Office Action 1: Non-Final Rejection (2024-11-12)
Rejection types: 102 - Lack of Novelty

CLAIMS:
CLAIMS

1\. A transfer apparatus comprising:
a transfer arm configured to transfer a member;
an irradiator configured to irradiate light obliquely onto a passage area, through which the member passes, when the member is transferred by the transfer arm;
a light receiver configured to receive light reflected from the member when the member passes through the passage
area; and
a controller configured to determine whether the member has passed through the passage area according to whether the light is received by the light receiver.

2\. The transfer apparatus of claim 1, comprising:
a plurality of the light receivers; and
a reflector configured to reflect the light irradiated from the irradiator to any one of the plurality of light receivers.

3\. The transfer apparatus of claim 1, wherein the member is a substrate.
4\. The transfer apparatus of claim 3, wherein both the irradiator and the light receiver are disposed on the same surface side of the substrate when the substrate passes through the passage area.

5\. The transfer apparatus of claim 3, wherein the substrate has a first surface on which an element is formed, and
when the substrate passes through the passage area, the irradiator irradiates the light to an area in which the element is not formed, of the first surface of the substrate.

6\. The transfer apparatus of claim 4, wherein the substrate has a first surface on which an element is formed, and
when the substrate passes through the passage area, the irradiator irradiates the light to an area in which the element is not formed, of the first surface of the substrate.

7\. The transfer apparatus of claim 3, wherein the substrate has a first surface on which an element is formed and a second surface opposite to the first surface, and
when the substrate passes through the passage area, the
irradiator irradiates the light to the second surface.

8\. The transfer apparatus of claim 4, wherein the substrate has a first surface on which an element is formed and a second surface opposite to the first surface, and
when the substrate passes through the passage area, the irradiator irradiates the light to the second surface.
9\. The transfer apparatus of claim 3, wherein the irradiator includes a first irradiator configured to irradiate light to a first partial area of the passage area and a second irradiator configured to irradiate light to a second partial area of the passage area, the first irradiator and the second irradiator are configured to irradiate light when the substrate is carried into a chamber, which is connected to a transfer chamber in which the transfer arm is provided, from the transfer chamber, the light receiver includes a first light receiver configured to receive light that is irradiated from the first irradiator and reflected from the substrate passing through the first partial area, and a second light receiver configured to receive light that is irradiated from the second irradiator and reflected from the substrate passing through the second partial area, and
the controller controls the transfer arm such that the substrate passes through the passage area and specifies a reference position of the substrate based on a movement amount of the substrate, a time point at which the first light receiver receives the light reflected from the first partial area, and a time point at which the second light receiver receives the light reflected from the second partial area, and controls the transfer arm to carry the substrate into the chamber such that the specified reference position of the substrate is disposed at a predetermined position in the chamber.

10\. The transfer apparatus of claim 9, wherein the light receiver further includes a third light receiver and a fourth light receiver, the transfer arm transfers the substrate between the transfer chamber and one of a first chamber and a second chamber that are disposed adjacent to each other in a vertical direction and connected to the transfer chamber, the irradiator irradiates the light to a first area and a second area, wherein the substrate passes through the first area when being transferred between the transfer chamber and the first chamber and the substrate passes through the second area when being transferred between the transfer chamber and the second chamber, the third light receiver receives light reflected from the substrate when the substrate passes through the first area, and
the fourth light receiver receives light reflected from the substrate when the substrate passes through the second area.
11\. The transfer apparatus of claim 3, wherein the light receiver includes a first light receiver and a second light receiver, the transfer arm transfers the substrate between a transfer chamber, in which the transfer arm is provided, and
one of a first chamber and a second chamber that are disposed adjacent to each other in a vertical direction and connected
to the transfer chamber, the irradiator irradiates the light to a first area and a second area, wherein the substrate passes through the first area when being transferred between the transfer chamber and the first chamber and the substrate passes through the second area when being transferred between the transfer chamber and the second chamber, the first light receiver receives the light reflected from the substrate when the substrate passes through the first area, and
the second light receiver receives the light reflected from the substrate when the substrate passes through the second area.

