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Sputtering
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PN 074-157M

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Title Page

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Sputtering
Sensor
PN 074-157M®

www.inficon.com

re achus@inficon.com

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LTrademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
ConFlat® is a registered trademark of Varian Corporation.
Microdot® is a registered trademark of Microdot Corp.
Scotch-Brite™ is a trademark of 3M.
Swagelok® is a registered trademark of Swagelok Company.
Teflon® and Viton® are a registered trademarks of E. I. duPont de Nemours Company.
All other brand and product names are trademarks or registered trademarks of their respective companies.

Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright©2015 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, freefrom defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in therespective Seller instruction manuals for those products but shall not be less thanone (1) year from the date of shipment thereof by Seller. Seller's liability under thiswarranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found bySeller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse andis limited to, at Seller's election, either (a) repairing and returning the product orpart thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller inwriting of such non-conformity, specifying in reasonable detail the nature of suchnon-conformity. If Seller is not provided with such written notification, Seller shallnot be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHERWARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLDHEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct orindirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus returntransportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered byanyone other than Seller or which has been used in a manner or for a purpose forwhich the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise inconnection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www. inficon.com

re achus@inficon.com

Sputtering Sensor Operating Manual

Table Of Contents
Chapter 1
Introduction
1.1
1.2
1.3
1.3.1
1.4
1.4.1
1.5
1.5.1
1.5.2
1.5.3
1.5.4
1.5.5
1.5.6

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Definition of Notes, Hints, Cautions, and Warnings . . . . . . . . . . . . . . . . . . . 1-1
How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Returning Sputtering Sensor to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Sputtering Sensor Drawings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Sputtering Shutter Module Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Sputtering Sensor Shutter Module Drawings . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Feedthrough Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

Chapter 2
Sensor Installation
2.1
2.1.1

IPN 074-157M

2.1.2
2.1.3
2.2
2.2.1
2.3
2.3.1

Sensor Pre-installation Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Sensor Check with XTC/3, IC6,
or Cygnus 2 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Sensor Check with STM-2XM, SQM-160,
SQC-310, or IQM-233 Deposition Controller/Monitor. . . . . . . . . . . . . . . . . . 2-2
Sensor Check with STM-2 Deposition Monitor. . . . . . . . . . . . . . . . . . . . . . . 2-3
Sensor Installation Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Sensor Magnet Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Sensor Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Tube Bending . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

TOC - 1

Sputtering Sensor Operating Manual

Chapter 3
Sputtering Sensor Module Installation
3.1
3.2
3.2.1
3.3
3.3.1
3.3.2
3.3.3
3.3.4
3.4

Shutter Module Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Shutter Module Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Sensor Shutter Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Solenoid Valve Assembly Installation Procedure . . . . . . . . . . . . . . . . . . . . . 3-4
2.54 cm (1 in.) Bolt Feedthrough Installation . . . . . . . . . . . . . . . . . . . . . . . . 3-4
CF40 (2-3/4 in. ConFlat) Feedthrough Installation . . . . . . . . . . . . . . . . . . . . 3-5
Pneumatic Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Solenoid Valve Assembly Drawings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

Chapter 4
Maintenance and Spare Parts
General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 4-2
Crystal Replacement Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Sensor Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Adjusting the Leaf Spring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Cleaning the Crystal Holder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Adjusting the Crystal Holder Retainer Spring. . . . . . . . . . . . . . . . . . . . . . . . 4-7
Lubricating the Shutter Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Spare Parts and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Chapter 5
Troubleshooting
5.1
5.1.1
5.1.2
5.1.2.1

Troubleshooting Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Symptom, Cause, Remedy Chart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Diagnostic Tools. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
PN 782-902-023 Oscillator with 5.5 MHz Test Crystal . . . . . . . . . . . . . . . . . 5-4

5.1.2.2

OSC-100 Test Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.1.2.3

PN 761-601-G2 Crystal Sensor Emulator . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.1.2.4

XIU Test Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

5.1.3
5.1.3.1

Digital Multimeter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Electrical Isolation Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

5.1.3.2

Electrical Continuity Check. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

TOC - 2

IPN 074-157M

4.1
4.1.1
4.1.2
4.1.3
4.1.4
4.2
4.3
4.3.1
4.3.2
4.3.3
4.3.4
4.4

Sputtering Sensor Operating Manual

Chapter 1
Introduction
1.1 Introduction
The Sputtering Sensor is ideal for sputtering applications where the plasma is notwell constrained (e.g., radio frequency (RF) sputtering systems).
RF sputtering systems result in a flux of high-energy electrons which impinge on
the sensor head and can cause significant temperature related thickness errors if
the temperature change of the crystal during deposition is significant.
The Sputtering Sensor protects against RF temperature changes by deflecting
excess electrons away from the crystal and the sensor head.
Figure 1-1 Sputtering Sensor (PN 750-618-G1)

1.2 Definition of Notes, Hints, Cautions, and Warnings

PN 074-157M

Before using this manual, please take a moment to understand the Notes, Hints,
Cautions, and Warnings used throughout. They provide pertinent information thatis useful in achieving maximum instrument efficiency while ensuring personalsafety.
NOTE: Notes provide additional information about the Sputtering Sensor.
HINT: Hints provide insight into Sputtering Sensor usage.

CAUTION
Failure to obey these messages could result in damage
to the Sputtering Sensor.

WARNING
Failure to obey these messages could result in personal
injury.

1–1

Sputtering Sensor Operating Manual

1.3 How to Contact INFICONWorldwide customer support information is available on www.inficon.com underSupport >> Support Worldwide:Sales and Customer ServiceTechnical Support

Repair Service

When communicating with INFICON about a Sputtering Sensor, please have thefollowing information readily available:
The Sales Order or Purchase Order number of the Sputtering Sensor
purchase.



A description of the problem.

The exact wording of any instrument error messages that may have been
received.

An explanation of any corrective action that may have already been attempted.

1.3.1 Returning Sputtering Sensor to INFICON
Do not return any sensor component to INFICON without first speaking with a
Customer Support Representative and obtaining a Return Material Authorization(RMA) number. Sputtering Sensors will not be serviced without an RMA number.

Prior to being given an RMA number, a completed Declaration Of Contamination(DoC) form may be required. DoC forms must be approved by INFICON before an
RMA number is issued. INFICON may require that the sensor be sent to a
designated decontamination facility, not to the factory.

1–2

PN 074-157M

Packages delivered to INFICON without an RMA number will be held until thecustomer is contacted. This will result in delays in servicing the Sputtering Sensor.

Sputtering Sensor Operating Manual

1.4 Unpacking and Inspection
1 Carefully open the cardboard box and then remove from the packaging material
the plastic box containing the Sputtering Sensor and accessories.

1a Break the seals on both sides of the plastic box and lift the hinged cover toopen the box. Remove the Thin Film Manuals CD, Crystal Snatcher,
Crystals, and Sputtering Sensor from the box.

2 Examine the Sputtering Sensor and accessories for damage that may haveoccurred during shipping. It is especially important to note obvious roughhandling on the outside of the cardboard box. Immediately report any damage
to the carrier and to INFICON.
NOTE: Do not discard the packaging material until an inventory has beentaken and installation is successful.

3 Take inventory. Refer to the invoice and the information contained in section
1.4.1.

4 Install the Sputtering Sensor as instructed by Chapter 2, Sensor Installation.
5 For additional information or technical assistance, contact INFICON. (Refer tosection 1.3 on page 1-2.)

1.4.1 Parts and Options Overview
Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . PN 750-618-G1(Refer to Figure 1-1.)
Thin Film Manuals CD . . . . . . . . . . . . . . . . . PN 074-5000-G1
Crystal Snatcher . . . . . . . . . . . . . . . . . . . . . . PN 008-007

PN 074-157M

6 MHz Silver Crystals . . . . . . . . . . . . . . . . . . PN 008-009-G10
Optional Sputtering Shutter Module . . . . . . . PN 750-005-G1
Molybdenum Disulfide in Alcohol . . . . . . . . . PN 750-191-G1(provided only with shutter module)

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Sputtering Sensor Operating Manual

1.5 Specifications
Maximum bakeout temperature
with no water . . . . . . . . . . . . . . . . . . 105°C (225°F)
Sensor head size
(maximum envelope) . . . . . . . . . . . . 3.45 x 3.45 x 1.75 cm(1.36 x 1.36 x 0.69 in.)Water tube andin-vacuum cable length . . . . . . . . . . Standard 76.2 cm (30 in.)
Includes 78.1 cm (30.75 in.) in-vacuum
cable.
Crystal exchange . . . . . . . . . . . . . . . Rear-loading
Mounting . . . . . . . . . . . . . . . . . . . . . User supplied
Crystal size. . . . . . . . . . . . . . . . . . . . 14 mm (0.550 in.) diameter

