88200

Aluminum Rectangular Slit Valves
Table of Contents
Introduction

Page

144

Specifications

Page

145

Model Key Guide

Page

146

(DN32 x 222mm)

Bolted ...........

Page

147

1.26" x 8.74"(DN32 x 222mm)

Clamped .......

Page

148

1.26" x 13.07"(DN32 x 332mm)

Bolted ...........

Page

149

1.26" x 13.07"(DN32 x 332mm)

Clamped .......

Page

150

1.81" x 9.29"(DN46 x 236mm)

Bolted ...........

Page

151

1.81" x 9.29"(DN46 x 236mm)

Clamped .......

Page

152

1.97" x 13.23"(DN50 x 336mm)

Bolted ...........

Page

153

1.97" x 13.23"(DN50 x 336mm)

Clamped .......

Page

154

2.0" x 18.0"(DN50 x 457mm)

Bolted ...........

Page

155

2.0" x 18.0"(DN50 x 457mm)

Clamped .......

Page

156

2.75" x 20.0"(DN70 x 508mm)

Bolted ...........

Page

157

4.0" x 16.0"(DN100 x 407mm)

Bolted ...........

Page

158

4.0" x 50.0"(DN100 x 1270mm)

Bolted ...........

Page

159

4.0" x 75.0"(DN100 x 1900mm)

Bolted ...........

Page

160

HVA
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88200

1.26" x 8.74"

143
1
14
3

88200 Series Aluminum Rectangular Slit Valves
Introduction

Product Features- Precision machined from aluminum 6061-T6 billet- > 1,000,000 cycles- Sizes: Height ≤ 6” ID (DN150) / Width ≤ 78” ID (DN2000)- Stainless steel welded bellows- Standard MESC bolted and clamped configurations- Patented low profile actuator design- Low vibration due to patented driveshaft design
Model Number 88212-0218RXB
2” x 18" (DN50 x 457) Bolted- Easily customizable to work with almost any application- Designed, manufactured and assembled in the USA

88200

Description
The HVA 88200 Series Direct Drive Rectangular Slit Valves offer one of the smallest interior surface areas in thevacuum valve industry. The body is machined from a single piece of aluminum. This eliminates the possibility of virtual
leaks or entrapment areas and minimizes body distortion.
In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow toaccumulate on the sealing surface. In the closed position the one piece solid block design prevents any materialbuildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements.

Application
This valve design is especially engineered to meet the mechanical interface and vacuum containment requirementsof the industry. The 88200 Series Valve/Interface incorporates a Direct Drive Gate. Direct Drive eliminates mechanicallinkages and greatly reduces internal valve components. Significant improvements in the gate valve design have resulted in exceptional uptime cycles and extremely low particulate generation even well past one million cycles. Valves
have been tested for 1,000,000+ cycles with no failures.
In operation, the HVA 88200 Series Valves are quiet and reliable. Because they seal with lower pressure, they last
longer, and there is less stress to make a perfect seal. To meet the specific needs of modular integrated processing
systems, the HVA valves are designed to isolate vacuum pressure on either side of the gate.
They can be used singly or in pairs to provide appropriate pass through or seal for any part of the system. A narrowprofile design, including both actuator and controller, allows tight mounting between central, load-lock, handling andprocess chambers.

144

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200 Series Aluminum Rectangular Slit Valves
Specifications
Standard Specifications
Materials
Valve body and mechanism
6061-T6 aluminum
Welded bellows shaft seal
AM-350
Drive shaft and pins
440C hardened stainless steel
Bonnet / gate seals
HV
Viton® elastomer
VacuumPressure range
HV
1 x 10-9 mbar
Leak rate< 2 x 10-9 mbar l/s
Differential pressure
1 bar in either direction
Maximum ∆ pressure before opening≤ 30 mbar

Temperature
without solenoid
Elastomer sealed bonnet
150°C
Actuator
Pneumatic
60°C
Mechanism
Air service
80 psig (5.5 bar)
Solenoid
4.0 Watts
Latching-type solenoid, valve
to remain in the same position
upon power loss
supplied voltage
120 VAC 50/60 Hz
optional voltage
24, 200, 240 VAC 50/60 Hz
or 12, 24 VDC
Position indicator, max.
115 VAC

Cycles Until Service(Application dependent)> 1,000,000

Options
All 88200 Series Valves may be equipped withalternative body styles and solenoids. Contact HVA
to discuss your requirements.
• Alternate voltages• Custom body configurations• Custom size openings• Microswitches position indicators• Hard anodizing and non-treated Aluminum• Special solenoid or position indicator connectors

