Patent
Right

Date
Case number

March 7, 2023
2022 (Gyo-Ke) 10001

Court

Intellectual Property
High Court, Fourth
Division- A case in which, the emergence conditions of the GSR phenomenon on which the"GSR magnetic sensor" of the Invention is based are: [i] use of a magnetic wire
having a surface magnetic domain with a circumferential-direction spin array on thesurface; [ii] a frequency of a pulse current conducting this magnetic wire is 0.5 GHz
to 4.0 GHz; and [iii] the pulse current is equal to or larger than a current intensity
required to generate a circumferential-direction magnetic field at 1.5 times or morean anisotropic magnetic field on a wire surface; [iv] the "GSR sensor" of theInvention takes out only a magnetization change in an axial direction of the wirecaused by the GSR phenomenon emerging in [i] to [iii] as a coil output voltage anddetects an external magnetic field by using equation (1), but the violation of thedescription requirement asserted by the Plaintiff is based on the assertion that thediscrimination from MI phenomenon on which the MI sensor is based cannot be madewithout understanding these four matters (the Matters) as one technical idea, or isonly impugnment by raising defects in the description of the Description and the likenot on the grounds of normal understanding of a person ordinarily skilled in the art,
and they are both groundless.
Case type: Rescission of Trial Decision
Result: Dismissed
References: Article 36, paragraph (4), item (i), paragraph (6), item (i), item (ii) of the
Patent Act
Related rights, etc.: Invalidation Trial No. 2020-800007, Patent No. 5839527
Summary of the Judgment
No. 1
1Outline of the case
Outline of procedures at the JPO and the like(1) The Defendant filed a patent application (Patent Application No. 2015-27092,
hereinafter, referred to as "the Application") of the invention titled "micro magnetic
sensor with super high sensitivity" on February 16, 2015, and received registration of
establishment of the patent right (Patent No. 5839527) on November 20 of the same
year, but upon the Plaintiff's request for a trial for invalidation of the patent(Invalidation Trial No. 2018-800119, lack of inventive step as the grounds forinvalidation), the Defendant made a request for correction (primary correction) withclaims 1 to 8 in the scope of claims of the Patent as a group of claims.
The Japan Patent Office approved the primary correction on September 24, 2019,
and then rendered the JPO decision that "the request for the trial regarding claims 1, 3
to 8 is not established.

The request for the trial regarding claim 2 shall be dismissed"

and the decision was made final and binding on November 5 of the same year.

i(2) The Plaintiff made a request for patent invalidation trial (Invalidation Trial No.
2020-800007 case) regarding the Patent on January 31, 2020, on the grounds ofviolation of the clarity requirement, violation of the support requirement, and violationof the enablement requirement.
The Defendant made a request for correction to correct (the Correction) claims 1, 3
to 8 in the scope of claims of the Patent to a group of claims as of April 16, 2020 and
submitted the written correction to the effect that claim 8 shall be corrected separatelyfrom the other group of claims in the Correction on May 28, 2021.
The Japan Patent Office approved the correction to delete claim 8 in the Correction
but did not approve the correction other than that, and rendered the decision ("theDecision") on the Patent No. 5839527 that "The request for a trial for the invention
according to claims 1, 3 to 7 is not established.

The request for a trial for the invention

according to claim 8 shall be dismissed." on November 25, 2021.
(3) The Plaintiff filed the lawsuit for rescission of the Decision with erroneous
determination on the violation of the support requirement, erroneous determination on
the violation of the enablement requirement, and erroneous determination on theviolation of the clarity requirement as grounds for rescission.
No. 2

Gist of determination

1(1) The Plaintiff asserted that the Invention violates each of the description
requirements on the premise that "the super high-speed spin rotation phenomenon"(GSR phenomenon) on which the GSR sensor of the Invention is based cannot be
discriminated from the MI phenomenon on which the MI sensor is based.
However, the emergence conditions of the GSR phenomenon on which the "GSR
magnetic sensor" of the Invention is based are: [i] use of a magnetic wire having asurface magnetic domain with a circumferential-direction spin array on the surface; [ii]a frequency of a pulse current conducting this magnetic wire is 0.5 GHz to 4.0 GHz;and [iii] the pulse current is equal to or larger than a current intensity required togenerate a circumferential-direction magnetic field at 1.5 times or more an anisotropic
magnetic field on a wire surface, and the "GSR sensor" of the Invention takes out only
the magnetization change in the wire axial direction caused by the GSR phenomenon
emerging by [i] to [iii] as a coil output voltage and detects the external magnetic field
by using equation (1) (that is, the four matters (the Matters) approved by the Decision.)and in view of the disclosed matters in the Description as above, the Invention is foundto be the invention described in the detailed description of the invention of the
Description.
(2) The Plaintiff asserted that, in the matters considered to be the emergenceiiconditions of the "GSR emergence phenomenon", [i] and [iii] are matters in common
also in the MI phenomenon on which the MI sensor is based, but since the Invention is
the invention for which the Matters in [i] to [iv] are one of the technical premises,
assertion that only a part of them is in common should be considered unreasonable.
Note that there is insufficient evidence to find that the MI sensor has all these fourmatters.
Moreover, the Plaintiff asserted that, by citing close resemblance between Fig. 3(Fig. 3-a) illustrating the relationship of the sinusoidal function in the Description and
Fig. 4 in Exhibit Ko 12 document, it shows that an output by which the relationship of
the sinusoidal function can be clearly recognized was acquired also in the MI sensor,
which is a prior art, but there is no description or suggestion on the relationship between
the coil output and the external magnetic field indicating the sinusoidal function
relationship in Exhibit Ko 12 document pointed out by the Plaintiff, or, to the contrary,
regarding the MI sensor, the proportional relationship between the coil output and theexternal magnetic field has been clarified theoretically and experimentally, and thePlaintiff's assertion above lacks reasoning and has no grounds.
(3) As the result of the progress of research, from the viewpoint of natural science,even if it will be found out that the GSR phenomenon is an "extension" of the MI
phenomenon based on the MI sensor, it has no relation with patentability in a point of
whether it is the effect that can be discriminated from the prior art in a sense of thenatural science, but rather, if the improvement of the prior art is the technical idea thata person ordinarily skilled in the art could not have easily conceived of, a patent would
be granted thereto, and in terms of the description requirement, the problems are: [i]the invention is described in the detailed description of the invention, and whether the
problem is solved by the description in the detailed description of the invention (support
requirement); [ii] whether a person ordinarily skilled in the art could work it without
excessive trials and errors on the basis of the matters described in the detailed
description of the invention (enablement requirement); [iii] whether the description in
the scope of claims can be considered to be sufficiently unclear to bring an unexpecteddisadvantage to a third party even on the basis of the description and the like andcommon general technical knowledge (clarity requirement), and whether the mattersdescribed in the invention can be discriminated from the prior art from the viewpointsof effects and the natural science does not matter.
2

The Plaintiff asserted various defects in the description requirements , but they

are based on the assertion that the Invention cannot be discriminated from the MI
phenomenon on which the MI sensor is based without understanding the four mattersiii

(the Matters) approved by the Decision as one technical idea, or are an impugnment byraising the defects in the description in the Description and the like not on the groundsof the normal understanding of a person ordinarily skilled in the art, and they are both
groundless.

iv

Judgment rendered on March 7, 2023
2022 (Gyo-Ke) 10001 A Case of seeking rescission of the JPO decision
Date of conclusion of oral argument: December 21, 2022
Judgment
Plaintiff: Aichi Steel Corporation
Defendant: MagneDesign Corporation
Main text
1. The Plaintiff's claim shall be dismissed.
2. The Plaintiff shall bear the court costs.
Fact and reason
No. 1

Claim
The court shall rescind the part related to claims 1, and 3 to 7 of Japanese Patent

No. 5839527 in the decision issued by the Japan Patent Office (JPO) on November 25,
2021 with regard to the case of Invalidation Trial No. 2020-800007.
No. 2

Background

1. Outline of procedures, etc. at the JPO (undisputed by the parties)(1) The Defendant filed a patent application (Japanese Patent Application No.
2015-27092, hereinafter, referred to as the "Present Application") of the invention titled"MICRO MAGNETIC SENSOR WITH SUPER HIGH SENSITIVITY" on February 16,
2015 and was granted registration of establishment of the patent right on November 20of the same year (Patent No. 5839527, number of claims: 8, hereinafter, this patent shallbe referred to as the "Present Patent").
(2) A. The Plaintiff made a request for a trial for invalidation of the patent (thecase of Invalidation Trial No. 2018-800119) on September 27, 2018, regarding the
Present Patent, on the grounds of lack of inventive step over the invention (hereinafter,
referred to as the "Exhibit Ko 1 Invention") described in the Japanese Unexamined
Patent Application Publication No. 2006-300906 (Exhibit Otsu 18), which is a
publication distributed before the date of filing of this case or the invention (hereinafter,
referred to as the "Exhibit Ko 4 Invention") described in International Publication No.
WO2010/097932 (Exhibit Ko 15) as the primary cited references.

1

B. The Defendant made a request for correction for correcting claims 1 to 8 in
the Scope of Claims of the Present Patent as a group of claims on December 25, 2018
(hereinafter, referred to as the "Primary Correction").
After that, the Japan Patent Office approved the primary correction on September
24, 2019, and then rendered the JPO decision that "the request for the trial regarding
claims 1, and 3 to 8 is not established.
be dismissed."

The request for the trial regarding claim 2 shall(Hereinafter, referred to as the "Primary Decision") and the decision

was made final and binding on November 5 of the same year.
C. The gist of the Primary Decision related to the invention described in claim 1
after the primary correction (hereinafter, referred to as "Corrected Invention 1".) is asfollows (though the determination part with the Exhibit Ko 1 Invention as the primarycited reference will be described, but the determination with the same gist was madealso for the determination with the Exhibit Ko 4 Invention as the primary cited reference.
(A) In Corrected Invention 1, the magnetic wire "is constituted by having a 2 phase magnetic domain structure of a surface magnetic domain having acircumferential-direction spin alignment and a center-part core magnetic domain having
a spin alignment in an axial direction", a pulse current passed through the magnetic
wire has "the frequency from 0.5 GHz to 4.0 GHz and a current intensity required togenerate a circumferential-direction magnetic field of 1.5 times or more of theanisotropic magnetic field or more on the wire surface", and "means for converting thecoil voltage to an external magnetic field H" is provided, in which by "causing the pulse
current to be passed through the magnetic wire, the circumferential-direction spins
inclined in an axial direction by the magnetic field in a wire axial direction within thesurface magnetic domain are simultaneously rotated at a super high speed, only amagnetization change in the axial direction of the wire by the super high-speed spinrotation phenomenon generated at that time is taken out as a coil output and is converted
to a magnetic field H by using relational expression (1)", while in the Exhibit Ko 1
Invention, it is not clear whether or not the magnetic wire "is constituted by having a
2-phase magnetic domain structure", it is not specified that the frequency of the pulse
current passed through the magnetic wire is "50 MHz or more" and "0.5 GHz to 4.0
GHz", it is not specified that the pulse current has "a current intensity required togenerate a circumferential-direction magnetic field of 1.5 times or more of theanisotropic magnetic field or more on the wire surface", it is not specified that, by"causing the pulse current to be passed through the magnetic wire, the circumferentialdirection spins inclined in an axial direction by the magnetic field in a wire axial
direction within the surface magnetic domain are simultaneously rotated at a super high2

speed, specified that only a magnetization change in the axial direction of the wire by
the super high-speed spin rotation phenomenon generated at that time is taken out as acoil output", or it is not clear whether or not the "means for converting the coil voltage
to an external magnetic field H" is provided, either, which are differences (Difference
1).
(B) In Corrected Invention 1, the matter that the magnetic wire "is constituted byhaving a 2-phase magnetic domain structure of a surface magnetic domain having acircumferential-direction spin alignment and a center-part core magnetic domain having
a spin alignment in an axial direction", the matter that a pulse current passed throughthe magnetic wire has "the frequency from 0.5 GHz to 4.0 GHz", the matter that thepulse current has "a current intensity required to generate a circumferential -direction
magnetic field of 1.5 times or more of the anisotropic magnetic field on the wire
surface", and the matter that, by "causing the pulse current to be passed through themagnetic wire, the circumferential-direction spins inclined in an axial direction by themagnetic field in a wire axial direction within the surface magnetic domain are
simultaneously rotated at a super high speed, only a magnetization change in the axial
direction of the wire by the super high-speed spin rotation phenomenon generated atthat time is taken out as a coil output and is converted to a magnetic field H by using
relational expression (1)" are understood that, the new "super high-speed spin rotation
phenomenon" emerges only after all of them are combined, which can be caused tofunction as a magnetic sensor by detecting that.

Thus, in comparison between

Corrected Invention 1 based on such "super high-speed spin rotation phenomenon" andthe Exhibit Ko 1 Invention, which is a conventional "MI sensor", the aforementioned
four matters are considered to be integrated.

However, the emergence of the new"super high-speed spin rotation phenomenon" by combining the aforementioned fourmatters, which is caused to function as the magnetic sensor by detecting that, is notdescribed or suggested in each of the cited documents submitted by the Plaintiff, and it
cannot be considered to be a matter of common general technical knowledge before thePresent Application.
Particularly, each of the aforementioned cited documents fails to set thefrequency specifically to a range from "0.5 GHz to 4.0 GHz" or fails to describe orsuggest that the magnetic wire "is constituted by having a 2-phase magnetic domain
structure of a surface magnetic domain having a circumferential-direction spinalignment and a center-part core magnetic domain having a spin alignment in an axial
direction", that the pulse current has "a current intensity required to generate acircumferential-direction magnetic field of 1.5 times or more of the anisotropic3

magnetic field or more on the wire surface", and that, by "causing the pulse current tobe passed through the magnetic wire, the circumferential-direction spins inclined in anaxial direction by the magnetic field in a wire axial direction within the surface
magnetic domain are simultaneously rotated at a super high speed, only a magnetization
change in the axial direction of the wire by the super high-speed spin rotation
phenomenon generated at that time is taken out as a coil output and is converted to amagnetic field H by using relational expression (1)" and moreover, in the
aforementioned four matters, some of the cited documents are found to disclose thematter that the magnetic wire "is constituted by having a 2-phase magnetic domain
structure of a surface magnetic domain having a circumferential-direction spinalignment and a center-part core magnetic domain having a spin alignment in an axial
direction", but the other matters are not disclosed.

Moreover, although one of the cited

documents discloses the matter that "the higher the passed current value, the higher thesensitivity" in relation with the matter that the pulse current has "a current intensity
required to generate a circumferential-direction magnetic field of 1.5 times or more of
the anisotropic magnetic field on the wire surface", the other matters are not disclosed.
It is to be noted that, as asserted by the Claimant (Plaintiff), the possibility that"the 'new phenomenon GSR effect' referred to by the Claimee is a phenomenon
positioned on an extension of the conventional MI effect" cannot be denied, but even if
the aforementioned four matters are not integrated but can be discussed individually, atleast the matter on "converted to a magnetic field H by using relational expression (1)"in the four matters is not disclosed in any of the cited documents.
(C) In the coil-detection type MI sensor as the Exhibit Ko 1 Invention, it is
widely known that a detected voltage by the coil is proportional to an external magnetic
field, but in this type of the sensor, to create a "calibration curve" of a sine function or
to enlarge "the measurement range to a region out of linear approximation" is notsuggested from the Exhibit Ko 1 Invention or any of the cited documents.

Moreover,although Fig. 4 in the Japanese Unexamined Patent Application Publication No. 2010 256109 gazette (Exhibit Ko 12) shows a shape close to the sine function, there is no
description that this is the sine function, and it cannot be considered that "presence ofa sine function relation between an applied magnetic field and a sensor output voltage
is suggested".

In the first place, not only that the "relational expression (1)" inCorrected Invention 1 simply includes a sine function but more specifically, it isspecified as a mathematical formula in which a "pulse frequency f" is multiplied by asine function including the "external magnetic field H" and the "external magnetic-field4

intensity Hm when the coil output voltage takes a maximum value" as arguments, andsuch "relational expression (1)" is not suggested from any of the cited documents.
(D) Therefore, the configuration of Corrected Invention 1 related to Difference
1 could not have been easily conceived of by a person ordinarily skilled in the art on
the basis of the technical matters described in the Exhibit Ko 1 Invention and the Cited
Document.
(3) The Plaintiff made a request for a patent invalidation trial (Invalidation Trial
No. 2020-800007 case) for the Present Patent on January 31, 2020 on the grounds ofviolation of the clarity requirement, violation of the support requirement, and violationof the enablement requirement.
The Defendant made a request for correction to correct claims 1, and 3 to 8 in
the Scope of Claims of the Present Patent as a group of claims (hereinafter, referred toas the "Present Correction") on April 16, 2020, and submitted the written correction to
the effect that claim 8 shall be corrected separately from another group of claims in the
Present Correction on May 28, 2021.
After that, the Japan Patent Office approved the correction to delete claim 8 in
the Present Correction but did not approve the correction other than that, and rendered
the decision on the Patent No. 5839527 that "The request for a trial for the invention
according to claims 1, and 3 to 7 is not established.

