Nanopositioning Technologies [electronic resource] : Fundamentals and Applications /
Ru, Changhai.editor.
Liu, Xinyu.editor.
Sun, Yu.editor.(orcid)0000-0001-7895-0741https://orcid.org/0000-0001-7895-0741edt
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Description based upon print version of record.
Includes bibliographical references at the end of each chapters.
1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Nanotechnology.
Electronics.
Microelectronics.
Control engineering.
Robotics.
Mechatronics.
Engineering design.
Nanotechnology and Microengineering.
Electronics and Microelectronics, Instrumentation.
Control, Robotics, Mechatronics.
Engineering Design.