Communication Protocol

EtherCAT®
for Bayard-Alpert Pirani Capacitance Diaphragm Gauge

BCG450-SE

tira87e1(2014-10)

1General Information

CautionCaution: data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface or the diagnostic port may
result in incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and EtherCAT interface, or the diagnostic
port.

Intended Use

This Communication Protocol contains instructions for operating EtherCAT interfaces (slaves) together with a master.
For safety information, specifications and operation instructions of thevacuum gauges refer to the appropriate documents (→  [1], [2], [3]).

EtherCAT–Interface

The following description of the EtherCAT® interface is compliant to the EtherCAT
specification of the EtherCAT Technology Group (ETG) and to the  "EtherCAT®
Semiconductor Device Profile".
This manual describes the functionality of a EtherCAT slave and supports•

ETG.5003.1 S (R) V1.0.0 : Part 1 Common Device Profile (CDP) (→  [12])and•ETG.5003.2080 S (R) V1.0.0 : Part 2080: Specific Device Profile (SDP):
Vacuum Pressure Gauge (→  [13]).

We reserve the right to make technical changes without prior notice.

Product Identification

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space provided
below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V

2

W

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Validity

This document applies to products with part numbers
353-592 (BCG450-SE with EtherCAT, vacuum connection DN 25 ISO-KF)
353-593 (BCG450-SE with EtherCAT, vacuum connection DN 40 CF-R)
This manual is based on firmware version 1.2.0.0.
If your unit does not work as described in this document, please check that it isequipped with the above firmware version (→  12 Index: 0x100A Subindex: 0x00).
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document correspond to the gauge BCG450-SE with vacuum connection DN 25 ISO-KF. They
apply to gauges with other vacuum connections by analogy.
We reserve the right to make technical changes without prior notice.

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EtherCAT®

Beckhoff Automation GmbH, Deutschland

3

Contents

4

General Information
Intended Use
EtherCAT–Interface
Product Identification
Validity
Trademark

2
2
2
2
3
3

Contents

4

1 Technical Data

6

2 Interface Connection

7

3 Operation
3.1 Introduction
3.2 Front View
3.3 Indicators and Switches
3.3.1 <RUN> LED
3.3.2 <ERR> LED
3.3.3 <LA> LED (<IN> Port)
3.3.4 <LA> LED (<OUT> Port)
3.3.5 Device Address Switch

8
8
8
9
9
9
9
9
10

4 Object Structure
4.1 Object Dictionary structure
4.2 Communication Profile Objects (0x1000…0x1FFF)
4.2.1 Process Data Objects (PDO's)
4.3 Manufacturer-specific Profile Objects (0x2000...0x5FFF)
4.3.1 Configuration Capacitance Diaphragm Module 1
4.3.2 Configuration Piezo Module 2
4.3.3 Configuration Heat Transfer Module 3
4.3.4 Configuration Hot Cathode Ion Module 4
4.4 Input Area (0x6000…0x6FFF)
4.4.1 Input Common Capacitance Diaphragm
4.4.2 Input Capacitance Diaphragm
4.4.3 Input Common Piezo
4.4.4 Input Piezo
4.4.5 Input Common Heat Transfer
4.4.6 Input Heat Transfer
4.4.7 Input Common Hot Cathode Ion
4.4.8 Input Hot Cathode Ion
4.4.9 Input Trip Point 1
4.5 Configuration Area (0x8000…0x8FFF)
4.5.1 Configuration Hot Cathode Ion
4.5.2 Configuration Trip Point 1
4.5.3 Configuration Trip Point 2
4.6 Information Area (0x9000…0x9FFF)
4.6.1 Information Capacitance Diaphragm
4.6.2 Information Common Piezo
4.6.3 Information Piezo
4.6.4 Information Common Heat Transfer
4.6.5 Information Heat Transfer
4.6.6 Information Common Hot Cathode Ion
4.6.7 Information Hot Cathode Ion
4.6.8 Information Trip Point 1/2
4.7 Device Area (0xF000...0xAFFF)
4.7.1 Semiconductor Device Profile
4.7.2 Module Profile List
4.7.3 Exceptions
4.7.4 Active Exception Status
4.7.5 Active Device Warning Details
4.7.6 Active Device Error Details
4.7.7 Latched Device Warning Details
4.7.8 Latched Device Error Details
4.7.9 Device Warning Mask
4.7.10 Device Error Mask
4.7.11 Comination Gauge
4.7.12 Trip Point Output All
4.7.13 Input Latch Local Timestamp

11
11
12
12
14
14
14
14
14
15
15
15
15
16
16
17
17
17
18
19
19
19
22
23
24
25
25
25
26
26
27
27
27
27
27
28
28
28
29
30
31
31
32
32
33
33
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4.7.144.7.154.7.164.7.174.7.184.7.194.7.204.7.21

Configure Device
Information Device
Command Full Scale Adjust
Command Degas ON / OFF
Command Emission ON / OFF
Device Reset Command
Exception Reset Command
Store Parameters Command

Appendix
A: Literature

33
35
36
37
37
38
38
39
40
40

For cross-references to other documents, the symbol (→  [XY]) is used.

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5

1 Technical Data

Further technical data →  [1], [2], [3].

EtherCAT interface

Communication protocol
Communication standards

Data rate
Node address
Physical layer
Digital functions

Analog functions
Setpoint relays
Range
Relay contact
Hysteresis
Contact rating
EtherCAT connector

Cable
Cable length
Process data

protocol specialized for EtherCAT
ETG.5003.1: Part 1 Common Device Profile(CDP)
ETG.5003.2080: Part 2080 Specific Device
Profile (SDP): Vacuum Pressure Gauge
100 Mbps
Explicit Device Identification
100BASE-Tx (IEEE 802.3)
read pressure, select units (Torr, mbar, Pa)emission control, degas function
monitor gauge status, filament statussafe state allows definition of behavior in caseof error0 … 10 V analog output pressure indication
two setpoint relays A + B
2
1×10-9 … 100 mbar
n.o. potential free
10 % of reading≤30 V / ≤0.5 A (dc)
2 × RJ45, 8-pin (socket)<IN>:
EtherCAT input<OUT> EtherCAT output
shielded, special Ethernet Patch Cable (CAT5equality or higher)≤100 mFixed PDO mapping and configurable PDO
mapping
SDO requests, responses and information

Mailbox (CoE)Dimensions [mm]

LA

LA

111

IN

OUT

59

RUN ERR

PWR

48

42

67

DN 25 ISO-KF

6

DN 40 CF-R

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2 Interface Connection
Making an EtherCAT interface
cable

For operating the BCG450-SE gauge via EtherCAT, two interface cables
conforming to the EtherCAT standard are required.
If no such cables are available, make two according to the following indications.

Cable type

Ethernet Patch Cable (CAT5e quality) with FCC68 connector.

Procedure Pin assignment:
FCC68, 8-pin,male, soldering side

8

1

Pin

SignalDescription

1
2
3
4
5
6
7
8

TD+
TDRD+
nu
nu
RDnu
nu

Transmission Data +Transmission Data Receive Data +not used
not used
Receive Data not used
not used

Pin assignment of the D-Sub 15-pin sensor connector according to therespective operating manual (→  [1], [2], [3]).

