NGKCERAMIC VACUUM PUMP UNITNGK CHEMITECH, LTD.
Main Office735, Shimotomi, Tokorozawa-city, Saitama 359-0001

Tel. (81) 4-2942-1185

Fax. (81) 4-2942-8180

Nagoya Sales Office

2-56, Suda-cho, Mizuho-ku, Nagoya 467-8530

Tel. (81) 52-872-8595

Fax. (81) 52-872-8602

Tokyo Sales Office

Nishi-ikebukuro TS Bldg. 10F, 3-1-15, Nishi-ikebukuro, Toshima-ku, Tokyo 171-0021

Tel. (81) 3-5391-3631

Fax. (81) 3-5391-3635

Osaka Sales Office

Midosuji Mitsui Bldg. 11F, 4-1-3, Bingomachi, Chuo-ku, Osaka 541-0051

Tel. (81) 6-6206-5810

Fax. (81) 6-6206-5809

Tel. (81) 834-22-9851

Fax. (81) 834-22-9853

Tokuyama Branch Office Tokuyama Asahiseimei Bldg. 3F, 2-18, Miyukidori, Shunan-city, Yamaguchi 745-0034

A2106

SUPERIOR CORROSION RESISTANT
CERAMIC VACUUM PUMP UNITNGKCERAMIC VACUUM PUMP UNIT

We have created the world’s first vacuum pump unit in which all theparts that contact the gas are composed of ceramic or other highly
corrosion resistant material.
FEATURES

Superior corrosion resistant ceramic vacuum pump unit
The primary components are the liquid ring vacuum pump, gas ejector, and mechanical booster pump,
and all parts that contact the gas are composed of highly corrosion resistant materials such as ceramic,
glass lining, fluorocarbon resin, or carbon. The pump can be used with nearly all fluids except for hydrofluoric acid and alkalis, and resolves or reduces the following problems that occurred with the vacuum
pumps previously used with corrosive liquids.

CONTENTS
SUPERIOR CORROSION RESISTANT
CERAMIC VACUUM PUMP UNIT……………………… 2
LIQUID RING VACUUM PUMP [ BL-SERIES ]… ……… 7
MECHANICAL BOOSTER PUMP
[ BM-SERIES ]… ………………………………………… 11
GAS EJECTOR [ JL-SERIES ]… ……………………… 15
AUXILIARY EQUIPMENT… …………………………… 17

Oil sealed rotary pumps: ……………… Recurring expenses for frequent maintenance(Oil sump type)
Large expenses for regular oil changes
Large expenses for regular pump replacement
Expenses for additional pre-pump cleaning equipment………………
Oil sealed rotary pumps:
Large oil consumption(Oil dripping type)
Metal liquid ring pumps: ……………… Large expenses for maintenance and parts replacement
Large expenses for additional cleaning equipment andwastewater treatment
Steam ejectors: ………………………… Large expenses for additional condensate treatment equipment
and wastewater treatment

Superior evacuation characteristics
This pump is capable of pumping speeds up to 300 m3/h and an ultimate vacuum pressure of up to 0.04 kPa.
It can be used as the core vacuum pump unit for applications ranging from bench-scale test plants up to fullscale production plants.

Energy-saving and space-saving vacuum pump unit
The use of partially stabilized zirconia (PSZ) with particularly excellent strength and toughness in the rotatingparts allows thin walls and high rotating speeds that are on the same level as various metal vacuum pumps.
This delivers superior evacuation efficiency and creates a lightweight, compact configuration.
It has particular advantages compared to a steam ejector, and can operate with approximately 50% the kinetic
energy and approximately 30% the space.

Support for full instrumentation
We design and produce units that fully automate all processes including pump operation, temperature andpressure detection, and valve operation.

CautionThis product is among the restricted product types listed in Appended Table 1 of theExport Trade Control Order. Export requires export permission based on the Foreign
Exchange and Foreign Trade Act and other relevant laws.

