Energy-Saving Effects of Micromachine Technology
Ultrasound DDS using Microcapsules andVisualization of Oxygen Saturation Levels in
Microcirculations
Research on the Application of Sprout MultiDisciplinary Technologies in MicromachineTechnology in Fiscal 2000

The 7th International Micromachine Symposium
Akita Micromachine Seminer
Members' Profiles : FANUC LTD./Fujikura Ltd.
Introductory Course / Medical Applications for
Micromachines Part3
Micromachine Seminars in Europe
Application Deadline Approaching for the 9th (Fiscal 2001)
Research Grant Themes on Micromachine Technology

EssayEnergy-Saving Effects ofMicromachine Technology
Tokio Kitahara
Professor,
Mechanical Engineering,
The Faculty of Engineering, Shonan Institute of Technology

create safe and rich lifestyles, but these developments
are also increasing the amount of energy consumption.
Micromachine technology produces machines on theorder of three digits smaller than conventional
machines, resulting in an extremely large energy
savings. However, this point has been lessemphasized. Although the power consumed bymechanical systems should be proportional to thesquare or cube of its dimensions, a comparison of apreviously developed microlathe and a working lathe
revealed a proportional power consumption on theorder of 101.5. The amount of energy saved by thisdownsizing was not as large as expected. Apparently
various micromechanical devices developed to datehave exhibited similar results.
The main reason for these results is thought to lie inthe micromachining process. A rough estimation of
power loss in mechanisms of conventional machines isapproximately 10-30%. This value is reached mainly
by achieving a form accuracy of 10-3-10-4 of the element
dimensions. Applying this to micromachines, accuracyof 1 nm to 1 Å is required for element dimensions of
1µm. Currently, however, most micromachine
methods have stalled at a precision of 100 nm, which is10-1-10-2 of the element dimensions. While physicalphenomena, such as adhesion force are prominent in
the microworld, it will be necessary to achieve pinpoint
machining control at the nanometer level to actively
apply or remove the effects of these phenomena. In
other words, nanometer technology is indispensable forfurther advancing micromachine technology. With thistechnology, power loss in micromechanical devices canbe dramatically reduced. I expect the Micromachine
Center to work, from the perspective of energy savings,
on advancing micromachine technology thatincorporates nanotechnology.

Apparently the term "downsizing" originallydenoted the trimming down of a company or otherorganization, although recently it has been used tomean making mechanical systems more compact. The
first portable tape recorder, developed by Tokyo
Tsushin Kogyo (present-day Sony Corporation),weighed eight kilograms and was driven by a spiral
spring. The tape recorder was called "Densuke" by an
NHK reporter who carried it on his shoulder while
conducting interviews throughout the country.
Current cassette recorders weigh about 200 grams,
including the power source, or about 1/40 of theDensuke.
Development of the integrated circuit brought
about downsizing of sound and data transmitting
devices and the current trend of portable equipment.
While Densuke required the user to frequently rotate ahandle for recharging, today's cassette recorders canoperate for nearly ten hours on one AA battery. The
difference is primarily due to reducing the size of themechanism's components from centimeters tomillimeters. Accordingly, the energy-saving effects ofdownsizing were realized.
Since micromachines are characterized by being
small and lightweight, technologies for manufacturing
and operating these micromachines (micromachinetechnologies) have emerged to support expectations
that micromachines will be exploited in numerous
industrial fields. R&D on micromachines to date has
yielded a variety of micromachining methods anddiverse microdevices. These devices are already being
used in areas unseen to us. The Micromachine Center
calculated that the production of micromachines has
already reached one trillion yen per year and predicts
that production will expand rapidly in the future.
The objective of technological development is to2

Worldwide R&D

Ultrasound DDS using Microcapsules and Visualizationof Oxygen Saturation Levels in Microcirculations
Kohji Masuda, Norihiko Tateishi, Eizen Kimura, and Ken Ishihara
Department of Medical Informatics, Ehime University Hospital

1. Ultrasound DDS Using Microcapsules
The surfaces of microcapsules collapse when exposed toultrasound at their resonance frequency. Research on aphysical drug delivery system (DDS)1) is being conductedusing this effect on microcapsules filled with drugs, whereinultrasound is radiated from the surface of the body toadminister drugs selectively to an affected organ. This
technique is advantageous in that capsules can be broken
while simultaneously monitoring the organ and capsule
distribution in ultrasonic tomographic images.
We are using F-04E microcapsules manufactured by
Matsumoto Yushi-Seiyaku. The microcapsules have an
average particle size of 4 microns and can easily bedisintegrated by an acoustic pressure of several 10 kPa.
Microcapsules were fixed in a thin rubber balloon together
with a deaerated medium of high viscosity to serve as ahighly concentrated virtual organ. The organ is about 30 mm
in diameter with a high concentration and about a 1/106
weight ratio. Fig. 1 is a tomographic image showing
observations of the virtual organ by a sector scanning probewith a center frequency of 2.5 MHz that were taken while
exposing the organ to a pulse Doppler beam to break thecapsules.2) The Doppler beam is irradiated in the direction
indicated by the arrow in the diagram. The brightness of thebeam decreases along its trajectory, indicating that capsulesin that region are broken. Fig. 2 shows the echographic
diagnosis robot3)4) to control ultrasound probe on a bodysurface to radiate ultrasound accurately from the surface.

