PT5E-0644

Photoemission Yield
Spectroscopy in Air (PYSA)
AC-2S Series
AC-2S
AC-2S Pro α
AC-2S Pro βOperating Manual

2-7-6 Azusawa, Itabashi-ku, Tokyo, 174-8744, Japan
Website: https://www.rikenkeiki.co.jp/

・ Unauthorized reproduction of the contents of this document is prohibited.
・ The contents of this document are subject to change without notice.
・ Every care has been taken in the preparation of this document. Please contact us if you encounter errors
or omissions.
・ MS, Microsoft, and Windows are the registered trademarks or trademarks of Microsoft Corporation in the
US and other countries.
・ All other corporate names and product names used in this document are the registered trademarks ortrademarks of their respective owners.
・ This document omits the ® and ™ symbols.

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Contents

Contents
1.

Product Overview .................................................................................................................................................. 6
1-1 Introduction ...................................................................................................................................................... 6
1-2 Intended use and product features ................................................................................................................. 7
1-2-1 Intended use ........................................................................................................................................ 7
1-2-2 Product features .................................................................................................................................. 7
1-3 DANGER, WARNING, and NOTE ................................................................................................................. 8
1-4 Notes on using the software ........................................................................................................................... 9
1-4-1 Software license terms ........................................................................................................................ 9
1-4-2 Precautions .......................................................................................................................................... 92.

Important Safety Information ............................................................................................................................... 10
2-1 Warning labels ............................................................................................................................................... 10
2-2 Warning information ...................................................................................................................................... 11
2-3 Precautions.................................................................................................................................................... 13
2-4 Method of confirmation for CE marking type ................................................................................................ 14

3.

Product Configuration .......................................................................................................................................... 15
3-1 Main unit and accessories ............................................................................................................................ 15
3-1-1 Components ...................................................................................................................................... 15
3-1-2 Accessories ........................................................................................................................................ 15
3-1-3 Optional accessories ......................................................................................................................... 16
3-2 Part names and functions ............................................................................................................................. 17
3-2-1 AC-2S LC (light source unit) .............................................................................................................. 17
3-2-2 AC-2S DC (measuring unit)............................................................................................................... 19
3-3 Block diagram................................................................................................................................................ 21

4.

Installing the Main Unit ........................................................................................................................................ 23
4-1 Installation precautions.................................................................................................................................. 23
4-2 Cable connection........................................................................................................................................... 24
4-3 Pipe installation ............................................................................................................................................. 26

5.

Operating the Main Unit ...................................................................................................................................... 27
5-1 Turning on the power .................................................................................................................................... 27
5-2 Heated sample stage temperature adjustment ................................................................................................ 29
5-2-1 Setting up the temperature controller ................................................................................................ 29
5-2-2 Increasing the heated sample stage temperature ............................................................................ 29
5-2-3 Replacing samples on the heated sample stage.............................................................................. 31

6.

Measurement....................................................................................................................................................... 32
6-1 Measurement precautions ............................................................................................................................ 32
6-2 Launching the AC-2S measurement application .......................................................................................... 33
6-6-2 Launching the AC-2S measurement application .............................................................................. 33
6-2-2 AC-2S measurement application main window component names and functions ......................... 34
6-2-3 Files created by the AC-2S measurement application ..................................................................... 35
6-3 Main unit preparation .................................................................................................................................... 36
6-3-1 Dry compressed air supply and unit connection ............................................................................... 36
6-3-2 Initializing the UV intensity controller and setting the detector voltage ............................................ 39
6-4 Work function measurement ......................................................................................................................... 43
6-4-1 Selecting the work function ............................................................................................................... 43
6-4-2 Setting the measurement data file save destination folder............................................................... 43
6-4-3 Setting work function measurement conditions ................................................................................ 44
6-4-4 Setting the Incident UV Spectrum ..................................................................................................... 48
6-4-5 Mounting samples ............................................................................................................................. 50
6-4-6 Starting single-point measurement ................................................................................................... 52
6-4-7 Starting multi-point measurement ..................................................................................................... 58
6-5 Calibration curve measurement .................................................................................................................... 62
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Contents

6-5-1 Selecting calibration curve measurement ......................................................................................... 62
6-5-2 Setting the count rate data file save destination folder ..................................................................... 62
6-5-3 Setting calibration curve measurement conditions ........................................................................... 63
6-5-4 Mounting samples ............................................................................................................................. 65
6-5-5 Starting calibration curve measurement ........................................................................................... 66
6-6 Creating and editing calibration curve files ................................................................................................... 67
6-6-1 Creating calibration curve files .......................................................................................................... 67
6-6-2 Editing calibration curve files ............................................................................................................. 69
6-6-3 Calibrating calibration curve files ....................................................................................................... 71
6-7 Film thickness measurement ........................................................................................................................ 74
6-7-1 Selecting film thickness measurement.............................................................................................. 74
6-7-2 Setting the film thickness data file save destination folder ............................................................... 74
6-7-3 Calling up calibration curve files ........................................................................................................ 76
6-7-4 Setting film thickness measurement conditions................................................................................ 76
6-7-5 Mounting samples ............................................................................................................................. 79
6-7-6 Starting film thickness measurement ................................................................................................ 80
6-8 UV intensity controller and detector maintenance........................................................................................ 81
6-8-1 Initializing the UV intensity controller................................................................................................. 81
6-8-2 Resetting the anode voltage.............................................................................................................. 81
6-8-3 Readjusting the dead time................................................................................................................. 82
6-9 Quitting measurement................................................................................................................................... 85
7.

Analysis................................................................................................................................................................ 87
7-1 Launching the AC-2S analysis application ................................................................................................... 87
7-1-1 Launching the AC-2S analysis application........................................................................................ 87
7-1-2 AC-2S analysis application main window component names and functions ................................... 88
7-1-3 Files handled by the AC-2S analysis application .............................................................................. 89
7-2 Opening measurement results files .............................................................................................................. 90
7-2-1 Plotting measurement results on a graph ......................................................................................... 90
7-2-2 Plotting multiple measurement results on a single graph ................................................................. 94
7-3 Analyzing measurement results .................................................................................................................... 95
7-3-1 Changing the Incident UV Spectrum ................................................................................................ 95
7-3-2 Calculating the mean of measurement results ................................................................................. 96
7-3-3 Calculating the photoemission threshold .......................................................................................... 97
7-3-4 Estimating density of states............................................................................................................... 98
7-3-5 Saving analysis results ...................................................................................................................... 99
7-4 Customizing the graph display.................................................................................................................... 100
7-4-1 Changing the X- and Y-axis maximum and minimum values......................................................... 100
7-4-2 Changing grid lines .......................................................................................................................... 101
7-4-3 Changing line graph dots ................................................................................................................ 102
7-4-4 Changing the ground level and regression line graph display ....................................................... 104
7-4-5 Renaming samples.......................................................................................................................... 105
7-5 File management ........................................................................................................................................ 106
7-5-1 Data Manager component names and functions ........................................................................... 106
7-5-2 Viewing data .................................................................................................................................... 107
7-5-3 Searching for files ............................................................................................................................ 108
7-5-4 Renaming files ..................................................................................................................................111
7-5-5 Deleting files .....................................................................................................................................111
7-6 Outputting measurement results................................................................................................................. 112
7-6-1 Outputting data and measurement conditions ................................................................................ 112
7-6-2 Outputting graphs ............................................................................................................................ 113
7-6-3 Bulk outputting data, measurement conditions, and graphs .......................................................... 113
7-7 Graph right-click operation list..................................................................................................................... 114

8.

Data conversion................................................................................................................................................. 116
8-1 Overview of the AC-2S data conversion application .................................................................................. 116
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Contents

8-2 Basic file conversion operations ................................................................................................................. 116
8-2-1 Launching the AC-2S data conversion application ......................................................................... 116
8-2-2 AC-2S data conversion application window component names and functions ............................. 117
8-2-3 Files supported by the AC-2S data conversion application ............................................................ 117
8-3 Converting to AC-2S format (AC-5 measurement data files)..................................................................... 118
8-4 Converting to AC-2S format (AC-2/AC-3 measurement data files) ........................................................... 120
8-5 Quitting the AC-2S conversion application ................................................................................................. 122
9.

Ending Main Unit Operation .............................................................................................................................. 123
9-1 Turning off the power................................................................................................................................... 123

10. Maintenance ...................................................................................................................................................... 125

10-1 Daily inspection ......................................................................................................................................... 125
10-1-1 Display lamp inspection................................................................................................................. 125
10-1-2 Sample chamber interior inspection.............................................................................................. 127
10-2 Consumable part replacement intervals ................................................................................................... 128
10-2-1 Detector (LE-6118) ........................................................................................................................ 128
10-2-2 Optical fiber .................................................................................................................................... 130
10-2-3 Deuterium (D2) lamp ...................................................................................................................... 131
10-2-4 Activated carbon filter .................................................................................................................... 131
11. Storage, Relocation, and Disposal.................................................................................................................... 132

11-1 Procedures for storage or when not used for extended periods .............................................................. 132
11-2 Procedures for relocation or reuse............................................................................................................ 132
11-3 Product disposal ........................................................................................................................................ 132
12. Troubleshooting ................................................................................................................................................. 133

12-1 Fault diagnosis .......................................................................................................................................... 133
12-2 Corrective action ....................................................................................................................................... 133
13. Product Specifications ....................................................................................................................................... 135

13-1 Product specifications ............................................................................................................................... 135
13-2 Display/control unit specifications ............................................................................................................. 136
13-3 Software (measurement/analysis) function specifications ....................................................................... 136
13-4 Software (data conversion) function specifications .................................................................................. 137
14. Appendix ............................................................................................................................................................ 138

14-1 Detection principle ..................................................................................................................................... 138
14-1-1 Photoelectron detection principle .................................................................................................. 138
14-1-2 Photoelectric work function measurement.................................................................................... 139
14-2 Terminology ............................................................................................................................................... 141

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1. Product Overview

1-1 Introduction

1

Product Overview
1-1 Introduction
Thank you for purchasing this AC-2S Series Photoemission Yield Spectroscopy in Air(“the product”
hereinafter).
This operating manual describes product operating procedures and specifications. The manual provides
essential information for the correct use of the product.
Make sure you have read and fully understood the contents of this manual before using the product.
Keep this operating manual on hand to allow ready reference during use.
The contents of this manual are subject to change without notice to allow product improvements.
Any duplication or reproduction of this manual without permission is prohibited, whether in whole or inpart.
Riken Keiki accepts no liability for accidents or damage resulting from use of the product, whether withinor outside the warranty period.
Review the warranty policy indicated on the warranty.
Before using the product, confirm that this operating manual covers the model you purchased.

<Models covered by this operating manual> AC-2S
 AC-2S Pro α
 AC-2S Pro β<This operating manual>
Where descriptions differ for different product models, this operating manual uses the following icons toindicate each model:
AC-2S

AC-2S

AC-2S Pro α

Pro αAC-2S Pro βPro βOperating procedures and specifications for which no icons appear apply to all models.

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1. Product Overview

1-2 Intended use and product features

1-2 Intended use and product features
This product can detect and count a small number of photoelectrons by exposing samples to low-intensity
ultraviolet radiation. The AC-2S measurement application and AC-2S analysis application provided withthe product can also be used to measure the work function and ionization potential of materials such as
metals, semiconductors, and organic materials.
Use the device correctly after confirming you understand the product’s features and characteristics.

1-2-1 Intended use Work function measurement for metal materials
 Ionization potential measurement for semiconductors and organic materials
 Density of states measurement Thickness measurement of coatings formed on sample surfaces (down to thicknesses on the order oftens of nm) (AC-2S Pro α and AC-2S Pro β) Measurements of sample maintained at high temperatures (from room temperature up to 100 °C) (AC2S Pro α and AC-2S Pro β)

1-2-2 Product features
 Allows measurements in air of the work function of materials such as metals, with no need for vacuum
conditions.
 Allows easy sample insertion and removal for rapid measurement of many samples.
 Allows measurement of powder samples requiring high UV intensity and materials requiring low-energy
measurement (down to 2.0 eV). (AC-2S Pro α) Capable of microscopic area measurement (0.4 mm × 0.4 mm square or less) to measuresemiconductors and other small samples (AC-2S Pro β) Includes a heated sample stage for measurement at user-specified temperatures up to 100 °C. This
makes it possible to evaluate characteristics of new materials with temperature-dependent
characteristics at their actual operating temperatures. (AC-2S Pro α and AC-2S Pro β) The analysis application can be used to estimate photoemission threshold values and density of statesfrom measurement results.
Function

AC-2S

AC-2S Pro α

AC-2S Pro βWork function measurement







Ionization potential measurement







Density of states measurement







Film thickness measurement

―





High-temperature measurement

―





Laser-driven light source (LDLS)*1

―





Micro area measurement

―

―



Low-energy measurement

―



―

Multi-point measurement

○

○

○

Repeated measurement

○

○

○

Consumable part replacement notification

○

○

○

*1 LDLS specification
Embedded laser parameters
Wavelength: 974nm, Divergence: >100mRad, Emission Type: CW, Maximum power or energy output: 30W

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1. Product Overview

1-3 DANGER, WARNING, and NOTE

1-3 DANGER, WARNING, and NOTEThis operating manual applies the following categories to indicate potential damage/hazards if the user
disregards the information provided and handles the product incorrectly:

DANGER

This indicates situations in which improper handling may result in fatal or
serious injury or significant property damage.

WARNING

This indicates situations in which improper handling may result in serious injury
or significant property damage.

CAUTION

This indicates situations in which improper handling may result in minor injury
or minor property damage.

Additionally, usage recommendations are indicated as follows:

NOTE

This indicates items that will be helpful to know when using the product.

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1. Product Overview

1-4 Notes on using the software

1-4 Notes on using the software
Be sure to read the following ‘Software license terms’ and ‘Precautions’ before using the software (AC-2S
measurement application and AC-2S analysis application). Carefully read the contents of this manual toensure proper use of the software.

1-4-1 Software license terms
Permission to use this software is granted only on the condition that the user consents to the following
terms and provisions. Use of this software constitutes the user’s consent to the following terms andprovisions:
1. License terms
Riken Keiki Co., Ltd. grants the user the nonexclusive rights to use this software in accordance with thefollowing license terms.
2. Scope of license
Except where permitted by these license terms, the user may not use, copy, modify, adapt, process, orotherwise alter this software in part or its entirety, and may not loan or transfer it to third parties.
3. CopyrightThe copyright of this software and manuals belongs to Riken Keiki, and no rights are transferred to theuser other than the usage rights for this software granted by these license terms.
4. Agreement period
The license for this software is valid from the time at which the user first uses the software.
5. Warranty
Riken Keiki makes no warranty other than that the licensed software is suitable and useful for the user’s
specific purpose.
6. Disclaimer
Riken Keiki accepts no liability whatsoever for loss of profits, damages arising from special
circumstances (including damages that is or could be predicted by Riken Keiki), or direct or indirect
damages due to claims against the user by third parties resulting from use of this software.
7. Termination of the agreement
User violations of any of these license terms will result in immediate termination of the agreement. The
user must immediately destroy the software and any copies thereof after such violation.
8. Miscellaneous
Comply with all Japanese export control regulations when taking this software outside Japan.
Regardless of the country in which the software is actually used, this agreement is governed by thelaws of Japan.

