MMC Activities..............1
Overseas Trends............5
Members’ Profiles .........6
Information..................8

MMC Activities

Reports on Research Conducted under the 9th
Micromachine Technology Research Grants (Part 2)
The research grant program began inviting applications in 1993 as a part of the independent activities of MMC. The purpose of the
program is to assist college and university staff engaged in basic research on micromachines, and to promote further development of
micromachine technology and communication between academics and people in the industrial world.
Of the 9 themes selected for the 9th (2001) research grants, summaries are provided below of the research results for 2 projects carriedover from fiscal 2000 and 3 projects newly selected for fiscal 2001.
NO.

Subjects

Leader and
Co-Worker

Affiliations

PeriodCarried-Over Projects Granted for Fiscal 2000

5

Creation of PEGylated Gold Nanoparticles for New
Prof. Yukio Nagasaki
Diagnostic System

Professor, Department of Materials Science, Science Universityof Tokyo

2 Years6

Surface Micromachining on Three-Dimensional
Dr. Minoru Sasaki
Bulk Si Structures

Associate Professor, School of Engineering, Tohoku University

2 Years

Research Projects Newly Selected for Fiscal 2001
Basic Study for Microactuator Controled by Wetting Prof. Izumi Hirasawa
and Driven by Capillary Force between LiquidLiquid-Gas Interfaces
Dr. Masato Sakurai

Professor, Department of Applied Chemistry, Waseda University

1

2

Study on a Cuff Microelectrode Using MEMS
Dr. Shoji Takeuchi
Technology

Associate Professor, Center for International Research on Micromechatronics(CIRMM), Institute of Industrial Science (IIS), The University of Tokyo

1 Year3

Study on Heart-Emulating Microactuators Using
Dr. Ryo Yoshida
Self-Oscillating Gel

Associate Professor, Graduate School of Engineering, The
University of Tokyo

1 Year

1 YearSenior Researcher, Space Technology Research Center, National
Aerospace Laboratory of Japan

Affiliations as of May, 2003

Creation of PEGylated Gold Nanoparticles for New Diagnostic System
Yukio Nagasaki, Professor, Department of Materials Science, Science University of Tokyo
It is known that small gold particles on the order of several to tens of nanometers
can be generated by reducing a chloroauric acid (HAuCl 3) using a reducing agent,such as citric acid. Gold nanoparticles obtained in this way disperse stably in an
aqueous solution because like particles do not aggregate due to an ion-ion repulsion
from the citric acid adsorbed on the surface of the gold nanoparticles. However,under the severe conditions of high ion concentrations or the like, the ionic repulsionof these adsorbed molecules generates an electrostatic shield that remarkably reduces
dispersion, facilitating agglutination. In order to improve stability, we performed anexperiment to add starch or other water-soluble polymers to form a protective colloid.
Murray, et al., succeeded in coordinating a very stable particle dispersion by adding
polyethylene glycol having a mercapto group (PEG-SH) to the surfaces of the gold
nanoparticles. However, this method suffers from many problems including a drop in
stability when investigating functionality, due to the conflicting relationship between
stabilizing nanoparticle dispersion and surface functionality.
From the conventional perspective of biomaterial surface treatment, the authors
synthesized polyethylene glycol (HeteroPEG) with a different functional group on
both ends (Scheme 1). The gold nanoparticles were stabilized using HeteroPEG
having a highly configurable mercapto group and polyamine chain on the surface ofthe gold particles (Scheme 2). Since the PEG was coordinated in a brush formationon the surface layer of the gold nanoparticles and the opposing end possessed afunctional group in which a ligand can be introduced, this compound holds promise asa tool for resolving the above problems.
We attempted to functionalize particles using sugar and lectin or biotin andavidin, which are well known for use in specific molecular recognition. Fig. 2 shows
photos of a solution of dispersed lactose-conjugated gold nanoparticles when an RCA
lectin protein was added to selectively interact with galactose therein. The dispersed
nanoparticles agglutinated by the interaction between lactose on the particle surface
and lectin, turning the solution a purple color. When free galactose is added to thisform, the solution returns to a pink color, indicating that this interaction is reversible.
Fig. 3 is a graph showing the relationship between the concentration of RCA120 lectinand changes in absorbency for two nanoparticles prepared with lactose and mannose
introduced onto the PEG terminals of the respective gold nanoparticles. While thegold nanoparticles modified with mannose, which does not show interaction with the
RCA120 lectin, do not indicate any changes in absorbency, the lactose-conjugated gold
nanoparticles were confirmed to change dependent of concentration. Based on the
results of Figs. 2 and 3, this system enables the confirmation of molecular recognition
with the naked eye and an accurate assessment of concentration using a simple
spectroscope. This novel material will allow us to perform bedside diagnoses oftoday's extremely serious infectious diseases and highly sensitive diagnoses that were
impossible before now.

