EMG-413 / EGPS-413&236
ELECTRON GUN / POWER SUPPLY

1 keV to 30 keVMedium Energy, Small Spot Electron Beams
FOR USE IN:SURFACE PHYSICSVACUUM PHYSICS EXPERIMENTS

FEATURES / OPTIONS:NEW MODULAR DESIGN
3+272(0,66,21237,21INTERNAL ALIGNMENT WHILE OPERATING
ELECTROSTATIC FOCUSINGQUADRUPOLE ALIGNMENTOCTOPOLE DEFLECTION / RASTER / STIGMATOR
BEAM BLANKING, IN-LINE FARADAY CUPINTERNAL MAGNETIC SHIELDING',))(5(17,$/ PUMPINGSMALLSPOTDOWNTO5 μm
BEAM CURRENT1 nATO10 μAUHV COMPATIBLE / BAKEABLECOMPUTER / REMOTE CONTROLUSER-REPLACEABLE FIRING UNITSThe Kimball Physics EMG-413 Electron Gun, with its matching
EGPS-413 Power Supply and &236 &ROXPQ 2SWLFV XQLWis amedium power Electron Gun for surface physics applicationsand general vacuum physics research. It is a complete subsystem
ready toattach and turn on.
Both beam current and beam energy are independently adjustable
over wide ranges; the energy from 1 keV to 30 keV, and current from1nAto 10μA. The beam divergence is also directly controllable.
The gun uses a lanthanum hexaboride (LaB6) cathode to provide asmall spot, down to 5μm. Aconstant emission FDQEHmaintained byD control grid which is varied E\ Hlectronic feedback. The LaB6
cathode FDQKDYH a lifetime in the thousands of hours. The beam
FDQEHrastered for imaging of the target.
The gun’s adjustable optics include two focusing lenses as well as
three quadrupole alignment and two octopole deflection elements. Thegun also features an adjustable feedthrough assembly that allows
mechanical alignment of the firing unit while the gun is being operated.
The gun has a blanker element which diverts the electron beam into an
in-line Faraday cup. This system is used to measure the beam current
in the column. The blanker provides a means of cutting off the beam
while the gun is running and could also be used for pulsing.

A typical lab set-up of a complete Kimball Physics system with power
supplies, electron gun, and optional computer control system
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

EMG-413 Electron Gun, 4½ CFmounting flange,

UHV technology is used throughout. The gun may be completely
disassembled for cleaning and repair. The cathode firing unit assembly(including the cathode, cathode-mount, and Wehnelt aperture) is user
replaceable. The cathode is not damaged by repeated exposure toatmospheric gases or water vapor when cold. The gun can be run invacuums from 10-11 torr to 10-7 torr and is bakable to 350ºC with allcables removed.
The EGPS-413&236 Electron Gun Power Supplysystemfeaturesamodular design with miniaturized power supply clusters,
optically isolated signals, and the FlexPanel digital LQWHUIDFH
The EGPS-413 DQG&236&ROXPQ2SWLFVXQLWVFRQWUROOHU
contains all power supplies necessary to generate the required
voltages to run an EMG-413 Electron Gun.
The power supplies included in the EGPS-413 DQG &236XQLWV are Beam Energy,Condenser Lens 1, Objective Lens 2, andBlanker, as well as the supplies that float at the negative highvoltage, Source and Grid Aperture Alignment Quadrupole X & Y,Lens Alignment Quadrupole 1 X & Y, LensAlignment Quadrupole
2 X & Y, Deflection Octopole 1 X & Y, Deflection Octopole 2 X & Y.
For rastering, the octopole deflection is varied bycomputer-generated
cyclical signals.
The FlexPanel provides a digital display screen and a keypad for
programming control on the front panel. Rear panel connectors allow
remote /computer control and metering of all gun power supplies. An
RS-232 or RS-422/485 serial port and an analog input/output
connector are included on standard power supply units. All common
computer interface bus types can be FRQVLGHUHG, by use ofappropriate digital to analog converters.
An optional LabVIEWTM computer program designed for theEMG-413 is available for remote computer control and metering.
Software is available in two types: Using National Instrument DAQ
boards and SCSI connectors on the EGPS-413, or via a simple serial
connector interface. The program provides a virtual panel of controls
and real-time metering on the user’s computer screen.

