Communication Protocol

Profibus
DP/V1 Interface for Bayard-Alpert Pirani Capacitance Diaphragm Gauge

BCG450-SP

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About this Document

This document describes the functionality and programming of the Profibus interface of the BCG450-SP gauge.
For safety information on and technical data of the gauges, please referto the respective operating manuals (→[1], [3]).
In information referring to the ionization vacuum measuring part of the gauge, theshort designation "BA" (Bayard-Alpert measuring principle) is used.
The designation "Pirani" is used in information referring to the Pirani vacuum
measuring part of the gauge.

Product Identification

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space provided
below.

INFICON AG, LI-9496 Balzers

Model:PN:
SN:
V

Validity

W

This document applies to products with part numbers
BCG450-SP (with Profibus interface and switching functions)353-554 (vacuum connection DN 25 ISO-KF)
353-556 (vacuum connection DN 40 CF-R)
The part number (PN) can be taken from the product nameplate.

Intended Use

The BCG450-SP gauge allows vacuum measurement of non flammable gases andgas mixtures (pressure ranges →[1], [3]).
The gauges can be operated with an INFICON controller or another instrument orcontrol device.

Functional Principle

The function of the gauge is described in the operating manual (→[1], [2], [3]).
The integrated Profibus interface allows operating the gauge in connection withother suitable devices in a Profibus network according to the standard described in[4], [5].

Trademarks

SEMI®

Semiconductor Equipment and Materials International, California

Profibus

This document contains Profibus-specific information described anddefined in the Profibus standard EN 50170 (→
[5]).

2

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Contentstira41e1(2005-06)

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About this Document
Product Identification
Validity
Intended Use
Functional Principle
Trademarks

2
2
2
2
2
2

1 General Data
1.1 Data Rate
1.2 Device Address
1.3 Ident Number
1.4 Configuration Data
1.5 User Parameter Data
1.6 Types of Communication

5
5
5
5
5
6
6

2 Data Exchange Mode
2.1 Acyclic Data Transmission with Profibus DPV1 Functionality
2.2 Structure of the Cyclic Data Telegrams in Data Exchange Mode
2.2.1 Parameter Channel
2.2.1.1 PKE Parameter Signature Value
2.2.1.2 PWE Parameter (Process Value)
2.2.1.3 Error Code (Error Message)
2.3 Cyclic Message Telegrams

7
7
8
9
9
10
10
11

3 Block Model
3.1 Device Block3.1.1 Information on the Individual Indices3.1.1.1 Block Type ID 16
3.1.1.2 Device Type ID 17
3.1.1.3 Standard Revision Level ID 18
3.1.1.4 Device Manufacturer Identifier ID 19
3.1.1.5 Manufacturer Model Number ID 20
3.1.1.6 Software or Firmware Revision Level ID 21
3.1.1.7 Hardware Revision Level ID 22
3.1.1.8 Device Configuration ID 24
3.1.1.9 Device State ID 25
3.1.1.10 Exception Status ID 26
3.1.1.11 Exception Detail Alarm ID 27
3.1.1.12 Exception Detail Warning ID 28
3.1.1.13 Copy Common Exception Detail Alarm 0 ID 204
3.1.1.14 Copy Device Exception Detail Alarm 0 … 3 ID 205
3.1.1.15 Copy Device Exception Detail Alarm 4 … 5 ID 206
3.1.1.16 Copy Manufacturer Exception Detail Alarm 0 ID 207
3.1.1.17 Copy Common Exception Detail Warning 0 ID 208
3.1.1.18 Copy Device Exception Detail Warning 0 … 3 ID 209
3.1.1.19 Copy Device Exception Detail Warning 4 … 6 ID 210
3.1.1.20 Copy Manufacturer Exception Detail Warning 0 ID 211
3.1.2 Device Block, Device Behavior
3.1.2.1 Device Block State Command
3.2 Analog Input Block3.2.1 One Of N Analog Input Function Block / SLOT 1
3.2.1.1 Block Type3.2.1.2 Channel Instance Selector
3.2.1.3 PV Selector
3.2.2 Analog Sensor Input Function Block Instance 1 / SLOT 1
3.2.2.1 Process Value
3.2.2.2 Status
3.2.2.3 Data Type3.2.2.4 Data Unit
3.2.2.5 Reading Valid
3.2.2.6 Full Scale
3.2.2.7 Safe State
3.2.2.8 Safe Value
3.2.2.9 Overrange
3.2.2.10 Underrange
3.2.3 Analog Sensor Input Function Block Instance 2 / SLOT 1
3.2.3.1 Process Value
3.2.3.2 Status

12
13
14
14
14
14
14
14
14
14
14
14
15
16
18
20
20
20
21
21
21
21
21
21
22
23
23
23
23
23
24
24
24
24
25
25
25
26
26
26
26
27
27
27
3

3.2.3.3 Data Type3.2.3.4 Data Unit
3.2.3.5 Reading Valid
3.2.3.6 Full Scale
3.2.3.7 Safe State
3.2.3.8 Safe Value
3.2.3.9 Overrange
3.2.3.10 Underrange
3.2.4 Analog Sensor Input Function Block Instance 3 / SLOT 1
3.2.4.1 Process Value
3.2.4.2 Status
3.2.4.3 Data Type3.2.4.4 Data Unit
3.2.4.5 Reading Valid
3.2.4.6 Full Scale
3.2.4.7 Safe State
3.2.4.8 Safe Value
3.2.4.9 Overrange
3.2.4.10 Underrange
3.2.5 Analog Sensor Input Function Block Instances 5 and 6 / SLOT 1
3.2.5.1 Process Value
3.2.5.2 Status
3.2.5.3 Data Type3.2.5.4 Data Unit
3.2.5.5 Reading Valid
3.2.5.6 Setpoint Function
3.2.5.7 "Percentage of Atmosphere"
3.2.5.8 Atmosphere Reached
3.3 Transducer Block3.3.1 One Of N Vacuum Gauge Transducer Block / SLOT 1
3.3.1.1 One Of N Status Extension
3.3.2 Heat Transfer Vacuum Gauge Transducer Block / SLOT 1 / Instance 1
3.3.2.1 Block Type3.3.2.2 Status Extension
3.3.2.3 Sensor Alarm
3.3.2.4 Sensor Warning
3.3.3 Hot Cathode Ion Gauge Transducer Block / SLOT 1 / Instance 2
3.3.3.1 Block Type3.3.3.2 Status Extension
3.3.3.3 Sensor Alarm
3.3.3.4 Sensor Warning
3.3.3.5 Emission Status
3.3.3.6 Emission Current
3.3.3.7 Degas Status
3.3.3.8 Emission User Mode State
3.3.3.9 Hot Cathode Block State Command
3.3.4 Diaphragm Gauge Transducer Block / SLOT 1 / Instance 3
3.3.4.1 Block Type3.3.4.2 Status Extension
3.3.4.3 Sensor Alarm
3.3.4.4 Sensor Warning
3.3.4 Atmosphere Sensor Transducer Block(Piezo Sensor) / SLOT 1 / Instance 4
3.3.4.1 Block Type3.3.4.2 Atmosphere Sensor Block State Command

27
28
28
28
28
29
29
29
30
30
30
30
31
31
31
32
32
32
32
33
33
34
34
34
34
34
34
36
36
36
36
36
36
36
36
37
37
37
37
37
38
38
38
38
38
39
40
40
40
40
40

Appendix A: Definitions

42

Appendix B: Block Type45

Appendix C: Electrical Connections

46

Appendix D: Literature48

For cross-references to other documents, the symbol (→

4

41
41
41

[XY]) is used.

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1 General Data
1.1 Data Rate

The gauge supports all data rates defined in the EN 50170 standard (→[5]) up
to 12 Mbaud. Automatic data rate setting is supported. Alternatively, a fixed data
rate can be selected.

1.2 Device Address

The device address ( node address) must be set via two rotary switches when thegauge is installed.
For unambiguous identification of the gauge in a Profibus environment, a nodeaddress is required. The node address setting is made on the gauge.
The node address (0 … 125dec) is set in hexadecimal form
(00 … 7Dhex) (default value 5Chex) via the "ADDRESS" switches.
The "MSD" switch is used for setting the high-order address
nibble and the "LSD" switch for defining the low-order address
nibble.
The node address is polled by the firmware when the gauge is switched on. If thesetting deviates from the stored value, the new value is taken over into the
NVRAM. If a value >7Dhex (>125dec) is entered, the node address setting currently
stored in the device remains valid. However, the address can be set via theProfibus master with the "Set Slave Address" service. This address setting will be
stored in the EEPROM of the gauge.

1.3 Ident Number

1.4 Configuration Datatira41e1(2005-06)

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The ident number assigned to the gauge by the PNO (→Gauge

Ident number (hexadecimal)

BCG450-SP

08E6[4]) is:Depending on the standard telegrams used (→ section "Cyclic Message Telegrams"), the following configuration data have to be transmitted to the gauge during
the configuration phase:Standard telegram
Master ⇒ Slave

Standard telegram
Slave ⇒ Master

Configuration data-

40x44, 0x84, 0x05, 0x05, 0x05,
0x03

-

5

0x44, 0x86, 0x05, 0x05, 0x05,
0x08

1

4

0xC6, 0x81, 0x84, 0x05, 0x05,
0x05, 0x05, 0x05, 0x03

15

0xC6, 0x81, 0x86, 0x05, 0x05,
0x05, 0x05, 0x05, 0x08

36

0xC6, 0x87, 0x8C, 0x0A, 0x0A,
0x05, 0x05, 0x05, 0x03

37

0xC6, 0x87, 0x8E, 0x0A, 0x0A,
0x05, 0x05, 0x05, 0x08

26

0xC8, 0x89, 0x8C, 0x0A, 0x05,
0x05, 0x0A, 0x05, 0x05, 0x05,
0x03

2

7

0xC8, 0x89, 0x8E, 0x0A, 0x05,
0x05, 0x0A, 0x05, 0x05, 0x05,
0x08

5

1.5 User Parameter Data

Depending on the pressure unit setting ( data unit), the following configuration
string has to be transmitted to the gauge (parameter data in hexadecimal format):Pressure unit

User parameter data string

COUNTS 1)

00 00 00 03 E9

Torr

00 00 00 05 15

Micron00 00 00 05 16

mbar

00 00 00 05 1C

Pascal00 00 00 05 1D

1)

1.6 Types ofCommunication

6

If COUNTS is selected as pressure unit, a value is output, which can be converted into a corresponding pressure value by means of a formula (→ section"Analog Sensor Input Function Block" for more information).

