Translation of the original operating instructions

Pernicka 700H CHLD
Leak detector

Catalog No.
550-700, 550-701
From software version
7.01.04

jin76aen1-04-(1911)

INFICON GmbH
Bonner Strasse 498
50968 Cologne, Germany

INFICON

Table of Contents

Table of Contents
1 About these instructions ................................................................................................................................... 7
1.1 Target groups ........................................................................................................................................... 7
1.2 Other associated documents .................................................................................................................... 7
1.3 Warnings................................................................................................................................................... 7
1.4 Definition of terms..................................................................................................................................... 8
2 Safety ............................................................................................................................................................. 10
2.1 Intended use ........................................................................................................................................... 10
2.2 Owner requirements ............................................................................................................................... 10
2.3 Duties of the operator ............................................................................................................................. 11
2.4 Dangers .................................................................................................................................................. 12
3 Shipment, Transport, Storage ........................................................................................................................ 13
3.1 Unpacking the device and compressor................................................................................................... 14
3.1.1 Unpack the device ...................................................................................................................... 15
3.1.2 Unpack the compressor .............................................................................................................. 17
4 Description...................................................................................................................................................... 18
4.1 Function .................................................................................................................................................. 18
4.2 Operation modes .................................................................................................................................... 19
4.2.1 Operating mode Standby ............................................................................................................ 19
4.2.2 Operating mode measurement ................................................................................................... 19
4.2.3 Operating mode regeneration ..................................................................................................... 19
4.3 Construction............................................................................................................................................ 20
4.3.1 Device and compressor .............................................................................................................. 20
4.3.2 Control unit.................................................................................................................................. 21
4.3.2.1

Display ............................................................................................................................... 22

4.3.3 Vacuum connections................................................................................................................... 23
4.3.3.1

Exhaust .............................................................................................................................. 23

4.3.3.2

Purge gas connection ........................................................................................................ 24

4.3.4 Connections for accessories and control signals........................................................................ 24
4.3.4.1

Adjust the filtering of the measuring signals....................................................................... 25

4.3.5 Markings on the device ............................................................................................................... 25
4.3.6 Technical data............................................................................................................................. 26
4.3.6.1

Mechanical data ................................................................................................................. 26

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4.3.6.2

Electrical data..................................................................................................................... 26

4.3.6.3

Physical data...................................................................................................................... 26

4.3.6.4

Ambient conditions............................................................................................................. 27

5 Installation ...................................................................................................................................................... 28
5.1 Prerequisites for the installation.............................................................................................................. 28
5.2 Setup ...................................................................................................................................................... 29
5.3 Connecting the compressor.................................................................................................................... 31
5.4 Connecting the compressed air .............................................................................................................. 34
5.5 Connecting the purge gas....................................................................................................................... 35
5.6 Connect the device to the mains power.................................................................................................. 36
5.7 Connecting the device to an exhaust system (optional) ......................................................................... 37
5.8 Mounting the test chamber ..................................................................................................................... 38
6 Operation........................................................................................................................................................ 41
6.1 Switching the device on .......................................................................................................................... 41
6.2 Basic settings.......................................................................................................................................... 42
6.2.1 Setting the measurement window............................................................................................... 42
6.2.1.1

Set the "Mini" window......................................................................................................... 42

6.2.1.2

Setting the "Measure" window ........................................................................................... 44

6.2.2 Configuring the measurement process ....................................................................................... 47
6.3 Select method......................................................................................................................................... 49
6.3.1 Select an existing method........................................................................................................... 49
6.3.2 Create new method..................................................................................................................... 50
6.3.3 Select existing recipe .................................................................................................................. 52
6.3.4 Create new recipe....................................................................................................................... 53
6.3.5 Set the setpoint for gross leak test.............................................................................................. 55
6.3.6 Select single or multi-gas............................................................................................................ 57
6.3.6.1

Select single-gas................................................................................................................ 57

6.3.6.2

Select multi-gas.................................................................................................................. 57

6.4 Calibrating............................................................................................................................................... 58
6.4.1 Perform calibration...................................................................................................................... 58
6.4.2 Connect external calibration leak................................................................................................ 59
6.5 Measuring ............................................................................................................................................... 60
6.5.1 Preparing the measurement ....................................................................................................... 60
6.5.2 Prepare for manual start ............................................................................................................. 61
6.5.3 Start and perform the measurement ........................................................................................... 62iv

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Table of Contents

6.5.3.1

Select the "Mini" window and start the measurement ........................................................ 62

6.5.3.2

Select the "Measure" window and start the measurement................................................. 63

6.5.3.3

Perform gross leak test ...................................................................................................... 64

6.5.3.4

Terminate the measurement process after gross leak test ................................................ 64

6.5.3.5

Carry out a fine leak test .................................................................................................... 65

6.5.3.6

Complete the measurement process according to the gross leak and fine leak test ......... 66

6.5.4 Display information about the measurement .............................................................................. 67
6.5.4.1

Display state time diagrams ............................................................................................... 67

6.5.4.2

Display measurement parameters ..................................................................................... 67

6.5.4.3

Display current settings...................................................................................................... 68

6.5.4.4

Display general information................................................................................................ 68

6.5.4.5

Display events.................................................................................................................... 69

6.6 Measurement data.................................................................................................................................. 70
6.7 Determine mass spectrometer................................................................................................................ 70
6.8 Perform regeneration.............................................................................................................................. 72
6.9 Switching off the device. ......................................................................................................................... 73
7 Warning and error messages ......................................................................................................................... 74
7.1 Display warning and error messages ..................................................................................................... 74
8 Cleaning and maintenance............................................................................................................................. 78
8.1 General information ................................................................................................................................ 78
8.2 Device maintenance ............................................................................................................................... 78
8.2.1 Change O-rings of the test chamber........................................................................................... 78
8.3 Maintenance of the CHLD sensor........................................................................................................... 79
8.3.1 Check the fan function ................................................................................................................ 79
8.3.2 Check or change the filter mat .................................................................................................... 81
8.4 Maintenance of the internal calibration leak ........................................................................................... 84
8.4.1 Perform calibration...................................................................................................................... 84
8.4.2 Recalibration of the calibration leak by VTI................................................................................. 84
8.5 Maintenance of the backing pump.......................................................................................................... 85
8.5.1 Check the oil level....................................................................................................................... 85
8.6 Set CHLD-Sensor ................................................................................................................................... 86
8.6.1 Select cathode in the CHLD-Sensor ........................................................................................... 87
8.7 Maintenance plan ................................................................................................................................... 87
8.7.1 Maintenance table....................................................................................................................... 87

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9 Decommissioning the device.......................................................................................................................... 88
9.1 Deinstallation .......................................................................................................................................... 88
9.1.1 Disconnect the device from the power supply ............................................................................ 88
9.1.2 Separate the purge gas .............................................................................................................. 89
9.1.3 Separate the compressed air...................................................................................................... 90
9.1.4 Disconnect the compressor ........................................................................................................ 90
9.2 Sending in the device ............................................................................................................................. 92
9.3 Disposing of the device........................................................................................................................... 94
10 Accessories and spare parts .......................................................................................................................... 95
10.1 Accessories ............................................................................................................................................ 95
10.2 Spare parts ............................................................................................................................................. 95
11 CE Declaration of Conformity ......................................................................................................................... 96
Index............................................................................................................................................................... 97vi

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About these instructions | 1

1 About these instructions
This document applies to the software version stated on the title page.
Product names may occur in the document, which are added for identification
purposes only and belong to the respective owner of the rights.

1.1 Target groups
This instruction manual is aimed at the operator of the device, at technically qualified
specialists, and trained personnel.

1.2 Other associated documents
Operating instructions CHLD-Sensor:

Operation Manual CHLD Sensor QME
220

Operating Instructions Turbo Molecular

Operating Instructions HiPace 300

Pump:

Turbopump

Operating Instructions Backing Pump:

Operating Instructions GA01601_002_A1

Operating Instructions Compressor:

8200 Compressor Installation, Operationand Service Instructions

Operating Instructions cryogenic pump:Cryo-Torr Pump Installation, Operationand Maintenance Instructions

Granville-Phillips-Sensor:

Instruction Manual

Spare parts CHLD700H accumulation

Spare Parts CHLD700H Accumulation

leak detector:

Leak Detector

1.3 Warnings
DANGER
Imminent hazard resulting in death or serious injuries

WARNING
Hazardous situation resulting in potential death or serious injuries

CAUTION
Hazardous situation resulting in minor injuries

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1 | About these instructions

INFICONNOTICE
Hazardous situation resulting in damage to property or the environment

1.4 Definition of terms
Use of gas types in the device
The device is a helium leak detector. If you want to use a forming gas instead ofhelium to detect the hydrogen contained therein, the information for helium also
applies to hydrogen.

Automatic tuning / mass settingThis function adjusts the mass spectrometer so that a maximum leak rate indicator isachieved. In order to detect a maximum ion current with the ion detector, the control
computer adjusts the voltage for accelerating the ions within the selected mass range
accordingly.
During each calibration, the mass is adjusted automatically.

Operating mode
The leak detector distinguishes between the operating modes "Standby","Measurement" and "Regeneration".
The device must be in the operating mode "Standby", before a measurement canbegin. If the measurement process is aborted, the device is also in the operating mode
"Standby".
With the operating mode "Measurement" tracer gas, which escapes from the test
object is measured using a mass spectrometer (CHLD-Sensor). The result is shown
as a helium raw signal (current in [A] unit) with the gross leak test and with the fineleak test as a leak rate in the unit [mbar l/s] or [atm cc/s].
In the operating mode "Regeneration", all gases except helium and hydrogen, arefrozen out with the cryogenic pump. The frozen gases are separated in the ice stateon the inner surface of the cryogenic pump. At regular intervals, these separated
gases must be evaporated and removed from the system.

Forming gas
Forming gas is a collective term for gas mixtures of nitrogen and hydrogen.

Gross leak test
Gross leak test refers to a phase of the measuring procedure, in which the device
checks the test object for gross leaks.

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About these instructions | 1

Accumulation
Accumulation is a phase during the measuring procedure. Tracer gas escaping fromthe test object is accumulated in the closed measuring system. The change in the
tracer gas quantity over time serves to determine the leak rate.

Internal helium background
The measurement system of the leak detector also contains a residual amount of
helium. This generates an internal measurement signal component (backgroundsignal), which superimposes on the leak display.
So that this background signal can be suppressed, an internal "backgroundsuppression" can be activated with the factory settings.

Minimum detectable leak rate
The minimum detectable leak rate which can be detected by the leak detector underideal conditions (> 4 x 10

-14mbar l/s).

Background signal
Helium or hydrogen (as part of water) are natural components of air.
Before any leak detection, an amount of the adjusted tracer gas is already in thevolume on the surfaces of the test chamber, supply lines, and even in the leakdetector itself. This certain amount of tracer gas generates a measurement signal
which is called the "Background signal". The ongoing evacuation of the test chamber
continuously reduces this background signal.

Foreline pressure
Pressure of the backing pressure between the turbo molecular pump and the backing
pump.

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2 Safety
2.1 Intended use
The Pernicka 700H CHLD (Cumulative Helium Leak Detector) is a cumulative helium
leak detector for measuring very small leak rates.
Improper use

Avoid the following, non-intended uses:• Place the unit so that power switches / connections for power supply are not easily
accessible• Operation of the device with impermissible pressures for the pneumatic valves andthe purge gas• Using the compressor as a storage facility• Using the compressor as a seat
• Using the compressor as a ladder• Operating the device with untrained personnel• Operating the device without connected protective conductor cable at theelectronics box• Operating the device with a test chamber into which no grid has been inserted

2.2 Owner requirements
The following notes are for companies or any person who is responsible for the safety
and effective use of the product by the user, employee or third party.

