Pirani Standard Gauge
PSG550
PSG552
PSG554

Operating Manual

Incl. EU Declaration of Conformity

tina60e1-c(2023-01)

1

Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.

2

tina60e1-c(2023-01)

Validity
This document applies to products of the PSG55x series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parametersettings (e.g. factory setting of setpoint) as defined in thecorresponding ordering information.

tina60e1-c(2023-01)3

*)ETG.5003.2080 S (R) V1.0.0 (→  [7])***)Solid state relays**)

ETG.5003.2080 S (R) V1.3.0 (→  [8])****)Mechanical relays

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in thisdocument correspond to gauges with the DN 16 ISO-KF vacuum
connection and display. They apply to gauges with other vacuum
connections by analogy.
We reserve the right to make technical changes without priornotice.

4

tina60e1-c(2023-01)

Intended Use
The Pirani Standard Gauge PSG55x has been designed for
vacuum measurement of gases in the pressure range of
5×10-5 … 1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
The gauge is intended for operation in connection with an
INFICON Vacuum Gauge Controller 1) for compact gauges orwith another suitable controller.

Trademark
VCR®

Swagelok Marketing Co.

Patents
EP 0689669 B1, 0689670 B1
US Patent 5608168

Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons
1× Operating Manual1)

tina60e1-c

Gauges with measurement signal 0.61 … 10.23 V (dc) only.
(2023-01)

5

Contents

6

Product Identification
Validity
Intended Use
TrademarkPatents
Scope of Delivery

2
3
5
5
5
5

1 Safety
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety Instructions
1.4 Liability and Warranty

8
8
8
9
9

2 Technical Data
2.1 Output Signal vs. Pressure
2.2 Gas Type Dependence

10
19
24

3 Installation
3.1 Vacuum Connection
3.2 Power Connection
3.2.1 FCC 68, 8-pin Connector
3.2.2 D-sub, 9-pin Connector
3.2.3 D-sub HD, 15-pin Connector
3.2.4 D-sub HD, 15-pin, RS485 INF Connector
3.2.5 DeviceNet Connector
3.2.6 Profibus Connector
3.2.7 EtherCAT Connector
3.2.8 Profinet Connector

25
25
28
29
30
31
32
33
34
35
36

4 Operation
4.1 Status Indication and Displays
4.2 Gas Type Dependence
4.3 Switching Functions SP1, SP2
4.4 Diagnostic Port (RS232C Interface)
4.5 DeviceNet Operation
4.6 Profibus Operation
4.7 EtherCAT Operation
4.8 Profinet Operation

37
37
41
41
47
48
51
52
53

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5

Deinstallation

6 Maintenance, Repair
6.1 Adjusting the Gauge
6.2 Replacing the Sensor
6.3 Troubleshooting

54
56
56
58
59

7

Returning the Product618Disposal

62

9Accessories

63

10

Spare Parts

64

Further Information

67

ETL Certification

69

EU Declaration of Conformity

70

UKCA Declaration of Conformity

71

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under"Further Information", the symbol (→  [Z]).

tina60e1-c(2023-01)

7

1

Safety1.1

Symbols Used
DANGER
Information on preventing any kind of physical injury.

WARNING
Information on preventing extensive equipment and environmental damage.

CautionInformation on correct handling or use. Disregard can lead tomalfunctions or minor equipment damage.
Notice<…>1.2

Labeling

Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-userof the product.

8

tina60e1-c(2023-01)

1.3

General Safety Instructions• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider thesafety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.

1.4

Liability and Warranty
INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties• disregard the information in this document• use the product in a non-conforming manner• make any kind of interventions (modifications, alterations etc.)
on the product• use the product with accessories not listed in the productdocumentation.
The end-user assumes the responsibility in conjunction with theprocess media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.

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9

2Technical Data
For further technical data for gauges with serial interfaces →  [4], [5], [6]. [7], [8], [9].
Measurement principle
Measurement range
Accuracy (N2)5×10-4 … 1×10-3 mbar

thermal conductance acc. to
Pirani5×10-5 … 1000 mbar
±50%

of reading

1×10-3 … 100 mbar

±15%

of reading

100 … 1000 mbar

±50%

of reading

Resolution (at 1000 mbar)±0.15% of reading

Repeatability (N2)
1×10-3 … 100 mbar

±2%of reading

Output signal (measurement signal)
Voltage range
3PIx-0xx-xxx0
0 … +10 V
3PIx-0xx-xxx1
0 … +8.5 V
3PIx-0xx-xxx2
0 … +5.529 V
3PIx-0xx-xxx3
0 … +8.875 V
Measurement range
3PIx-0xx-xxx0+0.61 … +10 V
3PIx-0xx-xxx1+1.2 … +8.5 V
3PIx-0xx-xxx2+0.375 … +5.529 V
3PIx-0xx-xxx3+1.57 … +8.875 V
Error signal
0 … 0.05 V
Voltage vs. pressure
3PIx-0xx-xxx0
3PIx-0xx-xxx1
3PIx-0xx-xxx3
3PIx-0xx-xxx2

101.286 V/decade, logarithmic
1 V/decade, logarithmic
1 V/decade, logarithmic→  21

tina60e1-c(2023-01)

Output impedance

2 × 4.7 Ω, short circuit-proof

Load impedance
Response time

≥10 kΩ<10 msGauge identification
FCC 68 (+0.61 … +10 V)

27 kΩ

HV adjustment

at <10-5 mbar

Solid state relays
Setting range (N2)
Hysteresis 2)
Switching characteristics 2)
Contact rating

switching functions SP1/2
5.0×10-5 … 1000 mbar
10% of threshold
Low Trip Point<30 V (ac) / (dc), ≤0.3 A
resistive
LED lit solid
LED off<30 msclosedopen
Switching time
Mechanical relays
Setting range (N2)
Hysteresis 2)
Switching characteristics 2)
Type
Contact ratingclosedopen
Switching time
Diagnostic port

2)

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switching functions SP1/2
5.0×10-5 … 1000 mbar
10% of threshold
Low Trip Point
1 floating contact (NO) per
switching function<30 V (ac) / (dc), ≤1 A
resistive
LED lit solid
LED off<30 msJack connector 2.5 mm,
3-pin

The hysteresis and the switching characteristics can be
programmed via the serial interface or the diagnostic port.
(2023-01)

