Office Action 1: Non-Final Rejection (2024-11-29)
Rejection types: 102 - Lack of Novelty

CLAIMS:
What is claimed is:

1\. An electrostatic chuck, comprising:
a ceramic dielectric substrate having a first major surface configured to have a process object placed thereon and a second major surface opposite to the first major surface;
a base plate having an upper surface and a lower surface, the upper surface being at the ceramic dielectric substrate side, the lower surface being opposite to the upper surface, the base plate supporting the ceramic dielectric substrate; and
a heater unit which heats the ceramic dielectric substrate, the heater unit including a first heater element and a second heater element, the first heater element being located between the first major surface and the upper surface, the second heater element being located between the first major surface and the first heater element or between the first heater element and the upper surface, the first heater element including a plurality of zones, the plurality of zones of the first heater element including a first zone, the first zone including a first heater line emitting heat by allowing a current to flow, and
a first power feeding portion and a second power feeding portion feeding power to the first heater line, the first heater line including a plurality of extension portions extending along a first direction, the plurality of extension portions being arranged in a second direction perpendicular to the first direction, and
a plurality of protruding portions provided in the plurality of extension portions, the plurality of protruding portions protruding in the second direction, the plurality of extension portions including a first extension portion and a second extension portion, the plurality of protruding portions including a first protruding portion provided in the first extension portion, and
a second protruding portion provided in the second extension portion, the first protruding portion protruding toward the second protruding portion, the second protruding portion protruding toward the first protruding portion, the first zone including a first facing region in which the first protruding portion and the second protruding portion are disposed so as to face and be adjacent to each other, the second heater element including a plurality of zones, the plurality of zones of the second heater element including a second zone, the second zone including a second heater line emitting heat by allowing a current to flow, and
a third power feeding portion and a fourth power feeding portion feeding power to the second heater line, the second zone including a central region positioned at a center of the second zone when viewed along a Z-direction perpendicular to the first major surface, and
an outer peripheral region positioned outside the central region, the first facing region being located at a position where the first facing region overlaps the central region in the Z- direction.

2\. The chuck according to claim 1, wherein the plurality of zones of the first heater element is divided in a radial direction, and
the first direction is a circumferential direction.

3\. The chuck according to claim 1, wherein the plurality of zones of the first heater element is divided in a radial direction, and
the first direction is the radial direction.

4\. The chuck according to claim 1, wherein the plurality of extension portions further includes a third extension portion positioned between the first extension portion and the second extension portion in the second direction, and
the third extension portion is located at a position where the third extension portion does not overlap the first and second protruding portions in the second direction.

5\. The chuck according to claim 1, wherein the plurality of protruding portions further includes a third protruding portion provided in the first extension portion, the third protruding portion protrudes toward the second protruding portion, and
the third protruding portion is disposed so as to face the second protruding portion and to be adjacent to the second protruding portion.

6\. An electrostatic chuck, comprising:
a ceramic dielectric substrate having a first major surface configured to have a process object placed thereon and a second major surface opposite to the first major surface;
a base plate having an upper surface and a lower surface, the upper surface being at the ceramic dielectric substrate side, the lower surface being opposite to the upper surface, the base plate supporting the ceramic dielectric substrate; and
a heater unit which heats the ceramic dielectric substrate, the heater unit including a first heater element, the first heater element being located between the first major surface and the upper surface, the first heater element including a plurality of zones, the plurality of zones of the first heater element including a first zone, the first zone including a first heater line emitting heat by allowing a current to flow, and
a first power feeding portion and a second power feeding portion feeding power to the first heater line, the first heater line including a plurality of extension portions extending along a first direction, the plurality of extension portions being arranged in a second direction perpendicular to the first direction, and
a plurality of protruding portions provided in the plurality of extension portions, the plurality of protruding portions protruding in the second direction, the plurality of extension portions including a first extension portion and a second extension portion, the plurality of protruding portions including a first protruding portion provided in the first extension portion, and
a second protruding portion provided in the second extension portion, the first protruding portion protruding toward the second protruding portion, the second protruding portion protruding toward the first protruding portion, the first zone including a first facing region in which the first protruding portion and the second protruding portion are disposed so as to face and be adjacent to each other, the first zone including a central region positioned at a center of the first zone when viewed along a Z-direction perpendicular to the first major surface, and
an outer peripheral region positioned outside the central region when viewed along the Z-direction, the first facing region being located in the central region.

7\. The chuck according to claim 6, wherein the plurality of zones of the first heater element is divided in a radial direction, and
the first direction is a circumferential direction.

8\. The chuck according to claim 6, wherein the plurality of zones of the first heater element is divided in a radial direction, and
the first direction is the radial direction.

9\. The chuck according to claim 6, wherein the plurality of extension portions further includes a third extension portion positioned between the first extension portion and the second extension portion in the second direction, and
the third extension portion is located at a position where the third extension portion does not overlap the first and second protruding portions in the second direction.

10\. The chuck according to claim 6, wherein the plurality of protruding portions further includes a third protruding portion provided in the first extension portion, the third protruding portion protrudes toward the second protruding portion, and
the third protruding portion is disposed so as to face the second protruding portion and to be adjacent to the second protruding portion.

11\. The chuck according to claim 6, wherein the base plate further includes a coolant flow path for allowing a cooling medium to flow, the heater unit further includes:
a bypass layer that is a power feeding path to the first heater element; and
a first power feeding terminal and a second power feeding terminal electrically connected to the bypass layer, the first power feeding portion is located at a position where the first power feeding portion does not overlap the first power feeding terminal in a Z-direction perpendicular to the first major surface, the first power feeding portion is electrically connected to the first power feeding terminal via the bypass layer, the second power feeding portion is located at a position where the second power feeding portion does not overlap the second power feeding terminal in the Z-direction, the second power feeding portion is electrically connected to the second power feeding terminal via the bypass layer, and
the first facing region is located at a position where the first facing region overlaps at least one of the first power feeding terminal or the second power feeding terminal in the Z- direction.

