General Product Catalogue
KITZ SCT Corporation

Ultra High Purity Valves

1

VALVE

p

Ultra High Purity Fittings
FITTING

45p

Vacuum Components

VACUUM VALVE69p

PFA Valves

PFA DIAPHRAGM VALVEPFA Fittings
TUBE BONDING FITTING

Antistatic Unit
eFLOW

91

p

107

p

111

p

■KD (Diaphragm Valves)■KCD (Diaphragm Valves)
Compact Diaphragm Valves■VLCD (Diaphragm Valves)■WD (Diaphragm Valves)
3
6
8
10
11
12

18

High-pressure Diaphragm Valves

20

Diaphragm Valves

25■RD (Diaphragm Valves)■VRD (Diaphragm Valves)■ZCD (Zero Volume Valves)

13
15

Diaphragm Valves

16■Mono-Block Multi-Valves
Block-type
Flicker-type

28

Check Valves

31■IC (Check Valves)■IVB/IVBL
70
Vaccum Isolation Valves■IVBH
Heated Vaccum Isolation Valves 73■IVB/IVBL/IVBH
Heated Vacuum Isolation Valve75
with Slow Exhaust Valve■IVBH-CO15
PID Controlled Digital Temperature
Controller for IVBH Series■For Open/Close Display Use
Magnetic Proximity Switch
IVB Series Options■BRW/BRWH

30

56
58

112

101

Straight-type

42

Clean Butterfly Valves

44■BZD (Clean Butterfly Valves)■SQ (Super Quartz Lock Fittings)
66
Super Quartz Lock Fittings■IF (IF Flange)
67
IF Flange

80

81

■IVWF
Vacuum Butterfly Valves
PCA Series
APC Butterfly Valve■UXG/LG
Vacuum Gate Valves

82

101
FCDN Variable Flow Valves with Bypass
FCDN Variable Flow Valves with Pneumatic Bypass 104
104
FCDN Suckback Valves
FCDT (Fluorine resin diaphragm valve for 200°
C) 105

84
89
90

91

Antistatic Unit■eFLOW
Antistatic Unit

101

40

39

PFA Fittings

108

98

Straight-type■IBC/IBD/IBE (Bellows Valves)

38

PFA Valves■TBN
TBN Welded fitting

95

35

33

59

NW Flange Ball Valves / Heated Ball Valves■FCD (PFA Diaphragm Valve)
FCDN Manual Valves
FCDN Pneumatic Valves
FCDN Variable Flow Valves
FCDN Pneumatic Valves with Bypass

Straight-type“Variac” Variable Flow Valves
Flow-control Needle Valve■IB (Bellows Valves)

Vacuum Components■SCM/SCL Weld Fittings
Super-clean Micro Fittings
Super-clean Long Fittings■SCF Weld Fittings
Super-clean Fittings

32

Ultra High Purity Fittings■CVC (Clean Vacuum Couplings)
48
Gland
49
Nut
50
Gasket51
Union
52
Double Union
54
Manifold

B-Seal-type
C-Seal-type■SBB (Bellows Valves)

Zero Volume ValvesCompact Diaphragm Valves■VLD (Diaphragm Valves)■TD/TCD

Replaceable Seat

Ultra High Purity Valves

2-portMulti-port
Two-step Valves
High Temperature Valves (250°C)
LOTO Valves
Quick Turn Valves

How To Use Product Catalogue
Major Category
KITZ SCT's products are categorized according to six themes.
The categories are color-coded and are noted at the top of the page and in headings.

Ultra High Purity Valves
PFA Valves

Ultra High Purity Fittings
PFA Fittings

KD

Vacuum Components

Middle Categories
Main Specifications
The main specifications show room temperature (about 20°) test data.
There may be cases where the indicated performance cannot be guaranteed when
the usage environment changes.

valves. These valves are of the quality that they can handle the high-purity gases

Diaphragm Valve

Antistatic Unit

Lists each product series.

The KD series realizes a high Cv value for compactly designed direct diaphragm
used in semiconductor production facilities, and they also have high durability andhigh corrosion resistance performance.

■ Features◎ Excellent purge characteristic is realized by minimizing the internal volume to 1.4cm3¹4HSL*=*6WLU[OYV\NOYLK\J[PVUVM]LY[PJHSÅV^WH[OZ
◎ 6YPNPUHS^L[[LKHYLHZLHSTLJOHUPZTLUHISLZOPNOLZ[ZLHSPUNWLYMVYTHUJLK\YHIPSP[`W\YNLWLYMVYTHUJLHUKJVYYVZPVUYLZPZ[HUJL◎ High corrosion resistance performance by carefully selected diaphragm materials and ultimately smallest individual differences based on KITZ SCT's
original molding method realized high durability performance.
◎ /HUKSLZOPNOW\YP[`NHZLZ\ZLK^P[OZLTPJVUK\J[VYZHUKW\YZ\LZWHY[PJSLWLYMVYTHUJL[V[OL\S[PTH[LKLNYLLI`TLHUZVM[OLOPNOLZ[SL]LSWYVK\J[PVU
environment and polished inner surfaces.

Size
The sizes noted are valve sizes and fitting sizes, but for custom specifications
the valve and fitting sizes can be freely chosen.
Example) Valve size ¼" x fitting size ½"

Cv
A numerical value that expresses the ease with which a fluid flows.
The Cv is not a fixed value but varies depending on the usage conditions.
The Cv value of an inch-sized valve (KD, IB series, etc.)
conforms to SEMASPEC #90120394B-STD.
The Cv value of a pipe-sized valve (SBB, IBC/IBD/IBE, BZD series, etc.)
conforms to JIS-B2005-2-3.
Consider the CV value a minimum reference value.

■ :WLJPÄJH[PVUZSizeCv
Maximum Operating Pressure
PCTFE, PI, PFA
Wetted Area Volume*1
Metal
PCTFE
Manual Valve
PFA
Fluid Temperature
Pneumatic ValvePI
Metal (body material)*3
Atmospheric Temperature
Across the
PCTFE, PI, PFA
Seat He Leak
Leak Rates
Metal
Test Rates

Fluid Temperature
The fluid temperature is the range of temperatures of the gas fluid body.
The heat resistance of the handle and actuator part may be limited whenthe entire valve is used at a high temperature.

Amount of Test Leakage
The amount of test leakage complies with that in the SEMI F1 inboard test andinternal acceptance test.
An inboard test (external leakage) is a helium-blowing test in which the inside is avacuum and the outside is at atmospheric pressure.
The internal acceptance test (internal leakage) is a test method that involves
blowing helium at atmospheric pressure from an inlet with the valve closed.
The amount of helium penetration into the valve seat is not stipulated.

Cycle Life*2

KD2 (1/8")

KD4 (1/4")

KD8 (1/2")

0.05

0.27

0.7

KD12 (3/4")
1.7

0.085in3 (1.4cm3)

0.451in3 (7.4cm3)

1.525in3 (25cm3)0.079in3 (1.3cm3)

0.457in3 (7.5cm3)

N/A

142psig (0.98MPa(G))
0.014in3 (0.23cm3)

Inboard He Leak Test Rates
Actuation Pressure
PCTFE, PI, PFA
Manual Valve
Metal
PCTFE, PI, PFA
Pneumatic
Valve
Metal

-10ºC~80ºC-10ºC~150ºC-10ºC~120ºC (150ºC actual results 500,000 cycles)-10ºC~150ºC-10ºC~200ºC

N/A-10ºC~60ºC

d1×10-9 sccs (d1×10-10Pa·m3/s)
d3×10-9 sccs (d3×10-10Pa·m3/s)

N/A

d1×10-9 sccs (d1×10-10Pa·m3/s)
58~101psig (0.4~0.7MPa(G))
30,000 cycles

100,000 cycles
800,000 cycles

N/A

2 million cycles

30,000 cycles

100,000 cycles

N/A:[YHPNO[ÅV^*=*THSL67,5Z[H[L*2 Test Condition / Seat material : PCTFE .HZ!5 Pressure : 0.98MPa*3 Usable only for certain products. For details, contact your sales representative.

■ Product grade
Grade

STD

Body Material

EP

SEP*
SUS316LE(Double melt material)

SUS316L

Surface Roughness
PolishdRa 0.5 µm / 20 µindRa 0.13 µm / 5 µin

Mechanical PolishedElectro Polished
Degreasing+
Precision cleaning

Cleaning
Packaging

Single bagged package

Double bagged package* SEP-316LE:1/8",1/4",3/8", 1/2" are available

Cycle LifeThe cycle Life durability shows actual results under KITZ SCT's test conditions,e.g., N2-charged, maximum operating pressure, room temperature, etc.
These are not guaranteed values because of the differences depending on thenumber of years used and the usage conditions.

■ Wetted area material
Body
Seat
Diaphragm

SUS316L, SUS316LE (Double melt material)
PCTFE, PFA, PI, metal (body material)
Cobalt alloy(3/4" size is SUS316L)

Product GradeFor the product grade and material, the body material that forms the basis of eachproduct and the inner surface treatment of the parts that come into contact withgas can be selected.
Representative examples:
STD-316L : Mechanical polished finish + SUS316L
EP-316L : Electro polished finish + SUS316L
SEP-316L : Electro polished finish + SUS316LE (Double melt material)■ Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
②-VYOPNO[LTWLYH[\YLHWWSPJH[PVUZWSLHZLZLSLJ[HWWYVWYPH[LTH[LYPHSMVYHPYÄ[[PUNZHUK[\ILZ[VHZZ\YLWYVWLYWLYMVYTHUJL2

N o t e s
● Your Product Order
Because our products cover a wide range, please confirm the product number, size, material, and grade from the product code table before placing your order.
● Product Explanation
Due to space constraints, detailed explanations are omitted. Please speak with the sales representative about any unclear points or technical data.
● Customized Products
We also make customized products to meet individual specifications other than those in this catalog.
Please speak with our sales representative after preparing detailed specification requirements.
Incidentally, a "technical number" that is not noted in the product code table is appended to customized product models.
● Product Dimensions
Unless otherwise noted product dimensions shown are given in millimeters.
Because the dimensions given in the catalog are representative values, please treat them as references.
Some tube sizes are given in inches. Please refer to the "Product Dimensions Table" for millimeter conversions.
● Precautions When Selecting a Product- Although there can be an unlimited number of combinations from the product code table, we cannot accommodate all combinations.
Please note that there are some products that we do not handle.
- Unnecessary accumulation of gas or particles may occur with compression fittings due to its internal design. Please be warned when used at sensitive locations.
- When our products are to be used in an environment subject to statutory regulations or when specifications for use, etc., are defined in standards or provisions
arbitrarily established in business locations, etc., where our products are to be installed, select the appropriate products after checking the regulations,standards, and provisions.
- When using our products in fields such as nuclear power, railways, aircraft, aerospace, vehicles, medical equipment, food manufacturing equipment,
entertainment equipment, safety equipment and the like, be sure to check with us in advance and take sufficient safety measures.

Straight Type

Product Code Table
Product Code Table
Size

KD-typediaphragm valve

Options

Operation

Valve Shape

Connection

270° manual

S: Straight
A: Angle
L: L-shape

V: CVC male
VF: CVC female
S: Compression
W: Butt weld

Seat
Material

Handle Color

C:PCTFE
A:PFA
P:PI
M:Metal(body material)*1

Grade + Body Material

Not shown: Blue (standard) STD-316L : Mechanical Polished+SUS316L
RD: Red WH: White
EP-316L : Electro Polished+316L
GR: Green PK: Pink
SEP-316L : Electro Polished+316LE
SL: Silver YG: Yellow-green *2
YE: Yellow OR: Orange
BR: Brown PU: Purple
BK: Black*1 For a metal seat, we can handle only 1/8", 1/4", 1/2" sizes. Since the valve dimensions change if a metal seat is selected, contact our sales representative for details.
*2 SEP-316LE: 1/8" , 1/4", 3/8", 1/2" are available■ Dimensions

Unit: inch (mm)
45°

M

M2

Connection

KD2MS-VC

1/8" CVC Male

KD4MS-VC

1/4" CVC Male

KD8MS-VC

1/2" CVC Male

KD12MS-VC

3/4" CVC Male

C

M1

H

Type

H2
H1
B
L
φA

45°

M

M2

KD2MS-VFC
C

KD4MS-VFC

M1

H
H2
H1

KD12MS-VFC

B
L

KD2MS-SC

M2

M

45°

φA

C

KD6MS-SC

M1

H

KD4MS-SC

H2

KD8MS-SC

H1
L1

B

L1

KD12MS-SC

L

φA

M1

H
H2
H1
B
L

1/8" Butt Weld

KD4MS-WC

1/4" Butt Weld

KD6MS-WC

3/8" Butt Weld

KD8MS-WC

1/2" Butt WeldC

KD12MS-WC 3/4" Butt Weld

H

1.61
2.24
(41.0)(57.0)
2.24
2.68(57.0)(68.0)
3.03
3.19(77.0)(81.0)
4.21
3.86(107.0)(98.0)
2.20
2.24(56.0)(57.0)
2.78
2.68(70.6)(68.0)
3.27
3.19(83.0)(81.0)
7.06
3.86(179.2)(98.0)
3.06
0.24 2.24(77.8) (6.1) (57.0)
1.89
0.31 2.68(48.0) (7.9) (68.0)
2.52
0.37 3.19(64.0) (9.5) (81.0)
2.52
0.50 3.19(64.0) (12.7) (81.0)
4.96
0.56 3.86(126.0) (14.3) (98.0)
1.65
2.24
(42.0)(57.0)
2.13
2.68(54.0)(68.0)
2.72
3.19(69.0)(81.0)
2.72
3.19(69.0)(81.0)
6.14
3.86(156.0)(98.0)

H1

H2

A

B

C

0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.91(23.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.91(23.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.63(16.0)
0.91(23.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.63(16.0)
0.91(23.0)

0.85(21.5)
1.06(27.0)
1.42(36.0)

0.94(24.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
0.94(24.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
0.94(24.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
0.94(24.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)

0.75(19.0)
1.02(26.0)
1.42(36.0)
1.89(48.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.89(48.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.42(36.0)
1.89(48.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.42(36.0)
1.89(48.0)

0.75(19.0)
0.98(25.0)
1.42(36.0)
1.81(46.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.81(46.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.42(36.0)
1.81(46.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.42(36.0)
1.81(46.0)

0.85(21.5)
1.06(27.0)
1.42(36.0)
0.85(21.5)
1.06(27.0)
1.42(36.0)
1.42(36.0)
0.85(21.5)
1.06(27.0)
1.42(36.0)
1.42(36.0)-

M

M1

0.67 2-M4 Depth(17.0)
0.20 (5.0)
1.00 2-M5 Depth(25.4)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.38 2-M5 Depth(35.0)
0.31 (8.0)
0.67 2-M4 Depth(17.0)
0.20 (5.0)
1.00 2-M5 Depth(25.4)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.38 2-M5 Depth(35.0)
0.31 (8.0)
0.67 2-M4 Depth(17.0)
0.20 (5.0)
1.00 2-M5 Depth(25.4)
0.20 (5.0)
1.10 2-M5 Depth 5(28.0)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.38 2-M5 Depth(35.0)
0.31 (8.0)
0.67 2-M4 Depth(17.0)
0.20 (5.0)
1.0
2-M5 Depth(25.4)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.38 2-M5 Depth(35.0)
0.31 (8.0)

M2
M14×1.0
M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M20×1.0

PFA Valves

M

45°

M2

KD2MS-WC

L1*

Vacuum Components

KD8MS-VFC

1/8" CVC Female
1/4" CVC Female
1/2" CVC Female
3/4" CVC Female
1/8" Compression Fitting
1/4" Compression Fitting
3/8" Compression Fitting
1/2" Compression Fitting
3/4" Compression Fitting

L

Ultra High Purity Fittings

Model

φA

Ultra High Purity Valves

Model

Please ask to the sales
representative for special-order
items without a product code.
* Although there can be an
unlimited number of combinations
from the product code table, wecannot accommodate all
combinations. Although productclasses that are not listed in acode table are shown withdrawing numbers as a technicalnumber, some products that havetechnical numbers may be
standard items. Please be awareof this.

-Dimensions Table
The dimensions table shows only
representative products.
Please ask the sales and service
representative about products notshown or detailed drawings.
Dimensions may change dependingon the product specifications, but
the handle color, seat material,
product grade, and the material will
not differ.

* L1KPTLUZPVUMVYJVTWYLZZPVUÄ[[PUNPZ[OLKPTLUZPVUVMOV^MHY[\ILPUZLY[LKMYVTLUKVMIVK`PFA Weld Fittings■ Handle Color
White (WH)

Silver (SL)Red (RD)

Yellow (YE)

Brown (BR)Orange (OR)Green (GR)

Pink (PK)Yellow-green (YG)

Purple (PU)Black (BK)

Antistatic Unit

Blue (Standard)3● Product Improvements
Because improvements are always being made to our products,
changes may be made to the specifications without notice because of performance improvements.
● Breaking the Product Seal
All except for a few of the products we make are produced in a clean room environment where we maintain a high levelof product cleanliness.
Please open the product seal in a clean room environment.
● Notes on UsageAll except a few of our products are premised on use in a clean room or equivalent environment.
In other usage environments there is the possibility that product performance cannot be maintained
We do not bear any responsibility in such cases.
Basic product performance, such as leak performance, may not be guaranteed if excessive jarring is applied to the
product.
Please take adequate precautions when handling our products.
● Precautions When Exporting
When our products are exported, the exporter must obtain permission from the Ministry of Economy, Trade and Industry
based on the Foreign Exchange and Foreign Trade Law's Export Trade Control Order stipulations.
Contact us about anything that is unclear.
● Copyrights and Trademarks
Rights such as copyright and trademark rights to the information, material, images, audio content, design, layout, logos,
etc. in this catalog belong to this company or to the rights holders.

How To Use Product Catalogue[ Product standard dimensions table ][ valve anchoring method ]Unit: inch (mm)Unit: inch (mm)

1/8"
1/4"
3/8"
1/2"
3/4"
1"

Diameter
0.13（3.18）
0.25（6.35）
0.38（9.53）
0.50（12.70）0.75（19.05）1.00（25.40）Nominal Diameter Outer Diameter

Thickness
0.027（0.70）
0.039（1.00）
0.039（1.00）
0.049（1.24）
0.049（1.24）
0.065（1.65）

10A
15A
20A
25A
32A
40A
50A
65A
80A
100A
125A

Materials details
SUS304
SUS316
Austenite
Stainless SteelSUS316L

Panel mount (manual only)

Panel face

MADE IN JAPANMADE IN JAPAN

Panel mount lower hole dimensions
M14

About φ15mm

M19About φ20mm

M20About φ21mm

18Cr–8Ni
18Cr-12Ni-2.5Mo
Type of steel based on SUS304 with Mo added. Better corrosion resistance than SUS304, as well as
excellent pitting corrosion resistance.
18Cr-12Ni-2.5Mo-low C
Has excellent corrosion resistance due to the addition of the Mo and resistance against intra-granularcorrosion because of the low C.
Pure nickel

NickelFluorine resin, polychlorotrifluoro ethylene
Has high mechanical strength and excellent compressive strength. A material suitable forhigh-pressure packing or gaskets.

PCTFE
PFA

0.68
（17.3）
0.85（21.7）
1.07（27.2）
1.34（34.0）
1.68（42.7）
1.91（48.6）
2.38（60.5）
3.00（76.3）
3.51（89.1）
4.50（114.3）
5.50（139.8）Thickness
0.047（1.20）
0.065（1.65）
0.065（1.65）
0.065（1.65）
0.065（1.65）
0.065（1.65）
0.065（1.65）
0.083（2.10）
0.083（2.10）
0.083（2.10）
0.110（2.80）

316L material double-melted to reduce Mn, S, and other impurities in steel.

SUS316LE
NI

Bottom mount

Pipe Size

Tube Size
InchOuter

Fluorine resin, tetrafluoroethylene perfluoroalkyl
Has excellent mechanical strength at high temperatures in particular, and resistance against chemicals.

Resin

Polyimide resin
Boasts higher heat resistance than other organic substances and polymer materials, and has highperformance with respect to mechanical strength and resistance to chemicals.

PI【Flow Path】

Our company’s valve can respond to various flow channels. We will introduce some typical flow channels. ( The side of ▼in the illustration shows the first side ).
In addition, the valve can also respond to the flow channel of a block valve. For details, please ask to the sales representative.
Port

Flow direction

Pattern

4Port

Close

Open

D

D

A

C

A
B

D

D
C

A

Flow direction

Pattern

A

C

A

C

3Port
C

A

B

A

A

B

A
B

C

A

E
Bottom port

C
B

C

B

B

D

D

A

A

A

A

Angle

B

C
B

C

A

A

Angle

B

C

A

C
B

C

C
B

C

2Port
A

A

B

B

B

Open

Close

3Port
C

B

A

Port

B

E

B

C

E

C

Reference: P1 is calculated based on
the specific air as 1 under 1MPa(absolute) pressure.
参考資料 PMaterial
1 とした比重にて計算しています。
1 は 1MPa（絶対圧）の時、空気をCv、差圧
ガス流量特性Cv, differential
pressure
Flow curve

value calculation
formula (Note 1)
Cv 値計算式
注 1）
Accordingformula (Note 2) :FCIの式 注toによる：
2）FCI
Formula for gas
気体に対する式

700
600

Flow
流量
Rate
L ／Lmin
/ min

500

0.04
0.05

Cv ＝

0.1
0.25

(In the( caseof 0.5P
0.5P1))Δ P1 ＜
ΔP＜
の場合

0.27
400

0.3

Cv ＝

(In the( caseof 0.5P
0.5P1))Δ P1 ≧
ΔP≧
の場合

300
200
100
0
0.00

0.1

0.2

0.3

差圧（MPa）
Differential
Pressure (MPa(G))

0.4

注
値計算式は慣用的に用いられるため、SI
T11）Cv: Valve
Inlet Temperature [K]単位系ではなく、旧単位系のままで示します。
注 2）FCI-62 : Recommended Voluntary Standard
NoteFormulas
1) The traditional
Cv-valuecalculationfor Sizing Control
Vaivesformula is used, therefore, the formula
is indicated in old unit type but not in
SI unit type.

Cv, differential
pressureFeature of gas flow rate
Cv、差圧
ガス流量特性
3000
0.7

Flow
Rate
/ min
流量
L ／Lmin

2500

0.85
1.7

400

1500
1000
500
0
0.00

0.1

0.2

0.3

Differential
Pressure
差圧（MPa）(MPa(G))

Cv：弁容量係数
Cv : Valve Capacity Coefficient
Gg：標準状態の空気に対する標準状態の当該気Gg : Air under normal conditons vs. Specific
体の比重Gravity of Relevant Gas under normal
P1：弁入口圧力〔kg ／ cm2abs〕
conditions
P2：弁出口圧力〔kg ／ cm2abs〕
P1 : Valve Inlet Pressure [kg/cm2 2abs]
Δ P：弁差圧 P1 － P2〔kg ／ cm 〕
2
P2 : Valve Outlet Pressure[kg/cmQg：気体の体積流量〔Nm3 ／h〕 abs]ΔP
Pressure of Valve P1 – P2 [kg/cm2]: Differential
T〔K〕
1：弁入口温度
Qg : Volume Flow of Gas [Nm3/h]

3500

58

Qg
273

0.4

Ultra High Purity Valves
VALVE
Essential in semiconductor fabrication
processes KITZ SCT's series of valves
Higher purity and high reliability are essential in the gas supply systems used insemiconductor fabrication processes■KD (diaphragm valves)

2-portMulti-port
Two-step valve
Valves that accommodate a high temperature of 250˚C
LOTO valve
Quick turn valve

3
6
8
10
11
12

Compact diaphragm valves

13

Compact diaphragm valves

15

Diaphragm valves

16

Replaceable seat18

High pressure diaphragm valves

20

Diaphragm valves

25

Zero volume valves

26

Block-type
Flicker-type

28
30

Check valves

31

B-seal-type
C-seal-type32
33

Straght - type
“Variac” variable flow valves
Flow-control Needle Valve

35
38
39

Straight-type

40

Straight-type

42

Clean butterfly valves

44

KITZ SCT's superclean valves (SCVs) are products that boast high reliability and■KCD (diaphragm valves)

high durability to meet the exact needs of our customers. The excellent features of■VLCD (diaphragm valves)

the SCVs include improved gas exchange characteristics because of minimal
internal capacity, better degassing characteristics due to the smaller surface area

■VLD (diaphragm valves)of the seat that comes into contact with gas, prevention of plastic expansion, and■WD (diaphragm valves)improved valve operation speed due to the use of aluminum in the piston.
KITZ-SCT supplies the high-grade model "KD series" and other products suited for■RD (diaphragm valves)a variety of uses with a high level of technological capabilities and abundant■VRD (diaphragm valves)

know-how.
Can accommodate high-pressure certified products. Please contact our sales
representative for details.

■ZCD (zero volume valves)■Mono-Block Multi-valves■IC (check valves)■TD/TCD■IB ( bellows valves)■SBB (bellows valves)■IBC/IBD/IBE (bellows valves)■BZD (clean butterfly valves)

KD

The KD series realizes a high Cv value for compactly designed direct diaphragmvalves. These valves are of the quality that they can handle the high-purity gases

Diaphragm Valveused in semiconductor production facilities, and they also have high durability andhigh corrosion resistance performance.

■Features◎ Excellent purge characteristic is realized by minimizing the internal volume to 1.4cm3 (1/4” Male CVC, Open) through reduction of vertical flow paths.
◎ Original wetted area seal mechanism enables highest sealing performance, durability, purge performance, and corrosion resistance.
◎ High corrosion resistance performance by carefully selected diaphragm materials and ultimately smallest individual differences based on KITZ SCT's
original molding method realized high durability performance.
◎ Handles high-purity gases used with semiconductors and pursues particle performance to the ultimate degree by means of the highest-level production
environment and polished inner surfaces.

■Specifications
Size
Cv
Maximum Operating Pressure
PCTFE, PI, PFA
Wetted Area Volume*1
Metal
PCTFE
Manual Valve
PFA
Fluid Temperature
Pneumatic ValvePI
Metal (body material)*3
Atmospheric Temperature
Across the
PCTFE, PI, PFA
Seat He Leak
Leak Rates
Metal
Test Rates
Inboard He Leak Test Rates
Actuation Pressure
PCTFE, PI, PFA
Manual Valve
Metal
Cycle Life*2
PCTFE, PI, PFA
Pneumatic
Valve
Metal

KD2 (1/8")

KD4 (1/4")

KD8 (1/2")

KD12 (3/4")

0.05

0.27

0.7

1.7

0.085in3 (1.4cm3)

0.451in3 (7.4cm3)

1.525in3 (25cm3)0.079in3 (1.3cm3)

0.457in3 (7.5cm3)

N/A

142psig (0.98MPa(G))
0.014in3 (0.23cm3)-10ºC~80ºC-10ºC~150ºC-10ºC~120ºC (150ºC actual results 500,000 cycles)-10ºC~150ºC-10ºC~200ºC

N/A-10ºC~60ºC≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)≤ 3×10 sccs (≤ 3×10-10Pa·m3/s)

N/A

-9

≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)
58~101psig (0.4~0.7MPa(G))
30,000 cycles

100,000 cycles
800,000 cycles

N/A

2 million cycles

30,000 cycles

100,000 cycles

N/A*1 Straight flow, CVC male, OPEN state*2 Test Condition / Seat material : PCTFE Gas : N2 Pressure : 0.98MPa*3 Usable only for certain products. For details, contact your sales representative.

■Product grade
Grade

STD

Body Material

EP

SEP*
SUS316LE(Double melt material)

SUS316L

Surface Roughness
Polish≤ Ra 0.5 μm / 20 μin≤ Ra 0.13 μm / 5 μin

Mechanical PolishedElectro Polished
Degreasing+
Precision cleaning

Cleaning
Packaging

Single bagged package

Double bagged package* SEP-316LE:1/8",1/4",3/8", 1/2" are available■Wetted area material
Body
Seat
Diaphragm

SUS316L, SUS316LE (Double melt material)
PCTFE, PFA, PI, metal (body material)
Cobalt alloy(3/4" size is SUS316L)■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

2Straight Type
Product Code Table
Size

KD-typediaphragm valve

Operation

Valve Shape

Connection

270° manual

S: Straight
A: Angle
L: L-shape

V: CVC male
VF: CVC female
S: Compression
W: Butt weld

Handle Color

C:PCTFE
A:PFA
P:PI
M:Metal(body material)*1

Grade + Body Material

Not shown: Blue (standard) STD-316L : Mechanical Polished+SUS316L
RD: Red WH: White
EP-316L : Electro Polished+316L
GR: Green PK: Pink
SEP-316L : Electro Polished+316LE
SL: Silver YG: Yellow-green *2
YE: Yellow OR: Orange
BR: Brown PU: Purple
BK: Black*1 For a metal seat, we can handle only 1/8", 1/4", 1/2" sizes. Since the valve dimensions change if a metal seat is selected, contact our sales representative for details.
*2 SEP-316LE: 1/8" , 1/4", 3/8", 1/2" are available■Dimensions

Unit: inch (mm)

Type
45°

M

M2

KD2MS-VC

1/8" CVC Male

KD4MS-VC

1/4" CVC Male

KD8MS-VC

1/2" CVC Male

KD12MS-VC

3/4" CVC Male

C

M1

H

Connection

H2
H1
B
L
φA

45°

M

M2

KD2MS-VFC
C

KD4MS-VFC

M1

H
H2

KD12MS-VFC

B
L

KD2MS-SC

M2

M

45°

φA

C

KD6MS-SC

M1

H

KD4MS-SC

H2

KD8MS-SC

H1
L1

B

L1

KD12MS-SC

L

φA

M1

H
H2
H1
B
L

KD2MS-WC

1/8" Butt Weld

KD4MS-WC

1/4" Butt Weld

KD6MS-WC

3/8" Butt Weld

KD8MS-WC

1/2" Butt WeldC

KD12MS-WC 3/4" Butt Weld

H

1.61
2.24
(41.0)(57.0)
2.24
2.68(57.0)(68.0)
3.03
3.19(77.0)(81.0)
4.21
3.86(107.0)(98.0)
2.20
2.24(56.0)(57.0)
2.78
2.68(70.6)(68.0)
3.27
3.19(83.0)(81.0)
7.06
3.86(179.2)(98.0)
3.06
0.24 2.24(77.8) (6.1) (57.0)
1.89
0.31 2.68(48.0) (7.9) (68.0)
2.52
0.37 3.19(64.0) (9.5) (81.0)
2.52
0.50 3.19(64.0) (12.7) (81.0)
4.96
0.56 3.86(126.0) (14.3) (98.0)
1.65
2.24
(42.0)(57.0)
2.13
2.68(54.0)(68.0)
2.72
3.19(69.0)(81.0)
2.72
3.19(69.0)(81.0)
6.14
3.86(156.0)(98.0)

H1

H2

A

B

C

0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.91(23.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.91(23.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.63(16.0)
0.91(23.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.63(16.0)
0.91(23.0)

0.85(21.5)
1.06(27.0)
1.42(36.0)

0.94(24.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
0.94(24.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
0.94(24.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
0.94(24.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)

0.75(19.0)
1.02(26.0)
1.42(36.0)
1.89(48.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.89(48.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.42(36.0)
1.89(48.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.42(36.0)
1.89(48.0)

0.75(19.0)
0.98(25.0)
1.42(36.0)
1.81(46.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.81(46.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.42(36.0)
1.81(46.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.42(36.0)
1.81(46.0)

0.85(21.5)
1.06(27.0)
1.42(36.0)
0.85(21.5)
1.06(27.0)
1.42(36.0)
1.42(36.0)
0.85(21.5)
1.06(27.0)
1.42(36.0)
1.42(36.0)-

M

M1

0.67 2-M4 Depth(17.0)
0.20 (5.0)
1.00 2-M5 Depth(25.4)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.38 2-M5 Depth(35.0)
0.31 (8.0)
0.67 2-M4 Depth(17.0)
0.20 (5.0)
1.00 2-M5 Depth(25.4)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.38 2-M5 Depth(35.0)
0.31 (8.0)
0.67 2-M4 Depth(17.0)
0.20 (5.0)
1.00 2-M5 Depth(25.4)
0.20 (5.0)
1.10 2-M5 Depth 5(28.0)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.38 2-M5 Depth(35.0)
0.31 (8.0)
0.67 2-M4 Depth(17.0)
0.20 (5.0)
1.0
2-M5 Depth(25.4)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.10 2-M5 Depth(28.0)
0.20 (5.0)
1.38 2-M5 Depth(35.0)
0.31 (8.0)

M2
M14×1.0
M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M20×1.0

PFA Valves

M2

M

45°

L1*

Vacuum Components

KD8MS-VFC

H1

1/8" CVC Female
1/4" CVC Female
1/2" CVC Female
3/4" CVC Female
1/8" Compression Fitting
1/4" Compression Fitting
3/8" Compression Fitting
1/2" Compression Fitting
3/4" Compression Fitting

L

Ultra High Purity Fittings

Model

φA

Ultra High Purity Valves

Model

Options

Seat
Material-* L1 dimension for compression fitting is the dimension of how far tube inserted from end of body.

PFA Weld Fittings■Handle Color
White (WH)

Silver (SL)Red (RD)

Yellow (YE)

Brown (BR)Orange (OR)Green (GR)

Pink (PK)Yellow-green (YG)

Purple (PU)Black (BK)

Antistatic Unit

Blue (Standard)

3Product Code Table
Model

KD-typediaphragm valve

Size

Options

Operation

Valve shape

90° manual

S: Straight
A: Angle
L: L-shape

Handle type

Connection Seat material

V: CVC male
VF: CVC female
S: Compression
W.: Butt weld

Handle color

Not shown: Standard Not shown: Blue
C:PCTFE
POC: Push-lock type(standard)
A:PFA
BK: Black
P:PI
GR: Green
M.: Metal
RD: Red(body material)
SL: Silver*1
WH: White
YE: Yellow

Grade + Body material

STD-316L: Mechanical Polished +SUS316L
EP-316L : Electro Polished + SUS316L
SEP-316LE : Electro Polished +SUS316LE*1 For a metal seat, we can handle only 1/8" and 1/4" sizes. Since the valve dimensions change if a metal seat is selected, contact our sales representative for details.

■Dimensions

Unit: inch (mm)

Model

45°

M

A

M2

Connection

L

L1*

H

H1

H2

KD2QS-VC

1/8" CVC Male

1.61
(41.0)-

2.28(58.0)

0.28(7.0)

KD4QS-VC

1/4" CVC Male

2.24
(57.0)KD8QS-VC

1/2" CVC MaleKD2QS-VFC

A

B

C

M

M1

M2

0.85 1.46 0.75 0.75 0.67
(21.5) (37.0) (19.0) (19.0) (17.0)

2-M4 Depth
0.20 (5.0)

M14×1.0-

2.87 0.43 1.06 1.93 1.02 0.98 1.00
(73.0) (11.0) (27.0) (49.0) (26.0) (25.0) (25.4)

2-M5 Depth
0.20 (5.0)

M20×1.0

3.03(77.0)-

3.39 0.63 1.32 1.93 1.42 1.42 1.10
(86.0) (16.0) (33.5) (49.0) (36.0) (36.0) (28.0)

2-M5 Depth
0.20 (5.0)

M20×1.0

1/8" CVC Female

2.20(56.0)-

2.28(58.0)

0.85 1.46 0.75 0.75 0.67
(21.5) (37.0) (19.0) (19.0) (17.0)

2-M4 Depth
0.20 (5.0)

M14×1.0

KD4QS-VFC

1/4" CVC Female

2.78(70.6)-

2.87 0.43 1.06 1.93 1.02 0.98 1.00
(73.0) (11.0) (27.0) (49.0) (26.0) (25.0) (25.4)

2-M5 Depth
0.20 (5.0)

M20×1.0

KD8QS-VFC

1/2" CVC Female

3.27(83.0)-

3.39 0.63 1.32 1.93 1.42 1.42 1.10
(86.0) (16.0) (33.5) (49.0) (36.0) (36.0) (28.0)

2-M5 Depth
0.20 (5.0)

M20×1.0

KD2QS-SC

1/8" compression

3.06(77.8)

0.24
(6.1)

2.28
(58.0)

0.85 1.46 0.75 0.75 0.67
(21.5) (37.0) (19.0) (19.0) (17.0)

2-M4 Depth
0.20 (5.0)

M14×1.0

KD4QS-SC

1/4" compression

1.89(48.0)

0.31(7.9)

2.87 0.43 1.06 1.93 1.02 0.98 1.00
(73.0) (11.0) (27.0) (49.0) (26.0) (25.0) (25.4)

2-M5 Depth
0.20 (5.0)

M20×1.0

KD6QS-SC

3/8" compression

2.52(64.0)

0.37(9.5)

3.39 0.63 1.32 1.93 1.42 1.42 1.10
(86.0) (16.0) (33.5) (49.0) (36.0) (36.0) (28.0)

2-M5 Depth
0.20 (5.0)

M20×1.0

KD8QS-SC

1/2" compression

2.52(64.0)

0.50 3.39 0.63 1.32 1.93 1.42 1.42 1.10
(12.7) (86.0) (16.0) (33.5) (49.0) (36.0) (36.0) (28.0)

2-M5 Depth
0.20 (5.0)

M20×1.0

KD2QS-WC

1/8" Butt Weld

1.65
(42.0)-

2.28(58.0)

0.85 1.46 0.75 0.75 0.67
(21.5) (37.0) (19.0) (19.0) (17.0)

2-M4 Depth
0.20 (5.0)

M14×1.0

KD4QS-WC

1/4" Butt Weld

2.13
(54.0)-

2.87 0.43 1.06 1.93 1.02 0.98 1.00
(73.0) (11.0) (27.0) (49.0) (26.0) (25.0) (25.4)

2-M5 Depth
0.20 (5.0)

M20×1.0

KD6QS-WC

3/8" Butt Weld

2.72
(69.0)-

3.39 0.63 1.32 1.93 1.42 1.42 1.10
(86.0) (16.0) (33.5) (49.0) (36.0) (36.0) (28.0)

2-M5 Depth
0.20 (5.0)

M20×1.0

KD8QS-WC

1/2" Butt Weld

2.72
(69.0)-

3.39 0.63 1.32 1.93 1.42 1.42 1.10
(86.0) (16.0) (33.5) (49.0) (36.0) (36.0) (28.0)

2-M5 Depth
0.20 (5.0)

M20×1.0

C

M1

H

Type

H2
H1
B
L

M2

M

45°

A

C

M1

H

0.28
(7.0)

H2
H1
B
L

0.28
(7.0)

M2

M

45°

A

C

M1

H
H2
H1
B
L

L1

0.28
(7.0)

45°

A

M2

M

L1

C

M1

H
H2
H1
B
L

* L1 dimension for compression fitting is the dimension of how far tube inserted from end of body.

4

Product Code Table
Size

KD-typediaphragm valve

Grade + Body material

Operation

Valve shape

Connection

Seat material

C: Normally closed
O: Normally open

S: Straight
A: Angle
L: L-shape

V: CVC male
VF: CVC female
S: Compression
W.: Butt weld

C:PCTFE
Not shown: Standard
A:PFA
S: With open/close
P:PI
sensorM.: Metal(body material)*1

STD-316L: Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L
SEP-316LE : Electro Polished +SUS316LE*2*1 For a metal seat, we can handle only 1/8" and 1/4" sizes. Since the valve dimensions change if a metal seat is selected, contact our sales representative for details.
*2 SEP-316LE: 1/8" , 1/4", 3/8", 1/2" are available■Dimensions

Unit: inch (mm)

Type

45°

M

P

H

C

Connection

L

L1*

H

H1

A

B

1/8" CVC Male

1.61
(41.0)-

2.09(53.0)

0.28
(7.0)

1.10
(28.0)

0.75(19.0)

KD2□S-VC
KD4□S-VC

1/4" CVC Male

2.24
(57.0)-

2.64(67.0)

0.43(11.0)

1.56(39.7)

3.03(77.0)-

3.31(84.0)

0.63(16.0)

KD8OS-VC

3.03(77.0)-

3.03(77.0)KD12CS-VC

4.21(107.0)KD8CS-VC

M1

1/2" CVC Male

H1
B
L

3/4" CVC MaleKD12OS-VC

45°

C

M

P

M

1.42
Rc1/8
(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

-

5.83
0.91
(148.0) (23.0)

3.35(85.0)

1.89(48.0)

1.81
Rc1/8(46.0)

1.38(35.0)

2-M5 Depth
0.31 (8.0)

4.21(107.0)

-

5.63
0.91
(143.0) (23.0)

3.35(85.0)

1.89(48.0)

1.81
Rc1/8(46.0)

1.38(35.0)

2-M5 Depth
0.31 (8.0)

0.43(11.0)

1.56(39.7)

1.02(26.0)

0.98
Rc1/8(25.0)

1.00(25.4)

2-M5 Depth
0.20 (5.0)

3.27(83.0)-

3.31(84.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

3.27(83.0)-

3.03(77.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

7.06(179.2)

-

5.83
0.91
(148.0) (23.0)

3.35(85.0)

1.89(48.0)

1.81
Rc1/8(46.0)

1.38(35.0)

2-M5 Depth
0.31 (8.0)

7.06(179.2)

-

5.63
0.91
(143.0) (23.0)

3.35(85.0)

1.89(48.0)

1.81
Rc1/8(46.0)

1.38(35.0)

2-M5 Depth
0.31 (8.0)

KD8CS-VFC

1/8" compression

3.06(77.8)

0.24
(6.1)

2.09
(53.0)

0.28
(7.0)

1.10
(28.0)

0.75(19.0)

0.75
Rc1/8(19.0)

0.67(17.0)

2-M4 Depth
0.20 (5.0)

KD4□S-SC

1/4" compression

1.89(48.0)

0.31
(7.9)

2.64
(67.0)

0.43(11.0)

1.56(39.7)

1.02(26.0)

0.98
Rc1/8(25.0)

1.00(25.4)

2-M5 Depth
0.20 (5.0)

2.52(64.0)

0.37
(9.5)

3.31
(84.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

KD6OS-SC

2.52(64.0)

0.37
(9.5)

3.03
(77.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

KD8CS-SC

2.52(64.0)

0.50(12.7)

3.31(84.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

2.52(64.0)

0.50(12.7)

3.03(77.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

4.96(126.0)

0.56
5.83
0.91
(14.3) (148.0) (23.0)

3.35(85.0)

1.89(48.0)

1.81
Rc1/8(46.0)

1.38(35.0)

2-M5 Depth
0.31 (8.0)

4.96(126.0)

0.56
5.63
0.91
(14.3) (143.0) (23.0)

3.35(85.0)

1.89(48.0)

1.81
Rc1/8(46.0)

1.38(35.0)

2-M5 Depth
0.31 (8.0)

3/8" compression

1/8" Butt Weld

1.65
(42.0)-

2.09(53.0)

0.28
(7.0)

1.10
(28.0)

0.75(19.0)

0.75
Rc1/8(19.0)

0.67(17.0)

2-M4 Depth
0.20 (5.0)

KD4□S-WC

1/4" Butt Weld

2.13
(54.0)-

2.64(67.0)

0.43(11.0)

1.56(39.7)

1.02(26.0)

0.98
Rc1/8(25.0)

1.00(25.4)

2-M5 Depth
0.20 (5.0)

2.72(69.0)-

3.31(84.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

KD6OS-WC

2.72(69.0)-

3.03(77.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

KD8CS-WC

2.72(69.0)-

3.31(84.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

2.72(69.0)-

3.03(77.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42
Rc1/8(36.0)

1.10(28.0)

2-M5 Depth
0.20 (5.0)

6.14(156.0)

-

5.83
0.91
(148.0) (23.0)

3.35(85.0)

1.89(48.0)

1.81
Rc1/8(46.0)

1.38(35.0)

2-M5 Depth
0.31 (8.0)

6.14(156.0)

-

5.63
0.91
(143.0) (23.0)

3.35(85.0)

1.89(48.0)

1.81
Rc1/8(46.0)

1.38(35.0)

2-M5 Depth
0.31 (8.0)

KD6CS-WC
3/8" Butt Weld

H1

1/2" Butt Weld

KD8OS-WC
KD12CS-WC
3/4" Butt Weld

KD12OS-WC

Antistatic Unit

KD2□S-WC

PFA Weld Fittings

KD2□S-SCPFA ValvesM

1.42(36.0)

2.64(67.0)

M1

B
L

2.17
(55.0)-KD12OS-SC

H

0.63(16.0)

2.78(70.6)

1/2" compression

C

2-M5 Depth
0.20 (5.0)

1/4" CVC Female

KD8OS-SC45°

1.10(28.0)

KD4□S-VFC

3/4" compression

P

1.42
Rc1/8
(36.0)

2-M4 Depth
0.20 (5.0)

KD12CS-SC

φA

1.42(36.0)

0.67(17.0)

KD6CS-SCL1

2.17(55.0)

0.75
Rc1/8(19.0)

H1
B
L

2-M5 Depth
0.20 (5.0)

0.75(19.0)

M1

L1

1.00
(25.4)

1.10(28.0)KD12OS-VFC

H

0.98
Rc1/8
(25.0)

0.28(7.0)

3/4" CVC Female

C

1.02(26.0)

2.09(53.0)

1/2" CVC Female45°

2-M4 Depth
0.20 (5.0)-

KD12CS-VFC

P

0.67(17.0)

2.20(56.0)

H1

φA

M1

0.75
Rc1/8
(19.0)

1/8" CVC Female

KD8OS-VFC
B
L

M

KD2□S-VFC

M1

H

P

Vacuum Components

φA

C

Ultra High Purity Fittings

Model

φA

Ultra High Purity Valves

Model

Options* L1 dimension for compression fitting is the dimension of how far tube inserted from end of body.

5BranchProduct Code Table
Model

Size

KD-typediaphragm valve

Options

Operation

Valve shape

Connection

270°manual

B: Branch*3

V: CVC male
VF: CVC female
W.: Butt weld*2

Seatmaterial

Flow

Handle color

Grade + Body material

A: A flow
B: B flow
C: C flow*1

Not shown: Blue
STD-316L : Mechanical Polished+SUS316L(standard)
EP-316L : Electro Polished + SUS316L
RD: Red WH: WhiteSEP-316LE : Electro Polished +SUS316LE
GR: Green PK: Pink
SL: Silver YG: Yellow-green
BK: Black OR: Orange
YE: Yellow PU: Purple*1 The branched flow type is to the right of the diagram.
*2 In cases where there are different types of fittings, please note them in the order of Port A, B, and C of the internal flow in the diagram to the right. BR: Brown
C:PCTFE
A:PFA
P:PI
M.: Metal(body material)

Example) In the case where A port = CVC female, B port = CVC female, C port = CVC male, the model will be "VFVFV."*3 We also can produce non-standard branched flow and four-way valves as options.

Flow direction (standard)
A flow

Flow direction (examples of options)

B flow

C flow■Dimension

Unit: inch (mm)

Model

Type

φA

45°

H

C

M

M2

M1
H2
H1
F

B
L
φA

45°

H

C

M

M2

M1
H2
H1
B
L

F

φA

45°
C

M

M2
H

M1
H2
H1
B
L

F

ConnectionL

1.61
1/8" CVC MaleKD2MB-VC(41.0)
2.24
1/4" CVC Male
KD4MB-VC(57.0)
3.03
1/2" CVC Male
KD8MB-VC(77.0)
2.20
KD2MB-VFC 1/8" CVC Female(56.0)
2.78
KD4MB-VFC 1/4" CVC Female(70.6)
3.27
KD8MB-VFC 1/2" CVC Female(83.0)
1.65
KD2MB-WC 1/8" Butt Weld
(42.0)
2.13
KD4MB-WC 1/4" Butt Weld
(54.0)
2.72
KD6MB-WC 3/8" Butt Weld
(69.0)
2.72
KD8MB-WC 1/2" Butt Weld
(69.0)

H

H1

H2

A

B

C

F

M

M1

2.24
(57.0)
2.68(68.0)
3.19(81.0)
2.24(57.0)
2.68(68.0)
3.19(81.0)
2.24(57.0)
2.68(68.0)
3.19(81.0)
3.19(81.0)

0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.63(16.0)

0.85(21.5)
1.06(27.0)
1.42(36.0)
0.85(21.5)
1.06(27.0)
1.42(36.0)
0.85(21.5)
1.06(27.0)
1.42(36.0)
1.42(36.0)

0.94(24.0)
1.65(42.0)
1.65(42.0)
0.94(24.0)
1.65(42.0)
1.65(42.0)
0.94(24.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)

0.75(19.0)
1.02(26.0)
1.42(36.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.42(36.0)

0.75(19.0)
0.98(25.0)
1.42(36.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.42(36.0)

0.81(20.5)
1.10(28.0)
1.52(38.5)
1.10(28.0)
1.37(34.8)
1.63(41.5)
0.83(21.0)
1.04(26.5)
1.36(34.5)
1.36(34.5)

0.67(17.0)
1.00(25.4)
1.10(28.0)
0.67(17.0)
1.00(25.4)
1.10(28.0)
0.67(17.0)
1.00(25.4)
1.10(28.0)
1.10(28.0)

2-M4 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M4 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M4 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)

Product Code Table
Model

Size

KD-typediaphragm valve

Type
A

45°

KD2QB-VC

C

M

M2

M1

H

KD4QB-VC

H2
H1

KD8QB-VC

F
A

45°
C

M

M2
H

M1

KD2QB-VFC
KD4QB-VFC

H2
H1
B
L

M1
H2

KD2QB-WC

45°
M

M2

C

KD4QB-WC
KD6QB-WC

H1
B
L

6

KD8QB-VFC

F

A

H

M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M20×1.0

Operation

90° manual

B: Branch

Connection

Seatmaterial

Flow

C:PCTFE
V: CVC male
VF: CVC female A:PFA
W.: Butt weld P:PI
M.: Metal*3(body material)*1

A: A flow
B: B flow
C: C flow*2

Handletype

Handle color

Not shown:Standard
POC:
Push-lock
type

Grade + Body material

Not shown: Blue
STD-316L : Mechanical Polished+SUS316L(standard)
EP-316L : Electro Polished + SUS316L
BK: Black SL: Silver SEP-316LE : Electro Polished + SUS316LE
GR: Green WH: White
RD: Red YE: Yellow

Flow direction

A flow

B flow

C flow

Unit: inch (mm)

Model

B
L

M14×1.0

Options

Valve
shape

*1 For a metal seat, we can handle only the 1/4" size. Since the valve dimensions change if a metal seat isselected, contact our sales representative for details.
*2 The branched flow type is to the right of the diagram.
*3 In cases where there are different types of fittings, please note them in the order of Port A, B, and Cof the internal flow in the diagram to the right.
Example) In the case where A port = CVC female, B port = CVC female, C port = CVC male,the model will be "VFVFV."■Dimensions

M2

F

KD8QB-WC

ConnectionL

1.61
1/8" CVC Male
(41.0)
2.24
1/4" CVC Male
(57.0)
3.03
1/2" CVC Male
(77.0)
2.20
1/8" CVC Female(56.0)
2.78
1/4" CVC Female(70.6)
3.27
1/2" CVC Female(83.0)
1.65
1/8" Butt Weld
(42.0)
2.13
1/4" Butt Weld
(54.0)
2.72
3/8" Butt Weld
(69.0)
2.72
1/2" Butt Weld
(69.0)

H

H1

H2

A

B

C

F

M

M1

2.28
(58.0)
2.87(73.0)
3.39(86.0)
2.28(58.0)
2.87(73.0)
3.39(86.0)
2.28(58.0)
2.87(73.0)
3.39(86.0)
3.39(86.0)

0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.63(16.0)

0.85(21.5)
1.06(27.0)
1.32(33.5)
0.85(21.5)
1.06(27.0)
1.32(33.5)
0.85(21.5)
1.06(27.0)
1.32(33.5)
1.32(33.5)

1.46(37.0)
1.93(49.0)
1.93(49.0)
1.46(37.0)
1.93(49.0)
1.93(49.0)
1.46(37.0)
1.93(49.0)
1.93(49.0)
1.93(49.0)

0.75(19.0)
1.02(26.0)
1.42(36.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.42(36.0)

0.75(19.0)
0.98(25.0)
1.42(36.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.42(36.0)

0.81(20.5)
1.10(28.0)
1.52(38.5)
1.10(28.0)
1.37(34.8)
1.63(41.5)
0.83(21.0)
1.06(27.0)
1.36(34.5)
1.36(34.5)

0.67(17.0)
1.00(25.4)
1.10(28.0)
0.67(17.0)
1.00(25.4)
1.10(28.0)
0.67(17.0)
1.00(25.4)
1.10(28.0)
1.10(28.0)

2-M4 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M4 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M4 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)

M2
M14×1.0
M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M14×1.0
M20×1.0
M20×1.0
M20×1.0

Product Code Table
Size

KD-typediaphragm valve

Operation

C: Normally closed B: Branched flow
O: Normally open

Connection Seat material

Flow

V: CVC male
VF: CVC female
W.: Butt weld
*3

A: A flow
B: B flow
C: C flow*2

C:PCTFE
A:PFA
P:PI
M.: Metal(body material)*1

Grade + Body material

Not shown:Standard
S: With open/
close sensor

STD-316L : Mechanical Polished + SUS316L
EP-316L: Electro Polished + SUS316L
SEP-316LE : Electro Polished + SUS316LE

Flow direction*1 For a metal seat, we can handle only the 1/8"and the 1/4" size. Since the valve dimensions change

A flow

if a metal seat is selected, contact our sales representative for details.