11

Supply

DANGER
The gauge may only be connected to power supplies, instruments, or control devices that conformto the requirements of a grounded protective extralow voltage (PELV) and limited power source(LPS), Class 2. The connection to the gauge has tobe fused. 3)
Supply voltage
at the gauge
RippleClass 2 / LPS+15 … +30 V (dc)
≤1 VppPower consumption
without fieldbus
DeviceNet, Profibus
EtherCAT, Profinet
Fuse to be connected 3)≤2.5 W≤3 W≤4.5 W
1 AT

Electrical connection
3PIx-0xx-x0xx
3PIx-0xx-x1xx
3PIx-0xx-x2xx
3PIx-0xx-x4xx

Cable length
RS232C operation

FCC 68D-sub 9-pin, male
D-sub HD 15-pin, male
D-sub HD 15-pin, RS485
INF, maleshielded
0.14 mm2/conductor≤100 m≤30 m

Grounding concept→ "Power Connection"

Sensor cable

Vacuum connection tosignal common

3)12connected via 10 kΩ

INFICON controllers fulfill this requirement.
tina60e1-c(2023-01)

RS232C / RS485 interface
Transmission rate
Data format

57600 baud (default)
binary8 data bits
one stop bit
no parity bit
no handshake→ "Power Connection"
For further information on the RS232C / RS485C interface→  [4].
DeviceNet interface
Specification, data format,
communication protocol
Interface, physicalData rate (adjustable via <RATE>
switch)Node address (MAC ID)(Adjustable via <ADDRESS>,<MSD>, <LSD> switches)
DeviceNet connector
Cable
Cable length, system wiring→  [10]
CAN bus125 kBaud
250 kBaud
500 kBaud (default)<P> (125 kBaud,
250 kBaud, 500 kBaud
programmable via
DeviceNet, →  [5])0 … 63dec (63dec default)<P> (0 … 63 programmable
via DeviceNet, →  [5])Micro-Style, 5-pin, maleshielded, special DeviceNet
cable, 5 conductors→  33, →  [11]according to DeviceNet
specifications, →  [10],[11]

For further information on the DeviceNet interface →  [5]tina60e1-c(2023-01)

13

Profibus interface
Specification, data format,
communication protocol
Interface, physicalData rate
Node address
Local(Adjustable via hexadecimal<ADDRESS>, <MSD>,<LSD> switches)
Default setting
Via Profibus(hexadecimal <ADDRESS>
switches set to >7Dhex(>125dec)
Profibus connection
Cable
Cable length, system wiring→  [12]RS485≤12 Mbaud (→  [6])00 … 7Dhex (0 … 125dec)
01Chex00 … 7Dhex (0 … 125dec)
D-sub, 9-pin, female
shielded, special Profibus
cable, →  34, →  [13]according to Profibus specifications, →  [12], [13]For further information on the Profibus interface →  [6]EtherCAT interface
Specification, data format,
communication protocol
3PIx-0xx-xxGx
3PIx-0xx-xx8x→  [16], [17]→  [14], [15]Data rate
Note address

100 Mbps
explicit device identification

EtherCAT connector

2×RJ45, 8-pin, socket
input and output
8-pin, shielded, Ethernet
Patch Cable (CAT5e quality
or higher)≤100 mCable
Cable length

For further information on the EtherCAT interface →  [7], [8]14tina60e1-c(2023-01)

Profinet interface
Specification, data format,
communication protocol→  [14]

Data rate
Note address

100 Mbps
explicit device identification

Profinet connector

2×RJ45, 8-pin, socket
input and output
8-pin, shielded, Ethernet
Patch Cable (CAT5e quality
or higher)≤100 mCable
Cable length

For further information on the Profinet interface →  [9].
Materials exposed to vacuum
Vacuum connection
Filament
3PI1 / 6-0xx-xxxx
3PI2 / 7-0xx-xxxx
3PI3 / 8-0xx-xxxx
FeedthroughOrifice 4)
Further materials
Internal volume
DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R, long tube
DN 25 ISO-KF
4 VCR® female
8 VCR® female
1/8" NPT
Flange 29×29 mm
4 VCR® 90°, female
7/16-20 UNF

4)

tina60e1-c

stainless steel 1.4435
WNi
ceramic coatedglass
stainless steel
Ni, NiFe, stainless steel
1.4301
4.7 cm3
14.5 cm38 cm314 cm35.5 cm3
5.5 cm3
7 cm3
5.2 cm3
4.9 cm3
7.9 cm3
5.2 cm3

Only versions DN 16 ISO-KF and DN 16 CF-F.
(2023-01)

15

Permissible pressure (absolute)
Bursting pressure (absolute)Permissible temperatures
Operation
Vacuum connection 5)
long tube 5)
Filament
Storage
Relative humidity
Year's mean
During 60 days
Mounting orientationUse+10 °C … +50 °C≤80 °C≤250 °C<160 °C–20 °C … +65 °C

Pollution degree
Degree of protection≤65% (no condensation)≤85% (no condensation)anyindoors only, altitude up to2000 m NN
2
IP 40

Weightwithout fieldbus interface
with fieldbus interface<130 g
230 g … 250 g

5)16≤5 bar
10 barFor horizontal mounting orientation only. During bakeout,
measurement range, accuracy, and repeatability may deviate from
specifications.
tina60e1-c(2023-01)

7/16-20 UNF

tina60e1-c(2023-01)

DN 16 ISO-KF

36.5

130.2

30.9

4 VCR

DN 16 CF-R long

DN 16 CF-F

130.8

14.5

34

21.5

46.3

42.7

36

DN 25 ISO-KF

DN 16 ISO-KF long

31.5

79.5

28

≈65

Dimensions [mm]451/8" NPT
8 VCR

29.2×29.2 mm

4-VCR 90°

24.4

17

DeviceNet

Profibus

BUS

ADDRESS
2 4 6 2 4 6
080
8ECA ECA
MSD

67

LSD

56

10.8

67

I/O
ST
DIA

SP2

SP1
ADJ

ADDRESS

BUS

RATE STATUS

NET MOD
LSD

56

MSD

I/O
ST
DIA

SP2

SP1
ADJ

EtherCAT

RS485
67

MSD
LSD RATE
SP2 2
6 2
6
6 2
E

A E

A E

ST

A
ADJ

56

ADDRESSSP1

3 2 1 ON

DIA
BUS

Profinet

18

tina60e1-c(2023-01)