Safety conscious operation• Operate the device only if it is in perfect technical condition and has no damage.
• Only operate the device in accordance with this instruction manual, in a safety andrisk conscious manner.
• Adhere to the following regulations and observe their compliance:– Intended use– General applicable safety and accident prevention regulations– International, national and local standards and guidelines– Additional device-related provisions and regulations• Only use original parts or parts approved by the manufacturer.
• Keep this instruction manual available on site.

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Safety | 2

Personnel qualifications• Only instructed personnel should be permitted to work with and on the device. The
instructed personnel must have received training on the device.
• Make sure that authorized personnel have read and understood the operating
instructions and all other applicable documents.

2.3 Duties of the operator• Read, observe, and follow the information in this manual and in the work
instructions provided by the owner. This concerns in particular the safety andwarning instructions.
• Always observe the complete operating instructions for all work.
• If you have any questions about operation or maintenance that are not answeredin this manual, please contact Customer Service.

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2.4 Dangers
The measuring instrument was built according to the state-of-the-art and therecognized safety regulations. Nevertheless, improper use may result in risk to life andlimb on the part of the user or third parties, or damage to the measuring instrument orother property may occur.
Dangers from electric

There is a danger to life from the contact of conductive parts inside the device.

power• Disconnect the device from the power supply prior to any installation andmaintenance work. Make sure that the electric power supply cannot reconnectedwithout authorization.
The device contains electric components that can be damaged from high electric
voltage.
• Before connecting the device to the power supply, make sure that the supply
voltage specified on the device is the same as the local power supply.

Mechanical energy

Jerky movements of the device during operation can lead to blockage of the turbo

hazards

molecular pump. There is a risk of injury due to the release of rotating energy or byparts moving around.
• Do not jerk the unit during operation.

Hazards due to loss of

If the transport rollers of the device are not locked, there is a risk of injury due to loss

stabilityof the stability.
• Lock the transport rollers of the device.

Hazards due to

If the exhaust filter on the backing pump is not checked regularly, there is a danger ofmaterials andpoisoning by oil fumes.

substances• Periodically check the exhaust filter on the backing pump of the unit or connect theunit to an exhaust system.
• Only use the device away from areas with a risk of explosions.

Hazards due toIn the thawing cryogenic pump, a high pressure can develop when the turbo molecular

breakage during

pump stops. There is a risk of injury due to breakage of an unsuitable rupture disk on

operation

the cryogenic pump during operation.
• Only use a rupture disk suitable for the cryogenic pump.

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Shipment, Transport, Storage | 3

3 Shipment, Transport, Storage
Scope of delivery

Item

Quantity

Pernicka 700H CHLD

1

Cryogenic pump compressor

1Power supply cable3

Helium-Supply-line

1

Helium-Return-line

1

Toolkit (tool)1

Protective conductor electronic box

1

Wrist strap, light blue1

Spiral cable for wrist band

1

Allen wrench, modified 9/64 inch

1

PE bags 100 mm x 150 mm x 0.05 mm

1

PE bags 180 mm x 250 mm x 0.05 mm

1

Transport box for Pernicka 700H CHLD

1

Tilt sensor

4

Shock sensor

4

Double label 110 x 60 mm

1

Original instruction manual1

Supplier documentation (see Chapter "Other applicable1

documents")► Check the delivery contents after receiving the product to ensure it is complete.
Transport

WARNING
Falling loads
The device does not have any crane eyelets. The handle is for only for sliding thedevice.
► Do not transport the device using lifting tackle.

CAUTION
Danger of crushing extremities
Feet can be rolled over and crushed.
► Keep feet away from the rollers.
► Do not pull on the device, but push the device.

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3 | Shipment, Transport, Storage

INFICONNOTICE
Damage caused by transport
The unit and the cryogenic pump compressor can be damaged during transport. The
delivery consists of a box with the Pernicka 700H CHLD and a cardboard box with thecryogenic pump compressor. The transport box is secured with tilt and shock sensors.
► If one of the indicators of the shock or tilt sensors is red, proceed as follows: Do notrefuse to accept the delivery. Note the red indicator on the delivery note andimmediately check the delivery for transport damage. If you notice any transport
damage, do not open the package. Contact your transport company immediately.

Storage

Store the device and the cryogenic pump compressor observing the technical data,
see "Technical data [} 26]".
See also
2 Other associated documents [} 7]

3.1 Unpacking the device and compressor
The delivery consists of the transport box containing the Pernicka 700H CHLD and acarton with the components as supplied, as well as a cardboard box with thecryogenic pump compressor.

Transport box with
Pernicka 700H CHLD
and components

Carton with cryogenic pumpcompressor

Fig. 1: Components of the delivery

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Shipment, Transport, Storage | 3

3.1.1 Unpack the device
1

Remove the screws from the front panel of the transport box.

2

Remove the front panel from the transport box.

Front plate

Packing material

Transport box

Carton with components

3

Remove the packing material from the transport box.

4

Remove the carton from the transport box.

5

Open the carton, remove the packaging material and remove the components.

Cross beams

Transport strap

Wedge with loop

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6

Loosen the 2 transport straps.

7

To loosen the 2 wedges, pull on the loops.

8

Remove the cross beam from the transport box.

9

Place the 2 wedges in front of the transport box on the floor.

10

Place the front plate on the wedges, creating a ramp.

11

Loosen the brakes on the transport rollers and carefully pull the device out of
the transport box.

CAUTION
Danger of crushing extremities
Feet can be rolled over and crushed.
► Keep feet away from the rollers.

12

Remove the protective film from the device.

13

Remove the foam sheet from the vacuum components and from the monitor.

Foam block

Adhesive tape on hand

Foam block under

under the test leakvalve test leak

the CHLD-Sensor

14

Remove the 2 foam blocks from under the CHLD-Sensor and from undercalibration leak.

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15

Remove the adhesive tape from the hand valve of the test leak.

16

Ensure that the hand valve of the test leak is open.

17

Remove all cable ties that secure the cables to the housing.

18

Slide the device to its destination.

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Shipment, Transport, Storage | 3

3.1.2 Unpack the compressor
CAUTION
Danger of injury when lifting the heavy cryogenic pump compressor
The cryogenic pump compressor weighs approx. 68 kg and can slip out of your hands.
► Lift and transport the cryogenic pump compressor only with two people.
► To lift get hold below the floor panel.

Carton with cryogenic pump

Foam

Cryogenic pumpcompressor

profilecompressor

1

Open the carton and remove the packaging material.

2

Carefully lift the compressor out of the carton.

3

Remove the foam profiles from the compressor.

4

Move the compressor to its destination.

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4 | Description

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4 Description
4.1 Function
The device is a leak detector for detecting and measuring leaks in sealed test objects.

Description of the measurement process
The device is in the "Standby" operating mode at the start of the measurement
process.
The test chamber for receiving the test object filled with the tracer gas, e.g. helium, islocated centrally in front of the device. Insert the test object and close the test
chamber lid. Start the measurement process

Lid

Test
chamberFig. 2: Test chamber: Lid open (left) and lid closed (right)

During the automatically running measurement process, first the internal volume of thetest chamber and the volume between the two sealing rings on the upper side of thetest chamber are purged with purge gas, preferably with argon 5.0. After thecompleted purging process, the purge gas is pumped out of the test chamber, fromthe volume between the 2 sealing rings as well as from the valve block.
After checking the permissible pressure for the operation of the mass spectrometer(CHLD-Sensor) the valve block is then evacuated. Finally the CHLD-Sensor isswitched on. The CHLD-Sensor is switched off before the valve is opened to the test
chamber. If the pressure is sufficiently low (in particular, the lid of the test chamber
must be closed), the CHLD-Sensor is switched on.
The gross leak test is started. With the gross leak test the current of the helium raw
signal is indicated in amps [A]. A setpoint set before the start of measurement is usedas the abort criterion for this measurement process (see "Set the setpoint for grossleak test [} 55]"). If the helium signal exceeds this setpoint, a fine leak test is not
carried out after the gross leak test and the measurement process is terminated. If the

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Description | 4

helium signal falls below this setpoint, the helium is removed from the system with theturbo molecular pump and then the measurement process is continued with the fineleak test.
In the fine leak test, the gases escaping from the test object, except for helium, arepumped out with the cryogenic pump. During the accumulation measurement, thequantity of helium escaping from the test object is determined. As a result of the fineleak test, the leak rate is calculated in the unit of measurement[mbar l/s] or [atm cc/s] and displayed on the monitor. The test chamber is purged andthe measurement process is terminated.
The measurement process is terminated and the device is again in "Standby"
operating mode.

4.2 Operation modes
4.2.1 Operating mode Standby
Before a measurement can be started, the device must be in "Standby" operatingmode.
The device is in "Standby" operating mode:• when the measurement process has been terminated normally after the fine leaktest;
• when the measurement process was terminated after the gross leak test;• after a completed regeneration;• when the device is switched on.
In the "Standby" operating mode the valves V1, V3, V4, V5, and V6 are closed. The
valve V2 is open.
During the "Standby" the test objects can be changed.

4.2.2 Operating mode measurement
If there is a leak, the tracer gas escaping from the test object is measured with thehelp of a CHLD-Sensor and the leak rate is displayed as a result with theunit [mbar l/s] or [atm cc/s].

4.2.3 Operating mode regeneration
The device has a cryogenic pump, which freezes all gases except helium andhydrogen. The frozen gases are separated in the ice state on the inner surface of thecryogenic pump. At regular intervals these separated gases must be evaporated in the"regeneration" operating mode and removed from the system.

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4.3 Construction
4.3.1 Device and compressor
DeviceDisplay withmeasurement program
Storage

USB Interfaces
Test chamber
for test object

Valve
Valve

groupsgroupsDeviceTrackballConnection for

Keyboard

customercalibration leak (optional)

Cryogenic pump compressor
Selector switch for main frequency

Selector switch for mains supply

Mains switch

Fig. 3: Device (top) and cryogenic pump compressor (bottom): Front view

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Description | 4

Device
PID-regulator WATLOW for
cryogenic pump heater

Display CTI -Temperature measurement device
for cryogenic pump
Mass
spectrometer( CHLD-Sensor )Valve forturbo molecular
Calibration leakpump

Purge gasconnection

Turbo molecularpump (hidden)

Mains switch

Power supply
Compressed airconnection
Backing pump
Connection for power
Oil pan forProtective conductor (PE)backing pumpconnection

supply to the cryogenic pumpcompressor

Cryogenic pump compressor

Compressor
power supply

Helium Return
Line

Helium Supply
Line

Cryogenic pump motor

Manometer for

power supply

helium operating pressure

Fig. 4: Device (top) and cryogenic pump compressor (bottom): Back view

4.3.2 Control unit
The control unit consists of a monitor, a keyboard and a Trackball.
USB 2.0 interfaces

For the insertion of a USB flash drive for copyingor saving measured data.

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4 | Description

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For the insertion of a USB bar code reader forthe automatic detection of information of the test
objects to be measured.
For the insertion of a USB flash drive with
Update information or for connecting a USB
printer to print out test results.

4.3.2.1 Display
The windows with the necessary setting options for preparing, carrying out andevaluating the measurement process are shown on the monitor.
Design and structure of window is shown as an example with the window "Measure",
which appears after switching on the device.

Tab

Measurement results:

Message window

System diagram

numeric

Measuring results: graphic

Buttons

Selection menu

Fig. 5: Design and structure of the window

Tab► To open a window, press the tab with the same name.

Measurement results: Numeric
To display the measurement results as numerical values.

Message window
Displays status messages and information.

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Description | 4

System diagram
Displays the current states of the individual components of the device during ameasurement process.

Selection menu
To select modes with expanded functionality.
► To select a mode, click the name of the mode with the left mouse button in theselection menu and then press the "Load & Run" button.

Buttons► To enter a function, press the corresponding button.

Measurement results: Graphical
To display the measurement results as time-related line graphs.
Line graph in the upper diagram are linearly scaled. Line graph in the lower diagram
are logarithmically scaled.

