1.8.2013

Optical MEMS & Nanophotonics 2013
Preliminary Program

8:45 Opening
8:55 MM-S1 Plenary Session
Session Chair: Minoru Sasaki (Toyota Technological Institute, Japan)
MM-S1.1
PLENARY TALKCONTROLLING PHOTONS IN MESOSCOPIC SYSTEMS: PRECISION MEASUREMENTS IN
FREQUENCY COMBS AND OPTOMECHANICS
Chee Wei Wong
Columbia University, USA

MM-S1.2
PLENARY TALKOPTICAL MEMS AND NANOPHOTONICS IN SAMSUNG ELECTRONICS
Hyung Choi, Minseog Choi, Dongsik Shim, Sung Hyun Nam
Samsung Advanced Institute of Technology, Korea

Coffee Break

10:15 MM-S2 Imaging Devices
Session Chair: Jer-Liang Andrew Yeh (National Tsing Hua University, Taiwan)
MM-S2.1
INVITED TALKIMPLANTABLE MICRO CMOS IMAGING DEVICES FOR BIOMEDICAL APPLICATIONS
Jun Ohta, Toshihiko Noda, Kiyotaka Sasagawa, Takashi Tokuda
Nara Institute of Science and Technology, Japan

MM-S2.2
FORWARD-VIEWING ENDOSCOPIC OCT CATHETER USING ASYMMETRICALLYRESONANT FIBER SCANNER
Hyeon-Cheol Park1, Yeong-Hyeon Seo1, Seung-Bum Yang1, Minseog Choi2, Seungwan Lee2,
Woonbae Kim2, Ki-Hun Jeong1
1Korea Advanced Institute of Science and Technology (KAIST), Korea, 2Samsung Advanced
Institute of Technology (SAIT), Korea(1074)

MM-S2.3
TUNABLE CONFOCAL HYPERSPECTRAL IMAGING SYSTEM
Phuong-Ha Cu-Nguyen1, Adrian Grewe2, Stefan Sinzinger2, Hans Zappe1, and AndreasSeifert1
1University of Freiburg, IMTEK, Germany, 2Ilmenau University of Technology, Germany(1028)

MM-S2.4
TUNABLE CAT’S EYE RETRO-REFLECTOR ARRAY AS AN OPTICAL IDENTIFICATION TAG
Ming-chun Su, Chih-chieh Chang, Yu-cheng Yang, and Jui-che TsaiNational Taiwan University, Taiwan(1020)

MM-S2.5
AN ELECTROTHERMAL/ELECTROSTATIC DUAL DRIVEN MEMS SCANNER WITH LARGE
IN-PLANE AND OUT-OF-PLANE DISPLACEMENT
Xiaoyang Zhang1, Lin Liu1, Wenxuan Liang2, Xingde Li2, Huikai Xie1
1University of Florida, USA, 2John Hopkins University, USA(1045)

MM-S2.6
A MEMS INTERACTIVE LASER PROJECTION DISPLAY WITH A BUILT-IN LASER RANGE
FINDER
Sungho Jeon1, Hiroyuki Fujita2, and Hiroshi Toshiyoshi1
1 The University of Tokyo, Japan, 2Institute of Industrial Science, The University of Tokyo, Japan(1014)

MM-S2.7
THERMOELECTRICALLY CONTROLLED VARIFOCAL MICROMIRROR FOR NEARABERRATION FREE IMAGING
Li Li, Ran Li, Walter Lubeigt, Deepak Uttamchandani
University of Strathclyde, UK(1026)

Lunch

13:30 MA-S1 Electrostatic Actuation
Session Chair: Dan Marom (Hebrew University of Jerusalem, Israel)
MA-S1.1
A PHYSICAL MODELING AND LONG-TERM MEASUREMENT OF TILTING ANGLE DRIFT
CAUSED BY DIELECTRIC SURFACE CHARGING IN MEMS MICROMIRRORS
Mitsumasa Nakajima, Kei Kuwabara, Takako Ishihara, Tomomi Sakata, Mitsuo Usui, Naru
Nemoto, Etsu Hashimoto, Joji Yamaguchi, Shingo Uchiyama, and Yoshito Jin
NTT Microsystem Integration Laboratories, Japan(1006)

