Separate TypeLinear Scale
ST36

User's Manual- Instructions for use Read this document thoroughly before operating
the product. After reading, retain it close at hand for
future reference.

No. 99MBE048B3
Date of publication: March 1, 2019 (1)*99MBE048B3*

Correspondence of product names and model numbers
Product name
Separate Type Linear Scale

Model number
ST36

Notice regarding this document
yy Mitutoyo Corporation assumes no responsibilities for any damage to the product, caused by its use
not conforming to the procedure described in this document.
yy Upon loan or transfer of this product, be sure to attach this document to the product.
yy In the event of loss or damage to this document, immediately contact a Mitutoyo sales office or
your dealer.
yy Before operation of the product, thoroughly read this document to comprehend its contents.
yy Particularly, for full understanding of information, carefully read "Safety Precautions" and "Precautions for Use" at the outset of this document before using the product.
yy The contents in this document are based on the information current as of March 2019.
yy No part or whole of this document may be transmitted or reproduced by any means without priorwritten permission of Mitutoyo Corporation.
yy The corporation, organization and product names that appear in this document are their trademarks or registered trademarks.
©2019 Mitutoyo Corporation. All rights reserved.

No. 99MBE048B

CONVENTIONS USED IN MANUALSConventions used in Mitutoyo’s User’s Manual are roughly divided into three types (safety reminders,prohibited and mandatory actions, and referential information and locations). Moreover, these conventions include general warnings and specific warnings. Specific warning symbols are provided with concrete pictograms inside of them.

Safety reminder conventions and wording warning against potential hazards

DANGER

Indicates an immediately hazardous situation which, if not avoided, will result
in serious injury or death.

WARNING

Indicates a potentially hazardous situation which, if not avoided, could result
in serious injury or death.

CAUTION

Indicates a potentially hazardous situation which, if not avoided, may result inminor injury.

NOTICE

Indicates a potentially hazardous situation which, if not avoided, may result inproperty damage.
Alerts the user to a specific hazardous situation that means "Caution, risk ofelectric shock".

Conventions and wording indicating prohibited and mandatory actions
Indicates concrete information about prohibited actions.

Indicates concrete information about mandatory actions.

Indicates that grounding needs to be implemented.

Conventions and wording indicating referential information or referential
locations
Tips

Indicates referential information such as that for when the operating methods and procedures which
are printed in these sentences are to be applied to specific conditions.
Indicates referential locations if there is information that should be referred to in this document or an
extraneous User's Manual.
E.g.: For further details on xxx, refer to"1.2 System Configuration and Name of Each Part" (page 1)

i

No. 99MBE048B

Safety Precautions
Observe the following descriptions to make full use of the performance of this product:

NOTICE• Read this document thoroughly before operating the system to use it properly.
• Before connecting this product to the machine main unit, make sure that the power for the control unit isturned off.
• To maintain the shielding effect, firmly tighten the screws on the connectors of each connecting cable.
• To prevent defective contacts, do not touch the connecting terminals of the connectors with bare hands.

Precautions for UseGeneral safety precautions
yy This product is a measuring instrument.
Do not use this product for any other purpose than measuring.
yy This is an industrial product.
Do not use this product for any other purpose than industrial use.
yy This product is a precision instrument.
Handle this product with extra care. Do not apply any strong impact or excessive force to the parts
during use.

Required environment for installation
zzVibration
To install this product onto the machine main unit, select a location where there is as little vibration as
possible.
If the scale unit is used for an extended period of time on a machine where there is a substantial amountof vibration, the built-in precision parts may be damaged, thereby adversely influencing the performanceof the unit.

zzShock, dust, water protection
To protect the scale main unit from being directly exposed to machining oil and chips, or from being
bumped by a workpiece, etc., prepare a cover that protects the entire scale main unit.

zzAmbient temperature and humidity
This product should be operated in an environment where the temperature is 0 °C–40 °C and where
the relative humidity is 20 %RH–80 %RH. Do not use this product in a place where sudden changes intemperature or humidity are observed.

ii

No. 99MBE048B

Electromagnetic Compatibility (EMC)
This product complies with the EMC Directive. Note that in environments where electromagnetic interference exceeds EMC requirements defined in this directive, appropriate countermeasures are required
to ensure product performance.
EMC Directive EN61326-1
		Immunity test requirement: Clause6.2 Table 2

		Emission limit: Class B
For the EU Directive
Authorized representative and importer in the EU:
Mitutoyo Europe GmbH
Borsigstrasse 8-10,41469 Neuss,Germany

Export Control ComplianceThis product falls into the Catch-All-Controlled Goods and/or Catch-All-Controlled Technologies (including Programs) under Category 16 of Appended Table 1 of Export Trade Control Order or under Category 16 of Appended Table of Foreign Exchange Control Order, based on Foreign Exchange and Foreign
Trade Act of Japan.
If you intend re-export of the product from a country other than Japan, re-sale of the product in a country other than Japan, or re-providing of the technology (including Programs), you shall observe theregulations of your country.
Also, if an option is added or modified to add a function to this product, this product may fall under the
category of List-Control Goods, List-Control Technology (including Programs) under Category 1 - 15
of Appended Table 1 of Export Trade Control Order or under Category 1 - 15 of Appended Table ofForeign Exchange Control Order, based on Foreign Exchange and Foreign Trade Act of Japan. In thatcase, if you intend re-export of the product from a country other than Japan, re-sale of the product in acountry other than Japan, or re-providing of the technology (including Programs), you shall observe theregulations of your country. Please contact Mitutoyo in advance.

Notes on Export to EU Member Countries
When you intend exporting of this product to any of the EU member countries, it may be required toprovide User's Manual(s) in English and EU Declaration of Conformity in English (under certain circumstances, User's Manual(s) in the destination country's official language and EU Declaration of Conformity in the destination country's official language). For detailed information, please contact Mitutoyo in
advance.

Disposal of Products outside the European Union andOther European Countries
Please follow the official instruction in each community and country.

iii

No. 99MBE048B

Disposal of Old Electrical & Electronic Equipment (Applicable in the European Union and Other European Countries with Separate Collection Systems)
This symbol on the product or on its packaging is based on WEEE Directive (Directive on
Waste Electrical and Electronic Equipment), which is a regulation in EU member countries, andthis symbol indicates that this product shall not be treated as household waste.
To reduce the environmental impact and minimize the volume of landfills, please cooperate inreuse and recycle.
For how to dispose of the product, please contact your dealer or the nearest Mitutoyo sales
office.

Warranty
In the event that this product should prove defective in workmanship or material, within one year fromthe date of original purchase for use, it will be repaired or replaced, at Mitutoyo's option, free of charge
upon its prepaid return to Mitutoyo, without prejudice to the provisions of the Mitutoyo Software End
User License Agreement.
If this product fails or is damaged for any of the following reasons, it will be subject to a repair charge,
even if it is still under warranty.
yy Failure or damage owing to fair wear and tearyy Failure or damage owing to inappropriate handling, maintenance or repair, or to unauthorized modification
yy Failure or damage owing to transport, dropping, or relocation of the product after purchaseyy Failure or damage owing to fire, salt, gas, abnormal voltage, lightning surge, or natural disasteryy Failure or damage owing to use in combination with hardware or software other than those designated or permitted by Mitutoyo
yy Failure or damage owing to use in ultra-hazardous activities
This warranty is effective only where the product is properly installed and operated in conformance with
the instructions in this document within the original country of the installation.
EXCEPT AS SPECIFIED IN THIS WARRANTY, ALL EXPRESS OR IMPLIED CONDITIONS, REPRESENTATIONS, AND WARRANTIES OF ANY NATURE WHATSOEVER INCLUDING, WITHOUT
LIMITATION, ANY IMPLIED WARRANTY OF MERCHANTABILITY, FITNESS FOR A PARTICULARPURPOSE, NONINFRINGEMENT OR WARRANTY ARISING FROM A COURSE OF DEALING, USAGE, OR TRADE PRACTICE, ARE HEREBY EXCLUDED TO THE MAXIMUM EXTENT ALLOWED BYAPPLICABLE LAW.
You assume all responsibility for all results arising out of its selection of this product to achieve its intended results.

iv

No. 99MBE048B

Disclaimer
IN NO EVENT WILL MITUTOYO, ITS AFFILIATED AND RELATED COMPANIES AND SUPPLIERSBE LIABLE FOR ANY LOST REVENUE, PROFIT, OR DATA, OR FOR SPECIAL, DIRECT, INDIRECT,CONSEQUENTIAL, INCIDENTAL, OR PUNITIVE DAMAGES HOWEVER CAUSED AND REGARDLESS OF THE THEORY OF LIABILITY ARISING OUT OF THE USE OF OR INABILITY TO USE THISPRODUCT EVEN IF MITUTOYO OR ITS AFFILIATED AND RELATED COMPANIES AND/OR SUPPLIERS HAVE BEEN ADVISED OF THE POSSIBILITY OF SUCH DAMAGES.
If, notwithstanding the foregoing, Mitutoyo is found to be liable to you for any damage or loss whicharises out of or is in any way connected with use of this product by you, in no event shall Mitutoyo's and/or its affiliated and related companies' and suppliers' liability to you, whether in contract, tort (including
negligence), or otherwise, exceed the price paid by you for the product only.
The foregoing limitations shall apply even if the above-stated warranty fails of its essential purpose.
BECAUSE SOME COUNTRIES, STATES OR JURISDICTIONS DO NOT ALLOW THE EXCLUSION
OR THE LIMITATION OF LIABILITY FOR CONSEQUENTIAL OR INCIDENTAL DAMAGES, IN SUCH
COUNTRIES, STATES OR JURISDICTIONS, MITUTOYO'S LIABILITY SHALL BE LIMITED TO THE
EXTENT PERMITTED BY LAW.

v

No. 99MBE048B

About This Document

Positioning of this document in document map
zzFor linear scale
ST36
Separate Type Linear Scale
User's Manual (This Document)

Intended readers and purpose of this documentzzIntended readersThis document is intended for first-time users of ST36 Separate Type Linear Scale.
Readers are assumed to be able to understand instructions by reading technical drawings.

zzPurpose
The purpose of this document is to help you understand the ST36 Separate Type Linear Scale.

