SCHEDULING SYSTEM FORSEMICONDUCTOR MANUFACTURING

Casio Micｒonics Co., Ltd.

February 15, 2007

・Company Overview
・Characteristics of the system
・Background of and effects brought by introduction of
the system
１．Outline of implementation
System overview
Implementation schedule
Introduction cost
２．Explanation of scheduling system
３．About periphery systems
４．System issues
５．Wrap up

1

Smart ＆ Fine Technologies

OUTLINE OF COMPANY
Founded:July 25, 1987

Lines of business:

BUMP Business
Film Devices Business

Production base:

Ohme Works （No. 1 & No. 2 plants）
Yamanashi Works （No. 1 & No. 2 plants）

Capital:2,992 Million yen (as of March 31, 2006)

Turnover:25.1 billion yen (March 2006)

No. of employees:

630 (March 2006)

Stock exchange:

JASDAQ

Securities code:

6760

Newspaper listing name:

C MicroNewspaper listing column:

J stock

2

Smart ＆ Fine Technologies

OUTLINES OF BUSINESSCONSTANTLY UPHOLDS THE INNOVATION OF
DIGITAL EQUIPMENT WITH MICRO METER BASED UNIQUE
AND REVOLUTIONARY TECHNOLOGIESFilm devices business

COF/TCPＢＵＭＰ businessGold BUMP

Solder BUMP/W-CSP

3

Smart ＆ Fine Technologies

FILM DEVICES BUSINESS〈 COF structure 〉

Used in large screen
thin type PCs/LCD
televisions for low cost

Double coating film (PI+Cu)
LC driver
PCB
LC connecting partconnecting part

PI ： polyimide
Cu ： copper

4

Smart ＆ Fine Technologies

BUMP BUSINESS《 SOLDER BUMP/W-CSP 》《

GOLD BUMP》

Constantly evolving
high definitioncolor LC display
Weight saving for
multifunction mobile information
terminal equipment

5

Smart ＆ Fine Technologies

W-CSP APPLICATION EXAMPLES
Example of use（digital camera）

6

Smart ＆ Fine Technologies

PRODUCT
CHARACTERISTICS
W-CSP: items handled by the scheduling system（１） Wafer inch size
5Φ、6Φ、8Φ、（12Φ）（２） No. of models

About 100/month（３） Lot size
Mass production
Proto type（４） No. of processes（５） Lead time

25 sheets（1～25 sheets）
1 sheet ～ 10 sheets
Min. 9 ～ Max. 67

Prototype 4 days ～ 14 days
Mass production 7 days ～ 10 days

7

Smart ＆ Fine Technologies

CHARACTERISTICS OF
MANUFACTURING PROCESSES

１．Receiving

2.Scrubber

3.Coating

4.Exposure

5.Development

6.Hardening

7.Descum

8.Spatter

9/Coating

10.Exposure

11.Development

12.Plating

13.Ashing

15.Exposure

16.Development

14. Electrode measurement

17.Descum

18.Plating•3,9 / 4,10,15 / 5,11,16 / 12,18 / 7,13,17
Note: The above manufacturing processes use the same equipment.

19.Defoaming

20.Cure8

Smart ＆ Fine Technologies

BACKGROUND INTRODUCTION
1. Intends to bring W-CSP business to our 3rd pillar of operation, whichstarted full-scale mass production in 2004, and to attain the number
one share in the world.
2. As this was a new package, it generated a number of sales orderalterations in proportion to the increases in sales orders. Also, thepercentage of its prototype was high. It was thus predicted that thedefinite scheduling adjustments would not be carried out manually.
3. This didn’t mean that we had to depend on an expensive package
specially designed for semi-conductor processing. Nonetheless, we
didn’t have enough time to prepare in-house developed schedulingsoftware.
4. Our group company has introduced SMT based scheduler in the past.
We were thus not worried about its validity.