4.3.3 Vacuum connections
4.3.3.1 Exhaust

The device is equipped with an exhaust filter on the backing pump as standard. The
exhaust filter is located on the backing pump in the lower area of the device. The
evaporated gases are guided out of the device through the exhaust filter.
► When using the device in a clean room connect it to an exhaust system. See"Connecting the device to an exhaust system (optional) [} 37]".

WARNING
Hazardous gases
Depending on the connected container and the gas contained therein, harmful gases
can get into the ambient air via the exhaust filter of the leak detector.
► Make sure you have protection measure to prevent inhaling hazardous gases.

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4 | Description

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4.3.3.2 Purge gas connection
The connection for the purge gas is located on the lower side of the device, see"Connections for accessories and control signals [} 24]". The connection is a metal
crimp screw connection for metal cables made of stainless steel or copper with adiameter of 6.35 mm.
For purging, use a gas without any tracer gas components, this means especially ahelium-free gas at atmospheric pressure. Connect a gas supply line (e.g. Argon 5.0)
via the hose connection.
The pressure of the gas line should not be more than 50 mBar (overpressure).

4.3.4 Connections for accessories and control signals
Power cord for power supply
cryogenic pump compressor
Connection for power supply

Purge gas connection

cryogenic pump compressor

Compressed air Connection of theconnection

protective conductor (PE)Connection of thepower cord for the device

Fig. 6: Connections for control signals and accessories

NOTICEThe electronics of the device can be destroyed► Only connect devices which are provided for the appropriate interfaces.
The connections for the external devices show a safe disconnection from the mains
and are within the range of the safety extra low voltage (SELV).

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Description | 4

4.3.4.1 Adjust the filtering of the measuring signals
INFICON GmbH recommends that you do not change the factory settings.

Fig. 7: Window "IO 220"

► To open the "IO 220” window, press the tab "IO 220".
The active digital inputs and outputs are displayed in the "IO 220" window. The same
information is also provided for the analog signals. The upper window shows the raw
data of the analog signals. The lower window shows the analog signals with theselected filter.

1

To influence the filtering, select the corresponding values in the field "AI
Coefficients".

2

Press the "reset/update" button.

ð

The result of the changed filter is shown directly in the lower window.

4.3.5 Markings on the device
The markings on the device have the following meanings:
Operate the device only with the protective conductor (PE) connected.
Only operate the device with the protective conductor cable connected tothe electronics box.

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4.3.6 Technical data
4.3.6.1 Mechanical data
DeviceDimensions (W x H x D)

660 mm x 1390 mm x 870 mm

Weight245 kg4.3.6.2 Electrical data
DeviceMain fuse

Internal over-current protection,
resettable

Nominal power

2300 VA

Nominal voltage

110 V, 50/60 Hz (Order number:
550-700)
230 V, 50/60 Hz (Order number:
550-701)

Nominal current

15 A (Order number: 550-700)
10 A (Order number: 550-701)

Protection class

IP 20

Excess voltage category

II

Electronic interfaces

USB, Ethernet interface

Compressor for cryogenic pumpNominal voltage

208 V ... 240 V, 50/60 Hz

Nominal current

10 A

4.3.6.3 Physical data
Device-14

Minimum detectable leak rate for helium> 4 x 10mbar l/s

Leak rate internal test leakapprox. 5 x 10

Pneumatic pressure valves

7.5 bar - 9 bar

Pressure of the helium supply for the

16.9 bar - 17.25 bar (over-pressure)-10

mbar l/s

cryogenic pump compressor

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Description | 4

Pressure supply purge gas (Argon 5.0)

35 mbar - 70 mbar (over-pressure)

Vacuum system

Cryogenic pump
Turbo molecular pump
Backing pump

Detectable masses

2 - 100

Connection of customer test leak

DN 16 CF4.3.6.4 Ambient conditions
DevicePermissible ambient temperature (during

15 °C ... 28 °C

operation)
Permissible storage temperature

10 °C ... 45 °C

Max. relative humidity up to 31 °C

80 %Max. relative humidity from 31 °C to 40

linearly decreasing from 80 % to 50 %°C
Max. relative humidity above 40 °C

50 %Pollution degree

IIMax. altitude above sea level1000 mPernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911)

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5 Installation
5.1 Prerequisites for the installation
Read and observe the supplied documentation for the compressor "Cryo-Torr Pump
Installation, Operation and Maintenance Instructions".
Read and observe the technical data. See original operating instructions, chapter"Technical data [} 26]".
ü The device, the cryogenic pump compressor and all parts included in the scope ofdelivery have been unpacked and checked for external damage. See original
operating instructions, chapter "Shipment, Transport, Storage [} 13]".
ü The prerequisites for a successful measurement operation defined in the following
list are met.
► Check.

Present

Not
present

Device footprint: 1 m

2

⃞

⃞

⃞

⃞

⃞

⃞

⃞

⃞

Max. relative humidity for the device up to 31 °C: 80 %⃞⃞Device nominal power: 2300 VA⃞⃞

Device nominal voltage: 110 V, 50/60 Hz

⃞

⃞

⃞

⃞

Compressor nominal voltage: 208 V ... 240 V, 50/60 Hz⃞⃞

Compressor nominal current: 10 A⃞⃞

Operate the compressor on a separate electrical circuit⃞⃞

Compressed air supply: 7.5 bar - 9 bar⃞⃞

Compressed air connection: 6 mm hose⃞⃞Compressor footprint: 0.5 m

2Allowable ambient temperature for the device (whenoperating): 15 °C ... 28 °C
Allowable ambient temperature for the compressor(when operating): 10 °C ... 38 °C(Order number: 550-700)
Device nominal voltage: 230 V, 50/60 Hz(Order number: 550-701)
Device nominal current: 15 A (Order number: 550-700)
Device nominal current: 10 A (Order number: 550-701)

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Installation | 5

Present

Not
present

Purge gas supply: Argon 5.0 or better

⃞

⃞

⃞

⃞

⃞

⃞

⃞

⃞

Alternative purge gases are permissible depending on
the application. Please contact INFICON GmbH.
Pressure reducing valve for purge gas supply: < 50 mbar
rel., 10 l/min.
Recommendation: Use the INFICON pressure reducer,
catalog number: 551-700S, available for 4 different bottle
threads
Purge gas supply from the pressure reducer to thedevice:6.35 mm copper or stainless steel pipe
Helium background in the operating environment of thedevice: < 6 ppm► Install the device, the cryogenic pump compressor and all parts included in thescope of delivery. See original operating instructions, chapter "Installation [} 28]".

5.2 Setup
DANGER
Health risk due to exhaust fumes and vapors
Exhaust fumes and vapors from pumps can be a health risk.
► When operating in badly vented rooms connect an exhaust hose onto the exhaust
connection when using gases which cause a health risk (see "Connecting thedevice to an exhaust system (optional) [} 37]").

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INFICONWARNING
Danger from liquids, moisture and electricity
Moisture entering the device can lead to personal injury due to electric shocks as well
as damage to property due to short circuiting.
► Only operate the device in dry environments and only in buildings.
► Operate the device away from sources of liquid and moisture.
► Place the device where you can always reach the mains plug.
► Do not operate the device standing water and do not let even a drop of water orother liquids on the device.
► Prevent the device from coming into contact with bases, acids and solvents.

CAUTION
There is a danger uncontrolled rolling away
When on an incline the device can roll away uncontrollably.
► Fix the device by latching the front rollers.

NOTICE
Material damage from overheated device
The device and above all the cryogenic pump compressor become warm during
operation and can overheat without sufficient ventilation.
► Please note the technical specifications.
► Ensure sufficient ventilation, especially on the ventilation slots on the left and rightof the device: Free space in the front, rear and sides of at least 10 cm for thedevice; 1 m for the cryogenic pump compressor.
► Keep heat sources away from the device and from the cryogenic pump compressor.

Avoiding measurement errors due to helium sources in the device
environment
The helium concentration in the region of the Pernicka 700H CHLD may differ only
insignificantly from the natural helium concentration of 5 ppm. The detection limit of
the Pernicka 700H CHLD is strongly impaired by higher helium concentrations.

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Installation | 5

5.3 Connecting the compressor
NOTICE
Damage to the cryogenic pump compressor due to incorrect settings
Incorrect setting of mains voltage and mains frequency can damage the cryogenic
pump compressor.
To correctly set the cryogenic pump compressor on the device with the order number
550-700, set the cryogenic pump compressor to: 208 V, 60 Hz.
To correctly set the cryogenic pump compressor on the device with the order number
550-701, set the cryogenic pump compressor to: 230 V, 50 Hz.

NOTICE
Damage to the cryogenic pump compressor due to unfavorable installation
location
Too small and not sufficiently ventilated location can damage the cryogenic pumpcompressor.
► Choose as a location for the compressor a sufficiently ventilated room and aminimum distance of the compressor to the walls of 1 m.

Cryogenic pump compressor
Read and follow the included documentation "Cryo-Torr Pump Installation, Operationand Maintenance Instructions".

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Power connection for the

Manometer for helium

cryogenic pump motor

operating pressure

Power cord forConnection

Connection

compressor

helium Return

power supplyLinehelium Supply
Line

Fig. 8: Connections on the cryogenic pump compressor

HeliumCryogenic pump

Supply

motor

Line

HeliumReturnPower cordLine

for the cryogenic
pump motor

Fig. 9: Connections on the device

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Installation | 5

Install helium lines
The "Supply" and "Return" helium lines are filled with helium in the delivery state ofthe device and are under pressure.

1

Remove the blank flanges from the connections of the helium lines and keep theblank flanges in a safe place.

2

Install the helium Return line to the compressor and the device. Use an openended wrench to turn the screw connections as far as the stop and then turn 1/4
turn in the opposite direction.

3

Install the helium Supply line to the compressor and the device. Use an openended wrench to turn the screw connections as far as the stop and then turn 1/4
turn in the opposite direction.

Install the power cord for the motor of the cryogenic pump
The power cord for the power supply of the cryogenic pump motor is mounted in thedelivery state on the device.

► Insert the round connector of the mains cable into the COLD HEAD POWER socket
and turn the threaded housing hand-tight.

Install the power cord for the compressor power supply
The power cord for the power supply of the compressor is mounted in the delivery
state on the device.

1

Remove the screw with nut from the 3 wires of the power cord and keep thescrew with nut in a safe place.

2

To remove the protective cover from the electrical connection of thecompressor, loosen the 2 fixing screws.

3

Feed the power cord through the strain relief and clamp the power cord with the
2 screws.

4

Connect the green wire to the protective conductor connection.

5

Clamp the white conductor (neutral conductor) at the terminal marked Y.

6

Clamp the black conductor (phase) at the terminal marked X.

7

Assemble the protective cover with the 2 securing screws.

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Clamping point X

Clamping pointY

Protective conductor connection

Fig. 10: Compressor: Terminal points for the connection of the power cord

5.4 Connecting the compressed air
Use a compressed air hose made of polypropylene with a diameter of 6 mm for thecompressed air supply.

Compressed air quick coupling

Compressed air hoseFig. 11: Connecting the compressed air

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Installation | 5

1

To establish the compressed air supply for the device, insert the compressed air
hose into the air pressure quick coupling of the device until the quick-action
quick-release coupling engages.

2

Connect the other end of the compressed air hose to the compressed air
supply.

3

Set an operating pressure (relative pressure) > 7.5 bar and < 9 bar. An
overpressure valve is integrated, which, when the pressure applied to the device
is exceeded, audibly releases pressure.

4

Open the valve on the compressed air supply.

5.5 Connecting the purge gas
Use only Argon 5.0 or better as purge gas.
Use a metal line made of stainless steel or copper with a diameter of 6.35 mm for thepurge gas supply.
The sealing elements ferrel and clamping ring remain on the metal line and do nothave to be renewed as long as the same metal line is used.
► If you are using a new metal line for the purge gas supply, replace the ferrel and theclamping ring of the compression fitting.

Compression fitting for the purge gas connection

Nut
Fig. 12: Connecting the purge gas

1

To install the purge gas supply for the device, plug the metal line of the purge
gas supply into the compression fitting of the device.

