Materials aspects in microsystem technologies : proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998 /
Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS(1998 :Strasbourg, France)
Barbier, D.(Daniel)
European Materials Research Society.
E-MRS Spring Conference(1998 :Strasbourg, France)
Amsterdam ; Oxford : Elsevier,
1999.
Reprinted from: Sensors and actuators, v. 74, no. 1-3, 1999.
Includes bibliographical references and index.
Detectors
Microactuators
Microelectronics
Microelectromechanical systems