修理実績リスト※下記の修理実績リストに載っているアイテムで修理履歴のない場合の成功率は99.9％です。
修理実績リストにない部品もお気軽にお問合せ下さい。
PART NUMBER

APPLIED MATERIALSDESCRIPTION

0010-10895

Centura Gas Panel Power Supply

0010-50169

P1038A magnet driver

0010-20498

Centura / Endura power supply

0015-09091

Phasetronics Lamp driver0090-03162 Rev 001

SBC Technologies, CL7 CPCI SBC assembly

0090-03467 or 0090-03467A

Synergy V452 SBC PCB

0090-04683 VMICPCI-7326-330100

Mainframe Controller

0090-75014 or 0090-75014A

V21 CPU, ASSY, VME Synergy for CVD

0090-75015

V440 SBC VME controller, made by Synergy Microsystems

0090-76058

Wafer orienter board

0090-76109 or 0090-76109A

V440 SBC VME controller, made by Synergy Microsystems

0090-76110 or 0090-76110A

SV21 SBC VME controller, made by Synergy Microsystems

0090-76111

SV21 SBC VME controller, made by Synergy Microsystems

0090-76133 or 0090-76133A

V452 SBC VME controller, made by Synergy Microsystems

0090-90967

Daq MkII type H data acquisition module

0090-91124 MR71/N

Spin amplifier, motor drive unit, Motech Control

0090-91516

ARC power supply module, AMAT 9500 Ion Implanter

0090-91824

ARC Control DSP

0090-A1371

PS unit ASSY +5V-+15V

0100-00003 or 0100-0003

Stepper drive card

0100-00396

Analog I/O board

0100-00423

I/O distribution card

0100-00793

VGA video controller board

0100-00825

Analog I/O PCB

0100-00854

PIGGYBACK CPU

0100-01734

EVR Lateral Servo PCB

0100-01735

EVR Gap Servo PCB

0100-01749

LFD 300mm Radiance board

0100-01973

LFD 300mm board, Centura RTP lamp failure detector PCB

0100-01985

Enhanced OTF Centerfinder

0100-02016

Analog sync detect BD0100-09008

Pneumatic control BD.