2.1

Output Signal vs. Pressure
Measurement range 0.61 … 10 V
Pressure p
1E+06

Pa

1E+05
1E+04

mbar

1E+03

Torr

1E+01
1E+00

Error

1E+02

1E–01

O

1E–02
1E–03
1E–04
1E–05

0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 8.5 9.0 9.5 10.0 10.5
0.61

Output signal U [V]p = 100.778(U-c)⇔

U = c +1.286log10 p-5valid in the range

5×10 mbar <p< 1000 mbar

U

p

c

U

p

c

[V]
[V]
[V]
[V]

[mbar][µbar][Torr][mTorr]

6.143
2.287
6.304
2.448

[V]
[V]
[V]

[micron]
[Pa]
[kPa]

2.448
3.572
7.429

where p pressure
U output signal
c constant (pressure unit dependent)

tina60e1-c(2023-01)

19

Measurement range 1.2 … 8.5 V
Pressure p
1E+05

Pa

1E+04

mbar

1E+03

Torr

1E+01
1E+00

Error

1E+02

1E–01
1E–02
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 8.5 9.0
1.2

Output signal U [V]p = 10(U-c)

U = c + log10 p⇔

5×10-5 mbar <p< 1000 mbar

valid in the range
U

p

c

U

p

c

[V]
[V]
[V]
[V]

[mbar][µbar][Torr][mTorr]

5.5
2.5
5.625
2.625

[V]
[V]
[V]

[micron]
[Pa]
[kPa]

2.625
3.5
6.5

where p pressure
U output signal
c constant (pressure unit dependent)

20

tina60e1-c(2023-01)

Measurement range 0.375 … 5.529 V
Signal U
[V]
0.375
0.376
0.377
0.379
0.384
0.392
0.417
0.455
0.523
0.682
0.876
1.155
1.683
2.217
2.842
3.675
4.206
4.577
4.846
4.945
5.019
5.111
5.224
5.329
5.419
5.495
5.529

tina60e1-c(2023-01)[mbar]<5×10-50.000133322
0.000266645
0.000666612
0.001333224
0.002666447
0.006666118
0.013332237
0.026664474
0.066661184
0.133322368
0.266644736
0.66661184
1.33322368
2.66644736
6.6661184
13.3322368
26.6644736
66.661184
133.322368
266.644736
399.967104
533.289472
666.61184
799.934208
933.256576
1000

Pressure p[Pa]<6.65×10-3
0.013332237
0.026664474
0.066661184
0.133322368
0.266644736
0.66661184
1.33322368
2.66644736
6.6661184
13.3322368
26.6644736
66.661184
133.322368
266.644736
666.61184
1333.22368
2666.44736
6666.1184
13332.2368
26664.4736
39996.7104
53328.9472
66661.184
79993.4208
93325.6576
100000[Torr]<5×10-50.00010.00020.00050.00100.00200.00500.01000.02000.05000.10000.20000.50001.00002.00005.000010.0000
20.0000
50.0000
100.0000
200.0000
300.0000
400.0000
500.0000
600.0000
700.0000
750.0637

21

Valid in the range 0.375 … 2.842 V

p = a + bU + cU2 + dU3 + eU4 + fU5
a–0.02585c

0.04563e–0.04158b

0.03767d0.1151f

0.008737a, b, c, d, e, f

constant

where p pressure in Torr
U output signal

Valid in the range 2.842 … 4.945 Vp=a + cU + eU2
1 + bU + dU2 + fU3

a0.1031c–0.02322e

0.07229b–0.3986d0.07438f–0.006866a, b, c, d, e, f

constant

where p pressure in Torr
U output signal

Valid in the range 4.945… 5.529 Vp=a + cU
1 + bU + dU2

a100.624c–20.5623b–0.37679d0.0348656

where p pressure in Torr
U output signal

22a, b, c, dconstant

tina60e1-c(2023-01)

Measurement range 1.57 … 8.875 V
Pressure p
1E+05

Pa

1E+04

mbar

1E+02

Torr

1E+01
1E+00

Error

1E+03

1E–01
1E–02
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 8.5 9.0 9.5
1.57
8.875

Output signal U [V]p = 10(U-c)

U = c + log10 p⇔

5×10-5 mbar <p< 1000 mbar

valid in the range
U

p

c

U

p

c

[V]
[V]
[V]
[V]

[mbar][µbar][Torr][mTorr]5.87512.8751
6
3

[V]
[V]
[V]

[micron]
[Pa]
[kPa]

3
3.8751
6.8751

where p pressure
U output signal
c constant (pressure unit dependent)

tina60e1-c(2023-01)

23

2.2

Gas Type Dependence
Indicated pressure (gauge calibrated for air)p (mbar)
102

H2

8
6

Ne

He

4
2

Air
O2
CO
N2

CO2

101

Ar

8
6

Freon 12
Kr

4
2

Xe

100
8
6
4
2

10–1
8
6
4
2

Water vapor

10–2
8
6
4
2

10–3
10–3 24

6

10–2 24

6

10–1 2

4

6

100

2

4

6

101

2

4

6

102

peff (mbar)

Calibration factors
valid for Pirani pressure range below 1 mbar

peff = C × indicated pressure

24

Gas type

Calibration
factor C

Gas type

Calibration
factor C

He
Ne
Ar
Kr
Xe

0.8
1.4
1.7
2.4
3.0

H2
air, O2, CO, N2
CO2
water vapor
Freon 12

0.5
1.0
0.9
0.5
0.7

tina60e1-c(2023-01)

3

Installation
DANGER
Leaking process media
High-intensity mechanical, chemical or thermal
impacts can cause leaks in the measuring sensor.
Process media can thus leak and possibly cause
hazards, if overpressure is in the vacuum system.
• Avoid high-intensity mechanical, chemical orthermal impacts and overpressure in the vacuum
system.
• Take appropriate measures (e.g. shut off gas
supply, extraction, leak test) to avoid hazards ordamage due to leaking process media.

3.1

Vacuum Connection
DANGER
Overpressure in the vacuum system >1 bar
Injury caused by released parts and harm causedby escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which aresuited to overpressure.

tina60e1-c(2023-01)25

DANGER
Overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage yourhealth.
Use O-rings provided with an outer centering ring.

DANGER
Protective ground
Products that are not correctly connected to groundcan be extremely hazardous in the event of a fault.
Electrically connect the gauge to the groundedvacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:• CF, NPT, UNF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube and a 29×29 mm
flange, take appropriate measures to fulfill thisrequirement.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent
damages.

