CP.D2I Format Specification

June 2010
Association of Super-Advanced Electronics Technology (ASET)
Copyright © Association of Super-Advanced Electronics Technologies (ASET), 2010, All rights reserved.

The contents in this documentation may be modified without notice.
Association of Super-Advanced Electronics Technology (ASET) assumes no responsibility for
any infringements of third-party industrial property rights, or any other right resulting fromthe use of the information, figures, or tables in this documentation.
Association of Super-Advanced Electronics Technology (ASET) assumes no liability for anyeffects resulting from the use this documentation.
The information is this documentation can be used freely on user’s own responsibility.
Association of Super-Advanced Electronics Technology (ASET) assumes that it has the rightnot to respond to questionnaires about the information in this documentation.

CP.D2I format specifications

1 Purpose
Mask D2I/ASET has been working to reduce mask writing TAT by utilizing CP (CharacterProjection) technology. This document defines the CP mask data format specifications for CP
technology based on OASIS, namely “CP.D2I”.
2 Scope
CP.D2I specification applies to the input data format for CP mask drawing tools.
NOTICE:This specification does not purport to address safety issues, if any, associated with itsuse. It is the responsibility of the users of this specification to establish appropriate
safety and health practices and determine the applicability of regulatory or otherlimitations prior to use.
3 Limitations
This document will always be required to remain compliant with SEMI P39 OASIS, so that
this document is always a formal subset of SEMI P39 OASIS.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI P39OASISTM OPEN ARTWARK SYSTEM INTERCHANGE STANDARDSEMI P44SPECIFICATION FOR OPEN ARTWARK SYSTEM INTERCHANGE
STANDARD (OASISTM) SPECIFIC TO MASK TOOLSNOTICE: Unless otherwise indicated, all documents cited shall be the latest publishedversions.
5 Terminology
5.1 Abbreviations and Acronyms
OASISTM OPEN ARTWARK SYSTEM INTERCHANGE STANDARD
CP Character Projection
5.2 Symbol
5.2.1 A — acceptable record
The records generated as needed in the input data for mask tools by the software. The mask
tools perform processing according to the contents of the records.
5.2.2 I — ignore record
The records that may be generated in the input data for mask tools by the software, but willbe ignored by the mask tools. The mask tools do not respond to the records.
5.2.3 M — mandatory record
The records that must be generated in the input data for EB mask tools by the software. If
the records do not exist, the mask tools treat it as an error.
5.2.4 X — prohibited record
The records are prohibited to exist in the input data for mask tools. If the records exist, themask tools treat it as an error.

6 Requirements
6.1 Concept of CP.D2I
The concept of CP.D2I is shown in Figure 1. CP.D2I is a format that defines restrictions tothe OASIS format.

SEMI P39 OASIS
CP.D2IEB WriteFigure 1. Concept of CP.D2I
6.2 OASIS Format Specification
See SEMI P39 for OASIS Format Specification.
6.3 Additional Records in CP.D2I
In CP.D2I, the following standard user properties are added to PROPERTY record. Theseproperties are file-level standard properties and polygon-level standard properties.
6.3.1 file-level standard properties
6.3.1.1 S_CPD2I_VERSIONThis property declares the version of CP.D2I specification. Its value consists of a single
a-string record. With this specification, the value is “1”.
6.3.2 polygon-level standard propertie
6.3.2.1 S_CPCELL_ID
This property declares CELL ID for CP. Its value consists of a single unsigned integer record.
It appears immediately after the CELLNAME record. The value must be uniquely defined.
6.3.2.2 S_CPCELL_AREA
This property declares the boundary box of a CP CELL area. Its value consists of a single
unsigned-integer record.
6.4 Restrictions on CP.D2I
6.4.1 Concept(1) The specification reduces the load in the conversion process of mask tools as much as
possible, and aims for the direct input to mask tools(2) The specification maintains the data compaction expression in OASIS as much as
possible.
6.4.2 Restrictions on OASIS Record
The restrictions on the record of OASIS are shown in Table 1.

