Microsim II : simulation and design of microsystems and microstructures [Second International Conference on the Simulation and Design of Microsystems and Microstructures] /
International Conference on the Simulation and Design of Microsystems and Microstructures(2nd :1997 :Lausanne, Switzerland)
Renaud, Ph.
Adey, R. A.(Robert Anthony),1948-
Southampton : Computational Mechanics,
c1998.
Includes index.
Microstructure
Micromechanics
Microelectronics