EQUIPMENTFOSA MX 300

PRODUCT
TOPICSPRODUCTINDEXCOMPONENTS
www.vonardenne.biz

WHO WE ARE & WHAT WE DO
VON ARDENNE develops and manufactures industrial equipment for vacuum
coatings on materials such as glass, wafers, metal strip and polymer ﬁlms. These
coatings give the surfaces new functional properties and can be between one
nanometer and a few micrometers thin, depending on the application.

We supply our customers with technologically sophisticated vacuum coatingsystems, extensive expertise and global service. The key components are developed
and manufactured by VON ARDENNE itself.

Our customers use these materials to make high-quality products such asarchitectural glass, displays for smartphones and touchscreens, solar modules andheat protection window ﬁlm for automotive glass.

SALES
CONTACTS

Systems and components made by VON ARDENNE make a valuable contribution toprotecting the environment. They are vital for manufacturing products which help touse less energy or to generate energy from renewable resources.

SERVICE
CONTACTSVON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANY
Sales: +49 (0) 351 2637 189 I sales@vonardenne.biz
Service: +49 (0) 351 2637 9400 I support@vonardenne.biz
VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I
VON ARDENNE Malaysia Sdn. Bhd. I+60 4408 0080 I

VON ARDENNE Japan Co., Ltd. I Tokyo office I+86 21 6173 0210 I+81 3 6435 1700 I

VON ARDENNE North America, Inc. I Ohio office I+86 21 6173 0200 I sales-vave@vonardenne.biz; support-vave@vonardenne.biz+60 4403 7363 I sales-vama@vonardenne.biz; support-vama@vonardenne.biz+81 3 6435 1699 I sales-vajp@vonardenne.biz; support-vajp@vonardenne.biz+1 419 386 2789 I+1 419 873 6661 I sales-vana@vonardenne.biz; support-vana@vonardenne.biz

VON ARDENNE Vietnam Co., Ltd. I+60 124 23 7353 I sales-vavn@vonardenne.biz; support-vavn@vonardenne.biz
Pictures: VON ARDENNE Corporate Archive, VON ARDENNE Family Archive, shutterstock.com. © All rights reserved.

ENGLISH 07/2020

FOSA MXWORLDWIDE SALES AND SERVICEVACUUM WEB COATING SYSTEMFOSA MXFOSA MX VACUUM WEB COATING SYSTEM

STATE-OF-THE-ART MODULAR SPUTTER SYSTEMFOR FLEXIBLE ELECTRONICS & WINDOW FILMSVON ARDENNE provides tailored web coating solutions for today’s
most ambitious thin-film applications on polymer films comprisingequipment, key technology components and application technology.
The FOSA MX is a web coating system with a modular design. It is
ideal for high-volume production and can be configured with up to
three coating drums. Furthermore, it offers an advanced maintenanceconcept.
As a leading developer and manufacturer of industrial-proven vacuum
deposition equipment for large-area coatings, VON ARDENNE has
incorporated its broad knowledge and expertise in PVD technologiesand web handling into this platform.
— Advanced complex layer stacks (AR, window films)— High-throughput sensor applications (ITO & Cu coating )KEY FEATURES— High-volume production tool
— Multi-chamber design

ADVANCED SPUTTER PROCESS TECHNOLOGY— Load locks with gate valves for short campaign times— Individually pumped process sections

PROCOS 2

IN-SITU

DUAL ANODE SPUTTERINGPROCESS CONTROLINLINEMEASUREMENTDAS - Dual Anode Sputtering,
dual rotatable magnetron available

Reactive process control(impedance or PEM control) available— Superior maintenance concept

PROCESS CONTROL SYSTEM— High-utilization, large-scale rotatable magnetron technology

SUBSTRATESPET, PE, PI, TAC ...

300 mmto1600 mm

23 μm
to250 μm

WEB WIDTHTHICKNESS

PROCESS BOX DESIGN— Up to 6 particle-optimized process compartments arranged aroundone coating drum
— effective maintenance: full separation of sputter shield, target andwinding section

SPUTTER RATE EXAMPLES at dual rotatable magnetron— AC powered pair of rotatable cathodes,
VAprocos controlled reactive process[120 nm*m/min, SiO2 – ddr]
— DC powered pair of rotatable cathodes[160 nm*m/min, ITO – ddr]
— Pair of rotatable cathode with bipolar power supply,VAprocos controlled[80 nm*m/min, Nb2O5 – ddr]

