GC120VPRODUCT
TOPICSPRODUCTINDEXCOMPONENTS
www.vonardenne.biz

WHO WE ARE & WHAT WE DO
VON ARDENNE develops and manufactures industrial equipment for vacuum
coatings on materials such as glass, wafers, metal strip and polymer films. Thesecoatings give the surfaces new functional properties and can be between one
nanometer and a few micrometers thin, depending on the application.

We supply our customers with technologically sophisticated vacuum coating
systems, extensive expertise and global service. The key components are developed
and manufactured by VON ARDENNE itself.

Our customers use these materials to make high-quality products such asarchitectural glass, displays for smartphones and touchscreens, solar modules andheat protection window film for automotive glass.

SALES
CONTACTS

Systems and components made by VON ARDENNE make a valuable contribution toprotecting the environment. They are vital for manufacturing products which help touse less energy or to generate energy from renewable resources.

SERVICE
CONTACTSVON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANY
Sales: +49 (0) 351 2637 189 I sales@vonardenne.biz
Service: +49 (0) 351 2637 9400 I support@vonardenne.biz
VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I
VON ARDENNE Malaysia Sdn. Bhd. I+60 4408 0080 I

VON ARDENNE Japan Co., Ltd. I Tokyo office I+81 3 6435 1700 I

VON ARDENNE North America, Inc. I Ohio office I
VON ARDENNE Vietnam Co., Ltd. I+86 21 6173 0210 I+86 21 6173 0200 I sales-vave@vonardenne.biz; support-vave@vonardenne.biz+60 4403 7363 I sales-vama@vonardenne.biz; support-vama@vonardenne.biz+81 3 6435 1699 I sales-vajp@vonardenne.biz; support-vajp@vonardenne.biz+1 419 386 2789 I+1 419 873 6661 I sales-vana@vonardenne.biz; support-vana@vonardenne.biz+60 124 23 7353 I sales-vavn@vonardenne.biz; support-vavn@vonardenne.biz

Pictures: VON ARDENNE Corporate Archive, VON ARDENNE Family Archive, shutterstock.com. © All rights reserved.

ENGLISH 07/2021

GC120VCRWORLDWIDE SALES AND SERVICEVERTICAL COATING SYSTEM
GC120VCR

GC120VCR VERTICAL COATING SYSTEMThe GC120VCR is a vertical inline coating system for the deposition ofmetal and oxide thin-film multilayer systems on flat glass substrates orother materials.

METROLOGY & QUALITY CONTROL OPTIONS

As a leading developer and manufacturer of vacuum coating equipment
for large-area applications, VON ARDENNE has incorporated its broad
knowledge and expertise in PVD technologies into the GC120VCRplatform. The reliability of this system is well proven in the industry.

▪

▪

▪

APPLICATIONS
▪
▪
▪
▪
▪
▪
▪

TCO (ITO, others)
Metal (mesh) coating
Anti-reflective coating
Scratch-resistant coatings
Mirror coatings
Easy-to-clean oleophobic coatings
Other type of coatings and combinations▪
▪

In-situ and ex-situ optical measurement: offers tailoredsolutions for continuous optical coating control
Closed loop process control system VA PROCESSMASTER:
optional controls package that allows highly automated process
tuning of the tool that eliminates the need of highly complex
operator action and input
Recording of process data: our PROCESSDB SQL data baserecords the process data of coating systems 24/7 allowing for
detailed data analysis and correlations.
Anti-static particle removing system upon request
Particle/defect inspection system upon request

SMALL FOOTPRINTThe GC120VCR does not need much floor space and requires fewer
maintenance intervals due to its vertical design.

HIGH YIELD AT LOW DEFECT RATEHIGHLIGHTS

It is also thanks to the vertical orientation that low film defect rates canbe achieved during production campaigns. In-situ and Ex-situ opticalmeasurement equipment can be integrated in order to measure film
properties in a continuous manner.

▪
▪

GOOD MAINTAINABILITY▪
▪
▪

Modular process zone design for flexible usage
VAprocos process control system for long-term stable reactive
sputteringThickness uniformity for typical optical layers < 2 % of average
Gas separation between processes 1:20 or 1:100, upon request
Several vertical orientations available (-7° to +7° inclination)

The optimized machine design enables easy access to the magnetron
environment for target exchange and maintenance. Due to its vertical
door opening concept, no overhead crane is required to maintain thesystem.