1

2

APPLICATIONSSELECTION CHART
1000

Vacuum Distillation

Gas

Vacuum pump

50Hz

• Distillation of liquids that degenerate

500

and decompose easily

LiquidLiquid• Gas evacuation from reactor

Gas Evacuation
Gas ConveyanceGas

Pumping Speed (m3/h)[ 0.133 〜 1.33kPa ][ 0.133 〜 1.33kPa ]（11kW）
50（15kW）

BM-16+JL-1010+BL-13（2.2kW）

JL-1010+BL-13（7.5kW）

BL-13（7.5kW）（7.5kW）

10

5• F eeding gases into other apparatus

Gas

BL-13
（7.5kW）

100(gas blower)

00.1[ 13.3kPa 〜 0.2MPaG ]

0.5
0.02

0.05

1
0.1

5
0.2

Vacuum pump

0.5

10
1

50
2

5

100
10

500 760 Torr
20

50

101 kPa
0

Suction pressure

0.05

0.1

0.2 MPaG

Discharge pressure

1000

60Hz

Gas

• Feeding liquids (that degenerate when

Gas

Liquid Transfer

LiquidVacuum pumptransferred by a centrifugal pump) into reactors[ 13.3 〜 53.2kPa ]• Absorbing gases by the function liquid for
Gas Absorption

circulation in liquid ring pumps[ 2.66 〜 13.3kPa ]Pumping Speed (m3/h)

500

BL-13

100

（22kW）
50

BM-16+JL-1010+BL-13（2.2kW）

0
0.1

0.5
0.05

1
0.1

5
0.2

0.5

10
1

50
2

5

100
10

500 760 Torr
20

50

Use the ceramic vacuum pump at temperatures that do not
exceed the following.
Liquid ring pump

: 80℃ (suction side)

Gas ejector: 80℃ (suction side)

101 kPa
0

Suction pressure

Mechanical booster pump : 150℃ (discharge side)

3

BL-13

（11kW）（11kW）

5

Gas

Function Iiquid

JL-1010+BL-13（11kW）

10

0.02

Vacuum pump

（15kW）（11kW）

0.05

0.1

0.2 MPaG

Discharge pressure
BL : Liquid ring pump (compressor)
JL: Gas ejector

BM : Mechanical booster pump( ) indicates motor power.

4

CONFIGURATION AND FEATURES OF STANDARD UNIT

A2

Check valve**

Function
liquidcirculation

835

Gas outlet

BL-13
Weight: 1300kg

140

Gas intake

BL

Overflow

Function liquid

Liquid supply

537

Gas intake

Separator
Bellows tank
Liquidring pump

Separator

8〜101.3kPa

Liquidring pump

230

Cooling water Demisterfor shaft seal

Check valve

Cooling water
for shaft seal Demister

Dimensions and weight* (for unit with function liquid circulation)
A2

Gas outlet

Gas intake

Gas outlet
Gas intake

Degree of Vacuum

289

A1

With function liquid circulation

8〜101.3kPa

1322

Without function liquid circulation

Degree of Vacuum

DIMENSIONS AND WEIGHT OF STANDARD UNIT

Separator
tank
Heat exchanger

Drain
Heat exchanger• Function liquid is self-circulated by differential pressure of

B1

B2

applications.

1250

pump, minimizing liquid supply and waste liquid.
• Check valve is not necessary for compression applications.

B2

Gas outlet

Gas outlet

105 230

Gas intake

Separator
tank*

Function
liquidcirculation• Discharge gas can be used as a gas ejector motive

Heat exchanger

1250

Drain

gas. (Connect on --- line.)• Same as plan B1

F1

F2

4‒φ20

BM-16+JL-1010+BL-13
Weight: 1900kg

Gas outlet

Heat exchanger

230

731

429

835

Air

Gas
ejectorGas
ejectorGas intake

JL

Cooling water
for shaft seal

Cooling water
for shaft seal
Check valve
Liquid supply

Separator
Bellows tank
Liquidring pump*• Motive gas valve for gas ejector can be opened

or closed manually or by actuator.
• Discharge gas can be used as a gas ejector motive
gas. (Connect on --- line.)

Drain
Heat exchanger• Same as plan F1

Separator
tank

Heat exchanger

1750
1830

2250

4‒φ20
232

2350

422

* The dimensions and weight may vary depending on the details of the specifications.