12\. A transfer method comprising:
a) irradiating light obliquely onto a passage area, through which a member passes, by an irradiator when the member is transferred by a transfer arm;
b) determining whether light reflected from the member is received by a light receiver when the member passes through
the passage area; and c) determining that the member has passed through the passage area when the light reflected from the member is received by the light receiver.

13\. The transfer method of claim 12, wherein the irradiator includes a first irradiator configured to irradiate light to a first partial area of the passage area and a second irradiator configured to irradiate light to a second partial area of the passage area, the first irradiator and the second irradiator are configured to irradiate light when the member is carried into a chamber, which is connected to a transfer chamber in which the transfer arm is provided, from the transfer chamber, the light receiver includes a first light receiver configured to receive light that is irradiated from the first irradiator and reflected from the first partial area, and a second light receiver configured to receive light that is irradiated from the second irradiator and reflected from the second partial area, and
the transfer method further comprises:
d) controlling the transfer arm such that the member passes through the passage area;
e) specifying a reference position of the member based on a movement amount of the member, a time point at which the first light receiver receives the light reflected from the first partial area, and a time point at which the second light receiver receives the light reflected from the second partial area; and
f) controlling the transfer arm to carry the member into the chamber such that the specified reference position of the
member is disposed at a predetermined position in the chamber. -38- -39- -40- -41- -42- -43- -44- 5 10 15 20 25

OFFICE ACTION:
DETAILED ACTION
Notice of Pre-AIA  or AIA  Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Priority
Receipt is acknowledged of certified copies of papers required by 37 CFR 1.55.
Information Disclosure Statement
The information disclosure statement (IDS) submitted on August 31, 2021 and February 2, 2024 is in compliance with the provisions of 37 CFR 1.97.  Accordingly, the information disclosure statement is being considered by the examiner.
Claim Rejections - 35 USC § 102
In the event the determination of the status of the application as subject to AIA  35 U.S.C. 102 and 103 (or as subject to pre-AIA  35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA  to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
Claims 1,3, and 12 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by JPH11145257A.
As to claim 1, JPH11145257A discloses a transfer apparatus, as illustrated in Figures 1-5, comprising a transfer arm (see paragraphs [0001] and [0003] of  JPH11145257A – Google Patents English Translation) configured to transfer a member (wafer 10); an irradiator (15) configured to irradiate light obliquely onto passage area, through which the member passes, when the member is transferred by the transfer arm; a light receiver (2) configured to receive light reflected from the member when the member passes through the passage area; and a controller (3) configured to determine whether the member has passed through the passage area according to whether the light is received by the light receiver (see paragraphs Abstract, [0003],  [0006], and [0008] of  JPH11145257A - Google Patents English Translation).
With claim 3, the member is a substrate (wafer 10).
As to claim 12, JPH11145257A discloses a transfer method (see paragraphs [0001] and [0003] of  JPH11145257A – Google Patents English Translation), as illustrated in Figures 1-5, comprising irradiating light obliquely onto a passage area (a light emitting unit 15 that emits infrared light – see paragraph [0003]), through which a member (wafer 10) passes, by an irradiator  (15) when the member is transferred by a transfer arm (see paragraph [0003] of  JPH11145257A – Google Patents English Translation); determining whether light reflected from the member is received by a light receiver (2) when the member passes through the passage area; and determining (controller 3) that the member has passed through the passage area when the light reflected from the member is received by the light receiver (see paragraphs Abstract, [0003],  [0006], and [0008] of  JPH11145257A - Google Patents English Translation).
Allowable Subject Matter
Claims 2, 4-11, and 13 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims.
Conclusion
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure.  Tumer, Eldridge, Hamakawa, Koshimizu, and Frankel are cited as being relevant art, because each prior art discloses a transfer apparatus comprising a transfer arm and a controller.