0100-09054

Analog input PCB

0100-09094

Box heater control board

0100-09169

Mizar, expanded RS232 controller

0100-09225

TC AMP INTERLOCK BD

0100-09299

Serial sideboard ASSY

0100-11001

Analog output board

0100-11002

Digital I/O card

0100-20001

SEI board

0100-20003

Digital I/O PCB

0100-20012

Isolation amplifier board

0100-20063

TC Gauge PCB

0100-20068

CCD Array PC board

0100-20069

Wafer orienter board

0100-20100

Analog I/O card

0100-35054

Chamber interface PCB

0100-51005

PCB

0100-51017

Chopper driver

0100-76004

OTF centerfinder

0100-76042

Enhanced OTF centerfinder

0100-76124

Digital I/O card

0100-77017

Lower Pneumatic PC board

0160-A0261

Piezo Amplifier HVPZT E-507-00

0190-00312-001 71-100-1856 REV 01

Radiance, MAG LEV rotation controller 200mm

0190-00318 AMAT 486

Radisys, CPU board

0190-00390

ENI, DPGS-10-05 RF generator

0190-00398

ASTEX, MW controller ARX-X491

0190-00635

Mainframe interface; 300mm mainframe interlock PCB

0190-00820 PS-3310i-RDN-C100

API Controls, servo drive PS-33101-RDN-C100

0190-05387-001 P/N: 71-100-1856

Magmotor Controller box 200mm

0190-05990-001 P/N: 71-000-0111

Magmotor Controller box 300mm

0190-05996

Analog I/O board ASSY

0190-07247 Part no: X2784

Spellman ESC power supply for PVD Endura 300mm

0190-07450

DIDO-0710 board

0190-07451

Analog I/O CPCI card

0190-09378 P1125

Heater driver

0190-09379-A

SBC SV21 Synergy CPU board

0190-09419 P1136

Heater driver

0190-09437 0190-35872

ASTEX AX8200A-CR ozone generator

0190-09560 P1140

P1140 Lamp driver

0190-09667

Synergy V21 SBC

0190-09939

OMS, VX2 stepper motor controller PCB

0190-11525 AMAT PIII

Radisys, AMAT PIII CPU board

0190-11528 PFS-152-CFG002

Radisys, AMAT PIII SBC VME board

0190-11529 AMAT PIII

Radisys, AMAT PIII CPU board

0190-12906 Densan DVE68K/42

Rorze FABS, Mirra, Densan DVE-68K/42 CPU board

0190-12925 Model # 300mm

MAGLEV rotation controller, 300mm; Satcon Power Systems

0190-11670 Satcon PN 710000171

MAGLEV rotation controller, 200mm; Satcon Power Systems

0190-14224-001

Flex Distribution panel

0190-14502 MEI P/N: V6U/DSP

Motion Engineering, V6U/DSP motion controller PCB

0190-14731 VMICPCI-7325-148

VMIC VMICPCI 7325 SBC assembly

0190-15489 Rev 001

SBC Tech. CL7 SBC ASSY; P/N: CL7R2Q0B00C14W

0190-15840

MKS, 4 port UPA for 300mm Reflexion LK CMP tool

0190-19536 M-ELC-JG014VF1

NSK ELC servo controller

0190-20048

Synergy V21 SBC card

0190-22345

Motorola MVME162PA-344SE VME board

0190-24007

CPCI-3720 SBC, MKS-Tenta P/N AS03720-23

0190-24640

GE Fanuc, VMICPCI-7326

0190-25889 Rev 003

CPCI-3840/AMA/PM SBC, MKS P/N AS03840-01

0190-30287 PFS-152-CFG003

Radisys, AMAT PIII CPU board

0190-35302

3 phase driver

0190-35875

Phasetronics Lamp driver, model P1164A

0190-40045 REV.A GMSV36-01-D

GMS V36 CPU board CSMA

0190-40046 REV.A GMSV36-01-F

GMS V36F CPU board

0190-70052

Stepper motor driver0190-70060 P/N 1100-0051-00

Kollmorgen Magnedyne, Magnet drive ASSY

0190-70102

VGA video controller AMET

0190-71157

Microwave Power System MW6, AIM ( Manitou Systems )0190-75084

VGA video controller PCB AMET

0190-76043 or 0190-76043A

V440 SBC card 1 board available for sale0190-76050

VGA video controller

0190-76244

PVD Driver, SCR power controller

0190-76262

Radisys, AMAT PIII CPU board

0240-49812 REV 001 KITCentura control panel model BPC-1701-20-01-LPE-KIT-MON

0500-00249

Pyramid Technical Consultants, X-Scan Controller

0500-01047

End point detector, TEOS

0660-00032 AMAT PIII

Radisys VME PIII 400MHz single slot dual ENET

0660-00600

Universal DAQ module

0660-00633

Universal DAQ module

0660-01534 REV.A GMSV36-01-F

GMS V36 General Micro Systems, AKT chamber CPU board

0660-01624 GMSV36-01-F

GMS V36 General Micro Systems, AKT chamber CPU board

0660-01822 V36F CSMA

GMS V36 General Micro Systems, AKT chamber CPU board

0660-01864 MVME162-P344E

AKT, chamber CPU board MVME162P-344E

0660-90060

Dual headed graphic processor PCB

1140-00394 HF10-729

Power supply ASSY

70210272000

SemVision CX, power supply

70317502100 SLO-SYN 230-EPI

SemVision CX, elevator indexer 230-PI, Superior Electric70317503100 SLO-SYN 3180-PT

PAL Translator, made by Superior Electric Company

COGNEX
このリストにある全てのコグネックス社製ビジョンプロセッサーとシステムは、修理後にカメラと適切なソフトウエアでテストをしています。
ソフトウエアの起動のために使用されていたフロッピーディスクをコグネックスのシステムから取り除くことも可能です（例：VB1、VB3）
これによりシステムの信頼性が大幅に向上し、より長期間使用することが可能となります。詳細は別途ご相談下さい。