MA-S1.2
A TIME-MULTIPLEXED ELECTROSTATIC DRIVE AND SAMPLE INTERFACE CIRCUIT FOR
MEMS OPTICAL SCANNERS
Satoshi Maruyama1, Toshifumi Konishi2,3, Katsuyuki Machida2,3, Noboru Ishihara3, Kazuya
Masu3, Hiroyuki Fujita1, and Hiroshi Toshiyoshi1

1Institute of Industrial Science, The University of Tokyo, Japan, 2 NTT Advanced Technology
Corp., Japan, 3 Tokyo Institute of Technology, Japan(1082)

MA-S1.3
HIGH-REFLECTIVITY, BROADBAND MONOLITHIC SILICON PHOTONIC CRYSTALMIRRORS ON TWO-AXIS MEMS SCANNER BY TRANSFER-PRINTING
Jae-Woong Jeong1,2, Bryan Park1, Hohyun Keum2, Seok Kim2, John A. Rogers2 and Olav
Solgaard1
1Stanford University, USA, 2University of Illinois at Urbana-Champaign, USA(1017)

MA-S1.4
HIGH CONTRAST, CRYOGENIC, LARGE MICROMIRROR ARRAY FOR MULTI-OBJECT
SPECTROSCOPY
Frederic Zamkotsian1, Michael Canonica2,3, Patrick Lanzoni1, Wilfried Noell2
1 Laboratoire d'Astrophysique de Marseille - CNRS, France, 2 Ecole Polytechnique Fédérale deLausanne, Switzerland, 3 MIT, USA(1062)

MA-S1.5
ASSEMBLY OF 3D MEMS MIRRORS AND SCANNERS USING COMPLIANT PUSH PADS
Yi Chiu, Yan-Ting Wu, Hao-Chiao Hong
National Chiao Tung University, Taiwan(1063)

Coffee Break
15:15 MA-S2 Lenses
Session Chair: Hans Zappe (University of Freiburg, Germany)
MA-S2.1
ALIGNMENT TOLERANCES OF MEMS ALVAREZ LENSES
Yongchao Zou, Guangya Zhou, Yu Du and Fook Siong Chau
National University of Singapore, Singapore(1057)

MA-S2.2
ARTIFICIAL COMPOUND EYE WITH FRACTAL ZONE PLATE ARRAYS
Dongmin Keum, Ki-Hun Jeong
Korea Advanced Institute of Science and Technology, Korea(1077)

MA-S2.3
ASYMMETRIC MICROSTRUCTURES FOR HIGH LIGHT EXTRACTION AND LIGHTPATTERN MODULATION
Jae-Jun Kim, Dongmin Keum, Ki-Hun Jeong
Korea Advanced Institute of Science and Technology, Korea(1090)

MA-S2.4

FABRICATION AND CHARACTERIZATION OF THIN-FILM NANOSTRUCTUREDLUENEBURG LENS
Chih-Hung Hsieh1, Jun Xu1 Hanhong Gao1, Nicholas X. Fang1 and George Barbastathis1,2
1Massachusetts Institute of Technology, USA., 2Singapore-MIT Alliance for Research andTechnology (SMART) Centre, Singapore(1035)

Excursion:
Group A: Nagamachi Samurai District
Group B: Kanazawa Castle Park

8:40 TM-S1 Light Emissions
Session Chair: Wibool Piyawattanametha (National Electronics and Computer
Technology Center, Thailand)
TM-S1.1
INVITED TALKWAVELENGTH ENGINEERING OF VCSELS BASED ON MEMS TECHNOLOGIESFumio Koyama
Tokyo Institute of Technology, Japan

TM-S1.2
FABRICATION AND CHARACTERIZATION OF NANO-APERTURE VCSELS FOR 10 TB/IN2
MAGNETIC STORAGE DENSITIES
Sajid Hussain, C.S. Bhatia, Hyunsoo Yang and Aaron J. Danner
National University of Singapore, Singapore(1059)

TM-S1.3
EXPERIMENTAL STUDY ON NANOSCALE TEMPERATURE MEASUREMENT METHODUSING ROTATION OF NEAR-FIELD POLARIZATION
Jumpei Nitta, Sho Kishimoto, Yoshihiro Taguchi, Toshiharu Saiki, Yuji Nagasaka
Keio University, Japan(1040)