APPLICANT REBUTTAL: REMARKS/ARGUMENTS
Favorable reconsideration of this application is respectfully requested.
Claims 1, 2, 5, 7, 9-12 and 14-19 are pending in the present application. Claims 1, 5, 7, 9, 11 and 12 are amended; Claims 3, 4, 6, 8 and 13 are canceled without prejudice or disclaimer, and Claims 14-19 are newly added by the present amendment. Support for new Claims 14 and 15 can be found for example in Fig. 14 and the corresponding description, support for new Claim 16 can be found for example in Figs. 15 and 16 and the corresponding description, support for new Claim 17 can be found for example in Figs. 11 and 12 and the corresponding description, support for new Claim 18 can be found for example in Fig. 11 and the corresponding description, and support for new Claim 19 can be found for example in Fig. 12 and the corresponding description. No new matter is presented.
In the Office Action:
Claims 1, 3, and 12 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by JPH 11145257A.
Allowable Subject Matter
Applicant thanks the Examiner for the indication that Claims 2, 4-11, and 13 contain allowable subject matter. By this Amendment, without acceding to the rejections and solely to expedite passage of this application to issue, (1)
Claim 1 is amended to include subject matter based on the allowable subject matter of Claim 4 and its intervening Claim 3,
and (2)
Claim 12 is amended to include subject matter based on the allowable subject matter of Claim 13.
Therefore, Applicant respectfully submits that independent Claims 1 and 12, and any respective dependents, including new dependent Claims 14-19 are in condition for allowance.
Conclusion

NEXT OFFICE ACTION: Notice of Pre-AIA  or AIA  Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Reasons for Allowance
The following is an examiner’s statement of reasons for allowance:
The prior art of record neither anticipates nor renders obvious the claimed subject matter of the instant application as a whole either taken alone or in combination.  In particular, the prior art of record does not teach the transfer apparatus further having an irradiator and a light receiver  disposed on a same surface side of a substrate when the substrate passes through a passage area.
Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee.  Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.”
Conclusion

