MMC Activities..............1MEMS-ONE Pj...............5Column.......................6
Overseas Trends............7
Member’s Profiles .........8

MMC Activities

Activities of the Micromachine Center in Fiscal 2005
OVERVIEW
The Micromachine Center undertook the following activities
regarding research and studies into micromachines (MEMS andother nanoscale machines and systems), the collection andprovision of micromachine information, and exchange andcooperation with domestic and worldwide organizations. The
aim of these activities was to establish basic micromachinetechnologies and promote their industrialization, thus
contributing to the further development of Japan’s industrial
economy and to international society.

concerning the research system and development centers from a
policy viewpoint, considering refinement of the technologicalissues pursued and their results, and refinement of the common
elements of integration, with a view to initiating a national
project from 2006.
(4) As part of the research activities of the micro
analysis and production system project, centered on
the Association of Microscience Chip DB Systems(Microscience Research Association Contract),
we created a database of literature useful for research anddevelopment of microchip devices and systems. To this end, we
gathered information, provided data and other similar activities.

1. Research and Investigation of Micromachines
We carried out activities aimed at gaining a clear
understanding of the technological and industrial trends inmicromachines and MEMS as they become key manufacturing
technologies. At the same time, we pursued research into newtechnological issues regarding the fusion of micro - andnanotechnologies. We also made proposals for national
government and NEDO projects in fields where new technology
development is required.
(Governmental/NEDO project related activities)(1) In FY2005 the MEMS-ONE: MEMS Open Network
Engineering System of Design Tools Project (NEDOcommissioned project) carried out research anddevelopment into the production and verification of software
based on the research findings from the specification design
carried out as part of the system development completed theprevious year. Part of this research also involved obtaining
related knowledge and data. In addition, thermal and opticalnanoimprint analysis functions were introduced as adevelopment issue, and from October we carried out intensive
research and development on this theme. The various
committees oversaw the progress of development, making
changes as necessary following testing of the developedfunctions. Progress went largely according to the initial plan.
(2) Investigation of methods of promoting MEMS-ONE(NEDO-commissioned project)
Following on from FY2005, we carried out research withMizuho Information & Research Institute and Nihon Unisys
Excelutions into efficient business models for improving thereach of MEMS-ONE, and assembling a consistent body ofspecialized terminology relevant to the field. To further theseends, we held Exhibition MICROMACHINE to publicize anddemonstrate the interim findings of the MEMS-ONE Project, andto survey the attitudes of users.
(3) Committee to investigate next generation projects
Based on a proposal from 2004, we undertook deliberations

Internet Home Page : http://www.mmc.or.jp/(Survey, Research and Development of Micromachines)(5) Study of R&D trends in micromachine technology inJapan and abroad
We examined and analyzed the latest situation regarding
micromachine technologies and research trends that aremaking notable progress in Japan and overseas, and maintained
a library of basic technological data that can contribute toadvances in micromachine technology.
(6) Joint survey research activities concerning theindustrialization of MEMSIn order to facilitate further industrialization of MEMS
which in recent years have rapidly been finding new application
fields, we have been tackling general issues such as accelerating
foundry services, and establishing cooperation with the MEMS
equipment and materials fields. At the same time, we continued
joint research with businesses that provide foundry services
from the previous year, investigating specific issues such asfact-finding at overseas foundries, standardization of processes,
establishing materials databases, and cooperation between
foundries.
(7) Research regarding standardization strategies forMEMS (JMF-commissioned project)
In order to strengthen and maintain the productive capacityof MEMS and promote strategic international standardization
and regulation required as the foundation for international
development of MEMS, we carried out research into thetechnical needs of the MEMS industry. We analyzed Japan’scurrent position in the world, identifying the technologicalfactors crucial to future standardization and regulation, anddeveloped a proposal for a standardization roadmap.

2. Collection and Provision of Micromachine Information
We collected information and documents on micromachinesfrom universities, industry, and public organizations both inJapan and overseas, along with the results of surveys carriedout by MMC. These materials are freely available in the MMC
library, and have been disseminated widely, both domesticallyand internationally.

of cutting-edge micro/nano technology exchange forums fromthe previous year as a forum for information exchange and thedevelopment of joint research.

(1) Improved dissemination and exchange of information
through the MMC website
We have actively sought to disseminate and exchange
information through the MMC website. We have also improved
the contents provided to our supporting members.