9Smart ＆ Fine Technologies

EFFECTIVENESS OF INTRODUCTION
1.

The company is not managed in a wait-and-see style but amind-set for preparing planning is now permeating.

2.

Productivity enhancement judging by results of the operation
improvements as well as the information processing
improvements.
- Production productivity per person
Enhanced by 43%- Operational time in preparing planning
Shortened to 1/6

3.

The manufacturing lead time was shortened.
- Lead time
Shortened by 20%- Unevenness of lead time Reduced by 30%

101. OUTLINEOF
IMPLEMENTATION

1.1 SYSTEM OVERVIEWSCHEDULING SYSTEMHOST I/F, SCHEDULING, SETUP, WORKINSTRUCTIONS SHEETENVIRONMENTAL IMPROVEMENTS FOR THE
OPERATION OF SCHEDULING SYSTEM
MASTER
IMPROVEMENTRESOURCE MASTER REGISTRATION AS/400 MASTER MAINTENANCERESOUCEMASTER
PROCESSMASTERESTABLISHING SUB-SYSTEMIMMEDIACY OF ACTUALDATA RESULTS AND
IMPROVING THEIR
ACCURACY
PREVENTIONF OF INPUTMISTAKES

RECOGNIZING ORDER NO.
(BARCODE) WHEN
INPUTTING ACTUALRESULTSPREVENTION OF RECIPEINPUTTING TROUBLEPERIPHERY SYSTEMACTUAL RESULTS ARE INPUT (BARCODEIS INPUT) BY WIRELESS HANDYTERMINAL
ID LABEL ISSUE

RECIPE MANAGEMENT SYSTEM

11

1. OUTLINE OF
IMPLEMENTATION

1.2 IMPLEMENTATION STRUCTURE

Throughput Double
Propulsion Project

Production
Improvement

ReviewPresident
Division Manager
Production Planning
Scheduling
Progress Meeting
WeeklySystem Development
Information
Control Gr.

In House
Development
2 SE Personnel

Master Maintenance
Manufacturing Dept
/Technology Dept.

Asprova
Corporation

12

1. IMPLEMENTATIONOUTLINE

1.3 IMPLEMENTATION SCHEDULE
Plan

13

1. IMPLEMENTATIONOUTLINE

1.4 INTRODUCTION COST (REFERENCE)■ASPROVA:

License (option available）
For planning and executing main unit(server)
For shop floor
Maintenance fee

1 set
1 set

■ I/F Development: Incorporating data from AS/400
Actual results, master(manufacturing process, equipment), order■ Consultation: For 6 months （about 10 times）■ Introduction Equipment: ASPROVA operating PC
Total

2 setsAbout 15,000,000 yen(Scheduling system only)142. EXPLANATION OF SCHEDULING SYSTEM
2.1 Information Referenced Diagram
2.2 Master Registration
2.3 Order Input
2.4 Actual Results Input
2.5 Work Instructions Sheet
2.6 Operational Flow
2.7 Work Progress Table

15

2. EXPLANATION OFSCHEDULING SYSTEM

2.

1 INFORMATION REFERENCEDDIAGAMWork progress
sheet

16

2. EXPLANATION OFSCHEDULING SYSTEM

2.2 MASTER REGISTRATION

Outline of data: No. of manufacturing process: about 70
No. of equipment: about 80
Operating 24 hours, 360 days/year
Incorporating the manufacturing process/equipment information from hostmachine (AS400)* Coinciding manufacturing processes, resource
names and codes* Synchronization of update information(synchronization of maintenance timing)

Inputting master data designed for scheduler
Master registration examples that fit our company’s production characteristics* Calendar (maintenance time registration for equipment)* Shift table (24 hours 4 groups 2 shifts structure)* Overlapping, lot wrap up (furnace resource) operation

