Information on preventing extensive equipment and environmental damage.

• make any kind of changes (modifications, alterations etc.)
to the product• use the product with accessories not listed in the productdocumentation.

Pollution degree
Protection category

110

The end-user assumes the responsibility in conjunction withthe process media used.
Gauge failures due to contamination or wear and tear, as
well as expendable parts (filament), are not covered by thewarranty.

19

Caution

7.5

Information on correct handling or use. Disregard can leadto malfunctions or minor equipment damage.

Personnel Qualifications

Incl. EU Declaration of Conformity

tinb71e1-a(2023-09)

Skilled personnel
All work described in this document may only be carriedout by persons who have suitable technical training and thenecessary experience or who have been instructed by theend-user of the product.

General Safety Instructions• Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of theprocess media due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do andconsider the safety instructions in this document.

INFICON AG, LI-9496 Balzers

Model:PN:• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions whenhandling contaminated parts.
Communicate the safety instructions to all other users.

SN:

ValidityThis document applies to products with the following partnumbers:
PSG010(W filament)

350-400
PSG017(Ni filament)

350-430
350-431(DN 10 ISO-KF)

PSG018(W filament)

350-420350-424350-423

Technical Data
Measurement principle
Display range(air, O2, CO, N2)
Measurement range(air, O2, CO, N2)
Accuracy PSG010

Accuracy PSG018
At room temperature andcable length <20m

65.5
DN 16 ISO-KF

1×10 … 100 mbar
up to factor 2 of reading in therange of ≥100 mbar≈±35% of reading in the rangeof 1×10-2 … 100 mbar

Materials PSG010
Inside wall of measurement
chamber, flangeElectrical feedthroughFilterFilament / filament holder
Materials PSG017
Inside wall of measurement
chamber, flange, diaphragmElectrical feedthroughFilament / filament holder
Materials PSG018
Inside wall of measurement
chamber, flange, diaphragmElectrical feedthroughFilament / filament holder≈±2% of reading in the range
of 1×10-2 … 100 mbar≈±5% of reading in the range
of 1×10-2 … 100 mbar

AlMgSiFPM
sintered bronze
W / Ni

Overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures.
Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centeringring.

WeightPSG010
PSG017, PSG018≈0.14 kg
≤1.2 kg

H2 He Ne

8642Indication range
above 10-2 mbar

864100–1×106 Gy

10–1AirO2CON2CO2ArXe

2864864

Watervapor

Intended Use
The Pirani Gauges PSG010, PSG017 and PSG018 havebeen designed for vacuum measurement of gases in thepressure range of 8×10-4 … 1000 mbar.
They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmosphericoxygen) within the explosion range.
The gauges can be operated in connection with the INFICON
VGC094 total pressure gauge controller.

10–3
10–3 20 … +70°C
0 … +120 °C 1)
0 … +120 °C 1)

4 6 10–2 2

4 6 10–1 2

4 6 100 2

4 6 101 2

R1: Filament
R2: Temp. compensator
R1

4 6102

1

R2

52

NTC

4351

4

CautionVacuum component
Dirt and damages impair the function of thevacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

PSG017, PSG018

Connections viewed fromthe outsideDirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

red mark

R1R2NTC

13424132

R1: Filament
R2: Temp. compensatorpeff (mbar)

Calibration factors for pressure range below 1 mbar

+100 °C+250 °C 2)+130 °C+70 °C–40 … +80 °C

PSG010Caution2

Admissible Temperatures
Operation
PSG010
PSG017
PSG018
Bakeout
PSG010
PSG017, PSG018
Filament
PSG010, PSG018
PSG017
StorageThe gauge is connected to the controller via a measurement
cable (→ "Accessories").

28642

Before connecting or disconnecting the product, turnoff the control system.

• For gauges with a KF flange, use a conductive metallic clamping ring

Freon 12Kr

2

10–2

Power Connection• CF connection fulfill this requirement

Indicated pressure (gauge calibrated for air)p (mbar)Protective lid

CF-F vacuum connection

Protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to thegrounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:

Gas Type Dependence

stainless steel
Al2O3
W / Nidepending on the measurement unit

CF-F flange
Hex. bolts with nuts
DN 16 CF: M4×20 (6 pcs.)
DN 40 CF: M6×35 (6 pcs.)

Overpressure in the vacuum system >1 bar
Injury caused by released parts and harmcaused by escaping process gases can result if
clamps are opened while the vacuum system ispressurized.
Do not open any clamps while the vacuum system is pressurized. Use the type clamps which
are suited to overpressure.