1.5.1 Materials
Body and Holder . . . . . . . . . . . . . . . Au plated Be-Cu
Springs, Electrical Contacts . . . . . . . Au plated Be-Cu
Water tubes . . . . . . . . . . . . . . . . . . . Au plated Be-Cu,
0.32 cm (0.125 in.) OD
Connector. . . . . . . . . . . . . . . . . . . . . 304 stainless steel
Insulators . . . . . . . . . . . . . . . . . . . . . 99% Al2O3
Solder. . . . . . . . . . . . . . . . . . . . . . . . Cadmium-free silver-tin alloy
Crystal . . . . . . . . . . . . . . . . . . . . . . . 14 mm (0.550 in.) diameter
Magnet . . . . . . . . . . . . . . . . . . . . . . . ALNICO 5 Alloy

1–4

PN 074-157M

Wire . . . . . . . . . . . . . . . . . . . . . . . . . Teflon® insulated copperSputtering Sensor Operating Manual

1.5.2 Installation Requirements
Feedthrough . . . . . . . . . . . . . . . . Without Shutter
Two pass water 4.8 mm (3/16 in.)OD tubing with Microdot® coax connector.
(See section 1.5.3 on page 1-6.)
With Shutter
Three pass tubes (two water and one air)
4.8 mm (3/16 in.) OD tubing with Microdot
coax connector. (See section 1.5.3 on page
1-6.)
Vacuum tight braze or weld joint orconnectors for the water tubes.
Other. . . . . . . . . . . . . . . . . . . . . . XIU or oscillator to match specificcontroller/monitor. The cable length from thecrystal to the oscillator should not exceed
101.6 cm (40 in.) unless a ModeLock
instrument is used. Refer to thecontroller/monitor operating manual for cable
length limitations. Shutter module only:
Solenoid Valve for air, PN 750-420-G1. (Seesection 3.3 on page 3-4.)
Water Flow Rate. . . . . . . . . . . . . . . . Minimum water flow 750 cm3/min (0.2 gpm),
30°C (86°F) maximum.

PN 074-157M

Water Quality . . . . . . . . . . . . . . . . . . Coolant should not contain chlorides asstress corrosion cracking may occur.
Extremely dirty water may result in loss ofcooling capacity.

CAUTION
Do not allow water tubes to freeze. This may happen if thetubes pass through a cryogenic shroud and the flow of
fluid is interrupted.

1–5Sputtering Sensor Operating Manual

1.5.3 Sputtering Sensor Drawings
The following Sputtering Sensor outline drawings provide dimensions and otherrelevant data necessary for planning equipment configurations.
Figure 1-2 . . . . . . . . . . . . . . . . . . . . . Sputtering Sensor Outline
Figure 1-3 . . . . . . . . . . . . . . . . . . . . . Sputtering Sensor Assembly

PN 074-157M

Figure 1-2 Sputtering Sensor Outline

1–6

PN 074-157M

Figure 1-3 Sputtering Sensor assembly

Sputtering Sensor Operating Manual

1–7

Sputtering Sensor Operating Manual

1.5.4 Sputtering Shutter Module Specifications
Figure 1-4 Sputtering shutter module with Sputtering Sensor

Materials. . . . . . . . . . . . . . . . . . . . . . 300-series stainless steel
Pressure. . . . . . . . . . . . . . . . . . . . . . Minimum: 90 psi (gauge) {105 psi (absolute)}(7.2 bar (absolute)) [724 kPa (absolute)] to
maximum: 95 psi (gauge) {110 psi (absolute)}(7.6 bar (absolute)) [758 kPa (absolute)]
Shutter . . . . . . . . . . . . . . . . . . . . . . . Pneumatically operated
Braze . . . . . . . . . . . . . . . . . . . . . . . . Vacuum process high temperature
Ni-Cr Alloy

1.5.5 Sputtering Sensor Shutter Module Drawings
Figure 1-5 . . . . . . . . . . . . . . . . . . . . . Sputtering Sensor with Pneumatic Shutter
Figure 1-6 . . . . . . . . . . . . . . . . . . . . . Pneumatic Shutter Assembly

1–8

PN 074-157M

Temperature . . . . . . . . . . . . . . . . . . . 105°C (221°F)

PN 074-157M

Figure 1-5 Sputtering Sensor with pneumatic shutter

Sputtering Sensor Operating Manual

1–9

PN 074-157M

Figure 1-6 Pneumatic shutter assembly

Sputtering Sensor Operating Manual

1 – 10Sputtering Sensor Operating Manual

1.5.6 Feedthrough Drawings
The following Feedthrough Outline Drawings provide dimensions
and other pertinent data necessary for planning equipment configurations.
Figure 1-7 . . . . . . 2.54 cm (1 in.) bolt feedthrough with two tubes, one coax
(PN 002-042)
Figure 1-8 . . . . . . 2.54 cm (1 in.) bolt feedthrough with three tubes, one coax
(PN 750-030-G1)
Figure 1-9 . . . . . . 2.54 cm (1 in.) bolt feedthrough with two tubes, one coax,
with Ultra-Torr (PN 750-624-G1)
Figure 1-10 . . . . . CF40 (2-3/4 in. ConFlat) feedthrough with two tubes, one coax
(PN 002-043)
Figure 1-11 . . . . . CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, one coax
(PN 750-685-G1)
Figure 1-12 . . . . . CF40 (2-3/4 in. ConFlat) feedthrough with two tubes, one coax,
with Ultra-Torr (PN 206-878-G2)

PN 074-157M

Figure 1-13 . . . . . CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, one
coax, with Ultra-Torr (PN 750-685-G2)

1 – 11

Sputtering Sensor Operating Manual
Figure 1-7 2.54 cm (1 in.) bolt feedthrough with two tubes, one coax (PN 002-042)

19.0 (0.75)
127.0 (5.00)
A

A

Coax Connector
10.16 (0.400)
5.08 (0.200)

9.7 (0.38)

50.8 (2.00)
323.8 (12.75)

5.08(0.200)Viton O-ring#2-122#1-14-UNS Thread

3.96(0.156)

WasherView A-A

127.0 (5.00)

Dimensions are shown
millimeter (inch)

PN 074-157M

19.0 (0.75)

Assembly
BNC Connector

1 – 12

Sputtering Sensor Operating Manual
Figure 1-8 2.54 cm (1 in.) bolt feedthrough with three tubes, one coax (PN 750-030-G1)

19.0 (0.75)
127.0 (5.00)
A

A

Coax Connector
12.70 (0.500)
6.35 (0.250)

9.7 (0.38)

7.11(0.280)Viton O-ring #2-122
50.8 (2.00)
323.8(12.75)127.0 (5.00)

Washer

4.78(0.188)View A-A

3.18(0.125)

BNC Connector

Mating air fitting (10-32) for
PN 750-420-G1 Solenoid Valve

Dimensions are shown
millimeter (inch)

PN 074-157M

19.0 (0.75)#1-14-UNS Thread1 – 13

Sputtering Sensor Operating Manual
Figure 1-9 2.54 cm (1 in.) bolt feedthrough with two tubes, one coax, with Ultra-Torr (PN 750-624-G1)

162.93(6.41)

12.70(0.50)

76.20(3.00)

61.85(2.44)BNC Connector
3.25(0.13)

Ultra-Torr
Fittings (2)50.80(2.00)
251.83(9.91)

Coax
Connector# 25.4 (1.0)
1-14 UNS Thread

Washer
10.16(0.40)

9.04(0.36)

5.08(0.20)
43.99(1.73)

Dimensions are shown
millimeter (inch)

PN 074-157M

38.10(1.50)

1 – 14

Sputtering Sensor Operating Manual
Figure 1-10 CF40 (2-3/4 in. ConFlat) feedthrough with two tubes, one coax (PN 002-043)

32.8(1.29)

70 (2.75) ConFlat Flange
Coax Connector

BNC Connector

127.00(5.00)

Seamless Tube (3)4.78 OD, 3.33 ID(0.188 OD), (0.131 ID)
12.70 (0.5)
228.60(9.00)

6.73 (0.26) diameterSix holes equally spaced
on a 58.71 (2.31) diameterbolt circle

69.85(2.75)

10.2(0.40)

PN 074-157M

5.1(0.20)
7.6 (0.30)
15.2 (0.60)

Dimensions are shown
millimeter (inch)

1 – 15

Sputtering Sensor Operating Manual
Figure 1-11 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, one coax (PN 750-685-G1)

32.64(1.29)
CF40 70 (2.75) ConFlat Flange
Coax Connector
BNC Connector

Mating air fitting(10-32) for
PN 750-420-G1
Solenoid Valve

12.70(0.50)

57.15(2.25)
127.00(5.00)
228.60(9.00)

15.24(0.60)
7.66(0.30)

PN 074-157M

6.73 (0.26) diameterSix holes equally spaced
on a 58.71 (2.31) diameterbolt circle