The request for a trial for theinvention according to claim 8 shall be dismissed." (hereinafter, referred to as the "JPO
Decision") on November 25, 2021, and a copy of the decision was served to the Plaintiff
on December 6 of the same year.
(4) The Plaintiff filed the lawsuit for rescission of the part related to claims 1,
and 3 to 7 in the Present Decision on January 4, 2022.
2. Description in the Scope of Claims
In the Present Correction, the correction to delete claim 8 was approved, but theother corrections were not approved and thus, the description in the Scope of Claims of
the Present Patent is constituted by claims 1 to 7 corrected by the primary c orrection(however, claim 2 is deleted) and claim 8 after the Present Correction (however,deleted), and the description in claims 1, and 3 to 7 is as follows (hereinafter, in
accordance with the numbers of claims, the invention according to claim 1 is ref erred
to as "Present Invention 1" and the like, and Present Inventions 1, and 3 to 7 arecollectively referred to as the "Present Invention").
[Claim 1]
A micro magnetic sensor with super high sensitivity comprising a magnetic-field
detection element in which a magnetic wire for detecting a magnetic field having
5

conductivity, a circumferential coil wound around it, two electrodes for wire conduction,and two electrodes for coil voltage detection installed on a board, means for causing apulse current to pass through the magnetic wire, a circuit for detecting a coil voltage
generated when the pulse current is caused to pass, and means for converting a coilvoltage to an external magnetic field H, wherein
the magnetic wire has an anisotropic magnetic field of 10 G or less and has a 2phase magnetic domain structure of a surface magnetic domain having acircumferential-direction spin alignment and a center-part core magnetic domain having
a spin alignment in an axial direction;
the pulse current passed through the magnetic wire has the frequency of 0.5 GHz
to 4.0 GHz and a current intensity required to generate a circumferential -direction
magnetic field of 1.5 times or more of the anisotropic magnetic field on the wire surface,
the coil has a coil pitch of 10 μm or less and a coil inner diameter of 25 μm orless, and by causing the pulse current to pass through the magnetic wire, thecircumferential-direction spins inclined in an axial direction by a magnetic field in awire axial direction in the surface magnetic domain are simultaneously rotated at asuper high speed, only a magnetization change in the axial direction of the wire by asuper high-speed spin rotation phenomenon generated at that time is taken out as a coiloutput and is converted to the magnetic field H by using relational expression (1):
Vs=Vo·L·πD·p·Nc·f·sin(πH/2Hm) ... (1)where Vs is a coil output voltage, Vo is a proportional constant, and as control factor
constants, L is a length of the wire, D is a diameter of the wire, p is a skin depth of thepulse current, Nc is a coil winding number, f is a pulse frequency, and Hm is an external
magnetic-field intensity at which the coil output voltage takes a maximum value.
[Claim 3]
The micro magnetic sensor with super high sensitivity according to claim 1,
whereina pair of or a plurality of pairs consisting of a detection element of a right-handed
coil and a detection element of a left-handed coil are installed on a board, two electrodes
for wire conduction and a wire terminal are connected so that the pulse current flows in
opposite directions through the left-handed coil and the right-handed coil, and twoelectrodes for coil voltage detection and a coil terminal are connected so that, when thepulse current is passed through the wire, the output voltages of the right-handed coiland the left-handed coil proportional to the external magnetic field have the same sign,and the output voltage generated by the circumferential-direction magnetic field createdby the pulse conduction when the external magnetic field is zero has a different sign.
6[Claim 4]
The micro magnetic sensor with super high sensitivity according to claim 1,
whereina pair consisting of a first coil, which is a left-handed coil, and a second coil,which is a right-handed coil, are mounted on one piece of the magnetic wire on theboard by being directed to a direction in which the pulse current flows;a first coil terminal and a second coil terminal are provided directed to a direction
from which the pulse current flows in each of the first coil and the second coil;the first coil terminal of the first coil and the first coil terminal of the second coil
are connected;
a coil output electrode and the second coil terminal of the first coil are connected
and a coil ground electrode and the second coil terminal of the second coil areconnected;
the first coil terminals of the first coil and the second coil and the second coilterminals of the first coil and the second coil are disposed on respective sides of themagnetic wire; anda wiring from the coil output electrode to the second coil terminal of the first coilcrosses a wiring from the coil ground electrode to the second coil terminal of the second
coil.
[Claim 5]
The micro magnetic sensor with super high sensitivity according t o claim 1,
whereintwo pieces of the magnetic wires on the board are connected in parallel anddisposed such that the pulse currents flow in directions opposite to each other;a pair consisting of the first coil, which is the left-handed coil, and the second
coil, which is the right-handed coil, are mounted on one piece of the magnetic wire,
directed toward the direction from which the pulse current flows;a pair consisting of a third coil, which is the left-handed coil, and a fourth coil,which is the right-handed coil, are mounted on the other of the magnetic wire, directed
toward the direction from which the pulse current flows;on each of the first coil, the second coil, the third coil, and the fourth coil, toward
the direction from which the pulse current flows, the first coil terminal and the second
coil terminal are provided, connection between the coil terminals of the coil is disposed
between two pieces of the magnetic wires, the first coil terminal of the first coil and thesecond coil terminal of the fourth coil are connected, the first coil terminal of the fourthcoil and the first coil terminal of the second coil are connected, and the second coil7

terminal of the first coil and the second coil terminal of the third coil are connected;
andelectrodes connected to the coil terminals of the coils are disposed on both sidesof the two pieces of the magnetic wires, and the wiring from the coil output electrodeto the first coil terminal of the third coil crosses the wiring from the coil groundelectrode to the second coil terminal of the second coil between the two pieces of themagnetic wires.
[Claim 6]
The micro magnetic sensor with super high sensitivity according to any one ofclaims 1, and 3 to 5, whereinby using a programing arithmetic-operation electronic circuit or means forsoftware program arithmetic-operation, a coil induced voltage at a magnetic field zerois subtracted from a measurement value of a coil voltage in the magnetic field H.
[Claim 7]
The micro magnetic sensor with super high sensitivity according to any one ofclaims 1, and 3 to 6, further comprising:means for correcting an influence of a temperature to Vs using an incorporated
temperature sensor and a temperature-dependence correction program.
3. Gist of the JPO Decision (However, limited to the matters related to the grounds forrescission in note 4)(1) Present Invention
A. The Present Invention has a main point that it was experimentally found that,when a pulse current with a pulse rise of a gigahertz order at a predetermined intensity
is caused to pass through a magnetic wire having a predetermined anisotropic magnetic
field and a 2-phase magnetic domain structure (surface magnetic domain in acircumferential direction and a core magnetic domain in an axial direction), a detectedvoltage changes as a sine function with a change in an external magnetic field, and amagnetic sensor is constituted by using the experimental expression (formula (1)) for
measurement of the external magnetic field.
The super high-speed spin rotation phenomenon (GSR phenomenon) and anelectromagnetic phenomenon (MI phenomenon) in which magnetic impedance of thewire is drastically changed have different operation principles; that is, the MI
phenomenon emerges at the frequency of 1 MHz to 30 MHz and is caused by vibrationof a 90-degree magnetic domain wall existing at a boundary between the surface
magnetic domain and the core magnetic domain, while the GSR phenomenon is8generated at 0.5 GHz to 4 GHz and is caused by the spin rotation in the surface magnetic
domain.
In the Present Invention, the statement that the sinusoidal relation of relational
expression (1) is derived from the "super high-speed spin rotation phenomenon" and isdifferent in principle from the conventional MI phenomenon in principle is a hypothesis(hereinafter, referred to as the "GSR hypothesis") in a strict meaning, and such a
possibility cannot be excluded that the validity of the GSR hypothesis would depend on
future studies in the field.

But in addition to international evaluation such as

publication on peer-reviewed papers and invited lectures in international conferences,by considering that the Claimant (Plaintiff) does not explicitly dispute existence itselfof the phenomenon called the "super high-speed spin rotation phenomenon (GSR
phenomenon)", it is reasonable that the contents theoretically explaining the Present
Invention on the basis of the GSR hypothesis in the Description and the drawings of the
Present Patent should be treated to be correct at present.
B. The constitutions that make the sensor using the GSR phenomenon (GSR
sensor) of the Present Invention substantive as compared with the prior art of the MI
sensor are the four matters of the following [i] to [iv] (hereinafter, referred to as the"Present Matters"), and theoretical sides related to these matters should be considered
to be correctly explained at present, and presence/absence of the invalidation reason
should be examined on the basis of that.
[i] The matter that the magnetic wire is "constituted by having a 2-phase magnetic
domain structure of a surface magnetic domain having a circumferential-direction spinalignment and a center-part core magnetic domain having a spin alignment in an axial
direction"[ii] The matter that the pulse current "with the frequency of 0.5 GHz to 4.0 GHz" iscaused to pass through the magnetic wire[iii] The matter that the pulse current has "a current intensity required to generate acircumferential-direction magnetic field of 1.5 times or more of the anisotropic
magnetic field on the wire surface"[iv] The matter that "by causing the pulse current to be passed through the magnetic
wire, the circumferential-direction spins inclined in an axial direction by the magnetic
field in a wire axial direction within the surface magnetic domain are simultaneously
rotated at a super high speed, only a magnetization change in the axial direction of thewire by the super high-speed spin rotation phenomenon generated at that time is takenout as a coil output and is converted to a magnetic field H by using relational expression(1)"9

(2) Invalidation Reason 1 (violation of support requirement)
A. Criteria
In order to satisfy the support requirement, it is only necessary that a person
ordinarily skilled in the art who contacted the Description can rationally recognize thatthe invention for which a patent was claimed is described in the Description, andmoreover, regarding solution of the problem, the description only needs to have such a
degree that rational expectation can be obtained that a person ordinarily skilled in theart could solve the problem also on the basis of a common general technical knowledge,
and it is interpreted that a description to such a degree that reaches strictly scientificverification is not needed.

That is because, since the support requirement is derived

from the essence of the patent system which grants a patent right at the cost of
publication of an invention, if replication studies or analyses by a person ordinarily
skilled in the art who contacted the Description can contribute to further developmentof the art, a purpose of imposition of the support requirement can be achieved to somedegree.

Moreover, by considering that the Description is prepared under time pressureof the first-to-file principle, it is not reasonable to require the described contents to be
demonstrated with strictness required in scientific theses.
B. Invalidation Reason 1-1(A) Assertion by Claimant (Plaintiff)
The description "the magnetic wire" in the description that "the magnetic wire
has an anisotropic magnetic field of 10 G or less" in claim 1 is interpreted to refer to amagnetic wire installed on a board from the description that a "magnetic-field detection
element in which a magnetic wire for detecting a magnetic field having conductivity
and ... installed on a board" before that.

However, the Detailed Description of theInvention does not disclose the constitution that the magnetic wire installed on the board
has an anisotropic magnetic field of 10 G or less.
(B) Determination
It is a common matter of general technical knowledge that the anisotropic
magnetic field of the magnetic wire has a characteristic value which drastically changes
depending on a length of a wire, and when the length is shortened, a demagnetizing
factor becomes larger and thus, the anisotropic magnetic field increases (hereinafter,
referred to as "common general technical knowledge A").
On the basis of the descriptions in [0034], [0036], [0059], and the like in the
Description attached to the application at filing of this case (hereinafter, referred to as
the "Present Description" including the drawings), the "anisotropic magnetic field" inthe description that "a current intensity required to generate a circumferential -direction
10

magnetic field of 1.5 times or more of the anisotropic magnetic field on the wire
surface" in the description in claim 1 means the "anisotropic magnetic field of a wire ina state installed on the board".

However, the "anisotropic magnetic field" in thedescription that "the magnetic wire has an anisotropic magnetic field of 10 G or less"in the description in claim 1 is a characteristic of the material, and it obviously means"the "anisotropic magnetic field" of a wire in a sufficiently long state".
Therefore, it is found that the constitution of the magnetic wire having (ananisotropic magnetic field as a physical property value in a sufficiently long state) wit h
10 G or less is described in the Detailed Description of the Invention in the Descriptionof the Present Patent.
C. Invalidation Reason 1-2(A) Assertion by Claimant (Plaintiff)
It is interpreted that Claim 1 does not mean that the phenomenon slightly
including a phenomenon other than the magnetization change in the axial direction by
the super high-speed spin rotation phenomenon is taken out; that is, only themagnetization change in the axial direction is substantially taken out but means that thephenomenon not including the phenomenon other than the magnetization change in theaxial direction by the super high-speed spin rotation phenomenon at all is taken out;that is, means as the wording itself that "only the magnetization change in the axial
direction of the wire by the super high-speed rotation phenomenon generated at thattime is genuinely taken out as a coil output".
However, Detailed Description of the Invention of the Present Patent does not
specifically describe means or a method of "genuinely taking out only the magnetization
change in the axial direction of the wire by the super high-speed rotation phenomenon
generated at that time as a coil output", or it cannot be considered such means or method
was a matter of common general technical knowledge.

Thus, Present Invention 1 does

not describe that the problem of the invention can be solved in the Detailed Descriptionof the Invention so that a person ordinarily skilled in the art can recognize it and thedescription exceeds a range described in the Detailed Description of the Invention.
The coil voltage which genuinely detected only the "magnetization change" isunderstood to include only the voltage caused by the "magnetization change" andcannot be understood in a meaning other than that.

Since the voltage caused by the"magnetization change" and the voltage caused by a thermal noise are different, the coilvoltage including only the voltage caused by the "magnetization change" is understood
not to include the voltage caused by the thermal noise, or cannot be understood inmeaning other than that, it can be only understood that an expression that only the11magnetization change as a signal is detected contradicts the inclusion of the thermal
noise as a noise in the output voltage.
(B) Determination
The "thermal noise" is a noise generated by irregular thermal vibration ofelectrons in a substance, but it cannot be completely excluded unless it is cooled in alimit state of an absolute zero-point (T->0).

Thus, the assertion by the Claimant(Plaintiff) that, in the "magnetic sensor" of the Present Invention used in an environment
not falling under the limit state as above, the coil voltage does not include a voltage
caused by the thermal noise and cannot be understood in meanings other than that
ignores thermodynamics and statistical mechanics.
Regarding the description in claim 1 that "only the magnetization change in theaxial direction of the wire by the super high-speed spin rotation phenomenon is takenout as a coil output", the interpretation by the Claimant (Plaintiff) that it means that
only the magnetization change in the axial direction is genuinely taken out as a coiloutput is a wrong interpretation.

When the aforementioned description, including theentire description of claim 1, is to be understood on the basis of the law of the physics
including thermodynamics and statistical mechanics, it is obvious for a person
ordinarily skilled in the art having scientific and common knowledge that the expression"only" was used in the aforementioned description in a meaning that exclusively "themagnetization change in the axial direction of the wire by the super high -speed spinrotation phenomenon" "is taken out as a coil output" by using a region where the"magnetization change in the axial direction of the wire by the super high-speed spinrotation phenomenon" is dominant as a whole as compared with the phenomenon of"magnetization rotation by movement of the 90-degree magnetic domain wall".
D. Invalidation Reason 1-3-2(A) Assertion by the Claimant (Plaintiff)
Regarding relational expression (1) in claim 1, there is no sufficient data forsupporting establishment of the sinusoidal relation in the entire range of claim 1 andthus, it cannot be considered that relational expression (1) is established at all times forthe magnetic sensor including the invention specifying matters described in claim 1 is
described to such a degree that a person ordinarily skilled in the art can recognize it in
the Detailed Description of the Invention in the Description.
(B) Determinationa. In claim 1, it is described that "the circumferential-direction spins inclined in
the axial direction by the magnetic field in the wire axial direction within the surface
magnetic domain are simultaneously rotated at a super high speed, and only the12magnetization change in the axial direction of the wire by the super high -speed spinrotation phenomenon generated at that time is taken out as a coil output and is converted
to a magnetic field H by using relational expression (1)" and thus, it is obvious that the"coil output" is limited to those in proportion to "sin(πH/2Hm)" associated with the"super high-speed spin rotation phenomenon".
Moreover, it is obvious that the "coil output" is in proportion to a wire length L,a wire diameter D, a skin depth p of the pulse current, a coil winding number Nc, and apulse frequency f, and these parameters are factors with no relationship with theaforementioned sinusoidal functional relation.
Then, it should be considered that the support requirement related to the Present
Invention is satisfied only if existence of at least one experimental fact that the "coiloutput" satisfies the sinusoidal relation is confirmed, and even if there is only one pieceof the experimental data, the experimental data is not insufficient so long as theestablishment of the sinusoidal relation is confirmed.
b. By examining the frequency of the pulse current, in addition to Fig. 3 in which
the sinusoidal functional relation can be clearly recognized, the graph in Fig. 4
illustrating a relationship between the pulse frequency and the coil output voltage
discloses that reasonable intensity is acquired in a range at least from 0.5 GHz to 4.0
GHz, and rational and qualitative explanation for explaining a shape of the graph in Fig.
4 is disclosed in [0056] to [0057] in the Description.

Thus, there is considered to be

description to such a degree that a person ordinarily skilled in the art can obtain rational
expectation that the sinusoidal functional relation is established even in the range from
0.5 GHz to 4.0 GHz.

Moreover, the Claimant (Plaintiff) also asserts "The Detailed

Description of the Invention in the Present Patent does not clearly describe evenconditions for obtaining data plotted in the graph in Fig. 3 to such a degree that a person
ordinarily skilled in the art can understand it.", but such circumstances that require
excessive trials and errors for a person ordinarily skilled in the art are not found as
experiments for illustrating the sinusoidal functional relation.
Subsequently, in consideration of the descriptions in [0040], [0041], [0056],[0057], and the like in the Description, by making the pulse frequency f sufficiently
high so as to make the skin depth smaller than the thickness of the surface magnetic
domain (the skin depth is in proportion to an inverse number of a square root of thefrequency), the simultaneous rotation of the surface spins can be brought about, but if
the pulse frequency f is made too large, the eddy current is increased with the speed
increase and begins to suppress the spin rotation, and if the pulse frequency is further
raised close to 5 GHz, spin precession and a spin resonance phenomenon begin to occur,
13

each spin overcomes the exchange action force and starts rotation, whereby the coiloutput voltage is lowered.

Therefore, it can be understood that an optimal frequency

region exists, and it is from 0.5 GHz to 4 GHz.

Moreover, as described in [0043] inthe Description that "In order to detect a very weak and high-speed signal with a coil,a fine coil is needed.

A coil pitch per unit length is set to 30 μm to 10 μm or less, acoil inner diameter to 15 μm or less, and an interval between the magnetic wire and thecoil to 10 μm to 3 μm or less of the coil-type MI sensor so that electromagnetic coupling
between the wire and the coil was reinforced, and the output voltage in proportion to
the coil number N could be successfully acquired.", specification of the coil pitch andspecification of the coil inner diameter are for increasing the signal intensity, and it isobvious that they are not essential parameters for the GSR phenomenon which generates
the sinusoidal functional relation.
Therefore, since it is obvious that the GSR phenomenon is basically caused toemerge only by the pulse frequency, the assertion by the Claimant (Plaintiff) that "it isdifficult to understand for a person ordinarily skilled in the art how to change acondition other than the pulse frequency in order to increase the pulse frequency to thegigahertz order, whereby the GSR phenomenon emerges, in what case the GSR
phenomenon occurs, and in what case the GSR phenomenon does not occur" ignoresthat the essential emergence condition of the GSR phenomenon is the pulse frequency,
which is unreasonable and groundless.
As described above, unlike the determination in the aforementioned a, even froma viewpoint that claim 1 is not limited to those indicating the GSR phenomenon, thedescription in the Scope of Claims of the Present Patent satisfies the support
requirement.
Therefore, Invalidation Reason 1-3-2 is not grounded, either.
E. Invalidation Reason 1-4(A) Assertion by the Claimant (Plaintiff)
Claim 1 includes numerical value limitation such that [i] regarding the magnetic
wire, the anisotropic magnetic field is 10 G or less; [ii] the frequency of the pulse
current is 0.5 G to 4 GHz; [iii] the intensity of the pulse current is such intensity thatgenerates the circumferential-direction magnetic field of 1.5 times or more of theanisotropic magnetic field; and [iv] the coil pitch is 10 μm or less and the coil innerdiameter is 25 μm or less, but the relationship between these constitutions and theeffects are not described in the Detailed Description of the Invention such that a person
ordinarily skilled in the art can understand it, the invention according to claim 1 is notconsidered to be capable of solving the problems of the Detailed Description of the14

Invention, and moreover, critical significance of each numerical value range is notknown.
(B) Determination
a. Regarding the magnetic wire, on the point that the anisotropic magnetic field is 10 G
or less, from the description in [0007] of the Description that "when the anisotropic
magnetic field is made larger, the magnetic permeability μ becomes extremely small toapproximately 1000, and the sensitivity is drastically lowered." and from thedescription in [0055] and the like, it is obvious to recognize that, to set the anisotropic
magnetic field to 10 G or less has technical significance as a condition of improving
the sensitivity by making the weak signal as large as possible.
b. Point that the frequency of the pulse current is 0.5 to 4 GHz
From the descriptions in each of [0056] and [0057] in the Description as well as
Fig. 4 illustrating a relationship between the frequency of the pulse current and the coiloutput voltage (sensor output), it can be read that the coil output voltage becomes thelargest substantially at 2 to 3 GHz and the output lowers as it is separated from that andthus, it is obvious that the value of "0.5 to 4 GHz" in claim 1 causes the super high speed spin rotation phenomenon (GSR phenomenon) to emerge, and it can berecognized that it has technical significance as a condition to make the intensity of thesensor output larger.
The Claimant (Plaintiff) also asserts that the Description of the Present Patent
defines the pulse frequency by "f=1/2 dt" but does not have description specificallydisclosing the relationship between the pulse frequency by the definition and t he skindepth of the current, and it is not described such that a person ordinarily skilled in theart can understand the technical significance that the skin depth of the current becomes
1 μm or less when the pulse frequency is set to 0.5 GHz or more.

However, there isno dispute between the two parties that it is a matter of common general technicalknowledge that the skin depth can be acquired by the following formula "skin depth
δ=(2ρ/ωμ)1/2" (here, ρ is specific resistance, μ is magnetic permeability, and ω is anangular frequency of a sinusoidal current).

It is obvious that, when the pulse

frequency f=1/2 dt becomes larger, a high-frequency component of ω becomes larger
as a Fourier component and thus, it is obvious that, when f=1/2 dt becomes larger , theskin depth of the current becomes smaller, and it cannot be approved that a person
ordinarily skilled in the art cannot understand the technical significance of thelimitation on the numerical value range of the frequency.

15

c. Point that the intensity of the pulse current is intensity at which the circumferentialdirection magnetic field of 1.5 times or more of the anisotropic magnetic field isgenerated
The "anisotropic magnetic field" means that, in a magnetic field at the value
concerned or more, the spins are aligned in the direction of the magnetic field and thus,
it is obvious for a person ordinarily skilled in the art that "1.5 times or more of theanisotropic magnetic field" means that a magnetic field sufficiently larger than theanisotropic magnetic field can be applied so that the spins can be sufficiently alignedin the same direction.