B flow

C flow*2 The branched flow type is to the right of the diagram.

Ultra High Purity Valves

Model

Options

Valve
shape

*3 In cases where there are different types of fittings, please note them in the order of Port A, B, and Cof the internal flow in the diagram to the right.
the model will be "VFVFV."■Dimentions

Unit: inch (mm)

Model
45°

P

C

M

φA

Type

M1

H

Connection

KD2□B-VC

1/8" CVC Male

KD4□B-VC

1/4" CVC MaleKD8CB-VC

H1
B
L

KD8OB-VC
45°
C

M

P

M1

H

KD2□B-VFC

1/8" CVC Female

KD4□B-VFC

1/4" CVC Female

KD8CB-VFC

H1
B
L

KD8OB-VFC

45°

P

M

φA

1/2" CVC Female

F

M1

H

C

KD2□B-WC

1/8" Butt Weld

KD4□B-WC

1/4" Butt Weld

KD6CB-WC
3/8" Butt Weld

KD6OB-WC

H1
F

KD8CB-WC
1/2" Butt Weld

KD8OB-WC

H1

A

B

C

F

1.61
(41.0)
2.24(57.0)
3.03(77.0)
3.03(77.0)
2.20(56.0)
2.78(70.6)
3.27(83.0)
3.27(83.0)
1.65(42.0)
2.13(54.0)
2.72(69.0)
2.72(69.0)
2.72(69.0)
2.72(69.0)

2.09(53.0)
2.64(67.0)
3.31(84.0)
3.03(77.0)
2.09(53.0)
2.64(67.0)
3.31(84.0)
3.03(77.0)
2.09(53.0)
2.64(67.0)
3.31(84.0)
3.03(77.0)
3.31(84.0)
3.03(77.0)

0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.63(16.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.63(16.0)
0.28
(7.0)
0.43
(11.0)
0.63(16.0)
0.63(16.0)
0.63(16.0)
0.63(16.0)

1.10(28.0)
1.56(39.7)
2.17(55.0)
2.17(55.0)
1.10(28.0)
1.56(39.7)
2.17(55.0)
2.17(55.0)
1.10(28.0)
1.56(39.7)
2.17(55.0)
2.17(55.0)
2.17(55.0)
2.17(55.0)

0.75(19.0)
1.02(26.0)
1.42(36.0)
1.42(36.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.42(36.0)
0.75(19.0)
1.02(26.0)
1.42(36.0)
1.42(36.0)
1.42(36.0)
1.42(36.0)

0.75(19.0)
0.98(25.0)
1.42(36.0)
1.42(36.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.42(36.0)
0.75(19.0)
0.98(25.0)
1.42(36.0)
1.42(36.0)
1.42(36.0)
1.42(36.0)

0.81(20.5)
1.10(28.0)
1.52(38.5)
1.52(38.5)
1.10(28.0)
1.37(34.8)
1.63(41.5)
1.63(41.5)
0.83(21.0)
1.06(27.0)
1.36(34.5)
1.36(34.5)
1.36(34.5)
1.36(34.5)

P
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8
Rc1/8

M

M1

0.67
(17.0)
1.00(25.4)
1.10(28.0)
1.10(28.0)
0.67(17.0)
1.00(25.4)
1.10(28.0)
1.10(28.0)
0.67(17.0)
1.00(25.4)
1.10(28.0)
1.10(28.0)
1.10(28.0)
1.10(28.0)

2-M4 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M4 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M4 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)
2-M5 Depth
0.20 (5.0)

PFA Valves

B
L

H

Vacuum Components

φA

1/2" CVC MaleF

L

Ultra High Purity Fittings

Example) In the case where A port = CVC female, B port = CVC female, C port = CVC male,

PFA Weld Fittings
Antistatic Unit
7

Two-step Valve■Comparison with conventional methods
21

0

4
6

9 8

Conventional method

1 BodyTwo-step valve（SLOW）

3
5

2 Air inlet (FAST)
3 Air inlet (SLOW)

2

4 Lift control knob

1

5 Actuator lock

（FAST）

6-adjustment knob lock screw

6-adjustment knob lock screw(Recommended tightening torque: 0.3N・m)■Features◎ An epoch-making combination valve that enables manual flow control and fully on/fully off two-stage control by means of an air actuator.
◎ The control of the fluid by means of a diaphragm rather than a needle realizes a particle free valve and speedy gas supply.
◎ Significant cost savings and space savings are possible by eliminating bypass pipings and control instrumentation required for conventional systems.
◎ The optimal Cv value for the usage objectives can be set arbitrarily.

■Precautions① In cases where the pressure inside the valve is lower than atmospheric pressure, micro-adjustments of the Cv value may be difficult. Set the Cv value under
the same conditions as those of actual usage.
② Flow rates outside the adjustment range will not be reproducible.
③ The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
④ For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

■Specifications
Size
Cv
Maximum Operating Pressure

KD4T (1/4")

KD8T (1/2")

Adjustment range: 0.02-0.12, when fully open: 0.27

Adjustment range: 0.05-0.26, when fully open: 0.7

142psig(0.98MPa (G))
0.085in3 (1.4cm3)

Wetted Area Volume
PCTFE
PFA
PI
Atmospheric Temperature
Across the Seat He Leak Test
Rates
Leak Rates
Inboard He Leak Test Rates
Actuation Pressure-10ºC~80ºC (when open)

Fluid Temperature-10°C~120°C (150°C actual results 500,000 cycles )-10ºC~150ºC-10ºC~60ºC-9≤ 1×10 sccs (≤ 1×10-10Pa·m3/s)≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)
58~101psig (0.4~0.7MPa (G))

Cycle Life

2 million cycles■Product Grade
Grade
Body Material■Wetted Area Material
STD

EP
SUS316L

Surface Roughness ≤ Ra 0.5 μm / 20 μin
PolishMechanical
Polished

Cleaning
Single bagged package

SEP

SUS316L, SUS316LE(Double melt material)

Body

SUS316LE(Double melt material)

Seat
Diaphragm≤ Ra 0.13 μm / 5 μin

PCTFE, PFA, PI
Cobalt alloy

Electro Polished
Degreasing+
Precision cleaning
Double bagged package

Two-step valve Cv graph (reference values)

Cv

Packaging

0.451in3 (7.4cm3)
Straight flow, CVC male, OPEN state

Precautions:Two-step valves have a structure that controls
the flow by adjusting the lift amount of the on/off
valve of the diaphragm so that the usage conditions may cause the pre-set flow to change.

8

Number of control knob turns

Product Code Table

KD-typediaphragm valve■Dimentions

Size

Operation

Valve shape

Connection

Seat material

Grade + Body material

Two-step

S: Straight
A: Angle(Option)
B: Branch(Option)

V: CVC male
VF: CVC female

C:PCTFE
A:PFA
P:PI

STD-316L : Mechanical Polished + SUS316L: Electro Polished + SUS316L
EP-316L
SEP-316LE : Electro Polished + SUS316LE

Ultra High Purity Valves

Model

Unit: inch (mm)

Type

A

Connection

L

H

H1

H2

A

B

C

P

M

M1

KD4TS-VC

1/4" CVC Male

2.24
(57.0)

4.76(121.0)0.43(11.0)

3.86(98.0)

1.73(44.0)

1.02(26.0)

0.98(25.0)

2Rc1/81.00(25.4)

2-M5
Depth
0.20
(5.0)

KD8TS-VC

1/2" CVC Male

3.03
(77.0)

5.57(141.5)

0.63
4.47
2.28
(16.0) (113.5) (58.0)

1.42(36.0)

1.42(36.0)

2Rc1/81.10(28.0)

2-M5
Depth
0.20
(5.0)

KD4TS-VFC

1/4" CVC Female

2.78(70.6)

4.76(121.0)0.43(11.0)

1.73(44.0)

1.02(26.0)

0.98(25.0)

2Rc1/81.00(25.4)

2-M5
Depth
0.20
(5.0)

KD8TS-VFC

1/2" CVC Female

3.27(83.0)

5.57(141.5)

0.63
4.47
2.28
(16.0) (113.5) (58.0)

1.42(36.0)

1.42(36.0)

2Rc1/81.10(28.0)

2-M5
Depth
0.20
(5.0)

M

45°
C

Ultra High Purity Fittings

Model

M1
H H2
P

H1
B
L

M

45°
C

Vacuum Components

A

3.86(98.0)

M1
H H2
P

H1
B
L

PFA ValvesNote: The air supply inlet is on the backside of the illustration.

PFA Weld Fittings
Antistatic Unit
9

High-temperature Valve (250°C)■Features◎ All metal components of the valve enable use at 250°C.
◎ KITZ SCT's design minimizes sharp drops in the Cv value in a high temperature environment and realizes high performance, a compact size, and a low price.
◎ Because all of the component parts of the valve, including the actuator, and not just the parts that come into contact with the gas, can be used in a hightemperature environment, the valves can be used optimally in metal-organic processes where thermal uniformity is essential.

■Specifications■Product Grade

Size
Room Temperature
250°C(Reference Value)
Cv
250°C Internal
Vacuum(Reference Value)
Maximum Operationg Pressure

KD4K (1/4")

KD8K (1/2")

0.25

0.7

0.23

0.5

0.2

Body Material

0.457in3 (7.5cm3)

20ºC~250ºC

3

72~101psig (0.5~0.7MPa(G))

Product Code Table■Dimensions

Type

M

C

M1

H2

Size

Operation

High-temperature type C: Normally closed
O: Normally open

Connection

H1

P

2.05
(52.0)

1.02 0.98
1/8"
1.00(26.0) (25.0) Compression fittings (25.4)

2-M5 Depth
0.20 (5.0)

2.24(57.0)

3.72(94.5)

0.43(11.0)

2.50(63.5)

2.44(62.0)

1.02 0.98
1/8"
1.00(26.0) (25.0) Compression fittings (25.4)

2-M5 Depth
0.20 (5.0)

3.03
5.12
(77.0) (130.0)

0.63(16.0)

3.70(94.0)

2.44(62.0)

1.42 1.42
1/8"
1.10(36.0) (36.0) Compression fittings (28.0)

2-M5 Depth
0.20 (5.0)

3.03
4.80
(77.0) (122.0)

0.63(16.0)

3.39(86.0)

2.68(68.0)

1.42 1.42
1/8"
1.10(36.0) (36.0) Compression fittings (28.0)

2-M5 Depth
0.20 (5.0)

2.78
4.00
(70.6) (101.5)

0.43(11.0)

2.78(70.5)

2.05(52.0)

1.02 0.98
1/8"
1.00(26.0) (25.0) Compression fittings (25.4)

2-M5 Depth
0.20 (5.0)

KD4KOS-VFM

2.78(70.6)

3.72(94.5)

0.43(11.0)

2.50(63.5)

2.44(62.0)

1.02 0.98
1/8"
1.00(26.0) (25.0) Compression fittings (25.4)

2-M5 Depth
0.20 (5.0)

KD8KCS-VFM

3.27
5.12
(83.0) (130.0)

0.63(16.0)

3.70(94.0)

2.44(62.0)

1.42 1.42
1/8"
1.10(36.0) (36.0) Compression fittings (28.0)

2-M5 Depth
0.20 (5.0)

KD8KOS-VFM

3.27
4.80
(83.0) (122.0)

0.63(16.0)

3.39(86.0)

2.68(68.0)

1.42 1.42
1/8"
1.10(36.0) (36.0) Compression fittings (28.0)

2-M5 Depth
0.20 (5.0)

KD4KCS-WM

2.13
4.00
(54.0) (101.5)

0.43(11.0)

2.78(70.5)

2.05(52.0)

1.02 0.98
1/8"
1.00(26.0) (25.0) Compression fittings (25.4)

2-M5 Depth
0.20 (5.0)

KD4KOS-WM

2.13(54.0)

3.72(94.5)

0.43(11.0)

2.50(63.5)

2.44(62.0)

1.02 0.98
1/8"
1.00(26.0) (25.0) Compression fittings (25.4)

2-M5 Depth
0.20 (5.0)

KD6KCS-WM

2.72
5.12
(69.0) (130.0)

0.63(16.0)

3.70(94.0)

2.44(62.0)

1.42 1.42
1/8"
1.10(36.0) (36.0) Compression fittings (28.0)

2-M5 Depth
0.20 (5.0)

2.72
4.80
(69.0) (122.0)

0.63(16.0)

3.39(86.0)

2.68(68.0)

1.42 1.42
1/8"
1.10(36.0) (36.0) Compression fittings (28.0)

2-M5 Depth
0.20 (5.0)

2.72
5.12
(69.0) (130.0)

0.63(16.0)

3.70(94.0)

2.44(62.0)

1.42 1.42
1/8"
1.10(36.0) (36.0) Compression fittings (28.0)

2-M5 Depth
0.20 (5.0)

2.72
4.80
(69.0) (122.0)

0.63(16.0)

3.39(86.0)

2.68(68.0)

1.42 1.42
1/8"
1.10(36.0) (36.0) Compression fittings (28.0)

2-M5 Depth
0.20 (5.0)

KD4KOSVM-66

1/4" CVC Male

1/2" CVC MaleKD4KCS-VFM
M

1/4" CVC FemaleC

1/2" CVC FemaleBL

1/4" Butt Weld
P

M

45°
C

3/8" Butt Weld

M1

H2

KD6KOS-WM
H1
B
L

KD8KCS-WM
1/2" Butt Weld

KD8KOS-WM

10

EP-316L : Electro Polished + SUS316L
SEP-316LE : Electro Polished + SUS316LE

2.78(70.5)H1

H

M: Metal

0.43(11.0)M1

φA

V: CVC male
VF: CVC female
W: Butt weld

Grade + Body material

2.24
4.00
(57.0) (101.5)

45°

H2

S: Straight
A: Angle(Option)
B: Branch(Option)SeatmaterialA

KD8KOSVM-18

B
L

H

Connection

H2

KD8KCS-VM

φA

Valve shape

H1

KD4KCS-VM

P

45°

H

Cobalt alloy

Unit: inch (mm)

Model

φA

Metal (body material)① The valves are not guaranteed to function if their exterior is submerged
inside a vacuum.
② For high temperature applications, please select appropriate material
for air-fittings and tubes to assure proper performance.

* Using interior leak rate: ≤ 3×10-4 sccs (≤ 3×10-5Pa·m3/s)

KD-typediaphragm valve

SUS316L, SUS316LE (Double melt material)■Precautions

50,000 cycles

ModelElectro Polished
Degreasing+
Precision cleaning
Double bagged package

Body
Seat
Diaphragm≤ 3×10 sccs (≤ 3×10 Pa·m /s)

Cycle Life

≤ Ra 0.13 μm / 5 μin■Wetted Area Material≤ 3×10 sccs (≤ 3×10-10Pa·m3/s) *-9-10

SUS316L

Packaging

Straight flow, CVC male, OPEN state-9

SEP
SUS316LE(Double melt material)

Cleaning

142psig (0.98MPa(G))

Fluid Temperature
Across the Seat He
Leak Rates
Leak Test Rates(Room temperature
InboardHe Leakwhen shipped)
Test Rates
Actuation Pressure

EP

SurfaceRoughness
Polish0.35

0.079in3 (1.3cm3)

Wetted Area Volume

Grade

L

H

B

C

P

M

M1

LOTO Valve■Features■Specifications■Product Grade
KD4QL (1/4")

KD8QL (1/2")

0.27

0.7

Grade
Seat
Body Material

0.451in3 (7.4cm3)-10ºC~80ºC-10ºC~150ºC≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)
1 million cycles■Precautions

SEP

SUS316L■Wetted Area Material① The valves are not guaranteed to function if their exterior is submerged inside avacuum.

Body
Seat
Diaphragm

SUS316L, SUS316LE (Double melt material)
PCTFE, PFA
Cobalt alloy

Model

Size

OperationKD
KD-type
Diaphragm Valve

Model

Valve Shape

Connection

QL
4:1/4"
6:3/8"
8:1/2"

Seat Material

Grade + Body MaterialV
S: Straight

QL: 90°manualwith LOTO

LOC

V: CVC male
VF: CVC female
S: Compression
W: Butt weld

C: PCTFE
A: PFA

LOC: Open and close STD-316L : Mechanical Polished + SUS316L
locked
EP-316L : Electro Polished + SUS316L
SEP-316LE : Electro Polished + SUS316LE

Unit: inch (mm)Type

Connection

L

L1

H

H1

H2

A

B

C

P

M

M1

KD4QLS-VC

1/4" CVC Male

2.25
(57.0)-

3.82(97.0)

0.43(11.0)

1.06(27.0)

1.52(38.5)

1.02(26.0)

0.99(25.0)

0.31
(7.8)

1.00
(25.4)

2-M5X0.8
0.20 (5.0)

KD8QLS-VC

1/2" CVC Male

3.03
(77.0)

-

4.37
0.63
(111.0) (16.0)

1.30(33.0)

1.52(38.5)

1.42(36.0)

1.42(36.0)

0.31
(7.8)

1.10
(28.0)

2-M5X0.8
0.20 (5.0)

KD4QLS-VFC

1/4" CVC Female

2.78(70.6)-

3.82(97.0)

0.43(11.0)

1.06(27.0)

1.52(38.5)

1.02(26.0)

0.99(25.0)

0.31
(7.8)

1.00
(25.4)

2-M5X0.8
0.20 (5.0)

KD8QLS-VFC

1/2" CVC Female

3.27(83.0)

-

4.37
0.63
(111.0) (16.0)

1.30(33.0)

1.52(38.5)

1.42(36.0)

1.42(36.0)

0.31
(7.8)

1.10
(28.0)

2-M5X0.8
0.20 (5.0)

KD4QLS-SC

1/4" Compression Fitting

1.89(48.0)

0.31
(7.9)

3.82
(97.0)

0.43(11.0)

1.06(27.0)

1.52(38.5)

1.02(26.0)

0.99(25.0)

0.31
(7.8)

1.00
(25.4)

2-M5X0.8
0.20 (5.0)

KD6QLS-SC

3/8" Compression Fitting

2.52(64.0)

0.37
(9.5)

4.37
0.63
(111.0) (16.0)

1.30(33.0)

1.52(38.5)

1.42(36.0)

1.42(36.0)

0.31
(7.8)

1.10
(28.0)

2-M5X0.8
0.20 (5.0)

KD8QLS-SC

1/2" Compression Fitting

2.52(64.0)

0.50
4.37
0.63
(12.7) (111.0) (16.0)

1.30(33.0)

1.52(38.5)

1.42(36.0)

1.42(36.0)

0.31
(7.8)

1.10
(28.0)

2-M5X0.8
0.20 (5.0)

KD4QLS-WC

1/4" Butt Weld

2.13
(54.0)-

3.82(97.0)

0.43(11.0)

1.06(27.0)

1.52(38.5)

1.02(26.0)

0.99(25.0)

0.31
(7.8)

1.00
(25.4)

2-M5X0.8
0.20 (5.0)

KD6QLS-WC

3/8" Butt Weld

2.72
(69.0)

-

4.37
0.63
(111.0) (16.0)

1.30(33.0)

1.52(38.5)

1.42(36.0)

1.42(36.0)

0.31
(7.8)

1.10
(28.0)

2-M5X0.8
0.20 (5.0)

KD8QLS-WC

1/2" Butt Weld

2.72
(69.0)

-

4.37
0.63
(111.0) (16.0)

1.30(33.0)

1.52(38.5)

1.42(36.0)

1.42(36.0)

0.31
(7.8)

1.10
(28.0)

2-M5X0.8
0.20 (5.0)

M

45°

H

C

PFA Valves■KD LOTO Dimensions

Options

Vacuum Components

Product Code Table

φA

EP
PCTFE, PFA

SUS316LE(Double melt
material)≤ Ra 0.13 μm /5 μin
Surface Roughness ≤Ra0.5μm/20μin
Degreasing+
Cleaning
Precision cleaning
Single bagged
Double bagged package
Packagingpackage

142psig(0.98MPa(G))
0.085in3 (1.4cm3)

STD

Ultra High Purity Fittings

Size
Cv
Maximum Operating Pressure
Wetted Area Volume
PCTFE
Fluid
Temperature
PFA
Across the Seat He
Leak Test Rates
Leak Rates
Inboard He Leak
Test Rates
Cycle Life

Ultra High Purity Valves◎ When the valve is closed, the handle goes down and the key hole can be seen.
◎ When opening the valve, pull up the handle and turn it.
◎ By passing through a padlock or wire (minimum φ3.18), lock-out and tag-out of the valve can be conducted. This helps to prevent an erroneous operation by theoperator.
◎ As an option, the operation can be met during OPEN status, or both OPEN-CLOSE statuses.

M1
H2
H1
B
L
φA

45°

M
H

M1
H2
H1
B
L
φA

M

45°

H

C

M1
H2
H1
B
L

45°

M

φA

L1

H

M1

C

H2
H1
B
L

11

Antistatic Unit

L1

PFA Weld FittingsCQuick Turn Valve■Features◎ Quick Turn series always keeps the status either “fully open” or “fully closed”.
◎ Butterfly shaped handle is excellent in visibility and operability.

■Specifications■Product Grade

Size
Cv
Maximum Operating Pressure
Wetted Area Volume
PCTFE
Fluid
Temperature
PFA, PI
Atmospheric Temperature
Across the Seat He
Leak Test Rates
Leak Rates
Inboard He Leak
Test Rates

KD4QT (1/4")

KD8QT (1/2")

0.27

0.7

Grade
Seat
Body Material

0.451in3 (7.4cm3)-10ºC~+80ºC-10ºC~+150ºC-10ºC~+60ºC≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)

Cycle Life

EP

SEP

PCTFE, PFA, PI

SUS316LE(Double melt
material)≤ Ra 0.13 μm / 5 μin
Surface Roughness ≤Ra0.5μm/20μin
Degreasing+
Cleaning
Precision cleaning
Single bagged
Double bagged package
Packagingpackage

142psig (0.98MPa(G))
0.085in3 (1.4cm3)

STD

SUS316L

2 million cycles■Wetted Area Material
Body
Seat
Diaphragm■Precautions① The valves are not guaranteed to function if their exterior is submerged inside avacuum.

SUS316L, SUS316LE (Double melt material)
PCTFE, PFA, PI
Cobalt alloy

Product Code Table
Model

Size

KD
KD-typediaphragm Valve■KD Quick Turn Dimensions
Model

φA

Operation

Valve shape

Connection

QT
4:1/4"
6:3/8"
8:1/2"

QT: 90°manual
Quick turnSeat material

Grade + Body material

C: PCTFE
P:PI
A:PFA

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L
SEP-316LE : Electro Polished + SUS316LE

V
S: Straight

V: CVC male
VF: CVC female
S: Compression
W: Butt weld

Unit: inch (mm)Type

Connection

L

L1

H

H1

H2

A

B

C

M

M1

KD4QTS-VC

1/4" CVC Male

2.25
(57.0)-

3.23(82.0)

0.43(11.0)

1.06(27.0)

1.39(35.3)

1.02(26.0)

0.99(25.0)

1.00(25.4)

2-M5X0.8
0.20 (5.0)

KD8QTS-VC

1/2" CVC Male

3.03
(77.0)

-

4.18
0.63
(106.0) (16.0)-

1.81(46.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5X0.8
0.20 (5.0)

KD4QTS-VFC

1/4" CVC Female

2.78(70.6)-

3.23(82.0)

1.06(27.0)

1.39(35.3)

1.02(26.0)

0.99(25.0)

1.00(25.4)

2-M5X0.8
0.20 (5.0)

KD8QTS-VFC

1/2" CVC Female

3.27(83.0)

-

4.18
0.63
(106.0) (16.0)-

1.81(46.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5X0.8
0.20 (5.0)

KD4QTS-SC

1/4" Compression
Fitting

1.89(48.0)

0.31
(7.9)

3.23
(82.0)

1.06(27.0)

1.39(35.3)

1.02(26.0)

0.99(25.0)

1.00(25.4)

2-M5X0.8
0.20 (5.0)

KD6QTS-SC

3/8" Compression
Fitting

2.52(64.0)

0.37
(9.5)

4.18
0.63
(106.0) (16.0)-

1.81(46.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5X0.8
0.20 (5.0)

KD8QTS-SC

1/2" Compression
Fitting

2.52(64.0)

0.50
4.18
0.63
(12.7) (106.0) (16.0)-

1.81(46.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5X0.8
0.20 (5.0)

KD4QTS-WC

1/4" Butt Weld

2.13
(54.0)-

3.23(82.0)

1.06(27.0)

1.39(35.3)

1.02(26.0)

0.99(25.0)

1.00(25.4)

2-M5X0.8
0.20 (5.0)

KD6QTS-WC

3/8" Butt Weld

2.72
(69.0)

-

4.18
0.63
(106.0) (16.0)-

1.81(46.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5X0.8
0.20 (5.0)

KD8QTS-WC

1/2" Butt Weld

2.72
(69.0)

-

4.18
0.63
(106.0) (16.0)-

1.81(46.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5X0.8
0.20 (5.0)

45°

M

C

H

M1
H2
H1
B
L
φA

45°

M

C

H

0.43
(11.0)

M1
H2
H1
B
L
φA

45°

M

C

H

M1
H2
H1
L1

B
L

45°

M

φA

L1

H

M1

C

H2
H1
B
L

* L1 dimension for compression fitting is the dimension of how far tube inserted from end of body.

12

0.43
(11.0)

0.43(11.0)KCD

The KCD series consists of KD series-based direct diaphragm valves that have

Compact Diaphragm Valves

The basic performance is that of high-spec valves that inherited everything fromthe KD series, our high-end model.

■Features■Specifications
Size
Cv
Maximum Operating Pressure

KCD4 (1/4")
0.1
142psig (0.98MPa(G))
0.058in3 (0.96cm3)

Wetted area Volume

Ultra High Purity Fittings◎ With the KCD series, KITZ SCT succeeded in reducing the internal volume to 0.96 cm3, versus the 1.4 cm3 (1/4" CVC male, open position).
◎ While keeping the same design as KD series, it achieved 20% reduction in external size, and the weight is also reduced. (Avaliable only in 1/4")◎ The durability performance was not compromised, and achieved 2 million cycles (actual value) for the Pneumaticvalve and 100,000 cycles (actual value) for the
manual valve.
◎ The highest level production environment and polish quality makes them suitable for use with high purity gases and achieves ultimate particle performance.

Ultra High Purity Valves

been made more compact.

Straight flow, CVC male, OPEN state

PCTFE
Manual Valve
Fluid Temperature
PFA
Pneumatic
Valve
PI
Atmospheric Temperature
Across the Seat He Leak
Test Rates
Leak Rates
Inboard He Leak Test Rates
Actuation Pressure-10ºC~80ºC

Vacuum Components-10ºC~150ºC-10°C~120°C (150°C actual results 500,000 cycles)-10ºC~150ºC-10ºC~60ºC≤ 1×10 sccs (≤ 1×10-10Pa·m3/s)-9≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)
58~101psig (0.4~0.7MPa(G))

Manual Valve

100,000 cycles

Pneumatic Valve

2 million cycles

Cycle Life** Test Condition / Seat material : PCTFE

Gas : N2 Pressure : 0.98MPa

PFA Valves■Product Grade
Grade

STD

Body Material
Surface Roughness
PolishSEP
SUS316LE(Double melt material)

SUS316L≤ Ra 0.5 μm / 20 μin
Mechanical Polished

Cleaning
Single bagged package≤ Ra 0.13 μm / 5 μin
Electro Polished
Degreasing+
Precision cleaning
Double bagged package

PFA Weld Fittings

PackagingEP■Wetted Area Material
Body
Seat
Diaphragm

SUS316L, SUS316LE (Double melt material)
PCTFE, PFA, PI
Cobalt alloy

Antistatic Unit

■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

13

Product Code Table
Model

Size

Options

Operation

KCD-type
Diaphragm Valve

M: 180° Manual
Q: 90° Manual

Valve Shape

Connection

Seat Material

S: Straight
A: Angle
L: L-shape
B: Branch*1

V: CVC Male
VF: CVC Female
W: Butt Weld

C: PCTFE
A: PFA
P: PI

Handle Color

Not Shown: Blue STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L(Standard)
SEP-316LE : Electro Polished + SUS316LE
RD: Red
GR: Green
SL: Silver
WH: White
BK: Black
YE: Yellow*1 For branch type, etc., please ask the sales and service representative.

■Dimensions

Grade + Body Material

Unit: inch (mm)

Model

Type

Connection

L

H

H1

H2

A

B

C

M

M1

M2

KCD4MS-VC

1/4" CVC Male

2.05
(52.0)

2.70(68.5)

0.43(11.0)

0.96(24.5)

1.26(32.0)

0.79(20.0)

0.79(20.0)

0.67(17.0)

2-M5
Depth
0.20 (5.0)

M14×1.0

KCD4MS-VFC

1/4" CVC Female

2.60(66.0)

2.70(68.5)

0.43(11.0)

0.96(24.5)

1.26(32.0)

0.79(20.0)

0.79(20.0)

0.67(17.0)

2-M5
Depth
0.20 (5.0)

M14×1.0

KCD4MS-WC

1/4" Butt Weld

1.97
(50.0)

2.70(68.5)

0.43(11.0)

0.96(24.5)

1.26(32.0)

0.79(20.0)

0.79(20.0)

0.67(17.0)

2-M5
Depth
0.20 (5.0)

M14×1.0

45°

M

φA

M2

C

M1

H
H2
H1
B
L

M2

M

45°

φA

C

M1

H
H2
H1
B
L

45°

M

φA

M2

C

M1

H
H2
H1
B
L

Product Code Table
Model

Size

KCD-type diaphragmvalve

Operation

Valve shape

Connection

Seat material

Grade + body material

C: Normally closed
O: Normally open

S: Straight
A: Angle
L: L-shape
B: Branch*1

V: CVC male
VF: CVC female
W: Butt weld

C:PCTFE
A:PFA
P:PI

STD-316L: Mechanical Polished +SUS316L
EP-316L : Electro Polished+ SUS316L
SEP-316LE : Electro Polished + SUS316LE*1 For branched flow type, etc., please ask the sales representative.

■Dimensions

Unit: inch (mm)

Model

φA

Type

Connection

L

H

H1

A

B

C

P

M

M1

KCD4□S-VC

1/4" CVC Male

2.05
(52.0)

2.40(61.0)

0.43(11.0)

1.38(35.0)

0.79(20.0)

0.79(20.0)

Rc1/8

0.67(17.0)

2-M5
Depth
0.20 (5.0)

KCD4□S-VFC

1/4" CVC Female

2.60(66.0)

2.40(61.0)

0.43(11.0)

1.38(35.0)

0.79(20.0)

0.79(20.0)

Rc1/8

0.67(17.0)

2-M5
Depth
0.20 (5.0)

KCD4□S-WC

1/4" Butt Weld

1.97
(50.0)

2.40(61.0)

0.43(11.0)

1.38(35.0)

0.79(20.0)

0.79(20.0)

Rc1/8

0.67(17.0)

2-M5
Depth
0.20 (5.0)

45°

M

P

H

C

M1

H1
B
L
φA

45°

M

P

C

M1

H

H1
B
L

P

45°

M

φA

M1

H

H1
B
L

14

C

VLCD

The VLCD series achieves commonization of parts and utilizes a forged body

Compact Diaphragm Valves■Features■Product Grade
Grade

STD

Body Material
SurfaceRoughness
PolishSize
Cv
Maximum Operating Pressure
Wetted Area Volume
Fluid Temperature
Across the Seat He Leak
Test Rates
Leak Rates
Inboard He Leak Test Rates
Atmospheric Temperature
Actuation Pressure (Pneumatic)
Cycle Life *≤ Ra 0.13 μm / 5 μin

Electro Polished
Degreasing+
Precision cleaning
Single bagged package
Double bagged package

0.1
142psig(0.98MPa (G))■Wetted Area Material

0.056in3 (0.93cm3)

Body
Seat
Diaphragm-10ºC~80ºC≤ 1×10 sccs (≤ 1×10 Pa·m /s)
-9

-10

3

SUS316L, SUS316LE (Double melt material)
PCTFE
Cobalt Alloy≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)

Vacuum Components* Test Condition / Seat material : PCTFESUS316L

Mechanical Polished

Packaging

VLCD4 (1/4")

SEP
SUS316LE(Double melt material)≤ Ra 0.5 μm / 20 μin

Cleaning■Specifications

EP

Ultra High Purity Fittings◎ Achieves 20% reduction in external size as compared to the conventional KD series.
(Available only in 1/4")◎ Achieves low cost pricing through commonization of parts and utilization of a forgedbody.
◎ Because the cleaning and inspection processes are the same as our conventional
products, the VLCD series can be used in the manufacturing of Semiconductor, FPD,
and LED production devices.

Ultra High Purity Valves

while maintaining the performance of the conventional KD series.

-10ºC~60ºC
58~101psig (0.4~0.7MPa (G))
2 million cycles

Gas : N2 Pressure : 0.98MPa■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Product Code Table
Model

Valve Shape

Connection

Seat Material

Grade + Body material

C: Normally Closed
O: Normally Open

S: Straight

V: CVC Male
VF: CVC Female

C:PCTFE

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L
SEP-316LE : Electro Polished + SUS316LE

PFA Valves

Operation

Size

VLCD
VLCD-type
Diaphragm Valve■VLCD Dimensions

Unit: inch (mm)

P

φA

Type

Connection

L

H

H1

A

B

C

P

M

M1

VLCD4CS-VC-2734

1/4" CVC Male

2.05
(52.0)

2.56(65.0)

0.43(11.0)

1.38(35.0)

0.87(22.0)

0.87(22.0)

Rc1/8

0.67(17.0)

2-M5
Depth
0.20 (5.0)

VLCD4CS-VFC-2735

1/4" CVC Female

2.60(66.0)

2.56(65.0)

0.43(11.0)

1.38(35.0)

0.87(22.0)

0.87(22.0)

Rc1/8

0.67(17.0)

2-M5
Depth
0.20 (5.0)

45°

M

M1
C

H

PFA Weld Fittings

Model

H1
B
L

φA

P

45°

M
H

C

H1
B
L

15

Antistatic Unit

M1

VLD

The VLD series embodies the pursuit of simplicity and utility found in the KD
series. The VLD series achieves simplification through the minimization of theDiaphragm Valves

number of critical parts.

■Features■Product Grade◎ While maintaining the same degree of basic performance, material, and cleaning, theVLD series realizes security and low cost through overall reduction of the number ofparts and changes to the review and processing methodology.
◎ Because the cleaning and inspection processes are the same as our conventionalmodel, there is no change in reliability and durability.
◎ Achieves maximum particle performance for high-purity gases used in semiconductor
by the highest-level manufacturing environment and polishing process.

Grade
Body
Materials
SurfaceRoughness

STD≤Ra0.5μm/20μin≤ Ra 0.13 μm / 5 μin

Mechanical
PolishElectro Polish
Degreasing+
Precision Cleaning

Cleaning

Size
Cv
Maximum Operating Pressure
Wetted Area Volume
PCTFE, PFA (Pneumatic)
Fluid Temperature
PFA(Manual)PI(Manual)
Across the Seat He Leak
Test Rates
Leak Rates
Inboard He Leak Test Rates
Atmospheric Temperature
Actuation Pressure (Pneumatic)
Manual Valve
Cycle Life *Pneumatic
Valve* Test Condition / Seat material : PCTFEVLD4 (1/4")

VLD8 (1/2")

0.27

0.7

SEP
SUS316LE(Double Melt Material)

SUS316L

Polish■Specifications

EP

Single Bagged
Package

Packing

Double Bagged Package

142psig(0.98MPa (G))
0.085in3 (1.4cm3)

0.451in3 (7.4cm3)-10ºC~80ºC■Wetted Area Material-10ºC~150ºC-10ºC~150ºC

Body
Seat *
Diaphragm≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)≤ 1×10 sccs (≤ 1×10 Pa·m /s)
-9

-10

3

SUS316L,SUS316LE (Double Melt Material)
PCTFE, PFA, PI
Cobalt Alloy* PI Seats only available with Manual Valves-10ºC~60ºC■Precautions

58~101psig (0.4~0.7MPa (G))① The valves are not guaranteed to function if their exterior issubmerged inside a vacuum.
② For high temperature applications, please select appropriatematerial for air-fittings and tubes to assure proper performance.

100,000 cycles
4 million cycles

Gas : N2 Pressure : 0.98MPa

Product Code Table
Model

Size

Options

Operation

Valve Shape

Connection

270° Manual

S: Straight
B: Branch*1

V: CVC Male
VF: CVC Female
S: Compression

Seat Material

Handle Color

Grade + Body Material

Not Shown: Blue
(Standard)
RD : Red
GR : GreenSL : Silver
BK : BlackYE : Yellow
BR : Brown

STD-316L : Mechanical Polish + SUS316L
EP-316L : Electro Polish + SUS316L
SEP-316LE : Electro Polish + SUS316LE

VLD
VLD-Type
Diaphragm Valve*1 For details, please speak with a sales representative.

■VLD Dimensions

Unit: inch (mm)

Model

φA

Type

Connection

L

L1*

H

H1

A

B

C

M

M1

VLD4MS-VC

1/4" CVC Male

2.24
(57.0)-

2.46(62.4)

0.43(11.0)

1.65(42.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

VLD8MS-VC

1/2" CVC Male

3.03
(77.0)-

2.99(76.0)

0.63(16.0)

1.65(42.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

VLD4MS-VFC

1/4" CVC Male

2.78
(70.6)-

2.46(62.4)

0.43(11.0)

1.65(42.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

VLD8MS-VFC

1/2" CVC Male

3.27
(83.0)-

2.99(76.0)

0.63(16.0)

1.65(42.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

VLD4MS-SC

1/4" Compression

1.89(48.0)

0.31
(7.9)

2.46
(62.4)

0.43(11.0)

1.65(42.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

VLD6MS-SC

3/8" Compression

2.52(64.0)

0.37
(9.5)

2.99
(76.0)

0.63(16.0)

1.65(42.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

VLD8MS-SC

1/2" Compression

2.52(64.0)

0.50(12.7)

2.99(76.0)

0.63(16.0)

1.65(42.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

M

45°

H

C

M1

H1
B
L

45°

C

M

φA

M1

H

H1
B
L

45°

M

φA

H

M1

C

H1
L1

B
L

L1

* L1 dimension for compression fitting is the dimension of how far tube is inserted from the end of the body.

16

Product Code Table
Size

Operation

Valve Shape

Connection

Seat Material

Grade + Body material

C: Normally Closed

S: Straight

V: CVC Male
VF: CVC Female
S: Compression

C:PCTFE
A:PFA

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L
SEP-316LE : Electro Polished + SUS316LE

VLD
VLD-type
Diaphragm Valve■VLD Dimensions

Unit: inch (mm)End connection

L

L1*

H

H1

A

B

C

P

M

M1

VLD4CS-VC

1/4" CVC Male

2.24
(57.0)-

2.58(65.5)

0.43(11.0)

1.56(39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

VLD8CS-VC

1/2" CVC Male

3.03
(77.0)-

3.31(84.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42(36.0)

Rc1/8

1.10(28.0)

2-M5
Depth
0.20 (5.0)

VLD4CS-VFC

1/4" CVC Female

2.78(70.6)-

2.58(65.5)

0.43(11.0)

1.56(39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

VLD8CS-VFC

1/2" CVC Female

3.27(83.0)-

3.31(84.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42(36.0)

Rc1/8

1.10(28.0)

2-M5
Depth
0.20 (5.0)

VLD4CS-SC

1/4" Compression

1.89(48.0)

0.31
(7.9)

2.58
(65.5)

0.43(11.0)

1.56(39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)VLD6CS-SC

3/8" Compression

2.52(64.0)

0.37
(9.5)

3.31
(84.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42(36.0)

Rc1/8

1.10(28.0)VLD8CS-SC

1/2" Compression

2.52(64.0)

0.50(12.7)

3.31(84.0)

0.63(16.0)

2.17(55.0)

1.42(36.0)

1.42(36.0)

Rc1/8

1.10(28.0)

2-M5
Depth
0.20 (5.0)
2-M5
Depth
0.20 (5.0)
2-M5
Depth
0.20 (5.0)

45°

M

P

H

C

M1

H1
B
L
φA

45°

M

P

H

C

M1
H1
B
L
φA

45°

M

P

H

C

M1

H1
L1

B
L

L1

* L1 dimension for compression fitting is the dimension of how far tube is inserted from the end of the body.

Product Code Table
Model

Options

Operation

Valve
Shape

Main Pipe
Connection

Main Pipe
Size

270° Manual

BranchButt Weld

15A,20A
25A,32A
40A,50A
65A

Size

Vacuum Components

Type

Ultra High Purity Fittings

Model

φA

Ultra High Purity Valves

Model

B-PortSeat Material
Connection

Handle Color

Grade + Body Material

Not shown: Blue
(Standard)
RD : Red
GR : GreenSL : Silver
BK : BlackYE : Yellow
BR : Brown

STD-316L : Mechanical Polish + SUS316L
EP-316L : Electro Polish + SUS316L
SEP-316LE : Electro Polish + SUS316LE*2

VLD
V: CVC Male
S: Compression*1

C:PCTFE
A:PFA
P:PI*1 For B-port fitting types other than shown, please consult a sales representative.
*2 Regardless of body material, the T-shape section of ports A-C will be SUS316L.

■VLD Branch Dimensions
Model

Unit: inch (mm)Type

B port End Connection

VLD4MB-W25AVC
VLD4MB-W32AVC
1/4"CVC MaleH
H1

VLD4MB-W40AVC

φD
T

L

F

VLD4MB-W50AVC
VLD4MB-W65AVC
VLD8MB-W15AVC
VLD8MB-W25AVC
VLD8MB-W32AVC
1/2"CVC MaleH
H1

VLD8MB-W40AVC

φD
T

L

F

VLD8MB-W50AVC
VLD8MB-W65AVC

H

H1

D

T

A

F

4.33
(110.0)4.72(120.0)5.51(140.0)5.51(140.0)5.51(140.0)5.91(150.0)4.33(110.0)4.72(120.0)5.51(140.0)6.30(160.0)6.30(160.0)7.09(180.0)3.62(92.0)
4.13(105.0)4.74(120.5)5.00(127.0)5.49(139.5)
6.10(155.0)4.29(109.0)4.80(122.0)5.18(131.5)5.45(138.5)6.00(152.5)
6.59(167.5)1.22(31.0)
1.49(37.8)
1.91(48.5)
2.05(52.0)
2.30(58.5)
2.62(66.5)
1.54(39.0)
1.81(46.1)
2.01(51.0)
2.17(55.0)
2.48(63.0)
2.76(70.0)

0.85(21.7)
1.34(34.0)
1.68(42.7)
1.91(48.6)
2.38(60.5)
3.00(76.3)
0.85(21.7)
1.34(34.0)
1.68(42.7)
1.91(48.6)
2.38(60.5)
3.00(76.3)

0.06(1.65)
0.06(1.65)
0.06(1.65)
0.06(1.65)
0.06(1.65)
0.08
(2.1)
0.06
(1.65)
0.06(1.65)
0.06(1.65)
0.06(1.65)
0.06(1.65)
0.08
(2.1)

1.65
(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)
1.65(42.0)

1.85(47.0)
1.85(47.0)
2.32(59.0)
2.32(59.0)
2.32(59.0)
2.32(59.0)
2.58(65.5)
2.58(65.5)
2.58(65.5)
2.58(65.5)
2.58(65.5)
2.58(65.5)

Note: For dimemsions other than the model dimensions, header production is possible bu special order. Please consult a sales representative.

17

Antistatic UnitφA

L

PFA Weld Fittings

VLD4MB-W15AVC
φA

Flow Pattern

PFA Valves

VLD-type
Diaphragm Valve

WD

The WD series valves are high performance diaphragm valves suitable for liquidmaterials.

Diaphragm Valves for Liquid Gas Delivery■Features◎ Capable of using high purity liquid materials such as TEOS used for semiconductor and liquid-crystal production.
◎ Seat assembly can be replaced on the user side while maintaining the valve's basic properties, particle performance, and purge characteristics.
◎ Effective in improving ease of maintenance and reducing running costs for chemical canisters that require periodic cleaning.
◎ Seat assembly replacement tool is the same for both manual and pneumatic operation.
◎ With an actuator diameter of φ39.7mm, it is possible to support a 40mm line pitch.

■Specifications
Size

WD4 (1/4")

Manual Valve
Cv
Pneumatic Valve
Wetted Area Volume
Manual Valve
Maximum Operating Pressure
Pneumatic Valve
PCTFE
Fluid Temperature
PFA
PI(Manual)Atmospheric Temperature
Across the Seat He
Leak Test Rates
Leak Rates
Inboard He Leak Test
Rates
Actuation Pressure(Pneumatic Valve Only)
Cycle Life

0.3
0.23
0.164in3 (2.7cm3)
2.94MPa (G)142psig(0.98MPa (G))-10ºC~80ºC-10ºC~150ºC-10ºC~150ºC-10°C~60°C, (PFA Pneumatic valve: -10°C~150°C)≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)
72~101psig (0.5~0.7MPa (G))
30,000 cycles■Product Grade
Grade
Body Material
Surface Roughness
PolishSTD

EP
SUS316L≤ Ra 0.5 μm / 20 μin

Electro Polish
Degreasing+
Precision Cleaning

Cleaning
Packaging

Single Bagged Package■Wetted Area Material
Body
Seat*
Diaphragm≤ Ra 0.13 μm / 5 μin

Mechanical Polish

Double Bagged Package■Maintenance Parts
SUS316L
PCTFE, PFA, PI
SUS316L* PI Seats only available with Manual Valves

No
1
2
3

■Precautions① The valves are not guaranteed to function if their exterior issubmerged inside a vacuum.

18

Part Name
BackupDiaphragm
PCTFE
Diaphragm
PFA
sub-ASSY
PI
GasketType

Quantity

WD4-D4M0241-06

2

WD4-D4M0321-01
WD4-D4M0809-A10
WD4-DX4M0651-A10
WD4-D4M0241-11

1
1
1
1

Product Code Table
Size

Valve
shape

Operation

WG-typediaphragm valve

M: ManualSeatmaterial

Connection

S: Straight
B: Branch

V: CVC male
C:PCTFE
VF: CVC female
A:PFA
W: 1/4" butt weld P:PI
W6: 3/8" butt weld
W8: 1/2" butt weld

Flow

Not shown:standard
N:Panel Nut mounted

A: A flow
B: B flow*1*1 Branched flow valves are shown in the diagram to the right.

Grade + Body
material

Not shown: blue STD-316L : Mechanical Polished+ SUS316L
EP-316L : Electro Polished + SUS316L(standard)
RD: Red
GR: Green
SL: Silver
WH: White
BK: Black
YE: Yellow
JH: Open/Close display

Flow direction A flow

B flow

Unit: inch (mm)

Model

φA

Type

Connection

L

H

H1

H2

A

B

C

M

M1

M2

WD4MSVC-N-588

1/4" CVC Male

2.24
(57.0)

2.72(69.0)

0.43(11.0)

1.06(27.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

M20×1.0

WD4MSVFC-N-589

1/4" CVC Female

2.78(70.6)

2.72(69.0)

0.43(11.0)

1.06(27.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

M20×1.0

WD4MSW6C-N-544

3/8" Butt Weld

1.89
(48.0)

2.72(69.0)

0.43(11.0)

1.06(27.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

M20×1.0

45°

C

M

M2
H

M1
H2

Ultra High Purity Fittings■Dimensions

Handlecolor

Nut

Ultra High Purity Valves

Model

Options

H1
B
L

45°

C

M

M2
H

M1
H2
H1
B
L
φA

45°

C

M

M2
H

M1
H2

Vacuum Components

φA

H1
B
L

PFA Valves

Product Code Table
Model

Operation

Size

Valve ShapeWD

Connection

Material

Grade + Body Material

C:PCTFE
A:PFA

STD-316L : Mechanical Polish +SUS316L
EP-316L : Electro Polish + SUS316L

V

WD-type DiaphragmValve

C: Normally Closed

Unit: inch (mm)

Model

φA

P

V: CVC Male
VF: CVC Female
W: Butt Weld

Type

Connection

L

H

H1

A

B

C

P

M

M1

WD4CS-VC

1/4" CVC Male

2.24
(57.0)

3.23(82.0)

0.43(11.0)

1.56(39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.20 (5.0)

WD4CS-VFC

1/4" CVC Female

2.78(70.6)

3.23(82.0)

0.43(11.0)

1.56(39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.20 (5.0)

WD4CS-W6C-2970

3/8" Butt Weld

1.89
(48.0)

3.23(82.0)

0.43(11.0)

1.56(39.7)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.20 (5.0)

M

45°

C

M1

H

H1
B
L
P

45°

C

M

φA

M1

H

B
L

45°

M

P

M1

H

C

H1
B
L

19

Antistatic Unit

H1

φA

PFA Weld Fittings■Dimensions

S:StraightRD

The RD series diaphragm valves are high pressure valves with compact body andlower operation torque.

High Pressure Diaphragm Valves■Features
Manual Valve◎ Large diameter wheel handle provides smooth operation feel.
◎ The valves employ a large window and easy-to-see OPEN/CLOSE display so that the state of the valve can be confirmed at a glance.

Pneumatic Valve◎ The new type vertical cylindrical actuator accommodates a minimal line pitch, so there is no need to worry about the orientation after installation.
◎ A compact, high-durability actuator is realized as a result of adopting KITZ SCT's patented wedge-type force booster.
◎ The rigidity of the joint between the actuator and the body is further increased for improved reliability.

■Specifications
Size
Cv

RD2 (1/8")

RD4 (1/4")

RD8 (1/2")

0.04

0.25

Maximum Operating Pressure

2350psig (16.2MPa (G))

0.1
16.2MPa (G), 20.6MPa (G)Metal: 8.5MPa (G), 3.43MPa (G)0.061in3 (1.0cm3)

0.009in3 (0.15cm3)

Wetted area Valume

3000psig (20.6MPa (G))
0.397in3 (6.7cm3)

Straight flow, CVC male, OPEN state

PCTFE, PVDF
Metal
PI *
PCTFE, PVDF
Atmospheric
Temperature
PI, Metal
Across the Seat He Leak
Test Rates
Leak Rates
Inboard He Leak Test Rates
Actuation Pressure(Pneumatic Valve Only)
Manual Valve
Cycle Life
Pneumatic
Valve-10ºC~42ºC

Fluid Temperature-10ºC~100ºC-10ºC~150ºC-10ºC~40ºC-10ºC~60ºC≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)
Metal: ≤ 3×10-9 sccs (≤ 3×10-10Pa·m3/s)≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)
58~101psig (0.4~0.7MPa (G))
30,000 cycles; metal not supported
100,000 cycles; metal (1/4" only) 10,000 cycles* In case ends connection are Female CVC, please reter to pp 47 for fluid temperature Range■Product Grade
Grade

STD

Body Material
Surface Roughness
PolishSEP
SUS316LE(Double melt material)

SUS316L≤ Ra 0.5 μm / 20 μin
Mechanical Polished

Cleaning
Packaging

EP

Single bagged package≤ Ra 0.13 μm / 5 μin
Electro Polished
Degreasing+
Precision cleaning
Double bagged package■Wetted Area Material
Body
Seat
Diaphragm

SUS316L, SUS316LE (Double melt material)
PCTFE, PI, PVDF, Metal
Cobalt alloy■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

20

Product Code TableSize

RD-typediaphragm valve

Operation

M:270˚ manual*1

S:StraightPressure

Connection Seat material

Handle color

Grade + Body material

H:16.2MPa(G)I:20.6MPa(G)V:CVC male
VF:CVC female
S: Compression
W:Butt weld

Not shown: Blue(standard)
RD: Red
GR: Green
SL: Silver
BK: Black
YE: Yellow
BR: Brown
WH: White

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L
SEP-316LE : Electro Polished+ SUS316LE

C:PCTFE
P:PI
D:PVDF*1 1/8” size is 180° manual.

