ICF70 2軸直線回転導入機
ICF70 2軸直線回転導入機

名称

チューブサポート付

片側チューブサポート付

ピンサー/チューブサポート

2軸直線回転導入機

2軸直線回転導入機

2軸直線回転導入機

MDG40-XXXX-YYYY-TSMD

MDG40-XXXX-YYYY-TSMDH

MDG40-XXXX-YYYYPGWMS(OMH)-TSMD

外観図

製品コード

仕様

MDG40-XXXX-YYYY

ストローク⾧(XXXX)

標準:100/150/200/250/300mm
特注:10 – 650mm

リトラクト⾧(YYYY)

標準:30mm
特注:22 – 200mm

直進力

23N

トルク

0.4Nm

許容加熱温度

最大200℃

圧力範囲

1E-11mbar – 1000mbar

構造材料

フルUHV適合材料【オプション＆アクセサリー】
PGWMS(OMH):±2°
ピンサー

PGWMSL(OMH):±2°
ロングピンサーPGWMS(CUST):
カスタマイズピンサー

ADOMO2:
オミクロンピンサーアダプター

ADOMS:オミクロンピンサーアダプター

ADMRL:
回転リミッターICF70 2軸直線回転導入機
名称

回転リミッター付
2軸直線回転導入機

回転リミッター/チューブサポート付
2軸直線回転導入機

回転リミッター/片側チューブサポート付
2軸直線回転導入機

MDG40(RL)-XXXX-YYYY

MDG40(RL)-XXXX-YYYY-TSMD

MDG40(RL)-XXXX-YYYY-TSMDH

外観図

製品コード

仕様

ストローク⾧ (XXXX)

標準:100/200/300/400/500mm
カスタマイズ:50 – 700mm

リトラクト⾧ (XXXX)

標準:30mm
カスタマイズ:10 – 250mm

直進力

30N

トルク

0.5Nm

許容加熱温度

200℃

圧力範囲

1E-11mbar – 1000mbar

構造材料

フルUHV適合材料【オプション＆アクセサリー】
PGWMS(OMH):±2°
ピンサー

PGWMSL(OMH):±2°
ロングピンサーPGWMS(OM):±8°
ピンサー

PGWMS(CUST):
カスタマイズピンサー

ADMRL:
回転リミッターretracted length (YYY standard = 30mm)
82

linear travel (XXX)stop rings, adjustable

26
55Specification

2:1

1:2

4

7
Massstab:to 12.2mm

32.8

71093

Detail A
Massstab:

6.8

linear travel +110.6mm

732

11A

bakeout temperature max. 150°C
He leak rate < 1.0 · 10-10 mbar
continuous rotation
torque 0.4 Nmlinear force 23 N

Material: .....

Dual Shaft Linear/ Rotary
Feedthrough DN40CF

630 100 300 1000
nominal over 1dimension up to 630 100 300 1000 2000
tolerance ± 0.05 0.1 0.3 0.5 0.8 1.2Scale

MDG

Ferrovac GmbHCH-8050 Zurich

THE INFORMATION CONTAINED IN
THIS DRAWING IS THE SOLE
PROPERTY OF FERROVAC GMBH.
ANY REPRODUCTION IN PART OR
AS WHOLE WITHOUT OURPERMISSION IS PROHIBITED.

1:1

Drawn
Date
Revisedvon Gunten
22.11.2010
.....

MDG40

sheet 1/1

retracted length (YYY standard = 30mm)

1182

linear travel (XXX)stop ring, adjustable

26

58Specification

2:1

1:2

47
Massstab:to 12.2mm

32.871093

Detail A
Massstab:

6.8

linear travel +110.6mm

73258

A

bakeout temperature max. 150°C
He leak rate < 1.0 · 10-10 mbar
continuous rotation
torque 0.4 Nmlinear force 23 N

Material: .....

Dual Shaft Linear/ Rotary
Feedthrough DN40CF with TSMD

630 100 300 1000
nominal over 1
dimension up to 6
30 100 300 1000 2000
tolerance ± 0.05 0.1 0.3 0.5 0.8 1.2

Scale

MDG

Ferrovac GmbHCH-8050 Zurich

THE INFORMATION CONTAINED IN
THIS DRAWING IS THE SOLE
PROPERTY OF FERROVAC GMBH.
ANY REPRODUCTION IN PART OR
AS WHOLE WITHOUT OURPERMISSION IS PROHIBITED.

1:1

Drawn
Date
Revisedvon Gunten
22.11.2010.....

