11th International Symposiumon Laser Precision Microfabrication

June 7-10, 2010

in Stuttgart, Germany1

We appreciate Sponsorship to LPM2010

SPECIAL THANKS TO

MEGAOPTO CO., LTD.
www.megaopto.co.jp/

Dausinger+Giesen GmbH, Germany
www.dausinger-giesen.de/

SPECIAL THANKS TO COFFEE BREAK SPONSOROPHIR JAPAN LTD.
www.ophiropt.com

2

11th International Symposiumon Laser Precision Microfabrication

June 7-10, 2010

in Stuttgart, Germany

Table of contents

Welcome to LPM 2010 ....................................... 5
Committees ......................................................... 6
Area Map ............................................................. 8
Floor Plan ............................................................ 9
LPM Topics / Joint Sessions ............................. 11
Invited Speakers ................................................. 12
LPM 2010 Session – Overview ......................... 14
Short Presentation of Posters ........................... 16
Time Schedule .................................................... 20
Session List – Alphabetical Order .................... 32
Abstracts .............................................................. 44
Index ....................................................................183

Program is subject to alteration after printing.
Actual program see www.lpm2010.org

3

4

Welcome to LPM 2010
It’s a pleasure to welcome you to 11th International Symposium on
Laser Precision Microfabrication (LPM 2010) held in Stuttgart,
Germany. LPM has been initiated at the 2000 Symposium in Omiya,
Japan and then has been annually organized in Singapore, Osaka,
Munich, Nara, Williamsburg, Kyoto, Vienna, Quebec, and Kobe,
and now returns to Germany after an interval of seven years.
The last ten LPM Symposia have won reputation and popularity as
one of the most important international events in the field of laser
micro and nano processing in the world. LPM continues the
tradition inherited from past Symposia and focuses on science andtechnology of advanced laser processing for precision micro andnano fabrication. The aim of LPM2010 is to provide a forum fordiscussion of fundamental aspects of laser-matter interaction, thestate-of-the-art of laser materials processing, and topics for the
next generation by the collaboration among scientists, end users
and laser manufactures.
The technical program for a 4-day event includes 18 invited talks,
about 140 oral presentations and about 50 posters. In addition to
the technical sessions, International Trade Fair for System Solutions in Laser Material Processing (LASYS) is collocated. I do hopethat LPM 2010 will stimulate fruitful discussions and useful exchanges and that you will enjoy your stay in Stuttgart, well know as
one of the center in the field of manufacturing with lasers as well as
car capital.
Dr. Koji Sugioka

RIKEN – Advanced Science Institute, General Chair of LPM 2010

Oragnizers:

co-located with:JLPS
Japan Laser Processing Society

511th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

COMMITTEEs
LPM 2010 ORGANIZING COMMITTEE
General Chair:
Koji Sugioka		

RIKEN, Japan

Co-Chairs:
Friedrich Dausinger

Dausinger+Giesen GmbH, Germany

Hiroyuki Niino		

AIST, Japan

Alberto Piqué		

NRL, USA

Kazuyoshi Itoh		

Osaka University, Japan

Seiji Katayama		

Osaka University, Japan

Arnold Gillner		Fraunhofer ILT, Germany

Honorary Chair:		
Isamu Miyamoto		Osaka University, JapanLPM2010 INTERNATIONAL ADVISORY COMMITTEE
Members:6

Alan Arai		IMRA America, Inc., USA

Chung-Wei Cheng

ITRI, Taiwan

Burkhard Fechner

Coherent, Germany

Costas Fotakis		

I.E.S.L.-Institute of Electronic Structure and Laser,

				

F.O.R.T.H.-Foundation for Research and Technology-Hellas, Greece

Kenshi Fukumitsu		

Hamamatsu Photonics K.K., Japan

Costas Grigoropoulos

University of California Berkeley, USA

Dennis R. Hall		

Heriot-Watt University, UK

Teruyoshi Kadoya

TRUMPF Corporation, Japan

Kazuo Kamada		

Panasonic Electric Works, Ltd., Japan

Vitali Konov		

GPI- General Physics Institute, Russia

Sylvain Lazare		

Université de Bordeaux 1, France

Hiroshi Masuhara		

Nara Institute of Science and Technology, Japan

Hiroaki Misawa		

Hokkaido University, Japan

Sumio Nakahara		

Kansai University, Japan

Tatsuo Okada		

Kyushu University, Japan

Rajesh S. Patel		Spectra Physics, USA

Reinhart Poprawe

Fraunhofer ILT, Germany

Shozui Takeno		

Mitsubishi Electric Corporation, JapanCOMMITTEEs
LPM2010 PROGRAM COMMITTEE
Chairperson:
Friedrich Dausinger

Dausinger+Giesen GmbH, Germany

Members:
Craig B. Arnold		Princeton University, USA

Ya Cheng		

Shanghai Institute of Optics and Fine Mechanics, CAS, China

Sung-Hak Cho		

Korea Institute of Machinery & Materials, South Korea

Jan J. Dubowski		Université de Sherbrooke, Canada

Henry Helvajian		

The Aerospace Corporation, USA

Peter R. Herman		

University of Toronto, Canada

Minghui Hong		Data Storage Institute, Singapore

Juergen Ihlemann

Laser Laboratory Goettingen, Germany

Yoshiro Ito		

Nagaoka University of Technology, Japan

Takahisa Jitsuno		

Osaka University, Japan

Thomas Lippert		

Paul Scherrer Institut, Switzerland

Yong-Feng Lu		

University of Nebraska, USA

Holger Lubatschowski

LZH, Germany

Tetsuya Makimura

Tsukuba University, Japan

Shoji Maruo		Yokohama National University,Japan

Naohisa Matsushita

Fujitsu Ltd., Japan

Michel Meunier		

École Polytechnique de Montréal, Canada

Yoshiki Nakata		

Osaka University, Japan

Etsuji Ohmura		Osaka University, Japan

Masayuki Okoshi		

National Defense Academy, Japan

Toshihiko Ooie		

AIST, Japan

Andreas Ostendorf

Ruhr-University Bochum, Germany

Juergen Reif		Brandenburg University of Technology, Cottbus, Germany

Michael Schmidt		

blz, Bayerisches Laserzenturm, Germany

Pere Serra		

Universitat de Barcelona, Spain

Javier Solis		

Instituto de Optica, CSIC, Spain

Jürgen Stampfl		

TU Wien, Austria

Razvan Stoian		

Université Jean Monnet, France

Stelios Tzortzakis		

F.O.R.T.H.-Foundation for Research and Technology-Hellas, Greece

Vadim Veiko		

St. Petersburg State University of Information Technologies, Russia

Bert Huis in ‚t Veld

University of Twente, The Netherlands

Kunihiko Washio		

Paradigm Laser Research Ltd., Japan

Wataru Watanabe

AIST-National Institute of Advanced Science and Technology, Japan

Sascha Weiler		

Trumpf, Germany

Xianfan Xu		

Purdue University, USA

711th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

ARea Map
Messe Stuttgart

aus
arkh
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Bos

ance
EntrastEr
ache
Tein den
a
Kask

t

e Os

arOsk pLap e
a
H ll

-Alle

nker

8

est

eW

-Alle

nker

Stuttgart

Sche

Park

Sche

ance
Entr est
W

aus

Roth

Connection
to rapid-transit
railway lines
Connection toGerman Railways

Stuttgart
AirportFLOOR Plan

9

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

FLOOR Plan

OG

EG

10

LPM TOPICS
1. Fundamental aspects (dynamic, 		

16. Packaging and mounting process		modeling,simulation, etc.)

17. Lithography (including EUV source and

2. Process monitoring and control

		application)

3. Nano technology

18. Manufacture of micro devices and systems

4. Direct write process (MAPLE-DW, LIFT, etc.)

19. Film deposition and synthesis of advanced

5. Ultra short pulse laser processing		materials (PLD, CVD, etc.)

6. VUV laser processing

20. Nano and micro particles

7. Surface treatment (texturing, cleaning,

21. Medical and biological applications

		annealing, modification, etc.)

22. Optics and systems for laser micro processing

8. Micro patterning and micro structuring

23. Laser devices

9. Micro machining

24. Industrial applications

10. 3-D micro and nano fabrication

25. Photochemistry

11. Drilling and cutting

26. Free electron laser material processing

12. Welding and bonding

27. High-power single-mode fiber lasers

13. Micro forming

28. Glass/ceramic processing

14. Wafer dicing

29. Others

15. Marking and trimming

Joint sessions
On overlapping topics joint sessions have been organized together with SLT. These sessions are open
for participants of both conferences.

Lasers for micro fabrication
This session co-organized with SLT gives an overview of recent progress and expected developmentsof laser sources for micro applications.

Industrial applications
In this session co-organized with SLT numerous application success stories show the importance of
micro fabrication for production of automobile, photovoltaic and electronic products.

1111th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Invited Speakers
Andrew J. Birnbaum

Naval Research Lab Materials Science And Technology - USA		“Laser Printed MEMS and Electronic Devices”

Heather Booth

Oerlikon Solar - Switzerland		“Laser processing in industrial solar module manufacturing”

Joachim JohnIMEC - Belgium		“Laser based processes in next generation solar cell production, chances		and challenges”

Vitaly Konov

General Physics Institute - Russia

		“Role of gas optical breakdown plasma in material ablation by short laser pulses”

Jochen Löffler

Energy Research Center Of The Netherlands		“Laser processing for advanced solar cells”

Yongfeng Lu

University of Nebraska - Lincoln - USA		“Controlled Growth of Carbon nanostructures in Laser-assisted Chemical		

Vapor Deposition”

Klaus Mann

Laser-Laboratorium Goettingen e.V. - Germany		“Laboratory-scale EUV sources for metrology and material interaction studies”

Isamu Miyamoto

Osaka University - Japan		“Laser applications in Japan during the first 50 years”

Minoru Obara

Keio University - Japan		“Nanoablation using 2D Gold and Dielectric Nanosphere Templates Excited		by Femtosecond Laser”

Roberto Osellame

Istituto Di Fotonica E Nanotecnologie (IFN) - CNR - Italy

		„Femtosecond laser micromachining enables optofluidic sensing in lab-on-a-chip”

Rajesh S. Patel

Newport Corp., Spectra-Physics Lasers Division - USA		“Laser - An Enabling Technology in the Photovoltaics Revolution”

Martin Richardson

University of Central Florida - USA		“Femtosecond laser waveguide writing for customized micro optical elements”

Michael Schmidt

University of Erlangen - Germany		“Laser-Bonding in high power electronics”

Godehard Schmitz

Robert Bosch GmbH - Germany		“Introduction of laser manufacturing into mass production”

12Marc Sentis

LP3 Laboratory - France		“Femtosecond laser applied to photovoltaic cell processing”

Hong-Bo Sun

Jilin University - China

		“3D Polymerization for Functional Devices”

Yasuyuki Tsuboi

Hokkaido University - Japan“Optical Trapping of Bio-molecules and Nanoparticles Based on		Resonance and Surface Plasmon”

Ernst Wintner

Vienna University Of Technology - Austria		“Laser Ignition of Internal Combustion Engines”

Luo Xiangang

State Key Lab of Micro-Fabrication and Technology - China

		“Meta-materials consisting of plasmonic nanostructures”

13

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

LPM 2010 SESSION CHART – OVERVIEW
Monday,Monday,June
7.6.2010
7, 2010TUESDAY, June 8, 2010

LOBBY

C4.1

C4.3

C5

Registration

3d
processing
1

Biologicalandmedicalapplications

Deposition
andsynthesis

8.00 – 10.00

9:20 – 10:50

9:20 – 11:10

9:20 – 10:40

COFFEE BReak
C5

C4.1

C4.3

C5

Plenary Session

3d
processing
2

Patterning 1

Fundamentals

10:10 – 12:30

11:30 – 13:00

11:30 – 12:50

11:30 – 12:40

Lunch Time
C4.1

C4.3

C5

C4.1

C4.3

C1.1

Micro
machining
1

VUV laser /directwrite

Ultra-shortpulse
processing
1

Components
andsystems

Patterning 2

13:50 – 16:10

13:40 – 16:00

13:40 – 15:50

14:00 – 16:10

14:00 – 16:00

Joint
session:Industrial
applications
1
14:00 – 16:10

COFFEE BReak
C4.1

C4.3

C5

C4.1

C4.3

C1.1

Micro
machining2

Directwrite

Ultra-shortpulse
processing
2

Processmonitoring

Patterning 3

16:30 – 18:10

16:30 – 18:10

16:20 – 18:00

16:30 – 18:30

16:30 – 18:10

Joint
session:Industrial
applications2

14

16:50 – 18:30

wednesday, June 9, 2010

thursday, June 10, 2010

C4.1

C4.3

C1.1

C4.1

C5

Ultra-shortpulse
processing
3

Weldingand bonding
1

Jointsession:Lasers for
micro

Short
presentationofposters

Installationofposters

9:20 – 11:20

9:20 – 10:40

8:35 – 11:40

9:20 – 11:10

9:20 – 11:20

COFFEE BReak
C1.1

C5

50 years
Laser

Postersession12:00 – 13:45

11:30 – 13:00

Lunch time
C4.1

C4.3

C4.1

C4.3

Nano
structures 1

Welding andbonding2

Photovoltaic
applications
1

Nano
structures 3

14:30 – 15:50

14:00 – 16:10

14:00 – 16:00

14:00 – 16:00

COFFEE BReak
C4.1

C4.3

C5

C4.1

C4.3

Nano
structures 2

Microdevices

Installationofposters

Photovoltaic
applications
2

Nano
structures 4

16:30 – 18:30

16:30 – 18:30

16:30 – 18:30

16:30 – 17:10

16:30 – 17:10

Transport to banquet

closing remarks

banquet15

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Short presentation of posters
June 10, 2010 – Location: C4.1
P 1: Synthesis of cyclohexanone capped gold
nanoparticles by nanosecond pulsed laser
ablation
Speaker: Nastaran Mansour
09:20 – 09:22
P 2: Dielectric and Metallic Particles for
Sub-Micron Laser Structuring
Speaker: Andreas Kolloch
09:22 – 09:24
P 3: Near-field two-photon absorption inphotoresists for nanopatterning
Speaker: Florin Jipa
09:24 – 09:26
P 4: Femtosecond laser shock peening of various
carbon steels

Speaker: Minghui Hong
09:38 – 09:40
P 11: Si Anti-Reflection Surface Design andEngineering by Laser Microfabrication
Speaker: Minghui Hong
09:40 – 09:42
P 12: Laser micro-lens array lithography for
functional structures fabricated on quartz
substrate for chromeless phase mask applications
Speaker: Huang Zhiqiang
09:42 – 09:44
P 13: Pulsed Laser Interference Lithography

Speaker: Hitoshi Nakano
09:26 – 09:28

Speaker: Stephen Riedel
09:44 – 09:46

P 5: Multi Phase D-shape fiber optics localized
plasmon resonance sensor realized by femtosecond laser engraving

P 14: Diffractive Optical Elements in bulk fusedsilica by nanosecond pulses laser ablation

Speaker: Chien-Hsing Chen
09:28 – 09:30

Speaker: F.J. Torcal-Milla
09:46 – 09:48

P 6: ???

P 15: Direct patterning of ITO coating on
polymer using a femtosecond laser with 1030 nm
wavelength

Speaker: ???
09:30 – 09:32
P 7: Fabrication of microstructures on Foturan
glass by femtosecond laser
Speaker: J.S. Chen
09:32 – 09:34
P 8: Femtosecond Laser Anti-Reflection Micro
Texturing of Bulk Polycrystalline Silicon Surface
Speaker: Wen-chang Yeh
09:34 – 09:36
P 9: Patterning electrode for cholesteric liquidcrystal display by laser ablation
Speaker: Hsuan-Kai Lin
09:36 – 09:38

16

P 10: Laser Fabrication for Water Repellent
Surface of Micro/Nano Hybrid Structures

Speaker: Ik-Bu Sohn
09:48 – 09:50
P 16: UV laser micropatterning of silicone
nanofilaments
Speaker: Ana Stojanovic
09:50 – 09:52
P 17: Micromachining of transparent materials
with Fresnel diffraction of infrared radiation
Speaker: K.Okazaki
09:52 – 09:54

Short presentation of posters
June 10, 2010 – Location: C:4.1
P 18: Investigations of laser induced periodic
structures using tailored femtosecond laser
pulses on polymers

P 26: Novel Butterfly Type Laser Module
Packaging Employing Nd:YAG Laser and
Separated Clip of Stainless Steel

Speaker: Magdalena Forster
09:54 – 09:56

Speaker: Yi-Cheng Hsu
10:10 – 10:12

P 19: Structure optimization of novel initiators
for two-photon polymerization (2PP) process

P 27: Structured photodiodes by means of Laser
Ablation over silica diodes

Speaker: Marton Siklos
09:56 – 09:58

Speaker: Francisco Javier Salgado-Remacha
10:12 – 10:14

P 20: Short pulse and ultrashort pulse laser
machining inside transparent materials: glass
and polymer

P 28: Integrated liquid crystal electro-optic
device with surface-induced parallel alignment
using a femtosecond laser

Speaker: Udo Loeschner
09:58 – 10:00

Speaker: F. He
10:14 – 10:16

P 21: Selective Laser Sintering of Magnesium
Powder for Fabrication of Dense Structures

P 29: Fabrication of Multi-level DOE using
laser direct write lithography system and CGH
technique

Speaker: Ng Chi Chung
10:00 – 10:02

Speaker: Sumio Nakahara
10:16 – 10:18

P 22: Micromachining of low-expansion glassby 263 nm Nd-YLF laser for microfluidics
applications

P 30: Micro-Cladding using a pulsed fibre laserand scanner

Speaker: Pierre-Yves Thro
10:02 – 10:04

Speaker: R. Ebert
10:18 – 10:20

P 23: Experimental study of selective laser
melting of pure magnesium powders

P 31: Heat flow investigation of Infrared
Semiconductor Laser Rapid Annealing of Silicon

Speaker: Chi Chung Ng
10:04 – 10:06

Speaker: Tohiyuki Sameshima
10:20 – 10:22

P 24: Using Femto-second Laser to Fabricate theInterior 3D Structures of Polymeric Microfluidic
Biochips

P 32: Surface modification of Ti-6Al-4V using line
beam laser

Speaker: S.C. Wang
10:06 – 10:08
P 25: Multi Phase D-shape Fiber Optics Localized
Plasmon Resonance Sensor
Speaker: Chung-Wei Cheng
10:08 – 10:10

Speaker: Balaji Mohan
10:22 – 10:24
P 33: CIGS Seed Layer Deposition by Femtosecond Laser
Speaker: Chung-Wei Cheng
10:24 – 10:26
P 34: Ps-laser scribing of CIGS at 1064 nm
wavelength
Speaker: Paulius Gecys
10:26 – 10:28

17

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Short presentation of posters
June 10, 2010 – Location: C4.1
P 35: Pulsed fiber laser based on single crystal
photoelastic modulator for photovoltaic industrial processing

P 44: Origin of Laser-induced Near-subwavelength Ripples: Interference between Surface
Plasmons and Incident Laser

Speaker: Rok Petkovšek
10:28 – 10:30

Speaker: Min Huang
10:46 – 10:48

P 36: “Black silicon” formation by Nd:YAG laser
radiation

P 45: On-chip Microlens Fabricated by Femtosecond Laser Micromachining for Nonlinear
Microscopy Applications

Speaker: Artur Medvid’
10:30 – 10:32
P 37: Direct Laser Writing of Ring-Like Metal
Structures
Speaker: Michael Zenou
10:32 – 10:34
P 38: Laser Direct Writing of Photoresist on Si
wafersSpeaker: Cinthya Toro
10:34 – 10:36
P 39: Direct Laser Writing System of Mask for
Integrated Photonics Devices
Speaker: Slimane Messaoud
10:36 – 10:38

P 46: Yb:YAG Ultrashort Pulse Laser for MEMS
Applications
Speaker: Akihiro Tanabashi
10:50 – 10:52
P 47: Deep Trenches of Borosilicate Glass by
Laser-Induced Backside Wet Etching
Speaker: Hiroyuki Niino
10:52 – 10:54
P 48: Laser Cutting of CFRP by UV Pulsed Laser
Ablation
Speaker: Hiroyuki Niino
10:54 – 10:56

P 40: The electron-phonon coupling constant asa characteristic parameter for the formation ofripples in ultra-short regime

P 49: Laser micro machining of ceramics withbrilliant cw laser radiation

Speaker: Eric Audouard
10:38 – 10:40

Speaker: Lars Hartwig
10:56 – 10:58

P 41: Femto-second laser ablation dynamics offused silica

P 50: Laser Micromachining of Stainless Steel
Powder/Polymer Composite

Speaker: Hsiang-Chen Wang
10:40 – 10:42

Speaker: D. Ahn
10:58 – 11:00

P 42: Impact of nanostructure formed by laser
radiation on photo conductivity of CdZnTe solid
solution

P 51: Optical coherence tomography for processcontrol of laser micro machining

Speaker: A. Mychko
10:42 – 10:44
P 43: Modeling and Control of Transfer
Phenomena in Nanosystems in Field of
Resonance Radiation
Speaker: Valeri V. Levdansky
10:44 – 10:46

18

Speaker: Fei He
10:48 – 10:50

Speaker: Markus Wiesner
11:00 – 11:02
P 52: Fabrication of nanostructures on Ag
surface with infrared femtosecond laser pulses
Speaker: Chung-Wei Cheng
11:02 – 11:04

Short presentation of posters
June 10, 2010 – Location: C:4.1
P 53: Machining of Substances Located at the
Back of a Silicon Substrate by Near-Infrared,
Ultrashort Pulse Laser
Speaker: Rie Tanabe
11:04 – 11:06
P 54: Water-assisted high pulse repetition rate
femtosecond micromachining of wide bandgap
dielectrics
Speaker: Valdas Sirutkaitis
11:06 – 11:08

19

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

LPM 2010: Time Schedulemonday,7, 20102010
Monday, June
7 June
TIME

Event

10:10
–
10:30

Welcome andopening remarks

10:30
–
11:10

Laser applications in Japan
during the first 50 years(Invited)P. 44

Speaker: Isamu Miyamoto
Session: Plenary session

11:10
–
11:50

Introduction of laser
manufacturing into mass
production (Invited)

Location

TIME

Event

C5

14:10
–
14:30

Nano-structures in arraygenerated in liquid process
induced by interfering
femtosecond laser processing

C5

P. 50

Speaker: K. Sugioka, F. Dausinger
Session: Plenary session

14:10
–
14:30
C5

Speaker: Godehard Schmitz
Session: Plenary session

11:50
–
12:30

Laser processing in industrial
solar module manufacturing(Invited)P. 45

Speaker: Heather J. Booth
Session: Plenary session

13:40
–
14:10

Laboratory-scale EUV sources
for metrology and materialinteraction studies (Invited)P. 46

Speaker: Klaus Mann
Session: VUV laser / direct write

13:40
–
14:10

Femtosecond laser waveguidewriting for customized micro
optical elements (Invited)

P. 47

Speaker: M. Richardson
Session: Ultra-short pulse processing 1

13:50
–
14:10

Gas-assisted microdrilling insteel with ultrashort pulsed
laser radiation

P. 48

Speaker: M. Kraus
Session: Micro machining 1

14:10
–
14:30

Advanced laser micro
machining using a novel
trepanning system

P. 49

Speaker: David Ashkenasi
Session: Micro machining 1

20

C5

C4.3

14:30
–
14:50

Effect of shot number on
femtosecond laser drillingof silicon

P. 52

Speaker: Petri Laakso
Session: Micro machining 1

14:30
–
15:00
C5

P. 54

14:50
–
15:10
C4.1

C4.1

Modular EUV source for the
next generation lithography
Speaker: Olivier Sublemontier
Session: VUV laser / direct write

P. 53

P. 55

14:50
–
15:10

C5

Speaker: Yoshiki Nakata
Session: Ultra-short pulse processing 1

P. 51

14:30
–
14:50

Location

Adapting Femtosecond Laser
Pulses to Ionization Processes
in Wide Band Gap Materials: aRoute for Nanoscale Laser
Processing

C4.3

C4.1

C5

Speaker: Thomas Baumert
Session: Ultra-short pulse processing 1

Laser Printed MEMS andElectronic Devices (Invited)

C4.3

Speaker: Andrew J. Birnbaum
Session: VUV laser / direct write

LASER DRILLING with PULSEFIBER LASER

C4.1

Speaker: Michael Stark
Session: Micro machining 1

Femtosecond Laser Irradiationand Hydrothermalelectrochemical Treatment for
Improving Bioactivity of the
Ti-based Bulk Metallic Glass

P. 56

Speaker: Togo Shinonaga
Session: Ultra-short pulse processing 1

15:00
–
15:20

New laser direct-writing
technique for liquids microprinting

P. 57

Speaker: Pere Serra
Session: VUV laser / direct write

C5

C4.3

TIME

Event

15:10
–
15:30

Machining hole arrays inpolycarbonate sheet using UVsolid state laser

P. 58

Speaker: Susumu Nakamura
Session: Micro machining 1

15:10
–
15:30

Laser micromachining of CFRP
by ultra-short pulse lasers

P. 59

Speaker: Masayuki Fujita
Session: Ultra-short pulse processing 1

15:20
–
15:40

Time-resolved imaging ofhydrogel transport by laserinduced forward transfer (LIFT)

P. 60

Speaker: Claudia Unger
Session: VUV laser / direct write

15:30
–
15:50

Strong birefringence in multicomponent silica-based
glasses with ultrashort laser
irradiation

Location

TIME

Event

C4.1

16:30
–
16:50

Laser Decal Transfer of Nanomaterials

P. 65

C5

C4.3

Pulsed laser material ablationby contacting optical fiber

P. 66

Speaker: Vitaly I.Konov
Session: Micro machining 2

P. 67

C5

16:50
–
17:10

Speaker: Fan Chaxing
Session: Ultra-short pulse processing 1

15:30
–
15:50

Drilling Holes throughCemented Tungsten Carbide
Plates by Ultrafast Laser

P. 61

Speaker: Yoshiro Ito
Session: Micro machining 1

15:40
–
16:00

Fabrication of Optical Interconnects with two photon
polymerization

P. 62

Speaker: Klaus Stadlmann
Session: VUV laser / direct write

15:50
–
16:10

High rate laser micro processing using high brilliant cw laser
radiation

P. 63

Speaker: Horst Exner
Session: Micro machining 1

16:20
–
16:40

Micro-processing of semiconductors using ultrafast laser
radiation at 2 µm wavelength

P. 64

Speaker: M. Ramme
Session: Ultra-short pulse processing 2

C4.3

Speaker: Alberto Piqué
Session: Direct write

16:30
–
16:50

16:40
–
17:00

Location

Rapid assessment of energy
deposition profiles in subsurface fs laser processing ofdielectrics

C4.1

C5

Speaker: A. Ruiz de la Cruz
Session: Ultra-short pulse processing 2

Ablation of grooves in stainless steel by femtosecond
pulses assisted by laser steam
cleaning

C4.1

Speaker: Valdas Sirutkaitis
Session: Micro machining 2

C4.1

C4.3

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

P. 68

Speaker: Scott A. Mathews
Session: Direct write

17:00
–
17:20

Spatiotemporal double pulse
method in femtosecond laser
processing

C4.3

C5

Speaker: Yoshio Hayasaki
Session: Ultra-short pulse processing 2

C4.1

C5

17:10
–
17:30

Engraving of metals using highrepetition rate ultrafast lasers

P. 69

Speaker: John Lopez
Session: Micro machining 2

17:10
–
17:30

P. 70

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

C4.1

C4.3

Speaker: Niklas Pucher
Session: Direct write

21

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

TIME

Event

17:20
–
17:40

Rapid micro processingof metals with a highrepetition rate femto second
fibre laser

P. 71

17:30
–
17:50

P. 72

17:30
–
17:50

Fabrication of multiple slanted
microstructures on silica
glass by laser-induced backside wet etching

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWork-station, Experimental
Results and Jet Formation
Modeling

17:40
–
18:00

Second hermonic optimization
method for holographic
femtosecond laser processing

P. 74

Speaker: Satoshi Hasegawa
Session: Ultra-short pulse processing 2

17:50
–
18:10

Microstructuring of Various
Materials using Femtosecond
Laser Pulses

P. 75

Speaker: Andy Engel
Session: Micro machining 2

22

C4.1

Speaker: Tadatake Sato
Session: Micro machining 2

Speaker: Agnès Souquet
Session: Direct write

P. 76

C5

Speaker: Joerg Schille
Session: Ultra-short pulse processing 2

P. 73

17:50
–
18:10

Location

Laser Induced Forward
Transfer: A Compact Machine
Speaker: Dominik Riester
Session: Direct write

C4.3

C5

C4.1

C4.3

Tuesday, June 8, 2010
TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables optofluidic
sensing in lab-on-a-chip(Invited)

P. 77

09:20
–
09:50

Optical Trapping of Bio-molecules and Nanoparticles Basedon Resonance and Surface
Plasmon (Invited)Speaker: Yasuyuki Tsuboi
Session: Biological and medical applications

09:20
–
09:40

Development of a Laser
Stabilised Gas Metal Arc
Cladding Process

09:50
–
10:10

Event

C4.1

10:00
–
10:20

Synthesis of ZnO nanowire
heterostructures by laser
ablation and their opticalcharacteristics

P. 84

C4.3

10:10
–
10:30

P. 85

C5

10:20
–
10:40

Speaker: Alexander Barroi
Session: Deposition and synthesis

In Vivo Writing using TwoPhoton-Polymerization

P. 80

Speaker: Jan Torgersen
Session: Biological and medical applications

09:40
–
10:00

A new additive technique forlaser precision microfacturing:laser microcladding

P. 81

Speaker: J. del Val
Session: Deposition and synthesis

09:50
–
10:10

TIME

Speaker: Roberto Osellame
Session: 3d processing 1

P. 78

P. 79

Location

3D laser lithography andnanoimprint lithography:
versatile methods for the
micro- and nano fabrication ofphotonic structures

P. 82

Speaker: Volker Schmidt
Session: 3d processing 1

10:10
–
10:30

Femtosecond laser ablationof dentin: A characterisation
study

P. 83

Speaker: Sandra Alves
Session: Biological and medical applications

C4.3

C5

C4.1

P. 86

10:20
–
10:40

Location

C5

Speaker: Daisuke Nakamura
Session: Deposition and synthesis

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

C4.1

Speaker: Igor Yadroitsev
Session: 3d processing 1

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions fabricated by femtosecond laser

C4.3

Speaker: Yasutaka Hanada
Session: Biological and medical applications

F2-Laser Formation of Transparent Protective Layer onto
Polycarbonate for Lightweight
Window

P. 87

Speaker: Masayuki Okoshi
Session: Deposition and synthesis

10:30
–
10:50

3D sub-diffraction-limit patterning of hybrid polymers withvisible and infrared laser pulses

P. 88

Speaker: Sönke Steenhusen
Session: 3d processing 1

10:50
–
11:10

Laser-controlled Injector for
Biological Applications

P. 89

Speaker: Toshihiko Ooie
Session: Biological and medical applications

C5

C4.1

C4.3

C4.3

23

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Tuesday, June 8, 2010
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

P. 90

11:30
–
11:50

Plasmonics Enhanced
Femtosecond Laser Nanoprocessing: Modeling andapplication to biology

P. 91

11:30
–
12:00

Role of gas optical breakdown
plasma in material ablation by
short laser pulses (Invited)

P. 92

Speaker: V.I.Konov
Session: Fundamentals

11:50
–
12:10

Local oxidation of thin metallic
films under short pulse laser
actionP. 93

Speaker: Vadim P. Veiko
Session: Patterning 1

P. 94

12:00
–
12:20

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Event

C4.1

12:20
–
12:40

Fabrication of 3D Protein
Microstructures

C4.3

C5

C4.3

Modelling Laser Induced
Periodic Surface Structures
Speaker: Johann Z.P. Skolski
Session: Fundamentals

12:10
–
12:30

Picosecond laser machined
designed patterns with anti-ice
effectP. 96

Speaker: Daniel Arnaldo del Cerro
Session: Patterning 1

P. 97

Speaker: Sascha Engelhardt
Session: 3d processing 2

12:20
–
12:40

Fs-Pump-Probe Measurementof the Transient Dielectric
Function of Fused Silica

P. 98

Speaker: Maren Hörstmann-Jungemann
Session: Fundamentals

12:30
–
12:50

Patterning of a NiCr-Al2O3 thinfilm system with picosecond
laser pulses

P. 99

Speaker: Oliver Suttmann
Session: Patterning 1

12:40
–
13:00

P. 100

C4.1

Speaker: Thomas Stichel
Session: 3d processing 2

P. 95

24

TIME

Speaker: Hong-Bo Sun
Session: 3d processing 2

Speaker: Michel Meunier
Session: Patterning 1

12:00
–
12:20

Location

14:00
–
14:20

P. 101

C5

14:00
–
14:30
P. 102

C4.3

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

Location

C4.1

C5

C4.3

C4.1

Speaker: José L. Ocaña
Session: 3d processing 2

Laser Micro-Patterning by
Means of Optical Fibers with
Etched Tips or Micro-grinded
Lens End Faces

C4.3

Speaker: Sergii Yakunin
Session: Patterning 2

Laser Ignition of Internal
Combustion Engines (Invited)Speaker: Ernst Wintner
Session: Components and systems

C4.1

TIME

Event

14:10
–
14:30

Thin film processing with UV
excimer lasers

P. 103

14:20
–
14:40

Formation and evolution ofself-organized patterns in laser
irradiation of silicon surface inwater

P. 104

14:30
–
14:50

Micromachining Hard Materials
with Industrial Picosecond
Lasers

P. 105

Speaker:Dirk Müller
Session: Joint session: Industrial aplications 1

14:30
–
14:50

High-end micromachining
with >150W average powerfrom a 1MHz 10ps-laser

P. 106

Speaker: Marco Höfer
Session: Components and systems

P. 107

14:50
–
15:10
P. 108

14:50
–
15:10
P. 109

15:00
–
15:20

P. 110

TIME

Event

C1.1

15:10
–
15:30

Thin metal cutting using water
jet-guided laser

Speaker: Ralph Delmdahl
Session: Joint session: Industrial aplications 1

Speaker: X. Y. Chen
Session: Patterning 2

14:40
–
15:00

Location

Volume Bragg grating formation in fused silica with highrepetition rate femtosecond
Yb:KGW laser pulses

C4.3

C1.1

C4.1

C4.3

Speaker: Valdas Sirutkaitis
Session: Patterning 2

Laser Cutting of Electrodes for
Advanced Batteries

C1.1

Speaker: Eric Audouard
Session: Joint session: Industrial aplications 1

Multiple Beam Internal Structuring of PMMA

C4.1

Speaker: Walter Perrie
Session: Components and systems

Generation of Multi Spot
Arrays and In-Process
Spot Shaping for Parallel
Laser Processing of Microstructures

C4.3

P. 111

Speaker: Alexandre Pauchard
Session: Joint session: Industrial aplications 1

15:10
–
15:30

Laser processing by using
diffractive optical laser beam
shaping techniqueP. 112

Speaker: Gediminas Raciukaitis
Session: Ultra-short pulse processing 3

15:20
–
15:40

Fabrication of sub-micron
Gratings on Silicon by
Maskless Exposure of Nanosecond Laser Pulses

P. 113

Speaker: Ravi K. Soni
Session: Patterning 2

15:30
–
15:50

High Precision Machining
Powered by UV

P. 114

Speaker: Rainer Paetzel
Session: Joint session: Industrial aplications 1

15:30
–
15:50

Application of spatial light
modulator in nanosecond laser
machining

P. 115

Speaker: Rainer J. Beck
Session: Ultra-short pulse processing 3

15:40
–
16:00

Laser Patterning of Conformal
Electromagnetic Surfaces

P. 116

Speaker: Nicholas A. Charipar
Session: Patterning 2

15:50
–
16:10

Laser Micromachining ofPiezoelectric Ceramics

P. 117

Speaker: Xie Qiong
Session: Joint session: Industrial aplications 1

16:30
–
16:50

P. 118Enhancement of the hydrophobic properties of metals by
femtosecond laser texturing of
surfaces

Location

C1.1

C4.1

C4.3

C1.1

C4.1

C4.3

C1.1

C4.3

Speaker: Stéphane Valette
Session: Patterning 3

Speaker: M. Schmidt
Session: Patterning 2

25

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Tuesday, June 8, 2010
TIME

Event

16:30
–
16:50

Quality Aspects in High PowerUltra Short Pulse Laser Ablation

P. 119

16:50
–
17:10

P. 120

16:50
–
17:10

P. 121

16:50
–
17:10
P. 122

17:10
–
17:30

P. 123

17:10
–
17:30

P. 124

17:10
–
17:30

TIME

Event

C4.1

17:30
–
17:50

Production of Microstructuresin wide-band-gap materials
using pulsed laser ablation at
157 nm wavelength

C4.3

P. 125

Speaker: Falk Haehnel
Session: Patterning 3

17:30
–
17:50

Optical system for on-line
monitoring in selective laser
melting technology

P. 126

Speaker: Maria Doubenskaia
Session: Process monitoring

Speaker: S. Eifel
Session: Process monitoring

Ultra fast laser machinedhydrophobic stainless steel
surface for drag reduction inlaminar flows
Speaker: R. Jagdheesh
Session: Patterning 3

Three-dimensionally Isotropic
Resolution of Femtosecond
Laser Micromachining Using
Spatiotemporally Focused
Pulses

C4.1

Reliable laser micro-welding of
CopperC1.1

Speaker: U. Dürr
Session: Joint session: Industrial
aplications 2

Interferometric in-process
measurement of free-form
surfaces in laser chemical
manufacturing

C4.1

Speaker: Christoph Gerhard
Session: Process monitoring

Generation of periodic microand nano-structures bypolarization-controlled laser
beam interference

C4.3

Speaker: Stefan Beckemper
Session: Patterning 3

Broadly based micro machining applications for value
added production with highpower picosecond lasers

17:30
–
17:50
P. 127

Speaker: Fei He
Session: Process monitoring

Speaker: S. Weiler
Session: Joint session: Industrial
aplications 2

26

Location

17:50
–
18:10

Applications and perspectivesof ultrashort pulsed lasers

Cu Micropatterns Fabricatedby Femtosecond Laser Direct
Writing Using Cu Nanoparticle
Ink
Speaker: Chung-Wei Cheng
Session: Patterning 3

17:50
–
18:10

Laser-induced plasma investigations during material
processing

P. 129Speaker: David Ashkenasi
Session: Process monitoring

17:50
–
18:10

High-efficiency high-quality
carbon machining strategies

18:10
–
18:30

A practical method to determine laser induced
refractive index changes intransparent media using
a Fourier approachP. 130

C4.3

C4.1

C1.1

Speaker: J. König
Session: Joint session: Industrial aplications 2

P. 128C1.1

Location

C4.3

C4.1

C1.1

Speaker: A. Wolynski
Session: Joint session: Industrial aplications 2

Speaker: Rene Berlich
Session: Process monitoring

C4.1

Wednesday, June 9, 2010
TIME

Event

18:10
–
18:30

Micromachining with picosecond lasers: New results
and trends
Speaker: A.Nebel
Session: Joint session: Industrial aplications 2

Location

TIME

Event

C1.1

08:35
–
09:00

KeyNoteLocation

C1.1

Speaker: U. Keller
Session: Joint session: Lasers for micro

09:00
–
09:15

Frequency-doubled Highpower Nanosecond Lasers
for Materials Processing

P. 131

Speaker: C. Stolzenburg
Session: Joint session: Lasers for micro

09:15
–
09:30

Arbitrary sequence ps-ns laser
sourceC1.1

C1.1

Speaker: J. Früchtenicht
Session: Joint session: Lasers for micro

09:20
–
09:40

P. 132

09:20
–
09:40

Surface ablation of dielectrics
with sub-10 fs to 300 fs laser
pulses: Aspect ratio and crater
shape evolution as a functionof laser intensity
Speaker: Olivier Utéza
Session: Ultra-short pulse processing 3

Laser-matter interaction infusion welding of glass using
ultrashort laser pulses- Formation mechanism andprevention of weld defects -P. 133

Speaker: Isamu Miyamoto
Session: Welding and bonding 1

09:30
–
09:45

Robust and flexible picosecond lasers for industrial
micromachining

P. 134

Speaker: K. Weingarten
Session: Joint session: Lasers for micro

09:40
–
10:00

P. 135

C4.1

Picosecond laser induced
colour centres: Stress-freemarkings and choice of
guiding optics

C4.3

C1.1

C4.1

Speaker: Andreas Lemke
Session: Ultra-short pulse processing 3

27

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Wednesday, June 9, 2010
TIME

Event

09:40
–
10:00

Ultrafast Laser Microwelding ofGlass Substrates with HighStrength by Sparse Scanning
TechniqueP. 136

Speaker: Yasuyuki Ozeki
Session: Welding and bonding 1

09:45
–
10:00

Recent advances in highpower ultrafast thin disk laser
oscillators

P. 137

Speaker: T. Südmeyer
Session: Joint session: Lasers for micro

10:00
–
10:20

Laser processing of tungsten
powder with femto second
laser radiation

P. 138Speaker: Robby Ebert
Session: Ultra-short pulse processing 3

10:00
–
10:20

P. 139

10:20
–
10:40

Laser Glass frit Bonding for
Hermetic
Sealing of Glass Substrates
and Sensors

Structural arrangement oftitanium microcolumnar
surface structures induced byfemtosecond laser irradiation

P. 140

10:20
–
10:40

Emission Data and Environmental Costs During Laser
Joining of Metals

P. 141

Speaker: Jürgen Walter
Session: Welding and bonding 1

P. 142

28

TIME

Event

C4.3

10:40
–
11:00

Removal of nano particles onsilicon wafer by plasma
filament using a femtosecond
laser

P. 143C1.1

C4.1

High power femtosecond disk
laser
Speaker: M. Larionov
Session: Joint session: Lasers for micro

10:40
–
11:00

Location

C4.1

Speaker: Sung-Hak Cho
Session: Ultra-short pulse processing 3

Long Pulse Fiber Lasers andApplications

P. 144

Speaker: Michael Grupp
Session: Joint session: Lasers for micro

11:00
–
11:20

High Q Laser femtoREGEN™
UC for industrial microprocessing applications

C1.1

C1.1

Speaker: Martin Kellert
Session: Joint session: Lasers for micro

C4.3

11:00
–
11:20

P. 145

Speaker: Heidrun Kind
Session: Welding and bonding 2

Speaker: Alexandre Cunha
Session: Ultra-short pulse processing 3

10:20
–
10:40

Location

C4.1

11:20
–
11:40

Polarization sensitive devices
using ultrafast laser photoinscription of nanoscale periodic
arrangements

C4.1

Speaker:Razvan Stoian
Session: Ultra-short pulse processing 3

Single stage high energy
rod-type femtosecond
fiber amplifier for microprocessing applications

C1.1

Speaker: Clemens Hönninger
Session: Joint session: Lasers for micro

C4.3

C1.1

12:10
–
12:40
12:40
–
13:10

13:10
–
13:45

How the Laser Came to Be

C1.1

Speaker: A. E. Siegman
Session: 50 years Laser

Laser on their Way to Industrial
Applications

C1.1

Speaker: P. Seiler
Session: 50 years Laser

An Economic History ofIndustrial Laser Technology
Speaker: D. Belforte
Session: 50 years Laser

C1.1

TIME

Event

14:00
–
14:30

Laser-Bonding in high powerelectronics (Invited)

P. 146

14:30
–
15:00

P. 147

15:00
–
15:30

P. 148

14:30
–
14:50

Nanoablation using 2D Goldand Dielectric Nanosphere
Templates Excited by Femtosecond Laser (Invited)

Event

C4.3

15:50
–
16:10

Laser micro joining of thinfilms on flexible substrates forelectrical connection

P. 154

Speaker: Martin Ehrhardt
Session: Welding and bonding 2

16:30
–
16:50

Fabrication of novel nanostructures on Silicon withfemtosecond laser pulses

P. 155

Speaker: Chung-Wei Cheng
Session: Nano structures 2

C4.1

Speaker: Minoru Obara
Session: Nano structures 1

Controlled Growth of Carbon
nanostructures in Laserassisted Chemical Vapor
Deposition (Invited)

C4.1

Speaker: Yongfeng Lu
Session: Nano structures 1

Effects of Superposed Continuous Diode Laser on
Welding Characteristics for
Aluminum Alloy in Pulsed
Nd:YAG Laser Welding
Speaker: Kazuya Miura
Session: Welding and bonding 2

14:50
–
15:10

Laser welding with pulsed
solid state lasers: strategies
and new developments

P. 150Speaker: Reiner Witte
Session: Welding and bonding 2

15:10
–
15:30

Laser Beam Micro Welding of
DCB Substrates with Fiber
Lasers and Thin Disk Lasers

P. 151

Speaker: Jens Gedicke
Session: Welding and bonding 2

15:30
–
15:50

Nanostructuring by infrared
fs-laser densification of
amorphous dielectrics

P. 152

Speaker: Arkadi Rosenfeld
Session: Nano structures 1

P. 153TIME

Speaker: Michael Schmidt
Session: Welding and bonding 2

P. 149

15:30
–
15:50

Location

YAG laser spot welding of PET
and metallic materials

C4.3

16:30
–
16:50

P. 156

16:50
–
17:10

P. 157

C4.3

C4.3

C4.1

C4.3

16:50
–
17:10

Silica Based Micro- Cantilevers
Fabricated Using Direct UVWritting and Micro-Machining
For Chemical and PhysicalSensing Applications

Location

C4.3

C4.1

C4.3

Speaker: Christopher Holmes
Session: Micro devices

Fabrication of 2D periodic
nanoholes on GaN surface
using wet-chemical-assisted
femtosecond laser ablation

C4.1

Speaker: Seisuke Nakashima
Session: Nano structures 2

Rotational Magnetic MicroViscometer for Blood Viscosity
Measurements at the MicroScale

P. 158Speaker: Blaz Kavcic
Session: Micro devices

17:10
–
17:30

Characterization of silver nanoparticles prepared by laser
ablation in water and DMSO

P. 159Speaker: Nastaran Mansour
Session: Nano structures 2

17:10
–
17:30

Microstructured GRIN lens as
an external coupler to thin-film
waveguides

P. 160Speaker: Jürgen Ihlemann
Session: Micro devices

C4.3

C4.1

C4.3

Speaker: Yusof Farazila
Session: Welding and bonding 229

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Wednesday, June 9, 2010
TIME

Event

17:30
–
17:50

Size-controlled silicon quantum dots synthesis by gated
CO2 laser pyrolysis

P. 161

Speaker: Olivier Sublemontier
Session: Nano structures 2

17:30
–
17:50

P. 162

17:50
–
18:10

P. 163

17:50
–
18:10

P. 164

18:10
–
18:30

Analysis of Regimes for Short
Pulse Laser Shock MicroForming of Thin Metal Components for MEMS Manufacturing

C4.1

C4.3

Speaker: José L. Ocaña
Session: Micro devices

Tuning Size Distribution ofGold Nanoparticles Generatedby Laser Ablation in Water at
Different Repetition Rates

C4.1

Speaker: Ana Menéndez-Manjón
Session: Nano structures 2

Thin silicon wafers dicing
using line-focused nanosecond-pulse 355nm
q-switched laser

C4.3

Speaker: Rajesh S. Patel
Session: Micro devices

Formation of Polycrystalline
Ge Micropattern by Laser
Direct Writing Method Using
Germanium Ink Consisting of
Organogermanium Nanocluster

P. 165

Speaker: Akira Watanabe
Session: Nano structures 2

18:10
–
18:30

Laser Based Vacuum
Packaging of Micro-Devices
Using Localised Heating

P. 166

Speaker: Norbert Lorenz
Session: Micro devices

30

Location

C4.1

C4.3

Thursday, 10 June 2010
TIME

Event

TIME

Event

15:00
–
15:30

Laser based processes in next
generation solar cell production, chances and challenges(Invited)

LocationP. 173

Short presentation of posters

C4.1

09:20
–
11:20

Installation of posters

C5

11:30
–
13:00

Poster session

C5

P. 176

Speaker: Tianqing Jia
Session: Nano structures 3

14:00
–
14:30

Femtosecond laser applied tophotovoltaic cell processing(Invited)

C4.1

15:30
–
16:00

Laser - An Enabling Technology in the Photovoltaics
Revolution (Invited)

P. 167

Speaker: Marc Sentis
Session: Photovoltaic Applications 1

P. 177

Speaker: Rajesh S. Patel
Session: Photovoltaic Applications 1

15:40
–
16:00

Design of bioconjugated gold
nanoparticles by femtosecondlaser ablation

P. 178Speaker: Annette Barchanski
Session: Nano structures 3

14:00
–
14:20

Continuous Fabrication of
Colloidal Organic Nanoparticles by Laser Ablationof Microcrystals in Liquid

P. 168Speaker: Philipp Wagener
Session: Nano structures 3

14:20
–
14:40

Synthesis of nanoparticles insolution using femtosecond
laser ablation

P. 169Speaker: Martti Silvennoinen
Session: Nano structures 3

14:30
–
15:00

Laser processing for advanced
solar cells (Invited)

P. 170Speaker: Jochen Löffler
Session: Photovoltaic Applications 1

14:40
–
15:00

Nanojoining of Ag/Au nanoparticles by femtosecond laser
irradiation

P. 171

Speaker: Anming Hu
Session: Nano structures 3

15:00
–
15:20

Ultraviolet optical near-fieldsof micro spheres imprinted inphase change films

P. 172

Speaker: Jan Siegel
Session: Nano structures 3

C4.3

C4.3

16:30
–
16:50
P. 179

C4.1

16:30
–
16:50

P. 180

C4.3

C4.3

16:50
–
17:10

C4.3

Speaker: Joachim John
Session: Photovoltaic Applications 1

09:20
–
11:10

15:20
–
15:40

Location

Two dimensional periodic
nanostructures with enhanced
band-gap emission on ZnO
induced by the interference of
three femtosecond laser
beams

Laser processing of thin films
for photovoltaic applications

C4.3

C4.1

C4.3

C4.1

Speaker: Aart Schoonderbeek
Session: Photovoltaic Applications 2

Nanostructures on ITO thinfilm irradiated by different
femtosecond laser wavelengths

C4.3

Speaker: J.S. Chen
Session: Nano structures 4

Development and optimizationof an industrial laser doping
process for crystalline solar
cells

P. 181

Speaker: Malte Schulz-Ruhtenberg
Session: Photovoltaic Applications 2

16:50
–
17:10

Femtosecond laser irradiationinduced modification of gold
nanorods inside silicate glass

P. 182

Speaker: Bertrand Poumellec
Session: Ultra-short pulse processing 4

C4.1

C4.3

31

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Session list – alphabetical order
3D Processing 1
TIME

Event

DATE

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June
08

12:40
–
13:00

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

Speaker: Roberto Osellame

09:50
–
10:10

3D laser lithography andnanoimprint lithography:
versatile methods for the
micro- and nano fabrication ofphotonic structures

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

June
08

Speaker: Sönke Steenhusen

Location: C 4.1

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

Event

TIME

Event

12:10
–
09:20
12:40
–
09:50
12:40
–
13:10

How the Laser Came to Be
Optical Trapping of BioSpeaker: A. E. Siegmann
molecules and Nanoparticles
Based on Resonance andLaser
onPlasmon
their Way(Invited)
to Industrial
Surface
Applications

09:40
13:10
–
–
10:00
13:45

In Vivo Writing using TwoAn
Economic History of
Photon-Polymerization
Industrial Laser Technolog

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
09

Speaker: Yasuyuki Tsuboi
Speaker: P. Seiler

June
June
08
09

Speaker: Jan Torgersen
Speaker: D. Belforte

Femtosecond laser ablation
Location:of dentin: CA 1.1
characterisation
study

DATE

June
08

–
10:40
TIME

June
08

June
08

10:40
–
11:00
09:50
–
10:10
10:10
–
10:30

movement of Phormidium in
nano-aquariums integrated
with different functions
Event
fabricated by femtosecond
laser Trapping of BioOpticalmolecules and Nanoparticles
Speaker: on
Yasutaka
Hanada and
Based
Resonance
Surface Plasmon (Invited)
Laser-controlled Injector for
Speaker:
Yasuyuki
TsuboiBiologicalApplications
Speaker:
In Vivo Toshihiko
WritingOoie
using Two-

Photon-Polymerization

June
08

08

DATE

June
08
June
08
June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study
Speaker: Sandra Alves

32

June
09
June
08

Biological and medical
12:00
Mechanism
study of gliding
Juneapplications

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

DATE
DATE

Speaker: Sandra Alves

Speaker: Thomas Stichel

12:20
–
12:40

TIME

10:00
–
10:20

3D Processing 2
TIME

Location: C 4.1

50 yearslaser
Biologicalandmedicalapplications

Speaker: Igor Yadroitsev

09:20
–
09:50

June
08

Speaker: José L. Ocaña

Speaker: Volker Schmidt

10:10
–
10:30

DATE

June
08

10:20–
10:40

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08
10:20
–
10:40

Speaker: Yasutaka Hanada

10:50
–
11:10

Laser-controlled Injector for
Biological Applications

June
08

Speaker: Toshihiko Ooie

10:40
–
11:00

TIME

Event

DATE

14:00
–
14:30

Laser Ignition of Internal
Combustion Engines (Invited)

June
08

Speaker: Ernst Wintner

June
08

Speaker: Marco Höfer

14:50
–
15:10

Multiple Beam Internal
Structuring of PMMA

June
08

Speaker: Walter Perrie

Location: C 4.1

Event

09:20
–
09:40

Development of a Laser
Stabilised Gas Metal Arc
Cladding Process

Direct write
TIME

Event

16:30
–
16:50

Laser Decal Transfer of Nanomaterials

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

17:10
–
17:30

DATE

June
08

A new additive technique forlaser precision microfacturing:laser microcladding

Synthesis of ZnO nanowire
heterostructures by laser
ablation and their opticalcharacteristics

June
08
07

Speaker: Alberto Piqué

June
08
07

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08
07

17:30
–
17:50

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08
07

Speaker: Agnès Souquet

June
08

Speaker: J. del Val

10:00
–
10:20

DATE

Speaker: Niklas Pucher

Speaker: Alexander Barroi

09:40
–
10:00

June
08

Location: C 5

Deposition and synthesis
TIME

Reactive deposition of AlxGa1xN thin films by hybrid processes of pulsed laser ablationand ECR microwave discharge
Speaker: Jiada D. Wu

Components and systems

High-end micromachining
with >150W average powerfrom a 1MHz 10ps-laser

June
08

Speaker: Masayuki Okoshi

Location: C 4.3

14:30
–
14:50

F2-Laser Formation of Transparent Protective Layer onto
Polycarbonate for Lightweight
Window

June
08

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08
07

Speaker: Dominik Riester

Fabrication
Location:
C of
4.3Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann

Speaker: Daisuke Nakamura

33

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Fundamentals
TIME

Event

DATE

11:30
–
12:00

Role of gas optical breakdown
plasma in material ablation by
short laser pulses (Invited)

June
08

Speaker: V.I.Konov

12:00
–
12:20
12:20
–
12:40

Modelling Laser Induced
Periodic Surface Structures

June
08

15:30
–
15:50

High Precision Machining
Powered by UV

15:50
–
16:10

Laser Micromachining ofPiezoelectric Ceramics

June
08

Speaker: Rainer Paetzel

June
08

Speaker: Xie Qiong

Location: C1.1

Speaker: Johann Z.P. Skolski

Fs-Pump-Probe Measurementof the Transient Dielectric
Function of Fused Silica

June
08

Joint session: Industrial
aPplications 2

Speaker: Maren Hörstmann-Jungemann

Location: C 5

Joint session:
Industrial aPplications 1
TIME

Event

14:10
–
14:30

Thin film processing with UV
excimer lasers

14:30
–
14:50

Micromachining Hard Materials
with Industrial Picosecond
LasersDATE

Speaker: Ralph Delmdahl

15:10
–
15:30

34

Industrial Cutting of Electrodes for Advanced Batteries

June
08

Speaker: Alexandre Pauchard

16:50
–
17:10

Reliable laser micro-welding of
Copper

17:10
–
17:30

June
08

June
08

DATE

June
08

Speaker: U. Dürr

Broadly based micro machining applications for value
added production with highpower picosecond lasers

June
08

Speaker: S. Weiler

17:30
–
17:50
17:50
–
18:10

Speaker: Eric Audouard

Thin metal cutting using water
jet-guided laser

Event

June
08

Speaker: Dirk Müller

14:50
–
15:10

TIME

18:10
–
18:30

Applications and perspectivesof ultrashort pulsed lasers

June
08

Speaker: J. König

High-efficiency high-quality
carbon machining strategies

June
08

Speaker: A. Wolynski

Micromachining with picosecond lasers: New results andtrendsSpeaker: A.Nebel

Location: C 1.1

June
08

Joint session:Lasers for micro

Micro devices

TIME

Event

DATE

TIME

Event

DATE

08:35
–
09:00

Joint session: Lasers for micro
KeyNote

June
09

16:30
–
16:50

June
09

09:00
–
09:15

Frequency-doubled High-power Nanosecond Lasers forMaterials Processing

Silica Based Micro- Cantilevers
Fabricated Using Direct UVWritting and Micro-Machining
For Chemical and PhysicalSensing Applications

Speaker: U. Keller

June
09

Speaker: C. Stolzenburg

09:15
–
09:30
09:30
–
09:45

Arbitrary sequence ps-ns
laser source

June
09

Speaker: J. Früchtenicht

Robust and flexible picosecond lasers for industrial
micromachining

June
09

Recent advances in highpower ultrafast thin disklaser oscillators

16:50
–
17:10

10:40
–
11:00
11:00
–
11:20

High power femtosecond
disk laser

17:10
–
17:30

June
09

17:30
–
17:50

June
09

June
09

Speaker: Michael Grupp

High Q Laser femtoREGEN™
UC for industrial microprocessing applications

June
09

Single stage high energy
rod-type femtosecond fiber
amplifier for micro-processing
applications

June
09

Analysis of Regimes for Short
Pulse Laser Shock MicroForming of Thin Metal Components for MEMS Manufacturing

June
09

17:50
–
18:10

Thin silicon wafers dicing
using line-focused nanosecond-pulse 355nm q-switched
laser

June
09

Speaker: Rajesh S. Patel

18:10
–
18:30

Laser Based Vacuum Packaging of Micro-Devices Using
Localised Heatin

June
09

Speaker: Norbert Lorenz

Location: C 4.3

Speaker: Martin Kellert

11:20
–
11:40

Microstructured GRIN lens as
an external coupler to thin-film
waveguides

Speaker: José L. Ocaña

Speaker: M. Larionov

Long Pulse Fiber Lasers andApplications

June
09

Speaker: Blaz Kavcic

Speaker: T. Südmeyer

10:20
–
10:40

Rotational Magnetic MicroViscometer for Blood Viscosity
Measurements at theMicro Scale