vi

No. 99MBE048B

Contents
CONVENTIONS USED IN MANUALS………………………………………………………… i
Safety Precautions……………………………………………………………………………… ii
Precautions for Use……………………………………………………………………………… ii
Electromagnetic Compatibility (EMC)……………………………………………………… iii
Export Control Compliance…………………………………………………………………… iii
Notes on Export to EU Member Countries………………………………………………… iii
Disposal of Products outside the European Union and Other European Countries……………………………………………………………………………………………………… iii
Disposal of Old Electrical & Electronic Equipment (Applicable in the European
Union and Other European Countries with Separate Collection Systems)…………… iv
Warranty…………………………………………………………………………………………… iv
Disclaimer………………………………………………………………………………………… v
About This Document…………………………………………………………………………… vi
Contents……………………………………………………………………………………………vii
1

2

Overview……………………………………………………………………………………… 1
1.1

Features………………………………………………………………………………… 1

1.2

System Configuration and Name of Each Part…………………………………… 1

1.3

The Flow of Main Tasks……………………………………………………………… 3

Setup for Installation……………………………………………………………………… 5
2.1

Checking the Equipment Model……………………………………………………… 5

2.2

Designing the Scale Mounting Surface……………………………………………… 8

2.3
3

2.2.1

Mounting the Scale with the Effective Length of 10 mm–80 mm(Adhesive Fixing Type)………………………………………………………………………… 8

2.2.2

Mounting the Scale with the Effective Length of 100 mm–3000 mm…………………… 9

Designing the Detector Bracket………………………………………………………10

Installation onto the Machine Main Unit………………………………………………… 11
3.1

Checking the Package Contents…………………………………………………… 11

3.2

Mounting the Scale…………………………………………………………………… 12

3.3

Mounting the Detector Bracket and Detector………………………………………15

3.4

Connecting the Feedback Cable……………………………………………………16vii

No. 99MBE048B

3.5

3.6

4

Adjusting the Detector Signals……………………………………………………… 17
3.5.1

Adjusting the Detector Mounting Position…………………………………………………… 17

3.5.2

Adjusting the Signals…………………………………………………………………………20

Handling the Cables and Checking the Mounting State……………………………23
3.6.1

Handling the Cables……………………………………………………………………………23

3.6.2

Checking the Mounting and Adjustment States……………………………………………24

3.6.3

Putting the Protection Cover…………………………………………………………………25

Specifications………………………………………………………………………………27
4.1

Specifications…………………………………………………………………………27

4.2

Output Circuits and Signal Waveforms………………………………………………28

4.3

4.2.1

Main Signal Type: Type A, Type C……………………………………………………………28

4.2.2

Main Signal Type: Type B, Type C……………………………………………………………29

4.2.3

Main Signal Type: Type D……………………………………………………………………30

Pin Assignment…………………………………………………………………………32
4.3.1

Main Signal Type: Type A……………………………………………………………………32

4.3.2

Main Signal Type: Type B……………………………………………………………………32

4.3.3

Main Signal Type: Type C……………………………………………………………………33

4.3.4

Main Signal Type: Type D……………………………………………………………………33

4.4

Production of Feedback Cable………………………………………………………34

4.5

Alarm Function…………………………………………………………………………35
4.5.1

Main Signal Type: Type A……………………………………………………………………35

4.5.2

Main Signal Type: Type B, Type C……………………………………………………………36

4.6

Adjusting the Signals Using the Check Adapter (Option)…………………………38

4.7

Removing the Detector Cable…………………………………………………………40

4.8

Changing the Output Settings………………………………………………………… 41

4.9

Maximum Response Speed…………………………………………………………43

4.10 External View and Dimensional Drawings…………………………………………44

5

4.10.1

Dimensional Drawings…………………………………………………………………………44

4.10.2Dimensional Drawings Table…………………………………………………………………45

Troubleshooting……………………………………………………………………………47

SERVICE NETWORK……………………………………………………………………… App-1

viii

No. 99MBE048B

1 Overview

1

Overview

1.1

FeaturesThis chapter describes the features of this product, the names and functions of the parts, and the flowof the main tasks to use this product.

The optical separate type linear scale detects changes in the amount of light using light emitting elements and light receiving elements based on the glass scale grids and outputs the amount of changes.
This can precisely measure moving amounts of various instruments including an aligner, wire bonding,and stage for semiconductor manufacturing.
This product is a high-precision separate type linear scale with indication accuracy ±0.5 μm (effective
length of up to 300 mm). With successful reduction in Detector thickness to 11.5 mm and support forthe maximum effective length of 3000 mm, it can be used even for large machines. It is also equippedwith the LED Display function for signal errors.
The following four output signal types are available in this product:yy Two-phase sine wave
yy Two-phase square wave
yy Two-phase square wave/two-phase sine wave
yy Differential 1 Vpp sine wave

1.2

System Configuration and Name of Each Part

The system configuration and the name of each part are shown below.

Output connector (accessory)

Control unit

ST36 (main scale, Detector, I/F Box)

Feedback cable and control unit
(prepared by user)

1

No. 99MBE048B

1 Overview

①

②

④
⑤
③

⑦
⑥

⑨

⑩

⑧
No.

①
②
③
④
⑤
⑥
⑦
⑧
⑨
⑩

Name
Main scale (effective length: 10 mm–80 mm)
Main scale (effective length: 100 mm–3000 mm)
Scale retaining spring
Detector
Detector cable
I/F BoxOutput connector
Gap spacer
S.UP light
POWER light2

No. 99MBE048B

1 Overview

1.3

The Flow of Main Tasks

The following chart shows the flow of preliminary preparation and installation onto the machine main
unit as tasks to use this product.

Preliminary preparation
Checking the Equipment Model"2.1 Checking the Equipment Model" (page 5)

Designing the Scale Mounting
Surface"2.2 Designing the Scale Mounting Surface"(page 8)Designing the Detector Bracket"2.3 Designing the Detector Bracket" (page 10)

Installation onto the machine main unit
Checking the Package Contents

Mounting the Scale"3.1 Checking the Package Contents" (page 11)"3.2 Mounting the Scale" (page 12)

Mounting the Detector Bracket
and Detector"3.3 Mounting the Detector Bracket and Detector"(page 15)

Connecting the Feedback Cable"3.4 Connecting the Feedback Cable" (page 16)

Adjusting the Detector Signals"3.5 Adjusting the Detector Signals" (page 17)

Handling the Cables andChecking the Mounting State"3.6 Handling the Cables and Checking the Mounting
State" (page 23)3

No. 99MBE048B

1 Overview

MEMO

4

No. 99MBE048B

2 Setup for Installation2

Setup for Installation

2.1

Checking the Equipment Model

This chapter describes the preliminary preparation for installing this product onto the machine mainunit.

The ST36 model number is determined based on the main signal output type, effective length, scaleorigin, resolution/minimum edge-to-edge interval/response speed, direction, alarm output type, Detector cable length, and special code.
Make sure that your scale unit model satisfies desired specifications.

ST36□-□□□□□-□□□-□-□
Main signal output typeSpecial code

Effective length

Detector cable length

Scale origin

Alarm output type

Resolution/
Minimum edge-toedge interval/
Response speed

Direction

Main signal output type
SymbolA
B
C
D

OutputTwo-phase sine wave
Two-phase square wave + external reset input
Two-phase square wave + two-phase sine wave
Differential 1 Vpp sine wave

Effective length
Symbol
0010
0025
0050
0075
0080
0100
0150
0200
0250
0300
0350

Effective length (mm)
10
25
50
75
80
100
150
200
250
300
350

Symbol
0400
0500
0600
0700
0800
0900
1000
1100
1200
1300
1400

5

Effective length (mm)
400
500
600
700
800
900
1000
1100
1200
1300
1400
No. 99MBE048B

2 Setup for Installation
Symbol
1500
1600
1700
1800
2000
2200

Effective length (mm)
1500
1600
1700
1800
2000
2200

SymbolEffective length (mm)
2400
2500
2600
2800
3000

2400
2500
2600
2800
3000

Scale origin
SymbolEffective length of 10 mm–80 mm
Center point
Special point specification

SymbolEffective length of 100 mm–3000 mm
50-mm pitch
Center point
Special point specification

B
Z

A
B
Z

Tips
• For the effective length of 10 mm–80 mm, the default scale origin is B (center point).
• For the effective length of 100 mm–3000 mm, the default scale origin is A (50-mm pitch).

Resolution/minimum edge-to-edge interval/response speed
Minimum edge-to-edge
interval (ns)Resolution (μm)
0.01
0.02
0.05
0.1
−

125

250

500

1000

A: 72
B: 36
C: 18
D: 9
E: 144
F: 72
G: 36
H: 18
J: 360
K: 180
L: 90
M: 45
N: 720
P: 360
Q: 180
R: 90
Z: When the main signal output type is A (two-phase sine wave) or D (differential 1 Vpp sine wave), the maximum response speed is 1200 mm/s
at sine wave decreasing of -3 dB.

Tips• The number each for symbols A–R represents the maximum response speed (mm/s).
• The minimum edge-to-edge interval varies within the range between 0% and -10 % depending on the operating condition.

6

No. 99MBE048B

2 Setup for Installation

Direction
Symbol1
2
Z

Description
Forward: PA phase advance
Reverse: PB phase advance
When the main signal output type is A (twophase sine wave) or D (differential 1 Vpp sinewave), the direction is not set.

Alarm output type
SymbolS
H
Z

Description
Alarm signal
High impedance
When the main signal output type is A (twophase sine wave) or D (differential 1 Vpp sinewave), the alarm output type is not set.

Detector cable length
SymbolLength1 m (high flexibility specification)
0.5 m (high flexibility specification)
Special length specification (maximum: 2.5 m)

SymbolDescription
Standard selection specification
Special specification

A
B
Z

Special code
None
Z

7

No. 99MBE048B

2 Setup for Installation

2.2

Designing the Scale Mounting Surface
If ambient light enters the main scale from the back side, it causes a malfunction. Design the main
scale mounting area to prevent ambient light as shown in the figure below.
Ambient light

Main scale
Detector

2.2.1

Mounting the Scale with the Effective Length of 10 mm–
80 mm (Adhesive Fixing Type)

Mount the main scale with the effective length of 10 mm–80 mm (adhesive fixing type) by fixing withadhesives.
Design the main scale mounting area as shown in the figure below according tosional Drawings" (page 44).
Scale mounting
reference surface"4.10.1 Dimen-

Adhesive application
area

Main scale
G machine guide8

No. 99MBE048B

2 Setup for Installation

Tips
If you may need to mount the main scale with the effective length of 10 mm–80 mm (adhesive fixing type) again
for maintenance, attach the main scale to the scale bracket shown in the figure below and fix it with bolts.

