DF SERIES

DF-750 NanoTrace
TUNABLE LASER DIODE (TDL) TRACE/ULTRA-TRACE MOISTURE MEASUREMENTS FOR QUALITYCONTROL IN SEMICONDUCTOR FABSFlexible

DF-750 NanoTrace
Designed specifically to make trace andultra-trace measurements in a range ofultra high purity gases, the DF-750 is theleading choice in moisture analysis for thesemiconductor industry. Optimized for use
in 300mm semiconductor fabs, the DF-750
measures moisture as a contaminant inelectronics grade nitrogen, hydrogen,helium, argon and oxygen.
With Servomex’s industry-leading TDL
sensing technology delivering an
industry-leading 100ppt Lower Detection
Limit, the DF-750 delivers a stable,highly accurate measurement thatmeets the precise monitoring needs ofsemiconductor production.
This analyzer also offers attractive
affordability over product life. The
DF-750’s robust sensor construction has
low lifetime maintenance requirements
and delivers zero-drift stability that greatlyextends calibration intervals. This low costof-ownership combined with exceptional
measurement performance, the DF-750 is
the first-choice analytical solution for UHP
gas quality checks.

T race level Tunable Diode Laser(TDL) sensing provides highstability and minimal moisture
contact with optical elements

S torage and recall function:
calibration, system error andmeasurement data facilitatesarchiving operational history

Broad detection range: 0-20ppm	Operable via front panel or digitalcommunication options

EASY TO USE
S implified ongoing maintenancerequirements through the use ofnon-depleting, low drift potential
TDL sensing technology	High reliability; repeatable baseline
measurements are not affected bya loss in mirror reflectivity

Low cost of ownership
Robust sensor construction
reduces maintenance requirements

Zero drift extends
calibration intervals

Unrivalled performance
Uses industry-leading,non-depleting, high stability
TDL trace sensing with zero drift anufactured by Servomex M
over 60 years’ experience
pioneering gas analysis withthousands of units used in
the fieldIndustry leading 100ppt Lower
Detection Limit

Benchmark compliance 	IEC 61010-1
 vervoltage Category II,O
Pollution Degree 2

Learn more about the DF-750 NanoTrace
VISIT SERVOMEX.COM

 	EU EMC Directive
EU Low Voltage DirectivePRODUCT OVERVIEW: DF-750 NanoTrace

High stability TDL trace/ultra-trace measurements

ALTERNATIVE PRODUCTS
The DF product range features anumber of options designed to meet yourapplication needs.

Ultra-trace qualification of UHP electronic gases is essential for
semiconductor fabrication. You need a moisture analyzer
that can deliver high stability measurements with sensitive andconsistent performance. An accurate and low LDL is a must, as is theneed to easily store and recall data/calibration records. No matter
what your requirements, you’ll want a moisture analyzer that canprovide operational efficiencies. We don’t believe you shouldhave to compromise.

DF-749
NanoTrace

A no compromise solution
The DF-750 is designed to meet the exceptional gas purity standards
demanded by semiconductor manufacturers worldwide. Utilizing
leading-edge TDL sensing technology, housed in a robust and resilient
Herriot Cell, the DF-750 avoids moisture contact with optical sensing
components. The result is an analyzer that delivers an ultra-sensitive,
industry-leading 100pt Lower Detection Limit, ideal for checking forminute levels of moisture in a wide range of UHP electronics gradegases, including N2, H2, He, Ar and O2. With data recorded and readily
available through flexible storage and recall functions, the DF-750 isthe complete solution for UHP gas monitoring in 300mm semiconductor
fabs.

Simple maintenance and reduced
ongoing costs
The use of patented leading-edge TDL technology provides zero drift
accuracy, reducing ongoing calibration requirements, while the use ofthis sensing principle also helps to reduce ongoing maintenance thanks
to its non-depleting nature.

With a low 250ppt LDL, the DF-749 delivers
highly accurate trace and ultra-trace moisture
contaminant measurements in nitrogen,hydrogen, helium, argon and oxygen.

DF-745
NanoTrace
Designed for trace and ultra-trace
measurements where moisture is acontaminant, the DF-745 is ideal for bulk
gas checks and leak detection in LED
manufacturing. This analyzer uses TDL
technology and is suitable for use withmultiple background gases.

DF-760E
NanoTrace
The DF-760E combines TDL and Coulometricsensing to create a unique integrated
ultra-trace measurement for moisture andoxygen - ideal for PCB bulk gas quality checks
and leak detection.

KEY APPLICATIONS
 ulk gas quality control checks for
B
UHP electronic gases used in 300mm
semiconductor fabs

TECHNOLOGIESL eak detection checks for UHP
electronic gases used in 300mm
semiconductor fabs

PRODUCT DATA: DF-750 NanoTrace

OPTIONSDESCRIPTIONSPECIFICATION

Output5 output options available

Isolated 4-20mA DC and a choice of 0-1,0-2,0-5
and 0-10V DC

Output range

Output parameters

Scalable to any range between 0-2ppb to 0-20ppm(LDL 100ppt)

Alarms5 alarms available

4 moisture levels, temperature, moisture sensor
diagnostics, analyzer offline and expanded range

Serial communications

2 options for two-way serial communications

Factory configured RS232 or RS485

Vacuum pump

Aspirator source for high capacity sample draw

Pump with 1/4" compression inlet and outlet fittings

Dual scale range

2 range options

User-selectable secondary analog output ranges forrescaling the output once the primary range is exceeded

Hydrogen purge

Enhances safety during gas purge procedures

Includes sample delivery interlock and case purge
valves for instrument housing and enclosure, and purge
protection system for optional external vacuum pump.
Please note: limits available relays from 4 to 3Mounting

1 option

19” rack mount NEMA 1 enclosure

ACCESSORIESACCESSORIES AVAILABLE FOR SPECIFIC APPLICATIONS– CONTACT YOUR LOCAL SERVOMEX BUSINESS CENTER

MONITORING PERFORMANCEGas

H2O (purity)

Technology

Tunable Laser Diode (TDL)Range

0-20ppm – 0-2ppb min.

