Separate TypeLinear Scale
ST46-EZA

User's Manual- Instructions for use Read this document thoroughly before operating
the product. After reading, retain it close at hand for
future reference.

No. 99MBE078B1
Date of publication: March 1, 2019 (1)*99MBE078B1*

Correspondence of product names and model numbers
Product name
Separate Type Linear Scale

Model number
ST46-EZA

Notice regarding this document
yy Mitutoyo Corporation assumes no responsibilities for any damage to the product, caused by its use
not conforming to the procedure described in this document.
yy Upon loan or transfer of this product, be sure to attach this document to the product.
yy In the event of loss or damage to this document, immediately contact a Mitutoyo sales office or
your dealer.
yy Before operation of the product, thoroughly read this document to comprehend its contents.
yy Particularly, for full understanding of information, carefully read "Safety Precautions" and "Precautions for Use" at the outset of this document before using the product.
yy The contents in this document are based on the information current as of March 2019.
yy No part or whole of this document may be transmitted or reproduced by any means without priorwritten permission of Mitutoyo Corporation.
yy The corporation, organization and product names that appear in this document are their trademarks or registered trademarks.
©2019 Mitutoyo Corporation. All rights reserved.

No. 99MBE078B

CONVENTIONS USED IN MANUALSConventions used in Mitutoyo's User's Manual are roughly divided into three types (safety reminders,prohibited and mandatory actions, and referential information and locations). Moreover, these conventions include general warnings and specific warnings. Specific warning symbols are provided with concrete pictograms inside of them.

Safety reminder conventions and wording warning against potential hazards

DANGER

Indicates an immediately hazardous situation which, if not avoided, will result
in serious injury or death.

WARNING

Indicates a potentially hazardous situation which, if not avoided, could result
in serious injury or death.

CAUTION

Indicates a potentially hazardous situation which, if not avoided, may result inminor injury.

NOTICE

Indicates a potentially hazardous situation which, if not avoided, may result inproperty damage.
Alerts the user to a specific hazardous situation that means "Caution, risk ofelectric shock".

Conventions and wording indicating prohibited and mandatory actions
Indicates concrete information about prohibited actions.

Indicates concrete information about mandatory actions.

Indicates that grounding needs to be implemented.

Conventions and wording indicating referential information or referential
locations
Tips

Indicates referential information such as that for when the operating methods and procedures which
are printed in these sentences are to be applied to specific conditions.
Indicates referential locations if there is information that should be referred to in this document or an
extraneous User's Manual.
E.g.: For details about XX, see"1.2 Name and Functions of Each Part" (page 2)i

No. 99MBE078B

Safety Precautions
Observe the following descriptions to make full use of the performance of this product:

NOTICE• Read this User's Manual thoroughly before operating this product.
• Before connecting this product to the machine main unit, make sure that the power for the control unit isturned off.
• To maintain the shielding effect, firmly tighten the screws on the connectors of each connecting cable.
• To prevent defective contacts, do not touch the connecting terminals of the connectors with bare hands.

Precautions for UseGeneral safety precautions
zzThis product is a measuring instrument.
Do not use this product for any other purpose than measuring.

zzThis is an industrial product.
Do not use this product for any other purpose than industrial use.

zzThis product is a precision instrument.
Handle this product with extra care. Do not apply any strong impact or excessive force to the parts
during use.

Required environment for installation
zzVibration
To mount this product onto the machine main unit, select a location where there is as little vibration as
possible.
If the scale unit is used for an extended period of time on a machine where there is a substantial amountof vibration, the built-in precision parts may be damaged, thereby adversely influencing the performanceof the unit.

zzShock, dust, water protection
To protect the scale main unit from being directly exposed to machining oil and chips, or from being
bumped by a workpiece, etc., prepare a cover that protects the entire scale main unit.

zzAmbient temperature and humidity
This product should be operated in an environment where the temperature is 0 °C–40 °C and where
the relative humidity is 20 %RH–80 %RH. Do not use this product in a place where sudden changes intemperature or humidity are observed.

ii

No. 99MBE078B

Electromagnetic Compatibility (EMC)
This product complies with the EU EMC Directive. Note that in environments where electromagnetic
interference exceeds EMC requirements defined in this directive, appropriate countermeasures are
required to assure product performance.
EMC Directive EN61326-1
		Immunity test requirement: Clause6.2 Table 2

		Emission limit: Class B
For the EU Directive
Authorized representative and importer in the EU:
Mitutoyo Europe GmbH
Borsigstrasse 8-10,41469 Neuss,Germany

Export Control ComplianceThis product falls into the Catch-All-Controlled Goods and/or Catch-All-Controlled Technologies (including Programs) under Category 16 of Appended Table 1 of Export Trade Control Order or under Category 16 of Appended Table of Foreign Exchange Control Order, based on Foreign Exchange and Foreign
Trade Act of Japan.
If you intend re-export of the product from a country other than Japan, re-sale of the product in a country other than Japan, or re-providing of the technology (including Programs), you shall observe theregulations of your country.
Also, if an option is added or modified to add a function to this product, this product may fall under the
category of List-Control Goods, List-Control Technology (including Programs) under Category 1 - 15
of Appended Table 1 of Export Trade Control Order or under Category 1 - 15 of Appended Table ofForeign Exchange Control Order, based on Foreign Exchange and Foreign Trade Act of Japan. In thatcase, if you intend re-export of the product from a country other than Japan, re-sale of the product in acountry other than Japan, or re-providing of the technology (including Programs), you shall observe theregulations of your country. Please contact Mitutoyo in advance.

Notes on Export to EU Member Countries
When you intend exporting of this product to any of the EU member countries, it may be required toprovide User's Manual(s) in English and EU Declaration of Conformity in English (under certain circumstances, User's Manual(s) in the destination country's official language and EU Declaration of Conformity in the destination country's official language). For detailed information, please contact Mitutoyo in
advance.

Disposal of Products outside the European Union andOther European Countries
Please follow the official instruction in each community and country.

iii

No. 99MBE078B

Disposal of Old Electrical & Electronic Equipment (Applicable in the European Union and Other European Countries with Separate Collection Systems)
This symbol on the product or on its packaging is based on WEEE Directive (Directive on
Waste Electrical and Electronic Equipment), which is a regulation in EU member countries, andthis symbol indicates that this product shall not be treated as household waste.
To reduce the environmental impact and minimize the volume of landfills, please cooperate inreuse and recycle.
For how to dispose of the product, please contact your dealer or the nearest Mitutoyo sales
office.

China RoHS Compliance Information
This product meets China RoHS requirements. See the table below.
产品中有害物质的名称及含量部件名称本体电气设备部分
配件

铅
(Pb)
○
×
○

汞
(Hg)
○
○
○

有害物质
镉
六价铬
(Cd)
(Cr(VI))
○
○
○
○
○
○

多溴联苯
(PBB)
○
○
○

多溴二苯醚
(PBDE)○○○

本表格依据 SJ/T 11364 的规定编制。
○：表示该有害物质在该部件所有均质材料中的含量均在 GB/T 26572 规定的限量要求以下。
×：表示该有害物质至少在该部件的某一均质材料中的含量超出 GB/T 26572 规定的限量要求。

环保使用期限标识，是根据电器电子产品有害物质限制使用管理办法以及，电子电气产品有害物质限制
使用标识要求(SJ/T11364-2014)，制定的适用于中国境内销售电子电气产品的标识。
电子电气产品只要按照安全及使用说明内容，正常使用情况下，从生产月期算起，在此期限内，产品中含
有的有毒有害物质不致发生外泄或突变，不致对环境造成严重污染或对其人身、财产造成严重损害。
产品正常使用后，要废弃在环保使用年限内或者刚到年限的产品时，请根据国家标准采取适当的方法进
行处置。
另外，此期限不同于质量/ 功能的保证期限。

iv

No. 99MBE078B

Warranty
In the event that this product should prove defective in workmanship or material, within one year fromthe date of original purchase for use, it will be repaired or replaced, at Mitutoyo's option, free of charge
upon its prepaid return to Mitutoyo, without prejudice to the provisions of the Mitutoyo Software End
User License Agreement.
If this product fails or is damaged for any of the following reasons, it will be subject to a repair charge,
even if it is still under warranty.
yy Failure or damage owing to fair wear and tearyy Failure or damage owing to inappropriate handling, maintenance or repair, or to unauthorized modification
yy Failure or damage owing to transport, dropping, or relocation of the product after purchaseyy Failure or damage owing to fire, salt, gas, abnormal voltage, lightning surge, or natural disasteryy Failure or damage owing to use in combination with hardware or software other than those designated or permitted by Mitutoyo
yy Failure or damage owing to use in ultra-hazardous activities
This warranty is effective only where the product is properly installed and operated in conformance with
the instructions in this document within the original country of the installation.
EXCEPT AS SPECIFIED IN THIS WARRANTY, ALL EXPRESS OR IMPLIED CONDITIONS, REPRESENTATIONS, AND WARRANTIES OF ANY NATURE WHATSOEVER INCLUDING, WITHOUT
LIMITATION, ANY IMPLIED WARRANTY OF MERCHANTABILITY, FITNESS FOR A PARTICULARPURPOSE, NONINFRINGEMENT OR WARRANTY ARISING FROM A COURSE OF DEALING, USAGE, OR TRADE PRACTICE, ARE HEREBY EXCLUDED TO THE MAXIMUM EXTENT ALLOWED BYAPPLICABLE LAW.
You assume all responsibility for all results arising out of its selection of this product to achieve its intended results.

