MMC Activities..............1
MEMS-ONE Pj...............5
Column.......................6
Overseas Trends............7
Member’s Profiles .........8

MMC Activities

Overview of MMC's Activities in Fiscal 2005
I. Basic Objectives of Activities
The basic objectives of MMC activities are, firstly, to establish basic
micromachine technologies and increase utilization of micromachines
through promoting research and investigation of micromachines(MEMS and other minute machines and systems), collection andprovision of micromachine information, and exchange and cooperation
with worldwide organizations; and secondly, to contribute to the further
development of Japan’s industrial economy and to international society.
MMC’s basic objectives in Fiscal 2006 are, as in the previous fiscal
year, to promote the industrialization of micromachines/MEMS and to
strive for the establishment of next generation basic micromachine andNEMS technologies in accordance with trends in cutting-edge
technological fields such as biotechnology, nanotechnology, and IT.
Furthermore, a MEMS Council comprising MEMS-related businesses
will be established in April. The council will aim to provide support for
the further development of MEMS industries and contribute to thestrengthening of the international competitiveness of Japanese industry.

II. Description of Primary Activities
1. National/NEDO Project-related Activities
To enable the establishment of basic micromachinetechnologies, MMC is mobilizing the strengths of industry,
academia, and government bodies to proactively promotenational government/NEDO R&D projects. In Fiscal 2006, theMMC plans to continue to promote the MEMS Open Network
Engineering System of Design Tools Project as well as begin
work on the new High Integration/Combination MEMS
Production Technology Development Project.
(1) MEMS-ONE: MEMS Open Network Engineering System
of Design Tools Project (NEDO-commissioned project)
The MMC will cooperate with the 7 companies and 13
universities participating in the project as well as the National
Institute of Advanced Industrial Science and Technology (AIST)
to promote the project, now in its final year, developing andcompleting a an open network engineering system of design tools
for MEMS that is easy for researchers in other fields and theuninitiated to use. Efforts will focus on: (i) the collection of
intellectual data of universities, corporate researchers andtechnicians that have a track record in world-class cutting-edge
MEMS research and development and data on material
properties from a diversity of materials businesses in Japan; and(ii) under the guidance of the project leader and sub-leader,
playing a management role in overseeing the promotion andprogress of the project overall to ensure that the ultimate goals
specified for the project are realized.
(2) Studies on MEMS-ONE Propagation Activities(NEDO-commissioned project)
In parallel with the MEMS-ONE project, frameworks for thepromotion of MEMS-ONE diffusion after completion of the MEMS-ONE
project will be constructed during Fiscal 2006 and preparation made sothat operations can begin smoothly after April 2007. To this end, further
study will be conducted regarding such issues as conceptualization of
the operating system for MEMS-ONE system maintenance, how best to
approach researchers and technicians (the anticipated users of MEMSONE), technological and legal preparation for beginning system
operations, and creation of an economic foundation for operations. The
MMC plans to undertake these tasks in collaboration with software
companies involved in the MEMS-ONE project.
(3) High Integration/Combination MEMS Production
Technology Development Project (Planned project)
NEDO will be calling for participants in this National Projectfor Fiscal 2006. In this project, the MMC plans to prepare a highintegration/combination MEMS knowledge database that collects,
organizes, and arranges knowledge information related particularlyInternet Home Page : http://www.mmc.or.jp/

to 3 issues in the development of concentration/combination
MEMS: (i) combination of MEMS and nano functions, (ii)integration of MEMS and semiconductors, and (iii) MEMS and
MEMS high integration unification. The MMC also intends toprovide support for the overall management of the project.

