Preliminary Program
Executive Committee reserves the right to amend the program if necessary.

Sunday 16 June 2013
17:00 - 19:45

Registration

18:30 - 19:45

Welcome Reception

Monday 17 June 2013
08:00 - 18:00

Registration

08:45 - 09:00

Welcome Address
J.R. Morante, General Chair

09:00 - 09:15

Technical Program Introduction
Christofer Hierold, Technical Program Chair

09:15 - 09:55

Plenary I
Session Chairs: C. Hierold, ETH Zürich, SWITZERLAND and R. Zengerle, University of Freiburg - IMTEK, GERMANY

M1G.001

MEMS TECHNOLOGIES IN LIFE SCIENCES
H.P. Lang, F. Huber, J. Zhang and Christoph Gerber
University of Basel, SWITZERLAND..........................................................................................................................................................................................

09:55 - 10:35

Plenary II
Session Chairs: J. Morante, University of Barcelona, SPAIN and O. Tabata, Kyoto University, JAPAN

M1G.002INTELLIGENT SURFACES FOR CELL SHEET TISSUE ENGINEERING
Teruo Okano
Tokyo Women's Medical University, JAPAN..........................................................................................................................................................................................

10:35 - 11:15

Break

11:15 - 11:55

Plenary III
Session Chairs: V. Bright, University of Colorado, Boulder, USA and C. Hierold, ETH Zürich, SWITZERLAND

M2G.001

HYBRID ORGANIC-INORGANIC FILMS FABRICATED USING ATOMIC AND MOLECULAR LAYERDEPOSITION
Steven M. George, B.H. Lee, B. Yoon, and S.H. Jen
University of Colorado, USA..........................................................................................................................................................................................

11:55 - 12:35

EUROSENSORS 2012 Fellowship Award Winner
Session Chairs: I. Barsony, Hungarian Academy of Sciences, HUNGARY and M. Fleischer, Siemens AG, GERMANY

M2G.002

METAL OXIDE NANOWIRES CHEMICAL SENSOR: PRESENT STATUS AND FUTURE
CHALLENGES
Elisabetta Comini
University of Brescia, ITALY..........................................................................................................................................................................................

12:35 - 12:40

Eurosensors 2014
Giorgia Sberveglieri, Conference Chair

12:40 -12:50

Transducers 2015 Announcement
Thomas W. Kenny, General Chair & Victor M. Bright, Technical Program Chair

12:50 - 14:15

Lunch on Own

14:15 - 16:30

Poster Session M3P

Mechanical/Physical Sensors and Microsystems
Accelerometer
M3P.001

A HIGH ASPECT RATIO MEMS PROCESS WITH SURFACE MICROMACHINED POLYSILICON FOR
HIGH ACCURACY INERTIAL SENSING
A. Geisberger, S. Schroeder, J. Dixon, Y. Suzuki, J. Makwana, and S. Qureshi
Freescale Semiconductor, Inc., USA..........................................................................................................................................................................................

M3P.002

AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION
D. Yamane1, T. Konishi2, T. Matsushima2, G. Motohashi1, K. Kagaya3, H. Ito1, N. Ishihara1,
H. Toshiyoshi3, K. Machida2, and K. Masu1
1
Tokyo Institute of Technology, JAPAN, 2NTT Advanced Technology Corporation, JAPAN, and3
University of Tokyo, JAPAN..........................................................................................................................................................................................

M3P.003

DEVELOPMENT OF ULTRA LOW POWER WIRELESS SENSOR NODE WITHPIEZOELECTRIC ACCELEROMETER FOR HEALTH MONITORING
H. Okada1, H. Nogami1, T. Kobayashi1, T. Masuda2, and T. Itoh1
1
National Institute of Advanced Industrial Science and Technology (AIST), JAPAN and 2University of Tokyo, JAPAN..........................................................................................................................................................................................

M3P.004

INTEGRATED SENSOR CROSS-SENSITIVITY ANALYSIS
C.L. Roozeboom1, J.F. Salgado2, M.A. Hopcroft3, and B.L. Pruitt1
1
Stanford University, USA, 2Cañada College, USA, and 3Hewlett-Packard Labs, USA..........................................................................................................................................................................................

M3P.005

PIEZOELECTRIC ACCELEROMETER BASED ON MICRO INJECTION MOLDED POLYMERS
R. Schulze1, M. Heinrich1, M. Wegener2, R. Forke3, D. Billep3, and T. Gessner1,31
Chemnitz University of Technology, GERMANY, 2Fraunhofer Institute for Applied Polymer Research (IAP),GERMANY, and 3Fraunhofer Institute for Electronic Nano Systems (ENAS), GERMANY..........................................................................................................................................................................................

Acoustic Sensors
M3P.006

PIEZOELECTRIC PARYLENE-C MEMS MICROPHONE
J.Y.-H. Kim1, Y. Liu2, N. Scianmarello2, and Y.C. Tai2
1
Samsung Electronics Company, SOUTH KOREA and 2California Institute of Technology, USA..........................................................................................................................................................................................

Actuators & Characterization Tools
M3P.007

A DOUBLE PIEZO – SNAP THROUGH BUCKLING DEVICE FOR ENERGY HARVESTING
B. Andò1, S. Baglio1, A.R. Bulsara2, V. Marletta1, I. Medico1, and S. Medico1
1
University of Catania, ITALY and 2Space and Naval Warfare Systems Center, USA..........................................................................................................................................................................................

M3P.008

SILICON NANOTWEEZERS WITH DOUBLE ACTUATION AND EXTENDEDSTROKE FOR SINGLE CELL STUDIES
H. Guillou, N. Lafitte, R. Léal, L. Jalabert, T. Fujii, H. Fujita, Y.T. Matsunaga, and D. Collard
University of Tokyo, JAPAN..........................................................................................................................................................................................

Gyroscope
M3P.009

A MICROMACHINED INTEGRATED GYROSCOPE AND ACCELEROMETER BASED ON GASTHERMAL EXPANSION
S.L. Cai1, R. Zhu1, H.G. Ding1, Y.J. Yang2, and Y. Su3
1
Tsinghua University, CHINA, 213th Research Institute of CETC, CHINA, and3
Nanjing University of Science & Technology, CHINA..........................................................................................................................................................................................

M3P.010

AN AUTOMATIC REAL-TIME MODE-MATCHING MEMS GYROSCOPE WITH FUZZY ANDNEURAL NETWORK CONTROL
C.H. He, Q.C. Zhao, D.C. Liu, L.G. Dong, Z.C. Yang, and G.Z. Yan
Peking University, CHINA..........................................................................................................................................................................................

Infrared & Magnetic
M3P.011A NOVEL CUBIC X-RAY DETECTOR DIODE WITH ISOTROPIC RESPONSE FOR HIGH-ENERGYRADIATION DOSIMETRY
P. Norlin1, O. Öberg1, S. Junique1, W. Kaplan1, J. Andersson1, and G. Nilsson2
1
Acreo Swedish ICT AB, SWEDEN and 2ScandiDos AB, SWEDEN..........................................................................................................................................................................................

M3P.012FABRICATION OF VANADIUM OXIDE MICROBOLOMETERS ON THIN POLYIMIDE FILMS
D. De Bruyker and B. Xu
Palo Alto Research Center (PARC), USA..........................................................................................................................................................................................

M3P.013MEMS LORENTZ FORCE MAGNETIC SENSOR BASED ON A BALANCED TORSIONALRESONATOR
M. Li, V.T. Rouf, G. Jaramillo, and D.A. Horsley
University of California, Davis, USA..........................................................................................................................................................................................

Pressure & Flow
M3P.014A HYDROPHONE USING LIQUID TO BRIDGE THE GAP OF A PIEZO-RESISTIVE CANTILEVER
N. Minh-Dung, P. Hoang-Phuong, K. Matsumoto, and I. Shimoyama
University of Tokyo, JAPAN..........................................................................................................................................................................................

M3P.015EXPERIMENTAL CHARACTERIZATION OF A NOVEL SINGLE CHIP FLOW SENSOR WITH
AUTOMATIC COMPENSATION OF PRESSURE EFFECTS
M. Piotto1, A.N. Longhitano2, F. Del Cesta2, and P. Bruschi2
1
National Research Council (CNR), ITALY and 2University of Pisa, ITALY..........................................................................................................................................................................................

M3P.016

INVESTIGATIONS ON PRESSURE SENSORS FOR MEDICAL APPLICATIONSBASED ON FIBER BRAGG GRATINGS
S. Voigt1, M. Rothhardt2, M. Becker2, and J. Mehner11Chemnitz University of Technology, GERMANY and 2Institute for Photonic Technology (IPHT), GERMANY..........................................................................................................................................................................................

Resonant Sensors
M3P.017

A CMOS MEMS CAPACITIVE RESONANT SENSOR ARRAY UTILIZING A PLL-BASEDOSCILLATOR LOOP
G.-C. Wei and M.S.-C. Lu
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

M3P.018

HIGH SENSITIVE MASS DETECTION IN LIQUID USING PIEZOELECTRIC GAAS MEMBRANE
A. Bienaimé, C. Elie-Caille, and T. Leblois
FEMTO-ST Institute, FRANCE..........................................................................................................................................................................................

M3P.019

U-SHAPED, WIRE-BASED OSCILLATORS FOR RHEOLOGICAL APPLICATIONS BRIDGING THE
GAP BETWEEN 100 HZ AND 100 KHZ
M. Heinisch, E.K. Reichel, T. Voglhuber-Brunnmaier, and B. Jakoby
Johannes Kepler University, AUSTRIA..........................................................................................................................................................................................

M3P.020

VISCO-MEMS: THE MEMS-BASED VISCOSITY SENSOR USING DUAL SPIRAL VIBRATING BEAMS
Y. Yamamoto1, S. Matsumoto1, H. Yabuno2, M. Kuroda1, T. Yamamoto1, and S. Choi11National Institute of Advanced Industrial Science and Technology (AIST), JAPAN and 2Keio University, JAPAN..........................................................................................................................................................................................

Tactile Sensors
M3P.021

A TACTILE FUNCTION EMBEDDED FLEXIBLE DYNAMIC CURVATURE SENSOR WITH
ROTATIONAL SCANNING DETECTION ABILITY
G.H. Feng and G.Y. Chu
National Chung Cheng University, TAIWAN..........................................................................................................................................................................................

M3P.022

DYNAMIC RESPONSE OF TACTILE SENSOR APPLYING CANTILEVER IN ELASTOMER
M. Hosono1, K. Noda2, K. Matsumoto2, and I. Shimoyama2
1
Industrial Research Institute of Shizuoka Prefecture, JAPAN and 2University of Tokyo, JAPAN..........................................................................................................................................................................................

M3P.023

MICRO-NEEDLE ELECTRODE ARRAY FOR ELECTRO TACTILE DISPLAY
N. Kitamura1, J. Chim1, and N. Miki1,21Keio University, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

Thermometers
M3P.024

AN ULTRA-LOW POWER SWITCH ARRAY OF TEMPERATURE AND HUMIDITY SENSORS WITH
DIRECT DIGITAL OUTPUT
W. Zhu, Y. Zhang, and N. Yazdi
Evigia Systems, Inc., USA..........................................................................................................................................................................................

M3P.025

ON-SITE MONITORING OF SOIL CONDITION FOR PRECISION AGRICULTURE BY USINGMULTIMODAL MICRO-CHIP INTEGRATED WITH EC AND TEMPERATURE SENSORS
M. Futagawa1, Y. Ban2, K. Kawashima2, and K. Sawada1,3
1
Toyohashi University of Technology, JAPAN, 2Aichi Agricultural Research Center, JAPAN, and3Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

M3P.026

SURFACE EMBEDDED TEMPERATURE SENSOR ON TOOL PART FOR REAL TIME INJECTION
MOULDING PROCESS MONITORING
T. Schönberg1, K. Ruusuvuori2, B.H. Christensen3, K. Boivie4, J.P. Berild5, H. Ronkainen2, and L.T. Gellein4
1
Acreo Swedish ICT AB, SWEDEN, 2VTT, FINLAND, 3Danish Technological Institute (DTI), DENMARK,
4SINTEF, and 5Plasto, NORWAY..........................................................................................................................................................................................

Materials, Fabrication & Packaging Technologies
3-D Structures
M3P.027

BIOCOMPATIBLE MICROFABRICATED MAGNETIC CYLINDERS AS CONTRAST AGENTS FORMAGNETIC RESONANCE IMAGING
C. Wang1, X. Wang1, S. Anderson2, and X. Zhang1
1
Boston University, USA and 2Boston University Medical Center, USA..........................................................................................................................................................................................

M3P.028

FABRICATION OF STRESS-INDUCED SELF-ROLLED METAL/INSULATOR BIFILM MICROTUBE
WITH MICROMESH WALLS
K.N. Lee1, Y.T. Seo2, J.-M. Kim3, Y.-K. Kim2, M.H. Lee1, and W.K. Seong11
Korea Electronics Technology Institute (KETI), SOUTH KOREA, 2Seoul National University, SOUTH KOREA, and3
Chonbuk National University, SOUTH KOREA..........................................................................................................................................................................................

M3P.029

POST-CMOS ON-CHIP INTEGRATION OF 3D MEMS INDUCTORS USING A NOVEL CHIPEMBEDDING TECHNIQUE
M.K. Yapici1, J.M. Hong2, J. Zou3, and K. Balareddy4
1
Khalifa University, UAE, 2Samsung Electronics, SOUTH KOREA, 3Texas A&M University, USA, and4
University of Michigan, USA..........................................................................................................................................................................................

M3P.030

WATER-SOLUBLE SACRIFICIAL LAYER ENABLES ULTRA LOW-COST LOC INTEGRATION OF
MAGNETIC RESONANCE MICROCOILS WITH 100% FILLING FACTOR.
O.G. Gruschke, R. Kamberger, J. Höfflin, and J.G. Korvink
University of Freiburg - IMTEK, GERMANY..........................................................................................................................................................................................

Films & Nanostructures
M3P.031

ANALYSIS OF COTTON-LIKE SILICA CONTAMINANTS INDUCED BY OXYGEN CONTAINING
PLASMA STRIPPING OF ORGANIC STRUCTURES ON SILICON WAFER
D.D. She, L.R. Zhao, Z.Q. Wang, X.Y. Ma, and W.G. Wu
Peking University, CHINA..........................................................................................................................................................................................

M3P.032

FORMATION OF A SiO2/SI3N4/SiO2 ELECTRET ON A SILICON SUBSTRATE
M.M. Crain, S. McNamara, and R. Keynton
University of Louisville, USA..........................................................................................................................................................................................

M3P.033

LOW-COST AND FLEXIBLE VEGF SENSORS BASED ON MICROFLUIDIC INDUCED TUNABLE
GRAPHENE FILMS
B. Zhang1, R. Lezzi2, and T. Cui1
1
University of Minnesota, USA and 2Mayo Clinic, USA..........................................................................................................................................................................................

M3P.034

A SOI-CMOS COMPATIBLE SMART YARN TECHNOLOGY
H. Tu and Y. Xu
Wayne State University, USA..........................................................................................................................................................................................

Materials Characterization
M3P.035

EVALUATION OF SILICON FRACTURE STRENGTH DEPENDENCE ON STEALTH DICING LAYERS
FOR “CLEAVE-BEFORE-USE” MEMS FREESTANDING CANTILEVER PROBES
M. Kubota, K. Hosaka, M. Sugiyama, and Y. Mita
University of Tokyo, JAPAN..........................................................................................................................................................................................

M3P.036NOVEL PARYLENE FABRICATION TECHNOLOGIES FOR MICROFLUIDICS SYSTEMS WITH
REDUCED MASS, VOLUME, AND POWER CONSUMPTION
P. Satsanarukkit1 and J.J. van Zyl21California Institute of Technology, USA and 2Jet Propulsion Lab, USA..........................................................................................................................................................................................

M3P.037

THE PLASTIC AND CREEP BEHAVIOR OF SILICON MICROSTRUCTURE AT HIGHTEMPERATURE
S.K. Yao, D.H. Xu, B. Xiong, and Y.L. Wang
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................

Packaging
M3P.038

RELEASE OF MOVING SILICON MICROSTRUCTURES EMBEDDED IN A BONDED MULTI-WAFER
STACK USING DRIE
R.J. Hegert, W. Karl, and A.S. Holmes
Imperial College London, UK..........................................................................................................................................................................................

M3P.039

VERY HIGH ASPECT RATIO THROUGH SILICON VIAS (TSVS) USING WIRE BONDING
S. Schröder, A.C. Fischer, G. Stemme, and F. Niklaus
KTH Royal Institute of Technology, SWEDEN..........................................................................................................................................................................................

M3P.040

WAFER-TO-WAFER TRANSFER PROCESS OF BARIUM STRONTIUM TITANATE METALINSULATOR-METAL STRUCTURES BY LASER PRE-IRRADIATION AND GOLD-GOLD BONDING
FOR FREQUENCY TUNING APPLICATIONS
T. Samoto1, H. Hirano1, T. Somekawa2, K. Hikichi1, M. Fujita2, M. Esashi1, and S. Tanaka2
1
Tohoku University, JAPAN and 2Institute for Laser Technology, JAPAN..........................................................................................................................................................................................

Patterning Printing & Etching
M3P.041

HIGHLY UNIFORM AND CONTROLLABLE MICROPATTERNING OF A HYDROGEL ON
MICROCANTILEVER SENSORS
I. Lee and J. Lee
Sogang University, SOUTH KOREA..........................................................................................................................................................................................

M3P.042

MULTILAYER PASSIVE RF MICROFABRICATION USING JET-PRINTED AU NANOPARTICLE INK
AND AEROSOL-DEPOSITED DIELECTRIC
R.C. Roberts and N.C. Tien
University of Hong Kong, HONG KONG..........................................................................................................................................................................................

M3P.043ULTRA-HIGH ASPECT RATIO TRENCHES IN SINGLE CRYSTAL SILICON WITH EPITAXIAL GAPTUNING
E.J. Ng, C.-F. Chiang, Y. Yang, V.A. Hong, C.H. Ahn, and T.W. Kenny
Stanford University, USA..........................................................................................................................................................................................

Nanoscale Materials, Devices & Fabrication
Bio/Chemical Sensor
M3P.044

A MICROCALORIMETER WITH IN-SITU SYNTHESIZED NANOTUBE ADSORBER FOR TRACE
ENERGETIC SUBSTANCE DETECTION
W.Z. Ruan, Y.C. Li, Z.M. Tan, and Z.Y. Wang
Tsinghua University, CHINA..........................................................................................................................................................................................

M3P.045

EFFECT OF INTERFACIAL PDNI CONCENTRATION ON TIME RESPONSE OF SI-BASEDELECTRODEPOSITED HYDROGEN SENSORS
L. Dong1, C.H. de Groot1, A. Usgaocar 1, and V. Chavagnac2
1
University of Southampton, UK and 2Géosciences Environnement Toulouse (GET), FRANCE..........................................................................................................................................................................................

M3P.046HYBRID ALIGNED ZINC OXIDE NANOWIRES ARRAY ON CVD GRAPHENE FOR HYDROGENSENSING
J.W. Liu1, J. Wu1, M.Z. Ahmad2, and W. Wlodarski2
1
University of Kansas, USA and 2RMIT University, AUSTRALIA..........................................................................................................................................................................................

M3P.047

COPPER(II) OXIDE NANOWIRE ARRAY HYDROGEN SENSOR VIA FACILE LARGE AREA
CONTACT INTEGRATION
K. Limkrailassiri, A. Kozinda, and L. Lin
University of California, Berkeley, USA..........................................................................................................................................................................................

Fabrication
M3P.048

EFFICIENT TRANSFER OF CARBON NANOTUBES USING AN LOR RESIST SACRIFICIAL LAYER
V. Döring, T. Süss, and C. Hierold
ETH Zürich, SWITZERLAND..........................................................................................................................................................................................

M3P.049

LARGE AREA METAL NANOWIRE ARRAYS WITH SUBMICRON PITCH AND TUNABLE
SUB-20 NM NANOGAPS
L. Le Thi Ngoc1, M. Jin2, A. van den Berg1, and E.T. Carlen1
1
MESA+, University of Twente, THE NETHERLANDS and 2South China Normal University, CHINA..........................................................................................................................................................................................

M3P.050

MULTISITE WIDE-AREA DEPTH TRANSFERS OF NANOPARTICLES INTO A SOFT MATERIAL VIA
NANOTIP PROBE ARRAYS
A. Goryu, R. Numano, M. Ishida, and T. Kawano
Toyohashi University of Technology, JAPAN..........................................................................................................................................................................................

Nanodevices
M3P.051

BOTTOM-UP SILICON NANOWIRE RESONATORS FOR NANOMECHANICAL SENSING:
CONTROLLED FABRICATION TECHNOLOGY AND HIGH-SENSITIVITY FREQUENCYMODULATION TRANSDUCTION
M. Sansa1, M. Fernandez-Regulez1, M. Serra-Garcia1, A. San Paulo1,2, and F. Perez-Murano1
1
Instituto de Microelectrónica de Barcelona (IMB), SPAIN and
2
Instituto de Microelectrónica de Madrid, (IMM), SPAIN..........................................................................................................................................................................................

M3P.052

NANO-DIAMOND VACUUM MEMS FOR RF APPLICATIONS
N. Heidrich1, J. Hees1, V. Zuerbig1,2, D. Iankov1,2, W. Pletschen1, R.E. Sah1, B. Raynor1, L. Kirste1,
C.E. Nebel1, O. Ambacher1,2, and V. Lebedev1
1
Fraunhofer Institut für Angewandte Festkörperphysik (IAF), GERMANY and2
University of Freiburg – IMTEK, GERMANY..........................................................................................................................................................................................

Nanomaterial & Characterization
M3P.053

A MEMS PLATFORM FOR THE DIELECTROPHORETIC AND THERMOELECTRIC
CHARACTERIZATION OF BI2TE3 NANOWIRES
Z. Wang1, W. Toellner3, S.S. Adhikari1, M. Kroenier1, D. Kojda2, R. Mitdank2, S.F. Fischer2, K. Nielsch3,
and P. Woias1
1
University of Freiburg - IMTEK, GERMANY, 2Humboldt-Universität zu Berlin, GERMANY, and3
Universität Hamburg, GERMANY..........................................................................................................................................................................................

M3P.054

MICROFLUIDIC SYNTHESIS OF FLUORESCENT MAGNETONANOPARTICLES AND
CHARACTERIZATION
H.J. Joen1, N. Nguyen Thi1,2, B.H. Kwon1, D.T. Lam2, and J.S. Go1
1
Pusan National University, SOUTH KOREA and 2Vietnam Academy of Science and Technology, VIETNAM..........................................................................................................................................................................................

M3P.055

SWITCHABLE WETTING & FLEXIBLE SIC THIN FILM WITH NANOSTRUCTURES
X.S. Zhang, B. Meng, F.Y. Zhu, W. Tang, and H.X. Zhang
Peking University, CHINA..........................................................................................................................................................................................

Chemical Sensors & Microsystems
Chemical Sensors
M3P.056

DESIGN AND EVALUATION OF MICROHEATER COMBINED QCM ARRAY FOR THERMALDESORPTION SPECTROSCOPY
J. Sakai, N. Iida, M. Sohgawa, and T. Abe
Niigata University, JAPAN..........................................................................................................................................................................................

M3P.057

NOVEL FORMAT CHROMATOGRAPHIC COLUMNS FOR IMPROVED OVERALL ANALYTICALPERFORMANCE
D.E. Gaddes III, J.L. Westland, F.L. Dorman, and S. Tadigadapa
Pennsylvania State University, USA..........................................................................................................................................................................................

M3P.058PROPOSITION AND FABRICATION OF AMPLIFIED REDOX SENSOR (ARS) FOR HIGH SENSITIVECHEMICAL ANALYSIS
S. Takahashi1, M. Futagawa1, M. Ishida1, and K. Sawada1,2
1
Toyohashi University of Technology, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN

Environmental Sensors
M3P.059DISPOSABLE COPPER-BASED ELECTROCHEMICAL MICROSENSOR FOR ANALYSIS OF LEAD IN
ENVIRONMENTAL SAMPLES
X. Pei1, W. Kang1, W. Yue1, A. Bange2, W.R. Heineman1, and I. Papautsky1
1
University of Cincinnati, USA and 2Xavier University, USA..........................................................................................................................................................................................

FET Based Gas Sensors
M3P.060

IDENTIFICATION OF AMMONIA AND CARBON MONOXIDE BASED ON THE HYSTERESIS OF A
GAS-SENSITIVE SIC FIELD EFFECT TRANSISTOR
M. Bastuck1, C. Bur1, A. Lloyd Spetz2, M. Andersson2, and A. Schütze1
1
Saarland University, GERMANY and 2Linköping University, SWEDEN..........................................................................................................................................................................................

Gas Sensors
M3P.061

BENZENE GAS DETECTION USING A MOSFET-BJT HYBRID MODE OPERATEDGATED LATERAL BJT
H. Yuan1, H.M. Jeong2, J.S. Lee2, B.H. Kang2, S.H. Yeom2, S.W. Lee2, S.H. Kim2, J.K. Shin2, and S.W. Kang2
1
Beijing University of Aeronautics and Astronautics, CHINA and 2Kyungpook National University, SOUTH KOREA..........................................................................................................................................................................................

M3P.062COMBINED CHEMORESISTIVE AND CHEMOCAPACITIVE MICROSENSOR STRUCTURES
J.-J. Su1, L.A. Beardslee2, and O. Brand1
1
Georgia Institute of Technology, USA and 2University at Albany (SUNY), USA..........................................................................................................................................................................................

M3P.063

EXPLOSIVES DETECTION BY USING 8-MICROCANTILEVER CHIPS WITH SELF-HEATINGELEMENTS MODIFIED WITH EXCHANGED BEA TYPE ZEOLITES
I. Pellejero1, A. Peralta1, M.A. Urbiztondo1,2, J. Sesé1, M.P. Pina1,3, and J. Santamaría1,3
1
Universidad de Zaragoza, SPAIN, 2Centro Universitario de la Defensa (CUD), SPAIN, and 3Biomedical Research
Networking Centre on Bioengineering, Biomaterials and Nanomedicine (CIBER-BBN), SPAIN..........................................................................................................................................................................................

M3P.064HIGHLY SENSITIVE WAVEGUIDE SENSOR FACILITATED BY A BROADLY TUNABLE QUANTUM
CASCADE LASER
G. Ramer1, M. Brandstetter1, J. Kasberger2, A. Saeed3, and B. Lendl1
1
Vienna University of Technology, AUSTRIA, 2Research Center for Non-Destructive Testing, AUSTRIA, and3Center for Surface- and Nanoanlytics, AUSTRIA..........................................................................................................................................................................................

M3P.065

POLYANILINE-FUNCTIONALIZED POLYACARBONATE FILTER AS A FLOW-THROUGH GASSENSOR
P. Kunzo, P. Lobotka, V. Šmatko, and I. Vávra
Institute of Electrical Engineering SAS, SLOVAKIA..........................................................................................................................................................................................

M3P.066

VOC DETECTION USING AN ALL POLYMER FLEXURAL PLATE WAVE SENSOR
J. Berring, C. Sielmann, B. Stoeber, and K. Walus
University of British Columbia, CANADA..........................................................................................................................................................................................

Humidity Sensors
M3P.067

A PASSIVE WIRELESS GRAPHENE OXIDE BASED HUMIDITY SENSOR AND ASSOCIATEDPORTABLE TELEMETRY UNIT
C. Zhang, J.Q. Huang, and Q.A. Huang
Southeast University, CHINA..........................................................................................................................................................................................

M3P.068

NOVEL SCREEN PRINTED HUMIDITY SENSOR ON TEXTILES FOR SMART TEXTILEAPPLICATIONS
C. Kutzner1, R. Lucklum1, R. Torah2, S. Beeby2, and J. Tudor2
1
University Magdeburg, GERMANY and 2University of Southampton, UK..........................................................................................................................................................................................

Hydrogen Gas Sensors
M3P.069

HIGH PERFORMANCE FLEXIBLE HYDROGEN SENSOR BASED ON PD-COATED ZNO NANORODSON POLYIMIDE TAPE
T.R. Rashid, D.T. Phan, and G.S. Chung
University of Ulsan, SOUTH KOREA..........................................................................................................................................................................................

Nanowire Based Sensors
M3P.070

GOLD NANOPARTICLE-CARBON NANOWIRE HYBRID INTERDIGITATED ARRAY
NANOELECTRODES FOR ENHENCING ELECTROCHEMICAL SIGNAL AMPLIFICATION
Y. Lim, B. Lee, J. Heo, and H. Shin
Ulsan National Institute of Science and Technology (UNIST), SOUTH KOREA..........................................................................................................................................................................................

Bio-Sensors & Bio-Microsystems
Cell Sensing & Manipulation
M3P.071

A MICROFLUIDIC-BASED PLATFORM FOR IN-VITRO STUDIES OF CELL SIGNALING IN BLOOD
VESSELS
R. Riahi, Y. Yang, H. Kim, L. Jiang, P.K. Wong, and Y. Zohar
University of Arizona, USA..........................................................................................................................................................................................

M3P.072

LABEL-FREE BLOOD CELLS SEPARATION AND ENRICHMENT FROM WHOLE BLOOD BY HIGHTHROUGHPUT HYDRODYNAMIC AND INERTIAL FORCE
R.-G. Wu, H.-C. Tseng, H.-Y. Chang, and F.-G. Tseng
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

M3P.073

LIVER ON A CHIP: ENGINEERING THE LIVER SINUSOID
Y.B. Kang, T.R. Sodunke, J. Cirillo, M.J. Bouchard, and H. Noh
Drexel University, USA..........................................................................................................................................................................................

M3P.074

MULTI-STAGE, SOLVENT-CONTROLLED ROUTING FOR AUTOMATED ON-DISC EXTRACTION
OF TOTAL RNA FROM BREAST CANCER CELL LINE HOMOGENATEJ. Gaughran1, N. Dimov1, E. Clancy2, T. Barry2, T.J. Smith2, and J. Ducrée1
1
Dublin City University, IRELAND and 2National University of Ireland, IRELAND..........................................................................................................................................................................................

M3P.075

SEPARATION OF TUMOR CELLS FROM BRONCHOALVEOLAR LAVAGE FLUID (BALF) VIA
MICROGROOVES ENHANCED IMMISCIBLE FILTRATION ASSISTED BY SURFACE TENSION(ME-IFAST)
Y. Chen1, J. Zhao1,2, Y. Liu1, M. Yuan1,2, W. Wang1,3, M. Chu2, Y. Wang2, and H. Li1
1
Hospital of Peking University, CHINA, 2Peking University, CHINA, and 3National Key Laboratory of Science andTechnology on Micro/Nano Fabrication, CHINA..........................................................................................................................................................................................

Fluid Manipulation in Microsystems
M3P.076

A PNEUMATIC OPEN-SURFACE MICROFLUIDIC PLATFORM FOR DROPLET MANIPULATION
C.J. Huang, M.S. Ke, and J.T. Yang
National Taiwan University, TAIWAN..........................................................................................................................................................................................

M3P.077

BIO-AMPLIFYING LAB-ON-A-CHIP FOR ANTIPSYCHOTIC CLOZAPINE TREATMENTMONITORING
H. Ben-Yoav, T.E. Winkler, S.E. Chocron, S.M. Restaino, G.R. Costa, E. Kim, D.L. Kelly, G.F. Payne,
and R. Ghodssi
University of Maryland, USA..........................................................................................................................................................................................

M3P.078

FLEXIBLE NEURAL PROBE INTEGRATED MICROCHANNEL AND OPTICAL FIBER FOR
MULTIPLE STIMULATION
B.-Y. Lee1, J.-Y. Jin1, J.-H. Park2, and J. Kim1
1
Korea Institute of Science and Technology, SOUTH KOREA and 2Korea University, SOUTH KOREA..........................................................................................................................................................................................

M3P.079

IN SITU PROTEIN SYNTHESIS ON GLASS SUBSTRATE WITH ACOUSTIC MICRODROPLETEJECTOR WITH AIR-CAVITY LENS FORMED BY MICROMACHINED SILICON
Y. Choe, L. Wang, and E.S. Kim
University of Southern California, USA..........................................................................................................................................................................................

M3P.080

MICROFLUIDIC IMPACT PRINTING (MI-PRINTING) FOR BIOMEDICAL APPLICATIONS
Y. Ding, E. Huang, K.S. Lam, and T. Pan
University of California, Davis, USA..........................................................................................................................................................................................

M3P.081

SAMPLE LOADING CONSIDERATION FOR NANOFLUIDICS CRYSTAL BASED BIOSENSING
J. Sang1, H. Du1, W. Wang1,2, M. Chu1, Y. Wang1, H. Li3, H.A. Zhang1,2, W. Wu1,2, and Z. Li1,2
1
Peking University, CHINA, 2National Key Laboratory of Science and Technology on Micro/Nano Fabrication,
CHINA, and 3Hospital of Peking University, CHINA..........................................................................................................................................................................................

Manipulation & Detection of Bacteria
M3P.082

AUTOMATED RAPID DETECTION OF FOODBORNE PATHOGENS
A. Bajwa1, S.T. Tan2, A.M. Parameswaran2, and B. Bahreyni2
1
Alberta Health Services, CANADA and 2Simon Fraser University, CANADA..........................................................................................................................................................................................

M3P.083

CNTS GATED NANOFLUIDIC SYSTEM FOR SINGLE BACTERIUM DETECTION BY GNPS-BASEDREDOX SIGNAL AMPLIFICATION
P.-C. Wen, R.-G. Wu, H.-Y. Chang, and F.-G. Tseng
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

Sensing in Biosystems
M3P.084

A CMOS MICROMANIPULATION AND CAPACITIVE IMMUNOSENSOR ARRAY TOWARDSSINGLE MAGNETIC MICROBEAD DETECTION
A.-Y. Chang and M.S.-C. Lu
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

M3P.085

A NEW REAL TIME BIOMIMETIC MEMBRANE BIOSENSOR BASED ON A CAPACITIVE READOUTASIC FOR ANTIBIOTICS
S. Kißler1, T. Zimmermann1, S. Pierrat1, B. Klein1, S. Schiller2, and M. Kraft1
1
Fraunhofer IMS, GERMANY and 2FRIAS, GERMANY..........................................................................................................................................................................................

M3P.086

IMPROVED ENZYME IMMOBILAZATION FOR ENHANCED BIOELECTROCATALYTIC ACTIVITY
OF CHOLINE SENSOR
Y.T. Wang, J. Wang, H. Peng, and J.Z. Zhu
East China Normal University, CHINA..........................................................................................................................................................................................

M3P.087

LIGATION-BASED MUTATION DETECTION AND RCA IN SURFACE UN-MODIFIED OSTE+POLYMER MICROFLUIDIC CHAMBERS
F. Saharil1, A. Ahlford2, M. Kühnemund2, M. Skolimowski3, A. Conde4, M. Dufva3, M. Nilsson2, M. Brivio2,
W. van der Wijngaart1, and T. Haraldsson1
1
KTH Royal Institute of Technology, SWEDEN, 2Stockholm University, SWEDEN,
3
Technical University of Denmark, DENMARK, and 4Universidad Nacional de Tucumán, ARGENTINA..........................................................................................................................................................................................

M3P.088

REAL-TIME ANALYSIS OF GLUTAMATE REGULATED FUNCTION IN NEURONS USING LABELFREE POTASSIUM IMAGING SYSTEM
A. Kono1, T. Sakurai1,2, T. Hattori1,2, K. Okumura1,2, M. Ishida1,2, and K. Sawada1,2
1
Toyohashi University of Technology, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

Medical Microsystems
M3P.089

A MICROFLUIDIC SYSTEM WITH VOLUME SENSOR AND DIELECTRIC GLUCOSE SENSOR FOR
CONTINUOUS GLUCOSE MONITORING
D. Li1, H. Yu1, X. Huang2, B. Song2, Y. Jia2, Y. Ji1, N. Li3, J. Chen3, K. Xu1, and Q. Lin2
1
Tianjin University, CHINA, 2Columbia University, USA, and 3Peking University, CHINA..........................................................................................................................................................................................