[Standard material of auxiliary equipment]
Separator tank : ETFE lining, Glass-lining
Check valve: PTFE / PFA + FCD-S
Heat exchanger : Carbon
Bellows: PTFEBM

BL

Overflow*

Separator

Liquidring pump

Function
liquidcirculation

50.04〜1.33kPa

Demister

Demister2146

Gas outlet

Check valve344

Gas outlet

Air

0.04〜1.33kPa

140

Motive gas inlet for gas ejector

Mechanicalbooster

279

Nitrogen gas
purge

Mechanicalbooster

422

2350

F2

Gas intake

Function liquid

2250
232

1330

Heat exchanger

Gas intake

Nitrogen gas purge
Heat exchanger

BL

Overflow*

Gas outlet

Liquidring pumpLiquid supply

Separator

Function liquid

Liquidring pump

1.33〜13.3kPa

Separator
Bellows tank

JL-1010+BL-13
Weight: 1400kg

140

1611

Check valve

Cooling water Demisterfor shaft seal

Check valve

Cooling water
for shaft seal Demister

835

JL

1725

1.33〜13.3kPa

GasejectorGas
ejector

422

2350

Motive gas inlet for gas ejector

155

Air
Gas intake

232

637

Gas intake

Air

2250

4‒φ20

1330

1611

• One injection port (*) for function liquid is standard.
• Check valve is not necessary for compression

Piping: PTFE lining, Glass-lining
Valve: Ceramics + FCD-S
Demister : Glass-lining + FEP mesh (Option)

6

LIQUID RING VACUUM PUMP [ BL-SERIES ]As shown in the figure at lef t, thefunction liquid is injected into thecylindrical casing. When the impellerthat is installed eccentric to the casing
center rotates, the function liquidrotates in a circle that is concentric withthe casing, forming a liquid ring.

Principle of Operation

Impeller center
Casing center

Suction port

ImpellerLiquid ring Discharge port

CasingDue to the impeller position, spacesof varying sizes are formed between
the impeller blades. When a suction
port and discharge port are installed
as shown at left, continuous pump
operation occurs in the following cycle:
gas expansion → gas suction → gas
compression → gas discharge.

CONSTRUCTION AND MATERIALSSide cover:Ceramics + Cast-iron armor

Portplate: Ceramics + Cast-iron armor

Impeller: PSZ + Carbon steel boss

Casing: Ceramics + Cast-iron armor

FEATURES

Superior corrosion resistance
Using ceramics and PSZ in all gas-contacting parts ensures superior corrosion
resistance and is ideal for pumping of gases containing chlorine-based organic
substances and organic solvents.
The separator, heat exchanger, piping, and other auxiliary equipment are also madefrom corrosion resistant materials.

Excellent pumping performance
The Elmo-type single-acting structure and thin impeller blades that utilize the highstrength and toughness of PSZ produce high evacuation performance on the samelevel as a metal pump.
By connecting it with a gas ejector and mechanical booster, this pump can be used
as a high-performance vacuum generator.

Function liquid(Center injection)

Function liquid(Under side)

It can also be used as a compressor (blower) for gas feeding.

Easy gas absorption
Because the liquid ring pump continuously stirs and mixes the function liquid withgases, it can be used as a highly efficient gas absorption unit by properly selecting
the type of liquid. It also does not require a special gas scrubber.

Superior durability
Unlike oil-sealed rotary vacuum pumps, the liquid ring pump has no sliding parts,
leaving it free from trouble caused by parts wear.

Easy maintenanceFunction liquid injection flange

Built-in ball check valve

Vacuum specifications:Center injection (1 location)

High vacuum specifications of
50 kPa or higher increase thepumping speed and reduce
the shaft power.

Compression specifications:Center and under-side injection(2 locations)

Drain nozzle for preventing
the liquid from solidifying
when pump is stopped

Impeller O-ring: fluororubber, etc.

