Comprehensive microsystems /
Gianchandani, Yogesh B.
Tabata, Osamu,1956-
Zappe, Hans P.
Amsterdam ; London : Elsevier,
c2008.
v. 1. Materials, fabrication and packaging, electronics and systems design -- v. 2. Actuation mechanism, physical sensing, chemical and biological systems -- v. 3. Optical systems, industrial applications, emerging topics.
Microelectromechanical systems.