Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A. /
Materials Research Society.Meeting(2010 :Boston, Mass.).Symposium S.
DelRio, Frank W.
Warrendale, Pa. : Materials Research Society ; Cambridge : Cambridge University Press,
c2011.
Papers presented at Symposium S, 'Microelectromechanical Systems--Materials and Devices IV,' held at the 2010 MRS Fall Meeting in Boston, Mass.
Includes bibliographical references and indexes.
Microelectromechanical systems
Microelectromechanical systems
Thin films
Nanostructured materials
Silicon