M3P.090

ANALYSIS OF CELL RATIO AND DRUG CONCENTRATION INFLUENCE IN FEIGNING LUNGCANCER MODEL
K.-W. Chang1, T.-S. Chen1, S. Sivashankar1, M.-Y. Chen1, K.-Y. Lee2, and C.-H. Liu1
1
National Tsing Hua University, TAIWAN and 2Chang Gung Memorial Hospital, TAIWAN..........................................................................................................................................................................................

M3P.091

FABRICATION OF HOLLOW MICRONEEDLE ARRAYS USING ELECTRODEPOSITION OF METALONTO SOLVENT CAST CONDUCTIVE POLYMER STRUCTURES
I. Mansoor, Y. Liu, U.O. Häfeli, and B. Stoeber
University of British Columbia, CANADA..........................................................................................................................................................................................

M3P.092

FULL INTEGRATION OF A LIVER ASSAY PANEL ON A CENTRIFUGAL MICROFLUIDICPLATFORM
C.E. Nwankire, R. Burger, T. O’Connell, T. Glennon, and J. Ducrée
Dublin City University, IRELAND..........................................................................................................................................................................................

M3P.093

MICROMACHINED BIOCOMPATIBLE CATHETER FLOW SENSOR WITH TRENCH STRUCTURE
T. Matsuyama, Y. Yamazaki, M. Shikida, M. Matsushima, and T. Kawabe
Nagoya University, JAPAN..........................................................................................................................................................................................

M3P.094

TOWARDS A WIRELESS AND FULLY-IMPLANTABLE ECOG SYSTEM
E. Tolstosheeva, J. Hoeffmann, J. Pistor, D. Rotermund, T. Schellenberg, D. Boll, T. Hertzberg,
V. Gordillo-Gonzalez, S. Mandon, D. Peters-Drolshagen, M. Schneider, K. Pawelzik, A. Kreiter, S. Paul,and W. Lang
University of Bremen, GERMANY..........................................................................................................................................................................................

Microfluidics
Droplet Based Microfluidics
M3P.095

FINGER-TRIGGERED DIGITAL MICROFLUIDICS
C. Peng, C.-J. Kim, and Y.S. Ju
University of California, Los Angeles, USA..........................................................................................................................................................................................

Microfluidics
M3P.096

A MICROFLUIDIC DEVICE TO LOAD MULTIPLE MECHANICAL STIMULATORS WITH
DIFFERING STRAIN MAGNITUDES WITH A SINGLE PUMP
Q. Wang and Y. Zhao
Ohio State University, USA..........................................................................................................................................................................................

M3P.097

AUTONOMOUS MICROFLUIDIC CONTROL BY MIXED POTENTIALS GENERATED ON
COMPOSITE METAL ELECTRODES
K. Kojima, M. Yokokawa, and H. Suzuki
University of Tsukuba, JAPAN..........................................................................................................................................................................................

M3P.098

HYBRID TECHNOLOGY (3D ADDITIVE PRINTING – SILICON - GLASS) MULTILINEEVAPORATIVE CONCENTRATOR FOR WATER QUALITY MONITORING SYSTEM
W.P. Bula1,2,3, Y. Takahata1,2, K. Aritome1,2, Y. Murakami1,2, J.G.E. Gardeniers3, and R. Miyake1,2
1
Hiroshima University, JAPAN, 2Japan Science and Technology Agency (JST), JAPAN, and3
MESA+, University of Twente, THE NETHERLANDS..........................................................................................................................................................................................

M3P.099

PRESSURE GAIN IN SINGLE-LAYER MICROFLUIDICS DEVICES VIA OPTOFLUIDICLITHOGRAPHY
C.C. Glick, R.D. Sochol, K.T. Wolf, N. Shahmohhamadi, S. Miller-Hack, V. Jayaprakash, K. Iwai,
L.P. Lee, and L. Lin
University of California, Berkeley, USA..........................................................................................................................................................................................

M3P.100

ROBUST MICRODEVICE MANUFACTURING BY DIRECT LITHOGRAPHY AND ADHESIVE-FREE
BONDING OF OFF-STOICHIOMETRY THIOL-ENE-EPOXY (OSTE+) POLYMER
A. Vastesson1, X. Zhou1, N. Sandström1, F. Saharil1, O. Supekar2, G. Stemme1, W. van der Wijngaart1,
and T. Haraldsson1
1
KTH Royal Institute of Technology, SWEDEN and 2India Institute of Technology, INDIA..........................................................................................................................................................................................

Microfluidics with Cells
M3P.101

A NOVEL OXYGEN TENSION PROGRAMMABLE MICROFLUIDIC SYSTEM (oPROMs) FOR IN
VITRO CELL BIOLOGY STUDIES
N. Rajan1, A. Narayan1, Z. Wu2, P. Wu1, C.H. Ahn2, R.K. Narayan1, and C. Li1
1
Feinstein Institute for Medical Research, USA and 2University of Cincinnati, USA..........................................................................................................................................................................................

M3P.102

CONFOCAL LASER SCANNING MICROSCOPIC OBSERVATION OF DEFORMATION, BIOLOGICALREACTION, AND CONTACT OF CELLS USING MECHANICAL TRAPPING SYSTEM WITHPARYLENE MICRO FILTER
Y. Abe1,3, K. Kamiya1, T. Osaki1, R. Kawano1, N. Miki3, and S. Takeuchi1,2
1Kanagawa Academy of Science and Technology, JAPAN, 2University of Tokyo, JAPAN, and3
Keio University, JAPAN..........................................................................................................................................................................................

M3P.103

WELL-BASED MICROFLUIDIC CHIP FOR MONITORING NON-CONTACTING CELL-TO-CELL
INTERACTIONS THROUGH MICROCHANNEL
M. Jeon1, H.J. Tak1, Y.K. Kim1, E.-S. Yoon1, S. Shin2, and I.J. Cho11
Korea Institute of Science and Technology, SOUTH KOREA and 2Korea University, SOUTH KOREA..........................................................................................................................................................................................

Composite Materials/Polymers, Devices & Fabrication
M3P.104

ALIGNED ELECTROSPUN PVDF-TrFE NANOFIBERS FOR FLEXIBLE PRESSURE SENSORS ONCATHETER
T. Sharma1, J. Langevine1, S. Naik1, K. Aroom2, B. Gill2, and J.X.J. Zhang1
1
University of Texas, Austin, USA and 2University of Texas Health Science Center, USA..........................................................................................................................................................................................

M3P.105

FABRICATION OF HYDROGEL PARTICLES WITH TANTALUM OXIDE NANOPARTICLEPAYLOADS AS COMPUTED TOMOGRAPHY CONTRAST AGENTS
X. Wang1, C. Wang1, S. Anderson2, and X. Zhang1
1
Boston University, USA and 2Boston University Medical Center, USA..........................................................................................................................................................................................

M3P.106

LAB ON A SOFT ROBOT: ELECTRICALLY CONTROLLED TUNING FORK SHAPED IPMC
CLAMPING ACTUATOR WITH ULTRASONIC IMAGING AND DISPLACEMENT SELF-DETECTINGCAPABILITIES
G.-H. Feng and W.-L. Huang
National Chung Cheng University, TAIWAN..........................................................................................................................................................................................

M3P.107

TUNABLE DIELECTRIC CONSTANTS AND MECHANICAL PROPERTIES OF PDMS AND
CONDUCTING POLYMER NANOWIRE COMPOSITES
P. Du, X. Lin, and X. Zhang
Boston University, USA..........................................................................................................................................................................................

Energy & Power MEMS
Electro Chemical Energy Storage
M3P.108

IN-SITU NANOMECHANICAL CHARACTERIZATION OF ELECTROCHEMICAL CYCLES IN
LITHIUM ION BATTERIES
J.H. Yang, J.C.M. Chen, and M.M.C. Cheng
Wayne State University, USA..........................................................................................................................................................................................

Electro Static/Electret Harvesters
M3P.109

ELECTROSTATIC MICRO TRANSFORMER USING POTASSIUM ION ELECTRET FORMING ON A
COMB-DRIVE ACTUATOR
H. Hayashi1, M. Suzuki1, A. Mori1, T. Sugiyama2, and G. Hashiguchi2
1
AOI Electronics Co., Ltd., JAPAN and 2Shizuoka University, JAPAN..........................................................................................................................................................................................

Harvesting Energy from Mechanical Vibrations
M3P.110A COUPLED BISTABLE STRUCTURE FOR BROADBAND VIBRATION ENERGY HARVESTING
D. Zhu and S.P. Beeby
University of Southampton, UK..........................................................................................................................................................................................

M3P.111

AN EFFICIENT INTEGRATED INTERFACE ELECTRONICS FOR ELECTROMAGNETIC ENERGYHARVESTING FROM LOW VOLTAGE SOURCES
H. Uluşan, K. Gharehbaghi, Ö. Zorlu, A. Muhtaroǧlu, and H. Külah
Middle East Technical University (METU), TURKEY..........................................................................................................................................................................................

M3P.112

DIRECTLY AND PARAMETRICALLY EXCITED BI-STABLE VIBRATION ENERGY HARVESTERFOR BROADBAND OPERATION
Y. Jia and A.A. Seshia
University of Cambridge, UK..........................................................................................................................................................................................

M3P.113

TRI-STABLE BEHAVIOR IN MECHANICAL OSCILLATORS TO IMPROVE THE PERFORMANCEOF VIBRATION ENERGY HARVESTERS
C. Trigona, F. Maiorca, B. Andò, and S. Baglio
University of Catania, ITALY..........................................................................................................................................................................................

Magnetic Sensors/Voltage Sensors
M3P.114

A MEMS TORSIONAL RESONANT MAGNETOMETER FOR THE ATTITUDE DETERMINATION IN
SPACED.H. Ren, M.Y. Cui, L.Q. Wu, T.W. Guo, C.T. Xu, and Z. You
Tsinghua University, CHINA..........................................................................................................................................................................................

M3P.115

A THIN FILM PASSIVE MAGNETIC FIELD SENSOR OPERATED AT 425 MHZ
B. Li and J. Kosel
King Abdullah University of Science and Technology, SAUDI ARABIA..........................................................................................................................................................................................

Microfuel Cells
M3P.116

ON DEMAND MICRO-FUEL-DROPLETS SUPPLY SYSTEM FOR SELF-SUSTAINED DIRECTMETHANOL FUEL CELL
T.-W. Liu1, W. Ling2, Y.-C. Su1, S.-H. Liang2, C.-H. Tai2, and F.-G. Tseng1,31National Tsing Hua University, TAIWAN, 2Industrial Technology Research Institute (ITRI), TAIWAN, and3
Academia Sinica, TAIWAN..........................................................................................................................................................................................

Piezo/Pyro Electric Energy Harvester
M3P.117

LEAD-FREE PIEZOELECTRIC MEMS ENERGY HARVESTERS OF STAINLESS STEELCANTILEVERS
Y. Tsujiura1, E. Suwa1, H. Nida1, K. Suenaga2, K. Shibata2, and I. Kanno1
1
Kobe University, JAPAN and 2Hitachi Cable, Ltd., JAPAN..........................................................................................................................................................................................

Thermoelectric Thermal Energy Harvesters
M3P.118

EXPLORING SCREEN PRINTING TECHNOLOGY ON THERMOELECTRIC ENERGY HARVESTING
WITH PRINTING COPPER-NICKEL AND BISMUTH-ANTIMONY THERMOCOUPLES
Z. Cao, E. Koukharenko, R.N. Torah, and S.P. Beeby
University of Southampton, UK..........................................................................................................................................................................................

M3P.119SILICON-BASED THERMOGENERATOR FOR WIDE TEMPERATURE RANGE APPLICATIONSEMBEDDED USING METAL-SPRAY-DEPOSITION
A. Ibragimov1, V. Uhlenwinkel2, N. Ellendt2, L. Mädler2, and W. Lang1
1
University of Bremen, GERMANY and 2Foundation Institute for Material Science, GERMANY..........................................................................................................................................................................................

M3P.120

TWO-LAYER PROCESS FOR A MICRO THERMOELECTRIC CROSS-PLANE GENERATOR WITH
ELECTROPLATING AND REFLOW SOLDERING
R. Roth, R. Rostek, G. Lenk, M. Kratschmer, K. Cobry, and P. Woias
University of Freiburg - IMTEK, GERMANY..........................................................................................................................................................................................

RF MEMS, Resonators & Oscillators
Resonators Oscillators
M3P.121

A LOW PHASE-NOISE PIERCE OSCILLATOR USING A PIEZOELECTRIC-ON-SILICA
MICROMECHANICAL RESONATOR
Z.Z. Wu, V.A. Tharkar, A. Peczalski, and M. Rais-Zadeh
University of Michigan, USA..........................................................................................................................................................................................

M3P.122

DIGITALLY PROGRAMMABLE RESONATOR BY PZT-SOI PROCESS
N. Lafitte1, T. Takahashi1, M. Tani2, M. Akamatsu2, Y. Yasuda2, H. Fujita1, and H. Toshiyoshi1
1
University of Tokyo, JAPAN and 2Stanley Electric Company, Ltd., JAPAN..........................................................................................................................................................................................

M3P.123HIGHER-ORDER LAMÉ-MODE SQUARE MICRORESONATOR WITH IMPROVED QUALITY
FACTOR AND f-Q PRODUCT
M.A. Rasouli, M.S. HajHashemi, and B. Bahreyni
Simon Fraser University, CANADA..........................................................................................................................................................................................

M3P.124MECHANICAL COUPLING OF DUAL BREATHE-MODE RING RESONATOR
Y. Yang, E.J. Ng, C.H. Ahn, V.A. Hong, E. Ahadi, and T.W. Kenny
Stanford University, USA..........................................................................................................................................................................................

M3P.125

SEGMENTED ELECTRODE EXCITATION OF ALUMINUM NITRIDE CONTOUR MODERESONATORS TO OPTIMIZE THE DEVICE FIGURE OF MERITC. Cassella, J. Segovia-Fernandez, and G. Piazza
Carnegie Mellon University, USA..........................................................................................................................................................................................

RF MEMS Waveguides
M3P.126

100 GHZ SOI GAP WAVEGUIDES
S. Rahiminejad1, A. Algaba Brazález1, H. Raza1, E. Pucci1, S. Haasl2, P.-S. Kildal1, and P. Enoksson1
1
Chalmers University of Technology, SWEDEN and 2Royal Institute of Technology, SWEDEN..........................................................................................................................................................................................

M3P.127LEADING AND TRAILING EDGE HOT SWITCHING DAMAGE IN A METAL CONTACT RF MEMS
SWITCH
A. Basu, R. Hennessy, G. Adams, and N. McGruer
Northeastern University, USA..........................................................................................................................................................................................

Optical MEMS
Infrared Devices
M3P.128

INDIRECT WAVELENGTH SELECTIVE INFRARED MICRO-EMITTER USING SURFACE PLASMONPOLARITON FOR GAS SENSING
T. Sawada1, S. Kumagai1, K. Masuno2, M. Ishii2, S. Uematsu2, and M. Sasaki1
1
Toyota Technological Institute, JAPAN and 2Yazaki Corporation, JAPAN..........................................................................................................................................................................................

Micro Lenses
M3P.129

TUNABLE HYDROGEL MICROLENS WITH BUILT-IN POLYMER WAVEGUIDE AND FIBER
CLAMP FOR MEMS APPLICATIONS
T. Guan, F. Ceyssens, and R. Puers
Katholieke Universiteit Leuven, BELGIUM..........................................................................................................................................................................................

Mirrors
M3P.130

A TIP-TILT-PISTON PIEOELECTRIC SCANNING MICROMIRROR WITH FOLDED PZT UNIMORPH
ACTUATORS
W. Liao1, W. Liu2, J.E. Rogers1, Y. Tang2, B. Wang2, and H. Xie1
1
Unviersity of Florida, USA and 2Southeast University, CHINA..........................................................................................................................................................................................

Optical Devices
M3P.131

DOUBLE-LAYER WIRE GRID POLARIZER FOR IMPROVING EXTINCTION RATIO
A. Isozaki1, T. Kan1, K. Takano2, M. Hangyo2, K. Matsumoto1, and I. Shimoyama1
1
University of Tokyo, JAPAN and 2Osaka University, JAPAN..........................................................................................................................................................................................

Optical Switches/Splitters
M3P.132

WAFER-LEVEL FABRICATED MICRO BEAM SPLITTER BASED ON 45-DEGREE SAW DICING OF
GLASS SUBSTRATE
S. Bargiel1, M. Baránski1, N. Passilly1, B. Guichardaz1, E. Herth1, C. Gorecki1, C. Jia3, J. Frömel2, and M. Wiemer2
1
FEMTO Sciences & Technologies, FRANCE and 2Fraunhofer Institute for Electronic Nanosystems, GERMANY..........................................................................................................................................................................................

Tera Hertz & Plasmonic Devices
M3P.133

A TUNABLE MEMS THZ WAVEPLATE BASED ON ISOTROPICITY DEPENDENT METAMATERIAL
W. Zhang1,2, W. M. Zhu1, H. Cai2, P. Kropelnicki2, A.B. Randles2, M. Tang2, H. Tanoto2, Q.Y. Wu2, J.H. Teng2,
X.H. Zhang2, D.L. Kwong2 and A.Q. Liu1,2
1
Nanyang Technological University, SINGAPORE and2
Agency for Science, Technology and Research (A*STAR), SINGAPORE..........................................................................................................................................................................................

Actuators
M3P.134

INDIVIDUALLY CONTROLLED CONDUCTING POLYMER TRI-LAYER MICROACTUATORS
E.W.H. Jager1, N. Masurkar1, N.F. Nworah1, B. Gaihre2, G. Alici2, and G.M. Spinks2
1
Linköping University, SWEDEN and 2University of Wollongong, AUSTRALIA..........................................................................................................................................................................................

M3P.135

IMPROVEMENT OF HOT SWITCHING LIFETIME IN MEMS DC SWITCHES USING A DRAIN
VOLTAGE-SUSTAINING CAPACITOR
Y.-H. Song, M.-W. Kim, S.-J. Ahn, and J.-B. YOON
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA..........................................................................................................................................................................................

M3P.136MECHANICAL PROPERTIES ANALYZER FOR NANO-SIZE PROTEIN WITH OPTICALLY DRIVEN
NANO-BEAM
N. Shimada1, M. Ikeuchi1,2, and K. Ikuta1
1
University of Tokyo, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

M3P.137

NOMALLY-CLOSE VALVE INTEGRATION FOR PNEUMATIC ACTUATORS
K. Kawai, J. Uchikoshi, K. Arima, and M. Morita
Osaka University, JAPAN..........................................................................................................................................................................................

Theory, Design & Test Methodology
Fluidic Design & Test
M3P.138

A NEW METHOD TO DETERMINE THE INTERNAL PRESSURE AND LEAKAGE RATE OF MEMS
PACKAGES
B. Wang1,2, J. De Coster1, A. Witvrouw2, S. Simone1, M. Wevers2, and I. De Wolf1,2
1
imec, BELGIUM and 2Katholieke Universiteit Leuven, BELGIUM..........................................................................................................................................................................................

Physical MEMS Design
M3P.139

CALIBRATION METHOD FOR A NEW HIGH-G ACCELEROMETER
R. Kuells, H. Dessonet, C. Bohland, S. Nau, and K. Thoma
Ernst-Mach-Institut (EMI), GERMANY..........................................................................................................................................................................................

M3P.140

MICROWAVE REFLECTOMETRY: A HIGH-RESOLUTION TECHNIQUE FOR MEASURING
VIBRATION OF CAPACITIVE MICRORESONATORS
B. Legrand1, D. Ducatteau1, D. Théron1, B. Walter1, and H. Tanbakuchi2
1
Université Lille 1, FRANCE and 2Agilent Technologies, USA..........................................................................................................................................................................................

M3P.141RELIABILITY OF ANCHORS AT SURFACE MICROMACHINED DEVICES IN SHOCKENVIRONMENTS
M. Naumann2, O. Dietze1, A. McNeil2, J. Mehner1, and S. Daniel2
1
Chemnitz University of Technology, GERMANY and 2Freescale Semiconductor Inc., USA..........................................................................................................................................................................................

Switch Design, Simulation & Test
M3P.142DESIGN AND TESTING OF A NEW MEMS CONTACT ELEMENT FOR MICROELECTRONICPROBING BASED ON THE BUCKLING BEAM PRINCIPLE
M. Schnaithmann1, J. Sägebarth1, H. Sandmaier1, P. Vlachakis2, G. Steidle2, A. Weiland2, J. Seekamp2, G. Böhm2,and W. Schäfer2
1
University of Stuttgart, GERMANY and 2Feinmetall GmbH, GERMANY..........................................................................................................................................................................................

M3P.143

OPERATION PRINCIPLES OF MICRO-PLASMA FIELD EFFECT TRANSISTOR
Y. Zhang, P. Pai, F.K. Chowdhury, and M. Tabib-Azar
University of Utah, USA..........................................................................................................................................................................................

Late News
M3P.144

A GAP-CLOSING ELECTROSTATIC ACTUATOR WITH A LINEAR EXTENDED RANGE
B. Rivlin, S. Shmulevich, I. Hotzen, and D. Elata
Technion - Israel Institute of Technology, ISRAEL..........................................................................................................................................................................................

M3P.145

A TRANSCONDUCTIVE GRAPHENE PRESSURE SENSOR
A.M. Hurst1,2, S. Lee1, N. Petrone1, J. VanDeWeert2, A.M. van der Zande1, and J. Hone1
1
Columbia University, USA and 2Kulite Semiconductor Products Inc., USA..........................................................................................................................................................................................

M3P.146

CARBON NANOTUBE/TiO2 NANOTUBE HYBRID FILMS AS RESISTIVE GAS SENSORS
I. Sayago1, M. Aleixandre1, M.C. Horrillo1, R. Garriga2, A. Kukovecz3, and E. Muñoz1
1Spanish Council for Scientific Research (CSIC), SPAIN, 2Universidad de Zaragoza, and3
University of Szeged, HUNGARY..........................................................................................................................................................................................

M3P.147

FREQUENCY SCALING OF CATHETER-BASED MAGNETO-INDUCTIVE MR IMAGING
DETECTORS
R.R.A. Syms1, I.R. Young1, and M. Rea2
1
Imperial College London, UK and 2Imperial College Healthcare NHS Trust, UK..........................................................................................................................................................................................

M3P.148

IMMOBILIZATION METHOD OF ESCHERICHIA COLI FOR MICROFLUIDIC APPLICATION
I. Kim1, T. An2, W. Choi1, C.S. Kim1, H.J. Cha1, and G. Lim1
1
Pohang University of Science and Technology (POSTECH), SOUTH KOREA and2
Andong National University, SOUTH KOREA..........................................................................................................................................................................................

16:00 - 16:30

Break & Exhibit Inspection

Session M4A - Accelerometers
Session Chairs: T. Akin, Middle East Technical University (METU), TURKEY and K. Sawada, Toyohashi University of Technology, JAPAN

16:30 - 17:00
M4A.001

17:00 - 17:15
M4A.002

17:15 - 17:30
M4A.003

17:30 - 17:45
M4A.004

Invited Speaker
ROAD TO ULTRA LOW COST MULTI-SENSOR INTEGRATION
Y. Zhao and Y. Cai
MEMSIC, Inc., USA..........................................................................................................................................................................................
HERMETICALLY ENCAPSULATED DIFFERENTIAL RESONANT ACCELEROMETER
D.L. Christensen, C.H. Ahn, V.A. Hong, E.J. Ng, Y. Yang, B.J. Lee, and T.W. Kenny
Stanford University, USA..........................................................................................................................................................................................
A FULLY-DIFFERENTIAL, MULTIPLEX-SENSING INTERFACE CIRCUIT MONOLITHICALLYINTEGRATED WITH TRI-AXIS PURE OXIDE CAPACITIVE CMOS-MEMS ACCELEROMETERS
Y.-C. Liu1, M.-H. Tsai2, S.-S. Li1, and W. Fang1
1
National Tsing Hua University, TAIWAN and 2PixArt Imaging Inc., TAIWAN..........................................................................................................................................................................................
SENSING ELECTRODES WITH NANOPOROUS ANODIC ALUMINUM OXIDE FOR PERFORMANCEENHANCEMENT OF CMOS-MEMS ACCELEROMETER
C.-I. Chang1, M.-H. Tsai2, P.-H. Lo1, J.-H. Yeh1, Y.-C. Liu1, C.-M. Sun2, C. Hong1, and W. Fang1
1
National Tsing Hua University, TAIWAN and 2PixArt Imaging Inc., TAIWAN..........................................................................................................................................................................................

17:45 - 18:00
M4A.005

18:00 - 18:15
M4A.006

18:15 - 18:30
M4A.007

X-Y AND Z-AXIS CAPACITIVE ACCELEROMETERS PACKAGED IN AN ULTRA-CLEANHERMETIC ENVIRONMENT
V.A. Hong, B.J. Lee, D.L. Christensen, D.B. Heinz, E.J. Ng, C.H. Ahn, Y. Yang, and T.W. Kenny
Stanford University, USA..........................................................................................................................................................................................
A SILICON MICROSEISMOMETER FOR MARS
W.T. Pike1, I.M. Standley2, and S. Calcutt3
1Imperial College London, UK, 2Kinemetrics, Inc., USA, and 3University of Oxford, UK..........................................................................................................................................................................................
THRESHOLD SHOCK SENSOR BASED ON BI-STABLE MECHANISM
A. Frangi1, B. De Masi1, F. Confalonieri1, and L. Baldasarre2
1
Politecnico di Milano, ITALY and 2STMicroelectronics, ITALY..........................................................................................................................................................................................

Session M4B - Bio-Microsystems
Session Chairs: J. Ducrée, Dublin City University, IRELAND and S. Shoji, Waseda University, JAPAN

16:30 - 17:00
M4B.001

17:00 - 17:15
M4B.002

17:15 - 17:30
M4B.003

17:30 - 17:45
M4B.004

17:45 - 18:00
M4B.005

Invited Speaker
SINGLE-MOLECULE COUNTING OF BIOMOLECULES WITH FEMTOLITERDROPRET CHAMBER ARRAY
H. Noji
University of Tokyo, JAPAN..........................................................................................................................................................................................
SINGLE MOLECULE ENZYMOLOGY USING CARBON NANOTUBE CIRCUITS
Y. Choi, P.C. Sims, T. Olsen, O.T. Gul, B.L. Corso, M. Iftikhar, G.A. Weiss, and P.G. Collins
University of California, Irvine, USA..........................................................................................................................................................................................
THREE DIMENSIONAL LOBULE-MIMETIC REGENERATION IN VITRO BY PEGDA-BASED CELLSHEETS
Y.S. Chen, L.Y. Ke, C.K. Tung, C.H. Lu, C.C. Hu, and C.H. Liu
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................
MEMBRANE MICROCHANNEL MADE OF COLLAGEN WITH SELF-ASSEMBLED MICRO FIBRILSTRUCTURES FOR TISSUE ENGINEERING
M. Ikeuchi1,2 and K. Ikuta1
1
University of Tokyo, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................
REAL-TIME 3D FORCE/POSITION SENSING SYSTEM BY A SINGLE CCD FOR OPTICALLYDRIVEN MICRO-ROBOT
N. Shimada1, K. Asano2, M. Ikeuchi1,3, and K. Ikuta2
1
University of Tokyo, JAPAN, 2Nagoya University, JAPAN and
3
Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

18:00 - 18:15
M4B.006

18:15 - 18:30
M4B.007

HIGH TEMPERATURE MICRO FLOW CONTROL DEVICE FOR MEMS ENABLED CHOPPERSTABLIZED GAS CHROMATOGRAPHY - ELECTROANTENNOGRAPHY (MEMS-GC-EAG)
M.-D. Zhou, A.J. Myrick, W.J. Khan, X. Gao, T.C. Baker, and S.-Y. Zheng
Pennsylvania State University, USA..........................................................................................................................................................................................
SELF FOCUSING ACOUSTIC TRANSDUCER (SFAT) WITH 10 MM FOCAL LENGTH FOR CANCERSPECIFIC LOCALIZED CYTOLYSIS OF 3D CELL SPHEROIDS IN 3D MATRIGEL
L. Wang, C.-P. Liao, M.-E. Gross, and E.S. Kim
University of Southern California, USA..........................................................................................................................................................................................

Session M4C - Nano-Mechanical Resonators
Session Chairs: W. King, University of Illinois, Urbana-Champaign, USA and T. Ono, Tohoku University, JAPAN

16:30 - 17:00
M4C.001

17:00 - 17:15
M4C.002

17:15 - 17:30
M4C.003

17:30 - 17:45
M4C.004

17:45 - 18:00
M4C.005

18:00 - 18:15
M4C.006

Invited Speaker
NANOMECHANICAL RESONATORS BASED ON NANOTUBES AND GRAPHENE
J. Moser1,2, A. Eichler1,2, J. Chaste2, and A. Bachtold1,2
1
ICFO, SPAIN and 2Institut Català de Nanotecnologia (ICN), SPAIN..........................................................................................................................................................................................
AEROSOL IMPACTOR WITH EMBEDDED MEMS RESONANT MASS BALANCE FOR REAL-TIMEPARTICULATE MASS CONCENTRATION MONITORING
E. Mehdizadeh1,3, J.C. Wilson1, A. Hajjam2, A. Rahafrooz1, and S. Pourkamali2,3
1
University of Denver, USA, 2FemtoScale, Inc., USA, and 3University of Texas, USA..........................................................................................................................................................................................
FREQUENCY-ADDRESSED NEMS ARRAYS FOR MASS AND GAS SENSING APPLICATIONS
E. Sage, O. Martin, C. Dupré, T. Ernst, G. Billiot, L. Duraffourg, E. Colinet, and S. Hentz
Commissariat à l'énergie Atomique (CEA), FRANCE..........................................................................................................................................................................................
TIME-DOMAIN AC CHARACTERIZATION OF SILICON CARBIDE (SiC)
NANOELECTROMECHANICAL SWITCHES TOWARD HIGH SPEED OPERATIONS
T. He, V. Ranganathan, R. Yang, S. Rajgopal, S. Bhunia, M. Mehregany, and P.X.-L. Feng
Case Western Reserve University, USA..........................................................................................................................................................................................
A NANOWIRE FET SWITCH INTEGRATED WITH A MICROELECTRODE ARRAY FOR RETINALPROSTHETIC SYSTEMSS. Lee1, S.W. Jung1,2, J. Ahn1, H.J. Yoo1, S.K. Park1, and D.-I. Cho1
1
Seoul National University, SOUTH KOREA and 2Korea Electronics Technology Institute, SOUTH KOREA..........................................................................................................................................................................................
IMPLEMENTATION OF ELECTROSTATICALLY CONTROLLED FABRY-PEROTINTERFEROMETER USING NANOPOROUS ANODIC ALUMINUM OXIDE LAYER
P.-H. Lo, C.-C. Lee, and W. Fang
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

18:15 - 18:30
M4C.007

INTEGRATED FINFET BASED SENSING IN A LIQUID ENVIRONMENT
S. Rigante1, M. Wipf2, A. Tarasov2, D. Bouvet1, K. Bedner3, R.L. Stoop2, and A.M. Ionescu1
1
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND, 2University of Basel, SWITZERLAND, and3Paul Scherrer Institut, SWITZERLAND..........................................................................................................................................................................................

Session M4D - Energy Scavenging & Magnetometers
Session Chairs: P. Woias, University of Freiburg - IMTEK, GERMANY and E. Yeatman, Imperial College London, UK

16:30 - 17:00
M4D.001

17:00 - 17:15
M4D.002

17:15 - 17:30
M4D.003

17:30 - 17:45
M4D.004

17:45 - 18:00
M4D.005

18:00 - 18:15
M4D.006

18:15 - 18:30
M4D.007

Invited Speaker
MEMS BASED VIBRATION HARVESTING: FACING THE UGLY FACTS
R.J.M. Vullers, M. Renaud, R. Elfrink, and R. van Schaijk
imec/Holst Centre, THE NETHERLANDS..........................................................................................................................................................................................
AN ENERGY HARVESTER FOR ROTATING ENVIRONMENTS USING OFFSET PENDULUM
DYNAMICS
S.J. Roundy and J. Tola
University of Utah, USA..........................................................................................................................................................................................
A HIGH PERFORMANCE ELECTROSTATIC MEMS VIBRATION ENERGY HARVESTER WITH
CORRUGATED INORGANIC SiO2-Si3N4 ELECTRET
M. Renaud1, G. Altena1, M. Goedbloed1, C. de Nooijer1, S. Matova1, Y. Naito2, T. Yamakawa2, H. Takeuchi2,
K. Onishi2, and R. van Schaijk1
1
imec/Holst Centre, THE NETHERLANDS and 2Panasonic Corporation, JAPAN..........................................................................................................................................................................................
A WIDE-BAND PIEZOELECTRIC ENERGY-HARVESTER FOR HIGH-EFFICIENCY POWER
GENERATION AT LOW FREQUENCIES
Q.C. Tang and X. Li
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................
ON-CHIP RF POWER INDUCTORS WITH NANOGRANULAR MAGNETIC CORES USING PRISMASSISTED UV-LED LITHOGRAPHY
D.V. Harburg1, G.R. Khan1, F. Herrault2, J. Kim2, C.G. Levey1, and C.R. Sullivan1
1
Thayer School of Engineering at Dartmouth, USA and 2Georgia Institute of Technology, USA..........................................................................................................................................................................................
TOWARDS A MINIATURE ATOMIC SCALAR MAGNETOMETER USING LIQUID CRYSTALPOLARIZATION ROTATOR
J. Rutkowski1, W. Fourcault1, F. Bertrand1, U. Rossini1, S. Gétin1, O. Lartigue1, S. Le Calvez1, T. Jager1, E. Herth2,
M. Le Prado1, J.M. Leger1, and S. Morales1
1Commissariat à l'énergie Atomique (CEA), FRANCE and 2FEMTO-ST, FRANCE..........................................................................................................................................................................................
COMPARISON OF LORENTZ-FORCE MEMS MAGNETOMETERS BASED ON DIFFERENTCAPACITIVE SENSING TOPOLOGIES
G. Langfelder1, A. Tocchio2, E. Lasalandra2, and A. Longoni1
1
Politecnico di Milano, ITALY and 2STMicroelectronics, ITALY..........................................................................................................................................................................................

18:30Adjourn for the Day

19:45 21:45

MNAC Visit and Cocktails

Tuesday 18 June 2013
Session T1A - Physical Microsystems 1
Session Chairs: W. Fang, National Tsing Hua University, TAWAIN and O. Paul, University of Freiburg - IMTEK, GERMANY

08:30 - 09:00
T1A.001

09:00 - 09:15
T1A.002

09:15 - 09:30
T1A.003

09:30 - 09:45
T1A.004

09:45 - 10:00
T1A.005

10:00 - 10:15
T1A.006

Invited Speaker
MEMS DEVICES AND SENSORS IN STANDARD CMOS PROCESSING
J. Montanyà i Silvestri, J.J. Valle Fraga, L. Barrachina Saralegui, and D. Fernández Martínez
Baolab Microsystems, SPAIN..........................................................................................................................................................................................
SILICON NANOWIRE BASED RING SHAPE FORCE SENSOR FOR SENSORIZED GUIDEWIRES
B. Han1,2, Y.-J. Yoon2, M. Hamidullah1, A.T.-H. Lin2, and W.-T. Park3
1
Agency for Science, Technology and Research (A*STAR), SINGAPORE, 2Nanyang Technological University,
SINGAPORE, and 3Seoul National University of Science and Technology, SOUTH KOREA..........................................................................................................................................................................................
A 2-D DIRECTIONAL AIR FLOW SENSOR ARRAY MADE USING STEREOLITHOGRAPHY AND
MEMS MICRO-HYDRAULIC STRUCTURES
M.M. Sadeghi, R.L. Peterson, and K. Najafi
University of Michigan, USA..........................................................................................................................................................................................
DESIGN, MODELING, FABRICATION AND CHARACTERIZATION OF A MEMS ACCELERATIONSENSOR FOR ACOUSTIC EMISSION TESTING
A. Sorger, C. Auerswald, A. Shaporin, M. Freitag, M. Dienel, and J. Mehner
Chemnitz University of Technology, GERMANY..........................................................................................................................................................................................
SINGLE CHIP PROCESS FOR SENSORS IMPLEMENTATION, INTEGRATION, AND CONDITIONMONITORING
C.-W. Cheng1,2, K.-C. Liang1,2, C.-H. Chu1, D.A. Horsley3, and W. Fang2
1
Taiwan Semiconductor Manufacturing Company, TAIWAN, 2National Tsing Hua University, TAIWAN, and3
University of California, Davis, USA..........................................................................................................................................................................................
FULLY MONOLITHIC MEMS BASED THERMAL SENSOR IN 22nm CMOS TECHNOLOGY FOR SOC
THERMAL MANAGEMENT
R. Mahameed1, M. Abdelmoneum1, D. Duarte2, G. Taylor2, S.-J. Choi2, R. Brain2, P. Morrow2, and P. Fischer2
1Intel Architecture Group, USA and 2Intel Technology Manufacturing Group, USA..........................................................................................................................................................................................