2.2.2

Mounting the Scale with the Effective Length of 100 mm–
3000 mmMount the main scale with the effective length of 100 mm–3000 mm by fixing with scale retaining
springs.
Secure working space for tightening the scale retaining spring A and scale retaining spring B according to"4.10.1 Dimensional Drawings" (page 44).

Scale retaining spring B

Scale retaining spring B

Scale retaining spring A9

No. 99MBE048B

2 Setup for Installation

2.3

Designing the Detector Bracket• Design the Detector bracket according to the figure below. Its shape must allow adjustment of the
Detector position (moire/gap). It is recommended that the Detector fixing screw holes should belong holes to make it easier to adjust the Detector position.
M3 (bolt length = bracket thickness t + 4 mm)

5o

rm

ore

32

1(
r ef
e
va r e n c
lue
e
)

3.4

ce
en
fe r
(re e)ulvat (6 or more)Pa

Gap direction

ral

le li

sm

of
the
D e sc alete c
to r m o u
mon
un t ingtin
g s sur fac
ur f
ac e ag
e
ain

st t

he

Moire
direction

32

t (6

or

mo

re)

5 or more

3.4 (reference
value)

1 (reference
value)
M3 (bolt length = bracket thickness t + 4 mm)• Design it so that the parallelism of the Detector mounting surface against the scale mounting surface is within 0.03 mm.

10

No. 99MBE048B

3 Installation onto the Machine Main Unit

3

Installation onto the Machine
Main Unit

This chapter describes the procedures, methods, and precautions required when mounting this product onto the machine main unit.

3.1

Checking the Package Contents

Before installation, make sure that the product package contains the following items.
If your scale does not satisfy the specified specifications or you have any questions or concerns about
the product, please contact your dealer or the nearest Mitutoyo sales office/service center.
Name
Main scale
Detector + I/F Box
Scale retaining spring1
1

Quantity

Output connector
Gap spacer
Serial number sticker

1
1
1

User's Manual
Inspection certificate
Warranty card

1
1
1

Note
Check the effective length.
This accessory comes with the scale with theeffective length of 100 mm or more. For details
on the quantity, refer to"4.10.2 Dimensional
Drawings Table" (page 45).

This accessory comes with the scale with theeffective length of 10 mm–80 mm.
This document• To mount the Detector, prepare the following parts.
Part name
Hex socket head cap screw (M3 x (bracket
2
thickness + 4 mm) or less)Quantity• To mount the scale with the effective length of 100 mm–3000 mm, prepare the following parts.
Part name
Hex socket head cap screw (M4 x bottom
hole size or less)
Plain washer (nominal diameter 4)
Spring washer (nominal diameter 4)

11

Quantity
Number of scale retaining springs x 2
Number of scale retaining springs x 2
Number of scale retaining springs x 2

No. 99MBE048B

3 Installation onto the Machine Main Unit

3.2

Mounting the Scale

NOTICEThe main scale is made of glass. Be very careful that the scale is not damaged or scratched.

• If dirt and dust are attached to the main scale, it causes a malfunction or deteriorates the accuracy.
Wipe off the dirt and dust with a soft cloth soaked in alcohol or cleaning paper. Similarly, clean thescale mounting surface of the machine unit thoroughly with alcohol.
• Use elastic adhesives to attach the main scale with the effective length of 10 mm–80 mm (adhesive fixing type). Shin-Etsu Silicones' KE441T is recommended.

Tips• Conduct temperature leveling thoroughly for both the main scale and mounting parts before fixing them. The
accuracy of this product is guaranteed at 20 °C. The recommended temperature leveling is about 8 hours or
longer at 20 °C for both the main scale and parts for mounting the scale. Perform installation after temperature leveling.
• If the temperature environment is insufficient, including temperature leveling, the predetermined indication
accuracy may not be achieved.

1 Make sure that the scale mounting surface is prepared as shown below using a lever-type dial indicatoror electric micrometer.
• Check the parallelism of the main scale mounting surface against the axis of motion of the machine unit.
• If the parallelism is insufficient, adjust the machine unit again.

G represents a
machine guide12

No. 99MBE048B

3 Installation onto the Machine Main Unit

2 Peel the scale protection tape.
Main scale

Peel the scale protection tape.

3 Mount the main scale.
• Mount the main scale so that the Detector is placed on the grid surface (surface where rainbow
colors appear when light is applied diagonally).
• For a scale with the Mitutoyo logo attached, the correct mounting direction is where the logo canbe appropriately viewed from the Detector side.

Main scale

Direction where the Mitutoyo logo can be seen
Detector• Put the serial number sticker near the location where the scale is mounted on the machine for themain scale with the effective length of 10 mm–80 mm (adhesive fixing type).

13

No. 99MBE048B

3 Installation onto the Machine Main Unit

Installation using the scale retaining springs
1 Temporarily fix the center of the main scale with the scale retaining spring A.

Scale retaining spring B

Scale retaining spring B

Scale retaining spring A

2 Temporarily fix the main scale with the scale retaining springs B.
This must be performed in the order closer to the center of the main scale.

3 Conduct temperature leveling for 1 to 2 hours.
4 Fully tighten the bolts for scale retaining springs in the order from the center to both ends of the main
scale.
The recommended tightening torque for scale retaining spring bolts is 1.5 N•m.

14

No. 99MBE048B

3 Installation onto the Machine Main Unit

3.3

Mounting the Detector Bracket and Detector

NOTICEDo not directly touch the I/F Box pins during installation. Otherwise, electronic parts may be damaged by static
electricity. Be sure to take measures to prevent static electricity for installation.

To use the scale with the Detector mounted, the machine main unit, as well as the attachment bracket, must be electrically grounded. Failure to do so may cause the scale unit and the Detector to beaffected by external noise. When it is difficult to ground due to the characteristics of the bracket material, make sure that the shielded part of the Detector cable is grounded using a ground bar.
Ground bar etc.

Shielded wire (mesh wire)
Partially cut the vinyl coating of the cable.

Detector cable

Example: Drawing of using a ground bar

1 Peel the protection tape (blue) off the detecting surface of the Detector.

Protection tape
Back of the Detector

15

No. 99MBE048B

3 Installation onto the Machine Main Unit

2 Attach the Detector to the Detector bracket.
Use a gap spacer as shown in the figure below to adjust the distance (gap) between the Detector andmain scale to 0.6 mm.

Pitch direction
Gap spacer (accessory)

M3
Gap direction

Scale side
direction

Roll direction
Detector notch

3 Check the parallelism of the Detector against the main scale with a lever-type dial indicator or electric
micrometer.
The parallelism of the Detector against the main scale must be within 0.03 mm.

4 Fix the Detector.
• The recommended tightening torque for Detector fixing screws is 1.14 N•m–1.5 N•m.
• After fixing the Detector, make sure that the distance (gap) between the Detector and main scale is
0.6 mm using the gap spacer.

3.4

Connecting the Feedback Cable• Be sure to turn off the control unit before connecting the scale unit to the control unit with a feedback cable.
• A feedback cable must be prepared by the user. Find a cable that supports your model accordingto"4.4 Production of Feedback Cable" (page 34).

1 Connect the I/F Box to the control unit with the feedback cable.
2 Turn on the control unit.
»» The POWER light on the I/F Box turns on.

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3 Installation onto the Machine Main Unit

3.5

Adjusting the Detector Signals

After mounting the main scale and Detector and connecting the feedback cable, adjust the Detector
signals.

3.5.1

Adjusting the Detector Mounting Position

1 Remove the two screws and remove the I/F Box cover.

2 Set the oscilloscope as follows.
Item
Measurement pressure range
Scan mode

Setting description
0.5 V/div (50 mV/div when using a 10:1 probe)
X-Y

3 Clip the two probes and GND probe of the oscilloscope to Vref and GND on the I/F Box, respectively.

Main signal output type: A (two-phase sine wave)
VR3:Zpp
VR2:Zdc

TP3:VrefVR1:ø A, B

TP5:GND

TP2: øB
TP1: øA

TP8:ø Z

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3 Installation onto the Machine Main Unit

Main signal output type: B (two-phase square wave + external reset input), C (two-phase square wave + two-phase sine wave)
TP4: ø A

TP1:+5V

TP2:GND
TP7:VrefTP5: ø B
VR4:Zdc
VR5:Zpp
VR1: ø A, B

TP6: ø Z

Main signal output type: D (differential 1 Vpp sine wave)
TP8: ø A
TP9: ø B

TP1:+5V

TP2:GND
TP3:Vref

VR3:Zpp
VR2:Zdc
VR1: ø A, B

TP6: ø Z

4 Adjust the horizontal/vertical positioning knob so that the blip on the oscilloscope is located in thecenter.

5 Clip the ch1 probe to øA (A-phase) and ch2 probe to øB (B-phase).
6 Make sure that the output signals from the I/F Box are within the following specified values.
Tips
If the signals are outside the specified values, adjust the moire direction of the Detector while moving the main
scale or Detector.
Gap direction

Detector moire
direction

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3 Installation onto the Machine Main Unit
Item

Lissajous waveform

Amplitude voltage (Vpp)

Specifiedvalue
2.0±0.2 V

B-phaseB-phaseVp-p

A-phase

Note
This value changes due toan adjustment error in the
gap amount (between the
Detector and main scale),parallelism, and moire angle.

A-phase Vp-p
A-phase Vref

Center voltage(VDC)[Vref] ±0.1 V

Same as the above

0±2 °Same as the above

B-phase VDC

A-phase VDC

B-phase Vref

A-phase VDC

Phase error (ø)

B-phase Vp-pｔ

B-phase VDCｓ
A-phase Vp-p

If measured values do not fall within the specified values, adjust the gap (gap: 0.6±0.1 mm).

Tips
• The Detector and I/F Box were already factory adjusted so that output signals fall within 1.8 V–2.2 V.
• You can fine-adjust the amplitude voltage (Vpp) by electrical adjustment described in"3.5.2 Adjusting the
Signals" (page 20).
• Calculate the phase error (ø) from t/s (ratio of major axis to minor axis) shown in the figure above.
Phase error
t/s

0°
1.000

2°
0.966

4°
0.933

6°
0.901

8°
0.871

10 °
0.841

• Make sure that the oscilloscope does not drift during measurement.

