Deutsche AkkreditierungsstelleAnnex to the Accreditation Certificate D-K-15007-01-00
according to DIN EN ISO/IEC 17025:2018
Valid from:

09.11.2022

Date of issue:

09.11.2022

Holder of accreditation certificate:Carl Zeiss Industrielle Messtechnik GmbH
Carl-Zeiss-Straße 22, 73447 Oberkochen
The calibration laboratory meets the minimal requirements of DIN EN ISO/IEC 17025:2018 and, whereapplicable, additional legal and normative requirements, including those in relevant sectoral schemes,in order to carry out the conformity assessment activities specified in the partial accreditation
certificates listed below:
D-K-15007-01-01
D-K-15007-01-02
The management system requirements of DIN EN ISO/IEC 17025 are written in the language relevantto the operations of calibration laboratories and confirm generally with the principles of DIN EN ISO
9001.

This certificate annex is only valid together with the written accreditation certificate and reflects the status as indicated by thedate of issue. The current status of any given scope of accreditation can be found in the directory of accredited bodies
maintained by Deutsche Akkreditierungsstelle GmbH at https://www.dakks.de.

Page 1 of 1
This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Deutsche AkkreditierungsstelleAnnex to the Partial Accreditation Certificate
D-K-15007-01-01
according to DIN EN ISO/IEC 17025:2018
Valid from:

09.11.2022

Date of issue:

09.11.2022

This annex is a part of the accreditation certificate D-K-15007-01-00.
Holder of partial accreditation certificate:Carl Zeiss Industrielle Messtechnik GmbH
Carl-Zeiss-Straße 22, 73447 Oberkochen
The calibration laboratory meets the minimal requirements of DIN EN ISO/IEC 17025:2018 and, if
applicable, additional legal and normative requirements, including those in relevant sectoral schemes,in order to carry out the conformity assessment activities listed below.
The management system requirements of DIN EN ISO/IEC 17025 are written in the language relevantto the operations of calibration laboratories and confirm generally with the principles of DIN EN ISO
9001.

Calibrations at the locations:Carl-Zeiss-Straße 22, 73447 Oberkochen
Willy-Messerschmitt-Straße 1, 73457 Essingen

This certificate annex is only valid together with the written accreditation certificate and reflects the status as indicated by thedate of issue. The current status of any given scope of accreditation can be found in the directory of accredited bodies
maintained by Deutsche Akkreditierungsstelle GmbH at https://www.dakks.de.

Abbreviations used: see last page

Page 1 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01

Calibrations in the fields:
Dimensional quantities
Length− Gauge blocks− Diameter− Form error− Linear thermal expansion coefficient
Coordinate measuring technology− Step gauges− Virtual coordinate measuring machines− Application coordinate measuring machines

Valid from:
Date of issue:

09.11.2022
09.11.2022

Page 2 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Oberkochen
Calibration and Measurement Capabilities (CMC)
Measurement quantity/ Calibration item
LengthGauge blocks made of steel
according to
DIN EN ISO 3650:1999

Range

Measurement conditions/ procedure

Expanded uncertainty
of measurement

Remarks

10 mm to 2000 mm I_DI_S_ALM_01_01_A_12:
2019/10
nominal size
Measurement of the mean
size with flat mirror laserinterferometer withmechanical probing of themeasurement surface.
The wringing of bothmeasurement surfaces must
be checked using a suitableflat mirror plate.

for the mean size:
0.05 µm + 0.3 · 10-6 · l

l = gauge block length
Measuring surface
quality as stated in
QMH rsp. in the work
specifications.

for the mean size:
0.05 µm + 0.25 · 10-6 · l

The uncertainty ofmeasurement of thelinear coefficient ofthermal expansion of
object to be calibrated
U(α) ≤ 0.1 · 10-6 K-1

