Million Cycle Gate Valves

21200

21200
Table of Contents

Introduction ..........................................

Page

26

Specifications ......................................

Page

27

Model Key Guide .................................

Page

28

.625" ID

(DN16mm) ...............

Page

29

1.5" ID(DN40mm) ...............

Page

30

2.0" ID(DN50mm) ...............

Page

31

2.5" ID(DN63mm) ...............

Page

32

3.0" ID(DN75mm) ...............

Page

33

4.0" ID(DN100mm) .............

Page

34

6.0" ID(DN150mm) .............

Page

35

8.0" ID(DN200mm) .............

Page

36

10.0" ID

(DN250mm) .............

Page

37

10.75" ID(DN273mm) .............

Page

38

12.0" ID

(DN300mm) .............

Page

39

14.0" ID

(DN350mm) .............

Page

40

16.0" ID

(DN400mm) .............

Page

40

20.0" ID

(DN500mm) .............

Page

41

24.0" ID

(DN600mm) .............

Page

41

ANSI, JIS & Custom .............................

Page

42

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25
25

21200 Series Million Cycle Gate Valves
Introduction
Product Features

21200- 1,000,000 Cycle- HV and UHV with stainless steel body and internal components- Sizes from 0.625” ID (DN16) to 24” ID (DN600)- Pneumatic actuation- Stainless steel welded bellows- Standard KF, ISO, CF, ANSI, JIS or custom flange options- Roughing, gauge, purge ports available- High temperature options up to 250°C- 440C hardened stainless steel drive shaft and pins
Model Number 21220-0600R
6” ID (DN150) Pneumatic CF-F

- Easily customizable to work with almost any application- Designed, manufactured and assembled in the USA

Description
The 21200 Series Gate Valves feature a positive shut off; the valve will maintain its closed status in the event of apower loss followed by a drop in pressure.
Linear actuation allows the use of a welded bellows to seal the actuator (i.e. no rotary seals). Shock and vibration are
reduced to a minimum by a unique air cylinder design.
There are no mechanical locks inside vacuum, which is extremely beneficial for semiconductor and sensitive processes
requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate generation and providingsmoother actuation.
The HVA stainless steel body offers one of the smallest interior surface areas in the vacuum valve industry. The bodyand all major internal components are vacuum furnace brazed at 1100°C, at 1x10-6 mbar, ensuring maximum joint
integrity. This eliminates the possibility of virtual leaks or entrapment areas and minimizes body distortion found inconventionally welded valves. For maintenance purposes, the carriage assembly can be removed from the bodywithout removing the valve from the system.

Applications
These valves can be used with cryopumps, turbomolecular pumps, ion pumps, or in any application requiring clean,high cycle, low maintenance and low outgassing valves with positive shut off characteristics. Available in threestandard flange configurations of CF-F, KF/ISO and ANSI flanges, and may also be special ordered with JIS or custom
designed flanges.

26

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21200 Series Million Cycle Gate Valves
Specifications
Standard Specifications
Materials

21200

Valve body and mechanism
304 stainless steel
Welded bellows shaft seal
AM-350
Drive shaft and pins
440C hardened stainless steel
Bonnet / gate seals
HV
Viton® elastomer
UHV
OFHC copper / Viton® elastomer
VacuumPressure range
HV
1 x 10-9 mbar
UHV
1 x 10-10 mbar
Leak rate< 2 x 10-9 mbar l/s
Differential pressure
1 bar in either direction
Maximum ∆ pressure before opening≤ 30 mbar

Temperature
without solenoid
Elastomer sealed bonnet
150°C
Metal sealed bonnet
Valve open
200°C
Valve closed
150°C
Actuator
Pneumatic
60°C
Mechanism
Air service
80 psig (5.5 bar)
Solenoid
4.0 Watts
supplied voltage
120 VAC 50/60 Hz
optional voltage
24, 200, 240 VAC 50/60 Hz
or 12, 24 VDC
Position indicator, max.
115 VACor 28 VDC, 20 mA
Cycles Until Service
Sizes 0.625" to 12" [DN16 to 300]
Sizes 14" to 24" [DN350 to 600]
designated as long life valves(Application dependent)

1,000,000> 500,000

Notes• Dimensions given in U.S. System and [metric]• Conductance ratings based on air, given in liters
per second• Due to ongoing product development, prices,dimensions and specifications are subject tochange without notice
Options
All 21200 Series Valves may be equipped withalternative flanges, solenoids and seals. Contact
HVA to discuss your requirements.
• Alternate voltage controls• JIS configurations• Custom flange sizes• Gauge ports, roughing ports and purge ports• Microswitches for position indicators• Quick clamp bonnet• Low profile actuators• High temperature components, including O-rings
microswitches and actuator• Water cooled flanges• Custom materials, such as Inconel® or Kalrez®
• Special solenoid or position indicator connectors

