# Influence of the Bulb Geometry and Electrical Supply Parameters on the UV Emission of DBD Excimer Lamps

Arnold Wiesner, Rafael Diez, Hubert Piquet

► To cite this version:

Arnold Wiesner, Rafael Diez, Hubert Piquet. Influence of the Bulb Geometry and Electrical Supply Parameters on the UV Emission of DBD Excimer Lamps. Plasma Chemistry and Plasma Processing, 2024, 44, p. 1605-1623. 10.1007/s11090-024-10480-w. hal-04628867

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# Influence of the Bulb Geometry and Electrical Supply Parameters on the UV Emission of DBD Excimer Lamps

Arnold Wiesner<fnref n="1" />,<fnref n="2" /> ID · Rafael Diez<fnref n="1" /> ID · Hubert Piquet<fnref n="3" /> ID

Received: 23 February 2024 / Accepted: 13 May 2024 / Published online: 28 June 2024
© The Author(s) 2024

## Abstract

The aim of this article is to improve the performance of DBD excimer lamps systems for UV production. Within this framework, our approach considers two distinct directions: the geometric dimensions of the double-barrier lamp bulb and the characteristics of the power supply. To explore these directions, a sampling of 19 bulbs of different geometries is considered, and a specially designed power supply is used, capable of controlling the shape (duration and magnitude) and frequency of current pulses injected into the plasma. A dedicated test bench, including a supervisory program that drives the power supply and collects system performance data, is used to perform parametric sweeps and guarantee measurement repeatability: the set of electrical parameters is fully explored for each lamp, and each experiment is characterized by UV emission performance and electrical generator operating conditions. Multiquadric response surfaces, used to format the results of this multi-variable exploration, reveal the most efficient directions for system optimization: increasing gas volume and, at a given operating frequency, providing the shortest possible current pulses with high amplitude can increase both UV emission and conversion efficiency.

**Keywords** Dielectric barrier discharge (DBD) · Excimer lamps · Ultraviolet (UV) · Plasma · Power supply · Power converter · Frequency · Discharge time · Current intensity · Dielectric thickness

<figure><img src="image_3.png" /></figure>

Rafael Diez
rdiez@javeriana.edu.co

Arnold Wiesner
awiesner@javeriana.edu.co

Hubert Piquet
piquet@laplace.univ-tlse.fr

<footnote n="1">¹ Pontificia Universidad Javeriana, Bogotá, Colombia</footnote>

<footnote n="2">² Universidad Santo Tomás, Tunja, Colombia</footnote>

<footnote n="3">³ LAPLACE, Université de Toulouse, CNRS, INPT, UPS, Toulouse, France</footnote>
**Introduction**

Dielectric Barrier Discharges (DBD) based systems are present in our life through numerous applications, such as ozone production [1], surface treatment [2], air depollution [3], CO₂ lasers [4]. All these systems require a high-voltage power supply, which characteristics have a great influence on the results of the process, as will be explored in the present work dedicated to the excimer lamps.

Excimer lamps are a mercury-free source of ultraviolet radiation, making them especially environment friendly. Excited dimers (or excimers) or excited complexes (exciplex) are created by a non-equilibrium plasma at low temperature, based on a Dielectric Barrier discharge (DBD). When these excited species return to their ground state, the excess of energy is converted into UV light [5, 6], at specific wavelength depending on the gas mixture.

Figure 1 presents the key features of the bulbs; the gas, confined between the two sealed coaxial dielectric barriers (quartz), is composed of a mixture of a rare gas and a halogen. Selected mixtures [7–9] allow to produce specific wavelengths, adapted to the needs of various processes [10–12]. The electrode disposed inside the inner tube is generally a metallic foil, while the second, outside the outer tube, is usually a semitransparent metallic mesh to allow the radiation to get out of the bulb. These lamps present other specific features such as high lifetime, thanks to the absence of direct contact between the metallic electrodes and the gas, where the excited species are produced [7, 11, 13, 14].

