ArF Scanner

Employs the Proven Streamlign Platform
Delivers Enhanced Overlay Accuracy and Productivity

Employs the Proven Streamlign Platform
Delivers Enhanced Overlay Accuracy and Productivity
The NSR-S322F ArF scanner delivers enhanced overlay accuracy and productivity by employing the proven
Streamlign platform. The S322F meets the need for higher accuracy and stable volume
manufacturing at a customer site.

NSR-S322F

Performance
Resolution≦ 65 nmNA0.92

Exposure light source

ArF excimer laser (193 nm wavelength)

Reduction ratio

1:4Maximum exposure field

26 mm × 33 mmOverlay≦ 5 nm (MMO*1)≧ 230 wafers/hour (96 shots), ≧ 250 wafers/hour (96 shots)*2Throughput*1 Mix and Match Overlay: machine-to-machine overlay accuracy (NSR-S322F#1 to S322F#2)*2 When option is applied

Key Features of the Streamlign Platform• Bird’s Eye Control
Enabling superior yield• Hybrid encoder/interferometer system delivers optimal stage performance.
• Dramatically improves accuracy and stability• Provides superior focus control• Improved overlay capabilities of 2.0 nm or lessEncoder

Interferometer
Wafer Stage

Straight LineAuto-Focus• Stream Alignment
Enabling optimal affordability• Straight Line Auto-Focus generates a dense map of the wafer surface to enhance
focus control (using wider AF beam span).
Illumination Unit
• Enables increased alignment sites with minimal productivity impact using
Five-Eye FIA• Greatly reduces wafer overhead time
• Throughput capabilities of 230 WPH or more• Modular Structure
Enabling rapid production ramps• Simplifies maintenance by the modular design• Provides optimal uptime with modular design and individual components replacement• Extendible platform enables multigenerational use

Five-Eye FIAReticle Stage

Metrology Frame

2Projection Lens

Wafer Stage

CLASS 1 LASER PRODUCTWARNINGTO ENSURE CORRECT USAGE, READ MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.

The export of this product is controlled by Japanese Foreign Exchange and Foreign Trade Law and International export control regime. It shall not be exported withoutauthorization from the appropriate governmental authorities.
Performance and equipment are subject to change without any notice or obligation on the part ofthe manufacturer. Products and brand names are trademarks or registered trademarks of theirrespective companies. July 2024
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