TM-S1.4
A MICROPLASMA CHIP FOR RADICAL MONITOR
Ryoto Sato1, Daisuke Yasumatsu1, Shinya Kumagai1, Masaru Hori2, Minoru Sasaki1
1Toyota Technological Institute, Japan
2Nagoya University, Japan(1046)

TM-S1.5
SURFACE PLASMON POLARITON BASED WAVELENGTH SELECTIVE IR EMITTERCOMBINED WITH MICROHEATER
Takahiro Sawada1, Katsuya Masuno2, Shinya Kumagai1, Makoto Ishii2, Shouichi Uematsu2,
and Minoru Sasaki1
1Toyota Technical Institute, Japan
2Yazaki Corporation, Japan(1060)

Coffee Break
10:35 TM-S2 Sensing
Session Chair: Guangya Zhou (National University, Singapore)
TM-S2.1
INVITED TALKPOLYMER OPTICAL MEMS INTEGRATED ON VCSELS FOR BIOSENSING
Véronique Bardinal1,2, Thierry Camps1,3, Benjamin Reig1,2, Jean-Baptiste Doucet1,2, Sami

Abada1,2, and E. Daran1,2
1 CNRS, LAAS, France, 2 Univ de Toulouse, LAAS, France, 3 Univ de Toulouse, UPS, LAAS,
FranceTM-S2.2
MONOLITHIC PHOTONIC CRYSTAL-BASED FIBER-TIP FABRY-PÉROT STATIC PRESSURESENSOR
Xuan Wu, Catherine Jan, Olav Solgaard
Stanford University, USA(1001)

TM-S2.3
SELF-ALIGNED MICROBONDING TECHNIQUE FOR MAKING BUTT-COUPLEDGERMANIUM METAL-SEMICONDUCTOR-METAL WAVEGUIDE PHOTODETECTORS
Wei-Ting Chen, Chih-Kuo Tseng, Ku-Hung Chen, Neil Na, and Ming-Chang M. Lee
Institute of Photonics Technologies, National Tsing Hua University, Taiwan(1042)

TM-S2.4
A REVIEW OF MEMS SCANNER BASED ENDOSCOPIC OPTICAL IMAGING PROBE
Wibool Piyawattanametha1,2
1 National Electronics and Computer Technology Center, Klong Luang, Thailand
2 Advanced Imaging Research Center, Faculty of Medicine, Chulalongkorn University, Thailand

TM-S2.5
ALTERATION BY REPEATED ELECTROSTATIC MEMS ACTUATION OF THE
THERMOLUMINESCENCE OF THIN FILMS
Merlin L. Mah, Philip R. Armstrong, Joseph J. Talghader
University of Minnesota, USA(1070)

TM-S2.6
RESONANT CAVITY COUPLED INFRARED DETECTORS WITH HIGH DETECTIVITYOPERATING AT ROOM TEMPERATURE
Anand S. Gawarikar, Ryan P. Shea and Joseph J. Talghader
University of Minnesota, USA(1036)

Lunch

13:35 TA-S1 Wavelength Selective Devices
Session Chair: Joseph Talghader (University of Minnesota, USA)
TA-S1.1
INVITED TALKMINIATURIZED MOEMS SPECTROMETER TECHNOLOGY FOR GAS SENSING
Jarkko Antila, Anna Rissanen, Rami Mannila, Jussi Mäkynen, Ismo Näkki, Mikko Tuohiniemi
VTT Technical Research Centre, Finland

TA-S1.2
WAVELENGTH SELECTIVE UNCOOLED INFRARED SENSOR USINGTRIANGULAR-LATTICE PLASMONIC ABSORBERS
Shinpei Ogawa1, Junya Komoda2, Kyohei Masuda2, Yousuke Takagawa2, and Masafumi
Kimata2
1Mitsubishi Electric Corporation, Japan, 2Ritsumeikan University, Japan(1084)

TA-S1.3
VERTICAL FIELD ENHANCED NANOSTRUCTURE FOR QUANTUM WELL INFRARED
PHOTODETECTOR THROUGH GERMANIUM SUBWAVELENGTH ARRAYS
Wei Dong1, 2, Toru Hirohata1, Kazutoshi Nakajima1, Xiaoping Wang2
1Hamamatsu Photonics K. K., Japan
2Zhejiang University, China(1004)