17

ASPROVA INTEGRATED MASTER SETUP EXAMPLE• Manufacturing process, resource code: Combined manufacturing process name and code
(simple display, combined when master is synchronized)• Manufacturing process number (order) : Handles manufacturing processs adding simulation by skipping
every 10 digits• Manufacturing ability: time saved when registering new items by preparing the master separately
Default equipment prepared for each wafer size18

2. EXPLANATION OFSCHEDUING SYSTEM

2.3 ORDER INPUT

Receiving Order Production, Approximately 200 Orders Per Month,
100 models (Asprova in Place)* Sales order:- Input when the order is placed from a client* Manufacturing order:- Prepared when a manufacturing process is input- Prepared by host machine’s manufacturing processcontrol system
Sales orders and manufacturing orders loaded from host machine.
Scheduling method:* Appointing “FORWARD” based on the input date
* Sales orders (based on the scheduled warehousing date）* Manufacturing order (based on the manufacturing process input date)* Priority given based on the needs of urgency etc.
19

2. EXPLANATION OFSCHEDULING SYSTEM

2.4 INPUTTING ACTUAL RESULTS

Imported from host machine (AS400) manufacturing processcontrol system* Actual operational results input automatically(completed time, number of finished item) for each model, eachmanufacturing lot, and each manufacturing process* Automatically deletes manufacturing orders, using actual
data results

Timing:*At time of scheduling （once a day, around 17:00）

20

ASPROVA ◆ PROCESSING MENUBETWEEN HOST MACHINES
Prepared a menu for handling the interface data, using EXCEL with which theshop floor staff are familiar.

21

2. EXPLANATION OFSCHEDULING SYSTEM

2.5 WORK INSTRUCTIONS SHEETThis sheet is like a ledger sheet which makes it easy to give
instructions to production site using ASPROVA scheduling
results.

Details of ledger sheet:*Outputs each manufacturing process’s scheduled production time, which is
assigned by the scheduler. This is done for each manufacturing process as wellas each equipment.
*Times are continually upgraded with hourly imported actual data results.
*Contains comments such as urgency, etc. if special instructions are required forsome operations.

Operation of ledger sheet:*The output work instructions sheets are distributed to shop floor staff ateach manufacturing process, and the work is carried out.
*Defects or delayed input that occurred when the manufacturing processes
were input are reflected to the next day’s production planning using theactual results, and work instructions are reviewed on a daily basis.
222.5 WORK INSTRUCTIONS SHEETManufacturing process
retaining status(Indicated in grey)

Reflects the input results on an hourly
basisWork in progress：Updates in red letter
Completed work：Half transparent letter23

2. EXPLANATION OFSCHEDULING SYSTEM

８：５０

2.6 OPERATIONAL FLOWCHANGING SHIFTS*Administrative staff accepts sales
orders.
* Schedule forecast to customers* Master maintenance*Operator inputs actual results.

１７：００

１７：３０

２０：５０

SCHEDULING PROCESSING＆ PREPARING WORKINSTRUCTIONS SHEET* Rescheduling & preparing work
instructions sheet based on newsales orders and actual
operational results
DISTRIBUTING WORKINSTRCUTIONS SHEET
Referring work instructions sheet(sharing)

Automatically updates the actual
results on an hourly basis

CHANGING SHIFTS*Operator inputs actual results.
24

2. EXPLANATION OFSCHEDULING SYSTEM

2.7 WORK PROGRESS TABLE
Since the work instruction sheet doesn’t provide all the information, the work
progress status (from input to completion) is displayed in the form of a list where
the comparison is made between the planning and the actual result for eachmanufacturing order.
DETAILS OF LEDGER SHEET-Makes a comparison between the scheduler prepared plan (from input tocompletion) and its actual result for each major manufacturing process.
-Selects the planning data, to which the comparison is to be made, from the pastones that were planned at the arbitrary point of time.
OPERATION OF LEDGER SHEET-Selects the past schedule for which the comparison needs to be made with the actual
result.
-Possible to prepare a table as needed (possible to have continual updating of theactual results on an hourly basis.)-Makes the comparison between the planned and the actual results, and analyzes theplanning accuracy and the issues.
25

