DIGIMICROMF-1001
User's Manual﻿Thank you for purchasing the Nikon DIGIMICRO MF-1001.
Read thoroughly this user's manual before starting operation to be sure of getting optimum performanceand longer service life from the unit.
• Reproduction of the contents of this manual, in whole or in part, without permission of Nikon is prohibited.
• The information contained in this manual is subject to change without notice.
• This manual has been prepared with great care. If you have any questions or comments, or find any errors,
please contact your local Nikon representative.
• When you use the product in combination with peripheral devices, read the relevant user's manuals.
• This manual and the Nikon product(s) (hereinafter “the product(s)”), including technologies and software,described in this manual are under export restriction. The export of this manual and the product is controlled
by the Japanese Foreign Exchange and Foreign Trade Act and international export control regimes. They
shall not be exported without authorization from the appropriate governmental authorities.

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About WARNING and CAUTION symbols used in the manual1

About WARNING and CAUTION symbols used in the manual

Nikon products are designed with full consideration of safety. However, improper use or failure to observe
precautions may result in injury or damage to property. Thoroughly read this user's manual before you use theproduct, and use the product appropriately. We recommend that you download or bookmark the manual so thatyou can refer to it whenever necessary.
This manual uses the following symbols to highlight what requires special attention for safety. Be sure to follow
the instructions with those symbols.

SymbolDescription

WARNING

Failure to follow the instructions may result in death or a serious injury.

CAUTION

Failure to follow the instructions may result in injury or property damage.

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WARNING / CAUTIONWARNING
1.

Purpose of Using the ProductThis product is precision measuring equipment. Do not use the product for any purposes other thanits intended use.

2.

Do Not Disassemble or Modify
Do not disassemble or modify the product. Such actions may cause a malfunction and/or electricalshock. If you notice an abnormality, contact your local Nikon representative.

3.

Do Not Splash Water or Allow Foreign Matter to Enter the ProductTo prevent the product from a failure or abnormal heat generated by a short circuit, never wet theproduct or any devices used with it or allow them to be contaminated by foreign matter. If they should
get wet or foreign matter such as a piece of paper should get inside the product or peripheraldevices, immediately turn off their power supplies, and then remove the AC power cord of the AC
adapter. Avoid operating the product in this condition and contact your local Nikon representative.

4.

Do Not Excessively Bend or Twist the Cables
Do not excessively bend or twist the cables. Such actions may damage the cables, causing anignition or fire.

CAUTION1.

 urn the Power of the Peripheral Devices OFF before Installation or Cable Connection/
T
Disconnection
To prevent any failure or malfunction, always turn off the power of the peripheral devices when
installing the product or connecting or removing the cables.

2.

Precautions for Installation and Storage• Be careful not to get your fingers or hands pinched.
• This product is precision equipment. In order to prevent any failure and maintain accuracy, always
handle the product with sufficient care and avoid applying a shock or strong vibrations.
• If the product is not to be used for a long time, turn off the power switches of the peripheraldevices and remove the AC power cord of the AC adapter from the outlet.

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Notes on the use of the product1

Notes on the use of the productHandle with care
• This product is precision measuring equipment. Handle the product carefully to avoid applying excessive
force or shock.
• To make a continuous measurement with the product connected to an automated machine, secure the tip of
the spindle to the surface to be measured, where care should be taken not to allow radial load in excess ofthe specified value to apply to the spindle.
• Avoid tracing the surface to be measured with the use of only measuring force generated by the product.
• Contaminated spindle may cause a malfunction. Wipe the dirty spindle with a dry cloth.

Installation
Install the product in a stable, vibration-free place. Do not install the product near direct sunlight, in anexcessively dusty environment, or in a place subject to extreme temperature change. Do not use the product inan environment that exceeds the operating temperature range (0°C to 40°C).

Disposal
When disposing of the product, follow the laws and regulations of your country or region.

