The 2nd Workshop on Standardization forMicromachines / MST / MEMS in Tokyo
During the morning session, the workshop reviewed
activities following the 1 st Workshop, including
standardization activities in the U.S., Germany, and Japan,and discussed future activities leading up to the 3rdWorkshop. Dr. Kuniki Owada, joined as a special
participant in this workshop, reported that a technicalreport issued by the Micromachine Center in 1998 called"Technical Terms in Micromachine Technology" (220words) had been proposed to the IEC/TC47. Serving as amember of the IEC/TC47/WG4, Dr. Owada had worked on
this proposal under commission by the Japanese IndustrialStandards Committee. Takashima, Associate professor ofTokyo Institute of Technology, presented the developmentof a fatigue testing machine and results of fatigue tests
conducted on cantilever type specimens. The
Micromachine Center has proposed this machine to theMETI as an item for standardization to follow the thin film
tensile tests.
In the afternoon session they had presentations anddiscussions on RRT performed under the NEDO projectcalled "standardization of evaluation method of properties
for micromachine materials" which developed original
testing machines for thin film materials and standard
specimen of these materials ended in March last year.
A total of twenty-four people participated, including
above workshop members and representatives from three
universities, three makers, and the National Institute of
AIST (Advanced Industrial Science and Technology) who
involved in RRT, as well as the Japanese Standards
Association, which is preparing international
standardization of RRT. The participants agreed tosupport activities related to IEC terminology and tosupport such projects as world RRT proposed by U.S.
delegate on thin film residual stress tests. They concluded
to hold the 3rd Workshop on Standardization at NIST inWashington, U.S.A. in March 2003.

In addition to performing advanced research,
Micromachine Center is working to achieve international
standardization. So far the Micromachine Center has beenstudied in two areas: One is to establish unified technicalterminology able to commonly use among various fields,
because the micromachine is multidisciplinary system.
And the other is "Standardization of measurement andevaluation methods of Micromachine" to compare thefunctions of newly developed micro-devices.
Micromachine Center summarized these studies intechnical reports. And the Center aims to propose thesereports as international standard to internationalorganization as contributions from Japan to the world. Forachieving these and the international harmonization,
Micromachine Center established on-line International
Standardization Forum that exchanges opinions over theinter-net and is operating since 1998. The Forumoccasionally hold face-to-face meeting such as the 2ndWorkshop on Standardization held recently in Tokyo.
The 2nd Workshop on Standardization for Micromachine /MST / MEMS was held at Tokyo Metropolitan Small Business
Promotion Agency on July 23, 2002, with Hisayoshi Sato,
Professor of Chuo University, serving as chairperson.
The 2 nd Workshop was scheduled to be held inWashington D.C. in October 2001, according to theagreement at the 1st Workshop on Standardization held inLondon in March 2001. However, this Workshop waspostponed due to the terrorist attacks that occurred in
New York and Washington D.C. on September 11, justprior to this date. It was decided that the 2nd Workshopon Standardization would be held in Tokyo in conjunction
with presentations regarding RRT (Round Robin Test) on
thin film specimens, which is planning to propose tointernational organization as world standards byMicromachine Center. Thirteen people, including four
from overseas, joined in this workshop.

The 2nd Workshop on Standardization forMicromachine/MST/MEMS

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