IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
IEEE Components, Hybrids, and Manufacturing Technology Society.
IEEE Electron Devices Society.
IEEE Reliability Society.
IEEE Solid-State Circuits Council.
Institute of Electrical and Electronics Engineers.
New York, N.Y. : Institute of Electrical and Electronics Engineers,
c1988-
Title from cover.
Semiconductors
Available in microfiche and microfilm.