Polymeric materials for microelectronic applications : science and technology /
Ito, Hiroshi.
Tagawa, Seichi.
Horie, Kazuyuki,1941-
Kōbunshi Gakkai (Japan).Polymers for Microelectronics and Photonics Group.
American Chemical Society.Division of Polymeric Materials: Science and Engineering.
Washington, D.C. : American Chemical Society,
c1994.
"Developed from a symposium sponsored by the Polymers for Microelectronics and Photonics Group of the Society of Polymer Science, Japan, and the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society, at the polymers for microelectronics 1993 meeting, Kawasaki, Japan, November 15-19, 1993."
Includes bibliographical references and indexes.
Microelectronics
Polymers