The 10th Micromachine Summit
budgets in general, and the prefix "nano" is more
frequently being used with "micro." The term MST(microsystems technology) that has conventionallybeen used in the EU in particular is now being replacedwith MNT (micro-nanotechnology).
(2) Although MEMS and MST products are now being
developed, these developments are insufficient togenerate a large market.
(3) Foundries have rebounded since the burst of thecommunication bubble, and business conditions haveimproved.
(4) Countries that were latecomers to the field have taken
up research activities in such specialized fields asoptics.
(5) There has been many activities aimed at putting
together international networks, such as NEXUS basedin Europe or MANCIF based in America, with thenetworks competing to attract new members.
Limitations in development and commercialization withthe traditional individual organizations have apparently
led to an increase in membership in these networks.
(6) We are now seeing research conducted on sensors
designed for social issues, such as the detection of
SARS and soil contamination. Other participants
introduced studies aimed at dream-like applications forthe long term. Also, an EU project has initiated basic
research involving infrastructure, including a study on
precision combining the efforts of universities andresearch institutes in various countries.
The 11th Micromachine Summit will be held on May 2-4
in Dallas, Texas (America). Further, in a meeting of theChief Delegates, it was determined that Beijing, Chinawould host the 12th Summit in 2006.
The technical tour on May 5 included a visit to thewafer manufacturer SOITEC. SOITEC imports its siliconfrom Japan's Shin-Etsu Chemical Co., Ltd., fabricatessilicon wafers, further modifies these wafers into SOI
wafers according to its own patented "Smart Cut" process,and exports 80% of these wafers to America as ICmaterials. SOI wafers are employed by IBM for their highperformance and low power consumption, and are also
being marketed in Japan.

The 10th Micromachine Summit was held in Grenoble,
France May 3-5. The Summit was co-sponsored by
NEXUS, CEA Léti, MINATEC, and FEMTO-ST and waspresided by Gaëtan Menozzi, the chairman of NEXUS.
This year, 108 people––the highest ever––participatedfrom twenty-three countries and regions. A total of sevenparticipants came from Japan, including four delegates
and three observers. Of particular note was theparticipation of Israel, which is facing severe conditions in
the international community, India, which is earning
foreign capital in the software industry, and Poland andRomania who have become independent from the former
Soviet Union and recently have begun participating in theEU. In addition, a professor from the University of Ho Chi
Minh in Vietnam was present as an observer from France.
Hence, research and development on micromachines andMEMS has now spread to these countries.
The objective of this Summit has been to provide anannual forum for the free exchange of ideas among peopleof high standing in the field regarding initiatives and thefuture outlook toward the policies, education, andindustrialization of micromachines. The forum has
become increasingly more highly regarded as thedevelopment of MEMS and MST advances towardindustrialization. As an organizer of this international
Micromachine Summit, Japan received high praise in
Chairman Menozzi's opening speech.
The program for this year's Summit was configured ofthree sections, beginning with a reception on the first day
to provide participants with a chance to meet one
another, two days of conferences, and a technical tour on
the final day providing a look at the achievements ofdevelopment and companies involved in the field. In
addition to the traditional country review, the two days ofconferences on May 3 and 4 also included sessions on
government policy, national programs, andinfrastructures; education; industrial developments in
micro- and nanotechnologies (MNT) and the future
outlook of advanced research in MNT, and featured a totalof fifty-six presentations.
This year's Summit revealed the following information.
(1) Most research projects are dependent on governmental

6