Among the opportunities to improve the UV emission of excimer lamps systems, different studies have explored the influence of the physical parameters of the DBD, such as the gas pressure, and discharge geometry [15–21]. In [17], the efficiency of a Xe lamp is improved injecting high power pulses of short duration with a square voltage generator. The reported short rise time of the voltage pulses was possible thanks to the increase in the gas pressure, leading to a fast conversion of the Xe* excited states into UV emitting Xe*2 dimers. In [22], the increase of the gas pressure induces an important growth of the photonic current density, leading to a better UV emission. In [23], the efficiency of a KrCl excimer lamps is also increased while the pressure rises. However, for values above 200 mbar the efficiency decreases again. This is attributed to the intensification of the dissociation and quenching rates of excimers in high density regime and is confirmed in [24].

Other authors have studied the influence of the power supply on the process, as voltage-mode or current-mode, continuous or burst, current intensity, discharge duration and operating frequency, among others [25–29]. In [30], it is mentioned that the precise adjustment of the amplitude and rise time of the voltage pulses can promote the generation of high energy electrons that produce the UV output in these lamps. Meaning that an optimum dv/dt must be looked for. Owing to the capacitive behavior of the DBD, this can be done by changing

<figure><img src="image_4.png" /><figcaption>**Fig. 1** Geometric parameters of the excimer lamp</figcaption></figure>
the amplitude of the signal of a current-mode power supply. In [22] is mentioned that theoretically, higher voltage across the DBD produces a significant rise in the deposited energy which is then converted into UV. In [31], it is shown that the operating frequency changes the discharge regime of excimer lamps affecting the lamp efficiency.

In [32], it is affirmed that when the gas mixture contains an electronegative gas (e.g. Cl), a higher value of the pulsed current benefits a filamentary regime while small values produce a more diffuse appearance. This change of regime can also be reproduced by varying the frequency, with filaments for higher frequencies and glow-like appearance for lower frequencies. This phenomenon is attributed to residual charges (ions) from previous discharge that do not disappear before the next pulse arrives producing a memory effect and benefiting the filamentary regime. The efficiency of the glow-like regime seems to be higher than the filamentary one. Nevertheless, comparison is made with two different ranges of power. Accordingly, the possibility to carry on experiments with the same power levels at different frequencies (different time between discharges) and different current amplitudes is of interest.

Results in [23] are also in accordance with terms of the relaxation time, when comparing three different supply methods: sinusoidal, rectangular, and pulsed, increasing the efficiency in the lamps with the latter, that presents a higher relaxation time. Within these studies, it has been found that different operating points with the same value of electrical power yield to different values of UV radiation [33], confirming the influence of the electrical parameters in this type of application and the need for further review.

Therefore, in this paper an experimental study is proposed to characterize a set of excimer lamps, all of them differing with variations in the geometric parameters shown in Fig. 1 (a, b, and T, respectively inner radius of the inner pipe, outer radius of the outer tube and wall thickness). The lamps are fed using a flexible and programmable power supply which electrical parameters can be varied automatically: performances are compared in terms of the electric power to UV energy conversion.

## Materials and methods

The test bench used to characterize the lamps is shown in Fig. 2. The tested bulb is inside a transparent Plexiglas container to protect the operators from UV rays. The voltage and current waveforms acquired through the oscilloscope-probes provide electrical measurements such as operating frequency, electrical power, peak voltage, peak current, etc. The UV power and UV waveform are obtained by two different sensors. The distance between the external wall of the bulb and the sensors is adjusted and kept constant.

This research uses an automated bench that sweeps the electrical parameters of an adjustable current-mode power supply for each one of nineteen XeCl excimer lamps (308 nm) that have different geometries. This system also takes the UV and electrical measurements that will be analyzed to draw the conclusions. The present work follows the next steps that will be detailed in Sects. 1 to 4 of this chapter.

1. Lamp characterization.

2. Power supply characteristics.

3. Automated test bench.
<figure><img src="image_5.png" /><figcaption>Fig. 2 Diagram of the test bench</figcaption></figure>

## 4. Definition of OP.

### DBD lamp Characteristics and Equivalent Circuit

The characterization of each excimer lamp is achieved through the estimations of the parameters of its classical Manley electrical model [34, 35]. This simple electric model is shown in Fig. 3:

* The electrical behavior of the dielectric barriers is modeled by a capacitance $C_d$;

* The gas is modeled whether with a capacitance $C_g$ if there is no discharge in the gas, or with a gas conductance which controls the gas voltage if the discharge is alighted. In this state, the gas voltage is considered almost constant, equal to the $V_{th}$ threshold voltage.

