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FocusMonitor FM+
LaserDiagnosticsSoftware LDS

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IMPORTANT!
READ CAREFULLY BEFORE USE.
KEEP FOR FUTURE USE.

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Inhaltsverzeichnis
1

Basic safety notes

72

Icons and conventions

10

3

About this operating manual

114

System description

12

4.1
4.2
4.3
4.4

Measuring principle..................................................................................................................13
Status Display..........................................................................................................................13
Explanation of the product safety labels...................................................................................14
Scope of delivery and accessories...........................................................................................15

5

Transport and storage

15

6Installation and settings on the PC

16

6.1
6.2
7

Mounting
7.1
7.2

7.3
8

9.4

9.5

4

24

Overview of the connections....................................................................................................24
Power supply...........................................................................................................................25
Ethernet...................................................................................................................................25
PRIMES bus RS485.................................................................................................................25
Inert gas connection.................................................................................................................26

Measuring with the LaserDiagnosticsSoftware LDS
9.1
9.2
9.3

17

Conditions at the installation site..............................................................................................17
Installation in the laser system..................................................................................................17
7.2.1
Prepare mounting......................................................................................................17
7.2.2
Possible mounting positions......................................................................................18
7.2.3
Align the device.........................................................................................................19
7.2.4
Mount the device.......................................................................................................22
7.2.5
Connecting a FM+ to a laser power meter.................................................................23
Removal from the laser system................................................................................................24

Connections
8.1
8.2
8.3
8.4
8.5

9

Install LaserDiagnosticsSoftware LDS......................................................................................16
Set IP address of PC................................................................................................................16

27

Warning messages...................................................................................................................27
Establish measurement readiness............................................................................................28
Connect/disconnect the device to the LDS..............................................................................29
9.3.1
Switch on the device and connect it to the LDS.........................................................29
9.3.2
Changing the IP address of a connected device........................................................30
9.3.3
Disconnect device from the LDS and switch off.........................................................31
General information about working with the LDS......................................................................32
9.4.1
Enter user-defined device name.................................................................................32
9.4.2
Open „Device control“ menu......................................................................................32
9.4.3
Move vertical carrier for setup....................................................................................33
9.4.4
Open a measuring mode...........................................................................................34
9.4.5
Enter parameters and activate...................................................................................35
9.4.6
Saving options...........................................................................................................36
Settings that apply in all measuring modes...............................................................................37
9.5.1
Define locked area.....................................................................................................37
9.5.2
Move axes.................................................................................................................39
9.5.3
Entries for the measuring tip used..............................................................................40
9.5.4
Display device orientation...........................................................................................40
9.5.5
Rotating the measuring tip.........................................................................................41
9.5.6
Coordinate system for rotated measuring tip..............................................................42

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9.6

Device control..........................................................................................................................43
9.6.1
Settings.....................................................................................................................43
9.6.2
Advanced..................................................................................................................46
9.7 Linescan..................................................................................................................................48
9.7.1
Search laser beam automatically................................................................................48
9.7.2
Adjust the measurement track manually.....................................................................49
9.7.3
Start measurement....................................................................................................50
9.7.4
Display measurement results.....................................................................................50
9.8 Single planes............................................................................................................................51
9.8.1
Search laser beam automatically................................................................................51
9.8.2
Adjust the measurement window manually................................................................52
9.8.3
Measure manual caustics with the single plane measurement mode..........................53
9.8.4
Start measurement....................................................................................................54
9.8.5
Display measurement results.....................................................................................55
9.9 Monitor....................................................................................................................................56
9.9.1
Search laser beam automatically................................................................................56
9.9.2
Adjust the measurement window manually................................................................57
9.9.3
Start measurement....................................................................................................58
9.9.4
Display measurement results.....................................................................................58
9.10 Manual Caustic........................................................................................................................59
9.10.1 Start measurement....................................................................................................59
9.10.2 Apply a caustic suggestion (optional).........................................................................60
9.10.3 Display measurement results.....................................................................................60
9.11 Automatic Caustic....................................................................................................................61
9.11.1 Start measurement....................................................................................................61
9.11.2 Display measurement results.....................................................................................62
9.12 Determining the tool center point (TCP) using the FM+.............................................................63
9.12.1 Distance of the pinhole to the horizontal carrier..........................................................64

10

Troubleshooting

65

10.1 Messages in the LaserDiagnosticsSoftware LDS during measurement.....................................65
10.2 Connection error when using the LDS......................................................................................66
10.3 Other errors..............................................................................................................................67
11

Maintenance and service
11.1
11.2
11.3
11.4
11.5

68

Maintenance intervals...............................................................................................................68
Cleaning...................................................................................................................................68
Check/replace the measuring tip..............................................................................................68
Replace detector......................................................................................................................71
Selection of the measuring tip and the detector........................................................................73

12

Measures for the product disposal

74

13

Declaration of conformity

75

14Technical Data

76

15

Appendix

79

A
B

GNU GPL license notice...........................................................................................................79
Determine the speed of the measuring tip used.......................................................................79

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PRIMES - the company
PRIMES is a manufacturer of measuring devices which are used to analyze laser beams. These devices are
employed for the diagnostics of high-power lasers ranging from CO2-, fiber- and solid-state lasers to diodelasers. A wavelength range from infrared through to near UV is covered, offering a wide variety of measuring
devices to determine the following beam parameters:•

Laser power•

Beam dimensions and position of an unfocused beam•

Beam dimensions and position of a focused beam•

Beam quality factor M²

Development, production and calibration of the measuring devices is performed at PRIMES. This guarantees
optimum quality, excellent service, and a short reaction time, providing the basis for us to meet all of ourcustomers’ requirements quickly and reliably.

PRIMES GmbH
Max-Planck-Str. 264319 Pfungstadt
GermanyTel +49 6157 9878-0
info@primes.dewww.primes.de

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Basic safety notes

Intended use
The device has been designed exclusively for measurements in the beam of high-power lasers.
Use for any other purpose is considered as not intended and is strictly prohibited. Furthermore, intended use
requires that all information, instructions, safety notes and warning messages in this operating manual areobserved. The specifications given in chapter 14 „Technical Data“ on page 76 apply. Any given limit values
must be complied with.
If not used as intended, the device or the system in which the device is installed can be damaged or destroyed.
In addition, there is an increased risk to health and life. Only use the device in such a way that there is no risk of
injury.
This operating manual is an integral part of the device and must be kept in the immediate vicinity of the placeof use, accessible to personnel at all times.
Every person who is responsible for the installation, start-up or operation of the device must have read andunderstood the operating manual and, in particular, the safety instructions.
If you still have questions after reading this operating manual, please contact PRIMES or your supplier foryour own safety.
Observing applicable safety regulations
Observe the safety-relevant laws, guidelines, standards and regulations in the current editions published by
the state, standardization organizations, professional associations, etc. In particular, observe the regulations
on laser safety and comply with their requirements.

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Laser radiation warning
During the measurement the laser beam is reflected from the rotating measuring tip. This produces scatteredor directed reflection of the laser beam (laser class 4). Depending on the wavelength of the laser, the reflectedbeam is usually invisible.
To avoid injury from the reflected laser beam, no one should be in the hazardous area where the measurement
is taking place. The hazardous area must be defined before operation of the FM+.
During operation of the device, the laser radiation must be fully absorbed after passing through the measurementzone.
The radiation is not absorbed by the FocusMonitor itsself. A suitable absorber must be used for this purpose.
Suitable PRIMES laser power meters can be found in chapter 7.2.5 „Connecting a FM+ to a laser power meter“
on page 23.
When working with the device, people in the hazardous area must protect themselves by taking the following
protective measures.

Fig. 1.1:

8

Risk of injury due to scattered or directed reflections of the laser beam

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Necessary safety measures

DANGER
Serious eye or skin injury due to laser radiation
The device measures direct laser radiation, but does not emit any radiation itself. However, during
the measurement the laser beam is reflected from the rotating measuring tip.
This produces scattered or directed reflection of the laser beam (laser class 4). Depending on the
wavelength of the laser, the reflected beam is usually invisible.
X During a measurement, a safety distance of one meter to the device must be maintained evenwhen wearing safety goggles and safety clothing.
X Protect yourself from direct and reflected laser radiation while working with the device by taking
the following measures:•

Wear safety goggles adapted to the power, power density, laser wavelength and operating mode of thelaser beam source in use.

•

Wear suitable protective clothing or protective gloves if necessary.

•

If possible, also protect yourself from direct laser radiation and scattered radiation by using separating
protective devices that block or attenuate the radiation.

•

If the device is moved from its aligned position, increased scattered or directed reflection of the laser
beam occurs during measuring operation. Mount the device in such a way that it cannot be moved unintentionally, e.g. by bumping or pulling the cables•

Install safety switches or emergency safety mechanisms that allow the laser to be switched off immediately.

•

Use suitable beam guidance and beam absorber elements which do not emit any hazardous substances
when irradiated.

Employing qualified personnel
The device may only be operated by qualified personnel. The qualified personnel must have been instructedin the installation and operation of the device and must have a basic understanding of working with highpower lasers, beam guiding systems and focusing units.
Modifications and changes
The device may not be modified in terms of design or safety without the explicit consent of the manufacturer.
The same applies to unauthorized opening, dismantling and repair. The removal of covers is only permitted
within the scope of the intended use.
Liability disclaimer
Manufacturer and distributor exclude any liability for damages and injuries which are direct or indirect consequences of using the device not as intended or modifying the device or the associated software withoutauthorization.

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Icons and conventions

Warning messages
The following icons and signal words indicate possible residual risks in the form of warnings:

DANGER
Means that death or serious physical injuries will occur if necessary safety precautions are not taken.

WARNING
Means that death or serious physical injuries may occur if necessary safety precautions are not taken.

CAUTION
Means that minor physical injury may occur if necessary safety precautions are not taken.

NOTICE
Means that property damage may occur if necessary safety precautions are not taken.

Product safety labels
The following icons are used on the device itself to indicate imperatives and possible dangers:

Read and understand the operating manual before using the device!

Labeling according to WEEE directive:
The device must not be disposed of with household waste, but in a separate WEEE collection
in an environmentally friendly way.

Hand injuries warning

General warning sign

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35,0(6Further icons and conventions in this operating manual
Here you will find useful information and helpful tips.

Indicates a single instruction.
If several of these instructions appear one below the other, the order in which they are executed isirrelevant or they represent alternative courses of action.

1.

A numbered list identifies a sequence of instructions that must be executed in the specified order.

2.
...


Indicates the result of an action to explain processes that take place in the background.
Indicates an observation prompt to draw attention to visible feedback from the device or the software.
Observation prompts make it easier to check whether an instruction was executed successfully.
Often they also guide to the next instruction.
Points to a control element that is to be pressed/clicked.

Points to an element described in the text (for example an input field).

3

About this operating manualThis manual describes the installation and operation of the FocusMonitor FM+ and how to perform measurements with the LaserDiagnosticsSoftware LDS version 3.0 or higher.
In this operating manual, the abbreviations FM+ and LDS are used below.
For measurement operation with a PC, the LDS must be installed on the PC. The LDS in the basic version is
included in the scope of delivery. PRIMES will also be happy to provide you with a current download link.
For this purpose, contact your sales partner or send an e-mail to: support@primes.de
The software description includes a brief introduction on using the device for measurements. For a detailed
description of the software installation, file management and evaluation of the measurement data, pleaserefer to the separate instructions for the LDS.
This operating manual describes the software version valid at the time of printing. Since the LDS is
subject to continuous development, the supplied data medium may have a newer version number.

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System description

The FocusMonitor measures the beam properties of focused laser beams. In addition to the geometric dimensionsof the focused laser beam, the focus position in space, the beam parameter product as well as the beam quality
factor M² are determined.
The laser beam is scanned along the x-axis with a rotating measuring tip. The integrated horizontal and verticalcarrier moves the measuring tip in the y-axis and z-axis respectively, so that the beam properties of the focusedlaser beam can be measured spatially.
This enables the automatic measurement of complete caustics over a z-axis length of 120 mm. In addition,
the mechanical design allows upside down installation without additional components.
The FM+ works with the PRIMES LDS and is equipped with an Ethernet interface for fast and secure datatransfer.
When the FM+ is in operation, the laser radiation that has passed through the measuring zone must be completely
absorbed.

z-axisy-ax

isDetector
Vertical carrier

Horizontal carrier

Fig. 4.1:

12

Measuring tip

Main components FM+

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4.1

Measuring principle

The FM+ is an opto-mechanically scanning measuring system
The laser beam is scanned using a specialized measuring tip. A small pin hole (typical diameter: 25 μm) inthe measuring tip samples a small part of the laser beam. The sampled part of the laser beam is guided onto
a detector element
The detector is selected depending on the wavelength of the laser radiation to be measured. In this way,different laser beam sources and systems can be measured by optimally selecting the measuring tip and theassociated detector.
The high angular velocity of the rotating measuring tip allows the analysis of high power densities.
Due to the dynamics of the analog-to-digital converters used, a very good signal-to-noise ratio is achieved.
Very low intensities as well as high peak intensities are recorded with equal precision.
This is one of the requirements for the automatic measurement of caustics in the near-focus range over at
least four Rayleigh lengths in accordance with ISO 11146.
Laser beamzxy

Detector

Measuring tip
Fig. 4.2:

4.2

Optomechanical design FM+

Status Display

The status display consists of a light ring that uses different colors and static or rotating lights to indicate different
statuses of the FM+.