Session T1B - Electrical Recording & Stimulation
Session Chairs: J.W. Kwon, University of Missouri, Columbia, USA and W. van der Wijngaart, KTH Royal Institute of Technology, SWEDEN

08:30 - 09:00
T1B.001

Invited Speaker
TOWARD A HIGH VISUAL-ACUITY RETINAL PROSTHESIS
L.-S. Fan
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

09:00 - 09:15
T1B.002

09:15 - 09:30
T1B.003

09:30 - 09:45
T1B.004

09:45 - 10:00
T1B.005

10:00 - 10:15
T1B.006

CONFERRING FLEXIBILITY AND RECONFIGURABILITY TO A 26,400 MICROELECTRODE CMOSARRAY FOR HIGH THROUGHPUT NEURAL RECORDINGS
J. Müller1, M. Ballini1, P. Livi1, Y. Chen1, A. Shadmani1, U. Frey2, I.L. Jones1, M. Fiscella1, M. Radivojevic1,
D.J. Bakkum1, A. Stettler1, F. Heer1, and A. Hierlemann1
1
ETH Zürich, SWITZERLAND and 2RIKEN, JAPAN..........................................................................................................................................................................................
NANOGRASS BORON DOPED DIAMOND MICROELECTRODE ARRAYS FORRECORDING AND STIMULATING NEURONAL TISSUES
R. Kiran1, M. Cottance2, S. Joucla5, L. Rousseau2, A. Bongrain1,2, B. Yvert5, E. Sccorsone1, A. Bendali3,4,
G. Lissorgues2, S. Picaud3,4,6, and P. Bergonzo1
1Commissariat à l'énergie Atomique (CEA), FRANCE, 2University Paris Est, FRANCE, 3Institut de la Vision,
FRANCE, 4Université Pierre et Marie Curie, FRANCE, 5Université de Bordeaux, FRANCE, and6
Fondation Ophtalmologique Adolphe de Rothschild, FRANCE..........................................................................................................................................................................................
SENSING AND ACTUATING ELECTROPHYSIOLOGICAL ACTIVITY ON BRAIN TISSUE AND
NEURONAL CULTURES WITH A HIGH-DENSITY CMOS-MEA
A. Maccione1, A. Simi1, T. Nieus1, M. Gandolfo2, K. Imfeld2, E. Ferrea1, E. Sernagor3, and L. Berdondini11Istituto Italiano di Tecnologia, ITALY, 23Brain GmbH, SWITZERLAND, and 3Newcastle University, UK..........................................................................................................................................................................................
A WEARABLE PERCUTANEOUS IMPLANT FOR LONG TERM ZEBRAFISH EPICARDIAL ECG
RECORDING
Y. Zhao1, F. Yu2, H. Cao2, H. Chang3, X. Zhang1, T.K. Hsiai2, and Y.C. Tai1
1
California Institute of Technology, USA, 2University of Southern California, USA, and3
Northwestern Polytechnical University, USA..........................................................................................................................................................................................
ACETYLCHOLINE DYNAMICS IN CORTICAL NETWORKS BY AN ION IMAGE SENSOR WITH
NEUROTRANSMITTER-SENSITIVE MAGNETIC NANOMACHINES
T. Sakurai1,2, A. Iwashita1, K. Okumura1,2, M. Ishida1,2, and K. Sawada1,2
1
Toyohashi University of Technology, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

Session T1C - Nanomaterials (Characterization)
Session Chairs: L. Buchaillot, IEMN, FRANCE and W. Wu, Peking University, CHINA

08:30 - 09:00
T1C.001

09:00 - 09:15
T1C.002

Invited Speaker
ATOMICALLY-PRECISE THREE-DIMENSIONAL TOP DOWN FABRICATION
J.B. Ballard1, J.H.G. Owen1, E. Fuchs1, S. McDonnell2, D. Dick2, G. Mordi2, A. Azcatl2, O. Seitz2,
P. Campbell2, J.F. Veyan2, Y. Chabal2, R.M. Wallace2, M. Bischof3, D. Jaeger3, R. Reidy3, N. Sarkar4,
and J.N. Randall1
1
Zyvex Labs, USA, 2University of Texas, USA, 3University of North Texas, USA, and4Integrated Circuit Scanning Probe Instruments, CANADA..........................................................................................................................................................................................
STRESS REDUCTION IN ULTRA-SMALL THIN FILM AL2O3 DIAPHRAGMS BY ATOMIC LAYERDEPOSITION
T. Süss, P. Braeuninger-Weimer, and C. Hierold
ETH Zürich, SWITZERLAND..........................................................................................................................................................................................

09:15 - 09:30
T1C.003

09:30 - 09:45
T1C.004

09:45 - 10:00
T1C.005

10:00 - 10:15
T1C.006

PYROELECTRIC ELECTRON EMISSION FROM A THIN FILM OF PbZrXTi1-XO3 ON A
NANOFABRICATED CATHODE
P.C. Fletcher, R.V.K. Mangalam, L.W. Martin, and W.P. King
University of Illinois, Urbana-Champaign, USA..........................................................................................................................................................................................
SIMULTANEOUS CHARACTERIZATION OF MECHANICAL AND ELECTRICAL PROPERTIES OF
NANOWIRE USING MEMS DEVICE
H. Zeng1, T. Li1, M. Bartenwerfer2, S. Fatikow2, and Y. Wang1
1
Chinese Academy of Sciences, CHINA and 2University of Oldenburg, GERMANY..........................................................................................................................................................................................
PROBING MECHANICAL, ELECTRICAL AND THERMAL PROPERTIES OF NANOSCALE
MATERIALS USING MEMS DEVICES
M.T. Alam and M.A. HaquePennsylvania State University, USA..........................................................................................................................................................................................
DIRECT OBSERVATION OF DAMAGE ACCUMULATION PROCESS INSIDE SILICON UNDERMECHANICAL FATIGUE LOADING
S. Kamiya1, R. Hirai1, H. Izumi1, N. Umehara2, and T. Tokoroyama2
1
Nagoya Institute of Technology, JAPAN and 2Nagoya University, JAPAN..........................................................................................................................................................................................

Session T1D - Acoustic/RF Resonators & Oscillators
Session Chairs: F. Ayazi, Georgia Institute of Technology, USA and D. Weinstein, Massachusetts Institute of Technology, USA

08:30 - 09:00
T1D.001

09:00 - 09:15
T1D.002

09:15 - 09:30
T1D.003

09:30 - 09:45
T1D.004

Invited Speaker
TIME REVERSAL MIRRORS: PAST, PRESENT AND FUTURE
M. Fink
Ecole Supérieure de Physique et de Chimie Industrielles (ESPCI), FRANCE..........................................................................................................................................................................................
A CURVATURE SELF-DETECTABLE 3D ARC-SHAPED IPMC/PVDF TRANSDUCER WITH
ACOUSTIC BEAM GENERATION AND TUNABLE FOCAL RANGE ABILITIES
G.-H. Feng and G.-Y. Chu
National Chung Cheng University, TAIWAN..........................................................................................................................................................................................
TEMPERATURE COMPENSATED OVERTONE RESONATORS
J.R. Clark1, A.R. Brown2, G. He3, and W. Hsu1
1
Discera, Inc., USA, 2A. Brown Design, USA, and 3University of Michigan, USA..........................................................................................................................................................................................
TIP-BASED GRAPHENE ETCHING FOR MEMS RESONATOR FREQUENCY TRIMMING
H. Hosseinzadegan and A. Lal
Cornell University, USA..........................................................................................................................................................................................

09:45 - 10:00
T1D.005

10:00 - 10:15
T1D.006

10:15 -10:45

HIGH PRECISION FREQUENCY SYNTHESIZER BASED ON MEMS PIEZORESISTIVE RESONATOR
K.L. Phan1, T. van Ansem1, C. van der Avoort1, J.T.M. van Beek1, M.J. Goossens1, S. Jose1, R.J.P. Lander2,S. Menten1, T. Naass1, J. Sistermans1, E. Stikvoort1, F. Swartjes1, K. Wortel1, and M.A.A. in 't Zandt1
1
NXP Semiconductors, THE NETHERLANDS and 2NXP Semiconductors, BELGIUM..........................................................................................................................................................................................
A 3V CMOS-MEMS OSCILLATOR IN 0.35UM CMOS TECHNOLOGY
J. Verd1, A. Uranga2, J. Segura1, and N. Barniol2
1
Universitat de les Illes Balears, SPAIN and 2Universitat Autónoma de Barcelona, SPAIN..........................................................................................................................................................................................
Break & Exhibit Inspection

Session T2A - Packaging & Technology
Session Chairs: J.-U. Bu, Senplus, SOUTH KOREA and L. Lin, University of California, Berkeley, USA

10:45 - 11:00
T2A.001

11:00 - 11:15
T2A.002

11:15 - 11:30
T2A.003

11:30 - 11:45
T2A.004

11:45 - 12:00
T2A.005

12:00 - 12:15
T2A.006

FABRICATION OF MULTI-LAYER VERTICALLY STACKED FUSED SILICA MICROSYSTEMS
Z. Cao, Y. Yuan, G. He, R.L. Peterson, and K. Najafi
University of Michigan, USA..........................................................................................................................................................................................
LEAK RATE AND RELIABILITY OF LOW TEMPERATURE THIN-FILM INDIUM BONDING
R. Straessle, Y. Pétremand, D. Briand, and N.F. de Rooij
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND..........................................................................................................................................................................................
MULTI-FORCE-FIELD ASSISTED SELF-ASSEMBLY PROCESS OF THERMOELECTRIC DEVICE
Y.B. Lin1, Y.L. Tzeng1, M.J. Dai2, C.K. Liu2, L.L. Liao2, H.C. Chien2, Y.S. Chen2, and K. Wang1
1
National Changhua University of Education, TAIWAN and2
Industrial Technology Research Institute (ITRI), TAIWAN..........................................................................................................................................................................................
NEW SELF-SEALING THIN-FILM ENCAPSULATION PROCESS FOR MEMS
F. Santagata, I. Zaccaria, R.H. Poelma, J.F. Creemer, G.Q. Zhang, and P.M. Sarro
Delft University of Technology, THE NETHERLANDS..........................................................................................................................................................................................
A FULLY INTEGRATED MEMS TERA HERTZ INTERACTION CIRCUIT WITH MULTI WAFER
PACKAGING
Y. Kim, J. Lee, C.-W. Baek, H.Y. Ahn, S. Hong, S.-H. Lee, and C.-Y. Moon
Samsung Advanced Institute of Technology, SOUTH KOREA..........................................................................................................................................................................................
RF-TSVs COMPATIBLE WITH HARSH-ENVIRONMENT POST-PROCESSING FOR “VIA-FIRST” 3D
INTEGRATION
R. Gueye1, S.W. Lee2, W.A. Vitale3, S. Truax2, T. Akiyama1, C. Roman2, A. Ionescu1, C. Hierold2, D. Briand1,
and N.F. de Rooij1
1
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND and 2ETH Zürich, SWITZERLAND..........................................................................................................................................................................................

12:15 - 12:30
T2A.007

THROUGH SILICON VIAS AND THERMOCOMPRESSION BONDING USING INKJET- PRINTEDGOLD NANOPARTICLES FOR HETEROGENEOUS MEMS INTEGRATION
N. Quack, J. Sadie, V. Subramanian, and M.C. Wu
University of California, Berkeley, USA..........................................................................................................................................................................................

Session T2B - Liquid Chemical Sensing
Session Chairs: O. Brand, Georgia Institute of Technology, USA and Z. Brzózka, Warsaw University of Technology, POLAND

10:45 - 11:00
T2B.001

11:00 - 11:15
T2B.002

11:15 - 11:30
T2B.003

11:30 - 11:45
T2B.004

11:45 - 12:00
T2B.005

12:00 - 12:15
T2B.006

12:15 - 12:30
T2B.007

SELF-STANDING PRINTED HUMIDITY SENSOR WITH THERMO-CALIBRATION AND
INTEGRATED HEATER
A. Vásquez Quintero, F. Molina-Lopez, G. Mattana, D. Briand, and N.F. de Rooij
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND..........................................................................................................................................................................................
A HIGH-Q BULK-RESONATOR EQUIPPED WITH ULTRA-SENSITIVE MESOPOROUS NANOMATERIAL FOR DETECTION OF TRACE-LEVEL CHEMICALSF. Yu, H. Yu, P. Xu, T. Xu, C. Yang, and X. Li
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................
RESONANT PHOTOTHERMAL IR SPECTROSCOPY OF PICOGRAM SAMPLES WITH
MICROSTRING RESONATOR
S. Yamada, S. Schmid, and A. Boisen
Technical University of Denmark, DENMARK..........................................................................................................................................................................................
MICRO-OPTOFLUIDIC RING RESONATOR STRUCTURES FOR SELECTIVE DETECTION OF
ORGANIC VAPORSK. Scholten, K. Reddy, X. Fan, and E.T. Zellers
University of Michigan, USA..........................................................................................................................................................................................
SYNTHETIC NANOCAGE FORMED BY RHODIUM-ORGANIC CUBOCTAHEDRA: FOR SINGLE
MOLECULE DETECTION IN LIPID BILAYER
R. Kawano1, S. Furukawa2, D. Kiriya3, T. Osaki1, K. Kamiya1, S. Kitagawa2, and S. Takeuchi1,3
1Kanagawa Academy of Science and Technology (KAST), JAPAN, 2Kyoto University, JAPAN, and3
University of Tokyo, JAPAN..........................................................................................................................................................................................
APPLICATION OF SHRINK INDUCED THREE-DIMENSIONAL STRUCTURES TO BIOSENSORSYSTEMS INTEGRATED WITH FLEXIBLE SOLAR CELLS
Q. Li, B. Zhang, and T. Cui
University of Minnesota, USA..........................................................................................................................................................................................
AN INTEGRATED MICROFLUIDIC SYSTEM FOR RAPID HBA1C AND GLUCOSE MEASUREMENT
T.-H. Lee, C.-L. Lin, C.-C. Wu, and G.-B. Lee
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

Session T2C - Neural Probes
Session Chairs: D. Borkholder, Rochester Institute of Technology, USA and G.-B. Lee, National Tsing Hua University, TAWAIN

10:45 - 11:00
T2C.001

11:00 - 11:15
T2C.002

11:15 - 11:30
T2C.003

11:30 - 11:45
T2C.004

11:45 - 12:00
T2C.005

12:00 - 12:15
T2C.006

12:15 - 12:30
T2C.007

DEVELOPMENT AND EVALUATION OF TUBE-SHAPED NEURAL PROBE WITH WORKINGCHANNEL
S. Tamaki, T. Matsunaga, T. Kuki, Y. Furusawa, H. Musiake, and Y. Haga
Tohoku University, JAPAN..........................................................................................................................................................................................
LONG TERM LFP MEASUREMENTS WITH ULTRA-FINE NEURAL ELECTRODES EMBEDDED IN
POROUS RESORBABLE CARRIER
F. Ceyssens, K. van Kuyck, B. Nuttin, and R. Puers
Katholieke Universiteit Leuven, BELGIUM..........................................................................................................................................................................................
ULTRASONICALLY ACTUATED INSERTED NEURAL PROBES FOR INCREASED RECORDINGRELIABILITY
P.-C. Chen, C. Clark, C.-P.J. Shen, C. Schaffer, and A. Lal
Cornell University, USA..........................................................................................................................................................................................
A NEW MEMS NEURAL PROBE INTEGRATED WITH EMBEDDED MICROFLUIDIC CHANNEL FOR
DRUG DELIVERY AND ELECTRODE ARRAY FOR RECORDING NEURAL SIGNAL
Y. Kim, H.J. Lee, D. Kim, Y.K. Kim, S.H. Lee, E.-S. Yoon, and I.-J. Cho
Korea Institute of Science and Technology (KIST), SOUTH KOREA..........................................................................................................................................................................................
MULTIFUNCTIONAL LAB-ON-A-TUBE (LOT) PROBE FOR SIMULTANEOUS NEUROCHEMICALAND ELECTROPHYSIOLOGICAL ACTIVITY MEASUREMENTS
C. Li1, P.M. Wu1, S.J. Prince1, Z. Wu2, S. Chakraborti2, C.H. Ahn2, J.A. Hartings2, and R.K. Narayan1
1
Feinstein Institute for Medical Research, USA and 2University of Cincinnati, USA..........................................................................................................................................................................................
NOVEL TECHNOLOGY FOR THE IN-PLANE TO OUT-OF-PLANE TRANSFER OF MULTIPLE
INTERCONNECTION LINES IN 3D NEURAL PROBES
F. Barz, T. Holzhammer, O. Paul, and P. Ruther
University of Freiburg - IMTEK, GERMANY..........................................................................................................................................................................................
A MULTI-SHANK SILK-BACKED PARYLENE NEURAL PROBE FOR RELIABLE CHRONIC
RECORDING
F. Wu1, L. Tien2, F. Chen1, D. Kaplan2, J. Berke1, and E. Yoon1
1
University of Michigan, USA and 2Tufts University, USA..........................................................................................................................................................................................

Session T2D - NEMS & AFM
Session Chairs: A. Lal, Cornell University, USA and T. Tsuchiya, Kyoto University, JAPAN

10:45 - 11:00
T2D.001

FABRICATION AND CHARACTERIZATION OF A SILICON NANOFIN NON-VOLATILE MEMORY
B. Soon1,2, N. Singh1, J.M. Tsai1, and C. Lee2
1
Agency for Science, Technology and Research (A*STAR), SINGAPORE and2
National University of Singapore, SINGAPORE..........................................................................................................................................................................................

11:00 - 11:15
T2D.002

11:15 - 11:30
T2D.003

11:30 - 11:45
T2D.004

11:45 - 12:00
T2D.005

12:00 - 12:15
T2D.006

12:15 - 12:30
T2D.007

STABLE RUTHENIUM-CONTACT RELAY TECHNOLOGY FOR LOW-POWER LOGIC
I.-R. Chen1, Y. Chen1, L. Hutin1, V. Pott2, R. Nathanael3, and T.-J. King Liu1
1
University of California, Berkeley, USA, 2Now with LSI Technology Pte Ltd., SINGAPORE, and3
Now with Xilinx, Inc., USA..........................................................................................................................................................................................
NEMS ACTUATOR DRIVEN BY OPTICAL GRADIENT FORCE
B. Dong1,2, H. Cai2, J.M. Tsai2, P. Kropelnicki2, A.B. Randles2, M. Tang2, D.L. Kwong2, and A.Q. Liu1,2
1
Nanyang Technological University, SINGAPORE, and2
Agency for Science, Technology and Research (A*STAR), SINGAPORE..........................................................................................................................................................................................
ULTRA-LOW POWER SI-PHOTONIC VARIABLE-GAP COUPLER SWITCH WITH NANO-LATCH
MECHANISM
S. Abe, Y. Munemasa, Y. Kanamori, and K. Hane
Tohoku University, JAPAN..........................................................................................................................................................................................
CANTILEVER DYNAMICS AND ENERGY LOCALIZATION DURING ATOMIC FORCEMICROSCOPE INFRARED SPECTROSCOPY
H. Cho1, J.R. Felts1, M.-F. Yu2, L.A. Bergman1, A.F. Vakakis1, and W.P. King1
1
University of Illinois, Urbana-Champaign, USA and 2Georgia Institute of Technology, USA..........................................................................................................................................................................................
ELECTROSTATICALLY ACTUATED DOUBLE CANTILEVER AFM PROBE FOR HIGH SPEEDIMAGING
R. Vermeer1, E. Sarajlic2, M. Siekman1, H. Kawakutsa3, H. Fujita3, N.R. Tas1, and H.V. Jansen1
1
MESA+, University of Twente, THE NETHERLANDS, 2SmartTip B.V., THE NETHERLANDS, and3
University of Tokyo, JAPAN..........................................................................................................................................................................................
CMOS-MEMS DYNAMIC FM ATOMIC FORCE MICROSCOPE
N. Sarkar1,2, G. Lee1, and R.R. Mansour1,2
1
University of Waterloo, CANADA and 2ICSPI Corp., CANADA..........................................................................................................................................................................................

12:30 - 14:15

Lunch on Own & Exhibit Inspection

14:15 - 16:30

Poster Session T3P

Mechanical/Physical Sensors and Microsystems
Accelerometer
T3P.001

A MEMS BASED ELECTROCHEMICAL SEISMIC SENSOR
T. Deng, D.Y. Chen, J.B. Wang, J. Chen, W.T. He, and Y.J. FanChinese Academy of Sciences, CHINA..........................................................................................................................................................................................

T3P.002

AN ELECTROLYTE DROPLET-BASED LOW FREQUENCY ACCELEROMETER BASED ON
MOLECULAR ELECTRONIC TRANSDUCER
H. Huang, M. Liang, R. Tang, J. Oiler, T. Ma, and H. Yu
Arizona State University, USA..........................................................................................................................................................................................

T3P.003

HIGH RESOLUTION PULL-IN INCLINOMETER
F.S. Alves1, R.A. Dias1, J. Cabral1, J. Gaspar2, and L.A. Rocha1
1
University of Minho, PORTUGAL and 2International Iberian Nanotechnology Laboratory (INL), PORTUGAL..........................................................................................................................................................................................

T3P.004

MICROMACHINED ACCELERATION SWITCH WITH BI-DIRECTIONALLY TUNABLE
THRESHOLD
H.-S. Kim1, Y.-H. Jang1, Y.-S. Hwang2, Y.-K. Kim2, and J.-M. Kim3
1
Seoul National University, SOUTH KOREA, 2Microinfinity Co., Ltd, SOUTH KOREA, and3
Chonbuk National University, SOUTH KOREA..........................................................................................................................................................................................

Acoustic Sensors
T3P.005

A SMART ACOUSTIC EMISSION AND MECHANICAL IMPEDANCE HYBRID SENSOR WITH
STATIC FORCE DETECTING AND DYNAMIC MEASURING CAPABILITIES
G.-H. Feng and Z.-W. Huang
National Chung Cheng University, TAIWAN..........................................................................................................................................................................................

T3P.006

POSITION DETECTION WITH MICRO WHISTLES
J.M. Ibargüen, R. Lewandowski, C. Gerhardy, and W.K. Schomburg
RWTH Aachen Univesity, GERMANY..........................................................................................................................................................................................

Actuators & Characterization Tools
T3P.007

CARBON NANOTUBE IN SITU TEM LARGE STRAIN AND CHIRAL ANGLE ANALYSIS ENABLED
BY MODULAR COUPON AND MEMS TEST PLATFORM SYSTEM
J.J. Brown1, M. Muoth2, C. Hierold2, and V.M. Bright1
1
University of Colorado, USA and 2ETH Zürich, SWITZERLAND..........................................................................................................................................................................................

T3P.008

RADIO-FREQUENCY AND DC ELECTRICAL CHARACTERIZATION ON A MODULAR MEMS
MECHANICAL TEST PLATFORM FOR NANOMATERIALS
J.J. Brown1, T.M. Wallis2, P. Kabos2, K.A. Bertness2, N. Sanford2, and V.M. Bright1
1
University of Colorado, USA and 2National Institute of Standards and Technology (NIST), USA..........................................................................................................................................................................................

T3P.009

SYNTHESIS AND ELASTIC PROPERTIES OF SIO2 NANOTUBES AND HELICAL NANOSPRINGSTEMPLATED FROM ORGANIC AMPHIPHILIC SELF-ASSEMBLIES THROUGH INORGANICTRANSCRIPTION
S. Houmadi1,2, S. Habtoun1,2, D. Dedovet3, S. Si3, R. Tamoto3,4, R. Oda3,4, M.H. Delville3, and C. Bergaud1
1
Laboratoire d'Analyse et d'Architecture des Systémes (LAAS-CNRS), FRANCE, 2Université de Toulouse, FRANCE,
3
Université de Bordeaux, FRANCE, and 4Institut Européen de Chimie et Biologie (IECB), FRANCE..........................................................................................................................................................................................

Gyroscope
T3P.010

A NEW VERTICAL SUSPENSION INERTIAL GRADE GYROSCOPE
A. Abdel Aziz1, H.H. Tawfik1, A. Sharaf1,3, A.M. Elshurafa4, M. Serry1, and S. Sedky2
1
American University of Cairo, EGYPT, 2Zewail University of Science and Technology, EGYPT, 3Egyptian Atomic
Energy Authority, EGYPT, and 4King Abdullah University of Science and Technology, EGYPT..........................................................................................................................................................................................

T3P.011COMBINED PHASE-READOUT AND SELF-CALIBRATION OF MEMS GYROSCOPES
A. N. Shirazi, G. Casinovi, M. Dalal, and F. Ayazi
Georgia Institute of Technology, USA..........................................................................................................................................................................................

Infrared & Magnetic
T3P.012AN ULTRA-THIN BENDABLE SI-MONOLITHIC IMAGING TEST SENSOR
G.C. Dogiamis1, J. Häfner2, W. Mokwa2, B.J. Hosticka1, and A. Grabmaier1
1
University Duisburg Essen, GERMANY and 2RWTH Aachen University, GERMANY..........................................................................................................................................................................................

T3P.013

HIGH PERFORMANCE NEMS RESONANT INFRARED DETECTOR BASED ON AN ALUMINUMNITRIDE NANO-PLATE RESONATOR
Y. Hui and M. Rinaldi
Northeastern University, USA..........................................................................................................................................................................................

T3P.014MONOLITHIC DISPLACEMENT ENCODER SENSOR INTEGRATING GAN LED AND SI
PHOTODIODES
S. Nagai1, T. Sasaki1, H. Kawaguchi2, A. Iwabuchi2, and K. Hane1
1
Tohoku University, JAPAN and 2Sanken Electric Co. Ltd., JAPAN..........................................................................................................................................................................................

Pressure & Flow
T3P.015BIOMIMETIC POLYMER MEMS HAIRCELLS WITH HIGH-ASPECT RATIO FOR HIGH ACCURACY
FLOW SENSING
A.G.P. Kottapalli1, M. Asadnia1, J.M. Miao1, and M.S. Triantafyllou2
1
Nanyang Technological University, SINGAPORE and 2Massachusetts Institute of Technology, USA..........................................................................................................................................................................................

T3P.016

GAS VISCOSITY MEMS SENSOR BASED ON PULL-IN
R.A. Dias1,2, G. de Graaf3, R.F. Wolffenbuttel3, and L.A. Rocha1,2
1
University of Minho, PORTUGAL, 2International Iberian Nanotechnology Laboratory, PORTUGAL, and3
Delft University of Technology, THE NETHERLANDS..........................................................................................................................................................................................

T3P.017

PERFORMANCE ANALYSISIS OF PZT (0.52/0.48) FOR HIGH TEMPERATURE AND PRESSURESENSING APPLICATIONS
M. Asadnia1, A.G.P. Kottapalli1, J.M. Miao1, A.B. Randles2, and J.M. Tsai2
1
Nanyang Technological University, SINGAPORE and2
Agency for Science, Technology and Research (A*STAR), SINGAPORE..........................................................................................................................................................................................

Resonant Sensors
T3P.018

ALL-OXIDE MICROCANTILEVERS: PERSPECTIVES FOR DEVICE APPLICATIONS
L. Pellegrino1, N. Manca1,2, T. Kanki3, S. Yamasaki3, H. Tanaka3, M. Biasotti2, R. Buzio1, E. Bellingeri1,
V. Ceriale2, A.S. Siri2, and D. Marré2
1
CNR-SPIN, ITALY, 2Genoa University, ITALY, and 3Osaka University, JAPAN..........................................................................................................................................................................................

T3P.019

HIGH-RESOLUTION STRAIN SENSING ON STEEL BY SILICON-ON-INSULATOR FLEXURALRESONATORS FABRICATED WITH CHIP-LEVEL VACUUM PACKAGING
L. Belsito1, M. Ferri1, F. Mancarella1, A. Roncaglia1, J. Yan2, A.A. Seshia2, and K. Soga2
1
CNR IMM, ITALY and 2University of Cambridge, UK..........................................................................................................................................................................................

T3P.020ULTRASENSITIVE RESONANT MEMS TRANSDUCERS WITH TUNABLE COUPLING
M. Manav, G. Reynen, M. Sharma, E. Cretu, and A.S. Phani
University of British Columbia, CANADA..........................................................................................................................................................................................

Tactile Sensors
T3P.021

A DIELECTIRIC LIQUID-BASED CAPCITIVE TACTILE SENSOR FOR NORMAL AND SHEARFORCE SENSING
K.W. Liao1, M.T. Hou2, and J.A. Yeh1
1
National Tsing Hua University, TAIWAN and 2National United University, TAIWAN..........................................................................................................................................................................................

T3P.022

BATCH FABRICATED FLEXIBLE TACTILE SENSOR BASED ON CARBON NANOTUBE-POLYMERCOMPOSITES
S. Pyo1, J.-I. Lee1, M.-O. Kim1, T. Chung1, Y. Oh1, S.-C. Lim2, J. Park2, and J. Kim1
1
Yonsei University, SOUTH KOREA and 2Samsung Advanced Institute of Technology, SOUTH KOREA..........................................................................................................................................................................................

T3P.023

FINGERTIP-CONTROLLABLE PULLING FORCE SENSOR
T.Y. Chen, Y.C. Wang, C.Y. Lo, and R. Chen
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

T3P.024

MULTI-AXIAL TACTILE SENSOR WITH MICRO-CANTILEVER EMBEDDED IN HEMISPHERICAL
ELASTOMER FOR SURFACE TEXTURE MEASUREMENT
K. Watanabe1, M. Sohgawa1, T. Kanashima1, M. Okuyama1, H. Noma2, and T. Azuma3
1
Osaka University, JAPAN, 2Advanced Telecommunications Research Institute International, JAPAN, and3
Nitta Corporation, JAPAN..........................................................................................................................................................................................

Thermometers
T3P.025

HARSH ENVIRONMENT TEMPERATURE SENSOR BASED ON 4H-SILICON CARBIDE PN DIODE
N. Zhang and A.P. Pisano
University of California, Berkeley, USA..........................................................................................................................................................................................

T3P.026

SILICON CARBIDE DIODE BRIDGE CIRCUIT FOR CAPACITIVE SENSOR READOUT IN HIGHTEMPERATURE (673K) ENVIRONMENT
R. Chand, S. Tanaka, and M. Esashi
Tohoku University, JAPAN..........................................................................................................................................................................................

T3P.027WIRELESS CHIPLESS PASSIVE MICROFLUIDIC TEMPERATURE SENSOR
A. Rifai1,2, E. Debourg1,2, S. Bouaziz1,2, A. Traille1,2, P. Pons1,2, H. Aubert1,2, and M. Tentzeris3
1
Laboratoire d'Analyse et d'Architecture des Systémes (LAAS-CNRS), FRANCE, 2Universite de Toulouse, FRANCE,and 3Georgia Institute of Technology, USA..........................................................................................................................................................................................

Materials, Fabrication & Packaging Technologies
3-D Structures
T3P.028

FABRICATING BARBED MICROTIP ARRAYS BY LOW-COST SILICON WET ETCHINGTECHNIQUES
S.-W. Tung, C.-H. Kuo, L.-S. Hsu, and Y.-J. Yang
National Taiwan University, TAIWAN..........................................................................................................................................................................................

T3P.029LARGE DISPLACEMENT PLASTIC DEFORMATION PROCESS FOR SILICON PARASOLSTRUCTURE
T. Aono1, Y. Ebata2, S. Matsui2, and T. Watanabe2
1
Hitachi, Ltd., JAPAN and 2Hitachi High Technologies Corporation, JAPAN..........................................................................................................................................................................................

T3P.030

SIMPLIFIED MONOLITHIC PROCESS FOR FABRICATING LOW-COST, HIGH-FREQUENCY,
HIGH-FLATNESS SCANNING MICROMIRRORS
B.W. Chui1, T. Sun2, R. Lim2, D. U.S.2, M. Olivo2, and W. Sun2
1
Ben Chui Consulting, USA and 2Agency for Science, Technology and Research (A*STAR), SINGAPORE..........................................................................................................................................................................................

Films & Nanostructures
T3P.031

A NEW METALLIC GLASS FE-B-ND-NB THIN FILM MATERIAL FOR MICRO SENSORS ANDACTUATORS: FABRICATION AND CHARACTERIZATION
P.A. Tuan1, H. Oguchi1, M. Hara1, M. Shikida2, H. Hida2, T. Ando3, K. Sato4, and H. Kuwano1
1
Tohoku University, JAPAN, 2Nagoya University, JAPAN, 3Ritsumeikan University, JAPAN, and4
Aichi Institute of Technology, JAPAN..........................................................................................................................................................................................

T3P.032ATOMIC LAYER DEPOSITED AL2O3 AND PARYLENE C DUAL-LAYER ENCAPSULATION FOR
BIOMEDICAL IMPLANTABLE DEVICES
X. Xie, L. Rieth, P. Tathireddy, and F. Solzbacher
University of Utah, USA..........................................................................................................................................................................................

T3P.033

GENERATION OF A POROUS DEVICE LAYER ON SOI SUBSTRATES
A. Backes, P. Walkoun, F. Patocka, and U. Schmid
Vienna University of Technology, AUSTRIA..........................................................................................................................................................................................

T3P.034

MICROFABRICATION OF LEAD-FREE (K,Na)NbO3 PIEZOELECTRIC THIN FILMS BY DRYETCHING
F. Kurokawa1, R. Yokokawa2, H. Kotera2, F. Horikiri3, K. Shibata3, M. Sato1, H. Hida1, and I. Kanno1
1
Kobe University, JAPAN, 2Kyoto University, JAPAN, and 3Hitachi Cable, Ltd., JAPAN..........................................................................................................................................................................................

Materials Characterization
T3P.035

DEPENDENCE OF MECHANICAL ON POSITION IN SILICON INGOTO BY EVALUATING B AND GE
CODOPED SILICON
T. Shirata1, T. Sato2, and T. Ando1
1
Ritsumeikan University, JAPAN and 2Silicon Technology Corporation, JAPAN..........................................................................................................................................................................................

T3P.036

PRINTED MICRO-HOTPLATES ON FLEXIBLE SUBSTRATE FOR GAS SENSING
M. Camara1, F. Molina-Lopez1, E. Danesh2, G. Mattana1, A. Bontempi3, D. Teyssieux3, L. Thiery3,
P. Breuil4, C. Pijolat4, K. Persaud2, D. Briand1, and N.F. de Rooij1
1
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND, 2University of Manchester, UK,
3
FEMTO-ST, FRANCE, and 4Ecole Nationale Supérieure des Mines de Saint-Etienne, FRANCE..........................................................................................................................................................................................

T3P.037

EXTRACTING VISCOELASTIC PROPERTIES OF SOFT POLYMERS FROM DYNAMIC
NANOINDENTATION USING AN IMPROVED MODEL
P. Du1, C. Cheng2, H. Lu2, and X. Zhang1
1
Boston University, USA and 2University of Texas, Dallas, USA..........................................................................................................................................................................................