MDG40-TSMD
sheet 1/1

retracted length (YYY standard = 30mm)

1182

linear travel (XXX)stop ring, adjustable

265858Specification

2:1

1:2

47
Massstab:to 12.2mm

32.8

71093

Detail A
Massstab:

6.8

linear travel +110.6mm

732

A

bakeout temperature max. 150°C
He leak rate < 1.0 · 10-10 mbar
continuous rotation
torque 0.4 Nmlinear force 23 N

Material: .....

Dual Shaft Linear/ Rotary
Feedthrough DN40CF with TSMDH

630 100 300 1000
nominal over 1dimension up to 630 100 300 1000 2000
tolerance ± 0.05 0.1 0.3 0.5 0.8 1.2Scale

MDG

Ferrovac GmbHCH-8050 Zurich

THE INFORMATION CONTAINED IN
THIS DRAWING IS THE SOLE
PROPERTY OF FERROVAC GMBH.
ANY REPRODUCTION IN PART OR
AS WHOLE WITHOUT OURPERMISSION IS PROHIBITED.

1:1

Drawn
Date
Revisedvon Gunten
22.11.2010.....

MDG40-TSMDH
sheet 1/1

retracted length (YYY standard = 57mm)

1182

linear travel (XXX)

420263258

stop ring, adjustable

58linear travel +110.6mm

PGWMS(OM)
TSMDSpecification
bakeout temperature max. 150°C
He leak rate < 1.0 · 10-10 mbar
continuous rotation
torque 0.4 Nmlinear force 23 N
Massstab:

1:2

Material: .....

Feedthrough MDG40 with Pincer
Grip PGWMS(OM) and TSMD

630 100 300 1000
nominal over 1
dimension up to 630 100 300 1000 2000
tolerance ± 0.05 0.1 0.3 0.5 0.8 1.2

Scale

MDG

Ferrovac GmbHCH-8050 Zurich

THE INFORMATION CONTAINED IN
THIS DRAWING IS THE SOLE
PROPERTY OF FERROVAC GMBH.
ANY REPRODUCTION IN PART OR
AS WHOLE WITHOUT OURPERMISSION IS PROHIBITED.

1:1

Drawn
DateRevisedvon Gunten
30.11.2010.....

MDG40-PGWMS(OM)-TSMD

sheet 1/1

retracted length (YYY standard = 57mm)

1182

linear travel (XXX)

4202632

stop ring, adjustable

5linear travel +110.6mm

PGWMS(OM)

Specification
bakeout temperature max. 150°C
He leak rate < 1.0 · 10-10 mbar
continuous rotation
torque 0.4 Nmlinear force 23 N
Massstab:

1:2

Material: .....

Feedthrough MDG40 with Pincer
Grip PGWMS(OM)

630 100 300 1000
nominal over 1
dimension up to 630 100 300 1000 2000
tolerance ± 0.05 0.1 0.3 0.5 0.8 1.2

Scale

MDGFerrovac GmbHCH-8050 Zurich

THE INFORMATION CONTAINED IN
THIS DRAWING IS THE SOLE
PROPERTY OF FERROVAC GMBH.
ANY REPRODUCTION IN PART OR
AS WHOLE WITHOUT OURPERMISSION IS PROHIBITED.

1:1

DrawnDate
Revisedvon Gunten
30.11.2010.....

MDG40-PGWMS(OM)
sheet 1/1

retracted length YYYY (standard = 30)
linear travel XXXX

9.5 -12.7

82

adjustable angle
3485

23.7

11A
M 4 (2x)

DN40CF

10.1
XXXX+110.6

7
2.5
0.5
0.1

32734.53A(2:1)

2Ra 0.8

Dual Shaft Linear/Rotary
Feedthrough DN40CF with Rotation
Lock
MDG40(RL)
CH-8050 Zurich(-0.1-0.2)

nominal30mm DIN ISO 2768-f-H
dimensions >30mm DIN ISO 2768-m-K excluding Sym./Runout

Material: ....

Ferrovac+0.2+0.1

THE INFORMATION CONTAINED IN THISDRAWING IS THE SOLE PROPERTY OF
FERROVAC. ANY REPRODUCTION
IN PART OR AS WHOLE WITHOUT OURPERMISSION IS PROHIBITED.

Sym./Runout >30mm DIN ISO 2768-H
formed part
DIN ISO 2768-f-H
dimensions

Scale

1:1
Rev.

B

Drawn
Date
Changedvon Gunten
22.11.2010
14.08.2023 CW

MDG40(RL)
A4 sheet 1/1