Tab. 4.1:

Color

Lighting state

Meaning

White

The entire ring is lit

The supply voltage is connected

Yellow

Rotating light

The measuring tip is rotating and the different rotational
speeds are indicated.

Red

Rotating light

The measuring tip rotating and the y-axis is moving.
The measurement is in progress, the different rotational
speeds are indicated.

States of status display

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FocusMonitor FM+

Explanation of the product safety labels

A potential hazard area for hand injuries is marked with a symbol “Hand injuries warning“ on the device.
Warning of hand injuries due to the rotating measuring tip
The measuring tip of the FM+ rotates at high speed during the measuring operation. Even after the measurement
or switching off the device, the measuring tip will continue to rotate for a certain period of time.
To avoid hand injury, do not reach into the device aperture when the measuring tip is rotating.
If the rotating measuring tip hits an obstacle, the measuring tip will be damaged. In this case, the device
must be sent in for service. Therefore, no objects may be held in the beam path of the device.
After switching off the rotation or the device, wait for the measuring tip to come to a standstill (observe the„Rotation“ status display), see chapter 4.2 „Status Display“ on page 13).

Fig. 4.3:

Risk of injury due to a rotating measuring tip

Warning of hand injuries in the travel range of the carriers
The horizontal and vertical carrier can be moved relative to the housing. Do not reach into the movement
range of the carriers.

z-axisy-ax

isFig. 4.4:

14

Risk of injury in the travel range of the carriers

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Scope of delivery and accessories

The following parts are included in the scope of delivery:
•

FM+

•

PRIMES power supply•

Power cable•

Two alignment tools•

Patch cable Cat.5e, Cross-Over, 5 m•

Patch cable Cat.5e, 5 m•

PRIMES USB flash drive (PDF of operating manual, software, etc.)•

Operating manual FM+•

Operating manual LDS

The following accessories are available:•

Transport and storage case•

Measuring tip in a membrane box•

Detectors with box and screwdriver for mounting

5

Transport and storage
NOTICE
Damage/Destruction of the device
The device’s axes and carriers may be damaged if the device is subjected to hard shocks.
X Handle the device carefully when transporting or installing it.

NOTICE
Damage/Destruction of the device
Imbalance of the rotational disc can damage the device.
X Never operate the device without the measuring tip.

Remove measuring tip to avoid contamination
It is recommended to remove the measuring tip from the FM+ and place it in the supplied membrane box.
X Remove the measuring tip according to chapter 11.3 „Check/replace the measuring tip“ on page 68.
Transport and storage in the optional transport and storage caseIn order for the device to fit into the optional transport and storage case, the carriers must be moved to thepark position before being switched off, see chapter 9.3.3 „Disconnect device from the LDS and switch off“
on page 31.
X Optionally switch the device off and on again. The carriers of the device move to the park position after
approx. 10 seconds.
A defined locked area when using a rotated measuring tip prevents the device from reaching the park position.
X Remove the locked area according to chapter 9.5.1 „Define locked area“ on page 37.

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6

Installation and settings on the PC

6.1

Install LaserDiagnosticsSoftware LDS
The basic version of LDS is included with the device. PRIMES will also be happy to provide youwith a link to download the current version. Please contact your sales partner or contact us byemail: support@primes.de1.

Please ensure:

System requirements:•

System requirements are met.

•

Intel Pentium Core i3 or better•

You have administrator rights.

•

Windows 10 (64-bit version)

2.

Close all programs on your PC.

•

At least 4 GB RAM; 8 GB RAM recommended

3.

Insert the PRIMES thumb drive into
your PC and open the directory.
In the standard configuration, Windows
automatically opens the removablestorage device.

•

Display resolution: Full HD (1 920 x 1 080) at 100 % scaling•

An Ethernet port for connecting the measuring device

4.

Double-click the LDS_Setup exe file
to start the installation.

5.

Follow the instructions on the screen.

x If no other Iocation is specified, thenthe main program LDS.exe
will be copied to the directory
C:\Programs\Primes\LaserDiagnosticsSoftware.

6.2

Set IP address of PC
The PC must be in the same IP address range as the PRIMES device.

Choose one of the following options to establish a connection between the PRIMES device and the PC.
The IP address of the PRIMES device can only be changed once this connection has been established(see chapter chapter 9.3.2 „Changing the IP address of a connected device“ on page 30).
Integration of a PRIMES device into a network
Within the PRIMES device, the option DHCP (Dynamic Host Configuration Protocol) is activated by default.
The device obtains its IP address from the DHCP server.
Direct connection of a PRIMES device to a PC
In Windows > Control panel > Network and Sharing Center, assign an IP address to your PC that is in
the same address range as the PRIMES device (e.g. 192.168.116.xyz). The first three number blocks mustbe identical, the last number block can be freely selected. The IP address should be entered by a systemadministrator.
The IP address of your PRIMES device can be found on the identification label.

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7

Mounting

7.1

Conditions at the installation site•

The device must not be operated in a condensing atmosphere.

•

The ambient air must be free of gases and aerosols that interfere with the laser radiation(e.g. organic solvents, cigarette smoke, sulfur hexafluoride).

•

Protect the device from splashes of water and dust.

•

Operate the device in closed rooms only.

7.2

Installation in the laser system

DANGER
Fire and explosion hazards due to scattered or directed laser radiation
During operation of the FM+, the irradiation must be fully absorbed after passing through the measurement area. Fire bricks or other partly-absorbing surfaces are not suitable.
X Use an adequate absorber. Depending on the application, PRIMES offers suitable laser power meters.

NOTICE
Damage/Destruction of the device
Obstacles in the travel range of the horizontal and vertical carrier can lead to collisions and damage
the unit.
X Keep the travel range of the horizontal and vertical carrier free of obstacles(cutting nozzle, pressure rolls, etc.).
X Note that the horizontal and vertical carrier automatically move to the park position after the device
has been switched off and on again.

7.2.1

Prepare mounting

Mounting preparation
To prevent damage during transportation, the measuring tip is removed when delivered. It is installed with thecurved side facing the laser beam.
X Mount the measuring tip according to chapter 11.3 on page 68.
PinholeFig. 7.1:

Measuring tip

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1. Switch off the laser beam.
2. Ensure that moving parts, e.g. robot arms, etc. are at a standstill and that they cannot be set in motion
unintentionally.
3. Check the space available before installing the device, especially the required space for the connection
cables and hoses.

z=120 mm
y= max. 22 mm
Fig. 7.2:

Range of motion of the horizontal and vertical carrier
The range of motion of the horizontal and vertical carrier can be restricted in the LDS (locked area).
A locked area can be set according to chapter chapter 9.5.1 „Define locked area“ on page 37.

7.2.2

Possible mounting positions

The device can be installed in any mounting position. The position and diameter of the mounting holes on the
top and bottom of the device are identical.
Standard installation
The standard position of the device is intended for a beam incidence from above.
Upside down installation with rotated measuring tip
In case of limited accessibility in the laser system, the device can be mounted in an upside down installation
with rotated measuring tip. Due to the symmetrically designed housing, upside down mounting is possible
without additional components, see chapter 11.3 „Check/replace the measuring tip“ on page 68.
Installation with horizontal beam incidence
For operation with horizontal beam incidence, the device can also be installed on a vertical mounting surface.
The device can be mounted with the carriers pointing up or down. Pay particular attention to secure fastening
in this mounting position.
Upside down installation
with rotated measuring tip

Installation withhorizontal beam incidence

Beam incidence

Mounting surface

Beam incidence

Mounting surface
Mounting surface
Fig. 7.3:
18

Mounting surface

Mounting surface

Mounting surface

Beam incidenceStandard installation

Possible mounting positions of the device
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7.2.3

Align the device
Only use a pilot laser for alignment.

DANGER
Serious eye or skin injury due to laser radiation
If the laser beam hits the stationary measuring tip located in the measurement aperture, scattered or
directed reflectionof the laser beam occurs (laser class 4).
X Wear suitable gloves and move the measuring tip out of the measurement aperture.

CAUTION
Risk of injury caused by rotating or moving parts
The hand or fingers can be crushed in the travel range of the horizontal and vertical carrier.
There is a risk of injury due to the rotating measuring tip.
X Do not reach into the range of motion of the horizontal and vertical carrier.
X Only align the device while the measuring tip is stationary.

Position of the device to the laser beam
For the FM+, a perpendicular beam incidence with respect to the x-y plane must be ensured.
The vertical alignment in the z-axis depends mainly on the expected focusing plane position.
The maximum vertical stroke of the device is 120 mm.
The focusing plane should be in the middle of the measuring range of the z-axis. Depending on the mounting
position, this is approx. 60 mm above or below the park position of the device.
Standard installation

Focus lenght f

Upside down installation
with rotated measuring tip

z
60 mm

y

Park position

Measuringrange
120 mmFocusing
planePark position
60 mm

Fig. 7.4:

Position of the device relative to the laser beam

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Align the device with the alignment tool

NOTICE
Damage/destruction of the alignment tool
The alignment tool can be destroyed by laser radiation.
Remove the alignment tool before turning on the laser.
For alignment of the device in the x-y plane, 2 alignment tools are included with the device.
The smaller alignment tool is held against the device, the larger one can be inserted into the slot on the device.
The alignment tools are designed for the size of the measuring window (8 x 8 mm, optionally 12 x 12 mm or
24 x 12 mm) and the resulting offset. The measuring window size of the device was specified upon orderingand cannot be changed in the LDS.
The offset is the distance from the front edge of the horizontal carrier in park position to the center of themeasuring window in y-direction (see chapter „Offset of the measurement windows“ on page 21).
1. Connect the device with the LDS as described in chapter 9.3 „Connect/disconnect the device to the
LDS“ on page 29.
2. Open the Device control menu according to chapter 9.4.2 „Open „Device control“ menu“ on page 32.
3. Move the vertical carrier to the desired z-position according to chapter 9.4.3 „Move vertical carrier for
setup“ on page 33.
4. Hold/insert the alignment tool onto the device.
The insertable alignment tool is inserted into the central slot on the horizontal carrier.
5. Turn on the pilot laser and align the device. If the pilot laser beam hits the small hole in the alignment tool,
the unit is aligned in the x-y plane.

Alignment toolfor holding onto the device

Pilot beam

Hole

Alignment tool
for plugging into the device
Fig. 7.5:

20

Alignment tool for holding onto
the device with offset indication

Alignment tool of the FM+

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Offset of the measurement windows

8 x 8 mm

Measuring tip

x-axisy-axisOffset = 14 mm
max. 22 mm

Fig. 7.6:

Offset of a measurement window size of 8 x 8 mm

12 x 12 mm

Measuring tip

x-axisy-axisOffset = 6 mm
max. 22 mm

Fig. 7.7:

Offset of a measurement window size of 12 x 12 mm

24 x 12 mm

Measuring tip

x-axisy-axisOffset = 6 mm
max. 22 mm

Fig. 7.8:

Offset of a measurement window size of 24 x 12 mm

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FocusMonitor FM+

Mount the device

DANGER
Serious eye or skin injury due to laser radiation
If the device is moved from its aligned position, increased scattered or directed reflection of thelaser beam occurs during measuring operation (laser class 4).
X Mount the device so that it cannot be moved by an unintentional contact or cables being pulled
accidentally.
The mounting surface of the housing has 8 slotted holes Ø 6.4 mm and 4 alignment holes Ø 6H7 mm for assembly
on a support bracket provided by the customer.
Use at least four M6 screws to fasten the housing. The total length of the screws depends on the dimensionsof the customer’s support bracket.