Table 1. Restrictions on OASIS Record
No12Record name
PAD

version-string

Restriction item
Byte alignment
OASIS version

Content of restriction
Minimum Maximum
StepUnit-Propriety
AM

unit

Grid/um

1100001grid

Recommended
value is 1, 2,4, 5, 8, 10, 16,
20, 25, 40, 50,
80, 100, 125,200, 250, 400,500, 625, 800,
1000, 1250,
2000, 2500,
5000, 10000

offset-flag

Table offset
existence----

Fixed to 0 or 1Mcellname-flag
propname-flag

Strict flags andbyteoffset fields

--

-

-

Fixed to 1 when
offset-flag is 0

M

Fixed to 1 whena PROPSTRING
record isspecified andoffset-flag is 0M

START

3

CommentM

propstring-flag

Strict flags andbyteoffset fields----

padding-string

Byte alignment----

validation-scheme

Verification
specification----

Fixed to 1 or 2

M

validation-signature

Contents ofverification----

Fixed to CRC32
orCHECKSUM32

M

cellname-string

Cell name length

1256

1-

AEND

M

4CELLNA
ME

reference-numbe

Reference number----5

TEXTST
RING

text-stringreference-number----I
I

6

PROPNA
ME

propname-string

1256

1-

A

7

PROPST
RING

reference-number

Text string
Reference number
Property namelengthReference number
Property string
lengthReference number

8LAYERN
AME-

9CELL

XYABSOLUTE
XYRELA
11TIVE

10reference-number

Fixed to record
type ‘3’

M----A-256--

A----A-----

I

cellname-stringreference-number

Cell name length
Reference number

02 -11--Modal absolutemode-----

Modal relative mode

----

A

cellname-stringreference-number

Cell name length
Reference number

0-

1-

X
A

Coordinate value
Repetition type
Repetition-2(row, column)

31-2-

2 -1-

1-

grid-

02 -3

32

1-

Space

02 -1

32

1

grid

Magnification
MirrorRotation angle-----

prop-stringx,yrepetition
x-dimension
PLACEM
12y-dimension
ENTx-spacey-spacemagnification
placement-info-byte
angle
13TEXT-32

32

2 -1
31

Fixed to record
type ‘13’

II
A

TYPE0-3A
A
A
A

Fixed to 1.0
Fixed to 0
Fixed to 0-A
A
A
I

No

14

Record nameRestriction item

x,yCoordinate value

RECTAN
GLE

1617PATH

TRAPEZOID

CTRAPEZOID

19 CIRCLE
20PROPETY

21 XNAME
XELEM
22ENT
XGEOM
23ETRY
24 CBLOCKA
zero-area(width=0 orheight=0) is
prohibited

12 -1

32

1grid

layer-number

Layer number

0

255

1-

datatype-number
repetitionx-dimension
y-dimension
x-spacey-space

Data type number
Repetition type
Repetition -2(row, column)

0-255
-1--

02 -3

32

1-ASpace

01gridA

Coordinate value

31

1

grid

layer-number
datatype-number
repetition
x-dimension
y-dimension
x-spacey-spacex, ydelta-adelta-b

Coordinate value
list

-2

31

2 -1

A

A
TYPE0-3

AAA
TYPE0-5zero-area(width=0 orheight=0) is
prohibited----Layer number
Data type number
Repetition type
Repetition -2(row, column)

00-

255
255-11--032

2 -3

1-

ASpace

02 -1

32

1grid

A------X

Coordinate value ofbottom left-2

31

2 -1

31

1grid

-

A

1

32

2 -1

1grid

zero-area(width=0 orheight=0) is
prohibited

A

TYPE0-3AAAA

widthheight

Width andHeightlayer-number
datatype-number
repetition
x-dimension
y-dimension
x-spacey-space

Layer number
Data type number
Repetition type
Repetition -2(row, column)

00-

255
255
-

11--0

32

2 -3

1-

ASpace

02 -1

32

1grid

A

Coordinate value-231

2 -1

31

1

grid

x, y
delta-adelta-b18

Propriety

Width andHeight

point-list
POLYGON

Commentwidthheightx,y15Content of restriction
Minimum Maximum
StepUnit
1
grid

width
heightlayer-number
datatype-number
repetition
x-dimension
y-dimension
x-spacey-spaceprop-string

