AGILENTVACUUM valves

2-3

Agilent Vacuum Valve Solutions

4-17

Agilent High Performance Valves

18-21 Stainless Steel Tube Valves
22-23 Electromagnetic Block Valves
24

Variable Leak Valves

Agilent Vacuum Valve Solutions

Agilent offers a range of vacuum valves that are engineered for reliability,
performance, and value. These valves also optimize conductance, operate
in a wide variety of applications, and employ a minimum of moving parts.
This reduces wear and particle generation which contributes to theirperformance and reliability. Agilent valves are manufactured using thehighest quality vacuum materials and provide a choice of actuation, and avariety of mounting flanges.

Agilent High Performance Valves
We are pleased to add to our offering valve products manufactured to thehighest international standards. The Series 26 Aluminum Block Valves,
Series 12 Aluminum Gate Valves, and Series 54 UHV All-Metal Valves are
the proven workhorses in their respective application segments. These areeasily ordered with any of Agilent’s vacuum pumps or other components.

Agilent
High Performance Valves

Agilent
Vacuum Valves

Series 26 Aluminum Block ValvesMulti-purpose, high cycle life valves;
position indication.

Stainless Steel Tube Valves
Provide maximum conductance, lowoutgassing, and easy installation.

Series 12 Aluminum Gate Valves
Robust, compact, high conductancemeans of isolating a high vacuum pump.

Electromagnetic Block Valves
Rapid spring closure, service-free;eliminate the need for compressed air.

Series 54 UHV All-Metal Valves
Extreme High Vacuum (XHV) compatible
with dynamic all-metal sealing system.

Variable Leak Valve
Unique device provides extremely precise
control of gas flow to vacuum system.

2

VACUUM valves
Common Applications• Rough Vacuum– Freeze drying– Food processing– Metal ore refining– Steam plant condensers– Vacuum distillation• Medium Vacuum– Decorative coatings– Functional coatings– Chemical processes– Electron microscopes– Microscopy sample processing• High/Ultrahigh Vacuum– Physics research• Optics• High energy– Semiconductor manufacturing– Electron tube manufacturing– Surface analysis(Auger Spectroscopy)– Molecular beam epitaxy– Outer space simulation

VacuumRange

Valve Type

Housing
Material

Size Range

FeedthroughFlangeOptions

Aluminum

0.75 in. to 1.0 in.

Shaft

ISO-KF

Aluminum

0.75 in. to 1.5 in.

Bellows

ISO-KF

Manual/Air

Actuation

Page

Primary/Medium to High Vacuum
Block, Right Angle

Atm - 10-9 Torr

Block, Right Angle

Series 26

Atm - 10-9 Torr

Block, In-Line

Series 26

Atm - 10-9 Torr

Tube, Right Angle

Atm - 10-9 Torr

Tube, In-Line

Atm - 10-9 Torr

Gate

Series 12

Electromagnetic 22-23
4-9

Aluminum

0.75 in. to 1.0 in.

Bellows

ISO-KF

Manual/Air

4-9

Stainless Steel

0.63 in. to 1.5 in.

Bellows

CF, ISO-KF

Manual/Air

18-21

Stainless Steel

0.63 in. to 1.5 in.

Bellows

CF, ISO-KF

Manual/Air

18-21

Aluminum

2.5 in. to 10 in.

Shaft

ISO, ASA

Manual/Air

10-14

Stainless Steel

0.75 in. to 1.5 in.

Bellows

CF

Manual15-17

Bellows

CF

Manual24

Ultra High VacuumAtm - 10-11 Torr UHV, All-Metal Angle Series 54
Special Purpose
Atm - 10-11 Torr Variable Leak

Stainless Steel3

VacuumValvesAtm - 10-6 Torr

Agilent High Performance Valves► Agilent Aluminum Block Valves - Series 26

Technical Specifications

Thank you for choosing Agilent Valves. These valves aredesigned with the highest international vacuum standards
and manufactured with uncompromising quality. We areconfident that Agilent Valves will meet your most demanding
vacuum control needs.
The valves are available in manually-operated andpneumatically-operated versions. The pneumatic valve is alsoavailable with a position indicator.
The position indicator delivers an electrical output signal
when the valve cycles, and is user-set in either the normallyopen or normally-closed position.

Cycles until first service
with manual actuatorwith closing spring
Maximum temperature
Valve body
Manual and pneumatic actuator
Solenoid valve, position indicator
Material
Valve body aluminum
Plate
Bellows
Seal: bonnet, plate
Mounting orientation
Solenoid valve
Position indicator: contact rating
Voltage
Current
Valve position indication
Leak rate: valve body, valve seat
Pressure range, series 26 (bellows)
Differential pressure on the plate
In opening direction
In closing direction
Differential pressure at opening4

10 000
3 million≤ 150 °C
≤ 120 °C≤   80 °C
EN AW-6060 (3.3206)
AISI 316L (1.4404, 1.4435)
AISI 316L (1.4404, 1.4435),
AISI 316 Ti (1.4571)
FKM (Viton)
any
24 V DC, 115 VAC, 220 VAC;
2.5 W
5 – 50 V AC / DC
5 – 100 mA
visual (mechanical)< 1 · 10-9 mbar Is-1
1 · 10-8 mbar to 5 bar (abs)≤ 2.0 bar
≤ 5.0 bar
≤ 1 barVACUUM valves
Features

