1. Stack type piezo actuators
1.1 Low voltage actuators with preloaded casings VSPSt 150/4 /… VS9General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 40 N
Max. load force: 300 N
Max. force generation: 300 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/4/7 VS9: approx. 0.05 Nanometer9330.5

M2, 3 mm depthL333SW 6 mm
M3, 4 mm depth

TypePSt 150/4/7 VS9PSt 150/4/20 VS9PSt 150/4/40 VS9PSt 150/4/60 VS9max. stroke

lengthstiffnessmmel.
capacitance
nF

N/µm

resonance
frequency
kH zµm13/927/20
55/40
80/60

19284664

170
340
700
1000

2512644030
2012

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178 with BNC connector
9Options:
Coaxial cable RG 178 with LEMO connectors 00250 or 0S250
Moving end with spherical end piece VbS
UHV compatibility

3
1R1

30.5

Accessories see section 3Stroke A/B

A: for –30 V thru +150 V
B: for 0 V thru +150 VMax. force generation: for –30 V thru +150 V

6PIEZOMECHANIKVbSPSt 150/5/… VS10General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 150 N
Max. load force: 800 N
Max force generation: 800 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/5/7 VS10: 0.05 Nanometer 10
4M3, 4 mm depth
40.5LSENSOR
3PIEZOSW 8 mm
M3, 4 mm depth

TypePSt 150/5/7 VS10
PSt 150/5/20 VS10
PSt 150/5/40 VS10
PSt 150/5/60 VS10
PSt 150/5/80 VS10
PSt 150/5/100 VS10max. stroke

lengthstiffnessmmel.
capacitance
nF

N/µm

resonance
frequency
kH z

µm
13/9
27/20
55/40
80/60
105/80130/100

1928
4664
82
100

350
800
1600
2400
3200
4000

50
25
128
6540
30
20151210

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:
Coaxial cable RG 178 with LEMO connectors 00250
or 0S250
 10

Moving end with spherical end piece Vbs
Moving end with threaded pin VAg
Moving end plane pFThermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 3 10 10444M364VAg

SW 3 mmR40.5VbS

51.

140.5pF

PIEZOMECHANIK

7

PSt 150/7/… VS12
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = 300 N
Max. load force: 1800 N
Max. force generation: 1800 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/7/7: 0.05 Nanometer 125M3, 4 mm depth
40.5

3SW 4 mmLSENSOR
3PIEZOSW 10 mmM4, 4 mm depth

TypePSt 150/7/700 VS12PSt 150/7/20 VS12PSt 150/7/400 VS12PSt 150/7/60 VS12PSt 150/7/800 VS12PSt 150/7/100 VS12PSt 150/7/120 VS12PSt 150/7/140 VS12PSt 150/7/160 VS12max. stroke

lengthstiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z

µm
013/9
27/20
55/40
80/60
105/80130/100
160/120190/140
210/160

1928
46
64
82
100
118
136
154

0.7
1.8
3.6
5.4
7.2
9
111315120
60
2515
12108
7640
30
20
15
12108
65Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:
Coaxial cable RG178 with LEMO connectors
00250 or 0S250

Accessories see section 3 12
5Moving end with spherical end piece VbS
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection

 12 125

5M4



70.52VAg

8 PIEZOMECHANIK

SW 4 mm51.

140.5VbS

40.5pF

PSt 150/10/… VS15General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 400 N
Max. load force: 4000 N
Max. force generation: 3500 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/10/7 VS15: 0.05 Nanometer.

