SKY ® CDG025D-X3
Ambient Capacitance Diaphragm Gauge
The INFICON SKY CDG025D Capacitance Diaphragm
Gauge line of highly accurate temperaturecompensated manometers is designed for stableperformance in harsh manufacturing tool
environments. Advanced digital electronics improvegauge performance and offer easy handling features
such as one push button zero function and setpoint
adjustment. The corrosion resistant ultra pure ceramic
sensor provides excellent zero stability with a long life
expectancy of several million pressure cycles, including
atmospheric bursts. A unique sensor shielding protects
the gauge from process contamination. A robust
mechanical design and digital electronics improve EMC
compatibility, long term stability and temperaturecompensation. The CDG025D sets new standards forfast stability after power on and fast recovery fromatmospheric pressure exposure.

ADVANTAGES• Full scale (FS) ranges from 100 mTorr ... 1000 Torr
• Fast stability after power on and fast recovery from atmospheric pressure• Corrosion resistant ceramic sensor• Excellent long term signal stability• Temperature compensated• Sensor double protected from contamination• One push button zero function• Wide range power supply• Two setpoints• RS232 interface• Clean room compliant
APPLICATIONS• Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD• Data storage and display manufacturing equipment• Industrial vacuum equipment• General high accuracy pressure measurement

1SKY® CDG025D-X3

SKY ® CDG025D-X3
ORDERING INFORMATION

3 CB 1 – 6 5 1 – 2 3 0 00BStandard
P control 1)

Full Scale (FS)
0.1
0.25
0.5125102050
100200500(Torr only) 1000
(mbar only) 11001)

Optimized signal filter setting for pressure control

bold = standard products
Other flange types on request.

23456789ABCDEFGSKY® CDG025D-X3Flange
139CDE

DN 16 ISO-KF
DN 16 CF-R
OD 1/2 in. tube
4 VCR male
4 VCR female
8 VCR female

Unit
56Torr (× 1.33 mbar; × 133 Pa)
mbar (× 100 Pa)

SKY ® CDG025D-X3
SPECIFICATIONS
Full scale (FS)Torr / mbar

1000 / 1100 ...
200Accuracy1)
Temperature effect

2 ... 0.50.2 % of readingon zero

0.005 % FS / °C

on span

0.01 % of reading / °C

Resolution
Pressure, max. (absolute)
Response time2)
Lowest reading
Lowest suggested

400 kPa≤110 °C

Storage
Supply voltage
Power consumption
Output signal (analog)
Degree of protection
Standards–20 ... +65 °C+14 ... +30 V (dc)
≤1 W
0 ... +10 V (dc)
IP 30

Relay contact
Hysteresis
Materials exposed tovacuum
Internal Volume
Weight0.02 % FS / °C
0.03 % of reading / °C

130 kPa
130 / 303) ms+5 ... +50 °C

Bakeout at flange

Number of setpoints

0.5 % of reading

0.01 % FS0.5 % FS

ETL certification
Electrical connection
Setpoint

0.25 % of reading

30 ms

0.05 % FS

CE conformity

0.1

0.01 % ofreading / °C
0.003 % FS
260 kPa

Control pressure
Temperature4)

0.25

0.015 % FS / °C

Reading

Operation (ambient)

3

100 ... 5EN 61000-6-2, EN 61000-6-3, EN 61010, RoHSUL 61010-1, CSA 22.2 No.61010-1
D-Sub, 15-pin, male
2 (SP1, SP2)
30 V (dc) / ≤0.5 A (dc)
1 % FS
ceramics (AI2O3), stainless steel (AISI 316L)≤5.1 cm3
285 … 342 g1)

Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after two hours operation

2)

Increase 10 ... 90% FS3)

For pressure control type only4)

Non-operation

SKY® CDG025D-X3

SKY ® CDG025D-X3
DIMENSIONS

www.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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