The 7th International Micromachine Symposium
The 7th International Micromachine Symposium will beheld on October 31 (Wed) and November 1 (Thu), 2001 at
the Science Hall in the Science Museum, in Kitanomaru
Park, Tokyo.
This is the 7th International Micromachine Symposium
since the 1st International Micromachine Symposium washeld in 1995 with the aim of establishing and disseminating
micromachine technology, as well as providing anenlightenment to various industries. In particular, thissymposium have features to present the results of the justcompleted Industrial Science and Technology Frontier
Program(ISTF), which aimed to initiate micromachinetechnology in the world.
This symposium was planned by the organizing
committee (chairman: Professor Naomasa Nakajima, TheUniversity of the Air) and the program and guest speakers
were decided by the program committee (chairman:Professor Hiroyuki Fujita, The University of Tokyo).
Furthermore, in order to reflect international points of viewand to fill up the content of the symposium, an advisoryboard has been established with 9 European and American
representatives who participated in the 7th Micromachine
Summit held in Freiburg, Germany in this May.
In all, 16 guest speakers (4 from abroad, 12 from Japan)
will present lectures on the first day. During the Session 1,opening remarks will be given by chairman of Micromachine
Center, and guest speeches will be given by the guests form
Ministry of Economy, Trade and Industry (METI) and New
Energy and Industry Technology Development Organization(NEDO). After that a special lecture will be given by
Professor Fumio Kodama of The University of Tokyo,
entitled "The Micromachine based Business Model."Professor Kodama is expected to give invaluable talks on
industrialization of micromachine technologies.
Concerning the industrialization of micromachinetechnologies, five lectures will be presented in the session 2.

Session 3: Overseas Activities
The Activities of The Five Euro Practice Manufacturing Clusters:
Mr. Rober TURNER, NEXUS/KBI Commercial Ltd, U.K.
Radio Frequency Identification:
Prof. Hekki SEPPA, VTT Finland
MEMS Research Environment:
Prof. Yitshak ZOHAR, Hong Kong University ofScience and Technology
For the next session will be "Innovative R & D," we invite
three people to introduce the innovative Micromachinetechnologies that will be expected evolution.
Session 4: Innovative R&D
Light Driven Mass Migration in Nano-Hybrid Polymer
Films :
Prof. Takahiro SEKI, Tokyo Institute of Technology
Development of Visual Prosthesis :Dr. Toru YAGI, Nagoya University
Nanophotonics and Micromachine/MEMS :Prof. Satoshi KAWATA, Osaka University
For the final session of the first day will be"Micromachine in the Last Decade and future Outlook". We
invite four speakers including one foreigner to present
lectures on R & D of Micromachine in the last decade andfuture outlook on Micromachine technologies.
Session 5: Micromachine in the Last Decade andfuture Outlook
MEMS Development in the Last Decade :Associate Prof. Norman C. TIEN, University of California
Practical Use of Micromachine in Industry :Dr. Kunihiko HARA, DENSO Corporation
Micromachine Research in Universities in the Last
Decade :Prof. Hiroyuki FUJITA, Tokyo University

Session 2: The Path to Micromachine Industries in
the 21st Century
R & D Strategies for Micromachine Technology:
Prof. Isao SHIMOYAMA, The University of Tokyo
Manufacturing Outlook (tentative):
Prof. Susumu SUGIYAMA, Ritsumeikan University
Outlook for IT (tentative):
Mr. Hironobu KUWANO, NTT Cyber Solution Laboratories
Medical Application (tentative):
Prof. Mitsuo OKANO, Tokyo Women's Medical College
Integrated Chemistry -State of the Art and Scenario
Toward Industry Innovation:
Prof. Takehiko KITAMORI, The University of Tokyo

On the second day, the results of R & D of Micromachinetechnology under the ISTF program by METI will bepresented. Firstly, Mr. Hata, Director General of Industrial
Technology Development Dept. generalizes the fruits of R &D of Micromachine technologies.
Then, four working group leaders will deliver the resultsof R&D in the second phase and followed by researchers
who represent the company joined this project will announce
the results of details of their R & D.
Followings are the title and speakers.
Session 6: Results of Micromachine Technology
Project in ISTF Program

In the afternoon, we have three sessions.
The first session will be "Overseas Activities". We invite
three foreigners to present lectures on current trends, suchas the example of applications, the activities ofmanufacturing clusters in EU, and the research environmentof Micromachine.