26

tina60e1-c(2023-01)

Caution
Dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep condensates and particles from getting into the measuring
chamber preferably choose a horizontal to upright position and consider using a seal with centering ring andfilter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the buttons can be accessed with a pin.
Remove the protective lid and connect the product to thevacuum system.

Seal with centering ring
Clamp

or
Protective lid
Seal with centeringring and filter

Keep the protective lid.

tina60e1-c(2023-01)

27

3.2

Power Connection
Make sure the vacuum connection is properly made(→  25).

DANGER
The gauge may only be connected to power supplies, instruments or control devices that conformto the requirements of a grounded protective extralow voltage (PELV) and limited power source(LPS), Class 2. The connection to the gauge has tobe fused. 6)

Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:• Connect the cable shield to ground on one side via
the connector housing. Do not connect the other sideof the shield.
• Connect the supply common with protective grounddirectly at the power supply.
• Use differential measurement input (signal commonand supply common conducted separately).
• Potential difference between supply common andhousing ≤18 V (overvoltage protection).

6)

28

INFICON controllers fulfill these requirements.
tina60e1-c(2023-01)

3.2.1

FCC 68, 8-pin Connector
If no sensor cable is available, make one according to thefollowing diagram. Connect the sensor cable.

Electrical connection
Pin 1
SupplyPin 2
Supply common, GND
Pin 3
Measurement signal or
thresholds SP1, SP2
Pin 4
Gauge identification
Pin 5
Signal common
Pin 6, 8 Relay SP2
Common closing contact (com)
Pin 7, 8 Relay SP1
Common closing contact (com)tina60e1-c(2023-01)

1
8

FCC 688-pin
connector

29

3.2.2D-sub, 9-pin Connector
If no sensor cable is available, make one according to thefollowing diagram. Connect the sensor cable.

SP1
SP2
Measurement
signal

4.7Ω
4.7Ω

10k

+24V

+
–

3
4

+
–

18V

Electrical connection
Pin 1 Relay SP1, closing contact
Pin 2 n.c.
Pin 3 Supply
Pin 4 Supply common, GND
Pin 5 Measurement signal or
thresholds SP1, SP2
Pin 6 Relay SP1
Common contact (com)
Pin 7 Relay SP2
Common contact (com)
Pin 8 Signal common
Pin 9 Relay SP2, closing contact

30

1
6
7
9
5
8

5

9

1

6

D-sub
9-pin
femalesoldering side

tina60e1-c(2023-01)

3.2.3D-sub HD, 15-pin Connector
If no sensor cable is available, make one according to thefollowing diagram. Connect the sensor cable.
TxD
RxD
SP2
SP1
Measurement
signal

4.7Ω
4.7Ω

10k

+24V

(2023-01)

+
–

3
4

+
–

18V

Electrical connection
Pin 1, 2n.c.
Pin 3SupplyPin 4
Supply common, GND
Pin 5
Measurement signal
Pin 6
Signal common
Pin 7, 8, 9 n.c.
Pin 10
Relay SP1 (NO)Pin 11
Relay SP2 (NO)Pin 12
Relay SP2
Common contact (com)
Pin 13
RS232, TxD
Pin 14
RS232, RxD
Pin 15
Relay SP1
Common contact (com)tina60e1-c

13
14
12
11
15
10
5
6

5
1

10
15
11
6

D-sub HD
15-pinfemalesoldering side31

3.2.4D-sub HD, 15-pin, RS485 INF Connector
If no sensor cable is available, make one according to thefollowing diagram. Connect the sensor cable.

Electrical connection
Pin 1
RS485 B+
Pin 2
RS485 A–
Pin 3
SupplyPin 4
Supply common, GND
Pin 5
Measurement signal
Pin 6
Signal common
Pin 7
Reserved
Pin 8
RS485. GND
Pin 9Reserved
Pin 10 Relay SP1 (NO)Pin 11 Relay SP2 (NO)Pin 12 Relay SP2, common contact (com)
Pin 13 Relay SP2 (NC)Pin 14 Relay SP1 (NC)Pin 15 Relay SP1, common contact (com)
32

5
1

10
15
11
6

D-sub HD
15-pinfemalesoldering side

tina60e1-c(2023-01)

3.2.5

DeviceNet Connector
If no DeviceNet cable is available, make one according to thefollowing diagram. Connect the DeviceNet cable.
1
2

4
3

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5

Micro-Style, 5-pin, (DeviceNet), female,soldering side

5

Drain
SupplySupply common
CAN_H
CAN_L

+15 … +30 V (dc)
GND

DeviceNet cabletina60e1-c(2023-01)33

3.2.6

Profibus Connector
If no Profibus cable is available, make one according to thefollowing diagram. Connect the Profibus cable.
1

5

D-sub, 9-pin, male, soldering side6

Pin 1, 2
Pin 3
Pin 4
Pin 5
1)
2)

9

Do not connect
RxD/TxD-P
CNTR-P 1)
DGND 2)

VP 2)
Not connected
RxD/TxD-N

Only to be connected if an optical link module is used.
Only required as line termination for devices at both ends of bus cable(→  [13]).

Profibus cable

34

Pin 6
Pin 7, 9
Pin 8

Sensor cabletina60e1-c(2023-01)

3.2.7

EtherCAT Connector
If no EtherCAT cables are available, make them according to thefollowing diagram. Connect the EtherCAT cables.
FCC68, 8-pin, soldering side
8

1

Pin 1
TD+
Transmission data +Pin 2
TDTransmission data Pin 3
RD+
Receive data +Receive data Pin 6
RDPin 4, 5, 7 and 8: Not connected

tina60e1-c(2023-01)35

3.2.8

Profinet Connector
If no Profinet cables are available, make them according to thefollowing diagram. Connect the Profinet cables.
FCC68, 8-pin, soldering side
8

1

Pin 1
TD+
Transmission data +Pin 2
TDTransmission data Pin 3
RD+
Receive data +Receive data Pin 6
RDPin 4, 5, 7 and 8: Not connected36

tina60e1-c(2023-01)

4

Operation
When the supply voltage is applied, the measurement signal isavailable at the connector (→ "Power Connection").
Allow a stabilization period of at least 10 minutes. It is advisable
to operate the gauge continuously, irrespective of the pressure.
The gauge is factory calibrated. Due to long time operation orcontamination, a zero drift could occur. Periodically check thezero and adjust it if necessary. In addition, we recommend performing a zero and ATM calibration after each reinstallation(adjusting the gauge →  56).

