Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A. /
Baklanov, Mikhail R.
Materials Research Society.
Materials Research Society.Meeting(2011 :San Francisco, Calif.)
Warrendale, Penn. : Materials Research Society ; Cambridge ; New York : Cambridge University Press,
2012.
"2011 MRS Spring Meeting"-- cover.
"Symposium O, 'Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, held at the April 25-29, 2011 MRS Spring Meeting in San Francisco, California"--P. ix.
Includes bibliographical references and indexes.
Interconnects (Integrated circuit technology)
Integrated circuits
Microelectronics
Nanoelectronics
Materials