EGG-3101 / EGPS-3101
ELECTRON GUN / POWER SUPPLY

100 eV to 10 keV
Small Spot Collimated Beam, Alignment during Operation
Higher Current Option up to 1 mA
FOR USE IN:
General vacuum physics experiments
Space physics studies
Specimen heating
Electron diffraction
Phosphor studies
MBE Rheed studies

FEATURES / OPTIONS:New modular design
Internal alignment while operating
Collimated beam
Small spot option down to 60 μm
Higher current option up to 1 mA
Electrostatic focusing & deflectionBlanking, pulsing, rasteringRotatable 2¾ inch CFF mounting
UHV compatible / bakeable
Computer / Remote control
Flange multiplexer flexibility
User-replaceable firing units

EGG-3101 Electron Gun with optional Faraday Cup, mounted on 2¾ inch Flange
Multiplexer

The Kimball Physics EGG-3101 Electron Gun, with its matching
EGPS-3101 Power Supply, is a multi-purpose modular Electron Gun
with applications many areas. The EGG-3101 / EGPS-3101 is acomplete subsystem ready to attach to a user's vacuum system andturn on. With a small spot option using a lanthanum hexaboride
cathode, the gun can deliver spots down to 60 μm. With a high current
option, beam currents up to 1 mA can be obtained.
The gun has the capability of producing a collimated small spot or aflood electron beam. Beam current, beam energy, and spot size are
all independently adjustable over wide ranges. The energy can bevaried from 100 eV to 10 keV. The beam current and spot size range
depend on the system option as shown in the specifications table.
Pulsing, beam blanking and rastering are also available as options.
The gun features an adjustable cathode feedthrough assembly thatallows the mechanical alignment of the firing unit with respect to theanode and the column, in real time while the gun is operating at fullvoltage with beam on.
The modular design of the EGG-3101 allows either the firing unit
assembly or the lens assembly to be replaced by the user. The firingunit (including the cathode, cathode-mount, and Wehnelt aperture) isuser-replaceable without removing the gun from the vacuum chamber.
The anode is also easily replaceable. In addition, the cathode to anodespacing is internally adjustable to change perveance.

2 3/4 CF FLANGE(ROTATABLE)
VIEWPORTEGG-3101 ELECTRON GUN, WITHOUT BLANKER (Dimensions in mm)
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr up to 10-5 torr for the standard Ta disc cathode. The
electron gun is bakable to 350°C with cables removed.
Many cathode types and sizes are available: tantalum disc cathodes(Ta), single-crystal lanthanum hexaboride (LaB6, small spot, highbrightness, min. vacuum 1x10-7 torr), barium oxide discs (BaO, lowlight, low energy spread, min. vacuum 1x10-7 torr) and yttria-coatediridium discs (Y2O3 - Ir, rugged, vacuum up to 10-4 torr). With the
exception of BaO, the cathodes are not damaged by repeatedexposure to atmospheric gases or water vapor when cold.
Firing units are user-replaceable; spare firing units can be purchased
new, and used firing units may be returned to the factory for rebuild.
Alternatively, the entire electron gun can be sent back to the factory forcomplete cleaning, rebuild, cathode replacement, and optional
in-vacuum testing.
The EGPS-3101 Power Supply features a modular design withminiaturized power supply clusters, optically isolated signals, and thenew FlexPanel digital interface controller. The included power supplies
are Beam Energy, Focus, X,Y Deflection and optional Beam Blanker,
as well as the floating Source/ECC and Grid supplies. For the highcurrent option, a separate High Voltage Power Supply controlled by theEGPS-3101 is included as part of the system.
The FlexPanel provides a digital display screen, keypad and up/down arrows for programming control on the front panel. Rear
panel connectors allow remote /computer control and metering of all
gun power supplies. An RS-232 serial port and an analog input/output
connector are included on standard power supply units. All common
computer interface bus types can be accommodated, by use of
appropriate digital to analog converters. RS-422/485 conversion ispossible.
An optional LabVIEWTM computer program designed for theEGG-3101 is available for remote computer control and metering.
Software is available in two types: Using National Instrument DAQ
boards and SCSI connectors on the EGPS-3101, or via a simple serial
connector interface. The program provides a virtual panel of controls
and real-time metering on the user’s computer screen.
18

EGG-3101 ELECTRON GUN SPECIFICATIONSBEAM ENERGYBEAM CURRENTENERGY SPREAD

BEAM DIVERGENCE

EGPS-3101 ELECTRON GUN POWER SUPPLY SPECIFICATIONS

100 eV to 10 keV (Independently adjustable)
Standard: 1 nA to 100 μA (Independently adjustable)
Small Spot option: 1 nA to 10 μA
High Current option: 1 μA to 1 mAApprox. cathode thermal spread, calculatedTa - 0.5eV
Y2O3 - 0.4eV
BaO - 0.3eV
LaB6 - 0.4eV

