Simulation and design of microsystems and microstructures /
International Conference on Simulation and Design of Microsystems and Microstructures(1st :1995 :Southampton, England)
Adey, R. A.(Robert Anthony),1948-
Lahrmann, A.
Leℓmölmann, C.
Wessex Institute of Technology.
Project MASS.
Technische Universität Berlin.
MicroParts.
Southampton : Computational Mechanics,
c1995.
Microstructure
Micromechanics
Microelectronics