Fig. 2 The echographic diagnosis robot on the bodysurface to observe the organ and radiate ultrasoundimages obtained, the amount of hemoglobins in the red blood
cells and a two-dimensional image of oxygen saturation was
successfully generated.5)
Fig. 3 is a two-dimensional image showing the oxygen
saturation level of microvessels in rabbit mesentery. Fromthese two-dimensional images, we can see that the image on
the right has a lower oxygen level than the one with nearoxygen saturation on the left.6) The Fahraeus effect indicatinga drop in hemoglobins was observed in two-dimensional
images, confirming the effectiveness of the system.
Oxygen saturation
100
（％）

20µm

50

0

Fig. 3 2D images showing oxygen saturation in microvessels of
rabbit mesentery (left: saturated state, right: low oxygen state)

3. References
1) K. Ishihara, et al., Proc. of IEEE Micro Elec. Mech.
Sys.(MEMS), pp.176-181(1991)
2) K. Masuda, et al., Proc. of the 39th Conference for the Japan
Society for Medical and Biological Engineering, p.282 (2000)
3) K. Masuda, et al., Proc. of IEEE Eng. In Med. & Biol.
Soc.(EMBS), in press (2001)
4) K. Masuda, et al., Proc. of IEEE Intel. Robot and Sys.
(IROS), in press (2001)
5) N. Tateishi, et al., Microcirculation, Vol.4, pp.403-412 (1997)
6) N. Tateishi, et al., Proc. of the 20th Joint Conference on
Medical Informatics, pp. 556-557 (2000)

Fig. 1 Using ultrasound beams to break microcapsules ina virtual organ (circular shape)

2. Two-Dimensional Visualization of Oxygen
Saturation in Red Blood Corpuscles
Although it is important to elucidate the oxygen supply
state of the tissue, until now it has been difficult to visualize
actual gas exchange (oxygen movement) in blood vessels of
several microns. We used six interference filters of differing
wavelengths to elucidate the dynamic state oxygen supply.
Based on the multiple regression of the six microscopic

3

MMC Activities

Research on the Application of Sprout MultiDisciplinary Technologies in MicromachineTechnology in Fiscal 2000
Since 1992, the Micromachine Center has taken up a diverse range of technology seeds as themes for joint research by academic, governmental, andindustrial sectors, all with the aim of reinforcing basic technologies by searching for the technology seeds, especially in the scientific and technologicalfields, necessary to build various micro systems. In fiscal 2000, research has been conducted along five themes; these five themes are summarized below.

Study on Wearable Energy Sources
Masayoshi Esashi
Professor,
New Industry Creation Hatchery Center, Tohoku University
turbine generators, and the like are being studied as energy sources.
Since automatic generating and charging systems free the userfrom secondary battery charging and fuel refilling, these systems are
suitable for such applications as portable health care terminals,
which require that a minimum of mental and physical burden beplaced on the user, and animal tracking devices or polar
environment observing equipment, on which maintenance is notpractical. Technologies for automatic generating systems used inwristwatches and noncontact electrical supply systems used inwireless ID tags are employed as base technologies of these
automatic generating and charging systems.
This paper discusses examples of wearable and compact energy
sources, including fuel cells, fuel reformers, automatic mechanicalgenerators, thermoelectric generators, noncontact electrical supply
systems, double-layer capacitors, thin film batteries, and heatengines. The paper also clarifies the current state and future ofwearable energy sources used in place of primary and secondary
batteries and their relationship with micromachine technologies.

Wearable energy sources are compact energy sources that canbe mounted in humans, animals, robots, and the like. Presently,
primary and secondary batteries are widely used as wearable energy
sources. In the present study, we investigated the feasibility of new
wearable energy sources with functions not found in primary andsecondary batteries.
By efficiently supplying electricity from chemical fuels having anenergy density 1-2 digits greater than batteries, wearable energy
sources using chemical fuels are advantageous in that they havepotential for achieving a high energy density and high output
density. Moreover, unlike secondary batteries that must be
recharged, the new wearable energy sources can be continuously
used simply by refilling them with fuel. By combining a reusable
compact generator with an easily recyclable fuel cartridge, this typeof energy source is more environmentally friendly than primary andsecondary batteries that accompany such problems as organic
matter and waste. Hence, these wearable energy sources support a
recycling society. Currently, micro-fuel cells, silicon micro-gas

A Study on Applied Technologies for Microchannels
Takayoshi Inoue
Professor,
Department of Mechanical Sciences and Engineering, Tokyo Institute of Technology
generated in these micro devices. When considering that the thermal
resistance R = DT/q, defined by the maximum temperature difference
DT between the device and ambient environment and the heat flux q
as parameters for evaluating the severity of heat removal, it is apparent
that we must urgently develop a low-heat resistance technique fordissipating heat.
To achieve this, Tuckerman, et al., proposed a method forremoving heat from electronic devices using microchannels, clarifying
the heat transfer characteristics and indicating the effectivenessthereof. This technique can conceivably be applied not only to coolingof electronic devices, but also to high-performance micro heatexchangers and the like. While related research activities are being
actively pursued, the use of this technique is not yet practical for suchapplications. This is because heat transfer characteristics of
microchannels have not been sufficiently sorted out and the concept
and technologies for applying this technique have not been organized
in a form readily understandable by technicians and researchers offields outside of thermal engineering.
From this background, we studied a microchannel cooling

Progress in microfabrication technology has spurred advances inthe density and performance of electronic devices, typified by the CPU,and has increased the power of semiconductor lasers. At the sametime, we have seen developments in R&D on micromachines,
microreactors, and other micro-equipment, as well as in appliedresearch using this equipment. A problem common to all these devices
that has been raised is how to dissipate heat with high heat flux frommicro-domain. The heat dissipation from microprocessors around theyear 2006, for example, is projected to be about 100 W/cm2. That fromhigh-power diode lasers is estimated to reach 100-500 W/cm2, while the
APS, a next-generation X-ray source, is expected to reach 2000 W/cm2.
In order for these devices to operate properly, a large amount of heatgenerated therein must be removed to maintain a low temperature(about 100; or less). It is an extremely severe requirement to remove
high heat flux under a law temperature difference. In fact, technology
used in extreme thermal environments, such as to protect a space
shuttle reentering the Earth's atmosphere or nuclear reactor barriers
wherein it is necessary to dissipate heat of high heat flux under a hightemperature difference, is said to be insufficient to remove heat4

that phase change caused a large pressure loss.
(4) Microchannel cooling characteristics were clarified when using
water or air as the working fluid, and factors coming out whenusing air were noted. Next, we described our views on conducting
an optimal thermal design of the microchannel heat sinks and gave
an optimal design rule.
(5) In order to evaluate quantities of heat transfer characteristics forthe microchannels, it is necessary to perform accurate
measurements of each physical quantity. From this perspective,
we summarized methods of measuring flow rate, velocity,temperature, and pressure and provided example.
(6) Techniques for reducing flow resistance and enhancing heattransfer are important for increasing the microchannel's
performance. We studied techniques that have been proposedthus far and investigated their applicability to microchannels.
(7) Lastly, we provided various examples of microchannel production
and practical use.

