21700

3-Position Gate Valves

Introduction ..........................................

Page

64

Specifications ......................................

Page

65

Theory of Operation ...........................

Page

66

Model Key Guide ................................

Page

68

1.5" ID(DN40mm) ...............

Page

69

2.0" ID(DN50mm) ...............

Page

70

2.5" ID(DN63mm) ...............

Page

71

3.0" ID(DN75mm) ...............

Page

72

4.0" ID(DN100mm) .............

Page

73

6.0" ID(DN150mm) .............

Page

74

8.0" ID(DN200mm) .............

Page

75

10.0" ID

(DN250mm) .............

Page

76

12.0" ID

(DN300mm) .............

Page

77

14.0" ID

(DN350mm) .............

Page

78

16.0" ID

(DN400mm) .............

Page

78

20.0" ID

(DN500mm) .............

Page

79

ANSI, JIS & Custom .............................

Page

80

HVA • Quality Vacuum
Vacu
uum Valves since 19733 • wwwwww.highvac.com
w.h
.hig
ighv
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ac.com • sales@highv
sales@highvac.com
hvac
hv
acc.coomom • 7
775-359-4442
75-359
75-3
75
59-4
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444
442
2

21700

Table of Contents

6321700 Series 3-Position Gate Valves
Introduction
Product Features- 1,000,000 Cycles- 3-position pneumatic actuation- Mechanically preset, remote-controlled intermediate position- HV and UHV with stainless steel body and internal components

21700- Sizes from 1.5” ID (DN40) to 20” ID (DN500)- Stainless steel welded bellows- Standard KF, ISO, CF, ANSI, JIS or custom flange options- Roughing, gauge, purge ports available- High temperature options up to 250°C- 440C hardened stainless steel drive shaft and pins
Model Number 21712-0803R
8” ID (DN200) Pneumatic ISO-F- Easily customizable to work with almost any application- Designed, manufactured and assembled in the USA

Description
The 21700 Series 3-position Gate Valves feature a positive shut off; the valve will maintain its closed status in theevent of a power loss followed by a pressure drop. Linear actuation allows the use of a welded bellows to seal
the actuator (i.e. no rotary seals). Shock and vibration are reduced to a minimum by a unique air cylinder design.
There are no mechanical locks inside the vacuum, which is extremely beneficial for semiconductor and sensitive
processes requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate
generation and providing smoother actuation.
The HVA stainless steel body offers one of the smallest interior sur-face areas in the vacuum valve industry. The
body and all major internal components are vacuum furnace brazed at 1100°C, at 1x10-6 mbar, ensuring
maximum joint integrity. This eliminates the possibility of virtual leaks or entrapment areas and minimizes body
distortion found in conventionally welded valves. For maintenance purposes, the carriage assembly can beremoved from the body without removing the valve from the system.

Applications
The 21700 Series Pneumatic 3-Position Gate Valves are designed for use in etching, CVD and any other processthat requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve willcontribute to an exceptional pressure control capability.These valves may also be utilized to smooth the transition
from rough to high vacuum.
These valves can be used with cryopumps, turbomolecular pumps, ion pumps, or in any application requiring
clean, high cycle, low maintenance and low outgassing valves with positive shut off characteristics. Available instandard CF-F, KF, ISO, or ANSI flange configurations and optional JIS or custom configurations.

64

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21700 Series 3-Position Gate Valves
Specifications
Standard Specifications
Materials

Maximum ∆ pressure before opening

21700

Valve body and mechanism
304 stainless steel
Welded bellows shaft seal
AM-350
Drive shaft and pins
440C hardened stainless steel
Bonnet / gate seals
HV
Viton® elastomer
UHV
OFHC copper / Viton® elastomer
VacuumPressure range
HV
1 x 10-9 mbar
UHV
1 x 10-10 mbar
Leak rate< 2 x 10-9 mbar l/s
Differential pressure
1 bar in either direction≤ 30 mbar

Temperature
without solenoid
Elastomer sealed bonnet
150°C
Metal sealed bonnet
Valve open
200°C
Valve closed
150°C
Actuator
Pneumatic
60°C
Mechanism
Air service
80 psig (5.5 bar)
Solenoid
4.0 Watts
supplied voltage
120 VAC 50/60 Hz
optional voltage
24, 200, 240 VAC 50/60 Hz
or 12, 24 VDC
Position indicator, max.
Reed switch for open & closed

