VACUUMCOMPONENTS
Catalog

CANON ANELVA Corporation
http://www.canon-anelva.co.jp

PrefaceAccompanying the advance of vacuum application technology,
vacuum equipment/components and materials are being utilized ina variety of fields, with new types of equipment and components appearing increasingly each year.

In order to provide our customers with an overall understanding of
the wide variety of products (Vacuum Components) that CANONANELVA has developed and manufactures, we have combined theindividual product catalogs into a single comprehensive catalog.
We are pleased to present it to you here as the Canon ANELVA
Vacuum Components Catalog.

We hope you will keep this catalog at your side for quick reference
whenever you need to order any of our products.

CANON ANELVA Corporation

■ Contents

VacuumComponents
Information.................................................................................................6
1. Vacuum Pumps................................................................................. 11
Ion Pump/Noble Pump................................................................................................. 12
Excel Pump.................................................................................................................. 30
Ion Pump/Noble Pump Controller................................................................................. 38
Titanium Sublimation Pump/Ti-Vac Pump.................................................................... 42
Combination Pump....................................................................................................... 46
Cryopump POWER/POWEREco Series......................................................................... 52
Cryopump POWER Series....................................................................................... 53
Cryopump POWEREco Series................................................................................... 62
Foreline Trap................................................................................................................ 80

2. Measurement Instruments & Controllers...........................................85
Quadrupole Mass Spectrometer (Transducer Type).................................................... 86
Quadrupole Mass Spectrometer (High-speed /High-sensitivity Measurement)........... 90
QUADVISION............................................................................................................... 92
QUADVISION 3 Mobile................................................................................................ 93
Gas Analysis System
Compact Gas Analysis System C Series................................................................. 94
Compact Gas Analysis System D Series............................................................... 100
Vacuum Gauges
Transducer Vacuum Gauge Series........................................................................ 102
Vacuum Gauge Series........................................................................................... 118
Leak Detectors
Helium Leak Detectors........................................................................................... 140
Film Thickness Meter
Crystal Oscillator for Film Thickness Sensor.......................................................... 148

● Information

3. Vacuum Components......................................................................149
Piping Parts
Ultra-High Vacuum Flanges.................................................................................... 150
Connecting Components with ICF.......................................................................... 162● Pumps

Quick-release Couplings........................................................................................ 166
Vacuum Switches................................................................................................... 174
Ancillary Materials.................................................................................................. 176
ValvesUltra-High Vacuum Type-L All-metal Valves........................................................... 178
Ultra-High Vacuum Type-L Polyimide Valves......................................................... 182"V Series" Roughing Pump Valves......................................................................... 186"V Series" Type-L Valves........................................................................................ 190● Measurements

Ultra-High Vacuum Variable Leak Valves............................................................... 196
Gas Inlet Valves..................................................................................................... 198
Isolate Valves......................................................................................................... 202
Ultra-High Vacuum Gate ValveMSB series............................................................................................................. 204
STD series.............................................................................................................. 208
Feedthroughs
Rotary Feedthroughs.............................................................................................. 214
Linear Feedthroughs.............................................................................................. 220
R/L Feedthroughs................................................................................................... 222
Current Terminals................................................................................................... 224
Ultra-high Vacuum Viewing Ports........................................................................... 244
E-type Electron Guns................................................................................................. 248● Components

Information

Information
VacuumComponents-- Read Before Using This Catalog --(1) How to use this catalog
This catalog covers all vacuum pumps, gauges, and vacuum
components offered by Canon Anelva (these product's are
hereafter referred to as Components).
The catalog is divided into the following chapters: Vacuum
Pumps, Gauges, and Vacuum Components.
A Table of Contents is included at the beginning of eachchapter.
The catalog is organized so that you can easily find thedesired component.
Refer to the Table of Contents for the specific page.
The dimensions in the figures are in millimeters (mm) unless specified otherwise.

(2) Contact information
At the end of each product description, a table listing theparts numbers, types, product names, and product codes ofthe described products and related components is provided
as ordering information.
Select the required components from this list, and order byspecifying the parts numbers, types, product names, andproduct codes.

(3) Others
Please note that the specifications of the products in thiscatalog may change due to performance improvements
without prior notice.
Please contact our sales department (head office, local
branch) or vendor for questions or inquiries regarding theorder or delivery of your product.

(4) Maintenance service
Our components are manufactured and sold upon close
scrutiny and careful testing at all stages, from development
to marketing, in order to deliver "reliable and easy-to-use"
products.
Nevertheless, even highly reliable components can fail, or
reach their end of life due to wear and tear after long use.
Periodic maintenance and repair are therefore essential.
Accordingly, we provide periodic maintenance of pumps
and repair/adjustment of gauges, and offer service parts
that are indispensable for creating vacuum systems.
If you have any suggestions or questions concerning our
products, please feel free to contact us.

6Canon ANELVA Corporation Vacuum Components Catalog

Information(5) Sales network (Japan)
CANON ANELVA CORPORATION Main Office
5-1, Kurigi 2-chome, Asao-ku, Kawasaki,
Kanagawa 215-8550, Japan
Phone +81-44-980-5078 FAX +81-44-986-4249
Canon ANELVA Corporation Fuji Office8532-28, Narusawa-mura, Minamitsuru-gun,
Yamanashi 401-0397, Japan
Phone +81-555-20-5585 FAX +81-555-85-2199

Fuji OfficeFuji Office

Main Office

Main Office • Fuji Office

Canon ANELVA Corporation Vacuum Components Catalog

7

Information(6) Sales network (Overseas)

Canon Anelva Corporation
German Service
Phone

FAX

+49-0-351-892-5207+49-0-351-892-5209

Address
Manfred-von-Ardenne-Ring 20,
01099 Dresden, Germany

Canon Anelva Corporation
UK Service
Phone

FAX

+44-28-7136-1697

N/A

Address
Unit 4, 1st Floor, Phase 2 18 Balliniska Road Springtown
Industrial Estate Londonderry BT48 0NA United Kingdom

Canon U.S.A., Inc.
Phone

FAX

E-Mail(About Components Only)

Address+1-408-468-2000+1-408-468-2343

anelva_cdg@cusa.canon.com

3300 North First Street
San Jose, CA 95134 U.S.A.

Canon Semiconductor Engineering Korea, Inc.
Phone

FAX

+82-31-677-6182+82-31-677-6187

Address
Bong Bldg., 5F #1014-15
Youngtong-Dong,Youngtong-Gu,Suwon-City,Gyeonggi-Do,443-470
Korea

Canon Semiconductor Equipment Taiwan, Inc.
Phone
+886-3-668-6600

8

FAX+886-3-668-6969

Address
9F-2, No.25, Pu-Ding Road, Hsinchu, 300, Taiwan

Canon ANELVA Corporation Vacuum Components Catalog

Information

Canon Singapore Pte. Ltd.
Phone

FAX

+65-6799-8888+65-6721-4226

Address
1 HarbourFront Avenue #4-01 Keppel Bay Tower
Singapore 098632

Canon Optical Industrial Equipment Service (Shanghai), Inc.
Phone
+86-21-2316-3200

FAX+86-21-2316-3222

Address
18F,Urban City Center, No.45 Nanchang Road Shanghai

Canon ANELVA Corporation Vacuum Components Catalog

9Information

Memorandum

10

Canon ANELVA Corporation Vacuum Components Catalog

PumpsVacuum Pumps

Ion Pump/Noble Pump
Excel Pump
Ion Pump/Noble Pump Controller
Titanium Sublimation Pump/Ti-Vac Pump
Combination Pump
Cryopump POWER/POWEREco Series
Cryopump POWER Series
Cryopump POWEREco Series
Foreline Trap

Canon ANELVA Corporation Vacuum Components Catalog

11

PumpsIon Pump/Noble Pump

P-500 Series Controller■ Summary
The ion, noble, and excel pumps are ultra-high vacuum pumps which utilize the gas adsorption properties of thecathode material sputtered by cold cathode discharge within a magnetic field and the continuous formation of active getter film by sputtering cathode material (Ti) during collision with the cathode.
Since no organic materials such as oil are used, a completely oil free, ultra-high vacuum can be obtained. Operation requires only electrical power and there is no vibration or noise because there are no moving parts. In addition, the pumps can be used safely for unattended operation at night because there is no need to worry about the
pumped system becoming contaminated in case of an accident such as a sudden power failure or vacuum leak.
The noble and excel pumps are tripolar type ion pumps with improved inert gas pumping speed. They have all thefeatures of an ion pump, but are capable of stable pumping of inert gas.
Furthermore, the excel pump has improved discharge characteristics at the extreme high vacuum region due to
optimized discharge conditions.

12

Canon ANELVA Corporation Vacuum Components Catalog

MagnetPump element
Inlet flange

Current input terminal

915-9520 Noble Pump element

Pumps

Link line
Pump element915-9510 Ion Pump element
Fig. 1 Ion Pump/Noble Pump external(Example: 140L/s Ion Pump, 110L/s Noble Pump)

Fig. 2 Pump elements■ Features
1. Completely oil free
A clean vacuum can be obtained without contaminating the system because no organic materials
such as oil are used. In addition, there is no needto close the valve even in case of a power failure.
Residual gas analysis of ion pumpsystem vacuum equipment
Full pressure: 9.3×10-7Pa

Residual gas analysis of diffusion pumpsystem vacuum equipment
Full pressure: 1.6×10-5Pa

1×10–13A
1×10–12A

M/e 1–2

18

28

M/e 1–2

18

28

44

57

80

91

Fig. 3 Comparison of ion pump and oil diffusion pump residual gas(M/e = 44 or more hydrocarbon is hardly ever observed in the ion pump system.)Canon ANELVA Corporation Vacuum Components Catalog

13

2. Ultra-high vacuum, extreme high vacuum
The ion pump/noble pump is best suited for creating extreme high vacuum in the range of 10-1Pa to
10-9Pa. Especially when used in combination witha titanium sublimation pump, a ultra-high vacuumof 10-9Pa can be achieved quickly.
In addition, an excel pump can achieve practicalextreme ultra-high vacuum (approx. 10-10Pa) using a newly developed pump element and an NEG
module (option) with improved discharge characteristic at the ultra-high vacuum and extreme highvacuum region.

3. Unattended operation
Only electrical power is required making it convenient for night-time unattended or remote operation.
In addition, there is a protection circuit that automatically turns off the power when the pressure
exceeds 10-3 to 10-2Pa*.
* Note that the above pressure range changes according to the controller used.

Pressure
×10−9Pa

Pumps

20
18
16
14
12
10

ON

ON

50sec

OFF

2

OFF

4

OFF

6

ON

8

100sec150secTime

Fig. 4 Pressure change when ion pump is turned ON-OFF at 10-9Pa(The pressure rises immediately when the pump is turned OFF and drops within a few seconds after it isturned ON again. You can see that the ion pump is operating normally at 10-9Pa.)

4. Quiet operation
Completely free of vibration and noise because
there are no mechanical moving parts.

5. Energy saving
Because power consumption decreases in proportion to pressure, very little power is consumed
except during startup.

Power consumption (W)
600
500
400
300
200
100
0
10−6

10−5

10−4

10−3

10−2

10−1

PressurePa

Fig. 5 Power consumption example (60L/s ion pump)

6. No vacuum gauge necessary
The pressure within the pump can be determinedfrom the discharge current which is proportional tothe pressure. Therefore, the approximate pressure
can be monitored simply by using the pump as avacuum gauge. [10-3Pa to 10-6Pa] region.
In addition, the recorder output of the pressure is
output logarithmically.

14

7. Fast startup
Compared to diode ion pumps, noble pumps startup fast at low vacuum. They can also be started at
higher pressure.
Ion pump 1.3Pa or less
Noble pump 6.7Pa or less
* Note that the above pressure range changes according to the controller used.

Canon ANELVA Corporation Vacuum Components Catalog

8. Inert gas pumping(Noble Pump/Excel Pump)
Improved inert gas pumping speed compared todiode ion pumps. (Approximately 21% of air withargon)In addition, argon instability is less likely to occur
compared to ion pumps. Table 1 shows the pumping speed ratio of ion pumps and noble/excel pumps
for each gas.

Hydrogen[10-4Pa or less]Nitrogen
Vapor
Carbonmonoxide
Carbondioxide[10-3Pa or less]
Various hydrocarbon
OxygenHeliumArgon

9. Free mounting direction
There is no restriction on the mounting direction;up, down, horizontal or diagonal.
10. Low leakage magnetic field
A ferrite magnet is used for 20L/s or more pumps.
The leakage magnetic field decays close to geomagnetism at 30cm from the flange.
(See Fig. 10 for details)

Ion
pump

Noble
pump

Excel
pump

200 to 270*

200 to 270*

200 to 270*

100
100

100
100

100
100

100

100

100

100

100

100

90 to 160

90 to 160

90 to 160

57
10
1

57
30
21

57
30
21

Pumps

Table 1 Pumping speed ratio of various gases against
nitrogen (%)* 100 to 110 for ion, noble, and excel pumps at pressures equal to or
more than 10-3Pa.

■ Principle

Trapped gas
molecules

Gas ionTitanium atom

Anode Titanium atom

Magnetic field

Magnetic field

Anode

CathodeCathodePump shell+V
Ion pump

Gas ionPump shell

Adsorbed inert
gas molecules−V

Noble pump/Excel pump

Trapped gas
molecules

Fig. 6 Ion Pump/Noble Pump/Excel Pump pumping mechanism■ Applications• Completely oil free ultra-high vacuum and extreme vacuum pumping systems• Ultra-high vacuum and extreme high vacuum experimental equipment• Pumping systems such as electron microscopes, surface and other analyzers• Pumping systems such as particle accelerators, nuclear fusion experimental devices, and space environmental testing equipment• Vacuum retention pump for electron tubes, etc.
• Heating pumping equipment such as electron tubes
etc.

Canon ANELVA Corporation Vacuum Components Catalog

15

■ 20L/s Ion Pump/Noble Pump
● Specifications
Name

20L/s Ion Pump

Type

20L/s Noble Pump

912-7125912-7120

Pumping speed (N2 gas)

20L/s
10-1 to 10-9Pa

Operating range(Note 1)

1 to 10-9Pa
2x10-2Pa or less

Pump

Ready to start pressure(Note 1)
Capacity

1.4L

Maximum heating temperature

250°C

Inlet

φ70ICF

Current input terminal

Non-replaceable

Element (replaceable)

Non-replaceable

Magnet912-7121 (x1) included

Weight10.5kg● Standard configuration
Name and Type
Components

20L/s Ion Pump

20L/s Noble Pump

912-7125912-7120x1

Attachment gasket for φ70ICF

x2

(67)

Pump body

133±1.5

Pump

(65)

(105)
(194)
(214)
216±1.5

φ 70 ICF

(100)

187±2

(121)

(11)

(20)

M32PI

(13)

Pumps

Note 1: Note that the value in the table will change depending on the controller used.

(20)

Fig. 7 (a)16154±1.5

20L/s Ion Pump (912-7125)
20L/s Noble Pump (912-7120)

Canon ANELVA Corporation Vacuum Components Catalog

4-M6
Depth 36±1

■ 30L/s Ion Pump/Noble Pump
● Specifications
Name

30L/s Ion Pump

Type

30L/s Noble Pump

912-7135912-7130

Pumping speed (N2 gas)

30L/s
10-1 to 10-9Pa

Operating range(Note 1)

1 to 10-9Pa
2x10-2Pa or less

Pump

Ready to start pressure(Note 1)
Capacity

2.2L

Maximum heating temperature

250°C

Inlet

φ114ICFCurrent input terminal

954-7281

Element (replaceable)

Non-replaceable

Magnet912-7121 (x1) included

Weight12.5kg

Pumps

Note 1: Note that the value in the table will change depending on the controller used.

● Standard configuration
30L/s Ion Pump

30L/s Noble Pump

912-7135912-7130

Pump bodyx1

Attachment gasket for φ114ICF

x2

216±1.5
(214)
(194)

133±1.5

(105)

168±3

φ 114 ICF

M32PI

Fig. 7 (b)154±1.5

30L/s Ion Pump
(912-7135)
30L/s Noble Pump (912-7130)

Canon ANELVA Corporation Vacuum Components Catalog

228±2

(13)

(20)

(150)

(100)

(40)

(22)

Pump

Name and Type
Components

4-M6
Depth 36±1

17

■ 60L/s Ion Pump/Noble Pump
● Specifications
Name

60L/s Ion Pump

Type

60L/s Noble Pump

912-7165

912-7160

Pumping speed (N2 gas)

60L/s
10-1 to 10-9Pa

Operating range(Note 1)
Pump

Ready to start pressure

2x10 Pa or less-2

Capacity

6.2L

Maximum heating temperature

250°C

Inlet

φ152ICFCurrent input terminal

954-7281

Element (replaceable)

915-7027 (1 set)

915-9527 (1 set)

Magnet912-7121 (x2) included

Weight25.6kgNote 1: Note that the value in the table will change depending on the controller used.

● Standard configuration
Name and Type
Pump

Components

60L/s Ion Pump

60L/s Noble Pump

912-7165

912-7160

Pump bodyx1

Attachment gasket for φ152ICF

x2

133±1.5(67)356±1.5188±4φ152 ICF

(195)
(9.5)

293±2

(214)

(28.5)

M32PI

(3.5)

Pumps

1 to 10-9Pa(Note 1)

(10)

(100)

108±1

(100)

(110)

(126)

(110)
4-M6
Depth 108±1Fig. 7 (c)18

60L/s Ion Pump
(912-7165)
60L/s Noble Pump (912-7160)

Canon ANELVA Corporation Vacuum Components Catalog

■ 110L/s Noble Pump•140L/s Ion Pump
● Specifications
110L/s Noble Pump

140L/s Ion Pump

Type

Name

912-7020

912-7010

Pumping speed (N2 gas)

110L/s

140L/s1 to 10-9Pa

10-1 to 10-9Pa

Operating range(Note 1)

1x10-2Pa or less

Pump

Ready to start pressure(Note 1)
Capacity

18L

Maximum heating temperature

250°C

Inlet

φ203ICFCurrent input terminal

954-7281

Element (replaceable)

915-9520 (x1)915-9510 (x1)

Magnet912-7001 (x1) included

Weight

48kg

Pumps

Note 1: Note that the value in the table will change depending on the controller used.

● Standard configuration
110L/s Noble Pump

Pump

Name and Type
Components

140L/s Ion Pump

912-7020

912-7010

Pump bodyx1

Attachment gasket for φ203ICF

x2

Fig. 7 (d)110L/s Noble Pump (912-7020)
140L/s Ion Pump
(912-7010)

Canon ANELVA Corporation Vacuum Components Catalog

19

■ 220L/s Noble Pump
● Specifications
Name

220L/s Noble Pump

Type

912-7040

Pumping speed (N2 gas)5x10-1 to 10-9Pa

Operating range(Note 1)
Pump

Ready to start pressure

6x10-3Pa or less

(Note 1)

Capacity

26L

Maximum heating temperature

28L
250°C

Inlet

φ203ICFCurrent input terminal

954-7281

Element (replaceable)

915-9510 (x2)Magnet912-7002 (x1) included

912-7001 (x2) included

Weight85kg

90kg

Note 1: Note that the value in the table will change depending on the controller used.

● Standard configuration
Pump

Name and Type
Components

220L/s Noble Pump

220L/s Noble Pump

912-7040

912-7041

Pump bodyx1

Attachment gasket for φ203ICF

x2■ 270L/s Ion Pump
● Specifications
Name

270L/s Ion Pump

Type

912-7030

Pumping speed (N2 gas)

Pump

Ready to start pressure912-7031
270L/s5x10-2 to 10-9Pa

Operating range(Note 1)

6x10-3Pa or less

(Note 1)

Capacity

26L

28L

Maximum heating temperature

250°C

Inlet

φ203ICFCurrent input terminal

954-7281

Element (replaceable)

915-9510 (x2)Magnet912-7002 (x1) included

912-7001 (x2) included

Weight85kg

90kg

Note 1: Note that the value in the table will change depending on the controller used.

● Standard configuration
Name and Type
Pump

Pumps

912-7041
220L/s20

Components

270L/s Ion Pump

270L/s Ion Pump

912-7030

912-7031

Pump bodyx1

Attachment gasket for φ203ICF

x2

Canon ANELVA Corporation Vacuum Components Catalog

Pumps
504±6

210±3

M32PI

480±6

179±3

217±3

(25)

(84)

429±5

470±5

128±3

250±3

186±3

(80)

298±4
M32PI

310±5

210±3

210±3

φ 203 ICF

φ 203 ICF

(30)

(25)

(30)

M32PI

(164.5)

Fig. 7 (e)

96±2

130±3

220L/s Noble Pump (912-7040)
270L/s Ion Pump
(912-7030)

Fig. 7 (f)

140±3

130±3

554±5

373±5

554±5

470±5

373±5
429±5

8-M12

16-M12

220L/s Noble Pump (912-7041)
270L/s Ion Pump
(912-7031)

Canon ANELVA Corporation Vacuum Components Catalog

21

■ 400L/s Noble Pump•500L/s Ion Pump
● Specifications
400L/s Noble Pump

500L/s Ion Pump

Type

Name

912-7060

912-7050

Pumping speed (N2 gas)

400L/s

500L/s1 to 10-9Pa

10-1 to 10-9Pa

Operating range(Note 1)

3x10-3Pa or less

Pump

Ready to start pressure(Note 1)
Capacity

38L

Maximum heating temperature

250°C

Inlet

φ203ICFCurrent input terminal

954-7281915-9520 (x4)915-9510 (x4)Magnet912-7002 (x2) included

Weight120kg

Note 1: Note that the value in the table will change depending on the controller used.

● Standard configuration
Components

400L/s Noble Pump

500L/s Ion Pump

912-7060

912-7050

Pump bodyx1

Attachment gasket for φ203ICF

x2

210±3

186±3

M32PI

250±3

Name and Type
Pump

483±5
507±6

96±2

Fig. 7 (g)

22

216±4

400L/s Noble Pump (912-7060)
500L/s Ion Pump
(912-7050)

Canon ANELVA Corporation Vacuum Components Catalog

96±2

16-M12

554±5

470±5

(25.4) (30)φ 203 ICF

373±5
429±5

Pumps

Element (replaceable)■ 800L/s Noble Pump•1000L/s Ion Pump
● Specifications
Name

800L/s Noble Pump

Type

912-9110

Pumping speed (N2 gas)Pump

912-9100912-7195

800L/s

1000L/s

10-2 to 10-9Pa

Operating range(Note 1)
Ready to start pressure

1000L/s Ion Pump

912-7190

10-3 to 10-9Pa
2x10 Pa or less

(Note 1)

-3

Capacity

106L

Maximum heating temperature

250°C

Inlet

φ326CS flange

φ356ICFCurrent input terminal

φ326CS flange

φ356ICF

954-7281

Element (replaceable)

912-9520 (x8)915-9510 (x8)Magnet912-7003 (x2) included

Weight

257kg

Pumps

Note 1: Note that the value in the table will change depending on the controller used.

● Standard configuration
Pump

Name and Type
Components

800L/s Noble Pump

800L/s Noble Pump

1000L/s Ion Pump

1000L/s Ion Pump

912-9110912-7190

912-9100912-7195

x3 (gasket for φ326CS
flange)x3 (gasket for
φ356ICF)x1
x3 (gasket for φ326CS
flange)x3 (gasket for
φ356ICF)

Pump body
Attachment gasket

Fig. 7 (h)800L/s Noble Pump (912-9110)
800L/s Noble Pump (912-7190)
1000L/s Ion Pump (912-9100)
1000L/s Ion Pump (912-7195)

Canon ANELVA Corporation Vacuum Components Catalog

23

■ Pumping speed - pressure characteristics (Fig. 8)

80

N2

Pumping speed (L/s)

Pumping speed (L/s)

80

60 L/s60
30 L/s40

20 L/s

20
10−6

10−5

10−4

10−3

60
40

30 L/s
20 L/s20010−2

60 L/s

10−6

10−5

10−4

10−3

Pressure Pa

Pressure Pa

20L/s•30L/s•60L/s Ion Pump

20L/s•30L/s•60L/s Noble Pump

10−2

Pumps

0

N2

625

N2

270 L/s

Pumping speed (L/s)

Pumping speed (L/s)

300

220 L/s

200

140 L/s
100
0110 L/s

10−6

10−5

10−4

10−3

10−2

N2

500 L/s

500

400 L/s

375
250
125
0

10−6

10−5

400L/s Noble Pump•500L/s Ion Pump

110L/s Noble Pump•140L/s Ion Pump
220L/s Noble Pump•270L/s Ion Pump

Pumping speed (L/s)

N21000 L/s

1,000

800 L/s

750
500
250
0

10−6

10−5

10−4

10−3

10−2

Pressure Pa

800L/s Noble Pump•1000L/s Ion Pump

24

10−3

Pressure Pa

Pressure Pa

1,250

10−4

Canon ANELVA Corporation Vacuum Components Catalog

10−2

■ Pressure - pump current characteristics (Fig. 9)
10−2

10−2

10−3

20L/s • 30L/s

10−4

Pressure Pa

60L/s

10−5

10−6

20L/s • 30L/s

10−4

60L/s

10−5

10μA

100μA

1mA

10mA

10−6

100mA

10μA

100μA

1mA

20L/s•30L/s•60L/s Ion Pump

10−2

220L/s

270L/s10−3

110L/sPressure Pa

10−3
Pressure Pa

100mA

20L/s•30L/s•60L/s Noble Pump

10−2

400L/s10−4
800L/s

10−5

10−6

10mA

Pump current

Pump current

Pumps

Pressure Pa

10−3

100μA

1mA

140L/s10−41000L/s

10−5

10mA

100mA

1A

10−6

10μA

100μA

1mA

10mA

100mA

1A

Pump current

Pump current

110L/s•220L/s•400L/s•800L/s Noble Pump

500L/s

140L/s•270L/s•500L/s•1000L/s Ion Pump

Canon ANELVA Corporation Vacuum Components Catalog25

1×10−2

1×10−2A
1×10−3

1×10−4

C
0

B

B

A

20 cm 40 cm
Distance

Pumps

1×10−5C

Leakage magnetic flux density (Tesla)

Leakage magnetic flux density (Tesla)■ Leakage magnetic flux characteristics (Fig. 10)

60 cm

1×10−3

1×10−40

Leakage magnetic flux density (Tesla)

Leakage magnetic flux density (Tesla)

1×10−3

1×10

1×10−50C
C

20 cm 40 cm
Distance

B

Leakage magnetic flux density (Tesla)

20 cm 40 cm
Distance

1×10−3

1×10−4A

B

C

0

20 cm 40 cm
DistanceC
1×10−3C

B

B

A
20 cm 40 cm
Distance

60 cm

800L/s Noble Pump
1000L/s Ion Pump

26

60 cm

400L/s Noble Pump
500L/s Ion Pump

A

0

B

60 cm

A

1×10−2

1×10−5CC

1×10−2

1×10−560 cm

110L/s Noble Pump
140L/s Ion Pump

1×10−4B

60L/s Noble Pump
60L/s Ion Pump

A

B

C

A

1×10−2AB

1×10−5

20L/s Noble Pump
20L/s Ion Pump

−4

A

Canon ANELVA Corporation Vacuum Components Catalog

■ Options● Output cable assembly
The following options are available as an output cable
assembly in addition to the standard 3m. Please specify when ordering controllers. Refer to the following
notes when ordering. B type output plug is included.
Type

3m

954-74035m

954-74057m

954-74079m

954-7409

Applicable pump

Applicable controller

20L/s to 1,000L/s
Ion Pump andNoble Pump
125L/s Excel Pump

P-500 series Ion Pump controller
Noble Pump controller

Pumps

Length954-7403, 7405, 7407, 7409 output cable assemblyCanon ANELVA Corporation Vacuum Components Catalog

27

● Maintenance/consumable parts
Replacement element

pump selection. If the appropriate components and

For ion and noble pumps of 60L/s or more, the ele-pump are not selected carefully, the intended perfor-

ment must be replaced at the end of its product life.

mance of the ion pump may not be able to be achieved.

Refer to the ordering information for the element type

Please contact us when designing the vacuum system.

and quantity.

Generally, the following pumping system configura-

Depending on the degree of contamination of thetions are recommended

pump, simply replacing the element may not beenough to sufficiently restore the characteristics.
In this case, the container must be cleaned and heat

Current input terminal

pumped. Please contact us for details. (Refer to the

The current input terminal can be replaced for 30L/s
or more pumps. Refer to the section on current input

section on application.) For pumps of 30L/s or less,terminal.

replaced because it cannot be renewed.

■ Application
When using an ion pump to create an ultra-highvacuum, the selection of the components of the vacuum system and internal processing of the vacuum
chamber are also very important in addition to the ion

Precautions before ordering
If you already have a controller and are only order-side output plug. When newly purchasing, the con-ing a pump or you already have a pump and are only

troller comes with B type output plug and the pumpordering a controller, check the compatibility of thecomes with B type current input terminal.

pump side current input terminal with the controller
Current input terminal
Applicability
A type

M3

2s

M32

B type

pe

cia

ls

cre

ws

A type

req

uir

ed

Applicable

B type• The B type current input terminal does not match the A type output plug.
If you have an old controller with A type output plug and are ordering apump with B type current input terminal, be sure to also order an output
cable assembly with B type output plug.
• The A type current input terminal can be made compatible with the B
type output plug by using an M32 special screw. If you have a pump with
A type current input terminal and are ordering a controller with B typeoutput plug, be sure to also order an M32 special screw. (Please specify
according to the pump type.)

3-M3 set screw

5

M32

SpringOutput plug

Applicable

A

Pumps

the entire pump unit excluding the magnet must be

M32 special screw
Type

28

Name

Applicable

Dimension A

915-7020

M32 special screw (1) 110L/s, 140L/s, 220L/s, 270L/s, 400L/s, 500L/s, 800L/s, 1000L/s pump

φ20.2

915-7019

M32 special screw (2) 1L/s, 8L/s, 20L/s, 60L/s, pump

φ19.3

Canon ANELVA Corporation Vacuum Components Catalog

● Usage example

Turbo molecular pump

Sublimation
pump

Vacuum chamber

Ti

Valve

Leak valve

Valve

Pumps

Oil rotary pump
Ion pump

Fig. 11 Combining the roughing system with turbo molecular pump and oil rotary pumpNote) The pump may not start depending on the roughing system's ultimate pressure. Refer to page 40 for the ready to start pressure.

● To activate the ion/noble pump

● Overhaul

Roughing must be performed with other pumps at at-

The life of the ion pump and noble pump varies

mosphere to 6.7Pa or at 1.1×10 Pa or less depending

greatly with the condition of use. Normally, however,on the pump and the controller. The following system

it is about 30,000 to 40,000 hours at 1×10-4Pa. The

is recommended as the roughing pump.

life will decrease in inverse proportion to the working• System combining the turbo molecular pump and oilpressure. In general, the end of product life should be-4

assumed when the ultimate pressure drops or whenrotary pump (Fig. 11)

Currently, this is the most common method. Any
ion pump/noble pump and controller can be usedbecause the ultimate pressure of the roughing
system is favorable. This is well suited for roughing of large capacity systems or ultra-high vacuum
systems when low ultimate pressure is necessary
because oil free roughing is possible.
● When there is a large amount of gas emission

the startup time increases. The following overhaul
methods are available when the end of product life isreached.
• Replace or restore the element

pump (956-7015) is recommended. Even when there is

The most simple restoration method is sufficient
to restore the characteristics if the required ultimate pressure is not so high. In addition, clean thepump container with acetone.
Please contact us for details on restoring the element.

a large amount of gas emission, quick and safe pump-• Replace the element and current terminal, clean and

Use in combination with our titanium sublimation

ing is possible and ultra-high vacuum can be obtained
quicker than with an ion pump alone. It is also oilfree.

● To obtain ultra-high vacuum
Use in combination with our titanium sublimation
pump (956-7015) or use of an excel pump with the
NEG module is recommended. (Refer to the excel
pump application for details)

heat pump the pump container.

Please specify under the name overhaul A. We
will pick up the pump set and perform the abovementioned overhaul. The pump characteristics will
be restored to as good as new. Periodic inspectionof the power supply is recommended as well.

[Notes on use]
If you pump special gas specified in the "Ordinance on
Prevention of Hazards Due to Specified Chemical Substances", the pump may cease to operate or overhaul
may not be possible. Please contact us in advance.

Canon ANELVA Corporation Vacuum Components Catalog

29

Excel Pump

Pumps

Extreme high vacuum compatible ion pump

■ Summary
In recent years, there has been an increasing demand for compact ion pumps with high pumping performance in the extreme high vacuum (XHV) range inthe state-of-the-art fields such as accelerators, quantum effect devices for semiconductors, and single
atom manipulation.
The excel pump is an ion pump that can achieve XHVusing a newly developed noble element with improved discharge characteristics in the low pressure
range, a built-in heater (option) for efficient baking,and an integrated NEG pump module (option).

■ Features
1. High pumping performance in the UHV and XHVrange
For practical use, approximately 10 Pa is realizedusing a newly developed pump element with improved discharge characteristics in the low pressure
range and an NEG module (option).
-10

2. Compact and light weight

3. Highly efficient baking
The built-in baking heater (option) and standard
cover with thermal insulation function enables efficient baking with low power requirements.

4. Support for clean room
Smooth surface heat-resistant paint is used for thecover and magnet.

Compared to conventional 110L/s noble pumps, thesize is reduced by 40% (125L/s excel pump).
The intake flange is also reduced to φ152ICF (φ4″).

30

Canon ANELVA Corporation Vacuum Components Catalog

■ 125L/s Excel Pump
● Specifications
Name

125L/s Excel Pump

Type

912-7100

Pumping speed (N2 gas)

125L/sOperating range(Note 1)

10-3 to *10-10Pa *NEG module installed

Pump

Ready to start pressure(Note 1)

1x10-2Pa or less

Capacity
Maximum heating temperature
Inlet

Approx. 10L
250°C (pump shell with magnet removed
may be baked up to 400°C)
φ152ICFCurrent input terminal

954-7281

Element (replaceable)

915-7070 excel element (x2)Magnet912-7005 (x1) included in main unit

WeightApprox. 48kg

Pumps

Note 1: Note that the value in the table will change depending on the controller used.
This specification shows the case using the P-521NP controller.

● Standard configuration

Pump

Name and Type
Components
Pump body912-7100 125L/s Excel Pump
x1

Magnet

1 set

Cover

1 set

Attachment gasket for φ152ICF

x2

Fig. 1 912-7100 125L/s Excel Pump

Canon ANELVA Corporation Vacuum Components Catalog

31

■ Pumping speed - pressure characteristics (Fig. 2)

Pumping speed (L/s)

150

N2

(without NEG)

100

50

10−6

10−5

10−4

10−3

Pressure pa

125L/s Excel Pump

■ Pressure - pump current characteristics (Fig. 3)
10−1

Pressure Pa

10−2

10−3

10−4

10−5

10−6

10−7

10μA

100μA

1mA

10mA 100mA

Discharge current

125L/s Excel Pump
(without NEG)

■ Leakage magnetic flux characteristics (Fig. 4)
1×10−2

Leakage magnetic flux density (Tesla)

Pumps

10−7

C

C

B

1×10−3B

A

1×10−4

1×10−532

A Measurement point

0

20 cm
40 cm
Distance

60 cm

Canon ANELVA Corporation Vacuum Components Catalog

125L/s Excel Pump

■ Options● Specifications● Excel Pump heater kit

Type915-7130

Name

Heater kit for 125L/s Excel Pumpum container as well as the pump body is essential.

Power requirements

920W

Since this heater kit has a structure incorporating

Input voltage

1φ 100V AC

Contents

Plate heater (400W)
Rubber heater (260W)
Heater mount

Temperature
distribution

At approx. 4 hours after turning on heater
Temperature near NEG
350°C
Temperature near element 260°C
Magnet surface temperature 150°C

In order to obtain an ultra-high vacuum or extreme
high vacuum with the ion pump, baking of the vacu-

a heater between the magnet and excel pump body,highly efficient baking is possible compared to conventional sheath heaters.
In addition, the NEG module (option) can be activatedeasily while baking the excel pump because it is also
used as an activation heater for the NEG module (option).

1 set
2 sets
1 set

Pumps

Note) This heater kit does not have a temperature control function. It
is designed to obtain the optimum temperature distribution approximately four hours after the heater is turned on.

■NEG moduleThis is an optional module that is integrated with theexcel pump to increase the pumping speed of active
gas, especially hydrogen in the ultra-high vacuum(UHV) to extreme high vacuum (XHV) range to easily
obtain XHV.
It is attached inside the excel pump container andfunctions as a pump through activating by baking.
Indirect heating using a plate heater attached to theoutside of the excel pump container enables easy activation along with baking of the excel pump.

Features• High pumping performance at UHV and XHV range

The pumping speed of hydrogen, which is the main
residual component in the UHV to XHV range, ishigh. This increases the hydrogen pumping speed byseveral factors enabling XHV to be obtained easily.
• Small, light weight, and easy to mountIt can be easily attached inside the excel pump witha single fixing bolt.
• Easy reactivation

1)	The built-in baking heater (option) and thestandard cover with thermal insulation function enable efficient activation with low power
consumption.
2)	The heater capacity is optimized and only rated
voltage is necessary to bake at optimum temperature without special temperature control.

Canon ANELVA Corporation Vacuum Components Catalog

33

● Specifications

NEG pump: Non Evaporable Getter Pump

Type

915-7090

Name

A90 NEG module

NEG material

ST707 (Italy, SAES Getters Inc.)
Zr (70%) -V (24.6%) -Fe (5.6%) alloy
H2: Approx. 300L/s
N2: Approx. 45L/s

Pumping
speed(Note 1)
Displacement(Note 2)

Recommended
operating pressure range• A pump that pumps gas by surface sorption followed by internal bulk diffusion using chemically
active materials. Similar to TSP, it is used forpumping active gases such as hydrogen, oxygen,nitrogen, and CO.

H2: Approx. 240000Pa·L
N2: Approx. 120Pa·L≤2×10-6Pa* While being exposed to high pressure fora short time is inevitable during activation and while pumping, the NEG must
be reactivated within a short time if it isused constantly at high pressure.
(Reference) Example of reactivationinterval(Note 3)
Continuous use at 1.3 x 10-6Pa: Per approx. 500h
Continuous use at 1.3 x 10-7Pa: Per approx. 5000h

alloy (SAES Getters Inc., St101), 70%Zr-24.6%V5.6%Fe (SAES Getters Inc., St707) are available.

● Precautions before ordering
When newly purchasing a pump
• Order together with the heater kit for 915-7130
excel pump.
• The heater kit is shipped attached to the excel
pump.
• The NEG module is attached to the pump filledwith nitrogen. Mount inside the pump when attaching the pump to the target vacuum system.
When replacing due to end of life of the NEG module• Only the NEG module is shipped filled with nitrogen. Please mount it inside the pump at your site.

79±2

30±1.5Note 1 Shows the pumping speed at pump outlet at NEG room temperature immediately after activation when a 125L/s excel pumpis built-in.
Note 2 Shows the pumping capacity at room temperature after a single
activation. Note that this H2 gas pumping capacity shows the
maximum possible pumping capacity. Actually, it is determinedby the H2 gas partial pressure of the NEG environment.
Note 3 The activation interval assumes residual gas in a typical UHV
range containing H2O, CO, CO2, etc. with hydrogen as the main
component. In addition, activation is necessary after each exposure to atmosphere.

* It cannot pump inactive gases such as helium or
argon, or methane.
• Getter materials such as titanium, 84%Zr-16%AL

)

(45

(245)
230±2

(15)

60±2

Pumps

● What is NEG

Fig. 5 NEG module

34

Canon ANELVA Corporation Vacuum Components Catalog

● Maintenance/consumable parts• Replacement element NEG module• Output cable assembly

The excel pump element and NEG module can be
replaced at the end of their product life. Refer to theordering information for the type and quantity.
Depending on how contaminated the pump is,
simply replacing the element may not be enough tosufficiently restore its characteristics. In this case,the container must be cleaned and heat pumped.
Please contact us for details.

The following output cable assemblies are available.
Please specify when ordering the controller. Notethat the output cable assembly is the same as the
P-500 series.
LengthType3m

954-74035m

954-74057m

954-74079m

954-7409• Current input terminal

The current input terminal can be replaced. Refer tothe ordering information for the type.

Pumps■ Application● Usage example
Vacuumchamber
P-521NP
Noble pump controller

ValvesTurbomolecular
pump

Valves

Leak
valve

Dry
pump

Heater input
100V AC912-7100 125L/s Excel pump
Options○ 915-7090 A90 NEG module○ 915-7130 heater kit

Fig. 6 Extreme high vacuum system combining excel pump with oil-free roughing system―― Pumping system and connection method ――
The above pumping system is recommended as anextreme high vacuum system using the excel pump.
In addition, you can use an oil rotary pump and aforeline trap combination instead of the dry pump.

―― Pumping method――(1)	Pump the vacuum chamber and excel pump to approximately 10 Pa with a turbo molecular pump.
-5(2) Activate the NEG module and bake the excel pumpand vacuum chamber. Note that the NEG module
can be activated by baking it together with theexcel pump main unit using the 915-7130 heaterkit (option).
(3) After baking, start the excel pump, close the turbo
molecular pump side valve and pump to extreme
high vacuum range with the excel pump and theactivated NEG module.

• Baking conditions (activation conditions)○ Pump pressure during baking: 1×10-3Pa or less
○ Baking time: 8hr or more (including warm-up
time)• Baking while pumping
Baking while pumping with a high vacuum pumpsuch as TMP is ideal. If the gas load is small, however, baking while self-pumping with the excel
pump is also possible. In this case, the following
conditions is recommended.
○ Pump pressure during baking: 1×10-5Pa or less

● Life expectancy• Replacement of the NEG module is recommended
after 30 atmospheric exposures or equivalent load.
• Performance for hydrogen drops to approximately
40% of initial pumping speed after 30 atmosphericexposures. However, if nitrogen purge is performed,―― Activation method ――• Activation is possible simply by baking together
with the excel pump main unit using a dedicatedheater kit (915-7130 125L/s heater kit for excel

the drop in performance can be reduced to approximately 90% of the initial pumping speed even after
30 exposures.

pump).

Canon ANELVA Corporation Vacuum Components Catalog

35

■ Ordering information

Pumps

Parts Number

Model

Description

RemarksCode2-110015

912-7125

20L/s Ion Pump

With φ70ICF

10020

0111-19171

912-7127

20L/s Ion pumpWith φ70ICF without magnet

10021

0111-19553

912-7135

30L/s Ion Pump

With φ114ICF

10022

0111-79286M

912-7137

30L/s Ion Pump

With φ114ICF without magnet

10023

2-110016

912-7165

60L/s Ion Pump

With φ152ICF

10030

0111-24443M

912-7010

140L/s Ion Pump

With φ203ICF

10040

0111-24841

912-7030

270L/s Ion Pump

With φ203ICF

10042

0111-19545M

912-7031

270L/s Ion Pump

With φ203ICF, left-right symmetric10043

1-110008

912-7050

500L/s Ion Pump

With φ203ICF

10050

P21-04273

912-9100

1000L/s Ion Pump

With φ326CS flange

10060

P21-03919

912-7195

1000L/s Ion Pump

With φ356ICF

10062

2-310186912-7120

20L/s Noble Pump

With φ70ICF

10120

0111-17909

912-7122

20L/s Noble Pump

With φ70ICF without magnet

10121

0111-15664

912-7130

30L/s Noble Pump

With φ114ICF

10122

0111-55957

912-7132

30L/s Noble Pump

With φ114ICF without magnet

10123

2-310167

912-7160

60L/s Noble Pump

With φ152ICF

10130

1-110006

912-7020

110L/s Noble Pump

With φ203ICF

10140

0111-24566

912-7040

220L/s Noble Pump

With φ203ICF

10142

0111-24809

912-7041

220L/s Noble Pump

With φ203ICF, left-right symmetric10143

1-110007

912-7060

400L/s Noble Pump

With φ203ICF

10150

VMT-580912-9110

800L/s Noble Pump

With φ326CS flange

10160

P25-03037

912-7190

800L/s Noble Pump

With φ356ICF

10162

P25-04001

912-7100

125L/s Excel Pump

φ152ICF, with cover, with heater kit

10651

833-4448954-7403

Output Cable assembly(3m)For 20L/s-1000L/s IP/NP (3m)10548

VMT-4784954-7405

Output Cable assembly(5m)For 20L/s-1000L/s IP/NP (5m)10549

0111-14422

954-7407

Output Cable assembly(7m)For 20L/s-1000L/s IP/NP (7m)10550

0111-14430

954-7409

Output Cable assembly(9m)For 20L/s-1000L/s IP/NP (9m)10551

Note) Contact us for more information about CE (RoHS).

36

Canon ANELVA Corporation Vacuum Components Catalog

PumpsMemorandum

Canon ANELVA Corporation Vacuum Components Catalog

37

PumpsTitanium Sublimation Pump/Ti-Vac Pump

■ Summary
The titanium sublimation pump and ti-Vac pump are getter pumps that heat and sublimate titanium within avacuum to form a titanium evaporated film (getter surface) on the surrounding walls and use the getter effect ofmetal to absorb and discharge gas.

■ Features■ Specifications

1. Oil-free ultra-high vacuum● Pump bodyAn oil-free ultra-high vacuum can be achieved whenused together with an ion pump.
2. Economical
When used together with an ion pump, turbo molecular pump, or cryopump, the pumping rate and ultimate pressure can be improved significantly making
it extremely economical compared to a single largepump.
3. Compact design
The compact light weight design makes it possible
to install the pump anywhere.
4. Excellent control function
The controller uses a unique control method thatprevents the filament life from being reduced due tofrequent ON-OFF.
5. Simple attachment and removal
The controller is connected to the pump with a connector to facilitate attachment and removal.
6. Easy replacement
The evaporation sources (titanium filament, Ti-Vac
head) can be replaced easily.

Name956-7015

Operating pressure

3 Pa or less

Effective amount oftitanium
Number of filaments
Amount of titanium
evaporation

42

Approx. 1g/pump
×3

Ti-Vac Pump
956-7040

Approx. 15g-

Approx. 0.07g/h (perpump) at 45A power

Average 0.35g/h
at 48A power

Used flange

φ70ICF flange

WeightApprox. 580g

Approx. 680g

Dimensions

See Fig. 1

See Fig. 2● Controller
Name

Sublimation controller

Type

922-9119

Input

200V AC±20V 1φ 2A 50/60Hz

OutputVoltage: 2.8 to 10.8V AC (with output open)
Variable with slider
Current: Up to 50A
Power: Up to 430W

ControlmethodEvaporation - preheating control with two independent timers
Output voltage during evaporation:
Variable with slider
Output voltage during preheating:
Fixed at approx. 3.8V
Timer setting:
Both evaporation and preheating time
can be set to 0 or from 1 to 10 minutes
Operation: Evaporation > preheating > OFF(not repeated)

WeightApprox. 20.5kg

Input cable

Length outside equipment Approx. 2m■ Applications
Effective in reducing the pumping time and increasing
the ultimate pressure and pumping capacity of yourcurrent vacuum pump systems (ion pump, cryopump,turbo molecular pump).
Effective when there is a large amount of gas emission while processing using equipment requiring an
ultra-high vacuum such as deposition, annealing, or
tube pumping equipment.

Titanium Sublimation Pump

Type

Output Cable Length 2m
Dimensions

See figure

Canon ANELVA Corporation Vacuum Components Catalog

● Standard configuration
Titanium sublimation pump (TSP)
Configurationx1

956-0010 titanium filamentx12 (1 pack)953-5014 gasket for φ70ICF flange

x5 (1 pack)10x10 combination wrenchx1

7x8 both opening spanner

x1

Dimension 2 hexagonal wrench

x1

Configuration

Controller bodyx1

4P plug with output cable (2m)x1

Outlet for 200Vx1

5A fusex2

50A fuse with tabx1Note) Cable connector heat-resistant temperature 125°C

Moly paste (lubricant)x1 (tube)

M4x4 set screws (spare)

x4

Pumps

Attachments

956-7015TSP cartridge(Titanium filament not attached)

Name

Attachments

NameController (for both TSP and Ti-Vac pump)

Ti-Vac Pump
Configurationx1

956-7035 Ti-Vac head
Support fitting (included with ti-Vac
holder)Insulation spacer (included with ti-Vac
head)

x1
x1
x1

1

24.5 ±0.5
922-91190

10

6

Leak groove (rear)

ON

START
STOP

UP

30

40

50

SUB HEAT
UP

5

6
7

8

2

FILAMENT SELECT
1

2

3

1

9
0
10
POWER ADJS1DX

HEAT TIME

10 ±0.5

4
3

FILAMENT CURRENT

S1DX

ON

20

A

EVA HEAT
POWER

149 ±1.5

2100 ±1C

3

SUBLIMATION PUMP CONTROLLER

Ti-Vac holder(8.5)

305 ±1.5Key

φ70 ICF
(φ47.5)142 ±1.5
MAX 48Input cable

MAX 30(φ47.5)
φ34±1.5
φ34±1.5AC200V IN

Ti-Vachead

Insulating
spacerSupportfitting

F1 F2
3A TL 3A TL

26.5
±0.5

3

2

50±1.5Insulation stone2

430 ±1.5
1

TSP cartridge

228±5
33±1

TB1
OUTPUT

Kawasaki JAPANCanon ANELVA Co.

C

3

Fig. 1 Titanium sublimation pump

70±3

φ

Titanium filament

Leak groove (rear)
KeyV

Insulation stone

φ70 ICF(14)

A

50±1.5

271±4
146±2

Hz

5.5 ±1

Rubber feetremovable

A

x6

V

M4x4 set screws (spare)

Sublimation pump controller

Max. output

x1 (tube)

Canon ANELVA Co.

Moly paste (lubricant)Input
Frequency

x2

1

x1

Dimension 2 hexagonal wrenchC

10x10 combination wrench

0164-14974D

x5 (1 pack)

WARNING

953-5014 gasket for φ70ICF flange

HAZARDOUS VOLTAGE INSIDE

Attachments

956-7030 Ti-Vac holder

Can shock,burn or cause death.
Do not open covers.
Trained service personnel only.

Name

460 ±1.5

Fig. 2 Ti-Vac pump

480 ±2Sublimation pump controller

Canon ANELVA Corporation Vacuum Components Catalog

43

■ Options● Water-cooled getter chamber
1600L/s
Getter chamber

φ203ICFφ253ICF

φ101.6

φ160

φ203

φC

φ120

φ180

φ221

D

300

350

400

E

330

380

430

F

380

430

480

G

60

58

65

WeightApprox. 5.5kg

Approx. 10kg

Approx. 15kg

Metal adapter
with φ70 ICF

Leak groove
location

D
E
F

24

φ152ICF24

φA
φB*Cooling water
coupling

Leak groove locationG

φC

800L/sGetter chamber

φB

400L/sGetter chamber

φA

Description*Cooling water
coupling
Titanium sublimation pump or
Ti-Vac pump (not included incooling getter chamber)Pumps* This coupling is for 8mm outer diameter SUS pipe (bright annealed
austenitic stainless steel) or copper pipe.

■ Application
The pumping speed of the getter pump (ti-Vac pump

● Pressure/pumping speed characteristics

and titanium sublimation pump) drops significantly

High

↓

at 10-2Pa pressure and above.
Normally, it should be used at a pressure not exceeding 10-2Pa.

Conductance limited area

Pumping speed

When using it together with an ion pump, operating
together with the ion pump at 1 to 10-1Pa pressure orless is effective in reducing the startup time of the ion
pump.

Titanium sublimation
speed limited areas
10−5 −10−3 Pa
Pressure● Pumping speed per unit area of clean getter surface
Type of gas(Unit: L/sec, cm2)

H2

N2

O2

CO

CO2

H 2O

Inert gas

Methane

20°C

2.6

3.5

8.8

8.3

4.7

7.3

0

0

-195°C

17.6

8.3

11.0

11.2

-

-

0

0

Getter surface temperature

As shown above, the pumping speed of the getterpump varies significantly according to the pressure at
the conductance limited area and titanium sublimation speed limited area.
The pumping speed at the conductance limited area
is as shown above when the supply of titanium to thegetter surface is sufficient and a clean getter surface
is maintained.

Therefore, the pumping speed at that area is determined by the getter area and the conductance fromthe pumped chamber to the getter surface.
At the titanium sublimation limited area, titanium
collides with gas molecules before it reaches the gettersurface and combines chemically because the pressure is high. As a result, a clean getter surface cannot
be obtained and the pumping speed will be inversely
proportional to the pressure and proportional to thesublimation rate of titanium.