2. Activities of the MEMS Council (Policy Proposals,Industry Exchange, Revitalization Activities)
In April a special committee, the MEMS Council, will beestablished for the purpose of providing further support for the
MEMS industry. Comprising MEMS-related businesses, the MEMS
Council aims to promote policy proposal, industry activities, andrevitalization activities, thus contributing to the strengthening of
the international competitiveness of the MEMS industry in Japan.
(1) Policy Proposals
Through exchanges of opinion between MEMS Council
members and representatives of the government and MEMSrelated industries at MEMS Council Promotion Committee
meetings, as well as by holding MEMS forums, the MMC willproactively present proposals concerning MEMS policies.
(2) Coordination with Industry and AcademiaInterested business members will gather together for study
groups on particular topics. In order to encourage thedevelopment of bedrock state-of-the-art micro/nanotechnologies, we need a place where information about newtechnologies can be exchanged, and topics for further researchand study identified. The “Micro/Nano Cutting Edge Technology
Exchange”, which will be held once again this year, will provide aforum to meet these needs. The MMC intends to further raise thenumber and quality of these exchange meetings in Fiscal 2006.
(3) Preparation of an Infrastructure for MEMS Development(i) Expansion and Strengthening of a Foundry Network System
Foundries are vital to the industrialization of MEMS. In orderto improve these facilities, we will undertake the establishment ofa system to improve services through a network comprising
members of the Foundry Service Industry Committee, who
represent businesses either involved in or related to the provisionof foundry services.
(ii) Promoting the Diffusion of MEMS-ONE
The MMC will promote the diffusion of MEMS-ONE (MEMS
Open Network Engineering System of Design Tools) services, due
to begin from Fiscal 2007, and support the efficiency of MEMS
design and development environments.
(iii) Strengthening of Coordination between Public Foundries in
Each Region and Regional Clusters
Cooperation with public research institutions and regional
clusters throughout Japan that proactively support MEMS
development will be strengthened.
(iv) Promotion of Human Resource Training
The MMC will support the training of people involved in
MEMS development through the implementation of MEMS
lectures and internship support (creating a notice board ofcompanies offering internships, etc.)(4) MEMS Business Exchange in Japan and Abroad(i) Establishment of an MEMS Mall
A “MEMS MALL” (tentative name; will be combined with theCouncil website) website introducing the activities of MEMS
Council members as well as new products and technologies will beestablished on the Internet with the aim of providing support for
MEMS businesses.
(ii) Mega Event: The 2006 International Micromachine/Nanotech
Symposium
In order to promote industrial exchange in the MEMS field,
Micro/Nano 2006: the 2006 International Micromachine/Nanotech
Symposium (partly sponsored by the Japan Auto Racing
Association) will be held in November at the Tokyo International

(3) Promotion of the International Standardization ofTensile Testing Methods for MEMS Thin Film Materials
In addition to continuing to follow up the situation regarding
tensile testing methods, which are currently at the CDV(Committee Draft for Vote) stage, in April the MMC will also
submit a NP (New Proposal) regarding fatigue testing. The MMC
will also aim to submit new standardization proposals throughround robin tests with a view to the international standardizationof life testing and other testing methods.
(4) Standardization of Micromachine Terminology
The micromachine terminology adopted last fiscal year as an
IEC standard will be considered for JIS approval.

Forum. In addition to the Micromachine Exhibition andSymposium held every year, this mega event will also include thePresentation of MEMS-ONE Results, MEMS Forum, and otherspecial events.
(iii) Participation in the 12th Micromachine Summit
MMC will participate in the 12 th Micromachine Summit in
Beijing, China, taking part in discussions of a wide range of topics,
including worldwide trends in micromachine technology and its
fields of application.
(iv) Creation of an International Network of Affiliates
The MMC will create a network of affiliates for the MEMS
Council comprising micro/nano-related organizations and research
institutions both in Japan and abroad, establishing a system inwhich the Council ca function as a hub for micro/nanoindustrialization. In addition to relevant organizations in Japan,
affiliations will be established with micro/nano-relatedorganizations and research institutions in Europe, the UnitedStates, and Asia and support provided with regard to informationexchange, distribution of newsletters, and events.
(v) International Exchange and Dispatch of Researchers
A group will be dispatched overseas to promote the exchange
of information and opinions with micromachine-related research
institutes in universities and similar institutions. This group will
also participate in international symposiums and academic
meetings held overseas. MMC will further promote exchange byinviting experts in the field from America and Europe and bysending our experts and researchers overseas.

5. Dissemination of Information and Education
about Micromachines
By issuing and distributing quarterly magazines and by holding
exhibitions, we hope to disseminate information on micromachines
extensively in order to educate as many people as possible.
Furthermore, information and documents on micro/nano-machine
use in universities, industries, and public organizations in Japan andoverseas will be collected, combined with survey results and MCCproduced documents, and made freely available in the MMC library.
At the same time, information will be disseminated widely, both
domestically and internationally, through the MCC website.
(1) Improved Dissemination and Exchange of Information
through the MCC Website
Utilizing the MCC website, efforts to exchange anddisseminate information will be made proactively. Website content
aimed at supporting members will be enhanced.
(2) Publication of a Micro/Nano Public Relations Magazine
A public relations magazine will be published periodically anddistributed to those in or connected with the field; it will also bemade available on the Internet through the Center’s home page.
The magazine’s title will change from the April 2006 edition from“Micromachine” to “Micro/Nano”.
(3) Publication of a Monthly Newsletter
Information concerning research and governmental trends
related to micro- and nano-machines is distributed monthly via the“MMC/MIG News” to supporting members, MEMS Council
members, and other interested individual and organizations.
(4) Provision of Information through the MicroNano
Express Newsletter
Through the MicroNano Mailing list, information concerning
micro/nano-machine events or industry-academia-government
collaboration is distributed as required via the “MicroNano
Express” newsletter to supporting members, MEMS Council
members, and other interested individual and organizations.
(5) Maintaining and Upgrading the MMC Library by
Expanding the Literature Abstract Database“Micromachine Index,” an information magazine containing
abstracts of technical documents and information on materials, isissued on a regular basis and provided to supporting members andorganizations concerned with micromachines. Collected technicaldocuments and materials are stored and maintained in the MMC
library and made available to the general public.
(6) Micromachine Exhibitions
The 17th Micromachine Exhibition and other events will beheld to present the latest research achievements, as well as thelatest cutting-edge micromachine/MEMS industry-related
products and product materials, as part of the 2006 International
Micromachine/Nanotech Symposium. The venue for this year’s
symposium has changed from the Science Museum, Tokyo, toTokyo International Forum. The symposium is to be held from
November 7 (Tue.) to 9 (Thu.), 2006.

