for calibration and testing methods for bonding strength
reflecting the results of round-robin tests currently being
conducted at overseas research institutions are scheduled forsubmission to the IEC around June this year. The MMC has
completed an analysis of results for round-robin tests conductedon micro-gyroscopes at research institutions in Japan, as well asa study on standardization items for electronic compasses.
(3) Standardization topics in FY 2009
Three topics were proposed for METI’s 2009 collaborative
research and development project for international standards:
measuring methods and notation for MEMS shapes, bending
test methods for micro-cantilever beams, and bulging test
methods. Of these, measuring methods and notation for MEMS
shapes was adopted and submitted for public review. This is athree-year project to research measuring methods and notation
on parameters for shapes characteristic to MEMS devices, suchas side wall shapes, angles, and aspect ratios in threedimensional MEMS structures, and for writing up a draft
proposal for an international standard on measuring shapes ofMEMS devices, and submitting the draft proposal to the IEC. A
written proposal was submitted jointly with Kobe University.
(4) Establishment of the SC 47F national committee in the IEC
While the MMC has been carrying out activities for the IECfor some years, a national mirror committee corresponding tothe IEC body was established at the MMC as the IEC assemblyin charge of reviewing MEMS standardization was upgradedfrom a working group to a subcommittee (SC 47F). It wasdecided that the SC 47F national committee would beestablished in the IEC from 2009 based on the need fordeliberating bodies to clarify national and international stances.

IEC SC 47F plenary meeting held in Tokyo

Recent Activities of the MEMS Industry Forum(chair: Fumihiko Sato of OmronCorporation) was held at theGrand Hotel Hamamatsu inHamamatsu, Japan. It was thefirst time held in the Tokairegion. The seminar mainly
targets beginners in MEMS field
and middle class engineers ofthe member companies.
The 12th MEMS Seminar
Entitled “MEMS Design andProcessing Techniques and Their Applications,” the seminar wascosponsored by the Organization for Hamamatsu Technopolis
and the Innovation and Joint Research Center of Shizuoka
University and was held concurrently with Hamamatsu Messe
2009 organized by the Organization for Hamamatsu Technopolis.
The “MEMS Design and Processing Techniques and TheirApplications” seminar covered a wide range of topics throughacademic lectures on advances in MEMS integration and fusionand expectations for the creation of new industries (Prof.
Susumu Sugiyama of Ritsumeikan University) and MEMS
design techniques using electric equivalent circuits (Prof. Gen
Hashiguchi of Shizuoka University); a lecture on stealth dicing(a fully dry process) gaining popularity in MEMS mass
production plants (Naoki Uchiyama of Hamamatsu Phototonics)
as an introduction to technologies used in MEMS businesses in
the Tokai region of Japan; lectures on MEMS devices,processes, and simulations developed by member companies of
the FSIC; and talks on MEMS technology and trends, MEMS
foundries, and the MEMS Open Network Engineering System of
Design Tools (MemsONE).

The MEMS Industry Forum (MIF) was established with thegoals of supporting the further development of MEMS industries
and contributing to the international competitiveness of Japan’sindustry. Membership in the MIF is composed primarily ofcompanies in MEMS-related industries. The MIF conducts
various activities in collaboration with affiliated academies,
regional centers, and overseas institutions to encourageexchange among and vitalization of MEMS-related industries.
This article describes some of the recent activities at the MIF.

1. Initiation of MEMS Personnel Training Projects
The market for micro electro mechanical systems (MEMS)
is expected to grow to 1.17 trillion yen in 2010 and to 2.4 trillion
yen in 2015. In order to develop a sufficient number of skilled
personnel to accommodate this expansion in the MEMS market,
the MIF is examining ways to implement MEMS personnel
training programs aimed at improving in-house personnel
training at companies with the strategy of stepping up thenumber of MEMS skilled personnel in stages to meet expectedindustry needs, enhancing MEMS personnel training throughindustry-academia collaboration, and improving theenvironment to make MEMS fields more accessible to personnel
wishing to transfer from other fields.
The MIF is currently helping out with a personnel training
program spearheaded by the National Institute of Advanced
Industrial Science and Technology (AIST) entitled “Personneltraining program for pioneering new innovative projects related
to micro/nano mass production and applied device fabrication.”
The MIF has also begun a study in concert with regional
consortia on a tangible personnel project aimed at expanding
practical personnel training with industry-academia
collaboration and offering more MEMS lectures and training
courses for working people, as well as launching a Web site for
personnel training in MEMS fields. During 2009 the MIF plans
to work with regional consortia, public research institutes, anduniversities to build the foundation for integrated course
management with curricula structured around the local
characteristics of each region.