10 mm toGauge blocks made ofceramics according to
DIN EN ISO 3650:1999

500 mmnominal size

Gauge blocks made of steel 50 mm to 500 mm I_DI_S_ALM_01_01_A_13:
according to
2019/10
nominal size
DIN EN ISO 3650:1999
Measurement of the mean
size with a coordinate
measuring machine incomparison with a gauge
block made of steel of thesame nominal size anddetermining the parallelismof the measurement
Length of workpieces withplane parallel surfaces with
optical measurement
surface quality

Valid from:
Date of issue:

10 mm to 2000 mm I_DI_S_ALM_01_01_A_12:
2019/10
nominal size
Measurement of the lengthwith flat mirror laser interferometer with mechanicalprobing of the measurement
surface.
Measurement surface
quality (planarity andparallelism), the linear
coefficient of thermal
expansion α and its uncertainty are considered in themeasurement uncertainty.

09.11.2022
09.11.2022

for the mean size:
0.05 µm + 0.4 · 10-6 · l
0.08 µm + 0.4 · 10-6 · l

l = gauge block lengthl = measured length

0.05 µm + 0.15 · 10-6 · lmaterial: glass ceramics
or ceramics with acoefficient of linear
thermal expansion|α| ≤ 0.05 · 10-6 K-1
and its uncertainty
U(α) ≤ 0.05 · 10-6 K-1

0.05 µm + 0.25 · 10-6 · lmaterial: steel with anuncertainty of thecoefficient of linear
thermal expansion
U(α) ≤ 0.1 · 10-6 K-1

0.05 µm + 0.3 · 10-6 · lmaterial: steel

0.05 µm + 0.4 · 10-6 · lmaterial: ceramics

Page 3 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Oberkochen
Calibration and Measurement Capabilities (CMC)
Measurement quantity/ Calibration item
Thermal expansion
coefficient CTE of
workpieces and standards

Step gauge blocks

Range

Measurement conditions/ procedure

Expanded uncertainty
of measurement

Remarks

I_DI_S_ALM_01_01_A_25:
Maximum dimension
for the calibration
2022/07
Measurement of length andobjecttemperature changes andLength: 2500 mm
mathematical derivation ofWidth: 180 mm
the thermal expansion
Height: 80 mm
Maximum measurable coefficient CTE
length at the calibration
object:1450 mm

UCTE(t) = 0.02 · 10-6 K-1 +1.5 · 10-3 · CTE +(0.027 · 10-6 K-1 m) / L
for 10 °C ≤ t ≤ 30 °C

L = measured length
CTE = thermal
expansion coefficient
The CTE is given as amodel in the form of alinear component α
and a quadraticcomponent β.
Example:UCTE(t) = 0.07 · 10-6 K-1
for steel: L = 1 m
UCTE(t) = 0.09 · 10-6 K-1
for steel: L = 0.5 m

unidirectional probing:
0.03 µm + 0.09 · 10-6 · l

l = step length;to2080 mm I_DI_S_ALM_01_01_A_06:
2019/05
Measurement of the mean
size with flat mirror laserinterferometer with mechanical probing of themeasurement surface.
The perpendicularity
deviation of the measuring
surfaces must not exceed
1.5’.

bidirectional probing:
0.04 µm + 0.09 · 10-6 · lunidirectional probing:
0.03 µm + 0.14 · 10-6 · lbidirectional probing:
0.04 µm + 0.14 · 10-6 · lunidirectional probing:
0.03 µm + 0.18 · 10-6 · lmaterial: glass ceramics
or ceramics with acoefficient of linear
thermal expansion|α| ≤ 0.05 · 10-6 K-1
and its uncertainty
U(α) ≤ 0.05 · 10-6 K-1

l = step length;material: steel with anuncertainty of thecoefficient of linear
thermal expansion
U(α) ≤ 0.1 · 10-6 K-1
material: steel

bidirectional probing:
0.04 µm + 0.18 · 10-6 · l

Valid from:
Date of issue:

09.11.2022
09.11.2022

Page 4 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Oberkochen
Calibration and Measurement Capabilities (CMC)
Measurement quantity/ Calibration item