Internet Home Page : http://www.mmc.or.jp/

Scheme 1
PEG
Gold nanoparticles
SH

PEG

Ionic strengthPEGstabilization

HS
Thiol

PEG mixtureGold nanoparticles
Ligandstime

Scheme 2

Fig. 1 Dispersion stability of PEGylated gold
nanoparticles

Disease factors(protein)

Dispersed

AgglutinatedFig. 2 Lactose PEGylated gold nanoparticles Fig. 3 Degree of gold nanoparticle agglutinationand lactin mixture
in relation to lactose concentration

Surface Micromachining on Three-Dimensional Bulk Si Structures
Minoru Sasaki, Associate Professor, School of Engineering, Tohoku University
1. Introduction
In order to develop devices for micro-optics applications, elements of thedevice is often required to have 3D structures so as to form a space for the
optical path that is decided by the laws of optics, such as the law ofreflection. Few optical systems can be integrated on the surface of a single
substrate. Strategies for arranging devices three-dimensionally often haveproblems in assembly that reduce productivity. Such problems can bealleviated by prealigning the microactuator with the micro-optical benchusing an alignment guide. We developed an optical device having a thin film
construction layer on a three-dimensional bulk Si structure.
2. Optical Scanner
We prepared a micro-mirror on a Si(111) surface obtained by anisotropic
etching and fabricated an optical scanner incorporated with a temperaturedriven actuator. We applied a 3D photolithography technique capable offorming a SiN mask and forming patterns in the wall surfaces. Figs. 1(a) and1(b) show the structure of the optical scanner and an actual photo of thefabricated scanner, respectively. The left side of the structure shows a laser
diode (LD) chip mounted on a terrace, which serves as a 3D micro-opticalbench. The right side of the structure is a V-shaped cantilever microactuator
constructed with SiN sandwiched between a doped poly-Si heater layer and
Al. When heated by electricity, the structure arches upward as the Al layeron the bottom expands. As the structure bends, the mirror rotates to a
position reflecting light emitted from the LD away from the surface of thewafer. A photodiode (PD) provided on the Si substrate makes the structure
applicable for barcode readers. The LD, mirror, and PD can be aligned
linearly. The ribs are prepared around the periphery of the scanning mirror
to strengthen the thin film mirror and make it resistant to warping. The
operations of the LD chip were confirmed after mounting the LD chip on theterrace, wherein a laser scanning angle of 30° was obtained at 120 mW. The
cutoff frequency was 100 Hz, close to the required value for a barcode reader.
3. Variable Optical Attenuator
For optical communications, we fabricated a bridge-type device shown in
Fig. 2(a) that functions on an optical fiber. An optical fiber fixed in a V
groove is polished down near its core, and a surface micromachined structure
is prepared on the polished surface. When a SiN film having a high refractive
index (~ 2) is brought near the optical fiber core, some coupling loss of the
propagating light inside the fiber occurs. The transmittance varies according
to the position of the bridge. Fig. 2(b) shows one end of the device, wherein
the bridge is 0.25 x 3 mm, and the gap between the bridge and the opticalfiber is 3µm. The bridge is aligned precisely in relation to the optical fibercore. Since the position of the optical fiber is set by the V groove, the mask
can be aligned to achieve an accurate bridge position. The resulting
attenuation was about 1 dB. This small variation is attributed not only to a
problem of particles, but also the difficulty of positioning the entire longbridge uniformly near the optical fiber.
4. Conclusion
Two types of devices were successfully constructed by combining thinfilm microactuator and been aligned on the bulk optical base having threedimensional structures.