3. Survey Research Activities
Planned activities in the field of micromachine/MEMS technology,
which is becoming a key technology for the manufacturing industry,
are aimed towards gaining a clear understanding of the trends inmicromachine technologies and industries and conducting
investigations of and research on new technological issues regarding
the fusion of micro- and nano-technologies.
(1) The MMC will conduct survey research of future devise
technology that can be realized through the technologicalintegration of nano and bio (nano-fusion) and othertechnologies that will have a revolutionary impact on society
in 20 years from now, expanding on the results of the longterm vision round-table conference held in Fiscal 2005 tosurvey research on future devise technology (application
submitted to the Mechanical Social Systems Foundation as acommissioned project) arising from nano-fusion --- thefrontier of MEMS technology. Working groups will be set up
to investigate 3 target fields --- environment/energy (green
devices), health/medicine (white devices), andsafety/security (blue devices) --- and process integration.
(2) Studies on R&D Trends for Micromachine Technology
in Japan and Abroad
These studies aim to identify and analyze the latest trends inthe field of micromachine technology, which is progressing at aremarkable pace, and micromachine R&D in Japan and abroad;and to develop basic technological data to aid in developing
micromachine technologies.
(3) Survey Research on the MEMS Market
Using the MEMS market survey methods established with the“Survey Research on the Analysis of the Current Conditions in
MEMS-related Markets and Japan’s Competitiveness” conductedin Fiscal 2003,the MMC will conduct rolling research concerning
MEMS market trends and future predictions, with particularly
detailed analysis of products containing MEMS.
(4) Enhancing the Micro/Nano Database
The MMC website database will be further enhanced to enablesupporting members to search for publicly disclosed documents
and survey reports, research center maps, mini-research reports,
and other information.

Upcoming Event Announcement

The 2006 International Micromachine/Nanotech Symposium

4. Standardization of Micromachines

Venue: Tokyo International Forum (Yurakucho, Tokyo)

In cutting-edge technological fields such as micromachine/MEMS,
standardization is being promoted as international initiatives arebeing taken.
(1) Research on MEMS Standardization Roadmap
With regard to survey research on a roadmap for MEMS
standardization, the MMC will develop a roadmap for MEMS
standardization that enables strategic and ongoing efforts in fields
in which Japan can likely achieve a competitive edge in order tomaintain and strengthen the international competitiveness of our
MEMS industry.
(2) Response to International Standardization Activities Overseas
In response to the rapidly increasing number of MEMS
international standardization proposals by the ROK and othercountries, the MMC will consider Japan’s approach (particularly
concerning RF-MEMS, splicing, and packaging).

1. The 17th Micromachine Exhibition
November 7 (Tue.) --- 9 (Thu.), 2006

2. MEMS Forum
November 7 (Tue.), 2006

3. The 12th International Micromachine/
Nanotech Symposium
November 8 (Wed.), 2006

4. Presentation of MEMS-ONE Results
November 9 (Thu.), 2006
* The International Conference on Miniaturized Systems for Chemistry andLife Science (µTAS2006) will also be held.

