MEMS, bioMEMS and bioelectronics : materials and devices : symposium held November 28-December 2 2011, Boston, Massachusetts, U.S.A. /
Albrecht, Tim.
Materials Research Society.
Materials Research Society.Meeting(2011 :Boston, Mass.)
Warrendale, Pa. : Materials Research Society ; Cambridge : Cambridge University Press,
2012.
Includes papers from sessions of the 2011 MRS Fall Meeting.
Includes bibliographical references and index.
Microelectromechanical systems
Biotechnology
Bioelectronics
Nanotechnology