1-4-2 Precautions
The descriptions in this manual assume the following: The AC-2S main unit and control PC have been correctly installed and set up.
 The AC-2S measurement application and AC-2S analysis application have been correctly installed.
 The user is familiar with the Windows operating system.
 The user is familiar with the meanings of the terms work function, ionization potential, and density ofstates, and their relationship to photoemission.

9 / 141

2. Important Safety Information

2-1 Warning labels

2

Important Safety
Information
2-1 Warning labels
The following warning labels are affixed to the product to prevent accidents.
These warning labels must be strictly observed in conjunction with the warnings and precautions in thismanual when carrying out installation, operation, and maintenance work.
Warning label

Warning

Warning details

CAUTION:
ELECTRIC
SHOCK

Indicates the presence of a dangerous voltage.
The label is affixed on or inside the device.

CAUTION:
HOT

Indicates that surfaces may be dangerously hot.
The label is affixed on or inside the device.

CAUTION:UVRADIATION

Indicates a risk of damage to eye and skin if direct exposure
occurs.
The label is affixed on or inside the device.

Generalwarning

Indicates that improper handling may result in serious injury orproperty damage.
The label is affixed on or inside the device.

10 / 1412. Important Safety Information

2-2 Warning information

2-2 Warning information
WARNING
Opening and closing the cover while the power is turned on
 Do not open the cover on the main unit while the power is turned on. Doing so may result in electric
shock from high-voltage components inside the main unit.
 Ultraviolet radiation is emitted from the UV lamp while it is turned on. Never look into the UV lampwith the naked eye. Doing so may cause eye pain or vision impairment.
 Do not point the UV light directly at your skin. Doing so may cause skin irritation.
 Never touch the UV lamp while it is turned on or immediately after turning it off, as it will be hot.
Doing so may result in burn injuries.
Overheating, smoke, abnormal sound, or abnormal odors
 Stop using the product immediately if any irregularities occur. If overheating, smoke, abnormalsound, or abnormal odors arise, turn off the power and unplug the power cable from the mains
socket. Continuing to use the product may result in electric shock or fire.
Impact due to dropping Do not subject the product to impact, such as by dropping it or hitting it. The product contains
precision-construction components, including the optical system and automatic stage. Subjecting
the product to impact may prevent correct operation or correct measurement.
Operating ambient temperature and humidity
 Do not use or store the product in hot, humid, or dusty locations. Doing so may result in
malfunctioning, electric shock, or fire. Use the product within the specified operating temperatureand humidity range (15 - 35 °C, up to 60 %RH).
 Condensation may form on the outside or interior of the product when it is moved to a location witha large temperature difference, such as when moving from a cold location to a hot location. Use
under these conditions may result in product failure. If the product is moved, allow it to stand forseveral hours in the location in which it is to be used to enable it to adjust to the surrounding
temperature before use.
Power supply information
 Do not use the product with a power supply voltage other than that specified. Using with a power
supply voltage other than that specified may damage the product. It may also cause electric shockor fire.
 Connect the grounding terminal. For safety, plug the power supply cable into a grounded (three-pin)
socket. Failure to ground the ground terminal may result in electric shock.
 Do not place objects on top of the power supply cable, or pull, squeeze, bend, or process the cable.
Doing so may damage the power supply cable and cause electric shock or fire.
 When plugging in and unplugging the power supply cable, always hold the plug itself. Pulling on thecable may pull out some of the wires and result in fire.
 Check to ensure that dust is not allowed to build up on the power supply plug and that it is fully
inserted into the socket.
 Do not use with sockets with faulty connections. Doing so may result in fire.
 Do not plug the power supply cable into the socket with wet hands. Doing so may cause electric
shock.
 Do not connect multiple plugs into the same mains socket. Doing so may result in fire, cause apower overload, trip the circuit breaker, or affect other devices. Doing so will also increase thelikelihood of noise in the power supply, leading to malfunctions.
Foreign object ingress Insert only measurement samples into the sample inlet. Keep metal or combustible foreign matterfrom entering the product via the vents. Continuing to use the product with foreign matter inside may
result in malfunctions. It may also cause electric shock or fire.

11 / 1412. Important Safety Information

2-2 Warning information

Installation
 Do not place containers of water such as vases and plant pots, or small metallic objects such aspins and clips on top of the product.
Using the product with such items fallen inside may result in damage. It may also cause electric
shock or fire.
 Install the product on a stable surface of sufficient load-bearing capacity.
 This product incorporates an interlock function. The stage cannot be operated while the sample inlet
is open.
 If it is used with methods other than we have specified, the protective functions provided by this unit
may be deteriorated.
Movement and transportation
 Move or transport the product with care. The product is heavy. Be careful to avoid dropping the
product and injuring workers when moving or transporting the product. Assign at least two persons
to carry the product. Support the product from below.
Maintenance Do not use worn or degraded parts. Inspect the piping system periodically. Replace parts as andwhen necessary. Continuing to use worn or degraded parts may lead to accidents such as pipe
damage or ruptures. Continuing to use lamps significantly beyond their service life may resulted in
explosion.
 The product must be maintained by an engineering supervisor. Product maintenance involving
opening maintenance doors and removing covers must be performed by engineering supervisors
trained by Riken Keiki or engineering supervisors who have passed the appropriate written exam.
Sample mounting
 To open the sample inlet, press gently with your finger on the part marked “PUSH”.
Any of the following actions may damage the sample inlet:
・ Pressing on the sample inlet anywhere other than the part marked “PUSH”
・ Pressing on the sample inlet with the palm of your hand・ Subjecting the sample inlet to a load of 400 N or more (The sample inlet can be opened andclosed with a force of 5 - 6 N.)
・ Forcing open the sample inlet when it does not open Be sure to adjust the height of the sample when mounting a sample. If a sample is mounted without
adjusting the height, contact between the sample and internal parts during measurement may resultin damage to the product.
 Push the height gauge to pull it out from the side of the sample stage.
Any of the following actions may damage the height gauge:
・ Subjecting the height gauge to a force of 20 N or more from above, below, or diagonally・ Pulling out the height gauge by the tip (pin) Allow the heated sample stage to cool before replacing samples. (AC-2S Pro α and AC-2S Pro β)
Replacing samples while the sample stage is hot may result in burn injuries.
Fuse Use a fuse of the specified rating (2.5 A, 250 V, time-lag type) to prevent fire hazards.
Turn off the power switch and unplug from the mains socket before replacing the fuse. Safeguard
the fuse holder from short circuits.
Caution Use of controls or adjustments or performance of procedures other than those specified herein may
result in hazardous radiation exposure.

12 / 1412. Important Safety Information

2-3 Precautions
CAUTIONInstallation environment Use the product indoors in laboratories or similar settings under conditions of stable temperatureand humidity.
Do not install the product in the following locations. Doing otherwise may result in malfunctions or
accidents.
・ Outdoors or in locations where the product may be exposed to splashing water・ Dusty or humid locations
・ Locations subject to vibration
・ Locations subject to rapid temperature or humidity fluctuations
・ Locations subject to direct sunlight or drafts from air-conditioning equipment
・ Locations where the air contains chemicals such as solvent, acid, or alkaline vapor or gas
・ Locations subject to noise from equipment such as large-capacity transformers, motors, andpower supplies or noise sources such as high-voltage generators
Contact with metal edges
 Avoid contact with metal edges. Take great care when touching the edges of metal panels, etc.,
e.g., when moving the product.
Using walkie-talkies
 Do not use walkie-talkies near the product. Radio waves emitted from walkie-talkies or similar
devices used near the product or cables may affect measurements. Use walkie-talkies or similar
devices only in locations where they will not affect product functions.
Turning on the power Wait at least five minutes after turning off the power before turning the power back on. The productmay not function correctly if the power is turned on before waiting five minutes.
 Turn on the power to the main unit as instructed by the AC-2S measurement application. When
operation is complete, close the AC-2S measurement application before turning off the power to themain unit.
Use in unstable locations
 Do not install the product on a slope or in locations subject to vibration. Doing so may affectmeasurements.
Precautions when using dry compressed air
 Use dry compressed air free of substances such as solvents, acids, gases, and oil. The presence ofthe following substances in the air supply may result in deterioration or damage to the product:Type
Solvents
Acids
Gases
Oil

The dry compressed air must be entirely free of the following substances:
Acetone, benzene, phenol, toluene, trichloroethylene, xylene, cresol, thinner,aniline, chloroform, alcohol, dioxane, tetrahydrofuran, dichloromethane,
cyclohexanone, tetrachloromethane, etc.
Sulfuric acid, nitric acid, hydrochloric acid, acetic acid, lactic acid, chromic acid, etc.
Chlorine, sulfurous acid gas, hydrogen sulfide, bromine, semiconductor production
gases, etc.
Phosphate-based hydraulic fluid, fuel oil, water-soluble cutting fluid (alkaline),kerosene, etc.

 Do not use air at pressures above the specified pressure.
 Use only the compressor recommended by Riken Keiki.
 The compressor should be installed in the same conditions as the product.
 The ingress of water or other liquids via the dry compressed air pipes will damage the product.
 The ingress of gases other than air (e.g., nitrogen, oxygen, and inert gases) via the dry compressed
air pipes may damage the product.
 Use Teflon tubes of the specified diameter for dry compressed air piping.

13 / 1412. Important Safety Information

2-4 Method of confirmation for CE marking type

 Use tubes provide by Riken Keiki.
Product disassembly and modification
 Do not disassemble or modify the product. Product performance cannot be guaranteed if the
product is disassembled or modified. Read this operating manual carefully to ensure correct use of
the product.
Accessory samples
 Store the accessory samples (Au plates) in the dedicated holder and cover.

2-4 Method of confirmation for CE marking type
The CE marking is labeled on the detector in case of comply with CE mark. Please confirm the instrument
specification before using. Please refer Declaration of Conformity that is at the end of this manual if you
have CE marking type.
CE mark label
AC-2S
LC(lightsourceunit)

AC-2S Proα/AC-2S Proβ

CE mark

CE markDC(measurin
g unit)CE mark

CE mark

14 / 141

3. Product Configuration

3-1 Main unit and accessories

3

Product Configuration
3-1 Main unit and accessories
Check the main unit and accessories.
If any accessories are missing, contact our sales department.

3-1-1 Components
Item name

Model

Quantity

AC-2S measuring unit

AC-2S DC1

AC-2S light source unit

AC-2S LC1

Remarks

3-1-2 Accessories
Item name

Quantity

Display

1

Control PC

1Power supply cable (for LC)

1

Power supply cable (LC-DC)

1

USB interface cable (PC-LC)

1

RS-232C interface cable (LC- DC)

1

Detector

1

Optical fiber

1

Accessory sample set

1Tweezers

1

Measurement/analysis/data conversion
software (CD- ROM)

1

Operating manual

1

Warranty

1Remarks
OS: Windows

The accessory sample contains an Au plate,holder, and cover.

CAUTION For safety, plug the power supply cable into a grounded (three-pin) socket. Failure to ground theground terminal may result in electric shock.

15 / 141

3. Product Configuration

3-1 Main unit and accessories

3-1-3 Optional accessories
Item name

Remarks

Adaptor plug

Plug converting from 3-pin to 2-pin + ground wire.
・Required quantity of AC-2S : 1・Required quantity of AC-2S Proα/AC-2S Proβ: 3Tray for powder samples (1.0 mm deep)

One set containing 20 pieces

Tray for powder samples (0.5 mm deep)

One set containing 20 pieces*1

Compressor(with dry air generator)

Riken Keiki recommended compressor

Optical fiber protective acrylic cover
Dry air union adapter

Adapter for converting ⌀6 mm pipes to ⌀1/4 inch pipes.
(1/4 inch = 6.35 mm)

Different-diameter union joint (for dry air)Detector (for replacement)
Optical fiber (for AC-2S/Pro α)
Optical fiber (for Pro β)
Ozone filter*1 Use only the compressor available as an optional accessory to supply dry compressed air. Use the following Teflon
tubes for piping:・ Outer diameter 6 mm, inner diameter 4 mm
・ Withstand pressure 0.3 MPa or greater

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3. Product Configuration

3-2 Part names and functions

3-2 Part names and functions
3-2-1 AC-2S LC (light source unit)
AC-2S LC main unit

LED display unit①②<AC-2S>
Front view

Top view③

Rear view

Right side
⑨

⑦
⑧
⑩

④ ⑤

⑥

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3. Product Configuration

3-2 Part names and functions<AC-2S Pro α/AC-2S Pro β>
Front view

Top view⑪③

Rear view

Right side

⑨

⑦

⑩
⑫
④

⑤

⑧

⑥

No.

Name

Function①

POWER/STANDBY LEDThis is the power supply LED.
Lights up (green) when measurement is in progress.
Blinks (green) when at standby (warming up).

②

TROUBLE LEDThis is the fault LED.
This lights up (red) in the event of a product abnormality.
The LED blinks (red) when operation is being checked and
immediately after turning on the power.

③

Lamp replacement andinspection panel

Panel used to replace the UV lamp
This panel is also for used for inspections.

④

AC power supply input

Connector for connecting to the AC power supply⑤

AC power supply output(for DC unit)

Power supply connector for connecting the AC-2S DC unit

⑥

Fuse

Littelfuse fuse (T2.5 AL/250 V)⑦

USB connector (for PC)

USB connector for connecting to a PC⑧

RS-232C connector (forDC unit)

RS-232C connector for connecting to the AC-2S DC unit⑨

Optical fiber connector

Connector for connecting an optical fiber⑩

Power switch

Switch for turning on and off the power to the AC-2S LC and AC2S DC units⑪

Plasma light source (LDLS)

Laser-driven light source (LDLS)⑫

Explanatory LabelThis label indicates that it is a Class 1 laser product.