115 VACor 28 VDC, 20mA
Microswitch for third position
115 VAC, 5 A
optional voltages
250 VAC, 5A
or 28 VDC, 5 A resistive load
28 VDC, 3 A inductive load
Cycles Until Service
Sizes 1.5" to 12" [DN40 to 320]

1,000,000

Sizes 14" to 20" [DN350 to 500]
(Application dependent)> 500,000

Notes
N t
• Dimensions given in U.S. System and [metric]• Conductance ratings based on air, given in liters
per second• Due to ongoing product development, prices,dimensions and specifications are subject tochange without notice
Options
All 21700 Series Valves may be equipped withalternative flanges, solenoids and seals. Contact
HVA to discuss your requirements.
• Alternate voltage controls• JIS configurations• Custom flange sizes• Gauge ports, roughing ports and purge ports• Microswitches for position indicators• Quick clamp bonnet• High temperature components, including O-rings,
microswitches and actuator• Water cooled flanges• Custom materials, such as Inconel® or Kalrez®
• Special solenoid or position indicator connectors

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6521700 Series 3-Position Gate Valves

21700

Theory of Operation

Theory of Operation
The 3-Position Gate Valves employ two pneumatic solenoids and an air pressure regulator to achieve thethree positions of:• First Position: fully open
• Second Position: fully closed• Third Position: partially open, adjustable
Solenoid A controls the fully open and fully closed positions. Solenoid B controls the partially open position. Standard
electro-pneumatic solenoids have air supplied to the input port. When the solenoid is deactivated or at rest, the airflows through the top supply port. When the solenoid is electrically activated, the air stops flowing through the top
supply port and flows through the bottom supply port.

Standard Opening and Closing of the ValveWith air supplied to the input of both solenoids, no air is supplied through the top port of Solenoid B because it isplugged. In Solenoid A, air flows through the top port of the solenoid, through the hollow top drive shaft and into the air
cylinder to close the valve. This is the standard Normally Closed configuration.
When Solenoid A is electrically activated, air stops flowing through the top supply port and now flows through thebottom supply port, opening the valve. Air that had closed the valve is exhausted back through the hollow top drive
shaft.

Optional Opening and Closing of the Valve
Re-plumbing the air lines out of Solenoids A and B results in alternative “Normal” configurations. One such option
would be to switch the plug on Solenoid B from its standard top port to the bottom port. In this configuration, the valve
is Normally Closed, but when Solenoid A is activated, the valve moves to the partially open position rather than to thefully open position.

Standard Operation of the Partially Open Third Position
With both solenoids in a standard plumbing configuration, air pressure is essentially directed to both the top and thebottom of the gate actuator piston. An air regulator in the open line reduces the air pressure by 15 to 20 psi. Thisdifference in air pressure allows the final position of the gate to be determined by the manual setting of the top
adjustment knob.
The gate may also be moved to the partially open position by activating Solenoid B, while the valve is fully open. The
full air supply pressure applied to the adjustable piston is sufficient to press down and move the gate piston to the partially open position.
IMPORTANT: It is recommended to bench test the valve to evaluate the true setting of the partially open position prior
to installation of the unit in a system.
The next page details standard configuration operation.

66

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21700 Series 3-Position Gate Valves
Theory of Operation
1. Open
Solenoid A ON
Solenoid B OFF

21700

When Solenoid A is electrically activated, air flows throughthe bot-tom supply port directly into an air pressure
regulator. The regulator is adjusted so that its output
pressure is approximately 15 to 20 psi less than the input
pressure. Even though it is less than full pressure, this
output pressure is sufficient to open the valve.

2. Closed
Solenoid A OFF
Solenoid B OFF
With both Solenoids deactivated, air pressure is directedto the top ports. The top port of Solenoid B is plugged, so
no air flows. The top port of Solenoid A is directed to thehollow top drive shaft and into the air cylinder to close thevalves. This is the standard Normally Closed
configuration.

3. Third Position
Solenoid A ON
Solenoid B ON
Solenoid B does not have an air pressure regulator along
its supply line, so when Solenoid B is activated, full air
supply pressure is applied to the top of a separate,
additional piston within the air cylinder. This adjustablepiston moves down to a stop set manually by adjusting
the knob at the top of the valve. The full air pressure is 15
to 20 psi more than the Solenoid A pressure, so when thevalve tries to open, its actuator piston meets theadjustable piston and is held at that “third position.”