This matches the statement in [0082] in the Description that

"The intensity of the pulse current was set to 50 mA or more, and a sufficiently large
circumferential magnetic field Hθ, which is 1.5 times or more of Hm, was generated on
the wire surface so that simultaneous rotation of the surface spins was realized.".
d. Point that the coil pitch is 10 μm or less and the coil inner diameter is 25 μm or less
The coil inner diameter being 25 μm or less contributes at least to size reduction
and thus, even if there is no special explanation on the significance of this limitation in
the Description, it does not mean that the Invention is not described.
It is to be noted that, as is obvious from the description in [0060], when the coilpitch becomes smaller, the coil winding number per unit length increases and thus, it isobvious that the output voltage becomes larger.
e. Critical significanceEven if there is no critical significance on the boundary of the numerical value
range, the invention can be recognized when the technical significance of the numericalvalue limitation can be recognized and thus, in the determination on whether or not theinvention with the numerical value limitation satisfies the support requirement, eventhough capability of understanding the technical significance on the numerical value
limitation is required, it is obvious that presence of the further critical significance ofthe boundary of the numerical value is not required.

Therefore, the assertion by the

Claimant (Plaintiff) that the critical significance is required is unreasonable and cannot
be employed.
The Claimant (Plaintiff) seems to be confused with that, when there is a prior art
exerting an effect of the same quality for the numerical-value limitation invention, suchdetermination of lack of the inventive step is made in some cases, when there is no
critical significance on the boundary of the numerical values.
(3) Invalidation Reason 2 (violation of clarity requirement) (Invalidation Reason
2-5)
A. Assertion by the Claimant (Plaintiff)16Regarding the "anisotropic magnetic field" in claim 1, it is defined in the
Description as the "magnetic field intensity when the spin rotation is started in thesurface magnetic domain of the magnetic wire, after the movement of the magnetic
domain wall in the core magnetic domain of the magnetic wire has finished", but if thisis applied, the "anisotropic magnetic field" is defined as magnetic field intensity appliedat impossible timing as a phenomenon emerging in the magnetic wire of the "micro
magnetic sensor with super high sensitivity", which cannot be understood by a person
ordinarily skilled in the art and thus, the definition of the "anisotropic magnetic field"
is not clear.
B. Determination
The "anisotropic magnetic field Hk", which is a technical term, refers to an
equivalent virtual magnetic field when supposing such a magnetic field that tries toalign magnetization in an easily-magnetizable axial direction exists in a substancehaving magnetic anisotropy and a virtual magnetic field acquired from a condition thatenergy inside the substance determined by a direction of magnetization under thisvirtual magnetic field becomes equivalent to the magnetic anisotropic energy and is anestablished technical term.
However, [0021] in the Description has description that "In the magnetization
curve, a steep rising region is a magnetization process by movement of the magnetic
domain wall, while a gentle increasing region is a magnetization process by themagnetization rotation.

A magnetic-field intensity when the magnetization rotation isstarted is defined as an anisotropic magnetic field Hk.".

And thus, it should be

examined whether the meaning of the "anisotropic magnetic field" in the Present Patent
is different from the aforementioned established technical term, but it is approved, from
"Magnetism Handbook" compiled by the Magnetics Society of Japan (Maruzen, issued
on January 30, 2016, p. 495 to 496, p. 499 to 500) and the like, that acquisition of theanisotropic magnetic field from an intersection between an extrapolation line of a linear
part of a magnetization curve and a straight line of the "magnetization=saturated
magnetization"; that is, "anisotropic magnetic field Hk=Ms/χo, where Ms is saturated
magnetization, χo is inclination of the linear part of the magnetization curve", is amatter of common general technical knowledge (hereinafter, referred to as "common
general technical knowledge B").
(4) Invalidation Reason 3 (violation of enablement requirement)
A. Assertion by the Claimant (Plaintiff)
The Description cannot be regarded to clearly describe materials, devices,
processes, and the like which should embody technical means for "taking out only the17magnetization change in the axial direction of the wire by the super high -speed spinrotation phenomenon as a coil output" and moreover, the matter for "genuinely taking
out only the magnetization change in the axial direction of the wire by the super highspeed spin rotation phenomenon generated at that time as a coil output" is notconsidered to be common general technical knowledge at the filing of the Present Patent.
Therefore, it cannot be considered at all that a person ordinarily skilled in the art canunderstand the materials, devices, processes, and the like which should embody
technical means for "taking out only the magnetization change in the axial direction of
the wire by the super high-speed spin rotation phenomenon as a coil output" on thebasis of the common general technical knowledge at the filing and thus, it cannot be
considered that Invention 1 including the technical means described in an abstract orfunctional manner falls under those described clearly and sufficiently enough to such a
degree that a person ordinarily skilled in the art can work, and the same applies toInventions 3 to 7.
B. Determination
Invalidation Reason 3 asserted by the Claimant (Plaintiff) is based on theinterpretation that the description that "only the magnetization change in the axial
direction of the wire by the super high-speed spin rotation phenomenon generated atthat time is taken out as a coil output" as "only the magnetization change in the axial
direction of the wire by the super high-speed spin rotation phenomenon generated atthat time is taken out genuinely as a coil output", but such interpretation is wrong as
described in the aforementioned (2)C(B) and thus, the assertion by the Claimant(Plaintiff) is unreasonable and groundless.
Therefore, the Patent for the Present Inventions 1, and 3 to 7 cannot be
invalidated by Invalidation Reason 3.
4. Grounds for Rescission(1) Errors in determination on violation of support requirement (Ground for
Rescission 1)(2) Errors in determination on violation of enablement requirement (Ground for
Rescission 2)(3) Errors in determination on violation of clarity requirement (Ground for
Rescission 3)(omitted)
No. 4

Judgment of this court18

1. Described matters of the Description(1) The Detailed Description of the Invention of this Description (Exhibit Ko 69)
has the description as in Attachment 1, and according to the described matters, it isfound that the following matters are disclosed in the Present Invention.
A. The Present Invention relates to a micro magnetic sensor (GSR sensor) withsuper high sensitivity based on a super high-speed spin rotation effect (GHz Spin
Rotation effect, referred to as the GSR effect.) ([0001]).
Conventionally, micro magnetic sensors with high sensitivity include a lateral
FG sensor, a vertical FG sensor, an MI sensor, and the like, and the MI sensor among
them is based on the MI phenomenon (magneto-impedance phenomenon) discovered in
1993.

This is such a type of an electromagnetic phenomenon that a high frequency of

1 MHz to 30 MHz or a pulse current is passed through a magnetic wire (diameter: 30μm) having two structures; that is, a surface magnetic domain magnetized in acircumferential direction of a surface (thickness is approximately 0.2 μm) and a coremagnetic domain magnetized in an axial direction of a center part and the like so as tovibrate a 90-degree magnetic domain wall between the two magnetic domains, thecircumferential-direction magnetic permeability increases in proportion to an increasein magnetization, while a skin depth is remarkably reduced, and a magnetic impedanceof the wire is drastically changed, and an external magnetic field H is acquired from achange amount of the impedance (AC resistance).

In the MI sensor, a large reductionof a length of the magnetic wire from 50 mm to 5 mm was realized, but it has demerits
that an output characteristic was strongly affected by hysteresis of the wire, andmoreover, it is antisymmetric and non-linear, and although these demerits were solved
by using a negative feedback circuit, there was a problem in power consumption.
Moreover, the coil-detection type MI sensor is of an improved type in which the MI
phenomenon is detected by a coil, and a linear output was realized, but the negati ve
feedback circuit is used for hysteresis reduction, which caused a problem of the increasein power consumption.

([0002], [0004], [0005]).

Subsequently, by using an MI element manufactured by a MEMS process, thedownsized coil-detection type MI sensor with the magnetic wire with the diameter of
12 μm and the length reduced to 0.6 mm, and the coil inner diameter of 30 μm wasapplied and merchandized to an electronic compass (product name: AMI306) and thelike.

In order to supplement the lowered sensitivity, the frequency is increased from30 MHz to 200 MHz, and in order to generate a circumferential magnetic field which
overcomes the large anisotropic magnetic field, the pulse current is increased from 10
mA to 200 mA, and the negative feedback circuit is successfully omitted ([0006],
19

[0007]).

"The inventor" studied the MI sensor with higher sensitivity by raising thefrequency from 0.2 GHz to 0.5 GHz on the basis of the AMI306, but due to technicalproblems of a high-frequency pulse oscillation circuit and an increase in theelectromagnetic induced voltage involved in the higher frequency, commercialization
was not realized ([0010]).
B. The problem of the "Present Invention" is to find a magnetic sensor principle
for realizing performance improvement of approximately 100 times that of the MI
sensor and embodying conditions therefor, and "the inventor" discovered presence ofthe experimental expression in formula (1) between a voltage generated by the coil andthe external magnetic field when a trapezoidal-shaped pulse with a frequency of 0.5
GHz or more was given to a fine coil using the magnetic wire with the 2-phase structureof the surface magnetic domain and the core magnetic domain and the anisotropic
magnetic field at 5 G ([0014], [0016], [0017]).
Vs=Vo·L·πD·p·Nc·f·sin(πH/2Hm) ... (1)Here, Vs is a coil output voltage, Vo is wire magnetic permeability, and as
control factor constants, L is a length of the wire, D is a diameter of the wire, p is a skindepth of the pulse current, Nc is a coil winding number, f is a pulse frequency, H is anexternal magnetic field, and Hm is an external magnetic-field intensity at which the coiloutput voltage takes a maximum value.
C. When the pulse current with the frequency of 0.5 GHz or more is applied in astate where the spin which has been forced in the circumferential direction by aninternal magnetic field in the circumferential direction existing in the surface magnetic
domain of the magnetic wire is inclined by the external magnetic field H only by θ, thespin is rotated simultaneously by θ in the circumferential direction, and when thismagnetic change is detected by a coil voltage, it is V=Vosin2θ ((2)).

Therefore, it canbe considered that experimental expression (1) detects the simultaneous high -speed
rotation of the spin.

That is, the MI sensor detects the magnetization rotation by the

movement of the 90-degree magnetic domain wall even with the same skin effect, but
the sensor of the "Present Invention" is a totally new principle for genuinely detecti ng
only the rotation of the spin in the surface magnetic domain, and "the inventor"
considers it as a new-type GSR sensor based on the super high-speed spin rotation
phenomenon ([0018]).
The inclination angle θ of the spin is directed to a synthesized direction of theanisotropic magnetic field in the circumferential direction and the internal magnetic
field Hin, and when it is rotated in the circumferential direction from that angle, a coilvoltage given by the relational formula (1) can be obtained and thus, it can be20

considered that the inclination angle is a source of the coil output.

But since the angle

is determined by a ratio between the internal magnetic field Hin applied to the spin in
the surface magnetic domain and the anisotropic magnetic field in the circumferential
direction, under the 2-phase structure of the surface magnetic domain and the coremagnetic domain, it is important to make the anisotropic magnetic field as small as
possible so that the spin can be greatly inclined in the small internal magnetic field([0035]).
A condition under which the super high-speed spin rotation phenomenon, which
is a new electromagnetic phenomenon, emerges is, by using the magnetic wire in which
the surface magnetic domain having the circumferential-direction spin alignment on thesurface exists, an excitation pulse having a sufficiently large current with a frequency
of GHz is applied so that the skin depth p is smaller than the thickness d of the surface
magnetic domain, the simultaneous rotation of the circumferential-direction spin isbrought about, and the change is detected by a fine coil ([0038]).
D. As compared with an FG sensor, an MI sensor, a coil-detection type improved
MI sensor, and the like, the super high-sensitivity micro-magnetic sensor based on the
super high-speed spin rotation effect has realized improvement of the sensor output
voltage, the sensor sensitivity, and the sensor detection capability, noise reduction,
enlargement of the measurement range, lowered current consumption, improvement of
temperature stability, improvement of the hysteresis characteristics and linearity, andmicro-level downsizing and is extremely useful, contributing to industrial spread([0077]).
(2) According to the disclosed matters in the aforementioned (1), the Present
Invention has its technical significance as a magnetic sensor (GSR magnetic sensor)
that, in a magnetic wire having a 2-layered magnetic domain structure of a surface
magnetic domain having a spin alignment in the circumferential direction and a centerpart core magnetic domain having the spin alignment in the axial direction, by applying
an excitation pulse of a current with a large frequency so as to make the skin depth psmaller than the thickness d of the surface magnetic domain, the spin exi sting in thesurface magnetic domain in the magnetic wire in a state inclined only by θ by theexternal magnetic field H is caused to perform super high-speed spin rotation so thatthe coil output is detected, and the size of the external magnetic field is measured byusing relational formula (1).
2. Ground for Rescission 1 (errors in determination on violation of support requirement)(1) Article 36, paragraph (6), item (i) of the Patent Act prescribes that, in
description of the Scope of Claims, description should not be made exceeding a range
21

of the invention described in the Detailed Description of the Invention, and the purpose
thereof is interpreted that, if the invention not described in the Detailed Description of
the Invention is described in the Scope of Claims, a monopolistic and exclusive rightfor the invention which has not been published is claimed, which is not reasonable, andthis shall be prevented.
Then, it is reasonable to interpret that, whether or not the description in the Scopeof Claims conforms to the requirement prescribed in the clause (support requirement)
should be determined by examining through comparison between description in the
Scope of Claims and the description in the Detailed Description of the Invention,
whether or not the invention described in the Scope of Claims is the invention describedin the Detailed Description of the Invention and within a range that a person ordinarily
skilled in the art can recognize that the problem of the invention can be solved by thedescription in the Detailed Description of the Invention and whether it is within a rangethat a person ordinarily skilled in the art can recognize that the problem of the invention
can be solved in view of the common general technical knowledge at the filing w ithout
the description or suggestion.
(2) The Plaintiff asserts that the Present Invention violates each of the description
requirements on the premise that, the "super high-speed spin rotation phenomenon"(GSR phenomenon) on which the GSR sensor of the Present Invention is based cannot
be distinguished from the MI phenomenon on which the MI sensor is based as describedin the aforementioned No. 3, 1(1)A and thus, this point will be examined first.
A. The Description has the description that, as an emergence condition of the"GSR phenomenon", "by using the magnetic wire in which the surface magnetic domain
having the circumferential-direction spin alignment on the surface exists, an excitation
pulse having a sufficiently large current with a frequency of GHz is applied so that theskin depth p is smaller than the thickness d of the surface magnetic domain, thesimultaneous rotation of the circumferential-direction spin is brought about, and thechange is detected by a fine coil." ([0038]), that is, it is disclosed that [i] the magnetic
wire in which the surface magnetic domain having the circumferential-direction spinalignment on the surface exists is used; [ii] an excitation pulse having a sufficiently
large current with a frequency of GHz is applied; and [iii] the skin depth p is smaller
than the thickness d of the surface magnetic domain so that [iv] simultaneous rotationof the spins in the circumferential direction of the surface magnetic domain is brought
about, and the change is detected by a fine wire.

Since [i] is a physical property of themagnetic wire to be the premise under the GSR emergence condition, and [iv] is22detection of generation of the super high-speed spin rotation, when considering the
Description, it has the following description on [ii] and [iii].
[a] "The pulse current was assumed to have ... a pulse frequency of 0.5 GHz to 4 GHz.
As a result, the skin depth of the current was controlled to 0.2 μm to 1 μm so as to beequal to or smaller than the thickness of the circumferential surface magnetic-domain."([0023]), "The higher the frequency, the larger the output voltage.

Moreover, the skindepth also becomes smaller, whereby the thickness d of the surface magnetic domain
can be made smaller. ... However, as a spin resonance frequenc y is approached,
fluctuations occur in the simultaneous rotation, and the coil voltage lowers and thus,
there is an optimal frequency range, which is from 0. 5 GHz to 4 GHz. ... However, theincrease in the pulse frequency increases an induced voltage induced by thecircumferential pulse magnetic field in the coil and thus, this measure is more importantin the GSR sensor." ([0057])[b] "The magnetic wire which was used is ... having a diameter of 10 μm, an amorphous
structure, ... with magnetic anisotropy of 1 G or 5 G, ... a 2-phase magnetic domain
structure of the circumferential surface magnetic-domain having the circumferentialdirection spin alignment and the center-part core magnetic domain having the axialdirection spin alignment was formed.

The skin depth p of the pulse current wascontrolled such that the thickness d of the surface magnetic domain was approximately
1 μm, by considering the skin depth p of 0.5 μm.

Moreover, a magnetic fieldexceeding 1.5 times of the anisotropic magnetic field Hk was generated by a sufficiently
large pulse current, pulse magnetic-field annealing processing was performed at every
measurement, magnetization was saturated in the circumferential direction, and amagnetization history was erased." ([0042]), "The magnetic wire was made of a Cobased alloy having 0 magnetostriction or weak negative magnetostriction and had ananisotropic magnetic field Hk of 8 G or less, relative magnetic permeability of 1000 or
more, a diameter of 20 μm or less, and a stress in the axial direction was 2p or morewith the thickness d of the surface magnetic domain of 1 μm or less.

The thickness

was adjusted to be 2p or more by applying pulse magnetic-field annealing or tension
annealing by taking into consideration the applied pulse frequency.

It is to be noted

that, regarding residual magnetization of the core part, disappearance/reduction of an
influence history of the external magnetic field before that was promoted during pulse conduction duration time occurs, so as to suppress hysteresis." ([0058]), "Regarding thecurrent intensity of the pulse current, the intensity of the circumferential -direction
magnetic field on the surface was set to 30 G or more or a circumferential -direction
magnetic-field intensity of 1.5×Hk or more was ensured as a target by considering a23

diameter of the wire, and the pulse frequency was set to 0.5 GHZ to 4 GHz so as torealize the simultaneous spin rotation at a super high speed only of the spins in thesurface magnetic domain.

Moreover, the core magnetic domain was reduced by alarge circumferential-direction magnetic field during the duration of the pulse
conduction so as to increase the thickness of the surface magnetic domain." ([0059])
These descriptions are considered to disclose that, as the emergence condition of
the GSR phenomenon, in order to "make the skin depth p smaller than the thickness dof the surface magnetic domain", [a] the pulse current with a high frequency on agigahertz order (frequency at 0.5 GHz to 4.0 GHz) is caused to pass so as to make theskin depth p as small (shallow) as possible; [b] in order to make the thickness d of thesurface magnetic domain larger (thicker), a magnetic field exceeding 1.5 times theanisotropic magnetic field Hk is generated by the sufficiently large pulse current.
On the basis of the above, the Description describes that, regarding the detectionof generation of the super high-speed spin rotation, the experimental expression as
formula (1) exists between the voltage generated by the coil and the external magnetic
field ([0016]), the coil output voltage when only the rotation of the spin in the surface
magnetic domain is genuinely detected is in proportion to sin2θ to the spin inclination
angle θ by the external magnetic field ([0018]), and the spin inclination angle θ isdirected to a synthesized direction of the anisotropic magnetic field in thecircumferential direction and the internal magnetic field Hin, and when it is rotated in
the circumferential direction from that angle, a coil output voltage given by relational
formula (1) can be obtained ([0035]) and thus, it can be considered that experimental
expression (1) detects the simultaneous high-speed rotation of the spin ([0018]).
From these descriptions, the emergence conditions of the GSR phenomenon
based on the "GSR magnetic sensor" of the Present Invention are [i] by using themagnetic wire in which the surface magnetic domain having the circumferential direction spin alignment on the surface exists; [ii] the frequency of the pulse current
caused to pass through this magnetic wire is 0.5 GHz to 4.0 GHz; and [iii] the pulse
current has equal to or larger than current intensity required to generate thecircumferential-direction magnetic field of 1.5 times or more of the anisotropic
magnetic field on the wire surface, and the "GSR sensor" of the Present Invention takesout only the magnetization change in the axial direction of the wire by the GSR
phenomenon emerging under [i] to [iii] as a coil output voltage, and the external
magnetic field is detected by using formula (1) (that is, the four matters approved by
the JPO decision (Present Matters)), and from the disclosed matters of the Description24

as above, the Present Invention can be considered to be the invention described in the
Detailed Description of the Invention in the Description.
B(A) The Plaintiff asserts that, as in the aforementioned No. 3, 1(1)A(A), among
the matters as the emergence conditions of the "GSR emergence phenomenon", [i] and[iii] are the matters in common with the MI phenomenon on which the MI sensor isbased, but the Present Invention is the invention with the matters in [i] to [iv] as one
technical premise and thus, the assertion that only a part thereof is in common is nothing
but unreasonable.

