Residual Gas Analyzers
XT Series

Extorr XT Series Residual Gas Analyzers

Long-Life Dual Filaments

The Extorr XT systems are ideal for gas analysis, leakdetection and vacuum processing applications. These
reliable, easy to use RGAs are available with 100, 200, and300 amu Mass ranges and have a partial pressure detection
limit of 5 x 10-14 Torr with the optional electron multiplier.
The included Pirani gauge allows the entire pump down
process, from Atmosphere to UHV, to be monitored with asingle instrument. Intelligent filament start up design keeps
the filament off until the pressure is low enough for safe
operation. Unlike other designs, Extorr’s filament, ionizer
and electron multiplier can be replaced by the user. Theincluded VacuumPlus software package operates in
Windows 2000, XP, 7, 8, or 10 and communicates with theRGA Electronics Command and Control Unit (CCU) using RS232C or USB.

Dual thoria coated iridium filaments are used for electronemission. The filaments are protected from over pressure
by both the Pirani gauge and the B/A Ion gauge to ensure
minimum down time. If a filament does burn out, thesecond filament will allow for normal operation until thefilaments are replaced. Extorr offers inexpensive
replacement filaments and ionizers that can be changed bythe user in a matter of minutes.

Compact Rugged Design
A Pirani gauge, a Bayard / Alpert (B/A) Ion gauge, and a
Quadrupole mass analyzer are contained on a single 2.75”
Conflat® flange. The compact CCU contains all of the RGA
electronics. It is powered by the included 24 VDC supply andis easily removed from the probe for high temperature bakeouts.

Extorr, Inc.

Ultra-Sensitive Detection
The XT Series RGAs feature a standard Faraday cup
detection system allowing partial pressure measurementsfrom 10-4 Torr to 5 x 10-12 Torr.
With the optional electron multiplier, the partial pressure
sensitivity is extended to 5 x 10-14 Torr.
Extorr’s novel electrometer measures ion currents from10-6 to 10-15 amps in a single scan. This huge dynamic range
means that very large and very small signals may bemeasured at the same time.

Phone: 724-337-3000
www.extorr.com

XT Series Residual Gas Analyzers
Ionizer Degas

Analog Sweep Mode

The built in degassing function cleans the ionizer by heating
its surfaces using electron bombardment. This lowers theionizer’s contribution to background chemical noise and also
helps to restore reduced sensitivity caused bycontamination. The VacuumPlus software has a timer that
automatically ends the degas cycle after 10 minutes.

The fundamental mode of any
RGA is the analog mass sweep.
The system may be set to scanfrom a start mass to an end
mass within the range of theRGA. The scan speed andnumber of data samples peramu may be changed for theapplication. The partial pressure
versus mass data can be viewed
on the graph in real time or
saved to a data logging file for
additional analysis.

Extorr VacuumPlus Software
All Extorr RGA systems come standard with the VacuumPlus
real time Windows software package. An intuitive graphicaluser interface makes system setup and data logging quick
and easy. The display graph can be set to linear or log format
and the data can be scaled using slider bars or axis limit
values. The intensity units can be set to Torr, Pascal, or Ion
Current. The appearance of the graph can be customized bychanging the colors of the background and plot lines and theGrid Lines may be turned on and off. For further analysis,
Data Logging files can be saved for easy transfer into spread
sheets or other programs. The data logging files are a CSV
format that contains plain text ASCII character fields. Data
may be saved in a single file or in multiple files. The multiple
file mode also has several options to determine when eachindividual file is created and saved. Graphic images can besaved in a file or copied to the clipboard for importing
directly into other windows programs.

Sweep Parameters Tab

VacuumPlus allows for complete control of mass scaletuning, sensitivity calibration, ionizer setup and electron
multiplier gain adjustment.
All RGA settings may be saved in a configuration file.
Separate configurations can be created and saved for leakchecking or other special test methods and then recalled torepeat the test in the future.

Partial Pressure vs. Mass Graph

Software updates are available on the Extorr website,www.extorr.com, at no cost to the user.

Extorr, Inc.

Phone: 724-337-3000
www.extorr.com

XT Series Residual Gas Analyzers
Trend Mode

Leak Detect Mode

The peak intensities of up to 16 ions of interest may befollowed as a function of time. A strip chart of the selectedmasses can be viewed on the graph or saved to a data
logging file for additional analysis. Axis scaling and zoom
controls are active even while data is being acquired.

In the vacuum leak detect mode, a particular gas ismonitored over time. Helium is the most common leakdetect gas, but any other gas may be used.

Leak Detect Mode Mass Table
The intensity trace of the leak detection gas can be viewed inreal time on the graph and an audio tone that changes pitchwith the intensity may be enabled.

Trend Mode Pressure vs. TimeMultiple Head Operation
VacuumPlus supports multiple head operation when morethan one RGA is needed. Up to 9 CCUs can be controlled in asingle window.