 Plug the EtherCAT (and sensor) cables connector into the gauge: From theprevious device the cable connected to OUT port has to be connected to the
BCG450-SE <IN> port. And the cable from the BCG450-SE <OUT> port
has to be connected to the next device's <IN> port.
FCC68 cable<OUT> port
FCC68 cable<IN> port
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7

3 Operation
3.1 Introduction

Via the EtherCAT interface, the following and further data are exchanged in thestandardized EtherCAT protocol:•

Pressure reading•

Pressure unit (Torr, mbar, Pa)•

Status and error messages•

Status of the switching functions•

Set Trip Point for switching functions

CautionCaution: data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface or the diagnostic port may
result in incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and EtherCAT interface or the diagnostic
port.

3.2 Front View

4

5

6

7 8

9

3

2
1

8

Position

Label

Function1

x1

Address Switch × 1, hexadecimal2x10

Address Switch × 10, hexadecimal

3

RUN

EtherCAT Status LED

4

ERR

Error LED

5IN

EtherCAT IN connector

6

LA

Link activity EtherCAT IN

7

OUT

EtherCAT OUT connector

8

LA

Link activity EtherCAT OUT

9

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3.3 Indicators and Switches

3.3.1 <RUN> LED

Displays the operating status.

RUN

Color

LED Stateoffblinking

Description
INIT (initialization status) or no power applied to device.
PREOP (pre-operational status).

(200 ms on
200 ms off)green

single flash(200 ms on1000 ms off)on

3.3.2 <ERR> LED

SAFEOP (safe-operational status).
Communication of cyclic data transfer running. Input values
available, output values written to the device but not updated on device output.
OP (operational status).

Displays the error content.

ERR

Color

LED State

Descriptionoff

No error or no power applied to device.

blinking

Error occurred (see error parameter).

(200 ms on
200 ms off)

single flash
red(200 ms on1000 ms off)

double flash(200 ms on
200 ms off
200 ms on
1000 ms off)on

3.3.3 <LA> LED (<IN> Port)

Slave device application has changed the EtherCAT state
autonomously, due to local error (see error parameter).
An application watchdog timeout has occurred.
Sync Manager Watchdog timeout or communication
timeout occurred.
A critical communication or application controller error has
occurred. Application controller is not responding any more
(PDI Watchdog Timeout detected by ESC)

Displays the input status.

LA

Color

IN

LED State
off

green

3.3.4 <LA> LED (<OUT> Port)

Description
Port not connected or no power applied to device.

blinking

Port connected and communication active.

onPort not connected but no communication.

Displays the output status.

LA
OUT

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Color

LED State

green

blinking

Port connected and communication active.

onPort not connected but no communication.

off

Description
Port not connected or no power applied to device.

9

3.3.5 Device Address Switchx10
x1
24 6 24 6
080
8
E A E A

During device initialization, the device address switches are read by the device
firmware. This device address is supported to the master as Explicit Device
Identification.
Example: Value of the Explicit Device ID = 0xDD (dec 221):0x10 * 0xD (dec 208) + 0x1 * 0xD (dec 13)
x10
4
2
6

10

2

x1
4

6

0

8 0

8

E

A

A

E

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4 Object StructureThis chapter describes the CANopen over EtherCAT (CoE) Object Dictionary.

4.1 Object Dictionary
structure

The objects in the CoE Object Dictionary can be accessed with SDO services, andmany of the dictionary objects can be mapped for cyclic communication in PDOs.
Each object is addressed using a 16-bit index and an 8-bit subindex.
The following table presents the overall layout of the standard Object Dictionary.
Index (hex.)

Object dictionary area

1000 – 1FFF

Communication profile area

2000 – 5FFF

Manufacturer-specific profile area
Input area

7000 – 7FFF

Output area

8000 – 8FFF
9000 – 9FFF
A000 – AFFF
B000 – BFFF
C000 – EFFF
F000 – FFFF

Profile Specific Area

6000 – 6FFF

Configuration area
Information area
Diagnosis area
Service Transfer area
Reserved area
Device area

Explanations for the abbreviations in the columns of the tables are given below:
Abbr.

Description

Access

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RO: object can only be read by the SDO service•

RW: object can be both read and written by the SDO service

CoE

CAN application protocol over EtherCAT

Index

Object Index (hex.) (address of an object)

NV

Nonvolatile; attribute value is maintained through power cycles

ObjectAbstract representation of a particular component within a device,
which consists of data, parameters, and methods.

PDO

Process Data Object. Structure described by mapping parameters
containing one or several process data entities.

PM

PDO mapping•

Rx: object can be mapped into an Rx PDO•

Tx : object can be mapped into a Tx PDO

RxPDO

Receive PDO. A Process Data Object received by an EtherCAT slave.

SDO

Service Data Objects. CoE asynchronous mailbox communications
where all objects in the Object Dictionary can be read and written.

SI

Subindex (hex.) (sub-address of an object)

Type

Data TypeTxPDO

tira87e1••

BOOL, BIT = 1 bit. Boolean (0 = false, 1 = true)•

USINT, BYTE = 8 bit. Unsigned Byte•

UINT = 16 bit. Unsigned integer value•

UDINT = 32 bit. Unsigned integer value•

ULINT = 64 bit. Unsigned integer value•

REAL = 32 bit. Floating point•

V_STRING = 8×n bit. Visible string (1 byte for character)Transmit PDO. A Process Data Object sent from an EtherCAT slave.

114.2 Communication Profile
Objects(0x1000…0x1FFF)

The objects of the communication profile describe the basic EtherCAT properties of
the BCG450-SE and are common to all EtherCAT slaves using the CoE communication protocol. The objects are described in following table:
Index

SI

DataType

PM NameRO

Device Type

1008

V_STRINGRO

Manufacturer Device name

1009

V_STRINGRO

Manufacturer Hardware
Version

100A

V_STRINGRO

Manufacturer Software
Version

1010

0x01

UDINT

RW

Store Parameters
Read:
Bit 0 = 1: slave saves the
backup entries whenwriting 0x1010:01 with
0x65766173
Bit 1-31 = 0
Write:
With the value
0x65766173 the backup
entries will be stored to
non-volatile memory of the
slave

1011

0x01

UDINT

RW

Restore Default
Parameters
Read:
Bit 0 = 1: slave supports
the restoring of backup
entries with the default
values when writing
0x1011:01 with
0x64616F6C
Bit 1-31 = 0
Write:
With the value
0x64616F6C the backup
entries will be restored withthe default values

RO

Identity Object

RO

Vendor ID

0x01

10F8

12

Access

UDINT

1018

4.2.1 Process Data Objects(PDO's)

NV

1000

UDINT

0x02

UDINT

RO

Product Code

0x03

UDINT

RO

Revision Number

0x04

UDINT

RO

Serial Number

ULINT

RO

Timestamp Object

The BCG450 consists of three vacuum pressure sensors. The characteristic of thiscombo device is that only one vacuum pressure sensor outputs an actual pressure
value at one time. The other sensor is in overrange condition which means that thepressure is higher than the measurement range of the sensor or underrange
condition which means that the pressure is lower than the measurement of thesensor. The 'Combination Gauge Active Value' outputs the pressure value form theactive measuring sensor.
For each sensor module a default mapping is configured. The mapping for eachsensor module has the same contents. For a compact cyclic data frame duplicatedmappings can be deactivated.
Or to meet other requirements the TxPDO's 1A01, 1A03, 1A05 or 1A07 and theRxPDO 1601 are designated for user mapping. These PDO's do not have default
values and can be set up by the PDO configuration.

