Contamination-free manufacturing for semiconductors and other precision products /
Donovan, R. P.
New York : Marcel Dekker,
2001.
Includes bibliographical references and index.
National technology roadmap for semiconductors : basis and alignment / David Jensen -- Off-wafer measurement of contaminants / Robert P. Donovan -- On-wafer measurement of particles / Rodolfo E. Díaz, Brent M. Nebeker, and E. Dan Hirleman -- On-wafer measurement of molecular contaminants / Victor K.F. Chia and Michael J. Edgell -- Transport and deposition of aerosol particles / Anthony S. Geller and Daniel J. Rader -- Particulate deposition in liquid systems / Deborah J. Riley -- Deposition of molecular contaminants in gaseous environments / Allyson L. Hartzell -- Organic contamination removal / Steven Verhaverbeke and Kurt Christenson -- Deposition of metallic contaminants from liquids and their removal / Steven Verhaverbeke -- Sources of contamination and their control / David Jensen.
Semiconductors
Semiconductors