28200

Stainless Steel Rectangular Slit Valves

Table of Contents
Introduction

Page

130

Specifications

Page

131

Model Key Guide

Page

132

(DN32 x 222mm)

Bolted ...........

Page

133

1.26" x 8.74"(DN32 x 222mm)

Clamped .......

Page

134

1.26" x 13.07"(DN32 x 332mm)

Bolted ...........

Page

135

1.26" x 13.07"(DN32 x 332mm)

Clamped .......

Page

136

1.81" x 9.29"(DN46 x 236mm)

Bolted ...........

Page

137

1.81" x 9.29"(DN46 x 236mm)

Clamped .......

Page

138

1.97" x 13.23"(DN50 x 336mm)

Bolted ...........

Page

139

1.97" x 13.23"(DN50 x 336mm)

Clamped .......

Page

140

2.0" x 18.0"(DN50 x 457mm)

Bolted ...........

Page

141

2.0" x 18.0"(DN50 x 457mm)

Clamped .......

Page

142

HVA • Quality
QualQualit
ityy Vacuum
Vacu
Vacuumum Valves
Valalvevess since
sincsincence 1973
1 73
193 • w
www.highvac.com
ww.highvac.com • sales@highvac.com • 775-359-4442
ww28200

1.26" x 8.74"

12928200 Series Stainless Steel Rectangular Slit Valves
Introduction

Product Features- HV and UHV with stainless steel body and internal components- > 1,000,000 cycles- Sizes: Height ≤ 6” ID (DN150) / Width ≤ 78” ID (DN2000)- Very customizable to work with almost any application- Stainless steel welded bellows- Standard MESC bolted and clamped configurations- Patented low profile actuator design
Model Number 28210-0510RXK
5” x 10" (DN120 x 250) Clamped- Low vibration due to patented driveshaft design- High temperature options up to 250°C- Designed, manufactured and assembled in the USA

28200

Description
The HVA 28200 Series Direct Drive Rectangular Gate Valves provide one of the smallest interior surface areas in thevacuum valve industry. The body and internal components are vacuum furnace brazed at 1100°C, at 1x10-6 mbar,ensuring maximum joint integrity. This eliminates the possibility of virtual leaks or entrapment areas while minimizing
body distortion, which can occur in conventionally welded valves. Furnace brazing 304 stainless steel reduces
outgassing, which results in obtaining a system base pressure in a shorter time.
In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow toaccumulate on the sealing surface. In the closed position the one piece solid block design prevents any materialbuildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements.

Application
This valve design is especially engineered to meet the mechanical interface and vacuum containment requirementsof the industry. The 28200 Series Valve/Interface incorporates a Direct Drive Gate. Direct Drive eliminates
mechanical linkages and greatly reduces internal valve components. Significant improvements in the gate valve design
have resulted in exceptional uptime cycles and lower particulate generation even well past one million cycles.Thevalves have been tested for 1,000,000+ cycles with no failures.
In operation, the HVA 28200 Series Valves are quiet and reliable. Because they seal with lower pressure, they last
longer, and there is less stress in making a perfect seal.To meet the specific needs of modular integrated processing
systems, the HVA valves are designed to isolate vacuum pressure on either side of the gate.
They can be used singly or in pairs to provide appropriate pass through or seal for any part of the system. A narrowprofile design, including both actuator and controller, allows tight mounting between central, load-lock, handling andprocess chambers.

130HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

28200 Series Stainless Steel Rectangular Slit Valves
Specifications
Standard Specifications
Materials
Valve body and mechanism
304 stainless steel
Welded bellows shaft seal
AM-350
Drive shaft and pins
440C hardened stainless steel
Bonnet / gate seals
HVViton® elastomer
UHV
OFHC copper / Viton® elastomer
VacuumPressure range
HV1 x 10-9 mbar
UHV
1 x 10-10 mbar
Leak rate< 2 x 10-9 mbar l/s
Differential pressure
1 bar in either direction
Maximum ∆ pressure before opening≤ 30 mbar

or 28 VDC, 20 mA
Cycles Until Service(Application dependent)> 1,000,000

Notes• Dimensions given in U.S. System and [metric]• Conductance ratings based on air, given in liters
per second• Due to ongoing product development, prices,dimensions and specifications are subject tochange without notice
Options
All 28200 Series Valves may be equipped withalternative flanges, solenoids and seals. ContactHVA to discuss your requirements.
• Alternate voltages• Custom body configurations• Custom size openings• Microswitches position indicators• High temperature components, including O-rings,
position indicator and actuator• Water cooled body
• Custom materials, such as Inconel® or Kalrez®
• Gauge ports, roughing ports and purge ports• Special solenoid or position indicator connectors