Slotted holes Ø 6,4

Slotted holes Ø 6,4

Alignment holes Ø 6H7

Fig. 7.9:

22

Mounting holes, view from above (same hole pattern below) (Dimensions in mm)

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7.2.5

Connecting a FM+ to a laser power meter

NOTICE
Damage / Destruction of the device due to overvoltage
When disconnecting the electrical lines during operation (with the supply voltage applied), voltage
peaks occur which can destroy the communication modules of the devices.
X Disconnect the supply voltage from the device before disconnecting the bus cables.
For sufficient absorption of the radiation after passing through the measurement zone, you can use the
PRIMES laser power meters PM 48/100, PM+ HP15 or EC-PM.
The water-cooled PRIMES laser power meters will measure the current laser power and provide additional
information on the flow rate and temperature of the cooling water.The laser power meter is connected via
the PRIMES bus (RS485 interface). The pin assignment of the RS485 interface can be found in chapter 8.4„PRIMES bus RS485“ on page 25.
When connecting several devices, always use only one PRIMES power supply.

LAN

PC
or

Ethernet-cable

PRIMES
power supply

RS485-cableplug/plug

Fig. 7.10:

Exemplary connection of a FM+ to a laser power meter PM 48

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Removal from the laser system

1. Switch off the laser beam.
2. Ensure that moving parts, e.g. robot arms, etc. are at a standstill and that they cannot be set in motion
unintentionally.
3. Check that the device is in the park position (see chapter 9.3.3 „Disconnect device from the LDS andswitch off“ on page 31).
4. Switch off the power supply.
5. Turn off the compressed air supply.
Push down the release ring of the compressed air connection with two fingers of one hand and pull out
the hose with the other hand.
6. Disconnect all connections.
7. Unscrew the fastening screws.
8. Remove the device from the laser system.

8

Connections

8.1

Overview of the connections
Establish all electrical connections and switch on the device before starting the LDS.

On/Off switch

Status display

Ethernet

Power supply
connection

RS485

Inert gas

Fig. 8.1:

24

FM+ connections

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8.2

Power supply

The device requires a voltage supply of +24 V ± 5 % (DC) for operation.
A suitable power supply is included in the scope of delivery.
Only use the provided PRIMES power supply and connection lines.
The connection socket for the power supply is a 5-pin, L-coded M12 connector.
Harting M12-P-PCB-THR-2PC-5P-LCOD-M-STR
3

2

4

1
FE

Tab. 8.1:

8.3

Pin

Function

1

+24 V

2

Not assigned

3

GND

4

Not assigned

5

FE (functional earth))

Pin assignment for the Connection socket of the power supply

Ethernet

Data between the FM+ and PC is transmitted via Ethernet. Connect the FM+ to the PC via a crossover cableor to the network via a patch cable.
8.4

PRIMES bus RS485

A PRIMES laser power meter can be connected to the FM+ via the PRIMES bus (RS485 interface).
The signal from the laser power meter is transmitted through the FM+ to the PC via the Ethernet interface.
The additional laser power meter is powered by the power supply of the FM+.
Suitable PRIMES laser power meters can be found in chapter 7.2.5 „Connecting a FM+ to a laser power meter“
on page 23.
D-sub socket, 9-pin (view of plug-in side)

1

5

9

Tab. 8.2:

6Pin

Function

1

Ground2

RS485 (+)

3

+24 V

4

Not assigned

5

Not assigned

6

Ground7

RS485 (–)

8

+24 V

9

Not assigned

Pin assignment of the D-Sub socket, PRIMES bus

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Inert gas connection

NOTICE
Damage/Destruction of the device
The effects of uncontrolled gas flow (e.g. process gas) could distort the measurement or even damage
the device.
X Only use helium, nitrogen or argon as the inert gas at the intended connection. The pressure may
not exceed a maximum of 0.5 bar.
When measuring high power densities (CO2 > 15 – 30 MW/cm²; NIR > 8 – 10MW/cm²), plasma may be ignited
on the surface of the measuring tip. This could destroy the measuring tip.
Therefore, a protective gas connection is integrated in the device.
The connection is made via a 4 mm push fit connector.

Inert gas connection

Fig. 8.2:

26

Inert gas connection

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Measuring with the LaserDiagnosticsSoftware LDS

This chapter describes measurements with the LDS. For a detailed description of the software installation,
file management and evaluation of the measured data, please refer to the separate operating manual “LDS”.
9.1

Warning messages

DANGER
Serious eye or skin injury due to laser radiation
Depending on the measuring principle used, the laser beam is reflected at the measuring tip (laser class 4).
The reflected beam is usually not visible.
X Please wear safety goggles adapted to the power, power density, laser wavelength and operating
mode of the laser beam source in use.
X Wear suitable protective clothing and protective gloves.
X Protect yourself from laser radiation by separating protective devices(e.g. by using appropriate shielding).
X During measurements, a safety distance of one meter to the FM+ must be maintained even when
wearing safety goggles and safety clothing.

DANGER
Serious eye or skin injury due to laser radiation
If the device is moved from its aligned position, increased scattered or directed reflection of the laser
beam can occur during measuring operation (laser class 4).
X Mount the device so that it cannot be moved by an unintentional contact or cables being pulled
accidentally.

DANGER
Fire and explosion hazards due to scattered or directed laser radiation
When the FM+ is being operated, the irradiation must be fully absorbed after passing through themeasurement zone. Fire bricks or other partly-absorbing surfaces are not suitable.
X Use an adequate absorber. Depending on the application, PRIMES offers suitable laser power meters.

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CAUTION
Risk of injury caused by rotating parts
The measuring tip of the FM+ rotates at high speed during measurements. Even after the rotationor the device has been turned off, the measuring tip will continue to rotate for a certain period oftime. If the rotating measuring tip hits an obstacle, the device must be sent in for service to readjust
the measuring tip.
X Do not reach into or hold any objects into the beam entrance of the device.
X After switching off the rotation or the device, wait for the measuring tip to come to a standstill(observe the „Rotation“ status display)

CAUTION
Danger of crushing in the travel range of the carriers
The hand or fingers can be crushed in the travel range of the horizontal and vertical carrier.
X X Do not reach into the travel range of the horizontal and vertical carriers.
X Observe that the horizontal and vertical carrier automatically move to the park position after thedevice has been switched off and on again.

NOTICE
Damage/Destruction of the measuring tip
In case of very high power densities (CO2 > 15 – 30 MW/cm²; NIR > 8 – 10 MW/cm²), plasma
may be ignited on the surface of the measuring tip, which could destroy the measuring tip.
X Increase the speed according to appendix B on page 79 and purge it with inert gas, if necessary.
9.2

Establish measurement readiness1. Check whether the mounted measuring tip and the mounted detector are suitable for your measuringtask, see chapter 11.5 „Selection of the measuring tip and the detector“ on page 73.
2. Determine the required speed of the measuring tip according to appendix B on page 79.

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9.3

Connect/disconnect the device to the LDS

9.3.1

Switch on the device and connect it to the LDS

1.

Switch on the device.

2.

Start the LDS by double-clicking on the program iconin the start menu group or on the desktop icon.

The start screen appears.
3.

Select the operating mode Measure.

If the Show start screen option is disabledor the window Connections is closed:
X

Click on the Devices tab and then on
the + Connect to device button.

The Connections window appears.
4.

Click on the desired device.

5.

Click on the Connect to device button.

If the device does not appear:
X

Click on the Search the network
button.

If the device still does not appear in theConnections window, see chapter 10.2
„Connection error when using the LDS“on page 66.

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Changing the IP address of a connected device

Within the device a static IP address is stored and the function Use DHCP is activated. When establishing aconnection, the device will first wait to be assigned a suitable IP address via DHCP. If this prooves unsuccessful, it will revert to the static IP address.
If Use DHCP is disabled, the device will directly use the static IP address. As a result, the connection can beestablished faster.
For a connected device, both the IP address and the activation of DHCP can be changed.
Change the IP address of a device as follows:
1.

Click on the Devices tab.

2.

Right-click on the device and selectthe Device settings menu point.

3.

Enter the desired IP address in theStatic IP address input field.

4.

Deactivate Use DHCP.

5.

Confirm the entry with OK.

The Confirmation window appears.
6.

In the Confirmation window, placea check mark at Acknowledge andclick OK.

7.

Switch the device off and on again.

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Disconnect device from the LDS and switch off

1.

Click on the Devices tab.

2.

Right-click on the device and selectthe Disconnect menu point.
The Close connection window appears.

3.

Choose one of the options offered:X

Confirm by clicking the OK button.
Select this option to make the device
transportable or storable.

x The horizontal and vertical carrierr
move to the park position.
x The device is disconnected from the
LDS.
X

Click on the Cancel button.

x The horizontal and vertical carrier
remain in the current position.
x The device is disconnected from the
LDS.
4.

Switch off the device.

5.

If applicable, disconnect the electricalconnections.

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General information about working with the LDS

This chapter contains general information about the LDS, irrespective of the respective measuring task.
Read this general information before turning to the following chapters on the various measurement modes.
9.4.1

Enter user-defined device name

If you want to assign a user-defined devicename to a device, proceed as follows:
1.

Click on the Devices tab.

2.

Right-click on the device and selectthe Device settings menu point.

3.

Enter the desired device name in the
Device name input field(max. 18 characters).

4.

In the Device settings window, confirm
the entry with OK.

The Confirmation window appears.
5.

Place a check mark at Acknowledge
and click OK.

6.

Switch the device off and on again.

x The device name is displayed in theConnections window.
x After connecting, the device name isdisplayed in the Devices tab.

9.4.2

Open „Device control“ menu

1.

Click on the Devices tab.

2.

Select the device and click on thedevice function Scanner below thedevice name.
The Device control menu with thefollowing sections opens.

•

Adjustment(see chapter 9.4.3 on page 33)•

Measuring modes(see chapter 9.4.4 on page 34)

Adjustment

Device function

Measuring modes

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9.4.3

Move vertical carrier for setup

The Adjustment area of the Device control menu offers various options for moving the vertical carrier.
The vertical carrier moves from the zero position (z=0) to the entered position.
See chapter 9.12.1 „Distance of the pinhole to the horizontal carrier“ on page 64.
OptionExplanation

z-Position in mm

X

Enter the desired z-position in the input field or use the slider.

Move to axis position

X

Click this button to move the vertical carrier to the z position specified
in the z-Position in mm field.

Note that this does not have to be the maximum traversing range ofyour device. If a locked area of the z-axis was stored in the EEPROM
during a previous use of the device, then this locked area is active.
Move to axis center position

X

Click this button to move the vertical carrier to the center position ofthe (unlocked) z-axis traversing range.

Note that this does not have to be the maximum traversing range of yourdevice. If a locked area of the z-axis was stored in the EEPROM duringa previous use of the device, then this locked area is active. The verticalcarrier then moves to the center position of the unlocked range.
Tab. 9.1:

Options in the Adjustment area of the Device control menu

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Open a measuring mode

The desired measuring mode is selected in the Device control menu. The following measuring modes are available:•

Linescan see chapter 9.7 „Linescan“ on page 48•

Single planes see chapter 9.8 „Single planes“ on page 51•

Monitor see chapter 9.9 „Monitor“ on page 56•

Manual caustic see chapter 9.10 „Manual Caustic“ on page 59•

Automatic caustic see chapter 9.11 „Automatic Caustic“ on page 61
X

After opening the Device control menu,
click the button of the desired measuringmode, for example Single planes.

A drop-down list for changing themeasuring mode appears in the upperarea of the Device control menu.
Change measuring mode:
1.

Click on the button to open the dropdown list.

2.

Select measuring mode.
After selecting the measuring mode, thecorresponding toolbench is opened.

If the toolbench has been closed, re-open
it by clicking the Open measurement
toolbench button.

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9.4.5

Enter parameters and activate

Be aware when settings are made in one measuring mode, some options are also available in other modes
as well.
For example, if you enter a parameter in the Single planes mode, it will automatically be applied to all othermeasuring modes that use this same parameter.
Transfer an entered parameter value
with the Enter key:
1.

Enter the desired value in the input field.
The background color of the input
field changes to blue.

2.

Example: blue input fieldConfirm the entry by pressing theEnter key.
The field returns to its original background color.

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Saving options

The LDS offers (up to) three different options for saving. They differ by the storage location and the selectionof the data to be saved.
When saving/loading a configuration, note that the command is called in a certain measurement mode, but
the saved/loaded data set also includes the settings of the other measurement modes.
Save data with asterisk (*) to a file /load from a file:All data marked with an asterisk in the
Device control menu can be saved to apreset file with the extension .pre on the PC.
X

To save a configuration, click on the icon.

X

To load a configuration click on the icon.

Save data with an asterisk (*) in the
EEPROM of the device:
All options marked with an asterisk in the
Device control menu can be saved in the
EEPROM in the device.
In this case, the settings will be retained even
if the device is switched off or disconnectedfrom the power supply.
1.

Click on the Advanced tab.

2.

Click on the Save device settings
button.

Save all settings in the LDS:With these buttons you can save or load
all settings of the Device control menu.
The storage is made device-related in thelocal installation of the LDS.
1.

Click on the Settings tab.

2.