BCG450-SP works according to the Profibus DPV1 specification and can beaddressed in cyclic or acyclic data traffic (→[4]).
Acyclic data traffic should be used to make device or process specific settings suchas definition of the Safe Values, Safe States etc. or for reading or writing of rarely
used attributes.
Cyclic data traffic is used for continuous exchange of the required process parameter values, i.e. pressure value and status indications. A number of standard
telegrams are available for cyclic data traffic. They can be selected according torequirements (→ section "Cyclic Message Telegrams").

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2 Data Exchange Mode
2.1 Acyclic Data Transmission with Profibus
DPV1 Functionality

The reading and writing operations defined in Profibus are based on a slot index
address scheme. In BCG450-SP, all device functions are organized in the following
blocks:•A device block describing all organizational parameters of the gauge (serial
number, manufacturer, software version, …)•

An Analog Sensor Function Block describing the function of the pressure presentation•

An Analog Sensor Transducer Block describing the physical interface between
the gauge and the process (emission current, ion current, …).

The block model is described in detail in section "Block Model".
Each block is assigned to a separate slot. The exact assignment
Block ⇒ Slot ⇒ Index is described in section "Block Model". The Device Block is
assigned to Slot 0, the transducer and functional blocks to Slot 1.

Block, slot andindex assignment

Index
254

DeviceBlock

Block_1

Block_2

Block_3

0

1

2

3

0

There are 254 indices per slot. The indices can have a width of 255 bytes. All values that can be accessed via Profibus have to be mirrored to one of these slots/
indices.
The parameters are generally numbered in ascending order, starting with index 16.
Services such as "Degas On" or "Full scale" are numbered in descending order,
starting with index 15.

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Assignment of the blockelements to the slot indices

Index

Parameter_n

Block_Type_Name

Block_x

Attributes

Parameter_2
Parameter_1
Parameter_0
Operation_1
Operation_2
Operation_n

16

Public02.2 Structure of the Cyclic
Data Telegrams in
Data Exchange Mode

Operations Public

optional

optional
PrivateIn Data Exchange mode, the DP master class 1 cyclically transmits data from andto all slaves that are connected to the bus.
In this document, data transmitted from the slave to the master are called "input
data" and data transmitted from the master to the slave are called "output data".
The input and output data of the BCG450-SP has two logic parts:
1) the parameter channel
2) the process data channel
There is a number of standard telegrams, consisting of:a) the parameter channel onlyb) the process data channel onlyc) both, the parameter and process data channel
The parameter channels allows masters without Profibus DPV1 to access device
specific parameters that are not part of the normal cyclic data telegram. For masters with Profibus DPV1, no parameter channel is required.

Input data

The input data (transmitted by the BCG450-SP) consists of the 8 bytes of the parameter channel (if there is a parameter channel in the standard telegram) and of
5 … 7 bytes of process data depending on the selected standard telegram.

1

2

3

Byte
4
5

6

7

8

9

Parameter channel
PKE
Where:

Output data

IND res.

10

11

Byte
12 13

14

15

Process data

PWE

PKE

=

Parameter Signature Value

Reading or writing command and definition of the slot

IND=

Sub Index

res.
PWE

=
=

Index No. of the index to beread (→ "Block Model")reserved

Process Value

Value to be read or written

The output data (transmitted by the master) consist of 8 bytes of the parameterchannel or, if there is no parameter channel in the standard telegram, of 0 bytes.

1

2

3

Byte
4
5

6

7

8

Parameter channel
PKE

8

IND res.

PWE

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2.2.1 Parameter Channel

The structure of the parameter channel is described in the table below.
The parameter channel (called PKW Interface hereinafter) consists of 8 bytes.

12

Octets
4
5

3

PKE

6

IND res.

7

8

PWE

The PKW Interface allows reading and writing of slave parameters with a maximum
data length of 4 bytes. Strings cannot be read.
The slave generates exactly one response per instruction transmitted by the master. The instruction and response cannot be blocked. This means that exactly one
instruction per output telegram can be transmitted to the slave and that exactly one
response per input telegram can be transmitted to the master. 4 bytes of actual
data can thus be transmitted at a time.

2.2.1.1 PKE Parameter
Signature Value

The instruction and response are represented in the first two bytes (PKE) of theparameter channel:

15

14

13

12

11

10

AK
Where:

Instruction signature

9

Bit position
8
7
6

5

res.
Bits

4

3

2

1

0

Slot

Meaning

15 … 12AK

11 … 8
7…0

Reserved
Define the slot from which data are read or onto which avalue is to be written

Instruction/response signature

In Master ⇒ Slave communication, the AK field contains the instruction signature of
the master.
In Slave ⇒ Master communication, the AK field contains the instruction signature of
the slave.
AK Function
Master ⇒ Slave(Instruction signature)AKnormal

AK
error

0

No instruction

0

No response

1

Read parameter value

1

Transmit parameter value(word)
Transmit parameter value(double word)
Transmit parameter value(byte)

7 1)

2
11
2

Write parameter value(data type: word)

1

Transmit parameter value(word)

7 1)

3

Write parameter value(data type: double word)

2

Transmit parameter value(double word)

7 1)

11

Transmit parameter value(byte)

7 1)

10 Write parameter value(data type: byte)
1)

Function
Slave ⇒ Master(Response signature)

Instruction cannot be executed (error code)

On the left of the table, the instruction signatures of the master are listed according
to their function. On the right of the table, the corresponding normal responses (AKNormal) and error codes (AK Error) transmitted by the slave are listed.

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9Instruction – responsesequence

1) The master transmits an instruction to the slave and repeats that instruction
until it receives a response from the slave.
2) The slave keeps transmitting the response to the instruction until the mastertransmits a new instruction.
3) The master marks the end of the first instruction cycle by setting AK to zero.
Only after that, a new instruction/response cycle may be started.

2.2.1.2 PWE Parameter(Process Value)

The PWE represents the data element to be transmitted.
If a byte is to be transmitted, that byte has to be in position 8 of the parameterchannel.
Integers are transmitted with bytes 7 and 8. Double integer and float values aretransmitted with bytes 5 … 8.

2.2.1.3 Error Code(Error Message)

In the event of a transmission error (AK response signature = 7), the slave transmits an error code in byte positions 7 and 8 (data type: INT16).
Error code
0
1
2
3
5
17
18
201
202

Meaning
Undefined slot
Parameter not changeable
Lower or upper value range limit overflow
Index error
Data type error
Instruction not allowed in this state
Other errors
Already in requested state
Object state conflict

The following diagram shows an example of a data request from a master to a
BCG450-SP via parameter channel.

DP-Master

BCG450-SP

AK(IS) = 0
Parameter
Request(Client)

AK(RS) = 0
AK(IS) = 0

Parameter
Request(Server)

AK(RS) = 0
AK (IS) = 1
AK(RS) = 0
AK (IS) = 1

Fetch
Data

AK(RS) = 0
AK (IS) = 1
Store
Data

AK(RS) = 1
AK (IS) = 0
AK(RS) = 0
AK (IS) = 0
AK(RS) = 0

10

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2.3 Cyclic Message
Telegrams

The message telegrams listed below are implemented in the gauge. They can beselected according to requirements. When selecting a message telegram, ascertain
what output format of the measured value (integer/float) is required and whether aparameter channel is needed or not. The gauge can also be operated in such a
way that the master does not transmit any output data to the slave.
Standard
telegram

Master
⇔
Slave

1

M⇒S
M⇒S

2

Byte
1

Transition Command

2

Transition Command Value for Hot Ion Gauges

1…8

Transition Command
Transition Command Value for Hot Ion Gauges

3

M⇒S

1-8

Parameter Channel

4

S⇒M

1

Exception status

S⇒M

5

1
2
3
4…7

S⇒M

6

S⇒M

7

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Parameter Channel

9
10

2
3
4…5

Configuration data

Meaning

One Of N status extension
One Of N PV selector
Process value UINT16
Exception status
One Of N status extension
One Of N PV selector
Process value float

1…8

Parameter channel

9101112 … 13

Exception status
One Of N status extension
One Of N PV selector
Process value UINT16

1…8Parameter channel

9101112 … 15

Exception status
One Of N status extension
One Of N PV selector
Process value float

In the following table, the possible reasonable combinations are listed with thecorresponding configuration data.
Standard telegram
Master ⇒ Slave

Standard
telegram
Slave ⇒ Master-4

Configuration data

0x44, 0x84, 0x05, 0x05, 0x05, 0x03-

50x44, 0x86, 0x05, 0x05, 0x05, 0x08

14

0xC6, 0x81, 0x84, 0x05, 0x05, 0x05,
0x05, 0x05, 0x03

15

0xC6, 0x81, 0x86, 0x05, 0x05, 0x05,
0x05, 0x05, 0x08

36

0xC6, 0x87, 0x8c, 0x0A, 0x0A, 0x05,
0x05, 0x05, 0x03

37

0xC6, 0x87, 0x8E, 0x0A, 0x0A,
0x05, 0x05, 0x05, 0x08

26

0xC8, 0x89, 0x8c, 0x0A, 0x05, 0x05,
0x0A, 0x05, 0x05, 0x05, 0x03

27

0xC8, 0x89, 0x8E, 0x0A, 0x05, 0x05,
0x0A, 0x05, 0x05, 0x05, 0x08

11

3 Block Model
Data to the BCG450-SP can be transmitted by means of a number of communication protocols and corresponding masters. Profibus defines a master class 1 asnormal control unit of the slave (typically a PLC) and a master class 2 as configuration and service unit. The following communication protocols are defined according
to the Profibus DPV1 standard.
MS0
MS1
MS2

Cyclic data traffic between master class 1 and slave
Acyclic data traffic between master class 1 and slave
Acyclic data traffic between master class 2 and slave

In the BCG450-SP, all functions that are made available by the gauge via Profibus
are organized in blocks. Access to the individual parameters of the blocks is possible via acyclic services or, for byte, integer and float values, also in cyclic data
traffic via the parameter channel.

Block types

The following block types are defined in the gauge.
Device Block

The Device Block contains all data that are required for describing the device and handling its state (status of Device
State Machine).

Transducer Block

The physical, process specific functions or interfaces between
the BCG450-SP and the process such as current and voltage
values are represented in transducer blocks.
The following transducer blocks are implemented:

Function Block12•

One of N Vacuum Gauge Transducer Block•

Heat Transfer Vacuum Gauge Transducer Block (Pirani)•

Hot Cathode Ion Gauge Transducer Block (BA)•

Diaphragm Gauge Transducer Block (CDG)

Application specific values such as pressure values that result
from or can be calculated from the values of the transducer
block are represented in the function blocks.
•

One of N Analog Input Function Block•

Analog Input Function Block, Instance 1, Instance 2,
Instance 3, Instance 4, Instance 5, Instance 6.