4. Promotion of Standardization of Micromachines
In the technological field of micromachine/MEMS,
standardization is being promoted as international initiatives
get underway.
(1)Standardization of fatigue testing methods for micronano materials (NEDO-commissioned project)
Continuing on from the previous year, we carried out
research into standard methods for fatigue testing to enablemeasurement and evaluation of the mechanical characteristics
of various thin film materials with widths of 10 µm and lengthsof 100 µm or less, with a view to international standardization.
Therefore we carried out fatigue testing with specimens about
1/1,000 the dimensions of earlier specimens in order toestablish the limits of application of fatigue testing methods
used for currently standardized millimeter-order specimens.
Fiscal 2005 was the last year of this 3-year project, and weincorporated the results of the project in the draft standard“Fatigue Testing Methods for Thin Film Materials”.

(2) Publication of a micromachine periodical
We publish a micromachine periodical entitled
Micromachine Index which gathers together abstracts ofimportant documents for distribution to supporting members
and related agencies.
(3) Publication of a newsletter
We distributed a monthly newsletter MMC Newsletter withinformation concerning research and governmental trends
related to micromachines to supporting members.
(4) Maintaining and upgrading the MMC library
We upgraded the library by gathering further technicaldocumentation and materials, and added this and otherinformation to our database.

(2) Standardization of tensile testing methods for thin film materials
Based on the results of “Standardization of Measurementand Evaluation Methods for the Characteristics ofMicromachine Materials” carried out as a NEDO-commissioned
project from FY1999 to 2001, we proposed it to IEC as aninternational standard in 2003. In 2004 a Committee Draft ofthe standard was recognized, and in 2005 we proposed aCommittee Draft for Vote and continued our activities towards
international standardization.

3. Exchange and Cooperation with MicromachineRelated Organizations Worldwide
In order to promote exchange with related organizations inand outside Japan, we participated in the Micromachine
Summit, held an international symposium, employed anddispatched researchers and experts, and undertook cooperation
with domestic and external agencies aimed at establishing a
micromachine foundry network.
(1) Participation in the 11th Micromachine Summit
We participated in the 11th Micromachine Summit held in
Dallas, where we discussed wide-ranging issues regarding
micromachine technology and worldwide trends in the fields ofmicromachine applications.

(3) Standardization of micromachine specialist terminology
The international standardization proposal for
micromachine specialist terminology that we made to the IEC in2002 was recognized by Committee Draft for Vote in 2004 via
the New Project stage. In 2005 it was prepared as a Final Draft
for International Standard as the final stage, and we continued
our activities towards international standardization.

(2) Hosting the 11 t h International Micromachine/
Nanotech Symposium (partially sponsored by theJapan Motorcycle Racing Organization)
We hosted the 11th International Micromachine/Nanotech
Symposium which focused on technological issues involved in
the merger of micromachines/MEMS technology andnanotechnology, and on the outlook for this field.

(4) Research and investigation of micromachine standardization
In order to continue to develop new strategic international
standards proposals, we prepared a roadmap for international
standardization and identified standardization proposal issues
in concert with the MEMS-ONE Project, the Reliability
Evaluation Committee and so on.

(3) International exchange and dispatch of researchers
We promoted exchanges with overseas universities andother micromachine-related research agencies, sending
researchers on missions overseas. They also participated ininternational symposia and academic conferences held overseas.
Furthermore we promoted exchanges by inviting experts from
Europe and America and dispatching Japanese experts andresearchers overseas.

5. Dissemination of information and education
concerning micromachines
We issued publications, held expositions, and conducted awide range of PR and educational activities regarding
micromachines.
(1) Besides publishing a regular public relations
magazine, we are disseminating information on theMMC website.

(4) Building a MEMS foundry network system
In order to establish the foundries essential forindustrialization of MEMS, we promoted the establishment of asystem aimed at improving services through networking withbusinesses providing foundry services and the Foundry Service
Industry Committee formed by related companies.

(2) We exhibited leading-edge products andmanufacturing materials related to themicromachine/MEMS industry, and hosted the 16thExhibition MICROMACHINE as a forum forannouncing the latest research findings.

(5) Establishing a forum for the exchange of cuttingedge micro/nano technology
In order to promote the development of cutting-edge
micro/nano technology, a basic technology that is expected tofind applications in many fields, we continued holding meetings(3) As the organizer of the Federation of MicromachineTechnology, we worked to consolidate andstrengthen micromachine-related organizations.

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