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

28200

Temperature
without solenoid
Elastomer sealed bonnet
150°C
Metal sealed bonnetValve open
200°C
Valve closed
150°CActuator
Pneumatic60°C
Mechanism
Air service
80 psig (5.5 bar)
Solenoid
4.0 Watts
Latching-type solenoid, valve
to remain in the same position
upon power loss
supplied voltage
120 VAC 50/60 Hz
optional voltage
24, 200, 240 VAC 50/60 Hz
or 12, 24 VDC
Position indicator, max.
115 VAC

131

28200 Series Stainless Steel Rectangular Slit Valves
Model Key Guide

Example: 28212-0213RXJ = 28200 Series rectangular slit valve, pneumatic actuator, Viton gate &bonnet seals, 120VAC solenoid, 1.97” x 13.23” (50 x 336mm) opening
with a bolted body configuration, reed switch position indicator2 8 2 1 2 - 0 2 1 3 R X JBody Style: B = Bolted [width > 13.23” (336mm)] /C = Clamped [width > 13.23” (336mm)] /J = Bolted [width ≤ 13.23” (336mm)] /K = Clamped [width ≤ 13.23” (336mm)]

Roughing Port: A = KF 25 / B = KF 40 /C = 1.33” OD CF fixed with thru holes /D = 2.75” OD CF fixed with thru holes /S = special/custom or other / X = no port

Position Indicator: R = Reed Switch / M = Microswitch /28200

P = Reed switch w/6-pin / V = Visual
Q = Microswitch w/6-pin /X or Blank = No position Indicator

Slit Opening ID (inch): Height x width, in inches (rounded)

Example: 0213 = 2” H x 13” W (actual 1.97” x 13.23”)

Solenoid Voltage: 0 = no solenoid / 1 = 24VDC / 2 = 120VAC / 3 = 220VAC / 4 = 24VAC
Gate & Bonnet Seals: 1 = Viton® gate & bonnet / 2 = Viton® gate / copper bonnet

3 = Kalrez® gate / copper bonnet / 6 = Kalrez® gate & bonnet

Actuator Type: 2 = PneumaticSeries: 28 = 28000

Note• A suffix of -001 to -999 at the end of or a ‘9’ or ‘S’ within a Model Number indicates a valve with custom configuration.

132

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

28200 Series Stainless Steel Rectangular Slit Valves
32x222-mm

1.26x8.74-inch

Bolt Style

28200Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

133

28200 Series Stainless Steel Rectangular Slit Valves
1.26x8.74-inch

Clamped Style

28200

32x222-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

134

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

28200 Series Stainless Steel Rectangular Slit Valves
32x332-mm

1.26x13.07-inch

Bolt Style

28200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

135

28200 Series Stainless Steel Rectangular Slit Valves
1.26x13.07-inch

Clamped Style

28200

32x332-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

136

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

28200 Series Stainless Steel Rectangular Slit Valves
46x236-mm

1.81x9.29-inch

Bolt Style

28200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

137

28200 Series Stainless Steel Rectangular Slit Valves
1.81x9.29-inch

Clamped Style

28200

46x236-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

138

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

28200 Series Stainless Steel Rectangular Slit Valves
50x336-mm

1.97x13.23-inch

Bolt Style28200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

13928200 Series Stainless Steel Rectangular Slit Valves
1.97x13.23-inch

Clamped Style

28200

50x336-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

140

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

28200 Series Stainless Steel Rectangular Slit Valves
50x457-mm

2.0x18.0-inch

Bolt Style

28200

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

141

28200 Series Stainless Steel Rectangular Slit Valves
2.0x18.0-inch

Clamped Style

28200

50x457-mm

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

142

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442