# The Use of High Energy X-Ray Generators for TID
## Testing of Electronic Devices

Vincent Girones, Jérôme Boch, Frédéric Saigné, Rubén García

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► To cite this version:

Vincent Girones, Jérôme Boch, Frédéric Saigné, Rubén García. The Use of High Energy X-Ray Generators for TID Testing of Electronic Devices. RADECS, Oct 2022, Venise, Italy. hal-04580360

HAL Id: hal-04580360

https://hal.science/hal-04580360

Submitted on 19 May 2024

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# The Use of High Energy X-Ray Generators for TID Testing of Electronic Devices

Vincent Girones¹, Jérôme Boch¹, Frédéric Saigné¹, Rubén García Alía²

¹ Université de Montpellier, IES - UMR UM/CNRS 5214, France.

² CERN, CH-1211 Genève 23 Switzerland
Corresponding author : vincent.girones@umontpellier.fr

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PROJET COFINANCÉ PAR LE FONDS EUROPÉEN DE DÉVELOPPEMENT RÉGIONAL

## Abstract

The use of a high energy X-ray generator for electronic device TID testing is studied and compared to cobalt-60. X-ray spectrum is filtered to reduce photoelectric effect due to low energy photons. Experimental results are presented and discussed.

## Objective

To perform TID testing, we study the use of a high-energy X-ray generator allowing to obtain photons up to 320keV. These conditions are far from optimal for component testing where the goal is to achieve a high penetration depth and an energy deposition that does not depend on the Z of the material. This is the reason why we have decided to cut

the low energy photons. This cut is realized with a lead (Pb) filter.

* Benefits of X-ray:

- easier radiation safety issues

- more economical (purchase and maintenance)

- easy to collimate

- higher dose rate offering reduced testing time

<figure><img src="image_8.png" /></figure>

## X-ray

The TASMICs tool has been used to simulate our Spectrum. The **lead filter reduces low energies** below 100keV while only slightly altering high energies

<figure><img src="image_9.png" /></figure>

## Methods

<table><thead><tr><td>Type</td><td>Filter</td><td>Dose rate</td><td>Length Source-Target</td></tr></thead><tbody><tr><td>Cobalt-60</td><td>Nothing</td><td>0,62 Gy(Air)/h</td><td>1000 (mm)</td></tr><tr><td>X-ray</td><td>2mm Al</td><td>30 Gy(Air)/h</td><td>400 (mm)</td></tr><tr><td>X-ray</td><td>2mm Al + 1mm Pb</td><td>30 Gy(Air)/h</td><td>400 (mm)</td></tr></tbody></table>

We performed tests at different dose rate over 60-Co to ensure no dose rate effect will affect the comparison

<figure><img src="image_10.png" /></figure>

## Results

From each spectrum, the effective TID can be calculated.

For x-ray irradiation with only Al, the degradation obtained is much higher than that obtained with cobalt. On the other hand, for x-ray irradiation with Al + Pb, when the low energy photons are cut off, the response is close to that obtained with cobalt.

<figure><img src="image_11.png" /><figcaption>DMP2004 P-MOS</figcaption></figure>

<figure><img src="image_12.png" /><figcaption>DMN601K N-MOS</figcaption></figure>

## Conclusion

Degradation closer to 60-Co has been obtained with X-ray irradiation when photons with low energy photons were cut (i.e. when a lead filter is used). But a difference of degradation remains. The degradation difference can be attributed to several factors: the contributions of packaging or backscattered photons in Back End Of Line (BEOL) stack (contacts, metal layers, insulating layers) that can induce a significant TID contribution in the sensitive oxide.
# The Use of High Energy X-Ray Generators for TID Testing of Electronic Devices

Vincent Girones¹, Jérôme Boch¹, Frédéric Saigné¹, Rubén García Alía²

¹ Université de Montpellier, IES - UMR UM/CNRS 5214, France.

² CERN, CH-1211 Genève 23 Switzerland
Corresponding author : vincent.girones@umontpellier.fr

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l'Europe
Engage
en Occitanie

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<figure><img src="image_8.png" /></figure>

PROJET COFINANCÉ PAR LE FONDS EUROPÉEN DE DÉVELOPPEMENT RÉGIONAL

## Abstract

The use of a high energy X-ray generator for electronic device TID testing is studied and compared to cobalt-60. X-ray spectrum is filtered to reduce photoelectric effect due to low energy photons. Experimental results are presented and discussed.

## Objective

To perform TID testing, we study the use of a high-energy X-ray generator allowing to obtain photons up to 320keV. These conditions are far from optimal for component testing where the goal is to achieve a high penetration depth and an energy deposition that does not depend on the Z of the material. This is the reason why we have decided to cut

the low energy photons. This cut is realized with a lead (Pb) filter.

* Benefits of X-ray:

- easier radiation safety issues

- more economical (purchase and maintenance)

- easy to collimate

- higher dose rate offering reduced testing time

<figure><img src="image_9.png" /></figure>

## X-ray

The TASMICs tool has been used to simulate our Spectrum. The **lead filter reduces low energies** below 100keV while only slightly altering high energies

<figure><img src="image_10.png" /></figure>

## Methods

<table><thead><tr><td>Type</td><td>Filter</td><td>Dose rate</td><td>Length Source-Target</td></tr></thead><tbody><tr><td>Cobalt-60</td><td>Nothing</td><td>0,62 Gy(Air)/h</td><td>1000 (mm)</td></tr><tr><td>X-ray</td><td>2mm Al</td><td>30 Gy(Air)/h</td><td>400 (mm)</td></tr><tr><td>X-ray</td><td>2mm Al + 1mm Pb</td><td>30 Gy(Air)/h</td><td>400 (mm)</td></tr></tbody></table>

We performed tests at different dose rate over 60-Co to ensure no dose rate effect will affect the comparison

<figure><img src="image_11.png" /></figure>

## Results

From each spectrum, the effective TID can be calculated.

For x-ray irradiation with only Al, the degradation obtained is much higher than that obtained with cobalt. On the other hand, for x-ray irradiation with Al + Pb, when the low energy photons are cut off, the response is close to that obtained with cobalt.

<figure><img src="image_12.png" /><figcaption>DMP2004 P-MOS</figcaption></figure>

<figure><img src="image_13.png" /><figcaption>DMN601K N-MOS</figcaption></figure>

## Conclusion

Degradation closer to 60-Co has been obtained with X-ray irradiation when photons with low energy photons were cut (i.e. when a lead filter is used). But a difference of degradation remains. The degradation difference can be attributed to several factors: the contributions of packaging or backscattered photons in Back End Of Line (BEOL) stack (contacts, metal layers, insulating layers) that can induce a significant TID contribution in the sensitive oxide.