Speaker: Jürgen Ihlemann

Speaker: K. Weingarten

09:45
–
10:00

Speaker: Christopher Holmes

June
09

Speaker: Clemens Hönninger

Location: C 1.1

35

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Micro machining 1

Micro machining 2

TIME

Event

DATE

TIME

Event

DATE

13:50
–
14:10

Gas-assisted microdrilling insteel with ultrashort pulsed
laser radiation

June
07

16:30
–
16:50

Pulsed laser material ablationby contacting optical fiber

June
07

16:50
–
17:10

Ablation of grooves in stainless steel by femtosecond
pulses assisted by laser
steam cleaning

Speaker: M. Kraus

14:10
–
14:30

Advanced laser micro machining using a novel trepanningsystemJune
07

Speaker: David Ashkenasi

14:30
–
14:50

Effect of shot number on
femtosecond laser drillingof silicon

15:10
–
15:30

LASER DRILLING with PULSEFIBER LASER

June
07

June
07

Speaker: Michael Stark

Machining hole arrays inpolycarbonate sheet using
UV solid state laser

June
07

Speaker: Susumu Nakamura

15:30
–
15:50

Drilling Holes through Cemented Tungsten Carbide Plates
by Ultrafast Laser

17:30
–
17:50

High rate laser micro processing using high brilliant cw laser
radiation

17:10
–
17:30

Engraving of metals using highrepetition rate ultrafast lasers

17:50
–
18:10

Microstructuring of Various
Materials using Femtosecond
Laser Pulses

Speaker: Horst Exner

Location: C 4.1

June
07

June
07

Speaker: John Lopez

June
07

Speaker: Andy Engel

June
07

June
07

Fabrication of multiple slanted
microstructures on silica glassby laser-induced backside
wet etching
Speaker: Tadatake Sato

Location: C 4.1

Speaker: Yoshiro Ito

15:50
–
16:10

June
07

Speaker: Valdas Sirutkaitis

Speaker: Petri Laakso

14:50
–
15:10

Speaker: Vitaly I.Konov

Nano structures 1
TIME

Event

DATE

14:30
–
15:00

Nanoablation using 2D Goldand Dielectric Nanosphere
Templates Excited by Femtosecond Laser (Invited)

June
09

Speaker: Minoru Obara

15:00
–
15:30
15:30
–
15:50

Meta-material consisting of
nanostructure (Invited)Speaker: Luo xiangang

Nanostructuring by infrared
fs-laser densification of
amorphous dielectris
Speaker: Arkadi Rosenfeld

Location: C 4.1

36

June
09

June
09

Nano structures 2

Nano structures 3

TIME

Event

DATE

TIME

Event

DATE

16:30
–
16:50

Fabrication of novel nanostructures on Silicon withfemtosecond laser pulses

June
09

14:00
–
14:20

Continuous Fabrication of
Colloidal Organic Nanoparticles by Laser Ablation of
Microcrystals in Liquid

June
10

Speaker: Chung-Wei Cheng

16:50
–
17:10

Fabrication of 2D periodic
nanoholes on GaN surface
using wet-chemical-assisted
femtosecond laser ablation
Speaker: Seisuke Nakashima

June
09

Characterization of silver
nanoparticles prepared bylaser ablation in water and
DMS

June
09

Size-controlled silicon quantum dots synthesis by gated
CO2 laser pyrolysis

June
09

Speaker: Olivier Sublemontier

17:50
–
18:10

Tuning Size Distribution ofGold Nanoparticles Generatedby Laser Ablation in Water at
Different Repetition Rate

14:40
–
15:00

June
09

15:00
–
15:20

Formation of Polycrystalline
Ge Micropattern by Laser
Direct Writing Method Using
Germanium Ink Consisting of
Organogermanium Nanocluster
Speaker: Akira Watanabe

June
10

Nanojoining of Ag/Au nanoparticles by femtosecond laser
irradiatio

June
10

Ultraviolet optical near-fieldsof micro spheres imprinted inphase change films

June
10

Speaker: Jan Siegel

15:20
–
15:40

Speaker: Ana Menéndez-Manjón

18:10
–
18:30

Synthesis of nanoparticles insolution using femtosecond
laser ablation

Speaker: Anming Hu

Speaker: Nastaran Mansour

17:30
–
17:50

14:20
–
14:40

Speaker: Martti Silvennoinen

Speaker: Seisuke Nakashima

17:10
–
17:30

Speaker: Philipp Wagener

Two dimensional periodic
nanostructures with enhanced
band-gap emission on ZnO
induced by the interferenceof three femtosecond laser
beams

June
10

Speaker: Tianqing Jia

June
09

15:40
–
16:00

Design of bioconjugated gold
nanoparticles by femtosecondlaser ablation

June
10

Speaker: Annette Barchanski

Location: C 4.3

Location: C 4.1

37

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Nano structures 4

Patterning 2

TIME

Event

DATE

TIME

Event

DATE

16:30
–
16:50

Nanostructures on ITO thinfilm irradiated by different
femtosecond laser wavelengths

June
10

14:00
–
14:20

Laser Micro-Patterning by
Means of Optical Fibers with
Etched Tips or Micro-grinded
Lens End Faces

June
08

Speaker: Sergii Yakunin

Speaker: J.S. Chen

14:20
–
14:40

Location: C 4.3

Patterning 1
Event

DATE

11:30
–
11:50

Plasmonics Enhanced Femtosecond Laser Nanoprocessing:
Modeling and application tobiology

June
08

June
08

Picosecond laser machined
designed patterns with antiice effect

15:00
–
15:20

June
08

15:20
–
15:40

Patterning of a NiCr-Al2O3 thinfilm system with picosecond
laser pulses
Speaker: Oliver Suttmann

Location: C 4.3

38

June
08

Generation of Multi Spot
Arrays and In-Process Spot
Shaping for Parallel Laser
Processing of Microstructures

June
08

Fabrication of sub-micron
Gratings on Silicon by Maskless Exposure of Nanosecond
Laser Pulses

June
08

Speaker: Ravi K. Soni

Speaker: Daniel Arnaldo del Cerro

12:30
–
12:50

Volume Bragg grating formation in fused silica with highrepetition rate femtosecond
Yb:KGW laser pulses

Speaker: M. Schmidt

Speaker: Vadim P. Veiko

12:10
–
12:30

14:40
–
15:00

Speaker: Valdas Sirutkaitis

Speaker: Michel Meunier

Local oxidation of thin metallic
films under short pulse laser
actionJune
08

Speaker: X. Y. Chen

TIME

11:50
–
12:10

Formation and evolution ofself-organized patterns in laser
irradiation of silicon surface
in water

June
08

15:40
–
16:00

Laser Patterning of Conformal
Electromagnetic Surfaces
Speaker: Nicholas A. Charipar

Location: C 4.3

June
08

Patterning 3

Photovoltaic Applications 1

TIME

Event

DATE

TIME

Event

DATE

16:30
–
16:50

Enhancement of the hydrophobic properties of metals by
femtosecond laser texturingof surfaces

June
08

14:00
–
14:30

Femtosecond laser applied
to photovoltaic cell processing(Invited)June
10

Speaker: Marc Sentis

Speaker: Stéphane Valette

16:50
–
17:10

Ultra fast laser machinedhydrophobic stainless steel
surface for drag reduction
in laminar flows

June
08

Speaker: R.Jagdheesh

17:10
–
17:30

Generation of periodic microand nano-structures bypolarization-controlled laser
beam interference

June
08

Production of Microstructuresin wide-band-gap materials
using pulsed laser ablation at
157 nm wavelength

15:00
–
15:30

June
08

15:30
–
16:00

Cu Micropatterns Fabricated by
Femtosecond Laser Direct Writing Using Cu Nanoparticle Ink
Speaker: Chung-Wei Cheng

Location: C 4.3

June
10

Speaker: Jochen Löffler
Session: Photovoltaic Applications 1

Laser based processes in next
generation solar cell production, chances and challenges(Invited)

June
10

Laser - An Enabling Technology in the Photovoltaics
Revolution (Invited)

June
10

Speaker: Rajesh S. Patel

Location: C 4.1

Speaker: Falk Haehnel

17:50
–
18:10

Laser processing for advanced
solar cells (Invited)Speaker: Joachim John

Speaker: Stefan Beckemper

17:30
–
17:50

14:30
–
15:00

June
08

Photovoltaic Applications 2
TIME

Event

DATE

16:30
–
16:50

Laser processing of thin films
for photovoltaic applications

June
10

16:50
–
17:10

Development and optimization of an industrial laser
doping process for crystalline
solar cells

Speaker: Aart Schoonderbeek

June
10

Speaker: Malte Schulz-Ruhtenberg

Location: C 4.1

39

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Plenary session

Process monitoring

TIME

Event

DATE

TIME

Event

DATE

10:10
–
10:30

Welcome and opening remarks

June
07

16:30
–
16:50

Quality Aspects in HighPower Ultra Short Pulse
Laser Ablation

June
08

10:30
–
11:10

Laser applications in Japan
during the first 50 years(Invited)

Speaker: K. Sugioka, F. Dausinger

June
07

Speaker: Isamu Miyamoto

11:10
–
11:50

Introduction of laser manufacturing into mass production(Invited)

Laser processing in industrial
solar module manufacturing(Invited)

June
07

Event

DATE

Short presentation of posters

June
10

Location: C 4.1
09:20
–
11:20

Installation of Posters

June
10

11:30
–
13:00

Poster session

June
10

40

17:10
–
17:30

Interferometric in-process
measurement of free-form
surfaces in laser chemical
manufacturing

June
08

Optical system for on-line
monitoring in selective laser
melting technology

June
08

Speaker: Maria Doubenskaia

Poster Session

Location: C 5

June
08

Speaker: Fei He

17:30
–
17:50

Location: C 5

09:20
–
11:10

Three-dimensionally Isotropic
Resolution of Femtosecond
Laser Micromachining Using
Spatiotemporally Focused
PulsesSpeaker: Christoph Gerhard

Speaker: Heather J. Booth

TIME

16:50
–
17:10

June
07

Speaker: Godehard Schmitz

11:50
–
12:30

Speaker: S. Eifel

17:50
–
18:10

Laser-induced plasma
investigations during
material processing

June
08

Speaker: David Ashkenasi

18:10
–
18:30

A practical method to determine laser induced refractive
index changes in transparent
media using a Fourier
approach
Speaker: Rene Berlich

Location: C 4.1

June
08

Ultra-shortpulse processing 1

Ultra-shortpulse processing 2

TIME

Event

DATE

TIME

Event

DATE

13:40
–
14:10

Femtosecond laser wave-guidewriting for customized micro
optical elements (Invited)

June
07

16:20
–
16:40

Micro-processing of semiconductors using ultrafast laser
radiation at 2 µm wavelength

June
07

Speaker: M. Richardson

14:10
–
14:30

Nano-structures in arraygenerated in liquid process
induced by interfering femtosecond laser processing

Speaker: M. Ramme

June
07

16:40
–
17:00

Speaker: Yoshiki Nakata

14:30
–
14:50

Adapting Femtosecond Laser
Pulses to Ionization Processes
in Wide Band Gap Materials: aRoute for Nanoscale Laser
Processing

Femtosecond Laser Irradiationand Hydrothermal–electrochemical Treatment for Improving Bioactivity of the Ti-based
Bulk Metallic Glass

June
07

15:30
–
15:50

Laser micromachining of CFRP
by ultra-short pulse lasers

June
07

17:20
–
17:40

Spatiotemporal double pulse
method in femtosecond laser
processing

June
07

June
07

Rapid micro processing of
metals with a high repetition
rate femto second fibre laser

June
07

Speaker: Joerg Schille

17:40
–
18:00

Speaker: Masayuki Fujita

Strong birefringence in multicomponent silica-based
glasses with ultrashort laser
irradiation

17:00
–
17:20

Speaker: Yoshio Hayasaki

Speaker: Togo Shinonaga

15:10
–
15:30

June
07

Speaker: A. Ruiz de la Cru

Speaker: Thomas Baumert

14:50
–
15:10

Rapid assessment of energy
deposition profiles in subsurface fs laser processingof dielectrics

Second hermonic optimization
method for holographic
femtosecond laser processing

June
07

Speaker: Satoshi Hasegawa

Location: C 5

June
07

Speaker: Fan Chaxing

Location: C 5

41

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Ultra-shortpulse processing 4

Ultra-shortpulse processing 3
TIME

Event

DATE

TIME

Event

DATE

15:10
–
15:30

Laser processing by using
diffractive optical laser beam
shaping technique

June
08

16:50
–
17:10

Femtosecond laser irradiationinduced modification of gold
nanorods inside silicate glass

June
10

Speaker: Bertrand Poumellec

Speaker: Gediminas Raciukaitis

15:30
–
15:50

Application of spatial light
modulator in nanosecond
laser machining

June
08

Location: C 4.3

VUV laser / Direct write

Speaker: Rainer J. Beck

TIME

Event

DATE

09:20
–
09:40

Surface ablation of dielectrics
with sub-10 fs to 300 fs laser
pulses: Aspect ratio and crater
shape evolution as a functionof laser intensity

June
09

Picosecond laser induced
colour centres: Stress-freemarkings and choice of
guiding optics

June
09

Speaker: Andreas Lemke

10:00
–
10:20

Laser processing of tungsten
powder with femto second
laser radiation

Event

DATE

13:40
–
14:10

Laboratory-scale EUV sources
for metrology and materialinteraction studies (Invited)

June
07

Speaker: Klaus Mann

Speaker: Olivier Utéza

09:40
–
10:00

TIME

June
09

14:10
–
14:30
14:30
–
15:00
15:00
–
15:20

Speaker: Robby Ebert

10:20
–
10:40

Structural arrangement oftitanium microcolumnar
surface structures induced byfemtosecond laser irradiation

Removal of nano particles
on silicon wafer by plasma
filament using a femtosecond laser

June
09

Polarization sensitive devices
using ultrafast laser photoinscription of nanoscale periodic
arrangements
Speaker: Razvan Stoian

Location: C 4.1

42

Speaker: Olivier SublemontierLaser Printed MEMS andElectronic Devices (Invited)

June
07

Speaker: Andrew J. Birnbaum

New laser direct-writing
technique for liquids
microprinting

June
07

15:20
–
15:40

Time-resolved imaging ofhydrogel transport by laserinduced forward transfer (LIFT)

June
07

Speaker: Claudia Unger

June
09

15:40
–
16:00

Fabrication of Optical Interconnects with two photon
polymerization
Speaker: Klaus Stadlmann

Speaker: Sung-Hak Cho

11:00
–
11:20

June
07

Speaker: Pere Serra

Speaker: Alexandre Cunha

10:40
–
11:00

Modular EUV source for the
next generation lithography

Location: C 4.3
June
09

June
07

Welding and bonding 2

Welding and bonding 1
TIME

Event

DATE

TIME

Event

DATE

09:20
–
09:40

Laser-matter interaction infusion welding of glass using
ultrashort laser pulses Formation mechanism andprevention of weld defects

June
09

10:00
–
10:20

Laser Glass frit Bonding for
Hermetic Sealing of Glass
Substrates and Sensors

June
09

Speaker: Heidrun Kind

Speaker: Isamu Miyamoto

09:40
–
10:00

Ultrafast Laser Microwelding
Strength by Sparse Scanning
TechniqueJune
09

Speaker: Yasuyuki Ozeki

10:20
–
10:40

Emission Data and Environmental Costs During Laser
Joining of Metals
Speaker: Jürgen Walter

Location: C 4.3

June
09

14:00
–
14:30
14:30
–
14:50

Laser-Bonding in high powerelectronics (Invited)

June
09

Speaker: Michael Schmidt

Effects of Superposed
Continuous Diode Laser on
Welding Characteristics for
Aluminum Alloy in Pulsed
Nd:YAG Laser Welding

June
09

Speaker: Kazuya Miura

14:50
–
15:10

Laser welding with pulsed
solid state lasers: strategies
and new developments

June
09

Speaker: Reiner Witte

15:10
–
15:30

Laser Beam Micro Weldingof DCB Substrates with Fiber
Lasers and Thin Disk Lasers

June
09

Speaker: Jens Gedicke

15:30
–
15:50

YAG laser spot welding of PET
and metallic materials

15:50
–
16:10

Laser micro joining of thinfilms on flexible substrates
or electrical connection

June
09

Speaker: Yusof Farazila

June
09

Speaker: Martin Ehrhardt

Location: C 4.3

43

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laser applications in Japan during the first 50 years
I. Miyamoto
Osaka University, 2-1, Yamada-Oka, Suita, Osaka 565-0871, Japanisamu.miyamoto@ares.eonet.ne.jp
Lasers have played an important role in manufacturing technology in Japanese industry since the firstdelivery of commercial solid-state laser and CO2 laser in 1968 and 1979, respectively. Japaneseindustry also played an important role in the world laser market providing a world share of
approximately 40% in the beginning of 1990’s. Unfortunately, however, the laser technology slowed
down suddenly due to economical recession continued for approximately 10 years in Japan from themid-1990’s. Nevertheless it is believed that Japan stays as one of the most important countries inlaser application technology, where the technology is strongly supported by the steady improving
effort of engineers in the production floor.
Different types of lasers have been used in industry for different purposes. Figure 1 shows the ratio ofmajor lasers appeared in LAMP (International Congress on Laser Advanced Materials Processing),
which represents the trend of lasers for materials processing in Japan. Whereas CO2 laser dominatedin 1987 decreases monotonically down to approximately 6% in 2009, YAG laser became largest in
2002. Excimer laser reached as large as 20% in 1992 due to the effect of Japanese national project,and decreases down to similar level of CO2 laser. High rightness lasers such as fiber and disk lasers
have been increasing rapidly in 21st century due to advances of the semiconductor laser technology.
It is noted that ultrashort laser is increasing rapidly reaching over 40%, showing the strong
anticipation as the new precision microfabrication tool in the next generation, although there exist
actually only small industrial applications at the moment.
The présentation also includes (1) contributions of three main national projects of laser R&D in Japan,
which initiated from 1977 with total budget of 37 billion yen, (2) historical overview of laser materials
processing in Japan through the life cycle of selected laser materials processing technologies, and (3)recent topics of laser materials processing, some problems to be overcome and future prospects.

Fig. 1 Ratio of lasers for materials processing appeared in the proceedings of LAMP Congress(1987~2009).

44

Laser processing in industrial solar module
manufacturing
H. J. Booth
Oerlikon Solar Ltd, Trubbach, Hauptstrasse 1a, 9477 Trubbach, Switzerland

heather.booth@oerlikon.com
The use of lasers in the processing of solar cell structures has been known for many years both for cSi and thin-film solar technologies. The maturity of the laser technology, the increase in scale of solar
module production and the pressures to drive down cost of ownership and increase cell efficiencies
have all contributed to the adoption of laser processes in industrial manufacturing. Where laser
processes have been adopted in production they exploit the advantages of selective machining, a welldefined interaction region, high precision and cost effective processing.
Today laser systems are the tool of choice in thin-film module manufacturing both for scribing the cellinterconnects and for the module edge isolation. In thin-film module scribing, lasers are used for all of
the technologies; amorphous and microcrystalline silicon, CdTe, CIS and CIGS in various patterning
steps. For thin-film silicon and CdTe modules lasers are used in each of the P1, P2 and P3 cellinterconnections, see Fig.1a, 1b for a typical industrial production tool. For CIS and CIGS modules
lasers are widely used for P1 processes; P2 and P3 processes are possible with short-pulse lasers
however adoption is limited. The use of lasers is common in all thin-film technologies for the clearingof the border region of the panel to electrically isolate the active area from the module edges.
For c-Si solar cells the primary laser application today is edge isolation and this is well-established inindustrial production of most wafer-based cells. Other laser processes which are used in the
production of advanced high-efficiency cell designs are laser grooved buried contacts (LGBC), seeFig. 1c, emitter wrap-through (EWT) or metal wrap-through (MWT) interconnects from the front side to
the rear side of the wafer, selective emitters (SE) on the front side of the wafer or laser fired contacts(LFC) on the rear side of the wafer. Laser texturing processes are also being developed for enhanced
cell efficiency. Although ‘standard’ cell designs characterized by discrete front and back contacts
deposited via screen-printing and firing constitute over 90% of c-Si cell production today, theenhanced efficiency cells utilizing laser technologies are becoming produced more widely and willgrow in market share in the years to come.
In the mission of the solar industry to reduce the cost of electricity generation there are increasing
opportunities for laser processing to contribute to the goal of low cost of ownership in industrial
manufacturing through improved module efficiencies, higher throughput and reduced process costs.

(a)

(b)

(c)

Figure 1: Lasers in industrial manufacturing of solar modules: (a) Multiple-beam processing of thin-film solar modules.
(b) Scribe tools in an Oerlikon thin-film silicon end-to-end line. (c) Dual laser processing of LGBC in c-Si wafers.

45

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

46

47

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Gas-assisted microdrilling in steel with ultrashortpulsed laser radiation
M. Kraus, C. Markmann, A. Michalowski, R. Weber, T. Graf
Institut für Strahlwerkzeuge (IFSW), University of Stuttgart, Pfaffenwaldring 43, D-70569 Stuttgart, Germany

martin.kraus@ifsw.uni-stuttgart.de
Ultrashort laser pulses enable the fabrication of high-precision microholes in metals without postprocessing, due to the minimization of thermal effects such as melt generation and recast formation[1,2]. The use of high pulse energies and high repetition rates, however, usually results in a strong
ionization of the gas atmosphere inside the capillary. A considerable part of the pulse energy istransferred to the comparatively long-living laser-induced plasma and subsequently redistributed to
the workpiece, causing a radial expansion of the capillary and the formation of melt due to prolonged
surface heating. Using appropriate shielding gases for beam delivery and processing, plasma-induced
effects such as beam distortion, defocusing or plasma shielding can be significantly reduced, whereas
precision and ablation rate can be enhanced [3,4].
In the present work we have studied the influence of assist gas type and pressure on ablation
velocity, borehole morphology and machining quality at microdrilling in X5CrNi18-10 austenitic steel.
The drilling experiments were carried out in ambient air and under compressed air, nitrogen, argon
and helium, the latter being delivered by a coaxial conical nozzle.
Microholes with a diameter in the range of 100 m were fabricated in 1 mm sheets (see Figure 1),
utilizing a helical drilling process without core. In order to analyze the ionization behaviour of theatmosphere inside the capillary, the optical plasma emissions were recorded using a fast Si
photodiode [5].

Figure 1. Left: Transverse sections of microholes in 1 mm CrNi steel, drilled in ambient air and under nitrogen, argon andhelium atmosphere. Right: Intensity evolution of the optical process emissions. tH = 6 ps, l = 1030 nm, processing time 15 s,
helical drilling.

[1] D. Breitling, C. Föhl, F. Dausinger, T. Kononenko, V. Konov, in Femtosecond Technology for Technical and Medical Applications,
F. Dausinger, F. Lichtner, H. Lubatschowski, eds. (Springer, Berlin, 2004).
[2] A. Ancona, F. Röser, K. Rademaker, J. Limpert, S. Nolte and A. Tünnermann, “High speed laser drilling of metals using a high repetition rate,
high average power ultrafast fiber CPA system,” Opt. Express 16, pp. 8958-8968 (2008).
[3] J. Sun, J.P. Longtin, “Inert gas beam delivery for ultrafast laser micromachining at ambient pressure,” J. Appl. Phys. 89, pp. 8219-8224 (2001).
[4] L. Walker, R. Maynard, W. Clark, “Atmospheric affects on ultrashort-pulsed material processing,” in Proceedings 21st International Congress
on Applications of Lasers and Electro-Optics, E. Beyer, R. Patel, eds. (Laser Institute of America, Orlando, FL, 2002).
[5] D. Walter, A. Michalowski, F. Dausinger, “Real-time monitoring and control of micro-drilling process using optical emission of material-vapor
plasma,” in Proceedings of the Fourth International WLT-Conference on Lasers in Manufacturing, F. Vollertsen, C. Emmelmann, M. Schmidt, A.
Otto, eds. (AT-Fachverlag, Stuttgart, 2007), pp. 569-573.

48

49

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Nano-structures in array generated in liquid process
induced by interfering femtosecond laser processing
Y. Nakata1, K. Momoo1, T. Hiromoto1, N. Miyanaga1
1-Institute of Laser Engineering, Osaka university, 2-6 Yamadaoka, Suita, Osaka 565-0871 Japan

nakata-y@ile.osaka-u.ac.jp
Interfering ultra-short pulse laser processing have been applied to generate nanostructures on
metallic thin films [1-3]. The nanostructures are nano-waterdrop, nanobit, and nanobump etc.. They
are generated by thermally process such as melting, inflation of solute film due to vapour pressure,etc.. Example structures generated on 10 nm thick Au film evaporated on sapphire (0001) substrate isshown in figure 1. The pulse width of the laser was 150 fs, and the wavelength was 785 nm. The
correlation is illustrated in the bottom right inset, and the correlation angle between a beam and thetarget normal was about 25 degree. All the structures were generated in a single shot of laser
irradiation, at room temperature, and without any evacuation.
As shown in the demagnified view of figure 1 (a), nanostructures were in matrix according to theinterference pattern of four beams. The period was about 1.3 mm, which reflects the interference2
pattern. The fluence in average was about 103 mJ/cm . In the magnified view of (b) and (c),waterdrop-like structure was generated, and we named this structure “nano-waterdrop” [3]. The height
including the top ellipsoidal bead was about 730 nm. The bead size was about 220 nm in long axis
and 180 nm in short axis. The radius of the bottom was about 65 nm, and the neck was about 30 nm,
which is far smaller than the wavelength, and resolution of normal fs laser processing. The shape issimilar to that of normal waterdrop taken by a high-speed camera. In our case, liquid process, which isinduced periodically by interference pattern, freezes by thermal radiation and conduction. In (d) at 69
2mJ/cm , “nanobit” structure was generated. The height is about 330 nm, and the radius is about 70
2
nm. In (e) at 59 mJ/cm , nanobump structure was generated [1].
In the presentation, quite sharp structures having curvature radius smaller than 10 nm will be alsopresented.

1 mm(a) Demagnified view

500 nm(b) Nano-waterdrop

100 nm(d) Nanobit

100 nm(e) Nanobump

100 nm(c) Magnified view

2

2

2

Figure 1 Nano-structures in array generated at different fluences. (a), (b) and (c) at 103 mJ/cm , (d) 69 mJ/cm , (e) 59 mJ/cm .
The bottom right inset explains four beam correlation
1[1] Y. Nakata , T. Okada, M. Maeda, Nano-sized hollow bump array generated by single femtosecond laser pulse, Jpn. J. Appl.
Phys., vol. 42, pp. L1452-L1454, (2003).
1
1[2] Y. Nakata , K. Tsuchida, N. Miyanaga , H. Furusho, Liquidly process in femtosecond laser processing, Appl. Surf. Sci. vol.
255, pp. 9761-9763 (2009).
1
1[3] Y. Nakata , N. Miyanaga , T. Okada, Effect of pulse width and fluence of femtosecond laser on the size of nanobump array,
Appl. Surf. Sci., vol. 253, pp. 6555-6557, (2007).

50

Modular EUV Source for the Next Generation
Lithography
1

1

1

1

1

1

O. Sublemontier * , M. Rosset-Kos , T. Ceccotti , J-F. Hergott , T. Auguste , D. Normand , M.
1
2
2
2
2
2
Schmidt , F. Beaumont , D. Farcage , G. Cheymol , J-M. Le Caro , P. Cormont , P. Mauchien
2
2
3
3
3
4
4
4
, P.-Y. Thro , J. Skrzypczak , S. Muller , E. Marquis , B. Barthod , I. Gaurand , M. Davenet ,4
R. Bernard
1 - CEA-Saclay - DSM/IRAMIS/SPAM, 91191 Gif-sur-Yvette
2 – CEA-Saclay, DEN/DPC/SCP, 91191 Gif-sur-Yvette
3 - Thales Laser, Domaine de Corbeville, Route Départementale 128, BP 46, 91401 Orsay
4 - Alcatel Vacuum Technology France, 98, avenue de Brogny 74 009 Annecy*olivier.sublemontier@cea.fr
The EXULITE national-funded project was dedicated to the design and characterization of a laserplasma-produced EUV power source at 13.5 nm for the next generation lithography. It was conducted+in cooperation with two laboratories from CEA, ALCATEL and THALES and had received the Medea
label from the European Union.
One of our approach originalities was the laser scheme modularity [1] illustrated on Fig. 1(a). Six
Nd:YAG laser beams were focused at the same time on a liquid xenon target to generate the EUV
emitting plasma. In the first part of the project, a dense and collimated spray of micrometric xenon
droplets was used. We finally used a filament xenon jet, with which best results were obtained. The“spider-like” attack had important industrial advantages and led to interesting source performances interms of in band power, stability and isotropic properties with the filament jet target [2]. A maximum
coefficient of efficiency (CE) of 0.44% in 2pi sr and 2% band width was measured with xenon and withsix 6 kHz repetition rate lasers, which corresponds to a maximum in band EUV mean power of 7.7 W.
The EUV emission was found to be stable and isotropic in these conditions.

(a)

(b)

Fig. 1. Spider-like scheme of the EUV source (a) and source stability in 20 shots with 3 and 6 lasers (b).

In parallel to the experimental work, numerical studies were performed to model nanosecond laserinteraction with xenon micro-sized droplets and sprays [3].
[1] G. Cheymol, P.Cormont, P-Y. Thro, O. Sublemontier, M. Schmidt, B. Barthod, patent no WO06000718 (2006)[2] M. Schmidt, B. Barthod, T. Ceccotti, G. Cheymol, J-F. Hergott, O. Sublemontier, P-Y. Thro, P. Cormont, J. Skrzypczak, T.
Auguste, EUV Sources for Lithography, Vol. PM149, Modular LPP Source, pp 577–605 (2006)[3] T. Auguste, F. De Gaufridy De Dortan, T. Ceccotti, J.F. Hergott, O. Sublemontier, D. Descamps and M. Schmidt, J.
Appl.Phys., 101, (4). (2007)51

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Effect of shot number on femtosecond laser drilling ofsiliconP. Laakso1, R. Penttilä1, P. Heimala2
1- VTT technical Centre of Finland, Tuotantokatu 2, 53850 Lappeenranta, Finland
2- VTT technical Centre of Finland, Tietotie 3, 02044 VTT, Finland

Petri.Laakso@vtt.fi
Silicon wafer drilling has been under heavy investigation for some time already. Several different laser
types and methods have been introduced to different applications. In the industry usually the ns lasers
are used. Femtosecond lasers have been seen as high cost and not suitable for industrial production.
Nowadays femtosecond lasers offer really high pulse energies and good reliability and also highrepetition rates and relatively high pulse energies are possible with sub picosecond range. Processing
accuracy with fs laser is really good and heat input is negligible to processed surface [1, 2, 3].
In this paper we demonstrate the effect of number of pulses in silicon wafer drilling with afemtosecond laser in free air. Silicon wafer was p–type, [100] oriented and it was polished on bothsides. Targeted hole diameters were 50µm with f100 and 30 µm with the f50 optic. Hole diameters
were adjusted by using proper pulse energy. Study shows that penetration through the 500µm thickwafer is obtained with quite low amount of pulses but making the hole conical takes a lot more pulses.
This can be seen from figure 1 in which all the holes are drilled through using 2000 – 16000 pulses.

Figure 1 Holes drilled using 244µJ pulse energy with f50 optic in focus. Pulse count from left to right 1000, 2000, 4000, 8000
and 16000 pulses per hole.

From the experiments we can see that hole depth increases rapidly until a turning point is reached,
where the ablation rate becomes much smaller. The transition shot number occurs at around several
hundreds to 1000 shots. This is confirmed by other authors also [4].
[1] Le Harzic, R; Breitling, D; Weikert, M; Sommer, S; Föhl, C; Valette, S; Donnet, C; Audouard, E; Dausinger, F. Pulse widthand energy influence on laser micromachining of metals in a range of 100 fs to 5 ps, Appl. Surf. Sci 249, 322-331, (2005).
[2] Nolte, S; Momma, H; Jacobs, H; Tünnermann, A, Chichkov, B.N; Wellegehausen, B; Welling, H. Ablation of metals by
ultrashort laser pulses, J. Opt. Soc. Am. B14, 2716-2722, (1997).
[3] Nolte, S. Micromachining, in Fermann, M.E; Galvanauskas, A; Sucha, G (eds) Ultrafast lasers, Marcel Dekker Inc, Chapter
6, (2003).
[4] Matsumura, T; Nakatani, T; Yagi, T. (2007) Deep drilling on a silicon plate with a femtosecond laser : experiment and model
analysis. Appl. Phys. A 86, 107-114, (2007).

52

Adapting Femtosecond Laser Pulses to Ionization
Processes in Wide Band Gap Materials: a Route for
Nanoscale Laser Processing
1

1

1

1

1

L. Englert , M. Wollenhaupt , D. Otto , C. Sarpe-Tudoran , A. Horn , T. Baumert

1

1- Institut fuer Physik und CINSaT, Universitaet Kassel, Heinrich-Plett-Str. 40, D-34132 Kassel, Germany

baumert@physik.uni-kassel.de
Ultrashort laser pulses are a promising tool for processing wide band gap materials even below the
wavelength of light. It is the transient free-electron density in the conduction band playing afundamental role for sub picosecond pulses [1] [2] [3] that after coupling to the lattice lead to phasetransitions or the creation of voids. In our work we make use of temporally asymmetric femtosecond
pulses of identical fluence and identical statistical pulse duration in order to control two distinct
ionization processes, i.e. photoionization and electron-electron impact ionization. Control leads todifferent final electron densities / energies as the direct temporal intensity-profile and the time inverted
intensity-profile address the two ionization processes in a different fashion. This results in observed
different thresholds for material modification in fused silica as well as in reproducible lateral structures
being an order of magnitude below the diffraction limit (down to 100 nm at a NA of 0.5) [4] [5]. Thesefindings are supported by our recent experiments: we used chirped pulses with comparable pulse
duration and observed that the asymmetric temporal frequency ordering had no significant influence.

Figure 1: Structure diameter obtained via AFM as a function of pulse energy for pulses with a statistical pulse duration of about
1 ps. Left: temporal asymmetric pulses with constant instantaneous frequency Right: temporal symmetric pulses withasymmetric frequency sweep, i.e. up chirp and down chirp

In addition, experiments with geometrically overlapping focal regions did not show incubation effects
on the creation of the nanostructures. In order to get a conclusive picture we currently extend ourstudies on time resolved plasma dynamics [6] to spectral interference measurements with shaped
laser pulses. Aiming at optimizing the temporal pulse shapes further, we started to simulate the freeelectron creation under the constraint of minimizing the spatial structure. Minimizing the spatial
structure and at the same time maximizing the spectrochemical sensitivity for fs-LIBS [7] completes
our experiments exploiting temporal pulse tailoring for material processing.
[1] Stuart, Feit, Rubenchik, Shore, and Perry, "Laser-Induced Damage in Dielectrics with Nanosecond to Subpicosecond
Pulses," Phys. Rev. Lett. 74, 2248-2251 (1995).
[2] Kaiser, Rethfeld, Vicanek, and Simon, "Microscopic processes in dielectrics under irradiation by subpicosecond laser
pulses," Phys. Rev. B 61, 11437-11450 (2000).
[3] Temnov, Sokolowski-Tinten, Zhou, El-Khamhawy, and von der Linde, "Multiphoton Ionization in Dielectrics:
Comparison of Circular and Linear Polarization," Phys. Rev. Lett. 97, 237403-237403-4 (2006).
[4] Englert, Rethfeld, Haag, Wollenhaupt, Sarpe-Tudoran, and Baumert, "Control of ionization processes in high band gap
materials via tailored femtosecond pulses," Optics Express 15, 17855-17862 (2007).
[5] Englert, Wollenhaupt, Haag, Sarpe-Tudoran, Rethfeld, and Baumert, "Material processing of dielectrics with temporally
asymmetric shaped femtosecond laser pulses on the nanometer scale," Appl. Phys. A 92, 749-753 (2008).
[6] Sarpe-Tudoran, Assion, Wollenhaupt, Winter, and Baumert, "Plasma dynamics of water breakdown at a water surface
induced by femtosecond laser pulses," Appl. Phys. Lett. 88, 261109-261109-3 (2006).
[7] Assion, Wollenhaupt, Haag, Mayorov, Sarpe-Tudoran, Winter, Kutschera, and Baumert, "Femtosecond LIBS for Ca2+
analysis of biological samples with high spatial resolution," Appl. Phys. B 77, 391-397 (2003).

53

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laser Printed MEMS and Electronic Devices
A.J. Birnbaum, H. Kim, R.C.Y. Auyeung, N.A. Charipar, K.M. Metkus,S.A. Mathews and
A. PiquéMaterials Science and Technology Division, Naval Research Laboratory, Washington, DC 20375, USA

birnbaum@nrl.navy.mil
Interest in digital printing techniques for generating patterns or structures non-lithographicallycontinues to grow due to their relatively low cost and potential for scalability as well as inherent
flexibility in terms of compatibility with low temperature and non-planar substrates. Recent advancesin laser forward transfer techniques have provided a pathway for the fabrication of arrays of structured
geometries and device architectures relevant for electronics and MEMS applications. Through theutilization of the Laser Decal Transfer (LDT) process, as-deposited free-standing structures [1] forsensing/actuation without the use of sacrificial release layers on pre-patterned channels and cavities
have been demonstrated. In addition, the ability to simultaneously deposit spatially resolved
polymer/metal multi-layer heterostructures [2] has also been developed and used for printing
functioning micro-scale capacitors as well as three-layer architectures under development for the
fabrication of organic thin film transistors. This presentation will discuss the latest results achieved
with LDT and also describe efforts at scaling up the laser printing process using single pulses forparallel processing features in the form of large area arrays.
This work was sponsored by the Office of Naval Research.

(a)
(b)

15 µm

2 µm

10 µm

Figure 1 SEM images revealing examples of realizable geometries and configurations of laser printed structures (a) schematicof the multi-layer laser printing process as well as micrographs of the 40 µm transferred and cross-section revealing welldefined layer interfaces and (b) nanoindented micro-bridge deposited via release layer-free laser printing technique.
[1] R.C.Y. Auyeung, H. Kim, A.J. Birnbaum, M. Zalalutdinov, S.A. Mathews and A. Piqué, Laser Decal Transfer of Freestanding
Microcantilevers and Microbridges, Appl. Phys. A, 97, 513-519 (2009).
[2] A.J. Birnbaum, H. Kim, N.A. Charipar and A. Piqué, Laser Printing of Multi-Layered Polymer/Metal Heterostructures forElectronic and MEMS Devices, Adv. Matls., (2010), submitted.

54

LASER DRILLING with PULSE FIBER LASER
M.Stark, M.Grupp
IPG Laser GmbH Siemensstr. 7 D-57299 Burbach

mstark@ipgphotonics.com
Laser drilling with high drill rates and small holes diameters are required in a white range of industrial
applications for printed circuit board, nozzles, cooling boreholes for turbine blade and in the
production of solar panels. There are three general types of Laser drilling in industrial application: It is“one pulse drilling”, percussion drilling and trepanning. With a new generation of fiber laser it ispossible to drill with new scan strategy like “on the fly percussion drilling” which allows the drilling of avery narrow pattern with minimum thermal distortion, Fig. 1(a). Fig. 1(b) shows an example ofpercussion drilling of a 0.3mm thick metal sheet with a 2 mJ fiber laser.

(a)

(b)

Figure 1 (a) Principle of “on the fly percussion drilling” (b) Example of a percussion drilling thin metal sheet.

The paper shows the advantage of different laser drill strategy with new pulsed fiber lasers fromnanoseconds to milliseconds for various materials like steel, aluminum, silicon and ceramics.

55

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Femtosecond Laser Irradiation and Hydrothermal
electrochemical Treatment for Improving Bioactivity of
the Ti-based Bulk Metallic Glass
1

2

3

4

5

5

T. Shinonaga , M. Tsukamoto , S. Maruyama , N. Matsushita , T. Wada , X. Wang ,672
H. Honda , M. Fujita and N. Abe .
1- Graduate School of Engineering, Osaka University, 1-1 Yamadaoka, Suita, Osaka 565-0871, Japan
2- Joining and Welding Research Institute, Osaka University, 11-1, Mihogaoka, Ibaraki, Osaka, 567-0047, Japan
3- Graduate School of Science and Engineering, Tokyo Institute of technology, R3-#508, 4259 Nagatsuta-cho, Midori-ku,
Yokohama, Kanagawa, 226-8503, Japan
4- Materials and Structures Laboratory, Tokyo Institute of technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa,
226-8503, Japan
5- Institute for Materials Research, TohokuUniversity, 2-1-1, karahira, Aoba-ku, Sendai, Miyagi, 980-8577, Japan
6- National Institute for Materials and Science, 1-2-1, sengen, tsukuba, Ibaraki, 305-0047, Japan
7- Institute for Laser Technology, 2-6 Yamadaoka, Suita, Osaka 565-0871, Japan

togo@jwri.osaka-u.ac.jp
Ti-based bulk metallic glasses (BMGs) are expected to be used as new biomaterials owing to theirhigh strength, low Young’s modulus, and excellent corrosion resistance. Recently, Zhu et al.
[1]
developed Ti-based BMGs, Ti-Zr-Cu-Pd, without toxic elements, such as Ni, Be and Al . But, these
may not be directly joined to human bones due to their high chemical stability and bioinertness. It can[2][3]
be improved by surface modification of BMGs and microstructure formation on BMGs . For thesurface modification and the microstructure formation of BMGs, low temperature processes are moredesirable because such processes maintain BMGs’ excellent properties. If not, these BMGs will
crystallize, resulting in degradation of their properties. For the surface modification of BMGs, it isreported that bioactive titanate nanomesh layers were coated on Ti-based BMGs by hydrothermal[2]electrochemical treatment . This nanomesh layer can induce the growth of hydroxyapatite (HAp),
which has good biocompability, in simulated body fluid (SBF). For microstructures formation on
BMGs, the femtosecond laser is a useful tool since it provides considerable advantages for precision[4]
material processing, such as drilling, cutting and grooving into the metal in comparison with
[5]nanosecond lasers . The advantages are based on very rapid creation of vapor and plasma phase,
negligible heat conduction, and the absence of liquid phase. It is reported that various
microstructures, such as periodic nanostructures, periodic microstructures and microstructures whichwere the broken periodic microstructures, were formed on the Ti-based BMGs by femtosecond laser[6]
irradiation . However, optimum microstructures formed by femtosecond laser irradiation forimproving bioactivity of Ti-based BMGs have not been investigated yet.
In this study, we reported the various microstructures formation on the Ti-based BMGs,
Ti40Zr10Cu36Pd14, by femtosecond laser irradiation. After microstructures formation, they were treatedby hydrothermal-electrochemical treatment, and they were immersed in SBF to evaluate theirbioactivity. In the experiment, the wavelength, pulse duration, repetition rate, and beam diameter ofthe femtosecond laser were 775 nm, 150 fs, 1 kHz, and approximately 5 mm, respectively. The laser
beam was focused onto the BMG surface by a lens with a 100 mm focal length. The laser spot wasscanned on the Ti-based BMG surface in the area 5 mm5 mm. Titanate nanomesh layers werecreated on the microstructures by hydrothermal-electrochemical treatment. After immersion test in the
SBF, HAp was deposited on titanate nanomesh layers.
[1] S.L. Zhu, X.M, Wang, F.X. Qin and A. Inoue, A new Ti-based bulk glassy alloy with potential for biomedical application, Mater Sci Eng A, 459,
pp. 233-237, (2007).
[2] N. Sugiyama, H.Y. Xu, T. Onoki, Y. Hoshikawa, T. Watanabe, N. Matsushita, X.M. Wang, F.X. Qin, M. Fukuhara, M. Tsukamoto, N. Abe, Y.
Komizo, A. Inoue and M. Toshimura, Bioactive titanate nanomesh layer on the Ti-based bulk metallic glass by hydrothermal-electrochemical
technique, Acta Bionaterialia, 5, pp. 1367-1373, (2009).
[3] X.L. Zhu, J. Chen, L. Scheideler, R. Reichl, and J. Geis-Gerstorfer, Effects of topography and composition of titanium surface oxides on
osteoblast response, Biomaterials, 25, pp. 4087-4103, (2004)[4] P.S. Banks, B.C. Stuart, M.D. Perry, M.D. Feit, A.M. Rubenchik, J.P. Armstrong, H. Nguyen, F. Roeske, R.S. Lee, B.R. Myers and J.A. Sefcik,
Femtosecond laser machining, Technical Digest of Conf. on Lasers and Electro-Optics, 6, p. 510, (1998).
[5] B.N. Chichkov, C. Momma, S. Nolte, F.V. Alvensleben and A. Tunnermann, Femtosecond, picosecond and nanosecond laser ablation ofsolids, Appl. Phys. A, 63, pp. 109-115, (1996).

56

New laser direct-writing technique for liquids
microprinting
M. Duocastella, A. Patrascioiu, J.M. Fernández-Pradas, J.L. Morenza, P. Serra
Universitat de Barcelona, Departament de Física Aplicada i Òptica,
Martí i Franquès 1, E-08028 Barcelona, Spain

Main author email address: pserra@ub.edu

Laser direct-writing appears to be a very interesting tool for microfabrication, with applications ranging
from the well established microelectronics industry to more emerging fields like lab-on-a-chip
manufacturing. Although in most direct-writing techniques lasers are used for material removal, they
can also be used for material addition. The best known additive laser-direct writing technique ispossibly laser-induced forward transfer (LIFT). In LIFT, small amounts of material are transferredunder the action of a laser pulse from a previously prepared donor thin film to a receptor substrate,
placed parallel and at a short distance from the film. The application of LIFT to liquid donor films
allows the deposition of complex and fragile materials in solution or suspension without compromising
the integrity of the deposited material [1]. In this case, LIFT acts as a microprinting technique, in avery similar way to inkjet printing, but with clear advantages over it, like a potentially higher resolution
or a much wider range of printable rheologies. However, the LIFT of liquids is not free fromdrawbacks, being the preparation of the donor material in thin film form the main obstacle for its
further implementation in an industrial process. Indeed, it is hard obtaining reproducible thin films withthickness uniformity and good stability. Furthermore, the preparation of a liquid film requires of goodwettability, which is usually achieved through the addition of surfactants, but this is detrimental for
printing droplets with very small diameters. Finally, the film preparation not only constitutes anadditional step in the printing process, but also increases the risk of contamination of the material tobe printed.
In this work, a new laser microprinting technique is presented [2]. It allows printing transparent liquids
avoiding the drawbacks associated with the preparation of the liquids in thin film form. The principle ofoperation consists in strongly focusing a very short laser pulse underneath the free surface of theliquid, which is contained in a reservoir.
Subsurface absorption of the laser radiation
results in the propulsion of liquid away thefree surface, leading to material deposition
on a substrate facing that surface. It isdemonstrated that the technique results inthe deposition of uniform circular dropletswith excellent reproducibility and resolution(see Figure), and that it is feasible for
Figure: Large microarray of 750 microdrolets printed with the
new technique.
printing fragile materials without harm.

[1] C.B. Arnold, P. Serra, A. Piqué, Laser direct-write techniques for printing of complex materials, MRS Bull. 32, 23-31, (2007)[2] M. Duocastella, J.M. Fernández-Pradas, J.L. Morenza, D. Zafra, P. Serra, Novel laser printing technique for miniaturizedbiosensors preparation, Sens. Act. B: Chem., (2009) doi: 10.1016/j.snb.2009.11.055

57

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Machining hole arrays in polycarbonate sheet
using UV solid state laser
1

Susumu Nakamura , Tomoya Ono

1

1

Department of Electrical and Electronic Systems Engineering
Nagaoka College of Technology, Nagaoka, Niigata 940-8532, Japan

E-mail: snaka@nagaoka-ct.ac.jp
Recently, the design trend of small electronics devices such as personal digital assistants, cellular
phones and so on is flattening the front panel. Therefore, for aesthetic reason, small holes are betterfor speaker and microphone. The body of digital gadgets is commonly made of engineering plastic.
The traditional laser drilling of the engineering plastic used CO2 laser with 10.6 μm wavelength.
However, a hole diameter which is less than 100 μm is difficult for CO2 laser drilling due to the major
problems of the material surface deformation and burnt deposit.
To make arrays of reproducible percussion-drilled holes of several tens of micrometer inpolycarbonate, UV solid state laser is used in this work. The UV laser used is the Spectra-Physics
Explorer, a DPSS Q-switched Nd :YLF laser with a third harmonic wavelength of 349 nm. Since thislaser is operated in TEM00 mode, the beam has a Gaussian-distributed intensity profile. The pulse
duration is less than 5 ns and the maximum pulse energy that can be achieved at the target surface inour setup is approximately 100 μJ at 1 kHz pulse repetition rate. To machine an array of holes, we
use galvanometer scanner system with full digital control and a f lens which has a focal length of 200
mm.
Figure 1 shows optical photographs of entrance and exit holes made with a repetition rate of 5 kHz,20 μJ per pulse and 200 pulses per hole. This figure is hard for us to understand, however the surface
deformation is actually occurred by the cumulative heating. On the other hand, in Figure 2, we cansee there is no surface deformation on the hole arrays made with a repetition rate of 0.5 kHz. In
conclusion, this paper shows us the relationship between the repetition rate and the thermal effects
and also how the thermal effects can be overcome by exploring the processing parameters.

(a) entrance(b) exit

50 μm

Figure 1 Optical photographs of (a) entrance and (b) exit holes made with a repetition rateof 5 kHz , 20 μJ per pulse and 200 pulses per hole. Polycarbonate (t=0.25mm)(a) entrance(b) exit

Figure 2 Optical photographs of (a) entrance and (b) exit holes made with a repetition rateof 0.5 Hz , 20 μJ per pulse and 200 pulses per hole. Polycarbonate (t=0.25mm)

58

Laser micromachining of CFRP
by ultra-short pulse lasers
1,3

1

2

2

M. Fujita , T. Somekawa , T. Ozaki , M. Yoshida ,345
N. Miyanaga , Y. Mitooka , K. Mikame
1- Institute for Laser Technology, 2-6 Yamada-Oka, Suita, Osaka, 565-0871 JAPAN2- Department of Electrical Engineering, Kinki Univ., 3-4-1 Kowakae, Higashiosaka, Osaka, 577-8502 JAPAN3- Institute of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 JAPAN4- Industrial Technology Center of Okayama Prefecture, 5301 Haga, Kita-Ku, Okayama, 701-1296,JAPAN5- Laserx Co.,Ltd., 7 Kofukada, Shinbayashi-Cho, Chiryu, Aichi, 472-0017, JAPANmfujita@ile.osaka-u.ac.jp
CFRP (Carbon Fiber-Reinforced Plastic), which is a composite material consisted of carbon fiberand polymer matrix, has attractive features like high strength and light weight. It is expected torealize higher energy efficiency and hence lower carbon emission in transportations by using CFRP
as a body material of aircrafts, automobiles, and so on. Laser processing of CFRP had been studied
by various kinds of lasers such as CW disk lasers, quasi-CW CO2 lasers, several 10s µs pulsed
Nd:YAG lasers [1] and 10s ns pulsed UV Nd:YVO4 lasers [2], where laser cutting quality, thermal
damages and possible changes of strength were investigated.
We have been investigating micromachining of CFRP by ultra-short laser pulses in order tominimize material damages and HAZ. The laser system used in this study was a commerciallyavailable Ti:Sapphire laser (Spectra Physics, Hurricane). The fundamental wavelength, pulsewidth,
rep. rate were 800nm, 100fs and 1kHz, respectively. For comparison, we also used 200ps stretchedpulses from the Ti:Sap. laser and output from a CW fiber laser. Various samples of CFRP were
supplied by Toray Industries, Inc. and Mitsubishi Chemical Corp., which included uni-directional andcross-ply composite laminates, short and long carbon fiber pellet composites.
Figure 1 shows
examples of our experimental results, which shows dependences of laser scanning with respect to thefiber direction and a SEM image of the kerf. Optimizations of the laser parameters were explored.

(a)

(b)

Figure 1 (a) Dependences of etching depth on the number of laser scanning. Laser scanning perpendicular to the fiber
direction showed slower and saturated processing speed. Laser pulse energy, pulsewidth, rep. rate and scanning speed were0.4mJ, 200ps, 1kHz and 1m/min, respectively. (b) SEM image of the kerf, 200ps laser cutting parallel to the fiber direction.

This work is partly supported by New Energy and Industrial Technology Development Organization(NEDO) of Japan.
[1] D. Herzog, P. Jaeschke, O. Meier, H. Haferkamp, “Investigations on the thermal effect caused by laser cutting with respect
to static strength of CFRP”, International Journal of Machine Tools & Manufacture, vol.48, pp.1464–1473, (2008).
[2] Z. L. Li, P. L. Chu, H. Y. Zheng, and G. C. Lim, “Process development of laser machining of carbon fibre reinforced plastic
composites”, SIMTech technical reports, vol.10, pp.10-14, (2009).

59

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Time-resolved imaging of hydrogel transport bylaser-induced forward transfer (LIFT)
C. Unger, M. Gruene, L.Koch, J.Koch, B.N. Chichkov
Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannoverc.unger@lzh.de
Laser-induced forward transfer (LIFT) is a direct-write technique that allows printing of different
materials to form high-resolved structures. For LIFT, donor and collector glass substrates arearranged parallel and in close proximity to each other. The transparent donor slide is coated with athin gold layer and subsequently a layer of the transfer material, which in our case is a hydrogel. The
donor substrate is arranged upside down with the layer of hydrogel facing the collector slide. For thematerial transfer, a pulsed laser beam is focused through the donor glass substrate onto the gold
layer. The gold at the point of interaction is vaporized locally and the vapor pressure transfers thehydrogel onto the collector slide. When liquids or hydrogels are transferred by LIFT, the generation ofa jet instead of a droplet transfer has been observed.
With a self-developed stroboscopic imaging system, the jet generation and the jet impingement onto
the collector slide were investigated in detail (spatial resolution: 2 m, temporal resolution: 10 ns).

(a)

(b)

Figure 1 (a) Schematic overview of LIFT. (b) Hydrogel jet between donor and collector slide 80 s after laser pulse impact. The
laser fluence of the LIFT laser is 1.2 J/cm. The horizontal black lines between the two slides originate from interference
phenomena of the laser light used for stroboscopic illumination.

As a result of the captured images, a better understanding of the jet formation process has beenobtained. Furthermore, dependencies of the transfer process on the laser fluence and the viscosity of
the hydrogel have been examined.

60

Drilling Holes through Cemented Tungsten Carbide
Plates by Ultrafast Laser
K. Saginawa, M. Kato, Rie Tanabe, Y. Ito
Department of Mechanical Engineering, Nagaoka University of Technology, 1603-1, Kamitomioka, Nagaoka Niigata 940-2188 ,Japan

itoy@vos.nagaokaut.ac.jp
Holes of about 300 µm in radius are drilled through plates of cemented tungsten carbide of 0.5 and 1
mm thick by a femtosecond laser. The laser delivered 150 fs pulses at 1 kHz repetition rate at 785 nm.
The laser was scanned circularly by a galvanometer scanner equipped with an fθ lens of about 80mm
focal length in air. Effects of the scanning speed and polarization of the laser on the quality of drilledhole, such as the side taper, machining speed and evenness of the sectional diameters, areexamined. It is demonstrated that the circularly polarized beam results in smaller taper than linearlypolarized beam, as shown in the figure 1. Machining time for circularly polarized beam is about 200 s
in case of figure 1 (b) and is faster than linear one. Central part of machined volume was ejected asbulk during the laser irradiation.

(a)

(b)

Figure 1 Cross section of holes open through 1 mm thick WC-Co plate by (a) linearly polarized beam and (b) circularly
polarized beam. Scan speed was 35mm/s. Laser pulse energy was 800 µJ.

Figure 2 Magnified image of the side wall of the hole drilled by circularly polarized beam. LIPSS is seen of the grain of WC.
White bar indicates 4 µm.

It is found that laser induced periodic surface structure is formed on the side surface of the hole. The
LIPSS is formed by both lie\nearly and circularly polarized beam in horizontal direction (perpendicular
to the laser incident axis) but their periods are different: about 320 nm for linearly polarized beam andabout 260 nm for circularly polarized one. Shape and machining speed are dependent on otherparameters such as scanning speed and focus position. Effects of these parameters will be discussed.

61

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

62

High rate laser micro processing using high brilliant
cw laser radiation
H. Exner, L. Hartwig, R. Ebert, S. Kloetzer, A. Streek, J. Schille, U. Loeschner
University of Applied Sciences Mittweida, Laser Application Centre,
Technikumplatz 17, 09648 Mittweida, Germany

exner@hs-mittweida.deIn this study laser machining using a combination of a high power mono mode fibre laser and apolygon scanning system as an innovative key technology in high rate laser ablation cutting andstructuring was investigated. Therefore maximum cw laser power up to 3 kW at scanning velocities up
to 9000 m/min was applied. Focusing the laser beam into a laser spot of 21 m diameter resulted in alaser dwell time less than 140 nanoseconds. Consequently laser intensities comparable to q-switchedns laser technology were irradiated onto stainless steel 1.4301, copper, and tungsten.
The paper discusses the influence of significant laser processing parameters, such as laser powerand scanning velocity, onto ablation rate and machining qualities. Furthermore first ablation structuresand micro-slits will be presented.

(a)

(b)

Figure 1: Machining examples in high rate micro processing of stainless steel 1.430; (a) micro ablation structure with 30 mwidth and 100 m depths; (b) micro-slit (depth: 270m, width: 20m) obtained after 25 over scans and 0.43 kW laser power atprocessing speed of 1200m/min.

63

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Micro-processing of semiconductors using ultrafast laser
radiation at 2 m wavelength111

M. Ramme , J. Choi , M. Richardson ,1,2
2
2
I. Mingareev , M. Hermans , J. Gottmann
1- Townes Laser Institute, The College of Optics and Photonics,University of Central Florida,
4000 Central Florida Blvd., Orlando FL 32816, USA
2- Lehrstuhl für Lasertechnik, RWTH Aachen University, Steinbachstr. 15, 52074 Aachen, Germany

Main author email address: mramme@creol.ucf.edu
In recent years, a major interest in surface and bulk processing of semiconductors using ultrafast
laser radiation has grown [1]. With the development of ultrafast mid-IR laser sources, a new avenue ofirradiation can be established in a spectral region where the semiconductor material is highly
transparent to the laser radiation [2]. A variety of applications featuring optical waveguide capability
and combining microfluidics and electronics can be developed using this approach.
Irradiation of Si and GaAs with ultrafast laser radiation (tp150 fs) at the wavelength =2 m has beenmatter of the presented research. Surface ablation threshold, ripples formation (Figure 1) and radiation
penetration depth have been studied by variation of the dopant concentration of the material and theprocessing parameters such as irradiation intensity, translation velocity and focusing conditions. Laser
induced modifications in surface and bulk have been investigated by means of optical microscopy,
SEM and TEM. The achieved results of the ultrafast irradiation were compared to ablation processes
in the ns pulse regime using a wavelength =2 m.