Collimated beam, optimized for parallel, 1mm diameter,
1 nA to 100 μA beamStandard: 500 μm to 25 mm
SPOT SIZE
Small Spot option: 60 μm to 10 mm
High Current option: 1.5 mm to 25 mm
WORKING DISTANCE Typical: 200 mm. Range: 10 mm to 1000 mm
BEAM DEFLECTION
4 Pole Electrostatic: ± 6.0° at 10 keV; scales larger atlower energies
PULSE CAPABILITY
Optional Dual Grid Power Supply: Pulse width 2 μs to(using appropriate
DC, rise/ fall 500 ns, rep rates to 5 kHz (TTL required)pulse generator,not included)
Optional: Pulse width 2 μs to DC, rep rates to 5 kHz
BEAM BLANKING(TTL required)
Optional Capacitive Pulse Box: Pulse width 20 ns to
100 μs with appropriate pulse generator (not provided)
BEAM UNIFORMITY
Gaussian
Customer-replaceable Firing Unit Cartridge includes
FIRING UNIT
precision-aligned cathode and Wehnelt (G-1) assembly,
with insulators and connectors
CATHODE TYPES
Standard: Tantalum disc
Optional: Barium oxide (BaO), Lanthanum hexaboride(LaB6), Yttrium oxide (Y2O3). With the exception ofbarium oxide, cathodes not harmed by repeatedexposure to atmospheric gases while cold
INTERNAL GUN
Adjustable Feedthrough for mechanical alignment ofALIGNMENT
firing unit while gun is operating
FARADAY CUP
Mounted on gun or stand-alone designs available
MOUNTING
Flange Multiplexer with a 2¾ inch CFF, including both
tapped and clear mounting holes
INSERTION LENGTH Standard: 109 mm, 163 mm with optional beam blanker
GUN DIAMETER
Standard: 35mm gun tube in vacuum
FEEDTHROUGHS
Multi-pin brazed ceramic, threaded stainless steel shell
CABLES /Multi-conductor 10 kV high voltage fully ground-shielded
CONNECTORS
cable, coaxial focus cable, and low voltage deflection
cable, with mating aluminum connectors, to connect gunand power supply. Standard lengths: 3 m, Optional: 5 m
350°C with cables removed
MAXIMUM BAKEOUT(Faraday cup: removable pneumatic actuator 65°C max)

OUTPUT

All necessary voltages to drive the EGG-3101 Electron
GunENERGY STABILITY±0.01% per hour; ±0.02% per 8 hours at full output
BEAM STABILITY±0.1% per hour with Emission Current Control or±10% per hour after warm up without ECC
FlexPanel controls: Energy, Source, Grid, Focus,
CONTROLS
X and Y Deflection, Emission Current Control,
optional Beam Blanker
METERING
FlexPanel digital meters: Energy, Source Voltage,
Source Current, Emission Current, Grid, Focus,
X and Y Deflection, optional Blanker Voltage
COMPUTER/REMOTE Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
CONTROL & METER Metering: 0 to +2 V ( -2 V to +2 V, deflection)
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-422 or RS-485 available, if
specified at time of order)
Optional: SCSI metering and programming connectors
Standard configuration designed for RS-232
SOFTWARE
connections.
Optional: National Instruments LabVIEWTM file, designedto run with computer DAQ boards NI PCI-6733 andPCIe-6341. SCSI interface
115 VAC or 230 VAC, 50 to 60 Hz single phase, 250 VA.
(Note: voltage changing is not possible with HC option)
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing,Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
DIMENSIONS
17 in. x 7 in. x 22 in. excluding handles(width x height x depth) (425 mm x 180 mm x 560 mm); 19 in. rack mountable
H.V. SUPPLY only for
Optional H.V. Supply: 17 in. x 1.75 in. x 20 inHigh Current option(425 mm x 44 mm x 508 mm) 19 in. rack mountable
INPUT
ENVIRONMENTOPTIONAL HARDWARE RASTER SPECIFICATIONSRASTER GENERATOR Continuous control of X & Y Raster Amplitude, variableoffset (Centering) and Frequency, with 0-10 kHz (X) and
0-100 Hz (Y) standard. All parameters controllable via
RS-232, RS-422, RS-485, analog input, or computer
control with LabVIEWTM software option.

Typical performance;data for guidance only.

It is not necessarily possible to achieve all maximum specifications
Copyright© 2015 by Kimball Physics, Inc. 05/20/15 simultaneously. Specifications Subject to Change Without Notice.