About Tokyo Electron

Sustainability Management

Product Competitiveness

Customer Responsiveness

Higher Productivity

Management Foundation

TEL FOR GOOD

Data3Company Overview
Tokyo Electron operates worldwide as a leading company in semiconductor production equipment Industry. By providing the Best Products and Best Technical Service, we are aiming for medium- to long-term profit expansion andcontinuous corporate value enhancement. We are also the practicing our Corporate Philosophy by contributing to the development of a sustainable society through our business.

Number of Sites (As of April 1, 2022)
Head Office
Branch, Office (including Field Service), Sales OfficeTokyo Electron Korea
TEL Magnetic Solutions
Tokyo Electron Europe
TEL Solar Services

TEL Manufacturing and Engineering of America

Tokyo Electron (Shanghai)Tokyo Electron (Shanghai) Logistic CenterTokyo Electron (Kunshan)

TEL Technology Center, America
TEL Venture CapitalTokyo Electron Israel
Tokyo Electron India

Tokyo Electron U.S. Holdings
Tokyo Electron America

Tokyo Electron Taiwan
Tokyo Electron (Malaysia)
Tokyo Electron Singapore

Tokyo Electron
Technology Solutions

Tokyo Electron Miyagi

Tokyo Electron (World Headquarters)

Tokyo Electron Kyushu

Japan:
Overseas:
Worldwide total:

720
27

companies atcompanies at

2552
77

companies* at

Tokyo Electron FE
Tokyo Electron BP
Tokyo Electron Agency

sites
sites insites in17
18

countries and regions
countries and regions (consolidated)* Group companies in the process of being wound up are not shown on the map.

TOKYO ELECTRON SUSTAINABILITY REPORT 2022

About Tokyo Electron

Sustainability Management

Product Competitiveness

Customer Responsiveness

Higher Productivity

Management Foundation

TEL FOR GOOD

4

Data

History

1960s–1970s

1980s–1990s
Single Chip
Microprocessor

Mainframe
ComputerTransition of Typical Applicationsof Semiconductors

Founded as a technical specialized
trading company

2000s–2010s
Personal
Computer

Shifting to a full-scale
manufacturer

2020s–DigitalConsumer
Electronics

Mobile Phone

Acceleratingglobalization

Big DataAspiration toward innovationand new growth

1963

1978

1980

1990s

2006

2021

Tokyo Electron Laboratories, Inc. isestablished with capital from Tokyo
Broadcasting System, Inc.

Tokyo Electron Laboratories, Inc.
renamed Tokyo Electron Ltd.

Listed on the Second Section of theTokyo Stock Exchange

Enhanced the Group structure in Japanby, for example, establishing service andmanufacturing companies, and set up
overseas subsidiaries throughout theworld to globalize operations“TEL Values” formulated as code of conduct

Began publishingintegrated reports

1990
Tokyo Electron (TEL) marks a major
move into development and marketingof FPD production equipment

1984

1964

Listed on the First Section of theTokyo Stock ExchangeTokyo Electron Laboratories
acquires importing and selling rights
for diffusion furnace manufactured
by Thermco Products Corp. (U.S.)
and begins sales

1994
1999

TEL-Thermco Engineering Co., Ltd.
began domestic production ofdiffusion furnaces

Category of industry on the Tokyo
Stock Exchange First Sectionchanged from “Wholesale Trade” to“Electric Appliances”

1986
Export of semiconductor production
equipment begins

Sales by Region (Consolidated)(Unit: Billions(Unit:of yen)
Billions of yen)

China

Southeast
Southeast
Asia, andAsia,
Othersand Others(4.4%) (4.4%)
88.488.4

Europe Europe

566.2
566.2

606 606

North America
North America(13.4%) (13.4%)
268.0268.0

PR59-229

2022
Listed on the Prime Market of theTokyo Stock Exchange

Establishment of Tokyo Electron
Corporate Governance Guidelines

Formulated the new
Vision andMedium-termManagement Plan
“Technology Enabling Life”
formulated as corporate
message2019
Formulation of the Medium-termManagement Plan to further
enhance corporate value(Unit: People)(Unit: People)