44

High→

Canon ANELVA Corporation Vacuum Components Catalog

The following methods are available when using thegetter pump.
1. Using the inside wall of the pumped chamber as thegetter surface(In order to obtain high pumping speed)

Pumped chamber

3. Installing a dedicated getter chamber inside thepumped chamber(Effective when pumping without contaminating
the pumped chamber)Three types of water cooled getter chambers areavailable when using this method.

Water cooling
Shield plate

Water cooling

Chamber connection flange
Water cooling

Pumps

PumpedchamberShield plate

2. Creating a dedicated getter surface inside thepumped chamber(Effective when pumping hydrogen to obtain an
ultra-high vacuum)

Dedicated getterchamber

LiqN2 cooling
Pumped chamber

Getter surface
mounting flange

Shield plate■ Ordering information
Parts Number

Model

Description

Remarks

Code0111-16547

956-7040

Ti-Vac Pump

With φ70ICF, ti-Vac head x1

10720

H23-01049

956-7035

Ti-Vac HeadTI Head10730

743-1277956-7015

TSP Cartridge

With φ70ICF, with filament/gasket/attachment tool

10700

MOD-41604

956-0010

TSP Filamentx12

VMT-8089

956-7030

Ti-Vac Holder

0112-10901

922-9119

10711
10731

Sublimation Pump Control Unit

200V AC/1φ, for both TSP and ti-Vac pump

10772

VMT-7107

TSP Output Cable (2m)

2m

10780

VMT-6485

TSP Output Cable (3m)

3m

10781

A23-08968

TSP Output Cable (5m)

5m

10782

VMT-6487

TSP Output Cable (7m)

7m

10783

VMT-8093

941-7104

400L/s Getter ChamberWith φ152ICF

10752

VMT-8095

941-7108

800L/s Getter ChamberWith φ203ICF

10753

FMT-9017

941-7116

1600L/s Getter ChamberWith φ253ICF

10754

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

45

PumpsCombination Pump

[1600L/s Combination Pump](%)
100

Noble pump50

■ Summary

Combination pump

The combination pump combines a titanium sublimation pump and triode ion pump (noble pump) toachieve a fast pumping speed at very low cost, taking advantage of the ion pump features that enable aclean ultra-high vacuum to be achieved easily.

1

500

1000

1500
2000
Pumping speed (L/s)

Fig. 1 Price to pumping speed ratio(Assuming 400L/s noble pump is 100%)■ Features
1. Increased pumping speed
Compared to ion pumps, the cost (including the costof the control equipment) per pumping speed of 1L/s
is approximately 1/2 to 1/3.

2. Light weight and compact
Compared to ion pumps with the same pumping
speed, the volume and weight are reduced to 1/5 to
1/10. Therefore, it can be easily attached/removed
to/from the pumped system to achieve a fast pumping speed with minimum space.

3. Safety design
A connector is used to connect the power supply forthe sublimation pump to enable simple and secureconnection. Flareless fitting is used for the coolingwater inlet/outlet so that the metal tube can be connected easily without having to worry about waterleaking.

4. Clean ultra-high vacuum
An oil-free clean ultra-high vacuum can be obtained
because no organic materials are used.
5. No liquid nitrogen required
No trap is used. Runs on cooling water and AC
power.
6. Easy operation and maintenance
Simple operation enabling unattended operationeven during a power failure.
7. Pump element replaceable
All models use a replaceable titanium evaporation
source and noble pump element.

■ Applications
Deposition equipment, electron microscopes, mass
spectrometers, vacuum furnaces, various analysis
equipment, experimental equipment, pumping equipment and other ultra-high vacuum systems with largegas emission.

46

Canon ANELVA Corporation Vacuum Components Catalog

● Specifications

Pumping speed
L/s

See Fig. 2

Pumping flow
Pam3/s

10-1Pa to 10-9 Pa

Pumping flow
1000

Baking temperature

MAX 250°C

WeightApprox. 15kg

Intake flange

φ152ICF flange

Capacity

Approx. 4.5L

Dimensions

See Fig. 3

Applicable controller

922-9119 Sublimation Pump Controller
and P-511NP or P-521NP Noble Pump
Controller

(52)

100

1×10−410

1×10−5

1×10−4

1×10−3

1×10−2Pressure Pa

Fig. 2 Pumping speed/pumping flow
- pressure characteristics

214±3

133±2

Current input terminal

MagnetIntake flange*Water cooling coupling

φ136±2

Water-cooling jacket(76)

φ152 ICF

1×10−3

Pumping speed

201±3

Pumping rate/
Pumping flow
Operating pressure
range

290±3
372±4

Sublimation pumpcartridge* This coupling is for 8mm outer diameter SUS pipe (bright annealed austenitic stainless steel) or copper pipe.

Fig. 3 Dimensions diagram

Canon ANELVA Corporation Vacuum Components Catalog

47

Pumps

■ 400L/s Combination Pump

● Specifications
Pumping speed
L/s

See Fig. 4

Pumping flow
Pam3/s

10-1Pa to 10-9 Pa
MAX 250°C

WeightApprox. 25kg

Intake flange

φ203ICF flange

Capacity

Approx. 7.5L

Dimensions

See Fig. 5

Applicable controller

922-9119 Sublimation Pump Controller
and P-511NP or P-521NP Noble Pump
Controller(53)

Pumping speed

1000

Baking temperature

100

10

1×10−3

1×10−4

1×10−5

1×10−4

1×10−3Pressure Pa

1×10−2

Fig. 4 Pumping speed/pumping flow
- pressure characteristics

214±3

133±2

Current input terminal

MagnetIntake flange

Pumping flow

φ174±2*Water cooling
coupling

236±3

Pumping rate/
Pumping flow
Operating pressure
range

Water-cooling jacket
Drainage opening

124±2

φ203 ICF

Pumps■ 800L/s Combination Pump

63±2

Mounting
foot

216±3
406±5

114±2
Sublimation pump cartridge

4-φ13* This coupling is for 8mm outer diameter SUS pipe (bright annealed austenitic stainless steel) or copper pipe.

Fig. 5 Dimensions diagram

48

Canon ANELVA Corporation Vacuum Components Catalog

Pumps■ 1600L/s Combination Pump

● Specifications
Pumping speed
L/s

See Fig. 6
10-1Pa to 10-9 Pa

Pumping speed
Pumping flow

Baking temperature

MAX 250°C

WeightApprox. 35kg

Intake flange

φ253ICF flange

Capacity

Approx. 15.5L

Dimensions

See Fig. 7

Applicable controller

922-9119 Sublimation Pump Controller
and P-511NP or P-521NP Noble Pump
Controller

1000

1×10−3100

1×10−410(129)

1×10−5

1×10−4

1×10−2Pressure Pa

Fig. 6 Pumping speed/pumping flow
- pressure characteristics

250±3

214±3

110±2

Internal heater
MagnetWater-cooling jacket

Current
input
terminal

Magnetφ70

φ230±3φ253 ICF

1×10−3

133±2

429±5

Intake flange

Pumping flow
Pam3/sSublimation pumpcartridge*Water cooling
coupling

170±2

430±5

Pumping rate/
Pumping flow
Operating pressure
rangeInternal heater for baking : 200V×900W

240±3* This coupling is for 8mm outer diameter SUS pipe (bright annealed
austenitic stainless steel) or copper pipe.

Fig. 7 Dimensions diagram

Canon ANELVA Corporation Vacuum Components Catalog

49

■ Options (maintenance and consumable parts)
Description

Type

Set filament
Combination pump element

400L/s
800L/s
1600L/s

Configuration

Remarks

956-0010

1 set

For titanium sublimation pump, x12

913-7000
913-7001
913-7002

1 set
1 set
1 set

Connecting lines included

Current input terminal

954-7281x1

With φ34 mini flange, for ion pump

Ti-Vac pump

956-7040

1 set

Can be combined with a ti-Vac pump as an option.

■ Application

High vacuum valve

Pumps

Cut-out valve

Cooling water outlet
P-511NP, P-521NP
noble pump controller

Vacuumchamber

922-9119sublimation pump controller

Roughing valve

Combination pump

Roughing system such as TMP

Fig. 8 Pumping system● Pumping system and connection method
A pumping system similar to the one shown above isrecommended. An oil rotary pump and foreline trap
combination can also be used instead of the adsorption pump. A turbo molecular pump and oil rotary
pump combination is also popular.
The cutout valve may be omitted on systems not frequently exposed to atmosphere.
Connect the cooling water by inserting a φ8mm metal
tube (bright annealed austenitic stainless steel orcopper) into the cooling water inlet and turning it 5/4
turns with a wrench.

● Pump element replacement
The sublimation pump filament can be replaced without removing the pump from the pumping system.
Remove just the cartridge.
The noble pump element can be removed simply by
removing the pump from the pumping system.

50

Canon ANELVA Corporation Vacuum Components Catalog

■ Ordering information
Parts Number

Model

Description

Remarks

Code0111-21039

913-7000

400L/s Combination Pump

With φ152ICF, with TSP•NP

10600

0111-17721

913-7001

800L/s Combination Pump

With φ203ICF, with TSP•NP

10610

0111-26071

913-7002

1600L/s Combination Pump

With φ253ICF, with TSP•NP

10620

MOD-41604

956-0010

TSP Filament

x12

10711

0111-16547

956-7040

Ti-Vac Pump

With φ70ICF, ti-Vac head x1

10720

Pumps

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

51

PumpsCryopump POWER/POWEREco Series■ Selection guide● Selection by various characteristics
Taking into consideration the size and use of thevacuum equipment, select the model in terms of
performance such as pumping speed (nitrogen, argon, hydrogen), gas load (maximum pumping flow),
regeneration cycle (pumping capacity), and start
operation pressure (maximum gas instantaneous
tolerance).
In general, the higher pump type names have,greater pumping speed and capacity (see the individual specifications).
● Selection of the intake flange type

● Selection by installation condition
If a vertical cryopump cannot be installed, a horizontal cryopump is available.
Note) 	There are gases that are not appropriate forpumping with a cryopump or require certain
precautions. Refer to the instruction manual for
details.

Former JIS flange, ISO (new JIS) flange, ASA
flange, and ICF flange are available as intake
flanges.
Products with other flanges are also available uponorder.

■ About the POWER/POWERECO series cryopump model
A product configuration example is shown.

P−080CL−AHN

Pump intake diameter(08 to 20)

Specification
No.
C: Cryopump (vertical)
CL Cryopump (horizontal)

52

HN: With heater
N: Without heater

Intake flange specifications
J: Form JIS flange
A: ASA flange
S: ISO (new JIS) flange
U: ICF flange specification
X: All metal seal specification

Canon ANELVA Corporation Vacuum Components Catalog

POWER series

Cryopump

Pumps

High performance cryopump
Intake diameter 8 to 12 inches (small)■ SummaryGas turns into a liquid when cooled and then into a solid (ice) when cooled further. Cryopumps are vacuum
pumps that use this phenomenon to pump vacuum and store gas as a solid (ice) by freezing the gas onto theinternal cryogenic surface (pumping surface).
Cryopumps have excellent features such as fast pumping speed and clean vacuum.
However, since cryopumps store the vacuum pumped gas internally, the pumping performance will drop after acertain amount of gas has been pumped and must be restored.
This operation is called regeneration. Specifically, the temperature of the cryogenic surface (pumping surface)is increased to normal temperature and the gas stored as a solid (ice) is re-vaporized and pumped out of the
cryopump.
Since vacuum pumping is not possible during regeneration, the speed of regeneration and the amount of gas
that can be stored to reduce the frequency of regeneration greatly affects the productivity and utilization of semiconductor or electronic component manufacturing equipment and other vacuum equipment.
The POWER series cryopump solves the above problem by using the world's first self-heating function and ourunique pumping panel structure. Furthermore, it provides excellent pumping performance and improved temperature stability during multi-operation.

■ Features

3. Low vibration

1. Enables safe, high speed regeneration withouta heater• The self-heating function enables regeneration at
high-speed equaling pumps with heaters.
• There is no fear of sparks, electrical discharge, orleakage because no heater is used.

2. POWER startup and stability (excellent startup
characteristic and temperature stability)• No significant increase in the start-up time whenusing only a single pump during multi-operation.
• Change in the startup time due to the cryopump
operating environment is kept to a minimum.
• Resistance to unbalanced thermal load penetration into multi-operation pump is improved significantly.
• Fluctuation in temperature between pumps is
kept to a minimum.

Average vibration acceleration is less than 1/10 compared to our previous product.
4. POWER pumping capacity (pumping character-istics)
The argon pumping capacity based on conventionally used standards was far outside the range wherea cryopump can be used in actual production equipment because these calculation standards were not
at a practical level.
The argon pumping capacity shown in our catalog
is evaluated based on our own standards, which aremuch more rigorous than the above conventional
standards. It accurately shows the range in which acryopump can be installed and used in actual production equipment.
Although the pumping performance of a cryopumpchanges together with the gas storage capacity, theCanon ANELVA Corporation Vacuum Components Catalog

53

POWER series keeps that change to a minimum
with our unique panel design and maintains excellent pumping performance all the way to the pumping capacity limit.
• Maintains excellent pumping performance all theway to the argon pumping capacity limit.

5. POWER refrigeration (with sufficient cooling
performance)• Significantly increased cooling performance enables long-lasting, stable hydrogen pumping performance• Capable of withstanding thermal load enabling
more stable operation• Triple operation is also possible with the 12 inch
cryopump.

■ What is the self-heating function?
(POWER regeneration)

Pumps

The normal refrigeration cycle cools the stage by repeating adiabatic expansion of high pressure He gas

Cooling stage

Cooling stage

Adiabatic
expansion

Adiabatic
compression

introduced from the outside within the cooling stage.
The self-heating function heats the cooling stage byswitching the movement of the piston (displacer) cre-

(Displacer)(Displacer)

ating this space and the He gas introduction timing toperform adiabatic compression of He gas in the space
where adiabatic expansion is normally performed.
This enables high-speed regeneration without using a

He GasCooling cycle

He GasHeating cycle

heater.

■ About the cryopump startup characteristics
The cryopump used in a multi-chamber system is normally used in multi-operation mode where multiple
cryopumps are operated with a single compressor.
If cryopumps running in multi-operation mode are all regenerated/started at the same time, the startup time will
be as specified in the catalog. However, if only a single cryopump is regenerated while running other cryopumps,
it will take longer to start. This is because a cryopump operates on the principle where the cooling performanceincreases as the temperature decreases. Therefore, the cooling performance of higher temperature pumps tends
to decrease.
This characteristic may be a problem not only during startup, but also during normal use. This is because whena large thermal load is applied to only one of the cryopumps running in multi-operation mode, the temperature ofthat pump is more likely to increase further while the other pumps are more likely to cool. As a result, the variation in temperature among the pumps running in multi-operation mode will increase causing imbalanced cooling
performance among the pumps.
The POWER series cryopump is significantly improved with respect to these phenomenon.

54

Canon ANELVA Corporation Vacuum Components Catalog

Cryopump regeneration time comparison
Time

0

60

Conventionaltype

	If P-081C cryopump
120(Minute)Triple operation
Three unit simultaneous regeneration

50 min40 min240

Roughing Startup time 70 min

Warm-up time 150 min

POWER

180

(during Ar500L storage)

Startup time comparison by startup method
Cryopump triple operation

POWER

70 minThree units started simultaneously

98 minStartup time when regenerating only one unit

50 minThree units started simultaneously
Startup time when regenerating only one unit

56 min

0

60

20

Pumps

Conventional
type

40

80

100 (Minute)

Cryopump vibration spectrum
Acceleration strength30
Conventional cryopump
20

10
POWER series cryopump
0

0

400

200

600

800

1000
(Hz)

Argon gas storage capacity and pressure drop characteristics
P-122C Ar pumping capacity 4000L

P-081C Ar pumping capacity 800L
(Pa)

(Pa)

Argon gasstorage capacity

1E-3

1E-4

890L
1E-5
1E-6

800L
780L or less
0

10

20
Time

30

(Minute)Pressure

Pressure

1E-4

1E-7

Argon gasstorage capacity

1E-3

4400L

1E-5
1E-6
1E-7

4000L
3000L or less
0

10

20
Time

Canon ANELVA Corporation Vacuum Components Catalog

30(Minute)55

■ POWER series cryopump configuration
Basic Structure

P-080C
P-081C
P-081CL
P-082C
P-122C

Compressor for
POWER series

Flexible hose (x 2)

Valve unit

P-421CA

200V AC3φ

Pumps

Cooling OUT
water
IN
Cold head cable

CRYONAVI

POWER
BOX
100V AC

Multi-system configuration example

Cold head cable
Valve
unit

Compressor
CRYONAVICRYONAVI

200V AC3φP-875CA

OUT
IN
Cooling water

CRYONAVI

Up to three cryopumps can be

JOINT BOX

connected to a single
compressor unit and operated

100V AC

Cold head cable

Flexible hose(x 2 per pump)as shown in the figure above.

Note) The P-875CA and cryopump compressor in the Cryopump configuration example are different from the actual product. See P-875CA for theexternal view and dimensions.

56

Canon ANELVA Corporation Vacuum Components Catalog

■ POWER series cryopump performance specifications
Pump Type

P-080C

P-081C

P-081CL

P-082C

P-083C

P-100C

P-100CL

Diameter

8 inch8 inch8 inch8 inch8 inch10 inch

10 inchHorizontal

Shape

Pumping speed (L/s)

VerticalVerticalHorizontal

VerticalVerticalVerticalNitrogen

1,500

1,500

1,500

1,500

1,500

2,400

2,400

Argon

1,300

1,300

1,300

1,300

1,300

2,000

2,000

Hydrogen

1,000

2,500

2,200

1,000

1,000

3,000

3,000

Vapor

4,000

4,000

4,000

4,000

4,000

6,400

6,400

1.5

1.2

1.2

1.5

1.5

1.0

1.0

18.0

18.0

18.0

18.0

18.0

18.0

18.0

45

50

65

45

50

70

80

Maximum pumping flow (Pa•m3/s)
Maximum gas instantaneous tolerance (Pa•m3)
Startup time (min)Remarks

*1

30

30

30

30

35

35

40

*1

75+α

80+α

95+α

75+α

85+α

105+α

120+α

*1

Argon

80,00080,00080,000150,000

190,000

160,000

140,000*2

Hydrogen

1,300

1,800

1,600

1,300

1,300

1,600

1,300

27

Pumping capacity(Pa•m3)

Pumps

Regeneration (warm-up) time (min)Startup regeneration time (min)Ultimate temperature (K)15 or less

Ultimate pressure (Pa)Maximum heating temperature(°C)
Ambient temperature range (°C)
Recommended maintenance hour(h)Weight (kg)Approx. 10-7

20

21

22

23

24

25

P-421CA

1

1

1

1

1

1

1

*3

P-875CA

2 to 32 to 32 to 32 to 32 to 32 to 32 to 3*3

Pump Type

P-101C

P-101CL

P-120C

P-120CL

P-121C

P-121CL

P-122C

Diameter

10 inch

10 inch

12 inch

12 inch

12 inch

12 inch

12 inchVerticalOperating units

Shape

Pumping speed (L/s)

70
10 to 35
Within 16,000h

VerticalHorizontal

VerticalHorizontal

VerticalHorizontal

Nitrogen

2,400

2,400

4,000

4,000

4,000

4,000

4,000

Argon

2,000

2,000

3,200

3,200

3,200

3,200

3,200

Hydrogen

3,800

3,700

3,600

3,000

6,000

5,000

3,000

Vapor

6,400

6,400

9,000

9,000

9,000

9,000

9,000

1.0

1.0

1.0

1.0

1.0

1.0

1.0

18.0

18.0

18.0

18.0

18.0

18.0

18.0

70

80

60

90

70

100

60

Maximum pumping flow (Pa•m3/s)
Maximum gas instantaneous tolerance (Pa•m3)
Startup time (min)Regeneration (warm-up) time (min)Remarks

*1

35

45

35

40

40

50

30

*1

Startup regeneration time (min)

105+α

125+α

95+α

130+α

110+α

150+α

90+α

*1

Argon

160,000

140,000

260,000

200,000

260,000

200,000

400,000*2

Hydrogen

2,000

1,800

1,600

1,400

2,400

2,200

1,600

30

Pumping capacity(Pa•m3)
Ultimate temperature (K)15 or less

Ultimate pressure (Pa)Maximum heating temperature(°C)
Ambient temperature range (°C)
Recommended maintenance hour(h)Weight (kg)Approx. 10-7

25

27

29

30

29

30

P-421CA

1

1

1

1

1

1

1

*3

P-875CA

2 to 32 to 32 to 32 to 32 to 32 to 32 to 3*3

Operating units

70
10 to 35
Within 16,000h*1) If the POWER series dedicated control power supply CRYONAVI is not used, the time required for cryopump regeneration such as the warmup time will increase because the self-heating function cannot be used. Similar to normal type cryopumps, the above regeneration (warm-up)
time assumes the use of the self-heating function and no gas such as argon is stored inside the pump. +α is the time required to rough pump the
cryopump. (This changes according to the roughing pump type and the amount of moisture in the cryopump.)*2) The pumping capacity is calculated using our unique calculation method and is similar to the value obtained when the cryopump is actually usedmounted on the equipment.
*3) Depending on the gas/thermal load conditions of the cryopump of the vacuum equipment, it may not be possible to run this number of units.

Canon ANELVA Corporation Vacuum Components Catalog

57

Pumps● Dimensions diagram P-080C/P-081C● Dimensions diagram P-081CL● Dimensions diagram P-082C

58

Canon ANELVA Corporation Vacuum Components Catalog

Pumps● Dimensions diagram P-101C● Dimensions diagram P-100CL/P-101CL

Canon ANELVA Corporation Vacuum Components Catalog

59

Pumps● Dimensions diagram P-120C/P-121C● Dimensions diagram P-120CL/P-121CL● Dimensions diagram P-122C

60

Canon ANELVA Corporation Vacuum Components Catalog

PumpsMemorandum

Canon ANELVA Corporation Vacuum Components Catalog

61

POWER Eco series

Cryopump

High-performance energy-efficient cryopump
Intake diameter 8 to 20 inches

Pumps■ Summary
The POWER series cryopump reduces regeneration/startup time to help increase vacuum equipment
productivity and utilization, and provides high pumping capacity, excellent pumping performance andimproved temperature stability during multi-operation.
In addition to the features of the POWER series
cryopump, the POWEREco series cryopump is a highperformance energy saving cryopump designed toreduce power consumption and cooling water flow.
Using the same compressor as the POWER series,
but with increased refrigerator efficiency, and by using
multi-wave control (patent pending), the number ofcryopumps that can be operated using a single compressor has been increased resulting in significantly
reduced power consumption and cooling water flow
per cryopump. For example, a single P-875CA large
compressor can accommodate up to five eight inch
diameter cryopumps with 1.0 to 1.2kW power consumption per cryopump.
With the POWEREco series cryopump, medium andlarge-sized cryopumps are also available in addition
to the small-sized pumps, with significant performance and energy saving advantages compared toconventional medium to large-sized cryopumps.

■ Features■ Applications

1. Energy and resource saving• Semiconductor manufacturing equipment (sput-

Power consumption and cooling water: Can be reduced by 15% to 70%
2. Reduced regeneration/startup time

• Electronic component manufacturing equipment

Less than half that of our previous products.
3. Improved pumping performance
Argon pumping capacity substantially increased 1.5
to 4 times that of our previous products.
4. Low vibration

tering equipment, ion implantation equipment)• Vacuum evaporation systems• Vacuum furnaces, space chambers• Accelerators• Various high vacuum equipment

Approximately 1/10 or less compared to conventional models.

62

Canon ANELVA Corporation Vacuum Components Catalog

■ Small POWEREco series cryopump performance specifications
Pump Type

P-085C

P-086C

P-086CL

P-087C

P-105C

P-105CL

P-106C

P-106CL

P-107C

Diameter

8 inch8 inch8 inch8 inch10 inch

10 inch

10 inch

10 inch

10 inchShapeRemarks

VerticalVerticalHorizontal

VerticalVerticalHorizontal

VerticalHorizontal

VerticalNitrogen

1,500

1,500

1,500

1,500

2,400

2,400

2,400

2,400

2,200

Argon

1,300

1,300

1,300

1,300

2,000

2,000

2,000

2,000

1,600

Hydrogen

1,000

2,500

2,200

1,000

3,000

3,000

3,800

3,700

2,600

Vapor

4,000

4,000

4,000

4,000

6,400

6,400

6,400

6,400

6,400

Maximum pumping flow (Pa•m3/s)

1.2

1.2

1.1

1.2

1.0

1.0

1.0

1.0

1.0

Maximum gas instantaneous tolerance (Pa•m3)

18.0

18.0

18.0

18.0

18.0

18.0

18.0

18.0

18.0

Startup time (min)

60

65

80

60

75

90

85

100

120

*1

Regeneration (heat-up) time
(min)

40

40

45

40

45

50

45

50

50

*1

Pumping speed(L/s)

Pumping capacity(Pa•m3)

100+α

105+α

125+α

100+α

120+α

140+α

130+α

150+α

170+α

*1

Argon

80,00080,00080,000150,000

160,000

140,000

160,000

140,000

300,000*2

Hydrogen

1,300

1,800

1,600

1,300

1,600

1,300

2,000

1,800

1,600

25

Ultimate temperature (K)15 or less

Ultimate pressure (Pa)Approx. 10-7

Maximum heating temperature
(°C)

70

Ambient temperature range (°C)

10 to 35

Recommended maintenancehour (h)Weight (kg)Operating units

Within 16,000hr
22

22

22

23

25

27

24

30

P-421CA

2

2

2

2

2

2

2

2

2

*3, *4P-875CA

4 to 54 to 54 to 54 to 53 to 43 to 43 to 43 to 43 to 4*3

P-124C

P-124CL

P-126C

P-126CL

P-127C

Remarks

Pump Type
Diameter

12 inch

12 inch

12 inch

12 inch

12 inchVerticalHorizontal

VerticalHorizontal

VerticalNitrogen

4,000

4,000

4,000

4,000

4,000

Argon

3,200

3,200

3,200

3,200

3,200

Hydrogen

3,600

3,600

6,000

6,000

3,000

Vapor

Shape
Pumping speed
(L/s)

9,000

9,000

9,000

9,000

9,000

Maximum pumping flow (Pa•m3/s)

0.8

0.8

0.8

0.8

0.8

Maximum gas instantaneous tolerance (Pa•m3)

18.0

18.0

18.0

18.0

18.0

Startup time (min)

95

105

95

105

70

*1

Regeneration (heat-up) time
(min)

45

50

45

50

40

*1

Startup regeneration time (min)Pumping capacity(Pa•m3)

130+α

155+α

140+α

155+α

110+α

*1

Argon

260,000

200,000

260,000

200,000

400,000*2

Hydrogen

1,600

1,400

2,400

2,000

1,600

29

Ultimate temperature (K)15 or less

Ultimate pressure (Pa)Approx. 10-7

Maximum heating temperature
(°C)

70

Ambient temperature range (°C)

10 to 35

Recommended maintenancehour (h)Weight (kg)Operating units

Pumps

Startup regeneration time (min)Within 16,000hr
29

30

29

31

P-421CA

2

2

2

2

2

*3, *4P-875CA

3 to 43 to 43 to 43 to 43 to 4*3*1) If the POWER series dedicated control power supply CRYONAVI is not used, the time required for cryopump regeneration such as the warm-up
time will increase because the self-heating function cannot be used. Similar to normal type cryopumps, the above regeneration (warm-up) time
assumes the use of the self-heating function and no gas such as argon is stored inside the pump. The +α is the time required to rough pump the
cryopump. (This changes according to the roughing pump type and the amount of moisture in the cryopump.)*2) The pumping capacity is calculated using our unique calculation method and is similar to the value obtained when the cryopump is actually usedmounted on the equipment.
*3) Depending on the gas/thermal load conditions of the cryopump of the vacuum equipment, it may not be possible to run this number of units.
*4) A separate Eco unit is required.

Canon ANELVA Corporation Vacuum Components Catalog

63

■ Medium/large POWEREco series cryopump performance specifications
Pump Type

P-128CP-128CL

P-160C

P-160CL

P-161C

P-161CL

P-201C

P-206C

Diameter

12 inch

12 inch16 inch16 inch16 inch16 inch20 inch20 inchShapeVerticalHorizontal

VerticalHorizontal

VerticalHorizontal

VerticalVerticalNitrogen

4,000

4,000

8,000

7,400

8,000

7,400

13,00013,000

Argon

3,200

3,200

5,500

5,500

5,500

5,000

9,000

9,000

Hydrogen

6,000

5,000

5,500

5,500

11,00010,00017,00017,000Water
Maximum pumping flow(Pa•m3/s)
Maximum gas instantaneous
tolerance (Pa•m3)
Startup time (min)Regeneration (heat-up) time(min)
Startup regeneration time(min)
Pumping capacity Argon(Pa•m3)
Hydrogen

9,000

9,000

17,00017,00017,00017,00028,00028,000

2.2

2.2

2.2

2,2

2.0

2.2

3.0

3.0

40

40

50

50

50

50

80

80

110

115

70

95

90

120

100

100

*1

70

70

40

60

60

60

70

80

*1

180+α

185+α

110+α

155+α

150+α

180+α

170+α

180+α

*1

270,000

200,000

400,000

200,000

400,000

200,000

800,000

800,000

*2

4,000

3,500

1,600

1,400

3,400

3,000

4,500

7,500

66

Pumping speed
(L/s)

Pumps

Remarks

Ultimate temperature (K)15 or less

Ultimate pressure (Pa)Maximum heating temperature (°C)
Ambient temperature range(°C)
Recommended maintenancehour (h)Weight (kg)Approx. 10-7

37

39

50

62

50

62

66

P-421CA

1

1

1

1

1

1

-

-

*3, *4P-875CA2

2

1 to 2

1 to 2

1 to 2

1 to 2

1

1*3Operating units

70
10 to 35
Minimum every 16,000h*1) If the POWER series dedicated control power supply CRYONAVI is not used, the time required for cryopump regeneration such as the warm-up
time will increase because the self-heating function cannot be used. Similar to normal type cryopumps, the above regeneration (warm-up) time
assumes the use of the self-heating function and no gas such as argon is stored inside the pump. The +α is the time required to rough pump the
cryopump. (This changes according to the roughing pump type and the amount of moisture in the cryopump.)*2) The pumping capacity is calculated using our unique calculation method and is similar to the value obtained when the cryopump is actually usedmounted on the equipment.
*3) Depending on the gas/thermal load conditions of the cryopump of the vacuum equipment, it may not be possible to run this number of units.
*4) A separate Eco unit is required.

64

Canon ANELVA Corporation Vacuum Components Catalog

■ Utility comparison (energy-saving effect)
When using five 8 inch cryopumps
Conventional type

POWEREco series

P-875CA

P-875CA

P-421CAPower requirements: 7.2/9.1kW(50/60Hz steady state)
Cooling water flow: 600L/h

Pumps

P-086C x 5

Power requirements: 4.8/6.1kW(50/60Hz steady state)
Cooling water flow: 420L/h

Approx. 33% reduction of power consumption is possible!
When using two small 12 inch cryopumps

Conventional type

POWER Eco series

P-126 x 2

Eco unit
P-875CA

P-421CAPower requirements: 4.8/6.1kW(50/60Hz steady state)
Cooling water flow: 420L/h

Power requirements: 2.4/3.0kW(50/60Hz steady state)
Cooling water flow: 180L/h

Approx. 50% reduction of power consumption is possible!

Canon ANELVA Corporation Vacuum Components Catalog

65

When using four 12 inch cryopumps

Conventional type

POWER

Eco

seriesPumps

P-126C x 4

P-875CA

P-421CAPower requirements: 7.2/9.1kW(50/60Hz steady state)
Cooling water flow: 600L/h

P-875CAPower requirements: 4.8/6.1kW(50/60Hz steady state)
Cooling water flow: 420L/h

Approx. 33% reduction of power is possible!
The energy saving performance depends on the configuration of the pump used in the equipment. Please contact our sales offices for details.

When using two medium 12 inch cryopumps

Conventional type

POWER Eco series

P-128C x 2

P-875CA

P-875CAPower requirements: 9.6/12.2kW(50/60Hz steady state)
Cooling water flow: 840L/h

P-875CAPower requirements: 4.8/6.1kW(50/60Hz steady state)
Cooling water flow: 420L/h

Approx. 50% reduction of power is possible!

○ Energy efficiency and productivity are improved significantly by switching to the "POWEREco Series" cryopump.
Operating costs can also be reduced significantly.

66

Canon ANELVA Corporation Vacuum Components Catalog

■ Dimensions diagrams

Pumps

P-085C/P-086C

P-086CL

Canon ANELVA Corporation Vacuum Components Catalog

67

Pumps

P-087C

P-105C/P-106C

P-105CL/P-106CL

68

Canon ANELVA Corporation Vacuum Components Catalog

■ Dimensions diagrams
P-124C/P-126C

Pumps

P-124CL/P-126CL

P-127C

Canon ANELVA Corporation Vacuum Components Catalog

69

P-128C
597
387.5
125

4-M8
PCD.363

13

10"ASA
flange12-φ25.4
PCD.362

φ295

86

125

185.7

344.5

15

12-φ15
PCD.370
φ400 former JIS
flange

14

64
125
386
511

P-128CL

436.5

164

42

14
15

522.5

185.7

12-φ15
PCD.370
φ400 former JIS
flange4-M 8
PCD.363
86

φ180

284

12-φ25.4
PCD.362
10"ASA
flange

φ298

175

13

100

164

P-161C
607
398
20

4-M8
PCD.47312-φ19PCD.480

80

185.7

φ406

86

φ2

355

15

Pumps

42

64

125
397
42

521

P-161CL70

Canon ANELVA Corporation Vacuum Components Catalog

Former JIS-VG400
flange64

■ Dimensions diagrams
P-201C
639
428
22

16-φ 19
PCD.585

20

185.7

φ506

86

φ3

4-M8
PCD.578

15

385

64

Former JIS • VG500
flange

122
426.9
553

Pumps

42

P-206C
639
428
22

16-φ 19
PCD.585

20

185.7

φ506

86

φ3

4-M8
PCD.578

15

385

64

122
426.9
42

Former JIS • VG500
flange553

Canon ANELVA Corporation Vacuum Components Catalog

71Compressor unit for P-421CA POWER series cryopump■ Specifications
Type

P-421CA

Pumps

Helium gas pressure(MPa)

Not operating

1.60 to 1.65

Operating (starting)

2.0 to 2.2

Operating (running)

1.8 to 2.0

Flow rate(L/H)
Inlet/outlet pressure
difference (MPa)Compressor coolMaximum watering waterpressure (MPa)
Input temperature(°C)
Input power supply/voltage (50/60Hz)

180 or morePower consumption (kW)Ambient temperature range (°C)

0.13
0.69
30 or less200V AC±10% 3φ

Steady-state (50Hz)

2.4

Steady-state (60Hz)

2.8

Operating

10 to 35

Storage
Maintenance interval (h) (adsorber replacement)
Dimensions (mm) WxDxH-15 to 55
Every 30,000h
400x450x470

Weight (kg)75

■ Dimensions diagram
P-421CAc72

Canon ANELVA Corporation Vacuum Components Catalog

428

186

109

421

41

470

88

Compressor unit for P-875CA POWER series cryopump■ Specifications
TypeP-875CA
1.50 to 1.55

Operating (starting)

2.0 to 2.1

Operating (running)

1.8 to 2.0

Flow rate (L/h)
Inlet/outlet pressure
difference (MPa)Compressor coolMaximum watering waterpressure (MPa)
Inlet temperature(°C)
Input power supply/voltage (50/60Hz)

420 or more
0.15
0.69
30 or less

Pumps

Helium gas pressure(MPa)

Not operating

200V AC±10% 3φ

Power consumption (kW)Steady-state (50Hz)

Ambient temperature range (°C)

Operating

4.8

Steady-state (60Hz)

6.1
10 to 35

Storage
Maintenance interval (h) (adsorber replacement)
Dimensions WxDxH (mm)-15 to 55
Every 30,000h
450x500x632

Weight (kg)115

■ Features
1. Up to three POWER series cryopumps can be operated simultaneously.
2. Up to five small POWEREco series cryopumps (8 inch
diameter) can be operated simultaneously. (Up tofour for 10 or 12 inch diameter.)

3. Up to two medium-sized POWEREco series
cryopumps can be operated simultaneously.
4. Large compressor unit contributing to the extra
cooling performance of the POWER series.

■ Dimensions diagram450

P-875CA

500
90

58

100

P-875CA

584.3
632

55
50

45

40

32
425

554.3

CRYOPUMP COMPRESSORUNT

Canon ANELVA Corporation Vacuum Components Catalog73

P-450CM cryo-temperature monitor■ Summary■ Specifications

The P-450CM cryo-temperature monitor monitors theItemstatus and temperature of the POWER/POWERECO
series cryopump and cryo trap and controls them by
event output.

Temperature sensor

Pt-Co resistance temperature
sensorPt100 resistance temperature
sensorOutput event

Non-voltage contact output
3-points

Rated supply voltage

100 to 240V AC
50/60Hz (free power)

Transmission signal output(Option)0 to 5V DC

The Pt-Co resistance temperature sensor of the
cryopump second stage or the Pt100 resistance temperature sensor of the cryopump first stage and cryo

Pumps

trap can be used by changing the setting.

Specifications■ Dimensions diagrams
P-450CM cryo-temperature monitor

P-450CMPV

OUT MANLOW HIGH

DOWN

UP

91

K

2ND
SV4

96

1ST
SV3

116

K

SV

MODE

SEL/ENT

48

7

100

44

92 +0.80120

92 +0.8070

45 +0.6
0
Mounted individually74

48×N-3 +20
N:Number of units
Mounted close together
Mounting conditions• Panel: t1 to 10 mm steel plate• Mounting angle: Front/back angle within 10˚,left/right angle within 15˚Panel cutting dimensions

Canon ANELVA Corporation Vacuum Components Catalog

Cold head driver P-021CD

190

JR

129

JC

JP

2 0 9 .5300

139

COL D HEAD

149

MAIN POW ER

3 .2

Pumps

V iew on arrow A

EXT
INT

A

ON
OF F

105

4 - φ 4 .6

(342)

UL standard compliant products are also available for the compressor unit and cold head driver.

Canon ANELVA Corporation Vacuum Components Catalog

75

● Ordering Information

Pumps

Parts Number

Model

Description

Remarks

Code0112-28831

P-080C-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11380

0112-28849

P-080C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11381

0112-28857

P-080C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11382

0112-28865

P-081C-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11383

0112-28873

P-081C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11384

0112-28792

P-081C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11385

0112-28881

P-081CL-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11386

0112-28899

P-081CL-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11387

0112-28904

P-081CL-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11388

0112-28912

P-082C-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11389

0112-28920

P-082C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11390

0112-28938

P-082C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11391

0112-28946

P-101C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11395

0112-28954

P-122C-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11392

0112-28962

P-122C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11393

0112-28970

P-122C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11394

0112-28988

P-085C-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11850

0112-28996

P-085C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11851

0112-29007

P-085C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11852

0112-28807

P-086C-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11853

0112-29015

P-086C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11854

0112-29023

P-086C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11855

0112-29031

P-086CL-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11856

0112-29049

P-086CL-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11857

0112-29057

P-086CL-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11858

0112-29065

P-087C-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11859

0112-29073

P-087C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11860

0112-29081

P-087C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11861

0112-29099

P-106C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11862

0112-29104

P-106C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11863

0112-29112

P-106CL-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11864

0112-29120

P-106CL-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11865

0112-29138

P-126C-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11866

0112-29146

P-126C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11867

0112-29154

P-126C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11868

0112-29162

P-126CL-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11869

0112-29170

P-126CL-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11870

0112-29188

P-126CL-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11871

0112-29196

P-127C-AN

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11872

0112-29201

P-127C-JN

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11873

0112-29219

P-127C-UN

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11874

0111-03196M

P-128C-A

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11775

0111-26291M

P-128C-J

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11776

0112-29227

P-128C-U

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11777

0111-03879M

P-128CL-A

POWER Cryopump (ASA Flange)

Resistance temperature sensor

11778

0111-53010M

P-128CL-J

POWER Cryopump (Old JIS Flange)

Resistance temperature sensor

11779

0112-28784

P-128CL-U

POWER Cryopump (ICF Flange)

Resistance temperature sensor

11780

0111-13840M

P-161C-J

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11781

0111-03073M

P-201C-J

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11783

0111-02962M

P-206C-J

POWER Cryopump(Old JIS Flange)

Resistance temperature sensor

11784Note) Contact us for more information about CE (RoHS).

76

Canon ANELVA Corporation Vacuum Components Catalog

● Ordering Information
Model

Description

Remarks

Code9009-11488

P-875CA

Compressor Unit

200V AC/3φ water-cooled

11418

9009-11470

P-421CA

Compressor Unit

200V AC/3φ water-cooled

11419

9009-11747

P-021CD-1

Cold Head Driver

200V AC/3φ, with 6M input cable

11786

9005-07328B

P-450CM

Cryo Temperature Monitor

9004-88914B

P-450CM-AL

Cryo Temperature Monitor (Analog
output)A22-02069

He Manifold L-2

A22-02070

He Manifold L-3

0111-55834,0111-55826

He Manifold L-4

0111-55850,0111-00842

He Manifold L-5

100V AC, for both 1st and 2nd, without
power supply or sensor cable
100V AC, for both 1st and 2nd, without
power supply or sensor cableTwo port assignment type for directcompressor attachment
Three port assignment type for directcompressor attachment
For branch between flexi-hoses, 4 port
assignment, R/S
For branch between flexi-hoses, 5 port
assignment, R/S

11792
11793
11524
11525
11790
11791

0114-01748D

Eco Unit (5L)

T type branch pipe, with 8Ax1M flexi-hose

11787

A23-00449,A23-00450

15Ax3m Flexible Hose Set

For P-080 to 127, one return/supply set

11550

A23-00648,A23-00649

15Ax6m Flexible Hose Set

For P-080 to 127, one return/supply set

11551

A23-01272,A23-01273

15Ax9m Flexible Hose Set

For P-080 to 127, one return/supply set

11552

A23-10531,A23-10532

15Ax12m Flexible Hose Set

For P-080 to 127, one return/supply set

11556

A23-00451,A23-00452

20Ax3m Flexible Hose Set

For P-128 to 206, one return/supply set

11553

A23-00944,A23-00945

20Ax6m Flexible Hose Set

For P-128 to 206, one return/supply set

11554

A23-01275,A23-01274

20Ax9M Flexible Hose Set

For P-128 to 206, one return/supply set

11555

A23-10533,A23-10534

20Ax12m Flexible Hose Set

For P-128 to 206, one return/supply set

11557

Pumps

Parts Number

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

77

■ Technical notes(8)● Cryopump structure and pumping principle
The name of each part of the cryopump is shown.
(1) Refrigerator(7)(2) Refrigerator first thermal load stage

(5)

(4)

(3) Refrigerator second thermal load stage

(6)
(3)

(4) Pump container(5) Radiation shield(2)(6) Cryosorption panel(7) Cryo-condensation panel(8) Louver(1)

The cryopump cooling unit has two stages with panels
He gas

The first thermal load stage (2) has a radiation shield
Cryopump structure(5) that blocks the heat from the outside and a louver (8) that condenses and traps mainly H2O (water
vapor) at the pump inlet. It runs at approximately 50
to 80K.
The second thermal load stage (3) runs at approxi-

102

mately 10 to 20K and consists of a cryo-condensation

10(nitrogen), O2 (oxygen), and Ar (argon) and a cryosorp-

10−1tion panel that adsorbs H2 (hydrogen), Ne (neon), andHe (helium) that do not condense at 10 to 20K.
As described above, the cryopump pumps the gas by(1) Cryo-condensation(2) Cryosorption
and at 20K or less, it can be seen in the vapor pressure line chart shown at right that all gases except

Balanced vapor pressure (Pa)panel which freezes and condenses gases such as N2

4˚

He

20˚

78˚

CO2

10−2

H2 O

H2

10−3

Ne
N2

10−4

Ar

10−5

O2

10−6

H2, Ne, and He will be at 10-8Pa or less vapor pres-

10−7

sure.

10−8

For H2, Ne, and He, the example of H2 in the equal

CH4

1

2

5

10

20

50

100

200

Temperature (k)temperature adsorption line chart at right shows that

Vapor pressure line charts

when the temperature decreases and the adsorption
volume increases, the balanced pressure becomes sufficiently low. Therefore, it is possible to pump practically any gas.

106
102

Balanced pressure (Pa)

Pumps

that condense and adsorb gas.

30K

10−2

20K

10−6

15K

10K

10−10

12K

10−14
10−18

0

0.1

0.2

0.3

0.4

Adsorbed H2 amount (L/g)

Activated carbon isothermal adsorption
line charts (Example)

78

Canon ANELVA Corporation Vacuum Components Catalog

● Structure and principle of cryopump refrigerator
Cooling of the cryopump refrigerator using the G-M
refrigeration cycle consists of four cycles.

He compressor

P2 Exhaust Intake
valve
valve

P1
P2

Room temperature space

A

D
P1
Displacer

Pumps

Regenerator

TL, Q

C
B
P2
P1

TL, Q

Low temperature space

G-M cycle principle of operation

A. When the exhaust valve closes and the intake valve
opens, the high pressure gas from the compressor
fills the room temperature space at the top of thecylinder.
B. When the displacer moves to the highest point while
the intake valve is open, the high pressure gas at
the room temperature space is cooled as it passes
through the regenerator and moves to the low temperature space at the bottom of the cylinder. During this process, fresh high pressure gas is supplied
through the intake valve since the volume of themoving high pressure gas decreases as the temperature drops.

C. When the intake valve closes and the exhaust valve
opens, the high pressure gas in the low temperature
space is released, goes through adiabatic expansion,and creates a cold environment (low-temperature
low-pressure gas). The low-temperature low-pressure gas cools the regenerator and returns to theintake side of the compressor after it adsorbs therefrigeration load.
D. When the displacer moves to the lowest point withthe exhaust valve open, the low temperature gas in
the low temperature space cools the regenerator (thegas itself is heated) and moves to the room temperature space while some gas returns to the compressor.

Canon ANELVA Corporation Vacuum Components Catalog

79

Foreline Trap
Foreline Trap 2F
Foreline Trap S■ Summary
By using a foreline trap, the back flow of oil vapor can

Pumps

be prevented from contaminating the inside of thevacuum equipment when rough pumping clean highvacuum equipment using an ion pump or cryopumpwith an oil-sealed rotary vacuum pump.
The Anelva foreline trap efficiently adsorbs oil molecules using a molecular sieve placed in the gas passage. The foreline trap S efficiently adsorbs water
vapor in addition to oil molecules by cooling the molecular sieve using liquid nitrogen.
In addition, the foreline trap has a built-in heater
so that the adsorption performance of the molecular

956-7100sieve can be restored easily by baking.

● Applications
1.	Preventing back flow of oil vapor when rough pumping a system using an ion pump or cryopump withan oil-sealed rotary vacuum pump.
2.	Preventing back flow of oil vapor when using an oilsealed rotary vacuum pump as an auxiliary pumpfor the turbo molecular pump or oil diffusion pump.
3.	Preventing back flow of oil vapor when using an oilsealed rotary vacuum pump to obtain clean vacuumin other cases.

● Specifications (Foreline Trap 2F)Type
956-7100956-7105

Molecular
Sieve capacity (g)*Approximately 55

956-7110956-7111956-7112Weight (kg)**Heater capacity

Connection flange

Remarks

1.3

Single phase
100V
60W

φ70ICFNote1)

Applicable to equipmentwith small pumped capacity

0.9
2.5

Approximately 500

2.1
2.1

Single phase
100V
125W

NW25

Note2)

φ70ICFNote1)
NW25Note2)
NW40Note2)* Uses molecular sieve 13X (filled during shipment). ** Excluding molecular sieve.
Note 1) The 953-5014 gasket pack (5 per pack) and bolts/nuts are included as standard.
Note 2) The center ring and clamp are not included. Please order them separately.

80

Canon ANELVA Corporation Vacuum Components Catalog

● Dimensions diagram
Heat cartridge
Heat cartridge
NW25

φ70 ICFφ70 ICF

NW25

146

100.5

φ38

100.5

146

(Rotating)(Rotating)

φ76

φ76

177

164

956-7105Heat cartridge

Heat cartridge

φ 70 ICF

NW25(NW40)

203
φ 38

NW25
(NW40)

150(Rotating)φ 114.3

150

203(Rotating)φ 70 ICF

Pumps

956-7100

φ 114.3200

210

956-7110

The dimensions of
the 956-7112 areshown in parenthesis

956-7111/956-7112● Foreline Trap S
The trap itself is in the form of a liquid nitrogen container so that it cools efficiently, prevents back flow of
oil vapor, has high water vapor adsorption capability
and can achieve high ultimate pressure. This simplifies startup of the ion pump in a system using an ionpump.

956-7130956-7131● Specifications (Foreline Trap S)
Type

Molecular sieve capacity (g)*956-7130956-7131956-7132

Weight (kg)**Heater capacity

φ70ICFNote 1)

2.4
Approximately 500

2.0

Connection flange

Single phase, 100V, 380W

2.0

NW25Note 2)
NW40Note 2)* Uses molecular sieve 13X (included in a can at shipment).** Excluding molecular sieve.
Note 1) The 953-5014 gasket pack (5 per pack) and bolts/nuts are included as standard.
Note 2) The center ring and clamp are not included. Please order them separately.

Canon ANELVA Corporation Vacuum Components Catalog

81

● Dimensions diagram
φ70 ICF91

Sheathed heater

NW25(NW40)98

Sheathed heater(Rotating)

367

NW25
(NW40)

φ38

360

160

167

φ38

φ70 ICF

Pumps(Fixed)The dimensions of
the 956-7132 areshown in parenthesis.

φ113

φ113

956-7130956-7131/956-7132● Maintenance and consumable parts
Replacement molecular sieve (13X)
Type: 956-7101
Contents: 500g (in can)Replacement heater
Type

Applicable trap type

Remarks

956-9100956-7100956-7105

100V, 60W
Cartridge heater

956-7114

956-7110956-7111956-7112

100V, 125W
Cartridge heater

944-9150

956-7130956-7131956-7132

100V, 380W
Sheathed heater● Usage
The foreline trap is assembled in the vacuum pipe
between the vacuum chamber (or main pump) and theoil-sealed rotary pump, as shown in the figure below.

Leak valve

Leak valve*

Oil rotary vacuum pump
Vacuumchamberormain pump

Duct
ValvesValves*Foreline trap

* This can be omi tted if the foreline trap vacuum is not needed.

82

Canon ANELVA Corporation Vacuum Components Catalog

■ Ordering information
Parts Number

Model

Description

Remarks

Code

P21-03509

956-7100

Fore-Line Trap 2F

Straight type, with φ70ICF, with 100V AC/60W heater

13800

A23-00512

956-7105

Fore-Line Trap 2F

Straight type, with NW25 flange, with 100V AC/60W heater

13802

P25-00554

956-7110

Fore-Line Trap 2F

Straight type, with φ70ICF, with 100V AC/125W heater

13803

P21-05520

956-7111

Fore-Line Trap 2F(w NW25)

Straight type, with NW25 flange, with 100V AC/125W heater

13804

P21-05172

956-7112

Fore-Line Trap 2F(w NW40)

Straight type, with NW40 flange, with 100V AC/125W heater

13805

P21-03776

956-7130

Fore-Line Trap S(w PY70 ICF) Angle type, with φ70ICF, with 100V AC/380W heater

13801

A22-00091

956-7131

Fore-Line Trap S(w NW25)

Angle type, with NW25 flange, with 100V AC/380W heater

13806

P21-01075

956-7132

Fore-Line Trap S(w NW40)

Angle type, with NW40 flange, with 100V AC/380W heater

13807

825-4619956-7101

Molecularsieve

500 gram

13810

MOD-41514

956-9100

Cartridge Heater

100V AC/60W for 956-7100/7105

13811

P25-02238

956-7114

Cartridge Heater

100V AC/125W for 956-7110/7111/7112

13813

Canon ANELVA Corporation Vacuum Components Catalog

Pumps

Note) Contact us for more information about CE (RoHS).