Because of the cantilever impeller, all parts can be individually replaced from theend of the pump, and the small number of parts allows for easy maintenance.
78

REQUIRED FUNCTION LIQUID FEEDBALL CHECK VALVE
Although the liquid ring vacuum pump has a constant discharge pressure Pd, it has a variable suction pressure and as a result, the impeller chamberinternal pressure Pb, which is related to the suction
pressure, also varies.

BL-13 (65mm diameter)
Single nozzle injection

Double nozzle injection

15±2 ℓ/min

30±4 ℓ/min

Double nozzle injection is also used for vacuum in cases
when there is substantial heating of the function liquid due
to gas absorption, and when the temperature of the function
liquid is likely to rise, such as during the summer.

Discharge ball check valve
Suction port

A ball check valve installed on the discharge port
makes it possible to prevent excessive gas compression in low vacuum ranges at pressures of 50
kPa and higher, to prevent liquid backflow in highvacuum ranges at pressures of lower than 50 kPa,
and to prevent noise and drops in pumping speed.

Impeller

Impellerchamber “Pb”

“Pd”

Liquid ring
Liquid ring

PSZ impeller

SHAFT SEALDIMENSIONS, WEIGHT, AND MOTOR

BL-series liquid ring vacuum pumps can be equipped with a single (standard) or double mechanical seal.
() Standard materialA

210

SuctionCirculation discharge port

C

Function liquid injection

225

Discharge
4ーφ20

148

583

B

Shaft seal cooling water discharge port

220

D

330

150

Circulation intake port

Cat. No.

Shaft seal cooling water intake port
Rotary ring
Stationary ringO-ring
Metal parts(Silicon carbide)(Carbon)(Fluororubber, etc.) (SUS 304, SUS 316)

Sleeve Stationary ring Rotary ringO-ring
Metal parts
Sleeve(Alumina) (Alumina)(Carbon) (Fluororubber, etc.) (SUS 304) (SUS 304)

BL-13

Flange*1

Dimensions (mm)Suction Discharge Function
liquid

65

65

15

50

1050
E *2

400

2

A

B

C

D

E*

60

95

104

120

1475

Motor (kW) ／ Max. rpm

Weight*3(kg）

Vacuum application

Compression application

180

7.5〜11kW/1750rpm

7.5〜15kW/1750rpm*1Single mechanical seal (stationary type)9

Double mechanical seal (rotary type)：	10K thin flange with stud bolts, conforming to JIS 10K equivalent. The flanges for suction, discharge, and function liquid require sufficient spacearound the piping and a short spacer pipe for disassembly and assembly.
：Dimension when the largest possible motor is used.
*2*3：The motor weight is not included.
Accessories：Separators, heat exchangers, demisters, check valves, etc., are provided as required. (For vacuum applications)

10MECHANICAL BOOSTER PUMP [ BM-SERIES ]Principle of Operation
SuctionDischarge

PSZ parts

The two-lobe rotors are fixed to two parallel shafts and arerotated in opposite directions simultaneously by a timing
gear. The gas taken in from the suction nozzle is enclosed
in the space between the stators and rotors and is continuously expelled from the discharge nozzle.
(Roots-type pump structure)

CONSTRUCTION AND MATERIALSFEATURES

Superior evacuation performance

Stator: Ceramics + Cast-iron armor
Rotor: PSZ + stainless steel shaft

It is possible to connect a liquid ring vacuum pump or other rear stage pump andconfigure an economical vacuum pump system that improves the pumping speedof the entire system, in particular for high vacuum ranges where the pumping speedof the rear stage pump declines. Improved part machining accuracy minimizes
leakage from the seal parts between the rotor and stator, and the use of an internalcooling water jacket reduces heating caused by adiabatic compression, resulting insuperior evacuation characteristics.

Utilizing the superior characteristics of PSZ
Using ceramics and PSZ in all gas-contacting parts ensures superior corrosion
resistance and is ideal for pumping of gases containing chlorine-based organic
substances and organic solvents.
Because PSZ is extremely strong, the pump can be made more lightweight andcompact, and can operate at high speeds.

Capable of dry evacuation
The special shaft seal structure and lack of sliding parts make it possible to perform
dry evacuation with no oil back diffusion into the vacuum system.

