Alignment for
Optics & Silicon Photonics
F A S T M U LT I - C H A N N E L P H O T O N I C A L I G N M E N T S Y S T E M

W W W. P I . W S

Silicon Photonics (SiP)

The rapid advent of Silicon Photonics offers promise for bandwidth, efficiency andextensibility, and it presents many challenges for test and packaging processes.
Key among these is the need to align fiber optic devices to optimize opticalthroughput before testing or packaging can begin. Simple economics necessitates
fast throughput in this unpredictable nanoscale-accurate step. Silicon photonics
devices often need alignments in multiple degrees of freedom across more than
one input or output coupling, and these can interact, presenting moving targets.

PROBINGCHIP TEST

Sometimes, getting exactly the right coupling can be tricky and time-consuming.
Clearly, manual approaches are not scalable over the volume demands SiP devices
are enjoying. Even automated solutions can require lengthy iterative loops that killtest and packaging economics.

PI can make this a quick process, ensuring
against the wasteful packaging of product that acquires damage during multiple
packaging steps. Custom, embeddable
configurations are welcome.

PI’s alignment automation options provide exacting optimization using a deep
toolkit of firmware-based algorithms. PI’s unique, fully parallel technology can
optimize multiple degrees of freedom, multiple inputs and outputs across multiple
channels, or even multiple devices all at once. PI hexapod-based solutions offer afreely selectable pivot point, so you can optimize by rotating about a beam waist,
focal point or optical axis for further efficiencies.

WAFER TEST
On-wafer photonic device testing is essential to ensure against faulty devices proceeding through the costly packaging
process. Today’s silicon photonics devices
are more complex than ever, with multiple inputs and outputs that often interact, multiple channels, and alignmentsthat must be optimized across multiple
degrees of freedom in order for tests toproceed.

Cascade Microtech’s pioneering CM300
photonics-enabled engineering wafer proberintegrates PI’s Fast Multi-Channel Photonics
Alignment systems for high throughput,
wafer-safe, nano-precision optical probingof on-wafer Silicon Photonics devices.
Photo courtesy Cascade Microtech div. ofFormfactor, Inc.

2

W W W. P I . W SPackaging

PI’s deep industrial alignment toolkit includes all you need to address your test and production needs, including the world’s mostcomprehensive line of photonics-focused mechanisms and controls. For example, make quick work of the multichannel optimizations; perform parallel optimization of multiple elements; quickly optimize in all degrees of freedom— all key capabilities for today’scomplex and tightly-packed photonic devices! This optimization can be continuous, tracking minute dimensional changes during
burn-in and compensating for curing stresses and other drift processes.

ARRAY DEVICE ALIGNMENTArray devices and others with angular optimization formerly required timeconsuming, sequential optimizations. For example, theta-Z alignments could only
be performed stepwise, with an XY optimization in between steps. This rendered
the overall alignment very time-consuming. And time is money, especially today.
PI addresses this through parallelism, a unique new capability. In the theta-Z
example just mentioned, the lengthy loop of stepwise iterations in XY, then theta-Z,
then XY, and so on, is replaced with a one-step optimization of both at the sametime. Additional angular optimizations and (in the case of a waisted coupling)
Z optimization can be performed at the same time too, allowing a one-step global
optimization, and tracking too.
The resulting, typically 1-2 order of magnitude improvement in test and packaging
throughput has a profound impact on process economics.
PI products come standard with a wealth of analog interfaces for connection to
one or more PI optical power meters or other high-speed optical metrology instruments and sensors, including embedded sensors. Additional analog resources canbe specified as needed. This means array devices can be optimized by aligning
the two outermost elements or by balancing the coupling of multiple additional
channels. Either way, alignment is as fast and accurate as you would expect fromPI, the world leader in NanoAutomation®.
3

MOTION|POSITIONING

Basics of PI’s Unique Fast Multi-Channel
Photonic Alignment (FMPA)COMPREHENSIVE SOFTWARESTACK ENABLES EASY INTEGRATIONAND USE
Start with quick set-up, exploration and ease of use with
PIMikroMove. Proceed to productivity with useful, opensource graphical applications examples that include scriptability for fast construction of test executives using virtually
any language. Rapidly construct custom applications using
PI libraries and samples for popular platforms including C++,
C#, MATLAB, Python and LabVIEW on Windows, Linux andmacOS. 100% ASCII communications ensures compatibility
with legacy fab computers.

