ELECTRON GUNSEGH-8202 / EGPS-8202
ELECTRON GUN / POWER SUPPLY

10 keV to 100 keVHigh Energy Electron Beams, Two Lens System, High Currents up to 20 mA pulsed
FOR USE IN:NEWION GUNSVACUUM PHYSICS EXPERIMENTS
PLASMA EXCITATIONFEATURES / OPTIONS:HIGH BEAM CURRENTS UP TO 20mA
MAGNETOSTATIC FOCUSING
TWO - LENS SYSTEMMAGNETOSTATIC DEFLECTIONPULSE CAPABILITY
DIFFERENTIAL PUMPING
AND OPTIONAL GATE VALVE
USER-REPLACEABLE FIRING UNITSCOMPUTER SYSTEM AVAILABLE

The gun features an adjustable cathode feedthrough assembly thatallows the mechanical alignment of the firing unit with respect to theanode and the column. This alignment can be done in real time while
the gun is operating with beam on.
UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr to 10-6 torr. The electron gun is bakeable to 200ºC withcables removed; bakeout is limited by the magnetic focus anddeflection coils. The Source region separately is bakeable to 350ºC.
The EGH 8202 usually employs a high current, rugged thoria or yttriacoated iridium disc cathode.(ThO2 or Y2O3 - Ir). The cathode- is notdamaged by repeated exposure to atmospheric gases or water vapor
when cold. In addition, the iridium cathode may survive a brief
accidental loss of vacuum.
The gun design provides for differential pumping of the Source region.
There is an optional gate valve after the first lens, as well as attachment
for Turbo pumps on the Source chamber and on the other side of thevalve.

Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

The Power Supply System for the EGH-8202 is composed of four
separate units: the EGPS-8202 Electron Gun Power Supply, a H.V.
Floating Supply Box and a separate H.V. Driver Unit / H. V. Unit
controlled by the EGPS-8202. The EGPS-8202 features a modular
design with miniaturized power supply clusters, optically isolated
signals, and the new FlexPanel digital interface controller. The included
power supplies are Beam Energy, Source, Grid, First Anode, Magnetic
Lens1, Lens2, X1, Y1, X2, and Y2 Deflection.
The power supply design includes a unique optically controlled floating
electronics box that is mounted close to the gun. Among otheradvantages, this design reduces voltage loss due to cable length andreduces the possibility of arc damage due to excess stored energy inthe high voltage cable. The fiberoptics control permits the EGPS-8202
to be located at a distance from the gun for safety.
The new FlexPanel provides a digital display screen and an encoder
wheel for programming control on the front panel. Rear panel
connectors allow remote /computer control and metering of all gun
power supplies. An RS-232 or RS-422/485 serial port and an analog
input/output connector are included on standard power supply units. Allcommon computer interface bus types can be accommodated, by useof appropriate digital to analog converters.
An optional LabVIEWTM computer program designed for theEGH-8202 is available for remote computer control and metering using
National Instrument DAQ boards and SCSI connectors on theEGPS-8202. The program provides a virtual panel of controls andmeters on the user’s computer screen. A complete computer system isalso available with the software and DAQ hardware installed.

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DETECTORSThe adjustable optics of the gun can adapt to different divergences anddifferent working distances. The spot size can be varied from 1 mm to15 mm at the end of the gun. The working distance ranges from 0 mm
(the end of the gun) to 1000 mm. Two magnetic focusing lenses andtwo magnetic centering deflection coils provide beam control with lowaberration. In addition, the tetrode to second anode spacing isinternally adjustable to change perveance.

Firing units are user-replaceable without removing the entire gun fromthe vacuum chamber and, if the optional gate valve is installed, without
breaking vacuum on the host vacuum system. Spare firing units canbe purchased new, and used firing units may be returned to the factoryfor rebuild. Alternatively, the entire electron gun can be sent back to thefactory for complete cleaning, rebuild, cathode replacement, andoptional in-vacuum testing.

COMPONENTS

The gun uses a thoria or yttria-coated iridium cathode to generate ahigh energy, focusable electron beam. Both beam energy and beam
current are independently adjustable over wide ranges, the energy
from 10 keV to 100 keV, and current from 10 nA to 20 mA. The
electron beam can be pulsed by an input signal to the control grid.

The gun is usually mounted on a 6 inch CF flange and has 440mm
insertion distance. A 2¾ CF flange on end of the gun allows a user
supplied foil to be mounted at the beam exit. Due to the high power
beam produced by the EGH-8202, X-ray shielding is essential.

INDEX / INFORMATIONThe Kimball Physics EGH-8202 Electron Gun, with its matching
EGPS-8202 Power Supply is a complete subsystem ready to attach tothe user's vacuum system and turn on. It can deliver electrons over a
very broad range of energies, currents and power. The EGH-8202 canbe used in a variety of high power, pulsed applications in vacuum
physics, such as plasma generation.

