Nanolithography and patterning techniques in microelectronics /
Bucknall, David G.
Institute of Materials, Minerals, and Mining
Boca Raton, Fla. : CRC Press ; Cambridge : Woodhead Publishing Limited,
2005.
"On behalf of the Institute of Materials, Minerals & Mining."
Includes bibliographical references and index.
Microlithography.
Nanotechnology.