7 Fix the Detector.
8 Make sure that the output signals from the I/F Box are within the specified values.

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3 Installation onto the Machine Main Unit

3.5.2

Adjusting the Signals

Adjusting the main signals
1 Clip the two probes and GND probe of the oscilloscope to Vref and GND on the I/F Box, respectively.
2 Adjust the horizontal/vertical positioning knob so that the blip on the oscilloscope is located in thecenter.

3 Clip the ch1 probe to øA (A-phase) and ch2 probe to øB (B-phase).
4 Adjust the main signals (amplitude voltage) with the volume VR1 on the board while moving the Detector.

To A-phase To B-phasech1 ch2

Ａ Ｂ

Tips• The positions of the check pin (TP) and volume (VR1) on the I/F Box board are different depending on themain signal output type.
• Make sure that the oscilloscope does not drift during measurement.
For the details on the specified values of the amplitude voltage, center voltage, and phase error, referto"3.5.1 Adjusting the Detector Mounting Position" (page 17).

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3 Installation onto the Machine Main Unit

Adjusting the origin signals
If the scale has multiple origins, adjust the origin signals at the origin (one position) you use.

1 Set the oscilloscope as follows.
Item
Measurement pressure range

Setting description
0.5 V/div DC mode (50 mV/div when using a 10:1
probe)T-Y 20 ms

Scan mode2 Clip the ch1 probe and GND probe of the oscilloscope to the check pin øZ and check pin GND on the
I/F Box board, respectively.

3 Move the center of the Detector to near the scale origin mark on the main scale.

Scale origin mark4 Move the scale or Detector in the measurement direction.

Peak level ≒ 2.2 V–2.4 V»» When the vicinity of the center of the Detector passes through the scale origin mark, the origin signal waveform isdisplayed on the oscilloscope screen.

Noise level ≒ 2.5 V

5 Adjust the noise level of the origin signal waveform to about 2.5 V with the volume on the board.
Main signal output typeA (two-phase sine wave)
B (two-phase square wave + external reset input)
C (two-phase square wave + two-phase sinewave)
D (differential 1 Vpp sine wave)

Volume to adjust
VR2
VR4
VR4
VR2

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3 Installation onto the Machine Main Unit

6 Adjust the peak level of the origin signal waveform to about 2.2 V with the volume on the board.
Main signal output typeA (two-phase sine wave)
B (two-phase square wave + external reset input)
C (two-phase square wave + two-phase sinewave)
D (differential 1 Vpp sine wave)

Volume to adjust
VR3
VR5
VR5
VR3

Adjusting the origin signals with the main signal output type D• For the scale unit with the main signal output type D (differential 1 Vpp sine wave), you need toperform not only adjustment in"Adjusting the origin signals" (page 21) but also origin signal
adjustment as shown below.
• Origin signal adjustment must be performed at the origin (one position) you use with the origin
return method.
• After mounting the scale unit or performing other adjustment, be sure to adjust the origin signals
again.

1 Turn on the switch 3 of the DIP switch DPSW1 on the I/F Box board.
DPSW1

The black part
represents "On".

LED4

LED2

LED3

2 Move the scale or Detector slowly (at a speed of 20 mm/s or less) in the origin return direction.
3 When it passes through the scale origin mark, make sure that LED4 turns on and LED2 and LED3
turns on or off.
If the scale has multiple origins, make it pass through the origin (one position) you use.

4 Set the switches 1 and 2 of the DIP switch DPSW1 according to the LED2 and LED3 on/off state.

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3 Installation onto the Machine Main Unit
LED on/off state
LED2
LED3
On
On
On
Off
Off
On
Off
Off

DPSW1 setting
Switch 1
Switch 2
On
On
On
Off
Off
On
Off
Off

Tips
• The switch 4 of the DIP switch DPSW1 is always on.
• The switches 1 and 2 are factory set to off and on, respectively.

5 Turn off the switch 3 of the DIP switch DPSW1.

3.6
3.6.1

Handling the Cables and Checking the Mounting
State
Handling the Cables

After adjusting the signals, fix the I/F Box and feedback cable.

1 Perform wiring paying attention to the twisting or bends of the cables.

NOTICE
Note that the feedback cable may malfunction if bundled with other cables that may cause electrical noise, or if
it is located near a switching relay dealing with a large current.

2 Fix the I/F Box and feedback cable with cable clamps.
Clamp the feedback cable to a nearby part that moves along with the Detector so that force is notapplied to the Detector when the machine unit is running.

Be sure to fix the I/F Box enclosure to the machine main unit with screws.

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No. 99MBE048B

3 Installation onto the Machine Main Unit

3.6.2

Checking the Mounting and Adjustment States

After fixing the I/F Box and feedback cable, check the mounting and adjustment states of the main
scale and Detector again.

Tips
Perform this operation while making sure that the Detector does not make contact or interfere with any part ofthe machine unit or main scale.

1 Make sure that all the part screws and clamps are firmly tightened.
2 Turn off the control unit and turn it on again after 5 to 10 seconds.
Tips
Turning off the control unit resets the alarm that occurred during adjustment.

3 Make sure that the input power voltage is 5 V±5 % at the +5 V check pin and GND check pin on the I/F
Box board.
Tips
For the I/F Box with the main signal output type A (two-phase sine wave), check the input power voltage at pins
No.3 and No. 4 on the output connector.
VR3:Zpp
VR2:Zdc

TP3:VrefPin No. 4
Pin No. 3
VR1:ø A, B

TP5:GND

TP2: øB
TP1: øA

TP8:ø Z

4 Make sure that the output signals are within the specified values throughout the entire travel range ofthe machine unit.
Tips
If the specified values are not satisfied, check again if the main scale is dirty, fine-adjust the Detector position,and electrically fine-adjust the signals.

5 Make sure that no control unit alarm occurs throughout the entire travel range of the machine unit.

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No. 99MBE048B

3 Installation onto the Machine Main Unit

6 Remove the oscilloscope probes.
7 Attach the I/F Box cover with the two screws.

3.6.3

Putting the Protection CoverAfter checking the mounting and adjustment states of the main scale and Detector again, put theprotection cover.
• Make sure that the protection cover does not make contact with any machine unit part or scale unit
cable.
• Check the above for the entire travel range of the machine unit.

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No. 99MBE048B

3 Installation onto the Machine Main Unit

MEMO

26

No. 99MBE048B

4 Specifications

4

Specifications

4.1

Specifications

Item
Detection method
Main scale grid pitch
Main signal output pitch
Output signal typeSpecification
Optical reflection type linear encode
8 μm
4 μm
A: Two-phase sine wave
B: Two-phase square wave (reset input specification)
C: Two-phase square wave, two-phase sine wave

Effective length
Indication accuracy (20 °C)

D: Differential 1 Vpp sine wave
10 mm–3000 mm
Effective length of 10 mm–300 mm: ±0.5 μm
Effective length of 350 mm–500 mm: ±1.0 μm
Effective length of 600 mm–1000 mm: ±2.0 μm

Coefficient of linear expansion

Effective length of 1100 mm–3000 mm: ±2.0 μm/m
≈8×10 –6/K

Maximum response speed

1200 mm/s (at two-phase sine wave output)
For a two-phase square wave, the value changes depending on
the resolution as follows (when the minimum edge-to-edge interval
is 125 ns):
0.1 μm: 720 mm/s
0.05 μm: 360 mm/s
0.02 μm: 144 mm/s
0.01 μm: 72 mm/s

* When the minimum edge-to-edge interval doubles, the maximum
response speed halves.
Scale origin
Available (50 mm pitch, center point for effective length of 10 mm–
80 mm)
Response speed at scale origin 20 mm/s
detection
Power supply voltage
DC5 V±5 %Maximum current consumption A: 120 mA
B: 250 mA
C: 250 mA
Used temperature range
Storage temperature range
Used/storage humidity range
Alarm Display function

D: 190 mA
0 °C–40 °C-20 °C–60 °C
20 %RH–80 %RH (non condensation)
A scale unit alarm is indicated with a LED on the I/F Box.

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4 Specifications

4.2

Output Circuits and Signal Waveforms

4.2.1

Main Signal Type: Type A, Type COutput circuit
The output circuits of the sine wave output signals (A-phase, B-phase) and reference signal are asshown in the figure below.
A-phase/B-phase (sine wave)
output circuit

A-phase, B-phase

Reference signal (Vref)
output circuit

Signal waveform
The waveforms of the sine wave output signals (A-phase, B-phase) are as shown in the figure below.
Vref

A-phase
Output signal pitch: 4 μm

B-phase

Vref

Vref (Vcc/2 ≒ 2.5 V)

Phase difference 90 ° (Typ)28

No. 99MBE048B

4 Specifications

4.2.2

Main Signal Type: Type B, Type COutput circuit
The output circuit of the square wave output signals (A-phase, B-phase), origin signals, and alarm
signal is as shown in the figure below.

Differential line driver
Equivalent to AM26C31

Signal waveform
The waveforms of the square wave output signals (A-phase, B-phase) and origin signals are as shownin the figure below.
VOH
PA

VOL

PA
PB
PB
td
PZ
PZ

Z-phase pulse width200±100 μm

VOH = 2.5 V (minimum)
VOL = 0.5 V (maximum)
td: Edge-to-edge interval, resolution

Tips• A phase difference between PZ signal and PA signal (or PB signal) does not matter.
• The above figure shows waveforms when the Detector moves as follows with the switch 8 of the DIP switch
DPSW2 on the I/F Box set to "On".
Detector move direction
Origin track

Detector cable

Scale track29

No. 99MBE048B

4 Specifications

4.2.3

Main Signal Type: Type DOutput circuit
The output circuit and recommended receiving circuit of the differential 1 Vpp sine wave signals(A-phase, XA-phase, B-phase, XB-phase) and origin signals (Z-phase, XZ-phase) are as shown in the
figure below.
Scale unit output circuit

Cable(twisted shielded cable)

Recommended receiving
circuitA, B, Z-phase
A, B, Z-phase
TH4130 (or equivalent)

RC4157 (or equivalent)
XA, XB, XZ-phase30

No. 99MBE048B

4 Specifications

Signal waveform
The waveforms of the differential 1 Vpp sine wave signals (A-phase, XA-phase, B-phase, XB-phase)and origin signals (Z-phase, XZ-phase) are as shown in the figure below.
Output signal pitch λ = 4 μm = 360 °A-phaseXA-phase

B-phasePhase difference 90 °±10 °XB-phase

Z-phaseXZ-phase

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4 Specifications

4.3

Pin Assignment

4.3.1

Main Signal Type: Type A
1

8

9

15

Pin No.