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

27

21200 Series Million Cycle Gate Valves

21200

Model Key Guide

Example: 21212-0404R = 21200 Series gate valve, pneumatic actuator, Viton gate & bonnet seals,120VAC
solenoid, 4” ID CF (6” OD) flanges with Metric thread, reed switch positionindicator

2 1 2 1 2 - 0 4 0 4 R
Position Indicator: R = Reed Switch / M = Microswitch /P = Reed switch w/6-pin / V = Visual
Q = Microswitch w/6-pin /X or Blank = No position Indicator

Flange Type: 0 = CF (UNF) / 1 = ANSI, small OD / 2 = ANSI, large OD /3 = KF/ISO-F / 4 = CF (Metric) / 5 = JIS / 6 = ISO-K

Valve Port Size ID (inch): 006 = 0.625” / 015 = 1.5” / 020 = 2” / 025 = 2.5” /030 = 3” / 040 = 4” / 060 = 6” / 080 = 8” /100 = 10” / 107 = 10.75” / 120 = 12” / 140 = 14” /160 = 16” / 200 = 20” / 240 = 24”

Solenoid Voltage: 0 = no solenoid / 1 = 24VDC / 2 = 120VAC / 3 = 220VAC / 4 = 24VAC
Gate & Bonnet Seals: 1 = Viton® gate & bonnet / 2 = Viton® gate / copper bonnet

3 = Kalrez® gate / copper bonnet / 6 = Kalrez® gate & bonnet

Actuator Type: 2 = Pneumatic
Series: 21 = 21200 / 31 = 31200 (long life)

Note• A suffix of -001 to -999 at the end of or a ‘9’ or ‘S’ within a Model Number indicates a valve with custom configuration.
• If a roughing/gauge/purge port is needed add the following after the position indicator:
A = KF 25
B = KF 40
C = 1.33” OD CF fixed with thru holes
D = 2.75” OD CF fixed with thru holes
S = special/custom or other28

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

21200 Series Million Cycle Gate Valves
16-mm.625-inch

21200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

29

21200 Series Million Cycle Gate Valves
1.5-inch

21200

40-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

30

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

21200 Series Million Cycle Gate Valves
50-mm

2.0-inch

21200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

3121200 Series Million Cycle Gate Valves
2.5-inch

21200

63-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

32

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

21200 Series Million Cycle Gate Valves
75-mm

3.0-inch

21200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

33

21200 Series Million Cycle Gate Valves
4.0-inch

21200

100-mmSpecifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

34

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

21200 Series Million Cycle Gate Valves
150-mm6.0-inch

21200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

35

21200 Series Million Cycle Gate Valves
8.0-inch

21200

200-mmSpecifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

36

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

21200 Series Million Cycle Gate Valves
250-mm10.0-inch

21200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

37

21200 Series Million Cycle Gate Valves
10.75-inch

21200

273-mmSpecifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

38

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21200 Series Million Cycle Gate Valves
300-mm

12.0-inch

21200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

39

21200 Series Million Cycle Gate Valves
14.0-inch / 400-mm

16.0-inch

21200

350-mmSpecifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

40

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

21200 Series Million Cycle Gate Valves
500-mm20.0-inch / 600-mm

24.0-inch

21200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

4121200 Series Million Cycle Gate Valves
ANSI, JIS & Custom Flanges

21200

ANSI Flange Models
ANSI Flange Models are designed for high vacuum applications, specifically when pressure ranges approximate 1x10-9
mbar and bakeout temperatures do not exceed 200ºC. The
bonnet comes standard with a Viton® elastomer O-ring.
These valves provide valving for cryopumps, turbomolecularr
pumps, ion pumps and other applications requiring clean,
low outgassing valves. Pneumatic valves are supplied with a
120 VAC solenoid and a Reed switch position indicator.
Standard flanges are smooth faced, non-rotatable
and threaded. When O-ring grooves are required onflanges, please specify one of the following options:• O-ring groove on gate side only
• O-ring groove on carriage side only
• O-ring grooves on both gate side and carriage side
O-ring groove I.D. is 0.250-inch larger than the valve I.D.
Flange O-rings are not included with the valve, and may bepurchased separately.

JIS and Custom Flange Models
Valves requiring JIS flanges may be obtained through HVA(see page 195). Additionally, other specialty flanges fornon-standard installations may be custom ordered through
HVA. Contact HVA Technical Services to discuss yourrequirements.

ANSI Flange Dimensions*32” ID (DN800) size available.

42

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21200 Series Million Cycle Gate Valves
ANSI Valve Dimensions

21200*32” ID (DN800) size available.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

4321200 Series Million Cycle Gate Valves

21200

ANSI Valves

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless SteelDrive shaft and pins = 440C hardened stainless steel
Bellows =AM-350
Actuator =6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =®
Actuator w/out solenoid (Viton / Copper bonnet) = 60°C / 60°C*®
150°C / 150°C*
Position Indicator (Viton / Copper bonnet) =*250°C options available on request.

44

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442