4.1

Status Indication and Displays
Light-emitting diodes (LEDs)ST
DIA SP2

Status

ADJ

LED

State

Meaning<ST>

off
lit green
lit solid or isblinking red
lit greenoff
lit greenoffno supply voltage
measurement mode

<SP1>
<SP2>

tina60e1-c

SP1(2023-01)

error (→  59)
Relay SP 1 closed
Relay SP 1 open
Relay SP 2 closed
Relay SP 2 open

37

Liquid crystal display (LCD)

LCD

Meaning

off
lit green
lit redno supply voltage
measurement / parameter modeerror
The display can be rotated by 180 ° via the diagnostic
port.

Put the gauge into operation

When the supply voltage is applied
the software version is briefly displayed.

38

tina60e1-c(2023-01)

Measurement modetina60e1-c(2023-01)

39

Parameter mode

Switching functions <S>
When the <SP1> or <SP2> button ispushed, the corresponding
threshold is displayed and thecorresponding relay flashes.

Threshold
Error display (trouble shooting →  59)

Pirani sensor error

EEPROM error

Sensor error

40

tina60e1-c(2023-01)

4.2

Gas Type Dependence
The measurement value is gas dependent. The pressure reading
applies to dry air, O2, CO and N2. For other gases, it has to becorrected (→ "Technical Data").
If the gauge is operated with an INFICON controller, a calibration
factor for correction of the actual reading can be applied (→  ofthe corresponding controller).

4.3

Switching Functions SP1, SP2
The two switching functions can be set to any pressure within
the measurement range of the gauge. A solid state relay isprovided for each switching function.
The current threshold setting• can be read / written via the diagnostic port
• is output at the measurement signal output instead of thepressure signal, can be measured with a voltmeter, and isdisplayed on the LCD display after the <SP1> or <SP2>
button is pressed• can be read / written via the DeviceNet, Profibus, EtherCAT,
Profinet and RS485 interface.

Switching characteristics and hysteresis
The switching characteristics and the hysteresis of each set
point can be programmed (→  44).
Low Trip Point (default)
If the pressure in the vacuum system is lower than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and thecorresponding relay is closed.

tina60e1-c(2023-01)

41

Measurement signal(Pressure p)

nt value
reme
asu
e
M
Hysteresis(10% of threshold)SetpointThreshold value

Time t
Off

On

Off

The setpoints SP1 and SP2 are factory set to the lower
measurement range limit and therefore do not switch.
High Trip Point
If the pressure in the vacuum system is higher than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and thecorresponding relay is closed.
Measurement signal(Pressure p)

Threshold value

SetpointThreshold value

Hysteresis(10% of threshold)

Me
asu
reme
nt value

Time t
Off

42

On

Off

tina60e1-c(2023-01)

High & Low Trip Point
Both a High Trip Point and a Low Trip Point are assigned toeach setpoint. If the pressure in the vacuum system is higher
than the defined High Trip Point threshold, the corresponding
LED (<SP1> or <SP2>) is lit and the corresponding relay isclosed. If the pressure in the vacuum system is lower than thedefined Low Trip Point threshold, the corresponding LED(<SP1> or <SP2>) is lit and the corresponding relay is closed.
Measurement signal(Pressure p)

Threshold value
Hysteresis(10% of threshold)Setpoint

High Trip Point

Hysteresis(10% of threshold)Threshold value

Setpoint
Low Trip PointTime t
Off

On

Off

On

Off

The setpoints can only be programmed via• the diagnostic port (→  [4])• the DeviceNet, Profibus, EtherCAT, Profinet and
RS485 interface (→  [4], [5], [6], [7], [8], [9]).

tina60e1-c(2023-01)43

4.3.1

Adjusting the Setpoints SP1, SP2
The switching characteristics and the hysteresis canonly be programmed via• the diagnostic port (→  [4])• the DeviceNet, Profibus, EtherCAT, Profinet and
RS485 interface (→  [4], [5], [6], [7], [8], [9]).
The thresholds of the setpoints can be adjusted via• the buttons on the gauge• the diagnostic port (→  [4])• the DeviceNet, Profibus, EtherCAT, Profinet and
RS485 interface (→  [4], [5], [6], [7], [8], [9]).
If both a High Trip Point and a Low Trip Point areassigned to a setpoint, Low Trip Point only can be
adjusted via the corresponding button on the gauge.

DANGER
Malfunction
If processes are controlled via the signal output,
keep in mind that by pushing an <SP> button themeasurement signal is suppressed and the corresponding threshold value is output instead. Thiscan cause malfunctions.
Push the <SP> button only if you are sure that no
malfunctions will cause.

44

tina60e1-c(2023-01)

Adjusting setpoint SP1 with button on the gauge

 Push the <SP1> button with a pin (max. ø1.1 mm) andkeep it depressed. The gauge changes to the switching
function mode and outputs the current threshold value atthe measurement value output or on the LCD for about 5 s
and the corresponding <S> on the display blinks.
The threshold setting is increased towards the upper limit
until the button is released or the limit is reached.

Keep the button
depressed

 Push the <SP1> button again:
Fine adjustment
within 0...1 s:

the threshold value changes by one
unit

Change of direction
within 2...3 s:

the threshold adjustment changes
its direction

 The <SP1> button is released for more than 5 s: thethreshold value is saved and the gauge returns to themeasurement mode.
The factory setting of the upper threshold is 10% above
the Low Trip Point and 10% below the High Trip Point(hysteresis).

tina60e1-c(2023-01)

45

If after programming of the hysteresis the corresponding
button <SP1> or <SP2> is pushed, the factory setting of
the corresponding hysteresis (10%) is reactivated.
Programming setpoint SP1
Programmable parameters:(→  [4], [5], [6], [7], [8], [9])Low Trip Point
Low Trip Enable
Low Trip Point Hysteresis
High Trip Point
High Trip Enable
High Trip Point Hysteresis
Setpoint Mode

Adjusting setpoint SP2
The adjustment procedure is the same as for setpoint SP1.

