Office Action 2: Notice of Allowance (2024-09-28)

CLAIMS:
AMENDMENTS TO THE CLAIMS

The following Listing of the Claims will replace all prior versions and all prior listings of the claims in the present application:

Listing of the Claims

1\. (Currently Amended) An optical coherence tomography (OCT) system for profilometry measurements of a specimen, comprising:an interferometer configured to split incident light into a reference beam and a test beam, and to interfere the test beam reflected from the specimen with the reference beam reflected from a reference mirror to produce an interference pattern;
a spectrometer configured to analyze spectral components of the interference pattern at non-uniformly sampled wavenumbers;
a computer-readable memory configured to store a measurement model with elements connecting different depth values with different non-uniformly sampled wavenumbers and weighted with weights derived from a power spectral density (PSD) of the incident light for corresponding wavenumbers; and
a processor configured to determine the profilometry measurements of the specimen as a maximum likelihood estimate of the specimen surface depth by back-projection of\[\[ the\]\] measured intensities of the interference pattern with the measurement model.

2\. (Original) The OCT system of claim 1, wherein the depth values are uniformly sampled from a depth-measurement range with a resolution of the OCT system, and wherein the depth values are relative values with respect to a reference depth selected outside of the depth-measurement range.

3\. (Currently Amended) The OCT system of claim 1, wherein the processor is configured to estimate each profilometry measurement by executing a maximum likelihood estimator (MLE) to produce an argument of the maximum likelihood estimate of \[\[the\]\]a non-zero element in \[\[the\]\]a reflectivity vector corresponding, wherein each argument of the reflectivity vector corresponds to one of the depth values in the measurement model.

4\. (Currently Amended) The OCT system of claim 3, wherein the MLE is an approximate MLE, and wherein the execution of the approximate MLE comprises back-projecting \[\[the\]\]a data vector Page 2 of 7

through \[\[the\]\]a measurement matrix, and the MLE is the depth value corresponding to the largest- magnitude element in the back-projection.

5\. (Currently Amended) The OCT system of claim 3, wherein the MLE is an exact MLE, and wherein the execution of the exact MLE comprises refining \[\[the\]\]an approximate MLE by maximizing the maximum likelihood objective function using a gradient-free optimization method.

6\. (Currently Amended) The OCT system of claim 1, wherein the spectrometer comprises:a diffraction grating configured to diffract different beams of different wavelengths forming the interference pattern into different diffraction angles; and
a detector array with detecting elements arranged at the different diffraction angles to measure intensities of different beams corresponding to the intensities of \[\[the \]\]uniformly sampled wavelengths in the interference pattern.

7\. (Original) The OCT system of claim 6, wherein the detecting elements of the detector array are calibrated to map each index of the detecting elements in the detector array with a corresponding wavelength.

8\. (Currently Amended) The OCT system of claim 1, wherein the incident light includes an electromagnetic two-dimensional (2D) field directed by the interferometer to form an axial scan of the specimen, such that the measured intensities of the interference pattern include measurements corresponding to a sequence of points on a line of the specimen, wherein the processor is further configured to:extract a sequence of intensities corresponding to the sequence of points; and
process the intensities of different points concurrently with each, to produce the profilometry measurements for the sequence of points.

9\. (Original) The OCT system of claim 8, further comprising:a plurality of processing circuitry including the processor, for producing in parallel, the profilometry measurements for at least some points in the sequence of points.

10\. (Original) The OCT system of claim 8, further comprising:an actuator to direct the incident light into another line parallel to a line of a previous scan.

11\. (Original) The OCT system of claim 1, further comprising:an illumination source for producing the incident light, the illumination source includes one or a combination of a laser, a superluminescent diode (SLD), or a light-emitting diode (LED).

12\. (Original) The OCT system of claim 1, further comprising:a line-field generator including an extended light source of an angular size greater than a lateral resolution across the profilometry measurements, a lens arranged on a path of light emitted by the extended light source for focusing the light into an extended line-field light of a width greater than the lateral resolution, and a filter arranged in a focal plane of the lens for spatially filtering the extended line-field light into the incident light with a line-field of a width equal to the lateral resolution.

13\. (Original) The OCT system of claim 1, wherein the interferometer is a Michelson interferometer or a Linnik interferometer.