Range

Step gauge blocks

toto

Setting ring and pluggauges; inside andoutside cylinder
Diameter

Expanded uncertainty
of measurement

Remarks

2500 mm I_DI_S_ALM_01_01_A_06:
2019/05
Measurement of the mean
size with flat mirror laserinterferometer with mechanical probing of themeasurement surface.
The perpendicularity
deviation of the measuring
surfaces must not exceed
1.5’.

unidirectional probing:
0.06 µm + 0.09 · 10-6 · lmaterial: glass ceramics
or ceramics with acoefficient of linear
thermal expansion|α| ≤ 0.05 · 10-6 K-1
and its uncertainty
U(α) ≤ 0.05 · 10-6 K-1

2500 mm I_DI_S_ALM_01_01_A_06:
2019/05
Measurement of the mean
size with flat mirror laserinterferometer with mechanical probing of themeasurement surface.
The perpendicularity
deviation of the measuring
surfaces must not exceed
1.5’.

unidirectional probing:
0.06 µm + 0.14 · 10-6 · l

3 mm to400 mm Measurement of the
2-point diameter with flat
mirror laser interferometerwith mechanical probing of
the measurement surface.

bidirectional probing:
0.08 µm + 0.14 · 10-6 · lunidirectional probing:
0.06 µm + 0.18 · 10-6 · l

3 mm to400 mm Measurement of the
2-point diameter with flat
mirror laser interferometerwith mechanical probing of
the measurement surface.

09.11.2022
09.11.2022

l = step length;material: steel with anuncertainty of thecoefficient of linear
thermal expansion
U(α) ≤ 0.1 · 10-6 K-1
material: steel

bidirectional probing:
0.08 µm + 0.18 · 10-6 · l

0.08 µm + 0.15 · 10-6 · d

VDI/VDE/DGQ 2618
part 4.1:2006

I_DI_S_ALM_01_01_A_08:
2017/06
Measurement withcoordinate measuringmachines

Valid from:
Date of issue:

bidirectional probing:
0.08 µm + 0.09 · 10-6 · l

VDI/VDE/DGQ 2618
part 4.1:2006

Setting ring and pluggauges; inside andoutside cylinder
Diameter

Measurement conditions/ procedure

0.08 µm + 0.25 · 10-6 · d

d = diametermaterial: glass ceramics
or ceramics with acoefficient of linear
thermal expansion|α| ≤ 0.05 · 10-6 K-1
and its uncertainty
U(α) ≤ 0.05 · 10-6 K-1
d = diametermaterial: steel with anuncertainty of thecoefficient of linear
thermal expansion
U(α) ≤ 0.1 · 10-6 K-1

0.08 µm + 0.3 · 10-6 · dmaterial: steel

0.08 µm + 0.4 · 10-6 · dmaterial: ceramics

0.7 µm + 2 · 10-6 · dPage 5 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Oberkochen
Calibration and Measurement Capabilities (CMC)
Range

Measurement quantity/ Calibration item
Roundness deviation

3 mm

to

Straightness deviation of
surface lines

0 mm toMeasurement conditions/ procedure
400 mm Talyrond 61 with
Multiple layer procedure
Single-layer procedure

Parallelism deviation of
surface lines

axial length

Straightness deviation of > 100 mm tosurface lines
Parallelism deviation of
surface lines

100 mm I_DI_S_ALM_01_01_A_08:
2017/06

Remarks

0.015 µm + 7 · 10-2 · RONt RONt = roundness
deviation
0.1 µm
0.4 µm + 0.1 · STRt

STRt = straightness
deviation

0.4 µm + 0.1 · STRt

500 mm

0.8 µm + 0.1 · STRt

axial length

Setting ring and pluggauges; inside andoutside cylinder

Expanded uncertainty
of measurement

1.0 µm + 0.1 · STRt
VDI/VDE/DGQ 2618
part 4.1:2006

Diameter

16 mm, 30 mm, 50 mm Measurement of the
2-point diameter with anominal size
coordinate measuringmachine in comparison witha ring or plug of the same
nominal size

