Gateway tohigh-end metrology

Simplified high2h performance
High-speed versatility

Practical operability

Collect and analyze data with exceptional speed–that is the goal of the S lynx 2. It ensures maximal
data capture by featuring three distinct measuring
techniques – Interferometry, Confocal, and Ai
Focus Variation – each faster than the last. Thrivein your data analysis using the full power of yourPC as acquisition calculations are performed in thesensor head.

Explore the comfort of an effortless system.
This bench-top system combines manual andmotorized components, making recurring tasks
like finding the focus, leveling, and navigating
your sample easier than ever. Sensofar’s systems
also come with best-in-class longevity, facilitating
your work for the years to come.

Compact convenience

It’s a Sensofar!

The small size and compact design of the systemallow it to fit into the tightest spaces of your lab or
production floor. Moreover, setting up the S lynx 2
is incredibly easy, thanks to its plug-and-playconfiguration and flexibility to run with any PC.

The S lynx 2 is part of the Sensofar ecosystem,
inheriting our wealth of technical expertisedeveloped for optical area profilers. Additionally,
we have built a powerful suite of analysis softwareand a user portal full of resources.

3

Streamlined fle
Use the bestacquisition
technology
The S lynx 2 is equipped with threevery powerful measuring techniques:
Ai Focus Variation, Confocal, andInterferometry. This dynamic trio
allows for data collection acrossa wide range of materials using
the optimal technology for every
surface, guaranteeing unparalleledmeasurement accuracy.

Ai Focus Variation

ConfocalAi Focus Variation

Confocal

2s3sInterferometry

Shapes or
micrometric roughness
Hybrid surfaces orminiaturized shapes
Nanometric roughness
and features
Thicknessmeasurements

4Interferometry

5s

exibility
Fast scan,fast analysis
Throughput is important. That
is why this system is designed
for lightning-fast measurements
across every measuring
technology. Plus, the acquisition
calculations are executed within
the sensor head, allowing thePC’s full power to be utilized forthe data analysis.

Large extended
measurements
The advanced stitchingcapabilities allow you to capture
high-resolution data over larger
areas. Our innovative algorithms
cover the entire motorized stage
range, spanning an impressive
125 x 75 mm for the system’s
compact size.

Our
Discover how easily
our bench-top systembalances cutting-edge
and timeless components,
integrating manual andmotorized elements forpractical excellence.

Easy focusing acrossvariable sizes
Easily fit and focus on samples with an adjustable
column accommodating up to 100 mm ofmovement. Achieve precision and fine-tuned
focus for even the smallest samples with the20 mm travel range of the motorized Z stage.

Extended lifetime
As a result of using LEDs as lightsources and requiring no moving
mechanisms for imaging, theS lynx 2 operates smoothly
without consistent maintenanceefforts, extensive calibration, orregular replacements.

6mosst practical
approach
Simplified sample
positioning
Effortlessly place and navigate
your samples with the motorized
XY stage, with a travel range of125 mm x 75 mm, and easily level
them using a tip-tilt stage perfectlyaligned to the optical axis.

Expanded imaging
capabilities
Experience what is possible byswitching between objective
lenses at any time duringoperation using a 6-position
motorized nosepiece.
Select from a wide range ofcompatible lenses, including
specific options with super long
working distances and water
immersion capabilities.

7

Compact
dimensions
Its small size and compact
design let you place the system
anywhere on your production
floor or laboratory.

Adaptable
to your needs
Experience hassle-free setup with theS lynx 2. Easily find a place for it, as
no extra components are under thetable. Get it up and running by simply
connecting two cables between theprofiler and the PC.

8540(21.3)

unitsmm(inch)

450(17.7)

Tailor youracquisition experience
SensoSCAN ML, the software
running the S lynx 2, gives thepossibility to customize theacquisition interface. Simply
display the critical settings foryour samples.

330(13.0)

Administrator
Advanced
operator
Operator

PC flexibility

Ready for any operator level

Operate the S lynx 2 seamlessly with the computer
system of your choice. Whether you opt for ourrecommended PC configuration or leverage yourown, the flexibility is yours to tailor the setup thatprecisely matches your requirements.

Discover the versatility of SensoSCAN ML with three
distinct operator levels. Unlock advanced capabilities
such as calibration and recipe modification at
the highest level while restricting lower levels topredefined recipes and acquisitions.