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The following table lists the services and parameters integrated in the Device Block(→ Appendix A for abbreviations).
ID

Name

Structure Data type15

Device Block State

SimpleUnsigned8

Bytes Access Value
1

1_R/W
2_R/W

Store

16

Block Type

SimpleOctet string

4

1/2_R

1

N

17

Device Type

SimpleVisible string

8

1/2_R

CG

N

18

Standard Revision Level

SimpleVisible string

9

1/2_R

E54-0997

N

19

Device Manufacturer
Identifier

SimpleVisible string

20

1/2_R

INFICON AG

N

20

Manufacturer
Model Number

SimpleVisible string

20

1/2_R

e.g.
353-554

N

21

Software or Firmware
Revision Level

SimpleVisible string

8

1/2_R

e.g. 1.01

N

22

Hardware Revision Level

SimpleVisible string

8

1/2_R

e.g. 1.0

N

23

Serial Number

SimpleVisible string

30

1/2_R

e.g. 100N

24

Device Configuration

SimpleVisible string

50

1/2_R

e.g.
BCG450-SP

N

25

Device State

SimpleUnsigned8

1

1/2_R

V

26

Exception Status

SimpleUnsigned8

1

0_XI
1/2_R

V

27

Exception Detail Alarm

Record→ below

-

1/2_R

V

28

Exception Detail
Warning

Record→ below

-

1/2_R

V

204 Common Exception
Detail Alarm 0

Simple

UINT8

1

1/2_R

V

205 Device Exception Detail
Alarm 0 … 3

StructArray of4 bytes

4

1/2_R

V

206 Device Exception Detail
Alarm 4 … 5

StructArray of2 bytes

2

1/2_R

V

207 Manufacturer Exception
Detail Alarm 0

SimpleUINT811/2 _RV

208 Common Exception
Detail Warning 0

SimpleUINT811/2 _RV

209 Device Exception Detail
Warning 0 … 3

StructArray of4 bytes4

1/2 _RV

210 Device Exception Detail
Warning 4 … 6

StructArray of 3
bytes

3

1/2_R

V

211 Manufacturer Exception
Detail Warning 0

Simple

UINT8

1

1/2_R

V

13

3.1.1 Information on the
Individual Indices3.1.1.1 Block Type ID 16

The Block Type Parameter contains an ID which describes the block type. The
block type ID of the Device Block 1. The other defined block types are listed inAppendix B.

3.1.1.2 Device Type ID 17

The Device Type identifies the device type which is connected to the field bus via
Profibus.
The Device Type of the BCG450-SP gauge is "CG", the abbreviation of"Combination Gauge".

3.1.1.3 Standard Revision Level
ID 18

This parameter describes the version of the "Sensor/Actuator Network Specific
Device Model" published by the SEMI® (Semiconductor Equipment and Materials
International, California), according to which the profile of this device has beendeveloped.
The fixed setting of this parameter is "E54-0997".

3.1.1.4 Device Manufacturer
Identifier ID 19

This parameter describes the manufacturer of the device, "INFICON AG".

3.1.1.5 Manufacturer Model
Number ID 20

This parameter represents the part number of the gauge (→ section "Validity").
BCG450-SP is available with two different vacuum connection types each, for example:
Gauge

Vacuum connection

Part number

BCG450-SP

25 KF

353-5543.1.1.6 Software or Firmware
Revision Level ID 21

This parameter indicates the software version of the Profibus option in the following
format: xxx_y.yy (where xxx is the version of the BCG450 firmware and y.yy is theversion of the profibus board).

3.1.1.7 Hardware Revision Level
ID 22

This parameter indicates the hardware version of the gauge in the format "1.0".

3.1.1.8 Device Configuration ID 24

This parameter indicates the device name.

3.1.1.9 Device State ID 25

This parameter indicates the status of the gauge. Due to the structure of the Device
State Machine, the following statuses are possible:
Parameter value Status
0
1
2
3
4
5
6

Undefined
Self testing
Idle
Self test exception
Executing
Abort
Critical fault

The device statuses are described in detail in section "Device Block, Device
Behavior".

14

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3.1.1.10 Exception Status ID 26

The Exception Status describes the alarm and warning states of the gauge in an"Expanded error output format".
A difference is made between warnings and errors.
Alarms and errors are divided into three groups (→ sections "Exception Detail
Alarm" and "Exception Detail Warning" for details):•

ALARM / Warning Device Common•

ALARM / Warning Device Specific•

ALARM / Warning Manufacturer
Specific

For errors that occur independently of
the type of device used, e.g. supply
error, RAM, ROM, or EEPROM error.
For device specific errors, e.g. filament
rupture (Pirani), or cathode rupture(BA).
For errors defined by the manufacturer
that are not mentioned in the standard.

In each of the above groups, there are several error or warning conditions. The individual fields are presented in the "Exception Detail Alarm" and "Exception Detail
Warning". If an error message occurs in "Exception Detail Alarm" or "Exception
Detail Warning”, the corresponding bit is set in the Exception Status. Therefore, if
bits 0 … 6 of the Exception Status are on "0" there is no warning message pending.
If a bit is set, the actual error can be read in the corresponding group.
The Exception Status is output in cyclic data and informs on the current error statususing only one byte. If an error occurs, the current error status can be read via
acyclic services or in cyclic data exchange via the parameter channel. This ensuresthat while the current error status is always available in the cyclic data, no unnecessary data overhead is transmitted.
BitFunction

Meaning0

ALARM, device common

The bit is set if an error of the Alarm
Device Common group is detected.

1

ALARM, device specific

The bit is set if an error of the Alarm
Device Specific group is detected.

2

ALARM, manufacturer specific

The bit is set if an error of the Alarm
Manufacturer Specific group is detected.

3

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-

-

4

WARNING, device common

The bit is set if an error of the Warning
Device Common group is detected.

5

WARNING, device specific

The bit is set if an error of the Warning
Device Specific group is detected.

6

WARNING, manufacturer
specific

The bit is set if an error of the Warning
Manufacturer Common group is detected.

7

Expanded Format

Is constantly on "1" and marks the use of
the expanded error output format.

15

3.1.1.11 Exception Detail AlarmID 27

If, in the Exception Status, one of the bits 0 … 2 is set, the current error can beread in the "Exception Detail Alarm" parameter. The "Exception Detail Alarm" parameter consists of a total of 12 bytes that inform on the error status of the gauge.
Due to the use of the expanded error output format, these bytes have the following
structure:
Byte NameNo
0Common Exception
Detail Alarm

16

Description

Value

Common Exception
Detail Size

Indicates the number of subsequent bytes that contain the
Common Exception Detail Alarm.

1

Common Exception
Detail 0

Contains current error messages
from the Common Exception
Detail Alarm group.

Depending onerror status

2

Common Exception
Detail 1

Contains current error messages
from the Common Exception
Detail Alarm group.

Depending onerror status

3

Device Exception
Detail Size

Indicates the number of subsequent bytes that contain the
Device Exception Detail Alarm.

4

Device Exception
Detail 0(CDG error data)

This error information from theCommon Exception Detail Alarmgroup refers to Capacitance
Diaphragm gauge.

Depending onerror status

5

Device Exception
Detail 1(CDG error data)

This error information from theCommon Exception Detail Alarmgroup refers to Capacitance
Diaphragm gauge.

Depending onerror status

6

Device Exception
Detail 2(Pirani error data)

This error information from theCommon Exception Detail Alarmgroup refers to Pirani.

Depending onerror status

7

Device Exception
Detail 3(Pirani error data)

This error information from theCommon Exception Detail Alarmgroup refers to Pirani.

Depending onerror status

8

Device Exception
Detail 4(BA error data)

This error information from theCommon Exception Detail Alarmgroup refers to BA.

Depending onerror status

9

Device Exception
Detail 5(BA error data)

This error information from theCommon Exception Detail Alarmgroup refers to BA.

Depending onerror status

10

Manufacturer
Exception Detail
Size

Indicates the number of subsequent bytes that contain the
Device Exception Detail Alarm.

11

Manufacturer
Exception Detail 0

Contains current error messages
from the Manufacturer Exception
Detail Alarm group.

Bit

Common Exception Detail 0

Bit

Common Exception Detail 1

0

0

0

0

2

7

1
Depending onerror status

1

0

1

0

2

EPROM exception

2

0

3

EPROM exception

3

0

4

RAM exception

4

0

5

0

5

0

6

0

6

0

7

0

7

0

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Device Exception
Detail Alarm

Bit

Device Exception Detail 0
Referring to Capacitancediaphragm sensor

Bit0

Diaphragm Failure

0

0

1

0

1

Electronics/sensor error

2

0

2

0

3

0

3

0

4

0

4

0

5

0

5

0

6

0

6

0

7

0

7

0

This byte is a copy of Sensor Alarm
byte 0 of Capacitance diaphragmsensor Transducer Block.

This byte is a copy of Sensor Alarm
byte 1 of Capacitance diaphragmsensor Transducer Block.

Bit

Bit

Device Exception Detail 2
Referring to Pirani

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Device Exception Detail 3
Referring to Pirani

0

0

0

0

1

0

1

Electronics/sensor error Pirani

2

0

2

0

3

0

3

0

4

0

4

0

5

0

5

0

6

0

6

0

7

0

7

0

This byte is a copy of Sensor Alarm
byte 0 of the Heat Transfer Vacuum
Gauge Transducer Block.

This byte is a copy of Sensor Alarm
byte 1 of the Heat Transfer Vacuum
Gauge Transducer Block.

Bit

Bit

Device Exception Detail 4
Referring to BA

Device Exception Detail 5
Referring to BA

0

0

0

1

0

1

0
Electronics/sensor error BA

2

0

2

0

3

0

3

0

4

0

4

0

5

0

5

0

6

0

6

0

7

0

7

0

This byte is a copy of Sensor Alarm
byte 0 of the Hot Cathode Ion Gauge
Transducer Block.

Manufacturer Exception
Detail Alarm 0

Device Exception Detail 1
Referring to Capacitancediaphragm sensor

Manufacturer Exception Detail 0 is set to "1",This byte is a copy of Sensor Alarm
byte 1 of the Hot Cathode Ion Gauge
Transducer Block.

if there is an internal communication
error in the gauge.

173.1.1.12 Exception Detail Warning
ID 28

If, in the Exception Status, one of bits 4 … 6 is set, the current warning can be readin the parameter "Exception Detail Warning". The Exception Detail Warning parameter consists of a total of 13 bytes that inform on the error status of the gauge.
Due to the use of the expanded error output format, these bytes have the following
structure:
Byte Name
No
0

Value

Common Exception
Detail Size

Indicates the number of subsequent bytes that contain the
Common Exception Detail
Warning.

1

Common Exception
Detail 0

Contains current error messages
from the Common Exception
Detail Warning group.

