R.D. Mathis Company
Vacuum Evaporation
Sources Catalog(562) 426-7049 • (562) 595-0907 fax • www.rdmathis.com
P.O. Box 92916 • Long Beach, CA 90809-2916

Your best choice for quality hi-vacuum evaporation sources.

Welcome to R.D. Mathis Company
The R.D. Mathis Company continues to supply the thin film Industry withquality vacuum evaporation sources as we have since 1963. Since then we
have provided innovative and creative solutions to research anddevelopment laboratories, university projects and production facilities thathave allowed many pioneering thermal evaporation processes to be
attempted and completed successfully.
This experience has been incorporated into our wide selection ofproven evaporation sources offered in our catalog as well as themodified and custom products we produce everyday in our state of
the art manufacturing facility.
Our flexible tooling and highly skilled work force allow us to
produce unique one of a kind sources as well as high-volume
production quantities with equal ease. All of our refractorymaterials are high purity, high quality and are processedusing specific R.D. Mathis Company requirements. Everysource we produce is of the highest quality in the industry
and represents value, innovation, reliability and integrity –the cornerstones of our business philosophy.
Along with every source comes our commitment toprovide you with the best service possible. Our staff
stands ready to provide you with engineering
consultation to help determine the right sourcefor you at the best value to make your coatingprocess a success.
We hope your experience with R.D. Mathis Company
is nothing short of exceptional. We look forward toserving you for years to come.
– R.D. Mathis Company

(562) 426-7049 • (562) 595-0907 fax • www.rdmathis.com

OUR PRODUCTS
FILAMENTS ……………………………………………Pages 1 – 6
Chrome plated tungsten rods, tungsten filaments, tungsten rod sources, point sources, loop
sources and spiral heater filaments.

BASKETS & BASKET HEATERS ……………………Pages 7 – 10Single and multi-strand tungsten baskets for direct material evaporation and stranded tungsten
basket heaters for crucible heating and evaporation.

CRUCIBLES & CRUCIBLE HEATERS ………………Pages 11 – 16
Crucibles made from alumina, boron nitride, boron nitride composite, graphite, molybdenum,
quartz, tantalum, double shielded and single shielded crucible heaters.

BOAT SOURCES ……………………………………Pages 17 – 28
Tungsten, tantalum and molybdenum boat sources, covered boats and folded boats.

ALUMINA COATED SOURCES ………………………Pages 29 – 34
Alumina coated tungsten baskets, alumina coated tungsten and molybdenum boats and barrierstyle alumina coated boats.

BOX SOURCES …………………………………… Pages 35 – 43
Baffled box sources for SiO and ZnS, special welded tantalum boxes and covers, folded boxes,
baffles and covers and high volume sources.

MICRO ELECTRONIC SOURCES …………………Pages 44 – 47
A full selection of smaller sized sources that require lower power and low volume evaporations.
Also includes information on tungsten mesh and screens.

ORDERING OPTIONS– Call in to speak with one of our sales staff at (562) 426-7049– Fax your order to: (562) 595-0907– Email your order to: orders@rdmathis.com– International orders, send to: intlsales@rdmathis.com– Order online at: www.rdmathis.com– Mail your order to:
R.D. Mathis Company
PO Box 92916, Long Beach, CA 90809

R.D. MATHIS COMPANY
Specialists in the quality fabrication of Hi-Vacuum Evaporation Sources. Our refractory metal
facilities are completely flexible... mass production or small custom orders are produced withequal ease and attention to detail, customer specifications are rigidly adhered to. Engineering
consultation is available to solve those difficult “source” problems.

FILAMENTS

We offer an extensive selection of tungsten filaments, rod sources, point sources, baskets and heaters to fit mostapplications as well as custom fabrication. Our filaments are made in house using proven fabrication processes andmaterials, and are of the highest quality, reliability and consistency in the industry. The benefits of using our tungsten
metalizing filaments include low cost, high rates with low power (limited capacity), repeatability and ease of use.
1

TUNGSTEN FILAMENTS FOR VACUUM METALIZINGCHROME PLATED TUNGSTEN RODS

The R.D. Mathis Company chrome plated tungsten rods are used for thin films of chromium in the electronics and optics
industry. The advantage over chrome chips are: good thermal efficiency; regulation of film thickness; and elimination of spalling.

A
D

L
B
C

The rods are offered in the below configuration as standards.

PART NUMBER
CRW-1
CRW-2
CRW-3

C&D
0.5
0.5
0.5

L
2
4
6

A
0.050
0.050
0.050

B
0.070
0.070
0.070

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F1
F1
F1

3x.025W
3x.030W.040W

10 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F2
F2
F2

3x.025W
3x.030W
4x.030W

4 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F3
F3
F3
F3
F3

3x.025W
3x.030W
2x.040W
4x.030W.040W

6 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F4
F4
F4
F4
F4

3x.025W
3x.030W
4x.030W
2x.040W.040W

6 Coils2

FILAMENTSTUNGSTEN FILAMENT
TYPE

WIRE SIZE

F5
F5
F5
F5
F5
F5

3x.025W
3x.030W
4x.030W
2x.040W
3x.040W.040W

10 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F6
F6
F6
F6
F6

3x.025W
3x.030W
4x.030W
2x.040W
3x.040W

8 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F7
F7
F7
F7

3x.030W
4x.030W
2x.040W
3x.040W

14 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F8
F8
F8
F8

3x.030W
4x.030W
2x.040W
3x.040W

6 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F9
F9
F9
F9

3x.030W
4x.030W
2x.040W
3x.040W

8 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F10

3x.030W
4x.030W
2x.040W
3x.040W

F10
F10
F10
3

14 Coils

TUNGSTEN FILAMENTS FOR VACUUM METALIZINGTUNGSTEN FILAMENT
TYPE

WIRE SIZE

F11
F11
F11
F11

3x.030W
4x.030W
2x.040W
3x.040W
6 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F12F123x.025W
3x.030W
5 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F13
F13
F13

3x.025W
3x.030W
4x.030W
10 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F14
F14
F14