12\. The chuck according to claim 11, wherein the plurality of zones of the first heater element is divided in a radial direction, and
the first direction is a circumferential direction.

13\. The chuck according to claim 11, wherein the plurality of zones of the first heater element is divided in a radial direction, and
the first direction is the radial direction.

14\. The chuck according to claim 11, wherein the plurality of extension portions further includes a third extension portion positioned between the first extension portion and the second extension portion in the second direction, and
the third extension portion is located at a position where the third extension portion does not overlap the first and second protruding portions in the second direction.
15\. The chuck according to claim 11, wherein the plurality of protruding portions further includes a third protruding portion provided in the first extension portion, the third protruding portion protrudes toward the second protruding portion, and
the third protruding portion is disposed so as to face the second protruding portion and to be adjacent to the second protruding portion.

16\. An electrostatic chuck, comprising:
a ceramic dielectric substrate having a first major surface configured to have a process object placed thereon and a second major surface opposite to the first major surface;
a base plate having an upper surface, a lower surface, and a coolant flow path, the upper surface being at the ceramic dielectric substrate side, the lower surface being opposite to the upper surface, the coolant flow path allowing a cooling medium to flow, the base plate supporting the ceramic dielectric substrate; and
a heater unit which heats the ceramic dielectric substrate, the heater unit including a first heater element, a second heater element, a bypass layer that is a power feeding path to the first and second heater elements, and
a first power feeding terminal, a second power feeding terminal, a third power feeding terminal, and a fourth power feeding terminal electrically connected to the bypass layer, the first heater element being located between the first major surface and the upper surface, the second heater element being located between the first major surface and the first heater element or between the first heater element and the upper surface, the first heater element including a plurality of zones, the plurality of zones of the first heater element including a first zone, the first zone including a first heater line emitting heat by allowing a current to flow, and
a first power feeding portion and a second power feeding portion feeding power to the first heater line, the first power feeding portion being located at a position where the first power feeding portion does not overlap the first power feeding terminal in a Z-direction perpendicular to the first major surface, the first power feeding portion being electrically connected to the first power feeding terminal via the bypass layer, the second power feeding portion being located at a position where the second power feeding portion does not overlap the second power feeding terminal in the Z-direction, the second power feeding portion being electrically connected to the second power feeding terminal via the bypass layer, the second heater element including a plurality of zones, the plurality of zones of the second heater element including a second zone, the second zone including a second heater line emitting heat by allowing a current to flow, and
a third power feeding portion and a fourth power feeding portion feeding power to the second heater line, the third power feeding portion being located at a position where the third power feeding portion does not overlap the third power feeding terminal in the Z-direction, the third power feeding portion being electrically connected to the third power feeding terminal via the bypass layer, the fourth power feeding portion being located at a position where the fourth power feeding portion does not overlap the fourth power feeding terminal in the Z-direction, the fourth power feeding portion being electrically connected to the fourth power feeding terminal via the bypass layer, at least one of the third power feeding terminal or the fourth power feeding terminal being located at a position where the at least one of the third power feeding terminal or the fourth power feeding terminal overlaps a virtual line segment in the Z-direction, the virtual line segment connecting a center of the first power feeding portion and a center of the second power feeding portion.

17\. The chuck according to claim 16, wherein at least one of a center of the third power feeding terminal or a center of the fourth power feeding terminal is located at a position where the at least one of the center of the third power feeding terminal or the center of the fourth power feeding terminal overlaps the virtual line segment.

18\. The chuck according to claim 16, wherein the first zone includes a central region positioned at a center of the first zone when viewed along the Z-direction, and
an outer peripheral region positioned outside the central region when viewed along the Z-direction, and
at least one of the first power feeding portion or the second power feeding portion is located in the central region.

19\. The chuck according to claim 16, wherein the first zone includes an outer circumference edge of the first heater element, the first zone includes:
an inner circumference portion positioned radially inward of a center line of a radial direction, the center line of the radial direction bisecting the first zone in the radial direction; and an outer circumference portion positioned radially outward of the center line of the radial direction, the outer circumference portion including the outer circumference edge, and at least one of the first power feeding portion or the second power feeding portion is located in the inner circumference portion.