Disclaimer
IN NO EVENT WILL MITUTOYO, ITS AFFILIATED AND RELATED COMPANIES AND SUPPLIERSBE LIABLE FOR ANY LOST REVENUE, PROFIT, OR DATA, OR FOR SPECIAL, DIRECT, INDIRECT,CONSEQUENTIAL, INCIDENTAL, OR PUNITIVE DAMAGES HOWEVER CAUSED AND REGARDLESS OF THE THEORY OF LIABILITY ARISING OUT OF THE USE OF OR INABILITY TO USE THISPRODUCT EVEN IF MITUTOYO OR ITS AFFILIATED AND RELATED COMPANIES AND/OR SUPPLIERS HAVE BEEN ADVISED OF THE POSSIBILITY OF SUCH DAMAGES.
If, notwithstanding the foregoing, Mitutoyo is found to be liable to you for any damage or loss whicharises out of or is in any way connected with use of this product by you, in no event shall Mitutoyo's and/or its affiliated and related companies' and suppliers' liability to you, whether in contract, tort (including
negligence), or otherwise, exceed the price paid by you for the product only.
The foregoing limitations shall apply even if the above-stated warranty fails of its essential purpose.
BECAUSE SOME COUNTRIES, STATES OR JURISDICTIONS DO NOT ALLOW THE EXCLUSION
OR THE LIMITATION OF LIABILITY FOR CONSEQUENTIAL OR INCIDENTAL DAMAGES, IN SUCH
COUNTRIES, STATES OR JURISDICTIONS, MITUTOYO'S LIABILITY SHALL BE LIMITED TO THE
EXTENT PERMITTED BY LAW.

v

No. 99MBE078B

About This Document

Positioning of this document in document map
In addition to this document, a manual for the software is available.

zzFor linear scale
ST46-EZA
Separate Type Linear Scale
User's Manual (This Document)

zzFor software
ST46-EZA
Separate Type Linear Scale
Application Program
User's Manual

Intended readers and purpose of this documentzzIntended readersThis document is intended for beginners of ST46-EZA Separate Type Linear Scale.
Readers are assumed to be able to understand individual instructions by reading dimensional schematics.

zzPurpose
This document is aimed at understanding a basic knowledge of ST46-EZA Separate Type Linear Scale.

vi

No. 99MBE078B

Contents
CONVENTIONS USED IN MANUALS………………………………………………………… i
Safety Precautions……………………………………………………………………………… ii
Precautions for Use……………………………………………………………………………… ii
Electromagnetic Compatibility (EMC)……………………………………………………… iii
Export Control Compliance…………………………………………………………………… iii
Notes on Export to EU Member Countries………………………………………………… iii
Disposal of Products outside the European Union and Other European Countries……………………………………………………………………………………………………… iii
Disposal of Old Electrical & Electronic Equipment (Applicable in the European
Union and Other European Countries with Separate Collection Systems)…………… iv
China RoHS Compliance Information………………………………………………………… iv
Warranty…………………………………………………………………………………………… v
Disclaimer………………………………………………………………………………………… v
About This Document…………………………………………………………………………… vi
Contents……………………………………………………………………………………………vii
1

Overview……………………………………………………………………………………… 1
1.1

Features………………………………………………………………………………… 1

1.2

System Configuration and Name of Each Part…………………………………… 1
1.2.1

1.3
2

The Flow of Main Tasks……………………………………………………………… 4

Setup for Mounting………………………………………………………………………… 5
2.1

Checking the Equipment Model……………………………………………………… 5

2.2

Designing the Scale Mounting Surface……………………………………………… 8

2.3
3

Name of Each Part of Connector Shell……………………………………………………… 3

2.2.1

Mounting of the Scale with the Effective Length of 10 mm–80 mm (without AluminumBase)…………………………………………………………………………………………… 8

2.2.2

Mounting of the Scale with the Effective Length of 10 mm–80 mm (with Aluminum Base)………………………………………………………………………………………………… 9

2.2.3

Mounting of the Scale with the Effective Length of 100 mm–3000 mm………………… 10

Designing the Detector Bracket……………………………………………………… 11

Mounting onto the Machine Main Unit…………………………………………………13
3.1

Checking the Package Contents…………………………………………………… 13vii

No. 99MBE078B

4

3.2

Mounting the Scale……………………………………………………………………14

3.3

Mounting the Detector Bracket and Detector……………………………………… 17

3.4

Connecting the Feedback Cable……………………………………………………19

3.5

Adjusting the Detector Signals………………………………………………………20

3.6

Handling the Cables and Checking the Mounting State……………………………23
Handling the Cables……………………………………………………………………………23

3.6.2

Checking the Mounting and Adjustment States……………………………………………23

3.6.3

Putting the Protection Cover…………………………………………………………………24

Specifications………………………………………………………………………………25
4.1

List of Specifications…………………………………………………………………25

4.2

Output Circuits and Signal Waveforms………………………………………………26

4.3

5

3.6.1

4.2.1

Main Signal Type: Type B, Type C……………………………………………………………26

4.2.2

Main Signal Type: Type C……………………………………………………………………27

Pin Assignment…………………………………………………………………………28
4.3.1

Main Signal Type: Type B……………………………………………………………………28

4.3.2

Main Signal Type: Type C……………………………………………………………………28

4.4

Production of Feedback Cable………………………………………………………29

4.5

Alarm Function…………………………………………………………………………31
4.5.1

Detection Details……………………………………………………………………………… 31

4.5.2

Resetting the Alarm……………………………………………………………………………32

4.6

Changing the Direction………………………………………………………………33

4.7

External View and Dimensional Drawings…………………………………………34
4.7.1

Effective Length of 10 mm–80 mm (without Aluminum Base)……………………………34

4.7.2

Effective Length of 10 mm–80 mm (with Aluminum Base)………………………………36

4.7.3

Effective Length of 100 mm–3000 mm………………………………………………………38

Troubleshooting……………………………………………………………………………41

SERVICE NETWORK……………………………………………………………………… App-1

viii

No. 99MBE078B

1 Overview

1

Overview

1.1

FeaturesThis chapter describes the features of this product, the names and functions of the parts, and the flowof the main tasks to use this product.

The optical separate type linear scale detects changes in the amount of light using light emitting elements and light receiving elements based on the glass scale grids and outputs the amount of changes.
This can precisely measure moving amounts of various instruments including an aligner, wire bonding,and stage for semiconductor manufacturing.
This product is equipped with the Automatic Signal Adjustment function (EZA function), which is triggered by pushing the button. During the mounting of the Detector, you can check the signal strength
by the setup indicator mounted on the connector shell, which eliminates adjustment using an oscilloscope. By connecting this product to the PC, you can check the signal strength and set the parameters on the dedicated application program. The I/F circuit built inside the connector shell also allows aspace-saving design.

1.2

System Configuration and Name of Each Part

The system configuration and the name of each part are shown below.
Output connector (accessory)

Control unit

ST46-EZA (main scale and detection unit)

Feedback cable and control unit
(prepared by user)

1

No. 99MBE078B

1 Overview

①
③

④

②
⑦

⑥

⑧

⑤
⑩

⑨
No.

①
②
③
④
⑤
⑥
⑦
⑧
⑨
⑩

Name
Main scale (effective length: 100 mm–3000 mm)
Scale retaining spring
Main scale (effective length: 10 mm–80 mm (without aluminum base))
Main scale (effective length: 10 mm–80 mm (with aluminum base))
Detection unit
Detector
Detector cable
Connector shell
Output connector
Gap spacer2

No. 99MBE078B

1 Overview

1.2.1

Name of Each Part of Connector Shell

③
①
④

②

⑤

⑥

No.

Name

①
②
③
④
⑤
⑥

CAL light
Direction switch/USB connector (PC connection)
Setup button A (switch through hole: ø 1.5)
PZ light
Setup indicator
Setup button B (switch through hole: ø 1.5)

Tips
• You can check the following states by the CAL light.
State
Normal operation or power-off
Mounting position adjustment mode/error
occurrence
Auto-tuning mode
Auto-tuning in progress

Light color
None
Red
Red
Red

Solid/flashing
Off
Flashing (2-second
intervals)
Flashing (0.5-second
intervals)
On• The PZ light turns on in green when the origin is detected.

3

No. 99MBE078B

1 Overview

1.3

The Flow of Main Tasks

The following chart shows the flow of preliminary preparation and mounting onto the machine main
unit as tasks to use this product.

Preliminary preparation
Checking the Equipment Model

Designing the Scale
Mounting Surface

Designing the Detector Bracket"2.1 Checking the Equipment Model" (page 5)8)"2.2 Designing the Scale Mounting Surface" (page"2.3 Designing the Detector Bracket" (page 11)

Mounting onto the machine main unit
Checking the Package Contents

Mounting the Scale"3.1 Checking the Package Contents" (page 13)"3.2 Mounting the Scale" (page 14)

Mounting the Detector Bracket
and Detector"3.3 Mounting the Detector Bracket and Detector"(page 17)

Connecting the Feedback Cable"3.4 Connecting the Feedback Cable" (page 19)

Adjusting the Detector Signals"3.5 Adjusting the Detector Signals" (page 20)

Handling the Cables and Checking
the Mounting State"3.6 Handling the Cables and Checking theMounting State" (page 23)

4

No. 99MBE078B

2 Setup for Mounting

2

Setup for Mounting

2.1

Checking the Equipment Model

This chapter describes the preliminary preparation for mounting this product onto the machine mainunit.

