MMC Activities..............1
Fine MEMS Pj...............5
Column.......................6
Overseas Trends............7
Member’s Profiles .........8

MMC Activities

Overview of Project Planning for Fiscal 2007
I. Basic Objectives of Activities
The Micromachine Center works to establish basic
technologies relating to the micromachine, Micro Electro
Mechanical Systems (MEMS) and other micro-nano fields. The
Center actively promotes relevant technical development
projects of the national government and the New Energy andIndustrial Technology Development Organization (NEDO). At
the same time, the Center is also actively engaged inenvironmental improvement activities aimed at theindustrialization of the micro-nano field (including policy
proposal projects, industry interchange and stimulation
projects, research projects, projects to promote standardizationand publicity projects) in order to promote dissemination andindustrialization of these basic technologies and thus make acontribution to both the growth of Japanese industry and theinternational community.
In 2007, the Micromachine Center will continue to actively
promote the High Integration/Combination MEMS Production
Technology Development Project. (nicknamed the Fine MEMS
Project), a three-year project that began last year. The Center
will also build a support organization for the MEMS OpenNetwork Engineering System of Design Tools Project(nicknamed the MEMS-ONE Project), for which development
was completed in March 2007, and will shift to publicizing theachievements of this project. With regard to activities toimprove the environment for industrialization, beginning with
policy proposal activities and industry interchange/stimulation
projects on the part of the MEMS Industry Forum that wasestablished last year, the Center will continue to actively
promote projects from last year including research projects,
projects to promote standardization and publicity projects.

II. Description of Primary Activities
1. National/NEDO Project-related Activities
In order to establish basic technologies relating tomicromachines and MEMS, the Center has actively promoted
research and development projects led by the national
government and NEDO, combining the capabilities of industry,
government and academia. In 2007, the Center will vigorously
promote the High Integration/Combination MEMS Production
Technology Development Project (Fine MEMS Project), a
three-year project initiated in 2006. The Center will also
actively promote dissemination of MemsONE, the research anddevelopment achievement of the MEMS Open Network
Engineering System of Design Tools (MEMS-ONE Project), a
national government/NEDO project that was concluded in
March 2007.
(1) High Integration/Combination MEMS Production
Technology Development Project (Fine MEMS
Project) (NEDO)The Center will continue to promote this project, initiated in2006 as a national project, and carry out the plans to prepare ahigh integration/combination MEMS knowledge database thatcollects, organizes, and arranges knowledge information relatedparticularly to 3 issues in the development of concentration/
combination MEMS: (1) combination of MEMS and nanofunctions, (2) integration of MEMS and semiconductors, and (3)MEMS and MEMS high integration unification. A web-based
database system in particular will make it easy for researchers

Internet Home Page : http://www.mmc.or.jp/

participating in the project to enter data, and this will help toincrease the number of database entries and make the content
more complete. In addition, the Center will continue to assist in
overall management of this project in cooperation with NEDO,
and will actively publicize midterm achievements using
opportunities such as this year's Exhibition MICROMACHINE.
(2) Dissemination of MemsONE
The MEMS Open Network Engineering System of Design
Tools (MemsONE) Project was concluded in March 2007. The
Center will establish a MemsONE Support Center to promote
MemsONE – the research and development achievement of theMemsONE Project. The MemsONE Support Center will
vigorously publicize MemsONE in cooperation with the MEMS
Industry Forum.

2. Activities of the MEMS Council (Policy Proposals,Industry Exchange, Revitalization Activities)
The MEMS Counsil was established in April of last year forthe purpose of providing further support for the MEMS
industry. Comprising MEMS-related businesses, the MEMS
Council aims to promote policy proposal, industry activities,
and revitalization activities, thus contributing to thestrengthening of the international competitiveness of the MEMS
industry in Japan.
(1) Policy Proposals
Through exchanges of opinion between MEMS Council
members and representatives of the government and MEMSrelated industries at MEMS Council Promotion Committee
meetings, as well as by holding MEMS forums, the MMC willproactively present proposals concerning MEMS policies.
(2) Coordination with Industry and AcademiaInterested business members will gather together for study
groups on particular topics. In order to promote development of
the bedrock state-of-the-art micro-nano technologies for which
wide-ranging applications are anticipated, the “Micro/Nano
Cutting Edge Technology Exchange” will be once again held
this year (as last year) as venues for the exchange of
information and in order to stimulate joint research. The MEMS
Council will also work with the Standardization Committee topromote standardization activities.
(3) Preparation of an Infrastructure for MEMS
Development(i) Expansion and Strengthening of a Foundry Network System(ii) Promoting the Diffusion of MemsONE(iii) Strengthening of Coordination between Public Foundries
in Each Region and Regional Clusters(iv) Promotion of Human Resource Training(4) MEMS Business Exchange in Japan and Abroad(i) Establishment of an MEMS Mall(ii)Hosting “MicroNano 2007”
To promote industry interchange in the micromachine/MEMS
field, as last year, a series of events entitled “MicroNano 2007”
will be held. The events will comprise Exhibition
MICROMACHINE, a trade show for micro/MEMS andnanotechnologies; the MEMS Forum; the International
Micromachine/Nanotech Symposium; and the Presentation of
National Government/NEDO Project Results. The series of events
will be held July 25 - 27, 2007 at Tokyo Big Sight.
(iii) Participation in the 13th World Micromachine Summit
The Center will participate in the 13th World Micromachine
Summit, which will be held in the Italian city of Venice from