OutputInput

OutputTesting and packaging today’s photonic devices can be amulti-degree-of-freedom challenge and a moving target.
PI’s industrial-class solutions help you make it a fast, reproducible, one-step process.

Input
opticalpath
optical
path
yo

yi
xo

yo
xo

zo

zo

zi

zi

yi
xi

xi
■ misaligned optical path
■ ideal optical path■ misaligned optical path
■ ideal optical path

GROUNDBREAKING BUILT-IN ROUTINES FOR FASTEST PEAK FINDING
Built-in routines enable extremely high alignment speed.
The algorithms for first light, area scan, and gradient scanroutines are extraordinarily fast and reliable for all kind of
couplings. They offer process time of less than 1 second
for aligning input and output simultaneously. PI algorithms even include automatic modeling of scan data toaccurately localize the optimum even in fast, coarse scans.
This includes the ability to rapidly localize the centroidof top-hat couplings – another PI world exclusive.
4

W W W. P I . W SAutomated Alignment is
the Key to High Throughput
and Outstanding Quality

The key component of the alignment systems is PI’s NanoCube®, a highly dynamic, closed-loop XYZ piezo scanner.
It is so compact yet yields 100 x 100 x 100 µm travel withnanoscale repeatability and extreme speed. With a completely
wear-free working principle, it makes even the most complicated coupling optimizations possible in typically a few
hundred milliseconds. The integrated optical encoder offers
the highest bandwidth and resolution for this high-dynamic
application. Closed-loop operation helps ensure device
safety and process repeatability.

PI hexapods offer all 6 degrees of freedom, namely 3 linear
and 3 rotational axes, combined into parallel kinematics. A
further advantage of the hexapod is the user-definable pivot
point that enables rotation directly around the fiber tip and if
required, also allows any other point of rotation.

Either stacked linear axes or hexapods can be used for
positioning or scanning larger areas. In the case of stacked
systems, a lot of value was placed on robustness and stiffness. All linear axes are equipped with position sensors andare connected to each other by very stiff brackets. Highquality components and a solid design guarantee reliability
and a long lifetime.

5

MOTION|POSITIONING

First Light Scan

In order to determine the global maximum of a signal, it
is necessary to make an intensity signal available to thecontroller that can be optimized. The built-in firmware
algorithms provide all convenient and fast searching for‘first light’. To ensure extremely fast success for firstlight searching, it is possible to combine several areascan routines for this scan, which can be performed
simultaneously.
This can be performed quickly and reliably even for doublesided tasks, where both sides need to be coupled at
the same time; the firmware-based algorithms run fully
automatically and simultaneously until the predefined
threshold value has been reached or the entire area has
been scanned.

All axes, irrespective of whether they are coarse or fine axes, can be used and configured according to their dynamics. For example,
the transmitter side can perform highly dynamic area scans, during which, the receiver side moves slowly but continuously. Therefore,
the entire transmitter side is scanned for each and every position on the receiver side. It is also possible to set whether scanningstops as soon as the defined threshold value has been reached or whether the entire area of both sides should be examined.
6

W W W. P I . W S

Area Scan Routines

The FMPA system offers 3 different routines for an area scan. The
spiral scan with constant angular velocity, the spiral scan with constant path velocity, and the sinusoidal area scan. All routines can be
configured individually and therefore optimized for the respective
application case. Several scan routines can also be started simultaneously with a single command. It is possible to calculate theapproximate maximum using a Gauss function or by determining
the centroid.
In the case of the sinusoidal scan routine the defined surface isscanned continuously without strong acceleration or deceleration
phases. Surface, starting point, line distance, and success criteria
can be defined by the user.
In the case of the spiral scan routine, a defined area is scanned
helically, whereby either a constant angle or a constant path velocity is maintained. The advantage of spiral scanning at a constantfrequency is the ability to avoid system resonance. This ensures
successful scanning. The advantage of spiral scanning at a constantpath velocity is the ability to reduce the scanning duration in thecase of lower system dynamics. Application-specific configurationof the routine is also possible here.

Gradient Search Routines
Ground-breaking results can be achieved with the unique implementation of this algorithm. If the light signal ispresent, this gradient search makes it possible to find the signal maximum in less than 1 second even in the caseof double-sided tasks. It is also possible to run several searches at the same time and therefore optimize thesignal simultaneously in several degrees of freedom. The routine allows excellent „tracking“ and therefore it ispossible to compensate any drift effects. Several parameters are also available here for optimizing the search
for the respective application case.

