◊✲⫼ᬒ䠄ຍᕤᢏ⾡䛾㐍Ṍ䠅㤳㒔ᅪ໭㒊䠐኱Ꮫ㐃ྜ䠄䠐䡑䠅 ➨㻝㻤ᅇ ᪂ᢏ⾡ㄝ᫂఍䜻䝱䝷䝞䞁㝲ษ๐ຍᕤ◒⢏ຍᕤ㝖ཤຍᕤ䠄̺䛾ຍᕤ䠅㧗⢭ᗘ㧗ရ㉁ຍᕤ叏✀㢮㉸⢭ᐦ䝝䜲䝤䝸䝑䝖ຍᕤ䝥䝻䝉䝇≉ṦຍᕤCVDᅛᐃ◒⢏◊๐䚸䝩䞊䝙䞁䜾䝷䝑䝢䞁䜾䝫䝸䝅䞁䜾㉸㡢Ἴຍᕤ㐟㞳◒⢏ᨺ㟁ຍᕤ㟁Ẽ໬Ꮫຍᕤ䜶䝛䝹䜼ຍᕤ௜ຍຍᕤ PVD䠄䠇䛾ຍᕤ䠅⁐᥋䚸䝯䝑䜻䜲䜸䞁䞉䝇䝞䝑䝍䝸䞁䜾䝺䞊䝄䞊䜲䜸䞁䝭䞊䝸䞁䜾ᯈ㔠ᡂᙧຍᕤ ᢲ䛧ฟ䛧䚸ᘬ䛝ᢤ䛝䠄0䛾ຍᕤ䠅 㗪㐀䚸ᅽᘏᑕฟᡂᙧ⩌㤿኱Ꮫ⌮ᕤᏛ◊✲㝔▱⬟ᶵᲔ๰〇㒊㛛 ෸ᩍᤵᯘ ೧Ẹ

2013/08/20᪊ᮾⲈᇛ
AMT lab. (Advanced Manufacturing Technology Laboratory)

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AMT lab. (Advanced Manufacturing Technology Laboratory)2

3ຍᕤᢏ⾡䛾㐍Ṍ䠄㇂ཱྀ䠅◊✲⫼ᬒ䠄㠀⌫㠃ගᏛ⣲Ꮚ䛾ᛂ⏝䠅䝕䝆䝍䝹䜹䝯䝷䝕䝆䝍䝹䝡䝕䜸䜹䝯䝷䝇䝬䞊䝖䝣䜷䞁

DVD/CD䝢䝑䜽䜰䝑䝥䝴䝙䝑䝖 ᑟගᯈ䠄ᾮᬗ䛷䝕䜱䝇䝥䝺䜲䠅AMT lab. (Advanced Manufacturing Technology Laboratory)

3AMT lab. (Advanced Manufacturing Technology Laboratory)

ග㏻ಙ⏝LD䝰䝆䝳䞊䝹䝦䝑䝗䝬䜴䞁䝖䝕䜱䝇䝥䝺䜲4㠀⌫㠃ගᏛ⣲Ꮚ䛾ຍᕤ౛◊✲⫼ᬒ䠄㧗⢭ᗘ㠀⌫㠃ගᏛ⣲Ꮚ䛾〇㐀䠅ຍᕤ୰䛾ᵝᏊຍᕤᶵᮏయ䝽䞊䜽䛸䝎䜲䝲䝰䞁䝗ᕤලຍᕤ⤖ᯝ౛䝺䞁䝈䛾཰ᕪ䛜ཎᅉ䠖䛯䛸䛘䜀䞉⌫㠃཰ᕪ䞉䝁䝬཰ᕪ
䞉㠀Ⅼ཰ᕪ䞉ṍ᭤཰ᕪ䞉Ⰽ཰ᕪගᏛタィ䛾ၥ㢟• ⥡㯇䛻⤖ീ• ගᏛ⣔䛾䝁䞁䝟䜽䝖໬• ගᏛ⣔䛾ㄪᩚ䛜⡆༢䛻䞉䞉䞉⌫㠃ᙧ≧ĺ㠀⌫㠃ᙧ≧ᡃ䚻䛾౑࿨䛿䚸タィ䛥䜜䛯ᙧ≧䛻ᑐ䛧䛶䛔䛛䛻ṇ☜䛻ຍᕤ䛷䛝䜛䛛䠛㏿䛟䚸Ᏻ䛟䛷䛝䜛᪉ἲ䜢㛤Ⓨ䛩䜛䚹

