PK0102PDE CMR37x Messröhren_2016-08_NEU_PK0102PDE CMR37x Messröhren 30.08.16 08:31 Seite 1

ACTIVELINE
CMR capacitive transmitters
Temperature-regulated or temperature-compensatedPK0102PDE CMR37x Messröhren_2016-08_NEU_PK0102PDE CMR37x Messröhren 30.08.16 08:31 Seite 2

ACTIVELINE

CMR capacitive transmitters
Temperature-regulated or temperature-compensatedTotal pressure measurement

CMR capacitive transmitters are the perfect solution for
total pressure measurement when the need is for highly
accurate measurements that are independent of the typeof gas in question. They are suitable for all applications in
the pressure range from 1,100 to 1 · 10-5 mbar, and arecharacterized by their long service life. At the same time,they afford minimum zero drift and outstanding temperaturestability. They are non-wearing, resistant to corrosive gases,
insensitive to atmospheric pressure and do not require anadditional shutoff valve. The integrated sensor shield affords
increased protection against contamination.

The differences

The two series, 37x and 36x, offer you the choice:In the case of the temperature-regulated CMR 37x transmitters, the entire sensor is heated to a temperature thatis higher than the ambient temperature. This completely
eliminates temperature-related effects on the sensor.
Which means: The utmost in measurement accuracy
combined with insensitivity to disturbances caused byfluctuations in the environmental temperature.
The CMR 36x transmitters provide highly accurate,
temperature-compensated pressure measurement,
without the need for warm-up. In this case, the temperatureis measured and is used as a correction factor for themeasurement signal.

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Advantages at a glance

Measurement independent of gas type
Sensor in ceramic technology– Maximum temperature stability– Resistant to corrosive gases– Outstanding service life
Simple operation– Pushbutton zeroing– 0-10 V output signal with integral error signal
Compatible with the Pfeiffer Vacuum ActiveLine series
Sensor shield3

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ACTIVELINE

CMR capacitive transmitters
Temperature-regulated or temperature-compensatedOperating principle

Our transmitters measure the deflection of the diaphragmin form of a change in electrical capacitance detected by
the conductors that are vapor-deposited on the ceramic
diaphragms. By varying the thicknesses (d) of the diaphragms
it is possible to provide measurement ranges from 1,100
to 10-5 mbar. The thinnest diaphragms are barely as thick as
a human hair (0.01 mm), and the measured deflections (⌬S)
are a mere 0.001 mm.
In order to be able to reproducibly measure these small
effects, the entire sensors in the CMR transmitters are ofceramic design, as this material has a very small coefficientof expansion. This means that temperature changes have only
a minimum influence on deflection of the diaphragm, which
is not pressure-dependent. And ceramic also offers a further
advantage over other materials: Even after being flooded withatmospheric pressure, the diaphragms quickly return to theirinitial position. There are no memory effects of the kind thatare typical of metallic sensors. Which means: No long waits
until the transmitter is measuring accurately again.

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Operating principle

Electronics

Ceramic Sensor

Sensor Shield

Vacuum Connection

In Pfeiffer Vacuum transmitters, the electronics andsensor form a compact unit
A sensor shield safeguards against contaminationand increases service life

Reference Chamber⌬S

Measurement
Chamber

Diaphragm (d)VacuumThe sensor consists of 3 basic components,
which are all of ceramic design
Together with the diaphragm, the upper section forms
the reference chamber
The pressure in the reference chamber is much lowerthan the vacuum to be measured
The ceramic is coated on the reference chamber side,
and curvature of the diaphragm caused by the change inpressure is detected in the form of a change in electrical
capacitance
The measurement chamber is also of ceramic design,
which means that the majority of the materials coming
into contact with the media are ceramic, as well5

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ACTIVELINE

110.1

2.3

15.7

16141.8

Temperature-regulated
to 45 °C – to minimizetemperature influences
Greater temperaturestability makes it
insensitive to fluctuationsin ambient temperature
High measurement
accuracy of up to10-5 mbar

