Common specifications

anoNT

denotes Steel Honeycomb Bench.
TDI-107LA ～ TDI-6015LA (cf. Individual specifications)

ModelSpecifications

TDIS-107LA ～ TDIS-6015LA (cf. Individual specifications)

Isola ion Method

Vertical direc ion: Herz Air Spring, Horizontal direction: Herz high-performance horizontal Vibration Isolation System

Control Method

Vertical direction: Air damping by an orifice, Horizontal direction: High-performance damping with special rubber

Acoustic Isolation
Vibration Isolation
Supporting themeasuring environmentable

HOA-107LA ～ HOA-6015LA (cf. Individual specifica ions)

Model

HOS-107LA ～ HOS-6015LA (cf. Individual specifica ions)

Specifications
Isola ion Method

Ver ical direction: Herz Air Spring

Control Method

Ver ical direction: Air damping by an orifice

Resonant Frequency

Vertical direction: About 1.3 Hz (*TDI/TDIS: Horizontal direction: About 0.6 Hz (maximum load on board))
TDI/HOA: Aluminum Honeycomb Core

TDIS/HOS: Steel Honeycomb Core

Honeycomb core*Nonmagnetic Stainless Steel Honeycomb Core is also available.
Leveling Method

Auto-Leveling (3 Leveling Sensors included)

Air Supply System

External air supply required
0.3 – 0.7 Mpa (0.3 – 0.7 kg/m2)

Pressure requirement
Top Plate Finish

Machined mounting plate with a tapped M6-25 mm matrix, Surface: Non-painted (Black paint finish also available.)

Bench Materials

Upper face material: Magnetic Stainless Steel Plate 5 Tmm

High-performance Three Dimensional Vibration Isolation System

Lower face material: Hot-rolled Steel Plate 4.5 Tmm※ Special order tapped hole configurations are available for an extra charge.

Individual specifications
Model

TDI/HOA-107LA

TDI/HOA-129LA

TDI/HOA-1510LA

TDI/HOA-1512LA

TDI/HOA-189LA

TDIS/HOS-107LA

TDIS/HOS-129LA

TDIS/HOS-1510LA

TDIS/HOS-1512LA

TDIS/HOS-189LA

Bench Dimensions (mm)1,000 x 700 x 100T

1,200 x 900 x 100T

1,500 x 1,000 x 150T

1,500 x 1,200 x 150T

1,800 x 900 x 150T

External Dimensions (mm)1,000 x 700 x 750H

1,200 x 900 x 750H

1,500 x 1,000 x 800H

1,500 x 1,200 x 800H

1,800 x 900 x 800H

Specifications
Number of Springs

4150 kg

200 kg300 kg300 kg300 kgTotal Weight (TDI/HOA)

Load Capacity

140 kg / 135 kg

192 kg / 205 kg

240 kg / 255 kg

317 kg / 367 kg

300 kg / 350 kg

Total Weight (TDIS/HOS)

157 kg / 152 kg

215 kg / 228 kg

288 kg / 303 kg

375 kg / 425 kg

351 kg / 401 kg

Model

TDI/HOA-1812LA

TDI/HOA-2010LA

TDI/HOA-2012LA

TDI/HOA-2412LA

TDI/HOA-2615LA

TDIS/HOS-1812LA

TDIS/HOS-2010LA

TDIS/HOS-2012LA

TDIS/HOS-2412LA

TDIS/HOS-2615LA

Bench Dimensions (mm)1,800 x 1,200 x 150T

2,000 x 1,000 x 150T

2,000 x 1,200 x 150T

2,400 x 1,200 x 250T

2,600 x 1,500 x 250T

External Dimensions (mm)1,800 x 1,200 x 800H

2,000 x 1,000 x 800H

2,000 x 1,200 x 800H

2,400 x 1,200 x 800H

2,600 x 1,500 x 800H

Specifications
Number of Springs

4300 kg

300 kg300 kg

500 kg

500 kgTotal Weight (TDI/HOA)

Load Capacity

352 kg / 401 kg

343 kg / 388 kg

379 kg / 426 kg

568 kg / 530 kg

670 kg / 700 kg

Total Weight (TDIS/HOS)