0.11 µm + 0.25 · 10-6 · d

d = diameter

Magnification standards(cylinder with flat area;
flick-standard)

flat area

to 300 µm I_DI_S_ALM_01_01_A_09:
2017/06
to 50 mm Measurement withroundness measuringmachines

0.12 µm + 0.02 · RONt

RONt = roundness
deviation

Diameter

Balls
Diameter

I_DI_S_ALM_01_01_A_07:
2021
2 mm to200 mm Measurement of the
2-point diameter with flat
mirror laser interferometerwith mechanical probing of
the measurement surface

d = diametermaterial: glass ceramics-6
0.08 µm + 0.15 · 10 · d or ceramics with acoefficient of linear
thermal expansion|α| ≤ 0.05 · 10-6 K-1
and its uncertainty
U(α) ≤ 0.05 · 10-6 K-1
d = diameter
0.08 µm + 0.25 · 10-6 · d material: steel with anuncertainty of thecoefficient of linear
thermal expansion
U(α) ≤ 0.1 · 10-6 K-1

I_DI_S_ALM_01_01_A_08:
2017/06
Measurement with coordinate measuring machines

Valid from:
Date of issue:

09.11.2022
09.11.2022

0.08 µm + 0.3 · 10-6 · dmaterial: steel

0.08 µm + 0.4 · 10-6 · dmaterial: ceramics

0.7 µm + 2 · 10-6 · d

d = diameter

Page 6 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Oberkochen
Calibration and Measurement Capabilities (CMC)
Measurement quantity/ Calibration item

Range

Roundness deviation

Expanded uncertainty
of measurement

Talyrond 61 with
Multiple layer procedure

0.015 µm + 7 · 10-2 · RONt RONt = roundness
deviation

Single-layer procedure
Balls
Diameter

Coordinate measuring
technology
Ball and hole bar

Valid from:
Date of issue:

Remarks

Measurement conditions/ procedure

30 mm I_DI_S_ALM_01_01_A_10:
2017/06
nominal size
Measurement of the 2-point
diameter with a coordinate
measuring machine incomparison to a ball of thesame nominal size

0.1 µm

25 mm andto 2000 mm I_DI_S_ALM_01_01_A_14_I1:
2017/06
Axially distance
between ball and hole
center points
Measurement with flat
mirror laser interferometerwith mechanical probing of
the measurement surface

09.11.2022
09.11.2022

0.09 µm + 0.35 · 10-6 · d

d = diameterl = distance between
ball and hole center
points0.08 µm + 0.3 · 10-6 · lmaterial: steel

0.08 µm + 0.15 · 10-6 · lmaterial: glass ceramics
or ceramics with acoefficient of linear
thermal expansion|α| ≤ 0.05 · 10-6 K-1
and its uncertainty
U(α) ≤ 0.05 · 10-6 K-1

Page 7 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Essingen
Calibration and Measurement Capabilities (CMC)
Measurement quantity /Calibration item
Coodinate measuring
technology
Prismatic workpieces

Valid from:
Date of issue:

Range

Coordinate measuringmachine with one forthe implementation of
the calibration procedure specified measuring volume with thedimensions
X = 1160 mm
Y = 2060 mm
Z = 620 mm(the indications X, Y, Z
designate the coordinate axes in manufacturer notation)
Calibrations are performed with probing
elements with a diameter in range
0,3 mm to 30 mm.

