OUR STRENGTHS
IN-HOUSE TECHNOLOGY &APPLICATION CENTER

PROFESSIONAL SIMULATION SUPPORTWe offer professional simulation technology to ensure bestprocess quality with regards to plasma, heat and cooling.
Furthermore, our simulation tools help demonstrate, develop
and improve layer properties and define or optimize processes,
details and the performance of our systems.

ĵ Sample coatings of customer applications
ĵ Development of customized layer stacks
ĵ Product & process verification and optimization
ĵ Testing of new technologies and components

GLOBAL PROJECT EXPERIENCECOMPREHENSIVE SERVICE PORTFOLIOVON ARDENNE equipment is used in over 50 countries.

ĵ VON ARDENNE services hubs around the world
ĵ On-site service (on request)

We have established an installed base of hundredsof coating systems worldwide, ranging from small tools
to equipment for large-area coating applications forseveral markets.

ĵ Remote access from our technology department (if required)ĵ Regular technical and technological trainings offeredĵ Spare & wear part warehouse close to customers
ĵ Lifecycle extension of wear parts

CLOSE PARTNERSHIPUPGRADES & RETROFITSVON ARDENNE entertains a close network of partners foreven more profound R&D work and to identify futuretechnologies. It consists of:

As soon as your business is growing, your VON ARDENNE
equipment will grow accordingly - thanks to its modular design
and the upgrades we provide. We will also supply you with thenecessary technology upgrades if you decide to change yourapplications.

ĵ Fraunhofer Institutes such as IPMS, FEP, IST and ISE
ĵ Institutes of the Helmholtz Association (Jülich, Berlin)
ĵ Universities (Kiel, Dresden, Sheffield)

Furthermore, when your equipment is ageing, we will retrofit
your systems with new components, no matter if they are
VON ARDENNE or third-party machines.

ĵ Companies such as FAP GmbH, scia Systems GmbHPRODUCTINDEXCOMPONENTS
www.vonardenne.biz

WHO WE ARE & WHAT WE DO
VON ARDENNE develops and manufactures industrial equipment for vacuum
coatings on materials such as glass, wafers, metal strip and polymer films. These
coatings give the surfaces new functional properties and can be between one
nanometer and a few micrometers thin, depending on the application.

We supply our customers with technologically sophisticated vacuum
coating systems, extensive expertise and global service. The keycomponents are developed and manufactured by VON ARDENNE itself.
Systems and components made by VON ARDENNE make a valuable
contribution to protecting the environment. They are vital for
manufacturing products which help to use less energy or to generateenergy from renewable resources.

Our customers use these materials to make high-quality products such asarchitectural glass, displays for smartphones and touchscreens, solar modules andheat protection window film for automotive glass.

SALES
CONTACTSSERVICECONTACTSWORLDWIDE SALES AND SERVICEVON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANY
Sales: +49 (0) 351 2637 189 I sales@vonardenne.biz
Service: +49 (0) 351 2637 9400 I support@vonardenne.biz
VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I
VON ARDENNE Malaysia Sdn. Bhd. I+60 4408 0080 I

VON ARDENNE Japan Co., Ltd. I Tokyo office I+81 3 6435 1700 I

VON ARDENNE North America, Inc. I Ohio office I
VON ARDENNE Vietnam Co., Ltd. I+86 21 6173 0210 I+86 21 6173 0200 I sales-vave@vonardenne.biz; support-vave@vonardenne.biz+60 4403 7363 I sales-vama@vonardenne.biz; support-vama@vonardenne.biz+81 3 6435 1699 I sales-vajp@vonardenne.biz; support-vajp@vonardenne.biz+1 419 386 2789 I+1 419 873 6661 I sales-vana@vonardenne.biz; support-vana@vonardenne.biz+84 966 29 29 50 I sales-vavn@vonardenne.biz; support-vavn@vonardenne.biz

Pictures: VON ARDENNE Corporate Archive, VON ARDENNE Family Archive, shutterstock.com. © All rights reserved.

ENGLISH 08/2022

ELECTRON BEAM SYSTEMSPRODUCTTOPICS

ELECTRON BEAM SYSTEMSELECTRON BEAM GUNS I VA BCOSELECTRON BEAM GUNSVA BCOS Beam Control System

VON ARDENNE develops and manufactures electron beam systems
which are used for melting, refining, evaporation or heat treatment.

The beam guidance system is an electronic unit for controlling andmonitoring the electron beam of an electron beam gun by means ofelectromagnetic lenses and deflection coils.

The first electron beam gun was developed in 1959 at the Manfredvon Ardenne Research Institute. Our 60 years of experience arereflected in over 400 electron beam systems installed worldwide.

It consists of an industrial PC, a beam guidance base unit, a control
console and associated beam guidance software.

Our current EH150V, EH300V and EH800V electron beamguns are the most powerful in the world.