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RxPDO'sTxPDO’s

Index

SI

DataType

NV

AccessPM Name

1600

PM

RW

RxPDO Receive PDO
Mapping,

1601

PM

RW

RxPDO Receive PDO
Mapping, User Mapping

Index

SI

1A00

DataType
PM

NV

AccessRW

PM NameTxPDO Transmit PDO
Mapping

0x01

BIT

Reading Valid
Combination Gauge

0x02

BIT

Overrange Exceeded
Combination Gauge

0x03

BIT

Underrange Exceeded
Combination Gauge

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

Sensor Value Combination
Gauge

0x06

UINT

Active Sensor Number
Combination Gauge

0x07

UDINT

Trip Point Output All
Instance

1A01

PM

RW

TxPDO Transmit PDO
Mapping Module 1, User
Mapping

1A02

PM

RW

TxPDO Transmit PDO
Mapping Module 2

0x01

BIT

Reading Valid Module 2

0x02

BIT

Overrange Exceeded
Module 2

0x03

BIT

Underrange Exceeded
Module 2

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

Sensor Value Module 2

1A03

PM

RW

TxPDO Transmit PDO
Mapping Module 2, User
Mapping

1A04)

PM

RW

TxPDO Transmit PDO
Mapping Combination
Gauge

1A05

0x01

BIT

Reading Valid
Combination Gauge

0x02

BIT

Overrange Exceeded
Combination Gauge

0x03

BIT

Underrange Exceeded
Combination Gauge

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

Sensor Value Combination
Gauge

0x06

UINT

Active Sensor Number
Combination Gauge

0x07

UDINT

Trip Point Output All
InstancePM

RW

TxPDO Transmit PDO
Mapping Module 3, User
Mapping(continued)

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(conluded)
1A06

PM

RW

TxPDO Transmit PDO
Mapping Module 4

0x01

BIT

Reading Valid Module 4

0x02

BIT

Overrange Exceeded
Combination Gauge

0x03

BIT

Underrange Exceeded
Combination Gauge

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

Sensor Value Combination
Gauge

0x06

UINT

Active Sensor Number
Combination Gauge

0x07

UDINT

Trip Point Output All
Instance

1A07

PM

RW

TxPDO Transmit PDO
Mapping Module 4, User
Mapping

1C00

0x01
0x02
0x03
0x04

BYTE

RW

Sync Manager Type

1C12 /
1C13

0x01
0x02
0x03
0x04

UINT

RW

Sync Manager PDO
Assignment

1C32 /
1C33

0x01
0x20

RW

Sync Manager Parameter

4.3 Manufacturer-specific
Profile Objects(0x2000...0x5FFF)

The manufacturer-specific profile objects contain the manufacturer's model number
and device configuration data, status and diagnostic data. The objects aredescribed in the following tables.

4.3.1 Configuration
Capacitance Diaphragm
Module 1

Index

SI

DataType

4000

0x02

REAL

Subindex 0x02

4.3.2 Configuration Piezo
Module 2
Subindex 0x02

4.3.3 Configuration Heat
Transfer Module 3
Subindex 0x02

4.3.4 Configuration Hot
Cathode Ion Module 4
14

NV

AccessRW

PM Name
Safe Value Module 1

Safe Value: The value to be used for Safe State = Safe Value.

Index

SI

DataType

4010

0x02

REAL

NV

AccessRW

PM Name
Safe Value Module 2

Safe Value: The value to be used for Safe State = Safe Value.

Index

SI

DataType

4020

0x02

REAL

NV

AccessRW

PM Name
Safe Value Module 3

Safe Value: The value to be used for Safe State = Safe Value.

Index

SI

DataType

4030

0x02

REAL

NV

AccessRW

PM Name
Safe Value Module 4

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Subindex 0x02

Safe Value: The value to be used for Safe State = Safe Value.

4.4 Input Area
(0x6000…0x6FFF)
4.4.1 Input Common
Capacitance DiaphragmSubindex 0x0E

Index

SI

DataType

AccessPM Name

6000

0x0E

BOOL

NV

RO

tx

TxPdoState Module 1

0x11

REAL

RO

tx

Sensor Value Module 1

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState Module 1
0
1

Subindex 0x11

4.4.2 Input Capacitance
Diaphragm

Subindex 0x01

Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index
6001

SI

DataType

NV

AccessPM Name

0x01

BOOL

RO

tx

Reading Valid Module 1

0x02

BOOL

RO

tx

Overrange Exceeded
Module 1

0x03

BOOL

RO

tx

Underrange Exceeded
Module 1

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid Module 1

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid Module 1

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid Module 1

4.4.3 Input Common Piezo

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0

No Underrange Exceeded1

Underrange Exceeded

Index

SI

DataType

AccessPM Name

6010

0x0E

BOOL

NV

RO

tx

TxPdoState Module 2

0x11

REAL

RO

tx

Sensor Value Module 2

15

Subindex 0x0E

Is set if the device is not in Safe State (value (I 0x6010, SI 0x11) = valid)
TxPdoState Module 2
0
1

Subindex 0x11

4.4.4 Input Piezo

The corrected, converted, calibrated final analog input value of the sensor.

Index
6012

Subindex 0x01

Invalid
Valid

SI

DataType

NV

AccessPM Name

0x01

BOOL

RO

tx

Reading Valid Module 2

0x02

BOOL

RO

tx

Overrange Exceeded
Module 2

0x03

BOOL

RO

tx

Underrange Exceeded
Module 2

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid Module 2

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid Module 2

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid Module 3

4.4.5 Input Common Heat
Transfer

Subindex 0x0E

0No Underrange Exceeded1

Underrange Exceeded

Index

SI

DataType

AccessPM Name

6020

0x0E

BOOL

NV

RO

tx

TxPdoState Module 3

0x11

REAL

RO

tx

Sensor Value Module 3

Is set if the device is not in Safe State (value (I 0x6020, SI 0x11) = valid)
TxPdoState Module 3
0
1

Subindex 0x11

16Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

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4.4.6 Input Heat Transfer

Subindex 0x01

Index

SI

DataType

6023

0x01

NV

AccessPM Name

BOOL

RO

tx

Reading Valid Module 3

0x02

BOOL

RO

tx

Overrange Exceeded
Module 3

0x03

BOOL

RO

tx

Underrange Exceeded
Module 3

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid Module 4

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid Module 4

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid Module 4

4.4.7 Input Common Hot
Cathode Ion

Subindex 0x0E

0No Underrange Exceeded1

Underrange Exceeded

Index

SI

DataType

6030

0x0E
0x11

NV

AccessPM Name

BOOL

RO

tx

TxPdoState Module 4

REAL

RO

tx

Sensor Value Module 4

Is set if the device is not in Safe State (value (I 0x6020, SI 0x11) = valid)
TxPdoState Module 40
1