7

MOTION|POSITIONINGPIMikroMove

PIMikroMove gives you the option to control axes, perform (manual)tuning as well as record data from the controller in real time, display
the data graphically and also analyze the data. Furthermore, it is also
possible to access all controller algorithms and parametrize them conveniently; this also includes the fast alignment routines.
A live display of the analog inputs (incl. floating chart) as well as a 3-Dview of optical distribution of the scanned area is particularly interesting
for alignment tasks. Of course, it is also possible to export the data(.csv). Various tools are available for realtime data analysis, triggering,
configuration, and much more.

PIMikroMove does not only offer the possibility ofanalyzing the dynamic properties of the PI axes, but
can even perform an evaluation of the overall systemwith the help of an FFT analysis of the optical signal.

PIMikroMove application for Windows provides quick access to motion & scanning across all PI products regardlessof drive technology, controller type, no. of axes etc. Includes software-based scan & align routines which work withall available PI motion controllers and access to all available firmware-based fast alignment algorithms.

8

W W W. P I . W S

Available Programming Languages

Ready-to-use LabVIEW sample application that provides
fast access to controller-based alignment routines as well
as visualization and system analysis.

User-friendly, platform-independent application
development libraries and sample applications foreasy, fast, and flexible implementationn

Libraries for C++, C#, VB.net, etc.

nPythonn

LabVIEWn

MatLab

Available for Windows, Linux and OS X deployment.
Universal Command Set (GCS) simplifies commissioning and programming. Supports PI controllers’built-in, ultrafast, and vibration-free scan/alignalgorithms. It is also possible to access the entire
command set, including the fast alignment routines
in the controller, in order to parameterize and execute them. This makes it possible for customers
to integrate PI controllers into their own software
solutions quickly and easily.
Python sample code

9

MOTION|POSITIONING

Product Overview

All axes are controlled by sophisticated digital controllers that have been tried and tested over many years. There are both compact
devices and modular systems in 19” design for various drive systems, for example, the NanoCube® piezo components and thestacked DC motor axes. The high-performance controllers, such as the E-712 used for the FMPA systems have enough computing
power to process the complex algorithms of the scan routines within milliseconds and also correspondingly command the axes
connected. This dispenses with the usual slow communication with a host PC. The user only needs to send a start command andthe rest is performed automatically and extremely fast by the controller itself. Convenient software is provided for defining andstarting the scan routines, and for visualizing the results. There is also a software toolbox for all common programming languages.

n Up to 50 kHz servo update raten Highly stable 20-bit D/A convertern Real-time operating system for excellent trajectory control
n Flexible interfaces: Ethernet, USB, RS-232
n Optional high-bandwidth analog inputs and outputs

E-712

n

Easy configuration and start-upnModular design for versatile expansionnEfficient communication with the controller modulesnGreatly reduced wiring effortn

Saves space and costs

C-885n	Hexapod controller using vector algorithms,

virtual pivot pointn	Commanding in Cartesian coordinatesn	Changes of the reference system with a simple commandn	
TCP/IP and optional analog interfaces, motion stop

C-887

10

W W W. P I . W Sn	
Parallel-kinematic design for thehighest stiffness in all spatial directionsn	Highly dynamic motion due to high resonant

frequencies even with loads up to 30 g

P-616

n	
Innovative product design for flexible use due tosingle mounting platformn	
Travel range 25 mmn	Integrated optical encoder for reliable and safe operationn	Recirculating ballscrew drives provide high speeds andlong lifetimesn	Max. velocity 20 mm/s

M-122

n	
Travel ranges to 230 mmn	Velocity up to 0.5 m/ sn	Absolute encoder with 1 nm resolutionn	
Excellent guiding accuracy

V-551

n	
Compact design with 160 mm widthn	Only 45 mm widen	Push force 8 Nn	Incremental sensors with position resolution 1 nm

(optional)n	
XY combinations without adapter plate possiblen	Velocity 10 mm/s

Q-545

11

MOTION|POSITIONING

Product OverviewnSpaceFAB offering six degrees of freedomn	±7 mm travel range in X and Y, and ±5 mm in Zn	
±7° rotation range in θX, θY, and ±8° in θZn	
10 N load capacity, center mountedn	
Self-locking, no heat generation at rest

