Overseas Trends

MEMS 2004
giving the examples of Si gears and position sensors, andarousing great interest in the potential to create new value
through the integration of conventional and MEMS
technology. In the invited lecture held on January 27, Prof.
Toko of Kyushu University spoke on the topic "Measurementof Taste and Smell using Biomimetic Sensors." The highexpectations held for future results of this research werereflected in the eager applause that this presentation
received.
Session 1, chaired by Prof. Tabata of Kyoto University,
focused on self-organization, which has recently beenattracting growing interest, and Session 2 focused on celland particle handling. Together these two sessions provided
a taste of the future directions of this research field. InSession 4, "Bio Medical Devices," presentations such as"Parylene Flexible Neural Probe with Micro Fluidic Channel"
by the first speaker, Prof. Takeuchi of The University ofTokyo, provided a sense of overall future trends in theMEMS field, with high expectations held for NEMS (NanoElectro Mechanical Systems) and broad expansion of MEMS
applications. Session 6, "Nano Electro Mechanical Systems,"
introduced the 3D nanofabrication technology using electron
beam lithography that has been developed by NTT Basic
Research Laboratories. The seconds-long around-the-world
demonstration performed using the world's smallest globe - a
60µm diameter globe created using the NTT technology met with enthusiasticapplause.
With respect to RF technology applications, oscillatorsand switches developed with MEMS have performed amply
at the R&D level, indicating that we are moving even further
towards full-fledged practical application.
This year's presentation themes cut a particularly goodbalance, highlighting both practical applications of MEMS
technology and possibilities for the future.

MEMS 2004 (IEEE The 17th International Conference on
Micro Electro Mechanical Systems) was held from January
25 (Sun.) to 29 (Thurs.), 2004, at the Maastricht Exhibitionand Convention Center (MECC) in Maastricht, The
Netherlands. The conference welcomed over 600
participants in total; furthermore, the number of preregistered participants (546) was a significant increase overlast year's pre-registered attendance of 513, continuing thegrowth trend of recent years. Aided by the European venue,
the conference enjoyed a good balance of participation for
an international academic conference with 247 attendees
from Europe, 118 from North America, and 178 from thePacific Rim.
A total of 217 papers were presented (compared to 176
last year): 3 invited lectures (same as last year); 41 oralpresentations (22 last year); and 173 poster presentations(151 last year). Due to the increase in MEMS R&D, thenumber of papers submitted for this conference hasballooned year on year (629 submissions this year as
opposed to 500 last year: a 20% increase). Consequently,
with the single session format for oral presentations
employed again this year, presentations could not be
contained in morning sessions as it was last year, and so afull-day program was implemented. By nationality, the mostpresentations were made by North Americans (80), followedby Japanese (48), Swiss (14), South Koreans (13), Germans,and Taiwanese (11). The European venue played some rolein the high number of Swiss presentations. By field, a large
proportion of presentations focused on bio & chemical
microsystems; presentations on production, packaging, andmechanical-physical issues were also prominent.
In the first of the invited lectures, Prof. Nico de Rooij of
the University of Neuchatel, who has also addressed anMMC-sponsored symposium, spoke on the topic "MEMS forWatches," introducing the value MEMS can add to watches

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