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66. A. He, X. Guo, K. Wang, Y. Zhang, and Y. Su, "Low loss, large bandwidth fiber-chip edge couplers based on silicon-on-insulator platform," J. Light. Technol. 38, 4780-4786 (2020).

67. A. Sánchez-Postigo, R. Halir, J. G. Wangüemert-Pérez, A. Ortega-Moñux, S. Wang, M. Vachon, J. H. Schmid, D.-X. Xu, P. Cheben, and Í. Molina-Fernández, "Breaking the coupling efficiency-bandwidth trade-off in surface grating couplers using zero-order radiation," Laser & Photonics Rev. 15, 2000542 (2021).

68. D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, B. Lamontagne, S. Wang, J. Lapointe, R. Halir, A. Ortega-Moñux, S. Janz et al., "Subwavelength index engineered surface grating coupler with sub-decibel efficiency for 220-nm silicon-on-insulator waveguides," Opt. express 23, 22628-22635 (2015).

69. D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, "High-efficiency single etch step apodized surface grating coupler using subwavelength structure," Laser & Photonics Rev. 8, L93-L97 (2014).

70. D. Fowler, P. Grosse, F. Gays, B. Szelag, C. Baudot, N. Vuillet, J. Planchot, and F. Boeuf, "Fiber grating coupler development for Si-photonics process design kits at CEA-LETI," in *Smart Photonic and Optoelectronic Integrated Circuits XXI*, vol. 10922 S. He and E.-H. Lee, eds., International Society for Optics and Photonics (SPIE, 2019), p. 1092205.

71. M. Fan, M. A. Popović, and F. X. Kärtner, "High directivity vertical fiber-to-chip coupler with anisotropically radiating grating teeth," in *Conference on Lasers and Electro-Optics*, (Optica Publishing Group, 2007), p. CTuDD3.

72. D. Benedikovic, C. Alonso-Ramos, D. Pérez-Galacho, S. Guerber, V. Vakarin, G. Marcaud, X. Le Roux, E. Cassan, D. Marris-Morini, P. Cheben et al., "L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-uv lithography," Opt. Lett. 42, 3439-3442 (2017).

73. C. Alonso-Ramos, P. Cheben, A. Ortega-Moñux, J. Schmid, D.-X. Xu, and I. Molina-Fernández, "Fiber-chip grating coupler based on interleaved trenches with directionality exceeding 95%," Opt. Lett. 39, 5351-5354 (2014).

74. D. Benedikovic, C. Alonso-Ramos, S. Guerber, X. L. Roux, P. Cheben, C. Dupré, B. Szelag, D. Fowler, Éric Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, and L. Vivien, "Sub-decibel silicon grating couplers based on l-shaped waveguides and engineered subwavelength metamaterials," Opt. Express 27, 26239-26250 (2019).

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76. Y. Wang, W. Shi, X. Wang, Z. Lu, M. Caverley, R. Bojko, L. Chrostowski, and N. A. Jaeger, "Design of broadband subwavelength grating couplers with low back reflection," Opt. letters 40, 4647-4650 (2015).

77. Q. Zhong, V. Veerasubramanian, Y. Wang, W. Shi, D. Patel, S. Ghosh, A. Samani, L. Chrostowski, R. Bojko, and D. V. Plant, "Focusing-curved subwavelength grating couplers for ultra-broadband silicon photonics optical interfaces," Opt. express 22, 18224-18231 (2014).

78. A. Sánchez-Postigo, J. G. Wangüemert-Pérez, J. M. Luque-González, Í. Molina-Fernández, P. Cheben, C. A. Alonso-Ramos, R. Halir, J. H. Schmid, and A. Ortega-Moñux, "Broadband fiber-chip zero-order surface grating coupler with 0.4 db efficiency," Opt. Lett. 41, 3013-3016 (2016).

79. X. Chen and H. K. Tsang, "Polarization-independent grating couplers for silicon-on-insulator nanophotonic waveguides," Opt. letters 36, 796-798 (2011).

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81. D. Melati, Y. Grinberg, M. Kamandar Dezfouli, S. Janz, P. Cheben, J. H. Schmid, A. Sánchez-Postigo, and D.-X. Xu, "Mapping the global design space of nanophotonic components using machine learning pattern recognition," Nat. communications 10, 4775 (2019).

82. M. K. Dezfouli, Y. Grinberg, D. Melati, P. Cheben, J. H. Schmid, A. Sánchez-Postigo, A. Ortega-Moñux, G. Wangüemert-Pérez, R. Cheriton, S. Janz et al., "Perfectly vertical surface grating couplers using subwavelength engineering for increased feature sizes," Opt. Lett. 45, 3701-3704 (2020).

83. Z. Zhang, X. Chen, Q. Cheng, A. Z. Khokhar, X. Yan, B. Huang, H. Chen, H. Liu, H. Li, D. J. Thomson, and G. T. Reed, "High-efficiency apodized bidirectional grating coupler for perfectly vertical coupling," Opt. Lett. 44, 5081-5084 (2019).

84. W. Zhou and H. K. Tsang, "Dual-wavelength-band subwavelength grating coupler operating in the near infrared and extended shortwave infrared," Opt. Lett. 44, 3621-3624 (2019).

85. J. Kang, Z. Cheng, W. Zhou, T.-H. Xiao, K.-L. Gopalakrisna, M. Takenaka, H. K. Tsang, and K. Goda, "Focusing subwavelength grating coupler for mid-infrared suspended membrane germanium waveguides," Opt. Lett. 42, 2094-2097 (2017).

86. A. Sánchez-Postigo, A. O.-M. nux, D. Pereira-Martín, I. Molina-Fernández, R. Halir, P. Cheben, J. S. Penadés, M. Nedeljkovic, G. Z. Mashanovich, and J. G. Wangüemert-Pérez, "Design of a suspended germanium micro-antenna for efficient fiber-chip coupling in the long-wavelength mid-infrared range," Opt. Express 27, 22302-22315 (2019).

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91. S. Khajavi, D. Melati, P. Cheben, J. H. Schmid, Q. Liu, D. X. Xu, and W. N. Ye, "Compact and highly-efficient broadband surface grating antenna on a silicon platform," Opt. Express 29, 7003-7014 (2021).

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105. J. M. Luque-González, A. Herrero-Bermello, A. Ortega-Moñux, Í. Molina-Fernández, A. V. Velasco, P. Cheben, J. H. Schmid, S. Wang, and R. Halir, "Tilted subwavelength gratings: controlling anisotropy in metamaterial nanophotonic waveguides," Opt. letters 43, 4691-4694 (2018).

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106. J. M. Luque-González, A. Herrero-Bermello, A. Ortega-Moñux, M. Sánchez-Rodríguez, A. V. Velasco, J. H. Schmid, P. Cheben, Í. Molina-Fernández, and R. Halir, "Polarization splitting directional coupler using tilted subwavelength gratings," Opt. Lett. 45, 3398-3401 (2020).

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107. C. Deng, M. Lu, Y. Sun, L. Huang, D. Wang, G. Hu, R. Zhang, B. Yun, and Y. Cui, "Broadband and compact polarization beam splitter in LNOI hetero-anisotropic metamaterials," Opt. Express 29, 11627-11634 (2021).

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