Independent Practitioner's Assurance

Corporate Profile
Corporate Profile（TRANSLATION）

Independent Practitioner’s Assurance Report
Mr. Toshiki Kawai,
Representative Director, President & CEO,Tokyo Electron Ltd.

June 28, 2021

Masahiko Sugiyama
Representative Director
Deloitte Tohmatsu Sustainability Co., Ltd.
3-2-3, Marunouchi, Chiyoda-ku, Tokyo

We have undertaken a limited assurance engagement of the CO2 Emissions from energy consumption in Japan, theWater consumption in Japan, Female managers percentage in Japan and Annual paid leave take-up rate in Japan
indicated withfor the year ended March 31, 2021 (the “Sustainability Information”) included in the “TOKYOELECTRON SUSTAINABILITY REPORT 2021” (the “Report”) of Tokyo Electron Ltd. (the “Company”).

Company name:Main business:

Tokyo Electron Limited

Semiconductor production equipment business,flat panel display (FPD) production equipment business

Address:
Akasaka Biz Tower
3-1 Akasaka 5-chome, Minato-ku, Tokyo
107-6325, Japan

Capital:Established:
November 11, 1963

14,668 (consolidated)
1,667 (non-consolidated)

Representative:

Number of locations:

Toshiki Kawai
Representative Director,President & CEO

Japan: 7 companies at 26 locations
Outside Japan: 21 companies at 50 locations in 17
countries and regions
Worldwide total: 28 companies at 76 locations in 18
countries and regions (consolidated)

The Company’s Responsibility
The Company is responsible for the preparation of the Sustainability Information in accordance with the calculation
and reporting standard adopted by the Company (indicated with the Sustainability Information included in theReport). CO2 quantification is subject to inherent uncertainty for reasons such as incomplete scientific knowledge
used to determine emissions factors and numerical data.
Our Independence and Quality Control
We have complied with the independence and other ethical requirements of the Code of Ethics for Professional
Accountants issued by the International Ethics Standards Board for Accountants, which is founded on fundamental
principles of integrity, objectivity, professional competence and due care, confidentiality and professional behavior.
We apply International Standard on Quality Control 1, Quality Control for Firms that Perform Audits and Reviews ofFinancial Statements, and Other Assurance and Related Services Engagements, and accordingly maintain acomprehensive system of quality control including documented policies and procedures regarding compliance withethical requirements, professional standards and applicable legal and regulatory requirements.
Our Responsibility
Our responsibility is to express a limited assurance conclusion on the Sustainability Information based on theprocedures we have performed and the evidence we have obtained. We conducted our limited assurance engagementin accordance with the International Standard on Assurance Engagements (“ISAE”) 3000, Assurance Engagements
Other than Audits or Reviews of Historical Financial Information, issued by the International Auditing and AssuranceStandards Board (“IAASB”), ISAE 3410, Assurance Engagements on Greenhouse Gas Statements, issued by theIAASB and the Practical Guideline for the Assurance of Sustainability Information, issued by the Japanese
Association of Assurance Organizations for Sustainability Information.
The procedures we performed were based on our professional judgment and included inquiries, observation ofprocesses performed, inspection of documents, analytical procedures, evaluating the appropriateness of quantification
methods and reporting policies, and agreeing or reconciling with underlying records. These procedures also included
the following:
・ Evaluating whether the Company’s methods for estimates are appropriate and had been consistently applied.
However, our procedures did not include testing the data on which the estimates are based or reperforming theestimates.
・ Performing interviews of responsible persons and inspecting documentary evidence to assess the completenessof the data, data collection methods, source data and relevant assumptions applicable to the sites.

54,961 million yen

Number of employees:(as of April 1, 2021)

Financial Data
Earnings Release:
URL

www.tel.com/ir/library/report/

Securities Report:
URL

www.tel.co.jp/ir/library/fs/

Integrated Report/Annual Report:
URL

www.tel.com/ir/library/ar/

The procedures performed in a limited assurance engagement vary in nature and timing from, and are less in extent
than for, a reasonable assurance engagement. Consequently, the level of assurance obtained in a limited assurance
engagement is substantially lower than the assurance that would have been obtained had we performed a reasonableassurance engagement.
Limited Assurance Conclusion
Based on the procedures we have performed and the evidence we have obtained, nothing has come to our attention
that causes us to believe that the Sustainability Information is not prepared, in all material respects, in accordance withthe calculation and reporting standard adopted by the Company.
The above represents a translation, for convenience only, of the original Independent Practitioner’s Assurance report issued inthe Japanese language.
Member ofDeloitte Touche Tohmatsu Limited63

TOKYO ELECTRON SUSTAINABILITY REPORT 202 1

TOKYO ELECTRON SUSTAINABILITY REPORT 202 164