■Dimensions

Unit: inch (mm)Type

Connection

L

L1*

H

H1

A

B

C

M

M1

RD2MSH-VC

1/8" CVC Male

1.61
(41.0)-

2.36(60.0)

0.28
(7.0)

1.34
(34.0)

0.75(19.0)

0.75(19.0)

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.24(57.0)-

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.24(57.0)-

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

M

45°

RD4MSH-VC

C

M1

H

1/4" CVC Male

RD4MSI-VC

H1

:

B
L

1/2" CVC Male

3.03
(77.0)-

3.90(99.0)

0.63(16.0)

2.36(60.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

RD2MSH-VFC

1/8" CVC Female

2.20(56.0)-

2.36(60.0)

0.28
(7.0)

1.34
(34.0)

0.75(19.0)

0.75(19.0)

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.78(70.6)-

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.78(70.6)-

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

45°

M

C

RD4MSH-VFC

M1

H

Vacuum Components

φA

RD8MSI-VC

Ultra High Purity Fittings

Model

φA

Ultra High Purity Valves

Model

Options

Valve
shape

1/4" CVC Female

RD4MSI-VFC

H1
B
L

1/2" CVC Female

3.27(83.0)-

3.90(99.0)

0.63(16.0)

2.36(60.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

RD2MSH-SC

1/8" Compression Fittings

3.06(77.8)

0.24
(6.1)

2.36
(60.0)

0.28
(7.0)

1.34
(34.0)

0.75(19.0)

0.75(19.0)

0.67(17.0)

2-M4
Depth
0.20 (5.0)

1.89(48.0)

0.31
(7.9)

3.19
(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

1.89(48.0)

0.31
(7.9)

3.19
(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

PFA Valves

RD8MSI-VFC

φA

M

45°

C

RD4MSH-SC
1/4" Compression Fittings

M1

H

H1
L1

B
L

RD8MSI-SC

1/2" Compression Fittings

2.52(64.0)

0.50(12.7)

3.90(99.0)

0.63(16.0)

2.36(60.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

RD2MSH-WC

1/8" Butt Weld

1.65
(42.0)-

2.36(60.0)

0.28
(7.0)

1.34
(34.0)

0.75(19.0)

0.75(19.0)

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.13(54.0)-

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.13(54.0)-

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.72(69.0)-

3.90(99.0)

0.63(16.0)

2.36(60.0)

1.42(36.0)

1.42(36.0)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

45°

M

φA

L1

C

RD4MSH-WC
1/4" Butt Weld

RD4MSI-WC

H1
B
L

RD8MSI-WC

1/2" Butt Weld

* L1 dimension for compression fitting is the dimension of how far tube inserted from end of body.

21

Antistatic Unit

M1

H

PFA Weld Fittings

RD4MSI-SC

Product Code Table
Model

Size

RD-type diaphragm valve

Operation

Valve shapePressure

Connection

Seat material

Grade + Body material

Normally closed

Straight

H:16.2MPa(G)I :20.6MPa(G)
G:8.5MPa(G)*1
E:3.43MPa(G)*1

V: CVC male
VF: CVC female
S: Compression
W.: Butt weld

C:PCTFE
P:PI
D:PVDF
M:MetalSTD-316L: +SUS316L
EP-316L: + SUS316L
SEP-316LE : +SUS316LE*1 For seat materials, pressures G and E are supported for metal only.
(Metal seats support only 1/4" size pneumatic valves.)■Dimensions

Unit: inch (mm)

Model

φA

Connection

L

L1*

H

H1

A

B

C

P

M

M1

RD2CSH-VC

1/8" CVC Male

1.61
(41.0)-

3.52(89.5)

0.28
(7.0)

1.26
(32.0)

0.75(19.0)

0.75(19.0)

Rc1/8

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.24(57.0)-

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.24(57.0)-

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

45°

M

P

Type

C

RD4CSHVC-971

M1

H

1/4" CVC Male

RD4CSI-VC-972
H1
B
L

φA

1/2" CVC Male

3.03
(77.0)

-

7.38
0.63
(187.5) (16.0)

2.20(56.0)

1.42(36.0)

1.42(36.0)

Rc1/4

1.10(28.0)

2-M5
Depth
0.20 (5.0)

RD2CSH-VFC

1/8" CVC Female

2.20(56.0)-

3.52(89.5)

0.28
(7.0)

1.26
(32.0)

0.75(19.0)

0.75(19.0)

Rc1/8

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.78(70.6)-

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.78(70.6)-

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

7.38
0.63
(187.5) (16.0)

2.20(56.0)

1.42(36.0)

1.42(36.0)

Rc1/4

1.10(28.0)

2-M5
Depth
0.20 (5.0)

45°

M

P

RD8CSI-VC

C

RD4CSHVFC-1371

M1

1/4" CVC Female

H

RD4CSIVFC-1295

H1
B
L

φA

1/2" CVC Female

3.27(83.0)-

RD2CSH-SC

1/8" Compression
Fittings

3.06(77.8)

0.24
(6.1)

3.52
(89.5)

0.28
(7.0)

1.26
(32.0)

0.75(19.0)

0.75(19.0)

Rc1/8

0.67(17.0)

2-M4
Depth
0.20 (5.0)

1.89(48.0)

0.31
(7.9)

3.90
(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

1.89(48.0)

0.31
(7.9)

3.90
(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

1/2" Compression
Fittings

2.52(64.0)

0.50
7.38
0.63
(12.7) (187.5) (16.0)

2.20(56.0)

1.42(36.0)

1.42(36.0)

Rc1/4

1.10(28.0)

2-M5
Depth
0.20 (5.0)

1/8" Butt Weld

1.65
(42.0)-

3.52(89.5)

0.28
(7.0)

1.26
(32.0)

0.75(19.0)

0.75(19.0)

Rc1/8

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.13(54.0)-

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.13(54.0)-

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.72(69.0)

-

7.38
0.63
(187.5) (16.0)

2.20(56.0)

1.42(36.0)

1.42(36.0)

Rc1/4

1.10(28.0)

2-M5
Depth
0.20 (5.0)

45°

M

P

RD8CSI-VFC

C

RD4CSHSC-1484
1/4" Compression
Fittings

M1

H

RD4CSISC-2546

H1
L1

B
L

L1

RD8CSISC-2546

RD2CSH-WC
P

45°

M

φA

C

RD4CSHWC-1408

M1

1/4" Butt Weld

H

RD4CSIWC-1571

H1
B
L

RD8CSI-WC

1/2" Butt Weld

* L1 dimension for compression fitting is the dimension of how far tube inserted from end of body.

22

Product Code TableSize

RD-typediaphragm valve

Operation

240° manual*2

BranchPressure

Seat
Connection material

H:16.2MPa(G)I :20.6MPa(G)V: CVC male
VF: CVC female
W: Butt weld

*1 Branched flow are shown in the diagram to the right.
*2 1/8” size is 180º manual.

C:PCTFE
P:PI
D:PVDF

Flow

Handle color

A: A flow
B: B flow
C: C flow*1

Not shown: Blue STD-316L : Mechanical Polished+SUS316L(standard)
EP-316L : Electro Polished+SUS316L
RD: RedSEP-316LE : Electro Polished+SUS316LE
GR: Green
SL: Silver
BK: Black
YE: Yellow
BR: Brown
WH: White

Flow direction
A flow

C flow

Unit: inch (mm)

Model

Type

Connection

L

H

H1

A

B

C

F

M

M1

RD2MBH-VC

1/8" CVC Male

1.61
(41.0)

2.36(60.0)

0.28
(7.0)

1.34
(34.0)

0.75(19.0)

0.75(19.0)

0.81(20.5)

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.24(57.0)

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.10(28.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.24(57.0)

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.10(28.0)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

45°

C

M

φA

RD4MBH-VC

M1

H

1/4" CVC MaleF

RD8MBI-VC

1/2" CVC Male

3.03
(77.0)

3.90(99.0)

0.63(16.0)

2.36(60.0)

1.42(36.0)

1.42(36.0)

1.52(38.5)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

RD2MBH-VFC

1/8" CVC Female

2.20(56.0)

2.36(60.0)

0.28
(7.0)

1.34
(34.0)

0.75(19.0)

0.75(19.0)

1.10(28.0)

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.78(70.6)

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.37(34.8)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.78(70.6)

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.37(34.8)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

45°

M

φA

C

RD4MBH-VFC

M1

Vacuum Components

RD4MBI-VC

H1
B
L

RD4MBI-VFC

H1
F

1/2" CVC Female

3.27(83.0)

3.90(99.0)

0.63(16.0)

2.36(60.0)

1.42(36.0)

1.42(36.0)

1.63(41.5)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

RD2MBH-WC

1/8" Butt Weld

1.65
(42.0)

2.36(60.0)

0.28
(7.0)

1.34
(34.0)

0.75(19.0)

0.75(19.0)

0.83(21.0)

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.13(54.0)

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.04(26.5)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.13(54.0)

3.19(81.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.04(26.5)

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.72(69.0)

3.90(99.0)

0.63(16.0)

2.36(60.0)

1.42(36.0)

1.42(36.0)

1.36(34.5)

1.10(28.0)

2-M5
Depth
0.20 (5.0)

45°

M

φA

C

RD4MBH-WC

M1

H

B
L

φA

1/4" Butt Weld

RD4MBI-WC

H1
F

RD8MBI-WCP

PFA Weld Fittings

RD8MBI-VFC

PFA Valves

1/4" CVC Female

H

B
L

Ultra High Purity Fittings■Dimensions

B flow

Grade + Body material

Ultra High Purity Valves

Model

Options

Valve
shape

1/2" Butt Weld

H

Antistatic Unit

H1
B
L

F

23

Product Code Table
Model

Size

RD-typediaphragm valve

Operation

Valve shapePressure

Connection Seat material

Flow

Grade + Body material

Normally closed

BranchH: 16.2MPa(G)I: 20.6MPa(G)G: 8.5MPa(G)*2
E: 3.43MPa(G)*2

V: CVC male
VF: CVC female
W: Butt weld

A: A flow
B: B flow
C: C flow*1

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L
SEP-316LE : Electro Polished +SUS316LE*1 Branched flow are shown in the diagram to the right.
*2 For seat materials, pressures G and E are supported for metal only.
(Metal seats support only 1/4" size pneumatic valves.)■Dimensions

C flow

Type

Connection

L

H

H1

A

B

C

F

P

M

M1

RD2CBH-VC

1/8" CVC Male

1.61
(41.0)

3.52(89.5)

0.28
(7.0)

1.26
(32.0)

0.75(19.0)

0.75(19.0)

0.81(20.5)

Rc1/8

0.67(17.0)

2-M4
Depth
0.20 (5.0)

M

C

2.24
(57.0)

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

1.10(28.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.24(57.0)

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

1.10(28.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

RD4CBH-VC

M1

H

1/4" CVC Male

RD4CBI-VC

H1
F

45°

P

M

φA

C

M1

RD8CBI-VC

1/2" CVC Male

3.03
7.38
0.63
(77.0) (187.5) (16.0)

2.20(56.0)

1.42(36.0)

1.42(36.0)

1.52(38.5)

Rc1/4

1.10(28.0)

2-M5
Depth
0.20 (5.0)

RD2CBHVFC

1/8" CVC Female

2.20(56.0)

3.52(89.5)

0.28
(7.0)

1.26
(32.0)

0.75(19.0)

0.75(19.0)

1.10(28.0)

Rc1/8

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.78(70.6)

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

1.37(34.8)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.78(70.6)

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

1.37(34.8)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

RD4CBHVFC
1/4" CVC Female

H

RD4CBI-VFC

H1
B
L

F

RD8CBI-VFC

1/2" CVC Female

3.27
7.38
0.63
(83.0) (187.5) (16.0)

2.20(56.0)

1.42(36.0)

1.42(36.0)

1.63(41.5)

Rc1/4

1.10(28.0)

2-M5
Depth
0.20 (5.0)

RD2CBH-WC

1/8" Butt Weld

1.65
(42.0)

3.52(89.5)

0.28
(7.0)

1.26
(32.0)

0.75(19.0)

0.75(19.0)

0.83(21.0)

Rc1/8

0.67(17.0)

2-M4
Depth
0.20 (5.0)

2.13(54.0)

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

1.04(26.5)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.13(54.0)

3.90(99.0)

0.43(11.0)

1.50(38.0)

1.02(26.0)

0.98(25.0)

1.04(26.5)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

2.72
7.38
0.63
(69.0) (187.5) (16.0)

2.20(56.0)

1.42(36.0)

1.42(36.0)

1.36(34.5)

Rc1/4

1.10(28.0)

2-M5
Depth
0.20 (5.0)

45°

P

M

φA

C

RD4CBH-WC

M1

H

1/4" Butt Weld

RD4CBI-WC

H1
B
L

F

RD8CBI-WC

24

B flow

45°

P

B
L

Flow direction
A flow

Unit: inch (mm)

Model

φA

C: PCTFE
P: PI
D: PVDF
M: Metal

1/2" Butt Weld

VRD

The “VRD” series is a 1/4" high pressure direct diaphragm valve for 20.6 Mpa en-

Diaphragm Valves

Perfect for machines with internal plumbing and gas lines which must completely
prevent leaks relating to high pressure, high temperature, and high vacuum (Cylinder Cabinet, BSGS).

■Features■Product Grade◎ Takes the same perfomance as the existing RD series and achieves lower costthrough the reduction of the number of parts.
◎ Operation torque reduced compared to RD seris.
◎ Compact size compared to conventional products by reducing height by 6mm.
◎ More simple, compact, and with lower cost compared to previous designs.

Grade

EP

Body Material

Cleaning

VRD4 (1/4")≤0.1

Packaging

3000psig(20.6MPa (G))

SEP
SUS316LE(Double melt material)

SUS316L≤Ra0.5μm/20μin≤ Ra 0.13 μm / 5 μin

Mechanical Polish

Electro Polish
Degreasing+
Precision Cleaning
Single Bagged Package
Double Bagged Package

Ultra High Purity Fittings

SurfaceRoughness
Polish■Specifications
Size
Cv
Maximum Operating Pressure
Wetted Area Volume
PCTFE, PVDF
Fluid
TemperaturePI
PCTFE, PVDF
Atmospheric
TemperaturePI
Across the Seat He Leak
Test Rates
Leak Rates
Inboard He Leak Test Rates
Cycle Life

STD

1.0cm3-10ºC~42ºC-10ºC~150ºC-10ºC~40ºC■Wetted Area Material-10ºC~60ºC

Body
Seat
Diaphragm≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)

SUS316L, SUS316LE (Double Melt Material)
PCTFE, PI, PVDF
Cobalt Alloy

Vacuum Components≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)
50,000 cycles■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.

Product Code Table
Model

Valve shapePressure

ConnectionI

VF

I :20.6MPa

V: CVC Male
VF: CVC Female
S: Compression
W.: Butt Weld

Seat material

Grade + Body material

C:PCTFE
A:PI
D:PVDF

STD-316L : Mechanical Polish + SUS316L
EP-316L : Electro Polish + SUS316L
SEP-316LE : Electro Polish + SUS316LE

VRD

M

VRD-type
Diaphragm Valve

240°manual

S: Straight
B: BranchType

Connection

L

L1*

H

H1

A

B

C

M

M1

VRD4MSI-VC

1/4" CVC Male

2.24
(57.0)-

2.95(75.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20
(5.0)

VRD4MSI-VFC

1/4" CVC Female

2.78(70.6)-

2.95(75.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20
(5.0)

1/4" Compression

1.89(48.0)

0.31
(7.9)

2.95
(75.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20
(5.0)

1/4" Butt Weld

2.13
(54.0)-

2.95(75.0)

0.43(11.0)

2.05(52.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.20
(5.0)

Unit: inch (mm)

Model

φA

Operation

45°

M

C

M1

H

H1

45°
C

M

φA

M1

H

H1
B
L
φA

M

45°
C

M1

H

VRD4MSI-SC

B
L

L1

M

45°

M1

H

C

VRD4MSI-WC

H1
B
L* L1 dimension for compression fitting is the dimension of how far the tube is inserted from the end of the body.

25

Antistatic Unit

H1

φA

PFA Weld Fittings

B
L

L1

PFA Valves■VRD Dimensions

Size

Ultra High Purity Valvesclosed gas pressure.

ZCD

ZCD series diaphragm is minimized the dead volume within the valve and enhanced the gas displacement feature drastically.

Zero Volume Valve■Features■Product Grade◎ By minimizing the dead volume from the seat to the main flow channel while closing thevalve, the gas displacement feature becomes excellent.
◎ In order to prevent vacuum closing of the diaphragm and to improve the opening speed,
the lift (ASSY) section forcibly lifts the diaphragm.
◎ The lift (ASSY) section can be replaced by the user.

Grade
Seat
Body Materials
SurfaceRoughness
Polish■Specifications
Size
Cv
Maximum Operating Pressure
Wetted Area Volume
Dead Volume of Bifurcation
PCTFE
Fluid TemperaturePI
Atmospheric Temperature

ZCD4Q

142psig(0.98MPa(G))

Cycle Life

-10ºC~+60ºC-10ºC~+60ºC
72.52~101.53psig(0.5~0.7MPa(G))

2 million cycles*2

Product Code Table
Size

ZCD
Zero Volume-type
diaphragm valve

Operation

Valve shape

Connection

Q
4:1/4"

QT: 90°manual

PCTFE, PFA*3
Cobalt alloy① The valves are not guaranteed to function if their exterior issubmerged inside a vacuum.
② For high temperature applications, please select appropriatematerial for air-fittings and tubes to assure proper performance.
*1 For header pipe 1/4" size. Varies depending on the header pipe size, etc.
*2 For fluid temperatures of 80°C and below. For PFA (NC), 300,000
cycles at 150°C and 600,000 cycles at 120°C*3 Only pneumatic valve (NC) setting is available for PFA seats.

≤ 1×10-9sccs(≤ 1×10-10Pa·m3/s)

Model

SUS316L, SUS316LE (Double melt material)■Precautions≤ 1×10-9sccs(≤ 1×10-10Pa·m3/s)

30,000 cycles≤ Ra 0.13 μm / 5 μin

Mechanical Polish
Electro Polish
Degreasing+
Precision cleaning
Single bagged package
Double bagged package

Body
Seat
Diaphragm-10ºC~+80ºC

Across the Seat He Leak
Test Rates
Inboard He Leak Test Rates
Pneumatic Valve≤ Ra 0.5 μm / 20 μin■Wetted Area Material

0.007cm3 *1-

SUS316L

Packing

0.054in3 (0.9cm3)

EP
PCTFE, PFA*3

Cleaning

0.1

Actuation Pressure
Leak Rates

ZCD4C

STD

Seat material

Grade + Body material

C: PCTFE

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L

V
S: Straight
A: Angle
L: L-shape
B: Branch

V: CVC male
VF: CVC female
S: Compression
W: Butt weld

*1 Please contact sales representative for branch type.

■ZCD Manual Dimensions
Model

φA

Unit: inch (mm)Type

Connection

L

L1*

H

H1

A

B

C

P

M

M1

ZCD4QS-VC

1/4" CVC Male

2.05
(52.0)-

3.11(79.0)

0.43(11.0)

1.02(26.0)

0.87(22.0)

0.83(21.0)-

1.00(25.4)

2-M5X0.8
0.20 (5.0)

ZCD4QS-VFC

1/4" CVC Female

2.60(66.0)-

3.11(79.0)

0.43(11.0)

1.02(26.0)

0.87(22.0)

0.83(21.0)-

1.00(25.4)

2-M5X0.8
0.20 (5.0)

ZCD4QS-SC

1/4" Compression Fitting

1.73(44.0)

0.31
(7.9)

3.11
(79.0)

0.43(11.0)

1.02(26.0)

0.87(22.0)

0.83(21.0)-

1.00(25.4)

2-M5X0.8
0.20 (5.0)

ZCD4QS-WC

1/2" Butt Weld

1.97
(50.0)-

3.11(79.0)

0.43(11.0)

1.02(26.0)

0.87(22.0)

0.83(21.0)-

1.00(25.4)

2-M5X0.8
0.20 (5.0)

M

45°

H

C

M1

H1
B
L

45°

M

φA

H

C

M1

H1
B
L
φA

M

45°

H

C

M1

H1
L1

B
L

L1

45°

M

φA

H

M1

C

H1
B
L

* L1 dimension for compression fitting is the dimension of how far tube inserted from end of body.

26

ModelSize

Operation

ZCD

Valve shape

Connection

Seat material

Grade + Body material

V: CVC male
VF: CVC female
S: Compression
W: Butt weld

C: PCTFE
A: PFA*2

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L

C

ZCD:Zero Volume
4:1/4"-type diaphragm valve
ZCDV:Zero Volume-type diaphragm valve
with flow -control(Option)

Ultra High Purity Valves

Product Code Table
V
S: Straight
A: Angle
L: L-shape
B: Branch*1

C: Normally closed
O: Normally open

*1 Contact your sales representative regarding multi port connection types.
*2 Only normally closed (NC) setting is available for PFA seats.

■Dimensions

Unit: inch (mm)

φA

P

M

45°

L1*

H

H1

A

B

C

P

M

M1

ZCD4CS-VC

1/4" CVC Male

2.047
(52.0)-

3.504(89.0)

0.433(11.0)

1.102(28.0)

0.866(22.0)

0.827(21.0)

2-M5×0.8
0.20 (5.0)

0.669(17.0)

2-M5×0.8
0.20 (5.0)

ZCD4OS-VC

1/4” CVC Male

2.047
(52.0)-

3.740(95.0)

0.433(11.0)

1.102(28.0)

0.866(22.0)

0.827(21.0)

2-M5×0.8
0.20 (5.0)

0.669(17.0)

2-M5×0.8
0.20 (5.0)

ZCD4CS-VFC

1/4" CVC Female

2.598(66.0)-

3.504(89.0)

0.433(11.0)

1.102(28.0)

0.866(22.0)

0.827(21.0)

2-M5×0.8
0.20 (5.0)

0.669(17.0)

2-M5×0.8
0.20 (5.0)

ZCD4OS-VFC

1/4” CVC Female

2.598(66.0)-

3.740(95.0)

0.433(11.0)

1.102(28.0)

0.866(22.0)

0.827(21.0)

2-M5×0.8
0.20 (5.0)

0.669(17.0)

2-M5×0.8
0.20 (5.0)

ZCD4CS-SC

1/4" Compression
Fitting

1.732(44.0)-

3.504(89.0)

0.433(11.0)

1.102(28.0)

0.866(22.0)

0.827(21.0)

2-M5×0.8
0.20 (5.0)

0.669(17.0)

2-M5×0.8
0.20 (5.0)

ZCD4OS-SC

1/4” Compression
Fitting

1.732(44.0)-

3.740(95.0)

0.433(11.0)

1.102(28.0)

0.866(22.0)

0.827(21.0)

2-M5×0.8
0.20 (5.0)

0.669(17.0)

2-M5×0.8
0.20 (5.0)

ZCD4CS-WC

1/4" Butt Weld

1.969
(50.0)-

3.504(89.0)

0.433(11.0)

1.102(28.0)

0.866(22.0)

0.827(21.0)

2-M5×0.8
0.20 (5.0)

0.669(17.0)

2-M5×0.8
0.20 (5.0)

ZCD4OS-WC

1/4” Butt Weld

1.969
(50.0)-

3.740(95.0)

0.433(11.0)

1.102(28.0)

0.866(22.0)

0.827(21.0)

2-M5×0.8
0.20 (5.0)

0.669(17.0)

2-M5×0.8
0.20 (5.0)

C

M1

H

H1
B
L

φA

45°

M

P

H

C

M1

H1
B
L

P

45°

M

φA

C

M1

H

H1
B
L

L1

φA

P

45°

M

L1

C

M1

H

H1
B
L

PFA Weld FittingsL

PFA Valves

Connection

Vacuum Components

Type

Ultra High Purity Fittings

Model* L1 dimension for compression fitting is the dimension of how far tube is inserted from the end of body.

Antistatic Unit
27

Mono Block Valves
Block-type■Flow Direction
A flow

B flow

B

B

C

C

C
A

A
B23V type

A

A

B
B23H typeB

B23V type

B23H type■Features◎ Excellent degassing characteristics is achieved through minimized flow paths by combining 2 of the KD, KCD, or RD valves together in one valve body.
◎ The basic performance is inherited from the performance of the base valves, and an extremely compact panel design can be achieved by combining the actuatorsof choice in one valve body.
◎ The optimal flow layout can be made through selection of various flow systems, pipe routing, and fittings.
◎ A series of three or more actuator block valves can also be produced for special applications.

■Specifications
Size
Cv
Wetted Area Volume

KD2 (1/8")

KD4 (1/4")

KD8 (1/2")

0.04

0.22

0.7

0.034in3 (0.56cm3)
0.195in3 (3.2cm3)
1.208in3 (19.8cm3)
Other specifications and product grades conform to the valves on which the series is based.

■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Block Valve Manual Product Code Table
Port
Model
direction

Block valve Number of Number of V: Vertical KD: KD-type
valves
H: Horizontal diaphragm valve
ports
KCD: KCD-type*1
diaphragm valve

Size

V1

Options

V2

M: Manual
Q: 90° manual*3

RD: High-pressure
diaphragm valve

Handletype

Handlecolor

V: CVC male C:PCTFE
VF: CVC female A:PFA
W: Butt weld P:PI
*5
*4

Not shown:Standard
POC:
Push-lock typeNot shown:Blue (standard)
BK: Black
GR: Green
RD: Red
SL: Silver
WH: White
YE: Yellow*2*1 For the port direction and flow, please refer to the Flow direction noted above.
*2 Please contact sales representative for detail.
*3 In the case where the actuators are the same, there will be one symbol.
*4 In the case where the types of fittings differ, please note them in the above order of Flow direction Ports A, B, and C.
Example) For the case of Port A = CVC female, Port B = CVC female, Port C = CVC male, the model will be "VFVFV."*5 Contact us for materials other than the above.

■Dimensions
Model

Type

A1

φA

C

H
H1
B
L
W

Flow

Port
direction

Grade + Body
material

A: A flow
B: B flow*1

Not shown:Standard
L: Reversed

STD-316L:
Mechanical Polished + SUS316L
EP-316L:
Electro Polished + SUS316L
SEP-316LE:
Electro Polished + SUS316LE

Unit: inch (mm)

L

H

H1

A

A1

B

T1

C

W

T

M1

3.50
(89.0)

2.05(52.0)

0.28
(7.0)

0.94
(24.0)

3.54(90.0)

2.05(52.0)

0.83(21.0)

1.79(45.5)

1.34(34.0)

0.47(12.0)

2-M5
Depth
0.20 (5.0)

4.24
B23VK1/4" CVC Female(107.6)
D4M-VFC

2.83(72.0)

0.43(11.0)

1.65(42.0)

4.80(122.0)2.52(64.0)

1.02(26.0)

2.12(53.8)

1.57(40.0)

0.59(15.0)

4-M5
Depth
0.20 (5.0)

5.63
B23VK1/2" CVC Female(143.0)
D8M-VFC

3.43(87.0)

0.63(16.0)

1.65(42.0)

5.59(142.0)3.82(97.0)

1.42(36.0)

2.81(71.5)

2.36(60.0)

0.79(20.0)

4-M5
Depth
0.20 (5.0)

B23HK1/8" CVC Female
D2M-VFC

3.50(89.0)

2.05(52.0)

0.28
(7.0)

0.94
(24.0)

3.54(90.0)

2.05(52.0)

0.83(21.0)

1.14(29.0)

1.34(34.0)

0.47(12.0)

2-M5
Depth
0.20 (5.0)

4.24
B23HK1/4" CVC Female(107.6)
D4M-VFC

2.83(72.0)

0.43(11.0)

1.65(42.0)

4.80(122.0)2.52(64.0)

1.02(26.0)

1.37(34.8)

1.57(40.0)

0.59(15.0)

4-M5
Depth
0.20 (5.0)

5.63
B23HK1/2" CVC Female(143.0)
D8M-VFC

3.43(87.0)

0.63(16.0)

1.65(42.0)

5.59(142.0)3.82(97.0)

1.42(36.0)

1.61(41.0)

2.36(60.0)

0.79(20.0)

4-M5
Depth
0.20 (5.0)

B23VK1/8" CVC Female
D2M-VFC

M1

T1 T

φ
A

28

Connection

Options

Connection Seatmethod material

Block Valve Pneumatic Product Code Table

Block valve

Numberof valves

Numberof ports

V: Vertical KD: KD-type
H: Horizontal diaphragm valve
KCD: KCD-type*1

diaphragm valve
RD: High-pressure
diaphragm valve
*4

Size

V1

Options

Seat
Connection
material

V2

V: CVC male C: PCTFE
VF: CVC female A: PFA
W: Butt weld P: PI*3

C: NormallyclosedO: Normally
open
*2

Port
direction

Flow

A: flow
B: flow*1

Grade + Body
material

Not shown: STD-316L
Standard Mechanical Polished + SUS316L
L: Reversed EP-316L
Electro Polished + SUS316L
SEP-316LE:
Electro Polished + SUS316LE*1 For the port direction and flow, please refer to Flow direction on P. 28.
*2 In the case where the actuators are the same, there will be one symbol.
*3 In the case where the types of fittings differ, please note them as on P. 28 in the order of Flow direction Ports A, B, and C.
Example) For the case of Port A = CVC female, Port B = CVC female, Port C = CVC male, the model will be "VFVFV."*4 Contact your sales representative for details.

Unit: inch (mm)

Model

Type

A1

φA

H1
B
L
W

L

H

H1

A

A1

B

T1

C

W

T

M1

P
2-Rc1/8

B23VKD2□□-VFC

1/8" CVC
Female3.50(89.0)

2.20(56.0)

0.28
(7.0)

1.10
(28.0)

3.86(98.0)

2.05 0.83 1.79 1.34 0.47
(52.0) (21.0) (45.5) (34.0) (12.0)

2-M5
Depth
0.20
(5.0)

B23VKD4□□-VFC

1/4" CVC
Female4.24(107.6)

2.78(70.5)

0.43 1.56(11.0) (39.7)

4.72(120.0)2.52 1.02 2.12 1.57 0.59
(64.0) (26.0) (53.8) (40.0) (15.0)

4-M5
Depth
0.20
(5.0)

2-Rc1/8

B23VKD8□□-VFC

1/2" CVC
Female5.63(143.0)6.50 [6.14](165.03.82 1.42 2.81 2.36 0.79
[156.0]) (97.0) (36.0) (71.5) (60.0) (20.0)
*5

4-M5
Depth
0.20
(5.0)

2-Rc1/8

B23HKD2□□-VFC

1/8" CVC
Female3.50(89.0)

2.20(56.0)

0.28
(7.0)

1.10
(28.0)

3.86(98.0)

2.05 0.83 1.14 1.34 0.47
(52.0) (21.0) (29.0) (34.0) (12.0)

2-M5
Depth
0.20
(5.0)

2-Rc1/8

B23HKD4□□-VFC

1/4" CVC
Female4.24(107.6)

2.78(70.5)

0.43 1.56(11.0) (39.7)

4.72(120.0)2.52 1.02 1.37 1.57 0.59
(64.0) (26.0) (34.8) (40.0) (15.0)

4-M5
Depth
0.20
(5.0)

2-Rc1/8

B23HKD8□□-VFC

1/2" CVC
Female5.63(143.0)6.50 [6.14](165.03.82 1.42 1.61 2.36 0.79
[156.0]) (97.0) (36.0) (41.0) (60.0) (20.0)
*5

4-M5
Depth
0.20
(5.0)

2-Rc1/8P

C

H

Connection

Ultra High Purity Fittings■Dimensions

Ultra High Purity ValvesPort
direction Model

M1

T1 T

A
φ

3.88 [3.70]
0.63 2.17(98.5 [94.0])(16.0) (55.0)*5

Vacuum Components

3.88 [3.70]
0.63 2.17(98.5 [94.0])(16.0) (55.0)*5

PFA Valves*5 Dimensions given in parentheses are for the 'normally open' configuration.

PFA Weld Fittings
Antistatic Unit
29

Mono Block Valve
Flicker-type■Flow Direction
B

A flow

C

B flow

B

B

A

A

A

C

C

■Features◎ Flicker valves minimize the dead space by making the valve body of KITZ SCT's dual actuator three-way block valves even more compact. The two valve actuators
are laid out in horizontally opposed position with the valve body between them.
◎ The compact design of the valve makes design of the layout inside a valve box easier, and helps reduce the volume of the valve box itself.
◎ The simple valve body makes compact design because of easy designing when insulator or heater jacket is required.
◎ Flicker valves can be provided with standard KD, compact KCD, or high pressure RD series actuators.

■Specifications
Size
Cv
Wetted Area Volume

KD2 (1/8")

KD4 (1/4")

KD8 (1/2")

0.04

0.22

0.7

0.019in3 (0.31cm3)0.140in3 (2.3cm3)0.720in3 (11.8cm3)
Other specifications and product grades conform to the valves on which the series is based.

■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Product Code Table

OptionsPort
direction Model

Block valve Number ofvalvesNumber of
ports

Size

Flicker type KD: KD-type*1
diaphragm valve
KCD: KCD-type
diaphragm valve
RD: High-pressure
diaphragm valve

V1

V2

C: Normally closed
O: Normally open
M: Manual valves
Q: 90° manual valves*2

Connection Seatmethod material

Handletype

V: CVC male
VF: CVC female
W: butt weld
*3
*4

Not shown: Not shown:
A: A flow
standarad
Blue (standard) B: B flow
POC:
*1
BK: BlackPush-lock type GR: Green
RD: Red
SL: Silver
WH: White
YE: Yellow*1 For the port direction and flow, please refer to the Flow direction noted above.
*2 In the case where the actuators are the same, there will be one symbol.
*3 In the case where the types of fittings differ, please note them in the above order of Flow direction Ports A, B, and C.
Example) For the case of Port A = CVC female, Port B = CVC female, Port C = CVC male, the model will be "VFVFV."*4 Contact us for materials other than the above.

■Dimensions

Flow

Grade + bodymaterial

STD-316L:
Mechanical Polished + SUS316L
EP-316L:
Electro Polished + SUS316L
SEP-316LE:
Electro Polished + SUS316LE

Unit: inch (mm)

Model

φA

Type

Connection

L

E

H

A

B

C

P

M

M1

B23FKD2□□-VC

1/8" CVC Male

1.61
(41.0)

0.81(20.5)

3.62(92.0)

1.10(28.0)

0.81(20.5)

0.59(15.0)

Rc1/8

0.51(13.0)

2-M4
Depth
0.20 (5.0)

B23FKD4□□-VC

1/4" CVC Male

2.24
(57.0)

1.12(28.5)

4.69(120.0)1.56(39.7)

1.12(28.5)

0.83(21.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.20 (5.0)

B23FKD2□□-VFC

1/8" CVC Female

2.20(56.0)

1.10(28.0)

3.62(92.0)

1.10(28.0)

1.10(28.0)

0.59(15.0)

Rc1/8

0.51(13.0)

2-M4
Depth
0.20 (5.0)

B23FKD2□□-VFC

1/8" CVC Female

2.74(69.6)

1.37(34.8)

4.69(120.0)1.56(39.7)

1.37(34.8)

0.83(21.0)

Rc1/8

1.00(25.4)

2-M4
Depth
0.20 (5.0)

B23FKD8□□-VFC

1/2" CVC Female

3.27(83.0)

1.63(41.5)

5.35(136.0)2.17(55.0)

1.63(41.5)

1.57(40.0)

Rc1/8

0.79(20.0)

2-M5
Depth
0.20 (5.0)

P
M1

M

45°
M

H

M

45°

M1

E

L

E

B

M1

C

M1

φA

M

P

M

45°

H

M1

E

L

E

B

C

M

M1

30

Handlecolor

IC

The IC series valves are poppet sliding check valves that have smooth closing andspecially designed elastomer, the valves can retain a seal from low pressure to highpressure, and they have been perfected into designs that minimize gas accumulation
due to their compact design.

■Features■Specifications■Product Grade
Grade
Body Material
SurfaceRoughness

STD

EP
SUS316L≤ Ra 0.5 μm / 20 μin ≤ Ra 0.13 μm / 5 μin

PolishCleaning
Packaging

MechanicalElectro Polished
Polished
Degreasing+
Precision cleaning
Single bagged pack- Double bagged package
age■Precautions① For these valve seals, the appropriate differential pressure for each value of cracking pressure will be needed.
② In cases where the differential pressure is small due to the operating state, variations in seal performance may occur.
③ During initial operation or when operated after long inactivity, the initial cracking pressure may be slightly higher than the cracking pressure specified.
④ The cracking pressure rated on the valve is a pressure for the valve to be fully open, but the valve starts opening at lower than rated pressure.
⑤ Back Pressure Seal is subject to change depending on seat material. Back Pressure Seal is 69 (KPa) when the seat material is Kalrez.
⑥ The valves are not guaranteed to function if their exterior is submerged inside a vacuum.

Vacuum Components

Size
IC4 (1/4")
IC6 (3/8") IC8 (1/2")
0.35
1.1
1.1
Cv
2350psig (16.2MPa(G))
Maximum Operating Pressure-10ºC~80ºC
Fluid Temperature
Inboard He Leak≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)
Leak Rates
Test Rates
1/3:2.26 1:6.86 10:68.6 25:171.6
1/3:2.26
Cracking Pressure (kPa)
4.26psig (29.4kpa) 0.71psig (4.9kpa)
4.26psig (29.4kpa)
Back Pressure Seal (kPa)Ultra High Purity Fittings◎ Made out of SUS316L, these valves have improved corrosion resistance.
◎ These valves have a mechanism such that when there is strong back pressure, the poppet and body contact at each metal part, and the force of the pressing of
the poppet and molded gasket and the stress are always constant, so a long life will be obtained.
◎ The specially designed molded gasket employs elastomer, instead of a conventional O-ring to minimize the dead space. In addition, special processing prevents
blowouts.
◎ The component parts have simpler structures. In addition, excellent external air-tightness is obtained by the use of metal seat.
◎ Precision fit between the two bodies and the design of the sealing surface provides excellent seal performance.
◎ KITZ SCT has taken advantage of the elasticity of the elastomer during the assembly to achieve highest sealing performance for both external and internal leak.

Ultra High Purity Valves

opening operation due to their precision fitting finish.In addition, because of their

Check Valves

Product Code Table
Size

Cracking pressure

Check valve

Connection

Seat material

Grade + Body material

V: CVC male
VF: CVC female
S: Compression

F: Fluorine rubber
NE: Neoprene rubber
KL: KALREZ®
*1

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L

PFA ValvesModel*1 KL=KALREZ® is a trademark of DuPont Performance Elastomers
Only those sizes that accommodate a 1/4" cracking pressure of 1H or less.

■Dimensions

Unit: inch (mm)Connection

A

L

D

L1*

L

IC4-□-V□

1/4" CVC Male

0.75
(19.0)

2.22(56.4)

1.00(25.4)-

IC8-□-V□

1/2" CVC Male

0.94
(24.0)

2.72(69.0)

1.26(32.0)-

IC4-□-VF□

1/4" CVC Female

0.75(19.0)

2.76(70.0)

1.00(25.4)-

IC8-□-VF□

1/2" CVC Female

0.94(24.0)

3.11(79.0)

1.26(32.0)-

IC4-□-S□

1/4" Compression Fittings

0.75(19.0)

1.81(46.0)

1.00(25.4)

0.31(7.9)

IC6-□-S□

3/8" Compression Fittings

0.94(24.0)

2.20(55.9)

1.26(32.0)

0.37(9.5)

IC8-□-S□

1/2" Compression Fittings

0.94(24.0)

2.28(57.8)

1.26(32.0)

0.50(12.7)

D

φA

L
D

φA

Antistatic UnitType

PFA Weld Fittings

Model

L
L1

D

L1

φA

* L1 dimension for compression fitting is the dimension of how far tube inserted from end of body.

31

TD/TCD

B-SEAL valves use a KITZ SCT proprietary sealing method.
The use of the TD/TCD Series enables support for integrated gas supply systems.

B-SEAL-type■Valve Features◎ KITZ-SCT’s unique B-SEAL structure: Speedy and sure installation is made possible due to its center-lock mechanism. Reduction of assembly process and timerequired for the maintenance by user is expected to contribute to an overall cost reduction.
◎ Using KITZ-SCT’s unique snap mechanism incorporated in manual valves extensively facilitates the operation even in a limited working space. In addition, the valve
can be operated by one-touch, which helps avoid insufficient or excessive torque when turning the handle to either end, and thus increases an operational reliability.
Considering safety, a miss-operation protective mechanism (fixing screw) is newly adopted.
◎ The valve is equipped with a mechanism to avoid miss-insertion and miss-installation by means of notch located on the base.
◎ The seal type use 1/8”CVC fitting that has been proven in a conventional gas system.

■Major Specifications
Type (Size)
Cv Value
Maximum Operating
Pressure
PCTFE
Fluid
Temperature
PFA
Actuation Pressure
Across the Seat He
Leak Rates
Leak Rates
Inboard He Leak
Rates
Manual Valve
Cycle Life
Pneumatic Valve■Product Grade
TCD
0.15

TD
0.25

142psig (0.98MPa(G))–10~80°C(14~176F)–10~120 °C(14~248F)
65~87psig (0.45~0.6MPa (G))

1×10-9 atm·cc/s (1×10-10 Pa·m3/s)

Cleaning

Degreasing + Precision cleaning

Packing

W-Packing with clean pack. N2-charge

50,0001,000,000■Pneumatic Valves (N.C.)Type

Cv Value

0.15

TCD4CS-GC-386EP

0.15

0.25

TD4CS-GC-509EP

0.25

Type

Cv Value

TCD4OS-GC-□
-EP

0.15

TD4OS-GC-□-EP

0.25

Type

Cv Value

TCD4MS-GC-546EP
TD4MS-GC-548EP

Model■Pneumatic Valves (N.O.)■Check Valves
Model

EP
316L
≤ Ra 0.13 μm / 5 μin
Electropolishing finish

1×10-9 atm·cc/s (1×10-10 Pa·m3/s)■Manual Valves
Model

Grade
Material
Surface Roughness
PolishingType

Cracking
Pressure

Packing

Model

IC4-1/3-GF-75-EP 1/3psig
FKM

IC4-1-GF-82-EP

1psig

IC4-10-GF-84-EP

10psig■Composite Valves
Model■Flow Control Valves
Type

Operation

TCD4CI-1/3GCF-□-EP

NO

Model

Type

TCD4FS-GM-04
TCD4OI-1/3GCF-□-EP

32

NC

TD

The TD Series includes compactly designed valves for integrated gas supply systems,

Ultra High Purity Valvessupporting a 1.125" C-seal.

C-SEAL-type■Major Specifications

The standard model is TD Series.

TD
0.3■Product Grade
Grade

STD

Body Material

142psig(0.98MPa(G))–10~80°C(14~176F)
58~101psig (0.4~0.7MPa(G))
1×10-9 atm·cc/s (1×10-10 Pa·m3/s)

Surface Roughness
PolishCleaning
PackagingEP
SUS316L≤Ra0.5μm/20μin

SEP

SUS316LE(Double melt material)≤ Ra 0.13 μm / 5 μin

Mechanical Polish

Electro Polish
Degreasing+
Precision Cleaning
Single Bagged Package
Double Bagged Package

1×10-9 atm·cc/s (1×10-10 Pa·m3/s)
10,0001,000,000

PFA Valves

Type (Size)
Cv Value
Maximum Operating
Pressure
Fluid
PCTFE
Temperature
Actuation Pressure
Across the Seat He
Leak Rates
Leak Rates
Inboard He Leak
Rates
Manual Valve
Cycle Life
Pneumatic Valve

Note: For PFA and PI seats, contact your sales representative.

■Pneumatic Valves 3 Port (N.C.)■Manual ValvesModel

Cv Value

TD4OS-GC-□

0.3

Model

Type

Cv Value

TD4CB-GC-1003

0.3

PFA Weld Fittings

Type■Pneumatic Valves 2 Port (N.C.)
Model■Pneumatic Valves 3 Port (N.O.)

Type

Cv Value

TD4CS-GC-985

0.3

Model

Type

Cv Value

TD4CB-GC-□

0.3

Antistatic Unit

■Pneumatic Valves 2 Port (N.O.)
Model

Vacuum Components◎ These valves are diaphragm valves of Surface Mount type, and are compatible with 1.125” C-SEAL. Both manual and pneumatic valves in this series incorporate acompact actuator, which allows the valve to suit to fine line pitches.
◎ The manual valves are 90° open/close types, and capable to equip a lock key for preventing miss-operations.
◎ TD Series has achieved 0.3 for Cv value that is still higher than that of our KD Series.
◎ The surface that comes in contact with gases are made rich in chrome, and achieved Cr/Fe >2.0.(SEP specification)◎ Achieving Hv300 on the sealing surface, repeated detachability is further improved.

Ultra High Purity Fittings■ Valve FeaturesType

Cv Value

TD4OS-GC-□

0.3

33

IB

A higher Cv value IB series has is more advantageous than diaphragm valves in
use where large flows are required, such as facility supply lines.

Bellows Valves■Features◎ The proprietary seat shape serves to reduce particle generation from the disk and improves durability.
◎ Smaller dead space enables shorter purge time.
◎ The IB series can be used not only in gas supply systems but also in exhaust systems. Unique specifications such as high temperature, high corrosion
resistance, and variable flow rate can also be accommodated.

■Specifications
Size
Cv

IB4 (1/4")

Wetted Area Volume

IB6 (3/8")·IB8 (1/2")

0.3

0.85

0.185in3 (3.03cm3)0.359in3 (5.88cm3)
CVC male, OPEN state

Maximum Operating Pressure
Manual Valve(PCTFE, PFA, Fluorine rubber)
PCTFE
Fluid Temperature
Pneumatic
PFA
Valve
FluorinerubberAtomospheric Temperature
Actuation Pressure
Across the Seat He Leak
Rates
Leak Rates
Inboard He Leak
Rates

142psig (0.98MPa(G))-10~100ºC-10~100ºC-10~150ºC*-10~180ºC*-10~60ºC
58~101psig (0.4~0.7MPa(G))≤ 1×10-9 sccs (≤ 1×10-10 Pa·m3/s)≤ 1×10-9 sccs (≤ 1×10-10 Pa·m3/s)

Cycle Life

Pneumatic valve 1 million cycles , manual valve 100,000 cycles* Bonnet Gasket Material is"SUS316L"only■Product Grade
SurfaceRoughness

Grade
Material
Only Body’s Internal
Roughness

STD

EP
SUS316L≤ Ra 0.5 μm / 20 μin≤ Ra 0.13 μm / 5 μin
Degreasing+
Precision cleaning

Cleaning
Packaging

Single bagged package

Double bagged package■Standard Materials
Body
Bellows
Bellows Flange
Bonnet

SUS316L
SUS316L
SUS316L
SUS304■Precautions① Depending on the customer’s usage conditions, the IB series may have a lower bellows life cycle due to accumulation of buildup material or corrosion.
② The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
③ For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

34

Straight Type
Product Code Table
Size

IB-type bellows
Seal valve

Operation

Valve shape

Connection

BonnetDisk material
Gasket material

ManualStraight

V: CVC male
VF: CVC female
S: Compression
W: Butt weld

C:PCTFE
M:SUS316L(Fluorine resin
coating)

Grade + Body material

Handle shape

C:PCTFE
Not displayed: Standard
F: Fluorine rubber JH: Open/Close display
A:PFA

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L

Please ask the sales representative about handle colors.

■Dimensions

Unit: inch (mm)

φA

45°

M

M2
H

L

L1

H

H1

H2

A

B

C

M

M1

M2

IB4MS-V□□

1/4" CVC Male

2.25
(57.1)-

2.72(69.0)

0.43(11.0)

1.06(27.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB8MS-V□□

1/2" CVC Male

2.56
(65.1)-

3.19(81.0)

0.63(16.0)

1.34(34.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB4MS-VF□□ 1/4" CVC Female

2.78(70.6)-

2.72(69.0)

0.43(11.0)

1.06(27.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB8MS-VF□□ 1/2" CVC Female

3.27(83.0)-

3.19(81.0)

0.63(16.0)

1.34(34.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB4MS-S□□

1/4" Compression Fittings

1.89(48.0)

0.31
(7.9)

2.85
(72.3)

0.56(14.3)

1.06(27.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB6MS-S□□

3/8" Compression Fittings

2.52(64.0)

0.37
(9.5)

3.06
(77.7)

0.50(12.7)

1.34(34.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB8MS-S□□

1/2" Compression Fittings

2.52(64.0)

0.50(12.7)

3.06(77.7)

0.50(12.7)

1.34(34.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

1/4" Butt Weld

5.91
(150.0)-2.72(69.0)

0.43(11.0)

1.06(27.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB6MS-W□□

3/8" Butt Weld

5.91
(150.0)-3.19(81.0)

0.63(16.0)

1.34(34.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB8MS-W□□

1/2" Butt Weld

5.91
(150.0)-3.19(81.0)

0.63(16.0)

1.34(34.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

C

M1
H2
H1
B
L

φA

M2

M

45°

C

M1

H
H2
H1
B
L

φA

M2

M

45°

C

M1

H
H2
H1

PFA Valves

Connection

Vacuum Components

Type

Ultra High Purity Fittings

Model

L1

Ultra High Purity Valves

Model

L1

B
L

φA

M

45°

M2

M1
H2

C

H1
B
L

35

Antistatic UnitH

PFA Weld Fittings

IB4MS-W□□

Product Code Table
Model

IB-type bellows
Seal valve

Size

Operation

Valve shape

Connection

Q: 90° ~Handle rotation
Manual Valves

Straight

V: CVC male
VF: CVC female
S: Conpression
W: Butt weld

BonnetGasket material Disk material

C:PCTFE
M:SUS316L(PFA coating)

Grade + Body material

C:PCTFE
F: Fluorine rubber
A:PFA

STD-316L : Mechanical polished + SUS316L
EP-316L : Electro polished + SUS316L

Please ask the sales representative about handle colors.

■Dimensions

Unit: inch (mm)

Model

A

45°

Connection

L

L1

H

H1

H2

A

B

C

M

M1

M2

IB4QS-V□□

1/4" CVC Male

2.25
(57.1)-

3.35(85.0)

0.43(11.0)

1.06(27.0)

1.93(49.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31 (8.0)

M19×1.0

IB8QS-V□□

1/2" CVC Male

2.56
(65.1)-

3.87(98.2)

0.63(16.0)

1.34(34.0)

1.93(49.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31 (8.0)

M19×1.0

IB4QS-VF□□ 1/4" CVC Female

2.78(70.6)-

3.35(85.0)

0.43(11.0)

1.06(27.0)

1.93(49.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31 (8.0)

M19×1.0

IB8QS-VF□□ 1/2" CVC Female

3.27(83.0)-

3.87(98.2)

0.63(16.0)

1.34(34.0)

1.93(49.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31 (8.0)

M19×1.0

IB4QS-S□□

1/4" Compression
Fittings

1.89(48.0)

0.31
(7.9)

3.46
(88.0)

0.56(14.3)

1.06(27.0)

1.93(49.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31 (8.0)

M19×1.0

IB6QS-S□□

3/8" Compression
Fittings

2.52(64.0)

0.37
(9.5)

3.74
(95.0)

0.50(12.7)

1.34(34.0)

1.93(49.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31 (8.0)

M19×1.0

IB8QS-S□□

1/2" Compression
Fittings

2.52(64.0)

0.50(12.7)

3.74(95.0)

0.50(12.7)

1.34(34.0)

1.93(49.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31 (8.0)

M19×1.0

C

M
M2

H

Type

M1

H2
H1
B
L

A

45°

M

C

M2

H

M1

H2
H1
B
L

A

M

45°

M2

H

C

M1

H2
H1
L1

36

B
L

L1

Product Code Table
Size

IB-type bellows
Seal valve

Operation

Valve shape

Connection

C: Normally closed
O: Normally open

Straight

V: CVC male
VF: CVC female
S: Compression
W: Butt weld

BonnetGasket material Disk material

C:PCTFE
M:SUS316L(PFA coating)

C:PCTFE
F: Fluorine rubber
A:PFA

Grade + Body material

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L* In the pneumatic valves that have a maximum usage temperature of 180°C, the disk material is fluorine rubber and the bonnet gasket material is SUS316L (PFA coated).
The actuator dimension φA in that case will be φ39 for ¼" to ½" . We also offer a hot seal for a special-purpose heater.