2

Using an open-ended wrench, hold the nut and tighten the union nut of thecompression fitting with an open-ended wrench and sufficient torque.

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5.6 Connect the device to the mains power
WARNING
Danger from electric shock
Improperly earthed or protected products may be dangerous to life in case of a fault.
The use of the device is not permitted without a connected protective conductor.
► Only use the included 3-wire power cord provided.

CAUTION
Danger due to incorrect mains voltage and mains frequency
Incorrect mains voltage and incorrect mains frequency can lead to the destruction of
the device and personal injury.
► Check that the mains voltage and mains frequency permissible for the Pernicka
700H CHLD as well as the included cryogenic pump compressor comply with themains voltage and mains frequency available at the place of use.

Connection for the device power supply

Protective conductor

Connection for power supply

connection pointcryogenic pump compressor

Fig. 13: Connect the device to the mains power

1

Install the protective conductor with a sufficient length and cross-section to theprotective conductor connection point of the device.

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Installation | 5

2

Plug the supplied power cord into the MAINS CRYO COMPRESSOR plug andconnect the power cord to the power supply.

3

Plug the supplied power cord into the POWER LINE INPUT plug and connect
the power cord to the power supply.

5.7 Connecting the device to an exhaust system(optional)
1

To turn the device off, set the power switch to OFF. Disconnect the device fromthe power supply and secure the device against re-activation.

2

Switch off the backing pump.

3

Hold the exhaust filter with one hand and loosen the wing nut of the clamping
ring.

4

Remove the exhaust filter from the backing pump.

5

Use a suitable connection piece, e.g. a 90-degree hose adapter with KF 16 on
the pump side, onto the backing pump.

6

Tighten the wing nut of the clamping ring.

7

Connect the connecting piece to your exhaust system.

Exhaust filter
Wing nut
Clamping ring

Backing pump

Backing pump

Fig. 14: Connecting the device to an exhaust system

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5.8 Mounting the test chamber► To mount or to change the test chamber, place the device in the "Standby"
operating mode and then turn off the device. The device is in the "Standby"
operating mode before a measurement process is started and after a completed
measurement process.
► To prevent grease deposits on the device, use neoprene or nitrile disposable gloves
free of powder during operation.

Accessories required

Test chamber small, medium or large

Required tools• Allen key, modified, 9/64 inch (included)• General purpose pliers of small or slip joint pliers

Test chamber

Screw connection
purge gas
supplyFlange withscrewsPurge gas
supplyFig. 15: Test chamber: built-in state1

If the inlet flange is covered by a dummy flange (normal newly delivered
condition), you have to remove the 6 screws of the flange connection and takeout the dummy flange.

2

If a test chamber is mounted on the inlet flange, loosen the screws from thepurge gas supply and remove it from the test chamber.
Loosen and remove the 6 screws of the flange connection and carefully remove
the test chamber.

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Installation | 5

3

Carefully remove the copper sealing ring from the flange using the pliers. In
order not to damage the underlying sealed cutting edge, lift the copper sealing
ring only vertically upwards.

4

Clean the surface of the flange with a dust- and lint-free cloth.

5

Place the new copper O-ring on the flange.

6

Carefully mount the new test chamber.

FlangeCopper sealing ring

Test chamber
Connection for thepurge gas
supplyFig. 16: Test chamber: Install new test chamber

7

Tighten the 6 screws on the flange only slightly.

8

Recommendation: Using the Allen key, tighten the 6 screws on the flange
according to the 2-2-3 system. For example: Tighten screw 1. Tighten thescrews in the order 3, 5, 2. Tighten the screws in the order 4, 6, 3. Tighten thescrews in the order of 5, 1, 4, etc. Repeat this procedure until the gap between
both flanges is almost completely closed.

9Connect the purge gas supply and tighten the screw connection.

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2

1

1

Fig. 17: Build and mount the purge gas supply

1 Reinforcing sleeves: Before continuing to assemble, put the reinforcing
sleeves into the intermediate corrugated hose.
2 The O-ring on the reinforcing sleeve seals by screwing.

10

To prevent the test object from being sucked out of the test chamber during themeasurement process, place the delivered grid in the test chamber.

1

Test chamber (lid open)
6

2

3

5
Grid

4

FlangeFig. 18: Test chamber with inserted grid (left) and flange with example numbering of the screws(right)40 / 100

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Operation | 6

6 Operation
6.1 Switching the device on
NOTICE
Damage to the cryogenic pump compressor due to incorrect settings
Incorrect setting of mains voltage and mains frequency can damage the cryogenic
pump compressor.
To correctly set the cryogenic pump compressor on the device with the order number
550-700, set the cryogenic pump compressor to: 208 V, 60 Hz.
To correctly set the cryogenic pump compressor on the device with the order number
550-701, set the cryogenic pump compressor to: 230 V, 50 Hz.

Cryogenic pump compressor
Read and follow the included documentation "Cryo-Torr Pump Installation, Operationand Maintenance Instructions".

1

Ensure that the correct mains voltage and the correct mains frequency are seton the compressor.

2

To turn the unit on, set the power switch to ON.
ð The device has a power-on delay and is switched on after approx. 20 s.

3

To turn on the compressor of the cryogenic pump, set the power switch on thecompressor to ON.
ð When delivered the device shows the screen "Measure" after starting. See"Setting the "Measure" window [} 44]".

Fig. 19: Window "Measure"

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If you cannot start the device without entering a password …
In case of an accidental closing of the user login, it may happen that you arerequested to enter a password.
► Do not change the standard user and enter the password “Yes“.

6.2 Basic settings
6.2.1 Setting the measurement window
For operating and configuring the device in the “Measurement” operating mode, you
can choose between two windows.

6.2.1.1 Set the "Mini" window► To open the "Mini” window, press the tab "Mini".

Display of the leak rate

Cathodein CHLD-Sensor
ON/OFF

Displaymeasuring progress

SEM Amplifier
Message window

Method in use

ON/OFF

Fig. 20: Window "Mini"

The "Mini" window offers all the settings required for the measurement process andcan be used for serial measurements of test objects.
This window is mainly suitable for the operator of the device.
ButtonDescription

Load Method► To start the method editor , press this button. See"Select method [} 49]".

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Operation | 6

ButtonDescription

Calibrate► To start the calibration, press this button. See"Calibrating [} 58]".

Load/Unload

The lid of the test chamber can only be opened at
atmospheric pressure.
► To prevent the entry of air (and thus the amount of
natural helium contained in it) when changing the test
object, or to open the lid of the test chamber after anaborted measurement process due to the exceeded
setpoint in the gross leak test, press this button. The test
chamber is purged for the set time.

Regenerate► To start the regeneration of the cryogenic pump, press
this button. See "Perform regeneration [} 72]".

Abort

Aborting the ongoing process.
► For example, to stop regeneration before the end of theset end time, press this button.

Leak Test► To start the measurement process to determine the leakrate, press this button. See "Preparing the measurement[} 60]".

Display of the leak rate
To display the measured leak rate in the units [mbar l/s] or[atm cc/s] in the vector diagram and as a numeric value. The green measuring range
defines the good test objects. The red measuring range defines the bad test objects.
► To define the threshold value for the gross leak test, select the method editor, seealso Set the setpoint for gross leak test [} 55]

Cathode in CHLD-Sensor ON/OFF
To switch the cathode in the CHLD-Sensor on and off.

SEM amplifier ON/OFF
To switch the SEM amplifier (secondary electron multipliers) ON and OFF.

Method in use
Displays the selected method for the current measurement process.

Display measuring progress
To display the relative measuring progress with the progress bar.

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Message window
To display status messages in the yellow field, e.g. "Leak Test done" (measurement
process completed); the operating mode e.g. "Standby" and the time measuring
progress.

6.2.1.2 Setting the "Measure" window► To open the "Measure” window, press the tab "Measure".

Display of the linear scaled measuring signal
during the accumulation phase
SystemdiagramMessagewindow
Selection
menu
Display of the logarithmicallyCathode inscaled measuring signal during

CHLD-Sensor

SEM Amplifier

the entire measuring procedure

ON/OFF

ON/OFF

Fig. 21: Window "Measure"

In addition to the standard settings, the "Measure" window offers additional options forconfiguring the measurement process. At the same time, the current status of theindividual components of the device during the measurement are displayed in thesystem diagram.
This window is suitable for appropriately trained operators and for maintenance andservice personnel as well as for measurements with a high configuration requirement.
ButtonDescription

Abort

Terminating the ongoing process.
► For example, to stop regeneration before the end of theset end time, press this button.

Init VACsys► To set the device in the "Standby" operating mode,press this button.

Calibrate► To start the calibration, press this button. See"Calibrating [} 58]".

Load/Unload

To purge test chamber with purge gas. This function canalso be used to open the lid of the test chamber.

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Operation | 6

ButtonDescription► To prevent the entry of air (and thus the amount of
natural helium contained in it) when changing the test
object, or to open the lid of the test chamber after anaborted measurement process due to the exceeded
setpoint in the gross leak test, press this button. The test
chamber is purged for the set time.

Leak Test► To start the measurement process to determine the leakrate, press this button. See "Preparing the measurement[} 60]".

Regenerate► To start the regeneration of the cryogenic pump, press
this button. See "Perform regeneration [} 72]".

Service► To access the service functions, press this button.

Load & Run► To start the selected mode from the selection menu,press this button.

Display of the accumulation signal
To display the linear scaled measurement signal during the accumulation phase inamps [A] in the upper diagram. The leak rate is determined from the slope of thesignal waveforms shown in the diagram with units [mbar l/s] or [atm cc/s].
► To define the threshold value for the gross leak test, select the method editor, seealso Set the setpoint for gross leak test [} 55].

Display of the measuring signal
To display the logarithmic scaled measurement signal during the entire measuring
procedure in amps [A] in the upper diagram. Red: Helium signal; white: Backgroundsignal.

Cathode in CHLD-Sensor ON/OFF
To switch the cathode in the CHLD-Sensor on and off.

SEM amplifier
To switch the SEM amplifier (secondary electron multipliers) ON and OFF.

Method in use
Displays the selected method for the current measurement process.

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Message window
To display status messages in the yellow field, e.g. "Leak Test done" (measurement
process completed); the operating mode e.g. "Standby" and the time measuring
progress.

System diagram
Displays current system conditions and parameters, such as temperature, pressure,leak rate, and system components.

Selection menu
To select the following modes:• MID
In the "MID" (Multiple Ion Detection) mode, you can carry out a simultaneous
measurement signal acquisition for several masses (= gases) over time.
• Bar
You can measure the signal intensities of selected masses in "Bar" mode anddisplay them as a bar graph.
• ScanIn "Scan" mode, you can perform continuous (analog) sampling of the signal
intensities across the measuring axis.
• Method
You can start the method editor . See "Select method [} 49]".
• Recipe
You can start the recipe editor to configure the mass spectrometer (CHLDSensor). See "Select method [} 49]".
Parameter

Description

He-TL Slope

The test leakage signal slope measured during thecalibration in unit of measurement [A/s].

He-Sample Slope

The helium signal slope determined by the measurementof the test object in the unit of measurement [A/s].

He-BG Slope

The measured helium background signal slope during acalibration in unit of measurement [A/s].

Gas 2 amplitude

Signal amplitude of a second measured gas (in multi-gasmode).

S/B 100 ratio

Ratio of helium test leak signal slope tohelium background signal slope during the last calibration.

Net-TL Slope

Difference of helium test leak signal slope andhelium background signal slope during last calibration inunit of measurement [A/s].

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Operation | 6

Parameter

Description

Measured He LR

The measured helium leak rate during a measurement
process in the unit of measurement [mbar l/s] or [atm cc/s].

Measured 2 LR

The measured leak rate of a second gas (in multi-gasmode) during a measurement process in the unit ofmeasurement [mbar l/s] or [atm cc/s].