Results of the R & D of Micromachine Technology
Project :Mr.Yukihiro HATA, Director General, Industrial
Technology Development Dept. NEDO

7

Overview of R & D in Micromachine Project :Dr. Kuniki OHWADA, Chairman, R&D Committee,
Micromachine Center
Experimental Wireless Micromachine for Inspection onInner Surface of Tubes :Dr. Nobuaki KAWAHARA, Micromachine CenterExperimental Chain-type Micromachines for Inspection
on Outer Surface of Tubes :Mr. Munehisa TAKEDA, Micromachine Center
Experimental Catheter-type Micromachine for Repair inNarrow Complex Areas :Mr. Ryo OHTA, Micromachine Center
Experimental Microfactory System for Processing andAssembling :Mr. Kazuyoshi FURUTA, Micromachine Center
Research of Artificial Muscles :Mr. Roy KORNBLUH, SRI International
R & D of Microbattery for Micromachine
Applications :Mr. Kanji KUBA, Mitsubishi Materials Corp.
Micro Laser Catheter :Mr. Shigeru OMORI, TERUMO Corp.
R & D on Micro Tactile Sensor Catheter :Mr. Hiroshi TOSAKA,Olympus Optical Co.,Ltd.

A Study for Pattern Generation of Micromachines :Mr. Yasuo OTSUKI, KAWASAKI HEAVY
INDUSTRIES, LTD.
A Study on Hierarchical Group Control :Mr. Taku SASAKI, MITSUBISHI HEAVY
INDUSTRIES, LTD.
A Study on Hierarchical Group Control :Mr. Taku SASAKI, MITSUBISHI HEAVY
INDUSTRIES, LTD.
Miniature Gas Sensor using Micro Borometers and Micro
Variable Infrared Filter :Mr. Hitoshi HARA , Yokogawa Electric Corp.
The 12th Micromachine Exhibition will be held on theground floor of the Science Museum from October 31 toNovember 2,2001. We believe that this symposium and themicromachine exhibition will provide you a great opportunity
to understand the cutting edge of micromachine technologies
and we suggest you to attend both events. Participants inthis symposium can enter into the micromachine exhibition
by simply showing your participation card.
The deadline for applications to attend the symposium is
October 27, 2001. However, as for as seats are available,
applicants will be accepted on the day so that as manypeople as possible can attend this symposium.

Akita Micromachine SeminarYokogawa Electric Corporation's Micromachining
Laboratory, spoke about "1cm3 Carbon Dioxide Sensor with a
Microbolometer and Infrared Filter".
During the interval, Mr. Munehisa Takeda and Tsuneji
Yada conducted a presentation of the "Micro Generator"(MITSUBISHI ELECTRIC CORPORATION), and the "In-pipe
micro inspection machine (DENSO CORPORATION)"(TOSHIBA CORPORATION), two portable exhibits of
micromachine technology that had been brought to theseminar. This provided an excellent opportunity for theseminar participants to become more familiar withmicromachine technologies.
With a total of 45 people present - 20 individuals from 13
companies in Akita Prefecture and another 25 individuals
from universities, research centers, public agencies, andother similar organizations - the seminar was both wellattended and of considerable significance.

The Akita Micromachine Seminar was held on theafternoon of September 14, 2001 at the Akita PrefecturalIndustrial Technology Center in Akita City. It was organizedby the Micromachine Center, Akita Machine & Metal
Association, Akita Prefectural Industrial Technology Center,and Akita Production Technology Society.
This seminar was chaired by Mr. Mutsuo Watanabe,
Production Technologies Department Head of the Akita
Prefectural Industrial Technology Center. Following awelcoming speech from Mr. Tsuyoshi Sato, Executive
Director of the Akita Machine & Metal Association, a numberof speeches were presented. Specifically, Mr. Takayuki
Hirano, Executive Director of MMC, made a speech
concerning "The MMC's Activities"; Mr. Yuichi Ishikawa,Principal Research Scientist of the National Institute ofAdvanced Industrial Science and Technology, spoke on "TheFeatures of Micromachine Technology"; and Mr. Tsuneji
Yada, General Manager of the MMC, presented "An Overviewof the Micromachine Project".
In addition, as part of an introduction to the research
results of MMC's supporting members, Mr. Munehisa Takeda,
Group Manager of MITSUBISHI ELECTRIC CORPORATION'sAdvanced Technology R&D Center, spoke about "TheExperimental Chain-Type Micromachine for Inspection ofOuter Tube Surfaces"; Mr. Hiroshi Yamada, Research
Scientist of TOSHIBA CORPORATION's Corporate Researchand Development Center, made a speech concerning "HighDensity Three-Dimensional Packaging for a Microvision
System"; and Mr. Hitoshi Hara, Assistant Manager of8