Packaging
T3P.038

AL-AL THERMOCOMPRESSION BONDING FOR WAFER-LEVEL MEMS PACKAGING
N. Malik1,2, K. Schjølberg-Henriksen2, E. Poppe2, and T.G. Finstad1
1
University of Oslo, NORWAY and 2SINTEF ICT, NORWAY..........................................................................................................................................................................................

T3P.039

SN-CU THIN FILM TRANSIENT LIQUID PHASE BONDING TEST WITH DIFFERENTUNDERLAYERS USING FULLY-IN-VACUUM WAFER ALIGNER/BONDER
K. Hikichi1, S. Matsuzaki1, Y. Nonomura2, H. Funabashi2, Y. Hata2, M. Esashi1, and S. Tanaka1
1
Tohoku University, JAPAN and 2Toyota Central Research and Development Laboratories, Inc., JAPAN..........................................................................................................................................................................................

T3P.040

WAFER LEVEL PACKAGING FOR CHAMBERS OF TWO DIFFERENT PRESSURES
K.-C. Liang1,2, C.-W. Cheng1,2, C.-H. Lin1, W.-C. Lai1, and W. Fang1
1
National Tsing-Hua University, TAIWAN and
2
Taiwan Semiconductor Manufacturing Company Ltd., TAIWAN..........................................................................................................................................................................................

Patterning Printing & Etching
T3P.041

A NOVEL FABRICATION PROCESS TO REALISE A VALVELESS MICROPUMP ON A FLEXIBLESUBSTRATE
Y. Wei, R. Torah, K. Yang, S. Beeby, and J. Tudor
University of Southampton, UK..........................................................................................................................................................................................

T3P.042LASER DIRECT WRITING OF THICK HYBRID POLYMER MICROSTRUCTURES
A. Singh, G. Scotti, V. Jokinen, and S. Fransilla
Aalto University, FINLAND..........................................................................................................................................................................................

T3P.043PARTICLE SWARM OPTIMIZATION OF MODEL PARAMETERS: SIMULATION OF DEEP
REACTIVE ION ETCHING BY THE CONTINUOUS CELLULAR AUTOMATON
Y. Li1, Y. Xing1, M.A. Gosálvez2, P. Pal3, and Y. Zhou1
1
Southeast University, CHINA, 2University of the Basque Country, SPAIN, and3
Indian Institute of Technology Hyderabad, INDIA..........................................................................................................................................................................................

Nanoscale Materials, Devices & Fabrication
Bio/Chemical Sensor
T3P.044A STRETCHABLE AND TRANSPARENT SWNT STRAIN SENSOR ENCAPSULATED IN THIN PDMS
FILMS
Y. Liu1, Q. Sheng1, S. Muftu1, A. Khademhosseini2, M.L. Wang1, and M.R. Dokmeci2
1
Northeastern University, USA and 2Brigham and Women's Hospital, Harvard Medical School, USA..........................................................................................................................................................................................

T3P.045

CUO NANOWIRE GAS SENSORS FOR CO DETECTION IN HUMID ATMOSPHERE
S. Steinhauer, E. Brunet, T. Maier, G.C. Mutinati, and A. Köck
AIT Austrian Institute of Technology GmbH, AUSTRIA..........................................................................................................................................................................................

T3P.046

FUNCTIONALIZED CARBON NANOTUBES FOR THE DISCRIMINATION OF VOLATILE ORGANICCOMPOUNDS
I. Hafaiedh1, W. El Euch1, P. Clement2, A. Abdelghani1, and E. Llobet2
1
Institut National des Sciences Appliquées et de Technologie (INSAT), TUNISIA and2
Univeristy Rovira i Virgili, SPAIN..........................................................................................................................................................................................

T3P.047NANOSTRUCTURED MEMBRANE SEPARATORS FOR ELECTROCHEMICAL DETECTION OF
HEAVY METALS
M. Serry1, A. Gamal1, A. Kader1, A. Sharaf1,2, and M. Shaban1,31American University of Cairo, EGYPT, 2Egyptian Atomic Energy Authority, EGYPT, and3
University of Benisuef, EGYPT..........................................................................................................................................................................................

Fabrication
T3P.048

EXCLUDING GRAIN BOUNDARIES IN THIN SI FILM MEMS/NEMS DEVICES
T. Tomikawa1, S. Kumagai1,3, I. Yamashita2,3, Y. Uraoka2,3, and M. Sasaki1,3
1
Toyota Technological Institute, JAPAN, 2Nara Institute of Science and Technology, JAPAN, and3Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

T3P.049

LOW TEMPERATURE PROCESS BELOW 170°C FOR HYDROPHILIC AND HYDROPHOBIC MICROPATTERNS
C. Nakagami1, W. Tonomura1, Y. Kaizuma2, and S. Konishi1
1
Ritsumeikan University, JAPAN and 2Shinko Seiki Co., LTD., JAPAN..........................................................................................................................................................................................

T3P.050

SILICON NANOWIRES HONEYCOMB ARRAY FABRICATION WITH LOW-COST TOP-DOWN
TECHNOLOGY ON (111) SILICON WAFER
X. Yu, Y. Wang, T. Li, and Y. Wang
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................

Nanodevices
T3P.051

SELF-ALIGNED, DIRECT-WRITE GRAPHENE CHANNEL FETS
Y. Liu1, J. Chang2, H. Yang1, S. Lin1, S. Akhbari1, Q. Zhou1, K. Heo1, and L. Lin1
1
University of California, Berkeley, USA and 2University of California, San Francisco, USA..........................................................................................................................................................................................

Nanomaterial & Characterization
T3P.052

ELECTRICAL EVALUATION OF HYDRATED DIAMETER DEPENDENT THICKNESS OF ELECTRIC
DOUBLE LAYER IN NANOCHANNELP. Pungetmongkol, R. Hatsuki, and T. Yamamoto
Tokyo Institute of Technology, JAPAN..........................................................................................................................................................................................

T3P.053

OPTICAL CONTROL OF SURFACE POTENTIAL USING NANOCAPSULE FOR SELECTIVE
INJCRION INTO CELL
H. Maruyama, T. Masuda, and F. Arai
Nagoya University, JAPAN..........................................................................................................................................................................................

Chemical Sensors & Microsystems
Chemical Sensors
T3P.054A MINIATURIZED NON-RADIOACTIVE ELECTRON EMITTER FOR ATMOSPHERIC PRESSURECHEMICAL IONIZATION
P. Cochems, M. Runge, and S. Zimmermann
Leibniz University Hannover, GERMANY..........................................................................................................................................................................................

T3P.055

DEVELOPMENT OF ELECTROCHEMICAL MICROSENSORS FOR THE MONITORING OF
MITOCHONDRIAL ACTIVITIES
E. Vanhove1, S. Ben-Amor1,3, S. Charlot1,2, D. Colin1,2, A. Devin3, M. Rigoulet3, N. Sojic1,3, F. Sékli Belaïdi1,2,
J. Launay1,2, P. Temple-Boyer1,2, and S. Arbault1,3
1
Laboratoire d'Analyse et d'Architecture des Systémes (LAAS-CNRS), FRANCE, 2Université de Toulouse, FRANCE,and 3University of Bordeaux, FRANCE..........................................................................................................................................................................................

T3P.056

OPTICAL SENSORS CROSS-SENSITIVITY AMENDMENT: THE CASE STUDY OF HEAVY METALSCSPT DETECTION
L. Lvova1,2, P. Galloni1, B. Floris1, C. Di Natale1, I. Lundström3, V. Lippolis4, A. Garau4, and R. Paolesse1
1
University of Rome Tor Vergata, ITALY, 2St. Petersburg State University, RUSSIA, 3Linköping University,
SWEDEN, and 4Università degli Studi di Cagliari, ITALY..........................................................................................................................................................................................

T3P.057

UNUSUAL BEHAVIOR OF UNCOATED THICK-FILM PZT CANTILEVERS TOWARDS FLUID
PHASES SENSING. APPLICATION TO WATER AND ETHANOL DETECTION
R. Lakhmi, C. Lucat, I. Dufour, and H. Debéda
Université Bordeaux, FRANCE..........................................................................................................................................................................................

Environmental Sensors
T3P.058

PALLADIUM-BASED SENSOR FOR ELECTROCHEMICAL DETECTION OF MANGANESE IN THE
ENVIRONMENT
W. Kang1, W. Yue1, X. Pei1, A. Bange2, E. Haynes1, W.R. Heineman1, and I. Papautsky1
1
University of Cincinnati, USA and 2Xavier University, USA..........................................................................................................................................................................................

FET Based Gas Sensors
T3P.059

SIC - FET BASED SO2 SENSORS FOR POWER PLANT APPLICATIONS
Z. Darmastuti1, C. Bur1, P. Möller1, N. Lindqvist2, M. Andersson1, A. Schütze3, and A. Lloyd Spetz1
1Linköping University, SWEDEN, 2Alstom Power AB, SWEDEN, and 3Saarland University, GERMANY..........................................................................................................................................................................................

Gas Sensors
T3P.060

CARBON NANOFIBER FLEXIBLE GAS SENSOR MODULATED BY UV LIGHT
O. Monereo, S. Claramunt, G. Vescio, H. Lahlou, R. Leghrib, J.D. Prades, A. Cornet, and A. Cirera
Universitat de Barcelona, SPAIN..........................................................................................................................................................................................

T3P.061

DEVELOPMENT OF AN AMPEROMETRIC H2O2 SENSOR BASED ON MOx/REDUCED GRAPHENEOXIDE NANOCOMPOSITES
S.G. Leonardi1, D. Aloisio1, N. Donato1, M. Latino1, P. Russo2, N. Pinna3, and G. Neri1
1
University of Messina, ITALY, 2University of Aveiro, PORTUGAL, and3
Humboldt-Universität zu Berlin, GERMANY..........................................................................................................................................................................................

T3P.062

GAS DETECTION AND IDENTIFICATION USING MEMS TOF MASS SPECTROMETER
C.-M. Tassetti, O. Peyssonneaux, R. Mahieu, J.-S. Danel, F. Progent, X. Machuron-Mandard, and L. Duraffourg
Commissariat à l'énergie Atomique (CEA), FRANCE..........................................................................................................................................................................................

T3P.063

LOCALIZED HEATING TO TUNGSTEN OXIDE NANOSTRUCTURES DEPOSITION ON GASMICROSENSOR ARRAYS VIA AEROSOL ASSISTED CVD
S. Vallejos, R. Cumeras, C. Calaza, N. Sabaté, E. Figueras, C. Cané, and I. Grácia
Instituto de Microelectrónica de Barcelona (IMB), SPAIN..........................................................................................................................................................................................

T3P.064

VOLATILE ORGANIC COMPOUNDS SENSOR WITH STACKED INTERDIGITATED ELECTRODESCOATED WITH MONOLAYER-PROTECTED GOLD NANOCLUSTERS
C.-Y. Chang1, C.-Y. Kuo1, P.-K. Huang1, W.-C. Tian1, and C.-J. Lu2
1
National Taiwan University, TAIWAN and 2National Taiwan Normal University, TAIWAN..........................................................................................................................................................................................

Humidity Sensors
T3P.065

A STRETCHABLE HUMIDITY SENSOR BASED ON A WRINKLED POLYANILINENANOSTRUCTURE
H. Ryu1, S.J. Cho1, B. Kim2, and G. Lim1
1
Pohang University of Science and Technology (POSTECH), SOUTH KOREA and
2
Massachusetts Institute of Technology, USA..........................................................................................................................................................................................

Hydrogen Gas Sensors
T3P.066

A FAST AND SENSITIVE CATALYTIC HYDROGEN SENSOR BASED ON A STABILIZEDNANOPARTICLE CATALYST
E. Brauns, E. Morsbach, M. Bäumer, and W. Lang
University of Bremen, GERMANY..........................................................................................................................................................................................

Nanowire Based Sensors
T3P.067

POTASSIUM SENSING WITH MEMBRANE-COATED NANOWIRE FIELD-EFFECT TRANSISTORS
M. Wipf1, R.L. Stoop1, A. Tarasov1, K. Bedner2, W. Fu1, M. Calame1, and C.H. Schönenberger1
1
University of Basel, SWITZERLAND and 2Paul Scherrer Institut, SWITZERLAND..........................................................................................................................................................................................

Bio-Sensors & Bio-Microsystems
Cell Sensing & Manipulation
T3P.068

2D CANTILEVER ARRAY WITH SPHERICAL TIPS FOR PARALLEL FORCE SPECTROSCOPY ON
CANCEROUS CELLS
F. Loizeau1, M. Favre2, T. Akiyama1, S. Gautsch1, A. Meister2, R. Smajda2, P. Vettiger1, G. Weder2,and N.F. de Rooij1
1
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND and2
Centre Suisse d'Electronique et de Microtechnique (CSEM), SWITZERLAND..........................................................................................................................................................................................

T3P.069

AN ELECTROKINETICALLY CONTROLLED MICROCHIP FOR STUDYING BINDING
INTERACTIONS OF NUCLEIC ACIDS WITH CELLS
J. Kim, J.P. Hilton, K. Yang, R. Pei, M. Stojanovic, and Q. Lin
Columbia University, USA..........................................................................................................................................................................................

T3P.070

LABEL-FREE COLORECTAL CANCER CELL LINE BIO-SENSING USING RF RESONATOR
L.Y. Zhang1, A. Landoulsi1, C. Bounaix Morand du Puch2, A. Lacroix1, C. Dalmay1, A. Bessaudou1, C. Lautrette2,
S. Battu1, F. Lalloué1, M.-O. Jauberteau1, P. Blondy1,and A. Pothier1
1
Université de Limoges, FRANCE and 2ONCOMEDICS, FRANCE..........................................................................................................................................................................................

T3P.071

METAMATERIAL APPLICATION IN SENSING FOR LIVING CELLS
K. Shiraga1, Y. Ogawa1, K. Hattori1, T. Suzuki1, N. Kondo1, A. Irisawa2, and M. Imamura2
1
Kyoto University, JAPAN and 2ADVANTEST Corporation, JAPAN..........................................................................................................................................................................................

T3P.072

ON-CHIP MAGNETIC FIELD MODULATION FOR DISTRIBUTED IMMUNOMAGNETIC
DETECTION OF CIRCULATING TUMOR CELLS
P. Chen, Y.-Y. Huang, K. Hoshino, and X. Zhang
University of Texas, Austin, USA..........................................................................................................................................................................................

Fluid Manipulation in Microsystems
T3P.073

3D ALGINATE CONSTRUCTS FOR TISSUE ENGINEERING PRINTED USING A COAXIAL FLOW
FOCUSING MICROFLUIDIC DEVICE
S.T. Beyer, A. Bsoul, A. Ahmadi, and K. Walus
University of British Columbia, CANADA..........................................................................................................................................................................................

T3P.074

A STACKED ELECTRODE SET INCLUDING SUSPENDED CARBON NANOMESHES AND PLANARCARBON PADS FOR ELECTROCHEMICAL/BIO SENSOR APPLICATIONS
Y. Lim, J. Heo, and H. Shin
Ulsan National Institute of Science and Technology (UNIST), SOUTH KOREA..........................................................................................................................................................................................

T3P.075

CONDUCTIMETRIC TRANSDUCER ARRAY FOR THE READOUT OF LOW-DENSITY PROTEINMICROARRAYS
M. Mallén, D. Bonilla, M. Díaz-González, J.P. Salvador, M.P. Marco, A. Baldi, and C. Fernández-Sánchez
Spanish Council for Scientific Research (CSIC), SPAIN..........................................................................................................................................................................................

T3P.076

FULLY-INTEGRATED PLASTIC-ANTIBODY-BASED BIOCHIPS WITH EASY-TO-ATTACH VACUUM
SOURCES FOR C-REACTIVE PROTEIN SENSING
C.-H. Tsai1, W. Chung1, W.-H. Wang1, K.-W. Chen1, C.-C. Hong1, and C.-P. Chen2
1
National Tsing Hua University, TAIWAN and 2Mackay Memorial Hospital, TAIWAN..........................................................................................................................................................................................

T3P.077

DROPLET NETWORK CONNECTED BY BIOLOGICAL NANOPORES FOR DNA COMPUTING
H. Yasuga1,3, R. Kawano1, M. Takinoue4, Y. Tsuji1,3, T. Osaki1, K. Kamiya1, N. Miki1,3, and S. Takeuchi1,2
1Kanagawa Academy of Science and Technology (KAST), JAPAN, 2University of Tokyo, JAPAN,
3
Keio University, JAPAN, and 4Tokyo Institute of Technology, JAPAN..........................................................................................................................................................................................

T3P.078

ON-DEMAND ELECTROPHORETIC SEPARATION OF DNA IN WRITTEN GEL LINES ON PLANARSUBSTRATESL. Tanguy1, L. Gutzweiler2, P. Koltay2, R. Zengerle2, and L. Riegger3
1
Institute for Micromachining and Information Technology (HSG-IMIT), GERMANY,
2
University of Freiburg - IMTEK, GERMANY, and 3Biofluidix, GmbH, GERMANY..........................................................................................................................................................................................

T3P.079

SOFT 3D RETINAL IMPLANTS WITH DIAMOND ELECTRODE A WAY FOR FOCAL STIMULATION
L. Rousseau2, E. Scorsonne1, A. Bendali3, M. Djilas3, H. Girard1, M. Cottance1, S. Joucla4, E. Dubus3, J. Degardin3,
B. Yvert4, G. Lissorgues2, P. Bergonzo1, and S. Picaud31Commissariat à l'énergie Atomique (CEA), FRANCE, 2University Paris-EST, FRANCE, 3Institut de la vision Paris,
FRANCE, and 4Institut des Maladies Neurodégérative, FRANCE..........................................................................................................................................................................................

Manipulation & Detection of Bacteria
T3P.080

AN INTEGRATED MICROFLUIDIC SYSTEM USING BURIED OPTICAL FIBERS FOR DETECTION
OF PHALAENOPSIS ORCHID PATHOGENS
C.-L. Lin1, W.-H. Chang1, C.-H. Wang1, P.-C. Li2, F.-J. Jan2, T.-Y. Chen2, and G.-B. Lee1
1
National Tsing Hua University, TAIWAN and 2National Chung Hsing University, TAIWAN..........................................................................................................................................................................................

T3P.081

AXIAL CENTRIFUGAL FILTRATION – A NOVEL APPROACH FOR RAPID BACTERIAL
CONCENTRATION FROM A LARGE VOLUME
M. Karle1, J. Wöhrle1, F. von Stetten2, R. Zengerle2, and D. Mark1
1
Institute for Micromachining and Information Technology (HSG-IMIT), GERMANY and2
University of Freiburg - IMTEK, GERMANY..........................................................................................................................................................................................

Sensing in Biosystems
T3P.082

A MICROFLUIDIC DEVICE CAPABLE OF CONTINUOUS QUANTIFICATION OF SINGLE-CELL
SPECIFIC MEMBRANE CAPACITANCE AND CYTOPLASM CONDUCTIVITY
Y. Zhao1, D. Chen1, Y. Luo1, H. Li1, B. Deng1, S.-B. Huang2, T.-K. Chiu2, M.-H. Wu2, R. Long3,
J. Wang1, and J. Chen11
Chinese Academy of Sciences, CHINA, 2Chang Gung University, TAIWAN, and 3University of Colorado, USA..........................................................................................................................................................................................

T3P.083

ACCURATE QUANTIFICATION OF MULTIPLE BIOMARKERS USING MICROFLUIDICDETERMINATION OF TUMOR-SPECIFIC ANTIGENIC SITES IN CANCER TISSUES
S. Kwon1, E.S. Lee2, and J.-K. Park1
1
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA and2
National Cancer Center, SOUTH KOREA..........................................................................................................................................................................................

T3P.084

CIRCADIAN RHYTHMS IN NEUROSPORA CRASSA ON A MICROFLUIDIC DEVICE FOR REALTIME GAS PERTURBATIONS
K.K. Lee, C.H. Ahn, and C.I. Hong
University of Cincinnati, USA..........................................................................................................................................................................................

T3P.085

IN VITRO TUMOR MODEL FOR EVALUATING THE LUNG CANCER INDUCED TUMORANGIOGENESIS
T.-S. Chen1, K.-W. Chang1, S. Sivashankar1, K.-Y. Lee2, and C.-H. Liu1
1
National Tsing Hua University, TAIWAN and 2Chang Gung Memorial Hospital, TAIWAN..........................................................................................................................................................................................

T3P.086

NANOPOROUS ALUMINA MEMBRANE AND NANOPARTICLE BASED MICROFLUIDIC SENSING
PLATFORM FOR DIRECT DNA DETECTION
W.W. Ye, J.Y. Shi, C.Y. Chan, L.D. Xiao, and M. Yang
Hong Kong Polytechnic University, HONG KONG..........................................................................................................................................................................................

T3P.087SENSITIVE AND SELECTIVE DETECTION OF SUPEROXIDE SECRETED FROM NEUTROPHILSBASED ON ONE-ELECTRODE REDOX REACTIONS
S. Kimura, Z. Cai, M. Yokokawa, J. Fukuda, and H. Suzuki
University of Tsukuba, JAPAN..........................................................................................................................................................................................

Medical Microsystems
T3P.088

DESIGN AND FABRICATION OF A MULTI-POINT PH AND TEMPERATURE RECORDING PROBE
FOR REAL-TIME HEART MUSCLE MONITORING
Y.T. Fan1, Y.C. Chen1, Y.T. Cheng1, and Y.S. Chen2
1
National Chiao Tung University, TAIWAN and 2National Taiwan University Hospital, TAIWAN..........................................................................................................................................................................................

T3P.089

BI-LAYER ENCAPSULATION OF UTAH ARRAY BASED NERUAL INTERFACES BY ATOMICLAYER DEPOSITED AL2O3 AND PARYLENE C
X. Xie, L. Rieth, R. Cardwell, R. Sharma, J.-M. Yoo, M. Diwekar, P. Tathireddy, and F. Solzbacher
University of Utah, USA..........................................................................................................................................................................................

T3P.090

FABRICATION OF ROUNDED KNIFE-EDGED STRUCTURE FOR TRANS-DERMAL DRUG
DELIVERY SYSTEM
K. Bessho, C. Miyake, and M. Shikida
Nagoya University, JAPAN..........................................................................................................................................................................................

T3P.091

LONG TERM DIFFUSION PERFORMANCE OF NANO POROUS POLYETHER SULFONEMEMBRANE IN DIALYSIS SYSTEM
G.S. Prihandana, Y. Nishinaka, H. Ito, Y. Kanno, and N. Miki
Keio University, JAPAN..........................................................................................................................................................................................

T3P.092

NANOFLEX FOR NEURAL NANOPROBES
P. Ledochowitsch, R.F. Tiefenauer, B. Pepin, M.M. Maharbiz, and T.J. Blanche
University of California, Berkeley, USA..........................................................................................................................................................................................

T3P.093

WIRELESS INTRAORAL SENSOR FOR THE PHYSIOLOGICAL MONITORING OF TONGUE
PRESSURE
E. Sardini1, M. Serpelloni1, and R. Fiorentini2
1
University of Brescia, ITALY and 2Dental-Care, ITALY..........................................................................................................................................................................................

Microfluidics
Droplet Based Microfluidics
T3P.094

THREE-DIMENSIONAL DIGITAL MICROFLUIDICS USING AN ALTERNATIVE CURRENT
ELECTROWETTING-ON-DIELECTRIC (AC-EWOD)
J.B. Chae, I.U. Shin, K. Rhee, and S.K. Chung
Myongji University, SOUTH KOREA..........................................................................................................................................................................................

Microfluidics
T3P.095

APPLICATION OF NANOSTRUCTURE ON BUBBLE TRAPPING AND DEGASSING
H.B. Cheng and Y.W. Lu
National Taiwan University, TAIWAN..........................................................................................................................................................................................

T3P.096

ENHANCED RADIAL DISPERSION AS A MEANS TO GAIN SEPARATION PERFORMANCE INMINIATURIZED LIQUID CHROMATOGRAPHY SYSTEMS
J. Op de Beeck1, M. Callewaert1, H. Ottevaere1, H. Gardeniers2, G. Desmet1, and W. De Malsche1
1
Vrije Universiteit Brussel, BELGIUM and 2MESA+, University of Twente, THE NETHERLANDS..........................................................................................................................................................................................

T3P.097

MICROFLUIDIC STERILIZATION IN A HIGH TEMPERATURE/PRESSURE CONTINUSOUS
FLOWING CHIP
R. Zhang1, B. Wang1, M. Chu1, R. Ding2, Y. Wang1, and W. Wang1
1
Peking University, CHINA and 2LiaoNing University of Traditional Chinese Medicine, CHINA..........................................................................................................................................................................................

T3P.098

SEPARATION OF DIFFERENT SIZED NANOPARTICLES WITH TIME USING A ROTATIONALFLOW IN A 2×2 MICROFLUIDIC CENTRIFUGE
B.H. Kwon, H.J. Jeon, D.I. Kim, and J.S. Go
Pusan National University, SOUTH KOREA..........................................................................................................................................................................................

T3P.099

VIRTUAL CHANNELS FOR A DYNAMICALLY RECONFIGURABLE NETWORK OF FLOWINGMAGNETIC BEADS
H.-W. Chiang, M.-C. Hsieh, Y.-D. Chang, P.-F. Yeh, and J.-C. TsaiNational Taiwan University, TAIWAN..........................................................................................................................................................................................

Microfluidics with Cells
T3P.100

APPLICATION OF MICROFLUIDIC SPOTTING-BASED GENERATOR AND PLURONIC® F127
SOLUTION TO GENERATE COLLAGEN MICROBEADS MICROENCAPSULATION OF CELLS
S.B. Huang, H.C. Lee, S.W. Tsai, and M.H. Wu
Chang Gung University, TAIWAN..........................................................................................................................................................................................

T3P.101

MICROFLUIDIC IMPEDANCE CYTOMETER FOR CHARACTERIZATION OF SUBCELLULAR
MORPHOLOGY OF SINGLE CELLS
N. Haandbæk, S.C. Bürgel, F. Rudolf, F. Heer, and A. Hierlemann
ETH Zürich, SWITZERLAND..........................................................................................................................................................................................

Composite Materials/Polymers, Devices & Fabrication
T3P.102

3D MICROFLUIDIC CARTRIDGES BY GAS PRESSURE ASSISTED THERMAL BONDING OF
MICROTHERMOFORMED FILMS
D. Kosse1, F. Schwemmer2, D. Buselmeier2, R. Zengerle2, and F. von Stetten1
1
Institute for Micromachining and Information Technology (HSG-IMIT), GERMANY and2
University of Freiburg, IMTEK, GERMANY..........................................................................................................................................................................................

T3P.103

DEVELOPMENT OF MEMS USING BIODEGRADABLE POLYMER MATERIAL
S. Amaya1 and S. Sugiyama2
1
TOWA Corporation, JAPAN and 2Ritsumeikan University, JAPAN..........................................................................................................................................................................................

T3P.104

FABRICATION OF POLYMERIC DRY MICRONEEDLE ELECTRODES COATED WITH
NANOPOROUS PARYLENE
Y. Nishinaka1, R. Jun1, G.S. Prihandana1, and N. Miki1,21Keio University, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

Energy & Power MEMS
Electro Chemical Energy Storage
T3P.105

ALL SOLID-STATE MICRO-SUPERCAPACITORS USING IONOGEL ELECTROLYTE
B. Hsia1, S. Wang1,2, M.-S. Kim1, C. Carraro1, and R. Maboudian1
1
University of California, Berkeley, USA and 2Jilin University, CHINA..........................................................................................................................................................................................

Electro Static/Electret Harvesters
T3P.106

A SPONTANEOUS POLARIZATION ELECTRET FOR ELECTROSTATIC VIBRATION ENERGYHARVESTING
H. Asanuma, H. Oguchi, M. Hara, and H. Kuwano
Tohoku University, JAPAN..........................................................................................................................................................................................

T3P.107

NON-LINEAR MEMS ELECTROSTATIC KINETIC ENERGY HARVESTER WITH A TUNABLE
MULTISTABLE POTENTIAL FOR STOCHASTIC VIBRATIONS
F. Cottone1, P. Basse1, R. Guillemet1, D. Galayko2, F. Marty1, and T. Bourouina1
1
Université Paris-Est, FRANCE and 2Université Pierre et Marie Curie, FRANCE..........................................................................................................................................................................................

Harvesting Energy from Mechanical Vibrations
T3P.108

A MINIATURE HARVESTER OF VERTICAL VIBRATORY CAPACITVE TYPE ACHIVING SEVERALTENS MICROWATT FOR BROAD FREQUENCY OF 20-40 HZ
T. Takahashi1, M. Suzuki1, T. Nishida2, Y. Yoshikawa2, and S. Aoyagi1
1Kansai University, JAPAN and 2ROHM Co., Ltd., JAPAN..........................................................................................................................................................................................

T3P.109

AN IMPACT BASED FREQUENCY UP-CONVERSION MECHANISM FOR LOW FREQUENCYVIBRATION ENERGY HARVESTING
B. Edwards, M. Xie, K.C. Aw, A.P. Hu, and W. Gao
University of Auckland, NEW ZEALAND..........................................................................................................................................................................................

T3P.110HARVESTING ENERGY FROM LOW FREQUENCY VIBRATION USING MSMA/MFC LAMINATECOMPOSITE
S. Ju1, S.H. Chae1, Y. Choi1, S. Jun1, S.M. Park1, S. Lee1, H.W. Lee2, and C.-H. Ji1
1Ewha Womans University, SOUTH KOREA and 2Ewha Womans University School of Medicine, SOUTH KOREA..........................................................................................................................................................................................

T3P.111WIDE TUNING-RANGE RESONANT-FREQUENCY CONTROL BY COMBINING
ELECTROMECHANICAL SOFTENING AND HARDENING SPRINGS
C.P. Le and E. Halvorsen
Vestfold University College, NORWAY..........................................................................................................................................................................................

Magnetic Sensors/Voltage Sensors
T3P.112ANTI-ELECTROMAGNETIC INTERFERENCE AND CALIBRATION SCHEMES OF FLEXIBLECURRENT SENSOR TAG FOR RELIABLE CURRENT DETECTION IN HOUSEHOLD APPLIANCE
Y.C. Chen1, W.H. Hsu1, S.H. Cheng2, and Y.T. Cheng1
1National Chiao Tung University, TAIWAN and 2Industrial Technology Research Institute (ITRI), TAIWAN..........................................................................................................................................................................................

T3P.113

ISOLATED VOLTAGE SENSING USING MICRO-RESONATOR
N. Nobunaga1, S. Hasegawa1, S. Kumagai1, K. Masuno2, M. Ishii2, S. Uematsu2, and M. Sasaki1
1
Toyota Technological Institute, JAPAN and 2Yazaki Corporation, JAPAN..........................................................................................................................................................................................

Piezo/Pyro Electric Energy Harvester
T3P.114

A MODEL FOR MAGNETIC PLUCKING OF PIEZOELECTRIC BEAMS IN ENERGY HARVESTERS
P. Pillatsch, E.M. Yeatman, and A.S. Holmes
Imperial College, UK..........................................................................................................................................................................................

Thermoelectric Thermal Energy Harvesters
T3P.115

MICROFLUIDIC HEAT TRANSFER SYSTEMS OPTIMIZED FOR THERMOELECTRIC HEATEXCHANGERS
N. Wojtas and C. Hierold
ETH Zürich, SWITZERLAND..........................................................................................................................................................................................

T3P.116

SOLAR THERMOPHOTOVOLTAIC ENERGY CONVERSION SYSTEMS WITH TANTALUM
PHOTONIC CRYSTAL ABSORBERS AND EMITTERS
Y. Nam1,2, A. Lenert 1, Y.X. Yeng1, P. Bermel1, M. Soljačić1, and E.N. Wang1
1
Massachusetts Institute of Technology, USA and 2Kyung Hee University, SOUTH KOREA..........................................................................................................................................................................................

T3P.117

WEARABLE THERMOELECTRIC GENERATOR FOR HUMAN CLOTHING APPLICATIONS
M.K. Kim, M.S. Kim, S.E. Jo, H.L. Kim, S.M. Lee, and Y.J. Kim
Yonsei University, SOUTH KOREA..........................................................................................................................................................................................

RF MEMS, Resonators & Oscillators
Resonators Oscillators
T3P.118

DEMONSTRATION OF SUB-HZ STRUCTURAL SYMMETRY IN MICRO-GLASSBLOWN
WINEGLASS RESONATORS WITH INTEGRATED ELECTRODES
D. Senkal, M.J. Ahamed, A.A. Trusov, and A.M. Shkel
University of California, Irvine, USA..........................................................................................................................................................................................

T3P.119

ENHANCED PIEZORESISTIVE SENSING VIA SYNCHRONIZED OSCILLATIONS IN A
MECHANICALLY COUPLED DISK ARRAY
A. Iqbal, W. Zhang, and J.E.-Y. Lee
City University of Hong Kong, HONG KONG..........................................................................................................................................................................................

T3P.120IMPACT ON FILM BULK ACOUSTIC RESONATOR TEMPCO AND QUALITY FACTOR FROMBORON DOPED SIO2 TEMPERATURE COMPENSATION MATERIAL
Q. Zou, M. Small, D. Lee, F. Bi, R. Snyder, T.L. Lamers, J. Choy, and R. Ruby
Avago Technologies Inc., USA..........................................................................................................................................................................................

T3P.121

MODE SELECTION BEHAVIOR OF VHF THERMAL-PIEZORESISTIVE SELF-SUSTAINEDOSCILLATORS
H.J. Hall1, D.E. Walker2, L. Wang1, R.C. Fitch2, J.S. Bunch1, S. Pourkamali3, and V.M. Bright1
1
University of Colorado, USA, 2Air Force Research Laboratory, USA, and 3University of Denver, USA..........................................................................................................................................................................................

T3P.122SHEAR MODE RESONATORS BASED ON ALUMINUM NITRIDE ROUND MEMBRANES WITH A
RING-SHAPED ELECTRODE
A.T. Tran, T.S.Y. Moh, G. Pandraud, H. Schellevis, A. Akhnoukh, and P.M. Sarro
Delft University of Technology, THE NETHERLANDS..........................................................................................................................................................................................

RF MEMS Waveguides
T3P.123

DIELECTRIC CHARGING IN MEMS WITH DIELECTRIC-DIELECTRIC CONTACTS
D. Molinero1, C. Shen1, J.C.M. Hwang1, A.K. Stamper2, S.J. Cunningham3, and A.S. Morris3
1
Lehigh University, USA, 2IBM Corporation, USA, and 3wiSpry Company, USA..........................................................................................................................................................................................

T3P.124

LTCC-BASED THREE DIMENSIONAL INDUCTORS WITH NANO-FERRITE EMBEDDED CORE FOR
ONE-CHIP TUNABLE RF SYSTEMS
Y.-C. Lin1, F. Gabler2, Y.-C. Tsai1, S. Tanaka1, T. Gessner1,2,3, and M. Esashi1
1
Tohoku University, JAPAN, 2Fraunhofer ENAS, GERMANY, and 3Chemnitz University of Technology, GERMANY..........................................................................................................................................................................................

Optical MEMS
Micro Lenses
T3P.125

A SILICON-GLASS HYBRID LENS FOR SIMULTANEOUS COLOR-AND-THERMAL IMAGING
T. Takahata, K. Matsumoto, and I. Shimoyama
University of Tokyo, JAPAN..........................................................................................................................................................................................

Mirrors
T3P.126

A CONFOCAL LASER SCANNING ENDOSCOPE USING A VARIFOCAL SCANNING MIRROR
T. Sasaki and K. Hane
Tohoku University, JAPAN..........................................................................................................................................................................................

T3P.127

LOW-VOLTAGE-ACTUATED MEMS MIRROR ARRAY WITH HIGH FILL FACTOR FOR PHOTONICSWITCH APPLICATIONS
M. Nakajima, K. Kuwabara, T. Sakata, M. Usui, T. Ishihara, J. Kodate, K. Hadama, N. Nemoto,T. Yamamoto, and Y. Jin
NTT Microsystem Integration Laboratories, JAPAN..........................................................................................................................................................................................