April 25 - 29 this year, taking part in discussions of a wide rangeof topics, including worldwide trends in micromachinetechnology and its fields of application.
(iv) Building of an International Network of Affiliates(v) Dispatch of overseas missions and exchange of researchers(5) Creation of JIS standard for thin film material tension
test method
A study will be conducted with the objective of creating a JIS
standard for the tension test method and standard test specimens
for which IEC standards were established in 2006.

3. Survey Research Activities

5. Publicity projects

The Center conducts research relating to micromachine andMEMS technologies that are gradually becoming key
manufacturing technologies, in order to accurately determine
technical and industry trends and study new technical issues indomains in which these technologies are fused withnanotechnology.
(1) Implementation of research relating to the BEANS
Project
The Center will establish a BEANS Project Review Committeewith the aim of making the Bio & Electro-mechanical Autonomous
Nano Systems (BEANS) Project a national project. BEANS was
the achievement of a MEMS frontier project implemented in 2006
to study future device technologies that are expected to becreated through fusion with nano-bio technologies. The
Committee will study the project scheme, organization, research
topic content and so on.
(2) Study of national and international technical trends
This year as well, the Center will determine, from a fixed
perspective, the technical and research trends in the micro-nanofields that are experiencing dramatic technical progress both athome and abroad. In addition, work will continue on the compilingof a database that is basic to, and critical for, future process in
micromachine technologies.
(3) Survey of industry trends
The Survey Research on the Analysis of the Current
Conditions in MEMS Related Markets and Japan’s Competitivenesswas implemented last year. This year, an exchange of views will beheld with overseas affiliates in the MEMS Industry Forum
regarding the MEMS market, and a study of last year's market
trends and the current status as well as future prospects will becompleted. Information-gathering and analysis will also be
conducted with regard to various issues relating to futuretechnical development.
(4) Enhancing the Micro/Nano Database
The MMC website database will be further enhanced to enablesupporting members to search for publicly disclosed documents
and survey reports, research center maps, mini-research reports,
and other information.

Efforts will be made to achieve wide-ranging disseminationand education regarding micromachines and MEMS through the
publication and distribution of brochures, the holding of
exhibitions and so on. Furthermore, information and documentson micro/nano-machine use in universities, industries, and publicorganizations in Japan and overseas will be collected, combinedwith survey results and MCC-produced documents, and madefreely available in the MMC library. At the same time, information
will be disseminated widely, both domestically and internationally,
through the MCC website.
(1) Improved Dissemination and Exchange of Information
through the MCC Website
Utilizing the MCC website, efforts to exchange anddisseminate information will be made proactively. Website content
aimed at supporting members will be enhanced.
(2) Publication of a Micro/Nano Public Relations Magazine
A public relations magazine will be published periodically anddistributed to those in or connected with the field; it will also bemade available on the Internet through the Center’s home page.
(3) Publication of a Monthly Newsletter
Information concerning research and governmental trends
related to micro- and nano-machines is distributed monthly via the“MMC/MIG News” to supporting members, MEMS Council
members, and other interested individual and organizations.
(4) Provision of Information through the MicroNano
Express Newsletter
Through the MicroNano Mailing list, information concerning
micro/nano-machine events or industry-academia-government
collaboration is distributed as required via the “MicroNano
Express” newsletter to supporting members, MEMS Council
members, and other interested individual and organizations.
(5) Maintaining and Upgrading the MMC Library by
Expanding the Literature Abstract Database“Micromachine Index,” an information magazine containing
abstracts of technical documents and information on materials, isissued on a regular basis and provided to supporting members andorganizations concerned with micromachines. Collected technicaldocuments and materials are stored and maintained in the MMC
library and made available to the general public.
(6) Hosting “Exhibition MICROMACHINE/MEMS”
The 18 t h International Trade Show for Micro/MEMS &Nanotechnologies will be held as part of a series of events entitled“MicroNano 2007.” The trade show will feature exhibits of stateof-the-art products, manufacturing materials and so on relating to
the micromachine and MEMS industry, and it will also serve as aforum for presenting the latest research achievements. Due tovenue scheduling circumstances, this year the venue will change
from Tokyo International Forum to Tokyo Big Sight. The series of
events will be held from Wednesday, July 26, 2007 to Friday, July27, 2007.