8.89(0.35)

69.85(2.75)
8.89(0.35)

12.70(0.50)
Dimensions are shown
millimeter (inch)

1 – 16

Sputtering Sensor Operating Manual
Figure 1-12 CF40 (2-3/4 in. ConFlat) feedthrough with two tubes, one coax, with Ultra-Torr (PN 206-878-G2)

251.83(9.91)
CF40 70 (2.75)
ConFlat Flange

BNC Connector
Ultra-Torr Fittings (2)32.64(1.29)

Coax Connector

127.00(5.00)

12.70(0.50)

15.24(0.60)
6.73 (0.26) diameterSix holes equally spaced
on a 58.71 (2.31) diameterbolt circle

7.62(0.30)
5.08(0.20)

PN 074-157M

69.85(2.75)
10.24(0.40)

Dimensions are shown
millimeter (inch)

1 – 17

Sputtering Sensor Operating Manual
Figure 1-13 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, one coax, with Ultra-Torr (PN 750-685-G2)

32.64(1.29)

CF40 70 (2.75) ConFlat Flange
Coax Connector

BNC Connector

Mating air fitting(10-32) for
PN 750-420-G1
Solenoid Valve

Ultra-Torr Fittings (3)57.15(2.25)

12.70(0.50)

127.00(5.00)
251.61(9.91)

7.62(0.30)
6.73 (0.26) diameterSix holes equally spaced
on a 58.71 (2.31) diameterbolt circle

15.24(0.60)
8.89(0.35)

PN 074-157M

69.85(2.75)
8.89(0.35)

6.73(0.26)

Dimensions are shown
millimeter (inch)

1 – 18

Sputtering Sensor Operating Manual

Chapter 2
Sensor Installation
2.1 Sensor Pre-installation Check
Prior to installing the Sputtering Sensor in the sputtering system, make certain that
it is in proper working condition by following the appropriate procedure.

2.1.1 Sensor Check with XTC/3, IC6,
or Cygnus 2 Deposition Controller
1 Connect the in-vacuum cable from the sensor head to the feedthrough or acoax adapter (Microdot/BNC).

2 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 755-257-G6) to the BNC
connector on the feedthrough.

3 Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector of the
ModeLock oscillator (XIU) (PN 781-600-GX).

4 Connect one end of the XIU cable (PN 600-1261-PXX) to the mating connectorof the XIU.

5 Connect the other end of the XIU cable to a sensor channel at the rear of thecontroller.

6 Install the crystal as instructed by section 4.2 on page 4-2.
7 Connect power to the controller.

PN 074-157M

8 Set the power switch to ON.
9 Set density at 1.00 g/cm3.
10 Zero the thickness. The display should indicate 0 or ± 0.001 kÅ. Crystal life
should read from 0 to 5%.

11 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 kÅshould display. When the moisture evaporates, the thickness indication should
return to approximately zero. If these conditions are observed, the sensor is inproper working order and may be installed. (See section 2.3 on page 2-8.)

2–1

Sputtering Sensor Operating Manual

2.1.2 Sensor Check with STM-2XM, SQM-160,
SQC-310, or IQM-233 Deposition Controller/Monitor
1 Connect the in-vacuum cable from the sensor head to the feedthrough or acoax adapter (Microdot/BNC).

2 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011) to the
BNC connector on the feedthrough.

3 Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector of theoscillator (PN 783-500-013) labeled Sensor.

4 Connect one end of the oscillator cable (PN 782-902-012-XX) to the mating
connector of the oscillator labeled Control Unit.

5 Connect the other end of the oscillator cable to a sensor connector at the rearof the controller/monitor.

6 Install the crystal as instructed by section 4.2 on page 4-2.
7 Connect power to the controller or monitor.
8 Set the power switch to ON.
9 For the IQM-233 card, launch the appropriate software.
10 Set density at 1.00 g/cm3.
11 Zero the thickness. The display should indicate 0 or ± 0.001 kÅ. Crystal life
should read from 95 to 100%.

12 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 kÅ

PN 074-157M

should display. When the moisture evaporates, the thickness indication should
return to approximately zero. If these conditions are observed, the sensor is inproper working order and may be installed. (See section 2.3 on page 2-8.)

2–2

Sputtering Sensor Operating Manual

2.1.3 Sensor Check with STM-2 Deposition Monitor
1 Connect the in-vacuum cable from the sensor head to the feedthrough or acoax adapter (Microdot/BNC).

2 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011) to the
BNC connector on the feedthrough.

3 Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector of
STM-2.

4 Connect one end of the USB cable (PN 068-0472) to the mating connector of
STM-2.

5 Connect the other end of the USB cable to a USB port on the computer being
used to operate STM-2.

6 Install the crystal as instructed by section 4.2 on page 4-2.
7 Launch the appropriate monitor software.
8 Set density at 1.00 g/cm3.
9 Zero the thickness. The display will indicate 0 or ± 0.001 kÅ. Crystal life should
read from 95 to 100%. The green indicator on STM-2 should be illuminated.

10 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 kÅshould display. When the moisture evaporates, the thickness indication should
return to approximately zero. If these conditions are observed, the sensor is inproper working order and may be installed. (See section 2.3 on page 2-8.)

PN 074-157M

2.2 Sensor Installation Guidelines
Figure 2-1 on page 2-5 shows typical installations of Sputtering Sensors. Use thisillustration and the following guidelines to install the Sputtering Sensor for optimum
performance and convenience.


Install the sensor in a position well within the stream of material sputtered fromthe target to accumulate thickness at a rate proportional to accumulation on thesubstrate.

Ensure that the thickness indication from the sensor represents the thickness
on the substrates by determining the tooling. Refer to the monitor or controller
operating manual for calibration procedures.

Plan the installation to ensure that there are no obstructions blocking a direct
path between the sensor and the target.



The Sputtering Sensor can be supported by the sensor water tubes, however,for best process reproducibility, support the sensor so that it cannot move
during maintenance and crystal replacement.

2–3

Sputtering Sensor Operating ManualThe sensor must be installed such that the face of the crystal is perpendicular
to the stream of material sputtered from the target. Install the sensor in alocation without obstructions between material stream and sensor and in alocation where the sensor will not obstruct the flow of material to the substrate.

Two effects may arise if the crystal face is not perpendicular to the stream ofmaterial sputtered from the target, and the combination of these effects will have anegative effect on crystal life and increase the probability of mode hops:
The deposit will not be even across the crystal surface, causing the thicknessof the deposit to become wedge shaped. This wedge shape in the deposited
film tends to reduce the activity of the crystal at its primary resonance.



The area of the deposit shifts from the center of the crystal. This is due to theshadowing effect of the crystal aperture. If the crystal is not perpendicular to thestream of material sputtered from the target, the strength of spurious(non-thickness shear) modes of vibration are enhanced. If the activity of these
spurious modes of oscillation become strong enough, they cause short-term
perturbation of the fundamental frequency. If they get very strong, the oscillator
can lock onto the spurious mode of oscillation, causing a mode hop, unless a
ModeLock instrument is used.

PN 074-157M



2–4

Sputtering Sensor Operating Manual
Figure 2-1 Suggested Sputtering Sensor locations

SensorHead
Anode

CathodeSensor
Head

Hole

SensorHead

Sensor
Head

Hole

SensorHead

CathodeAnode
SensorHead(B) Sputter Down

(A) Sputter Down

CathodeSubstrate

SensorHead

AnodeScreenSubstrate

PN 074-157M(C) Radial ShutterThe sensor must not disrupt electrical fields or otherwise disturb the normalmaterial deposition pattern.

Because the sputtering process is very noisy electrically, ground the monitor orcontroller, as well as the sensor, to the base plate or housing of the sputteringchamber. Refer to the monitor or controller operating manual for detailed
grounding information.
HINT: Use a wide ground strap to obtain low impedance at radio frequencies.
Normal diameter wires have relatively high impedance at radio
frequencies.

The Sputtering Sensor can be installed in any position.



Avoid exposing the sensor in-vacuum cable to the plasma by wrapping thecable around the water-cooling tubes and covering with aluminum foil.

2–5

Sputtering Sensor Operating Manual

Use water-cooling during the sputtering process. 750 cm3/min (0.2 gpm) at
30°C (86°F) (maximum temperature) water flow is sufficient for mostapplications.
HINT: Always check the water flow before starting the plasma.

In sputtering systems which use a substrate shutter, the Sputtering Sensor
should be mounted in a location where it is always exposed to plasma. If it isnot, and the shutter is covering the sensor, there will be a small thickness jumpwhen the shutter is opened, caused by thermal stress in the crystal.

The sensor front cover assembly contains a permanent magnet that can deflect
electronic flux away from the sensor to minimize unwanted heating of thecrystal. (See section 2.2.1.) If the sensor is installed in a sputtering system
which employs external magnetic fields, make sure the magnetic field directionof the sensor is not opposing the external magnetic field. (See Figure 2-3.)