Depending on
warning status

2

Common Exception
Detail 1

Contains current error messages
from the Common Exception
Detail Warning group.

Depending on
warning status

3

Device Exception
Detail Size

Indicates the number of subsequent bytes that contain the
Device Exception Detail Warning.

4

Device Exception
Detail 0

One of N Status Extension.

Depending on
warning status

5

Device Exception
Detail 1(Capacitancediaphragm sensor)

This error information from theCommon Exception Detail
Warning group refers to
Capacitance diaphragm sensor.

Depending on
warning status

6

Device Exception
Detail 2(Capacitancediaphragm sensor)

This error information from theCommon Exception Detail
Warnings group refers to
Capacitance diaphragm sensor.

Depending on
warning status

7

Device Exception
Detail 3(Pirani)This error information from theCommon Exception Detail Alarmgroup refers to Pirani.

Depending on
warning status

8

Device Exception
Detail 4(Pirani)This error information from theCommon Exception Detail Alarmgroup refers to Pirani.

Depending on
warning status

9

Device Exception
Detail 5(BA)

This error information from theCommon Exception Detail Alarmgroup refers to BA.

Depending on
warning status

10

Device Exception
Detail 6(BA)

This error information from theCommon Exception Detail Alarmgroup refers to BA.

Depending on
warning status

11

Manufacturer
Exception Detail
Size

Indicates the number of subsequent bytes that contain the
Device Exception Detail Warning.

Manufacturer
Exception Detail

Contains current error messages
from the Manufacturer Exception
Detail Alarm group.

1218

Description2

51
Depending on
warning status

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Common Exception
Detail Warning

Bit
0

Common Exception Detail 0
0

Bit
0

Common Exception Detail 1
0

1

0

1

0

2

EPROM exception

2

0

3

EPROM exception

3

0

4

RAM exception

4

0

5

0

5

0

6

0

6

0

7

0

7

0

The warning bits are set in the same way as the error bits because here, warnings
have the same meaning as errors.
Bit

Device Exception
Detail Warning

Device Exception Detail 0(2005-06)

BCG450SPv1.cp

Device Exception Detail 1
Referring to CDG0

Bit set if
Reading Invalid

0

0

1

Bit set if
Device Overrange

1

0

2

Bit set if
Device Underrange

2

0

3

0

3

0

4

0

4

0

5

0

5

0

6

0

6

0

7

0

7

0

This byte is a copy of the One Of N
Vacuum Gauge Transducer Block.

This byte is a copy of Sensor
Warning byte 0 of Capacitancediaphragm sensor Transducer Block
Sensor Warning Byte 0.

Bit

Bit

Device Exception Detail 2
Referring to CDG

Device Exception Detail 3
Referring to Pirani

0

0

0

0

1

Electronics/Sensor Warning

1

0

2

0

2

0

3

0

3

0

4

0

4

0

5

0

5

0

6

0

6

0

7

0

7

0

This byte is a copy of Sensor
Warning byte 1 of Capacitancediaphragm sensor Transducer Block.

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Bit

This byte is a copy of Sensor
Warning byte 0 of the Heat Transfer
Vacuum Gauge Transducer Block.

19

Bit

Device Exception Detail 4
Referring to Pirani

Bit

Device Exception Detail 5
Referring to BA

0

0

0

0

1

Electronics/sensor warning
Pirani

1

0

2

0

2

0

3

0

3

0

4

0

4

0

5

0

5

0

6

0

6

0

7

0

7

0

This byte is a copy of Sensor
Warning byte 1 of the Heat Transfer
Vacuum Gauge Transducer Block.

Bit

This byte is a copy of Sensor
Warning byte 0 of the Hot CathodeIon Gauge Transducer Block.

Device Exception Detail 6
Referring to BA

0

0

1

Electronics/sensor warning

2

0

3

Pressure too high for degas

4

0

5

0

6

0

7

0

This byte is a copy of Sensor
Warning byte 1 of the Hot CathodeIon Gauge Transducer Block.

Manufacturer Exception
Detail Warning

Bit

Manufacturer Exception Detail Warning

0

0

1

Relay A set if atmospheric pressure is reached.

2

Relay B set if atmosphere pressure is reached.

3

0

4

0

5

0

6

0

7

0

The following parameters are copies of the ID 27 and ID 28. They areused only if you want to access these parameters by the parameterchannel.

3.1.1.13 Copy Common Exception
Detail Alarm 0
ID 204This parameter corresponds to the Common Exception Detail Alarm of the
Exception Detail Alarm (ID 27).

3.1.1.14 Copy Device Exception
Detail Alarm 0 … 3
ID 205This parameter corresponds to the Device Exception Detail Alarm Byte 0 … 3 ofthe Exception Detail Alarm (ID 27).

3.1.1.15 Copy Device Exception
Detail Alarm 4 … 5
ID 206This parameter corresponds to the Device Exception Detail Alarm Byte 4 … 5 of
the Exception Detail Alarm (ID 27).

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3.1.1.16 Copy Manufacturer
Exception Detail Alarm 0
ID 207This parameter corresponds to the Manufacturer Exception Detail Alarm Byte 0 of
the Exception Detail Alarm (ID 27).

3.1.1.17 Copy Common Exception
Detail Warning 0
ID 208This parameter corresponds to the Common Exception Detail Warning Byte 0 of
the Exception Detail Warning (ID 28).

3.1.1.18 Copy Device Exception
Detail Warning 0 … 3
ID 209This parameter corresponds to the Device Exception Detail Warning Byte 0 … 3 ofthe Exception Detail Warning (ID 28).

3.1.1.19 Copy Device Exception
Detail Warning 4 … 6
ID 210This parameter corresponds to the Device Exception Detail Warning Byte 4 … 6
the Exception Detail Warning (ID 28).

3.1.1.20 Copy Manufacturer
Exception Detail
Warning 0 ID 211

This parameter corresponds to the Manufacturer Exception Detail Warning Byte 0of the Exception Detail Warning (ID 28).

3.1.2 Device Block,
Device Behavior

The BCG450-SP behaves as described in the status diagram below.

(0)

NORMAL

(13)

(13
)

3)
(1

(14)

INIT

RUNNING

(10)

IDLE

(4)
(5)

ABORT

(8)

(3)

SELFTESTEXCEPTION

OK

)
(1

(2)

SELFTESTINGEXECUTING(9)

CRITICAL
FAULT

After the start, the gauge independently runs through the INIT and SELFTESTING
status and eventually changes to the IDLE status (if there is no error) or to the
SELFTEST_EXCEPTION status (if there is a gauge error).
When data traffic is taken up, a difference has to be made between cyclic andacyclic data traffic.

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Cyclic data traffic

As soon as cyclic data interchange is taken up, the gauge automatically changes tothe EXECUTING status.

Acyclic data traffic

In acyclic data traffic, a START service has to be transmitted to bring the gauge tothe EXECUTING status.

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21

Device statuses

3.1.2.1 Device Block
State Command

22

Status name

Description

NORMALThe communication interface can respond to commands. All defined blocks of the gauge exist.

RUNNINGAll block instances are initialized and the individual
parameters have their initial or default values.

SELFTESTING

In this status, the gauge performs a selftest.

IDLE

All blocks defined in the gauge are initialized and thecomplete hardware has been tested and found freeof errors. The value defined in the Safe State is output as measured value.

SELFTESTEXCEPTION

During the self test, an error has been detected. The
gauge has changed to the SELFTESTEXCEPTION
status. The cause of the error can be found in theattributes Device Exception Detail Alarm/Warning of
the Device Block. The value defined in the Safe Stateis output as measured value.

EXECUTING

The gauge functions normally and outputs the measured value.

ABORTThe Device Block is in the ABORT status. The gauge
specific measurement functions are not carried out.

CRITICALFAULT

A device error has occurred. The gauge specificmeasurement functions are not carried out. The
value defined in the Safe State is output as measured value.

There are a number of special commands for bringing the gauge into a status it
does not automatically go to.
ID

Name

Structure Data type15

Device Block
State
Command

SimpleUnsigned8

Bytes

Access

Store

Range

1

1_R/W
2_R/W

N

→ below

ID
value

Name

Description0

Inactive

No action.

1

Reset

Used for reinitializing the device.

2

Abort

Brings the device to the ABORT status.

3

Recover

Used for bringing the device from the ABORT
status into the Recovered State IDLE.

4

ExecuteBrings the unit to the EXECUTING status, in which
the gauge functions normally. As soon as cyclic
data traffic is initialized, this status command is
executed automatically.

5

Stop

Brings the gauge to the IDLE status.

6

Perform
Diagnostic

Stops the running activity and starts SELFTEST.

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3.2 Analog Input Block

All gauge functions of the BCG450-SP are described in the Analog Input Block.
Since the gauge includes three measuring systems, there are also three Analog
Input Block Instances representing the Pirani measuring part, the ionization measuring part (BA) and the capacitance diaphragm gauge part (CDG) respectively.

3.2.1 One Of N Analog Input
Function Block / SLOT 1

1)

IDName 1)

Structure Data type

16

Block Type

Simple46

Channel InstanceSelector

Simple47

PV Selector

SimpleBytes

AccessStore

Octet string

4

2_R

N

Unsigned8

1

1/2_R/WN

Unsigned8

1

0_XI 1/2_R

D

The above parameters are described below.

3.2.1.1 Block TypeThe value of the Block Type ID is "3" (→ table in Appendix A).

3.2.1.2 Channel Instance Selector

The gauge has three instances of the Analog Input Function Block and three instances of the Vacuum Gauge Transducer Block, or one instance of each block permeasuring systems (Capacitance diaphragm sensor, Pirani and BA). There are two
additional instances for describing the switching functions (→ section "Analog
Sensor Input Function Block", Instances 5 and 6).
However, there is only one address range for both, querying and setting the corresponding parameters. The Parameter Channel Instance Selector is used for defining the parameters that are written into the address range.
If the Parameter Channel Instance Selector is set to "1", the attributes of Instance 1
are mapped into that address range and can be written or read by addressing
Slot ⇒ Instance ⇒ Parameter-ID.

3.2.1.3 PV Selector

The PV Selector is determined by the gauge and defines the Analog Input Function
Block Instance from which the measured value is copied into the cyclic output datatelegrams. Therefore, the value output in the cyclic data is always the measured
value of the active instance, i.e. the one that is currently measuring. While thegauge is measuring in the BA range, the measured value of the ionization vacuum
meter is output in the cyclic data and while the gauge is measuring in the Pirani
range, the measured value of the Pirani is output.
The measured values of Instances 5 and 6 (thresholds of the switching
functions) are not output in the cyclic data.
The pressure ranges, in which measurement is performed either by the Pirani
measuring part, by the BA measuring part or bye the Capacitance diaphragm sensor measuring part, and which are thus called "active", are indicated below:

Measuring range

Pressure [mbar]

activeinstance

1 < p < 1500

CDG

5.5×10-3 < p ≤ 10

Pirani5×10-10 < p < 2×10-2

BA

In the pressure range 1 … 10 mbar and 5.5×10-3… 2×10-2 mbar an averaging of
the two corresponding measurement principles is done. The definition of one
instance as the active instance in this pressure range is done approximately in the
middle of the crossover region.

