www . mksinst . com

Plasma & Reactive Gas
Solutions

SmartPower ® Intelligent
Microwave Power
Generator available 		in power levels of 1.8 and3 kW

SmartPower®
mODEL ax2500 sERIES 						iNTELLIGENT mICROWAVE pOWER GENERATORS
SmartPower® AX2500 Series intelligent microwave power generators are built on provenexperience in designing rugged, reliable microwave power generators for demanding
semiconductor fabrication and industrial applications. The compact AX2500 design
architecture incorporates field-proven technology, and combines new design features aimed
at improved performance and lower cost of ownership.
The SmartPower AX2500 Series consists of two models that cover a spectrum ofcontinuous microwave power from 180 W to 3 kW. Model AX2518 has maximum
performance of 1.8 kW and 3 kW for the AX2530. Frequency output is 2.455 GHz ±15 MHz.

Features & Benefits• Available in 1.8 and 3 kW power levels
for 200 and 300mm applications• Microprocessor-controlled filament
cutback extends magnetron tube 			lifetime. Field-replaceable magnetron 		tubes lower overall CoO• Accurate power measurement andfeedback ensures high repeatability• Compact, modular design enhancescross-platform compatibility

All generators share a common, modular architecture andaccurate power measurement, feedback and control forincreased process control and reproduceability. All models
have feedback-controlled power regulation of 0.1% of
output power (line and load) and ripple of <±1% of output
power. PrecisionPower™ technology (derived from MKS
patented SmartMatch™ intelligent microwave matchingunit) improves accuracy of power control to <±1.5% of
maximum power for increasing process consistency andyield. In addition, the PrecisionPower™ technology allows
magnetrons to be replaced in the field, substantiallyreducing cost of ownership.
The AX2500 Series SmartPower® control technology
monitors the generator’s operating system and provides
power shutdown protection and intelligent diagnostics. The
simple messages displayed on the SmartPower® generator
front panel give the user all the information needed tounderstand system status, reduce MTTR and ensure
maximum uptime.

SmartPowerPower Control Feedback

ACIsolator

DCPrecision
PowerDetectorµW
Magnetron
HeadµW

Radicals
PlasmaSourceMicrowave Plasma Subsystem

SmartMatch

Power Accuracy —SmartPower® generator microwave power accuracy during plasma
operation. Forward power within ±1.5% of maximum power. Tests performed
using AX7610 applicator. Reflected power minimized with SmartMatch toless than 1% in less than 2 sec.

Specifications
Overall Systems					Power Output					AX2518: 180 W to 1.8 kW						AX2530: 300 W to 3.0 kW

Frequency		
2440 - 2470 MHz
Regulation		
Better than 1% of output power (line and load)
Ripple		AX2518: ±1% of output power									AX2530: ±1% of output power
Output Accuracy					AX2518: ±1.5% (from 20-100% of max. power)				
AX2530: ±1.5% (from 20-100% of max. power)

Ambient Temperature		Up to 40°C maximum

Generator to Head Distance		

Up to 100 feet maximum

Microwave Connections		

WR284F waveguide with CPR284F flanges

Remote Control		Analog, RS485, DeviceNet™

AC Power Input		200/208 VAC ±10%, 3 phase, 50/60 Hz

Compliance		CE (option configuration), ETL, SEMI F47, SEMI S2-93A										Generator (AX2518PS, AX2530PS)
Size 		

7.0''H x 19''W x 23''L (178 x 483 x 584mm)

Cooling		Water, 1.5 gpm, 30°C maximum @ 30 psid minimum

Power Heads
AX2518RH, AX2530RH		

10''H x 7.62''W x 14.5''D (254 x 193.5 x 368.3mm)

Cooling		Water, air

Ordering Information
Please contact your local MKS sales office for price and availability information.

Dimensional Drawing —Note: Unless otherwise specified, dimensions are nominal values in inches.

SmartPower - 11/17		
© 2008-2017 MKS Instruments, Inc.
All rights reserved.

MKS Instruments, Inc.
Global Headquarters

MKS Instruments, Inc. 			
Plasma & Reactive Gas Solutions

2 Tech Drive, Suite 201
Andover, MA 01810

90 Industrial Way
Wilmington, MA 01887

Tel: 978.645.5500		
Tel: 800.227.8766 (in USA)
Web: www.mksinst.com

Tel:978.284.4000

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice.
mksinst™ and PrecisionPower™ are trademarks and SmartPower® and SmartMatch® are registered trademarks of MKS
Instruments, Inc., Andover, MA. DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL.