ROLL-TO-ROLL VACUUM WEB COATING SYSTEMSROLL-TO-ROLL VACUUM WEB COATING SYSTEMSFOSA MX I FOSA CX I FOSA MX 300/600
FOSA LABX 330 GLASS I FOBA

Vacuum web coating applications

Our strengths in web coating

VON ARDENNE provides tailored web coating solutions for today’s mostambitious thin-film applications on polymer films, flexible glass and metal
strip. These solutions comprise coating equipment, key technology components and application technology.

With more than 26 web coating systems for large-scale industrial production in the field and 55 years of process experience, VON ARDENNE
has secured an enormous intellectual property portfolio in application
technology.

Our customers benefit from our extensive process know-how and ourexperience, which we have gained for more than 15 years in roll-to-rollThin functional layers
for li-ion batteries
We provide solutions for the roll-to-roll deposition of functional layers forbattery applications on thin polymer or metal substrates. These coatings
help reduce costs and increase the performance of Li-ion batteries.

coating, 40 years in magnetron sputtering and 55 years in electron beamtechnology. Moreover, we support our customers in qualifying their products and processes step by step. For that, we offer unique facilities, suchas our in-house sample coating equipment and technology support forvarious substrate types and sizes.
Together with our customers, we develop their ideas, from the firstlaboratory tests to the manufacturing of the most competitive large-scale
production equipment.

Flexible photovoltaics
Metallization, optical filter coatings and barrier coatings
for flexible PV substrates

VON ARDENNE provides high barrier multilayer technology and equipment to create moisture and oxygen barriers on polymer films. they arescalabe, reliable on large surfaces and keep costs below the benchmark.

Flexible displays/
flexible electronics
Anti-reflective & protection coatings on polymer films
VON ARDENNE is the leading supplier of web coating equipment for antireflective and antistatic coatings on polymer films, such as PET and TAC.

In-house technology & application center
Product & process verification and optimization;
sample coatings of customer applications

Close partnershipwith Fraunhofer FEP, European Society of Thin Films and AIMCAL

Advanced Packaging
Coatings for next-generation packaging applications
based on electron beam evaporation

Barrier layers
on polymer films

Expertise and simulation support
for qualified concept development and evaluation

R2R coating of flexible glasswith functional layers
Flexible glass is a material of the future with a unique combination ofproperties. It is available in rolls and is ideally suited for applications suchas flexible electronics, photovoltaics and displays.
VON ARDENNE has developed a roll-to-roll vacuum coating system
optimized for the processing of flexible glass: the FOSA LabX 330 Glass. It
is available for demonstrations, sampling and joint product developments
in Dresden to help flexible glass move from the laboratory to the mass
market.

ANSYS simulation of winding system

Worldwide rolloutsof mid-size and large-scale equipment

Production support
at customer’s site after SOP for efficient ramp-up

Metal mesh for new polymer film based touch sensor
applications
We provide application technology for metal mesh based touch sensors
with a layer stack of metal and metal/oxide layers. This solution enables
the perfect combination of adhesion, conductivity and color on bothsides of the polymer film.

Tailored service & support

ITO coatings on polymer films and flexible glass
VON ARDENNE provides the technology and the equipment for wet anddry index matching ITO coatings.
Beyond that, it is a strategic goal for us to develop equipment andprocesses for the roll-to-roll coating of flexible glass, starting with ITO for
OLED applications.

Anti-counterfeiting
technology
Holographic coatings on microstrucured polymer films

This knowledge capital ranges from complete layer stacks for the window
film business to specific process know-how in the variety of all thin-film
materials, and is the basis for customer-driven optimizations.

around the world, up to 24/7

Customized vacuum web coating solutions
It is our aim to help our customers evolve and focus on
their product ideas.
Therefore, we offer solutions to customize existing equipment concepts
or to design specifically customized equipment for our customers.
Furthermore, the customer is able to incorporate specific coating
technology, for example their own coating components. Finally, we support our customer in scaling up their products from R&D scale to mass
production for worldwide roll-out.

Upgrade of existing equipmentwith new components and application technologies

Magnetic field and
PICMC plasma simulation

Product range

VON ARDENNE provides five machine platforms as a basis forcustomization according to the required solution defined by the process,the annual throughput, the facility surroundings and the budget.
Each FOSA uses our process and technology components, such as
rotatable magnetrons and our proven winding system, which is suited forthe forward and backward coating of sensitive thin substrates.
The FOSA MX and FOSA CX are ideal tools for mass production, e.g. ofdisplays and window films. The FOSA MX 300/600 is designed for smallscale production and process and product qualification – at a small scale,
but with our original key components.

FOSA MXFOSA MX 300/600

The FOSA MX is a web coating system with a modular design. It is ideal
for high-volume production and can be configured with up to threecoating drums.

The FOSA MX300/600 is a web coating system based on a modular,
expandable and highly customizable platform for a wide range ofsubstrates and applications. It is especially designed for all process andproduct qualification steps from the laboratory to production.

Furthermore, it offers an advanced maintenance concept. The FOSA MX
is engineered for minimized downtime for complex layer stacks, such as
AR and window films.

The system uses the same key components as our web coating
systems for industrial production, however at a smaller scale. Thus, ourcustomers can test their applications under laboratory conditions andsave time when they scale their products up to mass production.

KEY FEATURESKEY FEATURES

Flexible arrangement of different process sections and sources

Single, dual or triple drum configuration

Modular process chambers

Load locks with gate valves for short campaign times

Winding chambers with load locks

Individually pumped compartments

Configurable for interleaf and thin substrate winding

Superior maintenance concept

FOSA LabX 330 GLASSFOSA CXVON ARDENNE has developed the FOSA LabX 330 Glass, a roll-to-roll
vacuum coating system optimized for the processing of flexible glass. The
system was put into operation in 2016 and is available for demonstrations,sampling and joint product developments. Please contact us if you areinterested in taking this opportunity.

The FOSA CX is a compact production tool for the roll-to-roll depositionof thin functional layers on polymer films. It is ideal for high-volume
production and is optimized for single drum applications.
Furthermore, it benefits from a freely configurable compartment
structure and can be maintained easily from two sides. The FOSA CX
is engineered for long production campaigns with minimal operator
intervention.

KEY FEATURES
Ultra-thin glass, 100 μm thin, flexible and lightweight, perfectfor electronic applications
Configured for hot ITO deposition

KEY FEATURES

Based on practical expertise in roll-to-roll (R2R) handling andcoating of flexible glass rolls provided by the main suppliers

Single drum, single chamber
Reverse mode

FOBA

Powerful vacuum pump set

CUSTOMIZED WEB COATING SYSTEMThe FOBA is a coating system for the roll-to-roll coating of flexible
materials. It uses our proven electron beam evaporation technology todeposite functional layers at high rates on polymer film or thin metal foil,
for instance for holographic applications, battery applications and nextgeneration packaging.

KEY FEATURES

Customized equipment according to the product and businesscase requirements of the customer

Various process components (planar or rotatable magnetrons,
thermal evaporation, electron beam systems, PECVD, etc..)

E-beam evaporation web coater for polymer films and thinmetal strip

Verified and tested at in-house technology and application center

Full support by VON ARDENNE: from verification & initialengineering to pilot tool, 1st production tool, world wide roll out
and world wide service

Uses VON ARDENNE E-beam evaporation technology and alltypes of pre-treatment and sputter sources

Especially designed winding system (e.g. no front touch, doublesided coating, exotic substrates)

High-speed coating up to 1000 m/min

The FOBA uses our proven electron beam evaporation technology todeposite functional layers at high rates on polymer film or thin metal strip,
e.g. for holographic applications.
In addition to our standard products, we offer customized web coating
systems according to the requirements of our customers.

VON ARDENNE key components for vacuum web coating
We develop and provide the key process components for VON ARDENNE
coating systems. They have been tested in our in-house technology andapplication center and have proven in the field. The requirements for web
coating components are determined by demanding substrate properties,
high-speed throughput, complex technology processes, costs, quality
standards and limited space.

VA PROCOS2 Process control system
Since 1980, VON ARDENNE has been in a leading position in reactive
sputtering processes. Furthermore, we have provided and optimized
our process control system VAprocos for many years.
Today, VA PROCOS2 controls the reactive magnetron sputtering ofcompound layers (such as ITO, TiO2, TiN, Al2O3, AlN, SnO2, SiO2, Si3N4,
ZnO, ZrO or Ta2O5) by reliably fixing the working points in the crucialtransition region. VAprocos also controls one or more reactive gas
inlets (e.g. oxynitrides).

VON ARDENNE is equipped with the expertise, the in-house facilities andthe qualified staff to define the ideal configuration of these components.

Our key competencies forweb coating components

Control schemesĵ PEM (intensity) control

Web Handlingĵ Impedance control

ĵ Fully reversible winding system for forward and backward coatingĵ Lambda probe control

ĵ Winding without touching the front sideĵ Balance/IMBALĵ Free span coating, e.g. winding and coating of flexible glass

ĵ Cascaded controllerĵ Others

Post-Treatment
ĵ Flash lamp annealingĵ Web marker

E-beam technology

Magnetron technology

Inline Measurement System

With more than 60 years of experience and over 400 electron beamsystems installed worldwide, VON ARDENNE provides the most advanced
and powerful electron beam systems.

Thanks to many years of experience gained from designing and installing
advanced sputtering equipment, we can offer a complete portfolio ofcomponents for specific tasks:

In web coating, electron beam technology enables:

Sputtering modes
DC, DC-pulsed, DC with DAS, AC-MF, bipolar processesĵ Transmittance, reflectance in VIS and NIR
ĵ Eddy current resistance measurement
ĵ Quality inspection system (e.g. wrinkle control, particle scanner)
ĵ Data retrieval and analysis system

Pre-Treatment of the Substrateĵ Heat treatment
ĵ Much higher deposition rates (metals, alloys and compounds)
compared to sputteringĵ Superior layer properties, e.g. improved adhesion, color and uniformity

ĵ Glow discharge device
ĵ IR heater

Patented vario cathodeĵ Ion source

The high acceleration voltage ensures the stable vapor penetration of theelectron beam. This leads to a superior and stable evaporation process,especially with multiple skip beam processes used for substrates with awidth of more than one meter.

Deposition Components
ĵ Magnetrons, optimized for web coating (e.g. DAS)ĵ Electron beam guns for web coating

Electron beam deflection systems

ĵ Process control systems

Limiting the energy impact and substrate stress is the key for highthroughput web coating. VON ARDENNE provides advanced magnetic
deflection systems for the inbound AND outbound electron beam. This
helps to eliminate up to 94 percent of the electrons before they reach thesubstrate.

ĵ New deposition sources (e.g.. ICP source)

Machine Operation Interface
ĵ Fully integrated systemĵ Data storage and analysis toolsĵ Connection to manufacturing execution and quality inspection
systemHigh-power electron beam guns
VON ARDENNE develops and manufactures electron beam systems
which are used for melting, refining, evaporation or heat treatment.
The first electron beam gun was developed in 1959 at the Manfred vonArdenne Research Institute.
Our cur­rent EH150V, EH300V and EH800V elec­tron beam guns are
the most pow­er­ful in the world. We work on the con­tin­u­ous im­prove­mentof our key com­po­nents at our de­vel­op­ment cen­ter for elec­tron beamtech­nolo­gies. This is where we pro­duce and test our high-qual­ity elec­tron
beam guns.

Magnetron types
Single, dual or triple planar or rotatable

Key Features
ĵ Scalable system for monitoring and process control
ĵ Process adapted and ready to use configuration
ĵ Specialized processing for ARC event
detection and handlingĵ Designed for operation in an industrial
environment (IP54/EMC)
ĵ Sensors and actors from previous VAprocos application are “plugand-play” compatible

Magnet bars & magnet systems
Planar (150 gauss to 800 gauss), rotatable (500 gauss to 1000 gauss)
Gas inlet system
Binary system, fast reaction time, fully system integrated gas delivery
solution, enables reactive gas sputtering application using the VON ARDENNE process control system (VAprocos2).
Rotatable Magnetron Technology get the best Cost of Ownership!
We have incorporated our rotatable magnetrons into the FOSA platform.
They have a proven target substrate distance for optimized energy impact
and deliver a superior coating uniformity.
Customer benefits
compared to planar magnetrons:ĵ Coating uniformity of ± 1.5 % over a width of up to 3 m
ĵ Higher deposition rates
ĵ Target utilization of up to 85 %
ĵ Reduced maintenance times
ĵ Lowest cost of ownership per coated m² of film