H
H

WLP

作業進捗表

A SPR OV A データ： o pe rati o n _0 5 0 4 2 5 1 7 5 9 .c sv 使用

H 計画範囲： 2005/04/24 - 2005/05/14
H 最終更新： 2005/04/26 17:04:56 現在
H
次回更新：

4/23
H NO オーダーNO
数量H
予定
9 12 15 18 21
H
ロットNO
Φ
実績
1
17 M137 6 1 1 825 予定
28 QGAG05D051 0
実績
3
1
18 M137 6 1 3 725 予定
28 QGAN05D005 0
実績3
1
19 M137 6 1 9 1
24 予定
2
8 QGAN05D006 0
実績
3
1
20 M137 6 1 9 2
25 予定
28 QGAV05D001 0
実績
3
1
21 M137 6 1 9 3
25 予定
28 QGAV05D002 0
実績3
1
22 M137 6 1 9 425 予定
28 QGAV05D003 0
実績3
1
23 M137 6 3 0 0
2 予定
2
8 QG9505D003 0
実績3
1
24 M137 6 3 8 2
2 予定
2
6 QC1305D001 0
実績
3
1
25 M137 6 7 8 6
25 予定
2
8 QGAG05E001 0
実績
3
1
26 M137 6 7 8 7
25 予定
2
8 QGAG05E002 0
実績3
1
27 M137 8 5 8 925 予定
28 QGAG05E003 0
実績3
1
28 M137 8 5 9 0
25 予定
2
8 QGAG05E004 0
実績3
1
29 M137 8 5 9 1
24 予定
2
8 QGAN05E001 0
実績
3
1
30 M137 8 5 9 2
24 予定
2
8 QGAN05E002 0
実績
3
1
31 M137 8 5 9 3
24 予定
2
8 QGAN05E003 0
実績3
1
32 M137 8 5 9 4
25 予定
28 QGAN05E004 0
実績▼ 出力開始日
4/24
0

3

6

9 12 15 18 21

4/25
0

3

6

9 12 15 18 21

4/26
0

3

6

9 12 15 18 21

4/27
0

3

6

9 12 15 18 21

0

3

▲
▲
▲
▲
▲

26

6

進捗表

M1376191

QGAN［Plan］－［Actual result］

計画
NO
39 C380
40 C385
41 C390
42 C400
43 C41044 C42045 C500
46 C51047 C520
48 C530
49 C540
50 C560
51 C580
52 C600
53 C620
54 C640
55 C642
56 C650
57 C680
58 C700
59 C72060 C745
61 C750
62 C780
63 C782
64 C790
65 C900

工程

開始時間

Ｔｉエッチング
24 22:15
Ｔｉエッチング検査
24 22:42
再配線厚測定24 22:45
ポスト厚測定24 22:55
シェア強度測定24 23:22
外観検査
25
1:01
ＰＩアッシング25
2:36
ウェハ厚測定
25
3:10
樹脂印刷
25
4:21
脱泡
25
5:06
キュア
25
5:15
樹脂研削
25 15:45
端子表面処理25 16:46
保護テープ貼付
25 19:48
Ｓｉ研削
25 20:26
保護テープ剥離25 21:18
超音波洗浄１26
2:14
フラックス印刷26
3:35
半田ボール搭載
26
5:39
Plan
リフロー
26
7:16
フラックス洗浄26
8:30
端子高さ（径）測定 26
9:30
9:50
端子シェア強度測定 26
レーザーマーク
26 10:04
超音波洗浄２26 13:04
ｗｆ外観検査26 13:34
ｗｆ確認
26 13:36