Aluminum Block Valves Functional Principle• Body material: aluminum• Angle and inline version• Bellows• Resistant against differential pressure• Long lifetime

NW 16 – 40 with pneumatic actuator NC

1
2
3

NW
Conductance(nominal I. D.) (molecular flow)
mm (in.)ls-1

Valve with manual
actuator
Turns
WeightperstrokeAluminum bodyn
kg (lbs)

Valve with pneumatic actuator,
single acting with closing spring (NC)Compressed air
Weightmin. – max.
Volume of pneumatic Closing
overpressure
actuatortime
Aluminum bodybar (psi)lft3s
kg (lbs)16 (⅝)

5

3.6

0.20 (0.44)

4 – 8 (58 – 116)

0.004

0.00010.10

0.28 (0.62)

25 (1)

14

3.8

0.27 (0.60)

4 – 8 (58 – 116)

0.011

0.00040.20

0.41 (0.90)

40 (1 ½)

45

4.5

0.60 (1.32)

4 – 8 (58 – 116)

0.035

0.00120.55

0.97 (2.14)

Inline valves

NW
Conductance(nominal I. D.) (molecular flow)
mm (in.)ls-1

Valve with manual
actuator
Turns
WeightperstrokeAluminum bodyn
kg (lbs)

Valve with pneumatic actuator,
single acting with closing spring (NC)Compressed air
Weightmin. – max.
Volume of pneumatic Closing
overpressure
actuatortime
Aluminum bodybar (psi)lft3s
kg (lbs)16 (⅝)

5

3.6

0.28 (0.62)

4 – 8 (58 – 116)

0.004

0.00010.10

0.50 (1.10)

25 (1)

14

3.8

0.42 (0.93)

4 – 8 (58 – 116)

0.011

0.00040.20

0.60 (1.32)

40 (1 ½)

45

4.5

1.00 (2.20)

4 – 8 (58 – 116)

0.035

0.00120.55

1.40 (3.09)

5

VacuumValvesAngle valves

Plate seal
Bellows
Bonnet seal
Valve seat side

Agilent High Performance Valves
Dimensions
Angle valve with manual actuator
NW 16 – 40 (⅝” – 1 ½”) ISO-KF
Models

Z

Q

V

A
L

B

D

D

A

L
Q

A

V
B

Z*

B

NW 16
(⅝)
40
(1.57)
40(1.57)
16(0.63)
64.90(2.56)
46(1.81)
40(1.57)
3.60(0.14)

NW 25
(1)
50
(1.97)
48(1.89)
25(0.98)
60.90(2.40)
44(1.73)
40(1.57)
4.70(0.19)

NW 40
(1 ½)
65
(2.56)
65(2.56)
40(1.57)
94.30(3.71)
73.50(2.89)
60(2.36)
7.90(0.31)* Gate stroke is longer due to transmission
Valve seat side
Required for dismantling
Mechanical position indication
Leak detection hole

Dimensions: millimeters (inches)

Inline valve with manual actuator
NW 16 – 40 (⅝“ – 1 ½“) ISO-KF
Models
Q

A

Z

B
Ø
B
V

D
L

V

D

D

L

Q

Z

A

NW 16
(⅝)
80
(3.15)
40(1.57)
16(0.63)
90.60(3.57)
46(1.81)
40(1.57)
3.60(0.14)

NW 25
(1)
100
(3.94)
48(1.89)
25(0.98)
97(3.82)
44(1.73)
40(1.57)
4.70(0.19)

NW 40
(1 ½)
130
(5.12)
65(2.56)
40(1.57)
143.50(5.65)
73.50(2.89)
60(2.36)
7.90(0.31)

Dimensions: millimeters (inches)

6

VACUUM valves
Dimensions
Angle valve with pneumatic actuator, single actingwith closing spring
NW 16 – 40 (⅝“ – 1 ½“) ISO-KF

NW 16
(⅝)
A
40
(1.57)
B40(1.57)
D
16(0.63)L (with closing spring) 65.20(2.57)
Q46(1.81)
Z
2(0.08)

A

D

L

Z

Q

Models

A

NW 40
(1 ½)
65
(2.56)
65(2.56)
40(1.57)
87.70(3.45)
73.50(2.89)
9.50(0.37)

B

M5

NW 25
(1)
50
(1.97)
48(1.89)
25(0.98)
60.60(2.39)
44(1.73)
4(0.16)

Inline valve with pneumatic actuator, single actingwith closing spring
NW 16 – 40 (⅝“ – 1 ½“) ISO-KF

NW 16
(⅝)
A
80
(3.15)
B40(1.57)
D
16(0.63)L (with closing spring) 91.50(3.60)
Q46(1.81)
Z
2(0.08)Z

Q

Models

Ø
B
D

D

L

M5

A

Dimensions: millimeters (inches)

NW 25
(1)
100
(3.94)
48(1.89)
25(0.98)
100.30(3.95)
44(1.73)
4(0.16)

NW 40
(1 ½)
130
(5.12)
65(2.56)
40(1.57)
140.90(5.55)
73.50(2.89)
9.50(0.37)

Dimensions: millimeters (inches)

7

VacuumValvesValve seat side
Required for dismantlingCompressed air connection
Mechanical position indication
Leak detection holeB

