# XRR-GIXRF combined characterization of Mg/Sc multilayer

Hina Verma, Karine Le Guen, Yves Ménesguen, Renaud Delaunay,
Marie-Christine Lépy, Philippe Jonnard

► To cite this version:

Hina Verma, Karine Le Guen, Yves Ménesguen, Renaud Delaunay, Marie-Christine Lépy, et al.. XRR-GIXRF combined characterization of Mg/Sc multilayer. EXRS 2022, European Conference on X-ray Spectrometry, Jun 2022, Bruges, Belgium., 2022. [https://hal-03936384](https://hal-03936384)

HAL Id: hal-03936384

https://hal.science/hal-03936384

Submitted on 24 Feb 2023

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Distributed under a Creative Commons Attribution 4.0 International License
# XRR-GIXRF combined characterization of Mg/Sc multilayer

Hina Verma¹, Karine Le Guen¹, Yves Ménesguen², Renaud Delaunay¹, Marie-Christine Lépy², Philippe Jonnard¹

1. Sorbonne Université, Faculté des sciences et Ingénierie, UMR CNRS, Laboratoire de Chimie Physique – Matière et Rayonnement, 4 Place Jussieu, F-75252 Paris Cedex 05, France

2. 2 CEA, LIST, Laboratoire National Henri Becquerel (LNE-LNHB), 91191 Gif-sur-Yvette cedex, France

## Motivation

Design of multilayer mirror as optical components
for X-ray spectroscopy in the water window range

Water Window Range : C(285 eV) - O (530eV)

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## Method of Analysis

**CASTOR:** Chambre d'Analyse spectrométrique en Transmission ou en Réflexion Metrologie Beamline, SOLEIL

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Seven-axis Goniometer

X-ray
Reflectivity
(XRR)

• Thickness

• Refractive index

• Roughness or
diffusion

X-ray
Fluorescence (XRF)

• Element specific

• Elemental composition

• Depth concentration

Combined
XRR + XRF

✓ Better accuracy

✓ Reduces
uncertainties

❖ Photodiode to record the XRR signal in a 0-2θ configuration.

❖ Silicon drift detector (SDD), placed at 90° with respect to the incoming beam, to acquire the fluorescence one

## Problem of Interfaces

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Perfect Interface

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Rough Interface

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Diffused Interface

○ Mixing Enthalpy

○ Method of Fabrication

○ Stability of interfaces over time

○ Free surface energy

## Results

<figure><img src="image_7.png" /><figcaption>**Fitted Structure:** CrO<sub>3</sub>/Cr<sub>2</sub>O<sub>3</sub>/Sc/Sc<sub>x</sub>Si<sub>y</sub>]/Si substrate</figcaption></figure>

<figure><img src="image_8.png" /><figcaption>**Fitted Structure:** CrO<sub>3</sub>/Cr<sub>2</sub>O<sub>3</sub>/MgO/MgSc/Sc/Sc<sub>x</sub>Si<sub>y</sub>]/Si substrate</figcaption></figure>

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