MMC Activities..............1MEMS-ONE Pj...............5Column.......................6
Overseas Trends............7
Member’s Profiles .........8

MMC Activities

Overview of MMC's Activities in Fiscal 2005
I. Basic Objectives of Activities
The basic objectives of MMC activities are, firstly, to establish basic
micromachine technologies and increase utilization of micromachines
through promoting research and investigation of micromachines(MEMS and other minute machines and systems), collection andprovision of micromachine information, and exchange and cooperation
with worldwide organizations; and secondly, to contribute to the furtherdevelopment of Japan’s industrial economy and to international society.
MMC’s basic objectives in Fiscal 2006 are, as in the previous fiscal
year, to promote the industrialization of micromachines/MEMS and tostrive for the establishment of next generation basic micromachine andNEMS technologies in accordance with trends in cutting-edge
technological fields such as biotechnology, nanotechnology, and IT.
Furthermore, a MEMS Council comprising MEMS-related businesses
will be established in April. The council will aim to provide support for
the further development of MEMS industries and contribute to thestrengthening of the international competitiveness of Japanese industry.

II. Description of Primary Activities
1. National/NEDO Project-related Activities
To enable the establishment of basic micromachinetechnologies, MMC is mobilizing the strengths of industry,
academia, and government bodies to proactively promotenational government/NEDO R&D projects. In Fiscal 2006, theMMC plans to continue to promote the MEMS Open Network
Engineering System of Design Tools Project as well as begin
work on the new High Integration/Combination MEMS
Production Technology Development Project.
(1) MEMS-ONE: MEMS Open Network Engineering Systemof Design Tools Project (NEDO-commissioned project)
The MMC will cooperate with the 7 companies and 13
universities participating in the project as well as the National
Institute of Advanced Industrial Science and Technology (AIST)
to promote the project, now in its final year, developing andcompleting a an open network engineering system of design tools
for MEMS that is easy for researchers in other fields and theuninitiated to use. Efforts will focus on: (i) the collection of
intellectual data of universities, corporate researchers andtechnicians that have a track record in world-class cutting-edge
MEMS research and development and data on material
properties from a diversity of materials businesses in Japan; and(ii) under the guidance of the project leader and sub-leader,
playing a management role in overseeing the promotion andprogress of the project overall to ensure that the ultimate goals
specified for the project are realized.
(2) Studies on MEMS-ONE Propagation Activities(NEDO-commissioned project)
In parallel with the MEMS-ONE project, frameworks for thepromotion of MEMS-ONE diffusion after completion of the MEMS-ONE
project will be constructed during Fiscal 2006 and preparation made sothat operations can begin smoothly after April 2007. To this end, further
study will be conducted regarding such issues as conceptualization ofthe operating system for MEMS-ONE system maintenance, how best to
approach researchers and technicians (the anticipated users of MEMSONE), technological and legal preparation for beginning system
operations, and creation of an economic foundation for operations. The
MMC plans to undertake these tasks in collaboration with software
companies involved in the MEMS-ONE project.
(3) High Integration/Combination MEMS Production
Technology Development Project (Planned project)
NEDO will be calling for participants in this National Projectfor Fiscal 2006. In this project, the MMC plans to prepare a highintegration/combination MEMS knowledge database that collects,organizes, and arranges knowledge information related particularlyInternet Home Page : http://www.mmc.or.jp/

to 3 issues in the development of concentration/combination
MEMS: (i) combination of MEMS and nano functions, (ii)integration of MEMS and semiconductors, and (iii) MEMS andMEMS high integration unification. The MMC also intends toprovide support for the overall management of the project.