There is no evidence sufficient to find that the MI sensor includes

all these four matters (this point was also approved in the primary JPO decision.)(B) The Plaintiff points out, as in the aforementioned No. 3, 1(1)A(B)a, thedocument in which the current with the pulse frequency on the gigahertz order is appliedalso in the MI sensor, but as described in the aforementioned A, the technicalsignificance of applying the current with the frequency in the gigahertz order in the
GSR phenomenon is to make the skin depth p smaller than the thickness d of the surface
magnetic domain by increasing the thickness of the surface magnetic domain, but the
document pointed out by the Plaintiff does not illustrate the application of the current
with the frequency in the gigahertz order from the technical point of view as above.
Moreover, regarding the assertion in the b above, as indicated above, it is obviousthat the Present Invention does not discriminate between the MI phenomenon and the
GSR phenomenon only by the frequency of the pulse current on the gigahertz order andthus, the premise is nothing but wrong.
(C) The Plaintiff asserts that, as in the aforementioned No. 3, 1(1)A(C), it isillustrated that the output which can clearly recognize the sinusoidal functional relation
can be obtained also in the MI sensor, which is a conventional art, by citing that Fig. 3(Fig. 3-a) indicating the sinusoidal functional relation in the Description closely
resembles Fig. 4 in the Exhibit Ko 12 document.
However, the Exhibit Ko 12 document pointed out by the Plaintiff does notdescribe or suggest that the relation between the coil output and the external magnetic
field indicates a sinusoidal functional relation.
Or rather, regarding the MI sensor and the relationship between the coil output
and the external magnetic field, from the description in each of the documents in
Attachment 2, it is made obvious theoretically and experimentally that the relationshipbetween the coil output and the external magnetic field has a proportional relationshipin the MI sensor, and the aforementioned assertion by the Plaintiff lacks argument andis groundless.

25

C. As the result of progress of studies, even if it is proved that the GSR
phenomenon is on the "extension" of the MI phenomenon based on the MI sensor fromthe viewpoint of natural science, whether or not it is such an effect that can be
distinguished from the conventional art in the meaning of the natural science does nothave any relation with patent requirements or rather, if improvement of the conventionalart is a technical idea that could not have been easily conceived of by a person ordinarily
skilled in the art, it is granted a patent, and in line with the description requirements,
what matter are [i] whether the invention is described in the Detailed Description of theInvention, and the problem is solved from the description in the Detailed Descriptionof the Invention (support requirement); [ii] whether a person ordinarily skilled in theart can work it on the basis of the matters described in the Detailed Description of theInvention without excessive trials and errors (enablement requirement); and [iii]whether the description in the Scope of Claims is so unclear that would give an
unexpected disadvantage to a third party even on the basis of the Descripti on and thecommon general technical knowledge (clarity requirement), and whether the mattersdescribed in the invention can be distinguished from the effect of the prior art from theviewpoint of natural science does not matter.
In addition to the points as above, according to those taught in the
aforementioned A and B, the GSR phenomenon can be considered to be a technical idea
different from the MI phenomenon on which the conventional MI sensor is based andthus, the determination on each of the invalidation reasons by the JPO decision bystating that the GSR phenomenon "should be considered to be explained correctly atpresent" has no errors.
(3) In the following, on the basis of the above, the points that the Plaintiff asserts
as violation of the support requirement will be determined.
A(A) The Plaintiff asserts that, as in the aforementioned No. 3, 1(1)C(A), it
cannot be concluded that the GSR phenomenon based on a totally new principle ascompared with the MI phenomenon is indicated by the frequency of the pulse current
on the gigahertz order and the change of the output voltage as the sine function with thechange in the external magnetic field in Fig. 3, but as described above in (2)A, the GSR
phenomenon and the Invention which detects the phenomenon is a technical idea
different from the MI phenomenon on which the MI sensor, which is the conventionalart, is based, and it is found to be established with the four matters (Present Matters)found in the JPO decision forming one technical premise and thus, the Plaintiff's
assertion cannot be employed.

26Moreover, the Plaintiff asserts that the Description discloses only one piece ofexperiment data indicating the sinusoidal functional relation related to the pulse current
with the pulse frequency of 2 GHz (Fig. 3), and it does not indicate that, when a change
is made within a range of the frequency of 0.5 GHz to 4.0 GHz of the pulse current, thesinusoidal functional relation is established with all the frequencies within the range.
However, the Description discloses theoretical derivation process ([0017] to [0019])
indicating the sinusoidal functional relation (relational expression (1)) between theexternal magnetic field and the coil output relations, and it is explained that the coiloutput voltage and the external magnetic field are associated by relational expression(1) ([0019] to [0037]) and from these disclosed matters, when the frequency of the pulse
current is set to 0.5 GHz to 4.0 GHz other than 2.0 GHz, there is no reason to consider
that the external magnetic field and the coil output relations do not indicate thesinusoidal functional relation.
(B) The Plaintiff asserts that, as in the aforementioned No. 3, 1(1)C(B), [i] there
is no description in the claim that "skin depth p < thickness d of the surface magnetic
domain", which is the emergence condition of the GSR phenomenon, is ensured; and[ii] the Description describes that it is preferable to have "skin depth p < thickness d ofthe surface magnetic domain" ([0083]) and does not specify that to ensure the "skindepth p < thickness d of the surface magnetic domain" is not an essential requisite for
the GSR emergence.
However, as in the aforementioned (2)A, the Description discloses that, in orderto ensure "skin depth p < thickness d of the surface magnetic domain", which is the
emergence condition of the GSR phenomenon, that the frequency of the pulse current
to be passed through the magnetic wire is set to 0.5 GHz to 4.0 GHz, and the pulse
current has equal to or larger than the current intensity required to generate thecircumferential-direction magnetic field of 1.5 times or more of the anisotropic
magnetic field on the wire surface.

And claim 1 has the description of the invention

specifying matters that "the pulse current to be passed through the magnetic wire has afrequency of 0.5 GHz to 4.0 GHz and current intensity required to generate acircumferential-direction magnetic field of 1.5 times or more of the anisotropic
magnetic field on the wire surface" and thus, it can be considered that the matters for
ensuring "skin depth p < thickness d of the surface magnetic domain", which is thecondition for causing the GSR phenomenon to emerge, is described in claim 1.
Moreover, [0083] pointed out by the Plaintiff has the description that "it is preferable
that the pulse frequency is 0.5 GHz or more, the skin depth p of the current is 1 μm orless, and the thickness d of the circumferential surface magnetic-domain is d or less.",27

but this description only states that it is "preferable" that the pulse frequency is 0.5 GHz
or more, the skin depth p of the current is 1 μm or less in order to have the thickness dor less of the circumferential surface magnetic-domain, and in view of the description
in the Description pointed out in the aforementioned (2)A, the assertion by the Plaintiff
cannot be employed at all.
(C) The Plaintiff asserts that, as in the aforementioned No. 3, 1(1)C(B), even if
the conditions in [i] to [iii] in the four matters found in the JPO decision are all satisfied,the condition that "skin depth p < thickness d of the surface magnetic domain" is notsatisfied, and since the means for solving the problem of the invention described in the
Detailed Description of the Invention is not reflected in claims of the Present Patent, it
fails to fulfill the support requirement.

However, as described above, the Present

Invention is to take out only the magnetization change in the wire axial direction as acoil output by including the configuration of the four matters (Present Matters)
indicated in the JPO decision, and the Description has the disclosure on the conditionsof the emergence of the GSR phenomenon as taught in the aforementioned (2)A.

And

even in the case where the condition of the "skin depth p < thickness d of the surface
magnetic domain" is not satisfied even if the matters in [i] to [iii] are satisfied, thecircumferential-direction spins inclined in the axial direction by the magnetic field in
the wire axial direction within the surface magnetic domain are simultaneously rotated
at a super high speed, and only the magnetization change in the wire axial direction by
the super high-speed spin rotation phenomenon generated at that time cannot be takenout as a coil output or cannot be converted to the magnetic field H by usin g relational
expression (1), and as a result, it can be concluded that the configuration in [iv] foundin the JPO decision is not included and thus, it is only a magnetic sensor different fromthe Present Invention including the four matters.

Since the Plaintiff's assertion cannot

be the basis for the violation of the support requirement in any way, it is nothing but
unreasonable.
B. The Plaintiff asserts that, as in the aforementioned No. 3, 1(1)D, Present
Invention 1 is a special parameter patent in which numerical values are limited suchthat "the frequency is 0.5 GHz to 4.0 GHz", the Description describes only an exampleof the frequency at 2 GHz, and it is not possible to understand whether the GSR
phenomenon can emerge in the range of the numerical values of the aforementioned
frequencies distinctively from the MI phenomenon, which is the conventional art.
However, as described in the aforementioned (2)A, the technical significancethat the frequency of the pulse current to be applied to the magnetic wire is set to "0.5
GHz to 4.0 GHz" is an invention specifying matter for satisfying the condition of the28

"skin depth p < thickness d of the surface magnetic domain" ([0023]m, [0057], Fig. 4),
the technical significance thereof was made clear, and as described in the
aforementioned (2)A, the "skin depth p < thickness d of the surface magnetic domain",which is the emergence condition of the GSR phenomenon, is not generated only by thenumerical value limitation of the frequency applied to the magnetic wire as above andthus, it cannot be approved that the Present Invention is a special parameter patent.
Moreover, Fig. 3 in the Description is an example of the frequency 2 GHz, but there is
no reason to interpret that formula (1) indicating the sinusoidal functional relation
between the external magnetic field and the coil output relations does not indicate thesinusoidal functional relations at those other than the frequency of 2 GHz as describedin the aforementioned A(A).

Therefore, the Plaintiff's assertion cannot be employedin any way.
C. The Plaintiff asserts that, as in the aforementioned No. 3, 1(1)E, claim 1 has
the invention specifying matter that "magnetic sensor comprising a magnetic -field
detection element in which a magnetic wire for detecting a magnetic field having
conductivity on a board [i], a circumferential coil wound around it, two electrodes forwire conduction, and two electrodes for coil voltage detection are installed, means forcausing a pulse current to pass through the magnetic wire, a circuit for detecting a coilvoltage generated when the pulse current is caused to pass, and means for convertingthe coil voltage to an external magnetic field H, wherein the magnetic wire has ananisotropic magnetic field of 10 G or less [2], ... ", and since the "the magnetic wire" in[2] refers to the "magnetic wire" in [i] by "the", it is the "magnetic wire" having the
conductivity "on the board" and asserts that the configuration of the magnetic wire "onthe board" is not supported in the Description.
Whether "the magnetic wire" "having the anisotropic magnetic field of 10 G or
less" in [ii] refers to "a magnetic wire for detecting a magnetic field having
conductivity" or to the "'magnetic wire for detecting a magnetic field having the
conductivity' installed 'on a board'" cannot be necessarily understood unambiguously
from the invention specifying matter in claim 1 and thus, by examining the description
in the Description, [0034] in the Description describes that "the magnetic material used
this time had the anisotropic magnetic field Hk at 5 G, μr=32000, the anisotropic
magnetic field when incorporated in the element at 40 G, μeff=600, and Nμeff=0.8",
and the anisotropic magnetic field as a characteristic of the magnetic material and theanisotropic magnetic field when incorporated in the element are described distinctively.
If it is interpreted that "the magnetic wire" in "the magnetic wire has an anisotropic
magnetic field of 10 G or less ..." in [ii] is the "magnetic wire for detecting a magnet ic
29

field having conductivity", it can be interpreted to match the subsequent invention
specifying matter that "has an anisotropic magnetic field of 10 G or less", but if themagnetic wire having the anisotropic magnetic wire of 10 G or less refers to the"'magnetic wire for detecting a magnetic field having the conductivity' installed 'on aboard'", it does not match that the anisotropic magnetic field when incorporated in theelement used the magnetic material of 40 G.
Therefore, it is rational to understand that "the magnetic wire" in [ii] refers to
the "magnetic wire for detecting a magnetic field having conductivity", and thePlaintiff's assertion is groundless.
D. The Plaintiff asserts that, as in the aforementioned No. 3, 1(1)F, theDescription does not describe means or a method of taking out only the voltage causedby the "spin rotation in the surface magnetic domain" from the coil output voltage ormeans or a method of enabling removal of a voltage caused by the "magnetization
rotation by movement of a 90-degree magnetic domain wall" and they cannot be
considered to have been matters of common general technical knowledge, and the JPO
decision made determination on the basis of misunderstanding that the Plaintiff's
assertion was only the assertion related to the "thermal noise", but they are carelessmistakes.
The "GSR sensor" in the Present Invention "takes out only the magnetization
change in the wire axial direction by the super high-speed spin rotation phenomenon
generated at that time"([iv]) "by simultaneously rotating the circumferential-direction
spins inclined in the axial direction by the magnetic field in the wire axial direction in
the surface magnetic domain" (emergence of the GSR phenomenon) in the matters [i]to [iii] found in the JPO decision and thus, it can be considered that only the voltage
caused by the spin rotation in the surface magnetic domain is taken out as the coil output
voltage.
On the other hand, the Plaintiff's assertion is understood such that, in short, it isa matter of common general technical knowledge that the pulse current actually flows
deeper than the skin depth of the magnetic wire, and the influence of the voltage causedby the magnetization rotation by the movement of the 90-degree magnetic domain wallby that cannot be ignored and thus, an importance is placed on that the matter in [iv] is
impossible; that is, it is impossible to "take out only the magnetization change in thewire axial direction by the super high-speed spin rotation phenomenon as a coil output".
However, the web site of Welding Technology Information Center in the Japan
Welding Engineering Society (Exhibit Ko 126) pointed out by the Plaintiff has thedescription that "a phenomenon in which an electromagnetic field is attenuated30

exponentially in accordance with penetration into a conductive body is called a skineffect.

Since an eddy current is proportional to a magnetic flux, as shown in Fig. 1,

the eddy current is also attenuated exponentially, caused by the skin effect with respect
to a depth from a surface of a specimen.

The skin effect is generated as an effect thatthe eddy current generated by a temporal change of the magnetic flux cancels anddownsizes the magnetic flux.

The larger the values of conductivity σ (S/m), magnetic

permeability μ (H/m), and an AC frequency f (Hz), the more remarkable the skin effect.
As a guide on how deep the eddy current penetrates from the surface of the specimen,
a depth δ(m) from the surface, which is 1/e to the value on the surface of the eddy
current is used as a penetration depth.", and Fig. 1 is as follows:

THICKNESS OF SKIN

DEPTH
FIG. 1: SKIN EFFECT IN AC CURRENT

That is, as described in the aforementioned document, regarding the skin effectindicated by using the skin depth, since there is a possibility that the current flows evenat the depth deeper than δ, the relative current density is not zero even at a spot deeper
than the depth δ, but the skin depth is only a guide on how deep from the surface of thespecimen the eddy current penetrates, or rather, it indicates that the farther it is fromthe surface, the more the current density decreases exponentially.

And since theinfluence on the core magnetic domain or the 90-degree magnetic domain is also
considered to decrease exponentially, it is considered that the magnetization rotationby the movement of the 90-degree magnetic domain wall by the pulse current also
decreases exponentially.

In other words, the skin effect is a phenomenon that the

deeper into the conductor the electromagnetic field penetrates, the larger it attenuates
exponentially, which means that the farther being separated from the surface, the more
the influence of the current density on the core magnetic domain and the 90-degree
magnetic domain decreases exponentially and thus, when the pulse current with a high31

frequency is applied to the magnetic wire so as to have the "skin depth p < thickness dof the surface magnetic domain", it is found that the influence of the magnetization
rotation by the movement of the 90-degree magnetic domain wall generated by the flow
deeper than the skin depth of the magnetic wire reaches an ignorable level, and a person
ordinarily skilled in the art would also understand as such.
Then, the Plaintiff's assertion on the premise that the influence of the voltage
caused by the aforementioned magnetization rotation cannot be ignored should beconsidered to be unreasonable in the first place, and even if the influence of the voltage
cannot be completely removed, in view of the technical significance of the Present
Invention, the necessity to completely remove the influence does not exist in the firstplace, and it should be considered to be obvious even for a person ordinarily skilled in
the art to understand on the basis of the understanding as above that the invention
specifying matter of "by causing the pulse current to be passed through the magnetic
wire, the circumferential-direction spins inclined in an axial direction by the magnetic
field in a wire axial direction within the surface magnetic domain are simultaneously
rotated at a super high speed, only a magnetization change in the axial direction of thewire by the super high-speed spin rotation phenomenon generated at that time is takenout as a coil output ..." in [iv] means that "the magnetization change in the axial
direction of the wire by the super high-speed spin rotation phenomenon" "is taken out
as a coil output" (in the meaning as above, the content determined by the JPO decisionby citing the thermal noise also falls under the influence of the voltage caused by theother causes and thus, it cannot be considered that the determination in the JPO decision
has a careless mistake).

Therefore, none of the Plaintiff's assertions have grounds.

(4) According to the above, the Present Invention can be considered to be theinvention described in the Detailed Description of the Invention and within a range thatcan be recognized to be capable of solving the problem by the description in the
Detailed Description of the Invention and thus, the support requirement is satisfied.
The determination in the JPO decision to the same effect has no errors, andInvalidation Reason 1 asserted by the Plaintiff is groundless.
3. Ground for Rescission 2 (errors in determination on violation of enablement
requirement)(1) The Plaintiff asserts that, as in the aforementioned No. 3, 2(1)A, [i] the
Description does not describe the matters required to understand the technicalsignificance of the Present Invention so that a person ordinarily skilled in the art canclearly recognize the difference of the MI sensor and thus, even in light of the technicallevel at the filing, the Present Invention which is stated to be a "new physical32

phenomenon different in principle" from the MI phenomenon, which is a conventionalart, cannot be worked; [ii] specific technical means or the like for "taking out only themagnetization change in the axial direction of the wire by the super high -speed spinrotation phenomenon as a coil output" in Present Invention 1 is not described in the
Description, and a person ordinarily skilled in the art cannot understand it even in thelight of the common general technical knowledge at the filing of this case and thus, thePresent Patent does not conform to the enablement requirement.
However, as described in the aforementioned 1(2)A, the Present Invention is aninvention on the one technical premise integrating the four matters found in the JPO
decision, while the MI sensor, which is the conventional art, does not include all thesefour matters (Present Matters), and from the matters disclosed in the Description, thePresent Invention can be considered to be described so that it can be clearly recognizeddistinctively from the MI sensor and thus, [i] is groundless.
Moreover, regarding [ii], as described in the aforementioned 1(3)D, in addition
to the description in the Description, since the skin effect is the phenomenon of the
exponential attenuation as the electromagnetic field penetrates into the conductor, aperson ordinarily skilled in the art would understand that, when the pulse current witha high frequency is applied to the magnetic wire so as to have the "skin depth p <thickness d of the surface magnetic domain", the influence of the magnetization rotati onby the movement of the 90-degree magnetic domain wall generated when flowing at aspot deeper than the skin depth of the magnetic wire reaches an ignorable level.
Therefore, it can be considered that a person ordinarily skilled in the art would
understand the invention specifying matter that "by causing the pulse current to bepassed through the magnetic wire, the circumferential-direction spins inclined in anaxial direction by the magnetic field in a wire axial direction within the surface
magnetic domain are simultaneously rotated at a super high speed, only a magnetization
change in the axial direction of the wire by the super high-speed spin rotation
phenomenon generated at that time is taken out as a coil output ..." as the meaning that"the magnetization change in the axial direction of the wire by the super high -speed
spin rotation phenomenon" "is taken out as a coil output" and thus, it cannot be
considered not to conform to the enablement requirement.
(2) The Plaintiff asserts that, as in the aforementioned No. 3, 2(1)B, [i] themeaning contents of the "pulse magnetic-field annealing" is unclear, and it is not
explained that the "pulse magnetic-field annealing" is means for ensuring the "skindepth p < thickness d of the surface magnetic domain", either; [ii] a method of acquiring
the "thickness d of the surface magnetic domain" has not been established, and a person
33

ordinarily skilled in the art cannot confirm in what case the condition of the "skin depth
p < thickness d of the surface magnetic domain" is satisfied; and [iii] according to the
Exhibit Ko 126, the description in [0041] in the Description that, in the case of the "skindepth p < thickness d of the surface magnetic domain", the depth of the spin rotation
matches the skin depth p clearly lacks technical evidence and does not satisfy theenablement requirement.
However, the Description has the descriptions that "Moreover, a magnetic fieldexceeding 1.5 times of the anisotropic magnetic field Hk was generated by a sufficiently
large pulse current, a pulse magnetic-field annealing processing was performed at every
measurement, magnetization was saturated in the circumferential direction, and amagnetization history was erased." ([0042]), "The intensity of the pulse current was ...,
and a sufficiently large circumferential magnetic field Hθ, which is 1.5 times or moreof Hm, was generated on the wire surface so that simultaneous rotation of the surface
spins was realized.

