Activities of the Micromachine Center in Fiscal 2002
related to the field of nano-optics, and three specifictechnological areas -(1) basic nano-optics technology, (2)nanostructure building technology, and (3) nano-optics
response technology - were selected for consideration.

I. Investigation and Research on Micromachines
Research activities were aimed at towards gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research on
new technological issues regarding the fusion of micro- andnanotechnologies, as well as making adjustments appropriate
for the multidirectional expansion of micromachine technology.

5. Research on Constructing a System for
Evaluating the Micromachine Market
With the aim of building up an economically consistent
database of micromachine-related market statistics, asubcommittee was convened to consider issues related to thecreation of a market-estimation system; methods were chosenand statistics compiled.

1. Investigative research for the high-efficiency
micro-chemical process technology "Microchip
Device/System Database Construction" project(recomissioned by New Energy and Industrial
Technology Development Organization [NEDO])

6. Investigation and Research on Scale Interface(commissioned activities to help promote themachine industry)

This project involved the systematic collection into acomprehensive database of information concerning hardware
design, measurement technology, and technological issues,
obtained in each process of designing, manufacturing, andevaluating microchip devices.

From the perspective of scale interface, MMC will study thetrends for optical devices in demand for next-generation opticalcommunications and evaluate the sophisticated functionality
possible by fusing micromachine technologies andnanotechnologies. To this end, an investigative committee wasset up to consider scale interface-related technologies and,within the committee, two subcommittees (looking at standards
and dimensional precision, respectively). In addition toconsidering the present situation regarding technology andtechnologies of the future, the committee prepared a report
identifying problems experienced by users, as well as issues andproblems associated with dimensional measurement.

(1) In addition to considering the data
framework and information suitable forinclusion in the database, we designed an
operational format that includes two-way
connections with databases containing
highly relevant documentary information.
(2) Basic specifications for the test database weredesigned, and a software company commissioned
to create the database software.

7. Research related to simulation systems for MEMSdesign and analysis support (commissioned by theMechanical Social Systems Foundation)

2. Studies on the future prospects of micromachinetechnology
As we anticipate the industrialization of the micromachinetechnologies developed thus far, from a technological perspective
we must also strive toward further miniaturization in this newtechnological system of micromachines. With regard toapplications, MMC is pursuing the possibilities for the fusion of
micromachine technologies with technologies in other fields suchas medical care and biotechnology. Against this background ofgrowing demand for a multidimensional approach, MMC
established a "long-term vision subcommittee" and conducted
research related to planning directions for micromachinetechnology development and roadmaps for the main technologies.

MMC set up an investigative committee to examine issues
related to simulation systems for MEMS design and analysis
support, as well as a panel to look at related technologies.
These groups conducted surveys on such topics as existing
software, analytical tools, and basic specifications for userfriendly systems about simulation systems for MEMS design andanalysis support that can be utilized effectively by businesses(particularly foudry service enterprises) and universities - inother words, software systems to efficiently design and analyze
MEMS.

3. Studies on R & D trends for micromachinetechnology in Japan and abroad

8. Research related to technology development
strategies in the MEMS industry (commissionedby NEDO)

MMC set up a think tank to consider trends in R&D both inJapan and abroad; conducted exploratory analysis of the latest
situation regarding the rapid expansion, both domestically andinternationally, of micromachine technology and research
trends; and built up basic technological data that contributes tothe advancement of micromachine technology.

MMC and the Nomura Research Institute were commissionedby the Ministry of Economy, Trade and Industry to jointly
prepare a draft plan for the "MEMS Project" to be launched in2003 as part of the Ministry's "Focus 21" program. In order toobtain comments from the public, MMC established a committee
to consider technology strategies and held a workshop.

4. Investigation and Research into the Applicabilityof Basic and Sprout Micromachine Technologies

II. Collection and Provision of Micromachine Information

This joint study between industry and academia is aimed atencouraging the establishment of theories in micro and nanoscience and engineering and probing for technological seeds
necessary for promoting the merging and application of micro
and nanotechnologies. Research related to the fields of cellmanipulation and nano-optics also continued on from theprevious year.

Information and documents on micromachines inuniversities, industries, and public organizations both in Japanand overseas have been collected and combined with survey
results complied and documents produced by MMC, and madefreely available in the MMC library.

1. Maintenance and Expansion of the MMC
Library (990 publications as at March 31, 2003)(1) Research Related to Cell Manipulation
As in the previous fiscal year, technology themes suitablefor government promotion were considered and proposals forprojects prepared. As part of the decision process, a workshop
entitled "Cell Manipulation Technology for the 21st Century"
was held on February 10, 2003.