The ST46-EZA model number is determined based on the main signal output type, effective length,
origin point/scale shape, resolution/minimum edge interval, direction, alarm output type, Detector
cable length, and special code.
Make sure that your scale unit model satisfies desired specifications.

ST46-EZA --Main signal output typeSpecial code

Effective length

Detector cable length

Origin point/scale shape

Alarm output type
Direction

Resolution/
Minimum edge interval

Main signal output type
SymbolB
C

Description
Two-phase square wave + external reset input
Two-phase square wave + two-phase sine wave

Effective length
Symbol
0010
0025
0050
0075
0080
0100
0150
0200
0250
0300
0350
0400
0450

Effective length (mm)
10
25
50
75
80
100
150
200
250
300
350
400
450

Symbol
0500
0600
0700
0800
0900
1000
1100
1200
1300
1400
1500
1600
1700

5

Effective length (mm)
500
600
700
800
900
1000
1100
1200
1300
1400
1500
1600
1700

No. 99MBE078B

2 Setup for Mounting
Symbol
1800
2000
2200
2400

Effective length (mm)
1800
2000
2200
2400

Symbol
2500
2600
2800
3000

Effective length (mm)
2500
2600
2800
3000

Origin point/scale shape
SymbolA
B
CZ

Scale shape (effective length)

Origin point (effective
length)Glass scale: Thickness 4.8 mm x width 22 mm (100 mm–3000 50-mm pitch
mm)
Glass scale: Thickness 2.8 mm x width 8 mm (10 mm–80 mm) Center point
Glass scale with aluminum base: Thickness 5.1 mm x width 23 Center point
mm (10 mm–80 mm)
Special shape
Special point specification

Resolution/minimum edge interval
SymbolResolution
A
0.05 μm
BCD
E
0.1 μmFG
H
J
0.5 μm
K
L
M
N
1 μm
P
Q
R
S
5 μm
T
U
V

Minimum edge interval
100 ns200 ns
400 ns
800 ns
100 ns200 ns
400 ns
800 ns
100 ns200 ns
400 ns
800 ns
100 ns200 ns
400 ns
800 ns
100 ns200 ns
400 ns
800 ns6

Maximum response speed
450 mm/s
225 mm/s
112 mm/s
56 mm/s
900 mm/s
450 mm/s
225 mm/s
112 mm/s
2600 mm/s
2250 mm/s
1125 mm/s
562 mm/s
2600 mm/s
2600 mm/s
2250 mm/s
1125 mm/s
2600 mm/s
2600 mm/s
2600 mm/s
2600 mm/s

No. 99MBE078B

2 Setup for MountingDirection
Symbol1
2

Description
Positive: PA-phase advance
Reverse: PB-phase advanceAlarm output type
SymbolS
H

Description
Alarm signal
High impedanceDetector cable length
SymbolA
B
CZ

Length1 m (standard)
0.5 m
2m
Special length specification (maximum length: 2.5 m)

Special code
SymbolNone
Z

Description
Standard selection specification
Special specification

7

No. 99MBE078B

2 Setup for Mounting

2.2

Designing the Scale Mounting Surface
If ambient light enters the main scale from the back side, it causes a malfunction. Design the main
scale mounting area to prevent ambient light as shown in the figure below.
Ambient light

Main scale
Detector

2.2.1

Mounting of the Scale with the Effective Length of 10 mm–80
mm (without Aluminum Base)

Mount the main scale with the effective length of 10 mm–80 mm (without aluminum base) by fixing itwith adhesives.
Design the main scale mounting area as shown in the figure below according toLength of 10 mm–80 mm (without Aluminum Base)" (page 34).

"4.7.1 Effective

Scale mounting reference surface
Adhesive application area

Main scale
G: Machine guide8

No. 99MBE078B

2 Setup for Mounting

Tips
When you may need to remount the main scale with the effective length of 10 mm–80 mm (without aluminumbase) for maintenance, attach the main scale to a scale bracket as shown in the figure below and fix it withbolts.

2.2.2

Mounting of the Scale with the Effective Length of 10 mm–80
mm (with Aluminum Base)

Mount the main scale with the effective length of 10 mm–80 mm (with aluminum base) by fixing it withbolts.
Design the main scale mounting area as shown in the figure below according toLength of 10 mm–80 mm (with Aluminum Base)" (page 36).

"4.7.2 Effective

G: Machine guide9

No. 99MBE078B

2 Setup for Mounting

2.2.3

Mounting of the Scale with the Effective Length of 100 mm–
3000 mmMount the main scale with the effective length of 100 mm–3000 mm by fixing it with scale retaining
spring.
Secure a working space for tightening the bolts for scale retaining spring A and scale retaining spring
B according to"4.7.3 Effective Length of 100 mm–3000 mm" (page 38).

Scale retaining spring B

Scale retaining spring B

Scale retaining spring A

10

No. 99MBE078B

2 Setup for Mounting

2.3

Designing the Detector Bracket• Design the Detector bracket according to the figure below. Its shape must allow adjustment of the
Detector position (moire/gap). It is recommended that the Detector fixing screw holes should belong holes to make it easier to adjust the Detector position.
Detector bracket 2(ref(bolt length=bracket thickness t+3 mm)
(r

t

n
efere

ere

nc e

lue)
c e vava lue)

Gap direction
Moire direction
f
(re

e

ce
ren

va l

ue)

Detector bracket 1(reference value)

Parallelism of the scale mounting surface against the Detector mounting surface(bolt length=bracket thickness t+3 mm)• Design it so that the parallelism of the Detector mounting surface against the scale mounting surface is within 0.05 mm.
• The change in the gap direction within the maximum travel range of the machine unit must be 0.01
mm or less per 200 mm.

11

No. 99MBE078B

2 Setup for Mounting

MEMO

12

No. 99MBE078B

3 Mounting onto the Machine Main Unit

3

Mounting onto the Machine Main
Unit

This chapter describes the procedures, methods, and precautions required when mounting this product onto the machine main unit.

3.1

Checking the Package Contents

Before mounting, make sure that the product package contains the following items.
If your scale does not satisfy the specified specifications or you have any questions or concerns about
the product, please contact your dealer or the nearest Mitutoyo sales office/service center.
Name

Quantity

Main scale

1

Detection unit
Scale retaining spring1

Output connector
Gap spacer
Serial number sticker

1
1
1

User's Manual
Inspection certificate
Warranty card

1
1
1

Note
Check the specifications and effective length of
the scale.
This accessory comes with the scale with theeffective length of 100 mm–3000 mm. For details
on the quantity, refer to"4.7.3 Effective Lengthof 100 mm–3000 mm" (page 38).

This accessory comes with the scale with theeffective length of 10 mm–80 mm.
This document

13

No. 99MBE078B

3 Mounting onto the Machine Main Unit

• To mount the Detector, prepare the following parts.
Part name
Hex socket head cap screw (M2.5 x(bracket thickness + 3 mm) or less)Quantity
2• To mount the scale with the effective length of 10 mm–80 mm (with aluminum base), prepare thefollowing parts.
Part name
Hex socket head cap screw (M3 x (bottom 2hole depth +3.8 mm) or less)
Plain washer (nominal diameter 3)
2Spring washer (nominal diameter 3)
2

Quantity• To mount the scale with the effective length of 100 mm–3000 mm, prepare the following parts.
Part name
Hex socket head cap screw (M4 x bottom
hole size or less)
Plain washer (nominal diameter 4)
Spring washer (nominal diameter 4)

3.2

Quantity
Number of scale retaining spring x 2
Number of scale retaining spring x 2
Number of scale retaining spring x 2

Mounting the Scale

NOTICEThe main scale is made of glass. Be very careful that the scale is not damaged or scratched.

• If dirt and dust are attached to the main scale, it causes a malfunction or deteriorates the accuracy.
Wipe off the dirt and dust with a soft cloth soaked in alcohol or cleaning paper. Similarly, clean thescale mounting surface of the machine unit thoroughly with alcohol.
• Use elastic adhesives to attach the main scale with the effective length of 10 mm–80 mm (without
aluminum base). Shin-Etsu Silicones' KE441T is recommended.

Tips• Conduct temperature leveling thoroughly for both the main scale and mounting parts before fixing them. The
accuracy of this product is guaranteed at 20 °C. The recommended temperature leveling is about 8 hours or
longer at 20 °C for both the main scale and parts for mounting the scale. Perform mounting after temperatureleveling.
• If the temperature environment is insufficient, including temperature leveling, the predetermined indication
accuracy may not be achieved.

14

No. 99MBE078B

3 Mounting onto the Machine Main Unit

1 Use a lever-type dial indicator or electric micrometer to make sure that the scale mounting surface isprepared as shown below.
• Check the parallelism of the main scale mounting surface against the axis of motion of the machine unit.
• If the parallelism is insufficient, adjust the machine unit again.

2 Peel the scale protection tape.
Main scale

Peel the scale protection tape.

15

No. 99MBE078B

3 Mounting onto the Machine Main Unit

3 Mount the main scale.
• Mount the main scale so that the Detector is placed on the grid surface (surface where rainbow
colors appear when light is applied diagonally).
• For a scale with the Mitutoyo logo attached, the correct mounting direction is where the logo canbe appropriately viewed from the Detector side.

Main scale
Direction where the Mitutoyo
logo can be seen
Detector• Put the serial number sticker near the location where the scale is mounted on the machine for themain scale with the effective length of 10 mm–80 mm.