DAS Dual Anode Sputtering Technology
The heat load is a major limiting factor in mass production due tothermal sensitivity of polymer substrates. The energy impact, andthus the substrate temperature, is strongly determined by the plasmamode (AC or DC).
Plasma quenching and re-ignition by each AC voltage alternation
causes heat and decreases the deposition rate compared to the DC
mode. Unfortunately, in reactive sputtering the DC mode leads to acoated anode: the disappearing anode problem. It makes the process
unstable and not reliable for mass production.
The solution for limiting the heat stress is Dual AnodeSputtering (DAS), a technology provided and patentedby VON ARDENNE. It opens new perspectives for highthroughput web coating applications.Benefits of DAS
ĵ Up to 50 % less DC energy impact AND stable AC reactive processĵ Less heat impact on sensitive polymer substrates
ĵ Reactive sputtering without disappearing anode problem
ĵ 100 % duty cycle of DC sputtering used (compared to DC bipolar)ĵ Available for planar and rotatable magnetrons used in the FOSA
MX, CX and LabXOUR STRENGTHS
IN-HOUSE TECHNOLOGY &APPLICATION CENTER

PROFESSIONAL SIMULATION SUPPORTWe offer professional simulation technology to ensure bestprocess quality with regards to plasma, heat and cooling.
Furthermore, our simulation tools help demonstrate, develop
and improve layer properties and define or optimize processes,
details and the performance of our systems.

ĵ Sample coatings of customer applications
ĵ Development of customized layer stacks
ĵ Product & process verification and optimization
ĵ Testing of new technologies and components

GLOBAL PROJECT EXPERIENCECOMPREHENSIVE SERVICE PORTFOLIOVON ARDENNE equipment is used in over 50 countries.

ĵ VON ARDENNE service hubs around the world
ĵ On-site service

We have established an installed base of hundredsof coating systems worldwide, ranging from small tools
to equipment for large-area coating applications forseveral markets.

ĵ Remote access by our technology department
ĵ Regular technical and technological trainings
ĵ Spare & wear part warehouse close to customers
ĵ Lifecycle extension of wear parts

CLOSE PARTNERSHIPUPGRADES & RETROFITSVON ARDENNE has a network of partners foreven more profound R&D work and to identify futuretechnologies. It consists of:

As soon as your business is growing, your VON ARDENNE
equipment will grow accordingly - thanks to its modular design
and the upgrades we provide. We will also supply you with thenecessary technology upgrades if you decide to change yourapplications.

ĵ Fraunhofer Institutes such as IPMS, FEP, IST and ISE
ĵ Institutes of the Helmholtz Association (Jülich, Berlin)
ĵ Universities (Kiel, Dresden, Sheffield)

Furthermore, when your equipment is ageing, we will retrofit
your systems with new components, no matter if they are
VON ARDENNE or third-party machines.

ĵ Companies such as FAP GmbH, scia Systems GmbHPRODUCT
TOPICSPRODUCTINDEXCOMPONENTS
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WHO WE ARE & WHAT WE DO
VON ARDENNE develops and manufactures industrial equipment for vacuum
coatings on materials such as glass, wafers, metal strip and polymer films. These
coatings give the surfaces new functional properties and can be between one
nanometer and a few micrometers thin, depending on the application.

We supply our customers with technologically sophisticated vacuum
coating systems, extensive expertise and global service. The key
components are developed and manufactured by VON ARDENNE itself.
Systems and components made by VON ARDENNE make a valuable
contribution to protecting the environment. They are vital for
manufacturing products which help to use less energy or to generateenergy from renewable resources.

Our customers use these materials to make high-quality products such asarchitectural glass, displays for smartphones and touchscreens, solar modules andheat protection window film for automotive glass.

SALES
CONTACTSSERVICE
CONTACTSWORLDWIDE SALES AND SERVICEVON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANY
Sales: +49 (0) 351 2637 189 I sales@vonardenne.biz
Service: +49 (0) 351 2637 9400 I support@vonardenne.biz
VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I
VON ARDENNE Malaysia Sdn. Bhd. I+60 4408 0080 I

VON ARDENNE Japan Co., Ltd. I Tokyo office I+81 3 6435 1700 I

VON ARDENNE North America, Inc. I Ohio office I
VON ARDENNE Vietnam Co., Ltd. I+86 21 6173 0210 I+86 21 6173 0200 I sales-vave@vonardenne.biz; support-vave@vonardenne.biz+60 4403 7363 I sales-vama@vonardenne.biz; support-vama@vonardenne.biz+81 3 6435 1699 I sales-vajp@vonardenne.biz; support-vajp@vonardenne.biz+1 419 386 2789 I+1 419 873 6661 I sales-vana@vonardenne.biz; support-vana@vonardenne.biz+84 966 29 29 50 I sales-vavn@vonardenne.biz; support-vavn@vonardenne.biz

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ENGLISH 05/2022