These 3 parameters ($C_d$, $C_g$, $V_{th}$) depend on the geometry of the lamp; good estimations of $C_d$ and $C_g$ can be found with the equations for a cylindrical capacitor [36], using:

* Length of the electrodes (l);

* Thickness of the dielectric barriers (T);

* Inner (a) and outer (b) radii of the coaxial barriers.

$V_{th}$ can be found by means of the Paschen’s law [5] using the value of the gas gap (b-a) and the features of the gas mixture:

* Mixture composition;

* Gas pressure.
<figure><img src="image_6.png" /><figcaption>Fig. 3 Electrical model excimer lamps</figcaption></figure>
In this work the mixture composition (Xe-Cl), the gas pressure (~16.4 kPa) and the length of the electrodes (30 cm), are the same for all the lamps.

## Power Supply Characteristics

The power supply used to characterize the set of lamps is a current-controlled static converter, that can deliver a current rectangular waveform ($i_{DBD}$).

The electrical parameters presented on Fig. 4, which define the current waveform, can be varied in the following ranges:

* Current pulses magnitude (I): [0.1 A, 1.4 A, step $\Delta I$ 0,2 A]

* Output frequency (f): [50 kHz, 200 kHz, step $\Delta f$ 5 kHz]

* Discharge duration ($\delta$): [0.07 $\mu$s, 6.32 $\mu$s, step $\Delta\delta = 5\%/2f$]

These ranges have been determined based on initial tests observing the steps in the electrical parameters that impact the UV emission, and time limitation to perform the sweep of the entire set of lamps.

Note that due to the charging process of the gas capacitance $C_g$ to attain the gas breakdown, there is a minor time difference between the rising edge of $I_{DBD}$ and $I_{gas}$. For this reason, the system experimentally checks, using the measured waveforms, and adjusts the value of the discharge duration ($\delta$) that is the $I_{gas}$ current pulse width.

The electrical power delivered to the lamp can be adjusted with these three independent parameters: current intensity (I), discharge duration ($\delta$), and frequency (f), as highlighted in Fig. 4. Instantaneous power is obtained by multiplying the current (red) and voltage (blue) waveforms on the gas conductance. The other two elements $C_d$ and $C_g$ are non-dissipative; therefore, the electric power of the gas conductance (averaged value computed along the operating period) is equal to the electric power delivered to the DBD. Once the waveform of the electric power on the gas is obtained (yellow), the arithmetic average is calculated, and results are shown in Eq. 1 [37].

$$P = 2 \cdot V_{th} \cdot I \cdot f \cdot \delta \quad (1)$$

Since the value of $V_{th}$ changes for each bulb by variation of the geometrical parameters shown in Fig. 1, it implies that a given current waveform imposed by the power supply does not deliver the same power to each lamp [5, 38]. The design process, implementation, and experimental testing setup of this static converter are detailed in [36].

## Automated test Bench

The sweep of operating conditions is done on each lamp to identify the influence that the electrical parameters have on the UV generation and whether this UV radiation varies from one lamp to other. Figure 5 shows the architecture of the characterization system that can sweep, automatically, the different electrical parameters of the power stage. This automatic system also acquires the electrical and UV measurements for each operating point (OP). The system is composed by two principal stages: first, the power stage, whose converter is able to supply the 19 different lamps, and second, the high-level control and acquisition stage,
<figure><img src="image_7.png" /><figcaption>**Fig. 4** Ideal waveforms of the current, voltage, and electric power on the tested excimer lamps</figcaption></figure>

<figure><img src="image_8.png" /><figcaption>**Fig. 5** Architecture of the characterization system</figcaption></figure>

guaranteeing reproducibility and a fair comparison among the different lamps, this stage is detailed in [36].