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3. Product Configuration

3-2 Part names and functions

3-2-2 AC-2S DC (measuring unit)
AC-2S DC main unit

LED display unit①②③

<AC-2S>
Front view④

Top view⑤⑥⑤

Rear view

Left side

⑪

⑦

⑧ ⑨

⑩

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3. Product Configuration

3-2 Part names and functions<AC-2S Pro α/AC-2S Pro β>
Front view

Top view

⑤

④

⑥
⑫

⑤

Rear view

Left side

⑪

⑬
⑭

⑫

⑦

⑧⑨ ⑩

No.
①

Name
POWER/STANDBY LED②

TROUBLE LED③

OPEN lamp④

Optical fiber holder

⑤
⑥
⑦
⑧
⑨
⑩

Sample inlet
Detector inspection panel
RS-232C connector (for LC)
Fuse
AC power supply input (for LC unit)
Dry air inlet⑪⑫

Optical fiber connector⑬

Temperature controller heater
cable connector
Temperature controller
thermocouple cable connector⑭

Temperature controller

Function
This is the power supply LED.
Lights up (green) when measurement is in progress.
Blinks (green) when at standby (warming up).
This is the fault LED.
This lights up (red) in the event of a product abnormality.
The LED blinks (red) when operation is being checked and
immediately after turning on the power.
Sample inlet open/close indicator LED.
Lights up (orange) when the sample inlet is open.
Secures the optical fiber.
(The configuration differs for the AC-2S Pro β.)
Inlet for measuring samples
Panel for inspecting and replacing the detector
RS-232C connector for connecting to the AC-2S LC unit.
Littelfuse fuse (T2.5 AL/250 V)
Power supply connector for connecting to the AC-2S LC unit
Inlet connector for the dry compressed air used during
measurement
Connector for connecting an optical fiber
Device for regulating the temperature of the heated sample
stage
Connector for connecting the temperature controller heater
cable
Connector for connecting the temperature controller
thermocouple cable

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3. Product Configuration

3-3 Block diagram

3-3 Block diagram<AC-2S>Dry compressed air
Pressure: 0.1 - 0.2 MPa
Flow rate: 0.5 L/min(measurement)
2.0 L/min (purging)
Pipes:
φ6  4 mm
Solenoid valve

Detector

Spectrometer

Iris

UV lamp

FilterFlow controller

UV lamp power
supplySample stageLow-energy
electron counter

UV intensity
measuringunit

X stage
Controller
LC (light source unit)

Control PC

Controller

DC (measuring unit)

UV light

Display/control unit

PipingElectrical signal line

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3. Product Configuration

3-3 Block diagram<AC-2S Pro α/AC-2S Pro β>
Dry compressed air
Pressure: 0.1 - 0.2 MPa
Flow rate: 0.5 L/min(measurement)
2.0 L/min (purging)
Pipes:
φ6  4 mm
LDLS
power
supplySolenoid valve

Temperature
controller

Detector

Spectrometer

Iris

LDLS

FilterFlow controller

Heated sample
stage

Low-energy
electron counter

UV intensity
measuringunit

X stage
Controller
LC (light source unit)

Controller

DC (measuring unit)

Control PC
UV light
Display/control unit

PipingElectrical signal line

22 / 1414. Installing the Main Unit

4-1 Installation precautions

4

Installing the Main Unit
4-1 Installation precautions
WARNING Assign at least two persons to carry the product. Support the product from below.
 Install the product on a surface of sufficient load-bearing capacity.

CAUTION Use the product indoors in laboratories or similar settings under conditions of stable temperatureand humidity.
Do not install the product in the following locations. Doing otherwise may result in malfunctions or
accidents.
・ Outdoors or in locations where the product may be exposed to splashing water・ Dusty or humid locations
・ Locations subject to vibration
・ Locations subject to rapid temperature or humidity fluctuations
・ Locations subject to direct sunlight or drafts from air-conditioning equipment
・ Locations where the air contains chemicals such as solvent, acid, or alkaline vapor or gas
 Install the product on a stable and level location. Be careful to avoid dropping or striking the product.
The product contains precision electronic components. Subjecting the product to impact may affectmeasurements.
 Avoid installing in locations subject to noise from equipment such as large-capacity transformers,
motors, and power supplies or noise sources such as high-voltage generators. The product may beaffected by electromagnetic noise, etc.
 Maintain a distance of at least 1 m from the product when using devices like walkie-talkies andcellphones.
Failure to do so may result in malfunctions due to radio interference.
 When installing, leave at least 15 cm (at least 20 cm for the AC-2S Pro β) all around the product.
 Leave at least 15 cm (at least 20 cm for the AC-2S Pro β) at the rear to allow the power plug to be
unplugged immediately if a problem occurs.

23 / 1414. Installing the Main Unit

4-2 Cable connection

4-2 Cable connection
Connect the product light source unit to the measuring unit. Connect the control PC.

<AC-2S>
Connect the AC-2S LC to the AC-2S DC and the PC for control with a cable, and also connect the AC-2S
DC to the temperature controller.
Power supply cable

Dry compressed
air*1

USB cable
RS-232C cable

Optical fiber

AC power supply cable

1 Connect the provided power supply cable (LC-DC) between the AC-2S LC and AC-2S DC units.
2 Connect the provided RS-232C interface cable (LC-DC) between the AC-2S LC and AC-2S DC units.
3 Connect the provided USB interface cable (PC-LC) between the AC-2S LC and control PC.
4 Connect the provided power supply cable (LC) to the AC-2S LC unit.
*1 Pressure: 0.1 - 0.2 MPa; flow rate: 0.5 L/min (measurement), 2.0 L/min (purging); pipes: φ6  4 mm

24 / 1414. Installing the Main Unit

4-2 Cable connection<AC-2S Pro α/AC-2S Pro β>
Connect the cables between the AC-2S LC and AC-2S units, and to the LDLS power supply, temperature
controller, and control PC.
Connect as shown in the following diagram.
Power supply cable

Dry compressed
air*1

USB cable
RS-232C cable

Optical fiber

AC power
supply cable
AC power
supply cable

LDLS
power supply
Temperature controller
AC power supply cable

1 Connect the provided power supply cable (LC-DC) between the AC-2S LC and AC-2S DC units.
2 Connect the provided RS-232C interface cable (LC-DC) between the AC-2S LC and AC-2S DC units.
3 Connect the provided USB interface cable (PC-LC) between the AC-2S LC and control PC.
4 Connect the provided power supply cable (LC) to the AC-2S LC unit.
5 Connect the temperature controller heater cable to the temperature controller heater cable connector
on the left side of the AC-2S DC unit.
6 Connect the temperature controller thermocouple cable to the temperature controller thermocouple
cable connector on the left side of the AC-2S DC unit.
*1 Pressure: 0.1 - 0.2 MPa; flow rate: 0.5 L/min (measurement), 2.0 L/min (purging); pipes: φ6  4 mm

25 / 1414. Installing the Main Unit

4-3 Pipe installation

4-3 Pipe installation
Connect the tube supplying dry compressed air to the dry air inlet at the rear of the AC-2S DC unit.

NOTE Use the following Teflon tubes for piping:
Outer diameter: 6 mm; inner diameter 4 mm; withstand pressure: 0.3 MPa or greater Check to confirm that the piping tubes have been cut perpendicularly and that the cut faces are
circular. Also check to confirm that the outer surface is not damaged.

1

Insert the tube securely into the dry air inlet at the rear of the AC-2S DC unit.
Pull the tube to confirm that it does not come loose.

2Connect the other end of the tube to the dry compressed air supply.
Adjust the pressure of the dry compressed air*1 supply to 0.1 - 0.2 MPa.
*1 Use only the compressor available as an optional accessory to supply the dry compressed air.

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5. Operating the Main Unit

5-1 Turning on the power

5

Operating the Main Unit
5-1 Turning on the power
WARNING To prevent electric shock, be sure to plug the power supply cable into a grounded (three-pin) socket.
 Failure to ground the ground terminal may result in electric shock.

NOTE Plug the AC-2S LC power supply cable and control PC power supply cable into grounded sockets.
 Check to confirm that the power supply voltage at the socket matches the power supply voltage
indicated on the product.
 If the mains socket has a switch, turn this switch on.

<AC-2S>
1Turn on the power to the control PC.
Check to confirm that Windows has started up correctly.

2

Turn on the power switch on the right side of the AC-2S LC unit.

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5. Operating the Main Unit

5-1 Turning on the power<AC-2S Pro α/AC-2S Pro β>1Turn on the plasma light source (LDLS).
Insert the power cable of the plasma light source unit into the power outlet. After confirming that theunit's fan is running, raise the OPERATE switch in the controller section. Check to confirm that the
LAMP ON LED lights up (green).

2

Turn on the power to the control PC.
Check to confirm that Windows has started up correctly.

3

Turn on the power switch on the right side of the AC-2S LC unit.

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5. Operating the Main Unit

5-2 Heated sample stage temperature adjustment

5-2 Heated sample stage temperature adjustment

Pro α

Pro β

For high-temperature measurements, set the measurement temperature using the temperature controller,
then adjust the sample stage temperature.

WARNING Check to confirm that the sample stage has cooled sufficiently before mounting or replacing samples.
Replacing the samples while the sample stage is still hot may result in burn injuries.

5-2-1 Setting up the temperature controller
1Turn on the breaker switch at the rear of thetemperature controller.
Breakerswitch5-2-2 Increasing the heated sample stage temperature
Turn on the power to the temperature controller to begin adjusting the temperature of the heated sample
stage.
Here, the temperature setting is 70 °C.
1Press SET to change the set temperature.

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5. Operating the Main Unit2

5-2 Heated sample stage temperature adjustment

Press <MODE to change the flashing digit.
Use ∧ and ∨ to change the temperature setting.

Press SET to return to the operation display state.

3

Turn the front control switch ON.

4Turn the POWER ADJ. knob on the temperature
controller main unit to adjust the temperature
while monitoring the temperature increase.

5

Check to confirm that the temperature setting
has changed to the temperature specified.

NOTE If you press the wrong button or perform an incorrect operation, press SET button to return to theoperating status display. Repeat the procedure.
 Use the POWER ADJ. knob on the temperature controller main unit to adjust the speed at which thetemperature increases. If the temperature rises too quickly, gradually reduce the speed from MAX toprevent overshooting.

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5. Operating the Main Unit

5-2 Heated sample stage temperature adjustment

5-2-3 Replacing samples on the heated sample stage
Before replacing samples on the heated sample stage, turn off the power to the temperature controller andset the heated sample stage to room temperature.
Here, the temperature setting is 27 °C.

WARNING Allow the heated sample stage to cool before replacing samples.
Replacing samples while the sample stage is hot may result in burn injuries.

1

Press SET to change the set temperature.

2

Press <MODE to change the flashing digit.
Use ∧ and ∨ to change the temperature setting.

Press SET to return to the operation display state.

3

After returning the POWER ADJ. knob, wait for the temperature to drop and turn the control
switch on the front panel to OFF.

NOTE
 If you press the wrong button or perform an incorrect operation, press SET button to return to theoperating status display. Repeat the procedure.

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6. Measurement

6-1 Measurement precautions

6

Measurement
6-1 Measurement precautions
Observe the following precautions when performing measurements.
Failure to do so may affect measurements.
 Avoid sample contamination.
Use tweezers or similar implements to handle samples. Avoid breathing on the samples. Doing so may
result in adsorption of moisture from exhaled air.
 Use tweezers or an air blower to remove any dust.
Dust particles tend to be quite small relative to the areas being measured and will typically not affectmeasurements.
 Mount the sample in the measurement area. The measurement area on the AC-2S and AC-2S Pro α is
a 4 mm × 4 mm square area at the center of the sample stage. The measurement area on the AC-2S
Pro β measures 0.4 mm × 0.4 mm (two ellipses with a minor diameter measuring approximately 0.2 mm
and a major diameter measuring approximately 0.4 mm) at the center of the sample stage. At least
90 % of the emitted UV light is incident on the measurement area. If a mixture of two or more materials
is placed on the surface of the measurement area, photoelectrons will be emitted from all materials. The
area around the measurement area will also be irradiated with very low intensity UV light.
 Be sure to adjust the height of the sample stage.
The height gauge can be used to adjust the height to within ±0.2 mm of the measurement face. The
incident UV is directed from the optical fiber to the measurement face at an angle of 30°. This means aheight offset of 0.2 mm will result in an offset of 0.35 mm in the incident UV position.
 Plate samples must have sides measuring between 20 and 50 mm and may not exceed 10 mm inthickness. Powder samples must fit in the powder tray. Samples not meeting these requirements cannot
be clamped to the sample stage and may fall off during measurement.
 Proceed carefully when mounting samples similar in size to the measurement area or smaller.
For example, when measuring the photoemission characteristics from a 4 mm × 4 mm square ITO
pattern on a 20 mm × 20 mm square aluminum plate using the AC-2S, approximately 10 % of the UV
light irradiated will be incident on the aluminum even if the sample position and stage height areproperly adjusted. The photoemission yield of aluminum is at least 50 times that of ITO. The
measurement results will indicate the photoemission characteristics of aluminum. In cases like this,apply tape preventing photoemission to mask areas you do not want to measure.
 Measure at areas exhibiting photoelectron count rates not exceeding 4,000 cps.
Measurement accuracy will be significantly reduced at count rates exceeding 4,000 cps. Use the UV
intensity to adjust the photoelectron count rate.

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6. Measurement

6-2 Launching the AC-2S measurement application

6-2 Launching the AC-2S measurement application
6-6-2 Launching the AC-2S measurement application
1

Double-click the AC-2S measurement application shortcut icon on the control PC desktop.

The AC-2S measurement application starts, and a guidance window appears.

NOTE If you do not see the shortcut icon on the control PC desktop, open the Windows Start menu andselect [AC-2S_Measure] from the Start menu list.

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6. Measurement

6-2 Launching the AC-2S measurement application

6-2-2 AC-2S measurement application main window component names andfunctions
The AC-2S measurement application main window displays measurement conditions and results.
①

②
③

④
⑤

No.

Name

Function

Menu display

Displays AC-2S measurement application functions as tabs. Click atab to display the corresponding menu.

②

Graph

Plots measurement points.

③

Measurement
conditions

Displays measurement conditions.
The conditions displayed depend on the measurement being
performed.

④

Data table

Displays measurements.

⑤

Status pane

Displays measurement status.

①

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6. Measurement

6-2 Launching the AC-2S measurement application

6-2-3 Files created by the AC-2S measurement application
The following files are created when the AC-2S measurement application is used to performmeasurements:<Work function measurement results files>
Type

Description

Measurement data file (*.dat)

File containing work function measurement results

Multi data file (*.mdat)

File containing the mean of multiple measurement results
This is created if the work function is measured more than once.

Incident UV Spectrum file (*.ldat)

File containing the Incident UV Spectrum

 The measurement data file (*.dat) and multi data file (*.mdat) are saved to a user-specified folder in the\Documents\RikenKeikiPYSA\AC-2S\Data directory.
 If the work function is measured more than once, the software will create folders named after the
sample. The corresponding measurement data file (*.dat) and multi data file (*.mdat) are saved to thatfolder.
 The Incident UV Spectrum file (*.ldat) is saved to the \Documents\RikenKeikiPYSA\AC-2S\UV folder.

<Calibration curve/film thickness measurement results files>
Type

Pro α

Pro β

Description

Count rate data file (*.sdat)

File containing count rate data for a reference sample

Calibration curve file (*.cdat)

File containing multiple count rate data files
This is created if a calibration curve file is created.
(Refer to ‘6-6 Creating and editing calibration curve files’.)Film thickness data file (*.tdat)

File containing film thickness estimated based on the count rate
data and calibration curve file.

 The count rate data file (*.sdat), calibration curve file (*.cdat), and film thickness data file (*.tdat) are
saved to a user-specified folder in the \Documents\RikenKeikiPYSA\AC-2S\Data\CAL folder.

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6. Measurement

6-3 Main unit preparation

6-3 Main unit preparation
6-3-1 Dry compressed air supply and unit connection
Supply dry compressed air to the AC-2S DC unit. Connect the AC-2S DC unit to the AC-2S LC unit.
1

Supply dry compressed air to the AC-2S DC unit.
If you are using a compressor, turn on the power for the compressor.
If you are supplying air via factory pipes, open the supply valve.