PART NUMBER

DESCRIPTION

Acumen 10010 REV B

ISA VisionCard2 wafer recognition PC board

200-0106-1

Vision processor PCB

200-2021-2 REV G

Cognex 6140 PCI vision card for wafer sorter

203-0045 200-0045-3

VM18 vision card

800-5797-1 In-Sight 1701

Cognex Insight 1701 wafer reader camera

800-5798-1 In-Sight 1701

Cognex In-Sight 1701 wafer reader camera

801-5401-01 E model VPM-5434-32

VM16A 203-0075-C vision processor for KLA-Tencor tool801-6101-02 203-2021 REV B3

Cognex 6140 PCI VisionCard for wafer scribe reader

801-6103-02

PCI vision card P/N 203-2021 REV B3801-6107-02

PCI vision card P/N 203-2021 REV B3801-6109-02

PCI vision card P/N 203-2021 REV B3802-4401-01 Model VB3

Cognex 4400 series vision system for Ultratech stepper

MFG: 801-8245-01

MVS-8200 series vision processor, CPCI bus.

8201/CPCI 801-8235-01

Vision processor, CPCI bus, Fuji pick & place machine

8203/VME 200Mhz/64Mb 801-8234-02

8200 series VME vision processor8213/VME 200Mhz/32Mb 801-8218-04 B

Vision processor VME bus, Nikon NSR-204B scanner

MVS-8100 MVS-8100M

MVS-8000 series frame grabber PCI card

MVS-8200/CPCI

Vision processor CompactPCI card

MVS-82400/CPCI

Vision processor CompactPCI card

VB1 P/N 3114-111

Cognex 3100 vision system, KLA-Tencor wafer inspection

VM16 or VM-16

Cognex 5000 series vision card

VM16A or VM-16A

Cognex 5000 vision card 203-0075-C

VM-8 or VM8

CPU board for vision system

VM-10 or VM10

Vision system control board

VM-18A or VM18A

Cognex vision processor, 200-0045-3

VM-25A or VM25A

Vision processor

VM27A 203-0112-RB 200-0112-3

MVS-8000 series MVS-8200/VME vision processor board

VME-4438-1MX 801-4410-01

Cognex 4400 series VME card; 200-0036-0 XCPU; 200-0024

VPM-2004 or VPM2004

CPU board for vision system

VPM-3114 or VPM3114

Vision system control board

VPM-4114-00 or VPM4114-00

Cognex 4100 series VME vision controller, 200-0028 VM-14

VPM-4214-00 801-4201-01

Cognex 4200 series VME processor board 200-0028

VPM-4214-01 801-4202-02

VM14 Vision card, Ultratech stepper 4700, 6700, Titan, Saturn

VPM-4338-00 801-4314-03

Cognex 4300 VME vision processor PCB

Model VPM-5118-32 801-5101-01

Vision card VM16A 203-0075-C

VPM-5238-32 203-0075-RB

VM16A card, KARL SUSS MA150, MA200 mask aligner

VPM-5248-32 801-5207-01

VM16A card, SUSS MicroTec MA150, MA200 mask aligner

VPM-5434-32

Vision card VM16A 203-0075-RB 200-0075

VPM-54416-32 VM16A 203-0075-RE

VM16A vision processor

VPM-5634

VM18A 5600 series vision processor

VPM-5638-S+ 801-5605-02

Cognex 5000 PCB VM18A 203-0045-R4

VPM-5648-S+ 801-5607-01

Cognex 5600 series vision processor

VPM-8100X-000 Rev A Opt:A

Cognex MVS 8100 frame grabber 203-0097 801-8120-01

VPM-8213N/V-5000

Vision processor, Nikon NSR-2205 i14E2 wafer stepper

Other vision cards

Used in DEK, K&F, MPM, KLA-Tencor, Lumonics, DMS,Brooks Automation,SUSS, NADA tech, Nikon, Sony, Ricmar,Baccini and other wafer sorters, SMT
pick & place machines, microscopes, scanners, aligners, screen printers.