3x.030W
4x.030W
3x.040W
8 Coils

TUNGSTEN FILAMENT
TYPE

WIRE SIZE

F15
F15
F15

3x.030W
4x.030W
3x.040W
10 Coils

TUNGSTEN ROD SOURCEPART #OL

WL

WRAP LAYERS

F16A
F16B
F16C
F16D

4
5
5
8

2
3
3
6

8
8
12
12

Dimensions are in inches

4FILAMENTS
POINT SOURCE LOOP FILAMENT
TYPE

WIRE SIZE

P1
P1
P1
P1

3x.025W
3x.030W
4x.030W.060W

POINT SOURCE LOOP FILAMENT
TYPE

WIRE SIZE

P2
P2
P2
P2

3x.025W
3x.030W
4x.030W.060W

POINT SOURCE LOOP FILAMENT
TYPE

WIRE SIZE

P3
P3
P3
P3

3x.025W
3x.030W
4x.030W.060W

POINT SOURCE LOOP FILAMENT
TYPE

WIRE SIZE

P4
P4
P4
P4

3x.025W
3x.030W
4x.030W.060W

POINT SOURCE LOOP FILAMENT

5

TYPE

WIRE SIZE

P5
P5
P5
P5
P5

3x.025W
3x.030W
4x.030W
.040W
.060W

POINT SOURCE LOOP & HEATER FILAMENTS
POINT SOURCE LOOP FILAMENT
TYPE

WIRE SIZE

P6
P6
P6

3x.025W
.040W
.060W

POINT SOURCE LOOP FILAMENT
TYPE

WIRE SIZE

P7P73x.030W
4x.030W

LOOSE LAY WIRE
TYPE

WIRE SIZE

P8P83x.025W
3x.030W

HEATER FILAMENT
TYPE

WIRE SIZE

H1
H1

.040W
.060W

HEATER FILAMENT
TYPE

WIRE SIZE

H2
H2

.040W
.060W

HEATER FILAMENT
TYPE

WIRE SIZE

H3
H3

.040W
.060W

6

BASKETS

Baskets and basket heaters are made from the highest quality multi-strand or single strand tungsten wire. Our
tungsten baskets are ideal for low cost, low volume coatings and require minimal power. Materials can be placed
directly into baskets for evaporation. Basket heaters utilize a crucible and can be used for low and high volume
coatings. Custom baskets are available.
7

BASKETS & BASKET HEATERS
BASKET
TYPE

WIRE SIZE

B1
B1
B1

3x.025W
3x.030W.040W
5 Coils

BASKET
TYPE

WIRE SIZE

B2
B2
B2

3x.025W
3x.030W.040W
4 Coils

BASKET
TYPE

WIRE SIZE

B3
B3

3x.025W.040W

5 Coils

BASKET
TYPE

WIRE SIZE

B4
B43x.030W.060W05 Coils

BASKET
TYPE

WIRE SIZE

B5
B5

3x.025W.040W

13 Coils
8

BASKETSBASKET
TYPE

WIRE SIZE

B6
B6

3x.025W.040W
13 Coils

BASKET
TYPE

WIRE SIZE

B7
B7

3x.025W.040W

13 Coils
BASKET
TYPE

WIRE SIZE

B12A
B12A
B12A

3x.025W
3x.030W.040W
4 Coils

BASKET
TYPE

WIRE SIZE

B12B
B12B
B12B
B12B

3x.025W
3x.030W
.040W
.060W

5 Coils

BASKET
TYPE

WIRE SIZE

B13
B13
B13

3x.025W
3x.030W.040W

5 Coils
BASKET

9TYPE

WIRE SIZE

B14
B14
B14

3x.030W
4x.030W.060W
9 Coils

BASKETS & BASKET HEATERS
BASKET HEATERS
TYPE

WIRE SIZE

B8A
B8A

3x.025W
3x.030W

Use with C1 Crucible
BASKET HEATERS
TYPE

WIRE SIZE

B8B
B8B

3x.025W
3x.030W

Use with C9 Crucible

BASKET HEATERS
TYPE

WIRE SIZE

B9
B9
B9

3x.030W
4x.030W
3x.040W

Use with C2 Crucible

BASKET HEATERS
TYPE

WIRE SIZE

B10
B10

4x.030W
3x.040W

Use with C5 Crucible

BASKET HEATERS
TYPE

WIRE SIZE

B11

3x.040W

Use with C6 Crucible

10

CRUCIBLESThe R.D. Mathis Company offers a wide variety of crucible
sizes and materials for your evaporation needs. The crucibles
shown in this section are designed to fit into our basket heaters
and shielded crucible heaters. Custom sizes are available uponrequest. We also offer liners for electron beam systems.
11

CRUCIBLESCRUCIBLE
TYPE

MATERIAL

C1
C1
C1
C1

AO Alumina Oxide
Q Quartz
BN Boron Nitride*
BNC Boron Nitride Composite*.5 in. O.D.

1/2 in.

Use with B8A Basket andwith CH-1, CH-10, CH-11,
ME-19 Heaters and ME18A
BasketWall thickness .040

.460 in.

TaperedO.D.

CRUCIBLE.820 in.

Use with B-9 Basket

O.D.

TYPE

MATERIAL

C2

Q Quartz

Wall thickness .050
.850 in.

CRUCIBLE

Tapered1.35 in.

Wall thickness .070

O.D.

TYPE

MATERIAL

C3

Q Quartz
3/8 in.

CRUCIBLE

1 in. O.D.

TYPE

MATERIAL

13/16 in.

C4
C4
C4

Ta Tantalum
Mo Molybdenum
C Carbon

7/16 in.

CRUCIBLE
1 in. O.D.

TYPE

MATERIAL

C5
C5
C5
C5

AO Alumina Oxide
Q Quartz
BN Boron Nitride*
BNC Boron Nitride Composite*

Wall thickness .090

Use with CH-5, CH-12 andCH-13 Heaters and with B10
BasketWall thickness .060

1 in.

Tapered.900 in.
O.D.

CRUCIBLE
TYPE

MATERIAL

C6
C6AO Alumina Oxide
Q Quartz

1.5 in. O.D.

Use with CH-6 and CH-14
Heater and with B11 Basket
Wall thickness .070

1-1/2 in.

Tapered1.23 in.
O.D.