■Dimensions

Unit: inch (mm)

P

L

L1

H

H1

A

B

C

P

M

M1

IB4□S-V□□

1/4" CVC Male

2.25
(57.1)-

2.72(69.0)

0.43(11.0)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

2.56(65.1)-

3.27(83.0)

0.63(16.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

2.56(65.1)-

3.27(83.0)

0.63(16.0)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

2.78(70.6)-

2.72(69.0)

0.43(11.0)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

3.27(83.0)-

3.27(83.0)

0.63(16.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

3.27(83.0)-

3.27(83.0)

0.63(16.0)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

1.89(48.0)

0.31
(7.9)

2.85
(72.3)

0.56(14.3)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

2.52(64.0)

0.37
(9.5)

3.14
(79.7)

0.50(12.7)

1.89(48.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

IB6□S-S□F

2.52(64.0)

0.37
(9.5)

3.14
(79.7)

0.50(12.7)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

IB8□S-S□□

2.52(64.0)

0.50(12.7)

3.14(79.7)

0.50(12.7)

1.89(48.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00
2-M5
(25.4) Depth 82.52(64.0)

0.50(12.7)

3.14(79.7)

0.50(12.7)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00
2-M5
(25.4) Depth 85.91(150.0)-2.72(69.0)

0.43(11.0)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

5.91(150.0)-3.27(83.0)

0.63(16.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

IB6□S-W□F

5.91(150.0)-3.27(83.0)

0.63(16.0)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

IB8□S-W□□

5.91(150.0)-3.27(83.0)

0.63(16.0)

1.89(48.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

5.91(150.0)-3.27(83.0)

0.63(16.0)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth
0.31 (8.0)

M

45°

C

IB8□S-V□□

M1

H

1/2" CVC Male
H1
B
L

IB8□S-V□F

PC

IB8□S-VF□□

M1

H

1/4" CVC Female

45°

M

φA

IB4□S-VF□□

1/2" CVC Female
H1
B
L

IB8□S-VF□F

IB4□S-S□□P

IB6□S-S□□

45°

M

φA

3/8" Compression
Fittings

C

M1

H

1/4" Compression
Fittings

PFA Valves

Connection

Vacuum Components

Type

Ultra High Purity Fittings

Model

φA

Ultra High Purity Valves

Model

H1
L1

L1

B
L

IB8□S-S□F

IB4□S-W□□

P

M1

H

IB6□S-W□□

45°

M

φA

1/4" Butt Weld

3/8" Butt WeldC

1/2" Butt Weld

IB8□S-W□F

37

Antistatic Unit

H1
B
L

PFA Weld Fittings

1/2" Compression
Fittings

“Variac” Variable Flow Valve■Comparison with conventional methods
Variac valve Cv value
0

Variable flow
Variac valve

9 8

Cv values

2 1

Conventional method

Number of handle turns■Features◎ The flow can be controlled by rotating the black handle on top of the actuator. One valve can act as two valves -- a pneumatic valve and a needle valve. This
enables a simpler piping layout, space conservation, and cost reduction.
◎ High temperature Variac valves (maximum operating temperature 180°C) are also available upon request. A dedicated hot shell heater is also available as a separate part.

■Specifications■Product Grade

Size
Disk Material

IB4V (1/4")

IB6V (3/8")·IB8V (1/2")

Grade
Material
Surface
Only Body's
Roughness Internal Surface

PCTFE, O-ring (fluorine rubber)
Adjustment range:
Adjustment range:
Cv
0.03~0.28
0.05~0.74
0.185in3 (3.03cm3)0.359in3 (5.88cm3)
Wetted Area Volume
CVC male, OPEN state
142psig (0.98MPa(G))
Maximum Operating Pressure-10~100ºC
PCTFE
Fluid
-10~150ºC*
PFA
Temperature-10~180ºC*
Fluorine rubber-10ºC~60ºC
Atmospheric Temperature
58~101psig (0.4~0.7MPa (G))
Actuation Pressure

Across the Seat
He Leak Rates
Leak Rates
Inboard He
Leak Rates
Cycle Life

≤ 1×10 sccs (≤ 1×10

-10EP
SUS316L≤ Ra 0.5 μm / 20 μin ≤ Ra 0.13 μm / 5 μin
Degreasing+
Precision cleaning
Single bagged package Double bagged package

Cleaning
Packaging■Precautions≤ 1×10-9 sccs (≤ 1×10-10 Pa·m3/s)-9

STD① The set amount of flow may vary depending on the usage conditions.
② The valves are not guaranteed to function if their exterior is submerged
inside a vacuum.
③ For high temperature applications, please select appropriate material
for air-fittings and tubes to assure proper performance.

Pa·m /s)
3

1 million cycles* Only when bonnet gasket material is M: SUS316S (PFA coating)

Product Code Table
Model

Size

IB-type bellows
Seal valve

Type

Operation

Valve shape

Variac

C: Normally closed
O: Normally open

Straight

BonnetConnection Gasket
material Disk material

V: CVC male
VF: CVC female
S: Compression

C:PCTFE
C:PCTFE
M:SUS316L
F: Fluorine rubber(PTFE coating) A: PFA
T: PTFE

Grade + Body material

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L* In the products that have a maximum usage temperature of 180°C, the disk material is fluorine rubber, and the bonnet gasket material is SUS316L (PTFE coated).
The actuator dimension φA in that case will be φ44 from 1/4" to1/2". We also offer a hot seal for a special-purpose heater.
* All of the parts that come in contact with gas are made of SUS316L.

■Dimensions

Unit: inch (mm)

Model
P

45°

M

φA

Connection

L

L1

H

H1

A

B

C

P

M

M1

IB4V□S-V□□

1/4" CVC Male

2.25
(57.1)-

3.07(78.0)

0.43(11.0)

1.73(44.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

2.56(65.1)-

3.58(91.0)

0.63(16.0)

2.13(54.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

2.56(65.1)-

3.58(91.0)

0.63(16.0)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

2.78(70.6)-

3.07(78.0)

0.43(11.0)

1.73(44.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

3.27(83.0)-

3.58(91.0)

0.63(16.0)

2.13(54.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

3.27(83.0)-

3.58(91.0)

0.63(16.0)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

1.89(48.0)

0.31
(7.9)

3.20
(81.3)

0.56(14.3)

1.73(44.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

2.52(64.0)

0.37
(9.5)

3.45
(87.7)

0.50(12.7)

2.13(54.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

2.52(64.0)

0.37
(9.5)

3.45
(87.7)

0.50(12.7)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

2.52(64.0)

0.50(12.7)

3.45(87.7)

0.50(12.7)

2.13(54.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

2.52(64.0)

0.50(12.7)

3.45(87.7)

0.50(12.7)

1.54(39.0)

1.02(26.0)

0.98(25.0)

Rc1/8

1.00(25.4)

2-M5
Depth 0.31 (8.0)

C

M1

H

Type

IB8V□S-V□□
1/2" CVC Male

H1

IB8V□S-V□F

B
L
P

45°

IB4V□S-VF□□

M1

H

1/4" CVC Female

C

M

φA

IB8V□S-VF□□
1/2" CVC Female

H1

IB8V□S-VF□F

B
L

P

M1

H

C

IB6V□S-S□□
IB6V□S-S□F
IB8V□S-S□□

H1
L1

38

IB4V□S-S□□

45°

M

φA

B
L

L1

IB8V□S-S□F

1/4" Compression Fittings
3/8" Compression Fittings

1/2" Compression Fittings

Flow-control Needle Valve■Features*1 Backrush: Flowback or the space formed at the rear of the engagement of gears or screws.

■Specifications■Product Grade

Size
Orifice diameter

IB4BN (1/4")

Grade
Material
Surface
Only Body’s
Roughness Internal Surface

φ0.055in (1.4mm)
φ0.157in (4.0mm)
Adjustment range:
Adjustment range:
0.001~0.0136
0.06~0.28
0.185in3 (3.03cm3)

Cv
Wetted Area Volume

Cleaning

CVC male, OPEN state
142psig(0.98MPa (G))

Packaging-10~150ºC

EP

SUS316L≤ Ra 0.5 μm / 20 μin≤ Ra 0.13 μm / 5 μin
No bead cut in welded area
Degreasing+
Precision cleaning
Single bagged package Double bagged package-10ºC~60ºC≤ 3×10 sccs (≤ 1×10-10 Pa·m3/s)-9■Precautions① Because the needle valves employ a precision handle, please do not apply excessive torque beyond the zero point.
② The valves are not guaranteed to function if their exterior is submerged inside a vacuum.

Cv Values

Cv Values

Vacuum Components

Orifice Diameter φ4.0

Orifice Diameter φ1.4

Number of Handle Turns

Number of Handle Turns

PFA Valves

Product Code Table
Model

Size

IB-type bellows
Seal valve

Valve shape

Backrushless

NeedleM
M2

Valve shape

Straight

Connection
method

V: CVC male
VF: CVC female

Seat material

Grade + Body material

M:SUS316L(Fluorine resin
coating)

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L

Connection

L

H

H1

H2

A

B

C

M

M1

M2

IB4BN1.4S-VM

1/4" CVC Male

2.25
(57.1)

4.72(120.0)0.43(11.0)

1.06(27.0)

1.10(28.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

C

M19×1.0

IB4BN4.0S-VM

1/4" CVC Male

2.25
(57.1)

4.72(120.0)0.43(11.0)

1.06(27.0)

1.10(28.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB4BN1.4S-VFM

1/4" CVC Female

2.80(71.0)

4.72(120.0)0.43(11.0)

1.06(27.0)

1.10(28.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

IB4BN4.0S-VFM

1/4" CVC Female

2.80(71.0)

4.72(120.0)0.43(11.0)

1.06(27.0)

1.10(28.0)

1.02(26.0)

0.98(25.0)

1.00(25.4)

2-M5
Depth
0.31
(8.0)

M19×1.0

M1

H2
H1
B
L
φA

M

45°

H

M2

H2
H1
B
L

C

M1

39

Antistatic Unit

Type
45°

H

Orificediameter

Unit: inch (mm)

Model

φA

Type

PFA Weld Fittings■Dimensions

Ultra High Purity Fittings

Maximum Operating Pressure
Fluide Temperature
Atmospheric Temperature
Across the He leak rates
Leak
Inboard He Leak
Rates
Rates

STD

Ultra High Purity Valves◎ Because of the ultra-precision processing of the needle part and a structure with no backrush, *1 desired flow rate can be set precisely.
◎ A metal gasket is standard and provides excellent heat resistance.

SBB

The SBB series of pipe size bellows valves have a compact design and are intended
for use in high Cv and high durability supply lines.

Bellows Valves
Straight-type■Features◎ We offer not only all purpose butt weld connection but also flange connections and union connecitons.
◎ Achieving reduced weight with forged valve body.
◎ Adopted a seat structure to reduce gas pooling and particle shedding.
◎ By setting the air supply inlet on the top of the actuator, there is no concern over piping direction.
◎ Purge port options available for the Inlet, Outlet, or Both.

■Specifications
Size
Cv
Wetted Area Volume

SBB10 (10A)

SBB15 (15A)

SBB20 (20A)

SBB25 (25A)

2.1
2.319in3 (38cm3)

3.3
4.5
3.234in3 (53cm3)
5.248in3 (86cm3)
Butt weld, OPEN state
142psig (0.98MPa(G))

8.0
3.726in3 (143cm3)

Maximum Operating Pressure
Manual Valve
Fluide Temperature
Pneumatic Valve
Atmospheric Temperature
Across the Seat He Leak Rates
Leak Rates
Inboard He Leak Rates
Actuation Pressure
Manual Valve
Cycle Life
Pneumatic Valve (NC)
Pneumatic Valve (NO)-10~100ºC--10~80ºC-10ºC~60ºC≤ 1×10-9sccs (≤ 1×10-10 Pa·m3/s)≤ 1×10-9sccs (≤ 1×10-10 Pa·m3/s)-

N・C：72~101psig (0.5~0.7MPa(G))/N・O：72~87psig (0.5~0.6MPa(G))
100,000 cycles*1

50,000 cycles*1-

10,000 cycles*2-

10,000 cycles*2*1 Bellows individual unit durability via N2 enclosure*2 Product durability via N2 enclosure■Product Grade
Grade
Material

STD

Only Body’s
Internal Surface

Surface Roughness■PrecautionsEP
SUS316L≤ Ra 0.5 μm / 20 μin

Cleaning
Packaging≤ Ra 0.13 μm / 5 μin

Degreasing + Precision cleaning
Single bagged package

Double bagged package① SBB series may experience shortened bellows life
cycle under certain corrosive environment. Also,
SBB series is not compatible with liquid use.
② The valves are not guaranteed to function if
their exterior is submerged inside a vacuum.

Product Code Table
Model

Size

SBB-type bellows
seal valve

Operation

Valve shape

M: Manual

Straight

BonnetConnection Gasket
material Disk material

PCTFE

W.: Butt weld
U: Union*1
RF: RF flange

PTFE

Purge port

Grade + Body material

Not shown:No purge port
IP: 1stOP: 2nd
PP: Both

STD-316L : Mechanical Polished + SUS316L
EP-316L : Electro Polished + SUS316L*1 The union type consists of interlock and butt weld types.
Please ask to the sales representative about handle color.
* Inch size butt weld also available.

■Dimensions

Unit: inch (mm)

Model

Type

φA
B

M1
H

φd
H1

L2
L1

L

L1

φA

Connection

L

L1

L2

H

H1

A

D

t

C

G

d

F

f

n-φh

10A union
3.54 1.18 0.39 4.78 0.79 2.76
SBB10MS(insertion-type) (90.0) (30.0) (10.0) (121.5) (20.0) (70.0)
UCT

-

-

-

-

0.70
(17.8)---

15A union
3.94 1.38 0.59 4.94 0.94 2.76
SBB15MS(insertion-type) (100.0) (35.0) (15.0) (125.5) (24.0) (70.0)
UCT

-

-

-

-

0.87
(22.2)---

20A union
4.33 1.38 0.59 5.79 1.10 2.76
SBB20MS(insertion-type) (110.0) (35.0) (15.0) (147.0) (28.0) (70.0)
UCT

-

-

-

-

1.09
(27.7)---

25A union
4.72 1.38 0.59 6.79 1.30 3.35
SBB25MS(insertion-type) (120.0) (35.0) (15.0) (172.5) (33.0) (85.0)
UCT

-

-

-

-

1.36
(34.5)---

SBB10MSUCT-24

10A union(Butt Weld)

3.54(90.0)

1.97(50.0)-

4.78 0.79(121.5) (20.0)

2.76(70.0)

0.68(17.3)

-

-

-

-

-

-

-

SBB15MSUCT-128

15A union(Butt Weld)

3.94 2.05(100.0) (52.0)-

4.94 0.94(125.5) (24.0)

2.76(70.0)

0.85(21.7)

0.06(1.65)

-

-

-

-

-

-

SBB20MSUCT-90

20A union(Butt Weld)

4.33 2.09(110.0) (53.0)-

5.79 1.10(147.0) (28.0)

2.76(70.0)

1.07(27.2)

0.06(1.65)

-

-

-

-

-

-

SBB25MSUCT-99

25A union(Butt Weld)

4.72 2.09(120.0) (53.0)-

6.79 1.30(172.5) (33.0)

3.35(85.0)

1.34(34.0)

0.06(1.65)

-

-

-

-

-

-

B

M1
H
t
φD

H1
L1

40

L

L1

B

M1

2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.38
Depth
(35.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)
2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.38
Depth
(35.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)

■Dimensions

Unit: inch (mm)

L

L1

L2

SBB10MSRFCT

10ARF
Flange3.94(100.0)-

SBB15MSRFCT-133

15ARF
Flange4.25(108.0)

SBB20MSRFCT-94

20ARF
Flange

SBB25MSRFCT-96

Model
φA
B
f

M1
n－φh

H

φC
φd φG φD
H1

F

L

B

M1
H
t
φD
H1
L1
L

H1

A

D

t

C

G

d

F

f

n-φh

-

4.78 0.79(121.5) (20.0)

2.76(70.0)

3.54(90.0)-

2.56(65.0)

1.81(46.0)

0.47(12.0)

0.47(12.0)

0.04
(1.0)

4-15

-

-

4.94 0.94(125.5) (24.0)

2.76(70.0)

3.74(95.0)-

2.76(70.0)

2.01(51.0)

0.72(18.4)

0.47
(12.0

0.04
(1.0)

4-15

4.61
(117.0)--5.79 1.10(147.0) (28.0)

2.76 3.94(70.0) (100.0)-

2.95(75.0)

2.20(56.0)

0.94(23.9)

0.55(14.0)

0.04
(1.0)

4-15

25ARF
Flange5.00(127.0)--6.79 1.30(172.5) (33.0)

3.35 4.92(85.0) (125.0)-

3.54(90.0)

2.64(67.0)

1.21(30.7)

0.55(14.0)

0.04
(1.0)

4-19

SBB10MSWCT

10A
Butt weld

7.48 1.97(190.0) (50.0)-

4.78 0.79(121.5) (20.0)

2.76(70.0)

0.68(17.3)

0.05
(1.2)

-

-

-

-

-

-

SBB15MSWCT

15A
Butt weld

7.87 1.97(200.0) (50.0)-

4.94 0.94(125.5) (24.0)

2.76(70.0)

0.85(21.7)

0.06(1.65)

-

-

-

-

-

-

SBB20MSWCT

20A
Butt weld

8.27 1.97(210.0) (50.0)-

5.79 1.10(147.0) (28.0)

2.76(70.0)

1.07(27.2)

0.06(1.65)

-

-

-

-

-

-

SBB25MSWCT

25A
Butt weld

8.66 1.97(220.0) (50.0)-

6.79 1.30(172.5) (33.0)

3.35(85.0)

1.34(34.0)

0.06(1.65)

-

-

-

-

-

-

B

M1

2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.38
Depth
(35.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)
2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.38
Depth
(35.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)

Product Code Table
Model

Size

Operation

C: Normally closed
O: Normally open*1

Straight

BonnetConnection Gasket
material Disk material

W.: Butt Weld
U: Union*2
RF: RF Flange

PCTFE

PTFE

*1 Normallly open：25A are available.
*2 The union type consists of interlock and butt weld types.

■Dimensions
Type
P

B

H

φd
H1

L2
L

L1

φA

P

B

M1

H

φD

H1
L

φA

L1

P

B

M1

H

n－φh
φC
φd φG φD
H1

L

f

F

P

B

M1

H

t
φD

L

Connection

L

L1

L2

H

H1

A

D

t

C

G

d

F

f

n-φh

P

3.94 1.38 0.59 6.61 0.94 3.74
SBB15CS- 15A union(insertion-type) (100.0) (35.0) (15.0) (168.0) (24.0) (95.0)
UCT

-

-

-

-

0.87
(22.2)

-

-

-

Rc1/4

4.33 1.38 0.59 7.17 1.10 3.74
SBB20CS- 20A union(insertion-type) (110.0) (35.0) (15.0) (182.0) (28.0) (95.0)
UCT

-

-

-

-

1.09
(27.7)

-

-

-

Rc1/4

4.72 1.38 0.59 8.35 1.30 4.13
SBB25CS- 25A union(insertion-type) (120.0) (35.0) (15.0) (212.0) (33.0) (105.0)
UCT

-

-

-

-

1.36
(34.5)

-

-

-

Rc1/4

4.72 1.38 0.59 7.17 1.30 4.13
SBB25OS- 25A union(insertion-type) (120.0) (35.0) (15.0) (182.0) (33.0) (105.0)
UCT

-

-

-

-

1.36
(34.5)

-

-

-

Rc1/4

SBB15CSUCT-18

15A union(Butt Weld)

3.94 2.05(100.0) (52.0)-

6.61 0.94 3.74 0.85 0.06
(168.0) (24.0) (95.0) (21.7) (1.65)

-

-

-

-

-

-

Rc1/4

SBB20CSUCT-21

20A union(Butt Weld)

4.33 2.09(110.0) (53.0)-

7.17 1.10 3.74 1.07 0.06
(182.0) (28.0) (95.0) (27.2) (1.65)

-

-

-

-

-

-

Rc1/4

SBB25CSUCT-14

25A union(Butt Weld)

4.72 2.09(120.0) (53.0)-

8.35 1.30 4.13 1.34 0.06
(212.0) (33.0) (105.0) (34.0) (1.65)

-

-

-

-

-

-

Rc1/4

SBB25OSUCT-04

25A union(Butt Weld)

4.72 2.09(120.0) (53.0)-

7.17 1.30 4.13 1.34 0.06
(182.0) (33.0) (105.0) (34.0) (1.65)

-

-

-

-

-

-

Rc1/4

SBB15CSRFCT

15A
RF Flange

4.25(108.0)--6.61 0.94 3.74 3.74
(168.0) (24.0) (95.0) (95.0)-

2.76 2.01 0.72 0.47
(70.0) (51.0) (18.4) (12.0)

0.04
(1.0)

4-15 Rc1/4

SBB20CSRFCT

20A
RF Flange

4.61(117.0)--7.17 1.10 3.74 3.94
(182.0) (28.0) (95.0) (100.0)-

2.95 2.20 0.94 0.55
(75.0) (56.0) (23.9) (14.0)

0.04
(1.0)

4-15 Rc1/4

SBB25CSRFCT

25A
RF Flange

5.00(127.0)--8.35 1.30 4.13 4.92
(212.0) (33.0) (105.0) (125.0)-

3.54 2.64 1.21 0.55
(90.0) (67.0) (30.7) (14.0)

0.04
(1.0)

4-19 Rc1/4

SBB25OSRFCT

25A
RF Flange

5.00(127.0)--7.17 1.30 4.13 4.92
(182.0) (33.0) (105.0) (125.0)-

3.54 2.64 1.21 0.55
(90.0) (67.0) (30.7) (14.0)

0.04
(1.0)

4-19 Rc1/4

SBB15CSWCT

15A
Butt weld

7.87 1.97(200.0) (50.0)-

6.61 0.94 3.74 0.85 0.06
(168.0) (24.0) (95.0) (21.7) (1.65)

-

-

-

-

-

-

Rc1/4

SBB20CSWCT

20A
Butt weld

8.3 1.97(210.0) (50.0)-

7.17 1.10 3.74 1.07 0.06
(182.0) (28.0) (95.0) (27.2) (1.65)

-

-

-

-

-

-

Rc1/4

SBB25CSWCT

25A
Butt weld

8.66 1.97(220.0) (50.0)-

8.35 1.30 4.13 1.34 0.06
(212.0) (33.0) (105.0) (34.0) (1.65)

-

-

-

-

-

-

Rc1/4

SBB25OSWCT

25A
Butt weld

8.66 1.97(220.0) (50.0)-

7.17 1.30 4.13 1.34 0.06
(182.0) (33.0) (105.0) (34.0) (1.65)

-

-

-

-

-

-

Rc1/4

B

M1

2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.38
Depth
(35.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)
2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.38
Depth
(35.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)
2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.38
Depth
(35.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)
2-M6
1.18
Depth
(30.0) 0.39 (10.0)
2-M6
1.38
Depth
(35.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)
2-M6
1.57
Depth
(40.0) 0.39 (10.0)

Note: For the flange type alone, when adding a purge port to the fitting, the face-to-face dimension (L) may change.
For details, confirm with your sales representative.

41

Antistatic Unit

φA

STD-316L : Mechanical Polish + SUS316L
EP-316L : Electro Polish + SUS316L

PFA Weld Fittingst

L1

Not shown:No purge port
IP: 1stOP: 2nd
PP: Both

PFA Valves

M1

L1

Grade + Body material

Unit: inch (mm)

Model
φA

Purge port

Vacuum Components

IBC-type bellows
seal valve

Valve shape

Ultra High Purity FittingsφA

H

Ultra High Purity Valves

Type

Connection

IBC/IBD/IBE

The IBC/IBD/IBE series, like the SBB series, consist of larger pipe size bellows
valves that, while having a compact design, high Cv value, and high durability, are

Bellows Valvespremised on use in supply lines.

Large-size Straight Type

■Features◎ KITZ SCT’s Y shape structure yields higher Cv than conventional S shape structure.
◎ The inner surfaces of the IBC/IBD valves are uniformly polished whole-surface cylindrical grinding.
◎ Because of their screw-sleeve structure with built-in bearing, the IBE valves require less torque on the handle for easy operation.
◎ Adopted a seat structure to reduce gas pooling and particle shedding.
◎ With the IBC series, by setting the air supply inlet on the top of the actuator, there is no concern over piping direction.
◎ With the IBD series, realization of more compact design through positioning the actuator on the side.
◎ Purge port options available for the Inlet, Outlet, or Both.

■Specifications
Model
Model (size)
Cv

IBC

Wetted Area Volume

IBD

IBE

32A

40A

50A

65A

80A

100A

125A

150A

200A

250A

300A

21.0

30.0

51.0

89.0

127.0

205.0

329.0

473.0

1117.01739.02608.0368cm3440cm3980cm31710cm3

2910cm3

5890cm3

11310cm3

19290cm3

45700cm3

71100cm3

131260cm3

Butt Weld, OPEN State

Maximum Operating Pressure
ManualFluid Temperature
Pneumatic
Atmospheric Temperature
Across the Seat
He Leak Rates
Leak Rates
Inboard He Leak
Rates
Actuation Pressure
Cycle Life

142psig(0.98MPa (G))-10~100ºC-10ºC~80ºC-10ºC~60ºC≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)

72~101psig (0.5~0.7MPa (G))

10,000 cycles (N2 charged, In-house Test)■Product Grade
Specifications

IBC Series

Grade

STD

IBD SeriesEP(electro polished)

Material

STD

IBE SeriesEP(electro polished)

SCS16A (125A~150A)

SCS16A

Surface
Body Inner
Roughness
Only
Cleaning

SUS316L (200A~300A)

Rz 6.0 μm/236.22μin ≤ Ra0.13μm/5μin Rz 6.0 μm/236.22μin ≤ Ra0.13μm/5μin
Single Bagged
Package

Packaging

Double Bagged
PackageEP(electro polished)

STD

Rz 6.0 μm/236.22μin(125A~150A)

Degreasing + Precision Cleaning
Single Bagged
Double Bagged
Package
PackageRz 12.0 μm(200A~300A)

Single Bagged
Package≤ Ra0.13μm/5μin
Double Bagged
Package■Precautions① IBC/IBD/IBE Series cannot be used with reactive or corrosive gases, nor with any liquids.
② The valves are not guaranteed to function if their exterior is submerged inside a vacuum.

Product Code Table
Model

Size

IBC-type bellows
Seal valve

32: 32A
40: 40A

Operation
MethodValve Shape

ManualY-type Mold

Connection
Bonnet
MethodGasket material

W: Butt Weld
RF: RF Flange

Disk
Material

C: PCTFE

Purge Port

PTFE

Grade + Body Material

STD-316L : Mechanical polish + SUS316L
Not Displayed:
Without Purge Port EP-316L : Electro polish + SUS316L
IP: 1stOP: 2nd
PP: Both

Note: Please ask to the sales representative about handle color.
Note: Inch size butt weld also available.

■IBC 32A·40A Dimensions
Model

H

φ
A

Unit: inch (mm)Type

Connection

L

E

H

A

D

d

t

IBC32MY3-WCT

32A Butt Weld

10.63
(270.0)2.17(55.0)

7.87(200.0)4.72(120.0)1.68(42.7)

1.55(39.4)

0.06(1.65)

IBC40MY3-WCT

40A Butt Weld

10.63
(270.0)2.17(55.0)

7.87(200.0)4.72(120.0)1.91(48.6)

1.78(45.3)

0.06(1.65)

t
φd φD
E

42

L

E

Product Code Table
Model

Size

Operation

Valve Shape

M: ManualY-type Mold

W:Butt Weld
RF:RF Flange■Dimensions

C:PC TFE

PTFE

Purge PortSTD-316L : Mechanical Polish + SUS316L
Not Displayed:
Without Purge Port EP-316L : Electro Polish + SUS316L
IP:1st OP:2nd
PP:BothUnit: inch (mm)Modelabout handle color.
*1 Please ask to the sales representative

Type*Inch size butt weld also available.

φ
A
H

t

L

E

H

A

D

d

t

IBD50MY3-WCT

50A Butt Weld

IBD65MY3-WCT

65A Butt Weld

IBD80MY3-WCT

80A Butt Weld

IBD100MY3-WCT

100A Butt Weld

13.39
(340.0)14.96(380.0)16.54(420.0)20.47(520.0)2.36(60.0)
2.36(60.0)
2.36(60.0)
3.15(80.0)

10.47(266.0)11.69(297.0)14.80(376.0)16.18(411.0)5.51(140.0)6.30(160.0)7.87(200.0)8.86(225.0)2.38(60.5)
3.00(76.3)
3.51(89.1)
4.50(114.3)

2.25(57.2)
2.84(72.1)
3.34(84.9)
4.33(110.1)0.06(1.65)
0.08(2.10)
0.08(2.10)
0.08(2.10)

E

E

L

Product Code Table
Size

IBE-type bellows
Seal valve■Dimensions

Note: Please ask to the sales representative about handle color.

Operation
MethodValve Shape

M: ManualY-type Mold

Connection
BonnetGasket Material Disk Material
Method

W: Butt Weld
RF: RF Flange

Model
φ
A

*1 Please ask to the sales representative
about handle color.
H

C: PCTFE

PTFE

Purge Port

Not Displayed:
STD-316L : Mechanical Polish + SUS316L
Without Purge Port EP-316L : Electro Polish + SUS316L
IP: 1st OP: 2nd
PP: Both

L

E

H

A

D

d

t

IBE125MY3-WCT

125A Butt Weld

24.41
(620.0)3.94(100.0)23.39(594.0)11.81(300.0)5.50(139.8)5.28(134.2)

0.11
(2.8)

φd φD

IBE150MY3-WCT

150A Butt Weld

28.35
(720.0)4.33(110.0)26.89(683.0)13.78(350.0)6.50(165.2)

6.28(159.6)

0.11
(2.8)

Product Code Table
Model

Size

IBE-type bellows
Seal valve

Note: Please ask to the sales representative about handle color.

Operation

Valve Shape

BonnetConnection Gasket
Material Disk Material

M: ManualY-type SteelPipe Weld

W: Butt Weld
RF: RF Flange■IBE 200A·250A·300A Dimensions
Model

φ

A
*1 Please ask to the sales representative about
handle color.

C: PCTFE

PTFE

Purge Port

Grade + Body Material

Not Displayed:
Without Purge Port
IP: 1st OP: 2nd
PP: Both

STD-316L : Mechanical Polish + SUS316L
EP-316L : Electro Polish + SUS316L

Connection Joint

L

E

H

A

D

d

t

IBE200MY2-WCT

200A Butt Weld

35.43
(900.0)4.33(110.0)36.51(927.3)15.75(400.0)8.52(216.3)8.20(208.3)

0.16
(4.0)

IBE250MY2-WCT

250A Butt Weld

43.31
(1100.0)

5.31(135.0)42.09(1069.0)

17.72(450.0)10.53(267.4)10.21(259.4)

0.16
(4.0)

φd φD
E

E

L

IBE300MY2-WCT

300A Butt Weld

52.76
(1340.0)

6.93(176.0)49.65(1261.0)

19.69(500.0)12.54(318.5)12.19(309.5)

0.18
(4.5)

Product Code Table
Model

IBC-type bellows
Seal valve

Operation

32

C

32:32A
40:40A

C: Normally Closed

Valve Shape

Connection Gasket Material Disk Material

Y-type Mold

W:Butt Weld
RF:RF Flange

C:PCTFE

PTFE

Purge Port

Grade + Body Material

STD-316L : Mechanical Polish + SUS316L
Not Displayed:
EP-316L : Electro Polish + SUS316L
Without Purge Port
IP:Inlet OP:Outlet
PP:BothUnit: inch (mm)

Model
φA

H

P

Type

Connection

IBC32CY3-WCT

32A Butt Weld

IBC40CY3-WCT

40A Butt Weld

L

E

H

A

D

P

d

t

10.63 2.17 11.46 3.94
1.68
(270.0) (55.0) (291.0) (100.0) (42.7)

Rc1/4

1.55
(39.4)

0.06(1.65)

10.63 2.17 11.46 3.94
1.91
(270.0) (55.0) (291.0) (100.0) (48.6)

Rc1/4

1.78
(45.3)

0.06(1.65)

t
φd φD
E

E

L

PFA Weld Fittings■Dimensions

Size

PFA Valvest

Unit: inch (mm)

Type

H

Vacuum Components

Connection

E

L

Unit: inch (mm)

Type

t

E

Grade + Body Material

Ultra High Purity Fittings

Connection

φd φD

Model

Grade + Body Material

Ultra High Purity Valves

IBD-type bellows
Seal valve

Note: Please ask to the sales representative about handle color.

BonnetConnection
Disk Material
Gasket Material

Product Code Table
Model

Operation

50

C

50:50A

C: Normally Closed■Dimensions

Model

Valve Shape

Connection Gasket Material Disk Material

Y-type Mold

W:Butt Weld
RF:RF Flange

C:PCTFE

PTFE

Purge Port

Grade + Body Material

STD-316L : Mechanical Polish + SUS316L
Not Displayed:
Without Purge Port EP-316L : Electro Polish + SUS316L
IP:Inlet OP:Outlet
PP:BothConnection

IBD50CY3-WCT

50A Butt Weld

L

E

H

A

Unit: inch (mm)

D

P

d

t

Rc1/4

2.25
(57.2)

0.06(1.65)

A
φ

Type

H

P

13.39 2.36 16.65 4.96
2.38
(340.0) (60.0) (423.0) (126.0) (60.5)

φd φD
E

L

E

43

Antistatic Unit

IBC-type bellows
Seal valve

Size

BZD

The BZD series valves are semiconductor-grade butterfly valves that are basedon conventional industrial butterfly valves but were perfected by applying KITZ

Clean Butterfly Valves

SCT's original cleaning technology.

■Features◎ The valve body and the parts in the wetted area are a wafer-shaped industrial butterfly valve made of stainless steel. The parts in the wetted area are polishedand undergo oil-free processing in order to minimize particle accumulation and adhesion.
◎ Because the valves adopt a double eccentric structure in which the stem's center of rotation deviates slightly from the disk seal surface as well as the center ofthe disk (pipe), there is no contact between the disk and seat ring when the valve is fully open, which prevents deformation of the seat and excessive abrasion
to ensure a high level of sealing capability.
◎ Giving more width to the disk and seat ring seal surfaces improves the sealing capability, and the valves can be operated with a small opening/closing torquebecause excess swaging is not necessary.
◎ The seat material is durable PTFE. In addition, cracking, peeling, or excessive abrasion will not occur in the seat ring because it has a double eccentric structurewith fully uniform seal contact pressure, appropriate swaging force, etc., forming a structure that will withstand long-term use.
◎ Use of the gears in the actuation mechanism requires only small amount of force. It also takes up less footprint than conventional lever operated valves.
◎ A pneumatic actuator can be mounted by using a bracket and connector.				

■Specifications
Size

50A

65A

80A

100A

125A

150A

200A

250A

300A

350A

90° Open
60° Open
Cv Value
45° Open
30° Open
Maximum Operating Pressure
Fluid Temperature
Atmospheric Temperature
Fluid Used
Cycle Life

83

175

255

460

722

1180

2240

3660

5640

7060

9390

54

112

164

295

462

756

1140

2350

3610

4520

6010

33

69

101

182

285

465

883

1450

2230

2790

3700

17

36

52

94

147

240

455

743

1150

1440

1910

142psig (0.98MPa(G))-10~80ºC-10ºC~60ºC
Inert gas (Not compatible with active gas or corrosive gas.)
10,000 cycles■Product Grade■Standard Materials

Grade
Material

STD

Body

SCS13A, SCS14A, SCS16A≤ 150A / Rz 6.0 μm≥ 200A / ≤ Rz 12.0 μm

Surface Roughness
Cleaning

Degreasing+
Precision cleaning

Packaging

Double bagged packge

Model

Size

Clean
Butterfly valve■Dimensions■Precautions① The BZD Series cannot be used with reactive or corrosive gases,
nor with any liquids.
② The valves are not guaranteed to function if their exterior issubmerged inside a vacuum.
③ The flow direction for these valves is restricted. Mount inaccordance with the arrow on the product. Use with backpressure is not possible.

Operation

Valve
shape

Connection

M: Manual

Straight

RF: RF flange

Body
Gasket materialSeatmaterial

Customspecifications
Technical
numberGrade + Body
material

X: not provided(During RF)

PTFEBlank:
Standard
Product

STD-304 : 304-equivalent (SCS 13A)
STD-316 : 316-equivalent (SCS 14A)
STD-316L : 316-equivalent (SCS 16A)

Unit: inch (mm)

Model

Type

E

D

φA

H
φB
φG

Connection

BZD65MS-RFXT

JIS 10K-65ARF Flange

BZD80MS-RFXT

JIS 10K-80ARF Flange

BZD100MS-RFXT

JIS 10K-100ARF Flange

BZD125MS-RFXT

JIS 10K-125ARF Flange

BZD150MS-RFXT

JIS 10K-150ARF Flange

BZD200MS-RFXT

JIS 10K-200ARF Flange

F

44

SCS13A (SCS14A,SCS16A)*1*1 SCS13A: equivalent to SUS304, SCS14A: SUS316L equivalent
SCS16A: SUS316L equivalent

Product Code Table

φC

400A

D

H

E

F

8.54
(217.0)10.63(270.0)10.65(270.5)
11.57(294.0)12.32(313.0)16.22(412.0)12.48(317.0)14.21(361.0)15.20(386.0)17.50(444.5)18.84(478.5)24.76(629.0)6.22(158.0)7.95(202.0)7.99(203.0)8.66(220.0)8.66(220.0)12.20(310.0)1.81(46.0)
1.81(46.0)
2.05(52.0)
2.20(56.0)
2.20(56.0)
2.80(71.0)

A

C

B

G

5.51
4.53
2.56
5.51
(140.0) (115.0) (65.0) (140.0)
6.69
4.96
3.07
5.91
(170.0) (126.0) (78.0) (150.0)
6.69
5.75
3.86
6.89
(170.0) (146.0) (98.0) (175.0)
7.87
7.13
4.84
8.86
(200.0) (181.0) (123.0) (225.0)
7.87
8.31
5.83
9.45
(200.0) (211.0) (148.0) (240.0)
12.20 10.12 7.76 11.42(310.0) (257.0) (197.0) (290.0)

Ultra High Purity Fittings
FITTING
Reliable enough to handle high-purity gas
KITZ-SCT's series of fittings
In the IT era, semiconductor-related products are becoming more advanced at anaccelerated pace and the requirements placed on gas piping system materials
have become more diverse.
KITZ-SCT offers a wide range supply of UHP fittings to accommodate high-purity
gases and meets the needs of the application precisely. The products presented
here are the CVC (clean vacuum coupling) series of mechanically welded joints, theSCM (Super-Clean Micro Fittings), SCL (Super-Clean Long Fittings), and SCF(super-clean fitting) series of primarily weld fittings. All product groups are high-reliability,
high-quality products that are based on each type of semiconductor-use piping material andunderwent a rigorous production process. Can accommodate high-pressure certified
products. Please contact our sales representative for details.

CVC■CVC (Clean Vacuum Couplings)
Gland
Nut
GasketUnion
Double Union
Manifold■SCM/SCL (Automatic Welded Fittings)
SCM Super-clean Micro Fittings
SCL Super-clean Long Fittings■SCF (Automatic Welded Fittings)
Superclean Fittings■SQ (Super Quartz Lock Fittings)
Super Quartz Lock Fittings■IF (IF Flange)
IF Flange

SCM/SCL

SCF

48
49
50
51
52
54
56
58
59
66
67

CVC

KITZ SCT's CVC fittings are fittings with mechanical metal gasket sealing surface.
KITZ SCT’s unique electropolishing and cleaning, testing, and packaging are done

Clean Vacuum Coupling

in a clean room. This makes them suitable for use in UHP applications.

Mechanical Metal Gasket
Surface Seal Coupling●The CVC fittings have the following component parts and features.
Gasket (G)Long Gland (S)Short Gland (S)Female Nut (NF)

(1) Female Nut (NF)

(2) Gland (S)Male Nut (NM)(3) Gasket (G)(2) Gland (S)(4) Male Nut (NM)(1) Female nut (NF): The female threading is silverplated to prevent galling and seizing for reliable tightening.
In addition, the leak test ports (two locations) are positioned above the gasket line for easy verification of gasket installation and leak testing.
(2) Gland (S): Finished to a smooth inner surface by KITZ SCT's unique surface finish techniques including electropolishing.
(3) Gasket (G): A standard nickel gasket provides excellent seal with the sleeve from tightening.
(4) Male nut (NM): The use of rolled threading gives the male nuts strength and enables reliable connections.

■Product Code Table
Model

Size

Type of ProductSleeve Dimensions

Space

Grade + Material

CVC
Metal Gasket
Surface Seal Fittings

2
4
6
8
12

1/8"
1/4"
3/8"
1/2"
3/4"

Gland
Nut

GasketUnion

Double Union

Manifold

46

S
SB
□S
NF
NM
NSM
NFH
NMH
NBF
NBM
G
RG
BG
UM
UB
UBS
UF
UE
UT
UC
USFW
UEFW
UTFW
UCFW
USMW
UEMW
UTMW
UCMW
ME
MT

Gland
Blind GlandReducing Gland
Female Nut
Male NutMale Short Nut
Female Nut (High-flow)
Male Nut (High-flow)
Female Blind Nut
Male Blind Nut
GasketRetainer Gasket
Blind Gasket
Male Union
Bulkhead Union
Bulkhead Union (Tube End)
Female Union
Union Elbow
Union Tee
Union Cross
Double Female Union
Doubled Female Union Elbow
Double Female Union Tee
Double Female Union Cross
Double Male Union
Double Male Union Elbow
Double Male Union Tee
Double Male Union Cross
Manifold Elbow
Manifold Tee

1/8"
1/4"

3/8"
1/2"
3/4"

12
22
27
15
28
30.5
43
16
28
45
16
28
45
52

316
STD 316
STD 316L
EP 316
EP 316L
SEP 316LE

Gasket only*NI

Unpolished + SUS316
Mechanical Polished Finish + SUS316
Mechanical Polished Finish + SUS316L
Electro Polished Finish + SUS316L
Electro Polished Finish + SUS316L
Electro Polished Finish + SUS316L(Double Melt Material)

Electro Polished Finish + Pure nickel
Electro Polished Finish + SUS316LE(Double Melt Material)*Gasket of 316LE:1/4",1/2" are available
Note: There is a space between the grade and the material.
316LE

■Product Grade
STD

EPUltra High Purity Valves

Grade
Material
Surface Roughness
PolishSEP

SUS316, SUS316L, SUS316LE (Double melt material)≤ Ra 0.5 μm / 20 μin≤ Ra 0.13 μm / 5 μin

Mechanical PolishedElectro Polished
Degreasing+
Precision cleaning

Cleaning
Packaging *1

Single bagged package

Double bagged package*1 All gaskets are single bagged package.
Note: Max.temperature and pressure may be refered to the table and graph below.

Ultra High Purity Fittings■Production Range Table
SUS316Gland

Gasket

Union

EP

SEP

EP

○

○

○

×

×

×

×

×

×

×

×

×

×

○

○

○
×
○

○
×
Optional

Optional××

Optional
×
×

×
×
×

×
×
×

×

×

×

○

○

Optional

×

×

×

×

○

○

○

×

×

×

×

○

○

○

×

×

×

×

○

○

○

×

STD

EP

STD

×

×

×

○

×

×

×
○
×

*Gasket of 316LE:1/4”,1/2” are available
Note: Polish designator for the nuts, female unions, and gaskets are omitted from the model number
for simplification purpose.

PFA Weld Fittings

Manifold

UE
UT
UC
USFW
UEFW
UTFW
UCFW
USMW
UEMW
UTMW
UCMW
ME
MT

NI

PFA Valves

Double union

UBS

Gland
Blind GlandReducing Gland
Female Nut
Male NutMale Short Nut
Female Nut (High-flow)
Male Nut (High-flow)
Female Blind Nut
Male Blind Nut
GasketRetainer Gasket
Blind Gasket
Orifice Gasket
Male Union
Female Union
Bulkhead Union
Bulkhead Union(Tube End)
Union Elbow
Union Tee
Union Cross
Double Female Union
Doubled Female Union Elbow
Double Female Union Tee
Double Female Union Cross
Double Male Union
Double Male Union Elbow
Double Male Union Tee
Double Male Union Cross
Manifold Elbow
Manifold Tee

SUS316LE

Vacuum Components

Nut

S
SB
□S
NF
NM
NSM
NFH
NMH
NBF
NBM
G
RG
BG
BG-L□
UM
UF
UB

SUS316L

Unpolished

CVC Temperature and Pressure Resistance■Temperature and Pressure Resistance
42ºC

80ºC

150ºC

250ºC

350ºC

59
40
25
23
15

53
36
23
21
13

45
30
19
18
11

39
27
17
15
10

36
24
15
14
9

[note] 1.Max Pressure in the table are calculated by each wall thickness.
2.Temperature above 300ºC, durability for re-assembly tend to decrease.

Antistatic Unit

1/8"
1/4"
3/8"
1/2"
3/4"

Maximum Operating Pressure (MPa(G))

Pressure Resistance (MPa(G))

Size

Sleeve Size
Outer
Diameter Thickness
3.18
0.7
6.35
1
9.53
1
12.7
1.24
19.05
1.24

47

Unit: inch (mm)

CVC Gland, for use with Female Nut

Type

Size

OD

T

L

L1

CVC2-S12

1/8"

0.125
(3.18)

0.028(0.70)

0.480(12.20)

0.276(7.00)

CVC4-S15

1/4"

0.250
(6.35)

0.039(1.00)

0.598(15.20)0.250(6.35)

CVC6-S16

3/8"

0.375
(9.53)

0.039(1.00)

0.650(16.50)0.323(8.20)

CVC8-S16

1/2"

0.500
(12.70)0.049(1.24)

0.650(16.50)0.323(8.20)

Type

Size

OD

T

L

L1

CVC2-S27

1/8"

0.125
(3.18)

0.028(0.70)

1.079(27.40)0.750(19.05)

CVC4-S28

1/4"

0.250
(6.35)

0.039(1.00)

1.098(27.90)0.750(19.05)

CVC6-S28

3/8"

0.375
(9.53)

0.039(1.00)

1.122(28.50)0.750(19.05)

CVC8-S28

1/2"

0.500
(12.70)0.049(1.24)

1.122(28.50)0.750(19.05)

Type

Size

OD

T

L

L1

CVC2-S22

1/8"

0.125
(3.18)

0.028(0.70)

0.866(22.00)

0.276(7.00)

CVC4-S30.5

1/4"

0.250
(6.35)

0.040(1.00)

1.200(30.50)0.250(6.35)

CVC4-S43

1/4"

0.250
(6.35)

0.039(1.00)

1.701(43.20)0.750(19.05)

CVC6-S45

3/8"

0.375
(9.53)

0.039(1.00)

1.791(45.50)0.750(19.05)

CVC8-S45

1/2"

0.500
(12.70)0.049(1.24)

1.791(45.50)0.750(19.05)

CVC12-S52

3/4"

0.750
(19.05)0.049(1.24)

2.031(51.60)0.750(19.05)

Type

Size

OD

T

L

L1

CVC4-6S15

1/4"×3/8"

0.375(9.53)

0.039(1.00)

0.610(15.50)0.421(10.70)

CVC4-6S28

1/4"×3/8"

0.375(9.53)

0.039(1.00)

1.130(28.70)0.941(23.90)

CVC4-6S31

1/4"×3/8"

0.375(9.53)

0.039(1.00)

1.220(31.00)1.031(26.20)

CVC4-6S43

1/4"×3/8"

0.375(9.53)

0.039(1.00)

1.701(43.20)1.512(38.40)

Type

Size

OD

L

L1

CVC2-SB22

1/8"

0.125
(3.18)

0.866(22.00)

0.276(7.00)

CVC4-SB28

1/4"

0.250
(6.35)

1.098(27.90)0.750(19.05)

CVC4-SB43

1/4"

0.250
(6.35)

1.701(43.20)0.750(19.05)

CVC8-SB45

1/2"(3/8")

0.500(12.70)1.791(45.50)0.750(19.05)

φOD
T

L1
L

CVC Gland, for use with Female Nut

φOD
T

L1
L

CVC Gland, for use with Male Nut

/○ OD
T

L1
L

CVC Reducing Gland, High Flow Type

φOD

L1

T

L

CVC Blind Gland

φOD
L

48

L1

Unit: inch (mm)

CVC Reducing Gland, for use with Female Nut

Size

OD

T

L

L1

CVC4-2S15

1/4"×1/8"

0.125(3.18)

0.028(0.70)

0.598(15.20)0.250(6.35)

CVC4-2S28

1/4"×1/8"

0.125(3.18)

0.028(0.70)

1.098(27.90)0.628(15.95)

CVC4-2S30.5

1/4"×1/8"

0.125(3.18)

0.028(0.70)

1.200(30.50)0.250(6.35)

CVC8-4S16

1/2"×1/4"

0.250(6.35)

0.039(1.00)

0.650(16.50)0.250(6.35)

CVC8-4S28

1/2"×1/4"

0.250(6.35)

0.039(1.00)

1.122(28.50)0.750(19.05)

Type

Size

OD

T

L

L1

CVC4-2S43

1/4"×1/8"

0.125(3.18)

0.028(0.70)

1.701(43.20)0.750(19.05)

CVC8-4S45

1/2"×1/4"

0.250(6.35)

0.039(1.00)

1.791(45.50)0.750(19.05)

Type

Size

D

H

F 2 surface width

CVC2-NF

1/8"

0.205
(5.20)

0.531(13.50)0.433(11.00)

CVC4-NF

1/4"

0.354
(9.00)

0.815(20.70)0.748(19.00)

CVC4-NF-H

1/4"

0.382
(9.70)

0.815(20.70)0.748(19.00)

CVC8-NF

1/2" (3/8")

0.610(15.50)0.886(22.50)1.063(27.00)

CVC12-NF

3/4"

0.890
(22.60)1.122(28.50)1.500(38.10)

Type

Size

D

H

F 2 surface width

CVC2-NM

1/8"

0.205
(5.20)

0.500(12.70)0.374(9.50)

CVC4-NM

1/4"

0.354
(9.00)

0.717(18.20)0.622(15.80)

CVC4-NM-H

1/4"

0.382
(9.70)

0.717(18.20)0.622(15.80)

CVC8-NM

1/2" (3/8")

0.610(15.50)0.811(20.60)0.937(23.80)

CVC12-NM

3/4"

0.890
(22.60)1.000(25.40)1.315(33.40)

Type

Size

D

H

F 2 surface width

CVC4-NSM

1/4"

0.354
(9.00)

0.591(15.00)0.622(15.80)

CVC8-NSM

1/2" (3/8")

0.610(15.50)0.657(16.70)0.937(23.80)T
L1
L

Ultra High Purity Fittings

CVC Reducing Gland, for use with Male Nut

Ultra High Purity Valves

φOD

Type

φOD
T
L1
L

φD

H

F

H

F

CVC Male Short Nut

PFA Weld FittingsφD

Antistatic UnitφDH

PFA Valves

CVC Male Nut

Vacuum Components

CVC Female Nut

F

49

Unit: inch (mm)

CVC Female Blind Nut

CHF

CVC Male Blind Nut

HF

CVC Blind Gasket

T

Type

Size

C

H

F 2 surface width

CVC2-NBF

1/8"

0.315
(8.00)

0.638(16.20)0.433(11.00)

CVC4-NBF

1/4"

0.441
(11.20)0.941(23.90)0.748(19.00)

CVC8-NBF

1/2" (3/8")

0.449(11.40)1.012(25.70)1.063(27.00)

CVC12-NBF

3/4"

0.528
(13.40)1.276(32.40)1.500(38.10)

Type

Size

H

F 2 surface width

CVC2-NBM

1/8"

0.618
(15.70)0.374(9.50)

CVC4-NBM

1/4"

0.921
(23.40)0.622(15.80)

CVC8-NBM

1/2" (3/8")

1.079(27.40)0.937(23.80)

CVC12-NBM

3/4"

1.429
(36.30)1.315(33.40)

Type

Size

T

D

CVC2-BG

1/8"

0.020
(0.50)

0.250(6.35)

CVC4-BG

1/4"

0.031
(0.80)

0.469(11.90)

CVC8-BG

1/2" (3/8")

0.031(0.80)

0.780(19.80)

CVC12-BG

3/4"

0.031
(0.80)

1.134(28.80)φD

Note: Orifice gaskets of each size can be manufactured. For further inquiries, please consult your local sales representative.

