ALKALI ION GUN / POWER SUPPLYELECTRON GUNS

ILG-6 / IGPS-1016

10 eV to 1000 eVCs, Li, Na, K, Rb Alkali Metal Ion Beams
FOR USE IN:

ION GUNSSURFACE PHYSICSION SCATTERING STUDIESVACUUM PHYSICSFEATURES / OPTIONS:

Ion beam energy, beam current and spot size are independently
adjustable over wide ranges. The ion energy is variable from 10 eV to1000 eV. By use of multistaging and a computer-designed electron
zoom lens, a constant beam current is maintained over a twoorder-of-magnitude change in energy, with a spot size also roughly
constant. With a cesium or lithium ion source, the ion beam current isvariable from 1 nA to 100 nA. Spot sizes range from less than 1 mm to5 mm.
UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr up to 10-5 torr and is bakable to 350°C with cables
removed. The ion source units are not damaged by repeated exposure
to atmospheric gases or water vapor when cold.
Ion source firing units are user-replaceable; spare firing units can bepurchased new, and used firing units may be returned to the factory forrebuild. Alternatively, the entire ion gun can be sent back to the factoryfor complete cleaning, rebuild, ion source replacement, and optional
in-vacuum testing.

The control grid allows pulsing options: either fast capacitive beam
pulsing or dual grid pulsing. Capacitive beam pulsing, using a Pulse
Junction Box, permits fast beam pulsing down to 20 ns with 20%
maximum duty cycle. Capacitive pulsing requires an external, variablevoltage pulse generator (not included). Pulsing of the electron beam
can also be accomplished with dual grid supplies, requiring only a TTL
pulse input.
The IGPS-1016 Power Supply features a modular design withminiaturized power supply clusters, optically isolated signals, and thenew FlexPanel digital interface controller. The included power supplies
are Ion Beam Energy and X,Y Deflection, as well as the floating
Source/ECC, Grid, Extract, and Focus supplies. A rastering option canbe provided by an additional separate power supply unit, the Raster
Generator Deflection Unit.
The new FlexPanel provides a digital display screen and an encoderwheel for programming control on the front panel. Rear panel
connectors allow remote /computer control and metering of all gun
power supplies. An RS-232 serial port and an analog input/output
connector are included on standard power supply units. All common
computer interface bus types can be accommodated, by use of
appropriate digital to analog converters. RS-422/485 conversion ispossible.
An optional LabVIEWTM computer program designed for the ILG-6 isavailable for remote computer control and metering using National
Instrument DAQ boards and SCSI connectors on the IGPS-1016. The
program provides a virtual panel of controls and meters on the user’s
computer screen.

Demontable ILG-6 Ion Gun, unmounted, separated fromthe 2¾ inch CF Flange Multiplexer
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

IGPS-1016 Ion Gun Power Supply
2 - 13DETECTORS

By use of different source firing units, the alkali ion beams of Cs, Li, Na,K, and Rb can be generated. The alkali metal is generated as neededby a solid-solid chemical reaction, and is then surface ionized andevaporated with low energy spread. The resulting ion beams can begenerated down to low energies, and very low currents.

The ILG-6 Ion Gun is available in two different mounting configurations:as a standard mounted gun with a 2¾ CF Flange Multiplexer, or as ademountable gun. The Demountable ILG-6 can be used as mounted
gun, or it can be removed by the user from its mounting and used as
an unmounted gun with the Flange Multiplexer as a separate vacuum
feedthrough.

COMPONENTS

The Kimball Physics ILG-6 Alkali Metal Ion Gun, with its matching
IGPS-1016 Power Supply is intended for use in a variety of surface
physics applications and represents a significant advance inalkali-metal surface-ionization ion-source technology. It is a complete
subsystem ready to attach and turn on.

EMITTERS

Standard ILG-6 Ion Gun Mounted on a 2¾ inch CF Flange Multiplexer

INDEX / INFORMATIONVERY LOW ENERGIESWIDE ENERGY RANGECONSTANT BEAM CURRENTCONSTANT SPOT SIZEZOOM LENS FOCUSINGDEMOUNTABLE GUNHIGH SPEED PULSING
DEFLECTION, RASTERINGCOMPUTER / REMOTE CONTROLILG-6 ION GUN SPECIFICATIONSIGPS-1016 ION GUN POWER SUPPLY SPECIFICATIONSION BEAM ENERGYOUTPUTSENERGY STABILITY

