E HS Report

EHS Activity Goals and Results
The Tokyo Electron Group has set goals for EHS activities and is promoting those activities throughout the Group.

Goals and Results for EHS Activities in FY 2006
Goals for FY 2006

Results

Achievement
level

−

Started to identify energy consumption andthe amount of waste generated at field stations in Japan−Continue to obtain dataーEHS mutual assessments

Perform EHS mutual assessments at plants and offices

Conducted EHS mutual assessments at twosites and made corrections based on the findings○Increase the number of departments
to be monitored and expand the scopeof monitoring

P15○Achieve the TEL Roadmap indicators

Achieved for five products out of six 200mm
products

Energy-saving equipment

Achieved for two products and nearly achieved for three products out of six 300mm
products

Achieve the FY 2008 and FY 2011 goals

P18、19△Action item
Promotion of EHS activities indomestic and overseas plants
and offices

Plans and goals for FY 2007 onward

Page in report

EHS management

Product initiatives
for the environment

Environmental
activities ateach plant or officeMeasures to reduce the use ofregulated chemical substancesin equipment

Clarify the targeted chemicalsubstances and the policies

Included Pb, Cd, Cr6+, Hg, PBB, and PBDE insubstances to be eliminated○Achieve the TEL Roadmap indicators

P20

Lead-free products

Start to manufacture lead-free
production equipment in January 2006

Achieved the goal

○Achieve the TEL Roadmap indicators

P21

Saving energy

Reduce energy consumption(1% decrease in CO2 emissions per unit of sales, asbased on the Law Concerning
the Rational Use of Energy)

Achieved the goal by decreasing CO2 emissions per unit of sales by 8.1% from FY 2005
level

○Continue to reduce CO2 emissions perunit of sales by 1% annually
Start the calculation of energy consumed in transportation and check thelegal regulations and obligations imposed on shippers

P26

Waste reduction

Continue zero emission efforts
at manufacturing plants

Achieved zero emissions at all manufacturing
plants except one
The recycling rate of the entire Group was ashigh as that in FY 2005△

Continue zero emission efforts and examine reduction in the total amount ofwaste

P27−Identified the use and emissions (into the air,water, etc.) of chemical substances regulated
under the PRTR system−Continue to obtain data

P29

Reduce the number of accidents requiring four or moredays off work to zero and reduce other injuries accidents
by 30% from the FY 2005 level

The number and rate of accidents requiring
four or more days off decreased from the FY
2005 levels and the total number of injuries
accidents also decreased by 10%

×Continue to pursue the goal concerning injury accidents for FY 2006 andreduce the number of ergonomicallycaused accidents by 25% from FY 2006

Proper management ofchemical substances

Health and safety

Reduction in the number of
injury accidents

P30、31○ Achieved target △ Achieved 80% of target × Achieved less than 80% of target − Item for which no goal was set

We need to develop
components that areenvironment-friendly
Kengo Kuroiwa
Corporate Director
Tokyo Electron Limited

We were able to improve our environmental and safety
activities in FY 2006.
Customers are increasingly demanding us to implement
environmental and safety measures. Accordingly, as apremise for the sustainable growth of our business, we need togive more consideration to the environment and safety andconduct high-quality EHS activities.
To make our products more environment-friendly, wemust implement relevant measures on a long-term basis,from as early as the stage of developing components. At thedesign stage, we already have a system to check if the productis environment- and safety-conscious. The development andengineering staff are now more aware of the importance ofthese matters.
For safety, we design our products based on the safety

16 TOKYO ELECTRON Environmental and Social Report 2006

standards implemented in each country and in compliancewith the SEMI Safety Guidelines. In training employees insafety, we have introduced an educational and training program for team resource management, which includes working
at elevated places and on-site training. As in FY 2005, we
had no serious accidents in FY 2006, but will continue toanalyze the causes of past accidents and implement drastic
measures to prevent the recurrence of similar accidents,
while enhancing education and training for employees.
We revised the Credo and Principles on Environmental
Preservation in FY 2007 to replace the abstract expressions contained in it with more specific ones, thereby clarifying ourmeasures. Based on the credo and principles, we will create aroadmap and press forward with our efforts.
My Eco Life
Whenever I have time, I spend
it in the wild near my parents’house collecting edible wild
plants and mushrooms.