16000
16000

Shielded Gate Valves
Table of Contents
Introduction ..........................................

Page

46

Specifications ......................................

Page

47

Theory of Operation ............................

Page

48

Model Key Guide ................................

Page

49

1.5" ID(DN40mm) ...............

Page

50

2.0" ID(DN50mm) ...............

Page

51

2.5" ID(DN63mm) ...............

Page

52

3.0" ID(DN75mm) ...............

Page

53

4.0" ID(DN100mm) .............

Page

54

6.0" ID(DN150mm) .............

Page

55

8.0" ID(DN200mm) .............

Page

56

10.0" ID

(DN250mm) .............

Page

57

12.0" ID

(DN300mm) .............

Page

58

14.0" ID

(DN350mm) .............

Page

59

ANSI, JIS & Custom .............................

Page

60

HVA
HV
VA • Quality
QualitQu
itty Vacuum ValvesValveve
es since 19733 • wwwwww.highvac.com
w.h
hig
ighv
hvac
hv
ac.com • saacsales@highvac.comaleal
ess@hig
ighv
ghv
hvac.comm • 7775-359-4442
75-3
75
-359
59
9-4
-4442
4

45

16000 Series Shielded Gate Valves
Introduction
Product Features- Shield to protect the gate from process while open
- PTFE wiper removes particulates

16000- HV and UHV with stainless steel body and internal components- Sizes from 1.5” ID (DN40) to 14” ID (DN350)- Manual and pneumatic actuation- Stainless steel welded bellows- Standard KF, ISO, CF, ANSI, JIS or custom flange options- Roughing, gauge, purge ports available- High temperature options up to 250°C
Model Number 16210-0256R
2.5” ID (DN63) Pneumatic ISO-K- Positive mechanical lock
- Easily customizable to work with almost any application- Designed, manufactured and assembled in the USA

Description
The 16000 Series Shielded Gate Valves feature a travelling shield that moves with the gate to protect it fromdebris. These valves are used in extremely aggressive applications in which recurring down time is not an option.
The shield, used with or without the purge port, greatly reduces particulate migration and prolongs the sealing
integrity of the gate O-ring.
The body material is 304 stainless steel, which can be changed to other high temperature, non-corrosive materials
for exceptionally aggressive applications. Alternative elastomer O-rings are also available.
The shielded gate valves are generally used in a pneumatically operated system and can also be configured for
manual actuation. Standard flanges include CF-F metal seal flanges for UHV applications and KF/ ISO elastomer
seal flanges for HV ranges. Other industry flanges or custom designed flanges are available upon request.

Applications
KF Flanges, ISO Bolted and Clamped Flanges, and optional ANSI or JIS Models are designed for high vacuum
applications specifically when pressure ranges approximate 1x10-9 mbar and bakeout temperatures do not exceed
250°C.The international KF/ISO configurations and elastomer O-ring flanges are used in areas requiring an easily
mountable and demountable flange seal. These valves provide valving for cryopumps, turbomolecular pumps, ion
pumps and other applications requiring clean, low outgassing valves.

46

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16000 Series Shielded Gate Valves
Specifications
Standard Specifications
Materials

Maximum ∆ pressure before opening≤ 30 mbar

Temperature
without solenoid
Elastomer sealed bonnet
150°C
Metal sealed bonnet
Valve open
200°C
Valve closed
150°C
Actuator
Pneumatic
60°C
Mechanism
Air service
80 psig (5.5 bar)
Solenoid
4.0 Watts
supplied voltage
120 VAC 50/60 Hz
optional voltage
24, 200, 240 VAC 50/60 Hz
or 12, 24 VDC
Position indicator, max.
115 VACor 28 VDC, 20 mA
Cycles Until Service(Application dependent)

16000

Valve body and mechanism
304 stainless steel
Welded bellows shaft seal
AM-350
Drive shaft and pins
440C hardened stainless steel
Bonnet / gate seals
HV
Viton® elastomer
UHV
OFHC copper / Viton® elastomer
VacuumPressure range
HV
1 x 10-9 mbar
UHV
1 x 10-10 mbar
Leak rate< 2 x 10-9 mbar l/s
Differential pressure
1 bar in either direction

100,000

N t
Notes• Dimensions given in U.S. System and [metric]• Conductance ratings based on air, given in liters
per second• Due to ongoing product development, prices,dimensions and specifications are subject tochange without notice
Options
All 16000 Series Valves may be equipped withalternative flanges, solenoids and seals. Contact
HVA to discuss your requirements.
• Alternate voltage controls• JIS configurations• Custom flange sizes• Gauge ports, roughing ports and purge ports• Microswitches for position indicators• Quick clamp bonnet• Low profile actuators• High temperature components, including O-rings
microswitches and actuator• Water-cooled flanges• Custom materials, such as Inconel® or Kalrez®
• Special solenoid or position indicator connectors

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47

16000 Series Shielded Gate Valves
Theory of Operation

16000

Theory of Operation
The Shielded Gate Valves incorporate a metal shieldthat travels with the gate during normal operation.
When the gate is fully open, the shield protects thegate from deposition materials. A purge port at the
top of the bonnet provides evacuation of gases
trapped by the withdrawn gate and shield.
When the gate is fully closed, the shield is at thebottom-most part of the valve body and completely
out of the way of the gate. The gate closes normally.