12

CRUCIBLESCRUCIBLE
TYPE

MATERIAL

C9
C9
C9
C9
C9
C9
C9

AO Alumina Oxide
Q Quartz
BN Boron Nitride*
BNC Boron Nitride Composite*
Ta Tantalum
Mo Molybdenum
C Carbon

CRUCIBLE
TYPE

MATERIAL

C7
C7
C7
C7
C7

BN Boron Nitride*
C CarbonQ Quartz
Ta Tantalum
Mo Molybdenum

1/2 in.

Use with CH-1, CH-10,
CH-11 and ME-19
Heaters B8B and
ME18B Baskets
Wall thickness .040
Straight Wall

1/2 in.

Use with CH-7 Heater

1/2 in.

Susceptor Type
1/4 in. I.D.
1 in.

3/8 in.

CRUCIBLE
TYPE

MATERIAL

C10
C10
C10
C10
C10

BN Boron Nitride*
C CarbonQ Quartz
Ta Tantalum
Mo Molybdenum

Use with CH-9 andME-20 Heaters

3/8 in.

1/2 in.

Susceptor Type
5/32 in. I.D.

1/4 in.

CRUCIBLE
TYPE

MATERIAL

C8
C8
C8
C8
C8

BN Boron Nitride*
C CarbonQ Quartz
Ta Tantalum
Mo Molybdenum

Use with CH-8 Heater

5/8 in.

Susceptor Type
3/8 in. I.D.

1-1/2 in.

1/2 in.

*BORON NITRIDES
13

Boron Nitride is similar to graphite in crystal structure. It is an excellent dielectric over a wide range of temperatures.
It is not attacked by many materials used for thin film fabrication. All Boron Nitride crucibles should be slowly heated
and thoroughly outgassed before use. Custom Boron Nitride, Carbon, Tantalum and Molybdenum crucibles on request.

HEAT SHIELDED CRUCIBLE HEATERS (TO 1800 oC)
Shielded Crucible Heaters provide uniform heating to theinstalled crucible and allow very high rates, as well as
high temperatures, up to 1800°C, to be achieved. Due tothe rigid construction, heater and crucible life isextended. The thermal shields protect your vacuum
components by reducing the radiant heat that yoursystem is exposed to. Custom sizes are available on
request. Please contact our technical staff if you would
like more information about these products.
CRUCIBLE HEATERCRUCIBLE HEATER
TYPE.
2-3/4 in

CH-1

1-1/4 in.

Use with C1 andC9 Crucibles
Crucible size
1/2 in. x 1/2 in.

1-3/4 in.

4 in.

TYPE

5/8 in.

Use with C5 Crucible
Crucible size
1 in. x 1 in.

CH-5

1-1/8 in.

CRUCIBLE HEATER

4-1/4 in.

2-1/4 in.

TYPE

Use with C6 Crucible
Crucible size
1-1/2 in. x 1-1/2

CH-6

1-5/8 in.

CRUCIBLE HEATER.
2-3/4 in1-1/4 in.

TYPE

Use with C7 Crucible
Susceptor Type

CH-7

Crucible size
3/8 in. x 1 in.
1-1/4 in.

CRUCIBLE HEATER

2-7/8 in.

TYPE

1-3/8 in.

Use with C8 Crucible
Susceptor Type

CH-8
Crucible size
1/2 in. x 1-1/2 in.
1-5/8 in.

14

CRUCIBLESCRUCIBLE HEATER

Susceptor Type

TYPE

CH-9

1/2 in.

3 in.

Use with C10 Crucible

Horizontal Leads

1 in.

Crucible size
1/4 in. x 1/2 in.

Horizontal Leads

CRUCIBLE HEATER
TYPE

3 in.

CH-10

5/8 in.

1 in.

Use with C1 and C9
Crucibles

CRUCIBLE HEATER

Vertical Leads

TYPE
3 in.

CH-11
Use with C1 andC9 Crucibles

5/8 in.

Horizontal Leads

TYPE

in.
3-1/2

CH-12

15

Crucible size
1/2 in. x 1/2 in.

1 in.

CRUCIBLE HEATER

Use with C5 Crucible

Crucible size
1/2 in. x 1/2 in.

1 in.

1-1/8 in.

Crucible size
1 in. x 1 in.

HEAT SHIELDED CRUCIBLE HEATERS (TO 1800 oC)
Vertical Leads

CRUCIBLE HEATER
in.
3-1/2

TYPE

Crucible size
1 in. x 1 in.

CH-13
1-1/8 in.

1 in.

Use with C5
Crucible

Horizontal Leads

CRUCIBLE HEATER
TYPE

CH-14

Crucible size
1-1/2 in. x 1-1/2 in.

5 in.
1-5/8 in.

Use with C6
Cruciblein.
1-1/8

CRUCIBLE HEATER
TYPE

ME-19

Crucible size
1/2 in. x 1/2 in.
2 in.

Use with C1 andC9 Crucibles

1 in.

9/16 in.

CRUCIBLE HEATER
TYPE

Susceptor Type
2 in.

1 in.

ME-20

Crucible size
1/4 in. x 1/2 in.

Use with C10 Crucible
9/16 in.

16

BOAT SOURCES

Evaporation boats are capable of depositing a wide variety of materials. The R.D. Mathis Company offers anextensive selection of standard tungsten, tantalum and molybdenum boats, as well as, custom fabrication to meetyour specific evaporation needs. All of our evaporation boats are made in our factory, using the highest quality
materials and processes. Our boats are available in a variety of materials and thicknesses. If you need help inselecting the right boat for your process, or need a custom boat, please give our technical staff a call.
17

TUNGSTEN – TANTALUM – MOLYBDENUM
BOAT SOURCETYPE MATERIALTYPE MATERIAL

S1
S1
S1
S1

S1
S1
S1

.005W
.010W
.015W
.005Ta.010Ta.005Mo.010MoBOAT SOURCETYPE MATERIALTYPE MATERIAL

S2A .005W
S2A .010W
S2A .015W
S2A .005Ta

S2A .010Ta
S2A .005Mo
S2A .010Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S2B .005W
S2B .010W
S2B .015W
S2B .005TaS2B .010Ta
S2B .005Mo
S2B .010Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S3
S3
S3
S3