Moreover, magnetization was saturated in the circumferential

direction, and the magnetization history was erased.

This pulse magnetic-fieldannealing processing was executed for each measurement ..." ([0082]) and thus, it canbe understood that the "pulse magnetic-field annealing" in the Description means that
"Moreover, magnetization was saturated in the circumferential direction, and themagnetization history was erased" by the pulse current of 1.5 times or more of theanisotropic magnetic field.

Therefore, as described in the aforementioned 2(2)A, suchsuggestion that the thickness of the surface magnetic domain is increased so as to makethe skin depth p smaller than the thickness d of the surface magnetic domain can beread and thus, although the processing of the "pulse magnetic-field annealing" isdisclosed to such a degree that a person ordinarily skilled in the art can work, [i] isgroundless.
Moreover, whether or not it is the "skin depth p < thickness d of the surface
magnetic domain", which is the GSR emergence condition, is only the description on
the phenomenon side for the GSR emergence, and it is not the invention specifying
matter, and even if a method of acquiring the thickness d of the surface magnetic domain
is not established, a person ordinarily skilled in the art can work the invention and thus,[ii] is also groundless.
It is to be noted that, regarding [iii], as described in the aforementioned 2(3)D,the skin depth is a target concerning to what degree of depth from the surface of thespecimen the eddy current penetrates and it is a matter of common general technicalknowledge that the pulse current actually flows deeper than the skin depth (this point
is not disputed by the Plaintiff, either (see written preparatory proceeding)).
34

Thus, aperson ordinarily skilled in the art who contacted the description in the Description that,in the case of "skin depth p < thickness d of the surface magnetic domain", the depth of
the spin rotation matches the skin depth p ([0041]), would understand it as a qualitative
explanation on the relationship between the skin depth and the surface magnetic domain,and it cannot be considered that the Present Invention does not conform to theenablement requirement due to the presence of the description as above.
(3) According to the above, a person ordinarily skilled in the art can work the
Present Invention on the basis of the matters described in the Detailed Description of
the Invention in the Description without excessive trials and errors, the determinationin the JPO decision with the same gist has no errors, and Ground for Rescission 2
asserted by the Plaintiff is groundless.
4. Ground for Rescission 3 (violation of clarity requirement)(1) The Plaintiff asserts that, as described in the aforementioned No. 3, 3(1),[0021] in the Description has the description that "In the magnetization curve, a steep
rising region is a magnetization process by movement of the magnetic domain wall,
while a gentle increasing region is a magnetization process by the magnetization
rotation.

A magnetic-field intensity when the magnetization rotation is started isdefined as an anisotropic magnetic field Hk.", and according to the definition as above,
the anisotropic magnetic field cannot be acquired unambiguously and thus, the"anisotropic magnetic field" in claim 1 according to Present Invention 1 is unclear.
However, as described in the aforementioned 2(3)C, regarding the significanceof "the magnetic wire has an anisotropic magnetic field of 10 G or less" in claim 1, it
has a meaning that the "magnetic wire" is "the magnetic wire for det ecting a magnetic
field having conductivity" and thus, the phrase "has an anisotropic magnetic field of 10
G or less" with "the magnetic wire" as the subject thereof is the "anisotropic magnetic
field of 10 G or less" as a physical property of the "magnetic wire", and the "anisotropic
magnetic field" having "the current intensity required for generating thecircumferential-direction magnetic field of 1.5 times or more of the anisotropic
magnetic field on the wire surface" is interpreted to have the meaning of the"anisotropic magnetic field of the magnetic wire installed on the board", while the"anisotropic magnetic field" asserted by the Plaintiff is a "magnetic field where themagnetic field reaches saturation in a magnetization curve in a hard axial dire ction","intensity of such a magnetic field that the spin is to be aligned in a certain direction",the "one expressing energy to align the spins in a specific direction in a crystal as amagnetic field", and "a general definition of the anisotropic magnetic field is a magnetic
field required to direct the direction of a magnetic moment to a magnetization hard35

direction" (see pp. 12 to 13 in the first preparatory proceeding by the Plaintiff) and thus,
it should be considered that the "anisotropic magnetic field" in claim 1 is not different
from the understanding of the "anisotropic magnetic field" as recognized by the Plaintiff
as above.

Then, even without considering the description in the Description, the"anisotropic magnetic field" in claim 1 according to the Present Invention 1 is not sounclear that would cause a third party to suffer from an unexpected disadvantage.
It is to be noted that [0021] in the Description has the description on thedefinition that "the magnetization intensity when the magnetization rotation starts as
the anisotropic magnetic field Hk", and this can be considered to be the description
related to a method of acquiring a specific value of the anisotropic magnetic field Hk,
but there is no description related to the method of acquiring the specific value of theanisotropic magnetic field.

Then, the "Magnetism Handbook" compiled by the

Magnetics Society of Japan (issued on January 30, 2016) has a description that "Hk isestimated from an intersection between a straight line (dotted line) along an inclinationof the magnetization curve from the origin and extrapolation of the saturated
magnetization" (Exhibit Ko 48, p. 499, right column, lines 16 to 18), and in light of thenature of this document, it can be found that the method as above has been generally
employed, while the Description has no description or suggestion which should beinterpreted that the method for calculating a value of the anisotropic magnetic field of
the Present Invention is different from that in the aforementioned document.
Therefore, the description on the "anisotropic magnetic field" in claim 1
according to the Present Invention 1 is not considered to be so unclear that would causea third party to suffer from an unexpected disadvantage, and the Ground for Rescission
3 asserted by the Plaintiff are groundless.
(2) Other than the above, the Plaintiff asserts defectiveness of various description
requirements, but it is only based on the assertion that the Present Invention cannot be
discriminated from the MI phenomenon on which the MI sensor is based without
grasping that the four matters (Present Matters) found in the JPO decision as one
technical idea by referring to imperfection in the description of the Description and thelike not on the basis of normal understanding of a person ordinarily skilled in the art,
which has no grounds, either.
5. Conclusion
According to the above, none of the grounds for rescission asserted by the
Plaintiff have grounds, and no illegality which should lead to rescission is found in the
JPO decision and thus, the claim by the Plaintiff shall be dismissed.
Therefore, the judgment shall be rendered as in the Main Text.
36

Intellectual Property High Court, Fourth Division
Presiding Judge:

Tadahiro

37

KANNO Masayuki

Judge:NAKAMURA Kyo

Judge:OKAYAMA(Attachment 1)[Detailed Description of the Invention][Technical Field][0001]The present invention relates to a micro magnetic sensor with super highsensitivity (hereinafter, referred to as a GSR sensor) based on a super high-speed spinrotation effect (GHz Spin Rotation effect in English notation, abbreviated as a GSR
effect).
[Background Art]
[0002]
Micro magnetic sensors with high sensitivity include a lateral FG sensor, avertical FG sensor, a Hall sensor, a GMR sensor, a TMR sensor, an MI sensor, a highfrequency carrier sensor, and the like.

An electronic compass using these principles

is currently employed for smartphones, automobiles, and the like and are widely used.
Hereafter, they are expected to be employed as a motion input device for a wearable
computer, and development thereof is accelerated.
[0004]The MI sensor (Patent Document 3) is based on an MI phenomenon (magneto impedance phenomenon) discovered in 1993.

In this phenomenon, a high frequencyof 1 MHz to 30 MHz or a pulse current is passed through a magnetic wire (diameter:
30 μm) or a magnetic thin film having two structures; that is, a surface magnetic domain
magnetized in a circumferential direction of a surface (thickness is approxi mately 0.2μm) and a core magnetic domain magnetized in an axial direction of a center part so as
to vibrate a 90-degree magnetic domain wall.

This results in an electromagnetic

phenomenon in which an average depth of the vibration of the magnetic domain wall is
1 μm to 4 μm, a circumferential-direction magnetic permeability increases in proportion
to an increase in the magnetization, a skin depth is remarkably reduced, and a magnetic
impedance of the wire is drastically changed.

It is a type in which an external

magnetic field H is acquired from a change amount of the impedance (AC resistance).
Penetration of the 90-degree magnetic domain wall into the core magnetic
domain causes the spin in the core magnetic domain to rotate in the circumferential
direction; that is, the rotation of the magnetization changes the magnetization and thus,
an influence of a demagnetizing field is smaller than that of the FG sensor.

As a result,a large reduction of a length of the magnetic wire from 50 mm to 5 mm was realiz ed.
Moreover, an output characteristic was strongly affected by hysteresis of the wire
and moreover, it had defects of antisymmetric nature and nonlinearity.
38

These

problems were solved by using a negative feedback circuit, but there was a problem inpower consumption.

The MI sensor art is introduced in detail in "Magnetic Sensor

Science and Engineering" by Professor Mori (CORONA PUBLISHING CO., LTD., by
Kaneo Mori, 1998).
[0005]The MI sensor of a coil detection type (Patent Document 4; 1999) is of an
improved type in which the MI phenomenon is detected by a coil, and a linear output
was realized.

The structure thereof is the same as that of the vertical FG sensor.

Atenergization of the pulse current, the 90-degree magnetic domain wall penetrates into
the core part by the circumferential-direction magnetic field, the axial magnetization
rotates in the circumferential direction, and a change in the magnetization in the axial
direction occurs.

This change is detected by the coil.

The penetration of the 90-

degree magnetic domain wall is determined by intensity of the passed current, afrequency, magnetic permeability of the wire, and the like, and is approximately 1.3 μm
to 4 μm.

Since the FG sensor uses the rotation of magnetization of the entire material,

it is proportional to a volume of the wire, which is a magneto-sensitive body, but sincea high frequency of 10 MHz is used in the case of the MI sensor, the skin depth is very
shallow, and the output is proportional to the diameter.

For a higher sensitivity, theFG sensor needs an increase of a wire length, but since the MI sensor utilizes a highfrequency to realize the higher sensitivity, the magnetic wire with the diameter of 30
μm can be drastically downsized with a length of the FG sensor from 5 0 mm to 3 mm.
The coil inner diameter was 3 mm.
Regarding the coil-type MI sensor, since its structure is the same as that of the
FG sensor, there is an opinion that it is an improved type of the FG sensor, but by
considering that the applicable frequency is high, and the electromagnetic phenomenon
as the vibration of the 90-degree magnetic domain wall is detected, it should beconsidered to be an improved type of the MI sensor.

However, the negative feedback

circuit is used for the hysteresis reduction and thus, the power consumption became
larger, which was a problem.
[0006]
Subsequently, by using an MI element manufactured by a MEMS process, there
was developed the downsized coil-detection type MI sensor (Patent Document 5) withthe magnetic wire with the diameter of 12 μm and the length reduced to 0.6 mm andmoreover, the coil inner diameter of 30 μm.

By means of this, reduction of current

consumption was aimed at by changing a pulse waveform from a triangular wave to a
trapezoidal wave simultaneously with the downsizing, by removing an influence of the39hysteresis by executing pulse magnetic-field annealing processing, and by omitting thenegative feedback circuit.

Moreover, an anisotropic magnetic field of the magnetic

wire was made extremely large to 20 G so as to enlarge a measurement range to ±10 G.
It is applied and merchandized to an electronic compass (product name: AMI306) andthe like as an improved type sensor of the MI sensor.
[0007]
However, when the anisotropic magnetic field is made larger, the magnetic
permeability μ becomes extremely small to approximately 1000, whereby the sensitivity
is drastically lowered.

In order to supplement the lowered sensitivity, the frequency

is increased from 30 MHz to 200 MHz.

At the same time, in order to generate acircumferential magnetic field which overcomes the large anisotropic magnetic field,
the pulse current is increased from 10 mA to 200 mA.
In the case of a high frequency of 200 MHz, it is difficult to move the 90-degree
magnetic domain wall, which is present on an interface between the surface magnetic
domain and the core magnetic domain.

Thus, by paying attention to a fall of the

trapezoidal-wave pulse, the 90-degree magnetic domain wall is present at a deep
position inside the core immediately before the fall, and when the current is shut off,the circumferential-direction magnetic field is no longer present inside the skin depth,
and the 90-degree magnetic domain wall can start moving.

However, themagnetization rotation proceeds slowly in a relaxation phenomenon manner due to anelectromagnetic brake generated by the movement itself of the magnetic domain wall.
On the other hand, the spin directed to the circumferential direction in the surface
magnetic domain produces magnetization rotation by power of the external magnetic
field against the anisotropic magnetic field in the circumferential direction.

These twoelectromagnetic phenomena are mixed and taken out as a voltage by a coil.
The thickness of the surface magnetic domain is made as thin as possible, a
rectangular-wave shaped pulse is passed therein, the thickness of the surface magnetic
domain is made larger by the power of the circumferential-direction magnetic field andthen, the current is shut off, and at that time, the 90-degree magnetic domain wall moves
to the vicinity of the original surface, and the rotation of the magnetization generated
at that time and the magnetization change in the axial direction are detected by the coil.
By means of the deep penetration of the 90-degree magnetic domain wall into the wire
center part, the hysteresis disappears.

As a result, the negative feedback circuit issuccessfully omitted.
[0009]
Currently, the micro magnetic sensor with high sensitivity is expected to develop40

as a motion input device of a wearable computer from the electronic compass such as asmartphone.

For that, higher sensitivity from 2 mG to 0.2 mG, enlargement of themeasurement range from ±10 G to ±40 G, downsizing from 0.6 mm to 0.2 mm, andfurther lower current consumption are strongly demanded.

In terms of performanceindexes, K=0.2 mG, W=40 G, L=0.2 mm, D=0.01 mm, which makes S=100,000, andan exponential improvement of approximately 100 times that of the coil-type MI sensor
using the MEMS-type element is demanded.
[0010]In order to solve the problem, the inventor studied the MI sensor (Patent
Document 6; 2009) with higher sensitivity by raising the frequency on the basis of theaforementioned product AMI306.

When the pulse frequency was increased from 0.2

GHz to 0.5 GHz, the output was improved by a factor of approximately two fold, butwith the high frequency higher than that, the output hits the upper limit and decreases.
However, technical problems involved in the higher frequency occurred andcommercialization was not realized.

That was because problems such as a technicalproblem of a high-frequency pulse oscillation circuit, a problem of an increase in anelectromagnetic induced voltage involved in the higher frequency, and the like occurred,and comprehensive merits could not be found.
Thus, the MI sensor was reviewed from all the viewpoints, including themagnetic wire, a detection coil, an excitation pulse, a detection circuit, and ameasurement principle, and the development of the micro magnetic sensor with superhigh sensitivity was started.
[Citation List][Patent Documents][0012][Patent Document 1] U.S. Patent No. 2,856,581 Description[Patent Document 2] Japanese Patent No. 2617498[Patent Document 3] Japanese Patent No. 3197414[Patent Document 4] Japanese Patent No. 3645116[Patent Document 5] Japanese Patent No. 3801194[Patent Document 6] Japanese Patent No. 4655247[Patent Document 7] International Publication No. WO2014/115765[Non-Patent Documents][0013][Non-Patent Document 1] "Magnetic Sensor Science and Engineering": CORONA
PUBLISHING CO., LTD., by Kaneo Mori, 1998
41

[Non-Patent Document 2] "New Magnetic Sensor and Its Applications": Triceps Co.,
Ltd., Kaneo Mori, 2012
[Summary of Invention][Problems to be Solved by the Invention][0014]A problem of the present invention is to find a principle and an embodying
condition of a magnetic sensor which realizes performance improvement ofapproximately 100 times that of an MI sensor.

For that purpose, in a micro magnetic

sensor with a super high sensitivity with a basic configuration of a magnetic-field
detection element in which a magnetic wire for detecting a magnetic field having
conductivity, a circumferential coil wound around it, two electrodes for wire conduction,and two electrodes for coil voltage detection installed on a board, means for causing apulse current to pass through the magnetic wire, a circuit for detecting a coil voltage
generated when the pulse current is caused to pass, and means for converting a coilvoltage to an external magnetic field H, the inventor conducted comprehensive study
on magnetic characteristics of the wire, downsizing of the magnetic-field detection
element or particularly refinement of a detection coil, a frequency and a shape of thepulse, an electromagnetic phenomenon occurring inside the wire, electromagnetic
coupling with the coil, a processing method of the coil voltage, relationship between
the coil voltage and the magnetic field, and the like.
[0015]
Regarding the wires, instead of a conventional tension-heat processed wire, awire with glass was employed.

The magnetic-field detection element has a coil pitchof 30 μm to 10 μm or less, the coil inner diameter is reduced from the conventional 30
μm to 15 μm or less; that is, refinement of the wire diameter of 1.5 times or less, thepulse has a trapezoidal shape and a frequency of the rise at 0.5 GHz to 4 GHz, the pulse
current intensity at 50 mA to 300 mA, and the inventor carried out, as full -scaleexaminations, studies on the relationship between the electromagnetic phenomenon
induced by the pulse current and the coil voltage and the relationship between the coilvoltage and the magnetic field, and moreover, a problem of a voltage drop by the coilvoltage and the coil induction current, a problem of an indued voltage by the highfrequency pulse, review of a signal detection method, examination of a temperaturecorrection method, investigation of a mathematical relationship between the coilvoltage and the magnetic field and the like.
[Means for Solving the Problem][0016]
42

The inventor has made a detailed search on the magnetic characteristics of thewire, the size of the magnetic wire, the coil winding number, and the pulse current
characteristic affecting the relationship between the coil output voltage and the external
magnetic field H and as a result, found that an experimental formula as a formula (1)exists between the voltage generated by the coil and the external magnetic field whena trapezoidal pulse with a frequency of 0.5 GHz or more is given to a fine coil using amagnetic wire having a two-phase structure of the surface magnetic domain and thecore magnetic domain and the anisotropic magnetic field at 5 G in the sensor of thepresent invention:
Vs=Vo·L·πD·p·Nc·f·sin(πH/2Hm) ... (1)[0017]
Here, Vs is a coil output voltage, Vo is a proportional constant determined bymagnetic characteristics of wire magnetic permeability, a saturated magnetic-flux
density of a wire material, a pulse current intensity, and the like, and as contro l factor
constants, L is a length of the wire, D is a diameter of the wire, p is a skin depth of thepulse current, Nc is a coil winding number, f is a pulse frequency, H is an external
magnetic field, and Hm is an external magnetic-field intensity at which the coil output
voltage takes a maximum value.
[0018]
Assume that the spin which has been forced in the circumferential direction by
an internal magnetic field in the circumferential direction existing in the surface
magnetic domain of the magnetic wire is inclined by the external magnetic field H onlyby θ.

When the pulse current with the frequency of 0.5 GHz or more is applied in thisstate, the spin is rotated simultaneously by θ in the circumferential direction.

When

this magnetic change is detected as a coil voltage, it is:
V=Vosin2θ ... (2)Therefore, it can be considered that the experimental formula (1) detects thesimultaneous high-speed rotation of the spin.