VA BCOS is MS Windows-based beam guidance software and performs
the following tasks:

We work on the continuous improvement of our key
components at our development center for electron
beam technologies. This is where we produce andtest all our high-quality electron beam guns.

ĵ Control of max. 8 electron beam guns
ĵ Generation of deflection figures to realize the electron beam distribution required at the process location
ĵ Generation of deflection sequences by means of the pre-installed
figure library, or based on coordinate lists generated with customary
software (e.g. MS Excel)
ĵ Management of technological process sequences (recipes)
ĵ Continuous beam deflection with simultaneous adaptation of form,
position, size and dwell time of the individual deflection figures during
operation, by means of operator control actions or a connection to
the automatic process control
Electron beam gun EH150V

Electron beam gun EH300V

Electron beam gun EH800V

ĵ Adaptation of the electron beam focusing within the electron beamgun and at the process location, including monitoring of the focusingstate by evaluating the temperature increase of the cooling water inthe electron beam gun

 FEATURES

 BENEFITSĵ Display and data recording of all process-relevant operating parameters such as power, power distribution and acceleration voltage

ĵ Power control by means of a patented VARIOCATHODEĵ Easy handling and maintenanceĵ Data transfer

ĵ High degree of pressure decouplingĵ High reliability

ĵ Interface for external access via internet connection

ĵ Internal valve to separate EB gun from process chamber

ĵ High acceleration voltage up to 60 kV

ĵ Quick and simple changing of cathode plugĵ Magnetically self-focusing beam

 TECHNICAL DATA
Subject to change without notice due to technical improvement.

EH150V EH300V EH800V
Maximum beam power

150 kW

300 kW

800 kW

Beam power control range
ĵ Power control by VARIOCATHODE(space charge limited mode)≈ 20 % to ≈ 20 % to ≈ 20 % to100 %100 %100 %0 % to0 % to0 % to
ĵ Power control by bombardment≈ 20 %≈ 20 %≈ 20 %power (temperature limited mode)
Max. acceleration voltage
Average life time of cathodes atmaximum beam power

35 kV

45 kV

60 kV

100 h
to 200 h

100 h
to 200 h

200 h
to 300 h

EH150V EH300V EH800V
Recommended size of vacuum pumps
ĵ Turbomolecular pump at cathodechamber

300 l/s

300 l/s

500 l/sĵ Turbomolecular pump at intermediate chamber

300 l/s

300 l/s

1 600 l/s

20 m³/h

20 m³/h

35 m³/hPump down time< 10 min< 10 min< 15 min

X-ray leakage< 1 µSv/h < 1 µSv/h < 1 µSv/h
0.5 m3/h

0.5 m3/h

2.2 m3/h

 FEATURES

 BENEFITS

0.5 MPaĵ Freely programmable time & power based beam scanning sequencesĵ Reliable process control for certified productsĵ Roughing pump forboth turbomolecular pumps

Magnetic lenses

22

2Total cooling water consumption

Number of X/Y coils

11

1

Compressed air supply (dry)

0.5 MPa

0.5 MPa

Maximum deflection angle

Height (with closed lid)

900 mm1010 mm 1400 mm

ĵ Comprehensive scanning figure libraryĵ Flexible adaptation to VON ARDENNE or customer machines

1 kHz system (coil/amplifier)10 kHz system
20 kHz system

Maximum radius(without vacuum pumps)

350 mm

350 mm400 mm

ĵ Signal processor-based calculation of all dynamic functions
ĵ Tracks: automatically moving scanning figures

ĵ Controlled continuous beam scan despite digital figure coordinate
definition

Weight150 kg

190 kg

550 kgĵ Online geometrical and dynamic correction of scanning sequences

ĵ Open customer interface

Minimum spot diameter (at distance of 1 m, maximum beam power
and maximum acceleration voltage)

Connection flangeof the gun

DN 160ISO-F

DN 160ISO-F

DN 250ISO-F

ĵ Synchronization of scanning sequences of multiple EB guns

ĵ Easy and flexible operator interaction as well as automatic processcontrol

ĵ At process pressure of 5*10-2 Pa

Connection flanges for vacuum pumps:± 40º± 25º-

ĵ At process pressure of 5*10 Pa-3

Maximum process pressure± 40º± 25º-± 45º± 25º± 40º≈ 10 mm≈ 15 mm≈ 15 mm≈ 20 mm≈ 30 mm≈ 50 mm≈ 5 Pa

≈ 5 Pa≈ 2 Paĵ Cathode chamberĵ Intermediate chamber

ISO-F
DN 100
DN 100

DN 100
DN 100ĵ User permissions management
ĵ Latest software technology and architecture

DN 160
DN 250ĵ Integration of various process control modules –VA BCOR / VA PROCESSMASTER / customer controllers

ĵ Implementation on standard industrial hardware components