CITED REFERENCE SUMMARIES: Ref US20100025592A1: Claims:
A detector system comprising: a first scintillator; at least two first scintillator light detectors coupled to said first scintillator; and a board, wherein said first scintillator and said first scintillator light detectors are mounted upon said board.
a first scintillator;
at least two first scintillator light detectors coupled to said first scintillator; and
a board, wherein said first scintillator and said first scintillator light detectors are mounted upon said board.
The detector system of claim 1 , further comprising a second scintillator with at least two second scintillator light detectors coupled to said second scintillator, wherein said second scintillator is mounted on said board on a side of said first scintillator to form a detector array.
The detector system of claim 1 , wherein said first scintillator comprises a detector material selected from the group of detector materials consisting of CsI(Tl), CdWo 4 , CsF, NaI(Tl), CsI(Na), BGO, LSO, PbCO 3 and GSO.
The detector system of claim 1 , wherein said at least two first scintillator light detectors are selected from the group of light detectors consisting of diodes, photodiodes, avalanche photodiodes (APDs), photomultiplier tubes (PMTs), and Multi Anode PMTs.
A method of detecting a direction of a photon, comprising the steps of: positioning a first detector to receive a photon to create a first interaction in said first detector; determining a position of said first interaction; producing a recoil electron at said first interaction; positioning a second detector to receive said recoil electron to create a second interaction in said second detector; determining a position of said second interaction; determining a direction of a recoil of said recoil electron using said position of said first interaction and said position of said second interaction; and determining a direction of said photon using said direction of said recoil.
positioning a first detector to receive a photon to create a first interaction in said first detector;
determining a position of said first interaction;
producing a recoil electron at said first interaction;
positioning a second detector to receive said recoil electron to create a second interaction in said second detector;
determining a position of said second interaction;
determining a direction of a recoil of said recoil electron using said position of said first interaction and said position of said second interaction; and
determining a direction of said photon using said direction of said recoil.
The method of claim 5 , further comprising determining an energy of said first interaction and said second interaction.
The method of claim 5 , further comprising positioning a third detector to receive said recoil electron to create a third interaction in said third detector.
The method of claim 5 , further comprising scattering a photon in said first detector to create said first interaction.
A detector system for detecting a plurality of particles, said detector system comprising: an imaging detector, wherein a portion of said plurality of particles produces a plurality of signals in said imaging detector; a carrier with a first side coupled to said imaging detector to receive said plurality of signals from said imaging detector, wherein said first side of said carrier comprises at least one conductive path; and an integrated circuit with at least one input coupled to a second side of said carrier to receive said plurality of signals from said carrier, wherein said second side of said carrier comprises at least one conductive path, and wherein said integrated circuit processes a portion of said plurality of signals to produce an output.
an imaging detector, wherein a portion of said plurality of particles produces a plurality of signals in said imaging detector;
a carrier with a first side coupled to said imaging detector to receive said plurality of signals from said imaging detector, wherein said first side of said carrier comprises at least one conductive path; and
an integrated circuit with at least one input coupled to a second side of said carrier to receive said plurality of signals from said carrier, wherein said second side of said carrier comprises at least one conductive path, and wherein said integrated circuit processes a portion of said plurality of signals to produce an output.
The detector system of claim 9 , wherein said imaging detector is selected from the group consisting of pixel detectors, strip detectors, double sided pixel detectors and double sided strip detectors.
The detector system of claim 9 , wherein the detector material of said imaging detector is selected from the group consisting of HpGe, Ge, CdTe, CdZnTe, HgI 2 , GaAs, PbI 2 , CsI(Tl), CdWo 4 , CsF, NaI(Tl), CsI(Na), BGO, LSO, PbCO 3 and GSO.
A detector system for detecting a plurality of particles, comprising: a plurality of imaging detectors, wherein a portion of said plurality of particles produces a plurality of signals in said plurality of imaging detectors; a plurality of carriers, wherein a first side of a portion of said plurality of carriers is coupled to a portion of said plurality of imaging detectors to receive said plurality of signals from said plurality of imaging detectors, wherein said first side of said portion of said plurality of carriers comprises a plurality of conductive paths; and a plurality of integrated circuits with a plurality of inputs coupled to a second side of at least one portion of said plurality of carriers to receive said plurality of signals from said carriers, wherein said second side of said plurality of inputs comprises a plurality of conductive paths, and wherein a portion of said plurality of integrated circuits process a portion of said plurality of signals to produce an output.
a plurality of imaging detectors, wherein a portion of said plurality of particles produces a plurality of signals in said plurality of imaging detectors;
a plurality of carriers, wherein a first side of a portion of said plurality of carriers is coupled to a portion of said plurality of imaging detectors to receive said plurality of signals from said plurality of imaging detectors, wherein said first side of said portion of said plurality of carriers comprises a plurality of conductive paths; and
a plurality of integrated circuits with a plurality of inputs coupled to a second side of at least one portion of said plurality of carriers to receive said plurality of signals from said carriers, wherein said second side of said plurality of inputs comprises a plurality of conductive paths, and wherein a portion of said plurality of integrated circuits process a portion of said plurality of signals to produce an output.