Mounting using the scale retaining spring
1 Temporarily fix the center of the main scale with the scale retaining spring A.

Scale retaining spring B

Scale retaining spring B

Scale retaining spring A

2 Temporarily fix the main scale with the scale retaining spring B.
This must be performed in the order closer to the center of the main scale.

3 Conduct temperature leveling for 1 to 2 hours.
4 Fully tighten the bolts for scale retaining spring in the order from the center to both ends of the main
scale.
The recommended tightening torque for scale retaining spring bolts is 1.5 N•m.

16

No. 99MBE078B

3 Mounting onto the Machine Main Unit

3.3

Mounting the Detector Bracket and Detector

NOTICEDo not directly touch the connector shell pins during mounting. Otherwise, electronic parts may be damaged bystatic electricity. Be sure to take measures to prevent static electricity for mounting.
To use the scale with the Detector mounted, the machine main unit, as well as the attachment bracket, must be electrically grounded. Failure to do so may cause the scale unit and the Detector to beaffected by external noise. When it is difficult to ground due to the characteristics of the bracket material, make sure that the shielded part of the Detector cable is grounded using a ground bar.
Ground bar etc.
Shielded wire (mesh wire)
Partially cut the vinyl coating of
the cable.

Detector cable
Example: Drawing of using a ground bar

1 Peel the protection tape (blue) off the detecting surface of the Detector.

Protection tape
Back of the Detector

17

No. 99MBE078B

3 Mounting onto the Machine Main Unit

2 Attach the Detector to the Detector bracket.
• Use a gap spacer as shown in the figure below to adjust the distance (gap) between the Detector
and main scale to 1.8±0.1 mm.

Pitch direction
Gap spacer

M2.5

Gap direction

Lateraldirection

Roll direction
Detector notch• The lateral direction of the Detector must be a position where the Detector notches (left and right)
match the grids (translucent).

3 Check the parallelism of the Detector against the main scale with a lever-type dial indicator or electric
micrometer.
The parallelism of the Detector against the main scale must be within 0.05 mm.

4 Fix the Detector.
• The recommended tightening torque for Detector fixing screws is 0.4 N•m–0.6 N•m.
• After fixing the Detector, use a gap spacer to make sure that the distance (gap) between the Detector and main scale is 1.8±0.1 mm.

18

No. 99MBE078B

3 Mounting onto the Machine Main Unit

3.4

Connecting the Feedback Cable• Be sure to turn off the control unit before connecting the scale unit to the control unit with a feedback cable.
• A feedback cable must be prepared by the user. Find a cable that supports your model accordingto"4.4 Production of Feedback Cable" (page 29).

1 Connect the connector shell of the detection unit to the control unit with the feedback cable.
2 Turn on the control unit.
»» The connector shell light turns on or flashes.
Ignore the connector shell light state and be sure to perform signal adjustment described in
Adjusting the Detector Signals" (page 20).

"3.5

Tips
When the Detector mounting state is correct, if you turn on the control unit, the setup indicator center LED(blue) turns on.

Setup indicator

19

No. 99MBE078B

3 Mounting onto the Machine Main Unit

3.5

Adjusting the Detector Signals

After mounting the main scale and Detector and connecting the feedback cable, adjust the signals
using the connector shell.

1 Press the setup button A or B on the connector shell with a thin stick of ø 1.0–ø 1.4 (hex wrench key
nominal 1.3 (for hex socket head cap screw M2.5)).
»» The CAL light flashes in red (at intervals of 2 seconds) and enters the mode to adjust the Detector mounting
position.
(1) Setup button A
Switch through hole diameter: ø 1.5(1) Setup button B
Switch through hole diameter: ø 1.5

2 Adjust the moire direction of the Detector so that the signal strength judgment results in "OK" on the
setup indicator.

Gap direction(Fix with a gap of 1.8±0.1 mm.)

Detector moire direction

20

No. 99MBE078B

3 Mounting onto the Machine Main Unit
Light indication

State 1

State 3

State 4

State 5

State 6

State 8

State 9NG

Left: Red
Right: Yellow

Yellow

Left: Yellow
Right: Blue

Blue

NG

NG

NG

OK

Left: Blue
Right: Yellow

Yellow

Left: Yellow
Right: Red

Red

NG

NG

NG

Higher signal

State 7Red

Signalstrengthjudgment

Lower signal

State 2

Color

NG

Tips
When the setup indicator does not light up in blue, adjust the gap direction of the Detector.

3 Press the setup button A or B again.
»» The CAL light changes from flashing red to solid red and enters the auto-tuning mode.

4 Move the Detector or main scale at a speed of 5 mm/s–50 mm/s by 15 mm or more in the measurement direction.
»» The CAL light turns off, and auto-tuning is finished.

21

No. 99MBE078B

3 Mounting onto the Machine Main Unit

• Move the Detector or main scale in one specific direction. If it is moved in the reverse direction
during auto-tuning, a CAL error occurs.
• In case of a CAL error, adjust the signals again from scratch. You do not need to turn off the power
for signal adjustment.

5 Make sure that the signal strength judgment is "OK" on the setup indicator throughout the effective
length.
Tips
If the scale travel distance is short, a CAL error may occur. If you need to use on a unit with the scale travel
distance of 15 mm or less, contact the nearest Mitutoyo sales office.

22

No. 99MBE078B

3 Mounting onto the Machine Main Unit

3.6
3.6.1

Handling the Cables and Checking the Mounting
State
Handling the Cables

After adjusting the signals, fix the feedback cable.

1 Perform wiring paying attention to the twisting or bends of the cables.

NOTICE
Note that the feedback cable may malfunction if bundled with other cables that may cause electrical noise, or if
it is located near a switching relay dealing with a large current.

2 Fix the feedback cable with cable clamps.
Clamp the feedback cable to a nearby part that moves along with the Detector so that force is notapplied to the Detector when the machine unit is running.

Be sure to fix the connector shell to the machine main unit with screws.

3.6.2

Checking the Mounting and Adjustment States

After fixing the feedback cable, check the mounting and adjustment states of the main scale and Detector again.

Tips
Perform this operation while making sure that the Detector does not make contact or interfere with any part ofthe machine unit or main scale.

1 Make sure that all the part screws and clamps are firmly tightened.
2 Turn off the control unit and turn it on again after 5 to 10 seconds.
Tips
Turning off the control unit resets the alarm that occurred during adjustment.

3 Make sure that the setup indicator on the connector shell lights up in blue throughout the travel rangeof the machine unit.

23

No. 99MBE078B

3 Mounting onto the Machine Main Unit

Tips
If the setup indicator lights up in red or yellow, check the main scale for any dirt or the moire/gap directions
again.

3.6.3

Putting the Protection CoverAfter checking the mounting and adjustment states of the main scale and Detector again, put theprotection cover.
• Make sure that the protection cover does not make contact with any machine unit part or scale unit
cable.
• Check the above for the entire travel range of the machine unit.

24

No. 99MBE078B

4 Specifications

4

Specifications

4.1

List of Specifications

Item
Detection method
Main scale grid pitch
Output signal type

Effective length
Indication accuracy (20 °C)

Specification
Optical reflection type linear encode
20 μm
Type B: Two-phase square wave, origin signal pulse, external reset
input
Type C: Two-phase square wave, origin signal pulse, two-phasesine wave
10 mm–3000 mm
Effective length of 10 mm–300 mm: ±1 μm
Effective length of 350 mm–500 mm: ±2 μm
Effective length of 600 mm–1000 mm: ±3 μm

Coefficient of linear expansion
Maximum response speed
Scale origin
Power supply voltage
Maximum current consumption
Operating temperature range
Storage temperature range
Operating/storage humidity
range
Alarm Display function

Effective length of 1100 mm–3000 mm: ±3 μm/m
≈8×10 –6/K
2.6 m/s (at sine wave amplitude of -3 dB)
Available (50 mm pitch, center point for effective length of 10 mm–
80 mm)
DC 5 V±5 %250 mA
0 °C–40 °C-20 °C–60 °C
20 %RH–80 %RH (non condensation)
A scale unit alarm is indicated with a LED on the connector shell25

No. 99MBE078B

4 Specifications

4.2

Output Circuits and Signal Waveforms

4.2.1

Main Signal Type: Type B, Type COutput circuit
The output circuit of the square wave output signals (PA-phase, PB-phase), origin signal, and alarm
signal is as shown in the figure below.

Differential line driver
Equivalent to AM26C31

Signal waveform
The waveforms of the square wave output signals (PA-phase, PB-phase) and origin signal are asshown in the figure below.

VOH = 2.5 V (minimum)
VOL = 0.5 V (maximum)
td: Edge interval, resolution

Z-phase pulse width
0.8±0.4 mm

Tips
The above figure shows waveforms when the Detector moves as follows with the direction switch on the connector shell set to "positive". The phase relationship (counting direction) between output PA and PB changes
according to the direction switch state.
Detector move direction

Scale track

Origin mark26

No. 99MBE078B

4 Specifications

4.2.2

Main Signal Type: Type COutput circuit
The output circuits of the sine wave output signals (A-phase, B-phase) and reference signal are asshown in the figure below.
A-phase/B-phase (sine wave) output circuit

A-phase, B-phase

Reference signal (Vref) output circuit

Signal waveform
The waveforms of the sine wave output signals (A-phase, B-phase) are as shown in the figure below.
A-phase

VDC
Output signal pitch: 20 μm

B-phasePhase difference 90° (Typ)VDC
Vpp = 2v VDC = V ref. (VCC / 2 ≓ 2.5 V)

27

No. 99MBE078B

4 Specifications

4.3

Pin Assignment

4.3.1

Main Signal Type: Type B
1

8

9

15

Pin No.
Signal name
1, 2
0V (GND)
3, 4+5 V (Vcc)
5678

Pin No.
Signal name9
ALM (alarm)10
PA (main signal pulse_positive
phase)
Reset input AL (anode) 11
PA (main signal pulse_reverse
phase)
Reset input AL (cathode) 12
PB (main signal pulse_positive
phase)N.C.
13
PB (main signal pulse_reverse
phase)PZ (origin signal pulse_ 14
PZ (origin signal pulse_reverse
positive phase)
phase)
15
F.G

Tips
The applicable connector (accessory) is HDAB-15S.

