UHV Bakeable Sensor
INFICON UHV Bakeable Sensors offer proven reliability and durability and have the best thermal
stability of any sensor head on the market. Made from 304 stainless steel, molybdenum, Inconel®,nickel, and alumina materials, UHV Bakeable Sensor is designed to withstand continuous bakeout
temperatures up to 450°C (for bakeout only, water flow required for actual deposition monitoring).
The front load design allows for easy insertion of the crystal holder in applications lacking sufficientroom for side insertion.
Sensor Configurations
UHV Bakeable Sensor is available in a standard configuration where the water tubes are parallel to thecrystal face. Optionally, sensors can be ordered with a pneumatically driven crystal shutter to protect
the crystal during source warm up, when not used during deposition of an alternate material, or toextend crystal life when used with RateWatcher™.
The exposed crystal electrode is fully grounded to effectively eliminate problems due to RF interference.
Feedthrough and Feedthrough Connection
All UHV Bakeable Sensors come welded to a CF40 (2 ¾ in. ConFlat®) flange feedthrough.

A DVAN TAGE S■High temperature braze and welded construction■

Bakeout temperatures to 450°C■

Crystal shutter (option)■

Front load crystal holder■

Easy installation■

CF40 feedthrough■No brazing or welding to feedthrough required■S ensor / feedthrough combination welded tocustomer specified lengths

O RD E R I N G I N F ORMAT ION
UHV Bakeable Sensor
BK –Type of sensor (Includes crystal snatcher and user manual.
Crystals sold separately)
Standard (water lines parallel to crystal face).................................

A

Shutter Assembly (see note 3)
None.............................................................................................
Standard shutter...........................................................................

01–NOTE 1:UHV Bakeable Sensor orders are measured
from center of the crystal to the vacuum side(sealing surface) of the feedthrough. Once awelded sensor order is confirmed, it cannot becancelled.
NOTE 2:All UHV Bakeable Sensors are welded to a CF40
feedthrough.
NOTE 3:
Shutter air tube is connected to the feedthroughtube using VCR fittings for field replacement.

Length of sensor (see note 1)
Standard length:
Shuttered sensors: 17–99 cm (28–39 in.)Non-shuttered sensors: 10–99 cm (28–39 in.)...................................
*** Sensor lengths over 71 cm (28 in.) are subject to an
additional charge as well as 2–4 weeks additional lead time.

F

Welded Sensor Length (see notes 1 and 2)
Weld length in centimeters, 10–70 cm (4–27.5 in.)............................
Weld length in centimeters, 71–99 cm (28–39 in.).............................

10–70
71–99Sensor
Substrate

Controller or monitor

In-vacuum cable
Source shutterFeedthrough15.2 cm (6 in.)
BNC cable
Oscillator or XIU

2Front Load Bakeable Sensor

Oscillator (XIU)
to instrument
interconnect cableS P E C I F I C AT ION S
BK-A0F series UHV Bakeable Sensor without shutter
Maximum temperature

450°C continuous (for bake only; water flow recommended for actual deposition monitoring)Sensor head size (maximum envelope)

34 x 35 x 24 mm high (1.35 x 1.38 x 0.94 in. high)

Crystal exchange	Front loading, self-contained package for ease of exchange. Cam-type locking handle allows
easy removal and good thermal contact.
Mounting

Four #4-40 tapped holes on the back of the body

FeedthroughCF40 (2¾ in. ConFlat), integral with sensor head	Water and coax tubes are semi-rigid, but easily formed.
(50.8 mm [2.0 in.] minimum bend radius)
Utilities	Minimum water flow 150–200 cm³/min., 30°C max. (Do not allow to freeze.)(Customer should provide means of easily disconnecting the 6.4 mm (0.25 in.)water tubes during bakeout.)
Materials
Body and holder

304 type stainless steel

Springs

Molybdenum and Inconel X-750

Water and coax lines	3 mm (0.125 in.) O.D. water x 0.4 mm (0.015 in.) wall thickness seamless 304 stainless steel;
5 mm (0.188 in.) O.D. coax
Other mechanical parts

18-8 or 304 stainless

Insulators>99% Al2O3 in vacuum; other high density ceramics used elsewhereWire

1) Ni (in vacuum)2) Ni plated Cu (elsewhere)

BrazeVacuum process high temperature Ni-Cr alloy

Crystal13.97 mm (0.550 in.) diameter

S P E C I F I C AT ION S
BK-A1F series UHV Bakeable Sensor with shutter
Maximum temperature

400°C continuous (for bake only; water flow recommended for actual deposition monitoring)Sensor head size (maximum envelope)

