Product Specifications

Thermo Scientific
APIX δQ and APIX Quattro

The unrivaled performance of theThermo Scientific APIX line of gas
analyzers ensures fast, accurate
and low detection ppt level impurity
monitoring. As the first choice forcontinuous quality control of bulk
gases, the analyzers combine
atmospheric pressure ionization
mass spectrometry (API-MS) withadvanced electronics and software
to create an innovative, powerfuland cost-effective system.

Ultra-High Purity Electronic Gas Analyzers

Dual-Analyzer,
Single-Bay Cabinet

Gas Analysis Applications• UHP Nitrogen• UHP Argon• UHP Helium• UHP Hydrogen

The superior performance of atmosphericpressure ionization mass spectrometers(API-MS) combined with state-of-the-art
electronics and the most powerful process
analysis software available makes theThermo Scientific APIX line the analyzer
system of choice for continuous quality
control of bulk gases in the semiconductor
and electronics industries.
An API-MS offers a cost-effective
alternative to conventional quality control
techniques, allowing each bulk gas to bemonitored for a range of potential
contaminants, while achieving lower
detection limits (up to 100 times better)
than any other technology.
The APIX line provides a more complete
analysis of impurities, including H2, CO, CO2,H2O, O2, CH4, Kr and Xe with other impurities
available. With the advent of 300 mm wafer
manufacturing placing even tighter impurity

controls on gas quality standards, thistechnology will continue to be the preferred
method for ppt level detection.
Features and Benefits• Fast online measurement (typically <5 s)enables immediate response to gas
supply upset conditions• Fully integrated multi-analyzer analysis
provides rapid contamination detection• Superior sensitivity with lower detection
capability of <10 ppt provides gas
analysis suitable for the most stringent
quality requirements today and in the future• Backup capability allows each API-MS
to support multi-stream analysis during
individual API maintenance• Industry standard communications
protocols for plant control and integration(OPC, DDE, Modbus, Siemens 3964R,PROFIBUS, etc.)

Thermo Scientific Technology

Vacuum Gauge
Sample In
Power Distribution

AMP

The slide mount mass spectrometercan be pulled all the way outof the environmental enclosurefor easy maintenance.
ProcessorLens Stack TurboPrinciples of Operation
The APIX δQ and APIX Quattro employ positive ion API-MS, atechnique that is widely used by the electronics industry for
determining trace contaminants in ultra-high purity gases. Thesample gas flows into the ion source at slightly higher thanatmospheric pressure. A corona discharge is produced by a needle
maintained at a high voltage which is located close to an orificeplate that forms the entrance to the lens stack. This results in a
stream of electrons which flow from the orifice plate to the needle.
The electrons react with the bulk gas which causes ionization of alarge number of bulk gas molecules. Fortunately, the rarecontaminating molecules that might occur in the bulk gas requireless energy to become ionized than do nitrogen, hydrogen, helium orargon. For this reason, when any contaminating molecule appears inthe sample stream, there is a very high probability that it will reactwith a bulk gas ion. When this reaction occurs, the charge istransferred to the contaminant which then becomes ionized. Thischarge transfer results in a very high proportion of the contaminantmolecules becoming ionized. In fact, the efficiency is about 1,000times that of other ionization techniques that operate within thevacuum chamber of the mass spectrometer.
A proportion of the sample gas, complete with the ionizedcontaminants, passes through a series of pressure reducing lenses
before it enters the quadruple mass spectrometer. A triple-filter unit
is used that permits measurements up to 300 Daltons (atomic massunits) allowing the complete contamination spectrum to be measured
at the detector. The pulse counting amplifier has a noise levelof just 10 counts per 106, when combined with the API source,
enabling detection of 12 individual species as low as one partin 1012 (1 ppt).
Configuration
The APIX δQ configuration is comprised of a single-bay environmental
enclosure containing the API-MS analyzer and the Air Liquide gas
processor. The standard cabinet is configured for a relatively clean,temperature controlled environment but there are a number ofcooling and purging options that can accommodate more demanding
environments when necessary.
The APIX Quattro configuration is comprised of two single-bay
environmental enclosures which contain four API-MS analyzers
and the third bay houses the Air Liquide gas processor that provides