2

Check to confirm that dry compressed air is being supplied, then click the [Check that thecompressed air is supplied.] button in the guidance window.

3

Turn on the power switch on the right side of the AC-2S LC unit.

The product will begin warming up. The POWER/STANDBY LED will blink.
The POWER/STANDBY LED will remain continuously lit once the warmup is complete (after
approximately 30 minutes).

36 / 141

6. Measurement

4

6-3 Main unit preparation

Click the [Check that the AC-2S is running.] button in the guidance window.

The TROUBLE LEDs on the AC-2S LC and AC-2S DC units blink to indicate that the operation is
being checked.
5

Click [Connect] in the guidance window once the AC-2S LC and AC-2S DC unit TROUBLE LEDs
go out.

CAUTION Do not click the [Connect] button while the TROUBLE LEDs are blinking.
Clicking the [Connect] button while the TROUBLE LEDs are blinking may cause the system tomalfunction.
 Contact Riken Keiki if a message appears indicating that consumable parts need to be replaced.

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6. Measurement

6-3 Main unit preparation

NOTE An error or problem has occurred if the TROUBLE LEDs light up continuously. If this occurs, click
the [Connect] button, and notify Riken Keiki of the error location and self-diagnostic result value.
Example: AC-2S LC unit fan error

Self-diagnosis
result38 / 141

6. Measurement

6-3 Main unit preparation

6-3-2 Initializing the UV intensity controller and setting the detector voltage
After connecting the AC-2S LC and AC-2S DC units, initialize the UV intensity controller and set thedetector voltage.

<AC-2S>
1

Click the [Preparation] button in the guidance window.
The guidance window status pane will indicate the operations currently underway.

Status pane

The AC-2S measurement application main window appears once main unit setup is complete.

NOTE Check the [Automatic adjustment of UV intensity after preparation] check box in the guidance
window, specify UV intensity, and click the [Preparation] button. The UV intensity is set automaticallyafter main unit setup is complete. (Refer to ‘6-4-4 Setting the Incident UV Spectrum’.)

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6. Measurement

6-3 Main unit preparation

CAUTION Depending on operating system specifications, communication with the main unit may not be
possible if this application or other software is running while connected or during measurement.
Do not perform any other processing on the control PC while this application is communicating withthe main unit to establish connection or perform measurements.

<AC-2S Pro α/AC-2S Pro β>1

Check to confirm that the plasma light source (LDLS) LASER ON LED and LAMP ON are bothlit, then click the [LDLS lamp power supply] button in the guidance window.

2

Click the [Preparation] button in the guidance window.
The guidance window status pane will indicate the operations currently underway.

Status pane

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6. Measurement

6-3 Main unit preparation

41 / 141

6. Measurement

6-3 Main unit preparation

The main window appears once main unit setup is complete.

NOTE Check the [Automatic adjustment of UV intensity after preparation] check box in the guidance
window, specify UV intensity, and click the [Preparation] button. The UV intensity is set automaticallyafter main unit setup is complete. (Refer to ‘6-4-4 Setting the Incident UV Spectrum’.)

CAUTION Depending on operating system specifications, communication with the main unit may not be
possible if this application or other software is running while connected or during measurement.
Do not perform any other processing on the control PC while this application is communicating withthe main unit to establish connection or perform measurements.

42 / 141

6. Measurement

6-4 Work function measurement

6-4 Work function measurement
6-4-1 Selecting the work function

Proα

1

Click the [Layout Selection] tab on the main window.

2

Click [] for [Layout], then select [Work function].

Proβ

1
2

6-4-2 Setting the measurement data file save destination folder
1

Click the [Measurement] tab on the main window.

2

Click the [Save as] button for [Folder].
1

2

The browse window appears.
3

Specify the save destination folder, then click the [OK] button.
Specify a folder within the \Documents\RikenKeikiPYSA\AC-2S\Data directory.

NOTE To create a new save destination folder from the browse window, right-click on the folder in which
the new folder is to be created in tree view on the left side of the browse window, then select[Save as].

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6. Measurement

6-4 Work function measurement

The name of the save destination folder is displayed in [Save folder] on the main window.

6-4-3 Setting work function measurement conditions
Set the following measurement conditions:Typicalmeasurement
condition

Setting details

Start energy

4.20

Sets the incident UV energy at the start of measurement (units: eV).

End energy

6.20

Sets the incident UV energy at the end of measurement (units: eV).

Step

0.10

Sets measurement intervals from start energy to end energy (units:eV).

Acquisitiontime

5 - 10

Sets the acquisition time for each energy level (units: seconds).

UV intensity

10.00

Sets the UV intensity for measurement (units: nW).
Enter a value between the maximum and minimum allowable UV
intensity values.

Exponent

0.50

Sets the exponential value for the vertical axis when plotting data on
the graph.
Enter a decimal value not exceeding 1.

Setting item

NOTE
 The appropriate UV intensity depends on the particular sample. To measure the work function of a
new sample, uncheck [Incident UV spectrum] on the main window, then perform preliminary
measurements using a provisional UV intensity. After obtaining the appropriate UV intensity in the
preliminary measurements, use that UV intensity to obtain the Incident UV Spectrum, then measure
the work function once again.
Increasing the step interval for preliminary measurement will reduce the time required.

Set measurement conditions by any of the following methods:
 Direct input
 Select from saved measurement conditions.

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6. Measurement

6-4 Work function measurement

 Use same conditions as past measurement data.

45 / 141

6. Measurement

6-4 Work function measurement<Direct input>
1Enter the individual measurement conditions for [Work Function].
Select the values for [Start energy [eV]], [End energy [eV]], and [Step [eV]] from the corresponding
drop-down lists.

NOTE
 Click the [Record conditions] on the [Measurement] tab to store up to ten set measurement
conditions.

<Select from saved measurement conditions>
1

Click the [Measurement] tab on the main window.

2

Click the [Sel. from record] button for [Conditions].
1

2

A window appears with a list of saved measurement conditions.

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6. Measurement

3

6-4 Work function measurement

Select the desired measurement condition, then click the [OK] button.

The selected measurement condition is displayed in the measurement condition input box on the main
window.
You can edit the measurement condition entered in the main window.

<Use the same condition as for past measurement data>
1

Click the [Measurement] tab on the main window.

2

Click the [Load prev. data] button for [Conditions].
1

2

The browse window appears.
3

Select the desired data file, then click the [OK] button.

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6. Measurement

6-4 Work function measurement

6-4-4 Setting the Incident UV Spectrum
Set the Incident UV Spectrum.
Set the Incident UV Spectrum by any of the following methods:
 Set a new Incident UV Spectrum.
 Use a previously measured Incident UV Spectrum.

<Set a new Incident UV Spectrum>
1

Click the [Measurement] tab on the main window.

2

Click the [Create] button for [Light Intensity Factor].
1

2

Incident UV Spectrum measurement starts. The values are plotted on the graph.

3

Press the [OK] button when the following message appears:

NOTE Specifying UV intensity values close to the maximum or minimum value may make it impossible toset a Incident UV Spectrum within ±5 % of the setting.
 Click the [Cancel Measurement] button on the measurement window while Incident UV Spectrum isbeing measured to abort the measurement.

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6. Measurement

6-4 Work function measurement<Use a previously measured Incident UV Spectrum>
1

Click the [Measurement] tab on the main window.

2

Click the [Reference] button for [Light Intensity Factor].
1

2

The browse window appears.
3

Select the desired Incident UV Spectrum file, then click the [OK] button.

CAUTION The Incident UV Spectrum files available for selection are files for which the UV intensity is the sameand measurement conditions fall within the measurement range (start energy, end energy, step). A
warning will appear if the file was not measured on the same day.

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6. Measurement

6-4 Work function measurement

6-4-5 Mounting samples
Mount the sample in the AC-2S DC unit.
1

Click the [Sample] tab on the main window.

2

Click the [Move Stage] button.
1
2

3

Click the [OK] button when the sample stage move confirmation message appears.

The sound of the stage operation ends, and the following message appears.
Do not click the [OK] button here.

4

Gently press the sample inlet cover with your finger to open.
The AC-2S DC unit OPEN LED lights up.

CAUTION Failure of the OPEN LED to light up may indicate a fault. Take care if this occurs. The stage may
move even when the sample inlet is open.

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6. Measurement

6-4 Work function measurement

5

Place the sample at the center of the sample stage, then adjust the height of the height gauge.

6

Clamp the sample with the clips.
Height gauge

Clips

SampleSample stageWARNING Be sure to adjust the height of the sample using the height gauge.
If the sample is positioned above the probe on the height gauge, the sample may strike the detector
or other parts, potentially damaging the sample or the product.
 Push the height gauge to pull it out from the side of the sample stage.
Any of the following actions may damage the height gauge:
・ Subjecting the height gauge to a force of 20 N or more from above, below, or diagonally・ Pulling out the height gauge by the tip (pin).

7

Close the sample inlet cover.
The AC-2S DC unit OPEN LED goes out.

8

Click the [OK] button on the message window.

<High-temperature measurement>

Pro α

Pro β

For high temperature measurements, set the sample stage temperature after mounting the sample.
For more information on sample stage temperature settings, refer to ‘5-2 Heated sample stage
temperature adjustment’.

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6-4 Work function measurement

6-4-6 Starting single-point measurement
Single-point measurement involves irradiating and measuring a single point on the sample with UV light.
1

Click [] for [Operating mode] on the main window, then select [Normal].

2

Click the [Measurement] button for [Measurement].
2

1

The measurement start window appears.

NOTE
 Check [Incident UV spectrum] to correct UV intensity. Uncheck [Incident UV spectrum] to correct UV
intensity later.
For more information on setting the Incident UV Spectrum, refer to ‘6-4-4 Setting the Incident UVSpectrum’.

3Enter the sample name for [Sample name].

4Enter the number of measurements (1 - 1000) for [N=].

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3
4

NOTE

Pro β

 The position of the sample must be fine-tuned when mounting small samples on the AC-2S Pro β.
Failure to do so may result in a sample being offset from the center of the sample stage. (Refer to‘<Fine adjust sample position>’ in this section.)5

Click the [Measurement] button.

Measurement starts. The count is plotted in sequence for each energy on the main window.

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The horizontal axis of the graph represents incident UV energy in units of eV. The vertical axis
represents the exponent for photoelectron yield. The upper limit of the vertical axis is automatically set
to approximately 4000^n, where n is the exponent. For example, if n is 0.5, the upper limit of thevertical axis will be approximately 65.

NOTE Click the [Cancel Measurement] button on the measurement window while the work function is
being measured to abort the measurement.

CAUTION Depending on operating system specifications, communication with the main unit may not be
possible if this application or other software is running while connected or during measurement.
Do not perform any other processing on the control PC while this application is communicating withthe main unit to establish connection or perform measurements.

6

Click the [OK] button when measurement has ended and the following message appears.

NOTE
 For low UV intensity values or if the measurement energy range has not been appropriately set,revise the settings for [UV intensity [nW]], [Start energy [eV]], and [End energy [eV]] in themeasurement conditions before repeating measurement.

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7

6-4 Work function measurement

Remove the sample.
Remove the sample. Refer to ‘6-4-5 Mounting samples’.

NOTE The measurement results are saved to the specified destination folder. (Refer to ‘6-4-2 Setting
measurement data file save destination folder’.) The measurement results are saved as measurement data files (*.dat). If measurement isperformed more than once, the software will create folders named after the sample. The
corresponding measurement data file (*.dat) and multi data file (*.mdat) are saved to that folder.
 The Incident UV Spectrum file (*.ldat) is saved to the \Documents\RikenKeikiPYSA\AC-2S\UV
folder.

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6. Measurement<Fine adjust sample position>

6-4 Work function measurement

Pro β

The position of small samples must be fine-tuned if there is any risk that the sample will be offset from thecenter of the sample stage.
The measurement area on the AC-2S Pro β consists of two ellipses (with a minor diameter measuring
approximately 0.2 mm and a major diameter measuring approximately 0.4 mm) at the center of thesample stage.

Approx. 0.2 mm

Approx. 0.4 mm

1Click the [Shift Adjustment] button on the measurement start window.

The shift adjustment window is displayed.
2

Click [] for [Starting position [mm]] and [Finished position [mm]], then select the shift amountfor the measurement start or end positions.
The shift amount can be set in the range -2.0 to 2.0.

3

Click [] for [Acquisition Energy [eV]], then select the measurement energy.
Leave the values for [Step [mm]] and [Acquisition Time [sec]] unchanged.

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4

6-4 Work function measurement

Click the [Start] button.
2
3
4

The sample position is fine adjusted.

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6-4 Work function measurement

6-4-7 Starting multi-point measurement
Multi-point measurement involves irradiating and measuring multiple points on the sample with UV light.
Up to four points can be specified.
1

Click [] for [Operating mode] on the main window, then select [Multiple Point].

2

Click the [Measurement] button for [Measurement].
2

1

The measurement start window appears.

NOTE
 Check [Incident UV spectrum] to correct UV intensity. Uncheck [Incident UV spectrum] to correct UV
intensity later.
For more information on setting the Incident UV Spectrum, refer to ‘6-4-4 Setting the Incident UVSpectrum’.

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3Enter the sample name for [Sample name].

4

Click to select the measurement position(s) on the measurement start window.
Click areas [1] to [4] on the sample stage view to select the desired measurement positions.
Blue squares indicate the selected measurement positions. (In the example shown below,
measurement positions [1], [2], and [4] are selected.)

5Enter the number of measurements for [N=] for each measurement position.

3
5
Measurement positions are
displayed.
4

NOTE In the measurement start window, click and select a measurement position in sample stage view todisplay the measurement positions from [Point 1] to [Point 4] in [Spot] for [Spot directed on
photograph]. You can edit the names of the measurement positions.

6

Click the [Start] button.

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6-4 Work function measurement

Measurement starts. The count is plotted in sequence for each energy on the main window.

The horizontal axis of the graph represents incident UV energy in units of eV. The vertical axis
represents the exponent for photoelectron yield. The upper limit of the vertical axis is automatically set
to approximately 4000^n, where n is the exponent. For example, if n is 0.5, the upper limit of thevertical axis will be approximately 65.

NOTE
 The following window appears if you click the [Cancel Measurement] button on the measurement
window while measuring the work function.
Select the preferred measurement abort procedure, then click the [OK] button.

 The color of the square indicates the measurement status at each measurement position.
Blue indicates a position not yet measured. Red indicates a position currently being measured. Pink
indicates a position that has already been measured.

Not yet measured
Being measured
Already measured

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CAUTION Depending on operating system specifications, communication with the main unit may not be
possible if this application or other software is running while connected or during measurement.
Do not perform any other processing on the control PC while this application is communicating withthe main unit to establish connection or perform measurements.

7

Click the [OK] button when measurement has ended and the following message appears.

NOTE
 For low UV intensity values or if the measurement energy range has not been appropriately set,revise the settings for [UV intensity [nW]], [Start energy [eV]], and [End energy [eV]] in themeasurement conditions before repeating measurement.