Ability to start from a low vacuum range
Hysteresis magnetic coupling is used between the motor and pump, and slipping of
the magnetic coupling reduces overload on the pump side. This makes it possible
to start from 4.0 kPa shortening the evacuation time and allowing a simple vacuum
pump system configuration without bypass pipes, cut-off valves, or pressure
switches.

Drive board: Ceramics

Complete seal structure
Non-contact seals with no sliding parts are used, simplifying maintenance of the
shaft seal and extending the pump lifetime.
11

12

DIMENSIONS, WEIGHT, AND MOTOR

Driven side Drive side

Unlike an ordinary magnet-magnet coupling, slipping
occurs when torque above a certain level is applied
to the driven side of this coupling, and it recouples
when the overload is eliminated. This is effective in thefollowing circumstances:

N
S
N
S

Permanent magnet(rare-earth type)

Hysteresis material(Fe−Cr−Co type)• Preventing damage when a foreign object is caught in
the rotor• Preventing motor overload when starting the pumpfrom a low vacuum range

SuctionC

B

E

The hysteresis magnetic coupling is configured asshown in the figure at left. The coupling transmits
torque by means of the hysteresis characteristics of thehysteresis material magnetic poles that are induced by
the magnetic force of the magnet.

D

HYSTERESIS MAGNETIC COUPLING

A

Cat. No.

Flange*1

BM-16

80

Discharge

Dimensions (mm)
A

B

C

D

E

Weight*2
(kg）

423

200.5

46

302

280

140

Motor
(kW)

Max. rpm

2.2

3500

：JIS vacuum flange equivalent with tapped holes*1*2：Includes motor weight.
Accessories：Filter regulator for purge gas and oil filter

SHAFT SEALThe non-contact gas seal offers maintenance-free operation. This fully floating construction is achieved bya static-pressure effect provided by purge gas supplied from the outside, and a dynamic-pressure effectgenerated by the spiral grooved rotating ring.

Rotor

Seal face Orifice

Purge gas injection
0.08〜0.1MPaG

Sealing parts① Rotary ring (SiC)④ Spring② Stationary ring (Carbon)⑤ Sleeve③ Retainer (Stainless steel)⑥ O-ring (Fluororubber, etc.)（    ）Standard material

13

14

GAS EJECTOR [ JL-SERIES ]CONSTRUCTION AND MATERIALS

Principle of Operation
NozzleDiffuser

Motive gas
To liquidring vacuum
pump

Intake gas

When the liquid ring vacuum pump starts, the gas ejector
pressure decreases, and the motive gas (usually air ordischarge gas from the liquid ring vacuum pump) passes
through the nozzle at supersonic speed and jets into the
diffuser.
The intake gas mixes with the motive gas that was sucked
into the diffuser. At the end of the diffuser, the energy isconverted from speed to pressure, and the gases are
suctioned into the liquid ring vacuum pump.

Diffuser: Ceramics + Cast-iron armor

Nozzle: Ceramics + Cast-iron armor
Suction chamber: Ceramics + Cast-iron armor

FEATURES

Improving the degree of generated vacuum
By connecting the gas ejector to the suction side of a liquid ring vacuum pump, it is possible to achieve
vacuum without exceeding the vapor pressure of the function liquid and without the use of steam,compressed air, or other special drive source.

Examples of ultimate vacuum
Suction side of the liquid ring vacuum pump using 20°C water as the function liquid
Suction side of the gas ejector when a gas ejector is connected under theconditions above

DIMENSIONS AND WEIGHT
SupportApprox. 8.0 kPa

D

Discharge

Approx. 0.93 – 1.6 kPa
Motive gas inlet
E

Preventing cavitation in the liquid ring vacuum pump
When a gas ejector is connected to the suction side of a liquid ring vacuum pump, the liquid ring vacuum
pump suction side will not reach high vacuum of higher than 8.0 – 12.0 kPa, regardless of the degree of
vacuum in the suctioned system.
Consequently, this can prevent cavitation which occurs as the vapor pressure of the function liquid
approaches the pump degree of vacuum, preventing cavitation damage to vacuum pump components andreducing operating noise.