TYPE0-3-AA
AA

Width andHeight
Layer number
Data type number
Repetition type
Repetition -2(row, column)

12 -1

32

1grid

A00-

255
255-

11--AA
A

0

32

2 -3

1-

A

Space02 -1

32

1gridAProperty namelength----X12561-A

32

TYPE0-3

reference-number-

Reference number-0-2 -1-1--A
X------X------X------X

M: Mandatory, A: Acceptable, I: Ignore, X: Prohibited

The restrictions on the standard property of CP.D2I are shown in Table 2.
Table 2. Restrictions on Standard properties
NoProperty name
S_CPCE
LL_ID
S_CPCE
LL_AREA

Content of restriction
Minimum Maximum
StepUnit

Restriction item

CommentPropriety

int

CELL ID for CP

02 -1641-M

int

CPCELL area value

02 -1

64

1grid

M

Flags

CP.D2I format
version----Fixed to 1

M

P44_BOUNDING
4 _BOXES_AVAILA
BLE-

Bounding boxes
available----Fixed to 2

M

flags
lower-left-x
lowerleft--ywidthheight

Flag
Coordinate value ofbottom left
Width andHeight----

Fixed to 000

M

P44_BO
5 UNDING
_BOX

31

31

2 -1

1

grid

M

-2

31

2 -1

31

1

grid

M

12

3

S_CPD2I_VERSI
ON-26

P44_CEL
L_OFFS
EToffset

Cell offset value

12 -1641Byte

M

7P44_TOP_CELL

cellname-string

Top cell namelength

12 -1

161-

M

8P44_MD
R_FORM
ATflags

Format type----9

P44_CHI
P_WIND
Wx1,y1x2,y2

Chip window size----size

File size

12 -1

64

1

Byte

numberTop cell number----

P44_FIL
E_SIZE
P44_TOP_CELL_11
NUMBE
R
10

Fixed to 1

M

M
Fixed to 1

MI

M: Mandatory, A: Acceptable, I: Ignore, X: Prohibited

6.4.3 Restrictions on class for cell
CP.D2I has three classes as shown in Figure 2 and Figure 3. Polygon is permitted in CP cell.
Table3 shows the mandatory property in CP cell.
First level cell: “Chip Cell”
A cell corresponding to the whole chip.
It consists of the placement of Region cells.
No figure in the cell.

Second level cell: “Region cell”
A cell representing a region of the whole chip.
It consists of figures of VSB and theplacements of CP cell.

Third level cell: “CP cell”
It consists of the figure for CP aperture.

Figure 2. Class structure-ITOP Cell
Region Cell1__CP__000000__CP__000001
Figure of VSB
Region Cell2...…

Region CellN ...…
Figure 3. Class structure-II
Table 3. Property list for CP CELL
RecordProperty

Cell

S_CPCELL_ID
S_CPCELL_AREA

Placement

S_CPCELL_ID

6.4.4 Restrictions on CELL NAME
The first 6 characters of a CELL name must be “__CP__”.
6.4.5 Restrictions on CP CELL(a) There are no overlapping polygons in CP CELL(b) There is no class in CP CELL. If polygons are overlapping one another, it is not allowed.
(c) Donut shaped figures are prohibited.
(d) The data that stretches over more than one file is disabled.
6.4.6 Restriction for file name
The restrictions for file name are shown in Table 4.
Table 4. Restrictions for file nameNoRestriction item

Content of restriction

1

File name length

Minimum = 1 character, Maximum = 64 characters(Maximum of 256 characters, when directory path isincluded)2

Character kind

64 kinds of characters: uppercase (A–Z), lowercase (a–z),
numeric character (0–9), underline (_), and period (.)

CP.D2I Format Specification
Produced by Mask Design, Drawing, and Inspection Technology Research Department,
Association of Super-Advanced Electronics Technologies (ASET)
June 2010
Copyright © Association of Super-Advanced Electronics Technologies (ASET), 2010, All rights reserved.