Gas flow sensors
Experts in flow sensing

High performancegas flow measurement
With our long history of designing mass flow solutions for medical technology and industrial automation, we are your ideal
partner to support you in the development of new products. Sensirion offers gas flow sensors for diverse applications
thanks to these key characteristics:• Excellent repeatability• Fast response time
• High sensitivity at low flows• Wide dynamic range• Reliability and robustness• Bidirectionality
For more information, please visit: www.sensirion.com/gasflow

Unique measurement principle

HeaterSensirion’s gas flow sensors ensure fast, accurate andeconomical measurement of gas flow over a wide dynamicrange. At the heart of every Sensirion flow sensor is a

Gas flow

MEMS-based calorimetric microsensor, which measures
the gas flow using the thermal measurement principle(see illustration). The sensor element is integrated withthe signal conditioning electronics on a single chip. This

Temperature sensors

unique technological approach – provided by innovative

1 mmCMOSens® Technology – results in excellent performanceand robustness at a very attractive cost. That is why
today's leading manufacturers rely on Sensirion’s highly
sensitive flow meters.

Evaluation kits for fast andeasy testing
The SEK-Flow Sensing evaluation kits are test sets for
Sensirion’s gas flow sensors. Precise test measurements
can be made quickly and inexpensively with these readyto-use kits. The evaluation kit consists of an adapter cablethat allows you to connect the sensor directly to yourcomputer. In some cases, our Sensirion sensor bridge
multiplexer completes the kit. The viewer software can be
downloaded from our website. The software allows measurements at various resolutions and displays mass flowin standard liters per minute (slm). Data can be logged andexported to Excel.

SiliconHigh performancegas flow measurement

Products

With our long history of designing mass flow solutions for medical technology and industrial automation, we are your ideal
partner to support you in the development of new products. Sensirion offers gas flow sensors for diverse applications
thanks to these key characteristics:• Excellent repeatability• Fast response time

SFM3003

SFM3019/SFM3020

SFM3100

SFM3119

SFM3200 / SFM3200-AW• Versatile digital flow meter• Digital and analog versions for high-volume• Versatile analog flow meter• Versatile digital flow meter• SFM3200 for inspiratory use in respiratory• Additional temperature sensor• Compact form factor• Small form factor• Low pressure drop

applications• Next generation flow meter (wider flow range• High sensitivity at low flows

and improved specifications)• Wide dynamic range• Low pressure drop

• For high-volume and cost-sensitive applications

applications• SFM3200-AW for expiratory use in respiratory
applications• Suitable for medical ventilation• Reliability and robustness• Extremely good low-flow performance• Bidirectionality
For more information, please visit: www.sensirion.com/gasflow

Unique measurement principle

HeaterSensirion’s gas flow sensors ensure fast, accurate andSFM3400-AW/ SFM3400-D

SFM4200

SFM4300

SFM5500 / SFM5400 / SFM5300• Fully calibrated proximal flow sensor for• Neonatal proximal flow meter, fully calibrated• Versatile digital flow meter• Compact size

• Versatile high-precision flow meters• Small dead space and low pressure drop

• Pressure stable up to 8 bar• High precision and sen sitivity (esp. for low• Metal body, pressure stable up to 10 bar• Single-use and autoclavable/washable version• Downmount connector for manifold integration

respiratory applications

economical measurement of gas flow over a wide dynamicrange. At the heart of every Sensirion flow sensor is a

SFM3300-AW/ SFM3300-D

Gas flow• Small dead space and low pressure drop

MEMS-based calorimetric microsensor, which measures• Wide range of gas calibrations and flow ranges• Flow range: 0 to 20 slm or 50 slm• Single-use and autoclavable/washable version

the gas flow using the thermal measurement principle

flow rates)(see illustration). The sensor element is integrated withthe signal conditioning electronics on a single chip. ThisTemperature sensors

unique technological approach – provided by innovative

1 mm

CMOSens® Technology – results in excellent performanceand robustness at a very attractive cost. That is why
today's leading manufacturers rely on Sensirion’s highly
sensitive flow meters.