3. The 17th MEMS Advanced Technology ForumThe forum was established to encourage the exchange ofideas among industry and academia and to disseminate
information and raise awareness on micro/nano technologies. It
mainly targets skilled researchers and engineers of the membercompanies. Held three times annually, the forum invites experts
from universities, the AIST, and other organizations to givelectures on cutting-edge technologies in the micro/nano andMEMS fields.
The 17th MEMS Advanced Technology Forum was held onFebruary 17 (Tuesday) at the MMC Techno Salon, where the2. The 12th MEMS Seminar
On February 6, the 12th MEMS Seminar organized by theMEMS Foundry Service Industry Committee (FSIC) of the MIF4MIF had the privilege of welcoming Prof. Shuichi Shoji ofWaseda University’s Faculty of Science and Engineering andAssociate Prof. Yoshio Mita of the University of Tokyo’s
Graduate School of Engineering.
Prof. Shoji introduced a case study entitled “MEMS devices
designed for cell function analysis” on applied MEMS devices
that enable a cell culture system, cell disruption, andbiomolecular separation and analysis for analyzing the functionsof specific cells. Associate Prof. Mita introduced an innovative
MEMS technology in his lecture entitled “Study on MEMS
integrated through an autonomous distributed micro-robot.” As
an example, he described a MEMS device that moves
autonomously over a water surface according to low-voltage

Prof. Shuichi Shoji ofAssociate Prof. Yoshio Mita
Waseda Universityof the University of Tokyo
electrowetting-on-dielectrics (EWOD) droplet propulsion
employing a three-dimensional photodiode structure having adepth of 10µm and a width of 150 nm.

Dissemination and Publicity Projects
The Micromachine Center (MMC) publishes newsletters,
holds exhibitions, and distributes information on its Web site asa means of disseminating information on micromachines andMEMS to educate the general public and of making information
on its activities widely available. This article will describe someof the MMC’s recent activities.

present their latest research findings. Details of the event aregiven below.
(1) 20th Exhibition Micromachine/MEMS
The world’s largest exhibition covering both themicromachine and MEMS industries, the 20 t h Exhibition
Micromachine/MEMS will be held July 29 –31, 2009. At Tokyo
Big Sight (Tokyo International Exhibition Center), East Hall.
Some special exhibits are planned for the event tocommemorate its 20th anniversary.
(2) Seminars and symposiumsThis year, two special conference areas A and B will be set
up at the venue of Exhibition Micromachine/MEMS for holding
various presentations on micro/nano-related research activities.
The following table shows the schedule of events for these
conference areas.
Conference area A
Conference area B

1. Expansion of Participants in the MEMS Mall
The MEMS Mall was launched on October 1, 2008 on theMMC Web site to provide information on products andtechnologies developed by MEMS-related companies. Whileparticipation in the mall was limited last year to members of theMEMS Industry Forum (MIF), this year we have relaxed therequirements to include non-member companies.
In the past, a person wishing to collect information on
MEMS products had to access each company’s Web site
individually. The MEMS Mall is a site that brings all MEMS
product information together and provides online visitors amethod of accessing information, much like visiting booths at
the MMC-sponsored Exhibition Micromachine/MEMS. To
participate in the MEMS Mall, please visit the following Web site.
http://www.mmc.or.jp/mall/

7/29 (Wed)

10:25–16:45
11:00–12:20
The International
MEMS Industry ForumWorkshop on IndustryMicromachine/Nanotech
Academia Collaboration
Symposium
13:00–15:50– MEMS World –MEMS Packaging Forum2. MemsONE Sales and Distribution
Sales and distribution of the MEMS design and analysis
software MemsONE began in February this year. The software
was developed under the project entitled the MEMS OpenNetwork Engineering System of Design Tools and has been
receiving glowing reviews. An academic version of the softwarefor universities and public research institutions is distributed by
the MMC, while an enterprise version designed for generalcompany use is sold through software vendors.
See the table below for the schedule of MemsONE training
courses to be held in Tokyo and Osaka. For more informationon the training courses and features of the MemsONE software,please visit the following Web site.
http://mmc.la.coocan.jp/mems-one/
Schedule of training courses

TokyoOsaka

5/19 (Tue) : Basic operations
6/22 (Mon) : Analysis
9/18 (Fri) : Applications
10/21 (Wed) : Basic operations
11/18 (Wed) : Analysis
1/20 (Wed) : Applications

5/22 (Fri) : Basic operations
7/17 (Fri) : Analysis

7/30 (Thu)

7/31 (Fri)Japanese-German
Micro/Nano BusinessForum
10:30–16:15
MIF Forum

11:00–12:20
MEMS Industry Forum Workshop
on Industry-Academia Collaboration
13:15–17:00
BEANS Project Seminar
10:30–16:45
Presentation of Results fromthe Fine MEMS Project

For more information on the exhibition and visitor
registration, visit the Web site (http://www.micromachine.jp.)
The 19th Exhibition Micromachine/MEMS held in 2008

3. Micro/Nano 2009
The general exhibition Micro/Nano 2009 provides a venue
for businesses in the micromachine and MEMS industries toshowcase their leading-edge products and materials and to5