4. Projects to promote standardization
International initiatives to promote standardization in the
micromachine/MEMS technology field will be pursued.
(1) Study of standardization
In 2006, a road map for standardization was established toserve as a guide for international standardization andnormalization, which will be needed to strengthen MEMS
international competitiveness and international deployment basedon this competitiveness. In 2007, efforts will focus on basic
common fields and device fields in accordance with this road map,and detailed study leading to the creation of draft standards will
be conducted.
(2) Research and development to authenticate the criteria
for proposing international standards
In 2006, accelerated life testing of the mechanisms andmaterials for MEMS devices was initiated, in addition to researchand development of calibration materials for characteristic
evaluation tests of MEMS mechanisms and materials with theobjective of standardization. In 2007, the primary focus willcontinue to be on acquiring basic data for establishing draft
standards.
(3) Follow-up for proposed Thin Film Material Fatigue
Test Method
Follow-up activities aimed at international standardization will
be conducted for the NP (New Work Item Proposal) fatigue test
proposed in 2006.
(4) Study of overseas standards
A study will be conducted to determine how Japan canaccommodate the rapidly increasing number of proposed MEMS
standards in Korea and other overseas countries (relating to RFMEMS, bonding and packaging).

“MicroNano 2007” Events
1. Exhibition MICROMACHINE: The 18th International
Trade Show for Micro/MEMS & Nanotechnologies
July 25, 2007 (Wednesday) - July 27, 2007 (Friday)
Tokyo Big Sight (West Hall 3 & 4)

2. 2nd MEMS Forum
July 25, 2007 (Wednesday)
Tokyo Big Sight (West Hall 3 & 4)

3. 13th International Micromachine / Nanotech Symposium
July 26, 2007 (Thursday)
Tokyo Bay Ariake Washington Hotel (Iris)

4. National Government / NEDO Project Achievements
July 27, 2007 (Friday)
Tokyo Big Sight (West Hall 3 & 4)

2

Toward the Achievement of 3rd Generation MEMS: Bio & Electro-mechanicalAutonomous Nano Systems (BEANS)
Keiichi Aoyanagi, Executive Director, Micromachine Center
However, in order to respond to the future needs of theautomobile, information and telecommunications, safety andsecurity, environment, medical care and other fields, second
generation multifunctional MEMS devices (fine MEMS) that are
ultra-compact and offer advanced functions and high reliability will
be needed. For this reason, a three-year fine MEMS technicaldevelopment project was initiated in fiscal 2006. The purpose ofthis project was to support the development of these second
generation fine MEMS devices through research into (1) complex
technologies to implement nanofunctions, (2) integrated
construction with semiconductor chips, and (3) methods toconnect MEMS components in a highly integrated manner.
Practical application of fine MEMS technologies is expected in fiveto ten years.

MEMS: The “Beans” of Industry
In recent years, Micro Electro Mechanical Systems (MEMS)
have become a key part of industry. These devices areincorporated into a wide variety of final products and provide
high added value. Examples of development efforts andproducts include mirror devices for optical switches used in thefield of optical communications and so on, cantilevers used in
atomic force microscopes, pressure sensors and acceleration
sensors used in automobile components and the like, and radio
frequency (RF) MEMS switches used in wireless communication
systems.
In Japanese, the expression sangyo no kome (literally “therice of industry”) is used to indicate a key element of industry,
such as steel manufacture during Japan’s period of rapid
economic growth or the semiconductor chips that are now coredevices used in many products. MEMS devices have been called
not the rice but the “beans” of industry. This is because,
although tiny, MEMS are a source of vitality and provide
outstanding utility and functions to the products in which they
are incorporated.
The beans metaphor is applicable in other ways as well.
There are many different types of beans (soybeans, adzukibeans, peanuts, green beans etc.), and they are used to makemany bean products (natto, miso, tofu, soy milk, adzuki beanpaste etc.). Similarly, there are many different types of MEMS
devices, and they are used in many different types of products.

Expectations for BEANS (technologies of the
future that will create new lifestyles)
MEMS technologies hold great promise for the society of the
future 20 years from now. In order to realize this promise, further
advances in MEMS technology are needed, as well as the fusion ofthis technology with nanotech materials technology andbiotechnology to create third generation MEMS (future devices on
the frontier of MEMS research) that will create new lifestyles andhave a revolutionary impact on society. Efforts must be made now
to establish the technical infrastructure that will enable thecreation of these future devices. Accordingly, based on the resultsof a study conducted by the Micromachine Center (MMC) at thebehest of the Mechanical Social Systems Foundation, MMC has
called for a project to develop the technical infrastructure to fusenanotechnology and biotechnology with electrical and mechanicalsystems, in order to create autonomous devices and systems called
Bio Electro-Mechanical Autonomous Nano Systems (or BEANS).
With the support of the Council on Competitiveness Nippon(COCN), MMC is asking relevant parties to help make this anational / NEDO project beginning in fiscal 2008.