S3
S3
S3

.005W
.010W
.015W
.005Ta.010Ta.005Mo.010MoBOAT SOURCETYPE MATERIALTYPE MATERIAL

S4
S4
S4
S4

S4
S4
S4

.005W
.010W
.015W
.005Ta.010Ta.005Mo.010MoBOAT SOURCETYPE MATERIAL

S5
S5
S5
S5
S5

.005W
.005Ta.010Ta.005Mo.010Mo18

BOAT SOURCESBOAT SOURCETYPE MATERIALTYPE MATERIAL

S6
S6
S6
S6

S6
S6

.005W
.010W
.005Ta.010Ta.005Mo.010Mo
S6 Pan Boat

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S7
S7
S7
S7

S7
S7

.005W
.010W
.005Ta.010Ta.005Mo.010Mo
S7 Dimple Boat

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S8A .005W
S8A .010W
S8A .015W
S8A .005Ta

S8A .010Ta
S8A .005Mo
S8A .010Mo

S8 Isolated Hot
Zone Boat(Dimple Type)BOAT SOURCETYPE MATERIALTYPE MATERIAL

S8B .005W
S8B .010W
S8B .015W
S8B .005Ta

S8B .010Ta
S8B .005Mo
S8B .010Mo

S8 Isolated Hot
Zone Boat(Dimple Type)BOAT SOURCETYPE MATERIAL

S8C .010W
S8C .010Ta
S8C .015Ta
S8C .010Mo
S8C .015Mo

S8 Isolated Hot
Zone Boat(Dimple Type)BOAT SOURCETYPE MATERIAL

S8D .010W
S8D .010Ta
S8D .015Ta
S8D .010Mo
S8D .015Mo
19

S8 Isolated Hot
Zone Boat(Dimple Type)TUNGSTEN – TANTALUM – MOLYBDENUM
BOAT SOURCETYPE MATERIALTYPE MATERIAL

S9A .005W
S9A .010W
S9A .015W
S9A .005Ta

S9A .010Ta
S9A .005Mo
S9A .010Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S9B .005W
S9B .010W
S9B .015W
S9B .005Ta

S9B .010Ta
S9B .005Mo
S9B .010Mo

BOAT SOURCETYPE MATERIAL

S9C .010W
S9C .010Ta
S9C .015Ta
S9C .010Mo
S9C .015Mo
BOAT SOURCETYPE MATERIALTYPE MATERIAL

S9D .010W
S9D .010Ta
S9D .015Ta
S9D .025Ta

S9D .010Mo
S9D .015Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S9E .010W
S9E .010Ta
S9E .015Ta
S9E .025Ta

S9E .010Mo
S9E .015Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S9F
S9F
S9F
S9F

S9F .010Mo
S9F .015Mo.010W.010Ta.015Ta.025Ta20

BOAT SOURCESBOAT SOURCETYPE MATERIALTYPE MATERIAL

S10 .005W
S10 .010W
S10 .005Ta
S10 .010Ta

S10 .005Mo
S10 .010Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S11 .005W
S11 .010W
S11 .005Ta
S11 .010Ta

S11 .005Mo
S11 .010Mo

BOAT SOURCE
TYPE

MATERIAL

S12A
S12A
S12A
S12A

.005Ta.010Ta.005Mo.010MoBOAT SOURCE
TYPE

MATERIAL

S12B
S12B
S12B
S12B

.005Ta.010Ta.005Mo.010MoBOAT SOURCETYPE MATERIAL

S13 .005W
S13 .005Ta
S13 .010Ta
S13 .005Mo
S13 .010Mo

BOAT SOURCE

21

TYPE MATERIALTYPE MATERIAL

S14 .005W
S14 .010W
S14 .015W
S14 .005Ta

S14 .010Ta
S14 .005Mo
S14 .010Mo

TUNGSTEN – TANTALUM – MOLYBDENUM
BOAT SOURCETYPE MATERIALTYPE MATERIAL

S15 .005W
S15 .010W
S15 .015W
S15 .005Ta

S15 .010Ta
S15 .005Mo
S15 .010Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S16 .005W
S16 .010W
S16 .005Ta
S16 .010Ta

S16 .005Mo
S16 .010Mo

BOAT SOURCE
TYPE

MATERIAL

S17A
S17B
S17A
S17B

.005Ta.005Ta.010Ta.010Ta

S17A

S17B

BOAT SOURCETYPE MATERIAL

S18 Mo Molybdenum
S18 C Carbon
S18 Ta Tantalum

Cavity 2 in. long and 3/8 in. wide

BOAT SOURCE
TYPE

MATERIAL

S19A Ta Tantalum
S19B Ta Tantalum
S19C Ta Tantalum
Height – 1-1/2 in.

BOAT SOURCE
TYPE

MATERIAL

TYPE

MATERIAL

S20A
S20A
S20A
S20A

.005W
.010W
.015W
.005TaS20A .010Ta
S20A .005Mo
S20A .010Mo
22

BOAT SOURCESBOAT SOURCETYPE MATERIALTYPE MATERIAL

S21 .005W
S21 .010W
S21 .005Ta
S21 .010Ta

S21 .005Mo
S21 .010Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S22 .005W
S22 .010W
S22 .005Ta
S22 .010Ta

S22 .005Mo
S22 .010Mo

BOAT SOURCETYPE MATERIAL

S23 .010W
S23 .010Ta
S23 .010Mo
2 pieces (top and bottom)

BOAT SOURCETYPE MATERIAL

S24 .005W
S24 .010W
S24 .005Ta
S24 .010Ta
S24 .005Mo
S24 .010Mo

2 pieces (top and bottom)

BOAT SOURCETYPE MATERIAL

S25 .010W
S25 .010Ta
S25 .010Mo
2 pieces (top and bottom)

BOAT SOURCETYPE MATERIAL

S26 .010W
S26 .010Ta
S26 .010Mo
23

2 pieces (top and bottom)

TUNGSTEN – TANTALUM – MOLYBDENUM
BOAT SOURCE

Insert fits between
top and bottom of
S25 & S26 Covered
Boat Sources providing
additional baffling,
reducing spitting.