9It’s a Sensofar
Owning a Sensofar system is not just having a high-end
optical profilometer; it is your ticket to unlocking a worldof tools and content, empowering you to fully engage
with the process of surface characterization.

Sensofar ecosystem
Metrology excellence
Our commitment to metrology pushes us topursue the closest representation of a realsurface. That is why every Sensofar productmeasures areas and follows ISO 25178 standard,
providing a truly reliable instrument for surface
characterization.

10As part of our Sensofar community, you haveaccess to all our software analysis options, helping
you find the perfect solution. Additionally,
we offer an interconnected software suite forcomprehensive characterization.

Intuitive user experience

Helper acquisition mode

Sensofar’s software is designed with a very
intuitive interface, reducing training time. Theinterface of every Sensofar software package isconsistent. Once you learn how to navigate one
Sensofar program, you can effortlessly navigate
them all.

Our systems have a special feature called 3D autothat measures any in-focus sample by iteratively
searching for suitable measurement settings. It
provides users with the sample’s topography withthe maximum measured points. Plus, users cansee and learn the measuring settings previously
identified.

Discover an extensive collection of exclusive content
on our online portal designed to help you use andlearn about your system. MySensofar offers a rangeof resources, including manuals and white paperstailored to specific applications. Benefit from our20+ years of metrology expertise in the optical field,
all conveniently accessible in one place!

SensoVIEWBroadening
analysis horizons
SensoVIEW is the ideal analysis
software for a wide range of tasks.
It features a complete toolkit for
preparing and extracting data fromboth 2D and 3D datasets.

Surface characterization
SensoVIEW provides dedicated operators with auser-friendly, step-by-step interface for extracting
flatness and surface texture parameters, following
the corresponding ISO standards, volume
calculations, and more.

Dimensional measurements
A variety of tools for critical dimensions areavailable for contour and profile views. Each one
is equipped with an auto-adjustment feature andthe capability to incorporate tolerances, ensuring
a thorough dimensional analysis.

12SensoPRO

Rapid Quality
Control
Customizable
reports
Discover SensoVIEW’s flexible
reporting to present yourresults in clean, well-structured
documents.

Tailor headers andfooters to your taste

Select the content you
want in your report

Automatic recognitionof the features ofinterest

Analysis of a massive
datasets (>100 files)1s processing
time per file

Configurable
processing settingsand parameters

Command line available
for external SensoPRO
integration

Pass/Fail reports
based on predefinedtolerances

Plugin-based solutions
Choose the style todisplay your results

Edit your template topersonalize it furtherAnalysis
templates
Templates can be created fromany performed analysis, storing
all the processes applied: datamodifiers, surface texture
operators, critical dimensions,and reporting preferences.

SensoPRO has an extensive suite of plugins, addressing
common automation analysis needs and custom applications.

Holes

Dimples

Bumps

Surfacecharacterization

Trenches& Grooves

TracesDo you need acustom solution?
We can adapt and develop any analysis
solution for your application.

13

Applications
The S lynx 2 is a general-purpose systemthat fulfills multiple applications in diverse
settings, including manufacturing and researchrequirements. Discover some real-world
examples:Surface texture characterization

AEROSPACE
Cylinder liner

CONSUMER ELECTRONICS
Copper substrate

ADVANCED MANUFACTURING
Grinding tool

MEDICAL DEVICES
Knee implant

System specifications
Measuring principle Confocal, CSI and Ai Focus Variation

Sample weight Up to 3 kg

Measurement types Image, 3D, 3D thickness

Sample height2 Up to 100 mm

Camera 1 Mpx: 1024x1024 px (150 fps)
Confocal frame rate 60 fps
Range of magnifications 2.5X - 100X
Field of view From 0.14 to 5.6 mm (single shot)
Z stage travel range 20 mm; 5 nm resolution
Max. Z measuring range Confocal & Ai Focus Variation 12 mm; CSI 1 mm
XY stage range Motorized 125x75 mm
Max. Extended measurement area1 125x75mm
Tip-tilt stage Manual up to ±4° of tilting
LED light sources Blue (460 nm); white (580 nm; center)
Nosepiece 6 position fully motorizedSample reflectivity 0.05 % to 100%

14User management rights Administrator, supervisor, advanced operator, operator
Advanced Software Analysis Inc: SensoVIEW; Op: SensoPRO, SensoMAP
Computer requirements

