# Internet Resources

* This wikibook links extensively to wikipedia, but also to many valuable external resources.
See also
* Integrated circuit
* Microelectronics
* Sensors
* Actuators
* Transducers
* Microfluidics

# Books

Books about microfabrication
* "Fundamentals of Microfabrication" (2nd ed, 2002) by M. Madou - highly recommended!
* "Introduction to Microfabrication" (2004) by S. Franssila

# Journals

Overview of the microtechnology related journals and their impact factors (Aug. 2006 values)
Microtechnology Journals :
| Journal | Impact Factor | Comments |
| American Journal of Physics (AJP) | 0.82 | ? |
| IEEE Transactions of Electron Devices | ? | IEEE |
| Electronics Letters | 1.0 | ? |
| Journal of Applied Physics | 2.5 | ? |
| Journal of Materials Processing Technology | 0.6 | ? |
| Journal of Microelectromechanical Systems (J.MEMS) | 3 | ? |
| Journal Of Microlithography Microfabrication And Microsystems | 1.4 | ? |
| Journal of Micromechanics and Microengineering | 2.5 | ? |
| Journal of Microsystem Technologies | 0.72 | microsystem technologies-micro-and nanosystems-information storage and processing systems |
| Journal of Solid-state electronics | 1.2 | ? |
| Journal of Vacuum Science and Technology A (JVSTA) | 1.4 | Vacuum, Surfaces, Films |
| Journal of Vacuum Science and Technology B (JVSTB) | 1.6 | Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena |
| Lab on a Chip | 5.3 | ? |
| Microelectronic Engineering | 1.4 | ? |
| Microelectronics Journal | 0.35 | ? |
| Sensor Letters | 1.1 | ? |
| Sensors and Actuators A: Physical | 1.4 | ? |
| Sensors and Actuators B: Chemical | 2.6 | ? |
| Surface and Coatings Technology | 1.6 | ? |

# Software
## Layout Editor

* L-Edit
* LinkCAD
* CleWin

## MEMS Simulation

* Coventor
* Intellisuite

## Optical Simulations

* Olympios

# Microfabrication Products & Companies

Where to buy raw materials, wafers etc, and where to get the fabrication done is you cannot readily access cleanroom facilities.

## Foundry services

* Danchip- cleanroom access for both industry and universities
* Freescale
* Honeywell MEMS Foundry Services
* X-fab
* Micrel's Wafer Fab Division
* ISSYS
* Micralyne MEMS Foundry

## Suppliers of materials for microfabrication
### Wafers
#### Silicon on insulator (SOI) wafers

* Icemostech ; UK; [sales@Icemostech.com]; Device layer +/- 0.5 µm
* University wafers ; USA; Chris Baker [@universitywafer.com]; All kinds of wafers, possibility of small quantities
* Soitec ; France; Sabrina Grosdidier [sabrina.grosdidier@soitec.fr]; High quality SOI, device layer +/- 5 nm
* MEMC USA Marco Maffe [mmaffe@memc.it]; Device layer +/- 0.5 µm
* Ultrasil ; USA; Thomas J. Gentemann [ultrasiltg@aol.com]; Device layer +/- 0,5 µm, next day shipment of wafers from online inventory
* Okmetic Oyj ; Finland; Veli-Pekka Virtanen [veli-pekka.virtanen@okmetic.com]; Device layer +/- 0.5 µm
* IBIS ; USA; High quality SOI; Device layer +/- 5 nm

# Microtechnology Products

* Intel

# A Microtechnology Timeline

* The first transistor
* The first microchip
* The first microprocessor
* 1965 Moores Law
* The roadmap
* The first PCR lab-on-a-chip system
* The first point-of-care lab on a chip system

# References

See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.