Activities of the Micromachine Center

Research Studies and Standardization Activities
1. Study on Industrial Trends

2. S t a n d a r d i z a t i o nActivities

MEMS technology is expected to progress from singlefunction devices produced through more advanced downsizing

The Subcommittee onof existing parts to multifunction devices produced through theMEMS (SC47F) of the Technicalcombination of MEMS and nano-devices, the integrated

Committee on Semiconductor

formation of MEMS with semiconductors, and the highDevices (TC47) under theintegration of MEMS with other MEMS, as well as innovativeInternational Electrotechnicaldevices developed through the fusion of nano-bio technologies.

Commission(IEC)is View of the Tel Aviv coastline

With this background, the Industrial Trends Study

responsible for reviewing MEMS international standardization.

Committee (chair: Isao Shimoyama, dean of the Graduate

On October 18–22, 2009, the SC47F was invited to the IEC

School of Information Science and Technology, the University

General Meeting held in Tel Aviv, Israel for TC47-relatedof Tokyo) under the Micromachine Center is conducting acommittee meetings and working group conferences.

research study on (1) trends in devices employing MEMSApproximately one thousand

technology (MEMS applications) and products incorporating

people attended the opening

these devices (MEMS-Inside), and (2) the leading companies inceremony, which featured anMEMS-related industries and their business profiles (company

address by the IEC president,trends). This study is aimed at keeping track of developments

asin devices with added value owing to MEMS technology,

entertainment imbued withindustrial fields employing such devices, and MEMS-enabledsound and lights, videos,products (MEMS-Inside) and at developing a roadmap forsinging, and dancing.

wellasspectacular

The opening ceremony

A total of twenty-six people attended the international

market expansion in the MEMS industry.
The study on MEMS-Inside is being conducted from two

conference for SC47F, including ten from Japan, twelve fromperspectives: trends from single-function MEMS toward highly

South Korea, and one each from China, Germany, the Unitedintegrated, complex MEMS, and trends in patent applications.

States, and Brazil. The main agenda for this conference was toBased on these perspectives, data on the future expansion ofreview the comments by all countries on the three approvedMEMS applications (MEMS-Inside) will be compiled into 13

New Work Item Proposals (NP) for which voting closed on

industry-specific fields, such as information and communication

October 9, 2009. The committee came to an agreement toequipment, automobiles, consumer electronics and appliances,

accept nearly all comments and to prepare a new Committee

and medical and welfare equipment.

Draft (CD) based on the results of this review. The approved
proposals are as follows.

The committee is also conducting a research study on(1) Test method of measuring adhesive strength for MEMS

sensor networks and service robots, two up-and-coming fields

structure (proposal from Japan)

currently expected to yield further expansion of MEMS

(2) Micropillar compression test for MEMS material (proposalapplications.

from South Korea)

The committee studies trends of companies involved in(3) Test method for linear thermal expansion coefficients ofMEMS-related industries by sorting all domestic companies

MEMS material (proposal from South Korea)

conducting MEMS business according to the type of businessand by determining the type of MEMS-related business orThereafter, South Korea submitted three NPs entitledactivities the company is conducting and the type of MEMS-“Forming limit measuring method of metallic film materials,”

related activities to which the company aspires. The committee“Test method for bond strength in PDMS/glass chip,” and “Testalso studies the organization of Japan’s leading MEMS-related

method for residualcompanies, the types of devices handled by MEMS device

stress measurement.”

manufacturers and their applications, and the state of MEMS

The

foundries in Japan based on data gathered from companies thatcommittee is currently

participate in the Exhibition Micromachine/MEMS and that

deliberating on Japan’s

apply for MEMS-related patents, and the Micromachine

voting position. Within

Center’s database of micro/nano-related documents.

the next six months,
Japan

The Industrial Trends Study Committee will summarize thedomesticplans

topropose the two NPs

current status and future outlook of MEMS-related industries inThe WG conference

the “FY2009 Report on Industrial Trends” in March 2010 to“Bending test methodof thin film materials” and “Standard data for assessing material

provide feedback for those involved in the MEMS industry.

characteristics.”2