(a)

(b)

Figure 1 (a) Microscope image of ripples formation on c:Si surface after fs laser irradiation close to the ablation threshold at
frep = 1 kHz. (b) Microscope image of ablation track formed by ns irradiation close to the ablation threshold.

First results on selective laser etching of semiconductors are reported. Laser radiation is used to
selectively change the crystalline properties of semiconductors in surface and bulk leading to asignificant change in the wet etching rate as it has been demonstrated in sapphire [3]. The feasibilityof the selective etching technique and the potential for applications in integrated optics and fluidics
has been studied.
[1] C. Wu, C. H. Crouch, L. Zhao, E. Mazur, Visible luminescence from silicon surfaces microstructured in air, Appl. Phys. Lett.
81, 1999 (2002)[2] A. H. Nejadmalayeri, P. Herman, J. Burghoff, M. Will, S. Nolte, A. Tünnermann, Inscription of optical waveguides incrystalline silicon by mid-infrared femtoseocnd laser pulses, Opt. Lett. 30, 9 (2005)[3] D. Wortmann, J. Gottmann, N. Brandt, H. Horn-Solle, Micro- and nanostructures inside sapphire by fs-laser irradiation andselective etching, Opt. Exp. 16, 3 (2008)64

Laser Decal Transfer of Nanomaterials
A. Piqué, A.J. Birnbaum, J. Wang, H. Kim, R.C.Y. Auyeung, N.A. Charipar, K.M. Metkus
and S.A. Mathews
Materials Science and Technology Division, Naval Research Laboratory, Washington, DC 20375, USA

pique@nrl.navy.mil
Laser direct-write processes such as laser induced forward transfer or LIFT offer unique advantages
and capabilities for digital microfabrication. Overall, laser direct-write or LDW is perhaps the mostflexible digital microfabrication process available in terms of materials versatility, substratecompatibility and ranges of speed, scale and resolution. At NRL, we have developed various LDW
processes from the laser transfer of semi-dry complex fluids or inks [1], to the “Lase-and-Place” ofentire semiconductor devices [2]. These processes have been demonstrated in the fabrication of avariety of microelectronic elements such as interconnects, passives, antennas, sensors, powersources and embedded circuits. Recently, laser forward transfer of thin film-like structures withexcellent lateral resolution and thickness uniformity using metallic nanoinks has been shown at NRL
using a technique named laser decal transfer [3]. The high degree of control in size and shapeachievable with laser decal transfer has been applied to the digital microfabrication of 3-dimensional
stacked assemblies and freestanding structures for MEMS applications [4]. Examples of some of thestructures produced by laser decal transfer are shown in figure 1. This talk will discuss the uniqueadvantages and capabilities of laser decal transfer of nanomaterials such as metallic nanoinks anddielectric nanopastes, and describe the various types of structures produced to date.
This work was sponsored by the Office of Naval Research.

(a)

(b)

30 !m

20 !m

Figure 1 SEM images showing sample structures produced by laser decal transfer of silver nanoinks on Si substrates. (a) Silver
microbridge made by LDT across a 30 µm wide trench on silicon without the use of any sacrificial layers. (b) 3-D stacked
structures fabricated by LDT of square voxels on top of each other to form the bottom column array and the top freestanding
and edge inclined plates.
[1] H. Kim, R.C.Y. Auyeung, S.H. Lee, A.L. Huston and A. Piqué, Laser Forward Transfer of Silver Electrodes for Organic ThinFilm Transistors, Appl. Phys. A, 96, 441-445 (2009).
[2] S.A. Mathews, N.A. Charipar, K.M.. Metkus and A. Piqué, Manufacturing Microelectronics Using “Lase-and-Place”,
Photonics Spectra, 41, No. 10, 70-74 (2007).
[3] A. Piqué, R.C.Y. Auyeung, H. Kim, K.M. Metkus and S.A. Mathews, Digital Microfabrication by Laser Decal Transfer, J.
Laser Micro/Nanoeng., 3, 163-169 (2008).
[4] R.C.Y. Auyeung, H. Kim, A.J. Birnbaum, M. Zalalutdinov, S.A. Mathews and A. Piqué, Laser Decal Transfer of Freestanding
Microcantilevers and Microbridges, Appl. Phys. A, 97, 513-519 (2009).

65

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Pulsed laser material ablationby contacting optical fiber
V.I. Konov, T.V. Kononenko, V.P. Pashinin, M.N. Sinyavsky
General Physics Institute, Moscow, Russia

email address: vik@nsc.gpi.ru
The aim of this work was to find microsecond-pulsed Nd:YAG laser parameters that would allow fastmaterial ablation by contacting quartz fiber without a catastrophic damage of its tip by laser beam andablation products. By catastrophic damage we assume situation when single or several laser pulses
destroy the tip in such a way that further material ablation by subsequent pulses in no longer possible.
The choice of laser pulse duration =1.3s is explained by two reasons. First, in this case highly
2
productive (up to 10m/pulse or even higher) material ablation takes place at fluencies E>10J/cm
2which is much lower than the measured optical damage threshold 400-600J/cm for free-standing
fiber tip. Second, for most of materials investigated the quality of craters produced by microsecond
pulses can be quite good.
Different ceramics, composites, polymers, carbon materials and metals were used as targets in
atmospheric air. Fiber core diameter was 300m, pulse repetition rate < 10Hz. The gap between thefiber tip and target surfaces was =0-1mm. Dynamics of materials ablation and fiber destruction werestudied by pump-probe shadowgraphy with temporal resolution 100 ns.
It is shown that the action of expanding vapor plume and particles on the fiber tip depend on the2target material and . At E=30-40J/cm , when productive ablation of all materials was observed, andpulse number N=1-3 a catastrophic fiber damage was observed only for metals and <20m. We
explain this effect by the action of fast liquid droplets that are expelled at small angles to the target
surface. For metals at higher  and other materials for all  values ablation with stable rate took place
for multiple-pulsed irradiation. At the same time, we found that in this general case part of the ablatedmaterial is deposited on the fiber tip. Moreover, this thin film can be also ablated by subsequent laser
pulses. The deposited film and its vapor plume do not shield the main target from the laser beam, but
result in gradual removal of quartz and formation of shallow crater on the fiber tip surface. The rate ofquartz etching was about 0.01m/pulse. This effect did not essentially influence target ablation for all3
 studied and laser pulse number N<510 .
2Thus we have demonstrated that at fluencies E30-40J/cm of microsecond-pulsed Nd:YAG laser,high rate ablation of different materials in contacting mode without a catastrophic damage of quartz
fiber tip can be realized. Applications of contacting fiber ablation technique in dentistry will bepresented.
This work was supported by RFBR Grant  07-02-00860 and Russian Federal Agency for Scienceand Innovation, project #02.740.11.0417.

66

Rapid assessment of energy deposition profiles in
sub-surface fs laser processing of dielectrics
A. Ruiz de la Cruz1, E. J. Grace2, A. Ferrer1, J. Solis1
1- Laser Processing Group, Instituto de Óptica (CSIC), Serrano 121, Madrid 28006, Spain
2- Photonics Group, Blackett Laboratory, Imperial College London, Prince Consort Road, London SW7 2BW, UK

Main author email address: j.solis@io.cfmac.csic.es
The shape and dimensions of subsurface structures written inside dielectric materials with fs laser pulses
are defined by the energy deposition profile of the focused writing beam. This profile is given by the beamwave-front and the NA of the focusing optics, and is influenced by linear and nonlinear propagation effects
inside the material (aberrations, self-focusing, nonlinear absorption, …) that can substantially distort the desired
shape and size of the transformed region. These effects are particularly relevant in the case of light guiding
structures as the size and shape of the transformed region will crucially affect the light guiding properties of the
fs-laser written waveguide. The usual approach to find a set of optimized ‘writing’ parameters (pulse energy,
duration, processing depth, beam ellipticity, etc.) is to make a systematic experimental study, trying several
combinations of parameters to find those ones yielding the best performing waveguides.
Obviously, the use of numerical models capable to predict with sufficient precision the energy deposition
profile inside the material enables accurately estimating a priori the optimal writing parameters before
processing. Still, a precise numerical calculation to determine the energy deposition profile usually requires
solving the nonlinear Schrödinger equation using the split-step propagation technique or similar calculation
procedures [1,2]. However, the sampling requirements to fully determine the field during the propagation using
these traditional approaches makes the calculations very time consuming and computationally demanding.
Recently, a generalized adaptive fast-Fourier evolver (GAFFE) has been realized [3, 4]. It dynamically resizes
in the space and spectral domain the grid that describes the propagated field as well as the propagation step.

Figure 1 (a) Transillumination microscopy image of the cross-section of a waveguide produced by direct laser writing with a slitshaped beam. (b) Energy deposition profile calculated using GAFFE with irradiation parameters similar to those of Fig. 1(a).

By using this evolver with a propagation model considering the most relevant linear and nonlinear
propagation effects [5] we have been able to make rapid calculations of the expected energy deposition profile
in realistic writing conditions. Figure 1(a) illustrates this for a waveguide written using the slit shaping
technique [6] at a depth z =1.56 mm, with an energy E =9.6 μJ (to force the appearance of non-linear
propagation effects) and a pulse duration tp =200 fs. The material is an Er-Yb co-doped phosphate glass. In
Figure 1(b) we present the resulting calculated energy deposition profile using similar parameters as the ones ofFig. 1(a). The numerical results reproduce quite well the shape and size of the finally produced structure. By
using GAFFE [4] we were able to obtain this result in some tens of seconds using a laptop computer. This shows
the potential of this approach for the rapid assessment of the final structures produced by fs-laser writing indielectrics.
[1] A. Couarion, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused
femtosecond pulses”, Phys. Reb. B, 71, 125435 (2005).
[2] I. M. Burakov, N. M. Bulgakova, R. Stoian, A. Mermillod-Blondin, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, “Spatial
distribution of refractive index variations in bulk fused silica by single ultrashort and short laser pulses”, J. App. Phys, 101, 043506 (2007).
[3] E. J. Grace, "Asymmetric Waveguide Writing Modeled with GAFFE," in Frontiers in Optics, OSA Technical Digest, FThE8 (2009).
[4] E. J. Grace, “GAFFE: A toolbox for solving evolutionary nonlinear PDEs”, (2009). Available fromwww.mathworks.co.uk/matlabcentral/fileexchange/24016[5] A. Pasquazi, S. Stivala, G. Assanto, “Transverse nonlinear optics in heavy-metal-oxide glass”, Phys. Rev. A, 77, 043808 (2008).
[6] M. Ams, G. D. Marshall, D. J. Spence, and M. J. Withford, “Slit beam shaping method for femtosecond laser direct-write fabrication ofsymmetric waveguides in bulk glasses,” Opt. Express 13(15), 5676–5681 (2005).

67

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Dynamics of the Laser Decal Transfer Process
1

2

2

2

2

2

S. A. Mathews , N. Charipar , A. Birnbaum , H. Kim , R. Auyeung , K. Metkus and A.
2Piqué
1- Department of Electrical Engineering and Computer Science, The Catholic University of America, Washington, DC 20064,
USA
2- Materials Science and Technology Division, Naval Research Laboratory, Washington, DC 20375, USA

mathews@cua.edu
Laser forward transfer of high viscosity or semi-solid nanoparticle suspensions can be used forprinting highly uniform and well-defined patterns, which are spatially identical to the size and shape ofthe laser transfer pulse. This non-lithographic patterning technique, termed Laser Decal Transfer or
LDT, has been used to directly print thin film-like patterns such as lines and interconnects [1],microbridges and microcantilevers [2] and various free-standing 3-D structures. With LDT, patterns or
structures with edge definition and thickness uniformity far superior than previously achievable withtraditional LIFT techniques have been demonstrated. The primary difference between LDT and otherlaser transfer processes can be found in how the material leaves the donor substrate. With LDT, thematerial is transferred as a single contiguous voxel which travels across the gap and lands on thereceiving substrate without changing its size or shape. To study the dynamics of the LDT process, wehave evaluated the effect of size and fluence of the laser transfer pulse, donor ink composition, its
thickness and viscosity on the quality of the transfer. Furthermore, using a high speed digital camera,
imaging of the voxels as they are released from the donor substrate and travel across the gap
towards the receiving substrate should be possible. This presentation will discuss the results form
these studies in order to better understand the LDT process.
This work was sponsored by the Office of Naval Research.

[1] A. Piqué, R.C.Y. Auyeung, H. Kim, K.M. Metkus and S.A. Mathews, Digital Microfabrication by Laser Decal Transfer, J.
Laser Micro/Nanoeng., 3, 163-169 (2008).
[2] R.C.Y. Auyeung, H. Kim, A.J. Birnbaum, M. Zalalutdinov, S.A. Mathews and A. Piqué, Laser Decal Transfer of Freestanding
Microcantilevers and Microbridges, Appl. Phys. A, 97, 513-519 (2009).

68Engraving of metals using high repetition rate ultrafast
lasers
1,2

1

3

3

J. Lopez , C. Loumena , Y. Zaouter , E. Mottay

1- Alphanov, 351 Cours de la Libération, 33405 Talence, France
2- Université Bordeaux 1, Celia Umr 5107, 351 Cours de la Libération, 33405 Talence, France
3- Amplitude Systemes, 6 Allée du Doyen Georges Brus, 33600 Pessac, France

john.lopez@alphanov.com
Since 1996, ultrafast laser micromachining has been widely proven to be a high quality [1], highflexibility process, with numerous potential, industrial applications. Indeed, femtosecond lasers are a
key technology for micro processing since they combine the unique capability to process any material
with a reduced heat affected zone. Until recently, a main drawback was the low processing speed dueto the limited average power available from ultrafast lasers. Recent advances in commercial ultrafast
lasers enable us to overcome this limitation since there is a significant increase of the average power
available to the user and of the repetition rate (up to 5MHz). Moreover, recent papers have shownthat in specific operating conditions (pulse energy <70µJ) the femtosecond regime can be more
efficient, in terms of removal rate, than the picosecond regime [2,3].

(a)

(b)

Figure 1 Micro processing using 500fs / 1030nm ultrafast laser (a) Etch rate in mm3/min versus average power at 2MHz
(losange), 100kHz (square) and 10kHz (triangle) on Molybdenum target. (b) Burr-free groove engraved on Brass target at 10µJ
/ 300kHz, width 29µm depth 14µm.

In this paper, we report on comparative results on micromachining and engraving of metal(Molybdenum, Aluminum, Copper, Brass, Nickel, Silicon) using both crystal-based systems(8W@300kHz) and fiber lasers (15W@2MHz), operating in the femtosecond regime. We have3
obtained removal rates of up to 2mm /min on metal without any burr.
[1] C. Momma, B.N. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, A., H. Welling and B. Wellegehausen, Shortpulse laser ablation of solid targets, Opt. Com., vol. 129, pp. 134-142 (1996)[2] J. Lopez, C. Loumena, V. Archambault, Y. Zaouter, A. Trisorio, M. Faucon and E. Mottay, Laser micro processing of metaland silicon using 100kHz and 2MHz ultrafast lasers, in Proceedings of the International Congress on Applications of Lasers &Electro-Optics (ICALEO), paper number M308, pp. 976-984 (2009)[3] A. Ancona, S. Döring, C. Jauregui, F. Röser, J. Limpert, S. Nolte and A. Tünnermann, Femtosecond and picosecond laser
drilling of metals at high repetition rates and average power, Opt. Lett., vol.34, No. 21, pp. 3304-3306 (2009)69

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Optimization of feature resolution, processing window &structuring time for the two-photon polymerization (2PP)
process by the use of novel initiators
1

1

2

3

4

5

N. Pucher , M. Siklos , A. Rosspeintner , V. Satzinger , A. A. Ajami , K. Cicha , G.
2
3
4
5
1
Gescheidt , Volker Schmidt , W. Husinsky , J. Stampfl , R. Liska
1- Institute of Applied Synthetic Chemistry, Vienna University of Technology, Austria
2- Institute of Physical and Theoretical Chemistry, Graz University of Technology, Austria
3- Institute of Nanostructured Materials and Photonics, Joanneum Research, Austria.
4– Institute of Applied Physics, Vienna University of Technology, Austria
5- Institute of Material Science and Technology, Vienna University of Technology, Austria

robert.liska@tuwien.ac.at, niki.pucher@gmail.com
Two-photon polymerization (2PP) is currently one of the hot topics of Additive Manufacturing
Technology (AMT) because it is a suitable technique for structuring complicated 3D (sub)micrometer
shapes. These parts can be used in various future applications such as different mechanical,
electronic and optical micro devices, high-density 3D optical data storage, photonic crystals and thelike.[1] Researchers are still trying to improve this novel technique. Higher resolutions, faster writing
speeds, improved processing windows, the possibility of using multiple exposure spots and so one
are the goals to reach in order to push 2PP into the commercial market. To achieve good results anappropriate laser system and structuring device are necessary as well as a reactive formulation,
consisting of appropriate monomers and a photoinitiator (PI).
The selection rules for the excitation process of the PI are different in 2PP compared to classical AMT
methods such as -stereo lithography using a one-photon polymerization technique, so that special
optimized PIs are necessary in order to fulfill the requirements for high resolution structuring.
We have synthesized a series of different novel PIs (figure 1 – left) and tested them concerning their
two-photon absorption cross-section values at 800 nm using open aperture Z-scan analysis as well as
performing 2PP structuring tests under the same conditions.[2] So we were able obtain structurereactivity relationship. We compared the results with highly active PIs from literature[3] as well as
commercially available one photon initiators such as Irgacure 369 and Michlers ketone, which are still
often used for the 2PP process, indicating that the novel initiators are highly active. Nicely shaped
structures at very low intensities and initiator concentrations as low as 0.05 wt% were obtained over abroad intensity and writing speed area in various resins making these PIs perfectly suitable for highresolution structuring as well as high throughput applications (figure 1 – right).

Figure 1 Novel highly active TPIs (left); High-resolution photonic crystal(right)[1] Lee, K.-S.; Kim, R. H.; Yang, D.-Y.; Park, S. H., Advances in 3D nano/microfabrication using two-photon initiatedpolymerization. Prog. Polym. Sci. 33, (6), 631-681, (2008).
[2] Pucher, N.; Rosspeintner, A.; Satzinger, V.; Schmidt, V.; Gescheidt, G.; Stampfl, J.; Liska, R., Structure-Activity Relationshipin D--A-  -D-Based Photoinitiators for the Two-Photon-Induced Photopolymerization Process. Macromolecules (Washington,
DC, United States), 42, (17), 6519-6528, (2009).
[3] Albota, M.; Beljonne, D.; Bredas, J.-L.; Ehrlich, J. E.; Fu, J.-Y.; Heikal, A. A.; Hess, S. E.; Kogej, T.; Levin, M. D.; Marder, S.
R.; McCord-Maughon, D.; Perry, J. W.; Rockel, H.; Rumi, M.; Subramaniam, G.; Webb, W. W.; Wu, X.-L.; Xu, C., Design oforganic molecules with large two-photon absorption cross sections. Science (Washington, D. C.) 281, (5383), 1653-1656,(1998).

70

Rapid micro processing of metals with a high repetition
rate femto second fibre laser
1,2

1

1

1

2

2

J. Schille , U. Loeschner , R. Ebert , L. Hartwig , P. Scully , N. Goddard , H. Exner

1

1 - University of Applied Sciences Mittweida, Laser Application Centre,
Technikumplatz 17, 09648 Mittweida, Germany
2 - The University of Manchester, The Photon Sciences Institute & CEAS,
Oxford Road, M13 9PL Manchester

schille@hs-mittweida.deThis study aims to investigate innovative rapid micro processing technologies by implementation of ahigh repetition rate femto second fibre laser and novel scanning systems.
First experiments in femto second laser machining with high repetition rates have shown new
mechanisms in laser matter interaction with the repetition rate as one of the mainly influencing
parameter. Depending on temporal distances between the laser pulses considerable changes ofobtained ablation depths have been detected, caused by heat accumulation or particle shielding
effects. Heat accumulation causes locally a rise in temperature encircled the laser working zone
accompanied by better absorption conditions and lowered ablation thresholds. For laser processing
with repetition rates in ranges of some 100 kHz phenomena of particle shielding and plasma shielding
have been reported.
However, utilising high repetition rate laser technologies in 3d micro structuring the machining times
have been reduced more than 40 times compared to fs laser processing with repetition rates of somekHz. A further reduction of processing times or irradiation with the full available laser energy is limited
by insufficient scanning speed of commercial available galvo scanning systems. Hence
implementation of novel scanning systems, such as resonance scanning technology with processing
speed up to 95m/s, is the challenge for a further reduction of laser processing times.
In the work results of rapid micro processing of metals, e.g. steel, copper and aluminium, with both, aresonance scanner and a fast galvo scanner will be presented to demonstrate the possibilities andlimits of the new technology in laser micro machining and mechanism of laser matter interaction will
be discussed.

1 mm

(a)

(b)

Figure 1: (a) 3d test structure in stainless steel machined with galvo scanner shows a hemisphere, pyramidal frustum, triangle
and rectangular prism; ablation depth: 100m; processing speed: 4000m/s; processing time: 350 sec.
(b) resonance scanner ablation at a thin stainless steel layer; above: lateral pulse distance of 190m at 500kHz
results in 95m/s processing speed; below: lateral ablation shift due to sinusoidal oscillating of the scanner71

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Fabrication of multiple slanted microstructures on silica
glass by laser-induced backside wet etching
T. Sato, R. Kurosaki, Y. Kawaguchi, A. Narazaki, H. Niino
National Institute of Advanced Industrial Science and Technology (AIST),
Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japansato-tadatake@aist.go.jp
Towards flexible fabrication of components for micro electro-optical-mechanical system (MEOMS) andmicrofluidic devices, several techniques for micromachining of glass materials has been proposed.
Among them, we have developed a laser-induced backside wet etching (LIBWE) [1, 2], that is anindirect laser processing technique employing organic dye solution as laser-absorbing media. By
using this technique, deep trenches with high aspect ratios could be fabricated on silica glass [3]. We
have succeeded to fabricate a microtrench with an aspect ratio of 102 (width: 9.7 μm, depth: 986 μm).
Moreover, inclined features could be flexibly fabricated by shifting the irradiated area in the lateral
direction during the etching. Such structures were formed as a result of both lateral and verticaletching at the etch front. Inclined features with tilting angles up to about 30 degrees could be
fabricated.

Width
9.7 mmDepth
986 μm

20 μm
Crosssectionalsurface

125 μm

(c)

(b)

(a)

20 μm

20 μm

Figure 2 Optical micrographs of the cross-sectional surface of the trencheswith Inclined features. Inclined sections were fabricated from (a) surfaceand (b), (c) from the bottom of the trenches by shifting the irradiated area inthe lateral direction with a speed of 0,3 μm/s.

Figure 1 cross-sectional SEM image of the deep
microtrench with an aspect ratio of 102[1] J. Wang, H. Niino and A. Yabe, One-step microfabrication of fused silica by laser ablation of organic solution, Appl. Phys. A,
68, pp. 111-113 (1999).
[2] H. Niino, Y. Kawaguchi, T. Sato, A. Narazaki, and R. Kurosaki, Surface microstructuring of silica glass by laser-induced
backside wet etching with a DPSS UV laser, Appl. Surf. Sci., 253, pp. 8287-8291 (2007).
[3] Y. Kawaguchi, T. Sato, A. Narazaki, R. Kurosaki, and H. Niino, Etching a Micro-Trench with a Maximum Aspect Ratio of 60
on Silica Glass by Laser-Induced Backside Wet Etching (LIBWE), Jpn. J. Appl. Phys. 44, pp. L176-L178 (2005).

72

73

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Second hermonic optimization method for holographic
femtosecond laser processing
Satoshi Hasegawa, Youhei Takahashi, Yoshio Hayasaki
Center for Optical Science and Education (CORE), Utsunomiya University,7-1-2 Yoto, Utsunomiya 321-8585, Japan

Main author email address: hasegawa_s@opt.utsunomiya-u.ac.jp
Femtosecond laser processing implemented a computer-generated hologram (CGH) on a spatial light modulator(SLM), called holographic femtosecond laser processing, has advantages of high throughput and high light-use
efficiency of the laser pulse energy [1-3] . The precise control of the diffraction peaks is essential in fabricating
enormous numbers of nanometer-scale structures simultaneously. To obtain a CGH with high quallity in the
optical system, an adaptive scheme has been proposed for optimizing the CGH using the diffraction peakintensities measured in its optical reconstruction.[2] The adaptive optimization is iteratively implemented bytaking advantage of the rewritable capability of the SLM, while automatically incorporating spatial properties ofthe optical system into the CGH. The past method we developed cannot respond to temporal properties of apulse[3]. In this study, we demonstrate a new optimization method of a CGH to improve a uniformity of thediffraction peaks. The CGH is optimized on the basis of a second-harmonic pattern excited by reconstruction
pattern of the CGH. The CGH incorporated the temporal property of the pulse in addition with its spatial
property; therefore the laser processing can perform further precise control of the processing size.
An experimental system was mainly composed of a regeneratively-amplified Ti:sapphire laser, a liquidcrystal SLM (LCSLM), a second-harmonic generation optics, a relay optics, and a control computer. The
femtosecond pulse was diffracted by a CGH formed on the LCSLM, was converted to a spatially shaped pattern,
and was focused on the sample. At the same time, the second harmonic pattern was generated by the spatiallyshaped pattern on a barium borate (BBO) crystal and imaged by a charge-coupled device (CCD) camera.
The second harmonic optimization method of a CGH is a modification based on the optimal rotation angle(ORA) method [4]. This may have applicability to not only the ORA method but also any other optimization
methods. A weight wm for controlling the diffraction peaks is updated as wm(n+1)=wm(n)[I(d)m/Im(n)]α, where Im
is the m-th second harmonic peak intensity and I(d)m is the desired intensity. The exponent α should be smallenough to avoid instability. Im = η(Iavg/Sfτ)2 where an average light intensity Iavg, a focus area S, a repetition f, apulse duration τ, and η is a conversion effciency. It is important that Im depends on τ.
Figure 1(a) shows an intensity image of the reconstruction of the CGH optimized only in a computer andFig. 1(b) shows the second harmonic image. The CGH was designed by the original ORA method. The
diffraction intensity at the high spatial frequency region was low because of the spatial frequency response of
the LCSLM[3]. The second harmonic image had a narrower peak width and a larger spatial frequency
dependence and enabled to detect the differences
between diffraction peaks with a high sensitivity.
Figures 1(c) and 1(d) show the intensity image andthe second harmonic image after the second
harmonic optimization. In each optimization step,
the second harmonic image was the average of 30
images. α=0.125. The uniformities were 0.66 and
0.97, respectively, where the uniformity is definedas the ratio of the minimum peak intensity to theFig. 1 (a) An intensity image of the reconstruction of the CGH
maximum peak intensity in the reconstruction. The
optimized only in a computer and (b) the second harmonicpeak value of the diffraction in the optimization
image. (c) The intensity image and (d) the second harmonic
process was detected, therefore the peak intensity
image after the second harmonic optimization.
was uniformized.
[1]
[2]
[3]
[4]

74

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light
modulator,” Appl. Phys. Lett. 87, 031101 (2005).
S. Hasegawa, Y. Hayasaki and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt.
Lett. 31, 1705-1707 (2006).
S. Hasegawa and Y. Hayasaki, “Adaptive optimization of hologram in holographic femtosecond laser processing system,” Opt. Lett.
34, 22–24 (2009).
J. Bengtsson, “Kinoform design with an optimal-rotation-angle method,” Appl. Opt. 33, 6879-6884 (1994).

Microstructuring of Various Materials using
Femtosecond Laser Pulses
Andy Engel, Manuel Pfeiffer, Guenter Reisse, Hagen Gruettner, Steffen Weissmantel
University of Applied Sciences Mittweida, Technikumplatz 17, 09648 Mittweida Germany

Engel@hs-mittweida.de
New results on three-dimensional micro-structuring of tungsten carbide hard metal, steel, copper andbrass using femtosecond laser pulses will be presented. For the investigations, a largely automatedhigh-precision fs-laser micromachining station was used. The fs-laser beam is focussed onto thesample surface using different objectives. The investigations of the ablation behaviour of the various
materials in dependence of the laser processing parameters will be presented in the first part of thepresentation. In the second part, complex 3D microstructures with a variety of geometries andresolutions down to a few micrometers showing smooth side walls as well as steep wall angles andthe parameters which were found to be optimum for the micro-structuring of each material will bepresented. It will be shown that ultrashort laser pulses are suitable for high-precision micromachiningof metals. Nearly no heat affected zones next to the laser processed microstructures and, in the caseof the sintered hard metal, no decomposition or segregation due to the fs-laser action was observed.

(a)

(b)

Figure 1: (a) SEM micrographs of 3D microstructures with a depth of 100 μm in tungsten carbide (microstructuring parameters:
27 m Gaussian radius of the focused laser beam on the sample, ablation of 100 layers with focus setpoint tracing of
1 m from layer to layer, fluences: 1.37 J/cm, pulse to pulse distances: 8 m, post-treatment in a ultrasonic alcoholbath and with cellulose acetate to remove some debris).
(b) Ablated depth per pulse for tungsten carbide as a function of laser fluence (structuring parameters: 400 m x 400
m ablated area, 27 m Gaussian radius of the focused laser beam on the sample surface, beam scanning with 7
m pulse to pulse distance, ablation of 4 layers without focus setpoint tracing).

75

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laser Induced Forward Transfer: A Compact Machine
1

1

2

1

D. Riester , S. Seiler , S. Genov , S. Engelhardt , E. Bremus-Köbberling, A. Gillner

1

1- Fraunhofer-Institute for Laser Technology, Steinbachstrasse 15, 52074 Aachen, Germany
2- Fraunhofer Institute for Interfacial Engineering and Biotechnology, Nobelstrasse 12, 70569 Stuttgart

dominik.riester@ilt.fraunhofer.de
In applications of medical engineering (e.g. microarray production) and polymer electronics, highly
viscous or solid, expensive substances are to be transferred. Procedures like inkjet-printing impose
strict requirements on the ink. Furthermore, a lot of material is wasted due to dead volumes.
By means of the LIFT-process, high viscous or solid substances can be transferred without any
damage and with minimal loss of material, at a spot size of 10 m.

(a)

(b)

Figure 1 (a) Machine for LIFT. 355 nm Microchiplaser (CryLas) and laser scanner (ScanLab) integrated(b) microarray of a protein solution (50 g/mL Laminin in 80% Glycerin-Water solution (v/v))

The LIFT-machine meets the following specifications:
It is compact and easy to transport. Hence it is usable in a flow-box. Ink carriers can be processed
automatically. Furthermore the print surface is automatically positioned. Target and substrate are
moveable towards each other. As a result it has been ensured that the carrier for materials to betransferred can be processed entirely, and that the carrier and the surface to be coated can bepositioned relative to each other. Thus any outline is fashionable and complex structures are coatablewith a minimal loss of coating substance.

76

Femtosecond laser micromachining enables optofluidic
sensing in lab-on-a-chip
R. Osellame, G. Cerullo
Istituto di Fotonica e Nanotecnologie (IFN) – CNR and Dipartimento di Fisica – Politecnico di Milano
Piazza Leonardo da Vinci 32, 20133 Milano, Italyroberto.osellame@polimi.it
Permanent modifications of the refractive index in transparent materials can be obtained by tightly
focusing femtosecond laser pulses. Exploiting this index gradient, a wide variety of waveguidedevices can be produced [1,2]. Advantages of femtosecond laser micromachining, with respect tostandard techniques, are the capability of direct device writing without any photolithographic process
and the possibility of fabricating three-dimensional waveguide in the volume of the substrate.
In addition, femtosecond-laser irradiation of fused silica followed by chemical etching in HF solution
allows the manufacturing of directly buried microfluidic channels, due to the enhanced (by up to twoorders of magnitude) etching rate of the irradiated material with respect to the pristine one. This opens
the possibility of using a single femtosecond laser system for the production and the integration of
microfluidic channels and optical waveguides [3].

Figure 1 Scheme of femtosecond laser direct writing of photonic devices (waveguides, splitters,…) in a lab-on-a-chip for
fluorescent sensing of the biomolecules flowing in the microchannel.

A lab-on-chip (LOC) is a device that squeezes onto a single glass substrate the functionalities of abiological laboratory. Femtosecond-laser micromachining is particularly suited for the integration of
optical waveguides (or more complex photonic devices such as splitters and interferometers) inside apre-existing LOC (Fig. 1)[4,5] or even to fabricate the whole optofluidic chip [5,6]. We exploit thistechnology to integrate both fluorescent [4] and label-free [5] detection in capillary electrophoresis
microchips; as well as to produce all-femtosecond-laser-fabricated biochips for cell analysis [6].
[1] R.R.Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nature Photon. 2, 219 (2008).
[2] G. Della Valle, R. Osellame and P. Laporta, “Micromachining of photonic devices by femtosecond laser pulses,” J. Opt. A:
Pure Appl. Opt. 11, 013001 (2009).
[3] R.Osellame et al., “Integration of optical waveguides and microfluidic channels both fabricated by femtosecond laser
irradiation,” Appl. Phys. Lett. 90, 231118 (2007).
[4] R.Martinez et al., “Integration of femtosecond laser written optical waveguides in a lab-on-chip,” Lab Chip 9, 91 (2009).
[5] A. Crespi et al., “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-freedetection,” Lab Chip, in press, (2010). DOI: 10.1039/B920062B[6] N. Bellini et al., “Femtosecond laser fabricated monolithic chip for optical trapping and stretching of single cells,” Optics
Express, in press (2010).

77
11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany
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



              

             
                                     
          
            
             
                


              
             
            

           

                


             
            
             
             
          
              


             
 
            


 
 
 
 
 


78Development of a Laser-stabilised Gas Metal Arc
Cladding Process
A. Barroi, J. Hermsdorf, R. Kling
Laserzentrum Hannover e.V., Hollerithallee 8, 30419 Hannovera.barroi@lzh.de
In industries where tools and mechanical parts experience wear or corrosion, effective coating
techniques are required that are accurate, energy efficient, cheap and fast. To satisfy this requirement
we are developing a process that uses a diode laser with a wavelength of 811 nm for stabilisation of agas metal arc cladding process (LSGMA cladding). The potential of high-contour accuracy, forexample, will lead to decreased effort in form finishing.
In previous studies, guidance and stabilisation of the gas metal electric arc using low-power Nd:YAG
laser radiation has been shown. Basic process parameters for enhancing the electric arc wereobtained. This paper shows new results using a diode laser with an optimized wavelength of 811 nm.
Results with hard steel metals are presented concerning a change in GMA technology reducing theinduced thermal stress within the material.

Figure 1: Diode-laser-stabilised multi-layer hard steel clad with a length of 200 mm and a section of 6.5 mm x 6.5 mm

Investigations on clads as pictured in Fig. 1 covering seam geometry, heat-affected zone, deposition
rate and increase of travelling speed of over 100% compared to the unstabilized process will bepresented.

79

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

In Vivo Writing using Two-Photon-Polymerization
1

2

3

1

Jan Torgersen , Antoine Baudrimont , Niklas Pucher , Klaus Stadlmann , Klaus
1
3
3
1
Cicha , Christian Heller , Robert Liska , Jürgen Stampfl
1- Institute of Material Science and Technology, Vienna University of Technology, Favoritenstrasse 9-11 1040 Vienna, Austria
2- Department of Chromosome Biology, Max F. Perutz Laboratories, Vienna Biocenter, Austria
3- Institute of Applied Synthetic Chemistry, Vienna University of Technology, Austria

jan.torgersen@gmx.at

Figure 1: C. elegans captured in a scaffold built by Two-Photon-Polymerization

Two-Photon-Polymerization (2PP) is a fast developing method for the micro- and nanostructuring of
three-dimensional parts. The manufacturing of biocompatible structures using this technique is apromising field as it fulfills the demand for parts with high feature resolution. This paper reports the
fabrication of scaffolds using methacrylate-based photopolymers with embedded living organisms(Caenorhabditis elegans). The structuring was performed with a pulsed near-infrared laser with awavelength of 810nm and adjustable power up to 160mW. Using a 20x magnification microscope
objective with a numerical aperture of 0.4, a high resolution scaffold with a base area of 300x300m
and a height of 80m could be fabricated (see figure). Taking advantage of high laser intensities(writing speed: 300m/s) the structuring process took only 12 minutes.
The required laser intensities do not cause damage at the cellular level for the model organism sincebiological tissues are very transparent to red and infrared light. Due to the high transparency,
environmental stress for the organism is of chemical origin only. The limiting factor for in-vivo-writingis therefore the toxicity of the resin. The toxicity increases with the reactivity of the resin; therefore
there is a trade-off between polymerization time and toxicity in the in-vivo-writing process. As the resin
used for the fabrication of the scaffold was rather reactive, polymerization time in this work was kept
short (<30min). To optimize the conditions we tested the toxicity and reactivity of different resins witha focus on water-based, biocompatible and biodegradable hydrogels together with water soluble,
near-infrared initiators suitable for 2PP.

80

A new additive technique for laser precision
microfacturing: laser microcladding
F. Lusquiños, R. Comesaña, J. del Val, A. Riveiro, F. Quintero, J. Pou1
1- Departamento de Física Aplicada, Universidad de VigoETS Ingenieros Industriales. Vigo, 36310, SPAIN

Main author email address: jpou@uvigo.es
The technologies used for manufacturing metallic products within the field of microproducts show a relatively
limited development compared to silicon technologies [1]. In the world of the industrial laser technologies,
examples of micro-technologies can be found mainly within the subtractive techniques category, such as
microcutting and microdrilling. The challenge is to adapt the laser surface cladding technique, an additivetechnique, to the scale of micro engineering [2]. In conventional laser cladding technique applied on macroprocessing, the heat affected zone and the distortion of the substrate, are not a main concern as a general rule.
However some applications exist where these parameters are critical because of the laser interaction zone isclosed to sensitive elements or the geometrical requirements are highly demanding. In order to provide anadequate response to this challenge, a new experimental configuration has to be developed based on a highly
stable high laser power, with high beam quality and a powder stream carrying micron and submicron particles.
This works collects our efforts to make this new concept real extending the operation range of the laser cladding
in order to produce microcoatings. The feasibility of this new technique has been tested with a systematic studyof different precursor materials to create a hard coating whose geometrical and mechanical properties have been
evaluated.

(a)

(b)

Figure 1. (a) Block diagram of the new experimental system. (b) Representative example of a track cross section obtained bylaser micro-cladding.

The clads obtained will face up to the production of large area coating with low thermal loading. In addition,
fabrication of pieces with high dimensional accuracy and low dimensions can be dealt with this new
micro-cladding technique. Reparation of defective microparts, surface functionalisation of small areas, or rapid
fabrication of prototypes are areas of application of this rapid one step microcoating technique.
[1] L. Alting, F. Kimura, H.N. Hansen, G. Bissacco, Micro Engineering, CIRP Annals – Manufacturing Technology, vol. 52,
pp.635-657, (2003).
[2] F. Lusquiños, R. Comesaña, A. Riveiro, F. Quintero J. Pou. Fibre laser micro-cladding of Co-based alloys on stainless steel,Surface & Coatings Technology, vol. 203, pp 1933-1940, (2009).

81

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

3D laser lithography and nanoimprint lithography:
versatile methods for the micro- and nano fabrication ofphotonic structures
V. Schmidt, H. Pichler, V. Satzinger, M. R. Belegratis, and J. R. Krenn
Institute of Nanostructured Materials and Photonics, Joanneum Research,Franz-Pichler Strasse 30, A-8160 Weiz, Austria

volker.schmidt@joanneum.at
The development of optical micro systems requires sophisticated methods for the fabrication of
prototypes and small series. Starting from the scratch, an optical design is usually developed bymeans of optical simulations that result in a CAD design of a prototype. This prototype is fabricated atvery high precision by means of a laser direct writing method such as the two-photon based 3D laser
lithography. The flexibility of this method supports the optical design in every sense, since nearly
arbitrary complex shapes are fabricated and the time from the design to the physical structure israther short. The applications in micro systems range from e.g. diffractive structures (flat optics) for
beam shaping, micro refractive optics, coupling structures for organic LEDs, photo diodes andwaveguides to master structures for organic electronics as alternative to electron beam lithography,
which are used for replication by means of nanoimprint lithography.
We use a direct laser writing system from Nanoscribe [1] for the fabrication of 3D photonic prototypes.
This system is build up on an inverted microscope and is equipped with a coarse motor stage and apiezo stage for accurate positioning. This combination enables the fabrication of structures withdimensions from several microns up to several centimetres without changes in the setup. The
achievable spatial resolution is given by the smallest voxel diameter of the tightly focused laser beam
(100x microscope oil immersion objective, NA=1.4), which is approx. 100-150nm in SU-8.
We report the fabrication of photonic structures in SU-8 (cf. Fig. 1), which are directly used in optical
micro systems or act as master structures for nanoimprint replicas via a PDMS mold.

a)b)

Figure 1 a) round sawtooth structure made from SU-8 by means of two photon based laser lithography; b) detail of a linear
sawtooth structure with similar geometry showing a very smooth surface, which is required for high quality micro optics.

[1] www.nanoscribe.de82

Femtosecond laser ablation of dentin:
A characterisation study
12

1

Sandra Alves , Vitor Oliveira , Sónia Eugénio , Rui Vilar

1

1

Instituto Superior Técnico and ICEMS – Instituto de Ciência e Engenharia de Materiais e Superfícies, Avenida Rovisco Pais,
1049 –001 Lisbon, Portugal
2
Instituto Superior de Engenharia de Lisboa and ICEMS – Instituto de Ciência e Engenharia de Materiais e Superfícies, Rua
Conselheiro Emídio Navarro nº 1, 1959 – 007 Lisbon, Portugal

sandra.alves@ist.utl.pt
Ultrafast lasers seem to be able to overcome some of the detrimental effects of conventional lasers[1,2]
They are fast, efficient and do not
and dental drills for hard dental tissues removal applications.
[3]
have significant thermal effects on teeth.
The main purpose of this study is to evaluate the changes in surface structure, constitution andchemical composition induced in human dentin by irradiation with an ultrafast laser (Yb:KYW chirpedpulse-regenerative amplification infrared laser system) with pulse duration of about 500 fs at a2
wavelength of 1030 nm, using fluences ranging from 2 to 8 J/cm .
The ablation threshold for non-carious dentin was determined by submitting samples to increasing
fluences. The surface topography of the ablated areas was observed by scanning electron
microscopy (SEM) in order to choose the processing parameter ranges that were used to prepare
samples for systematic characterisation.
The chemical alterations of the dentin surface layer were investigated by X-ray photoelectron
spectroscopy, Fourier transform infrared spectroscopy and Raman spectroscopy.

(a)

(b)

Scanning electron micrographs showing the dentin surface after laser treatment (a) and the induced morphological changes (b)[1] Camerlingo, C. et al;” Er: YAG laser treatments on dentine surface: micro-Raman spectroscopy and SEM analysis”, Journalof Dentistry, 32(5): 399-405, (2004).
[2] Serbin, J. et al; “Femtosecond lasers as a novel tool in dental surgery”, Applied Surface Science, 197: 737-740, (2002).
[3] Kruger, J. et al; “Femtosecond pulse laser ablation of dental hydroxyapatite and single-crystalline fluoroapatite”, Applied
Physics a-Materials Science & Processing, 69: 403-407, (1999).

83

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Synthesis of ZnO nanowire heterostructuresby laser ablation and their optical characteristics
D. Nakamura, T. Matsumoto, A. Kumeda, K. Toya, K. Okazaki, M. Higashihata, T. Okada
Graduate School of Information Science and Electrical Engineering, Kyushu University

dnakamura@ees.kyushu-u.ac.jp
Zinc oxide (ZnO), a II–VI semiconductor, which has a direct wide band-gap of 3.37 eV at room temperature
and a relatively large exciton binding energy of 60 meV, is one of the promising materials in UV
optoelectronic applications. In addition, ZnO nanowire has attracted a great attention for next generation
nanodevices because it has a superior crystalline quality, a better electrical/optical quality, a freedom tochoose substrate and a large surface area to volume ratio. For the practical optoelectronic applications
based on the ZnO nanowires, however, three important tissues are essentially required: p-type doping,growth control and fabrication of heterostructures. Synthesis of phosphorus- and nitrogen-doped ZnO
nanowires, have shown p-type conductivity[1], and core-shell ZnO/ZnMgO quantum well heterostructure[2]by PLD using a target manipulator have been reported in these years. On the other hand, we have beensucceeded in growing ZnO nanostructures, such as vertically-aligned ZnO nanowires, by nanoparticleassisted pulsed-laser deposition (NAPLD) without using any catalyst. In this paper, we describe progressesof synthesis of ZnO nanowire heterostructure by NAPLD using a multi-target changer system. In the use of
the multi-target changer system, sintered ZnO targets can be changed without disturbing chambercondition during synthesis of ZnO nanowires. Furthermore, we recently found that several ZnOnanostructures such as a film, nanowires and nanowalls can be synthesized in the same chamber. Thus, it
is expected to fabricate various ZnO nanowire Heterostructures.
In the experiment, sintered cylindrical ZnO source targets were used in synthesizing ZnO nanowires. An
c-plane sapphire substrate was put on a SiC heater and heated to 600-800 ºC in a vacuum chamber filledwith a background gas of argon or oxygen. The ZnO target was ablated with third harmonic generation(THG) of a Q-switched Nd:YAG laser at 355 nm with a repetition rate of 10 Hz and a fluence of about 1.3
J/cm2, in the chamber for around 30 min. The morphology of the as-deposited products was analyzed byscanning electron microscopy (SEM). The optical properties of the ZnO nanowires were investigated byobserving the photoluminescence (PL) with THG of other Q-switched Nd:YAG laser.
As an initial demonstration of fabricating the film-wire heterostructure, ZnO nanowires were synthesized
after deposit a ZnO film. The film was deposited at a substrate temperature of 650 ºC and oxygen gas
pressure of 26 mTorr. Then, the nanowires
were synthesized on the film at thetemperature of 750 ºC and argon gas of 200
Torr in the same chamber. Fig.1 shows theSEM image of the ZnO nanowires on the film.
It was found that the vertically aligned low
density ZnO nanowires with average length ofabout 2 mm. With respect to PL characteristic,
the UV emission centered at 390 nm, which isthe contribution of the near band edge
emission of the wide band-gap ZnO, and novisible light emission at green emission band
were observed from the synthesizednanowires. This indicates a very low
concentration of deep-level defects inside ZnO
lattices. We are trying to fabricate theheterostructure such as p-n junction and
Figure.1 SEM image of ZnO nanowires grown on ZnO thin film.
core/shellstructure using the multi-targetchanger system.
[1] B. Q. Cao, M. Lorenz, A. Rahm, H. von Wenckstern, C. Czekalla, J. Lenzner, G. Benndorf and M. Grundmann, Nanotechnology 18, 455707(2007)[2] B. Q. Cao, J Zúñiga-Pérez, N. Boukos, C. Czekalla, H. Hilmer, J. Lenzner, A. Travlos, M. Lorenz and M. Grundmann, Nanotechnology, 20,305701 (2009)84

Influence of selective laser melting process parameters
on morphology of single vectors from metal powders
I. Yadroitsev, I. Yadroitsava, Ph. Bertrand, I. Smurov
Ecole Nationale d’Ingénieurs de Saint-Etienne (ENISE), DIPI Laboratory, 58 rue Jean Parot, 42023 Saint-Etienne, France

email address: yadroitsev@enise.fr
Selective Laser Melting (SLM) is a powder-based additive manufacturing capable to produce parts
layer-by-layer from a 3D CAD model. Currently there is a growing interest in industry (from aerospace
to biomedical) for applying this technology [1, 2]. SLM has a strong miniaturization potential while
maintaining high geometrical complexity of the parts since it uses small-diameter laser beams andfine powders. Properties of the manufactured parts depend strongly on the quality of each single
laser-melted track (“vector”) and each single layer [3, 4]. Statistical relations between the principal
SLM parameters (laser power, scanning speed, powder layer thickness, powder particle size) andgeometrical characteristics of the synthesized single vectors are subject of this study. For stainlesssteel (SS) grade 904L –16 m and –7 m powders, three layer thicknesses are chosen: 60, 90 and
120 m. A Greco-Latin square design (Tab. 1) is used to control characteristics of the sinteredvectors: width and height of vector (w1, h1), width of contact zone (w2), ratio (w2/w1), remelting depth(h2), ratio (h2/h1), average value of the contact angle (). For each case, three-by-three vectors ineach series are sintered (laser power is 50, 37.5, and 25 W; scanning speed is 0.05, 0.10, and0.15 m/s). Descriptive statistics are calculated for 108 single vectors. Analysis of variance (ANOVA)
has permitted to establish a hierarchy of the process parameters for SS grade 904L powders withdifferent particle size (–7 m and –16 m) listing them in descending order of importance as follows:
laser power, powder layer thickness, scanning speed and, finally, powder particle size (Fig. 1).
Table 1. Test plan with four factors and three levels (Greco-Latin square)Power 25 W
Power 37.5 W
Power 50 W

Layer thickness 60 m
Scanning speed 0.15 m/sScanning speed 0.05 m/sScanning speed 0.10 m/s(a)Layer thickness 90 m
Scanning speed 0.10 m/s
Scanning speed 0.15 m/sScanning speed 0.05 m/s

Layer thickness 120 m
Scanning speed 0.05 m/sScanning speed 0.10 m/s
Scanning speed 0.15 m/s(b)

Figure 1. The effect of laser power (a) and powder layer thickness (b) on geometrical characteristics of single vectors(significance level p<0.05)[1] Terry Wohlers, Wohlers Report 2008: State of the industry, annual worldwide progress report, 2008.
[2] P. J. Bartolo et al. (eds.), Virtual and rapid manufacturing: advanced research in virtual and rapid prototyping, Taylor &Francis Group, 2008.
[3] I. Yadroitsev, Ph. Bertrand, I. Smurov, Parametric analysis of selective laser melting technology, Applied Surface Science,
253, 8064–8069, 2007.
[4] A. Simchi, Direct laser sintering of metal powders: mechanism, kinetics and microstructural features, Materials Science &Engineering A, 428, 148–158, 2006.

85

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Mechanism study of gliding movement of Phormidium in
nano-aquariums integrated with different functions
fabricated by femtosecond laser
1

1

2

2

2

Y. Hanada , K. Sugioka , I. Ishikawa , H. Kawano , A. Miyawaki , K. Midorikawa

1

1- RIKEN-Advanced Science Institute: 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
2- RIKEN Brain Science Institute: 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

Main author email address: y-hanada@riken.jp
We demonstrate fabrication of nano-aquarium microchips integrated with functional microcomponents
for mechanism study of Phormidium gliding to a seedling root using a femtosecond (fs) laser. Fs laser
direct writing followed by annealing and successive wet etching in dilute hydrofluoric (HF) acidsolution resulted in formation of three dimensional (3D) hollow microstructures embedded inTMphotostructurable glass (FOTURAN ). Last year, we succeeded in extraordinally shortening
observation time of unique phenomenon of Phormidium gliding to the seedling root, resulted in
Phormidium assemblage for growth acceleration of seedling using nano-aquarium possessing simple
microfluidic structures. In addition, integration of optical filter in the nano-aquarium revealed that lightillumination is required for the gliding movement of Phormidium. The optical filter was realized by thefs laser exposure followed by thermal treatment, since the processed regions became lithium
metasilicate crystallite which has brown color. Figure 1 shows sequential microscopic images ofPhormidium in the microchannel, part of which is covered with optical filters.

0 hr

1 hr

2 hrs

0.5 mmFigure 1 Sequential microscopic images of Phormidium in the microchannel covered by fabricated optical filters.

From Fig. 1, one can see that Phormidium doesn’t glide to the seedling root within 2 hrs, while itglides to the root in the microchannel with no optical filters around the microchannel. In this talk, wewill discuss the light intensity required for gliding movement of Phormidium using fabricated nanoaquarium integrated with optical filters of various transmissions. In addition, identification of attractant
secreted from the root, which also needs for the gliding movement of Phormidium, is carried out using
nano-aquarium integrated with different functions.
[1] Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, K. Midorikawa, Biomed. Microdevices. 10 (3), pp. 403-410,
2008.

86

F2-Laser Formation of Transparent Protective Layer
onto Polycarbonate for Lightweight Window
1

1,2

2

M. Okoshi , Y. Nojima , H. Nojiri , N. Inoue

1

1- Department of Electrical and Electronic Engineering, National Defense Academy,
1-10-20 Hashirimizu, Yokosuka, Kanagawa 239-8686, Japan
2- RENIAS Co., Ltd., 200-76, Obara, Nutanishi, Mihara, Hiroshima 729-0473, Japanokoshi@nda.ac.jp
The window material of car, bus, truck, train, ship, plane, and so on is usually made of silica glass(SiO2) because of its high optical transparency, high scratch-resistance, and high chemical stability.
However, the windowpane is basically heavy and fragile. Transparent, light polycarbonate (PC) is oneof the leading candidates for lightweight window material. However, PC shows a poor scratchresistance; conventionally a protective coat is formed on PC before practical uses. The protective coatis made of polymer, which is composed of silicone ([SiO(CH3)2]n) resin, acrylic resin, or melamine
resin. In general, the protective coat made of silicone is the best for the scratch- and chemicalsresistances, but the scratch-resistance is still not sufficient as an alternative material of automobile
windowpane.
In this paper, a transparent SiO2 protective layer was formed on the protective coat made of silicone
on PC by the irradiation of a 157 nm F2 laser. In our previous work, silicone rubber surface wasphotochemically modified into carbon-free SiO2, accompanied by swelling of the F2 laser-irradiatedarea [1,2]. Thus, we have thought out that the conventional silicone-protective coat on PC can be
modified into SiO2 by the F2 laser irradiation for improving the scratch-resistance of the siliconeprotective coat, for developing the lightweight automobile window.
Figure 1 shows the optical microscope photographs of the samples after the Taber abrasion test. The
scratches were clearly observed in the case of a bare PC plate (Fig.1(a)). After the F2 laser irradiation,
the scratch-resistance of the sample is quite high ((Fig.1(b))). As a result, the haze value of the F2laser irradiated sample was successfully reduced from 41.3 to 3.6, compared with the case in a barePC.

    

(a)

  

    (b)Figure 1 Optical microscope photographs of the surfaces of (a) a bare PC and (b) the F2-laser irradiated samples after theTaber abrasion test.
1

1[1] H. Takao, M. Okoshi , N. Inoue : “Fabrication of SiO2-humps on silicone rubber using F2 laser” Jpn. J. Appl. Phys. 41(10A),
pp.L1088-L1089 (2002).
1
1[2] M. Okoshi , T. Kimura, H. Takao, N. Inoue , T. Yamashita: “Photochemical modification of silicone films using F 2 laser for
selective chemical etching” Jpn. J. Appl. Phys. 43(6A), pp.3438-3442 (2004).

87

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

3D sub-diffraction-limit patterning of hybrid polymers
with visible and infrared laser pulses
1,2

1

S. Steenhusen , R. Houbertz , G. Sextl

1,2

1- Fraunhofer ISC, Neunerplatz 2, 97082 Würzburg, Germany
2- Julius-Maximilians-Universität Würzburg, Chemische Technologie der Materialsynthese,
Röntgenring 11, 97070 Würzburg, Germany

soenke.steenhusen@isc.fraunhofer.de
The use of visible and infrared femtosecond laser pulses for the patterning of inorganic-organic hybrid®
polymers (ORMOCER s) will be presented and discussed. Laser pulses are obtained from a low-costdiode-pumped Ytterbium laser system emitting at 1030 nm with optional second harmonic generation.
By using suitable photoinitiators, two types of patterning strategies are enabled: a three-photon
absorption process at 1030 nm, and a two-photon absorption process when using the second
harmonic at 515 nm. For the latter, we will present high quality 3D photonic crystal structures andarbitrary microstructures (Figure 1 (a)). In comparison to formerly presented studies on two-photon
polymerization (2PP) initiated at 800 nm [1], the process efficiency is significantly higher when using
visible light. Besides, a study on volume pixel (voxel) sizes is performed and discussed with respect tothe underlying photochemical parameters such as two-photon-absorption cross-section, radical
diffusion, quenching, and the choice of polymerizable moieties of the hybrid polymer.
Furthermore, a z-scan experiment was established to investigate the non-linear properties of thephotoinitiators [2]. Although there are pioneering publications for 2PP with visible fs pulses [3,4], thisis, to our knowledge, the first comprehensive study on voxel growth mechanisms at this wavelength.

(a)

(b)
®

Figure 1: (a) Hollow ball (source file after [5]) fabricated in ORMOCER with an average power of 34 W and 515 nm laser
pulses (repetition rate 10.1 MHz, pulse duration 350 fs). (b) High aspect ratio photonic crystal structure created with threephoton-polymerization (3PP) at 1030 nm. An average power of 6 mW was necessary to exceed the polymerization threshold.

Additionally, microstructures fabricated by 3PP such as, for example, the photonic crystal structure(Figure 1(b)), are presented. The fabrication of these structures requires a significantly higher pulse
energy indicating a non-linear absorption process of higher order. For both processes, the 2PP and
the 3PP process, a spatial resolution beyond the diffraction limit can be easily achieved.
[1] J. Serbin, A. Egbert, A. Ostendorf, B.N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, M.Popall,"Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics",
Optics Letters, 28(5), 301-303, (2003).
[2] M. Sheik-bahae, A.A. Said, E.W. Van Stryland, "Sensitive measurement of optical nonlinearities using a single beam", IEEE
Journal of Quantum Electronics, 26(4), 760-769, (1990).
[3] W. Haske, V.W. Chen, J.M. Hales, W. Dong, S. Barlow, S.R. Marder, J.W. Perry, "65 nm feature sizes using visible
wavelength 3-D multiphoton lithography", Optics Express, 15(6), 3426-3436, (2007).
[4] J. Li, B. Jia, M. Gu, "Engineering stop gaps of inorganic-organic polymeric 3D woodpile photonic crystals with post-thermal
treatment", Optics Express, 16(24), 20073-20080, (2008).
[5] http://www.georgehart.com/rp/rp.html

88Laser-controlled Injector for Biological Applications
T. Ooie1, M. Tanaka1, T. Nakahara1, Y. Yamachoshi1, R. Akamine1,
M. Kataoka1, Y. Baba1,2
1- AIST, Health Technology Research Center, Japan, 2217-14 Hayashi-cho, Takamatsu, Kagawa 761-0395, Japan
2- Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603,Japantoshihiko-ooie@aist.go.jp
Laser controlled injector has a simple driving unit and work with less buffer volume. We havedeveloped a disposable injector head driven by a pulsed laser [1]. It is a drop-on-demand head,applicable to laser-transparent liquid. It requires only 5l of sample for normal operation. The speed
and volume of ejected droplets depend on the pulse energy of the laser and the nozzle diameter,
respectively.
By using the injector, small immobilized antibody dots for P1CP (procollagen I carboxyterminal
propeptide) [2] antigen, of which detection sensitivity was comparable to that formed by an injector
driven by piezo-electric unit, on PMMA and COC plates were successfully formed.