83

PumpsMemorandum

84

Canon ANELVA Corporation Vacuum Components Catalog

Measurement Instruments &Controllers

Quadrupole Mass Spectrometer (Transducer Type)
Quadrupole Mass Spectrometer (High-speed /High-sensitivity Measurement)
Measurements

QUADVISIONQUADVISION 3 Mobile
Gas Analysis System
Compact Gas Analysis System C SeriesCompact Gas Analysis System D Series

Vacuum Gauges
Transducer Vacuum Gauge Series
Vacuum Gauge Series

Leak Detectors
Helium Leak Detectors

Film Thickness Meter
Crystal Oscillator for Film Thickness Sensor

Canon ANELVA Corporation Vacuum Components Catalog

85

Quadrupole mass spectrometer designed exclusively to be controlled from a PC,
meeting the demands for high sensitivity analysis and low emission

CE

RoHS

Quadrupole Mass Spectrometer(Transducer Type)
M-070QA-TDF, M-101QA-TDF, M-101/201QA-TDM

Measurements■ Summary
Quadrupole Mass Spectrometer are used for a wide
range of applications from gas analysis for thin film
manufacturing equipment to furnace gas analysis
and accelerator gas analysis.
Quadrupole Mass Spectrometer must have low gas
emission and high sensitivity in order to support such applications. The M-101QA-TDF and M-101/201QA-TDM
are highly sensitive/functional, low gas emission quadrupole mass spectrometers suitable for such applications,and are designed exclusively to be controlled from a PC.
The M-070QA-TDF is a low-cost quadrupole mass spectrometer ideally suited for residual gas monitoring ofvarious vacuum equipment.
Adequate performance is ensured from management of production equipment vacuum quality to gas analysis
for research and development.

■ Features
4. QUADVISION

1. High sensitivity• Uses a secondary-emission electron multipliertube for the detector- Easy to use Japanese/English control software • Multicontroller control(Can control up to eight units at the same time)(M-101/201QA-TDM)• Measured data can be converted to CSV

2. Low gas emission analyzer tube
• Uses a low gas emission ion source• Provides a degassing function (*1)

5. Standard equipped with a variety of I/O functions• Auto measurement signal

3. Excellent basic performance- Support for advanced analysis -• Analog signal input• Set point output• Enables detailed setting of ionization voltage andemission current (*1)
• Wide dynamic range*1: Excluding M-070QA-TDF.

86

Canon ANELVA Corporation Vacuum Components Catalog

■ Selection guide
Application Area

M-070QA-TDF

M-101QA-TDF

M-101QA-TDM

M-201QA-TDM

PVD equipment residual gas monitor
CVD equipment residual gas monitor
Etching equipment residual gas monitor
Vacuum equipment residual gas monitor
Ultra-high vacuum equipment residual gas analysis
Accelerator vacuum gas monitor
Inorganic gas analysis
Thermobalance emission gas analysis
Thermal desorption gas analysis
Trace gas analysis
PFC gas analysis
R&D■ Mass filter connection diagram■ Analyzer tube principle diagram

Filament

Measurements: Optimum : Applicable : Contact us for details.
The table above lists the recommended quadrupole mass spectrometers for general use. If you are considering use in applications otherthan the above, please contact our sales department.

Ion source

Ionizes theneutral gas
molecules withthermal electrons
emitted from thefilament.

Electronic repeller

Ionization chamber
Ion focus
Electro-suppressor

Quadrupoleelectrode

Filters the ionsby applying
high-frequency
voltage and DC
voltage.

U+Vcosωt–U–Vcosωt

Secondary electron multiplier(M-101/201
QA-TDM)

Ion deflector

Ion detector

Detects ions as
current value
signals.

Valve
Vacuumchamber
1×10 -2Paor less
Vacuumpump● When installing to a process chamber, installing avalve to protect the analysis tube is recommended.

Canon ANELVA Corporation Vacuum Components Catalog

87

■ Specifications
Standard Model

Model
Measurement
weight range

High-sensitivity Model

M-070QA-TDF

M-101QA-TDF

M-101QA-TDM

M-201QA-TDM

1 to 70

1 to 100

1 to 100

1 to 200--

2.5A/Pa or more

1.8A/Pa or more

Resolution
Basicperformance

Sensitivity
(N2)

FC

M/ΔM≥2M
1.5x10 -6A/Pa or more

SEM
Minimum detectedpartial pressure

7.0x10 -6A/Pa or more-

-96.7x10 Pa or less-10

5.0x10 Pa or less

Dynamic range

6 digits

Detector FC

○

○

EM

-

-

Ion source○○
Yttria coated iridium×2
Option: Tungsten*1

250°C (Analyzer tube only)-

Electron bombardment

Connection flange

φ70ICF

Rated input voltage

100V to 240V AC

Maximum power
consumption
Weight Analyzer
tube
Controller○○

Cage type (Option: box type*1)

Yttria coated iridiumx2

Degas function

60W

90W

1.5kg

1.4kg

1.6kg

2.1kg

2.2kg

Communication interface

RS-232C/485

Standard software

QUADVISION

RoHS, CE marking

compliant*1 Please contact us for specifications of options.

■ Dimensions diagram88

M-101QA-TDM, M-201QA-TDM

ICF70 flange

M-101QA-TDF

ICF70 flange

M-070QA-TDF

ICF 70 flange

Measurements

7 digits

Cage type

Baking temperatureSpecifications

1.0x10 -12Pa or less

1.0x10 Pa or less1.3x10 -2Pa or less

Operating pressure

Filament-12

Canon ANELVA Corporation Vacuum Components Catalog

■ Ordering information
Model

Description

0161-44854

M-201QA-TDM(W)

Quadrupole Mass Spectrometer

0161-44846

M-201QA-TDM(Y)Quadrupole Mass Spectrometer

0161-44901

M-101QA-TDM(W)

Quadrupole Mass Spectrometer

0161-44896

M-101QA-TDM(Y)Quadrupole Mass Spectrometer

0161-46466

M-101QA-TDF(W)

Quadrupole Mass Spectrometer

0161-46474

M-101QA-TDF(Y)

Quadrupole Mass Spectrometer

0160-09509

M-070QA-TDF

Quadrupole Mass Spectrometer

0160-06438

M-201QA-TDM(Re)

Quadrupole Mass Spectrometer (boxtype ion source)

0160-06446

M-101QA-TDM(Re)

Quadrupole Mass Spectrometer (boxtype ion source)
RS232C Cable (1.5m) for Quadrupole Mass
Spectrometer
RS232C Cable (3m) for Quadrupole Mass
Spectrometer
RS232C Cable (5m) for Quadrupole Mass
Spectrometer
RS232C Cable (10m) for Quadrupole
Mass Spectrometer

N20069218
N20069220
N20069232
N20069244
N20096390

Remarks
200amu, M type, W-FIL, AC adapter included, no communication cable*1
200amu, M type, Y-FIL, AC adapter included, no communication cable*1
100amu, M type, W-FIL, AC adapter included, no communication cable*1
100amu, M type, Y-FIL, AC adapter included, no communication cable*1
100amu, F type, W-FIL, AC adapter included, no communication cable*1
100amu, F type, Y-FIL, AC adapter included, no communication cable*1
70amu, F type, Y-FIL, AC adapter included,
no communication cable*1
200amu, M type, Re-FIL, box type ion
source, AC adapter included, no communication cable*1
100amu, M type, Re-FIL, box type ion
source, AC adapter included, no communication cable*1

20090*2
20091*2
20092*2
20093*2
20094*2
20095*2
20096*2
20190*2

20191*2

Cross cable

20290

Cross cable

20291

Cross cable

20292

Cross cable

20293

USB-RS232C Converter

COM-1 (USB) H

Code

20430

0161-47690

RS485 Y Cable Set (5m)RS-485 cable 5m + Y cable (0.3m)

20296

0161-47750

RS485 Y Cable Set (10m)RS-485 cable 10m + Y cable (0.3m)

20297

0161-47713

RS485 Y Cable Set (15m)RS-485 cable 15m + Y cable (0.3m)

20298

RS485 Y Cable Set (20m)

RS-485 cable 20m + Y cable (0.3m)

20299

0161-47721
N20097497

COM-1D(PM)RS-485 Card

20390

N20097928

COM-2PD(PC1)H

RS-485 Board

20391

N20097980

COM-1PD (USB)H

USB-RS485 Converter

20392

N20073881

PARANI-SD1000

Blue Tooth Serial Conversion Adapter

For QV mobile20431

0161-48036

AC Adapter Extension Cable (5m)

For M-010/101/201QA

20395

0161-48044

AC Adapter Extension Cable (10m)

For M-010/101/201QA

20396

0161-48052

AC Adapter Extension Cable (15m)

For M-010/101/201QA

20397

H11-27574

NIST Library Data Conversion Software For QUADVISION-WIN7

20422

0161-42909

TD-W-FILW Filament for TD-MASS

20490

0161-41822

TD-Y-FILY Filament for TD-MASS

20491

0161-75504

Ion Source for M-070

20493

P15-58845

TD-Re-FIL

Re Filament for TD-MASS (Box type Ion
For M-101/201
source)20492

0190-00512

V-040LV-MMI

DN40 Manual L Type Valve MSB

30111

Notes

Measurements

Parts Number

Protection valve for M-101/201*1 The quadrupole mass spectrometer includes dedicated software QUADVISION (CD version).
*2 Indicates CE (RoHS) compliant. Contact us for other products.

Canon ANELVA Corporation Vacuum Components Catalog

89

Quadrupole Mass Spectrometer(High-speed /High-sensitivity
Measurement)

CE

RoHS

M-401QA-MU/G

Measurements■ Summary
The M-401QA-MU/G is a high-performance/highfunctionality quadrupole mass spectrometer capableof measuring weight up to 410amu.
As a general purpose mass spectrometer, the M401QA-MGSY/ MUSY has increased measurement
speed of up to 10 times that of our previous product.

■ Features
1. High-speed measurement support (M-401QA-

4. Low gas emission analyzer tube
Uses a low gas emission ion source
Provides a degassing function

MGSY/MUSY)
Obtains m/Z=1 to 410 data at 1-second intervals

2. Two types of ion source
Selectable between UHV type (cage type) and gas
feedthrough type (box type)

3. High-sensitivity (M-401QA-MGHY/ MUHY)
8-digits dynamic range■ Selection guide
Application Area

High-speed Type
M-401QA-MGSY

M-401QA-MUSY

High-sensitivity Type
M-401QA-MGHY

M-401QA-MUHY

Ultra-high vacuum equipment residual gas
analysis
Inorganic gas analysis
Thermobalance emission gas analysis
Thermal desorption gas analysis
Trace gas analysis
PFC gas analysis
R&D: Optimum : Applicable : Contact us for details.
The table above lists the recommended quadrupole mass spectrometers for general use. If you are considering use inapplications other than the above, please contact our sales department.

90

Canon ANELVA Corporation Vacuum Components Catalog

■ Specifications
High-speed typeModel

M-401QA-MGSY

High-sensitivity type

M-401QA-MUSY

Weight

M-401QA-MGHY

M-401QA-MUHY

1 to 410

Resolution

M/ΔM ≥ 2M

N2 sensitivity SEM
Basic perMinimum detected partial pressureformance
Maximum operating pressure

4.0x10 -1A/Pa

4.0x10 -1A/Pa

4.0A/Pa-12

4.0A/Pa≤ 1.0×10 -12Pa≤ 5.0×10 Pa
1.3x10 -2Pa or less

Dynamic range

7 digits

8 digits

7 digits(high-speed)

5 digits--

Ion source shapeGas inlet type (box type) UHV type (cage type) Gas inlet type (box type) UHV type (cage type)
Yttria coated iridium*1

Filament type
Baking temperature

300°C (Analyzer tube only)

Degas function

Ion source heater

Sweep speed

Electron bombardment

Electron bombardment

10mSec/amu -Specifica- Connection flange
tions
Rated input voltage

φ114ICF
100V to 240V AC
300W

Analyzer tube

5.1kg

Controller

6.2kg

Communication interface

RS-485/USB

Standard software

QUADVISION

RoHS, CE marking

Measurements

Maximum power consumption
WeightIon source heater

1mSec/amu -compliant*1 Optional filament materials are available. Please contact us for details.

■ Dimensions diagram

ICF114 flange

Analyzer tube cableconnection side

19P terminal for ion source

POWER switch

Input cable

Control unit

Analyzer tube

■ Ordering information
Parts Number
0161-81000
0161-81026
0161-80957
0161-80973

Model

Description

Quadrupole Mass Spectrometer (Gas
M-401QA-MGSY
Induction Ion source type)
Quadrupole Mass Spectrometer (UHV
M-401QA-MUSY
Type Ion source)
Quadrupole Mass Spectrometer (Gas
M-401QA-MGHY
Induction Ion source type)
Quadrupole Mass Spectrometer (UHV
M-401QA-MUHY
Type Ion source)

0161-47690

RS485 Y Cable Set (5m)Remarks
410amu, gas inlet type (box type) high-speed
type, Y203-FIL, no communication cable*1
410amu, UHV type (cage type) high-speed type,Y203-FIL, no communication cable*1
410amu, gas inlet type (box type) high-sensitivity
type, Y203-FIL, no communication cable*1
410amu, UHV type (cage type) high-sensitivity
type, Y203-FIL, no communication cable*1
RS-485 cable 5m + Y cable (0.3m)

Code20110*2
20111*2
20112*2
20113*220296

0161-47750

RS485 Y Cable Set (10m)RS-485 cable 10m + Y cable (0.3m)

20297

0161-47713

RS485 Y Cable Set (15m)RS-485 cable 15m + Y cable (0.3m)

20298

0161-47721

RS485 Y Cable Set (20m)

RS-485 cable 20m + Y cable (0.3m)

20299

N20097980

COM-1PD/USB/H USB-RS485 Converter

H11-27574
0161-31411
0161-51966
Notes

20392

NIST Library Data Conversion Software for QUADVISION2-WIN7

20422

401G-Y203-FIL

Filament for TD-MASS (box type)Box type filament for M-401QA (Y203)

20130

401U-Y203-FIL

Filament for TD-MASS (Gas Induction
type)

Cage type filament for M-401QA (Y203) IS integrated

20131*1 The quadrupole mass spectrometer includes dedicated software QUADVISION (CD version).
*2 Indicates CE (RoHS) compliant. Contact us for other products.

Canon ANELVA Corporation Vacuum Components Catalog

91

Quadrupole mass spectrometer support software

QUADVISION

Easy measurement with simple operation

Measurements

Partial pressure measurement

Multiple ion detection

Mass peak analog/bar

Leak test
Recipe/sequence measurement■ QUADVISION specifications
Compatible quadrupole
mass spectrometer

Measurement modes

M-070QA-TDF
M-101/201QA series

RS-232C/485 communication

M-401QA series

USB/RS-485 communication

Multiple ion detection (SIM)

Weight trend monitor with up to 16 channels

Mass peak monitor (MPM)

Continuous mass spectrum measurement of specified range

Leak test (LT)Leak test at specified weight
Fixed 10 components
Partial pressure measurement (H2, He, CH4, H2O, CO, N2, O2, Ar,
CO2, HC, + total pressure)

Partial pressure measurement(PPM)
Recipe function
Area calculation

Adjustment mode (weight calibration, waveform adjustment)
Other features

Options

CSV conversion of stored data
Status check
Automatic measurement, analog input (0 to 10V), set point output
Pressure values can be loaded into QUADVISION by RS-232C
Pressure reading
communication*1
Temperature values can be loaded into QUADVISION by RS-232C
Temperature reading
communication*2
NIST conversion
Saved data may be converted to format searchable in NIST library

Personal computer specifi- OS
cations
Interface

Windows 7
RS-232C (9P)/485 port/USB

Note*1 A Canon ANELVA specified vacuum gauge and cable must be used when reading pressure.
*2 A Canon ANELVA specified temperature control module and cable must be used when reading temperature.

92

Canon ANELVA Corporation Vacuum Components Catalog

Quadrupole mass spectrometer support mobile software

QUADVISION 3 Mobile
Simplified mobile software for QUADVISION.

Easy operation and measurement with touch panel support• Easy partial pressure management and leak test
• Touch panel support• Capable of wireless (Bluetooth) measurement

Measurement screen

Measurements

Menu screen

Chart screen

Trend screen

Numeric value screen

Parameters screen

Switchscreens asneeded.

■ QUADVISION 3 Mobile details
Compatible quadrupole mass
spectrometer
Communication specifications

Measurement modes

Other features*3)

PC specification

M-070QA-TDF, M-101/201TDM series
Wireless specification: Bluetooth
Wired specification: RS-232C
Multiple ion detection (SIM)Mass peak monitor (MPM)
Leak test (LT)Partial pressure measurement (PPM)
Touch panel support
1 set point output*1
Status check function
Data save function*2
OS: Windows 7Interface: RS-232C, Bluetooth*1 Set point output is performed from the quadrupole mass spectrometer controller.
*2) Saved data can be reproduced and modified using the QUADVISION software.
*3) There is no adjustment mode. Use the separate QUADVISION software.

Canon ANELVA Corporation Vacuum Components Catalog

93Compact Gas Analysis System C Series
M-070/101/201GA-C series

Measurements■ Summary
The C Series is a compact gas analysis system offering a high degree of freedom using a quadrupole
mass spectrometer. Select the system configurationthat meets your measurement needs.

■ Features
1. Flexible customization
Options tailored to individual applications are available in addition to the basic configuration to meet your measurement needs.
2. Space saving
Small installation space of only W480mm × D500mm.

3. Easy operation
Pumping controlled with a single switch. Interlock functions available for pumping/measurement.

■ Combination example
Select the configuration that meets your needs.
Recommended Option
Feedthrough System Selection

Others

M-070GA-CRFY

Gas inlet system 1 or 2

Vacuum gauge

M-101GA-CDMY

Gas inlet system 1 or 3

M-201GA-CRMY

Gas inlet system 5 or 6

M-201GA-CRMW

Gas inlet system 3 or 4

Exhaust gas analysis

M-201GA-CRMY

Gas inlet system 6

Atmospheric pressure furnace
gas analysis

M-101GA-CRMY

Gas inlet system 5 or 6

Vacuum furnace gas analysis

M-101GA-CRMW

Gas inlet system 3 or 4

Vacuum equipment gas analysis

M-101GA-CDFY

Gas inlet system 2 or 3

Catalytic reaction gas analysis

M-101GA-CRMW

Gas inlet system 5 or 6

Category

Measurement Application

Va c u u m e q u i p m e n t
gas analysis

Residual gas measurement/
process measurement
High-sensitivity
process measurement
Atmospheric pressure thermal
desorption gas analysis
Atmospheric pressure thermal
desorption gas analysis

R&D
gas analysis

94

Basic Structure
Type

Canon ANELVA Corporation Vacuum Components Catalog

Vacuum gauge
heaterVacuum gauge
heaterVacuum gauge
heaterVacuum gauge
heaterVacuum gauge
heaterVacuum gauge
heaterVacuum gauge
Vacuum gauge
heater■ Basic structure
Basic configuration selection

Quadrupole mass spectrometer and foreline pump selection

M−

101

GA─C

R

M

W

MASS (Measurement range selection)070
M-070QA-TDF
101
M-101QA-TDF
101
M-101QA-TDM
201
M-201QA-TDM

MASS (Filament selection)W
Y

MASS (Detector selection)
F
F
M
M

FP
R
D

Tungsten
Ir-Y203

Oil-rotary pump
Membrane pump

M-070QA-TDF
M-101QA-TDF
M-101QA-TDM
M-201QA-TDM

Quadrupole mass spectrometer(MASS)

Turbo molecularpump (TMP)
Cross tube+

Isolate valve (ISV)

Foreline valve (FP)BaseController

TMP, base, controller, cross tube, and ISV are included in the standard configuration.

Canon ANELVA Corporation Vacuum Components Catalog

95

Measurements■ Basic configuration external view

■ Specifications
Type
Analyzer
Weight range
Sensitivity
Vacuum pumping system
Ultimate pressure
Software function
Power supply

M-070GA-CRFY
M-101GA-CRFY
M-101GA-CRMY
M-201GA-CRMY
M-070QA-TDF
M-101QA-TDF
M-101QA-TDM
M-201QA-TDM
1 to 70
1 to 100
1 to 200
100PPM
10PPM
Turbo molecular pump (70L/s) + oil-sealed rotary pump (25L/min) [membrane pump (20L/min)]1x10 -5Pa or less
QUADVISION2 Win7
100V AC 1.0kVA* The quadrupole mass spectrometers and options are installed by the customer.

■ Option selection 1 (selection of gas inlet system)

Measurements

Gas introduction system relation table
Name

Main UseGas inlet
system 1

Process gas measurement
General gas measurement

Gas inlet
system 2

General gas measurement

Gas inlet
system 3

Process gas measurement

Gas inlet
system 4

General gas measurement

Gas inlet
system 5
Gas inlet
system 6

E-6

E-5

E-4

E-3

E-2

E-1

BG measurement
7.1E-5Pa to 2.0E-2Pa

E0

E+1

1Pa

10Pa

E+2

E+3

E+4

E+5

Atmospheric pressure

500Pa*1

100Pa*1
7.1E-5Pa to 2.0Pa

8.0E-6Pa to 2.0Pa

1.3E-2Pa to atmospheric pressure

General gas measurement
Real-time gas measurement
Atmospheric pressure
gas analysis
Thermal desorption
gas analysis
Furnace gas analysis

1.3E-2Pa to atmospheric pressure
0.05Mpa to
0.25Mpa*1: Special order■ Option selection 2 (other options)Improved measurement accuracy and operability with additional options-1

Ionization vacuum gauge set
M-431HG + MG-2F + mount + interlock cable

Analysis chamber pressure
measurement-2M-350PG Pirani gauge

Turbo molecular pump backpressure measurement-3

Pirani gauge set
M-350PG + M-601GC (display unit) + mount +Interlock cable

Turbo molecular pump backpressure measurement-12ch heater unit + ribbon heater (1.5m) + thermocouple +interlock cable

For analyzer tube + analysis
chamber-2

Ribbon heater (1.5m) + thermocouple

For gas inlet system-3

Ribbon heater (2.5m) + thermocouple

For capillary gas inlet system

Notebook PC arm type mount3 joint free-arm type, mountable dimension (390x300),
load capacity 7kg

Notebook PC mountTipping prevention fixture

Four sets of dedicated metal fittings

For pumping system mounttipping prevention

Vacuum gauge set

Heater kit

96

Canon ANELVA Corporation Vacuum Components Catalog

(PC fixed image)Gas inlet system 1, 2
(For process measurement)
PC fixing arm

Input receptacle(Frame rear view)Gas inlet system 4(For general measurement)

Tipping prevention fixture

Measurements

Gas inlet system 6(For atmospheric pressure
measurement)

Free space
Can be arranged freely

Vacuum gauge

Fixed tovacuum gauge(Frame side view)

Canon ANELVA Corporation Vacuum Components Catalog

97

Measurements■ Ordering information
Parts Number

Model0371-59482

M-070GA-CRFY

Compact Gas Analysis System

Description

Remarks

Code0371-59490

M-070GA-CDFY

Compact Gas Analysis System

46701

0371-59505

M-101GA-CRFY

Compact Gas Analysis System

46702

46700

0371-59513

M-101GA-CDFY

Compact Gas Analysis System

46703

0371-59521

M-101GA-CRMY

Compact Gas Analysis System

46704

0371-59539

M-101GA-CDMY

Compact Gas Analysis System

46705

0371-59547

M-201GA-CRMY

Compact Gas Analysis System

46706

0371-59555

M-201GA-CDMY

Compact Gas Analysis System

46707

0371-60742

M-101GA-CRFW

Compact Gas Analysis System

46742

0371-60776

M-101GA-CDFW

Compact Gas Analysis System

46743

0371-60750

M-101GA-CRMW Compact Gas Analysis System

46744

0371-60784

M-101GA-CDMW Compact Gas Analysis System

46745

0371-60768

M-201-CRMW

Compact Gas Analysis System

46746

0371-60792

M-201GA-CDMW Compact Gas Analysis System

46747

0371-59393

M-001GA-CR

Pumping System for Gas Analysis with RVP

46708

0371-59424

M-001GA-CD

Pumping System for Gas Analysis with DRY

46709

0371-57472

SS-1COGas Introduction System-1

Valve with orifice (for 1Pa, 10Pa
attached)

46714

0371-57480

SS-1CR

Gas Introduction System-2

Flow control valve

46710

VMT-8368

SS-1M

Gas Introduction System-3

Combination valve inlet system

46711

0190-04867

951-7172

Gas Introduction System-4

Variable leak valve

31001

VMT-9693

Gas Introduction System-5

3-way variable leak valve

46712

0371-60700

Gas Introduction System-6 (Capillary Model)

For capillary gas inlet system

46713

0371-60140

Vacuum Gauge Set-1 (M-431HG set)

M-431HG vacuum gauge set

46731

0371-60514

Vacuum Gauge Set-2 (M-350PG-SP)

M-350PG Pirani gauge

46732

0371-60522

Vacuum Gauge Set-3 (M-350PG-SD+M-601GC) M-350PG Pirani gauge set

46733

0371-60564

2ch heater unit + heater (1.5m)
Heater Kit-1 (2CH Heater Unit Plus 1 Heater Set)
+ thermocouple

46736

0371-60530

Heater Kit-2 (Heater(1.5m) 1 Heater Set)

Heater (1.5m) + thermocouple

46737

0371-60548

Heater Kit-3 (Heater(2.5m) 1 Heater Set)

Heater (2.5m) + thermocouple

46738

0371-59458

Arm Set for PC

3 joint free arm PC mount46720

0371-59872

Fall-Prevention Hardware

Crank type dedicated bracket x 4 sets

46722

Note) Contact us for more information about CE (RoHS).

98

Canon ANELVA Corporation Vacuum Components Catalog

Measurements■ Dimensions diagram

Canon ANELVA Corporation Vacuum Components Catalog

99

Compact Gas Analysis System D Series
M-101/201/401GA-D series

Measurements■ Summary
The M-101/201/401GA-D series is a compact, lowcost gas analysis system ideally suited for quadrupole
mass spectrometer application technology products,
vacuum equipment residual gas analysis, inorganic
gas analysis, thermal desorption analysis (TDS, etc.),
emission gas analysis, and research and development gas analysis.
This system can be flexibly configured to meet specific, individual applications by optionally combining
the quadrupole mass spectrometer analyzer with the
TMP pumping system.
The system can be used for a wide range of gas
analysis applications in research and development.

■ Features
3. Simple operation

1. Customizable system• Systems that combine a quadrupole mass spectrometer, gas feedthrough system and other options can be easily set up to meet your specificneeds.
• The quadrupole mass spectrometer can be selectedfrom six different models: M-070QA-TDF, M101QA-TDF, M-101/201QA-TDF, and M-401QA-M(high sensitivity/high speed).
2. Space-saving, compact design• The compact quadrupole mass spectrometer and
TMP pumping system can be mounted on a small
rack.

• Measurement operations can be easily controlledusing a PC.

4. Windows compatible software
QUADVISION■ Applications• Vacuum equipment residual gas analysis• Thermobalance emission gas analysis• Thermal desorption gas analysis• Furnace gas analysis• Sealed gas analysis

QUADVISION

100

Canon ANELVA Corporation Vacuum Components Catalog

■ Specifications
Analyzer

M-101GA-DF

M-101GA-DM

M-201GA-DM

M-401GA-DM

M-101QA-TDF

M-101QA-TDM

M-201QA-TDM

M-401QA-M

1 to 200

1 to 410

10ppm

10ppm

Measured weight

1 to 100

Sensitivity

100

10
-6

Ultimate pressure

5x10 Pa or lessInducible gas pressure
Sample gas pressure

VLV< Atmospheric pressure

SS-1M

< 3Pa

Capillary inlet system

Software function

Atmospheric pressure -Multi-ion detection mode, partial pressure measurement mode, mass peak mode, leak test mode

Operating environment
UtilityInquire for details

Power supply

100V AC 2.0kVA

N2 gas0.5MPa (supply when N2 purge is necessary)

Connection flange

φ70ICF

φ114ICF■ Block diagram

Ionization vacuum
gauge(optional)

G1

Measurements

Select analyzer
M-101QA-TDF
M-101/201QA-TDM
M-401QA-M

SS-1M

Analysis chamber

Gas inlet system(optional)

VLV

TMP

3-way VLVRP

Other optional• data system■ Dimensions diagram
MG-2F

Analysis chamberController

Gas inlet valve

TG70F
START/STOP SW

746

(991)

M-431HG

Main unit

530

(100)

Example of M-201GA-DM gas analysis system

Canon ANELVA Corporation Vacuum Components Catalog

101

Seamless coverage from atmosphere to ultra-high vacuum

Transducer Vacuum Gauge Series■ Summary

Measurements

Compact wire-saving, RoHS/CE marking compliant environment-friendly products.
These Transducer type vacuum gauges are capable of handling a wide range from atmospheric pressure to 10-8Pa.
The vacuum gauges include capacitance gauges, Pirani gauges, cold cathode Pirani gauge, crystal ion gauge,
and ion gauge display units (1ch, 3ch). They are ideally suited for all types of industries such as state-of-the-art
semiconductor manufacturing equipment and flat panel manufacturing equipment.

■ Selection guide● Features

Gauge name

• Transducer type
→ Wire saving

Pa 10-8
133kPa→ Space saving• Energy saving with low power consumption• Analog type, communication type supported

Capacitance gauge
M-342DG• Gauge auto recognition (display unit)• Series with uniform external design• Lead-free solder used
• CE marking compliant● Applications• Vacuum thin film equipment, deposition
equipment• Semiconductor manufacturing equipment,
electronic component manufacturing equipment• Electron microscopes, electron beam equipment• Mass spectrometers, various analyzers• Vacuum furnaces, freeze drying equipment• Various industrial equipment

13.3kPa1.33 kPa

Capacitance gauge
M-341DG

133Pa

Pirani gauge
M-350PG
M-351PG
Cold cathode Pirani gauge
M-360CPIon gauge
M-311HG
Crystal ion gauge
M-336MX• Various pumping equipment• R&D equipment

102

Canon ANELVA Corporation Vacuum Components Catalog

10-6

RoHS

Measurements

CE

Recommended measurement pressure range
10-4

10-2

1

102

104

* This table lists the recommended pressure measurement range, which is different from themeasurable pressure range.

Canon ANELVA Corporation Vacuum Components Catalog

103

Capacitance Gauge
M-341DG

CE■ Summary

RoHS

These capacitance gauges (diaphragm gauge) are compliedwith RoHS. They offer push button zero adjustment, LED
status display, and low power consumption for improved
usability and precision.

■ Features• Static capacitance diaphragm gauge using micro machinetechnology• Single crystal silicon diaphragm used for the sensor• Compact, light weight, low cost, and low power consumption• High precision and repeatability■ Applications

Measurements

Sputtering systems, ashing systems
Load lock chambers
Gas analysis/pumping system pressure measurementTypeM-341DG-01

Full scale pressure

(Pa)

133

Precision(% of reading)

0.25 (at 25°C)

Zero temperature drift coefficient(% of F.S./°C)

0.015

Span temperature drift coefficient (% of reading/°C)

Maximum operating pressure
Input voltage
Power consumption

0.01

(Pa)

200kPa (However, the internal pressure of NW16 and NW25 with φ15 tube coupler
must not become positive.)(V DC)+13.5 to 26.4

(W)

Analog output(V DC)

0.5 or less0 to 10

Response speed

(ms)

40

Operating temperature(°C)

5 to 50

Storage temperature(°C)-20 to 70°C (not operating)

Maximum cable length(m)

20 (0.13mm2)

I/O connector

D-sub 9 pin male
SUS304, SUS316, Si, Tempax float ®, Viton®

Gas contacting part material
Flange shape and weight

NW16 (210g), NW25 (220g), φ70ICF (540g), 8-VCR female (250g), φ15 tube (220g)

Applicable standards and regulations

CE, IP40, RoHS

Security trade regulations

Not applicableCompatible display unit

M-601GC (1ch), M-603GC (3ch)■ Dimensions diagram

NW16 type

φ70ICF type

8-VCR type

φ15 tube type

Main unit shape (Coupler: NW25)

104

Canon ANELVA Corporation Vacuum Components Catalog

Capacitance Gauge
M-342DG

CE■ SummaryRoHS

The capacitance gauge M-342DG is a diaphragm
gauge that enables accurate, stable pressure measurement with minimum zero adjustment. This isachieved using a newly developed small silicon MEMS
chip as the pressure sensor unit to minimize the influence from the outside environment such as changes intemperature, vibrations, and atmospheric pressure.

■ Features
1. High precision, stable pressure measurement• Excellent zero point stability.
• Has low temperature dependence providing excellent stability without the need of a temperatureadjustment mechanism.
• Excellent anti-vibration noise performance.

2. Compact and low power consumption

Measurements• 200g, W46mm × H49mm × L70mm compact, lightweight.*1• Power consumption 0.5W.
*1: Size and weight of the coupling NW16 specifications■ Applications
Supports a wide range of general industry applications such as medical and food in addition to semiconductor manufacturing equipment, panel display
manufacturing equipment, and other vacuum equipment.*2*2: Not suitable for applications where corrosive gas is used.
Please consult us for details.

■ Specifications
Type
Full scale pressure(Pa)

Precision(% of reading)M-342DG-11

M-342DG-12

M-342DG-13

1.33k

13.3k

133k

0.20 (at 23°C)

Zero temperature drift coefficient(% of F.S./°C)

0.002

Span temperature drift coefficient(% of reading/°C)

0.005

Maximum operating pressure
Input voltage
Power consumption(Pa)

200kPa (However, the internal pressure of NW16 and NW25 with φ15 tube coupler must not become positive.)(V DC)+13.5 to 26.4(W)

0.5 or lessAnalog output(V DC)

0 to 10

Response speed

(ms)

30

Operating temperature(°C)

0 to 50

Storage temperature(°C)-20 to 70°C (not operating)

Maximum cable length(m)

100 (dedicated cable)

I/O connector

D-sub 9 pin male
SUS304, SUS316, Si, Tempax float ®, Viton ®

Gas contacting part material
Flange shape and weight

NW16 (200g), NW25 (210g), 8-VCR female (250g), φ70ICF (460g)

Applicable standards and regulations

CE, IP40, RoHS

Security trade regulations

Not applicableCompatible display unit

M-601GC(1ch), M-603GC(3ch)

Canon ANELVA Corporation Vacuum Components Catalog

105

■ Dimensions diagram
25
25

78.6

48.9

30

Φ12.7

Φ12.7

Φ12.7

Φ12.7

Φ40

Φ70

Φ30

46

25

ZERO

105.8
12.7

NW16

φ70ICF

8-VCR® (female)

NW25■ Ordering information
Parts Number

Measurements

0161-65656

Model

Description

M-341DG-01/N16

Capacitance Diaphragum Gauge (133Pa)

Remarks

Code

Coupling: NW1622645*

0161-65672

M-341DG-01/N25

Capacitance Diaphragum Gauge (133Pa)

Coupling: NW25

22646*

0161-65680

M-341DG-01/C70

Capacitance Diaphragum Gauge (133Pa)

Coupling: Ф70ICF

22647*

0161-65664

M-341DG-01/VCR

Capacitance Diaphragum Gauge (133Pa)

Coupling: 8-VCR female

22648*

0161-65698

M-341DG-01/P15

Capacitance Diaphragum Gauge (133Pa)

Coupling: Ф15 tube

22649*

0160-11459

M-342DG-11-N16

Capacitance Diaphragum Gauge (1.33kPa)

Coupling: NW16

22715*

0160-11467

M-342DG-11-N25

Capacitance Diaphragum Gauge (1.33kPa)

Coupling: NW25

22716*

0160-11475

M-342DG-11-C70

Capacitance Diaphragum Gauge (1.33kPa)

Coupling: Ф70ICF

22717*

0160-11483

M-342DG-11-VC8

Capacitance Diaphragum Gauge (1.33kPa)

Coupling: 8-VCR female

22718*

0160-11140

M-342DG-12-N16

Capacitance Diaphragum Gauge (13.3kPa)

Coupling: NW1622720*

0160-11158

M-342DG-12-N25

Capacitance Diaphragum Gauge (13.3kPa)

Coupling: NW25

22721*

0160-11077

M-342DG-12-C70

Capacitance Diaphragum Gauge (13.3kPa)

Coupling: Ф70ICF

22722*

0160-11166

M-342DG-12-VC8

Capacitance Diaphragum Gauge (13.3kPa)

Coupling: 8-VCR female

22723*

0160-11093

M-342DG-13-N16

Capacitance Diaphragum Gauge (133kPa)

Coupling: NW16

22725*

0160-11108

M-342DG-13-N25

Capacitance Diaphragum Gauge (133kPa)

Coupling: NW25

22726*

0160-11116

M-342DG-13-C70

Capacitance Diaphragum Gauge (133kPa)

Coupling: Ф70ICF

22727*

0160-11124

M-342DG-13-VC8

Capacitance Diaphragum Gauge (133kPa)

Coupling: 8-VCR female

22728*Note) * marked indicates CE (RoHS) compliant.

106

Canon ANELVA Corporation Vacuum Components Catalog

Pirani Gauge
M-350PG

CE■ Summary

RoHS

This Pirani vacuum gauge can handle a wide range
of applications. It offers convenient measurement
capability from atmospheric pressure with high cost
performance. The gauge can be mounted on various
systems for low to medium vacuum measurements ina variety of industries such as food, automobile, andpharmaceutical.

■ Features• Good repeatability and low cost
• From 5×10-2Pa to atmospheric pressure• Suitable for low to medium vacuum range measurements■ Dimensions diagram■ Applications

Measurements

Roughing pump system pressure measurement,
pumping system pressure monitoring and control■ Specifications
Pirani Gauge
Type
Set pressure range*1
Precision (Pa)
Repeatability
Input voltage
Power consumption
Analog output
Gauge identification resistanceSet point
Interface
I/O connector
Maximum cable length
Operating temperature range
Storage temperature range
Baking temperature
Allowed overload pressure
Applicable Pirani sensor type
Flange shapeSensor material(Main component)
Protection standard
RoHS, CE marking

M-350PG-SD
Standard type

M-350PG-SP
Type with set point
5x10 -2 to 1x10 -5(Pa)±50%: 5x10 −2 to 1x10 −1±15%: 1x10 −1 to 1x10 4±50%: 1x10 4 to 1x105

M-350PG-RS
RS485 type

±2%: 1x10 -1 to 1x10 4Pa+14 to 30V DC
1W
0 to 10V
13KΩ (between D-sub 5 and 9 pin)
2 contact output (1A 30V, DC)
RS485
D-sub 9 pin
200m (0.34mm2) supported*1
5 to 60°C-20 to 70°C (not operating)<+150°C (O-ring specification, gauge head only)<+300°C (metal seal specification, gauge head only)
1MPa (limited to coupler shape NPT and inert gas,
absolute temperature)
MP-1
NW16, NW25, φ34ICF, 1/8NPT, φ15 adapter, φ18 adapter
Pirani filament: Tungsten
Sensor tube: Stainless steel
Inlet terminal insulator: Kovar glass
IP40
compliant*1 The maximum length of the gauge cable is 100m when connecting an M-601/603GC display unit.

CANON ANELVA CORPORATION Vacuum Components Catalog

107

■ Ordering information

Measurements

Parts Number

Model

Description

Remarks

Code0160-06608

M-350PG-SD/N16

Pirani Gauge

With NW16 flange

22500*

0160-06616

M-350PG-SD/N25

Pirani Gauge

With NW25 flange

22501*

0160-06624

M-350PG-SD/P15

Pirani Gauge

For φ15 gauge port

22502*

0160-06632

M-350PG-SD/P18

Pirani Gauge

For φ18 gauge port

22503*

0160-07133

M-350PG-SD/C34

Pirani Gauge

With φ34ICF flange

22504*

0160-07125

M-350PG-SD/NPT

Pirani Gauge

With 1/8" NPT (male)

22505*

0160-06658

M-350PG-SP/N16

Pirani Gauge (w Setpoints)

With NW16 flange

22506*

0160-06666

M-350PG-SP/N25

Pirani Gauge (w Setpoints)

With NW25 flange

22507*

0160-06674

M-350PG-SP/P15

Pirani Gauge (w Setpoints)

For φ15 gauge port

22508*

0160-06682

M-350PG-SP/P18

Pirani Gauge (w Setpoints)

For φ18 gauge port

22509*

0160-08286

M-350PG-SP/C34

Pirani Gauge (w Setpoints)

With φ34ICF flange

22510*

0160-07531

M-350PG-SP/NPT

Pirani Gauge (w Setpoints)

With 1/8" NPT (male)

22511*

0160-06690

M-350PG-RS/N16

Pirani Gauge (RS485)

With NW16 flange

22512*

0160-06705

M-350PG-RS/N25

Pirani Gauge (RS485)

With NW25 flange

22513*

0160-06713

M-350PG-RS/P15

Pirani Gauge (RS485)

For φ15 gauge port

22514*

0160-06721

M-350PG-RS/P18

Pirani Gauge (RS485)

For φ18 gauge port

22515*

0160-11205

M-350PG-RS/C34

Pirani Gauge (RS485)

With φ34ICF flange

22516*

0160-09575

M-350PG-RS/NPTPirani Gauge (RS485)

With 1/8" NPT (male)

22517*

0161-51275

MP1/NW16

Pirani Gauge HeadWith NW16 flange

22527*

0161-51479

MP1/NW25

Pirani Gauge HeadWith NW25 flange

22528*

0161-51982

MP1/C34

Pirani Gauge HeadWith φ34ICF flange

22529*

0161-56788

MP1/NPT

Pirani Gauge HeadWith 1/8"NPT (male)

22530*

0161-55986

MP1/PY15

Pirani Gauge HeadFor φ15 gauge port

22531*

0161-55994

MP1/PY18

Pirani Gauge HeadFor φ18 gauge port

22532*Note) * marked indicates CE (RoHS) compliant.

108

Canon ANELVA Corporation Vacuum Components Catalog

Pirani Gauge (Corrosion-resistant Type)
M-351PG

CE■ Summary

RoHS

This model uses an Ni filament to increase corrosion
resistance. It supports hard process equipment such
as RIE and CVD.

■ Features• Improved corrosion resistance Uses Ni filament.
• Good repeatability and low cost. From 5×10-2Pa toatmospheric pressure.
• Can be mounted in any direction.

■ Applications• Semiconductor and electronic device manufacturing■ Dimensions diagram

equipment
Dry etching equipment, plasma CVD equipment,
LD-CVD equipment• Food and drug manufacturing equipment

Measurements

Vacuum-freeze drying, reduced-pressure distillation,sterilization equipment■ Specifications
Type
Measurement pressure range

M-351PG-SP (Ni filament) (Set point equipped type)5x10 -2 to 1x105(Pa)±50%: 5×10 -2 to 1×10 -1±15%: 1×10 -1 to 1×10 4±50%: 1×10 4 to 1×105± 2%: 1×10 -1 to 1×10 4Pa+14 to 30V DC
2W
0 to 10V
13KΩ (between D-sub 5 and 9 pin)
2 contact output (1A 30V, DC)
D-sub 9 pin
200m (0.34mm2) supported *1
5 to 60°C-20 to 70°C (not operating)<+150°C (O-ring specification, gauge head only)<+300°C (metal seal specification, gauge head only)
1MPa (limited to coupler shape NPT and inert gas, absolute temperature)
MP-2
NW16, NW25, 1/8NPT
Pirani filament: Nickel
Sensor tube: Stainless steel
Inlet terminal insulator: Kovar glass+Al2O3 coat
IP40
compliantPrecision (Pa)
Repeatability
Input voltage
Power consumption
Analog output
Gauge identification resistanceSet point
Interface
I/O connector
Maximum cable length
Operating temperature range
Storage temperature range
Baking temperature
Allowed overload pressure
Applicable Pirani sensor type
Flange shapeSensor material(Main component)
Protection standard
RoHS, CE marking*1 The maximum length of the gauge cable is 100m when connecting an M-601/603GC display unit.

■ Ordering information
Parts Number
0160-08359
0160-08854
0161-62080
0161-70368

Model
M-351PG-SP/N16
M-351PG-SP/N25
MP-2/NW16
MP-2/NW25

Description
Pirani Gauge
Pirani Gauge
Pirani Gauge Head
Pirani Gauge Head

Remarks
With NW16 flange
With NW25 flange
With NW16 flange
With NW25 flange

Code22665*
22666*
22668*
22669*Note) * marked indicates CE (RoHS) compliant.

CANON ANELVA CORPORATION Vacuum Components Catalog

109

Cold Cathode Pirani Gauge
M-360CPCE■ SummaryThis combination gauge uses a Pirani gauge for low
vacuum range measurement and a cold cathode gauge
for high vacuum range measurement. The cold cathode gauge has no burnout problem because no heatedfilament is used. This single device is capable of measuring a wide range of pressures.

■ Features• Combination gauge combining a Pirani gauge and acold cathode gauge• From 5×10-7Pa to atmospheric pressure• Capable of sensor cleaning■ Applications
Electron microscopes and other analyzers, vapor■ Dimensions diagram

Measurements

deposition equipment, vacuum furnaces, and othervacuum equipment.
Roughing and ultimate pressure measurement ofsemiconductor and electronic component manufacturing equipment.

■ Specifications
Cold cathode Pirani gauge
Type

M-360CP-SP
Type with set point

5x10 -7 to 1x105(Pa)Pressure measurement range
Input voltage+15 to 30V DC

Power consumption
Analog output

M-360CP-RS
RS485 type

3W
0 to 10V-

Set point

2 contact output (DC30V, 1A)

Interface

-

RS485

I/O connector

D-sub 9 pin

Maximum cable length

300m (1mm2)*1

Protection standard

IP40 compliant

Operating temperature range

5 to 55°C

Storage temperature range-20 to 70°C (not operating)Sensor type
Sensor material (main component)
Dimensions (mm)Flange shape
Protection standard
RoHS, CE marking

CP-1
Filament: W, Electrode: Mo, Case: SUS304
116x70x70 (NW25)
NW25, NW40, φ70ICF
IP40
compliant*1 The maximum length of the gauge cable is 100m when connecting an M-601/603GC display unit.

110

Canon ANELVA Corporation Vacuum Components Catalog

RoHS■ Ordering information
Parts Number

Model

Description

Remarks

Code0161-92962

M-360CP-SP/N25

Cold Cathode Pirani Gauge

With NW25 flange

22700*

0161-54142

M-360CP-SP/N40

Cold Cathode Pirani Gauge

With NW40 flange

22701*

0161-93007

M-360CP-SP/C70

Cold Cathode Pirani Gauge

With φ70ICF flange

22702*

0161-54184

M-360CP-RS/N25

Cold Cathode Pirani Gauge (RS485)

With NW25 flange

22703*

0161-54207

M-360CP-RS/N40

Cold Cathode Pirani Gauge (RS485)

With NW40 flange

22704*

0161-54223

M-360CP-RS/C70

Cold Cathode Pirani Gauge (RS485)

With φ70ICF flange

22705*

Measurements

Note) * marked indicates CE (RoHS) compliant.

Canon ANELVA Corporation Vacuum Components Catalog

111

Crystal Ion Gauge
M-336MXCE■ SummaryThis combination gauge uses a crystal gauge withexcellent repeatability and response for measurementin the low vacuum range and a miniature B-A gauge
proven over many years for measurement in the highvacuum range. This single device is capable of measuring a wide range of pressures from atmosphericpressure to ultra-high vacuum.

■ Features• Combination gauge combining a crystal gauge and aminiature B-A gauge• From ultra-high vacuum to atmospheric pressure• High precision with excellent repeatability in the■ Dimensions diagram

Measurements

low vacuum range■ Applications
Roughing pump and ultimate pressure measurementof vacuum equipment, semiconductor and electronic
component manufacturing equipment pressure measurement.

■ Specifications
Crystal Ion GaugeType

M-336MX-SP
Type with set point

Pressure measurement range*1

M-336MX-RS
RS485 type4x10 -8 to 1x105(Pa)Input voltage+20 to 28V DC

Power consumption

12W

Analog output

0 to 10V

Set point-

2 contact output

Interface

-

RS485

I/O connector

D-sub 9 pin

Maximum cable length

300m (1mm2)**

Protection standard

IP40 compliant*2

Operating temperature range

5 to 50°C

Storage temperature range*2-20 to 70°C (not operating)Sensor type
Sensor material (main component)
Dimensions (mm)Flange shape

MX-1
Filament: Y2O3/Ir, Case: SUS304
149x70x50 (NW25)
NW16, NW25, NW40, φ70ICF

Protection standard

IP40

RoHS, CE marking

compliant*1. The minimum pressure measurement shows the soft X-ray limit of B-A gauge.
Minimum pressure measurement ICF: Approx. 10 -7Pa
NW: Approx. 10 -6Pa
*2. Use or storage under high temperatures may reduce the product life.
** The maximum length of the gauge cable is 100m when connecting an M-601/603GC display unit.

112

Canon ANELVA Corporation Vacuum Components Catalog

RoHS■ Ordering information
Parts Number

Model

Description

Remarks

Code0161-14825

MX-1/N16

Crystal Ion Gauge Head(336MX)

With NW16 flange

22559*

0161-14752

MX-1/N25

Crystal Ion Gauge Head(336MX)

With NW25 flange

22560*

0161-14689

MX-1/N40

Crystal Ion Gauge Head(336MX)

With NW40 flange

22561*

0161-14647

MX-1/C70

Crystal Ion Gauge Head(336MX)

With φ70ICF flange

22562*

0160-06797

M-336MX-SP/N16

Crystal Ion Gauge

With NW16 flange

22545*

0160-06810

M-336MX-SP/N25

Crystal Ion Gauge

With NW25 flange

22546*

0160-07206

M-336MX-SP/N40

Crystal Ion Gauge

With NW40 flange

22547*

0160-06828

M-336MX-SP/C70

Crystal Ion Gauge

With φ70ICF flange

22548*

0160-06836

M-336MX-RS/N16

Crystal Ion Gauge (RS485)

With NW16 flange

22549*

0160-06844

M-336MX-RS/N25

Crystal Ion Gauge (RS485)

With NW25 flange

22550*

0160-07963

M-336MX-RS/N40

Crystal Ion Gauge (RS485)

With NW40 flange

22551*

0160-06852

M-336MX-RS/C70

Crystal Ion Gauge (RS485)

With φ70ICF flange

22552*

Measurements

Note) * marked indicates CE (RoHS) compliant.

Canon ANELVA Corporation Vacuum Components Catalog

113

Ion Gauge
M-311HG

CE■ SummaryRoHS

The ion gauge is a transducer vacuum series ion
gauge. It (hot cathode ionization vacuum gauge) is an
excellent vacuum gauge with good repeatability andlinearity, capable of measuring a wide range of pressures. It uses a proven miniature gauge (MG-2I) for
the sensor.

■ Features• Wide pressure measurement range

Measurements

From 10-7Pa to 10Pa, capable of measuring low
vacuum below the sputtering process without sacrificing the ultra-high vacuum side characteristics.
• High response analog output
The analog signal output of the pressure value has
excellent response (within 100ms) to enable use inprocess pressure control.
• Four emission current setting modes
The mode can be selected based on the application
to improve the filament life during use in the highpressure range.
• Space-saving and low power consumption
Space-saving of 40% by volume ratio, and powersaving. (Compared to the conventional model (M310HG))• Safe and environmentally friendly■ Applications• Production use vacuum equipment pressure measurement• Semiconductor sputtering equipment pressure measurement• Various vacuum equipment■ Options• Display units for the series are available.
The large, easy-to-read digital LCD significantly
improves operability.
A 1ch type or 3ch type display unit can be selectedaccording to your needs.

RoHS and CE marking compliant■ Specifications■ Dimensions diagram
Ion Gauge
M-311HG-SP

Pressure measurement range
Input voltage
Power consumption
Analog output
Set point
Interface
I/O connector
Maximum cable
lengthOperating temperature range
Storage temperature
range
Sensor Type
Sensor material(main component)
Dimensions (mm)Flange shape
Protection standard
RoHS, CE marking

114

Flange type NW25

M-311HG-RS

1x10 -7 to 10Pa
20 to 28V DC
12W
0 to 10 V
2 point relay output
RS485
Dsub-9 (Male)
200m (1mm2)

NW25 flange

5 to 50°C-20 to 70°C
Miniature B-A Gauge (MG-2I Series)
Filament: Y2O3/Ir, Case: SUS304
110x70x50
NW16, NW25, ICF34, ICF70
IP40
compliant

Canon ANELVA Corporation Vacuum Components Catalog

■ Ordering information
Parts Number

Model

Description

Remarks

Code0161-78390

M-311HG-SP/N16

Ion Gauge

With NW16 flange

22670*

0161-78405

M-311HG-SP/N25

Ion Gauge

With NW25 flange

22671*

0161-78413

M-311HG-SP/C70

Ion Gauge

With φ70ICF flange

22672*

0161-78421

M-311HG-SP/C34

Ion Gauge

With φ34ICF flange

22673*

0161-78439

M-311HG-RS/N16

Ion Gauge (RS485)

With NW16 flange

22674*

0161-78447

M-311HG-RS/N25

Ion Gauge (RS485)

With NW25 flange

22675*

0161-78455

M-311HG-RS/C70

Ion Gauge (RS485)

With φ70ICF flange

22676*

0161-78463

M-311HG-RS/C34

Ion Gauge (RS485)

With φ34ICF flange

22677*

Measurements

Note) * marked indicates CE (RoHS) compliant.