4.3.2

Main Signal Type: Type C
1

8

9

15

Pin No.
Signal name1, 2
0 V (GND)
3, 4+5 V (Vcc)
5

A-phase (sine wave)

6

B-phase (sine wave)

7

Vref (≒Vcc/2)

8

PZ (origin signal pulse_
positive phase)

Pin No.
Signal name9
ALM (alarm)10
PA (main signal pulse_positive
phase)
11
PA (main signal pulse_reverse
phase)
12
PB (main signal pulse_positive
phase)
13
PB (main signal pulse_reverse
phase)14
PZ (origin signal pulse_reverse
phase)
15
F.G

Tips
The applicable connector (accessory) is HDAB-15S.

28

No. 99MBE078B

4 Specifications

4.4

Production of Feedback Cable
The following conditions must be met for the feedback cable:• Use a mesh shielded cable.
• Clamp the shield (FG) to the metal case of the supplied connector. If it is difficult to clamp, connect
it to pin No. 15.
• Set the cable impedance and length so that the power voltage is 4.75 V or more on the connector
shell.
Vsp - (Rc ÷ 2) x L x 2 x 0.25 ≧ 4.75 V
Vsp: Power voltage supplied from the control unit (Volts)
Rc: Cable power, ground wire impedance (Ω/m)
L: Cable length (m)0.25: Maximum current consumption of the scale unit (A)To use the sine wave output signals, connect the output signal cable as shown in the figure below.
Detection unit
connector shell

Feedback cable

A-phase5

B-phase

6

Vref

7

Control unit

29

No. 99MBE078B

4 Specifications
To use the square wave output signals, connect the output signal cable as shown in the figure below.
Detection unit
connector shell
PAPA

A-phasePB
PB

B-phasePZ
PZ

Z-phaseControl unit
Feedback cable
R1
R2
11
R1

R1

R1

R1

12
R2
13
+5V

8
R2
14
4.7 kΩ

ALM

+5V

10

1.8 kΩ

9Line driver
AM26C31: TI

4.7 kΩ
+5V+5V

R1
R1=560 Ω
R2=110 Ω

Line receiver
AM26C32: TI(or equivalent)

3
4
1
2
15

Shield• When the control unit has the Disconnection Detection function for A-phase/B-phase (PA, PA,
PB, PB), you do not need to connect the ALM output. In this case, use a scale unit with the alarm
output type of H (high impedance) specification.
• If the control unit has no Disconnection Detection function or putting the A-phase/B-phase output
in high impedance causes a problem for the system, connect the ALM output. In this case, use ascale unit with the alarm output type of S (alarm signal) specification.

30

No. 99MBE078B

4 Specifications

4.5

Alarm Function

4.5.1

Detection Details

When an alarm is detected, the CAL light on the connector shell turns on and off at intervals of 2 seconds. While the CAL light is lit, the setup indicator display light represents the error details as follows.

Tips
When multiple errors occur, all the corresponding lights on the setup indicator turn on.

Display

Error name

Cause

Over range error*1

The waveform of the input sine wave signal is
too large or too small.

Over speed error

The travel speed exceeds the maximum response speed.

Internal processing error

Hardware error(part failure, communication error)

Calibration error

Error during signal adjustment- LED deterioration- Sensor overcurrent

LED current error- Insufficient adjustment of the Detector mounting position*1 While the CAL light is not lit, the alarm details about over range are not shown.

31

No. 99MBE078B

4 Specifications

Tips• If the scale is within the error range when the waveform of the input sine wave signal is too large or too
small, an over range error occurs.
• If the scale is within the caution range when the waveform of the input sine wave signal is too large or too
small, no alarm occurs, but the accuracy of division is reduced.
Light indication when the scale iswithin the caution range
Caution
range

4.5.2

Color
Yellow

Resetting the Alarm

Turning on the power again
1 Eliminate the cause of the alarm.
2 Turn off the control unit and turn it on again after 10 seconds or more.

Alarm reset signal
1 Eliminate the cause of the alarm.
2 Input the alarm reset signal (pulse width of 10 ms or more).

32

No. 99MBE078B

4 Specifications• The alarm can be reset by the alarm reset signal only when the main signal output type is B (twophase square wave + external reset input).
• Connect the alarm reset input circuit so that the current is 3 mA–10 mA.
• Since the product is equipped with a resistor (1.2 kΩ) inside, applying 5 V–12 V between the reset
input AL (anode) and reset input AL (cathode) resets the alarm.
For the photocoupler+V

TLP521

1.2 kΩ

Reset input AL(anode)Reset input AL(cathode)

For the relay
+V

5
6

–V

Reset input

Input signal pin No. 5
5 V–12 V
10 ms or more

• To apply 12 V or more, add a resistor externally.

4.6

Changing the Direction

1 Turn off the control unit.
2 Remove the rubber cap.
3 Change the position of the slide switch on the connector shell.
Connector shell

Switch state
Positive
ReverseDirection
Sine wave andphase
Sine wave andanti-phase

Slide switch

USB port

33

No. 99MBE078B

Scale full length

Effective length

Depth 3Depth 334
Effective length Scale full length

Machine guide

Recommended drawing of scale
mounting area (scale = 2/1)

Adhesive
application area
Use the silicon-type
KE411.

4 Specifications

4.7
External View and Dimensional Drawings

4.7.1
Effective Length of 10 mm–80 mm (without Aluminum Base)Dimensional drawings

No. 99MBE078B

4 Specifications

Dimensional drawings table
Code No.
579-665-12
579-666-12
579-667-12
579-668-12
579-669-12
579-665-22
579-666-22
579-667-22
579-668-22
579-669-22

Model number
ST46EZAB-10B
ST46EZAB-25B
ST46EZAB-50B
ST46EZAB-75B
ST46EZAB-80B
ST46EZAC-10B
ST46EZAC-25B
ST46EZAC-50B
ST46EZAC-75B
ST46EZAC-80B

Effective length L1 (mm)
10
25
50
75
80
10
25
50
75
80

35

Scale full length L2 (mm)
30
45
70
90
100
30
45
70
90
100

No. 99MBE078B

4 Specifications

4.7.2

Effective Length of 10 mm–80 mm (with Aluminum Base)

36

Effective length Scale full length

Scale full length

Effective length
Depth 3Depth 3

Machine guide

Scale drawing

Dimensional drawings

No. 99MBE078B

4 Specifications

Dimensional drawings table
Code No.
579-665-13
579-666-13
579-667-13
579-668-13
579-669-13
579-665-23
579-666-23
579-667-23
579-668-23
579-669-23

Model number
ST46EZAB-10C
ST46EZAB-25C
ST46EZAB-50C
ST46EZAB-75C
ST46EZAB-80C
ST46EZAC-10C
ST46EZAC-25C
ST46EZAC-50C
ST46EZAC-75C
ST46EZAC-80C

Effective
length L1
(mm)
10
25
50
75
80
10
25
50
75
80

37

Scale fulllength L2
(mm)
30
45
70
90
100
30
45
70
90
100

L3 (mm)
15
25
40
60
70
15
25
40
60
70

L4 (mm)
7.5
10
15
15
15
7.5
10
15
15
15

No. 99MBE078B

Mounting pitch

Depth 3

Effective length

Mounting pitch

Scale retaining spring A

38
Scale retaining spring B

Machine guide

4.7.3

Scale full length

Depth 34 Specifications

Effective Length of 100 mm–3000 mm

Dimensional drawings

No. 99MBE078B

4 Specifications

Dimensional drawings table
Code No.