2

Overview of the Keynote Address at the 11th International Micromachine/Nanotech Symposium
Strategies for Further Development of MEMS Industries and Emerging Applications
Hiroyuki Fujita
Professor, Institute of Industrial Science, the University of Tokyo
Despite their small production, these MEMS
products require expensive production equipment.
There is also a shortage of high-level designers thatpossess sufficient knowledge related to the MEMS
manufacturing process. However, by utilizing a MEMS
foundry service, customers who possess no such
expensive manufacturing equipment can manufacture
products using the foundry’s expensive equipment andprocessing technologies. As the network of MEMS
foundries grows, it will be possible to obtain a variety
of services at one location.
A lot of time and expense is required for developing
MEMS products, as many design modifications andmuch trial production is necessary for producing an
optimal product. However, with advances in computeraided design, it will be possible to view the final
structure of a MEMS product virtually so that theamount of trial production can be minimized, thereby
greatly reducing the time and costs for development.
Further, all too often manufacturers do not make fulluse of MEMS properties due to an insufficientknowledge of MEMS. However, we hope to resolve thisissue by providing a knowledge database containing
extensive data accumulated by universities andresearch institutes over a twenty-year period, andequipped with an excellent search engine.
In conclusion, we hope to construct a foundry
network, a computer-aided design environment, andan infrastructure facilitating technical transfer fromuniversities and research institutes throughcollaboration among foundry businesses, equipment
and material suppliers, software vendors, research
institutes at universities, and government agencies. By
doing so, we are confident that we can accelerate theindustrialization of various applied fields requiring
small numbers of diverse products, as well as theindustrialization of mass-produced products.

MEMS R&D began with pressure sensors in the
1970s and by the latter half of the 1990s had spread toapplications in such fields as optics, radio frequency,
biotechnology, and µ-TAS. At its current level ofmaturity, MEMS technology for microspaces enables
us to freely create and operate devices at the researchand development level while gradually producing
tangible products. In the future, we plan to expand
R&D on applications in nanospaces and to build an
infrastructure for the MEMS industry by producing
end products with technologies that have been
perfected. At this symposium, we discussed strategies
for vitalizing the MEMS industry by categorizing
MEMS products in terms of their market scale and theamount of added value MEMS gives to the products.
Fig. 1 shows the results of our efforts to categorize
MEMS products. The inkjet printer head is an example
of a great success because MEMS technology is
indispensable for its production and the inkjet printerhead is a mass-produced product. Therefore, theprinter head was positioned in the upper right of thegraph. Accelerometers occupy the bottom right of thegraph since they can be replaced with mechanicalmeans. Digital micromirror devices (DMD) employed inprojectors are now competing fiercely with liquid
crystal devices and are thus positioned in the center ofthe graph. Optical MEMS switches are also productsthat could not be produced without MEMS technology.
However, since they are produced in low quantities,
the switches have been placed in the upper left of thegraph. Hence, MEMS products can be divided into
three categories: (1) mass-produced MEMS products,(2) products unique to MEMS in which the system
functions as a consequence of MEMS, and (3)indispensable MEMS products that could not berealized without MEMS. Products in Fig. 1 above thesolid line are successful products. In the future, we
anticipate the development of such new MEMS
products as tire sensors and such consumer products
as accelerometers and gyroscopes for category (1);products for medical diagnosis including biochips foranalyzing DNA in category (2); and scanning probe
microscopes and devices for manipulating objects at
the atomic/molecular level in category (3).
The success and failure of MEMS products depends
on the market scale and the degree of MEMS added
value. One strategy we can draw upon for MEMS
products is mass-production in category (1) aimed at
reducing costs, as in the example of semiconductor
chips. However, in addition to mass-produced products,
opportunities for MEMS may lie in key components ofhigh added-value systems in categories (2) and (3).
Therefore, we examined problems and solutions incommercializing product groups for which small
quantities of numerous varieties are inevitably produced.

High

Indispensable MEMS products• Inkjet printer heads
VOA
Successes• Optical switches• Electrophoresis chips• AFM probes
• DMD
• GLV

MEMS added value•

Mass-produced
MEMS products
Products unique
to MEMS

Effect of establishingan infrastructure

Failures

•
•

Low
Low

Accelerometers
Pressure sensors

Market scale
VOA : Variable Optical Attenuator
DMD : Digital Micromirror Device
GLV : Grating Light Valve

Fig. 1 A map of MEMS products

3

High

MEMS Foundry Service Industry Committee
Takuji Keno
Matsushita Electric Works, Ltd.
Former Chairman of the MEMS Foundry Service Industry Committee

1. Overview
Highly anticipated as the next cornerstone ofindustry, Micro-Electro-Mechanical Systems (MEMS)
is the integration of mechanical, optical, and fluid
elements with electronic circuits throughmicrofabrication. Initially, MEMS products weredeveloped by a handful of companies who possessed
the necessary infrastructure. However, commercial
MEMS foundry services began to appear gradually inJapan around the end of the 90s. Based on a survey offoundry networks developed in the West, the MEMS
Foundry Service Industry Committee (FSIC) wasestablished in June of 2002 to construct such a
network in Japan.
The Committee, whose membership has increased
to eleven organizations at present, conducts seminars
and other activities. Below I will outline the activitiesof the FSIC.

