupply common CDG
Supply CDG (-15 V)
Supply CDG (+14 … +30 V or
+15 V)
Relay SP2, closing contact
Gauge identification or
Remote Zero Adjust
Negative Exitation
Housing (Chassis Ground)
Connector case15-pinD-subfemale,soldering side→9

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4

Operation
Put the gauge into operation.
A warm-up time of at least 90 minutes should be allowed; forprecise pressure measurements a warm-up time of at least
3 hours is required.

4.1

Status Indication

DIAG
I/O

ST

2
SP

AT
US

1

SP

LED

LED status

Meaning<STATUS>no supply voltage
measurement mode

<SP1>

off
lit solid green
blinking green
short blinks
long blinks
lit solid red
lit green green<SP2>blinking green
off
lit solid green
blinking green
off

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SP ZERO(2020-11)

warning, over/underrange
warming up
errorp ≤ setpoint 1
waiting for setpoint 1 input
p > setpoint 1
p ≤ setpoint 2
waiting for setpoint 2 input
p > setpoint 2

21

4.2

Zeroing the Gauge
The gauge is factory calibrated while "standing upright"(→ "Calibration Test Report").
We recommend performing a zero adjustment, when thegauge is operated for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical andhorizontal mounting orientation is:

4.2.1

F.S.

∆U / 90°

1000 Torr/mbar
100 Torr/mbar
10 Torr/mbar
1 Torr/mbar
0.1 Torr/mbar≈0.02 F.S.
≈0.1 F.S.
≈0.5 F.S.
≈3% F.S.
≈18% F.S.

<ZERO> Adjustment
The zero can be adjusted via• the <ZERO> button on the gauge,• the diagnostic port,• the digital input "Remote Zero": Apply the supply
voltage to pin 10, pulse →  10,
While the gauge is being heated and/or under atmospheric pressure, the zeroing function is locked in orderfor operating errors to be prevented.

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 Evacuate the gauge to a pressure according to the tablebelow:

Recommended final pressure forzero adjustment

F.S.
1100
1000
500
200
100
50
20
10
5
2
1
0.5
0.25
0.1

mbar
Torr
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar–<5×10-2 Torr
<3×10-2 Torr
<10-2 Torr
<5×10-3 Torr
<3×10-3 Torr
<10-3 Torr
<5×10-4 Torr
<3×10-4 Torr
<10-4 Torr
<5×10-5 Torr
<3×10-5 Torr
<10-5 Torr
<5×10-6 Torr

<7×100 Pa<7×100 Pa<4×100 Pa<2×10-0 Pa<7×10-1 Pa<4×10-1 Pa<2×10-1 Pa<7×10-2 Pa<4×10-2 Pa<2×10-2 Pa<7×10-3 Pa<4×10-3 Pa<2×10-3 Pa<7×10-4 Pa<7×10-2 mbar–
<4×10-2 mbar
<2×10-2 mbar
<7×10-3 mbar
<4×10-3 mbar
<2×10-3 mbar
<7×10-4 mbar
<4×10-4 mbar
<2×10-4 mbar
<7×10-5 mbar
<4×10-5 mbar
<2×10-5 mbar
<7×10-6 mbar

If the final pressure is too high for zero adjustment (>25%of the F.S.), the zero cannot be reached and the<STATUS> LED blinks green. If this is the case, activate
the factory setting and adjust the zero again (→  29).

 Operate the gauge for at least 90 minutes (until the signal
is stable).

 Briefly press the <ZERO> button with a pin (max.
ø1.1 mm), or …

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… apply supply voltage to Remote Zero at pin 10(pulse →  10).
The zero adjustment runs automatically. The <STATUS>
indicator flashes until the adjustment (duration ≈8 s) iscompleted.
After zero adjustment, the gauge automatically returns
to the measurement mode.
The <STATUS> LED blinks green if• the signal output is negative (< -20 mV) when the final pressure has been attained• the zero adjustment has failed.

4.2.2<ZERO> Adjustment with Ramp Function
The ramp function allows to adjust the zero at a known reference
pressure within the measurement range of the gauge.

24

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It also permits to adjust an offset of the characteristic curve inorder to• compensate for the offset of the measuring system or• obtain a slightly positive zero for a 0 … 10 V AD converter.
The offset should not exceed 2% of the F.S. (+200 mV). At ahigher positive offset, the upper limit of the measurement range
is exceeded.
Zero adjustment using the ramp function can be
performed via• the <ZERO> button on the gauge,• the diagnostic port.

 Operate the gauge for at least 90 minutes (until the signal
is stable).

 Push the <ZERO> button with a pin (max. ø1.1 mm) andkeep it depressed. The <STATUS> LED starts blinking.
After 5 s, the zero adjustment value, starting at the current
output value, keeps continually changing (ramp) until the
button is released or until the setting limit (max. 25% F.S.)
is reached. The corresponding output signal is delayed byabout 1 s.

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• Change of direction (inverse ramp): Release the button.
Press and keep it depressed again within 3 … 5 s (theflashing frequency of the <STATUS> indicator changes
briefly).
• Fine adjustment: Release the button. Briefly press it
again within 0 … 3 s. The zero adjustment valuechanges by one unit (push <ZERO> button in intervalsof 1 s).
If the <ZERO> button is released for more than 5 s, thegauge returns to the measurement mode.
The <STATUS> LED blinks green if the signal output is negative(< -20 mV).