Model number

(*1)

(*2)

579-670-□1
579-671-□1
579-672-□1
579-673-□1
579-674-□1
579-675-□1
579-676-□1
579-677-□1
579-678-□1
579-679-□1
579-680-□1
579-681-□1
579-682-□1
579-683-□1
579-684-□1
579-685-□1
579-686-□1
579-687-□1
579-688-□1
579-689-□1
579-690-□1
579-691-□1
579-692-□1
579-693-□1
579-694-□1
579-695-□1
579-696-□1
579-697-□1
579-698-□1

ST46EZA◇-100A
ST46EZA◇-150A
ST46EZA◇-200A
ST46EZA◇-250A
ST46EZA◇-300A
ST46EZA◇-350A
ST46EZA◇-400A
ST46EZA◇-450A
ST46EZA◇-500A
ST46EZA◇-600A
ST46EZA◇-700A
ST46EZA◇-800A
ST46EZA◇-900A
ST46EZA◇-1000A
ST46EZA◇-1100A
ST46EZA◇-1200A
ST46EZA◇-1300A
ST46EZA◇-1400A
ST46EZA◇-1500A
ST46EZA◇-1600A
ST46EZA◇-1700A
ST46EZA◇-1800A
ST46EZA◇-2000A
ST46EZA◇-2200A
ST46EZA◇-2400A
ST46EZA◇-2500A
ST46EZA◇-2600A
ST46EZA◇-2800A
ST46EZA◇-3000A

Effective
length L1(mm)

Scale full Scale fixed
length L2
pitch L3
(mm)
(mm)

100
150
200
250
300
350
400
450
500
600
700
800
900
1000
1100
1200
1300
1400
1500
1600
1700
1800
2000
2200
2400
2500
2600
2800
3000

140
190
240
290
340
390
440
490
540
640
740
840
940
1040
1140
1240
1340
1440
1540
1640
1740
1840
2040
2240
2440
2540
2640
2840
3040

50
75
100
60
75
85
100
75
80
100
85
100
90
100
90
100
130
100
125
100
120
100
100
100
100
95
100
100
100

Scale
retaining
spring A(quantity)
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1

Scale
retaining
spring B(quantity)
2
2
2
4
4
4
4
6
6
6
8
8
10
10
12
12
10
14
12
16
14
18
20
22
24
26
26
28
30

*1: The □ mark in Code No. represents as follows:
1: Two-phase square wave + external reset input
2: Two-phase sine wave + two-phase square wave
*2: The ◇ mark in Model number represents as follows:
B: Two-phase square wave + external reset input
C: Two-phase sine wave + two-phase square wave

39

No. 99MBE078B

4 Specifications

MEMO

40

No. 99MBE078B

5 Troubleshooting

5

TroubleshootingThis chapter describes how to check for the reasons why problems occur when initially powering on,
or for when alarms are generated during operation.
A problem occurs.
A

The problem
is solved.

NO

YES

End

A disconnection
alarm is unseen on
the control unit.

NO

Check the control unit settingsand connector shell settings(minimum resolution, minimumedge interval, direction, etc.).

YES

The CAL light on theconnector shell flashes at
2-second intervals.

The feedback cable
is wired correctly (including theshielded wire).

NO

NO

Correct the feedback
cable wiring.

YES

A

YES

The shielded wire of
the feedback cable is grounded
to a ground bar.

NO

YES

The Detector cable iscorrectly conducted.
YES

A

YES

The mounting position
relationship between the Detector
and main scale is correct.

Correct the grounding.

NONO

Replace the Detector cable(contact the nearest Mitutoyo
service center/sales office).

A

Mount them again.

A

Contact the nearest
Mitutoyo service
center/sales office.

41

No. 99MBE078B

5 Troubleshooting

MEMO

42

No. 99MBE078B

SERVICE NETWORK*As of January 2019
M3 Solution Center Coventry
Unit6, Banner Park, Wickmans Drive, Coventry,
Warwickshire CV4 9XA, UNITED KINGDOMTEL: 44 (0)2476 426300 FAX: 44 (0)2476 426339

EuropeMitutoyo Europe GmbH
Borsigstrasse 8-10, 41469 Neuss, GERMANY
TEL: 49 (0)2137 102-0 FAX: 49 (0)2137 102-351
Mitutoyo CTL Germany GmbH
Von-Gunzert-Strasse 17, 78727 Oberndorf, GERMANY
TEL: 49 (0)7423 8776-0 FAX: 49 (0)7423 8776-99
KOMEG Industrielle Messtechnik GmbH
Zum Wasserwerk 3, 66333 Völklingen, GERMANY
TEL: 49 (0)6898 91110 FAX: 49 (0)6898 9111100
Germany
Mitutoyo Deutschland GmbH
Borsigstrasse 8-10, 41469 Neuss, GERMANY
TEL: 49 (0)2137 102-0 FAX: 49 (0)2137 86 85

M3 Solution Center Berlin
Carl-Scheele-Straße 16, 12489 Berlin, GERMANY
TEL:49(0)30 2611 267
M3 Solution Center Eisenach
Heinrich-Ehrhardt-Platz 1, 99817 Eisenach,GERMANY
TEL: 49 (0)3691 88909-0 FAX: 49 (0)3691 88909-9
M3 Solution Center Ingolstadt
Marie-Curie-Strasse 1a, 85055 Ingolstadt, GERMANY
TEL: 49 (0)841 954920 FAX: 49 (0)841 9549250
M3 Solution Center Leonberg
Steinbeisstrasse 2, 71229 Leonberg, GERMANY
TEL: 49 (0)7152 6080-0 FAX: 49 (0)7152 608060
Mitutoyo-Messgeräte Leonberg GmbH
Heidenheimer Strasse 14, 71229 Leonberg, GERMANY
TEL: 49 (0)7152 9237-0 FAX: 49 (0)7152 9237-29
Mitutoyo (UK) Ltd.
Joule Road, West Point Business Park,
Andover, Hampshire SP10 3UX, UNITED KINGDOMTEL: 44 (0)1264 353 123 FAX: 44 (0)1264 354883

M3 Solution Center East Kilbride
The Baird Building, Rankine Avenue, Scottish
Enterprise Technology Park, East Killbride G75
0QF, UNITED KINGDOMTEL: 44 (0)1355 581170 FAX: 44 (0)1355 581171
FranceM3 Solution Center Hamburg
Tempowerkring 9·im HIT-Technologiepark 21079
Hamburg, GERMANY
TEL: 49 (0)40 791894-0 FAX: 49 (0)40 791894-50

U.K.

M3 Solution Center Halifax
Lowfields Business Park, Navigation Close, Elland,West Yorkshire HX5 9HB, UNITED KINGDOMTEL: 44 (0)1422 375566 FAX: 44 (0)1422 328025

Mitutoyo France
Paris Nord 2-123 rue de la Belle Etoile, BP 59267
ROISSY EN FRANCE 95957 ROISSY CDG
CEDEX, FRANCETEL: 33 (0)149 38 35 00
M3 Solution Center LYON
Parc Mail 523, cours du 3éme millénaire, 69791
Saint-Priest, FRANCETEL: 33 (0)149 38 35 70
M3 Solution Center STRASBOURG
Parc de la porte Sud, Rue du pont du péage,67118 Geispolsheim, FRANCETEL: 33 (0)149 38 35 80
M3 Solution Center CLUSES
Espace Scionzier 480 Avenue des Lacs, 74950
Scionzier, FRANCETEL: 33 (0)1 49 38 35 90
M3 Solution Center TOULOUSE
Aeroparc Saint Martin Cellule B08 ZAC de SaintMartin du Touch 12 rue de Caulet 31300
Toulouse, FRANCETEL: 33 (0)1 49 38 42 90
M3 Solution Center RENNESZAC Mivoie
Le Vallon
35230 Noyal-Châtillon sur Seiche, FRANCETEL: 33 (0)1 49 38 42 10

App-1

Czech Republic

Italy
MITUTOYO ITALIANA S.r.l.
Corso Europa, 7 - 20020 Lainate (Ml), ITALYTEL: 39 02 935781 FAX: 39 02 9373290•93578255

Mitutoyo Česko s.r.o.
Dubská 1626, 415 01 Teplice, CZECH REPUBLICTEL: 420 417-514-011 FAX: 420 417-579-867

M3 Solution Center BOLOGNA
Via dei Carpini1/A - 40011 Anzola Emilia (BO), ITALYTEL: 39 02 93578215 FAX: 39 02 93578255

Mitutoyo Česko s.r.o. M3 Solution Center  Ivančice
Ke Karlovu 62/10, 664 91 Ivančice, CZECH REPUBLICTEL: 420 417-514-011 FAX: 420 417-579-867

M3 Solution Center CHIETI
Contrada Santa Calcagna - 66020 Rocca S.
Giovanni (CH), ITALYTEL: 39 02 93578280 FAX: 39 02 93578255

Mitutoyo Česko s.r.o. M3 Solution Center
Ostrava Mošnov
Mošnov 314, 742 51 Mošnov, CZECH REPUBLICTEL: 420 417-514-050 FAX:420 417-579-867

M3 Solution Center PADOVA
Via G. Galilei 21/F - 35035 Mestrino (PD), ITALYTEL: 39 02 93578268 FAX: 39 02 93578255

Mitutoyo Česko s.r.o. Slovakia Branch
Hviezdoslavova 124, 017 01 Povážská
Bystrica, SLOVAKIATEL: 421 948-595-590

Belgium / Netherlands
Mitutoyo BeNeLux
Mitutoyo Belgium N.V.
Hogenakkerhoekstraat 8, 9150 Kruibeke, BELGIUM
TEL: 32 (0)3-2540444 FAX: 32(0)3-2540445

Hungary

Mitutoyo Nederland B.V.
Wiltonstraat 25, 3905 KW Veenendaal,
THE NETHERLANDS
TEL: 31(0)318-534911

Romania

Mitutoyo Hungária Kft.
Záhony utca 7, D-épület / fsz, 1031 Budapest, HUNGARY
TEL: 36 (0)1 2141447 FAX: 36 (0)1 2141448
Mitutoyo Romania SRL
1A Drumul Garii Odai Street, showroom, Ground
Floor, 075100 OTOPENI-ILFOV, ROMANIA
TEL: 40 (0)311012088 FAX: +40 (0)311012089

