Micro- and nanoscale systems- : novel materials, structures and devices : symposium held December 1-6, 2013 Boston, Massachusetts, U.S.A. /
Boeckl, John J.,editor.
Materials Research Society.Fall Meeting(2013 :Boston, Mass.)
Microelectromechanical Systems - Materials and Devices (Symposium)(2013 :Boston, Mass.)
Nanowires and Nanotubes - Novel Materials, Advanced Heterostructures, Doping and Devices (Symposium)(2013 :Boston, Mass.)
Includes bibliographical references and index.
Microelectromechanical systems
Nanostructured materials
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