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6721700 Series 3-Position Gate Valves
Model Key Guide

21700

Example: 21712-0404R = 21700 Series gate valve, pneumatic actuator, Viton gate & bonnet seals,
120VAC solenoid, 4” ID CF (6” OD) flanges with Metric thread, reed switch
position indicator

2 1 7 1 2 - 0 4 0 4 R
Position Indicator: R = Reed Switch open/close & microswitch for 3rd/ M = Microswitch for open/close & 3rd /X or Blank = No position Indicator

Flange Type: 0 = CF (UNF) / 1 = ANSI, small OD / 2 = ANSI, large OD /3 = KF/ISO-F / 4 = CF (Metric) / 5 = JIS / 6 = ISO-K

Valve Port Size ID (inch): 015 = 1.5” / 020 = 2” / 025 = 2.5” / 030 = 3” /040 = 4” / 060 = 6” / 080 = 8” / 100 = 10” /107 = 10.75” / 120 = 12” / 140 = 14” /160 = 16” / 200 = 20”

Solenoid Voltage: 1 = 24VDC / 2 = 120VAC / 3 = 220VAC / 4 = 24VAC
Gate & Bonnet Seals: 1 = Viton® gate & bonnet / 2 = Viton® gate / copper bonnet

3 = Kalrez® gate / copper bonnet / 6 = Kalrez® gate & bonnet

Series: 217 = 21700

Note• A suffix of -001 to -999 at the end of or a ‘9’ or ‘S’ within a Model Number indicates a valve with custom configuration.
• If a roughing/gauge/purge port is needed add the following after the position indicator:
A = KF 25
B = KF 40
C = 1.33” OD CF fixed with thru holes
D = 2.75” OD CF fixed with thru holes
S = special/custom or other68

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21700 Series 3-Position Gate Valves
40-mm

1.5-inch

21700

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

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6921700 Series 3-Position Gate Valves
2.0-inch

21700

50-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

70

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21700 Series 3-Position Gate Valves
63-mm

2.5-inch

21700

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

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7121700 Series 3-Position Gate Valves
3.0-inch

21700

75-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

72

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21700 Series 3-Position Gate Valves
100-mm4.0-inch

21700

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

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73

21700 Series 3-Position Gate Valves
6.0-inch

21700

150-mmSpecifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

74

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21700 Series 3-Position Gate Valves
200-mm8.0-inch

21700

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

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75

21700 Series 3-Position Gate Valves
10.0-inch

21700

250-mmSpecifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

76

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21700 Series 3-Position Gate Valves
300-mm

12.0-inch

21700

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

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77

21700 Series 3-Position Gate Valves
14.0-inch / 400-mm

16.0-inch

21700

350-mmSpecifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

78

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21700 Series 3-Position Gate Valves
500-mm20.0-inch

21700

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

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7921700 Series 3-Position Gate Valves
ANSI, JIS & Custom Flanges

21700

ANSI Flange Models
ANSI Flange Models are designed for high vacuum
applications, specifically when pressure ranges approximate
1x10-9 mbar and bakeout temperatures do not exceed 200ºC.
The bonnet comes standard with a Viton® elastomer O-ring.
These valves provide valving for cryopumps, turbomolecular
pumps, ion pumps and other applications requiring clean,
low outgassing valves. Pneumatic valves are supplied with a
120 VAC solenoid and a Reed switch position indicator.
Standard flanges are smooth faced, non-rotatable
and threaded. When O-ring grooves are required onflanges, please specify one of the following options:• O-ring groove on gate side only
• O-ring groove on carriage side only
• O-ring grooves on both gate side and carriage side
O-ring groove I.D. is 0.250-inch larger than the valve I.D.
Flange O-rings are not included with the valve, and may bepurchased separately.

JIS and Custom Flange Models
Valves requiring JIS flanges may be obtained through HVA(see page 195). Additionally, other specialty flanges fornon-standard installations may be custom ordered through
HVA. Contact HVA Technical Services to discuss yourrequirements.

ANSI Flange Dimensions

80

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21700 Series 3-Position Gate Valves
ANSI Valve Dimensions

21700

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8121700 Series 3-Position Gate Valves

21700

ANSI Valves

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =®
Actuator w/out solenoid (Viton / Copper bonnet) = 60°C / 60°C*®
150°C / 150°C*
Position Indicator (Viton / Copper bonnet) =*250°C options available on request.

82

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