Superior corrosion resistanceAlumina ceramic with superior corrosion resistance is used for the parts that contact the gas.
This not only provides excellent corrosion resistance, but also makes it possible to use the discharge
gas from the liquid ring vacuum pump as the motive gas, preventing the intrusion of other gases into thesuction gas.
15

C

SuctionB

A

The above drawing shows the JL-1010 type.
Flange*1

Dimensions (mm)Motive gas

SuctionDischarge

A

B

C

D

E

φd

Weight(kg）

JL-1008

25

50

40

285

155

120

230

130

15

32

JL-1010

25

50

50

425

155

120

230

130

15

36

Cat. No.

*1: JIS 10K flange thin type equivalent.
The motive gas flange and suction flange have tapped holes, and the discharge flange has drilled holes.

16

AUXILIARY EQUIPMENT

BALL CHECK VALVE
H

J‒φK

B

Vent holes: 4 locations
4-M5 tap holesA
J‒φK

Used to prevent backflow of the function liquid to the evacuatedvacuum system when the BL type liquid ring vacuum pump is stopped.

φC
φD
PCD E
φF
φG

Parts

For selection, please specify the following items in as much detail as possible.

Material❶

Valve chamber

FCD-S

❷

Liner

PFA

❸

Ball

PTFE

❹

Stud bolt, nut

SS400

1. Process outline with flowchart

Cat. No.

Size

A

B

φC

φD

PCD.E

JO-00304-SE

50A

178mm

16mm

50.8mm

95mm

120 mmCat. No.

φF

φG

H

J －φ K

Weight (kg)JO-00304-SE

155mm

188mm

3.1mm

4–19mm14

CONVERSION FLANGE
Used to connect the suction flange of a BM-series mechanicalbooster pump (JIS vacuum flange equivalent) to a JIS 10K
flange.
Parts

L

Flange A

Flange B
Mechanical booster pump suction side

SPECIFICATIONS FOR SELECTING

2. Pump performance2 - 1 Pressure
・Vacuum application
Degree of design vacuum and ultimate vacuum
・Compression application
Design discharge pressure and suction pressure
2 - 2 Pumping speed
・Required pumping speed for each gas type
・Evacuation time
Required time to reach ultimate vacuum
System volume[kPa][kPa, MPaG][m3/h, gas type and kg/h]
[min]
[m3]

2 - 3 Operation time・Continuous or intermittent

Material

❶

Liner

PTFE

❷

Metal flange

SS400

❸

Cushion

Joint sheet

3. Gas specifications

Cat. No.

L (mm)

Flange A*1

Flange B*2

BMTH-16

25

80 mm

80 mm

*1 JIS 10K flange thin type equivalent with tapped holes*2 JIS vacuum flange flat type VF series (no gasket groove) equivalent・Type, specific heat, boiling point, and corrosive, explosive, crystallizing andcondensation properties (For a mixed gas, indicate the specific heat,boiling point, and other properties of the mixture.)
・Inlet gas temperature
・Material used for gaskets and O-rings (PTFE, FKM, FFKM, Kalrez, etc.)

4. Attached equipment
・Necessary range of instrumentation

ADAPTER

5. Utilities

Mechanical booster pump discharge side

Use d to c onne c t the d is c harg e flang e of a B M - ser ies
mechanical booster pump (JIS vacuum flange equivalent) to a
JIS 10K flange.

Flange A

Parts

Material

Adapter

Ceramics + SS400❷

O-ringFKM

L❶・Frequency and voltage of power supply
・Cooling medium for heat exchanger(brine, industrial water, or other, and its temperature)・Function liquid
Water or specified chemicals (for specified chemicals, their specific gravity,
viscosity, specific heat, heat conductivity, and vapor pressure)Open or closed circulation

Flange B

17

Cat. No.

L (mm)

Flange A*1

Flange B*2

BMT-16-A

150

80 mm

65mm

*1 JIS vacuum flange flat type VG series (with gasket groove) equivalent*2 JIS 10K flange thin type equivalent with drilled holes18