2. Activities of the MEMS Council (Policy Proposals,Industry Exchange, Revitalization Activities)
In April a special committee, the MEMS Council, will beestablished for the purpose of providing further support for theMEMS industry. Comprising MEMS-related businesses, the MEMS
Council aims to promote policy proposal, industry activities, andrevitalization activities, thus contributing to the strengthening of
the international competitiveness of the MEMS industry in Japan.
(1) Policy Proposals
Through exchanges of opinion between MEMS Council
members and representatives of the government and MEMSrelated industries at MEMS Council Promotion Committee
meetings, as well as by holding MEMS forums, the MMC willproactively present proposals concerning MEMS policies.
(2) Coordination with Industry and AcademiaInterested business members will gather together for study
groups on particular topics. In order to encourage thedevelopment of bedrock state-of-the-art micro/nanotechnologies, we need a place where information about newtechnologies can be exchanged, and topics for further researchand study identified. The “Micro/Nano Cutting Edge TechnologyExchange”, which will be held once again this year, will provide aforum to meet these needs. The MMC intends to further raise thenumber and quality of these exchange meetings in Fiscal 2006.
(3) Preparation of an Infrastructure for MEMS Development(i) Expansion and Strengthening of a Foundry Network System
Foundries are vital to the industrialization of MEMS. In orderto improve these facilities, we will undertake the establishment ofa system to improve services through a network comprising
members of the Foundry Service Industry Committee, whorepresent businesses either involved in or related to the provisionof foundry services.
(ii) Promoting the Diffusion of MEMS-ONE
The MMC will promote the diffusion of MEMS-ONE (MEMSOpen Network Engineering System of Design Tools) services, dueto begin from Fiscal 2007, and support the efficiency of MEMS
design and development environments.
(iii) Strengthening of Coordination between Public Foundries in
Each Region and Regional Clusters
Cooperation with public research institutions and regionalclusters throughout Japan that proactively support MEMS
development will be strengthened.
(iv) Promotion of Human Resource Training
The MMC will support the training of people involved in
MEMS development through the implementation of MEMS
lectures and internship support (creating a notice board ofcompanies offering internships, etc.)(4) MEMS Business Exchange in Japan and Abroad(i) Establishment of an MEMS Mall
A “MEMS MALL” (tentative name; will be combined with theCouncil website) website introducing the activities of MEMS
Council members as well as new products and technologies will beestablished on the Internet with the aim of providing support for
MEMS businesses.
(ii) Mega Event: The 2006 International Micromachine/Nanotech
Symposium
In order to promote industrial exchange in the MEMS field,
Micro/Nano 2006: the 2006 International Micromachine/Nanotech
Symposium (partly sponsored by the Japan Auto RacingAssociation) will be held in November at the Tokyo International

(3) Promotion of the International Standardization ofTensile Testing Methods for MEMS Thin Film Materials
In addition to continuing to follow up the situation regarding
tensile testing methods, which are currently at the CDV(Committee Draft for Vote) stage, in April the MMC will also
submit a NP (New Proposal) regarding fatigue testing. The MMC
will also aim to submit new standardization proposals throughround robin tests with a view to the international standardizationof life testing and other testing methods.
(4) Standardization of Micromachine Terminology
The micromachine terminology adopted last fiscal year as anIEC standard will be considered for JIS approval.

Forum. In addition to the Micromachine Exhibition andSymposium held every year, this mega event will also include thePresentation of MEMS-ONE Results, MEMS Forum, and otherspecial events.
(iii) Participation in the 12th Micromachine Summit
MMC will participate in the 12 th Micromachine Summit inBeijing, China, taking part in discussions of a wide range of topics,
including worldwide trends in micromachine technology and its
fields of application.
(iv) Creation of an International Network of Affiliates
The MMC will create a network of affiliates for the MEMS
Council comprising micro/nano-related organizations and research
institutions both in Japan and abroad, establishing a system inwhich the Council ca function as a hub for micro/nanoindustrialization. In addition to relevant organizations in Japan,
affiliations will be established with micro/nano-relatedorganizations and research institutions in Europe, the UnitedStates, and Asia and support provided with regard to informationexchange, distribution of newsletters, and events.
(v) International Exchange and Dispatch of Researchers
A group will be dispatched overseas to promote the exchangeof information and opinions with micromachine-related research
institutes in universities and similar institutions. This group will
also participate in international symposiums and academic
meetings held overseas. MMC will further promote exchange byinviting experts in the field from America and Europe and bysending our experts and researchers overseas.