50

COC
Polymer coated
Exposure time：15min－ Piezo-electric injector
Laser-controlled injector

100
4.0x106
Signal level (arb. unit)

Number ofdroplets

LIJ

2.0x106
PIJ

PIJ
200m

0.0
0

Figure 1 Photographs of immobilized antibody dots
on COC plate by laser-controlled injector (LIJ) andpiezo-electric injector (PIJ), respectivily.

50

100
150
Number of droplets

200

250

Figure 2 Results of antigen detection by the
antibody dots formed by laser-controlled injector.

[1] T. Ooie, M. Tanaka, T. Nakahara, S. Hyodo, Y. Shinohara, H. Miyashita, Y. Baba, Laser-controlled pico-injector for nanobiodevices, proc. LPM2007, (2007)[2] M. Tanaka, T. Ooie, Y. Yamachoshi, T. Nakahara, M. Hino, R. Akamine, M. Kataoka, Development of a Single-Channel
Multiple Immunoassay Chip, proc. LAMP2009, (2009).

89

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

3D Polymerization for Functional Devices
Qi-Dai Chen1, Hong Xia1, Yong-Lai Zhang1, Hong-Bo Sun1,2
1- State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699
Qianjin Street, Changchun 130012, China
College of Physics, Jilin University, 119 Jiefang Road, Changchun 130023, China

hbsun@jlu.edu.cn; http://www.lasun-jlu.cn/
Since the first application the two-photon photopolymerization technology on fabrication of threedimensional (3D) photonic crystal structures [1], the method has attracted a lot of research efforts
because of its unique merits like the high fabrication resolution down to nanometers and the 3D
prototyping capability [2-15]. Various exquisite structures such as a sculpture of micro-bull, spring,and rotating wheels have been demonstrated. However, an open problem is, is that all? In order toanswer this question, our group in the passed several years has been focused on the practical use of
the technology on micro-optics, micromachines, microfluids and microsensors. In this presentation,
we will present our recent progress along this line. Shown in Fig. 1 is an aspheric microlens [Fig. 1(a)],an aspheric microlens array and its use for high-resolution imaging. [Fig. 1(b)].

Figure 1 Examples of micro-optical components: (a) a scanning electronic microscope side view of a aspheric micro lens; and(b) a micro lens array (left), the focal spot image (middle) and its use for high resolution (NA=0.52) imaging.
[1]

H. B. Sun, S. Matsuo, H. Misawa, Three-dimensional photonic crystal structures achieved with two-photon-absorption
photopolymerization of resin, Appl. Phys. Lett. vol. 74, pp. 786-788 (1999).
[2] S. Kawata, H. B. Sun, T. Tanaka, K. Takada, Finer features for functional microdevices, Nature, vol. 412, pp698-698(2001).
[3] Q. D. Chen, D. Wu, L. G. Niu, J. Wang, X. F. Lin, H. Xia H, H. B. Sun, Phase lenses and mirrors created by laser
micronanofabrication via two-photon photopolymerization, Appl. Phys. Lett. vol. 91, 171105 (2007).
[4] S. Nakanishi, S. Shoji, S. Kawata, H. B. Sun, Giant elasticity of photopolymer nanowires, Appl. Phys. Lett. vol. 91, 063112(2007).
[5] K. Kaneko, K. Yamamoto, S. Kawata, H. Xia, J. F. Song, H. B. Sun, Metal-nanoshelled three-dimensional photonic lattices,
Opt. Lett. vol. 33 pp. 1999-2001 (2008).
[6] Q. D. Chen, X. F. Lin, L. G. Niu, D. Wu D, W. Q. Wang, H. B. Sun HB, Dammann gratings as integratable micro-opticalelements created by laser micronanofabrication via two-photon photopolymerization, Opt. Lett. vol. 33, pp. 2559-2561(2008).
[7] D. Wu, L. G. Niu, Q. D. Chen, R. Wang, H. B. Sun, High efficiency multilevel phase-type fractal zone plates, Opt. Lett. vol.
33, pp. 2913-2915 (2008).
[8] K. Takada, K. Kaneko, Y. D. Li, S. Kawata, Q. D. Chen, H. B. Sun, Temperature effects on pinpoint photopolymerizationand polymerized micronanostructures, Appl. Phys. Lett. vol. 92, pp. 041902, (2008).
[9] J. Wang, H. Xia, B. B. Xu, L. G. Niu, D. Wu, Q. D. Chen, H. B. Sun, Remote manipulation of micronanomachines
containing magnetic nanoparticles, Opt. Lett. vol. 34, pp. 581-583 (2009).
[10] K. Takada, D. Wu, Q. D. Chen, S. Shoji, H. Xia, S. Kawata, and H. B. Sun, Size-dependent behaviors of femtosecond
laser-prototyped polymer micronanowires, Opt. Lett. vol. 34, pp. 566-568 (2009).
[11] D. Wu, Q. D. Chen, L. G. Niu, J. N. Wang, J. Wang, R. Wang, H. Xia, and H. B. Sun, Femtosecond laser rapid prototypingof nanoshells and suspending components towards microfluidic devices, Lab Chip, vol. 9, pp. 2391-2394 (2009).
[12] D. Wu, Q. D. Chen, B. B. Xu, J. Jiao, Y. Xu, H. Xia, H. B. Sun, Self-organization of polymer nanoneedles into large-areaordered flowerlike arrays, Appl. Phys. Lett. vol. 95, 091902 (2009).
[13] H. Xia, W. Y. Zhang, F. F. Wang, D. Wu D, X. W. Liu, L. Chen, Q. D. Chen, Y. G. Ma, H. B. Sun, Three-dimensional
micronanofabrication via two-photon-excited photoisomerization, Appl. Phys. Lett. vol. 95, 083118 (2009).
[14] D. Wu, Q. D. Chen, L. G. Niu, J. Jiao, H. Xia, J. F. Song, H. B. Sun, 100% fill-factor aspheric microlens arrays (AMLA) with
sub-20-nm precision, IEEE Photon. Technol. Lett. vol. 21, pp. 1535-1537 (2009).
[15] X. F. Lin, Q. D. Chen, L. G. Niu, T. Jiang, W. Q. Wang, H. B. Sun, Mask-free production of integratable monolithic micro
logarithmic axicon lenses, IEEE J. Lightwave Technol. vol. 34 (2009).

90

Plasmonics Enhanced Femtosecond Laser
Nanoprocessing: Modeling and application tobiology
M. Meunier, E. Boulais, R. Lachaine and J. Baumgart
Laser Processing Laboratory, École Polytechnique de Montreal, Department of Engineering Physics
Succursale Centre-Ville, PO Box 6079, Montreal, PQ, Canada , H3C 3A7

michel.meunier@polymtl.ca
When an electromagnetic wave hits a metallic nanostructure of a size less than its wavelength, thewave’s energy is absorbed and locally reemitted as near field in close proximity to the nanostructure,
but with a multiplied intensity. This local field enhancement is mainly attributed to the surface plasmon
resonance of the nanostructures and can be used to perform nanoprocessing of the medium. The
irradiation of a nanostructure imbedded in a biological media by a femtosecond (fs) laser could results
in a highly localized plasma and /or heat production yielding to the nanosurgery of cells. To
understand the basic mechanism of plasmonic enhanced fs laser nanoprocessing in a biologicaltissue, we performed three dimensional simulations to obtain the electromagnetic field distribution, theplasma production and tissue transient temperature distribution and thermodynamic state surrounding
the gold nanostructure irradiated by a fs laser beam. The electromagnetic field distribution is
calculated directly from the Maxwell equations using a finite-element based method. Transient
temperature distribution inside the nanostructure is determined through a two-temperature model.
Significant gold parameters, including heat capacity, thermal conductivity and electron-phonon
coupling constant, are calculated using full quantum treatment. Biological tissue is then modeledusing the Pennes equation. Cavitation and hydrodynamics phenomena are simulated using NavierStokes equations. As an example, we are considering Au nanorods (10 x 41 nm) irradiated by a
2
800nm 45 fs laser pulse at 100 μJ/cm , just under the permanent deformation fluence threshold
Simulation results indicate a temperature rise of T ~ 370K in the medium, while the correspondingT is negligibly small (< 0.1K) when nanorods are absent. Plasma is created around thenanostructure and diffuses deep in the medium, creating a several hundred nanometers radiusdamage zone. Laser interaction also creates strong thermomechanical effects on the surroundingarea. A pressure shockwave of ~200MPa is generated along with a 8nm radius cavitation bubble.
Using pump-probe experiments, variations of the transmitted probe irradiation of the gold nanorods
immersed in water were study in details as a function of the pumplaser fluence and polarization. There is a good agreement between
the pump-probe and the simulation results.
When the gold nanorods are located in close proximity to a cell
membrane, it will induce transient pores due to the plasmonic effects
during laser irradiation, which permit macromolecules, e.g. DNA, toenter the cell. Gene transfer (transfection) has become a very
important tool in biomedical research. The transfection methods
developed in the past are unsatisfactory in terms of efficiency andviability, strongly depending on the cell type used. The combination of
fs-laser pulses and nanostructures is a very promising tool for a highly
efficient, high throughput solution for transfection. Preliminary results
indicate that approximately 400 human melanoma cells per minutewere treated in presence of the membrane impermeable fluorescent2
dye Lucifer Yellow (LY) at a fluence of 80 to 100 mJ/cm . A
perforation efficiency of up to 45% was obtained with a very highviability of ~ 90%.

Figure 1: WM793B melanoma cells
perforated in presence of Lucifer
Yellow (green) and a 6.5 g/ml gold
nanorod concentration (41x10 nm)
using a laser fluence of 100
2mJ/cm . After the treatment, thecells were labelled with Propidium
Iodide (red) to show dead cells and
DAPI (blue) to show all present
cells. Scale bar: 200 m.

91

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Role of gas optical breakdown plasma in material
ablation by short laser pulses.
1

V.I. Konov , F. Dausinger

2

1 - General Physics Institute, Moscow, Russia
2 - Dausinger+Giesen GMBH, Stuttgart, Germany

Main author email address:vik@nsc.gpi.ru
It will be shown that optical breakdown of gas (air), surrounding the sample, can play an important(sometimes vital) role in material ablation by intense laser pulses.
Three particular problems will be discussed.
1. Catastrophic beam profile transformation and high (up to 70%) scattering losses, induced bydense electron cloud that is produced in the gas during the femtosecond laser pulse action, will beconsidered. Corresponding experimental data, including fast pump-probe interferometric studies of
the air breakdown kinetics, will be presented. The effect is described as a result of the so called“conical emission”. The means of minimizing gas breakdown effect on ablation rates and quality,
such as variation of pulse duration and wavelength, gas type and pressure will be discussed.
2. The effect of picosecond laser gas breakdown plasma ignition by microparticles, produced in thecause of material ablation by the previous pulses and floating (up to few seconds) inside the beamcaustic, will be outlined. It will be shown that such plasma can shield the target from the incident
radiation. It was found that majority of these microparticles are charged and application ofelectrical fields can drastically increase gas breakdown threshold.
3. The attention will be paid to the late stages of vapour plasma, expanding into the gas and theformation of long-living plasma volume – “fire ball”. Such plasma has density much lower than the5
atmospheric one and can intensify materials ablation for ultra-high (10 Hz) pulse repetition rates.

92Local oxidation of thin metallic films
under short pulse laser action
1

1

1

1

2

V. Veiko , E. Shakhno , M. Yarchuk , G. Odintsova , A. Poleschuk , V. Korolkov

2

1 - St.Petersburg State University of Information Technologies, Mechanics and Optics,
49 Kronverksky pr., 197101, St.Petersburg, Russia
2 - Institute of Automation & Electrometry Siberian Branch of Russian Academy of Sciences,
1 Acad. Koptjug pr., 630090, Novosibirsk, Russia

veiko@lastech.ifmo.ru
Laser–induced oxidation on thin metallic films with following selective etching is a powerful method for
micropatterning of different structures like photomasks, diffractive optical elements etc.
Nowadays the most important question is how small could be structures produced by this technology,
what are the experimental methods to realize it and what is the nature of theoretical limitations forspace resolution
Under this research will be shown that Arrhenius dependence of oxidation speed from temperature
raises this limit on some orders of magnitude higher then the resolution of thermal image.
Corresponding calculation will be done and will be verified experimentally. From the other handrégimes of laser irradiation (power density, time of irradiation etc) as well as régimes of selective
etching (type of etchant and its concentration), material of thin film and its thickness have also big
influence on the final results.
Most interesting problem in this area now is to check is it possible to oxidize or to modify metallic
films (or surfases) structure under short (nsec) and ultrashort (pcsec, fsec) laser pulses action. The
experiments has been carried out shown selective etching after such kind of laser action.
Experimental and practical results for fabrication of some specific components and devices as
different diffraction components, synthesized holograms will be demonstrated.

(a)

(b)

(c)

Figure.1. a – AFM–image of thermochemical recordinmg on Cr films (exposition time  = 2.6 mks, width of the recorded line <600 nm), b, c – Femtosecond laser dot on Cr film after etching (3D image (b) and cross–section (c)).

Finally it is proved theoretically and experimentally that resolution of above mentioned technology canreach hundreds of nanometers and even less.
This work was supported by RFBR grant 09-02-01065.
[1] V.P. Veiko, S.M. Metev, Laser assisted microtechnology (Springer–Verlag, Heidelberg), (1998).
[2] A.G. Poleshchuk, Techniques for formation of the surface profile of diffractive optical elements, Optics and Laser
Engineering, 29, N 4-5, 289-306,(1998).
[3] V.P. Veiko, E.A. Shakhno, A.G. Poleshchuk et al., Local Laser Oxidation of Thin Metal Films: Ultra-resolution in Theory andin Practice, Journal of Laser Micro/Nanoengineering, 3, N 3, 201–205, (2008).

93

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Two-photon polymerization as method for the fabricationof large scale biomedical scaffold applications
1,2

1

T. Stichel , R. Houbertz , B. Hecht

2

1- Fraunhofer ISC, Neunerplatz 2, 97082 Würzburg, Germany
2 - Julius-Maximilians-Universität, Physikalisches Institut, Lehrstuhl für Experimentelle Physik V,
Am Hubland, 97074 Würzburg, Germany

thomas.stichel@isc.fraunhofer.de
Two-photon polymerization (2PP) using ultra-short laser pulses is already well-known in research
especially for 3D free-form fabrication of optical devices with resolutions down to 100 nm [1-3].
However, the structure dimensions have been restricted to quite small sizes, mainly related to thefocussing optics and to the very long fabrication times. In order to create large patterned samples,
these limitations have to be overcome which is challenging for both, the exposure strategy and theemployed material systems. Up to now, only little is published concerning 2PP as method for a largescale fabrication of patterned structures which might be applied as biomedical scaffold structures.
We will present a novel setup for which allows one to create arbitrary 3D structures using a diodepumped Ytterbium laser system emitting 325 fs laser pulses at 515 nm after second harmonic®
generation using inorganic-organic hybrid polymers (ORMOCER s). The exposure setup enables the
production of large structures which can be in the cm region with a resolution of a few microns. In
addition, a 3D porous inner structure can be provided (Figure 1 (a)), which is required for threedimensional cell growth to support cell adhesion and proliferation. The pore size can be adjusted froma few microns to hundreds of microns, and different pore shapes as well as distinct sample shapes
can be realized to adapt to individual preferences of certain cell types or applications. In Figure 1 (b),a real scale stapes (smallest human bone) implant with porous inner structure fabricated by 2PP isdisplayed.

(a)
®

(b)
3

Figure 1 : 3D structures in ORMOCER . (a) Macro image of a 3 x 3 x 3 mm scaffold structure (re-design from a design of
Phoenix GmbH & Co. KG). (b) SEM image of porous real scale stapes implant.

In addition to the fabrication method, the underlying materials play an important role in the fabrication
process. Thus, the degree of organic cross-linking of inorganic-organic hybrid materials is investigatedby high resolution -Raman spectroscopy for differently processed 3D structures which will becorrelated to the structure quality, and their mechanical stability.
[1] J. Serbin, A. Egbert, A. Ostendorf, B.N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, M.Popall, Femtosecond laserinduced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics, Optics Letters, 28(5), 301-303, (2003).
[2] R. Houbertz, Laser interaction in sol-gel based materials – 3D lithography for photonic applications, Appl. Surf. Sci. 247, 505, (2005).
[3] J. Li, B. Jia, and M. Gu, Engineering stop gaps of inorganic-organic polymeric 3D woodpile photonic crystals with post-thermal treatment, Opt.
Exp. 16(24), 20073-20080, (2008).

94Modelling Laser Induced Periodic Surface Structures
1

2

J.Z.P. Skolski , G.R.B.E Römer , A.J. Huis in ’t Veld

2,3

1- Materials innovation institute M2i, Mekelweg 2, Delft, The Netherlands
2- University of Twente, Faculty of Engineering Technology, Chair of Applied Laser Technology, P.O. Box 217, 7500 AE,
Enschede, the Netherlands
3- TNO Science & Industry, Department Materials Technology, De Rondom 1, 5600 HE, Eindhoven, The Netherlands

j.skolski@m2i.nl
In surfaces irradiated by short laser pulses, Laser Induced Periodic Surface Structures (LIPSS) havebeen observed for over forty years on all kind of materials. These LIPSS are also referred to as “self organizing
structures”, or ripples, consist of wavy surfaces, with periodicity and amplitude equal or smaller than the
wavelength of the laser. Unfortunately, the physical phenomena explaining ripple initiation, growth andtransitions toward other patterns are still not fully understood. Models, explaining ripple initiation and growth,
based on the (laser) parameters, such as fluence and polarization, are frequently discussed in literature. This
paper presents the most promising models, their ability and limits to predict experimental results.

500 nm(a)(b)

Figure 1 : (a) Scanning helium ion microscopy (SHIM) image of LIPSS on stainless steel treated by normal incidence, linear polarization,
800 nm laser with ~ 13 mJ/cm2, 5 pulses. High spatial frequency LIPSS with a wavelength of ~ 170 nm, parallel to the polarization of thelaser beam are visible with bubbles mainly on top of them [1]. (b) Scanning electron microscopy (SEM) photos of LIPSS on stainless steel
treated by normal incidence, linear polarization, 800 nm laser with ~ 0.6 J/cm2, 2 pulses. Low spatial frequency LIPSS with a wavelength of~ 675 nm, orthogonal to the polarization of the laser beam are visible [2].

Figure 1 shows two different kinds of LIPSS obtained on stainless steel. On (a) high spatial frequency
LIPSS are produced at low fluence and parallel to the laser beam polarization. If the fluence is increased thesestructures are often washed out and low spatial frequency LIPSS perpendicular to the laser beam polarization
can be obtained (b). The angle of incidence, the laser beam polarization, the shape of this beam, the pulse
duration, the number of pulses, the repetition rate, the energy per pulse and a lot of material parameters aregoverning the observed phenomena. Due to this large number of parameters a modeling approach is suited.
[1] B. Huis in ’t Veld and H. van der Veer, submitted to Journal of Laser Micro/Nano Engineering (JLMN)[2] Internal report Univerty of Twente95

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Picosecond laser machined designed patterns with
anti-ice effect
1

1

D. Arnaldo del Cerro , G.R.B.E. Römer , A.J. Huis in ‘t Veld

1,2

1- University of Twente, Faculty of Engineering Technology, Chair of Applied Laser Technology, P.O. Box 217, 7500 AE,
Enschede, the Netherlands
2- TNO Science & Industry, Department Materials Technology, De Rondom 1, 5600 HE, Eindhoven, The Netherlands

d.arnaldodelcerro@utwente.nl
Micromachining using ultra short pulse lasers (USPL) has evolved over the past years as a versatile
tool for introducing functional features in surfaces at a micrometric and even at a subwavelengthscale. Being able to control the surface topography at this level provides a method to change thewetting behavior of a great number of materials. In most cases, when a surface has a naturaltendency to be wetted (high surface energy), increasing its roughness will increase the spreading ofwater over it, and when it is naturally hydrophobic this roughness can dramatically enhance the water
repellency. In this study, anti-ice properties of water repellent laser machined materials areinvestigated.

Figure 1. Effect of a laser texture on a stainless steel sample. The left drop on top of a laser micro structured surface exhibits ahigh contact angle; the surface on the right is smooth and wets the surface.

Therefore, stainless steel (AISI 321), titanium alloy (Ti6Al4V) and Al 2024T3 alloy have been textured
with regular hatched, as well as non-uniform patterns, using UV and green laser pulses of 6.7ps. In
order to decrease the surface energy, a thin hydrophobic coating has been applied on top of thesestructures. Super-hydrophobic state has been reached for many of the samples, and small hysteresis
values have also been measured to confirm the so-called, self-cleaning, or “lotus effect” properties ofthe engineered surfaces. Finally, the performance of the surfaces was evaluated in an ice-chamber.
These “smart” materials repel water; remain clean and prevent ice accumulation under certain(environmental) conditions. The potential applications include automotive and aircraft industries,
where the development of an anti-ice coating is highly desired in order to increase in-flight safety andto reduce fuel consumption.

96

3D-Microstructuring of Protein and Polymer Networks
1

3

3

1

3

2

S. Engelhardt , Y. Hu , E. A. Bremus-Köbberling , D. Riester , N. Seiler , W. Meyer ,3
A. Gillner
1- Institute for Laser Technology, RWTH Aachen
2- Fraunhofer Institute for Applied Polymer Research IAP
3- Fraunhofer Institute for Laser Technology ILT

sascha.engelhardt@ilt.fraunhofer.deMultiphoton Polymerisation (MPP) is a high resolution stereolithographic process able to create[1]complex three-dimensional structures. Normally, a photoinitiator simultaneously absorbs two or
more photons of a tightly focused, ultrashort pulsed laser beam, thus serving as an initiator for apolymerisation chain reaction of a pre-polymer. The same procedure can be applied to biopolymers
such as extracellular matrix proteins, where the development of cystin bridges between different[2]
proteins form a stable connection. Some proteins, such as Serum Albumin (Figure 1(b)) can becrosslinked without the use of an additional, mostly toxic photoinitiator. Here, protein inherent
aromatic amino acids (Phenylalanin, Tyrosin, Tryptophan) show a pronounced two photon absorption[3]
ability.

BSA
barrier

(a)(b)

Figure 1 (a) Darkfield image of tubes made of pTHF containing a specialy designed photoinitiator. The inner diameter of
the tubes is 20 m, the wall thickness is 10 m and 4 m respectively and the height is 50 m. (b) A -barrier formed
from bovine serum albumin in the presence of live nerve cells

In order to use this process for the creation of three-dimensional cell scaffolds we built a cost efficientand highly flexible MPP-machine, including a small footprint, turn-key laser source, capable ofcreating complex microstructures.
Apart from biopolymers, such as proteins, a range of photosensitive artificial polymer can be
manufactured as well. In cooperation with the Fraunhofer Institute for Applied Polymer Research (IAP)
we use specially designed polymer compositions to enhance polymerisation efficiency and scaffold
properties. The artificial polymer structures, having more mechanical stability than protein structures
surf as a robust backbone for the cell scaffolds.

[1] C. N. LaFratta, J. T. Fourkas, T. Baldacchini, R. A. Farrer, Multiphoton Fabrication, Angew. Chem. Int. Ed. 2007, 46, 6238 –6258.
[2] S. Basu, P. J. Campagnola, Properties of crosslinked protein matrices for tissue engineering applications synthesized bymultiphoton excitation, J. of Biomed. Mat. Res. Part A, 71A, 2, 359-368[3] B. Kaehr, N. Ertas¸ ,R. Nielson, R. Allen, R. T. Hill, M. Plenert, J. B. Shear, Direct-Write Fabrication of Functional Protein
Matrixes Using a Low-Cost Q-Switched Laser, Anal. Chem. 2006, 78, 3198-3202

97

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Fs-pump-probe measurement of the transient dielectric
function of fused silica
M. Hörstmann-Jungemann, J. Gottmann, J. Kolf
Lehrstuhl für Lasertechnik, RWTH Aachen University, Steinbachstraße 15, 52074 Aachen, Germany

maren.hoerstmann-jungemann@llt.rwth-aachen.de
Periodical surface nanostructures (ripples) are fabricated on the surface of dielectric materials with fslaser direct writing. Using high repetition rate fs-laser radiation with a wavelength of 1045 nm ripples
with periods of 200-350 nm are obtained on dielectrics. The periodical nanostructures are aligned
perpendicular to the polarisation of the laser radiation.
The period of the ripples does not depend on the focussing optics and the pulse overlap but it dependon the laser wavelength and the material. No simple correlation between the period of the ripples andmaterials properties like refractive index or band gap has been found. Therefore, a dependence ontransient material properties modified during the fs-laser pulse has been proposed [1].
In this paper a pump-probe technique is used for time-and spectrally resolved investigations of thereflection and transmission during and up to 100 ps after the fs-laser pulse. The transient dielectric
function is derived from the pump-probe measurements and will give a hint for the metallic behaviourof the dielectric material during and after the fs-laser pulse.
Furthermore the dependence of the ripples period on the repetition rate, the pulse duration, the pulse
energy and the sample temperature is investigated.

(a)

(b)

Figure 1 Transient dielectric function. (a) Pump-probe set up for the measurement of the transient dielectric function. (b)Measured transmission and reflection of the probe pulse over 110 ps for parallel polarised white light.

[1] J. Gottmann, D. Wortmann, M. Hörstmann-Jungemann, Appl. Surf. Sci., doi:10.1016/j.apsusc.2008.10.097

98Patterning of a NiCr-Al2O3 thin film system withpicosecond laser pulses
O.Suttmann1, U. Klug1, R. Kling1
1- Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germanyo.suttmann@lzh.de
Strain measurement is an important task for the automation of many manufacturing processes. Most strain gages
need to be glued onto the tool to be measured. Glued strain gages suffer from the negative properties of theadhesives used. Creeping and swelling through harsh conditions are the consequence and limitation for suchstrain gages.
Metal thin film sensors are a promising approach to overcome the disadvantages of the adhesives. An insulating
layer and a sensing metal layer are sputtered directly on to the surface of the tool to be measured. The patterningof the sensor elements can be performed by means of laser ablation. Using laser ablation instead ofphotolithography for the patterning process has two advantages. Firstly laser ablation enables patterning in thethird dimension; the limitation to planar work pieces is overcome. Secondly, laser ablation is a flexible processthat allows in situ trimming of the sensors and thus increases the signal/noise ratio of the measured signals.

b)
Ablation Threshold /J/cm²

a)

0,5

23 nm
51 nm
78 nm
100 nm145 nm

0,4

0,3

0,2

0,1

0,0
1

10

100

1000

Number of Pulses n
Figure 1 a) Patterned sensors in a full bridge design (b) Ablation thresholds of NiCr films with different film thicknesses as a function of
number of pulses

This paper concentrates on the characterisation of the ablation process of thin NiCr films deposited on metal
work pieces with an Al2O3 layer for galvanic insulation in between. The used laser source is a mode-locked
DPSSL with pulse duration of 15 ps and a wavelength of 532 nm.
Due to the deposition process, uniform film thicknesses on 3D work pieces cannot be ensured. Thus, the laser
ablation process has to be robust against variations of the film thickness. Our investigations reveal that ablationthresholds for high number of pulses differ much less than the ablation thresholds for low number of pulses (Fig.
1 b). This is caused by thickness dependent incubation. Therefore a time efficient and robust processing strategy
will in fact depend more on high repetition rates than on high energy per pulse.
Ablation thresholds of single and multiple pulse ablations are compared with ablation thresholds of line
ablations realised with high repetition rates. Scanning speed and repetition rate are varied to identify usefulpatterning parameters. Damage behaviour and thresholds like delamination and cracking of the Al2O3 film are
identified and discussed. Delamination of the Al2O3 film can partly be accepted in some areas, e.g. at thesoldering pads. Consequently, cracking has to be avoided to ensure the galvanic isolation between sensing layer
and work piece. Based on these damage thresholds a processing strategy is derived which allows for fast
processing of precise strain sensors which are free of creeping and swelling.

99

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Development of 2D/3D Micromachining Processes
Based on Nanosecond Laser Sources
for Industrial Manufacturing
J.L. Ocaña, C. Molpeceres, M. Morales, M. Holgado, J.J García-Ballesteros, F.J. Sanza
Centro Láser UPM. Universidad Politécnica de Madrid. Campus Sur UPM. Ctra. de Valencia, km. 7,300. 28031 Madrid. SPAIN.

E-mail: jlocana@etsii.upm.es
The current availability of different short and ultra-short laser sources are extending the applications
fields of laser microprocessing. Nowadays MEMSs, fluidic devices, advanced sensors and biomedical
devices and instruments are among the most significant developments of this technology. The fastdevelopment in the understanding and implementation of micromachining process has easily led tothe expectation of industrial scale production of different relevant components and to the consequentattempt for the building up of specific laser based machines for each process of interest.
However most of these new facilities easily work strictly in the 2D frame, while a much more difficult
task is to setup experimental equipments for filling the gap existing from the fabrication point of viewfor fully 3D micromachining applications. Even more for the development of micromanufacturingsystems exportable to industry.
At the UPM Laser Centre, the task of micromachining processes design and implementation from anindustrially exportable point of view has been undertaken in view of the needs expressed by different
application actors and the corresponding manufacturing aids and quality control procedures havebeen setup as required by industrial practice.
In this paper, the conception, design and first results of a fully automatized 2D/3D laser
micromachining workstation based on the main concepts of accuracy, flexibility and process quality
control is presented. This system integrates two UV laser sources, excimer and DPSS in ns pulse
regime and an advanced positioning system (with six degrees of freedom) for complex parts
machining. Additionally, the appropriate (dimensional) quality control procedures have been
implemented. Several examples of first results obtained with this system, including processing ofsemiconductors for sensoring and photovoltaic applications, organic materials for biomedical devices
and metallic materials for different strategic industrial sectors are presented. In figure 1, two sample
components showing the possibilities of the developed system are displayed.

Figure 1: Scanning electron microscope images of negative photo-mask and textured microshpere in AISI 304
micromanufactured at UPM Laser Centre

100Laser Micro-Patterning by Means of Optical Fibers with
Etched Tips or Micro-grinded Lens End Faces
S. Yakunin, J. D. Pedarnig, J. Heitz
Institute of Applied Physics, Christian Doppler Laboratory for Laser-Assisted Diagnostics,
Johannes Kepler University Linz, A-4040 Linz, Austria

sergii.yakunin@jku.at
We have developed a scanning optical near-field microscopic (SNOM) setup allowing to produce submicrometer patterns by laser induced processes and to perform atomic force microscope (AFM)
investigation in the same setup [1]. The laser light for processing is delivered to the sample surface bya tapered optical fiber tip produced by chemical etching (Fig.1a). The same fiber tip is used as probe
for AFM analysis. Similar as in a SNOM, the distance between tip and surface is controlled using a
piezoelectric quartz tuning fork as shear-force sensor. We demonstrated that the same setup can also
be employed for analysis of the chemical surface composition by laser-induced break-down
spectroscopy (LIBS). In the present contribution, we concentrate on laser-patterning of polymer
surfaces. By UV light emitted in the near-field of the optical fiber tip, we are able to produce featuresin spin-coated poly(methyl-methacrylate) layers with a lateral size of about 100 nm and a depth ofseveral tens nm. However, the low transmission efficiency of the fiber tip and the direct tip-sample
contact result in a relative slow writing speed and the risk of tip damage due to thermo-mechanicaleffects.
We show that it is possible to overcome the limits of writing speed and to extend the tip durability
considerably by keeping a certain distance between the tip and the sample during the patterning
process. In this operation mode, we use fiber probes with polished hemispherical end face of several
m curvature radius (Fig. 1b). These micro-lensed fibers were produced by grinding in the same
setup [2]. The light propagating through the lensed fiber is focused at the distance of about 1 m fromthe fiber end face. With 266 nm Nd:YAG laser radiation, we can produce features in the order ofabout 100 nm corresponding to about half of the wavelength. Additionally, we are still able to measure
the AFM topography with reasonable sensitivity and to perform also micro-LIBS analysis of thesurface by using these tips.

(a)

(b)

Figure 1 (a) Tapered optical fiber tip. (b) Fiber tip polished to hemispherical lens end face.
[1] J. Heitz, S. Yakunin, T. Stehrer, G. Wysocki, and D. Bäuerle, Laser-induced Nanopatterning, Ablation, and Plasma
Spectroscopy in the Near-Field of an Optical Fiber Tip, SPIE Proc. 7131, 71311W (2009).
[2] Sergii Yakunin and Johannes Heitz, Microgrinding of lensed fibers by means of a scanning-probe microscope setup, Appl.
Opt. 48, 6172-6177 (2009).

101

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laser Ignition of Internal Combustion Engines
E. Wintner
Institut für Photonik, Technische Universität Wien, Gusshausstrasse 27, A-1040 Wien, Austria

ernst.wintner@tuwien.ac.at
The idea of laser ignition of engines was attempted to be realized for the first time in 1978 [1], although with inadequate tools like a CO2 laser. After a long time of inactivity in this field, about 10
years ago a few institutions like Vienna University of Technology resumed this approach with the helpof modern type solid-state lasers and started systematic investigations around the idea of laser ignition of internal combustion engines. Now, this technique has reached a high degree of maturity on thelevel of basic research as it can be carried out e.g. at universities; the remaining problems lie on the
product development level and cannot be treated adequately any more by such institutions. On theother hand, ambitious product development by the leading engine producers or ignition equipment
suppliers has been started worldwide and, as seen from today, in a few years laser ignition will probably be implemented into high power gas engines or high priced automotive engines. This talk will
provide an overview on advantages and critical issues of laser ignition, different system concepts andalternative approaches which are considered to be less advantageous or even unrealistic. Figure 1
shows the front end of a laser spark plug as it has been developed by the author’s group.

Figure 1 Plasma spark emitted from a laser spark plug developed at Vienna University of Technology. The heart of this device
is a compact monolithic diode-pumped passively Q-switched Nd:YAG laser. Pulse duration 1 ns, pulse energy >10 mJ.

As a perspective for the future, laser ignition is considered to be an indispensable process for theignition of chemical reactions in general [2], and it will with high likeliness be implemented e.g. into
rocket engine ignition (attitude control in the first place) and jet engine (re)ignition.

[1] A.J.D. Dale, P.R. Smy, R.M. Clements, Laser ignited internal combustion engine – an experimental study; SAE Congress,
paper 780329, Detroit (1978).
[2] M. Lackner (ed.), Lasers in Chemistry. Probing and Influencing Matter; 2 volumes (Wiley Inc.), ISBN 978-3-527-31997-8(2009).

102

Thin Film Processing with UV Excimer Lasers
B. Fechner, J. Brune, R. Delmdahl
Coherent GmbH, Hans-Boeckler-Str. 12, 37079 Goettingen, Germany

E-mail: ralph.delmdahl@coherent.com
Driving cost-efficient material and process development in display and microelectronics industries
Coherent has launched the VarioLas family of excimer surface processing systems. Two processing
approaches, line-beam scanning or large-area square-field step and repeat processing as shown infigure 1 (a) can be chosen supporting selective layer annealing as well as various lift-off tasks [1,2].
Shrinking structures in microelectronics put UV excimer lasers in the forefront as to the formation ofultra shallow junctions (USJ) for ever smaller CMOS logic devices such as CPUs and memory chips,of power devices such as insulated gate bipolar transistors (IGBTs) and of advanced CCD or CMOS
based image sensors [3]. The respective functional structures are activated by diffusion-controlled,
308nm excimer annealing with low-thermal-budget. Excimer laser wavelength, repetition rate, fluenceand pulse width can be flexibly adapted to match the device-specific process window.

(a)

(b)

Figure 1 (a) Thin film excimer laser processing schemes using scanned homogeneous lines or rectangular fields.
(b) Micrograph of an annealed silicon wafer surface using square field beam step and repeat processing.

Laser lift-off (LLO) using excimer lasers is an enabling step in producing high-brightness LEDs (lightemitting diodes) based on e.g. GaN. GaN-LEDs are commonly fabricated on sapphire substrates dueto good lattice match for the growth of GaN crystals [4]. However, sapphire limits LED output power
because of its poor electrical and thermal conductivity. Using LLO, absorption of the 248 nm excimer
photons occurs at the interface between GaN and sapphire layers resulting in thermally induced
debonding. Large field sizes of up to 2mm x 2mm as employed in figure 1 (b) are advantageous for
LLO in that many LED dies can be covered at the same time thereby ensuring uniform delamination
over individual dies.

[1] R. Paetzel, B. Turk, J. Brune, S. Govorkov, F. Simon, Laser solutions for wafer and thin film annealing, phys. stat. sol. (c),10, pp. 3215, (2008).
[2] S. Inoue, S. Utsunomiya, T. Saeki, T. Shimoda, Surface-free technology by laser annealing (SUFTLA) and its application topoly-Si TFT-LCDs on plastic film with integrated drivers, IEEE Trans. Electron Devices, 49, pp. 1353-1360, (2002).
[3] B. Rajendran, R. S. Shenoy, D. J. Witte, N. S. Chokshi, R. L. DeLeon, G. S. Tompa, R. F. W. Pease, Low thermal budget
processing for sequential 3-D IC fabrication, IEEE Trans. Electron Devices, 54, pp. 707-714, (2007).
[4] Y. Sun, T. Yu, Z. Chen, X. Kang, S. Qi, M. Li, G. Lian, Properties of GaN-based light-emitting diode thin film chips fabricatedby laser lift-off and transferred to Cu, Semicond. Sci Technol., 23, pp. 22-25, (2008).

103

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Formation and evolution of self-organized patterns inlaser irradiation of silicon surface in water
X. Y. Chen1,2, J. Lin1, and Z. G. Liu1,2,3
1- Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, P.R. China
2- National Laboratory of Solid State Microstructures Physics, Nanjing University, Nanjing 210093, P.R. China
3- Department of Physics, Nanjing University, Nanjing 210093, P.R. China

xychen@nju.edu.cn
The formation and the evolution of the patterns formed in nanosecond laser irradiation of siliconsurface in water were investigated. It was found that axisymmetric, network- or maze-like and linear
structures could be formed at short evolution times and all these patterns were finally turned into
hexagonal patterns with period of about 10 μm. The behaviors of these patterns were compared boththeoretically and experimentally with those appeared in the Rayleigh-Taylor instability system of asuspended thin liquid film under gravity, indicating the highly consistencies between the two systems.
So it was concluded that the underlying mechanism for the patterns observed here was the RayleighTaylor instability of the melted surface layer of the silicon wafer formed by laser irradiation. The
instability driving force was the expansion of the interfacial vapor layer formed by the boiling of thelayer of water adjacent to the hot silicon surface. The effective acceleration involved was estimated to
be above 108 m/s2.

2

Figure 1 SEM images of the silicon surfaces after irradiated by a ~2 J/cm laser beam with pulses of (a) 100, (b) 300, (c) 600, (d)900, (e) 3000, (f) 6000, respectively. Three kinds of patterns can be distinguished, which are marked with A, B and C,
respectively.

104

Micromachining Hard Materials with Industrial

Picosecond Lasers
Hatim Haloui, Achim Nebel, Bernhard Klimt, Dirk Müller
LUMERA LASER GmbH, Opelstraße 10, 67661 Kaiserslautern, Germany

haloui@lumera-laser.com
As material requirements are pushed further and further to their limits in terms of hardness, stiffness,and temperature tolerance, it also becomes more and more difficult to machine such materials to their
desired shapes. Conventional machining of the hardest materials requires even harder mechanicaltools which can become prohibitively expensive as well as very slow at machining. We report on
machining results of tungsten carbide, hard metals, polycrystalline diamond (PCD), and cubic boron
nitride (CBN) using industrial grade high-power ps-laser systems. Our results show that these very
hard materials can be machined cost effectively with high power ps-lasers and that the machining
quality exceeds what has been achieved by conventional methods such as milling and grinding.
Often times the edge quality is key to the utility and longevity of the material (Fig.1a). Micromachining
with a ps-laser does not only allow for much faster machining speeds, but also allows for edge
rounding which again leads to longer tool life. We have demonstrated ablation rates of up to3
3
25mm /min for CBN and up to 8mm /min for tungsten carbide and hard metal (Fig 1b)[1]. These
ablation rates have been facilitated by the use of a special burst mode in the ns time scale.

(a)

(b)

Figure 1 Material Images. (a) The picture shows CBN on top of hard metal, which can be seen by the different shading. (b)Micromold out of hard metal machined with burst mode @ 1064nm.

Many laser systems are capable of producing a sequence of intense ps pulses in a burst, but only
pulses in a fast time sequence in the ns scale can achieve these high ablation rates. Aside from theburst mode capability, high repetition rates up to 1MHz are key to large ablation rates. High ablation
rates again are imperative when looking for an economic machining process that requires micro
structuring large surfaces such as printing drums.
We will present multiple examples of machining hard materials and discuss the challenges
encountered as well as contrast our machining results with conventional methods. Among othersamples, we have machined drilling heads, pill molds and high aspect ratio cooling holes into nickel
alloys.
[1] Sample machined with HYPER RAPID50 laser in a Lasertec40 machine by DMG.

105

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

High-end micromachining with >150W average powerfrom a 1MHz 10ps-laser
1

2

2

2

1

M. Höfer , S. Naumov , A. Blumenrath , R. Knappe , H. Sipma , H.D. Hoffmann

1

1- Fraunhofer Institut für Lasertechnik, Steinbachstr. 15, 52074 Aachen, Germany
2- LUMERA LASER GmbH, Opelstr. 10, 67661 Kaiserslautern, Germany

marco.hoefer@ilt.fraunhofer.deHigh-end micromachining with picosecond lasers became an established process during the recent
years. Power scaling led to industrial lasers, generating average power levels well above 50W. Suchlasers are routinely used in applications like machining turbine blades, micro moulds, andsemiconductors [1]. In addition to high average power, a smart distribution of energy into groups ofpulses significantly improves ablation rates for some materials, also providing a better surface quality.
In this paper we describe further power scaling, achieved by combining a state-of-the-art industrial
LUMERA picosecond laser with Fraunhofer ILT INNOSLAB amplifier technology (figure 1 b). Pulses
with 10ps-duration and a wavelength of 1064 nm were generated from a LUMERA RAPID laser in
MOPA configuration [2]. These pulses with an average power of 2.8W at a pulse repetition frequency(PRF) as high as 1MHz were further amplified in a multi-pass INNOSLAB amplifier [3]. The slab
amplifier consisted of a 1mm thick Nd:YVO 4 crystal, 10mm long and 24mm wide, which was end
pumped from two faces by 2x 250W. The input beam was shaped to an elliptical profile and folded
through the amplifier crystal with seven passes. The output power was as high as 157W,
corresponding to a pulse energy of ~160J (figure 1 b). Measured M was <1.5.

(a)

(b)

Figure 1 : (a) laboratory setup (b) power (blue) and pulse energy (green) vs. seed power at 1 MHz PRF

The amplified beam was passing scanners and optical isolators, so that an average power of >137W
was available on the probe for micromachining. Glass machining with full average power was
possible, doing surface modifications, cutting, and volume ablation. Machining results and ablation
rates will be presented, as well as for ceramics and steel, which benefits from higher throughput
provided by high average laser power.
[1]
[2]
[3]

106

R. Knappe, H. Haloui, A. Seifert, A. J. Weis, A. Nebel, “Scaling ablation rates for picosecond lasers using burst
micromachining”, Proceedings of SPIE Vol. 7585-16 (2010)
A. Nebel*, T. Herrmann, B. Henrich, R. Knappe, “Generation of tailored picosecond-pulse-trains for micro-machining”,
Proceedings of SPIE Vol. 6108-37 (2006)
M. Höfer, Martin Traub, H.D. Hoffmann et. al., “Multi ten watt, ultra-stable and tuneable INNOSLAB based single
frequency MOPA”, Proceedings of SPIE Vol. 6451, 64511L (2007)

Volume Bragg grating formation in fused silica with highrepetition rate femtosecond Yb:KGW laser pulses
Domas Paipulas, Viaeslav Kudriaov, Kstutis Kurelis, Mangirdas Malinauskas,
Valdas Sirutkaitis
Vilniaus University, Laser Research Center, Saultekio av. 10, LT-10223 Vilnius, Lithuania

domas.paipulas@ff.stud.vu.lt
The capability to locally alter the optical properties of transparent material with femtosecond laser
radiation opened the doors to many new and unique applications. Already more than a decade, thistechnique is successfully applied in creation of photonic devices such as waveguides [1], splitters,
active elements [2] and etc. Volume phase Bragg Gratings (VBGs) and the possibilities to fabricate
them in various glasses are also extensively studied [3]. Because of their high diffraction efficiency
these gratings have more advantages compared with amplitude gratings. They are essential in opticalsystems where high spectral and angular selectivity is needed. Though highly efficient VBGs havebeen demonstrated also in photosensitive materials, the manipulation of the refractive index bymeans of femtosecond radiation allows to form these structures in more common materials such as
fused silica. On the other hand the efficiencies of these gratings yet are not satisfying, because thephysics of the refractive index modification is still not well understood and requires additional study.

(a)

(b)

Figure 1 (a) Schematic layout of fabrication of volume phase grating. (b) Bragg diffraction efficiency dependence on the grating
thickness with different laser writing powers at 300 kHz pulse repetition rate.

In this work we present results on VBG formation in fused silica with the Yb:KGW femtosecond laser(Pharos, “Light Conversion Ltd.”) pulses, operating at 300 kHz repetition rate and having pulse
duration of 300 fs. Gratings were created by direct laser writing technique, translating the sample
perpendicular to the focused (0.42 NA) laser beam and forming several grating layers (Figure 1(a)).
The VPG’s diffraction efficiencies up to 57 % were reached and its efficiency dependence on the
thickness is shown in Figure 1(b). We demonstrate that high repetition rate helps to increase the
manufacturing speed of such devices: 11 mm grating with thicknesses up to 60 μm was written inless than an hour.
[1] K. M. Davis, K. Miura, N. Sugimoto and K. Hirao, "Writing waveguides in glass with a femtosecond laser," Opt. Lett. 21,
1729-1731 (1996).
[2] Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea and K.A. Winick, “Optical waveguide amplifier in Nd-doped glass
written with near-IR femtosecond laser pulses”, Electron. Lett. 36, 226–227 (2000).
[3] K.Yamada, W. Watanabe, K. Kintaka, J. Nishii and K. Itoh, “Volume Grating Induced by a Self-Trapped Long Filament ofFemtosecond Laser Pulses in Silica Glass”, Jpn. J. Appl. Phys. 42 (11), 6916-6919 (2003).

107

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Industrial production with ultra fast laser
workstations
E. AUDOUARD 1,2, H. SODER 2
1 Université de Lyon, F-69003, Lyon, France, Université de Saint-Étienne, Laboratoire Hubert
Curien (UMR 5516 CNRS), 42000 Saint Étienne, France
2 IMPULSION SAS, Pole Optique Vision, 12, rue B. Lauras, 4200 Saint Etienne, France
eric.audouard@impulsion-sas.com
Femtosecond lasers have proved to be great tools for precise, accurate and high quality
micro- but also nano-machining. Numerous works have been carried out to study laser-matterinteraction mechanisms on the one hand, and laser machining processes on the other hand.
Very naïve first industrial approaches, such as “ultra fast machining is interesting because it’s
not a thermal process”, are only used by manufacturers who do not really want to sell workstations forindustrial use. Technical development and good knowledge of the process have to be simultaneously
settled to allow a real practical application.
In this work, we will underline some practical applications and the link between a betterknowledge of physical mechanisms and the development of industrial processes. Of course, we haveto pay attention to typical parameters of industrial development, such as the processing time. With theknowledge of an “efficient” ablation rate, the physical time can be easily calculated, using the total
length of the machining, speed and laser parameters. This calculated physical process time can becompared to the effective time needed to machine the sample. This kind of information can evidence
the possible improvement to be done on the mechanical and computer environment to reach thisminimum process time.
Femtosecond technology has now proven its capacity to lead innovative production, even if
it’s still in some well defined fields, but its contribution is non negligible in a context of economicalcrisis.

Figure 1 : Photo of the first fs workstation from IMPULSION company used for production (field of automotive industry)

Keyword : Ultrafast processing, Industrial applications.

108

Multiple Beam Internal Structuring of PMMA
1

1

1

2

2

2

2

Dun Liu , Walter Perrie , Zheng Kuang , P. J. Scully , A. Baum , S. Liang , A. Taranu ,1
1
1
1
S. P. Edwardson , E. Fearon , G. Dearden , and K. G. Watkins
1 - Laser Group, Department of Engineering, University of Liverpool, L69 3GQ, UK
2 - Photon Science Institute, University of Manchester, M13 9PL, UK

Main author email address: wpfemto1@liverpool.ac.uk
A Spatial Light Modulator addressed with Computer Generated Holograms is used to diffract
femtosecond laser pulses into > 15 parallel beams and focussed simultaneously inside poly(methyl
methacrylate) (PMMA) for high throughput 3D refractive index modification, (Fig.1 (a)). Highly uniform
modification throughout the entire structure is demonstrated and used to create 19μm pitch, 5 x 5 x
st
2mm thick volume gratings in < 30minutes with 1 order diffraction efficiency > 65%. In PMMA,
diffraction efficiency is highly order and time dependent, and remarkably different with NIR (775nm)
exposure compared to second harmonic NUV (387nm) indicating different photochemicalmechanisms, probably related to three photon (NIR) and two photon (NUV) absorption processes [1].
The benefits and current limitations of this technique are discussed in detail.

(a)

(b)

(c)

(d)

Figure 1 (a) Schematics of multi-beam internal structuring. (b) Modified cross section of PMMA. (c) Temporal behaviour of NIR
written volume grating diffraction efficiency at 1st, 2nd and 3rd order and (d) Angular sensitivity of volume grating.
[1] A. Baum, P. J. Scully, M. Basanta, C. L. Paul Thomas, P. R. Fielden, N. J. Goddard, W. Perrie, and P. R. Chalker,
Photochemistry of refractive index structures in poly(methyl methacrylate) by femtosecond laser irradiation, Opt. Lett. 32, 190192, (2007)109

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Generation of Multi Spot Arrays and In-Process Spot
Shaping for Parallel Laser Processing ofMicrostructures
1

1

M. Zimmermann , T. Frick , M. Schmidt

1

1- Bayerisches Laserzentrum GmbH, Konrad-Zuse-Str. 2-6, D-91052 Erlangen, Germany,m.zimmermann@blz.org
The processing of microstructures with a single focus is feasible and well known. Multi-spot optics areapplied for parallelizing production if the demands on throughput in mass production rises or
micromachining of large-scale materials have to be processed. These elements split the beam into aperiodic spot pattern where each spot has the same shape and energy. This allows the simultaneous
manufacturing of several equal shaped structures at the same time. For patterning a surface this is agood technique to reduce processing time and to receive a high lateral resolution as well as a good
relative position of the structures.
This paper shows the investigation of microlens arrays in combination with different optical elements
like axicons for forming an arbitrary shaped laser beam into a spot-, line- or ring array pattern. The
principal functionality of the multi-spot generator is shown by wave optical simulation and principles offourier optics. We show a method for parallel processing of three dimensional microstructures withouta lateral scan of the beam or work piece during process. By adapting the spot shape in process it ispossible to perform for each scan step in depth a different spot. By applying this method the time
consuming lateral displacement could be avoided and a fast patterning of a complex microstructure
becomes feasible. This paper shows experimental results of generated microstructures realized with ananosecond and picosecond laser.

110

Thin metal cutting using water jet-guided laser
A. Pauchard, B. Carron, M. Pavius
SYNOVA SA, Chemin de la Dent d’Oche, 1024 Ecublens, Switzerland, +41-21-6943512

pauchard@synova.ch
This paper presents the latest results of thin metal cutting using the water jet-guided laser technology[1,2]. This technique has found a broad range of applications in the precision micromachining field.
The water jet-guided laser is used today in several industrial fields, such as semiconductor, solar,
electronics, medical, tooling [3], LED [4], watch and automotive industries.
The water jet-guided laser technology was recently implemented to cut 100 µm thick CuBe sheet. A
Q-switched frequency-doubled Nd:YAG DPSS laser operating at a wavelength of 532 nm wascoupled inside the water jet. Cutting tests were performed using a 40 mm nozzle, delivering a waterjet diameter of 36 µm. A laser repetition rate of 8 kHz and an average power of 20 W were used. The
water pressure was 400 bar. A single pass at a speed of 1 mm/s was sufficient to cut the CuBe sheet.
The obtained results are shown in Figure 1. Complex shapes were cut in the 100µm thick CuBe
sheet, with no burrs and no heat affected zone.
Another recent application is shown in Figure 2. In this case the water jet-guided laser technology was
implemented for the cutting of springs from 150 µm thick annealed stainless steel sheet. A Q-switched
Nd:YAG DPSS laser operating at a wavelength of 1064 nm was coupled inside the water jet. Cutting
tests were performed using a 40 mm nozzle. A laser repetition rate of 0.5 kHz, a pulse duration of 60µs and an average power of 5.5 W was used. The water pressure was 400 bar. A single pass was
performed at a speed of 3 mm/s. As shown in Figure 2, the spring structure is very symmetric. Spring
twisting issue, due to residual stress inside the spring, could be resolved by improving the cutting
strategy. The picture was taken right after cutting, without any post cleaning treatment. The width ofthe metal lines in the spring structure is only 40 µm.
Other challenging thin metal cutting applications, such as the drilling of injection nozzles with anangle, will be presented in the paper.

Figure 1: cut of a 100µm CuBe sheet

Figure 2: cut of a 150 µm Cu annealed stainless steel spring[1] B. Richerzhagen: J. Appl. Phys., 74, (1993) 1119.
[2] B. Richerzhagen, G. Delacrétaz, R.P. Salathé, "Complete Model to Simulate the Thermal Defocusing of a Laser Beam
Focused in Water," Optical Engineering, vol. 35, No. 7, pp. 2058 – 2066, 1996.
[3] A. Pauchard et al., “Recent developments in the cutting of ultra hard materials using water jet-guided laser technology”,
ALAC 2008 conference proceedings, 2008.
[4] A. Pauchard et al.,, “Dicing of HB-LED devices embedded in copper or copper tungsten substrates”, ICALEO 2008
conference proceedings, 2008.

111

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laser processing by using diffractive optical laser beam
shaping technique
1

1

1

1

2

2

G. Raiukaitis , E. Stankeviius , P. Geys , M. Gedvilas , C. Bischoff , E. Jäger , U. Umhofer

2

1- Institute of Physics, Savanoriu Ave. 231, LT-02300 Vilnius, Lithuania
2- TOPAG Lasertechnik GmbH, Nieder-Ramstaedter-Str. 247, D-64285 Darmstadt

Email : graciukaitis@ar.fi.lt
Laser beam shaping and homogenization techniques are substantial to optimize a large number oflaser-material processing applications and laser-material interaction studies [1]. Diffractive opticalelements (DOE) play important role in provision of the process-adapted laser beam shaping. In thispaper, we present an approach for laser beam shaping by using innovative DOE [2]. Experimental
results have been achieved by applying the shaped beam for laser microfabrication.
The nanosecond laser NL640 (EKSPLA Ltd.) working at fundamental wavelength with moderate2
beam quality (M =1.5) was used in the experiment. The circular Gaussian beam was transformed tosquare flat-top intensity profile in the focal plane of the objective lens by using novel DOE fromTOPAG Lasertechnik GmbH. The intensity distribution of the focused laser beam is shown in Figure 1(a). About 95% of the laser energy was coupled in the main beam with a nearly perfect rectangularshape.
The shaped laser beam was applied for direct laser ablation of metal film on the glass substrate,
drilling in silicon wafer, scribing of thin-film solar cells and other technical materials. The ScanningElectron Microscope (SEM) image of square-shaped hole ablated by using single laser pulse inchromium thin film (100 nm) is shown in Figure 1 (b).

(a)

(b)

Figure 1 (a) square shaped flat-top laser beam intensity distribution formed by using DOE and spherical lens measured byusing CCD camera. (b) SEM image of square-shaped hole ablated with the single laser pulse in a chromium thin film on theglass substrate.

We have proposed a beam shaping technique by using DOE and a spherical lens. This techniqueallows creating rectangular shaped flat-top intensity profile in the focal plane that shows distinct
advantages in laser material processing.
[1] F. M. Dickey, S. C. Holswade, Laser beam shaping– theory and techniques (Marcel Dekker, INC. New York, Basel),Gaussian Beam Shaping: Diffraction Theory and Design (2000).
[2] DOE have been developed in the frame of an F&E project (HA-Projekt-Nr.: 165/08-27) supported by Federal Government ofHessen (Germany) and Hessen Agentur, financed with LOEWE funds (Landes-Offensive zur Entwicklung Wissenschaftlichökonomischer Exzellenz, Förderlinie 3).

112

Fabrication of sub-micron Gratings on Silicon by
Maskless Exposure of Nanosecond Laser Pulses
R.K Soni, Brijesh Kumar
Laser Processing and Spectroscopy Laboratory, Physics Department, Indian Institute of Technology Delhi
New Delhi 110016, India

ravisoni@physics.iitd.ac.in
Maskless submicron grating structures on silicon surface are fabricated with two-beam holography exposure ofsecond harmonic wavelength (532 nm) and fourth harmonic wavelength (266 nm) of a nanosecond pulsed Nd:
YAG laser. Laser interference lithography or holography lithography is the preferred method for fabricating
periodic pattern, as it is a relatively simple and maskless method, utilizing the interference of two or more
coherent beams, and ideal for low cost and large area exposure. It has advantage over other techniques, provides
flexibility in grating period and depth by changing the incident angles and irradiation time. Thus the interference
method using beam holography has great potential for fabricating gratings with fine periods [1,2]. The grating
structures fabricated with fourth harmonic beam are more regular, uniform and well-controlled periodicities thanstructures fabricated with second harmonic beam. We have investigated the grating surface by Fourier method
to understand the wavelengths dependence of two-beam holography patterning on the surface gratings. RMS
roughness, power spectral density (PSD) and cross-sectional analysis have been carried out to understand theeffect of increasing number of shots of fourth harmonic beam on patterned surface morphologies. It is found thatwith increasing the number of shots, valley depth of grating pattern increases alongside many spatial frequency
components other than the fundamental frequency of the structure due to increase in extreme amount ofinterfacial roughness. AFM analyses reveal gratings fabricated with fourth harmonic beam have only fewer
frequency components other than fundamental frequency of the structures. Cross-sectional depth profiles of the
AFM investigated gratings display a periodic line valley with a regular spacing of 1.1 μm for number of shots
600 and 900, 1500. Figure 1 shows periodic grating on silicon at laser fluence of 232 mJ/cm 2 with number oflaser pulses.