Fig. 1 Members of the MEMS FSIC

In view of these issues, the FSIC has performed thefollowing activities to date.
(1) In order to promote the network and expand its
user base, we have launched a Web site(http://fsic.mmc.or.jp) detailing services offered by
the various companies and event information. We
have also given presentations and joint seminars
at the Micromachine Exhibition.
(2) Through joint discussions with industry,
government, and academia on promoting the
MEMS industry, we have clarified the importanceof inexpensive and user-friendly design tools andthe need for a reliable material database in orderto help users initiate new projects.
(3) We have provided a help desk on the FSIC Web
site entitled MEMStation. Beginning services on
July 1, 2005, MEMStation provides a relatively
easy approach to choosing a suitable foundrybusiness.

2. Activities of the MEMS FSIC
Companies now offering MEMS foundry services have
expanded their business to provide such services toexternal customers, using facilities that were employed
for many years to produce in-house products. However,in the interest of expanding the prototyping and massproduction services available to users, it will be necessary
to link company resources organically over a network inorder to utilize resources more effectively and to resolvecommon issues facing foundries.
It is for this purpose that the MEMS foundrycompanies shown in Fig. 1 have formed this committee
around the Micromachine Center and have initiatedactivities to construct such a network. The committee
activities involve the following issues.
1) Promotional activities for expanding MEMS users(workshops, activities for introducing thefoundries, etc.)
2) Identifying problems in network management
3) Identifying common problems facing MEMS
foundries and determining demand for design andanalytical tools
4) Approaches for facilitating MEMS usage forcustomers, process standardization, consulting,etc.
5) Discussing common problems for users andexamining business guidelines

3. Conclusion
MEMS enables the microfabrication of devices andmodules merging precision mechanical, optical, and fluid
parts with electronic circuits, and we are confident that
MEMS will raise Japan’s level of competitiveness in themechatronics industry. We believe that by constructing a
network of MEMS companies, each with their own field ofexpertise, the FSIC can provide optimal solutions to users
wishing to develop and mass-produce MEMS devices.

4

Databases for Supporting the MemsONE Project
Yoshiharu Suizu, Planning Director, MEMS System Development Center, The Micromachine Center
freely search and reference the data and to add additional
entries at any time.

1. Significance of the MemsONE Databases
The objective of the MEMS Open Network Engineering
System of Design Tools (MemsONE) is to provide software
support for engineers and researchers in a wide variety offields, facilitating access to information in the field of MEMS
with the aim of furthering the promotion and growth of the
MEMS industry in Japan. To this end, our goal is to provide asystem that not only supports advanced MEMS R&D, but also
provides newcomers to the field of MEMS and researchers andengineers having less experience in this field with ready accessto material-related information and knowledge possessed byveteran MEMS researchers.
Fig. 1 shows a functional breakdown of the MemsONE
system currently under development to achieve the goals
described above. MemsONE is configured of three functional
sections including a GUI section referred to as framework
software (within the yellow border in Fig. 1), a simulator
section for computer-aided studies on various structuraldesigns and manufacturing processes (within the blue border in
Fig. 1), and a database section providing support to novice
users (within the red border in Fig. 1).
The database section has both a knowledge database and amaterial and process database and functions in the backgroundto support first-time and novice users. Although possessing
different content and designed for different uses, these two
databases are packaged together.
Next, the database section will be described in detail.
Framework software

Provide knowledge, expertise,and case data

CAD modeler

Mask layout
Process recipes

Analytical settings

Display ofanalytical results

Mechanical simulator

Process simulator

Electromagnetic field
analysis

Anisotropic
wet etching

Piezoelectric analysis

Dry etching

Thermal analysis

Multi-process

Effects of ambientgas flow

Thermal nanoimprinting
analysis

Coupling analysis

Photonic nanoimprinting
analysis

Databaseinterface

External plug-in

Data accumulated on the mechanical properties of materials
and process data provide important parameters that influence
the precision of numerical analyses. Accordingly, we are placing
an emphasis on acquiring precise data under a wide range ofconditions. We are also listing measuring instruments andconditions with newly measured data and collected data as
auxiliary data in order to complement fluctuations inmeasurement values found for thin film materials that are dueto the measuring instruments, conditions, and the like. Thisauxiliary data will be provided as factors for determining usage.