46

tina60e1-c(2023-01)

4.4

Diagnostic Port (RS232C Interface)
The diagnostic port <DIA> permits to output the pressure reading and all status information and to enter all settings at thesame time (→  [4]).
→ "Accessories"

tina60e1-c(2023-01)

47

4.5

DeviceNet Operation
Caution
Data transmission errors
The attempt to operate the DeviceNet gauge with
the RS232C interface causes data transmission
errors.
This DeviceNet gauge must not be operated with
the RS232C interface.
Before the gauge is put into operation, it has to be configured forthe DeviceNet. A configuration tool and the device specific EDS
file (Electronic Data Sheet) in integer or real format are required
for this purpose. The appropriate EDS file can be downloaded
from our website (www.inficon.com).
Product

Product Code

PSG55x21

EDS file
PSGX-PC21 Int.eds
PSGX-PC21 Real.eds

Node Address Setting
Set the node address (0 … 63dec) via the<ADDRESS>, <MSD>, and <LSD> switches(default 63dec). The node address is polled by
the firmware when the gauge is switched on.
If the setting deviates from the stored value,
the new value is taken over into the NVRAM.
If a setting higher than 63 is made, the previous node address setting remains valid.
If the <MSD> switch is in the <P> position,
the node address is programmable via theDeviceNet (→  [5]).

48

tina60e1-c(2023-01)

2

Example: Node address = 63:

6
P
MSD

4

LSD

Data Rate Setting
By means of the <RATE> switch, the data rate canbe set to 125 (<1>), 250 (<2>) or 500 kBaud (<5>)(default 500 kBaud).
If the switch is in the <P> position, the data rate isprogrammable via the DeviceNet (→  [5]).
RATE
2Example: Data rate = 250 kBaud:Transmitting measurement values
Depending on the Fieldbus standard used, the gauge can onlytransmit measurement values when it is authorized by themaster.
When the gauge is put into operation, it is in the IDLE status(provided there is no error) and the value defined in the Safe
State is transmitted instead of the measurement value.
Measurement values are transmitted in the EXECUTING status.
For the gauge to change from the IDLE to the EXECUTING
status, a start instruction must be executed or the I/O-Poll modemust be started in the IDLE status.

Status LED
Two LEDs on the gauge inform on the gauge status and thecurrent DeviceNet status.

tina60e1-c(2023-01)

49

<STATUS MOD> (gauge status):
LED

Meaning

offblinking green-red
lit solid green
lit solid red
blinking red

No supply
Selftest
Normal operation
Non recoverable error
Recoverable error (e.g. missing
DeviceNet power supply)<STATUS NET> (network status):
LED

Meaning

offGauge not online:• Selftest not yet concluded

blinking green• No supply, → "STATUS MOD"
Gauge online but no communication:• Selftest concluded but no communication to other nodes establishedlit solid green
blinking red
lit solid red

50• Gauge not assigned to any master
Gauge online; necessary connections
establishedOne or several input / output connections in"time out" status
Communication error. The gauge has detected an error that impedes communication via the network (e.g. two identical nodeaddresses (MAC IC) or "Bus-off")

tina60e1-c(2023-01)

4.6

Profibus Operation
Caution
Data transmission errors
The attempt to operate the gauge with the RS232C
interface causes data transmission errors.
This gauge must not be operated with the RS232C
interface.
For operating the gauge via Profibus, prior installation of thedevice specific GSD file is required on the bus master side. This
file can be downloaded from our website (www.inficon.com).

Node Address Setting
For unambiguous identification of the gauge in a Profibus environment, a node address is required.
ADDRESS
2 4 6 2 4 6
8080
ECA ECA
MSD

LSD

Node address 0 … 125dec

The node address is set in hexadecimal form
(00 … 7Dhex) via the <MSD> and <LSD>
switches. It can not be defined via Profibus.

6
8E
Example: Node address = 7Dhex:

MSD

C
LSD

Node address >7Dhex (>125dec)

The gauge starts with the node address 126dec. The address can
now be set via Profibus ("Set slave address", →  [6]). Additionally, via the attribute "NO_ADD_CHG" can be defined, if further changes of the node address are permissible.

tina60e1-c(2023-01)

51

The values of the nude address and the attribute are stored nonvolatile. To change these stored values, start the gauge with anode address <126dec. The stored values of the nude address
and the attribute are deleted.

Transmitting measurement values
Depending on the Fieldbus standard used, the gauge can onlytransmit measurement values when it is authorized by themaster.
When the gauge is put into operation, it is in the IDLE status(provided there is no error) and the value defined in the Safe
State is transmitted instead of the measurement value.
Measurement values are transmitted in the EXECUTING status.
For the gauge to change from the IDLE to the EXECUTING
status, a start instruction must be executed or the cyclic dataexchange must be started in the IDLE status.

4.7

EtherCAT Operation
Caution
Data transmission errors
The attempt to operate the EtherCATgauge with
the RS232C interface causes data transmission
errors.
This gauge must not be operated with the RS232C
interface.
For operating the gauge via EtherCAT, prior installation of thedevice specific ESI file is required on the bus master side. This
file can be downloaded from our website (www.inficon.com).

52

tina60e1-c(2023-01)

Explicit Device Address Setting (default 00hex)
During device initialization, the device address switches are readby the device firmware. This device address is supported to themaster as Explicit Device Identification.
24 6 24 6 24 6
8
80
0
80
E A E A E A

The explicit device address is set in hexadecimal form (00 … FFFhex) via the<x100>, <x10> and <x1> switches.

Example: Device address = 0xDDD (dec 3549):
0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD(dec 13)

Status LED
LEDs on the gauge inform on the gauge status and the current
EtherCAT status (→  [7], [8]).

4.8Profinet Operation
Caution
Data transmission errors
The attempt to operate the Profinet gauge with theRS232C interface causes data transmission errors.
This gauge must not be operated with the RS232C
interface.
For operating the gauge via Profinet, prior installation of the device specific GSDML file is required on the bus master side. This
file can be downloaded from our website (www.inficon.com).

tina60e1-c(2023-01)53

Status LED
LEDs on the gauge inform on the gauge status and the current
Profinet status (→  [9]).

Device name
In order to communicate with a Profinet device, the device mustfirst be assigned a name.

5

Deinstallation
DANGER
Contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent
damages.

54

tina60e1-c(2023-01)

Caution
Dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

 Vent the vacuum system.
 Put the gauge out of operation.
 Untighten the fastening screw(s) and disconnect the sensor
cable.

 Remove gauge from the vacuum system and install theprotective lid.

Protective lid

tina60e1-c(2023-01)55

6

Maintenance, Repair
Gauge failures due to contamination and wear and tear,as well as expendable parts (e.g. filament), are notcovered by the warranty.
INFICON assumes no liability and the warranty becomes nulland void if any repair work is carried out by the end-user or third
parties.

