MEMS : applications /
Gad-el-Hak, Mohamed,1945-
Boca Raton, Fla. ; London : CRC/Taylor & Francis,
2006.
One of three parts whose previous edition was a published as a single volume.
Includes bibliographical references and index.
Microelectromechanical systems.
Detectors.
Microactuators.
Robots.