Ion implantation range data for silicon and germanium device technologies
Smith, Bernard,1938-
Oxford Learned Information (Europe) Ltd [Berkhamsted] [Distributed by ASR (Marketing) Ltd]
1977 [i.e. 1978]
Previous ed.: published as 'Projected ion range data for silicon planar technology'. s.l. : A.E.R.E., 1971
Ion implantation