SwedenMitutoyo Scandinavia AB
Släntvägen 6, 194 61 Upplands Väsby, SWEDEN
TEL: 46 (0)8 594 109 50 FAX: 46 (0)8 590 924 10
M3 Solution Center Alingsås
Ängsvaktaregatan 3A, 441 38 Alingsås, SWEDEN
TEL: 46 (0)8 594 109 50 FAX:46 (0)322 63 31 62
M3 Solution Center Värnamo
Storgatsbacken 1, 331 30 Värnamo, SWEDEN
TEL: 46 (0)8 594 109 50 FAX: 46 (0)370 463 34
Switzerland
Mitutoyo (Schweiz) AG
Steinackerstrasse 35, 8902 Urdorf, SWITZERLAND
TEL: 41 (0)447361150 FAX: 41(0)447361151
Mitutoyo (Suisse) SA
Rue Galilée 4, 1400 Yverdon-les Bains, SWITZERLAND
TEL: 41 (0)244259422 FAX: 41 (0)447361151
PolandMitutoyo Polska Sp.z o.o.
Ul.Graniczna 8A, 54-610 Wroclaw, POLAND
TEL: 48 (0)71354 83 50 FAX: 48 (0)71354 83 55

Showroom in Brasov
Strada Ionescu Crum Nr.1, Brasov Business
Park Turnul 1, Mezanin, 500446
Brasov-Judetul Brasov, ROMANIA
TEL/FAX: 40 (0)371020017
Russian Federation
Mitutoyo RUS LLC
13 Sharikopodshipnikovskaya, bld.2,
115088 Moscow, RUSSIAN FEDERATIONTEL: 7 495 7450 752
Finland
Mitutoyo Scandinavia AB Finnish Branch
Viherkiitäjä 2A, 33960, Pirkkala, FINLAND
TEL: 358 (0)40 355 8498
Austria
Mitutoyo Austria GmbH
Johann Roithner Straße 131 A-4050 Traun, AUSTRIATEL: 43 (0)7229 23850 FAX: 43 (0)7229 23850-90
Götzis Regional Showroom
Lasten Straße 48A 6840, AUSTRIA

App-2

Singapore

Ho Chi Minh City Branch Office / M3 Solution Center
123 Dien Bien Phu Street,Ward 15,Binh Thanh
District, Ho Chi Minh City, VIETNAM
TEL:(84)28-3840-3489 FAX:(84)28-3840-3498

Mitutoyo Asia Pacific Pte. Ltd.
Head office / M3 Solution Center
24 Kallang Avenue, Mitutoyo Building,
SINGAPORE 339415
TEL:(65)62942211 FAX:(65)62996666

Mitutoyo Philippines, Inc.
Head Office / M3 Solution Center
Unit 2103, Bldg 2 GMV Building 2, 107 North Main Avenue,
Laguna Technopark, Binan, Laguna 4024, Philippines
TEL:(63)49 544 0272 FAX:(63)49 544 0272

Malaysia
Mitutoyo (Malaysia) Sdn. Bhd.
Kuala Lumpur Head Office / M3 Solution Center
Mah Sing Integrated Industrial Park, 4, Jalan Utarid U5/14,
Section U5, 40150 Shah Alam, Selangor, MALAYSIA
TEL:(60)3-78459318 FAX:(60)3-78459346

India
Mitutoyo South Asia Pvt. Ltd.
Head Office / M3 Solution Center
C-122, Okhla Industrial Area, Phase-l,
New Delhi-110 020, INDIA
TEL:91(11)2637-2090 FAX:91(11)2637-2636

Penang Branch office / M3 Solution Center
No.30, Persiaran Mahsuri 1/2, Sunway Tunas,
11900 Bayan Lepas, Penang, MALAYSIA
TEL:(60)4-6411998 FAX:(60)4-6412998

MSA Gurgaon technical center
Plot No. 65, Phase-IV, Udyog Vihar, Gurgaon – 122016
TEL : 91 (0124) – 2340294

Johor Branch office / M3 Solution CenterNo. 70, Jalan Molek 1/28, Taman Molek, 81100
Johor Bahru, Johor, MALAYSIA
TEL:(60)7-3521626 FAX:(60)7-3521628
Mitutoyo(Thailand)Co., Ltd.
Bangkok Head Office / M3 Solution Center
76/3-5, Chaengwattana Road, Kwaeng Anusaowaree,
Khet Bangkaen, Bangkok 10220, THAILAND
TEL:(66)2-080-3500 FAX:(66)2-521-6136

Mumbai Region Head office
303, Sentinel Hiranandani Business Park Powai,
Mumbai-400 076, INDIA
TEL:91(22)2570-0684, 837, 839 FAX:91(22)2570-0685
Pune Office / M3 Solution Center
G2/G3, Pride Kumar Senate, F.P. No. 402 Off.
Senapati Bapat Road, Pune-411 016, INDIA
TEL:91(20)6603-3643, 45, 46 FAX:91(20)6603-3644

Chonburi Branch / M3 Solution Center
7/1, Moo 3, Tambon Bowin, Amphur Sriracha,
Chonburi 20230, THAILAND
TEL:(66)2-080-3563 FAX:(66)3-834-5788

Bengaluru Region Head office / M3 Solution Center
No. 5, 100 Ft. Road, 17th Main, Koramangala,
4th Block, Bengaluru-560 034, INDIA
TEL:91(80)2563-0946, 47, 48 FAX:91(80)2563-0949

Amata Nakorn Branch / M3 Solution Center
700/199, Moo 1, Tambon Bankao, Amphur Phanthong, Chonburi 20160, THAILAND
TEL:(66)2-080-3565 FAX:(66)3-846-8978

Chennai Office / M3 Solution Center
No. 624, Anna Salai Teynampet, Chennai-600 018, INDIA
TEL:91(44)2432-8823, 24, 27, 28
FAX:91(44)2432-8825

ThailandIndonesia
PT. Mitutoyo Indonesia
Head Office / M3 Solution Center
Jalan Sriwijaya No.26 Desa cibatu Kec. Cikarang
Selatan Kab. Bekasi 17530, INDONESIATEL: (62)21-2962 8600 FAX: (62)21-2962 8604
Vietnam
Mitutoyo Vietnam Co., Ltd
Hanoi Head Office / M3 Solution Center
No. 07-TT4, My Dinh - Me Tri Urban Zone, My Dinh 1
Ward, Nam Tu Liem District, Hanoi, VIETNAM
TEL:(84)24-3768-8963 FAX:(84)24-3768-8960

Kolkata Office
Unit No. 1208,Om Tower, 32,J.L..Nehru Road,
Kolkata-700 071, INDIA
Tel: 91 33-22267088/40060635 Fax: (91) 33-22266817
Ahmedabad Office/M3 Solution Center (Ahmedabad)
A-104 & A-105, First Floor, Solitaire Corporate
Park, Near Divya Bhaskar Press, S.G. Road,
Ahmedabad - 380 015, INDIA
TEL: (91) 079 - 29704902/903
Coimbatore Office (Coimbatore)
Regus, Srivari Srimath, 3rd Floor, Door No:1045,
Avinashi Road, Coimbatore - 641 018,INDIA
TEL: (91) 9345005663

App-3

TaiwanMitutoyo Taiwan Co., Ltd. / M3 Solution Center Taipei
4F., No.71, Zhouzi St., Neihu Dist.,Taipei City 114,
TAIWAN (R.O.C.)
TEL:886(2)5573-5900 FAX:886(2)8752-3267
Taichung Branch / M3 Solution Center Taichung1F., No.758, Zhongming S. Rd., South Dist.,
Taichung City 402, TAIWAN(R.O.C.)
TEL:886(4)2262-9188 FAX:886(4) 2262-9166

Hangzhou Office
Room 804, Eastern International Business Center Building 1, No.600 Jinsha Road
Hangzhou Economic and Technological
Development Zone, 310018, CHINA
TEL: 86(571)8288-0319 FAX: 86(571)8288-0320
Tianjin Office / M3 Solution Center Tianjin
Room D 12/F, TEDA Building, No.256 Jie-fang
Nan Road Hexi District,Tianjin 300042, CHINA
TEL:86(22)5888-1700 FAX:86(22)5888-1701

Kaohsiung Branch / M3 Solution Center Kaohsiung1F., No.31-1, Haibian Rd., Lingya Dist.,
Kaohsiung City 802, TAIWAN (R.O.C.)
TEL:886(7)334-6168 FAX:886(7)334-6160

Changchun Office
Room 815, 8F, Building A1, Upper East
International No.3000 Dongsheng Street,
Erdao District, Changchun, Jilin, 130031, CHINA
TEL:86(431)8192-6998 FAX:86(431)8192-6998

South Korea
Mitutoyo Korea Corporation
Head Office / M3 Solution Center(Sanbon-Dong, Geumjeong High View Build.), 6F, 153-8,
Ls-Ro, Gunpo-Si, Gyeonggi-Do, 15808 KOREA
TEL:82(31)361-4200 FAX:82(31)361-4202

Chongqing Office
Room 1312, Building 3, Zhongyu Plaza, No.86,
Hongjin Avenue,Longxi Street, Yubei District,
Chongqing, 400000, CHINA
TEL:86(23)6595-9950 FAX:86(23)6595-9950

Busan Office / M3 Solution Center(3150-3, Daejeo 2-dong) 8,Yutongdanji 1-ro
49beon-gil, Gangseo-gu, Busan, 46721 KOREA
TEL:82(51)718-2140 FAX:82(51)324-0104

Qingdao Office
Room 638, 6F, No.192 Zhengyang Road, Chengyang
District, Qingdao, Shandong, 266109, CHINA
TEL:86(532)8096-1936 FAX:86(532)8096-1937