Knowledge database

Inverse process analysis
Bonding / packaging
analysis
Material andprocess database

Analytical function modules

Provide measurements, sample data,
handbook values, and reference values

The other database supporting the MemsONE project is thematerial and process database (see Fig. 2). The material andprocess database systematically accumulates various
experimental data (mechanical properties of thin film materials,
process data, etc.) and all data required for the numericalanalysis of various MEMS structural designs and manufacturing
processes that have been developed by MEMS engineers andresearchers, providing a database to aid first-time users and thelike in MEMS design. Material data including such mechanicalproperties as the breaking strength, Young’s modulus, Poisson’s
ratio, and residual stress of thin film materials and process data
including various data on dry etching and wet etching (etchingrate, etc.) have been either acquired or collected throughcollaborations with universities, research institutes, andfoundries to construct a useful database for foundries.

Plug-in interface

Expanded functions

Create database

3. Goals and Features of the Material and Process Database

CAD data converter

Strain/stress analysis

Material andMprocess database

Fig. 2 Structure of the MemsONE database

User-friendly interface

Automatedlattice formation

Knowledge databaseseCreate database

Material and process databasefor enhanced precision

4. Conclusion

Plug-in database

As mentioned earlier, the objective for the knowledge
database and material and process database is to constructuser-friendly databases that can aid new users in the field.
Consequently, data structure, usage specifications, and the
expansion of accumulated data are issues of the databases thatmust be addressed. At present, the issues of data structure andusage specifications have been substantially resolved. To
complete the system, we will next focus on the acquisition andaccumulation of data.

Fig. 1 Breakdown of the MemsONE functions
2. Goals and Features of the Knowledge Database
One of the databases supporting the MemsONE project isthe knowledge database (see Fig. 2). In order to aid newcomers
to the MEMS field in MEMS design, the knowledge databasestores a wealth of data (such as knowledge, expertise, andexamples) possessed by some of the leading researchers atuniversity and company research centers, providing a userfriendly database for first-time and novice users.

After its completion, the MemsONE system is expected tosee extensive use by novices in the field, who can takeadvantage of the system’s core databases. Their participation
should help expand the nation’s base of MEMS engineers andstimulate the promotion and growth of the MEMS industry inJapan.

The data accumulated in the knowledge database is broadly
divided into the four categories of devices, processes, material
properties, and analyses. These categories are further divided
into two levels of subcategories. The database allows users to5Column

MEMS-Enabling Technologies
Norihisa Miki, Assistant Professor,
Department of Mechanical Engineering, Faculty of Science and Technology, Keio University
not a MEMS device in the strict sense of the term. However,patterning of arrayed electrodes, and processes to encapsulate
pigments and electrolytes are made possible through MEMS
manufacturing technologies. Thus the proposed system is an
MEMS-enabling technology. To date, we have succeeded in
detecting the movement of a pupil using a single dye-sensitizeddevice (patent application no. 2006-018591).