To control the power and acquisition stages, a user interface was created: this software is designed to sweep a file of pre-programmed OPs, with the setpoints for the varied electrical parameters (high level control, as shown on Fig. 5, which appear within the blue rectangle of Fig. 6). This interface also receives the number of repetitions for each OP and the duration of the pause time between each OP, aimed at guaranteeing a similar initial temperature
<figure><img src="image_9.png" /><figcaption>Fig. 6 User interface of the test bench</figcaption></figure>
for each OP. This configuration part is shown in the green rectangle in Fig. 6. Measurements that are being obtained in real time are displayed in the orange rectangle in Fig. 6.

The tasks that the automation software performs can be briefly described in the diagram shown in Fig. 7. This process makes possible to validate that the measured parameters correspond to the setpoints for each OP. Also, to acquire enough data for the characterization of the lamps.

After the user introduces the information necessary to start the sweep, including the file with the OPs, the sequential steps that are followed for each OP are as follows:

* The set point is sent to the power stage, and this generates the current rectangular wave-form indicated to supply the excimer lamp.

* The software verifies and control the electrical parameters of rectangular current wave-form, to ensure that they are in accordance with the desired values. Note that, the characterization system also preserves the integrity of the lamps by taking real-time voltage and power measurements and stopping the sweep if the limiting values are reached or exceeded (7 kV and 500 W respectively – please remember that our power supply being a “current source”, the value of the DBD voltage is not a priori known and is commonly defined by the bulb and the supply). This could happen if the theoretical values of the DBD model differ from the experimental ones.

* The system starts the acquisition process, taking at least 10 samples, separated by 1 s, of digital and analog measurements in addition to current, voltage and UV waveform, and a screenshot of the oscilloscope to verify the correct performance of system.

* Once data is stored, the system shuts down the power stage during the “pause time”: therefore, the temperature of the excimer lamp decreases and returns to its initial value.

* The process is repeated for the next OP, after the desired temperature is reached or the pause time, specified by the user, has elapsed.

Once the acquisition software finishes the characterization process, the data is stored to be statistically analyzed and processed off-line.

## Operating Points Definition

To determine the OPs working range of the sweep for each lamp, its electrical model is considered: they are used to predict the electrical operating conditions, according to the values of the power supply’s parameters the OPs are validated or rejected, according to the peak voltage and electrical power. Based on preliminary results, it was determined as 100 W as a minimum power to obtain a uniform discharge through the excimer lamp. Additionally, 500 W is taken as the maximum power on the lamps: this value is deducted according to the maximum power density, values given by the manufacturer [36]. Finally, 7 kV is taken as the maximum voltage on the lamp, since this value would reach the maximum voltage supported by the power supply.

Figure 8 shows on the left side an example of a lamp with a non-uniform discharge produced by a very low injected electrical power. On the right side is an example of the definition of the OPs in an excimer lamp. Within this cube, the green cells are the most interesting OPs for the experiment as their electric power is in the high range (between 400 W and
<figure><img src="image_10.png" /><figcaption>Fig. 7 Flowchart of data acquisition</figcaption></figure>

500 W). The blue cells are the ones that inject less than 400 W to the lamp. The orange OPs are eliminated because the electric power is too low to reach a uniform discharge.

Measurement Error Considerations

The oscilloscope used is the LeCroy HDO4024 200 MHz bandwidth, with current probes LeCroy AP015 (Accuracy: ±1%) and differential voltage probes TESTEC TT-SI9010 (Accuracy±2%). The oscilloscope error is negligible, when compared with the accuracy of the probes, due to the 12-bit analog-to-digital acquisition stage. To avoid phase errors
<figure><img src="image_11.png" /><figcaption>Fig. 8 Examples of non-uniform discharge (left side) and theoretical working range (right side)</figcaption></figure>

between waveforms records (lamps voltage and current waveforms for example), a precise synchronization of the oscilloscope’s channels (‘deskew’ process) has been achieved.

A UV light meter reference GIGAHERTZ-OPTIK is programmed with an integration time of one second, using a scale of 40 mW/cm², located at 2.5 cm of the external wall of lamps, with a sensor head UV-33711-308 (centered at 308 nm) presenting an accuracy of ±0,5%. The UV waveform taken by a photodetector with amplifier, Thorlabs PDA-25 K, is sent to one channel of the oscilloscope.

