Publicizing of MemsONE (beta version)
The MEMS Open Network Engineering System ofDesign Tools (MEMS-ONE)Project was a three-year(2004 – 2006) development project commissioned by
the New Energy and Industrial Technology Development
Organization (NEDO). The project culminated in theachievement of a beta version of the MEMS design andanalysis software “MemsONE”. Distribution of thisversion will be begun at the beginning of June.
At the end of February, the evaluation version(alpha version) of the software distributed since theend of last November had approximately 400 licensed
users. 70% of these users provided feedback regarding
functions, price, support and expectations.
Modifications will be made based on this feedback andall of the issues encountered during project
development will be incorporated into the beta version
release. We hope the software will prove useful inproduct design and development at companies as wellas in research projects, teaching materials and so on atuniversities.

(which is becoming a focal point for cutting-edge
technical trends in the MEMS field), and integrated
analysis of MEMS devices and circuits. The software
also includes a knowledge database containing morethan 1,700 entries and a material database containing
approximately 170 entries including data acquired
through the process line.

2. Activities aimed at dissemination
Last year a major publicity campaign was initiated toencourage dissemination of the MemsONE software.
Events included the Sensors and Micromachines andApplied Systems symposium of the Institute of ElectricalEngineers, the 9 th Kansai Design and Manufacturing
Solutions Exhibition, the Exhibition MICROMACHINE
and the conference held concurrently to announce theachievements of the project, and the Nanotech 2007
exhibition.
As a result of this publicity campaign, the number ofregistered members in the MemsONE Club rose toapproximately 800 persons. As MemsONE Club members
are potential MemsONE users, Information disclosureand service activities will be focused on them in thefuture as well.

1. Project objectives and system features
The objective of this project was to develop asystem that would enable stress-free use of advanced
MEMS knowledge and data by not only people such as
MEMS researchers and engineers who are familiar
with cutting-edge research in the field but also
researchers and engineers in other fields who are firsttime or inexperienced users, thereby achieving broadbased expansion of the MEMS industry.
The MemsONE system was developed jointly by
three software developers (each handling its own fieldof specialty), five companies engaged in projects
relating to MEMS devices (each of which contributed its
experience and achievements to create specifications
and conduct evaluations), 13 university researchers(who provided their state-of-the-art knowledge andwisdom), and one research institution (whichprovided the measurement technologies that it had
accumulated over a long period of time).
The analytical functions needed for MEMS design
were provided in all-in-one fashion. The mostsignificant feature of the software is its Japanese
language response capability, making it easy forbeginners to use (see figure below).
Functions provided by the software include
standard analysis and design, unique “inverse design”
in which masks and processes are designed from thefinal structure, evaluation of bonding and packaging(which is involved for resolving many problems in the
MEMS development phase), nanoimprinting analysis

3. Beta version distribution schedule– Publicity: Information regarding the beta version
distribution will be provided on the website, andthrough the media, at the beginning of May.
– Distribution cost: The cost will be approximately JPY
10,000 yen per license.
– Use environment: Details will be posted on the website.

Framework software

User-friendly interface

CAD modeler

Mask layout

Automatedlattice formation

Process recipes

Analytical settings

Display ofanalytical results

Mechanical simulator

Process simulator

CAD data converter

Strain/stress analysis
Electromagnetic fieldanalysis

Anisotropic
wet etching

Piezoelectric analysis

Dry etching

Thermal analysis

Multi-process

Effects of ambientgas flow

Thermal nanoimprinting
analysis

Coupling analysis

Photonic nanoimprinting
analysis

Databaseinterface
Plug-in interface

Expanded functions
Inverse process analysis
Bonding / packaging
analysis

Material andprocess database

Analytical function modules

External plug-in4

Knowledge database

Material and process databasefor enhanced precision

Plug-in database