(a)

(b)
Fig. 1 Optical scanner formed on a 3D micro-optical bench

(a)

(b)

Fig. 2 Movable bridge-type variable attenuator prepared on the polished surface of an
optical fiber

Basic Study for Microactuators Controled by Wetting and Driven by Capilary
Force between Liquid-Liquid-Gas Interface
Izumi Hirasawa, Professor, Department of Applied Chemistry, Waseda University
Masato Sakurai, Senior Researcher, National Aerospace Laboratory of Japan
1. Introduction
In fluid phenomena, the effects of wettability and surface tension
become dominant as the scale becomes smaller. Since these forces become
dominant in a microgravitational field, this study was focused on thesimilarities between microscale systems and a microgravitational field. We
attempted to control a fluid by actively controlling the wettability andsurface tension.
2. Fluid Handling by Wettability
Next, we will give an example of fluid handling through wettability
distribution. A metal plate in the shape of a letter was placed on top of a
Peltier element for cooling, and a culture dish coated with the temperatureresponsive polymer IPAAm was placed over the letter-shaped plate. Since
the bottom surface of the dish had been coated with the IPAAm, only thecooled parts showed good wettability. Hence, water droplets only adhered
to areas with good wettability, forming a path in the shape of the letter on
the coated dish, as shown in Fig. 1.
3. Liquid-Liquid-Gas Marangoni Convection
It was discovered that a spontaneous flow occurs when a drop of silicon
oil is placed on a layer of fluorinert, as shown in Fig. 2. This flow is
attributed to evaporation, since the flow stops when the system isaccommodated in a hermetically sealed vessel. The thickness of the silicon
oil drop is thought to be about 1 mm. As can be seen from the velocity
distribution in Fig. 3, the driving force of this flow appears to originate at the
point of intersection between a gas and two liquids. An experimental device
that applies this driving force was manufactured in order to produce
rotational force. The impeller of this device distributes wettability. Whenthe impeller was floated on the fluorinert and when a silicon droplet dyed
red with a syringe was adhered only to one blade of the impeller, as shown in
Fig. 4, the impeller began to rotate spontaneously.
4. Conclusion
Developing a microscale system for handling fluids is easy, since fluids aretreated without mechanical structures in this study. Future studies will attempt
to elucidate the mechanisms of the spontaneous flow and produce linear
motion, while developing driving forces that work effectively on a microscale.

2

Fig. 1 The path of flow is formed by wettability
distribution

Fig. 2 Liquid-liquid-gas Marangoni convection

Fig. 3 Velocity distribution in liquid-liquidgas Marangoni convection

Fig. 4 Impeller employing liquid-liquid-gas
Marangoni convection

Study on a Cuff Microelectrode using MEMS Technology
Shoji Takeuchi, Associate Professor, Institute of Industrial Science, The University of Tokyo
1. Introduction
This study aims at developing a cuff microelectrode capable of easily
being fixed to nerve cords having micro-sized diameters. While nerve
regeneration type and insertion type microelectrodes have been proposed,
minimally invasive electrodes that do not cut or pierce the nerve are needed
for measuring electric potentials during activity. Therefore, in this study, we
incorporated a shape memory alloy (SMA) thin film microactuator in anelectrode and attempted to attach the electrode to a nerve by electricallycontrolling the fixing operations. We proposed a 3D shape memory
technique required at this time to develop a microcuff structure.
2. Fabricating Microelectrodes
A TiNi-based shape memory alloy was formed in a thin film to serve as
the electrode structure. We fabricated a clipping mechanism (Fig. 1) that
actively grips the nerve when driven by an electric current. Conventional
TiNi thin films have lower responsiveness than other actuators due to thedifficulty in raising their Martensite transformation temperatures because
they are severely deformed at room temperature. By modifying thecomposition of the thin film and conditions of thermal treatment, we wereable to raise the transformation temperatures to obtain a thin film that wasMartensite at room temperature. Therefore, rather than allowing theclipping mechanism to be used repeatedly, we gave the mechanism
unidirectionality, so that once clipped it could not be removed. This enabled
us to manufacture a SMA thin film clipping mechanism that avoids the
problem of responsiveness, normally a shortcoming in SMA actuators, hasgreat elasticity at room temperature, and takes full advantage of its strength
in high output.
3. Evaluating Electrode Properties
We recorded neural activity using the fabricated electrode. The 3D
clipping mechanism was fixed to the ventral nerve cord of an insect withoutcausing injury. It was also determined that heating had no effect on thenerve. Based on the measurements, no problems-and particularly no noisewere observed in the waveform of activity compared to those of normal
electrodes (Fig. 2). Since the structure is highly elastic, the body tissue ofthe insect incurred no damage even when the mechanism collided with thetissue. It was also seen that neural activity could be measured while theinsect was active, without the electrode coming loose.
4. Conclusion
The smaller the nerve to be treated, the more difficult it is to position theelectrode near to or in contact with the nerve. It is impossible to record clear
signals when an electrode has poor contact with the nerve. Electrodes using
SMA thin films can easily perform this operation and remain fixed to the nerve
even when the insect is active.

