Tokyo Electron Limited  Annual Report 08

E N V IRO N M E N TAL , H EALT H A N D SAFE T Y A C T I V I T IES

Tokyo Electron’s corporate missions include placing the highest
priority on people’s health and safety and taking the global environment into account when conducting business activities.

Fundamental Policy
Tokyo Electron positions environmental, health and safety activities
as one of its most important management issues to achieve sustained corporate growth and continued development of society.
With that in mind, Tokyo Electron is committed to reducing environmental loads across its activities, and to ensuring absolute safety in
the Company’s business premises and in those of its customers.
Tokyo Electron embodied these commitments in “TEL’s Credo andPrinciples on Environmental Preservation” and “TEL’s Safety and
Health Credo and Principles” formulated in 1998. The former statement was reviewed and revised in May 2006 in light of the direction
the business was taking and the Company’s evolving approach tothese issues. Also, recognizing the need to deal with current global
warming and climate change issues, in October 2007, Tokyo­Electron inaugurated an environmental steering committee in orderto accelerate environmental response activities. The committee, thehighest internal function on environmental activities, comprises theexecutive officer of development, as well as members from marketing, corporate strategic planning, and corporate communications.
Moreover, we are considering the establishment of medium-term
environmental objectives under the slogan “Technology for EcoLife™.” Going forward, we will define standards and an achievement plan and promote activities for these objectives.

EHS Management
Since 1997, Tokyo Electron has developed and implemented environmental management systems based on ISO 14001 standards,
mainly for manufacturing operations, and obtained certification.

Adoption of Environmental Accounting
Tokyo Electron has introduced an environmental accounting systemthat quantifies the cost of its activities in respect of environmental
protection, and uses this as the basis for developing corporate
action policies. For more information on achievements in fiscal
2008, please see the “Environmental and Social Report 2008” to bereleased in September 2008.

Product-related Environmental Initiatives
Proactive Environmentally Conscious Product Design
As clearly set forth in our revised TEL’s Credo and Principles on
Environmental Preservation, Tokyo Electron believes that promotionof product designs sensitive to the environment is vital. Tokyo­Electron has positioned promotion of energy conservation in its
products and reduction and replacement of hazardous chemicals in
its products as priority issues.
1. Energy Conservation During Equipment Use
Since many of our products are manufactured and used in cleanrooms, we take an all-inclusive approach to energy conservation in
the entire system, including equipment and the clean room. The fivemajor targets in this respect are as follows:
1. Reduce energy consumption of equipment
2. Reduce energy consumption of peripheral devices
3. Use equipment in ways that conserve energy
4. Reduce energy consumption of the clean room
5. Overall clean room management (planned and appropriateoperation)
Tokyo Electron played a central role in developing the SEMI S23
Guide for Conservation of Energy, Utilities and Materials Used bySemiconductor Manufacturing Equipment that was adopted as theglobal standard by the semiconductor industry. Tokyo Electronassesses the energy consumption of its products in accordancewith these guidelines.
2. Hazardous Substances in Products
Growing out of the concern that hazardous substances in parts andmaterials could affect the environment and the ecological system,
regulations restricting the use of such substances in automotive andelectrical products are being tightened throughout the world. In July
2006, for example, the RoHS*1 directive came into force in Europe.
Having determined that its semiconductor production equipment
could be exempt from these directives as they fall within the definition of “large-scale stationary industrial tools,” Tokyo Electron has
prepared a written statement to that effect. Regarding the China
RoHS directive*2 issued in March 2007, Tokyo Electron has achieved
complete compliance. The Tokyo Electron Group is acting inadvance of regulatory requirements and has established the Chemical Substance Measures Team to share necessary information. The
team comprises representatives of manufacturing divisions. In addition, the Tokyo Electron Group is seeking active cooperation fromsuppliers in investigating materials that contain such substances andISO-14001-Certified Plants and Offices
Company/plantTokyo Electron AT Limited
Tokyo Electron PS Limited
Tokyo Electron Tohoku Limited
Tokyo Electron Kyushu Limited
Tokyo Electron AT LimitedTokyo Electron Device Limited

