MEMS Foundry Service Industry Committee
Kazushi Tomii, Matsushita Electric Works
Chair, Foundry Service Industry Committee of the MEMS Industry(1) Managing the foundry service network

1. Overview

In order to enhance contact between users andmanufacturers, we have provided a help desk on the FSICWeb site entitled MEMStation for accepting inquiries
from users. Beginning services in July 2005, MEMStation
provides a relatively easy approach to choosing a suitablefoundry business.

As micro-electro-mechanical systems (MEMS)
have gradually become more practical, a vast market
has begun to open up for MEMS devices. In recentyears, the role of foundry services has become
increasingly important in developing andmanufacturing MEMS devices. The MEMS Foundry
Service Industry Committee (FSIC) has been involvedin constructing a network of Japan’s foundry services.
This article outlines the activities of the FSIC.

(2) Instruction and joint public relations activities
through MEMS seminars

Since 2003 the FSIC has planned and conducted
MEMS seminars targeting MEMS engineers. Held twice ayear in Tokyo and Kyoto, for a total of seven times thus
far, the seminars have received favorable reviews. We
have also organized various joint seminars with exhibitors
at the Micromachine Exhibition in order to promote thefoundry network. Last year through the collaboration
with regional public research and testing institutions, wewere able to explain the services of various companies
offering foundry services to more than 100 people.

2. Activities of the FSIC
Formed within the Micromachine center in 2002, theFSIC has regularly held conferences on issues shared by
MEMS foundries and has performed activities forpromoting services at MEMS foundries to potential users.
The membership of the committee is currently at elevenbusinesses and organizations involved with MEMS
foundries having varied strengths and specialties. Below
I will describe the committee’s primary activities andendeavors planned for the future.

(3) Dissemination of the MemsONE MEMS design andanalysis tool

The FSIC currently plans to participate in postproject dissemination activities for the NEDO projectcurrently underway to develop a design and analysis
support system for MEMS called MemsONE.
(4) Motion to expand the MEMS industry

Conventionally, MEMS has been more difficult tostandardize than semiconductors, with each company
developing their own designs and processes. As a result,more time is often needed to commercialize MEMS
devices, and small and medium sized companies using
research findings from universities and the like cannot
easily reach the stage of MEMS mass production andcommercialization. In light of these problems, we would
like to discuss and propose measures for enhancing thefoundry’s functions, such as creating design guidelinesand developing process menus, in order to promote useof the foundries.

Photo 1 Members of the MEMS Foundry Network

3. Conclusion
Beginning this year, the FSIC will operate within theMEMS Industry Forum under the Micromachine Center.
Our objectives for this year include developing broader
intercourse with the industrial world and strengthening
the collaboration among industry, government, andacademia, while continuing to advance the constructionof the foundry network.

Photo 2 How the MEMStation works

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