Q-845

n	
Six axes micro positioning systemn	Compact, low profile systemn	Travel ranges linear 50 x 50 x 12.7 mmn	
Travel ranges rotation Rx, Ry, Rz 10°n	Load capacity 1 kg center mountedn	
Pivot point can be set by the customer

SF-3000n	Six-axis microrobotics systemn	Dimensions in reference position 80 mm × 73 mm × 48 mmn	Linear travel ranges to 12 mm x 12 mm x 6 mmn	Rotary travel ranges to 14° x 15° x 40°n	
1 nm sensor resolution

Q-821

12

W W W. P I . W Sn	Fast and highly precise hexapod

for six degrees of freedomn	Parallel-kinematic design for compactness

and stiffnessn	Ideal for applications in silicon photonicsn	Position sensors for high accuracy andoperational reliabilitynIntegrated automated scan routines
H-811

n	
Fast and highly precise Hexapod forsix degrees of freedomn	Parallel-kinematic design for compactness

and stiffnessn	Removable magnetic mountn	
Actuator resolution 10 nmn	Integrated automated scan routinesn	Ideal for optical alignment applications

H-811

n

Hexapod with flexure jointsn	Includes integrated scan algorithms

for fiber optic alignmentn	Actuator resolution 33 nmn	
Repeatability 0.3 µm / 6 µradn	Min. incremental motion 0.1 µm / 2 µradn	Velocity from 10 µm/s to 10 mm/s

H-206

13

MOTION|POSITIONINGFast Multi-Channel Photonic Alignment System
Stacked Multi-Axis System for Aligning Fibers and Optical Components

F-712.MA1 / F-712.MA2n	Integrated scan routines for fiber optic alignmentn

Ideal for applications in silicon photonics

nExtensive software packagenDirect detection of the optical signaln	
Position sensors for high accuracy and operational reliabilitynAutomatic alignment of several fibers in <1 s

Fast and high-precision drives

Extensive software package

The basis of the optical alignment system is a very stiff XYZ
set-up consisting of three motorized linear stages and a P-616
NanoCube® nanopositioner. The low overall height simplifies
integration in limited installation space. The motorized drives
make longer travel ranges possible and at the same time, the
NanoCube® nanopositioner ensures fast scanning motion anddynamic compensation of drift effects. Flexure guides and allceramic insulated PICMA® actuators guarantee a long lifetime.
Because all drives are equipped with position sensors, it is possible for example, to reliably prevent collisions with expensive
silicon wafers.

The software package supplied in the scope of delivery allows
integration of the system into virtually any environment. All
common operating systems such as Windows, Linux, and OS X
as well as a large number of common programming languages
including MATLAB and LabVIEW are supported. Thanks tosophisticated program examples and the use of software tools
such as PIMikroMove, the time between starting integrating andproductive operation is shortened considerably.

High-performance scan routines
The sophisticated scan routines are integrated directly into thecontroller. The performance is improved considerably and integration simplified. The system can manage all tasks in the fieldof fiber alignment. For example, double-sided systems allow
simultaneous alignment of the transmitter and receiver.

High-resolution analog input
The controller receives the optical intensity signal directly via ahigh-resolution analog input. Complex set-ups with cameras are
not necessary. Various distribution functions are available fordetermining the maximum intensity.
Fields of application
Alignment of optical components, automatic wafer tests, assembling technology in silicon photonics.

14

W W W. P I . W SPreliminary data

F-712.MA1 / F-712.MA2

Unit

Motion and positioning
Rough positioning
Active axes
Travel range in X, Y, Z

X, Y, Z25, 25, 25

mm

Minimum incremental motion

3µm

Max. velocity

20

mm/s

Sensor type

Rotary encoder

Guiding
Drive type

Crossed roller guides
DC motor

Fine positioning
Active axes

X, Y, Z

Closed-loop travel in X, Y, Z

100

µm

Min. incremental motion,
open-loop

0.3

nmMin. incremental motion,
closed-loop

2.5

nm

Linearity error, for the entire
travel range**

2

%

2

nm

Repeatability (bidirectional)
10 % travel range
Sensor type
Drive type

Incremental
PICMA®

Alignment
Alignment time area scan
100 µm x 100 µm(max. deviation of peakintensity 0.02 dB)***<0.5 / <1s

Alignment time gradientsearch, randomized with ±5µm (repeatability <0.01 dB)***<0.5 / <1sOperating temperature range,mechanics–20 to 65°C

Operating temperature range,
controller

5 to 40°C

3m

Requirements for the photometer used

Unit

Miscellaneous

Cable length

Output signal
Output voltage range, max.