That is, the MI sensor detects themagnetization rotation by the movement of the 90-degree magnetic domain wall evenwith the same skin effect, but the inventor considers that the sensor of the present
invention is a totally new principle for genuinely detecting only the rotation of the spinin the surface magnetic domain; that is, a new-type GSR sensor based on the super highspeed spin rotation phenomenon.
On the basis of this principle, as will be introduced in detail in the following
Embodiment 1, as compared with the MI sensor, the coil output is drastically improved
such that a trial calculation with a performance index gave K=0.2 mG, W=40 G, L=0.2
43mm, D=0.01 mm, and S=100,000, and it was found that a tremendous improvement ofapproximately 120 times that of the coil-type MI sensor can be realized.
[0019](1) First, a relationship among a spin angle θa and a coil output, which are bases of the
new principle, and the external magnetic field will be explained.
The coil voltage when the super high-speed spin rotation is to be detected by acoil is proportional to a temporal change of a magnetic flux Φ.

That is, V=-dΦ/dt.

The magnetic flux Φ x0(θ) at a rotation start timing (time t=0) with a spin
inclination angle θ is ms·L·πD·d·sinθ.

Since an angular speed is constant at dθ/dt=2πf(here, f is a pulse frequency), a change speed of φx in an X-axis direction at a momentof rotation start is dΦx(θ)/dt=dφx(θ)/dθ·dθ/dt=cosθ·2πf.
Since the magnetic flux Φ x0(θ) has a change speed of cosθ·2πf, V=dΦ/dt=φ0(θ)·dφx(θ)/dt.

By substituting the values of φ0(θ) and dφx(θ)/dt for this,

V=-dΦ/dt=-ms·L·πD·d·sinθ·cosθ·2π/T=-φ0·sin2θ and thus, the coil output voltage is
proportional to sin2θ.
The coil output and the external magnetic field H are present in a sine functional
relation, and under the condition performed by the inventor, it is considered to detect
only the simultaneous rotation of the spin.
[0020]
Here, since it was experimentally found that the coil output and the external
magnetic field are sin (πH/2Hm) as shown in formula (1), it is expected to become
formula (3).
θa=πH/4Hm ... (3)On the other hand, however, the conventional spin angle θb can be defined as informula (4) by an actual internal magnetic field Hin acquired by excluding an influenceof the demagnetizing field from the magnetic field H related to the magnetic w ire andthe angle determined by the anisotropic magnetic field Kθ in the circumferential
direction.
tanθb=Hin/Kθ ... (4)If experimental formula (1) detects the spin angle, θa and θb need to match.
Hereinafter, the fact that the two match each other will be proven.
[0021](2) Before the explanation, as the characteristics of the used magnetic material,
the axial-direction magnetization characteristic 10 of the magnetic wire is shown in Fig.
1a), and the coil output-voltage characteristic as the circumferential-direction
magnetization characteristic 11 in Fig. 1b).
44

In the magnetization curve, a steep rising region is associated with amagnetization process by movement of the magnetic domain wall, while a gentle
increasing region is associated with a magnetization process by the magnetization
rotation.

A magnetic-field intensity when the magnetization rotation is started isdefined as an anisotropic magnetic field Hk.

In the magnetization M=χH, anapproximation of χ is expressed in a formula (5).

When the magnetic permeability μof the magnetic wire changes from 200 to approximately 40,000, β in the approximation
correspondingly changes from 0.07 to approximately 0.7.
χ=χ°{1-β×(H/Hk)2} ... (5)In the magnetic characteristic of the magnetic wire, the demagnetizing field iszero (in the case of an endless length wire), and the external magnetic field H matches
the internal magnetic field Hin, but with a limited length wire, the demagnetizing field
becomes stronger to Hin=H-NMs (here, Ms=χH) and thus, by correcting H to Hin byusing formula (2), formula (6) is acquired:
Hin=H{1-Nχ°+βNχ°(H/Hk) 2} ... (6)[0022]
The coil output monotonously increases in accordance with formula (1) as theexternal magnetic field H increases, and the external magnetic field H takes a maximum
output at Hm and after that, shows a gradually decreasing tendency.
matches the axial-direction magnetization characteristic Hk.
is a relation of Hm=αHk, α=0.96.

Hm substantially

Strictly speaking, there

This is because, when the external magnetic field

H=Hk, the core magnetic domain is saturated, and the spin of the surface magnetic
domain takes a maximum inclination of 45 degrees.

Since the surface magnetic

domain has a smaller demagnetizing field, the spin on the outermost surface reaches 45
degrees before the core part is saturated.
than Hk.

Therefore, Hm has a value slightly smaller

When the external magnetic field H is loaded more than Hk, the 90 -degree

magnetic domain wall existing on the interface with the core magnetic domain moves,and the magnetization created by the entire surface magnetic domain is decreasing.
The spin maintains the inclination of 45 degrees but disappears in the end.
[0023]The pulse current was assumed to have a current intensity sufficient to re alize
the magnetization saturation in the circumferential direction and a pulse frequency of
0.5 GHz to 4 GHz as the frequency (the pulse frequency was defined by f=1/2 dt, here,a transition time at rise and fall moments was set to dt.).

As a result, the skin depth ofthe current was controlled to 0.2 μm to 1 μm so as to be equal to or smaller than the
thickness of the circumferential surface magnetic-domain.
45

The pulse time interval

was set to a length of 5 n seconds, which is sufficient to be able to av oid coil signal
interference.
[0024]
When the external magnetic field H in the wire axis direction is applied to an
amorphous wire having the aforementioned two-phase magnetic domain structure, thecircumferential-direction spin in the circumferential surface magnetic-domain is
inclined in the axial direction approximately by angle θ, and the magnetization Ms(=Ns·ms·sinθ) is generated in the axial direction.

Ns is a spin number per unit volume

in the surface magnetic domain, and ms is the magnetization of the spin.

In the coremagnetic domain at the center part, the magnetic domain wall moves, and themagnetization Mc is generated.
[0025]
When the aforementioned pulse current is passed through the wire in this state,
the spin is rotated at a super high speed (referring to that within a pulse transition timedt) simultaneously in the circumferential direction by a large circumferential magnetic
field of approximately 60 G created by the pulse.

The magnetization change of thewire generated at that time is detected as the coil output voltage Vs.

The coil output

voltage is proportional to the frequency, while the skin depth becomes smaller by f -1/2,
and the coil output increases in proportion to f/p=f 1/2 by combining the two effects.
When the two are combined in proportion to the coil winding number Nc, an
extraordinary output is obtained.
This super high-speed spin rotation effect is expected to be a new principle of afuture super high-sensitive micro magnetic sensor.

It is to be noted that themagnetization Mc of the core magnetic domain part is not influenced by the skin effect,
and no movement of the magnetic domain wall is generated.
[0026](3) Subsequently, a relationship between the spin rotation angle, the magnetic
field, and the coil output voltage when the super high-speed spin rotation phenomenon
is detected by the coil will be explained.
The coil output voltage is proportional to the temporal change of the magnetic
flux Φ and the coil winding number Nc of the magnetic flux Φ.

Assume that th e spin

having been forced by the external magnetic field H in the circumferential direction is
inclined only by θ.
ms·L·πD·d·sinθ.

The magnetic flux Φ at the time t=0 is proportional to

At the moment of the rotation start, a temporal change of the angledθ/dt is proportional to cosθdθ, which is differentiation of sinθ.

It is considered thatthe rotation is made only by the angle θ at a rotation speed dθ/dt acquired at the46

beginning of the rotation and thus, a change amount of the magnetic flux Φ at that timeis proportional to cosθ.

As a result, a maximum amount of the coil voltage is

proportional to ms·L·πD·d·sinθ·cosθ.

That is, it is proportional to sin2θ as in formula(7).
V=VoNc·sin2θ ... (7)Since it was experimentally found out that the coil output and the magnetic field
are sin(πH/2Hm) as shown in formula (1), it becomes θ=πH/4Hm, and the inclination
angle θ of the spin can be acquired.

By assuming that θ acquired from the data of thecoil output voltage is θa, formula (8) is acquired:
θa=πH/4Hm ... (8)[0027]
Intrinsically, the inclination angle θ of the spin is an angle determined by theactual internal magnetic field Hin excluding the influence of the demagnetizing fieldfrom the magnetic field H applied to the magnetic wire and the anisotropic magnetic
field Kθ in the circumferential direction.

When a theoretical angle θ is assumed to beθb, it can be defined as in formula (9):tanθb=Hin/Kθ ... (9)A peak value at which Vs takes a maximum value is when θ is 45 degrees andthus, it is when Hin=Kθ.

At this time, it is Hin={1-(1-β)Nχ°}Hk and as a result, thefollowing can be acquired:Kθ={1-(1-β)Nχ°}Hk ... (10)When Hin in formula (6) and Kθ in formula (10) are substituted in tanθb=Hin/Kθ,formula (11) is acquired.
tanθb=H/Hk{(1-Nχ°)+βNχ°(H/Hk)2}/{1-(1-β)Nχ°} ... (11)[0028]As the result of the aforementioned examination, both the angle θa=πH/4Hm
acquired from the experiment result of the coil output and the spin inclination angle
θb(tanθ=Hin/Kθ) given by theoretical expectation from basic data specific to thematerial exist.

Thus, it will be explained that θa defined in formula (3) and θb definedin formula (6) match each other.
[0029]
Since θa is defined by Hm, and θb is defined by Hk, first, a relationship between
Hk and Hm will be explained in detail.

As experimental facts, Hm=αHk is established,and α is approximately 0.96, here.
[0030]
The anisotropic magnetic field Hk is a value indicating a change point in a47

process from end of the movement of the magnetic domain wall and st art of themagnetization rotation finally to saturation.

In the case of the magnetic wire, whenthe external magnetic field H increases to Hk, the core magnetic domain reaches
saturation.

The spin in the surface magnetic domain is inclined in the axial d irection

and reaches 45 degrees.

When the external magnetic field H increases to Hk or more,

the increase in the magnetization in the axial direction progresses in a form such thatthe 90-degree magnetic domain wall penetrates into the surface magnetic domain.
During this time, the spin is held at 45 degrees.

Since the magnetic field when thespin is held at 45 degrees is Hm, it should be Hk=Hm.

However, at this time, themagnetic field is different between the core magnetic domain and the surface magne tic
domain, and the internal magnetic field, which is an effective magnetic field where thespin is inclined, is different.

Regarding the demagnetizing field in the surface

magnetic domain, since the demagnetizing field is formed by a leakage magnetic fie ldof the saturated core part, it is slightly smaller than the core magnetic domain.

Hmreaches the required internal magnetic field with a value smaller than Hk.

In themagnetic field Hm at this time, the anisotropic magnetic field Kθ in the circumferential
direction and the internal magnetic field are balanced with each other, and the spin takes
an inclination angle of 45 degrees.

As a result, it is Hm=0.96×Hk.

[0031]The spin on the outermost surface in the surface magnetic domain becomes 45
degrees when a value of the magnetic field H is slightly smaller than Hk, but at a spot
closer to the magnetic domain wall at a boundary with the core magnetic domain, it has
not reached 45 degrees yet.

On the contrary, when the external magnetic field H

becomes slightly larger than Hk, the spin on the outermost surface holds 45 degrees,
the magnetic domain wall moves in a surface direction, the saturated core magnetic
domain part becomes thicker, while the surface magnetic domain becomes thinner, andthe magnetization in the axial direction becomes bigger.

The external magnetic field

Hm in which the spin on the outermost surface becomes 45 degrees becomes slightly
smaller than the magnetic field Hk at which the spin on the entire surface magnetic
domain is balanced with the anisotropic magnetic field and becomes 45 degrees.
[0032](4) As the relationship between the Hk and Hm can be grasped and subsequently,
the fact that θa defined in formula (8) and θb defined in formula (9) are matched witheach other will be explained.
By taking tan in θa=πH/4Hm, tanθ can be approximated by the following
formulas:48

tanθ=θ(1+1/3×θ2) ... (12)tanθa=(H/Hm){π/4+1/3×(π/4) 3(H/Hm)2} ... (13)On the other hand, by substituting Hm=αHk in formula (11), formula (14) is
acquired:tanθb=(H/Hm){α(1-Nχo)+βNχoα3(H/Hm)2}/{1-(1-β)Nχo} ... (14)[0033]
Formula (13) and formula (14) have the same function form.

When H is small,a quadratic term can be ignored, and linear terms of the two are equal.

Whencalculated with α=0.96, Nχ is acquired as in formula (15):oNχo=1/(1+4.49β) ... (15)Subsequently, when H is large, by comparing the quadratic terms of the two witheach other, it can be confirmed that the two are equal, when a conditional expression(15) is established.

That is, when α = 0.96 and the conditional expression (15) areestablished, tanθa=tanθb is acquired, and θa=θb.
[0034]
Here, Nχo takes a value from 0.25 to 0.77 or the like, and its physical meaning
will be examined.

A relation between effective magnetic permeability μeff and ademagnetizing coefficient N is known to have the relation expressed by the following
formula (13):Nμeff=1-(μeff/μr) ... (16)Here, μr is magnetic permeability specific to the material.
For an ideal magnetic material, μr=∞, and Nμeff=1.
material, it lowers to Nμeff=0.2 to 0.8.

For the actual magnetic

Regarding magnetic materials used this time,

the anisotropic magnetic field Hk is 5 G, μr=32000, and the anisotropic magnetic field
when incorporated in an element is 40 G, μeff=600, and Nμeff=0.8.
Moreover, μr of the amorphous wire used is 4,000, and regarding μeff, when thelength of the wire is changed so as to change the effective magnetic permeability from3000 to approximately 920, it changes from Nμeff=0.25 to approximately 0.77.
Moreover, since it is μ=χ+1 (μ and χ are sufficiently larger than 1), when it isapproximated to χ o≈μeff, Nχ o=Nμeff is acquired.
[0035]As the result of the aforementioned examinations, when the inclination angle θof the spin is directed to a synthesized direction of the anisotropic magnetic field in thecircumferential direction and the internal magnetic field Hin and is rotated in thecircumferential direction from that angle, a coil output voltage given by formula (1) canbe obtained.

That is, it was made clear that the inclination angle of the spin is a source49

of the coil output.
The angle is determined by a ratio of the internal magnetic field Hin applied tothe spin in the surface magnetic domain and the anisotropic magnetic field in thecircumferential direction, but how to control is important.

The larger the anisotropic

magnetic field, the more difficult for the spin to be inclined, which requires a large
external magnetic field.

Moreover, even if the external magnetic field is made larger,

it is difficult to make the internal magnetic field in the surface magnetic domain larger.
That is because, under the 2-phase structure of the surface magnetic domain and thecore magnetic domain, the core part performs magnetic-domain wall movement in asmall external magnetic field, is easily magnetized, and generates a large demagnetizing
field.

That is because the spin in the surface magnetic domain is strongly subjected to

an influence also from the core magnetic domain with the leakage magnetic field as thedemagnetizing field.

Therefore, it is important to make the anisotropic magnetic fieldas small as possible so that the spin can be greatly inclined in the small internal
magnetic field.
[0036](5) How to control the inclination angle of the spin in the surface magnetic
domain of the magnetic wire will be explained first from the relationship between the
inclination angle of the spin and the external magnetic field.
Fig. 2 illustrates a spin structure of the magnetic wire by being divided into awire axial-direction section 12 and a section 13.

The spin in the surface magnetic

domain 14 is directed to the circumferential direction, and the spin in the core magnetic
domain 15 is directed to the axial direction and is divided into four parts of therightward spin 16 and the leftward spin 17.

A change in the spin structure when theexternal magnetic field H is applied is illustrated.
a) In the case where the external magnetic field H=0, the magnetic domain
structure 15 of the core part is symmetrically divided into four magnetic domains withthe spins directed to positive and negative in the axial direction, and the magnetization
M is zero.

All the spins in the surface magnetic domain 14 are aligned in a pulse -magnetized direction in the circumferential direction.
b) When the external magnetic field of approximately H=Hk/2 is applied, themagnetization having the spin 17 directed to an application magnetic field of the coremagnetic domain 15 becomes thicker, while that of the spin 16 in the opposite di rection
becomes thinner, whereby the magnetization M=χH is generated, and a large
demagnetizing field is created.

All the spins 18 in the surface magnetic domain are

inclined to the direction of the application magnetic field H, and can be acquired from50θ in experiment formula (1), and the inclination angle θ is θ=πH/4 Hm.

A target regionof the GSR sensor is from zero to Hm, and the sensor output is determined by thedemagnetizing field determining θ, the anisotropic magnetic field Kθ in thecircumferential direction.

Moreover, it is known that a spin total amount determinedby a rotation speed of θ depending on the pulse frequency and a thickness and a surface
area of the surface magnetic domain is important.
c) When the external magnetic field H=Hk is applied, the spins in the coremagnetic domain are all aligned in the direction of the application magnetic field.

Allthe spins in the surface magnetic domain are inclined by an inclination angle of 45
degrees to the direction of the application magnetic field H.

At Hm=0.96 Hk, which

is a value slightly smaller than Hk, the spin on the outermost surface part is inclined by
45 degrees, and the coil output takes a maximum value.

On the contrary, when H

becomes Hk or more, while the inclination angle of the spin stays at 45 degrees, aboundary magnetic-domain wall between the core magnetic domain and the surface
magnetic domain starts moving to the outer side, the thickness of the surface magnetic
domain is getting smaller, and the coil output begins to lower.

The measurement range

is defined by Hm.
d) When the external magnetic field H which is sufficiently larger than Hk isapplied, all the spins in the core part are aligned in the direction of the application
magnetic field and moreover, the magnetic domain wall between the core part and thesurface magnetic domain moves to the outer side, and finally, the surface magnetic
domain disappears or becomes extremely thin.
measurement range of the GSR sensor.

It takes a magnetized state outside theSince Hk and Hm take substantially the samevalue, when the external magnetic field H further increases from Hk, the spin on theoutermost surface is fixed stronger than that staying at 45 degrees, indicating resistanceagainst the pulse circumferential magnetic field, and the coil output lowers.

At thesame time, it is expected that the thickness of the surface magnetic domain starts
decreasing, and the coil output starts reducing.
[0037]
When the external magnetic field H is small; that is, when the spin angle θ isequal to or smaller than 0.2 radian (12 degrees), the coil output is proportional to theexternal magnetic field H.

In other words, it is the case of 0.2 Hk or less.

On thecontrary, when the external magnetic field H becomes larger than the anisotr opic
magnetic field Hk, the core-part magnetic domain becomes thicker, while the surface
magnetic domain becomes thinner, and the coil output lowers.

While H is from 0.2

Hk to Hk, H can be acquired from the coil output voltage by using formula (1).
51

[0038](6) Subsequently, a condition under which the super high-speed spin rotation
phenomenon, which is a new electromagnetic phenomenon, emerges will be explained.
It will be explained that the emergence condition is, by using the magnetic wire in which
the surface magnetic domain having the circumferential-direction spin alignment on thesurface exists, an excitation pulse having a sufficiently large current with a frequency
of GHz which is applied so that the skin depth p is smaller than the thickness d of thesurface magnetic domain, the simultaneous rotation of the circumferential -direction
spin is brought about, and the change is detected by a fine coil.
[0039]
As causes of the coil output voltage, the magnetization rotation by movement of
the 90-degree magnetic domain wall and the spin rotation of the surface magnetic
domain are considered.

The 90-degree magnetic domain wall can move in the small

magnetic field, but it becomes extremely slow due to an electromagnetic brake by aneddy current, when the frequency becomes high.

On the other hand, in the spinrotation in the surface magnetic domain, the spins rotate simultaneously in a group, andthe movement completes instantaneously.

The number of spins participating in therotation is limited, and an output signal is very weak.
[0040]In the MI phenomenon, the 90-degree magnetic domain wall, which is aboundary between the surface magnetic domain and the core magnetic domain, ispresent on the outermost surface and vibrates with a width of the skin dept h p (In thiscase, 1 μm to 4 μm) in a frequency range from 1 MHz to 30 MHz.

The thickness ofthe surface magnetic domain is considered to be 0.2 μm to 0.8 μm.

When thefrequency increases to 0.5 GHz or more, the movement of the 90-degree magneticdomain wall becomes extremely slow due to the electromagnetic brake by the eddy
current.