2.2.1 Sensor Magnet Adjustment
Figure 2-2 Sensor magnet and field configuration

Magnetic
Field Direction
S

N

S

N

View
From
InsideMagnet can be rotatedinside the cover.
To secure the magnet, insert athin piece of non-ferrous metal
wire or sheet into the gap between
the circumference of the magnet
and its opposing wall.

2–6

PN 074-157M

Magnetic
Field Direction

Sputtering Sensor Operating Manual
Figure 2-3 Orientation of sensor magnetic field in a sputtering system
employing an external magnetic field

External
Magnetic
Field

Sen
sor

CathodeAnode(A) Incorrect

External
Magnetic
Field

Sen

sor

CathodeAnode(B) Correct

PN 074-157M

The cancellation of magnetic fields near the sensing crystal may cause
undesirable crystal heating. Use a small magnet to determine the field direction
and rotate the magnet in the sensor to a desirable position. The sensor magnet
can be held in position by inserting a small piece of thin non-magnetic wire or
sheet into the gap between the circumference of the magnet and the opposing
wall. The magnetic field of the sensor is localized and will not affect the external
magnetic field.
The sensor is always at ground potential and cannot be made floating. In
sputtering systems where the substrate holder (anode) is biased, the sensor
should be located where it is electrically isolated from the substrate holder andwhere it does not affect the electric field near substrates.

2–7

Sputtering Sensor Operating Manual

2.3 Sensor Installation Procedure
CAUTION
The sensor head, water tubes, cable, etc., should beclean and free of grease when installed in the vacuum
chamber. Clean nylon or talc-free gloves should be worn
while handling any sensor components.
If parts do become contaminated, clean them thoroughly
using a suitable solvent to avoid outgassing.
NOTE: If the optional Sputtering Shutter Module will be used with the Sputtering
Sensor, install the shutter module before proceeding with the sensor
installation procedure. (See Chapter 3.)

1 Assemble a sensor mounting bracket (user supplied)on the process system.
NOTE: A mounting bracket is recommended to prevent movement of thesensor during crystal replacement or sensor maintenance.

2 Temporarily position and attach the Sputtering Sensor as outlined in
the general guidelines. (Refer to section 2.2 on page 2-3.)

3 Temporarily install the feedthrough.
4 Form, measure, and mark the sensor tubes. (See section 2.3.1 on page 2-11.)

CAUTION
Do not form the water tubes with a bend radiusless than 8 mm (0.315 in.) from the inside of the bend or
9.5 mm (0.375 in.) from the center line of the tubes.
Do not use the sensor body as a leverage point whenbending the tubes.

5 Build the sensor/feedthrough assembly.
6 Remove the sensor and the feedthrough.
7 Cut the sensor water tubes and air tubes (if applicable) to the proper length.
Verify that the water tubes are clear of metal particles by blowing compressed
air through the water tubing.

2–8

PN 074-157M

NOTE: The Tube Bender Kit, PN 750-037-G1, is recommended for bending
the tubes (not included).

Sputtering Sensor Operating Manual

8 Connect the water tubes and air tubes directly to the feedthrough,or use vacuum rated fittings.


Vacuum rated fittings, such as Swagelok® VCR® or VCO®, arerecommended for use between the sensor and the feedthrough to speed
maintenance. If brazing adapters are to be used, attach them to the sensor
tubes prior to connection to the feedthrough. Make connections as follows:

CAUTIONTo prevent damage to the feedthrough or sensor
during brazing, ensure that at least 2.54 cm (1 in.) ofwater tube remains between the sensor and the flame.


Clean the sensor tubes and adapter surfaces with solvent, if necessary.



Apply brazing flux to surfaces being joined.

Braze the connections using a flame temperature appropriate forthe brazing material being used.

CAUTIONPN 074-157M

Excessive application of brazing material, or
excessive heat due to brazing, may result inblockage of the tubes.


Verify that the water tubes are not blocked with braze material by blowing
compressed air through the water tubes.



Thoroughly clean the braze joints and helium leak test the braze joints
before installing the sensor and feedthrough into the process chamber.

9 With all water tube and air tube connections installed, install the sensor andfeedthrough assembly into the process system and secure all retaining
hardware.

10 Shield the sensor in-vacuum cable from heat radiating from the plasma, if theprocess allows, by wrapping aluminum foil around the in-vacuum cable andsensor tubes.

11 Connect the external water tubes from the feedthrough to the water supply
system and flow controller. Use detachable fittings (Swagelok or equivalent) for
external water tube connections.

12 Apply water at the specified flow rate (refer to section 1.5.2, Installation
Requirements, on page 1-5), and verify that the water connections are tight.

2–9

Sputtering Sensor Operating Manual

13 If applicable, attach air connection to solenoid valve and adjust air pressure to
be 90 psi (gauge) {105 psi (absolute)} (7.2 bar (absolute)) [724 kPa (absolute)](minimum) to 95 psi (gauge) {110 psi (absolute)} (7.6 bar (absolute)) [758 kPa(absolute)] (maximum).

WARNING
Do not exceed 100 psi (gauge) {115 psi (absolute)}(7.9 bar (absolute)) [791 kPa (absolute)].
Connection to excessive pressure may result in personal
injury or equipment damage.

PN 074-157M

NOTE: Because of geometric factors, variations in surface temperature, anddifferences in electrical potential, the crystal and substrates often do notreceive the same amount of material. Calibration is required to make surethe thickness indication on the instrument accurately represents the
thickness on the substrates. Refer to the monitor or controller operating
manual for calibration procedures.

2 – 10Sputtering Sensor Operating Manual

2.3.1 Tube Bending
CAUTION
Read this entire section before attempting tobend the tubes. Incorrect tube bending thatdamages the tubes voids the warranty.
If it is necessary to bend the tubes to clear obstacles inside the chamber or to bring
the Sputtering Sensor into a proper mounting location, observe the following
precautions:Support the tubes where the bends will be placed to avoid a tube being
collapsed or pinched.
NOTE: The Tube Bender Kit, PN 750-037-G1, is recommended for bending
the tubes (not included).


If the water tube is collapsed, water flow will be restricted. The sensor will
not have sufficient cooling.



If the air tube is collapsed, air pressure will be restricted. The shutter will not
operate correctly.

CAUTION
Do not form the sensor tubes with a bend radiusless than 8 mm (0.315 in.) from the inside of the bend or
9.5 mm (0.375 in.) from the center line of the tubes.

PN 074-157M

Do not use the sensor body as a leverage point whenbending the tubes.
NOTE: The 3.175 mm (1/8 in.) tubes are flexible enough to bend, but they are notdesigned for repeated bending. Plan bends wisely. Before the actual tube
bending, verify the bend position again to avoid readjusting. If in doubt,
contact INFICON support. (Refer to section 1.3, How to Contact INFICON,on page 1-2.)

2 – 11

Sputtering Sensor Operating Manual

PN 074-157M

This page is intentionally blank.

2 – 12

Sputtering Sensor Operating Manual

Chapter 3
Sputtering Sensor Module Installation
3.1 Shutter Module Installation Requirements
The Sputtering Shutter Module installation kit (PN 750-005-G1) mounts apneumatic shutter module onto a Sputtering Sensor. The pneumatic shutter
module is assembled and tested at the factory.
The parts shown in Table 3-1 are required.
Table 3-1 Parts required to install the pneumatic shutter module
Qty.

Description

IPN

1

Sputtering Shutter Module

750-005-G1 (Refer to section 1.5.4
on page 1-8.)

1Sputtering Sensor Assembly

750-618-G1 (Refer to Chapter 1.)

NOTE:

The following parts are listed as suggested equipment and may be orderedseparately.

1

Solenoid Valve Assembly

750-420-G1 (See section 3.3 on page
3-4.)

1

2.54 cm (1 in.) Bolt Feedthrough with
Airline (or equivalent)

750-030-G1 (See Figure 1-8 on page
1-13.)

CF40 (2-3/4 in. ConFlat®) FeedthroughCopper Gasket with Airline

750-685-G1 (See Figure 1-11 on
page 1-16.)

OR

PN 074-157M

1

3–1

Sputtering Sensor Operating Manual

3.2 Shutter Module Installation Procedure
Before installation, review the figures to understand how the parts are assembled.
The shutter assembly may be installed onto a new Sputtering Sensor or a used
sensor in good condition.