Use one of the following options:X

Click the Save current parameters
button to save the settings of theconnected device.

X

Click on the Load last parameters
button to load the last saved settings.

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9.5

Settings that apply in all measuring modes

9.5.1

Define locked area

The Locked area in the Device control > Advanced menu enables a spatial restriction of the measuring
range in y- and z-direction. The defined locked area is not entered by the horizontal and vertical carriers. A
locked area can be set in the individual measuring modes and is adopted in all measuring modes.
For standard installation
The position z=0 and y=0 defines thelower left corner of the locked area aspark position.
The z-coordinate of the point P1 cannot
be changed.
1.

After opening the Device Control
menu, click the Advanced button.

2.

Use one of the following options:

X

Enter the locked area in the P1, P2,
P3 input fields.

X

Press the left mouse button and dragthe red dots.

3.

Press the Save device settings button.

zz=120 mmz=100 mmx The locked area is saved and applied
to all measurement modes.
Laser

Locked areay

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For upside down installation with rotated measuring tip
The coordinates given as the z-position when measuring always relate to the device coordinate system,
which rotates when the device or measurement tip is rotated.
See chapter 9.5.6 „Coordinate system for rotated measuring tip“ on page 42.
The position z=120 and y=0 defines theupper left corner of the locked area aspark position.
The z-coordinate of the point P1 cannot
be changed.
1.

After opening the Device Control
menu, click the Advanced button.

2.

Use one of the following options:

X

Enter the locked area in the P1, P2,
P3 input fields.

X

Press the left mouse button and dragthe red dots.

3.

Press the Save device settings button.

z=100 mmx The locked area is saved and applied
to all measurement modes.
Park position necessary for storage ofthe device in the transport box:
Since the locked area is stored in the device,
it is no longer possible to approach the park
position at z=120 mm after the device has
been switched off.
X

38

Park positionz=120 mmz

Locked area
Laser

y

z=0 mmReset the locked area before turning
off the device.

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9.5.2

Move axes

Move axes in the Device Control > Advanced menu contains options for moving the vertical and horizontal
carrier. Move axes can be set in the individual measuring modes and is adopted in all measuring modes.
See chapter 9.12.1 „Distance of the pinhole to the horizontal carrier“ on page 64.
OptionExplanation

y-Position in mm

X

Enter the desired y-position in the input field or use the slider.

Move to y-position

X

Click this button to move the horitontal carrier to the y-position
specified in the y-Position in mm field.

Note that this does not have to be the maximum traversing range ofyour device. If a locked area of the z-axis was stored in the EEPROM
during a previous use of the device, then this locked area is active.
z-Position in mm

X

Enter the desired z-position in the input field or use the slider.

Move to z-position

X

Click this button to move the vertical carrier to the z-position specified
in the z-Position in mm field.

Note that this does not have to be the maximum traversing range ofyour device. If a locked area of the z-axis was stored in the EEPROM
during a previous use of the device, then this locked area is active.
Move to focus of selected caustic

1.

Select a caustic in the project tree (see separate operating manualof the LaserDiagnosticsSoftware LDS).

2.

Click this button to move the vertical slide to the z-position of the
focus position.

Note that the focus should not be in the locking range of the z-axis. If alocked area of the z-axis was stored in the EEPROM during a previous
use of the device, then this locked area is active and the selected caustic
cannot be approached.
Tab. 9.2:

Options in the Move axes area of the Device control > Advanced menu

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Entries for the measuring tip used

For traceability of the measurements performed with a specific measuring tip, the specifications of the measuring
tip used can be entered into the LDS.
The specifications are indicated on the packaging of the measuring tip. Missing entries have no effect on themeasurements performed.
1.

After opening the Device Control
menu, click the Advanced button.

2.

Select the Type of measuring tip usedfrom the drop-down list.

3.

Enter the serial number S/N of themeasuring tip used.

4.

Enter the Sensitivity in cts/(MW/cm²)of the measuring tip used.

5.

Enter the Pinhole diameter in μm ofthe measuring tip used.

6.

Click the Save device parameters
button.

9.5.4

Display device orientation

Clicking the gear icon
orientation.

displays the device

Clicking the arrow icon << will return to theprevious view.

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9.5.5

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Rotating the measuring tip

In case of limited accessibility in the laser system, the device can be mounted in an upside down orientation
with rotated measuring tip. The curved side of the measuring tip must always face the incident laser beam.
If the measuring tip of the device is rotated, e.g. to perform an „upside down“ measurement, this must be set
and saved in the LDS.
The coordinates given as the z-position when measuring always relate to the device coordinate system,
which changes when the device or measurement tip is rotated.
See chapter 9.5.6 „Coordinate system for rotated measuring tip“ on page 42.
Please note that a previously defined locked area is reset when changing the orientation.

1.

After opening the Device Control
menu, click the Advanced button.

2.

Click one of the < > buttons.

x The illustration of the device rotates
180 degrees.
3.

Click the Save device parameters
button.

The window Rotated tip is displayed.
4.

Check the Acknowledge box andclick OK.

x The rotated measuring tip is stored in
the LDS.
x A previously defined locked area isreset.

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Coordinate system for rotated measuring tip

The coordinates given as the z-position when measuring always relate to the device coordinate system,
which changes when the device or measurement tip is rotated.
For standard installation
The figure shows the device in its park
position.

120
100
80
60
40
20
0

z-axisLaser
z=120 mmy-axisz=0 mmPark position

Device coordinate system
For upside down installation with rotatedmeasuring tip
The figure shows the device in its park
position.
If the device is operated in its rotatedposition and the Measuring tip rotatedoption has been selected, the orientationof the z-axis is rotated.

120
100
80
60
40
20
0

z-axisy-axisLaser

z=120 mm
Park position

z=0 mmDevice coordinate system

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9.6

Device control

9.6.1

Settings

The options listed below in alphabetical order are not available in all measuring modes.
1.

Click on the Settings tab.

2.

Enter the options according to the
explanations in the following table.

X

Data with (*) can be saved, seechapter 9.4.6 „Saving options“ onpage 36.

OptionExplanation# Pixel in x

The number of pixels determines the resolution of the measurement.
Use one of the following options:

autom. Gain

XEnter a value in the input field.

X

Use the slider below the input field.

When using a CO2 detector, this option is not available and will not be
displayed.
If this option is enabled, the gain is set automatically.
X

autom. Measurement window

If this option is enabled, then the measurement window size will be set
automatically.
X

Caustic proposal (z-range in mm)

Set the check mark to enable the option.

After a completed caustic measurement, a z-range is displayed in thesefields, whose limits z1/z2 have a distance of ± 3 Rayleigh lengths to thedetermined beam focus. This z-range is optimized according to Primes
quality criteria.
X

Deactivate z-axis

Set the check mark to enable the option.

Click on the Apply button to accept the caustic proposal for further
measurements.

With this option the z-axis of the device is deactivated.
This setting is used when the laser system moves to the position of thenext measurement. Enabling the option activates the Manual z-positionin mm input field.
X

Find beam

Set the check mark to enable the option.

This option enables an automatic beam search with an automated measuring window size and measurement. The laser beam is automaticallysearched for in the entire measuring range. Measurement window sizeand gain are set automatically.
The measured plane is then displayed in the graphic display.
X

Click on the button to start the beam search.

Note that the determined measurement data will not be saved in the
project tree of the Projects tab.

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When using a CO2 detector, this option is not available and will not be
displayed.
If the autom. Gain option is disabled, the gain can be set manually.
The option can be used to control the sensitivity of the detector.
Use one of the following options:
X

Enter a value in the input field.

X

Use the slider below the input field.

Interval between measurements in s *Enter the pause between the single plane measurements of the timeseries. This is the pause between the end of one measurement and thestart of the next.

Line center in mm

Use one of the following options to adjust the position of the measuring line:

Line width in mm

X

Enter the x-/y-position of the line center in the corresponding input
fields.

X

Position the mouse pointer within the measurement window.
Then drag while holding down the right mouse button.

Use one of the following options to adjust the line width (length) and position:
X

Enter the width (length) of the line.

X

Position the mouse pointer at any point within the measurement
area and drag while holding down the left mouse button. Keep themouse button pressed until the length of the measuring line meets
your requirements.

Load last parameters

X

Click this button to load the last saved device configuration.

Manual z-Position in mm

This option defines the position of the next measurement on the z-axis(see chapter 9.8.3 „Measure manual caustics with the single plane measurement mode“ on page 53).
X

Set the check mark at Deactivate z-axis.

X

Enter the Manual z-position in mm.

Measurement duration in s

X

Enter the duration of the measurement in s.

nominal power P in W *To calculate the power density, the laser power used must be entered.
Otherwise, the measured amplitudes are given directly in counts.
X

Enter the nominal laser power used during measurement.

Number of measurements *X

Enter the desired number of single plane measurements of the timeseries.

Number of planes *X

Enter the number of planes to be measured.

Optimized measurement settings

If this option is activated, then the duration of the measurement isreduced. Fewer process steps are required because the initial settings
for a measurement plane are taken from the settings of the previous
measurement plane.
Note, however, that beam artifacts may not be sufficiently detected in
the individual plane measurements due to the inheritance of the settings.
X

Parameter settings

Set the check mark to enable the option.

All settings in the Device control menu can be individually saved foreach device. The settings are saved to the local installation of the LDS.
This and other options for saving/loading configurations are described inchapter 9.4.6 „Saving options“ on page 36.

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Park position after caustic

X

From the drop-down list, select the park position to which the measuring head will move after the caustic measurement.

You have the following options:•

Focus: The measuring head is moved back to the position of thedetermined beam focus.

•

Start position: The measuring head is moved back to the start
position.

•

End position: The measuring head remains in the end position.

The selected position is also the start position for the precaustic measurement of the next measurement (unless you enter a different value inthe z position in mm field).
Position in mm

Use one of the following options to adjust the position of the measurement
window:
X

Enter the x-/y-position in the corresponding input fields.

X

Position the mouse pointer within the measurement window.
Then drag while holding down the right mouse button.

Reset measurement window

X

Click this button to maximize the measurement window and simultaneously center it in the measurement range.

Save current parameters

X

Click this button to save all current settings of the connected device.

Time series

A time series consists of several single plane measurements with thesame settings.

Window size in mm

If the autom. Measurement window option is disabled, the size of themeasurement window can be set manually. Use one of the following
options:z increment in mm

X

Enter the length and width in the corresponding input fields.

X

Position the mouse pointer anywhere within the measurement
range and drag while holding down the left mouse button. Keep themouse button pressed until the measurement window meets yourrequirements.

This option automatically defines the position of the next measurementon the z-axis (see chapter 9.8.3 „Measure manual caustics with thesingle plane measurement mode“ on page 53).
X

z-Axis position (z1/z2) in mm *Enter the z increment in mm.

By entering the upper and lower limits of the precaustic, the range isdefined in which the precaustic is measured. This function is particularly
useful for measuring beams with high divergence.
This option is used to determine the z-range in which the measurement
is to be performed.

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X

Enter the lower limit z1 in the left field and the upper limit z2 in theright field.

X

Alternatively, use the sliders.

Use one of the following options to set the desired z-position of theplane to be measured:
X

Enter a value in the input field.

X

Use the slider on the left side of the graphic display.

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Advanced

The options listed below in alphabetical order are not available in all measuring modes.
1.

Click on the Advanced tab.

2.

Enter the options according to the
explanations in the following table.

X

Data with (*) can be saved, seechapter 9.4.6 „Saving options“ onpage 36.

OptionExplanation# Pixel in x/y *The number of pixels determines the resolution of the measurement.
Enter the resolution in x-/y-direction in the corresponding input fields.

Arithmetic Average *The default algorithm for averaging the plane measurements is Arithmetic
Average. Averaging over several measurements can be useful, for example,
when measuring a laser with significant power fluctuations.
X

Select an algorithm from the drop-down list:•

Arithmetic Average: The measured values for each pixel are added
together and divided by the number of planes.

•

Max. intensity per pixel: The values from all the measurements arecompared for each pixel and only the maximum value for each one isdisplayed.

•

Max. Lines: The values from all the measurements are comparedfor each line (meaning the line measured by the device in x-direction)and only the maximum value for each one is displayed.

Calibrated wavelength(s) in nm *The “calibrated wavelength” is the wavelength at which the device has
been validated. This is stored in the device and is displayed in the LDS.

Focal length of focusing optics in mm *If several planes of a caustic have been measured, the caustic fit and theentered focal length are used to calculate the raw beam diameter on thefocusing optics.
X

Locked area

Enter the focal length used by the focusing optics of the laser system.

With this option, a spatial restriction of the measuring range can be
defined in y- and z-direction. The defined restricted area is not entered by
the horizontal and vertical carrier.
Use one of the following options:
X

Enter the locked area in the P1, P2, P3 input fields.