Moreover, the skin depth p becomes 0.2 μm to 0.8 μm, which isapproximately the thickness of the surface magnetic domain, and the vibration of themagnetic domain wall stops.
On the other hand, the GSR phenomenon brings about the simultaneous rotationof the surface spins with the thickness of the surface magnetic domain at 1 μm, thefrequency at 0.5 GHz or more, the magnetic permeability of the magnetic wire at 3000
or more, and the skin depth at approximately 0.2 μm.
[0041]
As is known from formula (1), when the thickness d of the surface magnetic
domain is approximately 1 μm and the skin depth p is from 0.1 μ to 1 μ or less, the coil52

output voltage is proportional to the square root of the frequency.

The reason is thatthe skin depth p, which is the depth of the spin rotation, is proportional to an inverse
number of the square root of the frequency.

On the other hand, when the thickness d

is 0.2 μm, which is smaller than the skin depth p, the depth of the spin rotation does not
penetrate to p but is fixed at a position d of the 90-degree magnetic-domain wall andthus, they become constant as p = d, and the coil output voltage is linearly proportional
to the frequency.

In an experiment using a wire with glass, it is considered that asufficient depth is provided, since the coil output voltage is proportional to the squareroot of the frequency, and the thickness of the surface magnetic domain isapproximately 1 μm.
[0042]The magnetic wire which was used is a magnetic wire with high magnetic
permeability formed of a magnetic Co alloy and having a diameter of 10 μm, anamorphous structure, and weak negative magnetostrictive characteristics, withmagnetic anisotropy of 1 G or 5 G, and relative permeability of 20,000 and 3000.

A

tensile stress was loaded to the wire, and the magnetic anisotropy Ku and the magnetic
anisotropy Kθ were caused to be generated in the axial direction and the circumferential
direction, respectively to thereby form a 2-phase magnetic domain structure of thecircumferential surface magnetic-domain having the circumferential-direction spinalignment and the center-part core magnetic domain having the axial-direction spinalignment.

The skin depth p of the pulse current was controlled such that the thickness

d of the surface magnetic domain was approximately 1 μm, by considering the surface
depth p of 0.5 μm.
Moreover, a magnetic field exceeding 1.5 times of the anisotropic magnetic field
Hk was generated by a sufficiently large pulse current, a pulse magnetic-field annealing
processing was performed at every measurement, magnetization was saturated in thecircumferential direction, and a magnetization history was erased.
[0043]
Undertheaforementioned

condition,

only

the

phenomenon of the spin can be genuinely brought about.

simultaneousrotation

In order to detect a very

weak and high-speed signal with a coil, a fine coil is needed.

A coil pitch per unit

length is set to 30 μm to 10 μm or less, a coil inner diameter to 15 μm or less, and aninterval between the magnetic wire and the coil to 10 μm to 3 μm or less of the coil type MI sensor so that electromagnetic coupling between the wire and the coil was
reinforced, and the output voltage in proportion to the coil number N could be
successfully acquired.
53

[0044](7) A super high-speed spin-rotation effect type GSR sensor and a coil detection
type MI sensor will be compared so as to make characteristics of the new principle clear.
The MI sensor uses such a phenomenon that, when a high-frequency current ora pulse current with a frequency of 1 MHz to 30 MHz is passed through a magnetic
wire or a magnetic thin film in the external magnetic field H, impedance is greatlychanged due to a skin effect.

When the 90-degree magnetic domain wall existing at

the boundary between the surface magnetic domain and the core magnetic domain
vibrates, the magnetic permeability largely depends on the external magnetic field H
and changes, makes the skin depth smaller, and brings about a large impedance change.
From the change amount, the external magnetic field H is detected.

An excellent

sensitivity of 1 mG is realized with a sensor having a sensor length of 5 mm.
[0045]The output has a non-linear characteristic that it is positive/negative symmetricto the external magnetic field and moreover, shows a monotonic increase to the size ofthe external magnetic field but gradually decreases at a certain critical magnetic fieldor more.

Moreover, since the output is strongly subjected to an influence of hysteresisof the magnetic wire, it has a premise that, by using a negative feedback circuit, an
output which is linear and small in hysteresis is acquired from the current strength of
the feedback.
The FG sensor, which is a prior art, takes a coil output voltage in proportion to
the external magnetic field H by using a magnetic material of permalloy or the likehaving a general magnetic-domain structure and using an AC current with the frequencyof 30 KHz.

The MI sensor was an epoch-making invention which realized highperformance of approximately 1000 times by utilizing a high frequency of 30 MHz.
An epoch-making invention that a 90-degree magnetic-domain wall existing at aboundary between the surface magnetic domain and the core magnetic domain vibrates
was the basis thereof.
[0046]The improved-type MI sensor with a coil developed by the inventors is a typewhich succeeded in reduction of current consumption by omitting a negative feedback
circuit through execution of the pulse magnetic-field annealing by giving a trapezoidalshaped pulse current.

Moreover, by manufacturing the MI element by the MEMS

process, the length was made smaller, from 3 mm to 0.6 mm.

By raising the pulse

frequency to 200 MHz, improvement of the coil output was promoted.

At the sametime, the anisotropic magnetic field of the magnetic wire was made remarkably large to54

20 G so as to enlarge the measurement range.

By promoting the size reduction andthe enlargement of the measurement range as above, the sensitivity in a trade-off
relationship is greatly lowered to 2 mG.

Improvement of the sensitivity and further

size reduction/enlargement of a measurement range are future challenges.
[0047]
The frequency of 200 MGz exceeds a frequency range where the MI phenomenon
emerges.

Thus, by using a fall of a pulse of the trapezoidal-shaped pulse current, themovement of the 90-degree magnetic-domain wall was made possible.

The 90-degree

magnetic-domain wall having penetrated into the core slowly moves to a surface
direction by a power of the external magnetic field with disappearance of thecircumferential-direction magnetic field when the pulse is shut down.
On the other hand, at the fall of the pulse, with the disappearance of thecircumferential-direction magnetic field, the spin in the surface magnetic domain starts
to be inclined, but the inclination is small by the strong anisotropic magnetic field, andthe rotation speed is also slow, whereby an increase in the coil output is suppressed.
The coil output is mainly caused by the movement of the 90-degree magnetic domain
wall, which is the MI phenomenon, but an influence of the spin rotation, which is the
GSR phenomenon is also partially detected.
[0048]The maximum value of the coil output voltage based on the MI effect is
proportional to the external magnetic field H.

Since the MI phenomenon and the GSR

phenomenon are mixed in this method, the linear range is made small to approximately
1/3 of the measurement region.

On the other hand, the output of the GSR sensor canbe used in all the ranges in the measurement region by arithmetic processing, since a
clear mathematic equation is established.
[0049]
An electronic circuit of the MI sensor accumulates a coil current in a capacitorof an integration circuit, receives a coil signal, acquires an integrated voltage thereof,
acquires a maximum value thereof in a peak-hold circuit, and outputs it.

Since it wasmade as a MEMS coil, resistance of the coil increases, and a voltage drop (IR drop)
occurs in a process of obtaining the integrated voltage, which is a problem.

Moreover,since the coil is formed in a plating process so as to make a film thickness larger and tolower resistance, cost was drastically increased.
[0050]
Moreover, the inventor examined how to increase the pulse frequency from 0.2
GHz to 1 GHz in the aforementioned MEMS coil-type MI sensor (Patent Document 6).
55

When it is raised to 0.5 GHz, the output can be improved approximately twice, but, on
the contrary, at 1 GHz or more the output lowers.

When the frequency is raised on thebasis of the MI phenomenon, the magnetization rotation by the movement of the 90 degree magnetic domain wall in the core magnetic domain and the simultaneousrotation of the inclined spins in the surface magnetic domain are both detected as a coilvoltage.

Even with the raised frequency, the movement of the magnetic domain wall

stays slow, and the influence of the spin rotation in the surface magnetic domain
becomes larger.

However, although the spin rotation is capable of a high-speed

rotation, a magnetic signal is weak, and in a case of a coil with an inner diameter of 30
μm, a distance between a wire and a coil is as long as 10 μm, electromagnetic couplingis weak, and sufficient detection could not be realized.

In order to detect the spinrotation phenomenon, the distance between the coil and the wire needs to be madesmaller from 10 μm to 3 μm or less, and by increasing a coil pitch per unit length, theelectromagnetic coupling between the spin rotation on the wire surface and the coilneeds to be reinforced.
[0051]
Moreover, with presence of a contradiction problem between the sensitivity andthe measurement range, since the measurement range of the MI sensor is limited to arange capable of linear approximation, it was difficult to enlarge.
approximately two-fold was realized by raising the frequency.

Improvement ofHowever, technicalproblems involved in the higher frequency occurred and it could not be commercialized
as a product.
Regarding the technical problems of the high-frequency pulse oscillation circuit,an increase in parasitic capacitance associated with a coil and a wiring circuit causedsmoothing of a pulse rise and attenuation of an output by an IR drop, whereby a large
output circuit was required, which was not practical.

An increase in anelectromagnetically induced voltage involved in the higher frequency became larger
than the coil voltage caused by the magnetization change on the surface, and removalof it has become a problem.

The large electromagnetically induced voltage caused

large errors such as limitation on a degree of amplification of a signal, lowered linearity
and accuracy of a detection signal, deterioration of temperature characteristics, and thelike, and a practical sensitivity has rather lowered.

The inventor determined that theidea of raising a frequency on the basis of the MI sensor would be tangled in the trade off, and an improvement measure for performance upgrade could not be discovered.
[0052](8) Basic differences between the principle of the GSR sensor and the principle
56

of the MI sensor will be summarized.
The MI phenomenon emerges at the frequency from 1 MHz to 30 MHz and iscaused by the vibration of the 90-degree magnetic domain wall present at the boundary
between the surface magnetic domain and the core magnetic domain, while the GSR
phenomenon is generated at 0.5 GHz to 4 GHz and is caused by the spin rotation in thesurface magnetic domain.

Regarding the coil output of the MI sensor, the output

voltage is accumulated in the capacitor of the integrated circuit, and a magnetic field is
acquired from a proportional relationship between the voltage and the magnetic field.
With the GSR sensor, an instantaneous voltage of the coil is directly detected b y a
buffer circuit, and since the voltage and the magnetic field are in a mathematical
relationship in formula (1), the magnetic field is acquired.

When the coil of the MI

sensor is made finer, resistance increases, and an IR drop occurs.

Thus, the effec t by

the refinement of the coil and the increase in the coil winding number Nc becomes
limited.

In the GSR sensor, the coil resistance is extremely large, and only an

extremely small amount of current flows through the coil.

Since the coil output

voltage needs to be directly detected as the voltage, it is detected through the buffer
circuit.

A detection capability by the coil can be increased with little influence of theincreased resistance caused by the coil winding number and the coil refinement.
[0053]On the other hand, in the GSR sensor based on the GSR phenomenon, a drive
pulse frequency is raised from 0.5 GHz to 3 GHz, and by simultaneously rotating thespins in the surface magnetic domain at a high speed and by detecting a generated high speed signal with the fine coil, a large output proportional to the frequency and the coilwinding number can be realized.

Specifically, it was found that the coil output

increases in proportion to the square root of the frequency by making the depth d of thesurface magnetic domain larger than the skin depth p of the pulse, and an astounding
output could be successfully extracted by means of integration with a fine-coilmanufacturing art.
[0054]
Moreover, between the coil output voltage and the external magnetic field H, aclear mathematical relationship as shown in formula (1) exists within a range of themeasurement region ±Hm, and hysteresis hardly occurs and thus, an excellent output
characteristic and a low current-consumption characteristic with a wide measurement
range as shown in Fig. 3 can be obtained.

Fig. 3-a) illustrates a relationship between

the external magnetic field and the coil output voltage Vs.

Fig. 3-b) illustrates a

relationship between a converted value obtained by applying arcsin conversion of the57

coil output voltage Vs and the external magnetic field H.

It is clearly known that a

linear relation is present between the converted voltage value and the external magnetic
field within the measurement range (range from a maximum value to a minimum value).
[0055]The establishment of this mathematical relationship is realized by paying
attention to a difference in magnetization behaviors of the two-phase magnetic domains;that is, the surface magnetic domain having a circumferential-direction spin on thesurface with respect to the external magnetic field H and the axial -direction spin
magnetic domain of the center core part, by adjusting the anisotropic magnetic field to
8 G or less and the surface magnetic-domain depth to the skin depth or more, by setting
the frequency of the pulse current to 0.5 GH or more and the skin effect depth to 1 μm
or less, and by setting the condition that can genuinely detect only the circumferential direction spin rotation at a super high speed.
[0056]The physical basis of the electromagnetic phenomenon of the super high-speed
simultaneous spin rotation is an exchange interaction between spin-spin.

The spingroups aligned in the circumferential direction are strongly coupled to each other by
this exchange interaction so that the simultaneous rotation of the spins can be performedat the super high speed of 2 GHz.

Moreover, when the frequency is raised in a casewhere the thickness of the surface magnetic domain is sufficiently ensured, the skindepth becomes smaller, and the coil output increases in proportion to f/p = f 1/2.
However, the eddy current increases with the speed increase, whereby the spinrotation is suppressed and thus, a maximum value is taken at a certain frequency.
Furthermore, when the pulse frequency is raised to the vicinity of 5 GHz, spin
precession and spin resonance phenomenon begin to occur, and each spin overcomesthe exchange action force and starts rotation, whereby the coil output voltage is lowered.
By means of heat generation of a spin system by lattice heat generation by the eddy
current and the precession, the decrease of the coil output is amplified.
[0057]The higher the frequency, the larger the output voltage.

Moreover, the skindepth also becomes smaller, whereby the thickness d of the surface magnetic domain
can be made smaller.

This means that, by making a stress in the circumferential

direction smaller, the magnetic permeability of the magnetic wire can be increased; that
is, a value of the coefficient Vo can be increased, and the output can be improved.
However, as a spin resonance frequency is approached, fluctuations occur in thesimultaneous rotation, and the coil voltage lowers and thus, there is an optimal58

frequency range, which is from 0.5 GHz to 4 GHz.

Fig. 4 illustrates the result of

examination of an influence of the frequency on the coil output by using Embodiment
1.

(A) is a product of the present invention of a type, in which the measurement range

is ±40 G and the sensor length is 0.2 mm.

(B) and (C) are embodiments of two MI

sensors having sensor length of 0.6 mm and measurement ranges of 2 G and ±30 G in
Patent Document 6.

The GSR sensor of the present invention is superior to the MI

sensor in both sensitivity and the measurement range.
higher frequency range as the frequency increases.
GHz and then gradually decreases.

The voltage incr eases to a

It shows the highest value at 2This is considered to be caused by increases in thespin precession and the eddy current braking.

Therefore, a desirable ran ge of

frequencies is from 0.5 GHz to 4 GHz.
However, the increase in the pulse frequency increases an induced voltage
induced by the circumferential pulse magnetic field in the coil and thus, this measure ismore important in the GSR sensor.
[0058](9) Specific sensor specifications which realize the following GSR effect will bemade clear.
The inventor elucidated the following sensor specifications and invented ameasure for embodying it on the basis of the electromagnetic phenomenon of theaforementioned GSR effect.
The magnetic wire was made of a Co-based alloy having 0 magnetostriction or
weak negative magnetostriction and had an anisotropic magnetic field Hk of 8 G or less,relative magnetic permeability of 1000 or more, a diameter of 20 μm or less, and a stressin the axial direction was 2p or more with the thickness d of the surface magnetic
domain of 1 μm or less.

The thickness was adjusted to be 2p or more by applying

pulse magnetic-field annealing or tension annealing by taking into consideration theapplied pulse frequency.

It is to be noted that, regarding residual magnetization of thecore part, disappearance/reduction of an influence history of the external magnetic field
before that were promoted during pulse-conduction duration time so as to suppress
hysteresis.
[0059]
Regarding the current intensity of the pulse current, the intensity of thecircumferential-direction magnetic field on the surface was set to 30 G or more or acircumferential-direction magnetic-field intensity of 1.5×Hk or more was ensured as atarget by considering a diameter of the wire, and the pulse frequency was set to 0.5
GHZ to 4 GHz so as to realize the simultaneous spin rotation at a super high speed only59

of the spins in the surface magnetic domain.

Moreover, the core magnetic domain was

reduced by a large circumferential-direction magnetic field during the duration of thepulse conduction so as to increase the thickness of the surface magnetic domain.
Regarding a rising speed of the pulse, steep rising was ensured by reduction of
the parasitic capacitance of the coil, a change from the wiring wire bonding to solderingjoining, ASIC incorporation of the capacitor, and the like.
A length of a pulse time interval was set to 10 n seconds or more in order toavoid coil signal interference, and natural cooling of the wire was performed at the sametime.
[0060]
Regarding a size of the element, the coil output is proportional to a diameter Dof the wire, but if the diameter is too large, the circumferential -direction spin magnetic
domain on the surface cannot be formed and thus, the size should be 30 μm or less.
However, by considering minimization of the coil pitch and size reduction of a sensor
size, it is realistic to set the diameter to 20 μm or less.

Although the length L increases

the coil output, the measurement range of the magnetic field becomes smaller, and there
is a trade-off relationship between the coil output and the measurement range.

As ameasure against this, it is desirable to increase the coil output by making the coil pitch
smaller and by increasing the coil winding number so as to increase the coil output andby making the wire length L as small as possible.

In a case where the measurement

range may be small, it is desirable to secure a sufficient length so as to increase the coiloutput and the sensor sensitivity.
[0061]
Regarding the detection coil, in order to reinforce the GSR phenomenon on thewire surface and the electromagnetic coupling with the coil, the inner diameter of thecoil should be 25 μm or less, and the distance between the wire and the coil should
preferably be 3 μm or less.

Regarding the coil winding number, it is important to makethe coil pitch smaller to 10 μm or less in order to reduce the size of the GSR elementon the outermost surface.
The structure of the fine coil is obtained by a three-layered structure of a recessedcoil lower part, a protruding coil upper part, and a joint part for connecting them via alevel difference between both or in a case of a special case where the level differenceis zero, by a two-layered irregular structure in which only the lower part of the magnetic
wire is embedded in a board groove with a coil lower-part wiring provided, it is fixedwith a resin having an adhesive function, the upper part of the wire is thinly covered
with a surface tension of the resin, or in a case of an insulating-coated magnetic wire,
60

the coil upper-part wiring and the wiring of the joint part of the coil lower-part and theupper-part are performed in a partially exposed state.
[0062]
Moreover, in the manufacture of the coil, the insulation between the coil and thewire is ensured by using an insulating material directly coated on the wire, andregarding connection between the wire and the electrode, a connecti ng part with highstrength can be realized by connecting with a conductive metal material including thewire upper-surface part in a contact portion from which the wire insulating-coating
material is removed.

It is to be noted that the manufacture may be performed by using

the resin insulating coating inserted into a space between the coil and the wire.
[0063](10) When the frequency of the pulse current is increased, the induced voltage
Vc generated in the coil increases due to the relationship between t he circumferentialdirection magnetic field generated by the pulse current and the coil wiring structure.
An art for removing it from the coil voltage Vm was devised and invented.
There are three types of the induced voltage Vc: (1) a voltage thatelectrostatically senses a wire potential difference during pulse conduction; (2) avoltage generated when a coil directly senses a change in a circumferential -direction
magnetic field; and (3) a voltage sensed by a wiring loop on a board surface.

Amagnitude of the induced voltage is affected the most by the electrostatic potential
difference followed by the voltage the coil directly senses.

For the wiring loop,

cancellation is easy and can usually be made smaller, but undesirable wiring generates
a large voltage.
[0064]A pair of or a plurality of pairs consisting of a detection element of a right handed coil and a detection element of a left-handed coil are installed on a board, twoelectrodes for wire conduction and a wire terminal are connected so that the pulse
current flows in opposite directions through the left-handed coil and the right-handed
coil, and two electrodes for coil voltage detection and a coil terminal are connected
such that, when the pulse current is passed through the wire, the output vol tages of theright-handed coil and the left-handed coil proportional to the external magnetic field
have the same sign, and the output voltage generated by the circumferential -direction
magnetic field created by the pulse conduction, when the external magnetic field is zero,has a different sign, whereby the aforementioned induced voltage Vc can be eliminated.
Moreover, the voltage generated by the wiring loop formed by the coil and theelectronic circuit on the board can be removed by cross structure of t he wiring.
61

A plan view of the GSR element used in Embodiment 4 (hereinafter, referring toa front view of a wiring structure) is shown in Fig. 9.
By generally expressing this wiring structure, a pair consisting of a first coil,which is a left-handed coil, and a second coil, which is a right-handed coil, is mounted
on one piece of the magnetic wire on the board by being directed to a direction in which
the pulse current flows.