14\. (Currently Amended) The OCT system of claim 1, further comprising:a PSD calibrator configured to block \[\[the\]\]a sample arm of the interferometer so the measurement includes light only from the reference beam propagating in \[\[the\]\]a reference arm of the interferometer, such that the measured intensities of the interference pattern are a function of the PSD of the incident light for corresponding wavenumbers scaled with a responsivity of the spectrometer and reflectivity of the reference arm, and wherein during execution of the PSD calibrator, the processor is configured to calibrate the PSD of the incident light such that the wavenumber corresponding to each pixel of the spectrometer is estimated.

15\. (Currently Amended) A method for profilometry measurements of a specimen in an optical coherence tomography (OCT) system, the method comprising:splitting by an interferometer, incident light into a reference beam and a test beam, and interfering the test beam reflected from the specimen with the reference beam reflected from a reference mirror to produce an interference pattern;
analyzing by a spectrometer, spectral components of the interference pattern at non- uniformly sampled wavenumbers;
wherein a computer-readable memory of the OCT system stores a measurement model with elements connecting different depth values with different non-uniformly sampled wavenumbers Page 4 of 7

and weighted with weights derived from a power spectral density (PSD) of the incident light for corresponding wavenumbers; anddetermining the profilometry measurements of the specimen as a maximum likelihood estimate of the specimen surface depth by back-projection of\[\[ the\]\] measured intensities of the interference pattern with the measurement model.

16\. (Original) The method of claim 15, wherein the depth values are uniformly sampled from a depth-measurement range with a resolution of the OCT system, and wherein the depth values are relative values with respect to a reference depth selected outside of the depth-measurement range.

17\. (Currently Amended) The method of claim 15, further comprising estimating each profilometry measurement by executing a maximum likelihood estimator (MLE) to produce an argument of the maximum likelihood estimate of \[\[the\]\]a non-zero element in \[\[the\]\]a reflectivity vector corresponding, wherein each argument of the reflectivity vector corresponds to one of the depth values in the measurement model.

18\. (Currently Amended) The method of claim 17, wherein the MLE is an approximate MLE, and wherein the execution of the approximate MLE comprises back-projecting \[\[the\]\]a data vector through the measurement matrix, and the MLE is the depth value corresponding to the largest- magnitude element in the back-projection.

19\. (Currently Amended) The method of claim 17, wherein the MLE is an exact MLE, and wherein the execution of the exact MLE comprises refining \[\[the\]\]an approximate MLE by maximizing the maximum likelihood objective function using a gradient-free optimization method.

20\. (Currently Amended) A non-transitory computer readable medium having stored thereon computer-executable instructions which when executed by a computer, causes the computer to perform a method for profilometry measurements of a specimen in an optical coherence tomography (OCT) system, the method comprising:splitting by an interferometer, incident light into a reference beam and a test beam, and interfering the test beam reflected from the specimen with the reference beam reflected from a reference mirror to produce an interference pattern;

analyzing by a spectrometer, spectral components of the interference pattern at non- uniformly sampled wavenumbers;
wherein a computer-readable memory of the OCT system stores a measurement model with elements connecting different depth values with different non-uniformly sampled wavenumbers and weighted with weights derived from a power spectral density (PSD) of the incident light for corresponding wavenumbers; and
determining the profilometry measurements of the specimen as a maximum likelihood estimate of the specimen surface depth by back-projection of\[\[ the\]\] measured intensities of the interference pattern with the measurement model.