Optical Switches/Splitters
T3P.128

A NEWLY DESIGNED CURVED BEAM MICROSHUTTER DISPLAY DEVICE WITH HIGH
APERTURE RATIO
K.-S. Lim and J.-B. Yoon
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA..........................................................................................................................................................................................

Ring Resonators
T3P.129

A TUNABLE LASER WITH LOOP-BACK EXTERNAL CAVITY BASED ON DOUBLE RINGRESONATORS
M. Ren1, H. Cai2, J.F. Tao1, J.M. Tsai2, P. Kropelnicki2, A.B. Randles2, M. Tang2, D.L. Kwong2, and A.Q. Liu1
1
Nanyang Technological University, SINGAPORE and2
Agency for Science, Technology and Research (A*STAR), SINGAPORE..........................................................................................................................................................................................

Tera Hertz & Plasmonic Devices
T3P.130

AN OPTICALLY TUNABLE TERAHERTZ PERFECT ABSORBER
H.R. Seren1, A.C. Strikwerda1, L. Cao1, G. Keiser1, J. Zhang1, K. Fan1, G. Metcalfe2, M. Wraback2, R.D. Averitt1,
and X. Zhang1
1
Boston University, USA and 2U.S. Army Research Laboratory, USA..........................................................................................................................................................................................

Actuators
T3P.131

ALL-POLYMER OPTOTHERMAL-ACTUATED MOEMS VARIABLE OPTICAL ATTENUATOR
A. Llobera1,2, B. Hoxhold1, S. Demming1, A. Voigt3, S. de Pedro2, A. Waldschik1, V.J. Cadarso4, G. Gruetzner3,
and S. Büttgenbach1
1
Technische Universität Braunschweig, SPAIN, 2Universitat Autonoma de Barcelona, SPAIN,
3
micro resist technology GmbH, GERMANY, and 4École Polytechnique Fédérale de Lausanne (EPFL),SWITZERLAND..........................................................................................................................................................................................

T3P.132

DUAL-BEAM, SIX-TERMINAL NANOELECTROMECHANICAL RELAYS
K.L. Harrison1, W.S. Lee1, K. Shavezipur2, J. Provine1, S. Mitra1, H.-S.P. Wong1, and R.T. Howe1
1
Stanford University, USA and 2Ohio State University, USA..........................................................................................................................................................................................

T3P.133

MICRO HYDRAULIC BENDING ACTUATOR FOR MINIMALLY INVASIVE MEDICAL DEVICE
M. Matsuo, K. Abe, S. Suda, T. Matsunaga, and Y. Haga
Tohoku University, JAPAN..........................................................................................................................................................................................

T3P.134

VISUAL SERVO OF MUSCLE-POWERED OPTOGENETIC BIOACTUATOR
S.P. Beh1, M. Hirooka1, T. Hoshino1, K. Hoshino2, Y. Akiyama1, H. Tsujimura2, K. Iwabuchi2, and K. Morishima1
1
Osaka University, JAPAN and 2Tokyo University of Agriculture and Technology, JAPAN..........................................................................................................................................................................................

Theory, Design & Test Methodology
Fluidic Design & Test
T3P.135

CHARACTERIZATION AND CALIBRATION OF U-SHAPED MASS DENSITY AND VISCOSITYSENSORS BY AN ANALYTICAL MODELING APPROACH
M. Heinisch, E.K. Reichel, T. Voglhuber-Brunnmaier, and B. Jakoby
Johannes Kepler University Linz, AUSTRIA..........................................................................................................................................................................................

Physical MEMS Design
T3P.136FINITE ELEMENT SIMULATIONS COMBINED WITH STATISTICAL ANALYSIS OF VARIANCE:EXPLORING THE POTENTIAL OF PIEZOELECTRIC MEMS MICROPHONES
G. Schrag, T. Reutter, and G. Wachutka
Munich University of Technology, GERMANY..........................................................................................................................................................................................

T3P.137PARTICLE SWARM OPTIMIZATION FOR DESIGN OF MEMS RESONATORS WITH LOW
THERMOELASTIC DISSIPATION
J. Lake1, E. Ng2, C.-H. Ahn2, V. Hong2, Y. Yang2, J. Wong1, and R. Candler1
1
University of California, Los Angeles, USA and 2Stanford University, USA..........................................................................................................................................................................................

T3P.138STUDIES ON THINNED FLEXIBLE INTEGRATED CAPACITIVE PRESSURE SENSORS IN TACTILESENSOR ARRAYS FOR THE USE IN ROBOTICS AND PROSTHETICS
J.A. Müntjes1, J. Häfner1, M. Görtz2, and W. Mokwa1
1
RWTH Aachen University, GERMANY and2
Fraunhofer Institute of Microelectronic Circuits and Systems, GERMANY..........................................................................................................................................................................................

Switch Design, Simulation & Test
T3P.139

IN-LINE ADHESION MONITORING AND THE EFFECTS OF PROCESS VARIATIONS ON ADHESIONIN MEMS
M. Shavezipur1,2, W. Gou1,3, C. Carraro1, Y. Tian1,4, R. Maboudian1, I. Gelmi5, R. Campedelli5, and M. Azpeitia51
University of California, Berkeley, USA, 2Ohio State University, USA, 3Hohai University, CHINA,
4
Harbin Institute of Technology, CHINA, and 5STMicroelectronics, ITALY..........................................................................................................................................................................................

Late News
T3P.140DEMONSTRATION OF INERTIAL FOCUSING IN STRAIGHT MICROFLUIDIC CHANNELS WITH
HIGH REYNOLDS NUMBERS UP TO TURBULENCE ONSET
A.T. Ciftlik and M.A.M. Gijs
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND..........................................................................................................................................................................................

T3P.141

MONOLITHIC 2GHZ ELECTROSTATICALLY ACTUATED MEMS OSCILLATOR WITH OPTOMECHANICAL FREQUENCY MULTIPLIER
S. Tallur and S.A. Bhave
Cornell University, USA..........................................................................................................................................................................................

T3P.142

MULTIFUNTIONAL CHRONIC 3D ELECTRODE ARRAYS BASED ON A SIMPLE FOLDINGPROCESS
J.K. John, E. Kim, H. Tu, J. Zhang, J.A. Loeb, and Y. Xu
Wayne State University, USA..........................................................................................................................................................................................

T3P.143

NICKEL-OXIDE-BASED SUPERCAPACITORS WITH HIGH ASPECT RATIO CONCENTRICCYLINDRICAL ELECTRODES
A. Armutlulu, J.K. Kim, M.S. Kim, S.A. Bidstrup Allen, and M.G. Allen
Georgia Institute of Technology, USA..........................................................................................................................................................................................

T3P.144

SUB-MICRON GAP A-SI:H THIN FILM LAMÉ-MODE RESONATOR PROCESSED AT LOW
TEMPERATURE ON A GLASS SUBSTRATE
A. Gualdino1, J. Gaspar2, V. Chu1, and J.P. Conde1,31Instituto de Engenharia de Sistemas e Computadores (INESC), PORTUGAL, 2International Iberian
Nanotechnology Laboratory (INL), PORTUGAL, and 3Instituto Superior Técnico, PORTUGAL..........................................................................................................................................................................................

16:00 - 16:30

Break & Exhibit Inspection

Session T4A - Physical Microsystems 2
Session Chairs: T. Kenny, Stanford University, USA and S. Franssila, Aalto University, FINLAND

16:30 - 17:00
T4A.001

17:00 - 17:15
T4A.002

17:15 - 17:30
T4A.003

17:30 - 17:45
T4A.004

17:45 - 18:00
T4A.005

Invited Speaker
INTERROGATING AND MANIPULATING AT THE NANOMETRE SCALE - FROM SCIENTIFICINSTRUMENTATION TO INDUSTRIAL APPLICATIONS
U. Staufer1, T. Akiyama2, S. Gautsch2, D. Parrat2, N.F. de Rooij2, and R. Imer3
1
Delft University of Technology, THE NETHERLANDS, 2École Polytechnique Fédérale de Lausanne (EPFL),SWITZERLAND, and 3Centredoc, SWITZERLAND..........................................................................................................................................................................................
HIGH SPEED AND PARALLEL NANOIMAGING USING AN ARRAY OF HEATED ATOMIC FORCEMICROSCOPE CANTILEVERS
S. Somnath, H. Kim, H. Hu, and W.P. King
University of Illinois, Urbana-Champaign, USA..........................................................................................................................................................................................
DESIGN OF MICRO-FABRICATED TRANSPARENT OPTICAL SENSORS FOR ACCURATE LINE-OFSIGHT DETECTION AND THEIR APPLICATIONS IN INFORMATION COMMUNICATIONTECHNOLOGY
M. Ozawa1, A. Oikawa1, K. Sampei1, and N. Miki1,21Keio University, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................
MULTI-AXIAL CONFOCAL DISTANCE SENSOR USING VARIFOCAL LIQUID LENS
K. Noda, N. Binh-Khiem, Y. Takei, T. Takahata, K. Matsumoto, and I. Shimoyama
University of Tokyo, JAPAN..........................................................................................................................................................................................
MEMS HIGH-DOSES RADIATION SENSOR
I. Augustyniak1, J. Dziuban1, P. Knapkiewicz1, M. Matusiak2, M. Olszacki2, and P. Pons3,41
Wroclaw University of Technology, POLAND, 2National Center for Nuclear Research, POLAND,
3
Laboratoire d'Analyse et d'Architecture des Systémes (LAAS), FRANCE, and 4University of Toulouse, FRANCE..........................................................................................................................................................................................

18:00 - 18:15
T4A.006

18:15 - 18:30
T4A.007

SERPENTINE GEOMETRY FOR ENHANCED PERFORMANCE OF NANOMETER-THIN PLATINUM
BOLOMETERS
F. Purkl1,2, T.S. English3, G. Yama2, J. Provine3, A.K. Samarao3, A. Feyh3, B. Kim3, G. O’Brien3, O. Ambacher1,
R.T. Howe3, and T.W. Kenny3
1
University of Freiburg - IMTEK, GERMANY, 2Robert Bosch LLC, USA, and 3Stanford University, USA..........................................................................................................................................................................................
A NOVEL TRANSDUCER FOR PHOTON ENERGY DETECTION VIA NEAR-FIELD CAVITYOPTOMECHANICS
J.F. Tao1,2, H. Cai2, W.X. Zhang2, J.M. Tsai2, P. Kropelnicki2, A.B. Randles2, M. Tang2, and A.Q. Liu1,2
1
Nanyang Technological University, SINGAPORE and 2Agency for Science, Technology and Research (A*STAR),SINGAPORE..........................................................................................................................................................................................

Session T4B - Microfluidics with Cells
Session Chairs: D. Juncker, McGill University, CANADA and Y.-K. Lee, Hong Kong University of Science and Technology, HONG KONG

16:30 - 17:00
T4B.001

17:00 - 17:15
T4B.002

17:15 - 17:30
T4B.003

17:30 - 17:45
T4B.004

17:45 - 18:00
T4B.005

18:00 - 18:15
T4B.006

Invited Speaker
CELL-LADEN HYDROGEL BEADS, FIBERS AND PLATES FOR 3D TISSUE CONSTRUCTION
S. Takeuchi
Tokyo University, JAPAN and Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................
QUANTITATIVE ESTIMATION OF THE LIPID PRODUCTIVITY OF SINGLE ALGAE CELLS IN
ALGINATE HYDROGEL MICROBEADS
D.-H. Lee, C.Y. Bae, J.-I. Han, and J.-K. Park
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA..........................................................................................................................................................................................
INERTIAL SEPARATION OF PARTICLES WITH SMALL SIZE-VARIATIONS USING SELFRELEASING MICROVORTEX
X. Wang, J. Zhou, and I. Papautsky
University of Cincinnati, USA..........................................................................................................................................................................................
REAL-TIME MULTI-PARAMETER MONITORING OF IMMOBILIZED SINGLE YEAST CELLS VIA
ELECTRICAL IMPEDANCE SPECTROSCOPY
Z. Zhu, O. Frey, N. Haandbæk, D.S. Ottoz, F. Rudolf, and A. Hierlemann
ETH Zürich, SWITZERLAND..........................................................................................................................................................................................
NOVEL MICROFLUIDIC PLATFORM WITH THROUGH-POLYDIMETHYLSILOXANE MICROTIP
ELECTRODE ARRAY FOR ON-CHIP CELL ANALYSIS
J.-G. Ha1, S.-K. Lee2, S.-J. Bai2, Y.-S. Song2, Y.-K. Kim1, and J.-H. Park2
1
Seoul National University, SOUTH KOREA and 2Dankook University, SOUTH KOREA..........................................................................................................................................................................................
COMPLETE CELL SEPARATION BY MODULATING INERTIAL FORCE
J. Zhou, P.V. Giridhar, S. Kasper, and I. Papautsky
University of Cincinnati, USA..........................................................................................................................................................................................

18:15 - 18:30
T4B.007

A MICROFLUIDIC WHOLE-PLANT PHENOTYPING DEVICE
H. Jiang, Z. Xu, M.R. Aluru, and L. Dong
Iowa State University, USA..........................................................................................................................................................................................

Session T4C - Polymer MEMS
Session Chairs: J. Gardner, University of Warwick, UK and R. Syms, Imperial College London, UK

16:30 - 17:00
T4C.001

17:00 - 17:15
T4C.002

17:15 - 17:30
T4C.003

17:30 - 17:45
T4C.004

17:45 - 18:00
T4C.005

18:00 - 18:15
T4C.006

18:15 - 18:30
T4C.007

Invited Speaker
PROGRAMMING STRUCTURAL COLOR AND MAGNETIC ANISOTROPY IN POLYMERCOMPOSITE MICROSTRUCTURE FOR NOVEL BIOSYSTEMS
J. Kim, H. Lee, J. Kim, H. Kim, and S. Kwon
Seoul National University, SOUTH KOREA..........................................................................................................................................................................................
PARYLENE ORIGAMI STRUCTURE FOR INTROCULAR IMPLANTATION
Y. Liu1, J. Park1, R.J. Lang2, A. Emami-Neyestanak1, S. Pellegrino1, M.S. Humayun2, and Y.-C. Tai1
1
California Institute of Technology, USA, 2Robert J. Lang Origami, USA, and3
University of Southern California, Los Angeles, USA..........................................................................................................................................................................................
CHARACTERISTIC OF SINGLE-FIBER PVDF NANO-HARVESTER VIA NEW HOLLOWCYLINDRICAL NEAR-FIELD ELECTROSPINNING PROCESS
Y.L. Lin1, Z.H. Liu1,3, C.T. Pan1, L.W. Lin2, C.K. Yen1, Z.Y. Ou1, and C.H. Taso1
1
National Sun Yat-Sen University, TAIWAN, 2University of California, Berkeley, USA, and3
Industrial Technology Research Institute (ITRI), TAIWAN..........................................................................................................................................................................................
DESIGN AND FABRICATION OF MAGNETICALLY TUNABLE MICROSTRUCTURED SURFACES
Y. Zhu, R. Xiao, and E.N. Wang
Massachusetts Institute of Technology, USA..........................................................................................................................................................................................
DEVELOPMENT OF A FABRICATION PROCESS FOR A PIEZOELECTRIC ENERGY HARVESTINGFILM USING A REEL-TO-REEL CONTINUOUS FIBER PROCESS
T. Yamashita1, S. Takamatsu2, T. Kobayashi2, and T. Itoh2
1
Macro BEANS Center, JAPAN and
2
National Institute of Advanced Industrial Science and Technology (AIST), JAPAN..........................................................................................................................................................................................
INTEGRATION OF PDMS-INFILTRATED CNTS AND SI BULK-MICROMACHINING FOR
MONOLITHIC PHYSICAL SENSORS APPLICATION
C.-F. Hu, C.-M. Lin, and W. Fang
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................
ALL-POLYMER HIGH-ASPECT-RATIO SPRING WITH EMBEDDED ELECTRODE
Y. Feng and Y. Suzuki
University of Tokyo, JAPAN..........................................................................................................................................................................................

Session T4D - Physical Actuator & Thrusters
Session Chairs: U. Varshney, National Science Foundation (NSF), USA and W. Lang, University of Bremen, GERMANY

16:30 - 17:00
T4D.001

17:00 - 17:15
T4D.002

17:15 - 17:30
T4D.003

17:30 - 17:45
T4D.004

17:45 - 18:00
T4D.005

18:00 - 18:15
T4D.006

18:15 - 18:30
T4D.007

Invited Speaker
PROGRESS IN THIN-FILM SHAPE-MEMORY-ALLOY ACTUATORS
A. Ishida
National Institute for Materials Science, JAPAN..........................................................................................................................................................................................
MULTIARTICULAR MANIPULATOR AND ITS MULTI DEGREE OF FREEDOM MOTION BY
DISTRIBUTED THIN PISTON-CYLINDER ACTUATORS
T. Chishiro and S. Konishi
Ritsumeikan University, JAPAN..........................................................................................................................................................................................
A 6-DOF PIEZOELECTRIC MICRO VIBRATORY STAGE BASED ON MULTI-AXIS DISTRIBUTEDELECTRODE EXCITATION OF PZT/SI UNIMORPH T-BEAMS
E.E. Aktakka, R.L. Peterson, and K. Najafi
University of Michigan, USA..........................................................................................................................................................................................
LARGE IN-PLANE DISPLACEMENT MICROACTUATORS BASED ON ELECTRO-THERMALBIMORPHS WITH FOLDED MULTIPLE SEGMENTS
S. Pal, S.R. Samuelson, X. Zhang, and H. Xie
University of Florida, USA..........................................................................................................................................................................................
DISPLACEMENT ENHANCEMENT OF 1-AXIS LORENTZ FORCE ACTUATOR
S.-J. Lin, C.-C. Lee, W.-L. Sung, F.-Y. Lee and W. Fang
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................
HIGH-SPEED AIR MICROJET ARRAYS PRODUCED USING ACOUSTIC STREAMING FOR MICROPROPULSION
S.Y. Yee, R.L. Peterson, L.P. Bernal, and K. Najafi
University of Michigan, USA..........................................................................................................................................................................................
ON-CHIP POROUS SILICON MICROTHRUSTER FOR ROBOTIC PLATFORMS
W.A. Churaman1, C.J. Morris2, L.J. Currano2, and S. Bergbreiter1
1
University of Maryland, USA and 2U.S. Army Research Laboratory, USA..........................................................................................................................................................................................

18:30

Adjourn for the Day

20:15 21:45“Universitate de Barcelona” Reception

Wednesday 19 June 2013
Session W1A - Fabrication Technology 1
Session Chairs: K. Böhringer, University of Washington, USA and J. Brugger, École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND

08:30 - 09:00
W1A.001

09:00 - 09:15
W1A.002

09:15 - 09:30
W1A.003

09:30 - 09:45
W1A.004

09:45 - 10:00
W1A.005

10:00 - 10:15
W1A.006

Invited Speaker
TRENDS IN DRUG DELIVERY SYSTEM MICROFABRICATION AND A NEW SCALABLETECHNOLOGY USING X-RAY SYNCHROTRON IRRADIATION
D.I. Cho, H.J. Yoo, S. Lee, S.J. Hong, J.M. Seo, T.Y. Kim, and S.J. Kim
Seoul National University, SOUTH KOREA..........................................................................................................................................................................................
MICROSTRUCTURED SIO2 SURFACE REPELLANT TO LIQUIDS WITHOUT COATING
T. Liu and C.-J. Kim
University of California, Los Angeles, USA..........................................................................................................................................................................................
INTEGRATION OF POLYMER MICROFLUIDIC CHANNELS, VIAS, AND CONNECTORS WITH
SILICON PHOTONIC SENSORS BY ONE-STEP COMBINED PHOTOPATTERNING AND MOLDINGOF OSTEC. Errando-Herranz1,2, F. Saharil1, A. Mola Romero1,3, N. Sandström1, R.Z. Shafagh1, W. van der Wijngaart1,
T. Haraldsson1, and K.B. Gylfason1
1
KTH Royal Institute of Technology, SWEDEN, 2Polytechnic University of Valencia, SPAIN, and3
University of Barcelona, SPAIN..........................................................................................................................................................................................
HIGHLY-RELIABLE ELECTROSTATIC ACTUATOR USING FILLETED ELECTRODE MADE WITH
PHOTORESIST SOLVENT REFLOW
S.Y. Yee, R.L. Peterson, L.P. Bernal, and K. Najafi
University of Michigan, USA..........................................................................................................................................................................................
UV-ASSISTED INTERMITTENTLY-SPINNING OZONE STEAM ETCHING OF SU-8 FOR
MICROMOLDING PROCESS
S. Yoshida, K. Suzuki, M. Esashi, and S. Tanaka
Tohoku University, JAPAN..........................................................................................................................................................................................
AUTOMATIC PROCESS DESIGN FOR 3D THICK-FILM GRAYSCALE PHOTOLITHOGRAPHY
F.C.M. van Kempen1, Y. Hirai2, F. van Keulen1, and O. Tabata2
1
Delft University of Technology, THE NETHERLANDS and 2Kyoto University, JAPAN..........................................................................................................................................................................................

Session W1B - Gas Sensors
Session Chairs: C. Di Natale, University of Rome Tor Vergata, ITALY and E. Llobet, University Rovira i Virgili, SPAIN

08:30 - 09:00
W1B.001

Invited Speaker
DESIGN CRITERIA FOR PORTABLE POINT-OF-CARE BREATH ANALYSIS SYSTEMSY. Zrodnikov, K. Zamuruyev, J.D. Pedersen, A.G. Fung, D.J. Peirano, M.J. Schirle, A. Panigrahy, A. Pasamontes,
W.H.K. Cheung, A.A. Aksenov, M. Schivo, N.J. Kenyon, J.-P. Delplanque, and C.E. Davis
University of California, Davis, USA..........................................................................................................................................................................................

09:00 - 09:15
W1B.002

09:15 - 09:30
W1B.003

09:30 - 09:45
W1B.004

09:45 - 10:00
W1B.005

10:00 - 10:15
W1B.006

CARBON DIOXIDE GAS SENSOR WITH IONIC GEL
K. Ishizu1, Y. Takei1, M. Honda2,3, K. Noda1, A. Inaba1, T. Itoh4, R. Maeda4, K. Matsumoto1, and I. Shimoyama1
1
University of Tokyo, JAPAN, 2NMEMS Technology Research Organization, JAPAN, 3OMRON, JAPAN, and4
National Institute of Advanced Industrial Science and Technology (AIST), JAPAN..........................................................................................................................................................................................
HYSTERESIS-FREE, SUSPENDED PRISTINE CARBON NANOTUBE GAS SENSORS
K. Chikkadi, M. Muoth, and C. Hierold
ETH Zürich, SWITZERLAND..........................................................................................................................................................................................
HIGHLY SENSITIVE NO2 GAS SENSOR BASED ON ZINC OXIDE/COPPER OXIDE HYBRIDNANOSTRUCTURES
M.K. Fuadi, D. Yang, C. Park, and I. Park
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA..........................................................................................................................................................................................
SEEBECK OZONE SENSORS
M. Mischo1, M. Bitterling1, M. Himmerlich2, S. Krischok2, O. Ambacher1, and V. Cimalla1
1
Fraunhofer Institute for Applied Solid State Research, GERMANY and2
Ilmenau University of Technology, GERMANY..........................................................................................................................................................................................
A LOW-POWER CMOS INTEGRATED SENSOR FOR CO2 DETECTION IN THE PERCENTAGE
RANGE
A. Humbert1, B.J. Tuerlings2, R.J.O.M. Hoofman1, Z. Tan3, D. Gravesteijn1, M.A.P. Pertijs3,
C.W.M. Bastiaansen4, and D. Soccol1
1
NXP Semiconductors N.V., BELGIUM, 2Polymer Technology Group Eindhoven B.V., THE NETHERLANDS,
3
Delft University of Technology, THE NETHERLANDS, and4Eindhoven University of Technology, THE NETHERLANDS..........................................................................................................................................................................................

Session W1C - Medical Microsystems
Session Chairs: A. Llobera, Spanish Council for Scientific Research (CSIC), SPAIN and M. Shikida, Nagoya University, JAPAN
08:30 - 09:00
W1C.001

09:00 - 09:15
W1C.002

09:15 - 09:30
W1C.003

Invited Speaker
NOVEL MEDICAL WIRED PALPATION DEVICE; A VALIDATION STUDY OF MATERIALPROPERTIES
X. Wang1, C. Di Natali2, M. Beccani2, M. Kern1, P. Valdastri2, and M. Rentschler1
1
University of Colorado, USA and 2Vanderbilt University, USA..........................................................................................................................................................................................
IMPLANTABLE ACCELEROMETER FOR DETERMINATION OF BLOOD PRESSURE
M. Theodor1, J. Fiala1, D. Ruh1, K. Förster2, C. Heilmann2, F. Beyersdorf2, H. Zappe1, and A. Seifert1
1
University of Freiburg - IMTEK, GERMANY and 2University Medical Center Freiburg, GERMANY..........................................................................................................................................................................................
STIMULATING AUDITORY NERVE WITH MEMS HARVESTERS FOR FULLY IMPLANTABLE AND
SELF-POWERED COCHLEAR IMPLANTS
L. Beker1, Ö. Zorlu1, N. Göksu2, and H. Külah1
1
Middle East Technical University (METU), TURKEY and 2Gazi University, TURKEY..........................................................................................................................................................................................

09:30 - 09:45
W1C.004

09:45 - 10:00
W1C.005

10:00 - 10:15
W1C.006

MAGNETIC SENSOR FOR MONITORING OF ARTERIAL STRAIN
J. Ruhhammer1, T. Herbstritt1, K. Foerster2, C. Heilmann2, F. Beyersdorf2, A. Seifert1,
F. Goldschmidtboeing1, and P. Woias1
1
University of Freiburg - IMTEK, GERMANY and 2University Medical Center Freiburg, GERMANY..........................................................................................................................................................................................
A MEMS-BASED PASSIVE HYDROCEPHALUS SHUNT WITH ADAPTIVE FLOW
CHARACTERISTICS
S.B. Johansson1, A. Eklund2, J. Malm2, G. Stemme1, and N. Roxhed1
1
KTH Royal Institute of Technology, SWEDEN and 2Umeå University, SWEDEN..........................................................................................................................................................................................
CHARACTERIZATION OF LIQUID JET INJECTION INTO TISSUE BASED ON OPTICALCOHERENCE TOMOGRAPHY
K. Mutschler1, L. Tanguy2, N. Weber1, A. Ernst1, R. Zengerle1,2, and P. Koltay1
1
University of Freiburg - IMTEK, GERMANY and2
Institute for Micromachining and Information Technology (HSG-IMIT), GERMANY..........................................................................................................................................................................................

Session W1D - Actuators for Bioapplications
Session Chairs: S. Bergbreiter, University of Maryland, USA and N. Miki, Keio University, JAPAN

08:30 - 09:00
W1D.001

09:00 - 09:15
W1D.002

09:15 - 09:30
W1D.003

09:30 - 09:45
W1D.004

Invited Speaker
PNEUMATICALLY ACTUATED DEVICES FOR CELL MANIPULATION
Y. SunUniversity of Toronto, CANADA..........................................................................................................................................................................................
A HYDROGEL-BASED INTRAVASCULAR MICROGRIPPER MANIPULATED USING MAGNETIC
FIELDS
J.-C. Kuo, S.-W. Tung, and Y.-J. Yang
National Taiwan University, TAIWAN..........................................................................................................................................................................................
FLEXIBLE PNEUMATIC TWISTING ACTUATORS
B. Gorissen1,2, T. Chishiro1, S. Shimomura1, M. De Volder2, D. Reynaerts2, and S. Konishi1
1
Ritsumeikan University, JAPAN and 2Katholieke Universiteit Leuven, BELGIUM..........................................................................................................................................................................................
NEMATIC OPTO-MECHANICAL ACTUATORS FOR THE FABRICATION OF REFRESHABLETACTILE SYSTEMS
N. Torras1, K.E. Zinoviev1, C.J. Camargo1, E.M. Campo1, H. Campanella1, J. Esteve1, J.E. Marshall2,
E.M. Terentjev2, M. Omastova3, I. Krupa3, P. Teplický4, B. Mamojka4, P. Burns5, B. Röder5, M. Vallribera1,
R. Malet1, S. Zuffanelli1, V. Soler1, J. Roig1, N. Walker6, D. Wenn7, F. Vossen8, and F.M.H. Crompvoets8
1
Universitat Antònoma de Barcelona (UAB), SPAIN, 2University of Cambridge, UK, 3Slovak Academy of Science,
SLOVAKIA, 4Unia Nevidiacich a Slabozrakych Slovenska, SLOVAKIA, 5Universität Hamburg, GERMANY,
6
Microsharp Corporation Ltd, UK, 7iXscient Ltd, UK, and 8Philips Research, THE NETHERLANDS,..........................................................................................................................................................................................

09:45 - 10:00
W1D.005

10:00 - 10:15
W1D.006

10:15 - 10:45

PHOTO-PATTERNING OF IONOGEL MICROSTRUCTURES FOR ON-CHIP MICROVALVEAPPLICATIONS CONTROLLED BY FIBER OPTICS
M. Czugala1, C. O'Connell1, A. McKeon1, C. Fernández Sánchez2, X. Munoz-Berbel2, A. Llobera2,
D. Diamond1, and F. Benito-Lopez1,31Dublin City University, IRELAND, 2Spanish Council for Scientific Research (CSIC), SPAIN, and3
CIC microGUNE, SPAIN..........................................................................................................................................................................................
MICROFLUIDIC CELLULAR VALVE POWERED BY LINEAR BIOACTUATOR
M. Nagai, K. Tanizaki, Y. Hayasaka, T. Kawashima, and T. Shibata
Toyohashi University of Technology, JAPAN..........................................................................................................................................................................................
Break & Exhibit Inspection

Session W2A - Resonance Phenomena
Session Chairs: C.-W. Baek, Chung-Ang University, SOUTH KOREA and M. Tabib-Azar, National Science Foundation (NSF), USA

10:45 - 11:00
W2A.001

11:00 - 11:15
W2A.002

11:15 - 11:30
W2A.003

11:30 - 11:45
W2A.004

11:45 - 12:00
W2A.005

12:00 - 12:15
W2A.006

BI-STATE CONTROL OF A DUFFING MICRORESONATOR ON THE FALLING EDGE OF THE
INSTABILITY
C. Guo and G.K. Fedder
Carnegie Mellon University, USA..........................................................................................................................................................................................
STOCHASTIC RESONANCE IN A VOLTAGE-CONTROLLED MEMS-SLIDER: INCREASING THE
SIGNAL-TO-NOISE RATIO WITH NOISE
H. Droogendijk, M.J. de Boer, R.A. Brookhuis, R.G.P. Sanders, and G.J.M. Krijnen
MESA+, University of Twente, THE NETHERLANDS..........................................................................................................................................................................................
INVESTIGATING VIBRATION DYNAMICS OF CROSS-COUPLED MEMS RESONATORS FOR
REDUCED MOTIONAL RESISTANCE
A. Erbes, P. Thiruvenkatanathan, J. Yan, and A.A. Seshia
University of Cambridge, UK..........................................................................................................................................................................................
SURFACE EFFECT INFLUENCE ON THE QUALITY FACTOR OF MICRORESONATORS
B. Shiari and K. Najafi
University of Michigan, USA..........................................................................................................................................................................................
VISCOTHERMAL ACOUSTIC WAVE IN MICRO SCALE RESONATORS.
H.C. Qiu1,2, P. Schwarz1, D. Feili1, X.Z. Wu2, and H. Seidel1
1
Saarland University, GERMANY and 2National University of Defense Technology, CHINA..........................................................................................................................................................................................
GEOMETRIC COMPENSATION OF (100) SINGLE CRYSTAL SILICON DISK RESONATINGGYROSCOPE FOR MODE-MATCHING
C.H. Ahn, E.J. Ng, V.A. Hong, Y. Yang, B.J. Lee, M.W. Ward, and T.W. Kenny
Stanford University, USA..........................................................................................................................................................................................

12:15 - 12:30
W2A.007

A MICROMECHANICAL RESONANT CHARGE PUMP
Y. Lin, R. Liu, W.-C. Li, M. Akgul, and C.T.-C. Nguyen
University of California, Berkeley, USA..........................................................................................................................................................................................

Session W2B - Liquid Chemical Sensing
Session Chairs: I. Barsony, Hungarian Academy of Sciences, HUNGARY and S. Tadigadapa, Pennsylvania State University, USA

10:45 - 11:00
W2B.001

11:00 - 11:15
W2B.002

11:15 - 11:30
W2B.003

11:30 - 11:45
W2B.004

11:45 - 12:00
W2B.005

12:00 - 12:15
W2B.006

12:15 - 12:30
W2B.007

HIGH-SPEED CHEMICAL IMAGING INSIDE A MICROFLUIDIC CHANNEL
A. Itabashi1, K. Miyamoto1, T. Wagner1, M.J. Schöning2,3, and T. Yoshinobu1
1
Tohoku University, JAPAN, 2Aachen University of Applied Sciences, GERMANY, and3Peter-Grünberg Institute, GERMANY..........................................................................................................................................................................................
A WIRELESS CHEMICAL SENSOR USING FERROPARTICLES EMBEDDED HYDROGEL
J.H. Park1, S.H. Song1, G. Chitnis1, R.A. Siegel2, and B. Ziaie1
1
Purdue University, USA and 2University of Minnesota, USA..........................................................................................................................................................................................
MULTIDIMENSIONAL METAMATERIAL FLUID SENSOR
R. Lucklum1, M. Zubtsov1, A. Oseev1, A. Omar1, and A. Martinez2
1
Otto-von-Guericke-University Magdeburg, GERMANY and 2Universidad Politécnica de Valencia, SPAIN..........................................................................................................................................................................................
DEVELOPMENT OF A 64×64-PIXEL ION CAMERA CHIP FOR IONIC IMAGING USING AN
UNMODIFIED 0.35 µM CMOS TECHNOLOGY
B. Nemeth, A. Streklas, A.G. Boulay, M. Symes, C. Busche, L. Cronin, and D.R.S. Cumming
University of Glasgow, UK..........................................................................................................................................................................................
A 7µW PH-TO-DIGITAL CONVERTER FOR QUALITY MONITORING OF PERISHABLE PRODUCTS
S.H. Shalmany1, M. Merz2, A. Fekri1, Z. Chang1, R. Hoofman2, and M.A.P. Pertijs1
1
Delft University of Technology, THE NETHERLANDS and 2NXP Semiconductors, BELGIUM..........................................................................................................................................................................................
SILICON NANOWIRE ION-SENSITIVE FIELD-EFFECT TRANSISTOR ARRAY INTEGRATED WITH
A CMOS-BASED READOUT CHIP
P. Livi1, M. Wipf2, A. Tarasov2, R. Stoop2, K. Bedner3, J. Rothe1, Y. Chen1, A. Stettler1, C. Schönenberger2,
and A. Hierlemann1
1
ETH Zürich, SWITZERLAND, 2University of Basel, SWITZERLAND, and 3Paul Scherrer Institute, SWITZERLAND..........................................................................................................................................................................................
NANOPOROUS SENSOR FOR THE DETECTION OF NITROGEN TRICHLORIDE IN SWIMMINGPOOLS. FROM THE LABORATORY TO THE MARKET
T.-H. Nguyen1,2, C. Rivron1, T.-H. Tran-Thi1, E. Chevallier2, P. Karpe1,2, and C. Beaubestre3
1
Commissariat à l'énergie Atomique (CEA), 2Etherae R&D, FRANCE, and 3Laboratoire d’Hygiéne, FRANCE..........................................................................................................................................................................................