X

Press the left mouse button and drag the red dots.

This option is described in chapter 9.5.1 „Define locked area“ on page 37.
Measuring tip

Documentation of the measuring tip used
With these options, the specifications of the measuring tip used can beentered into the LDS for documentation of the measurements performed.
This option is described in chapter 9.5.3 „Entries for the measuring tip used“
on page 40.
Measuring with rotated measuring tip
1.

Click one of the < > buttons.

x The illustration of the device rotates 180 degrees.
2.

Click the Save device settings button.
The window Rotated tip is displayed.

3.

Check the Acknowledge box and click OK.

This option is described in chapter 9.5.5 „Rotating the measuring tip“ onpage 41.

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OptionExplanation

Move axes

With this option, the vertical and horizontal carriers can be moved in adefined manner. There are 3 options to choose from:•Move to y position•

Move to z position•

Move to the focus of the selected caustic

Use one of the following options:
X

Enter a value in the input field.

X

Use the slider below the input field.

This option is described in chapter 9.5.2 „Move axes“ on page 39.
nominal Power P in W *To calculate the power density, the laser power used must be entered.
Otherwise, the measured amplitudes are given directly in counts.
X

Number of averaged planes *Number of planes *Rotational speed in rpm *With the default setting of 1 in the input field, no averaging takes place.
X

Enter the number of plane measurements >1 for averaging

X

The predefiend number of planes is 21.

X

Enter the desired number of single plane measurements of the timeseries.

The required speed of the measuring tip used must be determined according
to appendix B on page 79.
X

Save device settings

Enter the nominal laser power used during measurement.

Select the speed of the measuring tip from the drop-down list.

All options marked with an asterisk in the Device control menu can besaved in the EEPROM of the device.
These and other options for saving/loading configurations are describedin chapter 9.4.6 „Saving options“ on page 36.

Used wavelength in nm *To calculate the beam quality factor M², the used wavelength must beentered. Depending on the display in the option Calibrated wavelength(s)in nm, the used wavelength can be entered in a defined range.
For example, with a „calibrated wavelength“ of 1 064 nm, the used wavelength can be entered from 1 000 - 1 100 nm.
Use one of the following options to set the wavelength of the laser used:

z-Axis position (z1/z2) in mm *X

Enter a value in the input field.

X

Use the slider below the input field.

By entering the upper and lower limits of the precaustic, the range isdefined in which the precaustic is measured. This function is particularly
useful for measuring beams with high divergence.
This option is used to determine the z-range in which the measurement is
to be performed.

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X

Enter the lower limit z1 in the left field and the upper limit z2 in theright field.

X

Alternatively, use the sliders.

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FocusMonitor FM+

LinescanIn measuring mode Linescan, the laser beam is measured at a defined position on the y-axis over a specificperiod of time. The line width, line center and position on the y-axis are freely adjustable.
The measuring tip of the FM+ is moved to a fixed y-position. At this position, it measures the power density
on a single measuring path with every rotation of the measurement tip.
The measurement is carried out over a defined period of time or until it is manually aborted.
9.7.1

Search laser beam automatically1.

Observe the warning messages inchapter 9.1 „Warning messages“ onpage 27.

2.

Click on the Settings tab.

3.

Enter the position of the measurement on the z-axis in the input fieldz-position in mm.

4.

Switch on the laser.

5.

Click on the Find beam button.

x The laser beam is automaticallysearched for in the entire measuring
range. The measurement window andgain are set automatically.
If the search is successful, the laser
beam is displayed in the graphic
representation.
If the beam is not displayed:
X

Check for correct alignment of thedevice on the x-y plane according tochapter 7.2.3 „Align the device“ onpage 19.

X

Check the direction of the beam
entrance.

X

Adjust the gain.

X

Choose a different z-position.

X

Increase the laser power (step by step).

6.

If necessary, adjust the measurement
track manually according to the following.
chapter 9.7.2 „Adjust the measurement
track manually“ on page 49 .

7.

Start the measurement according tochapter 9.7.3 „Start measurement“
on page 50.

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9.7.2

35,0(6

Adjust the measurement track manually

In a window in the upper area of theSettings tab, the measurement plane isdisplayed graphically:•

the entire measurable area (thin lines)•

the measurement track to be recorded(thick lines)•

the measuring position on the z-axis•

after performing a beam find and during
the measurements, a false color view of
the recorded area

Measuring range(thin line)

Measurement track(thick line)

Measuring positionon the z-axis
Create a measurement track:
X

Position the mouse pointer anywhere
within the measurement range.
Drag while holding down the left
mouse button. Keep the mouse buttonpressed until the measurement track
meets your requirements.

Adjust the position:
X

Enter the x-/y-position of the trackcenter in the corresponding input fields.

X

Position the mouse pointer over themeasurement track. Drag while holding
down the right mouse button.

With a laser beam displayed:X

To zoom to the center of the graphic
representation, first move the mousepointer over the graphic representation
until the plus/minus buttons appear.
Then press the buttons.

X

To zoom in on the position of themouse pointer, position the mousepointer anywhere within the graphic
representation.
Then turn the mouse wheel.

X

To zoom to the size of the measuring
range. Position the mouse pointerwithin the measuring range.
Then double-click left.

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FocusMonitor FM+

Start measurement

1.

Observe the warning messages inchapter 9.1 „Warning messages“ onpage 27.

2.

Click the Start button.

x The measurement begins.
Optional:
X

Click the Stop button to abort themeasurement.

X

Click the Stop Rotation button tostop the rotation of the measuring tip.
During the measurement, the progressis shown in the following indicators:

Measurement:
While the indicator is rotating, the measurement is performed.
Measurement completed:
After successful measurement, the indicatorlights up green.
3.

9.7.4

Switch off the laser after the measurement is completed, unless you wantto perform further measurements.

Display measurement results

The measurement results are displayedin the opened tool during and after thecompleted measurement.
X

PRIMES recommens checking the qualityof the results after a measurement.
Depending on the results, it may seem
necessary to repeat the measurementwith improved measurement setup orchanged parameters.

X

50

For a detailed description of the file
management and evaluation of themeasured data, please refer to theseparate operating manual LDS.

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9.8

35,0(6

Single planes

In Single planes measuring mode, single planes are measured at selected z-positions.
Measurement window size and the gain can be set automatically or determined manualy.
You can also have the software search for the laser beam automatically in the entire measurement range.
To measure a manual caustic, several planes can be measured — either individually or by means of a serial
measurement.
An increment along the z-axis can be configured for this, see chapter 9.8.3 „Measure manual caustics withthe single plane measurement mode“ on page 53.
9.8.1

Search laser beam automatically1.

Observe the warning messages inchapter 9.1 „Warning messages“ onpage 27.

2.

Click on the Settings tab.

3.

Enter the position of the measurement on the z-axis in the input fieldz-position in mm.

4.

Switch on the laser.

5.

Click on the Find beam button.

x The laser beam is automaticallysearched for in the entire measuring
range. The measurement window andgain are set automatically.
If the search is successful, the laser
beam is displayed in the graphic
representation.
If the beam is not displayed:
X

Check the correct alignment of thedevice on the x-y plane again according
to chapter 7.2.3 „Align the device“ onpage 19.

X

Check the direction of the beam
entrance.

X

Adjust the gain.

X

Choose a different z-position.

X

Increase the laser power (in small
increments).

6.

If necessary, adjust the measurement
window manually according to thefollowing. chapter 9.8.2 „Adjust themeasurement window manually“ onpage 52 an.

7.

Start the measurement according tochapter 9.8.4 „Start measurement“
on page 54.

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FocusMonitor FM+

Adjust the measurement window manually

In a window in the upper area of theSettings tab, the measurement plane isdisplayed graphically:•

the entire measurable area (thin lines)•

the measurement window to berecorded (thick lines)•

the measuring position on the z-axis•

after performing a beam find and during
the measurements, a false color view of
the recorded area

Measuring range(thin line)

Make sure that the autom. measurement
window option is not activated. Otherwise,
the manual setting may be overwritten
when starting a measurement.

Measurement window(thick line)

Measuring positionon the z-axis
Create a measurement window:
X

Position the mouse pointer anywhere
within the measurement range. Drag
while holding down the left mousebutton. Keep the mouse buttonpressed until the measurement window
meets your requirements.

Adjust the position:
X

Enter the x-/y-position in the corresponding input fields.

X

Position the mouse pointer anywhere
within the measurement window. Drag
while holding down the right mousebutton.

With a laser beam displayed:X

To zoom to the center of the graphic
representation, first move the mousepointer over the graphic representation
until the plus/minus buttons appear.
Then press the buttons.

X

To zoom in on the position of themouse pointer, position the mousepointer anywhere within the graphic
representation.
Then turn the mouse wheel.

X

To zoom to the size of the measuring
range. Position the mouse pointerwithin the measuring range.
Then double-click left.

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35,0(6

Measure manual caustics with the single plane measurement mode

In Single Plane measurement mode, further measurements can be performed at any z-positions.
With this procedure, a caustic can be measured manually.
For stigmatic and single astigmatic beams, at least 10 different positions on the z-axis must be measured
according to ISO 11146-1. About half of the measurements must be distributed within one Rayleigh length on
both sides of the beam waist and about half must be distributed beyond two Rayleigh lengths starting fromthe beam waist.
An odd number of measurement planes makes it more likely that one of the measurement planes will be ator close to the focal plane. PRIMES recommends measuring at least 21 planes within ± 3 Rayleigh lengths
around the focus.
For generally astigmatic and unknown beams, ISO 11146-2 requires measurements to be made at a minimumof 20 uniformly distributed points on the z-axis within a range of at least three times the Rayleigh length bothbehind and in front of the beam waist.
PRIMES recommends measuring at least 21 planes within ± 3 Rayleigh lengths around the focus. An odd
number of measurement planes makes it more likely that one of the measurement planes will be at or close
to the focal plane will be measured.
Single measurement with manual input of the z-position:
This procedure is used when the laser system moves tothe position of the next measurement. The z-axis of the
FM+ is deactivated for this purpose.
1.

Click on the Settings tab.

2.

Set the checkmark at Deactivate z-axis.

3.

In the z-position in mm field, enter the desired positionof the next plane to be measured.

4.

Start and stop the measurement according to chapter 9.8.4 „Start measurement“ on page 54.

Single measurements using z-increment spacing:This procedure works with the z-axis of the FM+ enabled
and disabled.
1.

Click on the Settings tab.

2.

Enter the spacing for the further measurements in thez-Increment in mm field.

3.

Start the measurement according to chapter 9.8.4„Start measurement“ on page 54 and wait until themeasurement is completed.

x The measured plane is one z‑increment away fromthe previously measured plane.
4.

Start a measurement again and wait until the measurement is finished.

x The measured plane is one z‑increment away fromthe previously measured plane.
5.

Repeat the last step as often as you like.

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Series measurement using z-increment spacing:
The combination of the Time series and z‑Increment in
mm options enables measuring a free caustic in one run.
1.

Click on the Settings tab.

2.

Enter the spacing for the planes to be measured in
the z-Increment in mm field.

3.

In the Number of measurements and Interval
between measurements in s input fields, enter thenumber of measurements and the interval. The intervalis the time between the end of one measurement andthe start of the next.

4.

Start the series measurement according tochapter 9.8.4 „Start measurement“ on page 54
and wait until the measurement is finished.

9.8.4

Start measurement

1.

Observe the warning messages inchapter 9.1 „Warning messages“ onpage 27.

2.

Click the Start button.

x The measurement begins.
Optional:
X

Click the Stop button to abort themeasurement.

X

Click the Stop Rotation button tostop the rotation of the measuring tip.
During the measurement, the progressis shown in the following indicators:

Measurement:
While the indicator is rotating, the measurement is performed.
Measurement completed:
After successful measurement, the indicatorlights up green.
Averaging (if enabled):
The indication shows the measured planes
that are used to average a measured value.
3.

54

Switch off the laser after the measurement is completed, unless you wantto perform further measurements.

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9.8.5

35,0(6

Display measurement results

The measurement results are displayedin the opened tool during and after thecompleted measurement.
X

PRIMES recommens checking thequality of the results after a measurement.
Depending on the results, it may benecessary to repeat the measurementwith improved measurement setup orchanged parameters.

X

For a detailed description of the file
management and evaluation of themeasured data, please refer to theseparate operating manual LDS.

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35,0(69.9FocusMonitor FM+

MonitorIn Monitor measuring mode, measuring planes are continuously viewed in a false-color image. The laser
beam can be automatically searched by the software in the entire measurement range.
After a successful search the measurement will be run as long as desired. During the measurement, data is
continuously read out and displayed in the graphical view. Measurement data are not saved in the projecttree of the Projects tab.
9.9.1

Search laser beam automatically1.