Canon ANELVA Corporation Vacuum Components Catalog

115

Display Unit (1 ch/3 ch)
M-601GC/603GC

CE■ Summary

RoHS

These display units support the transducer typevacuum gauge series.
The large, easy-to-read digital LCD significantly improves operability. The units offer numerous features
to improve on-site usability. A 1ch type or 3ch typedisplay unit can be selected according to your needs.

■ Features• Gauge auto recognition• Large digital LCD• RS232C interface equipped as standard

1ch display unit

• Excellent operability• Capable of simultaneous display (3ch)

3ch display unit

3ch display unit Display mode

• Easy-to-read 3-type display (3ch)	Trend graph (up to 18H)
Analog meter■ Specifications
Analog meter

90 to 250V AC 50/60Hz
100VA

5 to 50°C

5 to 40°C■ Dimensions diagram
106.3
(2.5)

(204.5)

(5)

(103)

3

91.4

(8.3)

50VA

-20 to 60°C

The power cord protective grounding conductor must beconnected to ground. No user serviceable parts inside.
Refer servicing to qualified personnel.

WARNING

O

Auto

GAUGE
POWER

100-240VAC
50/60Hz
50VA

4-Ø3.5

RS232C

Dimensions (mm)84×106.3×212

128.5×106.3×212

Display

Back lit LCD

Color TFT LCD

compliantO

Canon ANELVA Corporation Vacuum Components Catalog

GAUGE

1/Ch

WARNING

100-240VAC
50/60Hz
100VA
GAUGE

1/Ch

1

The power cord protective grounding conductor
must be connected to ground.
No user serviceable parts inside.
Refer servicing to qualified personnel.

POWER

GAUGE

1

Recorder output

RoHS, CE marking

(103)

CH1

Analog output

IP30

(5)

RS232C

IP30 compliant

Protection standard(204.5)

(9.3)

(2.5)

91.4

M-603GC

I

(110)

2/Ch

106.3

REMOTE

2 points

REMOTE

4-Ø3.53Ch (Simultaneously displayable)
Ion gauge (M-311HG) Pirani, Capacitance,
Crystal ion, CC Pirani
1Ch

Communication
function(67.5)

I

78

84

RS232C

Protection standard

116

Trend graph

REMOTESet point

DigitalREMOTEPower consumption
Operating temperature
Storage temperature
Gauge recognition
Number of connected channels
Connected
gauge

M-603GC(3 ch connection
type)

3

Input voltage

M-601GC(1 ch connection
type)

122.5

Type

128.5

Measurements

Digital display

CH2

CH2

■ Ordering information
Parts Number

Model

Description

Remarks

Code0161-56738

M-601GC

Display Unit (1CH)

No external control connector, AC cable

22563*

0161-56746

M-603GC

Display Unit (3CH)

No external control connector, AC cable

22564*

0161-52946

601-005

Gauge Cable for M-601/603GC (5m)22567

0161-52954

601-010Gauge Cable for M-601/603GC (10m)22568

0161-52962

601-015Gauge Cable for M-601/603GC (15m)

22569

9007-83851

Connector for Gauge (D-Sub9P)

22570

9007-83835

Power Cable for M601/603GC

3m

0164-29767

SCREWDRIVER(PLASTICS)

Ordering unit 10E

9007-83869

I/O Connector for M-601/603GC (D-Sub15P)

22571
22572
22573

Measurements

Note) * marked indicates CE (RoHS) compliant. Contact us for other products.

Canon ANELVA Corporation Vacuum Components Catalog

117

Vacuum Gauge Series■ Summary

Measurements

The vacuum gauge series includes analog and digital, manual and automatic vacuum gauges from
low to ultra-high vacuum to meet the demands for avariety of applications.

■ Selection guideControl unit

Measurement gauge
Pa

118

Crystal Gauge
M-320XG

Built-in main unit measurement gauge

Wide range ionization vacuum gauge
M-431HG

Miniature B-A Gauge
MG-2 Series

Wide range ionization vacuum gauge
M-833HG

Miniature B-A Gauge
MG-2 Series(Thermocouple Gauge TG-550C option)

Wide range ionization vacuum gauge
M-723HG

B-A Gauge UGD-1S(Thermocouple Gauge TG-550C option)

Wide range ionization vacuum gauge
M-823HG

Wide Range B-A Gauge BRG-1B(Thermocouple Gauge TG-550C option)

Wide range ionization vacuum gauge
M-923HG

Nude Ion Gauge NIG-2F/NIG-2TF(Thermocouple Gauge TG-550C option)

Thermocouple Vacuum Gauge
M-012DM

Thermocouple Gauge
TG-550C

Canon ANELVA Corporation Vacuum Components Catalog

10−8Measurements

Recommended measurement pressure range *
10

−6

10−4

10−2

1

102

104

* This table lists the recommended measurement pressure range, which is different from the measureable
pressure range.

Canon ANELVA Corporation Vacuum Components Catalog

119Higher precision, better reproducibility, next generation roughing vacuum gauge replacing the Pirani gauge

Crystal Gauge
M-320XG■ Summary
Crystal gauges are capable of performing a wide rangeof highly reliable measurements from atmosphericpressure to 10-2Pa.
Instead of the unstable thermal phenomenon usedby conventional roughing gauges such as Pirani
and thermocouple gauges, crystal gauges utilize thephenomenon where the crystal oscillator’s resonant
impedance changes according to pressure; thereby
ensuring excellent repeatability and stable measurement near atmospheric pressure.
In addition to roughing gauges, a crystal gauge canbe used as a pressure switch to detect chamber atsurement.

■ Features
1. Wide measurement range■ Dimensions diagram

Enables measurement with excellent repeatability
4 5 6

SP2

EXP

67

8 9A

MANT
4 5 6

SP1
POWER
/ALM

REMOTE I/O

Crystal gauges are vacuum gauges without a heatsource (filament).
Enables safe handling without affecting the processgas.
3. Compact and ultra-light weight
72.5

102

SensorA

Low power consumption that is friendly to the environment.

CRYSTAL GAUGE M-320XG

Weighing only 200g, the controller can fit in thepalm of your hand.
4. 2W low power consumption

44.5

8 9A

7 8

7 8

MANT

BCD

67

7 8

9 0 1

D/A

BCD

EXP

0 12

ATM

2. High stability■ Applications• Roughing pump pressure measurement of various
vacuum equipment• Various process pressure measurement• Pressure switch for detection of chamber vent, etc.
• Other pressure measurements from atmosphericpressure to 10-2Pa
If you are considering process gas (especially corrosive gases) pressure measurement, please contact oursales office. The sensor life may be reduced dependingon the type of gas and usage environment.

120

EF

4 5 6

9 0 1

ZERO

0 12

2 3

EF

2 3

2 3

9 0 1

34 5

from atmospheric pressure to 10-2Pa.

34 5

Measurementsmospheric pressure vent or for process pressure mea-

Canon ANELVA Corporation Vacuum Components Catalog

A dimension
NW16, NW25
φ34 ICFφ70 ICF, VG70

: 23
: 36
: 30

■ Specifications

Analog output (pressure signal)

Remote I/O

Set point
Operating environment
Zero adjustment
Full scale adjustment
I/O connector
Display
Power requirements
Dimensions (mm)WeightSensor attaching flange

M-320XG
XG-1 Crystal Gauge Head (exclusive for crystal gauge)
10 -2 to atmospheric pressure
N2, Ar, H2, Air
0 to 10V DC: Use the digit switch to set the output format of the following items:(1) Log output(2) Multiple output(3) Linear output Full scale pressure range selectable (1x101, 1x102, 1x103, 1x10 4, 1x105 Pa)
INPUT: (1) Gas type setting Switch with 2 bit signal(2) Zero adjustment(3) ATM setting
OUTPUT: 2 set point outputs
2 points (photocoupler output, fixed hysteresis)
Set using the digit switch (SP1, SP2 mantissa, exponent)
5°C to 50°C (including controller)
Gauge head only withstand temperature 150°C MAX
PUSH switch or software adjustment by remote I/O
Adjustment by trimmer
Dsub 15P
LED x3 (PWR/ALM (Green/Red), SP1-Status (Green), SP2-Status (Green))
22V to 33V DC, (maximum power consumption 2W)
72.5Hx102Wx44.5D (excluding gauge head)
200g (excluding gauge head)
NW16, NW25, φ34ICF, φ70ICF, etc.

Measurements

Type
Measurement gauge
Measurement pressure range
Gas type selections■ Ordering information
Parts Number
0160-01331

Model
M-320XG/N16

Description

Remarks

A-NET Crystal Gauge

Controller + Crystal gauge head (with NW16)

Code
21561

0160-01349

M-320XG/N25

A-NET Crystal Gauge

Controller + Crystal gauge head (with NW25)

21562

0160-01365

M-320XG/C34

A-NET Crystal Gauge

Controller + Crystal gauge head (with PY34ICF)

21580

0160-01373

M-320XG/C70

A-NET Crystal Gauge

Controller + Crystal gauge head (with PY70ICF)

21581

0160-01357

M-320XG/VG70

A-NET Crystal Gauge

Controller + Crystal gauge head (with PY70VG)

21582

H21-03280

XG-1/NW16

Crystal Gauge Head with NW16

21575

H21-03281

XG-1/NW25

Crystal Gauge Head with NW25

21576

0161-17920

XG-1/ICF34

Crystal Gauge Head with PY34ICF

21577

0161-17938

XG-1/ICF70

Crystal Gauge Head with PY70ICF

21578

0161-44888

XG-1/VG70

Crystal Gauge Head with PY70VG

21579

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

121

A-NET Display Unit
M-390•M-391■ Summary
The M-390 and M-391 are dedicated display units for the
A-NET series (M-310HG, M-320XG,
M-330MX, IKR-251/261, and PKR-251/261).
They are single channel support models. (One display unit
per gauge is required.)■ Specifications

External output
External input
A-NET gauge supply
powerPower requirements
Dimensions (mm)WeightCommunication function
AC input cable
Between each gauge
and display
Connection cable

24V DCNone

85 to 132V AC
70W MAX
99Hx51.5Wx253D

21.6 to 26.4V AC
160mA MAX
48Hx48Wx100D

1300g

340g

None

None

2m

None

Option, standard
5m

None

M-390

51.5

77

Set point■ Dimensions diagram

253

M-391
48

44.8

Display digits

9.2

44.8
61.6

Measurements

Front panel size

48

Supported gauge

M-390
M-391
M-330MX (crystal ion gauge)*1
M-310HG (ion gauge)*1
M-320XG (crystal gauge)
IKR-251/261 (cold cathode gauge)*1
PKR-251/261 (full range gauge)*1
1/8JIS rack size
DIN size
2 mantissa digits +2 mantissa digits +1 exponent digit
1 exponent digit
2 points
4 points
Contact capacity
Contact capacity
24V DC
250V AC
0.5A
1A
Analog output(Through OUT)
None
Status output
2 points (1 spare)
None

99

Type

8.2

* 1 Discontinued

122

Canon ANELVA Corporation Vacuum Components Catalog

(1)

100

■ Ordering information
Model

Description

Remarks
A-NET series dedicated display unit,
no cable
A-NET series dedicated display unit,
no cableCode

P23-04307

M-390

A-NET Display Unit

H21-03614

M-391

A-NET Display Unit

0161-37475

390-03BA

A-NET Cable for Display Unit (for Ion Gauge 3m)

For ion gauge 3m

21567

0161-37483

390-05BA A-NET Cable for Display Unit (for Ion Gauge 5m)

For ion gauge 5m

21564

0161-37491

390-10BA

A-NET Cable for Display Unit (for Ion Gauge 10m)

For ion gauge 10m

21568

0161-37506

390-15BA

A-NET Cable for Display Unit (for Ion Gauge 15m)

For ion gauge 15m

21569

0161-37514

390-20BA

A-NET Cable for Display Unit (for Ion Gage 20m)

For ion gauge 20m

21570

0161-37409

390-03CR A-NET Cable for Display Unit (for Crystal Gauge 3m)

0161-37417

390-05CR A-NET Cable for Display Unit (for Crystal Gauge 5m)

0161-37425

390-10CR

A-NET Cable for Display Unit (for Crystal Gauge 10m)

0161-37433

390-15CR

A-NET Cable for Display Unit (for Crystal Gauge 15m)

0161-37441

390-20CR A-NET Cable for Display Unit (for Crystal Gauge 20m)

0161-37344
0161-37360
0161-37378
0161-37386

A-NET Cable for Display Unit (CC, for Full Range
Gauge 5m)
A-NET Cable for Display Unit (CC, for Full Range
390-010CC
Gauge 10m)
A-NET Cable for Display Unit (CC, for Full Range
390-015CC
Gauge 15m)
A-NET Cable for Display Unit (CC, for Full Range
390-020CC
Gauge 20m)
390-05CC

For crystal ion gauge, crystal gauge
3m
For crystal ion gauge, crystal gauge
5m
For crystal ion gauge, crystal gauge
10m
For crystal ion gauge, crystal gauge
15m
For crystal ion gauge, crystal gauge
20m

21563
21583*

21571
21565
21572
21573
21574

CC, for full-range gauge 5m

21566

CC, for full-range gauge 10m

21587

CC, for full-range gauge 15m

21588

CC, for full-range gauge 20m

21589

Measurements

Parts Number

Note) * marked indicates CE (RoHS) compliant. Contact us for other products.

Canon ANELVA Corporation Vacuum Components Catalog

123

Complies with European and US safety standards.

Wide Range Ionization Vacuum Gauge
M-431HG

CE■ Summary
The miniature gauge exclusive M-431HG vacuum
gauge control power inherits the basic performance,
space-saving, and lightweight features of the conventional model (M-430HG). In addition, the gauge now
supports the safety standards in Europe and the United States.

■ Features
1. CE marking compliant

M-431 HG

2. External I/O and RS-232C communication functions equipped as standard
3. Wide input voltage (M-431 HG)

Measurements

4. Low power consumption/24V DC input■ Applications• Automated vacuum equipment pressure measurement• Sputtering process pressure measurement andcontrol• Multi-chamber system pressure measurement• General vacuum equipment pressure measurement■ Specifications
Type

M-431HG

Pressure display range

0.01x10 -7 to 13.2x10 0Pa

Pressure display

Digital, measurement range auto switch

Set pointStandard equipped with 2 points (with hysteresis)

D/A output

Switch between LOG or combined output (0 to 10V)

Analog output

0 to 10V (APC compatible output)
INPUT:

External control function(Remote operation)
Communication function

OUTPUT:

Filament ON/OFF, parameter LOCK, filament switching,degas ON/OFF, range holdSet points 1, 2, Filament ON/OFF status degas status,
filament 1/2 status
RS232C standard equipped(9600, 4800, 2400, 1200 bps)

Dimensions (mm),Weight104Wx99Hx296D 1.2kg

Power consumption

50VA 90 to 240V AC 50/60Hz

Emission current

10μA, 100μA, 1mA (auto switched, or fixed)

Degas

Grid electrical heating method, 3 min timer

Filament switching

Key and remote I/O control

Filament protection

Filament OFF at 13.3x10 0Pa

Standard configuration
RoHS, CE marking

Vacuum gauge main unit (measurement gauge and cables not included)
compliant* The cable included with the M-431HG is for use at 100V. Please contact us when using at 200V.

124

Canon ANELVA Corporation Vacuum Components Catalog

RoHS■ Dimensions diagram■ Accessories
CablesMeasurements• Dedicated gauge cable (60°C heat-resistant temperature)
Standard length 5m, 10m, 15m, 20m• Bakable cable also available (250°C heat-resistant temperature).
Standard length 5m, 10m, 15m, 20m
Measurement gauge
Refer to the miniature gauge in the measurement gauge section.

■ Ordering information
Parts Number

Model

Description

Remarks

Code

H21-03430

430-901

Cable for Miniature B-A Gauge (5m)

For MG-2/2F

21672

H21-03432

430-902

Cable for Miniature B-A Gauge (10m)

For MG-2/2F

21673

H21-03433

430-903

Cable for Miniature B-A Gauge (15m)

For MG-2/2F

21674

0161-24189

430-904

Cable for Miniature B-A Gauge (20m)

For MG-2/2F

21675

0161-44820

430-911

Bakable Cable for MG-2 (5m)

Maximum operating temperature range 250°C

21676

0161-44838

430-912Balable Cable for MG-2 (10m)

Maximum operating temperature range 250°C

21677

0161-36966

430-913

Balable Cable for MG-2 (15m)

Maximum operating temperature range 250°C

21678

0161-36974

430-914

Bakable Cable for MG-2 (20m)

Maximum operating temperature range 250°C

21679

0161-55554

M-431HG

Wide Range Ion Gauge

For MG-2

21685*Note) * marked indicates CE (RoHS) compliant. Contact us for other products.

Canon ANELVA Corporation Vacuum Components Catalog

125

The ultimate ionization gauge (RoHS, CE compliant)Wide Range Ionization Vacuum Gauge
M-833HG

CE■ SummaryRoHS

The M-833HG is a control unit made exclusively forminiature B-A gauges. Optional expansion boards
supporting versatile gauge and data output are available. The combination of a miniature B-A gauge andTC gauge (option) and the use of an auto filament
for auto gauge switching enables highly accurate
vacuum measurement from atmospheric pressure toultra-high vacuum. The M-833HG is ideally suited for
installation on high to ultra-high vacuum equipment.

■ Features
1. Easy-to-read liquid crystal display. Pressure values and messages are displayed on the LCD.

Measurements

2. Automatically switched pressure range.

■ Applications• Automated vacuum equipment pressure measure-

3. Variety of external control functions enabling fully

ment

remote operation.

• Sputtering process pressure measurement and4. 	Two set points equipped as standard.

control

5. Highly expandable supporting up to four option• Multi-chamber system pressure measurement

boards. (Note: GP-IB option not supported.)• General vacuum equipment pressure measure-

6. Compliant with RoHS and CE marking.

ment■ Specifications
TypeM-833HG

Measurement gauge

Miniature gauge MG-2 Series

Pressure display range

0.1x10 -7 to 9.9x10 0 Pa

Pressure display

Measurement range auto switch

Set point

Two set points equipped as standard (open collector)

D/A output

0 to 10V: Mantissa output
0 to 11V: Combined output or LOG output

Analog output(Electron meter output)

When set to APC mode (0.1 to 2.5V)
When set to normal mode (0.1 to 1.6V)

External control function(Remote operation)

INPUT:

Filament ON/OFF
Six types of external control functions such as degas ON/OFF etc.
OUTPUT: Six types of status signal output

Special function

APC compatible: Range hold function
Electron meter output function

Dimensions and Weight

H99xW209xD330, 1.9kg

Power requirements

100 to 240V AC
100VA or less, 50/60Hz

Emission current

10μA, 100μA, 1mA auto switched or fixed

Degas

Grid electrical heating method

Filament switching

Key and remote I/O control

Filament protection

Over range setting or emission current ±50% variation

Standard configuration

Vacuum gauge main unit (measurement gauge and cables not included)

RoHS, CE marking

compliant

126

Canon ANELVA Corporation Vacuum Components Catalog

■ Dimensions diagram■ Accessories
Cables• Dedicated gauge cable (60°C heat-resistant temperature)
Standard length 5m, 10m, 15m, 20m• Bakable cable also available (250°C heat-resistant temperature).

■ Expansion function options* Refer to the section on the M-723HG, M-823HG, and M-932HG accessories for the option board combinations
TC gauge board

Combination of thermocouple gauge and B-A gauge enables measurement from roughing pressure toultra-high vacuum.
Two TG-550Cs can be measured with one board. However, the standard configuration is one TG550C1 and one cable.

BCD output board

Enables BCD output of pressure values.

CM gauge board

Enables measurement of atmospheric pressure to ultra-high vacuum in combination with a capacitancemanometer.

Set point output

Expansion and relay output of pressure set points are possible.

RS232C board

For external control (600, 1200, 2400, 4800, 9600, 19200 bps)

Gauge selector box

Capable of connecting and selecting between two miniature B-A gauges.

■ Ordering information
Parts Number

Model

Description

Remarks
Miniature gauge dedicated power supply,
cable/no measurement gauge
TG-550C for M-723HG, 823HG, 833HG, 923HG with 5m
cable

Code

0161-63816

M-833HG Wide Range Ion Gauge

0161-68604

722-TCTC Gauge Board

0161-70465

722-BCD

BCD Output Board

With connector for M-723HG, 823HG, 833HG, 923HG

21483

0161-70423

722-CM

CM.XTL Gauge Board

With connector for M-723HG, 823HG, 833HG, 923HG

21481

P23-04131

722-SPB

Set Points Board

With connector for M-723HG, 823HG, 833HG, 923HG

21480

P23-04132

722-232C RS-232C Board

With connector for M-723HG, 823HG, 833HG, 923HG

21485

0161-70499

831-331

Gauge Selector Box for M-833HG

No cable, for MG-2

21776
21775

21734*
21487

P23-01064

831-323

Gauge Selector Box for MG-2

For M-833HG, including cable (5m between main unit,
2m between gauge)

H21-03430

430-901

Cable for Miniature B-A Gauge (5m)

For MG-2/2F

21672

H21-03432

430-902

Cable for Miniature B-A Gauge (10m) For MG-2/2F

21673

H21-03433

430-903

Cable for Miniature B-A Gauge (15m) For MG-2/2F

21674

0161-24189

430-904

Cable for Miniature B-A Gauge (20m) For MG-2/2F

21675

0161-44820

430-911

Bakable Cable for MG-2 (5m)

Maximum operating temperature range 250°C

21676

0161-44838

430-912Balable Cable for MG-2 (10m)

Maximum operating temperature range 250°C

21677

0161-36966

430-913

Balable Cable for MG-2 (15m)

Maximum operating temperature range 250°C

21678

0161-36974

430-914

Bakable Cable for MG-2 (20m)

Maximum operating temperature range 250°C

21679

Note) * marked indicates CE (RoHS) compliant. Contact us for other products.

Canon ANELVA Corporation Vacuum Components Catalog

127

Measurements

Standard length 5m, 10m, 15m, 20m

Renewed through further aging

Ionization Vacuum Gauge

Measurements

M-723HG, M-823HG, M-923HG

6. Convenient range hold function for APC (auto■ SummaryThis series includes the most common B-A ionization
vacuum gauges, with abundant expansion board selection supporting a variety of gauges.
A remote control function necessary for process control of vacuum equipment and a range hold function
effective for APC (auto pressure control) are equipped
as standard.
Combining a wide range B-A gauge and a thermocouple gauge and the use of an auto filament for auto
gauge switching, the M-823HG enables highly accurate vacuum measurement from atmospheric pressure
to ultra-high vacuum.

set pressure range. In addition, a high response
analog output (electrometer output) separate fromthe D/A output is provided as a signal for APC.
7. 	The M-823HG is equipped with an auto filament
function that automatically switches from roughing gauges such as TC and CM to a B-A gauge.
8. 	The relative sensitivity can be set by gas type.
9. In addition to 100V AC, power supply voltages of
115V AC, 200V AC, and 230V AC are also available
by special order.
tions.

1. Automatically switched pressure range.
2. 	Pressure values and messages are displayed on the
LCD.
3. Variety of external control functions enabling fully
remote operation.
4. 	Two set points equipped as standard.
5. D/A output equipped as standard (four outputs:
mantissa, exponent, composite, and LOG) for re-

128

This feature enables fixing/releasing to/from the

10. Functions can be enhanced using a variety of op-■ Featurescorder output.

pressure control) equipped as standard.

■ Applications• Automated vacuum equipment pressure measurement• Sputtering process pressure measurement andcontrol• Multi-chamber system pressure measurement• General vacuum equipment pressure measurement

Canon ANELVA Corporation Vacuum Components Catalog

■ Specifications
Type

M-723HG

M-823HG

UGD-1S B-A gauge

BRG-1B wide range B-A gauge

5 range auto switch

7 range auto switch

8 range auto switch

10 -2, 10 -3, 10 -4, 10 -5,10 -6Pa

10 -0, 10 -1, 10 -2, 10 -3,
10 -4, 10 -5,10 -6 Pa

10 -2, 10 -3, 10 -4, 10 -5,10 -6,
10 -7, 10 -8, 10 -9 Pa

Measurement
gauge
Pressure measurement range
Measurement
range switching

M-923HG
NIG-2F/NIG-2TF
Nude Ion Gauge

Auto switching (range hold possible)

Degas

Grid electrical heating method

Filament switching

Electron bombardment method

Can be switched from the front panel or by external control input (M822HG excluded).
Turns off automatically if there is a problem in the fluctuation range of pressure,ion current, or emission current.
D/A output (mantissa D/A output, exponent D/A output, combined D/A output)
analog raw output (electrometer output)

Filament protection
Analog output
INPUT:

Filament ON/OFF input, degas ON/OFF input, filament inhibit input, range hold 1 input,
range hold 2 input, filament switch input, gauge 1/2 switch input (when using the gauge select option)

I/O remote

OUTPUT: Filament ON/OFF output, degas ON/OFF output, remote/local output, set point output (2 points),
gauge 1/2 select output (when using the gauge selector option), power ON/OFF output,
filament 1/2 output, alarm output
Two set points set as standard (open collector)

Dimensions (mm)H99 x W209 x D330

Power requirements

100V AC±10%2A, 50/60Hz (also supports 115/200/230V AC)

WeightStandard configuration

Measurements

Set point

5.4kg
Vacuum gauge main unit (measurement gauge and cables not included)■ Dimensions diagram

Canon ANELVA Corporation Vacuum Components Catalog

129

■ Accessories
Option board combinations
Functions can be enhanced using an option board.
Set pointboard

CM gaugeboard

TC gaugeboard

BCD output
board

GP-IB
board

RS-232C
board

Gauge selectorbox

Set pointboard
CM gaugeboard
TC gaugeboard
BCD output
board
GP-IB board
RS-232C board
Gauge selectorbox

Measurements(: Combination allowed: Combination not allowed

M-723HG, 823HG, 833HG, 923HG main unit

<Option board>

Gauge selector box<optional>

See Table 1 forthe combination

Set point output
CM gauge board
TC gauge board

Expansion and relay output of pressure set points are possible. 4 points 100V AC 1A, 30V DC 1A
Enables measurement of atmospheric pressure to ultra-high vacuum in combination with a capacitancemanometer.
Enables measurement from roughing pressure to ultra-high vacuum by combining a thermocouple gauge
with a B-A gauge. Two units can be measured with one board. However, the standard configuration is one
TG550C1 and one cable.

BCD output board

Enables BCD output of pressure values.

GB-IB board

For external control

RS-232C board

For external control (600, 1200, 2400, 4800, 9600, 19200 bps)

Gauge selector box

Capable of connecting and selecting between two B-A gauges.

CablesMeasurement gauge

Standard length 5m, 10m, 15m, 20m and bakable ca-

Refer to the section on measurement gauge for de-bles are available. Refer to the ordering information.

tails. (Refer to the control unit specifications for theavailable gauge.)

130

Canon ANELVA Corporation Vacuum Components Catalog

■ Ordering information
Parts Number

Model

0161-80355

M-723HG

Ion Gauge

JIS rack type

Remarks

21704

0161-80486

M-823HG

Wide Range Ion Gauge

JIS rack type21728

0161-71445

M-923HGUHV Vacuum Gauge

JIS rack type

21747

For M-923HG, including cable (5m between
main unit, 2m between gauge)
For M-723HG/M-823HG, including cable (5mbetween main unit, 2m between gauge)
TG-550C for M-723HG/823HG/833HG/923HG, with cable 5m
For M-723HG/823HG/833HG/923HG withconnector
For M-723HG/823HG/833HG/923HG withconnector
For M-723HG/823HG/833HG/923HG withconnector
For M-723HG/823HG/833HG/923HG withconnector

CodeP13-06804

921-303

Gauge Selector Box (for M-922HG)

P13-08435

721-303

Gauge Selector Box (for M-722HG/
M-822HG)

0161-68604

722-TCTC Gauge Board

0161-70423

722-CM

CM.XTL Gauge Board

0161-70465

722-BCD

BCD Output Board

P23-04131

722-SPB

Set Points Board

P23-04132

722-232C

RS-232C Board

P13-14960

820-901

Cable for B-A Gauge (5m)

M-723HG/823HG, standard 5m

21645

P13-14965

820-902

Cable for B-A Gauge (10m)M-723HG/823HG, standard 10m

21646

P13-14966

820-903

Cable for B-A Gauge (15m)

M-723HG/823HG, standard 15m

21647

P13-14967

820-904

Cable for B-A Gauge (20m)

M-723HG/823HG, standard 20m

21648

P13-14123

921-901

Cable for Nude Ion Gauge (5m)

For M-923HG, 5m

21750

P13-14128

921-902

Cable for Nude Ion Gauge (10m)

For M-923HG, 10m

21751

P13-14129

921-903

Cable for Nude Ion Gauge (15m)

For M-923HG, 15m

21752

P13-14130

921-904

Cable for Nude Ion Gauge (20m)

For M-923HG, 20m

21753

0161-36411

921-911

Bakable Cable for Nude Ion Gauge (5m)

For M-923HG, 5m

21754

P13-22893

921-912Extension Cable for Nude Ion Gauge (5m)

For 921-911 extension, 5m

21755

0161-36932

921-913

Extension Cable for Nude Ion Gauge (10m)

For 921-911 extension, 10m

21756

0161-36940

921-914

Extension Cable for Nude Ion Gauge (15m)

For 921-911 extension, 15m

21757

P13-15424

921-801

Rack Mount Panel

For M-723HG/823HG/833HG/923HG

21765

21745
21764
21487
21481
21483
21480
21485

Measurements

DescriptionNote) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

131

CC-Link equipped ionization vacuum gauge

Ionization Vacuum Gauge
M-723HG-CC, M-823HG-CC, M-833HG-CC, M-923HG-CC■ Summary
The popular ionization vacuum gauges M-723-HG,
M-823HG, M-833HG, and M-923HG support CC-Link

Measurements

communication control.
CC-Link is a field network recommended by the CCLink Association for efficient wired FA control. CCLink enables multiple connections with a single unit.
CC-Link connection schematic
PLC

CC-Linkunit

MFC

I / O unit

■ Accessories
Combination with other option boards
Only one option board can be added.
TC gaugeboard

CM gauge board
box

Gauge selector
board: Communication with CC-Link allowed

Set pointboard: Combination allowed

BCD output
board

RS-232C
board: Combination not allowed■ Ordering information
Parts Number

Model

Description

Remarks

Code9009-13579

M-723HG-CC

Ion Gauge (CC-Link)

For UGD-1S

0162-08381

M-823HG-CC

Wide Range Ion Gauge (CC-Link)

For BRG-1B

21729

0161-68777

M-833HG-CC

Wide Range Ion Gauge (CC-Link)

For MG-2 series

21735*

0161-82129

M-923HG-CC

UHV Vacuum Gauge (CC-Link)

For NIG-2F series

21748

Note) * marked indicates CE (RoHS) compliant. Contact us for other products.

132

Canon ANELVA Corporation Vacuum Components Catalog

21708

Standard for roughing region

Thermocouple Vacuum Gauge
M-012DM■ Summary
The M-012DM vacuum gauge uses two types of crossed
precious metal wires, using one pair as a thermocouple
and the other pair as a heater. The gauge measures
the temperature at the center contact point, whichchanges as the pressure of the gas changes. This small
panel meter has a large, easy-to-read LED. It also hasa control unit installed at the rear. In addition, its two
set points can be easily set using the switches on thefront panel.

■ Specifications

1. LED bar graph display

Type

M-012DM

Measurement
gauge
Pressure measurement range

Easy-to-read LED bar graph display. Set points canbe easily set using the switches on the front panel.
2. Constant measurement
Capable of measuring pressure from 200Pa to 5 ×
10-1Pa, stable measurement across a wide range ofpower supply voltages and changes in ambient temperature is assured.
3. Atmospheric pressure operation

Bar graph(LED, pseudo analog display format)

Operable pressure

Operable from atmospheric pressure

Set point■ Applications• Roughing pump system pressure measurement• Roughing pump system automatic control

DC0 to 10mV (non-linear with respect topressure)
2 points (each point NO, NC)
30V DC 2A, 250V AC 2A

Power requirements

90 to 200V AC 50/60Hz 5W

Weight0.25kgStandard configuration

M-012DM (main unit) : x1
Input cable (1.8m): x1
TG-550C: x1
Gauge cable (5m)
: x1

■ Accessories■ Dimensions diagram

Cable:
80

5x10 -1 to 200Pa

Pressure display

Analog output

Precious metal resistance wires are used to enable
operation under atmospheric pressure.

TG-550C Thermocouple Gauge

Measurements■ Features

12.2

81

19
2

Terminal cover5m cable equipped as standard.
10m and 15m cables are available
as options. Refer to the ordering

φ65

80

information.
Pa

Measurement gauge:
Refer to the section on measurement gauge TG-550C for details.

M-012DM

16

Vents■ Ordering information
Parts Number

Model

Description

Remarks

Code0161-68573

M-012DM

Thermo-Couple Gauge (w TG-550B)

TG-550C, with 5m cable21539

H21-03124

M-012DM

Thermo-Couple Gauge

TG-550C, no cable

21537

B26-01832

012DM-05

Cable for M-012DM (5m)B26-01834

012DM-10

Cable for M-012DM (10m)21527

B26-01835

012DM-15

Cable for M-012DM (15m)

21528

21526

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

133

Measurement gauge
Miniature Gauge

MG-2/MG-2M/MG-2F MG-2/WF

The miniature B-A gauge MG-2/MG-2M/MG-2F(patent pending) is a small metal gauge designed toreplace the large, breakable glass gauge of previous
gauges. The small size enables the mounting location
to be easily selected. Moreover, the reduced size (approx. 1/20 that of previous products) does not sacrifice
any sensitivity or measurement range. Pressure from
ultimate pressure to process pressure (measureable to
1Pa range), such as for sputtering, can be measured
with a single gauge. The MG-2 and MG-2M are con-nected to a gauge adapter (O-ring insertion type). The
MG-2 is for φ15mm
and the MG-2M is for
φ18mm. With its emphasis on measuring
ultimate pressure, theMG-2F is mounted directly to the φ70ICF.

■ Flange examples■ Dimensions diagram

φ70ICF

65.5

φ18

φ70
φ34ICF

70.2

MG-2M
MG-2F

30

φ70

38.5

MG-2

MG-2M

MG-2F

φ26

φ26

φ26

MG-2

MG-2M

φ70ICF

φ40

NW16

67

φ30

69.5

63.5

24

Measurements

φ15

MG-2I/φ34ICF, φ70ICF

MG-2F

67

MG-2 • MG-2/WF

φ34

NW25

■ Specifications
Type
Body material
Maximum pressure
measurement(Note 1)
Minimum pressure
measurement(Note 2)
Sensitivity

1.3x10 -1(Note 3)Pa

13Pa
Approx. 10 -6Pa

Approx. 10 -7Pa

Approx. 1.0x10 -5(Note 4)Pa

0.045Pa-1
Two filaments built-in
Filament material: Yttria coated iridium wire

Measurementgauge capacity
Power
Filament
requireGrid degas
ments
Degassing method

Two filaments built-in
Filament material: Tungsten

Approx. 12cc
2.3W
1.0W

2.5W
1.0W

Grid electrical heating
Can be welded to φ15
gauge adapter or various
flanges

φ18 gauge
adapter

NW25, NW16

φ34ICF, φ70ICF

φ70ICF
Connected
to flange

Note 1) Linearity limit
Note 2) Lowest practical pressure that can be measured. Use of MG-2F is recommended for measurement of 10 -7Pa.
Note 3) Inert gases such as nitrogen and argon can be measured up to 13Pa.
Note 4) The lowest measureable value of MG-2W/F is one order of magnitude higher than the standard MG-2.

134

MG-2/WF

SUS304Filament

Attachment method

MG-2I/NW16, 25

Canon ANELVA Corporation Vacuum Components Catalog

Can be welded to φ15
gauge adapter or various flanges

■ Ordering information
Parts Number

Model

Description

Remarks

Code0160-01234

MG-2

Miniature B-A Gauge Head

Mount area φ15 type21160

0160-01268

MG-2F

Miniature B-A Gauge HeadWith φ70ICF

21161

0160-01284

MG-2M

Miniature B-A Gauge Head

Mount area φ18 type

21162

H21-03193

MG-2I/NW16

Ion Gauge (w NW16)

With NW16

21163

H21-03194

MG-2I/NW25

Ion Gauge (w NW25)

With NW25

21164

H21-03195

MG-2I/ICF34

Ion Gauge (w ¢34 Mini Flange)

With φ34ICF

21165

P25-04306

MG-2/ICF70

Miniature B-A Gauge Head with φ70ICF

With φ70ICF

21166

B23-01688

MG-2WF

Miniature B-A Gauge Head

Tungsten filament type, mount φ15 type

21170

Note) Contact us for more information about CE (RoHS).

B-A Gauge

UGD-1SThis is a sealed glass tube type B-A ionization vacuum
gauge measurement for measuring pressure in the

Ion collector

Grid

120

10-2Pa and under range.
φ60

The UGD-1S is a Kovar glass sealed B-A gauge. The
φ15

100

by electrical heating. Therefore, pressure can be measured even during degassing. A connector type (sockettype) cable connection is used to provide a simple,

Filament

Measurements

grid is made of tungsten and degassing is performed

UGD-1S Dimensions Diagramfirm and safe connection.

Wide Range B-A Gauge BRG-1B
This is an improved B-A gauge with a wider measurement range at high pressure. Degassing is performedby grid electrical heating similar to the UGD-1S. A

Auxiliary electrode19

Filament
129

21.6

thoria coated iridium filter is used to enable highpressure measurement. A connector type (socket type)cable connection is used to enable easy and secure6064attachment and removal.
The connection with the vacuum equipment uses a

Grid

Ion collector
φ 15

φ15 adapter or is glass sealed to a glass adapter with
φ70 ICF attached.
* Patent No. 1623097

Canon ANELVA Corporation Vacuum Components Catalog

135

■ Specifications
Type
Gauge TypeUGD-1S

BRG-1B

B-A Gauge

Wide Range B-A Gauge

Shape

Glass tube

Connection with measured vacuum
chamber

φ15 gauge port (O ring)-6

10 -6 to 10Pa

10 to 0.1Pa

Recommended measurement range

0.075Pa-1with respect to N2

Standard sensitivity

Approx. 1.3 x 10 -8Pa

X ray limit
Baking temperature
Material

400°C (150°C or less with O-ring seal)

Filament
Body

Tungsten (x2)Thoria coated iridium (x1)

Kovar glass (vacuum sealed)

Tungsten glass (open)

M-723HG

M-823HG

General vacuum use

B-A gauge, sputter etc. measurable up tohigh pressure (10Pa)
B-A gauge, sputter, etc.

Supported vacuum gauge power
supplyApplications■ Options
We can customize the connection direction and length according to your specifications.

■ Ordering information
Parts Number

Model

Remarks

Code

Wide Range B-A Gauge Head

Mount area φ15 type21225

952-7860

BRG-1 Vertical Type Wide Range B-A Gauge HeadWith φ70ICF glass adapter

21133

P21-02260

952-7861

BRG-1 Horizontal Type Wide Range B-A Gauge
Head

With φ70ICF glass adapter

21132

783-5285

UGD-1S

B-A Gauge Head

Socket type

21121

P25-05688

BRG-1B

P25-02463

Description

VMT-9304

952-7850

UGD-1S Vertical Type B-A Gauge HeadWith φ70ICF glass adapter

21130

VMT-9305

952-7851

UGD-1S Horizontal Type B-A Gauge HeadWith φ70ICF glass adapter

21131

Note) Contact us for more information about CE (RoHS).

Nude Ion Gauge

NIG-2F/NIG-2TF

This gauge directly mounts a B-A type electrode ona flange. This is directly attached to the equipment
making it ideally suited for ultra-high vacuum measurement without any errors due to feedthrough. Plat-

2-18UNS

inum-clad molybdenum wires are used for the grid tominimize errors due to gas contamination.
A connector type (Canon plug type) cable connection( φ 70)Measurements

Glass gauge (UGD-1S, BRG-1B, LG-11S) with a glass adapter with φ70ICF attached (welded) are also available.

is used to provide a simple, firm and safe connection.
The NIG-2F uses a tungsten filament. In addition, theNIG-2TF uses a yttria coated filament, which lowers
the operating temperature, suppresses degassing, andimproves ultra-high vacuum measurement.

136

Canon ANELVA Corporation Vacuum Components Catalog

69±2
40

75±2

NIG-2F/2TF Dimensions Diagram

■ Specifications
NIG-2F
954-7902

Type

NIG-2TF
954-7903

Gauge Type

Nude Type B-A

ShapeConnection withmeasured vacuum
chamber
Recommended measurement range
Standard sensitivity

Nude Type
φ70ICF10 -9 to 10 -2Pa
0.19Pa-1 with respect to N2
Approx. 2.7x10 -9Pa

X ray limit
Baking temperature

400°C

Filament
Supported vacuum
gauge power supply

Filament Material: Tungsten (x2)

Filament material: Yttria-coated iridium (x2)M-923HG
Up to 10 -9Pa

Applications

Ultra-high vacuum equipment (for bakable equipment)■ Ordering information
Parts Number

Description

954-7902

NIG-2F Nude Ion Gauge Head

A23-04054

NIG-2TF

Nude Ion Gauge (Yttria Coat Filament)

A26-07217
794-0609

954-7905

Remarks

Code

Cannon pluggable

21120

Yttria Coat Filament Kit

For NIG-2TF

21142

Filament Kit for Nude Ion Gauge

For NIG-2F

21140

Measurements

Model783-2411

21119

Note) Contact us for more information about CE (RoHS).

Thermocouple Gauge

TG-550C

14.2

52
29.5

SUS-304 is used for the material. This gauge can be

φ15

used from atmospheric pressure and is installed witha φ15 adapter. (The maximum heating temperature is
150°C with the connectors removed.)■ Specifications
Type

TG-550C

Gauge Type

Thermocouple Gauge

Shape
Connection with measured
vacuum chamber
Measurement range

φ15 gauge port (O ring)

Material

Stainless steel (SUS-304)

Body

Supported vacuum gauge
power supply
Applications

Metal vessel

10 -1 to 200Pa
M-012DM
M-723HG/823HG/833HG/923HG
For measurement during roughing pump

■ Ordering information
Parts Number

Model

Description

Remarks

Code0161-68109

TG-550C

Thermo-Couple Gauge Head

Mount area φ15 type21015

0161-68117

TG-550B

Thermo-Couple Gauge Head

Mount area φ15 type

21009

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

137

Sensitivity calibration of the measurement gauge
The accuracy of the measurement gauge varies for each gauge and also by time. The sensitivity is calibrated for astandard vacuum gauge. We can calibrate the measurement gauge upon request regardless of whether it is newor used.

Gauge adapter
• ICF

41.3

φ15 adapter
952-7806

48.3

φ30

φ70 ICF

Fixed flange• Quick-release coupling

φ30

Type

φA

B

NW16

954-7832

30

52

NW25

954-7833

40

52

NW40

954-7834

55

52

φ16

Male thread

B

SUS-304, gauge seal gasket: Fluorine rubber (Viton)A■ Ordering information

Measurements

Parts Number

Model

Description

Remarks

Code0190-05261

952-7806

φ15 Adaptor

With φ70ICF, φ15 gauge mounting port

32150

0190-10054

954-7832

NW16 Gauge Adaptor

With φ15 gauge mounting port

32650

0190-10062

954-7833

NW25 Gauge Adaptor

With φ15 gauge mounting port

32651

0190-10070

954-7834

NW40 Gauge Adaptor

With φ15 gauge mounting port

32652

Note) Contact us for more information about CE (RoHS).

138

Canon ANELVA Corporation Vacuum Components Catalog

Measurements

Memorandum

Canon ANELVA Corporation Vacuum Components Catalog

139

Helium Leak Detectors

Vacuum equipment
Model:

M-212LD

Compact!

Measurements

Highly mobile compact type.

Model:

M-222LDHigh power!

High power type withincreased power over
the Model 212's roughing
pump.

140

Canon ANELVA Corporation Vacuum Components Catalog

Automotive industry

Medical industry

Model:

Measurements

M-222LD-D

High power and dry!

Portable type equipped with adry pump.
For a clean environment!

Vacuum components

Model:

M-232LD

Sniffer

Sniffer dedicated type

Electronic devices

Canon ANELVA Corporation Vacuum Components Catalog

141

Portable

Portable series

Measurements

M-212LD/M-222LD(-D)/M-232LD■ Summary

M-212LD ........................................Compact!

The portable series products have been conceptuallydeveloped with emphasis on compactness, lightness,and portability.
The M-212LD is a lightweight, general-purpose modelthat has been specifically designed for use in the field.
The M-222LD is equipped with a large roughing
pump. It can perform leak tests of large vacuum containers by itself without the need of the equipment's
pump. A high sensitivity type M-222LD-H is alsoavailable. Furthermore, the M-222LD-D uses a dry
pump pumping system to keep the vacuum equipment(vacuum components) free of oil contamination.
The M-232LD is a dedicated machine focusing on thesniffer method. It is ideally suited for use in gas pipes
and pressurization components.
Select the best model for the intended applicationfrom the variety of models provided in this series.

• Suitable for inspection and field maintenance ofvarious vacuum equipment• Compact leak detector for various vacuum components

M-222LD ................................... High Power!
• Maintenance of various vacuum equipment• Leak test of various large-scale vacuum containers
such as accelerators• Leak system analyzer

M-222LD-D ............... High Power! and DRY!
• Supports clean room
• Enables oil-free leak tests• Maintenance of various vacuum equipment

M-232LD ............................................Sniffer!
• Leak test of gas supply systems, vacuum components, and piping components• Leak test of automotive parts and air conditioning
freezers• Leak test of food and pharmaceutical packages• Leak test of water and various gas pipes

142

Canon ANELVA Corporation Vacuum Components Catalog

■ Features
4. Durable robust design

1. Simple operation
From equipment startup to measurement with justa touch of a button. Anyone can easily perform leaktests. Simply set the conditions appropriate for thetest specimen. Sensitivity calibration is performed

The units are equipped with a variety of safety features. They respond immediately to operator errors
and abnormal environmental conditions.
A long life tungsten filament is used to enable longautomatically.

term high-sensitivity measurement. The robust de-

2. Industry leading sensitivity, stability, and re-operate 24/7.

sign enables the units to be installed in systems thatsponse5. Wide range of functions

In addition to using a 180° mag-

Just like the simple operation of the conventional sys-

netic deflection mass spectrometer

tem, measurements can be performed using the start/

tube, an MCP (Micro-Channel Plate

stop button. Even those customers requiring compli-

plier) is installed for amplifying he-Analyzer tube

lium ions. As a result, even the standard models canachieve a sensitivity as high as 10 Pa•m /s. This is-123

also coupled with high stability throughout the long-

cated configurations to satisfy their specific needs canbe easily supported. A 3.8 inch color LCD (320×240) is
used for the display unit. A color LCD has been adopted in order to increase legibility. The standard, status,

term service period.

and trend screens are shown below.

3.	Portabletemperature variations and compensating for tem-

As an example of other functions, reading the internal
perature drift of the preamplifier have improved the

The large casters and handle make the units ideal for

Portablemeasurement accuracy.

field maintenance use.

■ Hand controllerStandard screen

Status screen

Hand controller

Trend screen

Analog screen

Canon ANELVA Corporation Vacuum Components Catalog

143

Measurementswith a secondary-electron multi-

■ Technical data

Minimum detectable leakage data

Print-out example(Pa • m /sec)
3

1.0×10−11

5.0×10−12

4.0×10−12
3.0×10−12

2.0×10−12

1.0×10−12

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 (min)M-212/222LD

Response/cleanup data
(Pa • m3/sec)

Standard Leak
5×10-9Pa • m3/s

Standard Leak Valve**CLOSE**

Measurements

1.0×10-7

1.0×10-8

Calibration leak valve open
Calibration leak
(5×10-9Pa • m3/sec)

1.0×10-9
Standard Leak Valve**OPEN**

1.0×10-10

1.0×10-11
Calibration leak valve open
1.0×10-12

5

10

15

20

25

30

35

40

45

50

55

60

65

70 (sec)

M-212/222LD

Comparison of residual gas analysis (RGA) at inlet port between dry pump specifications
and RP specifications

10 20 30 40 50 60 70 80 90 100
M/eM-222LD

144

10
9
8
7
6
5
4
3
2
1
0
0

• Measured pressure : 5.8E-5 Pa• AQA-100 mass
Emission current : 5mA

1.0E-11 A/DIV• Measured pressure : 6.7E-5 Pa• AQA-100 mass
Emission current : 5mA

1.0E-12 A/DIV

10
9
8
7
6
5
4
3
2
1
0
0

10 20 30 40 50 60 70 80 90 100
M/eM-222LD-D

Canon ANELVA Corporation Vacuum Components Catalog

■ Specifications sheet
M-212LD (-H)*3

M-222LD (-H)*3

M-222LD-D (-H)*3

Compact

High power

High power & dry

Sniffer

10 -12 to 10 -3(-H: 10 -13 to 10 -3)

10 -12 to 10 -3(-H: 10 -13 to 10 -3)

10 -12 to 10 -3(-H: 10 -13 to 10 -3)

10 -8 to 10 -1(10 -2 to 105ppm)

0.5 (Gross Mode)

1.8 (Gross Mode)

2.0 (Gross Mode)

Probe suction speed

2.0 (Middle Mode)

2.0 (Middle Mode)

2.0 (Middle Mode)

0.3Pa•m3/s(5.0 (-H: Fine Mode))(5.0 (-H: Fine Mode))(5.0 (-H: Fine Mode))

NW25 (ISO)NW25 (ISO)NW25 (ISO)-Dry pump
250L/min

RP30L/min+Diaphragm pumpType
Version
Quantitative measurement
range (Pa•m3/s)
Inlet port exhaust speed
(He)
(L/s)
Inlet port shape
Main pumpM-232LDTMP 50L/s

Roughing pump

RP 142L/min*1

RP 30L/min

RS-232C
Analog output (2 points) - Standard I/OExternal interface
Display

Color LCD

Sniffer probe

Options*2

Standard

100V AC 8A
435x487x364

462x867x715

435x470x363

42

75

42

Weight (kg)100V to 115V AC, 15A

100V to 115V AC, 10A

100V AC 8A

Measurements

Power requirements

Dimensions (WxHxD) (mm)*1: Optionally changeable to RP up to 275L/min.
*2: Supports 115V, 200V, and 230V according to your order specification.
*3: (-H) is a high sensitivity specification equipment.

■ Dimensions diagram
462

435

363

364

715

11

11

435

M-212LD (H)M-222LD
M-222LD-D (H)Canon ANELVA Corporation Vacuum Components Catalog

470

487

867

Helium Leak Detector
M-232LD

M-232LD

145

Measurements■ Accessories

Filament maintenance kit

Various carts

Sniffer probe

Flexible tube and conversion adapter

Calibration leakPumping system

Dedicated PC software

Helium spray gun(5x10 -9 to 2x10 -3Pa•m3s)(Various types available)■ Ordering information
Parts Number

Model

Description

Remarks

Code0160-03587

M-212LD

Helium Leak Detector (212)100V AC specification, compact

26610

0160-03595

M-222LD

Helium Leak Detector (222)

100V AC specification, high-power type

26620

0160-03600

M-222LD-D

Helium Leak Detector (DRY 222D)

100V AC specification, dry pump type

26621

Helium Leak Detector (222H)

100V AC specification, high-power, high sensitivity
type

26622

0160-04787

M-222LD-H

0161-33803

M-222LD-M1 Helium Leak Detector (222M1)

100V AC specification, high-power M1 type

26623

0160-09208

M-232LD

Helium Leak Detector (232)

100V AC specification, sniffer only type

26630

0164-22422

Tool Case (Transport Case)

212/222 transport case

26680

0164-22406

212 Transport CaseWith casters

26681

0164-22414

222 Transport CaseWith casters

26682

P16-41535

981-9361

0161-27789
P16-35538

ASL25V Helium Standard Leak
ASL25N2 Helium Standard Leak

981-9370

Sniffer Probe for 212

NW25, calibrated leak rate with valve: 5x10-9 to
2x10-8Pa•m3/S
NW25, calibrated leak rate without valve: 5x10-9 to
2x10-8Pa•m3/S
3

Suction rate: 0.1Pa•m /S (compatible with ALD)
3

Suction rate: 0.3Pa•m /S (compatible with ALD)

26801
26802
26810
26811

P16-34839

981-9371

Sniffer Probe for 222

0164-38504

981-9790

He Spray Gun

P16-37269

981-9351

Filament Maintenance Kit

Filament, gasket, ion chamber: 1 each(compatible with ALD)

26850

P16-21924

981-9350

Filament AssemblyFilament only (compatible with ALD)

26851

0161-97530

981-9352

Filament Maintenance Kit

Filament, O-ring, ion chamber: 1 each (for M-232LD)

26854

26830

Note) Contact us for more information about CE (RoHS).

