www . m ksi n st . co m

Mass Spectrometry
Solutions

HPQ3/HPQ3S
HIGH PRESSURE COMPACT QUADRUPOLE PROCESSMONITORS WITHOUT DIFFERENTIAL PUMPING
Residual Gas Analysis (RGA) is a routine diagnostic tool for any vacuum engineer but thetraditional upper working limit of 1e-4 mbar total pressure is restrictive for many processapplications. The HPQ3 and HPQ3S RGAs from MKS allow operation far beyond this limit
without the need for differential pumping. The field proven technology of the HPQ analyser
coupled with the latest innovative electronics platform derived from the Microvision 2 family
give data quality not previously seen in this class of instrument. The resulting system isless complex, with reduced installation requirements, offering a higher level of reliability
at a substantially lower cost. In addition, the HPQ3S uses application validated correction
algorithms to compensate for the sensitivity variation arising from ion-molecule interactionsin the ion source at higher pressures. This allows reliable data to be obtained for specific gas
species including water, oxygen, nitrogen, methane, helium and hydrogen in argon and othergas mixtures.

ApplicationsThe HPQ3 and HPQ3S are suitable for a wide range of applications in PVD or for vacuum
systems with inert residual gases including:
Monitoring• Leak detection of vacuum lines, welds
and seals• Vacuum diagnostics• Pump down monitoring• Chamber bakeout monitoring• Leak checking of coolant lines within avacuum chamber• Chamber contaminant monitoring,
including hydrocarbons• Verify the quality of process gases• 	Monitor cryo-pump performance• Rate-of rise testing

Control and Automation• Interlocking equipment to stop activity
when a leak occurs• Sending alarms to control systems whencontamination limits for chambers, gases
or substrates are exceeded• Linking RGA data into third party processcontrol systems for SPC and complex
analysis• Providing reports and trending vacuum
conditions in context with tool, process
and product• Closed loop control of sputter processes

RGA Technology Leadership
MKS was the first company to offer an RGA compatible
with modern Ethernet based, web-enabled, wide area
network installations. HPQ3 continues this development
to a level that offers the highest flexibility and connectivity
through the use of industry standard communication
hardware and software. HPQ3 optimizes the roles requiredof a complex sensor by having two dedicated processors;• An optimized, proprietary processor for data acquisition• An industry standard CE operating system processor
for external communications through field proven TCP-IPtechnology.
The advantages of this design approach are fast,accurate data from a robust RGA sensor using industry
standard, flexible communication protocols. HPQ3 also
provides a complete range of additional digital and analog
connections for integrating into systems with flexible low
cost solutions.

This is possible in a single scan or peak jump dataacquisition with less than 20ms between the maximum
and minimum signal levels and without the need foran expensive electron multiplier which needs frequentcalibration and replacement.
• Prevents large 		
peaks from causing
false positive 		measurements on
small peaks.
• Temperature stabilized
critical components
with improved 		
signal stability andbaseline drift allow
Built-in web application for HPQ3 control
the unit to be used 		and data acquisition
without frequent 		
recalibration if the vacuum chamber is stable 		but ambient air temperature fluctuates.

Sensor Leadership• Variable sensor conditions to match the needs of eachprocess under different pressure conditions

The new RF design in the HPQ3 covers the 1-100amu
mass range without compromising the quality of gas
peak separation at very low mass or high mass.
The field proven High Pressure Quadrupole analyser
design in the HPQ3 retains the robust and inexpensive ion
source design with dual filaments. This allows continuous
uninterrupted operation without needing to regularly
replace filaments before their normal expected lifetime.

• Each optimized sensor configuration is separately stored
in the RGA and automatically recalled or recalibrated bysoftware recipes.

The HPQ3 can be used for processes where data isrequired up to a total pressure of 1.3e-3mbar. For specifichigher pressure applications up to 1e-2mbar the HPQ3S
makes real-time corrections using a gauge pressure fromthe tool or by using a variety of optional independent
gauges fitted to a custom F-Chamber designed for
optimum performance with the HPQ3S.
Electronics Leadership
The patented wide dynamic range detector electronics
allow detection of single figure parts per million chamber
leaks or contaminants, even when simultaneously
measuring major gas peaks in the e-3mbar range.

• Flexible digital and analog I/O capability with a 		dedicated gauge port as standard.
Software Leadership
In common with other MKS RGA products, the HPQ3
has a variety of software control options to match therequirements of all customer applications.
Built-in Web Server Application
A web interface using industry standard technology
allows set-up and control of the HPQ3 from anywhere on
a network. Using a non platform-specific web browser,
calibration, operation and saving real time data to anexport format is all possible. Using the documented
Software Developer’s Kit, ASCII protocol and TCP-IP
communication, any third party software can send andreceive commands and data from the HPQ3 and HPQ3S.
Process Eye Professional
A Windows-based comprehensive software platform
offering complete control of all RGA parameters:• Recipe driven control
to allow the highest
level of flexibility butwith ease of use
through the EasyView
recipe and Recipe
Wizard.

Wide dynamic range and high sensitivity allow parts per million level 		detection even at high pressures• Ability to link to othersystems through avariety of mechanisms Process Eye Professional for flexible
such as Modbus, 		control through recipe-driven data 		
ASCII, SECS protocols, 		collection
serial communications, 					TCP-IP, file exchange and many others.
• Flexibility to run automatic and precisely-optimized 		data collection, alarm condition checking and 		closed loop control operations.

TOOLweb® RGA
A specialized, turn-key
tool-integration software
package (PC or serverbased) providing 		
optimized methods toget the most reliable
information from RGAs
and other sensors onprocess tools:
TOOLweb RGA for complete integration• Complete integration
with tool and factory process controlof RGA data with tool
operation and FDC systems.