Observe the warning messages inchapter 9.1 „Warning messages“ onpage 27.

2.

Click on the Settings tab.

3.

Enter the position of the measurement on the z-axis in the input fieldz-position in mm.

4.

Switch on the laser.

5.

Click on the Find beam button.

x The laser beam is automaticallysearched for in the entire measuring
range. The measurement window andgain are set automatically.
If the search is successful, the laser
beam is displayed in the graphic
representation.
If the beam is not displayed:
X

Verify the correct alignment of thedevice on the x-y plane according tochapter 7.2.3 „Align the device“ onpage 19.

X

Check the direction of the beam
entrance.

X

Adjust the gain.

X

Choose a different z-position.

X

Increase the laser power (in small
increments).

6.

If necessary, adjust the measurement
window manually according to thefollowing. chapter 9.9.2 „Adjust themeasurement window manually“ onpage 57 an.

7.

Start the measurement according tochapter 9.9.3 „Start measurement“
on page 58.

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9.9.2

35,0(6

Adjust the measurement window manually

In a window in the upper area of theSettings tab, the measurement plane isdisplayed graphically:•

the entire measurable area (thin lines)•

the measurement window to berecorded (thick lines)•

the measuring position on the z-axis•

after performing a beam find and during
the measurements, a false color view of
the recorded area

Measuring range(thin line)

Measurement window(thick line)

Measuring positionon the z-axis
Create a measurement window:
X

Position the mouse pointer anywhere
within the measurement range. Drag
while holding down the left mousebutton. Keep the mouse buttonpressed until the measurement window
meets your requirements.

Adjust the position:
X

Enter the x-/y-position in the corresponding input fields.

X

Position the mouse pointer over themeasurement track. Drag while holding
down the right mouse button.

With a laser beam displayed:X

To zoom to the center of the graphic
representation, first move the mousepointer over the graphic representation
until the plus/minus buttons appear.
Then press the buttons.

X

To zoom in on the position of themouse pointer, position the mousepointer anywhere within the graphic
representation.
Then turn the mouse wheel.

X

To zoom to the size of the measuring
range. Position the mouse pointerwithin the measuring range.
Then double-click left.

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FocusMonitor FM+

Start measurement

DANGER
Serious injury to the eyes or skin due to laser radiation
If you use a continuous plane measurement to align the device in Monitor measurement mode,
note the following:
X Align the device preferably with a pilot laser that cannot cause dangerous reflections.
X Aligning the device with a class 4 laser can result in dangerous reflections. In this case, the alignment
must be remotely controlled behind a separating protective device. The protective device must block
the radiation or reduce it to a non-hazardous level.
1.

Follow the warning messages inchapter 9.1 „Warning messages“ onpage 27.

2.

Click the Start button.

x The measurement begins.
Optional:
X

Click the Stop button to abort themeasurement.

X

Click the Stop Rotation button tostop the rotation of the measuring tip.
During the measurement, the progressis shown in the following indicators:

Measurement:
While the indicator is rotating, the measurement is performed.
3.

9.9.4

Switch off the laser after the measurement is completed, unless you wantto perform further measurements.

Display measurement results

During the measurement, measurement
data is continuously read out and displayedin the graphical view.
The determined measurement data are notsaved in the project tree of the Projects tab.
X

58

For a detailed description of the file
management and evaluation of themeasured data, please refer to theseparate operating manual LDS.

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9.10

35,0(6Manual Caustic

In Manual Caustic measuring mode, only the z‑range and the number of measurement planes have to be
specified. All other required settings are automatically determined and adjusted. In addition, advanced settings
can be applied.
For stigmatic and single astigmatic beams, at least 10 different positions on the z-axis must be measured
according to ISO 11146-1. About half of the measurements must be distributed within one Rayleigh length on
both sides of the beam waist and about half must be distributed beyond two Rayleigh lengths starting fromthe beam waist.
An odd number of measurement planes makes it more likely that a measurement planes is at or close to the
focal plane. PRIMES recommends measuring at least 21 planes within ± 3 Rayleigh lengths around the focus.
For generally astigmatic and unknown beams, ISO 11146-2 requires measurements to be made at a minimumof 20 uniformly distributed points on the z-axis within a range of at least three times the Rayleigh length behind
and in front of the beam waist.
PRIMES recommends measuring at least 21 planes within ± 3 Rayleigh lengths around the focus.
An odd number of measurement planes makes it more likely that a measurement planes is at or close to the
focal plane.
9.10.1

Start measurement

1.

Observe the warning messages inchapter 9.1 „Warning messages“ onpage 27.

2.

Click the Start button.

x The measurement begins.
Optional:
X

Click the Stop button to abort themeasurement.

X

Click the Stop Rotation button tostop the rotation of the measuring tip.
During the measurement, the progressis shown in the following indicators:

Measurement:
While the indicator is rotating, the measurement is running.
Measurement completed:
After successful measurement, the indicatorlights up green.
Averaging (if enabled):
The indication shows the measured planes
that are used to average a measured value.
3.

Switch off the laser after the measurement is completed, unless you wantto perform further measurements.

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Apply a caustic suggestion (optional)

After the measurement is completed,a z-area is displayed in the suggested
caustic fields, the limits z1/z2 of which
are at a distance of ± 3Rayleigh lengths
from the determined beam focus.
1.

If you want to accept this suggestion,
click the Apply button.
The suggested values for the z1/z2
limits are transferred to the z-axis
position (z1/z2) fields in mm.

2.

Start and stop the measurement
according to chapter 9.10.1 „Start
measurement“ on page 59.

9.10.3

Display measurement results

The measurement results are displayedin the opened tool during and after thecompleted measurement.
X

PRIMES recommens checking thequality of the results after a measurement.
Depending on the results, it may benecessary to repeat the measurementwith improved measurement setup orchanged parameters.

X

60

For a detailed description of the file
management and evaluation of themeasured data, please refer to theseparate operating manual LDS.

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9.11

35,0(6

Automatic Caustic

In Automatic Caustic measurement mode, just press the start button to automatically determine a caustic.
The center position of the z-axis is preset as the start position.
The default setting for the number of measurement planes is 21. The optimal measurement range along thez-axis and all other required settings are made automatically and adjusted if necessary. You can also makeadvanced settings.
For stigmatic and single astigmatic beams, at least 10 different positions on the z-axis must be measured
according to ISO 11146-1. About half of the measurements must be distributed within one Rayleigh length on
both sides of the beam waist and about half must be distributed beyond two Rayleigh lengths starting fromthe beam waist.
An odd number of measurement planes makes it more likely that a measurement planes is at or close to the
focal plane. PRIMES recommends measuring at least 21 planes within ± 3 Rayleigh lengths around the focus.
For generally astigmatic and unknown beams, ISO 11146-2 requires measurements to be made at a minimumof 20 uniformly distributed points on the z-axis within a range of at least three times the Rayleigh length behind
and in front of the beam waist.
PRIMES recommends measuring at least 21 planes within ± 3 Rayleigh lengths around the focus.
An odd number of measurement planes makes it more likely that a measurement planes is at or close to the
focal plane.
9.11.1

Start measurement

1.

Observe the warning messages inchapter 9.1 „Warning messages“ onpage 27.

2.

Click the Start button.

x The measurement begins.
Optional:
X

Click the Stop button to abort themeasurement.

X

Click the Stop Rotation button tostop the rotation of the measuring tip.
During the measurement, the progressis shown in the following indicators:

Pre-caustic:
As the indication is being displayed, theoptimal measuring parameters such asmeasuring window position, measuringwindow size, integration time, and thez-range (measuring range along the beam
propagation) are determined automatically.
Measuring caustic:
While the indicator is rotating, the measurement is running.
Measurement completed:
After successful measurement, the indicatorlights up green.
3.

Switch off the laser after the measurement is completed, unless you wantto perform further measurements.

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Display measurement results

The measurement results are displayedin the opened tool during and after thecompleted measurement.
X

PRIMES recommens checking thequality of the results after a measurement.
Depending on the results, it may benecessary to repeat the measurementwith improved measurement setup orchanged parameters.

X

62

For a detailed description of the file
management and evaluation of themeasured data, please refer to theseparate operating manual LDS.

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9.12

Determining the tool center point (TCP) using the FM+

The tool center point (TCP) is usually located on the beam axis on the focus plane.
1.

Align the FM+ as described inchapter 7.2.3 „Align the device“ onpage 19.

2.

Install the FM+ as described in chapter 7.2.4 „Mount the device“ onpage 22.

3.

Perform an automatic caustic measurement
as described in chapter 9.11 „Automatic
Caustic“ on page 61.

4.

Move the measuring carrier of the FM+ tothe determined focus plane as describedin chapter 9.4.3 „Move vertical carrier for
setup“ on page 33.

Laser processing headz

x The FM+ moves the reference plane tothe focus position.
5.

•

Measure the Distance z between the reference plane of the horizontal carrier and thereference plane on the laser processing
head.
Where z is the distance from the reference
plane at the laser processing head to theworkpiece surface.

Standard installation
Laser processing headz

Upside down installation with rotated measuring tip

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35,0(6Distance of the pinhole to the horizontal carrier

20,5 ±0,2 mm

9.12.1

FocusMonitor FM+

Distance from the pinhole to the reference plane of the horizontal carrier

5,9 ±0,2 mm

Fig. 9.1:

Fig. 9.2:

64

Distance from the pinhole to the reference plane on the bottom of the horizontal carrier

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10

Troubleshooting

10.1

Messages in the LaserDiagnosticsSoftware LDS during measurement35,0(6

If problems occur during a measurement, the LDS displays them in different categories and different colors.
Note
Notes provide assistance in interpreting the measurement
results and are displayed in a blue window.
Use one of the following options:X

Click on the warning triangle in the footer to display/hide
the window.

X

If applicable, click the Next message button to display
more messages of the same category.

X

Click the Confirm button to remove the displayed message.

Warning
Non-safety-critical problems that influence the quality of themeasurement results, for example, are displayed in a yellow
window.
Use one of the following options:X

Click on the warning triangle in the footer to display/hide
the window.

X

If applicable, click the Next message button to display
more messages of the same category.

X

Click the Confirm button to remove the displayed message.

Device error
Device errors that can result in damage of the device are displayedin an orange window.
In this case, proceed as follows:1.

Fix the problem.

2.

Click the Confirm button to remove the message.
The message disappears. If the problem is not fixed, thenthe message appears again shortly afterwards.

3.

Do not proceed with the measurement until the problem issolved.

Safety critical note
Safety-critical problems that can result in damage/destructionof the device are displayed in a red window.
In this case, proceed as follows:1.

Fix the problem immediately.

2.

Click the Confirm button to remove the message.
The message disappears. If the problem is not fixed, thenthe message appears again shortly afterwards.

3.

Do not proceed with the measurement until the problem issolved.

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Connection error when using the LDS

The firewall may block the connection between the device andthe LDS:XThe UDP port should be enabled by a systemadministrator.

In Windows > Control panel > Firewall, enable the UDP
port 20034.

The IP address of the PC is not within the range of the device.
X

FocusMonitor FM+

In Windows > Control panel > Network and Sharing Center,assign an IP address to the PC that is in the same address
range as the PRIMES device (e.g. 192.168.116.xyz).
The IP address of the PRIMES device can be found on theidentification plate.

The IP address should be set by a system administrator.

If several network cards or a USB3-to-Ethernet card are installed in
the PC, the connection between device and LDS may be blocked
by the selection of the wrong network card.
1.

Select the appropriate network card in the Connections >All window.
The device is displayed in the Connections window

2.

Click on the device.

3.

Click on the Connect to device button.

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10.3

Other errors

Error

Possible cause

RemedyError during a measurement•

Data transmission error

1.

Restart the software.

•

Processor crash in themeasuring system

2.

Turn off the supply voltage, turn it on again, andstart another reset cycle.

•

Program execution error

3.

Restart the computer

Apart from the ambient
noise and zero offset,
no measuring signal isavailable.

The device is not aligned
correctly.

Check the device alignment to the laser beam.

The power density in thefocus is too low.

Increase the laser power. The absolute power density inthe focus typically has to be several hundred kW/cm² toachieve a significant measuring signal with a standard
measuring tip.

The selected resolution is too
low for smaller focus spots(e.g. rf = 80 µm) and a maximum measuring window.

First measure outside the direct focus area. If thisdoes not lead to a result, increase the resolution(e.g. 256 x 256).

The measuring tip is defective.

Insert a new measuring tip, see chapter 11.3 „Check/
replace the measuring tip“ on page 68.

The measuring tip is installed
incorrectly.

Turn the measuring tip around.

The signal enhancement is
too low.

