Microsystems & nanoengineering.
Zhongguo ke xue yuan.Dian zi xue yan jiu suo.
Refereed/Peer-reviewed
Electronic resource type: Journal.
Description based on: (2015) 1, 15001; title from PDF caption (publisher's Web site, viewed Dec. 2, 2016).
Latest issue consulted: Volume 5, issue 1 (December 2019); (Nature.com website, viewed January 16, 2020).
Microelectromechanical systems
Nanotechnology
Microelectromechanical systems.
Nanotechnology.
Micro-Electrical-Mechanical Systems.
Nanotechnology.