Development of MEMS
The first generation single-functional MEMS devices – thoseused primarily to replace existing single-function components dueto their compact size – are currently in development. These
products constitute an enormous market and include pressures
sensors, acceleration sensors, inkjet printer heads and so on. These
first generation MEMS devices constitute most of the domestic
market that is estimated at JPY 440 billion yen.
Industrial advancement(technical development and market expansion)

BEANS

Bio & Electro-mechanical Autonomous Nano Systems

A device system that integrates nano, bio and electrical equipment to enable autonomous decentralized operation
2.4 trillion yen(2015)

Third Generation BEANS: Creation of New Lifestyles– Fusing of Micro + Nano-bio– Key Devices for Autonomous Decentralized Systems

Green Devices: Environment / Energy
White Devices: Health / Medical Care
Blue Devices: Comfortable Living Environment

1.17 trillion yen(2010)

Second Generation– MEMS / nanotech function composite technologies
Fine MEMS– Technologies for integrated formation ofCreation of Multifunctional Devices
MEMS / semiconductors(advanced functions / miniaturization– MEMS / MEMS large-scale integration technologies/ reliability)

440 billion yen(2005)

BirthFirst Generation
Present Single-function devices: substituted for existing components(downsizing of existing devices)
ME
MS
2005
2010
2015

of

– Centered on 3-dimensional microprocessing
MEMS originally produced in Japanare developed both in-house and at foundries

2020

2025

MEMS Industry & MEMS Technology Road Map– Since 2000, the MEMS market in Japan has grown rapidly, reaching JPY 440 billion yen in 2005. In 2010, this market is expected toincrease to 1.17 trillion yen, and in 2015 it is expected to reach 2.4 trillion yen.*– In order to achieve further expansion, application to not only the existing major fields of automobile and information/telecommunications but
also to the fields of medical treatment and social welfare, biotechnology, environmental science and energy will be essential.
JPY 100
million yen

Predicted trends in the MEMS market (intermediate values)*

25000
20000
15000
10000
5000
0

Fiscal 2005

Fiscal 2010

Fiscal 2015

Agriculture, forestry and fisheries
Aerospace
Urban environmental management
Environment
EnergyBiotechnology
Medical / welfare
Manufacturing technology
Precision equipment
Entertainment
Consumer electrical / electronic equipment
Information and telecommunications equipment
Automobile

JPY 100 Markets expected to grow as a result of BEANS*
million yen
1600

Agriculture, forestry and fisheries

1400

Aerospace

1200
Urban environmental management

1000
800

Environment

600

Energy400

Biotechnology

200

Medical / welfare

0 Fiscal 2005 Fiscal 2010 Fiscal 2015
*From a market survey by the Micromachine Center

MEMS Market Trends

3

Publicizing of MemsONE (beta version)
The MEMS Open Network Engineering System of
Design Tools (MEMS-ONE)Project was a three-year(2004 – 2006) development project commissioned by
the New Energy and Industrial Technology Development
Organization (NEDO). The project culminated in theachievement of a beta version of the MEMS design andanalysis software “MemsONE”. Distribution of thisversion will be begun at the beginning of June.
At the end of February, the evaluation version(alpha version) of the software distributed since theend of last November had approximately 400 licensed
users. 70% of these users provided feedback regarding
functions, price, support and expectations.
Modifications will be made based on this feedback andall of the issues encountered during project
development will be incorporated into the beta version
release. We hope the software will prove useful inproduct design and development at companies as wellas in research projects, teaching materials and so on atuniversities.

(which is becoming a focal point for cutting-edge
technical trends in the MEMS field), and integrated
analysis of MEMS devices and circuits. The software
also includes a knowledge database containing morethan 1,700 entries and a material database containing
approximately 170 entries including data acquired
through the process line.

2. Activities aimed at dissemination
Last year a major publicity campaign was initiated toencourage dissemination of the MemsONE software.
Events included the Sensors and Micromachines andApplied Systems symposium of the Institute of ElectricalEngineers, the 9 th Kansai Design and Manufacturing
Solutions Exhibition, the Exhibition MICROMACHINE
and the conference held concurrently to announce theachievements of the project, and the Nanotech 2007
exhibition.
As a result of this publicity campaign, the number ofregistered members in the MemsONE Club rose toapproximately 800 persons. As MemsONE Club members
are potential MemsONE users, Information disclosureand service activities will be focused on them in the
future as well.

