DF SERIES

DF-760E NanoTrace
UNIQUE DUAL MEASUREMENT TRACE/ULTRA-TRACE MOISTURE/OXYGEN ANALYZER FORQUALITY CONTROL OF UHP BULK GASESFlexible
 nique industry solution for ppt
Umonitoring of moisture and O2

 road Detection Range:B
0-20ppm – 0-2ppb min (H20) /0-20ppm – 0-1ppb min. (O2) perable via front panel or digital
Ocommunication options

EASY TO USE
DF-760E NanoTrace
A unique analyzer solution for thesimultaneous monitoring of tracemoisture and trace oxygen, the DF-760E
is a compact integrated solution formonitoring UHP bulk gases used in themanufacture of integrated circuit boards.
Combining the industry-leading propertiesof Servomex’s non-depleting Coulometric
E-Sensor and robust Tunable Diode Laser
technology within a single compact unit,
the DF-760E measures ultra-low levels
contaminant levels of H2 and O2 withinbackground gas blends of N2, H2, He, O2
and Ar (H2O in O2 only).
In offering an exceptionally low,industry-leading Lower Detection Limitof 100ppt (H2O)/45ppt (O2), theDF-760E offers the fast speed of response,
unsurpassed stability and immunity fromtrace acid damage which makes it idealfor quality checking and leak detection
in semiconductor FAB applications.
This exceptional measurement
performance is supported by alow-maintenance design, delivered
through the resilient zero-drift
sensing technologies which require
no ongoing calibration.	
Dual analysis capability provides‘one-box’ solution to H2O/O2 tracecontaminant measurements

 single analyzer can be usedA
for multiple background gases:
N2, H2, He, Ar and O2

Low cost of ownership
Resilient TDL and non-depleting
Coulometric sensing requiresminimal ongoing maintenanceZerosensor drift greatly extends
calibration intervals	
Coulometric E-Sensor immune
from acid damage

Unrivalled performanceS table, accurate sensing
delivers industry-leading trace
measurements

 anufactured by Servomex M
over 60 years’ experience
pioneering gas analysis thousandsof units used in the field

100ppt LDL (H2O) / 45ppt
LDL (O2)

Benchmark compliance 	IEC 61010-1
 vervoltage Category II,O
Pollution Degree 2

Learn more about the DF-760E NanoTrace
VISIT SERVOMEX.COM

 	EU EMC Directive
EU Low Voltage DirectivePRODUCT OVERVIEW: DF-760E NanoTrace

High stability TDL trace
ultra-trace measurements

ALTERNATIVE PRODUCTS

When you work in the manufacture of integrated circuit boards, thequality control of electronics grade UHP gas is crucial. To measure O2
and moisture as a trace contaminant, you’ll want a highly sensitive
measurement that measures down to the lowest levels. Measurement
reliability with a fast speed of response and uncompromised stability
are a must. And no matter your measurement requirements, you’ll wanta solution that delivers operational efficiencies. We don’t believe you
should have to compromise.

The DF product range is designed tomeet specific application needs forsemiconductor manufacturers

DF-560E
NanoTrace II
If you need an even more sensitive
measurement for O2, choose the DF-560E.
Offering the lowest LDL in the industry – 45ppt– this device combines performance, reliability
and low lifetime maintenance requirements.

A no compromise solution
The DF-760E is the only combination analysis solution for ultra-tracelevels of moisture and oxygen, delivered through Servomex’s leadingedge TDL and Coulometric E-Sensor technology. A low LDL – 100ppt(H2O)/45ppt (O2) - delivers the sensitivity demanded, and theability to measure multiple gas streams for N2, H2, He, Ar and O2
background gases with a single device provides considerable
adaptability to suit your gas quality checking needs.

DF-749
NanoTrace

Simple maintenance and reduced
ongoing costs
By offering a dual analysis capability in a single, compact one-box
solution, the DF-760E reduces the footprint, infrastructure andmaintenance costs associated with using separate analyzers for O2
and H2O respectively. By offering a consistently reliable, fast speed ofresponse with zero drift, the DF-760E helps extend maintenance andcalibration intervals, while factory pre-calibration simplifies set up andinstallation. This ensures the DF-760E delivers an integrated, value-added
solution for the semiconductor industry.