8

Remove the sample.
Remove the sample. Refer to ‘6-4-5 Mounting samples’.

NOTE The measurement results are saved to the specified destination folder. (Refer to ‘6-4-2 Setting
measurement data file save destination folder’.) The measurement results are saved as measurement data files (*.dat). If measurement isperformed more than once, the software will create folders named after the sample. The
corresponding measurement data file (*.dat) and multi data file (*.mdat) are saved to that folder.
 The Incident UV Spectrum file (*.ldat) is saved to the \Documents\RikenKeikiPYSA\AC-2S\UV
folder.

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6. Measurement

6-5 Calibration curve measurement

6-5 Calibration curve measurement

Pro α

Pro β

Measure the calibration curve for a sample of known film thickness.

6-5-1 Selecting calibration curve measurement
1

Click the [Layout Selection] tab on the main window.

2

Click [] for [Layout], then select [Calibration curve].
12

6-5-2 Setting the count rate data file save destination folder
1

Click the [Measurement] tab on the main window.

2

Click the [Save as] button for [Folder].
1

2

The browse window appears.
3

Specify the save destination folder, then click the [OK] button.
Specify a folder within the \Documents\RikenKeikiPYSA\AC-2S\Data\CAL directory.

NOTE To create a new save destination folder from the browse window, right-click on the folder in which
the new folder is to be created in the folder tree view list on the left side of the browse window, thenselect [Save as].

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6-5 Calibration curve measurement

The name of the save destination folder is displayed in [Save folder] on the main window.

6-5-3 Setting calibration curve measurement conditions
Set the following measurement conditions:
Setting item

Setting details

Sample nameSets the name of the sample to be measured.

Acquisition Energy

Sets the energy for measuring calibration curves (units: eV).
Example: 5.90 eV

Acquisition Count

Sets the number of calibration curve measurements.
Example: 5

Acquisition Time

Sets the acquisition time for each energy level (units: seconds).
Example: 10 seconds

UV Intensity

Sets the UV intensity for measurement (units: nW).
Enter a value between the maximum and minimum allowable UV intensity
values.

Thickness

Sets the film thickness of the reference sample (units: nm).

NOTE Use the sample and tweezers provided when using the AC-2S measurement application for the firsttime. Measure as specified in this manual. Set the required measurement conditions. Refer to theexamples provided.

Set measurement conditions by any of the following methods:
 Direct input
 Select from saved measurement conditions.
 Use same conditions as past measurement data.

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6-5 Calibration curve measurement<Direct input>
1Enter the individual measurement conditions for [Calibration].
Select the value for [Acquisition Energy [eV]] from the drop-down list.

NOTE Click the [Record conditions] on the [Measurement] tab to store up to ten set measurement
conditions.

<Select from saved measurement conditions>
1

Click the [Measurement] tab on the main window.

2

Click the [Sel. from record] button for [Conditions].
1

2

A window appears with a list of saved measurement conditions.

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6. Measurement

3

6-5 Calibration curve measurement

Select the desired measurement condition, then click the [OK] button.

The selected measurement condition is displayed in the measurement condition input box on the main
window.
You can edit the measurement condition entered in the main window.

<Use the same condition as for past measurement data>
1

Click the [Measurement] tab on the main window.

2

Click the [Load prev. data] button for [Conditions].
1

2

This displays a list of count rate data files.
3

Select the desired file, then click the [OK] button.

6-5-4 Mounting samples
Mount the sample.
Mount the sample in the AC-2S DC unit. Refer to ‘6-4-5 Mounting samples’.

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6-5 Calibration curve measurement

6-5-5 Starting calibration curve measurement
1

Click the [Measurement] tab on the main window.

2

Click the [Measurement] button for [Measurement].
1

2

Calibration curve measurement starts.
3

Click the [OK] button when measurement has ended and the following message appears.

The count rate data file (*.sdat) is saved to the specified save destination folder. (Refer to ‘6-5-2
Setting count rate data file save destination folder’.)4

Remove the sample.
Remove the sample. Refer to ‘6-4-5 Mounting samples’.

NOTE At least two calibration curve results (count rate data files) for a reference sample of known film
thickness are required to create a calibration curve file.
To continue and measure the calibration curve for a different reference sample, measure in thesame way as described from ‘6-5-1 Selecting calibration curve measurement’ to ‘6-5-5 Starting
calibration curve measurement’.

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6. Measurement

6-6 Creating and editing calibration curve files

6-6 Creating and editing calibration curve files

Pro α

Pro β

6-6-1 Creating calibration curve files
Create a calibration curve file based on measurements of at least two reference samples of known film
thickness.
The calibration curve is a file containing multiple count rate data files.
1

Click the [Measurement] tab on the main window.

2

Click [Create Calib] for [Calibration Curve].

1
2

The create new calibration curve window appears.
3

Right-click on the calibration curve data list, then select [Add data].

Data list

The browse window appears.

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6. Measurement

6-6 Creating and editing calibration curve files

4

Click and select the desired count rate data file, then click the [OK] button.
Only one file can be selected at a time.

5

Repeat steps 3 to 4 to select the count rate data files you wish to include in the calibration
curve file.

6

Right-click on the calibration curve data list, then select [plot].
This creates a calibration curve file.

7

Click the [Save] button.
The calibration curve file (*.cdat) is saved.

8

Click the [Close] button.
The create new calibration curve window closes.

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6

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6-6 Creating and editing calibration curve files

6-6-2 Editing calibration curve files

CAUTION Calibration curve files cannot be edited after they are calibrated. (Refer to ‘6-6-3 Calibrating
calibration curve files’.)1

Click the [Measurement] tab on the main window.

2

Click [Edit Calib] for [Calibration Curve].
1

2

The browse window appears.
3

Select the calibration curve file you wish to edit, then click the [OK] button.

The data for the selected calibration curve appears in the edit calibration curve window.
4

Click and select the calibration curve data you wish to edit from the calibration curve data list.

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6. Measurement

5

6-6 Creating and editing calibration curve files

Right-click on the selected calibration curve data to edit.
The following editing operations are available:
Right-click menu

Editing details

Add data

Adds a different count rate data file to the file currently being edited.
Select the desired count rate data file in the browse window.

T/F

Enables and disables calibration curve data.

Plot

Replots a calibration curve graph.

6

Click the [Save] button once editing is complete.
The calibration curve file is saved.

7

Click the [Close] button.
The edit new calibration curve window closes.

6
7

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6-6 Creating and editing calibration curve files

6-6-3 Calibrating calibration curve files
Remeasure calibration curves to calibrate a calibration curve file. A calibration sample is required tocalibrate calibration curves. Calibration consists of single-point calibration. Multi-point calibration is notpossible.
1

Measure the calibration curve for the sample to be used for calibration. (Refer to ‘6-5
Calibration curve measurement’.)2

Click the [Measurement] tab on the main window.

3

Click [Calibrate] for [Calibration].
2

3

The browse window appears.
4

Select the calibration curve file you wish to calibrate, then click the [OK] button.

The data for the selected calibration curve is displayed in the calibration curve calibration window.

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5

6-6 Creating and editing calibration curve files

Right-click on the calibration curve data list, then select [Select calibration data].

The browse window appears.
6

Select the count rate data file for calibration measured in Step 1, then click the [OK] button.

The mean value of the data in the selected count rate data file is input as [0] for [Data]. The calibrated
calibration curve is plotted on the graph.

NOTE To cancel calibration, right-click on the calibration curve data list, then select [Clear Calibration].

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6-6 Creating and editing calibration curve files

7

Click the [Save] button.
The calibration curve file is saved.

8

Click the [Close] button.
The calibration curve calibration window closes.

78

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6. Measurement

6-7 Film thickness measurement

6-7 Film thickness measurement

Pro α

Pro β

Measure film thickness using the count rate data file or calibration curve file.

6-7-1 Selecting film thickness measurement
1

Click the [Layout Selection] tab on the main window.

2

Click [] for [Layout], then select [Thickness].
12

6-7-2 Setting the film thickness data file save destination folder
1

Click the [Measurement] tab on the main window.

2

Click the [Save as] button for [Folder].
1

2

The browse window appears.

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6. Measurement3

6-7 Film thickness measurement

Specify the save destination folder, then click the [OK] button.
Specify a folder within the \Documents\RikenKeikiPYSA\AC-2S\Data\CAL directory.

NOTE To create a new save destination folder from the browse window, right-click on the folder in which
the new folder is to be created in the folder tree view list on the left side of the browse window, thenselect [Save as].

The name of the save destination folder is displayed in [Save folder] on the main window.

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6-7-3 Calling up calibration curve files
1

Click the [Measurement] tab on the main window.

2

Click [Calibration Curve] for [Calibration Curve].
1

2

The browse window appears.
3

Select the desired calibration curve file, then click the [OK] button.

6-7-4 Setting film thickness measurement conditions
Set the following measurement conditions:
Setting item

Setting details

Sample nameSets the name of the sample to be measured.

Acquisition Energy

Sets the energy for measuring calibration curves (units: eV).
Example: 5.90 eV

Acquisition Count

Sets the number of calibration curve measurements.
Example: 5

Acquisition Time

Sets the acquisition time for each energy level (units: seconds).
Example: 10 seconds

UV Intensity

Sets the UV intensity for measurement (units: nW).
Enter a value between the maximum and minimum allowable UV intensity
values.

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6-7 Film thickness measurement

NOTE Use the sample and tweezers provided when using the AC-2S measurement application for the firsttime. Measure as specified in this manual. Set the required measurement conditions. Refer to theexamples provided.
Set measurement conditions by any of the following methods:
 Direct input
 Select from saved measurement conditions.
 Use same conditions as past measurement data.

<Direct input>
1Enter the individual measurement conditions for [Thickness].
Select the value for [Acquisition Energy [eV]] from the drop-down list.

NOTE Click the [Record conditions] on the [Measurement] tab to store up to ten set measurement
conditions.

<Select from saved measurement conditions>
1

Click the [Measurement] tab on the main window.

2

Click the [Sel. from record] button for [Conditions].
1

2

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6-7 Film thickness measurement

A window appears with a list of saved measurement conditions.

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6. Measurement3

6-7 Film thickness measurement

Select the desired measurement condition, then click the [OK] button.

The selected measurement condition is displayed in the measurement condition input box on the main
window.
You can edit the measurement condition entered in the main window.

<Use the same condition as for past measurement data>
1

Click the [Measurement] tab on the main window.

2

Click the [Load prev. data] button for [Conditions].
1

2

The browse window appears.
3

Select the desired film thickness data file, then click the [OK] button.

6-7-5 Mounting samples
Mount the sample.
Mount the sample in the AC-2S DC unit. Refer to ‘6-4-5 Mounting samples’.

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6-7 Film thickness measurement

6-7-6 Starting film thickness measurement
1

Click the [Measurement] tab on the main window.

2

Click the [Measurement] button for [Measurement].
1

2

Calibration curve measurement starts.
3

Click the [OK] button when measurement has ended and the following message appears.

The film thickness data file (*.tdat) is saved to the specified save destination folder. (Refer to ‘6-7-2
Setting film thickness data file save destination folder’.)4

Remove the sample.
Remove the sample. Refer to ‘6-4-5 Mounting samples’.

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6-8 UV intensity controller and detector maintenance

6-8 UV intensity controller and detector maintenance
If measurements are performed continuously for 24 hours or longer or if the temperature or atmosphericpressure changes, initialize the UV intensity controller and reset the anode voltage.

6-8-1 Initializing the UV intensity controller
1

Click the [Maintenance] tab on the main window.

2

Click the [Initialize] button for [Light adjuster].

1

2

The UV intensity controller is initialized automatically.

6-8-2 Resetting the anode voltage
1

Click the [Maintenance] tab on the main window.

2

Click the [Anode voltage] button for [Detector].

1

2

The anode voltage is automatically reset.

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6-8 UV intensity controller and detector maintenance

6-8-3 Readjusting the dead time
Readjust the detector dead time. Readjusting the dead time takes approximately 30 minutes.
For more information on dead time, refer to ‘14-1-1 Photoelectron detection principle’.
* Dead time readjustments are performed at Riken Keiki when the detector is replaced. This procedure is not
performed by the end user.

1

Click the [Maintenance] tab on the main window.

2

Click the [Dead time] button for [Detector].

1
2

3

Click the [OK] button when the sample stage move confirmation message appears.

The sample stage moves to the sample replacement position.
4

Gently press the sample inlet cover with your finger to open.
The AC-2S DC unit OPEN LED lights up.

CAUTION Failure of the OPEN LED to light up may indicate a fault. Take care if this occurs. The stage may
move even when the sample inlet is open.

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6. Measurement

6-8 UV intensity controller and detector maintenance5

Mount the provided sample on the sample stage.

6

Close the sample inlet cover.
The AC-2S DC unit OPEN LED goes out.

7

Click the [OK] button on the message window.

The dead time is readjusted.

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6-9 Quitting measurement

6-9 Quitting measurement<AC-2S>
1

Click the [Measurement] tab on the main window.

2

Click the [Exit] button for [Exit].

1
2

The AC-2S measurement application closes.
3

Turn off the power switch on the right side of the AC-2S LC unit.

4

Shut off the dry compressed air supply.

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6. Measurement

6-9 Quitting measurement<AC-2S Pro α/AC-2S Pro β>
1

Click the [Measurement] tab on the main window.

2

Click the [Exit] button for [Exit].
1
2

The AC-2S measurement application closes.
3

Turn off the power switch on the right side of the AC-2S LC unit.

4

Shut off the dry compressed air supply.

5

Flip down the OPERATE switch on the plasma light source (LDLS) to turn the power off.

The LAMP ON LED goes out.

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7. Analysis

7-1 Launching the AC-2S analysis application

7

Analysis
7-1 Launching the AC-2S analysis application
7-1-1 Launching the AC-2S analysis application
1

Double-click the AC-2S analysis application shortcut icon displayed on the control PC desktop.

The AC-2S analysis application main window appears.

NOTE If you do not see the shortcut icon on the control PC desktop, open the Windows Start menu andselect [AC-2S_Analyze] from the Start menu list.

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7-1 Launching the AC-2S analysis application

7-1-2 AC-2S analysis application main window component names andfunctions
The AC-2S analysis application main window contains the Data Manager and graph form windows.
①

②
③

④

No.

Name

Function①

Menu display

Displays AC-2S analysis application functions as tabs. Click a tab todisplay the corresponding menu.

②

Data Manager

Manages files handled by the AC-2S analysis application.
For more information on Data Manager, refer to ‘7-5 Filemanagement’.

③

Graph form

Displays the graph, measurement conditions, and data list for the fileselected in Data Manager.
Modify graph X and Y axis settings, supplementary line spacing, andother settings here. (Refer to ‘7-4 Customizing the graph display’.)④

Status bar

Displays the file name of the data in the top-most window. This also
displays the coordinates of the cursor position when a graph isdisplayed.
Click the [Status Bar] button on the [View] tab of the main window toshow/hide the status bar.