TA-S1.4
MIRRORS AND ANTI-REFLECTIVE SURFACES IN SINGLE CRYSTAL SILICON BY
PATTERNING OF THE SILICON SURFACE
Sanja Hadzialic, Maaike M. Visser Taklo
SINTEF ICT, Norway(1022)

Coffee Break
15:15 TA-S2 Micromirrors
Session Chair: Hiroshi Miyajima (Olympus, Japan)
TA-S2.1
DESIGN AND FABRICATION OF AN ELECTROMAGNETICALLY ACTUATED OPTICALSWITCH WITH PRECISE TILT ANGLE CONTROL
Victor Farm-Guoo Tseng, Jiping Li, Xiaoyang Zhang, Huikai Xie
University of Florida, USA(1008)

TA-S2.2
INTEGRATION OF ANGULAR RATE SENSOR ON LARGE DEFLECTION POLYMER-MEMS
MIRROR
Hirofumi Yamashita, Kyohei Terao, Hidekuni Takao, Fusao Shimokawa, Fumikazu Oohira, andTakaaki Suzuki
Kagawa University, Japan(1044)

TA-S2.3
MAGNETICALLY ACTUATED SWING-TYPE MICROMIRROR
Hsu-Tang Chang, Chun-Wei Tsai, Shih-Hsiang Liu, and Jui-che Tsai
Graduate Institute of Photonics and Optoelectronics and Department of Electrical Engineering
National Taiwan University, Taiwan(1025)

TA-S2.4

MEMS WAVELENGTH-SELECTIVE SWITCH INCORPORATING LIQUID CRYSTALSHUTTERS FOR ATTENUATION AND HITLESS OPERATION
Uri Arad1, Yossi Corem1, Boris Frenkel1, Valery Deich1, Jonathan Dunayevsky1, Roey Harel2,
Peter Janosik2, Gil Cohen2 and Dan M. Marom3
1Oclaro Corp., Israel 2Oclaro Corp., USA, 3Hebrew University, Israel(1092)

Excursion:
Group A: Kanazawa Castle Park
Group B: Nagamachi Samurai District8:40 WM-S1 Bio-applications I
Session Chair: Ki-Hun Jeong (KAIST, Korea)
WM-S1.1
INVITED TALKCELL LEGO
Hiroo Iwata
Kyoto University, JapanWM-S1.2
DIRECT NUCLEAR DELIVERY OF DNA MACROMOLECULES USING THE PHOTOTHERMALNANOBLADE
Ting-Hsiang Wu1, Yi-Chien Wu1, Enrico Sagullo1, Michael A. Teitell1, Pei-Yu Eric Chiou1
1University of California, Los Angeles, USA(1066)

WM-S1.3
OPTOELECTRONIC TWEEZERS INTEGRATED WITH 3D MICROFLUIDIC NETWORKS
Kuo-Wei Huang1, Yu-Chun Kung1, Yi-Chien Wu1, Yu-Jui Fan2 and Pei-Yu Chiou1
1University of California at Los Angeles, USA, 2National Taiwan University, Taiwan(1058)

WM-S1.4
FLUOROMETRIC GAS-PHASE BIOSENSOR (BIO-SNIFFER) WITH UV-LED EMISSION
LIGHT FOR FORMALDEHYDE VAPOR
Ye Ming1, Tomoko Gessei1, 2, Kumiko Miyajima1, Munkhbayar Munkhjargal, Takahiro
Arakawa1, Kohji Mitsubayashi1
1Inst. of Biomaterials and Bioengineering, Tokyo Medical and Dental Univ., Japan, 2Tokyo
Metropolitan Industrial Technology Research Institute, Japan(1083)

WM-S1.5
MICRO-SCANNING MIRRORS FOR HIGH-POWER LASER APPLICATIONS IN LASERSURGERY
Thilo Sandner1, Simon Kimme1, Thomas Grasshoff1, Ulrich Todt1, Alexander Graf1,
Christian Tulea2, Achim Lenenbach2, Harald Schenk1
1 Fraunhofer Institute for Photonic Microsystems (IPMS), AMS, Dresden, Germany, 2Fraunhofer Institute for Laser Technology (ILT), Aachen, Germany(1076)