34 x 35 x 31 mm high (1.35 x 1.38 x 1.21 in. high)

Crystal exchange	Front loading, self-contained package for ease of exchange.
Cam-type locking handle allows easy removal and good thermal contact.
Pneumatically operated shutter flips up for easy crystal exchange.
Mounting

Four #4-40 tapped holes on the back of the body

FeedthroughCF40 (2¾ in. ConFlat®), integral with sensor head	Water, air and coax tubes are semi-rigid, but easily formed(50.8 mm [2.0 in.] minimum bend radius)
Utilities1) M inimum water flow 150–200 cm³/min, 30° C max. (Do not allow to freeze.)(Customer should provide means of easily disconnecting the 6.4 mm [0.25 in.]water tubes during bakeout.)2) F iltered, oil-free air, regulated at 80 psi (gauge) {95 psi (absolute)} 6.5 bar (absolute)[653 kPa (absolute)] (maximum)
3) Solenoid valve, PN 750-420-G1, 24 V (ac) or V (dc), or equivalent valve required3

Front Load Bakeable Sensor

S P E C I F I C AT ION S
BK-A1F series UHV Bakeable Sensor with shutter (continued)
Materials
Body and holder

304 type stainless steel

Springs

Molybdenum and Inconel X-750

Water, air and coax lines	3 mm (0.125 in.) O.D. water and air x 0.4 mm (0.015 in.) wall thickness seamless 304
stainless steel; 5 mm (0.188 in.) O.D. coax
Other mechanical parts

18-8 or 304 stainless

Insulators>99% Al2O3 in vacuum; other high density ceramics used elsewhereWire

1) Ni (in vacuum)2) Ni plated Cu (elsewhere)

Braze

Vacuum process high temperature Ni-Cr alloy

Crystal13.97 mm (0.550 in.) diameter

S PA R E PA RT S LISTPN

Description

PN

Description

007-064

Ceramic retainer

007-267-P2

Spreader bar

007-094

Clamping spring

007-268-P1

Shoulder washer

007-095

Handle007-269-P1

Shoulder washer

007-098

Female connector (includes ferrules and nut)

084-069-P1#4-40 x 3/16 screw

007-099

Bakeable head contact

750-018-P3

Split clamp

007-100

Insulator for BNC

750-018-P5

Split clamp

007-103

Insulator for bakeable head contact

750-022-G7

Bellows assembly – 76.2 cm (30 in.)007-104

BNC body

750-028-G7

Braze assembly with air line – 76.2 cm (30 in.)007-157

Braze assembly – 76.2 cm (30 in.)

750-115-P4

Coupling

007-147#4-40 x 3/8 screw

750-118-P4

Actuator support

007-007

Retainer spring (part of crystal holder)

750-120-G3

Shaft assembly

007-228#4-40 x 5/8 screw

750-216-G1

Shutter assembly

059-0084

VCR gasket

750-218-G1

Crystal holder

070-0201#4 split lockwasher

4Front Load Bakeable Sensor

D I M E N S I ON S
BK-A0F sensor / feedthrough combination
265.2–1179.2 mm (10.43–46.43 in.)23.5 mm (0.93 in.)

10–990 mm (4–39 in.)22.8 mm (0.90 in.)

WATER
70 mm (2.75 in.)25.4 mm (1.0 in.)

WATER

33.6 mm (1.32 in.)

11 mm (0.45 in.)38.1 mm (1.50 in.)
#4–40 SCREWS ON CLAMPSMAY BE USED FOR MOUNTING

6.4 mm (0.25 in.)
24 mm (0.95 in.)

VIEW – X
87 mm (3.40 in.)

MINIMUM DIAMETERREQUIRED FOR PASSAGE

Ø35 mm (1.375 in.)45˚
53 mm (2.10 in.)

24 mm (0.95 in.)

BNC
VIEW AT X

D I M E N S I ON S
BK-A1F sensor / feedthrough combination

17–990 mm(6.7–39 in.)

5.50
REF

23.5 mm (0.93 in.)

22 mm (0.9 in.)56.26 mm (2.22 in.)
SHUTTER OPEN

WATER
AIRWATER
11 mm (0.45 in.)38.1 mm (1.5 in.)

VCR COUPLING
34 mm (ø1.34 in.)
6.4 mm (0.25 in.)30.7 mm

VIEW-X
87 mm (3.4 in.)45˚
53 mm (2.1 in.)

70 mm (ø2.75 in.)

BNC
11 mm (0.45 in.)

VIEW-X

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Due to our continuing program of product improvements, specifications are subject to change without notice.
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cibf232a1-a©2017 INFICONMINIMUM DIAMETERREQUIRED FOR PASSAGE