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23

3.2.2 Analog Sensor Input
Function Block
Instance 1 / SLOT 1

3.2.2.1 Process Value

Instance 1 of the Analog Sensor Input Function Blocks describes the functionalityof the Pirani measuring part of the gauge.
The following attributes are supported:
ID

Name

Structure Data type

Bytes

AccessStore

19

Process Value(PV)

SimpleAccording toParameter Data
Type

-

0_XI
1_R
2_R

D

20

StatusSimpleUnsigned8

1

0_XI
1/2_R

D

21

Data Type

SimpleUnsigned8

1

2_R/W

N

22

Data Units

SimpleUnsigned16

2

2_R/W

N

23

Reading Valid

SimpleBoolean

1

1_R
2_R

D

24

Full Scale

SimpleAccording toData Type value(Parameter 21)

-

1/2_R

N

39

Safe State

SimpleUnsigned8

1

1/2_R/WN

40

Safe Value

SimpleAccording toData Type value(Parameter 21)-

1/2_R/WN

44

Overrange

SimpleAccording toData Type value(Parameter 21)

-

1/2_R

N

45

Underrange

SimpleAccording toData Type value(Parameter 21)

-

1/2_R

N

The Process Value contains the measured value of the Pirani Device Instance inthe currently selected data unit (ID 22) and in the selected data type (ID 21).
If the device is not in the EXECUTING State (ID 25, Device Block), the value defined in the Safe State is output.
Values output in the data unit COUNTS can be converted into a pressure value bymeans of the following formulas:
Calculation of the pressure (PV is the abbreviation used for Process Value):
PVmbar=10(COUNTS / 2000) - 12.5

PVTorr=0.75006168 × PVmbar

PVMicron=

10-3 × PVTorr

PVPa

=

100 × PVmbar

3.2.2.2 Status

This parameter remains on "0".

3.2.2.3 Data TypeTwo data types are supported: Float and Integer16.
In cyclic data exchange, the data type cannot be modified. The data type setting
can only be modified when the gauge is in the IDLE status. By defining the configuration data for cyclic data exchange (selection of standard telegrams), the data typeused in the selected standard telegram is taken over. All settings previously madein acyclic data traffic are thus overwritten.
If the data type is set in one instance, that data type setting applies to all instances.
Likewise, when a standard telegram is selected, the data type used by thatstandard telegram will be valid for all instances:24

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3.2.2.4 Data Unit

CodingData type3

Integer16

8

Float

The gauge supports the following pressure units:
CodingData type

1001

COUNTS

1301

Torr

1302

mTorr (Micron)

1308

mbar

1309

PascalFor safety reasons, it is not possible to change the pressure unit while
the gauge is cyclically interchanging data with a DP/V0 master.
The data unit setting can only be modified when the gauge is in the IDLE
status.
In cyclic data traffic, the data unit must be set in the User Parameter
Data. All settings previously made in acyclic data traffic are overwritten(→ section "User Parameter Data").
If the data unit is set in one instance, that data unit setting applies to all
instances. Likewise, the data unit setting made in the User Parameter
Data is valid for all instances.

3.2.2.5 Reading Valid

This parameter indicates that the pressure reading is within a valid range, whichmeans that:•

The gauge is in the EXECUTING status.

•

There is no error (ID 26 or 27 of the Device Block)•

The measured value is lower than the overrange value and higher than theunderrange value.

If this value is set to zero, the pressure reading is not valid. In such acase, either check Exception Status (ID 26, Device Block) to find out
whether there is an error or check One Of N Status Extension (ID 120,
One Of N Vacuum Gauge Transducer Block) to find out whether themeasured value is out of the specified measuring range (overrange orunderrange mode).

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This parameter contains the valid maximum value of the pressure reading(1000 mbar) in the currently selected data unit and data type.
Pressure unit

Full scale

COUNTS

31000

Torr

750.06168

mTorr (Micron)

750061.68

mbar

1000

Pascal10000025

3.2.2.7 Safe State

When the gauge is not in the EXECUTING status (ID 25, Device Block) or if there
is a device error, a value defined by Safe State is output as pressure value. You
can select among:
•

"0"

•

Full scale•

Last valid value•

Safe Value (user-definable in ID 40)
Safe State

CodingPV behavior

Zero

0

The Process Value (measured value ID 19) is set
to 0.

Full Scale

1

The Process Value (measured value ID 19) is set
to the full scale value (ID 24).

Hold Last Value

2

The Process Value is set to the last valid value
obtained in the EXECUTING status.

Use Safe Value

3

The Process Value (measured value ID 19) is set
to the Safe Value (ID 40).

3.2.2.8 Safe ValueThe Safe Value is the value output with the Process Value parameter (ID 19) whenan error occurs or the gauge goes to the NOT EXECUTING status. If this value isset to zero, it will remain on zero when the data unit is changed.

3.2.2.9 Overrange

Overrange is the highest valid measured value at which Reading Valid is stillon "1".

3.2.2.10 Underrange

26

Pressure unit

Overrange

COUNTS

31000

Torr

750.06168

mTorr (Micron)

750061.68

mbar

1000

Pascal100000Underrange is the lowest valid measured value at which Reading Valid is stillon "1".
Pressure unit

Underrange

COUNTS

20480.7254

Torr

4.12534×10-3

mTorr (Micron)

4.12534

mbar
Pascal5.5×10-3
0.55

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3.2.3 Analog Sensor
Input Function Block
Instance 2 / SLOT 1

3.2.3.1 Process Value

Instance 2 of the Analog Sensor Input Function Block describes the functionality of
the BA measuring part of the gauge.
In Instance 2, the same attributes as in Instance 1 are supported:
ID

Name

Structure Data type

Bytes

AccessStore

19

Process Value(PV)

SimpleAccording toParameter Data
Type

-

0_XI
1_R
2_R

D

20

StatusSimpleUnsigned8

1

0_XI
1/2_R

D

21

Data Type

SimpleUnsigned8

1

2_R/W

N

22

Data Units

SimpleUnsigned16

2

2_R/W

N

23

Reading Valid

SimpleBoolean

1

1_R
2_R

D

24

Full Scale

SimpleAccording toData Type value(parameter 21)

-

1/2_R

N

39

Safe State

SimpleUnsigned8

1

1/2_R/WN

40

Safe Value

SimpleAccording toData Type value(parameter 21)-

1/2_R/WN

44

Overrange

SimpleAccording toData Type value(parameter 21)

-

1/2_R

N

45

Underrange

SimpleAccording toData Type value(parameter 21)

-

1/2_R

N

The Process Value contains the measured value of the BA Device Instance in thecurrently selected data unit (ID 22) and in the selected data type (ID 21).
If the device is not in the EXECUTING status (ID 25, Device Block), the value
defined in the Safe State is output.
Values output in the data unit COUNTS can be converted into a pressure value bymeans of the following formulas:
Calculation of the pressure (PV is the abbreviation used for Process Value):
PVmbar=10(COUNTS / 2000) - 12.5

PVTorr=0.75006168 × PVmbar

PVMicron=

10-3 × PVTorr

PVPa

=

100 × PVmbar

3.2.3.2 Status

This parameter is remains on "0".

3.2.3.3 Data TypeTwo data types are supported: Float and Integer16.
In cyclic data traffic, the data type cannot be modified. The data type setting canonly be modified when the gauge is in the IDLE status. By defining the configuration data for cyclic data traffic (selection of standard telegram), the data type usedin the selected standard telegram is taken over. All settings previously made inacyclic data traffic are thus overwritten.
If the data type is set in one instance, that data type setting applies to all instances.
Likewise, when a standard telegram is selected, the data type used by thatstandard telegram will be valid for all instancestira41e1(2005-06)

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CodingData type3

Integer16

8

Float
27

3.2.3.4 Data Unit

The gauge supports the following pressure units:
CodingPressure unit

1001

COUNTS

1301

Torr

1302

mTorr (Micron)

1308

mbar

1309

PascalFor safety reasons, it is not possible to change the pressure unit while
the gauge is cyclically interchanging data with a DP/V0 master.
The data unit setting can only be modified when the gauge is in the IDLE
status.
In cyclic data traffic, the data unit must be set in the User Parameter
Data. All settings previously made in acyclic data traffic are overwritten(→ section "User Parameter Data").
If the data unit is set in one instance, that data unit setting applies to all
instances. Likewise, the data unit setting made in the User Parameter
Data is valid for all instances.

3.2.3.5 Reading Valid

This parameter indicates that the pressure reading is within a valid range, whichmeans that:•

The gauge is in the EXECUTING status.

•

There is no error (ID 26 or 27 of the Device Block)•

The measured value is lower than the overrange value and higher than theunderrange value.

If this value is set to zero, the pressure reading is not valid. In such acase, either check Exception Status (ID 26, Device Block) to find out
whether there is an error or check One Of N Status Extension (ID 120,
One Of N Vacuum Gauge Transducer Block) to find out whether themeasured value is out of the specified measuring range (overrange orunderrange mode).

3.2.3.6 Full Scale

3.2.3.7 Safe State

28

This parameter contains the valid maximum value of the pressure reading(1000 mbar) in the currently selected data unit and data type.
Pressure unit

Full scale

COUNTS

21602

Torr

1.5×10-2

mTorr (Micron)

15

mbar

2×10

Pascal2-2

When the gauge is not in the EXECUTING state (ID 25, Device Block) or if there isa device error, a value defined by Safe State is output as pressure value. You canselect among:
•

"0"

•

Full scale•

Last valid value•

Safe Value (user-definable in ID 40)

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Safe State

CodingPV behavior

Zero

0

The Process Value (measured value ID 19) is set
to 0.

Full Scale

1

The Process Value (measured value ID 19) is set
to the full scale value (ID 24).

Hold Last Value

2

The Process Value is set to the last valid value
obtained in the EXECUTING status.

Use Safe Value

3

The Process Value (measured value ID 19) is set
to the Safe Value (ID 40).

3.2.3.8 Safe ValueThe Safe Value is the value output with the Process Value Parameter (ID 19) whenan error occurs or the gauge goes to the NOT EXECUTING status. If this value isset to zero, it will remain on zero when the data unit is changed.