Session W2C - Pressure Sensors
Session Chairs: B. Jakoby, Johannes Kepler University Linz, AUSTRIA and X. Li, Chinese Academy of Sciences, CHINA

10:45 - 11:00
W2C.001

11:00 - 11:15
W2C.002

11:15 - 11:30
W2C.003

11:30 - 11:45
W2C.004

11:45 - 12:00
W2C.005

12:00 - 12:15
W2C.006

12:15 - 12:30
W2C.007

NOVEL TPMS SENSING CHIP WITH PRESSURE SENSOR EMBEDDED IN ACCELEROMETER
W.-C. Yeh1, C.-K. Chan1, J. Hsieh1, C.-F. Hu2, F.-M. Hsu2, and W. Fang2
1
Asia Pacific Microsystems, Inc., TAIWAN and 2National Tsing Hua University, TAIWAN..........................................................................................................................................................................................
PIEZORESISTIVE PRESSURE SENSOR WITH DUAL-UNIT CONFIGURATION FOR ON-CHIP SELFCOMPENSATION AND SUPPRESSION OF TEMPERATURE DRIFT
J.C. Wang1, X.Y. Xia1, H.S. Zou1, F. Song2, and X. Li1
1Chinese Academy of Sciences, CHINA and 2Shanghai University of Engineering Science, CHINA..........................................................................................................................................................................................
ULTRA-COMPACT ABSOLUTE PRESSURE SENSOR BASED ON MECHANICAL AMPLIFICATIONCOUPLED TO SUSPENDED PIEZORESISTIVE NANOGAUGE
Y. Deimerly1,2, P. Robert1, G. Jourdan1, P. Rey1, and T. Bourouina2
1
Commissariat à l'énergie Atomique (CEA), FRANCE and 2Université Paris-Est, FRANCE..........................................................................................................................................................................................
MICROFABRICATED SPHERICAL PRESSURE SENSING PARTICLES FOR PRESSURE AND FLOW
MAPPINGY. Xie, N. Banerjee, and C.H. Mastrangelo
University of Utah, USA..........................................................................................................................................................................................
PIEZOELECTRIC PRESSURE MICROSENSOR ARRAYS
G. Mirshekari, M. Brouillette, and L.G. Frechette
Universite de Sherbrooke, CANADA..........................................................................................................................................................................................
A NEW INTRACRANIAL PRESSURE SENSOR ON POLYIMIDE LAB-ON-A-TUBE USINGEXCHANGED POLYSILICON PIEZORESISTORS
Z.Z. Wu1, N. Bhattacharjee1, C.Y. Li1,2, J.A. Hartings3, R.K. Narayan2, and C.H. Ahn1
1
University of Cincinnati, USA, 2Feinstein Institute for Medical Research, USA, and3
University of Cincinnati College of Medicine, USA..........................................................................................................................................................................................
MICRO PIRANI PRESSURE SENSOR FABRICATED BY INKJET PRINTING OF SILVER
NANOPARTICLES
D. Sette1, D. Mercier1, P. Brunet-Manquat1, C. Poulain1, and A. Blayo2
1
Commissariat à l'énergie Atomique (CEA), FRANCE and 2Grenoble Institute of Technology, FRANCE..........................................................................................................................................................................................

Session W2D - Optofluidics
Session Chairs: C. Bergaud, Laboratoire d'Analyse et d'Architecture des Systémes (LAAS-CNRS), FRANCE and S. Takeuchi, University of Tokyo,
JAPAN

10:45 - 11:00
W2D.001

MICROFLUDICALLY TUNABLE LENTICULAR LENS
Y. Iimura1, T. Teshima1, Y.J. Heo1,2, Y. Morimoto1, S. Yoshida1, H. Onoe1,2, and S. Takeuchi1,2
1
University of Tokyo, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

11:00 - 11:15
W2D.002

11:15 - 11:30
W2D.003

11:30 - 11:45
W2D.004

11:45 - 12:00
W2D.005

12:00 - 12:15
W2D.006

12:15 - 12:30
W2D.007

A NANO-OPTOFLUIDIC WAVEGUIDE COUPLER WITH SUPER-RESOLUTION VIA CONCURRENT
DEAN FLOWS
L.K. Chin, Y. Yang, L. Lei, and A.Q. Liu
Nanyang Technological University, SINGAPORE..........................................................................................................................................................................................
TRANSPORTATION OF MONO-DISPERSED MICRO-PLASMA BUBBLE IN MICROFLUIDIC CHIP
UNDER ATMOSPHERIC PRESSURE
Y. Yamanishi, S. Sameshima, H. Kuriki, S. Sakuma, and F. Arai
Nagoya University, JAPAN..........................................................................................................................................................................................
A MICROFLUIDIC SURFACE ENHANCED RAMAN SPECTROSCOPIC BIOSENSOR USINGAPTAMER FUNCTIONALIZED NANOPILLARS
J. Yang1, M. Palla1, F.G. Bosco2, M.S. Schmidt2, T. Rindzevicius2, A. Boisen2, J. Ju1, and Q. Lin1
1
Columbia University, USA and 2Technical University of Denmark, DENMARK..........................................................................................................................................................................................
ELECTROPHORETIC PRECONCENTRATION ON PLASMONIC NANOPILLAR ARRAYS FORHIGHLY INTENSE SURFACE-ENHANCED RAMAN SCATTERING
M. Park, Y.-J. Oh, and K.-H. Jeong
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA..........................................................................................................................................................................................
SERS CHARACTERIZATION BASED ON SILVER NANOPARTICLE DIMER IN MICROFLUIDICLAMINAR FLOW FOR MOLECULE TRACE DETECTION
K. Sugano1, H. Katayama2, Y. Hirai2, T. Tsuchiya2, and O. Tabata2
1
Kobe University, JAPAN and 2Kyoto University, JAPAN..........................................................................................................................................................................................
PHOTOPROCESSIBLE THERMO-SENSITIVE GEL ACTUATOR FOR FUNCTIONAL MICROFLUIDIC
DEVICESK. Ito1, S. Sakuma1, Y. Yokoyama2, and F. Arai1
1
Nagoya University, JAPAN and 2Toyama Industrial Technology Center, JAPAN..........................................................................................................................................................................................

12:30 - 14:15

Lunch on Own & Exhibit Inspection

14:15 - 16:30

Poster Session W3P

Mechanical/Physical Sensors and Microsystems
Accelerometer
W3P.001

A SENSING DEVICE FOR FORCE AND INERTIAL MEASUREMENTS OF HAND WRITING
BEHAVIOR
M. Attari, A. Touchen, Y. Remram, and S. Boukhenous
Université des Sciences et de la Technologie, ALGERIA..........................................................................................................................................................................................

W3P.002

DESIGN AND IMPLEMENTATION OF A NOVEL POLY-SI SINGLE PROOF-MASS DIFFERENTIALCAPACITIVE-SENSING 3-AXIS ACCELEROMETER
S.-C. Lo1, C.-K. Chan2, W.-C. Lai1, M. Wu3, Y.-C. Lin4, and W. Fang1
1
National Tsing Hua University, TAIWAN, 2Asia Pacific Microsystems Inc., TAIWAN,
3
Domintech Co. Ltd., TAIWAN, and 4National Cheng Kung University, TAIWAN..........................................................................................................................................................................................

W3P.003

HIGH-SENSITIVITY DIFFERENTIAL FRINGE-FIELD MEMS ACCELEROMETERS
G. Langfelder1, A. Caspani1, A. Tocchio1,2, S. Zerbini2, and A.F. Longoni1
1
Politecnico di Milano, ITALY and 2ST Microelectronics, ITALY..........................................................................................................................................................................................

W3P.004

PERFORMANCE ENHANCEMENT OF A DUAL-AXIS MICRO-ACCELEROMETER USINGCOMPLIANT DISPLACEMENT-AMPLIFIERS
S. Khan and G.K. Ananthasuresh
Indian Institute of Science, INDIA..........................................................................................................................................................................................

Acoustic Sensors
W3P.005

PIEZOELECTRIC MICROMACHINED ULTRASOUND TRANDUCER ARRAY FOR
PHOTOACOUSTIC IMAGING
W. Liao1, W. Liu2, J.E. Rogers1, F. Usmani1, Y. Tang2, B. Wang2, H. Jiang1, and H. Xie1
1
University of Florida, USA and 2Southeast University, CHINA..........................................................................................................................................................................................

W3P.006

WIDE-BAND AERO-ACOUSTIC MICROPHONE WITH IMPROVED LOW-FREQUENCYCHARACTERISTICS
Z.J. Zhou1, L. Rufer2, E. Salze3, S. Ollivier3, and M. Wong1
1
Hong Kong University of Science & Technology, HONG KONG, 2TIMA Laboratory, FRANCE, and3
École Centrale de Lyon, FRANCE..........................................................................................................................................................................................

Actuators & Characterization Tools
W3P.007

IMPROVED MEMS-IN-TEM SETUP FOR HIGH SENSITIVITY THERMAL CHARACTERIZATION OF
NANOWIRE USING A NEW TEM CRYO-HOLDER
L. Jalabert1, G. Valet1, A. Chorosz2, D. Guo1, R. Kometani1, H. Guillou1, T. Sato1, S. Volz3, and H. Fujita1
1
University of Tokyo, JAPAN, 2ECAM, FRANCE, and 3Ecole Centrale Paris, FRANCE..........................................................................................................................................................................................

W3P.008

SELF POWERED INERTIA SENSOR BASED ON VIBRATION ENERGY HARVESTER USINGELECTRET AND FERROELECTRIC PLATE
M. Suzuki, T. Takahashi, and S. Aoyagi
Kansai University, JAPAN..........................................................................................................................................................................................

Gyroscope
W3P.009

A HIGH-Q BIRDBATH RESONATOR GYROSCOPE (BRG)
J. Cho, J.-K. Woo, J. Yan, R. L. Peterson, and K. Najafi
University of Michigan, USA..........................................................................................................................................................................................

W3P.010A Y-AXIS SOI-MEMS GYROSCOPE WITH A ZIGZAG-SHAPED Z-ELECTRODE SUPPORTED BY
THREE-DIMENSIONALLY-INTERSECTED Z-BEAMS
T. Akashi, Y. Omura, H. Funabashi, M. Fujiyoshi, Y. Nonomura, and Y. Hata
Toyota Central R&D Labs Inc., JAPAN..........................................................................................................................................................................................

W3P.011

MEMS GYROSCOPE BIAS DRIFT CANCELLATION USING CONTINUOUS-TIME MODE REVERSAL
M.H. Kline1, Y.-C. Yeh1, B. Eminoglu1, I.I. Izyumin1, M. Daneman3, D.A. Horsley2, and B.E. Boser1
1
University of California, Berkeley, USA, 2University of California, Davis, USA, and 3Invensense, USA,..........................................................................................................................................................................................

Infrared & Magnetic
W3P.012CHARACTERIZATION AND MODEL VALIDATION OF A MICROMECHANICAL RESONANT
MAGNETIC FIELD SENSOR
W. Zhang and J.E.-Y. Lee
City University of Hong Kong, HONG KONG..........................................................................................................................................................................................

W3P.013NOVEL CONCEPT AND TECHNOLOGY FOR A SELF RESONANT MAGNETIC FIELD SENSOR
P. Simon and O. Paul
University of Freiburg - IMTEK, GERMANY..........................................................................................................................................................................................

Pressure & Flow
W3P.014DETERMINATION OF THE THERMAL CONDUCTIVITY OF GASES UNDER FLOW CONDITIONS
D.F. Reyes Romero, K. Kogan, A.S. Cubukcu, and G.A. Urban
University of Freiburg, GERMANY..........................................................................................................................................................................................

W3P.015HYBRID CONTACT LENS CAPABLE OF INTRAOCULAR PRESSURE MONITORING INNONINVASIVE WAY
V. Laukhin1,2,3, V. Lebedev2, E. Laukhina3, R. Martin4, J.C. Pastor4, R. Villa2, J. Aguilo2, C. Rovira2,3,
and J. Veciana2,31Institució Catalana de Recerca I Estidis Avançats (ICREA), SPAIN, 2Spanish Council for Scientific Research(CSIC), SPAIN, 3Biomedical Research Networking Centre on Bioengineering, Biomaterials and Nanomedicine(CIBER-BBN), SPAIN, and 4Universidad de Valladolid, SPAIN..........................................................................................................................................................................................

W3P.016

THREE DIMENSIONAL THERMAL SENSOR FOR INTRAVASCULAR FLOW MONITORING
R. Tang1, H. Huang1, Y.M. Yang2, J. Oiler1, M. Liang1, and H. Yu1
1
Arizona State University, USA and 2Intel, USA..........................................................................................................................................................................................

Resonant Sensors
W3P.017

ENHANCED PERFOMANCE OF SENSOR/ACTUATOR INTEGRATED PIEZOELECTRIC
MICROCANTILEVER BY USING TETRAGONAL COMPOSITON PZT THIN FILMS
T. Kobayashi1, N. Makimoto1, H. Funakubo2, T. Oikawa2, A. Wada2, T. Itoh1, and R. Maeda1
1National Institute of Advanced Industrial Science and Technology (AIST), JAPAN, and2Tokyo Institute of Technology, JAPAN..........................................................................................................................................................................................

W3P.018

THIN FILM CONDUCTIVITY SENSOR BASED ON ACOUSTOELECTRIC INTERACTION IN 36° YX
LITHIUM TANTALATE
D. Čiplys, R. Rimeika, and A. Sereika
Vilnius University, LITHUANIA..........................................................................................................................................................................................

W3P.019

VERTICAL CARBON NANOFIBER ARRAYS AND NANOMECHANICAL RESONATORS WITH
POTENTIAL FOR RADIATION SENSING
J. Lee1, A.B. Kaul2, and P.X.-L. Feng1
1
Case Western Reserve University, USA and 2California Institute of Technology, USA..........................................................................................................................................................................................

Tactile Sensors
W3P.020

A DOME SHAPED PIEZOELECTRIC TACTILE SENSOR ARRAY USING CONTROLLED INFLATIONTECHNIQUE
M.S. Kim, S.E. Jo, D.H. Kang, H.R. Ahn, and Y.J. Kim
Yonsei University, SOUTH KOREA..........................................................................................................................................................................................

W3P.021

CMOS-BASED TACTILE SENSORS USING OXIDE AS SACRIFICIAL LAYER
Y.-C. Lin, C.-J. Hsieh, C.-T. Sun, J.-C. Liou, and W.-C. Tian
National Taiwan University, TAIWAN..........................................................................................................................................................................................

W3P.022

HYPER-FLEXIBLE 1-D SHAPE SENSOR
M.K. Dobrzynski, H. Vanderparre, R. Pericet-Camara, G. L’Eplattenier, S. Lacour, and D. Floreano
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND..........................................................................................................................................................................................

Thermometers
W3P.023

A MONOLITHIC POLYIMIDE MICRO CRYOGENIC COOLER
Y.D. Wang1, R. Lewis1, R. Radebaugh2, and Y.C. Lee1
1
University of Colorado, USA and 2National Institute of Standards and Technology (NIST), USA..........................................................................................................................................................................................

W3P.024

HIGH TEMPERATURE MICRO-HOTPLATES ON POROUS SILICON SUBSTRATESF. Lucklum1, A. Schwaiger2, and B. Jakoby1
1
Johannes Kepler University Linz, AUSTRIA and 2E+E Elektronik Ges.m.b.H, AUSTRIA..........................................................................................................................................................................................

W3P.025

SILICON ON INSULATOR THERMODIODE WITH EXTREMELY WIDE WORKING TEMPERATURE
RANGE
A. De Luca1, V. Pathirana1,2, S.Z. Ali2, and F. Udrea1,2
1
University of Cambridge, UK and 2Cambridge CMOS Sensors, UK..........................................................................................................................................................................................

Materials, Fabrication & Packaging Technologies
3-D Structures
W3P.026

3-LAYER-COPPER MICROCOILS TRANSFORMED INTO 3-D CYLINDRICAL STATOR WINDINGSFOR MICROMOTORS
V. Biefeld1, S. Springmann2, and W. Lang1
1
University of Bremen, GERMANY and 2Kählig Antriebstechnik GmbH, GERMANY..........................................................................................................................................................................................

W3P.027

FABRICATION OF 3D STRUCTURES USING SELF-ASSEMBLY AT AIR-WATER INTERFACE
K.S. Park1, Ç. Varel1, R. Baskaran2, and K.F. Böhringer1
1
University of Washington, USA and 2Intel Corporation, USA..........................................................................................................................................................................................

W3P.028

OPTIMAL ARTICULATION STRATEGY FOR A MICROFABRICATED GECKO-INSPIREDCONTROLLABLE ADHESIVEJ. Tamelier, S. Chary, and K.L. Turner
University of California, Santa Barbara, USA..........................................................................................................................................................................................

W3P.029

THE SIZE LIMIT OF AL/NI MULTILAYER RECTANGULAR CUBOIDS FOR GENERATING SELFPROPAGATING EXOTHERMIC REACTION ON A SI WAFER
S. Ito1, S. Inoue1, and T. Namazu1,2
1
University of Hyogo, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

Films & Nanostructures
W3P.030ULTRA-THIN ATOMIC LAYER DEPOSITION FILMS FOR CORROSION RESISTANCE
A.J. Haemmerli, J.C. Doll, J. Provine, R.T. Howe, D. Goldhaber-Gordon, and B.L. Pruitt
Stanford University, USA..........................................................................................................................................................................................

W3P.031

DEVELOPMENT OF SUSPENDED 2D CARBON NANOSTRUCTURES: NANOWIRES TO
NANOMESHES
Y. Lim1, J. Heo1, M.J. Madou2, and H. Shin1
1
Ulsan National Institute of Science and Technology (UNIST), SOUTH KOREA, and2
University of California, Irvine, USA..........................................................................................................................................................................................

W3P.032

LOW THERMAL BUDGET LOW STRESS THICK POLYSILICON FILMS FOR MEMS USING ULTRAHIGH VACUUM E-BEAM EVAPORATION
A. Michael, C.Y. Kwok, O. Kazuo, and S. Varlamov
University of New South Wales, AUSTRALIA..........................................................................................................................................................................................

W3P.033

STABLE DRIE-PATTERNED SiO2/Si3N4 ELECTRETS
S. Boisseau, J.J. Chaillout, J.S. Danel, J.B. Legras, and G. DespesseCommissariat à l'énergie Atomique (CEA), FRANCE..........................................................................................................................................................................................

Materials Characterization
W3P.034

EFFECT OF SURFACE MORPHOLOGY AND CRYSTAL ORIENTATIONS ON FRACTURE
STRENGTH OF THIN FILM (110) SINGLE CRYSTAL SILICON
A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, and O. Tabata
Kyoto University, JAPAN..........................................................................................................................................................................................

W3P.035

MATERIAL STRENGTH EXAMINATION OF THIN FILM PDMS FOR RELIABLE PNEUMATICBALLOON ACTUATOR
Y. Matsushita, C. Nakagami, T. Toriyama, and S. Konishi
Ritsumeikan University, JAPAN..........................................................................................................................................................................................

W3P.036TENSION-TORSION-BENDING COMBINED LOADING TEST TECHNIQUE FOR THE RELIABILITYOF MEMS STRUCTURES
T. Fujii1, H. Yamagiwa1, S. Inoue1, and T. Namazu1,2
1
University of Hyogo, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

Packaging
W3P.037

MEMS MIXER AS AN EXAMPLE OF A NOVEL CONSTRUCTION METHOD OF MICROFLUIDICS BYDISCRETE MICROPARTS
Y. Murakami, K. Araki, R. Ohashi, H. Honma, K. Takahashi, K. Sawada, and M. Ishida
Toyohashi University of Technology, JAPAN..........................................................................................................................................................................................

W3P.038

STRESS-MINIMIZED PACKAGING OF INERTIAL SENSORS USING WIRE BONDING
S. Schröder1, A. Nafari2, K. Persson2, E. Westby3, A.C. Fischer1, G. Stemme1, F. Niklaus1, and S. Haasl1
1
KTH Royal Institute of Technology, SWEDEN, 2Imego - Acreo AB, SWEDEN, and 3Sensonor AS, NORWAY..........................................................................................................................................................................................

W3P.039

WAFER LEVEL SANDWICH PACKAGING TECHNOLOGY FOR THREE-AXIS PIEZORESISTIVEACCELEROMETER
T. Aono, A. Kazama, R. Okada, S. Hata, and E. Sakamoto
Hitachi, Ltd., JAPAN..........................................................................................................................................................................................

Patterning Printing & Etching
W3P.040

A PDMS/METAL-FILM PHOTO-MASK FOR LARGE-AREA CONTACT PHOTOLITHOGRAPY AT
SUB-MICROMETR SCALE
Y.C. Lee and Y.T. Hsieh
National Cheng Kung University, TAIWAN..........................................................................................................................................................................................

W3P.041

MICRO-RELAY RELIABILITY IMPROVEMENT BY INKJET-PRINTED MICROSHELL
ENCAPSULATION
Y. Chen, E.S. Park, I.-R. Chen, L. Hutin, V. Subramanian, and T.-J. King Liu
University of California, Berkeley, USA..........................................................................................................................................................................................

W3P.042PERFECT ADSORPTION OF PPB-LEVEL SURFACTANT IN 5%KOH WATER SOLUTION ON A
SILICON SURFACE CHANGING ANISOTROPIC ETCHING PROPERTIES
H. Tanaka1, N. Umeki1, and K. Sato2
1
Tsuruoka National College of Technology, JAPAN and 2Aichi Institute of Technology, JAPAN..........................................................................................................................................................................................

Nanoscale Materials, Devices & Fabrication
Bio/Chemical Sensor
W3P.043

A DESIGN OF HIGH PERFORMANCE GAS SENSOR ARRAY WITH DISCRETE ISLANDS OF AUCATALYST FOR INCREASING OF ZINC OXIDE NANOWIRE JUNCTIONS
H. Nguyen1, C.T. Quy2, N.D. Hoa2, and N.V. Hieu2
1
Uppsala University, SWEDEN and 2Hanoi University of Science and Technology, VIETNAM..........................................................................................................................................................................................

W3P.044HIGHLY EFFICIENT SURFACE IONIZATION GAS DETECTORS USING MICROFABRICATEDPLATFORMS WITH INTEGRATED SURFACE ELECTRODES
B. Bouxin1, K. Maier1, A. Hackner1, G. Mueller1, F. Shao2, F. Hernandez-Ramirez2,3, and J.R. Morante2,3
1
EADS Innovation Works, GERMANY, 2Institut de Recerca en Energia de Catalunya (IREC), SPAIN, and3
Universitat de Barcelona, SPAIN..........................................................................................................................................................................................

W3P.045LABEL-FREE AND REAL-TIME DNA DETECTOR BASED ON AS-GROWN CVD GRAPHENE
W.R. Wang, A.R. Gao, N. Lu, C. Liang, H. Yang, T. Li, and Y.L. Wang
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................

Fabrication
W3P.046

A ELECTROSTATIC CONTROLLED NEAR-FIELD NANO-OPTO-PROBE FOR NANO
MANIPULATION
M. Ren1, H. Cai2, Y. Yang1, J.M. Tsai2, P. Kropelnicki2, A.B. Randles2, M. Tang2, D.L. Kwong2, and A.Q. Liu1,2
1
Nanyang Technological University, SINGAPORE and2
Agency for Science, Technology and Research (A*STAR), SINGAPORE..........................................................................................................................................................................................

W3P.047

INTEGRATRION OF UNIFORM POROUS SHELL LAYERS IN MICROFABRICATED PILLAR ARRAY
COLUMNS BY ELECTROCHEMICAL ANODIZATION
M. Callewaert1, J. Op de Beeck1, H. Ottevaere1, H. Gardeniers2, G. Desmet1, and W. de Malsche1
1
Vrije Universiteit Brussel, BELGIUM, and 2MESA+, University of Twente, THE NETHERLANDS..........................................................................................................................................................................................

W3P.048

MULTIPLE ANTIWEAR PROBES FOR STABLE AND HIGH THROUGHPUT SCANNING PROBE
MICROSCOPE NANOLITHOGRAPHY
Y.F. Li1, Y. Tomizawa1, A. Koga1, M. Sugiyama2, and H. Fujita2
1
Toshiba Corporation, JAPAN and 2University of Tokyo, JAPAN..........................................................................................................................................................................................

Nanodevices
W3P.049245 MHZ GRAPHENE-ALUMINUM NITRIDE NANO PLATE RESONATOR
Z. Qian, Y. Hui, F. Liu, S. Kar, and M. Rinaldi
Northeastern University, USA..........................................................................................................................................................................................

W3P.050FABRICATION OF CNFETS WITH LOW-RESISTANCE ELECTRICAL CONTACTS
W. Liu, K. Chikkadi, S.W. Lee, C. Hierold, and M. Haluska
ETH Zürich, SWITZERLAND..........................................................................................................................................................................................

W3P.051SYNCHRONIZATION OF STOCHASTIC RESONANCE USING COUPLED NONLINEAR SILICONRESONATORS
Y. Mitsui, Y. Kawai, and T. Ono
Tohoku University, JAPAN..........................................................................................................................................................................................

Nanomaterial & Characterization
W3P.052

EVALUATION OF NANO DEFORMATION MECHANISMS OF MWCNT BY MEMS-BASED TENSILETEST AND MOLECULAR DYNAMICS SIMULATION
H. Ohmori, K. Yamauchi, H.-J. Oh, K. Yashiro, and Y. Isono
Kobe University, JAPAN..........................................................................................................................................................................................

W3P.053

PREPARATION OF NICKEL, NICKEL-IRON, AND SILVER-COPPER NANOPARTICLESIN IONIC LIQUIDS
P. Lobotka1, G. Radnoczi2, Z. Czigany2, I. Vavra1, M. Drzik3, M. Micusik4, E. Dobrocka1, and P. Kunzo1
1
Slovak Academy of Sciences, SLOVAKIA, 2Hungarian Academy of Sciences, HUNGARY,
3International Laser Centre, SLOVAKIA and 4Polymer Institute SAS, SLOVAKIA..........................................................................................................................................................................................

Chemical Sensors & Microsystems
Chemical Sensors
W3P.054

BATCH FABRICATION OF MICRO PRECONCENTRATOR WITH THIN FILM MICROHEATERUSING TOLLEN’S REACTION
Y.-S. Lin1, C.-Y. Kuo1, W.-C. Tian1, T.-H. Wu1, H.-J. Sheen1, H.-Y. Kuo2, and C.-J. Lu2
1
National Taiwan University, TAIWAN and 2National Taiwan Normal University, TAIWAN..........................................................................................................................................................................................

W3P.055

DEVELOPMENT OF PH SENSOR WITH ENHANCED SENSITIVITY USING VOLUME OF BUBBLESGENERATED BY ELECTROLYSIS
J. Sim, D.-S. Kwon, and J. Kim
Yonsei University, SOUTH KOREA..........................................................................................................................................................................................

W3P.056

PERMEABLE-MEMBRANE SEPARATING DETECTION OF VAPORIZED LIQUID WITH
NANOPARTICLE FUNCTIONALIZED RESONANT CANTILEVER FOR SOLUTION-NOISE
SUPPRESSION
H. Yu, P. Xu, and X.X. Li
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................

Environmental Sensors
W3P.057

DETECTION OF CHLORIDE ION CONCENTRATION USING CHRONOPOTENTIOMETRY
Y. Abbas, W. Olthuis, and A. van den BergMESA+, University of Twente, THE NETHERLANDS..........................................................................................................................................................................................

FET Based Gas Sensors
W3P.058

COMBINATION OF TEMPERATURE CYCLED AND GATE BIAS CYCLED OPERATION TO
ENHANCE THE SELECTIVITY OF SiC-FET GAS SENSORS
C. Bur1, M. Bastuck1, A. Schütze1, A. Lloyd Spetz2, and M. Andersson2
1
Saarland University, GERMANY and 2Linköping University, SWEDEN..........................................................................................................................................................................................

Gas Sensors
W3P.059

AN ACTIVE TEMPERATURE MODULATION OF GAS SENSOR BASED ON SELF-ADAPTIVESTRATEGY
E. Martinelli, A. Catini, and C. Di Natale
University of Rome Tor Vergata, ITALY..........................................................................................................................................................................................

W3P.060

CO2 SENSING BY WORK FUNCTION READOUT OF ZNO BASED SCREEN PRINTED FILMS
R. Pohle, A. Tawil, C. Mrotzek, and M. Fleischer
Siemens AG, GERMANY..........................................................................................................................................................................................

W3P.061

DEVELOPMENT OF EGFET-BASED MICROSENSORS WITH HIGH-SENSITIVITY AND HIGHLINEARITY FOR DISSOLVED OXYGEN AND CARBON DIOXIDE DETECTION
C.-H. Hsieh, P.-H. Chen, R.-H. Chen, and I.-Y. Huang
National Sun Yat-Sen University, TAIWAN..........................................................................................................................................................................................

W3P.062

GRAPHENE SOI CMOS SENSORS FOR DETECTION OF PPB LEVELS OF NO2 IN AIR
J.W. Gardner1, M.T. Cole2, A. De Luca2, P. Clément3, E. Llobet3, S.Z. Ali4, and F. Udrea2
1
Warwick University, UK, 2University of Cambridge, UK, 3University Rovira I Virgili, SPAIN and
4
Cambridge CMOS Sensors, Ltd., UK..........................................................................................................................................................................................

W3P.063

NOVEL GASEOUS PHASE ETHANOL SENSOR IMPLEMENTED WITH UNDERLOADED RF
RESONATOR FOR SENSOR-EMBEDDED PASSIVE CHIPLESS RFIDS
W.T. Chen1, K.M.E. Stewart1, J. Carroll2, R. Mansour1, E. Abdel-Rahman1, and A. Penlidis1
1
University of Waterloo, CANADA and 2Sober Steering Inc., CANADA..........................................................................................................................................................................................

W3P.064ULTRA HIGH PERFORMANCE GAS SENSOR BASED ON IC COMPATIBLE FUSION OF
MICROMACHINED HOTPLATFORM AND NANOSTRUCTURED POROUS FILM
L. Xu, Z. Dai, T. Li, G. Duan, W. Cai, and Y. Wang
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................

W3P.065

WORK FUNCTION BASED GAS SENSING WITH BENZENE TRICARBOXYLATE LINKED METALORGANIC FRAMEWORKS - A COMPARISON STUDY
P. Davydovskaya1,2, V. Pentyala2, L. Hussein2, R. Pohle1, and G. Urban2
1
Siemens AG, GERMANY and 2University of Freiburg - IMTEK, GERMANY..........................................................................................................................................................................................

Humidity Sensors
W3P.066

DEVELOPMENT OF AN ELECTROCHEMICAL MICROSENSOR BASED ON ALGAL METABOLISM
FOR THE DETECTION OF WATER POLLUTANTS
A. Tsopela1,2, A. Lale1,2, E. Vanhove1,2, C. Christophe1,2, F. Lefèvre3, P. Temple-Boyer1,2, I. Seguy1,2, P. Juneau3,
J. Launay1,2, and R. Izquierdo3
1
Laboratoire d'Analyse et d'Architecture des Systémes (LAAS-CNRS), FRANCE, 2Université de Toulouse, FRANCE
and 3Université du Québec à Montréal, CANADA..........................................................................................................................................................................................

Hydrogen Gas Sensors
W3P.067

GAS SENSING PROPERTIES OF NANOSTRUCTURED MIXED OXIDE FILM PREPARED BY
ANODIZING Zr-W ALLOY THROUH THE ALUMINA NANOPORES
R.M. Vázquez1, R. Calavia1, F. Gispert-Guirado1, E. Llobet1, J. Hubálek2, and A. Mozalev2
1
University Rovira i Virgili, SPAIN and 2Brno University of Technology, CZECH REPUBLIC..........................................................................................................................................................................................

Nanowire Based Sensors
W3P.068

DEVELOPMENT OF A HYDROGEN GAS SENSOR BASED ON A SUSPENDED MONOLITHIC
CARBON NANOWIRE PLATFORM
J. Heo, Y. Lim, and H. Shin
Ulsan National Institute of Science and Technology (UNIST), SOUTH KOREA..........................................................................................................................................................................................

Bio-Sensors & Bio-Microsystems
Cell Sensing & Manipulation
W3P.069

A CONTINUOUSLY TUNABLE SIZE-BASED FILTER
H.L. Chang1, F.L. Chen1, F. Ye1, S.J. Hong1, W.Z. Yuan1, and Y.C. Tai2
1
Northwestern Polytechnical University, CHINA and 2California Institute of Technology, USA..........................................................................................................................................................................................

W3P.070

DETECTION OF IMATINIB RESISTANCE IN K562 LEUKEMIA CELLS BY 3D-ELECTRODE
CONTACTLESS DIELECTROPHORESIS
Y. Demircan, A. Koyuncuoğlu, M. Erdem, E. Özgür, U. Gündüz, and H. Külah
Middle East Technical University (METU), TURKEY..........................................................................................................................................................................................

W3P.071

LIGHT-ADDRESSABLE MEASUREMENTS OF CELLULAR OXYGEN CONSUMPTION RATES IN
MICROWELL ARRAYS BASED ON PHASE-BASED PHOSPHORESCENCE LIFETIME DETECTION
H.T. Chu1, Y.S. Lin1, K.Y. Hung2, and S.H. Huang1
1
National Taiwan Ocean University, TAIWAN and 2Ming Chi University of Technology, TAIWAN..........................................................................................................................................................................................

W3P.072

MICROFLUIDIC CELL CULTURING BY HYDROGEL-BASED DIFFUSION/PERFUSION
D. Puchberger-Enengl1, S. van den Driesche2, C. Krutzler3, F. Keplinger1, and M.J. Vellekoop2
1
Vienna University of Technology, AUSTRIA, 2University of Bremen, GERMANY, and3
Integrated Microsystems Austria GmbH, AUSTRIA..........................................................................................................................................................................................

W3P.073

A DISPOSABLE POLYMER LAB-ON-A-SLIDE FOR POINT-OF-CARE DIAGNOSTICS OF
METHICILLIN-RESISTANT STAPHYLOCOCCUS AUREUS (MRSA)
M. Bu1, I.R. Perch-Nielsen1, J. Skov1, K.S. Sørensen1, Y. Sun2, M.E. Perdersen1, M.F. Hansen2,
K.W. Harlow1, and A. Wolff2
1
DELTA, DENMARK and 2Technical University of Denmark, DENMARK..........................................................................................................................................................................................

Fluid Manipulation in Microsystems
W3P.074

A BIOLOGICAL/ELECTROCHEMICAL RESERVIORS INTEGRATED MICROSENSOR FOR THE
DETERMINATION OF BIOCHEMICAL OXYGEN DEMAND
J.F. Wang, C. Bian, J.H. Tong, J.Z. Sun, Y. Li, H. Zhang, and S.H. Xia
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................

W3P.075

AN INTERVENTIONAL FLEXIBLE MICRONEEDLE WITH THREE-ELECTRODE SYSTEM ON THE
CAPILLARY FOR CONTINUOUS GLUCOSE MONITORING AND DRUG DELIVERY
Z. Yang1, A. Toda2, Y. Zhang1, T. Itoh1, and R. Maeda1
1National Institute of Advanced Industrial Science and Technology (AIST), JAPAN and
2
Meltex Incorporation, JAPAN..........................................................................................................................................................................................

W3P.076

ELECTROCHEMICAL GATING ON CMOS: INTERPLAY OF FIELD, ACIDITY AND SALINITY ON
AN ELECTROLYTE-INSULATOR INTERFACE
K. Jayant1, K. Auluck1, S. Anwar2, and E.C. Kan1
1
Cornell University, USA and 2City College New York, USA..........................................................................................................................................................................................

W3P.077

HIGHLY SENSITIVE AND RAPID DETECTION OF SHIGELLA FLEXNERI IN LIQUID SAMPLE BY
AN IMMUNOMAGNETIC ASSAY WITH SHEAR HORIZONTAL SURFACE ACOUSTIC WAVESENSORS
H.C. Hao and D.J. Yao
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

W3P.078

MICRO-NMR PROBE FEATURING DISPOSABLE, SELF- PRIMING SAMPLE-INSERTS, TOWARDS
HIGH-TROUGHPUT PROFILING
N. Spengler, R.Ch. Meier, A. Moazenzadeh, V. Badilita, J.G. Korvink, and U. Wallrabe
University of Freiburg - IMTEK, GERMANY..........................................................................................................................................................................................