I joined the Department of Mechanical Engineering at Keio
University as assistant professor and launched the “MikiLaboratory,” the only laboratory for the field of MEMS in thedepartment, in April 2004. Currently we have nine graduate
students and five senior undergraduate students, and are
becoming a full-fledged laboratory.
When launching the new laboratory, I struggled first andforemost on determining the direction of our research. Before
coming to Keio University, I was a research engineer in the
Department of Aeronautics and Astronautics at theMassachusetts Institute of Technology where we researched abutton-sized micro-engine and a micro-rocket in the MIT
Microengine Project. I was primarily involved in the
manufacturing of and experimentation with devices and, inparticular, studied Deep Reactive Ion Etching (DRIE) andwafer bonding technologies that require rigid manufacturing
precision. I might be able to continue the work here at Keio
University, but a change in location is also a good opportunity
to change the subject of study. Therefore, emulating the
researchers in US, who customarily change their research
themes every 3-- 5 years, I decided to tackle a new topic ofresearch for the new laboratory at Keio.
When considering new topics of research, I remembered aterm used by Dr. Senturia, a former professor at MIT and now
the CTO at Polychromix: “MEMS-enabling technologies.” In his
lectures, Dr. Senturia suggested that we should not sell only
MEMS devices but technologies that are made possible throughthe MEMS devices; that is, entire systems that incorporate the
MEMS devices. (One can derive from this meaning that MEMS
devices alone may not be discriminated against the competitors
given their low cost accounting for only a few percent of theoverall system.)Hence, we searched not for MEMS devices, but for MEMSenabling technologies, i.e., technologies that would benefit
dramatically from MEMS and micromachining technologies. As
one example, we introduce a pupil-tracking and line-of-sight(LOS) detecting technology. The LOS detecting technology has
numerous promising applications in the fields of medical care,information technologies, and safety and security. For example,
the severely disabled who are capable of moving only their eyes
can utilize LOS to communicate with others. LOS can be a novel
input tool replacing the mouse and keyboard. Detecting the
LOS of pedestrians, in particular, children, and drivers helps theeffective display of hazard signs. Most of today’s LOS detecting
systems, however, employ a stationary camera or a helmet witha camera mounted in the front to track the subject’s pupil,
which obstructs the subject’s movement and field of vision and,most importantly, affects the subject psychologically.
In light of these issues, we have been developing
transparent pupil-tracking devices that can be fabricated oneyeglasses, as shown in Fig. 1. We employed dye-sensitizeddevices, which are currently studied as solar cells, astransparent optical sensors to detect differences in reflected
light between the whites of the eyes and the pupils and thus
derive the position of the pupils. Since these devices can beworn as glasses, they do not obstruct the subject’s movement or
field of vision and have a negligible psychological impact,
thereby resolving the issues of today’s LOS detecting devices.
Hence, this technology will contribute to the rapid
implementation of the promising applications of LOS detection
mentioned above. Since the device has no movable parts, it isFig. 1 A mounted transparent pupil tracking device
When studying MEMS-enabling technologies, I believe it isvital that we make full use of the resources at the Faculty of
Science and Technology of Keio University. MEMS-enabling
technologies are, in effect, technologies of other fields that canmake remarkable advances with the help of MEMS. Hence, thekey for establishing a research theme lies in how we candiscover the potential needs in other fields. In this regard, theFaculty of Science and Technology at Keio University has beena blessing. Owing partially to the rather compact Yagami
Campus at the university, we have enjoyed lively intercoursewith diverse researchers in the eleven departments of ourfaculty. Miki Laboratory is currently conducting collaborative
research with six other laboratories in four departments.
As you know, MEMS development is highly dependent on
expensive equipment. Miki Lab currently has equipment
capable of performing basic photolithography, but we do notpossess expensive DRIE or sputtering devices, nor do we havemeasuring instrumentation. Fortunately, however, our Facultyof Science and Technology has the Central Service Facilities for
Research complete with measuring instruments and analyzers(http://www.sfr.st.keio.ac.jp/), and a laboratory equipped with adeposition system. Hence, we have endeavored to share the useof this equipment as much as possible. At the same time, wehave made our facilities at Miki Lab available to otherlaboratories having an interest in MEMS. In the future I would
like to establish an open MEMS laboratory at the Faculty of
Science and Technology.
However, sharing resources in this way leads all too
frequently to some laboratories monopolizing the equipment,
establishing rules of usage that are too strict, and accidents
caused by inexperienced users. We are currently drawing up
management guidelines to eliminate these problems while
studying the systems used at MITs Microsystem Technology
Laboratories and MEMS laboratories in Japan. We are actively
engaged in implementing a research environment to facilitate
MEMS-enabling technologies, i.e., “a research environment
enabling MEMS-enabling technologies” in our Faculty of
Science and Technology.