Agilent High Performance Valves
Solenoid valve

Position indicator

Solenoid valve
NW 16 – 40 (⅝“ – 1 ½“)

Position indicator
NW 16 – 40 (⅝“ – 1 ½“)
Cable
approx.
500 mm (20")

40 mm
48 mm
65 mm

51

M5

NW1 6 =
NW2 5 =
NW4 0 =

14

15

19

PG7
One closing contact each for the open and closed valve positions

Ordering Information
Description: Aluminum Right Angle Block Valves Series 26
Valve, Block, Aluminum, Right Angle, Hand-operated, NW16
Valve, Block, Aluminum, Right Angle, Hand-operated, NW25
Valve, Block, Aluminum, Right Angle, Hand-operated, NW40
Valve, Block, Aluminum, Right Angle, Air-operated, NW16, without Solenoid
Valve, Block, Aluminum, Right Angle, Air-operated, NW25, without Solenoid
Valve, Block, Aluminum, Right Angle,, Air-operated, NW40, without Solenoid
Valve, Block, Aluminum, Right Angle, Air-operated, NW16, 115VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, NW25, 115VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, NW40, 115VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, NW16, 220VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, NW25, 220VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, NW40, 220VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, NW16, 24VDC	
Valve, Block, Aluminum, Right Angle, Air-operated, NW25, 24VDC	
Valve, Block, Aluminum, Right Angle, Air-operated, NW40, 24VDC	
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW16, without Solenoid
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW25, without Solenoid
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW40, without Solenoid
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW16, 115VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW25, 115VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW40, 115VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW16, 220VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW25, 220VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW40, 220VAC	
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW16, 24VDC	
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW25, 24VDC	
Valve, Block, Aluminum, Right Angle, Air-operated, Position Indicator, NW40, 24VDC	

8Part Number
X3202-60031
X3202-60032
X3202-60033
X3202-60034
X3202-60035
X3202-60036
X3202-60037
X3202-60038
X3202-60039
X3202-60040
X3202-60041
X3202-60042
X3202-60043
X3202-60044
X3202-60045
X3202-60051
X3202-60052
X3202-60053
X3202-60054
X3202-60055
X3202-60056
X3202-60057
X3202-60058
X3202-60059
X3202-60060
X3202-60061
X3202-60062

VACUUM valves
Ordering Information
Part Number
X3202-60063
X3202-60064
X3202-60065
X3202-60066
X3202-60067
X3202-60068
X3202-60069
X3202-60070
X3202-60071
X3202-60072
X3202-60073
X3202-60074
X3202-60075
X3202-60076
X3202-60077
X3202-60078
X3202-60079
X3202-60080
X3202-60081
X3202-60082
X3202-60083
X3202-60084
X3202-60085
X3202-60086
X3202-60087
X3202-60088
X3202-60089

Spare Parts
Seal Kit, Aluminum Block Valve Series 26, NW16
Seal Kit, Aluminum Block Valve Series 26, NW25
Seal Kit, Aluminum Block Valve Series 26, NW40
O-Ring Removal Tool, Aluminum Block Valve Series 26

Part Number
X3202-60103
X3202-60104
X3202-60105
X3202-60106

VacuumValvesDescription: Aluminum Inline Block Valves Series 26
Valve, Block, Aluminum, In-line, Hand-operated, NW16
Valve, Block, Aluminum, In-line, Hand-operated, NW25
Valve, Block, Aluminum, In-line, Hand-operated, NW40
Valve, Block, Aluminum, In-line, Air-operated, NW16, without Solenoid
Valve, Block, Aluminum, In-line, Air-operated, NW25, without Solenoid
Valve, Block, Aluminum, In-line, Air-operated, NW40, without Solenoid
Valve, Block, Aluminum, In-line, Air-operated, NW16, 115VAC	
Valve, Block, Aluminum, In-line, Air-operated, NW25, 115VAC	
Valve, Block, Aluminum, In-line, Air-operated, NW40, 115VAC	
Valve, Block, Aluminum, In-line, Air-operated, NW16, 220VAC	
Valve, Block, Aluminum, In-line, Air-operated, NW25, 220VAC	
Valve, Block, Aluminum, In-line, Air-operated, NW40, 220VAC	
Valve, Block, Aluminum, In-line, Air-operated, NW16, 24VDC	
Valve, Block, Aluminum, In-line, Air-operated, NW25, 24VDC	
Valve, Block, Aluminum, In-line, Air-operated, NW40, 24VDC	
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW16, without Solenoid
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW25, without Solenoid
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW40, without Solenoid
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW16, 115VAC	
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW25, 115VAC	
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW40, 115VAC	
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW16, 220VAC	
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW25, 220VAC	
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW40, 220VAC	
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW16, 24VDC	
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW25, 24VDC	
Valve, Block, Aluminum, In-line, Air-operated, Position Indicator, NW40, 24VDC	

9

Agilent High Performance Valves► Agilent Aluminum Gate Valves - Series 12

Technical Specifications

Thank you for choosing Agilent Valves. These valves aredesigned with the highest international vacuum standards
and manufactured with uncompromising quality. We areconfident that Agilent Valves will meet your most demanding
vacuum control needs.
The valves are available in manual, push-rod operation anddouble acting pneumatic operation. The pneumatic valves areavailable with solenoid (pilot) valves at 115 VAC, 220 VAC and
24 VDC, and a position indicator. See operator’s manual for
more information.