(a)

(b)

Figure 1 SEM images of submicron gratings on Si (100) for laser fluence 232 mJ/ cm2 of second harmonic beamwith (a) 2400 and (b) 3000 pulses.
[1] Brijesh Kumar, R.K. Soni, Submicrometre periodic surface structures in InP induced by nanosecond UV laser pulses, J. of Physics D, 41,155303-155308 (2008).
[2] Brijesh Kumar, R.K. Soni, Pulsed-laser-induced photochemical growth of the periodic surface structure on InP, Semicond. Sci. Technol.,24, 095007-095014 (2009).

113

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

High-Precision Machining Powered by UV
L. Herbst, R. Delmdahl, R. Paetzel
Coherent GmbH, Hans-Boeckler-Str. 12, 37079 Goettingen, Germany

E-mail: rainer.paetzel@coherent.com
The capability of producing ever more accurate microstructures is pivotal for the production ofincreasingly capable micromechanical and microoptical systems (MEMS/MOEMS) as well as fordownscaling biotechnological analysis devices (BioMEMS) [1]. Both quality and longevity of thefunctional microstructures acting e.g. as sensors, actuators, bioreactors or information transmittersstrongly depend on the degree of accuracy achieved in the fabrication process [2].
Excimer lasers emitting in the UV to far UV region are by nature the laser sources enabling thehighest optical resolution and strongest material-photon interaction. At the same time, excimer lasers
deliver unmatched UV pulse energies up to 1000 mJ and output powers up to several hundred watts.
Thus, they are the key to fast and effective large area processing of smallest structures with micron
precision [3]. As a consequence, excimer lasers are the UV technology of choice when it comes tohigh-performance microstructuring with unsurpassed quality and process repeatability in applications
such as drilling advanced ink jet nozzles shown in figure 1 (a) or patterning biomedical sensors shownin figure 1 (b).
Recent progress in excimer laser design and UV optical performance will be introduced enabling fast,high-precision UV manufacturing in cost-sensitive applications.

(a)

(b)

Figure 1 (a) Typical repeatability of ink jet nozzles of 27 m diameter drilled in polymer with excimer laser mask projection
processing . (b) Micrograph of metal circuit structures on polymer substrate obtained at a wavelength of 308 nm.

[1] K. Jain, Excimer-laser-based multifunctional patterning systems for optoelectronics, MEMS, materials processing, andbiotechnology, Proceeding s of the SPIE, 4991, pp. 374-383, (2003).
[2] C. T. Pan, H. Yang, M. K. Wei, 248 nm excimer laser drilling of PI films for nozzle plate application, Int. J. Adv. Manuf.
Technol., 34, pp. 889–897, (2007).
[3] R. Paetzel, Lasers enable diverse display production techniques, Information Display, 25, pp. 20-23, (2009).

114

115

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laser Patterning of Conformal Electromagnetic Surfaces
N.A. Charipar, S. Mathews, A. Piqué
Materials Science and Technology Division, Naval Research Laboratory, Washington, DC 20375, USA

Nicholas.charipar@nrl.navy.mil

The development of conformal electromagnetic surfaces has been hampered by difficulties in theirfabrication with traditional lithographic techniques. Use of these surfaces is required in order toincorporate the RF structure to a host platform with minimal impact on the platform’s weight,
aerodynamics and aesthetics. Examples of these surfaces include conformal antennas and artificial
impedance surfaces. Artificial impedance surfaces are comprised of sub-wavelength metal patches
patterned on a grounded dielectric surface. These patterned surfaces provide a method to control the
propagation of surface waves, thus controlling their radiation properties. In general, artificial
impedance surfaces have been limited to planar geometries and are difficult to incorporate onto
curved surfaces. The ability to laser pattern doubly curved surfaces allows for the realization of theabove described complex electromagnetic structures. At NRL, we have developed a combination of
direct-write processes that allow for the metallization, laser patterning and room temperature curing ofelectromagnetic patterns on doubly curved surfaces such as radomes. The metallization step
dispenses a conformal metallic nanoink layer over the surface and then the pattern is generated bylaser ablating the excess nanoink prior to its curing with a high intensity light source. Laser patterningof the metallic nanoink utilizes a 5-axis motion system to maintain normal incidence to the surface.
This presentation will provide examples of the conformal electromagnetic surfaces fabricated using
these techniques and will examine their future impact.

116

Laser Micromachining of Piezoelectric Ceramics
1

1

Q. Xie , C.W.An , and T.C. Chong

1, 2

1

2

Data Storage Institute, DSI Building, 5 Engineering Drive 1, Singapore 117608
Department of    and Computer Engineering, National University of Singapore
Email: Xie_Qiong@dsi.a-star.edu.sg

Piezoelectric ceramics are widely used in sensors, actuators and transducers. The laser/materialinteraction PZT ceramic PIC 151 (PI) was investigated using Q-Switched DPSS lasers operating at
Green (532 nm, <20 ns) and UV (355 nm, <20 ns). 61-hole with 90 μm diameter array on PZTceramics was drilled using a trepanning technique in air by green laser with clean edge periphery.
The hole circularity at exit and the hole taper was discussed. 200 um width trench with ±2.5um max
peak-peak roughness has also been achieved using galvanometric UV laser scanning system. The
clean edge with good bottom roughness and negligible microcracks has made it applicable in device.

Figure 1 Laser micro- by green laser.

Figure 2 Laser micro-trench  by UV laser.

REFERENCE[1] A.N. Samant, N.B. Dahotre, Laser machining of structural ceramics-A review, J. European Ceramic Society 29, 969-993,(2009)[2] D. Guo, K. Cai, J.L Yang, Y. Huang, Spatter-free laser drilling of alumina ceramics based on gelcasting technology, J.
European Ceramic Society 23, 1263-1267(2003)[3] E. Kacara, M. Mutlua, E. Akmana, A. Demira,b, L. Candana, T. Canela,b, V. Gunayd, T. Snmazcelik, Characterization of
the drilling alumina ceramic using Nd:YAG pulsed laser, J. mater. processing tech., 209, 2008-2014 (2009).
[4] M. Ghoreishi, D.K.Y. Low, L. Li, Comparative statistical analysis of hole taper and circularity in laser percussion drilling, Int.
J. Machine Tools & Manu., 42, 985-995, (2002).

117

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Enhancement of the hydrophobic properties of metals by
femtosecond laser texturing of surfaces
S. Valette1, P. Bizi­Bandoki1, S. Benayoun1, B. Beaugiraud1, E. Audouard2 and P. Kapsa1
1­ Laboratoire de Tribologie et Dynamique des systèmes
UMR CNRS 5513
36 avenue Guy de Collongue
69134 Ecully cedex
2­ Laboratoire Hubert Curien
UMR CNRS 5516
18 rue du Professeur Benoît Lauras
42000 Saint­Etienne

stephane.valette@ec­lyon.fr
Fabrication of hydrophobic and superhydrophobic surfaces presents many advantages in different domains ofapplications like surface auto­cleaning, biomimetics, micro­fluidics lab­on­chip devices...[1­3]. We present heresome results allowing to put in evidence the strong link between surface topography and surface energy. Indeed,
femtosecond laser irradiation of metallic samples is performed to modify the topography of the surface.
Multiscale roughness effects are obtained, like ripples and spikes. We study the relation between the generationof such topographic systems and the response of the materials on the wettability point of view. Results show thepossibility to largely enhance the wettability response of the femtosecond irradiated surfaces compared to theflatten surfaces. Contact Angle (CA) measurements are performed. They are related to topographic analyses byatomic force microscopy (AFM) and optical interferometry.
Within this work, we put in evidence the possibility to generate highly hydrophobic, or even superhydrophobic
metallic surfaces with femtosecond laser irradiation.
Figure 1 gives an example of such a behavior. Before and after the femtosecond laser irradiation, the contact
angle varies from θ = 75.4° to θ = 129.8°. That is to say, the metallic surface goes from an hydrophilic
behavior to a highly hydrophobic behavior.
This approach allows thinking the femtosecond laser irradiation of surfaces like a promising tool tofunctionalize surfaces.

Figure 1 : Contact angle measurments. a) Before femtosecond laser texturing : hydrophilic character. b) After femtosecond laser texturing :high hydrophobic character due to multi­scale topography[1] V. Zorba, E. Stratakis, M. Barberoglou, E. Spanakis, P. Tzanatakis and C. Fotakis, Tailoring the wetting response of siliconsurfaces via fs laser texturing, Applied Physics A, 93, 819­825, (2008).
[2] D. Quéré, A. Lafuma and J. Bico, Slippy and sitcky microtextured solids, Nanotechnology, 14, 1109­1112, (2003).
[3] M. Zhou, M. F. Yang, B. J. Li, J. Dai, J. K. Di, E. L. Zhao and L. Cai, Applied Physics A, 94, 571­576, (2009).

118

Quality Aspects in High Power Ultra Short Pulse
Laser Ablation
S. Eifel1, A.Dohrn, A. Gillner

1- Fraunhofer-Institute for Laser Technology, Steinbachstrasse 15, 52074 Aachen, Germany

stephan.eifel@ilt.fraunhofer.de
In the production of micro structures and micro replication tools, laser ablation becomes a more andmore important tool which is able to generate structure sizes in the range of 10 – 100 µm. Especiallywith ultra short pulsed lasers with pulse durations in the range of 10 ps, a new and flexible tool isavailable, which allows the processing of standard tool steel materials as well as hard and ultra hardmaterials. Compared to conventional EDM-processing, laser manufacturing of parts and tools can be
performed without additional working tools at reasonable times directly from the CAD-CAM-System.
Using this new laser ablation technology opens a new field of micro processing of tools, which allows
the generation of even nano-scaled functional structures in tools, which can be replicated onpolymers, metals and glass components. With ultra short pulse laser ablation, pulse bursts of several
pulses with a time spacing of 20 ns each and adapted pulse energies accuracies < 1 µm and slicing
depths of 100 nm and less can be achieved. Surface quality of metal micro ablation has been
increased significantly and allows the production of tools and parts with ra-values less than 0.5 µm.
However, using very small spot sizes of 10 – 20 µm, these accuracies only can be achieved at
medium and low pulse energies in the range of 5 – 10 µJ. Using very low fluences on the one hand or
high fluences on the other hand lead to a significant quality decrease, which cannot be allowed forhigh precision manufacturing. At very low pulse energies and larger processing depths in metals
micro cones are formed, which grow in further increasing the ablation depth. At high fluences micro
scale holes and dimples are formed in the ablated surfaces, which destroy the original surface quality.
In figure 1 two results for picosecond ablation in tool steel with low and high fluence are shown.

(a)

(b)

Figure 1 (a) Tool steel surface with cones after ps-ablation with low fluence.
(b) Tool steel surface with holes and dimples after ps-ablation with high fluence

For further increase of ablation speed with retention of the principal high surface quality of ultra shortpulse laser machining, a carefully selection of the material has to be carried out. Especially the history
and the metallurgy of the material plays an important role for the formation of surface defects, which
will be shown in comparison of different materials. Furthermore, ablation strategies for the avoidanceof cone and hole formation will be presented using variations of pulse energy and other processing
parameters.
[1 A. Gillner, A. Dohrn, C. Hartmann, High quality laser machining for tool and part manufacturing using innovative machining
systems and laser beam sources, Proc. of the 3rd CIRP Int. Conf. High Performance Cutting (HPC), Dublin, 2008
[2] A. Gillner, Laser micro processing, Laser-Technik-Journal 5 (2008), No.1, pp.27-30

11911th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Ultra fast laser machined hydrophobic stainlesssteel surface for drag reduction in laminar flows
1

1

2

1

3

R.Jagdheesh ,B.Pathiraj ,A.G.Marin , D. Arnaldo del Cerro , R.G.H.Lammertink , Detlef Lohse
1
A.J. Huis in ‘t Veld

2

1

University of Twente, Faculty of Engineering Technology, Chair of Applied Laser Technology,
P.O. Box 217, 7500 AE, Enschede, The Netherlands
2
University of Twente, Physics of Fluids Group, Department of applied Physics,
Enschede, P.O. Box 217, 7500 AE, Enschede, The Netherlands
3
University of Twente, Membrane science and Technology Group, Department of Chemical Engineering,
P.O. Box 217, 7500 AE, Enschede, The Netherlands
Email : J.Radhakrishnan@ctw.utwente.nl

Hydrophobic surfaces have attracted much attention due to their potential in industrial
applications such as microfludics, lab on chip devices and as coatings for the automotive andaerospace industry. The combination of a dual scale roughness with an inherent low-surface-energy
coating material is the key factor for the development of an artificial superhydrophobic surface. Ultra
short pulse laser (USPL) machining/structuring is a promising technique to obtain the dual scaleroughness on a metal surface. Moreover, ultra short laser machining delivers such micro and nanoscale surface structures without or with limited thermal effects.
Flat stainless steel (AISI 304L) plates were laser machined with ultraviolet laser pulses of
6.7ps, with different laserprocessing parameters. The samples produced at the optimum conditions
were coated with perfluorinated octyltrichlorosilane (FOTS) to get a superhydrophobic surface. Static
contact angle measurements were done to evaluate the degree of hydrophobicity. The laser patterned
surface has longitudinal microchannels, which can trap air inside the grooves and provide a shearfree boundary condition at the air-liquid interface upon the metal surface. Drag reduction in flow can1
be obtained due to the shear free boundary condition at air-liquid menisci .The geometry of thepatterns was analyzed with optical and scanning electron microscopy. Micro-particle image
velocimetry (PIV) has been employed to measure the effective slip lengths achieved in such
patterns.

Fig.1 SEM image of Laser patterned longitudinal channels
Reference
1. Peichun Tsai, Alisia M. Peters, Christophe Pirat, Matthias Wessling,Rob G. H. Lammertink, and Detlef Lohse, Quantifying
effective slip length over micropatterned hydrophobic surfaces, Phys. Fluids 21, 112002 ,2009120

Three-dimensionally Isotropic Resolution of
Femtosecond Laser Micromachining Using
Spatiotemporally Focused Pulses
1

1,*

1

2

Fei He , Ya Cheng , Zhizhan Xu , Koji Sugioka and Katsumi Midorikawa

2

1- State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of
Sciences, P.O. Box 800-211, Shanghai 201800, China
2- Laser Technology Laboratory, RIKEN - Advanced Science Institute, Hirosawa 2-1, Wako, Saitama 351-0198, Japan*Email: ycheng-45277@hotmail.com
We provide a solution to achieve a three-dimensionally symmetric spherical intensity distribution of
the focal spot by spatiotemporally focusing of the femtosecond laser beam [1]. The input laser beam
size is controlled by an adjustable circular aperture. A pair of parallel gratings is used to separate thespectral components of the incident pulses [Fig. 1(a)]. The pulse duration can only reach its shortest
value at the focal point of the objective lens while being broadened again elsewhere, through which
the intensity distribution at the focal volume can be adjusted and the axial fabrication resolution canbe greatly improved [2]. We demonstrate both theoretically and experimentally that the crosssectional aspect ratios of hollow microfluidic channels embedded in fused silica can be controlled byvarying the incident femtosecond beam size. In particular, microfluidic channels with isotropically
circular cross sections [Figs. 1(b) and (c)] can be created using this method. It is also expected that
this technique will allow for fabricating circularly symmetric optical waveguides regardless of thetranslation direction of the femtosecond laser beam.

Figure 1 (a) Schematic of the femtosecond laser micromachining setup using temporal focusing scheme. Optical micrographs of cross-section
view of microfluidic channels aligned in both (b) XZ and (c) YZ planes show circular shapes.

[1] G. Zhu, J. Howe et al., Simultaneous spatial and temporal focusing of femtosecond pulses, Optics Express 13, 2153 - 2159, (2005).
[2] F. He, H. Xu et al., Fabrication of microfluidic channels with circular cross section using spatiotemporally focused femtosecond laser pulses,
Optics Letters (Submitted).

121

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Reliable laser micro-welding of Copper
1

Ulrich Dürr , Christoph Ruettimann

2

LASAG AG, CH3602 Thun, Switzerland

The reliability of copper (spot) welds is still a problem today concerning the high demands of e.g. spotor contact welding for the electronic or medical industry. There are two aspects characterising thisreliability which is the reproducibility of the weld geometry and at the same time the elimination ofthermally induced side effects, especially sputtering during the welding.
One problem is the low absorption of the clean polished Cu surface of about 5% at room temperatureon the 1 micron emission of the industrial used lasers. This small absorption in combination with theunique thermal properties of Cu lead to the fact, that even a small contamination of the surface lead todrastic variation in weld quality if the laser parameters do not match the the local requirements.
Intelligent sensor solutions taking the information from the reflected laser beam and the temperatureof the surface before and during welding offer the potential of solving this problem for these lasers.
According to the room temperature absorption spectrum of copper a wavelength in the visible spectral
region would improve the reliability due to the strong increase in absorption. Diode lasers at 808 nm
or frequency doubled lasers at 532 nm seem to be promising. The need for high intensity on thecopper surface narrows the selection at the moment to pulsed frequency doubled lasers at 532nm.
The radiation of these frequency doubled laser sources are used in special application modes andshow remarkable improvement of quality and reliability in spot welding on copper.

122

Interferometric in-process measurement of free-form
surfaces in laser chemical manufacturing
C. Gerhard, F. Vollertsen
BIAS - Bremer Institut für angewandte Strahltechnik GmbH, Klagenfurter Straße 2, D - 28359 Bremen, Germany

gerhard@bias.deIn this contribution, we report on a fibre-coupled interferometer for in-process measurements of freeform surfaces. In this context, several experiments were performed in order to investigate theinterferometric measurability of rough surfaces at high angles of incidence in both air andinhomogeneous liquids. Here, different materials were tested in streaming and index of refraction
fluctuant water. Thus, the critical angles for interferometric measurability of these particular materials
were determined. In order to realise a control loop as shown in figure 1, this measurement technique
was integrated into a laser chemical manufacturing process, in particular the laser-jet method [1, 2].
By the actual value input signal, a selective and scalable machining process can be realised.

Figure 1 Layout of the control loop based on interferometrically measured actual value input signals

Thus, the performance and measuring accuracy of the fibre-coupled interferometer during the
manufacturing process was evaluated on the basis of simple work piece geometries. In thisconnection, several process parameters such as laser power, laser beam diameter, flow rate of theused etching medium and traverse speed of the work piece were varied in order to determine theinfluence of those parameters on the measuring accuracy of the fibre-coupled interferometricmeasurement setup.
[1] A. Stephen, I. Yazici, A. von Freyberg, M. Fuhrmann, F. Vollertsen, G. Goch, Laser chemical manufacturing of micro forming
tools, Proc. of Int. Conf. on Technology of Plasticity, pp. 2113-2118 (2008)[2] A. Stephen, R. Walther, F. Vollertsen, Removal Rate model for laser chemical micro etching, Proc. of Int. Conf. on Lasers in
Manufacturing, pp. 615-619 (2009)123

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Generation of periodic micro and nano structures bypolarization-controlled laser beam interference
1

1,2

1

S. Beckemper , J. Huang , A. Gillner and K. Wang

2

1- Fraunhofer-Institute for Laser Technology, Steinbachstrasse 15, 52074 Aachen, Germany
2. Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China,
230027 Hefei, China

stefan.beckemper@ilt.fraunhofer.de
Periodic micro and nano structures are required for a variety of different products in micro optics,
semiconductors and products with functional surfaces. Today the common approach is standard
lithography with numerous processing steps including masking imaging, resist development andsubsequent etching. However, for the structuring of large areas with structures sizes in the range from
500 nm to 2 m at short processing times, new approaches are necessary to meet the demand of ahighly efficient manufacturing line. Laser interference structuring can be an appropriate solution toprovide a manufacturing technology which is able to process polymers as well as semiconductors andmetals in a single processing step without any subsequent etching. Different methods have beendeveloped to realize the fabrication of two-dimensional micro structures by interference technology.
The most common method in multiple-beam interference is the phase-controlled four beams
interference. By changing the phase differences of the beam pairs, arrays of micro bumps, microcolumns and many other surface textures can be obtained. Based on the superposition of theelectrical vectors of the incident waves, the resulting spatial intensity distribution in the overlap area
can be controlled by energy ratios, phase differences and the intersecting angles of the incidents
waves. One difficulty of phase-controlled interference is that the phases of the beams are very
sensitive regarding the position of the components and the environment of the lab. For multiple
exposures of dual- or three- beam interference, the interference beams of different exposures need tooverlap on the area, which demands an accurate tool to monitor the spatial orientation.

(a)

(b)

Figure 1 (a) Beam geometry for polarization controlled three-beam interference setup,(b) Micro scale interference pattern structured on the surface of a photoresist

For further increase of geometry flexibility and further stabilisation of the imaging and ablation
process, a multi beam interference technology with polarisation control of the interfering beams andfurthermore an ultra short pulsed laser has been used. According to the theoretical deduction andsimulation of results, different polarization arrangements of the beams were tried out to fabricate
different shaped periodic microstructures. Arrays of circular microbumps, circular microcavities,“eyelike” microcavities, and even rectangular columns were obtained.

124

Production of Microstructures in wide-band-gap
materials using pulsed laser ablation at 157 nm
wavelength
Falk Haehnel, Rene Bertram, Steffen Weissmantel, Guenter Reisse, Rene Boettcher,
University of Applied Sciences Mittweida, Technikumplatz 17, 09648 Mittweida, Germany

fhaehnel@htwm.de

New results on three-dimensional micro-structuring of quartz glass, calcium fluoride, sapphire,magnesium fluoride and PTFE using pulsed laser ablation at 157 nm wavelength will be presented. Alargely automated high-precision fluorine laser micromachining station was used for theinvestigations. The investigations of the ablation behaviour of the various materials in dependence ofthe laser processing parameters will be presented. It will be shown that, on the basis of theknowledge of the ablation rates and the laser beam parameters, bores of a few m size and complex
3D microstructures with a variety of geometries can be produced in the surface of the materials. It will
be shown that the materials can be micro-structured without cracking if proper parameters are used.

(1)

(2)

Figure. 1 Ablated depth per pulse for fused silica (Corning 7980), calcium fluoride and sapphire as a function of laser fluence.
Figure. 2 Optical micrographs of four bores with 6.6 m diameter produced in a fused silica fibre. The fibre has a metal core2
and a total thickness of 80 m (microstructuring parameters: 3.0 J/cm fluence, 200 Hz repetition rate, 7.5 mdiameter of the projected laser beam with the imaging plane being 10 m below the sample surface, 10000 pulses inburst mode, no post-treatment).

125

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Optical system for on-line monitoring in selective laser
melting technology
M. Doubenskaia, M. Pavlov, Yu. Chivel, I. Smurov
1

National Engineering School of St-Etienne (ENISE), DIPI Laboratory, 58 rue Jean Parot, 42023 Saint-Etienne Cedex 2, France

email address: doubensk@enise.fr
A monitoring system is developed to visualize and to control the process of Selective Laser Melting(SLM) of metallic powder. The system is integrated with industrial PHENIX PM-100 machine.
Visualization is carried out using LED illumination and CCD-camera; a home developed pyrometer isapplied for monitoring of thermal phenomena in the zone of laser impact. Deviation of temperaturefrom its optimal value is chosen as a criterion for the express method of quality control.
Methods and diagnostic tools for surface temperature monitoring in laser machining were developed
some years ago [1-7]. The next step is to develop appropriate monitoring systems and integrate themwith laser technological equipment. In the present paper, development of a monitoring system
adapted for SLM-process, and basics of real-time process control, are discussed. SLM-systems areintended for melting a wide range of powder materials with greatly different properties, including
melting point. Therefore the technological windows (i.e. optimum values of laser power, beamscanning speed, powder layer thickness, etc.) are rather different for different powders. The
fabrication of a part with complex form and relatively large size can continue during 10-20 hours
without any information about work in progress and possible problems. The absence of on-line
monitoring and process quality assurance is one of the main obstacles for wide implementation of
SLM technology in modern manufacturing industry. Typically SLM process is carried out in closed
environment without optical access for diagnostic equipment.
To control the correct choice of process parameters and to inspect visually process quality, amonitoring system for SLM process was designed, fabricated and integrated with industrial PHENIX
PM-100 machine.
[1] I. Smurov, Laser process optical sensing and control Proc.IV Int. WLT-Conf. on Lasers in Manufacturing (Munich) (2007),
537- 46.
[2] M. Doubenskaya, Ph. Bertrand, I. Smurov Optical monitoring of Nd:YAG laser cladding Thin Solid Films 453-454C (2003)
477-85.
[3] M. Ignatiev, I. Smurov, G. Flamant Real-time optical pyrometry in laser machining J. of Measurement Science andTechnology 5 (1994) 563-73.
[4] E. Fallahi Sichani, J.-P. Kruth, H. D. Vanhove, J. R. Duflou Real time monitoring and optimization of laser piercing of thickmild steel plates by means of photodiode sensors Proc.V Int. WLT-Conf. on Lasers in Manufacturing (Munich) (2009) 32732.
[5] M. Doubenskaia, F. Bayle, I. Smurov, D. Novichenko Optical monitoring in direct metal deposition Proc.V Int. WLT-Conf. on
Lasers in Manufacturing (Munich) (2009) 591- 96.
[6] F. Abt, L. Nicolosi, A. Blug, F. Dausinger, R.Tetzlaff, H. Höfler CNN-Cameras for closed loop control of laser welding experimental results and prospects Proc.V Int. WLT-Conf. on Lasers in Manufacturing (Munich) (2009) 327- 32.
[7] M. Doubenskaia, Ph. Bertrand, I. Smurov Pyrometry in laser surface treatment Surface and Coatings Technology 201(2006) 1955-61.

126

Applications and perspectives of ultrashort pulsed
lasers1

Th. Bauer , J. König
1
2

2

Robert Bosch GmbH, Plant Bamberg, Technical Functions, Am Boerstig 2, 96052 Bamberg, Germany

Robert Bosch GmbH, Corporate Sector Research and Advance Engeneering, Postbox 30 02 40, 70442 Stuttgart, Germany

Well-known trends in automotive industry are for example miniaturization, higher precision,
diversification of materials, variety of variants and smaller lots. Always on scope has to be costeffectiveness and outstanding quality.
About ten years ago ultrashort pulsed laser material processing showed the potential to satisfy a lot of
the named requirements. So BOSCH coordinated the public funded projects PRIMUS (FKZ
13N7707/04) and PROMPTUS (FKZ 13N8576) together with universities and industrial partners todevelop the ultrashort pulse laser technology from an academic level to a cost-effective production
technology.
First step was to build up knowledge of the fundamental process, in detail the interaction of ultrashortlaser pulse and material [1]. This gives the possibility to define the specifications of applicable laser
systems, for example pulse duration, pulse energy and repetition rate.
In a second step the laser systems were used to build up knowledge in the application process on
defined demonstrator products. Out of this, the laser systems and further system technology is
optimised in an iterative way with respect of robust and cost-effective processes.
The last step was the transfer of this new technology in our production plants.
Since 2007 are ultrashort laser pulses used at the BOSCH plant in Bamberg for production of exhaustgas sensors, shown in figure 1 left. They are made of a special ceramic layer system and canmeasure the exhaust gas properties faster and more precisely. This enables further reduction ofemissions by optimised combustion control.
Since 2009 BOSCH ultrashort pulsed lasers are micro structuring the injector of common rail diesel
systems. A drainage groove allows a tight system even at increased pressures of up to 2000 bar.
Diesel injection systems become even more reliable, powerful and environment-friendly.

Figure 1 Left: Cross section of a lambda-probe trimmed by ultrashort laser pulses. Right: View on top of a diesel injector body.
A drainage groove is structured around the high pressure passage by ultrashort laser pulses.

[1] J. König, S. Nolte, A. Tünnermann, “Plasma evolution during metal ablation with ultrashort laser pulses”, Opt. Express 13,
10597-10607 (2005)

127

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Cu Micropatterns Fabricated by Femtosecond Laser
Direct Writing Using Cu Nanoparticle Ink
1

2*

1*

1

M.C. Yang , A. Watanabe , C.W. Cheng , C.Y. Lin , W.C. Shen

1

1- ITRI South, Industrial Technology Research Institute, No. 8, Gongyan Rd. LiuJia Shiang,
Tainan City 734, Taiwan, R.O.C.
2- Institute of Multidisciplinary Research for Advanced Materials, Tohoku University,
Katahira 2-1-1, Aoba-ku, Sendai 980-8577, JapanCWCheng@itri.org.tw (C.W. Cheng); watanabe@tagen.tohoku.ac.jp (A. Watanabe)
The copper interconnection is one of the most important technologies in microelectronics. The recent
development of the printable & flexible electronic devices requires a new Cu wiring technology by all
wet process. The fabrication of Cu micropattern by sintering of Cu nanoparticle is one of thecandidates. The combination of the Cu nanoparticle dispersed ink with laser direct writing method
provides some advantages [1-3]. The fast sintering process by laser irradiation may be able toreduce the surface oxidation of the Cu nanoparticle and conductivity deterioration. In the case of theconventional heat treatment process using an electric furnace, the oxidation of the Cu nano-particle
surface occurs during thermal decomposition of organic group stabilizing the Cu nano-particle and thesintering of Cu nanoparticles in air because of the slow rate of the decomposition and sintering. In thisstudy, we report the fabrication of Cu micropatterns by femtosecond laser direct writing using Cu
nanoparticle dispersed ink. The surface oxidation of the Cu nanoparticle during sintering is expected
to be decrease due to the short pulse duration of the femtosecond laser. The increase in the
thickness of the sintering layer by femtosecond laser irradiation is also expected by nonlinear effects.
As Fig.1 shown, the Cu nanoparticles was sintered by 800nm, 80MHz femtosecond laser and acopper line with ~9 μm high and ~30μm width is formed on glass substrate. Figure 2 shows a hollow
column can be produced by the same femtosecond laser with the high ~6μm and outer and innerdiameter of ~50 and ~15μm.

Figure 1 Cu line formed by femtosecond laser sintering. Theline width is ~30μm and the high is ~9μm.

Figure 2 Cu hollow column formed by femtosecond laser
sintering. The high is ~6μm and outer and inner diameter are~50 and ~15μm.

[1] A. Watanabe, Y. Kobayashi, M. Konno, S. Yamada, and T. Miwa, Jpn J. Appl. Phys., 44(23), L740 (2005).
[2] M. Aminuzzaman, A. Watanabe, and T. Miyashita, J. Mater. Chem., 18, 5092 (2008).
[3] A. Watanabe, M. Aminuzzaman, and T. Miyashita, Proc. SPIE, 7202, 720206 (2009).

128

3D Processing 1
TIME

Event

DATE

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June
08

12:40
–
13:00

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

Speaker: Roberto Osellame

09:50
–
10:10

3D laser lithography andnanoimprint lithography:
versatile methods for the
micro- and nano fabrication ofphotonic structures

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

TIME

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Biological and medical
applications
Laser Decal Transfer of Nanomaterials

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

3D Processing 2
Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

DATE

June
08

Speaker: Alberto Piqué

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Event

16:30
–
16:50

17:10
–
17:30

Speaker: Sönke Steenhusen

TIME

June
08

Speaker: José L. Ocaña

Speaker: Volker Schmidt

10:10
–
10:30

DATE

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann129

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

LPM 2010: Session list
3D Processing 1
TIME

Event

DATE

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June
08

12:40
–
13:00

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

Speaker: Roberto Osellame

09:50
–
10:10

3D laser lithography andnanoimprint lithography:
versatile methods for the
micro- and nano fabrication ofphotonic structures

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

Biological and medical
applications
June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Speaker: Sönke Steenhusen

TIME

Event

09:20
–
09:50

Optical Trapping of Biomolecules and Nanoparticles
Based on Resonance andSurface Plasmon (Invited)

09:40
–
10:00

3D Processing 2
Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

130

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves

12:00
–
10:40

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

DATE

Speaker: Yasuyuki Tsuboi

10:00
–
10:20

TIME

June
08

Speaker: José L. Ocaña

Speaker: Volker Schmidt

10:10
–
10:30

DATE

June
08

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications
Speaker: Toshihiko Ooie

June
08

Frequency-doubled High-power Nanosecond Lasers
for Materials Processing
ChristianStolzenburg, Wolfgang
3D
Processing
1 Schüle , Ivo Zawischa , Alexander Killi , and Dirk Sutter
1

1

TIME

2

3

4

5

TRUMPF Laser GmbH + Co. KG, Aichhalder Straße 39, 78713 Schramberg, Germany

Event

DATE

TIME

Event

DATE

High-power short-pulsed lasers in the green spectral range are becoming a versatile tool for highly
09:20
Femtosecond
microma12:40
of 2D/3DWe
Microproductive
materials laser
processingin the June
photovoltaic
and Development
electronic industry.
present Junethe–chiningenables
opto­flapplications
uidic– pulsedmachining
Processes
development
andpromisingof08a green ns
high-power
laserBasedbased on a 08
Q09:50sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
switched(Invited)
Yb:YAG thin-disk laser.
for Industrial Manufacturing
Speaker: Roberto
Osellame
Speaker: excellent
José L. Ocaña
The advantagesof thethin-disk laser concept [1] – high efficiency,
beam quality, and low
depolarization losses – make this reliable platform well suited for the generation of high power lasers
09:50
3D laser lithography andJunein–the infrared
as welllithography:
as the green spectral 08
range. Green pulses with a few hundred nanoseconds ofnanoimprint
pulse durationcanbe generated
10:10
versatile
methods
for the by inserting a fast electro-optic switch inside the laser resonator andmicro- intracavity-frequency
and nano fabrication of
by employing
conversion [2]. We have obtained a maximum output power ofstructures
Biologicalandmedical
700 W atphotonic
a wavelengthof 515 nm at 100 kHz pulse repetition
frequency. An LBO
crystalcut for criticalapplications
phase matching
of
type
I
was
mounted
near
one
of
the
end
mirrors
insidethelasercavity for
Speaker: Volker Schmidt
Event pumping power greater thanDATE
frequency doubling. An optical efficiency with respectTIME
to incident
35%
10:10
selective
could beInfluence
reached.of The
pulselaser
duration of June
the laser system can be adjusted between 200 ns and
16:30
Laser Decal Transfer of NanoJune
2– ns. The
melting
process
parameters
onof 4 mm
08 mrad (Mallows for beam delivery via a 100 m750
beam
parameter
product– < 25) materials
08
10:30
morphology of single vectors
optical fiber.
16:50
from metal powder
Speaker: Alberto Piqué

Speaker:
Igor Yadroitsev
To the bestof ourknowledge, the average power significantly exceeds all previously published results
16:50
Dynamics of the Laser Decal
June
for lasers in the visible spectrum and enables a high productivity
for thelaser applications. Typical–Transfer
Process
08
09:20
3D sub-diffraction-limit
Juneapplications
includeofdrilling,surface structuring,
17:10and cutting of hard, brittle material such as–
patterning
hybrid polymers
08 annealing
Speaker: Scott A. Mathews
silicon anddiamond.
09:50
withvisible and infrared laser

pulses

17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators
Speaker: Niklas Pucher

DATE

June
08

17:30
–
17:50

Speaker: Hong-Bo Sun

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

Left: Output power and opt.-opt. efficiency.

June
08

Speaker: Agnès SouquetTwo-photon polymerization as
June
17:50
Laser Induced Forward
method for the fabrication of
08–
Transfer: A Compact Machine
large scale biomedical scaffold
18:10rate.
applications
Figure 1 Short-pulsed
frequency-doubled disk laser at 100 kHz repetition

12:00
–
12:20

Speaker: Thomas Stichel

June
08

June
08

Speaker:
Dominik
Riester
Right: Typical
pulse
shape
with 500 ns pulse duration.

18:10
Fabrication of Optical InterJune[1] A. Giesen, H. Hügel, A. Voss, K. Wittig, U. Brauch, and H. Opower, “Scalable concept for diode-pumped high-power solid–
connects with two photon
08
12:20
Fabrication of 3D Protein
Junestate lasers”, Appl. Phys. 58, p. 365 (1994).
18:30
polymerization–
Microstructures
08
[2]
C.
Stolzenburg,
A.
Giesen,F.
Butze,P.
Heist,
andG.
Hollemann,“Cavity-dumped
intracavity-frequency-doubled
Yb:YAG
12:40
thin disk laser
with 100 W average power”, Opt. Lett. 32, p. 1123 (2007).
Speaker: Sascha Engelhardt

Speaker: Klaus Stadlmann131

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Surfaceablationlistof dielectrics with sub-10 fs to 300
LPM
2010: Session
fs laser pulses: Aspect ratio and crater shapeevolution
as1a function of laser intensity
3D
Processing
2
Event
TIME
Event
O. Utéza1, N. Sanner1, B. Chimier1, DATE
M. Sentis1, P.
Lassonde, F. Légaré2, J.C. Kieffer2

TIME

DATE

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune
1- Laboratoire LP3, UMR 6182 CNRS – Université de la Méditerranée, C. 917, 163, Av. de Luminy, 13288 Marseille cedex 9, France–
chiningenables
opto­
fl
uidic
08
–
machining
Processes
Based08
2- INRS, Energie, Matériaux et Télécommunications, 1650 bld Lionel Boulet, Varennes (Québec), Canada, J3X 1S2
09:50
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited)for Industrial Manufacturing

Email address: uteza@lp3.univ-mrs.fr

Speaker: Roberto Osellame

Speaker: José L. Ocaña

Femtosecond laser pulses provide a variety of possibilities for high precision processing of both metals
09:50
3D laserlithography
anddielectricmaterials[1]. Inandparticular, theJuneadvantages of these interactions include the minimization of–
nanoimprint lithography:
08
collateral
damages,thereductionofheat-affected
zones, a deterministic damage behavior, and the ability to
10:10
versatile methods for themachine sub-diffraction
limitedtarget ofregions. These advantages facilitate the development of numerous
micro- and nanofabrication
photonic
structures
Biologicaland medical
applications,such asultra-precise laser treatment, laser surgery,and industrial micromachining(drilling,
writing, etc.).
applications
Speaker: Volker Schmidt

In this paper, we study the physical characteristics of surface ablation craters in fused silica (Suprasil)
10:10
Influence of selective laser
June
TIME
Event
DATE
createdbydirect laser
drillingwith sub-10–
melting
process
parameters
onfs to 300
08 fs single laser pulse (800 nm). These investigations aim toprovideandof control
over important laser processes
like damage/ablationthreshold
10:30 knowledge
morphology
single vectors
09:20 parameters
Optical Trappingof BioJune
from
metal
powderfluence [2],craterdepth,
diameter and shape, and extension of–heat-affected
zone,andas aNanoparticles
function of applied laser
molecules
08
09:50different
Basedon Resonanceand by selecting
intensity. In particular, we show that it is possible to accessrangesof crater depths
Speaker: Igor Yadroitsev
Surface
Plasmon(Invited)
different pulse durations (see figure 1a) while the crater diameter only
depends
on theapplied fluence (seefigurealso demonstrate that selectiveJune
crater morphology, Speaker:
e.g. Gaussian-like
09:20 1b).
3DWe
sub-diffraction-limit
Yasuyuki Tsuboito top-hat micrometer– canpatterning
hybridpolymers
crater,be obtainedofwith
the samelaser system,08mainly depending on the applied fluence. These informations
09:50
with visible
and infraredlaser any laser-based09:40
In Vivo Writing
using
TwoJuneareof crucial
importancefor finalizing
micromachining
processes
andfor laser-matter
pulses–Photon-Polymerization
08
technology in general.
10:00

Speaker: Sönke Steenhusen

H o le d e p th ( n m )

250
200

3D Processing 2

7 fs

1,6

30 fs

1,4

100 fs

1,2

300 fs

Event

0

12:00
–
12:20

0,4
0,2

Speaker: Hong-Bo Sun
0

1

2

3

4

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

12:00
–
0,6
10:40

June
08

5

6

7

Two-photon polymerizationasF/Fthmethod for the fabricationoflarge scale biomedical scaffold(a)applications

8

9

June
08

10

0

June
08

Speaker: Sandra Alves

1

0,8

DATE

3D Polymerization for
Functional Devices (Invited)

11:30
– 50
12:00

Femtosecond laser ablationof dentin: A characterisation
study

10:00
–
10:20

150

TIME
100

Speaker: Jan Torgersen

1,8

D/2w 0

300

0

10:40
–
11:00

1

2
3 Yasutaka
4
5
6
Speaker:
Hanada

F/Fth

7

8

Laser-controlled Injector for
Biological(b) Applications

7 fs

June
08

30 fs
100 fs
300 fs
9

10

June
08

Toshihiko
Ooie
Figure Speaker:
1a,b. Evolution
depth (a) and normalized crater diameter D/2w0 (b)Speaker:
as a functionof normalized
fluence and forThomasofStichel
different pulse durations. Fth refers to the ablation threshold fluence and w0 to the beam waist (w0 ≅ 4.5 µm in all theexperiments).
The errorof
bars
12:20
Fabrication
3DcorrespondProtein to the standard
Junedeviation observed in the AFM measurements (typically on 3 to 5
events–Microstructures
08per fluence point).

12:40

Speaker: Sascha Engelhardt[1] R. Gattass and E. Mazur, Femtosecond laser micromachining in transparent materials, Nat. Phot., 2, 219-225 (2008).
[2] N. Sanner, O. Utéza, B. Bussiere, G. Coustillier, A. Leray, T. Itina, M. Sentis, Measurement of femtosecond laser-induced
damage and ablation thresholds in dielectrics, Appl Phys A, 94, 889-897 (2009).

132Laser-matter interaction in fusion welding of glass using
ultrashort laser pulses-Formation
mechanism
and prevention of weld defects3D Processing
1
1

TIME

09:20
–
09:50

2

3

I. Miyamoto , Y.
OkamotoTIME, K. Cvecek, M. Schmidt
DATE
Event

Event

3

1- Osaka University, 2-1, Yamada-Oka, Suita, Osaka 565-0871, Japan
Femtosecond laser
micromaJune
12:40Okayama
Developmentof 2D/3D Micro2-Okayama
University, 3-1-1,
Tsushimanaka,
700-8530, Japanchining enables
opto­fluidic–
machining
Processes
3- Bayerisches
Laserzentrum, 08
2-6, Konrad-Zusestr,
Erlangen
91052,
Germany Basedsensing in lab-on-a-chip(Invited)

13:00

on Nanosecond Laser Sources

DATE

June
08

for Industrial Manufacturingisamu.miyamoto@ares.eonet.ne.jp

Speaker: Roberto Osellame

Speaker: José L. Ocaña

We have shown that glass can be welded using laser pulses with duration between several hundred
09:50
3D laser[1]lithography
andJune pre- and post-heating, when welding conditions are
femtoseconds
to ten picoseconds[2] without–nanoimprint
lithography:
08
well selected
for glass materials including borosilicate
and fused silica. We also found, however, weld
10:10
versatile methods for thedefects microcan beandproduced,
when thenano fabricationof welding conditions are not selected appropriately. The paper
photonic
structures
analyzes
the causeof weld defects under different process
conditions suchandas pulse
energy, pulse
Biological
medicalrepetition rate, translation speed, NA of focusing lens and focus position
with respect to the surface.
applications
Speaker: Volker Schmidt
The analysis is based on thermal conduction analysis TIME
to investigate
the effect of temperature field
Event
DATEoncracking.
The
stress
field
in
also
analyzednumerically.
The
pictures
are
also
taken
using
high-speed
10:10
Influence of selective laser
June
Decal Transfer
of NanoJune–
melting
process
08
camerato observe
the parameterslaser-matteroninteraction.
The16:30
effect ofLaser
mechanicalstrengthof molten zone–
materials
08
10:30
morphology
of single
vectors
producedin bulk glassmaterial
is also experimentallyinvestigatedusing
three-point
bending
test,
16:50
from metal powder
indicating the strength is equal to or even higher than basematerial,
as shown in FIg. 1. The
Speaker:
Alberto Piqué
mechanicalstrengthof overlapped weld joint is also made using shear stress test.
Speaker:
Igor Yadroitsev
09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

16:50
–
17:10
17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2

Dynamics of the Laser Decal
Transfer Process

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

Fig. 1 Mechanical strength of molten zone of borosilicate glass determined by
17:30
Laser Assisted Bioprinting
three-point-bending test.

Juneof Cells & Biomaterials:
08
Development of a Dedicated[1] I. Miyamoto, A.
Horn,
J.
Workstation,
Experimental
11:30
for
June fusion welding of glass
Gottmann3D
andPolymerization
F. Yoshino, High-precision,
high-thofughput
using femtosecond
laser pulses, Journal of
Results and Jet Formation–
Functional
08
JLMN,
vol.2,
pp. 57-63,Devices(2007). (Invited)
Modeling
12:00[2] I. Miyamoto, A. Horn, J. Gottmann, Local melting of glass material and its
application to direct fusion welding by ps-laser
TIME

Event

DATE

–
17:50

Speaker: Hong-Bo Sun
pulses, Journalof JLMN, vol.2, pp. 1-6, (2007).

12:00
–
12:20

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann133

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Robustflexible
LPM
2010: andSessionlistpicosecond lasers for industrial
micromachining

1

2

3

4

5

6

K. Weingarten , F. Brunner , I. Klimov , A. Bardorf , P. Wenger , M. Benetti ,3D Processing
W.1Schuesslbauer7, H. Ammann81

TIME

Time-Bandwidth Products AG, Technoparkstrasse 1, CH-8005 Zurich, Switzerland

Event

DATE

TIME

Event

DATE

info@tbwp.com
June
12:40

09:20
Femtosecond laser micromaDevelopment of 2D/3D MicroJune–
chining enables opto­fluidic
08–
machining Processes Based08
09:50
sensingin lab-on-a-chip
Nanosecond
Laser (>10
SourcesPicosecond
pulsedlasers with high pulse energy (>1013:00
J) andonhighaverage powerW) provide(Invited)for Industrial Manufacturing

reliable and high-quality microprocessing of many different materials via a process called coldablation. Speaker:
TheseRoberto
laserOsellame
sources open new process windows thatcannotbe addressed by typical
Speaker:
José L. Ocaña
nanosecond Q-switched lasers in applications like precision hole drilling, micromachining, thin-film
09:50
3D laserlithography
June are rapidly approaching the durability, cost, and turnscribing andmore.
Industrial andpicosecond lasers–
nanoimprint lithography:08
keyof matureforQ-switchedlasers. However, achieving optimized process performance
10:10performanceversatile methods
thewith picosecond
systems
requires lasers
micro- andnano fabricationof offering the appropriate flexibility.

Biological and medical

photonic structures

The paper
reviews recent developments in industrial picosecond laser
performance and the features
applications
Speaker: Volker Schmidt
required to achieve optimum performance. Often, the first key choice a user must make is theaverage
optical powerof the laser
system, which
is driven TIME
by the desired
process speed. If speed isan
10:10
Influenceof selective
June
Event
DATE
–
melting
process
parameters
onbut equally
08
issue,
highaveragepower
is required,important are high-speed scanning, careful process
10:30
morphology
of single
vectors
09:20
June
development,
and a laser
allowing
for fast pulse repetition
rates.Optical Trapping of Biofrom metal powder

molecules and Nanoparticles
08
Based on Resonance and
The typical
processdevelopment starts with the determination Surfaceof the minimum
energy required
Speaker:
Igor Yadroitsev
Plasmonpulse(Invited)–
09:50

for cold ablation. Highest quality is typically achieved when the laser is operated just over the ablation

09:20
3DTherefore,
sub-diffraction-limit
Junethe freedom to Speaker:
Tsuboi energy. With fixed
threshold.
the laser should offer
adjust Yasuyuki
the pulse–
patterning of hybrid polymers
08
repetitionwith
ratevisible
lasersandbased
on regenerative
amplification, the only way to obtain the desired pulse
09:50
infrared
laser
09:40
In Vivo Writing using TwoJune
energy ispulses
to attenuate the beam, which is not ideal frompoint of view. More efficient is 08
to– a cost
Photon-Polymerization
decrease the pulse energy by increasing the repetition10:00
rate, as this allows using the full optical power
Speaker: Sönke Steenhusen
Speaker:
Torgersen (e.g. 100 kHz to 10
at any pulse
energy. This requires systems with “true” repetition
rateJanflexibilityMHz) that is offered only by lasers based on a MOPA architecture.

10:00
Femtosecond laser ablation
June–of dentin: A characterisation
08
Another advantage of MOPA lasers is the possibility10:20
to replace
an individual pulse with bursts of
study

pulses on the nanosecond time scale, which can further improve process performance. This extra
3D Processing 2™
Speaker: Sandra
Alves, allowing
for a user-defined
flexibility is implemented using a newly developed feature, FlexBurstenergy distribution within the burst, as shown below. 12:00
Mechanism study of gliding
June
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Thomas Stichel

12:20
–
12:40

–
10:40

Fabrication of 3D Protein
Microstructures

movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications

June
08

Speaker: Toshihiko Ooie

June
08

Speaker: Sascha Engelhardt(a)(b)
Figure 1 (a) Fast pulse-on-demand switching. (b) FlexBurst pulse control showing a train of closely spaced pulses. Shown is anequal pulse energy burst, however each pulse can have an arbitrary user-set energy within the burst.

134

3D Processing 1
TIME

Event

DATE

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June
08

12:40
–
13:00

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

Speaker: Roberto Osellame

09:50
–
10:10

3D laser lithography andnanoimprint lithography:
versatile methods for the
micro- and nano fabrication ofphotonic structures

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

TIME

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Biological and medical
applications
Laser Decal Transfer of Nanomaterials

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

3D Processing 2
Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

DATE

June
08

Speaker: Alberto Piqué

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Event

16:30
–
16:50

17:10
–
17:30

Speaker: Sönke Steenhusen

TIME

June
08

Speaker: José L. Ocaña

Speaker: Volker Schmidt

10:10
–
10:30

DATE

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann

135

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laserlist
Microwelding of Glass Substrates
LPMUltrafast
2010: Session

with High Strength by Sparse Scanning Technique
3D Processing
1 1, M. Matsumoto1, H. Yamamoto2, K. Itoh1
Y. Ozeki
1- Graduate School of Engineering, Osaka Univ., 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

TIME

Event
TIME
Event
2- NEC Schott Components Co., Ltd., 3-1 DATE
Nichiden, Minakuchi-cho,
Koka-shi, Shiga 528-0034, Japan

DATE

Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune
ozeki@mls.eng.osaka-u.ac.jp
chining enables opto­fluidic
08–
machining Processes Based08
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
Ultrafastlaser microwelding [1-3] using focused femtosecond
laser pulses
can join transparent(Invited)for Industrial
Manufacturing

09:20
–
09:50

glass material [1] as well as dissimilar materials [2-3]. An intriguing application is hermetic sealing with
Speaker:
RobertoOsellame
Speaker: José
Ocaña
glass while
keepingthesample at the room temperature [4]. Although
the L.joint
strength is as high as
15 to ~30 MPa, there is a room to further improve it considering the strength of glass (~1 GPa).
09:50
3D laser lithography andJune
we foundlithography:that a large amount 08
of internal stress accumulates inside a glass substrate–Recently
nanoimprint
after
irradiationmethodsof focused
femtosecond pulses over a planar region through the raster scanning
10:10the versatilefor themicroandnano fabricationofof the sample[5].
Furthermore,
the stresscan be significantly reduced when the spacing between thephotonic structures
Biologicalandmedicaladjacent scans is sparse. In this paper, we demonstratethat such sparse
scanning
techniqueapplications
effectivelySpeaker:
enforces
joint strength in ultrafast laser welding through the reduction of internal stress.
Volkerthe
Schmidt
3
Two BK7 substrates with a size of 5 x 5 x 1 mm were stacked, and pressed from the top and the
10:10 toInfluenceof selective
laserAfter theJune
Eventbottomachieve precise
contact.
pressure isTIME
released,
femtosecond laser pulses (800DATE
nm,–
melting process parameters on
08
100
fs,
1
kHz,
5
J)
were
focusedbyanobjective
lens
(x10,
NA0.3)
attheinterface
betweenthe
10:30
morphology of single vectors
09:20
OpticalofTrappingof BioJune
substrates.
Thesamplepositionwasraster-scannedatavelocity
0.1
mm/s
to
form
9
weldedfrom metal powder–
molecules and Nanoparticles
082internal
stress wasandinvestigated byregions with a size of 100 x 100 m . After the irradiation,
09:50 theBasedon Resonance
Igor Yadroitsev
Plasmon(Invited)polarizedSpeaker:
microscopy,
and the joint strength was measured by Surface
the tensile
test. The
spacing between
the scans was varied from 1 to 4 m, and three samples were prepared for each condition. As shown
09:20
3D sub-diffraction-limit
June
Speaker: Yasuyuki Tsuboi
in Fig.
1,patterning
the internal–of stress
hybrid decreases
polymers and joint
08 strength increases as the spacing increases. When
09:50
withisvisible
laser is drastically increased
thespacing
4 m,andtheinfrared
joint strength
to Vivo>170Writing
MPa, using
which Twois limited by June
our
09:40
In
pulsesmeasurement
setup. In this way, the sparse scanning techniqueis effective for achieving strong joint–
Photon-Polymerization08
10:00
in ultrafast
laser
microwelding
technique.
Speaker: Sönke Steenhusen
Speaker: Jan Torgersen

10:00
–
10:20

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

Speaker: Hong-Bo Sun

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves
DATE

June
08

12:00
–
10:40

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

(a)
(b)Hanada
Speaker: Yasutaka
Two-photon polymerization as
Junemethodfor the fabrication
Figure1 Dependenceof (a) internalofstress and08(b) joint strength
spacing between theInjector
adjacent forscans.
10:40on theLaser-controlledlarge
scaffold
Inset:scale
opticalbiomedical
microscope imageof the joint. Cross: the location
where
the internal
stress is evaluated.
–
BiologicalApplications
applications
11:00

June
08

June
08

Speaker:using
ToshihikoOoie[1] T. Tamaki,
W. Watanabe,
J. Nishii, and K. Itoh, Welding of transparent materials
femtosecond
laser pulses, Jpn. J.
Speaker:
Thomas Stichel
Appl. Phys., vol. 44, pp. L687-689, (2005).
[2]
W. Watanabe,
S. Onda,K. Itoh, and J.June
Nishii, Space-selective laser joining of dissimilar transparent materials
12:20
Fabricationof T.
3DTamaki,Proteinlaser pulses, Appl. Phys. Lett., vol.
–using femtosecond
Microstructures
0889, p. 021106, (2006).
[3]
Y. Ozeki, T. Inoue, T. Tamaki, H. Yamaguchi, S. Onda, W. Watanabe, T. Sano, S. Nishiuchi, A. Hirose, and K. Itoh, Direct
12:40
welding Speaker:
betweenSascha
copperEngelhardt
and glass substrates with femtosecond laser pulses, Appl. Phys. Express, vol. 1, p. 082601 (2008).
[4] Y. Ozeki, H. Yamamoto, H. Yamaguchi, K. Itoh, Hermetic sealing of ceramic packages with glass by ultrafast laser welding
technique, the 5th International Congress on Laser Advanced Materials processing (LAMP2009), MoOL1-7, (2009).
[5] M. Matsumoto, Y. Ozeki, H. Yamamoto, K. Itoh, Stress analysis of planar regions processed by femtosecond laser pulses,
Tech. Dig. Autumn Meeting of Japan Society of Applied Physics, 9p-V-3, (2009) (in Japanese).

136

Recent advances in high power ultrafast thin disklaser oscillators
Processing
1 , C. Kränkel , C.J. Saraceno , O.H. Heckl , M. Golling ,T. 3DSüdmeyer, C.R.E. Baer
78910
R. Peters , K. Petermann , G. Huber , and U. Keller
1

TIME

Event

1

2

3

4

5

6

DATE
Event
Department of Physics, Instituteof QuantumTIME
Electronics,
ETH Zurich, Switzerland
7,8,9
Institute of Laser-Physics, University of Hamburg, Germany

DATE

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune–
chining enables opto­fluidic
08–
machining Processes Based08
Ultrafastsensing
thin disklaser oscillators achieve the highest
averagepowersLaserand pulse
energies of
09:50
in lab-on-a-chip
13:00
onoutput
Nanosecond
Sources(Invited)for Industrial
Manufacturing
any laser
oscillator technology. The thin disk concept avoids
thermalproblems occurring inconventional high power rod or slab lasers and enables high power TEM 00 operation with broadband
Speaker: Roberto Osellame
Speaker: José L. Ocaña
gain materials [1]. Stable and self-starting passive pulse formation is achieved with semiconductor
saturable
mirrors (SESAMs,[2]).June
The key components of ultrafast thin disk lasers such as
09:50
3Dabsorberlaser lithographyand– material,
nanoimprint
lithography:
gain
SESAM
and dispersive cavity08
mirrors are all used in reflection. This is an advantage for
10:10
versatileofmethods
forpulses
thethe generation
ultrashortwith excellent temporal, spectral and spatial properties, because
micro- and nano fabrication of
the pulses
are not
affected by large nonlinearities in the oscillator.
Output powers
above 100 watts
photonic
structures
Biologicaland medical
and pulse energies above 10 J are directly obtained without any additional amplification, whichapplications
Speaker:lasers
Volker Schmidt
makes theseinteresting for a growing number of industrial and scientific applications such as
TIME
Event
DATE
material processing or driving experiments in high field science. Ultrafast thin disk lasers are based
10:10
Influence of selective laser
Juneonconcept,
and substantiallypower levels
feasible.of NanoLaserappear
Decal Transfer
June– a power-scalable
melting processparameterson
08 higher16:30
10:30

–

morphology of single vectors

materials

08

Optimization of feature resolu-

Junefrom metal
Until recently,
mostpowder
thin disk lasers relied on the gain16:50
material Yb:YAG. Its good thermo-mechanical
Speaker: Alberto Piqué
properties and well-established manufacturing process make it an excellent choice for high power
Speaker: Igor Yadroitsev
continuous-wave applications. However, its limited 16:50
gain bandwidth
the pulseinDynamicsrestrictsof the Laser
Decal duration
June–
Transfer
Process exhibit a larger gain
08
mode-locked
operation to about 700 fs. June
Other Yb-doped
gain materials
09:20
3D sub-diffraction-limit
17:10–
patterningof hybridshorter
polymers
08
bandwidthand support
pulse durations.
In this presentation, we discuss the latest
Speaker: Scott A. Mathews
09:50
with visible
and infrared
developmentof ultrafast
thin disklaser
lasers based on other gain materials.
pulses

17:10

–
tion,
processing
window& the highest
08
The recently
sesquioxide materials are particularly
promisingas they
enabledSpeaker:developed
Sönke Steenhusen
17:30 duration
structuring
for theachieved
twooptical-to-optical efficiency (43%) and shortest pulse(227 timefs) everwith aphoton polymerization(2PP)
power scaling,modelocked thin disk laser. The gain material Yb:Lu2O3 is particularly
process byinteresting
the use of for
novel
because it has a better thermal conductivity compared to Yb:YAG
and can be efficiently pumped atinitiators
the zero-phonon line at 975 nm with a low quantum defect. The first mode-locked thin disk laser
Speaker: of
Niklas3D Processing
2 power limited average power
24 Pucher
W and an optical-to-optical
based on Yb:Lu
2O3 achieved a pumpefficiency of 43%, which was higher than for previous17:30
ultrafastLaserthin Assisted
disk lasers[3]. Very recently,June
weBioprinting
demonstrated
successful power scaling of
this material –to an average
power
of
141
W,
setting
a
new
TIME
Event
DATE
of Cells & Biomaterials:
08
17:50
Developmenta Dedicatedrecord for mode-locked laser oscillators. The laser generates
738 fs pulsesofwith
an optical-to-optical
Workstation,
Experimental
11:30
3Dof
PolymerizationforJune (M 2 < 1.2). The
laser crystal
used for this experiment
efficiency
40.1% in a diffraction
limited beam
Results and Jet Formation–
Functional Devices (Invited)08
hasa
diameter
of
5.2
mm,
which
is
not
suitableforafurtherincrease
of
the
pump
spot diameter. With
Modeling
12:00
larger disk
diameters
and a more powerful pump, an average power towards several hundred watts
Speaker:
Hong-Bo Sun
Agnès Souquetappears feasible, as the current experiment did not reveal any Speaker:
other limiting
factors.