09.11.2022
09.11.2022

Measurement conditions/ procedure

Expanded uncertainty
of measurement

Remarks

L = measured length
Tactile measurements using a The uncertainty ofmeasurement iscalibrated coordinate
The measurement uncerdetermined according to tainty is task-specific.
measuring machine and
ISO/TS 15530-4: 2008
determination of geometric
Therefore, no smallest
parameters defined through "Evaluating task specific applicable measurement
measurement uncercontrol geometries (singleuncertainty can be specipoints, straight lines, planes, tainty using simulation" fied for any measuring
circles, balls, cylinders, tapers, using the "Virtualtasks.
toroids) using the evaluation Coordinate Measuring
The here specified
Machine" method.
software of the coordinate
measurement uncerThe measurement
measuring machine.
tainties are exemplary forthe respectively
The measuring points can be uncertainty forbidirectional lengthdescribed measuring
detected by single point or
measurements on steel tasks.
scanning method.
artefacts in measuring
For general measuring
Single-point measuring canpositions according totasks referred to thebe carried out either withDIN EN ISO 10360-2:
accredited scope thefixed, predefined measuring
2010 and in the specified measuring uncertainty
force or with extrapolation
measurement volume is could be significant
on measuring force zero.
for a central stylus (zero differently.
Single point measurements in
distance between center The specified uncertainty
the form of „Self-centeringof the probing ball andin the calibration
measurements” are not used
the pinole axis)
certificate only refers towithin the framework of the
maximum:
the used measurement
accreditation.
-6
Excluded are evaluations of UE0 = 0.3 µm + 2 · 10 · L and evaluation strategy.
This includes measuring
gearing parameters and free and for measurements
point distribution,
form surfaces and the use of with lateral stylus
filtering of the measured
a turntable in the measuring (150 mm distance
between center of thevalues and outlier
process.
probing ball and theelimination.
The calibration values can bepinole axis) maximum:
The measurement anddetermined in a substitution-6 · L
U
=
0.4
µm
+
2
·
10
E150
evaluation strategy isand multilayer method by
explicitly documented inaveraging in order to reduce The smallest applicable
the calibration certificate.
measurement uncerthe measurement uncerThe dimension of a tasktainty for bidirectionaltainty.
length measurements on specific measurement
test pieces made of steel uncertainty can be
and of length L is in the estimated based on theinformation of a
specified measuring
inspection plan. The
volume:L = 20 mm U = 0.3 μm laboratory can do thisL = 1000 mm U = 1.9 μm before the realmeasurement starts.
L = 1980 mm U = 7.4 μm

Page 8 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Essingen
Calibration and Measurement Capabilities (CMC)
Measurement quantity /Calibration item
Prismatic workpieces

Range

Measurement conditions/ procedure

Coordinate measuringmachines with acalibrated measuring
volume of:
X = 1160 mm
Y = 2060 mm
Z = 620 mm

Step gauge blocks

toLength standards for
optical metrology
Distances of edges alignedin the same direction(unidirectional) andcenter-to-center distancesof structures on flat
substrates (photomaskswith CR layer)

1100 mm I_DI_S_ALM_01_01_A_24:
2019/11
Measurement of the mean
size with a coordinate
measuring machine incomparison with a stepgauge block of the same
nominal size
I_DI_S_ALM_01_01_A_26:
2022/08
to 350 mm Substitution measurementwith a line scale of equal
nominal length using acoordinate measuringmachine and optical scanningin transmitted light.

> 290 mm to 500 mm With a line scale of equal
nominal lengths inconnection method
to 350 mm Measurand of arbitrary
nominal lengths

Valid from:
Date of issue:

09.11.2022
09.11.2022

Expanded uncertainty
of measurement

Remarks

The measurement uncer- The stated measurement
tainty for diameter anduncertainties for theform measurements on a scanning mode haveball made of ceramic with been determined in
nominal diameterconsideration of an wave
25 mm, measured infilter according toscanning mode and with DIN EN ISO 16610-21:
a measuring strategy
2013 with a cut-off
according towavelength of 150 W/U.
DIN EN ISO 10360-5:
2018 E,is in the specified measuring volume:for the determination of
the form deviation(evaluation toTschebyschew)
U = 0.23 μm
for the determination of
the diameter (evaluation
to Gauß)U = 0.34 μm
0.06 µm + 0.22 · 10-6 · l
l = step length

0.09 µm + 0.15 · 10-6 · l

l = measured lengthof |α| ≤ 0.5 · 10-6 K-1 andUα ≤ 0.1 · 10-6 K-1
The linear thermal
expansion coefficient α
and its uncertainty aretaken into account in themeasurement uncertainty.