1. Project objectives and system features
The objective of this project was to develop asystem that would enable stress-free use of advanced
MEMS knowledge and data by not only people such as
MEMS researchers and engineers who are familiar
with cutting-edge research in the field but also
researchers and engineers in other fields who are firsttime or inexperienced users, thereby achieving broadbased expansion of the MEMS industry.
The MemsONE system was developed jointly by
three software developers (each handling its own fieldof specialty), five companies engaged in projects
relating to MEMS devices (each of which contributed its
experience and achievements to create specifications
and conduct evaluations), 13 university researchers(who provided their state-of-the-art knowledge andwisdom), and one research institution (which
provided the measurement technologies that it had
accumulated over a long period of time).
The analytical functions needed for MEMS design
were provided in all-in-one fashion. The mostsignificant feature of the software is its Japanese
language response capability, making it easy for
beginners to use (see figure below).
Functions provided by the software include
standard analysis and design, unique “inverse design”
in which masks and processes are designed from thefinal structure, evaluation of bonding and packaging(which is involved for resolving many problems in the
MEMS development phase), nanoimprinting analysis

3. Beta version distribution schedule– Publicity: Information regarding the beta version
distribution will be provided on the website, andthrough the media, at the beginning of May.
– Distribution cost: The cost will be approximately JPY
10,000 yen per license.
– Use environment: Details will be posted on the website.

Framework software

User-friendly interface

CAD modeler

Mask layout

Automatedlattice formation

Process recipes

Analytical settings

Display ofanalytical results

Mechanical simulator

Process simulator

CAD data converter

Strain/stress analysis
Electromagnetic field
analysis

Anisotropic
wet etching

Piezoelectric analysis

Dry etching

Thermal analysis

Multi-process

Effects of ambientgas flow

Thermal nanoimprinting
analysis

Coupling analysis

Photonic nanoimprinting
analysis

Databaseinterface
Plug-in interface

Expanded functions
Inverse process analysis
Bonding / packaging
analysis

Material andprocess database

Analytical function modules

External plug-in

4

Knowledge database

Material and process databasefor enhanced precision

Plug-in database

Initiation of Fine MEMS project and Compiling of Knowledge Database
Basic knowledge and data relating to MEMS are containedin the knowledge database for the MEMS-ONE analysis anddesign support system completed in 2006. However, the Fine
MEMS Knowledge Database will be an additional collection ofknowledge relating to complex technologies to implement
nanofunctions, integrated construction with semiconductor
chips, methods to connect MEMS components in a highly
integrated manner, and other knowledge relating to highly
integrated and complex MEMS, and therefore it will havehigher requirements for quality and number of records stored.
The leader of the project, Professor Isao Shimoyama of Tokyo
University, was keenly aware of the importance of the project,and he spearheaded the effort to determine specific methods
to accomplish its objectives. Entries were collected fromcompanies involved in the project, and research anddevelopment activities for knowledge relating to this project
were consigned exclusively to five university research centersthat had a detailed knowledge of development issues relating
to the project. In addition, information regarding international
conferences, patents and so on was gathered by MMC
researchers in an effort to ensure that the content would be ascomplete as possible. As shown in Fig. 2, a web-based “MediaWiki” system was also introduced to enable collaboration andexchange of information among researchers participating in
the project in order to improve the quality even further.
The project is scheduled for completion at the end of
2008. The achievements of the project will be publicizedthroughout Japan. (Fig. 2)

The Highly Integrated / Complex MEMS Manufacturing
Technology Development Project was initiated in 2006 as aproject commissioned and subsidized by the Ministry of
Economy, Trade and Industry and the New Energy andIndustrial Technology Development Organization (NEDO).
The objective of this project was to use the technology for the
manufacture of Micro Electro Mechanical Systems (MEMS) –key devices that will make a major contribution tominiaturization and performance enhancement of electronic
devices and components in diverse fields that include
information and communications, medical treatment,
biotechnology, automobile manufacture and so on – in orderto achieve breakthroughs in resolving development problems
such as those shown in Fig. 1 through complex technologies
to implement nanofunctions, integrated construction withsemiconductor chips, and methods to connect MEMS
components in a highly integrated manner, in order to achieve
further miniaturization, reduction of power requirements, andenhanced performance and reliability, as the next stage in
MEMS development. This new stage has been nicknamed “fineMEMS.” (Fig. 1)
The Micromachine Center was commissioned to handle
one of the issues relating to development: the compiling of adatabase of fine MEMS knowledge. The Center gathered
information relating to manufacturing technologies that had
been fostered in the course of the project, with the aim ofmaking it available for widespread use by MEMS researchersand engineers in Japan to stimulate and achieve broad-based
expansion of MEMS manufacturing technology in Japan.
Integration of MEMS Nanofunctions
Nano-bio materials

MEMS Large-Scale Integration
Multilayer Integration of Different Materials “Build-Up” Multilayer Integration

Nanofunction devices

Bio MEMS
Bonding
Optical MEMS

Low-stress dicing

RF-MEMS
Nanomaterials
Contact with
Nano Material

Ceramic(interface function)

Compiling of Knowledge Database

Integrated Formation of MEMS Semiconductors
Process integration monolithic device

Accumulation / systematizationof knowledge data
Integration into
MemsONE

Horizontal wiring
Vertical wiring

General release

Creation of shared and collaborative environment

Fig.1 The Four Development Categories for Fine MEMS
Knowledge and information and new technical data from academic societies,
etc. will be gathered and systematized in order to compile a database fordevelopers of highly integrated and complex MEMS.