W3P.079

OPTOFLUIDICS NANOPARTICLES SORTING BY HYDRODYNAMIC OPTICAL FORCE
Y. Yang1, Y.Z. Shi1,2, L.K. Chin1, J.B. Zhang3, D.P. Tsai4, and A.Q. Liu1,2,3
1Nanyang Technological University, SINGAPORE, 2Xi’an Jiao Tong University, CHINA, 3Agency for Science,
Technology and Research (A*STAR) and 4National Taiwan University, TAIWAN..........................................................................................................................................................................................

W3P.080

THE INFLUENCE OF MOLECULAR CHARGES ON MICROTUBULE CURVATURES IN AN
ELECTRICAL FIELD
N. Isozaki1, T. Nakahara1, S. Ando1, N. Kamisetty1, H. Shintaku1, H. Kotera1, E. Meyhofer2, and R. Yokokawa1,3
1
Kyoto University, JAPAN, 2University of Michigan, USA and 3Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

Manipulation & Detection of Bacteria
W3P.081

ARTIFICIAL BACTERIAL FLAGELLA FUNCTIONALIZED WITH TEMPERATURE-SENSITIVELIPOSOMES FOR BIOMEDICAL APPLICATIONS
F. Qiu1, R. Mhanna1, L. Zhang2, Y. Ding1, K. Sugihara1, M. Zenobi-Wong1, and B.J. Nelson1
1
ETH Zürich, SWITZERLAND and 2Chinese University of Hong Kong, CHINA..........................................................................................................................................................................................

W3P.082

PHASEGUIDE-CHIP FOR POINT-OF-CARE DIAGNOSTIC OF BACTERIA WITH INTEGRATEDENRICHMENT, LYSIS, AND NUCLEIC ACID PURIFICATION
H. Hubbe, S. Hakenberg, G. Dame, and G.A. Urban
University of Freiburg - IMTEK, GERMANY..........................................................................................................................................................................................

Sensing in Biosystems
W3P.083

A MICROFLUIDIC MAGNETIC BEAD-BASED PROXIMITY LIGATION ASSAY DEVICE FOR THE
QUANTIFICATION OF TNF-α IN HUMAN PLASMA
V. Castro-López1, J. Elizalde2, M. Pacek3, E. Hijona4, and L. Bujanda4
1
CIC microGUNE, SPAIN, 2IK4-IKERLAN, SPAIN, 3POC MicroSolutions, SPAIN, and4
Universidad del País Vasco, SPAIN..........................................................................................................................................................................................

W3P.084

ACUTE HIV DETECTION BY VIRAL LYSATE IMPEDANCE SPECTROSCOPY ON A MICROCHIP
H. Shafiee1, M. Jahangir1, F. Inci1, S. Wang1, R. Willenbrecht1, F.F. Giguel2, D.R. Kuritzkes1, and U. Demirci1
1
Harvard Medical School, Brigham and Women's Hospital, USA and2
Harvard Medical School, Massachusetts General Hospital, USA..........................................................................................................................................................................................

W3P.085

DEVELOPMENT OF A NEURAL PROBE TO MEASURE POTASSIUM DURING A CORTICALSPREADING DEPRESSION IN-VIVO
E.J. van der Wouden1, E.A. Tolner2, M. Odijk1, W. Olthuis1, A.M.J.M. van den Maagdenberg2, M.D. Ferrari2, andA. van den Berg1
1
University of Twente, THE NETHERLANDS, and 2Leiden University Medical Centre, THE NETHERLANDS..........................................................................................................................................................................................

W3P.086

LABEL-FREE IDE-BASED IMPEDANCE SPECTROSCOPY FOR THE INVESTIGATION OF
RECEPTOR-PROTEIN AFFINITY
L. Colella1, J. Deuquet1, C. Beyer2, J. Fröhlich2, G. van der Goot1, and P. Renaud1
1
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND and 2ETH Zürich, SWITZERLAND..........................................................................................................................................................................................

W3P.087

PRODUCTION OF 16 K PIXEL HYDROGEN ION IMAGE SENSORS WITH 0.01PH RESOLUTION
R. Otake1, M. Futagawa1, F. Dasai1, D. Suzuki1, M. Ishida1, and K. Sawada1,2
1
Toyohashi University of Technology, JAPAN and 2Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

Medical Microsystems
W3P.088

A MICROCHIP FOR IN VITRO PARAMETER DETERMINATION OF CANCERELECTROCHEMOTHERAPY
M. Wu, Y. Xiao, D. Zhao, Z. Liang, and Z. Li
Peking University, CHINA..........................................................................................................................................................................................

W3P.089

A WIRELESS INTERSTITIAL PRESSURE SENSOR WITH A GUYTON CHAMBER
S.H. Song, M. Brown, T. Maleki, and B. Ziaie
Purdue University, USA..........................................................................................................................................................................................

W3P.090

DEVELOPMENT OF HEMATOCRIT MONITORING SENSOR USING SCREEN PRINTED CARBON
ELECTRODE
S.-R. Lee and C.-M. Kyung
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA..........................................................................................................................................................................................

W3P.091

FLEXIBLE TACTILE SENSOR ATTACHED TO LAPAROSCOPE FOR MECHANICAL
CHARACTERISTICS OF SOFT MATERIALS AND TISSUES
C.H. Chuang, K.F. Lu, and J.L. Mu
Southern Taiwan University of Science and Technology, TAIWAN..........................................................................................................................................................................................

W3P.092

MEMS BASED MULTISPECTRAL CONFOCAL PROBE
S. Rattanavarin1, P. Sarapukdee2, N. Khemthongcharoen1, U. Jarujareet1, R. Jolivot1, I.W. Jung3, D. López3,
M.J. Mandella4, and W. Piyawattanametha1
1
National Electronics and Computer Technology Center (NECTEC), THAILAND, 2Chulalongkorn University,
THAILAND, 3Argonne National Laboratory, USA, and 4Stanford University, USA..........................................................................................................................................................................................

W3P.093

PLATE READER COMPATIBLE MEMBRANE-INTEGRATED MICROFLUIDIC PLATFORM FOR
HIGH-THROUGHPUT CELLULAR ASSAYS
E. Vereshchagina, D. McGlade, M. Glynn and J. Ducrée
Dublin City University, IRELAND..........................................................................................................................................................................................

Microfluidics
Droplet Based Microfluidics
W3P.094

DROPLET BISULFITE CONVERSION PLATFORM FOR EPIGENETIC CANCER BIOMARKER
DETECTION
D.J. Shin1, A. Stark2, and T.H. Wang1,2,3
1
Johns Hopkins University, USA, 2Sidney Kimmel Comprehensive Cancer Center, USA and 3Institute of
NanoBioTechnology, USA..........................................................................................................................................................................................

W3P.095

TRANSPORTATION OF A LIQUID DROPLET AT ULTRA-LOW VOLTAGES BY TUNABLE
WETTING ON CONJUGATED POLYMER ELECTRODES
W. Xu, Y. Tian, H. Bisaria, P. Ahn, C.-H. Choi, and E.-H. Yang
Stevens Institute of Technology, USA..........................................................................................................................................................................................

Microfluidics
W3P.096

AUTO-ACTUATED SEQUENTIAL RELEASE VALVES FOR LAB-ON-A-DISC SYSTEMS
D.J. Kinahan, S.M. Kearney, and J. Ducrée
Dublin City University, IRELAND..........................................................................................................................................................................................

W3P.097FABRICATION METHOD OF BASED-PARAFFIN RECONFIGURABLE MICROFLUIDIC CHIPSUSING LIQUID DIELECTROPHORESIS AND ELECTROWETTING TRANSDUCTIONS
R. Renaudot1, V. Agache1, Y. Fouillet1, M. Kumemura2, L. Jalabert2, D. Collard2, and H. Fujita2
1
Commissariat à l'énergie Atomique (CEA), FRANCE and 2University of Tokyo, JAPAN..........................................................................................................................................................................................

W3P.098

MULTI-SCALE PORE MEMBRANE FOR CONTINUOUS, PASSIVE FLUID TRANSPORT IN A MICROCOOLING DEVICE
H. So, J.C. Cheng, and A.P. Pisano
University of California, Berkeley, USA..........................................................................................................................................................................................

W3P.099

SINGLE-LAYER MICROFLUIDIC “SPRING” DIODES VIA OPTOFLUIDIC LITHOGRAPHY FORULTRA-LOW REYNOLDS NUMBER APPLICATIONS
R.D. Sochol, C.C. Glick, A. Lu, M. Wah, T. Brubaker, K.Y. Lee, K. Iwai, L.P. Lee, and L. Lin
University of California, Berkeley, USA..........................................................................................................................................................................................

W3P.100

VISUALISATION OF SUSPENDED NANOPARTICLES BY LIGHT SCATTERING IN A
MICROFLUIDIC CHIP AND MANUAL 2-D TRACKING FOR SIZE DETERMINATION
C. Haiden1, T. Wopelka2, M. Jech2, F. Keplinger1, and M.J. Vellekoop3
1
Vienna University of Technology, AUSTRIA, 2Austrian Center of Competence for Tribology, AUSTRIA, and3
University of Bremen, GERMANY..........................................................................................................................................................................................

Microfluidics with Cells
W3P.101

CELLULAR AGGREGATE CATCHER USING FLUIDIC MANIPULATION IN HIGH COMPATIBILITY
WITH WIDESPREAD MICRO-WELL-PLATE
Y. Teramachi1, S. Shimomura1, W. Tonomura1, S. Tajima2, Y. Tabata2, and S. Konishi1
1
Ritsumeikan University, JAPAN and 2Kyoto University, JAPAN..........................................................................................................................................................................................

W3P.102

STABLE CELLULAR FORCE MEASUREMENT BY ON-CHIP ROBOTIC PROBE BY EMPLOYINGSURFACE-DIRECTED LIQUID FLOW
S. Sakuma, M. Sugita, and F. Arai
Nagoya University, JAPAN..........................................................................................................................................................................................

Composite Materials/Polymers, Devices & Fabrication
W3P.103

A LOW-TEMPERATURE PARYLENE-C-TO-SILICON BONDING USING PHOTO-PATTERNABLE
ADHESIVES AND ITS APPLICATIONS
J.H.-C. Chang, Y. Liu, and Y.-C. Tai
California Institute of Technology, USA..........................................................................................................................................................................................

W3P.104

FABRICATION AND CHARACTERIZATION OF COMPOSITE HYDROGEL PARTICLES WITH XRAY ATTENUATING MEDIA
C. Wang1, X. Wang1, S. Anderson2, and X. Zhang1
1
Boston University, USA and 2Boston University Medical Center, USA..........................................................................................................................................................................................

W3P.105

FLEXIBLE AND TUNABLE METAMATERIALS AT TERAHERTZ FREQUENCIES
K. Fan1, X. Zhao1, J. Zhang1, G.D. Metcalfe2, R.D. Averitt1, and X. Zhang1
1
Boston University, USA and 2U.S. Army Research Laboratory, USA..........................................................................................................................................................................................

W3P.106

STRETCHABLE THIN-FILM METAL STRUCTURES ON A STIMULI-RESPONSIVE POLYMER
NANOCOMPOSITE FOR MECHANICALLY-DYNAMIC MICROSYSTEMS
A.E. Hess-Dunning1, D.J. Tyler2, and C.A. Zorman2
1
Louis Stokes Cleveland VA Medical Center, USA and 2Case Western Reserve University, USA..........................................................................................................................................................................................

Energy & Power MEMS
Electro Chemical Energy Storage
W3P.107

FLEXIBLE THIN-FILM RECHARGEABLE LITHIUM BATTERY
J.F. Ribeiro1, R. Sousa1, J.A. Sousa1, L.M. Goncalves1, M.M. Silva1, L. Dupont2, and J.H. Correia1
1
University of Minho, PORTUGAL and 2Université de Picardie Jules Verne, FRANCE..........................................................................................................................................................................................

Electro Static/Electret Harvesters
W3P.108

ELECTROSTATIC ENERGY HARVESTING DEVICE WITH OUT-OF-PLANE GAP CLOSINGSCHEME
F. Wang1 and O. Hansen1,2
1
Technical University of Denmark, DENMARK and2
Center for Individual Nanoparticle Functionality, (CINF), DENMARK..........................................................................................................................................................................................

W3P.109

X-SHAPED-SPRING ENHANCED MEMS ELECTRET GENERATOR FOR ENERGY HARVESTING
Y. Minakawa, R. Chen, and Y. Suzuki
University of Tokyo, JAPAN..........................................................................................................................................................................................

Harvesting Energy from Mechanical Vibrations
W3P.110A NOVEL MEMS ELECTROMAGNETIC ENERGY HARVESTER WITH SERIES COILS
Z.L. Li, M.D. Han, and H.X. Zhang
Peking University, CHINA..........................................................................................................................................................................................

W3P.111AUTONOMOUS SENSOR MODULE POWERED BY IMPACT-ENHANCED ENERGY HARVESTERFROM BROADBAND LOW-FREQUENCY VIBRATIONS
M. Ferrari, F. Cerini, and V. Ferrari
University of Brescia, ITALY..........................................................................................................................................................................................

W3P.112

MULTIPLE AXES VIBRATION ENERGY HARVESTER BASED ON PTFE AND METAL BALLS
W. Bian1,2, X. Wu1,2, L. Bu1,2, X. Wang1,2, and L. Liu1,2
1Tsinghua University, CHINA and 2Tsinghua National Laboratory for Information Science and Technology, CHINA..........................................................................................................................................................................................

Magnetic Sensors/Voltage Sensors
W3P.113A FULLY MONOLITHIC INTEGRATED ANISOTROPIC MAGNETORESISTANCE BASED ANGLESENSOR FOR AUTOMOTIVE
H. Witschnig1, A. Morici1, B. Schaffer1, and J. Zimmer2
1
Infineon Technologies Austria AG, AUSTRIA and 2Infineon Technologies AG, GERMANY..........................................................................................................................................................................................

W3P.114FLEXIBLE PARYLENE-BASED FOLDED INDUCTORS WITH MAGNETIC CORE
Y. Zheng1, X. Sun1, X. Li2, and H. Zhang1
1
Peking University, CHINA and 2Beijing Jiaotong University, CHINA..........................................................................................................................................................................................

Energy & Power MEMS - Microfuel Cells
W3P.115

CHARACTERISATION OF MICRO DIRECT METHANOL FUEL CELLS WITH SILICON PLATESUPPORTED INTEGRATED IONOMER MEMBRANES
J.V. Larsen1, B.T. Dalslet1, C. Kallesøe2, and E.V. Thomsen1
1
Techinical University of Denmark, DENMARK and 2Danish Technical Institute, DENMARK..........................................................................................................................................................................................

Piezo/Pyro Electric Energy Harvester
W3P.116

HIGH-TEMPERATURE STABLE PIEZOELECTRIC ALUMINUM NITRIDE ENERGY HARVESTERSUTILIZING ELASTICALLY SUPPORTED DIAPHRAGMS
Y.-J. Lai1, W.-C. Li1, C.-M. Lin1, V.V. Felmetsger2, and A.P. Pisano1
1
University of California, Berkeley, USA and 2OEM Group Incorporated, USA..........................................................................................................................................................................................

Thermoelectric Thermal Energy Harvesters
W3P.117

ENHANCED BOILING HEAT TRANSFER WITH COPPER OXIDE HIERARCHICAL SURFACES
K.-H. Chu1, Y. Zhu1, N. Miljkovic1, Y. Nam2, R. Enright3, and E.N. Wang1
1
Massachusetts Institute of Technology, USA, 2Kyung Hee University, SOUTH KOREA, and3
Bell Labs Ireland, Alacatel-Lucent, IRELAND..........................................................................................................................................................................................

W3P.118

PERFORMANCE OF A LOW TEMPERATURE ENERGY HARVESTING DEVICE FOR POWERINGWIRELESS SENSOR NODES IN AIRCRAFTS APPLICATIONS
A. Elefsiniotis1, N. Kokorakis1, Th. Becker1, and U. Schmid2
1
EADS Innovation Works, GERMANY and 2Vienna University of Technology, AUSTRIA..........................................................................................................................................................................................

W3P.119

THERMOELECTRIC POWER GENERATOR BASED ON A FERROELECTRIC MATERIALCOMBINED WITH A BIMETAL THERMOSTAT
T. Saito, Y. Kawai, and T. Ono
Tohoku University, JAPAN..........................................................................................................................................................................................

RF MEMS, Resonators & Oscillators
Resonators Oscillators
W3P.120

A CMOS-MEMS RESONANT GATE FIELD EFFECT TRANSISTOR
C.-H. Chin, C.-S. Li, M.-H. Li, and S.-S. Li
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

W3P.121

DESIGN AND CHARACTERIZATION OF MECHANICALLY-COUPLED CMOS-MEMS FILTERS
C.-Y. Chen, M.-H. Li, C.-S. Li, and S.-S. Li
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

W3P.122FULLY DIFFERENTIAL CMOS-MEMS SQUARE-PLATE OXIDE RESONATORS WITH EMBEDDED
POLY-SILICON ELECTRODES
W.-C. Chen1, M.-H. Li1, Y.-C. Liu1, D. Weinstein2, W. Fang1, and S.-S. Li1
1
National Tsing Hua University, TAIWAN and 2Massachusetts Institute of Technology, USA..........................................................................................................................................................................................

W3P.123MAGNETO-ELASTIC RESONATING ‘µ-DIVER’ MICROFLUIDIC-SYSTEM FOR WIRELESS BIOSENSING IN LIQUID
C. Xue, X. Li, T. Xu, B. Xu, and C. Yang
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................

W3P.124

PROCESS TOLERANT DESIGN OF A BAW RESONATOR VIA HOLE ENGINEERING
B. Figeys1,2, R. Jansen1, B. Nauwelaers2, H.A.C. Tilmans1, and X. Rottenberg1
1imec, BELGIUM and 2Katholieke Universiteit Leuven, BELGIUM..........................................................................................................................................................................................

W3P.125

THE EFFECTS OF TIGHT CAPACITIVE COUPLING ON PHASE NOISE PERFORMANCE: A LAMÉMODE MEMS OSCILLATOR STUDY
H. Zhu2, C.-H. Chuang1, C.-S. Li1, M.-H. Li1, J. E.-Y. Lee2, and S.-S. Li1
1
National Tsing Hua University, TAIWAN and 2City University of Hong Kong, HONG KONG..........................................................................................................................................................................................

RF MEMS Waveguides
W3P.126

INVESTIGATION OF BORON AND NITROGEN ION BEAM IMPLANTATION IN GOLD THIN FILMSFOR OHMIC MEMS SWITCH CONTACT IMPROVEMENT
B. Arrazat1,2, K. Inal3, and P. Gergaud2
1
Ecole Nationale Supérieure des Mines de Saint-Etienne, FRANCE, 2Commissariat à l'Energie Atomique, FRANCE
and 3Mines ParisTech, FRANCE..........................................................................................................................................................................................

Optical MEMS
Infrared Devices
W3P.127

A NOVEL INFRARED DETECTOR USING NONLINEAR VIBRATION FOR HIGH SENSITIVITY
T. Yamazaki, S. Ogawa, S. Kumagai, and M. Sasaki
Toyota Technological Institute, JAPAN..........................................................................................................................................................................................

Micro Lenses
W3P.128

PIEZO-ACTUATED TUNABLE DIAMOND/AlN MICRO LENSES
V. Zuerbig1,2, D. Paetz3, W. Pletschen1, J. Hees1, R.E. Sah1, L. Kirste1, N. Heidrich1, V. Cimalla1, C. Nebel1,
O. Ambacher1,2, and V. Lebedev1
1
Fraunhofer Institut für Angewandte Festkörperphysik (IAF), GERMANY, 2University of Freiburg – IMTEK,GERMANY and 3Ilmenau University of Technology, GERMANY..........................................................................................................................................................................................

Mirrors
W3P.129

A RASTER-OUTPUT 2D MEMS SCANNER WITH AN 8 X 4 MM MIRROR FOR AN AUTOMOTIVE
TIME-OF-FLIGHT IMAGE SENSOR
I. Aoyagi, K. Hamaguchi, Y. Nonomura and T. Akashi
Toyota Central R&D Labs. Inc., JAPAN..........................................................................................................................................................................................

Optical Devices
W3P.130

ABSOLUTE FIBER-OPTIC PRESSURE SENSING FOR HIGH-TEMPERATURE APPLICATIONSUSING WHITE LIGHT INTERFEROMETRY
G. Keulemans, F. Ceyssens, and R. Puers
Katholieke Universiteit Leuven, BELGIUM..........................................................................................................................................................................................

Optical Switches/Splitters
W3P.131

OPTOFLUIDIC MULTIPLEXING AND SWITCHING DEVICE
L. Brandhoff1, E. Weber1, S. Van den Driesche1, M. Bülters2, R.B. Bergmann2, and M.J. Vellekoop1
1
Universität Bremen, GERMANY and 2Bremer Institut für Angewandte Strahltechnik (BIAS), GERMANY..........................................................................................................................................................................................

Ring Resonators
W3P.132

NANO-OPTO-MECHANICAL (NOM) ACOUSTIC WAVEFRONT SENSOR VIA RING RESONATORS
B. Dong1,2, H. Cai2, J.M. Tsai2, P. Kropelnicki2, A.B. Randles2, M. Tang2, D.L. Kwong2, and A.Q. Liu1,2
1
Nanyang Technological University, SINGAPORE and2
Agency for Science, Technology and Research (A*STAR), SINGAPORE..........................................................................................................................................................................................

Tera Hertz & Plasmonic Devices
W3P.133

WAVELENGTH-SELECTIVE SILICON NEAR INFRARED PHOTODETECTOR USING SURFACE
PLASMON RESONANCE ENHANCEMENT
W.J. Chen1, T. Kan1, Y. Ajiki2, K. Matsumoto1, and I. Shimoyama1
1
University of Tokyo, JAPAN and 2Olympus Corporation, JAPAN..........................................................................................................................................................................................

Actuators
W3P.134

ELECTROSTATIC MICROACTUATORS IN A FLEXIBLE SHEET - SMART MEMS SHEET #2 M. Ataka1, M. Mita2, H. Toshiyoshi1, and H. Fujita1
1
University of Tokyo, JAPAN and 2Japan Aerospace Exploration Agency, JAPAN..........................................................................................................................................................................................

W3P.135APPLICATIONS OF NANONEWTON DIELECTROPHORETIC FORCES USING ATOMIC LAYERDEPOSITED OXIDES FOR MICROFLUIDIC SAMPLE PREPARATION AND PROTEOMICS
S. Emaminejad1, M. Javanmard2, C. Gupta1, R.W. Dutton1, R.W. Davis2, and R.T. Howe1
1
Stanford University, USA and 2Stanford Genome Technology Center, USA..........................................................................................................................................................................................

W3P.136NITROGEN INCORPORATED ULTRANANOCRYSTALLINE DIAMOND THERMAL ACTUATORS:DESIGN, FABRICATION AND ACTUATION
F. Buja1, A.V. Sumant2, and W.M. van Spengen1,3
1
Delft University of Technology, THE NETHERLANDS, 2Argonne National Laboratory, USA and 3Falco Systems,
THE NETHERLANDS..........................................................................................................................................................................................

Theory, Design & Test Methodology
Fluidic Design & Test
W3P.137

A FULLY DECOUPLED DESIGN METHOD FOR MEMS MICROTHRUSTER BASED ON
ORTHOGONAL ANALYSIS
Q. Shen, W.Z. Yuan, X.P. Li, Y.C. Hao, J.B. Xie, and H.L. Chang
Northwestern Polytechnical University, CHINA..........................................................................................................................................................................................

Physical MEMS Design
W3P.138

ACTIVE CONTROL OF SILICON NANOTWEEZERS DETECTS ENZYMATIC REACTION AT THE
MOLECULAR LEVEL
N. Lafitte1, Y. Haddab2, Y. Le Gorrec2, H. Guillou1, M. Kumemura1, L. Jalabert1, D. Collard1, and H. Fuijta1
1
University of Tokyo, JAPAN, and2
École Nationale Supérieure de Mécanique et des Microtechniques (ENSMM), FRANCE..........................................................................................................................................................................................

Physical MEMS Design
W3P.139

HIGH-UNIFORMITY POST-CMOS UNCOOLED MICROBOLOMETER FOCAL PLANE ARRAYINTEGRATED WITH ACTIVE MATRIX CIRCUIT
G. Kim1,2, S. Lim2, Y. Kim2, H. Kim2, B. Lim2, T. Kim2, J.H. Park2, H. Lee2, H. Kim2, J. Seo2, K. Lim1, C. Seok1,
and H. Ko1
1
Chungnam National University, SOUTH KOREA and 2National Nanofab Center, SOUTH KOREA..........................................................................................................................................................................................

Physical MEMS Design
W3P.140

PHOTONIC THERMOCOUPLE DESIGN BASED ON AN ULTRA-COMPACT MICHELSONINTERFEROMETER
J.F. Tao1,2, H. Cai2, Q.X. Zhang2, J.M. Tsai2, P. Kropelnicki2, A.B. Randles2, M. Tang2, and A.Q. Liu1,2
1
Nanyang Technological University, SINGAPORE and2
Agency for Science, Technology and Research (A*STAR), SINGAPORE..........................................................................................................................................................................................

Switch Design, Simulation & Test
W3P.141

COMPACT NEMS FPGA DESIGN FOR HARSH ENVIRONMENT AND LOW POWER REQUIREMENT
S. Han1, V. Sirigiri1, D.G. Saab1, F.K. Chowdhury2, and M. Tabib-Azar2
1
Case Western Reserve, USA and 2University of Utah, USA..........................................................................................................................................................................................

W3P.142

NEW SIMULATION AND EXPERIMENTAL METHODOLOGY FOR ANALYZING PULL-IN AND
RELEASE IN MEMS SWITCHES
M. Kamon1, S. Maity1, D. DeReus2, Z. Zhang3, S. Cunningham2, S. Kim2, J. McKillop2, A. Morris2,
G. Lorenz1, and L. Daniel3
1
Coventor, Inc., USA, 2Wispry, Inc., USA, and 3Massachusetts Institute of Technology, USA..........................................................................................................................................................................................

Late News
W3P.143

A NOVEL FABRICATION METHOD OF MICROCAPILLARIES VIA SILICON SURFACEMIGRATION AND THEIR APPLICATION TO SINGLE CELL ANALYSIS
Y. Luo, F. Zeng, L. Yobas, and M. Wong
Hong Kong University of Science and Technology, HONG KONG..........................................................................................................................................................................................

W3P.144A NOVEL INERTIAL SWITCH BASED ON NONLINEAR-SPRING SHOCK STOP
K.F. Deng, W.G. Su, S. Li, Y.T. Zhang, G.Z. Chen, W. Zhang, S. Wan, L. Li, S.B. Jiang, H. Zheng, and W. Xia
Peking University, CHINA..........................................................................................................................................................................................

W3P.145BALLISTIC AEROSOL MARKING
A.R. Völkel, G.B. Anderson, F.J. Endicott, E.M. Chow, and A.V. Pattekar
PARC – a Xerox Company, USA..........................................................................................................................................................................................

W3P.146BLOOD PRESSURE MEASUREMENT DEVICE BASED ON THE ARTERIAL TONOMETRY METHODWITH MICRO TRIAXIAL FORCE SENSOR
K. Shioya and T. Dohi
Chuo University, JAPAN..........................................................................................................................................................................................

W3P.147

FABRICATION AND PERFORMANCE OF THE LIGHT SWITCHABLE MICROELECTRODE ARRAYFOR RETINAL PROSTHESIS
X. Zhang1, T. Wang1, P.-Y. Chiou2, and Z. Li1
1Peking University, CHINA and 2University of California, Los Angeles, USA..........................................................................................................................................................................................

	  16:00 - 16:30

Break & Exhibit Inspection

Session W4A - Fabrication Technology 2
Session Chairs: K. Jackson, A.M. Fitzgerald and Associates, USA and X. Wang, Tsinghua University, CHINA

16:30 - 17:00
W4A.001

17:00 - 17:15
W4A.002

17:15 - 17:30
W4A.003

17:30 - 17:45
W4A.004

17:45 - 18:00
W4A.005

18:00 - 18:15
W4A.006

18:15 - 18:30
W4A.007

Invited Speaker
ADVANCES IN SILICON CARBIDE MICRO- AND NANO-ELECTRO-MECHANICAL SYSTEMSFABRICATION TECHNOLOGY AND APPLICATIONS
M. Mehregany
Case Western Reserve University, USA..........................................................................................................................................................................................
CHARACTERIZATION OF REACTIVELY SPUTTERED IRON OXIDE THIN FILMS FOR
DEVELOPING MAGNETIC RESONANCE IMAGING CONTRAST AGENTS
X. Wang1, C. Wang1, S. Anderson2, and X. Zhang1
1
Boston University, USA and 2Boston University Medical Center, USA..........................................................................................................................................................................................
FABRICATION AND INTEGRATION OF HORIZONTALLY ALIGNED CARBON NANOTUBE–C60
FILMS FOR UV SENSORS
M. De Volder1, E. Meshot2, S. Tawfick3, and A.J. Hart3
1
Katholieke Universiteit Leuven, BELGIUM, 2imec, BELGIUM, and 3University of Michigan, USA..........................................................................................................................................................................................
GLOW-DISCHARGE ION-SORPTION MICROPUMP FOR VACUUM MEMS
T. Grzebyk1, A. Górecka-Drzazga1, A. Zawada2, and J.A. Dziuban1
1
Wroclaw University of Technology, POLAND and 2Institute of Tele- and Radiotechniques, POLAND..........................................................................................................................................................................................
MICROMACHINED POLYCRYSTALLINE DIAMOND HEMISPHERICAL SHELL RESONATORS
A. Heidari1, M.-L. Chan1, H.-A. Yang2, G. Jaramillo1, P. Taheri-Tehrani1, P. Fonda1, H. Najar1, K. Yamazaki1,2,
L. Lin2, and D.A. Horsley1
1
University of California, Davis, USA and 2University of California, Berkeley, USA..........................................................................................................................................................................................
LOCALIZED, DEGENERATELY DOPED EPITAXIAL SILICON FOR TEMPERATURE
COMPENSATION OF RESONANT MEMS SYSTEMS
E.J. Ng, C.H. Ahn, Y. Yang, V.A. Hong, C.-F. Chiang, E. Ahadi, M.W. Ward, and T.W. Kenny
Stanford University, USA..........................................................................................................................................................................................
EXPERIMENTAL EVALUATION OF HIGH VOLTAGE HOLD-OFF CAPABILITY OF POST-PROCESSMESA-ISOLATED SERIES STANDARD CMOS TRANSISTORS
A. Hirakawa, S. Morishita, I. Mori, M. Kubota, and Y. Mita
University of Tokyo, JAPAN..........................................................................................................................................................................................

Session W4B - Nano-Biosensors
Session Chairs: P. Dittrich, ETH Zürich, SWITZERLAND and Z. Li, Peking University, CHINA

16:30 - 17:00
W4B.001

17:00 - 17:15
W4B.002

17:15 - 17:30
W4B.003

17:30 - 17:45
W4B.004

17:45 - 18:00
W4B.005

18:00 - 18:15
W4B.006

18:15 - 18:30
W4B.007

Invited Speaker
HIGH-THROUGHPUT AND LOW-COST NANOPHOTONIC BASED DIAGNOSTICS TECHNOLOGIES
H. Altug1,2, M. Huang1, and A.E. Cetin1
1
Boston University, USA and 2École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND..........................................................................................................................................................................................
NANOPLASMONIC BIOSENSING PLATFORM FOR MULTIPLE PATHOGEN DETECTION
F. Inci1, O. Tokel1, S. Wang1, U.A. Gurkan1, D.R. Kuritzkes2, and U. Demirci1,2,3
1Brigham and Women’s Hospital, Harvard Medical School, USA and 2Harvard-MIT Health Sciences andTechnology, USA..........................................................................................................................................................................................
MASS-PRODUCIBLE LOW-COST AU NANOSTRUCTURE NANOPLASMONIC BIOSENSOR ON
OPTOFLUIDIC-PORTABLE PLATFORM
Z.X. Geng1,2, Q. Kan1, J. Yuan1, H.S. Gao1, C.X. Wang1, and H.D. Chen11
Chinese Academy of Sciences, CHINA and 2Minzu University of China, CHINA..........................................................................................................................................................................................
LABEL-FREE AND ULTRASENSITIVE DETECTION OF MICRORNA BIOMARKERS IN LUNGCANCER CELLS BASED ON SILICON NANOWIRE FET BIOSENSORS
A. Gao, N. Lu, P. Dai, T. Li, and Y. Wang
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................
SILK STABILIZED GRAPHENE FET ENZYMATIC GLUCOSE BIOSENSOR
X.Q. You and J.J. Pak
Korea University, SOUTH KOREA..........................................................................................................................................................................................
MOTOR PROTEIN BASED TAU PROTEIN DETECTION DEVICE
Y. Orazov1, M.C. Tarhan1, R. Yokokawa2, S.L. Karsten3, and H. Fujita1
1
University of Tokyo, JAPAN, 2Kyoto University, JAPAN, and 3NeuroInDx Inc., USA..........................................................................................................................................................................................
CELL ARRAY FLUIDIC CHANNEL INTEGRATED WITH ELECTRODES FOR CELL-BASEDMULTIPLE CHEMICAL SENSING
N. Misawa1, H.J. Lee1, H. Mitsuno2, R. Kanzaki2, and K. Sawada1,3
1
Toyohashi University of Technology, JAPAN, 2University of Tokyo, JAPAN, and3Japan Science and Technology Agency (JST), JAPAN..........................................................................................................................................................................................

Session W4C - RF MEMS
Session Chairs: N. Barniol, Universitat Autónoma de Barcelona, SPAIN and G. Fedder, Carnegie Mellon University, USA

16:30 - 17:00
W4C.001

Invited Speaker
RF MEMS FOR CHANNELIZING LOW POWER RADIOS
C.T.-C. Nguyen
University of California, Berkeley, USA..........................................................................................................................................................................................

17:00 - 17:15
W4C.002

17:15 - 17:30
W4C.003

17:30 - 17:45
W4C.004

17:45 - 18:00
W4C.005

18:00 - 18:15
W4C.006

18:15 - 18:30
W4C.007

SWITCHABLE PIEZOELECTRIC TRANSDUCTION IN ALGAN/GAN MEMS RESONATORS
L.C. Popa and D. Weinstein
Massachusetts Institute of Technology, USA..........................................................................................................................................................................................
LARGE FREQUENCY TUNING OF LIHTIUM NIOBATE LATERALLY VIBRATING MEMSRESONATORS VIA ELECTRIC BOUNDARY RECONFIGURATION
S. Gong and G. Piazza
Carnegie Mellon University, USA..........................................................................................................................................................................................
METAL MICROMECHANICAL FILTER-POWER AMPLIFIER UTILIZING A DISPLACEMENTAMPLIFYING RESONANT SWITCH
W.-C. Li, Y. Lin, and C.T.-C. Nguyen
University of California, Berkeley, USA..........................................................................................................................................................................................
EXPERIMENTAL STUDY ON THE IMPACT OF ANCHOR LOSSES ON THE QUALITY FACTOR OF
CONTOUR MODE ALN RESONATOR
J. Segovia-Fernandez1, M. Cremonesi2, C. Cassella1, A. Frangi2, and G. Piazza1
1
Carnegie Mellon University, USA and 2Politecnico of Milano, ITALY..........................................................................................................................................................................................
TOPOLOGY OPTIMIZED RF MEMS SWITCHES
M.A. Philippine1, H. Zareie2, O. Sigmund3, G.M. Rebeiz2, and T.W. Kenny1
1
Stanford University, USA, 2University of California, San Diego, USA, and3
Technical Institute of Denmark, DENMARK..........................................................................................................................................................................................
MICROFLUIDIC TUNABLE METAMATERIAL FOR GIGAHERTZ FILTER ARRAY
A.Q. Liu1,2, W.M. Zhu2, Q.H. Song1, R.F. Huang3, S.K. Ting3, J.H. Teng4, and X.H. Zhang4
1
Xi’an Jiaotong University, CHINA, 2Nanyang Technological University, SINGAPORE, 3Temasek Laboratories,
SINGAPORE, and 4Institute of Materials Research and Engineering, SINGAPORE..........................................................................................................................................................................................

