Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
Bullis, W. Murray,1930-
Perkowitz, S.
Seiler, David G.
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O.,
1995.
"December 1995."
Includes bibliographical references (p. 22-23).
Semiconductors
Semiconductors
Semiconductors