Leak rate: valve body, valve seat
Pressure range
ISO 63 – 160
ISO 250
Differential pressure on the gate
ISO 63 – 160
ISO 250
Differential pressure at opening
Cycles until first service
ISO 63 – 160
ISO 250
Temperature*
Valve body
Manual and pneumatic actuator
Solenoid valve
Position indicator
Heating and cooling rate
Material
Valve body
ISO 63 – 160
Mechanism

ISO 250
ISO 63 – 160
ISO 250

Seal: bonnet, gate
FeedthroughMounting orientation
Solenoid valve
Position indicator: contact rating
Voltage
Current
Valve position indication< 1 · 10-9 mbar Is-1
1 · 10-7 mbar to 1.6 bar (abs)
1 · 10-7 mbar to 1.2 bar (abs)≤ 1.6 bar
≤ 1.2 bar≤ 30 mbar
200 000
100 000≤ 120 °C≤   80 °C≤   50 °C≤   80 °C≤ 30 °C h-1
EN AW-5083 (3.3547),-6061 (3.3211)
EN AC-42100 (3.2371)
AISI 304 (1.4301)
EN AW-6082 (3.2315)
FKM (Viton)
shaft feedthroughany
24 V DC, 115 V, 220 V, 5.4 W≤ 250 V AC
≤ 50 V DC≤2A≤ 1.2 Avisual (mechanical)* Maximum values: depending on operating conditions and sealingmaterials
10

VACUUM valves
Features

Aluminum Gate Valves Functional Principle• Body material: aluminum• Low cost gate valve• Split body for easy cleaning• VATLOCK configuration  

Body style ISO 63-250
Gate mechanism ISO 160-250

1
2
3
4

Conductance Valve with manual
actuator(molecular flow)(depending on
DNStandard A‑dimension and(nominal I. D.) flanges
flange type)
Weightmm (in.)ls-1
kg (lbs)

Gate
Counter-plate
Leaf springs
Spring stop

5
6
7

Ball pairs
Ball detents
Gate seal
Valve seat side

Valve with pneumatic actuator
Compressed air
min. – max.
overpressurebar (psi)

Volume of pneumatic
actuatorl
ft3

Closing or
openingtimes

Weightkg (lbs)

550

3.00 (7.00)

4 – 7 (58 – 102)

0.16

0.006

1.5

3.00 (7.00)

2000

4.50 (10.00)

4 – 7 (58 – 102)

0.22

0.008

2

4.50 (10.00)

6000

9.00 (20.00)

4 – 7 (58 – 102)

0.50

0.018

2

9.00 (20.00)

22000

N/A (N/A)

4 – 7 (58 – 102)

1.50

0.053

5

25.00 (55.00)

160 (6)250 (10)See
page 14

VacuumValves63 (2 ½)100 (4)11

Agilent High Performance Valves
Main Dimensions
Valve with manual actuator: push rod
DN 63 – 100 (2½“ – 4“)U

Models

Q

V

K

W
T

L
N

L

P

O

O
N

K

P
Q
T
U

Projection E

V
W

DN 63
(2 ½)
36
(1.42)
329.50(12.97)155.50(6.12)
100(3.94)
48(1.89)
25(0.98)
174(6.85)
43(1.69)
94(3.70)
75(2.95)

DN 100(4)36(1.42)
413(16.26)203.50(8.01)
140(5.51)
48(1.89)
25(0.98)
209.50(8.25)
43(1.69)
94(3.70)
75(2.95)

DN 160(6)58(2.28)
547(21.54)280(11.02)
192(7.56)
70(2.76)
60(2.36)
267(10.51)65(2.56)
122(4.80)
95(3.74)

Flange dimensions: see page 14

Valve with manual actuator: push rod
DN 160 (6“)
V

Q

U

Valve seat side
Required for dismantling

K

O
N

P

L

T

W

12

Dimensions: millimeters (inches)

VACUUM valves
Main Dimensions
Valve with pneumatic actuator: double acting
ISO 63 – 100 (2½“ – 4“)Models
Q

U

K

V
W

L

T

W1

L

N
P

O

O

P

N

K

Q
T
U
Projection E

VW
W1

Valve with pneumatic actuator: double acting
ISO 160 (6“) – 250 (10“)

Valve seat side
Required for dismantlingCompressed air connection
Electrical connection
Position indicator
Emergency operationQ

V W

ISO 160(6)58(2.28)
547(21.54)280(11.02)
192(7.56)
70(2.76)
60(2.36)
267(10.51)65(2.56)
57(2.24)
71.50(2.82)––

ISO 250(10)76(2.99)
843(33.19)453(17.83)308(12.13)96(3.78)
100(3.94)
390(15.35)86(3.39)
67(2.64)
84.50(3.33)––

Dimensions: millimeters (inches)

L

VacuumValvesO

NPKISO 100(4)36(1.42)
425(16.69)203.50(8.01)
140(5.51)
58(2.28)
25(0.98)
221.50(8.72)
55(2.17)
56(2.20)
72(2.83)
36.50(1.44)

Flange dimensions: see page 14

T

U

ISO 63(2 ½)
36(1.42)
341.50(13.45)155.50(6.12)
100(3.94)
58(2.28)
25(0.98)
186(7.32)
55(2.17)
56(2.20)
72(2.83)
36.50(1.44)