CVC Gasket

Type

Size

E

T

D

CVC2-G

1/8"

0.091(2.30)

0.020(0.50)

0.250(6.35)

CVC4-G

1/4"

0.220(5.60)

0.031(0.80)

0.469(11.90)

CVC8-G

1/2" (3/8")

0.441(11.20)0.031(0.80)

0.780(19.80)

CVC12-G

3/4"

0.669
(17.00)0.031(0.80)

1.134(28.80)

Type

Size

E

T

L

D

0.240
(6.10)

0.031(0.80)

0.118(3.00)

0.488(12.40)

CVC4-RG-LE

0.220(5.60)

0.031(0.80)

0.118(3.00)

0.488(12.40)

CVC8-RG-NI

0.453(11.50)0.031(0.80)

0.118(3.00)

0.780(19.80)0.453(11.50)0.031(0.80)

0.118(3.00)

0.780(19.80)T

φE

φD

CVC Retainer Gasket

CVC4-RG-NI
A

1/4"

A-A

φE φD
A
L

T

1/2"

CVC8-RG-LE

50

Unit: inch (mm)

CVC Male Union

Size

E

L

F 2surfacewidth

CVC2-UM

1/8"

0.071
(1.80)

1.130(28.70)0.374(9.50)

CVC4-UM

1/4"

0.169
(4.30)

1.551(39.40)0.622(15.80)

CVC8-UM

1/2"(3/8")

0.402(10.20)1.839(46.70)0.937(23.80)

Type

Size

E

CVC2-UB

1/8"

0.071
(1.80)

CVC4-UB

1/4"

CVC8-UB

φE

L

Ultra High Purity Valves

Type

F

Panel holediameterPanel thickness(Max)

1.693 1.004 0.689(43.00) (25.50) (17.50)

0.433(11.00)0.354(9.00)

0.236(6.00)

0.169 2.228 1.299 0.929(4.30) (56.60) (33.00) (23.60)

0.748(19.00)0.579(14.70)0.433(11.00)1/2" 0.402 2.571 1.480 1.091(3/8") (10.20) (65.30) (37.60) (27.70)

1.063(27.00)0.890(22.60)0.866(22.00)Size OD

L2

L1

L2

φE

L1

L2

F

L

CVC Bulkhead Union (Tube End)

Type

E

L

L1

F2
surfacewidth

Panel holediameterPanel thickness (Max)

CVC4-UBS28 1/4"

0.250
(6.35)

0.169 2.358 1.299 0.750(4.30) (59.90) (33.00) (19.05)

0.748(19.00)0.579(14.70)0.433(11.00)

CVC6-UBS28 3/8"

0.375
(9.53)

0.295 2.571 1.480 0.750(7.50) (65.30) (37.60) (19.05)

1.063(27.00)0.890(22.60)0.866(22.00)1/2" 0.500 0.402 2.571 1.480 0.750(3/8") (12.70) (10.20) (65.30) (37.60) (19.05)

1.063(27.00)0.890(22.60)0.866(22.00)

Type

Size

H

F 2surfacewidth

CVC2-UF

1/8"

0.661
(16.80)0.433(11.00)

CVC4-UF

1/4"

1.189
(30.20)0.748(19.00)

CVC8-UF

1/2"(3/8")

1.311(33.30)1.063(27.00)

Type

Size

E

C

F 2surfacewidth

CVC2-UE

1/8"

0.071
(1.80)

0.890(22.60)0.433(11.00)

CVC4-UE

1/4"

0.171
(4.35)

1.071(27.20)0.669(17.00)

CVC8-UE

1/2"(3/8")

0.402(10.22)1.449(36.80)0.984(25.00)Vacuum Components

F2
surfacewidth

L

Ultra High Purity Fittings

CVC Bulkhead Union

φE

φOD

L2

L1
F

L

CVC Female Union

PFA Weld Fittings

H

F

CVC Union Elbow

F

Antistatic UnitφECPFA Valves

CVC8-UBS28

51

Unit: inch (mm)

CVC Union Tee

Type

Size

E

L

C

F 2 surface width

CVC2-UT

1/8"

0.071
(1.80)

1.780(45.20)0.890(22.60)0.433(11.00)

CVC4-UT

1/4"

0.171
(4.35)

2.142(54.40)1.071(27.20)0.669(17.00)

CVC8-UT

1/2"(3/8")

0.402(10.22)2.898(73.60)1.449(36.80)0.984(25.00)

Type

Size

E

L

C

F 2 surface width

CVC2-UC

1/8"

0.071
(1.80)

1.780(45.20)0.890(22.60)0.433(11.00)

CVC4-UC

1/4"

0.171
(4.35)

2.142(54.40)1.071(27.20)0.669(17.00)

CVC8-UC

1/2"(3/8")

0.402(10.22)2.898(73.60)1.449(36.80)0.984(25.00)

Type

Size

E

L

F 2 surface width

CVC2-USFW

1/8"

0.071
(1.80)

1.142(29.00)0.433(11.00)

CVC4-USFW

1/4"

0.171
(4.35)

1.709(43.40)0.748(19.00)

CVC8-USFW

1/2"(3/8")

0.402(10.20)1.850(47.00)1.063(27.00)

Type

Size

E

C

F 2 surface width

CVC2-UEFW

1/8"

0.071
(1.80)

0.886(22.50)0.433(11.00)

CVC4-UEFW

1/4"

0.171
(4.35)

1.000(25.40)0.748(19.00)

CVC8-UEFW

1/2"(3/8")

0.402(10.20)1.173(29.80)1.063(27.00)

Type

Size

E

L

C

F 2 surface width

CVC2-UTFW

1/8"

0.071
(1.80)

1.772(45.00)0.886(22.50)0.433(11.00)

CVC4-UTFW

1/4"

0.171
(4.35)

2.000(50.80)1.000(25.40)0.748(19.00)

CVC8-UTFW

1/2"(3/8")

0.402(10.20)2.346(59.60)1.173(29.80)1.063(27.00)

C
φE
C

C

L

F

CVC Double Union Cross

F
C
φE
L
C
C

C
L

CVC Double Female Union

φE

L

F

CVC Double Female Union Elbow

C

φE

C

F

CVC Double Female Union Tee

C

φE

C

52

L

C

F

Unit: inch (mm)

CVC Double Female Union Cross

Size

E

L

C

F 2 surface width

CVC2-UCFW

1/8"

0.071
(1.80)

1.772(45.00)0.886(22.50)0.433(11.00)

CVC4-UCFW

1/4"

0.171
(4.35)

2.000(50.80)1.000(25.40)0.748(19.00)

CVC8-UCFW

1/2"(3/8")

0.402(10.20)2.346(59.60)1.173(29.80)1.063(27.00)

Type

Size

E

L

F 2 surface width

CVC2-USMW

1/8"

0.071
(1.80)

1.732(44.00)0.374(9.50)

CVC4-USMW

1/4"

0.171
(4.35)

2.402(61.00)0.622(15.80)

CVC8-USMW

1/2"(3/8")

0.402(10.20)2.520(64.00)0.937(23.80)

Type

Size

E

C

F 2 surface width

CVC2-UEMW

1/8"

0.071
(1.80)

1.274(32.35)0.374(9.50)

CVC4-UEMW

1/4"

0.171
(4.35)

1.600(40.65)0.622(15.80)

CVC8-UEMW

1/2"(3/8")

0.402(10.20)1.783(45.30)0.937(23.80)

Type

Size

E

L

C

F 2 surface width

CVC2-UTMW

1/8"

0.071
(1.80)

2.547(64.70)1.274(32.35)0.374(9.50)

CVC4-UTMW

1/4"

0.171
(4.35)

3.201(81.30)1.600(40.65)0.622(15.80)

CVC8-UTMW

1/2"(3/8")

0.402(10.20)3.567(90.60)1.783(45.30)0.937(23.80)

Type

Size

E

L

C

F 2 surface width

CVC2-UCMW

1/8"

0.071
(1.80)

2.547(64.70)1.274(32.35)0.374(9.50)

CVC4-UCMW

1/4"

0.171
(4.35)

3.201(81.30)1.600(40.65)0.622(15.80)

CVC8-UCMW

1/2"(3/8")

0.402(10.20)3.567(90.60)1.783(45.30)0.937(23.80)Ultra High Purity Valves

C

Type

φE

L
C

C

C

L

F

φE

L

F

C
φE

C

Vacuum Components

CVC Double Male Union Elbow

F

φE

C

C

PFA Weld Fittings

C

F

L

CVC Double Male Union Cross

Antistatic Unit

C
φE
L

C

L

C

F

PFA Valves

CVC Double Male Union Tee

CUltra High Purity Fittings

CVC Double Male Union

53

Unit: inch (mm)

CVC Manifold Elbow

Type

Size

OD

T

L

L1

A

F 2 surface width

CVC4-ME

1/4"

0.250
(6.35)

0.039(1.00)

0.984(25.00)0.524(13.30)1.071(27.20)0.669(17.00)

Type

Size

OD

T

L

L1

A

F 2 surface width

CVC4-MT

1/4"

0.250
(6.35)

0.039(1.00)

0.984(25.00)0.524(13.30)1.071(27.20)0.669(17.00)

A
T
φOD
L1

F

L

CVC Manifold Tee

A

T φOD

L1

54

L

L

L1

F

SCL

Super-clean Micro Fittings

Super-clean Long Fittings

Weld Fittings

Weld Fittings■Features◎ Double melt material is available as an option for use
in UHP piping in order to suppress gas emissions.
◎ Surface roughness Ra 0.13 μm or less achieved byelectropolishing.
◎ Compact shapes save piping spaces.
◎ The neck (straight pipe section) enables high quality
weld by using automatic orbital welder.

◎ Surface roughness Ra 0.13 μm or less achieved byelectropolishing.
◎ When installing manifold piping, the long straightpipe sections enable less work (one welding spot
not needed) because additional pipe will not be necessary.
◎ The neck (straight pipe section) enables high quality weld by using orbital welder.

Size

Model

Space

SCM Weld Fittings
SCL

Large
Small
Diameter Diameter

0
2
4
6
8
12

Same diameter as main line

1/8"
1/4"
3/8"
1/2"
3/4"

Type of Product

E
T
R
AT
C
RT

Custom Specifications

Grade + Material

SpaceStandard Item
-P1304* The length of the straight pipe part will differ-P0413* depending on the placement. (6.35,21mm)* Only SCM can be made for -P1304 and-P0413.

Elbow
Tee
ReducerAngle Tee
Cross
Reducing Tee

STD 316L
EP 316L
SEP 316LE

Mechanical Polished + SUS316L
Electro Polished + SUS316L
Electro Polished + SUS316LE(Double Melt Material)
Note: There is a space between the grade and the material.

PFA Valves■Product Grade
Grade
Material
Surface Roughness
PolishSTD

EP
Ra 0.13 μm / 5 μin

Mechanical PolishedElectro Polished
Degreasing+
Precision cleaning

Cleaning
Packaging

SEP

SUS316L, SUS316LE (Double melt Material)
Ra 0.5 μm / 20 μin

Single bagged package

Double bagged package

PFA Weld Fittings■Production Range Table
Type of Product
SCM
SCL

Vacuum Components■Product Code Table

Ultra High Purity Fittings■Features

Ultra High Purity Valves

SCM

SUS316L

SUS316LE

STD

EP

○

○

SEP
○

○

○

OptionAntistatic Unit
55

Unit: inch (mm)

SCM 90° elbow

Type

Size

OD

T

C

A

L

SCM 20E

1/8"

0.125
(3.18)

0.028(0.70)

0.406(10.32)

0.313(7.94)

0.563(14.29)SCM 40E

1/4"

0.250
(6.35)

0.039(1.00)

0.406(10.32)

0.313(7.94)

0.563(14.29)SCM 60E

3/8"

0.375
(9.53)

0.039(1.00)

0.469(11.91)

0.438(11.12)0.688(17.47)

SCM 80E

1/2"

0.500
(12.70)0.049(1.24)

0.531(13.50)0.563(14.29)0.813(20.64)

Type

Size

OD1

T1

OD2

T2

C

A

L

SCM 42E

1/4"×1/8"

0.250(6.35)

0.039(1.00)

0.125(3.18)

0.028(0.70)

0.406(10.32)

0.313(7.94)

0.563(14.29)SCM 62E

3/8"×1/8"

0.375(9.53)

0.039(1.00)

0.125(3.18)

0.028(0.70)

0.469 0.438 0.688(11.91) (11.12) (17.47)

SCM 64E

3/8"×1/4"

0.375(9.53)

0.039(1.00)

0.250(6.35)

0.039(1.00)

0.469 0.438 0.688(11.91) (11.12) (17.47)

SCM 82E

1/2"×1/8"

0.500(12.70)0.049(1.24)

0.125(3.18)

0.028(0.70)

0.531 0.563 0.813(13.50) (14.29) (20.64)

SCM 84E

1/2"×1/4"

0.500(12.70)0.049(1.24)

0.250(6.35)

0.039(1.00)

0.531 0.563 0.813(13.50) (14.29) (20.64)

SCM 86E

1/2"×3/8"

0.500(12.70)0.049(1.24)

0.375(9.53)

0.039(1.00)

0.531 0.563 0.813(13.50) (14.29) (20.64)

Type

Size

OD

T

C

A

L

SCM 20T

1/8"

0.125
(3.18)

0.028(0.70)

0.406(10.32)

0.313(7.94)

0.813(20.64)

SCM 40T

1/4"

0.250
(6.35)

0.039(1.00)

0.406(10.32)

0.313(7.94)

0.813(20.64)

SCM 60T

3/8"

0.375
(9.53)

0.039(1.00)

0.469(11.91)

0.438(11.12)0.938(23.82)

SCM 80T

1/2"

0.500
(12.70)0.049(1.24)

0.531(13.50)0.563(14.29)1.063(27.00)

Type

Size

OD1

T1

OD2

T2

C

A

L

SCM 42T

1/4"×1/8"

0.250(6.35)

0.039(1.00)

0.125(3.18)

0.028(0.70)

0.406(10.32)

0.313(7.94)

0.813(20.64)

SCM 62T

3/8"×1/8"

0.375(9.53)

0.039(1.00)

0.125(3.18)

0.028(0.70)

0.469(11.91)

0.438(11.12)0.938(23.82)

SCM 64T

3/8"×1/4"

0.375(9.53)

0.039(1.00)

0.250(6.35)

0.039(1.00)

0.469(11.91)

0.438(11.12)0.938(23.82)

SCM 82T

1/2"×1/8"

0.500(12.70)0.049(1.24)

0.125(3.18)

0.028(0.70)

0.531(13.50)0.563(14.29)1.063(27.00)

SCM 84T

1/2"×1/4"

0.500(12.70)0.049(1.24)

0.250(6.35)

0.039(1.00)

0.531(13.50)0.563(14.29)1.063(27.00)

SCM 86T

1/2"×3/8"

0.500(12.70)0.049(1.24)

0.375(9.53)

0.039(1.00)

0.531(13.50)0.563(14.29)1.063(27.00)

Type

Size

OD1

T1

OD2

T2

C

A

L

SCM 42RT

1/4"×1/8"

0.250(6.35)

0.039(1.00)

0.125(3.18)

0.028(0.70)

0.406(10.32)

0.313(7.94)

0.813(20.64)

SCM 62RT

3/8"×1/8"

0.375(9.53)

0.039(1.00)

0.125(3.18)

0.028(0.70)

0.469(11.91)

0.438(11.12)0.938(23.82)

SCM 64RT

3/8"×1/4"

0.375(9.53)

0.039(1.00)

0.250(6.35)

0.039(1.00)

0.469(11.91)

0.438(11.12)0.938(23.82)

SCM 82RT

1/2"×1/8"

0.500(12.70)0.049(1.24)

0.125(3.18)

0.028(0.70)

0.531(13.50)0.563(14.29)1.063(27.00)

SCM 84RT

1/2"×1/4"

0.500(12.70)0.049(1.24)

0.250(6.35)

0.039(1.00)

0.531(13.50)0.563(14.29)1.063(27.00)

SCM 86RT

1/2"×3/8"

0.500(12.70)0.049(1.24)

0.375(9.53)

0.039(1.00)

0.531(13.50)0.563(14.29)1.063(27.00)

φOD
T
6.35

φOD
C

T

L
A
A

C

L

6.35

A

SCM 90° Reducing Elbow

φOD1

T1

6.35

L

φOD2

C

T2
A
A

6.35
C

A
L

SCM Straight Tee

φOD

C

T

6.35

T
A

φOD
6.35

A

C

6.35

A

C
L

SCM Reducing Tee

φOD2
T2

C

6.35

T1
A

φOD1
6.35

A

C

A

6.35
C

L

SCM Reducing Tee

φOD1

C

T1

6.35
φOD2

T1

A
φOD1
6.35
C

56

A
L

6.35
C

T2

A

Unit: inch (mm)

SCM Angle Tee

T

L

φOD

OD

T

C

A

L

SCM 20AT

1/8"

0.125
(3.18)

0.028(0.70)

0.406(10.32)

0.313(7.94)

0.563(14.29)SCM 40AT

1/4"

0.250
(6.35)

0.039(1.00)

0.406(10.32)

0.313(7.94)

0.563(14.29)SCM 60AT

3/8"

0.375
(9.53)

0.039(1.00)

0.469(11.91)

0.438(11.12)0.688(17.47)

SCM 80AT

1/2"

0.500
(12.70)0.049(1.24)

0.531(13.50)0.563(14.29)0.813(20.64)

Type

Size

OD1

T1

OD2

T2

R

SCM 42R

1/4"×1/8"

0.250(6.35)

0.039(1.00)

0.125(3.18)

0.028(0.70)

0.085(2.15)

SCM 62R

3/8"×1/8"

0.375(9.53)

0.039(1.00)

0.125(3.18)

0.028(0.70)

0.148(3.75)

SCM 64R

3/8"×1/4"

0.375(9.53)

0.039(1.00)

0.250(6.35)

0.039(1.00)

0.148(3.75)

SCM 82R

1/2"×1/8"

0.500(12.70)0.049(1.24)

0.125(3.18)

0.028(0.70)

0.201(5.10)

SCM 84R

1/2"×1/4"

0.500(12.70)0.049(1.24)

0.250(6.35)

0.039(1.00)

0.201(5.10)

SCM 86R

1/2"×3/8"

0.500(12.70)0.049(1.24)

0.375(9.53)

0.039(1.00)

0.201(5.10)

Type

Size

OD

T

C

A

L

SCM 20C

1/8"

0.125
(3.18)

0.028(0.70)

0.406(10.32)

0.313(7.94)

0.813(20.64)

SCM 40C

1/4"

0.250
(6.35)

0.039(1.00)

0.406(10.32)

0.313(7.94)

0.813(20.64)

SCM 60C

3/8"

0.375
(9.53)

0.039(1.00)

0.469(11.91)

0.438(11.12)0.938(23.82)

SCM 80C

1/2"

0.500
(12.70)0.049(1.24)

0.531(13.50)0.563(14.29)1.063(27.00)

Type

Size

OD

T

A

C

C1

L

SCM
40E-P0413

1/4"

0.250
(6.35)

0.039(1.00)

0.313(7.94)

0.406(10.32)0.827(21.00)0.984(25.00)

Type

Size

OD

T

A

C

SCM
40T-P0413

1/4"

0.250
(6.35)

0.039(1.00)

0.313(7.94)

0.250(6.35)

T

C

A
A
L

6.35
C

6.35
C

A
L

SCM Reducer

7

φOD2

T1

T2
R

φOD1

6.35
19.05

φOD

6.35

T

φOD T

C
A

L
C

6.35
C

6.35
C

A

SCM Different-length Elbow

PFA Valves

L

6.35

A

Vacuum Components

SCM Cross

Ultra High Purity Fittings

Size

Ultra High Purity Valves

φOD
6.35

Type

φOD
T

φOD

C1

T
A
A

A

6.35
C

SCM Different-length Tee

C1C2

PFA Weld Fittings

L

L

φOD

C1

φOD

C2

T

0.984 0.827 0.813(25.00) (21.00) (20.64)

A
C

A

C

A

L

57

Antistatic Unit

T

Unit: inch (mm)

SCM Different-length Tee

φOD

T
A
A

C

Size

OD

T

A

C

C1

C2

L

SCM
40T-P1304

1/4"

0.250
(6.35)

0.039(1.00)

0.313(7.94)

0.250(6.35)

1.969(50.00)

Type

Size

OD

T

C

A

L1

SCL 40E

1/4"

0.250
(6.35)

0.039(1.00)

0.984(25.00)0.433(11.00)0.750(19.05)

SCL 60E

3/8"

0.375
(9.53)

0.039(1.00)

0.984(25.00)0.433(11.00)0.750(19.05)

SCL 80E

1/2"

0.500
(12.70)0.049(1.24)

1.142(29.00)0.669(17.00)0.750(19.05)

SCL 120E

3/4"

0.750
(19.05)0.049(1.24)

1.732(44.00)0.866(22.00)1.299(33.00)

Type

Size

OD

T

C

A

L1

L2

SCL 40T

1/4"

0.250
(6.35)

0.039(1.00)

0.984(25.00)0.433(11.00)0.750(19.05)1.969(50.00)SCL 60T

3/8"

0.375
(9.53)

0.039(1.00)

0.984(25.00)0.433(11.00)0.750(19.05)1.969(50.00)

SCL 80T

1/2"

0.500
(12.70)0.049(1.24)

1.142(29.00)0.669(17.00)0.750(19.05)2.283(58.00)

SCL 120T

3/4"

0.750
(19.05)0.049(1.24)

1.732(44.00)0.866(22.00)1.299(33.00)3.465(88.00)

Type

Size

OD1

SCL 64T

φOD

T
C2

C1

Type

A

0.828 0.406(21.03) (10.32)

CL

SCL 90° Ebow

φOD

C

T

L1

T
φOD
L1

A

C

SCL Straight Tee

φOD

T

L1

C

T

L1

L1
C

φOD

C

A

L2

SCL Reducing Tee

φOD2
T2

L1

C

φOD1

OD2

T2

C

3/8"×1/4"

0.375(9.53)

0.039 0.250(1.00) (6.35)

0.039(1.00)

0.984(25.00)0.433 0.750 1.969(11.00) (19.05) (50.00)

SCL 84T

1/2"×1/4"

0.500 0.049 0.250(12.70) (1.24) (6.35)

0.039(1.00)

1.142(29.00)0.669 0.750 2.283(17.00) (19.05) (58.00)

SCL 86T

1/2"×3/8"0.500 0.049 0.375(12.70) (1.24) (9.53)

0.039(1.00)

1.142(29.00)0.669 0.750 2.283(17.00) (19.05) (58.00)

SCL 124T

3/4"×1/4"

0.750 0.049 0.250(19.05) (1.24) (6.35)

0.039(1.00)

1.732(44.00)0.866 1.299 3.465(22.00) (33.00) (88.00)

SCL 126T

3/4"×3/8"

0.750 0.049 0.375(19.05) (1.24) (9.53)

0.039(1.00)

1.732(44.00)0.866 1.299 3.465(22.00) (33.00) (88.00)

SCL 128T

3/4"×1/2"

0.750 0.049 0.500(19.05) (1.24) (12.70)

0.049(1.24)

1.732(44.00)0.866 1.299 3.465(22.00) (33.00) (88.00)

Type

Size

OD1

T1

OD2

T2

L1

L2

SCL 64R

3/8"×1/4"

0.375(9.53)

0.039(1.00)

0.250(6.35)

0.039(1.00)

0.750(19.05)1.575(40.00)

SCL 84R

1/2"×1/4"

0.500(12.70)0.049(1.24)

0.250(6.35)

0.039(1.00)

0.750(19.05)1.575(40.00)

SCL 86R

1/2"×3/8"

0.500(12.70)0.049(1.24)

0.375(9.53)

0.039(1.00)

0.750(19.05)1.575(40.00)

SCL 124R

3/4"×1/4"

0.750(19.05)0.049(1.24)

0.250(6.35)

0.039(1.00)

0.750(19.05)2.165(55.00)

SCL 126R

3/4"×3/8"

0.750(19.05)0.049(1.24)

0.375(9.53)

0.039(1.00)

0.750(19.05)2.165(55.00)

SCL 128R

3/4"×1/2"

0.750(19.05)0.049(1.24)

0.500(12.70)0.049(1.24)

0.750(19.05)2.165(55.00)

T1

L1

C

C

L2

L1
A

SCL Reducer

T1

R

T2

φOD1
φOD2
L1
L2

58

T1

A

L1

L2

Ultra High Purity Valves

SCF

Super-clean Fittings
Weld Fittings■Features◎ Welded fittings for high-purity gas supply.
◎ Double melt material is available as an option for use in UHP piping in order to suppress gas emissions.

Ultra High Purity Fittings◎ Surface roughness of Ra 0.13 μm or less achieved by electropolishing.
◎ Compact shapes save piping spaces.
◎ The neck (straight pipe section) and the tube end enable high quality weld by using automatic orbital welder.
◎ Please contact the sales representative for sizes, flanges, etc., not listed in the catalog.

■Product Code Table
Product
Name

Space

90E
T
RC
LAP(L)

90° Elbow
Tee
Concentric Reducer
Lap* Please ask us about
product classes other thanthose listed above.

Space

Size (Same Diameter)

Size (Different Diameters)

Space

Thickness (Same Diameter)

Thickness (Different Diameter)××(Large Diameter Side) (Small Diameter Side)(Large Diameter Side) (Small Diameter Side)

BA 316L
EP 316L
SEP
316LE

Notation Nominal Diameter Thickness

1/4
3/8
1/2
3/4
1
10A
15A
20A
25A
32A
40A
50A
65A
80A
100A

1.0T
1.0T
1.24T
1.24T
1.65T
5S
5S
5S
5S
5S
5S
5S
5S
5S
5S

6.35mm
9.53mm
12.7mm19.05mm
25.4mm
17.3mm
21.7mm
27.2mm34.0mm
42.7mm
48.6mm
60.5mm
76.3mm
89.1mm114.3mm

1/4"
3/8"
1/2"
3/4"
1"
10A
15A
20A
25A
32A
40A
50A
65A
80A
100A

1.0mm
1.0mm
1.24mm
1.24mm
1.65mm
1.2mm
1.65mm
1.65mm
1.65mm
1.65mm
1.65mm
1.65mm
2.1mm
2.1mm
2.1mm

PFA Valves

1/4"
3/8"
1/2"
3/4"
1"
10A
15A
20A
25A
32A
40A
50A
65A
80A
100A

Mechanical Polished + SUS316L
Electro Polished + SUS316L
Electro Polished + SUS316LE(Double Melt Material)

Note: There is a space between the grade and the material.

* When the thicknesses are the same,the small-diameter side is omitted.

Notation Nominal Diameter Outer Diameter

Grade + MaterialSpace

Vacuum Components

SCF
Weld Fittings

Type of Product■Product GradeBA

EP≤ Ra 0.13 μm / 5 μin≤ Ra 0.5 μm / 20 μin
Mechanical PolishedElectro Polished
Degreasing+
Precision cleaning
Class10

Cleaning
Post-cleaning Environment
Packaging

SEP

SUS316L, SUS316LE (Double melt material)

PFA Weld Fittings

Grade
Material
Surface Roughness
PolishSingle bagged package

Double bagged package■Production Range Table

1/4"~1/2"
3/4"~1"
10A~100A

SUS316L

SUS316LE

BA

EP

SEP

○
○
○

×

○

○
○

Antistatic Unit

Size

×
×

Note: Please ask the sales representatives for sizes other than those noted above.

59

Unit: inch (mm)

SCF 90° Elbow

Type

L
T
φOD

R

Size

SCF Tee : Tube Size

T

T

R

A

L

0.250
(6.35)
0.375(9.53)
0.500(12.70)0.750(19.05)1.000(25.40)0.681(17.30)0.854(21.70)1.071(27.20)1.339(34.00)1.681(42.70)1.913(48.60)2.382(60.50)3.004(76.30)3.508(89.10)4.500(114.30)
5.504(139.80)
6.504(165.20)0.039(1.00)
0.039(1.00)
0.049(1.24)
0.049(1.24)
0.065(1.65)
0.047(1.20)
0.065(1.65)
0.065(1.65)
0.065(1.65)
0.065(1.65)
0.065(1.65)
0.065(1.65)
0.083(2.10)
0.083(2.10)
0.083(2.10)
0.110(2.80)
0.110(2.80)

0.375(9.53)
0.563(14.30)0.602(15.30)0.750(19.05)1.000(25.40)0.681(17.30)0.854(21.70)1.071(27.20)1.339(34.00)1.681(42.70)1.913(48.60)2.382(60.50)3.004(76.30)3.508(89.10)4.500(114.30)
7.500(190.50)
9.000(228.60)

1.575(40.00)1.772(45.00)1.969(50.00)2.362(60.00)2.559(65.00)2.362(60.00)2.559(65.00)2.756(70.00)2.953(75.00)3.543(90.00)3.937(100.00)
4.528(115.00)
5.512(140.00)
5.906(150.00)
6.890(175.00)
10.236(260.00)
11.811(300.00)

1.142(29.00)1.142(29.00)1.142(29.00)1.417(36.00)1.417(36.00)1.142(29.00)1.417(36.00)1.417(36.00)1.417(36.00)1.811(46.00)1.811(46.00)1.811(46.00)2.008(51.00)2.008(51.00)2.008(51.00)2.362(60.00)2.362(60.00)

SCF 90E 1/4

1/4"

SCF 90E 3/8

3/8"

SCF 90E 1/2

1/2"

SCF 90E 3/4

3/4"

SCF 90E 1

1"

SCF 90E 10A

10A

SCF 90E 15A

15A

SCF 90E 20A

20A

SCF 90E 25A

25A

SCF 90E 32A

32A

SCF 90E 40A40A

SCF 90E 50A50A

SCF 90E 65A

65A

SCF 90E 80A80A

SCF 90E 100A

100A

SCF 90E 125A

125A

SCF 90E 150A

150A

Type

Size

OD

T

C

M

L

SCF T 1/4

1/4"

0.250
(6.35)

0.039(1.00)

1.378(35.00)1.378(35.00)0.984(25.00)

SCF T 3/8

3/8"

0.375
(9.53)

0.039(1.00)

1.535(39.00)1.535(39.00)0.984(25.00)

SCF T 1/2

1/2"

0.500
(12.70)0.049(1.24)

1.575(40.00)1.575(40.00)0.984(25.00)

SCF T 3/4

3/4"

0.750
(19.05)0.049(1.24)

2.165(55.00)2.165(55.00)1.417(36.00)

SCF T 11"

1.000
(25.40)0.065(1.65)

2.165(55.00)2.165(55.00)1.417(36.00)

Type

Size

A

A

OD

φOD

L
M

L

T

φOD

C

C

SCF Tee : Pipe SizeT

SCF T 10A

10A

SCF T 15A

15A

SCF T 20A

20A

T

SCF T 25A

25A

φOD

SCF T 32A

32A

SCF T 40A

40A

SCF T 50A

50A

SCF T 65A

65A

SCF T 80A

80A

SCF T 100A

100A

SCF T 125A

125A

SCF T 150A

150A

φOD

L
M

L

C

60

C

OD

T

C

M

L

0.681
(17.30)0.854(21.70)1.071(27.20)1.339(34.00)1.681(42.70)1.913(48.60)2.382(60.50)3.004(76.30)3.508(89.10)4.500(114.30)
5.504(139.80)
6.504(165.20)

0.047(1.20)
0.065(1.65)
0.065(1.65)
0.065(1.65)
0.065(1.65)
0.065(1.65)
0.065(1.65)
0.083(2.10)
0.083(2.10)
0.083(2.10)
0.110(2.800)0.110(2.800)1.969(50.00)2.165(55.00)2.165(55.00)2.362(60.00)2.953(75.00)3.150(80.00)3.346(85.00)3.937(100.00)
4.134(105.00)
4.724(120.00)
7.874(200.00)
8.661(220.00)

1.969(50.00)2.165(55.00)2.165(55.00)2.362(60.00)2.953(75.00)3.150(80.00)3.346(85.00)3.937(100.00)
4.134(105.00)
4.724(120.00)
7.874(200.00)
8.661(220.00)

1.378(35.00)1.417(36.00)1.417(36.00)1.417(36.00)1.811(46.00)1.811(46.00)1.811(46.00)2.008(51.00)2.008(51.00)2.008(51.00)2.362(60.00)2.362(60.00)Unit: inch (mm)

SCF Tee (Reducing)

Type

L2

M

L1

C

C

T1

φOD1

M

3/8"×1/4"

0.250(6.35)

0.039(1.00)

0.039 1.535 1.535 0.984 0.984(1.00) (39.00) (39.00) (25.00) (25.00)

L1

L2

SCF T 1/2X1/4

1/2"×1/4"

0.500 0.250(12.70) (6.35)

0.049(1.24)

0.039 1.575 1.575 0.984 0.984(1.00) (40.00) (40.00) (25.00) (25.00)

SCF T 1/2X3/8

1/2"×3/8"0.500 0.375(12.70) (9.53)

0.049(1.24)

0.039 1.575 1.575 0.984 0.984(1.00) (40.00) (40.00) (25.00) (25.00)

SCF T 3/4X1/4

3/4"×1/4"

0.750 0.250(19.05) (6.35)

0.049(1.24)

0.039 1.969 1.969 1.417 1.142(1.00) (50.00) (50.00) (36.00) (29.00)

SCF T 3/4X3/8

3/4"×3/8"

0.750 0.375(19.05) (9.53)

0.049(1.24)

0.039 1.969 1.969 1.417 1.142(1.00) (50.00) (50.00) (36.00) (29.00)

SCF T 3/4X1/2

3/4"×1/2"

0.750 0.500 0.049(19.05) (12.70) (1.24)

0.049 1.969 1.969 1.417 1.142(1.24) (50.00) (50.00) (36.00) (29.00)

SCF T 1X1/4

1"×1/4"1.000 0.250(25.40) (6.35)

0.065(1.65)

0.039 1.969 1.969 1.417 1.142(1.00) (50.00) (50.00) (36.00) (29.00)

SCF T 1X3/8

1"×3/8"1.000 0.375(25.40) (9.53)

0.065(1.65)

0.039 1.969 1.969 1.417 1.142(1.00) (50.00) (50.00) (36.00) (29.00)

SCF T 1X1/2

1"×1/2"1.000 0.500 0.065(25.40) (12.70) (1.65)

0.049 1.969 1.969 1.417 1.142(1.24) (50.00) (50.00) (36.00) (29.00)

SCF T 1X3/4

1"×3/4"1.000 0.750 0.065(25.40) (19.05) (1.65)

0.049 2.165 2.165 1.417 1.417(1.24) (55.00) (55.00) (36.00) (36.00)

SCF T 10AX1/4

10A×1/4"

0.681 0.250(17.30) (6.35)

0.047(1.20)

0.039 1.969 1.772 1.417 1.142(1.00) (50.00) (45.00) (36.00) (29.00)

SCF T 10AX3/8

10A×3/8"

0.681 0.375(17.30) (9.53)

0.047(1.20)

0.039 1.969 1.772 1.417 0.984(1.00) (50.00) (45.00) (36.00) (25.00)

SCF T 10AX1/2

10A×1/2"

0.681 0.500 0.047(17.30) (12.70) (1.20)

0.049 1.969 1.772 1.417 1.142(1.24) (50.00) (45.00) (36.00) (29.00)

SCF T 15AX1/4

15A×1/4"

0.854 0.250(21.70) (6.35)

0.065(1.65)

0.039 1.969 1.969 1.417 1.142(1.00) (50.00) (50.00) (36.00) (29.00)

SCF T 15AX3/8

15A×3/8"0.854 0.375(21.70) (9.53)

0.065(1.65)

0.039 1.969 1.969 1.417 1.142(1.00) (50.00) (50.00) (36.00) (29.00)

SCF T 15AX1/2

15A×1/2"

0.854 0.500 0.065(21.70) (12.70) (1.65)

0.049 1.969 1.969 1.417 1.142(1.24) (50.00) (50.00) (36.00) (29.00)

SCF T 15AX3/4

15A×3/4"

0.854 0.750 0.065(21.70) (19.05) (1.65)

0.049 2.165 2.165 1.417 1.417(1.24) (55.00) (55.00) (36.00) (36.00)

SCF T 20AX1/4

20A×1/4"

1.071 0.250(27.20) (6.35)

0.065(1.65)

0.039 1.969 1.969 1.417 1.142(1.00) (50.00) (50.00) (36.00) (29.00)

SCF T 20AX3/8

20A×3/8"

1.071 0.375(27.20) (9.53)

0.065(1.65)

0.039 1.969 1.969 1.417 1.142(1.00) (50.00) (50.00) (36.00) (29.00)

SCF T 20AX1/2

20A×1/2"

1.071 0.500 0.065(27.20) (12.70) (1.65)

0.049 1.969 1.969 1.417 1.142(1.24) (50.00) (50.00) (36.00) (29.00)

SCF T 20AX3/4

20A×3/4"

1.071 0.750 0.065(27.20) (19.05) (1.65)

0.049 2.165 2.165 1.417 1.417(1.24) (55.00) (55.00) (36.00) (36.00)

SCF T 20AX15A

20A×15A

1.071 0.854 0.065(27.20) (21.70) (1.65)

0.065 2.165 2.165 1.417 1.417(1.65) (55.00) (55.00) (36.00) (36.00)

SCF T 25AX1/4

25A×1/4"

1.339 0.250(34.00) (6.35)

0.065(1.65)

0.039 1.969 2.165 1.417 1.142(1.00) (50.00) (55.00) (36.00) (29.00)

SCF T 25AX3/8

25A×3/8"

1.339 0.375(34.00) (9.53)

0.065(1.65)

0.039 1.969 2.165 1.417 1.142(1.00) (50.00) (55.00) (36.00) (29.00)

SCF T 25AX1/2

25A×1/2"

1.339 0.500 0.065(34.00) (12.70) (1.65)

0.049 1.969 2.165 1.417 1.142(1.24) (50.00) (55.00) (36.00) (29.00)

SCF T 25AX3/4

25A×3/4"

1.339 0.750 0.065(34.00) (19.05) (1.65)

0.049 2.362 2.362 1.417 1.417(1.24) (60.00) (60.00) (36.00) (36.00)

SCF T 25AX15A

25A×15A

1.339 0.854 0.065(34.00) (21.70) (1.65)

0.065 2.362 2.362 1.417 1.417(1.65) (60.00) (60.00) (36.00) (36.00)

SCF T 25AX20A

25A×20A

1.339 1.071 0.065(34.00) (27.20) (1.65)

0.065 2.362 2.362 1.417 1.417(1.65) (60.00) (60.00) (36.00) (36.00)

SCF T 32AX1/4

32A×1/4"

1.681 0.250(42.70) (6.35)

0.065(1.65)

0.039 2.362 2.362 1.811 1.142(1.00) (60.00) (60.00) (46.00) (29.00)

SCF T 32AX3/8

32A×3/8"

1.681 0.375(42.70) (9.53)

0.065(1.65)

0.039 2.362 2.362 1.811 1.142(1.00) (60.00) (60.00) (46.00) (29.00)

SCF T 32AX1/2

32A×1/2"

1.681 0.500 0.065(42.70) (12.70) (1.65)

0.049 2.362 2.362 1.811 1.142(1.24) (60.00) (60.00) (46.00) (29.00)

SCF T 32AX3/4

32A×3/4"

1.681 0.750 0.065(42.70) (19.05) (1.65)

0.049 2.756 2.756 1.811 1.417(1.24) (70.00) (70.00) (46.00) (36.00)

SCF T 32AX15A

32A×15A

1.681 0.854 0.065(42.70) (21.70) (1.65)

0.065 2.756 2.756 1.811 1.417(1.65) (70.00) (70.00) (46.00) (36.00)

SCF T 32AX20A

32A×20A

1.681 1.071 0.065(42.70) (27.20) (1.65)

0.065 2.756 2.756 1.811 1.417(1.65) (70.00) (70.00) (46.00) (36.00)

SCF T 32AX25A

32A×25A

1.681 1.339 0.065(42.70) (34.00) (1.65)

0.065 2.756 2.756 1.811 1.417(1.65) (70.00) (70.00) (46.00) (36.00)

SCF T 40AX1/4

40A×1/4"

1.913 0.250(48.60) (6.35)

0.039 2.362 2.362 1.811 1.142(1.00) (60.00) (60.00) (46.00) (29.00)

61

Antistatic Unit

SCF T 3/8X1/4

0.375(9.53)

0.065(1.65)C

PFA Weld Fittings

T2

PFA Valves

T1

Vacuum Components

OD2

Ultra High Purity Fittings

OD1

Ultra High Purity Valves

φOD2
T2

Size

Unit: inch (mm)

SCF Tee (Reducing)

φOD2
T2

L2

M

L1

C

62

C

Type

Size

OD1

OD2

T1

T2

SCF T 40AX3/8

40A×3/8"

1.913(48.60)0.375(9.53)

0.065(1.65)

0.039(1.00)

2.362 2.362 1.811 1.142(60.00) (60.00) (46.00) (29.00)

SCF T 40AX1/2

40A×1/2"

1.913 0.500(48.60) (12.70)

0.065(1.65)

0.049(1.24)

2.362 2.362 1.811 1.142(60.00) (60.00) (46.00) (29.00)

SCF T 40AX3/4

40A×3/4"

1.913 0.750(48.60) (19.05)

0.065(1.65)

0.049(1.24)

2.756 2.756 1.811 1.417(70.00) (70.00) (46.00) (36.00)

SCF T 40AX15A 40A×15A

1.913 0.854(48.60) (21.70)

0.065(1.65)

0.065(1.65)

2.756 2.756 1.811 1.417(70.00) (70.00) (46.00) (36.00)

SCF T 40AX20A 40A×20A

1.913 1.071(48.60) (27.20)

0.065(1.65)

0.065(1.65)

2.756 2.756 1.811 1.417(70.00) (70.00) (46.00) (36.00)

SCF T 40AX25A 40A×25A

1.913 1.339(48.60) (34.00)

0.065(1.65)

0.065(1.65)

2.756 2.756 1.811 1.417(70.00) (70.00) (46.00) (36.00)

SCF T 40AX32A 40A×32A

1.913 1.681(48.60) (42.70)

0.065(1.65)

0.065(1.65)

3.150 3.150 1.811 1.811(80.00) (80.00) (46.00) (46.00)

SCF T 50AX1/4

50A×1/4"

2.382(60.50)0.250(6.35)

0.065(1.65)

0.039(1.00)

2.362 2.559 1.811 1.142(60.00) (65.00) (46.00) (29.00)

SCF T 50AX3/8

50A×3/8"

2.382(60.50)0.375(9.53)

0.065(1.65)

0.039(1.00)

2.362 2.559 1.811 1.142(60.00) (65.00) (46.00) (29.00)

SCF T 50AX1/2

50A×1/2"

2.382 0.500(60.50) (12.70)

0.065(1.65)

0.049(1.24)

2.362 2.559 1.811 1.142(60.00) (65.00) (46.00) (29.00)

SCF T 50AX3/4

50A×3/4"

2.382 0.750(60.50) (19.05)

0.065(1.65)

0.049(1.24)

2.756 2.953 1.811 1.417(70.00) (75.00) (46.00) (36.00)

SCF T 50AX15A 50A×15A

2.382 0.854(60.50) (21.70)

0.065(1.65)

0.065(1.65)

2.756 2.953 1.811 1.417(70.00) (75.00) (46.00) (36.00)

SCF T 50AX20A 50A×20A

2.382 1.071(60.50) (27.20)

0.065(1.65)

0.065(1.65)

2.756 2.953 1.811 1.417(70.00) (75.00) (46.00) (36.00)

SCF T 50AX25A 50A×25A

2.382 1.339(60.50) (34.00)

0.065(1.65)

0.065(1.65)

2.756 2.953 1.811 1.417(70.00) (75.00) (46.00) (36.00)

SCF T 50AX32A 50A×32A

2.382 1.681(60.50) (42.70)

0.065(1.65)

0.065(1.65)

3.150 3.346 1.811 1.811(80.00) (85.00) (46.00) (46.00)

SCF T 50AX40A 50A×40A

2.382 1.913(60.50) (48.60)

0.065(1.65)

0.065(1.65)

3.150 3.346 1.811 1.811(80.00) (85.00) (46.00) (46.00)

SCF T 65AX1/4

65A×1/4"

3.004(76.30)0.250(6.35)

0.083(2.10)

0.039(1.00)

2.559 2.953 2.008 1.142(65.00) (75.00) (51.00) (29.00)

SCF T 65AX3/8

65A×3/8"

3.004(76.30)0.375(9.53)

0.083(2.10)

0.039(1.00)

2.559 2.953 2.008 1.142(65.00) (75.00) (51.00) (29.00)

SCF T 65AX1/2

65A×1/2"

3.004 0.500(76.30) (12.70)

0.083(2.10)

0.049(1.24)

2.559 2.953 2.008 1.142(65.00) (75.00) (51.00) (29.00)

SCF T 65AX3/4

65A×3/4"

3.004 0.750(76.30) (19.05)

0.083(2.10)

0.049(1.24)

2.953 3.346 2.008 1.417(75.00) (85.00) (51.00) (36.00)

SCF T 65AX15A 65A×15A

3.004 0.854(76.30) (21.70)

0.083(2.10)

0.065(1.65)

2.953 3.346 2.008 1.417(75.00) (85.00) (51.00) (36.00)

SCF T 65AX20A 65A×20A

3.004 1.071(76.30) (27.20)

0.083(2.10)

0.065(1.65)

2.953 3.346 2.008 1.417(75.00) (85.00) (51.00) (36.00)

SCF T 65AX25A 65A×25A

3.004 1.339(76.30) (34.00)

0.083(2.10)

0.065(1.65)

2.953 3.346 2.008 1.417(75.00) (85.00) (51.00) (36.00)

SCF T 65AX32A 65A×32A

3.004 1.681(76.30) (42.70)

0.083(2.10)

0.065(1.65)

3.543 3.740 2.008 1.811(90.00) (95.00) (51.00) (46.00)

SCF T 65AX40A 65A×40A

3.004 1.913(76.30) (48.60)

0.083(2.10)

0.065(1.65)

3.543 3.740 2.008 1.811(90.00) (95.00) (51.00) (46.00)

SCF T 65AX50A 65A×50A

3.004 2.382(76.30) (60.50)

0.083(2.10)

0.065(1.65)

3.543 3.740 2.008 1.811(90.00) (95.00) (51.00) (46.00)

SCF T 80AX1/4

80A×1/4"

3.508(89.10)0.250(6.35)

0.083(2.10)

0.039(1.00)

2.559 3.150 2.008 1.142(65.00) (80.00) (51.00) (29.00)

SCF T 80AX3/8

80A×3/8"

3.508(89.10)0.375(9.53)

0.083(2.10)

0.039(1.00)

2.559 3.150 2.008 1.142(65.00) (80.00) (51.00) (29.00)

SCF T 80AX1/2

80A×1/2"

3.508 0.500(89.10) (12.70)

0.083(2.10)

0.049(1.24)

2.559 3.150 2.008 1.142(65.00) (80.00) (51.00) (29.00)

SCF T 80AX3/4

80A×3/4"

3.508 0.750(89.10) (19.05)

0.083(2.10)

0.049(1.24)

2.953 3.543 2.008 1.417(75.00) (90.00) (51.00) (36.00)

SCF T 80AX15A 80A×15A

3.508 0.854(89.10) (21.70)

0.083(2.10)

0.065(1.65)

2.953 3.543 2.008 1.417(75.00) (90.00) (51.00) (36.00)

SCF T 80AX20A 80A×20A

3.508 1.071(89.10) (27.20)

0.083(2.10)

0.065(1.65)

2.953 3.543 2.008 1.417(75.00) (90.00) (51.00) (36.00)

SCF T 80AX25A 80A×25A

3.508 1.339(89.10) (34.00)

0.083(2.10)

0.065(1.65)

2.953 3.543 2.008 1.417(75.00) (90.00) (51.00) (36.00)

SCF T 80AX32A 80A×32A

3.508 1.681(89.10) (42.70)

0.083(2.10)

0.065(1.65)

3.543 3.937 2.008 1.811(90.00) (100.00) (51.00) (46.00)

SCF T 80AX40A 80A×40A

3.508 1.913(89.10) (48.60)

0.083(2.10)

0.065(1.65)

3.543 3.937 2.008 1.811(90.00) (100.00) (51.00) (46.00)

SCF T 80AX50A 80A×50A

3.508 2.382(89.10) (60.50)

0.083(2.10)

0.065(1.65)

3.543 3.937 2.008 1.811(90.00) (100.00) (51.00) (46.00)

T1

φOD1

C

M

L1

L2

Unit: inch (mm)

SCF Tee (Reducing)

Type

T1

T2

80A×65A

3.508(89.10)3.004(76.30)0.083(2.10)

0.083(2.10)

3.937
4.134
2.008
(100.00) (105.00) (51.00)

2.008(51.00)

SCF T 100AX1/4 100A×1/4"

4.500(114.30)

0.250(6.35)

0.083(2.10)

0.039(1.00)

2.559(65.00)3.740(95.00)2.008(51.00)1.142(29.00)

SCF T 100AX3/8 100A×3/8"

4.500(114.30)

0.375(9.53)

0.083(2.10)

0.039(1.00)

2.559(65.00)3.740(95.00)2.008(51.00)1.142(29.00)

SCF T 100AX1/2 100A×1/2"

4.500
0.500
(114.30) (12.70)

0.083(2.10)

0.049(1.24)

2.559(65.00)3.740(95.00)2.008(51.00)1.142(29.00)

SCF T 100AX3/4 100A×3/4"

4.500
0.750
(114.30) (19.05)

0.083(2.10)

0.049(1.24)

2.953
3.937
2.008
(75.00) (100.00) (51.00)

1.417(36.00)

SCF T 100AX15A 100A×15A

4.500
0.854
(114.30) (21.70)

0.083(2.10)

0.065(1.65)

2.953
3.937
2.008
(75.00) (100.00) (51.00)

1.417(36.00)

SCF T 100AX20A 100A×20A

4.500
1.071
(114.30) (27.20)

0.083(2.10)

0.065(1.65)

2.953
3.937
2.008
(75.00) (100.00) (51.00)

1.417(36.00)

SCF T 100AX25A 100A×25A

4.500
1.339
(114.30) (34.00)

0.083(2.10)

0.065(1.65)

2.953
3.937
2.008
(75.00) (100.00) (51.00)

1.417(36.00)

SCF T 100AX32A 100A×32A

4.500
1.681
(114.30) (42.70)

0.083(2.10)

0.065(1.65)

3.543
4.331
2.008
(90.00) (110.00) (51.00)

1.811(46.00)

SCF T 100AX40A 100A×40A

4.500
1.913
(114.30) (48.60)

0.083(2.10)

0.065(1.65)

3.543
4.331
2.008
(90.00) (110.00) (51.00)

1.811(46.00)

SCF T 100AX50A 100A×50A

4.500
2.382
(114.30) (60.50)

0.083(2.10)

0.065(1.65)

3.543
4.331
2.008
(90.00) (110.00) (51.00)

1.811(46.00)

SCF T 100AX65A 100A×65A

4.500
3.004
(114.30) (76.30)

0.083(2.10)

0.083(2.10)

4.134
4.724
2.008
(105.00) (120.00) (51.00)

2.008(51.00)

SCF T 100AX80A 100A×80A

4.500
3.508
(114.30) (89.10)

0.083(2.10)

0.083(2.10)

4.134
4.724
2.008
(105.00) (120.00) (51.00)

2.008(51.00)

SCF T 80AX65A
φOD2
T2

L2

M

L1

C

T1

C

φOD1

SCF Reducer

Type

H
L2

φOD2

Size

φOD1

T1

M

L1

L2

T2

H

L1

L2

SCF RC 3/8X1/4 3/8"×1/4"

0.375(9.53)

0.250(6.35)

0.039(1.00)

0.039(1.00)

2.953(75.00)0.984(25.00)0.984(25.00)

SCF RC 1/2X1/4 1/2"×1/4"

0.500(12.70)0.250(6.35)

0.049(1.24)

0.039(1.00)

2.953(75.00)0.984(25.00)0.984(25.00)

SCF RC 1/2X3/8 1/2"×3/8"

0.500(12.70)0.375(9.53)

0.049(1.24)

0.039(1.00)

2.953(75.00)0.984(25.00)0.984(25.00)

SCF RC 3/4X1/4 3/4"×1/4"

0.750(19.05)0.250(6.35)

0.049(1.24)

0.039(1.00)

3.937(100.00)

1.417(36.00)0.984(25.00)

SCF RC 3/4X3/8 3/4"×3/8"

0.750(19.05)0.375(9.53)

0.049(1.24)

0.039(1.00)

3.937(100.00)

1.417(36.00)0.984(25.00)

SCF RC 3/4X1/2 3/4"×1/2"

0.750(19.05)0.500(12.70)0.049(1.24)

0.039(1.00)

3.937(100.00)

1.417(36.00)0.984(25.00)

SCF RC 15AX3/8 15A×3/8"

0.854(21.70)0.375(9.53)

0.065(1.65)

0.039(1.00)

4.331(110.00)

1.417(36.00)0.984(25.00)

SCF RC 15AX1/2 15A×1/2"

0.854(21.70)0.500(12.70)0.065(1.65)

0.039(1.00)

4.331(110.00)

1.417(36.00)0.984(25.00)

SCF RC 20AX3/8 20A×3/8"

1.071(27.20)0.375(9.53)

0.065(1.65)

0.039(1.00)

4.724(120.00)

1.417(36.00)0.984(25.00)