technique from the perspective of designing microchannel heat sinks.
This paper, entitled "A Study on Applied Technologies for
Microchannels," reports the following.
(1) Asserting that microchannel cooling technology differs fromconventional cooling technology in that it has a smaller thermal
resistance, we indicated why the use of microchannels can achievea low thermal resistance. We also clarified in which cases it is best
to use microchannel cooling technology, by organizing eachcooling technology's scope of application according totemperature and heat flux.
(2) A theoretical analysis was conducted on the heat transfer in
microchannels and the basic characteristics of heat transfer were
given. We also described the scope of application of experimental
correlations for conventional systems and factors that come out
when using microchannels.
(3) We described the heat transfer and flow characteristics of
microchannels with or without a phase change and pointed out

Elucidating Fluid Phenomena in Microchannels
and Studying Applications of Microchannels in
Micromachine Technology
Teruo Fujii
Associate Professor,
Institute of Industrial Science, University of Tokyo
determines the driving force of the fluid in electroosmotic flow andexamples of measuring flow in microchannels using a particle image
velocimetry (PIV). An experiment using color reaction was performed toevaluate the mixing properties of a micromixer, while much research has
been reported on microfluidic devices, micropumps, microvalves, andmicromixers based on new principles and constructions are emerging.
Reports on microvalves include pneumatic normally-closed valves using
PDMS, a plurality of valves arranged in one channel that can be used as aperistaltic pump, horizontal valve structures formed by a DRIE process. A
new concept of microvalves using hydrogel was proposed. Reports on
micropumps included a diaphragm pump using a piezo bimorph actuator,
pumps using continuous electrowetting (CEW), and a bubble pump. Twokinds of micromixer are proposed ; one is using an electrohydrodynamic(EHD) effect to generate convention, and the other is using a bubble pumpto actively disturb the two-liquid interface.
Some example applications of microfluidic devices in genome/proteome
analysis are already being implemented. In the example of incorporating
capillary electrophoresis on a microchip, ninety-six microchannels arearranged radially to perform high-speed processes. Products emerging withan eye to the market include sixteen microchannels formed on a 4-inch
wafer. Studies are being performed on integrating two-dimensional gel
electrophoresis, an important method in proteome analysis, and a mass
spectrometer on a microchip. Separation by protein electrophoresis has
been implemented on a microchip in an attempt to automate the proteome
analysis by connecting the microchip to a protein analyzer.
The end of this paper talks about the state of research in Europe,
introducing IMTEK at the University of Freiburg and describing the
research system there, as well as discussing the commercialization trends ofmicrosystems in Switzerland. In the future, it is important that we consider
how we can strategically construct systems such as those represented in
Switzerland from the research stage to production and commercialization inorder to further develop micromachine technology that has been fostered inJapan and to make such technology useful in the real world.

In relevant studies conducted thus far, it is clear that applications of
micromachine technology to systems aimed at chemical and biochemical
analyses and synthesis are progressing. There are now many studies being
conducted in this field. At the 4th International µTAS Conference held in
May 2000 at the University of Twente in the Netherlands, 134 papers
selected out of 230 contributed were presented. Nearly 500 people from 22
countries participated at the conference. There has also been a sharp
increase in research presentations on this field at conferences on MEMS,
Transducers, HPCE, and other conferences, indicating a definite increasing
interest in the topic.
In light of the above conditions, the present study again focused on
microscale fluid phenomena and microfluidic systems, the importance of
which is gradually being recognized. This year's study particularly
emphasized fluid behavior in microspaces, the characteristics of its chemical
reaction processes, as well as techniques for its measurement andevaluation. As a continuation of previous studies, we summarized examples
of developing microfluidic devices used as components in microfluidic
systems and their example applications to genome/proteome analysis. This
paper also includes information on European trends in this field.
Since the ratio of surface area to volume increases in microspaces,
forces incurred by the fluid, such as surface tension, are relatively large.
The fluid has a laminar flow due to its small Reynolds number. Chemical
reactions can be performed quickly and efficiently because the interface
between two different contacting fluids is relatively large; the distance ofmolecular diffusion can be shortened; and it is easier to uniformly control
such conditions as temperature.
In measuring and evaluating microscale flows, shear stress is the mostcommon measurement in flow fields on an object's surface. For a long time,shear stress sensors using a thin film heater were proposed. Electroosmotic
flow was used for pumping the fluid in electrophoresis on microfluidic
devices. However, determining the flow profile in this case is an importantmeasurement for evaluating a separating function . There have beenreports on experiments for studying the effects of the zeta-potential that5

Fusing Micromachine and Space
Development Technologies
Ichiro Nakatani
Institute of Space and Astronautical Science
performed on methods of ejecting a liquid by applying heat with amicroheater, microthrusters employing an array of micro-solid propellant ,and methods for obtaining an efficient microforce by accelerating ions in apulse, these technologies still require much development effort before being
used in real space missions.
Additional research is being conducted on applications of micromachinetechnology on a wide range of components for use in space, including relays
and switches, filters, pumps, DC/DC converters, and solar cells.
Micromachine technology is extremely compatible with spacedevelopment where developing smaller equipment is a key issue. It is essential
to promote communication between space engineers on the needs side andmicromachine engineers on the seeds side. Many in the space community
share a sense of crisis in having fallen behind America and, therefore, a strong
sense of urgency to construct compact space equipment. On the other hand,
Japanese ground researchers in micromachines possess some of the world's top
level techniques and hope to expand their applications. Therefore,
communication between the two parties should be extremely beneficial to both.
Equipment used in space requires an extremely high level of reliability tooperate in such severe conditions as vacuums, high temperatures, lowtemperatures, radiation, vibration and shock during launch. Attempting toclear these hurdles is a positive goal for ground micromachine technologies.