1 Remove the actuator cover screw (4-40 x 3/16 in.) on the shutter assembly andremove the actuator cover. (See Figure 3-1.)
Figure 3-1 Top view
Actuator CoverSensor Front
Cover Assembly

Shutter
Actuator
Mounting
ScrewsActuator Cover Screw

2 Remove the two water tube clamp screws (4-40 x 1/4) (not shown) and remove
the clamp. (See Figure 3-2.)

3 Remove the sensor body assembly from the sensor front cover assembly andset it in a clean safe place. This is to protect the body assembly during the
installation. (See Figure 3-2.)
Figure 3-2 Side view

Sensor Body
Assembly

Water Tube
Clamp

Cable

3–2

PN 074-157M

Sensor Front Cover AssemblySputtering Sensor Operating Manual
Figure 3-3 Bottom view
Stop Screw

Shutter Pivot

Actuator
Mounting Bracket
Water
Lines

Stop Screw

Water Tube Clamp

4 Place the sensor front cover assembly on the shutter module assembly as
shown in Figure 3-3. The sensor water lines will fit between the shutter pivot
and the stop screw. Carefully bend the water lines as shown.

5 Position the water line clamp on the shutter assembly and install the two
mounting screws. Tighten the screws finger tight.

6 Position the sensor front cover assembly as shown in Figure 3-1. The shutter
must cover the sensor. It may be necessary to align the sensor slightly toachieve the correct cover position.

7 The plane of the shutter and sensor front cover assembly should be parallel.
(Refer to Figure 3-2.) It may be necessary to align the sensor slightly to achieve
the correct position.

8 Tighten the two water tube clamp screws.
9 Manually rotate the shutter away from the sensor front cover assembly as
shown in Figure 3-1 and then release it. The return operation must be smooth
and unobstructed.

10 Install the actuator cover on the shutter actuator assembly and install thePN 074-157M

actuator cover screw (4-40 x 3/16). (Refer to Figure 3-1.)

11 Install the sensor body assembly into the sensor front cover assembly. The
Sputtering Sensor with shutter module assembly will now appear as shown in
Figure 3-2.

3.2.1 Sensor Shutter Check
Temporarily connect an air supply to the actuator air tube. Use the manual override
button on the solenoid valve (see Figure 3-5 on page 3-8 or Figure 3-6 on page3-9), or other means, to activate and deactivate the pneumatic shutter several
times.
NOTE: The air supply must be 90 psi (gauge) {105 psi (absolute)} (7.2 bar(absolute)) [724 kPa (absolute)] (minimum) to 95 psi (gauge) {110 psi(absolute)} (7.6 bar (absolute)) [758 kPa (absolute)] (maximum).

3–3

Sputtering Sensor Operating Manual

WARNING
Do not exceed 100 psi (gauge) {115 psi (absolute)} (7.9bar (absolute)) [791 kPa (absolute)].
Connection to excessive pressure may result in personal
injury or equipment damage.
When activated, shutter movement should be smooth, rapid, complete, and the
shutter should completely expose the crystal opening. When deactivated, theshutter should completely cover the crystal opening.
NOTE: A solenoid valve assembly (PN 750-420-G1) is required for a shutteredsensor installation. See section 3.3 for solenoid valve and installation.

3.3 Solenoid Valve Assembly Installation Procedure
The solenoid valve assembly (PN 750-420-G1) and the feedthrough should beinstalled at the same time.
For an 2.54 cm (1 in.) Bolt Feedthrough Installation, see section 3.3.1 on page3-4.

For an CF40 (2-3/4 in. ConFlat) Feedthrough Installation, see section 3.3.2 on
page 3-5.

3.3.1 2.54 cm (1 in.) Bolt Feedthrough Installation

Most INFICON 2.54 cm (1 in.) bolt feedthroughs with air lines are equipped with afitting adapter (PN 007-133). This adapter provides an easy way to attach a quick
disconnect fitting (included with the PN 750-420-G1 solenoid valve assembly) to
the feedthrough air line. The fitting adapter is available from INFICON for
feedthroughs not equipped with this adapter.
Follow the steps below:

1 Ensure that the O-ring is in the groove on the bolt.
2 Insert the 2.54 cm (1 in.) bolt such that the hexagonal shaped end of the bolt ison the vacuum side of the chamber.

3 Add the solenoid valve bracket to the bolt threads.
4 Add the washer.
5 Add the feedthrough nut.
6 Tighten the feedthrough nut.
3–4

PN 074-157M

All shuttered sensors using 2.54 cm (1 in.) bolt feedthroughs require a single
coaxial feedthrough, PN 750-030-G1. (Refer to Figure 1-8 on page 1-13.)

Sputtering Sensor Operating Manual

7 Remove the quick disconnect air fitting from the exhaust port of thesolenoid valve and thread it into the fitting adapter (PN 007-133) installedon the feedthrough air line.

8 Connect the 3.175 mm (1/8 in.) air tube from the A port of the solenoid valve tothe quick disconnect fitting installed in step 7. (See section 3.3.3, Pneumatic
Connections, on page 3-7.)

9 Attach the P port of the solenoid valve to a source of air. The air supply mustbe 90 psi (gauge) {105 psi (absolute)} (7.2 bar (absolute)) [724 kPa (absolute)](minimum) to 95 psi (gauge) {110 psi (absolute)} (7.6 bar (absolute)) [758 kPa(absolute)] (maximum). (See section 3.3.3, Pneumatic Connections, on page
3-7.)

WARNING
Do not exceed 100 psi (gauge) {115 psi (absolute)}(7.9 bar (absolute)) [791 kPa (absolute)].
Connection to excessive pressure may result in personal
injury or equipment damage.

CAUTION
Maximum temperature for the solenoid valve assemblyis 105 °C for bakeout and operation.

10 Make electrical connections to the solenoid valve. (See section 3.3.4, Electrical
PN 074-157M

Connections, on page 3-7.)

3.3.2 CF40 (2-3/4 in. ConFlat) Feedthrough Installation
If the solenoid valve assembly is to be used with the CF40 (2-3/4 in. ConFlat)
feedthrough, modify the valve bracket as follows. (See Figure 3-5 on page 3-8.)

1 Align the score line on the solenoid valve bracket over the edge of a table orother square edge.

2 Using pliers, grasp the part of the bracket extending over the edge and push
down. The assembly will break along the score line.

3 Use a file to smooth any rough edges which occur along the break.
All shuttered sensors using CF40 (2-3/4 in. ConFlat) feedthroughs require a single
coaxial feedthrough, PN 750-685-G1 or PN 750-685-G2. (Refer to Figure 1-11 on
page 1-16 or Figure 1-13 on page 1-18.)

3–5

Sputtering Sensor Operating Manual

INFICON CF40 (2-3/4 in. ConFlat) feedthroughs with air lines are equipped with afitting adapter (PN 007-133). This adapter provides an easy way to attacha quick disconnect fitting (included with the 750-420-G1 solenoid valve assembly)
to the feedthrough air line.
Follow the steps below:

1 Install the Feedthrough.
2 Add the solenoid valve bracket (modified) to the desired location (shown in
Figure 3-6 on page 3-9) using two of the 6.35 mm (1/4 in.) clamp bolts locatedon the flange.

3 Tighten the flange bolts.
4 Remove the quick disconnect air fitting from the exhaust port of thesolenoid valve and thread it into the fitting adapter (PN 007-133)
installed on the feedthrough air line.

5 Connect the 3.175 mm (1/8 in.) air tube from the A port of the solenoid valve tothe quick disconnect fitting installed in step 4. (See section 3.3.3, Pneumatic
Connections, on page 3-7.)

6 Attach the P port of the solenoid valve to a source of air. The air supply range
is 90 psi (gauge) {105 psi (absolute)} (7.2 bar (absolute)) [724 kPa (absolute)](minimum) to 95 psi (gauge) {110 psi (absolute)} (7.6 bar (absolute)) [758 kPa(absolute)] (maximum). (See section 3.3.3, Pneumatic Connections, on page
3-7.)

WARNING
Do not exceed 100 psi (gauge) {115 psi (absolute)}(7.9 bar (absolute)) [791 kPa (absolute)].

CAUTION
Maximum temperature for the solenoid valve assemblyis 105°C for bakeout and operation.

7 Make electrical connections to the solenoid valve. (See section 3.3.4, Electrical
Connections, on page 3-7.)

3–6

PN 074-157M

Connection to excessive pressure may result in personal
injury or equipment damage.

Sputtering Sensor Operating Manual

3.3.3 Pneumatic Connections
Figure 3-4 Pneumatic solenoid valve tube connections
Exhaust(Normally Open)P Supply(Normally Closed)

A OutputPort

Air Supply

To AirFitting Of
FeedthroughTube Fitting(Provided With Valve)

3.3.4 Electrical Connections
To complete installation of the assembly, make electrical connections
where indicated in Figure 3-6 on page 3-9 to either 24 V(ac) or V(dc).
Current required is approximately 70 mA.

CAUTION
The maximum applied voltage must not exceed
26 V (ac) or 26 V (dc).