JapanJapan

8,6618,661(55.4%) (55.4%)(3.9%)

2,002
2,002

Japan

(11.5%) (11.5%)
230.3230.3

TELは、東京エレクトロン株式会社の日本およびその他の国における登録商標または商標です。

North America
North America(5.4%) (5.4%)
107.9107.9

Japan(3.9%)

東京エレクトロン
統合報告書 2021

〒107-6325
東京都港区赤坂5-3-1 赤坂 Bizタワー
Tel.03-5561-7000
www.tel.co.jp

2015

Number of Employees by Region (Consolidated)

China(28.3%) (28.3%)

Europe Europe

Established “TELUNIVERSITY” to strengthen
human resource
development

Re-emergence as the New TEL(Vision, Medium-termManagement Plan formulated
and new Corporate Logo created)

Started direct sales and support
systems overseas

1968

2007

TOKYO ELECTRONINTEGRATEDREPORT 2021

表紙のイメージ“デジタル×グリーン”(12.8%) (12.8%)

billion yenbillion yen
2,003.8
2,003.8

peoplepeople
15,634
15,634(FY2022)(FY2022)(FY2022)(FY2022)
Korea Korea

Taiwan Taiwan(18.0%) (18.0%)
361.5361.5

381.1381.1(19.0%) (19.0%)

Asia

Asia

4,3654,365(27.9%) (27.9%)

Fractions smaller
Fractionsthansmaller
100 million
than 100
yenmillion
are truncated.
yen are truncated.

TOKYO ELECTRON SUSTAINABILITY REPORT 2022

About Tokyo Electron

Sustainability Management

Product Competitiveness

Customer Responsiveness

Higher Productivity

Management Foundation

TEL FOR GOOD

5Data

Semiconductor Manufacturing Process and Our Main ProductsWafer Process (Front-end)
Assembly and Test Process (Back-end)

Lithography(Photoresist coating, Development)

Deposition

Thermal Processing
SystemTELINDY PLUS TM

Single Wafer
Deposition System
Trias + TM

Silicon dioxide film

Atomic Layer Deposition
System
NT333 TM

Silicon nitride film

Cleaning

Etching

Coater/Developer
CLEAN TRACKTM LITHIUS ProTM Z

Plasma Etch
SystemTactras TM

Single Wafer Cleaning System
CELLESTATM -Plasma Etch
SystemEpisode TM UL

Completed Transistor
before Wiring

Photoresist

Wafer
Repetition

Oxide/Nitride film deposition

Photoresist coatingExposureDevelopment

Ashing/Cleaning

EtchingIsolation Formation/Gate Formation

Interconnect formation

Single Wafer
Deposition System
Trias TM

Gate Electrode

Inspection

Plasma Etch System
Tactras TM/Episode TM UL

Packaging/Inspection

Wafer Prober
PrecioTM XL

Wafer Bonder/Debonder
SynapseTM V/
Synapse TM Z Plus

Wafer/Dicing Frame Prober
WDF TM 12 DP +Completed
Semiconductor
Packaging

Wafer Bonding/Debonding

Inspection

Packaging/Assembly

Metal film
Metal film

Intermetal dielectric film

Contact Formation

Interconnect Formation

Wafer Probe Testing

Completed Integrated Circuit

Flat Panel Display (FPD) Production Equipment

FPD Coater/DeveloperExcelinerTM

FPD Plasma Etch/Ash System
Impressio TM

FPD Plasma Etch/Ash System
BetelexTM

Inkjet Printing System
for manufacturing OLED display
EliusTMTOKYO ELECTRON SUSTAINABILITY REPORT 2022

About Tokyo Electron

Sustainability Management

Product Competitiveness

Customer Responsiveness

Higher Productivity

Management Foundation

TEL FOR GOOD

Data

6

Products and Best Technical Service, and will strive to achieve short-, medium- and long-term profit expansion andcontinuous corporate value enhancement.