13

Agilent High Performance Valves
Flange Dimensions
ISO-F
ISO 63 –250 (2½“ –10“)Models

I

C

B
M

H

D

B

A

A

C

O1

D

ExF
G

ExF
G
H
I
M
O1

ISO 63(2 ½)
60(2.36)
130(5.12)
110(4.33)
65(2.56)
4 x M812(0.47)
70(2.76)
3(0.12)
65.50(2.58)
131(5.16)

ISO 100(4)60(2.36)
165(6.50)
145(5.71)
100(3.94)
8 x M812(0.47)
102(4.02)
3(0.12)
83(3.27)
166(6.54)

ISO 160(6)70(2.76)
235(9.25)
200(7.87)
150(5.91)
8 x M1016(0.63)
153(6.02)
5(0.20)
117.50(4.63)
237(9.33)

ISO 250(10)100(3.94)
350(13.78)310(12.20)261(10.27)
12 x M10
16(0.63)––––
175(6.89)
352(13.86)

Ordering Information
Description Aluminum Gate Valves - Series 12
Valve, Gate, Aluminum, 63 ISO, Air-operated, Position Indicator, 115VAC	
Valve, Gate, Aluminum, 63 ISO, Air-operated, Position Indicator, 220VAC	
Valve, Gate, Aluminum, 63 ISO, Air-operated, Position Indicator, 24VDC	
Valve, Gate, Aluminum, 63 ISO, Air-operated, Position Indicator, without Solenoid
Valve, Gate, Aluminum, 63 ISO, Hand-operated
Valve, Gate, Aluminum, 100 ISO, Air-operated, Position Indicator, 115VAC	
Valve, Gate, Aluminum, 100 ISO, Air-operated, 220VAC, Position Indicator
Valve, Gate, Aluminum, 100 ISO, Air-operated, 24VDC, Position Indicator
Valve, Gate, Aluminum, 100 ISO, Air-operated, Position Indicator, without Solenoid
Valve, Gate, Aluminum, 100 ISO, Hand-operated
Valve, Gate, Aluminum, 160 ISO, Air-operated, Position Indicator, 115VAC	
Valve, Gate, Aluminum, 160 ISO, Air-operated, Position Indicator, 220VAC	
Valve, Gate, Aluminum, 160 ISO, Air-operated, Position Indicator, 24VDC	
Valve, Gate, Aluminum, 160 ISO, Air-operated, Position Indicator, without Solenoid
Valve, Gate, Aluminum, 160 ISO, Hand-operated
Valve, Gate, Aluminum, 250 ISO, Air-operated, Position Indicator, 115VAC	
Valve, Gate, Aluminum, 250 ISO, Air-operated, Position Indicator, 220VAC	
Valve, Gate, Aluminum, 250 ISO, Air-operated, Position Indicator, 24VDC	
Valve, Gate, Aluminum, 250 ISO, Air-operated, Position Indicator, without Solenoid

Part Number
X3202-60000
X3202-60001
X3202-60002
X3202-60003
X3202-60004
X3202-60010
X3202-60011
X3202-60012
X3202-60013
X3202-60014
X3202-60020
X3202-60021
X3202-60022
X3202-60025
X3202-60026
X3202-60027
X3202-60028
X3202-60029
X3202-60030

Spare Parts
Seal Kit, Aluminum Gate Valve Series 12, ISO 63
Seal Kit, Aluminum Gate Valve Series 12, ISO 100
Seal Kit, Aluminum Gate Valve Series 12, ISO 160
Seal Kit, Aluminum Gate Valve Series 12, ISO 250

Part Number
X3202-60099
X3202-60100
X3202-60101
X3202-60102
14

VACUUM valves► Agilent UHV All Metal Valves - Series 54

Technical Specifications
Leak rate: valve body, valve seat
Pressure range
Differential pressure on the gate
Differential pressure at opening
Lifetime
Bake-out temperature**Heating and cooling rate
Materialvalve body, mechanism, bellows
Seal: bonnet, plate
FeedthroughMounting orientation
Valve position indication
Conductance (molecular flow)
Closing force
Weight: NW 16 / 40 kg (lbs)< 1 · 10-10 mbar Is-1
XHV to 2 bar (abs)≤ 2 bar≤ 1 bar*≥ 1000 cycles≤ 300 °C open and closed≤ 60 °C h-1
AISI 316L (1.4404, 1.4435)
metal
bellowsanyvisual (mechanical)
NW 16: 5 ls-1 / NW 40: 50 ls-1
closes at a mechanical stop
0.4 (0.9) / 1.9 (4.2)* > 1 bar with reduced number of cycles** Maximum values: depending on operating conditions
and sealing materials

15

VacuumValvesThank you for choosing Agilent’s High Performance Valves.
These valves are designed with the highest international
vacuum standards and manufactured with uncompromisingquality. We are confident that you will find these valves meetyour most demanding vacuum control needs.
The valves are manually operated with a standard Hex
wrench, so no Torque Wrench is required. Thanks to the“hard-on-hard” metal seals, these valves can operated
thousands of times before requiring maintenance.