AMT lab. (Advanced Manufacturing Technology Laboratory)

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AMT lab. (Advanced Manufacturing Technology Laboratory)

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4㉸⢭ᐦຍᕤ䝅䝇䝔䝮㠀⌫㠃ᙧ≧ຍᕤ䛾୺䛺᪉ἲ㻜㻚㻢ᙧ≧⢭ᗘ㻼㻙㼂䠄䃛㼙䠅㻜㻚㻠⌧ᅾ㻌⿵ṇ䛺䛧㻌⿵ṇ㻝ᅇ┠㻌⿵ṇ㻞ᅇ┠㻌⿵ṇ㻟ᅇ┠⿵ṇ๓㻜㻚㻞㉸⢭ᐦຍᕤᶵ䛻䜘䜛ᙧ≧ຍᕤ䠇◊☻䛻䜘䜛⢒䛥䛾ྥୖ㻜㻚㻜⿵ṇᚋ㻙㻜㻚㻞㻙㻜㻚㻠┠ᣦ䛩㻙㻜㻚㻢ᕤసᶵᲔ㻙㻜㻚㻤㻙㻟㻙㻞㻙㻝㻜㻝㻞㻟᭷ຠᚄ䃥䠄㼙㼙䠅ỗ⏝ຍᕤᶵ䛻䜘䜛㠀⌫㠃ᙧ≧䛾⢒ຍᕤ䚸୰௙ୖ䛢ຍᕤᶵୖᐃ䠄CAM䝋䝣䝖ᢏ⾡䝫䜲䞁䝖䠖䞉ᙧ≧㌿෗䞉ᙧ≧ಟṇ䞉◊☻㔞Ᏻᐃຍᕤ⎔ቃᗘ䚸‵ᗘ䚸᣺ື䠅ᕤస≀AMT lab. (Advanced Manufacturing Technology Laboratory)‫↙ܭܤ‬ᄂᄶь߻૾ඥ≎ย‫⇮⇻⇣ܭ‬ⅹ↷↢ᄂᄶь߻⇣⇻⇮↝᧏ႆಟṇ◊☻ἲ䜢฼⏝䛧䛯㠀⌫㠃ᙧ≧䛾௙ୖ䛢ຍᕤᕤල
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AMT lab. (Advanced Manufacturing Technology Laboratory)8⏕⏘ᢏ⾡䛸䛧䛶䛾ຍᕤ䝥䝻䝉䝇䛾᳨ウᢏ⾡⤂௓ᮏ◊✲䛷䛿㧗⢭ᗘගᏛ⣲Ꮚ䛾ຍᕤἲ䛾᳨ウ䛸䛧䛶䚸⌧ᅾ⊂❧䛧䛯ಶ䚻䛾ຍᕤἲ䠄䛯䛸䛘䜀䚸䝎䜲䝲䝰䞁䝗ษ๐䚸⢭ᐦELID◊๐䚸◊☻䛺䛹䠅䜢䝖䞊䝍䝹ⓗ䛻⪃៖䛧䚸ຍᕤ⢭ᗘ䞉ຍᕤ䝁䝇䝖䛜᭱Ⰻ䛸䛺䜛䜘䛖䛻䚸ྛຍᕤἲ䜢ే⏝䛧䛶䛭䜜䛮䜜䛾ຍᕤἲ䛾┦஌ຠᯝ䜢ぢฟ䛧䚸ຍᕤ䝥䝻䝉䝇඲య䛾᭱㐺໬䜢┠ᣦ䛧䛯䚹ᮦᩱ䜸䞁䝬䝅䞁ィ• ຍᕤᮦᩱ䚸ຍᕤᢏ⾡䛛䜙඲㠃ⓗ䛻⪃៖䛩䜛䚹• ຍᕤ䝇䝍䞊䝖䛛䜙䚸᏶ᡂရ䜎䛷䛻୍䛴䛾䝥䝻䝉䝇䛸⪃䛘䚸ᕤ⛬⬟ຊ䚸䝁䝇䝖䛺䛹䝖䞊䝍䝹ⓗ䛻⪃៖䛩䜛䚹䚸⿵ṇຍᕤᙧ≧ຍᕤ
ELID ◊๐௙ୖ䛢ຍᕤᙧ≧䛾๰〇◊☻ or ௚䛾௙ୖ䛢ἲせồ: 㧗⬟⋡㧗⢭ᗘ㒊ရ㧗⢭ᗘᙧ≧䞉ရ఩䛾ಖドⰋዲ䛺⾲㠃ရ఩ せồ: 㧗ရ఩Ⰻ䛔⾲㠃⢒䛥⾲㠃䞉䝃䝤⾲㠃䝎䝯䞊䝆䝣䝸䞊
AMT lab. (Advanced Manufacturing Technology Laboratory)• ᶵୖ9ᐃ䝕䞊䝍䜢ά⏝䛧䛯⿵ṇຍᕤἲ䛾ά⏝䚹

