MMC Activities

The 2006 International Micromachine / Nanotech Symposium: Report
The International Micromachine/Nanotech Symposium(Micro/Nano 2006) and Micromachine Exhibition were held in2006 as a combined event for the first time at the Tokyo
International Forum (Yurakucho, Tokyo) and other venues.
The MEMS Standards Internationalization Workshop,
MEMS Forum, the 12th International Micromachine/Nanotech
Symposium, and Report on MEMS-ONE Project Achievements
were all held over the three days (November 6-9) of theMicro/Nano 2006, attendance at each event surpassing
expectations. The Micromachine Exhibition was held over twodays, November 7-9, with the record attendance surpassing theprevious record by 2,638 (9,098/11,736) visitors. The 10 th
Conference on Miniaturized Systems for Chemistry and Life
Sciences (µTAS2006) was also held concurrently (November 59, 2006) and the synergistic effect of this event also contributed
to the tremendous success of Micro/Nano 2006. Detailed
reports of each of these events follow. The organizers wish to
express their deep gratitude to all those who cooperated or
assisted in the organization and holding of Micro/Nano 2006.
(2006 International Micromachine / Nanotech Symposiumand Micromachine Exhibition Secretariat)

The 2nd Workshop on Characterization of Materials for MEMS / MST Devices“MEMS Evaluation Methods and Standardization”

Used in many fields from sensors to man-machine interface
and medicine, the automobile industry to IT and AV, MEMS has
become a leading growth industry on a worldwide scale, yet theMEMS industry has almost no universal standards, a fact which
is a significant impediment to industrial expansion.

• Dr Huh, KRISS (Korea Research Institute of Standards andScience), Korea• Professor Paul, University of Freiburg, Germany• Professor Muhlstein, Pennsylvania State University, USA• Professor Takashima, Kumamoto University, Japan• Professor Ritchie, University of California, Berkeley, USAA workshop was thus held on November 6, 2006, at theMitsubishi Building in Tokyo with the purpose of having invitedresearchers – world leaders in the MEMS filed whose research
had produced outstanding results – speak on the very latest
MEMS-related micro/nano technologies and evaluation as wellas to provide a forum for the exchange of opinion anddeepening of mutual understanding between countries withrespect to the formulation of international standards.

Bringing together leading researchers whose work focuses
mainly on the characterization of materials for MEMS/MST
devices, this workshop provided many valuable opportunities;
the opportunity to exchange opinions about standardization
with the two researchers from Korea was particularly
meaningful from the standpoint of developing an international
network in the future.

The workshop began with an opening address by Organizing
Committee Chairman Higo (Professor, Tokyo Institute ofTechnology). This was followed by a total of eight presentations– Europe (3), North America (2), Korea (2), Japan (1) - divided
into two sections, “Frontline of MEMS Devices” and “MEMSEvaluation Methods and Standardization”. The presentations
were listened to by a closely attentive audience ofapproximately 80 participants comprising representatives orassociates of businesses, universities, and research institutions.
In order of presentation, the speakers were as follows.

The fact that we were able to gain the understanding of theAmerican participants with regard to Japan’s promotion ofstandardization efforts was also a significant move forward,
providing an important pointer for international standardization
activities in the future.

“Frontline of MEMS Devices”• Professor Park, Kyunpook National University, Korea• Professor Hierold, ETH Zurich, Switzerland• Professor Brugger, EPFL, Switzerland

Photograph 1: Workshop in Photograph 2: Workshop speakers
progressand participants

The 17th Micromachine Exhibition Concludes in Success
The 17 th Micromachine was held over three days, fromNovember 7 to 9, 2006, at Tokyo International Forum (Yurakucho,Tokyo); blessed with a great venue and excellent weather, theexhibition was a resounding success.

A record attendance of more than 11,736 people was achieved
over the three days of the exhibition, making the event a runaway
success. Next year the exhibition will be held at Tokyo Big Sight.

The 18th Micromachine / MEMS Exhibition will
be held at Tokyo Big Sight (Ariake, Tokyo)
from July 25 (Wed.) to 27 (Fri.), 2007.

The theme for this year’s exhibition was “InternationalTradeshow for Micro/MEMS and Nanobio Technologies”.
In addition to 13 of supporting Micromachine Center member
organizations and 8 associate members of the MEMS Council,willing and generous cooperation in the arrangement of exhibits
was also provided by private businesses, organizations,universities, and independent public organizations. A record totalof 313 displays (429 booths) were exhibited by businesses,organizations, universities, and research institutions; 19
enterprises from abroad also presented exhibits.

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