Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics Strasbourg, France, 16-19 June, 1998 /
Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics(1998 :Strasbourg, France)
Lindner, J. K. N.(Jörg K. N.)
European Materials Research Society.
E-MRS Spring Meeting(1998 :Strasbourg, France)
Amsterdam ; Oxford : Elsevier,
c1999.
Reprinted from Nuclear Instruments and Methods B, vol.147/1-4.
Includes bibliographical references and index.
Oxides
Ceramics
Semiconductors
Ion implantation