• Levels of interdiction from passive monitoring of the toolvacuum, to process critical go/stop control of individual
process chambers• Powerful web based reporting provides process 		
engineers with highly valuable information to keep 		
tools running at peak efficiency from anywhere on thenetwork.

Dimensional Drawings —Note: Unless otherwise specified, dimensions are nominal values in millimeters.

Specifications
Mass Range

1-100 amu

Detector

Faraday

Filaments

Twin. Tungsten or Thoria Coated Iridium

Maximum Recommended
Operating Pressure

HPQ3: 1e-3 Torr (1.3e-3 mbar)
HPQ3S: 8e-3 Torr (1e-2 mbar) – Application dependant

Maximum Transient Burst Pressure

4e-2 Torr (5e-2 mbar) – gas dependant

Ion Source Sensitivity

5e-5 A/mbar

Minimum Detection Limits
Partial Pressure: 8e-11 Torr (1e-10 mbar)(3σ baseline noise at 300ms integration) Concentration: 5ppm at 1e-3 Torr (1.3e-3 mbar)
Mass Stability±0.1 amu over 8 hours at stable ambient

Resolution

Better than 10% valley for peaks of equal height across mass range

Bakeout Temperature

250°C with electronics removed

Operating Temperature

200°C at flange with electronics <40°C

Sensor Insertion Length

25mmMounting Flange

DN38CF (70mm/2.75inch OD) Conflat

Housing

Application specific, options include CF and KF elbows or custom F-Chamber for HPQ3Swith Gauge.

Electronics Weight on Flange

1.7kg

Power

24V DC, 3A external universal voltage supply (included)

Maximum Operating Conditions

Electronics: 10-40°C, 80% RH (non condensing)Communication

10/100 Base-T Ethernet, static or automatically assigned IP addresses

ComplianceCESpecifications

Data Acquisition Method

Dedicated real time acquisition processor

Data Collection Methods• Analog scanning, partial or full mass range 8, 16 or 32 points/amu• Barchart scanning, partial or full mass range				• Peak-jump collection of any combination of peaks at up to 15 per acquisition set• Complete recipe control to link multiple acquisitions into a single scan
(Process Eye Professional and TOOLweb RGA only)

Number of Stored
Source Settings• 6 sets including ion source parameters, alignment, resolution, detector calibrations• Stored in electronics and recalled by Process Eye Professional or TOOLweb RGA

Software Controlled TuningParameters• Electron energy, 20 to 100eV• Emission current, 0 to 2 mA
• Ion energy, 0 to 10V• Ion extraction, 0 to -130V• Filter pole bias, 0 to -10V to +10V

Filament Protection

Dedicated X-Trip with optional pressure sensor for use with cryo-pump isolation valve.
Filament interlocked to gauge OK for HPQ3S.

Data Acquisition Speed< 3ms per point for analog or barchart scanning

Settling Time to 1 ppm ofMaximum Signal<20ms

Control Method

CE operating system processor with web-server interface

Command Structure

Documented SDK and ASCII command protocols

Software• Built-in web applications allowing RGA control and data acquisition using a platform
independent web browser without the need for dedicated installed software• Process Eye Professional and TOOLweb RGA Windows software packages for Windows
XP, Vista or Win7 (32 and 64bit.)Interfaces• RJ45 socket: 10/100 Base-T Ethernet• 25 way D-type female: 16 configurable TTL I/O, includes power for ±15V (100mA),+24V 100mA) and ±3.3V 100mA)• 15 way D-type female: 4 analog in (-11V to +11V 22bit), 2 analog outputs (0-10V 12bit),includes power for ±15V 100mA)• 9 way D-type female dedicated vacuum gauge port: -11 to +11V 22bit analog input,
1 digital input (gauge OK), 1 digital output (gauge enable) and gauge power +24V (500mA)• 3.5mm jack socket: Opto-isolated input for filament protect or control with auto detection ofpresence of the jack plug as failsafe• 2.5mm jack socket: Audio output for use with speaker and wired or wireless headphones

Ordering Information
Ordering Code Example: 993-41X-09Y			
Code		Example Configuration
993-410-090
HPQ3			993-410-09Y					994-41X-09Y
HPQ3S			Filament Selection (Y)0Tungsten			0					Thoria coated iridium			
1HPQ3S Gauge Option (X)ASimple elbow and no gauge (pressure from customer source)0					
F-Chamber with GP Micro-ion gauge			A							F-Chamber with MKS 909A ion gauge			B							Additional gauge options are available. Please consult factory for ordering information.			
Software Options
All HPQ3 and HPQ3S are delivered with Process Eye Professional and web based software as standard. For the Software Developer’s Kit, tool integration
through TOOLweb RGA or recipe development assistance for Process Eye, please contact your local MKS office for applications advice.

MKS Instruments, Inc.
Global Headquarters
2 Tech Drive, Suite 201
Andover, MA 01810

MKS Instruments, Inc.
Mass Spectrometry
Solutions

3635 Peterson Way		
Tel: 978.645.5500			 Santa Clara, CA 95054
Tel: 408.750.0300
Tel: 800.227.8766 (in USA)
Web: www.mksinst.com
HPQ3/HPQ3S - 2/18
© 2012-2018 MKS Instruments, Inc.
All rights reserved.

MKS Instruments, Inc.
Mass SpectrometrySolutionsS sisCowley Way			Crewe, Cheshire CW1 6AG
Tel: +44.1270.250150

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. TOOLweb® is a registered trademark and mksinst™ and Process Eye™
are trademarks of MKS Instruments, Inc., Andover, MA.