3.2.3.9 Overrange

Overrange is the highest valid measured value at which Reading Valid is stillon "1".
Pressure unit

3.2.3.10 Underrange

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Overrange

COUNTS

21602

Torr

1.5×10-2

mTorr (Micron)

15

mbar

2×10-2

Pascal2

Underrange is the lowest valid measured value at which Reading Valid is stillon "1".
Pressure unit

Underrange

COUNTS6397.95

Torr

3.7503×10-10mTorr (Micron)3.7503×10-7

mbar

5.0×10-10

Pascal

5.0×10-829

3.2.4 Analog Sensor Input
Function Block
Instance 3 / SLOT 1

3.2.4.1 Process Value

Instance 3 of the Analog Sensor Input Function Block describes the functionality of
the Capacitance diaphragm sensor measuring part of the gauge.
In Instance 3, the same attributes as in Instance 1 are supported:
ID

Name

Structure Data type

Bytes

AccessStore

19

Process Value(PV)

SimpleAccording toParameter Data
Type

-

0_XI
1_R
2_R

D

20

StatusSimpleUnsigned8

1

0_XI
1/2_R

D

21

Data Type

SimpleUnsigned8

1

2_R/W

N

22

Data Units

SimpleUnsigned16

2

2_R/W

N

23

Reading Valid

SimpleBoolean

1

1_R
2_R

D

24

Full Scale

SimpleAccording toData Type value(parameter 21)

-

1/2_R

N

39

Safe State

SimpleUnsigned8

1

1/2_R/WN

40

Safe Value

SimpleAccording toData Type value(parameter 21)-

1/2_R/WN

44

Overrange

SimpleAccording toData Type value(parameter 21)

-

1/2_R

N

45

Underrange

SimpleAccording toData Type value(parameter 21)

-

1/2_R

N

The Process Value contains the measured value of the Capacitance diaphragmsensor Device Instance in the currently selected data unit (ID 22) and in the selected data type (ID 21).
If the device is not in the EXECUTING status (ID 25, Device Block), the value
defined in the Safe State is output.
Values output in the data unit COUNTS can be converted into a pressure value bymeans of the following formulas:
Calculation of the pressure (PV is the abbreviation used for Process Value):
PVmbar=10(COUNTS / 2000) - 12.5

PVTorr=0.75006168 × PVmbar

PVMicron=

10-3 × PVTorr

PVPa

=

100 × PVmbar

3.2.4.2 Status

This parameter is remains on "0".

3.2.4.3 Data TypeTwo data types are supported: Float and Integer16.
In cyclic data traffic, the data type cannot be modified. The data type setting canonly be modified when the gauge is in the IDLE status. By defining the configuration data for cyclic data traffic (selection of standard telegram), the data type usedin the selected standard telegram is taken over. All settings previously made inacyclic data traffic are thus overwritten.

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If the data type is set in one instance, that data type setting applies to all instances.
Likewise, when a standard telegram is selected, the data type used by thatstandard telegram will be valid for all instances.

3.2.4.4 Data Unit

CodingData type3

Integer16

8

Float

The gauge supports the following pressure units:
CodingPressure unit

1001

COUNTS

1301

Torr

1302

mTorr (Micron)

1308

mbar

1309

PascalFor safety reasons, it is not possible to change the pressure unit while
the gauge is cyclically interchanging data with a DP/V0 master.
The data unit setting can only be modified when the gauge is in the IDLE
status.
In cyclic data traffic, the data unit must be set in the User Parameter
Data. All settings previously made in acyclic data traffic are overwritten(→ section "User Parameter Data").
If the data unit is set in one instance, that data unit setting applies to all
instances. Likewise, the data unit setting made in the User Parameter
Data is valid for all instances.

3.2.4.5 Reading Valid

This parameter indicates that the pressure reading is within a valid range, whichmeans that:•

The gauge is in the EXECUTING status.

•

There is no error (ID 26 or 27 of the Device Block)•

The measured value is lower than the overrange value and higher than theunderrange value.
If this value is set to zero, the pressure reading is not valid. In such acase, either check Exception Status (ID 26, Device Block) to find out
whether there is an error or check One Of N Status Extension (ID 120,
One Of N Vacuum Gauge Transducer Block) to find out whether themeasured value is out of the specified measuring range (overrange orunderrange mode).

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This parameter contains the valid maximum value of the pressure reading in thecurrently selected data unit and data type.
Pressure unit

Full scale

COUNTS

31352

Torr

1125.09252

mTorr (Micron)

1125092

mbar

1500

Pascal15000031

3.2.4.7 Safe State

When the gauge is not in the EXECUTING status (ID 25, Device Block) or if there
is a device error, a value defined by Safe State is output as pressure value. You
can select among:
•

"0"

•

Full scale•

Last valid value•

Safe Value (user-definable in ID 40)
Safe State

CodingPV behavior

Zero

0

The Process Value (measured value ID 19) is set
to 0.

Full Scale

1

The Process Value (measured value ID 19) is set
to the full scale value (ID 24).

Hold Last Value

2

The Process Value is set to the last valid value
obtained in the EXECUTING status.

Use Safe Value

3

The Process Value (measured value ID 19) is set
to the Safe Value (ID 40).

3.2.4.8 Safe ValueThe Safe Value is the value output with the Process Value Parameter (ID 19) whenan error occurs or the gauge goes to the NOT EXECUTING status. If this value isset to zero, it will remain on zero when the data unit is changed.

3.2.4.9 Overrange

Overrange is the highest valid measured value at which Reading Valid is stillon "1".

3.2.4.10 Underrange

32

Pressure unit

Overrange

COUNTS

31352

Torr

1125.09252

mTorr (Micron)

1125092

mbar

1500

Pascal150000Underrange is the lowest valid measured value at which Reading Valid is stillon "1".
Pressure unit

Underrange

COUNTS

25000

Torr

0.75006168

mTorr (Micron)

750.06168

mbar

1

Pascal100

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3.2.5 Analog Sensor Input
Function Block
Instances 5 and 6 /SLOT 1

Instances 5 and 6 of the Analog Sensor Input Function Block describe the functionality of the two switching functions (Setpoint A / Setpoint B) of the gauge(setting the switching functions →[2], [3]):Instance

Setpoint

5

A

6

B

With Process Values (ID 19), the current threshold setting (made by means of thepotentiometers) is read; with Status, the relay status (open/closed) can be read.

3.2.5.1 Process Value

ID

Name

Structure Data type

Bytes

AccessStore

19

Process Value(PV)

SimpleUnsigned16

-

1_R
2_R

D

20

StatusSimpleUnsigned8

1

1_R
2_R

D

21

Data Type

SimpleUnsigned8

1

2_R
2_W

N

22

Data Units

SimpleUnsigned16

2

2_R
2_W

N

23

Reading Valid

SimpleBoolean

1

1_R
2_R

D

201

Setpoint
Function

SimpleBoolean

1

1_W
2_W

N

202

Percentage ofatmosphere

SimpleUnsigned 16

2

1_W
2_W

N

203

Atmosphericpressurereached

SimpleBoolean

1

1_W
2_W

D

The Process Value contains the current setting of the threshold potentiometers for"Setpoint A" and "Setpoint B" in the currently selected data unit and data type.
If the pressure drops below the set threshold, the relay is closed. If after that, thepressure rises above that threshold with a hysteresis of 10%, the relay is opened
again (→
[2], [3]).
The Process Value PV is output in the currently selected data unit and data type.
Values output in the pressure unit COUNTS can be converted into a pressure value
by means of the following formulas:
pmbar

=

10(COUNTS / 2000) - 12.5

The threshold voltages of the Setpoint potentiometer converted into a pressure
value by means of the following formulas:pmbar= 10(1.23011 × U) - 9.30102999

Where:

U is the threshold voltage [V] of the corresponding Setpoint (A, B),
measured at the D-Sub connector (sensor cable connector) of the gauge(→[2], [3]).

The upper pressure limit of the gauge is 1500 mbar ⇒ the resulting
pressure value of the attribute "Percentage of Atmosphere" must be lessthan 1500 mbar, otherwise the relay may never be set. The allowed
range for "Percentage of Atmosphere" is 1 … 140%.

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3.2.5.2 Status

If the pressure drops below the set threshold, the relay is activated (normally open
contact closed). If the pressure then rises above the set threshold with a hysteresisof 10%, the relay is deactivated again (normally open contact open).
Bit

Definition

0

0

1

Low Alarm Exception: 0 = cleared, 1 = set

2

0

3

Low Warning Exception: 0 = cleared, 1 = set

4

0

5

0

6

0

7

0

3.2.5.3 Data Type

Description → Instance 1.

3.2.5.4 Data Unit

Description → Instance 1.

3.2.5.5 Reading Valid

This parameter is always on "1".

3.2.5.6 Setpoint Function

Defines whether the relays are controlled by the according potentiometer or by the
result of the comparison between atmosheric pressure sensor and the vacuum(CDG) pressure value.
Byte value Definition0

Setpoint function

1

atmosphere control (default) 1)

If atmosphere control 1) is activated and the pressure of in the process chamber(active sensor instance) falls below the process value of this instance 5 or 6, therelay will be closed.

The relay is opend if any of the sensor alarms occurs. The device state
has to be EXECUTING to enable the relay to close.
1)

3.2.5.7 "Percentage ofAtmosphere"

34

General description of Atmosphere control →[3].

If the pressure value (active value) is within a "window" specified by this attributefrom the atmosphere pressure sensor value (instance 4), the relay will be closed.

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Setpoint function"Atmosphere Control"

Atmospheric pressure threshold

Atmospheric pressure × N= —————————————
100

Where:
Atmospheric pressure threshold[mbar] :AtmosphericpressureN[mbar] :[%] :If the pressure inside the vacuum chamber rises
above this threshold, the relay "Atmosheric pressure reached" is energized.
Atmospheric pressure (100%, ambient) 1)"Percentage of Atmosphere"(1 … 140%, default value = 5%)(Example values in the diagram below are printed in italic)

Measuring signal(Pressure p)

Upper limit of measuring range of gauge

1500 mbar

Atmospheric pressure (100%, ambient)

980 mbar

1)lue"Percentage of Atmosphere"
va
ed
(85%)
r
su
(Atmospheric pressureeaMthreshold)

833 mbar
816 mbar

Hysteresis(2% of atmosphericpressure threshold)

Relay status "Atmospheric pressure reached"1)

The (piezo) sensor measuring atmospheric pressure can be calibrated to the value of the Capacitance Diaphragm Gauge pressure(→  41).

ID202 value

The value "Percentage of Atmosphere" has to be entered as follows:N'
Where:=
NN'

10 × N=="Percentage of Atmosphere", as described above
Value to be entered in ID202(range 10 … 1400 1 … 140%)

Example: For a "Percentage of Atmosphere" of 50(%) enter 500 in ID202.