PART NUMBER

CORECO IMAGING

MAMBA-100 P/N 37-118-02DESCRIPTION

MAMBA 100 Vision processor PCB

KLA-TENCORKLA-Tencor社製の部品の多くは複雑で修理が困難とされていますが、当社は充分なノウハウと実績があります。
当社では、部品のメカニズムやテスト方法を把握するためにリバースエンジニアリングをしています。
多くの修理業者からもこれらKLA-Tencor社製の部品を修理のために当社にご依頼頂いています。
PART NUMBER

DESCRIPTION

Cognex vision processors/boards

See Cognex

Matrox vision processors/boards

See Matrox

0022458-000

Glentek, SMA8105-1 servo amplirier

0024048-000-R

Data Processing DPB AITII PCB, ASSY 375039

0040292-000

PCB, Data Process BD AIT20043173-000

Wafer APS3.1 board AIT3 APS PCB Fine focus PCB

0059825-001

Motion Engineering DB-VMESA PCB 1007-0031

0070795-000 Rev AA
0072267-000

SBC I/O Expansion PCB

0133235-000

PCA, SBC & SBC daughter board DSPpro VME; DB-VMESA

0218180-000 Cognex VM16A 203-0075

Image processor Cognex 5400 VPM-5434-32 for UV1280

0224013-000

AIT II AITXP Data Process PCB

21-0061

Cognex 5400 vision processor PCB

42392

4 channel motor drive PCB

375039

Data Process AITII PCB for AIT, AIT II, AIT XP

379093

Timing Generator PCB for AIT tools

386065

GPIO PCB for AIT tool512826

CPU Pentium 2 Config.

518727

Corona video card

528870Signal Processor SP1 PCB

538590Matrox Corona, PCI frame grabber PCB, P/N: Corona/8/E

564184

MMD power unit

52-0509

SE detector intensified PDA , UV1250 UV1270 UV1280SE

52-0583

Tencor, DBS LID assembly

54-0287

Prometrix Corp., Stage driver PCA

54-0317

Measurement control board

54-0387 36-0387

Lower Stage Interface II RS75

54-0425 36-0425

Lower Stage Interface II w/interlock RS75 tool Encoder interface

710-401536-00
720-06090-000

WIEN Filter Controller Chassis

720-06139-001

E-T Detector Controller Chassis ETDC for KLA 8100 CD-SEM

720-06223-000

Schottky Gun Controller Chassis

720-06884-002

Column Control Chassis II720-17259-000

ASSY, Stage laser controller MEI Universal-200mm

780-13182-000

ETDC Controller, KLA8100 CDSEM

780-13183-000

Schottky Gun Controller Chassis780-14091-000

Column Control Chassis II780-14688-000-R

WIEN Filter Controller Chassis820-06915-000

Scan Generator II PCB

92-005649-0X

CPU board for SP1 tool

VB1 P/N 3114-111 (all part numbers)