Subindex 0x11

4.4.8 Input Hot Cathode Ion

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Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index

SI

DataType

AccessPM Name

6035

0x01

BOOL

NV

RO

tx

Reading Valid Module 4

0x02

BOOL

RO

tx

Overrange Exceeded
Module 4

0x03

BOOL

RO

tx

Underrange Exceeded
Module 4

0x05

BOOL

RO

tx

Emission Status Off/On
Module 4

0x06

BOOL

RO

tx

Degas Status Off/On
Module 417Subindex 0x01

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid Module 4

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid Module 4

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid Module 40

No Underrange Exceeded1

Underrange Exceeded

Subindex 0x05
Emission Status Off/On Module 4
0

OFF

1

ON

Subindex 0x06
Degas Status Off/On Module 44.4.9 Input Trip Point 1

0

OFF

1

ON

Index
600E
600F

Subindex 0x01

NV

AccessPM Name

0x01

BOOL

RO

tx

Status High Trip TP1

0x02

BOOL

RO

tx

Status Low Trip TP1

0x01

BOOL

RO

tx

Status High Trip TP2

0x02

BOOL

RO

tx

Status Low Trip TP2

High Trip not assert
High Trip assert

Status Low Trip
0
1

18

DataType

Status High Trip
01

Subindex 0x02

SI

Low Trip not assert
Low Trip assert

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4.5 Configuration Area(0x8000…0x8FFF)
4.5.1 Configuration Hot
Cathode Ion

Subindex 0x02

Index

SI

DataType

NV

Access

8035

0x02

BOOL

x

RW

PM NameEmission User Mode
Module 4

0x13

REAL

x

RW

Emission Current Module 4

Defines whether the emission is switched on automatically (controlled by a different
sensor) (automatic) or manually by the user (manual)
Filament User Mode Module 40
1

Subindex 0x13

4.5.2 Configuration Trip
Point 1

Automatic
ManualEmission current in milliamps
If High Trip Source Index is 0x60101100
The High Trip Point is calculated by:High Trip Point Limit = Value *) × Percentage **)*)Value from Piezo Sensor (I: 0x6010, SI: 0x11)**)

Percentage High Trip Source (I: 0x800E/F, SI: 0x13)

In this case, the High Trip Point Limit value is automatically updated by the device
itself. Any user-written value to the parameter High Trip Point Limit will be refusedwith an abort code.
If High Trip Source Index is 0x800E1100 or 0x800F1100 the High Trip Point isequal with the value referenced in High Trip Point Limit.
The value defined in High Trip Point Limit is compared with the pressure valuereferenced by the Source Index parameter.
If Low Trip Source Index is 0x60101100
The Low Trip Point is calculated by:
Low Trip Point Limit = Value *) × Percentage **)*)Value from Piezo Sensor (I: 0x6010, SI: 0x11)**)

Percentage Low Trip Source (I: 0x800E/F, SI: 0x16)

In this case, the Low Trip Point Limit value is automatically updated by the device
itself. Any user-written value to the parameter Low Trip Point Limit will be refusedwith an abort code.
If Low Trip Source Index is 0x800E1400 or 0x800F1400 the Low Trip Point is equalwith the value referenced in Low Trip Point Limit.
The value defined in Low Trip Point Limit is compared with the pressure valuereferenced by the Source Index parameter.

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19

Measurement signal(Pressure p)

High Trip
Hysteresis

High Trip Point

Low Trip
Hysteresis

Low Trip PointTime tinactive

Subindex 0x01

SI

DataType

NV

Access

BOOL

x

RW

High Trip Enable TP1

0x02

BOOL

x

RW

Low Trip Enable TP1

0x04

BOOL

x

RW

Override Enable TP1

0x05

BOOL

x

RW

Override High Trip TP1

PM Name

0x06

BOOL

x

RW

Override Low Trip TP1

0x11

REAL

x

RW

High Trip Point Limit TP1

0x12

UDINT

x

RW

High Trip Source Index
TP1

0x13

REAL

x

RW

Percentage High Trip
Source TP1

0x14

REAL

x

RW

Low Trip Point Limit TP1

0x15

UDINT

x

RW

Low Trip Source Index
TP1

0x16

REAL

x

RW

Percentage Low Trip
Source TP1

0x17

REAL

x

RW

High Trip Hysteresis TP1

0x18

REAL

x

RW

Low Trip Hysteresis TP1

0x1A

UDINT

x

RW

Source Index TP1

High Trip Point
DisableEnableLow Trip Point
DisableEnableOverride Enable
DisableEnableOverride High Trip
0120

inactive

0x01

0
1

Subindex 0x05

active800E

01Subindex 0x04

inactive

Index

0
1

Subindex 0x02

activeDisableEnabletira87e1(2014-10)

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Subindex 0x06

Override Low Trip0
1

DisableEnableSubindex 0x11

High Trip Point Limit: High limit to trigger trip point condition if Input Value (I0x900E, SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
It is possible to reference to "High Trip Point Limit" or to the sensor value from the
Piezo Sensor (I 0x6010, SI 0x11).

Subindex 0x13

Percentage of Value referenced by High Trip Source Index (I 0x6010, SI 0x11) in[%]. If High Trip Source Index is I 0x800E, SI 0x12 this parameter is not used.

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900E,
SI 0x01) is below this limit.

Subindex 0x15

Object index of Low Trip Point Value source. Index of Low Trip Point Limit (I0x800E, SI 0x14)
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
It is possible to reference to "Low Trip Point Limit" or to the sensor value from the
Piezo Sensor (I 0x6010, SI 0x11).

Subindex 0x16

Percentage of Value referenced by Low Trip Source Index (I 0x6010, SI 0x11) in[%]. If Low Trip Source Index is I 0x800E, SI 0x14 this parameter is not used.

Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0xF640 SI 0x11) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

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Index
Subindex
Reserved

21

4.5.3 Configuration Trip
Point 2

Calculating the High Trip Point and Low Trip Point → 4.4.7.
Index
800F

Subindex 0x01

PM Name

0x01

BOOL

x

RW

High Trip Enable TP2

0x02

BOOL

x

RW

Low Trip Enable TP2

0x04

BOOL

x

RW

Override Enable TP2

0x05

BOOL

x

RW

Override High Trip TP2

0x06

BOOL

x

RW

Override Low Trip TP2

0x11

REAL

x

RW

High Trip Point Limit TP2

0x12

UDINT

x

RW

High Trip Source Index
TP2

0x13

REAL

x

RW

Percentage High Trip
Source TP2

0x14

REAL

x

RW

Low Trip Point Limit TP2

0x15

UDINT

x

RW

Low Trip Source Index
TP2

0x16

REAL

x

RW

Percentage Low Trip
Source TP2 TP2

0x17

REAL

x

RW

High Trip Hysteresis TP2

0x18

REAL

x

RW

Low Trip Hysteresis TP2

0x1A

UDINT

x

RW

Source Index TP2

DisableEnableDisableEnableDisableEnableOverride High Trip
01

Subindex 0x06

AccessOverride Enable
01

Subindex 0x05

NV

Low Trip Point
01

Subindex 0x04

DataType

High Trip Point
01

Subindex 0x02

SI

DisableEnableOverride Low Trip0
1

DisableEnableSubindex 0x11

High Trip Point limit: High limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
It is possible to reference to "High Trip Point Limit" or to the sensor value from the
Piezo Sensor (I 0x6010, SI 0x11).