Mass Spectrometer
Turbo

Pump Controller

automatic ppb or ppt calibration of the analyzers. Each of the fourmass spectrometers is mounted on slides in order to be pulledforward for easy maintenance access. The top-mounted hood contains
the stream switching manifolds which are used for sample gas
connections, allowing multiple streams to be connected to eachindependent bulk gas analyzer. This stream selection can be
manually controlled or fully automated. As each API-MS isindependent and has multi-stream capability, it is possible
to monitor four bulk gas types with three API-MS while one
is undergoing routine annual maintenance.
The hood assembly in both configurations incorporates a hydrogensafety system that ensures the mass spectrometers are safely
shutdown in the event of a hydrogen leak. This safety device works
independently of the analyzer power supplies. If limited mobility
is required, a set of wheels can be provided that allow the unit
to be safely pushed from one test point to another.
Each mass spectrometer is controlled by an embedded processor
that runs a real-time operating system using battery-backed flash
memory. The processor acts as a master to a series of internalcontrollers, interconnected by Ethernet cable. Each of thesemicrocontrollers operates the individual subassemblies suchas the gas processor and multi-stream inlet. The gas processor
requires only a single calibration cylinder and incorporates
a moisture calibration from a permeation tube device.
Internal power distribution is monitored and controlled
by the local analyzer network—a design feature that extends
the diagnostic abilities to Thermo Scientific GasWorks® software.
Each multi-processor analyzer network provides redundantcommunication channels to permit reliable, stand-alone operation
without the need for a PC workstation, transmitting sample stream
data and diagnostic information directly to the DCS or SCADA
system. Each communication channel can be configured forpoint-to-point fiber optic connection or hard-wired for current loop,multi-drop connection. Each analyzer can be configured with anembedded OPC server for seamless communications with aMicrosoft® host or one of several industrial gateway protocols(Modbus, Siemens,® Allen-Bradley,® etc.). If the unit needs to be
hard-wired to analog monitoring and control loops or digital alarm
hardware, OPTO 22 SNAP and OPTOMIX protocols are fully
supported and a wide range of hardware modules are available.

System Configuration

Thermo Scientific APIX δQ

Thermo Scientific APIX Quattro

14012035
Moisture

30

Concentration PPT

Impurity Concentration PPT

402520Carbon Dioxide

15Oxygen

50100
80
60
40
20
0

0.2

0.3

0.4

0.5

0.6 0.7

0.8

Day

0.9

21.5

2.38

7.26

12.14

17.02
Time21.5

2.38 7.26

Seven Day Contamination Trend—UHP Nitrogen

Methane Contamination Trend—UHP Nitrogen

This graph shows the daily temperature effects observed
at a semiconductor fab over a period of seven days.

The trace shows relatively high methane concentrations in the“pure” nitrogen supplied to a semiconductor fab. The APIX traceshows that an effective repair was completed which resulted
in the methane returning to normal levels well below 10 ppt.
This demonstrates the need for low ppt analysis.

User Interface

Thermo Scientific GasWorks Software
The Thermo Scientific GasWorks software suite provides an intuitive, information rich andflexible window into the operation of the mass spectrometer. Initial setup uses the remotecomputer which can then be used to display process measurement and diagnostic data,or it can be unplugged leaving the individual APIX to operate in full stand-alone
mode. From conceptual design through several generations of production, fully accredited
ISO 9001 quality procedures have been rigorously enforced by the software team.
The software installation can be checked at anytime to ensure that it is verifiably
complete and correct. Software updates can be uploaded remotely.

Specifications

Thermo Scientific APIXδQ and Thermo Scientific APIX Quattro

General Specifications
Measurement Method

APIX δQ:
1x triple filter
APIX Quattro:
4x triple filter
Mass Range
1-300 AMU
Ion Source Type
Atmospheric pressure ionization
Ion Source BackgroundLess than 1 ppt
Amplifier and Dynamic Range
100 MHz pulse counting type
Detector
Pulse counting channel electron multiplier
6Detection Noise
10 counts in 10
Detection Limit< 10 ppt (component dependent)
Analysis Time (typical)< 1 second per component
Stream Switching Time (typical)
15 minutes to < 1 ppb
Bulk Gas Suitability
H2, N2, Ar, He
Serial Connections
RS232, RS422, RS485
Impurities Monitored
H02, He, CO, CO2, H2O, O2, CH4, Kr and Xe (other impurities available)
Dimensions
APIX δQ:
1.9 m (H) x 0.7 m (W) x 0.65 m (D) (74.80 in x 27.56 in x 25.59 in)
APIX Quattro:
1.9 m (H) x 2.1 m (W) x 0.65 m (D) (74.80 in x 82.68 in x 25.59 in)Maximum Number of Components
Not limited by software
Maximum Number of Peaks
Not limited by software
Maximum Number of Derived Values Not limited by software
Maximum Number of Methods
Not limited by software
Maximum Number of Sequences
Not limited by software
Maximum Number of Analog I/O
No fixed limit
Maximum Number of Digital I/O
No fixed limit
Maximum Number of Trend Windows No fixed limit
Directly Supported
Modbus, Siemens 3964, Siemens 3964R, DDE, OPC, VGCP, PVGCP
Communication Protocols
Additional Available Protocols
Modbus+, Allen-Bradley DH, Allen-Bradley DH+

Customer Care
Thermo Scientific instruments are recognized for outstanding performance and reliability. To ensure maximum uptime,
we offer comprehensive service and support programs worldwide on all products via a network of factory-trained
and highly qualified scientists and engineers. Our experts will keep your analyzer working to specification.

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