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3.2.5.8 Atmosphere Reached

If the Setpoint Function is set to Atmosphere Control and the relay is closed, thisbyte is set to one, if the relay is open or not energized, the value is zero.
Additionally the following information is copied into the Manufacturer Exeption
Detail Warning:•

Bit 1 of Manufacturer Exeption Detail Warning is set if relay A is energized andatmospheric pressure is reached.

•

Bit 2 of Manufacturer Exeption Detail Warning is set if relay B is energized andatmospheric pressure is reached.

3.3 Transducer Block3.3.1 One Of N Vacuum Gauge
Transducer Block /SLOT 1
3.3.1.1 One Of N Status Extension

ID

Name

Structure Data type120

One Of N Status
Extension

SimpleBytes Access Store

UINT8

1

1_R
2_R

V

This parameter indicates whether the overrange or underrange of the gauge is
exceeded.
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

0

0

0

0

0

Underrange
ExceededOverrange
Exceeded

Reading
InvalidIf the gauge is operated in its overrange or underrange (p < 5×10-10 mbar orp > 1500 mbar), the corresponding bit and additionally the bit "Reading Invalid" isset.
If an error occurs, the bit "Reading Invalid" as well as the corresponding error bitsin Device Block (ID 26, 27, 28 Device Block) are set.

3.3.2 Heat Transfer Vacuum
Gauge Transducer
Block / SLOT 1 /Instance 1

ID

Name

Structure Data type

Bytes Access Store

101

Block Type

SimpleOctet string

4

2_R

102

Status Extension

Simple

UINT8

1

1/2_R

V

103

Sensor Alarm

StructArray of 2 bytes

2

1/2_R

V

104

Sensor Warning

StructArray of 2 bytes

2

1/2_R

V

3.3.2.1 Block TypeAccording to the table in Appendix A, the Block Type ID has the value "13".

3.3.2.2 Status Extension

This parameter indicates whether the overrange or underrange of the Heat
Transfer Vacuum Gauge device instance is exceeded.
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

0

0

0

0

0

Underrange
ExceededOverrange
Exceeded

Reading
InvalidIf the instance is operated in its overrange or underrange, the corresponding bit
and additionally the bit "Reading Invalid" is set.
If an error occurs, the bit "Reading Invalid" as well as the corresponding error bitsin Device Block (ID 26, 27, 28 Device Block) are set.

3.3.2.3 Sensor Alarm

This parameter indicates the detectable errors occurring in connection with the
Pirani measuring part. The present implementation allows detection of one error.

Byte 0
Byte 1

Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

0

0

0

0

0

0

0

0

0

0

0

0

0

Bit0
0

Electronics Failure

1)

0

1)

Electronics Failure includes a sensor error.
The Sensor Alarm bits defined here are copied into the Device Block ID 27 in the"Device Exception Detail Alarm" range of the Pirani measuring part.

36

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3.3.2.4 Sensor WarningThis parameter indicates the detectable warnings occurring in connection with the
Pirani measuring part. The present implementation allows detection of one warning.
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

Byte 0

0

0

0

0

0

0

0

0

Byte 1

0

0

0

0

0

0

Electronics Warning

0

The Sensor Warning bits defined here are copied into the Device Block ID 28 in the"Device Exception Detail Warning" range of the Pirani measuring part.

3.3.3 Hot Cathode Ion Gauge
Transducer Block /SLOT 1 / Instance 2

ID

Name

Structure Data type14

Hot Cathode
Block State
CommandRec

101 Block Type

Simple102 Status
Extension

Bytes AccessStore Initial Value

1

1_W
2_W

FALSE

Octet
string4

2_R

16

Simple

UINT8

1

1_R
2_R

V

0

103 Sensor
Alarm

StructArray of2 bytes

2

1_R
2_R

V

0

104 Sensor
Warning

StructArray of2 bytes

2

1_R
2_R

V

0

105 Emission
StatusSimpleBoolean

1

1_R/W
2_R/W

V

0

106 Emission
Current

Simple

FLOAT

4

1_R/W
2_R/W

NV

109 Degas
StatusSimpleBoolean

1

1_R
2_R

V

201 Emission
User Mode
State

SimpleBoolean

1

1_R
2_R

V

0

3.3.3.1 Block TypeAccording to the table in Appendix A, the Block Type ID has the value "16".

3.3.3.2 Status Extension

This parameter indicates that the overrange or underrange of the Hot Cathode Ion
Gauge instance is exceeded.
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

0

0

0

0

0

Underrange
ExceededOverrange
Exceeded

Reading
InvalidIf the instance is operated in its overrange or underrange, the corresponding bit
and additionally the bit "Reading Invalid" is set.
If an error occurs, the bit "Reading Invalid" as well as the corresponding error bitsin Device Block (ID 26, 27, 28 Device Block) are set.

3.3.3.3 Sensor Alarm

This parameter indicates the detectable errors occurring in connection with the BA
measuring part. The present implementation allows detection of one error.

Byte 0
Byte 1
1)

Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

0

0

0

0

0

0

0

0

0

0

0

0

0

Electronics Failure

Bit0
0
1)

0

Electronics Failure includes a sensor error.

The Sensor Alarm bits defined here are copied into the Device Block ID 27 in the"Device Exception Detail Alarm" range of the BA measuring part.

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37

3.3.3.4 Sensor WarningThis parameter indicates the detectable warnings occurring in connection with the
BA measuring part. The present implementation allows detection of one warning.
Bit7 Bit6 Bit5 Bit4

Bit3

Bit2

Bit1

Bit0

Byte 0

0

0

0

0

0

0

0

0

Byte 100

00Pressure toohigh for degas

0Electronics
Warning

0

The Sensor Warning bits defined here are copied into the Device Block ID 28 in the"Device Exception Detail Warning" range of the BA measuring part.

3.3.3.5 Emission Status

3.3.3.6 Emission Current

3.3.3.7 Degas Status

3.3.3.8 Emission User Mode State

This parameter indicates the emission status of the gauge.
Emission status

Bit 1

False

0

0

Emission Off

TRUE

0

1

Emission current low

TRUE

1

0

Emission current high

TRUE

1

1

Degas

This parameter indicates the value of the emission current in mA.
Emission current [mA]

Bit 1

Bit 0

0

0

0

0.025

0

1

5

1

0

20

1

1

This parameter indicates whether the gauge is in Degas mode.
Degas Status

Bit 1

FALSE

0

0

Degas Off

TRUE

1

1

Degas On

Bit 0 MeaningThis parameter indicates whether the gauge is in Automatic oder Manual Emission
Mode.
Emission User
Mode State38

Bit 0 Meaning

Byte
value

Meaning

FALSE

0Manual Mode

TRUE

1

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3.3.3.9 Hot Cathode Block State
CommandThis service is used for activating the Degas mode via Profibus.
Byte Name

Structure Data type

Bytes

0

State Command

SimpleUnsigned82

1State Command
Data Field

SimpleUnsigned8

1

2

Value

SimpleUnsigned8

1

State
CommandName

Description0

Inactive

No action

1

Set Degas
State

Activates/deactivates the Degas mode

AccessThis service is used for activating/deactivating theDegas mode (p < 7.2×10-6 mbar).
If the Degas mode has not been deactivated with
Degas Off before, it is automatically turned off after
3 minutes.
The Degas State can only be changed if p < Degas
On Limit, otherwise the command returns the error“Object State Conflict“.
The State Command Data Field Value can have thefollowing values:
0 Degas Off
1 Degas On
3

Set
EmissionState

Turns the emission ON or OFF according to the target
value
Target Value: 0 ⇒ Switch emission OFF
Target Value: 1 ⇒ Switch emission ON

128

Emission
The device supports two modes :User Mode
Automatic Mode
Emission is switched on or off by the integrated Pirani
automatically.
If the emission is switched on and is then switched off
manually, the emission will be switched on again only
if the pressure rises above the 3.2×10-2 mbar and thendrops below 2.4×10-2 mbar.
Manual Mode
Emission is switched on or off by the command "SetEmission State"•

If during run time the pressure exceeds 3.2×10-2
mbar, the triple gauge switches off the emission
automatically. The measurement value equals the
Pirani value.

•

If the emission is switched off by the user while thepressure is still in Ioni range, the measurement
value equals the Pirani value. There is no automatic change to the BA range by the BCG450.

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39

3.3.4 Diaphragm Gauge
Transducer Block /SLOT 1 / Instance 3

ID

Name

Structure Data type

101

Block Type

SimpleOctet string

Bytes Access Store
4

2_R

102

Status Extension

Simple

UINT8

1

1/2_R

V

103

Sensor Alarm

StructArray of 2 bytes

2

1/2_R

V

104

Sensor Warning

StructArray of 2 bytes

2

1/2_R

V

3.3.4.1 Block TypeAccording to the table in Appendix A, the Block Type ID has the value "14".

3.3.4.2 Status Extension

This parameter indicates whether the overrange or underrange of the diaphragm
gauge device instance is exceeded.
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

0

0

0

0

0

Underrange
ExceededOverrange
Exceeded

Reading
InvalidIf the instance is operated in its overrange or underrange, the corresponding bit
and additionally the bit "Reading Invalid" is set.
If an error occurs, the bit "Reading Invalid" as well as the corresponding error bitsin Device Block (ID 26, 27, 28 Device Block) are set.

3.3.4.3 Sensor Alarm

This parameter indicates the detectable errors occurring in connection with thediaphragm gauge measuring part. The present implementation allows detection of
one error.

Byte 0
Byte 1
1)

Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

0

0

0

0

0

0

0

0

0

0

0

0

0

Bit0
0

Electronics Failure

1)0Electronics Failure includes a sensor error.

The Sensor Alarm bits defined here are copied into the Device Block ID 27 in the"Device Exception Detail Alarm" range of the the capacitance diaphragm gaugemeasuring part.

3.3.4.4 Sensor WarningThis parameter indicates the detectable warnings occurring in connection with thediaphragm gauge measuring part. The present implementation allows detection of
one warning.
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

Byte 0

0

0

0

0

0

0

0

0

Byte 1

0

0

0

0

0

0

Electronics Warning

0

The Sensor Warning bits defined here are copied into the Device Block ID 28 in the"Device Exception Detail Warning" range of the diaphragm gauge measuring part.