12:00
Two-photon polymerization as
June
17:50
Laser Induced Forward–
method for the fabrication of
08
[1]
A.
Giesen,etal.,"Scalable
Concept
for
Diode-Pumped
High-Power
Lasers,"Phys. Machine
B 58, 365-372– Solid-State
Transfer:
A Appl.
Compact
12:20
large scale biomedical scaffold(1994).applications
18:10

June
08

[2] U. Keller, et al., "Semiconductor saturable absorber mirrors (SESAMs) for femtosecond
to nanosecond
pulse generation in
Speaker: Dominik
Riestersolid-statelasers,"IEEEStichel
J. Sel. Top. Quantum Electron. 2, 435-453 (1996).
Speaker:
Thomas[3] S. V. Marchese, et al., "Efficient femtosecond high power Yb:Lu218:10
O3 thin diskFabrication
laser," Opt. Express
15, 16966-16971(2007).
of Optical
InterJune

12:20
–
12:40

Fabrication of 3D Protein
Microstructures

Speaker: Sascha Engelhardt

June
08

–
18:30

connects with two photon
polymerization

08

Speaker: Klaus Stadlmann137

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laser
LPM
2010:processing
Session listof tungsten powder with femto
second laser radiation

Processing
1
R. Ebert,3D
D. Hildebrandt,
F. Ullmann,
L. Hartwig, S. Kloetzer, A. Streek, J. Schille, H. Exner
TIME

Event

University of Applied Sciences Mittweida, Laser Application Centre,
TIME
Event
TechnikumplatzDATE
17, 09648 Mittweida,
Germany

DATE

Femtosecond laser microma- ebert@hs-mittweida.de
June
12:40
Development of 2D/3D MicroJune
chining enables opto­fluidic
08–
machining Processes Based08
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
In this paper
laser irradiation of dispensed tungsten powder layerswith grainManufacturing
sizes smaller than 1 m
(Invited)for Industrial
09:20
–
09:50

was investigated by using high repetition rate femto second laser technologies. Laser processing was
Speaker: Roberto Osellame
Speaker: José L. Ocaña
performed
line by line with repetition rates of 1 MHz and varying
processing parameters, such as
laser
processing
speed,
over scans, and pressure. Next to expected material
09:50 power,
3D laserlithography
and number ofJune
ablationand melting,novel phenomena, 08
such as crystallisation, emerge of ripple structures,–nanoimprint
lithography:
10:10
versatile
methods fortheformation of nano wires will be qualitatively discussed by means ofextensively
agglomeration,
andmicro- and nano fabrication of
SEM photographs.
Further a dependence of light pressure, pulse overlap, and irradiated energy perphotonic structures
Biological and medical
unit section will be demonstrated. As a first application of innovative laser micro sintering technology
applications
Speaker:
Volker Schmidt
using highly
repetitive
femto second laser pulses, highly resolved micro
structures will be presented.
10:10
–
10:30

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Speaker: Sönke Steenhusen

TIME

Event

09:20
–
09:50

Optical Trapping of Biomolecules and Nanoparticles
Based on Resonance andSurface Plasmon (Invited)

09:40
–
10:00

3D Processing 2
Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

138

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves

12:00
–
10:40

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Yasuyuki Tsuboi

10:00
–
10:20

TIME

DATE

June
08

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications
Speaker: Toshihiko Ooie

June
08

Laser Glass frit Bonding for Hermetic Sealing of Glass
Substrates and Sensors
3D Processing 1

1

A. Olowinsky , H. Kind

1

1- Fraunhofer Institute for Lasertechnology, Steinbachstr. 15, 52074 Aachen, Germany
TIME

Event

DATE

TIME

Event

DATE

Alexander.Olowinsky@ilt.fraunhofer.de

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune–
chining enables opto­fluidic
08–
machining Processes Based08
Today glass
fritsinare
used in the industrial manufacturing,in the electricalengineering and
09:50
sensinglab-on-a-chip
13:00particularly
on Nanosecond
Laser Sources
electronics
especially with electric bushings and the hermeticfor
sealing
housings.
The durability and(Invited)Industrial
Manufacturing

the mechanical load capacity of such a connection are depending on the mechanical tensions having
Speaker: Roberto Osellame
Speaker: José L. Ocaña
an effecton the junction. On account of these tension problems
most joining processes go through atemperaturetimelithography
profile whatsignifies a high,
09:50
3D laserandJunenevertheless necessary temperature load for the wholeassembly.
–
nanoimprint lithography:
08
10:10
versatile
methods
for tothe
For many
applications,e.g.,the encapsulation of microsensors or microactuators or the production
micro- and nano fabrication ofof assemblies
withorganic components these necessary process temperatures are too high, so thatphotonic
structures
Biological and medical
single components are already damaged by diffusion processes. The necessity of a low temperatureapplications
Speaker: Volkeror
Schmidt
joining technology
a joining technology with locally restricted energy
bringing into play is indicated
TIME
Event
DATE
therefore. The laser beam soldering by means of glass frit shows a possibility which concentrates
the
10:10
Influenceof
selective
laser
June
necessaryenergyspatially
restricted
inthejunctionarea
thus
minimisesthewholewarming
of
the
16:30
Laser Decal Transfer of NanoJune–
melting process parameters on
08
components.
Laser ofbeam
soldering
it possible to concentrate the energy
08
10:30
morphology
singlevectors using glass solder–makesmaterials
metal powder
needed fromfor making
the connection so that it is spatially16:50
limited to the joining zone and thus to minimize
Alberto Piqué
the total increase in heat of the components being joined. TheSpeaker:
energynecessary for melting, wetting
Speaker: Igor Yadroitsev
and connecting the parts being joined is based on the16:50
absorption
of
the
laser
applied inJune
the
Dynamics ofthe radiation
Laser Decal
glass
solder.
The
local
introductionofenergymust
beadjusted
in
terms
of
time
and
geometry
insuch–Transfer
Process
08
09:20
3D sub-diffraction-limit
Junepatterningof hybrid
polymers
08 flowing 17:10
a–way thatthe viscosity
neededfor adequate
and wetting is achieved in the glass solder andSpeaker: Scott A. Mathews
09:50
with visible
and infrared
laser
the evaporationof glass
solder constituentsis avoided.
pulses

17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

June
08

Speaker: Niklas Pucher

DATE

Speaker: Hong-Bo Sun

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

17:30
–
17:50

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès SouquetTwo-photon polymerization as
June
17:50
Laser InducedJunemethod for the fabrication
08(a)of(b) Forward–
Transfer: A Compact Machine08
large scale biomedical scaffold
18:10 in 8 point form. (b) Glass frit bonding of two glass
Figure 1applications(a) Experimental setup for laser based glass frit bonding Captions

12:00
–
12:20

Speaker:
Dominik
Riester
substrate to create a hermetically sealed cavity between
thetwo plates.

Speaker: Thomas Stichel

18:10
Fabrication of Optical InterJune
ThroughFabricationa high scan
speedof the laser beam
mm/s
and witha multiple
overlapping of 08
the–connects
two photon
12:20
of 3D
ProteinJune up to 1000
Scan
contourthe parts are joined in a "quasi-simultaneous"
where in the junction area steady
18:30 process
polymerization–
Microstructures08
12:40
warming, melting and connecting of the glass frit is reached in. High temperature gradients are

Speaker: Klaus Stadlmann
Sascha Engelhardt
avoidedSpeaker:
with thisaction. Simultaneous warming up and sinkingof the whole contour minimizes
thermal tensions. The soldered seams are characterized by a perfect form fit of the parts without
pores cracks. Possible applications of this technique include sealing microsensors and microactuators,
encapsulating organic lighting devices and producing liquid crystal displays.
The paper gives an insight in the basics of laser glass frit bonding and shows possible applications.

139

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Structuralarrangementof titanium microcolumnar
LPM
2010: Session
list
surface structures induced by femtosecond laser
irradiation
3D Processing 1
1

TIME

Event

2

Alexandre Cunha , Vitor Oliveira , Rui Vilar
DATE

TIME

3

Event

DATE

1- Instituto
Superior Técnico
and ICEMS-Instituto
de JuneCiências e Engenharia
Materiais, Av. Rovisco
Pais,
Lisbon, Portugal
09:20
Femtosecond
laser
microma12:40 deDevelopmentof 2D/3D
MicroJune–chining enables opto­fluidic
08 1049-001 –machining
Processes Based
08
0Superior
Engenharia Lisboa, Rua Conselheiro Emílio
Emídioon
NavarroN 1, Lisbon,
Portugal
1959-007
09:50 2- Instituto
sensingin lab-on-a-chip
13:00
Nanosecond
Laser
Sources(Invited)for Industrial Manufacturing
Speaker: Roberto Osellame

alex.cunha@ist.utl.pt

Speaker: José L. Ocaña

The surface textures formed in metallic and semiconductor materials by ultra-short pulse laser
09:50
laser beenlithography
andtreatment3Dhave
investigatedsince aJune
few years [1, 2], but a detailed understanding of their–nanoimprint lithography:
08
formationmechanisms
is
far
from
being
achieved.
In particular, it is difficult to predict the type of
10:10
versatile methods for the
micro- andnanoandfabrication
surface texture
formedits exactofgeometry and dimensions, which are of upmost importance tophotonic structures
Biological
medicaldefine properties
such as wettability and human cells/materialinteractions.andSurface
texturing has
applications
many potential
applications,suchasbiomedical
implants[3],
self-cleaning
surfaces[4, 5] andSpeaker: Volker Schmidt
enhancement of adhesive joint strength [6, 7]. In a previous work we investigated the topography ofthesetextureson Ti andTi alloy surfaces
functionEventof the laser processing parameters[8,
10:10 induced
Influenceof selective
laser
June as a TIME
DATE
melting
process
parameters9].– The aimof thepresent
work is toonstudy 08
the relationship between the geometry of these surface
10:30
of single vectors
Trappingof BioJune
features morphology
and metal
the microstructureof the bulk material. 09:20
Surface Opticaltexturesconsistingof microcolumnar
frompowder–molecules
and Nanoparticles
08
features, as depicted in Figure 1, were produced on commerciallypuretitaniumandTi-6Al-4V
alloy
09:50
Based on Resonance andSpeaker:
Igor Yadroitsev
plates bylaser
surface treatment using a commercial Surface
Yb:KYW
chirped-pulse-regenerative
Plasmon(Invited)
amplification infrared laser system. The samples were structurally characterized by electron
09:20
3D sub-diffraction-limit
Speaker: Yasuyuki
backscatter
diffraction (EBSD) analysis ofJune
the transverse cross-sectionof Tsuboi
the samples surface in–patterning of hybrid polymers
08
order to withrelatethe crystallographic
materialIninVivo
the Writingcolumnswith that of the bulk
09:50
visibleand infrared laserorientation of the 09:40
using TwoJune
material.pulses–
Photon-Polymerization
08
10:00

Speaker: Sönke Steenhusen

10:00
–
10:20

3D Processing 2
TIME

11:30
–
12:00

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study
Speaker: Sandra Alves

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
3D Polymerization for
Junewith different functions
Functional Devices (Invited)08
fabricated by femtosecond
Figure 1 Femtosecond laser induced microcolumnar features producedon titanium (a) and Si (b) surfaces.
laser
Speaker: Hong-Bo Sun
Event

June
08

DATE

12:00
–
10:40

June
08

Speaker: Yasutaka Hanada[1] Vorobyev,
A.Y and Guo, C.,
Femtosecond laser structuringof titanium implants, Applied Surface Science, 253 (17), 7272-7280, (2007).
12:00
Two-photon
polymerizationasJune[2]Wang, X.C., Wu, L.Y.L., et al., Laser micro structuring on a Si substrate for improving surface hydrophobicity, Journal of Micromechanics and–methodforthefabricationof08
Microengineering, 19(8), (2009).
10:40
Laser-controlled Injector for
June
12:20
large
scale
biomedical
scaffold[3] Cunha, A.,
Oliveira,V., andVilar, R., Bio-inspiredtitanium surfaces: formation –of multi-scaled
surface structuresusing femtosecond laser 08
BiologicalApplications
applications
structuring for endosseous implant applications, (accepted for publication in the11:00
proceedings of the SPIE Photonics West 2010).
[4] Zorba, V., Persano, L., et al., Making silicon hydrophobic: wettability control by two-length scale simultaneous patterning with femtosecond
Speaker: Toshihiko Ooie
Speaker:
Thomas Stichel
laser irradiation,
Nanotechnology,
17 (13), 3234-3238 (2006).
[5] Wu, B., Zhou, M., et al., Superhydrophobic surfaces fabricated by microstructuring of stainless steel using femtosecond laser, Applied Surface
Science, 256Fabrication(1), 61-66 (2009).
12:20
of 3D Protein
June[6] Zhang, X.M., Yue, T.M., Man, H.C., Enhancement of ceramic-to-metal adhesive bonding by excimer laser surface treatment, Materials Letters,–
Microstructures08
30 (5-6), 327-332, (1997).
12:40[7] Baburaj, E.G., Starikov, D., Evans, J., et al., Enhancement of adhesive joint strength by laser surface modification, International Journal of
Speaker: Sascha
Adhesion & Adhesives,
27 (4), Engelhardt
268-276, (2007).
[8] Oliveira, V., and Vilar, R., et al., Surface micro/nanostructuring of titanium under stationary and non-stationary femtosecond laser irradiation,
Applied Surface Science, 255 (17), 7556-7560 (2009).
[9] Oliveira, V., Cunha, A., and Vilar, R., Multi-scaled femtosecond laser structuring of stationary titanium surfaces, Journal of Optoelectronics andAdvanced Materials, (accepted for publication in 2010).

140

Emission Data and Environmental Costs During Laser
Joining of Metals
3D Processing
1 Philipp Wagener, Stephan Barcikowski
Jürgen Walter,
TIME

Event

Laser Zentrum Hannover e.V.,
Hollerithallee
8, 30419
Hannover, Germany
DATE
TIME
Event

J.Walter@lzh.de

DATE

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune–
chining
fluidic of laser08
machining
Processes
Basedthe range
08ofBecauseof the enables
various opto­
advantages
application –for weldingof metallic
materials,
09:50
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
those applications
isgrowing
steadily.
Typicalexamplesintheautomotive
industry
aretheproduction(Invited)for Industrial Manufacturingof the VW Golf V or the automatic gearbox of the Mercedes-Benz A-Class. Furthermore in industry a
Osellame use of lightweight materials (e.g.Speaker:
JoséAlloys)
L. Ocaña is present. A growth
general Speaker:
trend Roberto
of increased
Mg, Al,segment for pertinent small and medium-sized enterprises (SME, suppliers) in the metal processing
09:50
3D laser lithography andJune
aremetal components onto
– combinations
nanoimprintoflithography:
08 complete metal parts. In this context avoiding andcontrollingof emissions
10:10
versatile
methodscaused
for the by laser processing of metal/metal composites is an important task.
micro- and nanoof processing are estimated up to 10% of manufacturing costs. In
The environmental
costsfabricationin the laser
photonic
structures
Biologicalandmedicalthis publicfundedproject the identification and characterizationof specificemissionratios as aapplications
functionSpeaker:
of materials
and
power
dependingparameters
duringlaser
weldingandsolderingis carried
Volker Schmidt
TIME
Event
DATE
out.
10:10
Influence emissionof selective
laserestablishedJune
To characterizedata,measurement procedures like isokinetic partial volume
16:30
Laser Decal Transfer of NanoJune–
melting andprocess
parameters
on
08
flow
sampling
weighingof impacted
particulate –fumes,materials
particle size distribution and energy
08
10:30
morphology of single vectors
dispersive
X-ray(EDX) are applied. However,concerning laser joining these methods
16:50
from
metalspectroscopy
powderSpeaker: Alberto Piqué
were rarely used in this variety.
Speaker: Igor Yadroitsev
The experimental
results show that there is a potential health risk caused by laser-generated air
16:50
Dynamics of the Laser Decal
June
contaminants (LGACs). For example, during welding –of zincTransfer
coated Process
metal sheets appear specific08
09:20
3D sub-diffraction-limit
June
anorganic
LGACs oflikehybridzinc, polymers
iron and manganese(Fig.1).
Furthermore the particulate matter contained
17:10–
patterning
08
Speaker: damage
Scott A. Mathews
a big amountof nano-sizedparticles
and had to be subjected
09:50
with visible
and infraredlaser which can cause severe healthpulsesto a toxicologicalevaluation. Looking at the mass frequency there is a different distribution (Fig. 2).
Optimization of feature resoluJune
Comparing both distributions two discriminate maxima17:10
occur.
–
tion, processing window &08
Speaker: Sönke Steenhusen

17:30

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)Speaker: Hong-Bo Sun

12:00
Two-photon polymerization as– 1: EDX
methodfor theoffabricationofFig.
Analysis
sampled fumes
12:20
large scale biomedical scaffold
applications

structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators
Speaker: Niklas Pucher

DATE

June
08

17:30
–
17:50

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

June
ForwardJune
08 Fig. 2:17:50
ParticleLaser
Size Induced
Distribution
during Laserwelding–
Transfer: A Compact Machine
08
18:10

The results will be permanently available without chargeSpeaker:
at LZH
homepage("Laser Safety"
Dominik
Riester
http://www.lzh.de-> Publications-> Database) and link or mirror on the DVS home page (Deutscher
Speaker: Thomas
Stichel
18:10
Fabricationdatabaseof Opticalwill
InterVerband für Schweißen und verwandte Verfahren e.V.).
This interactive
be shown June
as a–connectswith actions
two photon
08
12:20
of 3D Protein
Juneto scale technicalpanel ofFabrication
the input variables(process window)
necessaryfor environmental
18:30
polymerization–
Microstructures08
protection
given
by
laws
and
for
the
selectionofprotective
measures(capturing
andexhaustair
12:40
cleaningSpeaker:
systems)
providing information in terms of costs/m(footageof welds), costs/part,Speaker: Klaus
Stadlmann
SaschaandEngelhardt
costs/production unit etc.

141

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, GermanyPower
LPM 2010:High
SessionlistFemtosecond Disk Laser
M. Larionov, F. Dausinger
Dausinger+Giesen GmbH, Rotebühlstrae 87, 70178 Stuttgart

3D Processing 1

larionov@dausinger-giesen.de

TIME

Event

10:10

versatile methods for the
micro- and nano fabrication ofphotonic structures

DATE

TIME

Event

DATE

Thin disk laser technology [1] has been developed since early 1990s and is now mature for industrial
09:20
Femtosecond
laser micromaJune laser12:40
of 2D/3D
Micro- tenthsJune
applications.
The technology
uses a disk-shapedmaterialDevelopmentwith a thicknessof severalof– Thischining
opto­
fluidic–
machining
Processes
Basedlasers and08
mm.
allowsenables
efficientheatevacuation08and thus highpower
output.
For pulsed
09:50
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
especiallyfor ultra-short pulse lengths the thin disk geometry isfor
particularly
suitable since the size of(Invited)Industrial Manufacturing
the laser mode on the disk can be nearly freely chosen. So pulse damage can be avoided simply by
Speaker:
José L.For
Ocaña
enlargingSpeaker:of theRoberto
beamOsellame
size on the disk enabling very high pulse
energies.
ultrashort laser pulses
the small amount of the laser material crossed by the laser beam is an additional advantage.
09:50
3D laser lithography and
June
Dispersion
and non-linear
effects in the laser08
disk are negligibly small.
–nanoimprint
lithography:

Biological and medical
applications

Speaker: Volker Schmidt

10:10
–
10:30

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder
Speaker: Igor Yadroitsev

09:20
–
09:50

June
08

TIME

Event

09:20
–
09:50

Optical Trapping of Biomolecules and Nanoparticles
Based on Resonance andSurface Plasmon (Invited)

3D sub-diffraction-limit
June
Speaker: Yasuyuki Tsuboi
patterning of hybrid polymers
08
with visible and infrared
laser
Figure1 Principal set-up of the femtosecond
laser
09:40
IndiskVivo
Writing using Twopulses–
Photon-Polymerization
10:00

DATE

June
08

June
08

Speaker: Sönke Steenhusen
Speaker:
Jan Torgersen
The principal
laser set-up is sown in figure 1. Because of the small
thicknessof the laser disk its gain
is relatively low. So a regenerative amplifier realizing 50 to 100 bounces on the laser disk is usually
10:00
Femtosecond laser ablation
Juneused to amplify the pulses of commercially available seed(typically
1 nJ, 50 MHz) to the 100– lasersof dentin:
A characterisation08
J level. Except of the seed laser the major componentsof thestudy
set-up are: a disk module, a Pockels
10:20
cell and a compressor. Disk module utilizes radiation of the laser diode to pump the laser disk and to
3D Processing 2
Speaker:
SandraAlves of round trips in theprovide gain in the amplifier. The Pockels cell allows determining
thenumberamplifier and thus the amplification. The compressor
compensates
dispersion
gained during
12:00
Mechanism study of gliding
June
TIME
Event
DATE
amplification.
–
movement of Phormidium in
08

10:40

nano-aquariums integrated

11:30 a laboratory
3D Polymerization
June
With
set-up anforoutput power up
to 100 W with pulse
durationfunctionsof several ps has beenwith different–
Functional Devices(Invited)08
already
demonstrated.
Now
a
first
prototypewithatargetoutputpower
of50
W has been built. The
fabricatedbyfemtosecond
12:00
laser
results willbepresented
attheconference.
Speaker: Hong-Bo Sun
Speaker:
HanadaThe
duration ispolymerization
at the momentaslimitedJune
by the gain bandwidthofYasutaka
the lasermaterial. The mostly
12:00pulse
Two-photonusedmaterialin thindisk laser
is Yb:YAG. In high power operation it can deliver pulse– laser
methodfor thefabricationof design 08
10:40
Laser-controlled Injector for
June
12:20
large
scaleasbiomedical
durationsas short
800 fs [2].scaffold
Using nonlinear broadeningof Biologicalthe pulse spectrum
in the Pockels cell–
Applications
08
applications
even shorter pulse durations can be achieved. Implementingof other laser materials, such as
11:00
Speaker: Toshihiko Ooie
Yb:KLW Speaker:
or Yb:Lu
2O3 allows
ThomasStichel for pulse durations smaller than 200 fs without any changes in the laser
set-up. Additionally using other seed and/or other operation modes (e.g. cavity dumping) pulses with
12:20
Fabricationof 3D Protein and microseconds
June
durations
between femtoseconds
can be produced by one laser system.

–
Microstructures
08[1] A. Giesen, H. Hügel, A. Voss, K. Wittig, U. Brauch, H. Opower: „Scalable concept for diode-pumped high-power solid-state
12:40

lasers“ in Appl.
Phys.
B, v. Engelhardt
58, p. 365, 1994
Speaker:
Sascha[2] T. Südmeyer, C. Kränkel, C.R.E. Bär, O.H. Heckl, C.J. Saraceno, M. Golling, R. Peters, K. Petermann, G. Huber, U. Keller:“High-power ultrafast thin disk laser oscillators and their potential for sub-100-fs pulse generation” in Appl. Phys. B, v. 97,
p. 281, 2009142

Removal of nano particles on silicon wafer
by plasma filamentusing a femtosecond laser
3D Processing
1 Jung-Kyu Park, Hyun-Sook Lee, Won-Seok Chang,Sung-Hak Cho,
Jae-Goo Kim, Doo-Sun Choi, and Kyung-Hyun Whang
TIME

09:20
–
09:50

Event

DATE

chining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

08

TIME

Event

Nano Machining Laboratory, KIMM (Korea Institute of Machinery and Material)
Femtosecond laser
microma- Yuseong-Gu,
June
12:40
Developmentof 2D/3D Micro171 Jang-dong,Daejeon,305-343,
KOREA
–
13:00
shcho@kimm.re.kr

Speaker: Roberto Osellame

machining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

DATE

June
08

Speaker: José L. Ocaña

The effective removal of nano particles from silicon wafer surface was demonstrated using the self09:50
3D laserlithography
June
channeledplasmafilament andexcited by a femtosecond(130 fs) Ti:Sapphire laser (p=790 nm). This–nanoimprint lithography:
08
processhasachieved
successfullytheremovalof100
nm
sized polystyrene latex (PSL) particles from
10:10
versatile methods for the
micro- andfabrication of
the surface.
The nanophoto-induced
self-channeled plasma filament in air reached a length ofphotonic
structures
Biologicalandmedicalapproximately
110-130mm from the first focal spot with thediameters ranging
from40 to 50 μm at
142
applications
the input
intensities
more
than
1.0x10
W/cm
.
By
the
scan
of
wafer
using
the
X-Y-Z
stage during
Speaker: Volker Schmidt
DATE inself-channeled plasma filament, the removal variationTIME
of nanoEvent
particles on surface was observed
10:10
Influenceof selective
laser
June The cleaning efficiency was strongly dependent on thesitu before
and after
plasma filament
occurred.
16:30
Laser Decal Transfer of NanoJune– distancemelting
processthe
parameters
on
08
gap
betweenplasma filament
and the surface.
The
removal efficiency of nano particles–
materials
08
10:30
morphology of single vectors
reachedfrom
to 97%
withno damage on the surface when 16:50
the gap is 150 μm.
metal
powderSpeaker: Alberto Piqué

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

16:50
–
17:10
17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Dynamics of the Laser Decal
Transfer Process

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann143

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, GermanyLong
Pulselist
Fiber Lasers and Applications
LPM 2010:
SessionM. Grupp, M. Stark
IPG Laser GmbH, Siemensstraße 7, 57299 Burbach, Germany

3D Processing 1
TIME

mgrupp@ipgphotonics.com

Event

DATE

TIME

Event

DATE

09:20 developments
Femtosecond in
laser
June
12:40 theDevelopmentof 2D/3D
MicroRecent
fibermicromalaser technology
allow enlarging
pulse parameterrange
by new June
– concept.
chiningenables
fluidicof average
08power, repetition–
machining
laser
Besidetheopto­increase
rate and a Processes
shortening Basedof the pulses, 08a
09:50
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
new laser(Invited)
design enables also an increase of pulse duration for for
highenergypulsesinthemsrange.
Industrial Manufacturing
These lasers with pulse energy up to 50 Joule and pulse durations of several ms target the market of
Speaker: Roberto
Osellamewhere today lamp pumped Nd:YAGSpeaker:
Ocaña
cutting, welding
and drilling,lasersJosé
areL.present.
Combined withthe well known advantages of fiber lasers such as efficiency, stability and beam quality these lasers
09:50
3D laser lithography and
June
close
gap between
the low power, low order– thenanoimprint
lithography:
08 mode pulsed or cw lasers and the high power
multimodelasers. methods for the
10:10
versatile
micro- and nano fabrication ofphotonic structures

Biological and medical
applications

Speaker: Volker Schmidt

10:10
–
10:30

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Speaker: Sönke Steenhusen

TIME

Event

09:20
–
09:50

Optical Trapping of Biomolecules and Nanoparticles
Based on Resonance andSurface Plasmon (Invited)

DATE

June
08

Speaker: Yasuyuki Tsuboi

09:40
–
10:00
10:00
–
10:20

3D Processing 2

In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves

Figure 1 : 4 mm stainless steel cut with 150W average power fiber laser

12:00
Mechanism study of glidingJune–movement of Phormidium in
08
This paper gives an overview on new pulsed laser applications
andshows the potential
for these new
10:40
nano-aquariums
integrated
11:30
3D Polymerization for
June
withwithdifferent
functionslaser
to cover Devices
a wide range
from micro 08
to macro applications
only onelaser source.
– types
Functional(Invited)fabricatedbyfemtosecond
12:00
laser
Speaker: Hong-Bo Sun
TIME

Event

12:00
–
12:20

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

DATE

June
08

Speaker: Thomas Stichel

12:20
–
12:40

144

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications
Speaker: Toshihiko Ooie

June
08

Polarization sensitive devices using ultrafast laser
photoinscription of nanoscale periodic arrangements
3D Processing
1
K. Mishchik,G. Cheng, C. Mauclair,
Y. Ouerdane, A. Boukenter, E. Audouard, and R. Stoian
Laboratoire
69003 Lyon,
TIME
Event Hubert Curien (UMR 5516 CNRS), Université
DATE de Lyon,
TIME
Event Université de Saint-Étienne, 42000 SaintDATE
Étienne, France

Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune
chining enables opto­fluidic razvan.stoian@univ-st-etienne.fr
08–
machining Processes Based08
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
for Industrial
Ultrafast(Invited)laser radiation shows increasing potential in 3D functionalizationofManufacturing
optical materials. If at low

09:20
–
09:50

photon Speaker:
doses Roberto
isotropic
refractive index changes are inducedSpeaker:
via soft
electronic
alterations, in more
Osellame
José
L. Ocaña
energetic regimes corresponding to thermo-mechanical photoinscription effects, ultrafast laser
09:50
laser generate
lithographyan
andintriguing nanoscaleJuneradiation3D canspontaneous arrangement, leading to form–
nanoimprint
lithography:
birefringenceand modulated
index patterns.08This regime was characterized by spectroscopic means,
10:10
versatile methods for therevealingan andincreased
presence ofof broken bonds and oxygen deficiency centres. Using the
micronano fabrication
birefringenceproperties
and the associated anisotropic lightscattering properties
photonic
structures
Biologicalandcharacteristic
medicalto theordered nanostructures, polarization sensitive devices were designed
andfabricated[1]. Theapplications
Speaker: Volker Schmidt
polarization
sensitivity allows particular light propagation
andconfinement
properties
in DATE
three
TIME
Event
dimensional
structures.
10:10
Influence of selective laser
June
16:30
Laser Decal Transfer of NanoJune–
melting process parameters on
08–
materials[1] G. Cheng,
K. Mishchik,ofC.single
Mauclair,E. Audouard, and R. Stoian, Ultrafast
laser
photoinscription of polarization sensitive08
10:30
morphology
vectors
devices infrom
bulk silica
glass,
Opt. Express 17, pp 9515-9525 (2009) 16:50
metal
powderSpeaker: Alberto Piqué

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

16:50
–
17:10
17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Dynamics of the Laser Decal
Transfer Process

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann145

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

LPM 2010:Laser-Bonding
Session list in high power electronics
1

M. Schmidt , M. Weigl

2

1- Prof. Dr.-Ing. M. Schmidt, Chair of Photonic Technologies, Paul-Gordan-Str. 3, 91052 Erlangen, Germany
3D Processing
1
2- Dipl.-Ing.
(FH) M. Weigl, Bayerisches
Laserzentrum, Konrad-Zuse-Str. 2-6, 91052 Erlangen, Germany
TIME

Event

DATE
TIME
Event
Michael.Schmidt@lpt.uni-erlangen.de

09:20

Femtosecond laser microma-

June

DATE

12:40

Development of 2D/3D Micro-

June

10:00
–
10:20

Femtosecond laser ablationof dentin: A characterisation
study

June
08

In –the fieldof high
poweropto­
electronics
towards higher
thermalloads,
rising power
density andchiningenables
fluidic a trend08–
machining
Processes
Based
08
09:50
in lab-on-a-chip
13:00Theseon requirements
Nanosecond Laser
Sourcestheneedsensing
for enhanced
dynamic strengths can be seen.
directly
influence the(Invited)for Industrial Manufacturing
joining technologies,
which leads to a cumulative replacement ofsoldering and brazing processes byliquid phasewelding
applications.
Thus
it
is
possibletoachieveinterconnects
based on metal-joints,
Speaker: Roberto Osellame
Speaker: José L. Ocaña
featuring a high operating temperature and an excellent electric conductivity. In order to realize short
09:50
3D
laser
lithography
andJune and automation, laser based processes are wellprocess
times
with
a high degreeof flexibility–
nanoimprint
lithography:
08
adaptedtomeet these challenges.
10:10
versatile methods for the
In this context,of the dissimilarmaterials copper and aluminum is a matter of particular
micro- laser-welding
and nano fabricationofstructuresinterest, photonic
as copper
is characterized by an outstanding conductivity,
but alsoand
a comparatively
Biological
medicalhighdensity and an increasing market price. Therefore copper is supposed
to be replaced as far as
applications
Speaker: Volker Schmidt
possible by aluminum, which offers a slightly minor conductivity at significant lower density and acheaperpurchase of
price.
However,copperEventand aluminum only feature a limited
10:10
Influence
selective
laser seen metallurgically,
June
TIME
DATE
–
melting
process
parameterson08
solubility
within eachother.
As a consequence,the direct metal-joint of these dissimilar materials
10:30
morphology
single vectors
generallyleads to theofformationof intermetallic phases09:20
in the welding
comingalong with a highOptical zone
Trappingof BioJune
from metal powder
molecules and Nanoparticles
08
brittleness and a reduced load capacity of the connection.–
09:50
Based on Resonance andSubject tothis Igor
complexity,
andPlasmon
possibilities
to increase the
Speaker:
Yadroitsev the present article deals with methods
Surface(Invited)mechanical and electrical characteristics of laser-welded copper-aluminum connections. Upon other
09:20 the3Dinfluence
sub-diffraction-limit
June
Speaker:
Yasuyuki Tsuboi
terms,
of a lateral laser-beam displacement
towards
the aluminumbase material and the–patterning of hybrid polymers
08
effectsofapulse
modulation
withinasingle
laser
pulse
are
discussed.
For
example,a lateral beam
09:50
with visible and infrared laser
09:40
In Vivo Writing using TwoJune
displacement
leads
to
a
shiftingofthemaximum
thermalcontraction
at
the
end
of
the
laser
pulse into
pulses–Photon-Polymerization08
the aluminum. Due to the lower yield strength and the 10:00
higher ductility of pure aluminum in contrast to
Speaker:
Steenhusen
Torgersen
pure copper,
theSönkemaximum
residual stresses can be reduced bySpeaker:
plasticJan
deformation,
see figure 1.

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)Speaker: Hong-Bo Sun

Speaker: Sandra Alves
DATE

June
08

12:00
–
10:40

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

Figurecalculationof the residual as
stresses Junein y-direction (orthogonal to the joining gap) without using a lateral beam
12:00 1 NumericalTwo-photon
polymerization–
methodfor thefabrication08
displacement(left handside)
and a lateralof
beam displacementof 0.2 mm into the aluminum base material (right hand side).

10:40
Laser-controlled Injector for
June–
Biological Applications
08
11:00
Furthermore, fittings made from roll-cladded copper-aluminum
sheet metal can be used to divide the
12:20

large scale biomedical scaffold
applications

Speaker: Toshihiko Ooie
one dissimilar
Speaker: connection
Thomas Stichel into two similar connections, aluminum-aluminum on the one side andcopper-copper on the other side. By doing so, the dissimilar connection is transferred to a
12:20
Fabricationof 3D
standardized
process,
theProtein
roll-cladding, andJune
the formation of brittle phases can be minimized. Thus–
Microstructures08
especiallytheductilityof
copper-aluminum
joint can be raised and the contact resistance of the
12:40
connection
reduces.
Speaker:
Sascha Engelhardt

[1]
[2]

146

M. Schmidt1, M. Weigl2, Modulated laser spot welding of dissimilar copper-aluminum connections, Proceedings of
4M/ICOMM conference, pp. 211-214, (2009).
M. Schmidt1, M. Weigl2, Untersuchungen zur gezielten Gefügeeinstellung beim gepulsten Laserstrahl-Mikroschweißen vonKupfer-Aluminium-Verbindungen, DVS Schweißen und Schneiden, 4/2009, pp. 204-208, (2009).

Nanoablation using 2D Gold and Dielectric Nanosphere
Templates Excitedby Femtosecond
Laser
1
1
1
Yoto Tanaka , Mitsuhiro Terakawa , Minoru Obara

3D Processing 1
TIME

1- Keio University, Japanobara@obara.elec.keio.ac.jp

Event

DATE

TIME

Event

DATE

We present
the experimental
and theoreticalresults on
the nanohole
processing
usinghigh dielectric
09:20
Femtosecond
laser micromaJune
12:40
Developmentof 2D/3D
MicroJune
particles
with
small
size
parameter.
–chining enables opto­fluidic
08–
machining Processes Based
08

09:50

sensing in lab-on-a-chip

13:00

on Nanosecond Laser Sources(Invited)for Industrial
Manufacturing
Nanohole
processing mediated with the dielectric particle exhibits
the smallerfeatures than thediffraction
limit.
Theuse
ofdielectric
particles
has
attracted
muchattentionforindustrial applications,
Speaker: Roberto Osellame
Speaker: José L. Ocaña
because fabrication of the monolayer 2D particle arrangement seems much easier than the metallic
09:50
3D laserandtheory, the June
ones. Basedon lithography
Mie scatteringenhanced near-field is determined by the size parameter–nanoimprint
lithography:
08
x=pD/l, defined as p multiplied by particle diameter
D, divided by optical wavelength l. The clear
10:10
versatile methods for the
nanoholeisobtainable
with
x~p
but
not
with
the smaller size parameter x<p/2 due to the weak
micro- and nano fabrication ofenhancednear-field
for frequently used particles like polystyrene
particle. Therefore,
the shorter
photonic
structures
Biologicaland medical
wavelength is required for downsizing the processed nanoholes, which
needs
the
sophisticatedapplications
Speaker: Volker Schmidt
wavelength
up-conversion in ultrashort time domain andvacuumUV (l<200 nm).
TIME
Event
DATE
10:10
Influence of selective laser
June
16:30
Laserenhanced
Decal Transfer
of NanoJune
Using
dielectric
particlesparameters
having highondielectric
the strong
near-fieldis generated–
melting process
08 constant,–materials
08
10:30
morphology
single vectors
even withsmall sizeof
parameters
due to the strong scatteringcross-sectionof the particle. The
16:50
from
metal
powderresonant refractive index of the particle depends on the size parameter, meaning that the used
Speaker: Alberto PiquématerialSpeaker:
shouldIgor
beYadroitsev
selected as a function of size parameter. In the ablation processing with 2D
16:50
Dynamics
of scatteringthe Laser Decal
arrayed particles, the optical field interaction such as inter-particle
multipleshould be June–
Transfer
08
09:20
3D sub-diffraction-limit
Juneconsidered
and then the optimal spectral condition
is different
fromthe Process
single particle case.
17:10
patterning of hybrid polymers
08
Speaker: Scott A. Mathews
with visible and infrared laser
The obtained
pulsesresults confirm that the use of high dielectric particles becomes a promising technique
17:10
Optimization of feature resoluJune
for downsizing the produced nanoholes.
–
tion, processing window &08
Speaker: Sönke Steenhusen
17:30
structuring time for the twoThis work is supported in part by a Grant-in-Aid for the Global photon
Center of
Excellence for High-Levelpolymerization(2PP)
Global Cooperation for Leading-Edge Platform on Access Spaces
frombythetheMinistry
Education,
processuse of ofnovel
initiators
Culture, Sport, Science and Technology, Japan.

–
09:50

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

Speaker: Niklas Pucher

DATE

June
08

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Thomas Stichel

12:20
–
12:40

17:30
–
17:50

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann147

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

GrowthLPMControlled
2010: Session
list of Carbon nanostructures in
Laser-assisted Chemical Vapor Deposition

3DXiong,
Processing
1
Y. F. Lu1, W.
M. Mahjouri-Samani,
Y. Gao, Y.S. Zhou, Z.Q. Xie, J. B. Park, and M. Mitchell
Department of Electrical Engineering,
UniversityofEvent
Nebraska-Lincoln,
DATE
TIME
Lincoln, NE 68588-0511, USA

TIME

Event

09:20

Femtosecond laser microma-

June

12:40

Development of 2D/3D Micro-

DATE

June

–
chiningcarbon
enablesnanotubes
opto­fluidic (SWNTs)08 are amongst–
machining
Processes one-dimensional
Based
08
Single-walledthemost attractive
09:50
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
nanostructurestobeinvestigated
due
to
their
rich
varietyofintriguing
properties
andpotential(Invited)for Industrial Manufacturing
applications [1]. SWNTs have been extensively investigated as one of the most important building
Robertoprototype
Osellame
Speaker:
José L.[2].
Ocañablocks forSpeaker:
fabricating
nano- electronic and optoelectronic
devices
Therefore, controllable
fabrication and integration of SWNTs are of significant importance in both scientific and applied fields.
09:50
3D laser lithography andCurrently,
chemical vapor
deposition (CVD)June
process is the only economically and technically viable–
nanoimprint
lithography:
08
process
tointegrate
SWNTs
10:10
versatile
methods
forintothe devices by yielding selective and aligned SWNT growth directly on
micro- and [3].
nanoHowever,fabricationof controlled growth and integration of SWNTs still suffer fromvarious substrates
well
photonic structures
Biologicaland medical
several bottlenecks,
such as reliability, yield, cost and high processing
temperature.

applications

It is wellSpeaker:
knownVolker
thatSchmidt
ultra-sharp metallic tips can be used as optical antennas in localizing andenhancing
opticalradiation
due to the opticalJune
near-field effects [4]. Enhancement of the electric field at
10:10
Influence of selective laser
Event
DATE
the– tip results
in processenhanced
eddy currents,
which
yieldTIME
local heating
enhancement and a significant
melting
parameters
on
08
10:30
morphology
vectors
temperature
increaseofatsingle
the tips.
In this study, opticalnear-field
effects
wereof appliedin a laser09:20
OpticalTrapping
BioJunemetalvapor
powderassisted fromchemical
deposition (LCVD) process to –achieveself-alignedof SWNTs at08a
molecules
and growth
Nanoparticles
09:50
Based ofonopticallyResonance
andrelativelySpeaker:
low substratetemperature. Figure 1 shows theschematic
controlled
growth ofIgor Yadroitsev
Surface Plasmon (Invited)
SWNTs and schematic results of self-aligned SWNTs. The experimental results and numericalsimulations
using the High Frequency Structure
Simulator (HFSS,
Ansoft)Tsuboi
demonstrated that the
09:20
3D sub-diffraction-limit
June
Speaker: Yasuyuki–
patterningof near-fieldhybrid polymers
laser-induced
opticaleffects could08produce nanoscale localized heating at electrode tips,
09:50
with visible and infrared laser
09:40 Influence
In Vivo Writing
usingbeamTwo- polarization
June
which
stimulatedof the laser
pulses the selective growth of SWNTs at the tips.
–
Photon-Polymerization08
was investigated via numerical simulation using 10:00
HFSS
tooptimize conditions for maximal
Speaker:ofSönke
enhancement
the Steenhusen
localized electric field and temperature increase.
Two
obvious advantages are
Speaker: Jan
Torgersen
observed for this developed technique: precise position control and low substrate temperature for
10:00
Femtosecond laser ablation
June
SWNT growth.
–
10:20

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)of dentin: A characterisation
study

08

Speaker: Sandra Alves
DATE

June
08

12:00
–
10:40

Speaker: Hong-Bo Sun

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

12:00
Two-photon
polymerizationasJuneof SWNTs; and (b) schematic results of self-aligned SWNTs.
Fig. 1. (a) Schematicof optically controlled
growth–method for the fabrication of08
10:40
Laser-controlled Injector for
June
12:20
large
biomedical
scaffoldIn
additionto scaleself-aligned
growth,LCVD is able to grownanotubes(CNTs) with selective– carbonBiologicalApplications
08
applications
electronic properties and control directions of multiple11:00
CNTs. LCVD has also shown advantages ingrowing diamondfilmsStichel/ crystals and carbon nano-onions.
Speaker: Thomas

Speaker: Toshihiko Ooie

[1]
H. J. Dai,Fabrication“Carbon nanotubes:
Surface Science 500, 218-241 (2002).
12:20
of 3Dopportunities
Protein and challenges,”June[2] –S. J. Tan,Microstructures
A. R. M. Verschueren, and C. Dekker, “Room-temperaturetransistor based on a single carbon nanotube,” Nature 393, 49-52
08(1998).
12:40[3] H. J. Dai,Speaker:“CarbonSascha
nanotubes:
Synthesis, integration, and properties,” Acc. Chem. Res. 35, 1035-1044 (2002).
Engelhardt[4] L. Novotny and S. J. Stranick, “Near-field optical microscopy and spectroscopy with pointed probes,” Annu. Rev. Phys. Chem. 57, 303331 (2006).

1

Corresponding Author: Tel.: 402-472-8323, Fax: 402-472-4732, Email: ylu2@unl.edu

148

3D Processing 1
TIME

Event

DATE

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June
08

12:40
–
13:00

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

Speaker: Roberto Osellame

09:50
–
10:10

3D laser lithography andnanoimprint lithography:
versatile methods for the
micro- and nano fabrication ofphotonic structures

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

TIME

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Biological and medical
applications
Laser Decal Transfer of Nanomaterials

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

3D Processing 2
Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

DATE

June
08

Speaker: Alberto Piqué

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Event

16:30
–
16:50

17:10
–
17:30

Speaker: Sönke Steenhusen

TIME

June
08

Speaker: José L. Ocaña

Speaker: Volker Schmidt

10:10
–
10:30

DATE

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann149

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laserweldingwithpulsed solid state lasers: strategies
LPM
2010:
Sessionlist
and new developments.

3D Processing
1 1, R. Holtz1, J. Wilden2, T. Neumann2
R. Witte
TIME

Event

1- Lasag AG, C. F. L. Lohnerstrasse 24, 3602 Thun, Switzerland
DATE
TIME 8-9,Event
10587 Berlin, Germany
2- Technische Universität Berlin,
IWF, Pascalstraße

DATE

Femtosecond laser microma- reiner.witte@lasag.ch
June
12:40
Development of 2D/3D MicroJune
chining enables opto­fluidic
08–
machining Processes Based08
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
Pulsed Nd:YAG
laser weld applications(Invited) lasers offer a variety of options to broaden theforspectrum
Industrialof
Manufacturing
09:20
–
09:50

especially for challenging materials like refractory materials, aluminium alloys, copper alloys andSpeaker:
Roberto Osellame
Speaker:
José theseL. Ocañamaterials efficiently is
combinations
thereof.
Within the last Years an increasing demand
to joininquired from various industries. The goal is to be able to reduce cost and overall weight, while
09:50
3D laser lithography andJune
simultaneously
increase
the functionality of 08
the final products. These demands lead to challenges–
nanoimprint
lithography:
regardingthe joining
technology
10:10
versatile
methods
for the and the metallurgical aspects to fuse parts together that are,microand properties,
nano fabrication
ofof a wide variety of materials.
requested
for there
consistBiological and medical
applications
Today a Speaker:
whole Volker
toolboxof possibilities is available to overcome someof the obstacles that welding
Schmidt
photonic structures

engineers are facing today. Within this paper an overview of various methods and strategies is given
10:10such
Influenceof selective
laser
June
TIMEe.g. Event
DATE
howproblems
can be approached.
New findings,
like in Titanium welding as shownin–melting process parameters on
08
figure1,
arediscussed.
A
modulated
pulse
can
be
used
to
decrease
the
grain
size
by
up
to
50%
10:30
morphology of single vectors
09:20 of Optical
Trappingof possible
BioJunewithin thefrom
weldnuggetand therefore increase the ductility
the weld.
This iswith laser
metal
powder–molecules and Nanoparticles
08
sources that are capable to control the pulse energy very
precisely
to modulate
the heat
09:50
Based
on Resonanceand input into the
Speaker:
Igor Yadroitsev
Surface Plasmon (Invited)material andtherefore
reduce the grain growth.
09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

Probability Density

Speaker: Sönke Steenhusen

Speaker: Yasuyuki Tsuboi

09:40
–
10:00
10:00
–
10:20

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Base Material
Speaker:
Sandra Alves

DATE

June
08

Speaker: Hong-Bo Sun

12:00
–
10:40

Without Modulation

Mechanism
Pulse Modulated study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Average Grain Size [μm]

Speaker: Yasutaka Hanada

Two-photon
polymerization
Junethe weld nugget of titanium using pulse modulation
Figure 1 Comparisonof grainas
sizes within
method for the fabrication of08
10:40
Laser-controlled Injector for
Junelarge scale biomedical scaffold
Biological Applications
The uniquecharacteristics of pulsed solid state lasers– like pulse-parametersand pulse-regime 08
inapplications
11:00
combination with special beam guidance systems or theentry of additional material, e.g. wire feeding,
12:00
–
12:20

Speaker: Toshihiko Ooie

Speaker:
Thomascan surely
enhancetheStichel
possibilities and take the welding process up to the next level.

12:20
–
12:40

150

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Laser Beam Micro Welding of DCB Substrates
11

1Alexander Olowinsky , Jens Gedicke , Benjamin Mehlmann , Felix Schmitt

1

1- Fraunhofer Institute 1
for Lasertechnology, Steinbachstr. 15, 52074 Aachen, Germany
3D Processing

Jens.Gedicke@ilt.fraunhofer.de
TIME

Event

DATE

TIME

Event

DATE

Small seam width and low heat deposition in the component are the outstanding features of laser
09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune
beam
welding
appliedopto­
to microtechnology.
lasers andProcesses
pulsed Nd:YAG–
chiningas
enables
fluidic
08 Continuous– fibermachining
Based lasers with
08
high beam
qualitywith new process techniques
highly reproducible
joining of metals
09:50
sensingin combined
lab-on-a-chip
13:00enable
on Nanosecond
Laser Sources(Invited)
forandIndustrial
Manufacturingwith weld
seam widths below 200 m. Feed rates up to 1 m/s
high quality
weld seams can beachievedwithinnovative
irradiation
strategies
usingatemporalandspatialmodulationof the laser
Speaker: Roberto Osellame
Speaker: José L. Ocaña
beam. With this thermal management of the welding process the total amount of energy deposited in
the components
can be minimized
melt pool dynamics can be controlled [1,2].
09:50
3D laser lithography
and and the June–
nanoimprint
08 is still a material which is very difficult to weld using
Copperwith its poorlithography:
absorption characteristics
10:10
versatile methods for thelaser radiation.
Howevertheindustrial
demands
for high thermal and electrical conductivity make it an
micro- and nano fabrication ofideal material
for structureshigh power electronics.
photonic
Biological and medical
Recent developments for spatial and temporal modulation in applications
laser beam welding offer new
Speaker:for
Volkeropportunities
theSchmidt
joining of copper.
TIME
Event
DATE
10:10
–
10:30

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

16:30
–
16:50

Laser Decal Transfer of Nanomaterials

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing
(a)2

June
08

Speaker: Alberto Piqué

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

(b)

Laser
Bioprinting
Figure 1 (a) Laser welded DCB with contact sheet (b)17:30
Cross sectionof Assisted
laser welded
DCB contact.

Juneof Cells & Biomaterials:
08
Development of a DedicatedWorkstation,
11:30
3D Polymerizationfor
June
The major
challenge in weldingof DCBs is
melting the both copperparts Experimental(Cu layer and contact fin)and Jet–Functional(Invited) ceramic08substrate. The Results
without
damaging Devices
the underlying
combinationofFormation
linear feed rate andModeling
12:00
TIME

Event

DATE

–
17:50

superimposed
circularSun
modulation offers the possibility to control the weld depth very precisely and to
Speaker: Hong-Bo
avoid overheating of the melt pool. The requirements for this approach
are Souquethigh beam quality and highSpeaker: Agnès
12:00
Two-photon
polymerization
June
dynamics
in beam movement[3]. as
Laser Induced
Forward– paper
methodfor therecent
fabrication
of
08
The
presents
developmentsin spatial 17:50
and temporalmodulationof laser radiationJune
for–Transfer: A Compact Machine08
12:20
large scale biomedical scaffold
welding applications
applications in the field of high power electronics
18:10on ceramic substrates DCB. The influenceof the modulation amplitude and frequency as well the relatedSpeaker:
laser Dominik
powerRiester
on weld seam depth andSpeaker:
Thomas The
Stichelwidth arediscussed.
process limits and further prospects are shown.

18:10
Fabrication of Optical InterJune–
connects
withtwophoton08
12:20
Fabricationof
3D
ProteinJune[1] J. Gedicke, A. Olowinsky, A. Gillner, Performances of Micro Ring Welding as an Alternative Method for Laser Spot Welding,
18:30
polymerization–
Microstructures
08
Proceedings of the Fifth International WLT-Conference on Lasers in Manufacturing 2009, Munich, June 200912:40
[2] F. Schmitt, B. Mehlmann, J. Gedicke, A. Olowinsky, A. Gillner, R. Poprawe, Laser beam micro welding with high brilliant
Speaker: Sascha Engelhardt

Speaker: Klaus Stadlmann

fiber lasers Proc. of LAMP 2009 – 5th Int. Congr. on Laser Advanced Materials Processing, June 29 - July 2, 2009, Kobe,
Japan[3] R. Poprawe, F. Schmitt, J. Gedicke, B. Mehlmann, A. Olowinsky, A. Gillner, Systemtechnik zur örtlichen
Leistungsmodulation beim Laserstrahl-Mikroschweißen. 4. Kolloquium Mikroproduktion. Hrsg.: F. Vollertsen, [u.a.]Bremen:
BIAS Verl. 2009151

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

by infrared fs-laser densification of
LPMNanostructuring
2010: Session list
amorphous dielectrics

3D Processing A.
1 Rosenfeld, I.V. Hertel, L. Ehrentraut
TIME

Event

Max-Born-Institut für Nichtlineare
OptikTIME
und Kurzzeitspektroskopie
DATE
Event
Max-Born Str. 2A, Berlin-Adlershof, 12489, Germany

DATE

Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune
rosenfeld@mbi-berlin.dechining enables opto­fluidic
08–
machining Processes Based08
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited)for Industrial
Manufacturing
It has been
well established experimentally that silica glass canbe densified
at ambient pressure

09:20
–
09:50

upon irradiationby photons,
OverJosé
thelast decade, UV-induced
Speaker: Roberto
Osellame electrons, neutrons, and ions [1].
Speaker:
L. Ocaña
refractive-index change (n) profiling in SiO2-based glasses was widely used for the production of
09:50
3D laserlithography
Junespecial opticaldevices
for theandphotonics industry.
–
nanoimprint
lithography:
08
We show for the first time that such a densificationis possible by infrared femtosecond laser
10:10
versatile methods for theirradiationof different
amorphous
materials
and this method is not restriction to UV transparency of
microand nanofabricationofthe materials.
Thestructures
densification as observed in irradiationBiologicalexperiments can andbe attributed
to defect
photonic
medicalgeneration and subsequent structure relaxation [2].
applications
Speaker: Volker Schmidt
The modification
was performed well below the ablation threshold Fluence Fth (0.3-0.9 Fth) of the usedmaterials
and is easily
manipulable
pulses with an accuracy of 5%.
10:10
Influenceof selective
laser by the number
June of laser
TIME
Event
DATE
In– figuremelting
1a is process
shown parameters
as an example
of08the change of the surface “height” of Zerodur. The
on
10:30
morphology
of single
densification
is observed
as a vectors
surface level modification.
09:20
Optical Trapping of BioJune
from metal powder

–
09:50

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Speaker: Sönke Steenhusen

molecules and Nanoparticles
Based on Resonance andSurface Plasmon (Invited)08

Speaker: Yasuyuki Tsuboi

09:40
–
10:00
10:00
–
10:20

3D Processing
2(a)In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

(b)

Speaker: Sandra Alves

Figure 1 a) An example for the surface modification by fs-laser 12:00
irradiation of
Zerodur (Schott),theofroughness
Mechanism
study
gliding remains June
Event
DATE
unchanged. b) Modification depth dependence on pulse length, the –modification
fluence Fof
is 80%of the threshold
movement
Phormidium
in fluence08

TIME

11:30

3D Polymerization for

June

10:40

nano-aquariums integratedfunctions
In– figureFunctional
1b is shown
the(Invited)
modification strength
dependentwith
on different
the pulse
length. The maximal
Devices08
fabricatedbyfemtosecond
12:00
modification is seen around 200 fs. As the number of the generated
defectsislimited we observe alaser
Speaker: Hong-Bo Sun
saturationof the modification strength with increasing pulse number.
Speaker:
Yasutaka
HanadaWe haveTwo-photon
tested the method
also on as
different
crystalline materials
but wecould
not obtain any change
12:00
polymerizationJune
and crystalline
quartz andofonly very
at–Al2O3 method
for the fabrication
08small changes in CaF 2 and MgO not assessed to the
10:40
Laser-controlled Injector for
June
12:20
largeprofile
scale ofbiomedical
lateral beam
the laser scaffold
pulse.
–
Biological Applications
08
applications
In conclusion we can say that the infrared fs-laser 11:00
irradiation below the ablation threshold is a
Speaker: Toshihiko Ooie
powerful Speaker:
methodThomas
for nano-scale
modification of amorphous materials.
Stichel[1] N. F. Borrelli
et al, Densificationof fused silica under
193-nm excitation, J. Opt. Soc. Am. B Vol. 14, 1606-1615 (1997)
12:20
Fabricationof 3D Protein
June
Microstructures[2]–A. Lianqing
Zheng et al, Densification of silica glass08
at ambient pressure, J. chem. Phys. 125, 154511/1-7 (2006).
12:40
Speaker: Sascha Engelhardt

152

YAG Laser Spot Welding of PET and Metallic Materials
1,4

2

2

3

Y. Farazila , Wang Hua , Y. Miyashita , Y. Otsuka , Y. Mutoh

TIME

3

1- Department of Material Science, Nagaoka University of Technology, 940-2188 Nagaoka, Japan
Processing
1
2 3D-Departmentof Mechanical Engineering,
Nagaoka University of Technology, 940-2188 Nagaoka, Japan
3- Department of System Safety, Nagaoka University of Technology, 940-2188 Nagaoka, Japan
4- Department of Engineering Design and Manufacture, University of Malaya, 50603 Kuala Lumpur, Malaysia
Event

DATE

TIME

Event

DATE

farazila@um.edu.my
09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune–
chining enables opto­fluidic
08–
machining Processes Based08
09:50
sensingin lab-on-a-chipon Nanosecond
Sources
A dissimilarmaterial
joint have a great interest in13:00
industrial
applications Laser
includingautomotives,(Invited)for Industrial Manufacturing

aircrafts, medical, electronic industry and etc. Moreover the combination of plastic and metal in the
products
wouldRoberto
caterOsellame
advantages in specific engineering application.
Speaker:
Speaker: JoséAL.few
Ocañaresearches have beenreported for dissimilar joining between plastics and metals using laser welding method [1, 2]. In this
09:50
3D laserlithography
and laser spot
June
study, direct
joiningusing YAG
welding on the dissimilar materials joint of plastic and–nanoimprint
lithography:
08
different
metallic
materials
have
been
investigated.
The experimental result shows polyethylene
10:10
versatile methods for the
terephalate(PET)
has fabrication
been successfully
joined to copper (Cu), stainless steel (SUS 304) andmicroand nanoofphotonic
structuresShear tensile test was carried out
aluminium
alloy (A5052).
to evaluate strength
the joint. It was
Biologicalandofmedical
found that failure load increased with the increasing of heat inputapplications
for all three combinations of the
Speaker: Volker Schmidt
joints as shown Fig.1 (a)-(c). However, the heat input
is notEvent
only dominant factors for failureDATE
load,
TIME
especiallyinthe
PET/SUS304
andPET/A5052
joint.
Observations
of
the
cross
sectionofthejoints
10:10
Influence of selective laser
June
16:30weldLaser
Transfer ofJune
arein Fig.2.
Accordingto theonfigure,08
no significant
pool Decal
was observedin Nanocase of PET/Cu– shown
melting
process
parameters–
materials
10:30
morphology
of single
vectors
joint evenat the laser
irradiatedarea. On the other16:50
hand,
obviousweld pool was observed at 08
thefrom metal powder
joints. Differences of theinterfacein metallic material side for PET/SUS304 and PET/A5052
Speaker: Alberto Piquémorphology
interface due to difference of material properties, such as reflectivity andSpeaker:atIgorthe
Yadroitsev
16:50
Dynamicsof the Laser
Juneabsorptivity of laser beam, thermal conductivity, etc.,
of metallic
materials
usedDecal
may affects
on–Transfer Process
08
09:20
3D sub-diffraction-limitJunecharacteristics
of strength (a)of the joints.

