Capacitance cell measurement of the out-of-plane expansion of thin films /
Snyder, Chad R.
Mopsik, Frederick I.
National Institute of Standards and Technology (U.S.)
[Gaithersburg, Md.] : National Institute of Standards and Technology,
2001.
"November 2001."
At head of title: "NIST recommended practice guide."
Includes bibliographical references (p. 31-32).
Thin-film circuits.
Thin films
Expansion, Heat