Front Load Dual Sensor
INFICON Front Load Dual crystal sensors offer proven reliability and durability and have the best thermal
stability of any sensor head on the market. The dual sensor provides a backup crystal and is essential for
critical processes where it is desirable to have a second crystal in the vacuum chamber.
The front load design allows for easy insertion of the crystal holder in applications lacking sufficientroom for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently
in the field, if necessary. Sensors can be ordered individually or in a sensor / feedthrough combinationthat can be either welded or assembled with compression fittings.
Sensor Configurations
The Front Load Dual Sensor is available in a standard mount configuration where thewater tubes are parallel to the crystal face. A pneumatically driven crystal shutter
comes standard to protect the back up crystal, while the primary crystal monitors thedeposition rate. The shutter is designed to flip down allowing easy crystal replacement.
The exposed crystal electrode is fully grounded to effectively eliminate problems due to
RF interference.
Feedthroughs
INFICON offers two feedthroughs, a 1 inch bolt feedthrough or a 2¾ inch (CF40) ConFlat® flange
feedthrough. KF40 feedthroughs are available on request.
Feedthrough Connection
Front Load Dual Sensors can be ordered in combination with a feedthrough. The sensor / feedthrough connection can be either made with compression fittings or welded when in combination with a 1 inch bolt.
Compression fittings allow for easy adjustability without the need for brazing or welding. The feedthroughcan be moved along the length of the tubes allowing the length inside the vacuum systems to be adjusted
over a range of 20.3–71.1 cm (8–28 in.). Once the desired length is determined, the compression fittings
allow for a finger tight tube seal.

AD VA N TAGE S■

Dual crystals■

Crystal shutter■

Front load crystal holder■

Easy installation■A vailable with:– 2.54 cm (1 in.) bolt feedthrough– CF40 feedthrough■

Adjustable length if ordered with compression fittings■

No brazing required if ordered with compression fittings or welded to feedthrough■Sensor / feedthrough combinations available welded to customer specified lengths.

O RD E R I N G I N F ORMAT ION
Front Load Dual Sensor (with in-vacuum cables)DL –Type of sensor (Includes in-vacuum cable, crystal snatcher
and user manual. Crystals sold separately)
Standard Sensor ...............................................................................
(water lines parallel)A

Length of sensor (see notes 1 and 5)
Standard length.................................................................................
includes 78.1 cm (30.75 in.) in-vacuum cable (see note 4)

E

Feedthrough (see note 2)None .................................................................................................
1 in. bolt ...........................................................................................
CF40 ................................................................................................

NOTE 1:
Orders for a WELDED sensor/
feedthrough combination aremeasured from center of the crystal
to the vacuum side (sealing surface)of the feedthrough. Once a welded
sensor order is confirmed, it cannot becancelled.
NOTE 2:Feedthrough configuration varies
depending on options selected (Front
Load or Cool Drawer, with or without
shutter, type of feedthrough, etc.).
Example: SL-A0E37 uses feedthroughPN 002-042 while SL-A1E37 uses
feedthrough PN 750-030-G1.

034

Feedthrough connection (see notes 3 and 5)
Sensor not connected to feedthrough ................................................
Sensor welded to feedthrough ..........................................................
Feedthrough equipped with Ultra-Torr compression fittings ...............
(allows for adjustable sensor length).
Welded sensor length(use only when feedthrough connection is 7)(see notes 2 and 5)
Not required when feedthrough connection option is 0 or 8.
Weld length in centimeters, 20–70 cm (8–27.5 in.). .........................
Weld length in centimeters, 71–99 cm (28–39 in.). ..........................
*** Other lengths may be available: contact factory.
Other lengths will be considered a special order
and will be subject to additional cost and lead time

–NOTE 3:
Front Load Dual sensors ordered witha CF40 feedthrough cannot be welded
due to dimensional limits of the CF40.

078

NOTE 4:For sensors ordered without a weld
connection (option “0” or “8”), tubes
are made to a length of approximately76.2 cm (30 in.)
NOTE 5:
Front Load Dual sensors welded tolengths between 28 and 34 inches will
include a 36 inch in-vacuum cable.
Sensors welded to lengths between 34
and 39 inches will include a 48 inch
in-vacuum cable.