Fig. 1 (a) The fabricated SMA thin film microelectrode(b) the electrode clipped to a 100-µm wire

Fig. 2 Neural activity measured from the ventral nerve cord of an insect using the
fabricated electrode

Study on Heart-Emulating Microactuators Using Self-Oscillating Gel
Ryo Yoshida, Associate Professor, Graduate School of Engineering, The University of Tokyo
1. Introduction
We developed a novel self-oscillating gel that, under fixed conditions, iscapable of oscillating autonomously in a spontaneous rhythm like a heartbeat,as opposed to the conventional stimuli-responsive gels. Through a molecular
design that converts chemical energy into mechanical energy by inducing theBelousov-Zhabotinsky reaction (BZ reaction) with a cyclic reaction circuit in
the gel, also found in a chemical model of a metabolic response (TCA cycle),
we demonstrated that the gel is made to periodically swell and deswell. This
self-oscillating gel can conceivably enable the design of new materials capableof imitating biological functions, such as microactuators capable ofautonomous periodic motion, self-beating (peristaltic) micropumps,
molecular pacemakers, and information transfer elements. With the aim ofdeveloping new micromachines equipped with these functions, weestablished a technology for developing micro-size self-oscillating gel,analyzed the behavior of the oscillations, and conducted a basic study on
constructing a material system.
2. Manufacturing microactuators (artificial cilia) through gel
micromachining
We attempted two methods of micromachining self-oscillating gel. In thefirst method, shown in Fig. 1, we introduced a photocrosslinked section(phenyl azide group) into a polymer chain and micromachined the gel to adesired shape through photolithography using a photomask. The othermethod was performed according to a cutting-edge 3D micromachining
technique (LIGA, moving mask X-ray lithography) using synchrotron
radiation. In the latter method, we produced artificial cilia in the gel surface.
The cilia comprised hundreds of protrusions of several ten to several hundred
microns in size that were arranged in an array (Fig. 2). When effecting achemical reaction wave in the gel, we observed periodic changes in thesurface protrusions accompanying the wave propagation. This technique canconceivably be applied to a micro-transport system, for example, fortransporting minute particles, cells, and the like added to the surface.
3. Conclusion
We designed and constructed a gel with a novel functionality for
oscillating in a spontaneous rhythm like a heart muscle. This gel is of greatinterest for use as a microdevice element because of its ability to produce arhythmical periodic motion and to transmit this rhythm as data. This maylead to the development of a novel material system having such functions asrhythmical motion, mass transport, and data conversion and transfer.

