Wafer Inspection System

OPTISTATION-3200/3100/3000

OPTISTATION-3200/3100

OPTISTATION-3000

Wafer Inspection System

OPTISTATION-3200/3100

The OPTISTATION-3200/3100 is equipped with Nikon's acclaimed CFI60-2 optics, producing clear images with high contrast
and minimal flare.

Key Features• Equipped with Nikon's proprietary CFI60-2 optics toproduce clear images with high contrast and minimal flare.
The darkfield signal-to-background ratio is three times
higher than with conventional Nikon optics, ensuringsignificantly better imaging.
• Nikon's acclaimed wide illuminator (WIL) and line
illuminator (LIL) enable macro inspections under idealconditions.
• State-of-the-art image processing and analysis technology
enables highly accurate review inspections.

• Flexibility in load port positioning allows theOPTISTATION-3200/3100 to meet a variety of layouts
and requirements of factory automation handling 300 mmwafers. OHT and other automatic transfer systems aresupported too.
• Optimal recipe conditions are simply created by an easily
accessible touch-screen. According to specifications ofobjective lens and wafer that is inspected, optimal
observation settings, including aperture and light intensity
can be set in advance.

Wafer Inspection SystemOPTISTATION-3000

The OPTISTATION is a wafer inspection system that enables simple and speedy manual visual inspection of 300 mm wafers.
It contributes to dramatic increases in yields as an inline inspection system and analysis tool for R&D defect analysis.

Key Features• The OPTISTATION-3000 inherits a system that boasts thehigh system stability and high-transfer rate, proven in front
end process, of the OPTISTATION-3200/3100.
The system provides the highest system reliability in its
class, using a safety design that complies with SEMIstandards.
• In addition to macro surface inspection, the system comesstandard with edge inspection and the center of wafer backsides. The control of rotation speed and tilt angle during
macro inspection can be manually adjusted from thedefault position using a joystick.

•E quipped with Nikon's proprietary CFI60-2 optics toproduce clear images with high contrast and minimal flare.
The system comes standard with extra-long working
distance lens and this suppresses image skipping whenswitching objectives from low to high magnification,enabling the system to deliver superior operatability andstability, combined with high resolution.
• Loading a 200 mm cassette adapter enables the combinedtransfer of 200-300 mm wafers on a single unit. There isno need for bothersome adjustments when making inchsize changes thanks to the load port's auto recognition ofcassettes and the design of two-size shared parts. System
uptime is thereby dramatically improved.

Specifications• OPTISTATION-3200: 2 load port/300 mm wafer (200 mm wafer: option)• OPTISTATION-3100: 1 load port/300 mm wafer (200 mm wafer: option)• OPTISTATION-3000: 1 load port/300 mm wafer or 200 mm wafer

WARNINGTO ENSURE CORRECT USAGE, READ MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.

The export of this product is controlled by Japanese Foreign Exchange and Foreign Trade Law and International export control regime. It shall not be exported withoutauthorization from the appropriate governmental authorities.
Performance and equipment are subject to change without any notice or obligation on the part ofthe manufacturer. Products and brand names are trademarks or registered trademarks of theirrespective companies. July 2024
©2024 NIKON CORPORATION

https://www.nikon.com/business/semi/

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