PN 074-157M

3.4 Solenoid Valve Assembly Drawings
The following Solenoid Valve Outline Drawings provide dimensions and otherrelevant data necessary for planning equipment configurations.
Figure 3-5 on page 3-8. . . . . . . . . . . Solenoid Valve Assembly (PN 750-420-G1)
Figure 3-6 on page 3-9. . . . . . . . . . . CF40 (2-3/4 in. ConFlat) Dual Coaxial
Feedthrough and Solenoid Valve Outline

3–7

PN 074-157M

Figure 3-5 Solenoid valve Assembly

Sputtering Sensor Operating Manual

3–8

Figure 3-6 CF40 (2-3/4 in. ConFlat) dual coaxial feedthrough and solenoid valve outline

PN 074-157M

Sputtering Sensor Operating Manual

3–9Sputtering Sensor Operating Manual

PN 074-157M

This page is intentionally blank.

3 – 10Sputtering Sensor Operating Manual

Chapter 4
Maintenance and Spare Parts
4.1 General Precautions
CAUTION
Wear clean nylon or talc-free latex lab gloves whenhandling sensor components. If sensor components
become contaminated, clean them thoroughly using asuitable solvent to avoid outgassing under vacuum.

4.1.1 Handle the Crystal with Care
The crystal surfaces are easily contaminated. Handle the crystals only by theiredges. Always use clean nylon lab gloves when handling crystal holders andretainers. Use clean Teflon tweezers when handling crystals. If using a vacuum
pencil to handle crystals, be sure the vacuum pencil tip is clean and notcontaminated.
Contamination can lead to poor film adhesion. Poor film adhesion will result in highrate noise and premature crystal failure.

CAUTIONPN 074-157M

Do not use metal tweezers to handle crystals.
Metal tweezers may chip the edge of the crystal.

4.1.2 Use the Optimum Crystal Type
Silver crystals are recommended for sputtering and other applications withsustained high heat loads.
Certain materials, especially dielectrics, may not adhere strongly to the crystal
surface and may cause erratic readings. For many dielectrics, adhesion is
improved by using alloy crystals.
Gold is preferred for other applications. Contact INFICON for crystal material
electrode recommendations for a specific application. (Refer to section 1.3 on page
1-2.)

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Sputtering Sensor Operating Manual

4.1.3 Maintain the Temperature of the Crystal
Periodically measure the water flow rate leaving the sensor to verify thatthe flow rate meets or exceeds the flow rate value specified on page 1-5.
Depending upon the condition of the cooling water used, the addition of an in-line
water filtering cartridge system may be necessary to prevent flow obstructions.
Many system coaters use parallel water supplies that provide high water flow rates.
With a parallel water supply, an obstruction or closed valve in the pipe that supplies
water to the sensor head may not result in a noticeable reduction of total flow.
Therefore, monitor the flow leaving the sensor.
The crystal requires sufficient water cooling to sustain proper operational andtemperature stability. Ideally, a constant heat load is balanced by a constant flow ofwater at a constant temperature.
INFICON quartz crystals are designed to provide the best possible stability
under normal operating conditions.
No crystal can completely eliminate the effects of varying heat loads. Sources ofheat variation include radiated energy emanating from the plasma.
NOTE: Water cooling temperature near the dew point in the room should be
avoided. Condensation can cause early crystal failures.
It is recommended that water cooling temperature be maintained at 5 to 10°C
above the dew point in the room during a vent of the system. Water coolingtemperature can be lowered to a temperature less than 30°C under vacuum.

4.1.4 Crystal Concerns when Opening the Chamber

4.2 Crystal Replacement Instructions
Follow the steps below to replace the crystals.
NOTE: Review section 4.1, General Precautions, on page 4-1.

CAUTIONTo preserve cleanliness and to maximize crystal
performance, perform all work in a clean room
environment.

1 Wearing clean nylon gloves, grip the body assembly and pull it straight out of
the front cover assembly.

4–2

PN 074-157M

Thick deposits of some materials, such as SiO, Si, and Ni will normally peel off thecrystal when it is exposed to air due to changes in film stress caused by gas
absorption. When peeling is observed, replace the crystal.

Sputtering Sensor Operating Manual

2 Wearing clean nylon gloves, grip the crystal holder and pull it straight out of the
body assembly.

3 Insert the tapered end of the crystal snatcher (PN 008-007) into the ceramic
retainer (see Figure 4-1 (A)), and apply a small amount of pressure. This locks
the retainer to the snatcher and allows the retainer to be pulled straight out.
(See Figure 4-1 (B).)
Figure 4-1 Using the crystal snatcher

(A)

(B)

4 Invert the crystal holder and the crystal will drop out.
5 Prior to installing the new crystal, review section 4.1.1, Handle the Crystal with
Care, on page 4-1.

6 Grasp the edge of the new crystal with a clean pair of Teflon tweezers. Orient
the crystal so the patterned electrode is facing up. Gently insert the edge of thecrystal beneath one of the wire segments that protrude into the crystal cavity.
Release the crystal.
PN 074-157M

7 Replace the ceramic retainer. Initially orient it at an angle to displace the spring
wire segments in the crystal holder.

CAUTION
Do not use excessive force when handling theCeramic Retainer Assembly since breakage may occur.
Always use the crystal snatcher.
To prevent scratching the crystal electrode, do not rotate
the ceramic retainer after installation.

8 Release the crystal snatcher with a slight side-to-side rocking motion. Using thebackside of the crystal snatcher, push on the ceramic retainer to ensure it iscompletely seated.

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Sputtering Sensor Operating Manual

9 Reinstall the crystal holder in the body assembly; push the holder straight inmaking certain that it is completely seated in the body assembly.

10 Reinstall the body assembly into the front cover assembly; push the bodyassembly straight in making certain that it is completely seated in the front
cover assembly. (See Figure 4-2.)
Figure 4-2 Sputtering Sensor assembly

Front
Cover
Assembly(PN 007-047)
Crystal Holder(PN 007-049)
Body Assembly(PN 750-619-G1)

In-Vacuum
Cable(PN 007-044)

Ceramic
Retainer(PN 007-023)

Never deposit material on a sensor unless the crystal
holder and crystal are installed. Material improperly
deposited on the exposed sensor body assembly willcause either complete failure to oscillate or lead topremature crystal failure. Removing the depositedmaterial requires extensive rework and new components.

4–4

PN 074-157M

CAUTIONSputtering Sensor Operating Manual

4.3 Sensor Maintenance4.3.1 Adjusting the Leaf Spring
Sputtering Sensors have two leaf springs with three prongs each:a leaf spring inside the body assembly cavity that provides an electricalconnection to the back of the ceramic retainer. This leaf spring is preformed andheat treated and should not require adjustment.

a leaf spring on the ceramic retainer that provides an electrical connection to
the crystal electrode.

Examine the prongs on the leaf spring positioned on the ceramic retainer. If they
are significantly lower than shown by Figure 4-3, they should be adjusted to anangle of approximately 45 degrees.
NOTE: A leaf spring adjusted to 45 degrees will flatten slightly after being inserted
into and extracted from the crystal holder.

PN 074-157M

Figure 4-3 Ceramic retainer

To adjust the prongs on the leaf spring positioned on the ceramic retainer, touchthe end of the prong with a gloved finger, or grip the prong with Teflon tweezers,
and gently lift it upward. Be careful not to kink the prongs. An ideal bend has asmooth, sweeping shape as shown by Figure 4-4.
Figure 4-4 Leaf spring shape

Avoid
Kinking
Leaf
SpringLeaf Spring

45°

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Sputtering Sensor Operating Manual

4.3.2 Cleaning the Crystal Holder
In dielectric coating applications, the crystal seating surface of the crystal holder
may require periodic cleaning. Since most dielectrics are insulators, any materialbuildup on this surface from a sputtering process can cause a poor electricalcontact between the crystal and the crystal holder. Material buildup will also cause
a reduction in thermal transfer from the crystal to the water-cooled sensor. A poor
electrical contact or poor thermal transfer will result in noisy operation and early
crystal failure.
Cleaning may be accomplished by following three steps:

1 Gently buffing the crystal seating surface in the crystal holder with a white,#7445 Scotch-Brite™ cleaning pad. (See Figure 4-5.)

2 Washing the crystal seating surface in the crystal holder in an ultrasonic bathin soap solution.

3 Thorough rinsing of the crystal seating surface in the crystal holder with
deionized water and drying, or by ultrasonic cleaning and deionized water
rinsing only.
NOTE: The crystal holder seating surface is machined to a very fine finish(16 micro inches rms). This high quality finish is essential to provide goodelectrical and thermal contact with the crystal.

CAUTION
Applying excessive force during cleaning or using overly
abrasive cleaning materials may damage this finish andreduce sensor performance.

PN 074-157M

Figure 4-5 Crystal holder cleaning

Clean or polishthese surfaces.
Remove all oxides.
Do not scratch.