TYPE MATERIAL

S33 .005W
S33 .005Ta
S33 .005Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S27 .005W
S27 .010W
S27 .005Ta
S27 .010Ta

S27 .005Mo
S27 .010Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S28 .005W
S28 .010W
S28 .005Ta
S28 .010Ta

S28 .005Mo
S28 .010Mo
Dimple Boat

DEEP CUP BOAT SOURCETYPE MATERIALTYPE MATERIAL

S29 .005W
S29 .010W
S29 .005Ta
S29 .010Ta

S29 .015Ta
S29 .005Mo
S29 .010Mo

WRAPPED/COVERED BOAT SOURCE
TYPE

MATERIAL

S30A
S30A
S30A
S30A

.005W
.010W
.005Ta.010TaELONGATED DIMPLE BOAT
TYPE

MATERIAL

TYPE

MATERIAL

S31A
S31A
S31A
S31A
S31A

.005W
.010W
.015W
.005Ta.010Ta

S31A
S31A
S31A
S31A

.015Ta.005Mo.010Mo.015Mo24

BOAT SOURCESTUNGSTEN CRUCIBLE HEATER
TYPE

S32

MATERIAL

S32 .010W
S32A .010W
Accommodates C1 and C9 Crucibles

DIMPLE BOAT
TYPE MATERIALTYPE MATERIAL

S34 .005W
S34 .010W
S34 .005Ta
S34 .010Ta

S34 .005Mo
S34 .010Mo

FLAT BOAT
TYPE MATERIALTYPE MATERIAL

S35 .005W
S35 .010W
S35 .005Ta
S35 .010Ta

S35 .005Mo
S35 .010Mo

BOAT SOURCETYPE MATERIAL

S36 .010W
S36 .010Ta
S36 .015Ta
S36 .010Mo

BOAT SOURCETYPE MATERIAL

S37 .005Ta
S37 .010Ta
S37 .005Mo
S37 .010Mo

BOAT SOURCE

25

TYPE MATERIALTYPE MATERIAL

S38 .005W
S38 .010W
S38 .005Ta
S38 .010Ta

S38 .005Mo
S38 .010Mo

S32A

TUNGSTEN – TANTALUM – MOLYBDENUM
BOAT SOURCETYPE MATERIAL

S39 .005Ta
S39 .010Ta
S39 .005Mo
S39 .010Mo
BOAT SOURCETYPE MATERIAL

S40 .005W
S40 .005Ta
S40 .010Ta
S40 .005Mo
S40 .010Mo
BOAT SOURCETYPE MATERIALTYPE MATERIAL

S42 .005W
S42 .010W
S42 .015W
S42 .010Ta

S42 .015Ta
S42 .010Mo
S42 .015Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S43 .005W
S43 .010W
S43 .015W
S43 .010Ta

S43 .015Ta
S43 .010Mo
S43 .015Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S44 .005W
S44 .010W
S44 .015W
S44 .005Ta
S44 .010Ta

S44 .015Ta
S44 .005Mo
S44 .010Mo
S44 .015Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S45 .005W
S45 .010W
S45 .015W
S45 .005Ta
S45 .010Ta

S45 .015Ta
S45 .005Mo
S45 .010Mo
S45 .015Mo
26

BOAT SOURCESBOAT SOURCETYPE MATERIALTYPE MATERIAL

S46 .005W
S46 .010W
S46 .005Ta
S46 .010Ta

S46 .005Mo
S46 .010Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S47 .010W
S47 .015W
S47 .020W
S47 .010Ta

S47 .015Ta
S47 .020Ta
S47 .010Mo
S47 .015Mo

BOAT SOURCETYPE MATERIAL

S48 .005W
S48 .010W
S48 .010Ta
S48 .010Mo
BOAT SOURCETYPE MATERIALTYPE MATERIAL

S49 .010W
S49 .015W
S49 .020W
S49 .010Ta

S49 .015Ta
S49 .020Ta
S49 .010Mo
S49 .015Mo

BOAT SOURCETYPE MATERIALTYPE MATERIAL

S50 .010W
S50 .015W
S50 .020W
S50 .010Ta

S50 .015Ta
S50 .020Ta
S50 .010Mo
S50 .015Mo

BOAT SOURCETYPE MATERIAL

S51 .010W
S51 .010Ta
S51 .010Mo
5/8” cavity x 1/8” deep (opening)

27

TUNGSTEN – TANTALUM – MOLYBDENUM
FOLDED BOATS

OL

W
BL

LL

H

BW

BASIC PART NUMBER

BL
1.88
1.88
3.75
3.75

FB1
FB2
FB3
FB4

BW

H

.75
1.3
1.0
.75

.73
.47
.50
.75

OL
4.5
4.34
6.16
6.16

W

LL

VOL

2.13
2.13
2.13
2.13

.75
.75
.82
.75

17CC
19CC
31CC
35CC

MATERIALAVAILABLE IN.005, .010, & .015 Mo & Ta
TUNGSTEN ON REQUESTAVAILABLE ON REQUEST: AL2O3 COATED INSIDE OR AL2O3 BARRIER TYPE

OL

W

BL

LL

H

BW

BASIC PART NUMBER

BL

BW

H

OL

W

LL

VOL

MATERIAL

FB10
FB11
FB12

.66
1.25
1.56

.45
.38
.50

.43
.31
.31

1.42
2.56
2.94

1.25
1.00
1.13

.38
.56
.69

2CC
3CC
4CC

AVAILABLE IN.005, .010, & .015 Mo & Ta
TUNGSTEN ON REQUESTAVAILABLE ON REQUEST: AL2O3 COATED INSIDE OR AL2O3 BARRIER TYPE
28

ALUMINA

Alumina (AI2O3) coated evaporation sources have been developed to replace alumina crucibles for some specificapplications. The advantages of this type of source is good heat transfer and the inertness of alumina with most metals.
Also, the evaporant does not wet the alumina, resulting in no resistant change of the boat when the evaporant melts.
Due to the non wetting characteristics of alumina, the evaporant forms a sphere when melted resulting in a point source.
This type of source will give long life compared to the non protected sources. Coated sources will require from thirty
to fifty percent more power to effect an evaporation due to the difference in heat conduction. The alumina
is semi-conductor grade and is applied to the boat by a plasma spray technique. Temperatures of 1850˚C should be
avoided and when an evaporation is effected the power should be reduced slightly to avoid over heating.
29

ALUMINA COATED EVAPORATION SOURCES
EVAPORATION SOURCE

Alumina Coated Tungsten Baskets
Part Number
RDM-WBAO-1
RDM-WBAO-2
RDM-WBAO-3
RDM-WBAO-4
RDM-WBAO-5
RDM-WBAO-6