Launching satellites into orbit currently requires several million yen per
kilogram. As a result, developing lighter, smaller and less power consuming
and more compact onboard equipment has been one of the most important
issues in space development.
The U.S. is far ahead in R&D on applications of micromachinetechnology in space. While it is common knowledge that conventional
satellites weigh from several hundred kilograms to several tons, designs for
manufacturing a one-kilogram satellite primarily from silicon material havebeen published. Most functions required by a satellite-i.e. sensing, attitudecontrol, data processing, communications, command processing, power
supply, solar cells, thermal control, structure, and the like-can in principle becreated on a silicon substrate using semiconductor lithography.
Accelerometers, gyros, infrared sensors, and microgravity sensors that
apply micromachine technologies being developed on the ground are also
being studied for an extremely large broad of space applications. Many are
already at a stage of practical use in space.
On the other hand, microthrusters used for orbit and attitude control
are considered important as being unique to space. There have been many
published researches on the application of micromachine technology to thedevelopment of valves and nozzles, such as cold gas jet thrusters that ejectcompressed gas from nozzles at a high speed. While much research has been

Investigative Study into the Integration of
Micro-Flying & Micromachine Technologies
Isao Shimoyama
Professor,
Department of Mechano-Informatics,
School of Information Science and Technology, The University of Tokyo
Next, we studied the development of micro-actuators for application tosmall flying devices. Generally speaking, if the scale of the flying object issmall, the actuation suitable for this object will also change accordingly.
During this study, we investigated both the effect of reducing the scale of theactuation as used in jets and other modern aircraft, and also flapping andother types of actuation unique to small flying devices. In terms of achieving
the driving forces required to allow flight, many reports have dealt with
propulsion using propellers and jets. And while research into flapping-wing
type propulsion continues, many problems remain to be overcome before thistechnology may be put to practical use. A method for the supply of energy
will also be required so that flight may be achieved, and technologies such as
solar batteries, microwaves, and polymer batteries are expected to prove
useful in this regard. In the case of jet propulsion, however, the combustionof chemical fuels is an efficient means of propulsion.
Finally, we carried out an investigation into the sensors generally used
in today's airplanes and also into those sensors which can be used in thecontrol of small flying devices. Research has been carried out regarding
visual sensors, accelerometer-type sensors, GPS, laser scanners, altimeters,
and the like; furthermore, these are currently being put to use inautonomous helicopters. This type of element is crucial in the control of theposition and attitude of the device, and valuable research in this field is
expected to increase in the future.

It has been considered from the beginning of the development of
micromachines that small flying devices could be used in the retrieval of
information from disaster areas, nuclear power-generation plants, and otherlocations for which access may be difficult. Furthermore, a number of such
unmanned flying devices are now being put to use in disaster areas and othersimilar locations. As element technologies for this type of small flying device,micromachine technologies including micro actuators and micro sensors are
required.
In this research, we first conducted an investigation into the current
state of unmanned aerial vehicles(UAV) which are now being put to practicaluse. The UAVs covered in this report vary from several tens of centimeters
to approximately one meter in size. In Japan, these small UAVs are usedduring volcanic eruptions to photograph the areas of damage around thevolcano's crater, to measure the thickness of volcanic-ash buildups, and forother similar tasks. Overseas, on the other hand, research and development
is also being carried out for military purposes, and in recent years, thistechnology has been implemented for border security, highway patrol
activities, narcotics control, waterway administration, and fire-prevention
activities among others. Fundamental research is progressing in terms of
aerodynamics for low Reynolds numbers, and recently, as a result of theattention being paid to the wings of insects of an identical size, research isalso being carried out on flapping-wing flight for low Reynolds numbers.

6

The 7th International Micromachine Symposium
The 7th International Micromachine Symposium will beheld on October 31 (Wed) and November 1 (Thu), 2001 at
the Science Hall in the Science Museum, in Kitanomaru
Park, Tokyo.
This is the 7th International Micromachine Symposium
since the 1st International Micromachine Symposium washeld in 1995 with the aim of establishing and disseminating
micromachine technology, as well as providing an
enlightenment to various industries. In particular, this
symposium have features to present the results of the justcompleted Industrial Science and Technology Frontier
Program(ISTF), which aimed to initiate micromachinetechnology in the world.
This symposium was planned by the organizing
committee (chairman: Professor Naomasa Nakajima, The
University of the Air) and the program and guest speakers
were decided by the program committee (chairman:
Professor Hiroyuki Fujita, The University of Tokyo).
Furthermore, in order to reflect international points of viewand to fill up the content of the symposium, an advisoryboard has been established with 9 European and American
representatives who participated in the 7th Micromachine
Summit held in Freiburg, Germany in this May.
In all, 16 guest speakers (4 from abroad, 12 from Japan)
will present lectures on the first day. During the Session 1,
opening remarks will be given by chairman of Micromachine
Center, and guest speeches will be given by the guests form
Ministry of Economy, Trade and Industry (METI) and New
Energy and Industry Technology Development Organization(NEDO). After that a special lecture will be given by
Professor Fumio Kodama of The University of Tokyo,
entitled "The Micromachine based Business Model."Professor Kodama is expected to give invaluable talks on
industrialization of micromachine technologies.
Concerning the industrialization of micromachinetechnologies, five lectures will be presented in the session 2.

Session 3: Overseas Activities
The Activities of The Five Euro Practice Manufacturing Clusters:
Mr. Rober TURNER, NEXUS/KBI Commercial Ltd, U.K.
Radio Frequency Identification:
Prof. Hekki SEPPA, VTT Finland
MEMS Research Environment:
Prof. Yitshak ZOHAR, Hong Kong University of
Science and Technology
For the next session will be "Innovative R & D," we invite
three people to introduce the innovative Micromachinetechnologies that will be expected evolution.
Session 4: Innovative R&D
Light Driven Mass Migration in Nano-Hybrid Polymer
Films :
Prof. Takahiro SEKI, Tokyo Institute of Technology
Development of Visual Prosthesis :Dr. Toru YAGI, Nagoya University
Nanophotonics and Micromachine/MEMS :Prof. Satoshi KAWATA, Osaka University
For the final session of the first day will be"Micromachine in the Last Decade and future Outlook". We
invite four speakers including one foreigner to present
lectures on R & D of Micromachine in the last decade andfuture outlook on Micromachine technologies.
Session 5: Micromachine in the Last Decade andfuture Outlook
MEMS Development in the Last Decade :Associate Prof. Norman C. TIEN, University of California
Practical Use of Micromachine in Industry :Dr. Kunihiko HARA, DENSO Corporation
Micromachine Research in Universities in the Last
Decade :Prof. Hiroyuki FUJITA, Tokyo University