Coffee Break
10:35 WM-S2 Waveguides
Session Chair: George Barbastathis (MIT, USA)WM-S2.1
INVITED TALKSILICON-ORGANIC HYBRID (SOH) TECHNOLOGY: A PLATFORM FOR EFFICIENT
ELECTRO-OPTICAL DEVICES
C. Koos,1,2, J. Leuthold,3 W. Freude,1,2, L. Alloatti,1 R. Palmer,1 D. Korn,1 J. Pfeifle,1 P. C.

Schindler,1 M. Lauermann,1,2
1 Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT),
Germany, 2 Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT),
Germany, 3 now with ETH Zurich, Switzerland

WM-S2.2
TRANSMISSION WIDTH (Q-FACTOR) TUNABLE SILICON-PHOTONIC MICRO-RINGRESONATORS
Mustafa Ordu, Yoshiaki Kanamori, Kazuhiro Hane
Tohoku University, Japan(1011)

WM-S2.3
OPTICAL MICRORING RESONATORS IN LITHIUM NIOBATE FOR CLASSICAL AND
QUANTUM MICROWAVE PHOTONICS
Deng Jun1,2, Sajid Hussian1, Soham Saha1,Ching Eng Png2, Mankei Tsang1, and Aaron J.
Danner1
1 National University of Singapore, Singapore, 2 Institute of High Performance Computing,
Agency for Science, Technology and Research, Singapore(1051)

WM-S2.4
THERMALLY TUNABLE PHOTONIC DUAL-DISK RESONATOR WITH WIDE OPERATIONRANGE
Bo Li, Chong Pei Ho and Chengkuo Lee
National University of Singapore, Singapore(1085)

WM-S2.5
MICRO-CHANNEL DEVICE FOR SPECTRUM MEASUREMENT USING OPTICAL FIBERALIGNED WITH BIAS SPRING WITH REVERSELY TAPERED PROFILE
Hikaru Iimura, Dinghuan Deng, Shinya Kumagai, Yasutake Ohishi, Minoru Sasaki
Toyota Technical Institute, Japan(1018)

WM-S2.6
SIDE-POLISHED FIBER OPTOFLUIDIC ATTENUATOR BASED ON
ELECTROWETTING-ON-DIELECTRIC ACTUATION
Anna Duduś, Robert Blue, Michele Zagnoni and Deepak Uttamchandani
University of Strathclyde, UK(1024)

Lunch

13:45 WA-S1 Bio-applications II
Session Chair: Chengkuo Lee (National University of Singapore)
WA-S1.1
INVITED TALKIMPLANTABLE DEVICES FOR OPTICAL NEURAL INTERFACES

T.V.F. Abaya, M. Diwekar, S. Blair, P. Tathireddy, L. Rieth and F. Solzbacher
University of Utah, USA

14:10 WA-P Poster Presentation
WA-P.1
2D MEMS SCANNER WITH A ROTATION-ANGLE DETECTOR FOR A TIME-OF-FLIGHT
IMAGE SENSOR
I. Aoyagi, K. Hamaguchi, Y. Nonomura, T. Akashi
Toyota Central R&D Labs., Inc., Japan(1088)

WA-P.2
DUAL-AXIS POLYMER-MEMS MIRROR MADE OF PHOTOSENSITIVE NANOCOMPOSITE
Junya Suzuki1, Takuya Miura1, Kyohei Terao1, Hidekuni Takao1, Fusao Shimokawa1, Takahiro
Namazu2, Fumikazu Oohira1, and Takaaki Suzuki1
1Kagawa University, Japan, 2University of Hyogo, Japan(1071)

WA-P.3QUASI-STATIC MICROSCANNER WITH LINEARIZED SCANNING FOR AN ADAPTIVE
3D-LASERCAMERA
Thilo Sandner, Thomas Grasshoff, Markus Schwarzenberg, Harald Schenk
Fraunhofer Institute for Photonic Microsystems (IPMS), Germany(1075)