6.2.2 Configuring the measurement process
In the "Configuration" window, you perform detailed measurement settings .
► To open the "Configuration” window, press the tab "Configuration".

Control Options

AI configuration

Helium calibration leak

User Form

Valve Control

AutoStartUp

Fig. 22: Window "Configuration"

AI configuration
For assigning the sensor parameters for the corresponding sensors. The curves for
the Pirani sensors, the cryogenic temperature, the test leak temperature and therotational speed of the turbo molecular pump are shown.

Control Options
OpMode: Function for internal use by INFICON GmbH.
► Only use the value "Real Unit" for the "OpMode".
Auto-Relight: For automatic switching on the cathode in the CHLD-Sensor when thetarget temperature of the cryogenic pump is reached.
► To switch on the cathode automatically in the CHLD-Sensor activate this option.

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MSC: The MSC (Mass Scale Correction) function is not used.
hide: To hide the tabs from "Mixed Data".
► To display all tabs from "Mixed Data" in the header, which can be used to open thesame window with additional detail information, deactivate this option. This function
is protected by the password "Germany".
TipStrip: For displaying an information text, when the mouse pointer points to an
operating element, for example, a button for a certain time, for which a corresponding
information text has been programmed.

Helium calibration leakTo adjust the parameters of the helium test leak.
► After a changed helium calibration leak, reset the default parameters according to
the supplied certificate.

AutoStartUp
Auto Filament: Activate the cathode in the CHLD-Sensor automatically after
evacuation.
► To enable the cathode in the CHLD-Sensor automatically after a completed
evacuation, activate this option.

Valve Control
Valve Delay: To set the valve delay time. This delay time ensures that two valves do
not change their state at the same time.
► Set the value "3000", i.e. a time delay of 3 seconds between the respective start oftwo valve movements.

User Form
Print User Form: To print the measurement data after the measurement process.
► To print the measurement data after each measurement process, activate thisoption.
Clear Serial Number: To reset the serial number entered in the "Input" window after ameasurement.
► To automatically delete the serial number of the measured object after eachmeasurement process, activate this option.
LR unit: To select the unit of measure for the leak rate.
► Choose between the unit of measurement [mbar l/s] or [atm cc/s].

Load/Unload Time [s]Duration to purge the test chamber.

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Operation | 6► To define the duration in which the test chamber is purged with purge gas, set thetime.

Short regen after Gross Leak
Short-term heating of the cryogenic pump after a gross leak test to remove helium
from the cryogenic pump. This function is activated by default.
After a gross leak test, helium atoms are located between the purge gas atoms on thesurface of the cryogenic pump. In order to avoid increased leakage rates during
subsequent measurements by means of this helium fraction, the cryogenic pump isheated up briefly, but only when during the gross leak test a gross leak is detected, sothat the helium components can be evaporated and removed from the system.
• To turn on this feature, click the icon. The triangle in the symbol is displayed ingreen.
• To turn off this feature, click the icon. The triangle in the symbol is displayed inblack.

Use User Input Form
"Input" window for detailed information on the test object.
• To enter only the serial number for each test object, deselect the "Use User Input
Form" option.
• To enter detailed information for each test object, select the "Use User Input Form"
option. The "Input" window opens.

6.3 Select method
The settings and configurations required for measuring the leak rate are summarized
in the method editor in a so-called method. Assign a corresponding method before
beginning each individual or serial measurement.
You can use preset methods or create new methods yourself.

6.3.1 Select an existing method
Using a method, you define the times and limits to be set over the measurement
sequence of a leakage measurement.

1

Mini > Method > Load & Run or Measure > Method > Load & Run.

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Fig. 23: Methods editor: Select an existing method2

Select the method to use from the Method list and press the "Use Method"
button.

ð

The pending measurement is / The pending measurements are carried out
according to this method.

If you have selected a method, a recipe is automatically assigned to this method. You
have the option of assigning a different recipe to your chosen method (see Selectexisting recipe [} 52]") or a new recipe (see Create new recipe [} 53]").

6.3.2 Create new method
Using a method, you define the times and limits to be set over the measurement
sequence of a leakage measurement.

1

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Measure > Method > Load & Run.

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Operation | 6

Fig. 24: Methods editor: Create new method

2

Press the "new" button.
ð You can create a new method.

3

Select a recipe from the "Recipe File" list box.

4

Type a name for the new method in the "Method Title" input box.

5

In the "Description" text box, type a meaningful description for the new method.

6

Define the parameters, see the second table.

7

Press the "Use Method" button.

ð

The new method has been created and the upcoming measurement(s) will be
carried out according to this method.

ButtonDescription

new► To create a new method, press this button.

delete► To delete a method, press this button.

Use Method► To perform measurements according to an existing or
newly created method, press this button.

Cancel► To end the method editor, press this button.

Parameter

Description

T1 (purge)

Time in [s]. During this time, the test chamber and thevolume between the 2 sealing rings on the test chamber
are purged with purge gas at the beginning of themeasurement procedure.

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Parameter

Description

T2 (purge delay)

Time in [s]. Waiting time between purging and evacuationof the valve block.

T3 (Evacuate Cyc)

Time in [s]. During this time, the purge gases are pumped
out of the test chamber, from the volume between the 2
sealing rings of the test chamber and from the valve block,and removed from the system.

V2 cycles

Number of cycles according to recipe used. With 500 ms
in the recipe the cycle takes about 1 second. During thistime, helium is pumped from all surfaces as well as fromthe volume between the 2 sealing rings on the test
chamber and removed from the system. At the end of thistime, only helium is present in the system, which originates
mainly from the test object.

T6 (vent)

Time in [s]. During this time, the test chamber and thevolume between the 2 sealing rings on the test chamber
are purged with purge gas at the end of the measurement
procedure.

Gross Leak threshold

Setpoint for the upper limit for the gross leak test. Below
this setpoint, the test objects to be measured do not haveany gross leaks. This value must be greater than any
measured value of test objects without gross leaks. See
also "Set the setpoint for gross leak test [} 55]".

SEM Target

Parameters related to the SEM amplifier of the CHLDSensor.
► Do not change the default setting.

SEM Target window +/-Parameters related to the SEM amplifier of the CHLDSensor.
► Do not change the default setting.

If you have created a new method, a recipe is automatically assigned to this method.
You have the option of assigning a different recipe to your chosen method (see Selectexisting recipe [} 52]") or a new recipe (see Create new recipe [} 53]").

6.3.3 Select existing recipe
With a recipe you define which masses (= gases) with which measurement settings
are used for measuring.

1

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Measure > Recipe > Load & Run.

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Fig. 25: Window "Recipe-editor": Select existing recipe

2

Press the "Open" button.

Fig. 26:

3

Select the recipe from the list.

4

To accept the selected recipe, press the OK button.

ð

The selected recipe has been accepted.

6.3.4 Create new recipe
With a recipe you define which masses (= gases) with which measurement settings
are used for measuring.

1

Measure > Recipe > Load & Run.

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Fig. 27: Window "Recipe-editor": Create new recipe

2

Press the "New" button.

3

Define the parameters, see the following table.

4

To save the settings and close the recipe editor, press the "Use Parameters"
button.

ðThe new recipe is created.

use MSC
The MSC (Mass Scale Correction) function is not used.

Cycle TimeDie Cycle Time results from the sum of the dwell Dwell times plus the changeovertimes.
Parameter

Description

ChannelNumber of the parameter set.

Chan Mode

Number of the parameter sets.

1

To create the parameter set for the gas to bemeasured and to use the parameter set in a method,
select "enable".

2

To create the parameter set for the gas to bemeasured without using the parameter set in amethod, select "skip".

3
Detector

To not use the parameter set, select "off".

Choice of detector.
► Only use the default setting SEM.

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Parameter

Description

Mea Mode

Choice of measurement method.
► Only use the default setting SAMP.

FirstMassEnter the mass to be measured (= gas).

1

For example, to measure helium, enter the value"4.00".

2

For example, to measure the background, enter thevalue "5.00".

Width► Use the default setting "0".

Dwell/Speed

Dwell time of the CHLD-Sensor on each mass. The
following relationships apply. High expected signal
amplitudes require only short dwell times for sufficientmeasuring sensitivity and thus enable faster measuring
times. Small signal amplitudes require longer dwell times
in order to increase the measuring sensitivity, resulting in
longer measuring times.
► Use the reference value "500" for helium (mass 4) andthe reference value "500" for the background (mass 5).
For leak rates less than 2 x 10-12 mbar l/s, these values
must be correspondingly increased, e.g. "5 s" for aleakage rate of 2 x 10-13 mbar l/s. Shorter measuring
times result in larger measured values.

Resolution

How many measuring points per mass (resolution).
► Use the default setting "50".

Amp Mode

Operating mode of the amplifier.
► Use the default setting "Auto".

Amp Range

Area of the preamplifier.

Pause Cal

Settling time after changing the mass.
► Use the default setting "0.50".

SEM

Used preamplifier► Use the default setting "0".

6.3.5 Set the setpoint for gross leak test
With the setpoint for the gross leak test you define the upper limit for the gross leaktest. Below this setpoint, the test objects to be measured do not have any gross leaks.
The setpoint to be set refers to the helium raw signal in the measuring unit [A].
If the measured helium signal is greater than the setpoint after the gross leak test, themeasurement process is terminated.

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If the measured helium signal is less than the threshold value after the gross leak test,
the measurement process is continued with the fine leak test.

1

Mini > Method > Load & Run or Measure > Method > Load & Run.

Fig. 28: Editor methods

2

Define the value of the parameter "Gross Leak threshold". This value must be
as small as possible for a high sensitivity, but in any case be greater than any
measured value of test objects without gross leak.

3

To save the settings, press the "Use Method" button.

ð

The setpoint for the gross leak test is set.

Procedure for determining an appropriate setpoint
1

Carry out several measurements without a test object or with a known tight test
object (depending on the test chamber used and the purge gas Argon 5.0,
-8typically values <1 x 10 A).
ð Following the measurements, the value determined during the gross leakmeasurement is displayed in the "Gross leak amplitude" column in the"Locals" tab.

2

Evaluate average and spread.

3

Define a limit value, in which the natural scattering of the measured values does
not lead to randomly exceeding the gross leak setpoint.

4

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Check the setpoint setting with a known leak test specimen.

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6.3.6 Select single or multi-gas
DANGER
Danger from a Hydrogen explosion
Hydrogen is a flammable and explosive gas.
► Use only tracer gas mixtures with a hydrogen concentration which, in combination
with oxygen or air, can not ignite or explode.

Knurledthumbscrewforflow control valve

Fig. 29: Flow control valve for Single- or multi-gas measuring

6.3.6.1 Select single-gas
1Mini > Method > Load & Run or Measure > Method > Load & Run.

2

Select the method with the desired helium setting in the method editor. See"Select method [} 49]".

3

Press the "Use Method" button.

4

Adjust the flow control valve. When using the Single-gas measurement, use thethumbscrew to close the flow control valve.

6.3.6.2 Select multi-gas
1

Mini > Method > Load & Run or Measure > Method > Load & Run.

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2

Select the method with the desired multi-gas setting in the method editor. See"Select method [} 49]".

3

Press the "Use Method" button.

4

Adjust the flow control valve. When using the multi-gas measurement, use thethumbscrew to open the flow control valve.

6.4 Calibrating
Use a calibration test to check if the leak detector is correctly set-up and that leakrates can be correctly measured. This determines the ratio between signal and noise(signal-to-noise ratio).
For proper leak testing regular calibration is absolutely necessary. You can performthe calibration only with the calibration leak mounted on the device.
Without calibration, no measurement process can be started. The "Leak Test" buttonin the "Mini" and "Measure" measurement windows is not active in this case but isshown in gray.

To carry out measurements, perform a calibration. Perform the calibration once a day
or if there is any doubt about the measurement readiness of the device. After astandstill period for the device of more than 12 hours or after regeneration, perform 2
to 3 calibrations in sequence to ensure the required measurement readiness.
► Carry out a calibration which results in the value of the parameter "S/B 100 ratio" >100.