Moreover, a first coil terminal and a second coil terminal areprovided by being directed to the direction from which the pulse current flows on eachof the first coil and the second coil.
The first coil terminal of the first coil and the first coil terminal of the second
coil are connected, a coil output electrode and the second coil terminal of the first coil
are connected, and a coil ground electrode and the second coil terminal of the second
coil are connected.

Regarding disposition of the coil terminals, the first coil terminalsof the first coil and the second coil and the second coil terminals of the first coil andthe second coil are disposed on respective sides of the magnetic wire.

Connection

between the coil electrode and the coil terminal is done such that wiring from the coiloutput electrode to the second coil terminal of the first coil and wiring from the coilground electrode to the second coil terminal of the second coil cross each other.
By means of this wiring structure, when the left-handed coil and the right-handed
coil are attached to one wire, and a current is caused to pass in the same direction, themagnetic field has a negative sequence voltage, while a coil voltage by an electrostatic
potential difference becomes the common-mode voltage.

When the coil terminals arereversely joined, the output voltage by the magnetic field is added, and the voltage by
the electrostatic potential difference is cancelled.

Moreover, when the output wirings

are crossed each other, an upward magnetic field and a downward magnetic field in theloop are cancelled, and the voltage generated by the wiring loop substantiallydisappears.
In this case, regarding the voltages generated in the right and left coils, thevoltages of the right-handed coil and the left-handed coil are reverse voltages, since thecurrents are directed to the same direction, but the voltages remain in the same direction,
since the coils are reversely connected, which is a problem.

However, although theinduced voltage does not disappear completely, but it can be made sufficiently small to
1/4 or less, when compared with the induced voltage of a simple coil, and although it
is not preferable, it is a usable wiring structure when there is restriction on a size or thelike.
[0072](12) Regarding the temperature dependency of the coil voltage, after the induced
62

voltage is reduced, temperature stability of the circuit was improved by setting a
detection timing to a peak point of the voltage Vs so that, even if it is slightly shiftedby an influence of the temperature, the coil output is not drifted.

By using an o utput

of a temperature sensor incorporated in the sensor and a temperature correction program,a temperature at the origin was executed.

As a result, 0.02 mG/°C or less was realized

for the temperature drift at the origin.
[0073]
By acquiring the external magnetic field H from the coil voltage Vs by using anelectronic circuit or program operating means capable of processing functional relations
in formula (1), the measurement range can be enlarged to the magnetic field Hm
indicating the maximum value of the coil voltage.

The measurement range so far of

the coil-type MI sensor using the MEMS element was approximately 0.3×Hm.
[0074]
Regarding the temperature stability or temperature dependency of an element
output, as is known from formula (1), there is temperature dependency of an averagemagnetization amount of the circumferential-direction spin group and the anisotropic
magnetic field Hk.

As for the average magnetization amount, Co has a high Curie

point of 1422 K and is not affected by a temperature change around 300 K.

As for the

anisotropic magnetic field, the output sensitivity is affected, but a temperature change
is hardly found.
[Advantageous Effect of the Invention][0077]
As compared with an FG sensor, an MI sensor, a coil-detection type improved
MI sensor, and the like, the super high-sensitivity micro-magnetic sensor based on the
super high-speed spin rotation effect has realized improvement of the sensor output
voltage, the sensor sensitivity, and the sensor detection capability, noise red uction,
enlargement of the measurement range, lowered current consumption, improvement of
the temperature stability, improvement of the hysteresis characteristics and linearity,and micro-level downsizing and is extremely useful, contributing to industrial spread.
[Brief Description of the Drawings][0078][Fig. 1] Figs. 1 are magnetization characteristic diagrams of an amorphous magnetic
wire.

Fig. 1a) is an axial MH magnetization characteristic diagram.

Fig. 1b) is arelationship diagram of an output and a magnetic field of a GSR sensor.
[Fig. 2] Figs. 2 are diagrams of changes in a magnetization state of the amorphousmagnetic wire when an external magnetic field H is changed.
63

Fig. 2a) shows H=0,

Fig. 2b) H=Hk/2, Fig. 2c) H=Hk, and Fig. 2 d) H>Hm.
[Fig. 3] Figs. 3 are graphs illustrating relationships between a coil output voltage anda magnetic field of Embodiment 1.

Fig. 3a) shows a relationship between an external

magnetic field and a coil output.

Fig. 3b) shows a relationship between the external

magnetic field and a converted coil output.
[Fig. 4] Fig. 4 is a graph illustrating an influence of a frequency on the coil output ofEmbodiment 1.
[Fig. 5] Fig. 5 is a plan view of a GSR element according to Embodiment 1.
[Fig. 6] Figs. 6 are structural diagrams (sectional views) of the GSR element of
Embodiment 1.

Fig. 6a) is a top view of a unit magnetic-field detecting element for

explaining a cross sectional view, Fig. 6b) is a cross sectional view of a coil part, andFig. 6c) is a cross sectional view of a wire electrode part.
[Fig. 7] Fig. 7 is a plan view of a GSR element of Embodiment 2.
[Fig. 8] Fig. 8 is a plan view of a GSR element according to Embodiment 3.
[Fig. 9] Fig. 9 is a plan view of a GSR element according to Embodiment 4.
[Fig. 10] Fig. 10 is a circuit diagram used in Embodiment.
[Best Mode for Carrying Out the Invention][0079]The present invention will be explained in more detail with reference to
Embodiments of the invention.
A GSR sensor based on the principle of the super high-speed spin rotation effectaccording to Embodiment 1 has a minute magnetic field with small geomagnetism of
approximately 0.5 mG as a measurement target.
That is constituted by a GSR element (hereinafter, referred to as a GSR sensor
element) constituted by a magnetic wire and a loop coil, means for passing a pulse
current through the magnetic wire, a circuit for detecting a coil voltage generated when
the pulse current is passed, and means for converting a coil voltage into an external
magnetic field H.

The external magnetic field H and the coil output voltage areexpressed by a mathematical relationship as in the aforementioned formula (1).
[0080]The magnetic wire is a wire made of a CoFeSiB amorphous alloy having a
diameter of 3 μm to 10 μm and covered with insulating coating with a thickness of 1
μm or less.

Its crystal structure is preferably an amorphous structure, but ananocrystalline structure is also possible.

It is a high magnetic-permeability magnetic

wire having relative magnetic permeability of approximately 1000 to 100,000 andhaving a small magnetic anisotropy of 8 G or less and zero or weak negative64

magnetostriction characteristic.

A wire without insulating coating can also be used,

but it is necessary to ensure insulation between the coil and the wire by interposing aresin therebetween.
When a wire with smaller magnetic anisotropy and higher magnetic permeability
is used, Hm becomes smaller, and sensitivity of the coil output becomes higher inproportion thereto, but the measurement range becomes narrower.

With respect to thisproblem of the trade-off relationship, it is possible to increase the number of coils perunit length by refining the coil pitch and to use a wire having excellent magnetic
permeability characteristic and then, the measurement range is enlarged by shortening
the wire length and strengthening the demagnetizing field, and subsequently, by solving
the problem of lowered sensitivity by increasing the number of coil windings, all threeof demands; that is, high sensitivity, a wide measurement range, and size reduction of
the element to micro size, can be satisfied.
[0081]
By applying a tensile stress to the wire so as to generate magnetic anisotropy Ku
and magnetic anisotropy Kθ in the axial direction and the circumferential direction,
respectively, a 2-phase magnetic domain structure of a circumferential surface
magnetic-domain having a circumferential-direction spin alignment and a center-corepart magnetic domain having an axial-direction spin alignment were formed.
The thickness d of the surface magnetic domain becomes larger as Kθ is madelarger, but since the sensitivity lowers, it does not have to be twice or more of the skindepth p formed by the pulse current.

After the measurement magnetic-field range±Hm is determined, the depth d is adjusted to approximately d = 2p by considering
pulse frequencies to be used.

Practically, the thickness is preferably 1 μm or less.

[0082]The intensity of the pulse current was set to 50 mA or more, and a sufficiently
large circumferential magnetic field Hθ, which is 1.5 times or more Hm, was generated
on the wire surface so that simultaneous rotation of the surface spins was realized.
Moreover, magnetization was saturated in the circumferential direction, and themagnetization history was erased.

This pulse magnetic-field annealing processing

was executed for each measurement so as to remove hysteresis characteristics from theoutput.
When the strength of the anisotropic magnetic field is large, Hθ needs to becorrespondingly increased, but excessive current heats the wire and increases current
consumption of the sensor, which is not preferable.

It is preferable to beapproximately 70 mA to 150 mA, and Hθ is preferably approximately 40 G to 80 G.
65[0083]
It is preferable that the pulse frequency is 0.5 GHz or more, the skin depth p of
the current is 1 μm or less, and the thickness d of the circumferential surface magnetic domain is d or less.
When the frequencies are increased under these conditions, the skin d epth
becomes smaller, the number of rotating spins decreases, and the coil output increases
to f/p=f1/2 from linear proportion of f by a proportion of f 1/2.
However, since the eddy current increases with an increase in speed andsuppresses the spin rotation, the increasing tendency by f is further suppressed, and amaximum value is taken at a certain frequency.

Moreover, when the pulse frequency

is increased to the vicinity of the 5 GHz, the precession of the spins and the spinresonance phenomenon begin to be brought about, each spin overcomes the exchange
action force and starts to rotate, and the coil output voltage lowers.

Lattice heatgeneration by the eddy current and heat generation of the spin system by the precession
amplify lowering of the coil output.

Therefore, 4 GHz or less is preferable.

The optimal frequency range is from 1 GHz to 3 GHz.

When the magnetic

permeability is high, the anisotropic magnetic field is small, and the thickness d of thecircumferential surface magnetic-domain is small at 1 μm or less, it is necessary toincrease the pulse frequency correspondingly.
p to d or less.

It is preferable to control the skin depth

If d is small, it is preferable to increase the pulse frequency accordingly

so that all of the spins in the surface magnetic domain rotate.

However, under thecondition that p is larger than d, since the number of rotating spins in the surface
magnetic domain does not change even if the frequency is increased so as to make p
smaller, the output increases in proportion to the frequency f.

This means that the

combination of the anisotropic magnetic field of the wire and the frequency is not
optimized under this condition.

It is to be noted that, since the magnetization Ms in

the center part is shielded by the magnetic domain wall between the surface magnetic
domain and the core magnetic domain, which does not move at a high frequency, it is
not affected by the skin effect.
The pulse time interval should be 10 n seconds or more, preferably 50 n seconds,
in order to avoid coil signal interference.
[0084]
When the aforementioned pulse current is passed through the wire in this state,
the spin is simultaneously rotated in the circumferential direction at a very high speed(within a transition time dt of the pulse) by a large circumferential magnetic field at
approximately 60 G generated by the pulse.
66

A change in magnetization of the wire

occurring at that time is detected as the coil output voltage Vs.
The coil output increases in proportion to the diameter D of the wire, but if thediameter is too large, the circumferential-direction spin magnetic domain on the surface
cannot be formed and thus, the wire diameter should be 20 μm or less.
larger the diameter, the larger the required pulse current.

Moreover, theFurthermore, since it isdifficult to manufacture a fine coil having a small pitch, preferably, the pitch should be
5 μm to 12 μm.
[0085]The length L is a control factor which increases the coil output but makes themeasurement range ±Hm smaller, and the coil output and the measurement range are ina trade-off relationship.

In general, it is preferable to increase the coil output by

reducing the coil pitch and increasing the coil winding number and to enlarge themeasurement range by making the wire length L as small as possible to 0.1 mm to 0.5mm.
[0086]
Regarding the coil winding number, the higher sensitivity and the size reductionof the sensor can be realized at the same time and thus, it is extremely important toincrease the unit coil winding number by making the coil pitch smaller.

A lower half

or a part of a magnetic wire is embedded in a groove formed in a board, a lower coil is
disposed on a bottom surface of the groove, an upper coil is disposed on the upper partof the wire, and the upper and lower coils are joined on the surface of the board to forma coil, whereby the coil pitch can be made 10 μm or less.

Considering the level of thecurrent refinement processing art, the coil pitch is preferably 1 μm to 6 μm.
[0101]
The five Embodiments have been described above, and the present sensor has anadvantage that a degree of freedom in sensor design is high in accordance with ameasurement target.
Under the condition that the depth d of the surface magnetic domain of themagnetic wire is ensured at the skin depth p or more of the pulse by controlling theanisotropic magnetic field Hk (substantially equal to Hm) of the magnetic wire, therelationship in formula (1) exists between the coil output voltage and the external
magnetic field by the super high-speed spin rotation effect.

That is because

performances of the output characteristics can be optimized in accordance withapplications such as sensitivity and a measurement range by combining the length andthe diameter of the magnetic wire, the coil pitch, the pulse frequency, the current
intensity, and a circuit configuration.
67

[Embodiments][0102][Embodiment 1]
Fig. 5 shows a plan view of the GSR element according to Embodiment 1.
Moreover, a top view and a cross-sectional structural view of a unit magnetic-field
detection element for explaining a structural view (cross-sectional view) of the GSR
element are shown in Figs 6.
Embodiment 1 of the GSR sensor based on the principle of the super high-speed
spin rotation effect is constituted by a GSR element constituted by a magnetic
amorphous body and a circumferential coil, means for causing a pulse current to passthrough the magnetic wire, a circuit which detects a coil voltage generated when thepulse current is caused to pass, and means for converting the coil voltage to the external
magnetic field H.

The external magnetic field H and the coil output voltage areexpressed in a mathematical relationship as in formula (1).
[0103]The magnetic wire is a glass-coated wire made of a CoFeSiB amorphous alloy
with a diameter of 10 μm and a thickness of 1 μm or less.

The magnetic wire has anamorphous crystal structure and has weak negative magnetostriction of 10 -6 and highmagnetic permeability with relative magnetic permeability of 10,000.

By applyi ng atensile stress to the wire so as to generate the magnetic anisotropy Kθ at 5 G in the axial
direction and the circumferential direction, 2-phase magnetic domain structures; that is,the circumferential surface magnetic-domain having a circumferential-direction spinalignment and the center core-part magnetic domain having the axial-direction spinalignment, were formed.

The thickness d of the surface magnetic domain was set to 1

μm or less.
[0104]The intensity of the pulse current was set to be equal to or greater than 100 mA
so as to generate a sufficiently large circumferential magnetic field Hθ at 60 G on thewire surface, and the spins of the surface magnetic domains inclined by θ were
simultaneously rotated in the circumferential direction by power of the magnetic field.
At the same time, a pulse duration of 2 n seconds was ensured to cause a 90 -degree
magnetic domain wall existing at the boundary between the core-part magnetic domain
and the surface magnetic domain to penetrate into the core center part, whereby thecore-part magnetic domain was reduced and was brought into a magnetizing saturation
state or a magnetized state close thereto in the circumferential direction and then, themagnetization history was erased.

This pulse magnetic-field annealing processing
68was executed at each measurement so as to remove hysteresis characteristics from theoutput.
[0105]The pulse frequency was set to 2 GHz, the skin depth p of the current to 0.12 μm,
and the thickness of the circumferential surface magnetic-domain to 1 μm or less.

Themeasurement range ±Hm was adjusted to 40 G by setting the diameter of the amorphouswire having the aforementioned characteristics to 10 μm and the length L to 0.2 mm.
[Industrial Applicability][0123]The super high-sensitive micro-magnetic sensor based on the super high-speed
spin rotation phenomenon of the present invention provides micro-magnetic field
detection capability, high-speed measurement, high sensitivity, low current
consumption, and a high-quality magnetic signal, and in use for measuring microgeomagnetism of an electronic compass, a magnetic gyro, and the like, it is expected to
be used in a wide range of applications such as application to a three-dimensional
compass and a real-time three-dimensional compass, a medical sensor for measuringbiomagnetism, application to an inside of a living body by size reduction to a microsize, magnetic mapping application utilizing the high-speed measurement capability,
and an industrial magnetic sensor with an enlarged measurement range.

69

[Fig. 1]
COIL OUTPUT
VOLTAGERELATIVE VALUE OF MAGNETIZATIONCOIL OUTPUTCURVE 11MAGNETIZATIONCURVE 10EXTERNAL MAGNETIC
FIELD Hex

EXTERNAL
MAGNETIC FIELD Hex[Fig. 2]LEFT SPIN DIRECTIONRIGHT SPIN DIRECTIONRIGHTWARD,
ALL

RIGHTWARD, ALL

WIRE SECTION 13

WIRE AXIAL-DIRECTION SECTION 12

70COIL VOLTAGE

CONVERTED COIL
VOLTAGE[Fig. 3]EXTERNAL
MAGNETIC FIELD

EXTERNAL
MAGNETIC FIELD

COIL OUTPUT[Fig. 4]

PULSE FREQUENCY[Fig. 5]71

[FIG. 6][Fig. 7]

[Fig. 8]72

[FIG. 9][Fig. 10]PULSE
OSCILLATOR

73

(Attachment 2)
1 "Magnetic Sensor Science and Engineering (expanded edition)" by Kaneo Mori
(Expanded, January 18, 2016) (Exhibit Ko 118)
(1) "An induced voltage e p ... of a coil wound around an amorphous wire N times in acircumferential direction is in direct proportion to a detection magnetic field H ex as
indicated by ep =GHex." (p. 158, ll. 4 to 8)(2) "Fig. 7.5 shows DC magnetic-field detection characteristics of an amorphous wire
MI sensor incorporated in an electronic compass chip in 2005." (p. 158, ll. 12 to 13)
2 Larissa Panina et al. "off-Diagonal Impedance in Amorphous Wires and Its
Application to Linear Magnetic Sensors" (November 2004) (Exhibit Otsu 5)"... shown in Fig. 12(b) has an almost linear portion in the field range H ex≈±20e." (p.
3510, ll. 3 to 4)
Note: The document above is a thesis on theoretical analyses of coil -type MI
sensors and comparison of measurement results of coil voltages, but Fig. 12 discloses
that a linear output is indicated.
3 "Large Barkhausen Effect of Amorphous Magnetic Alloy Wire and Magnetic
Impedance Effect / MI Sensor" by Kaneo Mori (issued on September 11, 2013) (Exhibit
Otsu 15)(1) "As shown in Fig. (a), by installing a detection coil in an amorphous wire and by
detecting a coil voltage, Hex should be able to be linearly detected in principle similarly
to the FG sensor from Fig. 14, ... Fig. (c) shows linear magnetic sensor charac teristics
by a pulse voltage Ep obtained by synchronous rectification of the coil voltage." (p. 33,
ll. 15 to 10 from the bottom)(2) "... in direct proportion to H ex.

This is an important principle constituting the linear

magnetic sensor having high linearity and without hysteresis.

The height Ep of thepulse voltage of the detection coil is Ep=(πδ(2a-δ)NMs /2Kutr)H ex(1.11), ... the2magnetic sensor circuit in Fig. 14(a) is a linear magnetic sensor circuit with highlinearity and high sensitivity but without hysteresis." (p. 35, ll. 5 to 12)(3) "Fig. 16 shows DC magnetic-field detection characteristics by the MI sensor in Fig.
14." (p. 35, ll. 10 to 9 from the bottom)
4 T. Uchiyama et al. "Recent Advances of Pico-Tesla Resolution Magneto-Impedance
Sensor Based on Amorphous Wire CMOS IC MI Sensor" (Issued on October 18, 2012)(Exhibit Ko 102)In Fig. 4, it is described that linearities of the magnetic field and the output aregood ("good linearity are obtained") (p. 3835, left column, ll. 8 to 4 from the b ottom).
74