Session W4D - Optical Micro Scanners & Systems
Session Chairs: R. Puers, Katholieke Universiteit Leuven, BELGIUM and K. Sato, Aichi Institute of Technology, JAPAN

16:30 - 17:00
W4D.001

17:00 - 17:15
W4D.002

Invited Speaker
MEMS SCANNERS AND EMERGING 3D AND INTERACTIVE AUGMENTEDREALITY DISPLAY APPLICATIONS
H. Urey1, S. Holmstrom1, U. Baran1,2, K. Aksit1, M.K. Hedili1, and O. Eldes1
1
Koç University, TURKEY and 2University of Washington, USA..........................................................................................................................................................................................
DESIGN, FABRICATION AND CHARACTERIZATION OF LOW-VOLTAGE PIEZOELECTRIC TWOAXIS GIMBAL-LESS MICROSCANNERS
S. Gu-Stoppel, J. Janes, H.J. Quenzer, U. Hofmann, D. Kaden, B. Wagner and W. Benecke
Fraunhofer Institut for Silicon Technology (ISIT), GERMANY..........................................................................................................................................................................................

17:15 - 17:30
W4D.003

17:30 - 17:45
W4D.004

17:45 - 18:00
W4D.005

18:00 - 18:15
W4D.006

18:15 - 18:30
W4D.007

METALLIC GLASS MICRO-MIRROR INTEGRATED WITH PZT ACTUATION FOR LOWRESONANT FREQUENCY AND LARGE EXCITING ANGLE
Y.-C. Tsai1, J.-W. Lee1, T. Naono2, Y.-C. Lin1, M. Esashi1, T. Fujii2, and T. Gessner1,4,5
1
Tohoku University, JAPAN, 2Fujifilm Corporation, JAPAN, 3Fraunhofer Institute for Electronic Nano Systems(ENAS), GERMANY and 4Chemnitz University of Technology, GERMANY..........................................................................................................................................................................................
A BIO-INSPIRED HEMISPHERICAL LENS BASED ON REFLECTING SUPERPOSITION COMPOUNDEYE OPTICS
C.-C. Huang, B. Aldalali, X. Wu, and H. Jiang
University of Wisconsin, USA..........................................................................................................................................................................................
15µM AIR GAP 8×8/4×4 PIXELS SINGLE CRYSTAL SILICON CONTINUOUS MEMBRANE
DEFORMABLE MIRROR
T. Wu, T. Sasaki, M. Akiyama, and K. Hane
Tohoku University, JAPAN..........................................................................................................................................................................................
32X32 OPTICAL PHASED ARRAY WITH ULTRA-LIGHTWEIGHT HIGH-CONTRAST-GRATINGMIRRORS
B.W. Yoo1, M. Megens1, T.K. Chan2, T. Sun1, W. Yang1, D.A. Horsley2, C.J. Chang-Hasnain1, and M.C. Wu1
1
University of California, Berkeley, USA and 2University of California, Davis, USA..........................................................................................................................................................................................
MINIATURE FOURIER TRANSFORM INFRARED SPECTROMETER FOR MIDDLE INFRAREDWAVELENGTH RANGE
T. Tanahashi, M. Toda, H. Miyashita, and T. Ono
Tohoku University, JAPAN..........................................................................................................................................................................................

18:30

Adjourn for the Day

20:15 23:00

Conference Banquet

Thursday 20 June 2013
Session Th1A - Physical Microsystems 3
Session Chairs: T. Kenny, Stanford University, USA and M. Wong, Hong Kong University of Science and Technology, CHINA

08:30 - 09:00
Th1A.001

09:00 - 09:15
Th1A.002

09:15 - 09:30
Th1A.003

09:30 - 09:45
Th1A.004

09:45 - 10:00
Th1A.005

10:00 - 10:15
Th1A.006

Invited Speaker
CMOS MEMS: A KEY TECHNOLOGY TOWARDS THE “MORE THAN MOORE” ERA
W. Fang, S.-S. Li, C.-L. Cheng, C.-I. Chang, W.-C. Chen, Y.-C. Liu, M.-H. Tsai, and C. Sun
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................
A HIGH PERFORMANCE AUTOMATIC MODE-MATCHED MEMS GYROSCOPE WITH AN
IMPROVED THERMAL STABILITY OF THE SCALE FACTOR
S. Sonmezoglu, S.E. Alper, and T. Akin
Middle East Technical University (METU), TURKEY..........................................................................................................................................................................................
A HIGH PERFORMANCE MEMS BASED DIGITAL-OUTPUT GYROSCOPE
A. Ismail, B. George, A. Elmallah, A. Mokhtar, M. Abdelazim, M. Elmala, A. Elshennawy, A. Omar,
M. Saeed, I. Mostafa, and A. Elsayed
Si-ware Systems, EGYPT..........................................................................................................................................................................................
INTERACTION EFFECTS OF TEMPERATURE AND STRESS ON MATCHED-MODE GYROSCOPEFREQUENCIES
E. Tatar, C. Guo, T. Mukherjee, and G.K. Fedder
Carnegie Mellon University, USA..........................................................................................................................................................................................
1 PPM PRECISION SELF-CALIBRATION OF SCALE FACTOR IN MEMS CORIOLIS VIBRATORYGYROSCOPES
A.A. Trusov1,2, I.P. Prikhodko1, D.M. Rozelle2, D. Meyer2, and A.M. Shkel1
1
University of California, Irvine, USA and 2Northrop Grumman Electronic Systems, USA..........................................................................................................................................................................................
ELECTRONIC SENSING SYSTEM WITH FLEXIBLE BIOMECHANICAL GROUND REACTIONSENSOR ARRAY ACHIEVING 100 µm/sec GAIT GROUND VELOCITY RESOLUTION
Q. Guo1, M.A. Suster2, R. Surapaneni1, C.H. Mastrangelo1, and D.J. Young1
1
University of Utah, USA and 2Case Western Reserve University, USA..........................................................................................................................................................................................

Session Th1B - Bio-Microsystems in Diagnostics
Session Chairs: Z. Brzózka, Warsaw University of Technology, POLAND and A. Herr, University of California, Berkeley, USA

08:30 - 09:00
Th1B.001

Invited Speaker
BIOMEDICAL MICRO AND NANOTECHNOLOGY:
FROM LAB-ON-CHIP TO BUILDING SYSTEMS WITH CELLS
U. Hassan, P. Bajaj, G. Damhorst, and R. Bashir
University of Illinois, Urbana-Champaign, USA..........................................................................................................................................................................................

09:00 - 09:15
Th1B.002

09:15 - 09:30
Th1B.003

09:30 - 09:45
Th1B.004

09:45 - 10:00
Th1B.005

10:00 - 10:15
Th1B.006

A MICROFLUIDIC APTASENSOR INTEGRATED WITH NANODROP GENERATOR FOR MALDITOF MS ANALYSIS IN CLINICAL APPLICATIONS
J. Yang, J. Zhu, and Q. Lin
Columbia University, USA..........................................................................................................................................................................................
AUTOMATED ON-DISC TOTAL RNA EXTRACTION FROM WHOLE BLOOD TOWARDS POINT-OFCARE FOR EARLY-STAGE DIAGNOSTICS
N. Dimov1, J. Gaughran1, E. Clancy2, T. Barry2, T.J. Smith2, and J. Ducrée1
1
Dublin City University, IRELAND and 2National University of Ireland, IRELAND..........................................................................................................................................................................................
A COMPACT, OPTOFLUIDIC SYSTEM FOR MEASURING RED BLOOD CELL CONCENTRATION
M.N. Gulari, M. Ghannad-rezaie, and N. Chronis
University of Michigan, USA..........................................................................................................................................................................................
MULTICOLOR ULTRA HIGH THROUGHPUT PARALLEL MICROFLUIDIC FLOW CYTOMETER
Y.J. Fan1,2, Y. Chen1, Y.C. Wu1, Y.C. Kung1, T.H. Wu1, H.J. Sheen2, and P.Y. Chiou1
1
University of California, Los Angeles, USA and 2National Taiwan University, TAIWAN..........................................................................................................................................................................................
LIVE IMAGING OF CELL APOPTOSIS USING FRET-BASED BIOPROBES IN MEMS FABRICATEDMICROCULTURE DISH
R. Kajiyama1, Y. Edagawa2, M. Suzuki3, A. Nakahara1, D.H. Yoon1, T. Sekiguchi1, and S. Shoji1
1
Waseda University, JAPAN, 2Teikyo Heisei University, JAPAN, and 3Saitama University, JAPAN..........................................................................................................................................................................................

Session Th1C - MEMS & NEMS
Session Chairs: G. Skidmore, DRS Technologies RSTA, USA and T. Tsuchiya, Kyoto University, JAPAN

08:30 - 09:00
Th1C.001

09:00 - 09:15
Th1C.002

09:15 - 09:30
Th1C.003

09:30 - 09:45
Th1C.004

Invited Speaker
SUCCESSFUL IMPLEMENTATION OF A MEMS MICROMIRROR ARRAYIN A LITHOGRAPHY ILLUMINATION SYSTEM
W. Endendijk, B.P. van Drieënhuizen, and H.M. Mulder
ASML, THE NETHERLANDS..........................................................................................................................................................................................
PIRANI GAUGE BASED ON ALTERNATIVE SELF-HEATING OF SILICON NANOWIRE
J. Ruellan, J. Arcamone, D. Mercier, C. Dupré, and L. Duraffourg
Commissariat à l'énergie Atomique (CEA), FRANCE..........................................................................................................................................................................................
DUAL-LAYER NANOPOROUS ANODIC ALUMINUM OXIDE WITH EMBEDDED ELECTRODES FORCAPACITIVE RELATIVE HUMIDITY SENSOR
C.-L. Hsieh, P.-H. Lo, and W. Fang
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................
MICRO-CHEMO-MECHANICAL HYDROGEN SENSOR BASED ON CONTACT RESISTANCE OF
CARBON NANOTUBES ARRAY
M.-O. Kim, K. Lee., H. Na, D.-S. Kwon, J. Choi, J.-I. Lee, D. Baek, and J. Kim
Yonsei University, SOUTH KOREA..........................................................................................................................................................................................

09:45 - 10:00
Th1C.005

10:00 - 10:15
Th1C.006

FACILE FABRATION OF HETEROGENEOUS NANOMATERIAL ARRAY TOWARDS LOW-POWER
AND MULTIPLEXED GAS SESING APPLICATION
D. Yang1, M.K. Fuadi1, Z. Li2, and I. Park1
1
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA and2
Hewlett Packard Laboratory, USA..........................................................................................................................................................................................
RESISTIVE GAS SENSORS FABRICATED BY WAFER-SCALE, IN-SITU INTEGRATION OF
HORIZONTAL CARBON NANOTUBE MEMBRANES
H. Le Poche1, H. Guerin2, R. Pohle3, M. Fernández-Bolaños Badía2, J. Dijon1, and A.M. Ionescu2
1
Commissariat à l'énergie Atomique (CEA), FRANCE,
2
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND, and3
Siemens AG Corporate Research, GERMANY..........................................................................................................................................................................................

Session Th1D - Photonics for Bio/Fluidic Applications
Session Chairs: A.Q. Liu, Nanyang Technological University, SINGAPORE and R. Puers, Katholieke Universiteit Leuven, BELGIUM

08:30 - 09:00
Th1D.001

09:00 - 09:15
Th1D.002

09:15 - 09:30
Th1D.003

09:30 - 09:45
Th1D.004

09:45 - 10:00
Th1D.005

10:00 - 10:15
Th1D.006

Invited Speaker
NANOPHOTONIC BIOSENSORS IN SILICON-ON-INSULATOR
P. Bienstman1, S. Werquin1, C. Lerma Arce1, D. Witters2, R. Puers2, J. Lammertyn2, T. Claes1, E. Hallynck1,
J.-W. Hoste1, and D. Martens1
1
Ghent University - imec, BELGIUM and 2Katholieke Universiteit Leuven, BELGIUM..........................................................................................................................................................................................
QUANTUM DOT BASED COMPACT SOLID-STATE SWEPT LIGHT SOURCE FOR
HYPERSPECTRAL CELLULAR IMAGING
K. Hoshino, G. Bhave, N. Triesault, P. Joshi, A. Zubieta, V. Wang, K.V. Sokolov, and X.J. Zhang
University of Texas, Austin, USA..........................................................................................................................................................................................
VARIABLE MULTI-COLOR MICROFLUIDIC ORGANIC LIGHT EMITTING DEVICE BASED ON
MIXING OF ELECTROCHEMILUMINESCENCE SOLUTIONS
T. Kasahara1, J. Mizuno1, S. Matsunami2, T. Edura2, M. Tsuwaki1, J. Oshima3, C. Adachi2, and S. Shoji1
1
Waseda University, JAPAN, 2Kyushu University, JAPAN, and 3Nissan Chemical Industries, Ltd., JAPAN..........................................................................................................................................................................................
CMOS-MEMS FABRY-PEROT OPTICAL INTERFERENCE DEVICE WITH TUNABLE RESONANT
CAVITY
G.-L. Luo, C.-C. Lee, C.-L. Cheng, M.-H. Tsai, and W. Fang
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................
THERMALLY ACTUATED LIQUID TUNABLE MICROLENS WITH EMBEDDED
THERMOELECTRIC DRIVER AND SUB-SECOND RESPONSE TIME
A.O. Ashtiani and H. Jiang
University of Wisconsin, USA..........................................................................................................................................................................................
MICROFLUIDICS INTEGRABLE PLASMA SOURCE POWERED BY A SILICON THROUGHSUBSTRATE SPLIT-RING RESONATOR
M. Berglund, A. Persson, H. Kratz, and G. Thornell
Uppsala University, SWEDEN..........................................................................................................................................................................................

10:15 - 10:45

Break

Session Th2A - Flexible Technology
Session Chairs: X. Wang, Tsinghua University, CHINA and L. Sarro, Delft University of Technology, THE NETHERLANDS

10:45 - 11:00
Th2A.001

11:00 - 11:15
Th2A.002

11:15 - 11:30
Th2A.003

11:30 - 11:45
Th2A.004

11:45 - 12:00
Th2A.005

12:00 - 12:15
Th2A.006

12:15 - 12:30
Th2A.007RELIABLE PACKAGING FOR PARYLENE-BASED FLEXIBLE RETINAL IMPLANT
J.H.-C. Chang, Y. Liu, D. Kang, and Y.-C. Tai
California Institute of Technology, USA..........................................................................................................................................................................................
CREATING PARTICULATE MICROSTRUCTURES FOR TWO- AND THREE- DIMENSIONAL CELLPATTERNING
X. Zhang and Y. Zhao
Ohio State University, USA..........................................................................................................................................................................................
HYDROCHLORIC ACID-IMPREGNATED PAPER FOR LIQUID METAL MICROFLUIDICS
D. Kim1, Y. Lee1, D.-W. Lee2, W. Choi1, and J.-B. Lee1
1
University of Texas, Dallas, USA and 2Chonnam National University, SOUTH KOREA..........................................................................................................................................................................................
STRETCHABLE STRAIN SENSOR BASED ON METAL NANOPARTICLE THIN FILM FOR HUMAN
MOTION DETECTION & FLEXIBLE PRESSURE SENSING DEVICES
J.H. Lee, D. Yang, S. Kim, and I. Park
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA..........................................................................................................................................................................................
A FLEXIBLE STRESS SENSOR USING A SUB-10µM SILICON CHIP TECHNOLOGY
S. Ferwana, E.A. Angelopoulos, S. Endler, C. Harendt, and J.N. Burghartz
Institute for Microelectronics Stuttgart (IMS CHIPS), GERMANY..........................................................................................................................................................................................
LOW-COST ROLL-TO-ROLL COLORIMETRIC GAS SENSOR SYSTEM FOR FIRE DETECTION
C. Peter1, S. Schulz2, M. Barth3, M. Gempp2, S. Rademacher1, and J. Wöllenstein4
1
Fraunhofer Institute for Physical Measurement Techniques (IPM), GERMANY, 2A. Raymond, GERMANY,
3
HSG-IMAT, GERMANY and 4University of Freiburg – IMTEK, GERMANY..........................................................................................................................................................................................
SILICON FABRIC FOR MULTI-FUNCTIONAL APPLICATIONS
G. Torres Sevilla, J.P. Rojas, S. Ahmed, A. Hussain, S.B. Inayat, and M.M. Hussain
King Abdullah University of Science and Technology, SAUDI ARABIA..........................................................................................................................................................................................

Session Th2B - Microfluidics
Session Chairs: Y.-C. Lin, National Cheng Kung University, TAWAIN and R. Zengerle, University of Freiburg - IMTEK, GERMANY

10:45 - 11:00
Th2B.001VALVE-ONLY PUMPING IN MECHANICAL GAS MICROPUMPS
A. Besharatian, K. Kumar, R.L. Peterson, L.P. Bernal, and K. Najafi
University of Michigan, USA..........................................................................................................................................................................................

11:00 - 11:15
Th2B.002

11:15 - 11:30
Th2B.003

11:30 - 11:45
Th2B.004

11:45 - 12:00
Th2B.005

12:00 - 12:15
Th2B.006

12:15 - 12:30
Th2B.007

HIGH-THROUGHPUT IONIC LIQUID ELECTROSPRAY SOURCES BASED ON DENSE
MONOLITHIC ARRAYS OF EMITTERS WITH INTEGRATED EXTRACTOR GRID AND CARBON
NANOTUBE FLOW CONTROL STRUCTURES
F.A. Hill, P.J. Ponce de Leon, and L.F. Velásquez-García
Massachusetts Institute of Technology, USA..........................................................................................................................................................................................
SELF-SENSING NANOPIPETTE FOR LIQUID DISPENSING AND AFM IMAGING
H.H. Perez Garza, R. Stoute, M.K. Ghatkesar, and U. Staufer
Delft University of Technology, THE NETHERLANDS..........................................................................................................................................................................................
FABRICATION OF JANUS HYDROGEL BEADS WITH MAGNETIC ANISOTROPY FOR
ELECTRONIC PAPER USING SHRINKAGE-GELATION TECHNIQUE
K. Aketagawa, H. Hirama, and T. Torii
University of Tokyo, JAPAN..........................................................................................................................................................................................
MICRODROPLET-BASED SYNTHESIS AND CENTRIFUGE-FREE RETRIEVAL OF
NANOPARTICLES VIA A CONTINUOUS FLOW MICROPOST ARRAY RAILING SYSTEM
K. Iwai, E.Y. Erdem, R.D. Sochol, J.C. Cheng, F.M. Doyle, A.P. Pisano, and L. Lin
University of California, Berkeley, USA..........................................................................................................................................................................................
NUMBER CONTROLLABLE ACTIVE MICRODROPLET MERGING WITH WIDE RANGE OFVOLUME FOR DIGITAL CHEMICAL SYNTHESIS
D.H. Yoon1, S. Numakunai1, J. Ito1, T. Fukuda2, T. Sekiguchi1, and S. Shoji1
1
Waseda University, JAPAN and 2Saitama University, JAPAN..........................................................................................................................................................................................
CHARACTERIZATION OF DEPLETION LAYER FORMATION USING SELF-ASSEMBLED
NANOPARTICLES IN MICROCHANNELS
E. Choi, K. Kwon, D. Kim, and J. Park
Sogang University, SOUTH KOREA..........................................................................................................................................................................................

Session Th2C - Composite Materials & Characterization
Session Chairs: C. Nguyen, University of California, Berkeley, USA and S. Tatic-Lucic, Lehigh University, USA

10:45 - 11:00
Th2C.001

11:00 - 11:15
Th2C.002

IMPROVED PERFORMANCE OF SELF-ASSEMBLED GRAPHENE BIOSENSORS INTEGRATEDWITH SHRINK-INDUCED TUNABLE MORPHOLOGY OF SILVER NANOPARTICLES
B. Zhang and T. Cui
University of Minnesota, USA..........................................................................................................................................................................................
FORMATION AND INTEGRATION OF TUNABLE ANISOTROPIC MAGNETIC POLYMERCOMPOSITES BY TWO STAGES SOLIDIFICATION PROCESS
F.-M. Hsu, W.-C. Chen, C.-F. Hu, G.-Y. Liu, and W. Fang
National Tsing Hua University, TAIWAN..........................................................................................................................................................................................

11:15 - 11:30
Th2C.003

11:30 - 11:45
Th2C.004

11:45 - 12:00
Th2C.005

12:00 - 12:15
Th2C.006

12:15 - 12:30
Th2C.007PUSHING THE LIMITS OF PHOTO-CURABLE SU-8-BASED SUPERPARAMAGNETIC POLYMERCOMPOSITES
C. Peters, O. Ergeneman, G.A. Sotiriou, S.E. Pratsinis, B.J. Nelson, and C. Hierold
ETH Zürich, SWITZERLAND..........................................................................................................................................................................................
ULTRAFAST PHOTO-TRIGGERED FIELD EMISSION CATHODES USING MASSIVE, UNIFORMARRAYS OF NANO-SHARP HIGH-ASPECT-RATIO SILICON STRUCTURES
M.E. Swanwick1, P.D. Keathley1, F.X. Kärtner2, and L.F. Velásquez-Garcia1
1
Massachusetts Institute of Technology, USA and 2University of Hamburg, USA..........................................................................................................................................................................................
CHARACTERIZATION OF	
  π-CONJUGATED METALLOPOLYMER’S MECHANICAL STIFFNESS BY
USING SILICON NANOTWEEZERS
J. Lee, K. Yagi, M. Kumemura, T. Sato, L. Jalabert, N. Lafitte, D. Collard, H. Houjou, and H. Fujita
University of Tokyo, JAPAN..........................................................................................................................................................................................
TOP-DOWN BATCH-FABRICATION OF BOTTOM-UP SELF-ASSEMBLIES FOR REGIONSELECTIVE MULTI-FUNCTIONALIZATION OF MICROFLUIDIC CHIPS
C. Chen, P. Xu, and X. Li
Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................
DEDICATED TEST STRUCTURE FOR THE MEASUREMENT OF ADHESION FORCES BETWEENCONTACTING SURFACES IN MEMS DEVICES
J. De Coster, F. Ling, A. Witvrouw, and I. De Wolf
Katholieke Universiteit Leuven, BELGIUM..........................................................................................................................................................................................

Session Th2D - Optical and Fluidic Systems
Session Chairs: K. Böhringer, University of Washington, USA and T. Cui, University of Minnesota, USA

10:45 - 11:00
Th2D.001

11:00 - 11:15
Th2D.002

11:15 - 11:30
Th2D.003

MICRO-OPTICAL 1D MOIRÉS AS ANTI-COUNTERFEITING FEATURES
V.J. Cadarso, S. Chosson, K. Sidler, R.H. Hersch, and J. Brugger
École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND..........................................................................................................................................................................................
3D RECONSTRUCTION AND FEATURE EXTRACTION FOR ANALYSIS OF NANOSTRUCTURES BY
SEM IMAGING
F.-Y. Zhu1, Q.-Q. Wang2, X.-S. Zhang1, W. Hu1, X. Zhao2, and H.-X. Zhang1
1
Peking University, CHINA and 2Nankai University, CHINA..........................................................................................................................................................................................
HIGH DETECTIVITY UNCOOLED THERMOPILE DETECTORS WITH SPECTRALLY SELECTIVERESPONSIVITY
A.S. Gawarikar, R.P. Shea, and J.J. Talghader
University of Minnesota, USA..........................................................................................................................................................................................

11:30 - 11:45
Th2D.004

11:45 - 12:00
Th2D.005

12:00 - 12:15
Th2D.006

12:15 - 12:30
Th2D.007

12:30 - 14:15

A POWERLESS OPTICAL MICROSENSOR FOR MONITORING INTRAOCULAR PRESSURE WITH
KERATOPROSTHETIC
M. Ghannad-Rezaie, M.N. Gulari, R. de Melo Franco, S. I. Mian, and N. Chronis
University of Michigan, USA..........................................................................................................................................................................................
A FLEXIBLE, LASER-DEFINED, PAPER PLATFORM FOR LOCALIZED OXYGEN GENERATION
AND DELIVERY
M. Ochoa1, R. Rahimi1, N. Alemdar2, M.R. Dokmeci2, A. Khademhosseini2, and B. Ziaie1
1
Purdue University, USA and 2Brigham and Women’s Hospital, Harvard Medical School, USA..........................................................................................................................................................................................
A MICROFLUIDIC READ-OUT PLATFORM FOR MINIATURIZED RFID TAGS
H.R. Seren, C. Wang, X. Zhao, C. Chen, and X. Zhang
Boston University, USA..........................................................................................................................................................................................
FERROFLUID-ASSISTED LEVITATION MECHANISM FOR MICROMOTOR APPLICATIONS
B. Assadsangabi, M.H. Tee, and K. Takahata
University of British Columbia, CANADA..........................................................................................................................................................................................
Lunch on Own

Session Th3A - Tactile Sensors
Session Chairs: G. Fedder, Carnegie Mellon University, USA and G. Skidmore, DRS Technologies RSTA, USA

14:15 - 14:45
Th3A.001

14:45 – 15:00
Th3A.002

15:00 – 15:15
Th3A.003

15:15 – 15:30
Th3A.004

Invited Speaker
MICROSYSTEMS AND FUNCTIONAL ASSAYS FOR MECHANOBIOLOGY
B.L. Pruitt, J.C. Doll, S.J. Park, N. Harjee, and B.C. Petzold
Stanford University, USA..........................................................................................................................................................................................
A 1.7MM3 MEMS-ON-CMOS TACTILE SENSOR USING HUMAN-INSPIRED AUTONOMOUS
COMMON BUS COMMUNICATION
M. Makihata1, M. Muroyama1, Y. Nakano1, S. Tanaka1, T. Nakayama2, U. Yamaguchi2, H. Yamada2,
Y. Nonomura3, H. Funabashi3, Y. Hata3, and M. Esashi1
1
Tohoku University, JAPAN, 2Toyota Motor Corp., JAPAN, and 3Toyota Central R&D Labs., JAPAN..........................................................................................................................................................................................
LOW VOLTAGE ACTUATED PLATE FOR HAPTIC APPLICATIONS WITH PZT THIN-FILM
F. Casset1, J.S. Danel1, C. Chappaz2, Y. Civet3, M. Amberg4, M. Gorisse3, C. Dieppedale1, G. Le Rhun1,
S. Basrour3, P. Renaux1, E. Defay1, A. Devos5, B. Semail4, P. Ancey2, and S. Fanget1
1
Commissariat à l'énergie Atomique (CEA), FRANCE, 2STMicroelectronics, FRANCE, 3TIMA, FRANCE,
4
Université Lille 1 FRANCE, and 5Menapic, FRANCE..........................................................................................................................................................................................
LARGE RANGE MULTI-AXIS FINGERTIP FORCE SENSOR
R.A. Brookhuis, R.J. Wiegerink, T.S.J. Lammerink, K. Ma, and G.J.M. Krijnen
MESA+, University of Twente, THE NETHERLANDS..........................................................................................................................................................................................

15:30 – 15:45
Th3A.005

15:45 – 16:00
Th3A.006

FABRICATION AND MECHANICAL CHARACTERIZATION OF RING-SHAPED LTCC/HTCC
FINGER FORCE SENSORS USED FOR PERFORMANCE STUDIES IN CLARINET PLAYING
M. Weilguni1, A. Hofmann2, W. Smetana1, W. Goebl2, J. Nicolics1, and G. Radosavljevic1
1
Vienna University of Technology, AUSTRIA and 2University of Music and Performing Arts Vienna, AUSTRIA..........................................................................................................................................................................................
3-AXIS FINGERTIP FORCE DURING PLAYING THE STRING INSTRUMENT
M. Hori1, M. Hosono2, H. Takahashi1, K. Matsumoto1, and I. Shimoyama1
1
University of Tokyo, JAPAN and 2Industrial Research Institute of Shizuoka Prefecture, JAPAN..........................................................................................................................................................................................

Session Th3B - Gas Chromatography
Session Chairs: W. Lang, University of Bremen, GERMANY and W. Wlodarski, RMIT University, AUSTRALIA

14:15 – 14:45
Th3B.001

14:45 – 15:00
Th3B.002

15:00 – 15:15
Th3B.003

15:15 – 15:30
Th3B.004

15:30 – 15:45
Th3B.005

15:45 – 16:00
Th3B.006

Invited Speaker
THE DEVELOPMENT OF MEMS MASS SPECTROMETERS
R.R.A. Syms
Imperial College, UK..........................................................................................................................................................................................
A FACILE, STANDARDIZED FABRICATION APPROACH AND SCALABLE ARCHITECTURE FOR A
MICRO GAS CHROMATOGRAPHY SYSTEM WITH INTEGRATED PUMP
Y. Qin and Y.B. Gianchandani
University of Michigan, USA..........................................................................................................................................................................................
A MEMS-ENABLED INTEGRATED MICROGC PLATFORM FOR ON-SITE MONITORING OF
WATER ORGANIC COMPOUNDS
M. Akbar, D. Wang, H. Shakeel, J.R. Heflin, and M. Agah
Virginia Tech, USA..........................................................................................................................................................................................
FIELDABLE MEMS GAS CHROMATOGRAPH FOR RAPID DETERMINATIONS OF EXPLOSIVE
MARKER COMPOUNDS IN COMPLEX MIXTURES
W. Collin, G. Serrano, L.K. Wright, H. Chang, N. Nuñovero, and E.T. Zellers
University of Michigan, USA..........................................................................................................................................................................................
LOW VOLTAGE (<5V) ION-MOBILITY SPECTROMETER ARRAY FOR LABEL-FREE GASDETECTION
V. Gund, Y. Shi, S. Ardanuc, and A. Lal
Cornell University, USA..........................................................................................................................................................................................
LARGE-CAPACITY-ON-CHIP PRECONCENTRATOR DEVICE FOR SELECTIVE ETHYLENE
MEASUREMENT BELOW 400 PPBV
S. Janßen, T. Teßmann, M. Nießen, A. Sklorz, and W. Lang
Universität Bremen, GERMANY..........................................................................................................................................................................................

Session Th3C - Imunnoassays & Nucleic Acid Assays
Session Chairs: CJ Kim, University of California, Los Angeles, USA and A.Q. Liu, Nanyang Technological University, SINGAPORE

14:15 – 14:45
Th3C.001

14:45 – 15:00
Th3C.002

15:00 – 15:15
Th3C.003

15:15 – 15:30
Th3C.004

15:30 – 15:45
Th3C.005

15:45 – 16:00
Th3C.006

Invited Speaker
INTEGRATING APTAMERS INTO MICRO- AND NANOBIOSYSTEMS FOR DIAGNOSTICS
D. Spasic1, K.P. Janssen1, F. Toffalini1, D.T. Tran2, K. Leirs1, D. Decrop1, and J. Lammertyn1
1
Katholieke Universiteit Leuven, BELGIUM and 2Hanoi University of Agriculture, VIETNAM..........................................................................................................................................................................................
QUANTUM DOT LABELED IMMUNOASSAY USING ZINC OXIDE NANOWIRES
J. Kim, S. Kwon, J.-K. Park, and I. Park
Korea Advanced Institute of Science and Technology (KAIST), SOUTH KOREA..........................................................................................................................................................................................
DIGITIZING IMMUNOASSAY ON AN ANTIBODY NANOARRAY TO IMPROVE ASSAYSENSITIVITY
G. Zhou1,2, S. Bergeron1,2, S. Ricoult1,2, and D. Juncker1,2
1
McGill University, CANADA and 2McGill Genome Innovation Centre, CANADA..........................................................................................................................................................................................
AUTONOMOUS CAPILLARY MICROFLUIDIC IMMUNOASSAY WITH INTEGRATED DETECTIONUSING MICROFABRICATED PHOTODIODES: TOWARDS A POINT-OF-CARE DEVICE
P. Novo1, F. Volpetti1, V. Chu1, and J.P. Conde1,21Instituto de Engenharia de Sistemas e Computadores (INESC), PORTUGAL and 2Technical University of Lisbon,
PORTUGAL..........................................................................................................................................................................................
ISOTHERMAL REAL-TIME POLYMERASE CHAIN REACTION DETECTION OF HERPES SIMPLEX
VIRUS TYPE 1 ON A LIGHT-ACTUATED DIGITAL MICROFLUIDICS PLATFORM
S.N. Pei1, Y.-L. Wang2, C.-T. Lin2, and M.C. Wu1
1
University of California, Berkeley, USA and 2National Taiwan University, TAIWAN..........................................................................................................................................................................................
REAL-TIME MEASUREMENTS OF PNA:DNA HYBRIDIZATION KINETICS WITH SILICON
NANOWIRE BIOSENSORS
A. De, J. van Nieuwkasteele, E.T. Carlen, and A. van den BergMESA+, University of Twente, THE NETHERLANDS..........................................................................................................................................................................................

Session Th3D - Energy Generation & Management
Session Chairs: E. Yeatman, Imperial College London, UK and P. Woias, University of Freiburg - IMTEK, GERMANY

14:15 – 14:45
Th3D.001

Invited Speaker
INTEGRATING MICRO AND NANO: A ROUTE FOR ALL-SILICON THERMOELECTRICITY?
L. Fonseca1, D. Dávila2, C. Calaza2, A. Tarancón3, A. Morata3, M. Salleras1, M. Fernández-Regúlez1,
and A. San Paulo4
1
Instituto de Microelectrónica de Barcelona (IMB), SPAIN, 2International Iberian Nanotechnology Laboratory(INL), PORTUGAL, 3Catalonia Institute for Energy Research (IREC), SPAIN, and4Instituto de Microelectrónica de Madrid, (IMM), SPAIN..........................................................................................................................................................................................

14:45 – 15:00
Th3D.002

15:00 – 15:15
Th3D.003

15:15 – 15:30
Th3D.004

15:30 – 15:45
Th3D.005

15:45 – 16:00
Th3D.006

THERMAL ENERGY HARVESTING BASED ON FERROMAGNETIC SHAPE MEMORY ALLOYMICROACTUATION
M. Gueltig1, B. Haefner1, M. Ohtsuka2, and M. Kohl1
1
Karlsruhe Institute of Technology (KIT), GERMANY and 2Tohoku University, JAPAN..........................................................................................................................................................................................
IMMERSION CONDENSATION ON SCALABLE OIL-INFUSED NANOSTRUCTURES FOR HIGHPERFORMANCE THERMAL MANAGEMENT
R. Xiao1, N. Miljkovic1, R. Enright2, and E.N. Wang1
1
Massachusetts Institute of Technology, USA and 2Bell Labs-Ireland, IRELAND..........................................................................................................................................................................................
GOLD NANOPARTICLE-BASED BIOFUEL CELL USING INSECT BODY FLUID CIRCULATION
K. Shoji1, Y. Akiyama1, M. Suzuki2, N. Nakamura2, H. Ohno2, and K. Morishima1
1
Osaka University, JAPAN and 2Tokyo University of Agriculture and Technology, JAPAN..........................................................................................................................................................................................
A PASSIVE VAPOR-FEED DIRECT METHANOL FUEL CELL BASED ON A COMPOSITEPERVAPORATION MEMBRANE
Z. Wu1, X. Wang1,2, X. Wu1, and L. Liu1
1
Tsinghua University, CHINA and 2Chinese Academy of Sciences, CHINA..........................................................................................................................................................................................
ALL-SOLID-STATE LITHIUM METAL BATTERIES FOR NEXT GENERATION ENERGY STORAGE
C.R. Stoldt and S.-H. Lee
University of Colorado, USA..........................................................................................................................................................................................

16:00 - 16:15

Awards Ceremony

16:15

Conference Adjourns