OFFICE ACTION:
DETAILED ACTION
Notice of Pre-AIA  or AIA  Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Response to Amendment
Applicant’s amendments, in combination with the below examiner’s amendment, filed 06 September 2024, have overcome the objections to the claims for minor informalities. The objections of the claims have been withdrawn.
EXAMINER’S AMENDMENT
An examiner’s amendment to the record appears below. Should the changes and/or additions be unacceptable to applicant, an amendment may be filed as provided by 37 CFR 1.312. To ensure consideration of such an amendment, it MUST be submitted no later than the payment of the issue fee.
Authorization for this examiner’s amendment was given in an interview with Gene Vinokur on 20 September 2024.
The application has been amended as follows:
Regarding claim 18, line 3 recites the limitation “through the measurement matrix” which has been amended to recite “through a measurement matrix” to provide proper antecedence in the claim.
Allowable Subject Matter
Claims 1-20 are allowed.
The following is an examiner’s statement of reasons for allowance:
Regarding claim 1, the prior art of record, taken alone or in combination, neither anticipates nor renders obvious an optical coherence tomography (OCT) system for profilometry measurements of a specimen, comprising: an interferometer configured to split incident light into a reference beam and a test beam, and to interfere the test beam reflected from the specimen with the reference beam reflected from a reference mirror to produce an interference pattern; a spectrometer configured to analyze spectral components of the interference pattern at non-uniformly sampled wavenumbers; a computer-readable memory configured to store a measurement model with elements connecting different depth values with different non-uniformly sampled wavenumbers and weighted with weights derived from a power spectral density (PSD) of the incident light for corresponding wavenumbers; and a processor configured to determine the profilometry measurements of the specimen as a maximum likelihood estimate of the specimen surface depth by back-projection of measured intensities of the interference pattern with the measurement model (emphasis added via bolded words).
Further regarding claim 1, see examiner’s reasons for allowance in the Ex Parte Quayle Action mailed 07 August 2024 for a further discussion on the allowability of claim 1.
Thus, claim 1 is allowed. Claims 2-14 depend on claim 1 and are therefore also allowed.
Regarding claim 15, the prior art of record, taken alone or in combination, neither anticipates nor renders obvious a method for profilometry measurements of a specimen in an optical coherence tomography (OCT) system, the method comprising: splitting by an interferometer, incident light into a reference beam and a test beam, and interfering the test beam reflected from the specimen with the reference beam reflected from a reference mirror to produce an interference pattern; analyzing by a spectrometer, spectral components of the interference pattern at non- uniformly sampled wavenumbers; wherein a computer-readable memory of the OCT system stores a measurement model with elements connecting different depth values with different non-uniformly sampled wavenumbers and weighted with weights derived from a power spectral density (PSD) of the incident light for corresponding wavenumbers; and determining the profilometry measurements of the specimen as a maximum likelihood estimate of the specimen surface depth by back-projection of measured intensities of the interference pattern with the measurement model (emphasis added via bolded words).
Further regarding claim 15, see examiner’s reasons for allowance in the Ex Parte Quayle Action mailed 07 August 2024 for a further discussion on the allowability of claim 15.
Thus, claim 15 is allowed. Claims 16-19 depend on claim 15 and are therefore also allowed.
Regarding claim 20, the prior art of record, taken alone or in combination, neither anticipates nor renders obvious a non-transitory computer readable medium having stored thereon computer-executable instructions which when executed by a computer, causes the computer to perform a method for profilometry measurements of a specimen in an optical coherence tomography (OCT) system, the method comprising: splitting by an interferometer, incident light into a reference beam and a test beam, and interfering the test beam reflected from the specimen with the reference beam reflected from a reference mirror to produce an interference pattern; analyzing by a spectrometer, spectral components of the interference pattern at non- uniformly sampled wavenumbers; wherein a computer-readable memory of the OCT system stores a measurement model with elements connecting different depth values with different non-uniformly sampled wavenumbers and weighted with weights derived from a power spectral density (PSD) of the incident light for corresponding wavenumbers; and determining the profilometry measurements of the specimen as a maximum likelihood estimate of the specimen surface depth by back-projection of measured intensities of the interference pattern with the measurement model (emphasis added via bolded words).
Further regarding claim 20, see examiner’s reasons for allowance in the Ex Parte Quayle Action mailed 07 August 2024 for a further discussion on the allowability of claim 20.
Thus, claim 20 is allowed.
Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee.  Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.”
Conclusion

APPLICANT REBUTTAL: Response to CTEQ dated August 7, 2024
Appl. Ser. No. 17/932_215
Atty. Dkt. No. MERL-3515
REMARKS
Claims 1-20 are pending. Claims 1, 3-6, 8, 14, 15, and 17-20 have been amended. No new matter is introduced. Reconsideration and allowance of the claims is respectfully requested.
Claim Ob
j
ection
Claims 1, 3-6, 8, 14, 15, and 17-20 have been amended as set forth above to correct the antecedence issues arising from the language of the claims as originally filed. Applicant would like to thank the Examiner for suggesting the amendments to overcome the issues. In view of the amendments, the antecedence issues outlined in the Ex-Parte Quayle Actions stand addressed. Reconsideration and withdrawal of the objections is respectfully requested.
AUTHORIZATION TO CHARGE DEPOSIT ACCOUNT
The undersigned authorizes the charging of any necessary fees, including any extensions of time fees required to place the application in condition for allowance by Examiner's Amendment, to Deposit Account No. 50-0749 in order to maintain pendency of this application.
CONCLUSION