Analog output, ideally converted from linear to logarithmic–5 to 5

V

Bandwidth, min.

1

kHz

Noise level, max.

–60

dBm

Technical data specified at 20±3 °C.
* Without polynomial linearization** Attainment of the global maximum after first light has been found

MOTIONAsk about custom designs!

|

POSITIONING

15
71

Fast Multi-Channel Photonic Alignment System
System with 6 Degrees of Freedom for Aligning Fibers and Optical Components

F-712.HA1 / F-712.HA2nIntegrated scan routines for fiber optic alignmentn

Ideal for applications in silicon photonics

nExtensive software packagenDirect detection of the optical signaln	
Position sensors for high accuracy and operational reliabilityn	Automatic alignment of several fibers in <1 s

Fast and high-precision drives

Extensive software package

The basis of the fiber alignment system is a very stiff set-up
consisting of the H-811 hexapod and P-616 NanoCube® nanopositioner. The parallel-kinematic design for motion in six degrees of freedom ensures high system stiffness. The motorized
drives make longer travel ranges possible and at the sametime, the NanoCube ® nanopositioner ensures fast scanningmotion and dynamic compensation of drift effects. Flexure
guides and all-ceramic insulated PICMA® actuators guarantee
a long lifetime. Because all drives are equipped with position
sensors, it is possible for example, to reliably prevent collisions
with expensive silicon wafers.

The software package supplied in the scope of delivery allows
integration of the system into virtually any environment. All
common operating systems such as Windows, Linux, and OS X
as well as a large number of common programming languages
including MATLAB and LabVIEW are supported. Thanks tosophisticated program examples and the use of software tools
such as PIMikroMove, the time between starting integrating andproductive operation is shortened considerably.

High-performance scan routines
The sophisticated scan routines are integrated directly into thecontroller. The performance is improved considerably and integration simplified. The system can manage all tasks in the fieldof fiber alignment. For example, double-sided systems allow
simultaneous alignment of the transmitter and receiver.

High-resolution analog input
The controller receives the optical intensity signal directly via ahigh-resolution analog input. Complex set-ups with cameras are
not necessary. Various distribution functions are available fordetermining the maximum intensity.
Fields of application
Alignment of optical components, automatic wafer tests, assembling technology in silicon photonics.

16

W W W. P I . W SPreliminary data

F-712.HA1 / F-712.HA2

Unit

Motion and positioning
Rough positioning
Active axes

X, Y, Z, θX, θY, θZ

Travel range in X, Y, Z

±6.5, ±16, ±8.5*mm

Travel range in θX, θY, θZ±14.5, ±10, ±10*°

Minimum incremental motion

0.1

µm

Max. velocity

10

mm/s

Sensor type

Rotary encoder

Guiding
Drive type–
Brushless DC motor

Fine positioning
Active axes

X, Y, Z

Closed-loop travel in X, Y, Z

100

µm

Min. incremental motion,
open-loop

0.3

nmMin. incremental motion,
closed-loop

2.5

nm

Linearity error, for the entire
travel range**2%

Repeatability (bidirectional)
10 % travel range

2

nm

Sensor type
Drive type

Incremental
PICMA®

Alignment
Alignment time area scan
100 µm x 100 µm(max. deviation of peakintensity 0.02 dB)***<0.5 / <1s

Alignment time gradientsearch, randomized with ±5 µm(repeatability <0.01 dB)***<0.5 / <1sOperating temperature
range, mechanics

0 to 50°C

Operating temperature
range, controller

5 to 40°C

2m

Requirements for the photometer used

Unit

Miscellaneous

Cable length

Output signal
Output voltage range, max.

Analog output, ideally converted from linear to logarithmic–5 to 5

V

Bandwidth, min.

1

kHz

Noise level, max.

–60

dBm

Technical data specified at 20±3 °C.
*
The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis
in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
See the dimensional drawings for the default coordinate system and pivot point coordinates of the hexapod.
Changing the pivot point will reduce the travel range in θX, θY, θZ. Changing the orientation of the coordinate system(e.g., when the optical axis is to be the Z axis), will change the travel range in X, Y, and Z.
** Without polynomial linearization*** Reaching the global maximum after first light has been found

MOTION|POSITIONING

Ask about custom designs!