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7-1 Launching the AC-2S analysis application

7-1-3 Files handled by the AC-2S analysis application
The following files can be handled using the AC-2S analysis application:<Work function measurement results files>
Type

Description

Measurement data file (*.dat)

File containing work function measurement results.

Multi data file (*.mdat)

File containing the mean of multiple measurement results.
This file is created in the following cases:
・ When more than one measurement is performed with the AC-2S
measurement application
・ When calculating the mean for multiple measurement results with the
AC-2S analysis application

Differential results file (*.ddat)

File containing the density of states calculated from measurement
results.
This file is created when estimating the density of states for a multi
data file using the analysis application.

Incident UV Spectrum file(*.ldat)

File containing the Incident UV Spectrum.

 The measurement data file (*.dat) and multi data file (*.mdat) are saved to a user-specified folder in the\Documents\RikenKeikiPYSA\AC-2S\Data folder.
 The Incident UV Spectrum file (*.ldat) is saved to the \Documents\RikenKeikiPYSA\AC-2S\UV folder.

<Calibration curve/film thickness measurement results files>
Type

Pro α

Pro β

Description

Count rate data file (*.sdat)

File containing count rate data for a reference sample.

Calibration curve file (*.cdat)

File containing multiple count rate data files.
This file is created when creating a calibration curve file using themeasurement application. (Refer to ‘6-6 Creating and editing
calibration curve files’.)Film thickness data file (*.tdat)

File containing film thickness estimated based on count rate data andcalibration curve file.

 The count rate data file (*.sdat), calibration curve file (*.cdat), and film thickness data file (*.tdat) are
saved to a user-specified folder in the \Documents\RikenKeikiPYSA\AC-2S\Data\CAL folder.

NOTE Only the files described above are displayed in Data Manager in the AC-2S analysis application.
Files with file format errors may not appear in Data Manager.
 Existing product data must be converted using the Riken Keiki conversion software.
 We recommend backing up files periodically.

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7. Analysis

7-2 Opening measurement results files

7-2 Opening measurement results files
Open a file measured with the AC-2S measurement application to display the graph in the graph form
window.

7-2-1 Plotting measurement results on a graph
1

Click and select the file to be displayed as a graph in Data Manager.

2

Right-click on the selected file, then select [Open].
You can also click the [File] tab in the main window, then click the [Open] button to open the files.

The graph for the selected file is displayed in the graph form window.
・ Measurement data file display example

AC-2S

・ Measurement data file display example

Pro α

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7. Analysis

7-2 Opening measurement results files

・ Differential results file display example

・ Incident UV Spectrum file display example

・ Multi data file display example

NOTE With multi data files, right-click on the graph and select [Details] to display the individual data used
to calculate the mean.

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7. Analysis

・ Count rate data file display example

7-2 Opening measurement results files

Pro α

Pro β

Horizontal axis: Cycles (No. value), Vertical axis: Log CR・ Calibration curve file display example

Pro α

Pro β

Horizontal axis: Log CR, Vertical axis: Thickness

・ Film thickness data file display example

Pro α

Pro β

Horizontal axis: Cycles (No. value), Vertical axis: Log CR

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7. Analysis

7-2 Opening measurement results files

NOTE Multiple open windows displayed in the main window of the AC-2S analysis application can bedisplayed tiled, cascaded, or as a list.
Click the [Window] tab in the main window, then click the [Tile vertically], [Tile horizontally], or[Windows] button as required.
Click the [All Close] button to close all windows displayed in the main window.

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7. Analysis

7-2 Opening measurement results files

7-2-2 Plotting multiple measurement results on a single graph
Up to ten files of the same type can be displayed simultaneously on a single graph.
1

Select the multiple files to be displayed as a graph in Data Manager.
Select files of the same type.
Click on the required files while pressing the Ctrl key to select multiple files.
Click two files while pressing the Shift key to select all files between the two files.

2

Right-click on the selected files, then select [Open].
You can also click the [File] tab in the main window, then click the [Open] button to open the files.

The graphs for the multiple selected files are displayed simultaneously in the graph form window.

NOTE Right-click on the graph and select [Add] to open and display another file as an overlaid graph.
 Right-click on a graph and select [Remove] to close the selected graph.
 Click [] for the file name to the right of the graph display to switch the currently selected file.
Indicates the currently selected file.

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7. Analysis

7-3 Analyzing measurement results

7-3 Analyzing measurement results
7-3-1 Changing the Incident UV Spectrum
The Incident UV Spectrum can be changed by selecting a different file or UV intensity correction can bedisabled.

CAUTION
You can change the Incident UV Spectrum in the following situations: The UV intensity is the same.
 All measurement data energy values are included.
 Measurements were performed on the same date.
1

Open the file for changing the Incident UV Spectrum. (Refer to ‘7-2-1 Plotting measurement
results on a graph’.)2

Right-click on the graph, then select [UV intensity correction], then [Change].

The browse window appears.
3

Select a Incident UV Spectrum file, then click the [OK] button.

NOTE To disable UV intensity correction for measurement results, right-click on the graph, then select [UVintensity correction], then [Delete].

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7. Analysis

7-3 Analyzing measurement results

7-3-2 Calculating the mean of measurement results
To calculate the mean value of measurement results, select the multiple measurement data files for which
you wish to calculate the mean. Calculating the mean for measurement data creates a multi data file(*.mdat).
1

Open the multiple measurement data files. (Refer to ‘7-2-2 Plotting multiple measurement
results on a single graph’.)2

Right-click on the graph, then select [Average].

The file name input window appears.
3Enter the file name for the multi data file in [File name].

4

Click the [OK] button.
3
4

A multi data file is created. The mean value is displayed in a separate graph form window.

Graph form window for thecreated multi data file

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7. Analysis

7-3 Analyzing measurement results

7-3-3 Calculating the photoemission threshold
Select the corresponding ground level and regression line on the graph, then recalculate thephotoemission threshold and slope.
1

Either open one measurement data file or open a multi data file and display the mean value.
(Refer to ‘7-2-1 Plotting measurement results on a graph’ and ‘7-3-2 Calculating the mean ofmeasurement results’.)2

Drag and select the range to specify the ground level on the graph.
Measurement points within the selected range are indicated in black.
While pressing the Ctrl key, click the selected measurement points to exclude/add them.

3

Right-click on the graph, then select [Ground level].
The measurement points within the selected range are indicated in pink. The ground level(photoemission threshold) is indicated by a pink line.

Range selected as ground level

4

Drag and select the range to specify the regression line on the graph.
Measurement points within the selected range are indicated in black.
While pressing the Ctrl key, click the selected measurement points to exclude/add them.

5

Right-click on the graph, then select [Regression line].
The measurement points within the selected range are indicated in light blue. The regression line
(photoemission slope) is indicated by a light blue line.

Range selected as regression line

6

Save the recalculated threshold value and slope in a measurement data file or multi data file.
(Refer to ‘7-3-5 Saving analysis results’.)97 / 141

7. Analysis

7-3 Analyzing measurement results

7-3-4 Estimating density of states
Create a multi data file with the mean calculated for the measurement data files, then estimate the densityof states. Estimating the density of states creates a differential results file (*.ddat).
1

Open multiple measurement data files and calculate the mean value. (Refer to ‘7-3-2
Calculating the mean of measurement results’.)2

Right-click on the graph, then select [Density of states].

The file name input window is displayed.
3Enter the file name for the differential results file in [File name].

4

Click the [OK] button.
3
4This creates a differential results file. The estimated density of states is displayed in a separate graphform window.

Graph form window for
created differential results
file

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7. Analysis

7-3 Analyzing measurement results

7-3-5 Saving analysis results
1

Right-click on the graph, then select [Save].

Saving the analysis results overwrites earlier results.

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7. Analysis

7-4 Customizing the graph display

7-4 Customizing the graph display
7-4-1 Changing the X- and Y-axis maximum and minimum values
Change the graph axis settings.
1

Right-click on the graph, then select [Change scale].

The Change scale window appears.
2Enter the respective X- and Y-axis maximum and minimum values for [Plot area].

3

Click the [OK] button.

Y-axismaximum

Y-axis minimum
X-axis maximum

X-axis minimum

NOTE Select a measurement data file or multi data file graph to edit the [Power] value. The power value
will differ depending on the particular sample. The value is typically 0.5 for metal samples and 0.3(1/3) for semiconductor samples. A value of 0.5 is typically used for organic substances.
 Right-click on the graph, then select [Default scale]. This will reset the range plotted before themeasurement.
 To save the settings for the range plotted, right-click on the graph and select [Save].

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7. Analysis

7-4 Customizing the graph display

7-4-2 Changing grid lines
The following grid line settings can be modified: Show [On]/hide [Off] grid lines
 X-axis grid line and X-axis supplementary grid line interval
 Y-axis grid line and Y-axis supplementary grid line interval<Grid line interval>
The grid line is determined by the maximum and minimum values for the axis together with the specified
step.
For example, if the X-axis is from 4.2 eV to 6.2 eV in 0.1 eV steps, and the Y-axis is from 0 to 63, setting
the number of grid lines as follows will give the following grid line intervals:
X-axis grid line: 5, X-axis supplementary grid line: 5
Y-axis grid line: 5, Y-axis supplementary grid line: 5
 X-axis supplementary grid line interval:(6.2 - 4.2) ÷ 0.1 ÷ 5 ÷ 10 = 0.4
After rounding, the X-axis supplementary grid lines are set to every step (0.1 eV).
 X-axis grid line interval:
1  10 = 10
X-axis grid lines are therefore set to every 10 steps (1 eV).
 Y-axis supplementary grid line interval:(63 - 0) ÷ 1 ÷ 5 ÷ 10 = 1.26
After rounding, Y-axis supplementary grid lines are set to every 2 steps (2).
 Y-axis grid line interval:
2  10 = 20
This means Y-axis grid lines are drawn every 20 steps (20).
1Click the [View] tab on the main window.

2

Click the [Graph Settings] button.

1
2

The Visual Settings window appears.

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7. Analysis

7-4 Customizing the graph display

3

Click the [Gridlines] tab on the Visual Settings window.

4

Edit the grid line settings.

5

Click the [OK] button.
3

45

7-4-3 Changing line graph dots
The line graph plot color and size can be modified.
1

Click the [View] tab on the main window.

2

Click the [Graph Settings] button.

1
2

The Visual Settings window appears.
3

Click the [Marker] tab on the Visual Settings window.

4

Set the line graph plot size in [Size].

5

Click and select the desired line graph color.
The numbers (1 - 10) on the colors indicate the data numbers when multiple data points are overlaid
on a graph.
[S] indicates selected points, [B] indicates points specified as the ground level, and [R] indicates points
specified as the regression line.

6

Click the [OK] button.
3
4
5

6

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7. Analysis

7-4 Customizing the graph display

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7. Analysis

7-4 Customizing the graph display

7-4-4 Changing the ground level and regression line graph display
You can change the thickness of the ground level line and regression line. You can also change the default
settings for the ground level differential display.
1

Click the [View] tab on the main window.

2

Click the [Graph Settings] button.

1
2

The Visual Settings window appears.
3

Click the [Ground level/Regression line] tab on the Visual Settings window.

4

Set the regression line thickness in [Line Thickness].

5

Select [ON] or [OFF] for [Ground level differential].
The selected item becomes the default value for the ground level differential display and is displayedin light blue.

6

Click the [OK] button.
3

4
5

6

NOTE
 To switch each graph ground level differential display, right-click on the graph, then select [Groundlevel differential]. Select [ON] or [OFF] for the ground level differential display for the selected graph.

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7. Analysis

7-4 Customizing the graph display

7-4-5 Renaming samples
1

Right-click on the graph, then select [Change the sample name].

The sample name input window appears.
2Enter the new sample name.

3

Click the [OK] button.

2
3

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7. Analysis

7-5 File management

7-5 File management
7-5-1 Data Manager component names and functions
Data Manager is the window used to manage files handled by the AC-2S analysis application.
Data Manager displays files found in the \Documents\RikenKeikiPYSA\AC-2S folder.
Column header

②
①

③

No.

Name

Function①

Tree view

Displays folders and files arranged hierarchically.
Displays only files and folders saved to \Documents\RikenKeikiPYSA\AC-2S.

②

List view

Displays folders and files in tree view.
When the AC-2S analysis application is launched, files are displayedin ascending order of measurement date and time.
Click the corresponding column header to resort files in that column.
Clicking a column header toggles the display between ascending
and descending order.

③

File information

Displays file information for the data selected in list view.

CAUTION Do not use with other applications (e.g., Windows Explorer). File operations in Data Manager use
the Windows clipboard.
 Perform operations on files in the AC-2S folder using Data Manager from within the AC-2S analysis
application.
 You can use Explorer or other applications for backup operations.

NOTE If you accidentally close Data Manager, click the [Window] tab in the AC-2S analysis application andclick the [Data Manager] button to reopen.

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7. Analysis

7-5 File management

7-5-2 Viewing data
You can view the following data in Data Manager:
The data that can be viewed depends on the particular file.

<Work function measurement results files>
Measurement
data fileMulti data file

Differential
results file

Incident UVSpectrum file

Sample name

〇

〇

〇

〇

Measurement date and time

〇

〇

〇

〇

Measurement UV intensity
[nW]

〇

〇

〇

〇

Incident UV Spectrum name

〇

〇

〇

〇

Measurement start energy [eV]

〇

〇

〇

〇

Measurement end energy [eV]

〇

〇

〇

〇

Step [eV]

〇

〇

〇

〇

Aquisition time [s]

〇

〇

〇

×

Anode voltage [V]

〇

〇

〇

×

Dead time [s]

〇

〇

〇

×

Threshold [eV]

〇

〇

×

×

Slope

〇

〇

×

×

Exponent

〇

〇

×

×

Ground level

〇

〇

×

×

GL differential display

〇

〇

×

×

Background count rate

〇

〇

×

×

Pro α

<Calibration curve/film thickness measurement results files>
Count rate data
file

Calibration
curve file

Film thickness
data file

Sample name

〇

〇

〇

Measurement date and time

〇

〇

〇

Measurement UV intensity [nW]

〇

〇

〇

Measurement energy [eV]

〇

〇

〇

Aquisition time [s]

〇

〇

〇

Calibration curve

×

×

〇

Anode voltage [V]

〇

×

〇

Dead time [s]

〇

×

〇

Background count rate

〇

×

〇

Slope

×

〇

×

Section×〇×

Calibration film thickness

×

〇

×

Section correction

×

〇

×

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7. Analysis

7-5 File management

7-5-3 Searching for files
Search for files by file type, measurement date, and other parameters.
The search will target files located in the folder selected in list view in Data Manager.

<Searching by file type>1

Right-click on list view in Data Manager, then select [Search].
You can also click the [Edit] tab in the main window and click the [Find] button to display the searchwindow.

List view

The search window appears.
2

Check [What kind of data are you looking for?].

3

Click [], then select the desired file from the file list.

2

3

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7. Analysis

7-5 File management

If [Incident UV spectrum.ldat] is selected, you can search for files by specifying [UV intensity].

If file types other than [Incident UV spectrum.ldat] are selected, search for files by specifying [Samplename].