6

Overseas Trends

Report on the MEMS 2006 International Conference in Istanbul
The 19th International Conference on Micro Electro
Mechanical Systems (MEMS 2006) was held over a
period of five days, January 22---26, 2006. This year,
the venue was in Istanbul, the former capital of threesuccessive empires----Roman, Byzantine, and Ottoman---and a city that is still captivating today.
Despite the unfortunate weather that visited
Istanbul during the conference, the total 646
participants was on a level with previous years. The
conference also received many participants fromJapanese universities and companies. The number of
abstracts submitted this year was a record-setting 789(750 were submitted the previous year), while thepercentage of accepted presentations was typicallylow, at 30%. The 239 selected presentations werecharacterized with much originality and included 3
talks by invited speakers, 42 oral presentations, and
194 poster presentations. Despite the heavy snowfall,
the conference was enveloped in an air of enthusiasm.
Countries that gave the largest number ofpresentations this year were the United States with 80(107 the previous year), Japan with 59 (47 theprevious year), South Korea with 24 (16 the previousyear), Taiwan with 22 (4 the previous year), andGermany with 16 (9 the previous year). By region, 82
presentations were given by North America (108 theprevious year), 47 by Europe (35 the previous year),and 51 by Asian countries other than Japan (28 theprevious year). Hence, nearly half of presentations
were given from Asian countries. Of particular surprise
was the daunting increase in the number of Taiwan
presentations.
Among research institutes that gave the largest
number of presentations, the University of Tokyo(Japan) gave 21 presentations; the University ofMichigan (USA) and the University of Freiburg(Germany) gave 10 each; the National Tsing Hua
University (Taiwan) gave 8; Ritsumeikan University(Japan), Stanford University (USA), Korea Advanced
Institute of Science and Technology (South Korea),
and the University of Illinois (USA) each gave 7; andthe Georgia Institute of Technology (USA) and the
University of California at Los Angeles (USA) eachgave 6. Presentations from other universities in Japan
included 4 each from Kyoto University, Nagoya
University, and Tohoku University; and 3 from the
University of Hyogo.
Broadly dividing the presentations into
fundamentals and applied devices/systems, the former
occupied 42% of all presentations and the latter 58%.
Hence, applied research remains on top. By field,
fluidic, biological, and physical (sensors) applied fields
increased in number, while the fundamental fields
showed increased research on fabrication technologies(non-silicon) and actuators (electrostatic,
piezoelectric, etc.). Japan also showed a dramaticincrease in fluidic and biological research, as well as
optics, and Asia in general showed a striking increasein fluidic and biological research. The United States
had an increase in physical (sensors) and biologicalresearch, although research on fluidics and RF-MEMS,
while still high, decreased from the previous year.
Europe gave many presentations on physical (sensors)and fluidic fields.
Although 92% of all presentations were given byresearch institutes of universities and the like, there
were also many interesting research reports frombusinesses. For example, Philips ResearchLaboratories gave a fascinating presentation on“Electrowetting-Based Displays: Bringing Microfluidics
Alive On-Screen” regarding a technique employing
electric voltage to control the surface tension ofdroplets in displays, while Analog Devices gave amemorable presentation entitled “A MEMS Condenser
Microphone for Consumer Applications” on producing
a low-cost silicon microphone with MEMS technology.
These presentations tied ideas in fundamental
research to commercialization.
During the conference, a gala banquet was held in amagnificent palace facing the Bosphorus that survives
from the closing years of the Ottoman Empire. The
banquet featured festive belly dancing and othertraditional dance in which conference attendees also
participated. The ring of dancers that continued to
grow late into the night will not soon be forgotten.
The MEMS 2006 conference sponsored this year byIEEE has so far been held in Nara, Oiso, Nagoya,
Miyazaki, and Kyoto. It is only fitting that the next
conference, MEMS 2007, which will mark the 20 thconference, should be held in Kobe. The conference
dates are January 21---25, 2007. I encourage you all toattend.

7

Members' Profiles

Seiko Epson Corporation
1. The Challenge of Micromachine Technology
Using some of the most advanced technologies
in the world, Seiko Epson provides products andservices in the fields of information-related
equipment, electronic devices, and precision
products that bring us a rich, high quality of life
based on harmony with the environment. Major
business activities of the corporation involve thedevelopment, production, sales, and service of
information-related equipment, including
computers and peripherals (printers, scanners,etc.) and imaging equipment (LCD projectors,etc.); electronic devices including semiconductor
devices, displays, and quartz devices; precision
products including watches, corrective lens, andfactory automation equipment; and otherproducts.
We have developed our own micromachinetechnologies to produce devices that we haveincorporated in various products. One of ourforemost products is an inkjet print head
employed in inkjet printers.

Director and General Administrative Manager
of Production Engineering & Development Division

Minoru Usui
(1) Inkjet print head
Printers in our Colorio series are equippedwith inkjet heads having micromachined ink
channels. We have also applied our own
micromachine technologies to developing
biotechnology applications for assisting medical
diagnoses (Fig. 1).

2. Development of Micromachine Technology
Here, I will introduce some representative
products and R&D activities we have performedon related technologies to date.

Gyro sensor chip

Gyro sensor package

Fig. 2 Overall view and enlarged photos of a gyro sensor
Head chip

Micro channel plate
Through holes

Fig. 1 Overall view and enlarged photos of a headchip for biotechnology applications(2) Electronic devices
We have incorporated micromachine technology
in electronic devices and have succeeded in
producing high-sensitivity micro-crystal resonators
and ultra-miniature vibration gyro sensors (see Fig.
2). We are also conducting R&D on potential valueadded products incorporating optical elements or
integrated circuits and micromachined devices on asingle chip.
3. Future Challenges
We are working to evolve our originalultrafine machining technology from micro- tonanotechnology in order to create innovative
devices. We hope to maintain our base of satisfied
customers by continuing to provide advanced
products and services that are in harmony withthe environment.
MICROMACHINE No. 55

MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
your comments about MICROMACHINE to the publisher :Keiichi Aoyagi, Executive Director, Micromachine Center (MMC)
MBR99 Bldg., 6F., 67 Kanda Sakumagashi, Chiyoda-ku, Tokyo 101-0026, Japan
Tel : +81-3-5835-1870, Fax : +81-3-5835-1873
Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : May 31, 2006

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