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Sputtering Sensor Operating Manual

4.3.3 Adjusting the Crystal Holder Retainer Spring
If the ceramic retainer is not being retained securely by the crystal holder, or if theceramic retainer if difficult to insert, the retention force of the retainer spring in the
crystal holder can be adjusted by the following procedure.
Tools required Scribe or other pointed tool
 Needle nose pliers (two required)Procedure
1 Position the crystal holder with the crystal aperture oriented downward.
2 Insert the point of the scribe between the inside edge of the crystal holder andeither side of the exposed retainer spring. (See Figure 4-6Figure 4-6 (a).)
Figure 4-6 Location of the transition point

Retainer Spring
Scribe(a)
Crystal Holder(b)Move location of transition point in thisdirection to decrease retainer retention force

Move location of transition point in thisdirection to increase retainer retention force(c)
Location of Transition Point

PN 074-157M

3 Using the scribe, gently remove the retainer spring from its groove in the
4

5

6

7
8

crystal holder.
Refer to Figure 4-6 (b) to determine the direction in which the ‘transition point’
must be relocated, to attain the desired retention forces. Moving this transition
point approximately 1.59 mm (1/16 in.) is generally sufficient.
Grasp the retainer spring, with the pliers, just below the transition point. Use thesecond set of pliers to bend the retainer spring as illustrated by the dashed line
in Figure 4-6 (c) to remove the existing transition point.
Use both pliers to form a new transition point according to Figure 4-6 (b), thus
returning the retainer spring to a shape similar to the solid line delineationof Figure 4-6 (c).
Reinstall the retainer spring into the groove in the crystal holder.
Determine if the retention force is acceptable and that the wire does not impede
crystal insertion. If needed, repeat the adjustment procedure.

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Sputtering Sensor Operating Manual

4.3.4 Lubricating the Shutter Module
The shutter module should be lubricated approximately every 2000 strokes. Failure
to lubricate the shutter module may significantly reduce life of operation or cause
assembly to become inoperative.
For lubrication, use molybdenum disulfide (PN 750-191-G1), provided with each
shuttered sensor, or use Fomblin® E25 (perfluorinated polyether), if appropriate forthe process.

4.4 Spare Parts and Accessories
Front Cover Assembly . . . . . . . . . . . PN 007-047
Body Assembly . . . . . . . . . . . . . . . . PN 750-619-G1
Ceramic Retainer . . . . . . . . . . . . . . . PN 007-023
Crystal Holder. . . . . . . . . . . . . . . . . . PN 007-049
Magnet . . . . . . . . . . . . . . . . . . . . . . . PN 007-009
Leaf Spring . . . . . . . . . . . . . . . . . . . . PN 750-188-P3
Ceramic Insulator . . . . . . . . . . . . . . . PN 750-175-P1
Teflon Screw. . . . . . . . . . . . . . . . . . . PN 082-044
Crystal Snatcher. . . . . . . . . . . . . . . . PN 008-007
Shutter Module. . . . . . . . . . . . . . . . . PN 750-005-G1
Tubing Adapter (#10-32) . . . . . . . . . PN 007-133

PN 074-157M

Crystal Sensor Emulator . . . . . . . . . PN 760-601-G2

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Sputtering Sensor Operating Manual

In-Vacuum Cable
15.2 cm (6 in.). . . . . . . . . . . . . . . PN 321-039-G12
25.4 cm (10 in.) . . . . . . . . . . . . . PN 783-500-023
30.5 cm (12 in.). . . . . . . . . . . . . . PN 007-252
61.0 cm (24 in.). . . . . . . . . . . . . . PN 321-039-G11
76.2 cm (30 in.) . . . . . . . . . . . . . PN 783-500-024
78.1 cm (30.75 in.) . . . . . . . . . . . PN 007-044
91.4 cm (36 in.). . . . . . . . . . . . . . PN 007-059
121.9 cm (48 in.). . . . . . . . . . . . . PN 007-061
152.4 cm (60 in.). . . . . . . . . . . . . PN 321-039-G13
182.9 cm (72 in.). . . . . . . . . . . . . PN 321-039-G14
3.5 m (137.8 in.) . . . . . . . . . . . . PN 321-039-G15
4 m (157.5 in.) . . . . . . . . . . . . . . PN 321-039-G16

PN 074-157M

NOTE: The cable length from the crystal to the oscillator should not exceed
101.6 cm (40 in.) unless a ModeLock instrument is used. Refer to themonitor or controller operating manual for cable length limitations.

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Sputtering Sensor Operating Manual

PN 074-157M

This page is intentionally blank.

4 – 10Sputtering Sensor Operating Manual

Chapter 5
Troubleshooting
5.1 Troubleshooting Tools
If the Sputtering Sensor fails to function, or appears to have diminishedperformance, diagnose the sensor using one or more of the following:

Symptom, Cause, Remedy Chart. (See section 5.1.1.)

Diagnostic Tools. (See section 5.1.2 on page 5-4)

Digital Multimeter. (See section 5.1.3 on page 5-5.)

5.1.1 Symptom, Cause, Remedy Chart
The Symptom, Cause, Remedy chart can help identify the causes of, and solutions
to, sensor problems and related issues. (See Table 5-1.)
Table 5-1 Symptom, Cause, Remedy

SYMPTOMCAUSE

REMEDY

Large jumps of thickness
reading during deposition.

Replace the crystal.
Mode hopping due todamaged or heavily damped
crystal.

PN 074-157M

Crystal is near the end of its
life.
Scratches or foreign particles Clean or polish the crystal
on the crystal holder seating seating surface of the crystal
holder. (Refer to section
surface.
4.3.2 on page 4-6.)
Uneven coating.

Mount the sensor with the
crystal face perpendicular tothe stream of material
sputtered from the target.
(Refer to section 2.2 on page
2-3.)

Particles on the crystal.

Remove source of particles
and replace the crystal.

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Sputtering Sensor Operating Manual
Table 5-1 Symptom, Cause, Remedy (continued)

SYMPTOMCAUSE

REMEDY

Crystal ceases to oscillate
during deposition before it
reaches its “normal” life.

Damaged crystal.

Replace the crystal.

Deposition material on
crystal holder opening istouching the crystal.

Remove material buildupfrom the crystal holder
opening, being careful not toscratch the crystal seating
surface. (Refer to section
4.3.2 on page 4-6.)

Deposition material on
crystal holder opening ispartially masking the crystal.
Short crystal life

Crystal life is highly dependent on process conditions ofrate, location, material, and residual gas composition.

Crystal does not oscillate or Damaged crystal.
oscillates intermittently (bothSensor or feedthrough has
in vacuum and in air).
electrical short or open, or
poor, electrical connections.

Replace the crystal.
Check electrical continuity
and isolation of sensor andfeedthrough. (See section
5.1.3 on page 5-5.)

Crystal oscillates in vacuum Crystal is near the end of its Replace the crystal.
but stops oscillation after
life; opening to air causes
open to air.
film oxidation, which
increases film stress.

Flow hot water through thesensor when the vacuum
chamber is open.
Poor thickness
reproducibility.

Erratic sputteringcharacteristics.

Check the sputtering systemfor proper operating
conditions.

Material does not adhere to
the crystal.

Check the cleanliness of thecrystal.
Use gold or silver or alloy
crystals, as appropriate.
Sputter an intermediate layerof proper material on the
crystal to improve adhesion.

5–2

PN 074-157M

Excessive moisture
Turn off cooling water toaccumulation on the crystal. sensor before venting
vacuum chamber.

Sputtering Sensor Operating Manual
Table 5-1 Symptom, Cause, Remedy (continued)

SYMPTOMCAUSE

REMEDY

Check and clean the crystal
Crystal is not properly
Thermal instability: largechanges in thickness reading seated, causing poor thermal seating surface of the crystal
holder. (Refer to section
transfer from crystal toduring source warm-up
4.3.2 on page 4-6.)
crystal holder.
(usually causes thickness
reading to decrease) and
Crystal not properly seated. Check and clean the crystal
after the termination ofseating surface of the crystal
deposition (usually causes
holder. (Refer to section
thickness reading to
4.3.2 on page 4-6.)
increase).
Excessive heat applied to the If crystal heating is due tocrystal.
radiation from the plasma,
move sensor farther awayfrom target.
Use Low Thermal Shockcrystals (PN SPC-1157-G10)
for better thermal stability.

PN 074-157M

If crystal heating is due toelectron flux, adjust themagnet to deflect electrons.
(Refer to section 2.2.1 on
page 2-6.)
No cooling water.

Check cooling water flow
rate.

External magnetic fieldinterferes with the sensor
magnetic field.

Rotate the sensor magnet toa proper orientation withrespect to the external
magnetic field. (Refer tosection 2.2.1 on page 2-6.)