422 kg / 471 kg

407 kg / 452 kg

457 kg / 504 kg

733 kg / 695 kg

935 kg / 965 kg

Model
Specifications

TDI/HOA-3012LA

TDI/HOA-3015LA

TDI/HOA-3515LA

TDI/HOA-4015LA

TDI/HOA-6015LA

TDIS/HOS-3012LA

TDIS/HOS-3015LA

TDIS/HOS-3515LA

TDIS/HOS-4015LA

TDIS/HOS-6015LA

Number of Springs46

Bench Dimensions (mm)3,000 x 1,200 x 330T

3,000 x 1,500 x 330T

3,500 x 1,500 x 330T

4,000 x 1,500 x 400T

6,000 x 1,500 x 400T

External Dimensions (mm)3,000 x 1,200 x 800H

3,000 x 1,500 x 800H

3,500 x 1,500 x 800H

4,000 x 1,500 x 800H

6,000 x 1,500 x 800H

500 kg

500 kg

500 kg

500 kg1,000 kg

Total Weight (TDI/HOA)

Load Capacity

774 kg / 794 kg

870 kg / 892 kg

1,067 kg / 1,050 kg

1,211 kg / 1,186 kg

1,984 kg / 1,784 kg

Total Weight (TDIS/HOS)

1,043 kg / 1,063 kg

1,209 kg / 1,231 kg

1,462 kg / 1,445 kg

1,743 kg / 1,718 kg

2,763 kg / 2,577 kg*Nanotable is our registered trademark.
※Herz continually works to improve the performance and function of our tables. Thus, specifications are subject to change without notice.
We appreciate your understanding.

Other Products
Vibration Isolation

Passive and Active Vibration Isolation Systems

Atmospheric Disturbance Isolation

Acrylic boothSound Isolation

Acoustic Enclosures

LARGE SCALE VIBRATION ISOLATION SYSTEM

Active vibration isolation series TS,AVI

Herz Co.Ltd.
YCS Bldg. 18 Fl., 5-1 Sakae-cho, Kanagawa-ku Yokohama-shi,Kanagawa-ken
TEL : +81-(0)45-450-2211 FAX : +81-(0)45-450-2211
E-mail：sales@herz-f.co.jp Web：www herz-f.co.jp

Herz Co.,Ltd.

Choosing the most suitable Vibration Isolation system:
Brief

High-performance Vibration Isolation System

A vibration isolation system should be chosen based on the instrument and application that it will be used for. Choosing the correct
system will optimize the performance of the isolation system and the function of the instrument.

The Evolution of Vibration Isolation Systems② We recommend the most suitable Vibration① Determining the size of the Vibration Isolation system:
The height of the instrument’s center of mass (H) should never exceed half of the span ofIsolation system based on the following information:
the smaller dimension between air springs (L). Using the figure below, H should be lessthan L / 2. Ideally, H should be equal or less than L / 4.
1. The instrument name.

In July 1990, we developed the SHG high-performance Vibration Isolation System, the predecessor of the TDI Vibration
Isolation System.
We developed the TDI high-performance three-dimensional six-degree-of-freedom Vibration Isolation System based on
this technology. As the horizontal and vertical isolation mechanisms are unified, the superior TDI isolates vibration fromevery direction.
Herz products are designed with our main goal, “Supporting the Measuring Environment” in mind. With today’s
instruments rapidly increasing in precision and resolution requirements, the high performance TDI is the ideal table for
the Nanotechnology Era.

1. H=1/4L High stability region
2. H=1/2L Stability region
3. H=3/4L Metastable region

HL1L

1＝The longer span
between springs

12575125

2. The application of the instrument.
3. The degree of resolution or precision
with which the instrument will beoperated.
4.
Total dimensions and weight ofＨinstrument.
5. Structure of the instrument.
6. Presence of moving stages.
7. Placement of the instrument
２Ｌ
8. Whether or not the instrument is sensitive2
to low frequency vibrations.
Ｌ ＝The shorter span between springs
9. The load restrictions of the room floor
10.Whether or not the instrument is sensitive
to air disturbance and/or sound.