SCF RC 20AX1/2 20A×1/2"

1.071(27.20)0.500(12.70)0.065(1.65)

0.039(1.00)

4.724(120.00)

1.417(36.00)0.984(25.00)

SCF RC 20AX15A 20A×15A

1.071(27.20)0.854(21.70)0.065(1.65)

0.065(1.65)

4.724(120.00)

1.417(36.00)1.417(36.00)

SCF RC 25AX1/2 25A×1/2"

1.339(34.00)0.500(12.70)0.065(1.65)

0.049(1.24)

4.921(125.00)

1.417(36.00)0.984(25.00)

SCF RC 25AX15A 25A×15A

1.339(34.00)0.854(21.70)0.065(1.65)

0.065(1.65)

4.921(125.00)

1.417(36.00)1.417(36.00)

SCF RC 25AX20A 25A×20A

1.339(34.00)1.071(27.20)0.065(1.65)

0.065(1.65)

4.921(125.00)

1.417(36.00)1.417(36.00)

SCF RC 32AX15A 32A×15A

1.681(42.70)0.854(21.70)0.065(1.65)

0.065(1.65)

5.472(139.00)

1.811(46.00)1.417(36.00)

SCF RC 32AX20A 32A×20A

1.681(42.70)1.071(27.20)0.065(1.65)

0.065(1.65)

5.472(139.00)

1.811(46.00)1.417(36.00)

SCF RC 32AX25A 32A×25A

1.681(42.70)1.339(34.00)0.065(1.65)

0.065(1.65)

5.472(139.00)

1.811(46.00)1.417(36.00)

SCF RC 40AX20A 40A×20A

1.913(48.60)1.071(27.20)0.065(1.65)

0.065(1.65)

5.984(152.00)

1.811(46.00)1.417(36.00)

SCF RC 40AX25A 40A×25A

1.913(48.60)1.339(34.00)0.065(1.65)

0.065(1.65)

5.984(152.00)

1.811(46.00)1.417(36.00)

SCF RC 40AX32A 40A×32A

1.913(48.60)1.681(42.70)0.065(1.65)

0.065(1.65)

6.378(162.00)

1.811(46.00)1.811(46.00)

SCF RC 50AX20A 50A×20A

2.382(60.50)1.071(27.20)0.065(1.65)

0.065(1.65)

6.457(164.00)

1.811(46.00)1.417(36.00)

SCF RC 50AX25A 50A×25A

2.382(60.50)1.339(34.00)0.065(1.65)

0.065(1.65)

6.457(164.00)

1.811(46.00)1.417(36.00)63

Antistatic Unit

T1

PFA Weld FittingsOD2

PFA Valves

OD1

L1

T2

C

Vacuum Components

OD2

Ultra High Purity Fittings

OD1

Ultra High Purity Valves

SizeUnit: inch (mm)

SCF Reducer

Type

OD1

OD2

T1

T2

H

L1

L2

SCF RC 50AX32A 50A×32A

2.382(60.50)1.681(42.70)0.065(1.65)

0.065(1.65)

6.850(174.00)

1.811(46.00)1.811(46.00)

SCF RC 50AX40A 50A×40A

2.382(60.50)1.913(48.60)0.065(1.65)

0.065(1.65)

6.850(174.00)

1.811(46.00)1.811(46.00)

SCF RC 65AX32A 65A×32A

3.004(76.30)1.681(42.70)0.083(2.10)

0.065(1.65)

7.559(192.00)

2.008(51.00)1.811(46.00)φOD1

SCF RC 65AX40A 65A×40A

3.004(76.30)1.913(48.60)0.083(2.10)

0.065(1.65)

7.559(192.00)

2.008(51.00)1.811(46.00)T1

SCF RC 65AX50A 65A×50A

3.004(76.30)2.382(60.50)0.083(2.10)

0.065(1.65)

7.559(192.00)

2.008(51.00)1.811(46.00)

SCF RC 80AX32A 80A×32A

3.508(89.10)1.681(42.70)0.083(2.10)

0.065(1.65)

7.559(192.00)

2.008(51.00)1.811(46.00)

SCF RC 80AX40A 80A×40A

3.508(89.10)1.913(48.60)0.083(2.10)

0.065(1.65)

7.559(192.00)

2.008(51.00)1.811(46.00)

SCF RC 80AX50A 80A×50A

3.508(89.10)2.382(60.50)0.083(2.10)

0.065(1.65)

7.559(192.00)

2.008(51.00)1.811(46.00)

SCF RC 80AX65A 80A×65A

3.508(89.10)3.004(76.30)0.083(2.10)

0.083(2.10)

7.756(197.00)

2.008(51.00)2.008(51.00)

SCF RC 100AX40A 100A×40A

4.500(114.30)

1.913(48.60)0.083(2.10)

0.065(1.65)

8.071(205.00)

2.008(51.00)1.811(46.00)

SCF RC 100AX50A 100A×50A

4.500(114.30)

2.382(60.50)0.083(2.10)

0.065(1.65)

8.071(205.00)

2.008(51.00)1.811(46.00)

SCF RC 100AX65A 100A×65A

4.500(114.30)

3.004(76.30)0.083(2.10)

0.083(2.10)

8.268(210.00)

2.008(51.00)2.008(51.00)

SCF RC 100AX80A 100A×80A

4.500(114.30)

3.508(89.10)0.083(2.10)

0.083(2.10)

8.268(210.00)

2.008(51.00)2.008(51.00)

H
L2

Size

L1

φOD2
T2

SCF Reducer

H

Type

Size

OD1

OD2

T1

T2

H

L1

L2

SCF RC 32AX1/4

32A×1/4"

1.681(42.70)0.250(6.35)

0.065(1.65)

0.039(1.00)

4.646(118.00)

1.811(46.00)1.142(29.00)

SCF RC 32AX3/8

32A×3/8"

1.681(42.70)0.375(9.53)

0.065(1.65)

0.039(1.00)

4.646(118.00)

1.811(46.00)1.142(29.00)

SCF RC 32AX1/2

32A×1/2"

1.681(42.70)0.500(12.70)0.065(1.65)

0.049(1.24)

4.646(118.00)

1.811(46.00)1.142(29.00)

SCF RC 32AX3/4

32A×3/4"

1.681(42.70)0.750(19.05)0.065(1.65)

0.049(1.24)

4.921(125.00)

1.811(46.00)1.417(36.00)

SCF RC 40AX1/4

40A×1/4"

1.913(48.60)0.250(6.35)

0.065(1.65)

0.039(1.00)

4.646(118.00)

1.811(46.00)1.142(29.00)

SCF RC 40AX3/8

40A×3/8"

1.913(48.60)0.375(9.53)

0.065(1.65)

0.039(1.00)

4.646(118.00)

1.811(46.00)1.142(29.00)

SCF RC 40AX1/2

40A×1/2"

1.913(48.60)0.500(12.70)0.065(1.65)

0.049(1.24)

4.646(118.00)

1.811(46.00)1.142(29.00)

SCF RC 40AX3/4

40A×3/4"

1.913(48.60)0.750(19.05)0.065(1.65)

0.049(1.24)

4.921(125.00)

1.811(46.00)1.417(36.00)

SCF RC
40AX15A

40A×15A

1.913(48.60)0.854(21.70)0.065(1.65)

0.065(1.65)

4.921(125.00)

1.811(46.00)1.417(36.00)

SCF RC 50AX1/4

50A×1/4"

2.382(60.50)0.250(6.35)

0.065(1.65)

0.039(1.00)

4.646(118.00)

1.811(46.00)1.142(29.00)

SCF RC 50AX3/8

50A×3/8"

2.382(60.50)0.375(9.53)

0.065(1.65)

0.039(1.00)

4.646(118.00)

1.811(46.00)1.142(29.00)

SCF RC 50AX1/2

50A×1/2"

2.382(60.50)0.500(12.70)0.065(1.65)

0.049(1.24)

4.646(118.00)

1.811(46.00)1.142(29.00)

SCF RC 50AX3/4

50A×3/4"

2.382(60.50)0.750(19.05)0.065(1.65)

0.049(1.24)

4.921(125.00)

1.811(46.00)1.417(36.00)

SCF RC
50AX15A

50A×15A

2.382(60.50)0.854(21.70)0.065(1.65)

0.065(1.65)

4.921(125.00)

1.811(46.00)1.417(36.00)

SCF RC 65AX1/4

65A×1/4"

3.004(76.30)0.250(6.35)

0.083(2.10)

0.039(1.00)

4.843(123.00)

2.008(51.00)1.142(29.00)

SCF RC 65AX3/8

65A×3/8"

3.004(76.30)0.375(9.53)

0.083(2.10)

0.039(1.00)

4.843(123.00)

2.008(51.00)1.142(29.00)

SCF RC 65AX1/2

65A×1/2"

3.004(76.30)0.500(12.70)0.083(2.10)

0.049(1.24)

4.843(123.00)

2.008(51.00)1.142(29.00)

SCF RC 65AX3/4

65A×3/4"

3.004(76.30)0.750(19.05)0.083(2.10)

0.049(1.24)

5.118(130.00)

2.008(51.00)1.417(36.00)

65A×15A

3.004(76.30)0.854(21.70)0.083(2.10)

0.065(1.65)

5.118(130.00)

2.008(51.00)1.417(36.00)

65A×20A

3.004(76.30)1.071(27.20)0.083(2.10)

0.065(1.65)

5.118(130.00)

2.008(51.00)1.417(36.00)

65A×25A

3.004(76.30)1.339(34.00)0.083(2.10)

0.065(1.65)

5.118(130.00)

2.008(51.00)1.417(36.00)

80A×1/4"

3.508(89.10)0.250(6.35)

0.083(2.10)

0.039(1.00)

5.315(135.00)

2.008(51.00)1.142(29.00)

L1
L2

φOD1

φOD2
T2

T1

SCF RC
65AX15ASCF RC
65AX20A
SCF RC
65AX25ASCF RC 80AX1/4

64

Unit: inch (mm)

SCF Reducer

Type

T1

T2

SCF RC 80AX3/8

80A×3/8"

3.508(89.10)0.375(9.53)

0.083(2.10)

0.039(1.00)

5.315
2.008(135.00) (51.00)

1.142(29.00)

SCF RC 80AX1/2

80A×1/2"

3.508(89.10)0.500(12.70)0.083(2.10)

0.049(1.24)

5.315
2.008(135.00) (51.00)

1.142(29.00)

SCF RC 80AX3/4

80A×3/4"

3.508(89.10)0.750(19.05)0.083(2.10)

0.049(1.24)

5.591
2.008(142.00) (51.00)

1.417(36.00)

SCF RC 80AX15A

80A×15A

3.508(89.10)0.854(21.70)0.083(2.10)

0.065(1.65)

5.591
2.008(142.00) (51.00)

1.417(36.00)

SCF RC 80AX20A

80A×20A

3.508(89.10)1.071(27.20)0.083(2.10)

0.065(1.65)

5.591
2.008(142.00) (51.00)

1.417(36.00)

SCF RC 80AX25A

80A×25A

3.508(89.10)1.339(34.00)0.083(2.10)

0.065(1.65)

5.591
2.008(142.00) (51.00)

1.417(36.00)

SCF RC 100AX1/4 100A×1/4"

4.500(114.30)

0.250(6.35)

0.083(2.10)

0.039(1.00)

6.181
2.008(157.00) (51.00)

1.142(29.00)

SCF RC 100AX3/8 100A×3/8"

4.500(114.30)

0.375(9.53)

0.083(2.10)

0.039(1.00)

6.181
2.008(157.00) (51.00)

1.142(29.00)

SCF RC 100AX1/2 100A×1/2"

4.500
0.500
(114.30) (12.70)

0.083(2.10)

0.049(1.24)

6.181
2.008(157.00) (51.00)

1.142(29.00)

SCF RC 100AX3/4 100A×3/4"

4.500
0.750
(114.30) (19.05)

0.083(2.10)

0.049(1.24)

6.457
2.008(164.00) (51.00)

1.417(36.00)

SCF RC 100AX15A 100A×15A

4.500
0.854
(114.30) (21.70)

0.083(2.10)

0.065(1.65)

6.457
2.008(164.00) (51.00)

1.417(36.00)

SCF RC 100AX20A 100A×20A

4.500
1.071
(114.30) (27.20)

0.083(2.10)

0.065(1.65)

6.457
2.008(164.00) (51.00)

1.417(36.00)

SCF RC 100AX25A 100A×25A

4.500
1.339
(114.30) (34.00)

0.083(2.10)

0.065(1.65)

6.457
2.008(164.00) (51.00)

1.417(36.00)

SCF RC 100AX32A 100A×32A

4.500
1.681
(114.30) (42.70)

0.083(2.10)

0.065(1.65)

6.850
2.008(174.00) (51.00)

1.811(46.00)

L1
L2

φOD1

φOD2
T2

T1

SCF Lap Joint

Type

T
R

t

φG

φOD

L1

L1

L2

Size

OD

T

t

L

G

L1

R

SCF LAP (L) 15A

15A

0.854
(21.70)0.083(2.10)

0.065(1.65)

2.559(65.00)2.008(51.00)1.575(40.00)0.118(3.00)SCF LAP (L) 20A

20A

1.071
(27.20)0.083(2.10)

0.065(1.65)

2.559(65.00)2.205(56.00)1.575(40.00)0.118(3.00)SCF LAP (L) 25A

25A

1.339
(34.00)0.110(2.80)

0.065(1.65)

3.346(85.00)2.638(67.00)1.575(40.00)0.118(3.00)SCF LAP (L) 32A

32A

1.681
(42.70)0.110(2.80)

0.065(1.65)

3.740(95.00)2.992(76.00)1.969(50.00)0.157(4.00)SCF LAP (L) 40A

40A

1.913
(48.60)0.110(2.80)

0.065(1.65)

3.740(95.00)

3.189(81.00)1.969(50.00)0.157(4.00)SCF LAP (L) 50A

50A

2.382
(60.50)0.110(2.80)

0.065(1.65)

3.740(95.00)3.780(96.00)1.969(50.00)0.157(4.00)SCF LAP (L) 65A

65A

3.004
(76.30)0.118(3.00)

0.083(2.10)

3.937
4.567
2.165
(100.00) (116.00) (55.00)

0.197(5.00)SCF LAP (L) 80A

80A

3.508
(89.10)0.118(3.00)

0.083(2.10)

2.165
3.937
4.961
(100.00) (126.00) (55.00)

0.197(5.00)SCF LAP (L) 100A

100A

4.500
(114.30)

0.118(3.00)

0.083(2.10)

3.937
5.945
2.165
(100.00) (151.00) (55.00)

0.197(5.00)PFA Valves

L

H

Vacuum Components

OD2

Ultra High Purity Fittings

OD1

Ultra High Purity Valves

H

Size

PFA Weld Fittings
Antistatic Unit
65

SQ

KITZ SCT Super Quartz Lock fitting for quartz chamber/reactor is highly safety
and repeatable fitting.

Super Quartz Lock Fittings■Features◎ Sealing reliability for glass tubing and metal tubing through the utilization of dual O-ring. (Disunion・Corotation Prevention)◎ Fluorine resin coated washer is installed to prevents the O-ring from co-rotation when tightening the nut or O-ring from falling off.
◎ Keeping high sealing ability in repeatable use.
◎ Stopper keeps consistency of tightening amount and prevents damage to the quartz tube by over tightening.
◎ More so than our conventional products, SQ Fittings can be used in a clean room environment, because of our Super Precision Cleaning Process.

■Specifications
φ 10

Quartz Size
Operating Pressure
Fluid Temperature

φ 12
VAC 〜 1atm
-10~150ºC■Product grade
Grade
Body
Surface Roughness
PolishEP
SUS316L≤ Ra 0.13 μm / 5 μin
Electro Polished
Degreasing+
Precision Cleaning
Single Bagged Package

Cleaning
Packaging

Product Code Table
Model

QuartzTubingO-ringSUS Tube
Size

O-ringMaterial

SQ

10

A

4W

F

A: Dual O-ring

10:φ10
12:φ12

SQ Fitting■Dimensions

4W:1/4

Fluorine Rubber

Unit: inch (mm)

Model

Type

Quart
Tube Size
φOD1

SQ10A-4W-F

0.39(10.0)SUS
Tube
Size φOD2

L

A

B

C

φD

φd

t

0.94 0.79(24.0) (20.0)

E

0.67(17.0)tE

φd φOD2

φD

A

B

C

0.25
(6.35)

1.34 0.28 0.39 0.47
(34.0) (7.0) (10.0) (12.0)

0.04
(1.0)

φOD1

L

SQ12A-4W-F

Note: Please ask to the sales representative for othe size.

66

0.47
(12.0)

1.02 0.87(26.0) (22.0)

0.75(19.0)

IF Flange■Features■Specifications
Size
Maximum Operating Pressure
Leak Rate
Fluid Temperature

10A

20A

25A

32A

40A

50A

65A

80A

1.4×10-10~145psig (1×10-6Pa~1MPa (G))≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/s)-200ºC~450ºC (The fluid temperature range depends on our calculated value)

Vacuum Components■Product grade
Grade (Flange Only)

STD

EP
Flange/SUS316L
Rotatable Flange/SUS304
Gasket/NLCB (Nickel 201)
Gasket Fixed Pin/A5056
Bolt, Nut, Washer/SUS304 *Material≤ Rz 12 µm≤ Ra 3.2 μm / 126 μin

Surface Roughness
Cleaning

Flange, Gasket,
Gasket Fixed Pin
Rotatable Flange
Bolt, Nut, Washer
FlangeRotatable Flange
GasketGasket Fixed Pin
Bolt, Nut, Washer≤ Rz 0.7 µm≤ Ra 0.13 μm / 5 μin
Degreasing + Precision cleaning
Degreasing
No Cleaning

Single Bagged Package

Double Bagged Package

PFA Valves

Packaging

Ultra High Purity Fittings◎ Exclusion of the resin packing seal for high purity gas systems. By utilizing a nickel gasket, an air tight seal is achieved. In addition, it is not
only corrosion resistant, but resistant to corrosive gas as well.
◎ It is most suitable for large flow systems. Sizes 10A~80A correspond to the sizing standards of bulk gas delivery supply for the liquid crystal
and solar battery industries.
◎ Piping construction improvement. The gasket fixed pin can be used as a temporary stop, thus preventing the gasket from falling off at the timeof the construction.
◎ By utilizing the rotatable flange, construction is easy even in confined spaces.
Wide temperature rating -200~450°C

Ultra High Purity Valves

IF

Single Bagged Package
Double Bagged Package
Single Bagged Package
Single Bagged Package*1 Please use lubricant when sticking occurs.

Product Code TableIF Flange Set (Flange 2x, Rotatable Flange 2x, Gasket 1x, Gasket Fixed Pin 2x, Bolt, Nut, Washer 1x each)
Model

Size

Space

Model

STD-316L :Machanical Polish + SUS316L
EP-316L :Electro Polish + SUS316L

IF Flange

FlangeModel

Type

Rotatable Flange RAF
Blank Flange
BLF
GasketNIG

Gasket Fixed Pin
Size

Thickness & Connection

Title

Size

Outer Diameter W:Butt Weld

LengthTotal Length:109.5mmSpace

Grade + Body Material

Model

Type

STD-316L :Machanical Polish + SUS316L
EP-316L :Electro Polish + SUS316L

IF Flange

Gasket Fixed Pin

Antistatic Unit

IF FlangeSize

PFA Weld Fittings

IF Flange
Set

Rotatable Flange, Blank Flange, Gasket

Grade + Body Material

67

■Flange Dimensions

Unit: inch (mm)

Model

4- φ2
f

φB

φD

φE

φC

φA

L1
L

■Rotatable Flange Dimensions

N- φH
45°

60°
φD

φB

φB

φC φA

φD

φC φA

S
T

S
T

10A～25A

32A～80A■Blank Flange Dimensions

N- φH
45°

60°
φC φA

φB

φB

IF10-5SW

10A

IF15-5SW

15A

IF20-5SW

20A

IF25-5SW

25A

IF32-5SW

32A

IF40-5SW

40A

IF50-5SW

50A

IF65-5SW

65A

IF80-5SW

80A

Type

Size

A

T

B

IF10-RAF

10A

IF15-RAF

15A

IF20-RAF

20A

IF25-RAF

25A

IF32-RAF

32A

IF40-RAF

40A

IF50-RAF

50A

IF65-RAF

65A

IF80-RAF

80A

2.40(61.0)
2.72(69.0)
3.15(80.0)
3.70(94.0)
4.09(104.0)4.17(106.0)4.80(122.0)6.02(153.0)6.54(166.0)0.59(15.0)
0.67(17.0)
0.75(19.0)
0.79(20.0)
0.83(21.0)
0.87(22.0)
0.94(24.0)
1.14(29.0)
1.18(30.0)

1.81(46.0)
1.97(50.0)
2.24(57.0)
2.68(68.0)
3.07(78.0)
3.15(80.0)
3.70(94.0)
4.69(119.0)5.20(132.0)

Type

Size

A

T

B

IF10-BLF

10A

IF15-BLF

15A

IF20-BLF

20A

IF25-BLF

25A

IF32-BLF

32A

IF40-BLF

40A

IF50-BLF

50A

IF65-BLF

65A

IF80-BLF

80A

2.40(61.0)
2.72(69.0)
3.15(80.0)
3.70(94.0)
4.09(104.0)4.17(106.0)4.80(122.0)6.02(153.0)6.54(166.0)0.59(15.0)
0.67(17.0)
0.75(19.0)
0.79(20.0)
0.83(21.0)
0.87(22.0)
0.94(24.0)
1.14(29.0)
1.18(30.0)

1.81(46.0)
1.97(50.0)
2.24(57.0)
2.68(68.0)
3.07(78.0)
3.15(80.0)
3.70(94.0)
4.69(119.0)5.20(132.0)

Type

Size

A

T

B

C

IF10-NIG

10A

IF15-NIG

15A

IF20-NIG

20A

IF25-NIG

25A

IF32-NIG

32A

IF40-NIG

40A

IF50-NIG

50A

IF65-NIG

65A

IF80-NIG

80A

1.34(34.0)
1.50(38.0)
1.69(43.0)
2.05(52.0)
2.36(60.0)
2.60(66.0)
3.07(78.0)
3.82(97.0)
4.33(110.0)

0.11
(2.8)
0.11
(2.8)
0.11
(2.8)
0.11
(2.8)
0.11
(2.8)
0.11
(2.8)
0.11
(2.8)
0.11
(2.8)
0.11
(2.8)

0.63
(16.0)
0.79(20.0)
0.98(25.0)
1.34(34.0)
1.65(42.0)
1.89(48.0)
2.36(60.0)
3.03(77.0)
3.54(90.0)

1.10(28.0)
1.26(32.0)
1.46(37.0)
1.81(46.0)
2.13(54.0)
2.36(60.0)
2.83(72.0)
3.58(91.0)
4.09(104.0)

Type

A

B

C

D

IF-PIN

0.12
(3.0)

0.3
(7.5)

0.06
(1.5)

0.08
(2.0)

φC φA

T

10A～25A

32A～80A■Gasket Dimensions

B

1.34
1.10
(34.0) (28.0)
1.50
1.26
(38.0) (32.0)
1.69
1.46
(43.0) (37.0)
2.05
1.81
(52.0) (46.0)
2.36
2.13
(60.0) (54.0)
2.60
2.36
(66.0) (60.0)
3.07
2.83
(78.0) (72.0)
3.82
3.58
(97.0) (91.0)
4.33
4.09
(110.0) (104.0)

C

D

E

L

L1

t

0.63
(16.0)
0.79(20.0)
0.98(25.0)
1.34(34.0)
1.65(42.0)
1.89(48.0)
2.36(60.0)
3.03(77.0)
3.54(90.0)

0.68(17.3)
0.85(21.7)
1.07(27.2)
1.34(34.0)
1.68(42.7)
1.91(48.6)
2.38(60.5)
3.00(76.3)
3.51(89.1)

0.87(22.0)
1.02(26.0)
1.22(31.0)
1.57(40.0)
1.89(48.0)
2.13(54.0)
2.60(66.0)
3.27(83.0)
3.78(96.0)

4.31(109.5)4.31(109.5)4.31(109.5)4.31(109.5)4.31(109.5)4.31(109.5)4.31(109.5)4.31(109.5)4.31(109.5)3.19(81.0)
3.11(79.0)
3.07(78.0)
2.95(75.0)
2.91(74.0)
2.87(73.0)
2.80(71.0)
2.56(65.0)
2.52(64.0)

0.05(1.20)
0.06(1.65)
0.06(1.65)
0.06(1.65)
0.06(1.65)
0.06(1.65)
0.06(1.65)
0.08(2.10)
0.08(2.10)

N-φH
6-φ0.28(6-φ7)
6-φ0.35(6-φ9)
6-φ0.43(6-φ11)6-φ0.51(6-φ13)8-φ0.43(8-φ11)8-φ0.43(8-φ11)8-φ0.51(8-φ13)8-φ0.71(8-φ18)8-φ0.71(8-φ18)

C

D

S

1.34
(34.0)
1.50(38.0)
1.69(43.0)
2.05(52.0)
2.36(60.0)
2.60(66.0)
3.07(78.0)
3.82(97.0)
4.33(110.0)0.91(23.0)
1.06(27.0)
1.26(32.0)
1.61(41.0)
1.93(49.0)
2.17(55.0)
2.64(67.0)
3.31(84.0)
3.82(97.0)

0.43(11.0)
0.47(12.0)
0.55(14.0)
0.59(15.0)
0.63(16.0)
0.67(17.0)
0.75(19.0)
0.91(23.0)
0.94(24.0)

N-φH
6-φ0.28(6-φ7)
6-φ0.35(6-φ9)
6-φ0.43(6-φ11)6-φ0.51(6-φ13)8-φ0.43(8-φ11)8-φ0.43(8-φ11)8-φ0.51(8-φ13)8-φ0.71(8-φ18)8-φ0.71(8-φ18)C
1.34(34.0)
1.50(38.0)
1.69(43.0)
2.05(52.0)
2.36(60.0)
2.60(66.0)
3.07(78.0)
3.82(97.0)
4.33(110.0)
Unit: inch (mm)Model2- φ2.6
φC

φA

T

φB

■Gasket Fixed Pin

Unit: inch (mm)

Model

φD

φA

C
B

68

A

Unit: inch (mm)

Model

N- φH

Size

Unit: inch (mm)

Model

N- φH

Type

10A～80A

Vacuum Components
VACUUM VALVEKITZ SCT's vacuum valves suitable forvacuum application
In semiconductor and liquid-crystal production equipment, the gases supplied tothe process chamber react over the wafer due to the plasma or heat, and then they
are forcefully expelled by a vacuum pump.
KITZ SCT's vacuum valves enable long-term, stable durability under such severe
conditions. In addition, for reactive gases, heating the valve from the inside of thebellows achieves uniformity of temperature which prevents byproducts inside thevalve and realizes high sealing ability over a long period of use.

■IVB/IVBL
70
Vacuum Isolation Valves■IVBH
73
Heated Vacuum Isolation Valves■IVB/IVBL/IVBH
Heated Vacuum Isolation Valve with Slow
75
Exhaust Valve■IVBH-CO15
PID Controlled Digital Temperature Controller
for IVBH Series

80■For Open/Close Display Use Magnetic Proximity Switch
81
IVB Series Options■BRW/BRWH
82
NW flange Ball Valve / Heated Ball Valve■IVWF
Vacuum Butterfly Valves
84
89
PCA Series
90
APC Butterfly Valve■UXG/LG
91
Vacuum Gate Valves

IVB/IVBL

These vacuum valves have bodies made of SUS304 achieving high durability andcost reduction.

Vacuum Isolation Valves■Features◎ The IVB and IVBL series realize lower cost and easy-to-maintain simple structure by reducing the number of component parts.
◎ By adopting a stainless steel body (SUS304), a wide range of gases can be handled with excellent corrosion resistance.
◎ These valves have high seal performance due to their bellows seal structure.
◎ The IVB series realizes lower cost by utilizing a square-shaped body.
◎ The IVBL series realize large conductance performance due to their adoption of a burring process.
Lock Screw with Hexagonal Hole
HandleBolt with Hexagonal Hole

Bolt with Hexagonal Hole

BonnetSleeveActuator
O-ringStem

Bellows Flange

Stem

Bellows Flange

Bellows

Trim

Trim

Bellows
O-ring
Disk Holder

Disk Holder
O-ringO-ringO-ringBody

Body
FlangeManual Valve

Pneumatic Valve* Precautions during connection
The flow direction of the vacuum valves is designed so that the pump can be connected
either to the side or bottom, but, depending on the velocity of the fluid passing throughthe valve, the lifetime of the bellows may decrease markedly if connected to the side.
We recommend connecting the vacuum pump to the bottom side.
Side

BottomConnection to pump side

■Specifications
Fluid Temperature
Pressure Range
Standard Materials
Bellows Durability
Actuation Pressure
Leak Rates-15~100°C (maximum 70°C for actuator)-10

1.4x10 ~29 psia (1x10-6 ~2x105 Pa (abs) [0.1MPa (G)])			
Body/SUS304
Bellows/SUS316L
Actuator/A6063 (built-in magnet for magnetic proximity switch)
Seat/fluorine rubber *Other materials not listed may be available.
Actual results more than 1M cycles (in vacuum) (the bellows cycle life drops when it is used on the pressurized side).
58~101 psig (0.4~0.7MPa (G))		

Across the Seat
He Leak Rates
Inboard He LeakRates

≤ 1×10-9 sccs (≤ 1×10-10 Pa·m3/s)≤ 1×10-9 sccs (≤ 1×10-10 Pa·m3/s)

15A
Orifice (mm)Valve Lift (mm)Conductance (ℓ/s)
Cylinder Volume NC/NO (cc)Cylinder Volume DA (cc)IVB Series
25A
40A

50A

50A

IVBL Series
65A
80A

0.91 (23)1.10 (28)1.50 (38)1.89 (48)2.36 (60)

2.76 (70)

3.78 (96)0.39 (10)0.47 (12)0.59 (15)0.79 (20)0.79 (20)

1.18 (30)

1.18 (30)

1.57 (40)

5

11

28

42

60

95

125

320

9

13

16

33

56

136

136

295

9

13

16

33

56

50

50

112

■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

70

100A

0.63 (16)Product Code Table
Size

Operation

Valve
Shape

Connection Connection(Seat Side) (OUT Side)

Seat
Material

CustomSpecifications Accessories

Uitra High Purity Valves

Model

Accessories

Specificcode
IVB: Square Shaped
Bellows Valve
IVBL: Round Shaped
Bellows Valve

M: Manual
A: Angle TypeNW: ISO KF Flange Same Cases As Fluorine Rubber Standard Products Not Shown: No Switch Not Shown:(RS):
SO: With Switch On the With PD31L3 Switch RoHS Compliant
C: Normally Closed Y: Y-shape Straight VF: JIS VF Flange (Seat Side) Omitted
Are Omitted
PE:
Open Position
D: Double Acting Z: Z-shape Inline VG: JIS VG Fange F: JIS VF Flange
Product
SC: With Switch On the With PE33L3 Switch
O: Normally Open
CF: ConFlat Flange G: JIS VG Flange
MF: ISO MF Flange
Closed Position *1
W: With Open and Closed
Position*1*1 The accessories switch is an option only for the pneumatic type.
Note: We handle materials and shapes other than those noted.

Ultra High Purity Fittings

IVB Series (15A-50A) Manual TypeφB

H

M-depth L

φA

L2

φA

L

Unit: inch (mm)M-depth L

Type
IVB15MA-NWF

Connection

A

B

L

L1

L2

H

NW16

1.18 (30.0)

2.13 (54.0)

1.54 (39.0)

1.54 (39.0)

1.26 (32.0)

3.48 (88.5)

M4-6

IVB25MA-NWF

NW25

1.57 (40.0)

2.36 (60.0)

1.69 (43.0)

1.69 (43.0)

1.57 (40.0)

3.66 (93.0)

M5-8

IVB40MA-NWF

NW40

2.17 (55.0)

2.36 (60.0)

1.97 (50.0)

1.97 (50.0)

1.57 (40.0)

3.92 (99.5)

M5-8

IVB50MA-NWF

NW50

2.95 (75.0)

2.91 (74.0)

2.76 (70.0)

2.76 (70.0)

1.97 (50.0)

4.25 (108.0)

M5-8

T

PFA Valves

IVB Series (15A-50A) Pneumatic Type

Vacuum Components

L1

S

M
S

H3

H1
H2

φA

H
L2

L1

φA
L

Unit: inch (mm)
A

L

L1

M-depthL

Type

Connection

IVB15DA-NWF
IVB25DA-NWF
IVB40DA-NWF
IVB50DA-NWF
IVB15CA-NWF
IVB25CA-NWF
IVB40CA-NWF
IVB50CA-NWF
IVB15OA-NWF
IVB25OA-NWF
IVB40OA-NWF
IVB50OA-NWF

NW16

1.18 (30.0) 1.54 (39.0) 1.54 (39.0) 1.26 (32.0)

M4-6

NW25

1.57 (40.0) 1.69 (43.0) 1.69 (43.0) 1.57 (40.0)

M5-8

3.78 (96.0) 2.15 (54.5) 0.45 (11.5) 0.45 (11.5) 2.05 (52.0) 0.20 (5.0) Rc 1/8

NW40

2.17 (55.0) 1.97 (50.0) 1.97 (50.0) 1.57 (40.0)

M5-8

4.31 (109.5) 2.15 (54.5) 0.45 (11.5) 0.45 (11.5) 2.05 (52.0) 0.20 (5.0) Rc 1/8

NW50

2.95 (75.0) 2.76 (70.0) 2.76 (70.0) 1.97 (50.0)

M5-8

5.35 (136.0) 2.38 (60.5) 0.47 (12.0) 0.47 (12.0) 2.52 (64.0) 0.28 (7.0) Rc 1/4

NW16

1.18 (30.0) 1.54 (39.0) 1.54 (39.0) 1.26 (32.0)

M4-6

3.52 (89.5) 2.68 (68.0) 0.43 (11.0)-

1.77 (45.0) 0.18 (4.5) Rc 1/8

NW25

1.57 (40.0) 1.69 (43.0) 1.69 (43.0) 1.57 (40.0)

M5-8

3.78 (96.0) 3.13 (79.5) 0.45 (11.5)-

2.05 (52.0) 0.20 (5.0) Rc 1/8

NW40

2.17 (55.0) 1.97 (50.0) 1.97 (50.0) 1.57 (40.0)

M5-8

4.31 (109.5) 3.13 (79.5) 0.45 (11.5)-

2.05 (52.0) 0.20 (5.0) Rc 1/8

NW50

2.95 (75.0) 2.76 (70.0) 2.76 (70.0) 1.97 (50.0)

M5-8

5.35 (136.0) 3.76 (95.5) 0.47 (12.0)-

2.52 (64.0) 0.28 (7.0) Rc 1/4

NW16

1.18 (30.0) 1.54 (39.0) 1.54 (39.0) 1.26 (32.0)

M4-6

3.52 (89.5) 2.68 (68.0)-

0.31 (8.0) 1.77 (45.0) 0.18 (4.5) Rc 1/8

NW25

1.57 (40.0) 1.69 (43.0) 1.69 (43.0) 1.57 (40.0)

M5-8

3.78 (96.0) 2.93 (74.5)-

0.45 (11.5) 2.05 (52.0) 0.20 (5.0) Rc 1/8

NW40

2.17 (55.0) 1.97 (50.0) 1.97 (50.0) 1.57 (40.0)

M5-8

4.31 (109.5) 2.93 (74.5)-

0.45 (11.5) 2.05 (52.0) 0.20 (5.0) Rc 1/8

NW50

2.95 (75.0) 2.76 (70.0) 2.76 (70.0) 1.97 (50.0)

M5-8

5.35 (136.0) 3.76 (95.5)-

0.47 (12.0) 2.52 (64.0) 0.28 (7.0) Rc 1/4

L2

H

H1

H2

H3

S

T

PFA Weld Fittings

M-depth LM

3.52 (89.5) 1.69 (43.0) 0.43 (11.0) 0.31 (8.0) 1.77 (45.0) 0.18 (4.5) Rc 1/8

Antistatic Unit

71

IVBL Series (50A-100A) Manual Type

H2
φB

H1
H

φA

L1

φA
L

Type

Connection

IVBL50MA-NWF

NW50

IVBL65MA-NWF

NW63

IVBL80MA-NWF

NW80

IVBL100MA-NWF

NW100

A

B

L

L1

H

H1

Unit: inch (mm)H22.95(75.0)
3.43(87.0)
4.49(114.0)5.28(134.0)3.15(80.0)
3.94(100.0)3.94(100.0)4.92(125.0)2.76(70.0)
3.46(88.0)
4.13(105.0)5.12(130.0)2.76(70.0)
3.46(88.0)
4.13(105.0)5.12(130.0)7.05(179.0)8.31(211.0)9.33(237.0)11.30(287.0)2.56(65.0)
2.87(73.0)
3.23(82.0)
3.98(101.0)1.57(40.0)
1.57(40.0)
1.57(40.0)
2.17(55.0)

IVBL Series (50A-100A) Pneumatic Type
M
S

H3
H1
H2

φA

H

L1

φA
L

72

Type

Connection

IVBL50SCA-NWF

NW50

IVBL65SCA-NWF

NW63

IVBL80SCA-NWF

NW80

IVBL100SCA-NWF

NW100

IVBL50SDA-NWF

NW50

IVBL65SDA-NWF

NW63

IVBL80SDA-NWF

NW80

IVBL100SDA-NWF

NW100

A

L

L1

H

H1

H2

2.95
(75.0)
3.43(87.0)
4.49(114.0)5.28(134.0)2.95(75.0)
3.43(87.0)
4.49(114.0)5.28(134.0)2.76(70.0)
3.46(88.0)
3.86(98.0)
5.12(130.0)2.76(70.0)
3.46(88.0)
3.86(98.0)
5.12(130.0)2.76(70.0)
3.46(88.0)
3.86(98.0)
5.12(130.0)2.76(70.0)
3.46(88.0)
3.86(98.0)
5.12(130.0)4.96(126.0)5.98(152.0)6.57(167.0)8.74(222.0)4.96(126.0)6.30(160.0)6.93(176.0)9.06(230.0)2.80(71.0)
3.60(91.5)
3.60(91.5)
4.25(108.0)2.80(71.0)
3.03(77.0)
3.03(77.0)
3.58(91.0)

0.77(19.5)
0.91(23.0)
0.91(23.0)
0.98(25.0)
0.77(19.5)
0.75(19.0)
0.75(19.0)
0.77(19.5)

H3
0.57(14.5)
0.47(12.0)
0.47(12.0)
0.57(14.5)

S

Unit: inch (mm)M

3.03
(77.0)
3.86(98.0)
3.86(98.0)
4.61(117.0)3.03(77.0)
2.52(64.0)
2.52(64.0)
3.03(77.0)

Rc 1/4Rc 3/8Rc 3/8Rc 3/8Rc 1/4
Rc 1/4
Rc 1/4
Rc 1/4IVBH

The IVBH series vacuum valves have built-in spiral heaters that follow the move-

Heated Vacuum Isolation Valvein either the open or closed state. These valves eliminate cold spots because heatis applied not only from an external heater but also from the inside of the bellows,which will reduce byproduct buildup. The internal and external heaters have individual channels and can heat independently to an arbitrary temperatures up to
180°C. In addition, a magnetic proximity open/close switch, and thermostat areavailable as options.

◎ Because of the internal heater, byproduct adhesion to the O-ring seal surface is reduced, and long-term seal performance can be maintained.
◎ Buildup on the bellows surface is reduced, so there will be less residue fallout when the bellows moves, resulting in minimal particle generation.
◎ Reduced buildup getting caught in the bellows surface, resulting in higher durability bellows.(1 million cycles, actual results)◎ The connecting flanges are chosen from variety of industry standard fittings, including ISO/KF, JIS VF/VG, ConFlat flange, and ISO MF connections.
◎ Electrical wires for the heater, thermocouples, thermostat (optional), and proximity sensor (optional) may be furnished with user specified connectors.
◎ In addition, special specifications, such as unique brackets, non-standard face-to-face dimension, special flanges, special materials (body, bellows, seal materials), and air fittings can be accommodated.

Ultra High Purity Fittings■Features

Uitra High Purity Valves

ment of the bellows, and the valve and the bellows can be heated with the valve■Specifications

Temperature Control Method
Pressure Range

1.4x10-10~29 psia (1x10-6 ~2x105 Pa (abs) [0.1MPa (G)])
Body/SUS304
Bellows/SUS316L
Actuator/A6063 (magnet for magnetic proximity switch built-in)
Seat/fluorine rubber *Other materials not listed may be available.

Standard Materials
Bellows/internal Heater
Durability
Actuation Pressure

Actual results from more than 1,000,000 cycles (internal vacuum state) in an electrified state (the bellows durability performancedrops when it is used on the pressurized side).
58~101 psig ( 0.4~0.7MPa (G))

Across the Seat
He Leak Rates
Inboard He Leak
Rates

Size
Orifice (inch(mm))
Valve Lift (inch(mm))≤ 1x10-9 sccs (≤ 1x10-10 Pa·m3/s)

25A

40A

IVBH Series
50A

80A

100A

0.91
(23.0)
0.47(12.0)

1.57(40.0)
0.79(20.0)

1.89(48.0)
0.98(25.0)

2.76(70.0)
1.18(30.0)

3.78(96.0)
1.57(40.0)

11.0

38.0

65.0

135.0

100.0

100.0

100.0

100.0

100.0

/

200.0

80.0

106.0

106.0

120.0

172.0

/

212.0

80.0

120.0

120.0

250.0

354.0

/

300.0

13

56

70

136

PFA Weld Fittings

Conductance (ℓ/s)
Heater Voltage (AC V)
Internal Heater Power (W)External Heater Power (W)Cylinder Volume (cc) (NC/NO)
Cylinder Volume (cc) (DA)
Heater Cord Length (ft(m))≤ 1x10-9 sccs (≤ 1x10-10 Pa·m3/s)

PFA Valves

Allowable
LeakageVacuum Components

Maximum Heating Temperature

Controller set temperature: NC/max 180°C, DA/max 180°C (External heater: Max 150°C, internal heater: max 180°C)
Actuator: Max 70°C
* Please choose an actuator fitting and gasket material to match the heating temperature.
* The maximum heating temperature will vary depending on the type of valve.
For details, please ask to the sales representatives.
Temperature controller with K-type thermocouple

320.0

295

-

21

26

50

112

16.4 (5)16.4 (5)16.4 (5)9.8 (3)9.8 (3)■Precautions
Antistatic Unit

① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

73

Product Code Table
Model

Size

Operation

Valve
Shape

Connection Connection Seat Material
Custom(Seat Side)Specifications Accessories Accessories
Specific
Code

Bellows Seal
Hot Valve

C: Normally Closed A: Angle TypeNot Shown:
NW: ISO KF Flange Same Cases As Fluorine Rubber Standard Products Not Shown: No
D: Double Acting Y: Y-shape Straight VF: JIS VF Flange (Seat Side) Omitted
are Omitted
SwitchWith PD31L3
O: Normally Open Z: Z-shape Inline VG: JIS VG Flange F: JIS VF Flange
SO: With Switch On the Switch
Open Position
PE:
CF: ConFlat Flange G: JIS VG Flange
SC: With Switch On the With PE33L3
MF: ISO MF Flange
Closed Position
Switch
W: With Open and* We handle materials and shapes other than those noted.
* A thermostat can be attached to an external heater to prevent eddy heating.
Colsed Position

Not Shown:
Not RoHS
Compliant(RS):
RoHS Compliant
Product* Confirm the specifications for the heater, thermocouple and thermostat cable connectors with the sales representative.

IVBH Series (25A-100A) Pneumatic Type

S1

M

S3

S2

S

H1
H

φA
L1

φA

Type
IVBH25CA-NWF
IVBH40CA-NWF
IVBH50CA-NWF
IVBH80SCA-NWF
IVBH100SCA-NWF
IVBH40DA-NWF
IVBH50DA-NWF
IVBH80SDA-NWF
IVBH100SDA-NWF

74

Diameter of Opening

A

L

L1

NW25

1.57 (40.0)

1.97 (50.0)

1.97 (50.0)

NW40

2.17 (55.0)

2.56 (65.0)

2.56 (65.0)

NW50

2.95 (75.0)

2.76 (70.0)

NW80

4.49 (114.0)

3.86 (98.0)

H

H1

L

Unit: inch (mm)
S3
M

S

S1

S2

6.57 (167.0) 4.06 (103.0)

2.05 (52.0)

1.95 (49.5)

2.17 (55.0)

2.24 (57.0)

Rc 1/87.60 (193.0) 5.24 (133.0)

3.03 (77.0)

2.70 (68.5)

2.17 (55.0)

3.31 (84.0)

Rc 1/42.76 (70.0)

7.99 (203.0) 5.43 (138.0)

3.03 (77.0)

2.60 (66.0)

2.17 (55.0)

3.31 (84.0)

Rc 1/4

3.86 (98.0)

9.51 (241.5) 6.44 (163.5)

3.86 (98.0)

3.19 (81.0)

2.17 (55.0)

4.09 (104.0)

Rc 3/8NW100

5.28 (134.0) 5.12 (130.0) 5.12 (130.0) 12.52 (318.0) 8.54 (217.0) 4.61 (117.0)

3.78 (96.0)

2.17 (55.0)

4.86 (123.5)

Rc 3/8NW40

2.17 (55.0)

2.56 (65.0)

2.56 (65.0)

4.74 (120.5)

2.38 (60.5)

2.05 (52.0)

2.70 (68.5)

2.17 (55.0)

2.24 (57.0)

Rc 1/8NW50

2.95 (75.0)

2.76 (70.0)

2.76 (70.0)

5.14 (130.5)

2.58 (65.5)

2.05 (52.0)

2.70 (68.5)

2.17 (55.0)

2.24 (57.0)

Rc 1/8NW80

4.49 (114.0)

3.86 (98.0)

3.86 (98.0)

5.89 (149.5)

2.81 (71.5)

2.52 (64.0)

3.21 (81.5)

2.17 (55.0)

2.80 (71.0)

Rc 1/4NW100

5.28 (134.0) 5.12 (130.0) 5.12 (130.0) 7.28 (185.0)

3.43 (87.0)

3.03 (77.0)

3.82 (97.0)

2.17 (55.0)

3.31 (84.0)

Rc 1/4

IVB/IVBL/IVBH

The IVB_X, VX series keep particles that are produced inside the chamber from ris-

Heated Vacuum Isolation Valvewith Slow Exhaust Valvepresses abrupt pressure fluctuation that occur when exhausting from air to vacuum,or when going back from vacuum to air. Fixed flow bypass valves and variable flow
bypass valves are available. These bypass valves are compatible with all IVB, IVBL,
and IVBH series valves except for the 15A size.

Ultra High Purity Fittings■Features◎ They help achieve reduced cost and space saving by integrating the conventional slow bypass line to the main valve.
◎ VX type bypass valve can change the conductance to reach optimal exhaust speed. Please refer to the table below for the adjustable range.
◎ By selecting high temperature resistant materials, these bypass valves can be used with IVBH series vacuum isolation valves in heated condition.
◎ Depending on the model of the vacuum isolation valve, multiple bypass valves can be attached. Please ask the sales representatives for details.

L-shape vacuum valve

A

A

P/C

P/C

Vacuum Components

A
A

P/C : Process chamberA: Soft exhaust valve: Air-operated valve for bypass use: Needle valve

P

Uitra High Purity Valvesing. By controlling the integrated bypass valve before opening the main valve, it sup-: Pump for exhaust pumpP

P

ExhaustExhaustConventional piping layout

Piping layout after use of soft exhaust valve

PFA Valves■Specifications
The valve specifications are the same as those of the main valve on which the bypass valve is based.
* However, if you choose to use a PCTFE seat with the bypass valve, the across the seat He leak rates will be 1x10-9 Pa m3/s or less.
Bypass valve specifications

Actuation Pressure

Fixed Flow Type NC
Fluorine rubber

Variable Flow Type NC
PCTFE

Fluorine rubber

PCTFE

1/4"

1/2"

1/4"

1/2"

1/4"

1/2"

1/4"

1/2"

0.3

0.85

0.3

0.85

0.03~0.28

0.05~0.74

0.03~0.28

0.05~0.74

0.039(1.00)

0.059(1.50)

0.039(1.00)

0.059
0.039(1.50)(1.00)
58~101 psig (0.4~0.7MPa (G))

0.059
(1.50)

0.039(1.00)

0.059(1.50)PFA Weld Fittings

Type
Seat
Size
Cv
Valve Lift

■Precautions① The variable flow bypass valves have a structure that adjusts the lift of the bellows' ON/OFF valve to control the flow; therefore the set amount of flow
may vary according to your usage conditions.
② The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
③ For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Antistatic Unit
75

Product Code Table
Model

Size

Main Valve Bypass Valve Bypass Valve Bypass Valve
Operation
Operation
Seat
Size

Main Valve Main Valve Main Valve
Connection (Seat Side) Connection
Seat

Valve
Shape

CustomSpecifications

Accessories

Accessories

RoHS

Specific
Code
IVB: Square Shaped
Bellows Valve
IVBL: Round Shaped
Bellows Valve
IVBH: Bellows Seal
Hot Valve

Not Shown:
VX: Variable Flow Not Shown: PCTFE
Normally Closed X: Fixed Flow
F: Fluorine Rubber
D: Double Acting
O: Nomally OpenNot Shown: ¼" Size
8: ½" Size

A: Angle TypeNW: ISO KF Flange
Cases Same As Seat Fluorine Rubber
Y: Y-shape Straight VF: JIS VF Flange
Side Are Omitted.
VG: VG: JIS VG Flange F: JIS VF Flange
CF: ConFlat Flange G: JIS VG Flange
MF: ISO MF FlangeStandard Products
Are Omitted

Not Shown:
Not Shown:
Not Shown:With PD31L3 Switch Not RoHS Compliant
No Switch
SO: With Switch on the PE:(RS):
Open Position
With PE33L3 Switch RoHS Compliant
SC: With Switch on the
Product
Closed Position
W: With Open and Closed
Position*1

We handle materials and shapes other than those noted.