22

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Subindex 0x13

Percentage of Value referenced by High Trip Source Index (I 0x6010, SI 0x11) in[%]. If High Trip Source Index is I 0x800F, SI 0x12 this parameter is not used.

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is below this limit.

Subindex 0x15

Object index of Low Trip Point Value source. Index of Low Trip Point Limit (I0x800F, SI 0x14)
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
It is possible to reference to "Low Trip Point Limit" or to the sensor value from the
Piezo Sensor (I 0x6010, SI 0x11).

Subindex 0x16

Percentage of Value referenced by Low Trip Source Index (I 0x6010, SI 0x11) in[%].If Low Trip Source Index is I 0x800F, SI 0x14 this parameter is not used.

Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0xF640 SI 0x11) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

Highest / lowest
measurement value

The Information Data object defines the input process data.

Indicatedpressure
p6'

Error

p5'

4

p4'

Overrangep3'3
Display range

4.6 Information Area
(0x9000…0x9FFF)

Index
Subindex
Reserved

Measurement
range
p2'
p1'

2
1

Underrange

Error
Real pressure
p0 p1

p2 p3

The "measurement range" is the range between minimum and maximum pressure,
where the reading of the gauge is within the specified measurement uncertainty
limits.
The "valid measurement information range" (display range) is the completepressure range where the gauge gives an indication (measurement signal). The
valid measurement information range (display range) consists of underrange,measurement range and overrange.
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23

According to these definitions, 4 points are defined:
1
2
3
4

4.6.1

Lowest informational measurement value
Lowest precision measurement value
Highest precision measurement value
Highest informational measurement value

Index

SI

DataType

NV

Access

9000

0x02

REAL

x

RO

Highest Informational
Measurement Value
Module 1

0x03

REAL

x

RO

Highest Precision
Measurement Value
Module 1

0x04

REAL

x

RO

Lowest Precision
Measurement Value
Module 1

0x05

REAL

x

RO

Lowest Informational
Measurement Value
Module 1

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Subindex 0x05

Lowest value the gauge can measure without a specified accuracy.

Information
Capacitance DiaphragmSubindex 0x01

Index

SI

DataType

9001

0x01

UINT

RO

Sensor Warning Module 1

0x02

UINT

RO

Sensor Alarm Module 1

Subindex 0x02

NV

AccessPM NameSensor Warnings
Bit 0
Bit 1
Bit 2…15

0
Electronics Warning
0

Sensor Alarms
Bit 0
Bit 1
Bit 2…15

24

PM Name0Electronics Failure0

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4.6.2

4.6.3

Information Common
Piezo

Index

SI

DataType

NV

Access

9010

0x02

REAL

x

RO

Highest Informational
Measurement Value
Module 2

0x03

REAL

x

RO

Highest Precision
Measurement Value
Module 2

0x04

REAL

x

RO

Lowest Precision
Measurement Value
Module 2

0x05

REAL

x

RO

Lowest Informational
Measurement Value
Module 2

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Subindex 0x05

Lowest value the gauge can measure without a specified accuracy.

Information Piezo

Index

SI

DataType

9012

0x01

UINT

RO

Sensor Warning Module 2

0x02

UINT

RO

Sensor Alarm Module 2

Subindex 0x01

Subindex 0x02

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AccessPM Name0Electronics Warning
0

Sensor Alarms
Bit 0
Bit 1
Bit 2…15

Information Common
Heat Transfer

NV

Sensor Warnings
Bit 0
Bit 1
Bit 2…15

4.6.4

PM Name0Electronics Failure
0

Index

SI

DataType

NV

Access

9020

0x02

REAL

x

RO

PM NameHighest Informational
Measurement Value
Module 3

0x03

REAL

x

RO

Highest Precision
Measurement Value
Module 3

0x04

REAL

x

RO

Lowest Precision
Measurement Value
Module 3

0x05

REAL

x

RO

Lowest Informational
Measurement Value
Module 325

4.6.5

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Subindex 0x05

Lowest value the gauge can measure without a specified accuracy.

Information Heat
Transfer

Index

SI

DataType

9023

0x01

UINT

RO

Sensor Warning Module 3

0x02

UINT

RO

Sensor Alarm Module 3

Subindex 0x01

26

Information Common
Hot Cathode Ion

PM Name0Electronics Warning
0

Sensor Alarms
Bit 0
Bit 1
Bit 2…15

4.6.6

AccessSensor Warnings
Bit 0
Bit 1
Bit 2…15

Subindex 0x02

NV

0Electronics Failure
0

Index

SI

DataType

NV

AccessPM Name

9030

0x02

REAL

x

RO

Highest Informational
Measurement Value
Module 4

0x03

REAL

x

RO

Highest Precision
Measurement Value
Module 4

0x04

REAL

x

RO

Lowest Precision
Measurement Value
Module 4

0x05

REAL

x

RO

Lowest Informational
Measurement Value
Module 4

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

Subindex 0x05

Lowest value the gauge can measure without a specified accuracy.
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4.6.7

Information Hot
Cathode Ion

Subindex 0x01

Index
9035

Information Trip
Point 1/2

NV

AccessPM Name

0x01

UINT

RO

Sensor Warning Module 4

0x02

UINT

RO

Sensor Alarm Module 4

Sensor Filament 1 Warning
Sensor Filament 2 Warning
0
Electronics Warning
0
Pressure to high for Degas0

Sensor Alarms
Bit 0
Bit 1
Bit 2…8
Bit 9
Bit 10
Bit 11
Bit 12…15

4.6.8

DataType

Sensor Warnings
Bit 0
Bit 1
Bit 2…8
Bit 9
Bit 10
Bit 11
Bit 12…15

Subindex 0x02

SI

Sensor Filament 1 Alarm
Sensor Filament 2 Alarm
0
Electronics Faliure0
Overpressure Emission OFF
0

Index

SI

DataType

NV

AccessPM Name

900E

0x01

REAL

RO

Input Value Trip Point 1

900F

0x01

REAL

RO

Input Value Trip Point 2

Subindex 0x01 (900E)

Input Value Trip Point 1: Trip Point Input value as referenced by Source Index (I0x800E, SI 0x0E).

Subindex 0x01 (900F)

Input Value Trip Point 2: 0 Trip Point Input value as referenced by Source Index (I0x800F, SI 0x0E).

4.7 Device Area
(0xF000...0xAFFF)
4.7.1 Semiconductor Device
ProfileSI

DataType

F000

0x01

UINT

NV

AccessRO

PM NameIndex Distance

0x02

UINT

RO

Maximum Number ofModulesSubindex 0x01

Index Distance: Index offset between PDO entries of two consecutive modules (forETG.5003 = 0x10), e.g. 0x6000, 0x6010.