–
09:50

patterning of hybrid polymers
with visible and infrared laser
pulses

08

17:10

(b)

17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

Event

DATE

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

(c)

June
08

Speaker: Niklas Pucher

11:30
3D Polymerization for
June–
Functional Devices (Invited)08
Figure 1Failure load for (a) PET/A5052 joint (b) PET/SUS304 joint (c) PET/Cu joint
12:00
12:00
–
12:20

Speaker: Scott A. Mathews

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Figure 2 Cross
sectional
observation
at the joint interface for (a) PET/A5052 joint. (b) PET/SUS304
joint. Stadlmann(c) PET/Cu joint.
Speaker: Klaus
Speaker:
SaschaEngelhardt[1] Yukio Miyashita, Masaharu Takahashi, Masashi Takemi, Kosei Oyama, Yoshiharu Mutoh and Hironori Tanaka, Dissimilar Materials Micro
Welding between Stainless Steel and Plastics by Using Pulse YAG Laser, Journal of Solid Mechanics and Materials Engineering, Vol. 2, No. 2,
pp409-415, 2009[2] Seiji Katayama and Yousuke Kawahito, Laser Direct Joining of Metal and Plastic, Scripta Materialia, Vol. 59, Issue 12, pp 1247-1250, 2008153

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laser
micro
joininglistof thin films on flexible substrates for
LPM
2010:
Sessionelectrical connection

3D Processing 1M. Ehrhardt1, K. Zimmer1, C. Scheit2
1- Leibniz Institut für Oberflächenmodifizierung, Permoserstr. 15, 04318 Leipzig, Germany
DATE 5, 04288
TIME
2- Solation AG, OstendeLeipzig,Event
Germany

TIME

Event

09:20
–
09:50

Femtosecond laser micromaJune
12:40
Development of 2D/3D Microchining enables opto­fluidic klaus.zimmer@iom-leipzig.de
08–
machining Processes Basedsensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited)for Industrial Manufacturing
Speaker: Roberto Osellame

DATE

June
08

Speaker: José L. Ocaña

The joining of material is required for electrical or mechanical connection of thin film components fordifferent
applications
in microandtechnology, June
thin film technique and photovoltaic. Classic techniques
09:50
3D
laser lithography– as wirenanoimprint
08 specific metal layers such as gold or a sufficient filmsuchbonding lithography:
and soldering require either
10:10
versatile methods for the
thickness.
micro- and nano fabrication of
Laser joining
techniques
offer the opportunity of a fast connectionof thinand
films medicalalso on flexible
photonic
structures
Biologicalsubstrates. Currently laser processes for material joining such as weldinghas
been
developed
mainlyapplications
Volkerindustry
Schmidt as well as for precision engineering. Typical techniques are welding andfor steel Speaker:
and heavysoldering with and without additional materials. Current studies aim to the development of such
10:10
Influence of selective laser
June
TIME
Event
DATE
bonding
processes
for micro-,
MEMScell-applications.
However, due to the much lower–
melting
process
parameters
on and solar
08
10:30
morphology
of single
thicknessof the usedfilms vectors
and the usage of thermal
substrates,e.g. polymersJuneor
09:20 sensitive
Optical Trappingof Biofrom metal
powder new approaches have to be developed.
semiconductors
principally,–molecules and Nanoparticles
08
09:50

Speaker: Igor Yadroitsev

Based on Resonance andSurface Plasmon (Invited)

In this presentation a novel technique for connecting two metal thin films or foils of different materials
withdown to 1 m for mechanicaland electrical connection
is introduced.
The connection
09:20a thickness
3D sub-diffraction-limit
June
Speaker: Yasuyuki
Tsuboi–patterning
polymers
08
is achieved
without of
anhybrid
additional
auxiliary material.
Dependent on the selected material system the
09:50
with visible and infrared laser
09:40 orInthermal
Vivo Writing
using of
Twoconnection
is created be a combination of geometrical tootingintermixing
the metals. Junepulses– in terms
Photon-Polymerization
08
The achieved contact will be investigated and characterizeoftheelectricalandmechanical
10:00
Speaker:
Steenhusenproperties.
The Sönke
findingsof the investigations are discussed withthermalcalculations to address the
Speaker:
Jan Torgersen
understanding of the mechanism and enable further optimizations.
10:00
–
10:20

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

154

June
08

Speaker: Sandra Alves
DATE

June
08

Speaker: Hong-Bo Sun

12:00
–
10:40

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

Two-photon polymerization as
Junemethod for the fabrication of08
10:40
Laser-controlled Injector forlarge scale biomedical scaffold
Principal set-up for laser joining of –two thin Biologicalmetal films Applications
applications
11:00
Speaker: Toshihiko Ooie

Speaker: Thomas Stichel

12:20
–
12:40

Femtosecond laser ablationof dentin: A characterisation
study

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

June
08













3D Processing 1   



TIME
Event
DATE
TIME
Event
DATE



Femtosecond laser micromaJune 12:40
Development of 2D/3D MicroJune

09:20
–
09:50



chining enables opto­fluidic
08–
machining Processes Basedsensing
in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited)for Industrial Manufacturing08 
   
   
Speaker: 
Roberto 
Osellame
Speaker:
José L. Ocaña
09:50
3D laser lithographyand  
 June       
–nanoimprint
lithography:
08
10:10
versatile methods for the
micro- and nano fabrication ofphotonic
structures  
    Biological

and medical
applications
Speaker: Volker Schmidt
TIME
Event
DATE

10:10
Influence of selective laser
June
16:30
Laser Decal Transfer of NanoJune
–melting process parameters on
08–
materials
08
10:30
morphology of single vectors
16:50
from metal powder
Speaker: Alberto Piqué
Speaker: Igor Yadroitsev
16:50
Dynamics of the Laser Decal
June
–Transfer Process
08
09:20
3D sub-diffraction-limit
June
17:10–
patterning of hybrid polymers
08
Speaker: Scott A. Mathews
09:50
with visible and infrared laser
pulses
17:10
Optimization of feature resoluJune

–
17:30

Speaker: Sönke Steenhusen


3D Processing 2

TIME

Event

11:30
–
12:00

 for3D Polymerization

DATE



June08

Speaker: Hong-Bo Sun

12:00
–
12:20

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications



June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures

June
08

17:30
–
17:50

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08




Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann

Speaker: Sascha Engelhardt



08

Speaker: Niklas Pucher



Functional Devices (Invited)tion, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators




155

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

SilicaMicro-Cantilevers
Fabricated Using
LPM
2010:Based
Sessionlist
Direct UV Writing and Micro-Machining For
Chemicaland PhysicalSensing Applications
3D Processing
1

TIME

09:20
–
09:50

Event

C. Holmes, L.G. Carpenter,
H.L. Rogers,
J.C. Gates, P.G.R. Smith
DATE
TIME
Event
Optoelectronics Research Centre, University of Southampton, SO17 1BJ, UK

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June
12:40
Development of 2D/3D Micro08–
machining Processes Based
chh@orc.soton.ac.uk
13:00
on Nanosecond Laser Sources
for Industrial Manufacturing

DATE

June
08

Cantilever-based sensors have received increasing interest over recent years, offering a completely
Roberto Osellame
Speaker: José
L. Ocaña capabilities [1]. Thisnew typeSpeaker:of miniaturised
transducer with both chemical and physicalmonitoring
paper presents a resonant silica micro-cantilever with direct UV written Bragg gratings intrinsically
09:50
3D laser lithography andJunedefinedwithinit, illustrated
in Figure 1 (a). To–
nanoimprint
lithography:
08 obtain quantitative and qualitative measurements thecantileveris mechanicallyand the spectral variations in a ‘sensor’ Bragg grating monitored
10:10
versatile
methods resonatedfor themicroand nanofabricationof grating in the bulk. The miniaturised device offers remote,and crossreferenced
againsta Bragg
photonic structures
Biologicalmultiplexed sensing capabilities that are conducive to flammableenvironments.and medical
applications
Devicefabrication
Speaker: Volker
Schmidt is uniquely achieved through a combination of surface micro-machining
and direct UV writing in a silicon-on-silica platform, using a three stage fabrication process. The first
10:10 uses
Influenceof selective
laserto cut theJune
Event
DATE
stage
a precision
dicing saw
cantilever’sTIME’outline’
into the wafers silica layer, exposing–
melting process parameters on08
theunderlying
silicon.
This
novel
techniqueallowsfor
rapid
prototyping,
as
it
does
not
require10:30
morphology of single vectors
09:20 and
Opticalof BioJune
photolithographandpowderetching steps that can be expensive
timeTrapping
consuming,for small device
from metal–
molecules and Nanoparticles
08
quantities. The second stage of fabrication defined the
BraggBasedgrating
elements using
09:50
on Resonanceand a direct UVSpeaker: Igor[2].
Yadroitsev
Surface
Plasmon(Invited)
writing techniqueIn the final stage of fabrication the exposed
siliconwas wetetched using KOH
suchtoliberatethesilicacantileverfrom
theunderlying
silicon.
09:20
3D sub-diffraction-limit
June
–
09:50

patterning of hybrid polymers
withvisible and infrared laser
Sensorpulses08

Grating

Speaker: Sönke Steenhusen

Speaker: Yasuyuki Tsuboi

09:40
–
10:00

50 μm 10:00–
10:20

3D Processing 2
TIME

11:30
–
12:00

Reference
Grating
Event

Speaker: Hong-Bo Sun

(a)

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves

12:00–
Silicon 10:40
June
08
Silica layers

DATE

3D Polymerization for
Functional Devices (Invited)

In Vivo Writing using TwoPhoton-Polymerization

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser
(b)

June
08

Speaker: Yasutaka Hanada

Figure Two-photon
1 (a) Schematicpolymerizationand photograph ofas
the fabricated
12:00
June silica cantilever. (b) The resonant frequency shift as a result of–
method for the fabrication ofdeliberately
08induced condensation.
10:40
Laser-controlled Injector for
June
12:20
large scale biomedical scaffold–
Biological Applications
08
applications
The fabricatedcantilever reported has a width of 55 μmathickness
of
50
μm
and
a
length
of
4
mm.
11:00

Figure 1 (b) depicts the shift in mechanical resonance of thefabricatedas a result of
Speaker:
Toshihikocantilever
Ooie
Speaker: Thomas Stichel
deliberately induced water condensation on the surface of the device.
have demonstrated
time a direct UV written Bragg grating chemical and12:20 We
Fabricationof 3D Protein for the first
June–
Microstructures
08 cantilevers. We shall report on the microfabrication
physicalsensor, based upon microfabricated
12:40
techniques
and the chemical and physical sensing capabilities of the cantilevers, including the
Speaker: Sascha Engelhardt
multiplexing of cantilever sensing elements upon a single integrated chip.
[1] N.V. Lavrik, M.J. Sepaniak, P.G. Datskos, Cantilever transducers as a platform for chemical and biological sensors, Review
of Scientific Instruments, 75, 7, 2229-2253, (2004)[2] G. D. Emmerson S. P. Watts et al. Fabrication of directly UV-written channel waveguides with simultaneously defined
integral Bragg Gratings, Electronics Letters, 38, 1531–1532, (2002)

156

Fabrication of 2D periodic nanoholes on GaN surface
using wet-chemical-assisted femtosecond laser ablation
3D Processing
1 1, T. Ito2, K. Sugioka1, H. Takai2, K. Midorikawa1
S. Nakashima
TIME

Event

1- RIKEN – Advanced Science Institute
TIME
Event
2- DATETokyo Denki University

DATE

Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune
email address:
seisuke@riken.jp
chining enables opto­fluidic
08–
machining Processes Based08
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
Enhancement
is significant
challenge to realize(Invited)of efficiency in blue light-emitting diodes (LED)for Industrial
Manufacturing

09:20
–
09:50

advanced applications in the future. In typical blue LEDs, Gallium Nitride and its derived materials
Speaker: Roberto
Osellame
Ocaña
have refractive
indexesmuch higher than that of air. As a Speaker:
result, José
the L.extraction
efficiency of blueLEDs
isseriously
lowbecauseof
totalinternal
reflection
atthedevicesurfaces,
althoughthe internal
09:50
3D laser lithography andJunequantum
efficiencies
of
LEDs
reach
to
90
%
or
higher.
Inorder
toincreasetheextraction
efficiency,–
nanoimprint lithography:
08
10:10
versatile
methods for the
integrationof two-dimensional(2D) photonic crystal (PhC) structures patterned on the device surface
microandOne
nanooffabrication
is proposed[1].
the widelyofused existing techniques for fabrication of such structures is an
photonic structures
Biologicalelectron-beam lithography followed by plasma dry etching process[2], in spiteandof its medical
disadvantages forapplications
mass productiondue
to high cost and low throughput. By contrast, femtosecond (fs) laser ablation
Speaker: Volker
Schmidt
TIME
Event
DATE
process is an alternative technique in terms of its high-speed,high flexibility, and simple processing.
10:10
Influence of selective
laser we developed
June wet-chemical-assisted fs laser ablation in which the
For micro/nanofabricationof GaN,
16:30
Laser Decal Transfer of NanoJune–
melting process parameters on
08
second morphology
harmonic (λ=of387
nm,vectors
150 fs) of near-infrared femtosecond
laser beam was focused using08an–
materials
10:30
singleobjectivelensmetalon thesurface of a single-crystal GaN16:50
substrate immersed in 35% hydrochloric (HCl)frompowderSpeaker:craters
Alberto Piquéacid solution [3]. In this method, high-quality and uniform ablation
can be formed comparedSpeaker: Igor Yadroitsev
with those produced by fs laser ablation in air followedbyetchinginHCl(two-step processing
16:50
Dynamics of the Laser Decal
June
method).
This
is
due
to
photochemicalorphotothermal
reactionofHClsolutionwithablated materials,–
Transfer
Process
08
09:20
3D sub-diffraction-limit
June
resultingin effective
removalof debris. In 08
this paper,17:10
we have some issues to be resolved, such as–
patterningof hybrid
polymers
Speaker: Scott A. For
Mathews
09:50
visible andlaser
density,withresolution
and infrared
periodicity
with the aim of practical application.
high densification, we
pulsescontrolled
the repetition rate using Pockels cell from17:10
1 kHz Optimization
to 10 Hz to of
avoid
the scattering Junefromfeature resolububblesSpeaker:
generated
duringablationatneighboringsites.
In
this
case,
an
incidentpulse
istransmitted–tion, processing window &08
Sönke Steenhusen
17:30 by structuring
time
for thetwoto the substrate surface after the micro-bubble generated
the preceding
pulse
disappears
by self
pressurization effect. As a result, the pitch between ablation photon
holes ispolymerization(2PP)
shortened from 5 μm to 1μm,
process by the use of novel
leading to a 25-fold density growth. Using high NA objective lens,
wetried
to improve the fabrication
initiators
resolution of ablation craters further. At present, ablation craters smaller than 200 nm werePuchersuccessfullyusing an oilwith Niklas
an NAof 1.4. We have also
3Dobtained
Processing
2 immersion objective lensSpeaker:
demonstrate the fabrication of 2D periodic nanoholes by scanning the GaN substrates on piezo XYZ
17:30
Laser Assisted BioprintingJunehigh-precision
stage using the second harmonic
singlepulse& Biomaterials:of 5 nJ, as shown in Fig.
TIME
Event
DATE
– fs-laserof Cells
081.
Ablated craters, which are as small as 400 nm FWHM
with
a
depth
of
50
nm
are
periodicallyaligned
17:50
Development of a DedicatedWorkstation, Experimental
11:30
3D PolymerizationforJunewith a pitchof 1 μm.
–
12:00

12:00
–
12:20

Functional Devices (Invited)Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Results and Jet Formation
Modeling

08

Fabrication of 3D Protein
Microstructures

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker:on
Klaus
Speaker:
Figure1 Sascha
AtomicEngelhardt
force microscopy image of the periodic structure fabricatedthe Stadlmann
surface of GaN substrate.

[1] Z. S. Zhang, B. Zhang, J. Xu, K. Xu, Z. J. Yang, Z. X. Qin, T. J. Yu, and D. P. Yu, Appl. Phys. Lett., vol. 88, pp. 031111031113, (2006).
[2] T. N. Oder, K. H. Kim, J. Y. Lin, and H. X. Jiang, Appl. Phys. Lett., vol. 84, pp. 466-468, (2004).
[3] S. Nakashima, K. Sugioka, and K. Midorikawa, Appl. Surf. Sci., vol. 255, pp. 9770-9774, (2009).

157

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Rotational
Magnetic
LPM
2010: Session
list Micro-Viscometer for Blood
Viscosity Measurements at the Micro Scale
1
2
3
2
3D Processing
B. Kavi1, D. Babi , N. Osterman , I. Poberaj

1- LPKF Laser & Elektronika d.o.o., Polica 33, SI-4202 Naklo, Slovenia
DATE Jadranska
TIME19, SI-1000
Event Ljubljana, Slovenia
2- Faculty of Mathematics and Physics,
3- “Jozef Stefan” Institute, Jamova 39, SI-1000 Ljubljana, Slovenia

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June

12:40

08
–
blaz.kavcic@lpkf.si
13:00

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

DATE

June
08

Here we present a method to measure the viscosity of liquids with sample volumes of the order of
Speaker:
RobertoOsellame
Speaker:
José L.of
Ocaña
microliters,
whichenables
probing of samples that are two or moreordersmagnitude smaller thanrequired for commercially available micro-viscometers. Our rotational micro-viscometer is based on a
09:50rotating
3D laser
and
June
thin
disclithography
with the diameterof approximately
50 micrometers, which is made of epoxy–
nanoimprint lithography:
08
photoresist
SU-8
doped
with
ferrousnanoparticles.
The
disc
is fabricated by a multi-step application
10:10
versatile methods for the
micro-imaging
and nanofabricationof employs an ultraviolet diode laser and a pair of acousto-opticof laser directtechniquewhich
structures
andmedical A
deflectorsphotonic
with control
hardware to steer the beam and Biologicalenable high speed
micro-structuring.
applications
magneticSpeaker:
bar isVolker
firstSchmidt
structured into a doped photoresist layer. The
bar is then enclosed into a
structured photoresist disc and the device is separated from the substrate surface. When the disc isplacedan externalrotatinglaser
magnetic field,
are subject to a magnetic
10:10 inInfluenceof selective
Junethe dopant
TIME nanoparticles
Event
DATE
–
melting
process
on in the08 direction of the external magnetic field rotation. The
torquewhich
causestheparameters
disc to rotate
10:30
morphology of single vectors
09:20 and
OpticalTrappingof Bio-of the external
Junemagnitudeof metal
the magnetic
rotationfrequency
frompowder torque depends on the density–
molecules
andNanoparticles
08
magnetic field, which makes it possible to control the09:50
rotationfrequency
of
the
disc
externally.
By
Based on Resonance andIgor Yadroitsev
balancingSpeaker:
the magnetic
field torque with that of the viscous liquidSurface
surroundingthe(Invited)disc, it is possible toPlasmondeduce the viscosity of the examined sample. The external magnetic field provides a simple means of
09:20
3D sub-diffraction-limit
Junethe rotating device,
Speaker:
Yasuyuki
Tsuboitransferring
energy to the micro scale to power
unlikeothermethods [1, 2] which–
patterning of hybrid polymers
08
requiresetups laser
such as the use of opticaltweezers[3].
Moreover,by enabling quick
09:50 morewith complicatedvisible and infrared
09:40
In Vivo Writing using TwoJune
pulsesand precise
viscosity measurements on samples with –very small
volumes, the technique can be
Photon-Polymerization08
10:00
successfully used in medicine or biology.
Speaker: Sönke Steenhusen

Speaker: Jan Torgersen[1] S. J. W. Parkin, G. Knöner, T. A. Nieminen, N. R. Heckenberg and H. Rubinsztein-Dunlop, A Constant Torque Micro10:00
Femtosecond laser ablation
June
Viscometer, Proc. SPIE, vol. 5736, pp. 59-65 (2005).
– a rotatingof dentin:
A characterisation
08[2] S. Maruo and H. Inoue, Optically driven viscous micropump using
microdisk,
Appl. Phys. Lett., vol. 91, pp.
10:20
study
084101-1-084101-3 (2007).
[3] A. Ashkin, J.
M. Dziedzic,
J. E. Bjorkholm2
and S. Chu, Observation of a single-beam gradient force optical trap for dielectric
3D
Processing
Speaker: Sandra Alvesparticles, Opt. Lett., vol. 11, pp. 288-290 (1986).
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Thomas Stichel

12:20
–
12:40

158

12:00
–
10:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications
Speaker: Toshihiko Ooie

June
08

Characterization of silver nanoparticles prepared bylaser ablation in water and DMSO
3D Processing 1N. Mansour, R. Karimzadeh, H. Aleali

Physics Department, Shahid Beheshti University, Evin, Tehran 19839, Iran

TIME

Event

DATE

TIME

Event

Email address: n-mansour@cc.sbu.ac.ir

DATE

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune–
chining enables
opto­fluidic
08– properties
machining
Processes
Based08
Silvernanoparticles(AgNPs)are widely studied
for their
whichfind applicationin many
09:50
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
different(Invited)fields from material to medical science. The control ofsize,shape,
surfacefunctionalization
for Industrial Manufacturing

and stability is very important issue in AgNPs synthesis. Synthesis of metal nanoparticles by laser
RobertoOsellamein liquids has open new prospectiveSpeaker:
L. Ocaña simple synthesis andablationSpeaker:of metallic
targets
for theJosé
extremely
also for modification of their properties [1, 2].
09:50
3D laser lithography andJune
In– the present
study,lithography:
silver nanoparticles arenanoimprint
08 fabricated by laser ablation of a pure silver plate in thewater andthe methods
DMSO. for
Laser
10:10
versatile
the ablation is conducted by fundamental harmonic of Nd: YAG;
micro- andnanofabricationofi.e.,wavelength:1064
nm,
pulse energy:
20 mJ, pulse duration: 18 ns repetition rate: 1 Hz. Colloids
photonic
andmedicalcontaining
silver structures
nanoparticles are studied by transmissionBiologicalelectron microscopy(TEM)
and shown inapplications
figures Speaker:
1a andVolker
1b.Schmidt
The shape of the silver nanoparticles is sphereand the size distribution are
DATE ofapproximately remained the same in both solutions. TIME
FiguresEvent
2a and 2b show UV-Vis spectrum
10:10
of selective
laser respectively.
June One can see that the AgNPs suspended in the water
AgNPs Influencein the waterand the DMSO
16:30
Laser Decal Transfer of NanoJune–
meltingplasmon
processabsorption
parameters(SPA)on
08 400 nm.
show
surfaceaboutother hand, the AgNP colloids obtain– On thematerials
08
10:30
morphology of single vectors
in the DMSO
is very
stable and does not show any16:50
SPA. Property changes of the AgNPs in thefrom metal
powderSpeaker:and
AlbertoDMSO are analyzed using X-ray photoelectron spectroscopy (XPS)
willPiqué
be reported.
Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

16:50
–
17:10
17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

11:30
–
12:00
12:00
–
12:20

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

Laser Assisted Bioprintingof Cells & Biomaterials:
Development(a)(b) of a DedicatedWorkstation,
3D PolymerizationforJune of AgNPs suspended
Figure 1 TEM images
and size distributionin (a) water Experimentaland (b) DMSO.
Results and Jet Formation
Functional Devices (Invited)08
Modeling

Event

DATE

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

(a)

June
08

June
08

Speaker: Niklas Pucher

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Dynamics of the Laser Decal
Transfer Process

June
08

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus(b)Stadlmann

Figure 2 Absorption spectrum of AgNPs suspended in (a) water and (b) DMSO

1[1] G. W. Yang , Laser ablation in liquids: Applications in the synthesis of nanocrystals , 52, 648-658, (2007).
1
2[2] V. Amendola , M. Meneghetti , Laser ablation synthesis in solution and size manipulation of noble metal nanoparticles,
Phys. Chem. Chem. Phys., 11, 3805-3821, (2009).

159

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Microstructured
LPM 2010:
Session list GRIN lens as an external
coupler to thin-film waveguides

3D Processing 1 T. Fricke-Begemann, J. Ihlemann
Laser-Laboratorium-Göttingen e.V., D-37077 Göttingen, Germany
TIME

Event

DATE

TIME

Event

DATE

fricke-begemann@llg-ev.de

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune–
chining enables opto­fluidic
08–
machining Processes Based08
Planar opticalwaveguides
consist of a thin film of high 13:00
refractiveonindex
material,Laser
usuallya metal oxide,
09:50
sensingin lab-on-a-chip
Nanosecond
Sources
on a transparent
canManufacturing
be found in life science(Invited) substrate. Some of the most interesting applications
for Industrial

research. For example, the waveguides are used as biosensors which enable a highly efficient andSpeaker: Roberto Osellame
Speaker: José L. Ocaña
specific excitationof fluorescently labelled molecules on the waveguidesurface by the evanescentfield of themode. Dueto the small June
thickness of the waveguides with typically 100 - 200 nm,
09:50
3D guidedlaser lithography
and
prism
coupling
or endface coupling are not08applicable and grating couplers are usually applied to–nanoimprint
lithography:
10:10
versatile
for the In addition to lithographic methods, direct laser ablation can betransferlight into methods
the waveguides.
and nano fabrication ofused for microthe
fabricationoftheof the process allows to tailor thephotonic structures grating couplers. The great flexibility
Biologicaland medical
grating couplers to specific applications.

applications

Speaker: Volker Schmidt

In this work, we present a technique that uses a micro-structured gradient index (GRIN) lens to couple
10:10 light
Influenceof selective
June
Event
DATE
laser
from a single
modelaser
optical fiber directly
to aTIME
planar waveguide(see figure 1). If positioned–
melting process parameters on
08
preciselymorphology
on the waveguide,
external grating structure on the surface of the lens produces an
10:30
of single thevectors
09:20
Optical Trapping of BioJune
powder on the surface of the waveguideeffective fromindexmetal
modulation
thus provides
efficient coupling. The– andmolecules
and Nanoparticles
08
external coupler can be multiply reused. The grating withnm period
is fabricated
09:50500 Basedon Resonanceandby direct laser
Speaker: Igor Yadroitsev
Plasmon (Invited)of this coupling
scheme is, that theablation with an F2-laser at 157 nm. The main advantage Surface
conventional
grating
couplers,
whichinduce
a
major
part
of
the
production
costsof the waveguide
09:20
3D sub-diffraction-limit
June
Speaker: Yasuyuki Tsuboi
devices,become dispensable.
This is especially
important in biosensing applications, where the–patterningof hybrid polymers
08
09:50
with
visibleinfraredlaser for single-use. Experimental
waveguidechips
areandusually
designed
results
andusing
FEM Twosimulations show
09:40
In Vivo
WritingJunepulses–Photon-Polymerization
08
that the new technique can provide coupling efficiencies comparable
to conventional grating couplers.
10:00

Speaker: Sönke Steenhusen

10:00
–
10:20

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

12:20
–
12:40

160

June
08

12:00
–
10:40

Speaker: Hong-Bo Sun

Speaker: Thomas Stichel

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

Speaker: Sascha Engelhardt

June
08

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications

Speaker: via
Toshihiko
Ooie
Figure 1: Principle sketch of the waveguide couplinganexternal, microstrutured GRIN lensFabrication of 3D Protein
Microstructures

June
08

Speaker: Sandra Alves
DATE

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Speaker: Jan Torgersen

June
08

Size-controlled silicon quantum dots synthesis by gated
CO2 laser pyrolysis
O.3D
Sublemontier*,
F. Lacour,
Processing
1 X. Paquez, V. Maurice, Y. Leconte, O. Guillois, D. Porterat,
N. Herlin and C. Reynaud
TIME

Event

DATE

TIME

Event

Commissariat à l’Energie Atomique, IRAMIS, SPAM - LFP, 91191 Gif sur Yvette, France

DATE

Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune
chining enables opto­fluidic *olivier.sublemontier@cea.fr
08–
machining Processes Based08
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited)for Industrial
Manufacturing
Controllingthe size of quantum dots is a great issue for applications
requiringmaterials with precise

09:20
–
09:50

adjustableproperties
brought by nanostructuration [1]. A typical
Speaker:
Roberto Osellame
Speaker: example
José L. Ocañais the case of Silicon
Quantum Dots (Si-QDs) which exhibit strongly size-dependant optical properties for sizes below 10
09:50
3D laserlithography
andnm. Various
applicationsareexpected in Junedifferent domains including optical and electronic devices–
nanoimprint
lithography:
08 biological structures imaging [4].
[2], photovoltaic solar cells [3] and markers for
10:10
versatile methods for thepyrolysisisanefficientmethodto synthesize various high purity nanopowders in a
CO2 laser-driven
micro- and nano fabrication ofgas phasebottom-up
approach. This technique offersBiologicala convenient control
on the synthesis
photonic
structuresand medical
conditions by adjusting parameters such as laser intensity. Nevertheless,thesizecontrolapplications of very small
Speaker: Volker Schmidt
quantum
dots remains difficult. We present new developments
for
precisein situ control of the size
TIME
Event
DATE of
power
laser
[5].
The
original
approachconsists
in
Si-QDs
in
the
3.5-5
nm
range
by
using
a
gated
CO
2
10:10
Influence of selective laser
June
16:30
DecalThe
Transferof Nano-duration
June
controllingin timethe energy
injectedprocess by
gatingLaserthe laser.
laser gate-onis–melting
process
parametersonin the08– andmaterials
08is
10:30
of 80
singleadjustedmorphology
in the 10 tos vectors
range at constant duty cycle
peak power. The gate-off duration
16:50
metal powder
adjustedfrom
proportionallyto the gate-on duration so that the averagelaser Piqué
power is kept constant. In
Speaker: Alberto
situ sizeSpeaker:
characterization
Igor Yadroitsev is achieved by on-line Time-of Flight Mass Spectrometry (TOF-MS). Si-QDs
16:50
of theLaser
Junein Fig.
1. Decalmost probable size as a function of the laser gate-on duration
TDynamics
on is plotted

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

–
17:10

17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)Speaker: Hong-Bo Sun

Transfer Process

08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

DATE

June
08

17:30
–
17:50

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

12:00
Two-photon polymerization as
June
Fig. 1. Si-QDs most probable size as a function of the laser gate-on duration Ton for a constant duty cycle Ton/(Ton + Toff) = 0.2
17:50
Laser Induced ForwardJune–
method for the fabrication of
08–
Transfer: A Compact Machine08
12:20
large scale biomedical scaffold
The Si-QDs
size is monotonically increasing with the
18:10laser gate-on duration at a constant laser
applications
Riester
average power. A simple visual guide suggests that the size Speaker:
can beDominik
adjusted
precisely between 3.3
Sticheland 5.3Speaker:
nm by Thomas
adjustingthe laser gate-on duration with a constant laser average power.

18:10
Fabrication of Optical Inter–
connects with two photon
12:20
Fabrication of 3D Protein
June[1]
Science 271, 5251, 933-937 (1996)08
18:30
polymerization– A.P. Alivisatos,
Microstructures[2] T. Feng, H. Yu, M. Dicken, J.R. Heath and H.A. Atwater, Appl. Phys. Lett. 86, 033103 (2005)
12:40

June
08

[3] G. Conibeer, M.
Green,
R. Corkish, Y. Cho, E.-C. Cho, C.-W. Jiang, T. Fangsuwannarak,
E. Pink, Y. Huang, T. Puzzer, T.
Speaker: Klaus Stadlmann
Speaker:
SaschaEngelhardt
Trupke, B. Richards, A. Shalav and K.-L. Lin, Thin solid films 511-512, 654-662 (2006)[4] K. Sato, S. Yanagisawa, A. Funakubo, Y. Fukui, K. Hirakuri and T. Higami, Mat. Res. Soc. Proc. 958, 0958-L10-19 (2007)[5] O. Sublemontier, F. Lacour, Y. Leconte, N. Herlin-Boime and C. Reynaud, CO2 Laser-Driven Pyrolysis Synthesis of Silicon
Nanocrystals and Applications, Journal of Alloys and Compounds 483, 499–502 (2009)161

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Analysisof Regimes
LPM
2010: Session
list for Short Pulse Laser ShockMicro-Forming of Thin Metal Components
for MEMS
Manufacturing
3D Processing
1

TIME

J.L.EventOcaña, M. Morales, C. Molpeceres,
M. Holgado,
J.A
Porro, J.J García-Ballesteros DATE
DATE
TIME
Event

Centro Láser UPM. Universidad Politécnica de Madrid. Campus Sur UPM. Ctra. de Valencia, km. 7,300. 28031 Madrid. SPAIN.

09:20
–
09:50

Femtosecond laser micromaJune
12:40
Development of 2D/3D Microchining enables opto­fluidic
08–
machining Processes BasedE-mail: jlocana@etsii.upm.es
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited)for Industrial Manufacturing

June
08

Speaker: Roberto Osellame
Speaker: José L. Ocaña
Laser shock
micro-forming is conceived as a non-thermal laser
forming method based on the highintensity
laser
inducedshockandwaves capability
09:50
3D
laser
lithography
June to modify the tensional state of thin targets [1]. The
techniquehas the advantagesof laser thermal–
nanoimprint
lithography:
08 forming (non-contact, tool-free and high precision),
10:10 additionally,versatile methods
for the thermal character allows the preservation and improvement ofbut,
its minimally
micro- and nano fabrication of
mechanicalmaterial
properties by inducing appropriate residual stress fields. In particular, thephotonic
structures
Biological and medical
induction of compressive residual stress fields on the target surface is a desirable feature introducing
Volker Schmidt
additionalSpeaker:
protectionof the formed parts against corrosion and fatigueapplications
crack propagation.

10:10useInfluenceof selective
June
TIME
Event
DATE
The
of ns laser
pulses laser
provides a suitableparameter
matching
for the laser forming ofan–melting process parameters on
08
importantrange of sheet
components
preserving
the
short
interaction
time
scale
10:30
morphology
of single
vectors used in MEMS that,
09:20
Optical Trapping of BioJune
metal
powderrequired fromfor thepredominantly
mechanic (shock) induction
residualstresses, allows for– of deformation
molecules andNanoparticles
08
09:50 range
Based
Resonance andthe successful processing of components in a medium
of onminiaturization
but particularly
Speaker: Igor Yadroitsev
Surface Plasmon (Invited)
important according to its frequent use in such systems.
09:20

3D sub-diffraction-limit

June

Speaker: Yasuyuki Tsuboi

Continuinga previous
discussionof the problem
by the authors [2], in the present paper further–
patterningof hybrid
polymers
08
09:50
with
visible andon
infraredlaser of laser shock micro-forming
analysisis contributed
the physics
andthe influenceof the different
09:40
In Vivo
Writingusing TwoJune
pulses–Photon-Polymerization
08
processing
parameters on the net bending angle. The experimental
setup used for the experiments,
10:00
sample fabrication
andexperimental results of influence of numberof laser pulses on the net bending
Speaker: Sönke
Steenhusen
Speaker: Jan Torgersen
angle are also presented.
10:00

Femtosecond laser ablation

June

12:00
–
10:40

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

–
of dentin:
A characterisation
08
Results for different geometries relevant for MEMS manufacturing
are presented.
In figure 1, a sample
studyof the bending achievable by the proposed technique 10:20
in different
micromachined metal specimens is
3D Processing 2
shown.
Speaker: Sandra Alves
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications
Speaker: Thomas Stichel

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications

June
08

Speaker: Toshihiko Ooie

12:20
Fabrication of 3D Protein
June
Scanning electron microscope images of laser–Figure 1:Microstructures
08 shock bended AISI 304 specimens in different MEMS geometries
12:40
Speaker: Sascha Engelhardt[1] M. Dirscherl, G. Esser and M. Schmidt, “Ultrashort Pulse Laser Bending” J. Laser Mi-cro/Nanoengineering, 1, 50 (2006)[2] J.L. Ocaña, M. Morales, C. Molpeceres, O. García, J.A. Porro and J.J. García-Ballesteros “Short pulse laser microforming of thin metal
sheets for MEMS manufacturing” Appl. Surf. Sci. 254, 997 (2007)

162

Tuning Size Distribution of Gold Nanoparticles
Generated by Laser Ablation in Water at Different
3D Processing 1Repetition Rates
1

TIME

09:20
–
09:50

A. Menéndez-Manjón, S. Barcikowski
DATE
TIME
Event

Event

1

1- Laser Zentrum Hannover e.V., Hollerithallee 8, D-30416 Hannover, Germany

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June

12:40

Development of 2D/3D Micro-

13:00

on Nanosecond Laser Sources
for Industrial Manufacturing08–
machining Processes Baseda.menendez@lzh.de

DATE

June
08

The formation of nanoparticles by pulsed laser ablation in liquids presents many interrelated
Speaker:
Robertocomplicate
Osellame
Speaker: José
L. Ocaña
phenomena,which
the study of independent parameterson theresulting colloids. For thesake of profitableness, a productive and controlled fabrication of colloidal nanoparticles is required.
09:50
3D laser lithography andJuneTheon particle
size and ablation rate
– influencenanoimprint
lithography:
08 of laser fluence [1], wavelength [2] and liquid medium[3,4], among
others,haveforbeen
10:10
versatile
methods
the investigated for this reason. We present here the effect of repetition
andefficiency
nano fabricationofrate on microablationand particle
size distribution obtained by ablating a gold target in pure
photonic
structures range (100-5000 Hz) ablation Biologicalandandmedicalwater. In
the investigatedefficiency is constant,hence a linear
applications
increaseSpeaker:
is obtainedforablationrate.
Theparticle
size
distributionisstrongly
affectedby the laser
Volker Schmidt
TIMEto radiation
Event
DATE topulses repetition rate and the total number of pulses due
absorption happening parallel
10:10
Influenceof selectiveJune
the particle
generation.
Higherlaser
fragmentation
efficiency (plasmon peak shift per pulse) has been found
16:30
Laser Decal Transfer of NanoJune
parameterson08
at– pulsemelting
delays processsimilar tothe characteristic
diffusion time
the focal region (estimated to some– troughmaterials
08
10:30
morphology of single vectors
milliseconds)(Figure1). Repetition rate has been shown
16:50to be an important parameter affecting thefrom metal
powderSpeaker:
nanoparticle generation in liquids by laser ablation. Productivity
asAlberto
well Piquéas particle size might be
Speaker:
Igor
Yadroitsev
controlled by a proper choice of the pulse frequency used for ablation.
09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

16:50
–
17:10
17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2

Dynamics of the Laser Decal
Transfer Process

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

Laser Assisted Bioprinting
Juneof Cells & Biomaterials:
08
Development of a DedicatedWorkstation, Experimental
11:30
3D Polymerization for
June
Results and Jet Formation–
Functional Devices (Invited)08
Modeling
12:00 Figure 1 Agglomeration index variation with the number of pulses at different
repetition rates [100-5000 Hz] (a) and
TIME

Event

DATE

Speaker: Hong-Bo Sun

17:30
–
17:50

corresponding fragmentation efficiency of gold nanoparticles in water (b).

Speaker: Agnès Souquet

12:00
Two-photon polymerization as
June[1] A.V. Kabashin, M. Meunier. Synthesis of colloidal nanoparticles17:50
during femtosecond
laser ablationof gold in water. Journal
Laser Induced
ForwardJune–
method for the fabrication of
08ofApplied
Physics,
94,7941-7943(2003).
–
Transfer: A Compact Machine08
12:20
large scale biomedical scaffold[2] W.T. Nichols,
T.
Sasaki,N.
Koshizaki.
Laser
ablationofaplatinumtargetinwater
II:
Ablationrate
andnanoparticle
size
18:10
applications
distributions. Journal of Applied Physics, 100, 114912/1-6 (2006).
Speaker: Dominik Riester[3] A.V. Simakin,
Voronov,
Speaker: V.V.
ThomasStichel N.A. Kirichenko, G.A. Shafeev. Nanoparticles produced by laser ablation of solids in liquid
environment. Applied Physics A, 79, 1127-1132 (2004).
18:10
Fabrication of Optical InterJune[4] N. Bärsch, J. Jakobi, S. Weiler, S. Barcikowski. Pure colloidal metal and ceramic nanoparticles from high-power picosecond–
connects with two photon
08
12:20
Fabrication of 3D Protein
June
laser ablation in water and acetone. Nanotechnology, 20, 44560371-9(2009). polymerization
18:30

–
12:40

Microstructures

Speaker: Sascha Engelhardt

08

Speaker: Klaus Stadlmann163

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Thin Session
silicon wafers
dicing using line-focused
LPM 2010:
list
nanosecond-pulse 355nm q-switched laser
3D Processing 1Rajesh S. Patel, James M. Bovatsek
Newport Corp., Spectra-Physics Lasers Division, 3635 Peterson Way, Santa Clara, CA 95054, USA
TIME

Event

DATE

TIME

Event

DATE

Raj.patel@newport.com

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune–
chining enables opto­fluidic
08–
machining Processes Based08
The widespreaduseof thin silicon wafers in the semiconductor
is driving
large
and growing
09:50
sensing inlab-on-a-chip
13:00
onindustry
Nanosecond
Laser
Sources
interest (Invited)in laser-based wafer dicing solutions. Especially, for
as Industrial
the wafers
become thinner, theManufacturing

advantage of laser dicing over saw in terms of both the speed and yield of the process is very
Roberto Osellame
Speaker: José L. Ocaña
apparentSpeaker:
and remarkable.
For dicing of thin silicon wafers, managing
the laser heat input during thedicing process
is lithography
very important
thin wafers and narrow kerf width requirement. In
09:50
3D laseranddue to increasingly
June
this
line-focused
beam laser-cutting 08
of thin (100 m and below) silicon is explored using– work,nanoimprint
lithography:
10:10
versatile methods
the nanosecond-pulse 355-nm DPSS q-switched laser. Optimal process
Spectra-Physics®
Pulseo®for
20-W
micro- and nano fabrication of
conditions
for cutting
various depths in silicon are determined, with particular emphasis on fluence
photonic
structures
Biological and medical
optimization for a narrow-kerf cutting process. By shaping the laser beam into a line focus, the optimal
Speaker:
Volker Schmidt
fluence formachining
the silicon can be achieved while at the same applications
time utilizing the full output powerof the laser source. In addition, by adjusting the length of the laser line focus, the absolute fastest
10:10 forInfluenceof selective
laser
TIME
Event beam, a dramatic improvement
DATEinspeedvarious cutting
depthsis realized.June
Compared
to a circular–melting process parameters on
08
process morphology
efficiency is observed.
Also, the effect of laser pulse width on fastest cutting speed achieved
10:30
of single vectors
09:20
Optical Trapping of BioJune
frommetal depths
powderhas been investigated.
for different
cutting–molecules and Nanoparticles
08
09:50

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Speaker: Sönke Steenhusen

Speaker: Yasuyuki Tsuboi

09:40
–
10:00
10:00
–
10:20

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

164

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves

12:00
–
10:40

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Based on Resonance andSurface Plasmon (Invited)

June
08

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications
Speaker: Toshihiko Ooie

June
08

Formation of Polycrystalline Ge Micropattern by
Laser Direct Writing Method Using Germanium Ink
Consistingof Organogermanium Nanocluster
3D Processing 1
TIME

09:20
–
09:50

Event

A. Watanabe 1*, M. C. Yang2, C. W. Cheng2*, W.C. Shen1, C.Y. Lin1
DATE

TIME

Event

1- Institute of Multidisciplinary Research for Advanced Materials, Tohoku University,
Katahira 2-1-1, Aoba-ku,
980-8577,
Japan
Femtosecond laser micromaJune Sendai
12:40
Developmentof 2D/3D MicroITRI South, Industrial
Institute, Processes Basedchining enables opto­2fluidic
08 Technology–Researchmachining
No. 8, Gongyan Rd. LiuJia Shiang, Tainan
City 734,
R.O.C. Laser Sources
sensing in lab-on-a-chip
13:00
onTaiwan,
Nanosecond(Invited)for Industrial Manufacturing

Speaker: Roberto Osellame

Speaker: José L. Ocaña

DATE

June
08

watanabe@tagen.tohoku.ac.jp (A. Watanabe); CWCheng@itri.org.tw (C.W. Cheng)

Recently, solution processing using novel nanomaterials attracts more and more interests toward
09:50
3D laser lithography andJune
printable& flexible andlarge area electronic 08
devices. Although germanium is a fundamental element–nanoimprint
lithography:
in electronic
devices,
thereforarethefew reports on a printable process using a germanium ink. In previous
10:10
versatile
methods
andnano fabricationof and optical and electrical properties of an organogermanium
studies,microwe havereported
the syntheses
photonic
structuresandnanocluster(OrGe)
which has a germanium nanocluster ofBiologicala few nanometersand medicalorganic groups
applications
modifyingthenanocluster
[1].
The
OrGe
can
be
also
considered
to
be
a
hyper
branched
Speaker: Volker Schmidt
TIME
Event an organosoluble germanium
DATE
organogermanium polymer consisting of Ge-Ge chain.
Suchnanocluster
was preparedfromtetrachlorogermane
in a solution using Mg, and then the surface was
10:10
Influenceof selective
laser
June
Laser
NanoJune–melting
processgroup.
parameters
on is a08stable Ge16:30
modifiedby an organic
The OrGesourcewhich Decal
can beTransfer
handledofevenin the air.
–materials
08
10:30
morphology
of single
vectors
In this study,
weprepared
micropatternsofpolycrystallineGe(pc-Ge)byasolutionprocess
using
a
16:50
from metal powder
germanium ink consisting of the OrGe and an organic solvent.
and theSpeaker: The
Albertomicropatterning
Piqué
crystallization
the
OrGe film were achieved by laser direct writing method. In the process, the laser
Speaker:of
Igor
Yadroitsev
Dynamics
Laser Decal
Junebeam was focused through an objective lens and16:50
irradiatedon theof thespin-coatedOrGe film.
–
Transfer Process
08
09:20
3D
sub-diffraction-limit
June
Micropatterns of the pc-Ge were obtained by scanning 17:10
the laser beam using PC-controlled xyz stage.
–
patterning of hybrid polymers
08
By etchingan andorganic
solvent
as an eluent, the unirradiatedarea Scott
wasA.easily
removed. The laser
Speaker:Mathews
09:50
withusingvisibleinfraredlaser
direct writing
methodshowedahighresolutionofafew
micrometers.
The
structuralchanges of thepulses
17:10
Optimizationof feature
resolu-RamanJune
Ge skeleton were investigated by micro-Raman spectroscopy
monitoring thecharacteristic-1–tion,ofprocessing
windowThe& linewidth08
Speaker:300
Sönke
Steenhusen
which is assigned to the TO-phonon
band
the Ge skeleton.
band aroundcm
17:30
structuring time for the twoand the peak position of the Raman band are sensitive to the crystallinity.
The micropatterns preparedphoton polymerization(2PP)
by laser direct writing method using CW Nd:YAG laser (532 nm)
underbyArtheshowedsharp Ramanprocessuse of anovel
initiators
1300 cm-1 as shown in Figure 1. Aband of pc-Ge at 302 cm-1 and no band of residual carbon aroundmicrodevice consisting of pc-Ge and Ag microelectrodes was fabricated by all wet process based on
Speaker: Niklas Pucher
3D Processing
2 Ge and Ag nanoparticle-dispersed
the laser direct
writing method using
inks as shown in Figure 2.
The formation of the pc-Ge was possible even in the air17:30
by using
laserAssisted
direct writing
method. For the
Laser
Bioprinting
June
TIME
Event
CW lasersystem, the dependence of theDATE
crystallinity on
scanning
was investigated. The08– the of
Cells & rate
Biomaterials:
Developmenta Dedicatedwere also
effects of the short duration pulse irradiation and the17:50
repetition
rate on theofcrystallinity
Workstation, Experimental
11:30
Polymerization
for laser systems.
Junestudied 3D
by using
femtosecond–
12:00

Intensity

12:00
–
12:20

Functional Devices (Invited)

Results and Jet Formation
Modeling

08

pc‐Ge

Speaker: pc-Ge
Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scalebiomedical scaffold
laser-irradiatedapplications
Speaker: Thomas
Stichelat 500 oC
heat treated

12:20
Fabrication of 3D Protein
400
600
800
1000
– 200Microstructures-1
12:40
Raman shift (cm )

June
08

carbonJune1200 08

Speaker: Sascha
Engelhardt
Figure 1 Micro-Raman
spectraof micropattern prepared bylaser direct writing method using CW Nd:YAG laser (532 nm)ounder Ar and the OrGe film heat treated at 500 C in vacuo.

microline
Speaker: Agnès
Souquet

17:50
–
18:10

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Ag electrode

18:10
–
18:30

µm
Fabrication of Optical 50
Interconnects with two photon
polymerization

June
08

Speaker: Klaus
Stadlmann
Figure 2 Microdevice
consistingof pc-Ge and Ag microelectrodes fabricated by all wet process based on the laser
direct writing method.

[1] A. Watanabe, F. Hojo, T. Miwa, Appl. Organomet. Chem., 19, 530 (2005)

165

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laser
VacuumLPM
2010:Based
Sessionlist Packaging of Micro-Devices
Using Localised Heating

3D Processing 1

1

N. Lorenz , D.P. Hand

1

1- Heriot-Watt University, Applied Optics and Photonics Group, School of Engineering and Physical Sciences, Edinburgh,
Event
DATE
TIME
Event
DATE
EH14 4AS, UK

TIME

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune
nl62@hw.ac.uk–
chining enables opto­fluidic
08–
machining Processes Based08
09:50
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
In recent (Invited)
years the interest in micro-devices, including Micro-Electro-Mechanical-Systems(MEMS),
fromfor Industrial Manufacturing
research institutions, firms and the press has risen considerably. However one of the persisting challenges
Speaker: Roberto
Osellame
José
Ocaña
in the fabricationof suchdevices is the packaging process [1, 2]. ASpeaker:
numberofL.different
bonding techniques
have been developed but in general they require the entire device to be heated to high temperatures. In
09:50
3Dlithography
andparticularforlaserdirectbonding techniques
like June
Si-fusion and anodic bonding, temperatures in excess of–nanoimprint lithography:
08
1000°Candstrongelectric
fields(1000-2000
V)are essential for successful packaging. As a consequence
10:10
versatile methods for thethe use ofmicrotemperature-sensitive
materials
and nano fabricationof within the package is restricted and problems are generated inphotonic
structures
multi-stage
packagingprocesses where several heating cyclesBiologicalare carried out in sequence;parts joined inand medical
an earlier heating step can disassemble in a later one. Furthermore it isapplications
clearly important that the package
Speaker: Volker Schmidt
should notaffect the performance of the device or cause any damage. Often hermetic and/or vacuum
packagingisrequiredwhich makes
application specific and expensive. Therefore it can easily
10:10
Influenceof selective
laserthe process
June
TIME
Event
DATE
accountfor
up to 50%of theoverall device
and can even reach as much as 90% [3].
–melting
process
parameters
on cost08
Our
is to combine
thevectors
benefits of intermediate
layer bonding– considerably
10:30solution
morphology
of single
09:20
Optical Trappingof Bio- lower bonding
Junefrom andmetal
powderof electric fields – with the highly
temperaturesabsenceheatingwith a laser. 08
In– localised
molecules
and possible
Nanoparticles
Resonanceandaddition to localised heating, appropriate heatsinking is 09:50
requiredBaseddue toonthe
long time-constantsof theSpeaker: Igor Yadroitsev
Surface
Plasmonprocess (tens of seconds). The device is hence placed in good thermal
contactwith a(Invited)heat sink to draw theexcessheat
away
through
the
base
of
the
device.
09:20
3D sub-diffraction-limit
June
Speaker: Yasuyuki Tsuboi
In –previous
studies wehave shownthat using thispatterningof hybrid
polymers
08 process we can achieve full hermetic seals according to
09:50
with visible
and infraredlaser packages with a 09:40
MIL-STD-883G
for standard
electronic
glass fritInintermediate
Vivo Writinglayerusingusing
Two- our localisedJunepulses–Photon-Polymerization
08
laser heatingprocess in an air environment [4]. In this presentation
we will describe a further development
10:00frit bonding process is demonstrated whichof this processtovacuumpackaging.
Alaser-based
glass
Speaker: Sönke Steenhusen
Speaker: Jan Torgersen
successfully addresses the challenges in vacuum packaging (e.g. choiceof materials). In order to optimise
the laser bonding parameters temperature monitoring experimentsarecarriedoutlaserto matchthe laser power
10:00
Femtosecond
ablationJune
to the required bonding temperature, and to monitor to the –temperaturein thecentre of the device duringof dentin:
A characterisation08
the process (see figure 1a). LCC packages have been bonded(see figure 1b) using these
10:20 successfully
study
optimised parameters, for which the temperature in the centre of the device can be kept at least 200°C
3D Processing 2
Sandraleak
Alves test demonstrating thelower than in the joining area. All these samples have passed an Speaker:
initial grossfeasibility of packaging in a moderate vacuum using localised laser heating.
12:00
Mechanism study of gliding
June
TIME
Event
DATE
–
movement of Phormidium in
08
10:40
nano-aquariums integrated
11:30
3D Polymerization for
Junewith different functions–
Functional Devices (Invited)08
fabricated by femtosecond
12:00
laser
Speaker: Hong-Bo Sun
12:00
–
12:20

(a)

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications
Speaker: Thomas Stichel

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications 14 mm

June
08

(b)

Speaker: Toshihiko Ooie

12:20
Fabrication of 3D Protein
June
Figure1 (a)Temperature profile of bonding process; blue–
Microstructures
08 and black traces: inside bonding layer; green trace: on substrate in
the centre of the device. (b) Laser-bonded LCC Package.
12:40

Speaker: Sascha Engelhardt[1] P.V. Dressendorfer, et al., MEMS packaging – Current issues and approaches, in Proc. SPIE, pp. 208-213, 2000.
th[2] Z. Yufeng, et al., Study of MEMS packaging technology, in 6 Int. Conference on Electronic Packaging, 2005.
th[3] M. Chen, et al., Rapid and selective induction heating for sensor packaging, in 6 Int. Conference on Electronic Packaging, 2005.
[4] N. Lorenz, et al., Localised laser joining of micro-devices for hermetic packaging using a glass frit intermediate layer, in Proc. LiM2009.

166

Femtosecond laser applied to photovoltaic cellprocessing.
3D Processing
M. Sentis,1Th. Sarnet, R. Torres, X Sedao and J. Hermann
Laser Plasma and Photonic Processing Laboratory
DATE
TIME
Event
LP3 –UMR 6182 CNRS –Université de la Méditerranée
13288 Marseille Cedex 9, France.