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Table of Contents

Table of Contents
About WARNING and CAUTION symbols used in the manual...................................

ii

WARNING.............................................................................................................. iii
CAUTION............................................................................................................... iii
Notes on the use of the product.................................................................................. iv
1

Names and Functions of Components....................................................................................................... 12System Configuration................................................................................................................................. 23

2.1

Configuration of DIGIMICRO Series................................................................................................ 2

2.2

Configuration example..................................................................................................................... 2How to Use the DIGIMICRO...................................................................................................................... 3
3.1

Example of general measurement................................................................................................... 3

3.2

Direction of measurement................................................................................................................ 4

3.3

Probe............................................................................................................................................... 4

3.4

To reduce measuring force.............................................................................................................. 44Options....................................................................................................................................................... 55

Troubleshooting.......................................................................................................................................... 66

Performance and Specifications................................................................................................................ 77

Output Connector....................................................................................................................................... 98Accessories................................................................................................................................................ 99Repair......................................................................................................................................................... 1010

Contact information.................................................................................................................................... 10

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1 Names and Functions of Components

1 Names and Functions of ComponentsCasing
Please do not rotate the casing while thestem is fixed.
There is a possibility of malfunctioning.

Stem
Secured to the arm in the process ofinstallation.

SpindleLift lever
Used to manually move the spindle. You
can turn it to secure the spindle in any
direction, or remove it by loosening its
clamp screw.

Probe
The probe mount conforms to dial gauge
JIS B 7503, and allows use of other(optional) probes. Use care not toforcibly turn the spindle or damage it
when replacing the probe.

Figure 1 Component names

42Cable length: 300 +30–10SR1.2396122121153
DIGIMICRO MF-1001
MADE IN
JAPANNｏ.

15MSIP-REM-NEc-MF501

301(Unit: mm)

Figure 2 Outline dimensions

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1

2 System Configuration

22 System Configuration

2.1 Configuration of DIGIMICRO Series
Counter
MFC-200
MFC-101A*
DIGIMICRO Stand
MS-12C/MS-22S/
MS-32G/MS-41G

DIGIMICRO
MF-1001
Probe

Pin, flat, plastic, off-center,or roller probe

MF extension cable
2 m (optional)

Counter
TC-200
TC-101A** Discontinued modelNote:• Counters, DIGIMICRO Stands, probes, and cables other than the standard probe are optional.
To purchase optional components, contact your local Nikon representative from which you
purchased the DIGIMICRO.
For details about connection with other devices, contact your local Nikon representative as well.

Figure 3

2.2 Configuration example
DIGIMICRO
MF-1001

Counter
MFC-200(optional)

MF extension cable
2 m (optional)

Counter
TC-200(optional)PO
OF WER
F
ON

DIGI

MICRO

TC-200DIGIMICRO Stand(optional)

FUNC

RESE

With MFC-200 connectedT

With TC-200 connected

Figure 4 With the Counter connected

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3 How to Use the DIGIMICRO

3

3 How to Use the DIGIMICRO

3.1 Example of general measurement

Arm

Counter
MFC-200(optional)

Arm clamp screw
DIGIMICRO clamp screw

Surface plate

Lift lever
DIGIMICRO Stand(optional)

Figure 5 With the DIGIMICRO MF-1001 and Counter MFC-200 (optional) mounted
to the DIGIMICRO Stand (optional)(1)

Securing the DIGIMICROCAUTION• When securing the DIGIMICRO, see the DIGIMICRO Stand user's manual.
• Do not exert excessive force when tightening the stem. Overtightening might cause a failure suchas impaired spindle operation.
• Do not tighten the arm clamp screw without the DIGIMICRO installed. Failure to follow this
instruction might cause a failure in the DIGIMICRO Stand and the product.
Secure the stem of the DIGIMICRO to the arm by tightening the clamp screw.
Before measuring, be sure to secure the stem to the arm.
(2)

Moving the DIGIMICROCAUTION• Always tighten the arm clamp screw with the arm supported. The DIGIMICRO may fall together
with the arm unless you support the arm.
Move the DIGIMICRO together with the arm until the probe comes into contact with the surface plate onthe DIGIMICRO Stand and secure the DIGIMICRO by tightening the arm clamp screw.