DANGER101≤9 bar (limited to inert gases)

Clamp
ISO-KF vacuum connection

DANGER

102

stainless steel
Al2O3
Ni / Ni

Seal with centering ringSeal

DN 16 CF-F
DN 40 CF-F≈±10% of reading in the range
of 1×10-2 … 100 mbar

Within the entire specified
range of temperatures andcable length

PSG0188-2≈±20% of reading in the range
of 1×10-2 … 100 mbar

Repeatability with air
PSG010, PSG017

DANGER140

thermal conductance according to Pirani
8×10-4 … 1000 mbar

At 0 … +70°C and within theentire range of specified
cable length

Overpressure
Cable length
Gauge - controller

The part number (PN) can be taken from the product nameplate.
We reserve the right to make technical changes without priornotice.
All dimensions are indicated in mm.

• Take appropriate measures (e.g. shut off gas
supply, extraction, leak test) to avoid hazards
or damage due to leaking process media.

PSG017, PSG018≈±20% of reading in the range
of 1×10-1 … 10 mbar
up to factor 2 of reading in therange of ≤10-2 mbar

Radiation resistancePSG010
PSG017, PSG018(DN 16 ISO-KF)(DN 16 CF-F)(DN 40 CF-F)

DANGERDN 10 ISO-KF

Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient
reference copy that information into the space provided
below.

Vacuum Connection• Avoid high-intensity mechanical, chemical orthermal impacts and overpressure in thevacuum system.

ø50

Operating Manual

ISO-KF flange

Installation

Leaking process media
High-intensity mechanical, chemical or thermal
impacts can cause leaks in the measuring
sensor. Process media can thus leak andpossibly cause hazards, if overpressure is in thevacuum system.

Dimensions [mm]PSG010

ø14
ø32WARNING• use the product in a non-conforming manner

ø17

Information on preventing any kind of physical injury.

• disregard the information in this document

Mounting orientation
Useø31PSG010, PSG017, PSG018

DANGER

INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties≤80% at temperatures≤+31 °C, decreasing to 50% at+40 °C
anyindoors only
altitudes up to 2000 m2IP40

ø9.5

Symbols Used

Pirani Gauge

Relative humidity

Liability and Warranty

Safetypeff = C × indicated pressure
GastypeCalibration
factor CGas type

Calibration
factor CHeNeArKrXe

0.8
1.4
1.7
2.4
3.0

H2air, O2, CO, N2
CO2
water vapor
Freon 120.5
1.0
0.9
0.5
0.7

The gauge may be mounted in any orientation. To
keep condensates and particles from getting into themeasuring chamber preferably choose a horizontal
to upright position.

(2023-09)
1)

With high-temperature cable.

2)

With high-temperature cable or without cable.

Original: English

Operation
After connection the gauge is ready for operation.
When the gauge is operated for the first time, a zeroadjustment should be performed.
It is advisable to operate the gauge continuously, irrespectiveof the pressure.
PSG017 and PSG018: If the diaphragm is removed in orderto achieve shorter response times, sudden pressure changes
should be avoided in order to protect the filament.
The sensitivity of the nickel filament of the PSG017 gauge is
not the same as the sensitivity of the tungsten filament of thePSG010 and PSG018 gauges.
Measurement cables influence the accuracy ofmeasurement. If cables with lengths over 20 m areused, we strongly recommend adjusting the gauge
together with the cable. For details refer to theoperating instructions of the corresponding
controller.

Deinstallation• Pour the solvent out.

DANGER
Contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

CautionVacuum componentDirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

Adjustment
The gauge is factory calibrated. For most applications, itneeds to be realigned. This allows to correct measurement
errors caused by spread between units, temperature and theinfluence of the cable length. The gauge is aligned according
to the operating instructions of the measurement unit used.
For adjusting the gauge, operate the gauge under the sameambient conditions and in the same mounting orientation as
normally.
Gas Type Dependence
The measurement value is gas dependent. The reading
applies to dry air, N2, O2 and CO. For other gases, it has tobe converted (→ Technical Data and operating instructions ofthe corresponding controller).
In the pressure range below 1 mbar this can be done by entering the corresponding calibration factor on the controller(→ Operating instructions of the corresponding controller).

• Fill the measurement chamber with a solvent andallow it to work for some time. Repeat this procedure if necessary.

Maintenance, Troubleshooting

CautionDirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

 Vent the vacuum system.

• Rinse the vacuum chamber and the filter with alcohol for several times in order to remove all solvent
residues.

Gauge failures due to contamination or wear andtear, as well as expendable parts (filament), are notcovered by the warranty.
Realignment at the measurement unit can become
necessary in the following events:• Altering

Before connecting or disconnecting the product, turn off the control system.