実績
終了時間

24
24
24
24
24
25
25
25
25
25
25
25
25
25
25
25
26
26
26
26
26
26
26
26
26
26
26

22:42
22:44
22:55
23:05
23:32
2:11
3:05
3:15
5:05
5:08
15:45
16:45
17:42
20:26
21:14
21:56
2:44
5:01
7:16
8:30
9:30
9:50
9:57
11:41
13:34
13:36
13:46

工程待 所要時間 開始時間

0:01
0:00
0:01
0:00
0:17
1:29
0:25
0:05
1:06
0:01
0:07
0:00
0:01
2:06
0:00
0:04
4:18
0:51
0:38
0:00
0:00
0:00
0:00
0:07
1:23
0:00
0:00

0:27 24
0:02 24
0:10 24
0:10 24
0:10 24
1:10 25
0:29 25
0:05 25
0:44 25
0:02 25
10:30 25
1:00 25
0:56 25
0:38 25
0:48 25
0:38 25
0:30 25
1:26 25
1:37 26
1:14 26
1:00 26
0:20 26
0:07 26
1:37 26
0:30 26
0:02 26
0:10 26

終了時間

工程待 所要時間 投入 差

所要 差

22:15 24 22:42 0:01
0:27
0:00
0:00
22:42 24 22:44 0:00
0:02
0:00
0:00
22:45 24 22:55 0:01
0:10
0:00
0:00
22:55 24 23:05 0:00
0:10
0:00
0:00
23:22 24 23:32 0:17
0:10
0:00
0:00
1:01 25
2:11 1:29
1:10
0:00
0:00
2:36 25
3:05 0:25
0:29
0:00
0:00
3:10 25
3:15 0:05
0:05
0:00
0:00
4:21 25
5:05 1:06
0:44
0:00
0:00
5:06 25
5:08 0:01
0:02
0:00
0:00
5:15 25 15:45 0:07Slow10:30
0:00
against 0:00
15:45 25 16:45 0:00planning
1:00 ST 0:00
0:00
16:46 25 17:42 0:01
0:56
0:00
0:00
18:10 25 18:50 0:28
0:40
1:38 － 0:02
18:49 25 19:50 #####
1:01
1:37 － 0:13
20:10 25 20:35 0:20
0:25
1:08
0:13
20:56 25 21:23 0:21
0:27
5:18
0:03
22:57 25 23:40 1:34
0:43
4:38
0:43
0:20 26
1:16 0:40
0:56
5:19
0:41
1:20 26
2:04 0:04
0:44
5:56
0:30
－
4:30 26
5:41 2:26
1:11
4:00
0:11
6:00 26
6:15 0:19
0:15
3:30
0:05
Delayed actual
6:15 26
6:20 0:00
0:05
3:35
0:02
results
input－
10:46 26 12:18 4:26
1:32
0:42
0:05
againstplanning－
14:30 26 14:55 2:12
0:25
1:26
0:05
－
－
15:44 26 16:13 0:49
0:29
2:10
0:27
－
16:14 26 16:20 0:01
0:06
2:38
0:04

27

3. PERIPHERY SYSTEM* Establishing Sub-System in Order to Operate Scheduling
System

3.1 Actual data input, using a wireless handy terminal
3.2 ID label printing
3.3 Recipe control system28

3. PERIPHERYSYSTEM

3.1 INPUTTING ACTUAL DATA (INPUT BARCODE),USING A WIRELESS HANDY TERMINALPURPOSE:- Improve the accuracy of scheduling system, by inputting the actual
data into AS/400 in a timely manner.
- Implement accurate and easy input processing through the adoptionof barcodes and the input of actual results in system time(promoting the input of the whole manufacturing processes)- Provides the person in charge of operation (i.e., operator) with theoperational procedures as well as the recipe information in orderto prevent operational mistakes.

OUTLINE:- Connection is made with AS/400 online terminal, in order tosynchronize with the actual results input currently in use.
- Introduces a portable type wireless “handy terminal” equipped witha barcode reader.

