36th International Microprocesses and Nanotechnology Conference

July 1, 2023
https://imnc.jp/2023/

November 14-17, 2023
Keio Plaza Hotel Sapporo, Sapporo, Japan
CONFERENCECHAIRSPLENARY
Dr. Sri Samavedam, imec, Belgium
Dr. Heike Riel, IBM Research Europe, Switzerland
Dr. Yasumitsu Orii, Rapidus Corporation, Japan

CONFERENCECHAIRSSYMPOSIUM
Symp. A: Challenge to the physical limit for lithography
and devices: Are we ready to boost the scaling
roadmap?
Symp. B: Material Intelligence: Potential of in-materio
computingSymp. C: Process and Device Technologies for
Quantum Computing
Symp. D: Lipid Membrane Micro and Nanotechnology

IMPORTANT DATE
Jun. 10, 2023
Jul. 1, 2023
Sep. 1, 2023
Sep. 10, 2023
Oct. 22, 2023
Nov. 14-17, 2023
Nov. 30, 2023

Open of abstract submission site
Abstract deadline
Late news paper deadline
Open of registration site
Deadline of early bird registration
Conference
Deadline of JJAP special issue

1: Lithography, Metrology and Related Technologies
ࠉ1-1: Advanced Lithography and Patterningࠉ1-2: Electron and Ion Beam Technologies
ࠉ1-3: Patterning Materials
2: Nanotechnology
2-1: Nanocarbon & 2D Materials
ࠉ2-2: Nanodevices
ࠉ2-3: Nanofabrication
ࠉ2-4: Inorganic Nanomaterials
ࠉ2-5: Organic Nanomaterials
ࠉ2-6: Nano Surfaces, Interfaces, and Advanced
Microscopy
3: Nanoimprint, Hybrid-NIL, Biomimetics, andFunctional Surfaces
4: BioMEMS, Lab on a Chip, and Nanobiotechnology
5: Microsystem Technology and MEMS
6: Atomic Layer Processing (ALP)

CONFERENCE CHAIRSCONFERENCECHAIRS
Organizing Chair:
Seiya Kasai (Hokkaido Univ.)
Steering Chair:
Seiji Nagahara (Tokyo Electron)
Program Chair:
Koji Asakawa (Kioxia)

CONTACTCHARSCONFERENCE
Secretariat: c/o Secretaryart Corporation
E-mail: secretariat@imnc.jp

Latest information on plenary speakers, keynote speakers, and invited speakers will appear on web site

36th International Microprocesses and Nanotechnology Conference

CONFERENCE OVERVIEWInternational Microprocesses and Nanotechnology Conference (MNC) is the flagship conference on micro-and nanonanostructure fabrication and related physics, materials, and devices, along with EIPBN in the USA and MNE in Europe. MNC
also covers the related technologies like information, communication, bio, medicine, energy, and environmental control.
MNC has been hosted by the Japan Society of Applied Physics (JSAP) annually
since 1988, which started to provide a forum for discussing science and process
technology in lithography. While actively taking in new terrains which draw keen
attention as next-generation technologies,technologies, MNC has grown to provide opportunities
opportunities
for fruitful exchange of information among researchers and technical experts aswell as transmitting information to the world.
MNC has also played an important role in development of human resources
particularly in Asia. Young researchers can gain valuable experience in MNC.
Special editions of Japanese Journal of Applied Physics (JJAP) have been issued
as conference proceedings each time, which contribute to maintain the highacademic level of the conference. Attention to the MNC has been growing.

ᢏ⾡ࢭ࣑ࢼ࣮ ᪥ᮏㄒ㸧ALDᢏ⾡ࢭ࣑ࢼ࣮
ALDᢏ⾡ࢭ࣑ࢼ࣮࠙᪥᫬ࠚ௧࿴
࠙᪥᫬ࠚ௧࿴5ᖺ1111᭶1414᪥㸦ⅆ㸧᪥㸦ⅆ㸧13:00
13:00㹼17:20
17:20
࠙ሙᡤࠚி⋤ࣉࣛࢨ࣍ࢸࣝᮐᖠࠉ)13:00-13:45
ࠉࠉࠉࠉࠉࠉࠉࠉࠉࠉࠉ
ࠗTechnologyTechnology trends and recent topics of ALD (Tentatively)(Tentatively)࠘