Agilent High Performance Valves
Features

UHV All Metal Valves Functional Principle• Body material: stainless steel• FLEX VATRING configuration: see below• Sealing surfaces are only elastically deformed• Convenient operation with a standard hexagon wrench – no torquewrench required• High conductance• FLEX VATRING exchangeable twice

1
2
3

FLEX VATRING
Bonnet seal
Bellows
Valve seat side

FLEX VATRING
This dynamic, all-metal sealing system is characterized byconsistent sealing and closing forces. It enables achieving
high sealing forces with comparably low axial forces.
The seal mating surfaces are in stainless steel, and deformed
elastically only.
The FLEX VATRING system is suitable for extreme UHV.
It may be baked to 300 °C in open and closed position andreaches a lifetime of > 1 000 cycles if operated under clean
conditions.

Ordering Information
Description UHV All Metal Valves
Valve, ¾ Metal/Mini CFF	Valve, All-Metal, 1 ½”, RT-Angle

Part Number
X3202-60097
X3202-60098

Spare Parts
Seal Kit, 1st Replacement, UHV Series 54, ¾”
Seal Kit, 2nd Replacement, UHV Series 54, ¾”
Seal Kit, 1st Replacement, UHV Series 54, 1½”
Seal Kit, 2nd Replacement, UHV Series 54, 1½”

Part Number
X3202-60107
X3202-60109
X3202-60108
X3202-60110

16

VACUUM valves
Dimensions
Valve NW 16 (⅝”)

O
U
SW
V

Models

Z

A
B

K

T

C

N

D
B

C

ExF

M

A

H1
H2

L

D

Valve NW 40 (1 ½”)

A

K
L

O
U
SW
V

M

Z

N

T

O
K

SW

N

T

A

B

C

U

L

M

V
D

Z

A

Valve seat side

Flange NW 16 – 63 (⅝“ – 2 ½“)

DN 40
(1 ½)
63
(2.48)
69.35(2.73)
58.70(2.31)
40(1.57)
6 x 6.60
6 x 0.26
48.30(1.90)
42(1.65)
109.10(4.30)
13(0.51)
37.60(1.48)
53.10(2.09)
68(2.68)
17(0.67)
40(1.57)
45(1.77)
9.53(0.38)
20(0.79)
Dimensions: millimeters (inches)

L

VacuumValves

ExF

DN 16
(⅝)
38
(1.50)
34(1.34)
27(1.06)
16(0.63)
6 x 4.30
6 x 0.17
21.40(0.84)
18.50(0.73)
66(2.60)
7.35(0.29)
25.60(1.01)
27.50(1.08)
34(1.34)
10(0.39)
30.50(1.20)
19(0.75)
6.35(0.25)
8.50(0.33)

D
H2 ±0.2
0.1

±

H1 0
C
B

17

Stainless Steel Tube Valves► Agilent Stainless Steel Valves

Agilent’s family of vacuum stainless steel tube and in-line
valves are designed to connect our rough vacuum and highvacuum pumps to your system. Delivering maximum
conductance and sized for easy, convenient installation, thesevalves are ideally suited for systems requiring high reliability
with low outgassing.
Excellent low outgassing characteristics are derived from thevalve’s fusion welded 304 stainless steel body, welded
AM-350 stainless steel nesting bellows and small crosssection elastomers and do not contain any blind internal
cavities.
In combination with our popular hardware products, the newstainless steel valves offer a complete, bundled solution foryour vacuum system, making it possible for convenient onestop shopping for everything required to connect Agilent
vacuum pumps to your system.
A selection of port mounts...
Standard port mounts include:• Conflat metal seal flanges, recommended for ultra-highvacuum service• KF and ISO flanges for quick elastomer seal flanges, ideal
for high vacuum applications that require frequent assemblyand disassembly. See range of sizes in specifications table• Solenoids and position indicators are optional and are soldseparately.

Technical Specifications
Pressure range
Leak rate
Service life (bellows)
Mounting position
Baking temperature
ConductanceMaterials
Pneumatic
Air connection
Air pressure
Open/Close time
Solenoid (optional)
Volume of air
CylinderValve position
Position indicator (optional)
Switching logic

Atmosphere to 1 x 10-8 mbar (7.5 x 10-9 Torr)<1 x 10-9 std cc/sec He
1.5 million cycles (minimum)
any
Valve open
Valve closed
Position indicator (A/O optional)
Solenoid (A/O optional)
200 °C (392 °F)
150 °C (302 °F)
70 °C (158 °F)
60 °C (140 °F)¾ in. Angle¾ in. In-line
1 in. Angle
1 in. In-line
1½ in. Angle in. 1½ in. In-line
6 l/sec
5 l/sec
15 l/sec
13 l/sec
48 l/sec
44 l/sec
Valve body
Bellows
Bellow flange
Seal plate
Bonnet gasket
O-rings
304L SS
AM-350304 SS
304 SS
Viton (V747)
Viton (V747)
⅛ in. NPT
60 psig (minimum)
80 psig (maximum)¾ in. Valve
1 in. Valve<0.5 seconds<0.5 seconds
Supply Voltages: 110/120 V; 50/60 Hz; 220/240 V, 50/60 Hz; 24 VDC¾ in. Valve
1 in. Valve0.049 L0.049 LNo mechanical indicator (see optional position indicator)
Voltage
CurrentPower5-240V DC/AC
100 mA (maximum)
10 W (maximum)
SPST normally open
18

1½ in. Valve<0.8 seconds
1½ in. Valve
0.1 L
Visual Indicator
Green LED

VACUUM valves
Dimensions
Angle valves pneumatic

Size
NW 16
NW 25
A

NW 40
CF 1.33
B

CF 2.12CF 2.75

B

¾ in.
1 in.
1½ in.

