MMC Activities..............1Column.......................4
Overseas Trends............5
Member’s Profiles .........6Worldwide R&D ............8

MMC Activities

The 10th International Micromachine/Nanotech Symposium
The 10th International Micromachine/Nanotech Symposium
will be held on November 11 (Thursday), 2004, at the Science
Hall of the Science Museum (Kitanomaru Park, Tokyo), and isbeing organized by the Micromachine Center.
This is the 10 t h symposium since the 1 s t International
Micromachine Symposium was held in 1995. Supported by
METI and NEDO, the symposium aims to establish anddisseminate micromachine technology, as well as promoteawareness of micromachine technologies in various industries.
Since the 8th symposium, held in 2002, its focus has widened toinclude the field of nanotechnology, with the sub-title"Foundation of Industrial Technology in the 21st Century".
The symposium was planned by the organizing committee(committee chairman: Professor Isao Shimoyama, The
University of Tokyo), and the program and guest speakers
decided by the program committee (committee chairman:Professor Hiroyuki Fujita, The University of Tokyo).
Furthermore, to reflect international perspectives and to enrich
the content of the symposium, an advisory board has been
established comprising nine representatives from the U.S.A.,
Britain, Germany, France, Italy, the Netherlands, Australia,
Canada and China, who participated in the 10th Micromachine
Summit held earlier this year in Grenoble, France. Speakers
from overseas have also been invited to address the symposium.
Micromachine technologies are starting to play a crucial rolein supporting peace of mind and safety in our advanced
information society. Moreover, bold challenges in the frontier
fields of next-generation micromachines and NEMS are taking
place in response to trends in the cutting-edge technologies ofnanotechnology, biotechnology and information technology,innovative areas of late. A variety of policies are being tried toestablish micromachines technology's status as the bedrock fornext-generation industrial technologies and the cornerstone forthe creation of new industries. The symposium plans to invite
speakers from the forefront of the field, from both Japan andabroad, to speak about the state of micromachine technologies
and their development. The symposium program will comprise
five sessions, and lectures are to be presented by four speakers
from overseas and eleven from within Japan.

During Session 1, "the Opening," the Director of theIndustrial Machinery Division in the Manufacturing Industries
Bureau of the Ministry of Economy, Trade and Industry (METI)
will address the symposium. This will be followed by a special
lecture by Professor Susumu Sugiyama of Ritsumeikan
University, director of the university's Research Center for
MicroSystem Technology, entitled "New progress of integrationand fusion in MEMS -Expectations for new industry creation."As the keynote speech of the symposium, we can expect thisInternet Home Page : http://www.mmc.or.jp/

lecture to provide valuable information about technical policies
and the future trends surrounding MEMS.
Session 2, "Micromachine technology for safe and secureadvanced information societies," will feature the following threelectures by senior figures in some industries that are closely
linked to our everyday lives -cars, information equipment andmedical devices:
1. MEMS for automotive electronics systems
2. Display and MEMS
3. State of the art technology for endoscopes
It is anticipated that these lectures will convey the power ofmicromachine technologies.
For Session 3, "New MEMS/systems and technology," wehave planned seven lectures about innovative research. The
three lectures on feasible future-oriented network systems
using MEMS include the views of Crossbow Technology Inc.,
which developed wireless sensors ideal for ubiquitousenvironment R&D, and IMEC, which focuses on research about
FR-MEMS and innovative network systems using RF-MEMS.
There will also be a variety of lectures covering subjects such as
smart skin for turbulence control using micromachinetechnology, biodevices, image sensors, and the nanoimprinting
technology that is revolutionizing micro and nanomachining.
Session 4, "Policy trends of MEMS research anddevelopment" features four lectures by speakers from Japanand overseas, and takes a look at policies to encourage MEMS
R&D. Among the lectures, Professor William C. Tang, formerly aDARPA researcher and now professor at the University ofCalifornia, Irvine, will speak about America's strategies forresearch into biomedical applications for MEMS, and Professor
Hidetoshi Kotera of Kyoto University will talk about theMETI/NEDO MEMS design & analysis support systemdevelopment project (MEMS-ONE Project), launched in anindustry-academia consortium by Micromachine Center.
The 15 t h Micromachine Exhibition will be held at theScience Museum from November 10 (Wednesday) to November12 (Friday), 2004 and will feature a diversity of exhibits
presented by micromachine-related businesses, universities,and organizations. We believe that this micromachine exhibition
and the symposium will provide a great opportunity forparticipants to obtain a clear, comprehensive picture of cuttingedge micromachine technologies, and we recommend
attendance at both events in order to see real micromachines inaction. Symposium participants can gain free admission to themicromachine exhibition simply by showing their participation
cards. The deadline for applications to attend the symposium isOctober 29, 2004. If seats are available, applications will be
accepted on the day of the symposium to enable as many
people as possible to attend.