Signal

1
2
3
4
5
6

0 V (GND)
0 V (GND)+5 V (Vcc)+5 V (Vcc)
A-phase (sine wave)
B-phase (sine wave)

7, 10

Vref (≒ Vcc/2)

8
9, 11–14
15

PZ (origin signal pulse)
N.C.
F.G

Tips
The applicable connector (accessory) is D15-403N-110 (Technical Electron).

4.3.2

Main Signal Type: Type B
1

8

9

15

Pin No.

Signal

1
2
3
4
5
6
7
8

0 V (GND)
0 V (GND)+5 V (Vcc)+5 V (Vcc)
Reset input AL (anode)
Reset input AL (cathode)Vref (≒ Vcc/2)
PZ (origin signal pulse_positive phase)9

ALM (alarm)

10
11
12
13
14
15

PA (main signal pulse_positive phase)
PA (main signal pulse_reverse phase)
PB (main signal pulse_positive phase)
PB (main signal pulse_reverse phase)
PZ (origin signal pulse_reverse phase)
F.G

Tips
The applicable connector (accessory) is D15-403N-110 (Technical Electron).

32

No. 99MBE048B

4 Specifications

4.3.3

Main Signal Type: Type C
1

8

9

15

Pin No.

Signal

1
2
3
4
5
6
7
8

0 V (GND)
0 V (GND)+5 V (Vcc)+5 V (Vcc)
A-phase (sine wave)
B-phase (sine wave)
Vref (≒ Vcc/2)
PZ (origin signal pulse_positive phase)9

ALM (alarm)

10
11
12
13
14
15

PA (main signal pulse_positive phase)
PA (main signal pulse_reverse phase)
PB (main signal pulse_positive phase)
PB (main signal pulse_reverse phase)
PZ (origin signal pulse_reverse phase)
F.G

Tips
The applicable connector (accessory) is D15-403N-110 (Technical Electron).

4.3.4

Main Signal Type: Type D
1

8

9

15

Pin No.
1
2
3
4
5
6
7
8

Signal
XA-phase (sine wave)
XB-phase (sine wave)
Z-phase (pulse)+5 V (Vcc)+5 V (Vcc)
N.C.
N.C.
N.C.

9

A-phase (sine wave)

10
11
12
13
14
15

B-phase (sine wave)
XZ-phase (pulse)
0 V (GND)
0 V (GND)
N.C.
F.G

Tips
The applicable connector (accessory) is D15-403N-150 inch thread specification (Technical Electron).

33

No. 99MBE048B

4 Specifications

4.4

Production of Feedback Cable
The following conditions must be met for the feedback cable:• Use a shielded cable.
• Clamp the shield (FG) to the metal case of the supplied connector. If it is difficult to clamp, connect
it to pin No. 15.
• Set the cable impedance and length so that the power voltage is 4.75 V or more on the I/F Box.
Vsp - (Rc ÷ 2) x L x 2 x 0.25 ≧ 4.75 V
Vsp: Power voltage supplied from the control unit (Volts)
Rc: Cable power, ground wire impedance (Ω/m)
L: Cable length (m)0.25: Maximum current consumption of the scale unit (A)When a two-phase square wave is used on the scale unit with the main signal output type B (twophase square wave + external reset input) or C (two-phase square wave + two-phase sine wave),connect the I/F Box to the control unit as shown below.
I/F Box side

Control unit
Connection cablePAPA

A-phasePB
PB

B-phasePZ
PZ

Z-phase

R2
11
R1

R1

R1

R1

12
R2
13
+5V

8
R2
14
4.7 kΩ

ALM

+5V

R1
10

R1

1.8 kΩ

9Line driver
AM26C31: TI

4.7 kΩ
+5V+5V

Line receiver
AM26C32: TI
R1=560 Ω
R2=110 Ω

3
4
1
2
15

Shield34

No. 99MBE048B

4 Specifications• When the control unit has the Disconnection Detection function for A-phase/B-phase (PA, PA,
PB, PB), you do not need to connect the ALM output. In this case, turn on the switch 7 of the DIP
switch DPSW2 on the I/F Box board to set the high impedance mode.
• If the control unit has no Disconnection Detection function or putting the A-phase/B-phase output
in high impedance causes a problem for the system, connect the ALM output. In this case, turn off
the switch 7 of the DIP switch DPSW2 on the I/F Box board to output the alarm signal.
For details on the DIP switch on the I/F Box board, refer to(page 41).

4.5

Alarm Function

4.5.1

Main Signal Type: Type A"4.8 Changing the Output Settings"

Detection details
If the waveform of the sine wave signal input to the I/F Box is within the following setting range, the
POWER light turns on in red as it considers that an error signal is detected.
Range

POWER light

Setting range (approximate
value)OK

Solid green

2.0±0.2 Vpp

Error

Solid red

1.1 Vpp or less

Tips
The above setting range is applied when the power voltage is 5.0 V. If the power voltage changes, the setting
range also changes together with the input range in proportion to voltage.

Error range

Resetting the alarm
1 Eliminate the cause of the error signal.
2 Turn off the control unit and turn it on again after 10 seconds or more.

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No. 99MBE048B

4 Specifications

4.5.2

Main Signal Type: Type B, Type CDetection details
zzOver speed error
If the value exceeds the maximum response speed set in the minimum edge-to-edge interval and thenumber of divisions of the output pulse, the POWER light turns on in red.

zzError signal detection
If the waveform of the sine wave signal input to the I/F Box is within the caution range or error range,
the POWER light and S.UP (setup) light flash/turn on in red.
Range
OK
CautionError

S.UP light
Solid green
Flashing red
Off

POWER light
Solid green
Solid green
Solid red

Alarm output
Not available
Not available
Available

Tips• If the scale is used within the caution range, no alarm occurs, but the accuracy of division is reduced.
• In error signal detection, the LED indicates one of the three ranges - normal, caution, and error - for the
waveform levels (too large or too small) of the input sine wave signal as shown below.
B-phase
Error
range

OK
range

A-phaseCautionrange

Ideal lissajous
2.5 V (Vref) ±0.1 V• The caution and error setting ranges are as follows.
Range

Setting range (approximate value)

Caution

0.9 Vpp or less or 2.7 Vpp or moreError

0.5 Vpp or less or 2.9 Vpp or more

• The above setting range is applied when the power voltage is 5.0 V. If the power voltage changes, the setting
range also changes together with the input range in proportion to voltage.

36

No. 99MBE048B

4 Specifications

Alarm behaviors
Item
When the high impedance mode
is onLine driver output

When the high impedance mode
is offAlarm light

Behavior
All output is put in high impedance (notelectrically H nor L but like floating).
The AL signal (active L) is output. However, others (PA, PA, PB, PB, PZ, PZ)
also continue to be output.
The POWER light changes from green
to red.

Resetting the alarm
zzTurning on the power again
1 Eliminate the cause of the alarm.
2 Turn off the control unit and turn it on again after 10 seconds or more.

zzAlarm reset signal
3 Eliminate the cause of the alarm.
4 Input the alarm reset signal (pulse width of 10 ms or more).
Tips• The alarm can be reset by the alarm reset signal only when the main signal output type is B (two-phasesquare wave + external reset input).
• Connect the alarm reset input circuit so that the current is 3 mA–10 mA.
• Since the product is equipped with a resistor (1.2 kΩ) inside, applying 5 V–12 V between the reset input AL(anode) and reset input AL (cathode) resets the alarm.
I/F Box side

Control unit
For the photocoupler

TLP521+V
1.2 kΩ

Reset input AL(anode)Reset input AL(cathode)

For the relay
+V

5
6

-V

Reset input• To apply 12 V or more, add a resistor externally.

37

No. 99MBE048B

4 Specifications

4.6

Adjusting the Signals Using the Check Adapter(Option)When you do not adjust the signals, remove the check adapter from the I/F Box.

Tips
• Signal adjustment using the check adapter is available only on the scale unit with the main signal output typeB (two-phase square wave + external reset input) or C (two-phase square wave + two-phase sine wave).
• Only a little noise may be added to measured values during signal adjustment because the check adapter is
not shielded.

You can adjust the signals more efficiently by using the optional check adapter (P/N: 06ACE468).

1 Connect the check adapter between the output connector of the I/F Box and the feedback cable.

Harness
Check adapter(option: No. 06ACE468)

Check adapter main unit

Output cable

2 Connect the harness (lead wire with a square connector) supplied with the check adapter between
CNP3 on the check adapter board and CNP3 on the I/F Box board.

38

No. 99MBE048B

4 Specifications

3 Clip the GND probe of the oscilloscope to GND_AN on the check adapter.

4 Clip the two probes of the oscilloscope to Vref on the check adapter board.
5 Adjust the horizontal/vertical positioning knob so that the blip on the oscilloscope is located in thecenter.

6 Clip the ch1 probe to øA (A-phase) and ch2 probe to øB (B-phase) on the check adapter board.
7 Adjust the main signals (amplitude voltage) with the volume VR1 on the I/F Box board while moving the
Detector.
»» For details on how to adjust the main signals, refer to"Adjusting the main signals" (page 20).

Tips
You can check the divided square waves and origin signal pulse at PA, PB, and PZ on the check adapter. To
check the values, clip the GND probe of the oscilloscope to GND on the check adapter.

8 Clip the ch1 probe to øZ on the check adapter board.
9 Move the center of the Detector to near the scale origin mark on the main scale.
10 Move the scale or Detector in the measurement direction.
»» When the vicinity of the center of the Detector passes through the scale origin mark, the origin signal waveform is displayed on the oscilloscope screen.
"Adjusting the origin signals" (page 21).
»» For details on how to adjust the origin signals, refer to

11 Adjust the noise level of the origin signal waveform to about 2.5 V with VR4 on the I/F Box board.
12 Adjust the peak level of the origin signal waveform to about 2.2 V with VR5 on the I/F Box board.
13 Remove the check adapter and harness.