Subindex 0x02

Maximum Number of Modules: For the BCG450 this value always is 4.

4.7.2 Module Profile List

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Index

SI

DataType

F010

0x01

UDINT

NV

AccessRO

PM NameProfile Number Module 1

0x02

UDINT

RO

Profile Number Module 2

0x03

UDINT

RO

Profile Number Module 3
27

0x04

UDINT

RO

Profile Number Module 4

Subindex 0x01

Each sub-index lists the profile-number of the corresponding module.

Subindex 0x02

Each sub-index lists the profile-number of the corresponding module.

Subindex 0x03

Each sub-index lists the profile-number of the corresponding module.

Subindex 0x04

Each sub-index lists the profile-number of the corresponding module.

4.7.3 Exceptions
4.7.4 Active Exception Status

Index

SI

F380

Active Exception Status

4.7.5 Active Device Warning
Details

Subindex 0x02

Subindex 0x03

Bit 0

Device Warning

Bit 1

Manufacturer Warning

Bit 2

Device Error

Bit 3

Manufacturer Error

Bit 4…7

0

AccessPM NameRO

tx

ActiveException Status

The "active device warning details" parameter describes the warning state of thecomplete device.
Index

SI

DataType

AccessPM Name

F381

0x01

UDINT

RO

tx

Active Device Warning
Details Device

0x02

UDINT

RO

tx

Active Device Warning
Details Module 1

0x03

UDINT

RO

tx

Active Device Warning
Details Module 2

0x04

UDINT

RO

tx

Active Device Warning
Details Module 3

0x05

UDINT

RO

tx

Active Device Warning
Details Module 4

0x01

UDINT

RO

tx

Active Manufacturer
Warning Details

NV

Active Device Warning Details (Index F381)
Bit 0…20

Bit 3

EEPROM exception

Bit 4…31

0

Active Device Warning Details Module 1 (Index F381)
Bit 0

0

Bit 1

Electronics warning

Bit 2…31

0

Active Device Warning Details Module 2 (Index F381)
Bit 0…31

28

NV

USINT

Active Exception Status

F382

Subindex 0x01

DataType0

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Subindex 0x04

Active Device Warning Details Module 3 (Index F381)
Bit 0

Subindex 0x05

Bit 1

Electronics warning

Bit 2…31

0

Active Device Warning Details Module 4 (Index F381)
Bit 0

Subindex 0x01

4.7.6 Active Device Error
Details

Subindex 0x02 (F383)

Subindex 0x03 (F383)

Electronics warning

Bit 2…31

0

Active Manufacturer Warning Details (Index F382)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1…31

0

The "active device error details" parameter describes the error state of thecomplete device.
Index

SI

DataType

AccessPM Name

F383

0x01

UDINT

RO

tx

Active Device Error Details
Device

0x02

UDINT

RO

tx

Active Device Error Details
Module 1

0x03

UDINT

RO

tx

Active Device Error Details
Module 2

0x04

UDINT

RO

tx

Active Device Error Details
Module 3

0x05

UDINT

RO

tx

Active Device Error Details
Module 4

0x01

UDINT

RO

tx

Active Manufacturer Error
Details(2014-10)

BCG450-SE.cp

NV

Active Device Error Details Device(Index F383)
Bit 0

0

Bit 1

uP exception

Bit 2…31

0

Active Device Error Details Module 1(Index F383)
Capacitance Diaphragm
Bit 0

0

Bit 1

Electronics failure

Bit 2…31

0

Active Device Error Details Module 2(Index F383)
Piezo
Bit 0

tira87e1

0

Bit 1

F384

Subindex 0x01 (F383)

0

0

Bit 1

Electronics failure

Bit 2…31029

Subindex 0x04 (F383)

Subindex 0x05 (F383)

Active Device Error Details Module 3(Index F383)
Heat Transfer
Bit 0

0

Bit 1

Electronics failure

Bit 2…31

0

Active Device Error Details Module 4(Index F383)
Hot CathodeBit 0

Subindex 0x01 (F384)

4.7.7 Latched Device Warning
Details

Bit 1

Electronics failure

Bit 2…31

0

Active Manufacturer Error Details (Index F384)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1

Wrong software version used in base device

Bit 2

Wrong sensor type detected

Bit 3…31

0

Index

SI

AccessPM Name

USINT

RO

tx

Latched Exceptions Status

0x01

UDINT

RO

tx

Latched Device Warning
Details Device

0x02

UDINT

RO

tx

Latched Device Warning
Details Module 1

0x03

UDINT

RO

tx

Latched Device Warning
Details Module 2

0x04

UDINT

RO

tx

Latched Device Warning
Details Module 3

0x05

UDINT

RO

tx

Latched Device Warning
Details Module 4

0x01

UDINT

RO

tx

Latched Manufacturer
Warning Details

F390
F391

F392

30

0

DataType

NV

Latched Exceptions Status

Latched version of 0xF380.

Subindex 0x01 (F391)

Latched Device Warning Details Device: Latched version of 0xF381:01.

Subindex 0x02 (F391)

Latched Device Warning Details Module 1: Latched version of 0xF381:02.

Subindex 0x03 (F391)

Latched Device Warning Details Module 2: Latched version of 0xF381:03.

Subindex 0x04 (F391)

Latched Device Warning Details Module 3: Latched version of 0xF381:04.

Subindex 0x05 (F391)

Latched Device Warning Details Module 4: Latched version of 0xF381:05.

Subindex 0x01 (F392)

Latched Manufacturer Warning Details: Latched version of 0xF382:01.

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4.7.8 Latched Device Error
Details

Index

SI

DataType

F393

0x01

F394

AccessPM Name

UDINT

RO

tx

Latched Device Error
Details Device

0x02

UDINT

RO

tx

Latched Device Error
Details Module 1

0x03

UDINT

RO

tx

Latched Device Error
Details Module 2

0x04

UDINT

RO

tx

Latched Device Error
Details Module 3

0x05

UDINT

RO

tx

Latched Device Error
Details Module 4

0x01

UDINT

RO

tx

Latched Manufacturer
Error Details

Subindex 0x01 (F393)

Latched Device Error Details Device: Latched version of 0xF383:01.

Subindex 0x02 (F393)

Latched Device Error Details Module 1: Latched version of 0xF383:02.

Subindex 0x03 (F393)

Latched Device Error Details Module 2: Latched version of 0xF383:03.

Subindex 0x04 (F393)

Latched Device Error Details Module 3: Latched version of 0xF383:04.

Subindex 0x05 (F393)

Latched Device Error Details Module 4: Latched version of 0xF383:05.

Subindex 0x01 (F394)

Latched Manufacturer Error Details: Latched version of 0xF384:01.

4.7.9 Device Warning Mask

Index

SI

DataType

NV

Access

F3A1

0x01

UDINT

x

RW

Device Warning Mask
Device

0x02

UDINT

x

RW

Device Warning Mask
Module 1

0x03

UDINT

x

RW

Device Warning Mask
Module 2

0x04

UDINT

x

RW

Device Warning Mask
Module 3

0x05

UDINT

x

RW

Device Warning Mask
Module 4

0x01

UDINT

x

RW

Manufacturer Warning
Mask

F3A2

tira87e1

NV

PM NameSubindex 0x01 (F3A1)

Device Warning Mask Device: Mask bits for 0xF381:01 and 0xF391:01.