146

Canon ANELVA Corporation Vacuum Components Catalog

THIN FILM DEPOSITIONCONTROLLER and MONITOR
Film Thickness Meter

Measurements

Crystal Oscillator

Canon ANELVA Corporation Vacuum Components Catalog

147

Crystal Oscillator for Film Thickness Sensor
6MHz CRYSTAL
M-600CR■ Summary

Measurements

A new crystal oscillator is used for the crystal film thickness sensor of vacuum deposition equipment. This crystal oscillator offers
high-grade performance and high quality,
where you can actually feel the difference.

■ Features■ Specifications

1. Initial oscillation frequency with minimum tolerance
For applications that use a narrow range from theinitial oscillation frequency such as optical film
deposition, this product, which has a small initial
oscillation frequency tolerance (5990kHz ± 5kHz),can be used for strictly controlling the crystal oscillator replacement interval.

2. More stable life
The oscillation strength of crystal film thickness
meters will always decay (although dependent on
the deposition conditions), as the film deposits on the
crystal oscillator and the oscillating frequency shifts
toward lower frequency.
Under the same deposition conditions, decrease in
the oscillation strength at the resonant frequency ofthe crystal oscillator is considered to be one of thefactors determining the life of the crystal oscillator.
To prolong the life of the crystal oscillator, it is important to keep the resonance resistance of the crystal oscillator at a small, strong oscillation strength.
This product has succeeded in keeping the resonanceresistance small by using high quality crystal material and high processing technology.

Item
Crystal cut direction
Initial oscillation frequency

Specifications
AT cut5990kHz ± 5kHz

Outer diameter

Deposition surface: Gold electrode(fully round surface)
Electrode surface: Gold electrode(patterned)
φ14mm

Cross-section shape

Plano-convex

Quantity/1 packContains 10

Case outer dimensions

W30 x H20 x D40mm

Case Material

ABS resinElectrode

Deposition surface

Electrode surface■ Ordering Information
Parts Number
9007-67148

Model
M-600CR

Description
6MHz Quartz Crystal

Remarks
10 per set

Note) Contact us for more information about CE (RoHS).

148

Canon ANELVA Corporation Vacuum Components Catalog

Code
22071

CONSTRUCTION COMPONENTS& EB GUNS

Vacuum Components

Piping Parts
Ultra-High Vacuum Flanges
Connecting Components with ICF
Quick-release Couplings
Vacuum Switches
Ancillary Materials

ValvesUltra-High Vacuum Type-L All-metal Valves
Ultra-High Vacuum Type-L Polyimide Valves

components“V Series” Roughing Pump Valves“V Series” Type-L Valves
Ultra-High Vacuum Variable Leak Valves
Gas Inlet Valves
Isolate Valves

Ultra-High Vacuum Gate ValveMSB series
STD series

Feedthroughs
Rotary Feedthroughs
Linear Feedthroughs
R/L Feedthroughs
Current Terminals
Ultra-high Vacuum Viewing Ports

E-type Electron Guns

Canon ANELVA Corporation Vacuum Components Catalog

149

Ultra-High Vacuum Flanges■ Summarycomponents

We provide ICF flanges as ultra-high vacuum flanges.
ICF flanges are metal seal flanges that are easy tohandle and highly reliable among the existing ultrahigh vacuum flanges. ICF flanges use custom gaskets made of oxygen-free copper.

ICF flanges■ Features
1. Gaskets are elastically sealed based on the "Capturing" theory.
2. Capable of withstanding pressure up to 10-10Pa.
3. Leak-free within the temperature range of -196°C
to +450°C.
4. Flanges are completely symmetrical without gender.
5. Capable of connecting to any flange with the same
diameter. Flanges can be rotated for installation inany direction.
6. Flanges are made of stainless steel (SUS304).

the material (A). This cold flow pushes the outersurface of the gasket to the flange wall resulting ina reactive force (B). This creates a high surface pressure (C) to form a highly reliable vacuum seal. Furthermore, high surface pressure is maintained due
to "capturing" even if the gasket softens due to hightemperature.

ICF flange● CapturingC

The seal edge of the ICF flange is shaped like a conein order to "Capture" the gasket.
As shown in Fig. 1, the cone shaped seal edge of theAflange squeezes the gasket to push the cold flow intoC
GasketFig. 1

150

Canon ANELVA Corporation Vacuum Components CatalogB1. Heat cycle test
No leakage occurs after tightening the φ70ICF
flange with a torque of 7.8 to 9.8N•m (bolts andwashers coated with molybdenum disulfide paste)
and repeating 60 or more heat cycles under the conditions shown in Fig. 2.
2. Low-temperature cycle test
No leakage occurs after tightening the φ70ICF
flange with a torque of approximately 7.8N•m (bolts
and washers coated with molybdenum disulfide
paste) and repeating 30 or more low temperature
cycles under the conditions shown in Fig. 3.
3. Continuous heating test
No leakage occurs after tightening the φ70ICF
flange with a torque of approximately 9.8N•m (bolts
and washers coated with molybdenum disulfide
paste) and heating at 450°C several hours every day
for a total of 150 hours.
4. Comparison with metal gasket seal flanges

30 minutes

Temperature● Test data

400˚C

100˚C

Time

60
minutesFig. 2Temperature

30 minutes

150˚C

Table 1 compares the sealing line load per unit circumferential length of the gasket.
5. Tightening torque (Reference value)
Roomtemperaturecomponents

Table 2 lists the tightening torque of the flange foreach size.

−196˚CTime
5 minutes

Fig. 3

Table 1

Table 2
Flange type

Seal line load
(N/cm)

FlangeICF

3528

φ34 ICFM4

2 to 3

φ70 ICFM6

6.9 to 9.8

φ114 ICF

M8

9.8 to 14.7

φ152 ICF

M8

9.8 to 14.7

φ203 ICF

M8

9.8 to 14.7

φ253 ICF

M8

9.8 to 14.7

φ305 ICF

M8

9.8 to 14.7

φ356 ICF

M10

19.6 to 24.5

φ406 ICF

M10

19.6 to 24.5

Step

3675

Knife-edge

4381

Bolt used

Tightening torqueper bolt (N•m)Note) Torque when bolts and washers are coated with molybdenum
disulfide paste.

Canon ANELVA Corporation Vacuum Components Catalog151

■ ICF flange standards
The standard dimensions are divided into six types based on the external diameter. Pipes up to φ203mm can beconnected.
A standard flange modified to fit the compatible pipe is available for each size of flange. (Table 3)components

Table 3 ICF fixed flanges
No.

Flange
type

Shape

1

954-9401a2954-94023

954-9403

4954-94045954-94056954-94277954-10918

954-7051

9

b

A

B

C

T1

φH

n

P.C.D.

Applicable Applicablebolt
gasket pack

6

φ6xφ4
-

10

-

7.5

4.5

6

27

M4x20Lφ8xφ5.6
953-9210

12.8

d

Blank

-

954-1101

20

17

10

954-1102

26.5

23.5

11

954-110312954-110413

954-110514

954-1191

15954-705216

954-120117954-129118

954-7053

19

954-130120

954-1391

21

954-705422

954-140123

954-149124

954-705525

954-150126

954-1591

70

d
e

114

d
e

152

-

203

30
35.5

42

38.5

Blank

-

64.5

-

103

155.5

205.5

61

-

97

148.5

12.7

198.5

-

6.7
5.3

17.5

9.5
-

20

11
-

22

-

φ19.1xφ16.7

M4x16

φ19.1xφ16.7

-

M4

-

-

Blank
253

13.2

39

Blank

d
e

19.2

Blank

d
e

33

φ10xφ8
φ12.7xφ10.7

16eApplicable
pipe
-

c

152

T

Blank

8
34

B1

12.5
-

25

12.5

6

58.9

M6x35L

φ25.4xφ23953-5014

φ32xφ29.6
φ38xφ35

M6

M6x22L

8.4

M8x45L

8

92.2

M8

M8x30L

8.4

M8x50L

16

130.3

M8

M8x40L

8.4

M8x55L

20

181.1

M8

M8x40L

8.4

M8x60L

M8

24

231.9

M8x45L

Canon ANELVA Corporation Vacuum Components Catalog

φ41xφ38953-5015

φ63.5xφ60.2-

953-5016

φ101.6xφ95.6-

953-5017

φ153xφ147-

953-5048

φ203xφ197

components
Canon ANELVA Corporation Vacuum Components Catalog

153

Table 4 ICF rotatable flanges
No.

Flange
type

Shape

1

954-9420a2

954-1052b3

954-1053b

4

954-1051c

5954-1150d

6954-1151e7954-1152e8954-1153

e

33

30

9

954-1154

e

39

35.5

10

954-1250d

11954-1251e12954-1350d

13954-1351e

14954-1450d

15954-1451e

16954-1550d

17954-1551

e

A

B

B1

C

T

T1

H

n

Blank
34

70

114

152

203

253

16

19.2

6
8.2

Applicable
pipe
-

7.5

14

4.5

6

27

φ6xφ4
φ8xφ5.6-

13.2

φ19.1xφ16.7

Blank

-

-

-

20

17

26.5

Blank
64.5
Blank
103
Blank
155.5
Blank
205.5

-

-

-

-

-

23.5

61
97
148.5
198.5

φ19.1xφ16.7
12.7

5.3

6.7

6

58.7

φ25.4xφ23
φ32xφ29.6
φ38xφ35

19

21

24

25

9.5
11
12.5
12.5

8.4

8

92.2

8.4

16

130.3

8.4

20

181.1

8.4

24

231.9

components
154

P.C.D.

Canon ANELVA Corporation Vacuum Components Catalog

φ63.5xφ60.2
φ101.6xφ95.6
φ153xφ147
φ203xφ197

■ Large-diameter ICF flanges
The dimensions of the large-diameter ICF flanges are

pipe are available as standard products (Table 6, Fig.

divided into three types based on the external diam-

7). Contact us if you need to connect pipes with spe-

eter as shown in Table 6. Pipes up to φ350mm can becific dimensions. See Table 7 and Fig. 8 for the rotary

connected. A blank flange and a flange with a shortflanges.

Table 6 Large diameter ICF fixed flange list
Flangetype

Shape

954-1611a2

954-1612

b

305

250

11°15′

3(Note 3)954-1622

c

305

250

11°15′

4954-1701

a

356

Blank

12°

5

954-1712

b

356

295

6

954-1722

c

356

7

954-1801a

8954-18129954-1822

No.
1(Note 1)
(Note 2)φA

T

(Note 2)

θ(Angle)Blank

11°15′

28

T1

Applicable bolt/nut/
washer

Applicablegaskettype

Applicable pipe
Outside diameter x Inside
diameter

953-7131

-

φH

n

P.C.D

Type

Dimensions

-

8.4

32

284

953-7801

M8x70L

28

150

8.4

32

284

953-7801

M8x70L

953-7131

φ250xφ244

28

150

M8

(Note 4)32

284

953-7811

M8x50L

953-7131

φ250xφ244

28.5

-

10.5

30

325.4

953-7802M10x70L

953-7132

-

12°

28.5

150

10.5

325.4

953-7802M10x70L

953-7132

φ295xφ289

295

12°

28.5

150

M10

30

(Note 4)

30

325.4

953-7812

M10x50L

953-7132

φ295xφ289

406

Blank

12°

28.5

-

10.5

30

381

953-7802M10x70L

953-7133

-

b

406

350

12°

28.5

150

10.5

30

381

953-7802M10x70L

953-7133

φ350xφ344

c

406

350

12°

28.5

150

(Note 4)30381

953-7812

M10x50L

953-7133

φ350xφ344

305

φB(Note 3)

M10

(Note 5)Note 1. No.1 to No.3 are flanges that conform to the shapes and dimensions of bakable flanges for vacuum equipment (JVIS 003).
2. Winding pipes are used for the pipes. The φB dimensional tolerance is circumference tolerance πD −30 mm and the radial thickness is 3mm.
3. The standard T1 dimension is 150mm. However, special orders can be accepted.
4. Thread size of tapped flange.
5. The thickness of the large-diameter ICF flange gasket is 3mm.
6. The allowable heating temperature of large-diameter ICF flanges is 250°C.

T1
T

n-φH

T

n-φH

T

Pipe

Pipe

φB

P.C.D.

φA

φB

P.C.D.

φA

φA

P.C.D
.

θ
2

θ

θ
2 θ

2.0

P.C.D.

3n-φHcomponents

14

T1

3

2-M8 equal spaced
screw depth 10

2-M8 equal spaced(removal tap)

a

b

c

Fig 7 Large-diameter ICF fixed flange shape

Canon ANELVA Corporation Vacuum Components Catalog

155

Table 7 Large-diameter ICF rotary flanges
Assembly
type

No.

Receive flange

Inside flange

Type

Shape

Type

Shape

φA

θ

φB

(Note 3)T

(Angle)T1(Note 4)

φH

n

P.C.D

Applicable pipe
Outside diameterx Inside diameter(Note 2)

1

954-1661

954-1670

R

954-1681

a

305

Blank

11°15′

28

-

8.4

32

284

-

2

(Note 2)954-1662954-1670

R

954-1682

b

305

250

11°15′

28

150

8.4

32

284

φ250xφ2443954-1751

954-1760

R

954-1771

a

356

Blank

12°

28.5

-

10.5

30

325.4

-

4

954-1752

954-1760

R

954-1782

b

356

295

12°

28.5

150

10.5

30

325.4

φ295xφ2895954-1851

954-1860

R

954-1871

a

406

Blank

12°

28.5

-

10.5

30

381

-

6

954-1852

954-1860

R

954-1882

b

406

350

12°

28.5

150

10.5

30

381

φ350xφ344

Note 1. The applicable gaskets, bolts, nuts, and washers are the same as those of fixed flanges.
2. No. 1 and No. 2 are flanges that conform to the shapes and dimensions of bakable flanges for vacuum equipment (JVIS 003).
3. Winding pipes are used for the pipes. The φB dimensional tolerance is circumference tolerance πD −30 mm and the radial thickness is 3mm.
4. The allowable heating temperature of large-diameter ICF flanges is 250°C.

T1
T

2

a

Pipe

b

φB

P.C.D.

φA

P.C.D
.

θ
2

θ

θ
2

θ

3

n-φH

components

R
2-M8 equal spaced(removal tap)

Fig 8 Large-diameter ICF rotary flange shape● Gasket bolts
Based on the flange standards, nine types of copper
gaskets are provided as standard products. As a general rule, gaskets can be used only once.
Standard bolts and nuts are also available for eachflange size (see Tables 3 to 7). Dry type bolts and● Ordering
To order an ICF flange, gasket, bolts, nuts, or washers, please specify the type name and product code.
For details on flanges with pipes welded, refer to thesection on connection elements.

washers baked with molybdenum disulfide, which do
not require the application of molybdenum disulfide
paste, are available upon request.

156

Canon ANELVA Corporation Vacuum Components Catalog

A gasket clip is used to ensure the gasket remains attached to the ICF flange when joining flanges.
Fig. 9 shows an example of its use and dimensions.
When flanges are joined vertically, the gasket clip can

prevent the gasket from dropping and improve operation.
The gasket clip can be used on all ICF flanges except
for the φ34ICF.

Fig 9 953-7601 gasket clipNote) • After joining the flanges, remove the gasket clip before tightening the bolts.
• The gasket clip is inserted in the leak groove (leak finding groove) of the ICF flange. Therefore, it cannot be used on conflat flanges without
a leak groove.
• Gasket clips are not provided as a set of two. Therefore, specify the necessary quantity when ordering.

Canon ANELVA Corporation Vacuum Components Catalog

157

components■ 953-7601 gasket clip■ Conversion ICF flanges

I flangeT

Use a conversion ICF flange when joining ICF flanges
with different diameters.

Leak groove

M

A standard series of 15 types is available (see Fig. 11
and Table 8).
For copper gaskets, standard gaskets can be used.
are arranged with the leak groove at the center.

φB

φA

The locations of the screws for joining the II flange (M)II flange

Fig. 11components

Table 8 ICF rotatable flanges
I flange

No.

Conversion
ICF type

ICF size1952-7010

2
3

II flange
Applicablegasket953-9210

Applicablebolt
M4x12L

φA

φB

T

M

70

17

12.7

6-M4 (Depth 6)

φ34ICF

953-9210

M4x14L

114

17

17.5

6-M4 (Depth 9)

φ70ICF

953-5014

M6x22L

114

38

17.5

6-M6 (Depth 10)

M8x50L

φ34ICF

953-9210

M4x14L

152

17

20

6-M4 (Depth 9)953-5016

M8x50L

φ70ICF

953-5014

M6x22L

152

38

20

6-M6 (Depth 10)

φ152ICF

953-5016

M8x50Lφ114ICF

953-5015

M8x25L

152

65

20

8-M8 (Depth 10)

952-7040

φ203ICF

953-5017

M8x55L

φ34ICF

953-9210

M4x14L

203

17

22

6-M4 (Depth 9)

952-7041

φ203ICF

953-5017

M8x55L

φ70ICF

953-5014

M6x22L

203

38

22

6-M6 (Depth 10)9952-7042

φ203ICF

953-5017

M8x55Lφ114ICF

953-5015

M8x25L

203

65

22

8-M8 (Depth 10)10952-7043

φ203ICF

953-5017

M8x55L

φ152ICF

953-5016

M8x30L

203

103

22

16-M8 (Depth 10)

φ70ICF

Applicablegasket953-5014

Applicable
ICF sizebolt*
M6x35L
φ34ICF

952-7020

φ114ICF

953-5015

M8x45L

952-7021

φ114ICF

953-5015

M8x45L

4

952-7030

φ152ICF

953-5016

5

952-7031

φ152ICF

6

952-70327
8

11

952-7050

φ253ICF

953-5048

M8x60L

φ34ICF

953-9210

M4x14L

253

17

25

6-M4 (Depth 9)12952-7051

φ253ICF

953-5048

M8x60L

φ70ICF

953-5014

M6x22L

253

38

25

6-M6 (Depth 10)13952-7052

φ253ICF

953-5048

M8x60Lφ114ICF

953-5015

M8x25L

253

65

25

8-M8 (Depth 12)14952-7053

φ253ICF

953-5048

M8x60L

φ152ICF

953-5016

M8x30L

253

103

25

16-M8 (Depth 12)15952-7054

φ253ICF

953-5048

M8x60L

φ203ICF

953-5017

M8x30L

253

154

25

20-M8 (Depth 12)* The I flange side bolt hole is a through-hole.

■ ICF flange welding
TIG welding used to weld the ICF flange (see Fig. 12).

as much as possible. In addition, avoid welding pipes

The flange and pipe must be degreased before weld-

larger than the applicable pipe diameter. Note thating.

when welding by additionally working on a large-

When additionally working on a blank flange to weld

diameter ICF blank flange, the flange may become

a pipe, keep the weld location away from the seal edge

deformed, preventing the gasket from being attached.

ICF flange

ICF flange

Applicable pipe

φ34 ICF flange

φ34 ICF flange

Applicable pipe

TIG
Applicable pipe

Applicable pipe

TIG

TIG

TIG
a) The compatible
only
needs toa) Applicablepipe only pipe
needs
to be
be cut because
is butt welded
cut because
it is buttitweldedb) Keep
clearance
betweencompatibleb) Keep
thetheclearance
betweenthetheapplicablepipe
flangea minimum
pipe
andandflangeto toa minimum

Fig. 12 Flange welding example

158

CANON ANELVA CORPORATION Vacuum Components Catalog

■ Ordering information
Model

Description

Remarks

Code4-368029

954-9401

φ34 Mini ICF Flange

Blank

34000

4-368030

954-9402

φ34 Mini ICF Flange(Applicable pipe) φ6xφ4

34001

4-368031

954-9403

φ34 Mini ICF Flange(Applicable pipe) φ8xφ5.6

34002

4-368032

954-9404

φ34 Mini ICF Flange(Applicable pipe) φ10xφ834003

4-368033

954-9405

φ34 Mini ICF Flange(Applicable pipe) φ12.7xφ10.734004

4-368171954-9427

φ34 Mini ICF Flange(Applicable pipe) φ19.1xφ16.734005

804-3850

954-1091

φ34 Mini ICF Flange(Applicable pipe) φ19.1xφ16.7 with M4 tap

34020

A26-20341

954-9420

φ34 Mini ICF Rotatable Flange

Blank

34040

B26-00882

954-1051

φ34 Mini ICF Rotatable Flange(Applicable pipe) φ19.1xφ16.7

34041

P21-03183

954-1052

φ34 Mini ICF Rotatable Flange(Applicable pipe) φ6xφ4

34042

P21-03184

954-1053

φ34 Mini ICF Rotatable Flange(Applicable pipe) φ8xφ5.634043

803-0156

954-7051

φ70 ICF Flange

Blank

34100

804-3853

954-1103

φ70 ICF Flange(Applicable pipe) φ32xφ29.6

34101

804-3854954-1104

φ70 ICF Flange(Applicable pipe) φ38xφ35

34102

804-3855954-1105

φ70 ICF Flange(Applicable pipe) φ41xφ38

34103

804-3851

954-1101

φ70 ICF Flange(Applicable pipe) φ19.1xφ16.7

34106

804-3852

954-1102

φ70 ICF Flange(Applicable pipe) φ25.4xφ23

34107

804-3856954-1191

φ70 ICF Flange(Applicable pipe) φ41xφ38, with M6 tap

34110

0190-03285

954-1150

φ70 ICF Rotatable Flange

Blank

34140

P21-03188

954-1153

φ70 ICF Rotatable Flange(Applicable pipe) φ32xφ29.6

34143

B26-00883

954-1154

φ70 ICF Rotatable Flange(Applicable pipe) φ38xφ3534144

P25-05139

954-1151

φ70 ICF Rotatable Flange(Applicable pipe) φ19.1xφ16.7

34145

P25-05619

954-1152

φ70 ICF Rotatable Flange(Applicable pipe) φ25.4xφ23

34146

P25-06545

954-7052

φ114 ICF Flange

Blank

34200

803-1721

954-1201

φ114 ICF Flange(Applicable pipe) φ63.5xφ60.2

34201

803-1722

954-1291

φ114 ICF Flange(Applicable pipe) φ63.5xφ60.2, with M8 tap

34210

0190-03366

954-1250

φ114 ICF Rotatable Flange

Blank

34240

A26-20338

954-1251

φ114 ICF Rotatable Flange(Applicable pipe) φ63.5xφ60.2

34241

803-0158

954-7053

φ152 ICF Flange

Blank

34300

803-1723

954-1301

φ152 ICF Flange(Applicable pipe) φ101.6xφ95.6

34301

803-1724954-1391

φ152 ICF Flange(Applicable pipe) φ101.6xφ95.6, with M8 tap

34310

P21-03192

954-1350

φ152 ICF Rotatable Flange

Blank

34340

A26-20339

954-1351

φ152 ICF Rotatable Flange(Applicable pipe) φ101.6xφ95.6

34341

803-0159

954-7054

φ203 ICF Flange

Blank

34400

803-1725954-1401

φ203 ICF Flange(Applicable pipe) φ153xφ147

34401

803-1726954-1491

φ203 ICF Flange(Applicable pipe) φ153xφ147, with M8 tap

34410

P21-03195

954-1450

φ203 ICF Rotatable Flange

Blank

34440

A26-20340

954-1451

φ203 ICF Rotatable Flange(Applicable pipe) φ153xφ147

34441

803-0160

954-7055

φ253 ICF Flange

Blank

34500

803-1727

954-1501

φ253 ICF Flange(Applicable pipe) φ203xφ197

34501

803-1728954-1591

φ253 ICF Flange(Applicable pipe) φ203xφ197, with M8 tap

34510

components

Parts Number

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

159

components

Parts Number

Model

Description

Remarks

Code

P21-03197

954-1550

φ253 ICF Rotatable Flange

Blank

34540

P21-03198

954-1551

φ253 ICF Rotatable Flange(Applicable pipe) φ203xφ197

34541

P21-04187

954-1611

φ305 ICF Flange

Blank

34602

P21-04188

954-1612

φ305 ICF Flange(Applicable pipe) φ250xφ244

34603

P21-04189

954-1622

φ305 ICF Flange(Applicable pipe) φ250xφ244, with M8 tap

34604

P21-04190

954-1661

φ305 ICF Rotatable Flange

Blank

34612

M21-01140

954-1662

φ305 ICF Rotatable Flange(Applicable pipe) φ250xφ244

34613

P25-06074

954-1701

φ356 ICF Flange

Blank

34620

P21-04192

954-1712

φ356 ICF Flange(Applicable pipe) φ295xφ289

34622

P21-04193

954-1722

φ356 ICF Flange(Applicable pipe) φ295xφ289, with M10 tap

34623

P21-04194

954-1751

φ356 ICF Rotatable Flange

Blank

34630

0190-08772

954-1752

φ356 ICF Rotatable Flange(Applicable pipe) φ295xφ289

34631

P25-06416

954-1801

φ406 ICF Flange

Blank

34640

P21-04196

954-1812

φ406 ICF Flange(Applicable pipe) φ350xφ344

34642

P21-04197

954-1822

φ406 ICF Flange(Applicable pipe) φ350xφ344, with M10 tap

34643

P21-04198

954-1851

φ406 ICF Rotatable Flange

Blank

34650

0190-08780

954-1852

φ406 ICF Rotatable Flange(Applicable pipe) φ350xφ344

34651

A26-13554

952-7010

Conversion ICF Flange

φ34 ICF-φ70 ICF

34900

A23-06496

952-7020

Conversion ICF Flange

φ34 ICF-φ114 ICF

34901

A23-06497

952-7021

Conversion ICF Flange

φ70 ICF-φ114 ICF

34902

A23-06498

952-7030

Conversion ICF Flange

φ34 ICF-φ152 ICF

34903

793-5893

952-7031

Conversion ICF Flange

φ70 ICF-φ152 ICF

34904

793-5894952-7032

Conversion ICF Flange

φ114 ICF-φ152 ICF

34905

0191-14921

952-7040

Conversion ICF Flange

φ34 ICF-φ203 ICF

34906

A23-06502

952-7041

Conversion ICF Flange

φ70 ICF-φ203 ICF

34907

A23-06503

952-7042

Conversion ICF Flange

φ114 ICF-φ203 ICF

34908

803-0887

952-7043

Conversion ICF Flange

φ152 ICF-φ203 ICF

34909

0191-14955

952-7050

Conversion ICF Flange

φ34 ICF-φ253 ICF

34910

A23-06506

952-7051

Conversion ICF Flange

φ70 ICF-φ253 ICF

34911

P25-02740

952-7052

Conversion ICF Flange

φ114 ICF-φ253 ICF

34912

P25-04860

952-7053

Conversion ICF Flange

φ152 ICF-φ253 ICF

34913

0191-14963

952-7054

Conversion ICF Flange

φ203 ICF-φ253 ICF

34914

0190-03748

953-9210

Gasket Pack

For mini φ34 ICF, 5 per set

38000

0190-03756

953-5014

Gasket Pack

For mini φ70 ICF, 5 per set

38002

0190-03764

953-5015

Gasket Pack

For mini φ114 ICF, 5 per set

38003

0190-03772

953-5016

Gasket Pack

For mini φ152 ICF, 5 per set

38004

0190-03829

953-5017

Gasket Pack

For mini φ203 ICF, 5 per set

38005

0190-03837

953-5048

Gasket Pack

For mini φ253 ICF, 5 per set

38006

A26-13403

953-7131

Gasket Pack for PY305 · 3T

For mini φ305 ICF, 1 per set

38024

A26-13406

953-7132

Gasket Pack for PY356 · 3T

For mini φ356 ICF, 1 per set

38025

A26-13409

953-7133

Gasket Pack for PY406 · 3T

For mini φ406 ICF, 1 per set

38026

A26-04805

953-7601

Gasket Clip

For φ70 ICF to φ406 ICF gasket fixture (x1)38029Note) Contact us for more information about CE (RoHS).

160

Canon ANELVA Corporation Vacuum Components Catalog

components

Memorandum

Canon ANELVA Corporation Vacuum Components Catalog

161

Connecting Components with ICF
Fitting
Metal adapter
Glass adapter■ Summary
A wide variety of elements are used to connect thepipes when the equipment is being assembled. The
series of connection elements listed here utilize ICF
flanges for connecting the pipes. They are used in
the main body of the ultra-high vacuum equipment
and its roughing pump system.

■ Features
1. Several types are available to satisfy any need.
2. ICF flanges ensure use up to ultra-high vacuum.

■ Fitting
The fitting is an all-stainless steel (SUS-304) connection element using an ICF flange. It is nonmagnetic
and can be baked up to 450°C, making it ideal for connection pipes for ultra-high vacuum equipment andthe like.
We also manufacture flexible tubes with ICF flanges.

● Specifications

D

Allowable heating temperature: 450°C

ICF rotatable flangeCB

1.33×10-11Pa•m3/sec or less
A

Leak:

● Nipples (Material: SUS-304)
Type

A

B

C

D

952-7100

φ70

φ38

φ35

120

952-7104

φ70

φ38

φ35

210

952-7103

φ34

φ19

φ16

76

ICF fixed flange
ICF fixed flange

D (free length)
ICF rotatable flange

B
CA● Bellows nipples (Material: SUS-304)
A

B

C

D

952-7200

φ70

φ48

φ32

94

952-7201

φ34

φ22

φ15

76

Extension/
shrinkage
Expansion 2,
shrinkage 3
Expansion 4,
shrinkage 6

ICF rotatable flange

B

ICF fixed flange

C

E

Type

B

components

Please ask us.

● Elbows (Material: SUS-304)
Type

A

B

C

D

E

952-7305

φ70

φ38

φ35

54.2

54.2

952-7306

φ70

φ38

φ35

54.2

189

*952-7307

φ34

φ21.7

φ17.5

51.3

51.3

A

(Note) * indicates a bulge product.

162

Canon ANELVA Corporation Vacuum Components Catalog

D● Tees (Material: SUS-304)
CD

952-7605

φ70

φ38

φ35

54.2

952-7606

φ34

φ19

φ16

38.6

A

B

C

D

952-7500

φ70

φ38

φ35

60

952-7501

φ34

φ19

φ16

38

D

ICF fixed flange

D

ICF rotatable flange

C

B

B

A

A

Type

● Crosses (Material: SUS-304)
A

ICF rotatable flange* Ask for availability of fittings with shapes and sizes other than theabove.

D

B

C

B

D

Type

D

ICF fixed flange

D■ Metal adapters
The metal adapter is an all-stainless steel (SUS-304)

components

adapter using an ICF flange. It is nonmagnetic andcan be baked up to 450°C. It can be welded onto thevacuum container for instance.

● Specifications
Allowable heating temperature: 450°C
Leak:

1.33×10-11Pa•m3/sec or less

● Metal adapters (Material: SUS-304)
A

B

C

D

φ70

φ38

φ35

114.8

952-7801

φ70

φ41

φ38

33

952-7802

φ114

φ50.8

φ46.8

49.5
49.5

952-7825

φ114

φ60.5

φ54.9

952-7803

φ152

φ101.6

φ95.6

61952-7804

φ203

φ153

φ147

60

D

Type
952-7800

B
C(Note) The ICF flange for the 952-7801 metal adapter is with M6tap.
* Ask for availability of metal adapters with shapes and sizes otherthan the above.

A
Dimensions

Canon ANELVA Corporation Vacuum Components Catalog

163

■ Glass adapters
The glass adapter is Kovar glass sealed with Kovar
alloy and welded onto an ICF flange. Two types areavailable: all Kovar glass and Kovar glass sealed with
Pyrex glass. You can select either type to match theglass material of the other side.

● Specifications
Allowable heating temperature: 300°C
Temperature change: 25°C/min or less
Leak: 7×10-11Pa•m3/sec or lessWithstand pressure: 0.1MPa (inside vacuum, outside
atmosphere)● Glass adapters (Material: Kovar glass)
Type

A

B

C

t

952-7810

φ70

φ32

155

1.5

Minimum
inner
diameter
φ27952-7822

φ34

φ19

145

1.2

φ15.5

952-7823

φ34

φ7

51.5

0.8

φ4.4

Pyrex glass

Kovar glass
Middle glass● Glass adapters (Material: Pyrex glass)AB

C

952-7811

φ70

φ32

155

1.8

43

952-7824

φ34

φ20

145

1.2

53.2

φ15.5

Type

components

Kovar glass

Minimum
Inner
diameter
φ27

t

D

Kovar

ICF fixed flange
glass
KovarKovar
glass

Dimensions
Dimensions
Diagram164

Canon ANELVA Corporation Vacuum Components Catalog

Pyrex
glass
Pyrex
glass

■952-7806, φ15 adapter(Material: SUS-304, gauge seal gasket is fluorine rubber (Viton))

φ30This adapter is used exclusively for vacuum gauges
such as B-A, Shultz, or thermo couple (applicable● Specifications

48.3

41.3

gauge diameter φ15).

Allowable heating temperature: 125°C
Leak: 6.7×10-11Pa•m3/sec or less
(Excluding gas permeation of the fluoro rubber

φ15 adapter(Viton))■ Ordering information
Model

Description

Remarks

Code952-7100

φ70 Nipple

With φ70 ICF

32000

4-340142

952-7104

φ70 Nipple

With φ70 ICF

32001

B26-00779

952-7103

Mini Nipple

With φ34 ICF

32002

B26-00862

952-7200

φ70 Bellows Nipple

With φ70 ICF

32010

B26-00863

952-7201

Mini Bellows Nipple

With φ34 ICF

32011

B26-00763

952-7305

φ70 Elbow

With φ70 ICF

32030

B23-00777

952-7306

φ70 Elbow Different Length Elbow

With φ70 ICF

32031

B26-00761

952-7307

Mini Elbow

With φ34 ICF

32032

B23-00778

952-7605

φ70 TeeWith φ70 ICF

32040

B26-00762

952-7606

Mini TeeWith φ34 ICF

32041

B23-00846

952-7500

Cross

With φ70 ICF

32050

B26-00792

952-7501

Mini Cross

With φ34 ICF

32051

0190-04079

952-7810

φ32 Glass Adapter

With φ70 ICF, Kovar glass

32100

0190-04100

952-7811

φ32 Glass Adapter

With φ70 ICF, Pyrex® glass

32101

VMT-236952-7820

φ60 Glass Adapter

With φ114 ICF, Kovar glass

32102

VMT-237952-7821

φ60 Glass Adapter

With φ114 ICF, Pyrex® glass

32103

VMT-238952-7840

φ110 Glass Adapter

With φ152 ICF, Kovar glass

32104

VMT-239952-7841

φ110 Glass Adapter

With φ152 ICF, Pyrex® glass

32105

0190-04087

952-7822

φ19 Mini Glass Adapter

With φ34 ICF, Kovar glass

32106

0190-04095

952-7823

φ7 Mini Glass Adapter

With φ34 ICF, Kovar glass

32107

0190-04118

952-7824

φ20 Mini Glass Adapter

With φ34 ICF, Pyrex® glass

32108

0190-04053

952-7800

φ38 Metal Adapter

With φ70 ICF

32120

P25-12482

952-7801

φ41 Metal Adapter

With φ70 ICF, M6 tap

32121

VMT-287952-7802

φ50 Metal Adapter

With φ114 ICF

32122

VMT-9040

952-7825

φ60 Metal Adapter

With φ114 ICF

32123

VMT-288952-7803

φ102 Metal Adapter

With φ152 ICF

32124

VMT-289952-7804

φ153 Metal Adapter

With φ203 ICF

32125

0190-05261

952-7806

φ15 Adapter

With φ70 ICF, φ15 gauge mounting
port

32150

components

Parts Number
B26-00777

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

165

Quick-release Couplings■ Summary
We also offer easy-to-use ISO compliant vacuum
flanges.
These flanges are referred to as Quick-release Couplings by ISO. We offer five types of small flanges
with standardized diameters of 10, 16, 25, 40, and 50.
These coupling are functional quick release flanges
with clamps. No bolts are used. A wide variety of connection elements using these flanges are also available.

components■ Features
1. Easy attachment and removal. No bolts or nuts areused.
2. Completely symmetrical flange without gender.
3. Can be installed in any direction (functions the sameas a rotatable flange).
4. The entire circumference of the flange can be continuously and uniformly tightened.
5. Al alloy coated with Ni makes the clamp highly
corrosion-resistant.
6. The O-ring can be swapped depending on the heating temperature. (Neoprene: 70°C, Viton:150°C)
7. Leakage is 1.3×10-9Pa•m3/sec or less.
(Except gas permeation of the O-ring)

Wing nut

O-ring

Clamp■ Principle
The quick-release coupling method is the most simplest type of coupling.
The flange seal is flat and the other side is tapered forboth.
By inserting a clamp in this tapered area and tightening the thumbscrew, a force is created toward theFlangecenter of the flange, crushing the O-ring to create aseal. The center ring guides the O-ring at this time.
This quick-release coupling is superior to any othercoupling method because only a single thumbscrew
needs to be tightened, reducing the assembly timeand simplifying handling.

166

Canon ANELVA Corporation Vacuum Components Catalog

Center ring

■ Specifications● Flanges (Material: SUS-304)
φA

φB

φC

φD

954-7731

30

12.2

10

13.0

NW16

954-7732

30

17.2

16

19.1

NW25

954-7733

40

26.2

24

28.0

NW40

954-7734

55

41.2

38.5

42.7

NW50

954-7895

75

52.2

47

51.0

D
C

10

Type
NW10

Applicable pipe NW10: φ13.0xφ11.0 NW16: φ19.1xφ16.7 NW25: φ28.0xφ25.0
NW40: φ42.7xφ39.4 NW50: φ51.0xφ47.0

B
A● Blank flanges (Material: SUS-304)
φA

φB

C

954-7741

30

12.2

6

NW16

954-7742

30

17.2

6

NW25

954-7743

40

26.2

6

NW40

954-7744

55

41.2

6

NW50

954-7745

75

52.2

6

C

Type
NW10

B
A

● Nipples (Material: SUS-304)
φA

φB

φC

D

954-7781

30

13.8

10.5

60

NW16

954-7782

30

20

16

80

NW25

954-7783

40

27.2

23

100

NW40

954-7784

55

42.7

37.1

130

C
B

D

Type
NW10

components

A● NW-ICF conversion nipples (Material: SUS-304)
A flange

B flange

φC

φD

NW10

φ34ICF

12.7

9.7

NW10-φ70ICF

954-7462

NW10

φ70ICF

13.8

10.5

NW16-φ34ICF

954-7463

NW16

φ34ICF

19

16

NW16-φ70ICF

954-7464

NW16

φ70ICF

19

16

NW25-φ70ICF

954-7465

NW25

φ70ICF

27.2

24

NW40-φ70 ICF

954-7466

NW40

φ70ICF

38

35

A flange

D
C

50

Type
954-7461

B flange● NW conversion nipples (Material: SUS-304)
Type

A flange

B flange

φC

φD

NW10-16954-7451

NW10

NW16

13.8

10.5

NW10-25954-7452

NW10

NW25

13.8

10.5

NW10-40954-7453

NW10

NW40

13.8

10.5

NW10-50954-7454

NW10

NW50

13.8

10.5

NW16-25954-7455

NW16

NW25

20

16

NW16-40954-7456

NW16

NW40

20

16

NW16-50954-7457

NW16

NW50

20

16

NW25-40954-7458

NW25

NW40

27.2

23

NW25-50954-7459

NW25

NW50

27.2

23

NW40-50954-7460

NW40

NW50

42.7

37.1

Canon ANELVA Corporation Vacuum Components Catalog

A flange

D50

NW10-φ34ICF

C

B flange167

● Bellows nipples (Material: SUS-304)
φA

φB

φC

NW10

954-77713024±2

15.5±2

Minimum
inner
MIN
diameter

D
Free
MAX
length
60

64

54

C
B

10

NW16

954-7772

30

22±2

15±2

80

84

76

15

NW25

954-77734048±2

32.0±2

100

102

97

24

NW40

954-77745548±2

32.0±2

130

132

127

32

D

Type

A

φB

C

φD

30

13.8

30

10.5

NW16

954-7792

30

20

40

16

NW25

954-7793

40

27.2

50

23

*NW40

954-7794

55

42.7

65

37.1

D

φA

954-7791

B

C

Type
NW10

A

● Elbows (Material: SUS-304)

Note) * indicates a bulge product.

C

φA

φB

C

D

φE

30

13.8

30

30

10.5

NW16

954-7812

30

20

40

40

16

NW25

954-7813

40

27.2

50

50

23

NW40

954-7814

55

42.7

65

65

37.1

Type

φA

φB

C

D

φE

NW10

954-7821

30

13.8

30

30

10.5

E
B

D

● Crosses (Material: SUS-304)

954-7822

30

20

40

40

16

954-7823

40

27.2

50

50

23

NW40

954-7824

55

42.7

65

65

37.1

E

B

C

NW16
NW25

C

Type
954-7811

A

D● Metal adapters (Material: SUS-304)
Type

φA

φB

φC

D

954-7761

30

13.8

10.5

70

NW16

954-7762

30

20

16

70

NW25

954-7763

40

27.2

23

70

NW40

954-7764

55

42.7

37.1

70

C

D

NW10

B

A

B

● Rubber tube adapters (Material: SUS-304)
NW10

168

Type

φA

φB

C

φD

954-7751

30

19

60

19

NW16

954-7752

30

19

60

19

NW25

954-7753

40

22

80

24

NW40

954-7754

55

38.0

80

38

Canon ANELVA Corporation Vacuum Components Catalog

DC

components

NW10

A

● Tees (Material: SUS-304)

A● Gauge adapters(Material: SUS-304 (male screw Ni-plated copper alloy), Gauge seal gasket fluoro rubber (Viton)
φAB

954-7832

30

52

NW25

954-7833

40

52

NW40

954-7834

55

52

φ16

Male screw

B

NW16

Type

φ30

Usage: Installation of B-A gauge, Shultz gauge. (Applicable gauge glass tube Outside
diameter φ15)A

● Flexible tubes (Material: SUS-316)
Type
D=500

D=1000

D=1500

D=2000954-7475954-7476954-7477954-7478

NW16954-7480

954-7481954-7482954-7483

NW25

954-7485954-7486954-7487954-7488NW40954-7490

954-7491

954-7492

954-7493

C

D

NW10

φA

φB

φC

Minimum
bend radius

Repeated
bendingradiusNW103019.4±2

15±2

30

80

NW16

30

24.8±2

20±2

35

115

NW25

40

31.5±225.4±2

60

125

NW40

55

48.2±2

40±2

90

150

B

A

● Center rings(Material: AL for neoprene O-ring, SUS-304 for fluoro rubber (Viton) O-ring)
Type

NW10

954-7871

954-7841

12

10

NW16

954-7872

954-7842

17

16

NW25

954-7873

954-7843

26

24

NW40

954-7874954-7844

41

39

NW50

954-7717954-7847

52

50

A
B

components

φB

3.9

φA

8

With neoprene With fluoro rubber
O-ring(Viton) O-ring

Type

A

B

C

D
22.0

NW10/16954-7885

42.5

63.0

16.0

NW20/25954-7886

54.0

72.0

16.0

33.0

NW32/40954-7887

70.0

90.0

16.0

46.0

NW50

954-7888

90.0

114.0

20.0

62.0

Canon ANELVA Corporation Vacuum Components Catalog

D

Size

A

● Clamps (Material: AL, Niplated)

B

C

169

■ Options
1. Note during design that the mounting dimensions
are as shown at right.

■ Usage notes
1. 	Tighten the clamp by hand. Do not use any tool totighten the clamp.
2. Do not use the clamp to support the load when piping. (Make sure no moment is applied).
When forced to apply a load, distribute it over the
bellows nipple and flexible tube.

3.9
O-ringClamp

FlangeCenter ring

■ Ordering information

components

Parts Number

Model

Description

Remarks

Code764-8152954-7741

NW10 Blank Flange

SUS product35000

764-8148

954-7731

NW10 Flange

SUS product35001

764-8153

954-7742

NW16 Blank Flange

SUS product35010

764-8149954-7732

NW16 Flange

SUS product35011

764-8154

954-7743

NW25 Blank Flange

SUS product35020

764-8150954-7733

NW25 Flange

SUS product35021

764-8155954-7744

NW40 Blank Flange

SUS product35030

764-8151

954-7734

NW40 Flange

SUS product35031

804-4658954-7745

NW50 Blank Flange

SUS product35040

A26-00414

954-7895

NW50 Flange

SUS product35041

B26-00820

954-7781

NW10 Nipple

SUS product32500

B26-00822

954-7782

NW16 Nipple

SUS product32501

B26-00823

954-7783

NW25 Nipple

SUS product32502

B26-00824

954-7784

NW40 Nipple

SUS product32503

A26-14921

954-7461

NW10-φ34 Conversion Nipple

SUS product32470

B26-00851

954-7462

NW10-φ70 Conversion Nipple

SUS product32471

B26-00852

954-7463

NW16-φ34 Conversion Nipple

SUS product32472

B26-00853

954-7464

NW16-φ70 Conversion Nipple

SUS product32473

B26-00854

954-7465

NW25-φ70 Conversion Nipple

SUS product32474

B26-00855

954-7466

NW40-φ70 Conversion Nipple

SUS product32475

A26-12825

954-7451

NW10-16 Conversion Nipple

SUS product32483

A26-12826

954-7452

NW10-25 Conversion Nipple

SUS product32484

A26-12827

954-7453

NW10-40 Conversion Nipple

SUS product32485

A26-12828

954-7454

NW10-50 Conversion Nipple

SUS product32486

B26-00839

954-7455

NW16-25 Conversion Nipple

SUS product

32487Note) Contact us for more information about CE (RoHS).

170

Canon ANELVA Corporation Vacuum Components Catalog

ModelDescription

Remarks

Code

B26-00840

954-7456

NW16-40 Conversion Nipple

SUS product32488

B26-00841

954-7457

NW16-50 Conversion Nipple

SUS product32489

B26-00842

954-7458

NW25-40 Conversion Nipple

SUS product32490

B26-00843

954-7459

NW25-50 Conversion Nipple

SUS product32491

B26-00844

954-7460

NW40-50 Conversion Nipple

SUS product32492

764-8171954-7771

NW10 Bellows Nipple

SUS product32510

B26-00717

954-7772

NW16 Bellows Nipple

SUS product32511

B26-00860

954-7773

NW25 Bellows Nipple

SUS product32512

B26-00861

954-7774

NW40 Bellows Nipple

SUS product32513

764-8187954-7791

NW10 Elbow

SUS product32530

B26-00829

954-7792

NW16 Elbow

SUS product32531

B26-00830

954-7793

NW25 Elbow

SUS product32532

B26-00791

954-7794

NW40 Elbow

SUS product32533

774-0004

954-7811

NW10 TeeSUS product32540

B26-00832

954-7812

NW16 TeeSUS product32541

B26-00833

954-7813

NW25 TeeSUS product32542

B26-00834

954-7814

NW40 TeeSUS product32543

774-0014

954-7821

NW10 Cross

SUS product32550

P25-11753

954-7822

NW16 Cross

SUS product32551

B26-00814

954-7823

NW25 Cross

SUS product32552

B26-00819

954-7824

NW40 Cross

SUS product32553

B26-00846

954-7761

NW10 Metal Adapter

SUS product32620

B26-00847

954-7762

NW16 Metal Adapter

SUS product32621

B26-00848

954-7763

NW25 Metal Adapter

SUS product32622

B26-00849

954-7764

NW40 Metal Adapter

SUS product32623

B26-00787

954-7751

NW10 Rubber Hose Adapter

SUS product32640

B26-00788

954-7752

NW16 Rubber Hose Adapter

SUS product32641

B26-00789

954-7753

NW25 Rubber Hose Adapter

SUS product32642

B26-00790

954-7754

NW40 Rubber Hose Adapter

SUS product32643

0190-10054

954-7832

NW16 Gauge Adapter

SUS product, φ15 gauge mounting port

32650

0190-10062

954-7833

NW25 Gauge Adapter

SUS product, φ15 gauge mounting port

32651

0190-10070

954-7834

NW40 Gauge Adapter

SUS product, φ15 gauge mounting port

32652

594-3457

954-7475

NW10 Flexible Tube (D=500mm)

D=500mm32660

594-3458954-7476

NW10 Flexible Tube (D=1000mm)

D=1000mm

32661

594-3459

954-7477

NW10 Flexible Tube (D=1500mm)

D=1500mm

32662

594-3460

954-7478

NW10 Flexible Tube (D=2000mm)

D=2000mm

32663

594-3461

954-7480

NW16 Flexible Tube (D=500mm)

D=500mm32664

594-3462954-7481

NW16 Flexible Tube (D=1000mm)

D=1000mm

32665

594-3463

954-7482

NW16 Flexible Tube (D=1500mm)

D=1500mm

32666

594-3464954-7483

NW16 Flexible Tube (D=2000mm)

D=2000mm

32667

594-3465954-7485

NW25 Flexible Tube (D=500mm)

D=500mm

32668

594-3466954-7486

NW25 Flexible Tube (D=1000mm)

D=1000mm

32669

594-3467954-7487

NW25 Flexible Tube (D=1500mm)

D=1500mm

32670

components

Parts Number

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

171

Parts Number

Model

Description

Remarks

Code594-3468954-7488

NW25 Flexible Tube (D=2000mm)

D=2000mm32671

594-3469

954-7490

NW40 Flexible Tube (D=500mm)

D=500mm32672

594-3470

954-7491

NW40 Flexible Tube (D=1000mm)

D=1000mm

32673

594-3471954-7492

NW40 Flexible Tube (D=1500mm)

D=1500mm32674

594-3472954-7493

NW40 Flexible Tube (D=2000mm)

D=2000mm

32675

A26-20301

954-7871

NW10 Center Ring

Al center ring, with neoprene O-ring

32820

0194-19096

954-7872

NW16 Center Ring

Al center ring, with neoprene O-ring

32821

0194-19101

954-7873

NW25 Center Ring

Al center ring, with neoprene O-ring

32822

0194-19119

954-7874

NW40 Center Ring

Al center ring, with neoprene O-ring

32823

A26-20305

954-7717

NW50 Center Ring

Al center ring, with neoprene O-ring

32824

0194-19135

954-7841

NW10 Stainless Steel Center Ring

SUS center ring, with Viton O-ring

32830

0194-19143

954-7842

NW16 Stainless Steel Center Ring

SUS center ring, with Viton O-ring

32831

0194-19151

954-7843

NW25 Stainless Steel Center Ring

SUS center ring, with Viton O-ring

32833

0194-19185

954-7844

NW40 Stainless Steel Center Ring

SUS center ring, with Viton O-ring

32835

0194-19193

954-7847

NW50 Stainless Steel Center Ring

SUS center ring, with Viton O-ring

32836

0194-07007

954-7885

NW10/16 Clamp

Al product32870

0194-07015

954-7886

NW20/25 Clamp

Al product32871

0194-07023

954-7887

NW32/40 Clamp

Al product32872

0194-07031

954-7888

NW50 Clamp

Al product32873

components

Note) Contact us for more information about CE (RoHS).