PROGRAM
November 11, 2004, Science Museum, Tokyo
8:45 ---Registration

Session 1

Opening

Chairman: Mr. Keiichi AOYAGI

9:15 --- 9:20

Opening Remarks

Dr. Tamotsu NOMAKUCHI,Chairman, Micromachine Center

9:20 --- 9:25

Guest Speech

Mr. Yoshinori KOMIYA, Director, Industrial
Machinery Division, Manufacturing Industries Bureau, METI

Special Guest Speech
9:25 --- 9:55

Session 2

New Progress of Integration and Fusion in MEMS- Expectation for New Industry Creation Micromachine Technology for a Safeand Secure Highly Information SocietyProf. Susumu SUGIYAMA, Director, ResearchInstitute for Micro System Technology, Ritsumeikan University
RITSUMEIKAN UNIVERSITY

Chairman: Prof. Hiroki KUWANO

9:55 --- 10:25

MEMS for Automotive Electronics Systems

Mr. Touma FUJIKAWA,TOYOTA MOTOR CORPORATION

10:25 --- 10:55

Display and MEMS

Mr. Yutaka TAKEI,Sony Corporation

10:55 --- 11:25

State of the Art Technology for Endoscope

Mr. Hiroyuki FURIHATA,OLYMPUS CORPORATION

Session 3New MEMS / System and Technology

11:25 --- 11:55

Anytime-Anywhere Wireless Sensor Networks- Smart Dust -Mr. John CRAWFORD,Crossbow Technology, Inc., U.S.A.

11:55 --- 12:25

Autonomous Microsystems for Healthand Comfort Monitoring Applications

Prof. Dr. Chris Van HOOF,IMEC, Belgium

Chairman: Prof. Hiroyuki FUJITA

12:25 --- 13:10

Lunch

13:10 --- 13:40

MEMS Network Systems

Prof. Hiroki KUWANO, Tohoku University

13:40 --- 14:10

Development of Smart Skin for Turbulence Control
with MEMS Technology

Prof. Nobuhide KASAGI,THE UNIVERSITY OF TOKYO

14:10 --- 14:40

Advanced Biodevices Based on Nanomaterials
and Microchip Technology
and their Biomedical Applications

Prof. Eiichi TAMIYA,Japan Advanced Institute of Science and Technology

14:40 --- 15:10

Nanoimprinting- Innovation for Micro and Nano Machining -Prof. Dr. Ryutaro MAEDA,
National Institute of Advanced Industrial
Science and Technology

15:10 --- 15:40

Integrated MEMS Array- Uncooled Infrared Image Sensor -Prof. Masafumi KIMATA,
Ritsumeikan University

Chairman: Prof. Isao SHIMOYAMA

15:40 --- 15:55

BreakSession 4

Policy Trends of MEMS Research and Development

15:55 --- 16:25

Status and Future Trends of MEMS
Research in the U.S. for Biomedical Applications

Prof. William C. TANG,
University of California, Irvine

16:25 --- 16:55

Market Trends of MEMS

Prof. Isao SHIMOYAMA,THE UNIVERSITY OF TOKYO

16:55 --- 17:25

EC FP6 Network of Excellencein Multi-Material Micro-Manufacture (4M)

Dr. Stefan DIMOV,Cardiff University, U.K.

17:25 --- 17:55

Development of MEMS Designand Simulation System

Prof. Hidetoshi KOTERA,
Kyoto University

Session 5Closing

17:55 --- 18:00

Closing Remarks

Chairman: Dr. Ryutaro MAEDA

Chairman: Prof. Hiroyuki FUJITA
Mr. Keiichi AOYAGI, Micromachine Center2