1769

Fast Multi-Channel Photonics Alignment System
System with 6 Degrees of Freedom for Aligning Fibers and Optical Components

F-712.HU1nIntegrated scan routines for fiber optic alignmentn

Ideal for applications in silicon photonics

nExtensive software packagenDirect detection of the optical signaln	
Position sensors for high accuracy and operational reliabilitynAutomatic alignment of several fibers in <1 s

Fast and high-precision drives

Extensive software package

The basis of the fiber alignment system is a very stiff set-up
with an H-811 hexapod and a P-616 NanoCube® nanopositioner.
The parallel-kinematic design for motion in six degrees of
freedom ensures high system stiffness. The motorized drives
make long travel ranges possible and at the same time, the
NanoCube® nanopositioner allows fast scanning motion und
dynamic compensation of drift effects. Flexure guides and allceramic PICMA® actuators guarantee a long lifetime. Because
all drives are equipped with position sensors, the system works
precisely and reliable with high repeatability.

The software package supplied in the scope of delivery allows
integration of the system into virtually any environment. All
common operating systems such as Windows, Linux, and OS X
as well as a large number of common programming languages
including MATLAB and LabVIEW are supported. Thanks tosophisticated program examples and the use of software tools
such as PIMikroMove, the time between starting integrating andproductive operation is shortened considerably.

High-performance scan routines
The sophisticated scan routines are integrated directly into thecontroller, which considerably improves the performance andsimplifies integration. The system can manage all tasks in thefield of fiber alignment. The integrated rotational scans enablefiber arrays to be optimized on all channels very easily.

High-resolution analog input
The controller receives the optical intensity signal directly via ahigh-resolution analog input. Complex set-ups with cameras are
not necessary. Various distribution functions are available fordetermining the maximum intensity.
Application fields
Alignment of optical components and parts, assembling technology in silicon photonics, packaging.

18

W W W. P I . W SPreliminary data

F-712.HU1

Unit

Motion and positioning
Rough positioning
Active axes

X, Y, Z, θX, θY, θZ

Travel range in X, Y, Z

±17, ±16, ±6.5*mm

Travel range in θX, θY, θZ±10, ±10, ±21*°

Minimum incremental motionin X, Y

0.1

µm

Minimum incremental motion
in Z

0.05

µm

Max. velocity

10

mm/s

Sensor type

Incremental rotary encoder

Drive type

Brushless DC motor

Fine positioning
Active axes

X, Y, Z

Closed-loop travel in X, Y, Z

100

µm

Min. incremental motion,
open-loop

0.3

nmMin. incremental motion,
closed-loop

2.5

nm

Linearity error, for the entire
travel range**2%

Repeatability (bidirectional)
10 % travel range

2

nm

Sensor type
Drive type

Incremental linear encoder
PICMA®

Alignment
Alignment time area scan
100 µm x 100 µ(max. deviation of peakintensity 0.02 dB)***

<0.5

s

Alignment time gradientsearch, randomized
with ±5 µm (repeatability<0.01 dB)***

<0.5

s

Operating temperature range,mechanics

0 to 50°C

Operating temperature range,
controller

5 to 40°C

2m

Requirements for the photometer used

Unit

Miscellaneous

Cable length

Output signal
Output voltage range, max.

Analog output, ideally converted from linear to logarithmic–5 to 5

V

Bandwidth, min.

1

kHz

Noise level, max.

–60

dBm

Technical data specified at 20±3 °C.
*
The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in thistable shows its maximum travel range, where all other axes and the pivot point are at the reference position.
See the dimensional drawings for the default coordinate system and pivot point coordinates of the hexapod.
Changing the pivot point will reduce the travel range in θX, θY, θZ. Changing the orientation of the coordinate system(e.g., when the optical axis is to be the Z axis), will change the travel range in X, Y, and Z.
**
Without polynomial linearization***
Reaching the global maximum after first light has been found

MOTION|POSITIONING

19
73

Photometer
Ideal for applications in silicon photonics

F-712.PM1nLarge signal bandwidth of 20 kHznHigh dynamic rangenWavelength range 400 to 1550 nmnCurrent input range 1 pA to 1 mAnLogarithmic output

Product Overview
This photometer can convert an optical signal into a voltage
signal in high resolution and with an extremely high bandwidth.
The design of the optical input enables measuring of the optical signal independent of the position of the optical fiber in theconnector. The device also has a current input. For example, aphotodiode can be connected to this input and the diode current
converted into a logarithmic voltage signal. Switching between
the inputs is done via a pushbutton; an LED indicates the state.
The large wavelength range of the photometer enables working
without switching in the visible and infrared range. The precise,logarithmical output signal is ideal for optical alignment systems.
The photometer is therefore suitable for the fastest fully automatic alignment systems available on the market.