Cognex 3100 vision system for Prometrix UV-1050 UV1050

ASSY 0101260-000 E000041943

Scan Amp ASSYASSY 0101298-000 REV AA

Scan Amp ASSYASSY 277096 REV. E Micro head II

Tencor Instruments, Microhead II, P10 surface profiler

ASSY 330710

Robot interface PCB

ASSY 334197

Tencor Surfscan SP1 Analog board

ASSY 393690

BF2 Analog board, SP1PMON605901KA

Display

Therma-Wave P/N: 14-008645

Cognex vision processor VPM-3114 for Opti-Probe 2600B

Therma-Wave P/N: 14-016101

Cognex 5000 Config PCB; Cognex VM18A 203-0045-R4PART NUMBERTEL

DESCRIPTION

Touch Displays, Flat panels

See DIGITAL Electronics

1886-461039-15 IDB-9846VZ

ASSY LCD IDB

1D80-001496-14

Maintenance controller

2986-411806-11 or CT2986-411806-11

ACT8 Controller

2986-456084-17 or CT2986-456084-17-R

ACT 8 Controller

CT2939-000008-11

MSE181H MSE181D AC Power Box

CT2980-091355-13

TDK MSE181D power supply

CTEC80-000195-11

Digital, FP-VGA 260S-CE4

FP-VGA 260SH-CE3

Digital, flat panel

ESEC80-000193-11-R

Digital, FP-VGA 260SH-CE

SVA004a-1-S SVME/AT-486Ea

Sanritz Automation, CPU board

T-3055DD JAE type: UT3-TLN7-A

Touch panel, JAE model: E280-000022-13

U2e-855DD FP-VGA 260SH-CE

Digital flat panel FP-VGA260SH

VCX2001A Type TD2272A1 02

Visual controller

PART NUMBER
02-275169-00 Rev.A

NOVELLUSDESCRIPTIONASSY, Cleanroom UI, 17 inch; Arista model ADM-1517AP

02-275169-01

User interface enclosure

02-108396-00 887096

ASSY, INTFC board; Sigma 6 Duraflo PCB

19-00127-00 MP8316-V2

Analog output PC board

27-050014-02 Rev.b Model CDP2407-2

Animatics controller, Novellus Concept II27-054088-00 CAT NO A630-413-3000

CI Systems, NTM3 Controller

27-152454-00

8086 CPU card

27-297727-00 Model 685-L-CE

High voltage power supply, Trek model 685-L-CE

ADM-1515BP-R3Arista display for Novellus tool

P/N 27-263160-00 C-2027-D01

Trust Automation LTM 2 axis vector controller

PM-7 650PM-16BG-AFN3

VAT PM-7 Adaptive pressure controller

PART NUMBER

VARIANDESCRIPTION

104718001

Motorola MVME147A, MAIN CPU board

104719002

Motorola MVME133S-1, WH CPU board

ASSY No: 108578002

Dose processor

E 11001041 or E11001041

Ion implant system high voltage power supply

E11005382 PS/EX075PCP01A

Glassman HV power supply PS/EX075PCP01A

E11292270

Analog Digital I/O interface

E15001611

E1500 Servo controller card

E15001612

E1500 Servo controller card

E15001670

ASSY gas flow control PCB

E19000790

Trek, model 678, 0 to -30kV scan amplifier

E19008671

Lambda EMI ARC-FIL power supply

E19014140 Model NO. SPS5509-1

TDI 09004-134271-1 filament power supply

F4725-1 Model MP-100

Dose processor

P15080708 D589-14

6kW ACCEL driver, Accelerator Systems assembly D589-14PMC960 or PMC 960

RLS-200 Controller PC board for 160XP ion implanter tool

X113069001

Kollmorgen BDS3-230/55-28-220 servo drive929-6004S001

Varian Multivac Ion pump controller

PART NUMBER

ASYST

DESCRIPTION

3200-1017-01

ALU 2000 series control PCB

3200-1017-02

ALU-2150 control PCB

9700-2404-11

ALU-2150 NONE/TILT SMIF loader

ALU-2150 NT

SMIF Loader, ALU-2000 series

P/N 6900-1551-01

Controller

PART NUMBER

EBARA

DESCRIPTIONDMD10/20 P/N CER54-8540 or 8450

Motor driver for AA10, AA20 pump

DMD30 CER54-8541

Motor drive

DVP-CPUIDPCBPART NUMBERLAMBDA EMI

DESCRIPTIONEMS 40-150-2-D-0816

Image analyser power supply EMS40-150

TCR 40T125-1-D-0745A

Power supply TCR40T125

MOTOROLA
Motorola社製VMEコントローラ/ボードは多くのOEMツールに使用されています（: AMAT, Varian, Aviza, LAM Research,
TEL, Nikon, Canon その他）
それらVMEボードには多くの構成/仕様がありますが、当社では全て対応しております。
PART NUMBER

DESCRIPTION

MVME147-010A

VME SBCMVME147-011

VME SBCMVME147SVME SBCMVME147S-1

VME SBCMVME147SRF

VME SBCMVME147-XXX (any model number)