172

Canon ANELVA Corporation Vacuum Components Catalog

components

Memorandum

Canon ANELVA Corporation Vacuum Components Catalog

173

Vacuum Switches■ SummaryWith a single-pole double-throw contact, these vacuum switches enable ON and OFF point control signals to be simultaneously received at the maximum
or minimum operating pressure, while keeping thechange in operating pressure very small.
Additionally, the entire vacuum side is made of SUS304, and the welded air seal allows connection tohigh vacuum. Thus, these vacuum switches can also
be used as protection for automated vacuum equipment and as a switch for safety circuits.

components■ Features
1. With a single-pole double-throw contact, ON and
OFF point control signals can be simultaneously
received at the maximum or minimum operatingpressure.
2. Additionally, the entire vacuum side is made of
SUS-304, and the welded air seal allows connection
to high vacuum.
3. Has a long life of over 10,000 times, while keeping
the change in operating pressure very small.
4. Can be used up to 0.2MPa even when the inside ofType
Operating pressure(At black - yellow lead wire)954-7700

the vacuum switch is pressurized.
5. 	The 954-7720 vacuum switch is a quick-release typewith a φ15 gauge adapter.
6. 	The 954-7730 vacuum switch can be heated up to
250°C, allowing it to be used in ultra-high vacuum
equipment.

■ Applications
Protection of automated vacuum equipment and as aswitch for safety circuits. Retrieval of control signals
for various vacuum systems.
954-7720

954-7730

OFF
Atmospheric pressure minus 2.7±2.7x103Pa
ON
Atmospheric pressure minus 16±2.7x103Pa

OFF
Atmospheric pressure minus 2.7±2.7x103Pa
ON
Atmospheric pressure minus 14±2.7x103Pa

Approx. 10 -7Pa

Approx. 10 -8Pa

Operating degree of
vacuumLeak

1.33x10 -11Pa•m3/sec or lessFluidair, gas (excluding corrosive gases affecting SUS-304)

Withstand pressure
Allowable heating temperature
Operating environment
temperature
Material* 0.2MPa
40°C

250°C
-10°C to +40°C
Vacuum side all SUS-304

Life
Connection flange

φ70ICF

Weight510g

10,000 times or more
954-7806φ15 adapter
954-7832 gauge adapter
954-7833 gauge adapter
954-7834 gauge adapter
220g* When you add pressure inside the vacuum switch, take measures to prevent it from venting out of the φ15 adapter.

174

Canon ANELVA Corporation Vacuum Components Catalog

φ70ICF
580g

■ Specifications● Electrical ratings
954-7700, 7720 Vacuum switch
Rated volt- Non-inductive current (A)age
ResistanceLamp load
(V)
load
DC125
0.6
0.1

954-7730 Vacuum switch
Rated volt- Non-inductive current (A)age
ResistanceLamp load
(V)
load
DC125
0.4
0.05

Inductive load (A)Inductive
load
0.6

Motor load
0.1

Inductive load (A)Inductive
load
0.4

Motor load
0.05

DC250

0.3

0.05

0.3

0.05

AC125

1

0.45

1

0.75

AC125

15

3

10

4

AC250

1

0.3

1

0.3

AC250

15

2

10

3

The inductive load shall be greater than or equal to power factor 0.5(AC), and greater than or equal to time constant 7msec (DC).
The lamp load has x10 inrush current.
The motor load has x6 inrush current.

12
Length outside equipment 100 ± 5(Crimp terminal inside diameter φ4)

12Length outside equipment 100 ± 5(Crimp terminal inside diameter φ4)Black (COM)Red (N.O)
Yellow (N.C)

Black (COM)Red (N.O)
Yellow (N.C)

Black (COM)Red (N.O)
Yellow (N.C)

φ46±1

61.5±2

φ72.1±1(φ70)(ID12)93±2
φ41±0.5(φ70)

φ70 ICF

Fig. 1 954-7700 dimensions

Fig. 2 954-7720 dimensions● Contact structure954-7700, 7720, 7730 Vacuum switch
Atmospheric pressure minus 5.4x103Pa or more (Atmospheric pressure state)

Fig. 3 954-7730 dimensions

N.O
N.O(RedN.O
line)(Red N.O
line)(Red line)(Red
N.C line)
N.C(Yellow(YellowN.C
line)
N.Cline)(Yellow(Yellowline) line)

COM COM(Blackline)(BlackCOM
line)
COM(Black (Blackline) line)

If AC

If DC
COM COM(Blackline)(BlackCOM
line)
COM(Black (Blackline) line)

N.O
N.O(RedN.O
line)(Red N.O
line)(Red line)(Red
N.C line)
N.C
N.C(Yellow(Yellowline)N.C line)(Yellow (Yellowline) line)

Load
Load
Load
Load
Load
Load
Load
Load

N.O
N.O
(RedN.O
line)(Red N.O
line)(Red line)(Red
N.C line)
N.C
N.C(Yellow(Yellowline)N.C line)(Yellow (Yellowline) line)

Load
Load
Load
Load
Load
Load
Load
Load

COM COM(Blackline)(BlackCOM
line)
COM(Black (Blackline) line)

φ70 ICF

954-7700, 7720 Vacuum switch
Atmospheric pressure minus 13.3x103Pa or lower (vacuum state)954-7730 Vacuum switch Atmospheric pressure minus 11.3x103Pa or
lower (vacuum state)

N.O
N.O(RedN.O
line)(Red N.O
line)(Red line)(Red
N.Cline)N.C(Yellowline)(YellowN.Cline) N.C
(Yellow(Yellowline) line)

COM COM(Blackline)(BlackCOM
line)
COM(Black (Blackline) line)● Wiring method(18.8)(12.7)

69.5±3
φ15±0.1

119.5±378.2±2

φ41±0.5

50±1

12.7

φ41±0.5

18.5±1

47±1

φ46±1

■ Usage notes
Be sure to read the included "Usage notes" before using.

■ Ordering information
Parts Number

Model

Description

Remarks

Code753-0387

954-7700

Vacuum Switch

With φ70ICF

29200

A23-05138

954-7720

Vacuum Switch

For φ15 gauge port

29201

P25-02873

954-7730

Vacuum Switch

With φ70ICF

29202

Bakable to 250°C

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

175

components

12
Length outside equipment 100 ± 5(Crimp terminal inside diameter φ4)

Ancillary Materials
Bolts, Nuts, Washers

components

Bolts, Nuts, Washers

Note) Bolt dimensions are based on JIS B1180.

Bolts, nuts, and washers (Material: SUS304)
Type

Bolt
L

S

Bolts, and washers (Material: SUS304)
Remarks

Type

953-9120Size
M4 *3)

20

14

953-9104

953-0085

M6

32

18

953-9105953-9107

M6

35

18

953-9110

953-0088

M6

45

18

953-0091

M6

55

18

953-9100

M8

40

22

953-9101

M8

45

22

953-9106

M8

50

22

953-9102

M8

55

22

953-9103

M8

60

22

953-7801

M8

70

35

953-7802

M10

70

35

176

Each set of
25*1)
1 bag

Each set of
35*1)
1 bag

Bolt
Size

L

S

M6

18

18

M6

22

18

M8

25

22
22

953-9111M8

30

953-9122

M4 * 3)16

16

953-7811

M8

50

35

953-7812

M10

50

35

Remarks

Each set of
25*2)
1 bag
Each set of
35 *2) 1 bag*1) A set contains 1 bolt and 2 washers .
*2) A set contains 1 bolt and 1 washer.
*3) Size M4 is a hexagon socket bolt.
Note) Bolts and washers baked with molybdenum disulfide are available as a special order.

Canon ANELVA Corporation Vacuum Components Catalog

■ Ordering information
Parts Number
4-365017

Model
953-9120

Description
M4x20 Bolt · Nut · Washer

Remarks
M4x20 (25 sets), for φ34 ICF, hexagon socket bolt

Code
38700

MOD-41480

953-0085

M6x32 Bolt · Nut · Washer

M6x32 (25 sets)

38701

794-0509

953-9107

M6x35 Bolt · Nut · Washer

M6x35 (25 sets), for φ70 ICF

38703

MOD-41481

953-0088

M6x45 Bolt · Nut · Washer

M6x45 (25 sets)

38704

MOD-41482

953-0091

M6x55 Bolt · Nut · Washer

M6x55 (25 sets)

38705

MOD-41483

953-9100

M8x40 Bolt · Nut · Washer

M8x40 (25 sets), for tapped φ152 ICF

38706

MOD-41484

953-9101

M8x45 Bolt · Nut · Washer

M8x45 (25 sets), for φ114 ICF

38707

4-365020

953-9106

M8x50 Bolt · Nut · Washer

M8x50 (25 sets)

38708

MOD-41485

953-9102

M8x55 Bolt · Nut · Washer

M8x55 (25 sets), for φ203 ICF

38709

4-365021

953-9103

M8x60 Bolt · Nut · Washer

M8x60 (25 sets), for φ253 ICF

38710

A26-06376

953-7801

M8x70 Bolt · Nut · Washer

M8x70 (35 sets), for φ305 ICF

38716

P21-04823

953-7802M10x70 Bolt · Nut · Washer

M10x70 (35 sets), for φ356 ICF · φ406 ICF

38717

MOD-41594

953-9104

M6x18 Bolt · Washer

M6x18 (25 sets)

38711

MOD-41486

953-9105

M6x22 Bolt · Washer

M6x22 (25 sets), for tapped φ70 ICF

38712

MOD-41592

953-9110

M8x25 Bolt · Washer

M8x25 (25 sets)

38713

MOD-41593

953-9111

M8x30 Bolt · Washer

M8x30 (25 sets)

38714

A26-02723

953-9122

M4x16 Bolt · Washer

M4x16 (25 sets), for tapped φ34 ICF, hexagon socket
bolt

38715

P25-02830

953-7811

M8x50 Bolt · Washer

M10x50 (35 sets), with tapped φ305 ICF

38718

P25-02831

953-7812

M10x50 Bolt · Washer

M10x50 (35 sets), for tapped φ356 ICF and φ406 ICF

38719

components

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

177

Ultra-High Vacuum Type-L All-metal Valves951-7152951-7150

951-7148■ Summary
These all-metal ultra-high vacuum type-L valves
can be used up to 10 -8Pa or lower. The valve body ismade of austenitic stainless steel and the shaft seals
are made of austenitic stainless steel bellows. Thesevalves have an all-welded structure and the parts thatare exposed to vacuum are oil-free and clean. Fur-thermore, the valve sealing has a highly reliable capturing seal structure similar to the ICF flange. Thesevalves can be baked out up to 400°C or 450°C, making them ideal for ultra-high vacuum equipment subject to hard baking.

components■ Features
4. Quick, easy gasket replacement

1. Ultra-high vacuum range
The all-metal valve can be used in an ultra-highvacuum range of up to 10-8Pa or lower.
2. Capturing seal structure
For the valve seal, a highly reliable capturing seal
structure similar to the flange, is adopted (see Fig. 1).
3. High heat tolerance
The valve can be baked out up to 400°C or 450°C.

The valve sealing copper alloy gasket can be replaced using the included handle or gasket remover.
5. Parallel pipes can be connected(excluding the 951-7148 mini metal valve)
Because the valve a 3-port type valve, pipes can connected with the side port side parallel.
6. Simple, easy maintenance
Maintenance such as replacing the gasket or reapplying the atmosphere side lubricant is simple andeasy.

Seal edge

Copper alloy gasket

Fig. 1 Valve sealing structure

178

Canon ANELVA Corporation Vacuum Components Catalog

■ Specifications
Type951-7148

Operating vacuum range

Atmospheric to 10 -8Pa or less

Leak
Conductance when fully
openedAllowable heating temperature
Initial sealing torque6.7x10 -11Pa•m3/sec or lessMaximum sealing torque23.5N•m

Main component material

Body: SUS-304
Bellows: SUS-304
Valve sealing gasket: Copper alloy
Bonnet gasket: SUS-321 silver plated metal
Hollow O-ring

4L/sec
400°C
Approx. 15.7N•m

Connection flange

φ34ICF flange

Weight0.7kg

Dimensions

See Fig. 2
460F (Angular drive dimension□9.53mm)(JIS B4650 plate type nominal 450 equivalent)

Applicable torque wrench(Option)Gasket remover: 1S
Handle: x1
Nominal 2.5 hexagonal wrench: x1
Nominal 4 hexagonal wrench: x1
Wire brush: x1
Spare washer: Large x1, small x1, 2 total
Spare gasket: x1

Attachments* All values are based on a valve with the inside replaced with a vacuum or inert gas such as Ar gas.

components■ Dimensions diagram(□ 9.7)

(φ46)
(φ16)

(φ19.2)

Fully opened 126 ± 3
Fully closed 110 ± 3

38±1

(φ36)

(φ19.2)

φ34 ICF Rotatable flange

38±1
φ34 ICF Rotatable flange

Fig. 2 951-7148 mini metal valve

Canon ANELVA Corporation Vacuum Components Catalog

179

■ Specifications
Type951-7150

951-7152
Atmospheric to 10 -8Pa or less

Operating vacuum range

6.7x10 -11Pa•m3/sec or less

Leak
Conductance when fully
openedAllowable heating temperature*

30L/sec

100L/sec
450°C

Initial sealing torque29.4 to 34.3N•m

78.4 to 127.4N•m

127.4N•m

225.4N•m

Maximum sealing torque

Body: SUS-304
Bellows: SUS-304
Valve sealing gasket: Copper alloy

Main component material
Connection flange

φ70ICF flange

φ114ICF flange

1.6kg

7kg

WeightDimensions
Applicable torque wrench

Attachments

See Fig. 3

See Fig. 4

1300F (Angular drive dimension□12.7mm)

2800F (Angular drive dimension□19.05mm)(JIS B4650 plate type nominal 1300 equivalent)(JIS B4650 plate type nominal 2800 equivalent)

Handle: x1
Nominal 2.5 hexagonal wrench: x1
Nominal 6 hexagonal wrench: x1
Wire brush: x1
Spare washer: Large x1, small x1, 2 total
Spare gasket: x1

Handle: x1
Nominal 10 hexagonal wrench: x1
BS ball point driver: x1
Wire brush: x1
Spare washer: Large x1, small x1, 2 total
Spare gasket: x1* All values are based on a valve with the inside replaced with a vacuum or inert gas such as Ar gas.

■ Dimensions diagram

components( □ 12.9)

(φ23)

62±1

(φ38)

(φ50)

(φ38)

Fully opened 167±3
Fully closed 142± 3

φ70 ICF Rotatable flange(φ38)

φ70 ICF Fixed flange

Leak groove location
62±1

62±1
φ70 ICF Rotatable flange

Fig. 3 951-7150 φ38 metal valve

180

Canon ANELVA Corporation Vacuum Components Catalog

■ Dimensions diagram(□19.2)

(φ84)
(φ35)

(50)

(76)

(90)

φ114 ICF
Fixed flange(φ63.5)(75)(φ63.5)100±2(φ63.5)(77)

φ114 ICF
Rotatable flange

247±5 (Valve fully closed)

297±5 (Valve fully opened)(Stroke)(50)

Hexagonal portion

200±4

φ114 ICF Rotatable flange

100±2

Leak groove location

Fig. 4 951-7152 2.5″ metal valve

Replace the following maintenance/consumable partsat the end of their product life.
Type
Nominal di- Nominal di- Nominal diameter 3/4" ameter 1.5" ameter 2.5"
951-7148 951-9150 951-7152

Name

Quantity per
unit

Gasket1(For valve seat seal)

951-7148

951-9150

951-7152

Washer (1)951-7148

951-7150

951-7152

Washer (2)11● Usage notes
1. Note the following when baking this valve.
(1) Depending on the baking temperature and interval, lubricant must be reapplied to the atmo-

sphere side moving parts. If lubricant is not reapplied as needed, lubrication will loose its effect,
which can result in galling. Lubricants must beordered separately (Name: Threebond 1901).
(2) Do not bake with atmosphere or active gas inside
the valve. Otherwise, the seal may oxidize and become irreparable. Therefore, bake with the insideof the valve replaced with a vacuum or inert gas
such as Ar gas.
2. Make sure there are no foreign particles such as
metal dust inside the valve.

■ Ordering information
Parts Number

Model

Description

Remarks

Code0190-06152

951-7150

φ38 Metal ValveWith φ70 ICF, 450°C heat resistance

30010

0190-07158

951-7152

2.5"Metal Valves

With φ114 ICF, 450°C heat resistance

30020

P25-04506

951-7148

0191-25794
MOD-70277

951-9150

Mini Metal ValveWith φ34 ICF, 400°C heat resistance

30030

Three Bond 1901 Lubricator (500g Can)For 951-7148/7150/7152

39730

Washer(1)For 951-7150, service parts

30800

MOD-70281

951-9150

Washer(2)For 951-7150, service parts

30801

MOD-70283

951-9150

GasketFor 951-7150 valve seat seal, service parts

30802

824-8385951-7152

Washer(1)For 951-7152, service parts

30803

824-8386951-7152

Washer(2)For 951-7152, service parts

30804

823-4344951-7152

GasketFor 951-7152 valve seat seal, service parts

30805

A26-09208

951-7148

Washer(1)For 951-7148, service parts

30814

A26-09209

951-7148

Washer(2)For 951-7148, service parts

30815

A26-09203

951-7148

GasketFor 951-7148 valve seat seal, service parts

30816

P25-15028

1300F Torque Wrench

For 951-7150 (for φ38 metal valve)

38634

N48092136

2800F Torque Wrench

For 951-7152 (for 2.5″ metal valve)

38635Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

181

components■ Options (maintenance and consumable parts)

Ultra-High Vacuum Type-L Polyimide Valves■ Summary
These type-L valves can be used at an ultra-highvacuum range of up to 10 -8Pa. The valve body ismade of austenitic stainless steel and the shaft seals
are made of austenitic stainless steel bellows. The
vacuum seal is made of polyimide resin, which has
high heat tolerance and low gas emission. Thesevalves are ideal for ultra high-vacuum equipment witha bake-out temperature of 150°C or more.

951-7145
951-7120■ Features
Whether opened or closed, the polyimide seal canendure repeated baking from room temperature to a
maximum of 300°C.
2. Seal material with low gas emission

than fluoro rubber (Viton), it can easily achieveultra-high vacuum of about 10-8Pa. (See Fig. 1, 2)
3. Low tightening torque
Polyimide seals do not require as much tightening
torque as metal seals.

Since the gas emission of polyimide resin is lower−8×10 −58
64
2

×10 −6−98
64

×10 −710VITON

PRESSURE (Pa)

10

2
8
6
4

×10 −810

POLYIMIDE−1010

×10 −9

2
−11

8
6
4

×10 −10OUTGASSING RATE (Pa m3 /sec-cm 2)components

1. High heat tolerance

2
10

2

Bakeout Off

8
6
4
2

VITON (Unbaked)
VITON (Baked)
POLYIMIDE (Unbaked)
POLYIMIDE (Baked)
EMPTYCHAMBER
COPPER GASKETS (Baked)

8
6
4
2
8
6
4
2
8
6
4
2
8
6
4
2

−12

0

100

200

TEMPERATURE (°C)

Fig. 1 Gas emissions

182

8
6
4

300

0

100

200

300

400

500

600

TIME (Minutes)

Fig. 2 Seal material comparison (ultimate pressure)Canon ANELVA Corporation Vacuum Components Catalog

■ Specifications
Type951-7145
300°C

300°C

Polyimide resin

Polyimide resin*41225 to 1921N (2 to 3.4N•m)

3920 to 4900N (4.9 to 5.9N•m)

2626N (5.9N•m)

7840N (14.7N•m)

Operation

If baked several times( use
adjustable pin face wrench )ManualManualConductanceLeak951-7120
Atmospheric to approx. 10 -8Pa

Operating vacuum range
Allowable heating temperature*1,2
Seal material (gasket)
Recommended sealing force(sample tightening torque*5)
Maximum sealing force(sample tightening torque*5)

1L/sec*3-1130L/sec3-11

6.7x10 Pa•m3/sec or less

6.7x10 Pa•m /sec or lessDimensions

Fig. 3Fig. 3

Material used

Main body: SUS-304
Bellows: SUS-304L
Handle: AL alloy (black alumite)

Main body: SUS-304
Bellows: SUS-304L
Handle: AL alloy (black alumite)

φ34ICF flange
0.41kg-

φ70ICF flange
1.6kg
Adjustable pin face wrench, hexagonal wrench

Connection flange
WeightAttachments*1. All values are based on a valve with the inside replaced with a vacuum or inert gas such as Ar gas.
*2. 260°C if heated continuously.
*3. Gas permeation of polyimide resin is not within specifications.
*4. Please consult with us about upgrading the bonnet seal to a metal seal (SUS321 silver plated O-ring).
*5. The tightening torque is a reference value only because baking increases the friction coefficient of thedriving screws and changes the balance between the tightening torque and tightening seal force.

components■ Dimensions diagram

(φ64)

(24)

(φ51)

(φ38)

(112.5)(φ28)

Fully opened 165±4
Fully closed 140±4(30)

φ34 ICF
Fixed flange(φ12.8)

62±1

(φ51)

(φ12.8)

38±1

105±2

(Both fully opened and fully closed)

φ70 ICF Fixed flange(φ38)

Leak groove location
38±1

62±1
φ70 ICF Rotatable flange

φ34 ICF Rotatable flange

951-7145 mini polyimide valve

951-7120 φ38 polyimide valve
Fig. 3

Canon ANELVA Corporation Vacuum Components Catalog

183

■ Maintenance and consumable parts
951-7145 mini polyimide valve

951-7120 φ38 polyimide valve

Main seal (valve seat)951-7145 gasket

951-7120 gasket

Bonnet seal

951-7145 bellows gasket

951-7120 bellows gasket■ Usage notes
1. Avoid damaging the seal surface with foreign particles such as metal dust because polyimide resin isused for the valve vacuum seal.
2. Solid lubricant is applied to the valve open/close
screws to prevent "galling" at high temperature.

■ Ordering information
Parts Number

Model

Description

Remarks

Code0190-04841

951-7145

Mini Polyimide ValveWith φ34 ICF

30200

3-340209951-7120

φ38 Polyimide ValveWith φ70 ICF

30210

4-350844951-7145

Bellows Gasket (Polyimide)

For 951-7145 bonnet seal

30806

4-350848951-7145

Gasket (Polyimide)

For 951-7145 valve seat seal

30807

4-350795

951-7120

Gasket (Polyimide)

For 951-7120 valve seat seal

30809

4-350794

951-7120

Bellows Gasket (Polyimide)

For 951-7120 bonnet seal

30810

components

Note) Contact us for more information about CE (RoHS).

184

Canon ANELVA Corporation Vacuum Components Catalog

components

Memorandum

Canon ANELVA Corporation Vacuum Components Catalog

185

Small size and low price!

"V Series" Roughing Pump Valves
V-025RV■ Summary
These type-L valves can be used in a high vacuum range of up to 10 -4Pa. These valves use a fluoro rubber (Viton)
O-ring for the vacuum seal and shaft seal, making them ideal for high vacuum equipment or as a roughing pumpvalve for ultra-high vacuum equipment.

■ Type and name notation■ Features

components

1. High vacuum range supported
A high vacuum range up to approximately 10-4Pa is
supported. (Fluorine grease is used only on the shaft
seal.)
2. Open/Close position sensor switch
The air cylinder used in the compressed air driven
valves has a position sensor switch for opening andclosing.

186

Display example

V-025RV-□N roughing pump valve
C
M

Valve drive system
Compressed air driven+open/
close sensor x2
ManualCanon ANELVA Corporation Vacuum Components Catalog

■ Roughing valve specifications
Drive system

Air pressure

ManualType

V-025RV-CN

V-025RV-MN

Stationary

Atmospheric pressure to approx. 10 -4Pa
6.7x10 -11Pa � m3/sec or less

Open/close

Up to 10 -5Pa � m3/sec

Pressure range
He leak*1
Conductance

7L/secAllowable heating temperature

60°C

Main unit
Main component material

SUS-304

Moving partAL alloy (air cylinder)

Nylon 66, polypropylene (handle)

Fluoro rubber (Viton) O ring (main seal, shaft seal, bonnet seal)

Vacuum sealmaterial

Shaft seal lubricant: Perfluoropolyether grease

Operating air pressure

0.4 to 0.6 MPa---

Air consumption (L /cycle)*2

0.024

---

Air supply inlet

M5

---

See the ■ Sensor switch specifications---

Open/close sensor
Used fluid

Atmosphere or gas (excluding corrosive gas)

Dimensions

See the ■ Dimensions diagram

Weight0.63kg0.58kgConnection flange*3

NW25 flange*1. Gas permeation of the fluoro rubber (Viton) O-ring is not within specifications.
*2. Air consumption for one cycle (open-close) at an air pressure of 0.5MPa.
*3. The NW25 flange is a clamp flange for vacuum equipment. It uses an elastomer gasket (mainly fluoro rubber). For details, refer to the Quick
Coupling section in our Vacuum Components Piping Parts Catalog.

■ Sensor switch specifications

Type, wiring method

Specifications
Program controller (sequencer), for relay
Contact, 2-wire

Load voltage

12/24V DC

100V AC

Load current

5 to 50mA

7 to 20mA

Internal voltage dropLamp

components

Applications

2.4 V or less
LED (lit when ON)

Leak current

0mA

Internal circuit

See figure at right

Lead wire length

1m (Oil resistant vinyl cabtire cord 2-core 0.2 )Maximum collision294m/s2 (30G)

Insulating resistance

20MΩ or more with 500V DC ohmmeter

Withstand voltage
Environment temperature

1000V AC for 1 minuteProtection structure

Brown line (+)(White line)2-10 to +60°C
IEC standard IP67, JIS C0920 (watertight), oil
proofBlue line (-)(Black line)

▲

Item

Sensor switch internal circuit

Note 1. The sensor switch is sensitive to magnetic fields. Therefore, avoid using the switch near strong external magnetic fields or high-current
power lines.
2. Do not connect the sensor switch directly to the power supply. Be sure to connect the load in series and use within the specified load current.
3. When connecting an inductive load (such as an electromagnetic relay), be sure to provide a contact protection circuit because surge voltage (inductive surge) will occur when the sensor switch is turned OFF.
DC: Normal rectifier diode, AC: CR (0.033 to 0.1μF capacitor, 1 to 3KΩ resistor)
4. When using with DC, connect so that the brown wire (white wire) is the positive side and the blue wire (black wire) is the negative side.

Canon ANELVA Corporation Vacuum Components Catalog

187

■ Dimensions diagram

Air supply inlet

NW25 flange

NW25 flange

Automated valve

NW25 flange

NW25 flange

Manual valve■ Ordering information
Parts Number

Model

Description

0190-00253

V-025RV-CN

NW25 Pneumatic L Type Valve0190-00237

V-025RV-MN NW25 Manual L Type Valve

Remarks

30000

Nominal diameter: 25, manual

30001

components

Note) Contact us for more information about CE (RoHS).

188

Code

Nominal diameter: 25, with double-acting
pneumatic actuation+open/close sensorx2

Canon ANELVA Corporation Vacuum Components Catalog

components

Memorandum

Canon ANELVA Corporation Vacuum Components Catalog

189

Super long life and improved maintenance!

"V Series" Type-L Valves
V-040LV/V-065LV/V-100LV■ Summarycomponents

These type-L valves have been designed to have a longer lifespan and improved ease of maintenance. Because
hastelloy alloy is used, the bellows inside the valve has a longer lifespan (compared with our existing product*1). In addition, the MSB series uses a metal hollow O-ring for the bonnet, which prevents gas permeation of theair, making it ideal for gas analysis vacuum equipment. A large assortment of sizes and connection flanges areavailable for both manual and compressed air powered valves.

■ Features
1. Ultra-high vacuum supported
The STD series can be used in an ultra-high vacuum range up to approximately 10-7Pa*3. The MSB
series*4 can be used up to approximately 10-8Pa*3. In
addition, if after purchasing the STD series, only
a few parts need to be replaced to upgrade to theultra-high vacuum compatible MSD series.
2. Long-life valve*2

The built-in bellows is a molded bellows. It is madeof hastelloy alloy considering cost and product life*5.
3. Open/Close position sensor switch
Each standard air cylinder used in the valves has aposition sensor switch (magnetic sensor) for opening
and closing.
4. High heat tolerance
The air cylinder for compressed air powered valvesis heat-resistant up to 120°C. Therefore, bake-outs
are possible with the valve body heating up to 150°C
for the STD series and 200°C for the MSB series
when the valves are opened. (However, please ensure that the air cylinder does not exceed 120°C andthe sensor switch does not exceed 60°C.)

190

5. Variety of connection flanges
The valve body is made of stainless steel so thateven a special connection flange can be welded easily to the body.
6. Simple, easy maintenanceNo special tools are needed. Since the bellows canbe easily removed from the valve drive, the parts
inside the valve can be quickly cleaned and themaintenance parts easily replaced.
*1: Bellows product life comparison with our 951 series type-L
valve (about 5 times longer).
*2: Standard specification using a fluoro rubber O-ring for the bon
net flange.
*3: 	The vacuum rate is only a reference value because there isemission of gas such as moisture from inside the valve at the
beginning of usage.
Also note that the ultimate pressure varies depending on thepump to be used.
*4: Metal seal specification using a metal hollow O-ring for the bonnet flange seal. (The part that separates the passage is madeusing a fluoro rubber O-ring.)*5: 	The bellows product life varies depending on the condition ofuse. Check the maintenance timing of the actual equipment.

Canon ANELVA Corporation Vacuum Components Catalog

■ Type and name notation

Display example V-040LV-SCN
Valve size: 40
BonnetGasket: STD series (fluorine rubber)
Valve drive system: Double-acting compressed air driven
Connection flange: NW40 flange
Open/close sensor: two included■ Valve specifications
STD series

Size

40

MSB series

65

100

Atmospheric to approximately 10 -7Pa*1

Pressure range
He leak
Allowable
heating temperature

100

Atmospheric to approximately 10 -8Pa*1

6.7x10 -11Pa•m3/sec or less*2

Valve seat-11

External
Valve
openedValve closed

6.7x10 Pa•m /sec or less1.3x10 -11Pa•m3/sec or less*2

150°C*3

200°C*3

3*2

125°C*3

Valve body

SUS-304

Bellows
Main component material

65

See ■ Type name notation

Hastelloy C-22
Air cylinder (pneumatic drive valve): Aluminum alloy, fluoro rubber
Handle (manual valve): Aluminum alloy
Fluoro rubber O-ring (main seal)
Fluoro rubber O-ring
SUS321 silver plated metal tube O-ring(Bonnet seal)
0.4 to 0.6MPa

Moving part
Vacuum sealmaterial

Operating air pressure
Air consumption (L/cycle)*4

0.12

Air supply inlet

Rc1/8

0.47

1.22
Rc1/4

0.12

0.47

Rc1/8

Atmosphere or gas (excluding corrosive gas)

Dimensions

See ■ Dimensions diagram

Weight1.22
Rc1/4

Used fluid

Connection flange*5

components

Type

40

See ■ Dimensions table
Size

40

65

100

ICF flange

φ70ICF rotation

φ114ICF rotation

φ152ICF rotation

NW flange

NW40

NW63

NW80

Former JIS flange

Former JIS 40A

Former JIS 65A

Former JIS 100A

*1: The vacuum rate is only a reference value, because there is emission of gas such as moisture from inside the valve at the beginning of usage.
Also note that the ultimate pressure varies depending on the pump to be used.
*2 Gas permeation of the fluoro rubber (Viton) O-ring is not within specifications.
*3. The maximum withstand temperature of the sensor switch is 60°C. Please remove the sensor switch when heating up to 120°C. If heating of the
air cylinder can be kept under 120°C, the valve body can be heated up to 150°C for the STD (with the valve open) and 200°C for the MSB (continuously for four hours with the valve open).
*4. Air consumption for one cycle (open-close) at an air pressure of 0.5MPa. About half the value of NC valves.
*5. For details of the connection flanges, see ■ Dimensions diagram, ■ Dimensions table, and ■ Connection flange.

Canon ANELVA Corporation Vacuum Components Catalog

191

■ Sensor switch specifications
Item

Specifications

Applications

Program controller (sequencer), for relay

Type, wiring method

Contact, 2 wire

Load voltage

12/24V DC

100V AC

Load current

5 to 50mA

7 to 20mA

Internal voltage drop

2.4V or less

Lamp

LED (lit when ON)

Leak current

0mA

Internal circuit

See figure at right.

Lead wire length
Maximum collision
Insulating resistanceWithstand voltage
Environment temperature
Protection structure

Brown line (+)

Blue line (-)

2

1m (Oil resistant vinyl cabtire cord 2 core 0.2mm )294m/s2 (30G)
20MΩ or more with 500V DC ohmmeter
1000V AC for 1 minute-10 to +60°C

Sensor switch internal circuit

IEC standard IP67, JIS C0920 (watertight), oil proof

components

Note 1. The sensor switch is sensitive to magnetic fields. Therefore, avoid using the switch near strong external magnetic fields or high-current
power lines.
2. Do not connect the sensor switch directly to the power supply. Be sure to connect the load in series and use within the specified load current.
3. When connecting an inductive load (such as an electromagnetic relay), be sure to provide a contact protection circuit because surge voltage (inductive surge) will occur when the sensor switch is turned OFF.
DC: Normal rectifier diode, AC: CR (0.033 to 0.1μF capacitor, 1 to 3KΩ resistor)
4. When using with DC, connect so that the brown wire (white wire) is the positive side and the blue wire (black wire) is the negative side.

■ Dimensions diagram table
Type

Connection flange

A

C2

171

159

173

161

63

171

159

2.7

235

201

6.0

(2) Flange

V-040LV-□□I

φ70ICF

φ70ICF63

V-040LV-□□N

NW40

NW40

65

V-040LV-□□B

JIS 40A (VF)JIS 40A (VG)

V-040LV-□□A

JIS 40A (VG)

JIS 40A (VF)V-065LV-□□I

φ114ICF

φ114ICF102.5

V-065LV-□□N

NW63

NW63

88

V-065LV-□□B

JIS 65A (VF)JIS 65A (VG)

V-065LV-□□A

JIS 65A (VG)

JIS 65A (VF)

V-100LV-□□I

φ152ICFV-100LV-□□N

34

60.5

220.5 186.5

D

E

F

G

H

I

Weight(kg)

C1(1) Flange

B

2.0
78

114

60

70

10

15

8

10.5

8

10.5

Rc
1/8

Rc
1/4

1.6

4.5

102.5

232.5 198.5

6.0

φ152ICF

135

327

283

11.5

NW80

NW80

105

297

253

V-100LV-□□B

JIS 100A (VF)JIS 100A (VG)

V-100LV-□□A

JIS 100A (VG)

JIS 100A (VF)

327

283

135

89.2

150

100

Note 1. ICF is a rotatable flange.
Note 2. The JIS flange is a maintenance flange for JIS B 2290 (1998) (commonly called a former JIS flange).
The bolt holes are distributed around the center.
Note 3 Use the M6 female screw on the manual valve's handle (V-100LV only) to attach the handle grip.

192

Canon ANELVA Corporation Vacuum Components Catalog

15

13

11

Rc
1/4

8.7
11.5

■ Dimensions diagram
See Note 3(Unchanged when the valve is opened or closed)

NW40 flange shape

Automated valve

NW63 flange shape

Manual valve

NW80 flange shape■ Connection flanges
The ICF flange is an ultra-high vacuum flange that uses a metal gasket. It is a JVIS-003 compliant conflat
flange. Refer to the ultra-high vacuum flange in our catalog for details.
● NW flange
The NW flange is a clamp flange for vacuum equipment. It uses elastomer gaskets (mainly fluoro rubber). The
flange shape is the shape on the side of the ■ Dimensions figure. For details about the NW40 flange, refer to the
Quick Coupling section in our catalog.
● Former JIS flangeThis flange complies to the standards specified in JIS B 2290:1968 and were widely adopted in the vacuum industry until the standards were revised in 1998. The flange is used for the combination of the VF flange without
the O-ring groove and the VG flange with the O-ring groove.
Note that the flange is not compatible with JIS B 2290:1998.
● Customer specified flange
Contact us if you need a valve that combines the above flanges or special flanges other than the above.

Canon ANELVA Corporation Vacuum Components Catalog

193

components● ICF flange

components■ Ordering information
Parts Number

Model0190-00164

V-040LV-SCN

Description
DN40 Pneumatic L Type Valve

Remarks

Code

STD+compressed air driven+sensor+NW40 flange

30103

0190-00203

V-040LV-SCA

DN40 Pneumatic L Type Valve

STD+compressed air driven+sensor+JIS (C) flange

30102

0190-00229

V-040LV-SCB

DN40 Pneumatic L Type Valve

STD+compressed air driven+sensor+JIS (B) flange

30101

0190-00318

V-040LV-SDN

DN40 Pneumatic NC L Type Valve

STD+NC type+sensor+NW40 flange

30107

0190-00350

V-040LV-SDA

DN40 Pneumatic NC L Type Valve

STD+NC type+sensor+JIS (C) flange

30106

0190-00376

V-040LV-SDB

DN40 Pneumatic NC L Type Valve

STD+NC type+sensor+JIS (B) flange

30105

0190-00465

V-040LV-SMN

DN40 Manual L Type Valve

STD+manual+NW40 flange

30115

0190-00481

V-040LV-SMA

DN40 Manual L Type Valve

STD+manual+JIS (C) flange

30114

0190-00499

V-040LV-SMB

DN40 Manual L Type Valve

STD+manual+JIS (B) flange

30113
30109
30111

0190-00431

V-040LV-MCI

DN40 Pneumatic L Type Valve MSB

MSB + compressed air driven + sensor + φ70 ICF
flange0190-00512

V-040LV-MMI

DN40 Manual L Type Valve MSB

MSB + manual + φ70 ICF flange

0190-00546

V-065LV-SCN

DN65 Pneumatic L Type Valve

STD+compressed air driven+sensor+NW63 flange

30123

0190-01186

V-065LV-SCA

DN65 Pneumatic L Type Valve

STD+compressed air driven+sensor+JIS (C) flange

30122

0190-00601

V-065LV-SCB

DN65 Pneumatic L Type Valve

STD+compressed air driven+sensor+JIS (B) flange

30121

0190-00643

V-065LV-SDN

DN65 Pneumatic NC L Type Valve

STD+NC type+sensor+NW63 flange

30127

0190-00685

V-065LV-SDA

DN65 Pneumatic NC L Type Valve

STD+NC type+sensor+JIS (C) flange

30126

0190-00708

V-065LV-SDB

DN65 Pneumatic NC L Type Valve

STD+NC type+sensor+JIS (B) flange

30125

0190-00805

V-065LV-SMN

DN65 Manual L Type Valve

STD+manual+NW63 flange

30135

0190-00821

V-065LV-SMA

DN65 Manual L Type Valve

STD+manual+JIS (C) flange

30134

0190-00839

V-065LV-SMB

DN65 Manual L Type Valve

STD+manual+JIS (B) flange

30133

0190-00782

V-065LV-MCI

DN65 Pneumatic L Type Valve MSB

MSB + compressed air driven + sensor + ICF flange

30129

0190-00855

V-065LV-MMI

DN65 Manual L Type Valve MSB

MSB + manual + ICF flange

30131

0190-00889

V-100LV-SCN

DN100 Pneumatic L Type Valve

STD+compressed air driven+sensor+NW flange

30143

0190-00928

V-100LV-SCA

DN100 Pneumatic L Type Valve

STD+compressed air driven+sensor+JIS (C) flange

30142

0190-00944

V-100LV-SCB

DN100 Pneumatic L Type Valve

STD+compressed air driven+sensor+JIS (B) flange

30141

0190-01699

V-100LV-SMN

DN100 Manual L Type Valve

STD+manual+NW flange

30155

0190-01712

V-100LV-SMA

DN100 Manual L Type Valve

STD+manual+JIS (C) flange

30154

0190-01720

V-100LV-SMB

DN100 Manual L Type Valve

STD+manual+JIS (B) flange

30153

0190-01681

V-100LV-MCI

DN100 Pneumatic L Type Valve MSB MSB + compressed air driven + sensor + ICF flange

30149

0190-01738

V-100LV-MMI

DN100 Manual L Type Valve MSB

30151

MSB + manual + ICF flangeNote) Contact us for more information about CE (RoHS).

194

Canon ANELVA Corporation Vacuum Components Catalog

components

Memorandum

Canon ANELVA Corporation Vacuum Components Catalog

195Ultra-High Vacuum Variable Leak Valves951-7172

These variable leak valves are designed for vacuum
equipment for which the amount of introduced gas
flow must be controlled. These valves enable theintroduction of remarkably small amounts of gas.
The minimum controllable leakage is less than

6.7x10 -9Pa•m3/sec.
In addition, the valves are all-metal and can be baked
up to 450°C, making them ideal for ultra-high vacuum
equipment.

■ Features■ Specifications

1. Seal with high resistance to heat and external shock
WC-type cemented carbide combined with copper alloy is used for sealing. No cracking from thermallyor mechanical vibrations will occur; unlike sealing
using a sapphire and copper alloy combination.
2. Stable control of minute gas flow
Introduction of remarkably small amounts of gas ispossible. The minimum controllable leakage is lessthan 6.7×10-9Pa•m3/sec (He gas introduced, primaryside gauge pressure at 0.2MPa).
3. High heat tolerance
Made of all-metal and can be baked up to 450°C.
4. Wide gas flow control range.
The gas flow can be controlled over a wide range.
5. Connectable to ultra-high pressure
The material of each component has been thoroughly reviewed so that it can be connected to ultra-highvacuum equipment.

Operating vacuum
range
Adjustable
Minimum leak*1
Leak when valve isclosed

6.7x10 -9Pa•m3/sec or less

Allowable heating
temperature*2

450°C (open or closed)

Gasket life

Component material
Connection
flangecomponents■ SummaryGas outlet side
Gas inlet side

Attachments■ Applications

Atmospheric to approx. 10 -8Pa

6.7x10 -11Pa•m3/sec or lessApprox. 300 seals (at room temperature)
Approx. 30 seals (with baking)(Gasket replaceable)
Main body: SUS-304
Seal: WC type cemented carbide
Gasket: Cu alloy
φ70ICF fixed flange
φ8xφ6 SUS-304 tube (951-7170)
φ34ICF with fixed flange (951-7172)
951-9160 gasket x2
951-9160 ring x2
951-9160 wrench x1
Nominal bore 5 hexagonal wrench x1
Nominal bore 8 hexagonal wrench x1
1.3kg

Vacuum equipment for which the amount of intro-

Weightduced gas flow must be controlled.

*1. Values with 0.2MPa pressure He gas connected to the gas inletside.
*2. Values with the gas inlet side and φ70ICF side replaced with avacuum or inert gas such as Ar gas.

Sputtering equipment, gas analysis equipment.
Physics experiment/research equipment.

196

Canon ANELVA Corporation Vacuum Components Catalog

■ Maintenance and consumable parts● Dimensions diagram

Replace the following maintenance/consumable parts

Type951-7170: With φ8 SUS tube on inlet side951-7172: with φ34 ICF flange on inlet sideat the end of their product life.
Type

Name

Quantity per unit

951-9160

Gasket1

951-9160

Ring

1

951-9160

Spring washer

544 ± 2112 ± 551 ± 3(951-7172)(φ70)
φ70 ICF Fixed flange

33 ± 3(φ34)(12.7)

25 ± 5

φ44.5 ± 0.5(φ8)

50 ± 2(951-7170)(7.5)

φ34 ICF Fixed flange

Leak groove location

1. Note the following when baking this variable leakvalve.
● Depending on the baking temperature and interval, lubricant must be reapplied to the atmosphere side moving parts. If lubricant is not reapplied as needed, lubrication will loose its effect,
which can result in galling. Lubricants must beorderd separately (Name: Threebond 1901).
● Do not bake with atmosphere or active gas inside
the valve (including the gas inlet side). Otherwise,
the seal may oxidize and become irreparable.
Therefore, bake with the gas inlet side and φ70ICF
side replaced with a vacuum or inert gas such as Ar
gas.

2. Make sure there are no foreign particles such as
metal dust inside the valve.
In addition, if there is such risk in the gas introduced from the primary side, a filter should beplaced in the piping.
3. Be careful of the thermal effects of the valve.
	Thermal effects of the valve appear significantly
when introducing a small gas flow and the flow ratechanges as the temperature changes. Therefore,
maintain the valve at a constant temperature inorder to perform precise control of the gas flow.
4.	This variable leak valve cannot be used to introduce
corrosive gas.

■ Ordering information
Parts Number

Model

Description

Remarks

Code753-0378951-7170

Variable Leak ValveWith φ70ICF, inlet side φ8SUS tube

31000

803-0666951-7172

Variable Leak ValveWith φ70ICF, inlet side φ34ICF tube

31001

MOD-70344

951-9160

GasketFor 951-7170/7172

30824

MOD-70345

951-9160

Ring

For 951-7170/7172

30825

MOD-70333

951-9160

0191-25794

Spring Washer

For 951-7170/7172

31802

Three Bond 1901 Lubricator (500g Can)For 951-7170/7172

39730

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

197

components■ Usage notes

Gas Inlet Valves951-7179 Inlet Valve951-7180 Inlet Valve951-7177 Leak Valve951-7178 Leak Valve951-7190 Leak Valve951-7192 Leak Valve■ 951-7179 Inlet Valve
This leak valve is used for introducing specified gases
into vacuum equipment. The shaft seal is made of an
austentic stainless steel bellows. The vacuum seal ismade of fluoro rubber (Viton).
This valve is ideal as a gas introduction valve for leaking high vacuum or ultra-high vacuum equipment.

● Features
1. Ultra-high vacuum range

The shaft seal uses a bellows to prevent atmospheric
air from being mixed into the gas being introduced.
3. High heat tolerance

951-7179● Dimensions diagram
951-7179(φ38)

951-7179, 951-7180

61±2

Atmospheric to approx. 10 -7Pa

Fig. 1

6.7x10 -11Pa•m3/sec or less*1

951-7180

φ8.5mmAllowable heating
temperature*2

150°C when valve opened,
125°C when valve closed

Main component
material

Vacuum seal: Fluoro rubber (Viton)*3
Valve body: SUS304
Bellows: SUS304L
Handle: Phenol resin

Connection flange
WeightDimensions

φ70ICF, NW25 flange
0.5kg
See Fig. 1, 2

(φ38)

(φ30)

*1. Gas permeation of the fluoro rubber (Viton) is not with specifications.
*2. Remove the handles before baking.
*3. The main seal and bonnet seal.

198

Canon ANELVA Corporation Vacuum Components Catalog

61±2Fig. 230±3Orifice diameter(φ10)

Operating vacuum
range
Leak when valve isclosedSpecifications

Fully closed 86 ± 4

Type

(φ30)
(φ10)

Item

25.3±3

Fully closed 81 ± 4● Specifications

Fully opened 86 ± 4

The valve can be baked up to 150°C.
4. Simple, easy maintenanceFully opened 91 ± 4components

An ultra-high vacuum range of up to approximately
10-7Pa is supported.
2. No atmospheric air mixing

■ 951-7177 Leak Valve■ 951-7178 Leak Valve
These leak valves are used for introducing specified
gases into vacuum equipment. The vacuum seal andshaft seal are made of fluoro rubber (Viton).
These valves are ideal as an atmospheric air/specified gas introduction valve for leaking high vacuum or
ultra-high vacuum equipment.

● Features
1. Ultra-high vacuum range
An ultra-high vacuum range of up to approximately
10-7Pa is supported.
2. High heat tolerance
The valve can be baked up to 125°C.
3. Simple, easy maintenance4. Specific gases can be introduced● Specifications● Dimensions diagram

Item

Connection flange
WeightDimensions

951-7177, 951-7178

951-7177

Atmospheric to approx. 10 -7Pa

(φ38)

6.7x10 -11Pa•m3/sec or less*1(φ22)

components

Vacuum sealing material:
Fluorine rubber (Viton)
Shaft sealing material:
Fluorine rubber (Viton)
O-ringShaft seal lubricant:
For high vacuum
Silicone grease
Valve body
Shaft:SUS304
Valve body:
Brass(Ni-plated)
Handle:Phenol resin
φ70ICF, NW25 flange
0.4kg
See Fig. 3, 4

(φ10)

125°C*2

Fully closed 80 ± 4

φ3.5mm

27.3±3Main component
material

Specifications

Fully opened 87 ± 4

TypeOperating vacuum
range
Leak when valve isclosedOrifice diameter
Allowable heating
temperature

951-717757±2

φ70ICF Fixed flange

Fig. 3951-7178(φ38)

NW25 flange

Canon ANELVA Corporation Vacuum Components Catalog

32±3

(φ22)
(φ10)

Fully opened 91.5 ± 4

Fully closed 84.5 ± 4*1. Gas permeation of the fluoro rubber (Viton) is not within specifications.
*2. Remove the handles before baking.

57±2

Fig. 4199

■ 951-7190 Leak Valve■ 951-7192 Leak Valve
These grip-type leak valves are used for introducing
atmospheric air into the vacuum equipment. A fluoro
rubber (Viton) O-ring is used for the vacuum seal.
These valves are ideal as an atmosphere feed throughvalve for leaking high vacuum or ultra-high vacuum
equipment.
951-7190● Features
1. Ultra-high vacuum range
An ultra-high vacuum range of up to approximately
10-7Pa is supported.
2. High heat tolerance● Dimensions diagram
951-7190
951-7190

The valve can be baked up to 125°C.
3. Simple, easy maintenance

63 ± 3 (Fully closed)(φ38)● Specifications
Item

Specifications
951-7190, 951-7192

components

Operating vacuum
range
Leak when valve isclosed

6.7x10 -11Pa•m3/sec or lessOrifice diameter

φ10mm

Allowable heating
temperature

125°C

Main component
material
Connection flange
WeightDimensions(φ25.4)

Atmospheric to approx. 10 -7Pa

φ70 ICF Fixed flange

Vacuum seal material: Fluoro rubber(Viton) O-ring
Valve body: SUS304
Valve element: SS34
(Ni-plated)
φ70ICF, NW25 flange
0.5kg
See Fig. 5, 6

Fig. 5951-7192951-7192(φ38)

67.7 ± 3 (Fully closed)

Type* Gas permeation of the fluoro rubber (Viton) O-ring is not within
specifications.

(φ25.4)

NW25 flange

Fig. 6■ Ordering information
Parts Number

Model

Description

Remarks

Code0190-06097

951-7190

Air Leak Valve

φ70 ICF, O-ring seal grip type

31030

0190-09396

951-7177

Leak ValveWith φ70 ICF, O-ring shaft seal

31010

0190-09388

951-7179

Inlet ValveWith φ70 ICF, bellows shaft seal

31020

Note) Contact us for more information about CE (RoHS).

200

Canon ANELVA Corporation Vacuum Components Catalog

■ Ordering information
Parts Number

Model

Description

Remarks

Code

A26-05986

951-7192

Air Leak Valve

NW25 with flange, O-ring seal grip type

31031

0190-09362

951-7178

Leak Valve

NW25 with flange, O-ring shaft seal

31011

0190-09370

951-7180

Inlet Valve

NW25 with flange, bellows shaft seal

31021

components

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

201

Serves both as cut valve and vent valve!

Isolate Valves
V -025SV■ Summary
These valves are connected to the inlet of the oil-sealed rotary vacuum pump. The valves are automated valves
that do not use compressed air to move the valve. The valves have two functions: vacuum locking the pumped
system when the pump is stopped, and then venting the pump side.
These valves prevent backflow of pump oil due to a power outage or improper operation of the automated or
manual exhaust systems.

components■ Features
1. When the oil-sealed rotary pump stops, the pumped
system is automatically cut off (vacuum locked). The
pump side is then vented to prevent the pump oilfrom flowing back into the pumped system.

■ Pumping system configuration example

2. Since the valve uses the vacuum created by thepump as the drive source, it does not require compressed air or pipes like conventional automatedvalves. (The valve does not open when the pump is
not operating.)
3.	This valve does not require any dedicated control
circuit. It can be controlled by interlocking thepower supply for the attached solenoid valve withthe motor for the pump.

■ Flow of operation(When linked to the oil-rotary vacuum pump in thepumping configuration example)
Start pump(Energize the valvesolenoid valve)

Stop pump(Turn off power to thevalve solenoid valve)

Close vent valve
Open isolate valve

Close isolate valve(Vacuum seal the
pumped system)

Vacuum pump the
pumped system

Open vent valve(Air vent only pump side)

Note 1) Wire so that the solenoid valve to the valve is energized only
when the pump is running.
2) The above diagram is an example of the connection containing a protection circuit.

Note) Vent valve is built into an isolate valve.