Overview of Research & Development(1) Collection and organization of knowledge data
– Knowledge data obtained through research and development by each company involved in the project– Accumulation and systematic organization of major new technical information from academicorganizations, etc. at home and abroad

Fine MEMS
knowledge database(2) Inclusion of knowledge data for all research topics
Topics that must be supplemented (for funded projects) are re-consigned to universities in order to obtainknowledge data

Research & development members(3) Creation of a sharing and collaboration environment

連携

A “Wiki” system is used to enter data into the database, creating a sharing and collaboration environment
for project researchers

MemsONE(4) Coordination with MEMS-ONE

Research &development members

Coordinated construction of a new classification system based on the MEMS-ONE classification system(5) General release
General release aimed at stimulating research and development relating to highly integrated and complex
MEMS in Japan(Project undertaken by: Micromachine Center)

Members are free to post / view by means of a web browser or the Wiki
Collaboration tools enable members to add articles freely

Fig.2 Compiling of Knowledge Database for Highly Integrated / Complex MEMS

5

Column“Green” Devices: Future Devices on the Frontier of MEMS Research
Norihisa Miki, Associate Professor / Lecturer, Department of Mechanical Engineering, Keio University
With the promotion of the Highly Integrated / Complex
MEMS Manufacturing Technology Development Project thatbegan in 2006, even greater growth in the MEMS field isanticipated. At the same time, many innovative achievements
are being produced in new fields such as nanotechnology andbiotechnology. To see if fusing MEMS technologies with theseachievements in the nano-bio field would produce sporadic
innovation, in 2006 the Mechanical Social System Foundationcommissioned the Micromachine Center to conduct a study
entitled “Future Device Technologies Created through Fusion
with Nano-bio Technologies as the Frontier of MEMS
Research.” The future devices targeted by this study aredefined as “devices based on MEMS technology, produced byfusing nano-bio materials with MEMS, that will create newlifestyles and have a revolutionary impact on society 20 years
from now.” As shown in Fig. 1, these future devices will beachieved using, as an infrastructure technology, processintegration that fuses microfabrication (a top-down process)with nano-bio processing (a bottom-up process). The devices
will be used in three domains that are expected to be criticalissues in the society of 20 years from now: environment /energy, health / medical care and safety / security. For thisstudy, the future devices in each of these domains were named“Green” Devices, “White” Devices and “Blue” Devices,
respectively, and – together with Process Integration – four
working groups (WG) were formed and activated. In thiscolumn, I will discuss green devices based on the study
conducted by the Green Devices WG, for which I served aschairperson.

(ii) On-site environmental cleanup
Substances such as carbon dioxide emitted by automobiles
and water heaters and wastewater from homes are difficult tocollect and clean up once they have been discharged, due totheir extremely low concentrations in the environment. These
substances will be purified on-site at the source, where they arestill at high concentrations. Nanoporous filters that separate out
pollutants, microorganisms to purify toxic substances and otherbiotechnology solutions are expected to be applied.

(iii) Ultra-sensitive environmental substancedetection devices
These devices are capable of on-site detection of extremely
small quantities of environmental substances with great
sensitivity. Measuring systems will be compact and will form
nodes in a distributed sensor network. For example, Surface
Enhanced Raman Scattering (SERS) that uses nanostructuresof gold, silver, etc. are anticipated.
Discussions regarding future devices that will be developed
20 years from now are necessarily somewhat lacking inspecifics. Progress in research will give us a clearer picture ofsuch devices. Green devices and the other future devices on thefrontiers of MEMS research will form the foundation of MEMS
technology. At the same time, such devices will no longer be
MEMS devices. For this reason, the working group also
proposed a new name for these devices: Bio ElectromechanicalAutonomous Nano Systems (BEANS). I am confident that thisnew term will soon be in widespread use in many industries.

Table 1 shows the membership of the Green Devices WG.
The WG studied the green devices that are expected to have amajor impact on the environmental and energy fields in thesociety of 20 years in the future. Discussions in the working
group were conducted from two approaches: the qualities thatthese green devices of 20 years in the future should possess(needs) and the achievements that can be accomplished 20
years from now by combining nano-bio technologies withpresent-day MEMS technology (seeds). Ultimately, theWorking Group proposed the following three green devices. In
each case, the “localized, on-site” quality of MEMS is utilized toachieve both high performance and advanced functions in
combination with nano-bio technologies.