6.1

Adjusting the Gauge
The gauge is factory calibrated. Due to long time operation orcontamination, a zero drift could occur. Periodically check thezero and adjust it if necessary. In addition, we recommend performing a zero and ATM calibration after each reinstallation.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The gauge is adjusted to default values. However, it can also be
adjusted to other pressure values, if the exact pressure value isknown (reference measurement).

 If you are using a seal with centering ring and filter, checkthat they are clean or replace them if necessary(→ "Deinstallation").

 Put the gauge into operation and operate it at atmosphericpressure for at least 10 minutes.

56

tina60e1-c(2023-01)

 Press the <ADJ> button with a pin (max. ø1.1 mm) and the
ATM adjustment is carried out: The Pirani sensor is adjusted to 1000 mbar by default.

ATM
HV Evacuate the vacuum system to p << 10 mbar and wait at-5least 2 minutes.

 Press the <ADJ> button with a pin and the HV adjustment
is carried out: The gauge is adjusted to 5×10-5 mbar
(default).

HV adjustment to another pressure →  [4].
If the pressure value 4.99×10-5 mbar is output at themeasurement value output or on the LCD display, theadjustment has been successful. Otherwise, repeat theadjustment procedure.

tina60e1-c(2023-01)

57

6.2

Replacing the Sensor
In case of severe contamination or a malfunction, the sensor canbe replaced.

Precondition
Gauge deinstalled (→  54).

 Unscrew the hexagon socket screws and remove thesensor without twisting it.

2 mm

 Place the new sensor without twisting it and lock it with thescrews.

58

tina60e1-c(2023-01)

6.3

Troubleshooting
In case of an error, it may be helpful to just turn off themains supply and turn it on again after 5 s.

ProblemPossible cause

Correction

Output signal permanently ≈0V<ST> lit solid red

Sensor cable defective or notcorrectly connected

Check the sensor cableNo supply voltage

Turn on the power supply

Error

Remedy the error

Gauge in an undefined status

Turn the gauge off and on
again after 5 s (reset)

Pirani sensor defective

Replace the sensor(→  58)

Electronics unit not correctly
mounted on sensor

Check the connections(electronics – sensor)

FAIL EEPROM

EEPROM error

Turn the gauge off and on
again after 5 s (reset)

FAIL SENSOR

Electronics unit not compatible
with the sensor

FAIL PIR1<ST> lit solid red<ST> is blinking red

Replace the gauge<ST> lit solid red

Replace the sensor(→  58)
Replace the gauge

tina60e1-c(2023-01)59

Troubleshooting sensor (Pirani filament)
If the cause of a fault is suspected to be in the sensor, thefollowing checks can be made with an ohmmeter.
Separate the sensor from the electronics unit (→  58).
Using an ohmmeter, make the following measurements on thecontact pins.

Sensor
PSG550 (W)PSG554 (W)PSG552 (Ni)

Possible cause
40 ± 1 [Ω]35 ± 1 [Ω]>>40 Ω

Contamination<<40 Ω

Contamination∞

Filament broken>>35 Ω

Contamination<<35 Ω

Contamination∞

Filament broken

Correction
All of the above faults can only be remedied by replacing thesensor (→  58).

60

tina60e1-c(2023-01)

7

Returning the Product
WARNING
Forwarding contaminated productsContaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably befree of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
declaration of contamination *).
*)Form under www.inficon.com

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration ofcontamination are returned to the sender at his own expense.

tina60e1-c(2023-01)

61

8

Disposal
DANGER
Contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant regulations and take the necessary precautions whenhandling contaminated parts.

WARNING
Substances detrimental to the environment
Products or parts thereof (mechanical and electriccomponents, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with therelevant local regulations.

Separating the components
After disassembling the product, separate its components according to the following criteria:• Contaminated components
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordancewith the relevant national regulations, separated according totheir materials, and disposed of.
• Other components
Such components must be separated according to their materials and recycled.

62

tina60e1-c(2023-01)

9

Accessories
Ordering No.
Centering ring with fine filter DN 16 ISO-KF

211-097

Communication adapter (2 m) 7)

303-333

7)

tina60e1-c

The diagnostic software (Windows NT, XP) can be downloaded
from our website.
(2023-01)63

10

Spare Parts
When ordering spare parts, always indicate:• all information on the product nameplate• description and ordering number
Sensor for gauge with tungsten (W) filament
3PI1-0x1-xxxx
3PI6-0x1-xxxx
3PI1-0x2-xxxx
3PI6-0x2-xxxx
3PI1-0x4-xxxx
3PI6-0x4-xxxx
3PI1-0x5-xxxx

PCG550

3PI6-0x5-xxxx
3PI1-0x6-xxxx
3PI6-0x6-xxxx
3PI1-0xD-xxxx
3PI6-0xD-xxxx
3PI1-0xE-xxxx
3PI6-0xE-xxxx
3PI1-0xF-xxxx
3PI6-0xF-xxxx
3PI1-0xK-xxxx
3PI6-0xK-xxxx
3PI1-0xM-xxxx
3PI6-0xM-xxxx
3PI1-0xN-xxxx
3PI6-0xN-xxxx

64

Ordering
No.

DN 16 ISO-KF

355-925

DN 16 ISO-KF, long tube

355-926

DN 16 CF-F

355-927

DN 16 CF-R, long tube

355-928

DN 25 ISO-KF

355-929

4 VCR female

355-932

8 VCR female

355-931

1/8" NPT

355-930

29×29 mm355-934

4 VCR 90° female

355-935

7/16-20 UNF male355-933

tina60e1-c(2023-01)

Sensor for gauge with nickel (Ni) filament
3PI2-0x1-xxxx
3PI7-0x1-xxxx
3PI2-0x2-xxxx
3PI7-0x2-xxxx
3PI2-0x4-xxxx
3PI7-0x4-xxxx
3PI2-0x5-xxxx
3PI7-0x5-xxxx

PCG552

3PI2-0x6-xxxx
3PI7-0x6-xxxx
3PI2-0xD-xxxx
3PI7-0xD-xxxx
3PI2-0xE-xxxx
3PI7-0xE-xxxx
3PI2-0xF-xxxx
3PI7-0xF-xxxx
3PI2-0xK-xxxx
3PI7-0xK-xxxx
3PI2-0xM-xxxx
3PI7-0xM-xxxx
3PI2-0xN-xxxx
3PI7-0xN-xxxx

tina60e1-c(2023-01)

Ordering
No.