OFFICE ACTION:
Allowable Subject Matter
Notice of Pre-AIA  or AIA  Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Claims 1-15 are pending in this application.
Priority
Receipt is acknowledged of certified copies of papers required by 37 CFR 1.55.
Information Disclosure Statement
The information disclosure statement (IDS) were submitted on 03/14/2023 and 10/24/2024.  The submission is in compliance with the provisions of 37 CFR 1.97.  Accordingly, the information disclosure statement is being considered by the examiner.
Specification
The title of the invention is not descriptive.  A new title is required that is clearly indicative of the invention to which the claims are directed.
Claim Objections
Claims 2-5, 7-15 and 17-19 are objected to because of the following informalities:
Claim 2 line 1, “The chuck” should be –The electrostatic chuck--. Similar corrections are required in claims 3-5, 7-15 and 17-19.
Appropriate correction is required.
Claim Rejections - 35 USC § 102
In the event the determination of the status of the application as subject to AIA  35 U.S.C. 102 and 103 (or as subject to pre-AIA  35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA  to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
(a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention.
Claims 16, 18 and 19 are rejected under 35 U.S.C. 102(a)(1) and 102(a)(2) as being anticipated by Uefuji (US 20180286732 A1).
Regarding claim 16, Uefuji teaches an electrostatic chuck (e.g. electrostatic chuck 10) (fig.2B), comprising:
a ceramic dielectric substrate (i.e. ceramic dielectric substrate 100) (fig.2B) having a first major surface (i.e. first major surface 101) (fig.2B) configured to have a process object (i.e. processing object W) (fig.2A) placed thereon (e.g. W is placed on 101) (figs.2A and 2B) and a second major surface (i.e. second major surface 102) (fig.2B) opposite to the first major surface (e.g. 101 and 102 are opposite surfaces of 100) (fig.2B);
a base plate (i.e. base plate 300) (fig.2B) having an upper surface (e.g. surface of 300 adjacent to 200) (fig.2B), a lower surface (i.e. lower surface 303) (fig.2B), and a coolant flow path (i.e. passageway 301) (fig.2A), the upper surface being at the ceramic dielectric substrate side (e.g. upper surface of 300 is on the side of 100) (fig.2B), the lower surface being opposite to the upper surface (e.g. upper surface of 300 is opposite 303) (figs.2A and 2B), the coolant flow path allowing a cooling medium to flow ([0102], a cooling medium is caused to flow into the passageway 301), the base plate supporting the ceramic dielectric substrate ([0101], The base plate 300 is provided on the second major surface 102 side of the ceramic dielectric substrate 100 and supports the ceramic dielectric substrate 100); and
a heater unit (i.e. heater plate 200) (fig.2B and 5) which heats the ceramic dielectric substrate ([0099], heat that is transferred to the ceramic dielectric substrate 100 by the heater plate 200),
the heater unit including
a first heater element (e.g. first heater element 230a) (fig.5),
a second heater element (e.g. second heater element 230b) (fig.5),
a bypass layer (i.e. bypass layer 250) (fig.5) that is a power feeding path to the first and second heater elements ([0132], electrical coupling between the first heater element 230 a and the bypass layer 250 and the electrical coupling between the second heater element 230 b and the bypass layer 250), and
a first power feeding terminal (e.g. one of the 8 power supply terminals 280) (fig.5), a second power feeding terminal (e.g. one of the 8 power supply terminals 280) (fig.5), a third power feeding terminal (e.g. one of the 8 power supply terminals 280) (fig.5), and a fourth power feeding terminal (e.g. one of the 8 power supply terminals 280) (fig.5) electrically connected to the bypass layer ([0137], The power supply terminal 280 is electrically coupled to the bypass layer 250),
the first heater element being located between the first major surface and the upper surface (e.g. 230a is located between 101 and upper surface of 300) (figs.2B and 5),
the second heater element being located between the first major surface and the first heater element or between the first heater element and the upper surface (e.g. 230b is located between 230a and upper surface of 300),
the first heater element including a plurality of zones (e.g. zones like region B3) (fig.7A),
the plurality of zones of the first heater element including
a first zone (e.g. zone comprising 230a) (fig.7B), the first zone including a first heater line (e.g. first heater line 239a) (fig.7B) emitting heat by allowing a current to flow ([0153], The length of the first heater element 230 a is the length of the path in which the current flows from the portion Ain where the current enters the first heater element 230 a to the portion Aout where the current exits from the first heater element 230 a), and
a first power feeding portion (e.g. portion of 230a where C4 is input) (fig.5) and a second power feeding portion (e.g. portion of 230a where C6 is output) (fig.5) feeding power to the first heater line ([0139], current flows from the power supply terminals 280 toward the bypass layer 250. As illustrated by arrow C3 and arrow C4),
the first power feeding portion being located at a position (e.g. position on 230a where C4 flows in) (fig.5) where the first power feeding portion does not overlap the first power feeding terminal in a Z-direction perpendicular to the first major surface (e.g. position of 280 where C1 originates does not overlap with position on 230a where C4 is input) (fig.5), the first power feeding portion being electrically connected to the first power feeding terminal via the bypass layer (e.g. connection as established by current flow from C1-C9) (fig.5),
the second power feeding portion being located at a position (e.g. position on 230a where C6 flows out) (fig.5) where the second power feeding portion does not overlap the second power feeding terminal in the Z-direction (e.g. position of 280 where C9 exits does not overlap with position on 230a where C6 is output) (fig.5), the second power feeding portion being electrically connected to the second power feeding terminal via the bypass layer (e.g. connection as established by current flow from C1-C9) (fig.5),
the second heater element including a plurality of zones (e.g. zones like region B3) (fig.7A),
the plurality of zones of the second heater element including
a second zone (e.g. zone comprising 230b) (fig.7B), the second zone including
a second heater line (e.g. first heater line 239b) (fig.7B) emitting heat by allowing a current to flow ([0157], the electrical resistance of the second heater element 230 b is the electrical resistance between the portion Bin where the current enters the second heater element 230 b and the portion Bout where the current exits from the second heater element 230 b), and
a third power feeding portion (e.g. portion of 230b where C4 is input) (fig.5) and a fourth power feeding portion (e.g. portion of 230b where C6 is output) (fig.5) feeding power to the second heater line ([0139], current flows from the power supply terminals 280 toward the bypass layer 250. As illustrated by arrow C3 and arrow C4),
the third power feeding portion being located at a position (e.g. position on 230a where C4 flows in) (fig.5) where the third power feeding portion does not overlap the third power feeding terminal in the Z-direction (e.g. position of 280 where C11 originates does not overlap with position on 230b where C4 is input) (fig.5), the third power feeding portion being electrically connected to the third power feeding terminal via the bypass layer (e.g. connection as established by current flow from C11-C19) (fig.5),