Set the maximum enhancement and select the maximum
measuring range.

The measuring tip isdestroyed during themeasurement.

The power density is too
high, igniting plasma on thesurface of the measuring tip.

Increase the speed of the measuring tip, see appendix
B on page 79 and purge the measuring area withinert gas.

When measuring small
beams, an offset of therecorded measuring
tracks to one another isobserved.

Fluctuations in the synchronism of the rotation discand delays in triggering thetrigger signal.

Position the beam as close to the left edge of the window
as possible. The time interval between the trigger signal
and start of the measurement is then smaller and errors
can thus be reduced. Averaging is also often helpful inthis case.

A lag of the signal in thex-direction can become
visible in some caseswith the DFY-PS+ detector
and very small beams in
combination with a highmeasuring tip velocity.

The response time of theused photodiode of the DFYPS+ detector.

For such measurements, PRIMES recommends the useof the DFIG-PS+ detector.

Slight differences in sensitivity may occur when using
the DFY-PS+ detector
in the wavelength range
1,064 - 1,080 nm.

The upper limit of sensitivityof the DFY-PS+ detector isclose to the wavelength ofsolid-state lasers.

For such measurements, PRIMES recommends the useof the DFIG-PS+ detector, which provides a broader
wavelength range.

Tab. 10.1:

Other errors

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Maintenance and service

11.1

Maintenance intervals

FocusMonitor FM+

The operator is responsible for determining the maintenance intervals of the measuring device.
PRIMES recommends a maintenance interval of 12 months for inspection and validation.
If the device is used sporadically (less than once a day), the maintenance interval can be extended up to
24 months.
Please note that the safety and warning functions of the device must be checked regularly.
11.2

Cleaning

Cleaning the device surface
1. After a measurement let the device cool down for an adequate period of time.
2. First clean the device surface with clean and oil-free compressed air.
3. For further cleaning, use a mixture of distilled water and isopropanol in a ratio of approx. 5:1.
Use lint-free cleaning cloths that do not cause scratches.
4. If these steps are not sufficient, please contact PRIMES or your PRIMES distributor.
11.3

Check/replace the measuring tip

NOTICE
Damage / Destruction of the measuring tip
The very small pinhole of the measuring tip can quickly become blocked by dirt particles or whentouched with bare hands.
X Wear suitable gloves when installing/removing the measuring tip from the FM+ and make sure thatthe environment is free of dirt and dust
X Do not disassemble the measuring tip, otherwise it will become non-functional.

NOTICE
Damage/Destruction of the device
Imbalance of the rotation disc can damage the device.
X Never operate the device without the measuring tip.
Check measuring tip
The pinhole of a measuring tip can be checked using a HeNe laser.
Remove the measuring tip and shine a 0.5 to 1.0 mW laser into the measuring tip from behind.
The opening in the measuring tip (pinhole) should provide a clear red reflection on the outside.

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Remove the measuring tip
1.

Unplug the power cord to prevent the device from being accidentally switched on again.

2.

Turn the FM+ upside down.

3.

Turn the rotational disc until the measuring tip becomes visible in the housing recess.

4.

Remove the fastening screws of theretaining plate (Torx T8).

Fastening screws

Retaining plate

Measuring tip
5.

Carefully push the measuring tip andretaining plate upwards through the
housing bore using a screwdriver

6.

Pull the retaining plate up slightly andthen forwards until it loosens and canbe removed easily

7.

Carefully remove the measuring tip.

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Install the measuring tip

DANGER
Serious eye or skin injury due to laser radiation/Destruction of the measuring tip
If the laser beam hits the measuring tip in the beam path, it could be destroyed and scattered or
directed reflection of the laser beam (laser class 4) occurs.
After installation, move the measuring tip out of the beam path.
1.

Insert the new measuring tip
The inlet aperture is located on theconvex side.

2.

Use up and down movements toinsert the retaining plate into therotational disc at an angle of about
45 degrees, ensuring that the guidegroove is pointing upwards. Thenpush it down into the recess

X

Check whether the retaining plate is
positioned correctly by lightly pressing
the front edge.

3.

Insert the fastening screws (Torx T8)
and tighten hand-tight.

4.

Move the measuring tip out of thebeam path.

PinholeFastening screws

Retaining plate

Measuring tip

If you have rotated the measuring tip, use the arrow buttons to select the “Measuring Tip” setting in
LDS in the menu Device control > Advanced > Measuring tip.

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11.4

Replace detector

Generally, the FM+ is equipped with a DFIG-PS+ or DFC+ detector. Detectors with different sensitivity or
different time behavior can be used for special applications.
More information regarding the variety of detectors to ensure an optimum configuration of the FM+ is provided
in chapter 11.5 „Selection of the measuring tip and the detector“ on page 73.

NOTICE
Damage of the detector
Touching the sensor surface will damage the detector. This can negatively affect the measuring results.
X Do not touch the detector with your fingers on the sensor surface.
X Do not place the detector on the sensor surface to avoid scratches.
Disassemble detector
1.

Unplug the power cord to prevent the device from being accidentally switched on again.

2.

Remove the plastic screws (D) fromthe detector.

D

D

3.

Carefully remove the detector fromthe position:X

Do not pull the cables!

4.

First loosen the golden angle plug (A),then the black plug (B).

5.

Remove the detector.

X

Do not touch the detector with yourfingers on the sensor surface.

X

Do not place the detector on the sensor
surface to avoid scratches.

Touch here

B
Touch here
Do not compress
here!

A

Sensor surface

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Assemble detector

NOTICE
Blocking the rotational disc
Do not forget the foam rubber spacer during installation, otherwise the rotational disc could bemechanically blocked by the screws.
The foam rubber spacer also ensures mechanical isolation of the detector.
X Only tighten the plastic screws hand-tight. The foam rubber spacer must only be compressed tono less than half its original thickness.
Only use isolating plastic screws to fasten the detector to prevent any electric noise signals frombeing interspersed.

1.

To install the new detector, first place
the foam rubber spacer (C) (includedin the scope of delivery) on themounting surface of the detector.

C
D
D

2.

Then connect the cables (A) and (B).

B
A

3.

Center the detector to the housing.

4.

Fasten the detector with the twoplastic screws (D).

X

Only tighten the plastic screws handtight. The foam rubber spacer must
only be compressed to no less thanhalf its original thickness.

Maintain distances!

D

D

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11.5

Selection of the measuring tip and the detector

Depending on the laser type, you must use the appropriate measuring tip and detector. The measuring tips
and detectors are available for different wavelengths, power density ranges, or beam divergences so thatmeasurements can be recorded at a maximum power in each case.
This ensures that an optimum configuration of the FM+ is achieved. Only one value can be exploited fully forthe power or power density.
The service life of the measuring tips depends not only on the power density but also on the cleanliness ofthe surface (dust, particles, fingerprints). Therefore, the measuring tips must be treated very carefully.
Measuring tips specifications and selection of suitable detectors
The measuring tips are suitable for different power densities depending on the design. The power density
depends on the laser power and focus size.
Observe the destruction limits of the measuring tips in appendix B on page 79.
Measuring tips

CO2 high power

NIR high div

Diode

Typical pinhole diameter in µm

20 – 2520

50

Beam divergence/acceptance angle in mrad

< 240

< 200

< 500

Typical wavelength in nm

9 000 − 12 000

400 − 1 700

400− 1 700

CO2 laser

Max. power density in MW/cm

Laser power up to 6 kW

30

—

—

Laser power up to 12 kW

20

—

—

Laser power up to 20 kW

15

—

—

NIR laser

Max. power density in MW/cm

Laser power up to 6 kW

—

10

5

Laser power up to 12 kW

—

8

4

Laser power up to 20 kW

—

6

3

VIS laser

Max. power density in MW/cm

Laser power up to 6 kW

—

5

—

Laser power up to 12 kW

—

5

—

Laser power up to 20 kW

—

5

—

DFC+

DFIG-PS+, DFY-PS+

DFIG-PS+, DFY-PS+

Geeignete Detektoren
Detector typs
Tab. 11.1:

Measuring tips specifications and selection of suitable detectors

Detectors specifications
Detector types

DFC+

DFY-PS+

DFIG-PS+

Laser

CO2

NIR/VIS

NIR

Sensor typ

Pyroelectric

PhotodiodePhotodiode

Amplification

1

Automatic adjustment

Automatic adjustment

9 000 − 12 000

400 − 1 100

800 − 2 100

—

100

100

Wavelength range in nm
Min. beam diameter at 1 875/3 750 min-1Min. beam diameter at 7 500 min-1
Tab. 11.2:—

100 (400 − 800 nm)
150 (800 - 1 100 nm)

100

Detectors specifications

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Measures for the product disposal

As a B2B device, this PRIMES measuring device is subject to the European Waste Electrical and Electronic
Equipment (WEEE) Directive and the corresponding national laws. The WEEE directive obliges the operatingcompany to dispose of the device in an environmentally sound manner, not with household waste, but in a
separate WEEE collection.
PRIMES gives the opportunity to return PRIMES measuring devices for free disposal within the scope of the
Waste of Electrical and Electronic Equipment (WEEE Directive). This service does not include shipping costs.
Send PRIMES measuring devices to be disposed of within the EU to our address:
PRIMES GmbH
Max-Planck-Str. 264319 Pfungstadt
Germany
If you are located outside the EU, please contact your local PRIMES distributor to discuss the disposal procedurefor your PRIMES measuring device.
PRIMES is registered at the german „joint body“ for producers „Stiftung Elektro-Altgeräte Register“ (Stiftung EAR).
Our number is: WEEE-reg.-no. DE65549202.

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35,0(6

Declaration of conformity

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FocusMonitor FM+

Technical Data

Measurement parameters
Power range 1)

30 – 25 000 W

Wavelength range

400 – 12 000 nm

Beam dimensions

100 – 3 000 µm (up to 5 000 µm optional)Max. power density range CO2- and NIR laser

See appendix B on page 79

Max. power density(depending on measuring tip)Max. beam divergence(depending on measuring tip)

CO2 laser (10 600 nm)

30 MW/cm²

Nd:YAG laser (1 000 – 1 100 nm)

10 MW/cm²

VIS laser (515 – 550 nm)

5 MW/cm²

Dioden laser (800 – 1 000 nm)

5 MW/cm²

NIR high div

200 mradCO2 high power

240 mradDiode

500 mradDetermined parameters
Focus position x, y, z

yes

Focus radius x, yyesBeam quality factor M² (SPP)yes

Divergence angle

yesPower density distribution

2D, 3D

Device parameters
Working range x-y

8 x 8 mm (optional 12 x 12 mm or 24 x 12 mm)

Working range z

120 mmResolution

32 x 32 – 1024 x 1024 Pixel

Speed of measuring tip

1875, 3750, 7500 min-1

Linescanyes

Supply data
Power supply

24 V DC ± 5 %, max. 3.5 A

Inert gas (water- and oil free)Helium, Nitrogen or Argon

Pressure inert gas

typ. 0.5 bar

Communication
Interfaces

RS485/Ethernet

Dimensions and weight
Dimensions (L × B × H)

280 x 242 x 218 mm

Weight (approx.)

8.5 kgEnvironmental conditions

1)

Operating temperature range

10 – 40 °C

Storage temperature range

5 – 50 °C

Reference temperature

22 °C

Permissible relative humidity (non-condensing)

10 – 80 %No general performance limit. It is not permissible to exhaust the extremes of individual technical data at the same time.

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Dimensions
If not otherwise stated, all dimensions are in millimeters (mm).

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FocusMonitor FM+

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15

AppendixA

GNU GPL license notice35,0(6The software of this product contains software code that is licensed subject to the GNU General Public
License (GPL) Version 2 or later. The license terms of the GNU GPL Version 2 or later are available on thefollowing websites:•

https://www.gnu.org/licenses/old-licenses/gpl-2.0•

https://www.gnu.org/licenses/

B

Determine the speed of the measuring tip used

The calculations assume a Gaussian profile.
The maximum power density in real beams with the same dimensions is often slightly smaller (typically minus
10 – 20%, minus 50% for a tophat distribution).
In case of doubt, start with a lower laser power.

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FocusMonitor FM+

Limits for measuring operation with CO2 high power measuring tip

Table element

White

Green

Yellow

OrangeRed

Speed in min

1875

3750

7500

7500 and inert gas purging

Risk of destruction!

