Databases for Supporting the MemsONE Project
Yoshiharu Suizu, Planning Director, MEMS System Development Center, The Micromachine Center
freely search and reference the data and to add additional
entries at any time.

1. Significance of the MemsONE Databases
The objective of the MEMS Open Network Engineering
System of Design Tools (MemsONE) is to provide software
support for engineers and researchers in a wide variety offields, facilitating access to information in the field of MEMS
with the aim of furthering the promotion and growth of theMEMS industry in Japan. To this end, our goal is to provide asystem that not only supports advanced MEMS R&D, but also
provides newcomers to the field of MEMS and researchers andengineers having less experience in this field with ready accessto material-related information and knowledge possessed byveteran MEMS researchers.
Fig. 1 shows a functional breakdown of the MemsONE
system currently under development to achieve the goals
described above. MemsONE is configured of three functional
sections including a GUI section referred to as framework
software (within the yellow border in Fig. 1), a simulator
section for computer-aided studies on various structuraldesigns and manufacturing processes (within the blue border inFig. 1), and a database section providing support to novice
users (within the red border in Fig. 1).
The database section has both a knowledge database and amaterial and process database and functions in the backgroundto support first-time and novice users. Although possessing
different content and designed for different uses, these two
databases are packaged together.
Next, the database section will be described in detail.
Framework software

Provide knowledge, expertise,and case data

CAD modeler

Mask layout
Process recipesAnalytical settings

Display ofanalytical results

Mechanical simulator

Process simulator

Electromagnetic field
analysis

Anisotropic
wet etching

Piezoelectric analysis

Dry etching

Thermal analysis

Multi-process

Effects of ambientgas flow

Thermal nanoimprinting
analysis

Coupling analysis

Photonic nanoimprinting
analysis

Databaseinterface

External plug-in

Data accumulated on the mechanical properties of materials
and process data provide important parameters that influence
the precision of numerical analyses. Accordingly, we are placing
an emphasis on acquiring precise data under a wide range ofconditions. We are also listing measuring instruments andconditions with newly measured data and collected data as
auxiliary data in order to complement fluctuations inmeasurement values found for thin film materials that are dueto the measuring instruments, conditions, and the like. Thisauxiliary data will be provided as factors for determining usage.

Knowledge database

Inverse process analysis
Bonding / packaging
analysis
Material andprocess database

Analytical function modules

Provide measurements, sample data,
handbook values, and reference values

The other database supporting the MemsONE project is thematerial and process database (see Fig. 2). The material andprocess database systematically accumulates various
experimental data (mechanical properties of thin film materials,
process data, etc.) and all data required for the numericalanalysis of various MEMS structural designs and manufacturing
processes that have been developed by MEMS engineers andresearchers, providing a database to aid first-time users and thelike in MEMS design. Material data including such mechanicalproperties as the breaking strength, Young’s modulus, Poisson’s
ratio, and residual stress of thin film materials and process data
including various data on dry etching and wet etching (etchingrate, etc.) have been either acquired or collected throughcollaborations with universities, research institutes, andfoundries to construct a useful database for foundries.

Plug-in interface

Expanded functions

Create database

3. Goals and Features of the Material and Process Database

CAD data converter

Strain/stress analysis

Material andM
process database

Fig. 2 Structure of the MemsONE database

User-friendly interface

Automatedlattice formation

Knowledge databaseseCreate database

Material and process databasefor enhanced precision

4. Conclusion

Plug-in database

As mentioned earlier, the objective for the knowledge
database and material and process database is to constructuser-friendly databases that can aid new users in the field.
Consequently, data structure, usage specifications, and theexpansion of accumulated data are issues of the databases thatmust be addressed. At present, the issues of data structure andusage specifications have been substantially resolved. To
complete the system, we will next focus on the acquisition andaccumulation of data.

Fig. 1 Breakdown of the MemsONE functions
2. Goals and Features of the Knowledge Database
One of the databases supporting the MemsONE project isthe knowledge database (see Fig. 2). In order to aid newcomers
to the MEMS field in MEMS design, the knowledge databasestores a wealth of data (such as knowledge, expertise, andexamples) possessed by some of the leading researchers atuniversity and company research centers, providing a userfriendly database for first-time and novice users.

After its completion, the MemsONE system is expected tosee extensive use by novices in the field, who can takeadvantage of the system’s core databases. Their participation
should help expand the nation’s base of MEMS engineers andstimulate the promotion and growth of the MEMS industry inJapan.

The data accumulated in the knowledge database is broadly
divided into the four categories of devices, processes, materialproperties, and analyses. These categories are further divided
into two levels of subcategories. The database allows users to5