IVB Soft Exhaust Valve (25A-50A)
NC Type (Variable Flow Type)TIVB Soft Exhaust Valve (25A-50A)
DA Type (Fixed Flow Type)

S
T

S

S
S

H3
M

H1

M

H2

H

H2

H1

H

Bypass valve

Bypass valve

M1

M1

φA

φA

φD

φD

L1
L1
φA
φA

L2

■ Dimensions

L2

Unit: inch (mm)Type
IVB25 (V) X (F) (8) A-NWF
IVB40 (V) X (F) (8) A-NWF
IVB50 (V) X (F) (8) A-NWF
IVB25D (V) X (F) (8) A-NWF
IVB40D (V) X (F) (8) A-NWF
IVB50D (V) X (F) (8) A-NWF

Diameter ofOpening

A

L

L1

H

H1

H2

H3

M

S

T

NW25

1.57 (40.0)

1.69 (43.0)

1.69 (43.0)

5.22 (132.5)

3.13 (79.5)

0.45 (11.5)-

Rc 1/82.05 (52.0)

0.20 (5.0)

NW40

2.17 (55.0)

1.97 (50.0)

1.97 (50.0)

5.47 (139.0)

3.13 (79.5)

0.45 (11.5)-

Rc 1/82.05 (52.0)

0.20 (5.0)

NW50

2.95 (75.0)

2.76 (70.0)

2.76 (70.0)

6.42 (163.0)

3.76 (95.5)

0.47 (12.0)-

Rc 1/42.52 (64.0)

0.28 (7.0)

NW25

1.57 (40.0)

1.69 (43.0)

1.69 (43.0)

4.25 (108.0)

2.15 (54.5)

0.45 (11.5)

0.45 (11.5)

Rc 1/82.05 (52.0)

0.20 (5.0)

NW40

2.17 (55.0)

1.97 (50.0)

1.97 (50.0)

4.51 (114.5)

2.15 (54.5)

0.45 (11.5)

0.45 (11.5)

Rc 1/82.05 (52.0)

0.20 (5.0)

NW50

2.95 (75.0)

2.76 (70.0)

2.76 (70.0)

5.04 (128.0)

2.38 (60.5)

0.47 (12.0)

0.47 (12.0)

Rc 1/42.52 (64.0)

0.28 (7.0)■ Dimensions
Type
Size

Fixed Flow X Series
1/4"

Seat material
25A
40A
50A

L2
D
M1

76

L

L

Variable Flow VX Series
1/2"

Fluorine
PCTFE
Rubber
3.17 (80.5)

Fluorine
Rubber
-3.17 (80.5)

3.43 (87.0)

3.37 (85.5)

3.62 (92.0)

1.54 (39.0)

1/4"

1/2"

-

Fluorine
PCTFE
Rubber3.52 (89.5)

Fluorine
Rubber
3.78 (96.0)

3.50 (89.0)

3.52 (89.5)

3.78 (96.0)

3.82 (97.0)

3.70 (94.0)

3.72 (94.5)

3.98 (101.0)

4.02 (102.0)

PCTFE

1.89 (48.0)
Rc 1/81.73 (44.0)

PCTFE
-

2.13 (54.0)

Ultra High Purity Fittings

T

Uitra High Purity Valves

IVBL Vacuum Isolation Valves with Bypass (65A-100A) Pneumatic Type (Variable Flow Type)

S

H3
M

H1

H2

H

Vacuum Components

φA

Bypass valve
M1
L1
φD

φA

L2

Type

End Connection
NW63

IVBL80S (V) X (F) (8) A-NWF

NW80

IVBL100S (V) X (F) (8) A-NWF

NW100

IVBL65SD (V) X (F) (8) A-NWF

NW63

IVBL80SD (V) X (F) (8) A-NWF

NW80

IVBL100SD (V) X (F) (8) A-NWF

NW100■Dimensions

Type
Size
Seat Material

M1

H

H1

H2

3.43
(87.0)
4.49(114.0)5.28(134.0)3.43(87.0)
4.49(114.0)5.28(134.0)3.86(98.0)
3.86(98.0)
5.12(130.0)3.86(98.0)
3.86(98.0)
5.12(130.0)3.86(98.0)
3.86(98.0)
5.12(130.0)3.86(98.0)
3.86(98.0)
5.12(130.0)5.98(152.0)6.57(167.0)8.74(222.0)6.30(160.0)6.93(176.0)9.06(230.0)3.60(91.5)
3.60(91.5)
4.25(108.0)3.03(77.0)
3.03(77.0)
3.58(91.0)

0.91(23.0)
0.91(23.0)
0.98(25.0)
0.75(19.0)
0.75(19.0)
0.77(19.5)

Fixed Flow X Series
1/4"

80A

-

-

100A

-

-

-

1.54
(39.0)

M-

Rc 3/8-Rc 3/8-Rc 3/8

0.35
(9.0)
0.35
(9.0)
0.43
(11.0)

Rc 1/4
Rc 1/4
Rc 1/4

Unit: inch (mm)ST
3.86
(98.0)
3.86(98.0)
4.61(117.0)2.52(64.0)
2.68(68.0)
3.03(77.0)

0.24
(6.0)
0.24
(6.0)
0.26
(6.50)
0.28
(7.0)
0.28
(7.0)
0.28
(7.0)

Variable Flow VX Series
1/2"

PCTFE

H3

Fluorine Rubber
4.43(112.5)
4.43(112.5)5.12(130.0)

1/4"
PCTFE
4.51
(114.5)
4.51(114.5)

1/2"

Fluorine Rubber

PCTFE

-

-

-

-

5.16
(131.0)-1.89(48.0)

1.73(44.0)

Fluorine Rubber
4.78(121.5)
4.78(121.5)5.47(139.0)PCTFE
4.84(123.0)4.84(123.0)Antistatic Unit

D

L1

Fluorine Rubber
3.96(100.5)65A
L2L

PFA Weld Fittings

IVBL65S (V) X (F) (8) A-NWFAPFA Valves■DimensionsL

2.13(54.0)

Rc 1/877

IVBH Vacuum Isolation Valves (40A and 50A)
Pneumatic Type (Variable Flow Type)IVBH Vacuum Isolation Valves (80A and 100A)
Pneumatic Type (Variable Flow Type)

T

S

T

H3

S

M
H3

M
H2

H1

H1
H2
H

H

Bypass valve
M1

Bypass valve
φA

φD

φA

M1
L1

L1

φD
φA

φA

■Dimensions
Type

L2

L

Connection

A

L

L1

H

H1

H2

H3

2.17
(55.0)
2.95(75.0)
4.49(114.0)5.28(134.0)2.17(55.0)
2.95(75.0)
4.49(114.0)5.28(134.0)2.56(65.0)
2.76(70.0)
3.86(98.0)
5.12(130.0)2.56(65.0)
2.76(70.0)
3.86(98.0)
5.12(130.0)2.56(65.0)
2.76(70.0)
3.86(98.0)
5.12(130.0)2.56(65.0)
2.76(70.0)
3.86(98.0)
5.12(130.0)7.60(193.0)7.99(203.0)9.55(242.5)12.52(318.0)4.70(119.5)5.53(140.5)5.89(149.5)7.28(185.0)2.80(71.0)
2.99(76.0)
3.60(91.5)
4.25(108.0)2.34(59.5)
2.54(64.5)
2.78(70.5)
3.39(86.0)

0.77(19.5)
0.77(19.5)
0.91(23.0)
0.98(25.0)
0.45(11.5)
0.45(11.5)
0.47(12.0)
0.57(14.5)

0.57(14.5)
0.57(14.5)
0.65(16.5)
0.83(21.0)
0.45(11.5)
0.45(11.5)
0.47(12.0)
0.57(14.5)

IVBH40 (V) XF (8) A-NWF

NW40

IVBH50 (V) XF (8) A-NWF

NW50

IVBH80S (V) XF (8) A-NWF

NW80

IVBH100S (V) XF (8) A-NWF

NW100

IVBH40D (V) XF (8) A-NWF

NW40

IVBH50D (V) XF (8) A-NWF

NW50

IVBH80SD (V) XF (8) A-NWF

NW80

IVBH100SD (V) XF (8) A-NWF

NW100

L2

■Dimensions
Type
Size
Seat Material
40A
50A
L2
80A
100A
D
M1

78

1/4"

L

M
Rc 1/4
Rc 1/4Rc 3/8Rc 3/8Rc 1/8Rc 1/8Rc 1/4
Rc 1/4

Unit: inch (mm)ST
3.03
(77.0)
3.03(77.0)
3.86(98.0)
4.61(117.0)2.05(52.0)
2.05(52.0)
2.52(64.0)
3.03(77.0)

Unit: inch (mm)Variable Flow VX Series
1/4"
1/2"

Fixed Flow X Series
1/2"
Fluorine rubber-

4.02 (102.0)

4.11 (104.5)

3.76 (95.5)

4.02 (102.0)

4.11 (104.5)

4.37 (111.0)

4.25 (108.0)

4.43 (112.5)

4.41 (112.0)

4.78 (121.5)--

1.54 (39.0)

4.37 (111.0)

5.53 (140.5)
1.73 (44.0)

Rc 1/8

0.28
(7.0)
0.28
(7.0)
0.24
(6.0)
0.26
(6.5)
0.20
(5.0)
0.20
(5.0)
0.16
(4.0)
0.28
(7.0)

■Template for Determining the Right Specifications
Uitra High Purity Valves

L-type Vacuum Bellows Valve Specifications
1: Valve size

= 15A·25A·40A·50A·65A·80A·100A

2: Connection= ISO-KF·MF(ISO)·VF/VG(Old JIS)·ICF·other

3: Valve shape= L-shape·Y-shape ·Z-shape

4: Face-to-face dimensions= inch (mm)5: Pressure Range= Standard =1×10-6~2×105 Pa(abs) [0.1 MPa(G)]6: Valve differential pressure resistance = Standard = Within usage pressure range= manual, pneumatic (normally closed, normally open, double acting)

8: Cycle life

= number of times

9: Actuation Pressure= 58~101 psig (0.4~0.7 MPa (G))

Ultra High Purity Fittings

7: Actuation

10: Material(1): Body= Standard = SUS304, Option = SUS316L, etc.

(2): Bonnet= Standard = SUS304(3): Bellows flange, ring

= Standard = SUS304, Option = Inconel, Hastelloy, etc.

(4): Bellows= Standard = SUS316, Option = Inconel, Hastelloy, etc.

(5): Gasket= Standard = Viton, Option = Karlez, etc.

11: Leak rate
= Standard = 1×10-10 Pa·m3/s or less(2): Internal Inspection leak volume= Standard = 1×10-10 Pa·m3/s or less

12: Usage environment= pressure, temperature

Vacuum Components(1): External Inspection leak volume

13: Conditions of parts that come into contact with gas = material, temperature, surface treatment designation, etc.
14: Bypass valve= yes or no(1): Bypass valve size

= 1/4"·1/2"(2): Bypass valve category= fixed or variable (variac valve with flow adjustment)(3): Bypass valve seat material= Recommendation = fluorine rubber, PCTFE, etc.
= Max 3, depending on type of main valve= hot or room temperature(1): Set temperature= inside ○○˚C outside ○○˚C(2): Uniformity of heating= place, conditions ± note(3): Number of channels= if not designated, we will choose.

(4): Heater category= if not designated, we will choose.

(5): Supply power source= standard = 100V(6): Thermocouple type= if not designated, we will choose.

PFA Valves(4): Number of bypass valves
15: Around the heater(7): Prevention of excessive temperature rise = with or without a thermostat, temperature, location, etc.
(8): Thermostat temperature== automatic recovery, manual recovery, normally closed/open(10): Bellows internal TC= 1 or 2(11): Insulating material= category, surface temperature limits, outgassing, particle conditions, etc.

(12): Heat cycle= timeframe, number of times, temperature (closed state 2 times per month, 200 ➡ room temperature ➡ 200, etc.)(13): Temperature rising time

= if not designated, we will choose.

(14): Connector processing= TC, heater, thermostat, sensor, etc.

PFA Weld Fittings(9): Thermostat category

18: With, without open/close sensor(s) = yes or no(1): Number of sensors= 1 open or close position, 2 both position= PD31L3 (contact point) PE33LE (contactless)=

20: Required verification=

Antistatic Unit(2): Types of sensors
19: Shipping inspection items

21: Other requests for specifications =79

IVBH-C015

PID Controlled Digital Temperature
Controller for IVBH Series

The IVBH-C015 is a digital temperature controller for use with the L-type heatedvacuum isolation valve.
One controller is capable of simultaneously controlling the temperatures of boththe internal heater and the external heater channels.

■Specifications(Panel cut dimensions)Temperature control range :Room temperature-max 180°C					Temperature sensor:K-type thermocouple					Heater rating:AC 100V internal heater400W/external heater 400W					:AC 200V internal heater 800W/ external heater 800W					Power source:AC 100V/200V					Warning signal output:Heater malfunction reports 1a output for each heater				(Reports heater disconnection and overheating)					Warning display:A buzzer sounds and a lamp lights up when there is aheater disconnection or overheating malfunction.
(Independent warnings203
for internal and external heaters;Thebuzzercanbeturnedoff)					3Safety mechanism:Internal and external heaters can be individuallyinterrupted when there is a heater malfunction
Power interrupt function upon current surge or shortOperating environment:0-50°C, 45-85%RH
111
103
Open/close display:Valve position detected by magnetic proximity switch
3(Panel cut dimensions)

14

212

264.5
9.5

14

2 10

255

203
3
(Panel cut dimensions)

111

103

3
(Panel cut dimensions)

14

212

264.5
9.5

80

255

14

2 10

For Open/Close Display Use
Magnetic Proximity Switch

A magnetic proximity switch can be installed on the IVB, IVBL, and IVBH series

Uitra High Purity Valvespneumatic valves (NC, NO, DA) for detecting the open/close state of the valve.

IVB Series Options

PE33L3

PD31L3Ultra High Purity Fittings

Contactless Switch
DC5~28V
DC: 28V or lower
0.1~40mA
0.5V or lower
50 µA or lower (DC24V)≤ 1 ms≤ 1 ms100 MΩ or more at DC500VM(between case and cord)

Insulation Resistance
Voltage Resistance
Shock ResistanceVibration ResistanceAmbient Temperature

Protective Structure
Output Protection Circuit
Display Light
Compatible Loading

IP 67 (IEC standard), JIS C0920
Yes
Red LED (lights when ON)
Small-scale relay, programmable controller

Diode(Brown) DC5~28V
28V/Max10mA(Black) output
0.1~40mA

SwitchMaincircuitZener diode(Blue) GND

Magnetic proximity switch (PE33L3) with 3m cord

Voltage Resistance
Shock ResistanceVibration ResistanceAmbient Temperature
Connection Method
Protective Structure
Display Light
Compatible Loading

3V or lower
0μA≤ 1 ms≤ 1 ms100 MΩ or more at DC500VM(between case and cord)
AC 1500V 1 minute (between case and cord)
294m/s2
Multiple amplitudes 1.5 mm, 10-55 Hz(2 hours in each of X, Y, and Z directions)
0ºC to +70°C (with no condensation)
PVC 0.2 mm2, 2 leads,
outer diameter φ2.6 mm
IP 67 (IEC standard), JIS C0920
Red LED (lights when ON)
Small-scale relay, programmable controller

Note) When using inductive loading (relays, etc.), be sure to attach a protective circuit(SK-100) l to the oad.

AC 110V
5~20mA
DC24V
Light emitting diode(Brown) 5~40mA

Lead switch(Blue)PFA Weld Fittings

Light emitting diode294m/sMultiple amplitudes 1.5 mm, 10-55 Hz(2 hours in each of X, Y, and Z directions)
0ºC to +70°C (with no condensation)
PVC 0.15 mm2, 3 leads,
outer diameter φ2.6mm
2Insulation Resistance

DC: 24V, AC: 110V
DC:5~40mA AC:5~20mA

PFA Valves

Connection Method

AC 1500V 1 minute (between case and cord)

Contact Point Switch
Load Voltage Range
Load Current Range
Internal Voltage Drop
Current Leakage
Reaction Time
Recovery Time

Vacuum Components

Power Supply Voltage Range
Load Voltage Range
Load Current Range
Internal Voltage Drop
Current Leakage
Reaction Time
Recovery Time

GND

Magnetic proximity switch (PD31L3) with 3m cord

Antistatic Unit
81

BRW/BRWH

BRW/BRWH is compact valve which has simple structure. It makes piping easily.
A ball rotates 90 degrees with the stem as an axis in the body.

NW Flange Ball Valve
Heated Ball Valve■Features◎ BRW/BRWH has full-bore structure, and it makes high flow with low resistance.
◎ BRW/BRWH can be disassembled and cleaned. Replacement of packing is also possible.
◎ Removable mantle heater is available for BRWH.

■Specifications▲ Heated Ball Valve with a Mantle Heater

Fluid Temperature

Room temperature~+200°C
25A: Manual 165°C, Pneumatic 160°C
40A, 50A : Manual 180°C, Pneumatic 170°C
Please contact our sales representive for details.
VAC~87 psia (VAC~6×105 Pa (abs)) [0.5MPa (G)]Body/SUS304 Body·Flange/SCS13A
Ball/SUS304
Stem/SUS304
Ball seat/HYPATITE PTFE®
Packing·gasket/Kalrez 8900®
58~101 psig (0.4~0.7MPa(G))

Maximum Heating Temperature(Heated Ball Valve)
Pressure Range

Standard Materials

Actuation Pressure

All brand names and product names are registered trademarks of their respective companies.

Size
Conductance (ℓ/s)

15A

25A

BRW Series
40A
50A

65A

100A

25A

BRWH Series
40A

50A

5

17

54

195

538

12

46

105

125

■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.
③ The ball valve has possibility to loosen at the outer axis seal, therefore, please re-tighten it periodically.
④ This valve is not suitable for use in location that require high durability, and high vacuum sealed.
⑤ This valve is oil free product. The ball sealing part and axis sealing part may deteriorate after several thousand openings and closings. Therefore sealing
parts should be replaced new one periodically.

82

Product Code Table
Size

Operation

BRW

25

M

BRW: Ball Valve
BRWH: Heated Ball Valve

15:15A
25:25A
40:40A
50:50A
65:65A
100:100A

M: Manual
D: Double Acting

Valve Shape

S: Straight

Connection

Seat Material

Packing and Gasket
Material

NW

H

T

NW: ISO KF Flange
MF: ISO MF Flange*2

H: HYPATITE PTFE®

T: Kalrez 8900®

Uitra High Purity Valves

Model

OptionNot Shown: Standard
M: With Mantle Heater*1*1 The size of 25A, 40A and 50A are available when the valve comes with mantle heater.
*2 Select ISO MF Flange if the flange size is 65A or 100A.

Ultra High Purity Fittings

BRW series Manual
E

H

φA
H1

L

Type

Connection

BRW25MS-NWHT

NW25

BRW40MS-NWHT

NW40

BRW50MS-NWHT

NW50

L

H

H1

3.390
(86.0)
4.490(114.0)4.760(121.0)6.299(160.0)6.420(163.0)6.850(174.0)1.437(36.5)
1.890(48.0)
2.130(54.0)

C

H2
-

A

B

C

1.575
(40.0)
2.170(55.0)
2.950(75.0)

1.496(38.0)
1.929(49.0)
2.19(55.5)

2.870(73.0)
3.74(95.0)
4.21(107.0)P-

Unit: inch (mm)
E
E1
6.300
(160.0)9.060(230.0)9.060(230.0)-PFA Valves

BRW series Double Acting
E

Vacuum Components

B

E1

PFA Weld Fittings

P

H2

H

φA
H1
B

C
L

Connection

BRW25DS-NWHT

NW25

BRW40DS-NWHT

NW40

BRW50DS-NWHT

NW50

L

H

H1

H2

A

B

C

3.390
(86.0)
4.490(114.0)4.760(121.0)10.689(271.5)
13.580(345.0)14.090(358.0)1.437(36.5)
1.890(48.0)
2.130(54.0)

6.500(165.0)8.540(217.0)8.820(224.0)1.575(40.0)
2.170(55.0)
2.950(75.0)

1.496(38.0)
1.929(49.0)
2.19(55.5)

2.870(73.0)
3.74(95.0)
4.21(107.0)

P
Rc1/4
Rc1/4
Rc1/4

Unit: inch (mm)
E
E1
4.21
(174.0)8.43(214.0)8.43(214.0)1.969(50.0)
2.130(54.0)
2.130(54.0)

83

Antistatic Unit

Type

IVWF

The IVWF series shutoff valves have a simple structure, and can be installed in thevacuum exhaust line of a semiconductor tools.

Vacuum Butterfly Valves

The valve shuts off flow when rotating the flapper type valve mechanism 90°.

■Features◎ These valves feature compact size and light weight due to their simple structure, and attaching one of these valves is easy.
◎ Minimal face-to-face dimension makes it easy to install in the tight space.
◎ The manual valves control the amount of flow by adjusting the degree of opening and can be set to an arbitrary degree of opening by fixing a lock screw.
◎ The structure of the throttle valves enables the degree of opening to be reproduced by graduations on the micrometer handle, and micro-adjustments is madepossible by a differential screw mechanism.

■Specifications
Size
Orifice Inch(mm)Pressure Range
Maximum Pressure Differential at the Seat
Fluid Temperature
Across the Seat He Leak
Rates
Leak Rates*
Inboard He Leak Rates
Cycle Life*
Connection
Actuation Pressure
Actuator Section(DA Type Pneumatic
Actuation
Valve Only)
Operating Temperature

25A

φ1.30 (33.0)

50A

80A

φ2.02 (51.3)

100A

φ3.07 (78.0)

φ3.94 (100.0)

1.4x10-10~29psia (1x10-6 ~2x105 Pa (abs) [0.1MPa(G)])
14.6 psig (0.101 MPa(G)) (Positive / Back Pressure)-15~100ºC≤ 1×10 sccs (≤ 1×10-10 Pa·m3/s)-9≤ 1×10-9 sccs (≤ 1×10-10 Pa·m3/s)
Results of 100,000 cycles or more at atmospheric pressure (room temperature)
Compatible with ISO KF flange, JIS VF/VG flange, and other standard connections
58~101 psig (0.4~0.7MPa (G))
Double acting-20~60ºC* Helium leak rates and cycle life of the products depend on the usage conditions. e.g. temp/media/pressure.

ProductÊCodeÊTable
Model

Size

I-shapeÊVacuum
ButterflyÊValve

Operation

M:ÊManual
SD:ÊDoubleÊÊÊÊÊÊÊActing
F:ÊÊFlowÊControl

ValveÊ
Model

Connection Connection
Ê(SeatÊSide)SeatÊ
Material

Straight

NW:ÊISOÊKFÊFlange SameÊCasesÊAsÊ FluorineÊRubber
VF:ÊJISÊVFÊFlange SeatÊSideÊOmitted
VG:ÊJISÊVGÊFlange F:ÊJISÊVFÊFlange
CF:ÊConFlatÊFlange G:ÊJISÊVGÊFlange

CustomÊ
Specifications
Speciﬁccode

ProximityÊ
SwitchStandardÊProductsÊ NotÊDisplayed:NoÊSwitchAreÊOmitted
SO:WithÊSwitchÊonÊFullyÊOpenÊSide
SC:WithÊSwitchÊonÊFullyÊClosedÊSide
W:WithÊFullyÊOpen/fullyÊClosedÊSwitches*ÊWeÊhandleÊmaterialsÊandÊshapesÊotherÊthanÊthoseÊnoted.
*ÊWeÊalsoÊhandleÊtheseÊvalvesÊwithÊheatersÊattachedÊasÊspecialÊorderÊitems.ÊForÊdetailsÊpleaseÊaskÊtoÊtheÊsalesÊrepresentative.Ê
※PneumaticÊonly

ProximityÊSwitchÊ
Categories

Open/CloseÊDisplayÊPlate※

NR:PD31L3
SwitchÊwithÊContacts(2Êwires)
NS:PE34L3
ContactlessÊSwitch(2Êwires)OC:WithÊOpen/CloseÊ
ÊDisplayÊPlateNotÊShown:
WithoutÊ
Open/CloseÊ
DisplayÊPlate

Installation direction■Precautions① The valves are not guaranteed to function if their exterior is submerged
inside a vacuum.
② For high temperature applications, please select appropriate material
for air-fittings and tubes to assure proper performance.
③ For atmospheric release applications, contact your sales representative.
④ Seal (A) affixed to the valve body shows the direction in which higher
vacuum is retained during the process using the valve. Place the parts
requiring high vacuum on the side marked "HIGH VACUUM SIDE". To
maintain the chamber at high vacuum, place the chamber on the "HIGHVACUUM SIDE" and the pump on the opposite side.

84

Seal O-ring▼ Seal (A)Place parts requiring high vacuum on this side

(25A, 50A) ISO-KF Flanges

Uitra High Purity Valves■IVWF Series Manual Valves ISO-KF Flanges(80A, 100A) ISO-KF Flanges

φE

φE

L
D

φH

φH

Ultra High Purity Fittings

B

φJ

φJ

F
A

I
G

Connection

IVWF25MS-NW40

25A

IVWF50MS-NW

50A

IVWF80MS-NW

80A

IVWF100MS-NW

100A

A

B

E

J

H

3.54
(90.0)
4.72(120.0)6.30(160.0)7.28(185.0)5.12(130.0)6.30(160.0)8.86(225.0)9.84(250.0)2.28(58.0)
2.28(58.0)
3.15(80.0)
3.15(80.0)

2.17(55.0)
2.95(75.0)
4.49(114.0)5.28(134.0)1.30(33.0)
2.02(51.3)
3.07(78.0)
3.94(100.0)G
3.15(80.0)
4.02(102.0)IF

2.28(58.0)
2.28(58.0)
2.99(76.0)
2.95(75.0)

0.79(20.0)
0.79(20.0)
0.79(20.0)
0.79(20.0)

Unit: inch (mm)LD
2.17
(55.0)
2.17(55.0)

0.39(10.0)
0.39(10.0)
0.39(10.0)
0.39(10.0)

Vacuum Components

Type■IVWF Series Manual Valves JIS VF/VG Flanges(25A, 50A) JIS VF/VG Flanges(80A, 100A) JIS VF/VG Flanges
PFA Valves

φE

φE

nXφh

nXφh

φC

φC

PFA Weld Fittings

φH
φH

Connection

IVWF25MS-V□

25A

IVWF50MS-V□

50A

IVWF80MS-V□

80A

IVWF100MS-V□

100A

A

B

E

H

C

G

F

3.54
(90.0)
4.72(120.0)6.30(160.0)7.28(185.0)5.12(130.0)6.30(160.0)8.86(225.0)9.84(250.0)2.28(58.0)
2.28(58.0)
3.15(80.0)
3.15(80.0)

1.30(33.0)
2.02(51.3)
3.07(78.0)
3.94(100.0)2.76(70.0)
3.94(100.0)5.31(135.0)6.30(160.0)1.38(35.0)
2.09(53.0)
3.15(80.0)
4.02(102.0)0.79(20.0)
0.79(20.0)
0.79(20.0)
0.79(20.0)

L
2.17(55.0)
2.17(55.0)

Unit: inch (mm)
D
n×h
0.39
(10.0)
0.39(10.0)
0.39(10.0)
0.39(10.0)

4×10
4×10
4×12
8×12

85

Antistatic UnitType■IVWF Series Pneumatic (DA) Valve ISO-KF VF/VG Flange(25A, 50A) ISO-KF Flanges(80A, 100A) ISO-KF Flanges

φH
φH
φJ

Type

Connection

IVWF25SDS-NW40

25A

IVWF50SDS-NW

50A

IVWF80SDS-NW

80A

IVWF100SDS-NW

100A

φJ

A

B

E

D

H

J

I

F

3.54
(90.0)
4.72(120.0)6.30(160.0)7.28(185.0)6.40(162.5)
7.58(192.5)
9.96(253.0)10.94(278.0)2.38(60.5)
2.38(60.5)
3.05(77.5)
3.05(77.5)

3.39(86.0)
3.39(86.0)
4.06(103.0)4.06(103.0)1.30(33.0)
2.02(51.3)
3.07(78.0)
3.94(100.0)2.17(55.0)
2.95(75.0)
4.49(114.0)5.28(134.0)2.28(58.0)
2.28(58.0)
2.99(76.0)
2.95(75.0)

0.79(20.0)
0.79(20.0)
0.79(20.0)
0.79(20.0)

Unit: inch (mm)G2-M-

Rc 1/8-Rc 1/83.15(80.0)
4.02(102.0)Rc 1/8Rc 1/8■IVWF Series Pneumatic (DA) Valve JIS VF/VG Flange(25A, 50A) JIS VF/VG Flanges(80A, 100A) JIS VF/VG Flanges

nXφh

nXφh

φC

φC
φH

86

Type

Connection

IVWF25SDS-V□

25A

IVWF50SDS-V□

50A

IVWF80SDS-V□

80A

IVWF100SDS-V□

100A

φH

A

B

E

D

H

C

F

G

3.54
(90.0)
4.72(120.0)6.30(160.0)7.28(185.0)6.40(162.5)
7.58(192.5)
9.96(253.0)10.94(278.0)2.38(60.5)
2.38(60.5)
3.05(77.5)
3.05(77.5)

3.39(86.0)
3.39(86.0)
4.06(103.0)4.06(103.0)1.30(33.0)
2.02(51.3)
3.07(78.0)
3.94(100.0)2.76(70.0)
3.94(100.0)5.31(135.0)6.30(160.0)0.79(20.0)
0.79(20.0)
0.79(20.0)
0.79(20.0)

1.38(35.0)
2.09(53.0)
3.15(80.0)
4.02(102.0)

Unit: inch (mm)2-Mn×h
Rc 1/8

4×10

Rc 1/8

4×10

Rc 1/8

4×12

Rc 1/8

8×12

Uitra High Purity Valves

IVWF Series Variable Flow Valve ISO-KF Flange

φH

Ultra High Purity Fittings

φJ

Connection

IVWF25FS-NW40

25A

IVWF50FS-NW

50A

IVWF80FS-NW

80A

IVWF100FS-NW

100A

A

B

K

D

E

H

J

I

3.54
(90.0)
4.72(120.0)6.30(160.0)7.28(185.0)4.33(110.0)6.46(164.0)8.07(205.0)9.02(229.0)2.17(55.0)
2.17(55.0)
2.36(60.0)
2.36(60.0)

7.20(183.0)7.20(183.0)7.20(183.0)7.20(183.0)5.08(129.0)5.08(129.0)5.08(129.0)5.08(129.0)1.30(33.0)
2.02(51.3)
3.07(78.0)
3.94(100.0)2.17(55.0)
2.95(75.0)
4.49(114.0)5.28(134.0)2.28(58.0)
2.28(58.0)
2.99(76.0)
2.95(75.0)

Unit: inch (mm)FG
0.79
(20.0)
0.79(20.0)
0.79(20.0)
0.79(20.0)

3.15(80.0)
4.02(102.0)Vacuum Components

Type

IVWF Series Variable Flow Valve JIS VF/VG Flange
PFA ValvesφC
φH

PFA Weld FittingsnXφhConnection

IVWF25FS-V□

25A

IVWF50FS-V□

50A

IVWF80FS-V□

80A

IVWF100FS-V□

100A

A

B

K

D

E

H

C

F

G

3.54
(90.0)
4.72(120.0)6.30(160.0)7.28(185.0)5.28(134.0)6.46(164.0)8.07(205.0)9.02(229.0)2.17(55.0)
2.17(55.0)
2.36(60.0)
2.36(60.0)

7.20(183.0)7.20(183.0)7.20(183.0)7.20(183.0)5.08(129.0)5.08(129.0)5.08(129.0)5.08(129.0)1.30(33.0)
2.02(51.3)
3.07(78.0)
3.94(100.0)2.76(70.0)
3.94(100.0)5.31(135.0)6.30(160.0)0.79(20.0)
0.79(20.0)
0.79(20.0)
0.79(20.0)

1.38(35.0)
2.09(53.0)
3.15(80.0)
4.02(102.0)

n×h
4×10
4×10
4×12
8×12

87

Antistatic Unit

Unit: inch (mm)Type■Model Used for Determining Specifications

Vacuum Butterfly Valve Specifications
1: Valve size

= 25A 50A 80A 100A

2: Actuation= Manual Penumatic (Double acting) Manual

3: Connection type= ISO-KF JIS-VF/VG, etc.

4: Seat material= Standard = fluorine rubber

5: Pressure Range= Standard = 1x10-6 Pa(abs) ~2x105 Pa(abs) [0.1MPa(G)]6: Valve seat differential pressure resistance = Standard = 0.101MPa(positive or negative pressure)
7: Permissible differential pressure for valve operation = Standard = 1.3×103 Pa (10Torr)
8: Cycle life

= number of times

9: Actuation pressure (pneumatic valve) = 58~101psig(0.4~0.7MPa(G))
10: Material(1): Body= Standard = SUS304(2): Bonnet= Standard = SUS304 or A5056(3): Flapper= Standard = SUS304(4): Stem= Standard = SUS304(5): O-ring= Standard = fluorine rubber

11: Leak rate(1): External Inspection leak volume= Standard = 1×10-10 Pa·m3/s or less(2): Internal Inspection leak volume= Standard = 1×10-10 Pa·m3/s or less

12: Usage environment= pressure, temperature

13: Conditions of parts that come into contact with gas = material, temperature, surface treatment designation, etc.
14: With, without open/close sensor(s) = yes or no(1): Number of sensors= MAX open/close 2 each(2): Types of sensors= Standard = micro switch

15: Open/closed time

= open/close time indicated/not indicated

16: Shipping inspection items=

17: Required verification=

18: Other requests for specifications =88

Uitra High Purity Valves

PCA

APC Butterfly Valve■Main features◎ Valve that can be opened/closed and is capable of slow exhaust and pressure regulation.

Slow exhaust① A fter the seat ring (1) moves forward, the flapper (2) rotates toopen/close.

The seat ring moves in the direction of the arrow, which creates a
gap between the seat ring and flapper and exhausts air.

Ultra High Purity Fittings

Valve open/close: Seat ring movement direction

Valve closed

Vacuum Components② Flapper①Seat ring

Valve open

Pressure control
Wide range of pressure control from low to high vacuum with combination of our seat ring andflapper.
: Flow direction

At low vacuum
Flapper opens and closes

PFA Valves

At high vacuum
Seat ring moves
forwardPressure (Torr)

Slow exhaust

PressurecontrolPressurecontrol◎ New developed seat ring structure

PFA Weld Fittings

KITZ new seat ring structure prevents O-ring twisting and dislodging.
Furthermore, our grease free flapper sealing minimizes contamination.

◎ High durability

Increases durability by reducing the O-ring stress using our seat ring structure.
Full open <-> Full close : 3 million cycles◎ Reduce by-product adhesion with unique heating feature.

Internal heater inside the flapper reduces by-products adhesion in the flow path drastically. (The internal heater is optional)■Interface①Display②Power inlet①⑤

The interface changes according to thecommunication format.
The photo shows DeviceNet™.

③⑥

Antistatic Unit

③Communication interface④Service port
⑤Sensor inlet⑥Micro connector terminal

②

④

89

■Main specifications
OptionMaximum
1x10-6Pa~0.101MPa
Operation Pressure
Across the Seat He Leak Test Rates: 5 x 10-10 Pa·m3/s or less
Leak Rates
Inboard He Leak Test Rates: 1 x 10-8 Pa·m3/s or less(with FKM)
0.101MPa
Differential Pressure
Full open <-> Full close (Flapper + Seat ring): About 1 second
Response Time
3 million (Full open <-> Full close)*1
Cycle Life5~50°C (41~122F)
Atmospheric Temperature
SUS316L
Wetted Area Material

UPS
Seal material(O-ring)

Power-supply Voltage
Network Interface
Interface Connection
Pressure Sensor Input

Analog, RS232C, Device Net, EtherCATHigh Density subminiature D male connector 26P*1 FKM, 150°C, Own test, actual result*2 In case of using Kalrez (R), set the heater temperature to100°C or higher.

40A

50A

65A

80A

100A

23.1ℓ/s

36ℓ/s

66.0ℓ/s

181ℓ/s342ℓ/s

11.9kg12.2kg13.5kg13.8kg15.8kgNote: Calculated value in the molecular flow region when the valve is fully open. The conductancevaries depending on the pressure.
Accessories· Power inlet cable (5 meter (16.404 ft))
· Interface connector· Sensor connector

Product Code Table

Heater Power [W]
50A
80A
100A

60
160

60
278
60
330

60
256
60
300

160

330

300

-

Heater Specification Details
Heater specification Applicable Seat material Max set temperature [°C]
Heater specifications
symbolsize(Flapper O-ring) External InternalInternal/external heater
HH
80A, 100A Kalrez 8900®
190
190
high-temperature specifications
180
180
50A, 80A, Kalrez 8900®
Internal/external heaterHI
100A
specifications
FKM
150
150
180
50A, 80A, Kalrez 8900®
External heater
H
100A
specifications
FKM
150
-

Max 3ch (0-5 V, 0-10 V)

Flange size
Conductance
WeightKalrez 8900® *2

Heater Power for Each Specification
Heater specification Heater
Heater specifications
symbolpart
Internal
Thermostatic internal/external
HH
heater specifications
External
Internal
Internal/external heaterHIspecifications
External
External heater
H
External
specifications

Body, Flapper : 316L,
Others : Aluminum, SUS304 equivallent
Sealing (O-ring) : FKM
DC24V+10%-5% (3A MAX)

Material

Emergency shut off when power failure

Note: Ask our sales for other options.

FlangeModel

Body size

Connection

Size

Seal Material

Network
InterfaceController

Heater

UPS

PCA

50

NW

40

F

A

V

HI

U

50: 50A
80: 80A
100: 100A

NW: ISO-KF※JF: JIS VF-VG

A:Analog
Not Shown： On the body
*V: Separated
R: RS232C
D:DeviceNETTM
E:EtherCATNot Shown: Same as O-ring material
body
F: FKM*40: 40A *1*KL8900:
Kalrez 8900®
*65: 65A *2*1. Our 40A size uses our 50A body. Our 65A size uses 80A size body.
*2. Our 65A size uses 80A size body.
Items with "*" are optional.

None: Without Heater Not shown：Without UPS*U: With UPS*H: External Heater*HI: External andInternal Heater*HH: External and Internal
Heater 190℃

■Product Code Table
PCA Series (40A~100A)

C

I

K

B

H

J

A

G

E

40A
50A
65A
80A
100A
Note: No cable for no heater type.

90

D

A

B

C

D

E

F

G

H

I

15.630(397)
15.630(397)
16.457(418)
16.457(418)
17.245
(438)

5.119
(130)
5.119
(130)
5.119
(130)
5.119
(130)
5.119
(130)

5.906
(150)
5.906
(150)
5.906
(150)
5.906
(150)
5.906
(150)

6.693
(170)
6.693
(170)
6.083
(154.5)
6.083(154.5)
6.300
(160)

7.245
(184)
7.245
(184)
8.189
(208)
8.189
(208)
8.898
(226)

1.551
(39.4)
1.969
(50)
2.677
(70.2)
3.150
(80)
3.938
(100)

KF40
(KF40)
KF50(KF50)KF63(KF63)
KF80(KF80)
KF100(KF100)

4.331
(110)
4.331
(110)
4.567
(116)
4.567
(116)
4.961
(126)

11.300(287)
11.300(287)
11.890(302)
11.890(302)
12.284(312)

Unit: inch (mm)
J
K
5.237
(133)
5.237
(133)
5.827
(148)
5.827
(148)
6.221
(158)

6.063
(154)
6.063
(154)
6.063
(154)
6.063
(154)
6.063
(154)

Vacuum Gate ValveThe UXG and LG series are gate valves developed for separating a semiconductor
vacuum system's reactor from the transfer chamber. The valve bodies are made ofaluminum, and the valves operate via double action pneumatic actuator. The heatedgate valves not only heats the exterior using a conventional external heater but thebuilt-in internal heater in the moving parts heats from the inside simultaneously,
providing highly uniform heating performance. The body and valve body can be
set to an arbitrary temperature up to a maximum 180°C.

■Features■Specifications
Size
Pressure Range
Valve Seat Differential Pressure
Resistance
Bellows Pressure Resistance
Permissible Differential Pressure for
Valve Operation
Across the Seat He
Leak Rates
Leak Rates
Inboard He Leak
Rates
Operation
Actuation Pressure
Actuation Reaction Time
(Actuation Pressure 0.5 MPa(G))

12"(300mm type)
1.4x10-10~29 psia (1x10-6 Pa~0.101 MPa (abs))
14.6 psig (0.101 MPa(G)) (Positive/Back pressure)
2.9 psig (0.02MPa)
1.3 KPa≤ 1×10 sccs (≤ 1×10 Pa·m /s) (for 30 seconds at room temperature)≤ 1×10-4 sccs (≤ 1×10-5 Pa·m3/s) (for 30 seconds at raised temperature)
-9

-10

3

Vacuum Components

Allowable external leakage: ≤ 1×10-9 sccs (≤ 1×10-10 Pa·m3/s)
Double action pneumatic cylinder
72~101 psig (0.5~0.7MPa (G))
0.8~2 s (orifice controlled)
1.5~2 s (speed control included)
180ºC
160°C (when the gate O-ring material is fluorine rubber)
Reaches highest temperature setting within 1.5 hrs
210°C (heated type)
60°C (non-heated type)
10 MΩ or more at DC 500V

Maximum Heater Temperature
Time To Reach Set Temperature
Maximum Operating Temperature

Body

Gate

LG: without body

Product Code Table
Gate Width(Opening Part)

With/Without
HeaterGate Seal Material*1 KALREZ® is a trademark of DuPont Performance Elastomers Co.
*2 Chemraz2® is a trademark of Greene, Tweed& Co.
Model Number

12: 12"(for Use with 300mm Wafer)

Not Shown: Without Heater
H: With Heater

F: Fluorine Rubber
KL: KALREZ®
CM: CHEMRAZ®

Antistatic Unit

Technical
Number
UXG: With Body
LG: Without Body

PFA Weld Fittings

UXG: with body

Gate Length(Opening Part)PFA Valves

Insulation Resistance
1 million cycles
Bellows Cycle Life
Particle Performance
The number of particle sized larger than 0.1 µm to be no more than 0.3 on average *(Target Value For Reference)* Reference by own test: N2 supply 1cf/min, sampling 0.2 cf/min, open/close time 6 seconds/cycle

Model

Ultra High Purity Fittings◎ Because the valve can be heated to high temperatures, it reduces contamination accumulation and adhesion to the seat so to greatly extend the maintenance period.
◎ The body heater and valve heater are in separate channels, so the internal and external temperatures can be set individually.
◎ Has a non-sliding structure that keeps particles from being generated during opening and closing operations.
◎ Equipped with a latch lock mechanism that keeps the valve closed during an emergency such as when the operating air pressure is lost.
◎ Fluorine rubber,KALREZ® *1, Chemraz® *2, or other materials for the gate O-ring is available depending on the fluid temperature and chemical characteristics of thefluid.

Uitra High Purity Valves

UXG/LG

Production Drawing Number

Note: We handle materials and shapes other than those noted.

■Precautions① The valves are not guaranteed to function if their exterior is submerged inside a vacuum.
② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

91■Model Used for Determining Specifications

Square Gate Valve Specifications
1: Valve size

= 12 inches

2: Dimensions of the opening part

= horizontal x vertical mm

3: Body= with or without

4: Body dimensions= standard = 65 mm

5: Pressure Range= standard = 1×10-6 Pa~0.101MPa (abs)

6: Valve seat differential pressure resistance = Standard = 0.101MPa (positive or negative pressure)
7: Permissible differential pressure for valve operation = Standard = 1.3×103 Pa (10Torr)
8: Cycle life

= number of times

9: Actuation pressure= 75~101 psig (0.5~0.7 MPa(G))

10: Material(1): Body= standard = A5052(2): Bonnet= standard = SUS316(3): Gate= standard = A5052(4): Bellows= standard = AM350; Option= SUS, Inconel, Hastelloy, etc.

(5): O-ring= fluorine rubber·KALREZ®·Chemraz®

11: Leak rate(1): External Inspection leak volume= Standard = 1×10-10 Pa·m3/s or less(2): Internal Inspection leak volume= Standard = 1×10-10 Pa·m3/s or less

12: Usage environment= pressure, temperature

13: Conditions of parts that come into contact with gas = material, temperature, surface treatment designation, etc.
14: Around the heater= hot or room temperature(1): Set temperature= ○○°C(2): Uniformity of heating= place, conditions ± note(3): Number of channels= if not designated, we will choose.

(4): Heater category= if not designated, we will choose.

(5): Supply power source= standard = 100V·200V(6): Thermocouple type= if not designated, we will choose.

(7): Prevention of excessive temperature rise = with or without a thermostat, temperature, location, etc.
(8): Thermostat temperature= ○○°C(9): Thermostat category= automatic recovery, manual recovery, normally closed/open(10): Valve body TC= standard = 1 (1 for monitoring the rise in temperature)(11): Heater specifications, insulating material = category, surface temperature limits, outgassing, particle conditions, etc.
(12): Heat cycle= timeframe, number of times, temperature (closed state 2 times per month, 200 ➡ room temperature ➡ 200, etc.)(13): Temperature rising time

= if not designated, we will choose.

(14): Connector processing= TC, heater, thermostat, sensor, etc.

15: With, without open/close sensor(s) = yes or no(1): Number of sensors= 1 open or close pasition, 2 both position(2): Types of sensors= Standard = micro switch

16: Open/closed time

= standard = orifice control; Option = with speed controller

17: Gate lock (latch lock mechanism) = standard = CLOSE side only; Option= OPEN side
18: Shipping inspection items=

19: Required verification=

20: Other requests for specifications =92

PFA Valves
PFA

DIAPHRAGMVALVE

KITZ SCT's PFA■FCD (PFA Diaphragm Valves)
Diaphragm valve series for fluid handling system FCDN Manual Valves
Clean, high-reliability valves are required in the fluid handling of high-purity chemicals,
ultrapure water, etc., at semiconductor and liquid-crystal display facilities.
In addition, as higher pressures have come to be used in those fluid handling systems
in recent years, valves are required to have a high level of sealing performance withrespect to both positive and back pressure.
The FCD series was developed to meet this needwhile considering user-friendliness.
These valves are compact, the direction of the air supply inlet can be selected, and thebase attachment part can be made with a longer hole. These are some of thespecifications incorporated into these valves useful in making the valve attachment
work more efficiently.
We also offer a piping system that merges those features together, by combining thevalves with the TBN series of PFA tube fittings to realize a compact, leakproof fluid
handling system.
KITZ SCT will answer all of your needs systems.

FCDN Pneumatic Valves
FCDN Variable Flow Valves
FCDN Pneumatic Valves with Bypass
FCDN Variable Flow Valves with Bypass
FCDN Variable Flow Valves with Pneumatic Bypass
FCDN Suckback Valves
FCDT (Fluorine resin diaphragm Valve for 200˚C)

95
98
101
101
101
104
104
105

FCD

KITZ SCT’s FCD series PFA valves are High reliability PFA valves for UHP fluid
application.

PFA Diaphragm ValveFCD series meets the needs for high reliability and space saving in piping systems
that require a high level of cleanliness.

■Product Lineup

Products subject to customs control for export from Japan

Manual Valve
FCDN□□MSN

Product code

Pneumatic Valve
FCDN□□□S□

Pneumatic Valve
Variable Flow
FCDN□□□F□

Variable Flow + Bypass
FCDN□□□X□

With Bypass
FCDN□□□B□

External
view

Size

N.C.

N.O.

DoubleactionN.C.

N.O.

DoubleactionN.C.

N.O.

DoubleactionN.C.

N.O.

Doubleaction

1/4"

○

○

○

○

○

○

○

−

−

−

−

−

−

3/8"

○

○

○

○

○

○

○

○

○

○

○

○

○

1/2"

○

○

○

○

○

○

○

○

○

○

○

○

○

3/4"

○

○

○

○

○

○

○

○

○

○

○

○

○

1"

○

○

○

○

○

○

○

○

○

○

○

○

○

○denotes available products. * Please refer to product codes on P. 95 and P. 98.

■Connection

Nippon Pillar

Super 300 TypeP Series

KuraboFinal Lock
※ Please refer for other connection.

■Features◎ High sealing performance
Achieves sealing performance of 0.5MPa (positive pressure) and 0.4MPa (back pressure) with standard specifications.
◎ Easy confirmation of operation state
The pneumatic valves have a standard open/close indicator which can be easily verified valve operation state.
◎ Improved design for versatile installation
Direction of air supply port can be selected. Elongated mounting holes in baseplate. The valves incorporate specifications that facilitate installation of the valve
and attachment of the supply air tube.
◎ High durability
Ensures high reliability with unique diaphragm design that will withstand fatigue stress.
◎ High level of quality control in super clean manufacturing environment
Performs precision cleaning in an ultrasonic washer, then another cleaning once more with warm DI water. Assembly, final inspection, and airtight double bagging all take place in a clean room.

94

Manual Valve Model Selection Table
SeriesModel

Valve Size

Manual Valve Model

End Connection

Compatible Tube

Material

Ultra High Purity Valves

Pseries
Code

SeriesStandard

Ultra High Purity Fittings(2) Valve Size
Code

Compatible Tube Size
Inch

milli
φ6
φ10
φ12
φ19

Vacuum Components

φ25(6) Connection
Code

Welded Model
Pillar Super 300 Type (P series)
Kurabo Final Lock

PFA Valves(7) Compatible Tube
Compatible Tubes by Valve Size

Code

φ6

φ10

φ12

φ19

φ25

* If you use any 1/4" inch or 3/8" 1-mm-thick inch-size tube, designate it with the code S.

(8) Material
Body

Diaphragm

Actuator/ BaseO-ringRubber Cap

PFA Weld Fittings

Code (1 Digit)

NoteStandard

Code (2 Digits)

Screw / Spring

NoteStandard

SUS Fluorine Resin Coating

Antistatic Unit
95

FCD Manual Valve■Product Code Format
FCDN□□MSN-□□ □ □□
②

⑥

⑦

⑧

(Please refer to product code table on p.95 for details)■Specifications
Valve Size

1/4"

3/8"

1/2"

Fluid Temperature

5~100°C

Atmospheric Temperature

0~60°C

Proof Pressure

1.2 MPa(G)Maximum
OperatingPressure
psig (MPa(G))

1"

Positive Pressure

87 (0.6)

72 (0.5)72 (0.5)72 (0.5)72 (0.5)

Back Pressure

72 (0.5)

58 (0.4)

58 (0.4)

58 (0.4)

58 (0.4)

Allowable Leakage at Seat (cm3/min)

0 (with water)

Orifice Diameter / inch (mm)0.16 (4.0)

0.39 (10.0)

0.39 (10.0)

0.63 (16.0)

0.87 (22.0)

Cv

0.3

1.1

1.7

4.6

10

■Cutaway Drawing

Direction of flow

Note: To allow for panel mounting as well, the manual valve structure enables the handle to be
removed if rotated far enough in the opening direction.

96

3/4"

■Standard Components
No.

Part Name

Material

1

Actuator

PP/PPS

2

Body

PFA

3

Diaphragm

PTFE

4

Base

PPS

■Outside Drawing
Ultra High Purity Valves

φD

φD1

Ultra High Purity Fittings

Size

Unit: inch (mm)A

B

Manual Valves (FCDN□□MSN-) Common Dimensions
B1
C
MaxH
H1
H2

A1

1/4"

1.18 (30.0)

0.83 (21.0)

1.97 (50.0)

1.57 (40.0)

3/8"

1.42 (36.0)

0.96 (24.5)

2.44 (62.0)

1.97 (50.0)

1/2"

1.42 (36.0)

0.96 (24.5)

2.44 (62.0)

1.97 (50.0)

3/4"

1.89 (48.0)

1.22 (31.0)

3.31 (84.0)

2.52 (64.0)

1"2.36 (60.0)

1.71 (43.5)

3.78 (96.0)

3.07 (78.0)

Size

H3

D

D1

3.19 (81.0)

0.69 (17.5)

0.28 (7.0)

1.19 (30.2)

1.02 (26.0)

0.79 (20.0)

3.66 (93.0)

0.91 (23.0)

0.31 (8.0)

1.33 (33.7)

1.26 (32.0)

0.87 (22.0)

3.66 (93.0)

0.91 (23.0)

0.31 (8.0)

1.33 (33.7)

1.26 (32.0)

0.87 (22.0)

4.49 (114.0)

1.08 (27.5)

0.35 (9.0)

1.66 (42.2)

1.50 (38.0)

1.10 (28.0)

5.47 (139.0)

1.38 (35.0)

0.39 (10.0)

2.04 (51.7)

1.89 (48.0)

1.42 (36.0)

PFA Valves■Dimensions

0.22x0.26(5.5x6.5)
0.26x0.35(6.5x9.0)
0.26x0.35(6.5x9.0)
0.33x0.45(8.5x11.5)
0.35x0.49(9.0x12.5)

Unit: inch (mm)Connection Type: (6) Notation
PP
KF
(L)
(L)
2.68 (68.0)

2.76 (70.0)

3/8"

3.39 (86.0)

3.70 (94.0)

1/2"

3.70 (94.0)

3.78 (96.0)

3/4"

4.72 (120.0)

4.45 (113.0)

1"5.75 (146.0)

5.31 (135.0)

PFA Weld Fittings

1/4"

Vacuum Components■Dimensions

Connection type KF: Kurabo Final Lock, PP: Pillar Super 300 type (P series)*Face-to-face dimension (L) may vary slightly depending on the position of the nut.
The dimensions will change depending on the state of tightening.

Antistatic Unit
97

Pneumatic Valve Selection Table
Model

SeriesValve Size

Actuation Type

Valve Function

Actuator
Air Port Method

End Connection

Compatible Tube

Diaphragm

Actuator SectionBaseO-ringRubber cap

Material

P Series
Code

SeriesStandard(2) Valve Size
Code

Compatible Tube Size
Inch

milli
φ6
φ10
φ12
φ19
φ25

(3) Valve Actuation Type
Code

Actuation Type
Pneumatic N.C.

(8) Material

Pneumatic N.O.
Pneumatic Multiple Operation

Code (1 Digit)

Body

Note
Standard(4) Valve Function

Screw Spring

Code (2 Digits)

Code

Note
Standard

Standard
SUS Fluorine Resin Coating

Variable Flow
With Bypass
Variable Flow with Bypass* For pneumatic valves with bypass and pneumatic valves with flow control + bypass,
we do not handle the ¼" valve size .
((2) when 04 is selected, (4):B,X cannot be selected.)(7) Compatible Tube
Compatible Tubes by Valve Size

Code(5) Direction of Operation Air Inlet
Code

Direction of Air Inlet

φ6

φ10

φ12

* If you use any 1/4" inch or 3/8" 1-mm-thick inch-size tube, designate it with the code S.