CEO’sMessageI would like to express my sincere gratitude to all stakeholders for your continued support and patronage.
Society has faced a series of increasingly serious challenges in recent years, including the prolonged spread of COVID-19,
abnormal weather and natural disasters due to climate change, human rights issues and conflicts between nations as wellas supply chain disruptions and cyber-attacks. These challenges affect industry, society and the lives of people.

Our pursuit of sustainability is the realization of this Vision and the practice of our Corporate Philosophy of "We
strive to contribute to the development of a dream-inspiring society through our leading-edge technologies andreliable service and support." We undertake a diverse range of company-wide measures through our business. As
the importance of semiconductors increases in society, we strive to strengthen our material issues, which are“Product Competitiveness” by continuously creating next-generation products with overwhelming added value,”Customer Responsiveness” to be the sole strategic partner using solid relationships of trust with customers,“Higher Productivity” to continually improve operational efficiency, in addition to “Management Foundation”
which supports our business activities at the foundational level.
With regard to the environment, we launched the E-COMPASS (Environmental Co-Creation by Material, Processand Subcomponent Solutions) environment-focused initiative in June 2021. We will work together with ourcustomers and partner companies to promote technological innovation and reduce the environmental impact ofsemiconductors throughout the entire supply chain from the following three main perspectives.
■

Meanwhile, the transition to a data-driven society is progressing at an unprecedented speed, including the spread ofIoT, AI and 5G, smarter industries, evolution of autonomous driving and use of metaverse that has been gatheringattention. For semiconductors, which are supporting the core of this shift, expectations for technological innovations
such as larger capacity, higher speed, higher reliability and lower power consumption are limitless. The semiconductor
market exceeded US$500 billion for the first time in 2021 and is expected to exceed US$1 trillion by 2030, more thandouble the current market. Along with this, the semiconductor production equipment market in which we operate isalso expected to expand even further.
Under such circumstances, we will apply our expertise as an equipment manufacturer developed through being anindustry leader and pursue technological innovation in semiconductors to contribute to the development of a
dream-inspiring society.
Tokyo Electron established a new Vision in June 2022 and formulated its new Medium-term Management Plan that
includes new financial targets as it strives for further growth. Under this plan, we will continue striving for the BestNew Vision“A company filled with dreams and vitality that contributes to technological innovation in semiconductors”
Tokyo Electron pursues technological innovation in semiconductors that supports the sustainable
development of the world.
We aim for medium- to long-term profit expansion and continuous corporate value enhancement byutilizing our expertise to continuously create high value-added leading-edge equipment andtechnical services.
Our corporate growth is enabled by people, and our employees both create and fulfill company
values. We work to realize this vision through engagement with our stakeholders.

■■

Pursuing higher performance and lower consumption in semiconductors
Achieving both the process performance and environmental performance of equipment
Reducing CO2 emissions in all business activities

In June 2022, in addition to our medium-term environmental goals for 2030, we have established the long-term
environmental goal of reducing greenhouse gas emissions to net zero by 2050 toward the realization of net zero.
As a leading company in environmental management, we will contribute to the preservation of the global
environment by actively promoting the reduction of the environmental impact of our products, plants and offices.
We also value the concept of human rights based on a strong sense of integrity. We are working to identify andcorrect human rights risks through the implementation of human rights due diligence within our Group as well assuppliers. We will incorporate the concept of respect for human rights into every aspect of our business activities,and strive to nurture a dynamic corporate culture where each person can realize their full potential.
To promote sustainability management in line with international frameworks, we signed the United Nations Global
Compact and are taking on the SDGs. We also joined the Responsible Business Alliance (RBA) and strive to complywith its code of conduct in our supply chain.
We will continue to promote sustainability-focused management
and contribute to addressing issues of industry and society as wellas their development to fulfill our mission and responsibilities,
aiming to remain a company that is loved and trusted by allstakeholders.

Toshiki KawaiYour continued support and patronage are verymuch appreciated by all of us at Tokyo Electron.

Representative Director, President & CEOTokyo Electron Limited
TOKYO ELECTRON SUSTAINABILITY REPORT 2022