Construction of a Fine MEMS Knowledge Database (DB)- Goal: utilization and dissemination as industrial infrastructure The Highly Integrated / Complex MEMS (Fine MEMS)
Manufacturing Technology Development Project is a three-year
project being conducted in FY 2006 - FY 2008. Commissionedand subsidized by the New Energy and Industrial Technology
Development Organization (NEDO), this project aims toestablish the technology that will enable the manufacture ofhighly integrated and complex MEMS devices that are compact,conserve energy and offer high performance and high reliability.
The Fine MEMS Knowledge Database Construction Project isalso being promoted in connection with this project, with thegoal of organizing the achievements and knowledge gained
through research and development in the Fine MEMS Projectand information regarding international conferences and so on
in database form to provide an environment that can beemployed easily by researchers and engineers working todevelop and manufacture fine MEMS.
To ensure that users are able to use the knowledge
database easily, and to promote ongoing updating of theknowledge data in the database, it is essential to construct anenvironment that allows joint collaboration by multiple users at
the same time and does not require special applications or
knowledge of specialized nomenclature. As shown in Fig. 1, amajor feature of the database system, is the introduction of a
web browser / MediaWiki system – the same type of system as
the Wikipedia free online dictionary – as the infrastructure forachieving this database, enabling data to be viewed and updated
easily by anyone with an Internet connection. The basic

premise of the system design is that, once information has been
disclosed publicly on the Internet, it will be added to theMemsONE knowledge database to enable efficient use anddissemination.
By FY 2007, more than 1000 items of knowledge data had
been registered to the MemsONE database, exceeding thetarget of 1,000 items. The stored data has been organizedaround four MemsONE categories (process, device, material
properties, analysis) using keywords developed in this study.
The knowledge data is also being augmented through theaddition of laid-open patent data and Western patent analysis
references corresponding to development topics. To enable
users to quickly locate the information they need, a full text
search function using a precision Japanese language searchengine and various types of ranking display functions that allow
visualization of the status of the data stored in the database
have been provided. In the remaining six months of thedatabase construction project, efforts have focused on
improving the quality of the registered data, updating patentdata, building a top page for general Web access and creating
terms of use and guidelines, and the work is progressing at afever pitch. The database will be made available on the Internet
at the beginning of FY 2009, and activities to encourage ongoing
improvement of the knowledge data will be conducted to enable
the database to be used as a part of Japan’s industrial
infrastructure.

An environment that can be created jointly by multiple users without the need for special applications
or knowledge of specialized nomenclature

Project achievements

Construction of a database system that users can freely add to and view on the Internet- Use of web browser and MediaWiki system as the infrastructure for the knowledge database- Wiki (collaborative work tool for people viewing the information) Blogs (individual informational exchange tool)

Latest informationfrom academic societies, etc.

To fine MEMS
knowledge database

Typical example of knowledge databasecreated by participants using a Wiki

Wikipedia(free online dictionary)Research & development
members

Wiki enables efficient data editing &accumulation and system construction

Fig. 1 Construction of an Internet-based Shared Collaboration Environment
知識データ入力画面（メインページ）

Accumulation and Organization of Knowledge Data

ファインMEMS分類キーワード
別の入力ランキング
入力データ例- No. of data items registered: 1,078(exceeding the target of 1,000)- Organization of knowledge data using keywords
in four categories(process, device, material properties, analysis)that were developed in this study

キーワード毎の入力ランキング- Includes laid-open patent data and Americanand European patent analysis references corresponding
to development themes / Full text search capability

事例入力初期設定画面

Fig. 2 Overview of Knowledge Database System and Upload Function

4

JP公開・US登録、欧米
PCT特許の分析データ