29

3. PERIPHERYSYSTEMOUTLINE FLOW DIAGRAM FOR HANDYTERMINAL (HT) INPUT SYSTEM
INPUT

MANU
FACT
URING
PROCESSTO NEXT MANUFACTUINGPROCESSCOMPLETION

EQUIP. NO.

TAG

TAG

EQUIP. NO.
ORDER NO.

ORDER NO.

STAFF NO.

READ BARCODE

RECIPE INPUTHTREAD BARCODE
INPUT CHECKCOMPLETED ACTUALRESULT INFO.

HTRECIPE DISPLAYWIRELESSWIRELESSRECIPE NO.
ACTUAL INPUT RESULT INFO

ＡＳ／４００RECIPE NO.
MODEL:EQUIP.:RECIPE NO.

30

3.PERIPHERY SYSTEM

3.2 ID LABEL ISSUING SYSTEM
Purpose- Inputting of the actual results of manufacturing processes in atimely manner- Prevention of mistakes such as mixing up lot cards and the actual
item

Outline- Replaces the ID label number on carrier cases that travel
between manufacturing processes with an automated output
sheet, complete with bar codes- Links the ID label with a lot card by displaying the last 4 digits oforder numbers- Simultaneously processes the ID label upon the output of a lot
card

31

3.PERIPHERY SYSTEMOUTLINE OF FLOW DIAGRAM FOR
ID LABEL ISSUING SYSTEM
Receiving
accepted

Receivinginspection
Cut paper printerLot card

Affix

Label printerTag

Manufacturing
Process

ID label

Image of ID label

32

3.PERIPHERY SYSTEMID Label

ID label and HT

33

3.PERIPHERY SYSTEM

3.3 RECIPE MANAGEMENT SYSTEM

Purpose– Avoids mistakes in inputting the recipe during the manufacturing
processing operations and thus improves the yield ratio– The database of recipes will be compiled and utilized for speeding up
various recipe outputs (i.e., screen/ledger sheet) as well as for therecipe output system of equipment which is under planning

Outline– Establishes data base on host machine (AS400)– Utilizes the data based recipe data for recipe output screen at HT, alot card, etc.

34

3.PERIPHERY SYSTEMOUTLINE OF BUSINESS FLOW DIAGRAM FOR
RECIPE MANAGEMENT
Shared server
Process
condition table（EXCEL)PC
Already
approved

Selection/execution screen of
EXCEL data of “Process
Condition Sheet” thatneed registration

Ready-to-input data
EXCEL data

Check
LIST

Operated by division’s personnel in charge
AS/400Item master
Manufacturing
order master
Manufacturing
process master
Equipment
masterRecipemasterRecipedisplay35

3.PERIPHERY SYSTEM

RECIPE SCREEN（ACTUAL EXAMPLE）

Input: Taro Maikuro
Manufacturing
process name

Order No.: M1193619A
Laser markEquipment
nameLaser mark: WLP#1

RecipeZZZZ_YYY123BC
Seal spec. : 10-0-4-

Specialinstructions

9869
F1:UP F3:BK F4:CHG

36

4.SYSTEM ISSUES• Improvement planning accuracy– More accurate scheduling can be obtained through theregistration of human resources (i.e., operator skill)• Expanding to other products– This scheduling system provides both the flexibility andspeed required for sales order driven production

37

5.WRAP UP■Tips for utilization of ASPROVA-Clearly specify the purpose of the scheduling system-Set up scheduling to fit company’s own production (in this case: sales order
based production, complex manufacturing processes)-Strike a balance between detail of master table, and accuracy of the resulting
schedule■Linking to process management system-Avoids inputting master twice-Ensures consistency with ASPROVA by keeping information in astandard format-Requires immediate input of all available results data

■Utilizing schedule information-Favor a work instructions sheet over a Gantt chart at the shop floor-Narrow down what you want in order to gain effective results-Use the scheduling system to further improve manufacturing processes

38

WLP manufacturing process

Completedproduct

39