Subindex 0x02 (F3A1)

Device Warning Mask Module 1: Mask bits for 0xF381:02 and 0xF391:02.

Subindex 0x03 (F3A1)

Device Warning Mask Module 2: Mask bits for 0xF381:03 and 0xF391:03.

Subindex 0x04 (F3A1)

Device Warning Mask Module 3: Mask bits for 0xF381:04 and 0xF391:04.

Subindex 0x05 (F3A1)

Device Warning Mask Module 4: Mask bits for 0xF381:05 and 0xF391:05.

Subindex 0x01 (F3A2)

Manufacturer Warning Mask: Mask bits for 0xF382:01 and 0xF392:01.

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31

4.7.10 Device Error Mask

Index

SI

DataType

NV

Access

F3A3

0x01

UDINT

x

RW

Device Error Mask Device

0x02

UDINT

x

RW

Device Error Mask
Module 1

0x03

UDINT

x

RW

Device Error Mask
Module 2

0x04

UDINT

x

RW

Device Error Mask
Module 3

0x05

UDINT

x

RW

Device Error Mask
Module 4

0x01

UDINT

x

RW

Manufacturer Error Mask

F3A4

Subindex 0x01 (F3A3)

Device Error Mask Device: Mask bits for 0xF383:01 and 0xF393:01.

Subindex 0x02 (F3A3)

Device Error Mask Module 1: Mask bits for 0xF383:02 and 0xF393:02.

Subindex 0x03 (F3A3)

Device Error Mask Module 2: Mask bits for 0xF383:03 and 0xF393:03.

Subindex 0x04 (F3A3)

Device Error Mask Module 3: Mask bits for 0xF383:04 and 0xF393:04.

Subindex 0x05 (F3A3)

Device Error Mask Module 4: Mask bits for 0xF383:05 and 0xF393:05.

Subindex 0x01 (F3A4)

Manufacturer Error Mask: Mask bits for 0xF384:01 and 0xF394:01.

4.7.11 Comination Gauge

32

PM Name

Index

SI

DataType

AccessPM Name

F640

0x01

BOOL

NV

RO

tx

Combination Gauge
Reading Valid

0x02

BOOL

RO

tx

Combination Gauge
Overrange Exceeded

0x03

BOOL

RO

tx

Combination Gauge
Underrange Exceeded

0x11

REAL

RO

tx

Combination Gauge Active
Value

0x12

UINT

RO

tx

Combination Gauge Active
Sensor Number

Subindex 0x01

Identifies whether the complete vacuum pressure gauge (with several measuring
principles) is out of its absolute overrange or absolute underrange, or in any otherfailure condition.

Subindex 0x02

If the bit "Overrange" is set, all modules of the gauge are in an overrange condition.

Subindex 0x03

If the bit "Underrange" is set, all modules of the gauge are in an underrange
condition

Subindex 0x11

The value copied from the measurement value of the active measuring module
used for the Input PDO.

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Subindex 0x12

4.7.12 Trip Point Output All

Subindex 0x01

Identifies the module that is providing the measurement value, the latter of which iscopied into the Active Value parameter for all Input PDO’s.
0

No module has a valid value

1

Capacitance diaphragm sensor is providing the
Active Value2

Piezo sensor is providing the Active Value

3

Heat Transfer sensor is providing the Active Value

4

Hot Cathode sensor is providing the Active Value

Index

SI

DataType

F641

0x01

UDINT

NV

AccessPM NameRO

tx

Trip Point Output All
Instance

Status of Trip Point instances.
Trip Point Output All Instance

4.7.13 Input Latch Local
Timestamp(2014-10)

Status High Trip (I 0x600E, SI 0x01)
Status Low Trip (I 0x600E S,I 0x02)
Status High Trip (I 0x600F, SI 0x01)
Status Low Trip (I 0x600F, SI 0x02)
0

Index

SI

DataType

F6F0

0x01

NV

AccessPM Name

UDINT

RO

tx

Input Latch Local
Timestamp module 1

0x02

UDINT

RO

tx

Input Latch Local
Timestamp module 2

0x03

UDINT

RO

tx

Input Latch Local
Timestamp module 3

0x04

UDINT

RO

tx

Input Latch Local
Timestamp module 4

Subindex 0x01

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

Subindex 0x02

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

Subindex 0x03

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

Subindex 0x04

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

4.7.14 Configure Device

tira87e1

Bit 0
Bit 1
Bit 2
Bit 3
Bit 4…31

BCG450-SE.cp

Index

SI

DataType

NV

Access

F840

0x01

UDINT

x

RW

PM Name
Data Units

0x02

V_STRING

RW

Password

33

Subindex 0x01

Unit of the Value of the Analog Input Sensor Instance and all related parameters.
Trip Point Output All Instance
0x00220000
0xFD4E0000
0x00A10000
0x00E00000

Subindex 0x02

34

Pascalmbar
TorrCounts (INFICON)

Writing the correspoinding password (vendor specified value) enables Access
Rights (Index F940 Subindex 03)

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4.7.15 Information Device

Index

SI

DataType

F940

0x01

UDINT
BYTE

RO

Number of Sensors

RO

Access Rights

RO

SW Version VPG PCB

V_STRINGRO

Manufacturer Serial
NumberUDINTRO

CDP Functional
Generation Number
Module 1

0x02

RO

CDP Functional
Generation Number
Module 2

0x03

RO

CDP Functional
Generation Number
Module 3

0x04

RO

CDP Functional
Generation Number
Module 40x01

BCG450-SE.cp

V_STRING

x

UDINT

RO

SDP Functional
Generation Number
Module 1

0x02

UDINT

RO

SDP Functional
Generation Number
Module 2

0x03

UDINT

RO

SDP Functional
Generation Number
Module 3

0x04

UDINT

RO

SDP Functional
Generation Number
Module 4

V_STRINGRO

Vendor Name

0x01

V_STRING

RO

Semiconductor SDP
Device Name Module 1

0x02

V_STRING

RO

Semiconductor SDP
Device Name Module 2

0x03

V_STRING

RO

Semiconductor SDP
Device Name Module 3

0x04

V_STRING

RO

Semiconductor SDP
Device Name Module 4

0x01

USINT

RW

rx
tx

Output Identifier Module 1

0x02

USINT

RW

rx
tx

Output Identifier Module 2

0x03

USINT

RW

rx
tx

Output Identifier Module 3

0x04

USINT

RW

rx
tx

Output Identifier Module 4

F9F6

UDINT

RO

Time since power on

F9F7

UDINT

RO

Total time powered

F9F8

UDINT

RO

Firmware Update
Functional Generation
Number

F9F5(2014-10)

Measurement Principle

0x01

F9F4

tira87e1

RO

USINT

F9F3

Subindex 0x01 (F940)

PM Name

0x03
0x04

F9F2

Access

0x02

F9F0
F9F1

NV

x

Measurement principle assigned to the object instance.
The most significant nibble of the parameter represents the sensor type of the first
Module, the second most significant nibble of the parameter represents the sensor
type of the second Module, and so forth.