For the error of the measurements presented in the results section, the uncertainty of the instruments is used. The propagation of these errors is made when a mathematical transformation is used; the maximum error in the values for the calculated electric power is evaluated to 3%. For the efficiency a 3.5% systematic error has been calculated.

The operating points that are displayed in the results section, have been processed with a statistical analysis: each operating point is sampled 10 times, allowing the calculation of the average value and the standard deviation, that has been always found below 6% of the average value, validating the acquired data. In the next figures, the average value will be displayed along with a standard deviation bar.

## Analysis of the Results

This part of the study aims to show how electrical and geometric parameters affect UV production in excimer lamps and how these relationships could be exploited for the design of the energy converter and the lamp geometry.

### Electrical Parameters Analysis

From Eq. 1 the proportionality between the electric power (P) and the electric parameters (I, f and δ) is obvious, as well as for the term related to the geometrical parameters (Vth). The initial hypothesis is that the UV emission should be directly proportional to the electric power. To corroborate this, preliminary tests were made with one lamp.

The results are shown in Fig. 9, where the trend is clear (black line): if more electric power is injected into the excimer lamps, more UV is emitted. Nevertheless, the experiments
<figure><img src="image_12.png" /><figcaption>Fig. 9 Preliminary test on BDB excimer lamp</figcaption></figure>

<figure><img src="image_13.png" /><figcaption>Fig. 10 Current and UV waveforms of interest OP</figcaption></figure>

tal points are not always close to this trend line. For instance, in the green rectangle there are different operating points, defined as different combinations of *I*, *f*, and *δ*, that produce the same electric power but produce very different UV emission: for this specific case the difference between the two selected points (in red) is almost 50%. That means that the energy conversion of the excimer lamp depends on the power supply parameters and not only on its average power, since different combination between current intensity, frequency, and discharge duration, can produce very different UV emission.

To observe in detail the example mentioned previously, the current waveforms injected into the excimer lamp for the 2 different OPs shown in Fig. 9 (in the red circles) are shown in Fig. 10 (left). In this specific case, the two waveforms have the same operating frequency, but different current intensity (*I*) and discharge duration (*δ*). To maintain the electric power constant, the first waveform (green) has a high current intensity level (*I*₂) with a short discharge duration (*δ*₂) and the second waveform (black) has a longer discharge duration (*δ*₁) with a lower current intensity (*I*₁). The UV emitted is very different in both cases (green and black in Fig. 10 right) with more energy for the pulses in green, corresponding to the high intensity and short duration pulses. These differences show the necessity to relate the UV emission with the electrical parameters and not only with the average electric power injected into excimer lamps.
<figure><img src="image_14.png" /><figcaption>**Fig. 11** UV efficiency as a function of the electrical parameters</figcaption></figure>

<figure><img src="image_15.png" /><figcaption>**Fig. 12** UV efficiency as a function of the current intensity</figcaption></figure>

With this preliminary result in mind, the characterization system, described previously, was used to explore many OPs to analyze the impact of the electrical variables of the power supply on the UV emission.

MultiQuadric Response Surface (MQRS) algorithm [39–41] has been selected to extrapolate unexplored OPs and to study the relation between the electrical parameters and the UV emission; indeed:

* It allows to study the combined impact of several parameters by the same time;

* It does not limit the analysis to mathematical approximation (regressions polynomial, exponential, between others), between one variable and the system's output (UV emission).

Plots of Fig. 11 present the response surfaces describing the impact of two combined parameters over the UV efficiency.

These surfaces show in the vertical axis the UV efficiency, defined as the ratio between the total UV intensity (W) and electric power provided to the excimer lamp (W). The two
<figure><img src="image_16.png" /><figcaption>**Fig. 13** UV efficiency as a function of the discharge duration</figcaption></figure>

<figure><img src="image_17.png" /><figcaption>**Fig. 14** Two cases of comparison between two lamps with the same gas gap and different volumes</figcaption></figure>

electric parameters under study are the other two axes. To confirm the visual guess, transversal cuts can be made in the surfaces. For example, from Fig. 11 (left) two different cuts are shown in Fig. 12.