SFM3003

SFM3019/SFM3020

SFM3100

SFM3119

SFM3200/SFM3200-AW

SFM3300-AW /SFM3300-D

SFM3400-AW/SFM3400-D

SFM4200

SFM4300

SFM5500/SFM5400/
SFM5300

Autoclavable/Washable

NoNoNoNo

Yes (SFM3200-AW)
No (SFM3200)

Yes (SFM3300-AW)
No (SFM3300-D)

Yes (SFM3400-AW)
No (SFM3400-D)

NoNo

No

Flow range¹–30 to 300 slm(–150 to 300 slm available)

SFM3019: –10 to 240 slm
SFM3020: –10 to 160 slm–24 to 240 slm–10 to 240 slm–100 to 250 slm–250 to 250 slm–33 to 33 slm

0 to 160 slm

0 to 20 slm or 0 to 50 slm

Various flow ranges 0 to50 sccm to 0 to 100 slm

Accuracy, offset

0.05 slm

0.05 slm

0.02 slm

0.02 slm

0.05 slm

0.1 slm

0.02 slm

0.04 slm

0.005 slm

0.1% FS

3% (< 0 slm)
2% (> 0 slm)

2.5% (< 60 slm)
3.5% (< 150 slm)
4.5% (< 240 slm)

2% (< 100 slm)
3% (< 160 slm)
5% (rest)

2% (–40 to 80 slm)
3% (–60 to 100 slm)
7% (–100 to 250 slm)

3% (–100 to 100 slm)
7% (–250 to 250 slm)

3%

2.5% (< 80 slm)
5% (> 80 slm)

2% (O₂, air)
3% (CO₂)

1%

SiliconAccuracy, % of MV

Evaluation kits for fast andeasy testing
The SEK-Flow Sensing evaluation kits are test sets for
Sensirion’s gas flow sensors. Precise test measurements
can be made quickly and inexpensively with these readyto-use kits. The evaluation kit consists of an adapter cablethat allows you to connect the sensor directly to yourcomputer. In some cases, our Sensirion sensor bridge
multiplexer completes the kit. The viewer software can bedownloaded from our website. The software allows measurements at various resolutions and displays mass flowin standard liters per minute (slm). Data can be logged andexported to Excel.

2% (< 200 slm)
2.5% (< 300 slm)

Repeatability/Noise
Low flow range++++++++++++++++++++++++High flow range

++

++

++

+

++

+

na2++

na2++++++

Pressure drop

< 5 mbar @ 200 slm< 5 mbar @ 200 slm< 16 mbar @ 200 slm< 16 mbar @ 200 slm< 1 mbar @ 60 slm< 1.8 mbar @ 60 slm< 1 mbar @ 5 slm< 20 mbar @ 60 slm< 25 mbar @ 20 slm

Depending on flow range

Fluidic interface

Medical cone (22 mm),O-ringMedical cone (22 mm),O-ringO-ringO-ringMedical cone (22 mm),O-ringMedical cone (22 mm)

Medical cone (15 mm)

DownmountDownmount, Legris,
O-rings

Downmount, Swagelock,
VCR, VCO, Legris, UNF
threadInterface

Digital, I2C

Digital, I2C (SFM3019),­analog (SFM3020)

AnalogDigital, I2C

Digital, I2C

Digital, I2C

Digital, I2C

Digital, I2C

Digital, I2C

Digital (RS485, IO-Link,DeviceNet), analog

Sampling time

0.5 ms

SFM3019: 0.5 ms–0.5 ms

0.5 ms

0.5 ms

0.5 ms

0.5 ms

0.5 ms

1 ms

Calibrated forO₂, air and mixturesof air/O₂, heliox in option

Air, O₂ (SFM3019:and mixtures of air/O₂)

Air, N₂, formulafor O₂

Air, O₂ and mixturesof air/O₂

Air, N₂, formula for O₂

Air, N₂, formula for O₂

Air, N₂, formula for O₂

Air, N₂ formula for O₂

Air, O₂, N₂O, O₂ andmixtures of O₂/air, O₂ /N₂O,O₂/CO₂

Air, N₂, O₂, Ar, CO₂, He, H₂,
other gases on request

Power supply

2.7 V–5.5 V

2.7 V–5.5 V

5V

2.7 V–5.5 V

5V

5V

5V5V

3.0 V–5.5 V

14 V–26 V

Max. working pressure

1.3 bar

1.3 bar

1.1 bar

1.3 bar1.07 bar

1.1 bar

1.1 bar

8 bar

7 bar

10 bar

¹ slm = standard liters per minute2 na = not applicableWhat we offer

Expertfirst contact

Design-in support

Fast and easy
product evaluation

Lifetime support

Customized solutions

Expert first contact

Lifetime support• Specialized and experienced sales force• Reliable and flexible production• Worldwide presence with a global distribution• Sustainable product innovation roadmap to meet­network

your future needs

Fast and easy product evaluation

Customized solutions• Comprehensive product portfolio• Various flow rates• Easy-to-use evaluation kits for effortless measure-• A variety of gases (multigas option)

ment during sensor evaluation• Technical documents – data sheets, sample codes,
application notes

Design-in support• Assistance with integrating Sensirion's sensors into
your application• Proven best practices to ensure that your production
concept accommodates the requirements of our gas
flow sensors• Special form factor requirements

Technology at heart,
future in mind.

www.sensirion.com