Fig. 1 Gel micromachining through photolithography

Fig. 2 Ciliary motion actuator formed of gel through LIGA

3

Invitation to The 9th International Micromachine /Nanotech Symposium
and weighting 100g, which is developing by Aerospace
Corporation in U.S.A. Launched from a space satellite(called "mother ship"), this mini-satellite is to be used inmaintenance support of sight-checks, such as thecondition of solar cells or extending the antenna of themother ship. And it is controlled by wireless transmission
from the mother ship. In the development of this satellite,
MEMS technology such as laser technology and 3D
fabrication are being used.
The second lecture will talk on the system that integrates
biomoleculars and micro/nano structure. Biomolecular motor
is a protein measuring approximately 10 nm that is highly
involved as substance for transportation, protoplasmic flow,
cell division, and other processes within the body. The
lecture will focus on research involving the patterning ofthese mobile proteins in microfluidic devices and thehandling of nano-sized substances.
The third lecture will talk on the portable fuel cells
that are studying for application in near future andexpecting for large market.
The fourth lecture will talk on sensors for biomedical andenvironmental monitoring and on transducers that change
the chemical and physical signals into electronic signals. The
fruits of recent study in this field will much attract you.
In Session 4, a panel discussion will be held to discuss
on exploring of new MEMS development as a strategy for
Micro/Nano technology with seven panelists including four
guest speakers from overseas. Prof. Fujita, The Universityof Tokyo will serve the chairman. Before this panel
discussion Prof. Hiroyuki Fujita, Professor Koji Ikuta,
Nagoya University, Prof. Isao Shimoyama, The Universityof Tokyo and Dr. Atsushi Yusa, Olympus Corporation will
give short lectures on recent MEMS developments.
This symposium was planned by the International /Exchange Committee, and then Organizing Committee(Chairman: Professor Naomasa Nakajima, The Universityof the Air) and the Program Committee (Chairman:
Professor Hiroyuki Fujita, The University of Tokyo)
composed the program and nominated speakers.
Moreover this symposium has an international advisoryboard organized by ten chief delegates of the 8th World
Micromachine Summit (2002).
This symposium aims to contribute to the promotionof our Micromachine technology through exchange of
opinions among the experts in this field and by providing
the direction of technological movement of the world.
The 14th Micromachine Exhibition will be held on the
ground floor of the Science Museum from November 12(Wednesday) to November 14 (Friday), 2003. The
participants of the symposium will be allowed freeadmission to the Micromachine exhibition. We lookforward to welcoming a good many attendees fromthroughout the world (a tentative program for the
symposium is on the last page).
The Japan Motorcycle Racing Organization has beenoffering fund to this symposium.

Micromachine Center Organizes The 9th International
Micromachine/Nanotech Symposium. It will be held on
November 13 (Thursday) 2003, at the Science Museum in
Kitanomaru Park Tokyo, under the supporting of METI
and NEDO, and with the sub-theme of "Micromachinetechnology that integrates nanotechnology in it makes thefoundation of industrial technology in the 21st Century".
Micromachine technology has been expecting torealize novel functions in the nono domain with fusing
both micro and nano technologies. To meet thisexpectation, the program of the symposium puts
emphasis particularly on MEMS that is recently
developing the ways for application.
As you see the speakers and the lecture titles on the
program, thirteen speakers including six foreigners areinvited. Lectures by experts who are studying at theforefront of cutting edge technologies interweave
invaluable case examples in their lectures for theparticipants. Micromachine Center hopes that yourinspiration catches quickly something, which is needed tosolve the problem or remove obstacle in your research orin your business development.
In session 1, "Opening" we provide two special
lectures by MEMS pioneers in Europe and U.S.A. One is"MEMS and Opportunities for University/Industry
Technology Transfer" by Professor Nico F. de Rooij of
University of Neuchatel, Switzerland. The other one is"Turning MEMS Ideas Into MEMS Products" by Professor
Stephen D. Senturia of Massachusetts Institute ofTechnology, U.S.A.
In session 2, "The Path to New Industries in the 21stCentury," will discuss on the following three themes.
1. "The Evolution of Relay to RF-MEMS for Highspeed and Large-scale Transmission"
2. "Evolution of the MEMS business models : Status of
the MEMS industry"
3. "Reliability of the Digital Micromirror Device(DMD)"
The first lecture will talk on the R&D of OMRONCorporation's hit products. The second lecture will
discuss on the "Evolution of the MEMS business models:Status of the MEMS industry" based on data of global
survey by Yole Development (France) and the talks will
attract you as Japanese government is going to promote
MEMS industrialization in "Focus 21 project". The third
lecture will talk the quality insurance of Texas
Instruments Inc.'s Digital Micromirror Device (DMD), as
an excellent "role model" on reliability of MEMS products.
In session 3, "Innovative R&D", will discuss thefollowing four lectures.
1. The Fabrication of a 100gm Co-Orbiting Satellite
Assistant (COSA)
2. Bio-Hybrid Nanomachine
3. Micro Power Generation
4. Nano Channel
The first lecture will talk the development of aremote-control mini-satellite, measuring 5 x 5 x 5 (cm)4Overseas Trends