5. Dissemination of Information and Education
about Micromachines
By issuing and distributing quarterly magazines and by holding
exhibitions, we hope to disseminate information on micromachines
extensively in order to educate as many people as possible.
Furthermore, information and documents on micro/nano-machine
use in universities, industries, and public organizations in Japan andoverseas will be collected, combined with survey results and MCCproduced documents, and made freely available in the MMC library.
At the same time, information will be disseminated widely, both
domestically and internationally, through the MCC website.
(1) Improved Dissemination and Exchange of Information
through the MCC Website
Utilizing the MCC website, efforts to exchange anddisseminate information will be made proactively. Website content
aimed at supporting members will be enhanced.
(2) Publication of a Micro/Nano Public Relations Magazine
A public relations magazine will be published periodically anddistributed to those in or connected with the field; it will also bemade available on the Internet through the Center’s home page.
The magazine’s title will change from the April 2006 edition from“Micromachine” to “Micro/Nano”.
(3) Publication of a Monthly Newsletter
Information concerning research and governmental trends
related to micro- and nano-machines is distributed monthly via the“MMC/MIG News” to supporting members, MEMS Council
members, and other interested individual and organizations.
(4) Provision of Information through the MicroNano
Express Newsletter
Through the MicroNano Mailing list, information concerning
micro/nano-machine events or industry-academia-government
collaboration is distributed as required via the “MicroNanoExpress” newsletter to supporting members, MEMS Councilmembers, and other interested individual and organizations.
(5) Maintaining and Upgrading the MMC Library byExpanding the Literature Abstract Database“Micromachine Index,” an information magazine containing
abstracts of technical documents and information on materials, isissued on a regular basis and provided to supporting members andorganizations concerned with micromachines. Collected technicaldocuments and materials are stored and maintained in the MMC
library and made available to the general public.
(6) Micromachine Exhibitions
The 17th Micromachine Exhibition and other events will beheld to present the latest research achievements, as well as thelatest cutting-edge micromachine/MEMS industry-related
products and product materials, as part of the 2006 International
Micromachine/Nanotech Symposium. The venue for this year’s
symposium has changed from the Science Museum, Tokyo, toTokyo International Forum. The symposium is to be held fromNovember 7 (Tue.) to 9 (Thu.), 2006.

3. Survey Research Activities
Planned activities in the field of micromachine/MEMS technology,
which is becoming a key technology for the manufacturing industry,
are aimed towards gaining a clear understanding of the trends inmicromachine technologies and industries and conducting
investigations of and research on new technological issues regarding
the fusion of micro- and nano-technologies.
(1) The MMC will conduct survey research of future devise
technology that can be realized through the technologicalintegration of nano and bio (nano-fusion) and othertechnologies that will have a revolutionary impact on society
in 20 years from now, expanding on the results of the longterm vision round-table conference held in Fiscal 2005 tosurvey research on future devise technology (applicationsubmitted to the Mechanical Social Systems Foundation as acommissioned project) arising from nano-fusion --- thefrontier of MEMS technology. Working groups will be set up
to investigate 3 target fields --- environment/energy (greendevices), health/medicine (white devices), andsafety/security (blue devices) --- and process integration.
(2) Studies on R&D Trends for Micromachine Technologyin Japan and Abroad
These studies aim to identify and analyze the latest trends inthe field of micromachine technology, which is progressing at aremarkable pace, and micromachine R&D in Japan and abroad;and to develop basic technological data to aid in developing
micromachine technologies.
(3) Survey Research on the MEMS Market
Using the MEMS market survey methods established with the“Survey Research on the Analysis of the Current Conditions inMEMS-related Markets and Japan’s Competitiveness” conductedin Fiscal 2003,the MMC will conduct rolling research concerning
MEMS market trends and future predictions, with particularly
detailed analysis of products containing MEMS.
(4) Enhancing the Micro/Nano Database
The MMC website database will be further enhanced to enablesupporting members to search for publicly disclosed documents
and survey reports, research center maps, mini-research reports,
and other information.

Upcoming Event Announcement

The 2006 International Micromachine/Nanotech Symposium

4. Standardization of Micromachines

Venue: Tokyo International Forum (Yurakucho, Tokyo)

In cutting-edge technological fields such as micromachine/MEMS,
standardization is being promoted as international initiatives arebeing taken.
(1) Research on MEMS Standardization Roadmap
With regard to survey research on a roadmap for MEMS
standardization, the MMC will develop a roadmap for MEMS
standardization that enables strategic and ongoing efforts in fields
in which Japan can likely achieve a competitive edge in order tomaintain and strengthen the international competitiveness of ourMEMS industry.
(2) Response to International Standardization Activities Overseas
In response to the rapidly increasing number of MEMS
international standardization proposals by the ROK and othercountries, the MMC will consider Japan’s approach (particularlyconcerning RF-MEMS, splicing, and packaging).

1. The 17th Micromachine Exhibition
November 7 (Tue.) --- 9 (Thu.), 2006

2. MEMS Forum
November 7 (Tue.), 2006

3. The 12th International Micromachine/Nanotech Symposium
November 8 (Wed.), 2006

4. Presentation of MEMS-ONE Results
November 9 (Thu.), 2006
* The International Conference on Miniaturized Systems for Chemistry andLife Science (µTAS2006) will also be held.

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