0.13 µm + 0.21 · 10-6 · l

0.15 µm + 0.10 · 10-6 · lPage 9 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Essingen
Calibration and Measurement Capabilities (CMC)
Measurement quantity /Calibration item

Valid from:
Date of issue:

Range

Measurement conditions/ procedure

Expanded uncertainty
of measurement> 290 mm to 500 mm Measurand of arbitrary
nominal length using line
scales in connection method0.21 µm + 0.16 · 10-6 · l

09.11.2022
09.11.2022

Remarks

Page 10 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Essingen
Calibration and Measurement Capabilities (CMC)
Measurement quantity /Calibration item
Length standards for
optical metrology
Diameter of structures onflat substrates (photomasks with CR layer)

Range

0.06 mm toRoundness deviation(RONt)

Measurement conditions/ procedure
I_DI_S_ALM_01_01_A_26:
2018/04
10 mm Substitution measurementwith a circular normal andthe same nominal diameters
using a coordinate measuring machine and opticalscanning in transmitted light.
Twenty-five single-points areprobed according to the dot
pattern of the
DIN EN ISO 10360-7: 2011.
For layer thickness between
30 nm and 190 nm.
The calibration object is
identical to the traceability
standard.

Length standards for
optical measurement
technology
Roundness deviation(RONt) of structures onflat substrates (photomasks with CR layer)

0.06 mm toLength standards for
optical metrology

2D-Range:
900 mm x 1100 mm

I_DI_S_ALM_01_01_A_26:
2018-04
Measurement with a coordi10 mm nate measuring machine andoptical probing intransmitted light.
Twenty-five single-points areprobed according to the dot
pattern of the
DIN EN ISO 10360-7: 2011.
For layer thickness between
30 nm and 190 nm.

2D- Range:
1200 mm x 1980 mm

Valid from:
Date of issue:

09.11.2022
09.11.2022

I_DI_S_ALM_01_01_A_22:
2018/12
Measurement of center
distances and X-, Y-coordinates with a calibrated
coordinate measuringmachine and optical probing.
The measurement is performed on symmetrical 2D
structures (center of a circle,
middle of the line, center of areticle).

Expanded uncertainty
of measurement

0.25 µm

Remarks
Diameter and form error
refer to the probing
points0.3 µm

0.6 µm

0.7 µm + 2 · 10-6 · lForm error refers to the
probing points

l = measured length

1.4 µm + 2.2 · 10-6 · lPage 11 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-01
Permanent Laboratory - Essingen
Calibration and Measurement Capabilities (CMC)
Measurement quantity /Calibration item

Range

Two-point diameter anddistances

Expanded uncertainty
of measurement

I_DI_S_ALM_01_01_A_28:
2018/11
Substitution measurementwith a calibrated standard(ball, ring or step gauge) witha coordinate measuringmachine and tactile singlepoint probing.
up to1100 mmCalculation of themeasurement
uncertainty using themethod „Virtual
coordinate measuringmachine“ based on
ISO/TS 15530-4: 2008
taking into account thesubstitution effect0.1 µm + 0.4 · 10-6 · l

up to2060 mm0.25 µm + 0.3 · 10-6 · l

Balls

Diameter

Measurement conditions/ proceduretoForm error

I_DI_S_ALM_01_01_A_27:
2018/11
Substitution measurementwith a ball by means of acoordinate measuringmachine and tactile singlepoint probing.
Twenty-five single-points areprobed according to the dot
30 mm pattern of the
DIN EN ISO 10360-5:2011

Remarksl = measured lengthd = Diameter(measurement of thehemisphere) The best
measurement
uncertainty is only
achieved with the same
nominal dimension.
Diameter and form error
refer to the probing
points.