Transducers '03
By country, American speakers made the largest number ofpresentations (192), followed by Japanese (89), then German(32). The number of Korean presentations was the next highest,
and the increased number of presentations by speakers from
China, Taiwan, and other Asian countries and regions reflected thewidespread expansion of MEMS research worldwide. By field, alarge proportion of presentations concerned fluid technology.
Many of the presentations on medical treatment, biotechnology,
and chemistry subjects also overlapped into fluid technology,
indicating the remarkable progress being made in this field.
Throughout the conference overall, there was also an extremely
large number of presentations concerning product development, atrend that has manifested in recent years. This trend wasadvanced even further at Transducers '03, with a noticeable
increase in the number of presentations addressing problems, andmeasures for resolving these, faced in the practical application of
MEMS technology to commercial production.
The conference venue, Boston, was also host to the first
Transducers conference in 1981; in coming full circle over these 22
years, it feels as though we have reached a landmark. During thisperiod, research focus has shifted from element research to
product development-related research, and the number of papers
presented by businesses has also increased. This conference
clearly demonstrated how the industrial world and the world atlarge are moving significantly towards the industrialization of
MEMS.

Transducers '03(The 12th International Conference on SolidState Sensors, Actuators and Microsystems)was held from June 9(Mon.) to 12 (Thurs.), 2003 at Boston Marriott Copley Place in
Boston, Massachusetts, USA. With approximately 1,100
participants, attendance was slightly less than the 1,200
participants at Transducers '01 two years ago; nevertheless, withattendance exceeding 1,000, the conference was an overall
success. The SARS scare, which broke just prior to the conference,is believed to have been one of the factors behind the drop in
attendance.
A total of 486 papers were presented: 4 plenary presentations,
12 invited presentations, 199 oral presentations, and 271 poster
presentations. Altogether 960 papers were submitted, making theselection rate 48%. At Transducers '01, a total of 401 papers from856 submissions were presented, with a selection rate of 47%.
Thus, as the number of papers submitted for Transducers '03
increased over those for Transducers '01, the number ofpresentations also increased. Moreover, the number of papers
submitted for Transducers conferences has consistently increased(1997: 641, 1999: 826, 2001: 854), a trend that is indicative of thegrowing intensification of research in the MEMS field. Except forthe plenary session held on the first day, the conference consistedof parallel sessions (four sessions conducted simultaneously), eachof which was filled almost to capacity. Sessions on technologies
close to commercial application were particularly popular, withstanding room only for sessions on packaging and RF-MEMS.

European Foundries(Places Visited)• Colibrys (Foundry)• Institute of Microtechnology, Neuchatel University(R&D)• Yole Development (Marketing)• CEA-LETI (R&D)• Tronics (Foundry)• MST-Design (Design House)

Between July 7 and 11, 2003, a study tour of leading
foundry services in Europe was conducted in order to promote
the development and expansion of a foundry service network
in Japan.
The study tour consisted of visits and discussions in orderto obtain information and hear workers opinions directly.
While focusing on foundries, the tour also visited research
institutions, design houses, and marketing consultants, taking
a multidimensional approach that revealed through thesevarious perspectives the true workings of European network
services.
The study tour found that several overseas foundries havebeen established as spin-offs of public research institutions
and have continuing strong partnerships with their parent
institutions. We also discovered that the places we visited had
several features in common. For example, with superior IP, theenterprises tended to choose business strategies that involved
using their high added value in pursuing small to medium
niche markets, and they actively welcomed investment from avariety of sources, with business already being begun along
innovative themes. For tour participants, the freshness of andenthusiasm for new industries were palpable.
Furthermore, those whom we spoke to showed a highdegree of interest in foundry services in Japan, expressing
great expectations for the concept of a network service for the
future.

Visiting CEA-LETI (Grenoble, France)

5Members' Profiles

Nano Device and System
Research, Inc.orporation

1. The Challenge of Micro- and NanomachineTechnology
Nano Device and System Research, Inc.orporation(NanodeS) is a venture company established on April 2, 2001. A
primary activity of Nanodes is to cultivate applications based on
the development of practical micromachine (MEMS)
technologies. NanodeS also plans to pursue nanodevices, which
are anticipated to be a key technology of the 21st century.
Susumu Sugiyama, the CEO of NanodeS who serves concurrently
as a professor at Ritsumeikan University and is a specialist in
MEMS, has been working closely with the university on
nanodevice research. Professor Sugiyama has achieved
nanolithography using the university's synchrotron for irradiating
soft X-rays. By making good use of this technology, it will bepossible to develop devices capable of functioning at nano level.