Session 2: The Path to Micromachine Industries in
the 21st Century
R & D Strategies for Micromachine Technology:
Prof. Isao SHIMOYAMA, The University of Tokyo
Manufacturing Outlook (tentative):
Prof. Susumu SUGIYAMA, Ritsumeikan University
Outlook for IT (tentative):
Mr. Hironobu KUWANO, NTT Cyber Solution Laboratories
Medical Application (tentative):
Prof. Mitsuo OKANO, Tokyo Women's Medical College
Integrated Chemistry -State of the Art and Scenario
Toward Industry Innovation:
Prof. Takehiko KITAMORI, The University of Tokyo

On the second day, the results of R & D of Micromachinetechnology under the ISTF program by METI will bepresented. Firstly, Mr. Hata, Director General of Industrial
Technology Development Dept. generalizes the fruits of R &D of Micromachine technologies.
Then, four working group leaders will deliver the resultsof R&D in the second phase and followed by researchers
who represent the company joined this project will announce
the results of details of their R & D.
Followings are the title and speakers.
Session 6: Results of Micromachine Technology
Project in ISTF Program

In the afternoon, we have three sessions.
The first session will be "Overseas Activities". We invite
three foreigners to present lectures on current trends, suchas the example of applications, the activities ofmanufacturing clusters in EU, and the research environmentof Micromachine.

Results of the R & D of Micromachine Technology
Project :Mr.Yukihiro HATA, Director General, Industrial
Technology Development Dept. NEDO

7

Overview of R & D in Micromachine Project :Dr. Kuniki OHWADA, Chairman, R&D Committee,
Micromachine Center
Experimental Wireless Micromachine for Inspection on
Inner Surface of Tubes :Dr. Nobuaki KAWAHARA, Micromachine Center
Experimental Chain-type Micromachines for Inspection
on Outer Surface of Tubes :Mr. Munehisa TAKEDA, Micromachine Center
Experimental Catheter-type Micromachine for Repair in
Narrow Complex Areas :Mr. Ryo OHTA, Micromachine Center
Experimental Microfactory System for Processing andAssembling :Mr. Kazuyoshi FURUTA, Micromachine Center
Research of Artificial Muscles :Mr. Roy KORNBLUH, SRI International
R & D of Microbattery for Micromachine
Applications :Mr. Kanji KUBA, Mitsubishi Materials Corp.
Micro Laser Catheter :Mr. Shigeru OMORI, TERUMO Corp.
R & D on Micro Tactile Sensor Catheter :Mr. Hiroshi TOSAKA,Olympus Optical Co.,Ltd.

A Study for Pattern Generation of Micromachines :Mr. Yasuo OTSUKI, KAWASAKI HEAVY
INDUSTRIES, LTD.
A Study on Hierarchical Group Control :Mr. Taku SASAKI, MITSUBISHI HEAVY
INDUSTRIES, LTD.
A Study on Hierarchical Group Control :Mr. Taku SASAKI, MITSUBISHI HEAVY
INDUSTRIES, LTD.
Miniature Gas Sensor using Micro Borometers and Micro
Variable Infrared Filter :Mr. Hitoshi HARA , Yokogawa Electric Corp.
The 12th Micromachine Exhibition will be held on the
ground floor of the Science Museum from October 31 toNovember 2,2001. We believe that this symposium and themicromachine exhibition will provide you a great opportunity
to understand the cutting edge of micromachine technologies
and we suggest you to attend both events. Participants inthis symposium can enter into the micromachine exhibition
by simply showing your participation card.
The deadline for applications to attend the symposium is
October 27, 2001. However, as for as seats are available,
applicants will be accepted on the day so that as many
people as possible can attend this symposium.

Akita Micromachine Seminar
Yokogawa Electric Corporation's Micromachining
Laboratory, spoke about "1cm3 Carbon Dioxide Sensor with a
Microbolometer and Infrared Filter".
During the interval, Mr. Munehisa Takeda and Tsuneji
Yada conducted a presentation of the "Micro Generator"(MITSUBISHI ELECTRIC CORPORATION), and the "In-pipe
micro inspection machine (DENSO CORPORATION)"(TOSHIBA CORPORATION), two portable exhibits of
micromachine technology that had been brought to theseminar. This provided an excellent opportunity for theseminar participants to become more familiar withmicromachine technologies.
With a total of 45 people present - 20 individuals from 13
companies in Akita Prefecture and another 25 individuals
from universities, research centers, public agencies, andother similar organizations - the seminar was both wellattended and of considerable significance.

The Akita Micromachine Seminar was held on theafternoon of September 14, 2001 at the Akita Prefectural
Industrial Technology Center in Akita City. It was organizedby the Micromachine Center, Akita Machine & Metal
Association, Akita Prefectural Industrial Technology Center,and Akita Production Technology Society.
This seminar was chaired by Mr. Mutsuo Watanabe,
Production Technologies Department Head of the Akita
Prefectural Industrial Technology Center. Following awelcoming speech from Mr. Tsuyoshi Sato, Executive
Director of the Akita Machine & Metal Association, a numberof speeches were presented. Specifically, Mr. Takayuki
Hirano, Executive Director of MMC, made a speech
concerning "The MMC's Activities"; Mr. Yuichi Ishikawa,Principal Research Scientist of the National Institute ofAdvanced Industrial Science and Technology, spoke on "TheFeatures of Micromachine Technology"; and Mr. Tsuneji
Yada, General Manager of the MMC, presented "An Overview
of the Micromachine Project".
In addition, as part of an introduction to the research
results of MMC's supporting members, Mr. Munehisa Takeda,
Group Manager of MITSUBISHI ELECTRIC CORPORATION's
Advanced Technology R&D Center, spoke about "TheExperimental Chain-Type Micromachine for Inspection ofOuter Tube Surfaces"; Mr. Hiroshi Yamada, Research
Scientist of TOSHIBA CORPORATION's Corporate Researchand Development Center, made a speech concerning "HighDensity Three-Dimensional Packaging for a Microvision
System"; and Mr. Hitoshi Hara, Assistant Manager of8Members' Profiles