6.4.1 Perform calibration► Mini > Calibrate or Measure > Calibrate.
ðThe device calibrates. The finished calibration is displayed in the "Measure"
window by the yellow message text "Calibration Finished".

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Fig. 30: "Measure" window (presentation of results after calibration)

6.4.2 Connect external calibration leak
You have the option of connecting an external calibration leak to the device.
You cannot calibrate the device with the external calibration leak.
You can only calibrate the device with the internal calibration leak.

1

Place the external calibration leak with the copper sealing ring on the flange.

2

Tighten the 6 screws on the flange only slightly.

3

Recommendation: Using the modified Allen key 9/64 inch (included in delivery),tighten the 6 screws on the flange according to the 2-2-3 system. For example:
Tighten screw 1. Tighten the screws in the order 3, 5, 2. Tighten the screws in
the order 4, 6, 3. Tighten the screws in the order of 5, 1, 4, etc. Repeat thisprocedure until the gap between both flanges is almost completely closed.

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1
6

2

3

5
4

Flange to connect

Lid foran external calibration leaktest chamber

FlangeFig. 31: Connect external calibration leak4

Close the lid of the empty test chamber.

5Open the hand valve on the external calibration leak.

6

Mini > Leak Test or Measure > Leak Test.

ð

The leak rate of the external calibration leak is determined in the measurement
unit [mbar l/s] or [atm cc/s].

6.5 Measuring
6.5.1 Preparing the measurement
NOTICE
Material damage due to improper filling of the test chamber
If the test chamber is operated without a grid inserted, test objects from the test
chamber can be sucked into the device and cause damage to the device.
► In order to carry out measurements, place the grid that is supplied with the test
chamber in the test chamber.
► To remove dirt from the test chamber, vacuum the dirt with a suitable vacuum
cleaner and then wipe the test chamber with a cloth soaked in isopropanol.
ü Possible alternatives to the operating possibilities on the device are set up(optional), e.g. bar code reader for the automatic data acquisition of the test objects.

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Operation | 6

1

To turn the device on, set the power switch to ON (see "Switching the device on[} 41]").
ð The device has a power-on delay and is switched on after approx. 20 s.
ð The computer and monitor are automatically turned on and started.
ð The operating system is started and the "Measure" window is displayed bydefault.

Idle time► You must wait for about 2 hours after switching on the device. During this time, thecryogenic pump is cooled down to a temperature < 20 K. If System pumped andReady" appears in the "Mini" or "Measure" in the yellow highlighted message
window, you can proceed to the next step.

2

Perform a calibration. See "Calibrating [} 58]".

3

If you want to use only helium as tracer gas, close the flow control valve's
knurled screw (see "Select single-gas [} 57]"). If you want to use several tracer
gases, open the flow control valve's knurled screw (see "Select multi-gas[} 57]").

4

Use a suitable tool such as a plastic tweezer to place the test object in the test
chamber and close the lid of the test chamber.

5

Make sure that the correct basic settings and the settings for the current
measurement are carried out. See "Basic settings [} 42]".

6

Make sure that the desired method is set see "Select method [} 49]".

7

Set the setpoint for the gross leak measurement, see "Set the setpoint for grossleak test [} 55]".

8

Make sure that calibration takes place daily. See "Calibrating [} 58]".

9

Ensure that the regeneration of the cryogenic pump is carried out once a day.
See "Perform regeneration [} 72]".

10

To start the measurement process manually, see "Prepare for manual start[} 61]".

6.5.2 Prepare for manual start
You can start the measurement process manually with the round connector inserted.

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INFICON► The device is factory-set for manual starting of the measurement process. To start
the measurement process manually, you can press the "Leak Test" button in the"Mini" or "Measure" windows. See "Select the "Mini" window and start themeasurement [} 62]" or "Select the "Measure" window and start the measurement[} 63]".

6.5.3 Start and perform the measurement
To start the measurement process (only when the device is prepared for manual
start), to follow the measurement and to view the results, you can choose between two
measurement windows.
• To start and run the measurement with the "Mini" window see "Select the "Mini"
window and start the measurement [} 62]".
• To start and run the measurement with the "Measure" window see "Select the"Measure" window and start the measurement [} 63]".

6.5.3.1 Select the "Mini" window and start the measurement
The "Mini" window provides all settings required for the measurement process. Thiswindow is mainly suitable for the operator of the device.
► To open the "Mini” window, press the tab "Mini".

Fig. 32: Window "Mini"

1

To start the measurement process, press the "Leak Test" button. After starting
the measurement process, the name of the "Leak Test" button changes to"testing ...".

2

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Track the measurement process using the progress bar.

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6.5.3.2 Select the "Measure" window and start the measurement
In addition to the standard settings, the "Measure" window offers additional options forconfiguring the measurement process. At the same time, the current status of theindividual components of the device during the measurement are displayed in thesystem diagram. This window is suitable for appropriately trained operators and formaintenance and service personnel as well as for measurements with a highconfiguration requirement.

1

To open the "Measure” window, press the tab "Measure".

Fig. 33: Window "Measure"2

To open the "Input" window, press the "Leak Test" button.

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Information

Fig. 34: "Input" window

3

Enter your desired information. Optionally, you can capture the desired
information from the test objects with a bar code reader.

4

To start the measurement process, press the "Proceed" button.

5

Track the measurement process using the progress bar.

6.5.3.3 Perform gross leak test
The gross leak test takes place automatically. The previously set setpoint is used as
the abort criterion for this measurement process (see Set the setpoint for gross leaktest [} 55]"). If the helium signal falls below this setpoint, the measurement process is
terminated correctly and the measurement process is continued with the fine leak test(see "Carry out a fine leak test [} 65]").
If the helium signal exceeds this setpoint, the measurement process is terminated andno fine leak test is performed.
See "Complete the measurement process according to the gross leak and fine leaktest [} 66]".

6.5.3.4 Terminate the measurement process after gross leak test
1

Press the "Load/Unload" button in the "Mini" measuring window or in the"Measure" measurement window".

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2

Remove the test object from the test chamber.

ðThe measurement process is finished.

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Operation | 6

You can measure another test object or perform a regeneration of the cryogenic pump(see "Perform regeneration [} 72]") and then switch off the device (see "Switching off
the device. [} 73]").

6.5.3.5 Carry out a fine leak test
If during the gross leak test the result falls below the set setpoint, the fine leak test is
carried out automatically.

Fig. 35: Display of the measurement results in the window "Mini"

The measured leak rate is displayed in the "Mini" window in a vector diagram in themeasurement unit [mbar l/s] or [atm cc/s]. A colored good / bad display enables thequalitative assignment of the measured test objects.

Fig. 36: Display of the measurement results in the window "Measure"

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The measured leak rate is displayed in the "Measure" window in a vector diagram in
the measurement unit [mbar l/s] or [atm cc/s]. The accumulatively measured signal isdisplayed graphically in the upper left window. The measuring signals of the CHLDSensor are displayed in the lower left window for the measurement process for all
measurement processes.

6.5.3.6 Complete the measurement process according to the gross leakand fine leak test

In the "Configuration" window, you can define whether or not the "Print Report"
window should be opened after the end of a measurement.

Fig. 37: Window "Print Report"

1

To print the contents of the "Print Report" window, press the "Print" button.
ð The contents of the "Print Report" window are printed.

2

Remove the measured test object from the test chamber.

ðThe measurement process is finished.

You can measure another test object or perform a regeneration of the cryogenic pump(see "Perform regeneration [} 72]") and then switch off the device (see "Switching off
the device. [} 73]").

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6.5.4 Display information about the measurement
6.5.4.1 Display state time diagrams► To open the "Mixed Data" window, press the tab "Mixed Data".

Fig. 38: Window "Mixed Data"

The "Mixed Data" window provides an overview of the timing of all signals during ameasurement process.

6.5.4.2 Display measurement parameters► To open the "MS-Panel" window, press the tab "MS-Panel".

Fig. 39: Window "MS-Panel"

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The "MS-Panel" window displays the measured data during a measurement process.
The corresponding 10 measured values recorded during an accumulation phase forthe different masses are documented.

6.5.4.3 Display current settings► To open the "System" window, press the tab "System".

Fig. 40: Window "System"

The current settings for the completed measurement process are displayed in the"System" window. (Pin 17)
Output parameter/

StatusPin assignment of
the digital I/O *)Ready (Pin 17)

Ready = HIGH: You can start a measurement / calibration.

Pass (Pin 18)

Pass = HIGH: The tested test object is leak-proof.

Fine Leak (Pin 19)

Fine Leak = HIGH and Gross Leak = LOW: Helium fine leak.

Gross Leak (Pin 21) Fine Leak = LOW and Gross Leak = HIGH: Helium gross leak.
Fine Leak = HIGH and Gross Leak = HIGH: Gas-2-fine leak.
Error (Pin 20)

Error = HIGH: Error message displayed on the screen.

*) The bushing of the CHLD detector is equipped with a plug by default. If you need touse the output signals, use a Y-cable.
Further explanations: The outputs are open collectors, max. 60 mA per output, Pin 10
is +24 V, Pin 9 is 0 V.

6.5.4.4 Display general information► To open the "Locals" window, press the tab "Locals".

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Fig. 41: Window "Locals"

The Locals window displays path and general information, such as the serial numberof the device and the software version.

6.5.4.5 Display events► To open the "Events" window, press the tab "Events".

Fig. 42: Window "Events"

In the "Events" window, you will be shown which internal software routine is currently
running.

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6.6 Measurement data
The measurement data are recorded in a list.

Fig. 43: Window "Leak Table"

ButtonDescription

Clear Table► To delete all measurement data in the table, press thisbutton.

Export Table► To open all measurement data in the preinstalled Open
Office press this button. In the Open Office you can store
the measurement results at any location, e.g. a USB
flash drive (FAT32 formatted). In the "Locals" window,
the "log.xls" is stored, in which contains all measurement
results (regardless of the export).

6.7 Determine mass spectrometerIn the "Scan" mode, you can use the CHLD-Sensor to measure all the masses present
in the system of the device and display them as a mass spectrum in the "Measure"
window. With this measurement you can determine which gases are in the system of
the device.

1

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Measure > Scan > Load & Run.

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Fig. 44: Editor for Scan parameter to determine the mass spectrum

2

To select the scan procedure from the list, press the "Use Parameters" button.

ð

The measurement of all masses of the gases present in the system is performed
according to this scanning procedure and the result is displayed as a mass
spectrum in the "Measure" window.

Fig. 45: "Measure" window with determined mass spectrum► To stop the measurement, press the red STOP button.

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6.8 Perform regeneration

On a daily basis, before switching off the device and mainly after a series ofsuccessive measurements, the gases frozen in the cryogenic pump must be
evaporated and removed from the system.
► Perform daily regeneration of the cryogenic pump.
After the regeneration is started, the heating phase is started after a pre-warning
period. The temperature in the cryogenic pump increases and the frozen gases areevaporated and pumped out, depending on their dew point.

1

Mini > Regenerate or Measure > Regenerate.

Button "Set Time and Date "Button "Set Time to Now "Fig. 46: Input window "Regeneration cryogenic pump"

2

To define the regeneration period, choose between the 2 possibilities.
ð To start regeneration on a daily basis with set start time, select "weekday". To
set the start time with the "Start-Time" parameter the end time with the "EndTime" parameter press the "Set Time and Date" button. To start theregeneration immediately, press the "Set Time to Now" button.
ð To start regeneration before each weekend with set start time, select"weekend". To set the start time with the "Start-Time" parameter the end timewith the "End-Time" parameter press the "Set Time and Date" button. To start
the regeneration immediately, press the "Set Time to Now" button.

3

To start the regeneration at the preset start time, press the "OK" button.
ð The measuring program automatically changes to the "Regeneration
cryogenic pump" window.

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Fig. 47: "Regeneration cryogenic pump" window

The "Regeneration cryogenic pump" window gives you a detailed overview of theregeneration history.
To stop regeneration before the set end time, press the "Abort" button.