Ideal for quality checking of UHP gases usedin LCD and LED manufacture, DF-749 provides
trace and ultra-trace moisture contaminantmeasurements in various background gases
including nitrogen, hydrogen, helium, argon
and oxygen.

DF-750
NanoTrace
When you need to measure moisture as acontaminant in UHP quality gases, the DF-750’s
trace and ultra-trace measurements are ideal
in quality and leak detection applications.
Optimized for bulk gas control in 300m
semiconductor fabs.

KEY APPLICATIONS
 ulk gas quality control checks forB
integrated circuit board fabs

TECHNOLOGIESLeak detection checks

PRODUCT DATA: DF-760E NanoTrace

OPTIONSDESCRIPTIONSPECIFICATION

Output5 output options available for both O2 and moisture

Isolated 4-20mA DC and a choice of 0-1,0-2,0-5
and 0-10V DC (analog output freeze control
during calibration)

Output range

Output parameters

Scalable to any range between 0-2ppb to 0-20ppm

AlarmsVarious alarms available

4 moisture levels/4 O2 levels, temperature, electrolyte
condition, moisture sensor diagnostics loss of flow, zeroverification or calibration in process, analyzer offline andanalog output freeze during calibration

Serial communications

2 options for two-way serial communications

Factory configured RS232 or RS485

Vacuum pump

Aspirator source for high capacity sample draw

Pump with 1/4" compression inlet and outlet fittings

Dual scale range

2 range options

User-selectable secondary analog output ranges forrescaling the output once the primary range is exceeded

Hydrogen purge

Enhances safety during gas purge procedures

Includes sample delivery interlock and case purge valves
for instrument housing and NEMA 4 rated enclosure,
Z purge protection system for optional external vacuum
pump. Please note: limits available relays from 4 to 3Mounting

1 option

19” rack mount NEMA 1 enclosure

ACCESSORIESACCESSORIES AVAILABLE FOR SPECIFIC APPLICATIONS– CONTACT YOUR LOCAL SERVOMEX BUSINESS CENTER

MONITORING PERFORMANCEGas

H2O (purity)

O2Technology

Tunable Laser Diode (TDL)

CoulometricRange

0-20ppm – 0-2ppb min.

0-20ppm – 0-1ppb min.

±3% of reading / ±0.2ppb (whichever is greater)±3% of reading / ±0.1ppb (whichever is greater)

Negligible

Negligible<3 minutes at 1liter/min<15 seconds

Accuracy (intrinsic error) FS
Zero drift/month
T90

SAMPLE FOR MEASUREMENTS
Sample for measurement

Sample must be oil free, non-corrosive and non-condensing (must be free of acidic components – contact Servomex
for sample preconditioning options)

Sample pressure

30 – 150psig (3.08 – 11.3 BarA)

Dew Point

5°C/9°F below minimum ambientParticulates

Filtered to 2µm

PRODUCT DATA:
DF-760E NanoTrace

DEVICE SPECIFICATION

DEVICE SCHEMATIC

Size: 	
	483mm (19”) Wide x 266mm(10.5”) High x 608mm (23.9”) Deep
Weight:	31.8kg (70lbs)
Operating Temperature:	10°C - 80°C/50°F - 176°F

Compliance:	IEC 61010-1
 vervoltage Category II,OPollution Degree 2	EU EMC Directive

PBDF760 Rev.1 Date: 06/15

EU Low Voltage DirectiveThese analyzers are not intended for any formof use on humans and are not medical devices
as described in the Medical Devices Directive
93/42EEC.

Please note: This document was updated in August 2014. While every effort has been made toensure accuracy, no responsibility can be accepted for errors or omissions. Data may change, as wellas legislation, and you are strongly advised to obtain copies of the most recently issued regulations,standards and guidelines. This document is not intended to form the basis of a contract.

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Servomex has a policy of constant product improvement and reserves the right to change specifications without notice.
© Servomex Group Limited. 2014. A Spectris company. All rights reserved.