Microsystems and Nanotechnology [electronic resource] /
Zhou, Zhaoying.editor.
Wang, Zhonglin.editor.
Lin, Liwei.editor.
“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.
Originally published in Chinese: Tsinghua University Press, 2011.
Includes bibliographical references.
Part 1.The Fundamentals of Microsystems and Nanotechnology.-  Information Electronics Of Nano-era -- Micro/Nano Fluidics -- Materials  Problems in MEMS -- Nanomechanics in Crossed Multidiscipline -- Nano Structure and Monomolecular Electronic Transport Feature -- Nanomaterials structural Analysis and Attribute -- Part 2.Microsystems -- MEMS Introduction -- Micro Electromechanical Sensor -- Microactuator -- MEMS Design -- MEMS Processing and Fabrication Techniques and Technology -- Optical MEMS and Nano-Photonics -- Introduction of MEMS Packaging -- Part 3.Nanotechnology.-  Nanotube , Nanoware , Nanobelt -- Semiconductor NanoCrystal-- Quantum Dot ,Quantum Wire, Quantum Rod -- The Application of STM and AFM in Nano Process and Fabrication -- Nanoscale Fabrication -- Integration Nanotechnology based on MEMS Manufacture Technology -- Part 4.Microsystems and Nanotechnology Application -- MEMS Application -- Micro-electromechanical Sensor System -- A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry -- MEMS in Automobile -- Biochips -- Nanotechnology in Biological and Medical Applications -- Part 5.Development and Prospect -- Development and Prospect.
“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.
Nanotechnology.
Nanotechnology.