11000

11000

Standard Cycle Gate Valves
Table of Contents
Introduction ..........................................

Page

6

Specifications ......................................

Page

7

Model Key Guide .................................

Page

8

.625" ID

(DN16mm) ...............

Page

9

1.5" ID(DN40mm) ...............

Page

10

2.0" ID(DN50mm) ...............

Page

11

2.5" ID(DN63mm) ...............

Page

12

3.0" ID(DN75mm) ...............

Page

13

4.0" ID(DN100mm) .............

Page

14

6.0" ID(DN150mm) .............

Page

15

8.0" ID(DN200mm) .............

Page

16

10.0" ID

(DN250mm) .............

Page

17

10.75" ID(DN273mm) .............

Page

18

12.0" ID

(DN300mm) .............

Page

19

14.0" ID

(DN350mm) .............

Page

20

16.0" ID

(DN400mm) .............

Page

20

20.0" ID

(DN500mm) .............

Page

21

24.0" ID

(DN600mm) .............

Page

21

ANSI, JIS & Custom .............................

Page

22

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5

11000 Series Standard Cycle Gate Valves

11000

Introduction
Product Features- HV and UHV with stainless steel body and internal components- Sizes from 0.625” ID (DN16) to 32” ID (DN800)- Manual and pneumatic actuation- Stainless steel welded bellows- Standard KF, ISO, CF, ANSI, JIS or custom flange options- Roughing, gauge, purge ports available- High temperature options up to 250°C- Positive mechanical lock
- Easily customizable to work with almost any application- Designed, manufactured and assembled in the USA
Model Number 11120-0400
4” ID (DN100) Manual CF-F

Description
The 11000 Series Gate Valves feature a positive lock-over center mechanism or soft closure with pneumatic lock(optional). Valves maintain a closed status in the event of an air pressure loss. Linear actuation allows the useof a welded bellows to seal the actuator (i.e. no rotary seals). Shock and vibration are reduced to a minimum bya unique air cylinder design.This feature is extremely beneficial for semiconductor fabrication and other sensitive processes that require operation that is relatively free of vibration.The HVA stainless steel body offers one of
the smallest interior surface areas in the vacuum valve industry. The body and all major internal components arevacuum furnace brazed at 1100°C, at 1x10-6 mbar, ensuring maximum joint integrity. This eliminates the possibility of virtual leaks or entrapment areas and minimizes body distortion found in conventionally welded valves. For
maintenance purposes, the carriage assembly can be removed from the body without removing the valve from thesystem.

Applications
KF Flanges, ISO Bolted and Clamped Flanges, ANSI and optional JIS Models are designed for high vacuum
applications, specifically when pressure ranges approximate 1x10-9 mbar and bakeout temperatures do not exceed
250°C. Metal-sealed CF-F flanges provide compatibility with UHV systems. The international KF/ISO configurations
and elastomer O-ring flanges are used in areas that require an easily mountable and demountable flange-type seal.
These valves provide valving for cryopumps, turbomolecular pumps, ion pumps and other applications requiring
clean, low outgassing valves.

Million Cycle Configuration
The high vacuum, pneumatic gate valves may be configured for a million cycle operation until service. Details arefound in pages 25-44 of this catalog. All cycling counts are application dependent.

6

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11000 Series Standard Cycle Gate Valves
Specifications
11000

Standard Specifications
Materials
Valve body and mechanism
304 stainless steel
Welded bellows shaft seal
AM-350Bonnet / gate seals
HV
Viton® elastomer
UHV
OFHC copper / Viton® elastomer
VacuumPressure range
HV
1 x 10-9 mbar
UHV
1 x 10-10 mbar
Leak rate< 2 x 10-9 mbar l/s
Differential pressure
1 bar in either direction
Maximum ∆ pressure before opening≤ 30 mbar
Temperature
Elastomer sealed bonnet
Metal sealed bonnet
Valve open
Valve closed
Actuator
ManualPneumatic

without solenoid
150°C
200°C
150°C

Notes
60°C
60°C

Mechanism
Air service
Solenoid
supplied voltage
optional voltage
Position indicator, max.
Cycles Until Service(Application dependent)

80 psig (5.5 bar)
4.0 Watts
120 VAC 50/60 Hz
24, 200, 240 VAC 50/60 Hz
or 12, 24 VDC
115 VACor 28 VDC, 20 mA
100,000• Dimensions given in U.S. System and [metric]• Conductance ratings based on air, given in liters
per second• Due to ongoing product development, prices,dimensions and specifications are subject to change
without notice

Options
All 11000 Series Valves may be equipped with alternative flanges, solenoids and seals. Contact HVA todiscuss your requirements.
• Alternate voltage controls• JIS configurations and custom flange sizes• Gauge ports, roughing ports and purge ports• Microswitches for position indicators• Million Cycle option ~ see pages 25-44• Quick clamp bonnet• Low profile actuators• Spring loaded: Air-to-open, Spring-to-close, on
sizes up to 6" [DN150]• High temperature components, including O-rings,
microswitches and actuator• Water cooled flanges• Custom materials, such as Inconel® or Kalrez®
• Special solenoid or position indicator connectors

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7

11000 Series Standard Cycle Gate Valves

11000

Model Key guide

Example: 11212-0404R = 11000 Series gate valve, pneumatic actuator, Viton gate and bonnet seals,
120VAC solenoid, 4” ID CF (6” OD) flanges with Metric thread, reed switch
position indicator