the fourth power feeding portion being located at a position (e.g. position on 230b where C6 flows out) (fig.5) where the fourth power feeding portion does not overlap the fourth power feeding terminal in the Z-direction (e.g. position of 280 where C19 exits does not overlap with position on 230b where C6 is output) (fig.5), the fourth power feeding portion being electrically connected to the fourth power feeding terminal via the bypass layer (e.g. connection as established by current flow from C11-C19) (fig.5),
at least one of the third power feeding terminal or the fourth power feeding terminal being located at a position (e.g. position of 280 where C19 exits) (fig.5) where the at least one of the third power feeding terminal or the fourth power feeding terminal overlaps (e.g. draw a virtual line from 280 where C19 exits towards 230b. An overlap can be seen in the position of 280) (fig.5) a virtual line segment (e.g. virtual line between the Bin and Bout positions) (fig.5) in the Z-direction (e.g. overlap is in up-down direction) (fig.5), the virtual line segment connecting a center of the first power feeding portion (e.g. center of portion of 230b where Bin occurs) (fig.5) and a center of the second power feeding portion (e.g. center of portion of 230b where Bout occurs) (fig.5).
Regarding claim 18, Uefuji teaches the electrostatic chuck according to claim 16, wherein the first zone includes
a central region (e.g. central region of 230a) (fig.5) positioned at a center of the first zone when viewed along the Z-direction (e.g. central region of 230a is at the center of zone comprising 230a) (fig.5), and
an outer peripheral region (e.g. outer peripheral region of 230a) (fig.5) positioned outside the central region when viewed along the Z-direction (e.g. outer peripheral region of 230a is at the center of zone comprising 230a) (fig.5), and
at least one of the first power feeding portion or the second power feeding portion is located in the central region (it is necessarily true that one of the 280s are in the central region as seen in fig.5).
Regarding claim 19, Uefuji (US20180286732A1) the electrostatic chuck according to claim 16, wherein the first zone includes an outer circumference edge of the first heater element (e.g. outer edge of 230a) (figs.5 and 7B), the first zone includes:
an inner circumference portion (e.g. portion of 230a towards the inner radius from center line) (fig.1 below) positioned radially inward of a center line (e.g. center line) (fig.1 below) of a radial direction (e.g. direction Dr) (fig.7B), the center line of the radial direction bisecting the first zone in the radial direction (e.g. center line bisects 230a) (fig.1 below); and
an outer circumference portion (e.g. portion of 230a towards the outer radius from center line) (fig.1 below) positioned radially outward of the center line of the radial direction (e.g. position of outer circumference portion of 230a) (fig.1 below), the outer circumference portion including the outer circumference edge (e.g. the outer edge of 230a is in the outer circumference portion) (fig.1 below), and
at least one of the first power feeding portion or the second power feeding portion is located in the inner circumference portion (e.g. one of the circular connection regions in the inner circumference portion) (fig.7B).
PNG
media_image1.png
638
716
media_image1.png
Greyscale
Fig. 1: Annotated fig.7B of Uefuji (US20180286732A1)
Allowable Subject Matter
Claims 1-15 are allowed.
Claim 17 is objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims.
The following is a statement of reasons for the indication of allowable subject matter:
Regarding claim 17, Uefuji (US20180286732A1) teaches the electrostatic chuck according to claim 16.
Uefuji does not teach, wherein
at least one of a center of the third power feeding terminal or a center of the fourth power feeding terminal is located at a position where the at least one of the center of the third power feeding terminal or the center of the fourth power feeding terminal overlaps the virtual line segment.
Prior art Miwa (US 20210090930 A1) fig.4, Miwa2 (US 20210007183 A1) fig.4, Kanno (US 20060291132 A1) fig.3 and Endo (US 11694881 B2) are found to be the closest prior art.
However, none of the prior art, taken singly or in combination, teach “at least one of a center of the third power feeding terminal or a center of the fourth power feeding terminal is located at a position where the at least one of the center of the third power feeding terminal or the center of the fourth power feeding terminal overlaps the virtual line segment.”
The following is an examiner' s statement of reasons for allowance:
Regarding claim 1, Uefuji (US20180286732A1) substantially teach the claim limitations as indicated in claim 16. Uefuji does not teach, the first heater line including a plurality of extension portions extending along a first direction, the plurality of extension portions being arranged in a second direction perpendicular to the first direction, and a plurality of protruding portions provided in the plurality of extension portions, the plurality of protruding portions protruding in the second direction, the plurality of extension portions including a first extension portion and a second extension portion, the plurality of protruding portions including a first protruding portion provided in the first extension portion, and a second protruding portion provided in the second extension portion, the first protruding portion protruding toward the second protruding portion, the second protruding portion protruding toward the first protruding portion, the first zone including a first facing region in which the first protruding portion and the second protruding portion are disposed so as to face and be adjacent to each other.
Prior art Vellanki (US 20230010049 A1) fig.4, Miwa (US 20210090930 A1) fig.5, Miwa2 (US 20210007183 A1) fig.6, Kanno (US 20060291132 A1) fig.3 and Kim (US 10224228 B2) fig.6 are found to be the closest prior art.
However, none of the prior art, taken singly or in combination, teach “the first heater line including a plurality of extension portions extending along a first direction, the plurality of extension portions being arranged in a second direction perpendicular to the first direction, and a plurality of protruding portions provided in the plurality of extension portions, the plurality of protruding portions protruding in the second direction, the plurality of extension portions including a first extension portion and a second extension portion, the plurality of protruding portions including a first protruding portion provided in the first extension portion, and a second protruding portion provided in the second extension portion, the first protruding portion protruding toward the second protruding portion, the second protruding portion protruding toward the first protruding portion, the first zone including a first facing region in which the first protruding portion and the second protruding portion are disposed so as to face and be adjacent to each other”.
Regarding claims 2-5, they are allowed as they depend on allowed claim 1.
Regarding claim 6, it is allowed for the same reasons as indicated in claim 1.
Regarding claims 7-15, they are allowed as they depend on allowed claim 6.
Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee.  Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.”
Conclusion