Yoshikazu Tobinaga
COO

is most suitable for use in robotic arms performing complex
movements, or in fluid sensors. Capturing subtle human movements
may also be feasible.

Six-axis accelerometer developed at Ritsumeikan
University

The synchrotron at Ritsumeikan University, having apeak wavelength of 1.5 nm(2) Developing Nanodevices
Although fine machining at nano has been achieved through X-ray
lithography using a synchrotron, NanodeS is attempting to develop ananogap biosensor. A biochip sensor grips a single strand of DNA
within a nanogap and evaluates the electrical characteristics of thestrand by applying an electrical bias.

2. Micro- and Nanomachine Technology

3. Future Challenges

MEMS can be broadly categorized as sensors incorporating signals
from the environment and the like and actuators for driving
something. Because current sensors can achieve functionality
through a more simple construction than actuators, there have been
more advances in the development of sensors. Our company has also
focused on the development of sensors. Specifically, sensors include
accelerometers, biosensors, and pressure sensors.
(1) Developing Applications for Existing MEMS
NanodeS is primarily focusing on MEMS devices researched at
Ritsumeikan University and their application development. At
present, we have nearly completed the development of a six-axis
accelerometer and are now searching for partners to conduct joint
research aimed at the commercialization of these sensors. Due to its
ability to sense rotational movement in particular, this accelerometer

Products are employed in closer proximity to our bodies as thefunctional dimensions of the products grow smaller, as in the
progression of buildings on the order of meters, automobiles on theorder of centimeters, home appliances on the order of millimeters,
and computers and cell phones on the order of micrometers. So
what will happen when we make the next step to nanometers?
Perhaps products on this order will cross the periphery of ourbodies and be used therein, as in the field of drug delivery systems,
for example. Certainly sensors capable of monitoring activity inliving bodies like this will flourish in the next generation. Whilecurrent techniques focus on extracting biological tissue andmaterials for measurements, future sensors will be capable ofperforming direct and noninvasive measurements of living bodytissue. It is for this that we are preparing.

6

Seiko Epson Corporation

1. The Challenge of Micromachine Technology
Through the world's most advanced technologies,
Seiko Epson is providing products that bring us a highquality of life based on harmony with the environment
in such fields as information systems, device
production, and micro-mechatronics. Our primary
products deal with information-related equipment,
including personal computers and such peripherals as
printers and scanners, and such imaging equipment asliquid crystal projectors; electronic devices, such as
semiconductors, displays, and crystal devices;precision instruments, such as watches, glass lenses,
and factory automation; and other developments,
productions, and services.
One manufacturing technology applying ourdeveloped micromachine technology is the SEAJet
print head used in POS printers.

Mituro Atobe
General Manager, Production Engineering and Development Div.

(1) Inkjet print head
Our Colorio series of printers are equipped withinkjet heads having micromachined ink channels. We
have also applied our own inkjet technology SEAJet to
POS printers used in retail operations, for example.
The inkjet head provided in these printers is
manufactured using micromachine technology andmakes full use of the advantages of this technology toachieve small, highly efficient products with low power
consumption.

2. Development of Micromachine Technology
Here, we will introduce some representative
products and related technologies that Seiko Epson
has worked on thus far.

(2) Electronic devices
We have incorporated micromachine technology inelectronic devices, particularly in the crystal oscillator
industry, to achieve the world's smallest oscillator
products. We are also conducting R&D on future highvalue-added network devices incorporating opticaldevices or integrated circuits and micromachine
devices on a single chip.
3. Future Challenges
We are working to evolve our ultrafine machining
technology from micro- to nanotechnology in order tocreate devices with originality. It is our fervent wish tocontinue providing advanced products and services
that can delight our customers while maintaining
harmony with the environment.