The University of Texas at Dallas Jiyoung Kim, PhD

13:45-14:20



ࠗALP
ALP࡟࠾ࡅࡿࢣ࣑࢝ࣝࡢタィ࠘࡟࠾ࡅࡿࢣ࣑࢝ࣝࡢタィ࠘ࢪࣕࣃ࣭ࣥ࢔ࢻࣂࣥࢫࢺ࣭ࢣ࣑࢝ࣝࢬ Ᏻཎࠉ㔜㞝

14:20-14:55

ࠗReaxFF
ReaxFF MD Simulations for Analysis of Thin-Film Growth Mechanisms in Boron Nitride ALD Processes㸦཯ᛂᛶຊሙศᏊືຊᏛἲ࡟ࡼࡿ❅໬࣍࢘⣲ALD㸦཯ᛂᛶຊሙศᏊືຊᏛἲ࡟ࡼࡿ❅໬࣍࢘⣲
ALDࣉࣟࢭࢫ࡟࠾ࡅࡿⷧ⭷ᡂ㛗ᶵᵓࡢゎᯒ㸧࠘ࣉࣟࢭࢫ࡟࠾ࡅࡿⷧ⭷ᡂ㛗ᶵᵓࡢゎᯒ㸧࠘ᮾ໭኱Ꮫὶయ⛉Ꮫ◊✲ᡤᚨቑࠉᓫࠉࠉࠉࠉࠉྖ఍ࠉᒣᙧ኱Ꮫࠉᘅ℩ᩥᙪ

14:55-15:15ࠉ
14:55-15:15
ࠉ ఇ᠁15:15-15:50
ࠗ㧗⣧ᗘ࢜ࢰࣥ࠾ࡼࡧO2ࠗ㧗⣧ᗘ࢜ࢰࣥ࠾ࡼࡧ
O2ࣉࣛࢬ࣐㓟໬ࣉࣛࢬ࣐㓟໬ALDALD࡟ࡼࡿ㧗࡟ࡼࡿ㧗ARARࢺࣞࣥࢳ࡬ࡢ⿕そᛶ࠘ࢺࣞࣥࢳ࡬ࡢ⿕そᛶ࠘᫂㟁ࢼࣀࣉࣟࢭࢫ࣭࢖ࣀ࣮࣋ࢩࣙࣥᰴᘧ఍♫ ⴗཎࠉᓫஅࠉ

15:50-16:25
ࠗFundamentals
Fundamentals and Applications of Atomic Layer Etching
Etching㸦ཎᏊᒙ࢚ࢵࢳࣥࢢࡢᇶ♏࡜ᛂ⏝㸧࠘ࠉࠉࠉ㸦ཎᏊᒙ࢚ࢵࢳࣥࢢࡢᇶ♏࡜ᛂ⏝㸧࠘ࠉࠉࠉ኱㜰኱Ꮫࠉ၈ᶫࠉ୍ᾈ

16:25-17:00

ࠗAA Proposal of Material Design for Atomic Layer Process࠘
Process᪥❧〇సᡤ ᒣཱྀࠉḠ⚽

17:00-17:10
ࠗ໭኱ALDࠗ໭኱
ALD⿦⨨࡟ࡼࡿᡂ⭷஦౛ࡢ⤂௓࠘⿦⨨࡟ࡼࡿᡂ⭷஦౛ࡢ⤂௓࠘໭ᾏ㐨኱Ꮫ㟁Ꮚ⛉Ꮫ◊✲ᡤࠉᯇᑿࠉಖᏕ

17:10-17:20
ࠗ⏘⥲◊NPFࡢALDࠗ⏘⥲◊NPFALDᐇ㦂⎔ቃࠉᐇ㦂⎔ቃࠉ―XPS―XPS௜ࡁ௜ࡁALDALD⿦⨨ࡢ⤂௓ࢆ୰ᚰ࡟⿦⨨ࡢ⤂௓ࢆ୰ᚰ࡟―࠘⏘⥲◊ࢼࣀࣉࣟࢭࢩࣥࢢ᪋タࠉ᭷ᮏࠉᏹFURTHER INFOMATION

https://imnc.jp/2023/