39

No. 99MBE048B

4 Specifications

4.7

Removing the Detector Cable

When you need to replace the Detector or I/F Box, remove the Detector cable from the I/F Box.

1 Remove the two screws and remove the I/F Box cover.

2 Loosen the two cable flange screws.
3 Pull the Detector cable from the connector on the board.
Tips• To attach the Detector cable, perform the above procedure in reverse order.
• To insert the Detector cable into the connector on the board, make sure that it is inserted all the way in thecorrect connector notch direction.
• Firmly fix the two cable flange screws.
• If insertion into the connector or screw fixing is insufficient, it causes a malfunction.

40

No. 99MBE048B

4 Specifications

4.8

Changing the Output Settings

Tips
Output setting change is available only on the scale unit with the main signal output type B (two-phase squarewave + external reset input) or C (two-phase square wave + two-phase sine wave).

You can change the output settings with the DIP switch DPSW2 on the I/F Box board.
ＯＮ

１

２

３

５

４

６

７

８

Minimum edge-to-edge interval

Direction switch

Resolution

Alarm output type

Minimum edge-to-edge interval
Minimum edge-toedge interval
125 nsOn
250 nsOn
500 nsOff1000 ns
Off

1

2

Factory setting

On
Off
On
Off

●

Tips
The factory settings are subject to change upon customer's request.

Resolution
Resolution
0.01 μm
0.02 μm
0.05 μm
0.1 μm

3
Off
Off
Off
On

4
On
Off
On
Off

5
Off
Off
On
On

6
On
On
Off
Off

Factory setting●

The operation is not guaranteed for any other setting than the above.

Tips
The factory settings are subject to change upon customer's request.

41

No. 99MBE048B

4 Specifications

Alarm output type7
When an alarm occurs, output is put On
in high impedance.
When an alarm occurs, the alarmOffsignal is output.

Factory setting●

Tips
The factory settings are subject to change upon customer's request.

Direction switch
Direction
Forward: PA phase advance
Reverse: PB phase advance

8
On
Off

Factory setting●

Tips
The factory settings are subject to change upon customer's request.

42

No. 99MBE048B

4 Specifications

4.9

Maximum Response Speed

Tips
Maximum response speed change is available only on the scale unit with the main signal output type B (twophase square wave + external reset input) or C (two-phase square wave + two-phase sine wave) that allows
output setting change with the DIP switch DPSW2 on the I/F Box board.
Setting
Resolution
Minimum edgeto-edge
interval(number of divisions)0.01 μm(400)0.02 μm(200)0.05 μm(80)

0.1 μm(40)

Maximum response speed (mm/s)(main signal output pitch: 4 μm)+0 %, -10 %125 ns
250 ns
500 ns1 μs
125 ns
250 ns
500 ns1 μs
125 ns
250 ns
500 ns1 μs
125 ns
250 ns
500 ns

72
36
18
9
144
72
36
18
360
180
90
45
720
360
180

1 μs

90

43

No. 99MBE048B

Center of the Detector

Scale full length

Effective length

Scale retaining spring A(Adjustment pin hole)

Mounting
surface

Scale retaining spring B

G: Machine guideCenter of
the Detector

2 x M5 through-hole

Effective length

Scale full length

Effective length of 100 mm–3000 mm(Adjustment pin hole)

Scale origin mark(50-mm pitch)Center of
the Detector
Mounting
surface

G: Machine guide4.10.1

Center of the Detector when
the scale origin signal is output

Effective length of 10 mm–80 mm

4 Specifications

4.10 External View and Dimensional Drawings
Dimensional Drawings

44

No. 99MBE048B

22 or more

4 Specifications

4.10.2Dimensional Drawings Table

Code No. (*1)

Model number (*2)

579-501-0□
579-502-0□
579-503-0□
579-504-0□
579-505-0□
579-506-0□
579-507-0□
579-508-0□
579-509-0□
579-510-0□
579-511-0□
579-512-0□
579-513-0□
579-514-0□
579-515-0□
579-516-0□
579-517-0□
579-518-0□
579-519-0□
579-520-0□
579-521-0□
579-522-0□
579-523-0□
579-524-0□
579-525-0□
579-526-0□
579-527-0□
579-528-0□
579-529-0□
579-530-0□
579-531-0□
579-532-0□
579-533-0□
579-534-0□

ST36◇-10
ST36◇-25
ST36◇-50
ST36◇-75
ST36◇-80
ST36◇-100
ST36◇-150
ST36◇-200
ST36◇-250
ST36◇-300
ST36◇-350
ST36◇-400
ST36◇-450
ST36◇-500
ST36◇-600
ST36◇-700
ST36◇-800
ST36◇-900
ST36◇-1000
ST36◇-1100
ST36◇-1200
ST36◇-1300
ST36◇-1400
ST36◇-1500
ST36◇-1600
ST36◇-1700
ST36◇-1800
ST36◇-2000
ST36◇-2200
ST36◇-2400
ST36◇-2500
ST36◇-2600
ST36◇-2800
ST36◇-3000

Effective
length L1
(mm)
10
25
50
75
80
100
150
200
250
300
350
400
450
500
600
700
800
900
1000
1100
1200
1300
1400
1500
1600
1700
1800
2000
2200
2400
2500
2600
2800
3000

Scale fulllength L2
(mm)
30
45
70
90
100
140
190
240
290
340
390
440
490
540
640
740
840
940
1040
1140
1240
1340
1440
1540
1640
1740
1840
2040
2240
2440
2540
2640
2840
3040

Scale fixed Scale retain- Scale retainpitch L3 (mm) ing spring A ing spring B(quantity)(quantity)
−
−
−
−
−
−
−
−
−
−
−
−
−
−
−
50
1
2
75
1
2
100
1
2
60
1
4
75
1
4
85
1
4
100
1
4
75
1
6
80
1
6
100
1
6
85
1
8
100
1
8
90
1
10
100
1
10
90
1
12
100
1
12
130
1
10
100
1
14
125
1
12
100
1
16
120
1
14
100
1
18
100
1
20
100
1
22
100
1
24
95
1
26
100
1
26
100
1
28
100
1
30

*1: The □ mark in Code No. represents as follows:
1: Two-phase sine wave
2: Two-phase square wave + external reset input
3: Two-phase square wave + two-phase sine wave
4: Differential 1 Vpp sine wave
*2: The ◇ mark in Model number represents as follows:
A: Two-phase sine wave
B: Two-phase square wave + external reset input
C: Two-phase square wave + two-phase sine wave
D: Differential 1 Vpp sine wave

45

No. 99MBE048B

4 Specifications

MEMO

46

No. 99MBE048B

5 Troubleshooting

5

TroubleshootingThis chapter describes how to check for the reasons why problems occur when initially powering on,
or for when alarms are generated during operation.
A problem occurs.
A

The problem is solved.

NO

YES

End

A disconnection
alarm is unseen on
the control unit.

NO

Check the control unit and I/F
Box settings (minimum
resolution, minimumedge-to-edge interval,
direction, etc.).

YES

The POWER lighton the I/F Box
turns on in red.

The feedback cable iswired correctly (including
the shielded wire).

NO

NO

Correct the feedback
cable wiring.

YES

A

YES

The shieldedwire of the feedback
cable is grounded to aground bar.

NO

YES

YES

A

YES

The mounting
position relationship between
the Detector and main scale
is correct.

The Detector cable iscorrectly conducted.

Correct the grounding.

NONO

Replace the Detector cable(contact the nearest Mitutoyo
service center/sales office).

A

Mount them again.

A

Contact the nearest
Mitutoyo service
center/sales office.

47

No. 99MBE048B

5 Troubleshooting

MEMO

48

No. 99MBE048B

SERVICE NETWORK*As of January 2019
M3 Solution Center Coventry
Unit6, Banner Park, Wickmans Drive, Coventry,
Warwickshire CV4 9XA, UNITED KINGDOMTEL: 44 (0)2476 426300 FAX: 44 (0)2476 426339

EuropeMitutoyo Europe GmbH
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Mitutoyo CTL Germany GmbH
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Germany
Mitutoyo Deutschland GmbH
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TEL: 49 (0)2137 102-0 FAX: 49 (0)2137 86 85

M3 Solution Center Berlin
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TEL:49(0)30 2611 267
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Mitutoyo (UK) Ltd.
Joule Road, West Point Business Park,
Andover, Hampshire SP10 3UX, UNITED KINGDOMTEL: 44 (0)1264 353 123 FAX: 44 (0)1264 354883

M3 Solution Center East Kilbride
The Baird Building, Rankine Avenue, Scottish
Enterprise Technology Park, East Killbride G75
0QF, UNITED KINGDOMTEL: 44 (0)1355 581170 FAX: 44 (0)1355 581171
FranceM3 Solution Center Hamburg
Tempowerkring 9·im HIT-Technologiepark 21079
Hamburg, GERMANY
TEL: 49 (0)40 791894-0 FAX: 49 (0)40 791894-50

U.K.