20–70
71–99

The following combinations are not available: (see notes 3 and 4):
DL-AE47, DL-AG47, DL-AE38, DL-AG38
Examples of non-valid part numbers include all options with no feedthroughconnection or compression fittings and a welded sensor length; for example,DL-AE40-20, DL-BE40-20, etc.

NOTE: (2) indicates that two xiu or oscillator
packages are required for a typical dual
sensor installation. 779-220-G1, crystal
two switch option allows operation with
only one oscillator (XIU).

Sensor(2) In-Vacuum Cables

Substrate

Source Shutter

FeedthroughTo 80-90 PSIG
air supply

750-420-G1
Solenoid Valve

2

Front Load Dual Sensor

Controller or Monitor(2) Short 6 in.
BNC cables(2) Oscillators (XIUs) to instrument
interconnect cables(2) Oscillators or XIUs

To crystal switch relay

S P E C I F I C AT ION S
DL-AE00 series Front Load Dual Sensor specifications
Maximum bakeout temp with no water

130°C

Maximum operating isothermal environment
temperature with minimum water flow

400°C

Size (maximum envelope without shutter)

39.12 x 82.04 x 49.54 mm (1.54 x 3.23 x 1.95 in.)Water tube and coax length, “E” sensor

Standard 762 mm (30 in.)

Crystal exchange

Front-loading, self-contained package for ease of exchange.
Shutter flips up to ease access to the holders.

Mounting

Two #4-40 tapped holes on the back of the sensor body

Installation Requirements
Feedthrough	One 69.85 mm (2¾ in.) ConFlat® with two Microdot®, two pass water and air, orOne 25.4 mm (1 in.) bolt with two Microdot, two pass water and air.
Other

1) Valve assembly for air — PN 750-420-G1
2) Two oscillators or one oscillator and 779-220-G1 CrystalTwo Switch designed to interface
with the deposition controller.
3) F or automatic operation, the deposition process controller must be designed for theimplementation of this feature.

Utilities

1) Minimum water flow 150-200 cc/min, 30°C max (Do not allow to freeze.)
2) Air, 80 PSIG (5.5 bar) [552 kPa] very low volume, DO NOT EXCEED 110 PSIG (7.6 bar) [760 kPa]

Water quality	Coolant should not contain chlorides as stress corrosion cracking may occur.
Extremely dirty water may result in loss of cooling capacity.
Materials
Body and holder

304 Type stainless steel

Springs

Au plated Be-Cu

Water tubes	S-304, 3.175 mm (0.125 in.) OD x 0.381 mm (0.015 in.) wall thickness
seamless stainless steel tubing
Connector (Microdot)

Stainless steel, Teflon® and glass insulated

Insulators>99% Al2O3WireTeflon insulated copper

Other mechanical parts

304 or 18-8 stainless steel

Braze

Vacuum process high temperature Ni-Cr alloy

Crystal0.550 in. (13.97 mm) diameter

3Front Load Dual Sensor

S P E C I F I C AT ION S
Feedthrough specifications
NOTE: Sensor/feedthrough combination specifications are determined by lowest component specification
1 in. bolt and Ultra-Torr (compression fitting) terminations:
Materials

304 stainless steel, Teflon, ceramic, beryllium nickel, VITON®

Temperature

Operational environment to 300ºC with water cooling or 165°C without

Mounting

1.015 in. ±0.010 in. diameter aperture

CF 40 welded terminations:
Materials

304 stainless steel, Teflon, ceramic, beryllium nickel

Temperature

Operational environment to 450°C with water cooling or 165°C without

Mounting

Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min.

S PA R E PA RT S LIST
P/N

Description

007-007

Retainer spring (for crystal holder)

007-023

Ceramic retainer

007-044In-vacuum cable, 78.1cm (30.75 in.)