6.9 Switching off the device.
NOTICE
Damage to the cryogenic pump
If there are frozen gases in the cryogenic pump and the device is switched off, thegases are evaporated and the rupture disk on the cryogenic pump can rupture as aresult of the rising pressure.
► Perform a regeneration of the cryogenic pump, at least up to a temperature of 280
K, before you switch off the device.
You can turn the device off with the power switch on the back of the device.
The parameters set in the device remain saved.

1

Stop the Pernicka 700H software.

2

Shut down the computer.

3

To turn the device off, set the power switch to OFF. When the device is switched
off, the compressor of the cryogenic pump is also switched off.

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7 | Warning and error messages

INFICON

7 Warning and error messages
During operation, the display shows information that helps you operate the instrument.
Measurement values are displayed along with current device modes, operating
instructions as well as warnings and error messages. The instrument is equipped withextensive self-diagnostic functions. If the electronics detect a faulty state, the device
will show this as far as possible on the display and will interrupt operation whennecessary.
Warnings

Warnings warn of instrument modes that can impair the accuracy of measurements.
Operation of the instrument is not interrupted.

Error messages

Errors are events that force the interruption of the operation. The error message
consists of a number and a descriptive text.

7.1 Display warning and error messages► To open the "Errors" window, press the tab "Errors"."Errors" window"Errors"
windowOperationOperation

Fig. 48: Window "Errors"

In the "Errors" window, error messages are displayed during a measurement process
and recorded in the background.
Warnings

Message

Possible causes

Solution

Emission current > +/-HV pressure is too

Perform a regeneration. See

10 %

high.

"Perform regeneration [} 72]".

Cathode is aged.

74 / 100

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Warning and error messages | 7

Message

Possible causes

Solution
Change to the other cathode in
the "Pernicka 700H"
measurement program. See"Select cathode in the CHLDSensor [} 87]".

Emission current > +/-HV pressure is too

Change to the other cathode in

20 %

high.

the "Pernicka 700H"

Cathode is aged.

measurement program. See"Select cathode in the CHLDSensor [} 87]".

RF temperature high >Filter mat clogged in

Change the filter mat in the

65 °C ... 80 °C

the CHLD-Sensor.

CHLD-Sensor. See "Check or

Fan in the CHLD-

change the filter mat [} 81]".

Sensor defective.

Change the fan in the CHLD-

RF generator in the

Sensor. Please contact the

CHLD-Sensor is

INFICON service.

incorrectly calibrated.
Error messages

Message

Possible causes

Solution

External protection

HV pressure is too

Check the tightness of the valves.

triggeredhigh.

Emission Error

HV pressure is too

Check the tightness of the valves.

high.
Filament 1 defectCathode 1 is defective. Change to the cathode 2 in the"Pernicka 700H" measurement
program. See "Select cathode in
the CHLD-Sensor [} 87]".
Please contact the INFICON
service. The second cathode isequivalent to the first and typicallyallows for a period of about amonth of device operation.

Turning on Analyzer

HV pressure is too

Replace both cathodes in the

FAILED!

high.

CHLD-Sensor. Please contact theBoth cathodes are

INFICON service.

defective.
Internal connection
problem in the CHLDSensor.
An Error occurred (longInternal Windows

Start the measurement program

text)

communication error.

"Pernicka 700H" once a week.

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7 | Warning and error messages

Message

INFICON

Possible causes

Solution

Turning on the emission SEM amplifier dirty or

Please contact the INFICON

and SEM FAILED andservice.

defective.

was aborted!
FAILURE: Emission and HV pressure is too

Wait until the pressure is small

SEM are OFF!

enough to turn on the SEM

high.

amplifier.
FAILURE: Air pressure

Air pressure for the

Check that the air pressure isfor valve switching is too valves is less than 7

greater than 7 bar.

low!

Open the pressure valves in thebar.

supply lines.
Gradually increase the pressure
each by 0.5 bar.
Problems

Situation

Possible causes

Solution

The device cannot be

The power cord for the Plug the supplied power cord into

switched on.

power supply is not

the POWER LINE INPUT plug

plugged into theand connect the power cord to

device.

the power supply.

Red X in the system

The pressure of the

Check that the air pressure isdiagram ("Measure"compressed air supply greater than 7 bar.

window) at the point "Air is less than 6.9 bar.

Open the pressure valves in thepressure".

supply lines.
Gradually increase the pressure
each by 0.5 bar.

The lid of the test

The test chamber is

In the "Pernicka 700H"

chamber cannot be

under vacuum.

measurement program, press theopened.

"Measure" tab and then the"Load/Unload" button.
Ensure that the pressure of thepurge gas supply is between 69
mbar and 71 mbar.
Ensure that the pressure of thecompressed air supply is between
6.9 bar and 7.59 bar.

Hissing or stuttering

The pressure of thesound from the back ofcompressed air supply compressed air supply is less

Check that the pressure of thethe device.

is greater than thethan 9 (consistency!) bar. Lower

factory-set limit for thethe pressure by 0.2 bar.

pressure relief valve.

76 / 100

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Warning and error messages | 7

Situation

Possible causes

Solution

The sound comes fromthe activated pressure
relief valve.

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8 | Cleaning and maintenance

INFICON

8 Cleaning and maintenance
8.1 General information
DANGER
Dangers from electric power
There is a danger to life from the contact of conductive parts inside the device.
► Disconnect the device from the power supply prior to any maintenance work. Make
sure that the electric power supply cannot reconnected without authorization.

Servicing levels for maintenance work
• I

Service level I

Customer• II

Service level II

Customer with INFICON training• III

Service level III

Authorized INFICON service technician

Service level I maintenance work on the Pernicka 700H CHLD may be carried out by
the customer. These maintenance procedures are described in this "Original
Operating Instructions Pernicka 700H CHLD".
Service level II and II maintenance work on the Pernicka 700H CHLD may only be
carried out by authorized INFICON service technicians or by persons authorized by
INFICON GmbH Cologne. These maintenance procedures are described in the"Pernicka 700H CHLD Service Documentation".

8.2 Device maintenance8.2.1 Change O-rings of the test chamber
Carry out the maintenance work according to the maintenance plan, see "Maintenanceplan [} 87]".
To prevent grease deposits on the device, use neoprene or nitrile disposable gloves
free of powder during operation.
Required spare parts

78 / 100Set of O-rings test chamber, small

Order number: 200004645

Set of O-rings test chamber, middle

Order number: 200004646

Set of O-rings test chamber, large

Order number: 200004647

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INFICON

Cleaning and maintenance | 8

Required tools

Aids for levering the O-rings, e.g. plastic tweezers or forceps

1

Open the lid of the test chamber.

2

Carefully remove the two O-rings from the test chamber using a suitable aid. Liftthe O-rings only upwards.

3

Clean the surface of the test chamber with a dust- and lint-free cloth.

4

Insert the two new O-rings into the test chamber.

5

Close the lid of the test chamber.

Test chamber

O-ringFig. 49: Test chamber: Lid open

8.3 Maintenance of the CHLD sensor
8.3.1 Check the fan function
Read and follow the included technical documentation "Operation Manual CHLD
Sensor QME 220".

The fan is used to cool the internal electronic modules of the CHLD-Sensor.
Required spare parts

Required tools

See "Check or change the filter mat

See "Check or change the filter mat[} 81]"[} 81]"

See "Check or change the filter mat [} 81]"

► Check the fan function in the following situations:

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8 | Cleaning and maintenance

INFICON

The maintenance interval according to the maintenance schedule (seeMaintenance plan [} 87]) has been reached1

Perform an acoustic check on the fan function on the QME 220 electronic unit.

2

If you do not hear any fan noise, change the fan. Please contact the INFICON
service.

3

If you hear fan noise, check the filter mat. See "Check or change the filter mat[} 81]".

The temperature in the QME 220 electronic unit is too high
The temperature in the QME 220 electronic unit, is normally in the range of 20 °C ...
25 °C above the ambient temperature.

1

To open the "Tools” window, press the tab "Tools".

2

Tools > Tune Up.

Display"QME Temp"

Fig. 50: CHLD-Sensor: Check temperature of the QME 220 electronic unit

3

The current temperature of the QME 220 electronics device of the CHLD-Sensor
is displayed in the "QME Temp" field. Check.

4

If the temperature in the QME 220 electronics device is 35 °C above theambient temperature, perform an acoustic check on the fan function on the QME
220 electronics device.

5

If you do not hear any fan noise, change the fan. Please contact the INFICON
service.

6

If you hear fan noise, check the filter mat. See "Check or change the filter mat[} 81]".

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Cleaning and maintenance | 8

8.3.2 Check or change the filter mat
Carry out the maintenance work in accordance with the manufacturer's maintenanceplan and the manufacturer's technical documentation. See "Operation Manual CHLD
Sensor QME 220".
The filter mat serves for dust filtration of the cooling air. To ensure sufficient cooling of
the electronic components in the CHLD-Sensor clean the filter mat regularly.
Required spare parts

Filter mats (5 pieces) CHLD 700 Sensor

Order number: 452-552

electronics box
Required tools

Screwdriver Torx T10

Separate the connection from the IO 220 module► Disconnect all electrical connections to the IO 220 module: Power supply, Ethernet
cable, analog I/O-cable, digital I/O-cable.

QME 220

Analog I/O
Digital I/O

Module
IO 220Connection for theConnectionEthernet

power supply(PC)

Fig. 51: CHLD-Sensor: Disconnect connections on IO 220 module

Disconnect the QME 220 electronics device from the QMA 220 analyzer
1

Loosen the 2 screws on the QME 220 electronics device.

2

Carefully remove the QME 220 electronics unit from the QMA 220 analyzer.

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8 | Cleaning and maintenance

INFICON

3

Place the QME 220 electronics device on a suitable base that allows you towork comfortably on the front panel.

Analyzer

Screw

Electronic device
QME 220

QMA 220

Screw (hidden)

Fig. 52: CHLD-Sensor: Unscrew the QME 220 electronics device

Check or change the filter mat
1

To remove the IO 220 module, loosen the 3 screws.

Screw
Torx T10

Screw
Torx T10

Screw

Torx T10

Fig. 53: CHLD-Sensor: Remove the IO 220 module

82 / 100

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INFICON

Cleaning and maintenance | 8

2To remove the filter holder cover on the back of the CHLD-Sensor loosen thescrew.

3

Remove the filter mat from the filter holder cover.

4

If there is little dirt, clean the filter mat. Use a vacuum cleaner to remove thedust from the filter mat.

5

Insert the cleaned filter mat into the filter holder cover.

6

If there is a lot of dirt, insert a new filter mat into the filter holder cover.

Fig. 54: Check the filter mat and clean if necessary

7

To mount the filter holder cover on the back of the CHLD-Sensor secure thefilter holder cover with the screw.

8

Mount the IO 220 module with the 3 screws.

Mount the QME 220 electronic device onto the QMA 220 analyzer
1

Loosen the two screws on the black plastic part of the QME 220 using an Allen
key (SW 4) so that the movable part has 2 - 3 mm clearance.

2

Carefully insert the QME 220 up to the indented mark onto the already installed
QMA 220. Note the correct positioning on the QME 220 through the earth
tongue and the guide groove on the QMA 220.

3

Tighten the two Allen screws securely. These screws are used to mechanicallysecure the QME 220 and electrical safety as they ensure grounding.

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8 | Cleaning and maintenance

INFICON

Screw (2x)Electronic device QME 220

Guide groove

Earth tongue Analyzer

QMA 220

Fig. 55: Mount the QME 220 electronic device onto the QMA 220 analyzer

Connect electrical connections to the IO 220 module► Reestablish the electrical connections with the IO 220 module: Power supply,
Ethernet cable, analog I/O-cable, digital I/O-cable.

8.4 Maintenance of the internal calibration leak
8.4.1 Perform calibration
Carry out the calibration of the device according to the maintenance plan, see"Maintenance plan [} 87]". Perform calibration, see "Calibrating [} 58]".