VACUUM

PRE-TREATMENT— Process chamber made of mild or stainless steel— IR heater— Active gas separation between adjacent process compartments:
standard 1:100, max. 1:300— Plasma discharge— Option: in separate intermediate chamber C2COATING— Up to 12 rotatable or planar targets per coating drum
— AC / DC or bipolar power— Up to 3 process gases per magnetron— Single layer uniformity: up to +/- 1.5 %INLINE PROCESS QUALITY CONTROL— Cryo trap at unwinder, pre-treatment and in each processcompartment

MEASURING SYSTEM

PROCESSDATABASE

WSC – WINDING
SYSTEM CAMERA— Optical transmission and reflection
measurement (wavelength range onrequest), 3 measurement traces (max. 5)
Single-drum configuration— Eddy current sheet resistance, measuring
range on request, 3 measurement traces(max. 5)
— RGA connector at each processcompartment— State-of-the-art process database forprocess data and retrospective trend
analysis

CONFIGURATION EXAMPLE— Extensive QA/QC capabilities

Subject to change without notice due to technical improvement.

— Winding system observation with cameras

FOSA MX 1600 D10
Dry Index matching ITO

Cu Metal MeshPETPETADVANCED WINDING SYSTEM

Substrate material— Outer roll diameter: max. 820 mm

Good coating width

1.56 m1.56 m— Coating Direction:

Web thickness

125 µm

125 µm— Speed range: 0.2 m/min to 20 m/min, Accuracy: ± 0.5 %Coating speed

10 m/min

2.4 m/min— Options: Web edge control + teetering + Particle cleaning rollers

Annual production

2.7 M m2

1.6 M m2

FACILITY REQUIREMENTSC2C4-1

C4-2— FOSA MX is cleanroom compatible

PUMP-DOWN TIMES— Service tools for substrate coil, target exchange and compartment
maintenance included— Winding chamber [< 1 x 10 -3 mbar] approx. 30 min— Heat exchanger (optional, provided by VON ARDENNE)— Process compartment [< 3 x 10 -5 mbar] approx. 60 min

FOSA MX 1600 D10: Length: 21 m

Width: 14 m

Height: 3.6 m— Ultimate base pressure [8 x 10 -7 mbar]

FOSA MX 1600 S5:Length: 21 m

Width: 10 m

Height: 3.6 m

UNWINDER
C1

REWINDERC7EQUIPMENTFOSA MX 300

PRODUCT
TOPICSPRODUCTINDEXCOMPONENTS
www.vonardenne.biz

WHO WE ARE & WHAT WE DO
VON ARDENNE develops and manufactures industrial equipment for vacuum
coatings on materials such as glass, wafers, metal strip and polymer ﬁlms. These
coatings give the surfaces new functional properties and can be between one
nanometer and a few micrometers thin, depending on the application.

We supply our customers with technologically sophisticated vacuum coatingsystems, extensive expertise and global service. The key components are developed
and manufactured by VON ARDENNE itself.

Our customers use these materials to make high-quality products such asarchitectural glass, displays for smartphones and touchscreens, solar modules andheat protection window ﬁlm for automotive glass.

SALES
CONTACTS

Systems and components made by VON ARDENNE make a valuable contribution toprotecting the environment. They are vital for manufacturing products which help touse less energy or to generate energy from renewable resources.

SERVICE
CONTACTSVON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I 01328 DRESDEN I GERMANY
Sales: +49 (0) 351 2637 189 I sales@vonardenne.biz
Service: +49 (0) 351 2637 9400 I support@vonardenne.biz
VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I
VON ARDENNE Malaysia Sdn. Bhd. I+60 4408 0080 I

VON ARDENNE Japan Co., Ltd. I Tokyo office I+86 21 6173 0210 I+81 3 6435 1700 I

VON ARDENNE North America, Inc. I Ohio office I+86 21 6173 0200 I sales-vave@vonardenne.biz; support-vave@vonardenne.biz+60 4403 7363 I sales-vama@vonardenne.biz; support-vama@vonardenne.biz+81 3 6435 1699 I sales-vajp@vonardenne.biz; support-vajp@vonardenne.biz+1 419 386 2789 I+1 419 873 6661 I sales-vana@vonardenne.biz; support-vana@vonardenne.biz

VON ARDENNE Vietnam Co., Ltd. I+60 124 23 7353 I sales-vavn@vonardenne.biz; support-vavn@vonardenne.biz
Pictures: VON ARDENNE Corporate Archive, VON ARDENNE Family Archive, shutterstock.com. © All rights reserved.

ENGLISH 07/2020

FOSA MXWORLDWIDE SALES AND SERVICEVACUUM WEB COATING SYSTEMFOSA MX