Activities of the MEMS System Development Center
1. Subcommittee Meeting on the Fine MEMS
Project (Post-project Evaluation)

seminar was organized by the National Institute of Advanced

In order to bring the Fine MEMS Project to a close, a NEDO

prime senior researcher) and Peking University (Haixia “Alice”

research evaluation committee established to assess the R&D

Zhang, professor). A total of thirteen speeches were given at theIndustrial Science and Technology (AIST) (Dr. Ryutaro Maeda,

seminar, including seven from Japan and six from China.

stconducted over this three-year project held the 1 “HighlyIntegrated, Complex MEMS Production Technology

Dr. Maeda described a general strategy for facility

Development Project” (Post-project Evaluation) Subcommittee

management in green MEMS, and discussed the importance ofMeeting at the WTC Conference Center on October 5, 2009.

such management and the effects it would have on applications
in MEMS networking. His speech drew questions and discussion

Seven committee members participated in thesubcommittee meeting, which was chaired by Kuniki Owada

on specific reductions for CO2 gases. Prof. Zhang described the(professor at the Department of Information Science, theMEMS-related market and business activities in China andFaculty of Science and Engineering, Teikyo University). At thediscussed the concept and importance of incorporating sensor

subcommittee meeting, the principal investigator Hajime

networks in these activities. She also described plans to

Inuzuka of the Machinery System Technology Development

construct a green clean room at Peking University in order toDepartment (NEDO), which is overseeing the project,demonstrate its efficacy and reported that network sensors may

explained the significance and necessity of the project and thealso be useful from a safety perspective, and not just a green

R&D management implemented. Isao Shimoyama, professor atperspective, as in motion sensors and optical sensors for

the University of Tokyo and project leader, then gave an

monitoring human activity and RF and SIC pressure sensors,

overview of the R&D achievements and prospects forwhich are resistant to chemicals and high temperatures. Hercommercialization.

speech sparked several questions, such as whether particle

These presentations were followed by a private session insensors were also being considered for use as network sensors

which the heads of development for each company involved inin the clean room, and led to a more in-depth discussion thatthe project presented their research achievements in the eightillustrated the high level of interest in sensor networks.

subsidized projects. In the ensuing public session, Susumu

Toshihiro Ito of the AIST talked about a health monitoring

Sugiyama, a professor at Ritsumeikan University and Fine

system for chickens as one application of MEMS chips andMEMS Project subleader, gave a report on the R&D

sensor networks. Some felt that this would draw much interest

achievements for seven commissioned projects (excluding thefrom a marketing standpoint in China, since more than a billion

fine MEMS knowledge database and the integrated design

chickens are raised in this country.

platform projects). At the end of the public session, the MEMS

The China side also gave presentations on the environment

System Development Center of Micromachine Center presented

for MEMS technology. Dr. Li Gang of Suzhou Microsensing

the results of compiling the knowledge database and developing

Company reported on the climate for MEMS venture businesses

the integrated design platform.

in China, noting that the MEMS market is still underdeveloped,

At the subcommittee meeting, there was a lively question

there is no support from MEMS foundries, few engineers haveand answer session among the evaluation committee members

the necessary skills to develop MEMS, and MEMS industries areand other involved parties. The committee members recognized

not growing. There was sentiment on the Japanese side thatthat the achievements produced in this project was some of thethis situation presents an opportunity for foundry services.

most original and cutting-edge in the world, and there wereWang Hong of China Micro-Nano & Sensor Network Global

comments to the effect that the research results overall wereInnovation Perk reported on activities in Wuxi related to MEMS

outstanding.

and sensor networks. The city is trying to attract MEMS
businesses and, toward that end, is proactively developing theThe final evaluation of this project is expected to benecessary sites and infrastructure.

completed by the end of January 2010 after deliberation by theLastly, Prof. Renshi Sawada of Kyushu University informed

NEDO research evaluation committee.

the participants of plans to hold the fourth seminar in Hokkaido
the following August.

2. Report on the Third China & Japan Joint
Seminar on Green MEMS and Sensor Networks

In conclusion, the seminar featured a wide variety ofOn November 24–25, 2009, Japan and China held a jointpresentations on efforts to integrate industry, academia, andseminar at the Millenium Hotel in Wuxi, China on MEMS sensor

government, the core technologies necessary for MEMS

networks, which are currently drawing attention as an area ofresearch, the environment in China for MEMS, and efforts toresearch that must be pursued to meet future needs for low

develop applications for MEMS sensors, and the event proved

environmental impact, safety, security, and comfort. Theto be of great interest to all participants.

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