Overview of Future Device Technologies on the Frontier of MEMS Research
Proposed Infrastructure for the Achievement of Future Devices
that will have a Revolutionary Impact on Society 20 Years from Now

Important fields in the society of the future

Environment / Energy
Fully environment-friendly society
Effective use of light energy

White Devices

Green Devices– Solar cell createdcreated through theapplicaapplication
pplication
tion of nanostructures– Ultra-decentralized energy
energyabsorption device– On-site CO2 fixing device– Ultra-high sensitivity
environmental materialmaterial sensor– Micro-n
ano machining– Nano-carbon– Self-asse / nano-semiconducto
r use
mbly
– Maxwell's (demon)
device(i) Energy harvesting

Health / medical careigorous lifestyles throughout one’s
one s entire lifetime Comfort / security / safety
Vigorous
Communication
Patient-specificatient-specific care / preventive medical careAchievement of “super-reality”– In vivo MEMS agent (monitoringmachine inside the human body)– In vivo microdoctor (in vivo latentdiagnosis and treatment machine)–4-dimensional hybrid device(device that accommodates to andgrows with the body)– MEMS health sheet(monitor affixed to the body tomonitor physical condition)

Process Integration
Process integration for the purpose of creating
revolutionary devices of the future
Nanostructure / large area / interfacial control

Blue Devices– Large area wallpaper
wallpadevices(sheet incorporating sensing
display)– Five-senseive-sense accumulation
accumula
device(touch, smell and taste sensing /re-creation)
tion)– Microchemical analysis (singlechip analyzer)– Portable translator (portable ondemand interpretation)interpreta

pulation– Nano-mani
thesized
proteins syn– Use of new ome technology
through gen
ials
future mater
of
n
atio
Cre
–

Fig 1 Future Devices on the Frontier of MEMS ResearchLight, heat, vibration, biotechnology and other heretofore
unused sources of environmental energy will be usedeffectively to provide energy. For example, this technology will
enable on-site supply of power to sensors distributed in a
network. Medical devices implanted into the human body will
not require battery replacement, leading to improved patient
quality of life. Other anticipated devices include ultra-highefficiency organic solar cells created by means of threedimensional nanopillar structures, ultra-high efficiency
thermoelectric conversion elements created using
nanocomposites and nanoporous structures, and highperformance storage battery devices that obtain energy fromthe environment and store it until it is needed.

Table 1 Members of the Green Device WG
Norihisa Miki
Koji Miyazaki
Chihaya Adachi
Isao Shimoyama
Takao IshidaKazuyoshi Furuta
Akihiro Koga
Ryo Miyake
Yuji Saisho
Hitomichi Takano
Junji Adachi
Hiroshi Fukumoto
Nobuhiro Tsukada

6

Keio University, Faculty of Science and Technology
Kyushu Institute of Technology, Graduate School of Life
Science and Systems Engineering

Kyushu University, Center for Future ChemistryTokyo University, Graduate School of Information Science and Technology

Advanced Industrial Science and Technology (AIST)
Seiko Instruments Inc.
Toshiba Corporation
Hitachi, Ltd.
Matsushita Electric Works, Ltd.
Matsushita Electric Works, Ltd.
Micromachine Center (MMC)
Mitsubishi Electric Corporation
Hitachi, Ltd.

Overseas Trends

A Survey of China’s Research Trends in Micro / Nanosystems
apparent that China, Taiwan, South Korea, and other
Asian countries recognize the high quality andsubstantial accomplishments Japan has made in MEMS
industrialization through collaboration amongindustry, government, and academia.
• Overall picture of research trends in China• Trends in MEMS-related research•Total number of groups conducting MEMS-related
research: 140 (researchers: 3,000)•Groups focusing on MEMS research: 50 (researchers:
1,452)•North China: Tsinghua University, Peking University, CAS,
and CETC (13 locations)•East China: SIMIT, and Shanghai Jiao Tong University•Northeast China: Dalian University of Technology, andHarbin Institute of Technology•Other regions: Chongqing University, Xi’an Jiaotong
University, and ChinaUniversity of Technology•Micro and nano fields are a focus in long-term
strategies for R&D in 2006-2020•Trends in Industrialization•MEMS commercialization has begun in Beijing, Shenyang,
Taiyuan, Hangzhou, Wuxi, Chongqing, and others•There is no movement at present to establish a system forsupporting industrialization•Sino-American research collaboration•The NSF is playing a central role in promoting SinoAmerican research collaboration•Office established in Beijing (May 2006)•NSF invests in U.S.-China program•Approximately 150 projects underway•15 million U.S. dollars invested (not including investments
in collaborative research)