A
157.58(6.22)
155.7(6.13)
176.36(6.94)
162.02(6.38)
156.29(6.15)
177.87(7.00)
157.58(6.25)
151.9(5.98)
172.56(6.79)

B
50.8
(8.2)
52.07
(2.05)
65(2.56)
55.25(2.18)
52.63(2.07)
66.51(2.62)
50.8(2.00)
48.27
(1.9)
61.2
(2.41)
Dimensions: millimeters (inches)

In-line valves pneumatic

NW25
NW40
CF 1.33
CF 2.12

A

CF 2.75¾ in.
1 in.
1½ in.

A
101.6
(4.0)
106.7
(4.2)
130.05(5.12)
119.41(4.70)
107.79(4.24)
133.07(5.24)
94
(3.7)
99.1
(3.9)
122.4
(4.82)

VacuumValvesSize
NW16

Dimensions: millimeters (inches)

19

Stainless Steel Tube Valves
Dimensions
Angle valves hand-operated

Size
NW 16
A (Open) - B (Closed)

NW 25
NW 40
CF 1.33

C

CF 2.12CF 2.75
C

¾ in.
1 in.
1½ in.

A
158.08(6.22)
152.4(6.0)
188.07(7.41)
158.72(6.25)
152.96(6.02)
189.58(7.46)
154.28(6.07)
148.6(5.85)
182.27(7.18)

B
137.75(5.42)
132.07(5.2)
163.71(6.45)
138.27(5.44)
132.59(5.22)
165.22(6.5)
133.75(5.27)
128.07(5.04)
159.91
(6.3)

C
54.6
(2.15)
52.07(2.05)
65(2.56)
55.12(2.17)
52.63(2.07)
66.51(2.62)
50.8(2.00)
48.27(1.90)
61.2(2.41)
Dimensions: millimeters (inches)

In-line valves hand-operated

A (Open) - B (Closed)

Size
NW 16
NW 25
NW 40
CF 1.33
CF 2.12C

CF 2.75¾ in.
1 in.
1½ in.

A
119.89(4.72)
117.66(4.63)
138.28(5.44)
119.87(4.72)
117.64(4.63)
147.28(5.8)
119.89(4.72)
117.66(4.63)
147.28
(5.8)

B
99.56
(3.92)
97.33(3.83)
122.76(4.83)
99.54(3.92)
97.31(3.83)
122.76(4.83)
99.56(3.92)
97.33(3.83)
122.76(4.83)

C
101.6
(4.0)
106.7
(4.2)
130.5
(5.12)
119.4
(4.7)
107.8
(4.24)
133.07(5.24)
94
(3.7)
99.08
(3.9)
122.45(4.82)
Dimensions: millimeters (inches)

20

VACUUM valves
Ordering Information
Ordering Instructions:• Use only the Product Number list in the Product Number column.
• Numbers in the Option Number column are for reference only; use Short Description for ordering options.
Example Order: for a right angle, 1 1/3” pneumatic valve with position indicator for the valve, and a spare position indicator:
Item 1:
X3200A: Agilent Stainless Steel Tube Valve, Right Angle
Option: Pneumatically Operated, 1 1/3” ConFlat (021)
Option: Position indicator with LED light (060)
Item 2:
X3200-63000: Position indicator (as a separate spare part)
Note: Items are delivered as separate items in the same box, for assembly upon arrival.
For assistance with assembly, please see the video on Agilent Chem Vacuum YouTube Channel.
Configuration

Product Option Actuation
Number Number
Right Angle Stainless Steel Tube Valve X3200A
001	Manual
In-line Stainless Steel Tube Valve
X3201A002	Manual		003	Manual
004
Manual005
Manual006
Manual007
Manual008
Manual009
Manual021
Pneumatic022
Pneumatic023
Pneumatic
024
Pneumatic
025
Pneumatic
026
Pneumatic
027
Pneumatic
028
Pneumatic029
Pneumatic

Size

FlangeShort Description¾”	ConFlat, 1 1/3”	Manually operated, 1 1/3” ConFlat
1”	ConFlat, 2 ⅛”	Manually operated, 2 ⅛” ConFlat
1 ½”	ConFlat, 2 ¾”	Manually operated, 2 ¾” ConFlat¾”
Tube End, ¾” Manually operated, ¾” Tube End
1”
Tube End, 1”
Manually operated, 1” Tube End
1 ½” Tube End, 1 ½” Manually operated, 1 ½” Tube End¾”
NW16
Manually operated, NW161”
NW25
Manually operated, NW25
1 ½” NW40
Manually operated, NW40¾”
ConFlat, 1 1/3” Pneumatically operated,  1 1/3” ConFlat*
1”
ConFlat, 2 ⅛” Pneumatically operated, 2 ⅛” ConFlat*
1 ½” ConFlat, 2 ¾” Pneumatically operated, 2 ¾” ConFlat*¾”
Tube End, ¾” Pneumatically operated, ¾” Tube End*1”
Tube End, 1”
Pneumatically operated, 1” Tube End*
1 ½” Tube End, 1 ½” Pneumatically operated, 1 ½” Tube End*¾”
NW16
Pneumatically operated, NW16*1”
NW25
Pneumatically operated, NW25*
1 ½” NW40
Pneumatically operated, NW40*