20

W W W. P I . W SPreliminary data

F-712.PM1

Unit

400 to 1550*

nm

Optical input
Wavelength range
Connectors
Polarization dependence

FC/PC, FC/APC
None

Minimum input power
at 1550 nm

85nW

Maximum input power
at 1550 nm

85mW

Average noise at 1550 nm

<10

nW

Current input
Connectors

BNC

Minimum input current

1

pA

Maximum input current

1

mA

<120

pA

Average noise
OutputConnectors
Output signal
Voltage range

BNC
Analog, logarithmic–5 to 5

V

Bandwidth (3dB)

20

kHz

Logarithmic increase1

V/10 dB

Output voltage
at 85 mW, 1550 nm

~+5**

V

Output voltage
at 85 nW, 1550 nm~-1.2**V+5

V

Output voltage
at 1 mA input current
Miscellaneous
Operating voltage

12

V

Power consumption

2.4

W

Overall mass

0.6

kg

* Sensitivity distribution device specific. Individual measurement report in scope of delivery.
** Measurement report in scope of delivery.

MOTION|POSITIONING

21

Compact Positioning and Scanning Stages

PI offers a broad portfolio of drive technologies, stages, andmulti-axis assemblies suitable for photonics packaging applications. PI motion controllers are capable of executing alignment
algorithms independently of the stage and its drive technology.

Parallel-kinematic piezo hexapod for fast scanning in 6 degrees
of freedom.
n	
Six DoF nanopositioning system with parallel-kinematic

design for best motion performancen	
Load capacity 50 gn	Strain gauge sensors

P-915

n	
Smallest 6 DoF system available with 200 µm traveln	Perfectly adapted for beamline experiments, complex optical

positioning or alignment tasks

XY, XYZ assemblies, and XYZ assemblies with rotary axis, compact
positioning stages with DC motors and gearbox or stepper motors.
Compact stages for precision alignment tasks.
n	Travel range 13 to 25 mmn	Unidirectional repeatability to 0.1 µmn	Velocity to 2 mm/s (20 mm/s with direct drive)n	
Load capacity to 3 kgn	
Integrated reference point and limit switch

Linear stage with small width and stepper motor: Classical technology at an affordable price.
n	Travel range 13 mmn	
Unidirectional repeatability to 0.5 µmn	Velocity to 5 mm/s

L-402

n	
Load capacity to 1 kgn	Integrated reference point and limit switch

22

W W W. P I . W SHigh-dynamic scanners with magnetic direct drives can be easily
assembled to fast XY and XYZ combinations.
n	
Voice coil technology enables fast scanning with travel

ranges to 25 mm with a small sizen	Long-range travel for loading/unloading can be achieved

with magnetic linear or torque motorsn	Magnetic direct-drive motors provide a frictionless drive

principle for 24/7 operation at high duty cycles

PILine® Piezo motor technology: High velocity and fast start/stop
behavior for fast scanning linear and rotary stages.
n	Drive torque 5 to 25 mNmn	
Self locking when switched off: Saves energy and reduces

generation of heatn Unlimited rotation range >360°
n Positions small loads quickly and with precision: Velocity to 720 °/s
n Minimum incremental motion from 51 to 525 µrad

5-axis set-up with piezo motor technology: Proprietary technology portfolio for space-saving alignment tasks:n	
PILine® XY scanner for fast scanning and point-to-point

motionn	Q-Motion goniometers for angular adjustment with a sizeof 45 x 45 mm²n	High-stability PiezoWalk® drives for vertical motion

with nanometer precision and load capacity to 2.5 kg

The smallest possible piezo motors are used in Q-Motion® piezoelectric inertia drives that feature nanometer precision with direct
measuring encoders and sizes down to 20 x 20 mm². Q-Motion ®
stages are available as linear stages, rotary stages, goniometers,
and parallel-kinematic SpaceFABs.
n	Linear travel range to 32 mm,n	Unidirectional repeatability to 40 nmn	Velocity to 10 mm/sn	Load capacity to 1 kg