WA-P.4SURFACE-MICROMACHINED MEMS CORNER CUBE RETRO-REFLECTOR ARRAY
Yu-fan Chen, Hsu-tang Chang, Bo-jiun Chen, and Jui-che TsaiNational Taiwan University, Taiwan(1027)

WA-P.5
A 3.3V OPERATED VARIABLE TRANSMISSION ATTENUATOR BASED ON
SUBWAVELENGTH GRATING
Hiroaki Honma1, Kazuhiro Takahashi1, Hiromu Ishii1, Makoto Ishida1, 2, and Kazuaki Sawada1,
2
1Toyohashi University of Technology, Japan, 2Electronics-Inspired Interdisciplinary ResearchInstitute (EIIRIS), Japan(1041)

WA-P.6
ELECTROTHERMALLY ACTUATED LARGE DISPLACEMENT WAVEGUIDES
Sean R. Samuelson and Huikai Xie
University of Florida, USA(1065)

WA-P.8GLASS REFLOW PROCESS FOR AN ELECTRICAL ISOLATION AND TEMPORARYSUPPORT OF TWO-DIMENSIONAL MICROSCANNER

Minyoung Yun, Daehun Jeong, Seunghwan Moon, Jong-Hyun Lee
Gwangju Institute of Science and Technology, Korea(1087)

WA-P.9IMPROVEMENT IN SIDEWALL ROUGHNESS OF MEMS X-RAY OPTICS
Masahiro Ikuta1, Yuichiro Ezoe1, Ikuyuki Mitsuishi1, Tomohiro Ogawa1, Takuya Kakiuchi1,
Takaya Ohashi1, Kazuhisa Mitsuda2
1Tokyo Metropolitan University, Japan, 2ISAS/JAXA, Japan(1009)

WA-P.10ASSEMBLY OF A MEMS-BASED WOLTER TYPE-I X-RAY OPTIC TOWARD A FUTURE
PLANETARY EXPLORATION MISSION
Ikuyuki Mitsuishi1, Yuichiro Ezoe1, Tomohiro Ogawa1, Takuya Kakiuchi1, Masahiro Ikuta1,
Takayuki Hayashi2, Toshiki Sato1, Takaya Ohashi1, Kazuhisa Mitsuda2, Kohei Morishita3,
Kazuo Nakajima3
1Tokyo Metropolitan University, Japan, 2ISAS/JAXA, Japan, 3 Kyoto University, JAPAN(1050)

WA-P.11APPLICATION OF NANO-IMPRINT TECHNOLOGY TO GRATING SCALE
FOR A ROTARY MICROENCODER
Toshihiro Takeshita1, Takuma Iwasaki1, Eiji Higurashi2, Tatsuya Miyazaki1, Renshi Sawada1
1Kyushu University, Japan, 2The University of Tokyo, Japan(1016)

WA-P.12EVALUATION OF TRANSPARENT POLYIMIDE FILM AS BIOLOGICAL CELL CULTURESHEET WITH MICROSTRUCTURES FOR BIOMEDICAL ENGINEERING
Hirotaka Maenosono, Hirofumi Saito and Yasushiro Nishioka
Nihon University, Japan(1052)

WA-P.13
PHOTOCHEMICAL POLISHING OF SAPPHIRE SUBSTRATE BASED ON NONADIABATIC
OPTICAL NEAR-FIELD ETCHING
J. Suzuki1, K. Hirata2, K. Iwami1, A. Taguchi1, N. Umeda1
1Tokyo University of Agriculture and Technology, Japan, 2Sigma Koki Co., Ltd., Japan(1043)

WA-P.14
INFRARED COLLECTING MICROLENS INTEGRATED WITH SI PHOTO CELL
Takuro Aonuma, Shinya Kumagai, Minoru Sasaki
Toyota Technical Institute, Japan(1091)

WA-P.15
COLLOIDAL PARTICLE SORTING WITH SCATTERING FORCE VIA PLANAR WAVEGUIDE
Masahiro Motosuke, Hideharu KotariTokyo University of Science, Japan(1067)

WA-P.16
NEAR-INFRARED PHOTOTHERMAL ACTIVATION OF MICROGELS INCORPORATINGPOLYPYRROLE NANOTRANSDUCERS THROUGH DROPLET MICROFLUIDICS
Rongcong Luo1 and Chia-Hung Chen1,2
1National University of Singapore, Singapore, 2Singapore Institute for Neurotechnology(SiNAPSE), National University of Singapore(1078)

