Contamination and ESD control in high-technology manufacturing /
Welker, R. W.
Nagarajan, R.(Ramamurthy)
Newberg, Carl E.
Hoboken, N.J. : John Wiley & Sons : IEEE Press,
c2006.
Includes bibliographical references and index.
Electronic apparatus and appliances
Electric discharges.
Electrostatics.
Contamination (Technology)
Clean rooms.