Necessity of analysis
In the process of developing our honeycomb benches, we perform modal analysis in order to understand the benches’ dynamicproperties. Modal analysis provides two benefits:
1. We can avoid resonance with floor vibrations by understanding the natural frequency and mode shapes of the benches andcomparing that information with site survey data.
2. We can predict the most suitable position of the table by considering the vibration characteristics of the table and instrument.

Features
Vibration Isolation Performance of TDI-1510LA

Vibration Isolation mechanism:* Note on data: vibration isolation performance varies by the level and type of vibration
input.

An example of modal analysis

Horizontal transmissibility

Vertical transmissibility
Z direc ion

2000-20

T r nsmiss bi ity [dB]

20［dB］

Y irec ion

T ran mis ib lity

An air spring is the basic element of a Vibration Isolation System.
Our original ‘High Precision Air Spring’ has been continually developedsince Herz was established. The TDI achieves vibration isolation in all six
degrees of freedom in three dimensional space by unifying the mechanisms
for vertical isolation and horizontal isolation. Our vibration isolation
systems have won the trust of consumers by delivering consistent resultsover many years.

-40-60Analysis model of an aluminum honeycomb bench displayed in two dimensions.
①An analysis model (in two dimensions) An aluminum honeycomb bench 1000*700*100t Materials: Upper surface SUS410 t=5.0 Lower surface SPHC t=4.5-20

Mode 1362.712Hz-40

Mode 2415.998Hz

Mode 3496.815Hz

Mode 4567 218Hz

Mode 5605.090Hz

Mode 6667.960Hz-60-80-8001020
Frequency ［Hz］

300102030

Fre uency [Hz]Honeycomb bench / Plate:

The honeycomb bench and plate should be chosen according to the instrument to be isolated.
We developed the aluminum honeycomb bench to ensure lightweight and high stiffness.
This honeycomb bench overcomes the load restrictions of floors and is widely popular.
Herz classifies a honeycomb bench and plate as follows…

Type of honeycomb
bench and plate

Aluminum honeycomb benchLightweight and high stiffness are suitable for floors with low load capacity.
* For Japan and foreign countries.

Steel honeycomb bench

Steel honeycomb offers the highest level of stiffness and a high resonant frequency,
as shown in the analysis model. * For Japan and foreign countries.

* Nonmagnetic stainless steel
honeycomb bench

A honeycomb core made of nonmagnetic stainless steel for instruments thatmaybe affected by magnetism. Also available for the top and bottom plate.
* Only available in Japan.

①An analysis model (in two dimensions) A steel honeycomb bench 1000*700*100t Materials: Upper surface SUS410 t=5.0 Lower surface SPHC t=4.5
Mode 2451.177Hz

Mode 3566.706Hz

Mode 3817.319Hz

Mode 4826.176Hz

Mode 5952.383Hz

Mode 61092.000Hz①An analysis model (in two dimensions) An aluminum honeycomb bench 1800*900*150ｔ Materials: Upper surface SUS410 t=5.0 Lower surface SPHC t=4.5
Mode 1
248.389Hz

Mode 2251.745Hz

Mode 3406.783Hz

Mode 4426.183Hz

Mode 5452.175Hz

Mode 6514.852Hz

Top surface material ・・・ Magnetic stainless steel plate (standard)・・・ Nonmagnetic stainless steel plate

Surface materials for thehoneycomb bench

Bottom surface material ・・・ Steel plate (standard)・・・ Magnetic stainless steel plate
・・・ Nonmagnetic stainless steel plate

Vibration Isolation support frame:
The support frame offers high rigidity to support the bench and instrument. The frame also includes a damping system that offers
vibration isolation.

Automatic Horizontal Leveling:Three auto-leveling sensors maintain the system’s horizontal position. (External air supply not included.)①An analysis model (in two dimensions) A steel honeycomb bench 1800*900*150ｔ Materials: Upper surface SUS410 t=5.0 Lower surface SPHC t=4.5
Mode 1
287.684Hz

Mode 2303.820Hz

Mode 3553.648Hz

Mode 4617.2723Hz

Mode 5733.222Hz

Mode 6761.277Hz