080-018

Set screw (for female coax)

082-044

Teflon screw (for leaf spring)

750-115-P4

Coupling (for bellows assembly)

750-169-P2

Bellows assembly (coupling not included)750-171-P1

Finger spring contact

750-172-G1

Crystal holder (includes retainer spring)

750-174-P2

Female coax

750-175-P1

Insulator (underneath leaf spring)

750-188-P3

Leaf spring

750-210-G1

Shutter module (bellows assembly, shaft assembly,and shutter assembly)

750-215-G1

Shaft assembly (part of shutter module)

750-216-G1

Shutter assembly (part of shutter module)

321-039-G13

In-vacuum cable 152.4 cm (60 in.)4

Front Load Dual Sensor

D I M E N S I ON S
DL-AE00 Front Load Dual Sensor (sensor only)NOTE: Measurements in cm [in.]54.5 [2.15]

810.6 [31.9]

DUAL CRYSTAL SENSOR ASSEMBLY REF.

62.0 [2.44]

26.9 [1.06]
23.4 [0.92]

39.2 [1.54]

54.5 [2.15]
1.9 [0.08]
10.2 [0.40]

0.136 IN. DIA THRU HOLE, TWO PLACES
17.5 [0.69]

SHUTTER REF. (SHOWN ROTATED FOR CLARITY)#4–40, FOUR PLACESCABLE, 781.4 [30.75] LONG
5.1 [0.20]

49.5 [1.95]

10.2 [0.40]
14.7 [0.58]
56.0 [2.20]

46.7 [1.84]

82.1 [3.23]
SHUTTER ADAPTER REF.

D I M E N S I ON S
Feedthrough used for DL-AE40 sensor / feedthrough combination (feedthrough PN 002-080, shown with 750-420-G1 solenoid valve)
NOTE: Measurements in cm [in.]229 [9.0]

69 [2.73] DIA

7 [0.265] DIA
SIX HOLES EQL SP
ON 59 [2.312] BCD

13 [0.5]

127 [5.0]

10 [0.40]

33 [1.32]

11 [0.45]
BNC CONNECTORUG 1094/U
TYP TWO PLACES

WATER
10 [0.4]
WATER
CUSTOMER WIRE CONNECTION
70 MA SERVICE
24 V (ac) or V (dc)
FOR OPERATIONSEE NOTE 4
142 [5.6]
3 [0.125]OD TUBINGOUTPUT PORTMANUAL OVERRIDE REF

SUPPLY PORT NORMALLY CLOSED
3 [0.125] OD TUBING REQUIREDLED STATUS INDICATOR REF

EXHAUST PORTNORMALLY CLOSED

5Front Load Dual Sensor

D I M E N S I ON S
Feedthrough used for DL-AE48 sensor/feedthrough combination (feedthrough PN 206-890-G2)
NOTE: Measurements in cm [in.]Ø 6.73 [0.26] DIA
SIX HOLES EQ SP ON A
58.7 [2.31] DIA BC

Mating air fitting (10-32) for 750-420-G1 solenoid valve

10.16 [0.4]57.15 [2.25]

11.42 [0.42]

32.64 [1.28]
11.46 [0.45] TYP

5.09 [0.2] TYP

38.09 [1.5]
TYP THREE PLACES

MATING AIR FITTING (10–32) FOR 750-420-G1
SOLENOID VALVE
32.64[1.28]

12.7 [0.5]165.1 [6.5]Ø 69.34 [2.73]
CONFLAT FLANGE

251.83 [9.91]
TYP THREE PLACES

D I M E N S I ON S
Feedthrough used for DL-AE37 and DL-AE30 sensor/feedthrough combination (feedthrough PN 750-707-G1)
NOTE: Measurements in cm [in.]304.8 [12.0]

BNC CONNECTOR

1.52 [0.06]

75.31[2.96]

50.8
[2.0]

127.0
[5.0]

9.65 [0.38]

7.80 [0.31]

7.14 [0.28]

3.56 [0.14]

14.27 [0.56]

7.11 [0.28]#10–32 UNF THDTWO PLACESBNC CONNECTOR

7.14 [0.28]#25.4 [1.0]
1–14 UNF THD

38.19[1.50]

126.11[4.96]

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