CPU VME board

MVME162P-344E

VME SBCMVME162PA-344SE

VME SBCMVME162-XXX (any model number)

CPU VME board

PART NUMBER

NANOMETRICSDESCRIPTION

Model CS-2

Nanospec film thickness measurement system

Model 4000C

NANOSPEC 8000 system servo positioning controller

Model 7001-0066SP

Nanospec 210 AFT film thickness measurement system

PART NUMBERNIKONDESCRIPTION

4S015-166-2 (4S015-164-)

PC board

4S587-050-1AR

COGNEXbase PCB for NIKON NSR wafer stepper / scanner

8213/VME or VPM-8213N/V-5000

Cognex vision processor PCB

TDK power supplies

See TDKPART NUMBER

OLYMPUS OPTICALDESCRIPTION

DBAP-FA-Z EAAC Servo driver

DBAP10CA52CDAAC Servo driver

DBAP30CA13CDA

AC Servo driver

DBCP10CA52CDBAC Servo driver

DBCP30CA23ADBAC Servo driver

PART NUMBER

PANASONICDESCRIPTIONADKF50B5AA

AC servo driver unit

ASDPP360BAE or ASDPP360

KYUSHU MATSUSHITA Electric servo drive

ASDPP500BAE or ASDPP500

KYUSHU MATSUSHITA Electric servo drive

CESB-2011 or CESB2011

DNS control board

UDDF50B5BW

AC servo driver unit

UDDF50B5BZ

AC servo driver unit

PART NUMBER
PE 1261/31U or PE1261/31U

PHILIPSDESCRIPTIONPower supply modulePE 1938/01BU or PE1938/01BU

Power supply module

PE 1940/00 or PE1940/00

PWR supply

PE 1941/00 or PE1941/00

Power supply

PE 1942/00 or PE1942/00

Power supply

PE 1947/49 or PE1947/49

Power supply

PE 4121/01 or PE4121/01

Power supply, also made by Cherokee; Mitra Power Systems

PE 4114/01U or PE4114/01UPower supply, also made by Cherokee; Mitra Power Systems

PE 4162/01 or PE4162/01

Power supply, also made by Cherokee; Mitra Power Systems

TDKPART NUMBER

DESCRIPTION

MSE158

Power supply, DC POWER BOX

MSE181D or MSE181H or MSE181GMSE181 Power supply assembly for TEL tool

MSE 343 or MSE343

Power supply assembly for TEL tool

TDKS-40-200 or TDKS40-200

Power supply for plasma process control

PART NUMBER

UNIVERSAL VOLTRONICS

XRC-60-125P-L17-CL

DESCRIPTIONHigh voltage power supply, PANalytical PW2830 XRF wafer
analyzer

PART NUMBER

VAT

DESCRIPTION

610PM-26AG-0001/0007

PM-2 Adaptive pressure controller

610PM-26NM-0002/036

PM-2 APC

641PM-36PM-0002/119

PM-5 Adaptive pressure controller

650PB-26PM-1005/061

PB-6 APC board

650PM-16BG-AFN3

PM-7 Adaptive pressure controller for Novellus tool

650PM-36PM-1004/130

PM-7 controller, LAM Research P/N 796-098290-002

650PM-36PM-1004/1525

PM-7 Adaptive pressure controller

PM-2

PM-2 Adaptive pressure controller

PART NUMBER

YASKAWADESCRIPTIONCACR-02-SU2WRB

Servo control for Seiko Epson SRC-200 controller

CACR-03-SU2WRB

Servo control for Seiko Epson SRC-200 controller

CACR-03-DS3BUH CESA-804X6

CESA-804 Servo amplifier for DNS Scrubber

CACR-03-DS3BUIY1 CESA-814A

Dainippon Screen Mfg, File No CESA-814A

CACR-A6-SU1WRB

Servo control for Seiko Epson SRC-200 controller

CLSR-1C-N2CE

Linear motor controller

CPCR-0101-NQ1C

Robot controller

CPCR-MR2222

CPCR-MR servo drive

CPCR-SF01B-Y17

Servopack

DDCVR-CR1041

Robot controller