TMT!E-ELT"#$%&'()*+,-. /, 01 23, 45 67, 8 9(:;< =>?@ABCDEFGHIJ),KL MN(OPQRS NDTUVW) ,Andrea Bianco, Filippo Maria Zerbi(INAF Osservatorio Astronomico di Brera, Italy),
X5 YZ(:;< [\]^)!"#$%&'()*+,-./01

1February 22-23, 2011

QRSTUVWXF
213•TMT: 4530m678, 9:;, <= >?
JTPF•E-ELT: 4540m6@A >?
B1C•TPF: 4510 mDEFGHI4mJKL
MNOP (NASA, CALTEC, ESA)© JAXA, NAOJ•SPICA, JTPF6<= >?
E-ELTTMT© ESO© CALTEC, California Univ.

30m_`a"R~ 5,000@1µm#$Nb
YZ/[\NaturalSeeing: 0.5”727µm

uv{|:0.03”
12.2 µmrZ]+lx53m0.05 mrZ]+l f30 m

0.5 mm`nopq
L ! W ! H [m]9]^F_`abcdef

y11z
F/10
~ 900=/mmMstVuvwc
F/10

0.6 ! 0.15 !
ghijk
36 ! 9 ! 4.5
0.075
l+:+m`nF/0.62~ 3"!

F/37< !/2015µm ! 3 pix.
rms}~uvwcM`•€(a) stVuvwc(b) •Zq‚

LiNbO3 (n = 2.3)cd?e, 444 g/mm,fgHhijHc(k)Ge (n-4.0) Immersion gratingƒ„…

(c) Immersion grating}~uvwcM†‡

CIAOˆ•Zq‚,op[/0TM(!"!"#, n = 1.35) ‰;pŠ‹Œ•Ž•, 47.2 g/mm

LiNbO3 (n = 2.3)uvwc, 30g/mm, ;p-Œ•˜+50µm
LiNbO3 (n = 2.3)•Zq‚,
444 g/mm, p•Œ‘/’Œ•Ge (n = 4.0)uvwc, ‘“-”k•+–Š—•+-.Œ(N. Ebizuka et al., SPIE 3355, 1998)

TMT, E-ELT#$%&'()*+
TMT: HerzbergQlmnEFopqArs
tEchelleIf=#uvwxyz'{cd?e|}2006~•€#•‚ƒ„…†‡ˆ|E-ELT: BreraQRSpqArs
tVPH grating#;w‰{Š‹Œ•}Ž•#VPH grating•Jqƒ‘’|Echellegram}“”#•–—˜™š›ˆ|tEchelleIf=#uvwxyz'{cd?e|!"#$%&'()*+,-./012
2010~11œk•žfIdŸ# BreraQRS …
Filippo Maria Zerbi6¡¢Andrea Bianco6¡ƒ£“š¤{TMT¥E-ELT, VLT, ¦§¨_`a"#©šˆxyz'žªˆ¤«¬()EF#-®ƒ¯°›|·…¸E-ELT"ND¹#()#›º#»¼#½W—
ESO …5~¾¿™š¤ˆ¨|±²³žBreraQRS¢:´µ;D¢#«¬EF—(¶š›|Volume Grating

u1v1›1œ1 [%]u1v1›1œ1 [%]uvwcM›œ•žŸw¡¢£Hwc¤¥ #/$™dš%Vuvwc•žŸw¡¢£Hwc¤¥ #/$VPH (Volume PhaseHolographic) uvwc

[Oka et. al., SPIE 5005, 2003]¦m§•Zq‚!"#$%&'( 2.6)1.5*+,#-./0+12
35.2°3!in = 0, " < 35.245
67*"#-8$9:;<)VPH=>*%&'(?@A@2.6)1.5 *BCD" > 63.65

Volume Hologram345
RPM: ^©9iª¡V‹«”+, ¬$% (< 400nm) -!"` (460 - 600 nm) Ÿª¡®
CPM: 9’•Œ6¯p•Œ?ª¡V‹«”+, ¬$%6< 400nm?Ÿª¡®
RPP: RPMM°Z”+®
CPP: CPMM°Z”+®
$ •+– (532 nm) ±`!

#•+– (532 nm) ±`"¬$%±`6²³?

<=¨pŒ[‰

Volume Hologram¼¶M‡‰78&_`Xabc^

IJ&KLMAN459
OPQR80STU+VW
XY"ZD[9\]^<¸¹•^‚º» ´^Yµ¶(<=¨pŒ[‰)6&789:;.<=>?@ABCDEFGH<´^Y·+q

VPH'()*&deefg<=½cUa¾¿ÀView8ÁÂÃL6ÄÀ?