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3 How to Use the DIGIMICRO(3)

Turning off the power supply
Turn off the power supply of the connected devices.
The product does not have a power supply. For details about how to operate the power supply of theconnected devices, see the relevant user's manual.

(4)

Zero reset
To reset the DIGIMICRO to zero, press the Reset switch of the DIGIMICRO Counter (optional) with theprobe held against the surface plate.
For details about how to perform zero reset, see the user's manual of the Counter (optional).

(5)

Turning on the power supply
Turn on the power supply of the connected devices.
The product does not have a power supply. For details about how to operate the power supply of theconnected devices, see the relevant user's manual.

(6)

Measurement
Notes:• To assure accurate measurement, avoid applying excessive shock on the end of the probe.
• If the spindle is moved too quickly, an overspeed error occurs.
• Not taking into consideration factors such as temperature and dust in the air may lead to unforeseenmeasurement errors.
• When conducting a high-precision measurement of a mirrored plane surface like a block gauge, preparea reference plane made from the same materials and with the same surface state. Thoroughly clean thisreference plane and the measuring object surface and then bring them into close contact (linking) tocarry out measurement.
Raise the spindle by holding the hook on the lift lever with your hand, put a piece to be measured under thespindle, and then slowly lower the spindle until the probe comes into contact with the surface to bemeasured.

3.2 Direction of measurement
The spindle movement can be set to lateral or downward direction. Note that the measuring force varies with thedirection and spindle position.

3.3 Probe
The probe is replaceable with other probes that conform to dial gauge JIS B 7503.

3.4 To reduce measuring force
When the product is only used in a downward direction, it is possible to modify the product so that the measuringforce is reduced to approximately 0.44 N. If you require this modification, please contact your local Nikon
representative.

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4 Options

44 Options

Options shown in Figure 3 and Figure 4 are available.
• Probes (optional)
Probes shown in Figure 6 are available in addition to the standard probe.
Pin measuring probe

Flat measuring probe

Plastic measuring probe

Plastic

Off-center measuring probe

Roller measuring probe
Kunurled head(Unit: mm)

Figure 6• DIGIMICRO Stand (optional)
Maximum measuring height

Size of surface plate

MS-12CApprox. 150 mm

111 mm x 111 mm

MS-22S

Approx. 200 mm

150 mm x 150 mm

MS-32G

Approx. 170 mm

120 mm x 180 mm

MS-41G

Approx. 290 mm

400 mm x 300 mm• Counter (optional)
MFC-200
TC-200• Extension cable (optional)
MF extension cable (2 m)

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55 Troubleshooting

55 Troubleshooting

Should the product fail to operate properly, locate a possible cause of the trouble by referring to the table below.
Table 1Trouble

Check to see if:• Spindle binds.

• Spindle is not dirty.

• The motion of spindle suddenly
becomes stiff.

• Excessive radial load is not applied to the spindle.

• Measurement error• The measuring probe is securely installed.

• Bad repeatability• The stem is securely installed.

• The stem has not been overtightened.

• The DIGIMICRO, DIGIMICRO Stand, and other components are installedproperly.
• Excessive load is not applied to the DIGIMICRO.
• Faulty counting• Power switch of the Counter is turned on.

• A message. “Error X”, appears
frequently.

• The DIGIMICRO and Counter are properly connected.
• Travel speed is appropriate.
• There are no sources generating noise in the vicinity of the product.
• The cable is not defective.
• The dedicated AC adapter for the DIGIMICRO Counter in use is used.

