# Recrystallisation of thin 4H-SiC films deposed by PVD

Elise Usureau, Enora Marion Vuillermet, Mihai Lazar, Aurore Andrieux,
Alexandre Jacquemot

► To cite this version:

Elise Usureau, Enora Marion Vuillermet, Mihai Lazar, Aurore Andrieux, Alexandre Jacquemot. Recrystallisation of thin 4H-SiC films deposed by PVD. 19th International Conference on Silicon Carbide and Related Materials (ICSCRM 2022), Sep 2022, Davos, Switzerland. . hal-04171214

HAL Id: hal-04171214

https://hal.science/hal-04171214

Submitted on 26 Jul 2023

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