10 eV to 1000 eV (Independently adjustable)
1 nA to 100 nA (Independently adjustable)
BEAM CURRENT
Ion species dependent
ENERGY SPREAD
Approx 0.4 eV thermal spread, calculated
ION SPECIES
Cs+, Li+, Na+, K+, or Rb+
ION GENERATION
Surface-ionization Alkali Alumino Silicate Plug.
METHODIon source cartridge directly heated
SPOT SIZE
Less than 1 mm to 5 mm (Independently adjustable)
WORKING DISTANCE Typical: 20 mm. Range: 10 mm to 200 mm
BEAM DEFLECTION 4 Pole Electrostatic: ± 5° at 1000 eV
PULSE CAPABILITY
Optional Capacitive Pulse Junction Box: pulse width(using appropriate
20 ns to 100 µs , rise/ fall 10 ns, 50 Ω impedance, 1 W
standard (higher power available)
pulse generator,
Optional Dual Grid Power Supply: pulse width 2 µs tonot included)DC, rise/ fall 500 ns, rep rates to 5kHz (TTL input)
BEAM UNIFORMITY
Gaussian
Customer-replaceable ion source firing unit includes ion
source cartridge, grid and extract, with insulators andconnectors. Ion source cartridges not harmed byION SOURCE UNIT
atmospheric gases while cold
Flange Multiplexer with a 2¾ inch rotatable CF,including both tapped and clear mounting holes
MOUNTING
Optional: Demountable (Unmounted / Mounted) witha Flange Multiplexer with a 2¾ inch rotatable CF
FARADAY CUP
Optional: Mounted on gun, manual or pneumatic control
BEAM ALIGNMENT
Optional: Mechanical alignment with ± 2° Port Aligner
Standard: 150 mm. Range: 110 mm to 170 mm.
INSERTION LENGTH Custom lengths available. Gun manufactured at standard
length unless otherwise specified at time of order.
GUN DIAMETER
25.4 mm at gun flange. Necks up to 19.1 mm at 100 mm
from flange
FEEDTHROUGHS
Multipin brazed ceramic, threaded stainless steel shell
Multiconductor high voltage fully ground-shielded cable,
CABLES /coaxial extract cable, low voltage deflection cable, withCONNECTORS
mating aluminum shell connectors, to connect gun andpower supply.
Standard lengths: 3 m Optional: 5 m
350°C with cables removed
MAXIMUM BAKEOUT(Faraday cup: removable pneumatic actuator 65°C max)

All necessary voltages to drive the ILG-6 Ion Gun±0.01% per hour; ±0.02% per 8 hours at full output±1.0% per hour with Electron Current Control or
BEAM STABILITY±10% per hour after warm up without ECC,
depends on input gas presssure stability
CONTROLS
FlexPanel controls: Ion Energy, Source, Grid, Extract,Focus, X and Y Deflection, Emission Current Control
METERING
FlexPanel digital meters: Ion Energy, Source Voltage,
Source Current, Emission Current, Grid, Extract, Focus,
X and Y Deflection
Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
COMPUTER/REMOTE Metering: 0 to +2 V ( -2 V to +2 V, deflection)
CONTROL & METER On/off switches: 0 or +5 V
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-422 or RS-485 available, if
specified at time of order)
Optional: SCSI metering and programming connectors
SOFTWARE
Optional: National Instruments LabVIEWTM file, designed
to run with computer DAQ boards NI 6034E and NI 6703
INPUT
115 VAC switchable to 230 VAC, 50 to 60 Hz single
phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing,Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
DIMENSIONS
17 in. x 3.5 in. x 22 in. excluding handles(width x height x depth) (425 mm x 90 mm x 560 mm); 19 in. rack mountable

OPTIONAL RGDU-4A RASTER GENERATOR SPECIFICATIONS
10 separate frequency selections for both X and Y
RASTER GENERATOR (X up to 1000 Hz, Y up to 50 Hz) Variable position
offset (centering). Variable window size. All controllable
remotely via RS-232, RS-422, RS-485, or analog input.
DIMENSIONS
17 in. x 3.5 in. x 22 in.excluding handles(width x height x depth) (425 mm x 90 mm x 560 mm); 19 in. rack mountable

DEMOUNTABLE ILG-6 ION GUN
Shown Mounted and Unmounted(Dimensions in mm)

Typical performance;data for guidance only.
Copyright © 2006 by Kimball Physics, Inc. 3/7/06

It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.