DN 16 ISO-KF

355-936

DN 16 ISO-KF, long tube

355-937

DN 16 CF-F

355-938

DN 16 CF-R, long tube

355-939

DN 25 ISO-KF

355-940

4 VCR female

355-943

8 VCR female

355-942

1/8" NPT

355-941

29×29 mm355-945

4 VCR 90° female

355-946

7/16-20 UNF male355-94465

Sensor for gauge with Al2O3 coated filament
3PI3-0x1-xxxx
3PI8-0x1-xxxx
3PI3-0x2-xxxx
3PI8-0x2-xxxx
3PI3-0x4-xxxx
3PI8-0x4-xxxx
3PI3-0x5-xxxx
3PI8-0x5-xxxx

PCG554

3PI3-0x6-xxxx
3PI8-0x6-xxxx
3PI3-0xD-xxxx
3PI8-0xD-xxxx
3PI3-0xE-xxxx
3PI8-0xE-xxxx
3PI3-0xF-xxxx
3PI8-0xF-xxxx
3PI3-0xK-xxxx
3PI8-0xK-xxxx
3PI3-0xM-xxxx
3PI8-0xM-xxxx
3PI3-0xN-xxxx
3PI8-0xN-xxxx

66

Ordering
No.

DN 16 ISO-KF

355-947

DN 16 ISO-KF, long tube

355-948

DN 16 CF-F

355-949

DN 16 CF-R long tube

355-950

DN 25 ISO-KF

355-951

4 VCR female

355-954

8 VCR female

355-953

1/8" NPT

355-952

29×29 mm355-956

4 VCR 90° female

355-957

7/16-20 UNF male355-955

tina60e1-c(2023-01)

Further Information

tina60e1-c [1]Operating ManualSingle-Channel Controller VGC401
tinb01d1 German
tinb01e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein [2]Operating Manual
Two and Three Channel Measurement and Control Unit
VGC402, VGC403
tinb07d1 German
tinb07e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein [3]Operating Manual
One, Two and Three Channel Measurement and Control
Unit VGC501, VGC502, VGC503
tina96d1 German
tina96e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein [4]Communication Protocol
Serial Interface RS232C, RS485C
PCG55x, PSG55x
tira59d1 German
tira59e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein [5]Communication Protocol
DeviceNet™ PCG55x, PSG55x
tira58e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein [6]Communication Protocol
Profibus PCG55x, PSG55x
tira56e1 englisch
INFICON AG, LI–9496 Balzers, Liechtenstein [7]Communication Protocol
EtherCAT® PCG55x, PSG55x (ETG.5003.2080 S (R) V1.0.0)
tira85e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein(2023-01)67

 [8]

Communication Protocol
EtherCAT® PCG55x, PSG55x (ETG.5003.2080 S (R) V1.3.0)
tirb51e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein [9]www.inficon.com
Communication Protocol
Profinet PCG55x, PSG55x
tirb72e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein [10] Common Industrial Protocol (CIP™) Ed. 3.5 andDeviceNet™ Adaption of CIP Ed. 1.6 (Open DeviceNet
Vendor Association)

 [11] www.odva.org

Open DeviceNet Vendor Association, Inc. DeviceNet™
Specifications

 [12] IEC 61158 Type 3 elements: Industrial communication

networks – Fieldbus specifications
IEC 61784: Industrial communication networks –Fieldbus profiles

 [13] www.profibus.com

Profibus user organization

 [14] ETG.5003.1 S (R) V1.0.0: Semiconductor Device profile– Part 1: Common Device Profile (CDP) [15] ETG.5003.2080 S (R) V1.0.0: Semiconductor Device

profile – Part 2080: Specific Device Profile (SDP):
Vacuum Pressure Gauge [16] ETG.5003.1 S (R) V1.1.0: Semiconductor Device profile– Part 1: Common Device Profile (CDP) [17] ETG.5003.2080 S (R) V1.3.0: Semiconductor Device

profile – Part 2080: Specific Device Profile (SDP):
Vacuum Pressure Gauge

68

tina60e1-c(2023-01)

ETL Certification
RECOGNIZEDCOMPONENTETL LISTED
The products PSG550, PSG552 and PSG554• conform to the UL Standard UL 61010-1• are certified to the CAN/CSA Standard
C22.2 No. 61010-1-12

3103457

tina60e1-c(2023-01)

69

EU Declaration of Conformity
We, INFICON, hereby declare, that the equipment mentioned
below comply with the following directives:• 2014/30/EU, OJ L 96/79, 29.3.2014(EMC directive; Directive on electromagnetic compatibility)• 2011/65/EU, OJ L 174/88, 1.7.2011(RoHS directive; Directive on the restriction of the use of certain
hazardous substances in electrical and electronic equipment)

Pirani Standard Gauge
PSG550, PSG552, PSG554
Standards
Harmonized and international / national standards and specifications:• EN 61000-6-2:2005 (EMC: generic immunity standard)• EN 61000-6-3:2007 + A1:2011 (EMC: generic emission standard)• EN 61010-1:2010 + A1:2019 + A1:2019/AC2019(Safety requirements for electrical equipment for measurement, control
and laboratory use)

• EN 61326-1:2013; Group 1, Class B (EMC requirements forelectrical equipment for measurement, control and laboratory use)

Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers

70

18 January 2023

18 January 2023

Dr. Christian Riesch
Head of Development

Marco Kern
Product Manager

tina60e1-c(2023-01)

UKCA Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below comply with the provisions of the following regulations:• S.I. 2016/1091, 11.2016(EMC Regulation; Regulation relating to electromagnetic compatibility)• 2012/3032, 12.2012(RoHS Regulation; Regulation on the restriction of the use of certain
hazardous substances in electrical and electronic equipment)

Pirani Standard Gauge
PSG550, PSG552, PSG554
Standards
Harmonized and international / national standards and specifications:• EN 61000-6-2:2005 (EMC: generic immunity standard)• EN 61000-6-3:2007 + A1:2011 (EMC: generic emission standard)• EN 61010-1:2010 + A1:2019 + A1:2019/AC2019(Safety requirements for electrical equipment for measurement, control
and laboratory use)

• EN 61326-1:2013; Group 1, Class B (EMC requirements forelectrical equipment for measurement, control and laboratory use)

Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers

tina60e1-c

18 January 2023

18 January 2023

Dr. Christian Riesch
Head of Development

Marco Kern
Product Manager(2023-01)

71

Original: German tina60d1-c (2023-01)

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com