Wire“A” Inside
Dia. Top I.D. Depth.020” .150” .225”.040” .375” .350”.040” .420” .425”.040” .790” .725”.050” .500” .775”.060” .900” .975”

“B”
OAL
4”
4”
4”
4”
4”
4”

“C”
Height
.375”
.500”
.575”
.875”
.925”
1.125”

Volts

Amps

Watts

Temp

5.70
6.20
6.90
13.00
7.00
15.80

11
40
39
33
50
49

63
248
272
429
350
768

1475˚C1475˚C1475˚C1475˚C1475˚C1475˚C

Dash Numbers are inorder of size (height)

EVAPORATION SOURCE

S1-AO-MO
S1-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat
EVAPORATION SOURCES2B-AO-MO
S2B-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat
EVAPORATION SOURCE

S3-AO-MO
S3-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat
EVAPORATION SOURCE

S8C-AO-MO
S8C-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat

30

ALUMINA
EVAPORATION SOURCE

S9A-AO-MO
S9A-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat
EVAPORATION SOURCE

S9B-AO-MO
S9B-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat

EVAPORATION SOURCE

S9C-AO-MO
S9C-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat

EVAPORATION SOURCE

S9F-AO-MO
0.005 AI2O3 Coating
0.010 Molybdenum Boat

EVAPORATION SOURCE

S21-AO-MO
S21-AO-W

31

0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten BoatALUMINA COATED EVAPORATION SOURCES
EVAPORATION SOURCE

S29-AO-MO
S29-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat
EVAPORATION SOURCE

S35A-AO-MO
S35A-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat

EVAPORATION SOURCE

S36-AO-MO
S36-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat

EVAPORATION SOURCE

S37-AO-MO
0.005 AI2O3 Coating
0.010 Molybdenum Boat

EVAPORATION SOURCES38A-AO-MO
S38A-AO-W
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat
32

ALUMINATUNGSTEN & MOLYBDENUM BOATSTUNGSTEN & MOLYBDENUM BOATS WITH ALUMINA BARRIERSThis type of source has been designed to give the benefit of a refractory metal boat and a ceramic barrier. The
exposed metal area in the bottom of the boat allows the evaporant to be in good thermal contact with the source.
The alumina barrier will inhibit the evaporant from creeping toward the heat sink or from wetting the entire boat.
0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat

EVAPORATION SOURCE

S35B-AO-MO
S35B-AO-W
Evaporation Area
1/4 in. x 3/4 in.

EVAPORATION SOURCE

0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat

S38B-AO-MO
S38B-AO-W
Evaporation Area
1/8 in. x 9/16 in.

EVAPORATION SOURCE

0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat

S42B-AO-MO
S42B-AO-W
Evaporation Area
3/4 in. x 1/4 in.

0.005 AI2O3 Coating
0.010 Molybdenum Boat
0.010 Tungsten Boat

EVAPORATION SOURCES45B-AO-MO
S45B-AO-W
Evaporation Area
5/8 in. x 1-3/4 in.

EVAPORATION SOURCE

0.005 AI2O3 Coating
0.010 Molybdenum Boat

S51-AO-MO

5/8” cavity x 1/8” deep
(opening)

33

ALUMINA COATED EVAPORATION SOURCES
EVAPORATION SOURCEEVAPORATION SOURCE

ME3-AO

ME4-AO

AI2O3 Coating
0.005 Mo Boat

AI2O3 Coating
0.005 Mo Boat

EVAPORATION SOURCEEVAPORATION SOURCE

ME6B-AO

ME9-AO

AI2O3 Coating
0.005 Mo Boat

AI2O3 Coating
0.005 Mo Boat

EVAPORATION SOURCEEVAPORATION SOURCE

ME22-AO

ME22A-AO

AI2O3 Coating
0.010 Ta Boat

AI2O3 Coating
0.005 Ta CoverBoth under and top surfaces coated

EVAPORATION SOURCEEVAPORATION SOURCE

ME25-AO-MO

ME17-.030W-AO

AI2O3 Coating
0.005 Mo Boat.030W
5/8” cavity x 1/8” deep
(opening)

EVAPORATION SOURCEEVAPORATION SOURCE

SB3-AO

SB3A-AO

AI2O3 Coating
0.010 Ta Boat

AI2O3 Coating
0.005 Ta CoverBoth under and top surfaces coated

EVAPORATION SOURCEEVAPORATION SOURCE

SB5-AO

SB5A-AO

AI2O3 Coating
0.010 Ta Boat

AI2O3 Coating
0.005 Ta CoverBoth under and top surfaces coated34BOX SOURCES

35

This section includes Special Tantalum Boats, Folded Baffled Box Sources and Shielded Baffled Box Sources. Special
tantalum boats have welded corners and offer the benefits of long life along with covered evaporation areas to help
reduce spitting and contain volatile materials. These are available in a variety of sizes and offer baffling in somecases. Custom sizes are easily made and available on request. Also shown are Folded Baffled Box sources, available
in Molybdenum and Tantalum, and offer exceptional baffling, without heat shielding. These are available in varying
capacities as standard items, as well as custom sizes on request. The last section includes Shielded Baffled Box
Sources and High Volume Sources that are ideal for SiO, Zns and other subliming materials.

SPECIAL TANTALUM BOATS

SB-1(0.010 Ta)
Baffled

SB-1A Cover(0.005 Ta)
Baffled

SB-1B Cover(0.005 Ta)
BaffledSB-2(0.010 Ta)

SB-2A Cover(0.005 Ta)

SB-2B Cover(0.005 Ta)

SB-3(0.010 Ta)

SB-3A Cover(0.005 Ta)

SB-3B Cover(0.005 Ta)

36

BOX SOURCES

37

SB-4
(0.010 Ta)

SB-4A Cover(0.005 Ta)

SB-4B Cover(0.005 Ta)SB-5(0.010 Ta)

SB-5A Cover(0.005 Ta)

SB-5B Cover(0.005 Ta)