Q-821

n	
Integrated incremental direct-measuring encoders

MOTION23|

POSITIONING

Stage Assemblies and Engineered Systemsn	A-322: Ideal for scanning applications

or high-precision positioningn	Clean room compatiblen	Travel ranges to 500 mm × 1000 mmn	Load capacity to 245 Nn	Resolution to 1 nm
n	Velocity up to 2 m/s

Synchrotron application: Customized parallel-kinematic design
for six motion axes (SpaceFAB)n	High load capacity up to 250 kgn	Asymmetrical with long travel ranges so thata sample can be moved into an X-rayn	Designed for use in ion radiation

Special design for theta:n	2-theta scanner that carries detectors for theincident and reflected beamn	The module can be integrated into andis fully functional in a vacuum chambern	Specialty: Use of radiation-resistant,magnetic encoders because the experimentis sensitive to light24

W W W. P I . W Sn	Very stiff and low vibration constructionn	Integrated camera holder for opticalinspection of lenses

Gantries are normally equipped with linear motors. Travel rangesof up to 2 meters in XY are possible. If preferred, DC or stepper motors can be used for the Z axis. If nanometer precision isrequired, piezo actuators take care of dynamic fine adjustment.

n	Single-source suppliern	Industrial interfacesn	Integrated solutionsn	Assembly and inspection systemsn	Parallel kinematicsn	Ethercat

This system for the automated assembly and alignment of the
optical fibers on a silicon photonic chip integrates several hardware components and software, such as pick-and-place robot
technology, image processing, or devices for precision positioning.

25

MOTION|POSITIONING

The PI Group Milestones
A Success Story

Well known for the high quality of its
products, PI (Physik Instrumente) has
been one of the leading players in the
global market for precision positioning
technology for many years. PI has beendeveloping and manufacturing standard

and OEM products with piezo or motor
drives for more than 40 years. In addition
to four locations in Germany, the PI Groupis represented internationally by fifteen
sales and service subsidiaries. All of ourcustomers worldwide can rely on this.

Market introductionof PILine® ultrasonicpiezomotors

Foundation of PI Ceramicin Thuringia, Germany,
cornerstone for market
leadership in nanopositioning technology
Founding year
of PI

2001

1998

1994

1993

1992

Market introduction of capacitive
position sensors, implementationin piezo-based nanopositioning
systems

1991

1987

1970

Market introductionof six-axis parallelkinematic positioning
systems (Hexapods)

Market introductionof digital
control electronics
Newsubsidiaryin the USA

New
subsidiaryin Japan

New subsidiaries
in Great Britain
and France

26

W W W. P I . W S

Newsubsidiary
in Italy

Market introductionof the PICMA®
multilayer piezo
actuators

2015

2016

Market introductionof the magnetic
PIMag® direct drives

Acquisition ofmajority sharesin ACS Motion
Control

2014

Acquisitionof majority sharesin miCos GmbH,
Eschbach, Germany

Introductionof air bearings

2011

Market introductionof the NEXLINE®
high-performancepiezo linear drives

2002

2004

2007

Acquisitionof Nelson
Air Corp., USA

Market introductionof Q-Motion®
and PiezoMikes

Market introductionof NEXACT®
piezo linear drivesNew
subsidiaryin China

New subsidiaries
in Korea andSingapore

New subsidiaries
in Taiwan and theNetherlands

27

MOTION|POSITIONING

Headquarters

Subsidiaries

GERMANY

USA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax		 +49 721 4846-1019
info@pi.ws
www.pi.ws

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY		NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCE		SPAIN

PI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax		 +49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax		 +49 36604 882-4109
info@piceramic.com
www.piceramic.com

JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct and
up to date. Illustrations may differ from the original and are not bind­ing. PI reserves the right to supplement or change the information
provided without prior notice.

Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

Physik Instrumente(PI Shanghai) Co., Ltd.
Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
Taipeiwww.pi-taiwan.com.tw

KOREA
PI Korea Ltd.
Seoul
www.pikorea.co.kr

W W W. P I . W S

BRO57E Silicon Photonics 06/2017 1.0 Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2017

MOTION | POSITIONING