Hot Ion Vacuum
GaugesFrom atmosphere to ultrahigh vacuumwith one gauge

From atmosphere toultrahigh vacuumwith one gauge
The INFICON Hot Ion Family of vacuum gaugdifferent technologies in a single compact eco-ADVANTAGESAT A GL ANCE

nomic package to measure process and base Up to 13 decades in one gaugepressure from 5 x10

 Save costs and tool spacees combines the advantages of up to threex10-10-10

to 1500 mbar (3.75to 1125 Torr). Combining techno-logies reduces the complexity of installation,

 Install and forget

setup, and integration, thus reducing cost and Long lifetime

valuable tool space.

 Easy to exchange sensing element

T YP ICAL AP P LICATIONS Pressure measurement for semiconductor process,transfer, and load lock chambers
 General vacuum measurement and control in the low toultrahigh vacuum range
 Physical vapor deposition (PVD) in industrial coating

For applications that require stand alone hot
ion gauge technology, INFICON offers thesingle technology Bayard Alpert Hot Ion Gauge
BAG402-S.
The supported single or dual filament options
offer superior accuracy and longevity. A broad
range of interface options enable simple
system integration.

The Hot Ion Family
MEASUREMENT RANGE
Ultra High Vacuum

10-11
ModelVacuum Gauge
TechnologyBAG402

Bayard-Alpert

BPG400

Bayard-Alpert Pirani(single filament)

BPG402

Bayard-Alpert Pirani(dual filament)

BCG450

Bayard-Alpert
Capacitancediaphragm

High Vacuum

10-7

Medium Vacuum

10-3

Low Vacuum

11000

Atmospheric Pressure (ATM) = 1000 mbar (at sea level)
Hot Ion

PiraniCapacitance DiaphragmFrom atmosphere toultrahigh vacuumwith one gauge
The INFICON Hot Ion Family of vacuum gaugdifferent technologies in a single compact eco-ADVANTAGESAT A GL ANCE

nomic package to measure process and base Up to 13 decades in one gaugepressure from 5 x10

 Save costs and tool spacees combines the advantages of up to threex10-10-10

to 1500 mbar (3.75to 1125 Torr). Combining techno-logies reduces the complexity of installation,

 Install and forget

setup, and integration, thus reducing cost and Long lifetime

valuable tool space.

 Easy to exchange sensing element

REPLACEMENT SENSOR WITH ON-BOARD
CALIBRATION DATA CHIP(BAG402, BPG402,BCG450)

CDG WORKING PRINCIPLE'LUHFWSUHVVXUHPHDVXUHPHQWE\GLDSKUDJPDIFFERENTIAL PRESSURE MEASUREMENT¨G SS

ON&DSDFLWDQFHUHDGRXWS¨&SOFFP ATM¨GS(OHFWURGHS'LDSKUDJPS SUHVVXUHINTERFACES

P chamber

BAYARD-ALPERTSENSOR SYSTEM
Analog / RS232(optional display)

T YP ICAL AP P LICATIONS General vacuum measurement and control in the low toultrahigh vacuum range
 Physical vapor deposition (PVD) in industrial coating

For applications that require stand alone hotion gauge technology, INFICON offers thesingle technology Bayard Alpert Hot Ion Gauge
BAG402-S.
FEATURES

The supported single or dual filament options
offer superior accuracy and longevity. A broad Standard Logarithmic analog 		range of interface options enable simple

output signal

system integration.

 Display
 Setpoints
 Status LED Single-, Dual, Triple Gauge
SensorLong lifetime yttrium oxide coatediridium filaments

 ATM SWITCH function

GAS TYPE INDEPENDENCE(BCG450)PIRANI PRINCIPLE

STABILITY AND ACCURACYATM1000

HeFilaments arekept preciselyin position

Wire 120°

Xe

H2ENHANCED LIFETIME THROUGHINTELLIGENT FILAMENT ON/OFF CONTROLAirO2CON2

V-shapedfilaments sagand displace

OFFControlledtension

Ptot = Pgas + Pconnection + Pradiation

The temperature will be conducted
through the gas molecules. The
temperature loss of the hot filamentis a function of the pressure.

CDG sensor technology
Other typical sensor technologies

Hot IonStableAutoON

Indicated pressure Pressure measurement for semiconductor process,transfer, and load lock chambers

NonstablePirani

CDG

5E -3mbar

1500mbar

ATM10-1010-10

True pressure

1000

10E -10 mbar

HOT ION VACUUM GAUGES
SPECIFICATIONSBPG400

BPG402

Sensor technology

Bayard-Alpert + Pirani

Bayard-Alpert(dual filament) + Pirani

Measurement range
Accuracy (N2) 1

BCG450
Bayard-Alpert +Pirani + CDG +ATM sensor

5 x 10-10 ... 1000 mbar
3.8 x 10-10 ... 750 Torr

5 x 10-10 ... 1500 mbar
3.75 x 10-10 ... 1125
Torr

10-8 ... 10-2 mbar

±15 % of reading-10-8 ... 50 mbar
50 ... 950 mbar
950 ... 1050 mbar-±15% of reading±5% of reading±2.5% of reading

Repeatability (N2) 1)

10-8 ... 10-2 mbar

5% of reading

Degasp < 7.2 x 10 mbar

Electron bombardment (max. 3 min)

-6

Electrical connection (analog / RS232)

D-sub, 15-pin, male

Supply voltage+20 ... +28V / 0.8 A (dc) 2

Output signal analog

0 ... 10 V (dc)

Voltage vs. pressure

log-linear, 0.75 V/decade

Materials exposed to vacuum

Temperature

10.13 V (dc)
Yt2O3, Ir, Mo,Cu, W, NiFe,
NiCr, Al2O3, SnAg
stainless steel, glass

Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr,
stainless steel, glass

Operating

0 ... +50°C

Bake- at flange
outwith flange
extension
electronics
removed

80°C
150°C 3150°C

Storage-20 ... +70°C

Degree of protection

IP30

Onboard sensor calibration data-Setpoints

yes

Two with digitalinterfaces 2

Display (optional)

yes

One for analog version Two along with digital
Two with digitalinterfaces 2interfaces 2

yes (only analog / RS232 versions)Interfaces

digital interface 1
digital interface 2

RS232 (integrated in D-sub15 connector)
Profibus DP, DeviceNet

Profibus DP, DeviceNet, EtherCAT, ProfiNET

Typically	2W protected against power reversal and transient over-voltages
3	horizontally mounted
12

DIMENSIONSBPG40x / BCG450
DeviceNet

Profibus

ProfiNET

48(1.89)
DN 25 ISO-KF

DN 40 CF-R

112.5(4.43)

14(0.55)

155.2(6.11)

67(2.64)42(1.65)

59(2.32)(BPG402 & BCG450)
only

mm (inch)
DN 40 CF-R
long tube(BPG402 only)w w w. infico n. co mreachu s @in f icon .com

Due to our continuing program of product improvements, specifications are subject to change without notice.
©12-2023 INFICON

EtherCAT(BPG402 & BCG450)
only