THE 9TH INTERNATIONAL MICROMACHINE/NANOTECH SYMPOSIUM
1. Date : Nov. 13, 2003
2. Place : Science hall, Science Museum, in Kitanomaru Park, Tokyo
3. Entrance fee : ¥20,000/person (including proceedings)
4. Acceptance of participants : (till) Oct. 31, 2003
5. Information window : Micromachine Center International Exchange Dept.
Tel : + 8 1 - 3 - 5 8 3 5 - 1 8 7 0 , Fax : + 8 1 - 3 - 5 8 3 5 - 1 8 7 3❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉ PROGRAM (Tentative) ❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉❉
November 13, 2003
9:00 --

Registration

Session 1 : Opening

Chairman : Mr. Keiichi Aoyagi

9:30 -- 9:35

Opening Remarks

9:35 -- 9:40

Guest Speech

Mr. Toshiro Shimoyama, Chairman, Micromachine Center

9:40 -- 10:20

Special Guest Speech: MEMS and Opportunities for University / Industry Technology Transfer

10:20 -- 11:00

Special Guest Speech: Turning MEMS Ideas Into MEMS Products

Mr. Sakae Takahashi, Executive Director, NEDO
Prof. Nico F. de Rooij, University of NeuchatelProf. Stephen D. Senturia, Massachusetts Institutes of Technology

Session 2 : The Path to New Industries in the 21st Century

Chairman : Prof. Isao Shimoyama

11:00 -- 11:30

The Evolution of Relay to RF-MEMS for High-speed and Large-scale Signal Transmissin

11:30 -- 12:00

Evolution of the MEMS business models : status of the MEMS industry

12:00 -- 12:30

Reliability of the Digital Micromirror Device (DMD)

12:30 -- 13:30❋❋❋❋❋❋❋❋ Lunch ❋❋❋❋❋❋❋❋

Mr.J.C.Eloy,Yole Development
Mr. Andrew B. Sontheimer, Texas Instruments

Session 3 : Innovative R & D
13:30 -- 14:00

The Fabrication of a100gm Co-Orbiting Satellite Assistant (COSA)

14:00 -- 14:30

Bio Hybrid Nanomachine

14:30 -- 15:00

Micro Power Generation

15:00 -- 15:30

Nano Channel

15:30 -- 16:00❋❋❋❋❋❋❋❋ Break ❋❋❋❋❋❋❋❋

Chairman : Prof. Koji Ikuta
Dr. Henry Helvajian, The Aerospace Corporation
Assistant Prof. Shoji Takeuchi, The University of Tokyo
Dr. Ryutaro Maeda, National Institute of AIST
Assistant Prof. Wouter Olthuis, University of Twente

Session 4 : Strategy for Micro/Nano technology (Exploring of new MEMS development)
16:00 -- 16:10

MEMS and Nanotechnology Industrialization

16:10 -- 16:20

A Practical Use and Industrialization of MEMS in The Company

16:20 -- 16:30

Nano on Micro

16:30 -- 16:40

Two Directions of Development: Commercialization and Nano Frontier

16:40 -- 17:50

Panel Discussion (with seven panelists)

Dr. Koichi Imanaka, OMRON Corporation

Chairman : Prof. Hiroyuki Fujita
Prof. Koji Ikuta, Nagoya University
Dr. Atsushi Yusa, Olympus Corporation
Prof. Isao Shimoyama, The University of Tokyo
Prof. Hiroyuki Fujita, The University of Tokyo
Chairman: Prof. Hiroyuki Fujita

Panelists: Prof. Nico F. de Rooij, Prof. Stephen D. Senturia, Mr. J. C. ELOY,
Assistant Prof. Wouter Olthuis, Prof. Isao Shimoyama, Prof. Koji Ikuta,
Dr. Atsushi Yusa
Session 5 : Closing
17:50 -- 18:00

Closing speech

Mr. Keiichi Aoyagi, Executive Director, Micromachine Center

MICROMACHINE No. 45
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
your comments about MICROMACHINE to the publisher :Keiichi Aoyagi, Executive Director, Micromachine Center (MMC)
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