AMT lab. (Advanced Manufacturing Technology Laboratory)105䝝䜲䝤䝸䝑䝖ຍᕤ䝥䝻䝉䝇䛾ຠᯝ◊☻๓ᚋ䛾䝭䝷䞊⢭ᗘ䞉⢒䛥ኚ໬䛾ẚ㍑
ຍᕤ㠃⢒䛥Ra (nm) 䞉ᙧ≧⢭ᗘPV (um)• ຍᕤᮦᩱ䛛䜙䝇䝍䞊䝖䛧䚸᏶ᡂရ䜎䛷䛻୍䛴䛾䝥䝻䝉䝇䛸⪃䛘䚸ຍᕤ䞉ィ ἲ䛾㑅ᐃ䚸฿㐩⢭ᗘ䚸⾲㠃ရ఩䜔ຍᕤ᫬㛫䚸䝁䝇䝖䛺䛹䜢䝖䞊䝍䝹䛷᳨ウ䛧䛯䚹• ᚑ᮶䛿ຍᕤ⢭ᗘ䛸䝁䝇䝖䛾୧❧䛜ᅔ㞴䛷䛒䜛㧗⢭ᗘගᏛ⣲Ꮚ䜈䛾ᛂ⏝䛜ྍ⬟䛸䛺䛳䛯䚹• ᮏᢏ⾡䛾㐺⏝䛻䜘䜚䚸㛗ᑻXFEL䝭䝷䞊䛾〇స䛻ᡂຌ䛧䛯䚹▼ⱥ䜺䝷䝇▼ⱥ䜺䝷䝇◊☻ᚋ

#4000◊☻ᚋ

#4000

◊☻ᚋ

#1200

ຍᕤ㠃⢒䛥Ra (nm)ᙧ≧⢭ᗘPV (um)◊☻ຍᕤ๓◊☻ຍᕤᚋ

CVD-SiCELID◊๐䠇㉸⢭ᐦ◊☻䠇EEM䛾㐃ᦠຍᕤ䝥䝻䝉䝇䜘䜚ヨస䛧䛯㛗ᑻXFEL䝭䝷䞊䛾እほཬ䜃ᙧ≧⢭ᗘ䠄⌮◊䞉኱㜰኱䛸ඹྠ◊✲䠅

AMT lab. (Advanced Manufacturing Technology Laboratory)

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AMT lab. (Advanced Manufacturing Technology Laboratory)12ྛ✀ຍᕤἲ䛾ຍᕤຠ⋡ẚ㍑

ಟṇ◊☻ຍᕤ䛾⪃䛘᪉ĸ⌫≧䝒䞊䝹౑⏝Ⲵ㔜

Z

㉮ᰝ⤒㊰

Yຍᕤ≀

X

䝒䞊䝹ࣃࢵࢻࡢᦂື㐠ືࣃࢵࢻಟṇຍᕤ䛻㐺䛩䜛䝫䝸䝅䝱◊☻ຍᕤ≀䛾ᅇ㌿㐠ື䝒䞊䝹䛾㍈᪉ྥ㏦䜚ຍᕤ㠃㉮ᰝ⤒㊰ຍᕤ≀ࣃࢵࢻࡢᦂື㐠ືࣃࢵࢻ(a) ᆶ┤ຍᕤ≀䛾ᅇ㌿㐠ື䝒䞊䝹䛾㍈᪉ྥ㏦䜚