M3 Solution Center Halifax
Lowfields Business Park, Navigation Close, Elland,West Yorkshire HX5 9HB, UNITED KINGDOMTEL: 44 (0)1422 375566 FAX: 44 (0)1422 328025

Mitutoyo France
Paris Nord 2-123 rue de la Belle Etoile, BP 59267
ROISSY EN FRANCE 95957 ROISSY CDG
CEDEX, FRANCETEL: 33 (0)149 38 35 00
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Parc Mail 523, cours du 3éme millénaire, 69791
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Parc de la porte Sud, Rue du pont du péage,67118 Geispolsheim, FRANCETEL: 33 (0)149 38 35 80
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Espace Scionzier 480 Avenue des Lacs, 74950
Scionzier, FRANCETEL: 33 (0)1 49 38 35 90
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Aeroparc Saint Martin Cellule B08 ZAC de SaintMartin du Touch 12 rue de Caulet 31300
Toulouse, FRANCETEL: 33 (0)1 49 38 42 90
M3 Solution Center RENNESZAC Mivoie
Le Vallon
35230 Noyal-Châtillon sur Seiche, FRANCETEL: 33 (0)1 49 38 42 10

App-1

Czech Republic

Italy
MITUTOYO ITALIANA S.r.l.
Corso Europa, 7 - 20020 Lainate (Ml), ITALYTEL: 39 02 935781 FAX: 39 02 9373290•93578255

Mitutoyo Česko s.r.o.
Dubská 1626, 415 01 Teplice, CZECH REPUBLICTEL: 420 417-514-011 FAX: 420 417-579-867

M3 Solution Center BOLOGNA
Via dei Carpini1/A - 40011 Anzola Emilia (BO), ITALYTEL: 39 02 93578215 FAX: 39 02 93578255

Mitutoyo Česko s.r.o. M3 Solution Center  Ivančice
Ke Karlovu 62/10, 664 91 Ivančice, CZECH REPUBLICTEL: 420 417-514-011 FAX: 420 417-579-867

M3 Solution Center CHIETI
Contrada Santa Calcagna - 66020 Rocca S.
Giovanni (CH), ITALYTEL: 39 02 93578280 FAX: 39 02 93578255

Mitutoyo Česko s.r.o. M3 Solution Center
Ostrava Mošnov
Mošnov 314, 742 51 Mošnov, CZECH REPUBLICTEL: 420 417-514-050 FAX:420 417-579-867

M3 Solution Center PADOVA
Via G. Galilei 21/F - 35035 Mestrino (PD), ITALYTEL: 39 02 93578268 FAX: 39 02 93578255

Mitutoyo Česko s.r.o. Slovakia Branch
Hviezdoslavova 124, 017 01 Povážská
Bystrica, SLOVAKIATEL: 421 948-595-590

Belgium / Netherlands
Mitutoyo BeNeLux
Mitutoyo Belgium N.V.
Hogenakkerhoekstraat 8, 9150 Kruibeke, BELGIUM
TEL: 32 (0)3-2540444 FAX: 32(0)3-2540445

Hungary

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Wiltonstraat 25, 3905 KW Veenendaal,
THE NETHERLANDS
TEL: 31(0)318-534911

Romania

Mitutoyo Hungária Kft.
Záhony utca 7, D-épület / fsz, 1031 Budapest, HUNGARY
TEL: 36 (0)1 2141447 FAX: 36 (0)1 2141448
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1A Drumul Garii Odai Street, showroom, Ground
Floor, 075100 OTOPENI-ILFOV, ROMANIA
TEL: 40 (0)311012088 FAX: +40 (0)311012089

SwedenMitutoyo Scandinavia AB
Släntvägen 6, 194 61 Upplands Väsby, SWEDEN
TEL: 46 (0)8 594 109 50 FAX: 46 (0)8 590 924 10
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TEL: 46 (0)8 594 109 50 FAX:46 (0)322 63 31 62
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Switzerland
Mitutoyo (Schweiz) AG
Steinackerstrasse 35, 8902 Urdorf, SWITZERLAND
TEL: 41 (0)447361150 FAX: 41(0)447361151
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Rue Galilée 4, 1400 Yverdon-les Bains, SWITZERLAND
TEL: 41 (0)244259422 FAX: 41 (0)447361151
PolandMitutoyo Polska Sp.z o.o.
Ul.Graniczna 8A, 54-610 Wroclaw, POLAND
TEL: 48 (0)71354 83 50 FAX: 48 (0)71354 83 55

Showroom in Brasov
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Park Turnul 1, Mezanin, 500446
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TEL/FAX: 40 (0)371020017
Russian Federation
Mitutoyo RUS LLC
13 Sharikopodshipnikovskaya, bld.2,
115088 Moscow, RUSSIAN FEDERATIONTEL: 7 495 7450 752
Finland
Mitutoyo Scandinavia AB Finnish Branch
Viherkiitäjä 2A, 33960, Pirkkala, FINLAND
TEL: 358 (0)40 355 8498
Austria
Mitutoyo Austria GmbH
Johann Roithner Straße 131 A-4050 Traun, AUSTRIATEL: 43 (0)7229 23850 FAX: 43 (0)7229 23850-90
Götzis Regional Showroom
Lasten Straße 48A 6840, AUSTRIA

App-2

Singapore

Ho Chi Minh City Branch Office / M3 Solution Center
123 Dien Bien Phu Street,Ward 15,Binh Thanh
District, Ho Chi Minh City, VIETNAM
TEL:(84)28-3840-3489 FAX:(84)28-3840-3498

Mitutoyo Asia Pacific Pte. Ltd.
Head office / M3 Solution Center
24 Kallang Avenue, Mitutoyo Building,
SINGAPORE 339415
TEL:(65)62942211 FAX:(65)62996666

Mitutoyo Philippines, Inc.
Head Office / M3 Solution Center
Unit 2103, Bldg 2 GMV Building 2, 107 North Main Avenue,
Laguna Technopark, Binan, Laguna 4024, Philippines
TEL:(63)49 544 0272 FAX:(63)49 544 0272

Malaysia
Mitutoyo (Malaysia) Sdn. Bhd.
Kuala Lumpur Head Office / M3 Solution Center
Mah Sing Integrated Industrial Park, 4, Jalan Utarid U5/14,
Section U5, 40150 Shah Alam, Selangor, MALAYSIA
TEL:(60)3-78459318 FAX:(60)3-78459346

India
Mitutoyo South Asia Pvt. Ltd.
Head Office / M3 Solution Center
C-122, Okhla Industrial Area, Phase-l,
New Delhi-110 020, INDIA
TEL:91(11)2637-2090 FAX:91(11)2637-2636

Penang Branch office / M3 Solution Center
No.30, Persiaran Mahsuri 1/2, Sunway Tunas,
11900 Bayan Lepas, Penang, MALAYSIA
TEL:(60)4-6411998 FAX:(60)4-6412998

MSA Gurgaon technical center
Plot No. 65, Phase-IV, Udyog Vihar, Gurgaon – 122016
TEL : 91 (0124) – 2340294

Johor Branch office / M3 Solution CenterNo. 70, Jalan Molek 1/28, Taman Molek, 81100
Johor Bahru, Johor, MALAYSIA
TEL:(60)7-3521626 FAX:(60)7-3521628
Mitutoyo(Thailand)Co., Ltd.
Bangkok Head Office / M3 Solution Center
76/3-5, Chaengwattana Road, Kwaeng Anusaowaree,
Khet Bangkaen, Bangkok 10220, THAILAND
TEL:(66)2-080-3500 FAX:(66)2-521-6136

Mumbai Region Head office
303, Sentinel Hiranandani Business Park Powai,
Mumbai-400 076, INDIA
TEL:91(22)2570-0684, 837, 839 FAX:91(22)2570-0685
Pune Office / M3 Solution Center
G2/G3, Pride Kumar Senate, F.P. No. 402 Off.
Senapati Bapat Road, Pune-411 016, INDIA
TEL:91(20)6603-3643, 45, 46 FAX:91(20)6603-3644

Chonburi Branch / M3 Solution Center
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TEL:(66)2-080-3563 FAX:(66)3-834-5788

Bengaluru Region Head office / M3 Solution Center
No. 5, 100 Ft. Road, 17th Main, Koramangala,
4th Block, Bengaluru-560 034, INDIA
TEL:91(80)2563-0946, 47, 48 FAX:91(80)2563-0949

Amata Nakorn Branch / M3 Solution Center
700/199, Moo 1, Tambon Bankao, Amphur Phanthong, Chonburi 20160, THAILAND
TEL:(66)2-080-3565 FAX:(66)3-846-8978

Chennai Office / M3 Solution Center
No. 624, Anna Salai Teynampet, Chennai-600 018, INDIA
TEL:91(44)2432-8823, 24, 27, 28
FAX:91(44)2432-8825

ThailandIndonesia
PT. Mitutoyo Indonesia
Head Office / M3 Solution Center
Jalan Sriwijaya No.26 Desa cibatu Kec. Cikarang
Selatan Kab. Bekasi 17530, INDONESIATEL: (62)21-2962 8600 FAX: (62)21-2962 8604
Vietnam
Mitutoyo Vietnam Co., Ltd
Hanoi Head Office / M3 Solution Center
No. 07-TT4, My Dinh - Me Tri Urban Zone, My Dinh 1
Ward, Nam Tu Liem District, Hanoi, VIETNAM
TEL:(84)24-3768-8963 FAX:(84)24-3768-8960

Kolkata Office
Unit No. 1208,Om Tower, 32,J.L..Nehru Road,
Kolkata-700 071, INDIA
Tel: 91 33-22267088/40060635 Fax: (91) 33-22266817
Ahmedabad Office/M3 Solution Center (Ahmedabad)
A-104 & A-105, First Floor, Solitaire Corporate
Park, Near Divya Bhaskar Press, S.G. Road,
Ahmedabad - 380 015, INDIA
TEL: (91) 079 - 29704902/903
Coimbatore Office (Coimbatore)
Regus, Srivari Srimath, 3rd Floor, Door No:1045,
Avinashi Road, Coimbatore - 641 018,INDIA
TEL: (91) 9345005663

App-3

TaiwanMitutoyo Taiwan Co., Ltd. / M3 Solution Center Taipei
4F., No.71, Zhouzi St., Neihu Dist.,Taipei City 114,
TAIWAN (R.O.C.)
TEL:886(2)5573-5900 FAX:886(2)8752-3267
Taichung Branch / M3 Solution Center Taichung1F., No.758, Zhongming S. Rd., South Dist.,
Taichung City 402, TAIWAN(R.O.C.)
TEL:886(4)2262-9188 FAX:886(4) 2262-9166

Hangzhou Office
Room 804, Eastern International Business Center Building 1, No.600 Jinsha Road
Hangzhou Economic and Technological
Development Zone, 310018, CHINA
TEL: 86(571)8288-0319 FAX: 86(571)8288-0320
Tianjin Office / M3 Solution Center Tianjin
Room D 12/F, TEDA Building, No.256 Jie-fang
Nan Road Hexi District,Tianjin 300042, CHINA
TEL:86(22)5888-1700 FAX:86(22)5888-1701

Kaohsiung Branch / M3 Solution Center Kaohsiung1F., No.31-1, Haibian Rd., Lingya Dist.,
Kaohsiung City 802, TAIWAN (R.O.C.)
TEL:886(7)334-6168 FAX:886(7)334-6160

Changchun Office
Room 815, 8F, Building A1, Upper East
International No.3000 Dongsheng Street,
Erdao District, Changchun, Jilin, 130031, CHINA
TEL:86(431)8192-6998 FAX:86(431)8192-6998

South Korea
Mitutoyo Korea Corporation
Head Office / M3 Solution Center(Sanbon-Dong, Geumjeong High View Build.), 6F, 153-8,
Ls-Ro, Gunpo-Si, Gyeonggi-Do, 15808 KOREA
TEL:82(31)361-4200 FAX:82(31)361-4202

