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Analog Mass Flow Controller

1000 Series≪Features≫● It is an analog model specializing the basic functions of the mass flow controller.
●Performance and reliability are improved with basic functions that pursue original technology.
● Two types of Power Supply Control, Floor-standing "PA01S" and Panel Mount "PA01PS".
● Compact size.
● Suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
● Input & Output Signal：Analog (0～5VDC)● To control the mass flow controller, a separate control power supply and a signal cable are required.
●Calibration certificates, calibration reports and traceability schemes can be produced upon request for an
additional fee.
Option: Possible to manufacture a flow rate accuracy of ± 1% F.S.
【Specification】（※）under development

Mass Flow Controller (N.O.)

C1005

C1020

C1030

C1050

C1100

Mass Flow Controller (N.C.)

C1005 NC

C1020 NC（※）

C1030 NC（※）

C1050 NC（※）-M1005

M1020

M1030

M1050

-

10,20 SLM

30 SLM

50 SLM

100 SLM

Mass Flow Meter

10,20,30,50,100,200
Flow range (N2 equivalent)

300,500 SCCM
1,2,3,5 SLMGases
Valve type
Flow rate control range
Accuracy

N2, Air, Ar,O2,H2,He,CO2 etc.

Air・N2(Please consult with us about corrosive gas)
NO: Normally Open

NC: Normally Closed (Excluding Mass Flow Meter)

5-100％ F.S (Excluding Mass Flow Meter)±2％ F.S (Accuracy guaranteed between 15-35℃)

Setting signal0.25-5VDC (Excluding Mass Flow Meter)

Output signal

0-5VDC

Repeatability
Response speed
Operating differential pressure±0.2％ F.S.

±0.5％ F.S.

≦6 sec≦10 sec50-300 kPa（C1020NC、100～300kPa）≦15 sec

200-300 kPa

Pressure Resistance

1 MPa(G)Operating temperature

5～50℃（Accuracy guaranteed between 15～35℃）、≦85％RH（No condensation permitted）

Leak Integrity

1×10-7Pa･m3/sec He

Mounting attitude

Not Specified (Free)

Drive power source+15VDC：60mA、-15VDC：150mA

Communication

Analog 0-5 VDC

Wetted surface material

SUS316，PTFE，PEEK，Fluoro-Rubber

Seal material

Fluoro-Rubber

Actuator system

Thermal (Excluding Mass Flow Meter)

Surface Finishing

Machined finish

Standard fittings

1/4in.SWL (equivalent), One-touch ﬁttings,※ For other fitting, please contact us.

≪Dimensions≫

C1005/M1005

C1020～1050/M1020～1050/C1100
All dimensions are in inches with [mm] in brackets.

≪Ordering≫

C 1005 NC – 4S2 – 5L – N2（e.g.）①②③④⑤⑥① Type C:Controller M:Meter② Flow range 1005(10 SCCM ～ 5 SLM ) 1020(10 ～ 20 SLM) 1030(30 SLM)
1050(50 SLM) 1100(100 SLM)
③ Valve type w/o :Normally open NC :Normally closed (1100 not covered)④ Fitting (*1) 4S2:1/4in.SWL(equivalent) 6S2:3/8in.SWL(equivalent) KQ2:One-touch fittings⑤ Full scale (*2) e.g. :50 SCCM→50 5 SLM→5L⑥ Gas types (*3) N2, Air,Ar,O2,H2,He,CO2 etc.
*1. For other fitting, please contact us.
*2. At FCON, flow rates (SCCM, SLM) are converted to values at 0℃, 101.3kPa abs (1atm) for calibration.
Please specify separately if you wish to calibrate at 20 ℃or 25 ℃.
*3. Gas type is an example; please contact us for other gases.

≪Signal cable≫
When purchasing the mass flow controller, it is possible for us to produce signal cables and replacement cables for thepower supply control currently in use. In the situation whereby the shape of the signal cable connector from theequipment is different, if the information of the connector shape and pin assignment is available, we can manufacture
the signal cables in addition to the standard products. Depending on the type of connector, it may be difficult tomanufacture. Please feel free to contact us for more details.
The contents of this catalog are subject to change without notice.