AMT lab. (Advanced Manufacturing Technology Laboratory)

13(b) 15㼻ഴᩳ◊☻㏿ᗘ䠖V=2ʌR䡊◊☻ຍᕤ⑞ĺ኱༙ᚄ䛻㛵ಀ䛩䜛㉸㡢Ἴ᥼⏝

AMT lab. (Advanced Manufacturing Technology Laboratory)

146☢Ẽ⢓ᛶὶయ◊☻ἲ䛻䜘䜛ಟṇຍᕤ⮬㌿䠋බ㌿ᆺ◊☻ຍᕤ䛾ཎ⌮㈨ᩱ䠖QED JAPAN䜘䜚◊☻䝒䞊䝹ィ⟬ᘧ䠖◊☻䝽䞊䜽䠍䠊බ㌿㍈䜎䜟䜚䛾ᕤస≀䛾࿘㛗䛥䠎䠊ᕤල᥋ゐ㒊䛾᭤⋡䛾ᕪ䠄ᕤලබ㌿䛻䜘䜛ᖹᆒ໬䠅
AMT lab. (Advanced Manufacturing Technology Laboratory)

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R

R1  R2
2 SinTrR sin TC
2

R sin [rW

AMT lab. (Advanced Manufacturing Technology Laboratory)

R sin TC  cosT16◊☻⿦⨨䛾௙ᵝ䛸እほ◊☻⿦⨨䛾タィ䜲䝯䞊䝆ไᚚ᪉ᘧ

X, Y, Z 3㍈PNCไᚚ
X㍈䠖200mm
Y㍈䠖100mm
䝇䝖䝻䞊䜽Z㍈䠖100mm
⧞䜚㏉䛧⢭ᗘ X, Y, Z 3㍈䠖㼼䠎ȝm
᭱኱㏦䜚㏿ᗘ X, Y, Z䠖12mm/min
480㽢625㽢733mm
ᮏయ䝃䜲䝈140kgf
ᮏయ㉁㔞
⮬㌿䠋බ㌿㍈஺ゅș䠖3㼻䠈5㼻◊☻䝴䝙䝑䝖⮬㌿㏿ᗘ䠖0~8000 rpm
බ㌿㏿ᗘ䠖0~400 rpm

AMT lab. (Advanced Manufacturing Technology Laboratory)

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AMT lab. (Advanced Manufacturing Technology Laboratory)

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7⮬㌿䠋බ㌿ᆺ◊☻䛾ᵝᏊ◊☻䜶䝸䜰䛾ᐃ䜲䝯䞊䝆୕㮚ගჾ〇PF-60䜘䜚

AMT lab. (Advanced Manufacturing Technology Laboratory)

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AMT lab. (Advanced Manufacturing Technology Laboratory)

ᐃ⤖ᯝ

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◊☻῝䛥䛾Ᏻᐃᛶ᝿ᐃ䛥䜜䜛⏝㏵• ᮏᢏ⾡䛾≉ᚩ䜢⏕䛛䛩䛯䜑䛻䛿䚸㉸⢭ᐦගᏛ⣲Ꮚཬ䜃䛭䛾㔠ᆺ䛾〇㐀䛻㐺⏝䛩䜛䛣䛸䛷ຍᕤ⢭ᗘ䛸䝁䝇䝖୧❧䛾䝯䝸䝑䝖䛜኱䛝䛔䛸⪃䛘䜙䜜䜛䚹◊☻㝖ཤ㔞 ȝm• ୖグ௨እ䛻䚸኱ᆺኳయᮃ㐲㙾䝭䝷䞊䜔Ᏹᐂ᥈ᰝ⏝䝇䝨䞊䝇䞉䜸䝥䝔䜱䝑䜽䝇䛾〇స䛻ຠᯝ䛜ᚓ䜙䜜䜛䛣䛸䜒ᮇᚅ䛥䜜䜛䚹• ᪂䛧䛔䝟䝽䞊䜶䝺䜽䝖䝻䞁⣲Ꮚ䛾〇㐀ᢏ⾡䛾㛤Ⓨ䚹• 䜎䛯䚸ᮏ◊✲䛾䛯䜑䛻ᩚഛ䛧䛯ᶵୖィ ⿦⨨䜘䜚䚸ᚤ⣽ᙧ≧䜢䜒䛴㒊ရ䜔䛭䛾ຍᕤᕤල䛾䜸䞁䝬䝅䞁ィ䛜䛷䛝䚸㧗⢭ᗘ䛾ᙧ≧ຍᕤཬ䜃ᕤල䛾䜸䞁䝬䝅䞁ᩚᙧ䛻ᒎ㛤䛩䜛䛣䛸䜒ྍ⬟䛸ᛮ䜟䜜䜛䚹◊☻᫬㛫 min