EMITTERS

EGH-8202A Electron Gun with 6 CF mounting flange, differential pumping, and optional gate valve

EGH-8202 ELECTRON GUN SPECIFICATIONSBEAM ENERGYBEAM CURRENT

10 keV to 100 keV (Independently adjustable)
100 nA to 1 mA (Independently adjustable)
Pulsed beam: up to 20 mA
ENERGY SPREAD
Approx. 0.4 eV cathode thermal spread, calculated
BEAM FOCUSING
Magnetostatic , 2 lens system
BEAM DIVERGENCE Variable. Adjustable optics to adapt to different
diverences and different working distances
SPOT SIZE
Range: 1 mm to 100 mm; 1 mm to 15 mm at end of gun
WORKING DISTANCE 0 to 1000 mm
BEAM DEFLECTION Magnetostatic: ± 0.5° at 100 keV
Optional Dual Grid Power Supply: pulse width 2 µs to
PULSE CAPABILITY
DC, rise/ fall 500 ns, rep rates to 5 kHzwith optional LabVIEWTM program pulse generator
BEAM BLANKING
None
BEAM UNIFORMITY
Gaussian
FIRING UNIT
Customer-replaceable Firing Unit Cartridge includes
precision-aligned cathode, and Wehnelt (G-1) assembly
Entire firing unit also includes first anode
Thorium oxide (ThO2) or Yttrium oxide (Y2O3)CATHODE TYPE
Cathodes not harmed by repeated exposure toatmospheric gases while cold
INTERNAL GUN
Adjustable Feedthrough for mechanical alignment of firing
ALIGNMENTunit while gun is operating
MOUNTING
6 inch CF flange, Optional two support brackets
Three 4½ inch ports for small pumps and two 2¾ inch
DIFFERENTIALports for ionization guagesPUMPING
Optional in-line valve for isolation of Source chamber:
VAT Mini UHV gate valve with double acting pneumatic
actuator and position indicator, #01032-UE-0004
Optional pumps: Varian Turbo-V70 LP with controller
Optional gauges: Granville-Phillips 354 Micro-Ion Module
INSERTION LENGTH 440 mm
Gun length: 1270 mm outside vacuum, sealing surface toGUN DIMENSIONS
end of cable connector
Gun diameter: 335 mm at flange cluster on Sourcechamber (no pumps), 203.2 mm dia Source chamber,
127 mm dia housing support tube
FEEDTHROUGHS
Multipin brazed ceramic, threaded aluminum-plated shellfor main cable and stainless steel shell for others
All high voltage fully ground-shielded cables with mating
CABLES /metal to metal connectors, to connect gun and power
CONNECTORSsupply. Standard lengths: 3 m Optional: 5 m, control unit
to HV floating supply box.
MAXIMUM BAKEOUT

EGPS-8202 ELECTRON GUN POWER SUPPLY SPECIFICATIONSOUTPUTSENERGY SUPPLYSTABILITYBEAM STABILITY

All necessary voltages to drive the EGH-8202 ElectronGun (in combination with H.V. Power Supply)<0.01% per hour with 0.05% rms ripple at full output±0.1% per hour with Emission Current Control or±10% per hour after warm up without ECC
CONTROLS
FlexPanel controls: Energy, Source, Grid,1st Anode,Emission Current Control, Lens1, Lens2,
Deflection1 X&Y Deflection2 X&Y.
METERING
FlexPanel digital meters: Energy, Source Voltage
Source Current, Emission Current, Grid Voltage,
1st Anode Voltage, Lens1 Current, Lens2 Current,
Deflection1 X&Y Currents, Deflection2 X&Y Currents
Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
COMPUTER/REMOTE Metering: 0 to +2 V ( -2 V to +2 V, deflection)
CONTROL & METER On/off switches: 0 or +5 V
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-232, RS-422 or RS-485
available, if specified at time of order)
Optional: SCSI metering and programming connectors
INPUT
115 VAC switchable to 230 VAC, 50 to 60 Hz single
phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing,Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
Optional: National Instruments LabVIEWTM file, designed
SOFTWARE
to run with computer DAQ boards NI 6034E and NI 6703
with optional computer generated pulsing signal
COMPUTER SYSTEM Optional: Industrial computer system including dataacquisition and control hardware DAQ.
DIMENSIONS
Three units, total approx: 17 in. x 32 in. x 22 in.
(width x height x depth) excluding handles (425 mm x 815 mm x 560 mm);
19 in. rack mountable
DIMENSIONS
7 in. x 17 in. x 25 in. (152 mm x 432 mm x 635 mm);
H.V. Floating Supply
placed near gun

Typical performance;data for guidance only.

200°C with cables removed(200°C for magnetic Lens and Deflection coils, 350°C forSource chamber region)

A typical lab set-up of an
EGH-8202 Electron Gun
connected to its H.V.
Floating Supply Box

0.10 X

EGH-8202 ELECTRON GUN(Dimensions in mm)
Copyright © 2005 by Kimball Physics, Inc. 11/25/05 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.