Accuracy (intrinsic error) FS±3% of reading / ±0.2ppb (whichever is greater)

Zero drift/month

Negligible

T90 in minutes<3 at 1liter/min

SAMPLE FOR MEASUREMENTS
Sample for measurement

Sample must be oil free, non-corrosive and non-condensing (must be free of acidic components –contact Servomex for sample preconditioning options)

Sample pressure

30 – 150psig (3.08 – 11.3 BarA)

Dew Point

5°C/9°F below minimum ambient

Particulates

Filtered to 2µm

PRODUCT DATA:
DF-750 NanoTrace

DEVICE SPECIFICATION

DEVICE SCHEMATIC

Size: 		483mm (19”) Wide x 266mm(10.5”) High x 608mm (23.9”) Deep19.00 [482.60]

16.17 [410.72]

Weight:	7.50 [190.50]<31.8kg (70lbs)

ESC

Operating Temperature:	Menu

Next

Enter

1.49 [37.72]
16.33 [414.78]
2 PLS

10°C - 40°C/50°F - 104°F.34 [8.74]
18.31 [465.12]

16.58 [421.01]
2 PLS
17.55 [445.69]

1.55 [39.25]

6.94 [176.28]
22.38 [568.45]
23.93 [607.70]

Compliance:	IEC 61010-1

7.83 [198.90]

19.00 [482.60]

16.17 [410.72]

 vervoltage Category II,O
Pollution Degree 2
7.50 [190.50]	EU EMC Directive

GND

8

GND

8

RLY2-NC

7

RLY4-NC

7

RLY2-NO

6

RLY4-NO

6

RLY2-COM

5

RLY1-NC

RLY4-COM

54RLY3-NC

4

RLY1-NO3

RLY3-NORLY1-COM

2KEY

2KEY

1RLY3-COM

18GND

87KEY

7AOUT+

610.47 [265.94]
GND
TX-ESC

Menu

Next

6KEYEnter

5RX-AOUT-

4EU Low Voltage Directive

24-20mA+

2

14-20mA-

1~

16.33 [414.78]
2 PLS

~~

.34 [8.74](19.00 [482.60])

22.38 [568.45]
23.93[607.70]
19.00[482.60]

7.83 [198.90]

7.50 [190.50]

GND

88GND

RLY2-NC

7RLY4-NC

7

RLY2-NO

6

RLY4-NO

6

RLY2-COM

5

RLY4-COM

5RLY1-NC

4

RLY3-NC

RLY1-NO3

RLY3-NORLY1-COM

2

KEY

2KEY

1

RLY3-COM

1NOT USED

4310.47 [265.94]

ESC

Menu

Next

GND

8TX-7

KEY

GND

8

7.11 [180.59]

7
66

AOUT+

RX-

5

AOUT-

5

TX+

2

4-20mA+2RX+

1

4-20mA-

1

KEYEnter4433~~~

1.49 [37.72]~.34 [8.74]~

1.49 [37.85]~

1.95 [49.40]

3.63 [92.08]
2.54 [64.44]

7.71 [195.77]
18.31 [465.12]

9.45 [239.90]

1.55 [39.25](19.00 [482.60])

176.28]22.38 [568.45]
23.93 [607.70]

These analyzers are not intended for any formof use on humans and are not medical devices
as described in the Medical Devices Directive
93/42EEC.

Please note: This document was updated in August 2014. While every effort has been made toensure accuracy, no responsibility can be accepted for errors or omissions. Data may change, as wellas legislation, and you are strongly advised to obtain copies of the most recently issued regulations,standards and guidelines. This document is not intended to form the basis of a contract.

AMERICAS BUSINESS CENTER
Tel: +1 281 295 5800
Email: americas_sales@servomex.com

EUROPEAN BUSINESS CENTRE
Tel: +31 (0) 79 330 1580
Email: europe_sales@servomex.com

INDIA BUSINESS CENTRE
Tel: +91 22 3934 2700
Email: MEI_sales@servomex.com

ASIA PACIFIC BUSINESS CENTRE
Tel: +86 (0)21 6489 7570
Email: asia_sales@servomex.com

LATIN AMERICA BUSINESS CENTER
Tel: +55 11 5188 8166
Email: brazil_sales@servomex.com

MIDDLE EAST BUSINESS CENTRE
Tel: +971 6552 8073
Email: MEI_sales@servomex.com

Servomex has a policy of constant product improvement and reserves the right to change specifications without notice.
© Servomex Group Limited. 2014. A Spectris company. All rights reserved.

~

9.45 [239.90]

1.55 [39.25]

6.94 [176.28]

16.17 [410.72]~

7.71 [195.77]
18.31 [465.12]

16.58 [421.01]
2 PLS
17.55 [445.69]

PBDF750 Rev.1 Date: 06/15

3TX+
RX+

~

1.49 [37.72]

16.58 [421.01]
2 PLS
17.55 [445.69]

54

3

16.33 [414.78]
2 PLS

NOT USED

31