Foundations of MEMS /
Liu, Chang,Ph.D.
Mungurwadi, Vaishali B.
Nandi, Anil V.
Upper Saddle River : Prentice Hall,
c2012.
Rev. ed. of Foundations of MEMS / Chang Liu, 2006.
"International edition".
Includes bibliographical references and index.
Microelectromechanical systems.