Leak Detect Mode showing Helium, Air and Total Pressure

Multiple RGA Operation

Extorr, Inc.

Phone: 724-337-3000
www.extorr.com

XT Series Residual Gas Analyzers
Data Logging

Diagnostic Outputs

Data files can be saved in a Comma Separated Values (CSV)
format for easy transfer to other programs .The CSV filecontains plain text ASCII character fields for the Date andTime, the Mass number, and the Intensity. Data can be saved
to a single file or in multiple files. The creation options formultiple files include Once per scan, On the hour, At
midnight, or After N scans.

Although the XT Series is designed for reliable operation,
useful diagnostic information is available at the click of themouse. The Outputs tab shows real-time measurements ofthe filament voltage, emission current, electronics
temperature, and much more. This information will quickly
tell you of a filament problem or shorted probe.

Record Data Tab
The data logging files can be saved in any local or shared
network folder and the CSV files may be viewed or modified
in any text editor.

Outputs Tab

Performance and ValueThe Extorr XT Series RGA it is the only vacuum gauge you will
ever need. The combination of flexibility and competitive
price make Extorr an outstanding vacuum measurement
value.

CSV File Date and Time, Mass Numberand Intensity Values

Extorr, Inc.

Phone: 724-337-3000
www.extorr.com

XT Series Residual Gas Analyzers

RGA Dimensional Drawing, Inches [ mm ]Extorr, Inc.

Phone: 724-337-3000
www.extorr.com

XT Series Specifications
Mass range
XT100
XT200
XT300
XT100M
XT200M
XT300M
Mass filter type
Detector type
Resolution
Sensitivity (A/Torr)

Probe Materials
1 to 100 amu Faraday cup (FC)
1 to 200 amu Faraday cup (FC)
1 to 300 amu Faraday cup (FC)
1 to 100 amu Faraday cup (FC)and Electron Multiplier (EM)
1 to 200 amu Faraday cup (FC)and Electron Multiplier (EM)
1 to 300 amu Faraday cup (FC)and Electron Multiplier (EM)
Quadrupole
Faraday cup (FC), Standard
Electron Multiplier (EM), Optional
Better than 0.5 amu @ 10% peak height.
Adjustable to constant peak width
throughout the mass range.
5 x 10-4 into Faraday cup. Measured
with N2 @ 28 amu with 1 amu full peakwidth, 10% height, 70 eV electronenergy, 6 eV ion energy and 2 mAelectron emission.

Minimum detectable partial pressure

Operating range

5 x 10-12 Torr Faraday cup, 5 x 10-14 Torr
Electron multiplier Measured with N2 @28 amu with 1 amu full peak width, 10%
height, 70eV electron energy, 6 eV ionenergy, and 2 mA electron emission.
UHV to Atmosphere
Pirani gauge, 10-3 Torr to ATM
Ion Gauge below 10-2 Torr
RGA operation below 10-4 Torr

Electron energy

SS304, Kovar, Tungsten,Alumina, Iridium, Copper,
Nickel, Thoria, Platinum
Open ion source, electron impact
ionization
Dual thoria coated iridium withfirmware protection. Built-in 1 to30W degas ramp-up. Field
replaceable.
11 to 150V, programmable

Ion energy

1 to 12V, programmable

Focus Voltage

0 to 150V, programmable

Ionizer DesignFilament

Electron emission current
0.1 to 4 mA, programmable

Probe Dimensions

Probe mounting flange
2.75” CF

Minimum tube I.D.
CCU Dimensions
CCU Extension
Warm-up time
Computer Interface

50 °C Electronics, 100 °C Probe

Bakeout temperature
300 °C (Probe only, CCU removed)
10-3 Torr to ATM, Pirani gauge
2 x 10-10 Torr to 10-2 Torr, B/A type
Ion Gauge

SoftwarePower requirement
WeightExtorr, Inc.
307 Columbia Road
New Kensington, PA 15068

1.375”
3.3” x 4.8” x 7.4”, Easily separated
from probe for bakeout.
6.2” from flange face withmounting hardware.
Mass stability ± 0.1 amu after
30 minutes.
RS-232C, up to 115,200 baud,or USB.

Minimum PC Requirements

Operating temperature

Total pressure measurement

6.8” from flange face totop of ionizer

PC running Windows 2000, XP, 7,8, or 10 with 1024 x 768 VGA
graphics, keyboard, mouse, CD
ROM Drive, and 1 Unused USB orRS-232C Port.
Included VacuumPlus Windows
based application. Requires
Windows 2000, XP, 7, 8, or 1024 VDC @ 2.5 Amps.
120/240 VAC adaptor included.
5 lbs. Total, Probe and CCU.

Phone: 724-337-3000
www.extorr.com