4

Click the [Search] button.
The files retuned by the search function are displayed in list view in Data Manager.

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7. Analysis

7-5 File management<Searching by measurement date>
You can search for files by specifying the period in which they were measured.
1

Right-click on list view in Data Manager, then select [Search].
You can also click the [Edit] tab in the main window and click the [Find] button to display the searchwindow.

List view

The search window appears.
2

Check [When was it measured?].

3

Set the start date for the period in which to search.
Click [▼], then select the start date on the calendar window.

4

Set the end date for the period in which to search.
Click [▼], then select the end date on the calendar window.

2
4
3

5

Click the [Search] button.
The files retuned by the search function are displayed in list view in Data Manager.

NOTE You can search for files by specifying search parameters for [What kind of data are you looking for?]and [When was it measured?].

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7. Analysis

7-5 File management

7-5-4 Renaming files
1

Click and select the file to rename in tree view or list view in Data Manager.

2

Right-click on the file name, then select [Rename].

3Enter the new file name.

7-5-5 Deleting files
Files and folders deleted within Data Manager are moved to [Recycle] in tree view (the AC-2S recycle bin).
Deleting files or folders from [Recycle] moves them to the Windows recycle bin.

1

Click and select a file or folder to delete in tree view or list view in Data Manager.

2

Right-click on the file or folder, then select [Delete].

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7. Analysis

7-6 Outputting measurement results

7-6 Outputting measurement results
Measurement results data, measurement conditions, and graphs can be copied to the clipboard for use inother applications.

7-6-1 Outputting data and measurement conditions
Measurement results data and measurement conditions can be copied as text data for use in otherapplications.
1

Click the data list or measurement conditions display area in the graph form window.
To copy data, click the data list. To copy measurement conditions, click the measurement conditions
display area.

2

Click the [Edit] tab on the main window.

3

Click the [Copy] button.
The data or measurement conditions are copied to the clipboard as text data.
You can also copy data or measurement conditions to the clipboard by pressing the C key and Ctrl key
at the same time.
2
3

Measurement conditions
display area

Data list

4

Launch another application and paste the contents of the clipboard.

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7. Analysis

7-6 Outputting measurement results

7-6-2 Outputting graphs
Measurement results graphs can be copied for use in other applications.
If pasted into Word or PowerPoint, the measurement results are output as graphics.
If pasted into Excel, the measurement results are output as graph data. However, they can be output asgraphics by selecting [Bitmap] for [Paste Special] when pasting.
1

Click the graph area in the graph form window.

2

Click the [Edit] tab on the main window.

3

Click the [Copy] button.
You can also copy data or measurement conditions to the clipboard by pressing the C key and Ctrl key
at the same time.
2
3

Graph area4

Launch another application and paste the contents of the clipboard.

NOTE Right-click on the graph and select [Image output] to output a graph as a BMP, PNG, or JPEG
format image file.
 Right-click on the graph and select [File conversion] to output a graph as a CSV format file.

7-6-3 Bulk outputting data, measurement conditions, and graphs
Data, measurement conditions, and graphs can be output as PDF format files.
1

Right-click on the graph form window, then select [Bulk output].
Data, measurement conditions, and graphs are output as PDF format files.

NOTE Right-click on the graph form window, then select Bulk copy] to copy data, measurement conditions,and graphs.
If pasted into Word, Excel, or PowerPoint, data and measurement conditions are output as text
data.
Graphs can be output as graphics by selecting [Bitmap] for [Paste Special].

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7. Analysis

7-7 Graph right-click operation list

7-7 Graph right-click operation list

Measurement data file
(single)Measurement data file
(multiple)

Multi data file (single)

Multi data file (multiple)

Differential results file
(single)Differential results file
(multiple)

Incident UV Spectrum
file (single)

Incident UV Spectrum
file (multiple)<Work function measurement results files>

Ground level

○

△

○

△

×

×

×

×

Regression line

○

△

○

△

×

×

×

×

Clear data

○

△

○

△

×

×

×

×

GL Differential
calculation function

○

△

○

△

×

×

×

×

Switches the ground level
differential display.

Incident UV spectrum

○

△

×

×

×

×

×

×

－

Change

○

×

×

×

×

×

×

×

Delete

○

×

×

×

×

×

×

×

Save

○

△

○

△

○

△

○

△

Saves analysis results.

Change the sample
name

○

△

○

△

×

×

×

×

Renames the sample.

Add

○

○

○

○

○

○

○

○

Displays the data overlaid.

Remove

△

○

△

○

△

○

△

○

Excludes the selected data.

Right-click
operation

Average

△

○

×

×

×

×

×

×

Density of states

×

×

○

△

×

×

×

×

Details

×

×

○

△

×

×

×

×

Change scale

○

○

○

○

○

○

○

○

Default scale

○

○

○

○

○

○

○

○

File conversion

○

○

○

○

○

○

○

○

Bulk output

○

△

×

×

×

×

×

×

Bulk copy

○

△

○

△

○

△

○

△

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Description

Calculates the ground levelbased on data in the selectedarea.
Calculates the regression line
based on data in the selected
area.
Clears the ground level line
and regression line.

Changes the Incident UVSpectrum.
Disables UV intensity
correction.

Calculates the mean. A multi
data file is created anddisplayed in a separate
window.
Estimates the density of states.
A differential results file iscreated and displayed in a
separate window.
Displays the data used to
calculate the mean.
Sets the axis maximum andminimum values.
Returns axis maximum andminimum values to their default
values.
Outputs data in CSV format.
Outputs graphs, data, andparameters in PDF format.
Copies graphs, data, andparameters in a batch
operation.

7. Analysis○: Enabled

7-7 Graph right-click operation list△: Disabled (grayed out)

×: Not displayed

Film thickness data
file

Calibration curve file

Right-click operation

Count rate data file<Calibration curve/film thickness measurement results files>

Save
○
×
○
Change the sample
○
×
○
name
Change scale○○○○: Enabled △: Disabled (grayed out)

Pro αDescription

Saves analysis results.
Renames the sample.
Sets the axis maximum and minimum values.
×: Not displayed

115 / 141Pro β

8. Data conversion

8-1 Overview of the AC-2S data conversion application

8

Data conversion
8-1 Overview of the AC-2S data conversion application
The AC-2S data conversion application converts data measured with Riken Keiki AC Series products(AC-2, AC-3, and AC-5) to a data format compatible with the AC-2S analysis application.

8-2 Basic file conversion operations
8-2-1 Launching the AC-2S data conversion application
1

Double-click the AC-2S conversion application shortcut icon displayed on the control PC
desktop.

The AC-2S conversion application main window appears.

NOTE If you do not see the shortcut icon on the control PC desktop, open the Windows Start menu andselect [AC-2S_Importer.exe] from the Start menu list.

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8. Data conversion

8-2 Basic file conversion operations

8-2-2 AC-2S data conversion application window component names andfunctions
The AC-2S data conversion application window displays AC-2, AC-3, and AC-5 data.

①

③

②

No.

Name

Function①

Menu display

Displays the AC-2S data conversion application operations.

②

Tree view

Displays folders and files for data before conversion in hierarchicalformat.

③

List view

Displays folders and files in tree view.

8-2-3 Files supported by the AC-2S data conversion application
The following files can be handled using the AC-2S conversion conversion:<AC-2, AC-3, AC-5, and AC-2S work function measurement results files>
Type

Description

AC-5 measurement data file (*.dat)

File containing AC-5 work function measurement results.

AC-2 measurement data database(*.mbd)Database file containing AC-2 work function measurement
results.

AC-3 measurement data database(*.mbd)Database file containing AC-2 work function measurement
results.

AC-2S measurement data file (*.dat)

File containing AC-2S work function measurement results.

AC-2S measurement data files (*.dat) are saved to a user-specified folder in the \Documents\RikenKeikiPYSA\AC-2S\Data folder.

NOTE AC-5 and AC-2S measurement data files are text files with the same file extension (*.dat) but
different file structures. Do not save these files together in the same folder.
 By default, AC-2 measurement data files are saved as AC-2.mdb, while AC-3 measurement data
files are saved as AC-3.mdb. These database files have the same file extensions. Be careful toavoid mixing them. Do not save these files to the same folder.
 We recommend backing up measurement data files periodically.

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8. Data conversion

8-3 Converting to AC-2S format (AC-5 measurement data files)

8-3 Converting to AC-2S format (AC-5 measurement data
files)
1

Click the [AC-5 folder] button on the AC-2S data conversion window.
The folder selection window appears.

2

Select the folder containing the AC-5 measurement data file (*.dat).

3

Click the [OK] button.
1

2

3

The selected folder and AC-5 measurement data files contained within the folder are displayed in [AC5] tree view and list view.
4

Select the data you wish to convert, then click the [Import] button.

The selected AC-5 data is converted to AC-2S format and saved to \Documents\RikenKeikiPYSA\AC-5.
A report of the files converted is displayed on the AC-2S data conversion window.

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8. Data conversion

5

8-3 Converting to AC-2S format (AC-5 measurement data files)

Check the report details, then click the [Close] button.

The file selection window appears.
6

Select the report file save destination, then click the [Save] button.

7

Launch the AC-2S data analysis application and confirm that the AC-5 data converted to AC-2S
format has been saved.

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8. Data conversion

8-4 Converting to AC-2S format (AC-2/AC-3 measurement data files)

8-4 Converting to AC-2S format (AC-2/AC-3 measurement
data files)
1

Click the [AC-2 Folder] or [AC-3 folder] button on the AC-2S data conversion window.
The folder selection window appears.

2

Select the database (*.mdb) containing the AC-2 or AC-3 measurement data file.

3

Click the [OK] button.

1

2

3

The selected folder and the AC-2 or AC-3 measurement data files located in the folder are displayed in[AC-2] or [AC-3] tree view and list view.
4

Select the data you wish to convert, then click the [Import] button.

AC-2 tree view and list viewAC-3 tree view and list view

The selected AC-2 or AC-3 data is converted to AC-2S format and saved to \Documents\RikenKeikiPYSA\AC-2 or \Documents\RikenKeikiPYSA\AC-3.
A report of the files converted is displayed on the AC-2S data conversion window.

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8. Data conversion

5

8-4 Converting to AC-2S format (AC-2/AC-3 measurement data files)

Check the report details, then click the [Close] button.

The file selection window appears.
6

Select the report file save destination, then click the [Save] button.

7

Launch the AC-2S data analysis application and confirm that the AC-2 or AC-3 data converted
to AC-2S format has been saved.

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8. Data conversion

8-5 Quitting the AC-2S conversion application

8-5 Quitting the AC-2S conversion application
1

Click the [Exit] button.

This closes the AC-2S data conversion application.

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9. Ending Main Unit Operation

9-1 Turning off the power

9

Ending Main Unit Operation
9-1 Turning off the power
Turn off the power to the product.
Exit the AC-2S measurement application if it is running. (Refer to ‘6-9 Quitting measurement’.)

CAUTION Be sure to close the AC-2S measurement application before turning off the power to the product.
Turning off the power to the product while the AC-2S measurement application is running may
cause problems with the application.

NOTE You can open the AC-2S analysis application to view previously measured data even when the
product power switch is turned off.

<AC-2S>
1Turn off the power switch on the right side of the AC-2S LC unit.

2

Shut off the dry compressed air supply.

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9. Ending Main Unit Operation

9-1 Turning off the power<AC-2S Pro α/AC-2S Pro β>1Turn off the power switch on the right side of the AC-2S LC unit.

2

Shut off the dry compressed air supply.

3

Turn on the plasma light source (LDLS).
Insert the power cable of the plasma light source unit into the power outlet. After confirming that theunit's fan is running, raise the OPERATE switch in the controller section. Check to confirm that the
LAMP ON LED has gone out.

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10. Maintenance10-1 Daily inspection

10

Maintenance10-1 Daily inspection
Maintain and inspect the product periodically to ensure product performance and improve the reliability ofthe measurement data.

10-1-1 Display lamp inspection
Check to confirm that the LED lamps on the product light up correctly.

<AC-2S LC (light source unit)>

Inspection item
POWER/STANDBY LED
TROUBLE LED

Inspection details
Measurement in progress: Lights up (green)Standby (warming up): Blinks (green)
Normal: Off
Error: Lights up (red)During operational checks and immediately after turning on power:
Blinks (red)<AC-2S DC (measuring unit)>

Inspection item
POWER/STANDBY LED
TROUBLE LED

OPEN LED

Inspection details
Measurement in progress: Lights up (green)Standby (warming up): Blinks (green)
Normal: Off
Error: Lights up (red)During operational checks and immediately after turning on power:
Blinks (red)Normal: Off
Sample inlet open: Lights up (orange)

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10. Maintenance10-1 Daily inspection

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10. Maintenance10-1 Daily inspection

10-1-2 Sample chamber interior inspection
Before turning on the power, open the sample inlet and check to confirm that the interior is not dirty.
Remove dirt as follows: Use a vacuum cleaner or similar to remove any powder.
 Wipe the stage with isopropyl alcohol to remove adhering dirt.

NOTE If you use solvents or other such liquids to clean the interior, leave the sample inlet open for several
hours. Check to confirm that the sample chamber is free of solvent vapor before using the product.

WARNING To open the sample inlet, press gently with your finger on the part marked “PUSH”.
Any of the following actions may damage the sample inlet:
・ Pressing on the sample inlet anywhere other than the part marked “PUSH”
・ Pressing on the sample inlet with the palm of your hand・ Subjecting the sample inlet to a load of 400 N or more (The sample inlet can be opened andclosed with a force of 5 - 6 N.)
・ Forcing open the sample inlet when it does not open

CAUTION Do not leave charged fine power or volatile solvents inside the sample chamber.
Performing measurements while charged fine power or volatile solvents remain inside the sample
chamber may damage the detector and reduce its service life.
 Isopropyl alcohol is a combustible liquid.
Handle with care. Keep the risk of fire in mind.

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10. Maintenance10-2 Consumable part replacement intervals

10-2 Consumable part replacement intervals
Contact Riken Keiki to replace consumable parts.
This product uses the following consumable parts:
No.
1
2
3
4

Name
Detector
Optical fiber
Activated carbon filter
D2 lamp (for AC-2S)

Recommended
check interval
1 year
1 year
1 year
1 yearRecommended
replacement
interval
1 year
1 year
5 years
1 yearQuantity(piece/unit)
1
1
1
1

NOTE
 The above replacement intervals are guidelines only. Replacement intervals may vary depending on
actual operating conditions. These intervals do not constitute warranty periods. Replacement
intervals may vary depending on the results of regular maintenance.

10-2-1 Detector (LE-6118)
A message appears when the detector is due for replacement.
Contact our sales department promptly if any of the following messages appears:<Message indicating detector replacement is imminent>

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10. Maintenance10-2 Consumable part replacement intervals<Message indicating the detector must be replaced>

NOTE Even if the above messages do not appear, replace the detector if you observe signs of detector
deterioration, such as reduced detection rate, increased noise, or measurement scatter.
 The replacement interval will depend on how frequently the product is used.
 The detector will no longer be capable of measurements if the anode degrades to a certain point.
 Replaced detectors can be refreshed by an overhaul. Please contact our sales department for more
information on detector overhauls.

