With manufacturing locations in Yamanashi and Iwate prefectures, Tokyo Electron Technology Solutions is a leading manufacturer of semiconductor and display production equipment and has been engaging in deposition, etch system, test system, anddisplay system globally for 40 years since its establishment in 1983. We would like to express our sincere gratitude for thestrong support of the local community and our partners. We couldn’t be who we are today without them.
As the tide of digitalization accelerates throughout society, such as the spread of artificial intelligence (AI) and 5G, the digitaltransformation of industries, and the utilization of the metaverse, semiconductors have become essential to people’s lives asimportant infrastructure, the foundation of society. Semiconductor chips continue to evolve further, allowing for miniaturized
pattern designs, larger memory capacity, higher processing of logic circuits, improved device reliability, lower power consumption and more.
As the world's leading manufacturer of semiconductor and display production equipment, we aim to achieve both “digital” and“green” at the same time and to realize the world’s top-class smart factories in our pursuit of technological innovation. Further, we will work on cutting-edge, environmentally friendly technologies throughout our supply chain toward a sustainable
and prosperous future in which people and nature coexist, while placing top priority on the safety and health of the people
involved in our business as well as the protection of the global environment.
We sincerely ask for your continued warm support in the future.
Yuichiro Morozumi
President&Representative Director
Tokyo Electron Technology solutions Ltd.

CORPORATE DATA
●Tokyo Electron Technology Solutions Ltd.

Established : July 1, 1983: 4 billion yen
Capital● Fujii Office

Number of employees : 2,765 (as of April 1, 2023)● Hosaka Office2381-1 Kitagejo, Fujii-cho
Nirasaki City, Yamanashi
407-8511
Tel : +81-551-22-8611

650 Mitsuzawa,
Hosaka-cho, Nirasaki
City, Yamanashi 407-0192
Tel : +81-551-22-8611● Tohoku Office● Fuchu Office30-7 Sumiyoshi-cho
2-chome, Fuchu City,
Tokyo 183-8705
Tel : +81-42-333-8111

52 Matsunagane,
Iwayado, Esashi,
Oshu City, Iwate 023-1101
Tel : +81-197-35-5101

BUSINESS DESCRIPTION
Deposition System

Display Production Equipment

In the thermal processing and single-wafer deposition, wedevelop, design and manufacture batch andsingle-wafer systems.
Employing optimum deposition technique, thesystems can form a wide variety of thin films
such as dielectric, DRAM capacitor, metal andother high-quality films that are necessary forthe manufacturing of semiconductor devices.
Our products use oxidation, annealing, CVD,ALD, and PVD technologies, offering highperformance and excellent productivity.

We develop, design, and manufacture plasma etch/ash systems.
The system removes various thin films using etching gas inplasma state according to the integrated circuit pattern that isformed on an array board by the coater/developer.
We meet customer demands for better quality, lower cost andlarger screens with our excellent
technologies and products.

Betelex™

TELINDY PLUS™

Test System

Etch System

We develop, design, and manufacture wafer prober equipment.
A wafer prober will be connected with the tester and electricallytest the ICs by touching its electrodes with probe needles.
Next-generation test system Cellcia™ has multiple test cells,
enabling high-speed batch processing and significant costsavings for our customers.

We develop, design, and manufacture dry-cleaning systems.
In addition to conventional plasma etching technology, there
has been a growing need for gas chemical etching technology inrecent years on the back of demand for ultra-miniaturizationand high-performance processing technology. The multi-chamber
platform Certas LEAGA™ delivers highperformance and excellent productivity.

Cellcia™

Please visit www.tel.com for more information.

Certas LEAGA™

2023.09
PR3 61-0189