In this case, UV efficiency is a function of the current intensity and in both cases, the trend to maximize the efficiency is reached when the current intensity is increased.

In Fig. 13, UV efficiency is a function of the discharge duration and in both cases, the trend to maximize the efficiency is reached when the discharge duration is reduced. It is important to mention that this procedure was repeated for the nineteen excimer lamps under test, with different geometrical parameters, and the trends were the same in all cases.

Results from Figs. 12 and 13 are in accordance with previous works presented in the literature, where shorter rise times of the voltage pulses (higher dv/dt) increase the efficiency of the excimer lamps [17, 30].
<figure><img src="image_18.png" /><figcaption>Fig. 15 UV as a function of Volume with constant 500 W electric power</figcaption></figure>

<figure><img src="image_19.png" /><figcaption>Fig. 16 UV efficiency and emissions as a function of lamps volume for the highest values of UV for each lamp</figcaption></figure>

## Geometrical Parameters Analysis

In this part of the study, different tests were made for the excimer lamps having the same ranges of electrical parameters of the power supply, which is the same current intensity, frequency, and discharge duration.

The comparative examples shown in Fig. 14, illustrate two cases, each one with two different lamps that have the same dielectric thickness and same gas gap (difference between inner and outer radii of the dielectric barriers) but different gas volume. It can be inferred that the higher the volume of the lamps, the higher the UV emission. Note however that the electrical variables must be correctly chosen to maximize the UV production.

A further analysis, concerning the influence of the gas volume on the UV efficiency, is done with the lamps that were able to attain a high electric power, *P* = 500 W, using similar electrical parameters (*I*, *f*, and *δ*). Result is plotted in Fig. 15. That allows us to observe a clear trend, where the gas volume is an important parameter to increase the UV efficiency (regardless of the gas gap).

To integrate into the study the electrical and geometrical parameters at the same time, for each lamp, the operating point with the maximum measurement of UV radiation, regardless
the value of the electrical parameters, is selected and plotted in Fig. 16 (left) vs. the volume of the lamp. It is possible to see that the UV is maximized when higher volume lamps are used. In Fig. 16 (right), the same operating points are plotted again but this time showing the UV efficiency and not the UV power. In this figure it is possible to select the lamp marked as Lamp5 as the best one in terms of UV level output with less electric energy consumption. This is an important result from this characterization study that enables the user to identify the best lamp geometry among the set, and at the same time, the proper electrical waveform to supply this specific lamp.

The results obtained from Fig. 14 to 16 show the same effect, the highest volume lamps present the highest UV intensities.

## Conclusions

The characterization system implemented in this work can identify among a set of excimer lamps, which one is the best in terms of UV radiation, including the power supply parameters. It is also able to identify the most energy efficient operating point for one specific lamp in terms of the power supply parameters.

The results presented in this paper demonstrate that there is an influence on the UV emission of excimer lamps, by the geometrical parameters, mainly the gas mixture volume, and by the electrical parameters of the power supply. The large volume confined by the lamps are the key factors to improve the production of the UV in DBD excimer lamps, in terms of geometrical parameters.

High value for the current intensity (*I*) and short duration of the current pulses (*δ*) are the main features to increase the UV efficiency of DBD excimer lamps. Bearing in mind, that the product of these two variables controls the average electric power injected into the DBD.

**Acknowledgements** This work was jointly supported by LAPLACE laboratory and Pontificia Universidad Javeriana, Project 10035.

**Author Contributions** A.W. wrote the main manuscript, performed experimental tests, analyzed results, prepared figures R.D. reviewed the manuscript, analyzed results. H.P. reviewed the manuscript, analyzed results.

**Funding** Not applicable.
Open Access funding provided by Colombia Consortium

**Data Availability** No datasets were generated or analysed during the current study.

## Declarations

**Ethical Approval** Not applicable.

**Conflict of Interest** The authors declare no conflict of interest.

**Competing Interests** The authors declare no competing interests.

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