WA-P.17
HIGH SENSITIVE SILICON OPTICAL INDEX SENSOR BASED ON RING-ASSISTED
MACH-ZEHNDER INTERFEROMETER
Tianhang Zhang, Bo Li, Chong Pei Ho and Chengkuo Lee
National University of Singapore, Singapore(1093)

WA-P.18
EXPERIMENTAL VERIFICATION OF PHONONIC CRYSTAL SLAB BASED SILICONMICRORESONATORS
Nan Wang1,2, Min Tang2, Fu-Li Hsiao3, Chong Pei Ho1, Moorthi Palaniapan1, Dim-Lee
Kwong2, and Chengkuo Lee1
1National University of Singapore, Singapore, 2Institute of Microelectronics, Agency for Science,
Technology and Research (A*STAR), Singapore, 3National Changhua University of Education,
Taiwan(1054)

WA-P.19
FAST GUIDED MODE OF A PHOTONIC CRYSTAL WAVEGUIDE
Borriboon Thubthimthong, Kazuhiro Hane
Tohoku University, Japan(1048)

WA-P.20FLEXIBLE NANOPOROUS ANODIC ALUMINUM OXIDE(NP-AAO) TEMPLATE COATED WITH
SELF-ASSEMBLED AU NANOCROWN ARRAY FOR NANOPHOTONIC SWITCHING
Chitsung Hong1, Weileun Fang2, Bor-Yuan Shew1
1National Synchrotron Radiation Research Center (NSRRC), Taiwan
2National Tsing Hua University, Taiwan(1069)

WA-P.22ULTRASENSITIVE BIOSENSORS USING FANO RESONANCES IN DOUBLE-LAYER GOLDNANOSTRUCTURES
Kuang-Li Lee1, Jhih-Bin Huang 2, Shu-Han Wu3 and Pei-Kuen Wei1, 2, 3
1 Academia Sinica, Taiwan, 2 National Taiwan Ocean University, Taiwan, 3 National Yang-Ming
University, Taiwan(1053)

WA-P.23SENSITIVITY-ENHANCED SERS SUBSTRATE FABRICATION BY NANOIMPRINTINGCOMPRESSED PDMS ELASTOMER
Wen-Kai Kuo, Jia-Nan Yan, Wing-Ming Chou, Hsin-Her Yu
National Formosa University, Taiwan

(1015)

WA-P.24
DEVELOPMENT OF TUNABLE 3-D eSRR FOR THz APPLICATIONS
Fusheng Ma, Yu-Sheng Lin, You Qian, Chong Pei Ho, Prakash Pitchappa, and Chengkuo Lee
National University of Singapore, Singapore(1007)

WA-P.25COMPLEMENTARY METAMATERIAL INFRARED ABSORBER
Prakash Pitchappa1,2, Chong Pei Ho1,2, Piotr Kropelnicki2 and Chengkuo Lee1
1National University of Singapore, Singapore, 2Institute of Microelectronics (IME), Agency for
Science, Technology and Research (A*STAR), Singapore(1068)

WA-P.26
OPTIMAL DESIGN OF PHOTODETECTOR WITH MULTI-SLIT GRATING
Ayumi Takeda, Takuma Aihara, Masashi Fukuhara, Yuya Ishii, Mitsuo Fukuda
Toyohashi University of Technology, Japan(1038)

WA-P.27
POLARIZATION-INDEPENDENT PHOTODETECTOR WITH RING-TYPE GRATING
Ayumi Takeda, Takuma Aihara, Masashi Fukuhara, Yuya Ishii, Mitsuo Fukuda
Toyohashi University of Technology, Japan(1089)

WA-P.29
A MODIFIED PLASMON RULER EQUATION FOR QUASI-ORDERED PLASMONICNANOISLANDS
Minhee Kang, Ki-Hun Jeong
Korea Advanced Institute of Science and Technology, Korea(1073)

WA-P.30
LOCAL FIELD EFFECT ON Nd3+-DOPED α-NaYF4 NANOCRYSTALS IN LIQUIDS
Xiaojie Xue, Takenobu Suzuki, Yasutake Ohishi
Research Center for Advanced Photonic Technology, Toyota Technical Institute, Japan(1079)

