Initial Release of MemsONE
Kansai held in Osaka at INTEX Osaka, as well as aseminar to promote the products and technologies ofvarious exhibitors. These events offered large stages
to promote the features of MemsONE.

In November of last year, we began releasing anevaluation version (alpha version) of the MEMS design
and analysis software developed through a three-year
consignment project entitled the MEMS Open Network
Engineering System of Design Tools (MemsONE)
under the New Energy and Industrial Technology
Development Organization (NEDO). As of the end ofNovember, some 250 requests had been received forabout 600 licenses. We have been processing anddistributing these requests in the order received. We
expect to make needed revisions based on userevaluations on the alpha version and release a version
for widespread (beta version), including allcomponents developed in the project by May 2007. It
is hoped that the software will be used by companies
for product development and / or design and by
universities for research and as a teaching tool.

We also gave a presentation on the achievements of
the MEMS Open Network Engineering System of
Design Tools at the 17th Exhibition MICROMACHINE
in November, drawing some 250 interested spectators.
At the same exhibition, we showed a video explaining
the MemsONE project and system in easy tounderstand terms. Approximately 1,000 pamphlets
describing the system were handed out at theexhibition and presentation, showing the large amountof interest in and expectations for MemsONE.

1. Goal of the Project and Features of the System
The goal of the MemsONE project was to develop asystem capable of providing advanced MEMS-related
knowledge and data , not only for leading experts in
MEMS research, but also for newcomers ( engineersand researchers in a wide variety of fields and ofvarious experience levels to the field of MEMS), withthe aim of furthering growth in the MEMS industry.
To develop the MemsONE system, three softwaredevelopment companies took on areas of theirrespective strengths. Five companies with experiencein MEMS devices used their experience andachievements to design specifications and planevaluations. Faculty members at thirteen universities
provided cutting-edge knowledge and wisdom. And
one research institute provided measuring techniques
fostered over many years. The net result was a systemcomprising not only a standardized analysis and design
tool, but also a unique inverse problem program fordesigning masks and processes based on the finalstructure; a program for evaluating joining/packaging,which can be problematic in device development; aknowledge database containing a wealth ofinformation; and a material database containing
materials acquired on process lines.

Photo 1 Activity at the exhibition booth

2. Dissemination Activities
In 2006, we expanded our promotional activities
aimed at popularizing the MemsONE system. For
example, at the 23rd Sensor Symposium on Sensors,
Micromachine and Applied Systems held at SunportTakamatsu in Kagawa in October, we provided atechnology exhibit, and our project subleader(Hidetoshi Kotera, professor at Kyoto University) gavea presentation as a guest lecturer on the features ofthe MemsONE system. These activities enticed many
people to try out the evaluation version. In the samemonth of last year, we provided an exhibit at the 9th
Design Engineering and Manufacturing Solutions Expo

Photo 2 A MemsONE demonstration given by projectsubleader Hidetoshi Kotera

3. Future Plans
As we prepare to distribute the beta version of theMemsONE system in May this year, we will work
toward resolving all remaining development issues inthe system and incorporating the comments of people
who have been using the evaluation version tocomplete a user-friendly system. We would like toencourage all who have tried the alpha version, to fillin and submit the questionnaire.

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