Daegu Office / M3 Solution Center(Galsan-dong, Daegu Business Center), 301-Ho, 217,
Seongseogongdan-ro, Dalseo-gu, Daegu 42704 KOREA
TEL:82(53)593-5602 FAX:82(53)593-5603

Xi’an Office
Room 805, Xi’an International Trade Center, No.
196 Xiaozhai East Road, Xi’an, 710061, CHINA
TEL:86(29)8538-1380 FAX:86(29)8538-1381

China
Mitutoyo Measuring Instruments (Shanghai) Co., Ltd.
12F, Nextage Business Center, No.1111
Pudong South Road, Pudong New District,
Shanghai 200120, CHINA
TEL:86(21)5836-0718 FAX:86(21)5836-0717
Suzhou Office / M3 Solution Center (Suzhou)
No. 46 Baiyu Road, Suzhou 215021, CHINA
TEL:86(512)6522-1790 FAX:86(512)6251-3420

Dalian Office / M3 Solution Center Dalian
Room 1008, Grand Central IFC, No.128 Jin ma Road,
Economic Development Zone, Dalian 116600, CHINA
TEL:86(411)8718 1212 FAX:86(411)8754-7587
Zhengzhou Office
Room1801,18/F,Unit1,Building No.23, Shangwu Inner
Ring Road, Zhengdong New District,Zhengzhou City,
Henan Province, 450018,CHINA
TEL:86(371)6097-6436 FAX:86(371)6097-6981
Mitutoyo Leeport Metrology (Hong Kong) Limited
Room 818, 8/F, Vanta Industrial Centre, No.21-33, Tai
Lin Pai Road, Kwai Chung, NT, Hong Kong
TEL:86(852)2992-2088 FAX:86(852)2670-2488

Wuhan Office
Room 1701, Wuhan Wanda Center, No. 96,
Linjiang Road, Wuchang District, Wuhan
Hubei 430060, CHINA
TEL:86(27)8544-8631 FAX:86(27)8544-6227
Chengdu Office1-701, New Angle Plaza, 668# Jindong Road,
Jinjiang District, Chengdu, Sichuan 610066,CHINA
TEL:86(28)8671-8936 FAX:86(28)8671-9086

Mitutoyo Leeport Metrology (Dongguan) Limited / M3 Solution Center Dongguan
No.26, Guan Chang Road, Chong Tou Zone,
Chang An Town, Dong Guan, 523855 CHINA
TEL:86(769)8541 7715 FAX:86(769)-8541 7745

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M3 Solution Center-Massachusetts
753 Forest Street, Suite 110, Marlborough,MA 01752, U.S.A.
TEL:1-(888)648-8869 FAX:1-(508)485-0782

Mitutoyo Leeport Metrology (Dongguan)
Limited – Fuzhou office
Room 2104, City Commercial Centre, No.129 Wu Yi
Road N., Fuzhou City, Fujian Province, CHINATEL 86 591 8761 8095 FAX 86 591 8761 8096
Mitutoyo Leeport Metrology (Dongguan)
Limited –Changsha office
Room 2207, Shiner International Plaza, No. 88, Kaiyuan Middle Road, Changsha City, Hunan, China
TEL 86 731 8401 9276 FAX 86 731 8401 9376
Mitutoyo Measuring Instruments (Suzhou) Co., Ltd.
No. 46 Baiyu Road, Suzhou 215021, CHINA
TEL:86(512)6252-2660 FAX:86(512)6252-2580
Mitutoyo America Corporation
965 Corporate Boulevard, Aurora, IL 60502, U.S.A.
TEL:1-(630)820-9666 Toll Free No. 1-(888)648-8869
FAX:1-(630)978-3501

CanadaMitutoyo Canada Inc.
2121 Meadowvale Blvd., Mississauga,
Ont. L5N 5N1., CANADA
TEL:1-(905)821-1261 FAX:1-(905)821-4968

M3 Solution Center-Illinois
965 Corporate Boulevard, Aurora, IL 60502, U.S.A.
TEL:1-(888)648-8869 FAX:1-(630)978-3501

Montreal Office7075 Place Robert-Joncas Suite 129, Montreal,
Quebec H4M 2Z2, CANADA
TEL:1-(514)337-5994 FAX:1-(514)337-4498

M3 Solution Center-Ohio
6220 Hi-Tek Court, Mason, OH 45040, U.S.A.
TEL:1-(888)648-8869 FAX:1-(513)754-0718

BrazilM3 Solution Center-Michigan
46850 Magellan Drive, Suite 100, Novi, MI 48377, U.S.A.
TEL:1-(888)648-8869 FAX: 1-(248)926-0928
M3 Solution Center-California
16925 E. Gale Avenue, City of Industry, CA 91745, U.S.A.
TEL:1-(888)648-8869 FAX:1-(626)369-3352

M3 Solution Center-Alabama
2100 Riverchase Center, Suite 106, Hoover,
AL 35244, U.S.A
TEL:1-(888)648-8869 FAX:1-(205)988-3423
M3 Solution Center-Washington
1000 SW 34th Street Suite G, Renton,
WA 98057 U.S.A.
TEL:1-(888)648-8869

Micro Encoder, Inc.
11533 NE 118th Street, Kirkland,
WA 98034-7111, U.S.A.
TEL:1-(425)821-3906 FAX:1-(425)821-3228
Micro Encoder Los Angeles, Inc.
16925 E. Gale Avenue, City of Industry,
CA 91745-1806 U.S.A.
TEL: 1-626-961-9661 FAX:1-626-333-8019

U.S.A.

M3 Solution Center-North Carolina
11515 Vanstory Drive, Suite 140, Huntersville,
NC 28078, U.S.A.
TEL:1-(888)648-8869 FAX:1-(704)875-9273

Mitutoyo America Corporation Calibration Lab
965 Corporate Boulevard, Aurora, IL 60502, U.S.A.
TEL:1-(888)648-8869 FAX:1-(630)978-6477

Mitutoyo Sul Americana Ltda.
Head office / M3 Solution Center / Factory
Rodovia Índio Tibiriça 1555, Bairro Raffo,
CEP 08655-000 Suzano – SP, Brasil
TEL:55 (11)5643-0040
Argentina
Mitutoyo Sul Americana Ltda.
Argentina Branch / M3 Solution Center
Av. B. Mitre 891/899 – C.P. (B1603CQI)
Vicente López –Pcia. Buenos Aires – Argentina
TEL:54(11)4730-1433 FAX:54(11)4730-1411
Sucursal Cordoba / M3 Solution Center
Av. Amadeo Sabattini, 1296, esq. Madrid Bº
Crisol Sur – CP 5000, Cordoba, ARGENTINATEL/FAX:54 (351) 456-6251

M3 Solution Center-Texas4560 Kendrick Plaza Drive, Suite 120, Houston,
TX 77032, U.S.A.
TEL:1-(888)648-8869 FAX:1-(281)227-0937

App-5

MexicoMitutoyo Mexicana, S.A. de C.V.
Prolongación Industria Eléctrica No. 15 Parque
Industrial Naucalpan
Naucalpan de Juárez, Estado de México C.P.
53370, MÉXICOTEL: 52 (01-55) 5312-5612
Monterrey Office / M3 Solution Center Monterrey
Blv. Interamericana No. 103, Parque Industrial
FINSA, C.P. 66636 Apodaca, N.L., MÉXICOTEL: 52(01-81) 8398-8227/8228/8242/8244
FAX: 52(01-81) 8398-8226
Tijuana Office / M3 Solution Center Tijuana
Calle José María Velazco 10501-C, Col. Cd. Industrial
Nueva Tijuana, C.P. 22500 Tijuana, B.C., MÉXICOTEL: 52 (01-664) 647-5024
Querétaro Office / M3 Solution Center Querétaro
Av. Cerro Blanco No.500-1, Colonia Centro Sur,
Querétaro, Querétaro, C.P. 76090, MÉXICOTEL: 52 (01-442) 340-8018, 340-8019 and 340-8020
FAX: 52 (01-442) 340-8017
Mitutoyo Mexicana, S.A. de C.V. Querétaro
Calibration Laboratory
Av. Cerro Blanco 500 30 Centro Sur,
Querétaro, Querétaro, C.P. 76090, MÉXICOTEL: 52 (01-442) 340-8018, 340-8019 and 340-8020
FAX: 52 (01-442) 340-8017
Aguascalientes Office / M3 Solution Center
Av. Aguascalientes No. 622, Local 15 Centro Comercial El Cilindro Fracc. Pulgas Pandas Norte, C.P.
20138, Aguascalientes, Ags. MÉXICOTEL: 52 (01-449) 174-4140 and 174-4143
Irapuato Office / M3 Solution Center
Boulevard a Villas de Irapuato No. 1460 L.1 Col. Ejido
Irapuato C.P. 36643
Irapuato, Gto., MÉXICOTEL: 52 (01-462) 144-1200 and 144-1400

App-6

Revision Record
Date of publication
March 1, 2019

Revision status
First edition

Details of revision
Completely revised and issued

No. 99MBE078B

Mitutoyo Corporation
20-1, Sakado 1-Chome, Takatsu-ku, Kawasaki-shi, Kanagawa 213-8533, Japan
Tel: +81 (0)44 813-8230 Fax: +81 (0)44 813-8231
Home page: http://www.mitutoyo.co.jp/global.html
For the EU Directive, Authorized representative and importer in the EU:
Mitutoyo Europe GmbH
Borsigstrasse 8-10, 41469 Neuss, Germany
Printed in Japan
No. 99MBE078B