202

Canon ANELVA Corporation Vacuum Components Catalog

■ Specifications
Type

V-025SV-100

V-025SV-200
Atmospheric to approx. 10 -2Pa

Pressure range<10 -6Pa•m3/sec

Leak

420 L/min*1

Conductance
Maintenance interval

10,000 cycles or 1 year
Vacuum seal material: Fluoro rubber O-ring*2
Nitryl rubber*3
Body, valve, spring: SUS304
Shaft seal lubricant: Silicon grease

Main component material
Connection flange

NW25 flange

Fluid used

Atmosphere or gas (excluding corrosive gas)

Usage environment
Solenoid

Ambient temperature 10°C to 40°C

Rated voltage (V)100V AC (50/60Hz)

200V AC (50/60Hz)

Starting current (A)0.032/0.027

0.016/0.014

Holding current (A)0.028/0.022

Dimensions

0.014/0.011
See ■ Dimensions diagram.

Weight1kg* 1. Values are for 20°C air in molecular flow range.
* 2. Main seal, bonnet seal, and shaft seal
* 3. Piston and screw seal

components■ Dimensions diagram

Note) This may be mounted in any direction. However, the connection port tothe pumped system and pump is fixed.
(It cannot be used with the connection port reversed.)■ Ordering information
Remark

Code0190-06160

Parts Number

V-025SV-100

Model
Isolate Valve

Description

With NW25 flange, 100V AC

31092

0190-06178

V-025SV-200 Isolate ValveWith NW25 flange, 200V AC

31093

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

203

Ultra-High Vacuum Gate Valves
MSB series

951-7788

components■ Summary
These austenitic stainless steel gate valves canbe baked up to 150°C (valve opened. Up to 200°C
if within six hours). The shaft seal is also made ofaustenitic stainless steel welded bellows so that there
is no leak even during use. Furthermore, the vacuum
seal gasket uses a metal hollow O-ring at the bonnet
seal and a fluorine rubber (Viton) O-ring at the main
seal to prevent gas permeation from the atmosphereand gas emission from the gasket. The valves cantherefore be used in an ultra-high vacuum range ofup to approximately 10 -8Pa without disrupting the oilfree environment.
Manual and automated valves are available in sizes
from 1.5″ to 8″. Automated valves are available insizes 10″ and 12″.
Select the type that best meets your application.

■ Features■ Applications

1. Metal bonnet seal

● As the main valve for pumping systems.

Along with the bellows shaft seal, vacuum brazing is used for the body and internal mechanism.
A metal hollow O-ring is used for the bonnet seal
gasket, keeping the gas transmission low. The valve
can be used in an ultra-high vacuum range of approximately 10-8Pa.
2. Close-lock mechanism● As an air lock valve for sample introduction.
● For ion beam introduction.
● For transfer lines that need to maintain the vacuum
environment.

The close-lock mechanism keeps the closed automated valve closed even if the air supply is cut off
due to a power outage.
3. Simple, easy maintenance

4. Capable of counter pressure
Seal performance is maintained for both positive
pressure and counter pressure.
5. Position indicator
A position indicator is included as standard for automated valves.

204

Canon ANELVA Corporation Vacuum Components Catalog

■ Specifications
Drive system

Manual type

Auto type

Manual drive

Automatically driven by air pressure
Atmospheric to approx. 10 -8Pa
6.7x10 -11Pa•m3/sec or less*1

Operating vacuum range
Leak

150°C valve open, 125°C valve closed*2, 3

Allowable heating temperature
Allowable maximum differential pressure
Life

Valve at rest: ±1 atm., Valve operating: ±133Pa
Bellows: 10,000 cycles, Maintenance time: 5,000 cycles or 1 year
Seal material: Main seal ..... Fluoro rubber (Viton) O-ring		 Bonnet seal ..... SUS321 silver plated metal tube O ring
Main body: SUS304
Bellows: SUS304 welded bellows

Material used
Connection flange

ICF flange

Operating air pressure range
Solenoid-Type
Connection port

Position indicator*5

1.5" to 4" 0.3 to 0.5MPa, 6" to 12" 0.4 to 0.5MPa
4-way solenoid (200V AC 50/60Hz)*4-

Rc1/4 (former PT1/4)

Option: For retrieving valve open/close signal

Standard: For retrieving valve open/close signal(Note) *1. Gas permeation of the fluoro rubber (Viton) O-ring is not within specifications.
*2. The actuator and solenoid valve of the automated gate valves are not heat resistant. The allowable ambient temperature is 50°C.
*3. Can be heated up to 200°C with the valve open, if the heating time is less than six hours.
*4. If you need to use 100V AC 50/60Hz or 24V DC, please specify when ordering.
*5. For the relay contact output and contact capacity, refer to the section on the Position indicator.

● Weight
Manual type

Auto type

1.5″

3kg

3.5kg

2.5″

7.9kg

8.4kg

4″

12.6kg13kg

6″

19.8kg20.6kg8″30.8kg31.8kg

10″

-

54kg

12″

-

74kg

components

Valve
Nominal diameter● Fully opened conductance
Valve
Nominal diameter

Conductance

1.5″

65L/sec

2.5″

203L/sec

4″

600L/sec

6″

1,450L/sec

8″

2,730L/sec

10″

4,350L/sec

12″

6,420L/sec

Canon ANELVA Corporation Vacuum Components Catalog

205

● Dimensions diagram
O center line**

O center line**A

Position indicator
A

E

F
B

HandleM

Hand grip*

Leak groove
location
Bonnet seal
flangeLeak groove location

High vacuum side

Main seal

Manual type				

Actuator

200V AC50/60Hz
4-way solenoid valve

D

N

J

Low vacuum sideDN

Low vacuum side

Air inlet (Rc1/4)

C

Main seal

C

High vacuum side

G

I

G

I

H

H

K

B

L

Auto type* No hand grip for 1.5".
** The screw location of the ICF flange are arranged at the center relative to the 0 center line.

components

With ICF flange
Model

Nominaldiameter

951-7723
951-7728

1.5″

951-7733
951-7738

Flange dimensions
Outer diameter

Inner diameter

Thickness

Screw

φ70

φ38

12.7

6-M6

Depth 8

2.5″

φ114

φ64

17.5

8-M8

Depth 12951-7743
951-7748

4″

φ152

φ102

20.0

16-M8

Depth 15951-7753
951-7758

6″

φ203

φ152

22.0

20-M8

Depth 15951-7763
951-7768

8″

φ253

φ203

25.0

24-M8

Depth 17951-7778

10″

φ305

φ254

28.0

32-M8

Depth 19951-7788

12″

φ356

φ305

28.5

30-M10Depth 19

Model

Nominaldiameter

A

B

C

D

E

F

G

H

I

J

K

L

M

N

951-7723
951-7728

1.5″

138

103

51.4

62

105

105

108

18

70

φ51

φ53

48.5

103

-

951-7733
951-7738

2.5″

216

159

71

78

206

156

156

27

114

φ64

φ64

47.5

103

-

951-7743
951-7748

4″

284

208

78

80

225

180.5

190

39

148

φ74

φ74

46.5

103

70

951-7753
951-7758

6″

380

278

90

88

225

184

246

67

204

φ74

φ90

41.5

103

84

951-7763
951-7768

8″

485

358

100

92

258

224.5

296

83

254

φ86

φ100

44.5

103

100

951-7778

10″

601

443

116

102

-

227

358

113

316

-

φ110

44

103

100

951-7788

12″

700

518

127

114

-

241

414

138

370

-

φ137

40.5

103

110

Valve dimensionNote) The number 3 at the end of the type name indicates a manual valve and 8 indicates an automated valve.

206

Canon ANELVA Corporation Vacuum Components Catalog

● Position indicator
125V AC
Resistanceload
5

AC ratingCurrent (A)

8V DC
Resistanceload
5

DC ratingCurrent (A)14V DC
Resistanceload
530V DC
Resistanceload
5115V DC
Resistance
load
0.3

(Note) Lead wire color (length 300mm): For open signal/red (COM), white For open signal/blue (COM), green● Automated gate valve air piping example

Actuator
Open valve

Close valve

Solenoid

Lubricator

Gate valve

Regulator

FilterA (OUT 2)
B (OUT 1)

Compressed air

P (IN)R (EXH)● The solenoid valve switches the introduction ofcompressed air.
● The gate valve is designed to open when the solenoid valve is energized.
Compressed air flows from P (IN) to A (OUT2).
The pushed air flows from B (OUT1) to R (EXH)and is pumped out.
● Replace the solenoid connections B (OUT1) and A(OUT2) in order to close the valve by energizing
the solenoid valve.

200V AC, 50/60Hz

components

Solenoid valve operation switch■ Ordering information
Parts Number

Model

Description

RemarkCode

P21-02210

951-7723

1.5"Manual Gate Valve (MSB)

With φ70 ICF, bellows shaft seal

31212

P21-02212

951-7733

2.5"Manual Gate Valve (MSB)

With φ114 ICF, bellows shaft seal

31222

P21-02355

951-7743

4"Manual Gate Valve (MSB)

With φ152 ICF, bellows shaft seal

31232

P21-02362

951-7753

6"Manual Gate Valve (MSB)

With φ203 ICF, bellows shaft seal

31242

P21-02369

951-7763

8"Manual Gate Valve (MSB)

With φ253 ICF, bellows shaft seal

31252

P21-01899951-7728

1.5" Automatic Gate Valve (MSB)

With φ70 ICF, bellows shaft seal

31312

0190-08358

951-7738

2.5" Automatic Gate Valve (MSB)

With φ114 ICF, bellows shaft seal

31322

P21-02360

951-7748

4" Automatic Gate Valve (MSB)

With φ152 ICF, bellows shaft seal

31332

U11-15642

951-7758

6" Automatic Gate Valve (MSB)

With φ203 ICF, bellows shaft seal

31342

P21-02374

951-7768

8" Automatic Gate Valve (MSB)

With φ253 ICF, bellows shaft seal

31352

P21-02376

951-7778

10" Automatic Gate Valve (MSB)

With φ305 ICF, bellows shaft seal

31362

P21-02563

951-7788

12" Automatic Gate Valve (MSB)

With φ356 ICF, bellows shaft seal

31372

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

207

Ultra-High Vacuum Gate Valves
STD series

951-7755951-7750

Auto Type

Manual typecomponents■ Summary
These austenitic stainless steel gate valves can be
baked up to 150°C (valve opened). The shaft seal isalso made of austenitic stainless steel welded bellows. The valves can therefore be used in an ultrahigh vacuum range of up to approximately 10 -7Pa

without disrupting the oil-free environment.
Manual and automated valves are available in sizes
from 1.5" to 8". Automated valves are available insizes 10" and 12". Select the type that best meets
your application.

■ Features
5. Position indicator

1. Vacuum brazing
Along with the bellows shaft seal, vacuum brazing
is used for the body and the internal mechanism,keeping the gas transmission low. The valve canbe used in an ultra-high vacuum range of approximately 10-7Pa.
2. Close-lock mechanism
The close-lock mechanism keeps the closed automated valve closed even if the air supply is cut off
due to a power outage.
3. Simple, easy maintenance

A position indicator is included as standard for automated valves.

■ Applications● As the main valve for pumping systems.
● As an air lock valve for sample introduction.
● For ion beam introduction● For transfer lines that need to maintain the vacuum
environment.

The simple structure enable the bellows to be easily
replaced.
4. Capable of counter pressure
Seal performance is maintained for both positive
pressure and counter pressure.

208

Canon ANELVA Corporation Vacuum Components Catalog

■ Specifications
Drive system

Manual type

Auto type

Manual drive

Automatically driven by air pressure
Atmospheric to approx. 10 -7Pa
6.7x10 -11Pa•m3/sec or less*1

Operating vacuum range
Leak
Allowable heating temperature
Allowable maximum differential pressure
Life150°C valve open, 125°C valve closed*2
Valve at rest: ±1 atm., Valve operating: ±133Pa
Bellows: 10,000 cycles, Maintenance time: 5,000 cycles or 1 year
Seal material: Fluoro rubber (Viton) O ring (main seal, bonnet seal, bellows seal)
Main body: SUS304
Bellows: SUS304 welded bellows

Material used
Connection flange

ICF flange, JIS flange

Operating air pressure range

1.5" to 4" 0.3 to 0.5MPa, 6" to 12" 0.4 to 0.5MPa
4-way solenoid (200V AC 50/60Hz)*3

-

Type

-

Connection port
Position indicator*4-

Rc1/4 (former PT1/4)

Option: For retrieving valve open/close signal

Standard: For retrieving valve open/close signal

Solenoid(Note) *1. Gas permeation of the fluoro rubber (Viton) O-ring is not within specifications.
*2. The actuator and solenoid valve of the automated gate valves are not heat resistant. The allowable ambient temperature is 50°C.
*3. If you need to use 100V AC 50/60Hz or 24V DC, please specify when ordering.
*4. For the relay contact output and contact capacity, refer to the section on the Position indicator.

● Weight

1.5″

Manual type
With ICF flange

Auto type
With JIS flange

2.3kg

3.0kg

With ICF flange
2.8kg

With JIS flange
3.5kg

2.5″

6.4kg

6.6kg

6.9kg

7.1kg

4″

10.3kg10.8kg10.7kg11.2kg6″

17.8kg18.3kg18.6kg19.1kg32.8kg8″

28.6kg31.8kg29.6kg10″--50.0kg52.0kg12″--70.0kg72.0kgcomponents

Valve
Nominal diameter● Fully opened conductance
Valve
Nominal diameterWith ICF flange

With JIS flange

1.5″

65L/sec

69L/sec

2.5″

203L/sec

225L/sec

4″

600L/sec

649L/sec

6″

1,450L/sec

1,560L/sec

8″

2,730L/sec

2,870L/sec

10″

4,350L/sec

4,610L/sec

12″

6,420L/sec

6,740L/sec

Canon ANELVA Corporation Vacuum Components Catalog

209

● Dimensions diagram (The figure shows the ICF flange).
O center line* 2

O center line* 2
A

Position indicator
A

E

F
B

HandleM

Hand grip* 1

Leak groove
location
Bonnet seal
flangeAir inlet (Rc1/4)

Main seal

Actuator

High vacuum side

Manual type				200V AC50/60Hz
4-way solenoid valve

D

N

J

Low vacuum sideDN

Low vacuum side

Leak groove location

C

Main seal

C

High vacuum side

G

I

G

I

H

H

K

B

L

Auto type*1 No hand grip for 1.5".
*2 The screw locations of the ICF flange are arranged at the center relative to the 0 center line.

With ICF flange

components

Model951-7720
951-7725
951-7730
951-7735951-7740
951-7745951-7750
951-7755951-7760951-7765

NominaldiameterFlange dimensions
Outer diameter

Inner diameter

Thickness

Screw

1.5″

φ70

φ38

12.7

6-M6

Depth 8

2.5″

φ114

φ64

17.5

8-M8

Depth 12

4″

φ152

φ102

20.0

16-M8

Depth 15

6″

φ203

φ152

22.0

20-M8

Depth 15

8″

φ253

φ203

25.0

24-M8

Depth 17951-7775

10″

φ305

φ254

28.0

32-M8

Depth 19951-7785

12″

φ356

φ305

28.5

30-M10Depth 19

Model

Nominaldiameter

A

B

C

D

E

F

G

H

I

J

K

L

M

N

1.5″

138

103

51.4

51

105

105

96

18

70

φ51

φ53

48.5

103

-

2.5″

216

159

71

64

206

156

144

27

114

φ64

φ64

47.5

103

-

4″

284

208

78

74

225

180.5

182

39

148

φ74

φ74

46.5

103

70

6″

380

278

90

82

225

184

240

67

204

φ74

φ90

41.5

103

84

8″

485

358

100

86

258

224.5

295

83

254

φ86

φ100

44.5

103

100

951-7775

10″

601

443

116

97

-

227

354

113

316

-

φ110

44

103

100

951-7785

12″

700

518

127

107

-

241

407

138

370

-

φ137

40.5

103

110

951-7720
951-7725
951-7730
951-7735951-7740
951-7745951-7750
951-7755951-7760951-7765

Valve dimensionNote) The number 0 at the end of the type name indicates a manual valve and 5 indicates an automated valve.

210

Canon ANELVA Corporation Vacuum Components Catalog

● Position indicator
Rated voltage(V)

Non-inductive current (A)Resistance load

Inductive load (A)Lamp load

Inductive load

Motor load

Always closed Always opened Always closed Always opened Always closed Always opened Always closed Always opened

AC125

5

1.5

0.7

4

2.5

1.3

250

5

1

0.5

4

1.5

0.8

DC 8

5

3

4

3

14

5

3

4

3

30

5

3

4

3

125

0.4

0.05

0.4

0.05

250

0.2

0.03

0.2

0.03

(Note) Lead wire color (length 300mm): For open signal/red (COM), white; For closed signal/blue (COM), green.

● Automated gate valve air piping example

Actuator
Open valve

Close valve

Gate valve● The solenoid valve switches the introduc-tion of compressed air.

Regulator

A (OUT 2)
B (OUT 1)

FilterCompressed air

P (IN)R (EXH)

components

Solenoid

Lubricator● The gate valve is designed to open when thesolenoid valve is energized.
Compressed air flows from P (IN) to A (OUT2).
The pushed air flows from B (OUT1) to R (EXH)and is pumped out.
● Replace the solenoid connections B (OUT1) andA (OUT2) in order to close the valve by energizing the solenoid valve.

200V AC, 50/60Hz
Solenoid valve operation switch

Canon ANELVA Corporation Vacuum Components Catalog

211

■ Ordering information
Parts Number

Model

Description

Remarks

Code

Manual type with ICF flange
0190-04906

951-7720

1.5"Manual Gate ValveWith φ70 ICF, bellows shaft seal

31210

0190-04922

951-7730

2.5"Manual Gate ValveWith φ114 ICF, bellows shaft seal

31220

0190-04948

951-7740

4"Manual Gate ValveWith φ152 ICF, bellows shaft seal

31230

P21-02317

951-7750

6"Manual Gate ValveWith φ203 ICF, bellows shaft seal

31240

FMT-9118951-7760

8"Manual Gate ValveWith φ253 ICF, bellows shaft seal

31250

Automated type with ICF flange
P21-02053

951-7725

1.5" Automatic Gate ValveWith φ70 ICF, bellows shaft seal

31310

VMT-9652951-7735

2.5"Automatic Gate ValveWith φ114 ICF, bellows shaft seal

31320

0190-04956

951-7745

4" Automatic Gate ValveWith φ152 ICF, bellows shaft seal

31330

P21-02319

951-7755

6" Automatic Gate ValveWith φ203 ICF, bellows shaft seal

31340

FMT-9132951-7765

8" Automatic Gate ValveWith φ253 ICF, bellows shaft seal

31350

FMT-9166951-7775

10" Automatic Gate ValveWith φ305 ICF, bellows shaft seal

31360

P21-02952

951-7785

12" Automatic Gate ValveWith φ356 ICF, bellows shaft seal

31370

components

Note) Contact us for more information about CE (RoHS).

212

Canon ANELVA Corporation Vacuum Components Catalog

components

Memorandum

Canon ANELVA Corporation Vacuum Components Catalog

213

Rotary Feedthroughs
Magnetic Coupling Type, Bellows Type954-7620(Bellows)

954-7605(Magnetic coupling)

components■ Summary
These rotary feedthroughs are used for introducing
rotary motion into equipment installed in a vacuum.
They can be used in an ultra-high vacuum range ofup to 10 -8Pa. Two types of rotary feedthroughs areavailable: Magnetic coupling type rotary feedthroughand bellows type rotary feedthrough.

■ Features■ Magnetic coupling type rotary feedthroughs(954-7603, 7604, 7605, 7606, 7607)

1. High transfer torqueA side variety of models are available to best meetyour application, from 3kg•cm up to a high torquetype of 100kg•cm.
2. Long life
Dry lubricant ball bearings are used for the vacuum side bearings (excluding the 954-7640 rotary
feedthrough). This ensures a long product life, making the rotary feedthrough ideal for semiconductor
manufacturing equipment.
3. Capable of bake-outs
Vacuum brazing joints that do not require elastomer
seals are used, making the rotary feedthrough ideal
for ultra-high vacuum systems.
4. Outer rotor stopper
An outer rotor stopper (fixed screw) enables holding
at any rotating position.
5. Capable of motor drive

The magnetic coupling type rotary feedthroughs use
strong magnet. They have a simple structure andcan withstand continuous rotation at high speed. The
rotary feedthroughs can be used semi-permanently
simply by replacing the bearings. There is no reduction in the transmission torque because there is almost no demagnetization of the magnet. Leakage flux
is comparable to the geomagnetic field. (See the Leakage flux table.)
The motor driven rotary feedthroughs can be used at
a higher rotation speed (500rpm) compared to the bellows type. In addition, if excessive load is applied to
the rotor, the rotor will rotate freely to prevent damage to the motor.
MagnetRotor(magnetic material)

Two types of drive systems are available: Manualand motor.
(The 954-7630 is manual drive only.)

Magnetic coupling drive system

214

Canon ANELVA Corporation Vacuum Components Catalog

● Leakage flux

Unit: μT (Geomagnetism is 40μT)Type954-7603

Measurement Method

Target points

A

954-7604954-7605954-7606954-7607

I*1

II*2

I

II

I

II

I

II

I

II

80

40

80

40

60

10

40

40

40

40

B

120

40

480

40

60

20

400

40

400

40

C

160

40

500

40

60

20

400

40

400

40

D

600

80

600

80

60

30

400

40

560

120

E

600

80

600

80

60

30

400

40

560

120

F

600

80

600

80

60

30

400

40

560

120

G

200

40

200

40

60

10

200

40

300

20

*1 For measurement method I, measurements are made by having the probe make contact.
*2 For measurement method II, measurements are made by keeping the probe at a distance of approximately 5mm.

Leakage magnetic flux measurement points
Probe direction
B

C

D

E

F

A
Probe direction

G
Probe direction● Specifications
954-7603954-7604

Drive system954-7605954-7606954-7607

components

Type

Magnetic coupling

Connection flange

φ34ICF

Drive shaft diameter

φ6

φ70ICF
φ8

Drive system

φ12

Manual and motor drive

ManualMotor
drive
Allowable rotation speed
Allowable heating temperature
Leak

Transfer
torque0.5N•m

1.6N•m

1.6N•m

5.9N•m

9.8N•m

0.44N•m

1.42N•m

1.42N•m

5.3N•m

8.8N•m

100°C*

100°C*

500RPM
1

2

100°C*3

100°C*2

1.3x10 -11Pa•m3/sec or less

Weight0.72kg

2.6kg

2.5kg

*1300°C, *2150°C, *3400°C without outer rotor.
Do not operate while heated.

● Main component materialType954-7603

Support tube with ICF

Outer rotor
Outer rotor magnet
Disk plate954-7605954-7606954-7607

SUS 304

Inner rotor
Inner rotor magnet

954-7604

None

Martensitic stainless steel
Rare earth cobalt
None
magnetCarbon steel

Rare earth cobalt magnet

Rare earth cobalt magnet
SUS304

Canon ANELVA Corporation Vacuum Components Catalog

215

■ Bellows type rotary feedthroughs(954-7620, 954-7630, 954-7640)

Bellows

These bellows type rotary feedthroughs use a welded
bellows to completely separate the vacuum side andair side. Because no O-ring is used at the shaft seal,
there is no fear of leakage from the rotating shaft seal
during operation. In addition, a scale is provided on
the handle so that the rotating angle of the drive shaft

Bellows drive system

inside the vacuum system can be read directly.

● Specifications
Type954-7620

954-7630

Drive system954-7640

Bellows

Connection flange

φ70ICF

Drive shaft diameter

φ34ICF

φ8

φ6

Drive method

ManualMotor drive

ManualManualMotor drive

Transfer torque2N•m

1.2N•m0.3N•m1N•m0.6N•m-200rpmAllowable heating temperature*
Allowable rotation speed
Leak

200°C
-

100rpm-1.3x10 -11Pa•m3/sec or less1.3x10 -11Pa•m3/sec or lessMain body SUS-304
Bellows SUS-304

Material used
WeightApplications

1.15kg0.33kg0.74kgFor simple rotating inlets such as
shutters.

For simple rotating inlets such as
shutters.

For motor drive or high-precision, high-torque rotating
inlets using mini ICF ports.

components*Do not operate while heated.

■ Dimensions diagram
954-7603, 7604 rotary feedthrough (magnetic coupling)

Disk plate
Support tube with φ34ICF

Outer rotor(with magnet)

Outer rotor stopper

Inner rotor
shaft(When the outer rotor is fixed)
Side A

216

Canon ANELVA Corporation Vacuum Components Catalog

954-7605 rotary feedthrough (magnetic coupling)

φ32

Disk plate

Cross-section a-a

Outer rotor stopper–0.05
φ8 –0.1

3

Support tube with
φ70 ICF

a

φ62

φ58

φ57.2

a

20
R2.4 (O-ring groove belt)

29

3.5

135
(9)

155

57±1

(When theouter rotor
is fixed)

954-7606, 7607 rotary feedthrough (magnetic coupling type/high torque)

Disk plate

Support tube with φ 70 ICF

φ 14

30

φ 58

4

φ 36

Outer rotor
stopper

φ 62±0.5

Inner rotor shaft

Outer rotor(with magnet)

φ 12 –0.02
–0.05

20.5

10

136.5

50±1.5157±2

components

20±1(When theouter rotor
is fixed)
Side A

207

954-7620 rotary feedthrough (bellows)

12550

φ70 ICF fixed flange

0

φ47

2

φ32

3

10

34 0

20

φ38

–0.05

φ8 –0.1

2.4R

φ55.2
φ60

50±2

2

Handle fixing

70
93

Canon ANELVA Corporation Vacuum Components Catalog

66

(20)

(10) stopper217954-7630 mini rotary feedthrough (bellows)
φ34 ICF fixed flange

φ40

φ32

2

φ16

0

0

2

32

φ15

0
φ5.9 –0.1

4

10

(7)

35

15

Handle fixing
stopper

61
50±2

91

954-7640 mini rotary feedthrough (bellows/high torque)

60°

φ38

3

19.5

φ42

60

10

0.5

2

0

φ22

φ15

0
φ6 −0.1

Handle fixing
stopper

200

φ19.2

φ34 ICF fixed flange

18.8

56.5

50±2

104.5

(7)

components(154.5)■ Maintenance and consumable parts
The bearings are maintenance parts. They should be replaced when worn.

■ Applications● Magnetic coupling rotary feedthroughs (954-7603 , 7604, 7605, 7606, 7607)
O-ring belt drive

Timing belt drive

O-ringDirect driveInternal gear drive

Timing belt

Internal gear

M

M

Ball joint (or flexible coupling)
PulleyM

Standard part acceptable

M
Attach boss (φ6) to
disk plate

Pulley● Bellows type motor driven rotary feedthroughs

Attach the internal gear inplace of the disk plate● Usage notes
Refer to the assembly design to prevent direct radial(954-7620 , 954-7640)
When using a small motor to drive a bellows type ro-load or thrust load on the rotary feedthrough shaft.

tary feedthrough, use an O-ring belt or chain. Pleasecontact us if a drive motor that operates at 50rpm or
more is to be used.

218

Canon ANELVA Corporation Vacuum Components Catalog

■ Options● Example of motor drive application

1. Head shaft (Material: SUS304)
The head shaft is used to connect a magnetic coupling type rotary feedthrough with the drive sourcesuch as a motor. The following head shafts are available as standard. When ordering, append an H at
the end of the type name and specify together withthe rotary feedthrough. Ask us for the availability ofshafts with shapes other than the following or aboutrotary feedthroughs with motors.

Timing belt drive

Direct drive

Timing belt

M
Ball joint (or flexible coupling)

M
Pulley● Dimensions diagram

B-sideHead shaft (1)For 954-7603•7604 rotary feedthroughB-sidecomponents

Head shaft
954-7605 rotary feedthroughNote) When the head shaft is attached, side A shown in the rotary
feedthrough dimensions diagram and side B shown in the headshaft dimensions diagram match.

B-sideHead shaft (2)For 954-7606•7607 rotary feedthrough

2. Vacuum side bearings
Ball bearings coated with MoS2 solid lubricant are provided as standard (excluding the 954-7640 rotary
feedthrough).

■ Ordering information
Model

Description

RemarkCode763-1401

Parts Number

954-7630

Mni Rotary Motion FeedthroughWith φ34 ICF Bellows

36500

803-3549

954-7640

Mni Rotary Motion Feedthrough (High Torque)

With φ34 ICF Bellows

36501

0190-04215

954-7620

Rotary Motion FeedthroughWith φ70 ICF Bellows

36520

P21-03020

954-7603

Mni Rotary Motion FeedthroughWith φ34 ICF Magnetic coupling

36502

A23-01600

954-7604

Mni Rotary Motion FeedthroughWith φ34 ICF Magnetic coupling

36503

753-0001

954-7605

Rotary Motion FeedthroughWith φ70 ICF Magnetic coupling

36521

P21-03025

954-7606

Rotary Motion FeedthroughWith φ70 ICF Magnetic coupling

36522

P21-03028

954-7607

Rotary Motion FeedthroughWith φ70 ICF Magnetic coupling

36523

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog219

Linear Feedthroughs■ SummaryLinear feedthroughs are used to linearly move equipment installed in a vacuum. They can be used in an
ultra-high vacuum range of up to 10 -8Pa.

954-7621
Linear feedthrough■ Features

components

1. Made of all-metal and capable of hard baking, thislinear feedthrough is ideal for ultra-high vacuum
systems.
2.	This is a bellows type linear feedthrough with thevacuum side and air side completely separated by
the bellows.
3.	The linear feedthrough introduces linear motion
within a vacuum using the expansion and contraction of the bellows, preventing leakage during
operation.
4. All components are non-magnetic, making thislinear feedthrough ideal for vacuum equipment
systems that must avoid magnetism (excluding the954-7626, 7627).
5. All models move linearly by 1mm with a single turnof the handle. The scale on the handle is divided
equally into 20.
6.	The shaft and moving screw of the 954-7626 and7627 mini linear motion drives are integrated
so there is little backlash, making these linear
feedthroughs ideal for high precision linear motion.
In addition, they can be easily automated using abelt drive etc.

■ Specifications
Type954-7621
954-7622954-7623
954-7626954-7627

Description

Drive system

Connection
flangeLinear motion

AllowablemaximumthrustAllowable
heating temperature

WeightLinearfeedthroughLinearfeedthroughMini linear motion drive
Mini linear motion drive
Mini linear motion drive

Bellows linear
motionφ70 ICF

20mm

196N

300°C

0.6kg

↑

φ70 ICF

40mm

196N

300°C

0.7kg

↑

φ34 ICF

20mm

147N

300°C

0.48kg↑

φ34 ICF

25mm

147N

200°C

0.9kg

↑

φ34 ICF

40mm

147N

200°C

1.1kg

Backlash±0.5mmor less±0.3mmor less

Other common specifications• Leakage: 1.3×10−11Pa•m3/sec or less

■ Dimensions diagram
Bellows

Bellows
Linear motion

Linear motion

Shaft

Shaft

HandleHandle954-7621, 7622, 7623 linear feedthrough drive system

220

Movable screw

954-7626, 7627 linear feedthrough drive system

Canon ANELVA Corporation Vacuum Components Catalog

φ70 ICF fixed flange954-7621 linear feedthroughHandle0

φ6 −0.2

Leak groove
+0.1

φ44

10
5
0

φ38

φ3 0

6
39

Max50

40 Min30139±2954-7622 linear feedthrough
2

+0.1

φ44

8

9

10
5
0

20

15

φ38

φ70

1

φ3 0

0

0

φ6 −0.2

Handleφ70 ICF fixed flange

Leak groove6
60(max80)(min40)73
205±2954-7623 mini linear feedthroughHandle40(max50)(min30)

φ38.5

5
0

10

φ34

2.5

φ32

0

φ6 −0.05

φ34 ICF fixed flange

70.5
160.5±260°3954-7626 mini linear feedthrough1

components

φ37

Handle26

8

2 M3 bolt

9
1

0

φ42

0

5

10

15

25

20

+0.1

φ3 0

φ16

0

φ6 −0.05

φ34 ICF fixed flange

2

6

5

20

42.5
(max55 min30)

107.5(17.5)

23(max30 min5)

60°
3954-7627 mini linear feedthrough1
φ37

Handle26

8

2 M3 bolt

9
1

0

φ42

0

5

10

15

20

25

30

35

+0.1
0

40

φ3

φ16

0

φ6 −0.05

φ34 ICF fixed flange

2

6

5
50
(max70 min30)

20
140

23

(2.5)
(max45 min5)■ Ordering information
Parts number

Model

Description

Remarks

Code763-1960

954-7623

Mini Linear Motion FeedthroughWith φ34 ICF, bellows type, stroke 20mm

36600

0190-04257

954-7621

Linear Motion FeedthroughWith φ70 ICF, bellows type, stroke 20mm

36620

753-1438954-7622

Linear Motion FeedthroughWith φ70 ICF, bellows type, stroke 40mm

36621

P25-01522

954-7626

Mini Linear Motion FeedthroughP25-01478

954-7627

Mini Linear Motion FeedthroughWith high precision φ34 ICF, bellows type, stroke
25mm
With high precision φ34 ICF, bellows type, stroke
40mm

36622
36623

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

221

R/L Feedthroughs■ Summary
These magnetic coupled feedthroughs combine bothrotary and linear feedthroughs, making them capableof both rotary and linear motion.

■ Features
1. Long stroke

components

Ideal for transporting samples with long travel distance.
2. Simple, easy maintenanceSemi-permanent. Because a magnetic coupling isused to convey the rotating and linear motion within a vacuum, only the bearings need replacing.
3. Simple structure

If samples must be transported, make sure the assembly design allows position adjustment of the tip of the rod.
* A metallic sound is emitted during operation because metal bearings are used.

■ Specifications
Type954-7670

954-7671

Drive system954-7672

Magnetic coupling

Connection flange

φ70 ICF flange

Drive method
Linear motion

Manual
250mm

500mm

750mm

Transfer torque

0.4N•mThrust

29.4N

Allowable heating temperature

100°C

Allowable tip load

222

1000mm200g-111.33x10 Pa•m /sec (1x10 -10Torr•L/sec) or less

Leakage
Weight954-7673

2.3kg

2.6kg

3

2.9kg

Canon ANELVA Corporation Vacuum Components Catalog

3.2kg

■ Dimensions diagram
φ70 ICF fixed flange

HandleM4 screw

stroke152+stroke

32~32+stroke

An M6 screw is attached to the vacuum side tip.

Supports any linear stroke.
Also supports ones with a rotary/linear stopper.

Type

Dimension A

954-7670250

954-7671500

954-7672750

954-7673

1000■ Ordering information
Parts number

Description

954-7670

R/L Motion FeedthroughRemarks
Rotary linear motion feedthrough Stroke 250mm

36640

Code

0191-01106

954-7671

R/L Motion FeedthroughRotary linear motion feedthrough Stroke 500mm

36641

0191-01130

954-7672

R/L Motion FeedthroughRotary linear motion feedthrough Stroke 750mm

36642

0191-01164

954-7673

R/L Motion FeedthroughRotary linear motion feedthrough Stroke 1000mm

36643

components

Model0191-01075

Note) Contact us for more information about CE (RoHS).

■ External drawings with rotating•linear stopper










VWURNH

Canon ANELVA Corporation Vacuum Components Catalog

223

Current Terminals

954-7210
100A 2P current terminal■ Summary
We offer a wide variety of current input terminals withceramic sealed terminals welded to the ICF flange.
These terminals have good insulation characteristics,
are mechanically and thermally strong, and there isno fear of leakage. They are highly reliable and areused in ultra-high vacuum equipment and equipmentwith large thermal loads.

954-7276
Mini MHV current terminal

components■ Features
1. Can withstand high baking temperatures withproven blazing technology and ICF flange.
2. Uses ceramic seals to provide excellent thermal
properties, mechanical characteristic, and electricalcharacteristics.

3. Supports up to ultra-high vacuum.
4. Wide variety of types are available equipped withlarge current/small current/high voltage input
multi-terminals.

■ Example of attaching to a vacuum container
Thermocouple.

Current terminal with thermocouple
Vacuum container

Socket contact
Connecting
terminal

Connector
Heating
element

Load

Load

Low current input
current terminal

High current input
current terminal
Connecting terminal

224

Canon ANELVA Corporation Vacuum Components Catalog

Current Terminal Series■ Specifications
Electrodes954-7209
Mini 100A current
terminal
954-7245
Mini 5A current
terminal
954-7238
Mini HF current
terminal
954-7276
Mini MHV current
terminal
954-7227
Mini 2W2T current
terminal

Material

Quantity

Compatible connector
Current
capacity

Withstandvoltage

Applicable
WeightflangeAtmosphereside

Vacuum side
953-9900•9539901
100A connecting
terminal
100AL connector

φ6x130(Atmosphereside φ6.2)

Oxygen-freecopper
(Ni-plated)

1

100A

7kV DC93g

953-9910
100A connecting terminal

φ1.5x91

Kovar

1

5A

1kV DC50g

954-7326#16 socket contact

φ3x7

Nonmagnetic Monel

15A

1.5kV AC(r.m.s)

60g

1

3A

5kV DC

50g

5A/line
1kV DC(wire only)

50g

φ1.57
Kovar
φ2.4xφ5.5x19.5

φ34ICF

N-P-3-AS
HF connector
954-7326 #16
UG-932/U
MHV connector Socket contact

φ1.2x115x2
φ1.2xφ0.9x115
x2

Nickel954-7203
100A current
terminal

φ6x130(Atmosphereside φ6.2)

Oxygen-freecopper
(Ni-plated)

1954-7210
100A2P current
terminal

φ6x130(Atmosphereside φ6.2)

Oxygen-freecopper
(Ni-plated)

2

100A/line 7kV DC

380g

953-9910
100A connecting
terminal

954-7260
4P current
terminal

φ6.1x125

Nickel4

50A/line

510g

954-7261
4P plug(MS connector)

φ15.8x140

Oxygen-freecopper
(Ni-plated)

540g

953-9907
400A F connecting Terminal 9539917
400A L connector

954-7207
400A current
terminal
954-7290
6P current
terminal
954-7221
8W current
terminal
954-7225
8T current
terminal
954-7223
4W4T current
terminal
954-7252
13P current
terminal

Wire
2
tubes
2

953-9900•953-

100A

1

400A

7kV DC

1kV DC

3kV DC

953-9910
9901•100A connect100A connect- ing terminal
953-9916
ing terminal

330g

φ70ICF

φ1.6x64.5x4
φ1.6x68x2

Kovar

6

5A/line

1kV DC235g

φ1.2x250

NickelWire 8

5A/line

1kV DC270g

φ1.2xφ0.9x250

NickelTube 8-1kV DC270g

φ1.2x250x4
φ1.2xφ0.9x250
x4

Nickeltubes

5A/line
1kV DC(wire only)

270g

φ1x24

Kovar

12

5A/line

300g

Wire

4
4

1.5kV DC954-7291
6P plug(MS connector)

100AL connector
953-9900•9539901•100A connecting terminal
953-9916
100AL connector

components

Description

External diameter x
Internal diameter x
Length954-7326 #16
Socket contact

954-9254
954-7256 #20
13P connector
Socket contact(MS connector)• See the separate page for MS type multi-pin current terminals.
• Kovar is an alloy with iron, nickel and cobalt as the main ingredients.
• The withstand voltage may drop and discharge may occur at 1x10 −2Pa or more pressure.

● Other common specifications
Allowable heating temperature

300°C

Allowable temperature change

25°C/min or less for all models

Insulating resistance

1000MΩ or more for 954-7276MHV current terminal and 954-7238 mini HF current terminal,
5000MΩ or more for others

Leakage

1.3x10 -11Pa•m3/sec or lessCanon ANELVA Corporation Vacuum Components Catalog

225

● Dimensions diagrams
954-7209
Mini 100A
current terminal449.8±2

φ6.2

φ19

φ6

φ34 ICF fixed flange(80.2)
130954-7245
Mini 5A current
terminal

91
(51)

φ8

φ1.5

40±1

954-7238
Mini HF current
terminal(Flat surface available on the electrode)
φ34 ICF
fixed flange

φ34

φ15.9

M2

2

φ13.5

5/8″-24-NEF-2A

φ1.65

φ3

8
7.5

2.5

33.5

7±2

7.5

φ5.5

φ2.4

3.5

φ9.6

954-7276
Mini MHV
current terminal

φ1.57

components

φ34 ICF fixed flange819.5±227.5

φ34 ICF fixed flange

In the figure, the vacuum side is on the left.

226

Canon ANELVA Corporation Vacuum Components Catalog

954-7227
2W2T current
terminal

Brazed part
(feedthrough tube only)

Inclusion dish70±2

φ1.2×φ0.9
Nickel feedthrough tube

φ19.1±1

φ34 mini ICF
fixed flange

Ceramic

15±1

φ10

(45)

115±1

φ1.2 nickel feedthrough wire954-7203
100A current
terminal

φ70 ICF fixed flange

φ6.2
φ19

φ6

φ1

4
57.7±2130954-7210
100A2P current
terminal(72.3)

φ6

φ1452.3±2

Leak groove

φ6.2

φ19

26

φ19

φ6

φ6.2

components

φ70 ICF fixed flange(77.7)
130

125±1

50

3.5

14

φ3.2
Depth 10
Insulation stone(Ceramic)

φ34

φ6.1

φ45

.5

.5

14

45°
(Key location)

21
φ5.71

12.7

φ47.5

954-7260
4P current
terminal

2-18UNS-2A
φ70 ICF fixed flange

Leak groove

In the figure, the vacuum side is on the left.

Canon ANELVA Corporation Vacuum Components Catalog227954-7207
400A current
terminal

140

φ33

φ15.8

(70.6)

φ15.8

69.4±2

φ70 ICF fixed flange954-7290
6P current
terminalLong pin

2-18UNS-2A

φ70 ICF fixed flange

MAX DIA
φ36.5

Leak groove5
26.5±2Key location
Atmosphere side

(30)

40±1
70±2

250

954-7225
8T current
terminal

φ31.3

954-7223
4W4T current
terminal

20

Brazed part
(feedthrough tube only)

Leak groove
.45

26.8

φ17

(203.2)

φ1.2xφ0.9

954-7221
8W current
terminal

φ70 ICF fixed flange

In the figure, the vacuum side is on the left.
954-7252
13P current
terminal

12−φ1

41.7

7.1
0

5.6

9.35
Key location
Atmosphere side
φ70 ICF fixed flange

φ42.5

φ2

components(Note) The inner diameter of the mounting φ70ICF
port is φ38 or more.

Screw 1 3/4-18NS-2A

Leak groove

In the figure, the vacuum side is on the left.

228

Canon ANELVA Corporation Vacuum Components Catalog

■ Options● Vacuum side connector

954-7326#16 socket
Contact

954-7256#20 socket
Contact

Applicable model
954-7276
Mini MHV current
terminal
954-7245
Mini 5A current
terminal
954-7290
6P current terminal
MS connector
Multi-pin current
terminal
954-7252
13P current terminal

Compatible
wire size

Allowable
current

Material

Allowable
heating temperature

Tool

Weight

AWG16-18

5A

Be-Cu(gold plated)
Stainless steel

250°C

Main unit: M22520/1-01
Turret: M22520/1-02(Made by Daniel)

0.8g

AWG20-24

5A

Copper alloy(gold plated)stainless steel

250°C

Main unit: M22520/1-01
Turret: M22520/1-04(Made by Daniel)

0.15g

954-7326#16 socket
contact

6.35

Electrode

8.3

components

Pressure bonded
section

φ3.7

φ1.73

φ2.59

21.44

954-7256#20 socket
contact

φ1.2

φ2.3

φ1.8

13.3
6.7

φ2

Description

φ2.87

Type

Pressure bonded section

In the figure, the terminal connection side is on the right.

Canon ANELVA Corporation Vacuum Components Catalog229

● Atmosphere side connector
Type

Rated
voltageRatedcurrent

Allowable temperature range

Remarks-20°C to 160°C

Applied code: RG-59, 62/U
Test voltage:
5000V AC/for 1 minute
Weight 25g (soldered)

Description

Applicable model

UG-932/U

MHV connector

954-7276 mini MHV current
terminal

BNCH-CS

Short cap

N-P-3-AS

HF connector

951-7261

4P Plug954-7260 4P current terminal

900V AC
1250V DC

80A

-50°C to 125°C

951-7291

6P Plug954-7290 6P current terminal

500V AC
700V DC

13A-50°C to 125°C

951-9254

13P connector

954-7252 13P current terminal

500V AC
700V DC

13A-50°C to 125°C

954-7276 mini MHV current
terminal
954-7238 mini HF current
terminal-

Ground connector-20°C to 160°C

Compatible wire material:
3C2V, 3D2V (soldered)
MS connector, contact size #4
solderMS connector, contact size
#16-18 solder
MS connector, contact size
#16-18 solder

BNCH-CS
short cap

12.7

57

φ14.5

18

φ4.5

N-P-3-AS
HF connector
43
φ6.2

3

φ21

components

10.3
38.5

(Flat-to-flat distanceof hexagon)

φ6.6

φ14.5

UG-932/U
MHV connector

Socket (female) built in.

230

Canon ANELVA Corporation Vacuum Components Catalog

71.4

B

D
C

61.4

A

φ56.4

Key groove

Socket contact
Insert(Diallyl phthalate resin)

φ52.2

Bushing(Synthetic rubber)

34954-7261
4P plug

φ23.8
φ31.5

954-7291
6P plug
(112)

C
E

D

φ31.5

F

B

(φ56.4)

A

G H

φ19

Key groove

954-9254
13P connector

2

1 12
11

4

10

5

9
6 7

φ50

3

φ19
φ31.5

Key groove8

φ7

Canon ANELVA Corporation Vacuum Components Catalog

57.7

231

components

No pin is inserted at B and G.

● Connecting terminal
Type

Description

Material

953-9900

100A connecting terminal

Copper (nickel plated)

953-9901

100A connecting terminal

Copper (nickel plated)

953-9910

100A connecting terminal

Copper (nickel plated)

953-9916

100AL connecting terminal

Copper (nickel plated)

953-9903

400A connecting terminal

Copper (nickel plated)

953-9917

400AL connecting terminal

Copper (nickel plated)

Applicable model

Remarks
Vacuum side954-7209 Mini 100A current terminal
954-7203 100A current terminal
954-7210 100A2P current terminal

Vacuum side
Atmosphere side
Vacuum side954-7207 400A current terminal
954-7241 400A water-cooled current
terminal

Vacuum side
Vacuum side

Connecting terminals other than the above are also available upon request. Contact us for details.

953-9900
100A connecting
terminal

35
23
17

9

1.5

5

φ6.2

7

45
20

10
12

components

953-9901
100A connecting
terminal

10

φ6

5

M6

2-φ6.5953-9910
100A connecting
terminal

1.5

Inner diameter φ6

30
15

1.5

20

6

2-φ6.5

Inner diameter φ6.2

The photo shows an example of attaching to a current terminal.
The mounting bolts in the figure are not included.

232

Canon ANELVA Corporation Vacuum Components Catalog

953-9916
100AL connecting terminal

1.5

23
17

10

9
5

1.5

17
23

7

2-φ6

10

5

45

2-φ6.2The photo shows an example of attaching to a current terminal.
The mounting bolts in the figure are not included.

953-9903
400A connecting
terminal

35

7

45
36

15
7.5

components

8

φ6.5

953-9917
400A L connecting
terminal

15

φ16

7.5

φ10

22

1.6

20

10
2

58
40

15
7.5

52

φ16.2

37
43

20
10
2

25

φ16.2

● Connector usage example
WasherBolt

Nut

953-9900 100A connecting terminal

954-7209 Mini 100A current terminal

Canon ANELVA Corporation Vacuum Components Catalog233

MS Connector Type Multi-pin Current Terminals■ Specifications
Description

Numberof electrodes

3P current terminal

3

4P current terminal

4

6P current terminal

6954-7942

10P current terminal

10

340g

φ70ICF

954-7945 10P connector

954-7952

14P current terminal

14

340g

φ70ICF

954-7955 14P connector

Type954-7911
954-7912
954-7921

components

954-7922
954-7931
954-7932

WeightCompatible
flange70g

φ34ICF

340g

φ70ICF70g

φ34ICF

340g

φ70ICF70g

φ34ICF

340g

φ70ICF

Compatible connectors (atmosphere side)954-7915 3P connector
954-7925 4P connector
954-7935 6P connector

954-7962

19P current terminal

19

340g

φ70ICF

954-7965 19P connector

954-7972

24P current terminal

24

320g

φ70ICF

954-7975 24P connector

954-7982

37P current terminal

37

330g

φ70ICF

954-7985 37P connector

954-7993

48P current terminal

48

1140g

φ114ICF

954-7995 48P connector● Other common specifications
Current capacity

3A/lineWithstand voltage*

350V AC [r.m.s], 500V DC

Insulating resistance

1000MΩ or more

Allowable heating temperature

350°C

Temperature change

15°C/min or less

Leakage

1.3x10 -11Pa•m3/sec or less

Vacuum side connector

954-7326, 954-7327 #16 socket connector

Electrode material

Kovar

Electrode diameter

φ1.57* Note that the rated voltage is different from the optional atmosphere side connector.

234

Canon ANELVA Corporation Vacuum Components Catalog

Type

Description

954-7911
954-7912

3P current
terminal

954-7921
954-7922

4P current
terminal

954-7942
954-7952
954-7962
954-7972
954-7982
954-7993

A

a

48.2

b

40.3

c

37.5

d

37.5

a

48.2

b

40.3

c

37.5

d

37.5

a

48.2

6P current
terminal

b

40.3

c

37.5

d

37.5

10P current
terminal

b

45.3

d

42.5

14P current
terminal

b

45.3

d

42.5

19P current
terminal

b

45.3

d

42.5

954-7931
954-7932

Shape

24P current
terminal
37P current
terminal
48P current
terminal

B

φC

35

φ20.1

D

E

11.2

φ34ICF fixed flange

3.3

Screw M

φ70ICF fixed flange
NW25 flange

7/8-20UNEF

NW40 flange
35

φ20.1

11.2

φ34ICF fixed flange

3.3

φ70ICF fixed flange
NW25 flange

7/8-20UNEF

NW40 flange
35

φ20.1

11.2

φ34ICF fixed flange

3.3

φ70ICF fixed flange
NW25 flange

7/8-20UNEF

NW40 flange
40

φ26.1

3.3

φ70ICF fixed flange
NW40 flange

40

φ29.6

3.3

φ70ICF fixed flange
NW40 flange

40

φ32.6

3.3

φ70ICF fixed flange
NW40 flange

40

φ36.6

3.3

φ70ICF fixed flange

11/8 -18UNEF
11/4 -18UNEF
13/8 -18UNEF

b

45.3

e

44.0

b

45.3

40

φ41.1

3.3

φ70ICF fixed flange

13/4 -18UNEF

b

49.5

40

φ53.1

7.5

φ114ICF fixed flange

21/4 -16UN

NW40 flange

11/2-18UNEF● Dimensions diagram$.H\ORFDWLRQ$(

1XPEHURI)HHGWKURXJKEDUVGLIIHU
6KDSHDĳ

ĳ
6FUHZ0ĳ

)HHGWKURXJKEDU
ĳ

&

)HHGWKURXJKEDU
ĳ

'
&

$

.H\ORFDWLRQ'/HDNJURRYH

6FUHZ0$(
1XPEHURI)HHGWKURXJKEDUVGLIIHU

$6KDSHF$
6KDSHG

6KDSHH

6KDSHE

Canon ANELVA Corporation Vacuum Components Catalog

235

components%

● Pin layout (: key location, viewed from the vacuum side)

A

C

A

D

B

B

B

C

C

3P current terminal• 954-7911• 954-7912(

4P current terminal• 954-7921• 954-7922

)

(

A

B

G

I
J

C

B

M

A

D

G

U

P V

T

R

S

F

C

C

D
J
Q
V

H
P

N

U
Z

Y

B

A

J

E
G F
M L K
T

S

X

W

R

P

R
Z

H

B

G
U
c

F

a
j

k

z

37P current terminal( • 954-7982)

g

h

p

q
w

Canon ANELVA Corporation Vacuum Components Catalog

O

P

f

d
m

n

y

V

W
e

u

v

H

X

48P current terminal( • 954-7993)* There are no pin numbers on the current terminals. (The above pin numbers are matched with the connectors.)

236

C
J

Y

Z

r

s

K
R Q

S

T
b

D

E

z

24P current terminal( • 954-7972)

G

A

L

M

N

G F E
N M L KW

J

19P current terminal( • 954-7962)

A

S
V U T
e d c b a
f
m k
j h g
r q n
s
X

K
H

F

E

B
D

L

N

C

14P current terminal( • 954-7952)

10P current terminal(• 954-7942)

)

B

K I
N
H

E

E

D

(

J

M

D

F

E

D

components

L

C

F

6P current terminal• 954-7931• 954-7932

)

H

A

A

t

■ Options● Vacuum side connector
Type

Description

Applicable
model

Compatible
Allowable current
wire size

954-7326#16 socket
contact

Common to
all series

5A
However, current
terminals are all
3A or less.