4.3

Switching Functions
The two switching functions can be set to any pressure within
the measurement range of the gauge (→  14).
The current setpoint setting• can be read/written via the diagnostic port, or• is output at the D-sub connector instead of the measurement
signal (→  20) after the <SP> button is pressed.
If the pressure is lower than the setpoint, the corresponding LED(<SP1> or <SP2>) is lit solid and the corresponding relay(→  20) is energized.

26

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4.3.1

Adjusting the Setpoints
The setpoints can be adjusted via• the buttons on the gauge,• the diagnostic port.

DANGER
Malfunction
If processes are controlled via the signal output,
keep in mind that by pushing the <SP> button themeasurement signal is suppressed and the corresponding threshold value is output instead. Thiscan cause malfunctions.
Push the <SP> button only if you are sure that no
malfunction cause.

Adjusting Setpoint <1>

 Push the <SP> button with a pin (max. ø1.1 mm). The

gauge changes to the switching function mode and outputs
the current threshold value at the measurement value
output for about 10 s (LED <1> blinks).

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 For changing the threshold value, push the <ZERO> button
and keep it depressed. The threshold keeps changing fromthe current value (ramp) until the button is released or until
the limit of the setting range is reached.

28

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• Change of direction (inverse ramp): Release the button.
Press and keep it depressed again within 3 … 5 s (theflashing frequency of the <STATUS> indicator changes
briefly).
• Fine adjustment: Release the button. Briefly press it
again within 0 … 3 s. The threshold value changes by
one unit.
If the <ZERO> button is released for more than 5 s, thegauge returns the measurement mode.
The upper threshold is automatically set 1% F.S. above
the lower one (hysteresis).

Adjusting Setpoint <2>
Push the <SP> button twice (the LED <2> blinks). The adjustment procedure is the same as for setpoint <1>.

4.4

Activating the Factory Setting (Factory Reset)
All user defined parameters (e.g. zero, filter) are restored to theirdefault values.
Loading of the default parameters is irreversible.
Loading the default parameters:

 Put the gauge out of operation.
 Keep the <ZERO> button depressed for at least 5 s while
the gauge is being put into operation (Power ON).

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29

4.5

Diagnostic Port (RS232C Interface)
The diagnostic port <DIAG> permits to output the pressure
reading and all status information and to enter all settings at thesame time.

30

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5

Deinstallation
Preconditions:• Vacuum system vented• Vacuum system cooled to <50 °C

5.1

Power Connection

 Put the gauge out of operation.
 Unfasten the lock screws and disconnect the sensor cable.
5.2

Vacuum connection
DANGER
Hot surface
Touching the hot surface (>50 °C) can causeburns.
Put the product out of operation and allow it to cool
down.

WARNING
Fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks andimpacts.

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DANGERContaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

C a u tio n
Vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent
damages.

C a u tio n
Dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

32

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 Remove the insulation shell.

 Remove the gauge from the vacuum system and install theprotective lid.

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6

Maintenance, Repair
Under clean operating conditions, the product requires no maintenance.
Gauge failures due to contamination are not covered by
the warranty.
We recommend checking the zero at regular intervals(→  22).
INFICON assumes no liability and the warranty becomes nulland void if any repair work is carried out by the end-user or third
parties.

7

Returning the Product
WARNING
Forwarding contaminated productsContaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably befree of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
declaration of contamination *).
*)Form under www.inficon.com

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration ofcontamination are returned to the sender at his own expense.
34

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8

Disposal
DANGER
Contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

WARNING
Substances detrimental to the environment
Products or parts thereof (mechanical and electriccomponents, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with therelevant local regulations.

Separating the components
After disassembling the product, separate its components according to the following criteria:• Contaminated components
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordancewith the relevant national regulations, separated according totheir materials, and disposed of.
• Other components
Such components must be separated according to their materials and recycled.

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9Accessories
Ordering number
Communication adapter (2 m) 5)

303-333

ETL Certification
RECOGNIZEDCOMPONENT

3103457

5)36

ETL LISTED
The product CDG100D 4-20 mA Current Loop
• conforms to the UL Standard UL 61010-1• is certified to the CAN/CSA Standard
C22.2 No. 61010-1-12

The diagnostic software (Windows NT, XP) can be downloaded from our
website.
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EU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below comply with the provisions of the following directives:• 2014/30/EU, OJ L 96/79, 29.3.2014(EMC Directive; directive relating to electromagnetic compatibility)• 2011/65/EU, OJ L 174/88, 1.7.2011(RoHS Directive; directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment)

Product

Capacitance Diaphragm Gauge
CDG100D 4-20 mA Current Loop
Standards
Harmonized and international/national standards and specifications:• EN 61000-6-2:2005 (EMC: generic immunity standard)•

EN 61000-6-3:2007 + A1:2011 (EMC: generic emission•

EN 61010-1:2010 (Safety requirements for electrical equipment for•

EN 61326:2013; Group 1, Class B (EMC requirements for elec-

standard)

measurement, control and laboratory use)

trical equipment for measurement, control and laboratory use)

Ma n u fa c tu re r / S ig n a tu re s
INFICON AG, Alte Landstraße 6, LI-9496 Balzers

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27 November 2020

27 November 2020

Dr. Christian Riesch
Head of Development

Paolo De Filippo
Product Manager(2020-11)37

Notes38

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Notestinb58e1(2020-11)39

Original: German tinb58d1 (2020-11)

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com