FANUC LTD.
Achievements of the Micromachine Project
and the FANUC ROBOnano Ui Machine
1. Development of Micromachines
Seiuemon Inaba

FANUC Ltd. engaged in the development of ultra
precision micromachining technologies under theguidance of MITI's Micromachine Project (theIndustrial Science and Technology Frontier Program).
Our ultra precision micromachining technologies haverecently enjoyed increased usage in the manufacturingof molds for optical devices, small electronic
components, and the like. In this paper, we introduce
some achievements of the Micromachine Project.

Executive Adviser, Honorary Chairman(the First Chairman of Micromachine Center)

Recently, this technology has been used in theultraprecision micromachining of a mold for forming
front-light panels used in cellular phone LCDs.
Another technology for machining rows of evenfiner grooves within microgrooves has become
practical. The use of this technology has expanded indental care.
Technical development has accelerated on thepractical use of ultra precision machining for
microstructures other than ordinary simple grooves.
Mirrors, lenses, and the like applying free-form grooveprocessing made possible by a shaper engraving andhaving multiple focal points for one light source showpromise as a new generation pickup method for CDs
and DVDs.

2. Introduction of Ultra Precision Micromachining
TopicsUltra precision micromachining technologies are an
attempt to improve the age-old mechanical processes,
such as cutting and grinding, from a micro to a nanolevel based on our own developed FANUC ROBOnano
Ui machine. A single-crystal diamond tool is used to
cut microstructures, forming a surface roughness at
the nano-level. According to statistics by the Aachen
University of Technology (RWTH Aachen) in Germany,
although 40% of techniques applied in micromachining
use etching methods and 30% cutting and grinding
methods, the cutting and grinding methods are themost precise of existing techniques.
One ultraprecision micromachine technology is themachining of microgrooves, as in diffraction gratings.
Ordinarily, the grooves are arranged at intervals of
microns. In addition to their application in scales andthe like, these grooves are used as light focusing
devices and, in terms of applied technologies, haveattracted much attention as molds for manufacturing
light-guiding panels used in liquid crystal displays.

(a) Microgrooves channels formed (b) Integral tri-focal diffraction grating within the light-guiding panel of aa diameter of 2 mm
liquid crystal panel at a pitchof 25 microns
Fig. 2 Examples of ultra precision micromachining

3. Achievements and Future Challenges
It is my belief that the present R&D confirmed thatthe existing diamond processing method achieves
superior surface roughness to lithography and etchingprocesses. This view is already spreading through themicromachining industry and is thought to be one
major achievement of the Micromachine Project that
concluded in March of this year.
At FANUC LTD., we were able to further develop
ultra precision micromachining technologies throughthe ROBOnano Ui machine. It is my hope that this willcontribute to the field of micro and nano technologies.

Fig. 1 The FANUC ROBOnano Ui friction-free ultra
precision nanomachining tool9

Fujikura Ltd.
1. The Challenge of Micromachine Technology
Fujikura has conducted microjoint research for the
Industrial Science and Technology Frontier Program
completed last fiscal year as part of our advanced
technology R&D on functional devices. We developed
technologies for stacking silicon devices in a threedimensional structure by forming through-holeinterconnections in a silicon wafer. Currently, severalof these elemental technologies have been applied toactual devices and are being incorporated in R&D on
practical applications.

Koichi Inada
Senior Managing Director,
Research and Development Headquarters

oxidation layers are currently used, this technology
cannot be employed when a device has already been
formed on the silicon wafer. For this reason, we areattempting to develop a technology capable of forming
an insulating layer on through-hole walls with a highaspect ratio at a low temperature of 400; or less.
Finally, the through-holes are filled with aconductor for forming an electrical connection. As the
aspect ratio of the through-holes increases, thenumber of feasible technologies becomes limited. In
addition to an electroless plating method, we are
currently investigating a molten metal suctioning
method for drawing melted solder into the throughholes. A method that makes it possible to introduce
conducting metal quickly using simple devices can
reduce processing costs while improving the airtightseal of the through-hole interconnections.

2. Development of Micromachine Technology
Several element technologies are required to form
through-hole interconnections in silicon wafers. In
following the sequence of the formation process, wefirst form through-holes in the silicon wafer. While weare studying general technologies for forming throughholes, such as deep RIE and laser processing, we arealso forming through-holes with a high aspect ratiousing optical excitation electropolishing. This type ofelectropolishing is one method of wet etching and isdistinctive for its low per-hole cost and ability to form
through-holes at a aspect ratio of 100 or higher, which
is not possible with other methods. Fig. 1 shows across-section of through-holes formed in a siliconwafer by the optical excitation electropolishingmethod. Issues remaining in this process are how to
optimize electropolishing conditions, how to improve
the quality of the through-hole walls, and how toincrease the speed of electropolishing.
Subsequently, an insulating layer must be formedon the walls of the through-holes. Although thermal

525µm

Fig. 2 Filling through-holes with tin by molten metalsuctioning

3. Future Challenges
We would like to continue developing technologies
for forming through-hole interconnections in siliconwafers. In addition, we hope to develop techniques for
applying micromachine (MEMS) element technologies
developed thus far to a wide range of semiconductor
packaging and mounting fields.

Fig. 1 Cross-sectional view of the through-holes

10Introductory Course

Medical Applications for Micromachines Part 3
Iwao Fujimasa,
Professor,
National Graduate Institute for Policy Studies
inclusion in this type of medical-operation device, a drive method will benecessary to generate a suitable level of torque for the required operations,and it will also be necessary to provide materials which are not harmful toliving bodies. Furthermore, a requirement for re-evaluation of the design ofthese machines may arise based on information relating to viscosity, blood
coagulation, and the formation of bubbles when working with liquids; basedon information relating to sterilization, antibacterial agents, and other similar
issues; and also based on a wide range of restriction conditions determinedusing said information. It is important to remember that the majority ofsystems now being put to successful use integrate these principles withcombined, high-level medical expertise and knowledge of how to avoid thecorresponding problems, and also with unique, industrial technologies.