Dimensions

ZEROø 82

41

STATUS

The new series of CMR 37x
temperature-regulatedtransmitters

17.8

CMR capacitive transmitters
Temperature-regulated or temperature-compensatedDimensions in mm

Technical Data/Order Numbers
ModelFlange
CMR 371

CMR 372

CMR 373

CMR 374

CMR 375

6

Pipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCR
Pipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCRPipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCR
Pipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCR
Pipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCR

Measurement Range
max.
1100 mbar
1100 mbar
1100 mbar
1100 mbar
110 mbar
110 mbar
110 mbar
110 mbar
11 mbar
11 mbar
11 mbar
11 mbar
1.1 mbar
1.1 mbar
1.1 mbar
1.1 mbar
0.11 mbar
0.11 mbar
0.11 mbar
0.11 mbarmin.
10-1 mbar
10-1 mbar
10-1 mbar
10-1 mbar
10-2 mbar
10-2 mbar10-2 mbar
10-2 mbar
10-3 mbar
10-3 mbar
10-3 mbar
10-3 mbar
10-4 mbar
10-4 mbar
10-4 mbar
10-4 mbar
10-5 mbar
10-5 mbar
10-5 mbar
10-5 mbar

Accuracy

Order Number

0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value
0.15 % of measured value

PT R25 100
PT R25 101
PT R25 102
PT R25 103
PT R25 110
PT R25 111
PT R25 112
PT R25 113
PT R25 120
PT R25 121
PT R25 122
PT R25 123
PT R25 130
PT R25 131
PT R25 132
PT R25 133
PT R25 140
PT R25 141
PT R25 142
PT R25 143

PK0102PDE CMR37x Messröhren_2016-08_NEU_PK0102PDE CMR37x Messröhren 30.08.16 08:31 Seite 730.5

2618115.5

69

No warm-up
Measurement range
up to 10-5 mbar

17.8

Dimensions
2.3

The CMR 36x temperaturecompensated transmittersø 55

Dimensions in mm

Technical Data/Order Numbers
ModelFlange
CMR 361

CMR 362

CMR 363

CMR 364

CMR 365

Pipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCR
Pipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCR
Pipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCR
Pipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCR
Pipe OD 1/2“DN 16 ISO-KF
DN 16 CF-R
Cajon 8 VCR

Measurement Range
max.
1100 mbar
1100 mbar
1100 mbar
1100 mbar
110 mbar
110 mbar
110 mbar
110 mbar
11 mbar
11 mbar
11 mbar
11 mbar
1.1 mbar
1.1 mbar
1.1 mbar
1.1 mbar
0.11 mbar
0.11 mbar
0.11 mbar
0.11 mbarmin.
10-1 mbar
10-1 mbar
10-1 mbar
10-1 mbar
10-2 mbar
10-2 mbar
10-2 mbar
10-2 mbar
10-3 mbar
10-3 mbar
10-3 mbar
10-3 mbar
10-4 mbar
10-4 mbar
10-4 mbar
10-4 mbar
10-5 mbar
10-5 mbar
10-5 mbar
10-5 mbar

Accuracy

Order Number

0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.2 % of measured value
0.5 % of measured value
0.5 % of measured value
0.5 % of measured value
0.5 % of measured value

PT R24 600
PT R24 601
PT R24 602
PT R24 603
PT R24 610
PT R24 611
PT R24 612
PT R24 613
PT R24 620
PT R24 621
PT R24 622
PT R24 623
PT R24 630
PT R24 631
PT R24 632
PT R24 633
PT R24 640
PT R24 641
PT R24 642
PT R24 643

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VACUUM SOLUTIONS FROM A SINGLE SOURCE
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www.pfeiffer-vacuum.com

Germany
Pfeiffer Vacuum GmbH
Headquarters
Tel. +49 (0) 6441 802-0
info@pfeiffer-vacuum.deAll data subject to change without prior notice. PK 0102 PE (August 2016/5)

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