SB-6(0.005 Ta)
Baffled

SB-6A Cover(0.005 Ta)
Baffled Cover

SB-6B Cover(0.005 Ta)
Baffled CoverFOLDED BAFFLED BOX SOURCESFOLDED BAFFLED BOX SOURCESTANDARD MATERIALSSTANDARD

AI2O3 COATED.005
Mo OR Ta.005 OR .010
Mo OR Ta.005
Mo OR TaNORMALLYNOT USED.005 OR .010
Mo OT Ta.010
Mo OR Ta

COVER

C

BAFFELB

FOLDED
BOX

A

BASIC PART NUMBER

BL

W

H

OL

P

VOL

SB-7
SB-8
SB-9
SB-10

1.75
1.75
3.0
2.75

1
1.5
1.38
2

.75
1
.75
1.25

3.5
3.5
4.75
4

0.06 (60 HOLES) 4 X 15 ROWS

21CC
43CC
50CC
112CC

* = SINGLE HOLE SIZES AVAILABLE ON REQUEST

0.06 (75 HOLES) 5 X 15 ROWS
0.06 (115 HOLES) 5 X 23 ROWS
0.12 (65 HOLES) 5 X 13 ROWSDIMENSIONS IN INCHESEXAMPLE: SB-10-C-.010 Ta-AO, MODIFIED, 3/4 DIA. HOLE IN CENTER
BASIC PART NUMBER
PART (COVER, BAFFLE BOX)
MATERIAL THICKNESS & TYPEUSE ONLY FOR AI2O3 COATED PARTS
LIST ANY MODIFICATIONS
38

BOX SOURCESBAFFLED BOX SILICONMONOXIDE SOURCE“BAFFLED BOX” SILICONMONOXIDE SOURCES

3.5 GRAM
500 Watts

BAFFLED BOX SILICONMONOXIDE SOURCE

5 GRAM
600 Watts

BAFFLED BOX SILICONMONOXIDE SOURCE

10 GRAM
750 Watts

The R.D. Mathis Company, “Baffled Box”
Silicon Monoxide Source has proven to be an
extremely successful method of depositing
Silicon Monoxide.
Source material is positioned in the boat in
two separate cavities, when heated itfollows an indirect path through a series ofbaffles and then out the vertical chimney.
The substrate cannot see the bulk source
material at any time, this, essentially,
eliminates any chance of spitting andstreaming, which causes pinholes.
A paper describing the techniques of Silicon
Monoxide deposition and the results ofcapacitor and resistor manufacturing
utilizing the “Baffled Box” Source will besent upon request...ask for “Silicon
Monoxide Evaporation with “Multi-baffled
Box Source” by Earl Olson of the Halex Corp.
and R.D. Mathis.

BAFFLED BOX SILICONMONOXIDE SOURCE

20 GRAMCROSS SECTION

950 Watts
RADIATIONSHIELDSSiOBAFFLED BOX SILICONMONOXIDE SOURCE

40 GRAM
1100 Watts

SOURCEVERTICAL OR
HORIZONTAL

INVERTED

3.5 Gram
5 Gram
10 Gram
20 Gram
40 Gram

SM-8
SM-10
SM-12
SM-14
SM-16

SM-9
SM-11
SM-13
SM-15
SM-17

Additional sizes are available upon request.
39

NEW SILICON MONOXIDE SOURCES (SO SERIES)NEW SILICON MONOXIDE SOURCES SO SERIESThis new silicon monoxide source design is an improved model of our very sucessful SM series. It incorporates thesame type of baffling and shielding as the SM sources, insuring an indirect path from source material to substrate.
The new SO Series silicon monoxide source offers the following features: Longer life, eliminates leakage, loading
without removal from system and “completely sealed” one unit construction.

SILICON MONOXIDESOURCE SO SERIES

SO-20
1.5 GRAM
333 Amps
286 Watts
S0-20 Up Evaporation
S0-21 Down Evaporation

SILICON MONOXIDESOURCE SO SERIES

SO-10
6.5 GRAM
226 Amps
282 Watts
S0-10 Up Evaporation
S0-11 Down Evaporation

SILICON MONOXIDESOURCE SO SERIES

SO-22
6.5 GRAM
246 Amps
330 Watts
S0-22 Up Evaporation
S0-23 Down Evaporation
40

BOX SOURCESNEW SILICON MONOXIDE SOURCES SO SERIESSILICON MONOXIDESOURCE SO SERIES

SO-24
13 GRAM
264 Amps
441 Watts
S0-24 Up Evaporation
S0-25 Down Evaporation

SILICON MONOXIDESOURCE SO SERIES

SO-26
13 GRAM
Horizontal Source
271 Amps
439 Watts

A technical bulletin is available upon request – “Silicon Monoxide – Properties and Evaporation Techniques” by R.D. Mathis(Larger SO Series Sources available on request)
41

DOUBLE SHIELDED SiO/ZnS EVAPORATION SOURCEDOUBLE SHIELDED SiO / ZnS EVAPORATION SOURCE

BASIC PART NUMBER
LH
BL
W
H
OL
LW
VOL
MATERIAL
SO-32
1 1/4” 2.88 1.80 1.79
4.0
1.0 20 cc Ta – Heater & Fill Hole Covers
SO-34
2”
2.88 1.80 2.42
4.0
1.0 40 cc
Nb – Lower Heat Shields
SO-36
2”
2.88 2.30 2.42
4.0
1.5 60 cc
Mo – Upper Heat Shields
SO-38
3”2.88 2.30 3.42
4.0
1.5 90 cc
AVAILABLE ON REQUEST: DOWN OR SIDE EVAPORATION SOURCE

42

BOX SOURCESHIGH VOLUME SIO SOURCESHIGH VOLUME SiO/ZnS SOURCES

PART NUMBER

SL

W

SD

LW

OL

Ø

VOL*

SO-100
SO-150SO-200SO-250SO-300SO-500SO-800
SO-1000
SO-1500
SO-2000

5.875”
5.875”
5.875”
5.875”
5.875”
8.625”
8.625”
7.875”
8.250”
8.375”

3.250”
3.500”
3.750”
4.250”
4.250”
4.250”
6.000”
6.000”
6.375”
7.188”

2.000”
2.250”
2.500”
3.000”
3.000”
3.000”
4.800”
4.800”
5.188”
5.938”

0.750”
0.750”
1.500”
2.250”
1.000”
2.250”
2.000”
2.000”
2.000”
2.500”

7.625”
7.625”
8.125”
7.250”
8.125”
11.000”10.150”11.000”12.000”11.500”0.750”
0.750”
0.750”
0.750”
0.750”
0.750”
1.000”
1.000”
1.000”
1.000”

100 cc
150 cc200 cc
250 cc
300 cc
500 cc800 cc1000 cc
1500 cc2000 ccCAP
SHIELD, TOP OUTERSHIELD, TOP INNERHEATERSHIELD, BOTTOM INNERSHIELD, BOTTOM OUTERFASTENERS* Volumes shown are maximums. Recommended usage is 50% of volumes indicated43

MICRO ELECTRONIC SOURCES

Our Micro-Electronic sources represent a full line of smaller size sources that are similar to the standard size sourcesin our catalog. The overall length on these sources is slightly less than 2 inches, in most cases. The smaller sources
are ideal for lower power systems or processes that require small amounts of evaporants. Custom sizes and44
modifications of these sources are available on request.