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200

or 28 VDC, 20 mA

Notes• Dimensions given in U.S. System and [metric]• Conductance ratings based on air, given in liters
per second• Due to ongoing product development, prices,dimensions and specifications are subject tochange without notice14588200 Series Aluminum Rectangular Slit Valves
Model Key Guide

Example: 88212-0213RXJ = 88200 Series rectangular slit valve, pneumatic actuator, Viton gate &bonnet seals, 120VAC solenoid, 1.97” x 13.23” (50 x 336mm) opening with abolted body configuration, reed switch position indicator

8 8 2 1 2 - 0 2 1 3 R X J
Body Style: B = Bolted [width > 13.23” (336mm)] /C = Clamped [width > 13.23” (336mm)] /J = Bolted [width ≤ 13.23” (336mm)] /K = Clamped [width ≤ 13.23” (336mm)]

Roughing Port: X = no port
Position Indicator: R = Reed Switch / M = Microswitch /P = Reed switch w/6-pin / V = Visual
Q = Microswitch w/6-pin /X or Blank = No position Indicator

Slit Opening ID (inch): Height x width, in inches (rounded)

Example: 0213 = 2” H x 13” W (actual 1.97” x 13.23”)

Solenoid Voltage: 0 = no solenoid / 1 = 24VDC / 2 = 120VAC / 3 = 220VAC / 4 = 24VAC

88200

Gate & Bonnet Seals: 1 = Viton® gate & bonnet
Actuator Type: 2 = Pneumatic
Series: 88 = 88000

Note• A suffix of -001 to -999 at the end of or a ‘9’ or ‘S’ within a Model Number indicates a valve with custom configuration.

146

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200 Series Aluminum Rectangular Slit Valves
32x222-mm

1.26x8.74-inch

Bolt Style

HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

88200

Specifications

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

147

88200 Series Aluminum Rectangular Slit Valves

88200

32x222-mm148

1.26x8.74-inch

Clamped Style

Specifications
HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200 Series Aluminum Rectangular Slit Valves
32x332-mm

1.26x13.07-inch

Bolt Style

HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

88200

Specifications

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

149

88200 Series Aluminum Rectangular Slit Valves

88200

32x332-mm

150

1.26x13.07-inch

Clamped Style

Specifications
HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200 Series Aluminum Rectangular Slit Valves
46x236-mm

1.81x9.29-inch

Bolt Style

HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

88200

Specifications

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

151

88200 Series Aluminum Rectangular Slit Valves

88200

46x236-mm

152

1.81x9.29-inch

Clamped Style

Specifications
HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200 Series Aluminum Rectangular Slit Valves
50x336-mm

1.97x13.23-inch

Bolt Style

HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

88200

Specifications

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

153

88200 Series Aluminum Rectangular Slit Valves

88200

50x336-mm

154

1.97x13.23-inch

Clamped Style

Specifications
HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200 Series Aluminum Rectangular Slit Valves
50x457-mm

2.0x18.0-inch

Bolt Style

HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

88200

Specifications

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

155

88200 Series Aluminum Rectangular Slit Valves

88200

50x457-mm

156

2.0x18.0-inch

Clamped Style

Specifications
HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200 Series Aluminum Rectangular Slit Valves
70x508-mm

2.75x20.0-inch

Bolt Style

HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

88200

Specifications

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

157

88200 Series Aluminum Rectangular Slit Valves

88200

100x407-mm

158

4.0x16.0-inch

Bolt Style

Specifications
HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200 Series Aluminum Rectangular Slit Valves
100x1270-mm

4.0x50.0-inch

Bolt Style

HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

88200

Specifications

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

159

88200 Series Aluminum Rectangular Slit Valves

88200

100x1270-mm

160

4.0x50.0-inch

Bolt Style

Specifications
HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

Gate side drawing and model number on page 159.

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

88200 Series Aluminum Rectangular Slit Valves
100x1900-mm

4.0x75.0-inch

Bolt Style

HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

88200

Specifications

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442

161

88200 Series Aluminum Rectangular Slit Valves

88200

100x1900-mm

162

4.0x75.0-inch

Bolt Style

Specifications
HV Pressure Range:
Helium Leak Rate: Materials:
Maximum Δ Pressure Before Opening:
Materials:
Body =
6061-T6 Aluminum
Gate =
6061-T6 Aluminum
Bellows =AM-350
Actuator = 6061-T6 Aluminum
Operating Temperature:
Body, Gate Open (Viton®) =Body, Gate Closed (Viton®) =Actuator w/out solenoid (Viton®) =Position Indicator (Viton® ) =1 x 10-9 mbar
< 2 x 10-9 mbar l/s≤ 30 mbar

Gate side drawing and model number on page 161.

150°C
150°C
60°C
150°C

HVA • Quality Vacuum Valves since 1973 • www.highvac.com • sales@highvac.com • 775-359-4442