Sensor magnet defective(cracked or demagnetized)

Check sensor magnet fieldstrength; if a gaussmeter isavailable, the maximum fieldat the center of the opening
should give a reading of
700 gauss or greater.

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Sputtering Sensor Operating Manual

5.1.2 Diagnostic Tools
The following diagnostic tools can be used to determine if a crystal fail condition isdue to the Sputtering Sensor or the instrument the sensor is used with:

PN 782-902-023 oscillator with 5.5 MHz test crystal. (See section 5.1.2.1.)

OSC-100 oscillator test function. (See section 5.1.2.2.)



PN 760-601-G2 Crystal Sensor Emulator. (See section 5.1.2.3.)

XIU test function. (See section 5.1.2.4.)

5.1.2.1 PN 782-902-023 Oscillator with 5.5 MHz Test Crystal

1 Disconnect the short BNC cable from the BNC connector on the Sputtering
Sensor feedthrough.

2 Connect the 5.5 MHz test crystal (included with oscillator) to the short BNC
cable connected to the oscillator.


If the crystal fail disappears within 5 seconds, the Sputtering Sensor is thecause of the crystal fail.



If the crystal fail is still present after 5 seconds, the controller or monitor, theoscillator, or a cable is the cause of the crystal fail. Refer to the monitor orcontroller operating manual.

5.1.2.2 OSC-100 Test Function

1 Disconnect the short BNC cable from the BNC connector on the Sputtering
Sensor feedthrough.



If the crystal fail disappears within 5 seconds with the button depressed, theSputtering Sensor or the short BNC cable is the cause of the crystal fail.



If the crystal fail is still present after 5 seconds with the button depressed,
the controller or monitor, the oscillator, or a cable is the cause of the crystal
fail. Refer to the monitor or controller operating manual.

5.1.2.3 PN 761-601-G2 Crystal Sensor Emulator

1 Disconnect the short BNC cable from the BNC connector on the Sputtering
Sensor feedthrough.

2 Connect the Crystal Sensor Emulator to the short BNC cable connected to the
XIU or oscillator.

5–4



If the crystal fail disappears within 5 seconds, the Sputtering Sensor is thecause of the crystal fail.



If the crystal fail is still present after 5 seconds, the controller or monitor, theoscillator or XIU, or a cable is the cause of the crystal fail. Refer to themonitor or controller operating manual.

PN 074-157M

2 Depress the test button on the OSC-100 oscillator.

Sputtering Sensor Operating Manual

5.1.2.4 XIU Test Function
The XIU Test function is a feature of IC/5, Cygnus, IC6, Cygnus 2, and XTC/3
controllers. Refer to the controller operating manual for instructions on using
the XIU test function.

5.1.3 Digital Multimeter
A useful tool for diagnosing sensor problems is the Digital Multimeter (DMM).
To isolate the cause of a sensor problem, perform electrical isolation and continuity
checks, starting with the Electrical Isolation Check, section 5.1.3.1.
5.1.3.1 Electrical Isolation Check

1 Remove the crystal holder from the body assembly.
2 Disconnect the short BNC cable from the feedthrough.
3 Select the DMM ohmmeter function and high resistance (MΩ) scale.
4 At the feedthrough, measure resistance between center contact and shield of
the BNC connector. (See Figure 5-1.)


If resistance is more than 10 MΩ, electrical isolation is good. Go to section
5.1.3.2, Electrical Continuity Check, on page 5-7.



If resistance is less than 10 MΩ, continue to step 5.

PN 074-157M

Figure 5-1 Resistance check

5 Disconnect the in-vacuum cable from the body assembly.

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Sputtering Sensor Operating Manual

6 Measure resistance between center contact and shield of the BNC.


If resistance is less than 10 MΩ, continue to step 7.



If resistance is more than 10 MΩ, continue to step 6a.

6a Measure resistance between the center contact and threads of the coaxial
connector on the body assembly (shown by Figure 5-2). If resistanceacross the coaxial connector is less than 10 MΩ, examine the bodyassembly and coaxial connector for the cause of the low resistance.
Contact INFICON if cause of low resistance is not found. (Refer to section
1.3, How to Contact INFICON, on page 1-2.)
Figure 5-2 Body assembly isolation check

7 Disconnect the in-vacuum cable from the feedthrough.


If resistance is less than 10 MΩ, continue to step 8a.



If resistance is more than 10 MΩ, continue to step 9.

8a Examine the feedthrough for the cause of the low resistance. Contact
INFICON if cause of low resistance is not found. (Refer to section 1.3, How
to Contact INFICON, on page 1-2.)

9 Replace the in-vacuum cable.
10 Measure resistance between center contact and shield of the BNC.

5–6



If resistance is more than 10 MΩ, electrical isolation is good. Go to section
5.1.3.2, Electrical Continuity Check, on page 5-7.



If resistance is less than 10 MΩ, contact INFICON.

PN 074-157M

8 Measure resistance between center contact and shield of the BNC.

Sputtering Sensor Operating Manual

5.1.3.2 Electrical Continuity Check

1 Select the DMM ohmmeter function and a low resistance scale.
NOTE: The resistance specifications in the following steps do not take into
account the resistance of the Digital Multimeter probes. Touch theprobe tips together and note the resistance reading. Compensate forprobe resistance by subtracting probe resistance from resistancemeasurements or by zeroing the ohmmeter while the probes aretouching.

2 Remove the crystal (if installed) from the crystal holder and reinstall the ceramic
retainer into the crystal holder.

3 Measure the resistance between the ceramic retainer and crystal holder. (SeeFigure 5-3.)


If resistance is less than 0.3 Ω, continue to step 4.



If resistance is more than 0.3 Ω, correct the cause of the high resistance
before continuing to step 4. Check the following:

Cleanliness of the crystal seating surface inside the crystal holder.
(Refer to section 4.3.2, Cleaning the Crystal Holder, on page 4-6.)

Angle of the leaf spring on the ceramic retainer. (Refer to section 4.3.1,
Adjusting the Leaf Spring, on page 4-5.)



Verify that the leaf spring and circular plate on the ceramic retainer aretightly held together by the rivet.

PN 074-157M

Figure 5-3 Resistance between ceramic retainer and crystal holder

4 Install the crystal holder with ceramic retainer and without the crystal into thebody assembly. Make sure the crystal holder is held securely in the bodyassembly.

5 At the feedthrough, measure resistance between center contact and shield of
the BNC connector. (Refer to Figure 5-1.)

5–7

Sputtering Sensor Operating Manual

If resistance is less than 1 Ω, electrical continuity is good.



If resistance is more than 1 Ω, check the following before continuing tostep 6:


Verify that in-vacuum cable connections to body assembly andfeedthrough are tight. Do not overtighten.

Remove the crystal holder and examine the leaf spring inside the bodyassembly. The three prongs on the leaf spring should reach toapproximately 1 mm (0.039 in.) from the top of the body assembly. To
check prong height, place a straight edge across the body assembly.
(See Figure 5-4.) If the prongs are not high enough, gently bend eachprong upward using a gloved finger or plastic tweezers.

Figure 5-4 Leaf spring

6 Reinstall the crystal holder with ceramic retainer into the body assembly.


If resistance is less than 1 Ω, electrical continuity is good.



If resistance is more than 1 Ω, continue to step 8.

8 Disconnect the in-vacuum cable from the body assembly and remove thecrystal holder.

9 Measure resistance between the center contact of the coaxial connector andleaf spring (see Figure 5-5) being careful to place the probe at the base of theleaf spring to prevent damage to the prongs of the leaf spring.


If resistance is more than 0.3 Ω, continue to step 9a.



If resistance is less than 0.3 Ω, continue to step 10.

9a Examine the solder connection between the leaf spring and coaxial
connector. Contact INFICON if the cause of the high resistance is notfound. (Refer to section 1.3, How to Contact INFICON, on page 1-2.)

5–8

PN 074-157M

7 Measure resistance between center contact and shield of the BNC.

Sputtering Sensor Operating Manual
Figure 5-5 Body assembly continuity check

10 Disconnect the in-vacuum cable from the feedthrough.
11 At the feedthrough, measure resistance between the center contacts of the
BNC and coaxial connectors. (See Figure 5-6.)

PN 074-157M

Figure 5-6 Feedthrough Resistance

If resistance is more than 0.3 Ω, contact INFICON. (Refer to section 1.3,
How to Contact INFICON, on page 1-2.)



If resistance is less than 0.3 Ω, continue to step 12.

12 Replace the in-vacuum cable.

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Sputtering Sensor Operating Manual

13 Reinstall the crystal holder with ceramic retainer and without the crystal into
the body assembly.

14 Measure resistance between center contact and shield of BNC.
If resistance is less than 1 Ω, electrical continuity is good.



If resistance is more than 1 Ω, contact INFICON. (Refer to section 1.3, How
to Contact INFICON, on page 1-2.)

PN 074-157M



5 – 10