(N. Ebizuka et al. SPIE 4842, 2003)

ZnSe0Zq‚Æˆ

VPH•Zq‚ÇXÈÉÊMË²ÌÆˆ

™dš%V•Zq‚

FOCAS (!"`Å350~1000 nm) ˆ}~•Zq‚
opq: 110 ! 106 ! t106 (max)<=½cUaMaÍ-ÎÏÐWXFŸÑ&' (2003Ò7Ó)®
[Ebizuka et. al., PASJ, 2011a]

70XÈÉÊMY¨,[i (z = 1.618)

7057

MOIRCS (EFGHI0.8~2.5µm) JVPHK:;<.

MOIRCS3Jhij (1.1~1.4 µm) VPH
M#EN9k3, 0.8 ” B#lm.
[Ebizuka et. al., PASJ, 2011b]

LMNOPQR*STU.

Ô×m§VPH•Zq‚
FOCAS VPH grating(360 g/mm, Blaze: 800nm,#/$=3.47 )™dš%V grating(300 g/mm, Blaze: 750 nm ,#/$=4.44 )VPH gratingIÔm§m`ÌÕÖ› !

VPH gratingMØ`m`ÙÚÀÁÂyÃƒn#VPHxyz'žÄÅš›NÆƒc>ic#xyÇÈ—ÉÊ¦¨ËÌžSÍÎÏPÐNžÑ¦¨1ÒxyN#xyÓÃ%sÍÎÏ%p#³¸Ô†Õ†{}}}}%s = sin2{&P / sin(2')}
ttt(1)}}}}%p = sin2{&P cos (2') / sin(2')}
ttt(2)}}Ö}P =(n t / (n #), (n=(nmax-nmin)/2(n¸ÂyÃ×ØÙ#ÚÛpÜÝs{t¸z'#Þß{#¸z'àá|SÐN45ÐNPÐNéêëìJéíHçèÝ
MOIRCS"YâHãVPHcd?e: #ä0.984 )m, n=1.53, t=20, '=19.8°@$=1.02)m.
³1, 2Îåæ(n=0.017(Ebizuka et al., PASJ 63, 2011b)

VPH gratingM{|# =31.7 deg.
"n=0.10"n=0.07"n=0.04"n=0.02

3rd
6th
10th

# =30.9 deg.

VPH grating¸xyîƒ;ïð‡¨¢ñòÛƒóð‡¨p;ôõö#< 45° s |÷øùeúû>jH (DCG) #ÂyÃ×Ø ("n)¸ü;~ 0.2|
(I. K. Baldry et al., PASP, 116, 2004)

VPH grating¸xyÒýƒþˆÿ!{xyÓÃƒ"#¦¨|(K. Oka et al., SPIE 5290, 2004)ÛÜVVolume binary grating

n2a=1.5, n2b=1.7• "n = (nmax-nmin)/2—;ïðöï¨|"n ~ 0.3• Fill factor (f=w/d)—Ø$¦¨%¢žÎ°¤S¢
PÐN#&'—½(öï¨|›)š{Ÿ*+ø,-ƒ20 ~50|

(Jepsen, Gerritsen,Opt. L., 1996)ÛÜVVolume binary grating

f=0.5

n=1.45n=2.0

ÓÃ ~100%

f=0.2

ÓÃ 0%;ôõ#.>icî61.7°(Zheng et al., Opt. Com. 282, 2009)

n1=1.46, n2=1.0(Gerritsen, Jepsen: Appl.
Opt., 37,1998)(Gupt & Peng, Appl. Opt., 32, 1993)

¦QVolume binary grating

Ÿ*+ø,-ƒ
20~50|(Bianco, private communication, 2011)

D-RIE (Deep Reactive Ion Etching )Plasma Chamber

Gas Inlet
RF Coil

Aspect ratio > 60RF Unit1 )mPumping PortRF Unit

Wafer/Sample60 )mHelium CoolingGas Inlet

ICP Etcher

Inductively Coupled Plasma

nopqrVstuiv© DENSO CORPORATION All rights reserved.

:«pŒ0ZŒ[ÝdÞ6~ *400?ÝrY[ßàá®
U45â^/[ãäY0•pM‰åæçßÖW!?

Immersion Grating

GIGMICSˆ Immersion gratingMèéTeêëì()
íîïELIDÀ•ëìðÝ30 x 30 x 72 [mm],+ = 68.75ñ

ëìòóô400òó
[Ebizuka et al., Proc. SPIE 2003, 2006]

GIGMICSSi:Aswxy z{|AD(D=80, F/20)
512*412

YZ/[·ûŠ+InSbüýn
256*256

4K‚iE(F/7.7)

800 mmƒ„efg}~•€•*
Immersion•eefg '()*30K

R~ 50,000@10)m, õUkö÷ øùÀÌúèé®
[Hirahara et al., Proc. SPIE 2010]

IRHS3Immersion grating&…†
XYZ[10 µm VW
R/200,000@10)m æ01f?: 120 x 120 x 270 mm}}}}}}}}}æ02C3¾4ý 1000 3¾?

