Powerful Data Management
For Enhanced Productivity

FabGuard®
Integrated Process Monitor

Making Your Fab’s Data Work For You
The shift to smaller geometries and more complex film stacks
makes precise process control more vital to profitability than everbefore. These cost pressures make it critical to maximize fabproductivity, both by reducing the number of scrapped wafers andby maximizing equipment utilization and throughput.
FabGuard Integrated Process Monitor (IPM) helps semiconductor,
display and solar manufacturers meet these challenges
by enhancing tool productivity, providing process control,FEATURES AT A GLANCE
Run-by-run and real-time analysis for fault detection■ 

to increase process yield and optimize throughput
Automated and event-based data collection to optimize■ data collection based on the tool state
Data combined from multiple sensors reduces hardware■ and reducing losses from process drift, contamination, tool

redundancy while allowing all data from an entire tool,

malfunction, or unnecessary test wafers. FabGuard accomplishes

process or fab to be integrated for convenient accessthis by tapping into a rich, underutilized resource—the vastand analysis

amount of data generated by tools and in-situ sensors—andusing that data in more innovative and comprehensive ways thanpreviously possible.

Single user interface for all tool data reduces■ 

learning curve
Classification of faults for quicker response to problems,■ Fabguard’s sophisticated data analyses yield new inisghts into tooland process performance.

minimizing downtime
Overall status of tool/process health to aid preventive■ maintenance personnel

FABGUARD CONTINUOUSLY MONITORSAND CONTROLS YOUR PROCESSFabGuard begins by automatically collecting all available andrelevant data, from INFICON sensors, third party sensors andthe built-in tool sensors used for real-time control of the process.
Data is analyzed in real-time and stored in an SQL-searchable
database such as Microsoft SQL Server, Oracle or PostGreSQL.
Engineers can view all information through a single, easy-to-use
interface which is consistent throughout the application. Presenting
data from all types of sensors in a consistent format improves thelearning curve, while reducing hardware redundancy by doing thework of multiple equipment from multiple vendors.
FabGuard analyzes the data using sophisticated physical models
and statistical techniques. Techniques include: Real-Time Expert
System, Statistical Process Control, and Multivariate Analyses.
These robust techniques allow FabGuard to reliably detect
process excursions that can then be used for process control.

2

PINPOINTING PROBLEMS TO MINIMIZEWAFER SCRAP AND DOWNTIME
If a process excursion does occur or isimpending, FabGuard can immediately activate
an alarm or alert the appropriate person, thenshut down the tool when the excursion event isdetected. FabGuard also classifies the fault bylabeling the analysis, thereby creating a toolspecific or process-specific library of faults which
can be linked to factory Out-of-Control Action
Plans. This minimizes downtime by helping
maintenance personnel locate and correct theproblem faster. FabGuard’s comprehensive
database also provides an overview of the healthof the tool and the process, keeping maintenancepersonnel in tune with tool performance andreducing unscheduled tool downtime.
MANAGE A PROCESS, A TOOL,OR YOUR ENTIRE FAB

UNMATCHED EXPERIENCE AND SUPPORTMAKE INFICON THE RIGHT CHOICE

FabGuard IPM’s advanced data analysis creates reliable information

INFICON residual gas analyzers, optical sensors, thin filmthat can be used for: advanced process control (e.g., endpoint

monitors/controllers, vacuum gauges, helium leak detectors,detection), statistical process control (SPC) techniques for run-by-and software are used in fabs throughout the world to makerun fault detection and even real-time fault detection. As a result,processes more precise, productive and reliable. Our experience

processes become more stable and problems are detected sooner.

in developing both leading-edge sensors and software puts us
in a strong position to integrate various data sources and use

By having access to all the data, FabGuard is able to provide

the data in much more powerful ways than can be achieved by

new insights into the processes and equipment not otherwise

handling the data from each source separately.

available to engineers. The information and integration
capabilities of FabGuard can also be extended to the entire

The highly trained people in our global network of sales andfab. More sophisticated applications include comparing tools toservice offices will be with you at each step, from helping you

assist in tool matching and promoting consistent processing, anddetermine how FabGuard can best meet your needs, throughtracking process performance across multiple tools.

installation, to providing responsive, ongoing support.

FabGuard IPM is part of the FabGuard
Suite of products, designed to workwith you as your data gathering, sensor
integration, and analysis system.

3®

www.inf icon.com

reach u s@in f ico n .co m

FabGuard is a registered trademark of INFICON.
Due to our continuing program of product improvements, specifications are subject to change without notice.
alba60e1-b-a©2015 INFICON