The Quest for Minimally-Invasive Technologies and theDevelopment of Micromachine Operating Systems
Today, we would be correct in saying that medical-use micromachines
are currently in existence. Furthermore, efforts towards the implementationof minimally-invasive practices are currently taking shape in all fields of
medicine, and in terms of medical applications for micromachines, these
efforts are opening up a wide range of possible uses. When providing
treatment as part of medical care, there is no alternative but to act in a way
which is invasive to living bodies, and accordingly, it is often considered thatthe necessary invasive actions should be carried in full, whereas nonrequired invasive actions should be limited to a minimum. As a result, thenumber of invasive surgical operations will become fewer.
Around the same time as the Micromachine Project began, minimallyinvasive surgery in which a laparoscope was used to perform remote
operations was also started, thus realizing at last a tangible revolution in
medical operation practices. The keyword in the achievement of thisrevolution was "miniaturization." In Japan, however, medicine in the same
field has failed to reflect this fundamental transformation in operation
practices. One of the reasons for this failure lies in the fact that the majorityof medical appliances and tools were still imported from overseas;consequently, no domestic companies or corporations were capable of taking
on the associated development work. In addition, whether considering theactual operating theatre or the industry in general, this field was hindered bya lack of appreciation and understanding of micromachines and theassociated technologies. Nevertheless, the reason for this insufficiency is a
simple one: in terms of device-usage methods, there was very little grasp of
those mechanical systems which relied on manual dexterity and skill.
Specifically, it was simply considered that such devices merely transformed
operations which had traditionally been carried out by hand in such a waythat they were now performed remotely through a narrow operating channel.
Medical-technology developers in other countries, however, did notshare this opinion. Rather, it was felt that in this field in particular, surgical
technologies should be re-established in the form of mechanical medical
systems. Furthermore, in order that all surgical operations could be redesigned for minimally-invasive systems, there was a desire to determine
which sections of living bodies could be adopted as targets for this approach;to determine in which way physical quantities could be measured; todetermine how monitoring and observation would be carried out; and to
determine the best possible operation methods. In terms of operations
carried out via a small trocar, it would be necessary to configure a system forthe measurement and control of living bodies using micromachines. In 1999,
merely ten years since the first cholecystectomy using a laparoscope, the
FDA approved two practical, remote-robot operation systems-namely, Zeusfrom Computer Motor and Da Vinci from Intuitive Surgical. Furthermore,
simultaneous to the start of a wide range of minimally-intrusive operation
practices in the US, Canada, and Europe, development also began on systemdevelopment for coronary-artery bypass operations-a field of operations forwhich, although there is considerable demand, cases for practicalimplementation are few and considerable difficulties are felt to exist withregard to the implementation of remote-operation practices. Graft bypass
operations on coronary arteries performed without an artificial heart andduring which the patient's heart is still beating constitute anastomosis (orpump-off) procedures. The implementation of small micro hands which canalso be fitted to beating hearts for arterial anastomosis, in combination withmotion scaling of the movements of surgeons' hands, has led to the birth of aremote procedure for this type of operation. In this field, however, there isno classification between orthopedics and internal surgery: rather, thespecific method of treatment of the disease or sickness in question is taken
into consideration, and action is then taken by integrated medical teams
using both robot operation systems and also systems for the planning andimplementation of operations which use combined data from medical MRI, xrays, and CT image devices.
With regard to the technical elements of a micromachine system for

Medical Micromachines and Gene Therapy
Many now wonder how medical micromachines may be used in terms ofgene therapy-the mainstay of post-genome medical technologies. We can allenvisage a medical-care environment in the near future where practicaltreatment will involve the determination of an individual's genes, theidentification of any unique abnormalities in these genes, and theimplementation of genetic methods precisely matched to said individual.
However, it is currently possible only to identify specific disease genes, toload a virus or some other vector with the required genes, and to relay thecorresponding genetic information to the entire body. Even if micro andnano-achining could be used to successfully create a DNA chip, genetic
therapy will remain an unattainable dream without development of thenecessary medical methods; accordingly, the limits of development in thisfield will restrict our ability to create tools for medical therapy.A postgenome era where all genetic information is fully understood and where thecorresponding approach to development is clearly defined may arrive sooner
than we think. And although it will then be necessary to identify the tissue
or cells where the sickness is occurring, and to implement genetic operations
only for that section, no effort is currently being made towards these goals.
The reason: micromachine engineers are not present at this type of medical
operation.
Even in terms of the localized application of drugs, no all-purpose
technology currently exists, and as previously mentioned, it is now widely
appreciated that the consolidation of data using future medical-imaging
devices will allow the remote insertion of tiny injection catheters into organs,tissue, and cells. Accordingly, there is now a pressing need for thedevelopment, not of non-invasive, but of minimally-invasive technologies forthe transmission of DNA or medicines to those specific areas where they areneeded. For this reason, exciting possibilities are now offered bydevelopments such as Georgia Tech's injection device-a device which
employs countless micron-level needles in an area of several tens of microns
square. In the near future, we may see a wide range of practical applications
for minute catheters being conceptualized and refined in the operating
theatre and other locations where medical techniques are implemented;
furthermore, such developments would make today's cardio-surgery
technologies seem similarly backward as those of a mere twenty years ago,
when PTCA and EP catheters used for myocardial infarctions were not yet
available. We need to appreciate the degree to which medical treatment will
be changed by the arrival of methods which will allow specific locations to betargeted and operated upon in a mechanical fashion. We must appreciatealso that these new methods and technologies were originally realized in theoperating theatre and other similar locations.
When we view the current situation as described above, thefundamental technologies for the application of micromachines and nanoengineering to medical treatment can be considered as being already inexistence. In order that a leading position may be achieved in this industry,
it will be crucial for engineers with vision to be present in the operating
theatre and other similar locations where medicine is practiced. Today,
more than ever before, there is a pressing need for engineers to introduce
into these environments all micro and nano-machining technologies which
may be put to practical use.