The detector system of claim 12 , wherein a portion of said plurality of position sensitive detectors are selected from the group consisting of pixel detectors, strip detectors, double sided pixel detectors and double sided strip detectors.
The detector system of claim 9 , wherein said imaging detector comprises at least two position sensitive detectors.
The detector system of claim 12 , wherein the detector material of a portion of said plurality of imaging detectors is selected from the group consisting of HpGe, Ge, CdTe, CdZnTe, HgI 2 , GaAs, PbI 2 , CsI(Tl), CdWo 4 , CsF, NaI(Tl), CsI(Na), BGO, LSO, PbCO 3 and GSO.
The detector system of claim 9 , wherein said imaging detector comprises a direct conversion detector.
The detector system of claim 125 , wherein a formation design of said plurality of imaging detectors are selected from the group consisting of a one-side, a two-side, a three-side and a four-side abuttable design.
A method for producing at least one four side abuttable detector module for detecting a plurality of particles, said method comprising: mounting an imaging detector onto a first side of a carrier comprising a plurality of conductive paths, wherein said first side of said carrier has a surface area that is at most as large as a side of said imaging detector; coupling an integrated circuit to a second side of said carrier comprising a plurality of conductive paths, wherein said second side of said carrier has a surface area that is at most as large as a side of said integrated circuit; detecting a portion of said plurality of particles by said imaging detector; producing a plurality of signals that travels from said imaging detector through said carrier to said integrated circuit; and processing said portion said plurality of signals using said integrated circuit; and producing an output from said portion of said plurality of signals using said integrated circuit.
mounting an imaging detector onto a first side of a carrier comprising a plurality of conductive paths, wherein said first side of said carrier has a surface area that is at most as large as a side of said imaging detector;
coupling an integrated circuit to a second side of said carrier comprising a plurality of conductive paths, wherein said second side of said carrier has a surface area that is at most as large as a side of said integrated circuit;
detecting a portion of said plurality of particles by said imaging detector;
producing a plurality of signals that travels from said imaging detector through said carrier to said integrated circuit; and
processing said portion said plurality of signals using said integrated circuit; and
producing an output from said portion of said plurality of signals using said integrated circuit.
The method of claim 18 , wherein said imaging detector is selected from the group consisting of pixel detectors, strip detectors, double sided pixel detectors and double sided strip detectors.
The method of claim 18 , wherein a portion of said plurality of particles are selected from the group consisting of photons, electrons, positrons, protons, alpha particles, x-rays and gamma rays.
A detector system for detecting a plurality of particles, said detector system comprising: a detector, wherein said detector comprises a scintillator coupled to a solid-state light detector that is configured to produce a plurality of signals from a plurality of scintillation light from said plurality of particles; a board comprising a conductive path that is configured to receive a portion of said plurality of signals from said detector, wherein said detector is mounted to a first side of said board; and an integrated circuit comprising a plurality of inputs that is configured to receive a portion of said plurality of signals from said board and is configured to process a portion of said plurality of signals to produce an output, wherein said integrated circuit is mounted on a second side of said board.
a detector, wherein said detector comprises a scintillator coupled to a solid-state light detector that is configured to produce a plurality of signals from a plurality of scintillation light from said plurality of particles;
a board comprising a conductive path that is configured to receive a portion of said plurality of signals from said detector, wherein said detector is mounted to a first side of said board; and
an integrated circuit comprising a plurality of inputs that is configured to receive a portion of said plurality of signals from said board and is configured to process a portion of said plurality of signals to produce an output, wherein said integrated circuit is mounted on a second side of said board.
The detector system of claim 21 , wherein said scintillator is selected from the group consisting of CsI(Tl), CdWo 4 , CsF, NaI(Tl), CsI(Na), BGO, LSO, PbCO 3 and GSO.
The detector system of claim 21 , wherein said solid-state light detector is selected from the group consisting of diodes, photodiodes, PIN photodiodes, and avalanche photodiodes (APDs).
The detector system of claim 21 , wherein at least one portion of said plurality of particles are selected from the group consisting of photons, electrons, positrons, protons, alpha particles, x-rays and gamma rays.
The detector system of claim 9 , wherein a portion of said plurality of particles are selected from the group consisting of photons, electrons, positrons, protons, alpha particles, x-rays and gamma rays.
The detector system of claim 12 , wherein a portion of said plurality of particles are selected from the group consisting of photons, electrons, positrons, protons, alpha particles, x-rays and gamma rays.
The method of claim 18 , wherein at least one portion of said plurality of particles are selected from the group consisting of photons, electrons, positrons, protons, alpha particles, x-rays and gamma-rays.
The detector system of claim 25 , wherein a portion of said plurality particles said photons, said x-rays and said gamma-rays make at least one Compton scatter inside said imaging detector.
A method for detecting a plurality of particles, comprising: detecting a portion of said plurality of particles by an imaging detector; producing a plurality of signals from said plurality of particles using said imaging detector; coupling said imaging detector to a first side of a carrier comprising a plurality of conductive pads and paths, wherein said first side of said carrier has an output surface area that is at most a surface area of a side of said imaging detector; coupling an integrated circuit with a plurality of inputs to a second side of said carrier comprising a plurality of conductive pads and paths wherein said second side of said carrier has an output surface area that is at most a surface area of a side of said imaging detector; and processing a portion of said plurality of signals by said integrated circuit and producing an output.