An enlarged photograph of a MACH head ink channel,
the exterior of the SEAJet head, and enlarged
photographs of the ink channel and nozzle

7

THE 9TH INTERNATIONAL MICROMACHINE/NANOTECH SYMPOSIUM
1. Date : Nov. 13, 2003
2. Place : Science hall, Science Museum, in Kitanomaru Park, Tokyo
3. Entrance fee : ¥20,000/person (including proceedings)
4. Acceptance of participants : (till) Oct. 31, 2003
5. Information window : Micromachine Center International Exchange Dept.
Tel : + 8 1 - 3 - 5 8 3 5 - 1 8 7 0 , Fax : + 8 1 - 3 - 5 8 3 5 - 1 8 7 3❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉ PROGRAM (Tentative) ❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉
November 13, 2003
9:00 --

Registration

Session 1 : Opening

Chairman : Mr. Keiichi Aoyagi

9:30 -- 9:35

Opening Remarks

9:35 -- 9:40

Guest Speech

Mr. Toshiro Shimoyama, Chairman, Micromachine Center

9:40 -- 10:20

Special Guest Speech: MEMS and Opportunities for University / Industry Technology Transfer

10:20 -- 11:00

Special Guest Speech: Turning MEMS Ideas Into MEMS Products

Mr. Sakae Takahashi, Executive Director, NEDO
Prof. Nico F. de Rooij, University of NeuchatelProf. Stephen D. Senturia, Massachusetts Institutes of Technology

Session 2 : The Path to New Industries in the 21st Century

Chairman : Prof. Isao Shimoyama

11:00 -- 11:30

The Evolution of Relay to RF-MEMS for High-speed and Large-scale Signal Transmissin

11:30 -- 12:00

Evolution of the MEMS business models : status of the MEMS industry

12:00 -- 12:30

Reliability of the Digital Micromirror Device (DMD)

12:30 -- 13:30❋❋❋❋❋❋❋❋ Lunch ❋❋❋❋❋❋❋❋

Mr.J.C.Eloy,Yole Development
Mr. Andrew B. Sontheimer, Texas Instruments

Session 3 : Innovative R & D
13:30 -- 14:00

The Fabrication of a100gm Co-Orbiting Satellite Assistant (COSA)

14:00 -- 14:30

Bio Hybrid Nanomachine

14:30 -- 15:00

Micro Power Generation

15:00 -- 15:30

Nano Channel

15:30 -- 16:00❋❋❋❋❋❋❋❋ Break ❋❋❋❋❋❋❋❋

Chairman : Prof. Koji Ikuta
Dr. Henry Helvajian, The Aerospace Corporation
Assistant Prof. Shoji Takeuchi, The University of Tokyo
Dr. Ryutaro Maeda, National Institute of AIST
Assistant Prof. Wouter Olthuis, University of Twente

Session 4 : Strategy for Micro/Nano technology (Exploring of new MEMS development)
16:00 -- 16:10

MEMS and Nanotechnology Industrialization

16:10 -- 16:20

A Practical Use and Industrialization of MEMS in The Company

16:20 -- 16:30

Nano on Micro

16:30 -- 16:40

Two Directions of Development: Commercialization and Nano Frontier

16:40 -- 17:50

Panel Discussion (with seven panelists)

Dr. Koichi Imanaka, OMRON Corporation

Chairman : Prof. Hiroyuki Fujita
Prof. Koji Ikuta, Nagoya University
Dr. Atsushi Yusa, Olympus Corporation
Prof. Isao Shimoyama, The University of Tokyo
Prof. Hiroyuki Fujita, The University of Tokyo
Chairman: Prof. Hiroyuki Fujita

Panelists: Prof. Nico F. de Rooij, Prof. Stephen D. Senturia, Mr. J. C. ELOY,
Assistant Prof. Wouter Olthuis, Prof. Isao Shimoyama, Prof. Koji Ikuta,
Dr. Atsushi Yusa
Session 5 : Closing
17:50 -- 18:00

Closing speech

Mr. Keiichi Aoyagi, Executive Director, Micromachine Center

MICROMACHINE No. 45
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
your comments about MICROMACHINE to the publisher :Keiichi Aoyagi, Executive Director, Micromachine Center (MMC)
MBR99 Bldg., 6F., 67 Kanda Sakumagashi, Chiyoda-ku, Tokyo 101-0026, Japan
Tel : +81-3-5835-1870, Fax : +81-3-5835-1873
Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : October 21, 2003

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