MICRO ELECTRONIC SOURCES
TYPE

MATERIAL

Silicon Monoxide
and Cadmium
Sulfide Source.
This sourceis similar to the
SM 10 Baffled Box.
The capacity isapproximately
2 grams.

ME1 Tantalum.7 VOLTS

129 AMPS

TYPE

TYPE

ME 2
(.005 Ta)95 WATTS

Radiation Shields

ME 2A
Cover
(.005 Ta)

MATERIAL

ME8- .005W
ME8- .005Ta
ME8- .005Mo
TYPE

SiO

MATERIAL

ME7- .005W
ME7- .005Ta
ME7- .005Mo

ME 2B
Cover
(.005 Ta)

MATERIAL

ME9- .005W
ME9- .005Ta
ME9- .005Mo
TYPE

MATERIAL

ME10- .005Ta

TYPE

MATERIAL

ME11- .030W
ME11- 3x.025W

TYPE

MATERIAL

MATERIAL

ME3- .005W
ME3- .005Ta
ME3- .005Mo

ME12- .030W
ME12- 3x.025W

TYPE

TYPE

MATERIAL

MATERIAL

ME4- .005W
ME4- .005Ta
ME4- .005Mo

ME13A- .030W
ME13A- 3x.025W

TYPE

TYPE

MATERIAL

MATERIAL

ME5- .005W
ME5- .005Ta
ME5- .005Mo

ME13B- .030W
ME13B- 3x.025W

TYPE

TYPE

MATERIAL

MATERIAL

ME6A- .005W
ME6A- .005Ta
ME6A- .005Mo

ME13C- .030W
ME13C- 3x.025W

TYPE

TYPE

MATERIAL

ME6B- .005W
ME6B- .005Ta
ME6B- .005Mo
45

TYPE

MATERIAL

ME14- .030W
ME14- .040W

TUNGSTEN – TANTALUM – MOLYBDENUM
TYPE

MATERIAL

ME15- .030W
ME15- .040W

TYPE

TYPE

TYPE

ME19

ME20

Use with C1 and C9 Crucible
Crucible size 1/2 in. x 1/2 in.

Use with C10 Crucible
Crucible size 1/2 in. x 1/4 in.
(Susceptor Type)

MATERIAL

ME16A- .030W
ME16A- 3x.025W

TYPE

MATERIAL

ME16B- .030W
ME16B- 3x.025W

TYPE

TYPE

MATERIAL

ME21- .005W
ME21- .005Ta
ME21- .005Mo

MATERIAL

ME16C- .030W
ME16C- 3x.025W

TYPE

ME 22
(.005 Ta)

MATERIAL

ME16D- .030W
ME16D- 3x.025W

TYPE

ME 22A
Cover(.005 Ta)ME 22B
Cover(.005 Ta)

MATERIAL

ME16E- .030W
ME16E- 3x.025W
TYPE
TYPE

MATERIAL

ME17- .030W
ME17- 3x.025W

MATERIAL

ME23- .005W
ME23- .005Ta
ME23- .005Mo(CoveredBoat Source)

TYPE

MATERIAL

ME18A- 3x.025W
ME18A- 3x.030W
Use with C1 Crucible

TYPE

MATERIAL

ME18B- 3x.025W
ME18B- 3x.030W
Use with C9 Crucible

TYPE

MATERIAL

ME24- .005W
ME24- .005Ta
ME24- .005Mo(CoveredBoat Source)46

R.D. MATHIS COMPANY
TYPE

SIZE

TM1
TM1
TM1
TM1
TM1
TM-2

2 in. x 3 in.
2 in. x 4 in.
3 in. x 4 in.
4 in. x 4 in.
3 in. x 6 in.
LinearTUNGSTEN SCREEN

Tungsten screen material available without frame inrandom lengths x 6 inches wide. Part No. TM-2

R.D. Mathis Company specializes in the quality fabrication of Hi-Vacuum Evaporation Sources. Our
refractory metal facilities are completely flexible... mass production or small custom orders areproduced with equal ease and attention to detail, customer specifications are rigidly adhered to.
Engineering consultation is available to solve those difficult “source” problems.

CUSTOM ORDER INFORMATIONA – Overall length
B – Coil length
C – I.D. of coil

D – No. of coils
E – MaterialContinuos coils are available with I.D.
diameters 1/4 in., 3/8 in. and 1/2 in.

For a prompt quotation on any special source...in either custom or production quantities...please send us a sketch
showing type of material, size and dimensions.

MATERIAL FOR RESALEAs a service to our customers, R.D. Mathis Company has available small quantity orders of the following material.

47

WIRE
.001 through .020W
3 x .025W
3 x .030W
4 x .030W
3 x .040W
3 x .040W
3 x .060W
P8 – 3 x .025W Loose Lay
P8 – 3 x .030W Loose Lay

SHEET.005W, Ta, Mo.010W, Ta, Mo, Nb.015W, Ta, Mo.020W, Ta

TUNGSTEN MESH
TM2 6” wide x
random length,
wire size .001”

ROD
.070W
.080W
.100W
.125W

W = Tungsten

Ta = Tantalum

Mo = Molybdenum

Nb = Niobium

NOTES

48

R.D. Mathis Company
Your best choice for quality hi-vacuum
evaporation sources.

(562) 426-7049 • (562) 595-0907 fax • www.rdmathis.com
P.O. Box 92916 • Long Beach, CA 90809-2916