INDUSTRY-PROVEN PRODUCTION TOOLWITH A SMALL FOOTPRINTTECHNICAL DATA

Subject to change without notice due to technical improvement.

TARGET
Materials
metals, ceramics
Utilizationplanar > 30 %, rotatable > 80 %SUBSTRATE
Materialglass
Dimensions (W x L), max.
1280 mm x 1650 mm (others on request)
Thickness
0.5 mm to 4 mm (others on request)
Pre-treatmentlinear ion source or plasma glow discharge
DEPOSITION SYSTEM
Deposition type
Magnetron type
Sputter arrangement
Substrate temperature rangeSubstrate potential
Number of independent process gases
TRANSPORT
Type of transport
Orientation of substrate
Transport speed
Tact timeDC, pulsed DC, AC or bipolar
planar, single or dual rotatableverticalRT / 200 °C / 400 °C
floatingup to 4 (Ar, O2, N2, X)
inline, carrier-based-7 °/ 0°/+7° vertical, LEL, SEL≤ 3.5 m/min
30 s

CLEANING OF MAGNETRON CHAMBERS
Cleaning principle
mechanical exchange of shields
Cleaning cycle
7 to 35 days, depending on configuration

UTILITIES & SUPPLY
Automated substrate loading and unloadingon request
Carrier storage racks
on request
Phase 3 phases
Voltage
230 V, 400 V, 480 V
Frequency
50 Hz to 60 Hz
Power consumptiondepending on configuration
Cooling system
separate cooling circuit with heat exchanger
Cooling supply
primary cooling water supply by customerVenting medium
ambient air, compressed dry air or N2
Process gases
central supply by customer or local by gas cabinet
SYSTEM CONTROL & SOFTWARE
Computer hardware
PLC products by Siemens or Rockwell
User interface
HMI products by Siemens or Rockwell
MES linkaccording to specifications
SYSTEM DIMENSIONS
Total system size (L x W x H)
Total system weight

customized × 15 m × 3.7 m
depending on configuration

GC120V

PRODUCT
TOPICSPRODUCTINDEXCOMPONENTS
www.vonardenne.biz

WHO WE ARE & WHAT WE DO
VON ARDENNE develops and manufactures industrial equipment for vacuum
coatings on materials such as glass, wafers, metal strip and polymer films. Thesecoatings give the surfaces new functional properties and can be between one
nanometer and a few micrometers thin, depending on the application.

We supply our customers with technologically sophisticated vacuum coating
systems, extensive expertise and global service. The key components are developed
and manufactured by VON ARDENNE itself.

Our customers use these materials to make high-quality products such asarchitectural glass, displays for smartphones and touchscreens, solar modules andheat protection window film for automotive glass.

SALES
CONTACTS

Systems and components made by VON ARDENNE make a valuable contribution toprotecting the environment. They are vital for manufacturing products which help touse less energy or to generate energy from renewable resources.

SERVICE
CONTACTSVON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANY
Sales: +49 (0) 351 2637 189 I sales@vonardenne.biz
Service: +49 (0) 351 2637 9400 I support@vonardenne.biz
VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I
VON ARDENNE Malaysia Sdn. Bhd. I+60 4408 0080 I

VON ARDENNE Japan Co., Ltd. I Tokyo office I+81 3 6435 1700 I

VON ARDENNE North America, Inc. I Ohio office I
VON ARDENNE Vietnam Co., Ltd. I+86 21 6173 0210 I+86 21 6173 0200 I sales-vave@vonardenne.biz; support-vave@vonardenne.biz+60 4403 7363 I sales-vama@vonardenne.biz; support-vama@vonardenne.biz+81 3 6435 1699 I sales-vajp@vonardenne.biz; support-vajp@vonardenne.biz+1 419 386 2789 I+1 419 873 6661 I sales-vana@vonardenne.biz; support-vana@vonardenne.biz+60 124 23 7353 I sales-vavn@vonardenne.biz; support-vavn@vonardenne.biz

Pictures: VON ARDENNE Corporate Archive, VON ARDENNE Family Archive, shutterstock.com. © All rights reserved.

ENGLISH 07/2021

GC120VCRWORLDWIDE SALES AND SERVICEVERTICAL COATING SYSTEM
GC120VCR