Required spare parts

None

Required tools

None

8.4.2 Recalibration of the calibration leak by VTI
Carry out the maintenance work according to the maintenance plan, see "Maintenanceplan [} 87]".

Required spare parts

None

Required tools

Please contact the INFICON service

1

84 / 100

Remove the calibration leak. Please contact the INFICON service.

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INFICON

Cleaning and maintenance | 8

2

Return the calibration leak to the manufacturer for recalibration.

3

Re-install the recalibrated calibration leak into the device. Please contact the
INFICON service.

8.5 Maintenance of the backing pump
8.5.1 Check the oil level
Carry out the maintenance work in accordance with the maintenance plan (see"Maintenance plan [} 87]") and the manufacturer's technical documentation delivered
with the device. See "Operating Instructions GA01601_002_A1".
Required spare parts

None

Required tools

None

The oil level of the backing pump must always be within the "minimum oil level" and"maximum oil level" markings during operation.
► Check that the oil level is approximately in the center of the sight glass when thebacking pump is switched off.

Backing pump

Oil level markmaximum

Sight glass
Oil level markminimum

Fig. 56: Backing pump: Check the oil level

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8 | Cleaning and maintenance

INFICON

8.6 Set CHLD-Sensor
The "Tools" provides functions that allow you to perform settings on the CHLDSensor. For example, you can switch to another cathode or change the operating
current of the SEM amplifier.
► To open the "Tools" window, press the tab "Tools".

Fig. 57: Window "Tools"

The "Tools" window provides functions for maintenance and diagnostics of the device.
ButtonDescription

idle

Display of the "Tools" window (see figure above).

About

Displays the software version number and INFICON
address information.

Tune Up► For example, to switch between heating wires 1 and 2 in
the CHLD-Sensor press this button. See "Select cathodein the CHLD-Sensor [} 87]".

soft emi

Call diagnostic tools for the cathodes.
► You can increase the emission current of the cathode.

degas► To clean the cathodes of adherent substances, selectthis function. The emission current for the cathode isincreased to 5 mA and the adhered substances areevaporated from the cathode.
Note that the operation of the cathode with an increased
emission current reduces the service life of the cathode.

86 / 100

EXIT► To cancel the current process, press this button.

EXIT Tools► To close the "Tools" window, press this button.

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INFICON

Cleaning and maintenance | 8

Watchdog LED
Optical display for monitoring system components of the device.

8.6.1 Select cathode in the CHLD-Sensor
The CHLD-Sensor has 2 cathodes. In the "Tune Up" window, you can switch between
the 2 cathodes in the CHLD-Sensor if a cathode is defective.

1

Tools > Tune Up.

Fig. 58: "Tune Up" Window: Select cathode 1 or 2 in the CHLD-Sensor

2

In the selection field "Filament" choose between Filament 1 and Filament 2.

3

To save the setting, activate the option "save IS voltage".

8.7 Maintenance plan
Regardless of the described maintenance cycles a replacement depends on
contamination and wear.

8.7.1 Maintenance table
Maintenance cycle

Personnel

Additional information

4000 hOperating personnel

8.3.2

Check or change the filter mat

8000 hOperating personnel

8.2.1

Change O-rings of the test chamber

8.3.1

Check the fan function

daily

Operating personnel

8.4.1

Perform calibration

quarterly

Operating personnel

8.5.1

Check the oil level

annually

Operating personnel

8.4.2

Recalibration of the calibration leak by VTI

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9 | Decommissioning the device

INFICON

9 Decommissioning the device
9.1 Deinstallation
ü The device is in "Standby" operating mode.
ü The cryogenic pump regeneration has been carried out. See "Perform regeneration[} 72]".
ü The unit has been switched off. See "Switching off the device. [} 73]".
► Disconnect the device and the cryogenic pump compressor according to thefollowing chapters of the power supply and operating media.

9.1.1 Disconnect the device from the power supply
Connection for the device power supply

Protective conductor

Connection for power supply

connection pointcryogenic pump compressor

Fig. 59: Disconnect the device from the power supply

1

Disconnect the power cord from the power supply and the POWER LINE INPUT
connector.

2

Disconnect the power cord from the power supply and the MAINS CRYOCOMPRESSOR connector.

3

Dismantle the protective conductor at the protective conductor connection pointof the device.

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INFICON

Decommissioning the device | 99.1.2 Separate the purge gas
The sealing elements of the compression fitting, ferrel and clamping ring are intended
to be used only once.
► Use a new ferrel and a new clamping ring for each installation of the metal tube forthe purge gas supply.

Compression fitting for the purge gas connection

Nut
Fig. 60: Separate the purge gas

1

Using an open-ended wrench hold the nut still and loosen the union nut of thecompression fitting.

2

Pull the metal line out of the compression fitting.

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9 | Decommissioning the device

INFICON

9.1.3 Separate the compressed airCompressed air quick coupling

Compressed air hoseFig. 61: Separate the compressed air

1

Close the valve on the compressed air supply.

2

To disconnect the compressed air supply for the device, remove the air hosefrom the compressed air quick coupling of the compressed air supply, such as
the compressed air cylinder, and the device. To do so, press the end face of thecompressed air quick coupling, pull out the compressed air hose from thecompressed air quick coupling and release the end face of the compressed air
quick coupling.

9.1.4 Disconnect the compressor
Cryogenic pump compressor
Read and follow the included documentation "Cryo-Torr Pump Installation, Operationand Maintenance Instructions".

90 / 100

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INFICON

Decommissioning the device | 9Power connection for the

Manometer for helium

cryogenic pump motor

operating pressure

Power cord forConnection

Connection

compressor

helium Return

power supplyLinehelium Supply
Line

Fig. 62: Connections on the cryogenic pump compressor

HeliumCryogenic pump

Supply

motor

Line

HeliumReturnPower cordLine

for the cryogenic
pump motor

Fig. 63: Connections on the device

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9 | Decommissioning the device

INFICON

Disconnect the power cord for the compressor power supply
1

To remove the protective cover from the electrical connection of thecompressor, loosen the 2 fixing screws.

2

To remove the power cord from the strain relief, loosen the 2 screws.

3

Remove the 3 wires from the terminals X, Y and the protective earth connection.

4

Assemble the protective cover with the 2 securing screws.

5

Connect the 3 wires of the power cord to the screw and tighten the nut. The
three wires of the power cord were connected to the screw before theinstallation was started.

Remove the power cord for the motor of the cryogenic pump
► Loosen the threaded housing and remove the circular plug from the COLD HEAD
POWER jack.

Remove the helium lines
The "Supply" and "Return" helium lines are filled with helium and are under pressure.

1

Remove the helium Supply line to the compressor and the device.

2

Remove the helium Return line to the compressor and the device.

3

Connect the blank flanges to the connections of the 2 helium lines.

9.2 Sending in the device
WARNING
Danger due to harmful substances
Contaminated devices could endanger the health. The contamination declaration
serves to protect all persons who come into contact with the device.
► Fill in the declaration of contamination completely.

1

Please do not hesitate to contact us and send a completed declaration ofcontamination before sending anything to us.
ð You will then receive a return number from us.

2

Use the original packaging when returning.

3

Before sending the device, attach a copy of the completed contamination
declaration. See below.

92 / 100

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Decommissioning the device | 9

Fig. 64: Declaration of Contamination

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9 | Decommissioning the device

INFICON

9.3 Disposing of the device
The device can either be disposed of by the operator or be sent to the manufacturer.
The device consists of materials that can be recycled. This option should be exercised
to prevent waste and also to protect the environment.
During disposal, observe the environmental and safety regulations of your country.
Label for the returns to the recycling circuit.

Instrument cannot be scrapped with the normal domestic waste.

94 / 100

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INFICON

Accessories and spare parts | 10

10 Accessories and spare parts
10.1 Accessories
The parts listed below can be additionally ordered.
Designation

Catalog number

Test chamber sealed with 2 O-rings, large

551-710

Test chamber sealed with 2 O-rings, middle

551-711

Test chamber sealed with 2 O-rings, small

551-712

Metal sealed test chamber, small

551-715

Pressure reducing valve for purge gas supply:< 50 mbar rel., 10 l/min, connection to the Pernicka 700H
CHLD: ¼ inch, compression fitting• for connection to gas cylinder with thread according to551-701

CGA 580, alternatively• for connection to gas cylinder with thread according to551-702

DIN 477, No. 6, alternatively• for connection to gas cylinder with thread according to551-703

DIN 477, No. 10, alternatively• for connection to gas cylinder with thread according to551-706

chinese cylinder G518-14 RH-EXT-5

551-720-6Helium calibration leak, air leak rate 10 mbar l/s

551-721

Copper seals DN 16 CF, 10 pieces213-451

Helium calibration leak, air leak rate 10 mbar l/s

10.2 Spare parts
The spare parts can be found in the technical documentation "Spare Parts CHLD700H
Accumulation Leak Detector".

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11 | CE Declaration of Conformity

INFICON

11 CE Declaration of Conformity

Fig. 65: CE Declaration of Conformity

96 / 100

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INFICON

Index

Index
A
Accessories

95

B

Compressor

26

Device26

Exhaust filter on the device

23

F

Background suppression

9

Functional description of the measurement process
18

C
Calibrating

58

M

CE Declaration of Conformity

96

MaintenanceConnect external calibration leak59

Connection

Backing pump: Check the oil level

85

CHLD-Sensor: Check the fan function

79

Compressed air

34

CHLD-Sensor: Filter mat

81

Compressor

31

General information78

Device36

Internal calibration leak: Recalibration

84

Exhaust system (optional)

37

Perform calibration

84

Purge gas

35

Test chamber: Change O-rings

78

Requirements

28

Maintenance plan87

USB bar code reader

22

Markings on the device

25

USB flash drive21

Measurement data

USB printer22

D

Delete70

export70

Measuring

Data backup
Measurement data70

Declaration of Contamination

92

Definition of terms

8

Deinstallation

88

Disconnect the compressor

90

Disconnect the device from the power supply 88
Separate the compressed air supply

90

Separate the purge gas supply

89

Determine mass spectrometer70

Disposal

94

E
Editor for Scan parameter
Editor methods

71
42, 46, 50, 51

Electrical data

Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911)

Configuring the measurement process47

Preparing the measurement

60

Setting the measuring window "Measure"

44

Setting the measuring window "Mini"

42

Start measurement manually

61

Start the measurement process with the window"Measure"

63

Start the measurement process with the window"Mini"

62

Mechanical data

26

MethodCreate method

50

Create recipe

53

Define the setpoint for gross leak test

55

Select method

49

Select multi-gas

57

Select recipe

52

97 / 100

Index

Select single-gas

INFICON

57

Mode

Select cathode in the CHLD-Sensor

87

Selection menu

23

Bar

46

Setup

29

Method46

Spare parts

95

MID

46

Storage

14

Recipe46

Switch OFF

Scan

46

Cathode in the CHLD-Sensor

O

Compressor

73

Device73

SEM amplifier
Operating mode
19

Regeneration

19

Standby

19

Cathode in the CHLD-Sensor

Operation

41

Device41

SEM amplifier
69"LeakTable" window

70"Locals" window

68

T"MixedData" window

67

Test chamber"MS-Panel" window

67

Mounting"Print Report" window

66

Open the lid with load/unload"System" window

68

Place grid

"Tools" window

86"TuneUp" window

87

Window "Configuration"

47

Other associated documents

43, 45Compressor"Events" window

Window "Mini"

43, 45

Switch ON

Measuring

Window "Measure"

43, 45

Transport

43, 4538
43, 4440
13

U44, 5842

Unpacking7

Compressor

17

Device15

USB bar code reader

P
Password

60, 64W

for further details

48

to start

42

Physical data

26

Warning and error messages

74

R
Regeneration72

perform before each weekend

72

perform daily

72

Return92

S
Scope of delivery

98 / 10013

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