CAUTION The LE-6118 detector is intended for use with the AC-2S Series. It cannot be used with the AC-2.
Likewise, the LE-6110 detector used with the AC-2 cannot be used with the AC-2S Series.

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10. Maintenance10-2 Consumable part replacement intervals

10-2-2 Optical fiber
A message appears when the maximum light intensity of the optical fiber drops.
Replace the optical fiber if this message appears or if the UV intensity used for measurement cannot be
achieved. The replacement interval will vary depending on how frequently the product is used and on the
UV intensity used.
Contact Riken Keiki promptly if any of the following messages appears:<Message indicating optical fiber replacement is imminent><Message indicating the optical fiber must be replaced>

130 / 141

10. Maintenance10-2-3 Deuterium (D2) lamp10-2 Consumable part replacement intervals

AC-2S

A message appears when the UV lamp is due for replacement.
The UV lamp has a service life of approximately 1,500 hours.
<Message indicating lamp replacement is imminent><Message indicating the detector must be replaced>

10-2-4 Activated carbon filter
The activated carbon filter adsorbs and decomposes ozone generated by the UV light. Replace the filter if
its ozone decomposition performance drops. The filter has a service life of approximately 5 years.
Contact our sales department to replace the activated carbon filter.

131 / 141

11. Storage, Relocation, and Disposal

11-1 Procedures for storage or when not used for extended periods

11

Storage, Relocation, andDisposal
11-1 Procedures for storage or when not used for extended
periods
Store the product after referring to ‘4-1 Installation precautions’.
Store spare detectors in their dedicated packing case.

11-2 Procedures for relocation or reuse
Before moving the product, refer to ‘4-1 Installation precautions’, ‘4-2 Cable connection’, and ‘4-3 Pipeinstallation’ for guidance on conditions at the new installation site.

CAUTION
 Contact our sales department for readjustment.

11-3 Product disposal
Contact our sales department for product disposal.

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12. Troubleshooting

12-1 Fault diagnosis

12

Troubleshooting
12-1 Fault diagnosis
The product features a self-diagnostic function that checks individual functions at startup and whenrunning.
Normal measurements cannot be performed if a fault occurs. Determine the cause and take theappropriate corrective action.
The TROUBLE LED on the product lights up (red) to indicate that a fault has occurred. An error message
is also displayed on the control PC.

CAUTION The TROUBLE LED may not always light up and an error message may not always be displayed if
the main unit or controller performs erratically for unforeseen reasons.
In situations like this, turn off the power switch on the product and unplug from the mains socket.

12-2 Corrective action
If a fault occurs, stop the operation. Refer to the following information to clear the cause of the fault. Oncethe cause of the fault has been cleared, restart the product.
This troubleshooting section does not address causes of all problems that may occur with the product. It
provides brief explanations to assist in determining the causes of common problems.
If symptoms not addressed here occur or if problems persist even after taking corrective action, contact
our sales department.

NOTE
 In the event of faults due to unknown causes or if different causes occur continuously, make a noteof the control PC screen display and symptoms and contact our sales department.
 If the fault appears likely to cause injury or damage to property, contact our sales department
immediately. Do not attempt to replicate the fault.
 Be sure to save any measured data related to the problem. This data is often useful in determining
the cause of a problem.

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12. Troubleshooting

Symptom/display
The power cannot be turnedon.

The power turns on, but the
product does not start up
correctly.
The AC-2S measurement
application starts up, but
communication is not possible.

The TROUBLE LED blinks(red) for a few minutes
immediately after the power isturned on.
The TROUBLE LED lights up(red).

The anode voltage cannot be
set.

12-2 Corrective action

Cause
The power supply cable is notplugged into the mains socket.
The main socket is not supplying
power.
The power supply fuse has
blown.
The sample inlet is open.

Corrective action
Turn off the product power switch,then plug the power supply cable
into the mains power supply socket.
Check the reason for the fuseblowing. Replace the fuse if noproblems are identified.
Close the sample inlet completely.
The product starts up automatically.

The interface cables (USB or RS232C) are not properly
connected.
Momentary electromagnetic
interference resulted in acommunication error.
This indicates that operation is
being checked after the productstarts up.

Reconnect the interface cables(USB and RS-232C).

The dry compressed air pressure
is low.
The UV lamp does not light up.

Check the dry compressed airpressure, then restart the product.
Restart the product.
If this fails to resolve the problem,
replace the UV lamp.
Restart the product.
Replace the detector.
Contact our sales department.

The fan is not running.
The detector is defective.

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Turn the main unit and AC-2S
measurement application off andback on again.
This is not a fault provided that the
TROUBLE LED goes out after
blinking (red) for a few minutes.

13. Product Specifications

13-1 Product specifications

13

Product Specifications
13-1 Product specifications
Item
Model
Measurement
principle
Measurement energy
scanning range
Repeatability(standard deviation)
Measurement time
Maximum countUV lamp
Minimum lightintensity
Maximum lightintensity
UV light
Spot size
Spectrometer
Sample size
Sample stage size
Multi-point
measurement function
Operatingtemperature/humidity range
Dry compressed air
supply conditions
Power supply

Specification
AC-2S Pro α
AC-2S Pro β
Photoemission yield spectroscopy in air (PYSA)(Detector: Low energy electron count method)
3.4 - 6.2 eV
2.0 - 6.2 eV
3.4 - 6.2 eV(364 - 200 nm)(620 - 200 nm)(364 - 200 nm)
AC-2S

Work function 0.02 eV (sample: gold sheet)Standard time required for work function measurement: Approx. 5 minutes*1
4,000 cps
Deuterium (D2) lamp
Laser-driven light source (LDLS)
1.0 nW or less
5.0 nW or less
1.0 nW or less(at 5.9 eV)(at 5.9 eV)(at 5.9 eV)
500 nW or more
2,500 nW or more
200 nW or more(at 5.9 eV)(at 5.9 eV)(at 5.9 eV)
0.4 mm × 0.4 mm square or
4 mm × 4 mm square or smaller
smaller
Grating-type monochromator
50 mm  50 mm (max.), maximum thickness 10 mm
115 mm  122 mm
120 mm  122 mm (heated sample stage)
Up to 4 points (auto measurement)
15 °C - 35 °C (no sudden changes), up to 60 % RH (no condensation)
0.1 - 0.2 MPa, 0.5 L/min (measurement), 2.0 L/min (purging)Main unit
LDLS
Temperature
controller
Power consumption
Main unit
LDLS
Temperature
controller
External dimensions―

100 V - 240 V AC ±10%50/60 Hz, 5 A (max.)
AC adapter: 100 V - 240 V AC, 50/60 Hz, 2.5 A
Main unit: 12 V DC, 120 W―

100 V AC (±10 %), 50/60 Hz, 1 A (max.)

Approx. 120 VA / 210 VA(100 V AC / 240 V AC)―

Approx. 80 VA / 150 VA(100 V AC / 240 V AC)
Approx. 60 VA / 110 VA (100 V AC / 240 V AC)―

Approx. 20 VA (100 V AC)

Approx. 480 mm (W)  317
mm (H)  450 mm (D)Approx. 623 mm (W)  317 mm (H)  450 mm (D)Approx. 465 mm (W)  360
mm (H)  450 mm (D)Approx. 465 mm (W)  360 mm (H)  450 mm (D)―Approx. 200 mm (W)  163 mm (H)  280 mm (D)(Excluding protruding parts)

AC-2S LC(light sourceunit)
AC-2S DC(measuringunit)
Temperature
controller

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13. Product Specifications

WeightAC-2S LC(light sourceunit)
AC-2S DC(measuringunit)

13-2 Display/control unit specifications

Approx. 25 kg

Approx. 30 kg

Approx. 31 kg

Approx. 31 kg•Operation location: Indoor•2000 meters above sea level or lower•TRANSIENT OVERVOLTAGES up to the levels of OVERVOLTAGE CATEGOLY II•POLLUTION DEGREE 2

Operatingenvironment
conditions*1 For measurement energy scanning range: 4.2 - 6.2 eV, step: 0.1 eV, count time: 5 s per step

13-2 Display/control unit specifications
Item
Display
Control PC

OSSpecification
Size: 17 inches or more
Resolution: 1,024  768 or more
Desktop PC
Processor: 1 GHz or higher 32-bit (X86) processor
Memory: 1 GB of RAM
Hard disk: 16 GB of free space
Direct X 9 graphics processor with Windows Display Driver Model(WDDM) 1.0 or later driver
USB ports: Two or more
CD-ROM or DVD-ROM drive
Mouse
Windows 10

13-3 Software (measurement/analysis) function specifications
Function
Supported OS
Work function measurement
Automatic UV intensity
adjustment function
Auto system startup function
Cut and paste function

Repeated measurement
function
Mean calculation function
Differential calculation
function
Film thickness measurement
function(AC-2S Pro α and AC-2S Pro β)

Details
Windows10
Determines work function or ionization potential by measuring
photoelectron spectrum.
Automatically adjusts the incident UV intensity based on the userspecified required UV intensity.
Automatically sets system initialization and detector anode voltage.
Allows use of measured data in other applications via cut and paste
operations.
(May not be supported by some applications.)
Performs repeated measurement.
Calculates the mean for multiple data items.
Calculates the differential value and supports density of states
measurement.
Creates calibration curves and calculates film thickness from the countrate.

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13. Product Specifications

13-4 Software (data conversion) function specifications

13-4 Software (data conversion) function specifications
Function
Supported OS
Data conversion functions

Details
Windows10
Converts data from existing models (AC-2/AC-3/AC-5) to AC-2S format.

137 / 141

14. Appendix

14-1 Detection principle

14

Appendix14-1 Detection principle
14-1-1 Photoelectron detection principle
The AC-2S employs an open counter capable of counting photoelectrons in atmospheric conditions.
(Refer to ‘<Open counter configuration diagram>’.)The sample is placed directly under the detector and has an electric potential of 0 V.
The detector consists of two overlapping layers of metal mesh (suppressor grid and quenching grid) and a
metal wire (anode). Initially, Voltages of 80 and 100 V, 2,600 V, respectively are applied to these
Electrons emitted from the sample surface due to UV irradiation repeatedly collide with air molecules anddrift toward the suppressor grid.
The electrons emitted in this process adhere to oxygen molecules, which act as carriers entering thedetector and approaching the anode.
The electrons carried close to the anode are accelerated by the strong electric field and separated fromthe oxygen molecules.
The electrons further accelerated close to the anode ionize air molecules through collisions, further
increasing the number of electrons. This phenomenon is known as an electron avalanche.
The electrons generated by the electron avalanche collect at the anode, producing electrical pulses in theexternal circuit. These pulses are captured by an electrical circuit, enabling the electrons to be counted.
The electron avalanche caused by the influx of electrons into the detector also generates a large number of
positive ions.
These positive ions have greater mass and move toward the test sample surface more slowly than electrons,
but destabilize the electron avalanche caused by subsequent electrons and collide with the sample.
The electrical circuit changes the potential of the quenching grid and suppressor grid to 400 V and -30 V,
respectively, for a period of just 2 ms at the same time a signal pulse is captured and counted. This reduces
the potential difference between the quenching grid and the anode and halts the electron avalanche.
During this period, the positive ions are neutralized and quenched by both grids.
The suppressor grid keeps positive ions from colliding with the sample and keeps electrons from entering
the detector until the positive ions have been quenched. These processes generate a dead time* in thedetector. The dead time for this product is the time between one electron being counted and renewed
capacity to count another electron. The number of electrons that cannot be counted during this dead time
is obtained by extrapolation and duly applied to correct the measurement.
* Dead time
The dead time refers to the time after the detection of a particular event until the next event can bedetected.
Radiation detection equipment is typically subject to intervals, called dead time, during which radiation
cannot be detected. Measurements must be corrected, based on actual conditions, to account for this.

138 / 141

14. Appendix

14-1 Detection principle<Open counter configuration diagram>Pre-amp

Electron counting circuit

DetectorStage

Gs: Suppressor grid

Gq: Quenching grid

S: Sample

A: Anode: Electron

14-1-2 Photoelectric work function measurement
As shown in the following figure, the AC-2S consists of a UV lamp, UV intensity controller (filter, iris),
spectrometer, detector, controller, X stage, and control PC.

<AS-2S configuration diagram>Spectrometer

Iris

UV lampDC (measuring unit)

FilterLC (light source unit)

Detector

UV lamp power
supplySample stageLow energy
electron counter

UV intensity
measuringunit

X stage
Controller
Controller

Control PC (measurement/analysis
application)
Display/control unit

Light of wavelengths between 200 and 300 nm emitted by the UV lamp is monochromatized by thespectrometer into the required wavelength, which is directed to the sample surface.
Each photon possesses energy E, which can be calculated as a value between 3.4 and 6.2 eV using thefollowing equation:
E = hc / λ (h: Planck constant, c: speed of light, λ: wavelength)
If we sweep upward from the lower of this incident UV energy, electron emissions due to the photoelectriceffect starts at a certain energy.
This energy is called the photoelectric work function. The photoelectric work function is considered as thework function for metal samples and as the ionization potential for semiconductor samples.

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14. Appendix

14-1 Detection principle

As shown in the following graph, if we plot the incident UV energy on the horizontal axis against the squareroot (exponent 0.5) of the photoelectron yield actually measured on the vertical axis, we obtain a straightline for metal samples.
The photoelectric work function can be determined from the intersection of the extrapolated straight line
obtained by the least squares method with the ground level. The slope of the extrapolated straight line
forms an index for parameters such as surface contamination and oxide film thickness.

Square root ofphotoelectron yield<Relationship between UV energy and electrons>

UV energy

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14. Appendix

14-2 Terminology

14-2 Terminology
TermDefinition

Slope

Slope of the graph of incident UV energy plotted against photoelectron yield
This forms an indicator of photoemission.

Photoemission threshold

Energy threshold at which photoemission starts

Work function

Energy required to release one electron from the surface of a solid

Ionization potential

Minimum energy required to ionize a moleculeThis is the maximum valance band energy for a semiconductor.

Density of states

This is the number of states between energy E and E + dE.

Incident UV energy

Energy per photon of incident UVThis is obtained from the wavelength of the incident UV using the following
equation:
Energy [eV] = 1,240 / incident wavelength [nm]Incident UV intensity

Total energy of incident UV per unit time
This is obtained from the output current of a photodiode using the following
equation:
UV intensity [nW] =Number of incident photos per unit time  energy [eV] ÷ 0.625

UV intensity correction

Correction of differences in incident UV intensity for each energy whenmeasuring work function and ionization potential
The correction applies the following equation, based on the assumption thatphotoemission is proportional to incident UV intensity.
Corrected count =Actual count ÷ incident photon count  5.90 eV incident photon count141 / 141

14. Appendix

Revision History

Revision History
Issue

Revision details

Issue date

0First issue2021/9/30

1

3-1-3 Optional accessories correction

2022/3/2

2

CE marking addition

2022/11/28

3

Temperature controller changed / External dimensions / Changeof wording.

2024/3/13

4

LDLS specification addition

2024/5/24