11

TOPICS
Micromachine Seminars in Europe
Seminars were held in Helsinki and Athens as part of an industry trade
mission dispatched to Europe by the Japan External Trade Organization(JETRO) from June 16 to 24, 2001. The seminars were organized jointly withlocal research institutions and organizations involved in the micromachine
field in Finland and Greece. The objective of the two seminars, which aredescribed below, was to disseminate information about micromachinetechnology in Japan and to provide opportunities at each location forinteraction with specialists in this field.
Lectures by members of the Japanese mission
Speaker

Organization

Takayuki Hirano

Micromachine Centerby representatives of Finnish private sector, including Nokia, and the National
Research Center(VTT). The following day (June 19), visits were made to VTT,
automobile sensor maker VTI, and Tampere University of Technology.

2. Greece-Japan Joint Workshop on Microsystems
This seminar was held at "NCSR-Demokritos",Greek National Center for
Scientific Research, on June 21, 2001. Approximately 50 participants
attended and Greek speakers made six presentations. The following day(June 22), visits were made to IMEL (Institute of Microelectronics) and IMS(Institute of Material Science).

Presentation Title
The Future Prospects of Micromachines

Haruo Ogawa

OLYMPUS OPTICAL CO., LTD.

Tatsuaki Ataka(Only in Finland)

Seiko Instruments Inc.

The Experimental Microfactory System in Japanese
National R&D Projects

Shinichiro Kawakita

DENSO CORPORATION

Development of Autonomous Mobile Microrobots

Munehisa Takeda

MITSUBISHI ELECTRICCORPORATION

Multiple Distributed Micromachine Systems

Masaya Kakimoto

Micromachine Center/
SUMITOMO ELETRIC
INDUSTRIES, LTD.

Applications of Deep X-ray Lithography

Micro-Assembly Systems

1. Japan-Finland Summit Seminar
The Helsinki seminar was held on June 18, 2001 as part of the PRESTO
program sponsored by Finnish National Technology Agency(TEKES). Morethan 110 participants enjoyed this grand event. Five presentations were madeWith Greece-Japan Joint Workshop participants at
NCSR-Demokritos

Application Deadline Approaching for the 9th (Fiscal 2001) Research Grant Themes on Micromachine Technology
The Micromachine Center, through the establishment and diffusion of basic
technology in the micromachine field, aims to contribute to the growth of Japan's
industrial economy and to international society. To this purpose, the center conducts
studies and research in a wide range of fields involving micromachine technology,
gathers and provides data, and in conjunction with micromachine-related organizations
both within Japan and overseas, is involved in research exchange and collaboration, thediffusion of micromachine technology, and public education activities.
This research grant program has been offered every year since its inception in 1993.
The program's purpose is to assist college and university staff engaged in basic research on
micromachines, as well as to promote further development of micromachine technology
and communication between academics and people in the industrial world. The program isbeing offered again this year and applications from researchers in micromachine-related
fields are welcome. Prospective applicants should refer to the details below.

1. Objective of the research grant
Basic research on basic technology, functional element technology, andsystematization technology for micromachines

2. Research period
Theme A: April 2002 - March 31, 2003 (1 year)
Theme B: April 2002 - March 31, 2004 (2 years)

3. Application period, theme decision, and funding grant date
Application period: July 10 October 31, 2001
(Valid if postmarked on or before October 31.)
Theme decision: Middle of March 2002
Funding grant date: End of March 2002

4. How to apply
Send a fax requesting an application form to the Micromachine Center. Be sure toinclude your own fax number or a fax number where we can contact you.
Micromachine Center Fax : +81-3-5294-7137

5. Qualifications
College or university faculties (professors, associate professors, lecturers, or
research associates) who belong to any of the following societies or associations:Intelligent Materials Forum; The Japan Society of Applied Physics; The Society of
Instrument and Control Engineers; The Society of Polymer Science, Japan; Japan
Society of Next Generation Sensor Technology; The Japan Society for Precision
Engineering; The Institute of Electrical Engineers of Japan; Japanese Society for
Medical and Biological Engineering; The Japan Society of Mechanical Engineers;
Japanese Society for Artificial Organs; The Biophysical Society of Japan; Japan Societyof Drug Delivery System; Japanese Society for Biomaterials; The Robotics Society ofJapan;Personal Computer Users Association; Micromachine society; ResearchCommittee on Micromechatronics

6. Other(1)Total funding granted: Approximately 10 million yen(The upper limit for a single research project is ¥2 million for theme A, and ¥3
million for theme B.)(2)After the grant is decided, we may ask recipients to carry out their research incollaboration with supporting member enterprises of the Micromachine Center, as
one of the objectives of this project is to encourage communication between
enterprises and academics.
(3)Contact: Research Department, Micromachine Center
Niikura Bldg. 5 F, 2-2 Kanda Tsukasa-cho, Chiyoda-ku, Tokyo. 101-0048
Tel : +81-3-5294-7131
Fax: +81-3-5294-7137
Contact Personnel: Mr. Hodono
E-mail: hodono@mmc.or.jp

Pictures on the cover : The Computer Revolution Enters the Hamster Lifestyle, Plant Expert, Straight to the Pore! Direct
Injection hair-Growth Stimulant, Dioxin Eliminator

MICROMACHINE No. 37
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international
exchange of information related to micromachines, R&D and other technical topics, and is circulated free ofchange. Please send your comments about MICROMACHINE to the publisher :Takayuki Hirano, Executive Director, Micromachine Center (MMC)
5-F, Niikura Building, 2-2, Kanda-tsukasacho, Chiyoda-ku, Tokyo 101-0048, Japan
Tel : +81-3-5294-7131, Fax : +81-3-5294-7137
Internet Home Page h t t p : / / w w w . i i j n e t . o r . j p / M M C /Change of Address : Please send old address lebel and new address to the publisher.
Editorial and Production Management : Japan Technical Information Service (JATIS)
Date of Issue : October 19, 2001

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