Air inlet(6) Welded Model
Code

Welded Model
Pillar Super 300 Type (P series)
Kurabo Final Lock

The above diagram shows the actuator as seen from above. ⇦:Direction of fluid flow

98

φ19

φ25

FCD Pneumatic Valve■Product Code Format■FCDN□□ □S□-□□ □ □□
②

③

⑤

⑥

⑦

⑧

Ultra High Purity Valves(Please refer to the products code table on P. 98 for details)

Ultra High Purity Fittings
Vacuum Components■Specifications
Valve Size

1/4"

3/8"

1/2"

Fluid Temperature (°C)

5~100Atmospheric Temperature (°C)

0~60

Proof Pressure (MPa(G))

145 (1.0)

Maximum
OperatingPressure
psig (MPa(G))

3/4"

1"

Positive Pressure

87 (0.6)

72 (0.5)72 (0.5)72 (0.5)72 (0.5)

Back Pressure

72 (0.5)

58 (0.4)

58 (0.4)

58 (0.4)

58 (0.4)

Allowable Leakage at Seat (cm3/min)

0 (with water)
0.16 (4.0)

0.39 (10.0)

0.39 (10.0)

0.63 (16.0)

0.87 (22.0)

Cv

0.3

1.1

1.7

4.6

10

Actuation Type

NC/NO/ Double Action (DA)

Actuation Pressure (MPa(G))

NC 0.4-0.6, NO/DA 0.4-0.5

Operation Air Inlet

Rc 1/8 (Attach a resin R1/8 Fitting at 0.4-0.6N·m to the actuation air inlet port.)■Standard Components
No.

Part Name

Material

1

Actuator

PPS

2

Body

PFA

3

Diaphragm

PTFE

4

Base

PPS

PFA Weld Fittings■Cutaway Drawing

PFA Valves

Orifice Diameter / inch (mm)Antistatic Unit

Direction of flow99

■Outside Drawing■Dimensions
Size

Unit: inch (mm)
A

B

A1

Pneumatic Valves (FCDN□□□S□-) Common Dimensions
B1
C
H
H1
H2
H3

1/4"

1.18 (30.0) 0.83 (21.0) 1.97 (50.0) 1.57 (40.0)

3/8"

1.42 (36.0) 0.96 (24.5) 2.44 (62.0) 1.97 (50.0)

1/2"

1.42 (36.0) 0.96 (24.5) 2.44 (62.0) 1.97 (50.0)

3/4"

1.89 (48.0) 1.22 (31.0) 3.31 (84.0) 2.52 (64.0)

1"2.36 (60.0) 1.71 (43.5) 3.78 (96.0) 3.07 (78.0)■Dimensions
Size

Unit: inch (mm)Connection Type: (6) Notation
KF
PP
(L)
(L)

1/4"

2.76 (70.0)

2.68 (68.0)

3/8"

3.70 (94.0)

3.39 (86.0)

1/2"

3.78 (96.0)

3.70 (94.0)

3/4"

4.45 (113.0)

4.72 (120.0)

1"

5.31 (135.0)

5.75 (146.0)

Connection type KF: Kurabo Final Lock, PP: Pillar Super 300 type (P series)* Face-to-face dimension (L) may vary slightly depending on the position of the nut.

100

0.22x0.26
3.03 (77.0) 0.69 (17.5) 0.28 (7.0)(5.5x6.5)
0.26x0.35
3.58 (91.0) 0.91 (23.0) 0.31 (8.0)(6.5x9.0)
0.26x0.35
3.58 (91.0) 0.91 (23.0) 0.31 (8.0)(6.5x9.0)
0.33x0.45
4.45 (113.0) 1.08 (27.5) 0.35 (9.0)(8.5x11.5)
0.35x0.49
5.31 (135.0) 1.38 (35.0) 0.39 (10.0)(9.0x12.5)

H4

H5

M

1.66 (42.2)

2.55 (64.8)

0.05 (1.2)

0.26 (6.5)

2.06 (52.2)

3.04 (77.2)

0.11 (2.7)

0.28 (7.0)

2.06 (52.2)

3.04 (77.2)

0.11 (2.7)

0.28 (7.0)

2.43 (61.7)

3.91 (99.2)

0.17 (4.2)

0.16 (4.0)

3.00 (76.2) 4.74 (120.3)

0.22 (5.7)

0.16 (4.0)

②
③
⑤
⑥
⑦
⑧
(Please refer to the products code table on P. 98 for details)

Ultra High Purity Valves

FCD Series Pneumatic Valves
with Combined Functions■Product Code Format: FCDN□□ □F□-□□ □Variable Flow Valve
Pneumatic Valve with Bypass : FCDN□□ □B□-□□ □ □□Variable Flow Valve with Bypass: FCDN□□ □X□-□□ □ □□Ultra High Purity Fittings
Vacuum Components■Features◎ Variable flow pneumatic valves
Adjustable flow rate at full open position.
◎ Pneumatic valves with bypass
Bypass flow path prevents fluid trapped in the valve. Adjustable bypass valve saves fluid consumption.
◎ Variable flow valve with bypass
Multifunctional three-in-one valve: pneumatic valve, variable flow rate, & bypass channel.

■Specifications
Valve Size

1/4"

3/8"

1/2"
5~100

Atmospheric Temperature (°C)

0~60

Proof Pressure (MPa(G))

145 (1.0)

Maximum
OperatingPressure
psig (MPa(G))

1"

PFA Valves

Fluid Temperature (°C)

3/4"

Positive Pressure

87 (0.6)

72 (0.5)72 (0.5)72 (0.5)72 (0.5)

Back Pressure

72 (0.5)

58 (0.4)

58 (0.4)

58 (0.4)

58 (0.4)

Allowable Leakage at Seat (cm3/min)

0 (with water)
0.16 (4.0)

0.39 (10.0)

0.39 (10.0)

0.63 (16.0)

0.87 (22.0)

Cv

0.3

1.1

1.7

4.6

10

φ3/0.27

φ3/0.27

φ3.6/0.32

φ3.6/0.32

Bypass Part Orifice Diameter/Cv
Actuation Type

NC/NO/ Double Action (DA)

Actuation Pressure (MPa(G))

NC 0.4-0.6, NO/DA 0.4-0.5

Operation Air Inlet

Rc 1/8 (Attach a Resin R1/8 Fitting at 0.4-0.6N·m to the actuation air inlet port.)

PFA Weld Fittings

Orifice Diameter / inch (mm)Antistatic Unit
101

■Cutaway Drawing
Variable Flow Valves

Direction of flow

Pneumatic Valves with Bypass

Direction of flow

Variable Flow Valve with Bypas

Direction of flow

Standard Components

102

No.

Part Name

Material

1

Actuator section

PPS

2

Body

PFA

3

Diaphragm

PTFE

4

Base

PPS

5

Flow rate adjusting knob

PP

■Outside Drawing

Size
1/4"
3/8"
1/2"
3/4"
1"

φD

Unit: inch (mm)Variable Flow Valves (FCDN□□□F□-)
C
H
H1
H2
H3

A

B

A1

B1

H4

Max H5MD

1.18 (30.0)

0.83 (21.0)

1.97 (50.0)

1.57 (40.0)

0.22x0.26 (5.5x6.5)

3.03 (77.0)

0.69 (17.5)

0.28 (7.0)

1.66 (42.2)

2.55 (64.8)

0.78 (19.8)

0.26 (6.5)

0.63 (16.0)

1.42 (36.0)

0.96 (24.5)

2.44 (62.0)

1.97 (50.0)

0.26x0.35 (6.5x9.0)

3.58 (91.0)

0.91 (23.0)

0.31 (8.0)

2.06 (52.2)

3.04 (77.2)

0.83 (21.2)

0.28 (7.0)

0.71 (18.0)

1.42 (36.0)

0.96 (24.5)

2.44 (62.0)

1.97 (50.0)

0.26x0.35 (6.5x9.0)

3.58 (91.0)

0.91 (23.0)

0.31 (8.0)

2.06 (52.2)

3.04 (77.2)

0.83 (21.2)

0.28 (7.0)

0.71 (18.0)

1.89 (48.0)

1.22 (31.0)

3.31 (84.0)

2.52 (64.0)

0.33x0.45 (8.5x11.5)

4.45 (113.0)

1.08 (27.5)

0.35 (9.0)

2.43 (61.7)

3.91 (99.2)

0.90 (22.9)

0.16 (4.0)

0.94 (24.0)

2.36 (60.0)

1.71 (43.5)

3.78 (96.0)

3.07 (78.0)

0.35x0.49 (9.0x12.5)

5.31 (135.0)

1.38 (35.0)

0.39 (10.0)

3.00 (76.2)

4.74 (120.3)

1.04 (26.4)

0.16 (4.0)

1.10 (28.0)

Ultra High Purity Fittings■Dimensions

Ultra High Purity Valves

FCDN Series Variable Flow Valves

Please refer to page 88 for the dimension “L”

Vacuum Components

FCDN Series Valves with Bypass■Outside Drawing

φD

Size
3/8"
1/2"
3/4"
1"

Unit: inch (mm)
A

B

A1

B1

Pneumatic Valves with Bypass (FCDN□□□B□-)
C
H
H1
H2
H3
H4

H5

M

1.42 (36.0) 0.96 (24.5) 2.44 (62.0) 1.97 (50.0) 0.26x0.35 (6.5x9.0) 3.58 (91.0) 0.91 (23.0)

0.31 (8.0)

2.06 (52.2) 3.04 (77.2)

0.11 (2.7)

0.28 (7.0)

0.47 (12.0) 1.73 (44.0)

D

max E

1.42 (36.0) 0.96 (24.5) 2.44 (62.0) 1.97 (50.0) 0.26x0.35 (6.5x9.0) 3.58 (91.0) 0.91 (23.0)

0.31 (8.0)

2.06 (52.2) 3.04 (77.2)

0.11 (2.7)

0.28 (7.0)

0.47 (12.0) 1.73 (44.0)

1.89 (48.0) 1.22 (31.0) 3.31 (84.0) 2.52 (64.0) 0.33x0.45 (8.5x11.5) 4.45 (113.0) 1.08 (27.5)

0.35 (9.0)

2.43 (61.7) 3.91 (99.2)

0.17 (4.2)

0.16 (4.0)

0.55 (14.0) 2.07 (52.5)

2.36 (60.0) 1.71 (43.5) 3.78 (96.0) 3.07 (78.0) 0.35x0.49 (9.0x12.5) 5.31 (135.0) 1.38 (35.0) 0.39 (10.0) 3.00 (76.2) 4.74 (120.3) 0.22 (5.7)

0.16 (4.0)

0.55 (14.0) 2.19 (55.5)

PFA Valves■Dimensions

Please refer to page 88 for the dimension “L”

FCDN Series Variable Flow Valve with Bypass

PFA Weld Fittings

φD■Outside drawing

φD

Size
3/8"
1/2"
3/4"
1"

Unit: inch (mm)
A

B

A1

B1

Variable Flow Valve with Bypass (FCDN□□□X□-)
C
H
H1
H2
H3
H4
Max H5

M

D

D1

max E

1.42 (36.0) 0.96 (24.5) 2.44 (62.0) 1.97 (50.0) 0.26x0.35 (6.5x9.0) 3.58 (91.0) 0.91 (23.0) 0.31 (8.0) 2.06 (52.2) 3.04 (77.2) 0.83 (21.2) 0.28 (7.0) 0.71 (18.0) 0.47 (12.0) 1.73 (44.0)
1.42 (36.0) 0.96 (24.5) 2.44 (62.0) 1.97 (50.0) 0.26x0.35 (6.5x9.0) 3.58 (91.0) 0.91 (23.0) 0.31 (8.0) 2.06 (52.2) 3.04 (77.2) 0.83 (21.2) 0.28 (7.0) 0.71 (18.0) 0.47 (12.0) 1.73 (44.0)
1.89 (48.0) 1.22 (31.0) 3.31 (84.0) 2.52 (64.0) 0.33x0.45 (8.5x11.5) 4.45 (113.0) 1.08 (27.5) 0.35 (9.0) 2.43 (61.7) 3.91 (99.2) 0.90 (22.9) 0.16 (4.0) 0.94 (24.0) 0.55 (14.0) 2.07 (52.5)
2.36 (60.0) 1.71 (43.5) 3.78 (96.0) 3.07 (78.0) 0.35x0.49 (9.0x12.5) 5.31 (135.0) 1.38 (35.0) 0.39 (10.0) 3.00 (76.2) 4.74 (120.3) 1.04 (26.4) 0.16 (4.0) 1.10 (28.0) 0.55 (14.0) 2.19 (55.5)

Please refer to page 88 for the dimension “L”

103

Antistatic Unit

■Dimensions

FCD Series with Special Functions■Variable Flow Valves with Pneumatic Bypass ValveThe bypass valve can also be pneumatically operated.
◎ Space saving
Enables switching between large flow and small flow with a single valve.
Saving space on chemical supply lines, etc.
◎ Emergency cut off function
Shut down both pneumatic valve and bypass valve.

■Size
Inch

3/8"

1/2"

3/4"

1"

Metric (mm)

φ10

φ12

φ19

φ25

■Fittings
Kurabo Industries

Final Lock

Nippon Pillar

Super 300 P Series

Other

Rc thread■Suck Back Valves◎ Suck-back function that prevents fluid from dripping off from the nozzle tip when the flow is stopped.
◎ Improving the quantitative precision in coating processes, chemical solution filling processes, etc.

■Valve Types
Type of Valve

FunctionsSuck-back Valve

Suck back function only

Pneumatic Valve with Suck Back Valve

Suck back function & flow on/off

■Size
Inch

1/4"

3/8"

1/2"

3/4"

Metric (mm)

φ6

φ10

φ12

φ19

■Fittings* Please contact the sales representatives for details.

104

Kurabo Industries

Final Lock

Nippon Pillar

Super 300 P Series

Other

Rc threadFCDT (Fluorine resin diaphragm valve for 200ºC)◎ Maximum fluid temperature up to 200ºC.
◎ Open/close indicator for pneumatic valve is installed as standard feature.
◎ Padlock can be installed into manual valve handle to prevents human error.
◎ Toggle handle for manual valve has 3 steps and can hold at 2 position in
between fully closed and fully open.

■Standard Components
Part Name

Material

1

Actuator

PVDF,PPS

2

Body

PTFE

3

Diaphragm

PTFE

Ultra High Purity Fittings

No.

■Specifications
Valve Size

FCDT06

FCDT08+20ºC~+200ºC

Atmospheric Temperature+20ºC~+80ºC

Proof Pressure

0.5MPa(G)Pressure Range

Positive Pressure

0~29.01psig (0.2MPa(G))

Back Pressure

0~14.50psig (0.1MPa(G))

Allowable Leakage at Seat(cm3/min)

0 (with water)

Orifice Diameter (inch(mm))φ9.6 (0.38)

Cv

Vacuum Components

Fluid Temperature

0.9

1.1
Manual/N.C./N.O

Actuation Pressure

N.C.:58.02~87.02psig (0.4~0.6MPa(G)), N.O.:65.27~79.77psig (0.45~0.55MPa(G))

Operation Air Inlet

Rc1/8(Attach a resin R1/8 Fitting at0.4-0.6 N·m to the actuation air inlet port.)

PFA Valves

Actuation Type

Product Code Table
Model

Actuation Type

Series

Size

T

06

200ºC

06: 3/8"
08: 1/2"

Valve Function

Actuator
Air Port Method

End Connection

Compatible Tube

MaterialN
C: Pneumatic valve N.C.
O: Pneumatic valve N.O.
M: Manual valve

S: Air Type
T: Step-Toggle TypeJS

N: Standard

Nippon Pillar
Super 300
(P Series)

T: Inch
M: Metric (mm)

PFA Weld Fittings■Outside Drawing

When the valve is fully open

B

E

C D

H

Super Pillar 300P

A

4-M1

H1

L

■Dimensions

Unit: inch (mm)
FCDT
A

B

C

D

E

F

G

H

H1

L

M

M1

3/8"

2.32 (59.0) 1.89 (48.0) 1.97 (50.0) 1.65 (42.0) 4.57 (116.0) 0.39 (10.0) 3.74 (95.0) 0.71 (18.0) 3.15 (80.0) 1.26 (32.0) 1.50 (38.0) φ0.21 (φ5.3)

1/2"

2.32 (59.0) 1.89 (48.0) 1.97 (50.0) 1.65 (42.0) 4.57 (116.0) 0.39 (10.0) 3.74 (95.0) 0.71 (18.0) 3.35 (85.0) 1.26 (32.0) 1.50 (38.0) φ0.21 (φ5.3)

105

Antistatic Unit

H
L

Size

Ultra High Purity Valves■FeaturesPrecautions During Handling
General Cautionary Items

Warnings
Before use ] To prevent accidents, read the handling precautions and abide by the warnings and cautions given.
Use the products within the ranges specified for it.
An engineer with sufficient knowledge and experience should take responsibility for selecting and operating the valve.
For safe usage, follow all group standards, laws, etc.
Do not break down, modify, or add to the product.
The valve is designed for usage under the circumstance of atmospheric pressure only.

Precautions to Take in Design and Selection

Warnings
In choosing a valve, adequately research the design of the overall system so that the valve will function safely and at full performance.
Take functionality, suitability, usage conditions, etc., into account in selecting a valve that meets your objectives. And, appropriately attach and operate the valve.
When running a fluid through the circuit, install the bypass valve in the system so that it will not become a liquid-seal circuit.
Stay within the liquid pressure range, liquid temperature range, and ambient temperature usage range.
Ensure that there is enough space to do maintenance checks.
Fluorine resins are typically subject to permeation and penetration by gases and chemicals. In addition, they exhibit characteristics whereby the penetration and permeation typically increase inproportion to the temperature, pressure, area of contact, and time. Take those characteristics into account before choosing a fluorine resin, take adequate precautions immediately after using it,
and perform frequent maintenance checks.
Fluorine resins do not react with most chemicals, but because there are chemicals with which they will react in an oxidative solution or reducing solution, take into account the characteristics before
choosing a fluorine resin, take adequate precautions immediately after using it,and perform frequent maintenance checks.
Fluorine resins exhibit excellent resistance against chemicals, but to use a fluorine resin in a chemical, heated, physical, or combination environment, take into account the characteristics before
choosing a fluorine resin, take adequate precautions immediately after using it,and perform frequent maintenance checks because chemical attack, sudden fluctuations in temperature and pressure,chemical or gas infiltration, and absorption or physical damage due to the interaction ofthese could occur,and there may be cases where a fluorine resin cannot be used satisfactorily.

Precautions to Take When Installing
Cautions
Break the seal, handle the component in a clean environment.
These valves are filled with air tight double bagged package in a clean pack. Break the seal immediately before installing the component so as to minimize the exposure to air.
Before connecting, blow air into the pipes or clean them to remove foreign matter on the inside of the pipes.
If there is the possibility of foreign matter getting mixed into the liquid, install a filter on the primary side of the valve that is appropriate for the circuit you are using.
Avoid directly touching with hands or breathing on parts that come into contact with liquid.
Please do not subject a liquid contact part of the valve to any action causing particle adhesion because this part underwent an ultra-precision cleaning and was assembled in a clean room.
Please check the flow directions shown on the valve body and the flow direction of the pipes.
Use within specified ranges.
After attaching a fitting, check for leaks.
Lay out the pipes so as to avoid compression, bending or other stress to the valve.
Attach fittings according to the method recommended by the manufacturer.

Cautions to Take When Using the Valves
Cautions
Verify the compatibility of the valve with product materials, usage fluid and surrounding atmosphere before using the valve.
Take care in handling the valves, because the valves are intended to be installed in a clean room and thus are precision-cleaned and clean-packed.
Do not overtighten the flow-adjustment and bypass-adjustment knobs.
Take sufficient precautions when using gas such as N2 or air because such gas may cause leakage from a 1-cm3/min or smaller (air pressure) valves seat.

Instructions When Using a Manual Valve
Cautions
Please open and close valves by hand.
Be careful not to apply excessive force to the valve witha tool, etc., because the valve could be damaged.
To allow for panel mounting as well, the manual valve structure enables the handle to be removed if rotated far enough in the opening direction.

Notes
Valve can be opened and closed by manipulating the handle manually.
Turn the handle to the left to open the valve and to the right to close.

Instructions for When Using an Pneumatic Valve
Cautions
Any attempt to screw an operating air pipe fitting into the operating air-pressure supply inlet must be performed while holding the cylinder to prevent /torque to the body.
Please set the torque when attaching operating air plate fittings to 0.4~0.6Nm.
Please use clean air that does not contain any organic solvents, corrosive gas, etc., for the operating air.
Water hammering may occur due to some fluid pressure conditions. In most cases, the use of a speed controller, etc., to adjust the opening/closing speed can improve operation.
If operation cannot be improved,please recheck the flow, pressure, and pipe conditions.

Notes
Please use a resin R1.8" fitting for the operating air supply inlet.
Please carefully seal operating air pipe fittings to prevent the leakage of operating air.
Please set an operating air pressure within an operation pressure range specified for each valve.
Please use air to open the ports that will not be pressurized beyond the operating pressure in the case of normally closed and normally open valves.

Maintenance Checks

Warnings
Please do not disassemble and reassemble the valve.
When the valve is disassembled and reassembled, valve performance cannot be maintained and in the worst casea life-threatening accident could occur.
If a valve is to be disassembled, you do so at the customer's liability. Note that we do not take any responsibility for reduced valve performance or an accident caused during or after disassembly.
When replacing a valve, please remove the residual chemicals and replace the residue with pure air, etc., first. Please take the following precautions
because there will be a chemical atmosphere due to penetration into the top of the diaphragm (cylinder side).
Do not go near the leak port when the valve is operating.
Use corrosion-resistant gloves when touching the valve.
When not used for a long period of time, please do a test operation before using.
When handling a corrosive fluid, please do periodic maintenance.

Points of Caution When Exporting
Cautions
Since products listed in the catalog are considered strategic goods according to the Foreign Exchange and Foreign Trade Law, the export of these products requires an export license based on said law.
Contact us for details.

Warnings signs in those items that require
special attention in handling
Notes:Items requiring attention during installation

Notes and handling.

106

The following warning signs are given in order to urge caution with those items that require particular attention in handling.
Please read the explanations following the warning signs and follow the directions given.

Cautions

Caution: Items to pay attention to during installation and handling.
In particular, valve safety and quality may be affected,
More attention is required than with the above items.

Warnings

Warning: Mistakes made during installation or handling could lead to a serious accident.
Take adequate precautions because an accident could involve human lifeand not just affect the safety and quality of the valve.

PFA Fittings

TUBE BONDING FITTING
A welded pipe system that clears highlevel requirements For a semiconductor
production process piping
We answer the high-level requirements for clean, leakproof,
lightweight and compact piping for semiconductor fabrication
processes with our welded pipe system.

■TBN
TBN Welded fitting

108

TBN

Clean

Fittings for Welding
Welded Pipe System

Light-weight
Compact

No
No Leaks
leaks■Features

No leak, Clean and Light-weight Compact◎ Uncompromised sealing performance by butt-welding the fitting andtube end, There is no danger whatsoever of leakage or the need forre-tightening the fitting.
◎ Excellent particle count characteristics is achieved by eliminating
moving parts from the fittings.
◎ The welded parts are stronger than the tube, so there will be no
breakage or cracking of the welded parts.
◎ The high heat resistance enabled maximum operating temperature of
200°C, and there won't be any loosening or leakage due to the thermal
cycle.
◎ Light weight and compact size save the piping space.

Welding
Complete

Heater■ Ease of Short tubes welding◎ The newly provided boss allows you to perform fusion welding on your own evenwith dimensions without a clamping allowance at the time of fusion welding,so that compact piping can be laid out.
* The shortest cutting jigs and shortest fusion welding clamp jigs for PWM
fusion welding machine are required.
* The shortest fusion welding cannot be applied to 1·1/2 because there is no boss.

Boss

Boss Tube

Clamp
Shortest welding*

Normal welding

When a clamp jig is used

■ Long sleeves for press fittings◎ Due to the elongated tube portion, sleeve press-fitted type fittings can be directly worked,
so that reduction in the working time and compact piping design can be realized.
◎ Since the posture at press-fit time is stabilized by clamping the boss portion with a press-fit jig,sleeves can be easily inserted straight and errors in working can be prevented.
* The press-fit jig should be prepared by customers.

Since the boss fits into the jig, the fitting can beeasily fixed straight.

■ TBN Piping Kit
We also offer PFA pipe manifolds consisting of TBN fittings and PFA tubes
welded together.
We handle the production of standard kit patterns (arbitrarily designateddimensions) as well as the production of special-order piping kits basedon the customer‘s designated drawings. Please contact the sales
representatives for details.

■Specifications
Material
Maximum Operating Temperature
Maximum Operating Pressure

PFA (perfluoroalkoxy copolymer resin)+200ºC
Nominal diameter(inch)+20ºC (MPa(G))+200ºC (MPa(G))

1・1/2

1・1/4

1

3/4

1/2

3/8

1/4

0.4

0.6

0.4

0.6

0.9

1.0

0.15

0.26

0.15

0.26

0.39

0.43

1.0
0.43

PFA fittings and weld points have higher pressure resistance than that of PFA tubes. The following maximum operating pressures are for reference.
within the pressure rating of the PFA tubes that you use.

Product Code Table
Model

Type of Product

Size

TBN
TBN : TBN Fittings
TBRS : TBN Reducing Fittings

108

T: Tee
L: Elbow
Not shown :In case of TBRS chosen

Application Tube
Nominal Diameter

Please use these fittings

Unit: inch (mm)
■ Tee

a

BOSS

1.50
1.33
1.50
1.33
7.24
(38.10) (33.70) (38.10) (33.70) (184)

3.62
(92)

1.10
(28)

2.52
(64)

-

1.25
1.10
1.25
1.10
5.87
(31.80) (28.00) (31.80) (28.00) (149)

2.93(74.5)

0.79
(20)

2.15
φ1.25
(54.5) (φ31.80)

TBNT-1×1×1

1.00
0.87
1.00
0.87
4.88
(25.40) (22.20) (25.40) (22.20) (124)

2.44
(62)

0.69
(17.5)

1.75
φ0.50(44.5) (φ12.70)

TBNT-3/4×3/4×3/4

0.75
0.62
0.75
0.62
4.06
(19.05) (15.85) (19.05) (15.85) (103)2.03(51.5)

0.59
(15)

1.44
φ0.50
(36.5) (φ12.70)

TBNT-1/2×1/2×1/2

0.50
0.38
0.50
0.38
(12.70) (9.70) (12.70) (9.70)

3.15
(80)

1.57
(40)

0.39
(10)

1.18
(30)

φ0.50
(φ12.70)

TBNT-3/8×3/8×3/8

0.37(9.52)

0.26(6.52)

0.37(9.52)

0.26(6.52)

2.72
(69)

1.36
(34.5)

0.30
(7.5)

1.06
(27)

φ0.37
(φ9.52)

TBNT-1/4×1/4×1/4

0.25(6.35)

0.17(4.35)

0.25(6.35)

0.17(4.35)

2.05
(52)

1.02
(26)

0.24
(6)

0.79
(20)

φ0.25
(φ6.35)

TBNT-1･1/2×1･
1/2×1･1/2
TBNT-1･1/4×1･
1/4×1･1/4

BOSS■ Reducing Tee

BOSS

d3

d4

d1

d2

d3

d4

L

H

A

B

a

TBNT-1･
1/4×1×1･1/4

1.25(31.8)

1.10
(28)

1
(25.4)

0.87(22.2)

5.87
(149)

2.30
(58.5)

0.79
(20)

0.79
(20)

2.15
(54.5)

1.52
φ1.25(38.5) (φ31.80)

TBNT-1×3/4×1

1.00
0.87
0.75
0.62
4.88
(25.40) (22.20) (19.05) (15.85) (124)

2.13
(54)

0.69
(17.5)

0.69(17.5)

1.75(44.5)

1.44
φ0.50(36.5) (φ12.70)

TBNT-1×1/2×1

1.00
0.87
0.50
0.37
(25.40) (22.20) (12.70) (9.50)

4.88
(124)

1.87
(47.5)

0.69(17.5)

0.69(17.5)

1.75(44.5)

1.18
(30)

φ0.50
(φ12.70)

TBNT-3/4×1/2×3/4

0.75
0.62
0.50
0.38
(19.05) (15.85) (12.70) (9.70)

4.06
(103)

1.77
(45)

0.59
(15)

0.59
(15)

1.44
(36.5)

1.18
(30)

φ0.50
(φ12.70)

b

BOSS

A

a

BOSS

1.10
(28)

2.52
(64)

-

1.25
1.10
1.25
1.10
2.93
(31.80) (28.00) (31.80) (28.00) (74.5)

0.79
(20)

2.15 φ1.25(54.5) (φ31.80)

1.00
0.87
1.00
0.87
(25.40) (22.20) (25.40) (22.20)

2.44
(62)

0.69
(17.5)

1.75 φ0.50(44.5) (φ12.70)

TBNL-3/4×3/4

0.75
0.62
0.75
0.62
2.03
(19.05) (15.85) (19.05) (15.85) (51.5)

0.59
(15)

1.44 φ0.50(36.5) (φ12.70)

TBNL-1/2×1/2

0.50
0.38
0.50
0.38
(12.70) (9.70) (12.70) (9.70)

1.57
(40)

0.39
(10)

1.18 φ0.50(30) (φ12.70)

TBNL-3/8×3/8

0.37(9.52)

0.26(6.52)

0.37(9.52)

0.26(6.52)

1.36(34.5)

0.30
(7.5)

1.06
(27)

φ0.37
(φ9.52)

TBNL-1/4×1/4

0.25(6.35)

0.17(4.35)

0.25(6.35)

0.17(4.35)

1.02
(26)

0.24
(6)

0.79
(20)

φ0.25
(φ6.35)

Parts No.

d1

d2

d3

d4

L1

L2

A

B

a

d2

d3

d4

TBNL-1･1/4×1･1/4
TBNL-1×1■ Reducing Elbow

TBNL-1×3/4

1.00
0.87
0.75
0.62
(25.40) (22.20) (19.05) (15.85)

2.44
(62)

2.13
(54)

0.69
(17.5)

0.69(17.5)

1.75(44.5)

1.44
φ0.50(36.5) (φ12.70)

TBNL-1×1/2

1.00
0.87
0.50
0.37
(25.40) (22.20) (12.70) (9.50)

2.44
(62)

1.87
(47.5)

0.69(17.5)

0.69(17.5)

1.75(44.5)

1.18
(30)

φ0.50
(φ12.70)

TBNL-3/4×1/2

0.75
0.62
0.50
0.37
(19.05) (15.85) (12.70) (9.50)

2.03(51.5)

1.77
(45)

0.59
(15)

0.59
(15)

1.44
(36.5)

1.18
(30)

φ0.50
(φ12.70)

BOSS

d1

d2

d3

d4

L

A

TBRS-1･1/4×1

1.25(31.8)

1.10
(28)

1.00
(25.4)

0.87(22.2)

0.71
(18)

0.59
(15)

TBRS-1×3/4

1.00(25.4)

0.87
0.75
0.62
(22.2) (19.05) (15.85)

0.59
(15)

0.47
(12)

TBRS-1×1/2

1.00(25.4)

0.87(22.2)

0.50(12.7)

0.38
(9.7)

0.59
(15)

0.47
(12)

TBRS-1×3/8

1.00(25.4)

0.87(22.2)

0.37(9.52)

0.26(6.52)

0.59
(15)

0.47
(12)

TBRS-1×1/4

1.00(25.4)

0.87(22.2)

0.25(6.35)

0.16(3.95)

0.59
(15)

0.47
(12)

TBRS-3/4×1/2

0.75
0.62
0.50
(19.05) (15.85) (12.7)

0.38
(9.7)

0.59
(15)

0.47
(12)

TBRS-3/4×3/8

0.75
0.62
0.37
(19.05) (15.85) (9.52)

0.26(6.52)

0.59
(15)

0.47
(12)

TBRS-3/4×1/4

0.75
0.62
0.25
(19.05) (15.85) (6.35)

0.16(3.95)

0.59
(15)

0.47
(12)

TBRS-1/2×3/8

0.50(12.7)

0.38
(9.7)

0.37
(9.52)

0.26(6.52)

0.59
(15)

0.47
(12)

TBRS-1/2×1/4

0.50(12.7)

0.38
(9.7)

0.25
(6.35)

0.16(3.95)

0.59
(15)

0.47
(12)

TBRS-3/8×1/4

0.37(9.52)

0.26(6.52)

0.25(6.35)

0.16(3.95)

0.59
(15)

0.47
(12)

Antistatic Unit

Parts No.

PFA Weld Fittings■ Reducer

PFA Valves

L
3.62
(92)

d1

1.50
1.33
1.50
1.33
TBNL-1･1/2×1･1/2(38.10) (33.70) (38.10) (33.70)

b

BOSS

Parts No.

Parts No.

BOSS

L

Vacuum Components■ Elbowd2

Ultra High Purity Fittings

A

d1

Ultra High Purity Valves

H

Parts No.

109

110

Antistatic Unit
eFLOW

KITZ-SCT's wet systems
that meet users' needs
KITZ-SCT designs and produces all types of wet
equipment to meet users' needs.
We offer high-reliability equipment because of ouroriginal technology, special-purpose clean room, andinspection facilities, among other things.

■eFLOW
Antistatic Unit112

eFLOW
Antistatic Unit

The eFLOW® Series is an apparatus to control the resistivity of the DI water by
supplying the CO2 through a "hollow fiber gas permeable membrane" developedby DIC Corp.

■Features◎ A low failure rate achieved due to mechanism without complicated control.
◎ A unique piping layout provides stable resistivity value and enables easy controlof the resistivity.
◎ Long life of the CO2 aeration module (Guaranteed for five years, made by KITZ
SCT)

■Effects◎ Prevents redeposition of contaminants due to static electricity◎ Prevents electrostatic destruction of substrate pattern■Effective field/use
Field

Use
photomask/reticle cleaning
Scrubber cleaning

LSI
LCD

High-pressure jet cleaning
Cleaning in the dicing process
Cell cleaning

Panel Mount Type (P Series)

Cabinet Type (C Series)

The P Series can be installed on a rack in accordance with the EIA (Electronic
Industries Alliance) standard. The 1AP model uses metal-free parts for allwetted areas. The 2 AP model can be metal-free for all wetted areas as an
option.

The C Series has a cabinet with a capacity for two CO2 cylinders.
There is a built-in specific resistance sensor in the cabinet, enabling connection to water pipes to the point of use directly from eFLOW.

360
432

360
432

700
700

350

220
220

350

1190
900

480

1190
900

480
216
216

464
464

112

■Device Principles
Manual purge Switch
Gas filter
Power Switch

Resistivity Meter
Arrangepiping
pipinglength
lengthofofArrangenonolesslessthanthan2m.
2m.
Treated Water

CO2 gasCO2 gasregulator≒0.02MΩ・cm

CO2
gas

Auto-purge
timer

CO2 gas Injetion module
18.2MΩ・cm

Resistivity Sensor

Ultra High Purity Valves

0.2～1.0MΩ・cm

0.2MPa>CO2 gasshut valve
CO2 gas purge valve

CO2 slow-leak（Capillary）

18.2MΩ・cm

Drain

The specific resistance value of DI water can be adjusted by regulating the mixing ratio of CO2 saturated water and ultra DI water generated by the CO2 dissolution
module (see the picture below).

■CO2 Dissolution Principles
CO2 Dissolution Module (Internal Circulation) Made by DIC

CO2IN

Hollow fiber

CO2gas(eFLOW 2AP,2AC eFLOW 3AP,3AC)(eFLOW 1AP,1AC)

H2O+CO2→H2CO3-

PFA Valves

The eFLOW 2A and 3A models are equipped with two carbon dioxide dissolution modules.

DIW

Vacuum Components

H2O+CO2

While DI water flows through the inside the hollow fibers in the module, CO2 gas
penetrates the DI water from outside the hollow fiber membrane. The dissolved
CO2 ionizes in DI water, providing conductivity to DI water to remove static
electricity.
Using the fine hollow fiber bundle, the surface area required for the CO2 dissolution can be obtained efficiently.

Ultra High Purity Fittings

Resistivity control nob

DIW IN

H2CO3→H++HCO3-

2-

HCO3 →H++CO3

Behavior of Resistivity Value During Flow Rate Fluctuation
Scrubber cleaning sample
4L/min (0.5min)←→8L/min (0.5min)

Example of Dicing

PFA Weld Fittings

Example of Scrubber Cleaning

Dicing process sample
OL/min (5min)←→8L/min (5min)

Antistatic Unit

* The resistivity performance during flow rate fluctuation is not guaranteed.
* The graphs provided are for reference only. The performance and characteristics may vary with operating conditions.

113

■Performance, Characteristics
Pressure Loss for Each Model

Range of flow Rate to be Used for Each eFLOW Model
Range of flow rate to be used for each eFLOW model

Pressure loss for each model

When setting

When setting* The resistivity performance during flow rate fluctuation is not guaranteed.
* The graphs provided are for reference only. The performance and characteristics may vary with operating conditions.

■Specifications
Unit: eFLOW®

Panel mount type

Cabinet typeType

1AP-B022AP-B01

3AP-B01

1AC-P201

2AC-P201

3AC-P201

Range of Treated Water Flow
Rate [L/min]

1~16

5~30

10~50

1~16

5~30

10~50

2 PF-001L-ND3s(3 modules)

1 PF-001L-NA(1 module)

Connection Size

φ12mm

Module1 PF-001L-NA(1 module)

Rc1"PP
2 PF-001L-ND2s(2 modules)

Rc3/4" PVC union

Rc1" PVC union
2 PF-001L-ND2s(2 modules)

Range of Resistivity Settings

0.2~1.0 (MΩ) *(1)Stability During Constant Flow
Rate

Within ± 15% (stability during flow rate fluctuation not guaranteed)

Operating Fluid

Supply water: RO water or better, supply gas: CO2 gas (99.5% or higher purity)
Dry air or N2 gas for drying * No other fluids may be used.

Supply Water Temperature andPressure Range

20~30 (ºC) 0.1~0.3 (MPa(G)) Max. 0.5 (MPa(G))

CO2 Gas Supply

Supplied from the utility on the user sideCan be outfitted with two CO2 gas tanks (optional)
φ140 (5 kg capacity) or φ175 (7 kg capacity)

CO2 Gas Supply Pressure

Less than 0.2 MPa (Outlet pressure of the CO2 tank for cabinet type)

Range of CO2 Gas Settings

0.05~0.15 MPa (the pressure set on the eFLOW front panel)

Operating Environment andStorage TemperaturePower Supply Specifications andPower Consumption
Warning
External Output

2 PF-001L-ND3s(3 modules)

20~30 (°C) 10~40 (°C) (cannot be frozen)
Single-phase AC 100-240V 50/60 Hz Maximum 100VA
Upper and lower limits of resistivity value, power supply monitor:
Warning lamp, buzzer (with reset switch)

Upper and lower limits of resistivity value, power supply monitor,water leak detection:
Warning lamp, buzzer (with reset switch)

Warning: relay contact (c contact) capacity AC 220V DC 24V 3 A (load resistance)
Transmitted output: 4~20 mA maximum load resistance 900 Ω insulated output

External Dimensions

W432×D350×H199.5[mm] (BOX part)W480×H216×t3[mm] (panel part)
Does not include protuberance

W600×D360×H1120[mm] (BOX part)
W600×H900[mm] (opening part)
Does not include protuberance

Material

Hair-lined SS panel

SS Baked-on panint finish

WeightAbout 9 kg

About 100 kg

Fastening Methods

Can be attached to EIA-standard rackL-angle caster (with adjuster)

Resistivity Meter
Resistivity Sensor

HE480-R (AC) (AC100~240V) Manufactured by HORIBA Advanced Techno Co., Ltd.
ERD-001C-T (titanium electrode) external installation
Install 2 m downstream on the pipe from eFLOW

ERD-001C-T (titanium electrode)
Already installed in the case (built-in)

Comes withCO2 slow leak (hollow fiber capillary) valve

Equipments

Options

CO2 gas auto purge (timer controlled), manual purge (pushbutton switch)-

Carbon dioxide filter (0.01μm)-

Water leak sensor (reflective)-

CO2 gas pressure sensor, warning light* (1) Please contact the sales representatives for settings below 0. 2MΩ⋅cm. Settings of 1.0 MΩ⋅cm or higher are possible, but accuracy is not guaranteed.

114

Product Name Index* O denotes size number.
□ denotes actuation type (C for normally closed, O for normally open).

A

E
eFLOW (Antistatic unit)

112

B
B23FKD○□□-VC
B23FKD○□□-VFC
B23HKD○□□-VFC
B23HKD○M-VFC
B23VKD○□□-VFC
B23VKD○M-VFC
BZD○MS-RFXT
BRW○DS-NWHT
BRW○MS-NWHT
BRWH○DS-NWHT
BRWH○MS-NWHT

30
30
29
28
29
28
44
83
83
83
83

F
FCD Suck back valve
104
FCD Variable flow valve with
104
pneumatic bypass valve
FCD pneumatic valves98
FCD manual valve
95
FCD pneumatic valve with by101
pass
FCD variable flow valve
101
FCD variable flow valve with101
bypass
FCDT
105

C
CVC○-2S15
CVC○-2S28
CVC○-2S30.5
CVC○-2S43
CVC○-4S16
CVC○-4S28
CVC○-4S45
CVC○-6S15
CVC○-6S28
CVC○-6S31
CVC○-6S43
CVC○-BG
CVC○-G
CVC○-ME
CVC○-MT
CVC○-NBF
CVC○-NBM
CVC○-NF
CVC○-NF-H
CVC○-NM
CVC○-NM-H
CVC○-NSM
CVC○-RG
CVC○-S12
CVC○-S15
CVC○-S16
CVC○-S22
CVC○-S27
CVC○-S28
CVC○-S30.5
CVC○-S43
CVC○-S45
CVC○-S52
CVC○-SB22
CVC○-SB28
CVC○-SB43
CVC○-SB45
CVC○-UB
CVC○-UBS28
CVC○-UC
CVC○-UCFW
CVC○-UCMW
CVC○-UE
CVC○-UEFW
CVC○-UEMW
CVC○-UF
CVC○-UM
CVC○-USFWCVC○-USMW
CVC○-UT
CVC○-UTFW
CVC○-UTMW

49
49
49
49
49
49
49
48
48
48
48
50
50
54
54
50
50
49
49
49
49
49
50
48
48
48
48
48
48
48
48
48
48
48
48
48
48
51
51
52
53
53
51
52
53
51
51
52
53
52
52
53

G
H

D

I
IB○□S-S□□
IB○□S-V□□
IB○□S-VF□□
IB○□S-W□□
IB○MS-S□□
IB○MS-V□□
IB○MS-VF□□
IB○MS-W□□
IB○QS-S□□IB○QS-V□□
IB○QS-VF□□
IB○V□S-S□□
IB○V□S-V□□
IB○V□S-VF□□
IB4BN1.4S-VFM
IB4BN1.4S-VM
IB4BN4.0S-VFM
IB4BN4.0S-VM
IBC○CY3-WCT
IBC○MY3-WCT
IBD50CY3-WCT
IBD○MY3-WCT
IBE○MY2-WCT
IBE○MY3-WCT
IC○□-S□
IC○□-V□
IC○□-VF□
IF○-5SW
IF○-BLF
IF○-NIG
IF-PIN
IF○-RAF
IVB○(V) XF (8) A-NWF
IVB○CA-NWF
IVB○D(V) XF (8) A-NWF
IVB○DA-NWF
IVB○MA-NWF
IVB○OA-NWF
IVBH○(V) XF (8) A-NWF
IVBH○CA-NWF
IVBH○D(V) XF (8) A-NWF
IVBH○DA-NWF
IVBH○S(V) XF (8) A-NWF
IVBH○SCA-NWF
IVBH○SD(V) XF (8) A-NWF
IVBH○SDA-NWF
IVBH-C015
IVBL○MA-NWF
IVBL○S(V) X (F) (8) A-NWF
IVBL○SCA-NWF
IVBL○SD(V) X (F) (8) A-NWF

37
37
37
37
35
35
35
35
36
36
36
38
38
38
39
39
39
39
43
42
43
43
43
43
31
31
31
68
68
68
68
68
78
73
78
73
73
71
78
74
78
74
78
74
78
74
80
72
77
72
77

IVBL○SDA-NWF
IVWF○FS-NW
IVWF○FS-V□
IVWF○MS-NW
IVWF○MS-V□
IVWF○SDS-NW
IVWF○SDS-V□

72
87
87
85
85
86
86

J
K
KCD4□S-VC
KCD4□S-VFC
KCD4□S-WC
KCD4MS-VC
KCD4MS-VFC
KCD4MS-WC
KD○□B-VC
KD○□B-VFC
KD○□B-WC
KD○□S-SC
KD○□S-VC
KD○□S-VFC
KD○□S-WC
KD○KCS-VFM
KD○KCS-VM
KD○KCS-WM
KD○KOS-VFM
KD○KOS-WM
KD○MB-VC
KD○MB-VFC
KD○MB-WC
KD○MS-SC
KD○MS-VC
KD○MS-VFC
KD○MS-WC
KD○QB-VC
KD○QB-VFC
KD○QB-WC
KD○QLS-SC
KD○QLS-VC
KD○QLS-VFC
KD○QLS-WC
KD○QS-SCKD○QS-VC
KD○QS-VFC
KD○QS-WC
KD○QTS-SC
KD○QTS-VC
KD○QTS-VFC
KD○QTS-WC
KD○TS-VC
KD○TS-VFC
KD8KOS-VM-18
KD4KOS-VM-66

14
14
14
14
14
14
7
7
7
5
5
5
5
10
10
10
10
10
6
6
6
3
3
3
3
6
6
6
11
11
11
11
4
4
4
4
12
12
12
12
9
9
10
10

L
LG series

91

M
N
O
P
PCA○-JF
PCA○-NW
PD31L3
PE33L3
Q

89
89
81
81

R
RD○CBH-VC
RD○CBH-VFC
RD○CBH-WC
RD○CBI-VC
RD○CBI-VFC
RD○CBI-WC
RD○CSH-SC
RD○CSH-SC-1484
RD○CSH-VC
RD○CSH-VC-971
RD○CSH-VFC
RD○CSH-VFC-1371
RD○CSH-WC
RD○CSH-WC-1408
RD○CSI-SC
RD○CSI-VC
RD○CSI-VC-972
RD○CSI-VFC
RD○CSI-VFC-1295
RD○CSI-WC
RD○CSI-WC-1571
RD○MBH-VC
RD○MBH-VFC
RD○MBH-WC
RD○MBI-VC
RD○MBI-VFC
RD○MBI-WC
RD○MSH-SC
RD○MSH-VC
RD○MSH-VFC
RD○MSH-WC
RD○MSI-SC
RD○MSI-VC
RD○MSI-VFC
RD○MSI-WC

24
24
24
24
24
24
22
22
22
22
22
22
22
22
22
22
22
22
22
22
22
23
23
23
23
23
23
21
21
21
21
21
21
21
21

S
SBB○CS-RFCTSBB○CS-UCTSBB○CS-WCT
SBB15CS-UCTSBB20CS-UCT-21
SBB25CS-UCT-14
SBB25OS-RFCT
SBB25OS-UCT
SBB25OS-UCT-04
SBB25OS-WCT
SBB○MS-RFCT
SBB○MS-UCTSBB○MS-WCT
SBB10MS-UCT-24
SBB15MS-RFCT-133
SBB15MS-UCT-128
SBB20MS-RFCT-94
SBB20MS-UCT-90
SBB25MS-RFCT-96
SBB25MS-UCT-99
SCF 90E ○SCF LAP(L) ○SCF RC ○SCF T ○
SCL ○ESCL ○RSCL ○TSCM ○ATSCM ○CSCM ○ESCM ○RSCM ○RT
SCM ○T

41
41
41
41
41
41
41
41
41
41
41
40
41
40
41
40
41
40
41
40
60
65
63~65
60~63
58
58
58
57
57
56
57
56
56

Product Name Index* O denotes size number.
□ denotes actuation type (C for normally closed, O for normally open).

SCM 40E-P0413
SCM 40T-P0413
SCM 40T-P1304
SQ○A-4W-F
T
TBNL-○×○
TBNT-○×○×○
TBRS-○×○
TBN Welded fitting
TCD
TDUUXG Series

57
57
58
66

108
108
108
110
32
32,33

91

V
VLCD4CS-VC-2734
VLCD4CS-VFC-2735
VLD○CS-SCVLD○CS-VC
VLD○CS-VFC
VLD○MB-W15AVC
VLD○MB-W25AVC
VLD○MB-W32AVC
VLD○MB-W40AVC
VLD○MB-W50AVC
VLD○MB-W65AVC
VLD○MS-SC
VLD○MS-VC
VLD○MS-VFC
VRD4MSI-SC

15
15
17
17
17
17
17
17
17
17
17
16
16
16
25

VRD4MSI-VC
VRD4MSI-VFC
VRD4MSI-WC

25
25
25

W
WD4CS-VC
WD4CS-VFC
WD4CS-W6C-2970
WD4MS-VC-N-588
WD4MS-VFC-N-589
WD4MS-W6C-N-544

19
19
19
19
19
19

X
Y

Z
ZCD4QS-SCZCD4QS-VC
ZCD4QS-VFC
ZCD4QS-WC
ZCD4□S-SC
ZCD4□S-VC
ZCD4□S-VFC
ZCD4□S-WC

26
26
26
26
27
27
27
27

Product Warranty(1) Warranty Term
One year after purchase. For any malfunction of a product purchased from KITZ SCT that occurs during the warranty
term as a result of failure, at the time of delivery, to fulfill the specifications intended, KITZ SCT will repair or replace
the product at no charge.
(2) Range of Warranty
The warranty is limited to our products that were produced at and delivered from our Nitta SC Plant.
Regardless of the warranty term, this warranty does not cover troubles or accidents, or any customer’s opportunity
loss, lost profit, secondary damage or damage to anything other than our products, as well as replacement work,
readjustment of local machinery or equipment or trial operation by the customer.
Safety management associated with the use of a product purchased from KITZ SCT and peripheral equipment willbe the responsibility of the user.
[Exclusions]
The warranty does not cover any of the following cases, even if it occurs during the term of the warranty.
1) Cases where failure occurs resulting from the replacement (maintenance) of parts by a person other than a KITZ SCT engineer.
2) Cases where failure occurs due to a natural disaster or force majeure.
3) Cases where failure occurs due to misuse of the product or not taking the required precautions in handling the product.
4) Cases where the product is used or stored in an unsuitable environment.
5) Cases where the product is used for purposes other than the designated objectives, the product is used at a range
exceeding the range of conditions specified in the design, or a purchased product is modified.
6) Cases where corrosion and failure occurs due to external factors or a corrosive liquid.
7) Any other case judged to be outside of the responsibility of KITZ SCT.

Sales Offices■Tokyo Head Office■Osaka Sales Office

Chukyo Branch OfficeToyama Satellite Office■Kyusyu Sales Office

JRE Omori Station Higashiguchi Bldg. 3F, 1-5-1 Omorikita, Ota-ku, Tokyo 143-0016, Japan
TEL.81-3-6404-2171 FAX.81-3-6404-2172
3F MG Amagasaki Ekimae Bldg.
21 Misono-Cho, Amagasaki-City, Hyogo-Pref, 660-0861, Japan
TEL.81-6-6413-4177 FAX.81-6-6413-4188
Ozeki-Heights 1F, 1-12-13 Unomori, Yokkaichi-City, Mie-Pref, 510-0074
TEL.81-59-350-8121 FAX.81-059-350-8122
Toyama Denki Bldg. 216, 3-1 Sakurabashidori, Toyama-shi, 930-0004, Toyama
TEL.81-76-486-8181 FAX.81-76-486-8101
Z・S Fukuoka Bldg. 4F,
3-4-2 Higashihie, Hakata-ku, Fukuoka-City, Fukuoka-Pref, 812-0007, Japan
TEL.81-92-483-0185 FAX.81-92-483-0186

Plants■Nitta SC Plant

150-2 Nittakane-Cho, Ota-City, Gunma-Pref, 370-0352, Japan
TEL.81-276-60-9600 FAX.81-276-60-9330■KITZ SCT Corporation of Kunshan 8-3, No. 3 Road, Export Processing A Zone, Kunshan Jiangsu 215300, China
TEL.86-512-5735-0700 FAX.86-512-5735-7500┗KITZ SCT Corporation of Kunshan Bldg. 9, No. 68, Taoyuen Rd., Export Processing B Zone,
Kunshan Jiangsu 215300, China
Branch Plant

Overseas Offices■KITZ SCT America Corporation■KITZ SCT Corporation
Taiwan Representative Office■KITZ SCT CORPORATION OF
KUNSHAN, Shanghai Branch
Company

5201 Great America Parkway, Suite 238, Santa Clara, CA 95054, USA
TEL.1-408-747-5546 FAX.1-408-747-5726
3F.-1, No.38, Beida Rd., East Dist.,Hsinchu City, Taiwan (R.O.C.)
TEL.886-3-542-0110 FAX.886-3-542-0551
Room 1704, No.3000, Zhongshan N. Rd., Putuo Dist.,
Shanghai 20063, China
TEL.86-21-5243-5025 FAX.86-21-6439-1257

KITZ SCT Corporation
https://www.kitzsct.com/

2405⑪