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

12:40
Development of 2D/3D Micro–
machining Processes Based
Sentis@LP3.univ-mrs.fr
13:00
on Nanosecond Laser Sources
for Industrial Manufacturing
June
08

DATE

June
08

Two fields of femtosecond laser processing of photovoltaic cells will be presented: i) silicon surface
Speaker: Roberto Osellame
Speaker: José L. Ocaña
micro/nano
structuring and ii) CIS based photovoltaic cell scribing.
The formation
micro spikes
on crystalline silicon has been the subject of significant
09:50
3D laserof
lithography
and and conesJune
researchduring thelithography:
past few years. The objective
is to improve the unique optical properties that–nanoimprint08
10:10
versatile Si
methods
fori.e.,the increased absorptance throughout a wide spectral range, for possible
microstructured
exhibits,
micronano fabricationof cells. Significant optical absorption enhancement (more thanapplications
inand
photodetector
and solar
photonic structures
Biological and medical
50 % in the UV and 35% in the IR) have been obtained, compared to a non-texturized silicon surface.
applications
DetailedSpeaker:
TEM Volker
analyses
Schmidt of the micro-spikes will be presented showing their surprising mono and
TIME
Event
DATE
polycrystalline structures. In order to create an efficient junction for solar cells, we have doped
our
10:10
Influenceof
selective
laser
June
laser textured surface with a Plasma Immersion Ion 16:30
Implanter.
The
Internal
Quantum
Efficiency
has
Laser Decal Transfer of NanoJune–
melting process parameters on
08
also been
increased,
especiallyin the UV. Therefore –the electricalmaterialsperformance is also drastically08
10:30
morphology
of single
vectors
16:50
improved:
wemetalobserved
a 50% increase in the photocurrent.
frompowderAlberto Piqué
Micromachining of CuInSe2 (CIS)-based photovoltaic Speaker:
deviceswith short and ultrashort laser
Speaker: Igor Yadroitsev
havepulses was also considered. Ablation thresholds and16:50
rates ofDynamics
ZnO, Mo ofand
2 thin films June
theCuInSe
Laser Decal
been
comparedfor
irradiationwithnanosecond
laser
pulsesofultraviolet
andvisibleradiationand–Transfer
Process
08
09:20
3D sub-diffraction-limit
June
17:10
sub-picosecond
pulsesof a Ti:sapphirelaser.
The cells photo-electrical properties were–
patterninglaserof hybrid
polymers
08
Speaker: Scott A. Mathews
09:50
withbefore
visible andand infraredlasermachining. Scanning electron
measured
after laser
microscopy (SEM) and energy
pulsesdispersive X-ray (EDX) analyses were used to characterizethelaser-induced
channels. June
17:10
Optimization of ablation
feature resoluFor bothstudieslaser ablation mechanisms andstructuring
will wewindow
discussed–tion, processing& as well08as
Speaker:
Sönke
Steenhusen
structuringEuropean
time for theproject
twomaterial modification and redeposition. Finally 17:30
the cooperative
Solasys
photon polymerization(2PP)
cell generation will be shortly
http://www.solasys.eu dedicated to laser processing of next photovoltaic
process by the use of novel
introduced.
initiators

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

Speaker: Niklas Pucher

DATE

June
08

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Thomas Stichel

12:20
–
12:40

17:30
–
17:50

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann167

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Continuous
Fabrication of Colloidal Organic
LPM 2010:
Session list

Nanoparticles by Laser Ablation of Microcrystals in
Liquid3D Processing 1
1

TIME

09:20
–
09:50

P. Wagener, S.TIME
Barcikowski
DATE
Event

Event

1

DATE

1- Laser Zentrum Hannoverl, Hollerithallee 8, D-30419 Hannover, Germany

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

June
12:40
08
–
p.wagener@lzh.de
13:00

June
08

Fabrication of colloidal organic nanoparticles is a promising approach to combine molecular
Speaker:
Roberto Osellame
Speaker:optical
José L. Ocaña
properties
with tailorednanoparticle characteristics like electronical,
or solubility properties asa function of particle size. Keto et al. [1] showed that laser ablation of microcrystals (LAM) in an
09:50
3D laser lithography andJuneaerosolflow
is an efficientand universal applicable
method for generating nanoparticles in the gas–
nanoimprint
lithography:
08
phase.
et al.
[2] adopted
10:10 Asahi
versatile
methods
for the the LAM-process for generation of organic nanoparticles in liquid
media. micro- and nano fabrication ofphotonic structures
medical
We present
a novel approach for continuous fabrication ofBiologicalcolloidal organicand
nanoparticles
by laserapplications
ablation Speaker:of microcrystals
Volker Schmidtin aqueous suspension by using a fine liquid jet. The free liquid jet isgenerated by a nozzle with small diameter and provides a thin liquid filament (dfil < 1 mm)
10:10
Influenceof selective
JuneThis geometry
TIME
Event
perpendicular
to thefocused laser
laser beam [3].
allowstight focusing resulting in DATE
high–melting process parameters on
08
intensities
withoutthedangerofdamaging
anopticalelement
likewindows
necessaryin
conventional
10:30
morphology of single vectors
09:20
OpticalTrappingof Bioflow cellsfrom
or cuvettes
and reduces losses of excitation
light byavoiding
scatteringor absorptionJuneinmetal powder–
molecules and Nanoparticles
08
front of the focus. To test this scaleable, high-through put
methodwe chosemelaminecyanurate as a
09:50
Based
on ResonanceandSpeaker: Igor Yadroitsev
Plasmon(Invited)nearly water-unsoluble
microcrystalline model compound. ForSurface
continuous
operation
the generated
nanoparticles were separated by filtration methods from the cycled microparticle suspension.
09:20
3D sub-diffraction-limit
June
Speaker: Yasuyuki Tsuboi
The
colloidal
nanoparticles– resulting
patterningof hybrid
polymers were08analysed by dynamic light scattering, TEM-analysis,
09:50
with
and infrared laser Figure 1 shows
UV/VIS-,IR visible
and NMR-spectroscopy.
TEM-imagesof the using
educt Two(microcrystalline
09:40
In Vivo Writing
June–
Photon-Polymerization08
needles pulses
in the range of 2-5 μm) and laser irradiated samples
which show the formation of nearly
10:00
sphericalSpeaker:
nanoparticle
in
the
range
of
100-200
nm.
Sönke Steenhusen
Speaker: Jan Torgersen
By adding different stabilization agents (neutral and polyelectrolytic polymers like dextrin, dextran,
PVP or polyacrylic acid) we were able to stabilize thegenerated nanoparticles
10:00laserFemtosecond
laser ablation in situ withJuneof dentin: A characterisation
08
tuneable properties like particle size or Zeta-potential. –
10:20
study
.

3D Processing 2

TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

Speaker: Sandra Alves
DATE

June
08

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

12:00
–
10:40

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications
Speaker: Thomas Stichel

June
08

June
08

Speaker: Yasutaka Hanada

Laser-controlled Injector for
Biological Applications

10:40
–
11:00

June
08

Speaker: Toshihiko Ooie

(a)

(b)

Figure Fabrication
1 TEM images:of(a)3DUnirradiated(b) Laser fragmentated melamine cyanurate stabilized with
12:20
Protein melamine cyanurate.
June
0.1 wt% dextrin (image–
Microstructures
08 by Sachtleben Chemie GmbH)
12:40

Speaker:
Sascha[1] W.T. Nichols, J.F.
KetoEngelhardt, D.E. Hennecke , J.R. Brock , G. Malyayanatham , M.F. Becker , H.D. Glicksman , Large-scale
production of nanocrystals by laser ablation of microparticles in a flowing aerosol, Appl. Phys. Lett., 78, 1128-1130, (2001).
12
3[2] T. Asahi , T. Sugiyama , H. Masuhara , Laser Fabrication and Spectroscopy of Organic Nanoparticles, Acc. Chem. Res., 41,
1790-1798, (2008).
1
2[3] P. Wagener , S. Barcikowski , Laser Fragmentation of Organic Microparticles into Colloidal Nanoparticles in a Free Liquid
Jet, Appl. Phys. A, submitted.
1

168

2

3

4

5

6

7

Synthesis of nanoparticles in solution using
femtosecond laser ablation
3D Processing
1
M. Silvennoinen,
K. Päiväsaari, J. Kaakkunen, P. Vahimaa
TIME

Event

Department of the Physics and Mathematics, University of Eastern Finland.
DATE

TIME

Event

DATE

martti.silvennoinen@uef.fi

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune–
chining enables opto­fluidic
08–
machining Processes Based08
Nanoparticles
known to have many features thatmake onthem
usable forvariousapplications.
09:50
sensingare
in lab-on-a-chip
13:00
Nanosecond
Laser
Sources(Invited)of nanoparticles with femtosecond ablation is for
Industrial
Manufacturing
Manufacturing
widelyreportedin the literature [1-3].

However, there is no description how these generated particles relate to the surface morphology of
Speaker: Roberto Osellame
Speaker: José L. Ocaña
the ablated surface. We have generated nanoparticles of various metals in the solution using
femtosecond
laser
ablation. andScanning electron
09:50
3D laserlithography
June microscope images of the ablated surfaces show the–nanoimprint
lithography:
08These images indicate that the maximal particle size in
spherical
particle generationon the surface.
10:10
methods
the surface morphology and more specifically to the ripple structure
solutionversatile
is related
to the forablatedmicro- and nano fabrication offormation.
This gives
the possibility to control the particle size
distribution byandmanipulating
the period
photonic
structures
Biological
medicalof the ripple structure. In the figure 1. is shown scanning electron images of laser induced surface
applications
Speaker:
Volkerstructures
formedinSchmidt
solution using focused femtosecond beam on the stainless steel sample.
10:10
–
10:30

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

TIME

Event

16:30
–
16:50

Laser Decal Transfer of Nanomaterials

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

17:10
–
17:30

Speaker: Sönke Steenhusen

DATE

June
08

Speaker: Alberto Piqué

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher
3D Processing
2 stainless steel sample after femtosecond
Figure 1. Surface of theablation in solution.

17:30

Laser Assisted Bioprinting

June[1] S. Besner,
A. V. Kabashin, M . Meunier, Two-stepfemtosecond laser ablation-based method for the synthesis of stable and
Event
DATE
–
of Cells & Biomaterials:
08
ultra-pure gold nanoparticles in water, Appl. Phys. A, 88, pp. 269-272, 2007.
17:50
Development of a Dedicated[2] E.Stratakis, M. Barberoglou, C. Fotakis, G. Viau, C. Garcia, G. A. Shafeev, Generation of Al nanoparticles via ablation ofWorkstation, Experimental
11:30
3D Polymerization forJunebulk Al in liquids with short laser pulses, Opt. Expr, 17, pp. 12650-12659, 2009.Results and Jet Formation–
Functional Devices (Invited)08[3] J. –P. Sylvestre, A. V. Kabashin, E. Sacher and M. Meunier, Femtosecond Modelinglaser ablation of gold in water: influence of the
12:00
laser-produced
plasma on the nanoparticle size distribution, Appl. Phys. A, 80, pp. 753-758, 2005.
Speaker: Hong-Bo Sun
TIME

12:00
–
12:20

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann169

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Laserprocessing
for advanced solar cells
LPM 2010:
Sessionlist
J. Löffler
Energy Research Centre of The Netherlands, P.O. Box 1, 1755 ZG Petten, The Netherlands

3D Processing 1

Loffler@ecn.nl

TIME

Event

DATE

TIME

Event

DATE

10:10
–
10:30

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

TIME

Event

DATE

09:20
–
09:50

Optical Trapping of Biomolecules and Nanoparticles
Based on Resonance andSurface Plasmon (Invited)

Laser processing is becoming an important production tool in the manufacturing of photovoltaic (PV)
09:20 cells
Femtosecond
laser
Developmentof 2D/3D
June
solar
and modules,
withmicromahuge potentialJune
to enable 12:40
new technology
generationsin Microthe near future.
chining enables
opto­fluidic
08– silicon
machining
Processes
08
In –this contribution,
examplesof next generation
crystalline
and thin-film
PV Baseddevices that are
09:50
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
developedby
ECN
incorporating
laser
processes,
ranging
frommacroscopic
drilling
of
holes
into
(Invited)for Industrial Manufacturing
silicon to micrometer scale selective ablation of nanometer thin films, will be presented.
Osellamemetallization-wrap-through solar cell,
Speaker:
José 16
L. Ocaña
Figure 1 Speaker:
showsRoberto
a so-called
wherelaser drilled vias enable
the reduction of surface coverage of the solar cell by current collecting silver grids and thus increase
09:50
3D laser lithography andJunethe– amountof sunlightlithography:that can be converted08
into electricity, see Figure 1. This leads to higher current
nanoimprint
generationand thus
higherconversion efficiency. Additionally, this cell concept allows simpler
10:10
versatile
methods
for themicroandnano fabricationof same time higher module efficiency. ECN recently achieved a
productionof PV
modules,
and at thephotonic
structures
Biologicaland crystalline
medicalworld record
moduleefficiency of 17% with this technology.
Even more advanced
siliconapplications
solar cells
mayincorporate
laser
processes
likee.g.
drillingof
10000s
of
holes
per
wafer
in 1-2
Speaker: Volker Schmidt
seconds, the ablation of nm thin transparent layers, and (local) laser doping.

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Speaker: Sönke Steenhusen

June
08

Speaker: Yasuyuki Tsuboi

In Vivo Writing using TwoPhoton-Polymerization

09:40
–
10:00

June
08

Speaker: Jan Torgersen

Figure 1. Metallization wrap-through solar cells with 16 laser drilled vias (left), and advanced module
10:00
Femtosecond laser ablation
June
concept enabled by this cell technology, side-by-side with– conventional
crystalline
silicon PV module.
of dentin:
A characterisation
08(Solland Solar Energy Holding BV is the owner of the registeredindustrial designs Sunweb®)
10:20
study

3D Processing 2

Sandra Alves
In the field of thin-film PV, a transition from today’s glass basedSpeaker:
technologies
towards devices on foil
substrates that can be produced in roll-to-roll fashion,12:00
offers aMechanism
tremendous
potential
for further cost
study
of gliding
June
TIME
Event
DATE
reduction. Figure 2 illustrates ECN’s concept for low-cost
efficiency thin-film
silicon in
PV on steel– high movementof Phormidium
08
10:40monolithic
nano-aquariums
integrated
foil.
specialfeature infor
this concept is June
the advanced
series interconnection
scheme,11:30One3D
Polymerization
with different functions–
Functional(Invited) scribes (P1,
08 P2, P3).
which
requiresthreeDevices
depth selective
fabricated by femtosecond

12:00

12:00
–
12:20

laser

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Yasutaka Hanada

Laser-controlled Injector for
Biological Applications

10:40
–
11:00

Speaker: Toshihiko Ooie

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

June
08

P

P

P

Figure 2. ECN’s low-cost high-efficiency thin-film Silicon PV concept requiring three depth selective
laser scripes (P1, P2, and P3) and the realization of the three scribes within 250 micrometer width(right image).

170

Nanojoining of Ag/Au nanoparticles by femtosecond
laser irradiation
3D Processing
A. Hu1, 1
Y. Zhou1, R. Karimi2, J. Sanderson2, W. W. Duley2
TIME

1- Departmentof Mechanical and Mechatronics Engineering,
University
3G1,
Event
DATE
TIME of Waterloo,
Event 200 Univ. Ave. West, Waterloo, ON N2L
DATE

09:20
–
09:50

CanadaFemtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune
chining enables opto­fluidic
08–
machining Processes Based08
2-Departmentof Physics and Astronomy, University of Waterloo,
200 Univ.
West, Waterloo,
ON N2L
3G1, Canada
sensingin lab-on-a-chip
13:00
on Ave.
Nanosecond
Laser
Sources(Invited)for Industrial Manufacturing
Speaker: Roberto Osellame

a2hu@uwaterloo.ca Speaker: José L. Ocaña

09:50
3D laser lithography
andJune
The interaction
between femtosecond
laser
pulses and Ag/Au nanoparticles has been investigated.
–nanoimprint lithography:
08
14
Three
effects
areidentifiedatdifferent
intensities:
photofragmentation at rather high intensity (~10
10:10 2 versatile methods for the
102
nanojoining
atfabrication
low intensity
W/cm ),microand nanoof (~10 W/cm ) and shock wave processing at intermediate
photonic
structures
medicalintensities.
Photofragmentation
forms a large number of Biologicaltiny nanoparticles andwith anaverage size oftens of Speaker:
nanometers.
After prolonged irradiation a narrow size distributionof nanoparticles is obtained.
applications
Volker Schmidt
In the intermediate intensity regime, spherical nanoparticles
are changed into a disc shape
TIME
Event
DATEbyinteraction
with theshock wave.
increase in laser intensity results in the formation of ring10:10
Influenceof selective
laserA furtherJune
16:30
Laser Decal
Transfer
NanoJune–melting
process
parameters
08 particles.
shapedfragments
separatedfrom onthe core
Subsequent
splittingof theof ringyields more–materials
08
10
2
10:30
morphology ofControl
single vectors
W/cm
resultsinsmall nanoparticles.
over irradiation conditionsatintensities
near
10
16:50
from metal powder
nanojoining of most of the nanoparticles. This nanojoining isSpeaker:
obtainedin Piquéboth liquid solution and inAlbertosolid statethinIgor
films
assembled from nanoparticles.
Speaker:
Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

16:50
–
17:10
17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

11:30
–
12:00

Dynamics of the Laser Decal
Transfer Process

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

Speaker: Hong-Bo Sun

June
08

Speaker: Niklas Pucher

Laser Assisted Bioprintingof Cells & Biomaterials:
Development(a)(b) of a DedicatedWorkstation, Experimental
3D Polymerization for
June
14
2
and JetFunctional
DevicesFigure1 (a) (Invited)
Photofragmentation 08
of Au nanoparticles at aResults
laser intensityof 10Formation
W/cm .
102
Modeling(b) Nanojoining of Au nanoparticles at 10 W/cm
.

Event

June
08

DATE

17:30
–
17:50

June
08

Speaker: Agnès Souquet

Nanojoined
Ag nanoparticles
are asexpected
12:00
Two-photon
polymerization
Juneto have numerous applications as probes for surface
17:50
Laser Induced ForwardJune–
methodfor spectroscopy
the fabricationofofDNA molecules.
08
enhanced
Raman–
Transfer: A Compact Machine08
12:20
large scale biomedical scaffold
18:10
applications[1] Y. Zhou, Microjoining and Nanojoining. Woodhead Publishing Ltd, Cambridge,
England, CRC Press, (2008).
Speaker: Dominik Riester
Speaker: Thomas Stichel[2] A. Hu, S. K. Panda, M. I. Khan, Y. Zhou, “Laser Welding, Microwelding,andof
Nanoprocessing”,
18:10 Nanowelding
Fabrication
Optical Inter- Chin. J. Lasers,
June
Vol. 36, 3149-3159(2009).
–
connects with two photon
08
12:20
Fabricationof 3D Protein
June

18:30
polymerization–
Microstructures
08
12:40[3] Y. Zhou, A. Hu, M. I. Khan, W. Wu, B. Tam, M. Yavuz, “Recent Progress in Micro and Nano-joining”, J. Phys. Conf. Ser. Vol.
Speaker:
Sascha Engelhardt
165, 0120121-5(2009)

Speaker: Klaus Stadlmann

171

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Ultraviolet
opticalLPM 2010:
Sessionlist near-fields of micro spheres
imprinted in phase change films

1
1
3D Processing
1
J. Siegel, P. Kühler1,3, D. Puerto, J. Solis1, F. J. García de Abajo1, and C.N. Afonso1, M.
2
2
Longo , C. Wiemer , and M. Fanciulli2, M. Mosbacher3, and P. Leiderer3

TIME

09:20
–
09:50

Event

DATE Serrano 121,
TIME28006-Madrid,
Event
1- Instituto de Optica, CSIC,
Spain
2- MDM National Laboratory, CNR-INFM, Via C. Olivetti 2, I-20041 Agrate Brianza, MI, Italy
Femtosecond
micromaJune Universitätsstraße
12:40
Developmentof 2D/3D
Micro3- Faculty of laser
Physics,
University of Konstanz,
10, 78457 Konstanz,
Germany

chining enables opto­fluidic
08–
machining Processes Basedsensing in lab-on-a-chip
13:00
on Nanosecond Laser SourcesMainauthoremail
address:j.siegel@io.cfmac.csic.es(Invited)for Industrial Manufacturing

DATE

June
08

Roberto Osellame in the vicinity of particles has been
Speaker:
José L. Ocaña
The localSpeaker:
field enhancement
identified
as a powerful means fornanopatterning applications [1]. We report an experimental method for directly imaging optical near09:50 of 3D
laser lithography
and producedJune
fieldsdielectric
micro spheres
upon illumination with UV light. Placed onto a thin–nanoimprint lithography:
08
crystalline
chalcogenide
film,
the
micro
spheresare irradiated by single ns excimer laser pulses at 193
10:10
versatile methods for the
nm wavelength,
givingrise
to a complex
2D intensity distribution, which is imprinted in the film as
micro- andnanofabricationofphotonic
structures
Biologicaland medical
amorphous
patterns.
We have modelled the experiment by rigorously
solving Maxwell'sequations fora sphereSpeaker:
supportedonalayeredplanarsubstrate,
obtaining
a
close
match
to
the
experimental
applications
Volker Schmidt
results. The recorded patterns feature multiple types of contrast, including optical [2], electrical [3],andtopographic[4].
the laser
short wavelength
our caseis optimum for imprinting nm-scale
10:10
Influenceof While
selective
June used inTIME
Event
DATE
–
melting
process
parametersonfor imaging
08
features,exploiting
the opticalcontrast
proves problematic because of the limited spatial
10:30
morphology of single vectors
OpticalBio- (topography,
Juneresolutionof optical
microscopy. We have exploited09:20
therefore
otherTrapping
contrastoftypes
frommetal powder– employing
molecules
andNanoparticles
08
electrical conductivity) to allow for high-resolution readout,
field
emissionscanning
electron
09:50
Based on Resonance andSpeaker:
Igor Yadroitsev
microscopy(SEM)and scanning probe microscopy, and report Surface
featuresPlasmonwith sizesof < 200 nm. It is(Invited)found that heat flow causes the features to fade out only slightly compared to the incident distribution.

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Speaker: Sönke Steenhusen

Speaker: Yasuyuki Tsuboi

09:40
–
10:00
10:00
–
10:20

3D Processing 2
TIME

Event

In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves
DATE

12:00

Mechanism study of glidingJune–movementof Phormidium
in08
Figure 1 : Amorphous imprints of the optical near-field of 193 nm light interactingwith silica spheres(1.61 μm diameter)
sittingnano-aquariums
integrated
on thin crystalline
Ge2Sb2Te5 films.
laser intensity10:40
recorded byfield-emission SEM,
showing a central hole
11:30
3D Polymerization
for(a) Imprint at high Junewith whendifferent
functionsandamorphous
fringepattern, well reproducedby the (b) calculation
scaling
the intensity to display the– a surrounding
Functional
Devices(Invited)
08
fabricatedbyfemtosecond
lowintensity
wings.
(c)
Imprint
at
low
laser
intensity
recordedbyfieldemissionSEM,showingacentral amorphous spot with
12:00
laser
a diameterof ≈ 200
Speaker:
Hong-Bo
Sunnm, somewhat larger than that of the (d) calculated intensity distribution (≈ 100 nm).
Speaker: Yasutaka Hanada

12:00
Two-photon
polymerization
asinfrared
June
Compared
to our previous
work using
femtosecond laser pulses [5], the use of UV ns pulses–
methodthe fabrication
08 downscaling of feature sizes as well as roughness of
is identified
to be forsuperior
in terms ofof simplicity,
10:40
Laser-controlled Injector for
June
12:20
large scale biomedical scaffold
Applications
08
the imprint.
This technique is directly applicable to any –type ofBiologicalscattering
particle (size, shape andapplications
material), thus providing a simple way of imaging its 11:00
near-field with highest resolution as well as
Speaker: Toshihiko Ooie
ThomasexploitingSpeaker:
the nearfieldStichel
for high-precision nanopatterning applications.
12:20
Fabrication
3D Protein
June[1]E. McLeodand C. B.ofArnold,
Subwavelength direct-write
nanopatterning using optically trapped microspheres, Nature–
08
Nanotec.
3,Microstructures
413-417, (2008).
12:40
[2]
J. Feinlieb, J. deNeufville, S. C. Moss, S. R. Ovshinsky, Rapid Reversible Light-Induced Crystallization of Amorphous
Speaker:
SaschaEngelhardt
Semiconductors,
Appl.
Phys.
Lett. 18, 254-257, (1971).
[3] S.R. Ovshinsky, Reversible electrical switching phenomena in disordered structures, Phys. Rev. Lett.21, 1450-1453, (1968).
[4] H. F. Hamann, M. O’Boyle, Y. C. Martin, M. Rooks, H. K. Wickramasinghe, Ultra-high-density phase-change data storageand memory, Nature Mater. 5, 383-387, (2006).
[5] P. Kühler, F. J. García de Abajo, J. Solis, M. Mosbacher, P. Leiderer, C.N. Afonso, and J. Siegel, Imprinting the Optical Near
Field of Microstructures with Nanometer Resolution, Small 5, 16, 1825-1829, (2009).

172

3D Processing 1
TIME

Event

DATE

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June
08

12:40
–
13:00

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

Speaker: Roberto Osellame

09:50
–
10:10

3D laser lithography andnanoimprint lithography:
versatile methods for the
micro- and nano fabrication ofphotonic structures

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

TIME

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Biological and medical
applications
Laser Decal Transfer of Nanomaterials

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

3D Processing 2
Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

DATE

June
08

Speaker: Alberto Piqué

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Event

16:30
–
16:50

17:10
–
17:30

Speaker: Sönke Steenhusen

TIME

June
08

Speaker: José L. Ocaña

Speaker: Volker Schmidt

10:10
–
10:30

DATE

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann173

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

LPM 2010: Session list
3D Processing 1
TIME

Event

DATE

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June
08

12:40
–
13:00

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

Speaker: Roberto Osellame

09:50
–
10:10

3D laser lithography andnanoimprint lithography:
versatile methods for the
micro- and nano fabrication ofphotonic structures

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

Biological and medical
applications
June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Speaker: Sönke Steenhusen

TIME

Event

09:20
–
09:50

Optical Trapping of Biomolecules and Nanoparticles
Based on Resonance andSurface Plasmon (Invited)

09:40
–
10:00

3D Processing 2
Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

174

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves

12:00
–
10:40

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

DATE

Speaker: Yasuyuki Tsuboi

10:00
–
10:20

TIME

June
08

Speaker: José L. Ocaña

Speaker: Volker Schmidt

10:10
–
10:30

DATE

June
08

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications
Speaker: Toshihiko Ooie

June
08

3D Processing 1
TIME

Event

DATE

TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

June
08

12:40
–
13:00

Development of 2D/3D Micromachining Processes Basedon Nanosecond Laser Sources
for Industrial Manufacturing

Speaker: Roberto Osellame

09:50
–
10:10

3D laser lithography andnanoimprint lithography:
versatile methods for the
micro- and nano fabrication ofphotonic structures

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

TIME

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Biological and medical
applications
Laser Decal Transfer of Nanomaterials

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

3D Processing 2
Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

DATE

June
08

Speaker: Alberto Piqué

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Event

16:30
–
16:50

17:10
–
17:30

Speaker: Sönke Steenhusen

TIME

June
08

Speaker: José L. Ocaña

Speaker: Volker Schmidt

10:10
–
10:30

DATE

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann

175

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

LPMTwo2010:dimensional
Session listperiodic nanostructures withenhanced band-gap emission on ZnO induced by
the interference
3D Processingof
1 three femtosecond laser beams
Tianqing Jia, Pingxin
Xiong,Xin Jia,and Zhizhan Xu
DATE
TIME
Event

TIME

Event

09:20
–
09:50

Femtosecond laser micromaJune
12:40
Development of 2D/3D Microtqjia@phy.ecnu.edu.cn
chining enables opto­fluidic
08–
machining Processes Basedsensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited)for Industrial Manufacturing

DATE

State Key Laboratory of Precision Spectroscopy, Department of Physics, East China Normal University, Shanghai 200062, P.R. China

June
08

Surface patterning of two-dimensional (2D) nanostructures has become increasingly important for1
Speaker: Roberto Osellame
José L. Ocaña
the applicationsof nanoelectronics, photonic crystals and super Speaker:
bright light-emitting
diodes (LEDs).
Dueefficiency
andandlow cost, holographic
lithography has become an important technology
09:50to the
3Dhighlaser
lithographyJune–nanoimprint
lithography:08
tofabricate
2D nanostructuresby adjusting the number of laser beams and their spatial
10:10
versatile
methods for the2
micro- andnano fabrication
Recently,nanoripplesofwith periods much shorter than the laser wavelengths werearrangements.
3
structures
medicalreported photonic
in semiconductors
and dielectrics after irradiation ofBiologicallinearly polarized andfemtosecond
laser.
applications
Speaker: Volker
Schmidt
These nanoripples
were
perpendicular to the laser polarization. If laser
was circularly polarized,
nanoparticles would be induced on the sample surface.

10:10
Influence of selective laser
June
TIME
Event
DATE
–
melting process parameters on
08
the fabricationof short-periodic nanostructures by femtosecond laser irradiation with
10:30Combining
morphology
of single vectors
09:20
Optical Trapping of BioJune
from metal
powder
HL technology,
we madea further investigation of the fabricationof regularand
andNanoparticles
uniform 2D–
molecules
08
09:50 between
Based onResonanceandnanostructures
on
ZnO
crystalbyincreasing
the
cross
angles
any
two
laser
beams.
The
Speaker: Igor Yadroitsev
Surface Plasmon (Invited)enhanced band-gap emission of these nanostructures and their applications in nano-LED and high
09:20
3D sub-diffraction-limit
June
Speaker: Yasuyuki Tsuboi
density
opticalstoragewere alsostudied (see08figure 1).
–
patterningof hybrid
polymers
09:50

(a)

with visible and infrared laser(b)pulses

09:40
–
10:00

Speaker: Sönke Steenhusen

10:00
–
10:20

(c)

3D Processing 2
(d)

TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)Speaker: Hong-Bo Sun

In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves
DATE

June
08

12:00
–
10:40

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

12:00
Two-photon polymerization as
June–method for the fabrication of08
10:40
Injector
June
Figureimagesof biomedical
the ablation areas
induced by the interferenceof threeLaser-controlledlaser beams. The insetsin (a), forand (c) show
12:20 1. SEM
large
scale
scaffold–
Biological Applications
08
applications
the polarization geometries of the three laser beams, respectively. The
left images are photoluminescences microscopes
11:00

corresponding to the left four images pumped by 800 nm femstosecond laser pulses.
Speaker: Toshihiko Ooie
Speaker: Thomas Stichel[1]
Z. H. NieFabricationand E. Kumacheva,“Patterning surfaces withfunctional polymers,” Nature Mater. 7, 277-290(2008).
12:20
of 3D Protein
June[2] –T. Kondo,
S.Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond
laser interference technique with diffractive beam splitter
Microstructures08
forfabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79 725-727(2001)
12:40[3] Y. Shimotsuma,
P. G. Kazansky,
Speaker: Sascha
Engelhardt J. R. Qiu and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort lightpulses,” Phys. Rev. Lett. 91, 247405 (2003).

176

Thin silicon wafers dicing using line-focusednanosecond-pulse 355nm q-switched laser
3D Processing 1 Rajesh S. Patel, James M. Bovatsek
Newport Corp., Spectra-Physics Lasers Division, 3635 Peterson Way, Santa Clara, CA 95054, USA
TIME

Event

DATE

TIME

Event

DATE

Raj.patel@newport.com

09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune–
chining enables opto­fluidic
08–
machining Processes Based08
The widespreadof thin silicon wafers in the semiconductor
is driving
and growing
09:50
sensing inuse
lab-on-a-chip
13:00
on industry
Nanosecond
Laserlarge
Sources
interest (Invited)in laser-based wafer dicing solutions. Especially,forasIndustrial
the wafers
become thinner, theManufacturing

advantage of laser dicing over saw in terms of both the speed and yield of the process is very
Speaker: Roberto Osellame
Speaker: José L. Ocaña
apparent
and remarkable. For dicing of thin silicon wafers, managing
the laser heat input during thedicing process
very important
thin wafers and narrow kerf width requirement. In
09:50
3D laserislithography
and due to increasingly
June
this
line-focused
beam laser-cutting08of thin (100 m and below) silicon is explored using– work,nanoimprint
lithography:
10:10
versatile methods
for20-W
the nanosecond-pulse 355-nm DPSS q-switched laser. Optimal process
Spectra-Physics®
Pulseo®
micro- and nano fabrication of
conditionsforcuttingvariousdepths in silicon are determined, with particular emphasis on fluence
photonic structures
Biological and medical
optimization for a narrow-kerf cutting process. By shaping the laser beam into a line focus, the optimal
Volker Schmidt
fluence Speaker:
for machining
the silicon can be achieved while at the sameapplications
time utilizing the full output power
TIME
Event
DATE
of the laser source. In addition, by adjusting the lengthof thelaser line focus, the absolute fastest
10:10
Influenceof
selective
laser
June
speed
for
various cutting depths is realized.08
Compared
to a circulara dramatic
improvementin
16:30
Laser beam,
Decal Transfer
of NanoJune–
melting process parameters on
processmorphology
efficiency isofobserved.
Also, the effect of laser –pulse width
on fastest cutting speed achieved
materials
08
10:30
single vectors
16:50
fromcutting
metal powderfor different
depths has been investigated.
Speaker: Alberto Piqué

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

16:50
–
17:10
17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)

12:00
–
12:20

DATE

June
08

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures
Speaker: Sascha Engelhardt

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

17:30
–
17:50

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

Dynamics of the Laser Decal
Transfer Process

June
08

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

17:50
–
18:10
18:10
–
18:30

Laser Induced Forward
Transfer: A Compact Machine

June
08

Speaker: Dominik Riester

Fabrication of Optical Interconnects with two photon
polymerization

June
08

Speaker: Klaus Stadlmann177

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Designof bioconjugatedgold nanoparticles by
LPM 2010:
Sessionlist
femtosecond-laser ablation

3D Processing 1
A. Barchanski, C. L. Sajti, S. Petersen, S. Barcikowski
TIME

Event

09:20
–
09:50

Femtosecond laser micromachining enables opto­fluidic
sensing in lab-on-a-chip(Invited)

DATE

TIME

Event

June

12:40

Development of 2D/3D Micro-

13:00

on Nanosecond Laser Sources
for Industrial Manufacturing

Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany

S.Barcikowski@lzh.de
08–
machining Processes Based

DATE

June
08

Enhancedby their surface plasmon resonance, gold nanoparticles(AuNP) exhibit photostable light
Speaker: Roberto Osellame
Speaker: José L. Ocaña
scattering properties under strong light illumination making them particularly useful in cell targeted
drug delivery,highresolutionandbioimaging and
09:50
3D laserlithography
Junemedical diagnostics when conjugated with functional–
nanoimprint
08 been found to induce low cytotoxicity bringing theentities.
In addition lithography:
gold nanoparticles have
10:10
versatile methods for the
possibility
of
using
the
gold
conjugatesforbiomedical
applications.
micro- and nano fabrication of
A popular
strategystructures
to improve the delivering efficiency of nanoparticles
acrosscell medical
membranes in aphotonic
Biologicalandreceptor- and energy-independent manner is the functionalisation withcell
penetrating
peptides (CPP)applications
Speaker: Volker Schmidt
like the Antennapedia
homeodomain derived Penetratin peptide.
The conjugation of AuNP and a CPP was achieved by femtosecond laser ablation in liquid. During
10:10
Influence of selective laser
June
TIME
Event
DATE
this
singlestepparameters
approach on
ultra-short– versatile,
melting
process
08 laser pulses generate pure gold nanoparticles with
10:30
of single vectors
electron morphology
accepting properties
from a bulk material. 09:20
Subsequently
surface
Opticalin-situ
Trappingof Bio-functionalisation
June
from
metal powder
takes place
betweenablated nanoparticles and the dissolved
biomolecules
containing
electron donor–
molecules andNanoparticles
08
09:50
Based
on Resonanceandmoities likeathioleordisulfide
function.
Withthebiomolecule
conjugationthenanoparticle
growthisSpeaker: Igor Yadroitsev
Plasmon (Invited)
quenched, leading to a narrow size distribution (Figure 1Surfacea). Considering
7 nm of average
nanoparticle
size, we observed conjugation% andestimated
32 coupled CPP
09:20
3D sub-diffraction-limit
Juneefficiency of 85Speaker:
Yasuyuki
Tsuboi–patterningof hybrid(Figure
polymers
molecules
per nanoparticle
1 b) when08ablating gold in 1 μM Penetratin solution.

09:50

with visible and infrared laser
pulses

09:40
–
10:00

Speaker: Sönke Steenhusen

10:00
–
10:20

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)Speaker: Hong-Bo Sun

In Vivo Writing using TwoPhoton-Polymerization

June
08

Speaker: Jan Torgersen

Femtosecond laser ablationof dentin: A characterisation
study

June
08

Speaker: Sandra Alves
DATE

June
08

12:00
–
10:40

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
with different functions
fabricated by femtosecond
laser

June
08

Speaker: Yasutaka Hanada

Two-photon polymerization as
June
(a)
(b)
method for the fabrication
of
08
10:40
Laser-controlled Injector for
Junelarge scale biomedical scaffold–
Biological Applications
08
applications
Figure 1. (a) Transmission electron microscopy image of Penetratin (1M)-conjugated gold nanoparticles, generated by laser
11:00

12:00
–
12:20

ablation in liquids. (b) Conjugation efficiency and number of Penetratinmolecules per nanoparticle.
Speaker: Toshihiko Ooie

Speaker: Thomas Stichel

In-situ conjugation of gold nanoparticles was also investigated by HIV-derived TAT CPP where an

12:20
Fabrication of 3D Protein
June
even
conjugation rate was achieved, probably
due to the smaller physical size of the molecule.
– higherMicrostructures08
12:40
Furthermore, we revealed that ablating with 100 J laser pulses in liquid flow of 450 mL/min
Speaker:
Sascha Engelhardt
significantly
enhancenanoparticle production rate by a factor of 5.5 compared to stationary liquid
ablation, owing to the prompt removal of nanoparticles from the ablation zone.
In respect to all these promising results we are next going to investigate the biomedical combatibilityof the AuNP-CPP conjugates in the cellular system.

178

Laser processing of thin films forphotovoltaic applications
3D Processing
1
A. Schoonderbeek, V. Schütz, O. Haupt, L. Richter, R. Kling
TIME

Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany, Tel.: +49 511 2788-0, www.lzh.de
Event

DATE

TIME

Event

DATE

Femtosecond laser Corresponding
micromaJune a.schoonderbeek@lzh.de
12:40
Development of 2D/3D MicroJune
author:chining enables opto­fluidic
08–
machining Processes Based08
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources
During thelast years, research & development (R&D) activities forin Industrial
the field ofManufacturing
photovoltaics have grown(Invited)

09:20
–
09:50

enormously. For many new concepts, like thin-film modules, organic solar cells, but also new wafer based cell
Roberto Osellame
Josémarket
L. Ocaña expansion, efficient anddesigns, Speaker:
high conversion
efficiencies have been shown. But, for a Speaker:
successful
durable products at low costs are necessary. To realize this, laser structuring of thin films is of high importance
09:50
3D laser lithography andJuneformentioned typesof solar cells. To develop– all thenanoimprint
lithography:
08 the required low-cost production technology, further R&D
in this field
is stillmethods
necessary.
10:10
versatile
forForthenew wafer based cell designs, the structuring of etching masks or dielectric
micro-damaging
and nanothefabrication
layers without
underlyingofmaterial has to be done. For thin-film solar cells, structuring is used forphotonic structures
Biologicalandmedicalmonolithical serial connection of cells in a module. Laser ablationis already used
for several
processes inapplicationsindustry,Speaker:
but challenges
according to improved quality, high processing speed, and new material combinations
Volker Schmidt
TIME
Event
DATE
are still enormous.
10:10
–
10:30

Influence of selective laser
melting process parameters on
morphology of single vectors
from metal powder

June
08

Speaker: Igor Yadroitsev

09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulses

June
08

16:30
–
16:50

Laser Decal Transfer of Nanomaterials

16:50
–
17:10

Dynamics of the Laser Decal
Transfer Process

17:10
–
17:30

Speaker: Sönke Steenhusen

Figure 1: Structuring of silicon-based thin film solar cell formonolithical serial connection of cells in a module

3D Processing 2

June
08

Speaker: Alberto Piqué

June
08

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Figure 2: Punctuated SiNx layer as etching barrier.
Speaker: Niklas Pucher

17:30

Laser Assisted Bioprinting

18:30

polymerization

June

Event
– usedoffor
Cells& cells,
Biomaterials:
This paper
discusses the structuring of severalDATE
thin film materials
solare.g. SiNx, SiO2, TCO, 08
and
17:50
Development of a Dedicatedphotoactive
materials.
The
focus
of
the
experiments
istoobtainan
optimaledge
quality
without
damaging
eitherWorkstation, Experimental
11:30
3D Polymerization forJunetheor the layer
below
the structured region.
Two importantResults
laser parameters
are wavelength and pulse
and Jet Formation– substrate
Functional
Devices(Invited)08
12:00
duration which determine the absorption of the laser radiation in theModelingprocessed material and the extent of heatSuninfluenceSpeaker:
on theHong-Bo
surrounding
material. Processing with several wavelengths (e.g. 355 nm, 532 nm, and 1064 nm)
Speaker: Agnès Souquet
and
pulse
durationsinthepicoand nanosecond
range are studied. The results obtained with the different laser
12:00
Two-photon polymerizationasJuneparameters
will beaccordingdebris,and damage
to heat conduction.June
The
17:50
Laser
Induceddue
Forward–methodforcompared
the fabricationof to ablation
08 threshold,
A Compact
Machine
08of
12:20
large
biomedical
quality oflaserscale
processing
will bescaffold
demonstrated by scanning –electronTransfer:and optical
microscopy
and an analysis
18:10
electricalapplications
characteristics e.g. resistance. Results from the structuringof Transparent Conductive Oxides, organic
Speaker: Dominik Riester
layers andmetallayersareacquiredwithdifferent
laser
types.
Additionally,
comparisons are made regarding the
Speaker: Thomas Stichel
achievable structuring quality for mass production relevant18:10
speeds around
1 m/s offorOpticalthin films
and 1-2 seconds
Fabrication
InterJune–
connects with two photon
08
12:20
Fabricationof 3Dbased
ProteinJune
processing
time for wafer
cells.
TIME

–
12:40

Microstructures

Speaker: Sascha Engelhardt

08

Speaker: Klaus Stadlmann179
11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Nanostructures
ITO thin film irradiated by different
LPM
2010: Sessionon
list
femtosecond laser wavelengths






3D Processing 1   


TIME
Event
DATE
TIME
Event
DATE



09:20
Femtosecond laser micromaJune
12:40
Development of 2D/3D MicroJune –chining enables opto­fluidic
08–
machining Processes Based
08

09:50

sensing
in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited)for Industrial Manufacturing

The Speaker:
fabrication
crystalline indium tin oxide (cITO) microstructuresand nanostructures on
Robertoof
Osellame
Speaker: José L. Ocaña
amorphous ITO (aITO) thin film by femtosecond laserinduced crystallization using a fiber laser with a
09:50
3D
laser
and duration June
repetition
rateof lithography
1 MHz, a pulseof ~400 fs, wavelength of 1064 nm and 532 nm were–nanoimprint
lithography:
08
presented.
The
procedure
consistsoftwo
steps:(1) irradiation of aITO thin film with focused laser
10:10
versatile methods for thebeams tomicroform andpredeterminedpatterns;
nano fabricationof (2) removal of unirradiated aITO film using an oxalic acidphotonic
etchant, leading
tostructures
the formation of the cITO pattern.
Biological and medical
The fabricated surface structures are observed using scanning applications
electron microscopy (SEM). The
Speaker: Volker Schmidt
morphology of the periodic structures under different experimental conditions such as laser
polarization,laser ofpower,
andlaserscanning speed
Figures 1 and 2 show the SEM
10:10
Influence
selective
June were investigated.
TIME
Event
DATE
imagesofmeltingthe lineprocess
patternsparameterswith linearly–
onpolarized
08 in a direction parallel to the scan direction with laser
10:30
morphology
of single
vectors
wavelength
532 nm and1064 nm,respectively. Figure 09:20
3 shows Opticalthat nanogratings
Trapping ofwith
Bio-period ~116nm
Junefrom metal powder
molecules
and Nanoparticles
08
and ~250nm are formed at laser wavelength 532nm and– 1064nm,
respectively.
The formation of the
09:50
Based on Resonance andnanogratingscanbe attributed to the actions of the secondorderharmonic
waves within the
Speaker:
Igor Yadroitsev
Surface Plasmon(Invited)
femtosecond laser beam, i.e. λ/2, where λ is the wavelength of the incident laser and  is the
09:20
3D
sub-diffraction-limit
Speaker:
Yasuyuki Tsuboi
refractiveindex
of the irradiated material. InJune
our experiments, themagnitude of the ITO thin film for–patterning of hybrid polymers
08
532
nm
and
1064
nm
laser
is
approximate2,
thenanograting
periodis
calculated
to be 133 nm and
09:50
with visible and infrared laser
09:40
In3.Vivo Writing using TwoJune
266 nm, which
is
close
to
the
experimental
data
shown
in
Figurepulses–Photon-Polymerization
08
10:00

Speaker: Sönke Steenhusen

10:00
–
10:20

3D Processing 2
Event

DATE

11:30
–
12:00

3D Polymerization for
June
Fig. 1 SEM image of induced structure at laser
Functional
Devices (Invited)08
wavelength 532 nm

Speaker: Hong-Bo Sun

Two-photon polymerization as
method for the fabrication oflarge scale biomedical scaffold
applications

June
08

Speaker: Thomas Stichel

12:20
–
12:40

Fabrication of 3D Protein
Microstructures

Femtosecond laser ablationof dentin: A characterisation
study

Mechanism study of gliding
movement of Phormidium in
nano-aquariums integrated
Fig. 2 SEMwith
imagedifferent
of inducedfunctions
structure at laser
wavelengthby
1064
nm
fabricatedfemtosecond
laser
12:00
–
10:40

June
08

Speaker: Yasutaka Hanada

10:40
–
11:00

Laser-controlled Injector for
Biological Applications
Speaker: Toshihiko Ooie

June
08

Speaker: Sascha Engelhardt

Fig. 3 The magnification image of (a) the area (A) of Fig. 1 and (b) area (B) of Fig. 2

180

June
08

Speaker: Sandra Alves

TIME

12:00
–
12:20

Speaker: Jan Torgersen

June
08

Development and optimization of an industrial laser
doping process for crystalline solar cells
3D
11, V. Prajapati2, S. Krantz3, A. Haeberle1, J.L. Hernández2, R.
M. Processing
Schulz-Ruhtenberg
Russell
TIME

09:20
–
09:50

4

1- Fraunhofer Institute for Laser Technology,
Steinbachstr.
15, 52074 Aachen, Germany
DATE
TIME
Event
DATE
2- IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Solland Solar Cells,
Bohr 10, 6422
Heerlen,Development
The Netherlandsof 2D/3D MicroFemtosecond laser3-micromaJune
12:40
June
4BP Solarenables
España S.A.U.,
Avda. de Bruselas08
36, P.E: Arroyo
28108 Alcobendas
chining
opto­fluidic– de la Vega,machining
Processes(Madrid),
Based Spain
08
Event

sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited) Main author email address: malte.schulz-ruhtenberg@ilt.fraunhofer.de
for Industrial Manufacturing

Speaker: Roberto Osellame
Speaker: José L. Ocaña
In the rapidly
growing field of renewable energies, photovoltaics
play an important role, though theirshare of3Dthe
current
energyandproduction is Junevery small. Lasers have proven to be a useful tool in the
09:50
laser
lithography
race
to nanoimprintincrease solar
cell efficiencies, manufacturing
throughputs and process reliability. Establishing–lithography:
08
10:10
versatile
methods
for ofthethe manufacturing chain is the major goal of the European fundedlasers as
an essential
partmicroand ("Nextnano fabricationofSolar Cell and Module Laser Processing Systems").
SOLASYS
project
Generation
photonic structures
Biological and medical
The creation of selective emitters is seen as an important step in improving existing production line
applications
cell efficiencies.
BySchmidt
adding only one additional processing step, laser
doping offers an attractive way
Speaker: Volker
TIME
Event
DATE
1]
of creating selective emitters cells whilst improving efficiency significantly by 0.3-1% absolute.[
10:10
Influenceof
selective
laser
June
Instead of using an intermediate doping concentration
to
meet
both
the
demand
for
good
short
16:30
Laser Decal Transfer of NanoJune–
melting process parameters on
08
wavelength
current ofcollection
and for low contact resistancethe doping concentration is increased–materials
08
10:30
morphology
single vectors
locally atthemetalpositionsof the front contacts. This can16:50
be achieved by laser doping the contact region
frompowderSpeaker: Alberto Piqué
before metal deposition. The selection of the proper laser parameters,such as wavelength, pulse
Speaker: Igor Yadroitsev
length and laser power, allows control of the depth16:50
of the doping
profileandthe Decal
amount of June
laser
Dynamics of the
Laser
2
]
induceddamage.
[–Transfer
Process
08
09:20
3D sub-diffraction-limit
June

–
09:50

patterning of hybrid polymers
with visible and infrared laser
pulses

08

17:10

17:10
–
17:30

Speaker: Sönke Steenhusen

3D Processing 2
TIME

Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)Speaker: Hong-Bo Sun

Speaker: Scott A. Mathews

Optimization of feature resolution, processing window &structuring time for the twophoton polymerization(2PP)
process by the use of novel
initiators

June
08

Speaker: Niklas Pucher

DATE

June
08

17:30
–
17:50

Laser Assisted Bioprintingof Cells & Biomaterials:
Development of a DedicatedWorkstation, Experimental
Results and Jet Formation
Modeling

June
08

Speaker: Agnès Souquet

12:00
Two-photon polymerization as
June
17:50
Induced– Figure
methodthe fabricationof08
1 Sheetfor
resistanceof Silicon wafers
after treatment
withdifferent Laser
lasers anddifferentForward
parameters. Initial sheetJune
Transfer:
Aincrease
Compact
Machine08
12:20
largeliescalebiomedical
resistances
between
55 and 100scaffold
Ohm/sq. A decrease indicates –increased
doping, an
hints
at emitter ablation.
18:10
applications
Speaker: Dominik Riester

In this study
severalSpeaker:
Thomas laser
Stichel sources covering all three main YAG wavelengths (1064, 532 and 355 nm)
have been used to increase the doping of standard solar
emitters. The
residual
Phosphor glass
18:10 cellFabricationof Optical
InterJune– promisingconnectswith two08
12:20
of 3D Protein
Junelayer isFabrication
used as dopant
source. The experiments
show
results,
withphoton
first full cell results
18:30stable
polymerization–
Microstructures
forthcoming.
The goal of this work is to find 08
a reliable andprocess that can be scaled up toward
12:40
industrial
applicability. The throughput of the laser doping process
is one of the main challenges.
Speaker: Klaus Stadlmann
Speaker: Sascha Engelhardt[1] B. S. Tjahjono, J. H. Guo, Z. Hameiri, L. Mai, A. Sugianto, S. Wang, and S. R. Wenham. High efficiency solar cell structures
through the use of laser doping. In 22nd European Photovoltaic Solar Energy Conference, 2007.
[2] M. Ametowobla, J.R. Koehler, A. Esturo-Breton, and J.H. Werner. Characterization of a laser doping process for crystalline
silicon solar cells. In 21st European Photovoltaic Solar Energy Conference, 2006.

181

11th International Symposium on Laser Precision Microfabrication
June 7-10, 2010 in Stuttgart, Germany

Femtosecond laser irradiation induced modification ofgold nanorods inside silicate glass

LPM 2010: Session list

1
1,2
2
1
1
H. Zeng 1,2, W. Yang
3D Processing
1 , C. Fan , G. Chen , M. Lancry , B. Poumellec

1- Institut de Chimie Moléculaire et des Matériaux d'Orsay (ICMMO), UMR CNRS-UPS 8182, Université de Paris Sud,
91405DATE
Orsay Cedex,TIME
France Event
Event
DATE
2- Key Laboratory for Ultrafine Materials of Ministry of Education, School of Materials Science and Engineering, East China
Universityof Science andTechnology,
ShanghaiDevelopment
200237, China of 2D/3D Micro09:20
Femtosecond laser
micromaJune
12:40
June
TIME

–
09:50

chining enables opto­
fluidic
08–
machining Processes Based*Corresponding
author:Huidan.Zeng@u-psud.fr
sensing in lab-on-a-chip
13:00
on Nanosecond Laser Sources(Invited)for Industrial Manufacturing

08

Noble metal-doped glass has offered the opportunity to manufacture promising new nonlinear
Roberto Osellame
Speaker:
José L. Ocaña
materials,Speaker:
nanodevices
and optical elements by manipulation of
the nanostructuralproperties due totheir strong surface plasmon resonance (SPR) and enhanced third-order nonlinear optical
09:50
3D laser[1]lithographyJunesusceptibilities.
Recently,andlaser-based techniquesleading to 3D photo-precipitation and further–
nanoimprint lithography:
08
modifications
of
the
metal
clusters
have
provedtobeavery powerful and flexible tool to control the
10:10
versatile methods for thesize, shape,density,
andfabrication
spatial distributionof the metal nanoparticles, and thus optimize the linear
microand nanoofphotonic
structures
Biological and medical
and nonlinear
opticalproperties of such materials [2-4].
In thispaper,
wereportonthefemtosecond
laser
inducedmodificationof gold nanorods insideapplications
Speaker: Volker Schmidt
Na2O-CaO-PbO-SiO2 glass matrix and their strong birefringence, related mechanism about shaping ofgold
is alsostudied.laser
DependenceJune
on glass matrix,
togetherwith laser parameters suchas
10:10nanorods
Influenceof selective
TIME
Event
DATE
– wavelength,
melting process
08 rate are investigated. Figure 1 shows the image inlaser
pulse parameters
duration or on
repetition
10:30
morphology
of single
vectors
Opticalbirefringence
Trapping of BioJune
crossedpolarizers
withrotation
the sample 45 degree,09:20
where strong
can be observed.
from metal powder– glass
molecules
andafterNanoparticles
08
Figure 2 shows the absorption spectra of gold rod doped
beforeandfemtosecond
laser
09:50
Based on Resonance andSpeaker:
Igor Yadroitsev
irradiation.
Absorption
band slight shift with the femtosecond laser
irradiation
means
that the changes
Surface
Plasmon(Invited)of aspect ratio of nanorods, it should result in the second-harmonic generation [4].
09:20
–
09:50

3D sub-diffraction-limit
patterning of hybrid polymers
with visible and infrared laser
pulsesJune
08

Speaker: Yasuyuki Tsuboi

Absorbance (a.u.)

3D Processing 2
Event

11:30
–
12:00

3D Polymerization for
Functional Devices (Invited)Speaker: Hong-Bo Sun

Figure 1 Image in crossed polarizers withrotation the sample 45 degree after 1K HZ
12:00 femtosecond
Two-photonaslaserpolymerization
irradiation.

In Vivo Writing using TwoPhoton-Polymerization

0.8

Speaker: Jan Torgersen

–
10:00

Speaker: Sönke Steenhusen

TIME

1.0 09:40

DATE

June
08

0.6

Femtosecond laser ablationof dentin: A characterisation
study

10:00
–
10:20

June
08

June
08

Speaker: Sandra Alves

0.4

with fs laser (B)
12:00irradiatedMechanism
study of gliding
irradiated with fs laser (A)– irradiatedmovement
0.2
with fs laser (C) of Phormidium in
10:40gold nanorod
nano-aquariums
integrated
doped sample
200

300

June
08

with different functions
400
500
600
700
800
fabricatedby femtosecond
Wavelength(nm)laser

Figure 2 Absorption spectra of gold rod doped
Speaker:
Yasutaka
Hanada laser
glass before
and after
femtosecond
irradiation.

June–
method for the fabrication of08
10:40
Injector
for ultra short
June
Permanentof gold
nanorods inside silicate
glassLaser-controlled
via irradiation withintense12:20
large modification
scale biomedical
scaffold–
Biological Applications
08
applications
laser pulses and strong birefringence can be observed,
and it is also depend strongly on the laser
11:00

processing
parameters and the characteristics of the irradiatedSpeaker:
glass.ToshihikoThis technique
can be applied
Ooie
Speaker: Thomas Stichel
to different 3D polarization and wavelength selective microdevices such as polarizers, filters, gratingsandnonlinear
media for photonic
nanodevices .
12:20promising
Fabricationof 3DopticalProteinJune[1] –U. Kreibig,
M. Vollmer: Optical Properties of Metal
Microstructures
08Clusters, Springer Series in Materials Science, Vol. 25 (Springer
Berlin),(12:40 1995)[2] X. Jiang,
J. Qiu,Sascha
H. Zeng,
C. Zhu and K. Hirao, Laser-controlled dissolution of gold nanoparticles in glass, Chem. Phys. Lett.
Speaker:Engelhardt
391, 91–94, (2004).
[3] A. Akin Unal, A. Stalmashonak, G. Seifert, and H. Graener, Ultrafast dynamics of silver nanoparticle shape transformation
studied by femtosecond pulse-pair irradiation, Phys. Review B 79, 115411 (2009).
[4] A. Podlipensky, J. Lange, G. Seifert, H. Graener, and I. Cravetchi, Second-harmonic generation from ellipsoidal silver
nanoparticles embedded in silica glass, Optics Letters 28, 716 ( 2003)

182

AUthors Index
Alves, Sandra

83

Jagdheesh, R.

120

Richardson, M.

47

Jia, Tianqing

176

Riester, Dominik

76

Audouard, Eric

108

John, Joachim

173

Rosenfeld, Arkadi

152

Barchanski, Annette

178

Kavcic, Blaz

158

Ruiz de la Cruz, A.

67

Barroi, Alexander

79

Kind, Heidrun

139

Sato, Tadatake

72

Baumert, Thomas

53

König, J.

127

Schille, Joerg

71

Beck, Rainer J.

115

Konov, V.I.

92

Schmidt, M.

110

Beckemper, Stefan

124

Konov, Vitaly I.

66

Schmidt, Michael

146

Berlich, Rene

130

Kraus, M.

48

Schmidt, Volker

82

Birnbaum, Andrew J.

54

Laakso, Petri

52

Schoonderbeek, Aart

179

Ashkenasi, David49, 129

Booth, Heather J

45

Larionov, M.

142

Schulz-Ruhtenberg, Malte

181

Charipar, Nicholas A.

116

Lemke, Andreas

135

Sentis, Marc

167

Chen, J.S

180

Löffler, Jochen

170

Serra, Pere57

Chen, X. Y.

104

Lopez, John

69

Shinonaga, Togo

56

Lorenz, Norbert

166

Siegel, Jan

172

Lu, Yongfeng

148

Silvennoinen, Martti

169
107

Cheng, Chung-Wei

128, 155

Cho, Sung-Hak

143

Cunha, Alexandre

140

Mann, Klaus

46

Sirutkaitis, Valdasdel Cerro, Daniel Arnaldo

96

Mansour, Nastaran

159

Skolski, Johann Z.P.

95

68

Soni, Ravi K.

113

del Val, J.

81

Mathews, Scott A.

Delmdahl, Ralph

103

Menéndez-Manjón, Ana

163

Souquet, Agnès

73

Doubenskaia, Maria126

Meunier, Michael

91

Stadlmann, Klaus

62

Dürr, U.

122

Miura, Kazuya

149

Stark, Michael

55

Ebert, Robby

138

Miyamoto, Isamu

Steenhusen, Sönke

88

Ehrhardt, Martin

154

Müller, Dirk

105

Stichel, Thomas

94

Eifel, S.

119

Nakamura, Daisuke

84

Stoian, Razvan

145

Engel, Andy

75

Nakamura, Susumu

58

Stolzenburg, C.

Engelhardt, Sascha

97

Nakashima, Seisuke

157

Sublemontier, Olivier

Exner, Horst

63

Nakata, Yoshiki

50

Südmeyer, T.

137

Farazila, Yusof

153

Obara, Minoru

147

Sun, Hong-Bo

90

Fujita, Masayuki

59

Ocaña, José L.

100, 162

Suttmann, Oliver99

44, 133

131
51, 161

Gedicke, Jens

151

Okoshi, Masayuki

87

Torgersen, Jan80

Gerhard, Christoph123

Ooie, Toshihiko89

Tsuboi, Yasuyuki

78

Grupp, Michael

144

Osellame, Roberto

77

Unger, Claudia

60

Haehnel, Falk

125

Ozeki, Yasuyuki

136

Utéza, Olivier

132

Hanada, Yasutaka

86

Paetzel, Rainer

114

Hasegawa, Satoshi

74

Patel, Rajesh S.

164, 175

He, Fei

121

Pauchard, Alexandre

Höfer, Marco106

Perrie, Walter

Holmes, Christopher

156

Piqué, Alberto

Hörstmann-Jungemann,

98

Maren

Valette, Stéphane

118

Veiko, Vadim P.

93

111

Wagener, Philipp

168

109

Walter, Jürgen

141

65

Watanabe, Akira

165

Poumellec, Bertrand

182

Weingarten, K.

134

Pucher, Niklas

70

Wintner, Ernst

102

Hu, Anming

171

Qiong, Xie

117

Witte, Reiner

150

Ihlemann, Jürgen

160

Raciukaitis, Gediminas

112

Yadroitsev, Igor

85

Ito, Yoshiro

61

Ramme, M.

64

Yakunin, Sergii

101183