Focus diameter in µm

-1

70

5,20

25,98

51,97

77,95

103,94

207,88311,81

415,75

623,631039,38

80

3,98

19,89

39,79

59,68

79,58

159,15

238,73

318,31

477,46

795,77

90

3,14

15,72

31,44

47,16

62,88

125,75

188,63

251,50377,26

628,76

100

2,55

12,73

25,46

38,20

50,93

101,86

152,79203,72

305,58509,30

125

1,63

8,15

16,30

24,45

32,59

65,19

97,78

130,38

195,57

325,95

150

1,13

5,66

11,32

16,98

22,64

45,27

67,91

90,54

135,81

226,35

175

0,83

4,16

8,32

12,47

16,63

33,26

49,89

66,52

99,78

166,30

200

0,64

3,18

6,37

9,55

12,73

25,46

38,20

50,93

76,39

127,32

225

0,50

2,52

5,03

7,55

10,06

20,12

30,18

40,24

60,36

100,60

250

0,41

2,04

4,07

6,11

8,15

16,30

24,45

32,59

48,89

81,49

275

0,34

1,68

3,37

5,05

6,73

13,47

20,20

26,94

40,41

67,34

300

0,28

1,41

2,83

4,24

5,66

11,32

16,98

22,64

33,95

56,59

325

0,24

1,21

2,41

3,62

4,82

9,64

14,47

19,29

28,93

48,22

350

0,21

1,04

2,08

3,12

4,16

8,32

12,47

16,63

24,95

41,58

375

0,18

0,91

1,81

2,72

3,62

7,24

10,86

14,49

21,73

36,22

400

0,16

0,80

1,59

2,39

3,18

6,37

9,55

12,73

19,10

31,83

425

0,14

0,70

1,41

2,11

2,82

5,64

8,46

11,28

16,92

28,20

450

0,13

0,63

1,26

1,89

2,52

5,03

7,55

10,06

15,09

25,15

475

0,11

0,56

1,13

1,69

2,26

4,51

6,77

9,03

13,54

22,57

500

0,10

0,51

1,02

1,53

2,04

4,07

6,11

8,15

12,22

20,37

525

0,09

0,46

0,92

1,39

1,85

3,70

5,54

7,39

11,09

18,48

550

0,08

0,42

0,84

1,26

1,68

3,37

5,05

6,73

10,10

16,84

575

0,08

0,39

0,77

1,16

1,54

3,08

4,62

6,16

9,24

15,40

600

0,07

0,35

0,71

1,06

1,41

2,83

4,24

5,66

8,49

14,15

625

0,07

0,33

0,65

0,98

1,30

2,61

3,91

5,22

7,82

13,04

650

0,06

0,30

0,60

0,90

1,21

2,41

3,62

4,82

7,23

12,05

675

0,06

0,28

0,56

0,84

1,12

2,24

3,35

4,47

6,71

11,18

700

0,052

0,26

0,52

0,78

1,04

2,08

3,12

4,16

6,24

10,39

725

0,048

0,24

0,48

0,73

0,97

1,94

2,91

3,88

5,81

9,69

750

0,045

0,23

0,45

0,68

0,91

1,81

2,72

3,62

5,43

9,05

775

0,042

0,21

0,42

0,64

0,85

1,70

2,54

3,39

5,09

8,48

800

0,040

0,20

0,40

0,60

0,80

1,59

2,39

3,18

4,77

7,96

850

0,035

0,18

0,35

0,53

0,70

1,41

2,11

2,82

4,23

7,05

900

0,031

0,16

0,31

0,47

0,63

1,26

1,89

2,52

3,77

6,29

950

0,028

0,14

0,28

0,42

0,56

1,13

1,69

2,26

3,39

5,64

1000

0,025

0,13

0,25

0,38

0,51

1,02

1,53

2,04

3,06

5,09

1500

0,011

0,06

0,11

0,17

0,23

0,45

0,68

0,91

1,36

2,26

2000

0,006

0,03

0,06

0,10

0,13

0,25

0,38

0,51

0,76

1,27

3000

0,003

0,01

0,03

0,04

0,06

0,11

0,17

0,23

0,34

0,57

0,1

0,5

1

1,5

2

4

6

8

12

20

Power in kW
Tab. B.1:

80

Power density in MW/cm² with CO2 high power measuring tip

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B.2

Limits for measuring operation with NIR high div measuring tip

Table element

White

Green

Yellow

OrangeRed

Speed in min

1875

3750

7500

7500 and inert gas purging

Risk of destruction!

Focus diameter in µm

-1

70

5,20

25,98

51,97

77,95

103,94

207,88311,81

415,75

623,631039,38

80

3,98

19,89

39,79

59,68

79,58

159,15

238,73

318,31

477,46

795,77

90

3,14

15,72

31,44

47,16

62,88

125,75

188,63

251,50377,26

628,76

100

2,55

12,73

25,46

38,20

50,93

101,86

152,79203,72

305,58509,30

125

1,63

8,15

16,30

24,45

32,59

65,19

97,78

130,38

195,57

325,95

150

1,13

5,66

11,32

16,98

22,64

45,27

67,91

90,54

135,81

226,35

175

0,83

4,16

8,32

12,47

16,63

33,26

49,89

66,52

99,78

166,30

200

0,64

3,18

6,37

9,55

12,73

25,46

38,20

50,93

76,39

127,32

225

0,50

2,52

5,03

7,55

10,06

20,12

30,18

40,24

60,36

100,60

250

0,41

2,04

4,07

6,11

8,15

16,30

24,45

32,59

48,89

81,49

275

0,34

1,68

3,37

5,05

6,73

13,47

20,20

26,94

40,41

67,34

300

0,28

1,41

2,83

4,24

5,66

11,32

16,98

22,64

33,95

56,59

325

0,24

1,21

2,41

3,62

4,82

9,64

14,47

19,29

28,93

48,22

350

0,21

1,04

2,08

3,12

4,16

8,32

12,47

16,63

24,95

41,58

375

0,18

0,91

1,81

2,72

3,62

7,24

10,86

14,49

21,73

36,22

400

0,16

0,80

1,59

2,39

3,18

6,37

9,55

12,73

19,10

31,83

425

0,14

0,70

1,41

2,11

2,82

5,64

8,46

11,28

16,92

28,20

450

0,13

0,63

1,26

1,89

2,52

5,03

7,55

10,06

15,09

25,15

475

0,11

0,56

1,13

1,69

2,26

4,51

6,77

9,03

13,54

22,57

500

0,10

0,51

1,02

1,53

2,04

4,07

6,11

8,15

12,22

20,37

525

0,09

0,46

0,92

1,39

1,85

3,70

5,54

7,39

11,09

18,48

550

0,08

0,42

0,84

1,26

1,68

3,37

5,05

6,73

10,10

16,84

575

0,08

0,39

0,77

1,16

1,54

3,08

4,62

6,16

9,24

15,40

600

0,07

0,35

0,71

1,06

1,41

2,83

4,24

5,66

8,49

14,15

625

0,07

0,33

0,65

0,98

1,30

2,61

3,91

5,22

7,82

13,04

650

0,06

0,30

0,60

0,90

1,21

2,41

3,62

4,82

7,23

12,05

675

0,06

0,28

0,56

0,84

1,12

2,24

3,35

4,47

6,71

11,18

700

0,052

0,26

0,52

0,78

1,04

2,08

3,12

4,16

6,24

10,39

725

0,048

0,24

0,48

0,73

0,97

1,94

2,91

3,88

5,81

9,69

750

0,045

0,23

0,45

0,68

0,91

1,81

2,72

3,62

5,43

9,05

775

0,042

0,21

0,42

0,64

0,85

1,70

2,54

3,39

5,09

8,48

800

0,040

0,20

0,40

0,60

0,80

1,59

2,39

3,18

4,77

7,96

850

0,035

0,18

0,35

0,53

0,70

1,41

2,11

2,82

4,23

7,05

900

0,031

0,16

0,31

0,47

0,63

1,26

1,89

2,52

3,77

6,29

950

0,028

0,14

0,28

0,42

0,56

1,13

1,69

2,26

3,39

5,64

1000

0,025

0,13

0,25

0,38

0,51

1,02

1,53

2,04

3,06

5,09

1500

0,011

0,06

0,11

0,17

0,23

0,45

0,68

0,91

1,36

2,26

2000

0,006

0,03

0,06

0,10

0,13

0,25

0,38

0,51

0,76

1,27

3000

0,003

0,01

0,03

0,04

0,06

0,11

0,17

0,23

0,34

0,57

0,1

0,5

1

1,5

2

4

6

8

12

20

Power in kW
Tab. B.2:

Power density in MW/cm² with NIR high div measuring tip

Revision 08 EN - 08/2023

81

35,0(6B.3

FocusMonitor FM+

Limits for measuring operation with Diode measuring tip

Table element

White

Green

Yellow

OrangeRed

Speed in min

1875

3750

7500

7500 and inert gas purging

Risk of destruction!

Focus diameter in µm

-1

70

5,20

25,98

51,97

77,95

103,94

207,88311,81

415,75

623,631039,38

80

3,98

19,89

39,79

59,68

79,58

159,15

238,73

318,31

477,46

795,77

90

3,14

15,72

31,44

47,16

62,88

125,75

188,63

251,50377,26

628,76

100

2,55

12,73

25,46

38,20

50,93

101,86

152,79203,72

305,58509,30

125

1,63

8,15

16,30

24,45

32,59

65,19

97,78

130,38

195,57

325,95

150

1,13

5,66

11,32

16,98

22,64

45,27

67,91

90,54

135,81

226,35

175

0,83

4,16

8,32

12,47

16,63

33,26

49,89

66,52

99,78

166,30

200

0,64

3,18

6,37

9,55

12,73

25,46

38,20

50,93

76,39

127,32

225

0,50

2,52

5,03

7,55

10,06

20,12

30,18

40,24

60,36

100,60

250

0,41

2,04

4,07

6,11

8,15

16,30

24,45

32,59

48,89

81,49

275

0,34

1,68

3,37

5,05

6,73

13,47

20,20

26,94

40,41

67,34

300

0,28

1,41

2,83

4,24

5,66

11,32

16,98

22,64

33,95

56,59

325

0,24

1,21

2,41

3,62

4,82

9,64

14,47

19,29

28,93

48,22

350

0,21

1,04

2,08

3,12

4,16

8,32

12,47

16,63

24,95

41,58

375

0,18

0,91

1,81

2,72

3,62

7,24

10,86

14,49

21,73

36,22

400

0,16

0,80

1,59

2,39

3,18

6,37

9,55

12,73

19,10

31,83

425

0,14

0,70

1,41

2,11

2,82

5,64

8,46

11,28

16,92

28,20

450

0,13

0,63

1,26

1,89

2,52

5,03

7,55

10,06

15,09

25,15

475

0,11

0,56

1,13

1,69

2,26

4,51

6,77

9,03

13,54

22,57

500

0,10

0,51

1,02

1,53

2,04

4,07

6,11

8,15

12,22

20,37

525

0,09

0,46

0,92

1,39

1,85

3,70

5,54

7,39

11,09

18,48

550

0,08

0,42

0,84

1,26

1,68

3,37

5,05

6,73

10,10

16,84

575

0,08

0,39

0,77

1,16

1,54

3,08

4,62

6,16

9,24

15,40

600

0,07

0,35

0,71

1,06

1,41

2,83

4,24

5,66

8,49

14,15

625

0,07

0,33

0,65

0,98

1,30

2,61

3,91

5,22

7,82

13,04

650

0,06

0,30

0,60

0,90

1,21

2,41

3,62

4,82

7,23

12,05

675

0,06

0,28

0,56

0,84

1,12

2,24

3,35

4,47

6,71

11,18

700

0,052

0,26

0,52

0,78

1,04

2,08

3,12

4,16

6,24

10,39

725

0,048

0,24

0,48

0,73

0,97

1,94

2,91

3,88

5,81

9,69

750

0,045

0,23

0,45

0,68

0,91

1,81

2,72

3,62

5,43

9,05

775

0,042

0,21

0,42

0,64

0,85

1,70

2,54

3,39

5,09

8,48

800

0,040

0,20

0,40

0,60

0,80

1,59

2,39

3,18

4,77

7,96

850

0,035

0,18

0,35

0,53

0,70

1,41

2,11

2,82

4,23

7,05

900

0,031

0,16

0,31

0,47

0,63

1,26

1,89

2,52

3,77

6,29

950

0,028

0,14

0,28

0,42

0,56

1,13

1,69

2,26

3,39

5,64

1000

0,025

0,13

0,25

0,38

0,51

1,02

1,53

2,04

3,06

5,09

1500

0,011

0,06

0,11

0,17

0,23

0,45

0,68

0,91

1,36

2,26

2000

0,006

0,03

0,06

0,10

0,13

0,25

0,38

0,51

0,76

1,27

3000

0,003

0,01

0,03

0,04

0,06

0,11

0,17

0,23

0,34

0,57

0,1

0,5

1

1,5

2

4

6

8

12

20

Power in kW
Tab. B.3:

82

Power density in MW/cm² with Diode measuring tip

Revision 08 EN - 08/2023