AWG16-18

Material

Allowable
heating
temperature

Tool

Weight

250°C

Main unit:
M22520/1-01
Turret: M22520/1-02(Made by Daniel)

0.8g

Be-Cu
(Rhodiumplating)
Stainless steel

Refer to the current terminal series options page for the appearance and dimensions.

● Atmosphere side connector

954-7915
954-7925
954-7935954-7945954-7955
954-7965954-7975
954-7985
954-7995

Description

Applicablemodel

3P connector
4P connector
6P connector
10P connector
14P connector
19P connector
24P connector
37P connector
48P connector

3P current
terminal
4P current
terminal
6P current
terminal
10P current
terminal
14P current
terminal
19P current
terminal
24P current
terminal
37P current
terminal
48P current
terminal

Rated voltage

Allowable
current

13A/line
However,current
terminals
are all 3Aor less.

A

B

φC

D

φE

700V

108

54.8

7.9

27

24.6

200V

250V

108

54.8

7.9

27

24.6

200V

250V

108

54.8

7.9

27

24.6

200V

250V

108

63

14.3

31.8

30.2

500V

700V

111

69.1

15.9

36.7

34.9

500V

700V

111

69.1

15.9

36.7

34.9

200V

250V

113

75.5

15.9

42.4

42.1

200V

250V

113

75.5

15.9

42.4

42.1

500V

700V

111

79.8

23.8

57.9

56.4

AC [r.m.s]

DC

500V

components

Type* Note that this is different from the withstand voltage of the current terminal.

● Atmosphere side connector common specifications
Allowable heating
temperature
Insulating resistanceContact−55°C to 125°C
5,000MΩ or more
Solder coupling inner diameter φ1.76
Compatible wire A.W.G#16 to #22

Atmosphere side connector● Atmosphere side connector shape diagram
A±2

E

B±3

See the pin layout diagram above for the pin layout.

D

C

Key

Rubber bushCanon ANELVA Corporation Vacuum Components Catalog

237

● Sheathed thermocouple
An insulated thermocouple (insulated type) is con-

Use a φ15 adapter similar to the vacuum measure-tained in a metal protective tube with a φ1.6 sheathment gauge when mounting.

diameter.
Description

Mounting adapter

Remarks

Allowable heating
temperature

Sheathed thermocouple

952-7806, φ15 adapter
954-7832, gauge adapter
954-7833, gauge adapter
954-7834, gauge adapter

Select the thermocouple type and
A and B dimensions from the following whenordering:
A: 100, 200, 300, 400, 500
B: 1000, 2000
Other dimensions are available upon request.

60°C

Sheathed thermocouple
A

40

B
2

φ1.6

Blazedφ20

φ15±0.1

Seal
For M3Compensating lead wire
(Red: + pole, White: - pole)components• An insulation type is standard for a hot junction. However, a grounded type can also be used.
• One pair is the standard number of thermocouples. However, a multi-pair type can also be used. Contact us for details.

238

Canon ANELVA Corporation Vacuum Components Catalog

● MS connector type temperature measurement
terminals
These temperature measurement terminals with thermocouples can be easily attached/removed from thevacuum side or atmosphere side.

the temperature measurement terminal's feedthroughbar/vacuum side socket contact and atmosphere sideconnection socket contact.

The K thermocouple is the standard. The same material as the chromel/alumel thermocouples is used forElectrodes

Type

Description

954-7917

2 pair temperature
measurement terminal

954-7918
954-7928
954-7938
954-7948

5 pair temperature
measurement terminal
7 pair temperature
measurement terminal
12 pair temperature
measurement terminal

Quantity

Pair

4

2

10

WeightCompatible
Flange70g

φ34ICF

340g

φ70ICF

5340g

φ70ICF

14

7

340g

φ70ICF

24

12

320g

φ70ICF

Compatible connector
Vacuum side

Atmosphere side954-7914,
2 pair connector

954-7328
Alumel socket contact
954-7329
Chromel socket contact

954-7924,
5 pair connector
954-7934,
7 pair connector
954-7944,
12 pair connector

Withstand voltage

350V AC [r.m.s], 500V DC

Insulating resistance

1000MΩ or more

Allowable heating temperature

350°C

Temperature change

15°C/min or less

Leakage

1.3x10 -11Pa•m3/sec or lessFeedthrough bar material954-7328 # 16 alumel socket contact
954-7329 # 16 chromel socket contact
Chromel, alumel

Feedthrough bar thickness

φ1.57

Vacuum side connector

Canon ANELVA Corporation Vacuum Components Catalog

components● Other common specifications239

● Dimensions diagram
A
B

D

Feedthrough
bar
φ1.57

C

Feedthrough
bar
φ1.57

Screw M

Screw ME

Number of feedthrough bars differ.

Number of feedthrough bars differ.

Shape aShape bWhen inserting the socket contact, look at the tip(vacuum side or atmosphere side) of the bar (seefigure at right) to distinguish between a chromel
feedthrough bar and an alumel feedthrough bar.

Type

Description

Shape

A

954-7917

2 pair temperature
measurement terminal

a

48.2

b

40.3

b

954-7918

5 pair temperature
measurement terminal
7 pair temperature
measurement terminal
12 pair temperature
measurement terminal

components

954-7928
954-7938
954-7948● Pin layout (A
B

Chromel feedthrough bar(Non-magnetic, + pole)

B

φC

E

Alumel feedthrough bar(Magnetic, - pole)

D

E

11.2

φ34ICF fixed flange

Screw M

3.3

φ70ICF fixed flange

35

φ20.1

7/8-20UNEF

45.3

40

φ26.1

3.3

φ70ICF fixed flange

11/8 -18UNEF

b

45.3

40

φ29.6

3.3

φ70ICF fixed flange

11/4 -18UNEF

b

45.3

40

φ36.6

3.3

φ70ICF fixed flange

11/2-18UNEF: Key location, viewed from the vacuum side)DB

2 pair temperature
measurement terminal• 954-7917• 954-7918

)

G

I
J

C

C

A

H

A

D

(

D

Leak groove

Key location

C

B
Key location

A

E

F

5 pair temperature
measurement terminal( • 954-7928)

B

L

C

J
K I
N H
M

D
E

G
F

7 pair temperature
measurement terminal( • 954-7938)

JQ

D C B AH G F EP N M L K

V U

T

S R

Z Y X W

12 pair temperature
measurement terminal( • 954-7948)*1. The above pin numbers are not on the temperature measurement terminals. (The above pin numbers are matched with the connectors.)
2. In the figure, ● indicates a chromel terminal (+) and ○ indicates an alumel terminal (-).

240

Canon ANELVA Corporation Vacuum Components Catalog

■ Options● Vacuum side connector#16 alumel
Socket contact

954-7329#16 chromel
Socket contact

Common to allseriesApplicable
thermocouple
wire diameter

Material

AWG16-18

AlumelBeryllium copper(gold plated)
ChromelBeryllium copper(gold plated)

Allowable
heating temperature

Tool

125°C

Main unit: M22520/1-01
Turret: M22520/1-02(Made by Daniel)

954-7914954-7924
954-7934954-7944

φ1.8

φ2.6

7

● Atmosphere side connector
Description
2 pairconnector
5 pairconnector
7 pairconnector
12 pairconnector

0.86g

0.87g

24.5

954-7328 #16 alumel socket contact (magnetic)954-7329 #16 chromel socket contact (non-magnetic)

Type

Weight8.3

12

Pressure bonded section

Applicable model
2 pair temperature
measurement terminal
5 pair temperature
measurement terminal
7 pair temperature
measurement terminal
12 pair temperature
measurement terminal

A

B

φC

D

φE

103

49

φ8

27

φ25

108

64

φ14

32

φ30

108

66

φ16

37

φ35

113

73

φ16

43

φ42

A±2

components

954-7328

Applicablemodels

φ3.2

Description

φ3.2

Type

E

B±3

See the pin layout diagram above for the pin layout.

Rubber bush

In the figure, the terminal connection side is on the left.

● Other common specifications
Allowable temperature range−55°C to 125°C#16 socket contact

Material: Alumel (magnetic) Chromel (non-magnetic)
Applicable compensating lead wire diameter:
AWG16-18 Crimp type

● Wiring method

D

C

Key

3UHVVXUHERQGLQJCanon ANELVA Corporation Vacuum Components Catalog

241

■ Selection guide● Select the current terminal that matches the intended application.
954-7209
Mini 100A current terminal
954-7245
Mini 5A current terminal
954-7238
Mini HF current terminal
954-7276
MHV current terminal

For high frequency
feedthrough954-7227
2W2T current terminal
954-7203

For small current
feedthrough100A current terminal
954-7210
100A2P current terminal
954-7260

For large current
feedthrough4P current terminal
954-7207

For thermocouple inclusion

400A current terminal
954-7290
6P current terminal
954-7221
8W current terminal

Connector type954-7225
8T current terminal

components

954-7223
4W4T current terminal● Applicable flange954-7252
13P current terminal

φ34 ICF

954-7911 (3P), 954-7921 (4P),
954-7931 (6P)
MS connector type multi-pin current terminal
954-7912(3P), 954-7922 (4P),
954-7932 (6P), 954-7942 (10P),
954-7952 (14P), 954-7962 (19P),
954-7972 (24P), 954-7982 (37P)
MS connector type multi-pin current terminal

φ70 ICFφ114 ICF

954-7993
48P current terminal■ Ordering information
Parts number

Model

Description

Remarks

Code

A26-13706

954-7917

2 Pair Feedthrough for Thermocouples φ34ICF, K (CA) thermocouple

36400

P25-02875

954-7918

2 Pair Feedthrough for Thermocouples φ70ICF, K (CA) thermocouple

36405

A26-13707

954-7928

5 Pair Feedthrough for Thermocouples φ70ICF, K (CA) thermocouple

36410

P25-02877

954-7938

7 Pair Feedthrough for Thermocouples φ70ICF, K (CA) thermocouple

36415

P25-02878

954-7948

12 Pair Feedthrough for Thermocouples φ70ICF, K (CA) thermocouple

36420

0194-12777

954-7914

2 Pair Contacts Plug0194-13210

954-7924

5 Pair Contacts PlugFor 2 pair temperature measurement terminal, K(CA) thermocouple
For 5 pair temperature measurement terminal, K(CA) thermocouple

Note) Contact us for more information about CE (RoHS).

242

Canon ANELVA Corporation Vacuum Components Catalog

36235
36237

ModelDescription

P25-02881

954-7934

7 Pair Contact Plug

P25-02882

954-7944

12 Pair Contact Plug

A26-11597

954-7328#16 Alumel Socket Contact

A26-11598

954-7329#16 Chromel Socket Contact

753-0500954-7227

Mini 2W2T Current Feedthrough0190-04312

954-7223

4W4T Current Feedthrough0190-04320

954-7221

8W Current FeedthroughRemarks
For 7 pair temperature measurement terminal, K (CA)thermocouple
For 12 pair temperature measurement terminal, K (CA)thermocouple
Each temperature measurement terminal vacuumside contact
Each temperature measurement terminal vacuumside contact
With φ34ICF, 1kV DC, only W is 5A, for enclosing
small current/thermocouple
With φ70ICF, 1kV DC, only W is 5A, for enclosing
small current/thermocouple
With φ70ICF, 1kV DC, 5A, for small current

Code0190-04338

954-7225

8T Current FeedthroughWith φ70ICF, 1kV DC, for enclosing thermocouple

36103

VMT-9152954-7245

5A Current FeedthroughWith φ34ICF, 1kV DC, 5A, for small current

36110

794-5947

954-7290

6P Current FeedthroughWith φ70ICF, 1kV DC, 5A, plug connectable36111

0191-15951

954-7291

6P Plug

Atmosphere side connector for 954-7290

36200

0190-04354

954-7252

13P Current FeedthroughWith φ70ICF, 1.5kV DC, 5A, plug connectable36112

0191-15943

954-9254

13P Contact Plug

Atmosphere side connector for 954-7252

36201

824-3199954-7256#20 Socket Contact

36250

795-2002

954-7276

MHV Current FeedthroughN14051188

UG-932/UMHV Connecter

0190-04370

954-7238

Mini HF Current Feedthrough9007-71040

BNCH-CS

Short Cap

Vacuum side for 954-7252
With φ34ICF, 5kV DC, 3A, coaxial connector connectable
Atmosphere side connector for 954-7276
With φ34ICF, 3kV DC, 5A, coaxial connector connectable
For 954-7276

36206

N14051097

NP-3A-S

HF Contact Plug

Atmosphere side connector for 954-7238

36204

0111-86518

954-7260

4P Current FeedthroughWith φ70ICF, 1kV DC, 50A, plug connectable

36130

0191-15977

954-7261

4P Plug

Atmosphere side connector for 954-7260

36205

0190-04396

954-7209

Mini 100A Current FeedthroughWith φ34ICF, 7kV DC

36140

0190-04401

954-7203

100A Current FeedthroughWith φ70ICF, 7kV DC

36141

4-340069

954-7210

100A2P Current FeedthroughWith φ70ICF, 7kV DC

36142

MOD-243304

953-9900

100A Current Feedthrough954-7209, 7203, 7210 vacuum side

36270

MOD-243305

953-9901

100A Current Feedthrough954-7209, 7203, 7210 vacuum side

36271

P25-12394

953-9916

100AL Current Feedthrough954-7209, 7203, 7210 vacuum side

36275

MOD-243654

953-9910

100A Current Feedthrough954-7209, 7203, 7210 atmosphere side

36276

0190-04427

954-7207

400A Current FeedthroughWith φ70ICF, 3kV DC, 400A

36150

FMT-9088

954-7911

3P Current FeedthroughWith φ34ICF

36160

FMT-9089

954-7912

3P Current FeedthroughWith φ70ICF

36163

FMT-9090

954-7921

4P Current FeedthroughWith φ34ICF

36166

FMT-9091

954-7922

4P Current FeedthroughWith φ70ICF

36169

FMT-9092

954-7931

6P Current FeedthroughWith φ34ICF

36172

FMT-9093

954-7932

6P Current FeedthroughWith φ70ICF

36175

FMT-9094954-7942

10P Current FeedthroughWith φ70ICF

36178

FMT-9095

954-7952

14P Current FeedthroughWith φ70ICF

36181

FMT-9096

954-7962

19P Current FeedthroughWith φ70ICF

36184

594-3505954-7972

24P Current FeedthroughWith φ70ICF

36187

FMT-9098

954-7982

37P Current FeedthroughWith φ70ICF

36190

FMT-9099

954-7993

48P Current FeedthroughWith φ114ICF

36193

0191-14989

954-7915

3P Contact Plug

Atmosphere side connector for 954-7911, 954-7912

36210

0191-14997

954-7925

4P Contact Plug

Atmosphere side connector for 954-7921, 954-7922

36213

0191-15008

954-7935

6P Contact Plug

Atmosphere side connector for 954-7931 ,954-7932

36216

0191-15016

954-7945

10P Contact Plug

Atmosphere side connector for 954-7942

36219

0191-15024

954-7955

14P Contact Plug

Atmosphere side connector for 954-7952

36222

0191-15032

954-7965

19P Contact Plug

Atmosphere side connector for 954-7962

36225

0191-15040

954-7975

24P Contact Plug

Atmosphere side connector for 954-7972

36228

0191-15058

954-7985

37P Contact Plug

Atmosphere side connector for 954-7982

36231

0191-15066

954-7995

48P Contact Plug

36232

0191-21708

954-7326#16 Socket Contact

Atmosphere side connector for 954-7993
954-7245,7290,7276, multi-pin current terminal for
vacuum side

36239
36242
36260
36265
36100
36101
36102

36120
36203
36121

components

Parts number

36251

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

243

Ultra-high Vacuum Viewing Ports■ Summary
A viewing port is a window for looking inside a vacuum container. These viewing ports use Kovar glass orsynthesized sapphire sealed with Kovar welded onto
an ICF flange, enabling them to be used under ultrahigh pressure of up to 10 -8Pa. In particular, the sapphire viewing ports have stable transmission characteristics with respect to irradiation of electromagnetic
waves and particle beams in the UV range (shortwavelength).

■ Features
1. Wide, clear effective field of view

5. Excellent radiation resistance
The synthetic sapphire is a single crystal of AL2O3.
It has excellent radiation resistance against irradiation of high energy electromagnetic waves andparticle beams with little discoloration or change intransmittance. (954-7042, 7043, sapphire viewing
ports)The use of ICF flanges enable the viewing port to be
used under ultra-high vacuum.
3. High heat tolerance
Capable of withstanding 350°C heat cycle.
4. Stable transmission of wide wavelength range■ Specifications

The sapphire viewing ports offer more stable transmission characteristics over a wider range of wavelengths in the UV to IR range when compared to
Kovar glass viewing ports and longer wavelengths
in the IR range compared to quartz viewing ports.
(952-7042, 7043, sapphire viewing ports)

Withstandpressure
Allowable heating temperature
TemperaturechangeLeakage

Kovar glass

0.1MPa (inside vacuum, outside atmosphere)
350°C
25°C/min or less1.3x10 -11Pa•m3/sec or lessQuartz glass

Sapphire

100
80Transmittance (%)

components

The thin viewing port provides a wide effective fieldof view. The strain-free glass and sapphire allow fora clear view.
2. Ultra-high vacuum

60
40
UV
20

0.1

0.15

0.2

Infrared light

Visible light

0.3 0.4

0.7

1.0

2.0

4.0

6.0

8.0

Wavelengths (μm)

Relationship between the wavelength and transmittance of glass material (reference value)

244

Canon ANELVA Corporation Vacuum Components Catalog

■ Kovar glass viewing port dimensions

Kovar glass
Inclusion dishC (Effective visible diameter)t

B

C (Effective visible diameter)

T

T

t

Kovar glass

A

D

Inclusion dishD

Fig. 2 Thin type viewing port (shape w)

Fig. 1 Thin type viewing port (shape q)

A
C (Effective visible diameter)Tt

Kovar glass

Inclusion dishD

Fig. 3 Thin type viewing port (shape e)Material (Flange: SUS-304, Glass: Synthetic Kovar glass, Enclosing dish: Kovar)

954-7001

Thin type viewing port with φ34ICF

Connection
flangeφ34ICF

(1)

φ20

<0

φ15

φ34

10

1.8

0.05kg954-7002

Thin type viewing port with φ70ICF

φ70ICF

(2)

φ43

<2.9

φ32.6 φ7014

3.50.25kg954-7003

Thin type viewing port with φ114ICF

φ114ICF(2)

φ72.5 <3

φ60

φ114

19

4.5

0.85kgDescription

Shape

A

B

C

D

T

t

Weight954-7004

Thin type viewing port with φ152ICF

φ152ICF

(2)

φ113

<5

φ98

φ152

22

6.1

1.4kg

954-7005

Thin type viewing port with φ203ICF

φ203ICF

(3)

φ163

<0

φ143

φ203

24

8.6

2.5kg

components

Type■ Sapphire viewing port dimensions
A

C

Inclusion dishInclusion
dish

A

t

Synthetic sapphire

T

T

t

Synthetic sapphire

B
B

C

954-7042, sapphire viewing port with φ70ICF

954-7043, sapphire viewing port with φ114ICF

Material (Flange: SUS-304, Glass: Synthetic sapphire, Enclosing dish: Kovar)
Type

Description

Connection
flangeA

954-7042

Sapphire viewing port with φ70ICF

φ70ICF

φ40

954-7043

Sapphire viewing port with φ114ICF

φ114ICF

φ56

B

C

T

t

Weight

φ33

φ70

12.7

2.5

0.25kg

φ59

φ114

17.5

3.0

0.97kgCanon ANELVA Corporation Vacuum Components Catalog

245

■ Options

Protective covers (Material: SUS-304)

The following options are available to protect theviewing port.

Type954-7012

Protective covers● Features

954-7013

1. 	Protects the bolted glass surface of the viewing port
from damage due to external force.
2. Can be easily installed on the viewing port. Fig. 4
shows the protective cover.

954-7014

954-7015

Vacuum container

Applicable viewing
port954-7002, 7042
Thin type with φ70ICF
Viewing port
954-7003, 7043
Thin type with φ114ICF
Viewing port
954-7004,
Thin type with
φ152ICF
Viewing port
954-7005,
Thin type with
φ203ICF
Viewing port

A

B

t

φ72.7

20

0.4

φ116.725

0.4

φ154.729

0.6

φ205.732

0.6

Viewing port
Glass

A

t

B

components

Protective coverFig. 4

Fig. 5

Shields

Shield assembly (Material: SUS-304)● Features

Type

1. 	The vaporized material generated inside the vacuum chamber adheres to the shield glass to ensure aclear view through the viewing port.
2. 	The shield glass is easy to replace. The shield assembly holds the glass shield and can be fixed to theinner diameter of the vacuum chamber side portwith a single action.

246

Applicable attachment port inner diameter954-7022φ38

954-7023

φ54.9

954-7026

φ60.2

954-7025

φ147

Shield glass (Material: Soda glass)Type

Applicable shield assembly

Glass
diameter
φ35

Thickness
2954-7032

954-7022954-7033

954-7023

φ51

2954-7036954-7026φ56

2954-7035954-7025φ1422954-7034954-7024

φ91

2Canon ANELVA Corporation Vacuum Components Catalog

Vacuum container

Viewing port

Shield glass

Shield glass

Grip

Shield assembly

Shield assembly
Attachment port

Attaching method ─ Hold the grip of the shield assembly and place
it inside the attachment port. The shield assembly will seat itself firmly inside the attachment
port.

■ Ordering information
Model

Description

Remarks

Code

A26-11089

954-7001

φ34 Mini Viewing Port

With φ34ICF (Kovar glass)

36305

0190-04566

954-7002

φ70 Thin Type Viewing Port

With φ70ICF (Kovar glass)

36301

795-1609

954-7003

φ114 Thin Type Viewing Port

With φ114ICF (Kovar glass)

36302

0190-04582

954-7004

φ152 Thin Type Viewing Port

With φ152ICF (Kovar glass)

36303

A26-01963

954-7005

φ203 Thin Type Viewing Port

With φ203ICF (Kovar glass)

36304

A26-03738

954-7042

φ70 Sapphire Viewing Port

With φ70ICF

36311

A26-03991

954-7043

φ114 Sapphire Viewing Port

With φ114ICF

36312

Thin type viewing port with φ70ICF/for sapphire viewing
port with φ70ICF
Thin type viewing port with φ114ICF/for sapphire viewing port with φ114ICF

825-5725954-7012

φ70 Protect Cover for Viewing Port

856-1409

954-7013

φ114 Protect Cover for Viewing Port

825-5895

954-7014

φ152 Protect Cover for Viewing Port

For thin type viewing port with φ152ICF

36342

A26-03634

954-7015

φ203 Protect Cover for Viewing Port

For thin type viewing port with φ203ICF

36343

734-2111954-7032

φ35 Shield Glass

For thin type viewing port with φ70ICF

36350

P25-02781

954-7036

φ56 Shield Glass

For thin type viewing port with φ114ICF

36354

734-2107954-7022

φ38 Shield Assembly

For thin type viewing port with φ70ICF

36370

P25-02780

954-7026

φ60.2 Shield Assembly

For thin type viewing port with φ114ICF

36374

734-2117954-7024

φ95.6 Shield Assembly

For thin type viewing port with φ152ICF

36372

components

Parts number

36340
36341

Note) Contact us for more information about CE (RoHS).

Canon ANELVA Corporation Vacuum Components Catalog

247

For electron beam deposition

E-type Electron Guns

■ Summary
Our E-type Electron Guns have a proven sales record since their introduction in 1964 as electron guns used forvapor deposition experiments. Through constant, continuous product development and improvement from thattime, today they have evolved into a more operable, reliable, and safer electron beam deposition source usedin the electronics industry and optics industry laboratories. We are confident that our E-type electron guns cansatisfy the performance requirements of any field.

■ Features of electron beam deposition
In electron beam deposition, electrons emitted froma hot filament are accelerated in a vacuum, and deflected by a magnetic or electric field to bombards anevaporated substance to cause thermal evaporation

components

and form a thin film on a substrate. This method has
the following advantages over the resistance heating
method.
1. Deposition of most metal and oxide from AL torefractory metals such as W, Ta, and Mo is possible
with its high power density.
2.	The water-cooled copper crucible maintains the purity of the deposition specimen, providing depositedfilms with few impurities.
3.	Parts wear out slower compared to resistance heating type evaporation sources.

3. Beam sweep capable
Electron guns capable of beam sweep, able to withstand baking up to 200°C, and usable in an ultrahigh vacuum of up to approximately 10−8Pa are
available (980-7100 and 980-7300)
Ultra-high vacuum electron guns without beam
sweep, and capable of withstanding baking up to
250°C are also available (980-7102, 980-7104, and980-7302).
4. Sustained discharge prevention
The electron gun power has a circuit to prevent sustained discharge.

■ Features of the ANELVA E-type electron gun
and power supply
1. Excellent deposition
Because the primary electron beam is deflected by amagnetic field, the secondary electrons and reflected
electrons generated from the surface of the evaporated sample are also deflected and are less likely toadversely a effect the deposited film.
2. Excellent control
A raster scan method and circle sweep method areused as the electron beam sweep methods. The amplitude, scanning frequency, and waveform patternin the X and Y directions are compensated to enablefine control of the power density over the crucible.

248

Canon ANELVA Corporation Vacuum Components Catalog

■ E-type electron gun series line-up
you can select the best gun for your application, basedon the input power, crucible capacity, number of crucibles (single-shot or multi-barrel), and beam sweep
capability.
For conventional vacuum equipment, a high-pressure

input terminal and shutter mechanism had to be attached from a separate port. As a result, it was difficult to install an EB gun because of the small work
space. To solve this problem, flange mount type products with these components integrated into the electron gun itself are also included.

E-type electron gun
×

980-7(980- 100710
2kW 2)
single
-sh

ot

×
980-7
1
2kW 04
triple
-sh

ot

×

980-7
(980- 300
730
3kW 2)
single
-sh

ot

e
am

N

0°
C 22
250°

2kW

×

○

kW
○ 3
0° ×)
C
(
200° 221)

2.5 (250°C

3.8

○

3kW
×4

○
0°
C 22
°
0
0
2

4

ions

ificatSpec

es

OptimumCompatible
Acceptable
Not acceptable or compatible

1

°C)

(250

ur

ns

3

1

at

catio

Fe

Appli

Ul
t
eq ra-hi
uip ghme va
nt cuu
su m
pp
ort

Pr
eq oduui ctipm one lR&D nt ine

980-7
4
3kW 01
4 sou
rce

yer
ulti-lam
For m igh vacuu-hultra ition
s
depo
coil
weep
ith a swer for
w
d
e
n.
p
Equip creased po depositio
lm
m
in
fi
u
u
d
g
c
n
n
a
igh vanducti.
ultra-hfor supercoerimenting
p
l
x
a
e
e
Id on andcreatiesourc
le of 4 eposition.
b
a
p
a
d
C
film
s
uctinganeou
simult supercond enting.
imfor
Ideal and exper
n
o
ti
a
e
cr

1

e
typ
nt
ou t
m
u
ge
inp
an
Fl
um
im
ax
p
M wer
ee
po
sw tioncam efled
Be
am
Be glerean ng tu
ki ra
ity
Ba pe
ac
m )
te X apcA(M ciblefuCr ) er oL(m mb les
u
N cib
u
cr

×

-high
ultra
le
b
a
ep
sition
Swe
depo
m
u
vacu
use

○

○ 2kW
0° (×)
C
200° 22components

We offer a full line-up of E-type electron guns so that

Note: 980-7102, 7302, 7311 in parentheses do not have a sweep coil(sweep function).

Canon ANELVA Corporation Vacuum Components Catalog249

E-type Electron Guns
■ 980-7100/980-7102 2kW single-shot E-type
electron gun(Experimental)● Features
1. Capable of beam sweep. (980-7100 only)
2. Compact and lightweight.
3. Can be easily attached to the equipment.
4. Can withstand baking and can be used in ultra-highvacuum of 10-8Pa range.
5. Flange mount type available.

● Applications
Deposition of high temperature superconductive material
Deposition of various metals including refractory metals(Note) 980-7100 shown (with sweep coil)

Deposition of insulator or semiconductor
Melting of refractory metals
Ideal for creating Josephson devices● Specifications

components

Type980-7100

980-7102

Beam accelerator voltage

4kV

4kV

Emission current

0 to 500mA

0 to 500mA

Filament power

10Vx25A (max)

10Vx25A (max)Coil current±1A (max)-

Electron beam scanning

Available-

Electron beam scanning
range

±8mm

-

Quantity

x1

x1

Size

φ18xφ12xDepth 6 (mm)φ18xφ12xDepth 6 (mm)Capacity

1mL

1mL

Beam deflection angle

220°

220°

Cooling water flow

2L/min*Crucibles

2L/min*-3

Operating pressure

6.7x10 Pa or less

6.7x10 -3Pa or less

Baking temperature

200°C (max)

250°C (max)Weight1.3kg

1kg

Attachments

Filament (x10) tool attachment fixture

Same as left

Applicable controller

922-9203 2kW E-type electron gun controller
or EGP-230 electron controller,
EGP-212S-C sweep controller

922-9203 2kW E-type electron gun controller
or EGP-230 electron gun controller

Typical evaporation rate example

See item in technical memorandum

Same as left

* If necessary, the customer must install a boost pump to ensure a sufficient flow of cooling water.

● Water-cooled pipe dimensions

250

A (D)+B≤320, B-C≥76

Dimensions

A

0 or 50 to 180 (upward)D

0 or 50 to 180 (downward)B

119 to 329/69 to 329 (when A = D = 0)C

43 to 260

Canon ANELVA Corporation Vacuum Components Catalog

● Dimensions diagram(46)

Crucible shape

Crucible center

980-7301Sweep coil

(13)

(φ7.8)

φ12±0.5(φ6)(98.1)

6±0.3

φ18±0.5(48.1)(29) (22)

B

197±5
111±5

(φ6)

This figure shows the dimensions diagramof the 980-7100E-type electron gun. Thisgun is a 980-7102E-type electron gun
fitted with a 980-7301 sweep coil unit.

D

φ2.3 Oxygen-free copper wire mounting holes

(φ34)

A

N

(48)

(19.5)
(70)

(8.5)

C

φ70ICF

components● Attachment method

Filament power supply lines (L=2M)

953-9904 100A
connecting terminal

980-7100 2kW single-shot
E-type electron gun

954-7210 100A2P
current terminal

954-7830 flange954-5110 receive flange
S SUS304 WA×6

922-9203 connector

H SUS304 MS6×22

S SUS304 WA×6

R1/8

H SUS304 MS6×30

953-5014 gasket

Rc1/8
952-9830 nut

953-9230 gasket

Coil power supply line (L = 500 x 4 lines)
A HEX SUS304 N×6
954-7922 4P current terminal
S SUS304 WA×6
HEX SUS304 MS6×22

The above mounting parts are all included in the attachments forthe 980-7100E-type electron gun (sold separately).

Canon ANELVA Corporation Vacuum Components Catalog

251

■ 980-7104 2kW triple barrel E-type electron gun(for laboratory use)

● Specifications
Type
Beam accelerator voltage

4kV

Emission current

0 to 500mA

Filament power

10Vx25A (max)Coil current-

Electron beam scanning-Electron beam scanning
range

-

Crucibles

For φ400 chamber

Quantityx3

Size

φ18xφ12xDepth 6 (mm)Capacity

1mL

Beam deflection angle

220°● Features

Cooling water flow

2L/min*1. Multi-barrel electron gun that can withstand baking and can be used in ultra-high vacuum of 10-8Pa
range.
2. Can accommodate up to three samples.

Operating pressure

6.7x10 -3Pa or less

Baking temperature

250°C (max)Weight

4.4kg

3. Can be easily attached to the equipment.

Filament (x10) tool attachment
fixture922-9203 2kW E-type electron
gun controller or EGP-230 electron gun controller
See item in technical memorandum

Attachments
Applicable controller● Applications
Deposition of high temperature superconductive material.
Deposition of various metals including refractory metals.
Deposition of insulator or semiconductor.

Typical evaporation rate
example* If necessary, the customer must install a boost pump to ensure asufficient flow of cooling water.

Melting of refractory metals.
Ideal for creating Josephson devices.

38±1
146±2

6±1

80±2

342±5 stroke±3838±130.5±231.5±17.5±1178±339.9±2146.5±2

9±2

392±5 stroke±3834.1±2● Dimensions diagram

(φ6)

φ18±1

251±3 stroke±38
φ12±1

252

96±2

N

192.5±1

Canon ANELVA Corporation Vacuum Components Catalog

Crucible shape

112.5±2

Filament center location

67.5±2

φ45±1
φ34±1

This figure shows the demensions diagram of the 980-7104E-type electron gun(for φ300 chamber).

94±1

178±3

φ34.5±1

components

980-7104

Right side view

38±1

146±2
301.5±3 stroke±3830.5±26±1

80±2

291±5 stroke±3838±134.1±231.5±17.5±1

228±3
39.9±2146.5±29±2(φ6)

341±5 stroke±38

φ18±1

φ12±1

242.5±196±2

N67.5±2
φ34±1This figure shows the demensions
diagram of the 980-7104E-type electron gun (for φ400 chamber).

Filament center location

112.5±2

94±1

φ45±1

φ34.5±1

228±3

Right side view

● Mounting method (for φ400 chamber)Move the crucible horizontally. Since attachment iscomponents

performed from inside the vacuum chamber, the innerdiameter of the vacuum chamber must be at least
350mm. However, note that the required inner diameter depends on the depth of the attachment port. If
the attachment port is within 67mm from the top of
the vacuum chamber, φ300 diameter is sufficient. The
attachment method for supplying power is the sameas that for the 980-7100 2kW single-shot E-type electron gun. A separate conversion flange is necessary forports other than the φ70ICF port.

Canon ANELVA Corporation Vacuum Components Catalog

253

■ 980-7300/7302 3kW single shot E-type electron gun (for laboratory use)

● Features
1. Capable of beam sweep (980-7300).
2. Compact, lightweight, and bigger capacity crucible
than the 2kW electron gun. (2.5mL)
3. Can be easily attached to the equipment.
4. Can withstand baking and can be used in ultra-highvacuum of 10-8Pa range.
5. Flange mount type available.
Flange mount type product: 980-7001 deposition
unit (mounts a 980-7300E gun)● Applications
Deposition of high temperature superconductive ma(Note) 980-7300 shown (with sweep coil)terial.
Deposition of various metals including refractory metals.
Deposition of insulator or semiconductor.
Melting of refractory metals.
Ideal for creating Josephson devices.

● Specifications

components

Type980-7300

980-7302

Beam accelerator voltage

5kV or 4kV*

5kV or 4kV*

Emission current

0 to 500mA (4kV), 0 to 600mA (5kV)

0 to 500mA, 0 to 600mA (5kV)

Filament power

10Vx25A (max)

10Vx25A (max)Coil current±1A (max)-

Electron beam scanning

Available-

Electron beam scanning range

±8mm

-

Quantity

x1

x1

Size

φ22xφ18xDepth 8 (mm)φ22xφ18xDepth 8 (mm)Capacity

2.5mL

2.5mL

Beam deflection angle

220°

220°

Cooling water flow

3L/min*2

Crucibles

1

1

3L/min*2-3

Operating pressure

6.7x10 Pa or lessSame as left

Baking temperature

200°C (max)

250°C (max)Weight1.3kg

1kg

Attachments

Filament (x10) tool attachment fixture

Same as left

Applicable controller

EGP-230 electron gun controller
EGP-212S-C sweep controller

EGP-230 electron gun controller

Typical evaporation rate example

See item in technical memorandum

Same as left

*1 Normally shipped with 5kV specification.
*2 If necessary, the customer must install a boost pump to ensure a sufficient flow of cooling water.

● Water-cooled pipe dimensions

254

A (D)+B≤320, B-C≥76

Dimensions

A

0 or 50 to 180 (upward)D

0 or 50 to 180 (downward)B

119 to 329/69 to 329 (when A = D = 0)C

43 to 260

Canon ANELVA Corporation Vacuum Components Catalog

● Dimensions diagram
(44)
(20)

(φ7.8)
Crucible center

B

197±5
C

111±5

φ2.3 Oxygen-free copper wire
mounting holes

D

This figure shows the demensions diagram of the980-7300E-type electron gun. This gun is a 980-7302Etype electron gun fitted with a 980-7301 sweep coil unit.

(φ6)

A

(50)

N

(70)

(19.5)(10.5)

980-7301 Sweep coil

(φ34)

φ18±0.5
Crucible shape(13)(98.1)

8±0.3

φ22±0.5(φ6)(48.1)(31)

φ70ICF

components● Attachment method

Filament power supply lines (L=2M)

953-9904 100A
connecting terminal

980-7300 3kW single-shot
E-type electron gun

954-7210 100A2P
current terminal

954-7830 flange954-5110 receive flange922-9203 connector

S SUS304 WA×6

S SUS304 WA×6

H SUS304 MS6×22

R1/8

H SUS304 MS6×30

953-5014 gasket

Rc1/8
952-9830 nut

953-9230 gasket

Coil power supply line (L = 500 x 4 lines)
A HEX SUS304 N×6
954-7922 4P current terminal
S SUS304 WA×6
HEX SUS304 MS6×22

The above mounting parts are all included in the attachments forthe 980-7300E-type electron gun (sold​separately).

Canon ANELVA Corporation Vacuum Components Catalog

255

■ 980-7401 3kW four source E-type electron gun(for laboratory use)

● Specifications
Type
5kV

Emission current

0 to 600mA

Filament power

10Vx30A (max)

1. Capable of stable, separate control of four sources
with largely different saturated vapor pressures,such as Y, Ba, and Cu, in spite of its remarkably
compact size of φ171×100mm.
2. 	The distance between the crucibles is 60mm (42mmminimum). This provides for excellent on-board mixing ratio distribution and deposition distribution ofdifferent elements. Each crucible is also surrounded
by a copper hearth to prevent cross contamination.
3. 	The special circuit (patent pending)*1 minimizes theharmful effect of secondary and reflecting electrons.
4. Designed for simple, easy maintenance, such as easy
replacement of the filament, taking into consideration useage for the gun under extreme conditions
such as in an oxygen environment.
5. High speed electron beam sweep, enabling smooth
deposition of insulators. (Patent pending)*2
6. Flange mount type available.
Flange mount type product: 980-7006 depositionunit

DC ±2A

Coil current

AC 5A p-p 400/40Hz

Electron beam scanning

Available● Applications
Multi-source deposition equipment mainly for hightemperature superconductive thin-film creation ex-

Quantityx4

Size

φ24xφ20xDepth 10 (mm)Capacity

3.8mL

equipment

Beam deflection angle

225°

Experimental multi-layer film deposition equipment

Cooling water flow

14L/min (main unit)/0.5L/min (coil)*

Operating pressure

10 -2Pa to 10 -8Pa

Baking temperature

200°C (max, with cooling waterflowing)

Weight5kg

Attachments

Filament (x10) tool attachment
fixtureApplicable controller

EGP-230 electron gun controller x4
EGP-212S-D sweep controller, x1

Simultaneous deposition rate
Control example

See item in technical memorandum

Crucibles

components

980-7401

Beam accelerator voltage● Features

periments
Other general experimental multi-source deposition*1, *2
Patented in the United States and Taiwan
US Patent Number: 5034590
Taiwan Patent Number: 044859* If necessary, the customer must install a boost pump to ensure asufficient flow of cooling water.

256

Canon ANELVA Corporation Vacuum Components Catalog

● Dimensions diagram

(60)

(60)

Position of current terminal
for sweep coil(φ171))

Current terminal
for sweep coil

69±2

44±3

B

10±0.5

Crucible shapeSS-4-VCR-4
male nut (CAJON)(155)

B
Constructed by the customer(φ36)

φ70ICF flange

(78)

60

(φ

225±5

(50)

(39)

SS-4-VCR
sweep coilwater coolingpipe position

components

(175)

(20)

Crucible surface(30) (15°(7)φ24±0.5
φ20±0.5

(7)

)
(54)
(75)
(88)
B – B view on arrow(φ10)

The cooling coil feedthrough piping must be constructed by the customer.

● Attachment method954-7422 4P current terminal
980-7401 3kW four source electron gun

Coil power supply line x 4 lines

954-7210
100A2P current terminal x 4
953-9910
12kV adapter x 8
Filament power supply line
(L = 500 x 8 lines)

Canon ANELVA Corporation Vacuum Components Catalog

257

Electron Gun Controllers■922-9203 2kW E-type electron gun controller
This high-voltage DC power source is designed for Etype electron guns.

● Features
1. Compact, affordable high-voltage DC power sourcethat is easy to handle.
2. Built-in circuits prevent discharge and water shortage of the electron gun.

● Specifications

components● Dimensions diagram−3.5kV DC to −4.6kV

DC output current

DC0 to 500mA

Filament output

10V ACx30A

Input requirement

200V ACx15A 1φ50/60Hz A ground

Dimensions

W500xD500xH1200

Weight130kg

Operation

Manual operation from front panel only
(No external control function)

Applicable electron
gun

980-7100, 980-7102
980-7104● Attachments

500

Input code (5m)x1

Output cable assembly (3m)x1

Protection cord (3m)x1

Ground cord (5m)x1

Fuse (5A)x3

Return cable (5m)x1

(Note) Use the EGP-230 or EGP-210RS if deposition rate control in
combination with the deposition controller is required. This isnecessary because emission cannot be changed by external
control.

95

1000

500

DC output voltage

258

Canon ANELVA Corporation Vacuum Components Catalog

■ EGP-230 3kW E-type electron gun controller
2kW to 3kW small E-type electron guns.

● Specifications
Item● Features

Power input

200V AC±10% x11A
3φ 50/60Hz, A ground

Input voltage

3810VA (efficiency 78%)

Output voltage (power)

0 to 5kV DC (3kW)

Output voltage control
methodElectric slidax feedback

Output current (emission)

0 to 600mA(High: 0 to 600mA Low: 0 to 60mA)

Emission current control
methodThyristor phase control

Filament output

8/6V ACx35A(Switched with internal connector)

Protective function• Limit switch installed on each panel• External protection support(Example, vacuum, cooling water,
HV connector)• Over-current protection(Operates at approx. 780mA or
more)

External emission
Control input

Absolute value circuit: 0 to −10V or
0 to +10V input allowed

External input function• High-voltage HV ON / OFF possible• Protection input

Dimensions

W467xH691xD701mm

WeightApprox. 150kg

Applicable electron gun

980-7100, 980-7102
980-7300, 980-7302
980-7104, 980-7401● Dimensions diagram467

1.	The function used to externally control the emission
can be used to control the rate using signals fromfilm thickness controllers such as the Inficon XTC/2.
2. An absolute value input method is used for emission
control, allowing direct input with either 0 to +10V
or 0 to -10V.
3. HV ON/OFF and the amount of emission can becontrolled externally, enabling automation of theequipment.
4. Circuits are built in to prevent discharge, together
with various protective functions such as a panel
with a limit switch.

Specifications

components

This high-voltage DC power source is designed for the● Attachments
Output cable (5m)x1

Return cable (5m)x1

Fuse (2A)

x2

Fuse (0.5A)

x1

External controller connector

x1

Manual

x1

701

691
624

x1

OUT

AC/200V
SGFG

67

Input cable (5m)External input connector
Fuse 2A
Fan

External control
connector

Canon ANELVA Corporation Vacuum Components Catalog259

■ Notes on attaching the output cable
When using an E-type electron gun, space for connecting the output cable from the controller must be
provided.
One 922-9203 output cable (2P connector ×1) (up to
four for the 3kW source E-type electron gun) is used

φ85

φ70

for the 2kW and 3kW E-type electron guns.

24
117

922-9203 output cable● Example of attaching the output cable (for the 980-7100 2kW E-type electron gun)components

954-7922
4P current terminal♯16 socket contact
Coil lead wire
(4 wires)980-7100
2kW E-type electron Gun

953-9230
gasket(φ70 ICF port)
Space with
output cable attached MIN200

953-5014
gasketM6 bolt

922-9203
output cable

φ2.3 Oxygen-free copper

M6
bolt

953-9904
100A connecting terminal
952-9830
gasket954-7210
100A2P
current terminal(Vacuum container)

260

954-5110
flange(φ70 ICF port)
954-7830
flangeCanon ANELVA Corporation Vacuum Components Catalog

magnetic field leakage. Otherwise, the beam con-● Notes on installing multiple 2kW electron gunsvergence and bombarding location will be adversely

When installing more than one 2kW electron gun

affected. Refer to the following data to determine thein the same chamber, they must be kept sufficiently

arrangement of the actual electron guns.

apart to prevent mutual interference due to electro-

Bw, Bx[mT]

H

BH, BY
[mT]

W

BH

30

30
S

S

N

BY

Direction ofmagnetic field

BH
20

Y

N

20

X
Bw

10

10

Bx

0

BY

50

100

0

150 (mm)50

W.X (mm)100

150 (mm)

H.Y (mm)

Magnetic field leakage of 980-7102 electron gun alone(980-7302)

L

B1, B2, B3
[mT]

−X
X

B2

B2
20

X N

S
B3

S

N

B3

B1: Magnetic field at crucible center
B2: Magnetic field at crucible edge
B3: Magnetic field on the filament

100b) When filaments are oriented in the reverse direction→L≥50mm

N
B1

X

50

100
L (mm)

150

B1, B2, B3
[mT]

L

B3
B2

B1

30

B1

componentsa) When filaments are oriented in the same direction→L ≥ 50mm

S

B1

30

X
X

B2
S

N

B1: Magnetic field at crucible center
B2: Magnetic field at crucible edge
B3: Magnetic field on the filament
Change in magnetic field when two 980-7102 (980-7302) electron guns are placed in the same direction (a) and opposite direction (b). The minimum distance L will be 50mm in either case.

20
B3
10

0

50

Canon ANELVA Corporation Vacuum Components Catalog

100
L (mm)

150

261

N

30

S

B1
[mT]

0°
12

S

N

120°

R=60mm

R

20
N

S B

10
B 1 : Magnetic field on the filament← : Direction of magnetic field

0

50

100
R (mm)

150

components

Relationship between the radius (R) and magnetic field when the 980-7102 (980-7302)
electron gun is placed on the same circumference. Minimum radius R=60mm.

B1
[mT]

: Magnetic field of single-shot EB gun

30: Magnetic field of triple-shot EB gun
980-7104

L = 60mm

B1

20

N2

N1

S1

L

S2

980-7102(980-7302)

10B1B1 : Magnetic field at crucible center← : Direction of magnetic field

0

50

100
L (mm)

150

Relationship of the distance (L) and magnetic field between the 980-7104 2kW triple-barrel
electron gun and 980-7102 (980-7302) electron gun. Minimum dimensions L=60mm.

262

Canon ANELVA Corporation Vacuum Components Catalog

■ Technical Notes● Typical deposition rate example(The data in this section is the average of the typical deposition rates measured with a crystal thin film meter 250mm
above a crucible using our E-type electron guns.)

10,000Ti(7g)
Mo(11g)Au(13.7g)
1,000
Depositionrate(Å / min)Substrate
100

250mm

E-GUN
0

0.5

1

1.5
Power (kW)2

Deposition rate of 2kW E-type electron gun
Electron gun: 980-7102 E-type electron gun
Sample volume: Shown in parentheses

components

10

Canon ANELVA Corporation Vacuum Components Catalog263

980-7300 Deposition rate of 3kW single-shot E-type electron
gun with sweep
Electron Gun: 980-7300
Sample volume : 2.5mL
Sweep: Those that are indicated as sweep(Bi, AL, Si, Cr, Mo, SiO2).
Others are stationary.
The deposition rate described here is just a measurement
example. The deposition rate characteristic depends on factors such as the sample volume, surface condition, degree of
vacuum, and sweep status.

Superconductive materialY
10000

Bi (Sweep)

Ba

Cu
Y2O3
La

1000
Deposition
rate(Å/min)Substrate

100
250mm

E-GUN
10

0

1

2

3

Power (kW)components

Wiring material

Magnetic film material, refractory material, insulating material
Cr (Sweep)

10000

Si

Al (Sweep)

SiO2(Sweep)

10000

Ni (Sweep)

Al
Si(Sweep)

Mo (Sweep)

1000

1000

Deposition
rate

Deposition
rate(Å/min)(Å/min)Substrate

Substrate

100

100
250mm

250mm

E-GUN
10

0

1

2

E-GUN

3

10

0

Power (kW)264

Canon ANELVA Corporation Vacuum Components Catalog

12Power (kW)

3

1MIN
Zr

Si

Deposition rate (Å/S)

Deposition rate (Å/S)

10

Y

5

10

1Å/S

0

1Å/S

0

Cu

1Å/S

0

Aℓ

1Å/S

0

Zr

0
Ba

5

(Time)

Four source simultaneous deposition rate
Control example (Si, Zr, Cu, Al)

Rate control example with 3kW four source E-type electrongun (Tetra gun)Electron gun: 980-7401 E-type electron gun
Control: With crystal film thickness controller

1MIN

0

(Time)Y, Ba simultaneous rate control example● Precautions on installing the electron gun
For E-type electron guns, the electron beam is dea magnetic structure is in the vicinity of the electron

Magnetic material
structuregun, the magnetic field of the gun will be affected
and the bombarding location of the electron beamchanged. In extreme cases, the electron beam may
miss the crucible and damage the electron gun.

Minimum of 15cm

For iron vacuum chambers, in particular, the electron
gun must be at least 15cm away from the base plateof the chamber. In addition, when using a mount, use
non-magnetic material such as SUS.

Electron gun

Minimum of
15cm

Electron gun

Mount (non-magnetic)
Steel chamber● On-site adjustment of the electron gun

Minimum of 15cm

After the E-type electron gun is delivered and installation, protective wiring, and plumbing of the water
pipes have been completed, we will perform on-site
adjustment of the electron gun to confirm that it issafe to use.

Canon ANELVA Corporation Vacuum Components Catalog

265

components

flected by the magnetic field of the gun. Therefore, if

■ Ordering information
Parts number

Model

Description

Remarks

Code

Electron gun
VMT-9119
P25-05870

980-7102
980-7100

2kW Electron Beam Gun

Crucible capacity 1mL

40000

2kW Electron Beam Gun

980-7102+980-7301 electron beam sweepable,
crucible capacity 1mL

40001

VSM-0302

980-7104

2kW 3 Series Electron Beam Gun

For φ300, crucible capacity 1mLx3

40010

VSM-0303

980-7104

2kW 3 Series Electron Beam Gun

For φ400, crucible capacity 1mLx3

40011

P25-05919

980-7302

3kW Electron Beam Gun

Crucible capacity 2.5mL

40030

P25-05920

980-7300

A21-01279

980-7401

980-7302+980-7301 electron beam
3kW Electron Beam Gun
sweepable, crucible capacity 2.5mL
Four source simultaneous deposition capable,
3kW Electron Beam Gun (four source)
3.8mL

40031
40040

Power supply
752-0178922-9203

Electron Beam Gun Controller

2kW single-shot, triple-barrel power supply

40500

U13-00400

EGP-230

Electron Beam Gun Controller

3kW power supply

40503

A26-04817

980-7301

Sweep Unit

For 2kW single-shot, 3kW single-shot

40320

594-3481954-7912

3P Current Feedthroughfor φ70 ICF

36163

753-0001

954-7605

Rotary Motion Feedthroughfor crucible rotation

36521

Options

components

Note) Contact us for more information about CE (RoHS).

266

Canon ANELVA Corporation Vacuum Components Catalog

Vacuum Components Catalog
CANON ANELVA CORPORATION
5-1 Kurigi 2-chome, Asao-ku, Kawasaki-shi, Kanagawa
Phone+81-44-980-3503 (DIAL IN)
Engligh: 2nd Edition Issue 1 issued November 2014
(Based on Japanese 9th Edition Issue 1 issued May 2014)* Notes on export, transfer and disposal
When exporting a product listed in this catalog outside Japan, please inform our sales division in advance because decisions must be madebased on the terms of the Foreign Exchange and Foreign Trade Act. Also note the transfer and disposal destination when transferring or
disposing domestically.
* The design, specifications, or dimensions published in this catalog are subject to change without prior notice.
* Due to printing, photos may differ from the color of the actual product.
* Unauthorized reproduction or copying prohibited