NEXT OFFICE ACTION: DETAILED ACTION
Notice of Pre-AIA  or AIA  Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Claims 1-19 are allowed.
Response to Arguments
Applicant’s arguments, see Remarks, filed 02/25/2025, with respect to independent claim 16 have been fully considered and are persuasive.  The previous rejection of claim 16 has been withdrawn. Applicant’s amendments overcome the prior art of record.
REASONS FOR ALLOWANCE
Claims 1-19 are allowed.
The following is an examiner’s statement of reasons for allowance:
Regarding claim 16, Uefuji (US 20180286732 A1) teaches an electrostatic chuck (e.g. electrostatic chuck 10) (fig.2B), comprising:
a ceramic dielectric substrate (i.e. ceramic dielectric substrate 100) (fig.2B) having a first major surface (i.e. first major surface 101) (fig.2B) configured to have a process object (i.e. processing object W) (fig.2A) placed thereon (e.g. W is placed on 101) (figs.2A and 2B) and a second major surface (i.e. second major surface 102) (fig.2B) opposite to the first major surface (e.g. 101 and 102 are opposite surfaces of 100) (fig.2B);
a base plate (i.e. base plate 300) (fig.2B) having an upper surface (e.g. surface of 300 adjacent to 200) (fig.2B), a lower surface (i.e. lower surface 303) (fig.2B), and a coolant flow path (i.e. passageway 301) (fig.2A), the upper surface being at the ceramic dielectric substrate side (e.g. upper surface of 300 is on the side of 100) (fig.2B), the lower surface being opposite to the upper surface (e.g. upper surface of 300 is opposite 303) (figs.2A and 2B), the coolant flow path allowing a cooling medium to flow ([0102], a cooling medium is caused to flow into the passageway 301), the base plate supporting the ceramic dielectric substrate ([0101], The base plate 300 is provided on the second major surface 102 side of the ceramic dielectric substrate 100 and supports the ceramic dielectric substrate 100); and
a heater unit (i.e. heater plate 200) (fig.2B and 5) which heats the ceramic dielectric substrate ([0099], heat that is transferred to the ceramic dielectric substrate 100 by the heater plate 200),
the heater unit including
a first heater element (e.g. first heater element 230a) (fig.5),
a second heater element (e.g. second heater element 230b) (fig.5),
a bypass layer (i.e. bypass layer 250) (fig.5) that is a power feeding path to the first and second heater elements ([0132], electrical coupling between the first heater element 230 a and the bypass layer 250 and the electrical coupling between the second heater element 230 b and the bypass layer 250), and
a first power feeding terminal (e.g. one of the 8 power supply terminals 280) (fig.5), a second power feeding terminal (e.g. one of the 8 power supply terminals 280) (fig.5), a third power feeding terminal (e.g. one of the 8 power supply terminals 280) (fig.5), and a fourth power feeding terminal (e.g. one of the 8 power supply terminals 280) (fig.5) electrically connected to the bypass layer ([0137], The power supply terminal 280 is electrically coupled to the bypass layer 250),
the first heater element being located between the first major surface and the upper surface (e.g. 230a is located between 101 and upper surface of 300) (figs.2B and 5),
the second heater element being located between the first major surface and the first heater element or between the first heater element and the upper surface (e.g. 230b is located between 230a and upper surface of 300),
the first heater element including a plurality of zones (e.g. zones like region B3) (fig.7A),
the plurality of zones of the first heater element including
a first zone (e.g. zone comprising 230a) (fig.7B), the first zone including a first heater line (e.g. first heater line 239a) (fig.7B) emitting heat by allowing a current to flow ([0153], The length of the first heater element 230 a is the length of the path in which the current flows from the portion Ain where the current enters the first heater element 230 a to the portion Aout where the current exits from the first heater element 230 a), and
a first power feeding portion (e.g. portion of 230a where C4 is input) (fig.5) and a second power feeding portion (e.g. portion of 230a where C6 is output) (fig.5) feeding power to the first heater line ([0139], current flows from the power supply terminals 280 toward the bypass layer 250. As illustrated by arrow C3 and arrow C4),
the first power feeding portion being located at a position (e.g. position on 230a where C4 flows in) (fig.5) where the first power feeding portion does not overlap the first power feeding terminal in a Z-direction perpendicular to the first major surface (e.g. position of 280 where C1 originates does not overlap with position on 230a where C4 is input) (fig.5), the first power feeding portion being electrically connected to the first power feeding terminal via the bypass layer (e.g. connection as established by current flow from C1-C9) (fig.5),
the second power feeding portion being located at a position (e.g. position on 230a where C6 flows out) (fig.5) where the second power feeding portion does not overlap the second power feeding terminal in the Z-direction (e.g. position of 280 where C9 exits does not overlap with position on 230a where C6 is output) (fig.5), the second power feeding portion being electrically connected to the second power feeding terminal via the bypass layer (e.g. connection as established by current flow from C1-C9) (fig.5),
the second heater element including a plurality of zones (e.g. zones like region B3) (fig.7A),
the plurality of zones of the second heater element including
a second zone (e.g. zone comprising 230b) (fig.7B), the second zone including