1 1 2 1 2 - 0 4 0 4 R
Position Indicator: R = Reed Switch / M = Microswitch /P = Reed switch w/6-pin / V = Visual
Q = Microswitch w/6-pin /X or Blank = No position Indicator

Flange Type: 0 = CF (UNF) / 1 = ANSI, small OD / 2 = ANSI, large OD /3 = KF/ISO-F / 4 = CF (Metric) / 5 = JIS / 6 = ISO-K

Valve Port Size ID (inch): 006 = 0.625” / 015 = 1.5” / 020 = 2” / 025 = 2.5” /030 = 3” / 040 = 4” / 060 = 6” / 080 = 8” /100 = 10” / 107 = 10.75” / 120 = 12” / 140 = 14” /160 = 16” / 200 = 20” / 240 = 24” / 320 = 32”

Solenoid Voltage: 0 = no solenoid / 1 = 24VDC / 2 = 120VAC / 3 = 220VAC / 4 = 24VAC
Gate & Bonnet Seals: 1 = Viton® gate & bonnet / 2 = Viton® gate / copper bonnet

3 = Kalrez® gate / copper bonnet / 6 = Kalrez® gate & bonnet

Actuator Type: 1 = Manual / 2 = Pneumatic / 5 = Spring loaded
Series: 11 = 11000

Note• A suffix of -001 to -999 at the end of or a ‘9’ or ‘S’ within a Model Number indicates a valve with custom configuration.
• If a roughing/gauge/purge port is needed add the following after the position indicator:
A = KF 25
B = KF 40
C = 1.33” OD CF fixed with thru holes
D = 2.75” OD CF fixed with thru holes
S = special/custom or other8

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

11000 Series Standard Cycle Gate Valves
16-mm.625-inch
11000

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

9

11000 Series Standard Cycle Gate Valves
1.5-inch

11000

40-mm

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

10

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11000 Series Standard Cycle Gate Valves
50-mm

2.0-inch
11000

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

11

11000 Series Standard Cycle Gate Valves
2.5-inch

11000

63-mm

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

12

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11000 Series Standard Cycle Gate Valves
75-mm

3.0-inch
11000

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

13

11000 Series Standard Cycle Gate Valves
4.0-inch

11000

100-mmSpecifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

14

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11000 Series Standard Cycle Gate Valves
150-mm6.0-inch
11000

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

15

11000 Series Standard Cycle Gate Valves
8.0-inch

11000

200-mmSpecifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

16

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11000 Series Standard Cycle Gate Valves
250-mm10.0-inch
11000

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

17

11000 Series Standard Cycle Gate Valves
10.75-inch

11000

273-mmSpecifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

18

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11000 Series Standard Cycle Gate Valves
300-mm

12.0-inch
11000

Specifipcations
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

19

11000 Series Standard Cycle Gate Valves
14.0-inch / 400-mm

16.0-inch

11000

350-mmSpecifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

20

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11000 Series Standard Cycle Gate Valves
500-mm20.0-inch / 600-mm

24.0-inch
11000

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton® / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton® / Copper bonnet) =Actuator w/out solenoid (Viton® / Copper bonnet) = 60°C / 60°C*
150°C / 150°C*
Position Indicator (Viton® / Copper bonnet) =*250°C options available on request.

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

21

11000 Series Standard Cycle Gate Valves

11000

ANSI, JIS & Custom Flanges
ANSI Flange Models
ANSI Flange Models are designed for high vacuum applications, specifically when pressure ranges approximate 1x10-9
mbar and bakeout temperatures do not exceed 200ºC. The
bonnet comes standard with a Viton® elastomer O-ring.
These valves provide valving for cryopumps, turbomolecular
pumps, ion pumps and other applications requiring clean,
low outgassing valves. Pneumatic valves are supplied with a
120 VAC solenoid and a Reed switch position indicator.
Standard flanges are smooth faced, non-rotatable
and threaded. When O-ring grooves are required onflanges, please specify one of the following options:• O-ring groove on gate side only
• O-ring groove on carriage side only
• O-ring grooves on both gate side and carriage side
O-ring groove I.D. is 0.250-inch larger than the valve I.D.
Flange O-rings are not included with the valve, and may bepurchased separately.

JIS and Custom Flange Models
Valves requiring JIS flanges may be obtained through HVA(see page 195). Additionally, other specialty flanges fornon-standard installations may be custom ordered through
HVA. Contact HVA Technical Services to discuss yourrequirements.

ANSI Flange Dimensions*32” ID (DN800) size available.

22

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11000 Series Standard Cycle Gate Valves
ANSI Valve Dimensions
11000*32” ID (DN800) size available.

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23

11000 Series Standard Cycle Gate Valves

11000

ANSI Valves

Specifications
HV Pressure Range:
1 x 10-9 mbar
UHV Pressure Range:
1 x 10-10 mbar
Helium Leak Rate: Materials:< 2 x 10-9 mbar l/s
Maximum Δ Pressure Before Opening:≤ 30 mbar
Materials:
Body =
304 Stainless SteelGate =
304 Stainless Steel
Bellows = AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
150°C / 200°C*
Body, Gate Open (Viton / Copper bonnet) =150°C / 150°C*
Body, Gate Closed (Viton / Copper bonnet) =60°C / 60°C*
Actuator w/out solenoid (Viton / Copper bonnet) =150°C / 150°C*
Position Indicator (Viton / Copper bonnet) =*250°C options available on request.

24

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442