 15
6M4, 4 mm depth
40.5

3.75
SW 5 mmLSENSOR
3PIEZOSW 13 mmM4, 4 mm depthTypemax. stroke

lengthµm
27/20
55/40
80/60
105/80130/100
160/120190/140
210/160
240/180
270/200

PSt 150/10/20 VS15
PSt 150/10/40 VS15
PSt 150/10/60 VS15
PSt 150/10/80 VS15
PSt 150/10/100 VS15
PSt 150/10/120 VS15
PSt 150/10/140 VS15
PSt 150/10/160 VS15
PSt 150/10/180 VS15
PSt 150/10/200 VS15stiffnessmmel.
capacitance
µF

N/µm

resonance
frequency
kH z

28
46
64
82
100
118
136
154
172
190

3.6
7.2
1114
18
21
25
28
33
37120
60
35
25
20
15
14
13
1110

30
20
14
1210
87654

Standard configuration:

Moving end with spherical end piece Vbs
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection

Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:
Coaxial cable RG 178 with LEMO connectors
00250 or 0S250

Accessories see section 3

 15
670.5VAg

M4R2240.5

SW 5 mmVbs

 15

 15

6

61

40.5

pF
PIEZOMECHANIK

9PSt 150/14/… VS20
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 1000 N
Max. load force: 7000 N
Max. force generation: 7000 NOpen loop sensitivity at 1 mV amplifier noise for actuator PSt 150/14/20: approx. 0.1 Nanometer 208M5, 5 mm depth
SW 6 mm340.5LSENSOR
5PIEZOSW 17 mm
M8, 7 mm depth

PSt 150/14/20 VS20
PSt 150/14/40 VS20
PSt 150/14/60 VS20
PSt 150/14/80 VS20
PSt 150/14/100 VS20
PSt 150/14/120 VS20
PSt 150/14/140 VS20
PSt 150/14/160 VS20
PSt 150/14/180 VS20
PSt 150/14/200 VS20

max. stroke

lengthµm
27/20
55/40
80/60
105/80130/100
160/120190/140
210/160
240/180
270/200

Standard configuration:
Tapped hole in moving end
1 m coaxial cable RG 178 with BNC connector
Options:
Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Coaxial cable RG 316 for power applications

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z35537189107
125143161
179
197

7142230
394755
6371
80

250
12070
5040
3530
25
222030201412108765
4

Moving end with spherical end piece Vbs
Moving end with threaded pin VAg
Moving end plane pF
Thermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 3 20
8M5 20R38240.5VbS

10 PIEZOMECHANIK8

 20
SW 6 mm

Type3VAg

840.5pF

PSt 150/20/… VS25
General data: see brochure: “First Steps towards Piezoaction”
Prestress force = max. tensile force = approx. 1500 N
Max. load force: 14000 N
Max. force generation: 11000 N
Open loop sensitivity at 1 mV amplifier noise for actuator PSt 150/20/20 VS25: approx. 0.1 Nanometer 25
 10M6, 6 mm depth
SW 8 mm40.53LSENSOR
5PIEZOSW 22 mm
M8, 7 mm depth

TypePSt 150/20/20 VS25
PSt 150/20/40 VS25
PSt 150/20/60 VS25
PSt 150/20/80 VS25
PSt 150/20/100 VS25
PSt 150/20/120 VS25
PSt 150/20/140 VS25
PSt 150/20/160 VS25
PSt 150/20/180 VS25
PSt 150/20/200 VS25

max. stroke

lengthµm
25/20
50/40
75/60
95/80
120/100
150/120
175/140200/160
230/180250/200

Standard configuration:
Tapped hole in moving end
Electrical connection: 1 m coaxial cable RG 178
with BNC connector
Options:

stiffness

mmel.
capacitance
µF

N/µm

resonance
frequency
kH z

37
57
77
97
117
137
157
177
197
217

112233
44
55
66
77
88
100
110

500
250
160
100
80
65
55
50
45
40

28
18
1311976543

Thermostable modification
Low temperature modification
UHV compatibility
Position detection
Accessories see section 3

Coaxial cable RG178 with LEMO connectors
00250 or 0S250
Coaxial cable RG 316 for power applications
Modifi ed end pieces on request
Stroke A/B

A: for –30 V thru +150 V
B: for –30 V thru +150 V
Max. force generation: for –30 V thru +150 V

PIEZOMECHANIKPIEZOMECHANIK 11