35

Measurement Principle (Index F940)
1
2
3
4
5

Capacitance Manometer
Piezo
Heat Transfer
Cold Cathode
Hot CathodeSubindex 0x02 (F940)

Number of Sensors (Index F940): In this device are 4 sensors implemented.

Subindex 0x03 (F940)

Access Rights (Index F940)
01
2

Subindex 0x04 (F940)

4.7.16 Command Full Scale
AdjustSubindex 0x01

User
access to measurement and limited diagnostic features
Service
access to additional diagnostic features (vendor specific)
Superuser
access to vendor-specific parameters and features, e.g.
calibration parameters, model number, serial numbers

Software version of the basic device.

Execution of this command will start a Full Scale Adjust operation.
Index

SI

DataType

FB41

0x01

V_STRING

NV

AccessRW

PM NameCommand

0x02

BYTE

RO

Status0x03

V_STRING(3)RO

Response

A full scale adjust command is initiated when the following byte sequence is sent.
Command

Subindex 0x02

Byte 00: Full Scale Adjust

Byte 1

Index of the Sensor Module. Value has to be 1
1: Capacitance Diaphragm

Byte 2…5

Full Scale value (Data format: REAL). Value has tobe 0

Status (supported values)
0
1
2
3
255

Subindex 0x03

36

Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply
available
Last command completed, errors present, reply available
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

UnusedByte 20: Full Scale Adjust successful
1: Full Scale Adjust failed: out-of-range
254: No previous Full Scale Adjust command issued

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4.7.17 Command Degas ON /OFF

Execution of this command will initiate or cancel a degas operation.
Index
FB43

Subindex 0x01

SI

DataType

NV

AccessPM Name0x01

V_STRING(2)RW

Command

0x02

BYTE

RO

Status0x03

V_STRING(3)RO

Response

A degas command is initiated when the following byte sequence is sent.
Command

Subindex 0x02

Byte 00: Degas OFF
1: Degas ON

Byte 1

Index of the sensor module. Value has to be 4
4: Hot CathodeStatus (supported values)
0
1
2
3
255

Subindex 0x03

4.7.18 Command Emission
ON / OFF

Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply
available
Last command completed, errors present, reply available
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

UnusedByte 20: Degas ON / OFF successful
1: Degas ON / OFF failed (unspecified reason)
2: Degas On failed because pressure to high254: No previous Degas ON / OFF command issued

Execution of this command will turn on or off the gauge’s emission state.
Index
FB44

Subindex 0x01

SI

DataType

NV

AccessPM Name0x01

V_STRING(2)RW

Command

0x02

BYTE

RO

Status0x03

V_STRING(3)RO

Response

An emission command is initiated when the following byte sequence is sent.
Command

Subindex 0x02

Byte 0

0: Emission OFF
1: Emission ON

Byte 1

Index of the sensor module. Value has to be 4
4: Hot Cathod

Status (supported values)
0
1
2
3
255

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Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply available
Last command completed, errors present, reply available
Command is executing37

Subindex 0x03

4.7.19 Device Reset Command

Response
Byte 0See Subindex 0x02

Byte 1

UnusedByte 2

0: Emission ON / OFF successful
1: Emission ON / OFF failed (unspecified reason)
2: Emission On failed because pressure to high254: No previous Emission ON / OFF commandissuedExecution of this command causes the device to emulate a complete power cycle.
This includes an ESC reset. An SDP may limit some behavior of the power cycle
emulation, but shall not exclude the EtherCAT interface.
As consequence of an ESC reset all following devices are disconnectedfrom the network.
There are two versions of this command:

Subindex 0x01•

Standard reset (as described above)•

Factory reset (as described above, but additionally, all parameters are restored
to as-shipped defaults).

Index

SI

DataType

FBF0

0x01

V_STRING(6)NV

AccessPM NameRW

Command

0x02

BYTE

RO

Status0x03

V_STRING(1)RO

Response

A device reset is initiated when the following byte sequence is sent.
Command
Byte 0
Byte 1
Byte 2Byte 3
Byte 4
Byte 5

Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

See Subindex 0x02

Execution of this command clears the latched exceptions.
Index
FBF1

38

Reserved
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 04.7.20 Exception ResetCommand

0x74
0x65
0x73
0x65
0x72
0x00 = Standard reset, 0x66 = Factory ResetSI

DataType

NV

AccessPM Name0x01

V_STRING(5)RW

Command

0x02

BYTE

RO

Status0x03

V_STRING(1)RO

Responsetira87e1(2014-10)

BCG450-SE.cp

Subindex 0x01

A exception reset is initiated when the following byte sequence is sent.
Command
Byte 0
Byte 1
Byte 2Byte 3
Byte 4

Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

0x74
0x65
0x73
0x65
0x72

Last command completed, no error, no response
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 04.7.21 Store Parameters
Command

Subindex 0x01

See Subindex 0x02

Execution of this command will store all parameters to non-volatile memory. If adevice automatically saves all non-volatile parameters at the time they are set, thiscommand will not take any action.
Index

SI

DataType

FBF2

0x01

V_STRING(4)NV

AccessPM NameRW

Command

0x02

BYTE

RO

Status0x03

V_STRING(1)RO

Response

A device reset is initiated when the following byte sequence is sent.
Command
Byte 0
Byte 1
Byte 2Byte 3Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

(2014-10)

BCG450-SE.cp

Last command completed, no error, no response
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 0tira87e1

0x65
0x76
0x61
0x73

See Subindex 0x02

39

Appendix
A:

40

Literature [1]www.inficon.com
Instruction Sheet
TripleGauge™,
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450, BCG450-SD, BCG450-SE, BCG450-SP
tima40d1 (German)
tima40e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [2]www.inficon.com
Instruction Sheet
TripleGauge™,
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450-SD, BCG450-SE, BCG450-SP
tima41d1 (German)
tima41e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [3]www.inficon.com
Operating Manual
TripleGauge™,
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450, BCG450-SD, BCG450-SE, BCG450-SP
tina40d1 (German)
tina40e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [4]ETG.1000.2: Physical Layer service definition and protocol specification

 [5]ETG.1000.3: Data Link Layer service definition

 [6]ETG.1000.4: Data Link Layer protocol specification

 [7]ETG.1000.5: Application Layer service definition

 [8]ETG.1000.6: Application Layer protocol specification

 [9]ETG.1020: EtherCAT Protocol Enhancements [10]

ETG.2000: EtherCAT Slave Information

 [11]

ETG.5001.1: Modular Device Profile – Part 1: General MDP DeviceModel [12]

ETG.5003.1: Semiconductor Device profile – Part 1: Common Device
Profile (CDP) [13]

ETG.5003.2080: Semiconductor Device profile – Part 2080: Specific
Device Profile (SDP): Vacuum Pressure Gauge [14]IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications

 [15]IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3

 [16]SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATORNETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES [17]SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers

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Notestira87e1(2014-10)

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41

Original: English tira87e1 (2014-10)

t i r a87e1

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com