24Plant
Sagami Plant

Certification date
December 10, 1997

Certification number
1110-1997-AE-KOB-RvA

Tohoku Plant
Kumamoto/Koshi/Ozu/Saga plants
Yamanashi Plant (Fujii/Hosaka area)
Miyagi Plant
Yokohama OfficeFebruary 19, 1998
March 26, 1998
May 15, 1998
March 1, 2005
July 14, 2004

1118-1998-AE-KOB-RvA
1120-1998-AE-KOB-RvA
1124-1998-AE-KOB-RvA
01245-2005-AE-KOB-RvA
EC04J0144

Annual Report 08 Tokyo Electron Limited

finding and promoting substitutes. The Tokyo Electron Group will
begin shipping products that are free of the six substances specified
by the RoHS directive beginning in October 2008.
*1 Restriction of the use of certain Hazardous Substances in Electrical and Electronic Equipment*2 The official name of the Chinese version of RoHS is Measures to Control Pollution From
Electronic Information Products

Health and Safety Activities
Tokyo Electron promotes health and safety in all of its operations.
This includes giving top priority to the health and safety of ouremployees and customers and designing products with safety inmind. TEL’s Safety and Health Credo and Principles clearly statethat all employees are responsible for being constantly aware ofhealth and safety considerations in all their business activities.
Even with increasing sales and product shipments, in fiscal 2008,
the Tokyo Electron Group achieved a reduction of over 40% in thenumber of accidents resulting in injury (excluding those requiring
first-aid alone) or death. In particular, accidents occurring during
start-up and maintenance operations performed at customer locations declined significantly. This reduction resulted from the overseas implementation of a safety management system already in use
at customer sites in Japan, with emphasis on adoption during factory installations for new customers in Asia. The system includes
the assignment of a safety management supervisor, deployment ofsafety patrols, and holding risk assessment meetings prior to thestart of jobs. The decrease in accidents was also due in part to thedevelopment of proprietary safety tools, enhanced education, andprogress in reducing tasks involving heights or heavy objects. Tokyo
Electron’s policy moving forward will continue to promote activities
for further reducing accidents.

Communicating With Stakeholders
The Tokyo Electron Group actively promotes communication with all
stakeholders. To develop environmental, health and safety initiatives, we believe that it is vital to share information as much as
possible with all parties related to our business activities and toreceive feedback.
One example is efforts to give back to local communities. Our
philosophy states, “We place the highest priority on gaining the trust
and acceptance of customers, suppliers, investors, and communities around the world” and “We therefore strive to be a faithful andcooperative member of the communities and nations where we dobusiness.” In line with this philosophy, we engage in activities tocontribute to society and build relationships of trust with governments and local communities around our facilities. These activities
are conducted both in Japan and overseas.
For further details, see “Environmental and Social
Report 2008” (to be published in September 2008).
http://www.tel.com/eng/citizenship/ehsreport.htm

TOPICS
Modification of Existing Equipment to Reduce EnergyConsumption
Tokyo Electron Group considers the promotion of environmentally sound design extremely important. The Company prioritizes
efforts to develop energy-efficient equipment and reduce andreplace regulated chemical substances contained in equipment.
Although we now develop and manufacture new productswith more consideration given to conserving energy andresources, some of the products that we sold and delivered tocustomers in the past were not designed with the same consideration for the environment that is acceptable today.
To rectify this, the Tokyo Electron Group markets products
which can be used to make improvements to existing equipment. For example, we provide various products designed toimprove the environmental functions of the thermal processing
system ALPHA (a)-8SE. The following are two such products:
1. Improving the heat insulating properties of pipe heaters
It is necessary to keep the inside temperature of some pipes
used in the thermal processing system as high as 100 to 200
degrees centigrade to prevent substances from adhering to theinside surface. The electricity consumed by the pipe heaters
used to control the inside temperature can be reduced by 40%
to 50% by installing high-performance heat insulators aroundthe heaters.
2. Energy-saving pumps
Power consumption can be reduced by approximately 70% by
replacing conventional pumps with high-efficiency energy­saving pumps. Use of these products may result in an overall
reduction in energy use of around 70%.
Energy Conservation Effects
Energy-saving Pumps
Vacuum Pipe Heaters

Reduction of Energy
Use by about 70%
Before Replacement

After Replacement

ALPHA (a)-8SE

In addition, we provide products that help reduce theamount of heat discharged into the clean room by a watercooling mechanism, products that reduce the amount of nitrogen used, and products that improve the overall process quality and productivity.

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