We conducted a survey on Chinese research trends inmicro- and nanosystems by attending the International
Conference on Integration and Commercialization of Micro andNanosystems (Micro/Nano China 2007) held in Sanya, China on
January 10-13, 2007. The conference was co-organized by theAmerican Society of Mechanical Engineers (ASME) and theChinese Mechanical Engineering Society (CMES). This
academic conference on the integration of nanosystems has
been held by the ASME Nanotechnology Institute in the UnitedStates since 2001. This year for the first time the conference
was held outside of the United States–in Sanya, China–and wascosponsored by ASME with CMES and MANCEF. In addition to
the cosponsorship by mechanical engineering societies fromboth countries, the conference was likely held in China becauseof the increased activity in MEMS-related R&D in China and thefocus on Chinese MEMS researchers active in America.
We participated in this conference at the request of ouroverseas affiliate in MEMS conferences, MANCEF, to present
the state of Japan’s MEMS development and industrialization asa guest speaker, but we also participated with the following
objectives.
• To study trends in MEMS R&D and industrializationin China, where such R&D has become more active
in recent years and will likely influence Japan’s
MEMS industry in the future• To study the condition of Sino-American researchcollaboration
The conference was held in the relatively new resort ofSanya, located at the southern tip of Hainan Island.
Presentations given at the conference consisted of 108 oral and
260 poster presentations. Tables 1 and 2 below give a
breakdown of the topics in the oral and poster sessions and thecountries that participated in each.

China is strengthening cooperation with Chinese
researchers residing in the United States. There is potential in
China for immense improvements in research sophisticationand for advances in industrialization in macro and nano fields
and, hence, the situation should be continually monitored.

The following information was obtained based on thecontent of presentations and discourse at the conference.
• Based on the oral presentations and the exchange of
information among participants at the conference, it isTotal no.
China
TaiwanUSA&Canada
EuropeJapan
Korea
Australia
India
Singapore
China / USA
China / Europe
China /Japan

Oral presentations
108
45
8
33
8
4
3
2
0
0
3
1
1

Keynote speeches
10
2
1
4
2

Industrialization
14
1
7
4
1

MEMS / NEMS
31
14
5
8
1

Energy transfer
12
5
1
4
1

Processes andmicrofabrication

15
7
0
6
1
1

Micro/nano fluids
6
1
2

Micro/nano mechanics Measurement and Control
6
14
2
13
1
2

1
1

1

1

1

1

1

2
1
1

Table 1 Analysis of Oral Presentations by Topic and Country
Total no.
China
TaiwanUSA&Canada
EuropeJapan
Korea
Australia
India
Singapore
China / USA
China / Europe
China /Japan

Posters
260
189
6
28
8
5
6
1
8
1
6
1
1

Systems
35
24
7
1
1
1
1

Devices
67
52
5
3
1
1
1
2

Energy transfer
31
22

Processes and microfabrication
83
62

Micro / nano fluids
23
13

8

8
1
1
3

6
2

1

3

1

1

1

2

4
1
1

Table 2 Analysis of Poster Presentations by Topic and Country

7

Micro / nano mechanics
21
16
1
2

Members' Profiles

Mathematical Systems Inc.
Company Overview
Since its foundation more than twenty years ago,
Mathematical Systems Inc. (MSI) has consistently worked
to develop technological software, and in particular design
tools for semiconductor-related simulations, such as
development of a device/process simulator and a circuit
simulator and parameter optimization design andtolerance design using these simulators. We currently
have a strong interest in the potential of the MEMS field
and are working on developing new tools by making use ofand expanding on our knowledge and techniquesdeveloped through the years. To address circuit integrated
MEMS formed on the same substrate as an LSI, we are
currently nearing completion of a 3D process simulator for
simultaneously generating computer-aided MEMS designand LSI design and a circuit integrated MEMS simulator
capable of simultaneously performing structural analysis
and electronic circuit analysis. We also develop MEMSrelated tools on commission and offer consulting services.
With our own optimization software, data mining software,and statistical analysis tools, we offer a wide range ofsolutions to meet the customers’ needs.

Related Products
ParadiseWorld-2
ParadiseWorld-2 is an all-in-one simulator for
MEMS/LSI 3D processes (structures) with an optional
capacitance/resistance simulator. Through continuous
simulation, this software can produce smooth 2D and 3D
structures from masks (GDS-II) and process recipes withhigh accuracy and unprecedented speed.

Managing Director

Chieki Mizuta

Process for generating a mirror device

Circuit Integrated MEMS Simulator
This simulator simultaneously performs coherent
operations of MEMS mechanical elements and theoperations of the electronic circuits that drive or control
these elements. The user-friendly GUI makes evencomplex comb-drive actuators simple to produce (anachievement of the MemsONE project).

Creating a comb-drive actuator with the GUI (in reality,
this is analyzed together with an electronic drive circuit)

Other Products
A micro-mirror structure produced with ParadiseWorld-2

Inverse Problem Solving Tool for MEMS Processes
When a desired MEMS structure is inputted, this tool
will produce a process and mask of inverted orientation
for generating the structure (an achievement of theMemsONE project).

LiCRSIM: an ultrafast, large-scale linear simulator
Thyme: SPICE Netlist Reduction Tool
NUOPT: optimization software
Visual Mining Studio: data mining software
Text Mining Studio: text mining software
S-PLUS: statistical analysis software
To learn more, please refer to our Website at
http://www.msi.co.jp.

MICRONANO No. 59
MICRONANO is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
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