Calculation of themeasurement
uncertainty using themethod „Virtual
coordinate measuringmachine“ based on
ISO/TS 15530-4: 2008
taking into account thesubstitution effect0.1 µm0.07 µm

Abbreviations used:
CMC
DGQ
DIN
I_DI_S
VDE
VDI

Valid from:
Date of issue:

Calibration and measurement capabilities
Deutsche Gesellschaft für Qualität e.V.
Deutsches Institut für Normung e.V. – German institute for standardization
Calibration instruction of the Carl Zeiss Industrielle Messtechnik GmbH
Verband der Elektrotechnik, Elektronik und Informationstechnik e.V.
Verein Deutscher Ingenieure e.V.

09.11.2022
09.11.2022

Page 12 of 12

This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Deutsche AkkreditierungsstelleAnnex to the Partial Accreditation Certificate
D-K-15007-01-02
according to DIN EN ISO/IEC 17025:2018
Valid from:

09.11.2022

Date of issue:

09.11.2022

This annex is a part of the accreditation certificate D-15007-01-00.
Holder of partial accreditation certificate:Carl Zeiss Industrielle Messtechnik GmbH
Carl-Zeiss-Straße 22, 73447 Oberkochen
The calibration laboratory meets the minimal requirements of DIN EN ISO/IEC 17025:2018 and, if
applicable, additional legal and normative requirements, including those in relevant sectoral schemes,in order to carry out the conformity assessment activities listed below.
The management system requirements of DIN EN ISO/IEC 17025 are written in the language relevantto the operations of calibration laboratories and confirm generally with the principles of DIN EN ISO
9001.
Thermodynamic quantities
Temperature quantities− Resistance thermometers− Thermocouples− Direct reading thermometers

This certificate annex is only valid together with the written accreditation certificate and reflects the status as indicated by thedate of issue. The current status of any given scope of accreditation can be found in the directory of accredited bodies
maintained by Deutsche Akkreditierungsstelle GmbH at https://www.dakks.de.

Abbreviations used: see last page

Page 1 of 2This document is a translation. The definitive version is the original German annex to the accreditation certificate.

Annex to the Partial Accreditation Certificate D-K-15007-01-02
Permanent Laboratory
Calibration and Measurement Capabilities (CMC)
Range

Measurement quantity /Calibration item

Measurement
conditions / procedure

Temperature quantities
Resistance thermometers,
Direct reading thermometerswith resistance sensor
0 °C

SPRT

to

Pt-10029,7646 °C

I_DI_S_ALM_01_01_A_31:
2021/03
Fixed Points: TPW, Ga

Remarks

Expanded uncertainty
of measurement

3 mK
6 mK

Calibration at temperature fixed points,characteristic curve
approximation according
to ITS-90. The
measurement
uncertainty refers to thecharacteristic curve
approximation in thespecified range.

Resistance thermometers,
direct reading thermometerswith resistance sensor(Pt-100 and SPRT only)

0 °C to45 °C I_DI_S_ALM_01_01_A_17:
2017/06in thermostatic bathes

10 mK

Comparison with standard platinum resistancethermometers

Direct reading thermometerswith resistance sensor

3 °C to45 °C I_DI_S_ALM_01_01_A_16:
2017/06in thermostatic bathes

0.1 K

Comparison with resistance thermometers

Direct reading thermometerswith thermocouple sensor

3 °C to45 °C I_DI_S_ALM_01_01_A_16:
2017/06in thermostatic bathes

0.3 K

Abbreviations used:
DIN
DKD-R
I_DI_S

Valid from:
Date of issue:

Deutsches Institut für Normung e.V. – German institute for standardization
Guideline of the Deutscher Kalibrierdienst (DKD), published by the PhysikalischTechnische Bundesanstalt (PTB)
Calibration instruction of the Carl Zeiss Industrielle Messtechnik GmbH

09.11.2022
09.11.2022

Page 2 of 2This document is a translation. The definitive version is the original German annex to the accreditation certificate.