 Remove the gauge from the vacuum system and cover
the vacuum connection with the protective lid.

WARNING Insert the filter (PSG010), resp. diaphragm (PSG017,PSG018).

• Contamination• After cleaning
Cleaning*)

DANGER
Contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

CautionTroubleshootingFault

Possible cause

RemedyPressurereadings suppliedby gauge too highGauge contaminatedMinor deviations canbe compensated byrealignment at themeasurement unit

No useful indication

Filter contaminated (PSG010)

Clean or replace it

Filament broken(an unbroken filament has a resistance of ≈100 Ω)

Replace the gauge

Gauge cable defective, interrupted, or shortcircuit

Repair or replace thecable• 2014/30/EU, OJ L 96/79, 29.3.2014(EMC Directive; directive relating to electromagnetic compatibility)• 2011/65/EU, OJ L 174/88, 1.7.2011(RoHS Directive; directive on the restriction of
the use of certain hazardous substances inelectrical and electronic equipment)• S.I. 2016/1101, 11.2016(The electrical equipment (safety) regulations
2016)• S.I. 2016/1091, 11.2016(The electromagnetic compatibility regulations
2016)• S.I. 2012/3032, 12.2012(The restriction of the use of certain hazardous
substances in electrical and electronic equipment regulations 2012)

Products

DANGER

Spare Parts

Pirani Gauge
PSG010, PSG017, PSG018(Operation with VGC094)

Standards
Harmonized and international/national standards and specifications:• EN 61000-3-2:2014, Class A

WARNING

Ordering No.
Filter

B 4161 2003 G

Substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance withthe relevant local regulations.

Storage
Separating the components

Caution… or clean the diaphragm (PSG017, PSG018).

(LV Directive; directive relating to electricalequipment designed for use within certain
voltage limit)

Products that are not clearly declared as "free of harmful
substances" are decontaminated at the expense of thecustomer.
Products not accompanied by a duly completed declarationof contamination are returned to the sender at his own
expense.

Contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

Precondition: Gauge deinstalled

Filter• 2014/35/EU, OJ L 96/357, 29.3.2014

Form under www.inficon.com

DisposalCaution

 Clean or replace the filter (PSG010) …

We, INFICON, hereby declare that the equipment mentioned below comply with the provisions of the following EU directives and UK
regulations:Clean the gauge

Vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

Dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

EU & UKCA Declaration of Conformity

Forwarding contaminated productsContaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably
be free of harmful substances. Adhere to theforwarding regulations of all involved countries
and forwarding companies and enclose a duly
completed declaration of contamination *).

• Dry at ≈70 °C.

 Put the gauge out of operation.
 Unplug the sensor cable.

Returning the Product

Vacuum component
Inappropriate storage leads to an increase of thedesorption rate and/or may result in mechanicaldamage of the product.
Cover the vacuum ports of the product withprotective lids or grease free aluminum foil. Do
not exceed the admissible storage temperature
range (→  "Technical Data")

After disassembling the product, separate its components
according to the following criteria:• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated
according to their materials, and recycled.
• Other components
Such components must be separated according to theirmaterials and recycled.

(EMC: limits for harmonic current emissions)• EN 61000-3-3:2013(EMC: limitation of voltage changes, voltage fluctuations andflicker)• EN 61000-6-1:2007(EMC: generic immunity for residential, commercial and lightindustrial environments)• EN 61000-6-2:2005(EMC: generic immunity standard for industrial environments)• EN 61000-6-4:2007 + A1:2011(EMC: generic emission standard)• EN 61010-1:2010 + A1:2019 + A1:2019/AC:2019(Safety requirements for electrical equipment for measurement,control and laboratory use)
• EN 61010-2-030:2010(Safety requirements for electrical equipment for measurement,control and laboratory use)
• EN 61326-1:2013; Group 1, Class A(EMC requirements for electrical equipment for measurement,
control and laboratory use)

Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers

Literature
Diaphragm

 Clean the gauge / replace parts.

[1] www.inficon.com
Operating Manual
VGC094
tinb68e1
INFICON AG, LI-0496 Balzers, Liechtenstein

26 July 2023

26 July 2023

Rolf Enderes
Director Development &Software

Dr. Roberto Salemme
Product Manager

DANGER
Cleaning agents
Cleaning agents can be detrimental tohealth and environment.
Adhere to the relevant regulations andtake the necessary precautions when handling and disposing of cleaning agents.
Consider possible reactions with the product materials (see "Technical data").
LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com