A photo of the valve highlights the shield in the fully
open position with the gate and shield withdrawn.
This concept can be added to almost any size valvethat needs protection from the application process
and contaminants originating from process work.
In order to ensure even greater protection, there is a
Teflon® wiper attached to the shield.
In the fully open or withdrawn position, this wiperpresses against all sides of the gate valve bodyinterior.This positive fit is not a full seal but it assures that the solid particles that are generated will
not migrate onto the gate, gate seal and strong backassembly, which is the transport mechanism behind
the gate.

48

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16000 Series Shielded Gate Valves
Model Key Guide

16000

Example: 16212-0404R = 16000 Series gate valve, pneumatic actuator, Viton gate & bonnet seals,
120VAC solenoid, 4” ID CF (6” OD) flanges with Metric thread, reed switch
position indicator

1 6 2 1 2 - 0 4 0 4 R
Position Indicator: R = Reed Switch / M = Microswitch /P = Reed switch w/6-pin / V = Visual
Q = Microswitch w/6-pin /X or Blank = No position Indicator

Flange Type: 0 = CF (UNF) / 1 = ANSI, small OD / 2 = ANSI, large OD /3 = KF/ISO-F / 4 = CF (Metric) / 5 = JIS / 6 = ISO-K

Valve Port Size ID (inch): 006 = 0.625” / 015 = 1.5” / 020 = 2” / 025 = 2.5” /030 = 3” / 040 = 4” / 060 = 6” / 080 = 8” /100 = 10” / 107 = 10.75” / 120 = 12” / 140 = 14”

Solenoid Voltage: 0 = no solenoid / 1 = 24VDC / 2 = 120VAC / 3 = 220VAC / 4 = 24VAC
Gate & Bonnet Seals: 1 = Viton® gate & bonnet / 2 = Viton® gate / copper bonnet

3 = Kalrez® gate / copper bonnet / 6 = Kalrez® gate & bonnet

Actuator Type: 1 = Manual / 2 = Pneumatic / 5 = Spring loaded
Series: 16 = 16000

Note• A suffix of -001 to -999 at the end of or a ‘9’ or ‘S’ within a Model Number indicates a valve with custom configuration.
• If a roughing/gauge/purge port is needed add the following after the position indicator:
A = KF 25
B = KF 40
C = 1.33” OD CF fixed with thru holes
D = 2.75” OD CF fixed with thru holes
S = special/custom or other

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49

16000 Series Shielded Gate Valves
1.5-inch

16000

40-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

50

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16000 Series Shielded Gate Valves
50-mm

2.0-inch

16000

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

51

16000 Series Shielded Gate Valves
2.5-inch

16000

63-mm

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

52

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16000 Series Shielded Gate Valves
75-mm

3.0-inch

16000

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

53

16000 Series Shielded Gate Valves
4.0-inch

16000

100-mmSpecifications
Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

54

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16000 Series Shielded Gate Valves
150-mm6.0-inch

16000

Specifications
Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

55

16000 Series Shielded Gate Valves
8.0-inch

16000

200-mmSpecifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

56

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

16000 Series Shielded Gate Valves
250-mm10.0-inch

16000

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

57

16000 Series Shielded Gate Valves
12.0-inch

16000

300-mmSpecifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

58

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16000 Series Shielded Gate Valves
350-mm

14.0-inch

16000

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

59

16000 Series Shielded Gate Valves
ANSI, JIS & Custom Flanges

16000

ANSI Flange Models
ANSI Flange Models are designed for high vacuum applications, specifically when pressure ranges approximate 1x10-9
mbar and bakeout temperatures do not exceed 200ºC. The
bonnet comes standard with a Viton® elastomer O-ring.
These valves provide valving for cryopumps, turbomolecular
pumps, ion pumps and other applications requiring clean,
low outgassing valves. Pneumatic valves are supplied with a
120 VAC solenoid and a Reed switch position indicator.
Standard flanges are smooth faced, non-rotatable
and threaded. When O-ring grooves are required onflanges, please specify one of the following options:• O-ring groove on gate side only
• O-ring groove on carriage side only
• O-ring grooves on both gate side and carriage side
O-ring groove I.D. is 0.250-inch larger than the valve I.D.
Flange O-rings are not included with the valve, and may bepurchased separately.

JIS and Custom Flange Models
Valves requiring JIS flanges may be obtained through HVA(see page 195). Additionally, other specialty flanges fornon-standard installations may be custom ordered through
HVA. Contact HVA Technical Services to discuss yourrequirements.

ANSI Flange Dimensions

60

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16000 Series Shielded Gate Valves
ANSI Valve Dimensions

16000

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61

16000 Series Shielded Gate Valves

16000

ANSI Valves

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton / Copper bonnet) =60°C / 60°C*
Actuator w/out solenoid (Viton / Copper bonnet) =150°C / 150°C*
Position Indicator (Viton / Copper bonnet) =*250°C options available on request.

62

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442