Excursion: Kenrokuen Garden

Banquet: Kinjohro http://www.kinjohro.co.jp/

8:40 ThM-S1 Deformable Devices
Session Chair: Hiroshi Toshiyoshi (University of Tokyo, Japan)
ThM-S1.1
INVITED TALKMEMS AND NEMS WITH INTEGRATED CAVITY OPTOMECHANICAL READOUT
Vladimir Aksyuk1, Jie Zou1,2, Yuxiang Liu1,2, Houxun Miao1,2, Marcelo Davanco1,3, Kartik
Srinivasan1
1 National Institute of Standards and Technology, USA, 2 University of Maryland, USA, 3
California Institute of Technology, USA

ThM-S1.2
SILICON-RIM-REINFORCED SILICON NITRIDE MICROSCANNER WITH VERTICAL COMBACTUATOR AND WAFER-LEVEL VACUUM PACKAGING
Joo-Young Jin, Sunghyun Yoo, Jae-Sung Bae, and Yong-Kweon Kim
Seoul National University, Korea(1003)

ThM-S1.3
REEFORM HIGH-SPEED LARGE-AMPLITUDE DEFORMABLE PIEZO MIRRORS
Matthias C Wapler, Jens Brunne and Ulrike Wallrabe
University of Freiburg, Germany(1032)

ThM-S1.4
FOCUSING MIRROR WITH TUNABLE ECCENTRICITY
Morit St rmer, Matthia C
apler, en Brunne and Ulrike
University of Freiburg – IMTEK, Germany

allrabe(1029)

ThM-S1.5
DISPLACEMENT-AMPLIFIED DYNAMIC VARIFOCAL MIRROR USING MECHANICALRESONANCE
Takashi Sasaki, Daiki Sato, Kazuhiro Hane
Tohoku University, Japan(1072)

ThM-S1.6
AN INFRARED DETECTOR BASED ON NONLINEAR OSCILLATION
Daisuke Momonoi, Tatsuya Yamazaki, Shinya Kumagai, Minoru Sasaki
Toyota Technological Institute, Japan(1047)

Coffee Break

10:50 ThM THz Applications
Session Chair: Jui-Che Tsai (National Taiwan University, Taiwan)

ThM-S2.1
INVITED TALKELECTROSTATIC MEMS TUNABLE SPLIT-RING RESONATORS FOR THZ FILTERAPPLICATIONS
Zhengli Han1, Kenta Kohno1, Tomi Haatainen2, Tapio Makela2, Hiroyuki Fujita1, Kazuhiko
Hirakawa1, and Hiroshi Toshiyoshi1
1Institute of Industrial Science, The University of Tokyo, Japan, 2 VTT Microsystems andNanoelectronics, Finland

ThM-S2.2
TUNABLE THz FILTER USING 3-D SPLIT-RING RESONATORS
Yu-Sheng Lin1,2, Chong Pei Ho1,2, Prakash Pitchappa1,2, Fusheng Ma1, You Qian1,
Piotr Kropelnicki2 and Chengkuo Lee1
1National University of Singapore, Singapore, 2Institute of Microelectronics (IME), Agency for
Science, Technology and Research (A*STAR), Singapore(1037)

ThM-S2.3
A 3-D MOVABLE THz FILTER USING SURFACE MICROMACHINING PROCESS
Yu-Sheng Lin, Fusheng Ma and Chengkuo Lee
National University of Singapore, Singapore(1019)

ThM-S2.4
BIPOLAR OPTICAL FORCES IN COUPLED PHOTONIC CRYSTAL CAVITIESFeng Tian, Guangya Zhou, Yu Du, and Fook Siong Chau
National University of Singapore, Singapore(1055)

ThM-S2.5
APPLICATIONS OF NANOELECTROMECHANICAL ACTUATORS IN NANO
OPTOMECHANICS
Feng Tian, Guangya Zhou*, Yu Du, and Fook Siong Chau
National University of Singapore, Singapore(1056)

Optional Tour: Shirakawa-go
http://travel.kankou-gifu.jp/en/see-and-do/2/