detecting a portion of said plurality of particles by an imaging detector;
producing a plurality of signals from said plurality of particles using said imaging detector;
coupling said imaging detector to a first side of a carrier comprising a plurality of conductive pads and paths, wherein said first side of said carrier has an output surface area that is at most a surface area of a side of said imaging detector;
coupling an integrated circuit with a plurality of inputs to a second side of said carrier comprising a plurality of conductive pads and paths wherein said second side of said carrier has an output surface area that is at most a surface area of a side of said imaging detector; and
processing a portion of said plurality of signals by said integrated circuit and producing an output.
A method for detecting a plurality of particles, comprising: detecting a portion of said plurality of particles using an imaging detector; producing a plurality of signals from said plurality of particles using said imaging detector, wherein said imaging detector comprises a scintillator coupled to a solid-state light detector; coupling said imaging detector to a first side of a carrier comprising a plurality of connections wherein said first side of said carrier has an output surface area that is at most a surface area of a side of said imaging detector; coupling an integrated circuit with a plurality of inputs to a second side of said carrier comprising a plurality of connections, wherein said second side of said carrier has an output surface area that is at most a surface area of a side of said imaging detector; and processing a portion of said plurality of signals using said integrated circuit; and producing an output from said plurality of signals using said integrated circuit.
detecting a portion of said plurality of particles using an imaging detector;
producing a plurality of signals from said plurality of particles using said imaging detector, wherein said imaging detector comprises a scintillator coupled to a solid-state light detector;
coupling said imaging detector to a first side of a carrier comprising a plurality of connections wherein said first side of said carrier has an output surface area that is at most a surface area of a side of said imaging detector;
coupling an integrated circuit with a plurality of inputs to a second side of said carrier comprising a plurality of connections, wherein said second side of said carrier has an output surface area that is at most a surface area of a side of said imaging detector; and
processing a portion of said plurality of signals using said integrated circuit; and
producing an output from said plurality of signals using said integrated circuit.
The method of claim 30 , wherein said plurality of particles are selected from the group consisting of photons, electrons, positrons, protons, alpha particles, x-rays and gamma rays.
Ref US20070228110A1: Claims:
- 371 . (canceled)
Method of performing wirebonding, comprising: bonding a bond wire to a terminal with a capillary; playing the bond wire out of the capillary; while playing the bond wire out of the capillary, providing a gas flow within the capillary.
bonding a bond wire to a terminal with a capillary;
playing the bond wire out of the capillary;
while playing the bond wire out of the capillary, providing a gas flow within the capillary.
Method, according to claim 372 , further comprising: while playing the bond wire out of the capillary, configuring the bond wire to have a springable shape.
while playing the bond wire out of the capillary, configuring the bond wire to have a springable shape.
Ref US4496788A: Claims:
A photovoltaic device which converts solar energy to electric energy, comprising, in combination: a heterojunction solar cell comprising a crystalline semiconductor region and an amorphous or microcrystalline semiconductor region applied on said crystalline region with a p-n junction formed between said regions; an amorphous solar cell tandemly applied on said heterojunction solar cell in optical and electrical series therewith, and comprising a p-type region, an i-type region and an n-type region of amorphous or microcrystalline semiconductor material applied in seriatim layers with a p-i-n junction formed between said regions, and a p-n junction formed at the interface between said heterojunction solar cell and said amorphous solar cell.
a heterojunction solar cell comprising a crystalline semiconductor region and an amorphous or microcrystalline semiconductor region applied on said crystalline region with a p-n junction formed between said regions;
an amorphous solar cell tandemly applied on said heterojunction solar cell in optical and electrical series therewith, and comprising a p-type region, an i-type region and an n-type region of amorphous or microcrystalline semiconductor material applied in seriatim layers with a p-i-n junction formed between said regions, and
a p-n junction formed at the interface between said heterojunction solar cell and said amorphous solar cell.
The device according to claim 1, wherein said solar cells are placed from the light-receiving side in the order of decreasing width of the energy gap of said i-type region in said amorphous solar cell and said crystalline region in said heterojunction solar cell.
The device according to claim 1, wherein at least one of said amorphous or microcrystalline regions is deposited by the use of a low temperature process.
The device according to claim 1, wherein said crystalline semiconductor region in said heterojunction solar cell comprises a wafer.
The device according to claim 4, wherein said crystalline region has an irregular surface.
The device according to claim 1, wherein said crystalline semiconductor region in said heterojunction solar cell comprises a thin film deposited on a substrate of inorganic material or organic material.
The device according to claim 6, wherein said substrate has an irregular surface.
A photovoltaic device which converts solar energy to electric energy, comprising, in combination: a heterojunction solar cell comprising a crystalline semiconductor region and an amorphous or microcrystalline semiconductor region applied on said crystalline region with a p-n junction formed between said
[Truncated to input limit]