a second heater line (e.g. first heater line 239b) (fig.7B) emitting heat by allowing a current to flow ([0157], the electrical resistance of the second heater element 230 b is the electrical resistance between the portion Bin where the current enters the second heater element 230 b and the portion Bout where the current exits from the second heater element 230 b), and
a third power feeding portion (e.g. portion of 230b where C4 is input) (fig.5) and a fourth power feeding portion (e.g. portion of 230b where C6 is output) (fig.5) feeding power to the second heater line ([0139], current flows from the power supply terminals 280 toward the bypass layer 250. As illustrated by arrow C3 and arrow C4),
the third power feeding portion being located at a position (e.g. position on 230a where C4 flows in) (fig.5) where the third power feeding portion does not overlap the third power feeding terminal in the Z-direction (e.g. position of 280 where C11 originates does not overlap with position on 230b where C4 is input) (fig.5), the third power feeding portion being electrically connected to the third power feeding terminal via the bypass layer (e.g. connection as established by current flow from C11-C19) (fig.5),
the fourth power feeding portion being located at a position (e.g. position on 230b where C6 flows out) (fig.5) where the fourth power feeding portion does not overlap the fourth power feeding terminal in the Z-direction (e.g. position of 280 where C19 exits does not overlap with position on 230b where C6 is output) (fig.5), the fourth power feeding portion being electrically connected to the fourth power feeding terminal via the bypass layer (e.g. connection as established by current flow from C11-C19) (fig.5),
at least one of the third power feeding terminal or the fourth power feeding terminal being located at a position (e.g. position of 280 where C19 exits) (fig.5) where the at least one of the third power feeding terminal or the fourth power feeding terminal overlaps (e.g. draw a virtual line from 280 where C19 exits towards 230b. An overlap can be seen in the position of 280) (fig.5) a virtual line segment (e.g. virtual line between the Bin and Bout positions) (fig.5) in the Z-direction (e.g. overlap is in up-down direction) (fig.5), the virtual line segment connecting a center of the first power feeding portion (e.g. center of portion of 230b where Bin occurs) (fig.5) and a center of the second power feeding portion (e.g. center of portion of 230b where Bout occurs) (fig.5).
Uefuji does not teach, the virtual line segment being a straight line connecting a center of the first power feeding portion and a center of the second power feeding portion at a shortest distance.
Prior art Vellanki (US 20230010049 A1) fig.4, Miwa (US 20210090930 A1) fig.5, Miwa2 (US 20210007183 A1) fig.6, Kanno (US 20060291132 A1) fig.3 and Kim (US 10224228 B2) fig.6 are found to be the closest prior art.
However, none of the prior art, taken singly or in combination, teach “the virtual line segment being a straight line connecting a center of the first power feeding portion and a center of the second power feeding portion at a shortest distance.”
Claims 17-19 are allowed, as they depend on allowed claim 16.
Regarding claim 1, Uefuji (US20180286732A1) substantially teach the claim limitations as indicated in claim 16. Uefuji does not teach, the first heater line including a plurality of extension portions extending along a first direction, the plurality of extension portions being arranged in a second direction perpendicular to the first direction, and a plurality of protruding portions provided in the plurality of extension portions, the plurality of protruding portions protruding in the second direction, the plurality of extension portions including a first extension portion and a second extension portion, the plurality of protruding portions including a first protruding portion provided in the first extension portion, and a second protruding portion provided in the second extension portion, the first protruding portion protruding toward the second protruding portion, the second protruding portion protruding toward the first protruding portion, the first zone including a first facing region in which the first protruding portion and the second protruding portion are disposed so as to face and be adjacent to each other.
Prior art Vellanki (US 20230010049 A1) fig.4, Miwa (US 20210090930 A1) fig.5, Miwa2 (US 20210007183 A1) fig.6, Kanno (US 20060291132 A1) fig.3 and Kim (US 10224228 B2) fig.6 are found to be the closest prior art.
However, none of the prior art, taken singly or in combination, teach “the first heater line including a plurality of extension portions extending along a first direction, the plurality of extension portions being arranged in a second direction perpendicular to the first direction, and a plurality of protruding portions provided in the plurality of extension portions, the plurality of protruding portions protruding in the second direction, the plurality of extension portions including a first extension portion and a second extension portion, the plurality of protruding portions including a first protruding portion provided in the first extension portion, and a second protruding portion provided in the second extension portion, the first protruding portion protruding toward the second protruding portion, the second protruding portion protruding toward the first protruding portion, the first zone including a first facing region in which the first protruding portion and the second protruding portion are disposed so as to face and be adjacent to each other”.
Regarding claims 2-5, they are allowed as they depend on allowed claim 1.
Regarding claim 6, it is allowed for the same reasons as indicated in claim 1.
Regarding claims 7-15, they are allowed as they depend on allowed claim 6.
Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee.  Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.”
Conclusion