28

EGPS-413 / &236-413 POWER SUPPLYSPECIFICATIONS

EMG-413 ELECTRON GUN SPECIFICATIONSOUTPUT

BEAM ENERGYBEAM CURRENTENERGY SPREAD
SPOT SIZE
WORKING DISTANCE
BEAM DEFLECTION /ALIGNMENT

1 keV to 30 keV (Independently adjustable)
1 nAto 10 μA(Independently adjustable)Approx.
0.4 eV cathode thermal spread, calculated
5 μm to 500 μm
30 mm to 200 mm
Two octopole deflection elements:± 1PPPD[GHIOHFWLRQ at 30 PPZRUNLQJGLVWDQFH
DWNH9 VFDOHVODUJHUDWORZHUHQHUJLHV RASTER

Deflection raster size: ± 1PPE\PPDUHD at 30PPZRUNLQJGLVWDQFH, raster frequencyXS to 10NHz

PULSE CAPABILITY(using appropriate
pulse generator,not included)
BEAM BLANKING
BEAM UNIFORMITYFIRING UNITCATHODE TYPEFARADAY CUPSHIELDING
INTERNAL GUN
ALIGNMENTMOUNTING
DIFFERENTIAL
PUMPING
INSERTION LENGTHGUN DIMENSIONSFEEDTHROUGHSCABLES /CONNECTORSMAXIMUM BAKEOUT

ENERGY SUPPLYSTABILITYBEAM STABILITY

Optional Dual Grid Power Supply: pulse width 2μs toDC, rise/ fall 500 ns, rep rates to 5 kHz (TTLrequired)
Optional: Pulse width  μsec to DC at rep rate to kHz
&DSDFDWLYHSXOVLQJSXOVHZLGWKWRQVGaussian
Customer-replaceable Firing Unit includes
precision-aligned cathode and Wehnelt (G-1) assembly&XVWRPLanthanum hexaboride (LaB6) ES-423
μm flatCathodes not harmed by repeated exposuretoatmospheric gases while cold
Faraday cup detector in-line, used with blankHU
Full internal mu-metal magnetic shielding
Adjustable Feedthrough for mechanical alignment offiring unit while gun is operating
4½ inch CF flange, optional conversion adaptor formounting to larger flangesòinch port for pump and ôIRUionization guage
Optional pump: Varial Turbo-V 0with controller
Optional qauge: Granville-Phillips 35 Micro-Ion Module mmVWDQGDUG; varies with mounting adaptor
Gun length:  mm outside vacuum, sealing surfacetoend of cable connector
Gun diameter:  mm at pumping ports,
 mm DFURVVTXDGFRQQHFWRUVMulti-pin brazed ceramic, threaded stainless steel shell
Multi-conductor 30 kV high voltage fully ground-shieldedcable,  kV lens cables, and low voltage deflection
cables, coaxial blanker cable, with mating aluminum
connectors, to connect gun and power supply.
Standard lengths: 3 m, Optional: 5 m

All necessary voltages to drive the EMG-413 ElectronGun<0.01% per hour with 0.05% rms ripple at full output±0.1% per hour with Emission Current Control or±10% per hour after warm up without ECC
FlexPanel controls: Energy, Source, Grid,CONTROLSEmission Current Control, Lens1 (condenser), Lens2(objective), Blanker, Aperture Align Quad X&Y,Lens Align Quad1 X&Y, Lens Align Quad2 X&Y,
Deflection Octopole1 X&Y, Deflection Octopole2
X&Y. Raster Frequency, RasterSize, Raster Duty
Cycle, Stigmator V1, Stigmator V2
FlexPanel digital meters: Energy, Source Voltage,
METERING
Source Current, Emission Current, Grid, Lens 1(condenser), Lens2 (objective), Aperture Align Quad
X&Y, Lens Align Quad 1 X&Y, Lens Align
Quad 2 X&Y.Faraday Cup Current, Beam StopCurrent%ODQNHU
Optional Ionization GaugePHWHUCOMPUTER/REMOTE Power supplies: 0to +10 V
CONTROL& METER (-10 V to +10 V, quadrupoles and octopoles)
Metering: 0to +2 V
( -2 V to +2 V, quadrupoles and octopoles)
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-422 or RS-485 available, if
specified at time of order)
2FWRSROHVSLQ6&6,SURJUDPPLQJ
SOFTWARE

National Instruments LabVIEWTM file, designedto run
with 56FRQQHFWLRQVDQGcomputer DAQ board NI6713.

INPUT

115 VAC or 230 VAC, 50 to 60 Hz single phase, 250 VA
Temperature: 0 to 40ºC,
ENVIRONMENT
Relative humidity: 0 to 75% RHnon condensing,Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
DIMENSIONS
Two units, total approx: 17 in. x 1 in. x 22 in.
(width x height x depth) excluding handles (4 mm x  mm x 5 mm);
19 in. rack mountable

350°C with cables removed

EMG-413 ELECTRON GUN(Dimensions in mm)

Typical performance;'atafor guidance only.
Copyright© 201 by Kimball Physics, Inc. 0/2/1 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.