2. Publication of a Micromachine Periodical("Micromachine Index")
3. Publication of a Newsletter
4. Database Construction and Data Management
System Operations (indexed full-text retrieval)(2) Research Related to the Field of Nano-Optics
A subcommittee was established to examine research

4The results of R&D on measuring and evaluating theproperties of thin materials, conducted as part of the NEDO
Research and Development for Standards project that ended in
2001, were considered for inclusion in proposals forinternational standards.

III. Exchange and Cooperation with Worldwide
Organizations Involved with Micromachines
1. Participated in the 8th Micromachine Summit(Maastricht, the Netherlands: April 30-May 2, 2002)2. Investigation and research on micromachine
standardization

2. Held the 8th International Micromachine/Nanotech
Symposium (Science Museum in Kitanomaru
Park, Tokyo: November 14, 2002)

The results of this research have been transmitted
worldwide, encouraging international standardization while
exercising initiative in establishing international standards.
With regard to terminology, MMC submitted a specifications
proposal to IEC/TC47 and supported deliberations through suchactions as compiling comments. With regard to measurement
and evaluation, MMC continued selecting and prioritizing items
standardization items. An international standardization
workshop was also held at the 2nd International
Standardization Forum in Tokyo in July.

3. International Exchange and Dispatch of Researchers
Norichika Fukushima, manager of the ResearchDepartment, visited the Netherlands (Twente University) andGermany between January 30 and February 6, 2003, to examin
R&D trends in micro fluids-related fields.

4. Constructing a foundry network system
In order to further the industrialization of micromachines,
particularly MEMS, upgrading of foundry facilities is vital. To
this end, MMC established the Foundry Service Industry
Committee to organize businesses providing foundry services,
to set up a network system to improve services and to consider
ways such a system could be developed. As means ofdisseminating information, the MMC also set up its own Internet
homepage and participated in various lectures and seminars.

V. Dissemination and Education about Micromachines
1. Publication of a Public Relations Quarterly
Magazine "MICROMACHINE"
Vol. 39 to 42 were published in Japanese only.
English versions are available on
website:http://www.mmc.or.jp/

theMMC

2. Micromachine Drawing Rally (Implemented in
2002 as a small-scale means of gathering andutilizing micromachine drawings)

5. Establishing a forum for the exchange ofmicromachine technology
A workshop on micro fluids was held; lecturers were invitedfrom universities to speak on technology trends at international
conferences on micro-fluids-related topics and information andopinions exchanged.

3. The 13 t h Micromachine Exhibition (Science
Museum in Kitanomaru Park, Tokyo: November
13-15, 2002

IV. Standardization of Micromachines
4. Administration of the Federation of MicromachineTechnology

In micromachine technology and other newly establishedfields of systemized techniques as well, there is an urgent needfor the standardization of terminology, measurement, andevaluation methods. The MMC worked towords it, taking
international initiatives into perspective.

Served as secretariat for the Federation of MicromachineTechnology to link and strengthen micromachine-relatedorganizations.

5. Workshop presenting the results of grantrecipient projects for the 8th MicromachineTechnology Research Grants (FY 2000) on
September 17, 2002

1. Creation of an international standard as a methodfor evaluating the properties and measuringmethods of thin film materials

An Introduction of MMC's Activities: Future Vision for Micromachines
It is certain that micromachine technology will play animportant role in a variety of social and economic fields in the 21stcentury and will contribute to improving the quality of our lives.
However, today's severe socioeconomic environment does notallow us to foresee the prospects for micromachines accurately.
With the successful completion of Japan's first national
micromachine project, conducted over a ten-year period, we are now
working on new endeavors aimed at further development of
micromachine technology. One of these endeavors is to create
viable industrial applications based on results obtained through R&D
on advanced technologies.
Among other things,
Microelectromechanical Systems (MEMS) technology is increasingly
used for various applications and furthering its industrialization has
become a major objective of ours. The second endeavor is a topdown approach to the nanotechnology research that originated fromthe U.S. National Nanotechnology Initiative (NNI). Nanotechnology
is not truly useful unless it is complemented by a seamless interface
with human-sized technology, which is the role micromachinetechnology should assume.

There is no precedent for any nation having attempted toaccomplish these objectives. Given the fact that Japan remains
in structural change ten years after the economic boom ended,pursuing these objectives entails great financial risk andconsiderable effort, as well as requiring diverse expertise andknowledge of researchers in industry, government, andacademia. Therefore, a compass is needed by which we canproceed to unexplored disciplines based on the current
developments in micromachine technology.
Last year, the Micromachine Center formed a committee fordeliberating the long-term prospects of micromachinetechnology (Chairman: Prof. Isao Shimoyama, Department of
Mechano-Informatics, Graduate School of Information Scienceand Technology, The University of Tokyo). The committee hascompiled their deliberations and investigations in an interim
report entitled "A Future Vision for Micromachines."

Contents of the report:
1. Introduction: Why is a vision required now?

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