Intel Core i5/i7 processor, Ethernet connectivity,
minimum 1920 x 1080 display resolution

Operating system Microsoft Windows 10 or higher
Dimensions 330x450x540 mm
Weight 3 34 kg
PowerEnvironment

Line Voltage 100-240 V AC; frequency 50/60 Hz single
phase
Temperature 10 ºC to 35 ºC; Humidity <80 % RH;
Altitude <2000 mDimensional measurements

TOOLING
InsertADVANCED MANUFACTURING
Molding

OPTICS
Microlenses

CONSUMER ELECTRONICS
MEMs

AUTOMOTIVE
Battery film

Objective lenses

Brightfield

Interferometric

Magnification

5X

10X

20X

50X

100X

2.5X

5X

10X

20X

50X

NA

0.15

0.30

0.45

0.80

0.90

0.075

0.13

0.30

0.40

0.55

WD (mm)

20

15.8

3.0

1.0

2.0

10.3

9.3

7.4

4.7

3.4

1410 x 1410

700 x 700

280 x 280

141 x 141

5650 x 5650

2820 x 2820

1410 x 1410

700 x 700

280 x 280

Spatial sampling5 (µm)

FOV (µm) 2820 x 2820
2.76

1.38

0.690.27

0.13

5.52

2.76

1.38

0.69

0.27

Optical resolution6 (µm)

1.110.55

0.37

0.21

0.15

2.32

1.34

0.58

0.44

0.32

Measurement noise (nm)120451043Maximum slope (º)

917275364

2433478

Accuracy and repeatability9Standard
Step height (H)Area roughness (Sa)

Value

Uncertainty (U)Repeatability (σ)

Technology<10 µmU= (0.005 + H/50) µm<10 nm

Confocal, Ai FV and CSI>10 µmU = (0.120 + H/120) µm>10 nm

Confocal, Ai FV and CSI

0.79 µm

40 nm

6 nm

Confocal, Ai FV and CSI<547171 With the 2.5XTI objective. 2 Size for top positions of the regulable column and motorized
Z stage. 3 Without objectives, or antivibration table. 4 Maximum field of view with 2/3” cameraand 0.25X optics. 5 Pixel size on the surface. 6 L&S: Line and Space, half of the diffraction limit
according to the Rayleigh criterion. Values for blue LED in brightfield objectives and for white LED
in interferometric objectives. 7 Measurement noise is measured as the difference between two
consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values
obtained in a VC-E vibration environment. 8 On smooth surfaces. Up to 86° on rough surfaces.
Other objectives are available. 9 Values obtained in a VC-E vibration environment. Objective usedfor Confocal and Ai Focus Variation 50X 0.80 NA and for CSI 50X 0.55NA. Resolution 1024×1024
pixels. Extended uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (levelof confidence 95%). σ according to 25 measures.

15SENSOFAR is a leading-edge technology
company that has the highest quality standards
within the field of surface metrology
Sensofar provides high-accuracy optical profilers based on confocal,interferometry, and focus variation techniques, from standard setups
for R&D and quality inspection laboratories to complete non-contact
metrology solutions for in-line production processes. The Sensofar
Group has its headquarters in Barcelona, a European technology
and innovation hub. The Group is represented in over 30 countries
through a global network of partners and has its own offices in Asia,
Germany, and the United States.

HEADQUARTERS
SENSOFAR | BARCELONA - Spain | T. +34 93 700 14 92 | info@sensofar.com
SALES OFFICESSENSOFAR ASIA | SHANGHAI - China | T. +86 21 61400058 | info.asia@sensofar.com

sensofar.com

SENSOFAR is a trademark of SENSOFAR-TECH, SL. All other brand, product and logo are marks of their respective owners.
Copyright © 2024 SENSOFAR. All rights reserved. The information in this publication is based on SENSOFAR’s internal research and knowledge at the time of printing and is subject to change without notice. Appearance of products may vary.

BR46-05A-EN| TAIPEI - China | T. +886 988106002 | info.asia@sensofar.com
SENSOFAR DACH | LANGEN - Germany | T. +49 151 14304168 | info.germany@sensofar.com
SENSOFAR USA | CONNECTICUT - United States | T. +1 617 678 4185 | info.usa@sensofar.com