CITED REFERENCE SUMMARIES: Ref US20180286732A1: Claims:
An electrostatic chuck, comprising: a ceramic dielectric substrate having a first major surface where a processing object is placed; an electrode layer provided in the ceramic dielectric substrate; a base plate supporting the ceramic dielectric substrate; and a heater plate provided between the base plate and the first major surface, the heater plate including a first heater element emitting heat due to a current flowing, and a second heater element emitting heat due to a current flowing, when viewed along a direction perpendicular to the first major surface, bends of the first heater element being more than bends of the second heater element, and the first heater element including a portion positioned at a gap of the second heater element.
a ceramic dielectric substrate having a first major surface where a processing object is placed;
an electrode layer provided in the ceramic dielectric substrate;
a base plate supporting the ceramic dielectric substrate; and
a heater plate provided between the base plate and the first major surface,
the heater plate including a first heater element emitting heat due to a current flowing, and a second heater element emitting heat due to a current flowing,
a first heater element emitting heat due to a current flowing, and
a second heater element emitting heat due to a current flowing,
when viewed along a direction perpendicular to the first major surface, bends of the first heater element being more than bends of the second heater element, and the first heater element including a portion positioned at a gap of the second heater element.
The chuck according to claim 1 , wherein the heater plate includes a plurality of first heater regions and a plurality of second heater regions, the first heater element includes a plurality of first heater electrodes provided independently from each other in the plurality of first heater regions, the second heater element includes a plurality of second heater electrodes provided independently from each other in the plurality of second heater regions, and the number of the first heater regions is larger than the number of the second heater regions.
the heater plate includes a plurality of first heater regions and a plurality of second heater regions,
the first heater element includes a plurality of first heater electrodes provided independently from each other in the plurality of first heater regions,
the second heater element includes a plurality of second heater electrodes provided independently from each other in the plurality of second heater regions, and
the number of the first heater regions is larger than the number of the second heater regions.
The chuck according to claim 2 , wherein an electrical resistance of the first heater electrode is higher than an electrical resistance of the second heater electrode.
The chuck according to claim 1 , wherein the second heater element includes a connection region where an electrically conductive body is connected, the electrically conductive body supplying electrical power to the second heater element, and at least a portion of the first heater element overlaps the connection region when viewed along a direction perpendicular to the first major surface.
the second heater element includes a connection region where an electrically conductive body is connected, the electrically conductive body supplying electrical power to the second heater element, and
at least a portion of the first heater element overlaps the connection region when viewed along a direction perpendicular to the first major surface.
The chuck according to claim 2 , wherein the heater plate further includes a bypass layer electrically connected to at least one of the first heater element or the second heater element, the bypass layer being electrically conductive.
The chuck according to claim 5 , wherein the bypass layer is electrically connected to both the first heater element and the second heater element.
The chuck according to claim 5 , wherein the bypass layer includes a plurality of bypass portions, and the number of the bypass portions electrically connected to the first heater element is not more than 2 times the number of the first heater regions.
the bypass layer includes a plurality of bypass portions, and
the number of the bypass portions electrically connected to the first heater element is not more than 2 times the number of the first heater regions.
The chuck according to claim 2 , wherein the first heater electrode is not provided in one of the plurality of first heater regions.
The chuck according to claim 2 , wherein the first heater electrode is not provided in one of the plurality of first heater regions, the heater plate includes an electrically conductive portion provided in the first heater region where the first heater electrode is not provided, and the electrically conductive portion is not supplied with power from the outside.
the first heater electrode is not provided in one of the plurality of first heater regions,
the heater plate includes an electrically conductive portion provided in the first heater region where the first heater electrode is not provided, and
the electrically conductive portion is not supplied with power from the outside.
The chuck according to claim 1 , wherein the heater plate further includes a third heater element emitting heat due to a current flowing, the third heater element is provided in a layer different from a layer where the first heater element is provided and different from a layer where the second heater element is provided, and when viewed along the direction perpendicular to the first major surface, bends of the third heater element are more than the bends of the second heater element, and the third heater element includes a portion positioned at a gap of the second heater element.
the heater plate further includes a third heater element emitting heat due to a current flowing,
the third heater element is provided in a layer different from a layer where the first heater element is provided and different from a layer where the second heater element is provided, and
when viewed along the direction perpendicular to the first major surface, bends of the third heater element are more than the bends of the second heater element, and the third heater element includes a portion positioned at a gap of the second heater element.
The chuck according to claim 1 , wherein the first heater element is provided between the first major surface and the second heater element.
The chuck according to claim 1 , wherein the heater plate further includes at least one of a first support plate or a second support plate, the first support plate is provided on the first heater element and the second heater element, the second support plate is provided under the first heater element and the second heater element, a thermal conductivity of the first support plate is higher than a thermal conductivity of the first heater element and higher than a thermal conductivity of the second heater element, and a thermal conductivity of the second support plate is higher than the thermal conductivity of the first heater element and higher than the thermal conductivity of the second heater element.
the heater plate further includes at least one of a first support plate or a second support plate,
the first support plate is provided on the first heater element and the second heater element,
the second support plate is provided under the first heater element and the second heater element,
a thermal conductivity of the first support plate is higher than a thermal conductivity of the first heater element and higher than a thermal conductivity of the second heater element, and
a thermal conductivity of the second support plate is higher than the thermal conductivity of the first heater element and higher than the thermal conductivity of the second heater element.
The chuck according to claim 12 , wherein at least one of the first support plate or the second support plate has multiple types of recesses having mutually-different depths.
The chuck according to claim 1 , wherein the first heater element includes a first connection portion, an electrically conductive body being connected to the first connection portion and supplying electrical power to the first heater element, the second heater element includes a second connection portion, an electrically conductive body being connected to the second connection portion and supplying electrical power to the second heater element, and a width of the first connection portion is narrower than a width of the second connection portion.
the first heater element includes a first connection portion, an electrically conductive body being connected to the first connection portion and supplying electrical power to the first heater element,
the second heater element includes a second connection portion, an electrically conductive body being connected to the second connection portion and supplying electrical power to the second heater element, and
a width of the first connection portion is narrower than a width of the second connection portion.
The chuck according to claim 1 , further comprising a power supply terminal supplying electrical power to the heater plate and being provided from the heater plate toward the base plate, the power supply terminal including: a connection member connected to a socket, the socket supplying the electrical power from the outside; a conducting lead portion finer than the connection member; a supporter connected to the conducting lead portion; and a coupling portion connected to the supporter and coupled to at least one of the first heater element or the second heater element, the power supply terminal supplying the electrical power to the at least one of the first heater element or the second heater element.
