Journal of micromechanics and microengineering.
Institute of Physics Publishing.
Title from journal home page (IOP Science, viewed February 16, 2015).
Latest issue consulted: volume 25, number 2 (February 2015) (viewed February 16, 2015).
Microelectromechanical systems
Micromechanics
Journal of micromechanics and microengineering
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