Accessory Options (shipped with valves for installation upon arrival)
Solenoid, 24VDC	
Solenoid, 110VAC	
Solenoid, 220VAC	
Position Indicator with LED

Add Option Number
050
051
052
060

Service Parts (Ordered separately)
Solenoid, 24VDC
Solenoid, 110VAC
Solenoid, 220VAC
Position Indicator with LED

Order Part Number
X3200-63024
X3200-63110
X3200-63220
X3200-63000

Spare Parts
Bellows Replacement Kit, NW16/25
Bellows Replacement Kit, NW40

Part Number
X3200-67000
X3200-67001
21

VacuumValves* For pneumatically operated valves choose Solenoid and Position Indicator Options if desired - See Accessories Options table below.

Electromagnetic Block Valves► Agilent Electromagnetic Block Valves
A

D

C

B

E

Models
NW16
NW25

A
64
(2.50)
76(2.98)

B
58(2.28)
58(2.28)

C
113(4.43)
123(4.83)

D40(1.58)
50(1.98)

E40(1.58)
50(1.98)

Dimensions: millimeters (inches)

FeaturesBenefits• Reliable design• Low cost
• Rapid spring-closed actuator• KF Flange connections• Single coil

• Service-free operation• Economical• System protection on loss of power• Ease of Installation• Compact construction• Rapid cycling

22

VACUUM valvesTechnical Specifications
Vacuum range
Leak rate
Operating temperature
Bakeable to –Pulse voltage/Hold voltage
Service life
Conductance
Speed to Open/Close
Loss of power

Cleaned aluminum: atm to 10-6 Torr
<1 x 10-9 std cc/sec. (helium)
15 °C min to 40 °C maximumNon-operating (closed) 125 °C
23 Watts
250,000 cycles
NW16 – 2.2 l/s
NW25 – 3.5 l/sOpen – 50 ms
Close – 25 ms
Valve closes (in < 25 m/sec)

Ordering Information
Size
Aluminum Body
NW16

NW25

Voltage Option

Part Number

Shipping Weight kg (lbs)

115 V; 50/60 Hz
220 V; 50/60 Hz
24 VDC240 V; 50 Hz
115 V; 50/60 Hz
220 V; 50/60 Hz
24 VDC240 V; 50 Hz

L9940302
L9940304
L9940306
L9940308
L9942302
L9942304
L9942306
L9942308

0.7 (1.5)
0.7 (1.5)
0.7 (1.5)
0.7 (1.5)
0.9 (2.0)
0.9 (2.0)
0.9 (2.0)
0.9 (2.0)

Part Number

Shipping Weight kg (lbs)L9987008
L9987002
L9987004
L9987009
L9987006

0.5 (1.0)
0.5 (1.0)
0.5 (1.0)
1.0 (2.0)
0.5 (1.0)

VacuumValvesDescription
Spare Parts
Plunger Assembly – includes shaft, spring, and seal
Operator, EMB, 115 V, 50/60 Hz
Operator, EMB, 220 V, 50/60 Hz
Operator, EMB, 240 V, 50 Hz
Operator, EMB, 24 VDC

23

Variable Leak Valves► Agilent Variable Leak Valve

1/4-56
UNS-3ATHREADEH

6.4 (0.25)

FG

34 (1.34)

D DIA
B DIA

2 3/4"OD CFF
NW35

A

A
mm
67
Inches 2 21/34

C

B
70
2¾

C
44
1¾

D
44
1¾

E
33
1 5/16

F
114
4½

G
39
1 17/32H
32
1¼

Technical Specifications

The variable leak valve includes a movable piston with an
optically flat sapphire that meets a captured metal gasket.
This forms a seal completely free from friction, seizing,and shear. The sapphire’s movement is controlled through athreaded shaft-and-lever mechanism which provides amechanical advantage of 13,000 to 1.

Controlled leak rate
Vacuum range
Leak rate
Max flow conductanceBakeable to –10-10 Torr-l/sec (minimum)
Atmosphere to below 10-11 Torr (mbar)
No leak detectable on a helium
mass spectrometer leak detector
with sensitivity of 1 x 10-10 std cc/sec
6 l/m
450 °C

Ordering Information
Description
Sapphire-sealed variable leak valve and valve adjustment tools
With 1 ¹/³ in. (NW16) CFF gas inlet
Adapter kit, 1 ¹/³ in. (NW16) CFF-to-flare-fitting adapter kit
Replacement gasket assembly
Replacement sapphire assembly
Sapphire removal tool
Repair and tool kit includes fine screw assembly, handle, and collar adjusting knobs andspring driver assembly springs, sapphire assembly and gasket removal tool, brush,
lubricant, 1 ⁄4 and 5 ⁄16 hex key wrenches and instruction manual

24

Part Number

Shipping Weight kg (lbs)9515106
95151179535050
9530072
SR0061417400

1.8 (4.0)
0.5 (1.0)
0.1 (0.3)
0.5 (1.0)
0.2 (0.5)96200142.3 (5.0)