YZ/[þwcMÿ!"Immersion grating© DISCO• rféHc5J¸678
kƒ9… |• :;JfHcƒ<=|• ç>: 120 x 120 x 270 mm#2Cæ0ý100 3¾?

!"##$%ˆImmersiongratingM‰‡ðJTPFÅJapan Terrestrial
Planet Finder$•ž%&Ø`km`bc

Subaru Laser Guide Star
© Subaru Telescope, NAOJ

Diameter: 3.5m
Wavelength: 0.1 ~ 5.0)m© NAOJ / JAXA

$•ž%&×m§m`n
8.2m$%&#'()* : 0.03” @1.0 µm+$%&"',: 1/33 (vs. 1.0” seeing)+$-./: ! 33
3000/mm@1.0”%&"'+ 90/mm@'()*+(&)*-12+34,-./
n1S-TIM39

n2'(Mx"0Zq‚

Polycarbonate

S-FSL5

ÿ!"x"0Zq‚

%+.fm§Mx"0Zq‚
0.2

0.1

0.2
10.88Cytop/-24.97CaF2/15.44SiO2
6.5SiO2/7MgF2
grating(11.1grooves/mm)

FSL5/TIM39/PC
FSL5/TIM39
Grating (12.5 grooves/mm)

0.0

Angle [deg.]

Amgle [deg.]

0.1

-0.1

380~ 850nmÌí"ú
)*%+®

-0.2

-0.3
300

400

500

600
700
Wavelength [nm]}Visible
S-FSL5 (g?>)
S-TIM39 (g?>)
PC
S-FSL5
S-TIM39
uvwxyz'

800

900

A2/A3
: 7.8° }6.0
: -27.3° 37.9
: 22.7° -39.7
in: 12.0° (Fitted350~1000nm): -10.7°:12.5”/mm

0220~ 600nmÌí"ú
)*%+®

-0.1

-0.2
200

300

400

500
Wavelength [nm]

600

700

800

UV-Visible
A2/A3
Cytop (@A'): 10.9° -50
CaF2: -25.0° 112
Sillica: 15.4° 125
CaF2: 7.0° (Fitted inSilica: -6.5° 200~1000nm)
uvwxyz':11.1”/mm•KÌ%+Ým,-E²Õ!-®

LiNbO3-È,/M
Wollaston0Zq‚\]_]

CalciteLiNbO32\]^W
1(400~1,000nm#-8$cd#He)

Angle [deg.]

FTS J`ab

14LN(OE)
14LN(EO)
30LN (OE)/8.95Calcite(OE)
30LN (EO)/8.95Calcite(EO)

20LN(OE)/16.5Calcite (OE)
20LN(EO)/16.5Calcite (EO)
4.5LN(OE)/9Calcite (OE)
4.5LN(EO)/9Calcite (EO)

03
14LN(OE)
14LN(OE)/5Calcite(OE)
14LN(OE)/10Calcite(OE)
14LN(OE)/20Calcite(OE)

2-1

Angle [deg.]

10-1-2400-2-3400

500

600
700
800
Wavelength [nm]

900

1,000

500

600

700
Wavelength [nm]

800

900

1,000

LiNbO3-YVO4, TiO2M
Wollaston0Zq‚
LiNbO3

LiNbO30.5

40LN/11.2YVO4/3.8TiO2 OE
40LN/11.2YVO4/3.8TiO2 EO

LiNbO3: 40°,
YVO4 : -15.8°.

0.0Angle [deg.]

Angle [deg.]

TiO2

0.5
40LN/15.8YVO4 OE
40LN/15.8YVO4 EO

LiNbO3: 40°,
YVO4 : -11.2°,
TiO2 : -3.8°.

0.0

700~3,000nm#-8$He-0.5

YVO4YVO4500

1000

1500
2000
Wavelength [nm]450~3,000nm#-8$He2500

3000-0.5500

1000

1500
2000
Wavelength [nm]

2500

3000

G-;
kVPH gratingI™dš%Vuvwc-01ú¦m§Ý¦›œÝ¦"•def234®
1Ô×m§ÕOK®
kVolume binary gratingI¦Quv`ŸÕ¦›œ®
k0^q”:«ìaÌî5úVolume binary grating6!"##$%ˆImmersion gratingMèé2P7Ô®
18UVâ^/[9:iãäY0•pM‰åæç®
k'(‡ˆ&efg+‰Š‹~Œ•#EN?Ž•••e‘’RWollaston•#EN?Ž••“e•e‘’+”•<