Chongqing Office
Room 1312, Building 3, Zhongyu Plaza, No.86,
Hongjin Avenue,Longxi Street, Yubei District,
Chongqing, 400000, CHINA
TEL:86(23)6595-9950 FAX:86(23)6595-9950

Busan Office / M3 Solution Center(3150-3, Daejeo 2-dong) 8,Yutongdanji 1-ro
49beon-gil, Gangseo-gu, Busan, 46721 KOREA
TEL:82(51)718-2140 FAX:82(51)324-0104

Qingdao Office
Room 638, 6F, No.192 Zhengyang Road, Chengyang
District, Qingdao, Shandong, 266109, CHINA
TEL:86(532)8096-1936 FAX:86(532)8096-1937

Daegu Office / M3 Solution Center(Galsan-dong, Daegu Business Center), 301-Ho, 217,
Seongseogongdan-ro, Dalseo-gu, Daegu 42704 KOREA
TEL:82(53)593-5602 FAX:82(53)593-5603

Xi’an Office
Room 805, Xi’an International Trade Center, No.
196 Xiaozhai East Road, Xi’an, 710061, CHINA
TEL:86(29)8538-1380 FAX:86(29)8538-1381

China
Mitutoyo Measuring Instruments (Shanghai) Co., Ltd.
12F, Nextage Business Center, No.1111
Pudong South Road, Pudong New District,
Shanghai 200120, CHINA
TEL:86(21)5836-0718 FAX:86(21)5836-0717
Suzhou Office / M3 Solution Center (Suzhou)
No. 46 Baiyu Road, Suzhou 215021, CHINA
TEL:86(512)6522-1790 FAX:86(512)6251-3420

Dalian Office / M3 Solution Center Dalian
Room 1008, Grand Central IFC, No.128 Jin ma Road,
Economic Development Zone, Dalian 116600, CHINA
TEL:86(411)8718 1212 FAX:86(411)8754-7587
Zhengzhou Office
Room1801,18/F,Unit1,Building No.23, Shangwu Inner
Ring Road, Zhengdong New District,Zhengzhou City,
Henan Province, 450018,CHINA
TEL:86(371)6097-6436 FAX:86(371)6097-6981
Mitutoyo Leeport Metrology (Hong Kong) Limited
Room 818, 8/F, Vanta Industrial Centre, No.21-33, Tai
Lin Pai Road, Kwai Chung, NT, Hong Kong
TEL:86(852)2992-2088 FAX:86(852)2670-2488

Wuhan Office
Room 1701, Wuhan Wanda Center, No. 96,
Linjiang Road, Wuchang District, Wuhan
Hubei 430060, CHINA
TEL:86(27)8544-8631 FAX:86(27)8544-6227
Chengdu Office1-701, New Angle Plaza, 668# Jindong Road,
Jinjiang District, Chengdu, Sichuan 610066,CHINA
TEL:86(28)8671-8936 FAX:86(28)8671-9086

Mitutoyo Leeport Metrology (Dongguan) Limited / M3 Solution Center Dongguan
No.26, Guan Chang Road, Chong Tou Zone,
Chang An Town, Dong Guan, 523855 CHINA
TEL:86(769)8541 7715 FAX:86(769)-8541 7745

App-4

M3 Solution Center-Massachusetts
753 Forest Street, Suite 110, Marlborough,MA 01752, U.S.A.
TEL:1-(888)648-8869 FAX:1-(508)485-0782

Mitutoyo Leeport Metrology (Dongguan)
Limited – Fuzhou office
Room 2104, City Commercial Centre, No.129 Wu Yi
Road N., Fuzhou City, Fujian Province, CHINATEL 86 591 8761 8095 FAX 86 591 8761 8096
Mitutoyo Leeport Metrology (Dongguan)
Limited –Changsha office
Room 2207, Shiner International Plaza, No. 88, Kaiyuan Middle Road, Changsha City, Hunan, China
TEL 86 731 8401 9276 FAX 86 731 8401 9376
Mitutoyo Measuring Instruments (Suzhou) Co., Ltd.
No. 46 Baiyu Road, Suzhou 215021, CHINA
TEL:86(512)6252-2660 FAX:86(512)6252-2580
Mitutoyo America Corporation
965 Corporate Boulevard, Aurora, IL 60502, U.S.A.
TEL:1-(630)820-9666 Toll Free No. 1-(888)648-8869
FAX:1-(630)978-3501

CanadaMitutoyo Canada Inc.
2121 Meadowvale Blvd., Mississauga,
Ont. L5N 5N1., CANADA
TEL:1-(905)821-1261 FAX:1-(905)821-4968

M3 Solution Center-Illinois
965 Corporate Boulevard, Aurora, IL 60502, U.S.A.
TEL:1-(888)648-8869 FAX:1-(630)978-3501

Montreal Office7075 Place Robert-Joncas Suite 129, Montreal,
Quebec H4M 2Z2, CANADA
TEL:1-(514)337-5994 FAX:1-(514)337-4498

M3 Solution Center-Ohio
6220 Hi-Tek Court, Mason, OH 45040, U.S.A.
TEL:1-(888)648-8869 FAX:1-(513)754-0718

BrazilM3 Solution Center-Michigan
46850 Magellan Drive, Suite 100, Novi, MI 48377, U.S.A.
TEL:1-(888)648-8869 FAX: 1-(248)926-0928
M3 Solution Center-California
16925 E. Gale Avenue, City of Industry, CA 91745, U.S.A.
TEL:1-(888)648-8869 FAX:1-(626)369-3352

M3 Solution Center-Alabama
2100 Riverchase Center, Suite 106, Hoover,
AL 35244, U.S.A
TEL:1-(888)648-8869 FAX:1-(205)988-3423
M3 Solution Center-Washington
1000 SW 34th Street Suite G, Renton,
WA 98057 U.S.A.
TEL:1-(888)648-8869

Micro Encoder, Inc.
11533 NE 118th Street, Kirkland,
WA 98034-7111, U.S.A.
TEL:1-(425)821-3906 FAX:1-(425)821-3228
Micro Encoder Los Angeles, Inc.
16925 E. Gale Avenue, City of Industry,
CA 91745-1806 U.S.A.
TEL: 1-626-961-9661 FAX:1-626-333-8019

U.S.A.

M3 Solution Center-North Carolina
11515 Vanstory Drive, Suite 140, Huntersville,
NC 28078, U.S.A.
TEL:1-(888)648-8869 FAX:1-(704)875-9273

Mitutoyo America Corporation Calibration Lab
965 Corporate Boulevard, Aurora, IL 60502, U.S.A.
TEL:1-(888)648-8869 FAX:1-(630)978-6477

Mitutoyo Sul Americana Ltda.
Head office / M3 Solution Center / Factory
Rodovia Índio Tibiriça 1555, Bairro Raffo,
CEP 08655-000 Suzano – SP, Brasil
TEL:55 (11)5643-0040
Argentina
Mitutoyo Sul Americana Ltda.
Argentina Branch / M3 Solution Center
Av. B. Mitre 891/899 – C.P. (B1603CQI)
Vicente López –Pcia. Buenos Aires – Argentina
TEL:54(11)4730-1433 FAX:54(11)4730-1411
Sucursal Cordoba / M3 Solution Center
Av. Amadeo Sabattini, 1296, esq. Madrid Bº
Crisol Sur – CP 5000, Cordoba, ARGENTINATEL/FAX:54 (351) 456-6251

M3 Solution Center-Texas4560 Kendrick Plaza Drive, Suite 120, Houston,
TX 77032, U.S.A.
TEL:1-(888)648-8869 FAX:1-(281)227-0937

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MexicoMitutoyo Mexicana, S.A. de C.V.
Prolongación Industria Eléctrica No. 15 Parque
Industrial Naucalpan
Naucalpan de Juárez, Estado de México C.P.
53370, MÉXICOTEL: 52 (01-55) 5312-5612
Monterrey Office / M3 Solution Center Monterrey
Blv. Interamericana No. 103, Parque Industrial
FINSA, C.P. 66636 Apodaca, N.L., MÉXICOTEL: 52(01-81) 8398-8227/8228/8242/8244
FAX: 52(01-81) 8398-8226
Tijuana Office / M3 Solution Center Tijuana
Calle José María Velazco 10501-C, Col. Cd. Industrial
Nueva Tijuana, C.P. 22500 Tijuana, B.C., MÉXICOTEL: 52 (01-664) 647-5024
Querétaro Office / M3 Solution Center Querétaro
Av. Cerro Blanco No.500-1, Colonia Centro Sur,
Querétaro, Querétaro, C.P. 76090, MÉXICOTEL: 52 (01-442) 340-8018, 340-8019 and 340-8020
FAX: 52 (01-442) 340-8017
Mitutoyo Mexicana, S.A. de C.V. Querétaro
Calibration Laboratory
Av. Cerro Blanco 500 30 Centro Sur,
Querétaro, Querétaro, C.P. 76090, MÉXICOTEL: 52 (01-442) 340-8018, 340-8019 and 340-8020
FAX: 52 (01-442) 340-8017
Aguascalientes Office / M3 Solution Center
Av. Aguascalientes No. 622, Local 15 Centro Comercial El Cilindro Fracc. Pulgas Pandas Norte, C.P.
20138, Aguascalientes, Ags. MÉXICOTEL: 52 (01-449) 174-4140 and 174-4143
Irapuato Office / M3 Solution Center
Boulevard a Villas de Irapuato No. 1460 L.1 Col. Ejido
Irapuato C.P. 36643
Irapuato, Gto., MÉXICOTEL: 52 (01-462) 144-1200 and 144-1400

App-6

Revision Record
Date of publication
March 1, 2019

Revision status
Third edition

Details of revision
Completely revised and issued

No. 99MBE048B

Mitutoyo Corporation
20-1, Sakado 1-Chome, Takatsu-ku, Kawasaki-shi, Kanagawa 213-8533, Japan
Tel: +81 (0)44 813-8230 Fax: +81 (0)44 813-8231
Home page: http://www.mitutoyo.co.jp/global.html
For the EU Directive, Authorized representative and importer in the EU:
Mitutoyo Europe GmbH
Borsigstrasse 8-10, 41469 Neuss, Germany
Printed in Japan
No. 99MBE048B