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66 Performance and Specifications

66 Performance and Specifications

Recommended minimum reading		

: 0.1 μm

Measuring range				: 100 mm

Accuracy						 : 3 μm at 20°C
Response speed (at 0.1 μm resolution) : Max. 500 mm/s
Measuring direction				: Any direction
Measuring force				: Downward 1.23 to 1.81 N (Modifiable to approx. 0.44 N. Contact yourlocal Nikon representative from which you purchased theDIGIMICRO.)
Lateral 0.64 to 1.23 N

Weight						 : 0.48 kg
Allowable spindle load			: Radial 0.98 N (100 gf)
Twisting moment (4.9 mN•m)

Probe						: Probe conforming to dial gauge JIS B 7503

Temperature					: 0 to 40°C in use-20 to 60°C in storage

Conforming standards			

: CEEMC Directive
RoHS Directive
This product conforms to EN standards and shows the CEMarking.
This product has been tested and found to comply with thelimits for a Class A device, pursuant to EMC DIRECTIVE.
These limits are designed to provide reasonable protection
against harmful interference when the equipment isoperated in a commercial environment. This product mustnot be used in residential areas.

KC사용자안내문이 기기는 업무용 환경에서 사용할 목적으로 적합성평가를받은 기기로서 가정용 환경에서 사용하는 경우 전파간섭의우려가 있습니다 .

WEEE
This symbol indicates that this product is to be collectedseparately.
The following apply only to users in European countries.
• This product is designated for separate collection at an
appropriate collection point. Do not dispose of as
household waste.
• For more information, contact the retailer or the local
authorities in charge of waste management.

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6 Performance and Specifications							

UKCA

FCC
This device complies with part 15 of the FCC Rules.
Operation is subject to the following two conditions: (1) This
device may not cause harmful interference, and (2) thisdevice must accept any interference received, includinginterference that may cause undesired operation.
CAN ICES-3 (A)/NMB-3 (A)

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7 Output Connector / 8 Accessories

77 Output Connector• Model: RP17A-13P-12PC (manufacturer: Hirose Electric Co., Ltd.)		
12-pin circular connector (plug)• Matching connector: RP17A-13RA-12SD (manufacturer: Hirose Electric Co., Ltd.) (receptacle)
Table 2 Pin assignment and signal names

8Pin No.

Signal name

Description

1

FG

Frame ground

2N.C.

Open

3

A

Signal phase A

4

Vref

Signal center level

5BSignal phase B

6

Vref

Signal center level

7N.C.

Open

8N.C.

Open9L+Power supply for LED

100V0V power supply

11Vcc+12V power supply

120V0V power supply

8 Accessories• Standard probe x 1• Lift lever x 1• Safety Precautions x 1• Product warranty x 1

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99 Repair / 10 Contact information

99 RepairIf you need repair, contact your local Nikon representative.

Repairs covered by the warranty• A natural failure occurred within the warranty period (one year after the date of purchase), and the productwarranty is present.
• After repair, the same part failed in normal handling conditions within six months after the date of return fromthe previous repair, and the relevant documentation for the previous repair is present.
Any other cases constitute out-of-warranty repairs. Store the product warranty so that it is not lost.
For details, contact your local Nikon representative.

1010 Contact information
Table 3 Contact information
RegionCompany name

Address

Phone

Japan

NIKON CORPORATION

Shinagawa Intercity Tower C, 2-15-3,Konan, Minato-ku, Tokyo 108-6290, Japan+81-3-6433-3726

ChinaNIKON PRECISION(SHANGHAI) CO., LTD.

11-12F, Tower 5, Crystal Plaza No. 36, Ping
Jia Qiao Road, Pudong New District,
Shanghai 200126, China+86-21-6841-2050

Korea

NIKON INSTRUMENTS
KOREA CO., LTD.

21F, City Air Tower, 36, Teheran-ro 87gil,
Gangnam-gu, Seoul, 06164, South Korea+82-2-6288-1900

Europe (Belgium)

NIKON METROLOGYEUROPE NV

Interleuvenlaan 86 3001 Leuven Belgium+32-16-74-01-01

Europe (UK)NIKON METROLOGY UK LTD.

Nottingham EMA, Argosy Road Castle
Donington Derby DE74 2SA United
Kingdom+44-1332-811-349

USANIKON METROLOGY, INC.

12701 Grand River, Brighton Avenue, MI48116 U.S.A.

+1-810-220-4360

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3rd EditionEC16E
July 2024

1- 5-20, Nishioi, Shinagawa-ku, Tokyo, 140- 8601, Japan