the power supply terminal including: a connection member connected to a socket, the socket supplying the electrical power from the outside; a conducting lead portion finer than the connection member; a supporter connected to the conducting lead portion; and a coupling portion connected to the supporter and coupled to at least one of the first heater element or the second heater element,
a connection member connected to a socket, the socket supplying the electrical power from the outside;
a conducting lead portion finer than the connection member;
a supporter connected to the conducting lead portion; and
a coupling portion connected to the supporter and coupled to at least one of the first heater element or the second heater element,
the power supply terminal supplying the electrical power to the at least one of the first heater element or the second heater element.
The chuck according to claim 1 , further comprising a power supply terminal supplying electrical power to the heater plate and being provided in the base plate, the power supply terminal including: a power supply portion connected to a socket, the socket supplying the electrical power from the outside; and a terminal portion connected to the power supply portion and pressed onto at least one of the first heater element or the second heater element.
the power supply terminal including: a power supply portion connected to a socket, the socket supplying the electrical power from the outside; and a terminal portion connected to the power supply portion and pressed onto at least one of the first heater element or the second heater element.
a power supply portion connected to a socket, the socket supplying the electrical power from the outside; and
a terminal portion connected to the power supply portion and pressed onto at least one of the first heater element or the second heater element.
The chuck according to claim 1 , further comprising: a first power supply terminal supplying electrical power to the heater plate and being provided in the base plate; and a second power supply terminal supplying electrical power to the heater plate and being provided from the heater plate toward the base plate, the first power supply terminal including a power supply portion connected to a socket, the socket supplying the electrical power from the outside, and a terminal portion connected to the power supply portion and pressed onto the first heater element, the first power supply terminal supplying the electrical power to the first heater element, the second power supply terminal including a connection member connected to a socket, the socket supplying the electrical power from the outside, a conducting lead portion finer than the connection member, a supporter connected to the conducting lead portion, and a coupling portion connected to the supporter and coupled to the second heater element, the second power supply terminal supplying the electrical power to the second heater element.
a first power supply terminal supplying electrical power to the heater plate and being provided in the base plate; and
a second power supply terminal supplying electrical power to the heater plate and being provided from the heater plate toward the base plate,
the first power supply terminal including a power supply portion connected to a socket, the socket supplying the electrical power from the outside, and a terminal portion connected to the power supply portion and pressed onto the first heater element,
a power supply portion connected to a socket, the socket supplying the electrical power from the outside, and
a terminal portion connected to the power supply portion and pressed onto the first heater element,
the first power supply terminal supplying the electrical power to the first heater element,
the second power supply terminal including a connection member connected to a socket, the socket supplying the electrical power from the outside, a conducting lead portion finer than the connection member, a supporter connected to the conducting lead portion, and a coupling portion connected to the supporter and coupled to the second heater element,
a connection member connected to a socket, the socket supplying the electrical power from the outside,
a conducting lead portion finer than the connection member,
a supporter connected to the conducting lead portion, and
a coupling portion connected to the supporter and coupled to the second heater element,
the second power supply terminal supplying the electrical power to the second heater element.
The chuck according to claim 5 , further comprising a power supply terminal supplying electrical power to the heater plate and being provided from the heater plate toward the base plate, the power supply terminal including: a connection member connected to a socket, the socket supplying the electrical power from the outside; a conducting lead portion finer than the connection member; a supporter connected to the conducting lead portion; and a coupling portion connected to the supporter and coupled to the bypass layer, the power supply terminal supplying the electrical power via the bypass layer to at least one of the first heater element or the second heater element.
the power supply terminal including: a connection member connected to a socket, the socket supplying the electrical power from the outside; a conducting lead portion finer than the connection member; a supporter connected to the conducting lead portion; and a coupling portion connected to the supporter and coupled to the bypass layer,
a coupling portion connected to the supporter and coupled to the bypass layer,
the power supply terminal supplying the electrical power via the bypass layer to at least one of the first heater element or the second heater element.
The chuck according to claim 5 , further comprising a power supply terminal supplying electrical power to the heater plate and being provided in the base plate, the power supply terminal including: a power supply portion connected to a socket, the socket supplying the electrical power from the outside; and a terminal portion connected to the power supply portion and pressed onto the bypass layer.
the power supply terminal including: a power supply portion connected to a socket, the socket supplying the electrical power from the outside; and a terminal portion connected to the power supply portion and pressed onto the bypass layer.
a terminal portion connected to the power supply portion and pressed onto the bypass layer.
The chuck according to claim 5 , further comprising: a first power supply terminal supplying electrical power to the heater plate and being provided in the base plate; and a second power supply terminal supplying electrical power to the heater plate and being provided from the heater plate toward the base plate, the first power supply terminal including a power supply portion connected to a socket, the socket supplying the electrical power from the outside, and a terminal portion connected to the power supply portion and pressed onto the bypass layer, the first power supply terminal supplying the electrical power to the first heater element, the second power supply terminal including a connection member connected to a socket, the socket supplying the electrical power from the outside, a conducting lead portion finer than the connection member, a supporter connected to the conducting lead portion, and a coupling portion connected to the supporter and coupled to the bypass layer, the second power supply terminal supplying the electrical power via the bypass layer to the second heater element.
the first power supply terminal including a power supply portion connected to a socket, the socket supplying the electrical power from the outside, and a terminal portion connected to the power supply portion and pressed onto the bypass layer,
a terminal portion connected to the power supply portion and pressed onto the bypass layer,
the second power supply terminal including a connection member connected to a socket, the socket supplying the electrical power from the outside, a conducting lead portion finer than the connection member, a supporter connected to the conducting lead portion, and a coupling portion connected to the supporter and coupled to the bypass layer,
the second power supply terminal supplying the electrical power via the bypass layer to the second heater element.
Ref US20210090930A1: Claims:
A holding device comprising: a plate-shaped member having a first surface approximately orthogonal to a first direction; heat generating resistors disposed in respective segments formed by virtually dividing at least part of the plate-shaped member, the segments being arranged in a direction orthogonal to the first direction; temperature measuring resistors disposed in the respective segments and located at a position in the first direction different from that of the heat generating resistors; and an electricity supply section that forms electricity supply paths for the heat generating resistors and the temperature measuring resistors, the holding device being adapted to hold an object on the first surface of the plate-shaped member, wherein a specific temperature measuring resistor that is at least one of the temperature measuring resistors includes a plurality of resistor elements disposed at different positions in the first direction and connected to one another in series.
a plate-shaped member having a first surface approximately orthogonal to a first direction;
heat generating resistors disposed in respective segments formed by virtually dividing at least part of the plate-shaped member, the segments being arranged in a direction orthogonal to the first direction;
temperature measuring resistors disposed in the respective segments and located at a position in the first direction different from that of the heat generating resistors; and
an electricity supply section that forms electricity supply paths for the heat generating resistors and the temperature measuring resistors,
the holding device being adapted to hold an objec
[Truncated to input limit]