AMT lab. (Advanced Manufacturing Technology Laboratory)

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AMT lab. (Advanced Manufacturing Technology Laboratory)22

8௻ᴗ䜈䛾ᮇᚅ䛚ၥ䛔ྜ䜟䛫ඛ‫׎‬ᇌ‫ܖٻ‬ඥʴ፭ᬔ‫ܖٻ‬ᄂᆮ∝င‫ܖ‬ᡲઃ৆ဦਖ਼ᡶೞನ• ᮍゎỴ䛾◊☻Ᏻᐃᛶ䛻䛴䛔䛶䛿䚸⮬㌿䠋බ㌿ᆺ◊☻ἲ䛾᏶ᡂ䛻䜘䜚㍍ᚤ䛺ᙧ≧ಟṇ◊☻䛜䛷䛝䜛䛸⪃䛘䛶䛔䜛䚹င‫ܖ‬ᡲઃ∝σӷᄂᆮ⇊⇴⇿∞⇝∍∙⇡∙⇥∞• ㉸⢭ᐦຍᕤ䝅䝇䝔䝮ཬ䜃◊๐䞉◊☻ᢏ⾡䜢ᣢ䛴䚸௻ᴗ䛸䛾ඹྠ◊✲䜢ᕼᮃ䚹င‫ܫܖ‬ᡲઃ⇙∞⇭⇉⇳∞⇥∞ӳ᜿• 䜎䛯䚸⮬㌿䠋බ㌿ᆺ◊☻䝴䝙䝑䝖䛾ᨵⰋ䚸ಟṇ◊☻⏝ຍᕤ䝋䝣䝖䛾㛤Ⓨ䛻㛵ಀ௻ᴗ䛸ඹྠ◊✲䚸➇த㈨㔠䛾ඹྠ⏦ㄳ䜢ᕼᮃ䚹⁆‷‾ ‬‒•․ ‟‥•‟‣ ‫‸≞‫‬″⁊ ‬‒•․‷‟ ⁓⁛⁞ ⁙⁡⁫⁓′⁙⁧⁠ ⁓‟⁧†⁓⁕†⁜⁢‟‥•‟‣‣‫․‫‬ྸ߻‫ܖ‬ᄂᆮᨈ• ≉ṦගᏛ⣲Ꮚ䛾ヨస䞉㛤Ⓨ୰䛾௻ᴗ䚸㉸⢭ᐦ䞉ᚤ⣽ຍᕤศ㔝䜈䛾ᒎ㛤䜢⪃䛘䛶䛔䜛௻ᴗ䛻䛿䚸䛚Ẽ㍍䛻䛚ᑜ䛽䛟䛰䛥䛔䚹AMT lab. (Advanced Manufacturing Technology Laboratory)ჷᏡೞ఺оᙌᢿᧉ௎ ͝ൟ‚‫ٽ‬ဋ⇓∉∙⇷⇟‛≷≨≯‬•․ ‟‧•‟․‥‥‣≞≩≤≻‬•․⁗‟ ⁓⁛⁞ ⁩⁞⁛⁠≣⁙⁧⁠ ⁓‟⁧†⁓⁕†⁜⁢23

ኝɟ

AMT lab. (Advanced Manufacturing Technology Laboratory)‟‧•‟․‥‥‣24