40

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3.3.4 Atmosphere Sensor
Transducer Block (Piezo
Sensor) / SLOT 1 /Instance 4

ID

Name

14

Atmospheregauge Block State
Command

Structure Data type
REC

101

Block Type

SimpleOctet string

Bytes Access Store
2

1_W
2_W

4

2_R

3.3.4.1 Block TypeThe Block Type ID has the value: "01 00 00 00" (octet string).

3.3.4.2 Atmosphere Sensor Block
State Command

This service is used for activating the adjustment of the Piezo sensor to the
Capacitance diaphragm sensor via Profibus.
The atmosphere pressure sensor can be adjusted to the internal (vacuum chamber) Capacitance diaphragm sensor.
If you want to adjust the atmosphere pressure sensor to the Capacitancediaphragm sensor, proceed as follows:n Vent the vacuum system to atmospheric pressureo Send the "Release User ATM adjust" commandp Perform the "User ATM adjust command" as specified below.
After this procedure, the atmosphere pressure sensor will give the same pressure
value as the Capacitance diaphragm sensor at atmospheric pressure.
ID

Name

Structure Data type

Bytes

Access14

Atmosphere gauge Block
State Command

Record→ below2

1/2_W

Transition Command
Transition Command
Target Value

SimpleUnsigned8

1

SimpleUsingned8

1

State
CommandName

Description0

Inactive

No action

128

AdjustPiezo /CDG

This service is used for activating the adjustment of
the piezo sensor to the Capacitance diaphragm sensor.
The Transition Command Target Value can have thefollowing values:
0 ⇒ executes a User ATM adjust
1 ⇒ releases User ATM adjust

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41

Appendix A: Definitions
Data types

Definitions

Store characteristics

Data access

42

Abbreviation

Range
7

Data type
7

INT8-2 … (2 - 1)

Integer 1 byte

INT16-215 … (215 - 1)

Integer 2 byte

31

31

INT32

-2

UINT8

0 … (28 - 1)

… (2Unsigned integer 1 byte

UINT160 … (216 - 1)

Unsigned integer 2 byte

31

- 1)

UINT320 … (2FLOAT±3.402×1038- 1)

Integer 4 byte

Unsigned integer 4 byte
Floating Point, IEEE 754 Short Real Number,
4 byteVSTRING(n)ISO 646 and ISO 2375

OSTRING(n)Octet string

Term

Meaning

Byte

Number of bytes used by a data structure (integer value)

Store

This parameter defines whether the values are stored in nonvolatile memory (→ store characteristics)

Default

Manufacturer-defined value

Abbreviation

Meaning

V"Volatile": Value is not saved to the RAM or EEPROM and is lostin the event of a power failureN"Nonvolatile": Value is saved to the RAM or EEPROM and is not
lost in the event of a power failure

Abbreviation

Meaning

1_R/W
2_R/W
1/2_R/W

Acyclically readable and writeable by a Master Class 1
Acyclically readable and writeable by a Master Class 2
Acyclically readable and writeable by a Master Class 1 and 2

1_R
2_R
1/2_R

Acyclically readable by a master Class 1
Acyclically readable by a master Class 2
Acyclically readable by a master Class 1 and 2

1_W
2_W
1/2_W

Acyclically writeable by a master Class 1
Acyclically writeable by a master Class 2
Acyclically writeable by a master Class 1 and 2

0_XI

Cyclic output data with master Class 1

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Excerpts from:"PROFIBUS Profile for SEMI"(→4)

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The following table explains terms used in connection with the Profibus.
Term

Meaning

Alert Elements

Alert Elements are used to communicate notification messages from slave to master when warnings, alarms orevents are detected.

Application

A software functional unit consisting of an interconnected
aggregation of function blocks, events and objects, which
may be distributed and which may have interfaces withother applications.

Characteristic

An characteristic is a property or characteristic of an entity.
(Au) In block applications a block interface is defined by
input/output parameters. These parameters have characteristics called parameter characteristics. Examples areaccess rights and identification names.
(IT) The UML defines characteristics as a feature within aclassifier that describes a range of values that instances of
the classifier may hold. It is a property of a class instance(object).

Block(Block Instance)

A logical processing unit of software comprising an individual, named copy of the block and associated parametersspecified by a block type, which persists from one invocation of the block to the next. Concept similar to the class/
object approach, but well suited to the automation requirements.

Class(IT) A class represents a template for several objects anddescribes how these objects are structured internally. Objects of the same class have the same definition both fortheir operations and for their information structures.

Configuration (of asystem/device)

A step in system design: selecting functional units, assigning their locations and identifiers and defining their interconnections.

Data Structure

An aggregate whose elements need not be of the samedata type, and each of them is uniquely referenced by an
offset identifier.

Data TypeA data item with certain characteristics and permissible
operations on that data, e.g. INT8.

DeviceA physical entity capable of performing one or more specified functions in a particular context and delimited by its
interfaces.

Direction of Data

Input data are transmitted from the device to the bus. Output data are transmitted from the bus to the device.

Direction of Flow

A positive set point causes a flow from P to A.

EntityA particular thing, such as a person, place, process, object,
concept, association or event.

Function(1) A specific purpose of an entity.
(2) One of a group of actions performed by an entity.

Function Block

A named block consisting of one or more input, output andcontained parameters. Function blocks represent the basic
automation functions performed by an application which is
as independent as possible from the specifics of I/O devices
and the network. Each function block processes input
parameters according to a specified algorithm and an internal set of contained parameters. They produce output parameters that are available for use within the same function
block application or by other function block applications.

43

Excerpts from:"PROFIBUS Profile for SEMI"(cont.)

44

Term

MeaningFunction Block
Application

Application of an automation system performed by a Device
Block, Function Block, Transducer Block and accompanied
elements.

Instance

A set of data related to an invocation of a function block or aclass.

Internal Resolution(ir)

The internal resolution is 16383 (3FFFhex) for 100% and-16384 (C000hex) for -100% of the range.

Mode

Determines the block operating mode and available modes
for a block instance.

Object(IT) A software entity having identity, attributes and behavior.

Parameter

A variable that is given a constant value for a specified
application and that may denote the application.

Device BlockA Device Block is a named block. Hardware specific parameters of a field device, which are associated with a resource, are made visible through the Device Block. Similar
to transducer blocks, they insulate function blocks from thephysical hardware by a set of implementation independent
hardware parameters.

RecordA set of data items of different data types treated as a unit.

Resource

A resource is considered to be a logical subdivision within
the software (and possibly hardware) structure of a device.
Resources have independent control of their operation. The
definition of a resource may be modified without affecting
other resources within a device. A resource accepts andprocesses data and/or events from the process and/or
communication interfaces and returns data and/or events tothe process and/or communication interfaces, as specified
by the applications utilizing the resource. An interoperable
network view of applications is provided through device resources. Each resource specifies the network visible aspects of one or more local applications (or parts of distributed applications).

Simple Variable

A single variable which is characterized by a defined DataType.

Substitute Value

In case an optional parameter has not been implemented,
the device behaves according to the substitute value for thisparameter.

Transducer Block

Transducer Block is a named block. Transducer blocks
insulate function blocks from the specifics of I/O devices,such as sensors, actuators, and switches. Transducer
blocks control access to I/O devices through a device independent interface defined for use by function blocks.
Transducer blocks also perform functions, such as calibration and linearization, on I/O data to convert it to a device independent representation. Their interface to function
blocks is defined as one or more implementation independent I/O channels.

VariableA software entity that may assume any one of a set of values. The values of a variable are usually restricted to acertain data type.

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Appendix B: Block Type
Currently defined Block Type IDs

Block Name

Block Type ID

Device Block1

Sensor Analog Input Function Block2

One of N Channel Sensor Analog Input Function Block

3

Multi Channel Sensor Analog Input Function Block4

Discrete Input Function Block

5

Actuation Analog Output Function Block

6

Discrete Output Function Block7

Analog Output Function Block

8

Single Stage Controller Function Block9

Gas Calibration Transducer Block10

Flow Transducer Block11

Sensor Analog Input Ambient Temperature Transducer Block

12

Heat Transfer Vacuum Gauge...1)

13

Diaphragm Gauge

3)

14

Cold Cathode Ion Gauge
Hot Cathode Ion Gauge

15
2)

Trip Point Function Block

18 … 28 - 1

Manufacturer-specific

28 … 216 - 1

2)
3)(2005-06)

BCG450SPv1.cp

17

Reserved1)

tira41e1

16

Pirani measuring system
BA measuring system
CDG measuring system

45

Appendix C: Electrical Connections
Technical data of BCG450 gauges →Sensor cable connection[1], [2], [3].

(Threshold values

)

1)

SP A
SP B

3
6
1

SP A 2)

4
9

SP B 2)

11
13

14
Degas

7

-

Measuring
signal

Degas

2

-

12

+

1.25 AT42 kΩ

8Ident.

10
5
15

Common (power GND 24V supply)

9

1

15

8

Ground (housing, vacuum connection)- - 24V

D-Sub,15 pins,
female,soldering side

Electrical connection
Pin 1
Pin 2
Pin 3
Pin 4
Pin 5
Pin 6
Pin 7
Pin 8
Pin 9
Pin 10
Pin 11
Pin 12
Pin 13
Pin 14
Pin 1546

Relay switching function A, n.o. contact
Measuring signal output
Threshold (setpoint) A
Relay switching function A, com contact
Supply common
Threshold (setpoint) B
Degas on, active highSupplyRelay switching function B, n.o. contact
Gauge identification
Relay switching function B, com contact
Measuring signal common
Do not connect
Do not connect
Do not connect2)

1)

0 … +10.13 V
0 … +10 V

2)

1)

0V
0 … +10 V
0 V/+24 V
+24 V

2)

2)

1)

Do not connect pin 3 and pin 6 for normal operation of the gauge. These pins
are reserved for adjustment of the setpoint potentiometers.

2)

Relay assignement can be reprogrammed (→  34).

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Profibus connection

1

5

D-Sub, 9 pins, malesoldering side
6

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5
Pin 6
Pin 7
Pin 8
Pin 9

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9

not connected
not connected
RxD/TxD-P
CNTR-P
DGND
VP
not connected
RxD/TxD-N
not connected

1)
2)
2)

1)

Only to be connected if an optical link module is used.

2)

Only required as line termination for devices at both ends of bus cable
[4]).
(→

47

Appendix D: Literature

48

[1]

www.inficon.com
Instruction Sheet
TripleGauge™,
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450, BCG450-SD, BCG450-SP
tima40e1
INFICON AG, LI–9496 Balzers, Liechtenstein[2]

www.inficon.com
Instruction Sheet
TripleGauge™,
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450-SD, BCG450-SP
tima41e1
INFICON AG, LI–9496 Balzers, Liechtenstein[3]

www.inficon.com
Operating Manual
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450, BCG450-SD, BCG450-SP
tina40e1
INFICON AG, LI–9496 Balzers, Liechtenstein[4]

www.profibus.com(Profibus user organization)[5]

European Standard for Profibus EN 50170

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Notestira41e1(2005-06)

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49Notes50

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Notestira41e1(2005-06)

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51

Original: German tira41d1 (2005-06)

t i r a41e1

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com